blob: a5fb00739b26c008c3d7a526f229c7f7bb960468 [file] [log] [blame]
user_project_wrapper
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Diffusion width < 0.15um (diff/tap.1)
----------------------------------------
1305.425 2197.040 1305.440 2197.085
1305.440 2197.040 1305.860 2197.085
1305.860 2197.040 1305.875 2197.085
1306.145 2197.040 1306.160 2197.085
1306.160 2197.040 1306.580 2197.085
1306.580 2197.040 1306.595 2197.085
1306.865 2197.040 1306.880 2197.085
1306.880 2197.040 1307.300 2197.085
1307.300 2197.040 1307.315 2197.085
1307.585 2197.040 1307.600 2197.085
1307.600 2197.040 1308.020 2197.085
1308.020 2197.040 1308.035 2197.085
1308.305 2197.040 1308.320 2197.085
1308.320 2197.040 1308.740 2197.085
1308.740 2197.040 1308.755 2197.085
1309.025 2197.040 1309.040 2197.085
1309.040 2197.040 1309.460 2197.085
1309.460 2197.040 1309.475 2197.085
1309.745 2197.040 1309.760 2197.085
1309.760 2197.040 1310.180 2197.085
1310.180 2197.040 1310.195 2197.085
1310.465 2197.040 1310.480 2197.085
1310.480 2197.040 1310.900 2197.085
1310.900 2197.040 1310.915 2197.085
1305.425 2195.425 1305.440 2195.470
1305.860 2195.425 1305.875 2195.470
1306.145 2195.425 1306.160 2195.470
1306.580 2195.425 1306.595 2195.470
1306.865 2195.425 1306.880 2195.470
1307.300 2195.425 1307.315 2195.470
1307.585 2195.425 1307.600 2195.470
1308.020 2195.425 1308.035 2195.470
1308.305 2195.425 1308.320 2195.470
1308.740 2195.425 1308.755 2195.470
1309.025 2195.425 1309.040 2195.470
1309.460 2195.425 1309.475 2195.470
1309.745 2195.425 1309.760 2195.470
1310.180 2195.425 1310.195 2195.470
1310.465 2195.425 1310.480 2195.470
1310.900 2195.425 1310.915 2195.470
1305.425 2193.710 1305.440 2193.755
1305.440 2193.710 1305.860 2193.755
1305.860 2193.710 1305.875 2193.755
1306.145 2193.710 1306.160 2193.755
1306.160 2193.710 1306.580 2193.755
1306.580 2193.710 1306.595 2193.755
1306.865 2193.710 1306.880 2193.755
1306.880 2193.710 1307.300 2193.755
1307.300 2193.710 1307.315 2193.755
1307.585 2193.710 1307.600 2193.755
1307.600 2193.710 1308.020 2193.755
1308.020 2193.710 1308.035 2193.755
1308.305 2193.710 1308.320 2193.755
1308.320 2193.710 1308.740 2193.755
1308.740 2193.710 1308.755 2193.755
1309.025 2193.710 1309.040 2193.755
1309.040 2193.710 1309.460 2193.755
1309.460 2193.710 1309.475 2193.755
1309.745 2193.710 1309.760 2193.755
1309.760 2193.710 1310.180 2193.755
1310.180 2193.710 1310.195 2193.755
1310.465 2193.710 1310.480 2193.755
1310.480 2193.710 1310.900 2193.755
1310.900 2193.710 1310.915 2193.755
1305.425 2192.095 1305.440 2192.140
1305.860 2192.095 1305.875 2192.140
1306.145 2192.095 1306.160 2192.140
1306.580 2192.095 1306.595 2192.140
1306.865 2192.095 1306.880 2192.140
1307.300 2192.095 1307.315 2192.140
1307.585 2192.095 1307.600 2192.140
1308.020 2192.095 1308.035 2192.140
1308.305 2192.095 1308.320 2192.140
1308.740 2192.095 1308.755 2192.140
1309.025 2192.095 1309.040 2192.140
1309.460 2192.095 1309.475 2192.140
1309.745 2192.095 1309.760 2192.140
1310.180 2192.095 1310.195 2192.140
1310.465 2192.095 1310.480 2192.140
1310.900 2192.095 1310.915 2192.140
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MV diffusion to LV nwell spacing < 0.825um (hvi.5 + nsd/psd.5)
----------------------------------------
1303.510 2198.570 1304.335 2199.265
1303.510 2197.445 1304.205 2198.570
1303.930 2197.445 1304.205 2198.270
1312.135 2197.445 1312.410 2198.270
1303.510 2198.570 1304.335 2199.095
1303.510 2196.215 1304.205 2198.570
1303.510 2196.215 1304.205 2197.040
1304.615 2198.570 1305.440 2198.795
1305.335 2198.570 1306.160 2198.795
1306.055 2198.570 1306.880 2198.795
1306.775 2198.570 1307.600 2198.795
1307.495 2198.570 1308.320 2198.795
1308.215 2198.570 1309.040 2198.795
1308.935 2198.570 1309.760 2198.795
1309.655 2198.570 1310.480 2198.795
1310.760 2198.570 1311.585 2198.795
1310.760 2198.570 1311.585 2199.095
1312.135 2196.215 1312.830 2197.040
1303.510 2192.885 1304.205 2196.145
1303.510 2192.885 1304.205 2193.710
1312.135 2192.885 1312.830 2193.710
1303.510 2190.460 1304.205 2192.815
1303.510 2189.935 1304.335 2190.460
1304.615 2190.235 1305.440 2190.460
1304.615 2190.235 1306.685 2190.460
1305.335 2190.235 1306.160 2190.460
1305.335 2190.235 1307.405 2190.460
1306.055 2190.235 1306.880 2190.460
1306.055 2190.235 1308.125 2190.460
1306.775 2190.235 1307.600 2190.460
1306.775 2190.235 1308.845 2190.460
1307.495 2190.235 1308.320 2190.460
1307.495 2190.235 1309.565 2190.460
1308.215 2190.235 1309.040 2190.460
1308.215 2190.235 1310.285 2190.460
1308.935 2190.235 1309.760 2190.460
1308.935 2190.235 1311.005 2190.460
1309.655 2190.235 1310.480 2190.460
1309.655 2190.235 1311.725 2190.460
1310.760 2189.935 1311.585 2190.460
1310.760 2190.235 1311.585 2190.460
1303.510 2190.460 1304.205 2191.585
1303.510 2189.765 1304.335 2190.460
1303.510 2190.460 1304.205 2190.590
1312.135 2190.460 1312.830 2190.590
1303.510 2189.765 1312.830 2190.460
1303.510 2198.570 1312.830 2199.265
1303.510 2198.440 1304.205 2198.570
1312.135 2198.440 1312.830 2198.570
1304.755 2198.570 1305.580 2199.095
1304.615 2198.570 1306.685 2198.795
1305.335 2198.570 1307.405 2198.795
1306.055 2198.570 1308.125 2198.795
1306.775 2198.570 1308.845 2198.795
1307.495 2198.570 1309.565 2198.795
1308.215 2198.570 1310.285 2198.795
1308.935 2198.570 1311.005 2198.795
1309.655 2198.570 1311.725 2198.795
1304.755 2198.570 1305.580 2198.795
1305.860 2198.570 1306.685 2198.795
1306.580 2198.570 1307.405 2198.795
1307.300 2198.570 1308.125 2198.795
1308.020 2198.570 1308.845 2198.795
1308.740 2198.570 1309.565 2198.795
1309.460 2198.570 1310.285 2198.795
1310.180 2198.570 1311.005 2198.795
1310.900 2198.570 1311.725 2198.795
1312.005 2198.570 1312.830 2199.095
1312.135 2196.215 1312.830 2198.570
1312.005 2198.570 1312.830 2199.265
1312.135 2197.445 1312.830 2198.570
1303.510 2195.320 1304.205 2196.145
1312.135 2195.320 1312.830 2196.145
1312.135 2192.885 1312.830 2196.145
1303.510 2191.990 1304.205 2192.815
1312.135 2191.990 1312.830 2192.815
1304.755 2190.235 1305.580 2190.460
1305.860 2190.235 1306.685 2190.460
1306.580 2190.235 1307.405 2190.460
1307.300 2190.235 1308.125 2190.460
1308.020 2190.235 1308.845 2190.460
1308.740 2190.235 1309.565 2190.460
1309.460 2190.235 1310.285 2190.460
1310.180 2190.235 1311.005 2190.460
1310.900 2190.235 1311.725 2190.460
1304.755 2189.935 1305.580 2190.460
1303.930 2190.760 1304.205 2191.585
1312.135 2190.760 1312.410 2191.585
1312.135 2190.460 1312.830 2191.585
1312.005 2189.765 1312.830 2190.460
1312.135 2190.460 1312.830 2192.815
1312.005 2189.935 1312.830 2190.460
1304.335 2198.270 1312.005 2198.440
1304.335 2197.745 1304.755 2198.270
1305.440 2197.745 1305.860 2197.970
1306.160 2197.745 1306.580 2197.970
1306.880 2197.745 1307.300 2197.970
1307.600 2197.745 1308.020 2197.970
1308.320 2197.745 1308.740 2197.970
1309.040 2197.745 1309.460 2197.970
1309.760 2197.745 1310.180 2197.970
1310.480 2197.745 1310.900 2197.970
1311.585 2197.745 1312.005 2198.270
1311.310 2198.270 1312.005 2198.440
1311.585 2197.040 1312.005 2198.270
1311.585 2193.710 1312.005 2195.320
1311.585 2190.760 1312.005 2191.990
1311.310 2190.590 1312.005 2190.760
1304.335 2198.270 1305.030 2198.440
1304.335 2197.040 1304.755 2198.270
1304.335 2193.710 1304.755 2195.320
1304.335 2190.760 1304.755 2191.990
1304.335 2190.590 1305.030 2190.760
1304.335 2190.760 1304.755 2191.285
1305.440 2191.060 1305.860 2191.285
1306.160 2191.060 1306.580 2191.285
1306.880 2191.060 1307.300 2191.285
1307.600 2191.060 1308.020 2191.285
1308.320 2191.060 1308.740 2191.285
1309.040 2191.060 1309.460 2191.285
1309.760 2191.060 1310.180 2191.285
1310.480 2191.060 1310.900 2191.285
1311.585 2190.760 1312.005 2191.285
1304.335 2190.590 1312.005 2190.760
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SONOS transistor must be in cell with abutment box (tunm.8)
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1305.425 2196.715 1305.875 2196.935
1306.145 2196.715 1306.595 2196.935
1306.865 2196.715 1307.315 2196.935
1307.585 2196.715 1308.035 2196.935
1308.305 2196.715 1308.755 2196.935
1309.025 2196.715 1309.475 2196.935
1309.745 2196.715 1310.195 2196.935
1310.465 2196.715 1310.915 2196.935
1305.425 2196.285 1305.875 2196.505
1306.145 2196.285 1306.595 2196.505
1306.865 2196.285 1307.315 2196.505
1307.585 2196.285 1308.035 2196.505
1308.305 2196.285 1308.755 2196.505
1309.025 2196.285 1309.475 2196.505
1309.745 2196.285 1310.195 2196.505
1310.465 2196.285 1310.915 2196.505
1305.425 2195.855 1305.875 2196.075
1306.145 2195.855 1306.595 2196.075
1306.865 2195.855 1307.315 2196.075
1307.585 2195.855 1308.035 2196.075
1308.305 2195.855 1308.755 2196.075
1309.025 2195.855 1309.475 2196.075
1309.745 2195.855 1310.195 2196.075
1310.465 2195.855 1310.915 2196.075
1305.425 2195.425 1305.875 2195.645
1306.145 2195.425 1306.595 2195.645
1306.865 2195.425 1307.315 2195.645
1307.585 2195.425 1308.035 2195.645
1308.305 2195.425 1308.755 2195.645
1309.025 2195.425 1309.475 2195.645
1309.745 2195.425 1310.195 2195.645
1310.465 2195.425 1310.915 2195.645
1305.425 2193.385 1305.875 2193.605
1306.145 2193.385 1306.595 2193.605
1306.865 2193.385 1307.315 2193.605
1307.585 2193.385 1308.035 2193.605
1308.305 2193.385 1308.755 2193.605
1309.025 2193.385 1309.475 2193.605
1309.745 2193.385 1310.195 2193.605
1310.465 2193.385 1310.915 2193.605
1305.425 2192.955 1305.875 2193.175
1306.145 2192.955 1306.595 2193.175
1306.865 2192.955 1307.315 2193.175
1307.585 2192.955 1308.035 2193.175
1308.305 2192.955 1308.755 2193.175
1309.025 2192.955 1309.475 2193.175
1309.745 2192.955 1310.195 2193.175
1310.465 2192.955 1310.915 2193.175
1305.425 2192.525 1305.875 2192.745
1306.145 2192.525 1306.595 2192.745
1306.865 2192.525 1307.315 2192.745
1307.585 2192.525 1308.035 2192.745
1308.305 2192.525 1308.755 2192.745
1309.025 2192.525 1309.475 2192.745
1309.745 2192.525 1310.195 2192.745
1310.465 2192.525 1310.915 2192.745
1305.425 2192.095 1305.875 2192.315
1306.145 2192.095 1306.595 2192.315
1306.865 2192.095 1307.315 2192.315
1307.585 2192.095 1308.035 2192.315
1308.305 2192.095 1308.755 2192.315
1309.025 2192.095 1309.475 2192.315
1309.745 2192.095 1310.195 2192.315
1310.465 2192.095 1310.915 2192.315
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LV to MV Diffusion spacing < 0.27um (diff/tap.3)
----------------------------------------
1304.335 2197.040 1304.755 2197.310
1305.440 2197.145 1305.860 2197.310
1305.440 2197.040 1305.860 2197.145
1306.160 2197.145 1306.580 2197.310
1306.160 2197.040 1306.580 2197.145
1306.880 2197.145 1307.300 2197.310
1306.880 2197.040 1307.300 2197.145
1307.600 2197.145 1308.020 2197.310
1307.600 2197.040 1308.020 2197.145
1308.320 2197.145 1308.740 2197.310
1308.320 2197.040 1308.740 2197.145
1309.040 2197.145 1309.460 2197.310
1309.040 2197.040 1309.460 2197.145
1309.760 2197.145 1310.180 2197.310
1309.760 2197.040 1310.180 2197.145
1310.480 2197.145 1310.900 2197.310
1310.480 2197.040 1310.900 2197.145
1311.585 2197.040 1312.005 2197.310
1304.335 2195.450 1304.455 2195.590
1304.455 2195.450 1304.625 2195.590
1304.625 2195.450 1304.755 2195.590
1304.335 2195.320 1304.755 2195.450
1305.425 2195.425 1305.860 2195.590
1305.425 2195.320 1305.860 2195.425
1306.145 2195.425 1306.580 2195.590
1306.145 2195.320 1306.580 2195.425
1306.865 2195.425 1307.300 2195.590
1306.865 2195.320 1307.300 2195.425
1307.585 2195.425 1308.020 2195.590
1307.585 2195.320 1308.020 2195.425
1308.305 2195.425 1308.740 2195.590
1308.305 2195.320 1308.740 2195.425
1309.025 2195.425 1309.460 2195.590
1309.025 2195.320 1309.460 2195.425
1309.745 2195.425 1310.180 2195.590
1309.745 2195.320 1310.180 2195.425
1310.465 2195.425 1310.900 2195.590
1310.465 2195.320 1310.900 2195.425
1311.585 2195.320 1312.005 2195.590
1304.335 2193.710 1304.755 2193.980
1305.860 2195.425 1305.875 2195.590
1305.860 2195.320 1305.875 2195.425
1306.580 2195.425 1306.595 2195.590
1306.580 2195.320 1306.595 2195.425
1307.300 2195.425 1307.315 2195.590
1307.300 2195.320 1307.315 2195.425
1308.020 2195.425 1308.035 2195.590
1308.020 2195.320 1308.035 2195.425
1308.740 2195.425 1308.755 2195.590
1308.740 2195.320 1308.755 2195.425
1309.460 2195.425 1309.475 2195.590
1309.460 2195.320 1309.475 2195.425
1310.180 2195.425 1310.195 2195.590
1310.180 2195.320 1310.195 2195.425
1310.900 2195.425 1310.915 2195.590
1310.900 2195.320 1310.915 2195.425
1305.440 2193.815 1305.860 2193.980
1305.440 2193.710 1305.860 2193.815
1306.160 2193.815 1306.580 2193.980
1306.160 2193.710 1306.580 2193.815
1306.880 2193.815 1307.300 2193.980
1306.880 2193.710 1307.300 2193.815
1307.600 2193.815 1308.020 2193.980
1307.600 2193.710 1308.020 2193.815
1308.320 2193.815 1308.740 2193.980
1308.320 2193.710 1308.740 2193.815
1309.040 2193.815 1309.460 2193.980
1309.040 2193.710 1309.460 2193.815
1309.760 2193.815 1310.180 2193.980
1309.760 2193.710 1310.180 2193.815
1310.480 2193.815 1310.900 2193.980
1310.480 2193.710 1310.900 2193.815
1311.585 2193.710 1312.005 2193.980
1304.335 2191.990 1304.755 2192.260
1305.425 2192.095 1305.860 2192.260
1305.425 2191.990 1305.860 2192.095
1306.145 2192.095 1306.580 2192.260
1306.145 2191.990 1306.580 2192.095
1306.865 2192.095 1307.300 2192.260
1306.865 2191.990 1307.300 2192.095
1307.585 2192.095 1308.020 2192.260
1307.585 2191.990 1308.020 2192.095
1308.305 2192.095 1308.740 2192.260
1308.305 2191.990 1308.740 2192.095
1309.025 2192.095 1309.460 2192.260
1309.025 2191.990 1309.460 2192.095
1309.745 2192.095 1310.180 2192.260
1309.745 2191.990 1310.180 2192.095
1310.465 2192.095 1310.900 2192.260
1310.465 2191.990 1310.900 2192.095
1311.585 2192.120 1311.705 2192.260
1311.705 2192.120 1311.875 2192.260
1311.875 2192.120 1312.005 2192.260
1311.585 2191.990 1312.005 2192.120
1305.860 2192.095 1305.875 2192.260
1305.860 2191.990 1305.875 2192.095
1306.580 2192.095 1306.595 2192.260
1306.580 2191.990 1306.595 2192.095
1307.300 2192.095 1307.315 2192.260
1307.300 2191.990 1307.315 2192.095
1308.020 2192.095 1308.035 2192.260
1308.020 2191.990 1308.035 2192.095
1308.740 2192.095 1308.755 2192.260
1308.740 2191.990 1308.755 2192.095
1309.460 2192.095 1309.475 2192.260
1309.460 2191.990 1309.475 2192.095
1310.180 2192.095 1310.195 2192.260
1310.180 2191.990 1310.195 2192.095
1310.900 2192.095 1310.915 2192.260
1310.900 2191.990 1310.915 2192.095
----------------------------------------
poly contact spacing to diffusion < 0.19um (licon.14)
----------------------------------------
1304.940 2196.740 1304.945 2196.910
1304.750 2196.910 1304.755 2197.040
1311.585 2196.310 1311.590 2196.670
1304.940 2195.880 1304.945 2196.050
1304.750 2196.050 1304.755 2196.240
1311.585 2195.450 1311.590 2195.810
1304.900 2194.765 1304.945 2194.935
1304.710 2194.935 1304.755 2195.125
1304.900 2194.095 1304.945 2194.265
1304.710 2194.265 1304.755 2194.455
1311.585 2193.410 1311.590 2193.710
1304.940 2192.980 1304.945 2193.150
1304.750 2193.150 1304.755 2193.340
1311.585 2192.550 1311.590 2192.910
1304.940 2192.120 1304.945 2192.290
1304.750 2192.290 1304.755 2192.480
1306.105 2189.210 1306.430 2189.220
1306.430 2189.210 1306.620 2189.220
1307.545 2189.210 1307.870 2189.220
1307.870 2189.210 1308.060 2189.220
1308.985 2189.210 1309.310 2189.220
1309.310 2189.210 1309.500 2189.220
1310.425 2189.210 1310.750 2189.220
1310.750 2189.210 1310.940 2189.220
1304.750 2196.910 1304.755 2197.040
1311.585 2196.310 1311.590 2196.670
1311.585 2195.450 1311.590 2195.810
1311.585 2193.410 1311.590 2193.710
1311.585 2192.550 1311.590 2192.910
1306.430 2189.210 1306.620 2189.220
1307.870 2189.210 1308.060 2189.220
1309.310 2189.210 1309.500 2189.220
1310.750 2189.210 1310.940 2189.220
----------------------------------------
poly contact spacing to P-diffusion < 0.235um (licon.9 + psdm.5a)
----------------------------------------
1311.585 2197.375 1311.630 2197.780
1304.940 2196.740 1304.990 2196.910
1304.705 2197.040 1304.755 2197.145
1304.705 2196.910 1304.755 2197.040
1311.585 2196.310 1311.635 2196.715
1304.940 2195.880 1304.990 2196.050
1304.705 2196.050 1304.755 2196.285
1311.585 2195.450 1311.635 2195.855
1304.900 2194.765 1304.990 2194.935
1304.665 2194.935 1304.755 2195.170
1304.900 2194.095 1304.990 2194.265
1304.665 2194.265 1304.755 2194.500
1311.585 2193.710 1311.635 2193.815
1311.585 2193.410 1311.635 2193.710
1304.940 2192.980 1304.990 2193.150
1304.705 2193.150 1304.755 2193.385
1311.585 2192.550 1311.635 2192.955
1304.940 2192.120 1304.990 2192.290
1304.705 2192.290 1304.755 2192.525
1311.585 2191.485 1311.630 2191.890
1304.705 2197.040 1304.755 2197.145
1304.705 2196.910 1304.755 2197.040
1311.585 2197.375 1311.630 2197.780
1311.585 2196.310 1311.635 2196.715
1311.585 2195.450 1311.635 2195.855
1311.585 2193.710 1311.635 2193.815
1311.585 2193.410 1311.635 2193.710
1311.585 2192.550 1311.635 2192.955
1311.585 2191.485 1311.630 2191.890
----------------------------------------
N-Diffusion overhang of nFET < 0.25um (poly.7)
----------------------------------------
1305.440 2196.935 1305.860 2197.040
1305.440 2196.895 1305.860 2196.935
1306.160 2196.935 1306.580 2197.040
1306.160 2196.895 1306.580 2196.935
1306.880 2196.935 1307.300 2197.040
1306.880 2196.895 1307.300 2196.935
1307.600 2196.935 1308.020 2197.040
1307.600 2196.895 1308.020 2196.935
1308.320 2196.935 1308.740 2197.040
1308.320 2196.895 1308.740 2196.935
1309.040 2196.935 1309.460 2197.040
1309.040 2196.895 1309.460 2196.935
1309.760 2196.935 1310.180 2197.040
1309.760 2196.895 1310.180 2196.935
1310.480 2196.935 1310.900 2197.040
1310.480 2196.895 1310.900 2196.935
1305.425 2197.145 1305.440 2197.185
1305.440 2197.145 1305.860 2197.185
1305.860 2197.145 1305.875 2197.185
1305.425 2197.040 1305.440 2197.145
1305.440 2197.040 1305.860 2197.145
1305.860 2197.040 1305.875 2197.145
1306.145 2197.145 1306.160 2197.185
1306.160 2197.145 1306.580 2197.185
1306.580 2197.145 1306.595 2197.185
1306.145 2197.040 1306.160 2197.145
1306.160 2197.040 1306.580 2197.145
1306.580 2197.040 1306.595 2197.145
1306.865 2197.145 1306.880 2197.185
1306.880 2197.145 1307.300 2197.185
1307.300 2197.145 1307.315 2197.185
1306.865 2197.040 1306.880 2197.145
1306.880 2197.040 1307.300 2197.145
1307.300 2197.040 1307.315 2197.145
1307.585 2197.145 1307.600 2197.185
1307.600 2197.145 1308.020 2197.185
1308.020 2197.145 1308.035 2197.185
1307.585 2197.040 1307.600 2197.145
1307.600 2197.040 1308.020 2197.145
1308.020 2197.040 1308.035 2197.145
1308.305 2197.145 1308.320 2197.185
1308.320 2197.145 1308.740 2197.185
1308.740 2197.145 1308.755 2197.185
1308.305 2197.040 1308.320 2197.145
1308.320 2197.040 1308.740 2197.145
1308.740 2197.040 1308.755 2197.145
1309.025 2197.145 1309.040 2197.185
1309.040 2197.145 1309.460 2197.185
1309.460 2197.145 1309.475 2197.185
1309.025 2197.040 1309.040 2197.145
1309.040 2197.040 1309.460 2197.145
1309.460 2197.040 1309.475 2197.145
1309.745 2197.145 1309.760 2197.185
1309.760 2197.145 1310.180 2197.185
1310.180 2197.145 1310.195 2197.185
1309.745 2197.040 1309.760 2197.145
1309.760 2197.040 1310.180 2197.145
1310.180 2197.040 1310.195 2197.145
1310.465 2197.145 1310.480 2197.185
1310.480 2197.145 1310.900 2197.185
1310.900 2197.145 1310.915 2197.185
1310.465 2197.040 1310.480 2197.145
1310.480 2197.040 1310.900 2197.145
1310.900 2197.040 1310.915 2197.145
1305.425 2195.215 1305.440 2195.320
1305.440 2195.215 1305.860 2195.320
1305.860 2195.215 1305.875 2195.320
1305.425 2195.175 1305.440 2195.215
1305.440 2195.175 1305.860 2195.215
1305.860 2195.175 1305.875 2195.215
1306.145 2195.215 1306.160 2195.320
1306.160 2195.215 1306.580 2195.320
1306.580 2195.215 1306.595 2195.320
1306.145 2195.175 1306.160 2195.215
1306.160 2195.175 1306.580 2195.215
1306.580 2195.175 1306.595 2195.215
1306.865 2195.215 1306.880 2195.320
1306.880 2195.215 1307.300 2195.320
1307.300 2195.215 1307.315 2195.320
1306.865 2195.175 1306.880 2195.215
1306.880 2195.175 1307.300 2195.215
1307.300 2195.175 1307.315 2195.215
1307.585 2195.215 1307.600 2195.320
1307.600 2195.215 1308.020 2195.320
1308.020 2195.215 1308.035 2195.320
1307.585 2195.175 1307.600 2195.215
1307.600 2195.175 1308.020 2195.215
1308.020 2195.175 1308.035 2195.215
1308.305 2195.215 1308.320 2195.320
1308.320 2195.215 1308.740 2195.320
1308.740 2195.215 1308.755 2195.320
1308.305 2195.175 1308.320 2195.215
1308.320 2195.175 1308.740 2195.215
1308.740 2195.175 1308.755 2195.215
1309.025 2195.215 1309.040 2195.320
1309.040 2195.215 1309.460 2195.320
1309.460 2195.215 1309.475 2195.320
1309.025 2195.175 1309.040 2195.215
1309.040 2195.175 1309.460 2195.215
1309.460 2195.175 1309.475 2195.215
1309.745 2195.215 1309.760 2195.320
1309.760 2195.215 1310.180 2195.320
1310.180 2195.215 1310.195 2195.320
1309.745 2195.175 1309.760 2195.215
1309.760 2195.175 1310.180 2195.215
1310.180 2195.175 1310.195 2195.215
1310.465 2195.215 1310.480 2195.320
1310.480 2195.215 1310.900 2195.320
1310.900 2195.215 1310.915 2195.320
1310.465 2195.175 1310.480 2195.215
1310.480 2195.175 1310.900 2195.215
1310.900 2195.175 1310.915 2195.215
1305.440 2195.425 1305.860 2195.465
1305.440 2195.320 1305.860 2195.425
1306.160 2195.425 1306.580 2195.465
1306.160 2195.320 1306.580 2195.425
1306.880 2195.425 1307.300 2195.465
1306.880 2195.320 1307.300 2195.425
1307.600 2195.425 1308.020 2195.465
1307.600 2195.320 1308.020 2195.425
1308.320 2195.425 1308.740 2195.465
1308.320 2195.320 1308.740 2195.425
1309.040 2195.425 1309.460 2195.465
1309.040 2195.320 1309.460 2195.425
1309.760 2195.425 1310.180 2195.465
1309.760 2195.320 1310.180 2195.425
1310.480 2195.425 1310.900 2195.465
1310.480 2195.320 1310.900 2195.425
1305.440 2193.605 1305.860 2193.710
1305.440 2193.565 1305.860 2193.605
1306.160 2193.605 1306.580 2193.710
1306.160 2193.565 1306.580 2193.605
1306.880 2193.605 1307.300 2193.710
1306.880 2193.565 1307.300 2193.605
1307.600 2193.605 1308.020 2193.710
1307.600 2193.565 1308.020 2193.605
1308.320 2193.605 1308.740 2193.710
1308.320 2193.565 1308.740 2193.605
1309.040 2193.605 1309.460 2193.710
1309.040 2193.565 1309.460 2193.605
1309.760 2193.605 1310.180 2193.710
1309.760 2193.565 1310.180 2193.605
1310.480 2193.605 1310.900 2193.710
1310.480 2193.565 1310.900 2193.605
1305.425 2193.815 1305.440 2193.855
1305.440 2193.815 1305.860 2193.855
1305.860 2193.815 1305.875 2193.855
1305.425 2193.710 1305.440 2193.815
1305.440 2193.710 1305.860 2193.815
1305.860 2193.710 1305.875 2193.815
1306.145 2193.815 1306.160 2193.855
1306.160 2193.815 1306.580 2193.855
1306.580 2193.815 1306.595 2193.855
1306.145 2193.710 1306.160 2193.815
1306.160 2193.710 1306.580 2193.815
1306.580 2193.710 1306.595 2193.815
1306.865 2193.815 1306.880 2193.855
1306.880 2193.815 1307.300 2193.855
1307.300 2193.815 1307.315 2193.855
1306.865 2193.710 1306.880 2193.815
1306.880 2193.710 1307.300 2193.815
1307.300 2193.710 1307.315 2193.815
1307.585 2193.815 1307.600 2193.855
1307.600 2193.815 1308.020 2193.855
1308.020 2193.815 1308.035 2193.855
1307.585 2193.710 1307.600 2193.815
1307.600 2193.710 1308.020 2193.815
1308.020 2193.710 1308.035 2193.815
1308.305 2193.815 1308.320 2193.855
1308.320 2193.815 1308.740 2193.855
1308.740 2193.815 1308.755 2193.855
1308.305 2193.710 1308.320 2193.815
1308.320 2193.710 1308.740 2193.815
1308.740 2193.710 1308.755 2193.815
1309.025 2193.815 1309.040 2193.855
1309.040 2193.815 1309.460 2193.855
1309.460 2193.815 1309.475 2193.855
1309.025 2193.710 1309.040 2193.815
1309.040 2193.710 1309.460 2193.815
1309.460 2193.710 1309.475 2193.815
1309.745 2193.815 1309.760 2193.855
1309.760 2193.815 1310.180 2193.855
1310.180 2193.815 1310.195 2193.855
1309.745 2193.710 1309.760 2193.815
1309.760 2193.710 1310.180 2193.815
1310.180 2193.710 1310.195 2193.815
1310.465 2193.815 1310.480 2193.855
1310.480 2193.815 1310.900 2193.855
1310.900 2193.815 1310.915 2193.855
1310.465 2193.710 1310.480 2193.815
1310.480 2193.710 1310.900 2193.815
1310.900 2193.710 1310.915 2193.815
1305.425 2191.885 1305.440 2191.990
1305.440 2191.885 1305.860 2191.990
1305.860 2191.885 1305.875 2191.990
1305.425 2191.845 1305.440 2191.885
1305.440 2191.845 1305.860 2191.885
1305.860 2191.845 1305.875 2191.885
1306.145 2191.885 1306.160 2191.990
1306.160 2191.885 1306.580 2191.990
1306.580 2191.885 1306.595 2191.990
1306.145 2191.845 1306.160 2191.885
1306.160 2191.845 1306.580 2191.885
1306.580 2191.845 1306.595 2191.885
1306.865 2191.885 1306.880 2191.990
1306.880 2191.885 1307.300 2191.990
1307.300 2191.885 1307.315 2191.990
1306.865 2191.845 1306.880 2191.885
1306.880 2191.845 1307.300 2191.885
1307.300 2191.845 1307.315 2191.885
1307.585 2191.885 1307.600 2191.990
1307.600 2191.885 1308.020 2191.990
1308.020 2191.885 1308.035 2191.990
1307.585 2191.845 1307.600 2191.885
1307.600 2191.845 1308.020 2191.885
1308.020 2191.845 1308.035 2191.885
1308.305 2191.885 1308.320 2191.990
1308.320 2191.885 1308.740 2191.990
1308.740 2191.885 1308.755 2191.990
1308.305 2191.845 1308.320 2191.885
1308.320 2191.845 1308.740 2191.885
1308.740 2191.845 1308.755 2191.885
1309.025 2191.885 1309.040 2191.990
1309.040 2191.885 1309.460 2191.990
1309.460 2191.885 1309.475 2191.990
1309.025 2191.845 1309.040 2191.885
1309.040 2191.845 1309.460 2191.885
1309.460 2191.845 1309.475 2191.885
1309.745 2191.885 1309.760 2191.990
1309.760 2191.885 1310.180 2191.990
1310.180 2191.885 1310.195 2191.990
1309.745 2191.845 1309.760 2191.885
1309.760 2191.845 1310.180 2191.885
1310.180 2191.845 1310.195 2191.885
1310.465 2191.885 1310.480 2191.990
1310.480 2191.885 1310.900 2191.990
1310.900 2191.885 1310.915 2191.990
1310.465 2191.845 1310.480 2191.885
1310.480 2191.845 1310.900 2191.885
1310.900 2191.845 1310.915 2191.885
1305.440 2192.095 1305.860 2192.135
1305.440 2191.990 1305.860 2192.095
1306.160 2192.095 1306.580 2192.135
1306.160 2191.990 1306.580 2192.095
1306.880 2192.095 1307.300 2192.135
1306.880 2191.990 1307.300 2192.095
1307.600 2192.095 1308.020 2192.135
1307.600 2191.990 1308.020 2192.095
1308.320 2192.095 1308.740 2192.135
1308.320 2191.990 1308.740 2192.095
1309.040 2192.095 1309.460 2192.135
1309.040 2191.990 1309.460 2192.095
1309.760 2192.095 1310.180 2192.135
1309.760 2191.990 1310.180 2192.095
1310.480 2192.095 1310.900 2192.135
1310.480 2191.990 1310.900 2192.095
----------------------------------------
LV N-diffusion to MV N-diffusion < 0.36um (diff/tap.23 + diff/tap.22)
----------------------------------------
1305.785 2197.040 1305.860 2197.145
1306.505 2197.040 1306.580 2197.145
1307.225 2197.040 1307.300 2197.145
1307.945 2197.040 1308.020 2197.145
1308.665 2197.040 1308.740 2197.145
1309.385 2197.040 1309.460 2197.145
1310.105 2197.040 1310.180 2197.145
1306.160 2197.040 1306.235 2197.145
1306.880 2197.040 1306.955 2197.145
1307.600 2197.040 1307.675 2197.145
1308.320 2197.040 1308.395 2197.145
1309.040 2197.040 1309.115 2197.145
1309.760 2197.040 1309.835 2197.145
1310.480 2197.040 1310.555 2197.145
1305.440 2197.040 1305.860 2197.075
1306.160 2197.040 1306.580 2197.075
1306.880 2197.040 1307.300 2197.075
1307.600 2197.040 1308.020 2197.075
1308.320 2197.040 1308.740 2197.075
1309.040 2197.040 1309.460 2197.075
1309.760 2197.040 1310.180 2197.075
1310.480 2197.040 1310.900 2197.075
1305.860 2195.645 1305.875 2195.680
1305.860 2195.320 1305.875 2195.425
1306.145 2195.320 1306.220 2195.425
1306.580 2195.645 1306.595 2195.680
1306.580 2195.320 1306.595 2195.425
1306.865 2195.320 1306.940 2195.425
1307.300 2195.645 1307.315 2195.680
1307.300 2195.320 1307.315 2195.425
1307.585 2195.320 1307.660 2195.425
1308.020 2195.645 1308.035 2195.680
1308.020 2195.320 1308.035 2195.425
1308.305 2195.320 1308.380 2195.425
1308.740 2195.645 1308.755 2195.680
1308.740 2195.320 1308.755 2195.425
1309.025 2195.320 1309.100 2195.425
1309.460 2195.645 1309.475 2195.680
1309.460 2195.320 1309.475 2195.425
1309.745 2195.320 1309.820 2195.425
1310.180 2195.645 1310.195 2195.680
1310.180 2195.320 1310.195 2195.425
1310.465 2195.320 1310.540 2195.425
1310.900 2195.645 1310.915 2195.680
1310.900 2195.320 1310.915 2195.425
1305.785 2193.710 1305.860 2193.815
1306.505 2193.710 1306.580 2193.815
1307.225 2193.710 1307.300 2193.815
1307.945 2193.710 1308.020 2193.815
1308.665 2193.710 1308.740 2193.815
1309.385 2193.710 1309.460 2193.815
1310.105 2193.710 1310.180 2193.815
1306.160 2193.710 1306.235 2193.815
1306.880 2193.710 1306.955 2193.815
1307.600 2193.710 1307.675 2193.815
1308.320 2193.710 1308.395 2193.815
1309.040 2193.710 1309.115 2193.815
1309.760 2193.710 1309.835 2193.815
1310.480 2193.710 1310.555 2193.815
1305.440 2193.710 1305.860 2193.745
1306.160 2193.710 1306.580 2193.745
1306.880 2193.710 1307.300 2193.745
1307.600 2193.710 1308.020 2193.745
1308.320 2193.710 1308.740 2193.745
1309.040 2193.710 1309.460 2193.745
1309.760 2193.710 1310.180 2193.745
1310.480 2193.710 1310.900 2193.745
1305.860 2192.315 1305.875 2192.350
1305.860 2191.990 1305.875 2192.095
1306.145 2191.990 1306.220 2192.095
1306.580 2192.315 1306.595 2192.350
1306.580 2191.990 1306.595 2192.095
1306.865 2191.990 1306.940 2192.095
1307.300 2192.315 1307.315 2192.350
1307.300 2191.990 1307.315 2192.095
1307.585 2191.990 1307.660 2192.095
1308.020 2192.315 1308.035 2192.350
1308.020 2191.990 1308.035 2192.095
1308.305 2191.990 1308.380 2192.095
1308.740 2192.315 1308.755 2192.350
1308.740 2191.990 1308.755 2192.095
1309.025 2191.990 1309.100 2192.095
1309.460 2192.315 1309.475 2192.350
1309.460 2191.990 1309.475 2192.095
1309.745 2191.990 1309.820 2192.095
1310.180 2192.315 1310.195 2192.350
1310.180 2191.990 1310.195 2192.095
1310.465 2191.990 1310.540 2192.095
1310.900 2192.315 1310.915 2192.350
1310.900 2191.990 1310.915 2192.095
----------------------------------------
MV N-diffusion to LV N-diffusion < 0.36um (diff/tap.23 + diff/tap.22)
----------------------------------------
1305.785 2197.145 1305.860 2197.400
1305.785 2197.040 1305.860 2197.145
1306.505 2197.145 1306.580 2197.400
1306.505 2197.040 1306.580 2197.145
1307.225 2197.145 1307.300 2197.400
1307.225 2197.040 1307.300 2197.145
1307.945 2197.145 1308.020 2197.400
1307.945 2197.040 1308.020 2197.145
1308.665 2197.145 1308.740 2197.400
1308.665 2197.040 1308.740 2197.145
1309.385 2197.145 1309.460 2197.400
1309.385 2197.040 1309.460 2197.145
1310.105 2197.145 1310.180 2197.400
1310.105 2197.040 1310.180 2197.145
1306.160 2197.145 1306.235 2197.400
1306.160 2197.040 1306.235 2197.145
1306.880 2197.145 1306.955 2197.400
1306.880 2197.040 1306.955 2197.145
1307.600 2197.145 1307.675 2197.400
1307.600 2197.040 1307.675 2197.145
1308.320 2197.145 1308.395 2197.400
1308.320 2197.040 1308.395 2197.145
1309.040 2197.145 1309.115 2197.400
1309.040 2197.040 1309.115 2197.145
1309.760 2197.145 1309.835 2197.400
1309.760 2197.040 1309.835 2197.145
1310.480 2197.145 1310.555 2197.400
1310.480 2197.040 1310.555 2197.145
1305.440 2197.040 1305.860 2197.075
1306.160 2197.040 1306.580 2197.075
1306.880 2197.040 1307.300 2197.075
1307.600 2197.040 1308.020 2197.075
1308.320 2197.040 1308.740 2197.075
1309.040 2197.040 1309.460 2197.075
1309.760 2197.040 1310.180 2197.075
1310.480 2197.040 1310.900 2197.075
1305.860 2195.645 1305.875 2195.680
1305.860 2195.320 1305.875 2195.425
1306.145 2195.320 1306.220 2195.425
1306.580 2195.645 1306.595 2195.680
1306.580 2195.320 1306.595 2195.425
1306.865 2195.320 1306.940 2195.425
1307.300 2195.645 1307.315 2195.680
1307.300 2195.320 1307.315 2195.425
1307.585 2195.320 1307.660 2195.425
1308.020 2195.645 1308.035 2195.680
1308.020 2195.320 1308.035 2195.425
1308.305 2195.320 1308.380 2195.425
1308.740 2195.645 1308.755 2195.680
1308.740 2195.320 1308.755 2195.425
1309.025 2195.320 1309.100 2195.425
1309.460 2195.645 1309.475 2195.680
1309.460 2195.320 1309.475 2195.425
1309.745 2195.320 1309.820 2195.425
1310.180 2195.645 1310.195 2195.680
1310.180 2195.320 1310.195 2195.425
1310.465 2195.320 1310.540 2195.425
1310.900 2195.645 1310.915 2195.680
1310.900 2195.320 1310.915 2195.425
1305.785 2193.815 1305.860 2194.070
1305.785 2193.710 1305.860 2193.815
1306.505 2193.815 1306.580 2194.070
1306.505 2193.710 1306.580 2193.815
1307.225 2193.815 1307.300 2194.070
1307.225 2193.710 1307.300 2193.815
1307.945 2193.815 1308.020 2194.070
1307.945 2193.710 1308.020 2193.815
1308.665 2193.815 1308.740 2194.070
1308.665 2193.710 1308.740 2193.815
1309.385 2193.815 1309.460 2194.070
1309.385 2193.710 1309.460 2193.815
1310.105 2193.815 1310.180 2194.070
1310.105 2193.710 1310.180 2193.815
1306.160 2193.815 1306.235 2194.070
1306.160 2193.710 1306.235 2193.815
1306.880 2193.815 1306.955 2194.070
1306.880 2193.710 1306.955 2193.815
1307.600 2193.815 1307.675 2194.070
1307.600 2193.710 1307.675 2193.815
1308.320 2193.815 1308.395 2194.070
1308.320 2193.710 1308.395 2193.815
1309.040 2193.815 1309.115 2194.070
1309.040 2193.710 1309.115 2193.815
1309.760 2193.815 1309.835 2194.070
1309.760 2193.710 1309.835 2193.815
1310.480 2193.815 1310.555 2194.070
1310.480 2193.710 1310.555 2193.815
1305.440 2193.710 1305.860 2193.745
1306.160 2193.710 1306.580 2193.745
1306.880 2193.710 1307.300 2193.745
1307.600 2193.710 1308.020 2193.745
1308.320 2193.710 1308.740 2193.745
1309.040 2193.710 1309.460 2193.745
1309.760 2193.710 1310.180 2193.745
1310.480 2193.710 1310.900 2193.745
1305.860 2192.315 1305.875 2192.350
1305.860 2191.990 1305.875 2192.095
1306.145 2191.990 1306.220 2192.095
1306.580 2192.315 1306.595 2192.350
1306.580 2191.990 1306.595 2192.095
1306.865 2191.990 1306.940 2192.095
1307.300 2192.315 1307.315 2192.350
1307.300 2191.990 1307.315 2192.095
1307.585 2191.990 1307.660 2192.095
1308.020 2192.315 1308.035 2192.350
1308.020 2191.990 1308.035 2192.095
1308.305 2191.990 1308.380 2192.095
1308.740 2192.315 1308.755 2192.350
1308.740 2191.990 1308.755 2192.095
1309.025 2191.990 1309.100 2192.095
1309.460 2192.315 1309.475 2192.350
1309.460 2191.990 1309.475 2192.095
1309.745 2191.990 1309.820 2192.095
1310.180 2192.315 1310.195 2192.350
1310.180 2191.990 1310.195 2192.095
1310.465 2191.990 1310.540 2192.095
1310.900 2192.315 1310.915 2192.350
1310.900 2191.990 1310.915 2192.095
----------------------------------------
MV P-Diffusion to MV N-tap spacing < 0.37um (diff/tap.15b)
----------------------------------------
1305.440 2197.930 1305.565 2197.970
1305.440 2197.900 1305.565 2197.930
1305.565 2197.930 1305.735 2197.970
1305.565 2197.900 1305.735 2197.930
1305.735 2197.930 1305.860 2197.970
1305.735 2197.900 1305.860 2197.930
1306.160 2197.930 1306.285 2197.970
1306.160 2197.900 1306.285 2197.930
1306.285 2197.930 1306.455 2197.970
1306.285 2197.900 1306.455 2197.930
1306.455 2197.930 1306.580 2197.970
1306.455 2197.900 1306.580 2197.930
1306.880 2197.930 1307.005 2197.970
1306.880 2197.900 1307.005 2197.930
1307.005 2197.930 1307.175 2197.970
1307.005 2197.900 1307.175 2197.930
1307.175 2197.930 1307.300 2197.970
1307.175 2197.900 1307.300 2197.930
1307.600 2197.930 1307.725 2197.970
1307.600 2197.900 1307.725 2197.930
1307.725 2197.930 1307.895 2197.970
1307.725 2197.900 1307.895 2197.930
1307.895 2197.930 1308.020 2197.970
1307.895 2197.900 1308.020 2197.930
1308.320 2197.930 1308.445 2197.970
1308.320 2197.900 1308.445 2197.930
1308.445 2197.930 1308.615 2197.970
1308.445 2197.900 1308.615 2197.930
1308.615 2197.930 1308.740 2197.970
1308.615 2197.900 1308.740 2197.930
1309.040 2197.930 1309.165 2197.970
1309.040 2197.900 1309.165 2197.930
1309.165 2197.930 1309.335 2197.970
1309.165 2197.900 1309.335 2197.930
1309.335 2197.930 1309.460 2197.970
1309.335 2197.900 1309.460 2197.930
1309.760 2197.930 1309.885 2197.970
1309.760 2197.900 1309.885 2197.930
1309.885 2197.930 1310.055 2197.970
1309.885 2197.900 1310.055 2197.930
1310.055 2197.930 1310.180 2197.970
1310.055 2197.900 1310.180 2197.930
1310.480 2197.930 1310.605 2197.970
1310.480 2197.900 1310.605 2197.930
1310.605 2197.930 1310.775 2197.970
1310.605 2197.900 1310.775 2197.930
1310.775 2197.930 1310.900 2197.970
1310.775 2197.900 1310.900 2197.930
1305.070 2198.270 1305.565 2198.340
1305.565 2198.270 1305.735 2198.340
1305.735 2198.270 1305.925 2198.340
1305.925 2198.270 1306.095 2198.340
1305.925 2198.270 1306.095 2198.340
1306.095 2198.270 1306.285 2198.340
1306.285 2198.270 1306.455 2198.340
1306.455 2198.270 1306.950 2198.340
1306.510 2198.270 1307.005 2198.340
1307.005 2198.270 1307.175 2198.340
1307.175 2198.270 1307.365 2198.340
1307.365 2198.270 1307.535 2198.340
1307.365 2198.270 1307.535 2198.340
1307.535 2198.270 1307.725 2198.340
1307.725 2198.270 1307.895 2198.340
1307.895 2198.270 1308.390 2198.340
1307.950 2198.270 1308.445 2198.340
1308.445 2198.270 1308.615 2198.340
1308.615 2198.270 1308.805 2198.340
1308.805 2198.270 1308.975 2198.340
1308.805 2198.270 1308.975 2198.340
1308.975 2198.270 1309.165 2198.340
1309.165 2198.270 1309.335 2198.340
1309.335 2198.270 1309.830 2198.340
1309.390 2198.270 1309.885 2198.340
1309.885 2198.270 1310.055 2198.340
1310.055 2198.270 1310.245 2198.340
1310.245 2198.270 1310.415 2198.340
1310.245 2198.270 1310.415 2198.340
1310.415 2198.270 1310.605 2198.340
1310.605 2198.270 1310.775 2198.340
1310.775 2198.270 1311.270 2198.340
1305.070 2198.270 1305.440 2198.340
1305.860 2198.270 1305.925 2198.340
1305.925 2198.270 1306.095 2198.340
1305.925 2198.270 1306.095 2198.340
1306.095 2198.270 1306.160 2198.340
1306.580 2198.270 1306.950 2198.340
1306.510 2198.270 1306.880 2198.340
1307.300 2198.270 1307.365 2198.340
1307.365 2198.270 1307.535 2198.340
1307.365 2198.270 1307.535 2198.340
1307.535 2198.270 1307.600 2198.340
1308.020 2198.270 1308.390 2198.340
1307.950 2198.270 1308.320 2198.340
1308.740 2198.270 1308.805 2198.340
1308.805 2198.270 1308.975 2198.340
1308.805 2198.270 1308.975 2198.340
1308.975 2198.270 1309.040 2198.340
1309.460 2198.270 1309.830 2198.340
1309.390 2198.270 1309.760 2198.340
1310.180 2198.270 1310.245 2198.340
1310.245 2198.270 1310.415 2198.340
1310.245 2198.270 1310.415 2198.340
1310.415 2198.270 1310.480 2198.340
1310.900 2198.270 1311.270 2198.340
1305.070 2190.690 1305.440 2190.760
1305.070 2190.690 1305.565 2190.760
1305.565 2190.690 1305.735 2190.760
1305.735 2190.690 1305.925 2190.760
1305.925 2190.690 1306.095 2190.760
1305.860 2190.690 1305.925 2190.760
1305.925 2190.690 1306.095 2190.760
1305.925 2190.690 1306.095 2190.760
1306.095 2190.690 1306.160 2190.760
1305.925 2190.690 1306.095 2190.760
1306.095 2190.690 1306.285 2190.760
1306.285 2190.690 1306.455 2190.760
1306.455 2190.690 1306.950 2190.760
1306.580 2190.690 1306.950 2190.760
1306.510 2190.690 1306.880 2190.760
1306.510 2190.690 1307.005 2190.760
1307.005 2190.690 1307.175 2190.760
1307.175 2190.690 1307.365 2190.760
1307.365 2190.690 1307.535 2190.760
1307.300 2190.690 1307.365 2190.760
1307.365 2190.690 1307.535 2190.760
1307.365 2190.690 1307.535 2190.760
1307.535 2190.690 1307.600 2190.760
1307.365 2190.690 1307.535 2190.760
1307.535 2190.690 1307.725 2190.760
1307.725 2190.690 1307.895 2190.760
1307.895 2190.690 1308.390 2190.760
1308.020 2190.690 1308.390 2190.760
1307.950 2190.690 1308.320 2190.760
1307.950 2190.690 1308.445 2190.760
1308.445 2190.690 1308.615 2190.760
1308.615 2190.690 1308.805 2190.760
1308.805 2190.690 1308.975 2190.760
1308.740 2190.690 1308.805 2190.760
1308.805 2190.690 1308.975 2190.760
1308.805 2190.690 1308.975 2190.760
1308.975 2190.690 1309.040 2190.760
1308.805 2190.690 1308.975 2190.760
1308.975 2190.690 1309.165 2190.760
1309.165 2190.690 1309.335 2190.760
1309.335 2190.690 1309.830 2190.760
1309.460 2190.690 1309.830 2190.760
1309.390 2190.690 1309.760 2190.760
1309.390 2190.690 1309.885 2190.760
1309.885 2190.690 1310.055 2190.760
1310.055 2190.690 1310.245 2190.760
1310.245 2190.690 1310.415 2190.760
1310.180 2190.690 1310.245 2190.760
1310.245 2190.690 1310.415 2190.760
1310.245 2190.690 1310.415 2190.760
1310.415 2190.690 1310.480 2190.760
1310.245 2190.690 1310.415 2190.760
1310.415 2190.690 1310.605 2190.760
1310.605 2190.690 1310.775 2190.760
1310.775 2190.690 1311.270 2190.760
1310.900 2190.690 1311.270 2190.760
1305.440 2191.100 1305.565 2191.130
1305.440 2191.060 1305.565 2191.100
1305.565 2191.100 1305.735 2191.130
1305.565 2191.060 1305.735 2191.100
1305.735 2191.100 1305.860 2191.130
1305.735 2191.060 1305.860 2191.100
1306.160 2191.100 1306.285 2191.130
1306.160 2191.060 1306.285 2191.100
1306.285 2191.100 1306.455 2191.130
1306.285 2191.060 1306.455 2191.100
1306.455 2191.100 1306.580 2191.130
1306.455 2191.060 1306.580 2191.100
1306.880 2191.100 1307.005 2191.130
1306.880 2191.060 1307.005 2191.100
1307.005 2191.100 1307.175 2191.130
1307.005 2191.060 1307.175 2191.100
1307.175 2191.100 1307.300 2191.130
1307.175 2191.060 1307.300 2191.100
1307.600 2191.100 1307.725 2191.130
1307.600 2191.060 1307.725 2191.100
1307.725 2191.100 1307.895 2191.130
1307.725 2191.060 1307.895 2191.100
1307.895 2191.100 1308.020 2191.130
1307.895 2191.060 1308.020 2191.100
1308.320 2191.100 1308.445 2191.130
1308.320 2191.060 1308.445 2191.100
1308.445 2191.100 1308.615 2191.130
1308.445 2191.060 1308.615 2191.100
1308.615 2191.100 1308.740 2191.130
1308.615 2191.060 1308.740 2191.100
1309.040 2191.100 1309.165 2191.130
1309.040 2191.060 1309.165 2191.100
1309.165 2191.100 1309.335 2191.130
1309.165 2191.060 1309.335 2191.100
1309.335 2191.100 1309.460 2191.130
1309.335 2191.060 1309.460 2191.100
1309.760 2191.100 1309.885 2191.130
1309.760 2191.060 1309.885 2191.100
1309.885 2191.100 1310.055 2191.130
1309.885 2191.060 1310.055 2191.100
1310.055 2191.100 1310.180 2191.130
1310.055 2191.060 1310.180 2191.100
1310.480 2191.100 1310.605 2191.130
1310.480 2191.060 1310.605 2191.100
1310.605 2191.100 1310.775 2191.130
1310.605 2191.060 1310.775 2191.100
1310.775 2191.100 1310.900 2191.130
1310.775 2191.060 1310.900 2191.100
----------------------------------------
[INFO]: COUNT: 1112
[INFO]: Should be divided by 3 or 4