dependencies/pdks/volare/sky130/versions/41c0908b47130d5675ff8484255b43f66463a7d6/sky130B/libs.tech/openlane/rules.openrcx.sky130B.min.magic

Extraction Rules for OpenRCX

DIAGMODEL ON

LayerCount 6
DensityRate 1  0

DensityModel 0

Metal 1 RESOVER
WIDTH Table 1 entries:  0.17

Metal 1 RESOVER 0
DIST count 55 width 0.17
0 0 0 0.0623886
0 0.29 0 0.0623886
0 0.46 0 0.0623886
0 0.665 0 0.0623886
0 0.75 0 0.0623886
0 0.92 0 0.0623886
0 1.125 0 0.0623886
0 1.21 0 0.0623886
0 1.38 0 0.0623886
0 1.84 0 0.0623886
0.29 0.29 0 0.0623886
0.29 0.46 0 0.0623886
0.29 0.665 0 0.0623886
0.29 0.75 0 0.0623886
0.29 0.92 0 0.0623886
0.29 1.125 0 0.0623886
0.29 1.21 0 0.0623886
0.29 1.38 0 0.0623886
0.29 1.84 0 0.0623886
0.46 0.46 0 0.0623886
0.46 0.665 0 0.0623886
0.46 0.75 0 0.0623886
0.46 0.92 0 0.0623886
0.46 1.125 0 0.0623886
0.46 1.21 0 0.0623886
0.46 1.38 0 0.0623886
0.46 1.84 0 0.0623886
0.665 0.665 0 0.0623886
0.665 0.75 0 0.0623886
0.665 0.92 0 0.0623886
0.665 1.125 0 0.0623886
0.665 1.21 0 0.0623886
0.665 1.38 0 0.0623886
0.665 1.84 0 0.0623886
0.75 0.75 0 0.0623886
0.75 0.92 0 0.0623886
0.75 1.125 0 0.0623886
0.75 1.21 0 0.0623886
0.75 1.38 0 0.0623886
0.75 1.84 0 0.0623886
0.92 0.92 0 0.0623886
0.92 1.125 0 0.0623886
0.92 1.21 0 0.0623886
0.92 1.38 0 0.0623886
0.92 1.84 0 0.0623886
1.125 1.125 0 0.0623886
1.125 1.21 0 0.0623886
1.125 1.38 0 0.0623886
1.125 1.84 0 0.0623886
1.21 1.21 0 0.0623886
1.21 1.38 0 0.0623886
1.21 1.84 0 0.0623886
1.38 1.38 0 0.0623886
1.38 1.84 0 0.0623886
1.84 0 1.84 0.0623886
END DIST

Metal 1 OVER
WIDTH Table 1 entries:  0.17

Metal 1 OVER 0
DIST count 12 width 0.17
0.17 0.000825434 5.70214e-06 0.0311943
0.34 0.000463147 6.8989e-06 0.0311943
0.425 0.000384876 7.49569e-06 0.0311943
0.51 0.000330599 8.09118e-06 0.0311943
0.595 0.000290467 8.68523e-06 0.0311943
0.68 0.000259442 9.27766e-06 0.0311943
0.765 0.00023466 9.8683e-06 0.0311943
0.85 0.000214361 1.0457e-05 0.0311943
1.02 0.000183004 1.16279e-05 0.0311943
1.36 0.000141971 1.39391e-05 0.0311943
1.7 0.000116163 1.62011e-05 0.0311943
2.04 0 0.000116775 0.0311943
END DIST

Metal 1 UNDER
WIDTH Table 1 entries:  0.17

Metal 1 UNDER 2
DIST count 12 width 0.17
0.17 0.000825434 7.978e-05 0.0311943
0.34 0.000463147 8.31062e-05 0.0311943
0.425 0.000384876 8.47665e-05 0.0311943
0.51 0.000330599 8.64225e-05 0.0311943
0.595 0.000290467 8.80738e-05 0.0311943
0.68 0.000259442 8.972e-05 0.0311943
0.765 0.00023466 9.13633e-05 0.0311943
0.85 0.000214361 9.2999e-05 0.0311943
1.02 0.000183004 9.62547e-05 0.0311943
1.36 0.000141971 0.000102682 0.0311943
1.7 0.000116163 0.00010897 0.0311943
2.04 0 0.000213465 0.0311943
END DIST

Metal 1 UNDER 3
DIST count 12 width 0.17
0.17 0.000825434 4.63867e-05 0.0311943
0.34 0.000463147 4.86201e-05 0.0311943
0.425 0.000384876 4.97357e-05 0.0311943
0.51 0.000330599 5.08474e-05 0.0311943
0.595 0.000290467 5.19571e-05 0.0311943
0.68 0.000259442 5.30623e-05 0.0311943
0.765 0.00023466 5.41653e-05 0.0311943
0.85 0.000214361 5.52656e-05 0.0311943
1.02 0.000183004 5.74529e-05 0.0311943
1.36 0.000141971 6.17678e-05 0.0311943
1.7 0.000116163 6.5992e-05 0.0311943
2.04 0 0.000168477 0.0311943
END DIST

Metal 1 UNDER 4
DIST count 12 width 0.17
0.17 0.000825434 2.90674e-05 0.0311943
0.34 0.000463147 3.10799e-05 0.0311943
0.425 0.000384876 3.20835e-05 0.0311943
0.51 0.000330599 3.30846e-05 0.0311943
0.595 0.000290467 3.40829e-05 0.0311943
0.68 0.000259442 3.50791e-05 0.0311943
0.765 0.00023466 3.60729e-05 0.0311943
0.85 0.000214361 3.70623e-05 0.0311943
1.02 0.000183004 3.90308e-05 0.0311943
1.36 0.000141971 4.2917e-05 0.0311943
1.7 0.000116163 4.67193e-05 0.0311943
2.04 0 0.000148794 0.0311943
END DIST

Metal 1 UNDER 5
DIST count 12 width 0.17
0.17 0.000825434 2.59531e-05 0.0311943
0.34 0.000463147 2.77331e-05 0.0311943
0.425 0.000384876 2.86211e-05 0.0311943
0.51 0.000330599 2.95067e-05 0.0311943
0.595 0.000290467 3.03905e-05 0.0311943
0.68 0.000259442 3.12713e-05 0.0311943
0.765 0.00023466 3.21501e-05 0.0311943
0.85 0.000214361 3.30254e-05 0.0311943
1.02 0.000183004 3.47675e-05 0.0311943
1.36 0.000141971 3.82049e-05 0.0311943
1.7 0.000116163 4.15693e-05 0.0311943
2.04 0 0.000143217 0.0311943
END DIST

Metal 1 UNDER 6
DIST count 12 width 0.17
0.17 0.000825434 1.15771e-05 0.0311943
0.34 0.000463147 1.32574e-05 0.0311943
0.425 0.000384876 1.40955e-05 0.0311943
0.51 0.000330599 1.49314e-05 0.0311943
0.595 0.000290467 1.57656e-05 0.0311943
0.68 0.000259442 1.65974e-05 0.0311943
0.765 0.00023466 1.74267e-05 0.0311943
0.85 0.000214361 1.82533e-05 0.0311943
1.02 0.000183004 1.98973e-05 0.0311943
1.36 0.000141971 2.31423e-05 0.0311943
1.7 0.000116163 2.63183e-05 0.0311943
2.04 0 0.000127782 0.0311943
END DIST

Metal 1 DIAGUNDER
WIDTH Table 1 entries:  0.17

Metal 1 DIAGUNDER 2
DIST count 13 width 0.17
0 0 0.00012621 0.0311943
0.17 0 0 0.0311943
0.34 0 0 0.0311943
0.425 0 0 0.0311943
0.51 0 0 0.0311943
0.595 0 0 0.0311943
0.68 0 0 0.0311943
0.765 0 0 0.0311943
0.85 0 0 0.0311943
1.02 0 0 0.0311943
1.36 0 0 0.0311943
1.7 0 0 0.0311943
2.04 0 0 0.0311943
END DIST

Metal 1 DIAGUNDER 3
DIST count 13 width 0.17
0 0 7.06482e-05 0.0311943
0.17 0 0 0.0311943
0.34 0 0 0.0311943
0.425 0 0 0.0311943
0.51 0 0 0.0311943
0.595 0 0 0.0311943
0.68 0 0 0.0311943
0.765 0 0 0.0311943
0.85 0 0 0.0311943
1.02 0 0 0.0311943
1.36 0 0 0.0311943
1.7 0 0 0.0311943
2.04 0 0 0.0311943
END DIST

Metal 1 DIAGUNDER 4
DIST count 13 width 0.17
0 0 2.77316e-05 0.0311943
0.17 0 0 0.0311943
0.34 0 0 0.0311943
0.425 0 0 0.0311943
0.51 0 0 0.0311943
0.595 0 0 0.0311943
0.68 0 0 0.0311943
0.765 0 0 0.0311943
0.85 0 0 0.0311943
1.02 0 0 0.0311943
1.36 0 0 0.0311943
1.7 0 0 0.0311943
2.04 0 0 0.0311943
END DIST

Metal 1 DIAGUNDER 5
DIST count 13 width 0.17
0 0 1.94802e-05 0.0311943
0.17 0 0 0.0311943
0.34 0 0 0.0311943
0.425 0 0 0.0311943
0.51 0 0 0.0311943
0.595 0 0 0.0311943
0.68 0 0 0.0311943
0.765 0 0 0.0311943
0.85 0 0 0.0311943
1.02 0 0 0.0311943
1.36 0 0 0.0311943
1.7 0 0 0.0311943
2.04 0 0 0.0311943
END DIST

Metal 1 DIAGUNDER 6
DIST count 0 width 0.17
END DIST

Metal 2 RESOVER
WIDTH Table 1 entries:  0.14

Metal 2 RESOVER 0
DIST count 55 width 0.14
0 0 0 0.000757576
0 0.2 0 0.000757576
0 0.34 0 0.000757576
0 0.47 0 0.000757576
0 0.54 0 0.000757576
0 0.68 0 0.000757576
0 0.81 0 0.000757576
0 0.88 0 0.000757576
0 1.02 0 0.000757576
0 1.36 0 0.000757576
0.2 0.2 0 0.000757576
0.2 0.34 0 0.000757576
0.2 0.47 0 0.000757576
0.2 0.54 0 0.000757576
0.2 0.68 0 0.000757576
0.2 0.81 0 0.000757576
0.2 0.88 0 0.000757576
0.2 1.02 0 0.000757576
0.2 1.36 0 0.000757576
0.34 0.34 0 0.000757576
0.34 0.47 0 0.000757576
0.34 0.54 0 0.000757576
0.34 0.68 0 0.000757576
0.34 0.81 0 0.000757576
0.34 0.88 0 0.000757576
0.34 1.02 0 0.000757576
0.34 1.36 0 0.000757576
0.47 0.47 0 0.000757576
0.47 0.54 0 0.000757576
0.47 0.68 0 0.000757576
0.47 0.81 0 0.000757576
0.47 0.88 0 0.000757576
0.47 1.02 0 0.000757576
0.47 1.36 0 0.000757576
0.54 0.54 0 0.000757576
0.54 0.68 0 0.000757576
0.54 0.81 0 0.000757576
0.54 0.88 0 0.000757576
0.54 1.02 0 0.000757576
0.54 1.36 0 0.000757576
0.68 0.68 0 0.000757576
0.68 0.81 0 0.000757576
0.68 0.88 0 0.000757576
0.68 1.02 0 0.000757576
0.68 1.36 0 0.000757576
0.81 0.81 0 0.000757576
0.81 0.88 0 0.000757576
0.81 1.02 0 0.000757576
0.81 1.36 0 0.000757576
0.88 0.88 0 0.000757576
0.88 1.02 0 0.000757576
0.88 1.36 0 0.000757576
1.02 1.02 0 0.000757576
1.02 1.36 0 0.000757576
1.36 0 1.36 0.000757576
END DIST

Metal 2 RESOVER 1
DIST count 0 width 0.14
END DIST

Metal 2 OVER
WIDTH Table 1 entries:  0.14

Metal 2 OVER 0
DIST count 12 width 0.14
0.14 0.00135131 3.88929e-06 0.000378788
0.28 0.000759322 4.84163e-06 0.000378788
0.35 0.000630737 5.31699e-06 0.000378788
0.42 0.000541443 5.79167e-06 0.000378788
0.49 0.000475371 6.26558e-06 0.000378788
0.56 0.000424283 6.73867e-06 0.000378788
0.63 0.000383478 7.21082e-06 0.000378788
0.7 0.000350067 7.68193e-06 0.000378788
0.84 0.000298485 8.62071e-06 0.000378788
1.12 0.00023109 1.04821e-05 0.000378788
1.4 0.000188793 1.23171e-05 0.000378788
1.68 0 0.000173809 0.000378788
END DIST

Metal 2 OVER 1
DIST count 12 width 0.14
0.14 0.00135131 4.01959e-05 0.000378788
0.28 0.000759322 4.36983e-05 0.000378788
0.35 0.000630737 4.54475e-05 0.000378788
0.42 0.000541443 4.71935e-05 0.000378788
0.49 0.000475371 4.89363e-05 0.000378788
0.56 0.000424283 5.06757e-05 0.000378788
0.63 0.000383478 5.24118e-05 0.000378788
0.7 0.000350067 5.41445e-05 0.000378788
0.84 0.000298485 5.75978e-05 0.000378788
1.12 0.00023109 6.4444e-05 0.000378788
1.4 0.000188793 7.11934e-05 0.000378788
1.68 0 0.000237514 0.000378788
END DIST

Metal 2 UNDER
WIDTH Table 1 entries:  0.14

Metal 2 UNDER 3
DIST count 12 width 0.14
0.14 0.00135131 3.62921e-05 0.000378788
0.28 0.000759322 3.83945e-05 0.000378788
0.35 0.000630737 3.94436e-05 0.000378788
0.42 0.000541443 4.04897e-05 0.000378788
0.49 0.000475371 4.15365e-05 0.000378788
0.56 0.000424283 4.25799e-05 0.000378788
0.63 0.000383478 4.3622e-05 0.000378788
0.7 0.000350067 4.46624e-05 0.000378788
0.84 0.000298485 4.6734e-05 0.000378788
1.12 0.00023109 5.08425e-05 0.000378788
1.4 0.000188793 5.48908e-05 0.000378788
1.68 0 0.00021856 0.000378788
END DIST

Metal 2 UNDER 4
DIST count 12 width 0.14
0.14 0.00135131 2.40596e-05 0.000378788
0.28 0.000759322 2.60868e-05 0.000378788
0.35 0.000630737 2.70982e-05 0.000378788
0.42 0.000541443 2.81086e-05 0.000378788
0.49 0.000475371 2.91171e-05 0.000378788
0.56 0.000424283 3.01241e-05 0.000378788
0.63 0.000383478 3.11282e-05 0.000378788
0.7 0.000350067 3.21312e-05 0.000378788
0.84 0.000298485 3.41289e-05 0.000378788
1.12 0.00023109 3.80897e-05 0.000378788
1.4 0.000188793 4.19953e-05 0.000378788
1.68 0 0.000205521 0.000378788
END DIST

Metal 2 UNDER 5
DIST count 12 width 0.14
0.14 0.00135131 2.0572e-05 0.000378788
0.28 0.000759322 2.22779e-05 0.000378788
0.35 0.000630737 2.31288e-05 0.000378788
0.42 0.000541443 2.39795e-05 0.000378788
0.49 0.000475371 2.48285e-05 0.000378788
0.56 0.000424283 2.56755e-05 0.000378788
0.63 0.000383478 2.65211e-05 0.000378788
0.7 0.000350067 2.73653e-05 0.000378788
0.84 0.000298485 2.90471e-05 0.000378788
1.12 0.00023109 3.23809e-05 0.000378788
1.4 0.000188793 3.56679e-05 0.000378788
1.68 0 0.000198586 0.000378788
END DIST

Metal 2 UNDER 6
DIST count 12 width 0.14
0.14 0.00135131 9.47009e-06 0.000378788
0.28 0.000759322 1.10607e-05 0.000378788
0.35 0.000630737 1.18547e-05 0.000378788
0.42 0.000541443 1.26474e-05 0.000378788
0.49 0.000475371 1.3439e-05 0.000378788
0.56 0.000424283 1.42291e-05 0.000378788
0.63 0.000383478 1.50176e-05 0.000378788
0.7 0.000350067 1.58043e-05 0.000378788
0.84 0.000298485 1.73723e-05 0.000378788
1.12 0.00023109 2.04812e-05 0.000378788
1.4 0.000188793 2.35458e-05 0.000378788
1.68 0 0.000186246 0.000378788
END DIST

Metal 2 DIAGUNDER
WIDTH Table 1 entries:  0.14

Metal 2 DIAGUNDER 3
DIST count 13 width 0.14
0 0 1.91892e-05 0.000378788
0.14 0 2.00931e-05 0.000378788
0.28 0 1.98063e-05 0.000378788
0.35 0 1.96206e-05 0.000378788
0.42 0 1.94383e-05 0.000378788
0.49 0 1.92594e-05 0.000378788
0.56 0 1.90837e-05 0.000378788
0.63 0 1.89113e-05 0.000378788
0.7 0 1.86595e-05 0.000378788
0.84 0 9.24654e-06 0.000378788
1.12 0 0 0.000378788
1.4 0 0 0.000378788
1.68 0 0 0.000378788
END DIST

Metal 2 DIAGUNDER 4
DIST count 13 width 0.14
0 0 5.31413e-05 0.000378788
0.14 0 1.92479e-05 0.000378788
0.28 0 1.89848e-05 0.000378788
0.35 0 1.88141e-05 0.000378788
0.42 0 1.86464e-05 0.000378788
0.49 0 1.84817e-05 0.000378788
0.56 0 9.20007e-06 0.000378788
0.63 0 0 0.000378788
0.7 0 0 0.000378788
0.84 0 0 0.000378788
1.12 0 0 0.000378788
1.4 0 0 0.000378788
1.68 0 0 0.000378788
END DIST

Metal 2 DIAGUNDER 5
DIST count 13 width 0.14
0 0 3.93804e-05 0.000378788
0.14 0 1.92479e-05 0.000378788
0.28 0 1.89848e-05 0.000378788
0.35 0 1.88141e-05 0.000378788
0.42 0 1.86464e-05 0.000378788
0.49 0 1.84817e-05 0.000378788
0.56 0 9.20007e-06 0.000378788
0.63 0 0 0.000378788
0.7 0 0 0.000378788
0.84 0 0 0.000378788
1.12 0 0 0.000378788
1.4 0 0 0.000378788
1.68 0 0 0.000378788
END DIST

Metal 2 DIAGUNDER 6
DIST count 13 width 0.14
0 0 2.26947e-05 0.000378788
0.14 0 0 0.000378788
0.28 0 0 0.000378788
0.35 0 0 0.000378788
0.42 0 0 0.000378788
0.49 0 0 0.000378788
0.56 0 0 0.000378788
0.63 0 0 0.000378788
0.7 0 0 0.000378788
0.84 0 0 0.000378788
1.12 0 0 0.000378788
1.4 0 0 0.000378788
1.68 0 0 0.000378788
END DIST

Metal 2 OVERUNDER
WIDTH Table 1 entries:  0.14

Metal 2 OVER 1 UNDER 3
DIST count 12 width 0.14
0.14 0.00135142 7.46106e-05 0.000378788
0.28 0.00075933 7.92802e-05 0.000378788
0.35 0.000630737 8.15841e-05 0.000378788
0.42 0.000541443 8.38794e-05 0.000378788
0.49 0.000475394 8.61641e-05 0.000378788
0.56 0.000424352 8.84342e-05 0.000378788
0.63 0.000383578 9.07065e-05 0.000378788
0.7 0.00035012 9.30049e-05 0.000378788
0.84 0.000298546 9.75749e-05 0.000378788
1.12 0.000231129 0.00010668 0.000378788
1.4 0.000188793 0.00011566 0.000378788
1.68 0 0.00028416 0.000378788
END DIST

Metal 2 OVER 1 UNDER 4
DIST count 12 width 0.14
0.14 0.00135153 6.23848e-05 0.000378788
0.28 0.000759437 6.69667e-05 0.000378788
0.35 0.000630845 6.92522e-05 0.000378788
0.42 0.000541551 7.15337e-05 0.000378788
0.49 0.000475502 7.381e-05 0.000378788
0.56 0.00042446 7.60816e-05 0.000378788
0.63 0.000383685 7.83482e-05 0.000378788
0.7 0.000350228 8.06148e-05 0.000378788
0.84 0.000298654 8.51268e-05 0.000378788
1.12 0.000231236 9.40734e-05 0.000378788
1.4 0.0001889 0.000102895 0.000378788
1.68 0 0.000271357 0.000378788
END DIST

Metal 2 OVER 1 UNDER 5
DIST count 12 width 0.14
0.14 0.00135153 5.88973e-05 0.000378788
0.28 0.00075943 6.28005e-05 0.000378788
0.35 0.000630845 6.38924e-05 0.000378788
0.42 0.000541551 6.53766e-05 0.000378788
0.49 0.000475479 6.74944e-05 0.000378788
0.56 0.000424391 6.96077e-05 0.000378788
0.63 0.000383585 7.17174e-05 0.000378788
0.7 0.000350174 7.38231e-05 0.000378788
0.84 0.000298592 7.80194e-05 0.000378788
1.12 0.000231198 8.6338e-05 0.000378788
1.4 0.0001889 9.45394e-05 0.000378788
1.68 0 0.000262504 0.000378788
END DIST

Metal 2 OVER 1 UNDER 6
DIST count 12 width 0.14
0.14 0.00135142 4.57659e-05 0.000378788
0.28 0.000759322 4.99174e-05 0.000378788
0.35 0.000630737 5.19851e-05 0.000378788
0.42 0.000541443 5.40492e-05 0.000378788
0.49 0.000475371 5.61097e-05 0.000378788
0.56 0.000424283 5.81661e-05 0.000378788
0.63 0.000383478 6.02186e-05 0.000378788
0.7 0.000350067 6.22669e-05 0.000378788
0.84 0.000298485 6.63494e-05 0.000378788
1.12 0.00023109 7.44431e-05 0.000378788
1.4 0.000188793 8.24221e-05 0.000378788
1.68 0 0.000249951 0.000378788
END DIST

Metal 3 RESOVER
WIDTH Table 1 entries:  0.14

Metal 3 RESOVER 0
DIST count 55 width 0.14
0 0 0 0.000757576
0 0.32 0 0.000757576
0 0.46 0 0.000757576
0 0.71 0 0.000757576
0 0.78 0 0.000757576
0 0.92 0 0.000757576
0 1.17 0 0.000757576
0 1.24 0 0.000757576
0 1.38 0 0.000757576
0 1.84 0 0.000757576
0.32 0.32 0 0.000757576
0.32 0.46 0 0.000757576
0.32 0.71 0 0.000757576
0.32 0.78 0 0.000757576
0.32 0.92 0 0.000757576
0.32 1.17 0 0.000757576
0.32 1.24 0 0.000757576
0.32 1.38 0 0.000757576
0.32 1.84 0 0.000757576
0.46 0.46 0 0.000757576
0.46 0.71 0 0.000757576
0.46 0.78 0 0.000757576
0.46 0.92 0 0.000757576
0.46 1.17 0 0.000757576
0.46 1.24 0 0.000757576
0.46 1.38 0 0.000757576
0.46 1.84 0 0.000757576
0.71 0.71 0 0.000757576
0.71 0.78 0 0.000757576
0.71 0.92 0 0.000757576
0.71 1.17 0 0.000757576
0.71 1.24 0 0.000757576
0.71 1.38 0 0.000757576
0.71 1.84 0 0.000757576
0.78 0.78 0 0.000757576
0.78 0.92 0 0.000757576
0.78 1.17 0 0.000757576
0.78 1.24 0 0.000757576
0.78 1.38 0 0.000757576
0.78 1.84 0 0.000757576
0.92 0.92 0 0.000757576
0.92 1.17 0 0.000757576
0.92 1.24 0 0.000757576
0.92 1.38 0 0.000757576
0.92 1.84 0 0.000757576
1.17 1.17 0 0.000757576
1.17 1.24 0 0.000757576
1.17 1.38 0 0.000757576
1.17 1.84 0 0.000757576
1.24 1.24 0 0.000757576
1.24 1.38 0 0.000757576
1.24 1.84 0 0.000757576
1.38 1.38 0 0.000757576
1.38 1.84 0 0.000757576
1.84 0 1.84 0.000757576
END DIST

Metal 3 RESOVER 1
DIST count 0 width 0.14
END DIST

Metal 3 RESOVER 2
DIST count 0 width 0.14
END DIST

Metal 3 OVER
WIDTH Table 1 entries:  0.14

Metal 3 OVER 0
DIST count 12 width 0.14
0.14 0.00136503 3.21082e-06 0.000378788
0.28 0.000762782 3.98193e-06 0.000378788
0.35 0.000634009 4.3667e-06 0.000378788
0.42 0.000545007 4.7509e-06 0.000378788
0.49 0.000479329 5.13438e-06 0.000378788
0.56 0.000428608 5.51714e-06 0.000378788
0.63 0.000388106 5.89906e-06 0.000378788
0.7 0.000354934 6.28009e-06 0.000378788
0.84 0.000303655 7.03921e-06 0.000378788
1.12 0.000236417 8.54351e-06 0.000378788
1.4 0.000193984 1.00255e-05 0.000378788
1.68 0 0.000176119 0.000378788
END DIST

Metal 3 OVER 1
DIST count 12 width 0.14
0.14 0.00136503 2.00413e-05 0.000378788
0.28 0.000762782 2.22525e-05 0.000378788
0.35 0.000634009 2.3356e-05 0.000378788
0.42 0.000545007 2.44571e-05 0.000378788
0.49 0.000479329 2.5557e-05 0.000378788
0.56 0.000428608 2.66553e-05 0.000378788
0.63 0.000388106 2.77497e-05 0.000378788
0.7 0.000354934 2.88425e-05 0.000378788
0.84 0.000303655 3.10196e-05 0.000378788
1.12 0.000236417 3.53333e-05 0.000378788
1.4 0.000193984 3.9584e-05 0.000378788
1.68 0 0.000208395 0.000378788
END DIST

Metal 3 OVER 2
DIST count 12 width 0.14
0.14 0.00136503 2.81069e-05 0.000378788
0.28 0.000762782 3.00882e-05 0.000378788
0.35 0.000634009 3.10777e-05 0.000378788
0.42 0.000545007 3.20659e-05 0.000378788
0.49 0.000479329 3.30515e-05 0.000378788
0.56 0.000428608 3.40359e-05 0.000378788
0.63 0.000388106 3.50174e-05 0.000378788
0.7 0.000354934 3.59957e-05 0.000378788
0.84 0.000303655 3.79475e-05 0.000378788
1.12 0.000236417 4.18155e-05 0.000378788
1.4 0.000193984 4.56242e-05 0.000378788
1.68 0 0.000214004 0.000378788
END DIST

Metal 3 UNDER
WIDTH Table 1 entries:  0.14

Metal 3 UNDER 4
DIST count 12 width 0.14
0.14 0.00136503 4.32649e-05 0.000378788
0.28 0.000762782 4.63261e-05 0.000378788
0.35 0.000634009 4.7854e-05 0.000378788
0.42 0.000545007 4.93795e-05 0.000378788
0.49 0.000479329 5.09025e-05 0.000378788
0.56 0.000428608 5.24219e-05 0.000378788
0.63 0.000388106 5.39379e-05 0.000378788
0.7 0.000354934 5.54514e-05 0.000378788
0.84 0.000303655 5.84653e-05 0.000378788
1.12 0.000236417 6.44375e-05 0.000378788
1.4 0.000193984 7.03218e-05 0.000378788
1.68 0 0.000240738 0.000378788
END DIST

Metal 3 UNDER 5
DIST count 12 width 0.14
0.14 0.00136503 2.64555e-05 0.000378788
0.28 0.000762782 2.83969e-05 0.000378788
0.35 0.000634009 2.93656e-05 0.000378788
0.42 0.000545007 3.03334e-05 0.000378788
0.49 0.000479329 3.12986e-05 0.000378788
0.56 0.000428608 3.2263e-05 0.000378788
0.63 0.000388106 3.32242e-05 0.000378788
0.7 0.000354934 3.41833e-05 0.000378788
0.84 0.000303655 3.60951e-05 0.000378788
1.12 0.000236417 3.98825e-05 0.000378788
1.4 0.000193984 4.36143e-05 0.000378788
1.68 0 0.000211916 0.000378788
END DIST

Metal 3 UNDER 6
DIST count 12 width 0.14
0.14 0.00136503 1.11369e-05 0.000378788
0.28 0.000762782 1.28029e-05 0.000378788
0.35 0.000634009 1.36342e-05 0.000378788
0.42 0.000545007 1.44643e-05 0.000378788
0.49 0.000479329 1.52929e-05 0.000378788
0.56 0.000428608 1.61197e-05 0.000378788
0.63 0.000388106 1.69449e-05 0.000378788
0.7 0.000354934 1.7768e-05 0.000378788
0.84 0.000303655 1.94081e-05 0.000378788
1.12 0.000236417 2.26583e-05 0.000378788
1.4 0.000193984 2.58603e-05 0.000378788
1.68 0 0.000193643 0.000378788
END DIST

Metal 3 DIAGUNDER
WIDTH Table 1 entries:  0.14

Metal 3 DIAGUNDER 4
DIST count 13 width 0.14
0 0 9.63802e-05 0.000378788
0.14 0 0 0.000378788
0.28 0 0 0.000378788
0.35 0 0 0.000378788
0.42 0 0 0.000378788
0.49 0 0 0.000378788
0.56 0 0 0.000378788
0.63 0 0 0.000378788
0.7 0 0 0.000378788
0.84 0 0 0.000378788
1.12 0 0 0.000378788
1.4 0 0 0.000378788
1.68 0 0 0.000378788
END DIST

Metal 3 DIAGUNDER 5
DIST count 13 width 0.14
0 0 4.58952e-05 0.000378788
0.14 0 0 0.000378788
0.28 0 0 0.000378788
0.35 0 0 0.000378788
0.42 0 0 0.000378788
0.49 0 0 0.000378788
0.56 0 0 0.000378788
0.63 0 0 0.000378788
0.7 0 0 0.000378788
0.84 0 0 0.000378788
1.12 0 0 0.000378788
1.4 0 0 0.000378788
1.68 0 0 0.000378788
END DIST

Metal 3 DIAGUNDER 6
DIST count 13 width 0.14
0 0 3.19672e-05 0.000378788
0.14 0 0 0.000378788
0.28 0 0 0.000378788
0.35 0 0 0.000378788
0.42 0 0 0.000378788
0.49 0 0 0.000378788
0.56 0 0 0.000378788
0.63 0 0 0.000378788
0.7 0 0 0.000378788
0.84 0 0 0.000378788
1.12 0 0 0.000378788
1.4 0 0 0.000378788
1.68 0 0 0.000378788
END DIST

Metal 3 OVERUNDER
WIDTH Table 1 entries:  0.14

Metal 3 OVER 1 UNDER 4
DIST count 12 width 0.14
0.14 0.00136503 6.00954e-05 0.000378788
0.28 0.000762782 6.45966e-05 0.000378788
0.35 0.000634009 6.68433e-05 0.000378788
0.42 0.000545007 6.90856e-05 0.000378788
0.49 0.000479329 7.13251e-05 0.000378788
0.56 0.000428608 7.356e-05 0.000378788
0.63 0.000388106 7.57885e-05 0.000378788
0.7 0.000354934 7.80137e-05 0.000378788
0.84 0.000303655 8.24457e-05 0.000378788
1.12 0.000236417 9.12273e-05 0.000378788
1.4 0.000193984 9.98802e-05 0.000378788
1.68 0 0.000273014 0.000378788
END DIST

Metal 3 OVER 1 UNDER 5
DIST count 12 width 0.14
0.14 0.00136503 4.3286e-05 0.000378788
0.28 0.000762782 4.66675e-05 0.000378788
0.35 0.000634009 4.83549e-05 0.000378788
0.42 0.000545007 5.00396e-05 0.000378788
0.49 0.000479329 5.17212e-05 0.000378788
0.56 0.000428608 5.34011e-05 0.000378788
0.63 0.000388106 5.50748e-05 0.000378788
0.7 0.000354934 5.67456e-05 0.000378788
0.84 0.000303655 6.00755e-05 0.000378788
1.12 0.000236417 6.66723e-05 0.000378788
1.4 0.000193984 7.31727e-05 0.000378788
1.68 0 0.000244192 0.000378788
END DIST

Metal 3 OVER 1 UNDER 6
DIST count 12 width 0.14
0.14 0.00136503 2.79674e-05 0.000378788
0.28 0.000762782 3.10734e-05 0.000378788
0.35 0.000634009 3.26235e-05 0.000378788
0.42 0.000545007 3.41705e-05 0.000378788
0.49 0.000479329 3.57155e-05 0.000378788
0.56 0.000428608 3.72578e-05 0.000378788
0.63 0.000388106 3.87956e-05 0.000378788
0.7 0.000354934 4.03304e-05 0.000378788
0.84 0.000303655 4.33885e-05 0.000378788
1.12 0.000236417 4.94481e-05 0.000378788
1.4 0.000193984 5.54188e-05 0.000378788
1.68 0 0.000225919 0.000378788
END DIST

Metal 3 OVER 2 UNDER 4
DIST count 12 width 0.14
0.14 0.00136503 6.8161e-05 0.000378788
0.28 0.000762782 7.24324e-05 0.000378788
0.35 0.000634009 7.4565e-05 0.000378788
0.42 0.000545007 7.66945e-05 0.000378788
0.49 0.000479329 7.88196e-05 0.000378788
0.56 0.000428608 8.09406e-05 0.000378788
0.63 0.000388106 8.30562e-05 0.000378788
0.7 0.000354934 8.5167e-05 0.000378788
0.84 0.000303655 8.93736e-05 0.000378788
1.12 0.000236417 9.77095e-05 0.000378788
1.4 0.000193984 0.00010592 0.000378788
1.68 0 0.000278623 0.000378788
END DIST

Metal 3 OVER 2 UNDER 5
DIST count 12 width 0.14
0.14 0.00136503 5.13516e-05 0.000378788
0.28 0.000762782 5.45032e-05 0.000378788
0.35 0.000634009 5.60766e-05 0.000378788
0.42 0.000545007 5.76484e-05 0.000378788
0.49 0.000479329 5.92157e-05 0.000378788
0.56 0.000428608 6.07817e-05 0.000378788
0.63 0.000388106 6.23425e-05 0.000378788
0.7 0.000354934 6.38988e-05 0.000378788
0.84 0.000303655 6.70034e-05 0.000378788
1.12 0.000236417 7.31545e-05 0.000378788
1.4 0.000193984 7.9213e-05 0.000378788
1.68 0 0.000249801 0.000378788
END DIST

Metal 3 OVER 2 UNDER 6
DIST count 12 width 0.14
0.14 0.00136503 3.6033e-05 0.000378788
0.28 0.000762782 3.89092e-05 0.000378788
0.35 0.000634009 4.03452e-05 0.000378788
0.42 0.000545007 4.17793e-05 0.000378788
0.49 0.000479329 4.321e-05 0.000378788
0.56 0.000428608 4.46384e-05 0.000378788
0.63 0.000388106 4.60632e-05 0.000378788
0.7 0.000354934 4.74836e-05 0.000378788
0.84 0.000303655 5.03164e-05 0.000378788
1.12 0.000236417 5.59303e-05 0.000378788
1.4 0.000193984 6.1459e-05 0.000378788
1.68 0 0.000231528 0.000378788
END DIST

Metal 4 RESOVER
WIDTH Table 1 entries:  0.3

Metal 4 RESOVER 0
DIST count 55 width 0.3
0 0 0 0.000127946
0 0.38 0 0.000127946
0 0.68 0 0.000127946
0 0.91 0 0.000127946
0 1.06 0 0.000127946
0 1.36 0 0.000127946
0 1.59 0 0.000127946
0 1.74 0 0.000127946
0 2.04 0 0.000127946
0 2.72 0 0.000127946
0.38 0.38 0 0.000127946
0.38 0.68 0 0.000127946
0.38 0.91 0 0.000127946
0.38 1.06 0 0.000127946
0.38 1.36 0 0.000127946
0.38 1.59 0 0.000127946
0.38 1.74 0 0.000127946
0.38 2.04 0 0.000127946
0.38 2.72 0 0.000127946
0.68 0.68 0 0.000127946
0.68 0.91 0 0.000127946
0.68 1.06 0 0.000127946
0.68 1.36 0 0.000127946
0.68 1.59 0 0.000127946
0.68 1.74 0 0.000127946
0.68 2.04 0 0.000127946
0.68 2.72 0 0.000127946
0.91 0.91 0 0.000127946
0.91 1.06 0 0.000127946
0.91 1.36 0 0.000127946
0.91 1.59 0 0.000127946
0.91 1.74 0 0.000127946
0.91 2.04 0 0.000127946
0.91 2.72 0 0.000127946
1.06 1.06 0 0.000127946
1.06 1.36 0 0.000127946
1.06 1.59 0 0.000127946
1.06 1.74 0 0.000127946
1.06 2.04 0 0.000127946
1.06 2.72 0 0.000127946
1.36 1.36 0 0.000127946
1.36 1.59 0 0.000127946
1.36 1.74 0 0.000127946
1.36 2.04 0 0.000127946
1.36 2.72 0 0.000127946
1.59 1.59 0 0.000127946
1.59 1.74 0 0.000127946
1.59 2.04 0 0.000127946
1.59 2.72 0 0.000127946
1.74 1.74 0 0.000127946
1.74 2.04 0 0.000127946
1.74 2.72 0 0.000127946
2.04 2.04 0 0.000127946
2.04 2.72 0 0.000127946
2.72 0 2.72 0.000127946
END DIST

Metal 4 RESOVER 1
DIST count 0 width 0.3
END DIST

Metal 4 RESOVER 2
DIST count 0 width 0.3
END DIST

Metal 4 RESOVER 3
DIST count 0 width 0.3
END DIST

Metal 4 OVER
WIDTH Table 1 entries:  0.3

Metal 4 OVER 0
DIST count 12 width 0.3
0.3 0.000951666 5.93867e-06 6.39731e-05
0.6 0.00053508 7.85077e-06 6.39731e-05
0.75 0.000444305 8.79939e-06 6.39731e-05
0.9 0.000381219 9.74195e-06 6.39731e-05
1.05 0.000334527 1.06776e-05 6.39731e-05
1.2 0.000298424 1.16056e-05 6.39731e-05
1.35 0.000269593 1.25252e-05 6.39731e-05
1.5 0.000245993 1.34354e-05 6.39731e-05
1.8 0.000209576 1.52248e-05 6.39731e-05
2.4 0.000162047 1.86581e-05 6.39731e-05
3 0.00013226 2.18579e-05 6.39731e-05
3.6 0 0.00013657 6.39731e-05
END DIST

Metal 4 OVER 1
DIST count 12 width 0.3
0.3 0.000951666 3.68076e-05 6.39731e-05
0.6 0.00053508 4.22139e-05 6.39731e-05
0.75 0.000444305 4.48945e-05 6.39731e-05
0.9 0.000381219 4.75596e-05 6.39731e-05
1.05 0.000334527 5.02039e-05 6.39731e-05
1.2 0.000298424 5.28265e-05 6.39731e-05
1.35 0.000269593 5.54265e-05 6.39731e-05
1.5 0.000245993 5.79986e-05 6.39731e-05
1.8 0.000209576 6.30579e-05 6.39731e-05
2.4 0.000162047 7.27622e-05 6.39731e-05
3 0.00013226 8.18076e-05 6.39731e-05
3.6 0 0.000201855 6.39731e-05
END DIST

Metal 4 OVER 2
DIST count 12 width 0.3
0.3 0.000951666 5.88447e-05 6.39731e-05
0.6 0.00053508 6.4545e-05 6.39731e-05
0.75 0.000444305 6.73745e-05 6.39731e-05
0.9 0.000381219 7.01839e-05 6.39731e-05
1.05 0.000334527 7.29746e-05 6.39731e-05
1.2 0.000298424 7.57405e-05 6.39731e-05
1.35 0.000269593 7.84834e-05 6.39731e-05
1.5 0.000245993 8.1197e-05 6.39731e-05
1.8 0.000209576 8.65325e-05 6.39731e-05
2.4 0.000162047 9.67698e-05 6.39731e-05
3 0.00013226 0.00010631 6.39731e-05
3.6 0 0.000226812 6.39731e-05
END DIST

Metal 4 OVER 3
DIST count 12 width 0.3
0.3 0.000951666 0.000120163 6.39731e-05
0.6 0.00053508 0.000128803 6.39731e-05
0.75 0.000444305 0.00013309 6.39731e-05
0.9 0.000381219 0.00013735 6.39731e-05
1.05 0.000334527 0.00014158 6.39731e-05
1.2 0.000298424 0.000145774 6.39731e-05
1.35 0.000269593 0.000149928 6.39731e-05
1.5 0.000245993 0.000154041 6.39731e-05
1.8 0.000209576 0.000162129 6.39731e-05
2.4 0.000162047 0.000177645 6.39731e-05
3 0.00013226 0.000192105 6.39731e-05
3.6 0 0.000317102 6.39731e-05
END DIST

Metal 4 UNDER
WIDTH Table 1 entries:  0.3

Metal 4 UNDER 5
DIST count 12 width 0.3
0.3 0.000951666 9.43179e-05 6.39731e-05
0.6 0.00053508 0.000100838 6.39731e-05
0.75 0.000444305 0.000104073 6.39731e-05
0.9 0.000381219 0.000107288 6.39731e-05
1.05 0.000334527 0.000110478 6.39731e-05
1.2 0.000298424 0.000113643 6.39731e-05
1.35 0.000269593 0.000116778 6.39731e-05
1.5 0.000245993 0.000119882 6.39731e-05
1.8 0.000209576 0.000125985 6.39731e-05
2.4 0.000162047 0.000137692 6.39731e-05
3 0.00013226 0.000148604 6.39731e-05
3.6 0 0.000270358 6.39731e-05
END DIST

Metal 4 UNDER 6
DIST count 12 width 0.3
0.3 0.000951666 2.73156e-05 6.39731e-05
0.6 0.00053508 3.23968e-05 6.39731e-05
0.75 0.000444305 3.49174e-05 6.39731e-05
0.9 0.000381219 3.74222e-05 6.39731e-05
1.05 0.000334527 3.99087e-05 6.39731e-05
1.2 0.000298424 4.23747e-05 6.39731e-05
1.35 0.000269593 4.48182e-05 6.39731e-05
1.5 0.000245993 4.72369e-05 6.39731e-05
1.8 0.000209576 5.1992e-05 6.39731e-05
2.4 0.000162047 6.11152e-05 6.39731e-05
3 0.00013226 6.96183e-05 6.39731e-05
3.6 0 0.000189173 6.39731e-05
END DIST

Metal 4 DIAGUNDER
WIDTH Table 1 entries:  0.3

Metal 4 DIAGUNDER 5
DIST count 13 width 0.3
0 0 2.54636e-05 6.39731e-05
0.3 0 0 6.39731e-05
0.6 0 0 6.39731e-05
0.75 0 0 6.39731e-05
0.9 0 0 6.39731e-05
1.05 0 0 6.39731e-05
1.2 0 0 6.39731e-05
1.35 0 0 6.39731e-05
1.5 0 0 6.39731e-05
1.8 0 0 6.39731e-05
2.4 0 0 6.39731e-05
3 0 0 6.39731e-05
3.6 0 0 6.39731e-05
END DIST

Metal 4 DIAGUNDER 6
DIST count 13 width 0.3
0 0 5.93828e-05 6.39731e-05
0.3 0 0 6.39731e-05
0.6 0 0 6.39731e-05
0.75 0 0 6.39731e-05
0.9 0 0 6.39731e-05
1.05 0 0 6.39731e-05
1.2 0 0 6.39731e-05
1.35 0 0 6.39731e-05
1.5 0 0 6.39731e-05
1.8 0 0 6.39731e-05
2.4 0 0 6.39731e-05
3 0 0 6.39731e-05
3.6 0 0 6.39731e-05
END DIST

Metal 4 OVERUNDER
WIDTH Table 1 entries:  0.3

Metal 4 OVER 1 UNDER 5
DIST count 12 width 0.3
0.3 0.000951666 0.000125187 6.39731e-05
0.6 0.00053508 0.000135201 6.39731e-05
0.75 0.000444305 0.000140168 6.39731e-05
0.9 0.000381219 0.000145105 6.39731e-05
1.05 0.000334527 0.000150004 6.39731e-05
1.2 0.000298424 0.000154864 6.39731e-05
1.35 0.000269593 0.00015968 6.39731e-05
1.5 0.000245993 0.000164445 6.39731e-05
1.8 0.000209576 0.000173818 6.39731e-05
2.4 0.000162047 0.000191797 6.39731e-05
3 0.00013226 0.000208554 6.39731e-05
3.6 0 0.000335644 6.39731e-05
END DIST

Metal 4 OVER 1 UNDER 6
DIST count 12 width 0.3
0.3 0.000951666 5.81845e-05 6.39731e-05
0.6 0.00053508 6.67599e-05 6.39731e-05
0.75 0.000444305 7.10125e-05 6.39731e-05
0.9 0.000381219 7.52399e-05 6.39731e-05
1.05 0.000334527 7.94349e-05 6.39731e-05
1.2 0.000298424 8.35956e-05 6.39731e-05
1.35 0.000269593 8.77195e-05 6.39731e-05
1.5 0.000245993 9.18001e-05 6.39731e-05
1.8 0.000209576 9.98251e-05 6.39731e-05
2.4 0.000162047 0.000115219 6.39731e-05
3 0.00013226 0.000129568 6.39731e-05
3.6 0 0.000254458 6.39731e-05
END DIST

Metal 4 OVER 2 UNDER 5
DIST count 12 width 0.3
0.3 0.000951666 0.000147224 6.39731e-05
0.6 0.00053508 0.000157532 6.39731e-05
0.75 0.000444305 0.000162648 6.39731e-05
0.9 0.000381219 0.00016773 6.39731e-05
1.05 0.000334527 0.000172775 6.39731e-05
1.2 0.000298424 0.000177778 6.39731e-05
1.35 0.000269593 0.000182737 6.39731e-05
1.5 0.000245993 0.000187644 6.39731e-05
1.8 0.000209576 0.000197292 6.39731e-05
2.4 0.000162047 0.000215804 6.39731e-05
3 0.00013226 0.000233056 6.39731e-05
3.6 0 0.0003606 6.39731e-05
END DIST

Metal 4 OVER 2 UNDER 6
DIST count 12 width 0.3
0.3 0.000951666 8.02217e-05 6.39731e-05
0.6 0.00053508 8.9091e-05 6.39731e-05
0.75 0.000444305 9.34926e-05 6.39731e-05
0.9 0.000381219 9.78642e-05 6.39731e-05
1.05 0.000334527 0.000102206 6.39731e-05
1.2 0.000298424 0.00010651 6.39731e-05
1.35 0.000269593 0.000110776 6.39731e-05
1.5 0.000245993 0.000114998 6.39731e-05
1.8 0.000209576 0.0001233 6.39731e-05
2.4 0.000162047 0.000139227 6.39731e-05
3 0.00013226 0.00015407 6.39731e-05
3.6 0 0.000279415 6.39731e-05
END DIST

Metal 4 OVER 3 UNDER 5
DIST count 12 width 0.3
0.3 0.000951666 0.000208542 6.39731e-05
0.6 0.00053508 0.00022179 6.39731e-05
0.75 0.000444305 0.000228364 6.39731e-05
0.9 0.000381219 0.000234895 6.39731e-05
1.05 0.000334527 0.00024138 6.39731e-05
1.2 0.000298424 0.000247811 6.39731e-05
1.35 0.000269593 0.000254181 6.39731e-05
1.5 0.000245993 0.000260488 6.39731e-05
1.8 0.000209576 0.000272889 6.39731e-05
2.4 0.000162047 0.000296679 6.39731e-05
3 0.00013226 0.000318852 6.39731e-05
3.6 0 0.00045089 6.39731e-05
END DIST

Metal 4 OVER 3 UNDER 6
DIST count 12 width 0.3
0.3 0.000951666 0.000141539 6.39731e-05
0.6 0.00053508 0.000153349 6.39731e-05
0.75 0.000444305 0.000159208 6.39731e-05
0.9 0.000381219 0.00016503 6.39731e-05
1.05 0.000334527 0.000170811 6.39731e-05
1.2 0.000298424 0.000176543 6.39731e-05
1.35 0.000269593 0.000182221 6.39731e-05
1.5 0.000245993 0.000187843 6.39731e-05
1.8 0.000209576 0.000198896 6.39731e-05
2.4 0.000162047 0.000220102 6.39731e-05
3 0.00013226 0.000239866 6.39731e-05
3.6 0 0.000369705 6.39731e-05
END DIST

Metal 5 RESOVER
WIDTH Table 1 entries:  0.3

Metal 5 RESOVER 0
DIST count 55 width 0.3
0 0 0 0.000127946
0 0.62 0 0.000127946
0 0.92 0 0.000127946
0 1.39 0 0.000127946
0 1.54 0 0.000127946
0 1.84 0 0.000127946
0 2.31 0 0.000127946
0 2.46 0 0.000127946
0 2.76 0 0.000127946
0 3.68 0 0.000127946
0.62 0.62 0 0.000127946
0.62 0.92 0 0.000127946
0.62 1.39 0 0.000127946
0.62 1.54 0 0.000127946
0.62 1.84 0 0.000127946
0.62 2.31 0 0.000127946
0.62 2.46 0 0.000127946
0.62 2.76 0 0.000127946
0.62 3.68 0 0.000127946
0.92 0.92 0 0.000127946
0.92 1.39 0 0.000127946
0.92 1.54 0 0.000127946
0.92 1.84 0 0.000127946
0.92 2.31 0 0.000127946
0.92 2.46 0 0.000127946
0.92 2.76 0 0.000127946
0.92 3.68 0 0.000127946
1.39 1.39 0 0.000127946
1.39 1.54 0 0.000127946
1.39 1.84 0 0.000127946
1.39 2.31 0 0.000127946
1.39 2.46 0 0.000127946
1.39 2.76 0 0.000127946
1.39 3.68 0 0.000127946
1.54 1.54 0 0.000127946
1.54 1.84 0 0.000127946
1.54 2.31 0 0.000127946
1.54 2.46 0 0.000127946
1.54 2.76 0 0.000127946
1.54 3.68 0 0.000127946
1.84 1.84 0 0.000127946
1.84 2.31 0 0.000127946
1.84 2.46 0 0.000127946
1.84 2.76 0 0.000127946
1.84 3.68 0 0.000127946
2.31 2.31 0 0.000127946
2.31 2.46 0 0.000127946
2.31 2.76 0 0.000127946
2.31 3.68 0 0.000127946
2.46 2.46 0 0.000127946
2.46 2.76 0 0.000127946
2.46 3.68 0 0.000127946
2.76 2.76 0 0.000127946
2.76 3.68 0 0.000127946
3.68 0 3.68 0.000127946
END DIST

Metal 5 RESOVER 1
DIST count 0 width 0.3
END DIST

Metal 5 RESOVER 2
DIST count 0 width 0.3
END DIST

Metal 5 RESOVER 3
DIST count 0 width 0.3
END DIST

Metal 5 RESOVER 4
DIST count 0 width 0.3
END DIST

Metal 5 OVER
WIDTH Table 1 entries:  0.3

Metal 5 OVER 0
DIST count 12 width 0.3
0.3 0.000945543 5.86769e-06 6.39731e-05
0.6 0.000529248 7.62758e-06 6.39731e-05
0.75 0.000439902 8.49973e-06 6.39731e-05
0.9 0.000378071 9.36567e-06 6.39731e-05
1.05 0.000332407 1.02247e-05 6.39731e-05
1.2 0.000297125 1.1076e-05 6.39731e-05
1.35 0.000268947 1.19189e-05 6.39731e-05
1.5 0.000245866 1.27526e-05 6.39731e-05
1.8 0.000210191 1.43896e-05 6.39731e-05
2.4 0.000163442 1.75224e-05 6.39731e-05
3 0.000133973 2.0431e-05 6.39731e-05
3.6 0 0.00013669 6.39731e-05
END DIST

Metal 5 OVER 1
DIST count 12 width 0.3
0.3 0.000945543 2.97866e-05 6.39731e-05
0.6 0.000529248 3.46483e-05 6.39731e-05
0.75 0.000439902 3.70588e-05 6.39731e-05
0.9 0.000378071 3.94514e-05 6.39731e-05
1.05 0.000332407 4.18232e-05 6.39731e-05
1.2 0.000297125 4.41758e-05 6.39731e-05
1.35 0.000268947 4.65039e-05 6.39731e-05
1.5 0.000245866 4.88088e-05 6.39731e-05
1.8 0.000210191 5.33306e-05 6.39731e-05
2.4 0.000163442 6.19881e-05 6.39731e-05
3 0.000133973 7.00243e-05 6.39731e-05
3.6 0 0.000190944 6.39731e-05
END DIST

Metal 5 OVER 2
DIST count 12 width 0.3
0.3 0.000945543 4.55152e-05 6.39731e-05
0.6 0.000529248 5.05766e-05 6.39731e-05
0.75 0.000439902 5.30854e-05 6.39731e-05
0.9 0.000378071 5.55738e-05 6.39731e-05
1.05 0.000332407 5.80437e-05 6.39731e-05
1.2 0.000297125 6.04944e-05 6.39731e-05
1.35 0.000268947 6.29169e-05 6.39731e-05
1.5 0.000245866 6.53132e-05 6.39731e-05
1.8 0.000210191 7.00209e-05 6.39731e-05
2.4 0.000163442 7.90301e-05 6.39731e-05
3 0.000133973 8.73931e-05 6.39731e-05
3.6 0 0.000208613 6.39731e-05
END DIST

Metal 5 OVER 3
DIST count 12 width 0.3
0.3 0.000945543 6.49153e-05 6.39731e-05
0.6 0.000529248 7.09595e-05 6.39731e-05
0.75 0.000439902 7.39531e-05 6.39731e-05
0.9 0.000378071 7.69283e-05 6.39731e-05
1.05 0.000332407 7.98785e-05 6.39731e-05
1.2 0.000297125 8.28031e-05 6.39731e-05
1.35 0.000268947 8.56954e-05 6.39731e-05
1.5 0.000245866 8.85603e-05 6.39731e-05
1.8 0.000210191 9.41823e-05 6.39731e-05
2.4 0.000163442 0.00010494 6.39731e-05
3 0.000133973 0.000114931 6.39731e-05
3.6 0 0.000237626 6.39731e-05
END DIST

Metal 5 OVER 4
DIST count 12 width 0.3
0.3 0.000945543 7.40344e-05 6.39731e-05
0.6 0.000529248 8.24918e-05 6.39731e-05
0.75 0.000439902 8.66823e-05 6.39731e-05
0.9 0.000378071 9.08441e-05 6.39731e-05
1.05 0.000332407 9.49722e-05 6.39731e-05
1.2 0.000297125 9.90628e-05 6.39731e-05
1.35 0.000268947 0.000103113 6.39731e-05
1.5 0.000245866 0.00010712 6.39731e-05
1.8 0.000210191 0.000114986 6.39731e-05
2.4 0.000163442 0.000130041 6.39731e-05
3 0.000133973 0.000144018 6.39731e-05
3.6 0 0.000270339 6.39731e-05
END DIST

Metal 5 UNDER
WIDTH Table 1 entries:  0.3

Metal 5 UNDER 6
DIST count 12 width 0.3
0.3 0.000945543 4.65456e-05 6.39731e-05
0.6 0.000529248 5.33965e-05 6.39731e-05
0.75 0.000439902 5.67915e-05 6.39731e-05
0.9 0.000378071 6.01622e-05 6.39731e-05
1.05 0.000332407 6.35063e-05 6.39731e-05
1.2 0.000297125 6.68202e-05 6.39731e-05
1.35 0.000268947 7.01012e-05 6.39731e-05
1.5 0.000245866 7.33467e-05 6.39731e-05
1.8 0.000210191 7.97191e-05 6.39731e-05
2.4 0.000163442 9.19145e-05 6.39731e-05
3 0.000133973 0.000103237 6.39731e-05
3.6 0 0.000227144 6.39731e-05
END DIST

Metal 5 DIAGUNDER
WIDTH Table 1 entries:  0.3

Metal 5 DIAGUNDER 6
DIST count 13 width 0.3
0 0 0.000108423 6.39731e-05
0.3 0 0 6.39731e-05
0.6 0 0 6.39731e-05
0.75 0 0 6.39731e-05
0.9 0 0 6.39731e-05
1.05 0 0 6.39731e-05
1.2 0 0 6.39731e-05
1.35 0 0 6.39731e-05
1.5 0 0 6.39731e-05
1.8 0 0 6.39731e-05
2.4 0 0 6.39731e-05
3 0 0 6.39731e-05
3.6 0 0 6.39731e-05
END DIST

Metal 5 OVERUNDER
WIDTH Table 1 entries:  0.3

Metal 5 OVER 1 UNDER 6
DIST count 12 width 0.3
0.3 0.000945543 7.04645e-05 6.39731e-05
0.6 0.000529248 8.04172e-05 6.39731e-05
0.75 0.000439902 8.53506e-05 6.39731e-05
0.9 0.000378071 9.0248e-05 6.39731e-05
1.05 0.000332407 9.51049e-05 6.39731e-05
1.2 0.000297125 9.992e-05 6.39731e-05
1.35 0.000268947 0.000104686 6.39731e-05
1.5 0.000245866 0.000109403 6.39731e-05
1.8 0.000210191 0.00011866 6.39731e-05
2.4 0.000163442 0.00013638 6.39731e-05
3 0.000133973 0.00015283 6.39731e-05
3.6 0 0.000281398 6.39731e-05
END DIST

Metal 5 OVER 2 UNDER 6
DIST count 12 width 0.3
0.3 0.000945543 8.6193e-05 6.39731e-05
0.6 0.000529248 9.63455e-05 6.39731e-05
0.75 0.000439902 0.000101377 6.39731e-05
0.9 0.000378071 0.00010637 6.39731e-05
1.05 0.000332407 0.000111325 6.39731e-05
1.2 0.000297125 0.000116239 6.39731e-05
1.35 0.000268947 0.000121099 6.39731e-05
1.5 0.000245866 0.000125907 6.39731e-05
1.8 0.000210191 0.00013535 6.39731e-05
2.4 0.000163442 0.000153422 6.39731e-05
3 0.000133973 0.000170199 6.39731e-05
3.6 0 0.000299067 6.39731e-05
END DIST

Metal 5 OVER 3 UNDER 6
DIST count 12 width 0.3
0.3 0.000945543 0.000105593 6.39731e-05
0.6 0.000529248 0.000116728 6.39731e-05
0.75 0.000439902 0.000122245 6.39731e-05
0.9 0.000378071 0.000127725 6.39731e-05
1.05 0.000332407 0.00013316 6.39731e-05
1.2 0.000297125 0.000138547 6.39731e-05
1.35 0.000268947 0.000143878 6.39731e-05
1.5 0.000245866 0.000149154 6.39731e-05
1.8 0.000210191 0.000159512 6.39731e-05
2.4 0.000163442 0.000179332 6.39731e-05
3 0.000133973 0.000197737 6.39731e-05
3.6 0 0.00032808 6.39731e-05
END DIST

Metal 5 OVER 4 UNDER 6
DIST count 12 width 0.3
0.3 0.000945543 0.000114712 6.39731e-05
0.6 0.000529248 0.000128261 6.39731e-05
0.75 0.000439902 0.000134974 6.39731e-05
0.9 0.000378071 0.000141641 6.39731e-05
1.05 0.000332407 0.000148254 6.39731e-05
1.2 0.000297125 0.000154807 6.39731e-05
1.35 0.000268947 0.000161295 6.39731e-05
1.5 0.000245866 0.000167714 6.39731e-05
1.8 0.000210191 0.000180315 6.39731e-05
2.4 0.000163442 0.000204433 6.39731e-05
3 0.000133973 0.000226824 6.39731e-05
3.6 0 0.000360793 6.39731e-05
END DIST

Metal 6 RESOVER
WIDTH Table 1 entries:  1.6

Metal 6 RESOVER 0
DIST count 55 width 1.6
0 0 0 1.32576e-05
0 1.8 0 1.32576e-05
0 3.4 0 1.32576e-05
0 4.4 0 1.32576e-05
0 5.2 0 1.32576e-05
0 6.8 0 1.32576e-05
0 7.8 0 1.32576e-05
0 8.6 0 1.32576e-05
0 10.2 0 1.32576e-05
0 13.6 0 1.32576e-05
1.8 1.8 0 1.32576e-05
1.8 3.4 0 1.32576e-05
1.8 4.4 0 1.32576e-05
1.8 5.2 0 1.32576e-05
1.8 6.8 0 1.32576e-05
1.8 7.8 0 1.32576e-05
1.8 8.6 0 1.32576e-05
1.8 10.2 0 1.32576e-05
1.8 13.6 0 1.32576e-05
3.4 3.4 0 1.32576e-05
3.4 4.4 0 1.32576e-05
3.4 5.2 0 1.32576e-05
3.4 6.8 0 1.32576e-05
3.4 7.8 0 1.32576e-05
3.4 8.6 0 1.32576e-05
3.4 10.2 0 1.32576e-05
3.4 13.6 0 1.32576e-05
4.4 4.4 0 1.32576e-05
4.4 5.2 0 1.32576e-05
4.4 6.8 0 1.32576e-05
4.4 7.8 0 1.32576e-05
4.4 8.6 0 1.32576e-05
4.4 10.2 0 1.32576e-05
4.4 13.6 0 1.32576e-05
5.2 5.2 0 1.32576e-05
5.2 6.8 0 1.32576e-05
5.2 7.8 0 1.32576e-05
5.2 8.6 0 1.32576e-05
5.2 10.2 0 1.32576e-05
5.2 13.6 0 1.32576e-05
6.8 6.8 0 1.32576e-05
6.8 7.8 0 1.32576e-05
6.8 8.6 0 1.32576e-05
6.8 10.2 0 1.32576e-05
6.8 13.6 0 1.32576e-05
7.8 7.8 0 1.32576e-05
7.8 8.6 0 1.32576e-05
7.8 10.2 0 1.32576e-05
7.8 13.6 0 1.32576e-05
8.6 8.6 0 1.32576e-05
8.6 10.2 0 1.32576e-05
8.6 13.6 0 1.32576e-05
10.2 10.2 0 1.32576e-05
10.2 13.6 0 1.32576e-05
13.6 0 13.6 1.32576e-05
END DIST

Metal 6 RESOVER 1
DIST count 0 width 1.6
END DIST

Metal 6 RESOVER 2
DIST count 0 width 1.6
END DIST

Metal 6 RESOVER 3
DIST count 0 width 1.6
END DIST

Metal 6 RESOVER 4
DIST count 0 width 1.6
END DIST

Metal 6 RESOVER 5
DIST count 0 width 1.6
END DIST

Metal 6 OVER
WIDTH Table 1 entries:  1.6

Metal 6 OVER 0
DIST count 12 width 1.6
1.6 0.000294333 2.35705e-05 6.62879e-06
3.2 0.000165546 3.03687e-05 6.62879e-06
4 0.000137404 3.28561e-05 6.62879e-06
4.8 7.43266e-05 3.1494e-05 6.62879e-06
5.6 6.37085e-05 3.42143e-05 6.62879e-06
6.4 5.57449e-05 3.62064e-05 6.62879e-06
7.2 4.9551e-05 3.74211e-05 6.62879e-06
8 0 3.78289e-05 6.62879e-06
9.6 0 3.78289e-05 6.62879e-06
12.8 0 3.78289e-05 6.62879e-06
16 0 3.78289e-05 6.62879e-06
19.2 0 3.78289e-05 6.62879e-06
END DIST

Metal 6 OVER 1
DIST count 12 width 1.6
1.6 0.000294333 0.000127 6.62879e-06
3.2 0.000165546 0.0001456 6.62879e-06
4 0.000137404 0.000152406 6.62879e-06
4.8 7.43266e-05 0.000148677 6.62879e-06
5.6 6.37085e-05 0.00015612 6.62879e-06
6.4 5.57449e-05 0.000161573 6.62879e-06
7.2 4.9551e-05 0.000164894 6.62879e-06
8 0 0.000166011 6.62879e-06
9.6 0 0.000166011 6.62879e-06
12.8 0 0.000166011 6.62879e-06
16 0 0.000166011 6.62879e-06
19.2 0 0.000166011 6.62879e-06
END DIST

Metal 6 OVER 2
DIST count 12 width 1.6
1.6 0.000294333 0.00018915 6.62879e-06
3.2 0.000165546 0.000208345 6.62879e-06
4 0.000137404 0.00021537 6.62879e-06
4.8 7.43266e-05 0.000211524 6.62879e-06
5.6 6.37085e-05 0.000219207 6.62879e-06
6.4 5.57449e-05 0.000224834 6.62879e-06
7.2 4.9551e-05 0.000228263 6.62879e-06
8 0 0.000229413 6.62879e-06
9.6 0 0.000229413 6.62879e-06
12.8 0 0.000229413 6.62879e-06
16 0 0.000229413 6.62879e-06
19.2 0 0.000229413 6.62879e-06
END DIST

Metal 6 OVER 3
DIST count 12 width 1.6
1.6 0.000294333 0.000249823 6.62879e-06
3.2 0.000165546 0.000271303 6.62879e-06
4 0.000137404 0.000279162 6.62879e-06
4.8 7.43266e-05 0.000274857 6.62879e-06
5.6 6.37085e-05 0.000283453 6.62879e-06
6.4 5.57449e-05 0.000289748 6.62879e-06
7.2 4.9551e-05 0.000293588 6.62879e-06
8 0 0.000294875 6.62879e-06
9.6 0 0.000294875 6.62879e-06
12.8 0 0.000294875 6.62879e-06
16 0 0.000294875 6.62879e-06
19.2 0 0.000294875 6.62879e-06
END DIST

Metal 6 OVER 4
DIST count 12 width 1.6
1.6 0.000294333 0.000237368 6.62879e-06
3.2 0.000165546 0.000262062 6.62879e-06
4 0.000137404 0.000271096 6.62879e-06
4.8 7.43266e-05 0.000266149 6.62879e-06
5.6 6.37085e-05 0.000276031 6.62879e-06
6.4 5.57449e-05 0.000283267 6.62879e-06
7.2 4.9551e-05 0.00028768 6.62879e-06
8 0 0.00028916 6.62879e-06
9.6 0 0.00028916 6.62879e-06
12.8 0 0.00028916 6.62879e-06
16 0 0.00028916 6.62879e-06
19.2 0 0.00028916 6.62879e-06
END DIST

Metal 6 OVER 5
DIST count 12 width 1.6
1.6 0.000294333 0.00040199 6.62879e-06
3.2 0.000165546 0.000437069 6.62879e-06
4 0.000137404 0.000449904 6.62879e-06
4.8 7.43266e-05 0.000442876 6.62879e-06
5.6 6.37085e-05 0.000456913 6.62879e-06
6.4 5.57449e-05 0.000467192 6.62879e-06
7.2 4.9551e-05 0.000473461 6.62879e-06
8 0 0.000475564 6.62879e-06
9.6 0 0.000475564 6.62879e-06
12.8 0 0.000475564 6.62879e-06
16 0 0.000475564 6.62879e-06
19.2 0 0.000475564 6.62879e-06
END DIST

Metal 6 UNDER
WIDTH Table 0 entries: 

Metal 6 DIAGUNDER
WIDTH Table 0 entries: 
END DensityModel 0