sky130A addded
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+#------------------------------------------------------------------------
+# Copyright (c) 2020 R. Timothy Edwards
+# Revisions: See below
+#
+# This file is an Open Source foundry process describing
+# the SkyWater sky130 hybrid 0.18um / 0.13um fabrication
+# process. The file may be distributed under the terms
+# of the Apache 2.0 license agreement.
+#
+#------------------------------------------------------------------------
+tech
+ format 35
+ sky130A
+end
+
+version
+ version 1.0.204-0-ge27b678
+ description "SkyWater SKY130: Open Source rules and DRC"
+ requires magic-8.3.111
+end
+
+#------------------------------------------------------------------------
+# Status 7/10/20: Rev 1 (alpha):
+# First public release
+# Status 8/14/20: Rev 2 (alpha):
+# Started updating with new device/model naming convention
+# Status 1/3/21: Taking out of beta and declaring an official release.
+#------------------------------------------------------------------------
+
+#------------------------------------------------------------------------
+# Supported device types
+#------------------------------------------------------------------------
+# device name magic ID layer description
+#------------------------------------------------------------------------
+# sky130_fd_pr__nfet_01v8 nfet standard nFET
+# sky130_fd_pr__nfet_01v8 scnfet standard nFET in standard cell**
+# sky130_fd_pr__special_nfet_latch npd special nFET in SRAM cell
+# sky130_fd_pr__special_nfet_pass npass special nFET in SRAM cell
+# sky130_fd_pr__nfet_01v8_lvt nfetlvt low Vt nFET
+# sky130_fd_bs_flash__special_sonosfet_star nsonos SONOS nFET
+# sky130_fd_pr__pfet_01v8 pfet standard pFET
+# sky130_fd_pr__pfet_01v8 scpfet standard pFET in standard cell**
+# sky130_fd_pr__special_pfet_pass ppu special pFET in SRAM cell
+# sky130_fd_pr__pfet_01v8_lvt pfetlvt low Vt pFET
+# sky130_fd_pr__pfet_01v8_mvt pfetmvt med Vt pFET
+# sky130_fd_pr__pfet_01v8_hvt pfethvt high Vt pFET
+# sky130_fd_pr__nfet_03v3_nvt nnfet native nFET
+# sky130_fd_pr__pfet_g5v0d10v5 mvpfet thickox pFET
+# sky130_fd_pr__nfet_g5v0d10v5 mvnfet thickox nFET
+# sky130_fd_pr__nfet_01v8_nvt mvnnfet thickox native nFET
+# sky130_fd_pr__diode_pw2nd_05v5 ndiode n+ diff diode
+# sky130_fd_pr__diode_pw2nd_05v5_lvt ndiodelvt low Vt n+ diff diode
+# sky130_fd_pr__diode_pw2nd_05v5_nvt nndiode diode with nndiff
+# sky130_fd_pr__diode_pw2nd_11v0 mvndiode thickox n+ diff diode
+# sky130_fd_pr__diode_pd2nw_05v5 pdiode p+ diff diode
+# sky130_fd_pr__diode_pd2nw_05v5_lvt pdiodelvt low Vt p+ diff diode
+# sky130_fd_pr__diode_pd2nw_05v5_hvt pdiodehvt high Vt p+ diff diode
+# sky130_fd_pr__diode_pd2nw_11v0 mvpdiode thickox p+ diff diode
+# sky130_fd_pr__npn_05v5 pbase NPN in deep nwell
+# sky130_fd_pr__npn_11v0 pbase thick oxide gated NPN
+# sky130_fd_pr__pnp_05v5 nbase PNP
+# sky130_fd_pr__cap_mim_m3_1 mimcap MiM cap 1st plate
+# sky130_fd_pr__cap_mim_m3_2 mimcap2 MiM cap 2nd plate
+# sky130_fd_pr__res_generic_nd rdn n+ diff resistor
+# sky130_fd_pr__res_generic_nd__hv mvrdn thickox n+ diff resistor
+# sky130_fd_pr__res_generic_pd rdp p+ diff resistor
+# sky130_fd_pr__res_generic_pd__nv mvrdp thickox p+ diff resistor
+# sky130_fd_pr__res_generic_l1 rli local interconnect resistor
+# sky130_fd_pr__res_generic_po npres n+ poly resistor
+# sky130_fd_pr__res_high_po_* ppres (*) p+ poly resistor (300 Ohms/sq)
+# sky130_fd_pr__res_xhigh_po_* xres (*) p+ poly resistor (2k Ohms/sq)
+# sky130_fd_pr__cap_var_lvt varactor low Vt varactor
+# sky130_fd_pr__cap_var_hvt varactorhvt high Vt varactor
+# sky130_fd_pr__cap_var mvvaractor thickox varactor
+# sky130_fd_pr__res_iso_pw rpw pwell resistor (in deep nwell)
+# sky130_fd_pr__esd_nfet_g5v0d10v5 mvnfetesd ESD thickox nFET
+# sky130_fd_pr__esd_pfet_g5v0d10v5 mvpfetesd ESD thickox pFET
+#
+# (*) Note that ppres may extract into some generic type called
+# "sky130_fd_pr__res_xhigh_po", but only specific sizes of xhrpoly are
+# allowed, and these are created from fixed layouts like the types below.
+#
+# (**) nFET and pFET in standard cells are the same as devices
+# outside of the standard cell except for the DRC rule for
+# FET to diffusion contact spacing (which is 0.05um, not 0.055um)
+#
+#-------------------------------------------------------------
+# The following devices are not extracted but are represented
+# only by script-generated subcells in the PDK.
+#-------------------------------------------------------------
+# sky130_fd_pr__esd_nfet_01v8 ESD nFET
+# sky130_fd_pr__esd_nfet_05v0_nvt ESD native nFET
+# sky130_fd_pr__special_nfet_pass_flash flash nFET device
+# sky130_fd_pr__esd_rf_diode_pw2nd_11v0 ESD n+ diode
+# sky130_fd_pr__esd_rf_diode_pd2nw_11v0 ESD p+ diode
+# sky130_fd_pr__cap_vpp_* Vpp cap
+# sky130_fd_pr__ind_* inductor
+# sky130_fd_pr__fuse_m4 metal fuse device
+#--------------------------------------------------------------
+
+#-----------------------------------------------------
+# Tile planes
+#-----------------------------------------------------
+
+planes
+ dwell,dw
+ well,w
+ active,a
+ locali,li1,li
+ metal1,m1
+ metal2,m2
+ metal3,m3
+ cap1,c1
+ metal4,m4
+ cap2,c2
+ metal5,m5
+ metali,mi
+ block,b
+ comment,c
+end
+
+#-----------------------------------------------------
+# Tile types
+#-----------------------------------------------------
+
+types
+# Deep nwell
+ dwell dnwell,dnw
+ dwell isosubstrate,isosub
+
+# Wells
+ well nwell,nw
+ well pwell,pw
+ well rpw,rpwell
+ -well obswell
+ well pbase,npn
+ well nbase,pnp
+
+# Transistors
+ active nmos,ntransistor,nfet
+ -active scnmos,scntransistor,scnfet
+ -active npd,npdfet,sramnfet
+ -active npass,npassfet,srampassfet
+ active pmos,ptransistor,pfet
+ -active scpmos,scptransistor,scpfet
+ -active scpmoshvt,scpfethvt
+ -active ppu,ppufet,srampfet
+ active nnmos,nntransistor,nnfet
+ active mvnmos,mvntransistor,mvnfet
+ active mvpmos,mvptransistor,mvpfet
+ active mvnnmos,mvnntransistor,mvnnfet
+ -active mvnmosesd,mvntransistoresd,mvnfetesd
+ -active mvpmosesd,mvptransistoresd,mvpfetesd
+ active varactor,varact,var
+ active mvvaractor,mvvaract,mvvar
+
+ active pmoslvt,pfetlvt
+ active pmosmvt,pfetmvt
+ active pmoshvt,pfethvt
+ active nmoslvt,nfetlvt
+ active varactorhvt,varacthvt,varhvt
+ -active nsonos,sonos
+ -active sramnvar,corenvar,corenvaractor
+ -active srampvar,corepvar,corepvaractor
+
+# Diffusions
+ -active fomfill
+ active ndiff,ndiffusion,ndif
+ active pdiff,pdiffusion,pdif
+ active mvndiff,mvndiffusion,mvndif
+ active mvpdiff,mvpdiffusion,mvpdif
+ active ndiffc,ndcontact,ndc
+ active pdiffc,pdcontact,pdc
+ active mvndiffc,mvndcontact,mvndc
+ active mvpdiffc,mvpdcontact,mvpdc
+ active psubdiff,psubstratepdiff,ppdiff,ppd,psd,ptap
+ active nsubdiff,nsubstratendiff,nndiff,nnd,nsd,ntap
+ active mvpsubdiff,mvpsubstratepdiff,mvppdiff,mvppd,mvpsd,mvptap
+ active mvnsubdiff,mvnsubstratendiff,mvnndiff,mvnnd,mvnsd,mvntap
+ active psubdiffcont,psubstratepcontact,psc,ptapc
+ active nsubdiffcont,nsubstratencontact,nsc,ntapc
+ active mvpsubdiffcont,mvpsubstratepcontact,mvpsc,mvptapc
+ active mvnsubdiffcont,mvnsubstratencontact,mvnsc,mvntapc
+ -active obsactive
+ -active mvobsactive
+
+# Poly
+ active poly,p,polysilicon
+ active polycont,pc,pcontact,polycut,polyc
+ active xpolycontact,xpolyc,xpc
+ -active polyfill
+
+# Resistors
+ active npolyres,npres,mrp1
+ active ppolyres,ppres,xhrpoly
+ active xpolyres,xpres,xres,uhrpoly
+ active ndiffres,rnd,rdn,rndiff
+ active pdiffres,rpd,rdp,rpdiff
+ active mvndiffres,mvrnd,mvrdn,mvrndiff
+ active mvpdiffres,mvrpd,mvrdp,mvrpdiff
+ active rmp
+
+# Diodes
+ active pdiode,pdi
+ active ndiode,ndi
+ active nndiode,nndi
+ active pdiodec,pdic
+ active ndiodec,ndic
+ active nndiodec,nndic
+ active mvpdiode,mvpdi
+ active mvndiode,mvndi
+ active mvpdiodec,mvpdic
+ active mvndiodec,mvndic
+ active pdiodelvt,pdilvt
+ active pdiodehvt,pdihvt
+ active ndiodelvt,ndilvt
+ active pdiodelvtc,pdilvtc
+ active pdiodehvtc,pdihvtc
+ active ndiodelvtc,ndilvtc
+
+# Local Interconnect
+ locali locali,li1,li
+ -locali corelocali,coreli1,coreli
+ locali rlocali,rli1,rli
+ locali viali,vial,mcon,m1c,v0
+ -locali obsli1,obsli
+ -locali obsli1c,obsmcon
+ -locali lifill
+
+# Metal 1
+ metal1 metal1,m1,met1
+ metal1 rmetal1,rm1,rmet1
+ metal1 via1,m2contact,m2cut,m2c,via,v,v1
+ -metal1 obsm1
+ metal1 padl
+ -metal1 m1fill
+
+# Metal 2
+ metal2 metal2,m2,met2
+ metal2 rmetal2,rm2,rmet2
+ metal2 via2,m3contact,m3cut,m3c,v2
+ -metal2 obsm2
+ -metal2 m2fill
+
+# Metal 3
+ metal3 metal3,m3,met3
+ metal3 rmetal3,rm3,rmet3
+ -metal3 obsm3
+ metal3 via3,v3
+ -metal3 m3fill
+
+ cap1 mimcap,mim,capm
+ cap1 mimcapcontact,mimcapc,mimcc,capmc
+
+# Metal 4
+ metal4 metal4,m4,met4
+ metal4 rmetal4,rm4,rmet4
+ -metal4 obsm4
+ metal4 via4,v4
+ -metal4 m4fill
+
+ cap2 mimcap2,mim2,capm2
+ cap2 mimcap2contact,mimcap2c,mim2cc,capm2c
+
+# Metal 5
+ metal5 metal5,m5,met5
+ metal5 rm5,rmetal5,rmet5
+ -metal5 obsm5
+ -metal5 m5fill
+
+ metal5 mrdlcontact,mrdlc,pi1
+ metali metalrdl,mrdl,metrdl,rdl
+ -metali obsmrdl
+ metali pi2
+ block ubm
+
+# Miscellaneous
+ -block glass
+ -block fillblock,fillblock4
+ comment comment
+ -comment obscomment
+# fixed resistor width identifiers
+ -comment res0p35
+ -comment res0p69
+ -comment res1p41
+ -comment res2p85
+ -comment res5p73
+# fixed bipolar area identifiers
+ -comment pnp0p68
+ -comment pnp3p40
+ -comment npn1p00
+ -comment npn2p00
+ -comment npn11p0
+
+end
+
+#-----------------------------------------------------
+# Magic contact types
+#-----------------------------------------------------
+
+contact
+ pc poly locali
+ ndc ndiff locali
+ pdc pdiff locali
+ nsc nsd locali
+ psc psd locali
+ ndic ndiode locali
+ ndilvtc ndiodelvt locali
+ nndic nndiode locali
+ pdic pdiode locali
+ pdilvtc pdiodelvt locali
+ pdihvtc pdiodehvt locali
+ xpc xpc locali
+
+ mvndc mvndiff locali
+ mvpdc mvpdiff locali
+ mvnsc mvnsd locali
+ mvpsc mvpsd locali
+ mvndic mvndiode locali
+ mvpdic mvpdiode locali
+
+ mcon locali metal1
+ obsmcon obsli metal1
+
+ via1 metal1 metal2
+ via2 metal2 metal3
+ via3 metal3 metal4
+ via4 metal4 metal5
+ stackable
+
+ # MiM cap contacts are not stackable!
+ mimcc mimcap metal4
+ mim2cc mimcap2 metal5
+
+ padl m1 m2 m3 m4 m5 glass
+
+ mrdlc metal5 mrdl
+ pi2 mrdl ubm
+end
+
+#-----------------------------------------------------
+# Layer aliases
+#-----------------------------------------------------
+
+aliases
+
+ allwellplane nwell
+ allnwell nwell,obswell,pnp
+
+ allnfets nfet,npass,npd,scnfet,mvnfet,mvnfetesd,mvnnfet,nnfet,nfetlvt,nsonos
+ allpfets pfet,ppu,scpfet,scpfethvt,mvpfet,mvpfetesd,pfethvt,pfetlvt,pfetmvt
+ allfets allnfets,allpfets,varactor,mvvaractor,varhvt,corenvar,corepvar
+ allfetsstd nfet,mvnfet,mvnfetesd,mvnnfet,nnfet,nfetlvt,pfet,mvpfet,mvpfetesd,pfethvt,pfetlvt,pfetmvt
+ allfetsspecial scnfet,scpfet,scpfethvt
+ allfetscore npass,npd,nsonos,ppu,corenvar,corepvar
+ allfetsnolvt nfet,npass,npd,scnfet,mvnfet,mvnfetesd,mvnnfet,nnfet,nsonos,pfet,ppu,scpfet,scpfethvt,mvpfet,mvpfetesd,pfethvt,pfetmvt,varactor,mvvaractor,varhvt,corenvar
+
+ allnactivenonfet *ndiff,*nsd,*ndiode,*nndiode,*mvndiff,*mvnsd,*mvndiode,*ndiodelvt
+ allnactive allnactivenonfet,allnfets
+ allnactivenontap *ndiff,*ndiode,*nndiode,*mvndiff,*mvndiode,*ndiodelvt,allnfets
+ allnactivetap *nsd,*mvnsd,var,varhvt,mvvar,corenvar
+
+ allpactivenonfet *pdiff,*psd,*pdiode,*mvpdiff,*mvpsd,*mvpdiode,*pdiodelvt,*pdiodehvt
+ allpactive allpactivenonfet,allpfets
+ allpactivenontap *pdiff,*pdiode,*mvpdiff,*mvpdiode,*pdiodelvt,*pdiodehvt,allpfets
+ allpactivetap *psd,*mvpsd,corepvar
+
+ allactivenonfet allnactivenonfet,allpactivenonfet
+ allactive allactivenonfet,allfets
+
+ allactiveres ndiffres,pdiffres,mvndiffres,mvpdiffres
+
+ allndifflv *ndif,*nsd,*ndiode,ndiffres,nfet,npass,npd,scnfet,nfetlvt,nsonos
+ allpdifflv *pdif,*psd,*pdiode,pdiffres,pfet,ppu,scpfet,scpfethvt,pfetlvt,pfetmvt,pfethvt
+ alldifflv allndifflv,allpdifflv
+ allndifflvnonfet *ndif,*nsd,*ndiode,*nndiode,ndiffres,*ndiodelvt
+ allpdifflvnonfet *pdif,*psd,*pdiode,pdiffres,*pdiodelvt,*pdiodehvt
+ alldifflvnonfet allndifflvnonfet,allpdifflvnonfet
+
+ allndiffmv *mvndif,*mvnsd,*mvndiode,*nndiode,mvndiffres,mvnfet,mvnfetesd,mvnnfet,nnfet
+ allpdiffmv *mvpdif,*mvpsd,*mvpdiode,mvpdiffres,mvpfet,mvpfetesd
+ alldiffmv allndiffmv,allpdiffmv
+ allndiffmvnontap *mvndif,*mvndiode,*nndiode,mvndiffres,mvnfet,mvnfetesd,mvnnfet,nnfet
+ allpdiffmvnontap *mvpdif,*mvpdiode,mvpdiffres,mvpfet,mvpfetesd
+ alldiffmvnontap allndiffmvnontap,allpdiffmvnontap
+ allndiffmvnonfet *mvndif,*mvnsd,*mvndiode,*nndiode,mvndiffres
+ allpdiffmvnonfet *mvpdif,*mvpsd,*mvpdiode,mvpdiffres
+ alldiffmvnonfet allndiffmvnonfet,allpdiffmvnonfet
+
+ alldiffnonfet alldifflvnonfet,alldiffmvnonfet
+ alldiff alldifflv,alldiffmv,fomfill
+
+ allpolyres mrp1,xhrpoly,uhrpoly,rmp
+ allpolynonfet *poly,allpolyres,xpc
+ allpolynonres *poly,allfets,xpc
+
+ allpoly allpolynonfet,allfets
+ allpolynoncap *poly,xpc,allfets,allpolyres
+
+ allndiffcontlv ndc,nsc,ndic,nndic,ndilvtc
+ allpdiffcontlv pdc,psc,pdic,pdilvtc,pdihvtc
+ allndiffcontmv mvndc,mvnsc,mvndic
+ allpdiffcontmv mvpdc,mvpsc,mvpdic
+ allndiffcont allndiffcontlv,allndiffcontmv
+ allpdiffcont allpdiffcontlv,allpdiffcontmv
+ alldiffcontlv allndiffcontlv,allpdiffcontlv
+ alldiffcontmv allndiffcontmv,allpdiffcontmv
+ alldiffcont alldiffcontlv,alldiffcontmv
+
+ allcont alldiffcont,pc
+
+ allres allpolyres,allactiveres
+
+ allli *locali,coreli,rli
+ allm1 *m1,rm1
+ allm2 *m2,rm2
+ allm3 *m3,rm3
+ allm4 *m4,rm4
+ allm5 *m5,rm5
+
+ allpad padl
+
+ psub pwell
+
+ obstypes obswell,obsactive,obsli,obsmcon,obsm1,obsm2,obsm3,obsm4,obsm5,obsmrdl,obscomment
+ idtypes res0p35,res0p69,res1p41,res2p85,res5p73,pnp0p68,pnp3p40,npn1p00,npn2p00,npn11p0
+ blocktypes fillblock,fillblock4
+
+end
+
+#-----------------------------------------------------
+# Layer drawing styles
+#-----------------------------------------------------
+
+styles
+ styletype mos
+ dnwell cwell
+ isosub subcircuit
+ nwell nwell
+ pwell pwell
+ rpwell pwell ptransistor_stripes
+ ndiff ndiffusion
+ fomfill ndiffusion
+ pdiff pdiffusion
+ nsd ndiff_in_nwell
+ psd pdiff_in_pwell
+ nfet ntransistor ntransistor_stripes
+ scnfet ntransistor ntransistor_stripes
+ npass ntransistor ntransistor_stripes
+ npd ntransistor ntransistor_stripes
+ pfet ptransistor ptransistor_stripes
+ scpfet ptransistor ptransistor_stripes
+ scpfethvt ptransistor ptransistor_stripes implant2
+ ppu ptransistor ptransistor_stripes
+ var polysilicon ndiff_in_nwell
+ ndc ndiffusion metal1 contact_X'es
+ pdc pdiffusion metal1 contact_X'es
+ nsc ndiff_in_nwell metal1 contact_X'es
+ psc pdiff_in_pwell metal1 contact_X'es
+ corenvar polysilicon ndiff_in_nwell
+ corepvar polysilicon pdiff_in_pwell
+
+ pnp nwell ntransistor_stripes
+ npn pwell ptransistor_stripes
+
+ pfetlvt ptransistor ptransistor_stripes implant1
+ pfetmvt ptransistor ptransistor_stripes implant3
+ pfethvt ptransistor ptransistor_stripes implant2
+ nfetlvt ntransistor ntransistor_stripes implant1
+ nsonos ntransistor implant3
+ varhvt polysilicon ndiff_in_nwell implant2
+ nnfet ntransistor ndiff_in_nwell
+
+ mvndiff ndiffusion hvndiff_mask
+ mvpdiff pdiffusion hvpdiff_mask
+ mvnsd ndiff_in_nwell hvndiff_mask
+ mvpsd pdiff_in_pwell hvpdiff_mask
+ mvnfet ntransistor ntransistor_stripes hvndiff_mask
+ mvnfetesd ntransistor ntransistor_stripes hvndiff_mask
+ mvnnfet ntransistor ndiff_in_nwell hvndiff_mask
+ mvpfet ptransistor ptransistor_stripes
+ mvpfetesd ptransistor ptransistor_stripes
+ mvvar polysilicon ndiff_in_nwell hvndiff_mask
+ mvndc ndiffusion metal1 contact_X'es hvndiff_mask
+ mvpdc pdiffusion metal1 contact_X'es hvpdiff_mask
+ mvnsc ndiff_in_nwell metal1 contact_X'es hvndiff_mask
+ mvpsc pdiff_in_pwell metal1 contact_X'es hvpdiff_mask
+
+ poly polysilicon
+ polyfill polysilicon
+ pc polysilicon metal1 contact_X'es
+ npolyres polysilicon silicide_block nselect2
+ ppolyres polysilicon silicide_block pselect2
+ xpc polysilicon pselect2 metal1 contact_X'es
+ rmp polysilicon poly_resist_stripes
+
+ res0p35 implant1
+ res0p69 implant1
+ res1p41 implant1
+ res2p85 implant1
+ res5p73 implant1
+ pnp0p68 implant1
+ pnp3p40 implant1
+ npn1p00 implant1
+ npn2p00 implant1
+ npn11p0 implant1
+
+ pdiode pdiffusion pselect2
+ ndiode ndiffusion nselect2
+ pdiodec pdiffusion pselect2 metal1 contact_X'es
+ ndiodec ndiffusion nselect2 metal1 contact_X'es
+
+ nndiode ndiffusion nselect2 implant3
+ ndiodelvt ndiffusion nselect2 implant1
+ pdiodelvt pdiffusion pselect2 implant1
+ pdiodehvt pdiffusion pselect2 implant2
+ pdilvtc pdiffusion pselect2 implant1 metal1 contact_X'es
+ pdihvtc pdiffusion pselect2 implant2 metal1 contact_X'es
+ ndilvtc ndiffusion nselect2 implant1 metal1 contact_X'es
+
+ mvpdiode pdiffusion pselect2 hvpdiff_mask
+ mvndiode ndiffusion nselect2 hvndiff_mask
+ mvpdiodec pdiffusion pselect2 metal1 contact_X'es hvpdiff_mask
+ mvndiodec ndiffusion nselect2 metal1 contact_X'es hvndiff_mask
+ nndiodec ndiff_in_nwell nselect2 metal1 contact_X'es hvndiff_mask
+
+ locali metal1
+ lifill metal1
+ coreli metal1
+ rli metal1 poly_resist_stripes
+ mcon metal1 metal2 via1arrow
+ obsli metal1
+ obsmcon metal1 metal2 via1arrow
+
+ metal1 metal2
+ m1fill metal2
+ rm1 metal2 poly_resist_stripes
+ obsm1 metal2
+ m2c metal2 metal3 via2arrow
+ metal2 metal3
+ m2fill metal3
+ rm2 metal3 poly_resist_stripes
+ obsm2 metal3
+ m3c metal3 metal4 via3alt
+ metal3 metal4
+ m3fill metal4
+ rm3 metal4 poly_resist_stripes
+ obsm3 metal4
+ mimcap metal3 mems
+ mimcc metal3 contact_X'es mems
+ mimcap2 metal4 mems
+ mim2cc metal4 contact_X'es mems
+ via3 metal4 metal5 via4
+ metal4 metal5
+ m4fill metal5
+ rm4 metal5 poly_resist_stripes
+ obsm4 metal5
+ via4 metal5 metal6 via5
+ metal5 metal6
+ m5fill metal6
+ rm5 metal6 poly_resist_stripes
+ obsm5 metal6
+ mrdlc metal6 metal7 via6
+ metalrdl metal7
+ obsmrdl metal7
+ ubm metal8
+ pi2 metal7 metal8 via7
+
+ glass overglass
+ mrp1 poly_resist poly_resist_stripes
+ xhrpoly poly_resist silicide_block
+ uhrpoly poly_resist
+ ndiffres ndiffusion ndop_stripes
+ pdiffres pdiffusion pdop_stripes
+ mvndiffres ndiffusion hvndiff_mask ndop_stripes
+ mvpdiffres pdiffusion hvpdiff_mask pdop_stripes
+ comment comment
+ error_p error_waffle
+ error_s error_waffle
+ error_ps error_waffle
+ fillblock cwell
+ fillblock4 cwell
+
+ obswell cwell
+ obsactive implant4
+
+ padl metal6 via6 overglass
+
+ magnet substrate_field_implant
+ rotate via3alt
+ fence via5
+end
+
+#-----------------------------------------------------
+# Special paint/erase rules
+#-----------------------------------------------------
+
+compose
+ compose nfet poly ndiff
+ compose pfet poly pdiff
+ compose var poly nsd
+
+ compose mvnfet poly mvndiff
+ compose mvpfet poly mvpdiff
+ compose mvvar poly mvnsd
+
+ paint obsmcon locali via1
+ paint obsmcon obsm1 obsli,obsm1
+
+ paint ndc nwell pdc
+ paint nfet nwell pfet
+ paint scnfet nwell scpfet
+ paint ndiff nwell pdiff
+ paint psd nwell nsd
+ paint psc nwell nsc
+ paint npd nwell ppu
+
+ paint pdc pwell ndc
+ paint pfet pwell nfet
+ paint scpfet pwell scnfet
+ paint pdiff pwell ndiff
+ paint nsd pwell psd
+ paint nsc pwell psc
+ paint ppu pwell npd
+
+ paint pdc coreli pdc
+ paint ndc coreli ndc
+ paint pc coreli pc
+ paint nsc coreli nsc
+ paint psc coreli psc
+ paint viali coreli viali
+
+ paint coreli pdc pdc
+ paint coreli ndc ndc
+ paint coreli pc pc
+ paint coreli nsc nsc
+ paint coreli psc psc
+ paint coreli viali viali
+
+ paint m4 obsm4 m4
+ paint m5 obsm5 m5
+end
+
+#-----------------------------------------------------
+# Electrical connectivity
+#-----------------------------------------------------
+
+connect
+ *nwell,*nsd,*mvnsd,dnwell,pnp *nwell,*nsd,*mvnsd,dnwell,pnp
+ pwell,*psd,*mvpsd,npn pwell,*psd,*mvpsd,npn
+ *li,coreli,lifill *li,coreli,lifill
+ *m1,m1fill,obsmcon *m1,m1fill,obsmcon
+ *m2,m2fill *m2,m2fill
+ *m3,m3fill *m3,m3fill
+ *m4,m4fill *m4,m4fill
+ *m5,m5fill *m5,m5fill
+ *mimcap *mimcap
+ *mimcap2 *mimcap2
+ allnactivenonfet allnactivenonfet
+ allpactivenonfet allpactivenonfet
+ *poly,xpc,allfets,polyfill *poly,xpc,allfets,polyfill
+ # RDL connects to m5 (i.e., padl) through glass cut
+ *mrdl *mrdl
+ glass metrdl
+end
+
+#-----------------------------------------------------
+# CIF/GDS output layer definitions
+#-----------------------------------------------------
+# NOTE: All values in this section MUST be multiples of 25
+# or else magic will scale below the allowed layout grid size
+
+cifoutput
+
+#----------------------------------------------------------------
+style gdsii
+# NOTE: This section is used for actual GDS output
+#----------------------------------------------------------------
+ scalefactor 10 nanometers
+ options calma-permissive-labels
+ gridlimit 5
+
+#----------------------------------------------------------------
+# Create a temp layer from the cell bounding box for use in
+# generating ID layers. Note that "boundary", unlike "bbox",
+# requires the FIXED_BBOX property (abutment box) in the cell.
+#----------------------------------------------------------------
+ templayer CELLBOUND
+ boundary
+
+#----------------------------------------------------------------
+# BOUND
+#----------------------------------------------------------------
+ layer BOUND CELLBOUND
+ calma 235 4
+
+#----------------------------------------------------------------
+# DNWELL
+#----------------------------------------------------------------
+
+ layer DNWELL dnwell,npn
+ calma 64 18
+
+ layer PWRES rpw
+ and dnwell
+ calma 64 13
+
+#----------------------------------------------------------------
+# SUBCUT
+#----------------------------------------------------------------
+
+ layer SUBCUT isosub
+ calma 81 53
+
+#----------------------------------------------------------------
+# NWELL
+#----------------------------------------------------------------
+
+ layer NWELL allnwell
+ bloat-all rpw dnwell
+ and-not rpw,pwell
+ calma 64 20
+
+ layer WELLTXT
+ labels allnwell noport
+ calma 64 5
+
+ layer WELLPIN
+ labels allnwell port
+ calma 64 16
+
+#----------------------------------------------------------------
+# SUB (text/port only)
+#----------------------------------------------------------------
+
+ layer SUBTXT
+ labels pwell noport
+ calma 64 59
+
+ layer SUBPIN
+ labels pwell port
+ calma 122 16
+
+#----------------------------------------------------------------
+# DIFF
+#----------------------------------------------------------------
+
+ layer DIFF allnactivenontap,allpactivenontap,allactiveres
+ calma 65 20
+
+ layer DIFFTXT
+ labels allnactivenontap,allpactivenontap noport
+ calma 65 6
+
+ layer DIFFPIN
+ labels allnactivenontap,allpactivenontap port
+ calma 65 16
+
+#----------------------------------------------------------------
+# TAP
+#----------------------------------------------------------------
+
+ layer TAP allnactivetap,allpactivetap
+ labels allnactivetap,allpactivetap port
+ calma 65 44
+
+ layer TAPTXT
+ labels allnactivetap,allpactivetap noport
+ calma 65 5
+
+#----------------------------------------------------------------
+# FOM
+#----------------------------------------------------------------
+
+ layer FOMFILL fomfill
+ labels fomfill
+ calma 23 28
+
+#----------------------------------------------------------------
+# PSDM, NSDM (PPLUS, NPLUS implants)
+#----------------------------------------------------------------
+
+ templayer basePSDM pdiffres,mvpdiffres
+ grow 15
+ or xhrpoly,uhrpoly,xpc
+ grow 110
+ bloat-or allpactivetap * 125 allnactivenontap 0
+ bloat-or allpactivenontap * 125 allnactivetap 0
+
+ templayer baseNSDM ndiffres,mvndiffres
+ grow 125
+ bloat-or allnactivetap * 125 allpactivenontap 0
+ bloat-or allnactivenontap * 125 allpactivetap 0
+
+ templayer extendPSDM basePSDM
+ bridge 380 380
+ and-not baseNSDM
+
+ layer PSDM basePSDM,extendPSDM
+ grow 185
+ shrink 185
+ close 265000
+ mask-hints PSDM
+ calma 94 20
+
+ templayer extendNSDM baseNSDM
+ bridge 380 380
+ and-not basePSDM
+
+ layer NSDM baseNSDM,extendNSDM
+ grow 185
+ shrink 185
+ close 265000
+ mask-hints NSDM
+ calma 93 44
+
+#----------------------------------------------------------------
+# LVID
+#----------------------------------------------------------------
+
+ layer LVID nnfet
+ grow 100
+ calma 81 60
+
+#----------------------------------------------------------------
+# LVTN
+#----------------------------------------------------------------
+
+ layer LVTN pfetlvt,nfetlvt,mvvar,mvnnfet,nnfet,nsonos,*pdiodelvt,*ndiodelvt,*nndiode
+ grow 180
+ bridge 380 380
+ grow 185
+ shrink 185
+ close 265000
+ mask-hints LVTN
+ calma 125 44
+
+#----------------------------------------------------------------
+# HVTR
+#----------------------------------------------------------------
+
+ layer HVTR pfetmvt
+ grow 180
+ bridge 380 380
+ grow 185
+ shrink 185
+ close 265000
+ calma 18 20
+
+#----------------------------------------------------------------
+# HVTP
+#----------------------------------------------------------------
+
+ layer HVTP scpfethvt,ppu,pfethvt,varhvt,*pdiodehvt
+ grow 180
+ bridge 380 380
+ grow 185
+ shrink 185
+ close 265000
+ mask-hints HVTP
+ calma 78 44
+
+#----------------------------------------------------------------
+# SONOS
+#----------------------------------------------------------------
+
+ layer SONOS nsonos
+ grow 100
+ grow-min 410
+ bridge 500 410
+ grow 250
+ shrink 250
+ calma 80 20
+
+#----------------------------------------------------------------
+# SONOS requires COREID around area (areaid.ce). Also, the
+# coreli layer indicates a cell needing COREID. Also, devices
+# npd, npass, and ppu indicate a COREID cell.
+#----------------------------------------------------------------
+
+ layer COREID
+ bloat-all nsonos,coreli,ppu,npd,npass,corepvar,corenvar CELLBOUND
+ mask-hints COREID
+ calma 81 2
+
+#----------------------------------------------------------------
+# STDCELL applies to all cells containing scnfet or scpfet.
+#----------------------------------------------------------------
+
+ layer STDCELL scnfet
+ bloat-all scpfet,scpfethvt,scnfet CELLBOUND
+ mask-hints STDCELL
+ calma 81 4
+
+#----------------------------------------------------------------
+# ESDID is a marker layer for ESD devices in the padframe I/O.
+#----------------------------------------------------------------
+
+ layer ESDID
+ bloat-all mvnfetesd *mvndiff,*poly
+ bloat-all mvpfetesd *mvpdiff,*poly
+ grow 100
+ mask-hints ESDID
+ calma 81 19
+
+#----------------------------------------------------------------
+# NPNID and PNPID apply to bipolar transistors
+#----------------------------------------------------------------
+
+ layer NPNID
+ bloat-all npn dnwell
+ mask-hints NPNID
+ calma 82 20
+
+ templayer pnparea pnp
+ grow 400
+
+ layer PNPID
+ bloat-all pnparea *psd
+ or pnparea
+ mask-hints PNPID
+ calma 82 44
+
+#----------------------------------------------------------------
+# RPM
+#----------------------------------------------------------------
+
+ layer RPM
+ bloat-all xhrpoly xpc
+ grow 200
+ grow-min 1270
+ grow 420
+ shrink 420
+ calma 86 20
+
+#----------------------------------------------------------------
+# URPM (2kOhms/sq. poly implant)
+#----------------------------------------------------------------
+
+ layer URPM
+ bloat-all uhrpoly xpc
+ grow 200
+ grow-min 1270
+ grow 420
+ shrink 420
+ calma 79 20
+
+#----------------------------------------------------------------
+# LDNTM (Tip implant for SONOS FETs)
+#----------------------------------------------------------------
+
+ layer LDNTM
+ bloat-all nsonos *ndiff
+ grow 185
+ grow 345
+ shrink 345
+ calma 11 44
+
+#----------------------------------------------------------------
+# HVNTM (Tip implant for MV ndiff devices)
+#----------------------------------------------------------------
+
+ templayer hvntm_block *mvpsd
+ grow 185
+
+ layer HVNTM
+ bloat-all mvnfet,mvnfetesd,mvnnfet,nnfet,*mvndiode,mvrdn,*nndiode *mvndiff
+ bloat-all mvvaractor *mvnsd
+ and-not hvntm_block
+ grow 185
+ grow 345
+ shrink 345
+ and-not hvntm_block
+ mask-hints HVNTM
+ calma 125 20
+
+#----------------------------------------------------------------
+# POLY
+#----------------------------------------------------------------
+
+ layer POLY allpoly
+ calma 66 20
+
+ layer POLYTXT
+ labels allpoly noport
+ calma 66 5
+
+ layer POLYPIN
+ labels allpoly port
+ calma 66 16
+
+ layer POLYFILL polyfill
+ labels polyfill
+ calma 28 28
+
+#----------------------------------------------------------------
+# HVI (includes rules NWELL 8-11 and DIFFTAP 14-26)
+#----------------------------------------------------------------
+
+ templayer thkox_area alldiffmv,mvvar
+ grow 185
+ bloat-all alldiffmv nwell
+ grow 345
+ shrink 345
+
+ templayer large_ptap_mv thkox_area
+ shrink 420
+ grow 420
+
+ templayer small_ptap_mv thkox_area
+ and-not large_ptap_mv
+ # (HVI min width rule is 0.6 but CNTM min width rule is 0.84um)
+ grow-min 840
+
+ layer HVI thkox_area,small_ptap_mv
+ bridge 700 600
+ grow 345
+ shrink 345
+ mask-hints HVI
+ calma 75 20
+
+#----------------------------------------------------------------
+# CONT (LICON)
+#----------------------------------------------------------------
+
+ layer CONT allcont
+ squares-grid 0 170 170
+ calma 66 44
+
+ # Contact for pres is different than other LICON contacts
+ # See rules LICON 1b, 1c (width/length) and 2b (spacing)
+ templayer xpc_horiz xpc
+ shrink 1007
+ grow 1007
+
+ layer CONT xpc
+ and-not xpc_horiz
+ # Force long edge vertical for contacts narrower than 2um
+ # Minimum space is 350 but 520 satisfies no. of contacts rule
+ slots 80 190 520 80 2000 350
+ calma 66 44
+
+ layer CONT xpc
+ and xpc_horiz
+ # Force long edge vertical for contacts wider than 2um
+ # Minimum space is 350 but 520 satisfies no. of contacts rule
+ slots 80 2000 350 80 190 520
+ calma 66 44
+
+#----------------------------------------------------------------
+# NPC (Nitride poly cut)
+# surrounds CONT (LICON) on poly only (i.e., pc)
+#----------------------------------------------------------------
+
+ # Avoids a common case of NPC bridges too close to other LICON shapes.
+ templayer diffcutarea pdc,ndc,psc,nsc,mvpdc,mvndc,mvpsc,mvnsc
+ grow 90
+
+ layer NPC pc
+ squares-grid 0 170 170
+ grow 100
+ bridge 270 270
+ and-not diffcutarea
+ bridge 270 270
+ grow 130
+ shrink 130
+ mask-hints NPC
+ calma 95 20
+
+ # NPC is also generated on xhrpoly and uhrpoly resistors
+
+ layer NPC xpc,xhrpoly,uhrpoly
+ # xpc surrounds precision_resistor by 0.095um
+ grow 95
+ grow 130
+ shrink 130
+ calma 95 20
+
+#----------------------------------------------------------------
+# Device markers
+#----------------------------------------------------------------
+
+ layer DIFFRES rdn,mvrdn,rdp,mvrdp
+ calma 65 13
+
+ layer POLYRES mrp1
+ calma 66 13
+
+ # POLYSHORT is a poly layer resistor like rli, rm1, etc., for metal layers
+ layer POLYSHORT rmp
+ calma 66 15
+
+ # POLYRES extends to edge of contact cut
+ layer POLYRES xhrpoly,uhrpoly
+ grow 60
+ and xpc
+ or xhrpoly,uhrpoly
+ calma 66 13
+
+ layer DIODE *pdi,*ndi,*nndi,*mvpdi,*mvndi,*pdilvt,*pdihvt,*ndilvt
+ # To be done: Expand to include anode, cathode, and guard ring
+ calma 81 23
+
+#----------------------------------------------------------------
+# LI
+#----------------------------------------------------------------
+ layer LI allli
+ calma 67 20
+
+ layer LITXT
+ labels *locali,coreli noport
+ calma 67 5
+
+ layer LIPIN
+ labels *locali,coreli port
+ calma 67 16
+
+ layer LIRES rli
+ labels rli
+ calma 67 13
+
+ layer LIFILL lifill
+ labels lifill
+ calma 56 28
+
+#----------------------------------------------------------------
+# MCON
+#----------------------------------------------------------------
+ layer MCON mcon
+ squares-grid 0 170 190
+ calma 67 44
+
+#----------------------------------------------------------------
+# MET1
+#----------------------------------------------------------------
+ layer MET1 allm1
+ calma 68 20
+
+ layer MET1TXT
+ labels allm1 noport
+ calma 68 5
+
+ layer MET1PIN
+ labels allm1 port
+ calma 68 16
+
+ layer MET1RES rm1
+ labels rm1
+ calma 68 13
+
+ layer MET1FILL m1fill
+ labels m1fill
+ calma 36 28
+
+#----------------------------------------------------------------
+# VIA1
+#----------------------------------------------------------------
+ layer VIA1 via1
+ squares-grid 55 150 170
+ calma 68 44
+
+#----------------------------------------------------------------
+# MET2
+#----------------------------------------------------------------
+ layer MET2 allm2
+ calma 69 20
+
+ layer MET2TXT
+ labels allm2 noport
+ calma 69 5
+
+ layer MET2PIN
+ labels allm2 port
+ calma 69 16
+
+ layer MET2RES rm2
+ labels rm2
+ calma 69 13
+
+ layer MET2FILL m2fill
+ labels m2fill
+ calma 41 28
+
+#----------------------------------------------------------------
+# VIA2
+#----------------------------------------------------------------
+ layer VIA2 via2
+ squares-grid 40 200 200
+ calma 69 44
+
+#----------------------------------------------------------------
+# MET3
+#----------------------------------------------------------------
+ layer MET3 allm3
+ calma 70 20
+
+ layer MET3TXT
+ labels allm3 noport
+ calma 70 5
+
+ layer MET3PIN
+ labels allm3 port
+ calma 70 16
+
+ layer MET3RES rm3
+ labels rm3
+ calma 70 13
+
+ layer MET3FILL m3fill
+ labels m3fill
+ calma 34 28
+
+#----------------------------------------------------------------
+# VIA3
+#----------------------------------------------------------------
+ layer VIA3 via3
+ or mimcc
+ squares-grid 60 200 200
+ calma 70 44
+
+#----------------------------------------------------------------
+# MET4
+#----------------------------------------------------------------
+ layer MET4 allm4
+ calma 71 20
+
+ layer MET4TXT
+ labels allm4 noport
+ calma 71 5
+
+ layer MET4PIN
+ labels allm4 port
+ calma 71 16
+
+ layer MET4RES rm4
+ labels rm4
+ calma 71 13
+
+ layer MET4FILL m4fill
+ labels m4fill
+ calma 51 28
+
+#----------------------------------------------------------------
+# VIA4
+#----------------------------------------------------------------
+ layer VIA4 via4
+ or mim2cc
+ squares-grid 190 800 800
+ calma 71 44
+
+#----------------------------------------------------------------
+# MET5
+#----------------------------------------------------------------
+ layer MET5 allm5,m5fill
+ calma 72 20
+
+ layer MET5TXT
+ labels allm5 noport
+ calma 72 5
+
+ layer MET5PIN
+ labels allm5 port
+ calma 72 16
+
+ layer MET5RES rm5
+ labels rm5
+ calma 72 13
+
+ layer MET5FILL m5fill
+ labels m5fill
+ calma 59 28
+
+
+#----------------------------------------------------------------
+# RDL
+#----------------------------------------------------------------
+ layer RDL *metrdl
+ calma 74 20
+
+ layer RDLTXT
+ labels *metrdl noport
+ calma 74 5
+
+ layer RDLPIN
+ labels *metrdl port
+ calma 74 16
+
+ layer PI1 *metrdl
+ and padl,glass
+ # Test only---needs GDS layer number
+
+ layer UBM *metrdl
+ shrink 50000
+ grow 40000
+ # Test only---needs GDS layer number
+
+ layer PI2 *metrdl
+ shrink 50000
+ grow 25000
+ # Test only---needs GDS layer number
+
+
+#----------------------------------------------------------------
+# GLASS
+#----------------------------------------------------------------
+ layer GLASS glass
+ calma 76 20
+
+#----------------------------------------------------------------
+# CAPM
+#----------------------------------------------------------------
+ layer CAPM *mimcap
+ labels mimcap
+ calma 89 44
+
+ layer CAPM2 *mimcap2
+ labels mimcap2
+ calma 97 44
+
+#----------------------------------------------------------------
+# Chip top level marker for DRC latchup rules to check 15um
+# distance to taps (otherwise 6um is used)
+#----------------------------------------------------------------
+
+ layer LOWTAPDENSITY
+ bbox top
+ # Clear 200um for pads + 50um for required high tap density
+ # in critical area.
+ shrink 250000
+ calma 81 14
+
+#----------------------------------------------------------------
+# FILLBLOCK
+#----------------------------------------------------------------
+ layer FILLOBSFOM obsactive
+ calma 22 24
+
+ layer FILLOBSM1 fillblock,fillblock4
+ calma 62 24
+
+ layer FILLOBSM2 fillblock,fillblock4
+ calma 105 52
+
+ layer FILLOBSM3 fillblock,fillblock4
+ calma 107 24
+
+ layer FILLOBSM4 fillblock,fillblock4
+ calma 112 4
+
+ render DNWELL cwell -0.1 0.1
+ render NWELL nwell 0.0 0.2062
+ render DIFF ndiffusion 0.2062 0.12
+ render TAP pdiffusion 0.2062 0.12
+ render POLY polysilicon 0.3262 0.18
+ render CONT via 0.5062 0.43
+ render LI metal1 0.9361 0.10
+ render MCON via 1.0361 0.34
+ render MET1 metal2 1.3761 0.36
+ render VIA1 via 1.7361 0.27
+ render MET2 metal3 2.0061 0.36
+ render VIA2 via 2.3661 0.42
+ render MET3 metal4 2.7861 0.845
+ render VIA3 via 3.6311 0.39
+ render MET4 metal5 4.0211 0.845
+ render VIA4 via 4.8661 0.505
+ render MET5 metal6 5.3711 1.26
+ render CAPM metal8 2.4661 0.2
+ render CAPM2 metal9 3.7311 0.2
+ render RDL metal7 11.8834 4.0
+
+#----------------------------------------------------------------
+style drc
+#----------------------------------------------------------------
+# NOTE: This style is used for DRC only, not for GDS output
+#----------------------------------------------------------------
+ scalefactor 10 nanometers
+ options calma-permissive-labels
+
+ # Ensure nwell overlaps dnwell at least 0.4um outside and 1.03um inside
+ templayer dnwell_shrink dnwell
+ shrink 1030
+
+ templayer nwell_missing dnwell
+ grow 400
+ and-not dnwell_shrink
+ and-not nwell
+
+ templayer pwell_in_dnwell dnwell
+ and-not nwell
+
+ # SONOS nFET devices must be in deep nwell
+ templayer dnwell_missing nsonos
+ and-not dnwell
+
+ # SONOS nFET devices must be in cell with abutment box
+ templayer abutment_box
+ boundary
+
+ templayer bbox_missing nsonos
+ and-not abutment_box
+
+ # Make sure nwell covers varactor poly
+ templayer var_poly_no_nwell
+ bloat-all varactor,mvvaractor *poly
+ grow 150
+ and-not nwell
+
+ # Define MiM cap bottom plate for spacing rule
+ templayer mim_bottom
+ bloat-all *mimcap *metal3
+
+ # Define MiM2 cap bottom plate for spacing rule
+ templayer mim2_bottom
+ bloat-all *mimcap2 *metal4
+
+ # Define areas where mim2cc is inside the boundary of mimcc
+ # by more than the contact surround
+ templayer mim2_contact_overlap
+ bloat-all *mimcap2 mimcc
+ shrink 60
+ and-not *mimcap2
+
+ # Note that metal fill is performed by the foundry and so is not
+ # an option for a cifoutput style.
+
+ # Check latchup rule (15um minimum from tap LICON center to any
+ # non-tap diffusion. Note that to count as a tap, the diffusion
+ # must be contacted to LI
+
+ templayer ptap_reach psc,mvpsc
+ and-not dnwell
+ # grow total is 15um. grow in 0.84um increments to ensure that
+ # no nwell ring is crossed
+ grow 840
+ and-not nwell,dnwell
+ grow 840
+ and-not nwell,dnwell
+ grow 840
+ and-not nwell,dnwell
+ grow 840
+ and-not nwell,dnwell
+ grow 840
+ and-not nwell,dnwell
+ grow 840
+ and-not nwell,dnwell
+ grow 840
+ and-not nwell,dnwell
+ grow 840
+ and-not nwell,dnwell
+ grow 840
+ and-not nwell,dnwell
+ grow 840
+ and-not nwell,dnwell
+ grow 840
+ and-not nwell,dnwell
+ grow 840
+ and-not nwell,dnwell
+ grow 840
+ and-not nwell,dnwell
+ grow 840
+ and-not nwell,dnwell
+ grow 840
+ and-not nwell,dnwell
+ grow 840
+ and-not nwell,dnwell
+ grow 840
+ and-not nwell,dnwell
+ grow 635
+ and-not nwell,dnwell
+
+ templayer ptap_missing *ndiff,*mvndiff
+ and-not dnwell
+ and-not ptap_reach
+
+ templayer ntap_reach nsc,mvnsc
+ # grow total is 15um. grow in 1.27um increments to ensure that
+ # no nwell ring is crossed. There is no difference between
+ # ntaps in and out of deep nwell.
+ grow 1270
+ and nwell,pnp
+ grow 1270
+ and nwell,pnp
+ grow 1270
+ and nwell,pnp
+ grow 1270
+ and nwell,pnp
+ grow 1270
+ and nwell,pnp
+ grow 1270
+ and nwell,pnp
+ grow 1270
+ and nwell,pnp
+ grow 1270
+ and nwell,pnp
+ grow 1270
+ and nwell,pnp
+ grow 1270
+ and nwell,pnp
+ grow 1270
+ and nwell,pnp
+ grow 945
+ and nwell,pnp
+
+ templayer ntap_missing *pdiff,*mvpdiff
+ and-not pwell_in_dnwell
+ and-not ntap_reach
+
+ templayer dptap_reach psc,mvpsc
+ and dnwell
+ grow 840
+ and-not nwell
+ and dnwell
+ grow 840
+ and-not nwell
+ and dnwell
+ grow 840
+ and-not nwell
+ and dnwell
+ grow 840
+ and-not nwell
+ and dnwell
+ grow 840
+ and-not nwell
+ and dnwell
+ grow 840
+ and-not nwell
+ and dnwell
+ grow 840
+ and-not nwell
+ and dnwell
+ grow 840
+ and-not nwell
+ and dnwell
+ grow 840
+ and-not nwell
+ and dnwell
+ grow 840
+ and-not nwell
+ and dnwell
+ grow 840
+ and-not nwell
+ and dnwell
+ grow 840
+ and-not nwell
+ and dnwell
+ grow 840
+ and-not nwell
+ and dnwell
+ grow 840
+ and-not nwell
+ and dnwell
+ grow 840
+ and-not nwell
+ and dnwell
+ grow 840
+ and-not nwell
+ and dnwell
+ grow 840
+ and-not nwell
+ and dnwell
+ grow 635
+ and-not nwell
+ and dnwell
+
+ templayer dptap_missing *ndiff,*mvndiff
+ and dnwell
+ and-not dptap_reach
+
+ templayer pdiff_crosses_dnwell dnwell
+ grow 20
+ and-not dnwell
+ and allpdifflv,allpdiffmv
+
+ # MV nwell must be 2um from any other nwell
+ templayer mvnwell
+ bloat-all alldiffmv nwell
+ grow-min 840
+ bridge 700 600
+
+ # Simple spacing checks to lvnwell must use CIF-DRC rule
+ # Note that HVI may *abut* lvnwell; this can only be handled
+ # with mask-hints layers.
+
+ templayer drawn_hvi
+ mask-hints HVI
+
+ templayer allmvdiffnowell *mvndiff,*mvpsd
+ and-not drawn_hvi
+
+ templayer nwell_or_hvi nwell,drawn_hvi
+
+ templayer lvnwell nwell
+ and-not mvnwell
+
+ templayer nwell_with_tap
+ bloat-all nsc,mvnsc nwell,pnp
+
+ templayer nwell_missing_tap nwell,pnp
+ and-not nwell_with_tap
+
+ templayer tap_with_licon
+ bloat-all allpactivetap psd,mvpsd
+ bloat-all allnactivetap nsd,mvnsd
+
+ templayer tap_missing_licon allnactivetap,allpactivetap
+ and-not tap_with_licon
+
+ # Make sure varactor nwell contains no P diffusion
+ templayer pdiff_in_varactor_well
+ bloat-all varactor,mvvaractor nwell
+ and allpactive
+
+ # HVNTM spacing requires recreating HVNTM
+ templayer hvntm_block *mvpsd
+ grow 185
+
+ templayer hvntm_generate
+ bloat-all mvnfet,mvnfetesd,mvnnfet,nnfet,*mvndiode,mvrdn,*nndiode *mvndiff
+ bloat-all mvvaractor *mvnsd
+ and-not hvntm_block
+ grow 185
+ grow 345
+ shrink 345
+ and-not hvntm_block
+
+ # RPM spacing checks require recreating RPM
+ templayer rpm_generate
+ bloat-all xhrpoly,uhrpoly xpc
+ grow 200
+ grow-min 1270
+ grow 420
+ shrink 420
+
+ # Check distance RPM to NSDM
+ templayer rpm_nsd_check rpm_generate
+ grow 325
+ and allndifflv,allndiffmv
+
+ # Check distance RPM to (unrelated) POLY
+ templayer rpm_poly_check rpm_generate
+ grow 200
+ and-not xhrpoly,uhrpoly,xpc
+ and allpoly
+
+ # Check distance RPM to HVNTM
+ templayer rpm_hvntm_check rpm_generate
+ grow 385
+ and allndiffmvnontap
+
+ templayer m1_small_hole allm1,obsm1,obsmcon
+ close 140000
+
+ templayer m1_hole_empty m1_small_hole
+ and-not allm1,obsm1,obsmcon
+
+ templayer m2_small_hole allm2,obsm2
+ close 140000
+
+ templayer m2_hole_empty m2_small_hole
+ and-not allm2,obsm2
+
+ templayer m1_huge allm1
+ shrink 1500
+ grow 1500
+
+ templayer m1_large_halo m1_huge
+ grow 280
+ and-not m1_huge
+ and allm1
+
+ templayer m2_huge allm2
+ shrink 1500
+ grow 1500
+
+ templayer m2_large_halo m2_huge
+ grow 280
+ and-not m2_huge
+ and allm2
+
+ templayer m3_huge allm3
+ shrink 1500
+ grow 1500
+
+ templayer m3_large_halo m3_huge
+ grow 400
+ and-not m3_huge
+ and allm3
+
+ templayer m4_huge allm4
+ shrink 1500
+ grow 1500
+
+ templayer m4_large_halo m4_huge
+ grow 400
+ and-not m4_huge
+ and allm4
+
+
+#----------------------------------------------------------------
+style density
+#----------------------------------------------------------------
+# Style used by scripts to check for fill density
+#----------------------------------------------------------------
+ scalefactor 10 nanometers
+ options calma-permissive-labels
+ gridlimit 5
+
+ templayer fom_all alldiff,fomfill
+
+ templayer poly_all allpoly,polyfill
+
+ templayer li_all allli,lifill
+
+ templayer m1_all allm1,m1fill
+
+ templayer m2_all allm2,m2fill
+
+ templayer m3_all allm3,m3fill
+
+ templayer m4_all allm4,m4fill
+
+ templayer m5_all allm5,m5fill
+
+#----------------------------------------------------------------
+style wafflefill variants (),(tiled)
+#----------------------------------------------------------------
+# Style used by scripts for automatically generating fill layers
+# NOTE: Be sure to generate output on flattened layout.
+#----------------------------------------------------------------
+ scalefactor 10 nanometers
+ options calma-permissive-labels
+ gridlimit 5
+
+#----------------------------------------------------------------
+# Generate and retain a layer representing the bounding box.
+#
+# For variant ():
+# The bounding box is the full extent of geometry on the top level
+# cell.
+#
+# For variant (tiled):
+# Use with a script that breaks layout into flattened tiles and runs
+# fill individually on each. The tiles should be larger than the
+# step size, and each should draw a layer "comment" the size of the
+# step box.
+#----------------------------------------------------------------
+
+ variants ()
+ templayer topbox
+ bbox top
+
+ variants (tiled)
+ templayer topbox comment
+ # Each tile imposes the full keepout distance rule of
+ # 3um on all sides.
+ shrink 1500
+
+ variants *
+
+#----------------------------------------------------------------
+# Generate guard-band around nwells to keep FOM from crossing
+# Spacing from LV nwell = Diff/Tap 9 = 0.34um
+# Spacing from HV nwell = Diff/Tap 18 = 0.43um (= 0.18 + 0.25)
+# Enclosure by nwell = Diff/Tap 8 = 0.18um
+#----------------------------------------------------------------
+
+ templayer mvnwell
+ bloat-all alldiffmv nwell
+
+ templayer lvnwell allnwell
+ and-not mvnwell
+
+ templayer well_shrink mvnwell
+ shrink 250
+ or lvnwell
+ shrink 180
+ templayer well_guardband allnwell
+ grow 340
+ and-not well_shrink
+
+#---------------------------------------------------
+# Diffusion and poly keep-out areas
+#---------------------------------------------------
+ templayer obstruct_fom alldiff,allpoly,fomfill,polyfill,obsactive
+ or rpw,pnp,npn
+ grow 500
+ or well_guardband
+
+ templayer obstruct_poly alldiff,allpoly,fomfill,polyfill,obsactive
+ or rpw,pnp,npn
+ grow 1000
+
+#---------------------------------------------------
+# FOM and POLY fill
+#---------------------------------------------------
+ templayer fomfill_pass1 topbox
+ # slots 0 4080 1320 0 4080 1320 1360 0
+ slots 0 4080 1600 0 4080 1600 1360 0
+ and-not obstruct_fom
+ and topbox
+ shrink 2035
+ grow 2035
+
+#---------------------------------------------------
+
+ templayer obstruct_poly_pass1 fomfill_pass1
+ grow 300
+ or obstruct_poly
+ templayer polyfill_pass1 topbox
+ slots 0 720 360 0 720 360 240 0
+ and-not obstruct_poly_pass1
+ and topbox
+ shrink 355
+ grow 355
+
+#---------------------------------------------------
+
+ templayer obstruct_fom_pass2 fomfill_pass1
+ grow 1290
+ or polyfill_pass1
+ grow 300
+ or obstruct_fom
+ templayer fomfill_pass2 topbox
+ slots 0 2500 1320 0 2500 1320 1360 0
+ and-not obstruct_fom_pass2
+ and topbox
+ shrink 1245
+ grow 1245
+
+#---------------------------------------------------
+
+ templayer obstruct_poly_coarse polyfill_pass1
+ grow 60
+ or fomfill_pass1,fomfill_pass2
+ grow 300
+ or obstruct_poly
+ templayer polyfill_coarse topbox
+ slots 0 720 360 0 720 360 240 120
+ and-not obstruct_poly_coarse
+ and topbox
+ shrink 355
+ grow 355
+
+#---------------------------------------------------
+ templayer obstruct_poly_medium polyfill_pass1,polyfill_coarse
+ grow 60
+ or fomfill_pass1,fomfill_pass2
+ grow 300
+ or obstruct_poly
+ templayer polyfill_medium topbox
+ slots 0 540 360 0 540 360 240 100
+ and-not obstruct_poly_medium
+ and topbox
+ shrink 265
+ grow 265
+
+#---------------------------------------------------
+ templayer obstruct_poly_fine polyfill_pass1,polyfill_coarse,polyfill_medium
+ grow 60
+ or fomfill_pass1,fomfill_pass2
+ grow 300
+ or obstruct_poly
+ templayer polyfill_fine topbox
+ slots 0 480 360 0 480 360 240 200
+ and-not obstruct_poly_fine
+ and topbox
+ shrink 235
+ grow 235
+
+#---------------------------------------------------
+
+ templayer obstruct_fom_coarse fomfill_pass1,fomfill_pass2
+ grow 1290
+ or polyfill_pass1,polyfill_coarse,polyfill_medium,polyfill_fine
+ grow 300
+ or obstruct_fom
+ templayer fomfill_coarse topbox
+ slots 0 1500 1320 0 1500 1320 1360 0
+ and-not obstruct_fom_coarse
+ and topbox
+ shrink 745
+ grow 745
+
+#---------------------------------------------------
+
+ templayer obstruct_fom_fine fomfill_pass1,fomfill_pass2,fomfill_coarse
+ grow 1290
+ or polyfill_pass1,polyfill_coarse,polyfill_medium,polyfill_fine
+ grow 300
+ or obstruct_fom
+ templayer fomfill_fine topbox
+ slots 0 500 400 0 500 400 160 0
+ and-not obstruct_fom_fine
+ and topbox
+ shrink 245
+ grow 245
+
+#---------------------------------------------------
+ layer FOMFILL fomfill_pass1
+ or fomfill_pass2
+ or fomfill_coarse
+ or fomfill_fine
+ calma 23 28
+
+ layer POLYFILL polyfill_pass1
+ or polyfill_coarse
+ or polyfill_medium
+ or polyfill_fine
+ calma 28 28
+
+#---------------------------------------------------------
+# LI fill
+# Note requirement that LI fill may not overlap (non-fill)
+# diff or poly.
+#---------------------------------------------------------
+
+ templayer obstruct_li_coarse allli,allpad,obsli,lifill,fillblock,fillblock4
+ grow 2800
+ or alldiff,allpoly
+ grow 200
+ templayer lifill_coarse topbox
+ # slots 0 3000 650 0 3000 650 700 0
+ slots 0 3000 900 0 3000 900 700 0
+ and-not obstruct_li_coarse
+ and topbox
+ shrink 1495
+ grow 1495
+
+ templayer obstruct_li_medium allli,allpad,obsli,lifill,fillblock,fillblock4
+ grow 2500
+ or lifill_coarse
+ grow 300
+ or alldiff,allpoly
+ grow 200
+ templayer lifill_medium topbox
+ slots 0 1500 500 0 1500 500 700 0
+ and-not obstruct_li_medium
+ and topbox
+ shrink 745
+ grow 745
+
+ templayer obstruct_li_fine allli,allpad,obsli,lifill,fillblock,fillblock4
+ or lifill_coarse,lifill_medium
+ grow 300
+ or alldiff,allpoly
+ grow 200
+ templayer lifill_fine topbox
+ slots 0 580 500 0 580 500 700 0
+ and-not obstruct_li_fine
+ and topbox
+ shrink 285
+ grow 285
+
+ layer LIFILL lifill_coarse
+ or lifill_medium
+ or lifill_fine
+ calma 56 28
+
+#---------------------------------------------------
+# MET1 fill
+#---------------------------------------------------
+
+ templayer obstruct_m1_coarse allm1,allpad,obsm1,m1fill,fillblock,fillblock4
+ grow 3000
+ templayer met1fill_coarse topbox
+ # slots 0 2000 200 0 2000 200 700 0
+ slots 0 2000 800 0 2000 800 700 350
+ and-not obstruct_m1_coarse
+ and topbox
+ shrink 995
+ grow 995
+
+ templayer obstruct_m1_medium allm1,allpad,obsm1,m1fill,fillblock,fillblock4
+ grow 2800
+ or met1fill_coarse
+ grow 200
+ templayer met1fill_medium topbox
+ slots 0 1000 200 0 1000 200 700 0
+ and-not obstruct_m1_medium
+ and topbox
+ shrink 495
+ grow 495
+
+ templayer obstruct_m1_fine allm1,allpad,obsm1,m1fill,fillblock,fillblock4
+ grow 300
+ or met1fill_coarse,met1fill_medium
+ grow 200
+ templayer met1fill_fine topbox
+ slots 0 580 200 0 580 200 700 0
+ and-not obstruct_m1_fine
+ and topbox
+ shrink 285
+ grow 285
+
+ templayer obstruct_m1_veryfine allm1,allpad,obsm1,m1fill,fillblock,fillblock4
+ grow 100
+ or met1fill_coarse,met1fill_medium,met1fill_fine
+ grow 200
+ templayer met1fill_veryfine topbox
+ slots 0 300 200 0 300 200 100 50
+ and-not obstruct_m1_veryfine
+ and topbox
+ shrink 145
+ grow 145
+
+ layer MET1FILL met1fill_coarse
+ or met1fill_medium
+ or met1fill_fine
+ or met1fill_veryfine
+ calma 36 28
+
+#---------------------------------------------------
+# MET2 fill
+#---------------------------------------------------
+ templayer obstruct_m2 allm2,allpad,obsm2,m2fill,fillblock,fillblock4
+ grow 3000
+ templayer met2fill_coarse topbox
+ # slots 0 2000 200 0 2000 200 700 350
+ slots 0 2000 800 0 2000 800 700 350
+ and-not obstruct_m2
+ and topbox
+ shrink 995
+ grow 995
+
+ templayer obstruct_m2_medium allm2,allpad,obsm2,m2fill,fillblock,fillblock4
+ grow 2800
+ or met2fill_coarse
+ grow 200
+ templayer met2fill_medium topbox
+ slots 0 1000 200 0 1000 200 700 350
+ and-not obstruct_m2_medium
+ and topbox
+ shrink 495
+ grow 495
+
+ templayer obstruct_m2_fine allm2,allpad,obsm2,m2fill,fillblock,fillblock4
+ grow 300
+ or met2fill_coarse,met2fill_medium
+ grow 200
+ templayer met2fill_fine topbox
+ slots 0 580 200 0 580 200 700 350
+ and-not obstruct_m2_fine
+ and topbox
+ shrink 285
+ grow 285
+
+ templayer obstruct_m2_veryfine allm2,allpad,obsm2,m2fill,fillblock,fillblock4
+ grow 100
+ or met2fill_coarse,met2fill_medium,met2fill_fine
+ grow 200
+ templayer met2fill_veryfine topbox
+ slots 0 300 200 0 300 200 100 100
+ and-not obstruct_m2_veryfine
+ and topbox
+ shrink 145
+ grow 145
+
+ layer MET2FILL met2fill_coarse
+ or met2fill_medium
+ or met2fill_fine
+ or met2fill_veryfine
+ calma 41 28
+
+#---------------------------------------------------
+# MET3 fill
+#---------------------------------------------------
+ templayer obstruct_m3 allm3,allpad,obsm3,m3fill,fillblock,fillblock4
+ grow 3000
+ templayer met3fill_coarse topbox
+ # slots 0 2000 300 0 2000 300 700 700
+ slots 0 2000 800 0 2000 800 700 350
+ and-not obstruct_m3
+ and topbox
+ shrink 995
+ grow 995
+
+ templayer obstruct_m3_medium allm3,allpad,obsm3,m3fill,fillblock,fillblock4
+ grow 2700
+ or met3fill_coarse
+ grow 300
+ templayer met3fill_medium topbox
+ slots 0 1000 300 0 1000 300 700 700
+ and-not obstruct_m3_medium
+ and topbox
+ shrink 495
+ grow 495
+
+ templayer obstruct_m3_fine allm3,allpad,obsm3,m3fill,fillblock,fillblock4
+ grow 200
+ or met3fill_coarse,met3fill_medium
+ grow 300
+ templayer met3fill_fine topbox
+ slots 0 580 300 0 580 300 700 700
+ and-not obstruct_m3_fine
+ and topbox
+ shrink 285
+ grow 285
+
+ templayer obstruct_m3_veryfine allm3,allpad,obsm3,m3fill,fillblock,fillblock4
+ # Note: Adding 0.1 to waffle rule to clear wide spacing rule
+ grow 100
+ or met3fill_coarse,met3fill_medium,met3fill_fine
+ grow 300
+ templayer met3fill_veryfine topbox
+ slots 0 400 300 0 400 300 150 200
+ and-not obstruct_m3_veryfine
+ and topbox
+ shrink 195
+ grow 195
+
+ layer MET3FILL met3fill_coarse
+ or met3fill_medium
+ or met3fill_fine
+ or met3fill_veryfine
+ calma 34 28
+
+#---------------------------------------------------
+# MET4 fill
+#---------------------------------------------------
+ templayer obstruct_m4 allm4,allpad,obsm4,m4fill,fillblock,fillblock4
+ grow 3000
+ templayer met4fill_coarse topbox
+ # slots 0 2000 300 0 2000 300 700 1050
+ slots 0 2000 800 0 2000 800 700 350
+ and-not obstruct_m4
+ and topbox
+ shrink 995
+ grow 995
+
+ templayer obstruct_m4_medium allm4,allpad,obsm4,m4fill,fillblock,fillblock4
+ grow 2700
+ or met4fill_coarse
+ grow 300
+ templayer met4fill_medium topbox
+ slots 0 1000 300 0 1000 300 700 1050
+ and-not obstruct_m4_medium
+ and topbox
+ shrink 495
+ grow 495
+
+ templayer obstruct_m4_fine allm4,allpad,obsm4,m4fill,fillblock,fillblock4
+ grow 200
+ or met4fill_coarse,met4fill_medium
+ grow 300
+ templayer met4fill_fine topbox
+ slots 0 580 300 0 580 300 700 1050
+ and-not obstruct_m4_fine
+ and topbox
+ shrink 285
+ grow 285
+
+ templayer obstruct_m4_veryfine allm4,allpad,obsm4,m4fill,fillblock,fillblock4
+ # Note: Adding 0.1 to waffle rule to clear wide spacing rule
+ grow 100
+ or met4fill_coarse,met4fill_medium,met4fill_fine
+ grow 300
+ templayer met4fill_veryfine topbox
+ slots 0 400 300 0 400 300 150 300
+ and-not obstruct_m4_veryfine
+ and topbox
+ shrink 195
+ grow 195
+
+ layer MET4FILL met4fill_coarse
+ or met4fill_medium
+ or met4fill_fine
+ or met4fill_veryfine
+ calma 51 28
+
+#---------------------------------------------------
+# MET5 fill
+#---------------------------------------------------
+ templayer obstruct_m5 allm5,allpad,obsm5,m5fill,fillblock
+ grow 3000
+ templayer met5fill_coarse topbox
+ slots 0 5000 1600 0 5000 1600 1000 100
+ and-not obstruct_m5
+ and topbox
+ shrink 2495
+ grow 2495
+
+ templayer obstruct_m5_medium allm5,allpad,obsm5,m5fill,fillblock
+ grow 1400
+ or met5fill_coarse
+ grow 1600
+ templayer met5fill_medium topbox
+ slots 0 3000 1600 0 3000 1600 1000 100
+ and-not obstruct_m5_medium
+ and topbox
+ shrink 1495
+ grow 1495
+
+ layer MET5FILL met5fill_coarse
+ or met5fill_medium
+ calma 59 28
+
+end
+
+#-----------------------------------------------------------------------
+cifinput
+#-----------------------------------------------------------------------
+# NOTE: All values in this section MUST be multiples of 25
+# or else magic will scale below the allowed layout grid size
+#-----------------------------------------------------------------------
+
+style sky130 variants (vendor),()
+ scalefactor 10 nanometers
+ gridlimit 5
+
+ options ignore-unknown-layer-labels no-reconnect-labels
+
+ ignore NPC
+ ignore SEALID
+ ignore CAPID
+ ignore LDNTM
+ ignore HVNTM
+ ignore POLYMOD
+ ignore LOWTAPDENSITY
+ ignore FILLOBSPOLY
+ ignore OUTLINE
+
+ layer pnp NWELL,WELLTXT,WELLPIN
+ and PNPID
+ labels NWELL
+ variants (vendor)
+ labels WELLTXT port
+ variants ()
+ labels WELLTXT text
+ variants *
+ labels WELLPIN port
+
+ layer nwell NWELL,WELLTXT,WELLPIN
+ and-not PNPID
+ labels NWELL
+ variants (vendor)
+ labels WELLTXT port
+ variants ()
+ labels WELLTXT text
+ variants *
+ labels WELLPIN port
+
+ templayer nwellarea NWELL
+ copyup nwelcheck
+
+ # Copy nwell areas up for diffusion checks
+ templayer xnwelcheck nwelcheck
+ copyup nwelcheck
+
+ templayer hvarea HVI
+ copyup hvcheck
+
+ # Copy high-voltage (HVI) areas up for diffusion checks
+ templayer xhvcheck hvcheck
+ copyup hvcheck
+
+ # Always draw pwell under p-tap and n-diff. This is not always
+ # necessary but works better with deep nwell for correct extraction.
+ layer pwell TAP,DIFF
+ and-not NWELL,nwelcheck
+ grow 130
+ or SUBTXT,SUBPIN
+ grow 420
+ shrink 420
+ variants (vendor)
+ labels SUBTXT port
+ variants ()
+ labels SUBTXT text
+ variants *
+ labels SUBPIN port
+
+ layer dnwell DNWELL
+ labels DNWELL
+
+ layer isosub SUBCUT
+ labels SUBCUT
+
+ layer npn DNWELL
+ and-not NWELL,nwelcheck
+ and NPNID
+
+ layer rpw PWRES
+ and DNWELL
+ labels PWRES
+
+ templayer ndiffarea DIFF,DIFFTXT,DIFFPIN,barediff
+ and-not POLY
+ and-not NWELL,nwelcheck
+ and-not PSDM
+ and-not DIODE
+ and-not DIFFRES
+ and-not HVI,hvcheck
+ and NSDM
+ and-not CORELI
+ copyup ndifcheck
+ labels DIFF
+ variants (vendor)
+ labels DIFFTXT port
+ variants ()
+ labels DIFFTXT text
+ variants *
+ labels DIFFPIN port
+
+ layer ndiff ndiffarea
+
+ # Copy ndiff areas up for contact checks
+ templayer xndifcheck ndifcheck
+ copyup ndifcheck
+
+ templayer mvndiffarea DIFF,DIFFTXT,DIFFPIN,barediff
+ and-not POLY
+ and-not NWELL,nwelcheck
+ and-not PSDM
+ and-not DIODE
+ and-not DIFFRES
+ and HVI,hvcheck
+ and NSDM
+ copyup ndifcheck
+ labels DIFF
+ labels DIFFTXT text
+ variants (vendor)
+ labels DIFFTXT port
+ variants ()
+ labels DIFFTXT text
+ variants *
+ labels DIFFPIN port
+
+ layer mvndiff mvndiffarea
+
+ # Copy ndiff areas up for contact checks
+ templayer mvxndifcheck mvndifcheck
+ copyup mvndifcheck
+
+ layer ndiode DIFF,barediff
+ and NSDM
+ and DIODE
+ and-not NWELL,nwelcheck
+ and-not POLY
+ and-not PSDM
+ and-not HVI,hvcheck
+ and-not LVTN
+ labels DIFF
+
+ layer ndiodelvt DIFF,barediff
+ and NSDM
+ and DIODE
+ and-not NWELL,nwelcheck
+ and-not POLY
+ and-not PSDM
+ and-not HVI,hvcheck
+ and LVTN
+ labels DIFF
+
+ templayer ndiodearea DIODE
+ and NSDM
+ and-not HVI,hvcheck
+ and-not NWELL,nwelcheck
+ copyup DIODE,NSDM
+
+ layer ndiffres DIFFRES
+ and NSDM
+ and-not HVI,hvcheck
+ labels DIFF
+
+ templayer pdiffarea DIFF,DIFFTXT,DIFFPIN,barediff
+ and-not POLY
+ and NWELL,nwelcheck
+ and-not NSDM
+ and-not DIODE
+ and-not HVI,hvcheck
+ and PSDM
+ copyup pdifcheck
+ labels DIFF
+ variants (vendor)
+ labels DIFFTXT port
+ variants ()
+ labels DIFFTXT text
+ variants *
+ labels DIFFPIN port
+
+ layer pdiff pdiffarea
+
+ layer mvndiode DIFF,barediff
+ and NSDM
+ and DIODE
+ and HVI,hvcheck
+ and-not POLY
+ and-not PSDM
+ and-not LVTN
+ labels DIFF
+
+ layer nndiode DIFF,barediff
+ and NSDM
+ and DIODE
+ and HVI,hvcheck
+ and-not POLY
+ and-not PSDM
+ and LVTN
+ labels DIFF
+
+ templayer mvndiodearea DIODE
+ and NSDM
+ and HVI,hvcheck
+ and-not NWELL,nwelcheck
+ copyup DIODE,NSDM
+
+ layer mvndiffres DIFFRES
+ and NSDM
+ and HVI,hvcheck
+ labels DIFF
+
+ templayer mvpdiffarea DIFF,DIFFTXT,DIFFPIN,barediff
+ and-not POLY
+ and NWELL,nwelcheck
+ and-not NSDM
+ and HVI,hvcheck
+ and-not DIODE
+ and-not DIFFRES
+ and PSDM
+ copyup mvpdifcheck
+ labels DIFF
+ variants (vendor)
+ labels DIFFTXT port
+ variants ()
+ labels DIFFTXT text
+ variants *
+ labels DIFFPIN port
+
+ layer mvpdiff mvpdiffarea
+
+ # Copy pdiff areas up for contact checks
+ templayer xpdifcheck pdifcheck
+ copyup pdifcheck
+
+ layer pdiode DIFF,barediff
+ and PSDM
+ and-not POLY
+ and-not NSDM
+ and-not HVI,hvcheck
+ and-not LVTN
+ and-not HVTP
+ and DIODE
+ labels DIFF
+
+ layer pdiodelvt DIFF,barediff
+ and PSDM
+ and-not POLY
+ and-not NSDM
+ and-not HVI,hvcheck
+ and LVTN
+ and-not HVTP
+ and DIODE
+ labels DIFF
+
+ layer pdiodehvt DIFF,barediff
+ and PSDM
+ and-not POLY
+ and-not NSDM
+ and-not HVI,hvcheck
+ and-not LVTN
+ and HVTP
+ and DIODE
+ labels DIFF
+
+ templayer pdiodearea DIODE
+ and PSDM
+ and-not HVI,hvcheck
+ copyup DIODE,PSDM
+
+ # Define pfet areas as known pdiff, regardless of the presence of a well.
+
+ templayer pfetarea DIFF,barediff
+ and POLY
+ or baretrans
+ and-not NSDM
+ and-not HVI,hvcheck
+
+ layer pfet pfetarea
+ and-not LVTN
+ and-not HVTP
+ and-not STDCELL
+ and-not COREID
+ labels DIFF
+
+ layer scpfet pfetarea
+ and-not LVTN
+ and-not HVTP
+ and STDCELL
+ and-not COREID
+ labels DIFF
+
+ layer scpfethvt pfetarea
+ and-not LVTN
+ and HVTP
+ and STDCELL
+ labels DIFF
+
+ layer ppu pfetarea
+ and-not LVTN
+ and HVTP
+ and COREID
+ # Shrink-grow operation eliminates the smaller parasitie device
+ # shrink 70
+ # grow 70
+ labels DIFF
+
+ layer pfetlvt pfetarea
+ and LVTN
+ labels DIFF
+
+ layer pfetmvt pfetarea
+ and HVTR
+ labels DIFF
+
+ layer pfethvt pfetarea
+ and HVTP
+ and-not STDCELL
+ and-not COREID
+ labels DIFF
+
+ # Always force nwell under pfet (nwell encloses pdiff by 0.18)
+ layer nwell pfetarea
+ and-not COREID
+ grow 180
+
+ # Copy mvpdiff areas up for contact checks
+ templayer mvxpdifcheck mvpdifcheck
+ copyup mvpdifcheck
+
+ layer mvpdiode DIFF,barediff
+ and PSDM
+ and-not POLY
+ and-not NSDM
+ and HVI,hvcheck
+ and DIODE
+ labels DIFF
+
+ templayer mvpdiodearea DIODE
+ and PSDM
+ and HVI,hvcheck
+ copyup DIODE,PSDM
+
+ # Define pfet areas as known pdiff,
+ # regardless of the presence of a
+ # well.
+
+ templayer mvpfetarea DIFF,barediff
+ and POLY
+ or baretrans
+ and-not NSDM
+ and HVI,hvcheck
+
+ layer mvpfet mvpfetarea
+ and-not ESDID
+ labels DIFF
+
+ layer mvpfetesd mvpfetarea
+ and ESDID
+ labels DIFF
+
+ layer pdiff DIFF,DIFFTXT,DIFFPIN,barediff
+ and-not NSDM
+ and-not POLY
+ and-not HVI,hvcheck
+ and-not DIODE
+ and-not DIFFRES
+ labels DIFF
+ variants (vendor)
+ labels DIFFTXT port
+ variants ()
+ labels DIFFTXT text
+ variants *
+ labels DIFFPIN port
+
+ layer pdiffres DIFFRES
+ and PSDM
+ and NWELL,nwelcheck
+ and-not HVI,hvcheck
+ labels DIFF
+
+ layer nfet DIFF,barediff
+ and POLY
+ or baretrans
+ and-not PSDM
+ and NSDM
+ and-not HVI,hvcheck
+ and-not LVTN
+ and-not SONOS
+ and-not STDCELL
+ and-not COREID
+ labels DIFF
+
+ layer scnfet DIFF,barediff
+ and POLY
+ or baretrans
+ and-not PSDM
+ and NSDM
+ and-not NWELL,nwelcheck
+ and-not HVI,hvcheck
+ and-not LVTN
+ and-not SONOS
+ and STDCELL
+ labels DIFF
+
+ layer npass DIFF,barediff
+ and POLY
+ or baretrans
+ and-not PSDM
+ and NSDM
+ and-not NWELL,nwelcheck
+ and COREID
+ labels DIFF
+
+ layer npd DIFF,barediff
+ and POLY
+ or baretrans
+ and-not PSDM
+ and NSDM
+ and-not NWELL,nwelcheck
+ and COREID
+ # Shrink-grow operation eliminates the smaller npass device
+ shrink 70
+ grow 70
+ labels DIFF
+
+ # Devices abutting tap under gate are officially npd, not npass
+ layer npd TAP
+ grow 100
+ and DIFF
+ and POLY
+ and-not PSDM
+ and NSDM
+ and-not NWELL,nwelcheck
+ and COREID
+ labels DIFF
+
+ layer nfetlvt DIFF,barediff
+ and POLY
+ or baretrans
+ and-not PSDM
+ and NSDM
+ and-not HVI,hvcheck
+ and LVTN
+ and-not SONOS
+ labels DIFF
+
+ layer nsonos DIFF,barediff
+ and POLY
+ or baretrans
+ and-not PSDM
+ and NSDM
+ and-not HVI,hvcheck
+ and LVTN
+ and SONOS
+ labels DIFF
+
+ templayer nsdarea TAP
+ and NSDM
+ and NWELL,nwelcheck
+ and-not POLY
+ and-not PSDM
+ and-not HVI,hvcheck
+ and-not CORELI
+ copyup nsubcheck
+
+ layer nsd nsdarea
+ labels TAP
+
+ layer nsd TAP,TAPTXT
+ and NSDM
+ and-not POLY
+ and-not HVI,hvcheck
+ labels TAP
+ labels TAPTXT text
+
+ layer corenvar TAP
+ and NSDM
+ and POLY
+ and COREID
+ labels TAP
+
+ templayer nsdexpand nsdarea
+ grow 500
+
+ # Copy nsub areas up for contact checks
+ templayer xnsubcheck nsubcheck
+ copyup nsubcheck
+
+ templayer psdarea TAP
+ and PSDM
+ and-not NWELL,nwelcheck
+ and-not POLY
+ and-not NSDM
+ and-not HVI,hvcheck
+ and-not pfetexpand
+ copyup psubcheck
+
+ layer psd psdarea
+ labels TAP
+
+ layer psd TAP
+ and PSDM
+ and-not POLY
+ and-not HVI,hvcheck
+ labels TAP
+ labels TAPTXT text
+
+ layer corepvar TAP
+ and PSDM
+ and POLY
+ and COREID
+ labels TAP
+
+ templayer psdexpand psdarea
+ grow 500
+
+ layer mvpdiff DIFF,DIFFTXT,DIFFPIN,barediff
+ and-not NSDM
+ and-not POLY
+ and HVI,hvcheck
+ and mvpfetexpand
+ labels DIFF
+ variants (vendor)
+ labels DIFFTXT port
+ variants ()
+ labels DIFFTXT text
+ variants *
+ labels DIFFPIN port
+
+ layer mvpdiffres DIFFRES
+ and PSDM
+ and NWELL,nwelcheck
+ and HVI,hvcheck
+ and-not mvrdpioedge
+ labels DIFF
+
+ templayer mvnfetarea DIFF,barediff
+ and POLY
+ or baretrans
+ and-not PSDM
+ and NSDM
+ and-not LVTN
+ and HVI,hvcheck
+ grow 350
+
+ templayer mvnnfetarea DIFF,TAP,barediff
+ and POLY
+ or baretrans
+ and-not PSDM
+ and NSDM
+ and LVTN
+ and HVI,hvcheck
+ and-not mvnfetarea
+
+ layer mvnfetesd DIFF,barediff
+ and POLY
+ or baretrans
+ and-not PSDM
+ and NSDM
+ and HVI,hvcheck
+ and ESDID
+ and-not mvnnfetarea
+ labels DIFF
+
+ layer mvnfet DIFF,barediff
+ and POLY
+ or baretrans
+ and-not PSDM
+ and NSDM
+ and HVI,hvcheck
+ and-not ESDID
+ and-not mvnnfetarea
+ labels DIFF
+
+ layer nnfet mvnnfetarea
+ and LVID
+ labels DIFF
+
+ layer mvnnfet mvnnfetarea
+ and-not LVID
+ labels DIFF
+
+ templayer mvnsdarea TAP
+ and NSDM
+ and NWELL,nwelcheck
+ and-not POLY
+ and-not PSDM
+ and HVI,hvcheck
+ copyup mvnsubcheck
+
+ layer mvnsd mvnsdarea
+ labels TAP
+
+ layer mvnsd TAP,TAPTXT
+ and NSDM
+ and HVI,hvcheck
+ labels TAP
+ labels TAPTXT text
+
+ templayer mvnsdexpand mvnsdarea
+ grow 500
+
+ # Copy nsub areas up for contact checks
+ templayer mvxnsubcheck mvnsubcheck
+ copyup mvnsubcheck
+
+ templayer mvpsdarea DIFF,barediff
+ and PSDM
+ and-not NWELL,nwelcheck
+ and-not POLY
+ and-not NSDM
+ and HVI,hvcheck
+ and-not mvpfetexpand
+ copyup mvpsubcheck
+
+ layer mvpsd mvpsdarea
+ labels DIFF
+
+ layer mvpsd TAP,TAPTXT
+ and PSDM
+ and HVI,hvcheck
+ labels TAP
+ labels TAPTXT text
+
+ templayer mvpsdexpand mvpsdarea
+ grow 500
+
+ # Copy psub areas up for contact checks
+ templayer xpsubcheck psubcheck
+ copyup psubcheck
+
+ templayer mvxpsubcheck mvpsubcheck
+ copyup mvpsubcheck
+
+ layer psd TAP
+ and-not PSDM
+ and-not NSDM
+ and-not POLY
+ and-not HVI,hvcheck
+ and-not pfetexpand
+ and psdexpand
+
+ layer nsd TAP
+ and-not PSDM
+ and-not NSDM
+ and-not POLY
+ and-not HVI,hvcheck
+ and nsdexpand
+
+ layer mvpsd TAP
+ and-not PSDM
+ and-not NSDM
+ and-not POLY
+ and HVI,hvcheck
+ and-not mvpfetexpand
+ and mvpsdexpand
+
+ layer mvnsd TAP
+ and-not PSDM
+ and-not NSDM
+ and-not POLY
+ and HVI,hvcheck
+ and mvnsdexpand
+
+ templayer hresarea POLY
+ and RPM
+ grow 3000
+
+ templayer uresarea POLY
+ and URPM
+ grow 3000
+
+ templayer diffresarea DIFFRES
+ and-not HVI,hvcheck
+ grow 3000
+
+ templayer mvdiffresarea DIFFRES
+ and HVI,hvcheck
+ grow 3000
+
+ templayer resarea diffresarea,mvdiffresarea,hresarea,uresarea
+
+ layer pfet POLY
+ and DIFF
+ and diffresarea
+ and-not NSDM
+ and-not STDCELL
+
+ layer scpfet POLY
+ and DIFF
+ and diffresarea
+ and-not HVTP
+ and-not NSDM
+ and STDCELL
+
+ layer scpfethvt POLY
+ and DIFF
+ and diffresarea
+ and HVTP
+ and-not NSDM
+ and STDCELL
+
+ templayer xpolyterm RPM,URPM
+ and POLY
+ and-not POLYRES
+ # add back the 0.06um contact surround in the direction of the resistor
+ grow 60
+ and POLY
+
+ layer xpc xpolyterm
+
+ templayer polyarea POLY,POLYTXT,POLYPIN
+ and-not POLYRES
+ and-not POLYSHORT
+ and-not DIFF
+ and-not TAP
+ and-not RPM
+ and-not URPM
+ copyup polycheck
+
+ layer poly polyarea
+ labels POLY
+ variants (vendor)
+ labels POLYTXT port
+ variants ()
+ labels POLYTXT text
+ variants *
+ labels POLYPIN port
+
+ # Copy (non-resistor) poly areas up for contact checks
+ templayer xpolycheck polycheck
+ copyup polycheck
+
+ layer mrp1 POLY
+ and POLYRES
+ and-not RPM
+ and-not URPM
+ labels POLY
+
+ layer rmp POLY
+ and POLYSHORT
+ labels POLY
+
+ layer xhrpoly POLY
+ and POLYRES
+ and RPM
+ and-not URPM
+ and PSDM
+ and NPC
+ and-not xpolyterm
+ labels POLY
+
+ layer uhrpoly POLY
+ and POLYRES
+ and URPM
+ and-not RPM
+ and NPC
+ and-not xpolyterm
+ labels POLY
+
+ templayer ndcbase CONT
+ or barecont
+ and LI
+ or licont
+ and DIFF
+ and NSDM
+ and-not NWELL,nwelcheck
+ and-not HVI,hvcheck
+
+ layer ndc ndcbase
+ grow 85
+ shrink 85
+ shrink 85
+ grow 85
+ or ndcbase
+ labels CONT
+
+ templayer nscbase CONT
+ or barecont
+ and LI
+ or licont
+ and DIFF,TAP
+ and NSDM
+ and NWELL,nwelcheck
+ and-not HVI,hvcheck
+
+ layer nsc nscbase
+ grow 85
+ shrink 85
+ shrink 85
+ grow 85
+ or nscbase
+ labels CONT
+
+ templayer pdcbase CONT
+ or barecont
+ and LI
+ or licont
+ and DIFF
+ and PSDM
+ and NWELL,nwelcheck
+ and-not HVI,hvcheck
+
+ layer pdc pdcbase
+ grow 85
+ shrink 85
+ shrink 85
+ grow 85
+ or pdcbase
+ labels CONT
+
+ templayer pdcnowell CONT
+ or barecont
+ and LI
+ or licont
+ and DIFF
+ and PSDM
+ and pfetexpand
+ and-not HVI,hvcheck
+
+ layer pdc pdcnowell
+ grow 85
+ shrink 85
+ shrink 85
+ grow 85
+ or pdcnowell
+ labels CONT
+
+ templayer pscbase CONT
+ or barecont
+ and LI
+ or licont
+ and DIFF,TAP
+ and PSDM
+ and-not NWELL,nwelcheck
+ and-not pfetexpand
+ and-not HVI,hvcheck
+
+ layer psc pscbase
+ grow 85
+ shrink 85
+ shrink 85
+ grow 85
+ or pscbase
+ labels CONT
+
+ templayer pcbase CONT
+ or barecont
+ and LI
+ or licont
+ and POLY
+ and-not DIFF
+ and-not RPM,URPM
+
+ layer pc pcbase
+ grow 85
+ shrink 85
+ shrink 85
+ grow 85
+ or pcbase
+ labels CONT
+
+ templayer ndicbase CONT
+ or barecont
+ and LI
+ or licont
+ and DIFF
+ and NSDM
+ and DIODE
+ and-not POLY
+ and-not PSDM
+ and-not HVI,hvcheck
+ and-not LVTN
+
+ layer ndic ndicbase
+ grow 85
+ shrink 85
+ shrink 85
+ grow 85
+ or ndicbase
+ labels CONT
+
+ templayer ndilvtcbase CONT
+ or barecont
+ and LI
+ or licont
+ and DIFF
+ and NSDM
+ and DIODE
+ and-not POLY
+ and-not PSDM
+ and-not HVI,hvcheck
+ and LVTN
+
+ layer ndilvtc ndilvtcbase
+ grow 85
+ shrink 85
+ shrink 85
+ grow 85
+ or ndilvtcbase
+ labels CONT
+
+ templayer pdicbase CONT
+ or barecont
+ and LI
+ or licont
+ and DIFF
+ and PSDM
+ and DIODE
+ and-not POLY
+ and-not NSDM
+ and-not HVI,hvcheck
+ and-not LVTN
+ and-not HVTP
+
+ layer pdic pdicbase
+ grow 85
+ shrink 85
+ shrink 85
+ grow 85
+ or pdicbase
+ labels CONT
+
+ templayer pdilvtcbase CONT
+ or barecont
+ and LI
+ or licont
+ and DIFF
+ and PSDM
+ and DIODE
+ and-not POLY
+ and-not NSDM
+ and-not HVI,hvcheck
+ and LVTN
+ and-not HVTP
+
+ layer pdilvtc pdilvtcbase
+ grow 85
+ shrink 85
+ shrink 85
+ grow 85
+ or pdilvtcbase
+ labels CONT
+
+ templayer pdihvtcbase CONT
+ or barecont
+ and LI
+ or licont
+ and DIFF
+ and PSDM
+ and DIODE
+ and-not POLY
+ and-not NSDM
+ and-not HVI,hvcheck
+ and-not LVTN
+ and HVTP
+
+ layer pdihvtc pdihvtcbase
+ grow 85
+ shrink 85
+ shrink 85
+ grow 85
+ or pdihvtcbase
+ labels CONT
+
+ templayer mvndcbase CONT
+ or barecont
+ and LI
+ or licont
+ and DIFF
+ and NSDM
+ and-not NWELL,nwelcheck
+ and HVI,hvcheck
+
+ layer mvndc mvndcbase
+ grow 85
+ shrink 85
+ shrink 85
+ grow 85
+ or mvndcbase
+ labels CONT
+
+ templayer mvnscbase CONT
+ or barecont
+ and LI
+ or licont
+ and DIFF,TAP
+ and NSDM
+ and NWELL,nwelcheck
+ and HVI,hvcheck
+
+ layer mvnsc mvnscbase
+ grow 85
+ shrink 85
+ shrink 85
+ grow 85
+ or mvnscbase
+ labels CONT
+
+ templayer mvpdcbase CONT
+ or barecont
+ and LI
+ or licont
+ and DIFF
+ and PSDM
+ and NWELL,nwelcheck
+ and HVI,hvcheck
+
+ layer mvpdc mvpdcbase
+ grow 85
+ shrink 85
+ shrink 85
+ grow 85
+ or mvpdcbase
+ labels CONT
+
+ templayer mvpdcnowell CONT
+ or barecont
+ and LI
+ or licont
+ and DIFF
+ and PSDM
+ and mvpfetexpand
+ and MET1
+ and HVI,hvcheck
+
+ layer mvpdc mvpdcnowell
+ grow 85
+ shrink 85
+ shrink 85
+ grow 85
+ or mvpdcnowell
+ labels CONT
+
+ templayer mvpscbase CONT
+ or barecont
+ and LI
+ or licont
+ and DIFF,TAP
+ and PSDM
+ and-not NWELL,nwelcheck
+ and-not mvpfetexpand
+ and HVI,hvcheck
+
+ layer mvpsc mvpscbase
+ grow 85
+ shrink 85
+ shrink 85
+ grow 85
+ or mvpscbase
+ labels CONT
+
+ templayer mvndicbase CONT
+ or barecont
+ and LI
+ or licont
+ and DIFF
+ and NSDM
+ and DIODE
+ and-not POLY
+ and-not PSDM
+ and-not LVTN
+ and HVI,hvcheck
+
+ layer mvndic mvndicbase
+ grow 85
+ shrink 85
+ shrink 85
+ grow 85
+ or mvndicbase
+ labels CONT
+
+ templayer nndicbase CONT
+ or barecont
+ and LI
+ or licont
+ and DIFF
+ and NSDM
+ and DIODE
+ and-not POLY
+ and-not PSDM
+ and LVTN
+ and HVI,hvcheck
+
+ layer nndic nndicbase
+ grow 85
+ shrink 85
+ shrink 85
+ grow 85
+ or nndicbase
+ labels CONT
+
+ templayer mvpdicbase CONT
+ or barecont
+ and LI
+ or licont
+ and DIFF
+ and PSDM
+ and DIODE
+ and-not POLY
+ and-not NSDM
+ and HVI,hvcheck
+
+ layer mvpdic mvpdicbase
+ grow 85
+ shrink 85
+ shrink 85
+ grow 85
+ or mvpdicbase
+ labels CONT
+
+ layer fomfill FOMFILL
+ labels FOMFILL
+
+ layer polyfill POLYFILL
+ labels POLYFILL
+
+ layer coreli LI,LITXT,LIPIN
+ and-not LIRES,LISHORT
+ and COREID
+ labels LI
+ variants (vendor)
+ labels LITXT port
+ variants ()
+ labels LITXT text
+ variants *
+ labels LIPIN port
+
+ layer locali LI,LITXT,LIPIN
+ and-not LIRES,LISHORT
+ and-not COREID
+ labels LI
+ variants (vendor)
+ labels LITXT port
+ variants ()
+ labels LITXT text
+ variants *
+ labels LIPIN port
+
+ layer rli LI
+ and LIRES,LISHORT
+ labels LIRES,LISHORT
+
+ layer lifill LIFILL
+ labels LIFILL
+
+ layer mcon MCON
+ grow 95
+ shrink 95
+ shrink 85
+ grow 85
+ or MCON
+ labels MCON
+
+ layer m1 MET1,MET1TXT,MET1PIN
+ and-not MET1RES,MET1SHORT
+ labels MET1
+ variants (vendor)
+ labels MET1TXT port
+ variants ()
+ labels MET1TXT text
+ variants *
+ labels MET1PIN port
+
+ layer rm1 MET1
+ and MET1RES,MET1SHORT
+ labels MET1RES,MET1SHORT
+
+ layer m1fill MET1FILL
+ labels MET1FILL
+
+ layer mimcap MET3
+ and CAPM
+ labels CAPM
+
+ layer mimcc VIA3
+ and CAPM
+ grow 60
+ grow 40
+ shrink 40
+ labels CAPM
+
+ layer mimcap2 MET4
+ and CAPM2
+ labels CAPM2
+
+ layer mim2cc VIA4
+ and CAPM2
+ grow 190
+ grow 210
+ shrink 210
+ labels CAPM2
+
+
+ templayer m2cbase VIA1
+ and-not COREID
+ grow 5
+ or VIA1
+ grow 50
+
+ layer m2c m2cbase
+ grow 30
+ shrink 30
+ shrink 130
+ grow 130
+ or m2cbase
+
+ layer m2 MET2,MET2TXT,MET2PIN
+ and-not MET2RES,MET2SHORT
+ labels MET2
+ variants (vendor)
+ labels MET2TXT port
+ variants ()
+ labels MET2TXT text
+ variants *
+ labels MET2PIN port
+
+ layer rm2 MET2
+ and MET2RES,MET2SHORT
+ labels MET2RES,MET2SHORT
+
+ layer m2fill MET2FILL
+ labels MET2FILL
+
+ templayer m3cbase VIA2
+ grow 40
+
+ layer m3c m3cbase
+ grow 60
+ shrink 60
+ shrink 140
+ grow 140
+ or m3cbase
+
+ layer m3 MET3,MET3TXT,MET3PIN
+ and-not MET3RES,MET3SHORT
+ labels MET3
+ variants (vendor)
+ labels MET3TXT port
+ variants ()
+ labels MET3TXT text
+ variants *
+ labels MET3PIN port
+
+ layer rm3 MET3
+ and MET3RES,MET3SHORT
+ labels MET3RES,MET3SHORT
+
+ layer m3fill MET3FILL
+ labels MET3FILL
+
+
+ templayer via3base VIA3
+ and-not CAPM
+ grow 60
+
+ layer via3 via3base
+ grow 40
+ shrink 40
+ shrink 160
+ grow 160
+ or via3base
+
+ layer m4 MET4,MET4TXT,MET4PIN
+ and-not MET4RES,MET4SHORT
+ labels MET4
+ variants (vendor)
+ labels MET4TXT port
+ variants ()
+ labels MET4TXT text
+ variants *
+ labels MET4PIN port
+
+ layer rm4 MET4
+ and MET4RES,MET4SHORT
+ labels MET4RES,MET4SHORT
+
+ layer m4fill MET4FILL
+ labels MET4FILL
+
+ layer m5 MET5,MET5TXT,MET5PIN
+ and-not MET5RES,MET5SHORT
+ labels MET5
+ variants (vendor)
+ labels MET5TXT port
+ variants ()
+ labels MET5TXT text
+ variants *
+ labels MET5PIN port
+
+ layer rm5 MET5
+ and MET5RES,MET5SHORT
+ labels MET5RES,MET5SHORT
+
+ layer m5fill MET5FILL
+ labels MET5FILL
+
+ templayer via4base VIA4
+ and-not CAPM2
+ grow 190
+
+ layer via4 via4base
+ grow 210
+ shrink 210
+ shrink 590
+ grow 590
+ or via4base
+
+ layer metrdl RDL,RDLTXT,RDLPIN
+ labels RDL
+ variants (vendor)
+ labels RDLTXT port
+ variants ()
+ labels RDLTXT text
+ variants *
+ labels RDLPIN port
+
+ # Find diffusion not covered in
+ # NSDM or PSDM and pull it into
+ # the next layer up
+
+ templayer gentrans DIFF
+ and-not PSDM
+ and-not NSDM
+ and POLY
+ copyup baretrans
+
+ templayer gendiff DIFF,TAP
+ and-not PSDM
+ and-not NSDM
+ and-not POLY
+ and-not COREID
+ copyup barediff
+
+ # Handle contacts found by copyup
+
+ templayer ndiccopy CONT
+ and LI
+ and DIODE
+ and NSDM
+ and-not HVI,hvcheck
+
+ layer ndic ndiccopy
+ grow 85
+ shrink 85
+ shrink 85
+ grow 85
+ or ndiccopy
+ labels CONT
+
+ templayer mvndiccopy CONT
+ and LI
+ and DIODE
+ and NSDM
+ and HVI,hvcheck
+
+ layer mvndic mvndiccopy
+ grow 85
+ shrink 85
+ shrink 85
+ grow 85
+ or mvndiccopy
+ labels CONT
+
+ templayer pdiccopy CONT
+ and LI
+ and DIODE
+ and PSDM
+ and-not HVI,hvcheck
+
+ layer pdic pdiccopy
+ grow 85
+ shrink 85
+ shrink 85
+ grow 85
+ or pdiccopy
+ labels CONT
+
+ templayer mvpdiccopy CONT
+ and LI
+ and DIODE
+ and PSDM
+ and HVI,hvcheck
+
+ layer mvpdic mvpdiccopy
+ grow 85
+ shrink 85
+ shrink 85
+ grow 85
+ or mvpdiccopy
+ labels CONT
+
+ templayer ndccopy CONT
+ and ndifcheck
+
+ layer ndc ndccopy
+ grow 85
+ shrink 85
+ shrink 85
+ grow 85
+ or ndccopy
+ labels CONT
+
+ templayer mvndccopy CONT
+ and mvndifcheck
+
+ layer mvndc mvndccopy
+ grow 85
+ shrink 85
+ shrink 85
+ grow 85
+ or mvndccopy
+ labels CONT
+
+ templayer pdccopy CONT
+ and pdifcheck
+
+ layer pdc pdccopy
+ grow 85
+ shrink 85
+ shrink 85
+ grow 85
+ or pdccopy
+ labels CONT
+
+ templayer mvpdccopy CONT
+ and mvpdifcheck
+
+ layer mvpdc mvpdccopy
+ grow 85
+ shrink 85
+ shrink 85
+ grow 85
+ or mvpdccopy
+ labels CONT
+
+ templayer pccopy CONT
+ and polycheck
+
+ layer pc pccopy
+ grow 85
+ shrink 85
+ shrink 85
+ grow 85
+ or pccopy
+ labels CONT
+
+ templayer nsccopy CONT
+ and nsubcheck
+
+ layer nsc nsccopy
+ grow 85
+ shrink 85
+ shrink 85
+ grow 85
+ or nsccopy
+ labels CONT
+
+ templayer mvnsccopy CONT
+ and mvnsubcheck
+
+ layer mvnsc mvnsccopy
+ grow 85
+ shrink 85
+ shrink 85
+ grow 85
+ or mvnsccopy
+ labels CONT
+
+ templayer psccopy CONT
+ and psubcheck
+
+ layer psc psccopy
+ grow 85
+ shrink 85
+ shrink 85
+ grow 85
+ or psccopy
+ labels CONT
+
+ templayer mvpsccopy CONT
+ and mvpsubcheck
+
+ layer mvpsc mvpsccopy
+ grow 85
+ shrink 85
+ shrink 85
+ grow 85
+ or mvpsccopy
+ labels CONT
+
+ # Find contacts not covered in
+ # metal and pull them into the
+ # next layer up
+
+ templayer gencont CONT
+ and LI
+ and-not DIFF,TAP
+ and-not POLY
+ and-not DIODE
+ and-not nsubcheck
+ and-not psubcheck
+ and-not mvnsubcheck
+ and-not mvpsubcheck
+ and-not CORELI
+ copyup barelicont
+
+ templayer barecont CONT
+ and-not LI
+ and-not nsubcheck
+ and-not psubcheck
+ and-not mvnsubcheck
+ and-not mvpsubcheck
+ and-not CORELI
+ copyup barecont
+
+ layer glass GLASS,PADTXT,PADPIN
+ labels GLASS
+ variants (vendor)
+ labels PADTXT port
+ variants ()
+ labels PADTXT text
+ variants *
+ labels PADPIN port
+
+ templayer boundary BOUND,STDCELL,PADCELL
+ boundary
+
+ layer comment LVSTEXT
+ labels LVSTEXT text
+
+ layer comment TTEXT
+ labels TTEXT text
+
+ layer fillblock FILLOBSM1,FILLOBSM2,FILLOBSM3,FILLOBSM4
+ labels FILLOBSM1,FILLOBSM2,FILLOBSM3,FILLOBSM4
+
+ layer obsactive FILLOBSFOM
+
+# MOS Varactor
+
+ layer var POLY
+ and TAP
+ and NSDM
+ and NWELL,nwelcheck
+ and-not HVI,hvcheck
+ and-not HVTP
+ # NOTE: Else forms a varactor that is not in the vendor netlist.
+ and-not COREID
+ labels POLY
+
+ layer varhvt POLY
+ and TAP
+ and NSDM
+ and NWELL,nwelcheck
+ and-not HVI,hvcheck
+ and HVTP
+ labels POLY
+
+ layer mvvar POLY
+ and TAP
+ and NSDM
+ and NWELL,nwelcheck
+ and HVI,hvcheck
+ labels POLY
+
+ calma NWELL 64 20
+ calma DIFF 65 20
+ calma DNWELL 64 18
+ calma SUBCUT 81 53
+ calma PWRES 64 13
+ calma TAP 65 44
+ # LVTN
+ calma LVTN 125 44
+ # HVTR
+ calma HVTR 18 20
+ # HVTP
+ calma HVTP 78 44
+ # SONOS (TUNM)
+ calma SONOS 80 20
+ # NSDM (NPLUS)
+ calma NSDM 93 44
+ # PSDM (PPLUS)
+ calma PSDM 94 20
+ # HVI (THKOX)
+ calma HVI 75 20
+ # NPC
+ calma NPC 95 20
+ # P+ POLY MASK
+ calma RPM 86 20
+ calma URPM 79 20
+ calma LDNTM 11 44
+ calma HVNTM 125 20
+ # Poly resistor ID mark
+ calma POLYRES 66 13
+ # Diffusion resistor ID mark
+ calma DIFFRES 65 13
+ calma POLY 66 20
+ calma POLYMOD 66 83
+ # 3.3V native FET ID mark
+ calma LVID 81 60
+ # Diode ID mark
+ calma DIODE 81 23
+ # Bipolar NPN mark
+ calma NPNID 82 20
+ # Bipolar PNP mark
+ calma PNPID 82 44
+ # Capacitor ID
+ calma CAPID 82 64
+ # Core area ID mark
+ calma COREID 81 2
+ # Standard cell ID mark
+ calma STDCELL 81 4
+ # Padframe cell ID mark
+ calma PADCELL 81 3
+ # Seal ring ID mark
+ calma SEALID 81 1
+ # Low tap density ID mark
+ calma LOWTAPDENSITY 81 14
+ # ESD area ID
+ calma ESDID 81 19
+ calma OUTLINE 236 0
+
+ # LICON
+ calma CONT 66 44
+ calma LI 67 20
+ calma MCON 67 44
+
+ calma MET1 68 20
+ calma VIA1 68 44
+ calma MET2 69 20
+ calma VIA2 69 44
+ calma MET3 70 20
+ calma VIA3 70 44
+ calma MET4 71 20
+ calma VIA4 71 44
+ calma MET5 72 20
+ calma RDL 74 20
+ calma GLASS 76 20
+
+ calma SUBTXT 64 59
+ calma PADTXT 76 5
+ calma DIFFTXT 65 6
+ calma TAPTXT 65 5
+ calma WELLTXT 64 5
+ calma LITXT 67 5
+ calma POLYTXT 66 5
+ calma MET1TXT 68 5
+ calma MET2TXT 69 5
+ calma MET3TXT 70 5
+ calma MET4TXT 71 5
+ calma MET5TXT 72 5
+ calma RDLTXT 74 5
+
+ calma LIRES 67 13
+ calma MET1RES 68 13
+ calma MET2RES 69 13
+ calma MET3RES 70 13
+ calma MET4RES 71 13
+ calma MET5RES 72 13
+
+ calma LIFILL 56 28
+ calma MET1FILL 36 28
+ calma MET2FILL 41 28
+ calma MET3FILL 34 28
+ calma MET4FILL 51 28
+ calma MET5FILL 59 28
+
+ calma POLYSHORT 66 15
+ calma LISHORT 67 15
+ calma MET1SHORT 68 15
+ calma MET2SHORT 69 15
+ calma MET3SHORT 70 15
+ calma MET4SHORT 71 15
+ calma MET5SHORT 72 15
+
+ calma SUBPIN 122 16
+ calma PADPIN 76 16
+ calma DIFFPIN 65 16
+ calma POLYPIN 66 16
+ calma WELLPIN 64 16
+ calma LIPIN 67 16
+ calma MET1PIN 68 16
+ calma MET2PIN 69 16
+ calma MET3PIN 70 16
+ calma MET4PIN 71 16
+ calma MET5PIN 72 16
+ calma RDLPIN 74 16
+
+ calma BOUND 235 4
+
+ calma LVSTEXT 83 44
+
+ calma CAPM 89 44
+ calma CAPM2 97 44
+
+ calma FILLOBSM1 62 24
+ calma FILLOBSM2 105 52
+ calma FILLOBSM3 107 24
+ calma FILLOBSM4 112 4
+ calma FILLOBSFOM 22 24
+ calma FILLOBSPOLY 33 24
+
+ calma FOMFILL 23 28
+ calma POLYFILL 28 28
+ calma LIFILL 56 28
+ calma MET1FILL 36 28
+ calma MET2FILL 41 28
+ calma MET3FILL 34 28
+ calma MET4FILL 51 28
+ calma MET5FILL 59 28
+
+#-----------------------------------------------------------------------
+
+style rdlimport
+ # This style is for reading shapes generated with the RDL layers
+
+ scalefactor 10 nanometers
+ gridlimit 5
+
+ options ignore-unknown-layer-labels no-reconnect-labels
+
+ layer mrdl RDL
+ layer mrdlc RDLC
+
+ calma RDL 10 0
+ calma RDLC 20 0
+
+end
+
+#-----------------------------------------------------
+# Digital flow maze router cost parameters
+#-----------------------------------------------------
+
+mzrouter
+end
+
+#-----------------------------------------------------
+# Vendor DRC rules
+#-----------------------------------------------------
+
+drc
+
+ style drc variants (fast),(full),(routing)
+ scalefactor 10
+ cifstyle drc
+
+ variants (fast),(full)
+
+#-----------------------------
+# DNWELL
+#-----------------------------
+
+ width dnwell 3000 "Deep N-well width < %d (dnwell.2)"
+ spacing dnwell dnwell 6300 touching_ok "Deep N-well spacing < %d (dnwell.3)"
+ spacing allnwell dnwell 4500 surround_ok \
+ "Deep N-well spacing to N-well < %d (nwell.7)"
+
+ variants (full)
+ cifmaxwidth nwell_missing 0 bend_illegal \
+ "N-well overlap of Deep N-well < 0.4um outside, 1.03um inside (nwell.5a, 7)"
+ cifmaxwidth dnwell_missing 0 bend_illegal \
+ "SONOS nFET must be in Deep N-well (tunm.6a)"
+
+ cifmaxwidth pdiff_crosses_dnwell 0 bend_illegal \
+ "P+ diff cannot straddle Deep N-well (dnwell.5)"
+ variants (fast),(full)
+
+#-----------------------------
+# NWELL
+#-----------------------------
+
+ width allnwell 840 "N-well width < %d (nwell.1)"
+ spacing allnwell allnwell 1270 touching_ok "N-well spacing < %d (nwell.2a)"
+
+ variants (full)
+ cifmaxwidth nwell_missing_tap 0 bend_illegal \
+ "All nwells must contain metal-connected N+ taps (nwell.4)"
+
+ cifspacing mvnwell lvnwell 2000 touching_illegal \
+ "Spacing of HV nwell to LV nwell < 2.0um (nwell.8)"
+ cifspacing mvnwell mvnwell 2000 touching_ok \
+ "Spacing of HV nwell to HV nwell < 2.0um (nwell.8)"
+ variants (fast),(full)
+
+#-----------------------------
+# DIFF
+#-----------------------------
+
+ width *ndiff,nfet,scnfet,npd,npass,*nsd,*ndiode,ndiffres,*pdiff,pfet,scpfet,scpfethvt,ppu,*psd,*pdiode,pdiffres,fomfill \
+ 150 "Diffusion width < %d (diff/tap.1)"
+ width *mvndiff,mvnfet,mvnfetesd,mvnnfet,nnfet,*mvndiode,*nndiode,mvndiffres,*mvpdiff,mvpfet,mvpfetesd,*mvpdiode,mvpdiffres 290 \
+ "MV Diffusion width < %d (diff/tap.14)"
+
+ width *mvnsd,*mvpsd 150 "MV Tap width < %d (diff/tap.1)"
+ extend *mvpsd *mvndiff 700 "MV Butting tap length < %d (diff/tap.16)"
+ extend *mvnsd *mvpdiff 700 "MV Butting tap length < %d (diff/tap.16)"
+ extend *psd *ndiff 290 "Butting tap length < %d (diff/tap.4)"
+ extend *nsd *pdiff 290 "Butting tap length < %d (diff/tap.4)"
+ width mvpdiffres 150 "MV P-Diffusion resistor width < %d (diff/tap.14a)"
+ spacing alldifflv,var,varhvt,fomfill alldifflv,var,varhvt,fomfill 270 touching_ok \
+ "Diffusion spacing < %d (diff/tap.3)"
+ spacing alldiffmvnontap,mvvar alldiffmvnontap,mvvar 300 touching_ok \
+ "MV Diffusion spacing < %d (diff/tap.15a)"
+ spacing alldiffmv *mvnsd,*mvpsd 270 touching_ok \
+ "MV Diffusion to MV tap spacing < %d (diff/tap.3)"
+ spacing *mvndiff,mvnfet,mvnfetesd,mvnnfet,nnfet,*mvndiode,*nndiode,mvndiffres,mvvar *mvpsd 370 \
+ touching_ok "MV P-Diffusion to MV N-tap spacing < %d (diff/tap.15b)"
+ spacing *mvnsd,*mvpdiff,mvpfet,mvpfetesd,mvvar,*mvpdiode *mvpsd,*psd 760 touching_illegal \
+ "MV Diffusion in N-well to P-tap spacing < %d (diff/tap.20 + diff/tap.17,19)"
+ spacing *ndiff,*ndiode,nfet allnwell 340 touching_illegal \
+ "N-Diffusion spacing to N-well < %d (diff/tap.9)"
+ spacing *mvndiff,*mvndiode,mvnfet,mvnnfet,nnfet allnwell 340 touching_illegal \
+ "N-Diffusion spacing to N-well < %d (diff/tap.9)"
+ spacing *psd allnwell 130 touching_illegal \
+ "P-tap spacing to N-well < %d (diff/tap.11)"
+ spacing *mvpsd allnwell 130 touching_illegal \
+ "P-tap spacing to N-well < %d (diff/tap.11)"
+ surround *nsd allnwell 180 absence_illegal \
+ "N-well overlap of N-tap < %d (diff/tap.10)"
+ surround *mvnsd allnwell 330 absence_illegal \
+ "N-well overlap of MV N-tap < %d (diff/tap.19)"
+ surround *pdiff,*pdiode,pfet,scpfet,ppu allnwell 180 absence_illegal \
+ "N-well overlap of P-Diffusion < %d (diff/tap.8)"
+ surround *mvpdiff,*mvpdiode,mvpfet,mvpfetesd allnwell 330 absence_illegal \
+ "N-well overlap of P-Diffusion < %d (diff/tap.17)"
+ surround mvvar allnwell 560 absence_illegal \
+ "N-well overlap of MV varactor < %d (lvtn.10 + lvtn.4b)"
+ spacing *mvndiode *mvndiode 1070 touching_ok \
+ "MV N-diode spacing < %d (hvntm.2 + 2 * hvntm.3)"
+
+variants (full)
+ cifspacing allmvdiffnowell lvnwell 825 touching_illegal \
+ "MV diffusion to LV nwell spacing < %d (hvi.5 + nsd/psd.5)"
+ cifspacing nwell_or_hvi nwell_or_hvi 700 touching_ok \
+ "HVI to HVI or LV nwell spacing < %d (hvi.5)"
+variants (fast),(full)
+
+ spacing allnfets allpactivenonfet 270 touching_illegal \
+ "nFET cannot abut P-diffusion (diff/tap.3)"
+ spacing allpfets allnactivenonfet 270 touching_illegal \
+ "pFET cannot abut N-diffusion (diff/tap.3)"
+
+ # Butting junction rules
+ edge4way (*psd)/a ~(*ndiff,*psd)/a 125 ~(*ndiff)/a (*ndiff)/a 125 \
+ "N-Diffusion to P-tap spacing < %d across butted junction (psd.5b)"
+ edge4way (*ndiff)/a ~(*ndiff,*psd)/a 125 ~(*psd)/a (*psd)/a 125 \
+ "N-Diffusion to P-tap spacing < %d across butted junction (psd.5a)"
+ edge4way (*nsd)/a ~(*pdiff,*nsd)/a 125 ~(*pdiff)/a (*pdiff)/a 125 \
+ "P-Diffusion to N-tap spacing < %d across butted junction (nsd.5b)"
+ edge4way (*pdiff)/a ~(*pdiff,*nsd)/a 125 ~(*nsd)/a (*nsd)/a 125 \
+ "P-Diffusion to N-tap spacing < %d across butted junction (nsd.5a)"
+
+ edge4way (*mvpsd)/a ~(*mvndiff,*mvpsd)/a 125 ~(*mvndiff)/a (*mvndiff)/a 125 \
+ "MV N-Diffusion to MV P-tap spacing < %d across butted junction (psd.5b)"
+ edge4way (*mvndiff)/a ~(*mvndiff,*mvpsd)/a 125 ~(*mvpsd)/a (*mvpsd)/a 125 \
+ "MV N-Diffusion to MV P-tap spacing < %d across butted junction (psd.5a)"
+ edge4way (*mvnsd)/a ~(*mvpdiff,*mvnsd)/a 125 ~(*mvpdiff)/a (*mvpdiff)/a 125 \
+ "MV P-Diffusion to MV N-tap spacing < %d across butted junction (nsd.5b)"
+ edge4way (*mvpdiff)/a ~(*mvpdiff,*mvnsd)/a 125 ~(*mvnsd)/a (*mvnsd)/a 125 \
+ "MV P-Diffusion to MV N-tap spacing < %d across butted junction (nsd.5a)"
+
+ # Sandwiched butting junction restrictions
+ edge4way (*pdiff)/a (*nsd)/a 400 ~(*pdiff)/a 0 0 "NSDM width < %d (diff/tap.5)"
+ edge4way (*ndiff)/a (*psd)/a 400 ~(*ndiff)/a 0 0 "PSDM width < %d (diff/tap.5)"
+
+ area *nsd,*mvnsd 70110 150 "N-tap minimum area < 0.07011um^2 (nsd.10b)"
+ area *psd,*mvpsd 70110 150 "P-tap minimum area < 0.07011um^2 (psd.10b)"
+
+ angles allactive 90 "Only 90 degree angles permitted on diff and tap (x.2)"
+
+ variants (full)
+ cifmaxwidth tap_missing_licon 0 bend_illegal "All taps must be contacted (licon.16)"
+
+ # Latchup rules
+ cifmaxwidth ptap_missing 0 bend_illegal \
+ "N-diff distance to P-tap must be < 15.0um (LU.2)"
+ cifmaxwidth dptap_missing 0 bend_illegal \
+ "N-diff distance to P-tap in deep nwell.must be < 15.0um (LU.2.1)"
+ cifmaxwidth ntap_missing 0 bend_illegal \
+ "P-diff distance to N-tap must be < 15.0um (LU.3)"
+
+ variants (fast),(full)
+
+#-----------------------------
+# POLY
+#-----------------------------
+
+ width allpoly,polyfill 150 "poly width < %d (poly.1a)"
+ spacing allpoly,polyfill allpoly,polyfill 210 touching_ok "poly spacing < %d (poly.2)"
+
+ spacing allpolynonfet,polyfill \
+ *ndiff,*mvndiff,*ndiode,*nndiode,ndiffres,*ndiodelvt,*pdiff,*mvpdiff,*pdiode,pdiffres,*pdiodelvt,*pdiodehvt \
+ 75 corner_ok allfets \
+ "poly spacing to Diffusion < %d (poly.4)"
+ spacing npres *nsd 480 touching_illegal \
+ "poly resistor spacing to N-tap < %d (poly.9)"
+ overhang *ndiff,rndiff nfet,scnfet,npd,npass 250 "N-Diffusion overhang of nFET < %d (poly.7)"
+ overhang *mvndiff,mvrndiff mvnfet,mvnnfet,nnfet 250 \
+ "N-Diffusion overhang of nFET < %d (poly.7)"
+ overhang *pdiff,rpdiff pfet,scpfet,ppu 250 "P-Diffusion overhang of pmos < %d (poly.7)"
+ overhang *mvpdiff,mvrpdiff mvpfet,mvpfetesd 250 "P-Diffusion overhang of pmos < %d (poly.7)"
+ overhang *poly allfetsstd,allfetsspecial 130 "poly overhang of transistor < %d (poly.8)"
+ overhang *poly allfetscore 110 "poly overhang of SRAM core transistor < %d (poly.8)"
+ rect_only allfets "No bends in transistors (poly.11)"
+ rect_only xhrpoly,uhrpoly "No bends in poly resistors (poly.11)"
+ extend xpc/a xhrpoly,uhrpoly 2160 \
+ "poly contact extends poly resistor by < %d (licon.1c + li.5)"
+ spacing xhrpoly,uhrpoly,xpc xhrpoly,uhrpoly,xpc 1240 touching_illegal \
+ "Distance between precision resistors < %d (rpm.2 + 2 * rpm.3)"
+
+ variants (fast)
+
+ spacing xhrpoly,uhrpoly,xpc allndifflv,allndiffmv 525 touching_illegal \
+ "Distance from precision resistor to N+ diffusion < %d (rpm.3 + rpm.6 + nsd.5a)"
+ spacing xhrpoly,uhrpoly,xpc *poly 400 touching_illegal \
+ "Distance from precision resistor to unrelated poly < %d (rpm.3 + rpm.7)"
+ spacing xhrpoly,uhrpoly,xpc allndiffmvnontap 585 touching_illegal \
+ "Distance from precision resistor to MV N+ device < %d (rpm.3 + rpm.9 + hvntm.3)"
+
+ # Minimum width requirement means actual spacing from res to ndiff has to be
+ # constructed from mask rules. These supercede the simpler checks.
+
+ variants (full)
+
+ cifmaxwidth rpm_nsd_check 0 bend_illegal \
+ "Distance from precision resistor to N+ diffusion < 0.525um (rpm.3 + rpm.6 + nsd.5a)"
+ cifmaxwidth rpm_poly_check 0 bend_illegal \
+ "Distance from precision resistor to unrelated poly < 0.4um (rpm.3 + rpm.7)"
+ cifmaxwidth rpm_hvntm_check 0 bend_illegal \
+ "Distance from precision resistor to MV N+ device < 0.585um (rpm.3 + rpm.9 + hvntm.3)"
+
+ variants (fast),(full)
+
+ angles allpoly,polyfill 90 "Only 90 degree angles permitted on poly (x.2)"
+
+#--------------------------------------------------------------------
+# HVTP
+#--------------------------------------------------------------------
+
+ spacing pfethvt,pdiodehvt,varactorhvt pfet,ppu,scpfet,mvpfet,mvpfetesd,pfetlvt,pfetmvt \
+ 360 touching_illegal \
+ "Min. spacing between pFET and HVTP < %d (hvtp.4)"
+
+ spacing pfethvt,pdiodehvt,varactorhvt varactor 360 touching_illegal \
+ "Min. spacing between varactor and HVTP < %d (hvtp.4 + varac.3)"
+
+#--------------------------------------------------------------------
+# LVTN
+#--------------------------------------------------------------------
+
+ spacing pfetlvt,nfetlvt,pdiodelvt,ndiodelvt \
+ allfetsnolvt 360 touching_illegal \
+ "Min. spacing between FET and LVTN < %d (lvtn.3a)"
+
+ spacing pfetlvt,nfetlvt,pdiodelvt,ndiodelvt scpfethvt,pfethvt,pdiodehvt,varactorhvt \
+ 740 touching_illegal \
+ "Min. spacing between LVTN and HVTP < %d (lvtn.9)"
+
+ # Spacing across S/D direction requires edge rule
+ edge4way allfetsnolvt allactivenonfet 415 \
+ ~(pfetlvt,nfetlvt,pdiodelvt,ndiodelvt)/a allfetsnolvt 415 \
+ "Min. spacing between FET and LVTN in S/D direction < %d (lvtn.3b)"
+
+#--------------------------------------------------------------------
+# NPC (Nitride poly Cut)
+#--------------------------------------------------------------------
+
+# Layer NPC is defined automatically around poly contacts (grow 0.1um)
+
+#--------------------------------------------------------------------
+# CONT (LICON, contact between poly/diff and LI)
+#--------------------------------------------------------------------
+
+ width ndc/li 170 "N-diffusion contact width < %d (licon.1)"
+ width nsc/li 170 "N-tap contact width < %d (licon.1)"
+ width pdc/li 170 "P-diffusion contact width < %d (licon.1)"
+ width psc/li 170 "P-tap contact width < %d (licon.1)"
+ width ndic/li 170 "N-diode contact width < %d (licon.1)"
+ width pdic/li 170 "P-diode contact width < %d (licon.1)"
+ width pc/li 170 "poly contact width < %d (licon.1)"
+
+ width xpc/li 350 "poly resistor contact width < %d (licon.1b + 2 * li.5)"
+ area xpc/li 700000 350 "poly resistor contact length < 2.0um (licon.1c)"
+ area allli,*obsli 56100 170 "Local interconnect minimum area < %a (li.6)"
+
+ width mvndc/li 170 "N-diffusion contact width < %d (licon.1)"
+ width mvnsc/li 170 "N-tap contact width < %d (licon.1)"
+ width mvpdc/li 170 "P-diffusion contact width < %d (licon.1)"
+ width mvpsc/li 170 "P-tap contact width < %d (licon.1)"
+ width mvndic/li 170 "N-diode contact width < %d (licon.1)"
+ width mvpdic/li 170 "P-diode contact width < %d (licon.1)"
+
+ spacing allpdiffcont allndiffcont 170 touching_illegal \
+ "Diffusion contact spacing < %d (licon.2)"
+ spacing allndiffcont allndiffcont 170 touching_ok \
+ "Diffusion contact spacing < %d (licon.2)"
+ spacing allpdiffcont allpdiffcont 170 touching_ok \
+ "Diffusion contact spacing < %d (licon.2)"
+ spacing pc pc 170 touching_ok "Poly1 contact spacing < %d (licon.2)"
+
+ spacing pc alldiff 190 touching_illegal \
+ "poly contact spacing to diffusion < %d (licon.14)"
+ spacing pc allpdifflv,allpdiffmv 235 touching_illegal \
+ "poly contact spacing to P-diffusion < %d (licon.9 + psdm.5a)"
+
+ spacing ndc,pdc nfet,nfetlvt,pfet,pfethvt,pfetlvt,pfetmvt 55 touching_illegal \
+ "Diffusion contact to gate < %d (licon.11)"
+ spacing ndc,pdc scnfet,scpfet,scpfethvt 50 touching_illegal \
+ "Diffusion contact to standard cell gate < %d (licon.11)"
+ spacing ndc,pdc npd,npass,ppu 40 touching_illegal \
+ "Diffusion contact to SRAM gate < %d (licon.11)"
+ spacing mvndc,mvpdc mvnfet,mvnfetesd,mvnnfet,nnfet,mvpfet,mvpfetesd 55 touching_illegal \
+ "Diffusion contact to gate < %d (licon.11)"
+ spacing nsc varactor,varhvt 250 touching_illegal \
+ "Diffusion contact to varactor gate < %d (licon.10)"
+ spacing mvnsc mvvar 250 touching_illegal \
+ "Diffusion contact to varactor gate < %d (licon.10)"
+
+ surround ndc/a *ndiff,nfet,scnfet,npd,npass,nfetlvt,rnd 40 absence_illegal \
+ "N-diffusion overlap of N-diffusion contact < %d (licon.5a)"
+ surround pdc/a *pdiff,pfet,scpfet,scpfethvt,ppu,pfethvt,pfetmvt,pfetlvt,rpd \
+ 40 absence_illegal \
+ "P-diffusion overlap of P-diffusion contact < %d (licon.5a)"
+ surround ndic/a *ndi 40 absence_illegal \
+ "N-diode overlap of N-diode contact < %d (licon.5a)"
+ surround pdic/a *pdi 40 absence_illegal \
+ "P-diode overlap of N-diode contact < %d (licon.5a)"
+
+ spacing psc/a allnactivenontap 60 touching_illegal \
+ "Min. space between P-tap contact and butting N diffusion < %d (licon.5b)"
+ spacing nsc/a allpactivenontap 60 touching_illegal \
+ "Min. space between N-tap contact and butting P diffusion < %d (licon.5b)"
+
+ surround ndc/a *ndiff,nfet,scnfet,npd,npass,nfetlvt,rnd 60 directional \
+ "N-diffusion overlap of N-diffusion contact < %d in one direction (licon.5c)"
+ surround pdc/a *pdiff,pfet,scpfet,scpfethvt,ppu,pfethvt,pfetmvt,pfetlvt,rpd \
+ 60 directional \
+ "P-diffusion overlap of P-diffusion contact < %d in one direction (licon.5c)"
+ surround ndic/a *ndi 60 directional \
+ "N-diode overlap of N-diode contact < %d in one direction (licon.5c)"
+ surround pdic/a *pdi 60 directional \
+ "P-diode overlap of N-diode contact < %d in one direction (licon.5c)"
+
+ surround nsc/a *nsd 120 directional \
+ "N-tap overlap of N-tap contact < %d in one direction (licon.7)"
+ surround psc/a *psd 120 directional \
+ "P-tap overlap of P-tap contact < %d in one direction (licon.7)"
+
+ surround mvndc/a *mvndiff,mvnfet,mvnfetesd,mvrnd 40 absence_illegal \
+ "N-diffusion overlap of N-diffusion contact < %d (licon.5a)"
+ surround mvpdc/a *mvpdiff,mvpfet,mvpfetesd,mvrpd 40 absence_illegal \
+ "P-diffusion overlap of P-diffusion contact < %d (licon.5a)"
+ surround mvndic/a *mvndi 40 absence_illegal \
+ "N-diode overlap of N-diode contact < %d (licon.5a)"
+ surround mvpdic/a *mvpdi 40 absence_illegal \
+ "P-diode overlap of N-diode contact < %d (licon.5a)"
+
+ spacing mvpsc/a allndiffmvnontap 60 touching_illegal \
+ "Min. space between P-tap contact and butting N diffusion < %d (licon.5b)"
+ spacing mvnsc/a allpdiffmvnontap 60 touching_illegal \
+ "Min. space between N-tap contact and butting P diffusion < %d (licon.5b)"
+
+ surround mvndc/a *mvndiff,mvnfet,mvnfetesd,mvrnd 60 directional \
+ "N-diffusion overlap of N-diffusion contact < %d in one direction (licon.5c)"
+ surround mvpdc/a *mvpdiff,mvpfet,mvpfetesd,mvrpd 60 directional \
+ "P-diffusion overlap of P-diffusion contact < %d in one direction (licon.5c)"
+ surround mvndic/a *mvndi 60 directional \
+ "N-diode overlap of N-diode contact < %d in one direction (licon.5c)"
+ surround mvpdic/a *mvpdi 60 directional \
+ "P-diode overlap of N-diode contact < %d in one direction (licon.5c)"
+
+ surround mvnsc/a *mvnsd 120 directional \
+ "N-tap overlap of N-tap contact < %d in one direction (licon.7)"
+ surround mvpsc/a *mvpsd 120 directional \
+ "P-tap overlap of P-tap contact < %d in one direction (licon.7)"
+
+ surround pc/a *poly,mrp1,xhrpoly,uhrpoly 50 absence_illegal \
+ "poly overlap of poly contact < %d (licon.8)"
+ surround pc/a *poly,mrp1,xhrpoly,uhrpoly 80 directional \
+ "poly overlap of poly contact < %d in one direction (licon.8a)"
+
+ exact_overlap (allcont)/a
+
+#-------------------------------------------------------------
+# LI - Local interconnect layer
+#-------------------------------------------------------------
+
+variants *
+
+ width *li 170 "Local interconnect width < %d (li.1)"
+ width rli 290 "Local interconnect width < %d (li.7)"
+
+ spacing *locali,rli *locali,rli,*obsli 170 touching_ok \
+ "Local interconnect spacing < %d (li.3)"
+
+ # Local interconnect in core (SRAM) cells has more relaxed rules. There are
+ # no special layers for the contacts in core cells, so they must be included
+ # in the rule.
+ width coreli,pc,ndc,nsc,pdc,psc,allli,*obsli 140 \
+ "Core local interconnect width < %d (li.c1)"
+
+ spacing coreli,pc,ndc,nsc,pdc,psc,mcon allli,*obsli 140 touching_ok \
+ "Core local interconnect spacing < %d (li.c2)"
+
+ surround pc/li *li,coreli 80 directional \
+ "Local interconnect overlap of poly contact < %d in one direction (li.5)"
+
+ surround ndc/li,nsc/li,pdc/li,psc/li,ndic/li,pdic/li,mvndc/li,mvnsc/li,mvpdc/li,mvpsc/li,mvndic/li,mvpdic/li \
+ *li,rli,coreli 80 directional \
+ "Local interconnect overlap of diffusion contact < %d in one direction (li.5)"
+
+ area allli,*obsli,coreli 56100 170 "Local interconnect minimum area < %a (li.6)"
+
+ angles *locali,rli 90 "Only 90 degree angles permitted on local interconnect (x.2)"
+ angles coreli 45 \
+ "Only 45 degree angles permitted on local interconnect in SRAM cell (x.2)"
+
+#-------------------------------------------------------------
+# MCON - Contact between local interconnect and metal1
+#-------------------------------------------------------------
+
+ width mcon/m1 170 "mcon.width < %d (mcon.1)"
+ spacing mcon/m1 mcon/m1,obsmcon/m1 190 touching_ok "mcon.spacing < %d (mcon.2)"
+
+ exact_overlap mcon/li
+
+#-------------------------------------------------------------
+# METAL1 -
+#-------------------------------------------------------------
+
+ width *m1,rm1 140 "Metal1 width < %d (met1.1)"
+ spacing allm1,m1fill allm1,*obsm1,m1fill 140 touching_ok "Metal1 spacing < %d (met1.2)"
+ area allm1,*obsm1 83000 140 "Metal1 minimum area < %a (met1.6)"
+
+ surround mcon/m1 *met1 30 absence_illegal \
+ "Metal1 overlap of local interconnect contact < %d (met1.4)"
+ surround mcon/m1 *met1 60 directional \
+ "Metal1 overlap of local interconnect contact < %d in one direction (met1.5)"
+
+ angles allm1,m1fill 45 "Only 45 and 90 degree angles permitted on metal1 (x.3a)"
+
+variants (fast),(full)
+ widespacing allm1 3005 allm1,*obsm1,m1fill 280 touching_ok \
+ "Metal1 > 3um spacing to unrelated m1 < %d (met1.3b)"
+ widespacing *obsm1 3005 allm1 280 touching_ok \
+ "Metal1 > 3um spacing to unrelated m1 < %d (met1.3b)"
+
+variants (full)
+ cifmaxwidth m1_hole_empty 0 bend_illegal \
+ "Min area of metal1 holes > 0.14um^2 (met1.7)"
+
+ cifspacing m1_large_halo m1_large_halo 280 touching_ok \
+ "Spacing of metal1 features attached to and within 0.28um of large metal1 < %d (met1.3a)"
+variants *
+
+#--------------------------------------------------
+# VIA1
+#--------------------------------------------------
+
+ width v1/m1 260 "Via1 width < %d (via.1a + 2 * via.4a)"
+ spacing v1 v1 60 touching_ok "Via1 spacing < %d (via.2 - 2 * via.4a)"
+ surround v1/m1 *m1,rm1 30 directional \
+ "Metal1 overlap of Via1 < %d in one direction (via.5a - via.4a)"
+ surround v1/m2 *m2,rm2 30 directional \
+ "Metal2 overlap of Via1 < %d in one direction (met2.5 - met2.4)"
+
+ exact_overlap v1/m1
+
+#--------------------------------------------------
+# METAL2 -
+#--------------------------------------------------
+
+ width allm2,m2fill 140 "Metal2 width < %d (met2.1)"
+ spacing allm2 allm2,obsm2,m2fill 140 touching_ok "Metal2 spacing < %d (met2.2)"
+ area allm2,obsm2 67600 140 "Metal2 minimum area < %a (met2.6)"
+
+ angles allm2 45 "Only 45 and 90 degree angles permitted on metal2 (x.3a)"
+
+variants (fast),(full)
+ widespacing allm2 3005 allm2,obsm2,m2fill 280 touching_ok \
+ "Metal2 > 3um spacing to unrelated m2 < %d (met2.3b)"
+ widespacing obsm2 3005 allm2 280 touching_ok \
+ "Metal2 > 3um spacing to unrelated m2 < %d (met2.3b)"
+
+variants (full)
+ cifmaxwidth m2_hole_empty 0 bend_illegal \
+ "Min area of metal2 holes > 0.14um^2 (met2.7)"
+
+ cifspacing m2_large_halo m2_large_halo 280 touching_ok \
+ "Spacing of metal2 features attached to and within 0.28um of large metal2 < %d (met2.3a)"
+variants *
+
+#--------------------------------------------------
+# VIA2
+#--------------------------------------------------
+
+ width v2/m2 280 "via2 width < %d (via2.1a + 2 * via2.4)"
+
+ spacing v2 v2 120 touching_ok "via2 spacing < %d (via2.2 - 2 * via2.4)"
+
+ surround v2/m2 *m2,rm2 45 directional \
+ "Metal2 overlap of via2 < %d in one direction (via2.4a - via2.4)"
+ surround v2/m3 *m3,rm3 25 absence_illegal "Metal3 overlap of via2 < %d (met3.4)"
+
+ exact_overlap v2/m2
+
+#--------------------------------------------------
+# METAL3 -
+#--------------------------------------------------
+
+ width allm3,m3fill 300 "Metal3 width < %d (met3.1)"
+ spacing allm3 allm3,obsm3,m3fill 300 touching_ok "Metal3 spacing < %d (met3.2)"
+ area allm3,obsm3 240000 300 "Metal3 minimum area < %a (met3.6)"
+
+ angles allm3 45 "Only 45 and 90 degree angles permitted on metal3 (x.3a)"
+
+variants (fast),(full)
+ widespacing allm3,m3fill 3005 allm3,obsm3 400 touching_ok \
+ "Metal3 > 3um spacing to unrelated m3 < %d (met3.3d)"
+ widespacing obsm3 3005 allm3 400 touching_ok \
+ "Metal3 > 3um spacing to unrelated m3 < %d (met3.3d)"
+variants (full)
+ cifspacing m3_large_halo m3_large_halo 400 touching_ok \
+ "Spacing of metal3 features attached to and within 0.40um of large metal3 < %d (met3.3c)"
+variants *
+
+
+#--------------------------------------------------
+# VIA3 - Requires METAL5 Module
+#--------------------------------------------------
+
+ width v3/m3 320 "via3 width < %d (via3.1 + 2 * via3.4)"
+ spacing v3 v3 80 touching_ok "via3 spacing < %d (via3.2 - 2 * via3.4)"
+ surround v3/m3 *m3,rm3 30 directional \
+ "Metal3 overlap of via3 in one direction < %d (via3.5 - via3.4)"
+ surround v3/m4 *m4,rm4 5 absence_illegal \
+ "Metal4 overlap of via3 < %d (met4.3 - via3.4)"
+
+ exact_overlap v3/m3
+
+#-----------------------------
+# METAL4 - METAL4 Module
+#-----------------------------
+
+variants *
+
+ width allm4,m4fill 300 "Metal4 width < %d (met4.1)"
+ spacing allm4 allm4,obsm4,m4fill 300 touching_ok "Metal4 spacing < %d (met4.2)"
+ area allm4,obsm4 240000 300 "Metal4 minimum area < %a (met4.4a)"
+
+ angles allm4 45 "Only 45 and 90 degree angles permitted on metal4 (x.3a)"
+
+variants (fast),(full)
+ widespacing allm4,m4fill 3005 allm4,obsm4 400 touching_ok \
+ "Metal4 > 3um spacing to unrelated m4 < %d (met4.5b)"
+ widespacing obsm4 3005 allm4 400 touching_ok \
+ "Metal4 > 3um spacing to unrelated m4 < %d (met4.5b)"
+variants (full)
+ cifspacing m4_large_halo m4_large_halo 400 touching_ok \
+ "Spacing of metal4 features attached to and within 0.40um of large metal4 < %d (met4.5a)"
+variants *
+
+#--------------------------------------------------
+# VIA4 - Requires METAL5 Module
+#--------------------------------------------------
+
+ width v4/m4 1180 "via4 width < %d (via4.1 + 2 * via4.4)"
+ spacing v4 v4 420 touching_ok "via4 spacing < %d (via4.2 - 2 * via4.4)"
+ surround v4/m5 *m5,rm5 120 absence_illegal \
+ "Metal5 overlap of via4 < %d (met5.3 - via4.4)"
+
+ exact_overlap v4/m4
+
+#-----------------------------
+# METAL5 - METAL5 Module
+#-----------------------------
+
+ width allm5,m5fill 1600 "Metal5 width < %d (met5.1)"
+ spacing allm5 allm5,obsm5,m5fill 1600 touching_ok "Metal5 spacing < %d (met5.2)"
+ area allm5,obsm5 4000000 1600 "Metal5 minimum area < %a (met5.4)"
+
+ angles allm5 45 "Only 45 and 90 degree angles permitted on metal5 (x.3a)"
+
+
+
+variants (full)
+
+ width metrdl 10000 "RDL width < %d (rdl.1)"
+ spacing metrdl metrdl 10000 touching_ok "RDL spacing < %d (rdl.2)"
+ surround glass metrdl 10750 absence_ok "RDL must surround glass cut by %d (rdl.3)"
+ spacing padl metrdl 19660 surround_ok "RDL spacing to unrelated pad < %d (rdl.6)"
+
+variants (fast),(full)
+
+
+#--------------------------------------------------
+# NMOS, PMOS
+#--------------------------------------------------
+
+ edge4way *poly allfetsstd 420 allfets 0 0 \
+ "Transistor width < %d (diff/tap.2)"
+ edge4way *poly allfetsspecial 360 allfets 0 0 \
+ "Transistor in standard cell width < %d (diff/tap.2)"
+ edge4way *poly npass,npd,nsonos 210 allfets 0 0 \
+ "N-Transistor in SRAM core width < %d (diff/tap.2)"
+ edge4way *poly ppu 140 allfets 0 0 \
+ "P-Transistor in SRAM core width < %d (diff/tap.2)"
+
+ # Except: Note that standard cells allow transistor width minimum 0.36um
+ width pfetlvt 350 "LVT PMOS gate length < %d (poly.1b)"
+
+ spacing allpolynonfet,polyfill *nsd 55 corner_ok var,varhvt,corenvar \
+ "poly spacing to diffusion tap < %d (poly.5)"
+ spacing allpolynonfet,polyfill *psd 55 corner_ok corepvar \
+ "poly spacing to diffusion tap < %d (poly.5)"
+ spacing allpolynonfet,polyfill *mvnsd 55 corner_ok mvvar \
+ "poly spacing to diffusion tap < %d (poly.5)"
+ spacing allpolynonfet,polyfill *mvpsd 55 touching_illegal \
+ "poly spacing to diffusion tap < %d (poly.5)"
+
+ edge4way *psd *ndiff 300 ~(nfet,npass,npd,scnfet,nfetlvt,nsonos)/a *psd 300 \
+ "Butting P-tap spacing to NMOS gate < %d (poly.6)"
+ edge4way *nsd *pdiff 300 ~(pfet,ppu,scpfet,scpfethvt,pfetlvt,pfetmvt)/a *nsd 300 \
+ "Butting N-tap spacing to PMOS gate < %d (poly.6)"
+ edge4way *mvpsd *mvndiff 300 ~(mvnfet,mvnfetesd,mvnnfet,nnfet)/a *mvpsd 300 \
+ "Butting MV P-tap spacing to MV NMOS gate < %d (poly.6)"
+ edge4way *mvnsd *mvpdiff 300 ~(mvpfet,mvpfetesd)/a *mvnsd 300 \
+ "Butting MV N-tap spacing to MV PMOS gate < %d (poly.6)"
+
+ # No LV FETs in HV diff
+ spacing pfet,scpfet,scpfethvt,ppu,pfetlvt,pfetmvt,pfethvt,*pdiff *mvpdiff 360 touching_illegal \
+ "LV P-diffusion to MV P-diffusion < %d (diff/tap.23 + diff/tap.22)"
+
+ spacing nfet,scnfet,npd,npass,nfetlvt,varactor,varhvt,*ndiff *mvndiff 360 touching_illegal \
+ "LV N-diffusion to MV N-diffusion < %d (diff/tap.23 + diff/tap.22)"
+
+ # No HV FETs in LV diff
+ spacing mvpfet,mvpfetesd,*mvpdiff *pdiff 360 touching_illegal \
+ "MV P-diffusion to LV P-diffusion < %d (diff/tap.23 + diff/tap.22)"
+
+ spacing mvnfet,mvnfetesd,mvvaractor,*mvndiff *ndiff 360 touching_illegal \
+ "MV N-diffusion to LV N-diffusion < %d (diff/tap.23 + diff/tap.22)"
+
+ # Minimum length of MV FETs. Note that this is larger than the minimum
+ # width (0.29um), so an edge rule is required
+
+ edge4way mvndiff mvnfet,mvnfetesd 500 mvnfet,mvnfetesd 0 0 \
+ "MV NMOS minimum length < %d (poly.13)"
+
+ edge4way mvnsd mvvaractor 500 mvvaractor 0 0 \
+ "MV Varactor minimum length < %d (poly.13)"
+
+ edge4way mvpdiff mvpfet,mvpfetesd 500 mvpfet,mvpfetesd 0 0 \
+ "MV PMOS minimum length < %d (poly.13)"
+
+#--------------------------------------------------
+# mrp1 (N+ poly resistor)
+#--------------------------------------------------
+
+ width mrp1 330 "mrp1 resistor width < %d (poly.3)"
+
+#--------------------------------------------------
+# xhrpoly (P+ poly resistor)
+# uhrpoly (P+ poly resistor, 2kOhm/sq)
+#--------------------------------------------------
+
+ # NOTE: u/xhrpoly resistor requires discrete widths 0.35, 0.69, ... up to 1.27.
+ width xhrpoly 350 "xhrpoly resistor width < %d (P+ poly.1a)"
+ width uhrpoly 350 "uhrpoly resistor width < %d (P+ poly.1a)"
+
+ spacing xhrpoly,uhrpoly,xpc alldiff 480 touching_illegal \
+ "xhrpoly/uhrpoly resistor spacing to diffusion < %d (poly.9)"
+
+ spacing mrp1,xhrpoly,uhrpoly,xpc allfets 480 touching_illegal \
+ "Poly resistor spacing to poly < %d (poly.9)"
+
+ spacing xhrpoly,uhrpoly,xpc *poly 480 touching_illegal \
+ "Poly resistor spacing to poly < %d (poly.9)"
+
+ spacing mrp1 *poly 480 touching_ok \
+ "Poly resistor spacing to poly < %d (poly.9)"
+
+ spacing mrp1,xhrpoly,uhrpoly,xpc alldiff 480 touching_illegal \
+ "Poly resistor spacing to diffusion < %d (poly.9)"
+
+#------------------------------------
+# nsonos
+#------------------------------------
+
+variants (full)
+ cifmaxwidth bbox_missing 0 bend_illegal \
+ "SONOS transistor must be in cell with abutment box (tunm.8)"
+variants (fast),(full)
+
+#------------------------------------
+# MOS Varactor device rules
+#------------------------------------
+
+ overhang *nsd var,varhvt 250 \
+ "N-Tap overhang of Varactor < %d (var.4)"
+
+ overhang *mvnsd mvvar 250 \
+ "N-Tap overhang of Varactor < %d (var.4)"
+
+ width var,varhvt,mvvar 180 "Varactor length < %d (var.1)"
+ extend var,varhvt,mvvar *poly 1000 "Varactor width < %d (var.2)"
+
+variants (full)
+ cifmaxwidth var_poly_no_nwell 0 bend_illegal \
+ "N-well overlap of varactor poly < 0.15um (varac.5)"
+
+ cifmaxwidth pdiff_in_varactor_well 0 bend_illegal \
+ "Varactor N-well must not contain P+ diffusion (varac.7)"
+variants (fast),(full)
+
+#-----------------------------------------------------------
+# MiM CAP (CAPM) -
+#-----------------------------------------------------------
+
+ width *mimcap 1000 "MiM cap width < %d (capm.1)"
+ spacing *mimcap *mimcap 840 touching_ok "MiM cap spacing < %d (capm.2a)"
+ spacing *mimcap via3/m3 80 touching_illegal \
+ "MiM cap spacing to via3 < %d (capm.5 - via3.4)"
+ surround *mimcc *mimcap 80 absence_illegal \
+ "MiM cap must surround MiM cap contact by %d (capm.4 - via3.4)"
+ rect_only *mimcap "MiM cap must be rectangular (capm.7)
+
+ surround *mimcap *metal3/m3 140 absence_illegal \
+ "Metal3 must surround MiM cap by %d (capm.3)"
+ spacing via2 *mimcap 100 touching_illegal \
+ "MiM cap spacing to via2 < %d (capm.8 - via2.4)"
+ spacing *mimcap *metal3/m3 500 surround_ok \
+ "MiM cap spacing to unrelated metal3 < %d (capm.11)"
+
+variants (full)
+ cifspacing mim_bottom mim_bottom 1200 touching_ok \
+ "MiM cap bottom plate spacing < %d (capm.2b)"
+variants (fast),(full)
+
+ # MiM cap contact rules (VIA3)
+
+ width mimcc/c1 320 "MiM cap contact width < %d (via3.1 + 2 * via3.4)"
+ spacing mimcc mimcc 80 touching_ok "MiM cap contact spacing < %d (via3.2 - 2 * via3.4)"
+ surround mimcc/m4 *m4 5 directional \
+ "Metal4 overlap of MiM cap contact in one direction < %d (met4.3 - via3.4)"
+ exact_overlap mimcc/c1
+
+ width *mimcap2 1000 "MiM2 cap width < %d (cap2m.1)"
+ spacing *mimcap2 *mimcap2 840 touching_ok "MiM2 cap spacing < %d (cap2m.2a)"
+ spacing *mimcap2 via4/m4 10 touching_illegal \
+ "MiM2 cap spacing to via4 < %d (cap2m.5 - via4.4)"
+ surround *mim2cc *mimcap2 10 absence_illegal \
+ "MiM2 cap must surround MiM cap 2 contact by %d (cap2m.4 - via4.4)"
+ rect_only *mimcap2 "MiM2 cap must be rectangular (cap2m.7)
+
+ surround *mimcap2 *metal4/m4 140 absence_illegal \
+ "Metal4 must surround MiM2 cap by %d (cap2m.3)"
+ spacing via3 *mimcap2 80 touching_illegal \
+ "MiM2 cap spacing to via3 < %d (cap2m.8 - via3.4)"
+ spacing *mimcap2 *metal4/m4 500 surround_ok \
+ "MiM2 cap spacing to unrelated metal4 < %d (cap2m.11)"
+
+variants (full)
+ cifmaxwidth mim2_contact_overlap 0 bend_illegal \
+ "MiM2 cap contact must not cross MiM cap contact (cap2m.8)"
+
+ cifspacing mim2_bottom mim2_bottom 1200 touching_ok \
+ "MiM2 cap bottom plate spacing < %d (cap2m.2b)"
+variants (fast),(full)
+
+ # MiM cap contact rules (VIA4)
+
+ width mim2cc/c2 1180 "MiM2 cap contact width < %d (via4.1 + 2 * via4.4)"
+ spacing mim2cc mim2cc 420 touching_ok \
+ "MiM2 cap contact spacing < %d (via4.2 - 2 * via4.4)"
+ surround mim2cc/m5 *m5 120 absence_illegal \
+ "Metal5 overlap of MiM2 cap contact < %d (met5.3 - via4.4)"
+ exact_overlap mim2cc/c2
+
+
+#----------------------------
+# HVNTM
+#----------------------------
+variants (full)
+ cifspacing hvntm_generate hvntm_generate 700 touching_ok \
+ "HVNTM spacing < %d (hvntm.2)"
+variants (fast),(full)
+
+#----------------------------
+# End DRC style
+#----------------------------
+
+end
+
+#----------------------------
+# LEF format definitions
+#----------------------------
+
+lef
+
+ masterslice pwell pwell PWELL substrate
+ masterslice nwell nwell NWELL
+
+ routing li li1 LI1 LI li
+
+ routing m1 met1 MET1 m1
+ routing m2 met2 MET2 m2
+ routing m3 met3 MET3 m3
+ routing m4 met4 MET4 m4
+ routing m5 met5 MET5 m5
+ routing mrdl met6 MET6 m6 MRDL METRDL
+
+ cut mcon mcon MCON Mcon
+ cut m2c via via1 VIA VIA1 cont2 via12
+ cut m3c via2 VIA2 cont3 via23
+ cut via3 via3 VIA3 cont4 via34
+ cut via4 via4 VIA4 cont5 via45
+
+ obs obsli li1
+ obs obsm1 met1
+ obs obsm2 met2
+ obs obsm3 met3
+
+ obs obsm4 met4
+ obs obsm5 met5
+ obs obsmrdl met6
+
+ # NOTE: obsmcon only used with li1, not obsli.
+ obs obsmcon mcon
+
+ # Vias on obstruction layers should be ignored, so cast to obstruction metal.
+ obs obsm1 via
+ obs obsm2 via2
+ obs obsm3 via3
+ obs obsm4 via4
+
+end
+
+#-----------------------------------------------------
+# Device and Parasitic extraction
+#-----------------------------------------------------
+
+
+extract
+ style ngspice variants (),(orig),(si)
+ cscale 1
+ # NOTE: SkyWater SPICE libraries use .option scale 1E6 so all
+ # dimensions must be in units of microns in the extract file.
+ # Use extract style "ngspice(si)" to override this and produce
+ # a file with SI units for length/area.
+
+ variants (),(orig)
+ lambda 1E6
+ variants (si)
+ lambda 1.0
+ variants *
+
+ units microns
+ step 7
+ sidehalo 2
+
+ # NOTE: MiM cap layers have been purposely put out of order,
+ # may want to reconsider.
+
+ planeorder dwell 0
+ planeorder well 1
+ planeorder active 2
+ planeorder locali 3
+ planeorder metal1 4
+ planeorder metal2 5
+ planeorder metal3 6
+ planeorder metal4 7
+ planeorder metal5 8
+ planeorder metali 9
+ planeorder block 10
+ planeorder comment 11
+ planeorder cap1 12
+ planeorder cap2 13
+
+ height dnwell -0.1 0.1
+ height nwell,pwell 0.0 0.2062
+ height alldiff 0.2062 0.12
+ height fomfill 0.2062 0.12
+ height allpoly 0.3262 0.18
+ height polyfill 0.3262 0.18
+ height alldiffcont 0.3262 0.61
+ height pc 0.5062 0.43
+ height allli 0.9361 0.10
+ height mcon 1.0361 0.34
+ height allm1 1.3761 0.36
+ height m1fill 1.3761 0.36
+ height v1 1.7361 0.27
+ height allm2 2.0061 0.36
+ height m2fill 1.3761 0.36
+ height v2 2.3661 0.42
+ height allm3 2.7861 0.845
+ height m3fill 1.3761 0.36
+ height v3 3.6311 0.39
+ height allm4 4.0211 0.845
+ height m4fill 1.3761 0.36
+ height v4 4.8661 0.505
+ height allm5 5.3711 1.26
+ height m5fill 1.3761 0.36
+ height mimcap 2.4661 0.2
+ height mimcap2 3.7311 0.2
+ height mimcc 2.6661 0.12
+ height mim2cc 3.9311 0.09
+ height mrdlc 6.6311 0.63
+ height mrdl 7.2611 3.0
+
+ # Antenna check parameters
+ # Note that checks w/diode diffusion are not modeled
+ model partial
+ antenna poly sidewall 50 none
+ antenna allcont surface 3 none
+ antenna li sidewall 75 0 450
+ antenna mcon surface 3 0 18
+ antenna m1,m2,m3 sidewall 400 2600 400
+ antenna v1 surface 3 0 18
+ antenna v2 surface 6 0 36
+ antenna m4,m5 sidewall 400 2600 400
+ antenna v3,v4 surface 6 0 36
+
+ tiedown alldiffnonfet
+
+ substrate *ppdiff,*mvppdiff,space/w,pwell well $SUB -dnwell,isosub
+
+# Resistances are in milliohms per square
+# Optional 3rd argument is the corner adjustment fraction
+# Device values come from trtc.cor (typical corner)
+ resist (dnwell)/dwell 2200000
+ resist (pwell)/well 3050000
+ resist (nwell)/well 1700000
+ resist (rpw)/well 3050000 0.5
+ resist (*ndiff,nsd)/active 120000
+ resist (*pdiff,*psd)/active 197000
+ resist (*mvndiff,mvnsd)/active 114000
+ resist (*mvpdiff,*mvpsd)/active 191000
+
+ resist ndiffres/active 120000 0.5
+ resist pdiffres/active 197000 0.5
+ resist mvndiffres/active 114000 0.5
+ resist mvpdiffres/active 191000 0.5
+ resist mrp1/active 48200 0.5
+ resist xhrpoly/active 319800 0.5
+ resist uhrpoly/active 2000000 0.5
+
+ resist (allpolynonres)/active 48200
+ resist rmp/active 48200
+
+ resist (allli)/locali 12200
+ resist (allm1)/metal1 125
+ resist (allm2)/metal2 125
+ resist (allm3)/metal3 47
+ resist (allm4)/metal4 47
+ resist (allm5)/metal5 29
+ resist mrdl/metali 5
+
+ # These types should not be considered as electrical nodes
+ resist blocktypes None
+ resist obstypes None
+ resist idtypes None
+ resist comment None
+
+ contact ndc,nsc 15000
+ contact pdc,psc 15000
+ contact mvndc,mvnsc 15000
+ contact mvpdc,mvpsc 15000
+ contact pc 15000
+ contact mcon 152000
+ contact m2c 4500
+ contact m3c 3410
+ contact mimcc 4500
+ contact mim2cc 3410
+ contact via3 3410
+ contact via4 380
+ contact mrdlc 6
+
+#-------------------------------------------------------------------------
+# Parasitic capacitance values: Use document (...)
+#-------------------------------------------------------------------------
+# This uses the new "default" definitions that determine the intervening
+# planes from the planeorder stack, take care of the reflexive sideoverlap
+# definitions, and generally clean up the section and make it more readable.
+#
+# Also uses "units microns" statement. All values are taken from the
+# document PEX/xRC/cap_models. Fringe capacitance values are approximated.
+# Units are aF/um^2 for area caps and aF/um for perimeter and sidewall caps.
+#-------------------------------------------------------------------------
+# Remember that device capacitances to substrate are taken care of by the
+# models. Thus, active and poly definitions ignore all "fet" types.
+# fet types are excluded when computing parasitic capacitance to
+# active from layers above them because poly is a shield; fet types are
+# included for parasitics from layers above to poly. Resistor types
+# should be removed from all parasitic capacitance calculations, or else
+# they just create floating caps. Technically, the capacitance probably
+# should be split between the two terminals. Unsure of the correct model.
+#-------------------------------------------------------------------------
+
+#n-well
+# NOTE: This value not found in PEX files
+defaultareacap nwell well 120
+
+#n-active
+# Rely on device models to capture *ndiff area cap
+# Do not extract parasitics from resistors
+# defaultareacap allnactivenonfet active 790
+# defaultperimeter allnactivenonfet active 280
+
+#p-active
+# Rely on device models to capture *pdiff area cap
+# Do not extract parasitics from resistors
+# defaultareacap allpactivenonfet active 810
+# defaultperimeter allpactivenonfet active 300
+
+#poly
+# Do not extract parasitics from resistors
+# defaultsidewall allpolynonfet active 22
+# defaultareacap allpolynonfet active 106
+# defaultperimeter allpolynonfet active 57
+
+ defaultsidewall *poly active 23
+ defaultareacap *poly active nwell,obswell,pwell well 106
+ defaultperimeter *poly active nwell,obswell,pwell well 55
+
+#locali
+ defaultsidewall allli locali 33
+ defaultareacap allli locali nwell,obswell,pwell well 37
+ defaultperimeter allli locali nwell,obswell,pwell well 55
+ defaultoverlap allli locali nwell well 37
+
+#locali->diff
+ defaultoverlap allli locali allactivenonfet active 37
+ defaultsideoverlap allli locali allactivenonfet active 55
+
+#locali->poly
+ defaultoverlap allli locali allpolynonres active 94
+ defaultsideoverlap allli locali allpolynonres active 52
+ defaultsideoverlap *poly active allli locali 25
+
+#metal1
+ defaultsidewall allm1 metal1 45
+ defaultareacap allm1 metal1 nwell,obswell,pwell well 26
+ defaultperimeter allm1 metal1 nwell,obswell,pwell well 41
+ defaultoverlap allm1 metal1 nwell well 26
+
+#metal1->diff
+ defaultoverlap allm1 metal1 allactivenonfet active 26
+ defaultsideoverlap allm1 metal1 allactivenonfet active 41
+
+#metal1->poly
+ defaultoverlap allm1 metal1 allpolynonres active 45
+ defaultsideoverlap allm1 metal1 allpolynonres active 47
+ defaultsideoverlap *poly active allm1 metal1 17
+
+#metal1->locali
+ defaultoverlap allm1 metal1 allli locali 114
+ defaultsideoverlap allm1 metal1 allli locali 59
+ defaultsideoverlap allli locali allm1 metal1 35
+
+#metal2
+ defaultsidewall allm2 metal2 50
+ defaultareacap allm2 metal2 nwell,obswell,pwell well 17
+ defaultperimeter allm2 metal2 nwell,obswell,pwell well 41
+ defaultoverlap allm2 metal2 nwell well 38
+
+#metal2->diff
+ defaultoverlap allm2 metal2 allactivenonfet active 17
+ defaultsideoverlap allm2 metal2 allactivenonfet active 41
+
+#metal2->poly
+ defaultoverlap allm2 metal2 allpolynonres active 24
+ defaultsideoverlap allm2 metal2 allpolynonres active 41
+ defaultsideoverlap *poly active allm2 metal2 11
+
+#metal2->locali
+ defaultoverlap allm2 metal2 allli locali 38
+ defaultsideoverlap allm2 metal2 allli locali 46
+ defaultsideoverlap allli locali allm2 metal2 22
+
+#metal2->metal1
+ defaultoverlap allm2 metal2 allm1 metal1 134
+ defaultsideoverlap allm2 metal2 allm1 metal1 67
+ defaultsideoverlap allm1 metal1 allm2 metal2 48
+
+#metal3
+ defaultsidewall allm3 metal3 63
+ defaultoverlap allm3 metal3 nwell well 12
+ defaultareacap allm3 metal3 nwell,obswell,pwell well 12
+ defaultperimeter allm3 metal3 nwell,obswell,pwell well 41
+
+#metal3->diff
+ defaultoverlap allm3 metal3 allactive active 12
+ defaultsideoverlap allm3 metal3 allactive active 41
+
+#metal3->poly
+ defaultoverlap allm3 metal3 allpolynonres active 16
+ defaultsideoverlap allm3 metal3 allpolynonres active 44
+ defaultsideoverlap *poly active allm3 metal3 9
+
+#metal3->locali
+ defaultoverlap allm3 metal3 allli locali 21
+ defaultsideoverlap allm3 metal3 allli locali 47
+ defaultsideoverlap allli locali allm3 metal3 15
+
+#metal3->metal1
+ defaultoverlap allm3 metal3 allm1 metal1 35
+ defaultsideoverlap allm3 metal3 allm1 metal1 55
+ defaultsideoverlap allm1 metal1 allm3 metal3 27
+
+#metal3->metal2
+ defaultoverlap allm3 metal3 allm2 metal2 86
+ defaultsideoverlap allm3 metal3 allm2 metal2 70
+ defaultsideoverlap allm2 metal2 allm3 metal3 44
+
+#metal4
+ defaultsidewall allm4 metal4 67
+# defaultareacap alltopm metal4 well 6
+ areacap allm4/m4 8
+ defaultoverlap allm4 metal4 nwell well 8
+ defaultperimeter allm4 metal4 well 37
+
+#metal4->diff
+ defaultoverlap allm4 metal4 allactivenonfet active 8
+ defaultsideoverlap allm4 metal4 allactivenonfet active 37
+
+#metal4->poly
+ defaultoverlap allm4 metal4 allpolynonres active 10
+ defaultsideoverlap allm4 metal4 allpolynonres active 38
+ defaultsideoverlap *poly active allm4 metal4 6
+
+#metal4->locali
+ defaultoverlap allm4 metal4 allli locali 12
+ defaultsideoverlap allm4 metal4 allli locali 40
+ defaultsideoverlap allli locali allm4 metal4 10
+
+#metal4->metal1
+ defaultoverlap allm4 metal4 allm1 metal1 15
+ defaultsideoverlap allm4 metal4 allm1 metal1 43
+ defaultsideoverlap allm1 metal1 allm4 metal4 16
+
+#metal4->metal2
+ defaultoverlap allm4 metal4 allm2 metal2 20
+ defaultsideoverlap allm4 metal4 allm2 metal2 46
+ defaultsideoverlap allm2 metal2 allm4 metal4 22
+
+#metal4->metal3
+ defaultoverlap allm4 metal4 allm3 metal3 84
+ defaultsideoverlap allm4 metal4 allm3 metal3 71
+ defaultsideoverlap allm3 metal3 allm4 metal4 43
+
+#metal5
+ defaultsidewall allm5 metal5 127
+# defaultareacap allm5 metal5 well 6
+ areacap allm5/m5 6
+ defaultoverlap allm5 metal5 nwell well 6
+ defaultperimeter allm5 metal5 well 39
+
+#metal5->diff
+ defaultoverlap allm5 metal5 allactivenonfet active 6
+ defaultsideoverlap allm5 metal5 allactivenonfet active 39
+
+#metal5->poly
+ defaultoverlap allm5 metal5 allpolynonres active 7
+ defaultsideoverlap allm5 metal5 allpolynonres active 40
+ defaultsideoverlap *poly active allm5 metal5 6
+
+#metal5->locali
+ defaultoverlap allm5 metal5 allli locali 8
+ defaultsideoverlap allm5 metal5 allli locali 41
+ defaultsideoverlap allli locali allm5 metal5 8
+
+#metal5->metal1
+ defaultoverlap allm5 metal5 allm1 metal1 9
+ defaultsideoverlap allm5 metal5 allm1 metal1 43
+ defaultsideoverlap allm1 metal1 allm5 metal5 12
+
+#metal5->metal2
+ defaultoverlap allm5 metal5 allm2 metal2 11
+ defaultsideoverlap allm5 metal5 allm2 metal2 46
+ defaultsideoverlap allm2 metal2 allm5 metal5 16
+
+#metal5->metal3
+ defaultoverlap allm5 metal5 allm3 metal3 20
+ defaultsideoverlap allm5 metal5 allm3 metal3 54
+ defaultsideoverlap allm3 metal3 allm5 metal5 28
+
+#metal5->metal4
+ defaultoverlap allm5 metal5 allm4 metal4 68
+ defaultsideoverlap allm5 metal5 allm4 metal4 83
+ defaultsideoverlap allm4 metal4 allm5 metal5 47
+
+
+# Devices: Base models (not subcircuit wrappers)
+
+variants (),(si)
+
+ device msubcircuit sky130_fd_pr__pfet_01v8 pfet,scpfet \
+ *pdiff,pdiffres *pdiff,pdiffres nwell error l=l w=w \
+ a1=as p1=ps a2=ad p2=pd
+ device msubcircuit sky130_fd_pr__special_pfet_pass ppu \
+ *pdiff,pdiffres *pdiff,pdiffres nwell error l=l w=w \
+ a1=as p1=ps a2=ad p2=pd
+ device msubcircuit sky130_fd_pr__pfet_01v8_lvt pfetlvt \
+ *pdiff,pdiffres *pdiff,pdiffres nwell error l=l w=w \
+ a1=as p1=ps a2=ad p2=pd
+ device msubcircuit sky130_fd_pr__pfet_01v8_mvt pfetmvt \
+ *pdiff,pdiffres *pdiff,pdiffres nwell error l=l w=w \
+ a1=as p1=ps a2=ad p2=pd
+ device msubcircuit sky130_fd_pr__pfet_01v8_hvt pfethvt,scpfethvt \
+ *pdiff,pdiffres *pdiff,pdiffres nwell error l=l w=w \
+ a1=as p1=ps a2=ad p2=pd
+
+ device msubcircuit sky130_fd_pr__nfet_01v8 nfet,scnfet \
+ *ndiff,ndiffres *ndiff,ndiffres pwell,space/w error l=l w=w \
+ a1=as p1=ps a2=ad p2=pd
+ device msubcircuit sky130_fd_pr__special_nfet_latch npd \
+ *ndiff,ndiffres *ndiff,ndiffres pwell,space/w error l=l w=w \
+ a1=as p1=ps a2=ad p2=pd
+ device msubcircuit sky130_fd_pr__special_nfet_latch npd \
+ *ndiff,ndiffres *srampvar pwell,space/w error l=l w=w \
+ a1=as p1=ps a2=ad p2=pd
+ device msubcircuit sky130_fd_pr__special_nfet_pass npass \
+ *ndiff,ndiffres *ndiff,ndiffres pwell,space/w error l=l w=w \
+ a1=as p1=ps a2=ad p2=pd
+ device msubcircuit sky130_fd_pr__nfet_01v8_lvt nfetlvt \
+ *ndiff,ndiffres *ndiff,ndiffres pwell,space/w error l=l w=w \
+ a1=as p1=ps a2=ad p2=pd
+ device msubcircuit sky130_fd_bs_flash__special_sonosfet_star nsonos \
+ *ndiff,ndiffres *ndiff,ndiffres pwell,space/w error l=l w=w \
+ a1=as p1=ps a2=ad p2=pd
+ device subcircuit sky130_fd_pr__cap_var_lvt varactor \
+ *nndiff nwell error l=l w=w a1=as a2=ad p1=ps p2=pd
+ device subcircuit sky130_fd_pr__cap_var_hvt varhvt \
+ *nndiff nwell error l=l w=w a1=as a2=ad p1=ps p2=pd
+ device subcircuit sky130_fd_pr__cap_var mvvaractor \
+ *mvnndiff nwell error l=l w=w a1=as a2=ad p1=ps p2=pd
+
+ # Bipolars
+ device msubcircuit sky130_fd_pr__npn_05v5_W1p00L1p00 npn *ndiff dnwell space/w \
+ error +npn1p00
+ device msubcircuit sky130_fd_pr__npn_05v5_W1p00L2p00 npn *ndiff dnwell space/w \
+ error +npn2p00
+ device msubcircuit sky130_fd_pr__npn_05v5 npn *ndiff dnwell space/w error a2=area
+ device msubcircuit sky130_fd_pr__pnp_05v5_W0p68L0p68 pnp *pdiff \
+ pwell,space/w +pnp0p68
+ device msubcircuit sky130_fd_pr__pnp_05v5_W3p40L3p40 pnp *pdiff \
+ pwell,space/w +pnp3p40
+ device msubcircuit sky130_fd_pr__pnp_05v5 pnp *pdiff pwell,space/w a2=area
+ device msubcircuit sky130_fd_pr__npn_11v0_W1p00L1p00 npn *mvndiff \
+ dnwell space/w error +npn11p0
+ device msubcircuit sky130_fd_pr__npn_11v0 npn *mvndiff dnwell space/w error a2=area
+
+ # Ignore the extended-drain FET geometry that forms part of the high-voltage
+ # bipolar devices.
+ device msubcircuit Ignore mvnfet *mvndiff,mvndiffres dnwell pwell,space/w error +npn,pnp
+ device msubcircuit Ignore mvpfet *mvpdiff,mvpdiffres pwell,space/w nwell error +npn,pnp
+
+ # Extended drain devices (must appear before the regular devices)
+ device msubcircuit sky130_fd_pr__nfet_20v0_nvt mvnnfet *mvndiff,mvndiffres \
+ dnwell pwell,space/w error l=l w=w a1=as a2=ad p1=ps p2=pd
+ device msubcircuit sky130_fd_pr__nfet_20v0 mvnfet *mvndiff,mvndiffres \
+ dnwell pwell,space/w error l=l w=w a1=as a2=ad p1=ps p2=pd
+ device msubcircuit sky130_fd_pr__pfet_20v0 mvpfet *mvpdiff,mvpdiffres \
+ pwell,space/w nwell error l=l w=w a1=as a2=ad p1=ps p2=pd
+
+ device msubcircuit sky130_fd_pr__pfet_g5v0d10v5 mvpfet \
+ *mvpdiff,mvpdiffres *mvpdiff,mvpdiffres nwell error l=l w=w \
+ a1=as p1=ps a2=ad p2=pd
+ device msubcircuit sky130_fd_pr__nfet_g5v0d10v5 mvnfet \
+ *mvndiff,mvndiffres *mvndiff,mvndiffres pwell,space/w error l=l w=w \
+ a1=as p1=ps a2=ad p2=pd
+ device msubcircuit sky130_fd_pr__nfet_05v0_nvt mvnnfet \
+ *mvndiff,mvndiffres *mvndiff,mvndiffres pwell,space/w error l=l w=w \
+ a1=as p1=ps a2=ad p2=pd
+ device msubcircuit sky130_fd_pr__nfet_03v3_nvt nnfet \
+ *mvndiff,mvndiffres *mvndiff,mvndiffres pwell,space/w error l=l w=w \
+ a1=as p1=ps a2=ad p2=pd
+ device msubcircuit sky130_fd_pr__esd_nfet_g5v0d10v5 mvnfetesd \
+ *mvndiff,mvndiffres *mvndiff,mvndiffres pwell,space/w error l=l w=w \
+ a1=as p1=ps a2=ad p2=pd
+ device msubcircuit sky130_fd_pr__esd_pfet_g5v0d10v5 mvpfetesd \
+ *mvpdiff,mvpdiffres *mvpdiff,mvpdiffres nwell error l=l w=w \
+ a1=as p1=ps a2=ad p2=pd
+
+ device resistor sky130_fd_pr__res_generic_l1 rli1 *li,coreli
+ device resistor sky130_fd_pr__res_generic_m1 rmetal1 *metal1
+ device resistor sky130_fd_pr__res_generic_m2 rmetal2 *metal2
+ device resistor sky130_fd_pr__res_generic_m3 rmetal3 *metal3
+ device resistor sky130_fd_pr__res_generic_m4 rm4 *m4
+ device resistor sky130_fd_pr__res_generic_m5 rm5 *m5
+
+ device rsubcircuit sky130_fd_pr__res_high_po_0p35 xhrpoly \
+ xpc pwell,space/w error +res0p35 l=l
+ device rsubcircuit sky130_fd_pr__res_high_po_0p69 xhrpoly \
+ xpc pwell,space/w error +res0p69 l=l
+ device rsubcircuit sky130_fd_pr__res_high_po_1p41 xhrpoly \
+ xpc pwell,space/w error +res1p41 l=l
+ device rsubcircuit sky130_fd_pr__res_high_po_2p85 xhrpoly \
+ xpc pwell,space/w error +res2p85 l=l
+ device rsubcircuit sky130_fd_pr__res_high_po_5p73 xhrpoly \
+ xpc pwell,space/w error +res5p73 l=l
+ device rsubcircuit sky130_fd_pr__res_high_po xhrpoly \
+ xpc pwell,space/w error l=l w=w
+ device rsubcircuit sky130_fd_pr__res_xhigh_po_0p35 uhrpoly \
+ xpc pwell,space/w error +res0p35 l=l
+ device rsubcircuit sky130_fd_pr__res_xhigh_po_0p69 uhrpoly \
+ xpc pwell,space/w error +res0p69 l=l
+ device rsubcircuit sky130_fd_pr__res_xhigh_po_1p41 uhrpoly \
+ xpc pwell,space/w error +res1p41 l=l
+ device rsubcircuit sky130_fd_pr__res_xhigh_po_2p85 uhrpoly \
+ xpc pwell,space/w error +res2p85 l=l
+ device rsubcircuit sky130_fd_pr__res_xhigh_po_5p73 uhrpoly \
+ xpc pwell,space/w error +res5p73 l=l
+ device rsubcircuit sky130_fd_pr__res_xhigh_po uhrpoly \
+ xpc pwell,space/w error l=l w=w
+
+ device rsubcircuit sky130_fd_pr__res_generic_nd ndiffres \
+ *ndiff pwell,space/w error l=l w=w
+ device rsubcircuit sky130_fd_pr__res_generic_pd pdiffres \
+ *pdiff nwell error l=l w=w
+ device rsubcircuit sky130_fd_pr__res_iso_pw rpw \
+ pwell dnwell error l=l w=w
+ device rsubcircuit sky130_fd_pr__res_generic_nd__hv mvndiffres \
+ *mvndiff pwell,space/w error l=l w=w
+ device rsubcircuit sky130_fd_pr__res_generic_pd__hv mvpdiffres \
+ *mvpdiff nwell error l=l w=w
+
+ device resistor sky130_fd_pr__res_generic_po rmp *poly
+ device resistor sky130_fd_pr__res_generic_po mrp1 *poly
+
+ device pdiode sky130_fd_pr__diode_pd2nw_05v5 *pdiode nwell a=area p=pj
+ device pdiode sky130_fd_pr__diode_pd2nw_05v5_lvt *pdiodelvt nwell a=area p=pj
+ device pdiode sky130_fd_pr__diode_pd2nw_05v5_hvt *pdiodehvt nwell a=area p=pj
+ device pdiode sky130_fd_pr__diode_pd2nw_11v0 *mvpdiode nwell a=area p=pj
+
+ device ndiode sky130_fd_pr__diode_pw2nd_05v5 *ndiode pwell,space/w a=area p=pj
+ device ndiode sky130_fd_pr__diode_pw2nd_05v5_lvt *ndiodelvt pwell,space/w a=area p=pj
+ device ndiode sky130_fd_pr__diode_pw2nd_05v5_nvt *nndiode pwell,space/w a=area p=pj
+ device ndiode sky130_fd_pr__diode_pw2nd_11v0 *mvndiode pwell,space/w a=area p=pj
+
+ device csubcircuit sky130_fd_pr__cap_mim_m3_1 *mimcap *m3 w=w l=l
+ device csubcircuit sky130_fd_pr__cap_mim_m3_2 *mimcap2 *m4 w=w l=l
+
+ variants (orig)
+
+ device mosfet sky130_fd_pr__pfet_01v8 scpfet,pfet pdiff,pdiffres,pdc nwell
+ device mosfet sky130_fd_pr__special_pfet_pass ppu pdiff,pdiffres,pdc nwell
+ device mosfet sky130_fd_pr__pfet_01v8_lvt pfetlvt pdiff,pdiffres,pdc nwell
+ device mosfet sky130_fd_pr__pfet_01v8_mvt pfetmvt pdiff,pdiffres,pdc nwell
+ device mosfet sky130_fd_pr__pfet_01v8_hvt scpfethvt,pfethvt pdiff,pdiffres,pdc nwell
+ device mosfet sky130_fd_pr__nfet_01v8 scnfet,nfet ndiff,ndiffres,ndc pwell,space/w
+ device mosfet sky130_fd_pr__special_nfet_pass npass ndiff,ndiffres,ndc pwell,space/w
+ device mosfet sky130_fd_pr__special_nfet_latch npd ndiff,ndiffres,ndc pwell,space/w
+ device mosfet sky130_fd_pr__special_nfet_latch npd ndiff,ndiffres,ndc pwell,space/w
+ device mosfet sky130_fd_pr__nfet_01v8_lvt nfetlvt ndiff,ndiffres,ndc pwell,space/w
+ device mosfet sky130_fd_bs_flash__special_sonosfet_star nsonos ndiff,ndiffres,ndc \
+ pwell,space/w
+
+ # Note that corenvar, corepvar are not considered devices, and extract as
+ # parasitic capacitance instead (but cap values need to be added).
+
+ # Extended drain devices (must appear before the regular devices)
+ device mosfet sky130_fd_pr__nfet_20v0_nvt mvnnfet *mvndiff,mvndiffres \
+ dnwell pwell,space/w error
+ device mosfet sky130_fd_pr__nfet_20v0 mvnfet *mvndiff,mvndiffres \
+ dnwell pwell,space/w error
+ device mosfet sky130_fd_pr__pfet_20v0 mvpfet *mvpdiff,mvpdiffres \
+ pwell,space/w nwell error
+
+ device mosfet sky130_fd_pr__pfet_g5v0d10v5 mvpfet mvpdiff,mvpdiffres,mvpdc nwell
+ device mosfet sky130_fd_pr__esd_pfet_g5v0d10v5 mvpfetesd mvpdiff,mvpdiffres,mvpdc nwell
+ device mosfet sky130_fd_pr__nfet_g5v0d10v5 mvnfet mvndiff,mvndiffres,mvndc pwell,space/w
+ device mosfet sky130_fd_pr__esd_nfet_g5v0d10v5 mvnfetesd mvndiff,mvndiffres,mvndc pwell,space/w
+ device mosfet sky130_fd_pr__nfet_05v0_nvt mvnnfet *mvndiff,mvndiffres pwell,space/w
+ device mosfet sky130_fd_pr__nfet_03v3_nvt nnfet *mvndiff,mvndiffres pwell,space/w
+
+ # These devices always extract as subcircuits
+ device subcircuit sky130_fd_pr__cap_var_lvt varactor *nndiff nwell error l=l w=w
+ device subcircuit sky130_fd_pr__cap_var_hvt varhvt *nndiff nwell error l=l w=w
+ device subcircuit sky130_fd_pr__cap_var mvvaractor *mvnndiff nwell error l=l w=w
+
+ device resistor sky130_fd_pr__res_generic_po rmp *poly
+ device resistor sky130_fd_pr__res_generic_l1 rli1 *li,coreli
+ device resistor sky130_fd_pr__res_generic_m1 rmetal1 *metal1
+ device resistor sky130_fd_pr__res_generic_m2 rmetal2 *metal2
+ device resistor sky130_fd_pr__res_generic_m3 rmetal3 *metal3
+ device resistor sky130_fd_pr__res_generic_m4 rm4 *m4
+ device resistor sky130_fd_pr__res_generic_m5 rm5 *m5
+
+ device resistor sky130_fd_pr__res_high_po_0p35 xhrpoly xpc +res0p35
+ device resistor sky130_fd_pr__res_high_po_0p69 xhrpoly xpc +res0p69
+ device resistor sky130_fd_pr__res_high_po_1p41 xhrpoly xpc +res1p41
+ device resistor sky130_fd_pr__res_high_po_2p85 xhrpoly xpc +res2p85
+ device resistor sky130_fd_pr__res_high_po_5p73 xhrpoly xpc +res5p73
+ device resistor sky130_fd_pr__res_high_po xhrpoly xpc
+ device resistor sky130_fd_pr__res_xhigh_po_0p35 uhrpoly xpc +res0p35
+ device resistor sky130_fd_pr__res_xhigh_po_0p69 uhrpoly xpc +res0p69
+ device resistor sky130_fd_pr__res_xhigh_po_1p41 uhrpoly xpc +res1p41
+ device resistor sky130_fd_pr__res_xhigh_po_2p85 uhrpoly xpc +res2p85
+ device resistor sky130_fd_pr__res_xhigh_po_5p73 uhrpoly xpc +res5p73
+ device resistor sky130_fd_pr__res_xhigh_po uhrpoly xpc
+ device resistor sky130_fd_pr__res_generic_po mrp1 *poly
+ device resistor sky130_fd_pr__res_generic_nd ndiffres *ndiff
+ device resistor sky130_fd_pr__res_generic_pd pdiffres *pdiff
+ device resistor mrdn_hv mvndiffres *mvndiff
+ device resistor mrdp_hv mvpdiffres *mvpdiff
+ device resistor sky130_fd_pr__res_iso_pw rpw pwell
+
+ device ndiode sky130_fd_pr__diode_pw2nd_05v5 *ndiode pwell,space/w a=area
+ device ndiode sky130_fd_pr__diode_pw2nd_05v5_lvt *ndiodelvt pwell,space/w a=area
+ device ndiode sky130_fd_pr__diode_pw2nd_05v5_nvt *nndiode pwell,space/w a=area
+ device ndiode sky130_fd_pr__diode_pw2nd_11v0 *mvndiode pwell,space/w a=area
+
+ device pdiode sky130_fd_pr__diode_pd2nw_05v5 *pdiode nwell a=area
+ device pdiode sky130_fd_pr__diode_pd2nw_05v5_lvt *pdiodelvt nwell a=area
+ device pdiode sky130_fd_pr__diode_pd2nw_05v5_hvt *pdiodehvt nwell a=area
+ device pdiode sky130_fd_pr__diode_pd2nw_11v0 *mvpdiode nwell a=area
+
+ device bjt sky130_fd_pr__npn_05v5_W1p00L1p00 npn *ndiff dnwell space/w error +npn1p00
+ device bjt sky130_fd_pr__npn_05v5_W1p00L2p00 npn *ndiff dnwell space/w error +npn2p00
+ device bjt sky130_fd_pr__npn_05v5 npn *ndiff dnwell space/w error a2=area
+ device bjt sky130_fd_pr__pnp_05v5_W0p68L0p68 pnp *pdiff pwell,space/w +pnp0p68
+ device bjt sky130_fd_pr__pnp_05v5_W3p40L3p40 pnp *pdiff pwell,space/w +pnp3p40
+ device bjt sky130_fd_pr__pnp_05v5 pnp *pdiff pwell,space/w a2=area
+ device bjt sky130_fd_pr__npn_11v0_W1p00L1p00 npn *mvndiff dnwell space/w error +npn11p0
+ device bjt sky130_fd_pr__npn_11v0 npn *mvndiff dnwell space/w error a2=area
+
+ device capacitor sky130_fd_pr__cap_mim_m3_1 *mimcap *m3 1
+ device capacitor sky130_fd_pr__cap_mim_m3_2 *mimcap2 *m4 1
+
+end
+
+#-----------------------------------------------------
+# Wiring tool definitions
+#-----------------------------------------------------
+
+wiring
+ # All wiring values are in nanometers
+ scalefactor 10
+
+ contact mcon 170 li 0 0 m1 30 60
+ contact v1 260 m1 0 30 m2 0 30
+ contact v2 280 m2 0 45 m3 25 0
+ contact v3 320 m3 0 30 m4 5 5
+ contact v4 1180 m4 0 m5 120
+
+ contact pc 170 poly 50 80 li 0 80
+ contact pdc 170 pdiff 40 60 li 0 80
+ contact ndc 170 ndiff 40 60 li 0 80
+ contact psc 170 psd 40 60 li 0 80
+ contact nsc 170 nsd 40 60 li 0 80
+
+end
+
+#-----------------------------------------------------
+# Plain old router. . .
+#-----------------------------------------------------
+
+router
+end
+
+#------------------------------------------------------------
+# Plowing (restored in magic 8.2, need to fill this section)
+#------------------------------------------------------------
+
+plowing
+end
+
+#-----------------------------------------------------------------
+# No special plot layers defined (use default PNM color choices)
+#-----------------------------------------------------------------
+
+plot
+ style pnm
+ default
+ draw fillblock no_color_at_all
+ draw fillblock4 no_color_at_all
+ draw fomfill no_color_at_all
+ draw polyfill no_color_at_all
+ draw m1fill no_color_at_all
+ draw m2fill no_color_at_all
+ draw m3fill no_color_at_all
+ draw m4fill no_color_at_all
+ draw m5fill no_color_at_all
+ draw nwell cwell
+end
+
