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foss-eda-tools / third_party / freepdk45 / 954b16e2fcd52994e9d3c8b5af35b5f91d261889 / . / Cap_Tables / NCSU_FreePDK_45nm.ptf
blob: b6610dd510c56ea5cef3660bec4b1fb451949b18 [file] [log] [blame]
///////////////////////////////////////////////////////////////////////////
// SDA PTF Generated on Fri Jul 3 06:35:33 2009 Using ElCap Version 1.87 //
// Copyright 2003 - 2008 Sierra Design Automation, Inc. //
///////////////////////////////////////////////////////////////////////////
process_technology ( master_techFreePDK45 ) {
capacitance_unit : ff
resistance_unit : ohm
inductance_unit : nH
voltage_unit : V
current_unit : mA
power_unit : mW
length_unit : um
per_length_unit : um
thickness_unit : um
height_unit : um
area_unit : um2
nom_process : 1.00
nom_temperature : 25.00
nom_voltage : 1.20
half_node_scale_factor : 1.00
///////////////////////////////////////////////////////////////////////
// Dielectric-type Dielectric-name Thickness Dielectric-constant //
///////////////////////////////////////////////////////////////////////
dielectric_stack {
planar metal10_diel_b 2.000000 2.500000;
planar metal10_diel_a 2.000000 2.500000;
planar metal9_diel_b 2.000000 2.500000;
planar metal9_diel_a 2.000000 2.500000;
planar metal8_diel_b 0.820000 2.500000;
planar metal8_diel_a 0.800000 2.500000;
planar metal7_diel_b 0.820000 2.500000;
planar metal7_diel_a 0.800000 2.500000;
planar metal6_diel_b 0.290000 2.500000;
planar metal6_diel_a 0.280000 2.500000;
planar metal5_diel_b 0.290000 2.500000;
planar metal5_diel_a 0.280000 2.500000;
planar metal4_diel_b 0.290000 2.500000;
planar metal4_diel_a 0.280000 2.500000;
planar metal3_diel_b 0.120000 2.500000;
planar metal3_diel_a 0.140000 2.500000;
planar metal2_diel_b 0.120000 2.500000;
planar metal2_diel_a 0.140000 2.500000;
planar metal1_diel_b 0.120000 2.500000;
planar metal1_diel_a 0.130000 2.500000;
planar poly_diel_b 0.085000 2.500000;
planar poly_diel_a 0.085000 2.500000;
planar field_active_diel 0.100000 3.900000;
planar field_base_diel 0.100000 3.900000;
}
////////////////////////////////////////////
// Layer-name Thickness Height //
////////////////////////////////////////////
layer_stack {
metal10 2.000000 10.090000;
metal9 2.000000 6.090000;
metal8 0.800000 4.470000;
metal7 0.800000 2.850000;
metal6 0.280000 2.280000;
metal5 0.280000 1.710000;
metal4 0.280000 1.140000;
metal3 0.140000 0.880000;
metal2 0.140000 0.620000;
metal1 0.130000 0.370000;
poly 0.085000 0.200000;
}
capacitance_lut_template(capacitance_template_WxS) {
variable_1 : width;
variable_2 : spacing;
index_1 (" 1, 2, 3, 4, 5 ");
index_2 (" 1, 2, 3, 4, 5, 6, 7, 8, 9, 10, 11, 12, 13 ");
etched : false;
infinite_spacing : true;
}
capacitance_lut_template(capacitance_template_etched_WxS) {
variable_1 : width;
variable_2 : spacing;
index_1 (" 1, 2, 3, 4, 5 ");
index_2 (" 1, 2, 3, 4, 5, 6, 7, 8, 9, 10, 11, 12, 13 ");
etched : true;
infinite_spacing : true;
}
cross_capacitance_lut_template(cross_capacitance_template_WxS) {
variable_1 : width;
variable_2 : spacing;
variable_3 : cross_width;
variable_4 : cross_spacing;
index_1 (" 1, 2, 3, 4, 5 ");
index_2 (" 1, 2, 3, 4, 5, 6, 7, 8, 9, 10, 11, 12, 13 ");
index_3 (" 1, 2, 3, 4, 5 ");
index_4 (" 1, 2, 3, 4, 5, 6, 7, 8, 9, 10, 11, 12, 13 ");
etched : false;
infinite_spacing : true;
}
cross_capacitance_lut_template(cross_capacitance_template_etched_WxS) {
variable_1 : width;
variable_2 : spacing;
variable_3 : cross_width;
variable_4 : cross_spacing;
index_1 (" 1, 2, 3, 4, 5 ");
index_2 (" 1, 2, 3, 4, 5, 6, 7, 8, 9, 10, 11, 12, 13 ");
index_3 (" 1, 2, 3, 4, 5 ");
index_4 (" 1, 2, 3, 4, 5, 6, 7, 8, 9, 10, 11, 12, 13 ");
etched : true;
infinite_spacing : true;
}
layer (metal10) {
resistance: 0.030000
capacitance () {
top_plane: AIR;
bottom_plane: metal9;
lateral_capacitance (capacitance_template_WxS) {
index_1 (" 0.8000, 0.9000, 1.5000, 1.6000, 3.2000 ");
index_2 (" 0.8000, 0.9000, 1.2000, 1.5000, 1.8000, 2.7000, 4.0500, 6.0750, \
9.1125, 13.6688, 20.5031, 30.7547, 3075.4688 ");
values (" 0.07632, 0.06890, 0.05358, 0.04392, 0.03718, 0.02508, 0.01593, 0.00904, \
0.00419, 0.00139, 0.00027, 0.00003, 0.00000, 0.07692, 0.06947, 0.05406, \
0.04433, 0.03755, 0.02533, 0.01609, 0.00913, 0.00423, 0.00140, 0.00028, \
0.00003, 0.00000, 0.07954, 0.07194, 0.05617, 0.04616, 0.03914, 0.02645, \
0.01681, 0.00953, 0.00442, 0.00146, 0.00029, 0.00003, 0.00000, 0.07986, \
0.07224, 0.05643, 0.04638, 0.03934, 0.02659, 0.01690, 0.00958, 0.00444, \
0.00147, 0.00029, 0.00003, 0.00000, 0.08275, 0.07499, 0.05880, 0.04844, \
0.04115, 0.02787, 0.01772, 0.01004, 0.00465, 0.00154, 0.00030, 0.00003, \
0.00000 ");
}
ground_capacitance (capacitance_template_WxS) {
index_1 (" 0.8000, 0.9000, 1.5000, 1.6000, 3.2000 ");
index_2 (" 0.8000, 0.9000, 1.2000, 1.5000, 1.8000, 2.7000, 4.0500, 6.0750, \
9.1125, 13.6688, 20.5031, 30.7547, 3075.4688 ");
values (" 0.02011, 0.02105, 0.02372, 0.02621, 0.02854, 0.03472, 0.04215, 0.05027, \
0.05778, 0.06293, 0.06518, 0.06572, 0.06552, 0.02110, 0.02203, 0.02469, \
0.02718, 0.02952, 0.03573, 0.04322, 0.05141, 0.05899, 0.06419, 0.06646, \
0.06701, 0.06680, 0.02700, 0.02792, 0.03059, 0.03311, 0.03549, 0.04187, \
0.04962, 0.05813, 0.06602, 0.07145, 0.07381, 0.07439, 0.07418, 0.02799, \
0.02891, 0.03159, 0.03411, 0.03651, 0.04291, 0.05068, 0.05924, 0.06717, \
0.07262, 0.07500, 0.07557, 0.07537, 0.04451, 0.04546, 0.04820, 0.05079, \
0.05325, 0.05987, 0.06797, 0.07691, 0.08520, 0.09091, 0.09340, 0.09400, \
0.09380 ");
}
}
capacitance () {
top_plane: AIR;
bottom_plane: metal8;
lateral_capacitance (capacitance_template_WxS) {
index_1 (" 0.8000, 0.9000, 1.5000, 1.6000, 3.2000 ");
index_2 (" 0.8000, 0.9000, 1.2000, 1.5000, 1.8000, 2.7000, 4.0500, 6.0750, \
9.1125, 13.6688, 20.5031, 30.7547, 3075.4688 ");
values (" 0.07973, 0.07241, 0.05736, 0.04791, 0.04135, 0.02955, 0.02047, 0.01323, \
0.00751, 0.00341, 0.00108, 0.00020, 0.00000, 0.08046, 0.07310, 0.05796, \
0.04843, 0.04182, 0.02989, 0.02069, 0.01336, 0.00757, 0.00344, 0.00109, \
0.00020, 0.00000, 0.08380, 0.07628, 0.06071, 0.05084, 0.04394, 0.03141, \
0.02168, 0.01394, 0.00788, 0.00358, 0.00114, 0.00021, 0.00000, 0.08422, \
0.07668, 0.06106, 0.05115, 0.04421, 0.03160, 0.02181, 0.01402, 0.00792, \
0.00359, 0.00114, 0.00021, 0.00000, 0.08826, 0.08052, 0.06438, 0.05405, \
0.04676, 0.03339, 0.02296, 0.01469, 0.00828, 0.00375, 0.00119, 0.00022, \
0.00000 ");
}
ground_capacitance (capacitance_template_WxS) {
index_1 (" 0.8000, 0.9000, 1.5000, 1.6000, 3.2000 ");
index_2 (" 0.8000, 0.9000, 1.2000, 1.5000, 1.8000, 2.7000, 4.0500, 6.0750, \
9.1125, 13.6688, 20.5031, 30.7547, 3075.4688 ");
values (" 0.01031, 0.01076, 0.01203, 0.01320, 0.01429, 0.01727, 0.02131, 0.02669, \
0.03314, 0.03940, 0.04368, 0.04548, 0.04571, 0.01072, 0.01116, 0.01239, \
0.01354, 0.01462, 0.01761, 0.02169, 0.02713, 0.03365, 0.03996, 0.04428, \
0.04609, 0.04633, 0.01292, 0.01331, 0.01446, 0.01557, 0.01666, 0.01975, \
0.02405, 0.02977, 0.03658, 0.04314, 0.04763, 0.04951, 0.04976, 0.01327, \
0.01366, 0.01481, 0.01592, 0.01701, 0.02012, 0.02445, 0.03021, 0.03705, \
0.04365, 0.04816, 0.05005, 0.05031, 0.01925, 0.01966, 0.02086, 0.02205, \
0.02321, 0.02657, 0.03124, 0.03736, 0.04456, 0.05145, 0.05615, 0.05812, \
0.05840 ");
}
}
capacitance () {
top_plane: AIR;
bottom_plane: metal7;
lateral_capacitance (capacitance_template_WxS) {
index_1 (" 0.8000, 0.9000, 1.5000, 1.6000, 3.2000 ");
index_2 (" 0.8000, 0.9000, 1.2000, 1.5000, 1.8000, 2.7000, 4.0500, 6.0750, \
9.1125, 13.6688, 20.5031, 30.7547, 3075.4688 ");
values (" 0.08049, 0.07320, 0.05821, 0.04882, 0.04231, 0.03065, 0.02173, 0.01459, \
0.00882, 0.00444, 0.00166, 0.00039, 0.00000, 0.08124, 0.07391, 0.05883, \
0.04936, 0.04280, 0.03101, 0.02197, 0.01474, 0.00890, 0.00448, 0.00167, \
0.00039, 0.00000, 0.08472, 0.07722, 0.06172, 0.05192, 0.04507, 0.03268, \
0.02309, 0.01542, 0.00928, 0.00467, 0.00174, 0.00041, 0.00000, 0.08517, \
0.07765, 0.06209, 0.05225, 0.04537, 0.03289, 0.02323, 0.01551, 0.00933, \
0.00469, 0.00175, 0.00041, 0.00000, 0.08961, 0.08189, 0.06580, 0.05552, \
0.04827, 0.03499, 0.02462, 0.01635, 0.00980, 0.00491, 0.00183, 0.00043, \
0.00000 ");
}
ground_capacitance (capacitance_template_WxS) {
index_1 (" 0.8000, 0.9000, 1.5000, 1.6000, 3.2000 ");
index_2 (" 0.8000, 0.9000, 1.2000, 1.5000, 1.8000, 2.7000, 4.0500, 6.0750, \
9.1125, 13.6688, 20.5031, 30.7547, 3075.4688 ");
values (" 0.00837, 0.00875, 0.00980, 0.01075, 0.01162, 0.01395, 0.01707, 0.02136, \
0.02689, 0.03288, 0.03769, 0.04019, 0.04084, 0.00871, 0.00907, 0.01008, \
0.01101, 0.01186, 0.01418, 0.01733, 0.02167, 0.02726, 0.03330, 0.03815, \
0.04067, 0.04133, 0.01043, 0.01074, 0.01163, 0.01248, 0.01330, 0.01564, \
0.01895, 0.02353, 0.02939, 0.03569, 0.04074, 0.04336, 0.04404, 0.01069, \
0.01099, 0.01187, 0.01272, 0.01354, 0.01589, 0.01923, 0.02384, 0.02974, \
0.03607, 0.04114, 0.04378, 0.04447, 0.01492, 0.01522, 0.01612, 0.01700, \
0.01787, 0.02042, 0.02406, 0.02903, 0.03529, 0.04194, 0.04725, 0.05001, \
0.05073 ");
}
}
capacitance () {
top_plane: AIR;
bottom_plane: metal6;
lateral_capacitance (capacitance_template_WxS) {
index_1 (" 0.8000, 0.9000, 1.5000, 1.6000, 3.2000 ");
index_2 (" 0.8000, 0.9000, 1.2000, 1.5000, 1.8000, 2.7000, 4.0500, 6.0750, \
9.1125, 13.6688, 20.5031, 30.7547, 3075.4688 ");
values (" 0.08085, 0.07357, 0.05861, 0.04924, 0.04276, 0.03116, 0.02232, 0.01526, \
0.00952, 0.00505, 0.00205, 0.00055, 0.00000, 0.08161, 0.07429, 0.05924, \
0.04979, 0.04325, 0.03153, 0.02258, 0.01542, 0.00961, 0.00510, 0.00207, \
0.00055, 0.00000, 0.08514, 0.07765, 0.06218, 0.05240, 0.04559, 0.03326, \
0.02376, 0.01616, 0.01004, 0.00531, 0.00216, 0.00058, 0.00000, 0.08560, \
0.07809, 0.06256, 0.05275, 0.04589, 0.03349, 0.02391, 0.01626, 0.01009, \
0.00534, 0.00217, 0.00058, 0.00000, 0.09023, 0.08252, 0.06646, 0.05620, \
0.04897, 0.03575, 0.02544, 0.01721, 0.01063, 0.00561, 0.00228, 0.00061, \
0.00000 ");
}
ground_capacitance (capacitance_template_WxS) {
index_1 (" 0.8000, 0.9000, 1.5000, 1.6000, 3.2000 ");
index_2 (" 0.8000, 0.9000, 1.2000, 1.5000, 1.8000, 2.7000, 4.0500, 6.0750, \
9.1125, 13.6688, 20.5031, 30.7547, 3075.4688 ");
values (" 0.00747, 0.00782, 0.00877, 0.00964, 0.01043, 0.01250, 0.01522, 0.01897, \
0.02395, 0.02965, 0.03461, 0.03751, 0.03848, 0.00778, 0.00811, 0.00903, \
0.00987, 0.01064, 0.01269, 0.01542, 0.01922, 0.02425, 0.03000, 0.03501, \
0.03793, 0.03892, 0.00933, 0.00961, 0.01039, 0.01114, 0.01185, 0.01388, \
0.01673, 0.02074, 0.02604, 0.03203, 0.03725, 0.04028, 0.04131, 0.00956, \
0.00983, 0.01060, 0.01134, 0.01206, 0.01408, 0.01696, 0.02100, 0.02633, \
0.03236, 0.03760, 0.04065, 0.04169, 0.01310, 0.01336, 0.01412, 0.01488, \
0.01562, 0.01780, 0.02094, 0.02533, 0.03101, 0.03737, 0.04287, 0.04608, \
0.04717 ");
}
}
capacitance () {
top_plane: AIR;
bottom_plane: SUBSTRATE;
lateral_capacitance (capacitance_template_WxS) {
index_1 (" 0.8000, 0.9000, 1.5000, 1.6000, 3.2000 ");
index_2 (" 0.8000, 0.9000, 1.2000, 1.5000, 1.8000, 2.7000, 4.0500, 6.0750, \
9.1125, 13.6688, 20.5031, 30.7547, 3075.4688 ");
values (" 0.08144, 0.07418, 0.05926, 0.04993, 0.04348, 0.03197, 0.02326, 0.01636, \
0.01073, 0.00621, 0.00291, 0.00096, 0.00000, 0.08222, 0.07491, 0.05990, \
0.05049, 0.04398, 0.03235, 0.02353, 0.01654, 0.01084, 0.00627, 0.00293, \
0.00097, 0.00000, 0.08582, 0.07834, 0.06290, 0.05317, 0.04639, 0.03417, \
0.02482, 0.01738, 0.01135, 0.00655, 0.00306, 0.00101, 0.00000, 0.08628, \
0.07879, 0.06330, 0.05352, 0.04671, 0.03442, 0.02499, 0.01749, 0.01141, \
0.00658, 0.00307, 0.00102, 0.00000, 0.09117, 0.08347, 0.06745, 0.05724, \
0.05006, 0.03695, 0.02677, 0.01865, 0.01212, 0.00697, 0.00325, 0.00108, \
0.00000 ");
}
ground_capacitance (capacitance_template_WxS) {
index_1 (" 0.8000, 0.9000, 1.5000, 1.6000, 3.2000 ");
index_2 (" 0.8000, 0.9000, 1.2000, 1.5000, 1.8000, 2.7000, 4.0500, 6.0750, \
9.1125, 13.6688, 20.5031, 30.7547, 3075.4688 ");
values (" 0.00602, 0.00632, 0.00714, 0.00789, 0.00856, 0.01029, 0.01246, 0.01538, \
0.01938, 0.02433, 0.02929, 0.03282, 0.03463, 0.00630, 0.00658, 0.00737, \
0.00809, 0.00874, 0.01044, 0.01260, 0.01554, 0.01959, 0.02459, 0.02959, \
0.03315, 0.03498, 0.00764, 0.00787, 0.00852, 0.00913, 0.00970, 0.01129, \
0.01349, 0.01659, 0.02084, 0.02607, 0.03128, 0.03500, 0.03691, 0.00783, \
0.00805, 0.00869, 0.00928, 0.00985, 0.01144, 0.01364, 0.01677, 0.02105, \
0.02631, 0.03155, 0.03528, 0.03721, 0.01050, 0.01070, 0.01127, 0.01184, \
0.01240, 0.01404, 0.01642, 0.01981, 0.02442, 0.03002, 0.03556, 0.03950, \
0.04153 ");
}
}
}
layer (metal9) {
resistance: 0.030000
capacitance () {
top_plane: metal10;
bottom_plane: metal8;
lateral_capacitance (capacitance_template_WxS) {
index_1 (" 0.8000, 0.9000, 1.5000, 1.6000, 3.2000 ");
index_2 (" 0.8000, 0.9000, 1.2000, 1.5000, 1.8000, 2.7000, 4.0500, 6.0750, \
9.1125, 13.6688, 20.5031, 30.7547, 3075.4688 ");
values (" 0.06581, 0.05816, 0.04229, 0.03223, 0.02526, 0.01314, 0.00535, 0.00146, \
0.00022, 0.00001, 0.00000, 0.00000, 0.00000, 0.06600, 0.05833, 0.04242, \
0.03233, 0.02534, 0.01318, 0.00536, 0.00146, 0.00022, 0.00001, 0.00000, \
0.00000, 0.00000, 0.06662, 0.05889, 0.04284, 0.03266, 0.02559, 0.01332, \
0.00542, 0.00148, 0.00022, 0.00001, 0.00000, 0.00000, 0.00000, 0.06667, \
0.05894, 0.04287, 0.03268, 0.02561, 0.01333, 0.00543, 0.00148, 0.00022, \
0.00001, 0.00000, 0.00000, 0.00000, 0.06696, 0.05920, 0.04307, 0.03284, \
0.02574, 0.01340, 0.00546, 0.00149, 0.00022, 0.00001, 0.00000, 0.00000, \
0.00000 ");
}
ground_capacitance (capacitance_template_WxS) {
index_1 (" 0.8000, 0.9000, 1.5000, 1.6000, 3.2000 ");
index_2 (" 0.8000, 0.9000, 1.2000, 1.5000, 1.8000, 2.7000, 4.0500, 6.0750, \
9.1125, 13.6688, 20.5031, 30.7547, 3075.4688 ");
values (" 0.05787, 0.06066, 0.06849, 0.07548, 0.08172, 0.09622, 0.10872, 0.11609, \
0.11864, 0.11908, 0.11911, 0.11915, 0.11875, 0.06159, 0.06439, 0.07224, \
0.07925, 0.08552, 0.10005, 0.11259, 0.11998, 0.12255, 0.12299, 0.12302, \
0.12306, 0.12266, 0.08410, 0.08694, 0.09488, 0.10196, 0.10828, 0.12296, \
0.13562, 0.14309, 0.14568, 0.14613, 0.14616, 0.14620, 0.14580, 0.08787, \
0.09071, 0.09866, 0.10575, 0.11208, 0.12676, 0.13943, 0.14691, 0.14951, \
0.14995, 0.14998, 0.15003, 0.14962, 0.14861, 0.15147, 0.15946, 0.16658, \
0.17294, 0.18768, 0.20042, 0.20794, 0.21054, 0.21099, 0.21102, 0.21107, \
0.21066 ");
}
}
capacitance () {
top_plane: metal10;
bottom_plane: metal7;
lateral_capacitance (capacitance_template_WxS) {
index_1 (" 0.8000, 0.9000, 1.5000, 1.6000, 3.2000 ");
index_2 (" 0.8000, 0.9000, 1.2000, 1.5000, 1.8000, 2.7000, 4.0500, 6.0750, \
9.1125, 13.6688, 20.5031, 30.7547, 3075.4688 ");
values (" 0.07181, 0.06422, 0.04843, 0.03835, 0.03125, 0.01844, 0.00919, 0.00343, \
0.00081, 0.00010, 0.00000, 0.00000, 0.00000, 0.07218, 0.06456, 0.04870, \
0.03855, 0.03142, 0.01853, 0.00924, 0.00345, 0.00082, 0.00010, 0.00000, \
0.00000, 0.00000, 0.07354, 0.06580, 0.04965, 0.03931, 0.03203, 0.01888, \
0.00941, 0.00351, 0.00083, 0.00010, 0.00000, 0.00000, 0.00000, 0.07366, \
0.06591, 0.04974, 0.03938, 0.03209, 0.01891, 0.00943, 0.00352, 0.00083, \
0.00010, 0.00000, 0.00000, 0.00000, 0.07444, 0.06662, 0.05028, 0.03981, \
0.03244, 0.01912, 0.00952, 0.00355, 0.00084, 0.00010, 0.00000, 0.00000, \
0.00000 ");
}
ground_capacitance (capacitance_template_WxS) {
index_1 (" 0.8000, 0.9000, 1.5000, 1.6000, 3.2000 ");
index_2 (" 0.8000, 0.9000, 1.2000, 1.5000, 1.8000, 2.7000, 4.0500, 6.0750, \
9.1125, 13.6688, 20.5031, 30.7547, 3075.4688 ");
values (" 0.03274, 0.03440, 0.03924, 0.04385, 0.04821, 0.05960, 0.07182, 0.08164, \
0.08676, 0.08825, 0.08845, 0.08849, 0.08816, 0.03458, 0.03625, 0.04113, \
0.04577, 0.05017, 0.06162, 0.07391, 0.08378, 0.08892, 0.09042, 0.09062, \
0.09066, 0.09033, 0.04599, 0.04771, 0.05274, 0.05751, 0.06201, 0.07371, \
0.08623, 0.09628, 0.10152, 0.10305, 0.10326, 0.10329, 0.10295, 0.04793, \
0.04966, 0.05470, 0.05948, 0.06399, 0.07572, 0.08826, 0.09833, 0.10358, \
0.10511, 0.10532, 0.10535, 0.10502, 0.07972, 0.08149, 0.08663, 0.09149, \
0.09606, 0.10794, 0.12062, 0.13079, 0.13609, 0.13763, 0.13785, 0.13788, \
0.13754 ");
}
}
capacitance () {
top_plane: metal10;
bottom_plane: metal6;
lateral_capacitance (capacitance_template_WxS) {
index_1 (" 0.8000, 0.9000, 1.5000, 1.6000, 3.2000 ");
index_2 (" 0.8000, 0.9000, 1.2000, 1.5000, 1.8000, 2.7000, 4.0500, 6.0750, \
9.1125, 13.6688, 20.5031, 30.7547, 3075.4688 ");
values (" 0.07305, 0.06552, 0.04987, 0.03989, 0.03288, 0.02018, 0.01080, 0.00455, \
0.00130, 0.00021, 0.00001, 0.00000, 0.00000, 0.07350, 0.06593, 0.05019, \
0.04016, 0.03311, 0.02032, 0.01088, 0.00458, 0.00131, 0.00021, 0.00001, \
0.00000, 0.00000, 0.07525, 0.06755, 0.05149, 0.04123, 0.03400, 0.02087, \
0.01118, 0.00471, 0.00135, 0.00022, 0.00002, 0.00000, 0.00000, 0.07543, \
0.06771, 0.05163, 0.04134, 0.03409, 0.02093, 0.01121, 0.00473, 0.00136, \
0.00022, 0.00002, 0.00000, 0.00000, 0.07678, 0.06897, 0.05265, 0.04219, \
0.03480, 0.02138, 0.01146, 0.00483, 0.00139, 0.00022, 0.00002, 0.00000, \
0.00000 ");
}
ground_capacitance (capacitance_template_WxS) {
index_1 (" 0.8000, 0.9000, 1.5000, 1.6000, 3.2000 ");
index_2 (" 0.8000, 0.9000, 1.2000, 1.5000, 1.8000, 2.7000, 4.0500, 6.0750, \
9.1125, 13.6688, 20.5031, 30.7547, 3075.4688 ");
values (" 0.02905, 0.03048, 0.03467, 0.03866, 0.04246, 0.05254, 0.06389, 0.07393, \
0.08006, 0.08231, 0.08273, 0.08278, 0.08247, 0.03060, 0.03205, 0.03626, \
0.04028, 0.04410, 0.05425, 0.06567, 0.07578, 0.08196, 0.08422, 0.08465, \
0.08470, 0.08438, 0.04021, 0.04170, 0.04604, 0.05017, 0.05410, 0.06452, \
0.07624, 0.08661, 0.09297, 0.09530, 0.09573, 0.09579, 0.09547, 0.04185, \
0.04334, 0.04769, 0.05184, 0.05579, 0.06623, 0.07798, 0.08839, 0.09476, \
0.09710, 0.09753, 0.09759, 0.09727, 0.06886, 0.07040, 0.07486, 0.07911, \
0.08314, 0.09382, 0.10580, 0.11643, 0.12294, 0.12533, 0.12578, 0.12583, \
0.12551 ");
}
}
capacitance () {
top_plane: metal10;
bottom_plane: metal5;
lateral_capacitance (capacitance_template_WxS) {
index_1 (" 0.8000, 0.9000, 1.5000, 1.6000, 3.2000 ");
index_2 (" 0.8000, 0.9000, 1.2000, 1.5000, 1.8000, 2.7000, 4.0500, 6.0750, \
9.1125, 13.6688, 20.5031, 30.7547, 3075.4688 ");
values (" 0.07344, 0.06592, 0.05032, 0.04039, 0.03342, 0.02080, 0.01143, 0.00504, \
0.00156, 0.00028, 0.00002, 0.00000, 0.00000, 0.07391, 0.06636, 0.05068, \
0.04069, 0.03367, 0.02096, 0.01152, 0.00508, 0.00157, 0.00029, 0.00002, \
0.00000, 0.00000, 0.07581, 0.06812, 0.05211, 0.04188, 0.03468, 0.02161, \
0.01189, 0.00525, 0.00163, 0.00030, 0.00003, 0.00000, 0.00000, 0.07601, \
0.06831, 0.05227, 0.04201, 0.03479, 0.02168, 0.01193, 0.00527, 0.00164, \
0.00030, 0.00003, 0.00000, 0.00000, 0.07763, 0.06983, 0.05353, 0.04308, \
0.03570, 0.02228, 0.01227, 0.00543, 0.00169, 0.00031, 0.00003, 0.00000, \
0.00000 ");
}
ground_capacitance (capacitance_template_WxS) {
index_1 (" 0.8000, 0.9000, 1.5000, 1.6000, 3.2000 ");
index_2 (" 0.8000, 0.9000, 1.2000, 1.5000, 1.8000, 2.7000, 4.0500, 6.0750, \
9.1125, 13.6688, 20.5031, 30.7547, 3075.4688 ");
values (" 0.02796, 0.02933, 0.03331, 0.03711, 0.04072, 0.05032, 0.06127, 0.07127, \
0.07775, 0.08035, 0.08090, 0.08097, 0.08066, 0.02944, 0.03081, 0.03482, \
0.03863, 0.04227, 0.05194, 0.06296, 0.07303, 0.07956, 0.08218, 0.08274, \
0.08281, 0.08250, 0.03851, 0.03992, 0.04403, 0.04796, 0.05169, 0.06162, \
0.07296, 0.08332, 0.09007, 0.09278, 0.09336, 0.09343, 0.09312, 0.04005, \
0.04147, 0.04560, 0.04953, 0.05328, 0.06324, 0.07461, 0.08501, 0.09178, \
0.09450, 0.09508, 0.09516, 0.09484, 0.06555, 0.06700, 0.07124, 0.07528, \
0.07912, 0.08933, 0.10098, 0.11166, 0.11863, 0.12144, 0.12204, 0.12211, \
0.12179 ");
}
}
capacitance () {
top_plane: metal10;
bottom_plane: SUBSTRATE;
lateral_capacitance (capacitance_template_WxS) {
index_1 (" 0.8000, 0.9000, 1.5000, 1.6000, 3.2000 ");
index_2 (" 0.8000, 0.9000, 1.2000, 1.5000, 1.8000, 2.7000, 4.0500, 6.0750, \
9.1125, 13.6688, 20.5031, 30.7547, 3075.4688 ");
values (" 0.07419, 0.06671, 0.05121, 0.04138, 0.03450, 0.02209, 0.01283, 0.00629, \
0.00234, 0.00057, 0.00007, 0.00000, 0.00000, 0.07471, 0.06719, 0.05161, \
0.04172, 0.03480, 0.02229, 0.01296, 0.00636, 0.00237, 0.00058, 0.00007, \
0.00000, 0.00000, 0.07689, 0.06924, 0.05334, 0.04321, 0.03609, 0.02320, \
0.01353, 0.00667, 0.00249, 0.00061, 0.00008, 0.00000, 0.00000, 0.07715, \
0.06948, 0.05355, 0.04338, 0.03625, 0.02331, 0.01360, 0.00670, 0.00251, \
0.00061, 0.00008, 0.00000, 0.00000, 0.07945, 0.07168, 0.05545, 0.04505, \
0.03772, 0.02437, 0.01429, 0.00708, 0.00266, 0.00065, 0.00008, 0.00000, \
0.00000 ");
}
ground_capacitance (capacitance_template_WxS) {
index_1 (" 0.8000, 0.9000, 1.5000, 1.6000, 3.2000 ");
index_2 (" 0.8000, 0.9000, 1.2000, 1.5000, 1.8000, 2.7000, 4.0500, 6.0750, \
9.1125, 13.6688, 20.5031, 30.7547, 3075.4688 ");
values (" 0.02595, 0.02719, 0.03081, 0.03423, 0.03747, 0.04608, 0.05604, 0.06565, \
0.07269, 0.07620, 0.07723, 0.07741, 0.07711, 0.02727, 0.02852, 0.03215, \
0.03558, 0.03884, 0.04750, 0.05753, 0.06722, 0.07433, 0.07788, 0.07892, \
0.07910, 0.07881, 0.03537, 0.03664, 0.04032, 0.04382, 0.04715, 0.05603, \
0.06637, 0.07641, 0.08384, 0.08756, 0.08867, 0.08885, 0.08855, 0.03674, \
0.03801, 0.04170, 0.04521, 0.04855, 0.05745, 0.06783, 0.07792, 0.08538, \
0.08913, 0.09024, 0.09042, 0.09013, 0.05927, 0.06056, 0.06433, 0.06792, \
0.07134, 0.08050, 0.09123, 0.10175, 0.10960, 0.11357, 0.11475, 0.11494, \
0.11464 ");
}
}
capacitance () {
top_plane: AIR;
bottom_plane: metal8;
lateral_capacitance (capacitance_template_WxS) {
index_1 (" 0.8000, 0.9000, 1.5000, 1.6000, 3.2000 ");
index_2 (" 0.8000, 0.9000, 1.2000, 1.5000, 1.8000, 2.7000, 4.0500, 6.0750, \
9.1125, 13.6688, 20.5031, 30.7547, 3075.4688 ");
values (" 0.07049, 0.06302, 0.04766, 0.03806, 0.03148, 0.02010, 0.01228, 0.00708, \
0.00371, 0.00162, 0.00051, 0.00009, 0.00000, 0.07093, 0.06344, 0.04804, \
0.03841, 0.03181, 0.02038, 0.01250, 0.00723, 0.00380, 0.00166, 0.00052, \
0.00010, 0.00000, 0.07308, 0.06553, 0.04996, 0.04021, 0.03350, 0.02181, \
0.01363, 0.00803, 0.00428, 0.00188, 0.00059, 0.00011, 0.00000, 0.07338, \
0.06582, 0.05024, 0.04047, 0.03374, 0.02202, 0.01380, 0.00815, 0.00435, \
0.00192, 0.00060, 0.00011, 0.00000, 0.07713, 0.06949, 0.05368, 0.04372, \
0.03683, 0.02468, 0.01593, 0.00968, 0.00527, 0.00235, 0.00074, 0.00014, \
0.00000 ");
}
ground_capacitance (capacitance_template_WxS) {
index_1 (" 0.8000, 0.9000, 1.5000, 1.6000, 3.2000 ");
index_2 (" 0.8000, 0.9000, 1.2000, 1.5000, 1.8000, 2.7000, 4.0500, 6.0750, \
9.1125, 13.6688, 20.5031, 30.7547, 3075.4688 ");
values (" 0.04474, 0.04679, 0.05239, 0.05724, 0.06147, 0.07115, 0.08029, 0.08792, \
0.09365, 0.09756, 0.09977, 0.10066, 0.10051, 0.04753, 0.04957, 0.05514, \
0.05995, 0.06416, 0.07382, 0.08298, 0.09068, 0.09650, 0.10050, 0.10276, \
0.10368, 0.10353, 0.06396, 0.06593, 0.07133, 0.07602, 0.08013, 0.08970, \
0.09899, 0.10704, 0.11335, 0.11781, 0.12036, 0.12140, 0.12128, 0.06666, \
0.06862, 0.07400, 0.07867, 0.08278, 0.09233, 0.10164, 0.10975, 0.11613, \
0.12065, 0.12325, 0.12430, 0.12419, 0.10922, 0.11112, 0.11635, 0.12091, \
0.12494, 0.13447, 0.14406, 0.15282, 0.16013, 0.16553, 0.16870, 0.16998, \
0.16992 ");
}
}
capacitance () {
top_plane: AIR;
bottom_plane: metal7;
lateral_capacitance (capacitance_template_WxS) {
index_1 (" 0.8000, 0.9000, 1.5000, 1.6000, 3.2000 ");
index_2 (" 0.8000, 0.9000, 1.2000, 1.5000, 1.8000, 2.7000, 4.0500, 6.0750, \
9.1125, 13.6688, 20.5031, 30.7547, 3075.4688 ");
values (" 0.07694, 0.06954, 0.05427, 0.04465, 0.03797, 0.02609, 0.01735, 0.01093, \
0.00629, 0.00308, 0.00114, 0.00027, 0.00000, 0.07755, 0.07012, 0.05477, \
0.04509, 0.03838, 0.02642, 0.01760, 0.01111, 0.00640, 0.00314, 0.00116, \
0.00027, 0.00000, 0.08035, 0.07279, 0.05714, 0.04725, 0.04036, 0.02802, \
0.01884, 0.01200, 0.00697, 0.00343, 0.00127, 0.00030, 0.00000, 0.08072, \
0.07314, 0.05746, 0.04754, 0.04063, 0.02824, 0.01902, 0.01213, 0.00705, \
0.00348, 0.00129, 0.00030, 0.00000, 0.08484, 0.07715, 0.06115, 0.05098, \
0.04385, 0.03096, 0.02120, 0.01374, 0.00809, 0.00401, 0.00149, 0.00035, \
0.00000 ");
}
ground_capacitance (capacitance_template_WxS) {
index_1 (" 0.8000, 0.9000, 1.5000, 1.6000, 3.2000 ");
index_2 (" 0.8000, 0.9000, 1.2000, 1.5000, 1.8000, 2.7000, 4.0500, 6.0750, \
9.1125, 13.6688, 20.5031, 30.7547, 3075.4688 ");
values (" 0.01839, 0.01930, 0.02193, 0.02437, 0.02665, 0.03254, 0.03932, 0.04638, \
0.05298, 0.05840, 0.06207, 0.06385, 0.06415, 0.01935, 0.02026, 0.02286, \
0.02527, 0.02753, 0.03340, 0.04020, 0.04731, 0.05398, 0.05949, 0.06323, \
0.06503, 0.06535, 0.02488, 0.02574, 0.02822, 0.03054, 0.03273, 0.03853, \
0.04539, 0.05274, 0.05979, 0.06572, 0.06980, 0.07177, 0.07214, 0.02577, \
0.02663, 0.02909, 0.03140, 0.03359, 0.03937, 0.04624, 0.05362, 0.06073, \
0.06673, 0.07085, 0.07285, 0.07322, 0.03966, 0.04046, 0.04282, 0.04505, \
0.04717, 0.05290, 0.05989, 0.06768, 0.07546, 0.08223, 0.08696, 0.08927, \
0.08974 ");
}
}
capacitance () {
top_plane: AIR;
bottom_plane: metal6;
lateral_capacitance (capacitance_template_WxS) {
index_1 (" 0.8000, 0.9000, 1.5000, 1.6000, 3.2000 ");
index_2 (" 0.8000, 0.9000, 1.2000, 1.5000, 1.8000, 2.7000, 4.0500, 6.0750, \
9.1125, 13.6688, 20.5031, 30.7547, 3075.4688 ");
values (" 0.07849, 0.07114, 0.05600, 0.04649, 0.03989, 0.02814, 0.01939, 0.01277, \
0.00773, 0.00403, 0.00162, 0.00043, 0.00000, 0.07917, 0.07178, 0.05656, \
0.04699, 0.04035, 0.02850, 0.01966, 0.01296, 0.00786, 0.00410, 0.00165, \
0.00044, 0.00000, 0.08231, 0.07479, 0.05923, 0.04940, 0.04256, 0.03027, \
0.02103, 0.01394, 0.00849, 0.00444, 0.00179, 0.00048, 0.00000, 0.08272, \
0.07518, 0.05959, 0.04973, 0.04286, 0.03052, 0.02122, 0.01408, 0.00858, \
0.00449, 0.00181, 0.00048, 0.00000, 0.08734, 0.07965, 0.06368, 0.05351, \
0.04637, 0.03343, 0.02351, 0.01576, 0.00968, 0.00509, 0.00206, 0.00055, \
0.00000 ");
}
ground_capacitance (capacitance_template_WxS) {
index_1 (" 0.8000, 0.9000, 1.5000, 1.6000, 3.2000 ");
index_2 (" 0.8000, 0.9000, 1.2000, 1.5000, 1.8000, 2.7000, 4.0500, 6.0750, \
9.1125, 13.6688, 20.5031, 30.7547, 3075.4688 ");
values (" 0.01398, 0.01467, 0.01665, 0.01849, 0.02021, 0.02471, 0.03011, 0.03619, \
0.04249, 0.04829, 0.05265, 0.05502, 0.05570, 0.01467, 0.01535, 0.01730, \
0.01911, 0.02081, 0.02529, 0.03069, 0.03682, 0.04319, 0.04906, 0.05350, \
0.05590, 0.05660, 0.01854, 0.01917, 0.02097, 0.02267, 0.02429, 0.02867, \
0.03413, 0.04047, 0.04719, 0.05346, 0.05825, 0.06085, 0.06162, 0.01915, \
0.01977, 0.02155, 0.02325, 0.02486, 0.02923, 0.03470, 0.04107, 0.04783, \
0.05417, 0.05900, 0.06164, 0.06241, 0.02846, 0.02903, 0.03071, 0.03234, \
0.03390, 0.03823, 0.04383, 0.05056, 0.05791, 0.06495, 0.07040, 0.07339, \
0.07429 ");
}
}
capacitance () {
top_plane: AIR;
bottom_plane: metal5;
lateral_capacitance (capacitance_template_WxS) {
index_1 (" 0.8000, 0.9000, 1.5000, 1.6000, 3.2000 ");
index_2 (" 0.8000, 0.9000, 1.2000, 1.5000, 1.8000, 2.7000, 4.0500, 6.0750, \
9.1125, 13.6688, 20.5031, 30.7547, 3075.4688 ");
values (" 0.07903, 0.07169, 0.05660, 0.04713, 0.04058, 0.02890, 0.02019, 0.01354, \
0.00839, 0.00450, 0.00189, 0.00053, 0.00000, 0.07973, 0.07236, 0.05718, \
0.04765, 0.04105, 0.02927, 0.02047, 0.01374, 0.00852, 0.00458, 0.00192, \
0.00054, 0.00000, 0.08299, 0.07548, 0.05997, 0.05017, 0.04336, 0.03113, \
0.02190, 0.01476, 0.00918, 0.00494, 0.00207, 0.00058, 0.00000, 0.08342, \
0.07590, 0.06034, 0.05052, 0.04367, 0.03139, 0.02210, 0.01490, 0.00928, \
0.00499, 0.00209, 0.00059, 0.00000, 0.08827, 0.08059, 0.06463, 0.05447, \
0.04735, 0.03442, 0.02447, 0.01664, 0.01041, 0.00562, 0.00236, 0.00067, \
0.00000 ");
}
ground_capacitance (capacitance_template_WxS) {
index_1 (" 0.8000, 0.9000, 1.5000, 1.6000, 3.2000 ");
index_2 (" 0.8000, 0.9000, 1.2000, 1.5000, 1.8000, 2.7000, 4.0500, 6.0750, \
9.1125, 13.6688, 20.5031, 30.7547, 3075.4688 ");
values (" 0.01254, 0.01317, 0.01495, 0.01660, 0.01813, 0.02215, 0.02700, 0.03260, \
0.03864, 0.04448, 0.04911, 0.05178, 0.05267, 0.01316, 0.01377, 0.01552, \
0.01713, 0.01865, 0.02264, 0.02749, 0.03312, 0.03923, 0.04515, 0.04985, \
0.05256, 0.05347, 0.01655, 0.01710, 0.01869, 0.02019, 0.02161, 0.02548, \
0.03037, 0.03621, 0.04265, 0.04896, 0.05401, 0.05693, 0.05793, 0.01708, \
0.01762, 0.01919, 0.02068, 0.02209, 0.02595, 0.03085, 0.03671, 0.04320, \
0.04957, 0.05467, 0.05762, 0.05863, 0.02497, 0.02547, 0.02693, 0.02834, \
0.02971, 0.03353, 0.03856, 0.04477, 0.05182, 0.05887, 0.06458, 0.06790, \
0.06906 ");
}
}
capacitance () {
top_plane: AIR;
bottom_plane: SUBSTRATE;
lateral_capacitance (capacitance_template_WxS) {
index_1 (" 0.8000, 0.9000, 1.5000, 1.6000, 3.2000 ");
index_2 (" 0.8000, 0.9000, 1.2000, 1.5000, 1.8000, 2.7000, 4.0500, 6.0750, \
9.1125, 13.6688, 20.5031, 30.7547, 3075.4688 ");
values (" 0.08020, 0.07291, 0.05793, 0.04855, 0.04208, 0.03060, 0.02207, 0.01548, \
0.01018, 0.00592, 0.00277, 0.00092, 0.00000, 0.08094, 0.07361, 0.05855, \
0.04911, 0.04259, 0.03101, 0.02238, 0.01571, 0.01033, 0.00600, 0.00281, \
0.00093, 0.00000, 0.08446, 0.07698, 0.06156, 0.05186, 0.04512, 0.03307, \
0.02397, 0.01685, 0.01109, 0.00644, 0.00301, 0.00100, 0.00000, 0.08493, \
0.07744, 0.06198, 0.05224, 0.04547, 0.03335, 0.02420, 0.01701, 0.01119, \
0.00650, 0.00304, 0.00101, 0.00000, 0.09034, 0.08268, 0.06678, 0.05668, \
0.04960, 0.03676, 0.02685, 0.01894, 0.01247, 0.00723, 0.00338, 0.00112, \
0.00000 ");
}
ground_capacitance (capacitance_template_WxS) {
index_1 (" 0.8000, 0.9000, 1.5000, 1.6000, 3.2000 ");
index_2 (" 0.8000, 0.9000, 1.2000, 1.5000, 1.8000, 2.7000, 4.0500, 6.0750, \
9.1125, 13.6688, 20.5031, 30.7547, 3075.4688 ");
values (" 0.00952, 0.01001, 0.01139, 0.01267, 0.01384, 0.01688, 0.02050, 0.02480, \
0.02987, 0.03545, 0.04058, 0.04407, 0.04576, 0.01000, 0.01047, 0.01182, \
0.01306, 0.01421, 0.01720, 0.02081, 0.02513, 0.03026, 0.03590, 0.04110, \
0.04464, 0.04636, 0.01253, 0.01293, 0.01410, 0.01520, 0.01624, 0.01903, \
0.02260, 0.02707, 0.03248, 0.03849, 0.04404, 0.04782, 0.04967, 0.01290, \
0.01330, 0.01445, 0.01553, 0.01655, 0.01933, 0.02289, 0.02739, 0.03284, \
0.03890, 0.04450, 0.04832, 0.05019, 0.01814, 0.01848, 0.01948, 0.02046, \
0.02140, 0.02409, 0.02775, 0.03256, 0.03852, 0.04519, 0.05139, 0.05562, \
0.05772 ");
}
}
}
layer (metal8) {
resistance: 0.075000
capacitance () {
top_plane: metal9;
bottom_plane: metal7;
lateral_capacitance (capacitance_template_WxS) {
index_1 (" 0.4000, 0.5000, 0.8000, 0.9000, 1.5000, 1.6000 ");
index_2 (" 0.4000, 0.5000, 0.6000, 0.9000, 1.3500, 1.5000, 2.0250, 3.0375, \
4.5563, 6.8344, 10.2516, 15.3773, 1537.7344 ");
values (" 0.05816, 0.04643, 0.03813, 0.02327, 0.01237, 0.01014, 0.00514, 0.00144, \
0.00022, 0.00002, 0.00000, 0.00000, 0.00000, 0.05862, 0.04679, 0.03843, \
0.02344, 0.01246, 0.01021, 0.00518, 0.00145, 0.00023, 0.00002, 0.00000, \
0.00000, 0.00000, 0.05924, 0.04729, 0.03883, 0.02368, 0.01258, 0.01031, \
0.00523, 0.00146, 0.00023, 0.00002, 0.00000, 0.00000, 0.00000, 0.05934, \
0.04737, 0.03889, 0.02372, 0.01260, 0.01033, 0.00524, 0.00147, 0.00023, \
0.00002, 0.00000, 0.00000, 0.00000, 0.05952, 0.04751, 0.03901, 0.02379, \
0.01264, 0.01036, 0.00525, 0.00147, 0.00023, 0.00002, 0.00000, 0.00000, \
0.00000, 0.05952, 0.04751, 0.03901, 0.02379, 0.01264, 0.01036, 0.00525, \
0.00147, 0.00023, 0.00002, 0.00000, 0.00000, 0.00000 ");
}
ground_capacitance (capacitance_template_WxS) {
index_1 (" 0.4000, 0.5000, 0.8000, 0.9000, 1.5000, 1.6000 ");
index_2 (" 0.4000, 0.5000, 0.6000, 0.9000, 1.3500, 1.5000, 2.0250, 3.0375, \
4.5563, 6.8344, 10.2516, 15.3773, 1537.7344 ");
values (" 0.04236, 0.04670, 0.05081, 0.06192, 0.07468, 0.07794, 0.08613, 0.09320, \
0.09569, 0.09613, 0.09615, 0.09588, 0.09589, 0.04754, 0.05193, 0.05608, \
0.06730, 0.08015, 0.08344, 0.09169, 0.09881, 0.10132, 0.10176, 0.10178, \
0.10151, 0.10151, 0.06340, 0.06787, 0.07209, 0.08345, 0.09645, 0.09977, \
0.10810, 0.11529, 0.11782, 0.11827, 0.11829, 0.11801, 0.11802, 0.06875, \
0.07323, 0.07746, 0.08885, 0.10186, 0.10519, 0.11354, 0.12073, 0.12327, \
0.12371, 0.12374, 0.12346, 0.12347, 0.10104, 0.10554, 0.10980, 0.12123, \
0.13429, 0.13762, 0.14599, 0.15320, 0.15575, 0.15620, 0.15622, 0.15594, \
0.15595, 0.10642, 0.11093, 0.11519, 0.12662, 0.13968, 0.14301, 0.15138, \
0.15859, 0.16114, 0.16159, 0.16161, 0.16133, 0.16134 ");
}
}
capacitance () {
top_plane: metal9;
bottom_plane: metal6;
lateral_capacitance (capacitance_template_WxS) {
index_1 (" 0.4000, 0.5000, 0.8000, 0.9000, 1.5000, 1.6000 ");
index_2 (" 0.4000, 0.5000, 0.6000, 0.9000, 1.3500, 1.5000, 2.0250, 3.0375, \
4.5563, 6.8344, 10.2516, 15.3773, 1537.7344 ");
values (" 0.06139, 0.04987, 0.04175, 0.02722, 0.01631, 0.01398, 0.00838, 0.00332, \
0.00088, 0.00013, 0.00001, 0.00000, 0.00000, 0.06219, 0.05055, 0.04235, \
0.02763, 0.01657, 0.01420, 0.00852, 0.00338, 0.00089, 0.00013, 0.00001, \
0.00000, 0.00000, 0.06364, 0.05181, 0.04344, 0.02840, 0.01706, 0.01462, \
0.00878, 0.00349, 0.00092, 0.00013, 0.00001, 0.00000, 0.00000, 0.06395, \
0.05208, 0.04368, 0.02857, 0.01717, 0.01472, 0.00884, 0.00352, 0.00093, \
0.00013, 0.00001, 0.00000, 0.00000, 0.06493, 0.05294, 0.04444, 0.02912, \
0.01752, 0.01503, 0.00904, 0.00360, 0.00095, 0.00014, 0.00001, 0.00000, \
0.00000, 0.06500, 0.05300, 0.04450, 0.02916, 0.01755, 0.01505, 0.00905, \
0.00361, 0.00095, 0.00014, 0.00001, 0.00000, 0.00000 ");
}
ground_capacitance (capacitance_template_WxS) {
index_1 (" 0.4000, 0.5000, 0.8000, 0.9000, 1.5000, 1.6000 ");
index_2 (" 0.4000, 0.5000, 0.6000, 0.9000, 1.3500, 1.5000, 2.0250, 3.0375, \
4.5563, 6.8344, 10.2516, 15.3773, 1537.7344 ");
values (" 0.03201, 0.03515, 0.03814, 0.04639, 0.05656, 0.05938, 0.06721, 0.07586, \
0.08061, 0.08215, 0.08240, 0.08217, 0.08217, 0.03554, 0.03871, 0.04174, \
0.05009, 0.06039, 0.06324, 0.07119, 0.07997, 0.08479, 0.08637, 0.08662, \
0.08638, 0.08639, 0.04643, 0.04967, 0.05276, 0.06130, 0.07184, 0.07477, \
0.08292, 0.09196, 0.09694, 0.09857, 0.09884, 0.09859, 0.09860, 0.05013, \
0.05338, 0.05649, 0.06508, 0.07567, 0.07861, 0.08681, 0.09590, 0.10092, \
0.10256, 0.10283, 0.10258, 0.10259, 0.07273, 0.07603, 0.07919, 0.08791, \
0.09867, 0.10167, 0.11002, 0.11930, 0.12443, 0.12611, 0.12638, 0.12614, \
0.12614, 0.07653, 0.07984, 0.08300, 0.09173, 0.10251, 0.10551, 0.11387, \
0.12316, 0.12830, 0.12999, 0.13026, 0.13002, 0.13002 ");
}
}
capacitance () {
top_plane: metal9;
bottom_plane: metal5;
lateral_capacitance (capacitance_template_WxS) {
index_1 (" 0.4000, 0.5000, 0.8000, 0.9000, 1.5000, 1.6000 ");
index_2 (" 0.4000, 0.5000, 0.6000, 0.9000, 1.3500, 1.5000, 2.0250, 3.0375, \
4.5563, 6.8344, 10.2516, 15.3773, 1537.7344 ");
values (" 0.06195, 0.05049, 0.04242, 0.02803, 0.01724, 0.01493, 0.00932, 0.00406, \
0.00125, 0.00023, 0.00002, 0.00000, 0.00000, 0.06283, 0.05125, 0.04309, \
0.02851, 0.01756, 0.01521, 0.00951, 0.00415, 0.00128, 0.00024, 0.00002, \
0.00000, 0.00000, 0.06450, 0.05273, 0.04441, 0.02948, 0.01823, 0.01580, \
0.00990, 0.00433, 0.00134, 0.00025, 0.00002, 0.00000, 0.00000, 0.06489, \
0.05307, 0.04472, 0.02971, 0.01838, 0.01594, 0.01000, 0.00438, 0.00136, \
0.00025, 0.00002, 0.00000, 0.00000, 0.06624, 0.05428, 0.04581, 0.03055, \
0.01896, 0.01645, 0.01035, 0.00455, 0.00141, 0.00026, 0.00002, 0.00000, \
0.00000, 0.06636, 0.05439, 0.04591, 0.03063, 0.01902, 0.01650, 0.01038, \
0.00456, 0.00142, 0.00026, 0.00002, 0.00000, 0.00000 ");
}
ground_capacitance (capacitance_template_WxS) {
index_1 (" 0.4000, 0.5000, 0.8000, 0.9000, 1.5000, 1.6000 ");
index_2 (" 0.4000, 0.5000, 0.6000, 0.9000, 1.3500, 1.5000, 2.0250, 3.0375, \
4.5563, 6.8344, 10.2516, 15.3773, 1537.7344 ");
values (" 0.03046, 0.03339, 0.03619, 0.04387, 0.05335, 0.05600, 0.06347, 0.07215, \
0.07746, 0.07954, 0.07998, 0.07978, 0.07978, 0.03374, 0.03670, 0.03951, \
0.04728, 0.05687, 0.05956, 0.06715, 0.07597, 0.08140, 0.08353, 0.08398, \
0.08377, 0.08378, 0.04381, 0.04682, 0.04969, 0.05760, 0.06743, 0.07019, \
0.07801, 0.08716, 0.09281, 0.09505, 0.09552, 0.09531, 0.09531, 0.04723, \
0.05024, 0.05312, 0.06108, 0.07096, 0.07373, 0.08161, 0.09083, 0.09655, \
0.09880, 0.09928, 0.09907, 0.09908, 0.06807, 0.07112, 0.07405, 0.08214, \
0.09222, 0.09506, 0.10313, 0.11264, 0.11857, 0.12092, 0.12142, 0.12120, \
0.12121, 0.07158, 0.07464, 0.07757, 0.08567, 0.09577, 0.09861, 0.10671, \
0.11625, 0.12219, 0.12455, 0.12505, 0.12484, 0.12485 ");
}
}
capacitance () {
top_plane: metal9;
bottom_plane: metal4;
lateral_capacitance (capacitance_template_WxS) {
index_1 (" 0.4000, 0.5000, 0.8000, 0.9000, 1.5000, 1.6000 ");
index_2 (" 0.4000, 0.5000, 0.6000, 0.9000, 1.3500, 1.5000, 2.0250, 3.0375, \
4.5563, 6.8344, 10.2516, 15.3773, 1537.7344 ");
values (" 0.06229, 0.05086, 0.04283, 0.02853, 0.01784, 0.01555, 0.00997, 0.00463, \
0.00160, 0.00035, 0.00004, 0.00000, 0.00000, 0.06321, 0.05167, 0.04355, \
0.02906, 0.01821, 0.01588, 0.01020, 0.00474, 0.00164, 0.00036, 0.00004, \
0.00000, 0.00000, 0.06503, 0.05329, 0.04501, 0.03017, 0.01900, 0.01659, \
0.01070, 0.00500, 0.00174, 0.00038, 0.00004, 0.00000, 0.00000, 0.06547, \
0.05368, 0.04536, 0.03045, 0.01920, 0.01677, 0.01083, 0.00507, 0.00176, \
0.00039, 0.00004, 0.00000, 0.00000, 0.06709, 0.05516, 0.04672, 0.03152, \
0.01998, 0.01747, 0.01133, 0.00534, 0.00186, 0.00041, 0.00005, 0.00000, \
0.00000, 0.06725, 0.05531, 0.04686, 0.03163, 0.02006, 0.01755, 0.01138, \
0.00536, 0.00188, 0.00042, 0.00005, 0.00000, 0.00000 ");
}
ground_capacitance (capacitance_template_WxS) {
index_1 (" 0.4000, 0.5000, 0.8000, 0.9000, 1.5000, 1.6000 ");
index_2 (" 0.4000, 0.5000, 0.6000, 0.9000, 1.3500, 1.5000, 2.0250, 3.0375, \
4.5563, 6.8344, 10.2516, 15.3773, 1537.7344 ");
values (" 0.02955, 0.03238, 0.03505, 0.04239, 0.05143, 0.05396, 0.06114, 0.06971, \
0.07533, 0.07784, 0.07849, 0.07833, 0.07834, 0.03270, 0.03553, 0.03823, \
0.04563, 0.05477, 0.05733, 0.06462, 0.07336, 0.07911, 0.08168, 0.08236, \
0.08219, 0.08220, 0.04230, 0.04516, 0.04789, 0.05542, 0.06476, 0.06739, \
0.07492, 0.08401, 0.09006, 0.09278, 0.09350, 0.09334, 0.09334, 0.04555, \
0.04842, 0.05115, 0.05871, 0.06810, 0.07075, 0.07834, 0.08751, 0.09364, \
0.09640, 0.09712, 0.09696, 0.09697, 0.06530, 0.06821, 0.07098, 0.07865, \
0.08824, 0.09095, 0.09877, 0.10831, 0.11473, 0.11765, 0.11841, 0.11825, \
0.11826, 0.06863, 0.07153, 0.07431, 0.08199, 0.09160, 0.09433, 0.10217, \
0.11174, 0.11820, 0.12113, 0.12191, 0.12175, 0.12175 ");
}
}
capacitance () {
top_plane: metal9;
bottom_plane: SUBSTRATE;
lateral_capacitance (capacitance_template_WxS) {
index_1 (" 0.4000, 0.5000, 0.8000, 0.9000, 1.5000, 1.6000 ");
index_2 (" 0.4000, 0.5000, 0.6000, 0.9000, 1.3500, 1.5000, 2.0250, 3.0375, \
4.5563, 6.8344, 10.2516, 15.3773, 1537.7344 ");
values (" 0.06273, 0.05133, 0.04333, 0.02915, 0.01861, 0.01636, 0.01087, 0.00550, \
0.00224, 0.00065, 0.00011, 0.00001, 0.00000, 0.06369, 0.05219, 0.04411, \
0.02974, 0.01905, 0.01676, 0.01116, 0.00567, 0.00231, 0.00068, 0.00012, \
0.00001, 0.00000, 0.06568, 0.05399, 0.04576, 0.03106, 0.02004, 0.01766, \
0.01184, 0.00607, 0.00250, 0.00073, 0.00013, 0.00001, 0.00000, 0.06618, \
0.05445, 0.04618, 0.03140, 0.02030, 0.01790, 0.01202, 0.00618, 0.00255, \
0.00075, 0.00013, 0.00001, 0.00000, 0.06820, 0.05632, 0.04792, 0.03284, \
0.02143, 0.01894, 0.01282, 0.00667, 0.00278, 0.00082, 0.00014, 0.00001, \
0.00000, 0.06842, 0.05653, 0.04812, 0.03301, 0.02156, 0.01907, 0.01292, \
0.00673, 0.00281, 0.00083, 0.00015, 0.00001, 0.00000 ");
}
ground_capacitance (capacitance_template_WxS) {
index_1 (" 0.4000, 0.5000, 0.8000, 0.9000, 1.5000, 1.6000 ");
index_2 (" 0.4000, 0.5000, 0.6000, 0.9000, 1.3500, 1.5000, 2.0250, 3.0375, \
4.5563, 6.8344, 10.2516, 15.3773, 1537.7344 ");
values (" 0.02841, 0.03112, 0.03367, 0.04061, 0.04908, 0.05144, 0.05819, 0.06644, \
0.07231, 0.07542, 0.07653, 0.07651, 0.07653, 0.03142, 0.03412, 0.03668, \
0.04365, 0.05218, 0.05458, 0.06142, 0.06983, 0.07586, 0.07908, 0.08023, \
0.08022, 0.08024, 0.04050, 0.04319, 0.04575, 0.05278, 0.06147, 0.06392, \
0.07097, 0.07976, 0.08616, 0.08962, 0.09087, 0.09087, 0.09090, 0.04354, \
0.04623, 0.04880, 0.05584, 0.06456, 0.06703, 0.07414, 0.08302, 0.08952, \
0.09305, 0.09433, 0.09434, 0.09436, 0.06195, 0.06465, 0.06723, 0.07433, \
0.08321, 0.08574, 0.09308, 0.10240, 0.10934, 0.11317, 0.11457, 0.11460, \
0.11462, 0.06504, 0.06774, 0.07031, 0.07742, 0.08632, 0.08886, 0.09624, \
0.10561, 0.11260, 0.11647, 0.11788, 0.11791, 0.11794 ");
}
}
capacitance () {
top_plane: metal10;
bottom_plane: metal7;
lateral_capacitance (capacitance_template_WxS) {
index_1 (" 0.4000, 0.5000, 0.8000, 0.9000, 1.5000, 1.6000 ");
index_2 (" 0.4000, 0.5000, 0.6000, 0.9000, 1.3500, 1.5000, 2.0250, 3.0375, \
4.5563, 6.8344, 10.2516, 15.3773, 1537.7344 ");
values (" 0.06281, 0.05142, 0.04343, 0.02927, 0.01876, 0.01652, 0.01104, 0.00569, \
0.00239, 0.00074, 0.00014, 0.00001, 0.00000, 0.06378, 0.05229, 0.04422, \
0.02987, 0.01921, 0.01693, 0.01135, 0.00587, 0.00248, 0.00077, 0.00015, \
0.00001, 0.00000, 0.06581, 0.05412, 0.04590, 0.03123, 0.02024, 0.01787, \
0.01207, 0.00631, 0.00269, 0.00084, 0.00016, 0.00001, 0.00000, 0.06632, \
0.05459, 0.04634, 0.03158, 0.02052, 0.01813, 0.01227, 0.00643, 0.00275, \
0.00086, 0.00017, 0.00001, 0.00000, 0.06842, 0.05655, 0.04816, 0.03311, \
0.02172, 0.01925, 0.01314, 0.00698, 0.00301, 0.00095, 0.00018, 0.00002, \
0.00000, 0.06865, 0.05677, 0.04838, 0.03329, 0.02187, 0.01939, 0.01325, \
0.00704, 0.00305, 0.00096, 0.00019, 0.00002, 0.00000 ");
}
ground_capacitance (capacitance_template_WxS) {
index_1 (" 0.4000, 0.5000, 0.8000, 0.9000, 1.5000, 1.6000 ");
index_2 (" 0.4000, 0.5000, 0.6000, 0.9000, 1.3500, 1.5000, 2.0250, 3.0375, \
4.5563, 6.8344, 10.2516, 15.3773, 1537.7344 ");
values (" 0.02819, 0.03088, 0.03342, 0.04030, 0.04866, 0.05099, 0.05764, 0.06581, \
0.07169, 0.07492, 0.07615, 0.07618, 0.07621, 0.03119, 0.03387, 0.03640, \
0.04330, 0.05172, 0.05408, 0.06083, 0.06916, 0.07520, 0.07854, 0.07982, \
0.07986, 0.07989, 0.04018, 0.04284, 0.04538, 0.05231, 0.06087, 0.06329, \
0.07024, 0.07894, 0.08537, 0.08898, 0.09036, 0.09043, 0.09046, 0.04319, \
0.04585, 0.04838, 0.05533, 0.06392, 0.06635, 0.07336, 0.08215, 0.08869, \
0.09237, 0.09379, 0.09386, 0.09390, 0.06135, 0.06402, 0.06655, 0.07354, \
0.08228, 0.08477, 0.09201, 0.10124, 0.10825, 0.11227, 0.11384, 0.11394, \
0.11398, 0.06440, 0.06706, 0.06959, 0.07659, 0.08535, 0.08784, 0.09511, \
0.10440, 0.11147, 0.11553, 0.11711, 0.11722, 0.11726 ");
}
}
capacitance () {
top_plane: metal10;
bottom_plane: metal6;
lateral_capacitance (capacitance_template_WxS) {
index_1 (" 0.4000, 0.5000, 0.8000, 0.9000, 1.5000, 1.6000 ");
index_2 (" 0.4000, 0.5000, 0.6000, 0.9000, 1.3500, 1.5000, 2.0250, 3.0375, \
4.5563, 6.8344, 10.2516, 15.3773, 1537.7344 ");
values (" 0.06641, 0.05523, 0.04741, 0.03357, 0.02319, 0.02091, 0.01515, 0.00893, \
0.00440, 0.00164, 0.00040, 0.00005, 0.00000, 0.06769, 0.05638, 0.04845, \
0.03439, 0.02379, 0.02146, 0.01557, 0.00918, 0.00453, 0.00169, 0.00041, \
0.00005, 0.00000, 0.07046, 0.05890, 0.05077, 0.03622, 0.02515, 0.02271, \
0.01651, 0.00976, 0.00484, 0.00181, 0.00044, 0.00005, 0.00000, 0.07117, \
0.05954, 0.05136, 0.03669, 0.02551, 0.02303, 0.01675, 0.00992, 0.00492, \
0.00184, 0.00045, 0.00006, 0.00000, 0.07398, 0.06213, 0.05375, 0.03863, \
0.02698, 0.02439, 0.01780, 0.01058, 0.00527, 0.00198, 0.00048, 0.00006, \
0.00000, 0.07428, 0.06241, 0.05401, 0.03885, 0.02715, 0.02455, 0.01792, \
0.01066, 0.00531, 0.00200, 0.00049, 0.00006, 0.00000 ");
}
ground_capacitance (capacitance_template_WxS) {
index_1 (" 0.4000, 0.5000, 0.8000, 0.9000, 1.5000, 1.6000 ");
index_2 (" 0.4000, 0.5000, 0.6000, 0.9000, 1.3500, 1.5000, 2.0250, 3.0375, \
4.5563, 6.8344, 10.2516, 15.3773, 1537.7344 ");
values (" 0.01697, 0.01849, 0.01993, 0.02391, 0.02916, 0.03075, 0.03572, 0.04313, \
0.05013, 0.05516, 0.05763, 0.05816, 0.05827, 0.01842, 0.01990, 0.02131, \
0.02529, 0.03059, 0.03220, 0.03727, 0.04485, 0.05202, 0.05719, 0.05974, \
0.06028, 0.06039, 0.02264, 0.02408, 0.02548, 0.02949, 0.03495, 0.03662, \
0.04190, 0.04984, 0.05741, 0.06291, 0.06563, 0.06623, 0.06635, 0.02405, \
0.02549, 0.02689, 0.03092, 0.03642, 0.03810, 0.04344, 0.05148, 0.05916, \
0.06474, 0.06751, 0.06812, 0.06824, 0.03272, 0.03418, 0.03560, 0.03973, \
0.04542, 0.04717, 0.05274, 0.06119, 0.06931, 0.07527, 0.07825, 0.07892, \
0.07904, 0.03420, 0.03566, 0.03709, 0.04123, 0.04694, 0.04870, 0.05430, \
0.06279, 0.07097, 0.07697, 0.07998, 0.08065, 0.08078 ");
}
}
capacitance () {
top_plane: metal10;
bottom_plane: metal5;
lateral_capacitance (capacitance_template_WxS) {
index_1 (" 0.4000, 0.5000, 0.8000, 0.9000, 1.5000, 1.6000 ");
index_2 (" 0.4000, 0.5000, 0.6000, 0.9000, 1.3500, 1.5000, 2.0250, 3.0375, \
4.5563, 6.8344, 10.2516, 15.3773, 1537.7344 ");
values (" 0.06713, 0.05600, 0.04823, 0.03452, 0.02428, 0.02203, 0.01633, 0.01005, \
0.00526, 0.00212, 0.00057, 0.00008, 0.00000, 0.06847, 0.05722, 0.04934, \
0.03541, 0.02494, 0.02264, 0.01679, 0.01034, 0.00541, 0.00218, 0.00059, \
0.00008, 0.00000, 0.07145, 0.05993, 0.05185, 0.03742, 0.02646, 0.02403, \
0.01785, 0.01100, 0.00577, 0.00233, 0.00063, 0.00009, 0.00000, 0.07222, \
0.06064, 0.05250, 0.03794, 0.02685, 0.02440, 0.01813, 0.01118, 0.00587, \
0.00237, 0.00064, 0.00009, 0.00000, 0.07536, 0.06354, 0.05519, 0.04013, \
0.02853, 0.02594, 0.01931, 0.01193, 0.00628, 0.00254, 0.00069, 0.00010, \
0.00000, 0.07571, 0.06386, 0.05549, 0.04038, 0.02872, 0.02612, 0.01945, \
0.01202, 0.00632, 0.00256, 0.00069, 0.00010, 0.00000 ");
}
ground_capacitance (capacitance_template_WxS) {
index_1 (" 0.4000, 0.5000, 0.8000, 0.9000, 1.5000, 1.6000 ");
index_2 (" 0.4000, 0.5000, 0.6000, 0.9000, 1.3500, 1.5000, 2.0250, 3.0375, \
4.5563, 6.8344, 10.2516, 15.3773, 1537.7344 ");
values (" 0.01503, 0.01637, 0.01762, 0.02105, 0.02554, 0.02691, 0.03126, 0.03804, \
0.04497, 0.05048, 0.05351, 0.05433, 0.05450, 0.01627, 0.01755, 0.01877, \
0.02216, 0.02668, 0.02807, 0.03251, 0.03945, 0.04655, 0.05221, 0.05533, \
0.05618, 0.05636, 0.01975, 0.02097, 0.02215, 0.02553, 0.03017, 0.03161, \
0.03625, 0.04356, 0.05107, 0.05709, 0.06042, 0.06133, 0.06152, 0.02090, \
0.02210, 0.02328, 0.02667, 0.03136, 0.03281, 0.03751, 0.04491, 0.05254, \
0.05864, 0.06203, 0.06296, 0.06315, 0.02789, 0.02911, 0.03031, 0.03379, \
0.03866, 0.04019, 0.04512, 0.05295, 0.06104, 0.06755, 0.07117, 0.07219, \
0.07239, 0.02909, 0.03031, 0.03151, 0.03501, 0.03991, 0.04144, 0.04640, \
0.05428, 0.06242, 0.06899, 0.07264, 0.07366, 0.07387 ");
}
}
capacitance () {
top_plane: metal10;
bottom_plane: metal4;
lateral_capacitance (capacitance_template_WxS) {
index_1 (" 0.4000, 0.5000, 0.8000, 0.9000, 1.5000, 1.6000 ");
index_2 (" 0.4000, 0.5000, 0.6000, 0.9000, 1.3500, 1.5000, 2.0250, 3.0375, \
4.5563, 6.8344, 10.2516, 15.3773, 1537.7344 ");
values (" 0.06761, 0.05651, 0.04876, 0.03514, 0.02500, 0.02279, 0.01716, 0.01090, \
0.00598, 0.00257, 0.00076, 0.00012, 0.00000, 0.06898, 0.05776, 0.04992, \
0.03607, 0.02571, 0.02344, 0.01766, 0.01121, 0.00615, 0.00265, 0.00078, \
0.00013, 0.00000, 0.07208, 0.06060, 0.05254, 0.03821, 0.02735, 0.02494, \
0.01882, 0.01196, 0.00656, 0.00282, 0.00083, 0.00013, 0.00000, 0.07289, \
0.06135, 0.05324, 0.03877, 0.02778, 0.02534, 0.01912, 0.01215, 0.00667, \
0.00287, 0.00085, 0.00014, 0.00000, 0.07629, 0.06449, 0.05617, 0.04118, \
0.02964, 0.02706, 0.02045, 0.01301, 0.00715, 0.00308, 0.00091, 0.00015, \
0.00000, 0.07667, 0.06485, 0.05650, 0.04145, 0.02985, 0.02726, 0.02061, \
0.01311, 0.00720, 0.00310, 0.00091, 0.00015, 0.00000 ");
}
ground_capacitance (capacitance_template_WxS) {
index_1 (" 0.4000, 0.5000, 0.8000, 0.9000, 1.5000, 1.6000 ");
index_2 (" 0.4000, 0.5000, 0.6000, 0.9000, 1.3500, 1.5000, 2.0250, 3.0375, \
4.5563, 6.8344, 10.2516, 15.3773, 1537.7344 ");
values (" 0.01380, 0.01502, 0.01617, 0.01927, 0.02329, 0.02451, 0.02841, 0.03465, \
0.04137, 0.04713, 0.05062, 0.05174, 0.05200, 0.01492, 0.01609, 0.01719, \
0.02023, 0.02426, 0.02549, 0.02947, 0.03586, 0.04275, 0.04868, 0.05227, \
0.05342, 0.05369, 0.01800, 0.01908, 0.02012, 0.02311, 0.02721, 0.02849, \
0.03266, 0.03940, 0.04671, 0.05301, 0.05684, 0.05808, 0.05836, 0.01899, \
0.02005, 0.02109, 0.02408, 0.02822, 0.02951, 0.03373, 0.04056, 0.04798, \
0.05439, 0.05828, 0.05954, 0.05983, 0.02497, 0.02603, 0.02708, 0.03014, \
0.03445, 0.03581, 0.04026, 0.04752, 0.05543, 0.06227, 0.06643, 0.06780, \
0.06811, 0.02599, 0.02706, 0.02811, 0.03118, 0.03551, 0.03688, 0.04136, \
0.04868, 0.05664, 0.06353, 0.06773, 0.06911, 0.06942 ");
}
}
capacitance () {
top_plane: metal10;
bottom_plane: SUBSTRATE;
lateral_capacitance (capacitance_template_WxS) {
index_1 (" 0.4000, 0.5000, 0.8000, 0.9000, 1.5000, 1.6000 ");
index_2 (" 0.4000, 0.5000, 0.6000, 0.9000, 1.3500, 1.5000, 2.0250, 3.0375, \
4.5563, 6.8344, 10.2516, 15.3773, 1537.7344 ");
values (" 0.06830, 0.05723, 0.04952, 0.03600, 0.02601, 0.02384, 0.01835, 0.01221, \
0.00722, 0.00348, 0.00121, 0.00025, 0.00000, 0.06971, 0.05852, 0.05071, \
0.03698, 0.02678, 0.02455, 0.01891, 0.01258, 0.00744, 0.00359, 0.00124, \
0.00025, 0.00000, 0.07293, 0.06150, 0.05349, 0.03928, 0.02859, 0.02624, \
0.02024, 0.01347, 0.00797, 0.00384, 0.00133, 0.00027, 0.00000, 0.07380, \
0.06231, 0.05424, 0.03991, 0.02908, 0.02669, 0.02060, 0.01371, 0.00811, \
0.00391, 0.00135, 0.00028, 0.00000, 0.07755, 0.06580, 0.05752, 0.04265, \
0.03126, 0.02872, 0.02220, 0.01478, 0.00874, 0.00421, 0.00146, 0.00030, \
0.00000, 0.07799, 0.06622, 0.05791, 0.04298, 0.03152, 0.02896, 0.02239, \
0.01492, 0.00881, 0.00424, 0.00147, 0.00030, 0.00000 ");
}
ground_capacitance (capacitance_template_WxS) {
index_1 (" 0.4000, 0.5000, 0.8000, 0.9000, 1.5000, 1.6000 ");
index_2 (" 0.4000, 0.5000, 0.6000, 0.9000, 1.3500, 1.5000, 2.0250, 3.0375, \
4.5563, 6.8344, 10.2516, 15.3773, 1537.7344 ");
values (" 0.01206, 0.01316, 0.01418, 0.01691, 0.02035, 0.02137, 0.02465, 0.02998, \
0.03610, 0.04200, 0.04620, 0.04796, 0.04848, 0.01308, 0.01411, 0.01508, \
0.01771, 0.02111, 0.02214, 0.02546, 0.03092, 0.03720, 0.04327, 0.04760, \
0.04941, 0.04994, 0.01572, 0.01664, 0.01752, 0.02001, 0.02340, 0.02446, \
0.02791, 0.03367, 0.04036, 0.04683, 0.05145, 0.05340, 0.05397, 0.01653, \
0.01743, 0.01830, 0.02077, 0.02418, 0.02524, 0.02874, 0.03459, 0.04139, \
0.04797, 0.05267, 0.05465, 0.05523, 0.02127, 0.02214, 0.02299, 0.02547, \
0.02899, 0.03011, 0.03381, 0.04006, 0.04736, 0.05443, 0.05949, 0.06163, \
0.06225, 0.02207, 0.02294, 0.02379, 0.02628, 0.02981, 0.03094, 0.03467, \
0.04097, 0.04834, 0.05547, 0.06057, 0.06274, 0.06336 ");
}
}
capacitance () {
top_plane: AIR;
bottom_plane: metal7;
lateral_capacitance (capacitance_template_WxS) {
index_1 (" 0.4000, 0.5000, 0.8000, 0.9000, 1.5000, 1.6000 ");
index_2 (" 0.4000, 0.5000, 0.6000, 0.9000, 1.3500, 1.5000, 2.0250, 3.0375, \
4.5563, 6.8344, 10.2516, 15.3773, 1537.7344 ");
values (" 0.06381, 0.05246, 0.04450, 0.03044, 0.02007, 0.01787, 0.01253, 0.00733, \
0.00403, 0.00211, 0.00104, 0.00045, 0.00000, 0.06481, 0.05336, 0.04532, \
0.03110, 0.02060, 0.01837, 0.01294, 0.00763, 0.00424, 0.00224, 0.00111, \
0.00048, 0.00000, 0.06696, 0.05534, 0.04716, 0.03265, 0.02188, 0.01958, \
0.01398, 0.00842, 0.00478, 0.00258, 0.00130, 0.00056, 0.00000, 0.06753, \
0.05587, 0.04766, 0.03308, 0.02225, 0.01994, 0.01429, 0.00866, 0.00495, \
0.00269, 0.00136, 0.00059, 0.00000, 0.07010, 0.05831, 0.05001, 0.03518, \
0.02410, 0.02172, 0.01585, 0.00992, 0.00587, 0.00329, 0.00170, 0.00075, \
0.00000, 0.07044, 0.05863, 0.05032, 0.03547, 0.02436, 0.02197, 0.01608, \
0.01011, 0.00601, 0.00338, 0.00176, 0.00077, 0.00000 ");
}
ground_capacitance (capacitance_template_WxS) {
index_1 (" 0.4000, 0.5000, 0.8000, 0.9000, 1.5000, 1.6000 ");
index_2 (" 0.4000, 0.5000, 0.6000, 0.9000, 1.3500, 1.5000, 2.0250, 3.0375, \
4.5563, 6.8344, 10.2516, 15.3773, 1537.7344 ");
values (" 0.02565, 0.02821, 0.03061, 0.03713, 0.04497, 0.04713, 0.05326, 0.06070, \
0.06623, 0.06975, 0.07182, 0.07279, 0.07370, 0.02855, 0.03109, 0.03348, \
0.03997, 0.04780, 0.04997, 0.05612, 0.06366, 0.06932, 0.07298, 0.07515, \
0.07619, 0.07716, 0.03715, 0.03964, 0.04199, 0.04839, 0.05616, 0.05833, \
0.06453, 0.07226, 0.07824, 0.08225, 0.08471, 0.08594, 0.08709, 0.03999, \
0.04246, 0.04480, 0.05117, 0.05892, 0.06109, 0.06729, 0.07508, 0.08115, \
0.08526, 0.08781, 0.08910, 0.09031, 0.05674, 0.05914, 0.06142, 0.06762, \
0.07525, 0.07740, 0.08363, 0.09165, 0.09817, 0.10280, 0.10583, 0.10748, \
0.10900, 0.05949, 0.06188, 0.06415, 0.07033, 0.07794, 0.08009, 0.08633, \
0.09438, 0.10095, 0.10567, 0.10876, 0.11047, 0.11204 ");
}
}
capacitance () {
top_plane: AIR;
bottom_plane: metal6;
lateral_capacitance (capacitance_template_WxS) {
index_1 (" 0.4000, 0.5000, 0.8000, 0.9000, 1.5000, 1.6000 ");
index_2 (" 0.4000, 0.5000, 0.6000, 0.9000, 1.3500, 1.5000, 2.0250, 3.0375, \
4.5563, 6.8344, 10.2516, 15.3773, 1537.7344 ");
values (" 0.06776, 0.05663, 0.04885, 0.03513, 0.02489, 0.02267, 0.01709, 0.01116, \
0.00684, 0.00391, 0.00206, 0.00095, 0.00000, 0.06907, 0.05781, 0.04993, \
0.03599, 0.02557, 0.02330, 0.01761, 0.01154, 0.00710, 0.00408, 0.00216, \
0.00099, 0.00000, 0.07196, 0.06045, 0.05237, 0.03799, 0.02717, 0.02480, \
0.01886, 0.01250, 0.00780, 0.00454, 0.00244, 0.00113, 0.00000, 0.07272, \
0.06115, 0.05302, 0.03854, 0.02761, 0.02522, 0.01922, 0.01278, 0.00800, \
0.00468, 0.00252, 0.00117, 0.00000, 0.07597, 0.06420, 0.05590, 0.04102, \
0.02972, 0.02723, 0.02096, 0.01419, 0.00907, 0.00543, 0.00297, 0.00139, \
0.00000, 0.07637, 0.06458, 0.05626, 0.04134, 0.03000, 0.02750, 0.02121, \
0.01439, 0.00923, 0.00554, 0.00304, 0.00143, 0.00000 ");
}
ground_capacitance (capacitance_template_WxS) {
index_1 (" 0.4000, 0.5000, 0.8000, 0.9000, 1.5000, 1.6000 ");
index_2 (" 0.4000, 0.5000, 0.6000, 0.9000, 1.3500, 1.5000, 2.0250, 3.0375, \
4.5563, 6.8344, 10.2516, 15.3773, 1537.7344 ");
values (" 0.01359, 0.01495, 0.01624, 0.01983, 0.02449, 0.02588, 0.03016, 0.03635, \
0.04219, 0.04690, 0.05022, 0.05218, 0.05408, 0.01495, 0.01627, 0.01753, \
0.02108, 0.02572, 0.02711, 0.03140, 0.03765, 0.04359, 0.04843, 0.05186, \
0.05393, 0.05592, 0.01882, 0.02008, 0.02130, 0.02475, 0.02934, 0.03072, \
0.03502, 0.04138, 0.04756, 0.05271, 0.05646, 0.05878, 0.06103, 0.02008, \
0.02132, 0.02253, 0.02596, 0.03053, 0.03191, 0.03621, 0.04259, 0.04883, \
0.05407, 0.05791, 0.06031, 0.06264, 0.02741, 0.02860, 0.02976, 0.03308, \
0.03755, 0.03891, 0.04319, 0.04966, 0.05617, 0.06184, 0.06616, 0.06897, \
0.07175, 0.02861, 0.02979, 0.03095, 0.03424, 0.03870, 0.04006, 0.04433, \
0.05081, 0.05736, 0.06309, 0.06748, 0.07035, 0.07320 ");
}
}
capacitance () {
top_plane: AIR;
bottom_plane: metal5;
lateral_capacitance (capacitance_template_WxS) {
index_1 (" 0.4000, 0.5000, 0.8000, 0.9000, 1.5000, 1.6000 ");
index_2 (" 0.4000, 0.5000, 0.6000, 0.9000, 1.3500, 1.5000, 2.0250, 3.0375, \
4.5563, 6.8344, 10.2516, 15.3773, 1537.7344 ");
values (" 0.06863, 0.05756, 0.04984, 0.03625, 0.02616, 0.02397, 0.01846, 0.01250, \
0.00799, 0.00476, 0.00260, 0.00124, 0.00000, 0.07001, 0.05881, 0.05098, \
0.03718, 0.02689, 0.02465, 0.01901, 0.01291, 0.00828, 0.00495, 0.00272, \
0.00129, 0.00000, 0.07310, 0.06165, 0.05361, 0.03935, 0.02864, 0.02629, \
0.02038, 0.01396, 0.00904, 0.00547, 0.00303, 0.00145, 0.00000, 0.07392, \
0.06240, 0.05432, 0.03994, 0.02912, 0.02675, 0.02077, 0.01426, 0.00927, \
0.00562, 0.00313, 0.00150, 0.00000, 0.07750, 0.06575, 0.05748, 0.04267, \
0.03141, 0.02893, 0.02265, 0.01576, 0.01041, 0.00643, 0.00363, 0.00176, \
0.00000, 0.07793, 0.06617, 0.05788, 0.04302, 0.03172, 0.02922, 0.02291, \
0.01598, 0.01058, 0.00655, 0.00371, 0.00180, 0.00000 ");
}
ground_capacitance (capacitance_template_WxS) {
index_1 (" 0.4000, 0.5000, 0.8000, 0.9000, 1.5000, 1.6000 ");
index_2 (" 0.4000, 0.5000, 0.6000, 0.9000, 1.3500, 1.5000, 2.0250, 3.0375, \
4.5563, 6.8344, 10.2516, 15.3773, 1537.7344 ");
values (" 0.01129, 0.01243, 0.01352, 0.01652, 0.02043, 0.02159, 0.02523, 0.03067, \
0.03615, 0.04097, 0.04467, 0.04707, 0.04953, 0.01242, 0.01352, 0.01457, \
0.01751, 0.02138, 0.02254, 0.02617, 0.03165, 0.03722, 0.04216, 0.04599, \
0.04850, 0.05107, 0.01556, 0.01658, 0.01758, 0.02039, 0.02416, 0.02531, \
0.02894, 0.03450, 0.04027, 0.04551, 0.04965, 0.05243, 0.05530, 0.01655, \
0.01756, 0.01854, 0.02133, 0.02508, 0.02622, 0.02984, 0.03542, 0.04125, \
0.04657, 0.05080, 0.05366, 0.05663, 0.02226, 0.02321, 0.02414, 0.02680, \
0.03044, 0.03156, 0.03516, 0.04080, 0.04687, 0.05258, 0.05727, 0.06056, \
0.06404, 0.02318, 0.02412, 0.02505, 0.02769, 0.03132, 0.03244, 0.03603, \
0.04168, 0.04777, 0.05354, 0.05830, 0.06166, 0.06521 ");
}
}
capacitance () {
top_plane: AIR;
bottom_plane: metal4;
lateral_capacitance (capacitance_template_WxS) {
index_1 (" 0.4000, 0.5000, 0.8000, 0.9000, 1.5000, 1.6000 ");
index_2 (" 0.4000, 0.5000, 0.6000, 0.9000, 1.3500, 1.5000, 2.0250, 3.0375, \
4.5563, 6.8344, 10.2516, 15.3773, 1537.7344 ");
values (" 0.06924, 0.05821, 0.05052, 0.03704, 0.02706, 0.02489, 0.01945, 0.01353, \
0.00894, 0.00553, 0.00313, 0.00153, 0.00000, 0.07066, 0.05950, 0.05171, \
0.03800, 0.02783, 0.02561, 0.02004, 0.01398, 0.00926, 0.00574, 0.00326, \
0.00160, 0.00000, 0.07388, 0.06246, 0.05446, 0.04029, 0.02968, 0.02736, \
0.02151, 0.01510, 0.01008, 0.00631, 0.00361, 0.00178, 0.00000, 0.07475, \
0.06326, 0.05521, 0.04092, 0.03020, 0.02785, 0.02192, 0.01542, 0.01033, \
0.00647, 0.00371, 0.00184, 0.00000, 0.07855, 0.06684, 0.05859, 0.04384, \
0.03265, 0.03018, 0.02393, 0.01702, 0.01155, 0.00734, 0.00427, 0.00213, \
0.00000, 0.07902, 0.06729, 0.05902, 0.04422, 0.03298, 0.03050, 0.02421, \
0.01725, 0.01173, 0.00747, 0.00435, 0.00217, 0.00000 ");
}
ground_capacitance (capacitance_template_WxS) {
index_1 (" 0.4000, 0.5000, 0.8000, 0.9000, 1.5000, 1.6000 ");
index_2 (" 0.4000, 0.5000, 0.6000, 0.9000, 1.3500, 1.5000, 2.0250, 3.0375, \
4.5563, 6.8344, 10.2516, 15.3773, 1537.7344 ");
values (" 0.00974, 0.01075, 0.01170, 0.01434, 0.01775, 0.01877, 0.02195, 0.02678, \
0.03184, 0.03658, 0.04052, 0.04328, 0.04630, 0.01073, 0.01170, 0.01262, \
0.01518, 0.01854, 0.01955, 0.02271, 0.02757, 0.03270, 0.03756, 0.04162, \
0.04449, 0.04764, 0.01344, 0.01432, 0.01518, 0.01759, 0.02083, 0.02181, \
0.02494, 0.02985, 0.03515, 0.04029, 0.04466, 0.04781, 0.05131, 0.01428, \
0.01515, 0.01599, 0.01836, 0.02157, 0.02255, 0.02567, 0.03058, 0.03594, \
0.04115, 0.04561, 0.04885, 0.05245, 0.01902, 0.01982, 0.02060, 0.02283, \
0.02590, 0.02686, 0.02994, 0.03489, 0.04045, 0.04602, 0.05093, 0.05461, \
0.05878, 0.01977, 0.02056, 0.02133, 0.02355, 0.02661, 0.02756, 0.03063, \
0.03559, 0.04118, 0.04680, 0.05177, 0.05552, 0.05977 ");
}
}
capacitance () {
top_plane: AIR;
bottom_plane: SUBSTRATE;
lateral_capacitance (capacitance_template_WxS) {
index_1 (" 0.4000, 0.5000, 0.8000, 0.9000, 1.5000, 1.6000 ");
index_2 (" 0.4000, 0.5000, 0.6000, 0.9000, 1.3500, 1.5000, 2.0250, 3.0375, \
4.5563, 6.8344, 10.2516, 15.3773, 1537.7344 ");
values (" 0.07015, 0.05919, 0.05156, 0.03822, 0.02842, 0.02630, 0.02099, 0.01521, \
0.01063, 0.00702, 0.00426, 0.00225, 0.00000, 0.07164, 0.06054, 0.05281, \
0.03924, 0.02924, 0.02708, 0.02164, 0.01571, 0.01100, 0.00728, 0.00443, \
0.00234, 0.00000, 0.07504, 0.06368, 0.05573, 0.04170, 0.03125, 0.02898, \
0.02326, 0.01697, 0.01194, 0.00794, 0.00485, 0.00257, 0.00000, 0.07596, \
0.06454, 0.05654, 0.04239, 0.03182, 0.02952, 0.02372, 0.01733, 0.01221, \
0.00814, 0.00498, 0.00264, 0.00000, 0.08010, 0.06844, 0.06024, 0.04561, \
0.03456, 0.03213, 0.02597, 0.01914, 0.01360, 0.00914, 0.00563, 0.00301, \
0.00000, 0.08063, 0.06894, 0.06072, 0.04604, 0.03493, 0.03248, 0.02628, \
0.01939, 0.01380, 0.00928, 0.00573, 0.00306, 0.00000 ");
}
ground_capacitance (capacitance_template_WxS) {
index_1 (" 0.4000, 0.5000, 0.8000, 0.9000, 1.5000, 1.6000 ");
index_2 (" 0.4000, 0.5000, 0.6000, 0.9000, 1.3500, 1.5000, 2.0250, 3.0375, \
4.5563, 6.8344, 10.2516, 15.3773, 1537.7344 ");
values (" 0.00743, 0.00824, 0.00901, 0.01115, 0.01390, 0.01472, 0.01726, 0.02113, \
0.02531, 0.02958, 0.03363, 0.03694, 0.04126, 0.00824, 0.00902, 0.00976, \
0.01182, 0.01450, 0.01530, 0.01780, 0.02166, 0.02588, 0.03025, 0.03441, \
0.03784, 0.04232, 0.01041, 0.01111, 0.01178, 0.01367, 0.01618, 0.01694, \
0.01936, 0.02318, 0.02751, 0.03210, 0.03655, 0.04028, 0.04519, 0.01107, \
0.01175, 0.01240, 0.01425, 0.01671, 0.01747, 0.01986, 0.02368, 0.02803, \
0.03269, 0.03722, 0.04103, 0.04608, 0.01462, 0.01522, 0.01580, 0.01746, \
0.01974, 0.02045, 0.02275, 0.02653, 0.03103, 0.03598, 0.04093, 0.04519, \
0.05092, 0.01516, 0.01575, 0.01632, 0.01796, 0.02022, 0.02093, 0.02321, \
0.02700, 0.03151, 0.03651, 0.04151, 0.04583, 0.05167 ");
}
}
}
layer (metal7) {
resistance: 0.075000
capacitance () {
top_plane: metal8;
bottom_plane: metal6;
lateral_capacitance (capacitance_template_WxS) {
index_1 (" 0.4000, 0.5000, 0.8000, 0.9000, 1.5000, 1.6000 ");
index_2 (" 0.4000, 0.5000, 0.6000, 0.9000, 1.3500, 1.5000, 2.0250, 3.0375, \
4.5563, 6.8344, 10.2516, 15.3773, 1537.7344 ");
values (" 0.05185, 0.04018, 0.03202, 0.01780, 0.00815, 0.00635, 0.00269, 0.00054, \
0.00005, 0.00000, 0.00000, 0.00000, 0.00000, 0.05209, 0.04038, 0.03218, \
0.01789, 0.00820, 0.00639, 0.00271, 0.00054, 0.00005, 0.00000, 0.00000, \
0.00000, 0.00000, 0.05240, 0.04063, 0.03239, 0.01801, 0.00826, 0.00643, \
0.00273, 0.00055, 0.00005, 0.00000, 0.00000, 0.00000, 0.00000, 0.05246, \
0.04067, 0.03242, 0.01803, 0.00827, 0.00644, 0.00273, 0.00055, 0.00005, \
0.00000, 0.00000, 0.00000, 0.00000, 0.05255, 0.04075, 0.03248, 0.01807, \
0.00828, 0.00646, 0.00274, 0.00055, 0.00005, 0.00000, 0.00000, 0.00000, \
0.00000, 0.05255, 0.04074, 0.03248, 0.01807, 0.00828, 0.00646, 0.00274, \
0.00055, 0.00005, 0.00000, 0.00000, 0.00000, 0.00000 ");
}
ground_capacitance (capacitance_template_WxS) {
index_1 (" 0.4000, 0.5000, 0.8000, 0.9000, 1.5000, 1.6000 ");
index_2 (" 0.4000, 0.5000, 0.6000, 0.9000, 1.3500, 1.5000, 2.0250, 3.0375, \
4.5563, 6.8344, 10.2516, 15.3773, 1537.7344 ");
values (" 0.07642, 0.08310, 0.08902, 0.10356, 0.11751, 0.12060, 0.12729, 0.13174, \
0.13275, 0.13284, 0.13282, 0.13255, 0.13256, 0.08664, 0.09335, 0.09930, \
0.11389, 0.12791, 0.13101, 0.13774, 0.14222, 0.14323, 0.14332, 0.14330, \
0.14303, 0.14303, 0.11745, 0.12420, 0.13019, 0.14488, 0.15898, 0.16210, \
0.16888, 0.17338, 0.17441, 0.17450, 0.17448, 0.17420, 0.17421, 0.12776, \
0.13452, 0.14051, 0.15521, 0.16932, 0.17245, 0.17923, 0.18375, 0.18477, \
0.18486, 0.18485, 0.18457, 0.18457, 0.18970, 0.19647, 0.20248, 0.21720, \
0.23134, 0.23448, 0.24127, 0.24579, 0.24682, 0.24691, 0.24690, 0.24661, \
0.24662, 0.20002, 0.20679, 0.21279, 0.22752, 0.24165, 0.24479, 0.25158, \
0.25611, 0.25714, 0.25723, 0.25721, 0.25693, 0.25694 ");
}
}
capacitance () {
top_plane: metal8;
bottom_plane: metal5;
lateral_capacitance (capacitance_template_WxS) {
index_1 (" 0.4000, 0.5000, 0.8000, 0.9000, 1.5000, 1.6000 ");
index_2 (" 0.4000, 0.5000, 0.6000, 0.9000, 1.3500, 1.5000, 2.0250, 3.0375, \
4.5563, 6.8344, 10.2516, 15.3773, 1537.7344 ");
values (" 0.05836, 0.04664, 0.03835, 0.02350, 0.01258, 0.01034, 0.00530, 0.00151, \
0.00024, 0.00002, 0.00000, 0.00000, 0.00000, 0.05884, 0.04701, 0.03866, \
0.02368, 0.01268, 0.01042, 0.00534, 0.00152, 0.00024, 0.00002, 0.00000, \
0.00000, 0.00000, 0.05950, 0.04754, 0.03909, 0.02394, 0.01281, 0.01053, \
0.00539, 0.00154, 0.00024, 0.00002, 0.00000, 0.00000, 0.00000, 0.05960, \
0.04763, 0.03916, 0.02398, 0.01283, 0.01055, 0.00540, 0.00154, 0.00025, \
0.00002, 0.00000, 0.00000, 0.00000, 0.05981, 0.04779, 0.03929, 0.02406, \
0.01287, 0.01058, 0.00542, 0.00154, 0.00025, 0.00002, 0.00000, 0.00000, \
0.00000, 0.05981, 0.04779, 0.03929, 0.02406, 0.01287, 0.01058, 0.00542, \
0.00154, 0.00025, 0.00002, 0.00000, 0.00000, 0.00000 ");
}
ground_capacitance (capacitance_template_WxS) {
index_1 (" 0.4000, 0.5000, 0.8000, 0.9000, 1.5000, 1.6000 ");
index_2 (" 0.4000, 0.5000, 0.6000, 0.9000, 1.3500, 1.5000, 2.0250, 3.0375, \
4.5563, 6.8344, 10.2516, 15.3773, 1537.7344 ");
values (" 0.04148, 0.04573, 0.04976, 0.06068, 0.07330, 0.07655, 0.08476, 0.09195, \
0.09454, 0.09501, 0.09504, 0.09477, 0.09477, 0.04652, 0.05082, 0.05490, \
0.06593, 0.07865, 0.08192, 0.09020, 0.09743, 0.10005, 0.10052, 0.10055, \
0.10028, 0.10028, 0.06198, 0.06636, 0.07051, 0.08169, 0.09456, 0.09787, \
0.10623, 0.11354, 0.11619, 0.11667, 0.11669, 0.11642, 0.11642, 0.06720, \
0.07160, 0.07576, 0.08696, 0.09985, 0.10317, 0.11154, 0.11886, 0.12151, \
0.12199, 0.12202, 0.12174, 0.12175, 0.09873, 0.10315, 0.10733, 0.11858, \
0.13152, 0.13485, 0.14325, 0.15059, 0.15325, 0.15373, 0.15376, 0.15348, \
0.15348, 0.10399, 0.10841, 0.11259, 0.12385, 0.13679, 0.14011, 0.14851, \
0.15586, 0.15851, 0.15899, 0.15902, 0.15874, 0.15875 ");
}
}
capacitance () {
top_plane: metal8;
bottom_plane: metal4;
lateral_capacitance (capacitance_template_WxS) {
index_1 (" 0.4000, 0.5000, 0.8000, 0.9000, 1.5000, 1.6000 ");
index_2 (" 0.4000, 0.5000, 0.6000, 0.9000, 1.3500, 1.5000, 2.0250, 3.0375, \
4.5563, 6.8344, 10.2516, 15.3773, 1537.7344 ");
values (" 0.06051, 0.04891, 0.04073, 0.02605, 0.01505, 0.01272, 0.00723, 0.00255, \
0.00056, 0.00006, 0.00000, 0.00000, 0.00000, 0.06120, 0.04949, 0.04122, \
0.02637, 0.01524, 0.01288, 0.00732, 0.00259, 0.00057, 0.00006, 0.00000, \
0.00000, 0.00000, 0.06235, 0.05046, 0.04205, 0.02692, 0.01556, 0.01315, \
0.00748, 0.00264, 0.00058, 0.00006, 0.00000, 0.00000, 0.00000, 0.06258, \
0.05066, 0.04222, 0.02703, 0.01563, 0.01321, 0.00751, 0.00265, 0.00058, \
0.00006, 0.00000, 0.00000, 0.00000, 0.06320, 0.05118, 0.04267, 0.02732, \
0.01580, 0.01336, 0.00760, 0.00269, 0.00059, 0.00007, 0.00000, 0.00000, \
0.00000, 0.06322, 0.05120, 0.04269, 0.02734, 0.01581, 0.01337, 0.00761, \
0.00269, 0.00059, 0.00007, 0.00000, 0.00000, 0.00000 ");
}
ground_capacitance (capacitance_template_WxS) {
index_1 (" 0.4000, 0.5000, 0.8000, 0.9000, 1.5000, 1.6000 ");
index_2 (" 0.4000, 0.5000, 0.6000, 0.9000, 1.3500, 1.5000, 2.0250, 3.0375, \
4.5563, 6.8344, 10.2516, 15.3773, 1537.7344 ");
values (" 0.03447, 0.03792, 0.04121, 0.05028, 0.06133, 0.06434, 0.07248, 0.08082, \
0.08477, 0.08581, 0.08593, 0.08568, 0.08568, 0.03840, 0.04189, 0.04523, \
0.05442, 0.06559, 0.06864, 0.07687, 0.08531, 0.08932, 0.09037, 0.09049, \
0.09024, 0.09024, 0.05054, 0.05412, 0.05753, 0.06692, 0.07833, 0.08143, \
0.08983, 0.09844, 0.10254, 0.10362, 0.10375, 0.10348, 0.10349, 0.05467, \
0.05826, 0.06169, 0.07112, 0.08257, 0.08568, 0.09412, 0.10277, 0.10688, \
0.10796, 0.10809, 0.10783, 0.10783, 0.07980, 0.08343, 0.08691, 0.09645, \
0.10802, 0.11117, 0.11969, 0.12844, 0.13260, 0.13370, 0.13383, 0.13356, \
0.13357, 0.08401, 0.08765, 0.09113, 0.10068, 0.11226, 0.11541, 0.12394, \
0.13269, 0.13686, 0.13795, 0.13808, 0.13782, 0.13782 ");
}
}
capacitance () {
top_plane: metal8;
bottom_plane: metal3;
lateral_capacitance (capacitance_template_WxS) {
index_1 (" 0.4000, 0.5000, 0.8000, 0.9000, 1.5000, 1.6000 ");
index_2 (" 0.4000, 0.5000, 0.6000, 0.9000, 1.3500, 1.5000, 2.0250, 3.0375, \
4.5563, 6.8344, 10.2516, 15.3773, 1537.7344 ");
values (" 0.06124, 0.04971, 0.04159, 0.02704, 0.01612, 0.01379, 0.00820, 0.00320, \
0.00082, 0.00011, 0.00001, 0.00000, 0.00000, 0.06202, 0.05038, 0.04217, \
0.02744, 0.01637, 0.01400, 0.00834, 0.00325, 0.00083, 0.00012, 0.00001, \
0.00000, 0.00000, 0.06344, 0.05160, 0.04323, 0.02818, 0.01683, 0.01441, \
0.00859, 0.00336, 0.00086, 0.00012, 0.00001, 0.00000, 0.00000, 0.06374, \
0.05186, 0.04346, 0.02834, 0.01694, 0.01449, 0.00864, 0.00338, 0.00087, \
0.00012, 0.00001, 0.00000, 0.00000, 0.06467, 0.05267, 0.04417, 0.02885, \
0.01726, 0.01477, 0.00882, 0.00345, 0.00089, 0.00012, 0.00001, 0.00000, \
0.00000, 0.06473, 0.05273, 0.04422, 0.02888, 0.01728, 0.01480, 0.00883, \
0.00346, 0.00089, 0.00012, 0.00001, 0.00000, 0.00000 ");
}
ground_capacitance (capacitance_template_WxS) {
index_1 (" 0.4000, 0.5000, 0.8000, 0.9000, 1.5000, 1.6000 ");
index_2 (" 0.4000, 0.5000, 0.6000, 0.9000, 1.3500, 1.5000, 2.0250, 3.0375, \
4.5563, 6.8344, 10.2516, 15.3773, 1537.7344 ");
values (" 0.03233, 0.03550, 0.03853, 0.04690, 0.05718, 0.06003, 0.06791, 0.07653, \
0.08116, 0.08262, 0.08285, 0.08261, 0.08261, 0.03591, 0.03912, 0.04219, \
0.05065, 0.06107, 0.06395, 0.07194, 0.08068, 0.08539, 0.08688, 0.08711, \
0.08687, 0.08687, 0.04696, 0.05024, 0.05337, 0.06203, 0.07269, 0.07564, \
0.08384, 0.09283, 0.09768, 0.09922, 0.09946, 0.09921, 0.09921, 0.05071, \
0.05401, 0.05716, 0.06586, 0.07657, 0.07954, 0.08778, 0.09682, 0.10170, \
0.10325, 0.10349, 0.10324, 0.10325, 0.07364, 0.07699, 0.08019, 0.08902, \
0.09990, 0.10292, 0.11130, 0.12051, 0.12550, 0.12708, 0.12733, 0.12708, \
0.12708, 0.07750, 0.08085, 0.08405, 0.09289, 0.10379, 0.10681, 0.11520, \
0.12443, 0.12943, 0.13101, 0.13126, 0.13101, 0.13101 ");
}
}
capacitance () {
top_plane: metal8;
bottom_plane: SUBSTRATE;
lateral_capacitance (capacitance_template_WxS) {
index_1 (" 0.4000, 0.5000, 0.8000, 0.9000, 1.5000, 1.6000 ");
index_2 (" 0.4000, 0.5000, 0.6000, 0.9000, 1.3500, 1.5000, 2.0250, 3.0375, \
4.5563, 6.8344, 10.2516, 15.3773, 1537.7344 ");
values (" 0.06211, 0.05066, 0.04262, 0.02829, 0.01757, 0.01527, 0.00968, 0.00437, \
0.00144, 0.00029, 0.00003, 0.00000, 0.00000, 0.06301, 0.05145, 0.04332, \
0.02880, 0.01792, 0.01558, 0.00989, 0.00448, 0.00147, 0.00030, 0.00003, \
0.00000, 0.00000, 0.06478, 0.05302, 0.04473, 0.02986, 0.01866, 0.01624, \
0.01035, 0.00470, 0.00155, 0.00032, 0.00003, 0.00000, 0.00000, 0.06519, \
0.05339, 0.04506, 0.03011, 0.01884, 0.01640, 0.01046, 0.00476, 0.00157, \
0.00032, 0.00003, 0.00000, 0.00000, 0.06670, 0.05475, 0.04631, 0.03108, \
0.01953, 0.01702, 0.01089, 0.00498, 0.00165, 0.00034, 0.00003, 0.00000, \
0.00000, 0.06684, 0.05489, 0.04643, 0.03118, 0.01960, 0.01708, 0.01094, \
0.00500, 0.00166, 0.00034, 0.00003, 0.00000, 0.00000 ");
}
ground_capacitance (capacitance_template_WxS) {
index_1 (" 0.4000, 0.5000, 0.8000, 0.9000, 1.5000, 1.6000 ");
index_2 (" 0.4000, 0.5000, 0.6000, 0.9000, 1.3500, 1.5000, 2.0250, 3.0375, \
4.5563, 6.8344, 10.2516, 15.3773, 1537.7344 ");
values (" 0.02994, 0.03281, 0.03554, 0.04302, 0.05224, 0.05482, 0.06213, 0.07074, \
0.07624, 0.07856, 0.07911, 0.07892, 0.07893, 0.03314, 0.03603, 0.03877, \
0.04633, 0.05565, 0.05827, 0.06569, 0.07447, 0.08009, 0.08246, 0.08303, \
0.08284, 0.08285, 0.04294, 0.04586, 0.04865, 0.05634, 0.06588, 0.06857, \
0.07623, 0.08535, 0.09124, 0.09374, 0.09434, 0.09415, 0.09415, 0.04625, \
0.04918, 0.05198, 0.05970, 0.06930, 0.07201, 0.07972, 0.08893, 0.09488, \
0.09742, 0.09802, 0.09784, 0.09784, 0.06646, 0.06943, 0.07227, 0.08012, \
0.08992, 0.09269, 0.10063, 0.11016, 0.11637, 0.11903, 0.11967, 0.11948, \
0.11948, 0.06987, 0.07284, 0.07568, 0.08354, 0.09336, 0.09614, 0.10410, \
0.11367, 0.11991, 0.12258, 0.12322, 0.12303, 0.12304 ");
}
}
capacitance () {
top_plane: metal9;
bottom_plane: metal6;
lateral_capacitance (capacitance_template_WxS) {
index_1 (" 0.4000, 0.5000, 0.8000, 0.9000, 1.5000, 1.6000 ");
index_2 (" 0.4000, 0.5000, 0.6000, 0.9000, 1.3500, 1.5000, 2.0250, 3.0375, \
4.5563, 6.8344, 10.2516, 15.3773, 1537.7344 ");
values (" 0.05551, 0.04411, 0.03617, 0.02233, 0.01255, 0.01057, 0.00604, 0.00227, \
0.00058, 0.00008, 0.00000, 0.00000, 0.00000, 0.05618, 0.04471, 0.03671, \
0.02274, 0.01283, 0.01081, 0.00619, 0.00234, 0.00060, 0.00009, 0.00001, \
0.00000, 0.00000, 0.05757, 0.04597, 0.03785, 0.02361, 0.01342, 0.01134, \
0.00654, 0.00248, 0.00064, 0.00009, 0.00001, 0.00000, 0.00000, 0.05792, \
0.04628, 0.03813, 0.02382, 0.01357, 0.01147, 0.00662, 0.00252, 0.00065, \
0.00009, 0.00001, 0.00000, 0.00000, 0.05919, 0.04744, 0.03919, 0.02463, \
0.01413, 0.01196, 0.00694, 0.00266, 0.00069, 0.00010, 0.00001, 0.00000, \
0.00000, 0.05931, 0.04755, 0.03929, 0.02471, 0.01418, 0.01201, 0.00697, \
0.00267, 0.00069, 0.00010, 0.00001, 0.00000, 0.00000 ");
}
ground_capacitance (capacitance_template_WxS) {
index_1 (" 0.4000, 0.5000, 0.8000, 0.9000, 1.5000, 1.6000 ");
index_2 (" 0.4000, 0.5000, 0.6000, 0.9000, 1.3500, 1.5000, 2.0250, 3.0375, \
4.5563, 6.8344, 10.2516, 15.3773, 1537.7344 ");
values (" 0.06487, 0.07017, 0.07481, 0.08624, 0.09792, 0.10080, 0.10800, 0.11497, \
0.11832, 0.11934, 0.11949, 0.11924, 0.11924, 0.07318, 0.07848, 0.08313, \
0.09461, 0.10640, 0.10931, 0.11664, 0.12377, 0.12721, 0.12826, 0.12842, \
0.12817, 0.12817, 0.09818, 0.10349, 0.10817, 0.11977, 0.13181, 0.13481, \
0.14240, 0.14987, 0.15352, 0.15464, 0.15481, 0.15455, 0.15456, 0.10655, \
0.11187, 0.11656, 0.12819, 0.14029, 0.14331, 0.15097, 0.15852, 0.16223, \
0.16337, 0.16354, 0.16328, 0.16329, 0.15705, 0.16241, 0.16714, 0.17891, \
0.19126, 0.19436, 0.20228, 0.21015, 0.21405, 0.21526, 0.21544, 0.21518, \
0.21519, 0.16550, 0.17086, 0.17559, 0.18739, 0.19976, 0.20287, 0.21081, \
0.21871, 0.22263, 0.22385, 0.22403, 0.22377, 0.22378 ");
}
}
capacitance () {
top_plane: metal9;
bottom_plane: metal5;
lateral_capacitance (capacitance_template_WxS) {
index_1 (" 0.4000, 0.5000, 0.8000, 0.9000, 1.5000, 1.6000 ");
index_2 (" 0.4000, 0.5000, 0.6000, 0.9000, 1.3500, 1.5000, 2.0250, 3.0375, \
4.5563, 6.8344, 10.2516, 15.3773, 1537.7344 ");
values (" 0.06213, 0.05067, 0.04261, 0.02822, 0.01742, 0.01510, 0.00945, 0.00413, \
0.00128, 0.00023, 0.00002, 0.00000, 0.00000, 0.06302, 0.05144, 0.04329, \
0.02871, 0.01774, 0.01538, 0.00964, 0.00422, 0.00131, 0.00024, 0.00002, \
0.00000, 0.00000, 0.06472, 0.05294, 0.04462, 0.02969, 0.01840, 0.01597, \
0.01003, 0.00441, 0.00137, 0.00025, 0.00002, 0.00000, 0.00000, 0.06511, \
0.05328, 0.04493, 0.02992, 0.01856, 0.01611, 0.01013, 0.00445, 0.00138, \
0.00025, 0.00002, 0.00000, 0.00000, 0.06645, 0.05449, 0.04602, 0.03074, \
0.01913, 0.01661, 0.01047, 0.00461, 0.00144, 0.00026, 0.00002, 0.00000, \
0.00000, 0.06657, 0.05459, 0.04612, 0.03082, 0.01918, 0.01666, 0.01050, \
0.00463, 0.00144, 0.00027, 0.00002, 0.00000, 0.00000 ");
}
ground_capacitance (capacitance_template_WxS) {
index_1 (" 0.4000, 0.5000, 0.8000, 0.9000, 1.5000, 1.6000 ");
index_2 (" 0.4000, 0.5000, 0.6000, 0.9000, 1.3500, 1.5000, 2.0250, 3.0375, \
4.5563, 6.8344, 10.2516, 15.3773, 1537.7344 ");
values (" 0.02964, 0.03250, 0.03522, 0.04274, 0.05209, 0.05471, 0.06217, 0.07089, \
0.07628, 0.07840, 0.07886, 0.07865, 0.07865, 0.03281, 0.03568, 0.03843, \
0.04603, 0.05550, 0.05816, 0.06573, 0.07460, 0.08011, 0.08228, 0.08274, \
0.08253, 0.08254, 0.04253, 0.04545, 0.04826, 0.05602, 0.06572, 0.06846, \
0.07626, 0.08545, 0.09119, 0.09346, 0.09394, 0.09373, 0.09374, 0.04583, \
0.04877, 0.05158, 0.05938, 0.06914, 0.07189, 0.07975, 0.08902, 0.09481, \
0.09710, 0.09759, 0.09738, 0.09739, 0.06600, 0.06899, 0.07185, 0.07978, \
0.08974, 0.09256, 0.10061, 0.11016, 0.11616, 0.11854, 0.11905, 0.11884, \
0.11884, 0.06940, 0.07239, 0.07526, 0.08321, 0.09318, 0.09601, 0.10408, \
0.11366, 0.11967, 0.12207, 0.12258, 0.12236, 0.12237 ");
}
}
capacitance () {
top_plane: metal9;
bottom_plane: metal4;
lateral_capacitance (capacitance_template_WxS) {
index_1 (" 0.4000, 0.5000, 0.8000, 0.9000, 1.5000, 1.6000 ");
index_2 (" 0.4000, 0.5000, 0.6000, 0.9000, 1.3500, 1.5000, 2.0250, 3.0375, \
4.5563, 6.8344, 10.2516, 15.3773, 1537.7344 ");
values (" 0.06438, 0.05305, 0.04509, 0.03089, 0.02008, 0.01770, 0.01177, 0.00574, \
0.00206, 0.00046, 0.00005, 0.00000, 0.00000, 0.06547, 0.05401, 0.04594, \
0.03150, 0.02049, 0.01806, 0.01201, 0.00586, 0.00210, 0.00047, 0.00005, \
0.00000, 0.00000, 0.06765, 0.05592, 0.04765, 0.03275, 0.02132, 0.01880, \
0.01251, 0.00610, 0.00219, 0.00049, 0.00006, 0.00000, 0.00000, 0.06815, \
0.05637, 0.04805, 0.03304, 0.02152, 0.01898, 0.01263, 0.00616, 0.00221, \
0.00050, 0.00006, 0.00000, 0.00000, 0.06987, 0.05790, 0.04942, 0.03406, \
0.02221, 0.01959, 0.01304, 0.00637, 0.00229, 0.00052, 0.00006, 0.00000, \
0.00000, 0.07001, 0.05803, 0.04954, 0.03415, 0.02227, 0.01965, 0.01308, \
0.00639, 0.00230, 0.00052, 0.00006, 0.00000, 0.00000 ");
}
ground_capacitance (capacitance_template_WxS) {
index_1 (" 0.4000, 0.5000, 0.8000, 0.9000, 1.5000, 1.6000 ");
index_2 (" 0.4000, 0.5000, 0.6000, 0.9000, 1.3500, 1.5000, 2.0250, 3.0375, \
4.5563, 6.8344, 10.2516, 15.3773, 1537.7344 ");
values (" 0.02237, 0.02444, 0.02643, 0.03207, 0.03954, 0.04176, 0.04847, 0.05738, \
0.06396, 0.06713, 0.06799, 0.06787, 0.06788, 0.02446, 0.02654, 0.02855, \
0.03427, 0.04186, 0.04412, 0.05096, 0.06004, 0.06676, 0.07000, 0.07087, \
0.07075, 0.07075, 0.03094, 0.03306, 0.03513, 0.04104, 0.04891, 0.05126, \
0.05835, 0.06778, 0.07477, 0.07815, 0.07907, 0.07895, 0.07895, 0.03316, \
0.03530, 0.03739, 0.04334, 0.05128, 0.05365, 0.06080, 0.07032, 0.07737, \
0.08079, 0.08171, 0.08159, 0.08159, 0.04701, 0.04922, 0.05136, 0.05750, \
0.06568, 0.06811, 0.07548, 0.08529, 0.09258, 0.09611, 0.09707, 0.09695, \
0.09695, 0.04938, 0.05159, 0.05374, 0.05989, 0.06809, 0.07053, 0.07792, \
0.08776, 0.09507, 0.09861, 0.09957, 0.09945, 0.09946 ");
}
}
capacitance () {
top_plane: metal9;
bottom_plane: metal3;
lateral_capacitance (capacitance_template_WxS) {
index_1 (" 0.4000, 0.5000, 0.8000, 0.9000, 1.5000, 1.6000 ");
index_2 (" 0.4000, 0.5000, 0.6000, 0.9000, 1.3500, 1.5000, 2.0250, 3.0375, \
4.5563, 6.8344, 10.2516, 15.3773, 1537.7344 ");
values (" 0.06519, 0.05392, 0.04602, 0.03194, 0.02123, 0.01887, 0.01290, 0.00665, \
0.00259, 0.00065, 0.00009, 0.00000, 0.00000, 0.06636, 0.05496, 0.04695, \
0.03263, 0.02170, 0.01928, 0.01319, 0.00679, 0.00264, 0.00067, 0.00009, \
0.00000, 0.00000, 0.06877, 0.05710, 0.04887, 0.03405, 0.02267, 0.02015, \
0.01378, 0.00710, 0.00276, 0.00070, 0.00009, 0.00000, 0.00000, 0.06935, \
0.05761, 0.04933, 0.03439, 0.02290, 0.02035, 0.01392, 0.00717, 0.00279, \
0.00070, 0.00009, 0.00000, 0.00000, 0.07136, 0.05941, 0.05095, 0.03560, \
0.02373, 0.02108, 0.01442, 0.00743, 0.00289, 0.00073, 0.00010, 0.00000, \
0.00000, 0.07154, 0.05957, 0.05109, 0.03571, 0.02380, 0.02115, 0.01446, \
0.00745, 0.00290, 0.00073, 0.00010, 0.00000, 0.00000 ");
}
ground_capacitance (capacitance_template_WxS) {
index_1 (" 0.4000, 0.5000, 0.8000, 0.9000, 1.5000, 1.6000 ");
index_2 (" 0.4000, 0.5000, 0.6000, 0.9000, 1.3500, 1.5000, 2.0250, 3.0375, \
4.5563, 6.8344, 10.2516, 15.3773, 1537.7344 ");
values (" 0.02007, 0.02187, 0.02361, 0.02852, 0.03514, 0.03714, 0.04333, 0.05202, \
0.05903, 0.06281, 0.06399, 0.06395, 0.06396, 0.02183, 0.02363, 0.02537, \
0.03036, 0.03709, 0.03914, 0.04545, 0.05432, 0.06148, 0.06534, 0.06654, \
0.06650, 0.06651, 0.02725, 0.02909, 0.03088, 0.03603, 0.04305, 0.04517, \
0.05176, 0.06100, 0.06848, 0.07251, 0.07377, 0.07373, 0.07374, 0.02912, \
0.03096, 0.03277, 0.03798, 0.04506, 0.04721, 0.05386, 0.06319, 0.07074, \
0.07482, 0.07609, 0.07605, 0.07606, 0.04081, 0.04272, 0.04460, 0.05000, \
0.05734, 0.05957, 0.06646, 0.07613, 0.08394, 0.08817, 0.08948, 0.08944, \
0.08945, 0.04282, 0.04474, 0.04662, 0.05204, 0.05941, 0.06165, 0.06856, \
0.07826, 0.08610, 0.09034, 0.09165, 0.09162, 0.09163 ");
}
}
capacitance () {
top_plane: metal9;
bottom_plane: SUBSTRATE;
lateral_capacitance (capacitance_template_WxS) {
index_1 (" 0.4000, 0.5000, 0.8000, 0.9000, 1.5000, 1.6000 ");
index_2 (" 0.4000, 0.5000, 0.6000, 0.9000, 1.3500, 1.5000, 2.0250, 3.0375, \
4.5563, 6.8344, 10.2516, 15.3773, 1537.7344 ");
values (" 0.06619, 0.05500, 0.04718, 0.03331, 0.02283, 0.02051, 0.01463, 0.00823, \
0.00368, 0.00114, 0.00021, 0.00002, 0.00000, 0.06747, 0.05615, 0.04822, \
0.03411, 0.02339, 0.02102, 0.01499, 0.00843, 0.00377, 0.00117, 0.00021, \
0.00002, 0.00000, 0.07021, 0.05862, 0.05046, 0.03583, 0.02462, 0.02212, \
0.01577, 0.00887, 0.00396, 0.00123, 0.00022, 0.00002, 0.00000, 0.07089, \
0.05923, 0.05102, 0.03626, 0.02492, 0.02240, 0.01597, 0.00898, 0.00401, \
0.00124, 0.00022, 0.00002, 0.00000, 0.07345, 0.06155, 0.05313, 0.03790, \
0.02609, 0.02345, 0.01672, 0.00939, 0.00420, 0.00130, 0.00023, 0.00002, \
0.00000, 0.07370, 0.06178, 0.05334, 0.03806, 0.02621, 0.02356, 0.01680, \
0.00943, 0.00422, 0.00131, 0.00024, 0.00002, 0.00000 ");
}
ground_capacitance (capacitance_template_WxS) {
index_1 (" 0.4000, 0.5000, 0.8000, 0.9000, 1.5000, 1.6000 ");
index_2 (" 0.4000, 0.5000, 0.6000, 0.9000, 1.3500, 1.5000, 2.0250, 3.0375, \
4.5563, 6.8344, 10.2516, 15.3773, 1537.7344 ");
values (" 0.01735, 0.01887, 0.02031, 0.02435, 0.02980, 0.03147, 0.03676, 0.04471, \
0.05201, 0.05678, 0.05869, 0.05888, 0.05892, 0.01878, 0.02026, 0.02169, \
0.02576, 0.03130, 0.03300, 0.03841, 0.04654, 0.05402, 0.05889, 0.06085, \
0.06105, 0.06108, 0.02301, 0.02449, 0.02594, 0.03012, 0.03588, 0.03767, \
0.04334, 0.05187, 0.05973, 0.06486, 0.06691, 0.06713, 0.06717, 0.02445, \
0.02594, 0.02740, 0.03161, 0.03744, 0.03925, 0.04499, 0.05362, 0.06157, \
0.06676, 0.06884, 0.06907, 0.06910, 0.03351, 0.03505, 0.03656, 0.04095, \
0.04705, 0.04894, 0.05495, 0.06399, 0.07230, 0.07773, 0.07991, 0.08014, \
0.08018, 0.03508, 0.03662, 0.03814, 0.04255, 0.04868, 0.05058, 0.05662, \
0.06570, 0.07405, 0.07950, 0.08169, 0.08193, 0.08197 ");
}
}
capacitance () {
top_plane: metal10;
bottom_plane: metal6;
lateral_capacitance (capacitance_template_WxS) {
index_1 (" 0.4000, 0.5000, 0.8000, 0.9000, 1.5000, 1.6000 ");
index_2 (" 0.4000, 0.5000, 0.6000, 0.9000, 1.3500, 1.5000, 2.0250, 3.0375, \
4.5563, 6.8344, 10.2516, 15.3773, 1537.7344 ");
values (" 0.05648, 0.04517, 0.03732, 0.02374, 0.01424, 0.01231, 0.00786, 0.00388, \
0.00164, 0.00055, 0.00013, 0.00002, 0.00000, 0.05727, 0.04590, 0.03800, \
0.02430, 0.01467, 0.01272, 0.00816, 0.00407, 0.00174, 0.00059, 0.00014, \
0.00002, 0.00000, 0.05909, 0.04760, 0.03959, 0.02564, 0.01574, 0.01371, \
0.00893, 0.00454, 0.00197, 0.00068, 0.00016, 0.00002, 0.00000, 0.05959, \
0.04807, 0.04003, 0.02602, 0.01604, 0.01399, 0.00915, 0.00468, 0.00204, \
0.00070, 0.00016, 0.00002, 0.00000, 0.06182, 0.05018, 0.04204, 0.02775, \
0.01746, 0.01531, 0.01020, 0.00535, 0.00239, 0.00083, 0.00020, 0.00002, \
0.00000, 0.06210, 0.05045, 0.04229, 0.02798, 0.01764, 0.01549, 0.01034, \
0.00544, 0.00244, 0.00085, 0.00020, 0.00002, 0.00000 ");
}
ground_capacitance (capacitance_template_WxS) {
index_1 (" 0.4000, 0.5000, 0.8000, 0.9000, 1.5000, 1.6000 ");
index_2 (" 0.4000, 0.5000, 0.6000, 0.9000, 1.3500, 1.5000, 2.0250, 3.0375, \
4.5563, 6.8344, 10.2516, 15.3773, 1537.7344 ");
values (" 0.06227, 0.06728, 0.07161, 0.08212, 0.09266, 0.09526, 0.10185, 0.10874, \
0.11295, 0.11510, 0.11596, 0.11594, 0.11598, 0.07022, 0.07519, 0.07950, \
0.08999, 0.10058, 0.10320, 0.10989, 0.11697, 0.12135, 0.12362, 0.12453, \
0.12452, 0.12456, 0.09390, 0.09880, 0.10307, 0.11352, 0.12424, 0.12692, \
0.13387, 0.14139, 0.14619, 0.14875, 0.14980, 0.14983, 0.14987, 0.10177, \
0.10666, 0.11092, 0.12137, 0.13212, 0.13482, 0.14184, 0.14948, 0.15441, \
0.15705, 0.15814, 0.15818, 0.15822, 0.14891, 0.15377, 0.15801, 0.16847, \
0.17940, 0.18218, 0.18951, 0.19773, 0.20323, 0.20630, 0.20759, 0.20768, \
0.20774, 0.15676, 0.16162, 0.16586, 0.17632, 0.18727, 0.19006, 0.19743, \
0.20572, 0.21130, 0.21443, 0.21575, 0.21585, 0.21591 ");
}
}
capacitance () {
top_plane: metal10;
bottom_plane: metal5;
lateral_capacitance (capacitance_template_WxS) {
index_1 (" 0.4000, 0.5000, 0.8000, 0.9000, 1.5000, 1.6000 ");
index_2 (" 0.4000, 0.5000, 0.6000, 0.9000, 1.3500, 1.5000, 2.0250, 3.0375, \
4.5563, 6.8344, 10.2516, 15.3773, 1537.7344 ");
values (" 0.06326, 0.05189, 0.04392, 0.02980, 0.01936, 0.01712, 0.01168, 0.00631, \
0.00290, 0.00106, 0.00027, 0.00004, 0.00000, 0.06425, 0.05278, 0.04473, \
0.03044, 0.01984, 0.01757, 0.01203, 0.00653, 0.00302, 0.00111, 0.00028, \
0.00004, 0.00000, 0.06637, 0.05471, 0.04651, 0.03189, 0.02097, 0.01862, \
0.01285, 0.00707, 0.00331, 0.00122, 0.00031, 0.00004, 0.00000, 0.06691, \
0.05521, 0.04697, 0.03228, 0.02128, 0.01891, 0.01308, 0.00722, 0.00339, \
0.00126, 0.00032, 0.00005, 0.00000, 0.06921, 0.05736, 0.04900, 0.03402, \
0.02270, 0.02024, 0.01416, 0.00794, 0.00380, 0.00143, 0.00037, 0.00005, \
0.00000, 0.06948, 0.05762, 0.04925, 0.03423, 0.02288, 0.02041, 0.01430, \
0.00804, 0.00385, 0.00145, 0.00038, 0.00005, 0.00000 ");
}
ground_capacitance (capacitance_template_WxS) {
index_1 (" 0.4000, 0.5000, 0.8000, 0.9000, 1.5000, 1.6000 ");
index_2 (" 0.4000, 0.5000, 0.6000, 0.9000, 1.3500, 1.5000, 2.0250, 3.0375, \
4.5563, 6.8344, 10.2516, 15.3773, 1537.7344 ");
values (" 0.02668, 0.02925, 0.03166, 0.03821, 0.04616, 0.04839, 0.05475, 0.06267, \
0.06860, 0.07214, 0.07373, 0.07398, 0.07406, 0.02952, 0.03206, 0.03446, \
0.04101, 0.04900, 0.05125, 0.05769, 0.06576, 0.07186, 0.07553, 0.07719, \
0.07746, 0.07754, 0.03795, 0.04046, 0.04284, 0.04938, 0.05746, 0.05975, \
0.06637, 0.07479, 0.08128, 0.08527, 0.08711, 0.08743, 0.08752, 0.04075, \
0.04326, 0.04564, 0.05217, 0.06028, 0.06257, 0.06924, 0.07776, 0.08436, \
0.08844, 0.09033, 0.09066, 0.09076, 0.05760, 0.06008, 0.06245, 0.06898, \
0.07718, 0.07952, 0.08640, 0.09534, 0.10246, 0.10697, 0.10911, 0.10952, \
0.10963, 0.06041, 0.06288, 0.06525, 0.07179, 0.08000, 0.08235, 0.08925, \
0.09824, 0.10543, 0.11001, 0.11217, 0.11259, 0.11271 ");
}
}
capacitance () {
top_plane: metal10;
bottom_plane: metal4;
lateral_capacitance (capacitance_template_WxS) {
index_1 (" 0.4000, 0.5000, 0.8000, 0.9000, 1.5000, 1.6000 ");
index_2 (" 0.4000, 0.5000, 0.6000, 0.9000, 1.3500, 1.5000, 2.0250, 3.0375, \
4.5563, 6.8344, 10.2516, 15.3773, 1537.7344 ");
values (" 0.06564, 0.05440, 0.04653, 0.03259, 0.02215, 0.01988, 0.01421, 0.00826, \
0.00411, 0.00162, 0.00045, 0.00007, 0.00000, 0.06683, 0.05547, 0.04750, \
0.03335, 0.02272, 0.02041, 0.01461, 0.00852, 0.00425, 0.00168, 0.00047, \
0.00007, 0.00000, 0.06940, 0.05780, 0.04964, 0.03506, 0.02403, 0.02161, \
0.01555, 0.00913, 0.00459, 0.00183, 0.00051, 0.00008, 0.00000, 0.07005, \
0.05839, 0.05019, 0.03551, 0.02438, 0.02193, 0.01580, 0.00930, 0.00469, \
0.00187, 0.00053, 0.00008, 0.00000, 0.07271, 0.06086, 0.05249, 0.03742, \
0.02590, 0.02336, 0.01694, 0.01007, 0.00514, 0.00207, 0.00059, 0.00009, \
0.00000, 0.07301, 0.06114, 0.05275, 0.03765, 0.02609, 0.02353, 0.01709, \
0.01017, 0.00520, 0.00210, 0.00059, 0.00009, 0.00000 ");
}
ground_capacitance (capacitance_template_WxS) {
index_1 (" 0.4000, 0.5000, 0.8000, 0.9000, 1.5000, 1.6000 ");
index_2 (" 0.4000, 0.5000, 0.6000, 0.9000, 1.3500, 1.5000, 2.0250, 3.0375, \
4.5563, 6.8344, 10.2516, 15.3773, 1537.7344 ");
values (" 0.01910, 0.02089, 0.02257, 0.02724, 0.03326, 0.03503, 0.04042, 0.04799, \
0.05462, 0.05919, 0.06152, 0.06210, 0.06225, 0.02089, 0.02264, 0.02431, \
0.02897, 0.03502, 0.03681, 0.04229, 0.05000, 0.05680, 0.06152, 0.06393, \
0.06453, 0.06469, 0.02613, 0.02784, 0.02949, 0.03415, 0.04031, 0.04215, \
0.04781, 0.05586, 0.06305, 0.06810, 0.07072, 0.07139, 0.07157, 0.02787, \
0.02957, 0.03122, 0.03589, 0.04208, 0.04394, 0.04963, 0.05777, 0.06507, \
0.07022, 0.07289, 0.07359, 0.07377, 0.03843, 0.04013, 0.04178, 0.04649, \
0.05280, 0.05470, 0.06058, 0.06910, 0.07687, 0.08246, 0.08541, 0.08620, \
0.08640, 0.04020, 0.04190, 0.04356, 0.04828, 0.05459, 0.05650, 0.06241, \
0.07097, 0.07880, 0.08445, 0.08743, 0.08824, 0.08844 ");
}
}
capacitance () {
top_plane: metal10;
bottom_plane: metal3;
lateral_capacitance (capacitance_template_WxS) {
index_1 (" 0.4000, 0.5000, 0.8000, 0.9000, 1.5000, 1.6000 ");
index_2 (" 0.4000, 0.5000, 0.6000, 0.9000, 1.3500, 1.5000, 2.0250, 3.0375, \
4.5563, 6.8344, 10.2516, 15.3773, 1537.7344 ");
values (" 0.06653, 0.05535, 0.04753, 0.03372, 0.02339, 0.02113, 0.01545, 0.00934, \
0.00487, 0.00203, 0.00060, 0.00010, 0.00000, 0.06780, 0.05649, 0.04858, \
0.03455, 0.02401, 0.02170, 0.01589, 0.00962, 0.00503, 0.00210, 0.00062, \
0.00011, 0.00000, 0.07059, 0.05904, 0.05092, 0.03643, 0.02545, 0.02303, \
0.01692, 0.01029, 0.00541, 0.00227, 0.00067, 0.00011, 0.00000, 0.07131, \
0.05970, 0.05153, 0.03692, 0.02583, 0.02338, 0.01719, 0.01048, 0.00552, \
0.00232, 0.00069, 0.00012, 0.00000, 0.07425, 0.06242, 0.05406, 0.03902, \
0.02748, 0.02492, 0.01842, 0.01131, 0.00600, 0.00254, 0.00076, 0.00013, \
0.00000, 0.07458, 0.06273, 0.05435, 0.03927, 0.02768, 0.02511, 0.01857, \
0.01141, 0.00607, 0.00257, 0.00077, 0.00013, 0.00000 ");
}
ground_capacitance (capacitance_template_WxS) {
index_1 (" 0.4000, 0.5000, 0.8000, 0.9000, 1.5000, 1.6000 ");
index_2 (" 0.4000, 0.5000, 0.6000, 0.9000, 1.3500, 1.5000, 2.0250, 3.0375, \
4.5563, 6.8344, 10.2516, 15.3773, 1537.7344 ");
values (" 0.01660, 0.01812, 0.01956, 0.02352, 0.02867, 0.03021, 0.03500, 0.04209, \
0.04883, 0.05390, 0.05669, 0.05752, 0.05773, 0.01807, 0.01955, 0.02096, \
0.02489, 0.03006, 0.03162, 0.03649, 0.04373, 0.05064, 0.05586, 0.05874, \
0.05960, 0.05982, 0.02229, 0.02371, 0.02509, 0.02900, 0.03428, 0.03588, \
0.04093, 0.04850, 0.05580, 0.06138, 0.06449, 0.06544, 0.06568, 0.02368, \
0.02510, 0.02647, 0.03039, 0.03569, 0.03731, 0.04240, 0.05006, 0.05747, \
0.06314, 0.06632, 0.06729, 0.06754, 0.03212, 0.03353, 0.03491, 0.03888, \
0.04432, 0.04599, 0.05127, 0.05931, 0.06718, 0.07330, 0.07678, 0.07786, \
0.07813, 0.03355, 0.03496, 0.03634, 0.04032, 0.04577, 0.04744, 0.05276, \
0.06084, 0.06877, 0.07494, 0.07846, 0.07956, 0.07983 ");
}
}
capacitance () {
top_plane: metal10;
bottom_plane: SUBSTRATE;
lateral_capacitance (capacitance_template_WxS) {
index_1 (" 0.4000, 0.5000, 0.8000, 0.9000, 1.5000, 1.6000 ");
index_2 (" 0.4000, 0.5000, 0.6000, 0.9000, 1.3500, 1.5000, 2.0250, 3.0375, \
4.5563, 6.8344, 10.2516, 15.3773, 1537.7344 ");
values (" 0.06771, 0.05660, 0.04886, 0.03525, 0.02513, 0.02293, 0.01735, 0.01118, \
0.00635, 0.00293, 0.00098, 0.00020, 0.00000, 0.06907, 0.05784, 0.05001, \
0.03617, 0.02585, 0.02359, 0.01786, 0.01152, 0.00655, 0.00303, 0.00101, \
0.00020, 0.00000, 0.07216, 0.06069, 0.05264, 0.03833, 0.02752, 0.02514, \
0.01908, 0.01233, 0.00702, 0.00325, 0.00109, 0.00022, 0.00000, 0.07298, \
0.06144, 0.05334, 0.03891, 0.02797, 0.02556, 0.01941, 0.01255, 0.00715, \
0.00332, 0.00112, 0.00022, 0.00000, 0.07644, 0.06466, 0.05635, 0.04141, \
0.02995, 0.02740, 0.02087, 0.01354, 0.00774, 0.00360, 0.00122, 0.00025, \
0.00000, 0.07684, 0.06503, 0.05670, 0.04171, 0.03019, 0.02762, 0.02105, \
0.01366, 0.00782, 0.00364, 0.00123, 0.00025, 0.00000 ");
}
ground_capacitance (capacitance_template_WxS) {
index_1 (" 0.4000, 0.5000, 0.8000, 0.9000, 1.5000, 1.6000 ");
index_2 (" 0.4000, 0.5000, 0.6000, 0.9000, 1.3500, 1.5000, 2.0250, 3.0375, \
4.5563, 6.8344, 10.2516, 15.3773, 1537.7344 ");
values (" 0.01348, 0.01471, 0.01586, 0.01897, 0.02295, 0.02415, 0.02795, 0.03396, \
0.04040, 0.04607, 0.04976, 0.05117, 0.05158, 0.01463, 0.01579, 0.01689, \
0.01993, 0.02391, 0.02512, 0.02898, 0.03512, 0.04173, 0.04756, 0.05136, \
0.05282, 0.05324, 0.01774, 0.01881, 0.01985, 0.02279, 0.02680, 0.02804, \
0.03205, 0.03851, 0.04552, 0.05173, 0.05580, 0.05739, 0.05784, 0.01872, \
0.01978, 0.02081, 0.02374, 0.02777, 0.02902, 0.03308, 0.03962, 0.04674, \
0.05306, 0.05721, 0.05882, 0.05929, 0.02460, 0.02564, 0.02666, 0.02962, \
0.03377, 0.03508, 0.03933, 0.04626, 0.05385, 0.06065, 0.06514, 0.06692, \
0.06743, 0.02559, 0.02663, 0.02765, 0.03062, 0.03479, 0.03610, 0.04039, \
0.04736, 0.05501, 0.06187, 0.06641, 0.06820, 0.06872 ");
}
}
capacitance () {
top_plane: AIR;
bottom_plane: metal6;
lateral_capacitance (capacitance_template_WxS) {
index_1 (" 0.4000, 0.5000, 0.8000, 0.9000, 1.5000, 1.6000 ");
index_2 (" 0.4000, 0.5000, 0.6000, 0.9000, 1.3500, 1.5000, 2.0250, 3.0375, \
4.5563, 6.8344, 10.2516, 15.3773, 1537.7344 ");
values (" 0.05708, 0.04580, 0.03797, 0.02444, 0.01498, 0.01307, 0.00864, 0.00468, \
0.00242, 0.00122, 0.00060, 0.00026, 0.00000, 0.05789, 0.04655, 0.03867, \
0.02503, 0.01546, 0.01352, 0.00901, 0.00494, 0.00258, 0.00131, 0.00065, \
0.00029, 0.00000, 0.05979, 0.04833, 0.04035, 0.02649, 0.01668, 0.01467, \
0.00997, 0.00564, 0.00304, 0.00158, 0.00079, 0.00036, 0.00000, 0.06032, \
0.04883, 0.04083, 0.02691, 0.01704, 0.01502, 0.01025, 0.00585, 0.00318, \
0.00167, 0.00084, 0.00038, 0.00000, 0.06283, 0.05124, 0.04314, 0.02899, \
0.01885, 0.01675, 0.01175, 0.00699, 0.00398, 0.00217, 0.00112, 0.00051, \
0.00000, 0.06317, 0.05156, 0.04346, 0.02928, 0.01911, 0.01700, 0.01197, \
0.00717, 0.00410, 0.00225, 0.00117, 0.00054, 0.00000 ");
}
ground_capacitance (capacitance_template_WxS) {
index_1 (" 0.4000, 0.5000, 0.8000, 0.9000, 1.5000, 1.6000 ");
index_2 (" 0.4000, 0.5000, 0.6000, 0.9000, 1.3500, 1.5000, 2.0250, 3.0375, \
4.5563, 6.8344, 10.2516, 15.3773, 1537.7344 ");
values (" 0.06068, 0.06561, 0.06987, 0.08019, 0.09054, 0.09308, 0.09954, 0.10629, \
0.11045, 0.11277, 0.11400, 0.11442, 0.11496, 0.06857, 0.07345, 0.07769, \
0.08796, 0.09832, 0.10087, 0.10740, 0.11429, 0.11861, 0.12106, 0.12237, \
0.12285, 0.12344, 0.09202, 0.09682, 0.10100, 0.11116, 0.12152, 0.12411, \
0.13078, 0.13801, 0.14273, 0.14552, 0.14707, 0.14769, 0.14842, 0.09979, \
0.10458, 0.10873, 0.11887, 0.12923, 0.13182, 0.13854, 0.14586, 0.15069, \
0.15358, 0.15521, 0.15588, 0.15666, 0.14613, 0.15084, 0.15493, 0.16494, \
0.17529, 0.17791, 0.18479, 0.19255, 0.19794, 0.20137, 0.20342, 0.20438, \
0.20543, 0.15381, 0.15851, 0.16259, 0.17258, 0.18293, 0.18555, 0.19246, \
0.20027, 0.20574, 0.20925, 0.21136, 0.21237, 0.21347 ");
}
}
capacitance () {
top_plane: AIR;
bottom_plane: metal5;
lateral_capacitance (capacitance_template_WxS) {
index_1 (" 0.4000, 0.5000, 0.8000, 0.9000, 1.5000, 1.6000 ");
index_2 (" 0.4000, 0.5000, 0.6000, 0.9000, 1.3500, 1.5000, 2.0250, 3.0375, \
4.5563, 6.8344, 10.2516, 15.3773, 1537.7344 ");
values (" 0.06404, 0.05270, 0.04475, 0.03070, 0.02032, 0.01811, 0.01274, 0.00746, \
0.00409, 0.00214, 0.00107, 0.00049, 0.00000, 0.06506, 0.05361, 0.04558, \
0.03136, 0.02085, 0.01861, 0.01314, 0.00776, 0.00430, 0.00227, 0.00114, \
0.00052, 0.00000, 0.06724, 0.05561, 0.04744, 0.03292, 0.02213, 0.01982, \
0.01417, 0.00854, 0.00484, 0.00261, 0.00134, 0.00061, 0.00000, 0.06782, \
0.05614, 0.04794, 0.03335, 0.02250, 0.02017, 0.01447, 0.00878, 0.00501, \
0.00272, 0.00140, 0.00064, 0.00000, 0.07038, 0.05858, 0.05027, 0.03543, \
0.02432, 0.02192, 0.01601, 0.01001, 0.00592, 0.00332, 0.00175, 0.00082, \
0.00000, 0.07071, 0.05890, 0.05058, 0.03571, 0.02457, 0.02217, 0.01624, \
0.01020, 0.00606, 0.00342, 0.00181, 0.00085, 0.00000 ");
}
ground_capacitance (capacitance_template_WxS) {
index_1 (" 0.4000, 0.5000, 0.8000, 0.9000, 1.5000, 1.6000 ");
index_2 (" 0.4000, 0.5000, 0.6000, 0.9000, 1.3500, 1.5000, 2.0250, 3.0375, \
4.5563, 6.8344, 10.2516, 15.3773, 1537.7344 ");
values (" 0.02470, 0.02717, 0.02949, 0.03581, 0.04348, 0.04561, 0.05170, 0.05919, \
0.06481, 0.06840, 0.07046, 0.07141, 0.07240, 0.02747, 0.02992, 0.03223, \
0.03853, 0.04619, 0.04833, 0.05445, 0.06203, 0.06779, 0.07150, 0.07367, \
0.07468, 0.07574, 0.03569, 0.03809, 0.04037, 0.04658, 0.05421, 0.05635, \
0.06252, 0.07029, 0.07636, 0.08041, 0.08285, 0.08405, 0.08530, 0.03840, \
0.04079, 0.04305, 0.04924, 0.05685, 0.05899, 0.06517, 0.07299, 0.07914, \
0.08329, 0.08582, 0.08708, 0.08839, 0.05445, 0.05677, 0.05898, 0.06503, \
0.07252, 0.07465, 0.08085, 0.08889, 0.09546, 0.10011, 0.10310, 0.10470, \
0.10636, 0.05709, 0.05940, 0.06160, 0.06763, 0.07511, 0.07724, 0.08343, \
0.09150, 0.09813, 0.10285, 0.10591, 0.10757, 0.10928 ");
}
}
capacitance () {
top_plane: AIR;
bottom_plane: metal4;
lateral_capacitance (capacitance_template_WxS) {
index_1 (" 0.4000, 0.5000, 0.8000, 0.9000, 1.5000, 1.6000 ");
index_2 (" 0.4000, 0.5000, 0.6000, 0.9000, 1.3500, 1.5000, 2.0250, 3.0375, \
4.5563, 6.8344, 10.2516, 15.3773, 1537.7344 ");
values (" 0.06658, 0.05537, 0.04752, 0.03365, 0.02330, 0.02105, 0.01547, 0.00967, \
0.00563, 0.00309, 0.00159, 0.00074, 0.00000, 0.06779, 0.05645, 0.04851, \
0.03444, 0.02391, 0.02162, 0.01593, 0.01001, 0.00587, 0.00324, 0.00168, \
0.00079, 0.00000, 0.07042, 0.05885, 0.05073, 0.03625, 0.02535, 0.02298, \
0.01707, 0.01088, 0.00649, 0.00364, 0.00192, 0.00091, 0.00000, 0.07110, \
0.05948, 0.05131, 0.03673, 0.02576, 0.02336, 0.01740, 0.01113, 0.00668, \
0.00377, 0.00200, 0.00094, 0.00000, 0.07402, 0.06222, 0.05390, 0.03898, \
0.02768, 0.02521, 0.01901, 0.01244, 0.00767, 0.00445, 0.00241, 0.00116, \
0.00000, 0.07437, 0.06256, 0.05423, 0.03928, 0.02794, 0.02546, 0.01924, \
0.01263, 0.00782, 0.00456, 0.00248, 0.00119, 0.00000 ");
}
ground_capacitance (capacitance_template_WxS) {
index_1 (" 0.4000, 0.5000, 0.8000, 0.9000, 1.5000, 1.6000 ");
index_2 (" 0.4000, 0.5000, 0.6000, 0.9000, 1.3500, 1.5000, 2.0250, 3.0375, \
4.5563, 6.8344, 10.2516, 15.3773, 1537.7344 ");
values (" 0.01675, 0.01842, 0.02002, 0.02444, 0.03013, 0.03180, 0.03684, 0.04379, \
0.04982, 0.05420, 0.05698, 0.05845, 0.05995, 0.01848, 0.02012, 0.02169, \
0.02609, 0.03178, 0.03345, 0.03852, 0.04554, 0.05168, 0.05619, 0.05909, \
0.06064, 0.06222, 0.02352, 0.02511, 0.02665, 0.03098, 0.03665, 0.03833, \
0.04343, 0.05059, 0.05699, 0.06182, 0.06501, 0.06678, 0.06860, 0.02517, \
0.02676, 0.02829, 0.03260, 0.03826, 0.03993, 0.04504, 0.05223, 0.05869, \
0.06362, 0.06689, 0.06873, 0.07063, 0.03496, 0.03650, 0.03799, 0.04220, \
0.04775, 0.04941, 0.05451, 0.06181, 0.06859, 0.07396, 0.07770, 0.07991, \
0.08224, 0.03657, 0.03810, 0.03958, 0.04378, 0.04931, 0.05097, 0.05606, \
0.06338, 0.07020, 0.07563, 0.07943, 0.08171, 0.08410 ");
}
}
capacitance () {
top_plane: AIR;
bottom_plane: metal3;
lateral_capacitance (capacitance_template_WxS) {
index_1 (" 0.4000, 0.5000, 0.8000, 0.9000, 1.5000, 1.6000 ");
index_2 (" 0.4000, 0.5000, 0.6000, 0.9000, 1.3500, 1.5000, 2.0250, 3.0375, \
4.5563, 6.8344, 10.2516, 15.3773, 1537.7344 ");
values (" 0.06757, 0.05642, 0.04863, 0.03490, 0.02465, 0.02242, 0.01683, 0.01089, \
0.00659, 0.00373, 0.00197, 0.00094, 0.00000, 0.06886, 0.05758, 0.04970, \
0.03574, 0.02531, 0.02303, 0.01733, 0.01126, 0.00685, 0.00389, 0.00207, \
0.00099, 0.00000, 0.07172, 0.06019, 0.05211, 0.03772, 0.02688, 0.02451, \
0.01856, 0.01219, 0.00752, 0.00434, 0.00234, 0.00113, 0.00000, 0.07246, \
0.06088, 0.05275, 0.03825, 0.02731, 0.02492, 0.01890, 0.01246, 0.00772, \
0.00448, 0.00242, 0.00117, 0.00000, 0.07565, 0.06387, 0.05556, 0.04067, \
0.02936, 0.02687, 0.02060, 0.01383, 0.00877, 0.00521, 0.00288, 0.00141, \
0.00000, 0.07604, 0.06424, 0.05592, 0.04099, 0.02963, 0.02713, 0.02083, \
0.01403, 0.00892, 0.00532, 0.00295, 0.00145, 0.00000 ");
}
ground_capacitance (capacitance_template_WxS) {
index_1 (" 0.4000, 0.5000, 0.8000, 0.9000, 1.5000, 1.6000 ");
index_2 (" 0.4000, 0.5000, 0.6000, 0.9000, 1.3500, 1.5000, 2.0250, 3.0375, \
4.5563, 6.8344, 10.2516, 15.3773, 1537.7344 ");
values (" 0.01402, 0.01541, 0.01674, 0.02044, 0.02526, 0.02670, 0.03111, 0.03750, \
0.04345, 0.04813, 0.05131, 0.05312, 0.05500, 0.01542, 0.01678, 0.01809, \
0.02175, 0.02655, 0.02798, 0.03242, 0.03887, 0.04492, 0.04973, 0.05303, \
0.05493, 0.05690, 0.01945, 0.02075, 0.02201, 0.02559, 0.03036, 0.03179, \
0.03626, 0.04282, 0.04911, 0.05422, 0.05782, 0.05996, 0.06221, 0.02075, \
0.02205, 0.02330, 0.02686, 0.03161, 0.03305, 0.03751, 0.04410, 0.05045, \
0.05565, 0.05934, 0.06155, 0.06388, 0.02845, 0.02969, 0.03091, 0.03437, \
0.03904, 0.04045, 0.04491, 0.05159, 0.05820, 0.06381, 0.06796, 0.07056, \
0.07337, 0.02971, 0.03095, 0.03216, 0.03560, 0.04026, 0.04167, 0.04612, \
0.05281, 0.05945, 0.06513, 0.06933, 0.07200, 0.07488 ");
}
}
capacitance () {
top_plane: AIR;
bottom_plane: SUBSTRATE;
lateral_capacitance (capacitance_template_WxS) {
index_1 (" 0.4000, 0.5000, 0.8000, 0.9000, 1.5000, 1.6000 ");
index_2 (" 0.4000, 0.5000, 0.6000, 0.9000, 1.3500, 1.5000, 2.0250, 3.0375, \
4.5563, 6.8344, 10.2516, 15.3773, 1537.7344 ");
values (" 0.06894, 0.05788, 0.05018, 0.03667, 0.02664, 0.02446, 0.01898, 0.01302, \
0.00843, 0.00510, 0.00286, 0.00143, 0.00000, 0.07034, 0.05915, 0.05135, \
0.03761, 0.02739, 0.02516, 0.01956, 0.01345, 0.00874, 0.00531, 0.00298, \
0.00149, 0.00000, 0.07350, 0.06207, 0.05406, 0.03985, 0.02919, 0.02685, \
0.02096, 0.01452, 0.00952, 0.00584, 0.00332, 0.00167, 0.00000, 0.07435, \
0.06285, 0.05479, 0.04046, 0.02969, 0.02733, 0.02136, 0.01482, 0.00975, \
0.00600, 0.00342, 0.00173, 0.00000, 0.07804, 0.06631, 0.05805, 0.04327, \
0.03204, 0.02956, 0.02328, 0.01635, 0.01093, 0.00685, 0.00396, 0.00203, \
0.00000, 0.07849, 0.06674, 0.05846, 0.04363, 0.03235, 0.02985, 0.02354, \
0.01657, 0.01110, 0.00697, 0.00404, 0.00207, 0.00000 ");
}
ground_capacitance (capacitance_template_WxS) {
index_1 (" 0.4000, 0.5000, 0.8000, 0.9000, 1.5000, 1.6000 ");
index_2 (" 0.4000, 0.5000, 0.6000, 0.9000, 1.3500, 1.5000, 2.0250, 3.0375, \
4.5563, 6.8344, 10.2516, 15.3773, 1537.7344 ");
values (" 0.01042, 0.01148, 0.01249, 0.01529, 0.01892, 0.02001, 0.02341, 0.02861, \
0.03397, 0.03880, 0.04258, 0.04507, 0.04789, 0.01147, 0.01249, 0.01347, \
0.01620, 0.01978, 0.02086, 0.02427, 0.02950, 0.03494, 0.03989, 0.04379, \
0.04638, 0.04933, 0.01436, 0.01530, 0.01622, 0.01881, 0.02231, 0.02337, \
0.02677, 0.03207, 0.03769, 0.04291, 0.04712, 0.04998, 0.05327, 0.01527, \
0.01620, 0.01710, 0.01966, 0.02313, 0.02420, 0.02759, 0.03290, 0.03857, \
0.04387, 0.04816, 0.05110, 0.05450, 0.02045, 0.02132, 0.02218, 0.02463, \
0.02799, 0.02904, 0.03240, 0.03776, 0.04364, 0.04929, 0.05402, 0.05738, \
0.06135, 0.02129, 0.02215, 0.02300, 0.02544, 0.02879, 0.02984, 0.03319, \
0.03856, 0.04445, 0.05016, 0.05494, 0.05837, 0.06243 ");
}
}
}
layer (metal6) {
resistance: 0.210000
capacitance () {
top_plane: metal7;
bottom_plane: metal5;
lateral_capacitance (capacitance_template_WxS) {
index_1 (" 0.1400, 0.2700, 0.2800, 0.5000, 0.5600, 0.9000, 1.5000 ");
index_2 (" 0.1400, 0.2100, 0.2700, 0.3150, 0.4725, 0.5000, 0.7088, 0.9000, \
1.0631, 1.5000, 1.5947, 2.3920, 3.5880, 5.3821, 538.2070 ");
values (" 0.05924, 0.03873, 0.02882, 0.02365, 0.01261, 0.01137, 0.00528, 0.00266, \
0.00150, 0.00033, 0.00024, 0.00002, 0.00000, 0.00000, 0.00000, 0.06023, \
0.03939, 0.02930, 0.02404, 0.01281, 0.01155, 0.00536, 0.00271, 0.00152, \
0.00033, 0.00024, 0.00002, 0.00000, 0.00000, 0.00000, 0.06027, 0.03941, \
0.02932, 0.02405, 0.01282, 0.01156, 0.00536, 0.00271, 0.00152, 0.00033, \
0.00024, 0.00002, 0.00000, 0.00000, 0.00000, 0.06055, 0.03960, 0.02945, \
0.02416, 0.01287, 0.01161, 0.00538, 0.00272, 0.00153, 0.00033, 0.00024, \
0.00002, 0.00000, 0.00000, 0.00000, 0.06053, 0.03959, 0.02945, 0.02415, \
0.01287, 0.01160, 0.00538, 0.00272, 0.00153, 0.00033, 0.00024, 0.00002, \
0.00000, 0.00000, 0.00000, 0.06055, 0.03960, 0.02945, 0.02416, 0.01287, \
0.01161, 0.00538, 0.00272, 0.00153, 0.00033, 0.00024, 0.00002, 0.00000, \
0.00000, 0.00000, 0.06055, 0.03960, 0.02945, 0.02416, 0.01287, 0.01161, \
0.00538, 0.00272, 0.00153, 0.00033, 0.00024, 0.00002, 0.00000, 0.00000, \
0.00000 ");
}
ground_capacitance (capacitance_template_WxS) {
index_1 (" 0.1400, 0.2700, 0.2800, 0.5000, 0.5600, 0.9000, 1.5000 ");
index_2 (" 0.1400, 0.2100, 0.2700, 0.3150, 0.4725, 0.5000, 0.7088, 0.9000, \
1.0631, 1.5000, 1.5947, 2.3920, 3.5880, 5.3821, 538.2070 ");
values (" 0.04216, 0.05055, 0.05708, 0.06162, 0.07440, 0.07619, 0.08596, 0.09090, \
0.09329, 0.09561, 0.09584, 0.09627, 0.09628, 0.09637, 0.09636, 0.06145, \
0.07008, 0.07677, 0.08140, 0.09441, 0.09623, 0.10616, 0.11116, 0.11359, \
0.11595, 0.11618, 0.11663, 0.11663, 0.11669, 0.11669, 0.06296, 0.07160, \
0.07829, 0.08293, 0.09594, 0.09777, 0.10770, 0.11271, 0.11513, 0.11750, \
0.11773, 0.11817, 0.11817, 0.11824, 0.11823, 0.09639, 0.10509, 0.11183, \
0.11649, 0.12957, 0.13140, 0.14137, 0.14640, 0.14884, 0.15121, 0.15144, \
0.15189, 0.15189, 0.15195, 0.15194, 0.10552, 0.11423, 0.12096, 0.12562, \
0.13870, 0.14053, 0.15050, 0.15553, 0.15797, 0.16034, 0.16057, 0.16102, \
0.16102, 0.16108, 0.16108, 0.15742, 0.16613, 0.17286, 0.17753, 0.19061, \
0.19244, 0.20241, 0.20744, 0.20988, 0.21225, 0.21248, 0.21293, 0.21293, \
0.21299, 0.21299, 0.24902, 0.25772, 0.26446, 0.26912, 0.28221, 0.28403, \
0.29401, 0.29904, 0.30148, 0.30386, 0.30408, 0.30453, 0.30454, 0.30451, \
0.30459 ");
}
}
capacitance () {
top_plane: metal7;
bottom_plane: metal4;
lateral_capacitance (capacitance_template_WxS) {
index_1 (" 0.1400, 0.2700, 0.2800, 0.5000, 0.5600, 0.9000, 1.5000 ");
index_2 (" 0.1400, 0.2100, 0.2700, 0.3150, 0.4725, 0.5000, 0.7088, 0.9000, \
1.0631, 1.5000, 1.5947, 2.3920, 3.5880, 5.3821, 538.2070 ");
values (" 0.06297, 0.04297, 0.03336, 0.02835, 0.01743, 0.01615, 0.00941, 0.00597, \
0.00411, 0.00155, 0.00126, 0.00023, 0.00002, 0.00000, 0.00000, 0.06533, \
0.04481, 0.03489, 0.02970, 0.01834, 0.01700, 0.00995, 0.00633, 0.00436, \
0.00165, 0.00135, 0.00025, 0.00002, 0.00000, 0.00000, 0.06546, 0.04491, \
0.03498, 0.02977, 0.01839, 0.01705, 0.00998, 0.00635, 0.00438, 0.00166, \
0.00135, 0.00025, 0.00002, 0.00000, 0.00000, 0.06706, 0.04621, 0.03608, \
0.03075, 0.01906, 0.01769, 0.01039, 0.00662, 0.00457, 0.00174, 0.00142, \
0.00026, 0.00002, 0.00000, 0.00000, 0.06726, 0.04638, 0.03623, 0.03088, \
0.01916, 0.01778, 0.01045, 0.00666, 0.00460, 0.00175, 0.00143, 0.00026, \
0.00002, 0.00000, 0.00000, 0.06792, 0.04692, 0.03669, 0.03130, 0.01945, \
0.01805, 0.01062, 0.00678, 0.00468, 0.00178, 0.00145, 0.00027, 0.00002, \
0.00000, 0.00000, 0.06816, 0.04712, 0.03687, 0.03146, 0.01956, 0.01815, \
0.01069, 0.00682, 0.00471, 0.00180, 0.00146, 0.00027, 0.00002, 0.00000, \
0.00000 ");
}
ground_capacitance (capacitance_template_WxS) {
index_1 (" 0.1400, 0.2700, 0.2800, 0.5000, 0.5600, 0.9000, 1.5000 ");
index_2 (" 0.1400, 0.2100, 0.2700, 0.3150, 0.4725, 0.5000, 0.7088, 0.9000, \
1.0631, 1.5000, 1.5947, 2.3920, 3.5880, 5.3821, 538.2070 ");
values (" 0.03040, 0.03611, 0.04061, 0.04380, 0.05332, 0.05475, 0.06351, 0.06903, \
0.07234, 0.07710, 0.07770, 0.07978, 0.08021, 0.08026, 0.08026, 0.04271, \
0.04856, 0.05320, 0.05647, 0.06632, 0.06780, 0.07693, 0.08271, 0.08620, \
0.09124, 0.09188, 0.09410, 0.09456, 0.09458, 0.09458, 0.04368, 0.04954, \
0.05418, 0.05746, 0.06732, 0.06881, 0.07796, 0.08375, 0.08725, 0.09231, \
0.09294, 0.09518, 0.09564, 0.09566, 0.09566, 0.06531, 0.07127, 0.07600, \
0.07935, 0.08944, 0.09097, 0.10039, 0.10639, 0.11001, 0.11529, 0.11596, \
0.11830, 0.11878, 0.11879, 0.11879, 0.07128, 0.07726, 0.08200, 0.08536, \
0.09549, 0.09702, 0.10649, 0.11251, 0.11616, 0.12147, 0.12213, 0.12449, \
0.12498, 0.12499, 0.12499, 0.10558, 0.11161, 0.11639, 0.11979, 0.13002, \
0.13157, 0.14115, 0.14726, 0.15096, 0.15637, 0.15705, 0.15945, 0.15995, \
0.15996, 0.15996, 0.16667, 0.17271, 0.17752, 0.18092, 0.19120, 0.19275, \
0.20238, 0.20852, 0.21224, 0.21768, 0.21836, 0.22078, 0.22129, 0.22132, \
0.22130 ");
}
}
capacitance () {
top_plane: metal7;
bottom_plane: metal3;
lateral_capacitance (capacitance_template_WxS) {
index_1 (" 0.1400, 0.2700, 0.2800, 0.5000, 0.5600, 0.9000, 1.5000 ");
index_2 (" 0.1400, 0.2100, 0.2700, 0.3150, 0.4725, 0.5000, 0.7088, 0.9000, \
1.0631, 1.5000, 1.5947, 2.3920, 3.5880, 5.3821, 538.2070 ");
values (" 0.06355, 0.04366, 0.03414, 0.02920, 0.01845, 0.01720, 0.01055, 0.00708, \
0.00514, 0.00228, 0.00192, 0.00049, 0.00007, 0.00000, 0.00000, 0.06620, \
0.04580, 0.03598, 0.03085, 0.01966, 0.01834, 0.01134, 0.00765, 0.00557, \
0.00249, 0.00210, 0.00054, 0.00008, 0.00000, 0.00000, 0.06635, 0.04593, \
0.03609, 0.03095, 0.01973, 0.01841, 0.01139, 0.00768, 0.00560, 0.00250, \
0.00212, 0.00054, 0.00008, 0.00000, 0.00000, 0.06846, 0.04772, 0.03767, \
0.03239, 0.02081, 0.01944, 0.01212, 0.00822, 0.00601, 0.00270, 0.00229, \
0.00058, 0.00008, 0.00000, 0.00000, 0.06879, 0.04801, 0.03793, 0.03263, \
0.02100, 0.01962, 0.01225, 0.00831, 0.00608, 0.00274, 0.00232, 0.00059, \
0.00008, 0.00000, 0.00000, 0.07000, 0.04906, 0.03887, 0.03350, 0.02166, \
0.02026, 0.01270, 0.00865, 0.00634, 0.00287, 0.00243, 0.00062, 0.00009, \
0.00000, 0.00000, 0.07070, 0.04967, 0.03942, 0.03400, 0.02205, 0.02062, \
0.01296, 0.00884, 0.00649, 0.00294, 0.00249, 0.00064, 0.00009, 0.00001, \
0.00000 ");
}
ground_capacitance (capacitance_template_WxS) {
index_1 (" 0.1400, 0.2700, 0.2800, 0.5000, 0.5600, 0.9000, 1.5000 ");
index_2 (" 0.1400, 0.2100, 0.2700, 0.3150, 0.4725, 0.5000, 0.7088, 0.9000, \
1.0631, 1.5000, 1.5947, 2.3920, 3.5880, 5.3821, 538.2070 ");
values (" 0.02886, 0.03420, 0.03838, 0.04131, 0.05007, 0.05139, 0.05952, 0.06480, \
0.06809, 0.07323, 0.07393, 0.07677, 0.07763, 0.07777, 0.07777, 0.04026, \
0.04564, 0.04989, 0.05289, 0.06189, 0.06326, 0.07175, 0.07731, 0.08081, \
0.08634, 0.08710, 0.09021, 0.09115, 0.09127, 0.09127, 0.04114, 0.04653, \
0.05078, 0.05379, 0.06280, 0.06417, 0.07268, 0.07826, 0.08178, 0.08733, \
0.08809, 0.09121, 0.09216, 0.09228, 0.09228, 0.06089, 0.06633, 0.07063, \
0.07368, 0.08291, 0.08432, 0.09314, 0.09898, 0.10268, 0.10860, 0.10942, \
0.11279, 0.11382, 0.11394, 0.11395, 0.06633, 0.07177, 0.07609, 0.07915, \
0.08841, 0.08982, 0.09870, 0.10459, 0.10833, 0.11431, 0.11514, 0.11855, \
0.11960, 0.11972, 0.11973, 0.09755, 0.10304, 0.10740, 0.11050, 0.11990, \
0.12134, 0.13042, 0.13647, 0.14033, 0.14654, 0.14740, 0.15098, 0.15208, \
0.15220, 0.15221, 0.15343, 0.15896, 0.16335, 0.16648, 0.17597, 0.17743, \
0.18662, 0.19277, 0.19670, 0.20304, 0.20393, 0.20759, 0.20872, 0.20889, \
0.20886 ");
}
}
capacitance () {
top_plane: metal7;
bottom_plane: metal2;
lateral_capacitance (capacitance_template_WxS) {
index_1 (" 0.1400, 0.2700, 0.2800, 0.5000, 0.5600, 0.9000, 1.5000 ");
index_2 (" 0.1400, 0.2100, 0.2700, 0.3150, 0.4725, 0.5000, 0.7088, 0.9000, \
1.0631, 1.5000, 1.5947, 2.3920, 3.5880, 5.3821, 538.2070 ");
values (" 0.06376, 0.04390, 0.03441, 0.02949, 0.01882, 0.01757, 0.01098, 0.00752, \
0.00557, 0.00263, 0.00226, 0.00066, 0.00011, 0.00001, 0.00000, 0.06649, \
0.04614, 0.03636, 0.03125, 0.02013, 0.01883, 0.01188, 0.00819, 0.00609, \
0.00291, 0.00250, 0.00073, 0.00013, 0.00001, 0.00000, 0.06665, 0.04627, \
0.03647, 0.03136, 0.02021, 0.01891, 0.01193, 0.00823, 0.00613, 0.00293, \
0.00251, 0.00073, 0.00013, 0.00001, 0.00000, 0.06896, 0.04826, 0.03825, \
0.03299, 0.02148, 0.02012, 0.01283, 0.00891, 0.00666, 0.00321, 0.00276, \
0.00081, 0.00014, 0.00001, 0.00000, 0.06934, 0.04860, 0.03856, 0.03328, \
0.02171, 0.02035, 0.01300, 0.00904, 0.00677, 0.00327, 0.00281, 0.00083, \
0.00014, 0.00001, 0.00000, 0.07082, 0.04992, 0.03976, 0.03440, 0.02260, \
0.02120, 0.01363, 0.00952, 0.00715, 0.00348, 0.00299, 0.00089, 0.00016, \
0.00001, 0.00000, 0.07183, 0.05082, 0.04057, 0.03516, 0.02320, 0.02178, \
0.01406, 0.00986, 0.00742, 0.00362, 0.00312, 0.00093, 0.00016, 0.00001, \
0.00000 ");
}
ground_capacitance (capacitance_template_WxS) {
index_1 (" 0.1400, 0.2700, 0.2800, 0.5000, 0.5600, 0.9000, 1.5000 ");
index_2 (" 0.1400, 0.2100, 0.2700, 0.3150, 0.4725, 0.5000, 0.7088, 0.9000, \
1.0631, 1.5000, 1.5947, 2.3920, 3.5880, 5.3821, 538.2070 ");
values (" 0.02833, 0.03356, 0.03764, 0.04050, 0.04898, 0.05026, 0.05815, 0.06330, \
0.06653, 0.07173, 0.07246, 0.07559, 0.07669, 0.07691, 0.07692, 0.03946, \
0.04469, 0.04881, 0.05171, 0.06041, 0.06172, 0.06994, 0.07536, 0.07882, \
0.08444, 0.08524, 0.08870, 0.08992, 0.09014, 0.09015, 0.04032, 0.04556, \
0.04967, 0.05258, 0.06128, 0.06261, 0.07084, 0.07628, 0.07975, 0.08540, \
0.08620, 0.08968, 0.09091, 0.09113, 0.09114, 0.05943, 0.06469, 0.06884, \
0.07178, 0.08066, 0.08202, 0.09055, 0.09627, 0.09995, 0.10602, 0.10689, \
0.11070, 0.11207, 0.11230, 0.11232, 0.06468, 0.06994, 0.07410, 0.07704, \
0.08596, 0.08732, 0.09591, 0.10169, 0.10540, 0.11155, 0.11244, 0.11631, \
0.11770, 0.11794, 0.11796, 0.09477, 0.10006, 0.10426, 0.10723, 0.11629, \
0.11768, 0.12650, 0.13247, 0.13633, 0.14279, 0.14372, 0.14783, 0.14933, \
0.14957, 0.14960, 0.14866, 0.15399, 0.15822, 0.16123, 0.17040, 0.17181, \
0.18079, 0.18689, 0.19086, 0.19752, 0.19848, 0.20276, 0.20432, 0.20463, \
0.20460 ");
}
}
capacitance () {
top_plane: metal7;
bottom_plane: SUBSTRATE;
lateral_capacitance (capacitance_template_WxS) {
index_1 (" 0.1400, 0.2700, 0.2800, 0.5000, 0.5600, 0.9000, 1.5000 ");
index_2 (" 0.1400, 0.2100, 0.2700, 0.3150, 0.4725, 0.5000, 0.7088, 0.9000, \
1.0631, 1.5000, 1.5947, 2.3920, 3.5880, 5.3821, 538.2070 ");
values (" 0.06407, 0.04424, 0.03479, 0.02989, 0.01932, 0.01809, 0.01159, 0.00817, \
0.00623, 0.00324, 0.00284, 0.00103, 0.00026, 0.00003, 0.00000, 0.06690, \
0.04661, 0.03687, 0.03181, 0.02081, 0.01952, 0.01267, 0.00902, 0.00692, \
0.00365, 0.00321, 0.00117, 0.00029, 0.00004, 0.00000, 0.06707, 0.04675, \
0.03700, 0.03192, 0.02090, 0.01961, 0.01274, 0.00907, 0.00697, 0.00368, \
0.00323, 0.00118, 0.00030, 0.00004, 0.00000, 0.06965, 0.04902, 0.03906, \
0.03385, 0.02246, 0.02112, 0.01391, 0.01002, 0.00775, 0.00415, 0.00366, \
0.00135, 0.00034, 0.00005, 0.00000, 0.07010, 0.04944, 0.03946, 0.03422, \
0.02277, 0.02142, 0.01415, 0.01021, 0.00792, 0.00426, 0.00375, 0.00139, \
0.00035, 0.00005, 0.00000, 0.07205, 0.05121, 0.04110, 0.03578, 0.02407, \
0.02268, 0.01516, 0.01103, 0.00860, 0.00468, 0.00414, 0.00155, 0.00040, \
0.00005, 0.00000, 0.07370, 0.05273, 0.04252, 0.03713, 0.02521, 0.02379, \
0.01605, 0.01176, 0.00922, 0.00507, 0.00449, 0.00170, 0.00044, 0.00006, \
0.00000 ");
}
ground_capacitance (capacitance_template_WxS) {
index_1 (" 0.1400, 0.2700, 0.2800, 0.5000, 0.5600, 0.9000, 1.5000 ");
index_2 (" 0.1400, 0.2100, 0.2700, 0.3150, 0.4725, 0.5000, 0.7088, 0.9000, \
1.0631, 1.5000, 1.5947, 2.3920, 3.5880, 5.3821, 538.2070 ");
values (" 0.02753, 0.03264, 0.03660, 0.03937, 0.04753, 0.04875, 0.05626, 0.06119, \
0.06431, 0.06947, 0.07023, 0.07370, 0.07524, 0.07570, 0.07577, 0.03838, \
0.04342, 0.04737, 0.05014, 0.05841, 0.05966, 0.06745, 0.07263, 0.07597, \
0.08157, 0.08240, 0.08630, 0.08806, 0.08855, 0.08863, 0.03921, 0.04425, \
0.04819, 0.05097, 0.05924, 0.06050, 0.06830, 0.07349, 0.07685, 0.08248, \
0.08332, 0.08724, 0.08901, 0.08951, 0.08959, 0.05750, 0.06250, 0.06644, \
0.06922, 0.07760, 0.07888, 0.08694, 0.09240, 0.09597, 0.10210, 0.10302, \
0.10742, 0.10945, 0.11001, 0.11011, 0.06249, 0.06748, 0.07142, 0.07420, \
0.08260, 0.08388, 0.09200, 0.09751, 0.10113, 0.10735, 0.10829, 0.11279, \
0.11488, 0.11546, 0.11556, 0.09097, 0.09595, 0.09990, 0.10270, 0.11121, \
0.11251, 0.12085, 0.12659, 0.13038, 0.13703, 0.13804, 0.14296, 0.14528, \
0.14594, 0.14605, 0.14179, 0.14681, 0.15079, 0.15361, 0.16224, 0.16357, \
0.17211, 0.17805, 0.18201, 0.18902, 0.19010, 0.19540, 0.19793, 0.19870, \
0.19878 ");
}
}
capacitance () {
top_plane: metal8;
bottom_plane: metal5;
lateral_capacitance (capacitance_template_WxS) {
index_1 (" 0.1400, 0.2700, 0.2800, 0.5000, 0.5600, 0.9000, 1.5000 ");
index_2 (" 0.1400, 0.2100, 0.2700, 0.3150, 0.4725, 0.5000, 0.7088, 0.9000, \
1.0631, 1.5000, 1.5947, 2.3920, 3.5880, 5.3821, 538.2070 ");
values (" 0.06396, 0.04412, 0.03466, 0.02976, 0.01916, 0.01792, 0.01139, 0.00796, \
0.00601, 0.00302, 0.00263, 0.00088, 0.00019, 0.00002, 0.00000, 0.06677, \
0.04646, 0.03671, 0.03163, 0.02059, 0.01930, 0.01241, 0.00875, 0.00664, \
0.00339, 0.00295, 0.00100, 0.00022, 0.00002, 0.00000, 0.06693, 0.04660, \
0.03683, 0.03175, 0.02068, 0.01939, 0.01248, 0.00880, 0.00668, 0.00341, \
0.00297, 0.00100, 0.00022, 0.00002, 0.00000, 0.06943, 0.04878, 0.03880, \
0.03358, 0.02215, 0.02080, 0.01356, 0.00964, 0.00738, 0.00381, 0.00333, \
0.00114, 0.00025, 0.00003, 0.00000, 0.06986, 0.04918, 0.03917, 0.03392, \
0.02243, 0.02108, 0.01377, 0.00982, 0.00752, 0.00390, 0.00341, 0.00116, \
0.00026, 0.00003, 0.00000, 0.07165, 0.05079, 0.04066, 0.03533, 0.02358, \
0.02218, 0.01463, 0.01050, 0.00809, 0.00423, 0.00371, 0.00128, 0.00028, \
0.00003, 0.00000, 0.07306, 0.05207, 0.04184, 0.03644, 0.02450, 0.02308, \
0.01533, 0.01106, 0.00855, 0.00451, 0.00395, 0.00137, 0.00031, 0.00004, \
0.00000 ");
}
ground_capacitance (capacitance_template_WxS) {
index_1 (" 0.1400, 0.2700, 0.2800, 0.5000, 0.5600, 0.9000, 1.5000 ");
index_2 (" 0.1400, 0.2100, 0.2700, 0.3150, 0.4725, 0.5000, 0.7088, 0.9000, \
1.0631, 1.5000, 1.5947, 2.3920, 3.5880, 5.3821, 538.2070 ");
values (" 0.02781, 0.03296, 0.03696, 0.03975, 0.04800, 0.04924, 0.05688, 0.06188, \
0.06505, 0.07024, 0.07099, 0.07437, 0.07576, 0.07611, 0.07616, 0.03874, \
0.04384, 0.04784, 0.05065, 0.05906, 0.06033, 0.06826, 0.07353, 0.07692, \
0.08255, 0.08338, 0.08715, 0.08872, 0.08909, 0.08914, 0.03958, 0.04468, \
0.04868, 0.05149, 0.05991, 0.06118, 0.06913, 0.07441, 0.07782, 0.08348, \
0.08431, 0.08811, 0.08969, 0.09006, 0.09011, 0.05813, 0.06321, 0.06721, \
0.07005, 0.07859, 0.07990, 0.08813, 0.09369, 0.09730, 0.10345, 0.10436, \
0.10858, 0.11037, 0.11079, 0.11084, 0.06320, 0.06828, 0.07228, 0.07512, \
0.08369, 0.08500, 0.09329, 0.09890, 0.10256, 0.10880, 0.10973, 0.11404, \
0.11587, 0.11630, 0.11636, 0.09221, 0.09730, 0.10133, 0.10419, 0.11288, \
0.11422, 0.12274, 0.12857, 0.13240, 0.13902, 0.14001, 0.14468, 0.14669, \
0.14716, 0.14722, 0.14409, 0.14921, 0.15328, 0.15617, 0.16499, 0.16635, \
0.17506, 0.18107, 0.18504, 0.19197, 0.19302, 0.19797, 0.20013, 0.20068, \
0.20070 ");
}
}
capacitance () {
top_plane: metal8;
bottom_plane: metal4;
lateral_capacitance (capacitance_template_WxS) {
index_1 (" 0.1400, 0.2700, 0.2800, 0.5000, 0.5600, 0.9000, 1.5000 ");
index_2 (" 0.1400, 0.2100, 0.2700, 0.3150, 0.4725, 0.5000, 0.7088, 0.9000, \
1.0631, 1.5000, 1.5947, 2.3920, 3.5880, 5.3821, 538.2070 ");
values (" 0.06827, 0.04889, 0.03972, 0.03498, 0.02464, 0.02341, 0.01666, 0.01279, \
0.01040, 0.00621, 0.00558, 0.00236, 0.00069, 0.00011, 0.00000, 0.07227, \
0.05228, 0.04270, 0.03771, 0.02672, 0.02540, 0.01813, 0.01394, 0.01134, \
0.00678, 0.00610, 0.00258, 0.00075, 0.00012, 0.00000, 0.07252, 0.05248, \
0.04289, 0.03788, 0.02684, 0.02552, 0.01822, 0.01401, 0.01139, 0.00682, \
0.00613, 0.00260, 0.00076, 0.00012, 0.00000, 0.07621, 0.05565, 0.04570, \
0.04047, 0.02885, 0.02744, 0.01966, 0.01514, 0.01233, 0.00740, 0.00666, \
0.00283, 0.00083, 0.00013, 0.00000, 0.07683, 0.05620, 0.04620, 0.04093, \
0.02921, 0.02780, 0.01993, 0.01535, 0.01251, 0.00751, 0.00676, 0.00288, \
0.00084, 0.00014, 0.00000, 0.07915, 0.05825, 0.04805, 0.04265, 0.03057, \
0.02910, 0.02093, 0.01615, 0.01318, 0.00794, 0.00715, 0.00305, 0.00089, \
0.00015, 0.00000, 0.08072, 0.05965, 0.04933, 0.04385, 0.03154, 0.03004, \
0.02166, 0.01674, 0.01367, 0.00825, 0.00743, 0.00318, 0.00093, 0.00016, \
0.00000 ");
}
ground_capacitance (capacitance_template_WxS) {
index_1 (" 0.1400, 0.2700, 0.2800, 0.5000, 0.5600, 0.9000, 1.5000 ");
index_2 (" 0.1400, 0.2100, 0.2700, 0.3150, 0.4725, 0.5000, 0.7088, 0.9000, \
1.0631, 1.5000, 1.5947, 2.3920, 3.5880, 5.3821, 538.2070 ");
values (" 0.01473, 0.01728, 0.01926, 0.02066, 0.02508, 0.02579, 0.03067, 0.03449, \
0.03730, 0.04314, 0.04413, 0.04969, 0.05293, 0.05404, 0.05427, 0.01908, \
0.02143, 0.02334, 0.02473, 0.02924, 0.02998, 0.03513, 0.03920, 0.04223, \
0.04852, 0.04960, 0.05565, 0.05919, 0.06039, 0.06064, 0.01940, 0.02174, \
0.02365, 0.02504, 0.02957, 0.03031, 0.03547, 0.03956, 0.04261, 0.04892, \
0.05001, 0.05609, 0.05965, 0.06085, 0.06111, 0.02647, 0.02881, 0.03076, \
0.03218, 0.03688, 0.03766, 0.04311, 0.04746, 0.05071, 0.05748, 0.05864, \
0.06522, 0.06909, 0.07039, 0.07067, 0.02845, 0.03080, 0.03275, 0.03419, \
0.03893, 0.03970, 0.04522, 0.04962, 0.05290, 0.05975, 0.06093, 0.06760, \
0.07153, 0.07286, 0.07314, 0.04009, 0.04249, 0.04449, 0.04596, 0.05085, \
0.05166, 0.05738, 0.06196, 0.06538, 0.07256, 0.07379, 0.08082, 0.08497, \
0.08639, 0.08669, 0.06164, 0.06408, 0.06613, 0.06763, 0.07263, 0.07346, \
0.07933, 0.08404, 0.08756, 0.09498, 0.09625, 0.10354, 0.10787, 0.10947, \
0.10966 ");
}
}
capacitance () {
top_plane: metal8;
bottom_plane: metal3;
lateral_capacitance (capacitance_template_WxS) {
index_1 (" 0.1400, 0.2700, 0.2800, 0.5000, 0.5600, 0.9000, 1.5000 ");
index_2 (" 0.1400, 0.2100, 0.2700, 0.3150, 0.4725, 0.5000, 0.7088, 0.9000, \
1.0631, 1.5000, 1.5947, 2.3920, 3.5880, 5.3821, 538.2070 ");
values (" 0.06912, 0.04985, 0.04076, 0.03608, 0.02592, 0.02473, 0.01813, 0.01433, \
0.01195, 0.00762, 0.00695, 0.00329, 0.00111, 0.00022, 0.00000, 0.07336, \
0.05348, 0.04400, 0.03907, 0.02826, 0.02697, 0.01984, 0.01569, 0.01307, \
0.00835, 0.00761, 0.00359, 0.00122, 0.00024, 0.00000, 0.07363, 0.05371, \
0.04421, 0.03926, 0.02841, 0.02711, 0.01995, 0.01578, 0.01315, 0.00839, \
0.00765, 0.00361, 0.00122, 0.00024, 0.00000, 0.07777, 0.05732, 0.04745, \
0.04226, 0.03078, 0.02939, 0.02168, 0.01716, 0.01430, 0.00913, 0.00833, \
0.00393, 0.00133, 0.00027, 0.00000, 0.07851, 0.05797, 0.04804, 0.04282, \
0.03122, 0.02982, 0.02201, 0.01742, 0.01452, 0.00927, 0.00845, 0.00400, \
0.00135, 0.00027, 0.00000, 0.08133, 0.06048, 0.05032, 0.04494, 0.03291, \
0.03145, 0.02326, 0.01842, 0.01536, 0.00981, 0.00895, 0.00423, 0.00143, \
0.00029, 0.00000, 0.08329, 0.06223, 0.05191, 0.04643, 0.03411, 0.03260, \
0.02415, 0.01914, 0.01596, 0.01020, 0.00930, 0.00440, 0.00149, 0.00031, \
0.00000 ");
}
ground_capacitance (capacitance_template_WxS) {
index_1 (" 0.1400, 0.2700, 0.2800, 0.5000, 0.5600, 0.9000, 1.5000 ");
index_2 (" 0.1400, 0.2100, 0.2700, 0.3150, 0.4725, 0.5000, 0.7088, 0.9000, \
1.0631, 1.5000, 1.5947, 2.3920, 3.5880, 5.3821, 538.2070 ");
values (" 0.01253, 0.01472, 0.01639, 0.01756, 0.02118, 0.02175, 0.02572, 0.02890, \
0.03132, 0.03667, 0.03763, 0.04351, 0.04756, 0.04928, 0.04974, 0.01610, \
0.01801, 0.01954, 0.02065, 0.02424, 0.02483, 0.02900, 0.03239, 0.03502, \
0.04080, 0.04185, 0.04826, 0.05269, 0.05455, 0.05505, 0.01635, 0.01825, \
0.01978, 0.02088, 0.02448, 0.02507, 0.02925, 0.03266, 0.03530, 0.04111, \
0.04217, 0.04861, 0.05306, 0.05493, 0.05543, 0.02170, 0.02352, 0.02504, \
0.02615, 0.02987, 0.03049, 0.03493, 0.03860, 0.04143, 0.04772, 0.04886, \
0.05585, 0.06068, 0.06271, 0.06326, 0.02316, 0.02499, 0.02652, 0.02764, \
0.03139, 0.03201, 0.03651, 0.04023, 0.04310, 0.04948, 0.05063, 0.05773, \
0.06263, 0.06470, 0.06526, 0.03187, 0.03374, 0.03531, 0.03647, 0.04038, \
0.04104, 0.04576, 0.04967, 0.05269, 0.05942, 0.06064, 0.06813, 0.07332, \
0.07551, 0.07610, 0.04834, 0.05026, 0.05189, 0.05309, 0.05713, 0.05782, \
0.06271, 0.06677, 0.06991, 0.07688, 0.07815, 0.08593, 0.09133, 0.09372, \
0.09423 ");
}
}
capacitance () {
top_plane: metal8;
bottom_plane: metal2;
lateral_capacitance (capacitance_template_WxS) {
index_1 (" 0.1400, 0.2700, 0.2800, 0.5000, 0.5600, 0.9000, 1.5000 ");
index_2 (" 0.1400, 0.2100, 0.2700, 0.3150, 0.4725, 0.5000, 0.7088, 0.9000, \
1.0631, 1.5000, 1.5947, 2.3920, 3.5880, 5.3821, 538.2070 ");
values (" 0.06946, 0.05023, 0.04117, 0.03651, 0.02642, 0.02523, 0.01872, 0.01497, \
0.01261, 0.00828, 0.00760, 0.00380, 0.00139, 0.00031, 0.00000, 0.07378, \
0.05394, 0.04449, 0.03959, 0.02886, 0.02758, 0.02053, 0.01643, 0.01383, \
0.00909, 0.00834, 0.00415, 0.00152, 0.00034, 0.00000, 0.07405, 0.05417, \
0.04470, 0.03978, 0.02901, 0.02773, 0.02065, 0.01652, 0.01391, 0.00914, \
0.00838, 0.00418, 0.00153, 0.00034, 0.00000, 0.07836, 0.05795, 0.04812, \
0.04296, 0.03155, 0.03018, 0.02253, 0.01804, 0.01519, 0.00997, 0.00915, \
0.00456, 0.00166, 0.00037, 0.00000, 0.07914, 0.05865, 0.04876, 0.04356, \
0.03204, 0.03065, 0.02290, 0.01833, 0.01544, 0.01014, 0.00930, 0.00463, \
0.00169, 0.00038, 0.00000, 0.08221, 0.06139, 0.05126, 0.04590, 0.03392, \
0.03246, 0.02430, 0.01947, 0.01639, 0.01077, 0.00988, 0.00492, 0.00180, \
0.00040, 0.00000, 0.08444, 0.06339, 0.05309, 0.04762, 0.03531, 0.03380, \
0.02535, 0.02031, 0.01711, 0.01123, 0.01030, 0.00513, 0.00187, 0.00043, \
0.00000 ");
}
ground_capacitance (capacitance_template_WxS) {
index_1 (" 0.1400, 0.2700, 0.2800, 0.5000, 0.5600, 0.9000, 1.5000 ");
index_2 (" 0.1400, 0.2100, 0.2700, 0.3150, 0.4725, 0.5000, 0.7088, 0.9000, \
1.0631, 1.5000, 1.5947, 2.3920, 3.5880, 5.3821, 538.2070 ");
values (" 0.01167, 0.01374, 0.01532, 0.01641, 0.01976, 0.02029, 0.02392, 0.02683, \
0.02906, 0.03409, 0.03502, 0.04088, 0.04526, 0.04733, 0.04797, 0.01503, \
0.01678, 0.01819, 0.01920, 0.02246, 0.02300, 0.02677, 0.02987, 0.03229, \
0.03774, 0.03875, 0.04516, 0.04995, 0.05220, 0.05290, 0.01526, 0.01700, \
0.01840, 0.01941, 0.02267, 0.02321, 0.02699, 0.03011, 0.03254, 0.03802, \
0.03903, 0.04548, 0.05028, 0.05255, 0.05325, 0.02003, 0.02167, 0.02304, \
0.02404, 0.02738, 0.02794, 0.03196, 0.03531, 0.03792, 0.04387, 0.04498, \
0.05199, 0.05722, 0.05968, 0.06045, 0.02132, 0.02296, 0.02433, 0.02534, \
0.02871, 0.02927, 0.03334, 0.03674, 0.03940, 0.04544, 0.04656, 0.05368, \
0.05900, 0.06150, 0.06228, 0.02896, 0.03063, 0.03204, 0.03308, 0.03659, \
0.03719, 0.04148, 0.04508, 0.04789, 0.05429, 0.05548, 0.06303, 0.06867, \
0.07133, 0.07216, 0.04351, 0.04524, 0.04670, 0.04778, 0.05144, 0.05206, \
0.05654, 0.06029, 0.06323, 0.06991, 0.07115, 0.07902, 0.08491, 0.08779, \
0.08854 ");
}
}
capacitance () {
top_plane: metal8;
bottom_plane: SUBSTRATE;
lateral_capacitance (capacitance_template_WxS) {
index_1 (" 0.1400, 0.2700, 0.2800, 0.5000, 0.5600, 0.9000, 1.5000 ");
index_2 (" 0.1400, 0.2100, 0.2700, 0.3150, 0.4725, 0.5000, 0.7088, 0.9000, \
1.0631, 1.5000, 1.5947, 2.3920, 3.5880, 5.3821, 538.2070 ");
values (" 0.07003, 0.05085, 0.04182, 0.03719, 0.02718, 0.02601, 0.01962, 0.01596, \
0.01367, 0.00942, 0.00874, 0.00481, 0.00204, 0.00057, 0.00000, 0.07442, \
0.05464, 0.04524, 0.04037, 0.02977, 0.02851, 0.02160, 0.01760, 0.01506, \
0.01038, 0.00963, 0.00528, 0.00224, 0.00063, 0.00000, 0.07470, 0.05488, \
0.04546, 0.04058, 0.02993, 0.02867, 0.02173, 0.01770, 0.01515, 0.01044, \
0.00969, 0.00532, 0.00225, 0.00063, 0.00000, 0.07923, 0.05890, 0.04912, \
0.04401, 0.03274, 0.03139, 0.02388, 0.01948, 0.01668, 0.01150, 0.01066, \
0.00584, 0.00248, 0.00070, 0.00000, 0.08009, 0.05968, 0.04984, 0.04469, \
0.03330, 0.03193, 0.02431, 0.01984, 0.01699, 0.01171, 0.01086, 0.00595, \
0.00252, 0.00071, 0.00000, 0.08358, 0.06283, 0.05275, 0.04742, 0.03556, \
0.03412, 0.02606, 0.02128, 0.01823, 0.01257, 0.01165, 0.00638, 0.00271, \
0.00076, 0.00000, 0.08640, 0.06540, 0.05512, 0.04967, 0.03743, 0.03593, \
0.02752, 0.02249, 0.01927, 0.01328, 0.01231, 0.00674, 0.00286, 0.00081, \
0.00000 ");
}
ground_capacitance (capacitance_template_WxS) {
index_1 (" 0.1400, 0.2700, 0.2800, 0.5000, 0.5600, 0.9000, 1.5000 ");
index_2 (" 0.1400, 0.2100, 0.2700, 0.3150, 0.4725, 0.5000, 0.7088, 0.9000, \
1.0631, 1.5000, 1.5947, 2.3920, 3.5880, 5.3821, 538.2070 ");
values (" 0.01025, 0.01216, 0.01362, 0.01462, 0.01765, 0.01811, 0.02127, 0.02376, \
0.02567, 0.03008, 0.03092, 0.03650, 0.04127, 0.04404, 0.04521, 0.01337, \
0.01494, 0.01619, 0.01707, 0.01989, 0.02035, 0.02354, 0.02616, 0.02823, \
0.03300, 0.03392, 0.04003, 0.04526, 0.04828, 0.04957, 0.01357, 0.01513, \
0.01637, 0.01725, 0.02006, 0.02052, 0.02372, 0.02635, 0.02842, 0.03322, \
0.03414, 0.04029, 0.04554, 0.04859, 0.04988, 0.01766, 0.01905, 0.02019, \
0.02103, 0.02382, 0.02428, 0.02764, 0.03046, 0.03269, 0.03792, 0.03892, \
0.04565, 0.05141, 0.05474, 0.05616, 0.01871, 0.02009, 0.02123, 0.02207, \
0.02487, 0.02533, 0.02873, 0.03159, 0.03386, 0.03918, 0.04020, 0.04704, \
0.05290, 0.05630, 0.05775, 0.02483, 0.02620, 0.02736, 0.02822, 0.03111, \
0.03161, 0.03518, 0.03823, 0.04065, 0.04633, 0.04742, 0.05475, 0.06103, \
0.06467, 0.06622, 0.03646, 0.03788, 0.03908, 0.03997, 0.04301, 0.04352, \
0.04729, 0.05050, 0.05306, 0.05907, 0.06022, 0.06797, 0.07459, 0.07853, \
0.08007 ");
}
}
capacitance () {
top_plane: metal9;
bottom_plane: metal5;
lateral_capacitance (capacitance_template_WxS) {
index_1 (" 0.1400, 0.2700, 0.2800, 0.5000, 0.5600, 0.9000, 1.5000 ");
index_2 (" 0.1400, 0.2100, 0.2700, 0.3150, 0.4725, 0.5000, 0.7088, 0.9000, \
1.0631, 1.5000, 1.5947, 2.3920, 3.5880, 5.3821, 538.2070 ");
values (" 0.06435, 0.04454, 0.03510, 0.03021, 0.01969, 0.01847, 0.01203, 0.00866, \
0.00674, 0.00375, 0.00335, 0.00144, 0.00049, 0.00012, 0.00000, 0.06721, \
0.04695, 0.03725, 0.03221, 0.02128, 0.02001, 0.01324, 0.00964, 0.00757, \
0.00429, 0.00385, 0.00168, 0.00058, 0.00014, 0.00000, 0.06739, 0.04710, \
0.03739, 0.03233, 0.02138, 0.02011, 0.01332, 0.00971, 0.00762, 0.00433, \
0.00388, 0.00169, 0.00059, 0.00014, 0.00000, 0.07013, 0.04955, 0.03964, \
0.03446, 0.02317, 0.02184, 0.01473, 0.01089, 0.00864, 0.00502, 0.00451, \
0.00202, 0.00071, 0.00017, 0.00000, 0.07064, 0.05003, 0.04009, 0.03489, \
0.02355, 0.02221, 0.01504, 0.01115, 0.00887, 0.00518, 0.00466, 0.00209, \
0.00074, 0.00018, 0.00000, 0.07295, 0.05217, 0.04211, 0.03682, 0.02523, \
0.02385, 0.01641, 0.01232, 0.00990, 0.00590, 0.00533, 0.00245, 0.00088, \
0.00021, 0.00000, 0.07527, 0.05435, 0.04418, 0.03882, 0.02700, 0.02558, \
0.01790, 0.01361, 0.01103, 0.00672, 0.00609, 0.00286, 0.00105, 0.00026, \
0.00000 ");
}
ground_capacitance (capacitance_template_WxS) {
index_1 (" 0.1400, 0.2700, 0.2800, 0.5000, 0.5600, 0.9000, 1.5000 ");
index_2 (" 0.1400, 0.2100, 0.2700, 0.3150, 0.4725, 0.5000, 0.7088, 0.9000, \
1.0631, 1.5000, 1.5947, 2.3920, 3.5880, 5.3821, 538.2070 ");
values (" 0.02683, 0.03188, 0.03579, 0.03851, 0.04650, 0.04769, 0.05498, 0.05973, \
0.06275, 0.06779, 0.06854, 0.07213, 0.07399, 0.07476, 0.07500, 0.03757, \
0.04251, 0.04636, 0.04906, 0.05707, 0.05827, 0.06576, 0.07073, 0.07395, \
0.07942, 0.08024, 0.08430, 0.08646, 0.08733, 0.08762, 0.03839, 0.04332, \
0.04717, 0.04987, 0.05787, 0.05908, 0.06658, 0.07156, 0.07479, 0.08029, \
0.08112, 0.08521, 0.08739, 0.08827, 0.08856, 0.05622, 0.06105, 0.06484, \
0.06752, 0.07554, 0.07676, 0.08445, 0.08967, 0.09309, 0.09909, 0.10001, \
0.10466, 0.10723, 0.10828, 0.10864, 0.06104, 0.06586, 0.06964, 0.07231, \
0.08034, 0.08156, 0.08929, 0.09455, 0.09802, 0.10412, 0.10506, 0.10984, \
0.11249, 0.11359, 0.11396, 0.08840, 0.09316, 0.09693, 0.09959, 0.10766, \
0.10890, 0.11680, 0.12227, 0.12593, 0.13248, 0.13352, 0.13885, 0.14193, \
0.14324, 0.14368, 0.13684, 0.14161, 0.14537, 0.14805, 0.15619, 0.15745, \
0.16554, 0.17122, 0.17507, 0.18211, 0.18324, 0.18920, 0.19275, 0.19434, \
0.19483 ");
}
}
capacitance () {
top_plane: metal9;
bottom_plane: metal4;
lateral_capacitance (capacitance_template_WxS) {
index_1 (" 0.1400, 0.2700, 0.2800, 0.5000, 0.5600, 0.9000, 1.5000 ");
index_2 (" 0.1400, 0.2100, 0.2700, 0.3150, 0.4725, 0.5000, 0.7088, 0.9000, \
1.0631, 1.5000, 1.5947, 2.3920, 3.5880, 5.3821, 538.2070 ");
values (" 0.06883, 0.04949, 0.04034, 0.03562, 0.02535, 0.02414, 0.01751, 0.01374, \
0.01142, 0.00733, 0.00671, 0.00339, 0.00136, 0.00038, 0.00000, 0.07288, \
0.05293, 0.04341, 0.03844, 0.02757, 0.02628, 0.01917, 0.01510, 0.01257, \
0.00812, 0.00744, 0.00378, 0.00152, 0.00043, 0.00000, 0.07313, 0.05315, \
0.04360, 0.03862, 0.02771, 0.02641, 0.01927, 0.01518, 0.01265, 0.00817, \
0.00749, 0.00380, 0.00153, 0.00043, 0.00000, 0.07704, 0.05656, 0.04668, \
0.04149, 0.03003, 0.02865, 0.02105, 0.01666, 0.01392, 0.00907, 0.00832, \
0.00427, 0.00174, 0.00050, 0.00000, 0.07774, 0.05719, 0.04726, 0.04204, \
0.03048, 0.02910, 0.02141, 0.01696, 0.01419, 0.00926, 0.00850, 0.00437, \
0.00179, 0.00051, 0.00000, 0.08057, 0.05975, 0.04963, 0.04428, 0.03237, \
0.03093, 0.02292, 0.01825, 0.01532, 0.01009, 0.00928, 0.00483, 0.00199, \
0.00057, 0.00000, 0.08303, 0.06203, 0.05177, 0.04633, 0.03416, 0.03268, \
0.02441, 0.01954, 0.01648, 0.01095, 0.01009, 0.00531, 0.00221, 0.00065, \
0.00000 ");
}
ground_capacitance (capacitance_template_WxS) {
index_1 (" 0.1400, 0.2700, 0.2800, 0.5000, 0.5600, 0.9000, 1.5000 ");
index_2 (" 0.1400, 0.2100, 0.2700, 0.3150, 0.4725, 0.5000, 0.7088, 0.9000, \
1.0631, 1.5000, 1.5947, 2.3920, 3.5880, 5.3821, 538.2070 ");
values (" 0.01334, 0.01576, 0.01765, 0.01898, 0.02313, 0.02379, 0.02823, 0.03165, \
0.03416, 0.03943, 0.04035, 0.04574, 0.04949, 0.05136, 0.05214, 0.01753, \
0.01972, 0.02149, 0.02276, 0.02685, 0.02751, 0.03209, 0.03568, 0.03837, \
0.04401, 0.04501, 0.05091, 0.05506, 0.05714, 0.05802, 0.01783, 0.02001, \
0.02177, 0.02305, 0.02714, 0.02780, 0.03238, 0.03599, 0.03868, 0.04436, \
0.04535, 0.05129, 0.05546, 0.05755, 0.05844, 0.02426, 0.02635, 0.02808, \
0.02933, 0.03346, 0.03414, 0.03889, 0.04268, 0.04553, 0.05161, 0.05269, \
0.05917, 0.06381, 0.06616, 0.06718, 0.02600, 0.02808, 0.02980, 0.03106, \
0.03520, 0.03588, 0.04067, 0.04449, 0.04737, 0.05353, 0.05463, 0.06122, \
0.06596, 0.06838, 0.06942, 0.03601, 0.03809, 0.03981, 0.04108, 0.04528, \
0.04598, 0.05089, 0.05486, 0.05786, 0.06435, 0.06550, 0.07258, 0.07776, \
0.08045, 0.08162, 0.05418, 0.05626, 0.05800, 0.05928, 0.06353, 0.06424, \
0.06928, 0.07337, 0.07649, 0.08329, 0.08452, 0.09209, 0.09773, 0.10083, \
0.10203 ");
}
}
capacitance () {
top_plane: metal9;
bottom_plane: metal3;
lateral_capacitance (capacitance_template_WxS) {
index_1 (" 0.1400, 0.2700, 0.2800, 0.5000, 0.5600, 0.9000, 1.5000 ");
index_2 (" 0.1400, 0.2100, 0.2700, 0.3150, 0.4725, 0.5000, 0.7088, 0.9000, \
1.0631, 1.5000, 1.5947, 2.3920, 3.5880, 5.3821, 538.2070 ");
values (" 0.06977, 0.05054, 0.04149, 0.03683, 0.02674, 0.02555, 0.01908, 0.01538, \
0.01308, 0.00890, 0.00824, 0.00453, 0.00199, 0.00063, 0.00000, 0.07407, \
0.05423, 0.04480, 0.03990, 0.02921, 0.02794, 0.02097, 0.01695, 0.01442, \
0.00984, 0.00911, 0.00501, 0.00222, 0.00070, 0.00000, 0.07434, 0.05447, \
0.04501, 0.04009, 0.02937, 0.02809, 0.02109, 0.01705, 0.01451, 0.00990, \
0.00917, 0.00504, 0.00223, 0.00070, 0.00000, 0.07868, 0.05830, 0.04849, \
0.04336, 0.03204, 0.03068, 0.02315, 0.01877, 0.01600, 0.01096, 0.01016, \
0.00562, 0.00250, 0.00079, 0.00000, 0.07949, 0.05904, 0.04917, 0.04400, \
0.03257, 0.03120, 0.02357, 0.01912, 0.01631, 0.01118, 0.01037, 0.00574, \
0.00256, 0.00081, 0.00000, 0.08281, 0.06204, 0.05195, 0.04663, 0.03477, \
0.03333, 0.02532, 0.02060, 0.01761, 0.01213, 0.01126, 0.00627, 0.00281, \
0.00090, 0.00000, 0.08565, 0.06466, 0.05440, 0.04896, 0.03678, 0.03529, \
0.02696, 0.02202, 0.01887, 0.01306, 0.01214, 0.00681, 0.00307, 0.00099, \
0.00000 ");
}
ground_capacitance (capacitance_template_WxS) {
index_1 (" 0.1400, 0.2700, 0.2800, 0.5000, 0.5600, 0.9000, 1.5000 ");
index_2 (" 0.1400, 0.2100, 0.2700, 0.3150, 0.4725, 0.5000, 0.7088, 0.9000, \
1.0631, 1.5000, 1.5947, 2.3920, 3.5880, 5.3821, 538.2070 ");
values (" 0.01092, 0.01296, 0.01453, 0.01562, 0.01897, 0.01950, 0.02304, 0.02580, \
0.02788, 0.03251, 0.03337, 0.03883, 0.04325, 0.04583, 0.04710, 0.01433, \
0.01607, 0.01746, 0.01846, 0.02163, 0.02215, 0.02573, 0.02862, 0.03085, \
0.03583, 0.03676, 0.04273, 0.04759, 0.05043, 0.05185, 0.01456, 0.01629, \
0.01767, 0.01866, 0.02183, 0.02235, 0.02594, 0.02883, 0.03107, 0.03608, \
0.03701, 0.04301, 0.04790, 0.05076, 0.05219, 0.01931, 0.02088, 0.02218, \
0.02313, 0.02627, 0.02679, 0.03050, 0.03357, 0.03595, 0.04135, 0.04236, \
0.04891, 0.05431, 0.05750, 0.05910, 0.02054, 0.02210, 0.02340, 0.02435, \
0.02749, 0.02801, 0.03176, 0.03486, 0.03727, 0.04275, 0.04378, 0.05044, \
0.05595, 0.05921, 0.06085, 0.02765, 0.02920, 0.03050, 0.03145, 0.03466, \
0.03520, 0.03909, 0.04233, 0.04487, 0.05068, 0.05177, 0.05891, 0.06487, \
0.06845, 0.07026, 0.04078, 0.04235, 0.04366, 0.04464, 0.04793, 0.04849, \
0.05250, 0.05588, 0.05853, 0.06464, 0.06580, 0.07340, 0.07982, 0.08382, \
0.08572 ");
}
}
capacitance () {
top_plane: metal9;
bottom_plane: metal2;
lateral_capacitance (capacitance_template_WxS) {
index_1 (" 0.1400, 0.2700, 0.2800, 0.5000, 0.5600, 0.9000, 1.5000 ");
index_2 (" 0.1400, 0.2100, 0.2700, 0.3150, 0.4725, 0.5000, 0.7088, 0.9000, \
1.0631, 1.5000, 1.5947, 2.3920, 3.5880, 5.3821, 538.2070 ");
values (" 0.07015, 0.05097, 0.04194, 0.03731, 0.02729, 0.02611, 0.01971, 0.01607, \
0.01380, 0.00963, 0.00896, 0.00514, 0.00238, 0.00080, 0.00000, 0.07453, \
0.05474, 0.04534, 0.04046, 0.02985, 0.02860, 0.02171, 0.01773, 0.01523, \
0.01065, 0.00992, 0.00568, 0.00264, 0.00089, 0.00000, 0.07481, 0.05498, \
0.04555, 0.04067, 0.03002, 0.02876, 0.02183, 0.01784, 0.01532, 0.01071, \
0.00998, 0.00572, 0.00266, 0.00089, 0.00000, 0.07931, 0.05898, 0.04921, \
0.04410, 0.03285, 0.03150, 0.02405, 0.01969, 0.01694, 0.01187, 0.01106, \
0.00635, 0.00297, 0.00100, 0.00000, 0.08016, 0.05976, 0.04993, 0.04478, \
0.03342, 0.03206, 0.02450, 0.02008, 0.01728, 0.01212, 0.01129, 0.00649, \
0.00304, 0.00102, 0.00000, 0.08373, 0.06299, 0.05293, 0.04762, 0.03581, \
0.03438, 0.02640, 0.02169, 0.01870, 0.01315, 0.01226, 0.00708, 0.00332, \
0.00112, 0.00000, 0.08683, 0.06585, 0.05561, 0.05017, 0.03800, 0.03651, \
0.02819, 0.02322, 0.02006, 0.01416, 0.01321, 0.00766, 0.00361, 0.00124, \
0.00000 ");
}
ground_capacitance (capacitance_template_WxS) {
index_1 (" 0.1400, 0.2700, 0.2800, 0.5000, 0.5600, 0.9000, 1.5000 ");
index_2 (" 0.1400, 0.2100, 0.2700, 0.3150, 0.4725, 0.5000, 0.7088, 0.9000, \
1.0631, 1.5000, 1.5947, 2.3920, 3.5880, 5.3821, 538.2070 ");
values (" 0.00996, 0.01186, 0.01332, 0.01433, 0.01741, 0.01789, 0.02110, 0.02358, \
0.02546, 0.02973, 0.03053, 0.03585, 0.04050, 0.04345, 0.04506, 0.01312, \
0.01472, 0.01598, 0.01688, 0.01973, 0.02019, 0.02338, 0.02596, 0.02797, \
0.03256, 0.03343, 0.03925, 0.04435, 0.04760, 0.04939, 0.01333, 0.01491, \
0.01617, 0.01706, 0.01990, 0.02036, 0.02356, 0.02614, 0.02816, 0.03277, \
0.03365, 0.03950, 0.04463, 0.04789, 0.04970, 0.01754, 0.01893, 0.02008, \
0.02091, 0.02368, 0.02414, 0.02742, 0.03015, 0.03230, 0.03729, 0.03824, \
0.04464, 0.05029, 0.05392, 0.05594, 0.01860, 0.01998, 0.02112, 0.02195, \
0.02471, 0.02517, 0.02848, 0.03125, 0.03343, 0.03849, 0.03946, 0.04598, \
0.05174, 0.05545, 0.05751, 0.02467, 0.02602, 0.02715, 0.02798, 0.03080, \
0.03127, 0.03472, 0.03763, 0.03993, 0.04532, 0.04636, 0.05335, 0.05959, \
0.06364, 0.06591, 0.03591, 0.03727, 0.03843, 0.03928, 0.04218, 0.04268, \
0.04626, 0.04931, 0.05173, 0.05744, 0.05853, 0.06599, 0.07270, 0.07718, \
0.07957 ");
}
}
capacitance () {
top_plane: metal9;
bottom_plane: SUBSTRATE;
lateral_capacitance (capacitance_template_WxS) {
index_1 (" 0.1400, 0.2700, 0.2800, 0.5000, 0.5600, 0.9000, 1.5000 ");
index_2 (" 0.1400, 0.2100, 0.2700, 0.3150, 0.4725, 0.5000, 0.7088, 0.9000, \
1.0631, 1.5000, 1.5947, 2.3920, 3.5880, 5.3821, 538.2070 ");
values (" 0.07080, 0.05169, 0.04271, 0.03810, 0.02818, 0.02702, 0.02073, 0.01718, \
0.01497, 0.01090, 0.01025, 0.00634, 0.00327, 0.00126, 0.00000, 0.07529, \
0.05556, 0.04620, 0.04137, 0.03087, 0.02964, 0.02288, 0.01901, 0.01657, \
0.01208, 0.01135, 0.00701, 0.00362, 0.00140, 0.00000, 0.07557, 0.05581, \
0.04643, 0.04158, 0.03105, 0.02981, 0.02302, 0.01913, 0.01668, 0.01216, \
0.01143, 0.00706, 0.00364, 0.00140, 0.00000, 0.08029, 0.06002, 0.05031, \
0.04524, 0.03413, 0.03280, 0.02549, 0.02123, 0.01854, 0.01353, 0.01272, \
0.00785, 0.00406, 0.00157, 0.00000, 0.08121, 0.06087, 0.05111, 0.04600, \
0.03477, 0.03343, 0.02601, 0.02168, 0.01894, 0.01382, 0.01299, 0.00803, \
0.00415, 0.00160, 0.00000, 0.08518, 0.06451, 0.05450, 0.04922, 0.03753, \
0.03611, 0.02824, 0.02360, 0.02063, 0.01508, 0.01418, 0.00877, 0.00453, \
0.00175, 0.00000, 0.08884, 0.06791, 0.05769, 0.05228, 0.04017, 0.03869, \
0.03041, 0.02547, 0.02229, 0.01633, 0.01535, 0.00950, 0.00492, 0.00192, \
0.00000 ");
}
ground_capacitance (capacitance_template_WxS) {
index_1 (" 0.1400, 0.2700, 0.2800, 0.5000, 0.5600, 0.9000, 1.5000 ");
index_2 (" 0.1400, 0.2100, 0.2700, 0.3150, 0.4725, 0.5000, 0.7088, 0.9000, \
1.0631, 1.5000, 1.5947, 2.3920, 3.5880, 5.3821, 538.2070 ");
values (" 0.00835, 0.01004, 0.01134, 0.01225, 0.01497, 0.01539, 0.01814, 0.02021, \
0.02177, 0.02534, 0.02603, 0.03084, 0.03562, 0.03922, 0.04173, 0.01119, \
0.01259, 0.01368, 0.01445, 0.01687, 0.01725, 0.01988, 0.02197, 0.02361, \
0.02743, 0.02818, 0.03345, 0.03869, 0.04265, 0.04542, 0.01138, 0.01276, \
0.01384, 0.01461, 0.01700, 0.01739, 0.02001, 0.02211, 0.02375, 0.02759, \
0.02834, 0.03364, 0.03891, 0.04289, 0.04568, 0.01491, 0.01606, 0.01699, \
0.01767, 0.01988, 0.02025, 0.02286, 0.02505, 0.02678, 0.03094, 0.03176, \
0.03758, 0.04340, 0.04781, 0.05092, 0.01576, 0.01687, 0.01779, 0.01845, \
0.02065, 0.02101, 0.02364, 0.02585, 0.02761, 0.03184, 0.03267, 0.03860, \
0.04454, 0.04904, 0.05222, 0.02035, 0.02141, 0.02229, 0.02294, 0.02514, \
0.02551, 0.02823, 0.03056, 0.03243, 0.03697, 0.03787, 0.04428, 0.05073, \
0.05564, 0.05912, 0.02873, 0.02979, 0.03069, 0.03135, 0.03363, 0.03402, \
0.03687, 0.03934, 0.04134, 0.04620, 0.04716, 0.05407, 0.06103, 0.06643, \
0.07012 ");
}
}
capacitance () {
top_plane: metal10;
bottom_plane: metal5;
lateral_capacitance (capacitance_template_WxS) {
index_1 (" 0.1400, 0.2700, 0.2800, 0.5000, 0.5600, 0.9000, 1.5000 ");
index_2 (" 0.1400, 0.2100, 0.2700, 0.3150, 0.4725, 0.5000, 0.7088, 0.9000, \
1.0631, 1.5000, 1.5947, 2.3920, 3.5880, 5.3821, 538.2070 ");
values (" 0.06461, 0.04482, 0.03539, 0.03051, 0.02000, 0.01878, 0.01236, 0.00899, \
0.00709, 0.00411, 0.00371, 0.00179, 0.00078, 0.00030, 0.00000, 0.06750, \
0.04726, 0.03757, 0.03253, 0.02164, 0.02037, 0.01363, 0.01006, 0.00800, \
0.00476, 0.00431, 0.00213, 0.00095, 0.00036, 0.00000, 0.06768, 0.04741, \
0.03770, 0.03266, 0.02174, 0.02047, 0.01372, 0.01013, 0.00807, 0.00480, \
0.00435, 0.00215, 0.00096, 0.00037, 0.00000, 0.07048, 0.04992, 0.04003, \
0.03487, 0.02364, 0.02232, 0.01527, 0.01147, 0.00925, 0.00567, 0.00516, \
0.00263, 0.00121, 0.00047, 0.00000, 0.07102, 0.05043, 0.04052, 0.03534, \
0.02405, 0.02273, 0.01562, 0.01178, 0.00953, 0.00587, 0.00536, 0.00275, \
0.00127, 0.00050, 0.00000, 0.07352, 0.05278, 0.04276, 0.03750, 0.02598, \
0.02462, 0.01727, 0.01324, 0.01085, 0.00689, 0.00632, 0.00336, 0.00160, \
0.00065, 0.00000, 0.07635, 0.05549, 0.04536, 0.04003, 0.02830, 0.02690, \
0.01931, 0.01508, 0.01254, 0.00823, 0.00759, 0.00421, 0.00209, 0.00087, \
0.00000 ");
}
ground_capacitance (capacitance_template_WxS) {
index_1 (" 0.1400, 0.2700, 0.2800, 0.5000, 0.5600, 0.9000, 1.5000 ");
index_2 (" 0.1400, 0.2100, 0.2700, 0.3150, 0.4725, 0.5000, 0.7088, 0.9000, \
1.0631, 1.5000, 1.5947, 2.3920, 3.5880, 5.3821, 538.2070 ");
values (" 0.02616, 0.03115, 0.03502, 0.03772, 0.04564, 0.04682, 0.05404, 0.05874, \
0.06172, 0.06667, 0.06741, 0.07098, 0.07294, 0.07392, 0.07452, 0.03683, \
0.04171, 0.04551, 0.04818, 0.05608, 0.05727, 0.06463, 0.06950, 0.07265, \
0.07798, 0.07879, 0.08282, 0.08511, 0.08625, 0.08699, 0.03764, 0.04251, \
0.04631, 0.04898, 0.05687, 0.05806, 0.06543, 0.07031, 0.07347, 0.07883, \
0.07965, 0.08371, 0.08602, 0.08717, 0.08792, 0.05529, 0.06004, 0.06376, \
0.06638, 0.07422, 0.07541, 0.08288, 0.08793, 0.09125, 0.09706, 0.09796, \
0.10258, 0.10534, 0.10677, 0.10773, 0.06004, 0.06476, 0.06847, 0.07108, \
0.07890, 0.08009, 0.08758, 0.09267, 0.09602, 0.10193, 0.10285, 0.10760, \
0.11046, 0.11196, 0.11298, 0.08680, 0.09144, 0.09509, 0.09766, 0.10545, \
0.10664, 0.11423, 0.11948, 0.12298, 0.12931, 0.13032, 0.13566, 0.13905, \
0.14091, 0.14222, 0.13368, 0.13826, 0.14187, 0.14443, 0.15221, 0.15341, \
0.16111, 0.16653, 0.17020, 0.17701, 0.17812, 0.18418, 0.18826, 0.19067, \
0.19238 ");
}
}
capacitance () {
top_plane: metal10;
bottom_plane: metal4;
lateral_capacitance (capacitance_template_WxS) {
index_1 (" 0.1400, 0.2700, 0.2800, 0.5000, 0.5600, 0.9000, 1.5000 ");
index_2 (" 0.1400, 0.2100, 0.2700, 0.3150, 0.4725, 0.5000, 0.7088, 0.9000, \
1.0631, 1.5000, 1.5947, 2.3920, 3.5880, 5.3821, 538.2070 ");
values (" 0.06923, 0.04992, 0.04079, 0.03608, 0.02582, 0.02462, 0.01800, 0.01426, \
0.01197, 0.00794, 0.00733, 0.00406, 0.00197, 0.00081, 0.00000, 0.07331, \
0.05338, 0.04387, 0.03891, 0.02808, 0.02679, 0.01972, 0.01570, 0.01321, \
0.00885, 0.00818, 0.00458, 0.00225, 0.00093, 0.00000, 0.07356, 0.05360, \
0.04406, 0.03909, 0.02822, 0.02693, 0.01983, 0.01579, 0.01329, 0.00891, \
0.00824, 0.00461, 0.00227, 0.00094, 0.00000, 0.07751, 0.05706, 0.04720, \
0.04203, 0.03063, 0.02927, 0.02175, 0.01742, 0.01475, 0.01001, 0.00928, \
0.00528, 0.00264, 0.00111, 0.00000, 0.07824, 0.05772, 0.04781, 0.04261, \
0.03112, 0.02975, 0.02215, 0.01778, 0.01506, 0.01025, 0.00951, 0.00544, \
0.00273, 0.00116, 0.00000, 0.08127, 0.06049, 0.05040, 0.04508, 0.03326, \
0.03184, 0.02394, 0.01937, 0.01651, 0.01140, 0.01061, 0.00619, 0.00318, \
0.00137, 0.00000, 0.08424, 0.06329, 0.05308, 0.04767, 0.03561, 0.03414, \
0.02600, 0.02124, 0.01824, 0.01283, 0.01198, 0.00717, 0.00378, 0.00168, \
0.00000 ");
}
ground_capacitance (capacitance_template_WxS) {
index_1 (" 0.1400, 0.2700, 0.2800, 0.5000, 0.5600, 0.9000, 1.5000 ");
index_2 (" 0.1400, 0.2100, 0.2700, 0.3150, 0.4725, 0.5000, 0.7088, 0.9000, \
1.0631, 1.5000, 1.5947, 2.3920, 3.5880, 5.3821, 538.2070 ");
values (" 0.01234, 0.01468, 0.01651, 0.01781, 0.02187, 0.02251, 0.02686, 0.03018, \
0.03260, 0.03761, 0.03848, 0.04359, 0.04733, 0.04950, 0.05112, 0.01645, \
0.01858, 0.02030, 0.02153, 0.02550, 0.02614, 0.03055, 0.03397, 0.03652, \
0.04182, 0.04275, 0.04832, 0.05246, 0.05490, 0.05677, 0.01675, 0.01887, \
0.02058, 0.02181, 0.02578, 0.02642, 0.03083, 0.03426, 0.03681, 0.04213, \
0.04306, 0.04867, 0.05283, 0.05529, 0.05717, 0.02304, 0.02504, 0.02669, \
0.02789, 0.03181, 0.03245, 0.03692, 0.04046, 0.04310, 0.04873, 0.04973, \
0.05582, 0.06047, 0.06329, 0.06553, 0.02471, 0.02670, 0.02834, 0.02953, \
0.03344, 0.03408, 0.03856, 0.04212, 0.04478, 0.05047, 0.05148, 0.05767, \
0.06243, 0.06535, 0.06766, 0.03416, 0.03609, 0.03770, 0.03887, 0.04275, \
0.04339, 0.04791, 0.05153, 0.05427, 0.06021, 0.06127, 0.06791, 0.07317, \
0.07651, 0.07925, 0.05074, 0.05264, 0.05422, 0.05538, 0.05923, 0.05987, \
0.06440, 0.06809, 0.07091, 0.07710, 0.07822, 0.08537, 0.09123, 0.09522, \
0.09846 ");
}
}
capacitance () {
top_plane: metal10;
bottom_plane: metal3;
lateral_capacitance (capacitance_template_WxS) {
index_1 (" 0.1400, 0.2700, 0.2800, 0.5000, 0.5600, 0.9000, 1.5000 ");
index_2 (" 0.1400, 0.2100, 0.2700, 0.3150, 0.4725, 0.5000, 0.7088, 0.9000, \
1.0631, 1.5000, 1.5947, 2.3920, 3.5880, 5.3821, 538.2070 ");
values (" 0.07023, 0.05105, 0.04201, 0.03737, 0.02730, 0.02612, 0.01967, 0.01600, \
0.01372, 0.00961, 0.00897, 0.00535, 0.00279, 0.00122, 0.00000, 0.07457, \
0.05477, 0.04534, 0.04046, 0.02980, 0.02854, 0.02161, 0.01764, 0.01515, \
0.01068, 0.00997, 0.00598, 0.00314, 0.00138, 0.00000, 0.07485, 0.05500, \
0.04556, 0.04065, 0.02996, 0.02869, 0.02174, 0.01774, 0.01525, 0.01075, \
0.01004, 0.00602, 0.00317, 0.00139, 0.00000, 0.07923, 0.05888, 0.04910, \
0.04398, 0.03272, 0.03137, 0.02393, 0.01962, 0.01692, 0.01202, 0.01124, \
0.00681, 0.00363, 0.00162, 0.00000, 0.08006, 0.05964, 0.04980, 0.04465, \
0.03328, 0.03192, 0.02439, 0.02002, 0.01728, 0.01229, 0.01151, 0.00699, \
0.00373, 0.00167, 0.00000, 0.08357, 0.06284, 0.05279, 0.04749, 0.03573, \
0.03431, 0.02642, 0.02180, 0.01889, 0.01357, 0.01272, 0.00784, 0.00425, \
0.00193, 0.00000, 0.08692, 0.06598, 0.05577, 0.05037, 0.03829, 0.03682, \
0.02863, 0.02379, 0.02072, 0.01507, 0.01416, 0.00888, 0.00491, 0.00228, \
0.00000 ");
}
ground_capacitance (capacitance_template_WxS) {
index_1 (" 0.1400, 0.2700, 0.2800, 0.5000, 0.5600, 0.9000, 1.5000 ");
index_2 (" 0.1400, 0.2100, 0.2700, 0.3150, 0.4725, 0.5000, 0.7088, 0.9000, \
1.0631, 1.5000, 1.5947, 2.3920, 3.5880, 5.3821, 538.2070 ");
values (" 0.00977, 0.01168, 0.01318, 0.01423, 0.01747, 0.01798, 0.02143, 0.02409, \
0.02607, 0.03039, 0.03118, 0.03621, 0.04047, 0.04333, 0.04574, 0.01306, \
0.01472, 0.01605, 0.01701, 0.02006, 0.02055, 0.02397, 0.02668, 0.02875, \
0.03332, 0.03416, 0.03963, 0.04430, 0.04748, 0.05022, 0.01328, 0.01493, \
0.01626, 0.01721, 0.02026, 0.02075, 0.02416, 0.02688, 0.02895, 0.03354, \
0.03438, 0.03987, 0.04458, 0.04777, 0.05053, 0.01789, 0.01938, 0.02061, \
0.02150, 0.02443, 0.02492, 0.02834, 0.03113, 0.03328, 0.03814, 0.03905, \
0.04500, 0.05019, 0.05380, 0.05700, 0.01907, 0.02054, 0.02175, 0.02264, \
0.02556, 0.02604, 0.02947, 0.03228, 0.03445, 0.03936, 0.04028, 0.04632, \
0.05162, 0.05533, 0.05863, 0.02564, 0.02705, 0.02823, 0.02909, 0.03198, \
0.03246, 0.03593, 0.03880, 0.04104, 0.04618, 0.04715, 0.05360, 0.05939, \
0.06354, 0.06735, 0.03721, 0.03859, 0.03975, 0.04060, 0.04348, 0.04396, \
0.04746, 0.05040, 0.05271, 0.05806, 0.05908, 0.06598, 0.07232, 0.07711, \
0.08151 ");
}
}
capacitance () {
top_plane: metal10;
bottom_plane: metal2;
lateral_capacitance (capacitance_template_WxS) {
index_1 (" 0.1400, 0.2700, 0.2800, 0.5000, 0.5600, 0.9000, 1.5000 ");
index_2 (" 0.1400, 0.2100, 0.2700, 0.3150, 0.4725, 0.5000, 0.7088, 0.9000, \
1.0631, 1.5000, 1.5947, 2.3920, 3.5880, 5.3821, 538.2070 ");
values (" 0.07065, 0.05152, 0.04252, 0.03790, 0.02791, 0.02674, 0.02036, 0.01674, \
0.01449, 0.01040, 0.00976, 0.00604, 0.00328, 0.00149, 0.00000, 0.07508, \
0.05532, 0.04594, 0.04108, 0.03050, 0.02925, 0.02240, 0.01847, 0.01601, \
0.01155, 0.01084, 0.00673, 0.00368, 0.00168, 0.00000, 0.07536, 0.05556, \
0.04616, 0.04128, 0.03067, 0.02941, 0.02253, 0.01859, 0.01612, 0.01162, \
0.01091, 0.00678, 0.00370, 0.00169, 0.00000, 0.07991, 0.05960, 0.04986, \
0.04476, 0.03358, 0.03224, 0.02487, 0.02060, 0.01791, 0.01299, 0.01221, \
0.00764, 0.00422, 0.00195, 0.00000, 0.08079, 0.06041, 0.05060, 0.04547, \
0.03418, 0.03283, 0.02537, 0.02103, 0.01830, 0.01329, 0.01249, 0.00784, \
0.00434, 0.00200, 0.00000, 0.08452, 0.06383, 0.05381, 0.04853, 0.03681, \
0.03540, 0.02755, 0.02294, 0.02003, 0.01466, 0.01380, 0.00874, 0.00490, \
0.00229, 0.00000, 0.08813, 0.06721, 0.05701, 0.05161, 0.03955, 0.03809, \
0.02990, 0.02505, 0.02196, 0.01623, 0.01531, 0.00983, 0.00560, 0.00268, \
0.00000 ");
}
ground_capacitance (capacitance_template_WxS) {
index_1 (" 0.1400, 0.2700, 0.2800, 0.5000, 0.5600, 0.9000, 1.5000 ");
index_2 (" 0.1400, 0.2100, 0.2700, 0.3150, 0.4725, 0.5000, 0.7088, 0.9000, \
1.0631, 1.5000, 1.5947, 2.3920, 3.5880, 5.3821, 538.2070 ");
values (" 0.00872, 0.01048, 0.01185, 0.01281, 0.01577, 0.01623, 0.01934, 0.02173, \
0.02351, 0.02745, 0.02818, 0.03300, 0.03739, 0.04057, 0.04350, 0.01174, \
0.01324, 0.01444, 0.01530, 0.01802, 0.01846, 0.02149, 0.02389, 0.02574, \
0.02989, 0.03067, 0.03590, 0.04070, 0.04423, 0.04753, 0.01194, 0.01343, \
0.01463, 0.01548, 0.01819, 0.01863, 0.02165, 0.02406, 0.02591, 0.03007, \
0.03085, 0.03611, 0.04094, 0.04449, 0.04781, 0.01601, 0.01732, 0.01839, \
0.01917, 0.02172, 0.02215, 0.02514, 0.02760, 0.02951, 0.03392, 0.03476, \
0.04046, 0.04577, 0.04975, 0.05357, 0.01702, 0.01830, 0.01936, 0.02013, \
0.02266, 0.02308, 0.02608, 0.02855, 0.03048, 0.03493, 0.03579, 0.04158, \
0.04700, 0.05108, 0.05501, 0.02257, 0.02378, 0.02479, 0.02553, 0.02802, \
0.02844, 0.03145, 0.03398, 0.03598, 0.04066, 0.04155, 0.04774, 0.05365, \
0.05818, 0.06267, 0.03226, 0.03344, 0.03443, 0.03516, 0.03765, 0.03807, \
0.04112, 0.04372, 0.04579, 0.05068, 0.05163, 0.05824, 0.06468, 0.06984, \
0.07498 ");
}
}
capacitance () {
top_plane: metal10;
bottom_plane: SUBSTRATE;
lateral_capacitance (capacitance_template_WxS) {
index_1 (" 0.1400, 0.2700, 0.2800, 0.5000, 0.5600, 0.9000, 1.5000 ");
index_2 (" 0.1400, 0.2100, 0.2700, 0.3150, 0.4725, 0.5000, 0.7088, 0.9000, \
1.0631, 1.5000, 1.5947, 2.3920, 3.5880, 5.3821, 538.2070 ");
values (" 0.07135, 0.05231, 0.04337, 0.03879, 0.02892, 0.02777, 0.02151, 0.01798, \
0.01579, 0.01180, 0.01117, 0.00741, 0.00438, 0.00218, 0.00000, 0.07594, \
0.05625, 0.04692, 0.04210, 0.03165, 0.03042, 0.02370, 0.01987, 0.01748, \
0.01311, 0.01241, 0.00823, 0.00488, 0.00243, 0.00000, 0.07622, 0.05650, \
0.04715, 0.04231, 0.03182, 0.03059, 0.02384, 0.02000, 0.01759, 0.01319, \
0.01249, 0.00829, 0.00491, 0.00245, 0.00000, 0.08100, 0.06077, 0.05108, \
0.04603, 0.03497, 0.03366, 0.02642, 0.02225, 0.01962, 0.01477, 0.01399, \
0.00932, 0.00555, 0.00279, 0.00000, 0.08194, 0.06164, 0.05189, 0.04680, \
0.03564, 0.03431, 0.02698, 0.02274, 0.02006, 0.01512, 0.01433, 0.00955, \
0.00570, 0.00286, 0.00000, 0.08607, 0.06544, 0.05547, 0.05022, 0.03862, \
0.03723, 0.02948, 0.02494, 0.02206, 0.01671, 0.01584, 0.01062, 0.00637, \
0.00323, 0.00000, 0.09023, 0.06935, 0.05918, 0.05380, 0.04180, 0.04035, \
0.03221, 0.02738, 0.02429, 0.01852, 0.01757, 0.01187, 0.00719, 0.00369, \
0.00000 ");
}
ground_capacitance (capacitance_template_WxS) {
index_1 (" 0.1400, 0.2700, 0.2800, 0.5000, 0.5600, 0.9000, 1.5000 ");
index_2 (" 0.1400, 0.2100, 0.2700, 0.3150, 0.4725, 0.5000, 0.7088, 0.9000, \
1.0631, 1.5000, 1.5947, 2.3920, 3.5880, 5.3821, 538.2070 ");
values (" 0.00696, 0.00846, 0.00964, 0.01046, 0.01301, 0.01341, 0.01604, 0.01802, \
0.01948, 0.02272, 0.02333, 0.02752, 0.03183, 0.03551, 0.03970, 0.00958, \
0.01085, 0.01186, 0.01258, 0.01484, 0.01520, 0.01766, 0.01959, 0.02107, \
0.02443, 0.02507, 0.02961, 0.03431, 0.03836, 0.04303, 0.00975, 0.01101, \
0.01201, 0.01272, 0.01497, 0.01533, 0.01778, 0.01971, 0.02119, 0.02455, \
0.02520, 0.02976, 0.03449, 0.03856, 0.04326, 0.01311, 0.01416, 0.01502, \
0.01563, 0.01764, 0.01797, 0.02030, 0.02221, 0.02371, 0.02724, 0.02793, \
0.03287, 0.03807, 0.04260, 0.04794, 0.01390, 0.01492, 0.01575, 0.01635, \
0.01833, 0.01865, 0.02097, 0.02288, 0.02438, 0.02795, 0.02865, 0.03367, \
0.03898, 0.04362, 0.04909, 0.01802, 0.01894, 0.01970, 0.02026, 0.02213, \
0.02245, 0.02473, 0.02667, 0.02823, 0.03197, 0.03272, 0.03811, 0.04388, \
0.04900, 0.05516, 0.02490, 0.02577, 0.02651, 0.02705, 0.02891, 0.02922, \
0.03154, 0.03354, 0.03516, 0.03912, 0.03991, 0.04571, 0.05200, 0.05774, \
0.06469 ");
}
}
capacitance () {
top_plane: AIR;
bottom_plane: metal5;
lateral_capacitance (capacitance_template_WxS) {
index_1 (" 0.1400, 0.2700, 0.2800, 0.5000, 0.5600, 0.9000, 1.5000 ");
index_2 (" 0.1400, 0.2100, 0.2700, 0.3150, 0.4725, 0.5000, 0.7088, 0.9000, \
1.0631, 1.5000, 1.5947, 2.3920, 3.5880, 5.3821, 538.2070 ");
values (" 0.06486, 0.04509, 0.03567, 0.03080, 0.02030, 0.01908, 0.01265, 0.00928, \
0.00736, 0.00436, 0.00395, 0.00199, 0.00096, 0.00046, 0.00000, 0.06778, \
0.04755, 0.03787, 0.03284, 0.02196, 0.02069, 0.01396, 0.01039, 0.00832, \
0.00505, 0.00460, 0.00238, 0.00118, 0.00057, 0.00000, 0.06795, 0.04770, \
0.03801, 0.03297, 0.02207, 0.02080, 0.01405, 0.01046, 0.00839, 0.00510, \
0.00464, 0.00241, 0.00119, 0.00058, 0.00000, 0.07079, 0.05026, 0.04038, \
0.03522, 0.02401, 0.02269, 0.01565, 0.01186, 0.00964, 0.00604, 0.00553, \
0.00298, 0.00153, 0.00076, 0.00000, 0.07134, 0.05078, 0.04087, 0.03570, \
0.02444, 0.02311, 0.01602, 0.01218, 0.00993, 0.00627, 0.00575, 0.00313, \
0.00162, 0.00081, 0.00000, 0.07392, 0.05320, 0.04319, 0.03794, 0.02645, \
0.02509, 0.01777, 0.01375, 0.01137, 0.00741, 0.00684, 0.00389, 0.00210, \
0.00110, 0.00000, 0.07693, 0.05609, 0.04598, 0.04066, 0.02898, 0.02759, \
0.02004, 0.01584, 0.01331, 0.00904, 0.00841, 0.00504, 0.00289, 0.00159, \
0.00000 ");
}
ground_capacitance (capacitance_template_WxS) {
index_1 (" 0.1400, 0.2700, 0.2800, 0.5000, 0.5600, 0.9000, 1.5000 ");
index_2 (" 0.1400, 0.2100, 0.2700, 0.3150, 0.4725, 0.5000, 0.7088, 0.9000, \
1.0631, 1.5000, 1.5947, 2.3920, 3.5880, 5.3821, 538.2070 ");
values (" 0.02552, 0.03045, 0.03428, 0.03695, 0.04481, 0.04598, 0.05320, 0.05792, \
0.06092, 0.06596, 0.06671, 0.07037, 0.07239, 0.07341, 0.07432, 0.03611, \
0.04094, 0.04471, 0.04734, 0.05518, 0.05636, 0.06369, 0.06857, 0.07173, \
0.07713, 0.07795, 0.08206, 0.08440, 0.08559, 0.08674, 0.03692, 0.04174, \
0.04550, 0.04814, 0.05597, 0.05715, 0.06449, 0.06937, 0.07254, 0.07797, \
0.07880, 0.08293, 0.08530, 0.08650, 0.08766, 0.05445, 0.05915, 0.06283, \
0.06542, 0.07318, 0.07436, 0.08179, 0.08682, 0.09014, 0.09597, 0.09688, \
0.10154, 0.10434, 0.10582, 0.10736, 0.05916, 0.06384, 0.06750, 0.07009, \
0.07783, 0.07901, 0.08645, 0.09151, 0.09486, 0.10077, 0.10170, 0.10648, \
0.10938, 0.11094, 0.11258, 0.08572, 0.09030, 0.09390, 0.09645, 0.10414, \
0.10532, 0.11282, 0.11800, 0.12147, 0.12775, 0.12876, 0.13408, 0.13749, \
0.13942, 0.14163, 0.13208, 0.13659, 0.14014, 0.14266, 0.15028, 0.15146, \
0.15901, 0.16431, 0.16791, 0.17458, 0.17566, 0.18163, 0.18571, 0.18824, \
0.19139 ");
}
}
capacitance () {
top_plane: AIR;
bottom_plane: metal4;
lateral_capacitance (capacitance_template_WxS) {
index_1 (" 0.1400, 0.2700, 0.2800, 0.5000, 0.5600, 0.9000, 1.5000 ");
index_2 (" 0.1400, 0.2100, 0.2700, 0.3150, 0.4725, 0.5000, 0.7088, 0.9000, \
1.0631, 1.5000, 1.5947, 2.3920, 3.5880, 5.3821, 538.2070 ");
values (" 0.06962, 0.05034, 0.04123, 0.03653, 0.02631, 0.02510, 0.01850, 0.01475, \
0.01245, 0.00840, 0.00779, 0.00449, 0.00238, 0.00119, 0.00000, 0.07374, \
0.05383, 0.04433, 0.03939, 0.02858, 0.02729, 0.02024, 0.01622, 0.01374, \
0.00937, 0.00870, 0.00508, 0.00274, 0.00139, 0.00000, 0.07399, 0.05405, \
0.04453, 0.03957, 0.02872, 0.02743, 0.02036, 0.01632, 0.01382, 0.00943, \
0.00876, 0.00512, 0.00276, 0.00141, 0.00000, 0.07798, 0.05755, 0.04770, \
0.04254, 0.03117, 0.02981, 0.02231, 0.01801, 0.01534, 0.01061, 0.00989, \
0.00591, 0.00327, 0.00171, 0.00000, 0.07872, 0.05822, 0.04832, 0.04313, \
0.03168, 0.03030, 0.02273, 0.01838, 0.01568, 0.01088, 0.01015, 0.00609, \
0.00340, 0.00178, 0.00000, 0.08182, 0.06106, 0.05098, 0.04567, 0.03389, \
0.03247, 0.02462, 0.02007, 0.01724, 0.01218, 0.01140, 0.00703, 0.00404, \
0.00219, 0.00000, 0.08496, 0.06404, 0.05385, 0.04846, 0.03644, 0.03499, \
0.02691, 0.02219, 0.01924, 0.01391, 0.01308, 0.00836, 0.00502, 0.00285, \
0.00000 ");
}
ground_capacitance (capacitance_template_WxS) {
index_1 (" 0.1400, 0.2700, 0.2800, 0.5000, 0.5600, 0.9000, 1.5000 ");
index_2 (" 0.1400, 0.2100, 0.2700, 0.3150, 0.4725, 0.5000, 0.7088, 0.9000, \
1.0631, 1.5000, 1.5947, 2.3920, 3.5880, 5.3821, 538.2070 ");
values (" 0.01137, 0.01360, 0.01537, 0.01663, 0.02059, 0.02122, 0.02551, 0.02882, \
0.03124, 0.03627, 0.03715, 0.04232, 0.04608, 0.04828, 0.05064, 0.01538, \
0.01743, 0.01909, 0.02029, 0.02416, 0.02479, 0.02912, 0.03252, 0.03504, \
0.04033, 0.04126, 0.04683, 0.05096, 0.05342, 0.05618, 0.01567, 0.01771, \
0.01937, 0.02057, 0.02444, 0.02506, 0.02940, 0.03279, 0.03532, 0.04063, \
0.04156, 0.04716, 0.05131, 0.05379, 0.05658, 0.02184, 0.02378, 0.02538, \
0.02655, 0.03036, 0.03099, 0.03537, 0.03884, 0.04144, 0.04699, 0.04797, \
0.05397, 0.05854, 0.06138, 0.06475, 0.02348, 0.02541, 0.02700, 0.02816, \
0.03197, 0.03259, 0.03697, 0.04045, 0.04307, 0.04866, 0.04965, 0.05573, \
0.06040, 0.06332, 0.06684, 0.03272, 0.03460, 0.03616, 0.03730, 0.04106, \
0.04168, 0.04605, 0.04956, 0.05222, 0.05796, 0.05899, 0.06540, 0.07050, \
0.07383, 0.07814, 0.04880, 0.05062, 0.05213, 0.05324, 0.05693, 0.05754, \
0.06186, 0.06537, 0.06804, 0.07391, 0.07497, 0.08173, 0.08734, 0.09132, \
0.09679 ");
}
}
capacitance () {
top_plane: AIR;
bottom_plane: metal3;
lateral_capacitance (capacitance_template_WxS) {
index_1 (" 0.1400, 0.2700, 0.2800, 0.5000, 0.5600, 0.9000, 1.5000 ");
index_2 (" 0.1400, 0.2100, 0.2700, 0.3150, 0.4725, 0.5000, 0.7088, 0.9000, \
1.0631, 1.5000, 1.5947, 2.3920, 3.5880, 5.3821, 538.2070 ");
values (" 0.07069, 0.05155, 0.04255, 0.03792, 0.02790, 0.02672, 0.02028, 0.01661, \
0.01433, 0.01021, 0.00956, 0.00592, 0.00335, 0.00176, 0.00000, 0.07509, \
0.05532, 0.04591, 0.04104, 0.03041, 0.02916, 0.02225, 0.01828, 0.01580, \
0.01132, 0.01062, 0.00663, 0.00380, 0.00202, 0.00000, 0.07537, 0.05555, \
0.04613, 0.04124, 0.03058, 0.02931, 0.02238, 0.01839, 0.01590, 0.01140, \
0.01069, 0.00667, 0.00383, 0.00204, 0.00000, 0.07980, 0.05947, 0.04970, \
0.04460, 0.03337, 0.03202, 0.02461, 0.02032, 0.01763, 0.01275, 0.01198, \
0.00759, 0.00444, 0.00241, 0.00000, 0.08064, 0.06024, 0.05042, 0.04527, \
0.03394, 0.03259, 0.02508, 0.02074, 0.01801, 0.01305, 0.01227, 0.00780, \
0.00458, 0.00250, 0.00000, 0.08421, 0.06351, 0.05347, 0.04818, 0.03646, \
0.03505, 0.02720, 0.02262, 0.01973, 0.01447, 0.01364, 0.00884, 0.00532, \
0.00299, 0.00000, 0.08773, 0.06682, 0.05663, 0.05124, 0.03922, 0.03776, \
0.02964, 0.02486, 0.02184, 0.01629, 0.01541, 0.01026, 0.00640, 0.00374, \
0.00000 ");
}
ground_capacitance (capacitance_template_WxS) {
index_1 (" 0.1400, 0.2700, 0.2800, 0.5000, 0.5600, 0.9000, 1.5000 ");
index_2 (" 0.1400, 0.2100, 0.2700, 0.3150, 0.4725, 0.5000, 0.7088, 0.9000, \
1.0631, 1.5000, 1.5947, 2.3920, 3.5880, 5.3821, 538.2070 ");
values (" 0.00863, 0.01040, 0.01180, 0.01279, 0.01590, 0.01640, 0.01977, 0.02240, \
0.02438, 0.02871, 0.02951, 0.03455, 0.03877, 0.04161, 0.04504, 0.01176, \
0.01333, 0.01459, 0.01550, 0.01844, 0.01892, 0.02225, 0.02492, 0.02696, \
0.03149, 0.03233, 0.03773, 0.04232, 0.04544, 0.04937, 0.01198, 0.01354, \
0.01480, 0.01570, 0.01863, 0.01911, 0.02244, 0.02511, 0.02715, 0.03170, \
0.03254, 0.03796, 0.04257, 0.04572, 0.04968, 0.01645, 0.01787, 0.01904, \
0.01990, 0.02272, 0.02319, 0.02651, 0.02922, 0.03132, 0.03606, 0.03694, \
0.04272, 0.04772, 0.05125, 0.05592, 0.01760, 0.01900, 0.02016, 0.02101, \
0.02382, 0.02428, 0.02760, 0.03033, 0.03243, 0.03721, 0.03810, 0.04394, \
0.04903, 0.05264, 0.05749, 0.02399, 0.02533, 0.02645, 0.02728, 0.03004, \
0.03050, 0.03382, 0.03656, 0.03870, 0.04359, 0.04451, 0.05062, 0.05609, \
0.06010, 0.06586, 0.03506, 0.03636, 0.03745, 0.03825, 0.04095, 0.04140, \
0.04468, 0.04742, 0.04956, 0.05452, 0.05546, 0.06182, 0.06769, 0.07229, \
0.07937 ");
}
}
capacitance () {
top_plane: AIR;
bottom_plane: metal2;
lateral_capacitance (capacitance_template_WxS) {
index_1 (" 0.1400, 0.2700, 0.2800, 0.5000, 0.5600, 0.9000, 1.5000 ");
index_2 (" 0.1400, 0.2100, 0.2700, 0.3150, 0.4725, 0.5000, 0.7088, 0.9000, \
1.0631, 1.5000, 1.5947, 2.3920, 3.5880, 5.3821, 538.2070 ");
values (" 0.07114, 0.05206, 0.04310, 0.03851, 0.02857, 0.02740, 0.02104, 0.01743, \
0.01518, 0.01107, 0.01042, 0.00669, 0.00393, 0.00213, 0.00000, 0.07566, \
0.05593, 0.04657, 0.04172, 0.03118, 0.02994, 0.02311, 0.01919, 0.01674, \
0.01227, 0.01156, 0.00746, 0.00443, 0.00243, 0.00000, 0.07594, 0.05617, \
0.04679, 0.04193, 0.03135, 0.03010, 0.02325, 0.01931, 0.01684, 0.01235, \
0.01164, 0.00751, 0.00446, 0.00245, 0.00000, 0.08054, 0.06026, 0.05053, \
0.04545, 0.03429, 0.03296, 0.02562, 0.02136, 0.01869, 0.01380, 0.01302, \
0.00850, 0.00513, 0.00287, 0.00000, 0.08143, 0.06107, 0.05129, 0.04617, \
0.03491, 0.03356, 0.02613, 0.02181, 0.01910, 0.01413, 0.01334, 0.00873, \
0.00529, 0.00297, 0.00000, 0.08523, 0.06456, 0.05455, 0.04928, 0.03760, \
0.03620, 0.02839, 0.02382, 0.02093, 0.01564, 0.01479, 0.00984, 0.00609, \
0.00350, 0.00000, 0.08900, 0.06811, 0.05793, 0.05255, 0.04054, 0.03908, \
0.03096, 0.02617, 0.02314, 0.01753, 0.01663, 0.01132, 0.00722, 0.00430, \
0.00000 ");
}
ground_capacitance (capacitance_template_WxS) {
index_1 (" 0.1400, 0.2700, 0.2800, 0.5000, 0.5600, 0.9000, 1.5000 ");
index_2 (" 0.1400, 0.2100, 0.2700, 0.3150, 0.4725, 0.5000, 0.7088, 0.9000, \
1.0631, 1.5000, 1.5947, 2.3920, 3.5880, 5.3821, 538.2070 ");
values (" 0.00750, 0.00909, 0.01035, 0.01124, 0.01403, 0.01448, 0.01749, 0.01985, \
0.02162, 0.02557, 0.02630, 0.03112, 0.03543, 0.03855, 0.04265, 0.01031, \
0.01171, 0.01283, 0.01364, 0.01623, 0.01665, 0.01958, 0.02194, 0.02376, \
0.02786, 0.02863, 0.03378, 0.03843, 0.04185, 0.04652, 0.01051, 0.01189, \
0.01301, 0.01381, 0.01639, 0.01681, 0.01974, 0.02210, 0.02392, 0.02803, \
0.02880, 0.03397, 0.03865, 0.04209, 0.04679, 0.01441, 0.01565, 0.01666, \
0.01740, 0.01984, 0.02025, 0.02313, 0.02551, 0.02736, 0.03164, 0.03245, \
0.03793, 0.04299, 0.04681, 0.05230, 0.01540, 0.01661, 0.01761, 0.01834, \
0.02076, 0.02116, 0.02404, 0.02642, 0.02828, 0.03259, 0.03341, 0.03895, \
0.04409, 0.04800, 0.05367, 0.02076, 0.02191, 0.02287, 0.02357, 0.02593, \
0.02633, 0.02919, 0.03159, 0.03348, 0.03788, 0.03873, 0.04451, 0.04999, \
0.05429, 0.06095, 0.02997, 0.03107, 0.03200, 0.03268, 0.03498, 0.03537, \
0.03820, 0.04059, 0.04248, 0.04695, 0.04781, 0.05380, 0.05965, 0.06450, \
0.07256 ");
}
}
capacitance () {
top_plane: AIR;
bottom_plane: SUBSTRATE;
lateral_capacitance (capacitance_template_WxS) {
index_1 (" 0.1400, 0.2700, 0.2800, 0.5000, 0.5600, 0.9000, 1.5000 ");
index_2 (" 0.1400, 0.2100, 0.2700, 0.3150, 0.4725, 0.5000, 0.7088, 0.9000, \
1.0631, 1.5000, 1.5947, 2.3920, 3.5880, 5.3821, 538.2070 ");
values (" 0.07191, 0.05294, 0.04406, 0.03952, 0.02973, 0.02859, 0.02237, 0.01885, \
0.01667, 0.01266, 0.01202, 0.00825, 0.00524, 0.00306, 0.00000, 0.07662, \
0.05698, 0.04768, 0.04289, 0.03249, 0.03127, 0.02459, 0.02077, 0.01838, \
0.01402, 0.01332, 0.00916, 0.00585, 0.00344, 0.00000, 0.07691, 0.05723, \
0.04792, 0.04310, 0.03267, 0.03144, 0.02473, 0.02090, 0.01850, 0.01411, \
0.01340, 0.00922, 0.00590, 0.00347, 0.00000, 0.08178, 0.06158, 0.05191, \
0.04687, 0.03586, 0.03455, 0.02735, 0.02319, 0.02058, 0.01577, 0.01499, \
0.01038, 0.00671, 0.00400, 0.00000, 0.08274, 0.06246, 0.05273, 0.04766, \
0.03654, 0.03521, 0.02791, 0.02369, 0.02104, 0.01614, 0.01535, 0.01065, \
0.00690, 0.00412, 0.00000, 0.08693, 0.06632, 0.05637, 0.05113, 0.03957, \
0.03818, 0.03048, 0.02598, 0.02314, 0.01787, 0.01701, 0.01192, 0.00783, \
0.00476, 0.00000, 0.09124, 0.07039, 0.06024, 0.05488, 0.04294, 0.04149, \
0.03342, 0.02866, 0.02563, 0.01999, 0.01907, 0.01357, 0.00910, 0.00569, \
0.00000 ");
}
ground_capacitance (capacitance_template_WxS) {
index_1 (" 0.1400, 0.2700, 0.2800, 0.5000, 0.5600, 0.9000, 1.5000 ");
index_2 (" 0.1400, 0.2100, 0.2700, 0.3150, 0.4725, 0.5000, 0.7088, 0.9000, \
1.0631, 1.5000, 1.5947, 2.3920, 3.5880, 5.3821, 538.2070 ");
values (" 0.00559, 0.00686, 0.00788, 0.00860, 0.01090, 0.01126, 0.01374, 0.01565, \
0.01709, 0.02033, 0.02094, 0.02512, 0.02928, 0.03276, 0.03846, 0.00788, \
0.00900, 0.00991, 0.01055, 0.01263, 0.01297, 0.01530, 0.01716, 0.01860, \
0.02190, 0.02254, 0.02695, 0.03140, 0.03518, 0.04158, 0.00804, 0.00915, \
0.01005, 0.01069, 0.01276, 0.01309, 0.01541, 0.01727, 0.01872, 0.02202, \
0.02265, 0.02708, 0.03155, 0.03535, 0.04180, 0.01115, 0.01211, 0.01290, \
0.01347, 0.01534, 0.01565, 0.01785, 0.01968, 0.02111, 0.02449, 0.02515, \
0.02981, 0.03460, 0.03876, 0.04615, 0.01191, 0.01284, 0.01360, 0.01416, \
0.01600, 0.01631, 0.01849, 0.02031, 0.02174, 0.02514, 0.02580, 0.03050, \
0.03537, 0.03961, 0.04722, 0.01584, 0.01669, 0.01739, 0.01791, 0.01965, \
0.01994, 0.02207, 0.02387, 0.02530, 0.02875, 0.02943, 0.03432, 0.03947, \
0.04408, 0.05282, 0.02228, 0.02307, 0.02373, 0.02422, 0.02589, 0.02618, \
0.02825, 0.03004, 0.03147, 0.03496, 0.03565, 0.04069, 0.04612, 0.05120, \
0.06151 ");
}
}
}
layer (metal5) {
resistance: 0.210000
capacitance () {
top_plane: metal6;
bottom_plane: metal4;
lateral_capacitance (capacitance_template_WxS) {
index_1 (" 0.1400, 0.2800, 0.5600 ");
index_2 (" 0.1400, 0.2100, 0.3150, 0.4725, 0.7088, 1.0631, 1.5947, 2.3920, \
3.5880, 5.3821, 538.2070 ");
values (" 0.05924, 0.03873, 0.02365, 0.01261, 0.00528, 0.00150, 0.00024, 0.00002, \
0.00000, 0.00000, 0.00000, 0.06027, 0.03941, 0.02405, 0.01282, 0.00536, \
0.00152, 0.00024, 0.00002, 0.00000, 0.00000, 0.00000, 0.06053, 0.03959, \
0.02415, 0.01287, 0.00538, 0.00153, 0.00024, 0.00002, 0.00000, 0.00000, \
0.00000 ");
}
ground_capacitance (capacitance_template_WxS) {
index_1 (" 0.1400, 0.2800, 0.5600 ");
index_2 (" 0.1400, 0.2100, 0.3150, 0.4725, 0.7088, 1.0631, 1.5947, 2.3920, \
3.5880, 5.3821, 538.2070 ");
values (" 0.04216, 0.05055, 0.06162, 0.07440, 0.08596, 0.09329, 0.09584, 0.09627, \
0.09628, 0.09637, 0.09636, 0.06296, 0.07160, 0.08293, 0.09594, 0.10770, \
0.11513, 0.11773, 0.11817, 0.11817, 0.11824, 0.11823, 0.10552, 0.11423, \
0.12562, 0.13870, 0.15050, 0.15797, 0.16057, 0.16102, 0.16102, 0.16108, \
0.16108 ");
}
}
capacitance () {
top_plane: metal6;
bottom_plane: metal3;
lateral_capacitance (capacitance_template_WxS) {
index_1 (" 0.1400, 0.2800, 0.5600 ");
index_2 (" 0.1400, 0.2100, 0.3150, 0.4725, 0.7088, 1.0631, 1.5947, 2.3920, \
3.5880, 5.3821, 538.2070 ");
values (" 0.06250, 0.04241, 0.02767, 0.01664, 0.00862, 0.00348, 0.00094, 0.00014, \
0.00001, 0.00000, 0.00000, 0.06473, 0.04410, 0.02886, 0.01740, 0.00904, \
0.00366, 0.00099, 0.00015, 0.00001, 0.00000, 0.00000, 0.06612, 0.04519, \
0.02965, 0.01792, 0.00933, 0.00378, 0.00102, 0.00015, 0.00001, 0.00000, \
0.00000 ");
}
ground_capacitance (capacitance_template_WxS) {
index_1 (" 0.1400, 0.2800, 0.5600 ");
index_2 (" 0.1400, 0.2100, 0.3150, 0.4725, 0.7088, 1.0631, 1.5947, 2.3920, \
3.5880, 5.3821, 538.2070 ");
values (" 0.03170, 0.03774, 0.04591, 0.05601, 0.06665, 0.07548, 0.08037, 0.08199, \
0.08225, 0.08228, 0.08228, 0.04586, 0.05210, 0.06055, 0.07101, 0.08208, \
0.09130, 0.09643, 0.09815, 0.09842, 0.09843, 0.09842, 0.07541, 0.08179, \
0.09042, 0.10112, 0.11248, 0.12197, 0.12727, 0.12905, 0.12934, 0.12933, \
0.12933 ");
}
}
capacitance () {
top_plane: metal6;
bottom_plane: metal2;
lateral_capacitance (capacitance_template_WxS) {
index_1 (" 0.1400, 0.2800, 0.5600 ");
index_2 (" 0.1400, 0.2100, 0.3150, 0.4725, 0.7088, 1.0631, 1.5947, 2.3920, \
3.5880, 5.3821, 538.2070 ");
values (" 0.06315, 0.04318, 0.02861, 0.01773, 0.00974, 0.00439, 0.00143, 0.00029, \
0.00003, 0.00000, 0.00000, 0.06573, 0.04522, 0.03013, 0.01878, 0.01039, \
0.00471, 0.00154, 0.00031, 0.00003, 0.00000, 0.00000, 0.06771, 0.04686, \
0.03139, 0.01968, 0.01095, 0.00499, 0.00164, 0.00033, 0.00003, 0.00000, \
0.00000 ");
}
ground_capacitance (capacitance_template_WxS) {
index_1 (" 0.1400, 0.2800, 0.5600 ");
index_2 (" 0.1400, 0.2100, 0.3150, 0.4725, 0.7088, 1.0631, 1.5947, 2.3920, \
3.5880, 5.3821, 538.2070 ");
values (" 0.02993, 0.03552, 0.04303, 0.05232, 0.06230, 0.07109, 0.07662, 0.07891, \
0.07944, 0.07950, 0.07950, 0.04289, 0.04860, 0.05632, 0.06594, 0.07637, \
0.08564, 0.09154, 0.09402, 0.09459, 0.09463, 0.09463, 0.06975, 0.07557, \
0.08346, 0.09334, 0.10416, 0.11386, 0.12010, 0.12274, 0.12335, 0.12338, \
0.12338 ");
}
}
capacitance () {
top_plane: metal6;
bottom_plane: metal1;
lateral_capacitance (capacitance_template_WxS) {
index_1 (" 0.1400, 0.2800, 0.5600 ");
index_2 (" 0.1400, 0.2100, 0.3150, 0.4725, 0.7088, 1.0631, 1.5947, 2.3920, \
3.5880, 5.3821, 538.2070 ");
values (" 0.06350, 0.04360, 0.02912, 0.01836, 0.01045, 0.00504, 0.00185, 0.00046, \
0.00006, 0.00000, 0.00000, 0.06627, 0.04584, 0.03085, 0.01961, 0.01126, \
0.00548, 0.00203, 0.00050, 0.00007, 0.00000, 0.00000, 0.06865, 0.04786, \
0.03247, 0.02083, 0.01207, 0.00593, 0.00222, 0.00055, 0.00007, 0.00000, \
0.00000 ");
}
ground_capacitance (capacitance_template_WxS) {
index_1 (" 0.1400, 0.2800, 0.5600 ");
index_2 (" 0.1400, 0.2100, 0.3150, 0.4725, 0.7088, 1.0631, 1.5947, 2.3920, \
3.5880, 5.3821, 538.2070 ");
values (" 0.02900, 0.03436, 0.04152, 0.05034, 0.05987, 0.06847, 0.07429, 0.07706, \
0.07786, 0.07798, 0.07799, 0.04136, 0.04679, 0.05410, 0.06319, 0.07314, \
0.08227, 0.08854, 0.09158, 0.09247, 0.09257, 0.09258, 0.06675, 0.07224, \
0.07968, 0.08902, 0.09938, 0.10903, 0.11578, 0.11909, 0.12007, 0.12018, \
0.12018 ");
}
}
capacitance () {
top_plane: metal6;
bottom_plane: SUBSTRATE;
lateral_capacitance (capacitance_template_WxS) {
index_1 (" 0.1400, 0.2800, 0.5600 ");
index_2 (" 0.1400, 0.2100, 0.3150, 0.4725, 0.7088, 1.0631, 1.5947, 2.3920, \
3.5880, 5.3821, 538.2070 ");
values (" 0.06383, 0.04398, 0.02958, 0.01894, 0.01112, 0.00572, 0.00238, 0.00073, \
0.00014, 0.00001, 0.00000, 0.06675, 0.04639, 0.03150, 0.02038, 0.01213, \
0.00632, 0.00267, 0.00082, 0.00015, 0.00001, 0.00000, 0.06953, 0.04881, \
0.03351, 0.02197, 0.01327, 0.00703, 0.00301, 0.00093, 0.00018, 0.00002, \
0.00000 ");
}
ground_capacitance (capacitance_template_WxS) {
index_1 (" 0.1400, 0.2800, 0.5600 ");
index_2 (" 0.1400, 0.2100, 0.3150, 0.4725, 0.7088, 1.0631, 1.5947, 2.3920, \
3.5880, 5.3821, 538.2070 ");
values (" 0.02815, 0.03335, 0.04023, 0.04863, 0.05769, 0.06600, 0.07194, 0.07516, \
0.07636, 0.07662, 0.07664, 0.04005, 0.04524, 0.05218, 0.06078, 0.07022, \
0.07906, 0.08553, 0.08913, 0.09048, 0.09074, 0.09077, 0.06414, 0.06933, \
0.07635, 0.08514, 0.09497, 0.10439, 0.11148, 0.11551, 0.11705, 0.11735, \
0.11738 ");
}
}
capacitance () {
top_plane: metal7;
bottom_plane: metal4;
lateral_capacitance (capacitance_template_WxS) {
index_1 (" 0.1400, 0.2800, 0.5600 ");
index_2 (" 0.1400, 0.2100, 0.3150, 0.4725, 0.7088, 1.0631, 1.5947, 2.3920, \
3.5880, 5.3821, 538.2070 ");
values (" 0.06297, 0.04297, 0.02835, 0.01743, 0.00941, 0.00411, 0.00126, 0.00023, \
0.00002, 0.00000, 0.00000, 0.06546, 0.04491, 0.02977, 0.01839, 0.00998, \
0.00438, 0.00135, 0.00025, 0.00002, 0.00000, 0.00000, 0.06726, 0.04638, \
0.03088, 0.01916, 0.01045, 0.00460, 0.00143, 0.00026, 0.00002, 0.00000, \
0.00000 ");
}
ground_capacitance (capacitance_template_WxS) {
index_1 (" 0.1400, 0.2800, 0.5600 ");
index_2 (" 0.1400, 0.2100, 0.3150, 0.4725, 0.7088, 1.0631, 1.5947, 2.3920, \
3.5880, 5.3821, 538.2070 ");
values (" 0.03040, 0.03611, 0.04380, 0.05332, 0.06351, 0.07234, 0.07770, 0.07978, \
0.08021, 0.08026, 0.08026, 0.04368, 0.04954, 0.05746, 0.06732, 0.07796, \
0.08725, 0.09294, 0.09518, 0.09564, 0.09566, 0.09565, 0.07128, 0.07726, \
0.08536, 0.09549, 0.10649, 0.11615, 0.12213, 0.12449, 0.12497, 0.12499, \
0.12498 ");
}
}
capacitance () {
top_plane: metal7;
bottom_plane: metal3;
lateral_capacitance (capacitance_template_WxS) {
index_1 (" 0.1400, 0.2800, 0.5600 ");
index_2 (" 0.1400, 0.2100, 0.3150, 0.4725, 0.7088, 1.0631, 1.5947, 2.3920, \
3.5880, 5.3821, 538.2070 ");
values (" 0.06645, 0.04684, 0.03257, 0.02177, 0.01337, 0.00703, 0.00281, 0.00074, \
0.00011, 0.00000, 0.00000, 0.07005, 0.04972, 0.03473, 0.02325, 0.01427, \
0.00750, 0.00300, 0.00079, 0.00011, 0.00001, 0.00000, 0.07290, 0.05203, \
0.03646, 0.02444, 0.01501, 0.00788, 0.00315, 0.00083, 0.00012, 0.00001, \
0.00000 ");
}
ground_capacitance (capacitance_template_WxS) {
index_1 (" 0.1400, 0.2800, 0.5600 ");
index_2 (" 0.1400, 0.2100, 0.3150, 0.4725, 0.7088, 1.0631, 1.5947, 2.3920, \
3.5880, 5.3821, 538.2070 ");
values (" 0.01946, 0.02286, 0.02759, 0.03398, 0.04197, 0.05063, 0.05779, 0.06180, \
0.06311, 0.06326, 0.06327, 0.02629, 0.02976, 0.03471, 0.04148, 0.04998, \
0.05919, 0.06683, 0.07111, 0.07251, 0.07264, 0.07265, 0.04106, 0.04471, \
0.04992, 0.05705, 0.06599, 0.07567, 0.08369, 0.08819, 0.08966, 0.08978, \
0.08979 ");
}
}
capacitance () {
top_plane: metal7;
bottom_plane: metal2;
lateral_capacitance (capacitance_template_WxS) {
index_1 (" 0.1400, 0.2800, 0.5600 ");
index_2 (" 0.1400, 0.2100, 0.3150, 0.4725, 0.7088, 1.0631, 1.5947, 2.3920, \
3.5880, 5.3821, 538.2070 ");
values (" 0.06720, 0.04771, 0.03361, 0.02298, 0.01468, 0.00825, 0.00367, 0.00114, \
0.00020, 0.00001, 0.00000, 0.07112, 0.05092, 0.03606, 0.02472, 0.01580, \
0.00887, 0.00395, 0.00122, 0.00022, 0.00002, 0.00000, 0.07453, 0.05374, \
0.03825, 0.02628, 0.01680, 0.00942, 0.00419, 0.00129, 0.00023, 0.00002, \
0.00000 ");
}
ground_capacitance (capacitance_template_WxS) {
index_1 (" 0.1400, 0.2800, 0.5600 ");
index_2 (" 0.1400, 0.2100, 0.3150, 0.4725, 0.7088, 1.0631, 1.5947, 2.3920, \
3.5880, 5.3821, 538.2070 ");
values (" 0.01744, 0.02041, 0.02448, 0.02999, 0.03704, 0.04509, 0.05244, 0.05720, \
0.05909, 0.05942, 0.05944, 0.02315, 0.02610, 0.03031, 0.03614, 0.04367, \
0.05230, 0.06019, 0.06531, 0.06734, 0.06766, 0.06769, 0.03532, 0.03841, \
0.04286, 0.04904, 0.05705, 0.06621, 0.07459, 0.08002, 0.08218, 0.08251, \
0.08255 ");
}
}
capacitance () {
top_plane: metal7;
bottom_plane: metal1;
lateral_capacitance (capacitance_template_WxS) {
index_1 (" 0.1400, 0.2800, 0.5600 ");
index_2 (" 0.1400, 0.2100, 0.3150, 0.4725, 0.7088, 1.0631, 1.5947, 2.3920, \
3.5880, 5.3821, 538.2070 ");
values (" 0.06764, 0.04821, 0.03420, 0.02369, 0.01551, 0.00910, 0.00436, 0.00152, \
0.00032, 0.00003, 0.00000, 0.07173, 0.05160, 0.03685, 0.02563, 0.01680, \
0.00985, 0.00472, 0.00164, 0.00035, 0.00003, 0.00000, 0.07552, 0.05479, \
0.03937, 0.02748, 0.01804, 0.01058, 0.00507, 0.00176, 0.00037, 0.00004, \
0.00000 ");
}
ground_capacitance (capacitance_template_WxS) {
index_1 (" 0.1400, 0.2800, 0.5600 ");
index_2 (" 0.1400, 0.2100, 0.3150, 0.4725, 0.7088, 1.0631, 1.5947, 2.3920, \
3.5880, 5.3821, 538.2070 ");
values (" 0.01630, 0.01906, 0.02280, 0.02780, 0.03423, 0.04176, 0.04904, 0.05422, \
0.05662, 0.05715, 0.05722, 0.02147, 0.02414, 0.02794, 0.03320, 0.04006, \
0.04816, 0.05601, 0.06163, 0.06421, 0.06477, 0.06484, 0.03222, 0.03498, \
0.03897, 0.04456, 0.05189, 0.06055, 0.06896, 0.07500, 0.07777, 0.07836, \
0.07844 ");
}
}
capacitance () {
top_plane: metal7;
bottom_plane: SUBSTRATE;
lateral_capacitance (capacitance_template_WxS) {
index_1 (" 0.1400, 0.2800, 0.5600 ");
index_2 (" 0.1400, 0.2100, 0.3150, 0.4725, 0.7088, 1.0631, 1.5947, 2.3920, \
3.5880, 5.3821, 538.2070 ");
values (" 0.06808, 0.04869, 0.03476, 0.02437, 0.01633, 0.01001, 0.00519, 0.00207, \
0.00054, 0.00008, 0.00000, 0.07229, 0.05223, 0.03758, 0.02649, 0.01781, \
0.01093, 0.00568, 0.00226, 0.00060, 0.00008, 0.00000, 0.07645, 0.05580, \
0.04048, 0.02870, 0.01936, 0.01191, 0.00621, 0.00248, 0.00065, 0.00009, \
0.00000 ");
}
ground_capacitance (capacitance_template_WxS) {
index_1 (" 0.1400, 0.2800, 0.5600 ");
index_2 (" 0.1400, 0.2100, 0.3150, 0.4725, 0.7088, 1.0631, 1.5947, 2.3920, \
3.5880, 5.3821, 538.2070 ");
values (" 0.01519, 0.01779, 0.02126, 0.02583, 0.03165, 0.03856, 0.04556, 0.05106, \
0.05404, 0.05494, 0.05509, 0.01997, 0.02240, 0.02583, 0.03056, 0.03674, \
0.04417, 0.05176, 0.05775, 0.06101, 0.06198, 0.06215, 0.02947, 0.03193, \
0.03549, 0.04047, 0.04707, 0.05507, 0.06328, 0.06981, 0.07338, 0.07443, \
0.07461 ");
}
}
capacitance () {
top_plane: metal8;
bottom_plane: metal4;
lateral_capacitance (capacitance_template_WxS) {
index_1 (" 0.1400, 0.2800, 0.5600 ");
index_2 (" 0.1400, 0.2100, 0.3150, 0.4725, 0.7088, 1.0631, 1.5947, 2.3920, \
3.5880, 5.3821, 538.2070 ");
values (" 0.06415, 0.04433, 0.02999, 0.01943, 0.01172, 0.00639, 0.00299, 0.00114, \
0.00031, 0.00005, 0.00000, 0.06716, 0.04686, 0.03205, 0.02105, 0.01291, \
0.00717, 0.00342, 0.00132, 0.00036, 0.00006, 0.00000, 0.07027, 0.04962, \
0.03443, 0.02301, 0.01442, 0.00820, 0.00401, 0.00158, 0.00044, 0.00007, \
0.00000 ");
}
ground_capacitance (capacitance_template_WxS) {
index_1 (" 0.1400, 0.2800, 0.5600 ");
index_2 (" 0.1400, 0.2100, 0.3150, 0.4725, 0.7088, 1.0631, 1.5947, 2.3920, \
3.5880, 5.3821, 538.2070 ");
values (" 0.02733, 0.03242, 0.03912, 0.04721, 0.05586, 0.06382, 0.06970, 0.07323, \
0.07488, 0.07542, 0.07552, 0.03896, 0.04396, 0.05062, 0.05881, 0.06775, \
0.07620, 0.08264, 0.08664, 0.08854, 0.08914, 0.08926, 0.06202, 0.06696, \
0.07359, 0.08188, 0.09114, 0.10015, 0.10730, 0.11191, 0.11418, 0.11490, \
0.11504 ");
}
}
capacitance () {
top_plane: metal8;
bottom_plane: metal3;
lateral_capacitance (capacitance_template_WxS) {
index_1 (" 0.1400, 0.2800, 0.5600 ");
index_2 (" 0.1400, 0.2100, 0.3150, 0.4725, 0.7088, 1.0631, 1.5947, 2.3920, \
3.5880, 5.3821, 538.2070 ");
values (" 0.06790, 0.04846, 0.03446, 0.02405, 0.01607, 0.00993, 0.00534, 0.00235, \
0.00075, 0.00015, 0.00000, 0.07197, 0.05188, 0.03722, 0.02616, 0.01759, \
0.01093, 0.00593, 0.00262, 0.00084, 0.00016, 0.00000, 0.07608, 0.05544, \
0.04018, 0.02852, 0.01935, 0.01215, 0.00666, 0.00297, 0.00096, 0.00019, \
0.00000 ");
}
ground_capacitance (capacitance_template_WxS) {
index_1 (" 0.1400, 0.2800, 0.5600 ");
index_2 (" 0.1400, 0.2100, 0.3150, 0.4725, 0.7088, 1.0631, 1.5947, 2.3920, \
3.5880, 5.3821, 538.2070 ");
values (" 0.01575, 0.01855, 0.02231, 0.02719, 0.03322, 0.04007, 0.04676, 0.05198, \
0.05506, 0.05622, 0.05653, 0.02109, 0.02371, 0.02738, 0.03234, 0.03865, \
0.04596, 0.05318, 0.05894, 0.06236, 0.06365, 0.06398, 0.03145, 0.03405, \
0.03776, 0.04287, 0.04949, 0.05728, 0.06513, 0.07151, 0.07537, 0.07684, \
0.07723 ");
}
}
capacitance () {
top_plane: metal8;
bottom_plane: metal2;
lateral_capacitance (capacitance_template_WxS) {
index_1 (" 0.1400, 0.2800, 0.5600 ");
index_2 (" 0.1400, 0.2100, 0.3150, 0.4725, 0.7088, 1.0631, 1.5947, 2.3920, \
3.5880, 5.3821, 538.2070 ");
values (" 0.06879, 0.04947, 0.03563, 0.02538, 0.01752, 0.01136, 0.00652, 0.00309, \
0.00108, 0.00024, 0.00000, 0.07316, 0.05318, 0.03866, 0.02775, 0.01926, \
0.01252, 0.00721, 0.00342, 0.00120, 0.00026, 0.00000, 0.07779, 0.05723, \
0.04205, 0.03044, 0.02127, 0.01390, 0.00805, 0.00385, 0.00136, 0.00030, \
0.00000 ");
}
ground_capacitance (capacitance_template_WxS) {
index_1 (" 0.1400, 0.2800, 0.5600 ");
index_2 (" 0.1400, 0.2100, 0.3150, 0.4725, 0.7088, 1.0631, 1.5947, 2.3920, \
3.5880, 5.3821, 538.2070 ");
values (" 0.01339, 0.01576, 0.01888, 0.02289, 0.02789, 0.03387, 0.04027, 0.04590, \
0.04967, 0.05130, 0.05178, 0.01767, 0.01978, 0.02273, 0.02673, 0.03196, \
0.03837, 0.04530, 0.05149, 0.05565, 0.05744, 0.05799, 0.02552, 0.02757, \
0.03052, 0.03466, 0.04020, 0.04710, 0.05466, 0.06150, 0.06615, 0.06817, \
0.06878 ");
}
}
capacitance () {
top_plane: metal8;
bottom_plane: metal1;
lateral_capacitance (capacitance_template_WxS) {
index_1 (" 0.1400, 0.2800, 0.5600 ");
index_2 (" 0.1400, 0.2100, 0.3150, 0.4725, 0.7088, 1.0631, 1.5947, 2.3920, \
3.5880, 5.3821, 538.2070 ");
values (" 0.06935, 0.05009, 0.03633, 0.02620, 0.01846, 0.01236, 0.00743, 0.00375, \
0.00142, 0.00034, 0.00000, 0.07386, 0.05396, 0.03954, 0.02874, 0.02036, \
0.01365, 0.00823, 0.00415, 0.00157, 0.00038, 0.00000, 0.07885, 0.05835, \
0.04324, 0.03171, 0.02260, 0.01520, 0.00919, 0.00464, 0.00177, 0.00043, \
0.00000 ");
}
ground_capacitance (capacitance_template_WxS) {
index_1 (" 0.1400, 0.2800, 0.5600 ");
index_2 (" 0.1400, 0.2100, 0.3150, 0.4725, 0.7088, 1.0631, 1.5947, 2.3920, \
3.5880, 5.3821, 538.2070 ");
values (" 0.01197, 0.01412, 0.01691, 0.02043, 0.02479, 0.03009, 0.03608, 0.04181, \
0.04606, 0.04812, 0.04883, 0.01575, 0.01759, 0.02013, 0.02357, 0.02808, \
0.03377, 0.04028, 0.04658, 0.05126, 0.05353, 0.05431, 0.02226, 0.02398, \
0.02648, 0.03000, 0.03480, 0.04097, 0.04811, 0.05509, 0.06030, 0.06284, \
0.06373 ");
}
}
capacitance () {
top_plane: metal8;
bottom_plane: SUBSTRATE;
lateral_capacitance (capacitance_template_WxS) {
index_1 (" 0.1400, 0.2800, 0.5600 ");
index_2 (" 0.1400, 0.2100, 0.3150, 0.4725, 0.7088, 1.0631, 1.5947, 2.3920, \
3.5880, 5.3821, 538.2070 ");
values (" 0.06993, 0.05073, 0.03705, 0.02702, 0.01943, 0.01346, 0.00853, 0.00465, \
0.00195, 0.00054, 0.00000, 0.07457, 0.05473, 0.04041, 0.02974, 0.02150, \
0.01491, 0.00946, 0.00514, 0.00216, 0.00060, 0.00000, 0.07989, 0.05946, \
0.04445, 0.03304, 0.02403, 0.01671, 0.01060, 0.00576, 0.00242, 0.00068, \
0.00000 ");
}
ground_capacitance (capacitance_template_WxS) {
index_1 (" 0.1400, 0.2800, 0.5600 ");
index_2 (" 0.1400, 0.2100, 0.3150, 0.4725, 0.7088, 1.0631, 1.5947, 2.3920, \
3.5880, 5.3821, 538.2070 ");
values (" 0.01051, 0.01246, 0.01497, 0.01808, 0.02183, 0.02638, 0.03175, 0.03735, \
0.04203, 0.04469, 0.04580, 0.01391, 0.01551, 0.01770, 0.02061, 0.02441, \
0.02927, 0.03511, 0.04128, 0.04644, 0.04937, 0.05060, 0.01927, 0.02070, \
0.02276, 0.02567, 0.02968, 0.03497, 0.04143, 0.04830, 0.05405, 0.05733, \
0.05871 ");
}
}
capacitance () {
top_plane: metal9;
bottom_plane: metal4;
lateral_capacitance (capacitance_template_WxS) {
index_1 (" 0.1400, 0.2800, 0.5600 ");
index_2 (" 0.1400, 0.2100, 0.3150, 0.4725, 0.7088, 1.0631, 1.5947, 2.3920, \
3.5880, 5.3821, 538.2070 ");
values (" 0.06441, 0.04461, 0.03029, 0.01976, 0.01211, 0.00684, 0.00345, 0.00154, \
0.00056, 0.00015, 0.00000, 0.06746, 0.04718, 0.03241, 0.02147, 0.01342, \
0.00775, 0.00402, 0.00182, 0.00068, 0.00019, 0.00000, 0.07073, 0.05013, \
0.03501, 0.02368, 0.01520, 0.00906, 0.00486, 0.00227, 0.00087, 0.00024, \
0.00000 ");
}
ground_capacitance (capacitance_template_WxS) {
index_1 (" 0.1400, 0.2800, 0.5600 ");
index_2 (" 0.1400, 0.2100, 0.3150, 0.4725, 0.7088, 1.0631, 1.5947, 2.3920, \
3.5880, 5.3821, 538.2070 ");
values (" 0.02666, 0.03169, 0.03830, 0.04627, 0.05472, 0.06245, 0.06820, 0.07178, \
0.07369, 0.07453, 0.07484, 0.03819, 0.04311, 0.04963, 0.05760, 0.06625, \
0.07439, 0.08067, 0.08476, 0.08700, 0.08797, 0.08835, 0.06076, 0.06554, \
0.07195, 0.07991, 0.08877, 0.09741, 0.10439, 0.10917, 0.11192, 0.11315, \
0.11364 ");
}
}
capacitance () {
top_plane: metal9;
bottom_plane: metal3;
lateral_capacitance (capacitance_template_WxS) {
index_1 (" 0.1400, 0.2800, 0.5600 ");
index_2 (" 0.1400, 0.2100, 0.3150, 0.4725, 0.7088, 1.0631, 1.5947, 2.3920, \
3.5880, 5.3821, 538.2070 ");
values (" 0.06826, 0.04884, 0.03486, 0.02448, 0.01657, 0.01053, 0.00602, 0.00299, \
0.00121, 0.00036, 0.00000, 0.07235, 0.05229, 0.03767, 0.02668, 0.01822, \
0.01168, 0.00676, 0.00340, 0.00139, 0.00042, 0.00000, 0.07662, 0.05603, \
0.04084, 0.02928, 0.02025, 0.01318, 0.00777, 0.00398, 0.00166, 0.00051, \
0.00000 ");
}
ground_capacitance (capacitance_template_WxS) {
index_1 (" 0.1400, 0.2800, 0.5600 ");
index_2 (" 0.1400, 0.2100, 0.3150, 0.4725, 0.7088, 1.0631, 1.5947, 2.3920, \
3.5880, 5.3821, 538.2070 ");
values (" 0.01486, 0.01759, 0.02126, 0.02601, 0.03179, 0.03826, 0.04457, 0.04967, \
0.05301, 0.05464, 0.05538, 0.02011, 0.02265, 0.02618, 0.03091, 0.03685, \
0.04368, 0.05046, 0.05609, 0.05983, 0.06168, 0.06254, 0.03002, 0.03247, \
0.03594, 0.04069, 0.04681, 0.05402, 0.06137, 0.06765, 0.07196, 0.07415, \
0.07518 ");
}
}
capacitance () {
top_plane: metal9;
bottom_plane: metal2;
lateral_capacitance (capacitance_template_WxS) {
index_1 (" 0.1400, 0.2800, 0.5600 ");
index_2 (" 0.1400, 0.2100, 0.3150, 0.4725, 0.7088, 1.0631, 1.5947, 2.3920, \
3.5880, 5.3821, 538.2070 ");
values (" 0.06920, 0.04990, 0.03608, 0.02587, 0.01808, 0.01203, 0.00729, 0.00386, \
0.00167, 0.00053, 0.00000, 0.07359, 0.05364, 0.03916, 0.02831, 0.01993, \
0.01333, 0.00814, 0.00434, 0.00189, 0.00060, 0.00000, 0.07837, 0.05786, \
0.04275, 0.03124, 0.02221, 0.01501, 0.00927, 0.00500, 0.00221, 0.00071, \
0.00000 ");
}
ground_capacitance (capacitance_template_WxS) {
index_1 (" 0.1400, 0.2800, 0.5600 ");
index_2 (" 0.1400, 0.2100, 0.3150, 0.4725, 0.7088, 1.0631, 1.5947, 2.3920, \
3.5880, 5.3821, 538.2070 ");
values (" 0.01238, 0.01466, 0.01769, 0.02157, 0.02633, 0.03189, 0.03781, 0.04318, \
0.04714, 0.04930, 0.05038, 0.01657, 0.01860, 0.02141, 0.02519, 0.03003, \
0.03591, 0.04229, 0.04819, 0.05259, 0.05501, 0.05624, 0.02400, 0.02589, \
0.02861, 0.03238, 0.03740, 0.04364, 0.05057, 0.05712, 0.06212, 0.06492, \
0.06638 ");
}
}
capacitance () {
top_plane: metal9;
bottom_plane: metal1;
lateral_capacitance (capacitance_template_WxS) {
index_1 (" 0.1400, 0.2800, 0.5600 ");
index_2 (" 0.1400, 0.2100, 0.3150, 0.4725, 0.7088, 1.0631, 1.5947, 2.3920, \
3.5880, 5.3821, 538.2070 ");
values (" 0.06979, 0.05057, 0.03684, 0.02674, 0.01907, 0.01308, 0.00828, 0.00462, \
0.00211, 0.00071, 0.00000, 0.07434, 0.05447, 0.04009, 0.02935, 0.02108, \
0.01452, 0.00923, 0.00516, 0.00237, 0.00081, 0.00000, 0.07946, 0.05901, \
0.04398, 0.03255, 0.02358, 0.01636, 0.01048, 0.00591, 0.00274, 0.00094, \
0.00000 ");
}
ground_capacitance (capacitance_template_WxS) {
index_1 (" 0.1400, 0.2800, 0.5600 ");
index_2 (" 0.1400, 0.2100, 0.3150, 0.4725, 0.7088, 1.0631, 1.5947, 2.3920, \
3.5880, 5.3821, 538.2070 ");
values (" 0.01086, 0.01290, 0.01559, 0.01898, 0.02310, 0.02797, 0.03341, 0.03877, \
0.04313, 0.04575, 0.04719, 0.01454, 0.01629, 0.01869, 0.02191, 0.02604, \
0.03117, 0.03704, 0.04293, 0.04776, 0.05067, 0.05231, 0.02064, 0.02222, \
0.02448, 0.02764, 0.03190, 0.03737, 0.04378, 0.05032, 0.05576, 0.05911, \
0.06101 ");
}
}
capacitance () {
top_plane: metal9;
bottom_plane: SUBSTRATE;
lateral_capacitance (capacitance_template_WxS) {
index_1 (" 0.1400, 0.2800, 0.5600 ");
index_2 (" 0.1400, 0.2100, 0.3150, 0.4725, 0.7088, 1.0631, 1.5947, 2.3920, \
3.5880, 5.3821, 538.2070 ");
values (" 0.07042, 0.05127, 0.03763, 0.02764, 0.02010, 0.01424, 0.00946, 0.00564, \
0.00279, 0.00103, 0.00000, 0.07511, 0.05531, 0.04102, 0.03041, 0.02228, \
0.01584, 0.01055, 0.00628, 0.00312, 0.00116, 0.00000, 0.08056, 0.06018, \
0.04524, 0.03393, 0.02508, 0.01793, 0.01199, 0.00717, 0.00357, 0.00134, \
0.00000 ");
}
ground_capacitance (capacitance_template_WxS) {
index_1 (" 0.1400, 0.2800, 0.5600 ");
index_2 (" 0.1400, 0.2100, 0.3150, 0.4725, 0.7088, 1.0631, 1.5947, 2.3920, \
3.5880, 5.3821, 538.2070 ");
values (" 0.00928, 0.01110, 0.01348, 0.01644, 0.01996, 0.02407, 0.02882, 0.03392, \
0.03858, 0.04178, 0.04385, 0.01254, 0.01405, 0.01609, 0.01879, 0.02221, \
0.02649, 0.03162, 0.03721, 0.04236, 0.04591, 0.04823, 0.01752, 0.01880, \
0.02063, 0.02318, 0.02665, 0.03121, 0.03683, 0.04306, 0.04885, 0.05289, \
0.05556 ");
}
}
capacitance () {
top_plane: AIR;
bottom_plane: metal4;
lateral_capacitance (capacitance_template_WxS) {
index_1 (" 0.1400, 0.2800, 0.5600 ");
index_2 (" 0.1400, 0.2100, 0.3150, 0.4725, 0.7088, 1.0631, 1.5947, 2.3920, \
3.5880, 5.3821, 538.2070 ");
values (" 0.06486, 0.04508, 0.03080, 0.02030, 0.01266, 0.00737, 0.00396, 0.00200, \
0.00096, 0.00045, 0.00000, 0.06795, 0.04770, 0.03297, 0.02208, 0.01406, \
0.00840, 0.00465, 0.00241, 0.00119, 0.00058, 0.00000, 0.07135, 0.05079, \
0.03571, 0.02445, 0.01604, 0.00995, 0.00576, 0.00313, 0.00162, 0.00081, \
0.00000 ");
}
ground_capacitance (capacitance_template_WxS) {
index_1 (" 0.1400, 0.2800, 0.5600 ");
index_2 (" 0.1400, 0.2100, 0.3150, 0.4725, 0.7088, 1.0631, 1.5947, 2.3920, \
3.5880, 5.3821, 538.2070 ");
values (" 0.02553, 0.03046, 0.03696, 0.04482, 0.05321, 0.06092, 0.06671, 0.07038, \
0.07241, 0.07343, 0.07434, 0.03693, 0.04175, 0.04815, 0.05598, 0.06449, \
0.07254, 0.07880, 0.08295, 0.08532, 0.08653, 0.08769, 0.05917, 0.06385, \
0.07009, 0.07783, 0.08644, 0.09486, 0.10171, 0.10650, 0.10942, 0.11098, \
0.11261 ");
}
}
capacitance () {
top_plane: AIR;
bottom_plane: metal3;
lateral_capacitance (capacitance_template_WxS) {
index_1 (" 0.1400, 0.2800, 0.5600 ");
index_2 (" 0.1400, 0.2100, 0.3150, 0.4725, 0.7088, 1.0631, 1.5947, 2.3920, \
3.5880, 5.3821, 538.2070 ");
values (" 0.06888, 0.04951, 0.03558, 0.02524, 0.01735, 0.01133, 0.00683, 0.00379, \
0.00195, 0.00095, 0.00000, 0.07303, 0.05301, 0.03843, 0.02749, 0.01908, \
0.01260, 0.00773, 0.00436, 0.00229, 0.00114, 0.00000, 0.07741, 0.05687, \
0.04173, 0.03024, 0.02131, 0.01435, 0.00903, 0.00527, 0.00286, 0.00148, \
0.00000 ");
}
ground_capacitance (capacitance_template_WxS) {
index_1 (" 0.1400, 0.2800, 0.5600 ");
index_2 (" 0.1400, 0.2100, 0.3150, 0.4725, 0.7088, 1.0631, 1.5947, 2.3920, \
3.5880, 5.3821, 538.2070 ");
values (" 0.01330, 0.01589, 0.01941, 0.02401, 0.02966, 0.03602, 0.04222, 0.04724, \
0.05064, 0.05251, 0.05441, 0.01841, 0.02083, 0.02422, 0.02878, 0.03451, \
0.04110, 0.04766, 0.05313, 0.05691, 0.05904, 0.06132, 0.02802, 0.03034, \
0.03364, 0.03814, 0.04393, 0.05071, 0.05765, 0.06365, 0.06797, 0.07052, \
0.07345 ");
}
}
capacitance () {
top_plane: AIR;
bottom_plane: metal2;
lateral_capacitance (capacitance_template_WxS) {
index_1 (" 0.1400, 0.2800, 0.5600 ");
index_2 (" 0.1400, 0.2100, 0.3150, 0.4725, 0.7088, 1.0631, 1.5947, 2.3920, \
3.5880, 5.3821, 538.2070 ");
values (" 0.06992, 0.05068, 0.03692, 0.02676, 0.01900, 0.01297, 0.00826, 0.00485, \
0.00260, 0.00131, 0.00000, 0.07438, 0.05448, 0.04005, 0.02925, 0.02093, \
0.01439, 0.00927, 0.00551, 0.00301, 0.00154, 0.00000, 0.07928, 0.05880, \
0.04375, 0.03232, 0.02339, 0.01631, 0.01070, 0.00651, 0.00367, 0.00194, \
0.00000 ");
}
ground_capacitance (capacitance_template_WxS) {
index_1 (" 0.1400, 0.2800, 0.5600 ");
index_2 (" 0.1400, 0.2100, 0.3150, 0.4725, 0.7088, 1.0631, 1.5947, 2.3920, \
3.5880, 5.3821, 538.2070 ");
values (" 0.01060, 0.01270, 0.01553, 0.01924, 0.02386, 0.02928, 0.03502, 0.04021, \
0.04413, 0.04651, 0.04910, 0.01461, 0.01650, 0.01915, 0.02274, 0.02737, \
0.03298, 0.03903, 0.04464, 0.04895, 0.05162, 0.05466, 0.02174, 0.02351, \
0.02604, 0.02956, 0.03422, 0.03999, 0.04637, 0.05246, 0.05729, 0.06040, \
0.06421 ");
}
}
capacitance () {
top_plane: AIR;
bottom_plane: metal1;
lateral_capacitance (capacitance_template_WxS) {
index_1 (" 0.1400, 0.2800, 0.5600 ");
index_2 (" 0.1400, 0.2100, 0.3150, 0.4725, 0.7088, 1.0631, 1.5947, 2.3920, \
3.5880, 5.3821, 538.2070 ");
values (" 0.07058, 0.05144, 0.03779, 0.02775, 0.02011, 0.01415, 0.00938, 0.00576, \
0.00323, 0.00168, 0.00000, 0.07524, 0.05541, 0.04109, 0.03041, 0.02219, \
0.01570, 0.01050, 0.00650, 0.00370, 0.00195, 0.00000, 0.08047, 0.06006, \
0.04509, 0.03374, 0.02487, 0.01779, 0.01206, 0.00761, 0.00444, 0.00241, \
0.00000 ");
}
ground_capacitance (capacitance_template_WxS) {
index_1 (" 0.1400, 0.2800, 0.5600 ");
index_2 (" 0.1400, 0.2100, 0.3150, 0.4725, 0.7088, 1.0631, 1.5947, 2.3920, \
3.5880, 5.3821, 538.2070 ");
values (" 0.00890, 0.01071, 0.01316, 0.01635, 0.02031, 0.02502, 0.03025, 0.03533, \
0.03954, 0.04232, 0.04561, 0.01233, 0.01393, 0.01616, 0.01917, 0.02308, \
0.02792, 0.03340, 0.03888, 0.04347, 0.04656, 0.05038, 0.01813, 0.01958, \
0.02166, 0.02455, 0.02845, 0.03342, 0.03919, 0.04510, 0.05019, 0.05374, \
0.05842 ");
}
}
capacitance () {
top_plane: AIR;
bottom_plane: SUBSTRATE;
lateral_capacitance (capacitance_template_WxS) {
index_1 (" 0.1400, 0.2800, 0.5600 ");
index_2 (" 0.1400, 0.2100, 0.3150, 0.4725, 0.7088, 1.0631, 1.5947, 2.3920, \
3.5880, 5.3821, 538.2070 ");
values (" 0.07131, 0.05226, 0.03873, 0.02882, 0.02134, 0.01551, 0.01077, 0.00701, \
0.00418, 0.00229, 0.00000, 0.07615, 0.05641, 0.04219, 0.03165, 0.02358, \
0.01721, 0.01202, 0.00786, 0.00473, 0.00262, 0.00000, 0.08173, 0.06139, \
0.04651, 0.03529, 0.02654, 0.01953, 0.01377, 0.00912, 0.00559, 0.00317, \
0.00000 ");
}
ground_capacitance (capacitance_template_WxS) {
index_1 (" 0.1400, 0.2800, 0.5600 ");
index_2 (" 0.1400, 0.2100, 0.3150, 0.4725, 0.7088, 1.0631, 1.5947, 2.3920, \
3.5880, 5.3821, 538.2070 ");
values (" 0.00709, 0.00861, 0.01067, 0.01336, 0.01667, 0.02062, 0.02512, 0.02983, \
0.03416, 0.03739, 0.04178, 0.00997, 0.01130, 0.01313, 0.01559, 0.01877, \
0.02275, 0.02744, 0.03248, 0.03717, 0.04073, 0.04575, 0.01462, 0.01576, \
0.01740, 0.01968, 0.02278, 0.02680, 0.03171, 0.03712, 0.04226, 0.04628, \
0.05230 ");
}
}
}
layer (metal4) {
resistance: 0.210000
capacitance () {
top_plane: metal5;
bottom_plane: metal3;
lateral_capacitance (capacitance_template_WxS) {
index_1 (" 0.1400, 0.2700, 0.2800, 0.5000, 0.5600, 0.9000 ");
index_2 (" 0.1400, 0.2100, 0.2700, 0.3150, 0.4725, 0.5000, 0.7088, 0.9000, \
1.0631, 1.5947, 2.3920, 3.5880, 5.3821, 538.2070 ");
values (" 0.05409, 0.03360, 0.02388, 0.01892, 0.00886, 0.00781, 0.00303, 0.00130, \
0.00064, 0.00007, 0.00000, 0.00000, 0.00000, 0.00000, 0.05460, 0.03393, \
0.02413, 0.01912, 0.00896, 0.00790, 0.00307, 0.00132, 0.00065, 0.00007, \
0.00000, 0.00000, 0.00000, 0.00000, 0.05462, 0.03395, 0.02414, 0.01913, \
0.00897, 0.00790, 0.00307, 0.00132, 0.00065, 0.00007, 0.00000, 0.00000, \
0.00000, 0.00000, 0.05477, 0.03404, 0.02421, 0.01918, 0.00899, 0.00792, \
0.00308, 0.00132, 0.00065, 0.00007, 0.00000, 0.00000, 0.00000, 0.00000, \
0.05475, 0.03404, 0.02420, 0.01918, 0.00899, 0.00792, 0.00308, 0.00132, \
0.00065, 0.00007, 0.00000, 0.00000, 0.00000, 0.00000, 0.05476, 0.03404, \
0.02421, 0.01918, 0.00899, 0.00792, 0.00308, 0.00132, 0.00065, 0.00007, \
0.00000, 0.00000, 0.00000, 0.00000 ");
}
ground_capacitance (capacitance_template_WxS) {
index_1 (" 0.1400, 0.2700, 0.2800, 0.5000, 0.5600, 0.9000 ");
index_2 (" 0.1400, 0.2100, 0.2700, 0.3150, 0.4725, 0.5000, 0.7088, 0.9000, \
1.0631, 1.5947, 2.3920, 3.5880, 5.3821, 538.2070 ");
values (" 0.06910, 0.08108, 0.08965, 0.09530, 0.10938, 0.11116, 0.11965, 0.12323, \
0.12476, 0.12589, 0.12597, 0.12592, 0.12624, 0.12623, 0.10271, 0.11483, \
0.12348, 0.12919, 0.14341, 0.14521, 0.15378, 0.15740, 0.15894, 0.16010, \
0.16017, 0.16013, 0.16043, 0.16042, 0.10531, 0.11743, 0.12609, 0.13180, \
0.14603, 0.14782, 0.15640, 0.16003, 0.16156, 0.16272, 0.16280, 0.16275, \
0.16305, 0.16304, 0.16260, 0.17476, 0.18344, 0.18916, 0.20343, 0.20523, \
0.21384, 0.21747, 0.21901, 0.22016, 0.22024, 0.22020, 0.22049, 0.22049, \
0.17822, 0.19038, 0.19905, 0.20478, 0.21904, 0.22084, 0.22945, 0.23308, \
0.23462, 0.23578, 0.23586, 0.23581, 0.23611, 0.23610, 0.26688, 0.27904, \
0.28772, 0.29345, 0.30771, 0.30951, 0.31812, 0.32175, 0.32329, 0.32445, \
0.32453, 0.32448, 0.32478, 0.32478 ");
}
}
capacitance () {
top_plane: metal5;
bottom_plane: metal2;
lateral_capacitance (capacitance_template_WxS) {
index_1 (" 0.1400, 0.2700, 0.2800, 0.5000, 0.5600, 0.9000 ");
index_2 (" 0.1400, 0.2100, 0.2700, 0.3150, 0.4725, 0.5000, 0.7088, 0.9000, \
1.0631, 1.5947, 2.3920, 3.5880, 5.3821, 538.2070 ");
values (" 0.06052, 0.04011, 0.03024, 0.02508, 0.01394, 0.01267, 0.00626, 0.00335, \
0.00198, 0.00037, 0.00003, 0.00000, 0.00000, 0.00000, 0.06185, 0.04103, \
0.03093, 0.02564, 0.01425, 0.01295, 0.00639, 0.00343, 0.00203, 0.00038, \
0.00003, 0.00000, 0.00000, 0.00000, 0.06191, 0.04107, 0.03096, 0.02567, \
0.01426, 0.01296, 0.00640, 0.00343, 0.00203, 0.00038, 0.00003, 0.00000, \
0.00000, 0.00000, 0.06239, 0.04139, 0.03121, 0.02587, 0.01437, 0.01306, \
0.00645, 0.00346, 0.00204, 0.00038, 0.00003, 0.00000, 0.00000, 0.00000, \
0.06239, 0.04140, 0.03121, 0.02587, 0.01437, 0.01306, 0.00645, 0.00346, \
0.00204, 0.00038, 0.00003, 0.00000, 0.00000, 0.00000, 0.06244, 0.04143, \
0.03124, 0.02589, 0.01438, 0.01307, 0.00646, 0.00346, 0.00205, 0.00038, \
0.00003, 0.00000, 0.00000, 0.00000 ");
}
ground_capacitance (capacitance_template_WxS) {
index_1 (" 0.1400, 0.2700, 0.2800, 0.5000, 0.5600, 0.9000 ");
index_2 (" 0.1400, 0.2100, 0.2700, 0.3150, 0.4725, 0.5000, 0.7088, 0.9000, \
1.0631, 1.5947, 2.3920, 3.5880, 5.3821, 538.2070 ");
values (" 0.03771, 0.04519, 0.05108, 0.05522, 0.06719, 0.06892, 0.07871, 0.08399, \
0.08671, 0.08995, 0.09063, 0.09067, 0.09071, 0.09071, 0.05448, 0.06222, \
0.06829, 0.07254, 0.08479, 0.08656, 0.09656, 0.10196, 0.10473, 0.10804, \
0.10874, 0.10879, 0.10880, 0.10880, 0.05580, 0.06354, 0.06962, 0.07387, \
0.08614, 0.08791, 0.09792, 0.10333, 0.10610, 0.10942, 0.11011, 0.11016, \
0.11017, 0.11017, 0.08513, 0.09297, 0.09912, 0.10340, 0.11578, 0.11755, \
0.12765, 0.13309, 0.13588, 0.13922, 0.13993, 0.13997, 0.13998, 0.13998, \
0.09317, 0.10102, 0.10716, 0.11145, 0.12383, 0.12561, 0.13570, 0.14115, \
0.14394, 0.14728, 0.14799, 0.14803, 0.14804, 0.14804, 0.13890, 0.14676, \
0.15291, 0.15720, 0.16959, 0.17137, 0.18147, 0.18692, 0.18971, 0.19306, \
0.19376, 0.19381, 0.19382, 0.19382 ");
}
}
capacitance () {
top_plane: metal5;
bottom_plane: metal1;
lateral_capacitance (capacitance_template_WxS) {
index_1 (" 0.1400, 0.2700, 0.2800, 0.5000, 0.5600, 0.9000 ");
index_2 (" 0.1400, 0.2100, 0.2700, 0.3150, 0.4725, 0.5000, 0.7088, 0.9000, \
1.0631, 1.5947, 2.3920, 3.5880, 5.3821, 538.2070 ");
values (" 0.06232, 0.04218, 0.03247, 0.02740, 0.01634, 0.01505, 0.00832, 0.00499, \
0.00327, 0.00084, 0.00012, 0.00001, 0.00000, 0.00000, 0.06435, 0.04370, \
0.03370, 0.02845, 0.01700, 0.01566, 0.00868, 0.00522, 0.00341, 0.00088, \
0.00012, 0.00001, 0.00000, 0.00000, 0.06446, 0.04378, 0.03376, 0.02851, \
0.01703, 0.01569, 0.00870, 0.00523, 0.00342, 0.00088, 0.00012, 0.00001, \
0.00000, 0.00000, 0.06561, 0.04467, 0.03449, 0.02913, 0.01743, 0.01606, \
0.00892, 0.00536, 0.00351, 0.00091, 0.00013, 0.00001, 0.00000, 0.00000, \
0.06572, 0.04475, 0.03456, 0.02920, 0.01748, 0.01611, 0.00894, 0.00537, \
0.00352, 0.00091, 0.00013, 0.00001, 0.00000, 0.00000, 0.06604, 0.04500, \
0.03477, 0.02938, 0.01759, 0.01621, 0.00900, 0.00541, 0.00354, 0.00092, \
0.00013, 0.00001, 0.00000, 0.00000 ");
}
ground_capacitance (capacitance_template_WxS) {
index_1 (" 0.1400, 0.2700, 0.2800, 0.5000, 0.5600, 0.9000 ");
index_2 (" 0.1400, 0.2100, 0.2700, 0.3150, 0.4725, 0.5000, 0.7088, 0.9000, \
1.0631, 1.5947, 2.3920, 3.5880, 5.3821, 538.2070 ");
values (" 0.03225, 0.03842, 0.04331, 0.04678, 0.05709, 0.05863, 0.06788, 0.07348, \
0.07668, 0.08137, 0.08284, 0.08306, 0.08308, 0.08308, 0.04570, 0.05209, \
0.05715, 0.06072, 0.07139, 0.07298, 0.08257, 0.08838, 0.09170, 0.09661, \
0.09815, 0.09838, 0.09838, 0.09838, 0.04676, 0.05316, 0.05822, 0.06181, \
0.07249, 0.07408, 0.08369, 0.08951, 0.09284, 0.09775, 0.09931, 0.09954, \
0.09953, 0.09953, 0.07052, 0.07704, 0.08220, 0.08585, 0.09674, 0.09837, \
0.10818, 0.11413, 0.11754, 0.12258, 0.12417, 0.12441, 0.12439, 0.12439, \
0.07708, 0.08361, 0.08878, 0.09244, 0.10335, 0.10498, 0.11482, 0.12078, \
0.12420, 0.12926, 0.13086, 0.13109, 0.13108, 0.13108, 0.11459, 0.12116, \
0.12636, 0.13004, 0.14101, 0.14265, 0.15254, 0.15854, 0.16199, 0.16708, \
0.16869, 0.16893, 0.16891, 0.16891 ");
}
}
capacitance () {
top_plane: metal5;
bottom_plane: poly;
lateral_capacitance (capacitance_template_WxS) {
index_1 (" 0.1400, 0.2700, 0.2800, 0.5000, 0.5600, 0.9000 ");
index_2 (" 0.1400, 0.2100, 0.2700, 0.3150, 0.4725, 0.5000, 0.7088, 0.9000, \
1.0631, 1.5947, 2.3920, 3.5880, 5.3821, 538.2070 ");
values (" 0.06297, 0.04295, 0.03334, 0.02832, 0.01740, 0.01613, 0.00939, 0.00595, \
0.00409, 0.00126, 0.00023, 0.00002, 0.00000, 0.00000, 0.06532, 0.04479, \
0.03487, 0.02967, 0.01831, 0.01698, 0.00993, 0.00631, 0.00434, 0.00134, \
0.00025, 0.00002, 0.00000, 0.00000, 0.06545, 0.04489, 0.03495, 0.02974, \
0.01836, 0.01702, 0.00996, 0.00633, 0.00436, 0.00134, 0.00025, 0.00002, \
0.00000, 0.00000, 0.06705, 0.04618, 0.03605, 0.03072, 0.01903, 0.01766, \
0.01036, 0.00660, 0.00455, 0.00141, 0.00026, 0.00002, 0.00000, 0.00000, \
0.06725, 0.04635, 0.03620, 0.03085, 0.01913, 0.01775, 0.01042, 0.00664, \
0.00458, 0.00142, 0.00026, 0.00002, 0.00000, 0.00000, 0.06791, 0.04689, \
0.03666, 0.03127, 0.01942, 0.01802, 0.01060, 0.00676, 0.00466, 0.00144, \
0.00026, 0.00002, 0.00000, 0.00000 ");
}
ground_capacitance (capacitance_template_WxS) {
index_1 (" 0.1400, 0.2700, 0.2800, 0.5000, 0.5600, 0.9000 ");
index_2 (" 0.1400, 0.2100, 0.2700, 0.3150, 0.4725, 0.5000, 0.7088, 0.9000, \
1.0631, 1.5947, 2.3920, 3.5880, 5.3821, 538.2070 ");
values (" 0.03045, 0.03616, 0.04067, 0.04386, 0.05339, 0.05482, 0.06359, 0.06911, \
0.07241, 0.07776, 0.07983, 0.08026, 0.08030, 0.08030, 0.04277, 0.04863, \
0.05327, 0.05655, 0.06641, 0.06790, 0.07703, 0.08281, 0.08629, 0.09196, \
0.09417, 0.09463, 0.09465, 0.09464, 0.04374, 0.04961, 0.05425, 0.05754, \
0.06741, 0.06890, 0.07806, 0.08385, 0.08735, 0.09303, 0.09525, 0.09571, \
0.09572, 0.09572, 0.06540, 0.07137, 0.07611, 0.07947, 0.08957, 0.09110, \
0.10053, 0.10653, 0.11015, 0.11607, 0.11840, 0.11888, 0.11889, 0.11888, \
0.07139, 0.07737, 0.08212, 0.08549, 0.09563, 0.09716, 0.10663, 0.11266, \
0.11630, 0.12226, 0.12460, 0.12509, 0.12509, 0.12509, 0.10574, 0.11177, \
0.11657, 0.11996, 0.13021, 0.13176, 0.14135, 0.14746, 0.15116, 0.15722, \
0.15961, 0.16011, 0.16011, 0.16011 ");
}
}
capacitance () {
top_plane: metal5;
bottom_plane: SUBSTRATE;
lateral_capacitance (capacitance_template_WxS) {
index_1 (" 0.1400, 0.2700, 0.2800, 0.5000, 0.5600, 0.9000 ");
index_2 (" 0.1400, 0.2100, 0.2700, 0.3150, 0.4725, 0.5000, 0.7088, 0.9000, \
1.0631, 1.5947, 2.3920, 3.5880, 5.3821, 538.2070 ");
values (" 0.06334, 0.04339, 0.03384, 0.02887, 0.01805, 0.01679, 0.01010, 0.00663, \
0.00471, 0.00163, 0.00036, 0.00004, 0.00000, 0.00000, 0.06588, 0.04542, \
0.03557, 0.03041, 0.01914, 0.01782, 0.01079, 0.00711, 0.00507, 0.00177, \
0.00039, 0.00005, 0.00000, 0.00000, 0.06602, 0.04554, 0.03566, 0.03049, \
0.01920, 0.01788, 0.01083, 0.00714, 0.00509, 0.00178, 0.00040, 0.00005, \
0.00000, 0.00000, 0.06794, 0.04713, 0.03705, 0.03175, 0.02012, 0.01874, \
0.01142, 0.00755, 0.00540, 0.00189, 0.00042, 0.00005, 0.00000, 0.00000, \
0.06822, 0.04738, 0.03726, 0.03194, 0.02026, 0.01888, 0.01151, 0.00762, \
0.00545, 0.00191, 0.00043, 0.00005, 0.00000, 0.00000, 0.06919, 0.04821, \
0.03800, 0.03261, 0.02075, 0.01935, 0.01183, 0.00785, 0.00562, 0.00198, \
0.00044, 0.00005, 0.00000, 0.00000 ");
}
ground_capacitance (capacitance_template_WxS) {
index_1 (" 0.1400, 0.2700, 0.2800, 0.5000, 0.5600, 0.9000 ");
index_2 (" 0.1400, 0.2100, 0.2700, 0.3150, 0.4725, 0.5000, 0.7088, 0.9000, \
1.0631, 1.5947, 2.3920, 3.5880, 5.3821, 538.2070 ");
values (" 0.02945, 0.03492, 0.03922, 0.04225, 0.05129, 0.05266, 0.06104, 0.06644, \
0.06975, 0.07543, 0.07797, 0.07863, 0.07871, 0.07871, 0.04118, 0.04674, \
0.05113, 0.05423, 0.06356, 0.06497, 0.07373, 0.07940, 0.08291, 0.08900, \
0.09174, 0.09246, 0.09252, 0.09252, 0.04209, 0.04766, 0.05205, 0.05516, \
0.06451, 0.06592, 0.07470, 0.08038, 0.08391, 0.09002, 0.09278, 0.09349, \
0.09355, 0.09355, 0.06254, 0.06818, 0.07265, 0.07582, 0.08539, 0.08685, \
0.09593, 0.10186, 0.10555, 0.11201, 0.11495, 0.11572, 0.11577, 0.11577, \
0.06818, 0.07383, 0.07832, 0.08149, 0.09110, 0.09256, 0.10170, 0.10767, \
0.11139, 0.11790, 0.12087, 0.12165, 0.12171, 0.12171, 0.10059, 0.10630, \
0.11083, 0.11404, 0.12378, 0.12527, 0.13457, 0.14068, 0.14449, 0.15119, \
0.15426, 0.15507, 0.15512, 0.15513 ");
}
}
capacitance () {
top_plane: metal6;
bottom_plane: metal3;
lateral_capacitance (capacitance_template_WxS) {
index_1 (" 0.1400, 0.2700, 0.2800, 0.5000, 0.5600, 0.9000 ");
index_2 (" 0.1400, 0.2100, 0.2700, 0.3150, 0.4725, 0.5000, 0.7088, 0.9000, \
1.0631, 1.5947, 2.3920, 3.5880, 5.3821, 538.2070 ");
values (" 0.05760, 0.03766, 0.02825, 0.02343, 0.01331, 0.01218, 0.00649, 0.00383, \
0.00250, 0.00065, 0.00010, 0.00001, 0.00000, 0.00000, 0.05951, 0.03922, \
0.02958, 0.02462, 0.01413, 0.01294, 0.00697, 0.00414, 0.00270, 0.00071, \
0.00011, 0.00001, 0.00000, 0.00000, 0.05963, 0.03931, 0.02966, 0.02468, \
0.01417, 0.01299, 0.00699, 0.00416, 0.00271, 0.00072, 0.00011, 0.00001, \
0.00000, 0.00000, 0.06113, 0.04056, 0.03073, 0.02564, 0.01483, 0.01361, \
0.00738, 0.00440, 0.00288, 0.00076, 0.00011, 0.00001, 0.00000, 0.00000, \
0.06134, 0.04073, 0.03088, 0.02578, 0.01493, 0.01370, 0.00744, 0.00444, \
0.00291, 0.00077, 0.00011, 0.00001, 0.00000, 0.00000, 0.06201, 0.04129, \
0.03136, 0.02621, 0.01523, 0.01398, 0.00761, 0.00455, 0.00298, 0.00079, \
0.00012, 0.00001, 0.00000, 0.00000 ");
}
ground_capacitance (capacitance_template_WxS) {
index_1 (" 0.1400, 0.2700, 0.2800, 0.5000, 0.5600, 0.9000 ");
index_2 (" 0.1400, 0.2100, 0.2700, 0.3150, 0.4725, 0.5000, 0.7088, 0.9000, \
1.0631, 1.5947, 2.3920, 3.5880, 5.3821, 538.2070 ");
values (" 0.05752, 0.06681, 0.07342, 0.07784, 0.08944, 0.09104, 0.09973, 0.10457, \
0.10723, 0.11081, 0.11192, 0.11206, 0.11235, 0.11234, 0.08406, 0.09340, \
0.10009, 0.10459, 0.11650, 0.11816, 0.12726, 0.13238, 0.13521, 0.13908, \
0.14029, 0.14046, 0.14072, 0.14071, 0.08611, 0.09546, 0.10215, 0.10665, \
0.11859, 0.12024, 0.12937, 0.13450, 0.13735, 0.14124, 0.14245, 0.14262, \
0.14288, 0.14287, 0.13152, 0.14095, 0.14773, 0.15230, 0.16451, 0.16621, \
0.17567, 0.18104, 0.18402, 0.18814, 0.18945, 0.18963, 0.18988, 0.18987, \
0.14396, 0.15341, 0.16020, 0.16478, 0.17704, 0.17874, 0.18825, 0.19365, \
0.19666, 0.20082, 0.20213, 0.20232, 0.20257, 0.20257, 0.21499, 0.22449, \
0.23133, 0.23595, 0.24833, 0.25007, 0.25972, 0.26523, 0.26830, 0.27256, \
0.27391, 0.27410, 0.27436, 0.27435 ");
}
}
capacitance () {
top_plane: metal6;
bottom_plane: metal2;
lateral_capacitance (capacitance_template_WxS) {
index_1 (" 0.1400, 0.2700, 0.2800, 0.5000, 0.5600, 0.9000 ");
index_2 (" 0.1400, 0.2100, 0.2700, 0.3150, 0.4725, 0.5000, 0.7088, 0.9000, \
1.0631, 1.5947, 2.3920, 3.5880, 5.3821, 538.2070 ");
values (" 0.06431, 0.04440, 0.03484, 0.02984, 0.01886, 0.01756, 0.01060, 0.00693, \
0.00489, 0.00162, 0.00033, 0.00003, 0.00000, 0.00000, 0.06698, 0.04648, \
0.03656, 0.03135, 0.01987, 0.01851, 0.01120, 0.00733, 0.00517, 0.00172, \
0.00035, 0.00003, 0.00000, 0.00000, 0.06713, 0.04659, 0.03665, 0.03143, \
0.01992, 0.01856, 0.01124, 0.00736, 0.00519, 0.00172, 0.00035, 0.00003, \
0.00000, 0.00000, 0.06891, 0.04802, 0.03785, 0.03249, 0.02065, 0.01924, \
0.01167, 0.00765, 0.00540, 0.00180, 0.00036, 0.00004, 0.00000, 0.00000, \
0.06913, 0.04820, 0.03801, 0.03263, 0.02075, 0.01933, 0.01173, 0.00769, \
0.00543, 0.00181, 0.00037, 0.00004, 0.00000, 0.00000, 0.06981, 0.04876, \
0.03849, 0.03306, 0.02104, 0.01961, 0.01191, 0.00781, 0.00552, 0.00184, \
0.00037, 0.00004, 0.00000, 0.00000 ");
}
ground_capacitance (capacitance_template_WxS) {
index_1 (" 0.1400, 0.2700, 0.2800, 0.5000, 0.5600, 0.9000 ");
index_2 (" 0.1400, 0.2100, 0.2700, 0.3150, 0.4725, 0.5000, 0.7088, 0.9000, \
1.0631, 1.5947, 2.3920, 3.5880, 5.3821, 538.2070 ");
values (" 0.02584, 0.03064, 0.03449, 0.03725, 0.04578, 0.04710, 0.05546, 0.06102, \
0.06449, 0.07051, 0.07310, 0.07371, 0.07373, 0.07373, 0.03568, 0.04063, \
0.04463, 0.04749, 0.05637, 0.05775, 0.06650, 0.07233, 0.07598, 0.08235, \
0.08510, 0.08574, 0.08575, 0.08575, 0.03645, 0.04142, 0.04542, 0.04830, \
0.05719, 0.05857, 0.06734, 0.07318, 0.07685, 0.08323, 0.08599, 0.08664, \
0.08664, 0.08664, 0.05402, 0.05912, 0.06323, 0.06618, 0.07532, 0.07674, \
0.08579, 0.09184, 0.09563, 0.10227, 0.10515, 0.10582, 0.10582, 0.10582, \
0.05891, 0.06402, 0.06815, 0.07111, 0.08029, 0.08171, 0.09081, 0.09688, \
0.10069, 0.10736, 0.11026, 0.11094, 0.11093, 0.11093, 0.08706, 0.09222, \
0.09640, 0.09939, 0.10867, 0.11012, 0.11932, 0.12547, 0.12934, 0.13612, \
0.13906, 0.13976, 0.13975, 0.13975 ");
}
}
capacitance () {
top_plane: metal6;
bottom_plane: metal1;
lateral_capacitance (capacitance_template_WxS) {
index_1 (" 0.1400, 0.2700, 0.2800, 0.5000, 0.5600, 0.9000 ");
index_2 (" 0.1400, 0.2100, 0.2700, 0.3150, 0.4725, 0.5000, 0.7088, 0.9000, \
1.0631, 1.5947, 2.3920, 3.5880, 5.3821, 538.2070 ");
values (" 0.06624, 0.04659, 0.03719, 0.03228, 0.02144, 0.02014, 0.01303, 0.00907, \
0.00674, 0.00263, 0.00067, 0.00009, 0.00000, 0.00000, 0.06957, 0.04924, \
0.03942, 0.03425, 0.02278, 0.02140, 0.01385, 0.00963, 0.00716, 0.00279, \
0.00071, 0.00010, 0.00000, 0.00000, 0.06976, 0.04939, 0.03954, 0.03436, \
0.02285, 0.02147, 0.01389, 0.00967, 0.00718, 0.00280, 0.00071, 0.00010, \
0.00000, 0.00000, 0.07218, 0.05133, 0.04118, 0.03581, 0.02384, 0.02240, \
0.01449, 0.01008, 0.00749, 0.00292, 0.00074, 0.00010, 0.00000, 0.00000, \
0.07249, 0.05159, 0.04140, 0.03600, 0.02398, 0.02253, 0.01458, 0.01014, \
0.00753, 0.00294, 0.00075, 0.00010, 0.00000, 0.00000, 0.07342, 0.05234, \
0.04204, 0.03657, 0.02437, 0.02290, 0.01481, 0.01030, 0.00765, 0.00299, \
0.00076, 0.00010, 0.00000, 0.00000 ");
}
ground_capacitance (capacitance_template_WxS) {
index_1 (" 0.1400, 0.2700, 0.2800, 0.5000, 0.5600, 0.9000 ");
index_2 (" 0.1400, 0.2100, 0.2700, 0.3150, 0.4725, 0.5000, 0.7088, 0.9000, \
1.0631, 1.5947, 2.3920, 3.5880, 5.3821, 538.2070 ");
values (" 0.02006, 0.02359, 0.02644, 0.02851, 0.03514, 0.03621, 0.04336, 0.04858, \
0.05212, 0.05919, 0.06301, 0.06421, 0.06432, 0.06433, 0.02670, 0.03031, \
0.03329, 0.03546, 0.04245, 0.04358, 0.05116, 0.05668, 0.06044, 0.06794, \
0.07200, 0.07327, 0.07337, 0.07338, 0.02723, 0.03085, 0.03383, 0.03600, \
0.04302, 0.04415, 0.05175, 0.05730, 0.06107, 0.06859, 0.07267, 0.07394, \
0.07404, 0.07404, 0.03933, 0.04309, 0.04621, 0.04848, 0.05580, 0.05698, \
0.06491, 0.07069, 0.07461, 0.08246, 0.08671, 0.08804, 0.08813, 0.08814, \
0.04275, 0.04654, 0.04968, 0.05196, 0.05933, 0.06052, 0.06850, 0.07431, \
0.07825, 0.08614, 0.09042, 0.09176, 0.09185, 0.09186, 0.06273, 0.06660, \
0.06979, 0.07212, 0.07962, 0.08083, 0.08894, 0.09485, 0.09885, 0.10687, \
0.11122, 0.11257, 0.11266, 0.11267 ");
}
}
capacitance () {
top_plane: metal6;
bottom_plane: poly;
lateral_capacitance (capacitance_template_WxS) {
index_1 (" 0.1400, 0.2700, 0.2800, 0.5000, 0.5600, 0.9000 ");
index_2 (" 0.1400, 0.2100, 0.2700, 0.3150, 0.4725, 0.5000, 0.7088, 0.9000, \
1.0631, 1.5947, 2.3920, 3.5880, 5.3821, 538.2070 ");
values (" 0.06699, 0.04744, 0.03814, 0.03329, 0.02261, 0.02133, 0.01427, 0.01026, \
0.00785, 0.00338, 0.00099, 0.00016, 0.00001, 0.00000, 0.07061, 0.05039, \
0.04065, 0.03553, 0.02418, 0.02281, 0.01526, 0.01097, 0.00839, 0.00361, \
0.00105, 0.00017, 0.00001, 0.00000, 0.07082, 0.05056, 0.04079, 0.03566, \
0.02427, 0.02289, 0.01532, 0.01101, 0.00842, 0.00362, 0.00106, 0.00017, \
0.00001, 0.00000, 0.07366, 0.05288, 0.04278, 0.03743, 0.02551, 0.02407, \
0.01610, 0.01157, 0.00884, 0.00380, 0.00111, 0.00018, 0.00001, 0.00000, \
0.07406, 0.05322, 0.04307, 0.03769, 0.02570, 0.02425, 0.01622, 0.01165, \
0.00890, 0.00383, 0.00112, 0.00018, 0.00001, 0.00000, 0.07530, 0.05424, \
0.04395, 0.03848, 0.02625, 0.02476, 0.01656, 0.01189, 0.00909, 0.00391, \
0.00114, 0.00019, 0.00001, 0.00000 ");
}
ground_capacitance (capacitance_template_WxS) {
index_1 (" 0.1400, 0.2700, 0.2800, 0.5000, 0.5600, 0.9000 ");
index_2 (" 0.1400, 0.2100, 0.2700, 0.3150, 0.4725, 0.5000, 0.7088, 0.9000, \
1.0631, 1.5947, 2.3920, 3.5880, 5.3821, 538.2070 ");
values (" 0.01804, 0.02113, 0.02360, 0.02539, 0.03116, 0.03210, 0.03850, 0.04335, \
0.04677, 0.05410, 0.05863, 0.06031, 0.06056, 0.06058, 0.02362, 0.02671, \
0.02927, 0.03113, 0.03723, 0.03822, 0.04504, 0.05020, 0.05385, 0.06167, \
0.06651, 0.06831, 0.06855, 0.06858, 0.02406, 0.02716, 0.02972, 0.03159, \
0.03770, 0.03870, 0.04554, 0.05072, 0.05438, 0.06223, 0.06709, 0.06890, \
0.06914, 0.06916, 0.03412, 0.03735, 0.04003, 0.04199, 0.04842, 0.04947, \
0.05667, 0.06212, 0.06595, 0.07419, 0.07930, 0.08119, 0.08144, 0.08146, \
0.03699, 0.04024, 0.04294, 0.04492, 0.05140, 0.05245, 0.05971, 0.06520, \
0.06907, 0.07736, 0.08250, 0.08441, 0.08466, 0.08468, 0.05385, 0.05718, \
0.05996, 0.06199, 0.06863, 0.06971, 0.07714, 0.08275, 0.08669, 0.09516, \
0.10041, 0.10236, 0.10260, 0.10263 ");
}
}
capacitance () {
top_plane: metal6;
bottom_plane: SUBSTRATE;
lateral_capacitance (capacitance_template_WxS) {
index_1 (" 0.1400, 0.2700, 0.2800, 0.5000, 0.5600, 0.9000 ");
index_2 (" 0.1400, 0.2100, 0.2700, 0.3150, 0.4725, 0.5000, 0.7088, 0.9000, \
1.0631, 1.5947, 2.3920, 3.5880, 5.3821, 538.2070 ");
values (" 0.06744, 0.04796, 0.03871, 0.03390, 0.02334, 0.02207, 0.01510, 0.01111, \
0.00867, 0.00401, 0.00131, 0.00025, 0.00002, 0.00000, 0.07123, 0.05108, \
0.04140, 0.03632, 0.02508, 0.02373, 0.01624, 0.01194, 0.00932, 0.00430, \
0.00141, 0.00027, 0.00002, 0.00000, 0.07145, 0.05126, 0.04156, 0.03646, \
0.02518, 0.02382, 0.01630, 0.01199, 0.00935, 0.00432, 0.00141, 0.00027, \
0.00002, 0.00000, 0.07459, 0.05388, 0.04382, 0.03850, 0.02665, 0.02522, \
0.01726, 0.01269, 0.00990, 0.00457, 0.00149, 0.00029, 0.00002, 0.00000, \
0.07506, 0.05428, 0.04417, 0.03882, 0.02688, 0.02544, 0.01742, 0.01280, \
0.00999, 0.00461, 0.00151, 0.00029, 0.00003, 0.00000, 0.07660, 0.05558, \
0.04530, 0.03984, 0.02762, 0.02614, 0.01790, 0.01315, 0.01026, 0.00474, \
0.00155, 0.00030, 0.00003, 0.00000 ");
}
ground_capacitance (capacitance_template_WxS) {
index_1 (" 0.1400, 0.2700, 0.2800, 0.5000, 0.5600, 0.9000 ");
index_2 (" 0.1400, 0.2100, 0.2700, 0.3150, 0.4725, 0.5000, 0.7088, 0.9000, \
1.0631, 1.5947, 2.3920, 3.5880, 5.3821, 538.2070 ");
values (" 0.01687, 0.01972, 0.02198, 0.02361, 0.02886, 0.02971, 0.03559, 0.04013, \
0.04338, 0.05072, 0.05571, 0.05784, 0.05825, 0.05830, 0.02189, 0.02469, \
0.02700, 0.02868, 0.03419, 0.03510, 0.04136, 0.04620, 0.04970, 0.05756, \
0.06293, 0.06521, 0.06564, 0.06568, 0.02228, 0.02508, 0.02739, 0.02908, \
0.03461, 0.03552, 0.04181, 0.04667, 0.05018, 0.05807, 0.06345, 0.06575, \
0.06618, 0.06622, 0.03117, 0.03407, 0.03648, 0.03825, 0.04408, 0.04504, \
0.05168, 0.05682, 0.06053, 0.06887, 0.07457, 0.07700, 0.07744, 0.07749, \
0.03370, 0.03663, 0.03906, 0.04084, 0.04672, 0.04768, 0.05439, 0.05958, \
0.06332, 0.07174, 0.07748, 0.07994, 0.08038, 0.08043, 0.04867, 0.05167, \
0.05418, 0.05602, 0.06208, 0.06307, 0.06997, 0.07531, 0.07915, 0.08779, \
0.09369, 0.09621, 0.09666, 0.09672 ");
}
}
capacitance () {
top_plane: metal7;
bottom_plane: metal3;
lateral_capacitance (capacitance_template_WxS) {
index_1 (" 0.1400, 0.2700, 0.2800, 0.5000, 0.5600, 0.9000 ");
index_2 (" 0.1400, 0.2100, 0.2700, 0.3150, 0.4725, 0.5000, 0.7088, 0.9000, \
1.0631, 1.5947, 2.3920, 3.5880, 5.3821, 538.2070 ");
values (" 0.05824, 0.03844, 0.02914, 0.02439, 0.01446, 0.01335, 0.00772, 0.00498, \
0.00353, 0.00127, 0.00031, 0.00004, 0.00000, 0.00000, 0.06052, 0.04039, \
0.03086, 0.02597, 0.01566, 0.01449, 0.00851, 0.00556, 0.00397, 0.00144, \
0.00036, 0.00005, 0.00000, 0.00000, 0.06067, 0.04051, 0.03097, 0.02607, \
0.01573, 0.01456, 0.00856, 0.00559, 0.00399, 0.00145, 0.00036, 0.00005, \
0.00000, 0.00000, 0.06283, 0.04239, 0.03266, 0.02763, 0.01694, 0.01571, \
0.00938, 0.00619, 0.00445, 0.00164, 0.00041, 0.00006, 0.00000, 0.00000, \
0.06320, 0.04273, 0.03296, 0.02792, 0.01716, 0.01593, 0.00954, 0.00631, \
0.00454, 0.00168, 0.00042, 0.00006, 0.00000, 0.00000, 0.06463, 0.04400, \
0.03411, 0.02899, 0.01799, 0.01672, 0.01011, 0.00673, 0.00486, 0.00182, \
0.00046, 0.00006, 0.00000, 0.00000 ");
}
ground_capacitance (capacitance_template_WxS) {
index_1 (" 0.1400, 0.2700, 0.2800, 0.5000, 0.5600, 0.9000 ");
index_2 (" 0.1400, 0.2100, 0.2700, 0.3150, 0.4725, 0.5000, 0.7088, 0.9000, \
1.0631, 1.5947, 2.3920, 3.5880, 5.3821, 538.2070 ");
values (" 0.05577, 0.06461, 0.07083, 0.07497, 0.08577, 0.08725, 0.09545, 0.10021, \
0.10296, 0.10724, 0.10911, 0.10963, 0.10998, 0.10998, 0.08117, 0.08996, \
0.09618, 0.10035, 0.11137, 0.11291, 0.12152, 0.12660, 0.12959, 0.13434, \
0.13648, 0.13709, 0.13743, 0.13743, 0.08313, 0.09191, 0.09813, 0.10231, \
0.11335, 0.11489, 0.12352, 0.12862, 0.13163, 0.13641, 0.13857, 0.13918, \
0.13951, 0.13951, 0.12618, 0.13497, 0.14123, 0.14545, 0.15673, 0.15832, \
0.16736, 0.17280, 0.17605, 0.18133, 0.18376, 0.18446, 0.18480, 0.18480, \
0.13795, 0.14674, 0.15301, 0.15724, 0.16857, 0.17017, 0.17928, 0.18479, \
0.18808, 0.19345, 0.19594, 0.19666, 0.19700, 0.19700, 0.20507, 0.21390, \
0.22022, 0.22449, 0.23602, 0.23765, 0.24705, 0.25279, 0.25625, 0.26197, \
0.26466, 0.26544, 0.26579, 0.26579 ");
}
}
capacitance () {
top_plane: metal7;
bottom_plane: metal2;
lateral_capacitance (capacitance_template_WxS) {
index_1 (" 0.1400, 0.2700, 0.2800, 0.5000, 0.5600, 0.9000 ");
index_2 (" 0.1400, 0.2100, 0.2700, 0.3150, 0.4725, 0.5000, 0.7088, 0.9000, \
1.0631, 1.5947, 2.3920, 3.5880, 5.3821, 538.2070 ");
values (" 0.06507, 0.04528, 0.03583, 0.03092, 0.02018, 0.01891, 0.01210, 0.00843, \
0.00632, 0.00262, 0.00077, 0.00013, 0.00001, 0.00000, 0.06808, 0.04774, \
0.03794, 0.03281, 0.02156, 0.02023, 0.01303, 0.00912, 0.00686, 0.00287, \
0.00085, 0.00015, 0.00001, 0.00000, 0.06826, 0.04788, 0.03806, 0.03292, \
0.02164, 0.02031, 0.01309, 0.00917, 0.00689, 0.00288, 0.00085, 0.00015, \
0.00001, 0.00000, 0.07068, 0.04993, 0.03987, 0.03457, 0.02290, 0.02150, \
0.01396, 0.00982, 0.00741, 0.00312, 0.00093, 0.00016, 0.00001, 0.00000, \
0.07106, 0.05026, 0.04017, 0.03485, 0.02312, 0.02172, 0.01411, 0.00994, \
0.00750, 0.00317, 0.00094, 0.00016, 0.00001, 0.00000, 0.07248, 0.05151, \
0.04129, 0.03589, 0.02393, 0.02249, 0.01469, 0.01037, 0.00785, 0.00333, \
0.00099, 0.00017, 0.00001, 0.00000 ");
}
ground_capacitance (capacitance_template_WxS) {
index_1 (" 0.1400, 0.2700, 0.2800, 0.5000, 0.5600, 0.9000 ");
index_2 (" 0.1400, 0.2100, 0.2700, 0.3150, 0.4725, 0.5000, 0.7088, 0.9000, \
1.0631, 1.5947, 2.3920, 3.5880, 5.3821, 538.2070 ");
values (" 0.02385, 0.02821, 0.03166, 0.03412, 0.04166, 0.04283, 0.05030, 0.05543, \
0.05877, 0.06522, 0.06880, 0.07010, 0.07032, 0.07034, 0.03260, 0.03698, \
0.04050, 0.04301, 0.05080, 0.05201, 0.05983, 0.06523, 0.06879, 0.07572, \
0.07964, 0.08107, 0.08128, 0.08130, 0.03328, 0.03767, 0.04119, 0.04371, \
0.05150, 0.05272, 0.06055, 0.06597, 0.06955, 0.07651, 0.08044, 0.08188, \
0.08210, 0.08212, 0.04853, 0.05297, 0.05655, 0.05912, 0.06711, 0.06836, \
0.07650, 0.08218, 0.08594, 0.09337, 0.09763, 0.09919, 0.09942, 0.09944, \
0.05275, 0.05720, 0.06079, 0.06336, 0.07139, 0.07265, 0.08084, 0.08657, \
0.09036, 0.09788, 0.10219, 0.10378, 0.10401, 0.10403, 0.07705, 0.08154, \
0.08517, 0.08778, 0.09595, 0.09723, 0.10561, 0.11151, 0.11544, 0.12326, \
0.12779, 0.12947, 0.12971, 0.12974 ");
}
}
capacitance () {
top_plane: metal7;
bottom_plane: metal1;
lateral_capacitance (capacitance_template_WxS) {
index_1 (" 0.1400, 0.2700, 0.2800, 0.5000, 0.5600, 0.9000 ");
index_2 (" 0.1400, 0.2100, 0.2700, 0.3150, 0.4725, 0.5000, 0.7088, 0.9000, \
1.0631, 1.5947, 2.3920, 3.5880, 5.3821, 538.2070 ");
values (" 0.06709, 0.04755, 0.03826, 0.03344, 0.02284, 0.02158, 0.01466, 0.01074, \
0.00838, 0.00391, 0.00133, 0.00028, 0.00003, 0.00000, 0.07074, 0.05056, \
0.04086, 0.03578, 0.02455, 0.02321, 0.01580, 0.01160, 0.00905, 0.00423, \
0.00144, 0.00030, 0.00003, 0.00000, 0.07095, 0.05074, 0.04101, 0.03591, \
0.02465, 0.02330, 0.01587, 0.01165, 0.00909, 0.00425, 0.00145, 0.00030, \
0.00003, 0.00000, 0.07400, 0.05329, 0.04324, 0.03794, 0.02616, 0.02474, \
0.01690, 0.01242, 0.00971, 0.00456, 0.00156, 0.00033, 0.00003, 0.00000, \
0.07446, 0.05370, 0.04360, 0.03827, 0.02641, 0.02498, 0.01707, 0.01256, \
0.00982, 0.00461, 0.00158, 0.00033, 0.00003, 0.00000, 0.07611, 0.05512, \
0.04487, 0.03943, 0.02730, 0.02583, 0.01769, 0.01303, 0.01020, 0.00480, \
0.00164, 0.00035, 0.00003, 0.00000 ");
}
ground_capacitance (capacitance_template_WxS) {
index_1 (" 0.1400, 0.2700, 0.2800, 0.5000, 0.5600, 0.9000 ");
index_2 (" 0.1400, 0.2100, 0.2700, 0.3150, 0.4725, 0.5000, 0.7088, 0.9000, \
1.0631, 1.5947, 2.3920, 3.5880, 5.3821, 538.2070 ");
values (" 0.01787, 0.02097, 0.02343, 0.02519, 0.03081, 0.03171, 0.03783, 0.04243, \
0.04568, 0.05281, 0.05759, 0.05971, 0.06016, 0.06022, 0.02348, 0.02652, \
0.02902, 0.03083, 0.03668, 0.03763, 0.04411, 0.04900, 0.05247, 0.06013, \
0.06531, 0.06760, 0.06807, 0.06813, 0.02391, 0.02696, 0.02945, 0.03127, \
0.03714, 0.03809, 0.04459, 0.04950, 0.05299, 0.06067, 0.06588, 0.06818, \
0.06865, 0.06871, 0.03373, 0.03685, 0.03943, 0.04131, 0.04742, 0.04842, \
0.05523, 0.06041, 0.06409, 0.07226, 0.07782, 0.08030, 0.08080, 0.08086, \
0.03650, 0.03963, 0.04222, 0.04411, 0.05027, 0.05127, 0.05815, 0.06337, \
0.06709, 0.07533, 0.08096, 0.08347, 0.08398, 0.08404, 0.05267, 0.05586, \
0.05851, 0.06045, 0.06676, 0.06779, 0.07486, 0.08024, 0.08407, 0.09261, \
0.09846, 0.10108, 0.10161, 0.10168 ");
}
}
capacitance () {
top_plane: metal7;
bottom_plane: poly;
lateral_capacitance (capacitance_template_WxS) {
index_1 (" 0.1400, 0.2700, 0.2800, 0.5000, 0.5600, 0.9000 ");
index_2 (" 0.1400, 0.2100, 0.2700, 0.3150, 0.4725, 0.5000, 0.7088, 0.9000, \
1.0631, 1.5947, 2.3920, 3.5880, 5.3821, 538.2070 ");
values (" 0.06789, 0.04847, 0.03927, 0.03450, 0.02406, 0.02282, 0.01596, 0.01203, \
0.00960, 0.00481, 0.00180, 0.00043, 0.00005, 0.00000, 0.07182, 0.05175, \
0.04213, 0.03710, 0.02599, 0.02466, 0.01728, 0.01302, 0.01039, 0.00521, \
0.00195, 0.00047, 0.00006, 0.00000, 0.07206, 0.05195, 0.04230, 0.03726, \
0.02611, 0.02477, 0.01736, 0.01308, 0.01044, 0.00524, 0.00196, 0.00047, \
0.00006, 0.00000, 0.07551, 0.05487, 0.04487, 0.03960, 0.02786, 0.02644, \
0.01856, 0.01399, 0.01117, 0.00561, 0.00210, 0.00050, 0.00006, 0.00000, \
0.07607, 0.05535, 0.04530, 0.03999, 0.02816, 0.02673, 0.01877, 0.01415, \
0.01130, 0.00568, 0.00213, 0.00051, 0.00006, 0.00000, 0.07801, 0.05703, \
0.04679, 0.04136, 0.02920, 0.02772, 0.01949, 0.01470, 0.01175, 0.00591, \
0.00222, 0.00053, 0.00006, 0.00000 ");
}
ground_capacitance (capacitance_template_WxS) {
index_1 (" 0.1400, 0.2700, 0.2800, 0.5000, 0.5600, 0.9000 ");
index_2 (" 0.1400, 0.2100, 0.2700, 0.3150, 0.4725, 0.5000, 0.7088, 0.9000, \
1.0631, 1.5947, 2.3920, 3.5880, 5.3821, 538.2070 ");
values (" 0.01570, 0.01836, 0.02045, 0.02194, 0.02670, 0.02747, 0.03278, 0.03693, \
0.03997, 0.04712, 0.05250, 0.05522, 0.05593, 0.05603, 0.02029, 0.02282, \
0.02489, 0.02640, 0.03135, 0.03216, 0.03781, 0.04224, 0.04551, 0.05321, \
0.05903, 0.06197, 0.06273, 0.06284, 0.02063, 0.02316, 0.02524, 0.02675, \
0.03171, 0.03253, 0.03819, 0.04265, 0.04593, 0.05366, 0.05951, 0.06247, \
0.06322, 0.06334, 0.02845, 0.03103, 0.03318, 0.03475, 0.03995, 0.04081, \
0.04681, 0.05155, 0.05503, 0.06327, 0.06954, 0.07271, 0.07351, 0.07363, \
0.03067, 0.03326, 0.03542, 0.03701, 0.04226, 0.04312, 0.04919, 0.05397, \
0.05750, 0.06583, 0.07216, 0.07536, 0.07618, 0.07630, 0.04375, 0.04642, \
0.04865, 0.05028, 0.05570, 0.05660, 0.06288, 0.06784, 0.07149, 0.08013, \
0.08671, 0.09005, 0.09089, 0.09102 ");
}
}
capacitance () {
top_plane: metal7;
bottom_plane: SUBSTRATE;
lateral_capacitance (capacitance_template_WxS) {
index_1 (" 0.1400, 0.2700, 0.2800, 0.5000, 0.5600, 0.9000 ");
index_2 (" 0.1400, 0.2100, 0.2700, 0.3150, 0.4725, 0.5000, 0.7088, 0.9000, \
1.0631, 1.5947, 2.3920, 3.5880, 5.3821, 538.2070 ");
values (" 0.06839, 0.04903, 0.03989, 0.03516, 0.02484, 0.02361, 0.01684, 0.01293, \
0.01050, 0.00555, 0.00225, 0.00060, 0.00008, 0.00000, 0.07248, 0.05249, \
0.04292, 0.03793, 0.02693, 0.02561, 0.01830, 0.01405, 0.01140, 0.00603, \
0.00244, 0.00065, 0.00009, 0.00000, 0.07273, 0.05269, 0.04311, 0.03810, \
0.02706, 0.02574, 0.01839, 0.01412, 0.01145, 0.00606, 0.00245, 0.00065, \
0.00009, 0.00000, 0.07647, 0.05589, 0.04594, 0.04069, 0.02903, 0.02762, \
0.01976, 0.01517, 0.01231, 0.00651, 0.00263, 0.00070, 0.00010, 0.00000, \
0.07709, 0.05644, 0.04643, 0.04114, 0.02937, 0.02795, 0.02001, 0.01536, \
0.01246, 0.00659, 0.00267, 0.00071, 0.00010, 0.00000, 0.07933, 0.05838, \
0.04816, 0.04274, 0.03059, 0.02911, 0.02086, 0.01602, 0.01299, 0.00687, \
0.00278, 0.00074, 0.00010, 0.00000 ");
}
ground_capacitance (capacitance_template_WxS) {
index_1 (" 0.1400, 0.2700, 0.2800, 0.5000, 0.5600, 0.9000 ");
index_2 (" 0.1400, 0.2100, 0.2700, 0.3150, 0.4725, 0.5000, 0.7088, 0.9000, \
1.0631, 1.5947, 2.3920, 3.5880, 5.3821, 538.2070 ");
values (" 0.01440, 0.01683, 0.01872, 0.02005, 0.02429, 0.02497, 0.02973, 0.03352, \
0.03634, 0.04332, 0.04903, 0.05224, 0.05323, 0.05340, 0.01846, 0.02070, \
0.02253, 0.02386, 0.02822, 0.02894, 0.03400, 0.03805, 0.04111, 0.04864, \
0.05484, 0.05832, 0.05937, 0.05956, 0.01876, 0.02100, 0.02283, 0.02416, \
0.02853, 0.02925, 0.03433, 0.03840, 0.04147, 0.04903, 0.05526, 0.05876, \
0.05982, 0.06001, 0.02544, 0.02769, 0.02957, 0.03095, 0.03554, 0.03630, \
0.04171, 0.04607, 0.04935, 0.05745, 0.06413, 0.06789, 0.06902, 0.06922, \
0.02733, 0.02959, 0.03148, 0.03287, 0.03751, 0.03828, 0.04375, 0.04816, \
0.05148, 0.05968, 0.06645, 0.07025, 0.07139, 0.07160, 0.03854, 0.04088, \
0.04283, 0.04428, 0.04910, 0.04991, 0.05561, 0.06021, 0.06367, 0.07221, \
0.07925, 0.08322, 0.08441, 0.08462 ");
}
}
capacitance () {
top_plane: metal8;
bottom_plane: metal3;
lateral_capacitance (capacitance_template_WxS) {
index_1 (" 0.1400, 0.2700, 0.2800, 0.5000, 0.5600, 0.9000 ");
index_2 (" 0.1400, 0.2100, 0.2700, 0.3150, 0.4725, 0.5000, 0.7088, 0.9000, \
1.0631, 1.5947, 2.3920, 3.5880, 5.3821, 538.2070 ");
values (" 0.05873, 0.03898, 0.02973, 0.02503, 0.01523, 0.01414, 0.00860, 0.00590, \
0.00444, 0.00203, 0.00079, 0.00024, 0.00004, 0.00000, 0.06117, 0.04112, \
0.03168, 0.02685, 0.01670, 0.01556, 0.00970, 0.00677, 0.00515, 0.00242, \
0.00096, 0.00029, 0.00006, 0.00000, 0.06133, 0.04126, 0.03181, 0.02697, \
0.01680, 0.01565, 0.00977, 0.00683, 0.00520, 0.00245, 0.00097, 0.00030, \
0.00006, 0.00000, 0.06394, 0.04362, 0.03399, 0.02903, 0.01852, 0.01732, \
0.01109, 0.00789, 0.00610, 0.00296, 0.00121, 0.00037, 0.00007, 0.00000, \
0.06445, 0.04410, 0.03444, 0.02946, 0.01888, 0.01768, 0.01138, 0.00813, \
0.00630, 0.00308, 0.00126, 0.00039, 0.00007, 0.00000, 0.06670, 0.04618, \
0.03640, 0.03133, 0.02049, 0.01924, 0.01265, 0.00919, 0.00720, 0.00362, \
0.00152, 0.00048, 0.00009, 0.00000 ");
}
ground_capacitance (capacitance_template_WxS) {
index_1 (" 0.1400, 0.2700, 0.2800, 0.5000, 0.5600, 0.9000 ");
index_2 (" 0.1400, 0.2100, 0.2700, 0.3150, 0.4725, 0.5000, 0.7088, 0.9000, \
1.0631, 1.5947, 2.3920, 3.5880, 5.3821, 538.2070 ");
values (" 0.05450, 0.06316, 0.06920, 0.07320, 0.08352, 0.08494, 0.09271, 0.09725, \
0.09993, 0.10434, 0.10673, 0.10781, 0.10847, 0.10855, 0.07943, 0.08791, \
0.09386, 0.09783, 0.10823, 0.10968, 0.11776, 0.12260, 0.12552, 0.13049, \
0.13330, 0.13462, 0.13534, 0.13545, 0.08134, 0.08980, 0.09575, 0.09972, \
0.11013, 0.11158, 0.11968, 0.12454, 0.12748, 0.13248, 0.13532, 0.13666, \
0.13738, 0.13749, 0.12301, 0.13137, 0.13728, 0.14124, 0.15176, 0.15325, \
0.16169, 0.16689, 0.17008, 0.17576, 0.17913, 0.18078, 0.18162, 0.18176, \
0.13434, 0.14268, 0.14858, 0.15254, 0.16309, 0.16457, 0.17309, 0.17836, \
0.18161, 0.18742, 0.19092, 0.19264, 0.19351, 0.19366, 0.19864, 0.20694, \
0.21284, 0.21681, 0.22748, 0.22900, 0.23781, 0.24337, 0.24686, 0.25330, \
0.25735, 0.25941, 0.26041, 0.26060 ");
}
}
capacitance () {
top_plane: metal8;
bottom_plane: metal2;
lateral_capacitance (capacitance_template_WxS) {
index_1 (" 0.1400, 0.2700, 0.2800, 0.5000, 0.5600, 0.9000 ");
index_2 (" 0.1400, 0.2100, 0.2700, 0.3150, 0.4725, 0.5000, 0.7088, 0.9000, \
1.0631, 1.5947, 2.3920, 3.5880, 5.3821, 538.2070 ");
values (" 0.06569, 0.04596, 0.03656, 0.03169, 0.02111, 0.01987, 0.01324, 0.00967, \
0.00760, 0.00382, 0.00162, 0.00053, 0.00011, 0.00000, 0.06885, 0.04860, \
0.03888, 0.03382, 0.02278, 0.02148, 0.01448, 0.01068, 0.00844, 0.00432, \
0.00185, 0.00061, 0.00013, 0.00000, 0.06903, 0.04875, 0.03903, 0.03395, \
0.02288, 0.02158, 0.01456, 0.01074, 0.00849, 0.00435, 0.00187, 0.00061, \
0.00013, 0.00000, 0.07191, 0.05128, 0.04132, 0.03610, 0.02466, 0.02330, \
0.01594, 0.01189, 0.00948, 0.00496, 0.00216, 0.00072, 0.00015, 0.00000, \
0.07242, 0.05176, 0.04177, 0.03653, 0.02502, 0.02365, 0.01623, 0.01213, \
0.00969, 0.00509, 0.00223, 0.00075, 0.00016, 0.00000, 0.07465, 0.05381, \
0.04369, 0.03836, 0.02659, 0.02519, 0.01751, 0.01321, 0.01063, 0.00569, \
0.00254, 0.00086, 0.00018, 0.00000 ");
}
ground_capacitance (capacitance_template_WxS) {
index_1 (" 0.1400, 0.2700, 0.2800, 0.5000, 0.5600, 0.9000 ");
index_2 (" 0.1400, 0.2100, 0.2700, 0.3150, 0.4725, 0.5000, 0.7088, 0.9000, \
1.0631, 1.5947, 2.3920, 3.5880, 5.3821, 538.2070 ");
values (" 0.02227, 0.02644, 0.02971, 0.03202, 0.03899, 0.04006, 0.04685, 0.05150, \
0.05457, 0.06079, 0.06488, 0.06703, 0.06783, 0.06806, 0.03059, 0.03466, \
0.03789, 0.04019, 0.04723, 0.04832, 0.05532, 0.06019, 0.06345, 0.07018, \
0.07473, 0.07718, 0.07809, 0.07835, 0.03123, 0.03529, 0.03852, 0.04082, \
0.04786, 0.04895, 0.05596, 0.06084, 0.06412, 0.07088, 0.07546, 0.07793, \
0.07885, 0.07911, 0.04512, 0.04912, 0.05232, 0.05461, 0.06170, 0.06280, \
0.07001, 0.07511, 0.07857, 0.08589, 0.09102, 0.09386, 0.09493, 0.09524, \
0.04890, 0.05288, 0.05608, 0.05837, 0.06546, 0.06657, 0.07382, 0.07896, \
0.08246, 0.08989, 0.09514, 0.09806, 0.09917, 0.09950, 0.07039, 0.07435, \
0.07754, 0.07982, 0.08697, 0.08810, 0.09550, 0.10083, 0.10450, 0.11243, \
0.11819, 0.12150, 0.12278, 0.12316 ");
}
}
capacitance () {
top_plane: metal8;
bottom_plane: metal1;
lateral_capacitance (capacitance_template_WxS) {
index_1 (" 0.1400, 0.2700, 0.2800, 0.5000, 0.5600, 0.9000 ");
index_2 (" 0.1400, 0.2100, 0.2700, 0.3150, 0.4725, 0.5000, 0.7088, 0.9000, \
1.0631, 1.5947, 2.3920, 3.5880, 5.3821, 538.2070 ");
values (" 0.06782, 0.04834, 0.03911, 0.03432, 0.02389, 0.02266, 0.01593, 0.01216, \
0.00987, 0.00540, 0.00248, 0.00087, 0.00020, 0.00000, 0.07160, 0.05151, \
0.04190, 0.03688, 0.02587, 0.02456, 0.01739, 0.01333, 0.01086, 0.00600, \
0.00278, 0.00099, 0.00023, 0.00000, 0.07183, 0.05171, 0.04207, 0.03704, \
0.02599, 0.02468, 0.01748, 0.01341, 0.01092, 0.00604, 0.00280, 0.00100, \
0.00023, 0.00000, 0.07530, 0.05472, 0.04478, 0.03955, 0.02802, 0.02663, \
0.01902, 0.01468, 0.01202, 0.00673, 0.00316, 0.00113, 0.00027, 0.00000, \
0.07591, 0.05527, 0.04528, 0.04003, 0.02841, 0.02702, 0.01933, 0.01494, \
0.01224, 0.00688, 0.00324, 0.00117, 0.00027, 0.00000, 0.07836, 0.05749, \
0.04734, 0.04198, 0.03005, 0.02861, 0.02065, 0.01606, 0.01322, 0.00752, \
0.00358, 0.00130, 0.00031, 0.00000 ");
}
ground_capacitance (capacitance_template_WxS) {
index_1 (" 0.1400, 0.2700, 0.2800, 0.5000, 0.5600, 0.9000 ");
index_2 (" 0.1400, 0.2100, 0.2700, 0.3150, 0.4725, 0.5000, 0.7088, 0.9000, \
1.0631, 1.5947, 2.3920, 3.5880, 5.3821, 538.2070 ");
values (" 0.01602, 0.01892, 0.02120, 0.02282, 0.02787, 0.02866, 0.03401, 0.03801, \
0.04085, 0.04738, 0.05246, 0.05554, 0.05682, 0.05724, 0.02125, 0.02398, \
0.02619, 0.02778, 0.03286, 0.03368, 0.03922, 0.04343, 0.04646, 0.05348, \
0.05905, 0.06248, 0.06392, 0.06439, 0.02163, 0.02436, 0.02657, 0.02816, \
0.03325, 0.03407, 0.03962, 0.04384, 0.04688, 0.05394, 0.05954, 0.06299, \
0.06444, 0.06491, 0.03014, 0.03282, 0.03501, 0.03661, 0.04177, 0.04261, \
0.04837, 0.05279, 0.05600, 0.06356, 0.06970, 0.07356, 0.07521, 0.07575, \
0.03247, 0.03514, 0.03734, 0.03893, 0.04411, 0.04495, 0.05075, 0.05521, \
0.05845, 0.06611, 0.07236, 0.07632, 0.07800, 0.07857, 0.04586, 0.04852, \
0.05073, 0.05233, 0.05757, 0.05843, 0.06436, 0.06897, 0.07235, 0.08044, \
0.08717, 0.09152, 0.09340, 0.09404 ");
}
}
capacitance () {
top_plane: metal8;
bottom_plane: poly;
lateral_capacitance (capacitance_template_WxS) {
index_1 (" 0.1400, 0.2700, 0.2800, 0.5000, 0.5600, 0.9000 ");
index_2 (" 0.1400, 0.2100, 0.2700, 0.3150, 0.4725, 0.5000, 0.7088, 0.9000, \
1.0631, 1.5947, 2.3920, 3.5880, 5.3821, 538.2070 ");
values (" 0.06871, 0.04935, 0.04019, 0.03547, 0.02519, 0.02397, 0.01732, 0.01354, \
0.01121, 0.00648, 0.00316, 0.00119, 0.00030, 0.00000, 0.07276, 0.05278, \
0.04324, 0.03827, 0.02738, 0.02609, 0.01895, 0.01486, 0.01232, 0.00716, \
0.00351, 0.00133, 0.00033, 0.00000, 0.07300, 0.05299, 0.04343, 0.03845, \
0.02752, 0.02622, 0.01905, 0.01494, 0.01239, 0.00721, 0.00353, 0.00134, \
0.00034, 0.00000, 0.07687, 0.05636, 0.04647, 0.04127, 0.02978, 0.02840, \
0.02077, 0.01635, 0.01360, 0.00798, 0.00394, 0.00151, 0.00038, 0.00000, \
0.07756, 0.05698, 0.04704, 0.04180, 0.03022, 0.02883, 0.02111, 0.01663, \
0.01385, 0.00814, 0.00403, 0.00154, 0.00039, 0.00000, 0.08030, 0.05945, \
0.04931, 0.04395, 0.03200, 0.03056, 0.02252, 0.01782, 0.01488, 0.00882, \
0.00441, 0.00170, 0.00043, 0.00000 ");
}
ground_capacitance (capacitance_template_WxS) {
index_1 (" 0.1400, 0.2700, 0.2800, 0.5000, 0.5600, 0.9000 ");
index_2 (" 0.1400, 0.2100, 0.2700, 0.3150, 0.4725, 0.5000, 0.7088, 0.9000, \
1.0631, 1.5947, 2.3920, 3.5880, 5.3821, 538.2070 ");
values (" 0.01366, 0.01611, 0.01803, 0.01937, 0.02357, 0.02423, 0.02874, 0.03224, \
0.03481, 0.04112, 0.04658, 0.05026, 0.05197, 0.05258, 0.01788, 0.02011, \
0.02190, 0.02319, 0.02736, 0.02804, 0.03272, 0.03640, 0.03915, 0.04595, \
0.05192, 0.05598, 0.05787, 0.05856, 0.01819, 0.02040, 0.02219, 0.02348, \
0.02765, 0.02833, 0.03302, 0.03671, 0.03948, 0.04630, 0.05231, 0.05640, \
0.05830, 0.05899, 0.02473, 0.02687, 0.02864, 0.02992, 0.03416, 0.03486, \
0.03975, 0.04365, 0.04657, 0.05391, 0.06045, 0.06498, 0.06712, 0.06790, \
0.02651, 0.02865, 0.03041, 0.03171, 0.03596, 0.03666, 0.04159, 0.04553, \
0.04849, 0.05592, 0.06258, 0.06720, 0.06939, 0.07019, 0.03684, 0.03898, \
0.04076, 0.04207, 0.04640, 0.04712, 0.05220, 0.05629, 0.05938, 0.06722, \
0.07434, 0.07937, 0.08178, 0.08267 ");
}
}
capacitance () {
top_plane: metal8;
bottom_plane: SUBSTRATE;
lateral_capacitance (capacitance_template_WxS) {
index_1 (" 0.1400, 0.2700, 0.2800, 0.5000, 0.5600, 0.9000 ");
index_2 (" 0.1400, 0.2100, 0.2700, 0.3150, 0.4725, 0.5000, 0.7088, 0.9000, \
1.0631, 1.5947, 2.3920, 3.5880, 5.3821, 538.2070 ");
values (" 0.06928, 0.04998, 0.04089, 0.03620, 0.02603, 0.02483, 0.01827, 0.01453, \
0.01220, 0.00735, 0.00378, 0.00151, 0.00041, 0.00000, 0.07348, 0.05358, \
0.04410, 0.03917, 0.02838, 0.02710, 0.02004, 0.01596, 0.01341, 0.00812, \
0.00418, 0.00167, 0.00045, 0.00000, 0.07374, 0.05380, 0.04430, 0.03935, \
0.02853, 0.02724, 0.02015, 0.01606, 0.01349, 0.00817, 0.00421, 0.00168, \
0.00046, 0.00000, 0.07788, 0.05743, 0.04758, 0.04241, 0.03100, 0.02963, \
0.02203, 0.01760, 0.01482, 0.00902, 0.00467, 0.00188, 0.00051, 0.00000, \
0.07864, 0.05812, 0.04821, 0.04300, 0.03148, 0.03010, 0.02240, 0.01791, \
0.01509, 0.00919, 0.00477, 0.00192, 0.00052, 0.00000, 0.08166, 0.06084, \
0.05071, 0.04536, 0.03344, 0.03199, 0.02394, 0.01920, 0.01621, 0.00994, \
0.00519, 0.00211, 0.00057, 0.00000 ");
}
ground_capacitance (capacitance_template_WxS) {
index_1 (" 0.1400, 0.2700, 0.2800, 0.5000, 0.5600, 0.9000 ");
index_2 (" 0.1400, 0.2100, 0.2700, 0.3150, 0.4725, 0.5000, 0.7088, 0.9000, \
1.0631, 1.5947, 2.3920, 3.5880, 5.3821, 538.2070 ");
values (" 0.01219, 0.01440, 0.01611, 0.01730, 0.02098, 0.02156, 0.02551, 0.02861, \
0.03093, 0.03690, 0.04249, 0.04661, 0.04871, 0.04954, 0.01590, 0.01783, \
0.01938, 0.02050, 0.02409, 0.02467, 0.02874, 0.03200, 0.03450, 0.04093, \
0.04704, 0.05158, 0.05389, 0.05482, 0.01616, 0.01808, 0.01963, 0.02074, \
0.02432, 0.02491, 0.02899, 0.03226, 0.03477, 0.04123, 0.04737, 0.05194, \
0.05427, 0.05520, 0.02160, 0.02341, 0.02491, 0.02600, 0.02962, 0.03023, \
0.03449, 0.03796, 0.04063, 0.04760, 0.05429, 0.05933, 0.06192, 0.06297, \
0.02306, 0.02486, 0.02636, 0.02746, 0.03110, 0.03170, 0.03600, 0.03952, \
0.04222, 0.04929, 0.05609, 0.06122, 0.06388, 0.06495, 0.03154, 0.03335, \
0.03486, 0.03598, 0.03971, 0.04033, 0.04479, 0.04847, 0.05130, 0.05877, \
0.06605, 0.07159, 0.07449, 0.07567 ");
}
}
capacitance () {
top_plane: AIR;
bottom_plane: metal3;
lateral_capacitance (capacitance_template_WxS) {
index_1 (" 0.1400, 0.2700, 0.2800, 0.5000, 0.5600, 0.9000 ");
index_2 (" 0.1400, 0.2100, 0.2700, 0.3150, 0.4725, 0.5000, 0.7088, 0.9000, \
1.0631, 1.5947, 2.3920, 3.5880, 5.3821, 538.2070 ");
values (" 0.05920, 0.03948, 0.03025, 0.02556, 0.01579, 0.01470, 0.00917, 0.00646, \
0.00500, 0.00255, 0.00124, 0.00058, 0.00027, 0.00000, 0.06170, 0.04169, \
0.03227, 0.02746, 0.01737, 0.01623, 0.01040, 0.00748, 0.00587, 0.00310, \
0.00155, 0.00075, 0.00036, 0.00000, 0.06186, 0.04184, 0.03241, 0.02759, \
0.01747, 0.01634, 0.01049, 0.00755, 0.00593, 0.00314, 0.00158, 0.00076, \
0.00036, 0.00000, 0.06463, 0.04436, 0.03477, 0.02984, 0.01942, 0.01823, \
0.01206, 0.00890, 0.00711, 0.00393, 0.00206, 0.00104, 0.00051, 0.00000, \
0.06519, 0.04490, 0.03528, 0.03033, 0.01985, 0.01866, 0.01243, 0.00921, \
0.00739, 0.00413, 0.00219, 0.00111, 0.00055, 0.00000, 0.06782, 0.04738, \
0.03765, 0.03262, 0.02190, 0.02066, 0.01417, 0.01075, 0.00877, 0.00514, \
0.00286, 0.00152, 0.00079, 0.00000 ");
}
ground_capacitance (capacitance_template_WxS) {
index_1 (" 0.1400, 0.2700, 0.2800, 0.5000, 0.5600, 0.9000 ");
index_2 (" 0.1400, 0.2100, 0.2700, 0.3150, 0.4725, 0.5000, 0.7088, 0.9000, \
1.0631, 1.5947, 2.3920, 3.5880, 5.3821, 538.2070 ");
values (" 0.05329, 0.06183, 0.06779, 0.07174, 0.08196, 0.08336, 0.09109, 0.09563, \
0.09831, 0.10279, 0.10531, 0.10659, 0.10748, 0.10803, 0.07806, 0.08641, \
0.09226, 0.09617, 0.10639, 0.10781, 0.11576, 0.12054, 0.12344, 0.12845, \
0.13141, 0.13297, 0.13401, 0.13473, 0.07994, 0.08829, 0.09414, 0.09804, \
0.10826, 0.10968, 0.11765, 0.12245, 0.12536, 0.13040, 0.13339, 0.13498, \
0.13602, 0.13675, 0.12121, 0.12940, 0.13517, 0.13904, 0.14927, 0.15071, \
0.15891, 0.16397, 0.16711, 0.17277, 0.17633, 0.17832, 0.17961, 0.18064, \
0.13239, 0.14055, 0.14630, 0.15016, 0.16039, 0.16183, 0.17008, 0.17520, \
0.17838, 0.18418, 0.18786, 0.18996, 0.19131, 0.19243, 0.19560, 0.20368, \
0.20938, 0.21321, 0.22346, 0.22492, 0.23335, 0.23871, 0.24209, 0.24847, \
0.25276, 0.25536, 0.25705, 0.25864 ");
}
}
capacitance () {
top_plane: AIR;
bottom_plane: metal2;
lateral_capacitance (capacitance_template_WxS) {
index_1 (" 0.1400, 0.2700, 0.2800, 0.5000, 0.5600, 0.9000 ");
index_2 (" 0.1400, 0.2100, 0.2700, 0.3150, 0.4725, 0.5000, 0.7088, 0.9000, \
1.0631, 1.5947, 2.3920, 3.5880, 5.3821, 538.2070 ");
values (" 0.06633, 0.04665, 0.03728, 0.03242, 0.02189, 0.02066, 0.01406, 0.01051, \
0.00845, 0.00468, 0.00241, 0.00117, 0.00056, 0.00000, 0.06955, 0.04934, \
0.03966, 0.03462, 0.02365, 0.02236, 0.01544, 0.01168, 0.00947, 0.00537, \
0.00283, 0.00141, 0.00068, 0.00000, 0.06974, 0.04950, 0.03981, 0.03476, \
0.02376, 0.02247, 0.01553, 0.01175, 0.00953, 0.00542, 0.00286, 0.00143, \
0.00069, 0.00000, 0.07276, 0.05219, 0.04228, 0.03709, 0.02576, 0.02441, \
0.01717, 0.01319, 0.01082, 0.00635, 0.00347, 0.00179, 0.00090, 0.00000, \
0.07333, 0.05272, 0.04278, 0.03758, 0.02619, 0.02484, 0.01754, 0.01352, \
0.01112, 0.00657, 0.00362, 0.00189, 0.00095, 0.00000, 0.07594, 0.05516, \
0.04511, 0.03983, 0.02821, 0.02682, 0.01930, 0.01510, 0.01258, 0.00769, \
0.00441, 0.00240, 0.00125, 0.00000 ");
}
ground_capacitance (capacitance_template_WxS) {
index_1 (" 0.1400, 0.2700, 0.2800, 0.5000, 0.5600, 0.9000 ");
index_2 (" 0.1400, 0.2100, 0.2700, 0.3150, 0.4725, 0.5000, 0.7088, 0.9000, \
1.0631, 1.5947, 2.3920, 3.5880, 5.3821, 538.2070 ");
values (" 0.02066, 0.02468, 0.02785, 0.03009, 0.03690, 0.03794, 0.04457, 0.04912, \
0.05212, 0.05824, 0.06237, 0.06477, 0.06596, 0.06708, 0.02882, 0.03275, \
0.03587, 0.03809, 0.04487, 0.04592, 0.05266, 0.05734, 0.06049, 0.06701, \
0.07159, 0.07433, 0.07571, 0.07709, 0.02944, 0.03336, 0.03648, 0.03870, \
0.04548, 0.04653, 0.05327, 0.05796, 0.06112, 0.06767, 0.07228, 0.07503, \
0.07643, 0.07783, 0.04294, 0.04676, 0.04981, 0.05199, 0.05871, 0.05976, \
0.06656, 0.07137, 0.07464, 0.08163, 0.08675, 0.08995, 0.09165, 0.09345, \
0.04657, 0.05037, 0.05341, 0.05558, 0.06228, 0.06332, 0.07013, 0.07497, \
0.07826, 0.08534, 0.09057, 0.09388, 0.09565, 0.09756, 0.06699, 0.07070, \
0.07368, 0.07582, 0.08245, 0.08349, 0.09033, 0.09526, 0.09865, 0.10611, \
0.11185, 0.11565, 0.11782, 0.12032 ");
}
}
capacitance () {
top_plane: AIR;
bottom_plane: metal1;
lateral_capacitance (capacitance_template_WxS) {
index_1 (" 0.1400, 0.2700, 0.2800, 0.5000, 0.5600, 0.9000 ");
index_2 (" 0.1400, 0.2100, 0.2700, 0.3150, 0.4725, 0.5000, 0.7088, 0.9000, \
1.0631, 1.5947, 2.3920, 3.5880, 5.3821, 538.2070 ");
values (" 0.06861, 0.04919, 0.03999, 0.03522, 0.02484, 0.02362, 0.01694, 0.01320, \
0.01095, 0.00652, 0.00358, 0.00182, 0.00088, 0.00000, 0.07245, 0.05242, \
0.04284, 0.03784, 0.02691, 0.02562, 0.01853, 0.01454, 0.01211, 0.00734, \
0.00409, 0.00212, 0.00105, 0.00000, 0.07269, 0.05261, 0.04301, 0.03801, \
0.02704, 0.02574, 0.01863, 0.01463, 0.01219, 0.00739, 0.00413, 0.00215, \
0.00106, 0.00000, 0.07630, 0.05578, 0.04588, 0.04069, 0.02927, 0.02791, \
0.02043, 0.01619, 0.01359, 0.00843, 0.00484, 0.00259, 0.00132, 0.00000, \
0.07696, 0.05638, 0.04645, 0.04123, 0.02974, 0.02836, 0.02082, 0.01653, \
0.01391, 0.00867, 0.00501, 0.00270, 0.00138, 0.00000, 0.07978, 0.05899, \
0.04890, 0.04359, 0.03182, 0.03041, 0.02262, 0.01816, 0.01541, 0.00986, \
0.00588, 0.00329, 0.00174, 0.00000 ");
}
ground_capacitance (capacitance_template_WxS) {
index_1 (" 0.1400, 0.2700, 0.2800, 0.5000, 0.5600, 0.9000 ");
index_2 (" 0.1400, 0.2100, 0.2700, 0.3150, 0.4725, 0.5000, 0.7088, 0.9000, \
1.0631, 1.5947, 2.3920, 3.5880, 5.3821, 538.2070 ");
values (" 0.01405, 0.01677, 0.01894, 0.02048, 0.02533, 0.02610, 0.03125, 0.03508, \
0.03780, 0.04405, 0.04900, 0.05227, 0.05403, 0.05580, 0.01911, 0.02169, \
0.02378, 0.02529, 0.03010, 0.03087, 0.03610, 0.04005, 0.04289, 0.04949, \
0.05486, 0.05849, 0.06049, 0.06259, 0.01949, 0.02206, 0.02415, 0.02565, \
0.03046, 0.03124, 0.03647, 0.04042, 0.04327, 0.04989, 0.05529, 0.05895, \
0.06096, 0.06309, 0.02762, 0.03012, 0.03216, 0.03364, 0.03841, 0.03918, \
0.04446, 0.04850, 0.05144, 0.05840, 0.06425, 0.06834, 0.07069, 0.07332, \
0.02981, 0.03229, 0.03432, 0.03580, 0.04055, 0.04132, 0.04661, 0.05067, \
0.05361, 0.06063, 0.06658, 0.07077, 0.07320, 0.07596, 0.04214, 0.04456, \
0.04654, 0.04799, 0.05269, 0.05345, 0.05873, 0.06283, 0.06584, 0.07311, \
0.07945, 0.08411, 0.08695, 0.09041 ");
}
}
capacitance () {
top_plane: AIR;
bottom_plane: poly;
lateral_capacitance (capacitance_template_WxS) {
index_1 (" 0.1400, 0.2700, 0.2800, 0.5000, 0.5600, 0.9000 ");
index_2 (" 0.1400, 0.2100, 0.2700, 0.3150, 0.4725, 0.5000, 0.7088, 0.9000, \
1.0631, 1.5947, 2.3920, 3.5880, 5.3821, 538.2070 ");
values (" 0.06960, 0.05031, 0.04120, 0.03650, 0.02628, 0.02507, 0.01847, 0.01473, \
0.01243, 0.00778, 0.00448, 0.00236, 0.00118, 0.00000, 0.07373, 0.05381, \
0.04431, 0.03936, 0.02855, 0.02727, 0.02023, 0.01621, 0.01372, 0.00869, \
0.00506, 0.00272, 0.00138, 0.00000, 0.07398, 0.05402, 0.04450, 0.03954, \
0.02870, 0.02741, 0.02034, 0.01630, 0.01381, 0.00875, 0.00510, 0.00275, \
0.00139, 0.00000, 0.07798, 0.05753, 0.04769, 0.04252, 0.03116, 0.02980, \
0.02230, 0.01800, 0.01533, 0.00988, 0.00589, 0.00325, 0.00169, 0.00000, \
0.07872, 0.05820, 0.04831, 0.04312, 0.03166, 0.03029, 0.02272, 0.01837, \
0.01566, 0.01013, 0.00607, 0.00337, 0.00176, 0.00000, 0.08183, 0.06105, \
0.05098, 0.04566, 0.03388, 0.03246, 0.02461, 0.02006, 0.01723, 0.01138, \
0.00700, 0.00401, 0.00216, 0.00000 ");
}
ground_capacitance (capacitance_template_WxS) {
index_1 (" 0.1400, 0.2700, 0.2800, 0.5000, 0.5600, 0.9000 ");
index_2 (" 0.1400, 0.2100, 0.2700, 0.3150, 0.4725, 0.5000, 0.7088, 0.9000, \
1.0631, 1.5947, 2.3920, 3.5880, 5.3821, 538.2070 ");
values (" 0.01143, 0.01367, 0.01545, 0.01671, 0.02069, 0.02132, 0.02563, 0.02894, \
0.03136, 0.03728, 0.04246, 0.04623, 0.04843, 0.05076, 0.01546, 0.01752, \
0.01919, 0.02040, 0.02428, 0.02491, 0.02926, 0.03265, 0.03518, 0.04141, \
0.04700, 0.05114, 0.05360, 0.05633, 0.01575, 0.01780, 0.01947, 0.02067, \
0.02455, 0.02518, 0.02953, 0.03293, 0.03547, 0.04172, 0.04733, 0.05149, \
0.05398, 0.05673, 0.02195, 0.02390, 0.02551, 0.02668, 0.03051, 0.03114, \
0.03553, 0.03901, 0.04161, 0.04817, 0.05419, 0.05878, 0.06162, 0.06495, \
0.02360, 0.02554, 0.02713, 0.02830, 0.03212, 0.03275, 0.03714, 0.04064, \
0.04325, 0.04986, 0.05596, 0.06065, 0.06357, 0.06705, 0.03289, 0.03477, \
0.03634, 0.03748, 0.04126, 0.04188, 0.04627, 0.04980, 0.05246, 0.05926, \
0.06571, 0.07082, 0.07415, 0.07841 ");
}
}
capacitance () {
top_plane: AIR;
bottom_plane: SUBSTRATE;
lateral_capacitance (capacitance_template_WxS) {
index_1 (" 0.1400, 0.2700, 0.2800, 0.5000, 0.5600, 0.9000 ");
index_2 (" 0.1400, 0.2100, 0.2700, 0.3150, 0.4725, 0.5000, 0.7088, 0.9000, \
1.0631, 1.5947, 2.3920, 3.5880, 5.3821, 538.2070 ");
values (" 0.07026, 0.05105, 0.04201, 0.03735, 0.02725, 0.02606, 0.01955, 0.01585, \
0.01355, 0.00881, 0.00528, 0.00289, 0.00148, 0.00000, 0.07456, 0.05472, \
0.04528, 0.04037, 0.02968, 0.02841, 0.02144, 0.01744, 0.01495, 0.00980, \
0.00593, 0.00330, 0.00171, 0.00000, 0.07483, 0.05495, 0.04548, 0.04057, \
0.02983, 0.02856, 0.02156, 0.01754, 0.01504, 0.00987, 0.00598, 0.00333, \
0.00172, 0.00000, 0.07910, 0.05871, 0.04891, 0.04378, 0.03249, 0.03114, \
0.02368, 0.01937, 0.01668, 0.01109, 0.00683, 0.00389, 0.00206, 0.00000, \
0.07990, 0.05944, 0.04959, 0.04442, 0.03304, 0.03167, 0.02413, 0.01977, \
0.01704, 0.01136, 0.00703, 0.00402, 0.00214, 0.00000, 0.08328, 0.06254, \
0.05248, 0.04718, 0.03542, 0.03400, 0.02614, 0.02156, 0.01869, 0.01267, \
0.00802, 0.00471, 0.00259, 0.00000 ");
}
ground_capacitance (capacitance_template_WxS) {
index_1 (" 0.1400, 0.2700, 0.2800, 0.5000, 0.5600, 0.9000 ");
index_2 (" 0.1400, 0.2100, 0.2700, 0.3150, 0.4725, 0.5000, 0.7088, 0.9000, \
1.0631, 1.5947, 2.3920, 3.5880, 5.3821, 538.2070 ");
values (" 0.00975, 0.01170, 0.01325, 0.01434, 0.01778, 0.01833, 0.02206, 0.02497, \
0.02713, 0.03263, 0.03780, 0.04189, 0.04446, 0.04737, 0.01321, 0.01496, \
0.01638, 0.01741, 0.02071, 0.02124, 0.02497, 0.02794, 0.03019, 0.03596, \
0.04152, 0.04597, 0.04883, 0.05218, 0.01346, 0.01520, 0.01661, 0.01763, \
0.02093, 0.02146, 0.02519, 0.02816, 0.03041, 0.03620, 0.04179, 0.04626, \
0.04914, 0.05253, 0.01856, 0.02018, 0.02152, 0.02249, 0.02571, 0.02624, \
0.02999, 0.03302, 0.03534, 0.04140, 0.04736, 0.05225, 0.05550, 0.05954, \
0.01989, 0.02150, 0.02283, 0.02380, 0.02700, 0.02753, 0.03128, 0.03432, \
0.03665, 0.04276, 0.04879, 0.05378, 0.05711, 0.06131, 0.02737, 0.02892, \
0.03021, 0.03116, 0.03432, 0.03485, 0.03860, 0.04168, 0.04404, 0.05032, \
0.05666, 0.06204, 0.06578, 0.07083 ");
}
}
}
layer (metal3) {
resistance: 0.250000
capacitance () {
top_plane: metal4;
bottom_plane: metal2;
lateral_capacitance (capacitance_template_WxS) {
index_1 (" 0.0700, 0.0900, 0.1400, 0.2700, 0.2800, 0.5000, 0.9000, 1.5000 ");
index_2 (" 0.0700, 0.0900, 0.1050, 0.1575, 0.2363, 0.2700, 0.3544, 0.5000, \
0.5316, 0.7973, 0.9000, 1.1960, 1.5000, 1.7940, 2.6910, 269.1035 ");
values (" 0.05741, 0.04373, 0.03672, 0.02161, 0.01082, 0.00818, 0.00409, 0.00128, \
0.00100, 0.00013, 0.00006, 0.00001, 0.00000, 0.00000, 0.00000, 0.00000, \
0.05773, 0.04398, 0.03692, 0.02172, 0.01088, 0.00822, 0.00411, 0.00128, \
0.00100, 0.00013, 0.00006, 0.00001, 0.00000, 0.00000, 0.00000, 0.00000, \
0.05804, 0.04422, 0.03712, 0.02183, 0.01093, 0.00826, 0.00413, 0.00129, \
0.00101, 0.00013, 0.00006, 0.00001, 0.00000, 0.00000, 0.00000, 0.00000, \
0.05814, 0.04429, 0.03718, 0.02187, 0.01095, 0.00827, 0.00414, 0.00129, \
0.00101, 0.00013, 0.00006, 0.00001, 0.00000, 0.00000, 0.00000, 0.00000, \
0.05815, 0.04430, 0.03719, 0.02187, 0.01095, 0.00827, 0.00414, 0.00129, \
0.00101, 0.00013, 0.00006, 0.00001, 0.00000, 0.00000, 0.00000, 0.00000, \
0.05816, 0.04431, 0.03719, 0.02188, 0.01095, 0.00828, 0.00414, 0.00129, \
0.00101, 0.00013, 0.00006, 0.00001, 0.00000, 0.00000, 0.00000, 0.00000, \
0.05815, 0.04430, 0.03719, 0.02187, 0.01095, 0.00828, 0.00414, 0.00129, \
0.00101, 0.00013, 0.00006, 0.00001, 0.00000, 0.00000, 0.00000, 0.00000, \
0.05816, 0.04430, 0.03719, 0.02187, 0.01095, 0.00828, 0.00414, 0.00129, \
0.00101, 0.00013, 0.00006, 0.00001, 0.00000, 0.00000, 0.00000, 0.00000 ");
}
ground_capacitance (capacitance_template_WxS) {
index_1 (" 0.0700, 0.0900, 0.1400, 0.2700, 0.2800, 0.5000, 0.9000, 1.5000 ");
index_2 (" 0.0700, 0.0900, 0.1050, 0.1575, 0.2363, 0.2700, 0.3544, 0.5000, \
0.5316, 0.7973, 0.9000, 1.1960, 1.5000, 1.7940, 2.6910, 269.1035 ");
values (" 0.05019, 0.05590, 0.06004, 0.07264, 0.08637, 0.09060, 0.09763, 0.10327, \
0.10389, 0.10565, 0.10561, 0.10587, 0.10575, 0.10584, 0.10596, 0.10595, \
0.05742, 0.06319, 0.06737, 0.08005, 0.09386, 0.09811, 0.10518, 0.11084, \
0.11146, 0.11324, 0.11320, 0.11346, 0.11335, 0.11343, 0.11353, 0.11353, \
0.07566, 0.08150, 0.08571, 0.09849, 0.11237, 0.11664, 0.12375, 0.12943, \
0.13006, 0.13184, 0.13181, 0.13206, 0.13195, 0.13204, 0.13213, 0.13213, \
0.12354, 0.12939, 0.13362, 0.14642, 0.16033, 0.16461, 0.17173, 0.17742, \
0.17805, 0.17984, 0.17980, 0.18006, 0.17995, 0.18003, 0.18013, 0.18012, \
0.12722, 0.13308, 0.13731, 0.15011, 0.16402, 0.16830, 0.17542, 0.18111, \
0.18174, 0.18353, 0.18349, 0.18375, 0.18364, 0.18373, 0.18382, 0.18382, \
0.20839, 0.21424, 0.21847, 0.23128, 0.24519, 0.24947, 0.25659, 0.26229, \
0.26291, 0.26470, 0.26467, 0.26492, 0.26481, 0.26490, 0.26499, 0.26499, \
0.35597, 0.36183, 0.36606, 0.37886, 0.39277, 0.39705, 0.40417, 0.40987, \
0.41049, 0.41228, 0.41225, 0.41250, 0.41239, 0.41248, 0.41245, 0.41257, \
0.57734, 0.58319, 0.58742, 0.60023, 0.61414, 0.61842, 0.62554, 0.63123, \
0.63186, 0.63365, 0.63362, 0.63387, 0.63376, 0.63385, 0.63382, 0.63394 ");
}
}
capacitance () {
top_plane: metal4;
bottom_plane: metal1;
lateral_capacitance (capacitance_template_WxS) {
index_1 (" 0.0700, 0.0900, 0.1400, 0.2700, 0.2800, 0.5000, 0.9000, 1.5000 ");
index_2 (" 0.0700, 0.0900, 0.1050, 0.1575, 0.2363, 0.2700, 0.3544, 0.5000, \
0.5316, 0.7973, 0.9000, 1.1960, 1.5000, 1.7940, 2.6910, 269.1035 ");
values (" 0.06188, 0.04851, 0.04169, 0.02696, 0.01605, 0.01317, 0.00824, 0.00389, \
0.00332, 0.00091, 0.00055, 0.00014, 0.00004, 0.00001, 0.00000, 0.00000, \
0.06272, 0.04923, 0.04233, 0.02742, 0.01635, 0.01342, 0.00841, 0.00397, \
0.00339, 0.00093, 0.00057, 0.00014, 0.00004, 0.00001, 0.00000, 0.00000, \
0.06403, 0.05037, 0.04336, 0.02817, 0.01685, 0.01385, 0.00870, 0.00412, \
0.00352, 0.00096, 0.00059, 0.00015, 0.00004, 0.00001, 0.00000, 0.00000, \
0.06548, 0.05164, 0.04453, 0.02904, 0.01743, 0.01435, 0.00903, 0.00429, \
0.00367, 0.00101, 0.00061, 0.00015, 0.00004, 0.00001, 0.00000, 0.00000, \
0.06554, 0.05170, 0.04458, 0.02908, 0.01746, 0.01437, 0.00905, 0.00430, \
0.00367, 0.00101, 0.00062, 0.00016, 0.00004, 0.00001, 0.00000, 0.00000, \
0.06611, 0.05220, 0.04503, 0.02942, 0.01769, 0.01456, 0.00918, 0.00436, \
0.00373, 0.00102, 0.00063, 0.00016, 0.00004, 0.00001, 0.00000, 0.00000, \
0.06621, 0.05229, 0.04512, 0.02948, 0.01773, 0.01460, 0.00920, 0.00438, \
0.00374, 0.00103, 0.00063, 0.00016, 0.00004, 0.00001, 0.00000, 0.00000, \
0.06622, 0.05230, 0.04512, 0.02949, 0.01773, 0.01460, 0.00921, 0.00438, \
0.00374, 0.00103, 0.00063, 0.00016, 0.00004, 0.00001, 0.00000, 0.00000 ");
}
ground_capacitance (capacitance_template_WxS) {
index_1 (" 0.0700, 0.0900, 0.1400, 0.2700, 0.2800, 0.5000, 0.9000, 1.5000 ");
index_2 (" 0.0700, 0.0900, 0.1050, 0.1575, 0.2363, 0.2700, 0.3544, 0.5000, \
0.5316, 0.7973, 0.9000, 1.1960, 1.5000, 1.7940, 2.6910, 269.1035 ");
values (" 0.03514, 0.03897, 0.04176, 0.05050, 0.06098, 0.06460, 0.07162, 0.07912, \
0.08020, 0.08486, 0.08545, 0.08641, 0.08655, 0.08667, 0.08671, 0.08671, \
0.03968, 0.04354, 0.04636, 0.05519, 0.06579, 0.06947, 0.07660, 0.08423, \
0.08533, 0.09009, 0.09070, 0.09168, 0.09183, 0.09194, 0.09197, 0.09197, \
0.05120, 0.05511, 0.05797, 0.06694, 0.07775, 0.08151, 0.08882, 0.09668, \
0.09782, 0.10274, 0.10339, 0.10440, 0.10456, 0.10468, 0.10469, 0.10469, \
0.08193, 0.08590, 0.08881, 0.09795, 0.10900, 0.11286, 0.12039, 0.12852, \
0.12969, 0.13482, 0.13550, 0.13656, 0.13673, 0.13685, 0.13685, 0.13685, \
0.08432, 0.08830, 0.09120, 0.10035, 0.11142, 0.11528, 0.12282, 0.13096, \
0.13214, 0.13727, 0.13795, 0.13901, 0.13918, 0.13930, 0.13930, 0.13930, \
0.13736, 0.14137, 0.14430, 0.15352, 0.16469, 0.16859, 0.17621, 0.18446, \
0.18565, 0.19087, 0.19156, 0.19264, 0.19281, 0.19293, 0.19293, 0.19293, \
0.23438, 0.23840, 0.24133, 0.25057, 0.26176, 0.26567, 0.27331, 0.28157, \
0.28277, 0.28800, 0.28870, 0.28977, 0.28995, 0.29007, 0.29007, 0.29007, \
0.38002, 0.38403, 0.38697, 0.39621, 0.40740, 0.41130, 0.41895, 0.42721, \
0.42841, 0.43364, 0.43434, 0.43541, 0.43559, 0.43571, 0.43571, 0.43571 ");
}
}
capacitance () {
top_plane: metal4;
bottom_plane: poly;
lateral_capacitance (capacitance_template_WxS) {
index_1 (" 0.0700, 0.0900, 0.1400, 0.2700, 0.2800, 0.5000, 0.9000, 1.5000 ");
index_2 (" 0.0700, 0.0900, 0.1050, 0.1575, 0.2363, 0.2700, 0.3544, 0.5000, \
0.5316, 0.7973, 0.9000, 1.1960, 1.5000, 1.7940, 2.6910, 269.1035 ");
values (" 0.06262, 0.04933, 0.04258, 0.02805, 0.01735, 0.01452, 0.00962, 0.00511, \
0.00449, 0.00159, 0.00108, 0.00037, 0.00013, 0.00005, 0.00000, 0.00000, \
0.06357, 0.05017, 0.04334, 0.02863, 0.01776, 0.01488, 0.00989, 0.00527, \
0.00463, 0.00164, 0.00111, 0.00038, 0.00013, 0.00005, 0.00000, 0.00000, \
0.06519, 0.05162, 0.04468, 0.02968, 0.01853, 0.01556, 0.01039, 0.00557, \
0.00490, 0.00175, 0.00119, 0.00041, 0.00014, 0.00005, 0.00000, 0.00000, \
0.06737, 0.05361, 0.04654, 0.03118, 0.01966, 0.01656, 0.01114, 0.00602, \
0.00531, 0.00191, 0.00130, 0.00045, 0.00015, 0.00006, 0.00000, 0.00000, \
0.06748, 0.05371, 0.04663, 0.03126, 0.01972, 0.01661, 0.01118, 0.00605, \
0.00533, 0.00192, 0.00131, 0.00045, 0.00015, 0.00006, 0.00000, 0.00000, \
0.06881, 0.05493, 0.04778, 0.03219, 0.02042, 0.01724, 0.01165, 0.00633, \
0.00558, 0.00202, 0.00138, 0.00047, 0.00016, 0.00006, 0.00000, 0.00000, \
0.06932, 0.05540, 0.04822, 0.03256, 0.02070, 0.01748, 0.01183, 0.00645, \
0.00568, 0.00206, 0.00141, 0.00048, 0.00017, 0.00006, 0.00000, 0.00000, \
0.06940, 0.05547, 0.04829, 0.03262, 0.02074, 0.01752, 0.01186, 0.00646, \
0.00570, 0.00207, 0.00141, 0.00049, 0.00017, 0.00006, 0.00000, 0.00000 ");
}
ground_capacitance (capacitance_template_WxS) {
index_1 (" 0.0700, 0.0900, 0.1400, 0.2700, 0.2800, 0.5000, 0.9000, 1.5000 ");
index_2 (" 0.0700, 0.0900, 0.1050, 0.1575, 0.2363, 0.2700, 0.3544, 0.5000, \
0.5316, 0.7973, 0.9000, 1.1960, 1.5000, 1.7940, 2.6910, 269.1035 ");
values (" 0.03315, 0.03668, 0.03926, 0.04724, 0.05675, 0.06007, 0.06658, 0.07393, \
0.07505, 0.08044, 0.08133, 0.08287, 0.08329, 0.08352, 0.08363, 0.08363, \
0.03733, 0.04088, 0.04346, 0.05149, 0.06110, 0.06445, 0.07108, 0.07858, \
0.07973, 0.08528, 0.08620, 0.08778, 0.08823, 0.08847, 0.08856, 0.08856, \
0.04784, 0.05140, 0.05399, 0.06210, 0.07188, 0.07531, 0.08214, 0.08993, \
0.09113, 0.09697, 0.09796, 0.09965, 0.10013, 0.10037, 0.10046, 0.10046, \
0.07563, 0.07921, 0.08183, 0.09006, 0.10008, 0.10362, 0.11074, 0.11897, \
0.12025, 0.12653, 0.12762, 0.12945, 0.12999, 0.13025, 0.13034, 0.13034, \
0.07779, 0.08137, 0.08399, 0.09223, 0.10226, 0.10581, 0.11295, 0.12119, \
0.12248, 0.12879, 0.12988, 0.13172, 0.13226, 0.13252, 0.13261, 0.13261, \
0.12576, 0.12938, 0.13202, 0.14036, 0.15057, 0.15420, 0.16153, 0.17004, \
0.17137, 0.17796, 0.17912, 0.18105, 0.18162, 0.18190, 0.18198, 0.18199, \
0.21408, 0.21772, 0.22038, 0.22876, 0.23905, 0.24271, 0.25011, 0.25874, \
0.26009, 0.26679, 0.26797, 0.26993, 0.27053, 0.27080, 0.27091, 0.27089, \
0.34703, 0.35067, 0.35334, 0.36173, 0.37203, 0.37570, 0.38311, 0.39175, \
0.39310, 0.39982, 0.40100, 0.40297, 0.40357, 0.40385, 0.40395, 0.40394 ");
}
}
capacitance () {
top_plane: metal4;
bottom_plane: SUBSTRATE;
lateral_capacitance (capacitance_template_WxS) {
index_1 (" 0.0700, 0.0900, 0.1400, 0.2700, 0.2800, 0.5000, 0.9000, 1.5000 ");
index_2 (" 0.0700, 0.0900, 0.1050, 0.1575, 0.2363, 0.2700, 0.3544, 0.5000, \
0.5316, 0.7973, 0.9000, 1.1960, 1.5000, 1.7940, 2.6910, 269.1035 ");
values (" 0.06295, 0.04969, 0.04295, 0.02851, 0.01792, 0.01513, 0.01029, 0.00579, \
0.00516, 0.00209, 0.00150, 0.00062, 0.00025, 0.00011, 0.00001, 0.00000, \
0.06393, 0.05056, 0.04376, 0.02914, 0.01840, 0.01555, 0.01062, 0.00600, \
0.00535, 0.00217, 0.00157, 0.00065, 0.00027, 0.00012, 0.00001, 0.00000, \
0.06567, 0.05214, 0.04523, 0.03034, 0.01931, 0.01637, 0.01126, 0.00642, \
0.00573, 0.00235, 0.00170, 0.00070, 0.00029, 0.00013, 0.00001, 0.00000, \
0.06823, 0.05451, 0.04747, 0.03221, 0.02079, 0.01772, 0.01232, 0.00712, \
0.00637, 0.00266, 0.00193, 0.00080, 0.00033, 0.00015, 0.00001, 0.00000, \
0.06837, 0.05464, 0.04759, 0.03232, 0.02087, 0.01780, 0.01238, 0.00716, \
0.00641, 0.00268, 0.00194, 0.00080, 0.00033, 0.00015, 0.00001, 0.00000, \
0.07025, 0.05640, 0.04927, 0.03375, 0.02202, 0.01884, 0.01321, 0.00772, \
0.00692, 0.00292, 0.00213, 0.00089, 0.00037, 0.00016, 0.00001, 0.00000, \
0.07130, 0.05739, 0.05022, 0.03457, 0.02268, 0.01944, 0.01369, 0.00805, \
0.00722, 0.00307, 0.00224, 0.00093, 0.00039, 0.00017, 0.00002, 0.00000, \
0.07158, 0.05766, 0.05047, 0.03478, 0.02285, 0.01960, 0.01382, 0.00813, \
0.00730, 0.00311, 0.00227, 0.00095, 0.00040, 0.00017, 0.00002, 0.00000 ");
}
ground_capacitance (capacitance_template_WxS) {
index_1 (" 0.0700, 0.0900, 0.1400, 0.2700, 0.2800, 0.5000, 0.9000, 1.5000 ");
index_2 (" 0.0700, 0.0900, 0.1050, 0.1575, 0.2363, 0.2700, 0.3544, 0.5000, \
0.5316, 0.7973, 0.9000, 1.1960, 1.5000, 1.7940, 2.6910, 269.1035 ");
values (" 0.03230, 0.03575, 0.03824, 0.04593, 0.05503, 0.05819, 0.06442, 0.07153, \
0.07264, 0.07821, 0.07922, 0.08109, 0.08175, 0.08211, 0.08234, 0.08235, \
0.03638, 0.03981, 0.04230, 0.05002, 0.05918, 0.06238, 0.06871, 0.07597, \
0.07711, 0.08285, 0.08391, 0.08584, 0.08655, 0.08692, 0.08714, 0.08715, \
0.04652, 0.04994, 0.05243, 0.06016, 0.06945, 0.07272, 0.07922, 0.08679, \
0.08798, 0.09408, 0.09523, 0.09731, 0.09808, 0.09848, 0.09870, 0.09872, \
0.07308, 0.07649, 0.07897, 0.08677, 0.09624, 0.09960, 0.10641, 0.11446, \
0.11574, 0.12243, 0.12373, 0.12607, 0.12696, 0.12740, 0.12765, 0.12767, \
0.07513, 0.07854, 0.08103, 0.08883, 0.09831, 0.10168, 0.10850, 0.11658, \
0.11787, 0.12459, 0.12590, 0.12825, 0.12914, 0.12959, 0.12984, 0.12987, \
0.12070, 0.12413, 0.12664, 0.13452, 0.14418, 0.14764, 0.15470, 0.16315, \
0.16452, 0.17170, 0.17313, 0.17569, 0.17668, 0.17717, 0.17744, 0.17747, \
0.20474, 0.20819, 0.21072, 0.21867, 0.22845, 0.23197, 0.23916, 0.24783, \
0.24924, 0.25670, 0.25819, 0.26088, 0.26192, 0.26243, 0.26275, 0.26275, \
0.33166, 0.33512, 0.33765, 0.34562, 0.35544, 0.35897, 0.36620, 0.37493, \
0.37635, 0.38387, 0.38539, 0.38810, 0.38916, 0.38968, 0.39000, 0.39000 ");
}
}
capacitance () {
top_plane: metal5;
bottom_plane: metal2;
lateral_capacitance (capacitance_template_WxS) {
index_1 (" 0.0700, 0.0900, 0.1400, 0.2700, 0.2800, 0.5000, 0.9000, 1.5000 ");
index_2 (" 0.0700, 0.0900, 0.1050, 0.1575, 0.2363, 0.2700, 0.3544, 0.5000, \
0.5316, 0.7973, 0.9000, 1.1960, 1.5000, 1.7940, 2.6910, 269.1035 ");
values (" 0.06279, 0.04952, 0.04278, 0.02830, 0.01766, 0.01485, 0.00998, 0.00547, \
0.00484, 0.00183, 0.00128, 0.00048, 0.00018, 0.00007, 0.00000, 0.00000, \
0.06377, 0.05038, 0.04357, 0.02891, 0.01811, 0.01525, 0.01028, 0.00565, \
0.00500, 0.00190, 0.00133, 0.00050, 0.00019, 0.00007, 0.00000, 0.00000, \
0.06545, 0.05190, 0.04498, 0.03004, 0.01895, 0.01600, 0.01085, 0.00601, \
0.00532, 0.00204, 0.00143, 0.00054, 0.00020, 0.00008, 0.00000, 0.00000, \
0.06784, 0.05410, 0.04704, 0.03174, 0.02026, 0.01718, 0.01175, 0.00658, \
0.00584, 0.00227, 0.00159, 0.00060, 0.00023, 0.00009, 0.00001, 0.00000, \
0.06797, 0.05421, 0.04715, 0.03183, 0.02033, 0.01724, 0.01180, 0.00661, \
0.00587, 0.00228, 0.00160, 0.00060, 0.00023, 0.00009, 0.00001, 0.00000, \
0.06957, 0.05570, 0.04856, 0.03300, 0.02124, 0.01806, 0.01243, 0.00702, \
0.00624, 0.00244, 0.00172, 0.00065, 0.00024, 0.00010, 0.00001, 0.00000, \
0.07031, 0.05640, 0.04922, 0.03356, 0.02167, 0.01845, 0.01274, 0.00721, \
0.00641, 0.00252, 0.00178, 0.00067, 0.00025, 0.00010, 0.00001, 0.00000, \
0.07046, 0.05654, 0.04935, 0.03367, 0.02176, 0.01852, 0.01279, 0.00725, \
0.00645, 0.00253, 0.00179, 0.00068, 0.00025, 0.00010, 0.00001, 0.00000 ");
}
ground_capacitance (capacitance_template_WxS) {
index_1 (" 0.0700, 0.0900, 0.1400, 0.2700, 0.2800, 0.5000, 0.9000, 1.5000 ");
index_2 (" 0.0700, 0.0900, 0.1050, 0.1575, 0.2363, 0.2700, 0.3544, 0.5000, \
0.5316, 0.7973, 0.9000, 1.1960, 1.5000, 1.7940, 2.6910, 269.1035 ");
values (" 0.03270, 0.03619, 0.03872, 0.04653, 0.05583, 0.05906, 0.06542, 0.07266, \
0.07378, 0.07929, 0.08024, 0.08196, 0.08250, 0.08279, 0.08294, 0.08295, \
0.03682, 0.04031, 0.04284, 0.05070, 0.06006, 0.06333, 0.06981, 0.07720, \
0.07834, 0.08402, 0.08503, 0.08680, 0.08737, 0.08766, 0.08781, 0.08781, \
0.04713, 0.05061, 0.05315, 0.06105, 0.07057, 0.07391, 0.08058, 0.08827, \
0.08947, 0.09548, 0.09656, 0.09845, 0.09907, 0.09939, 0.09953, 0.09953, \
0.07425, 0.07774, 0.08029, 0.08828, 0.09802, 0.10147, 0.10844, 0.11660, \
0.11789, 0.12442, 0.12562, 0.12771, 0.12841, 0.12875, 0.12890, 0.12891, \
0.07635, 0.07984, 0.08239, 0.09039, 0.10014, 0.10360, 0.11059, 0.11877, \
0.12006, 0.12662, 0.12783, 0.12993, 0.13064, 0.13098, 0.13113, 0.13114, \
0.12306, 0.12658, 0.12915, 0.13725, 0.14719, 0.15074, 0.15793, 0.16645, \
0.16780, 0.17473, 0.17602, 0.17827, 0.17903, 0.17940, 0.17955, 0.17956, \
0.20917, 0.21272, 0.21531, 0.22347, 0.23350, 0.23709, 0.24440, 0.25306, \
0.25445, 0.26155, 0.26289, 0.26520, 0.26600, 0.26637, 0.26655, 0.26654, \
0.33900, 0.34255, 0.34515, 0.35332, 0.36337, 0.36697, 0.37430, 0.38300, \
0.38438, 0.39152, 0.39287, 0.39519, 0.39599, 0.39637, 0.39655, 0.39654 ");
}
}
capacitance () {
top_plane: metal5;
bottom_plane: metal1;
lateral_capacitance (capacitance_template_WxS) {
index_1 (" 0.0700, 0.0900, 0.1400, 0.2700, 0.2800, 0.5000, 0.9000, 1.5000 ");
index_2 (" 0.0700, 0.0900, 0.1050, 0.1575, 0.2363, 0.2700, 0.3544, 0.5000, \
0.5316, 0.7973, 0.9000, 1.1960, 1.5000, 1.7940, 2.6910, 269.1035 ");
values (" 0.06774, 0.05476, 0.04820, 0.03411, 0.02356, 0.02067, 0.01539, 0.00988, \
0.00902, 0.00435, 0.00330, 0.00154, 0.00071, 0.00034, 0.00004, 0.00000, \
0.06917, 0.05604, 0.04938, 0.03503, 0.02424, 0.02126, 0.01584, 0.01017, \
0.00929, 0.00448, 0.00340, 0.00159, 0.00073, 0.00035, 0.00004, 0.00000, \
0.07177, 0.05837, 0.05154, 0.03673, 0.02548, 0.02237, 0.01668, 0.01071, \
0.00978, 0.00472, 0.00359, 0.00167, 0.00077, 0.00037, 0.00004, 0.00000, \
0.07535, 0.06163, 0.05456, 0.03914, 0.02728, 0.02397, 0.01790, 0.01151, \
0.01051, 0.00509, 0.00387, 0.00180, 0.00083, 0.00040, 0.00004, 0.00000, \
0.07553, 0.06178, 0.05471, 0.03926, 0.02736, 0.02405, 0.01796, 0.01155, \
0.01055, 0.00510, 0.00389, 0.00181, 0.00083, 0.00040, 0.00004, 0.00000, \
0.07758, 0.06366, 0.05647, 0.04069, 0.02844, 0.02501, 0.01870, 0.01204, \
0.01100, 0.00533, 0.00406, 0.00189, 0.00087, 0.00042, 0.00004, 0.00000, \
0.07838, 0.06441, 0.05718, 0.04127, 0.02889, 0.02541, 0.01901, 0.01225, \
0.01120, 0.00543, 0.00414, 0.00193, 0.00089, 0.00043, 0.00005, 0.00000, \
0.07853, 0.06455, 0.05731, 0.04138, 0.02897, 0.02548, 0.01907, 0.01229, \
0.01123, 0.00545, 0.00415, 0.00193, 0.00089, 0.00043, 0.00005, 0.00000 ");
}
ground_capacitance (capacitance_template_WxS) {
index_1 (" 0.0700, 0.0900, 0.1400, 0.2700, 0.2800, 0.5000, 0.9000, 1.5000 ");
index_2 (" 0.0700, 0.0900, 0.1050, 0.1575, 0.2363, 0.2700, 0.3544, 0.5000, \
0.5316, 0.7973, 0.9000, 1.1960, 1.5000, 1.7940, 2.6910, 269.1035 ");
values (" 0.01662, 0.01827, 0.01947, 0.02332, 0.02846, 0.03046, 0.03499, 0.04138, \
0.04254, 0.04976, 0.05153, 0.05488, 0.05650, 0.05728, 0.05783, 0.05790, \
0.01819, 0.01980, 0.02098, 0.02484, 0.03004, 0.03209, 0.03672, 0.04326, \
0.04446, 0.05187, 0.05370, 0.05714, 0.05881, 0.05961, 0.06017, 0.06025, \
0.02200, 0.02359, 0.02476, 0.02866, 0.03404, 0.03617, 0.04099, 0.04784, \
0.04910, 0.05688, 0.05882, 0.06245, 0.06420, 0.06505, 0.06563, 0.06571, \
0.03231, 0.03393, 0.03514, 0.03921, 0.04488, 0.04712, 0.05225, 0.05955, \
0.06089, 0.06922, 0.07130, 0.07520, 0.07710, 0.07801, 0.07863, 0.07871, \
0.03313, 0.03476, 0.03597, 0.04005, 0.04573, 0.04798, 0.05313, 0.06045, \
0.06180, 0.07015, 0.07223, 0.07615, 0.07806, 0.07897, 0.07959, 0.07968, \
0.05194, 0.05362, 0.05487, 0.05908, 0.06495, 0.06729, 0.07262, 0.08022, \
0.08162, 0.09030, 0.09248, 0.09657, 0.09856, 0.09951, 0.10016, 0.10025, \
0.08759, 0.08929, 0.09056, 0.09483, 0.10079, 0.10316, 0.10858, 0.11629, \
0.11771, 0.12654, 0.12876, 0.13291, 0.13495, 0.13592, 0.13671, 0.13667, \
0.14171, 0.14341, 0.14468, 0.14897, 0.15494, 0.15732, 0.16275, 0.17048, \
0.17190, 0.18076, 0.18298, 0.18715, 0.18919, 0.19017, 0.19096, 0.19093 ");
}
}
capacitance () {
top_plane: metal5;
bottom_plane: poly;
lateral_capacitance (capacitance_template_WxS) {
index_1 (" 0.0700, 0.0900, 0.1400, 0.2700, 0.2800, 0.5000, 0.9000, 1.5000 ");
index_2 (" 0.0700, 0.0900, 0.1050, 0.1575, 0.2363, 0.2700, 0.3544, 0.5000, \
0.5316, 0.7973, 0.9000, 1.1960, 1.5000, 1.7940, 2.6910, 269.1035 ");
values (" 0.06875, 0.05585, 0.04934, 0.03544, 0.02513, 0.02231, 0.01716, 0.01168, \
0.01081, 0.00581, 0.00461, 0.00242, 0.00125, 0.00066, 0.00010, 0.00000, \
0.07027, 0.05722, 0.05062, 0.03646, 0.02591, 0.02301, 0.01770, 0.01205, \
0.01115, 0.00600, 0.00475, 0.00250, 0.00129, 0.00069, 0.00010, 0.00000, \
0.07312, 0.05982, 0.05305, 0.03844, 0.02740, 0.02435, 0.01875, 0.01276, \
0.01180, 0.00635, 0.00503, 0.00263, 0.00136, 0.00072, 0.00011, 0.00000, \
0.07738, 0.06372, 0.05671, 0.04142, 0.02968, 0.02640, 0.02035, 0.01384, \
0.01280, 0.00688, 0.00546, 0.00285, 0.00147, 0.00078, 0.00011, 0.00000, \
0.07760, 0.06392, 0.05690, 0.04158, 0.02980, 0.02651, 0.02043, 0.01389, \
0.01285, 0.00691, 0.00548, 0.00286, 0.00148, 0.00079, 0.00011, 0.00000, \
0.08033, 0.06644, 0.05927, 0.04352, 0.03129, 0.02785, 0.02147, 0.01460, \
0.01350, 0.00726, 0.00576, 0.00300, 0.00155, 0.00083, 0.00012, 0.00000, \
0.08151, 0.06753, 0.06030, 0.04438, 0.03194, 0.02843, 0.02193, 0.01491, \
0.01379, 0.00741, 0.00588, 0.00307, 0.00159, 0.00084, 0.00013, 0.00000, \
0.08172, 0.06772, 0.06048, 0.04453, 0.03206, 0.02854, 0.02201, 0.01496, \
0.01384, 0.00743, 0.00590, 0.00308, 0.00159, 0.00085, 0.00013, 0.00000 ");
}
ground_capacitance (capacitance_template_WxS) {
index_1 (" 0.0700, 0.0900, 0.1400, 0.2700, 0.2800, 0.5000, 0.9000, 1.5000 ");
index_2 (" 0.0700, 0.0900, 0.1050, 0.1575, 0.2363, 0.2700, 0.3544, 0.5000, \
0.5316, 0.7973, 0.9000, 1.1960, 1.5000, 1.7940, 2.6910, 269.1035 ");
values (" 0.01398, 0.01537, 0.01635, 0.01947, 0.02356, 0.02515, 0.02880, 0.03419, \
0.03523, 0.04212, 0.04403, 0.04793, 0.05013, 0.05132, 0.05240, 0.05260, \
0.01526, 0.01658, 0.01752, 0.02060, 0.02469, 0.02631, 0.03004, 0.03558, \
0.03664, 0.04374, 0.04571, 0.04972, 0.05199, 0.05321, 0.05432, 0.05453, \
0.01819, 0.01943, 0.02034, 0.02337, 0.02757, 0.02924, 0.03315, 0.03897, \
0.04010, 0.04758, 0.04967, 0.05392, 0.05632, 0.05760, 0.05877, 0.05899, \
0.02572, 0.02695, 0.02788, 0.03101, 0.03545, 0.03724, 0.04144, 0.04774, \
0.04895, 0.05705, 0.05931, 0.06391, 0.06651, 0.06790, 0.06916, 0.06940, \
0.02632, 0.02756, 0.02848, 0.03162, 0.03607, 0.03787, 0.04209, 0.04842, \
0.04963, 0.05777, 0.06003, 0.06465, 0.06726, 0.06866, 0.06992, 0.07016, \
0.04022, 0.04151, 0.04248, 0.04576, 0.05044, 0.05233, 0.05677, 0.06343, \
0.06470, 0.07324, 0.07562, 0.08048, 0.08322, 0.08468, 0.08600, 0.08625, \
0.06726, 0.06859, 0.06957, 0.07294, 0.07773, 0.07968, 0.08422, 0.09102, \
0.09233, 0.10105, 0.10348, 0.10843, 0.11123, 0.11272, 0.11420, 0.11433, \
0.10872, 0.11005, 0.11104, 0.11442, 0.11923, 0.12118, 0.12575, 0.13257, \
0.13388, 0.14263, 0.14507, 0.15004, 0.15285, 0.15435, 0.15584, 0.15596 ");
}
}
capacitance () {
top_plane: metal5;
bottom_plane: SUBSTRATE;
lateral_capacitance (capacitance_template_WxS) {
index_1 (" 0.0700, 0.0900, 0.1400, 0.2700, 0.2800, 0.5000, 0.9000, 1.5000 ");
index_2 (" 0.0700, 0.0900, 0.1050, 0.1575, 0.2363, 0.2700, 0.3544, 0.5000, \
0.5316, 0.7973, 0.9000, 1.1960, 1.5000, 1.7940, 2.6910, 269.1035 ");
values (" 0.06927, 0.05639, 0.04991, 0.03608, 0.02588, 0.02311, 0.01806, 0.01269, \
0.01183, 0.00680, 0.00554, 0.00314, 0.00176, 0.00102, 0.00019, 0.00000, \
0.07081, 0.05779, 0.05122, 0.03715, 0.02671, 0.02387, 0.01866, 0.01311, \
0.01222, 0.00702, 0.00572, 0.00325, 0.00182, 0.00105, 0.00020, 0.00000, \
0.07376, 0.06049, 0.05375, 0.03924, 0.02834, 0.02534, 0.01984, 0.01394, \
0.01299, 0.00746, 0.00608, 0.00344, 0.00193, 0.00111, 0.00021, 0.00000, \
0.07836, 0.06474, 0.05776, 0.04257, 0.03095, 0.02772, 0.02174, 0.01527, \
0.01423, 0.00817, 0.00666, 0.00376, 0.00211, 0.00122, 0.00023, 0.00000, \
0.07860, 0.06497, 0.05797, 0.04275, 0.03109, 0.02784, 0.02184, 0.01534, \
0.01430, 0.00821, 0.00669, 0.00378, 0.00212, 0.00122, 0.00023, 0.00000, \
0.08185, 0.06799, 0.06084, 0.04515, 0.03299, 0.02956, 0.02322, 0.01631, \
0.01520, 0.00873, 0.00711, 0.00402, 0.00226, 0.00130, 0.00024, 0.00000, \
0.08351, 0.06954, 0.06232, 0.04641, 0.03398, 0.03047, 0.02394, 0.01683, \
0.01568, 0.00900, 0.00734, 0.00414, 0.00233, 0.00134, 0.00026, 0.00000, \
0.08390, 0.06991, 0.06266, 0.04670, 0.03422, 0.03068, 0.02411, 0.01695, \
0.01579, 0.00906, 0.00739, 0.00417, 0.00234, 0.00135, 0.00026, 0.00000 ");
}
ground_capacitance (capacitance_template_WxS) {
index_1 (" 0.0700, 0.0900, 0.1400, 0.2700, 0.2800, 0.5000, 0.9000, 1.5000 ");
index_2 (" 0.0700, 0.0900, 0.1050, 0.1575, 0.2363, 0.2700, 0.3544, 0.5000, \
0.5316, 0.7973, 0.9000, 1.1960, 1.5000, 1.7940, 2.6910, 269.1035 ");
values (" 0.01269, 0.01397, 0.01488, 0.01774, 0.02138, 0.02278, 0.02599, 0.03076, \
0.03169, 0.03812, 0.03999, 0.04404, 0.04656, 0.04803, 0.04962, 0.05001, \
0.01388, 0.01509, 0.01595, 0.01872, 0.02233, 0.02375, 0.02702, 0.03192, \
0.03287, 0.03949, 0.04143, 0.04559, 0.04819, 0.04971, 0.05135, 0.05175, \
0.01651, 0.01761, 0.01842, 0.02108, 0.02473, 0.02619, 0.02959, 0.03474, \
0.03576, 0.04275, 0.04481, 0.04924, 0.05200, 0.05360, 0.05533, 0.05576, \
0.02290, 0.02397, 0.02476, 0.02745, 0.03126, 0.03281, 0.03648, 0.04208, \
0.04318, 0.05081, 0.05305, 0.05790, 0.06091, 0.06266, 0.06455, 0.06502, \
0.02340, 0.02447, 0.02526, 0.02796, 0.03179, 0.03334, 0.03702, 0.04265, \
0.04375, 0.05141, 0.05367, 0.05854, 0.06156, 0.06332, 0.06522, 0.06569, \
0.03502, 0.03612, 0.03694, 0.03976, 0.04379, 0.04544, 0.04935, 0.05533, \
0.05650, 0.06464, 0.06704, 0.07220, 0.07542, 0.07729, 0.07930, 0.07980, \
0.05788, 0.05902, 0.05987, 0.06278, 0.06695, 0.06866, 0.07269, 0.07887, \
0.08007, 0.08847, 0.09095, 0.09627, 0.09958, 0.10151, 0.10371, 0.10410, \
0.09334, 0.09449, 0.09535, 0.09828, 0.10248, 0.10420, 0.10827, 0.11449, \
0.11570, 0.12416, 0.12665, 0.13202, 0.13535, 0.13729, 0.13951, 0.13990 ");
}
}
capacitance () {
top_plane: metal6;
bottom_plane: metal2;
lateral_capacitance (capacitance_template_WxS) {
index_1 (" 0.0700, 0.0900, 0.1400, 0.2700, 0.2800, 0.5000, 0.9000, 1.5000 ");
index_2 (" 0.0700, 0.0900, 0.1050, 0.1575, 0.2363, 0.2700, 0.3544, 0.5000, \
0.5316, 0.7973, 0.9000, 1.1960, 1.5000, 1.7940, 2.6910, 269.1035 ");
values (" 0.06328, 0.05004, 0.04332, 0.02894, 0.01844, 0.01568, 0.01092, 0.00647, \
0.00583, 0.00269, 0.00205, 0.00101, 0.00051, 0.00027, 0.00004, 0.00000, \
0.06428, 0.05094, 0.04416, 0.02961, 0.01897, 0.01616, 0.01130, 0.00673, \
0.00608, 0.00282, 0.00215, 0.00107, 0.00054, 0.00029, 0.00005, 0.00000, \
0.06611, 0.05261, 0.04573, 0.03092, 0.02002, 0.01713, 0.01208, 0.00729, \
0.00659, 0.00310, 0.00238, 0.00118, 0.00060, 0.00032, 0.00005, 0.00000, \
0.06900, 0.05532, 0.04832, 0.03317, 0.02187, 0.01885, 0.01351, 0.00832, \
0.00756, 0.00365, 0.00282, 0.00142, 0.00073, 0.00039, 0.00006, 0.00000, \
0.06917, 0.05548, 0.04847, 0.03330, 0.02199, 0.01895, 0.01360, 0.00839, \
0.00762, 0.00369, 0.00285, 0.00143, 0.00074, 0.00040, 0.00006, 0.00000, \
0.07169, 0.05788, 0.05078, 0.03535, 0.02372, 0.02057, 0.01496, 0.00941, \
0.00858, 0.00425, 0.00331, 0.00168, 0.00087, 0.00047, 0.00008, 0.00000, \
0.07363, 0.05974, 0.05259, 0.03698, 0.02512, 0.02188, 0.01608, 0.01025, \
0.00938, 0.00472, 0.00369, 0.00190, 0.00099, 0.00054, 0.00009, 0.00000, \
0.07450, 0.06058, 0.05340, 0.03771, 0.02575, 0.02247, 0.01659, 0.01064, \
0.00974, 0.00494, 0.00387, 0.00200, 0.00104, 0.00057, 0.00009, 0.00000 ");
}
ground_capacitance (capacitance_template_WxS) {
index_1 (" 0.0700, 0.0900, 0.1400, 0.2700, 0.2800, 0.5000, 0.9000, 1.5000 ");
index_2 (" 0.0700, 0.0900, 0.1050, 0.1575, 0.2363, 0.2700, 0.3544, 0.5000, \
0.5316, 0.7973, 0.9000, 1.1960, 1.5000, 1.7940, 2.6910, 269.1035 ");
values (" 0.03146, 0.03484, 0.03729, 0.04478, 0.05355, 0.05657, 0.06252, 0.06935, \
0.07042, 0.07598, 0.07707, 0.07920, 0.08012, 0.08067, 0.08116, 0.08124, \
0.03547, 0.03883, 0.04126, 0.04874, 0.05753, 0.06058, 0.06661, 0.07358, \
0.07468, 0.08043, 0.08158, 0.08379, 0.08477, 0.08534, 0.08584, 0.08593, \
0.04538, 0.04869, 0.05109, 0.05851, 0.06737, 0.07047, 0.07664, 0.08389, \
0.08505, 0.09117, 0.09243, 0.09485, 0.09594, 0.09657, 0.09711, 0.09722, \
0.07091, 0.07417, 0.07654, 0.08393, 0.09288, 0.09605, 0.10248, 0.11020, \
0.11146, 0.11827, 0.11972, 0.12254, 0.12385, 0.12459, 0.12524, 0.12537, \
0.07288, 0.07613, 0.07850, 0.08589, 0.09485, 0.09802, 0.10447, 0.11222, \
0.11348, 0.12034, 0.12180, 0.12464, 0.12596, 0.12671, 0.12737, 0.12750, \
0.11621, 0.11946, 0.12182, 0.12924, 0.13832, 0.14157, 0.14825, 0.15644, \
0.15779, 0.16531, 0.16696, 0.17019, 0.17174, 0.17261, 0.17339, 0.17355, \
0.19583, 0.19909, 0.20147, 0.20895, 0.21816, 0.22149, 0.22836, 0.23691, \
0.23834, 0.24639, 0.24820, 0.25176, 0.25351, 0.25448, 0.25539, 0.25554, \
0.31643, 0.31970, 0.32209, 0.32961, 0.33889, 0.34226, 0.34923, 0.35793, \
0.35940, 0.36769, 0.36958, 0.37328, 0.37512, 0.37614, 0.37710, 0.37726 ");
}
}
capacitance () {
top_plane: metal6;
bottom_plane: metal1;
lateral_capacitance (capacitance_template_WxS) {
index_1 (" 0.0700, 0.0900, 0.1400, 0.2700, 0.2800, 0.5000, 0.9000, 1.5000 ");
index_2 (" 0.0700, 0.0900, 0.1050, 0.1575, 0.2363, 0.2700, 0.3544, 0.5000, \
0.5316, 0.7973, 0.9000, 1.1960, 1.5000, 1.7940, 2.6910, 269.1035 ");
values (" 0.06842, 0.05547, 0.04893, 0.03493, 0.02454, 0.02171, 0.01658, 0.01124, \
0.01041, 0.00572, 0.00462, 0.00258, 0.00146, 0.00085, 0.00017, 0.00000, \
0.06987, 0.05678, 0.05014, 0.03590, 0.02528, 0.02238, 0.01712, 0.01162, \
0.01076, 0.00593, 0.00478, 0.00268, 0.00152, 0.00089, 0.00018, 0.00000, \
0.07258, 0.05924, 0.05244, 0.03778, 0.02673, 0.02370, 0.01817, 0.01238, \
0.01146, 0.00635, 0.00513, 0.00287, 0.00163, 0.00096, 0.00020, 0.00000, \
0.07665, 0.06299, 0.05598, 0.04072, 0.02906, 0.02583, 0.01991, 0.01365, \
0.01266, 0.00708, 0.00574, 0.00323, 0.00184, 0.00108, 0.00022, 0.00000, \
0.07686, 0.06319, 0.05617, 0.04088, 0.02919, 0.02595, 0.02001, 0.01372, \
0.01273, 0.00712, 0.00577, 0.00325, 0.00185, 0.00109, 0.00022, 0.00000, \
0.07981, 0.06595, 0.05880, 0.04315, 0.03106, 0.02768, 0.02146, 0.01482, \
0.01377, 0.00777, 0.00632, 0.00358, 0.00205, 0.00121, 0.00025, 0.00000, \
0.08175, 0.06781, 0.06060, 0.04475, 0.03243, 0.02896, 0.02256, 0.01567, \
0.01457, 0.00829, 0.00675, 0.00385, 0.00221, 0.00131, 0.00028, 0.00000, \
0.08258, 0.06860, 0.06137, 0.04545, 0.03303, 0.02952, 0.02304, 0.01604, \
0.01492, 0.00851, 0.00695, 0.00397, 0.00228, 0.00135, 0.00029, 0.00000 ");
}
ground_capacitance (capacitance_template_WxS) {
index_1 (" 0.0700, 0.0900, 0.1400, 0.2700, 0.2800, 0.5000, 0.9000, 1.5000 ");
index_2 (" 0.0700, 0.0900, 0.1050, 0.1575, 0.2363, 0.2700, 0.3544, 0.5000, \
0.5316, 0.7973, 0.9000, 1.1960, 1.5000, 1.7940, 2.6910, 269.1035 ");
values (" 0.01493, 0.01647, 0.01758, 0.02112, 0.02571, 0.02746, 0.03140, 0.03696, \
0.03799, 0.04461, 0.04638, 0.05000, 0.05209, 0.05330, 0.05461, 0.05497, \
0.01641, 0.01790, 0.01898, 0.02246, 0.02705, 0.02882, 0.03283, 0.03851, \
0.03957, 0.04638, 0.04820, 0.05192, 0.05410, 0.05536, 0.05671, 0.05708, \
0.01989, 0.02130, 0.02234, 0.02576, 0.03040, 0.03222, 0.03635, 0.04227, \
0.04339, 0.05055, 0.05249, 0.05647, 0.05880, 0.06014, 0.06158, 0.06198, \
0.02868, 0.03007, 0.03109, 0.03454, 0.03932, 0.04121, 0.04557, 0.05188, \
0.05306, 0.06082, 0.06294, 0.06734, 0.06993, 0.07144, 0.07307, 0.07353, \
0.02937, 0.03076, 0.03178, 0.03523, 0.04002, 0.04192, 0.04628, 0.05262, \
0.05380, 0.06159, 0.06373, 0.06815, 0.07076, 0.07227, 0.07391, 0.07438, \
0.04487, 0.04627, 0.04731, 0.05082, 0.05573, 0.05769, 0.06222, 0.06885, \
0.07011, 0.07838, 0.08068, 0.08546, 0.08832, 0.08999, 0.09181, 0.09232, \
0.07414, 0.07556, 0.07661, 0.08018, 0.08518, 0.08719, 0.09185, 0.09871, \
0.10001, 0.10867, 0.11109, 0.11615, 0.11921, 0.12099, 0.12309, 0.12352, \
0.11910, 0.12053, 0.12159, 0.12519, 0.13025, 0.13228, 0.13700, 0.14396, \
0.14529, 0.15411, 0.15659, 0.16178, 0.16492, 0.16676, 0.16892, 0.16937 ");
}
}
capacitance () {
top_plane: metal6;
bottom_plane: poly;
lateral_capacitance (capacitance_template_WxS) {
index_1 (" 0.0700, 0.0900, 0.1400, 0.2700, 0.2800, 0.5000, 0.9000, 1.5000 ");
index_2 (" 0.0700, 0.0900, 0.1050, 0.1575, 0.2363, 0.2700, 0.3544, 0.5000, \
0.5316, 0.7973, 0.9000, 1.1960, 1.5000, 1.7940, 2.6910, 269.1035 ");
values (" 0.06954, 0.05667, 0.05019, 0.03638, 0.02621, 0.02346, 0.01846, 0.01319, \
0.01234, 0.00742, 0.00617, 0.00374, 0.00227, 0.00142, 0.00034, 0.00000, \
0.07109, 0.05807, 0.05150, 0.03745, 0.02706, 0.02423, 0.01909, 0.01364, \
0.01277, 0.00768, 0.00638, 0.00388, 0.00235, 0.00147, 0.00036, 0.00000, \
0.07404, 0.06079, 0.05405, 0.03958, 0.02874, 0.02577, 0.02035, 0.01456, \
0.01363, 0.00820, 0.00683, 0.00413, 0.00251, 0.00157, 0.00038, 0.00000, \
0.07875, 0.06516, 0.05820, 0.04307, 0.03155, 0.02835, 0.02246, 0.01611, \
0.01509, 0.00911, 0.00759, 0.00461, 0.00280, 0.00176, 0.00043, 0.00000, \
0.07901, 0.06540, 0.05843, 0.04327, 0.03170, 0.02849, 0.02258, 0.01620, \
0.01517, 0.00916, 0.00764, 0.00463, 0.00282, 0.00177, 0.00043, 0.00000, \
0.08262, 0.06878, 0.06165, 0.04604, 0.03397, 0.03058, 0.02432, 0.01751, \
0.01641, 0.00994, 0.00830, 0.00505, 0.00308, 0.00193, 0.00047, 0.00000, \
0.08490, 0.07095, 0.06374, 0.04788, 0.03551, 0.03202, 0.02553, 0.01844, \
0.01729, 0.01051, 0.00878, 0.00535, 0.00327, 0.00206, 0.00051, 0.00000, \
0.08577, 0.07179, 0.06455, 0.04860, 0.03613, 0.03260, 0.02602, 0.01882, \
0.01765, 0.01075, 0.00899, 0.00548, 0.00335, 0.00211, 0.00053, 0.00000 ");
}
ground_capacitance (capacitance_template_WxS) {
index_1 (" 0.0700, 0.0900, 0.1400, 0.2700, 0.2800, 0.5000, 0.9000, 1.5000 ");
index_2 (" 0.0700, 0.0900, 0.1050, 0.1575, 0.2363, 0.2700, 0.3544, 0.5000, \
0.5316, 0.7973, 0.9000, 1.1960, 1.5000, 1.7940, 2.6910, 269.1035 ");
values (" 0.01201, 0.01327, 0.01417, 0.01698, 0.02053, 0.02187, 0.02491, 0.02938, \
0.03024, 0.03625, 0.03803, 0.04198, 0.04458, 0.04621, 0.04826, 0.04897, \
0.01320, 0.01439, 0.01524, 0.01795, 0.02144, 0.02278, 0.02587, 0.03043, \
0.03132, 0.03750, 0.03935, 0.04341, 0.04610, 0.04779, 0.04991, 0.05064, \
0.01582, 0.01689, 0.01767, 0.02023, 0.02369, 0.02506, 0.02823, 0.03301, \
0.03395, 0.04047, 0.04243, 0.04677, 0.04964, 0.05143, 0.05369, 0.05448, \
0.02191, 0.02291, 0.02365, 0.02616, 0.02970, 0.03113, 0.03451, 0.03967, \
0.04068, 0.04780, 0.04995, 0.05474, 0.05791, 0.05990, 0.06242, 0.06330, \
0.02238, 0.02338, 0.02412, 0.02663, 0.03018, 0.03161, 0.03500, 0.04018, \
0.04120, 0.04836, 0.05051, 0.05533, 0.05852, 0.06052, 0.06306, 0.06394, \
0.03303, 0.03404, 0.03480, 0.03738, 0.04108, 0.04258, 0.04616, 0.05166, \
0.05274, 0.06039, 0.06272, 0.06791, 0.07137, 0.07354, 0.07631, 0.07728, \
0.05376, 0.05480, 0.05558, 0.05824, 0.06205, 0.06361, 0.06731, 0.07304, \
0.07417, 0.08219, 0.08463, 0.09008, 0.09374, 0.09605, 0.09911, 0.10003, \
0.08610, 0.08715, 0.08794, 0.09063, 0.09449, 0.09608, 0.09984, 0.10566, \
0.10681, 0.11497, 0.11746, 0.12303, 0.12677, 0.12913, 0.13227, 0.13321 ");
}
}
capacitance () {
top_plane: metal6;
bottom_plane: SUBSTRATE;
lateral_capacitance (capacitance_template_WxS) {
index_1 (" 0.0700, 0.0900, 0.1400, 0.2700, 0.2800, 0.5000, 0.9000, 1.5000 ");
index_2 (" 0.0700, 0.0900, 0.1050, 0.1575, 0.2363, 0.2700, 0.3544, 0.5000, \
0.5316, 0.7973, 0.9000, 1.1960, 1.5000, 1.7940, 2.6910, 269.1035 ");
values (" 0.07013, 0.05730, 0.05085, 0.03712, 0.02706, 0.02435, 0.01945, 0.01429, \
0.01346, 0.00854, 0.00725, 0.00465, 0.00298, 0.00196, 0.00055, 0.00000, \
0.07171, 0.05874, 0.05219, 0.03823, 0.02795, 0.02518, 0.02013, 0.01480, \
0.01394, 0.00884, 0.00751, 0.00482, 0.00309, 0.00203, 0.00057, 0.00000, \
0.07476, 0.06155, 0.05484, 0.04047, 0.02976, 0.02684, 0.02152, 0.01583, \
0.01491, 0.00946, 0.00804, 0.00515, 0.00330, 0.00217, 0.00061, 0.00000, \
0.07979, 0.06624, 0.05931, 0.04429, 0.03288, 0.02972, 0.02391, 0.01763, \
0.01661, 0.01055, 0.00897, 0.00574, 0.00368, 0.00242, 0.00068, 0.00000, \
0.08008, 0.06651, 0.05956, 0.04450, 0.03306, 0.02989, 0.02405, 0.01774, \
0.01671, 0.01061, 0.00902, 0.00577, 0.00370, 0.00243, 0.00068, 0.00000, \
0.08418, 0.07038, 0.06327, 0.04772, 0.03572, 0.03235, 0.02611, 0.01930, \
0.01819, 0.01156, 0.00983, 0.00629, 0.00404, 0.00266, 0.00075, 0.00000, \
0.08693, 0.07299, 0.06578, 0.04994, 0.03758, 0.03408, 0.02757, 0.02041, \
0.01924, 0.01225, 0.01042, 0.00667, 0.00429, 0.00282, 0.00081, 0.00000, \
0.08796, 0.07398, 0.06673, 0.05078, 0.03829, 0.03475, 0.02814, 0.02085, \
0.01966, 0.01252, 0.01065, 0.00682, 0.00439, 0.00289, 0.00082, 0.00000 ");
}
ground_capacitance (capacitance_template_WxS) {
index_1 (" 0.0700, 0.0900, 0.1400, 0.2700, 0.2800, 0.5000, 0.9000, 1.5000 ");
index_2 (" 0.0700, 0.0900, 0.1050, 0.1575, 0.2363, 0.2700, 0.3544, 0.5000, \
0.5316, 0.7973, 0.9000, 1.1960, 1.5000, 1.7940, 2.6910, 269.1035 ");
values (" 0.01052, 0.01166, 0.01248, 0.01500, 0.01812, 0.01928, 0.02188, 0.02569, \
0.02644, 0.03181, 0.03349, 0.03741, 0.04022, 0.04210, 0.04476, 0.04588, \
0.01161, 0.01268, 0.01343, 0.01583, 0.01886, 0.02001, 0.02262, 0.02651, \
0.02728, 0.03281, 0.03455, 0.03858, 0.04148, 0.04343, 0.04618, 0.04734, \
0.01393, 0.01487, 0.01554, 0.01773, 0.02066, 0.02181, 0.02447, 0.02852, \
0.02934, 0.03518, 0.03703, 0.04135, 0.04444, 0.04651, 0.04944, 0.05068, \
0.01894, 0.01977, 0.02038, 0.02245, 0.02537, 0.02655, 0.02937, 0.03376, \
0.03464, 0.04107, 0.04311, 0.04789, 0.05132, 0.05362, 0.05688, 0.05827, \
0.01931, 0.02014, 0.02075, 0.02282, 0.02574, 0.02693, 0.02976, 0.03417, \
0.03505, 0.04152, 0.04357, 0.04838, 0.05182, 0.05413, 0.05742, 0.05881, \
0.02772, 0.02855, 0.02917, 0.03128, 0.03433, 0.03559, 0.03859, 0.04333, \
0.04428, 0.05126, 0.05349, 0.05870, 0.06245, 0.06496, 0.06855, 0.07007, \
0.04434, 0.04519, 0.04583, 0.04803, 0.05121, 0.05253, 0.05569, 0.06068, \
0.06168, 0.06905, 0.07141, 0.07691, 0.08088, 0.08354, 0.08745, 0.08896, \
0.07072, 0.07159, 0.07224, 0.07448, 0.07772, 0.07906, 0.08228, 0.08738, \
0.08840, 0.09592, 0.09833, 0.10395, 0.10801, 0.11072, 0.11472, 0.11627 ");
}
}
capacitance () {
top_plane: metal7;
bottom_plane: metal2;
lateral_capacitance (capacitance_template_WxS) {
index_1 (" 0.0700, 0.0900, 0.1400, 0.2700, 0.2800, 0.5000, 0.9000, 1.5000 ");
index_2 (" 0.0700, 0.0900, 0.1050, 0.1575, 0.2363, 0.2700, 0.3544, 0.5000, \
0.5316, 0.7973, 0.9000, 1.1960, 1.5000, 1.7940, 2.6910, 269.1035 ");
values (" 0.06347, 0.05024, 0.04352, 0.02916, 0.01869, 0.01595, 0.01121, 0.00679, \
0.00616, 0.00302, 0.00238, 0.00129, 0.00073, 0.00044, 0.00011, 0.00000, \
0.06448, 0.05115, 0.04437, 0.02984, 0.01923, 0.01645, 0.01162, 0.00709, \
0.00644, 0.00318, 0.00251, 0.00137, 0.00078, 0.00047, 0.00011, 0.00000, \
0.06633, 0.05284, 0.04597, 0.03120, 0.02034, 0.01747, 0.01247, 0.00772, \
0.00703, 0.00354, 0.00280, 0.00154, 0.00088, 0.00054, 0.00013, 0.00000, \
0.06935, 0.05569, 0.04870, 0.03360, 0.02238, 0.01938, 0.01409, 0.00895, \
0.00820, 0.00426, 0.00341, 0.00191, 0.00111, 0.00068, 0.00017, 0.00000, \
0.06953, 0.05586, 0.04886, 0.03375, 0.02250, 0.01950, 0.01419, 0.00903, \
0.00827, 0.00431, 0.00345, 0.00193, 0.00113, 0.00069, 0.00017, 0.00000, \
0.07238, 0.05859, 0.05151, 0.03615, 0.02460, 0.02147, 0.01591, 0.01039, \
0.00956, 0.00515, 0.00416, 0.00238, 0.00140, 0.00087, 0.00022, 0.00000, \
0.07496, 0.06110, 0.05396, 0.03841, 0.02661, 0.02338, 0.01761, 0.01175, \
0.01086, 0.00603, 0.00492, 0.00286, 0.00171, 0.00107, 0.00027, 0.00000, \
0.07654, 0.06263, 0.05546, 0.03980, 0.02786, 0.02458, 0.01867, 0.01262, \
0.01170, 0.00660, 0.00541, 0.00318, 0.00192, 0.00120, 0.00031, 0.00000 ");
}
ground_capacitance (capacitance_template_WxS) {
index_1 (" 0.0700, 0.0900, 0.1400, 0.2700, 0.2800, 0.5000, 0.9000, 1.5000 ");
index_2 (" 0.0700, 0.0900, 0.1050, 0.1575, 0.2363, 0.2700, 0.3544, 0.5000, \
0.5316, 0.7973, 0.9000, 1.1960, 1.5000, 1.7940, 2.6910, 269.1035 ");
values (" 0.03097, 0.03432, 0.03675, 0.04417, 0.05285, 0.05583, 0.06167, 0.06835, \
0.06940, 0.07488, 0.07597, 0.07816, 0.07919, 0.07983, 0.08053, 0.08075, \
0.03496, 0.03829, 0.04070, 0.04810, 0.05677, 0.05977, 0.06568, 0.07249, \
0.07356, 0.07923, 0.08038, 0.08266, 0.08375, 0.08443, 0.08516, 0.08539, \
0.04480, 0.04808, 0.05044, 0.05776, 0.06644, 0.06947, 0.07550, 0.08255, \
0.08369, 0.08972, 0.09098, 0.09349, 0.09472, 0.09547, 0.09629, 0.09655, \
0.06997, 0.07316, 0.07548, 0.08270, 0.09139, 0.09447, 0.10070, 0.10819, \
0.10942, 0.11615, 0.11762, 0.12057, 0.12208, 0.12299, 0.12401, 0.12436, \
0.07190, 0.07508, 0.07740, 0.08461, 0.09331, 0.09639, 0.10264, 0.11016, \
0.11139, 0.11816, 0.11964, 0.12262, 0.12415, 0.12507, 0.12611, 0.12646, \
0.11420, 0.11735, 0.11965, 0.12683, 0.13560, 0.13874, 0.14519, 0.15312, \
0.15445, 0.16192, 0.16363, 0.16711, 0.16895, 0.17008, 0.17137, 0.17182, \
0.19147, 0.19462, 0.19692, 0.20412, 0.21299, 0.21619, 0.22283, 0.23116, \
0.23257, 0.24073, 0.24266, 0.24663, 0.24882, 0.25016, 0.25177, 0.25229, \
0.30833, 0.31149, 0.31380, 0.32104, 0.32999, 0.33324, 0.34001, 0.34859, \
0.35005, 0.35863, 0.36071, 0.36499, 0.36740, 0.36889, 0.37069, 0.37128 ");
}
}
capacitance () {
top_plane: metal7;
bottom_plane: metal1;
lateral_capacitance (capacitance_template_WxS) {
index_1 (" 0.0700, 0.0900, 0.1400, 0.2700, 0.2800, 0.5000, 0.9000, 1.5000 ");
index_2 (" 0.0700, 0.0900, 0.1050, 0.1575, 0.2363, 0.2700, 0.3544, 0.5000, \
0.5316, 0.7973, 0.9000, 1.1960, 1.5000, 1.7940, 2.6910, 269.1035 ");
values (" 0.06870, 0.05576, 0.04923, 0.03526, 0.02489, 0.02207, 0.01698, 0.01172, \
0.01090, 0.00628, 0.00518, 0.00311, 0.00191, 0.00123, 0.00035, 0.00000, \
0.07016, 0.05708, 0.05045, 0.03623, 0.02565, 0.02277, 0.01755, 0.01213, \
0.01128, 0.00652, 0.00538, 0.00325, 0.00200, 0.00129, 0.00036, 0.00000, \
0.07288, 0.05956, 0.05277, 0.03814, 0.02715, 0.02414, 0.01867, 0.01296, \
0.01207, 0.00702, 0.00581, 0.00351, 0.00217, 0.00140, 0.00040, 0.00000, \
0.07707, 0.06343, 0.05643, 0.04123, 0.02966, 0.02646, 0.02061, 0.01445, \
0.01348, 0.00795, 0.00661, 0.00403, 0.00251, 0.00163, 0.00046, 0.00000, \
0.07730, 0.06364, 0.05664, 0.04141, 0.02980, 0.02659, 0.02073, 0.01454, \
0.01356, 0.00801, 0.00666, 0.00406, 0.00253, 0.00165, 0.00047, 0.00000, \
0.08057, 0.06674, 0.05961, 0.04403, 0.03203, 0.02868, 0.02254, 0.01598, \
0.01494, 0.00896, 0.00749, 0.00462, 0.00291, 0.00190, 0.00055, 0.00000, \
0.08315, 0.06923, 0.06203, 0.04624, 0.03399, 0.03055, 0.02419, 0.01734, \
0.01625, 0.00989, 0.00830, 0.00518, 0.00329, 0.00216, 0.00064, 0.00000, \
0.08466, 0.07069, 0.06346, 0.04757, 0.03518, 0.03168, 0.02521, 0.01819, \
0.01706, 0.01047, 0.00881, 0.00553, 0.00353, 0.00232, 0.00069, 0.00000 ");
}
ground_capacitance (capacitance_template_WxS) {
index_1 (" 0.0700, 0.0900, 0.1400, 0.2700, 0.2800, 0.5000, 0.9000, 1.5000 ");
index_2 (" 0.0700, 0.0900, 0.1050, 0.1575, 0.2363, 0.2700, 0.3544, 0.5000, \
0.5316, 0.7973, 0.9000, 1.1960, 1.5000, 1.7940, 2.6910, 269.1035 ");
values (" 0.01421, 0.01572, 0.01681, 0.02028, 0.02476, 0.02646, 0.03025, 0.03554, \
0.03652, 0.04282, 0.04452, 0.04809, 0.05027, 0.05161, 0.05330, 0.05400, \
0.01568, 0.01714, 0.01819, 0.02160, 0.02606, 0.02777, 0.03160, 0.03699, \
0.03799, 0.04446, 0.04622, 0.04989, 0.05216, 0.05355, 0.05531, 0.05605, \
0.01911, 0.02048, 0.02149, 0.02480, 0.02925, 0.03099, 0.03490, 0.04050, \
0.04154, 0.04834, 0.05021, 0.05414, 0.05657, 0.05806, 0.05997, 0.06078, \
0.02757, 0.02889, 0.02986, 0.03313, 0.03762, 0.03940, 0.04348, 0.04938, \
0.05050, 0.05784, 0.05989, 0.06425, 0.06700, 0.06870, 0.07091, 0.07186, \
0.02822, 0.02954, 0.03051, 0.03378, 0.03828, 0.04006, 0.04414, 0.05006, \
0.05118, 0.05855, 0.06061, 0.06501, 0.06777, 0.06949, 0.07171, 0.07268, \
0.04270, 0.04401, 0.04497, 0.04824, 0.05280, 0.05462, 0.05883, 0.06500, \
0.06617, 0.07403, 0.07627, 0.08109, 0.08418, 0.08612, 0.08868, 0.08980, \
0.06965, 0.07096, 0.07193, 0.07522, 0.07983, 0.08169, 0.08600, 0.09239, \
0.09362, 0.10192, 0.10432, 0.10955, 0.11296, 0.11512, 0.11814, 0.11931, \
0.11094, 0.11225, 0.11323, 0.11655, 0.12122, 0.12311, 0.12749, 0.13404, \
0.13530, 0.14388, 0.14638, 0.15186, 0.15547, 0.15777, 0.16102, 0.16230 ");
}
}
capacitance () {
top_plane: metal7;
bottom_plane: poly;
lateral_capacitance (capacitance_template_WxS) {
index_1 (" 0.0700, 0.0900, 0.1400, 0.2700, 0.2800, 0.5000, 0.9000, 1.5000 ");
index_2 (" 0.0700, 0.0900, 0.1050, 0.1575, 0.2363, 0.2700, 0.3544, 0.5000, \
0.5316, 0.7973, 0.9000, 1.1960, 1.5000, 1.7940, 2.6910, 269.1035 ");
values (" 0.06988, 0.05703, 0.05056, 0.03677, 0.02663, 0.02389, 0.01893, 0.01373, \
0.01291, 0.00807, 0.00684, 0.00440, 0.00287, 0.00193, 0.00061, 0.00000, \
0.07144, 0.05844, 0.05187, 0.03784, 0.02749, 0.02468, 0.01958, 0.01422, \
0.01337, 0.00837, 0.00709, 0.00458, 0.00299, 0.00201, 0.00064, 0.00000, \
0.07441, 0.06117, 0.05444, 0.04000, 0.02922, 0.02627, 0.02091, 0.01522, \
0.01430, 0.00899, 0.00762, 0.00491, 0.00321, 0.00217, 0.00069, 0.00000, \
0.07922, 0.06565, 0.05870, 0.04363, 0.03219, 0.02903, 0.02321, 0.01698, \
0.01598, 0.01010, 0.00859, 0.00556, 0.00365, 0.00247, 0.00079, 0.00000, \
0.07949, 0.06591, 0.05894, 0.04384, 0.03236, 0.02918, 0.02335, 0.01709, \
0.01608, 0.01017, 0.00865, 0.00560, 0.00368, 0.00249, 0.00079, 0.00000, \
0.08342, 0.06962, 0.06250, 0.04696, 0.03498, 0.03163, 0.02544, 0.01873, \
0.01765, 0.01125, 0.00960, 0.00625, 0.00413, 0.00281, 0.00090, 0.00000, \
0.08633, 0.07240, 0.06521, 0.04940, 0.03711, 0.03364, 0.02721, 0.02017, \
0.01903, 0.01223, 0.01047, 0.00686, 0.00456, 0.00311, 0.00102, 0.00000, \
0.08786, 0.07389, 0.06666, 0.05074, 0.03830, 0.03478, 0.02822, 0.02101, \
0.01984, 0.01282, 0.01099, 0.00723, 0.00481, 0.00329, 0.00108, 0.00000 ");
}
ground_capacitance (capacitance_template_WxS) {
index_1 (" 0.0700, 0.0900, 0.1400, 0.2700, 0.2800, 0.5000, 0.9000, 1.5000 ");
index_2 (" 0.0700, 0.0900, 0.1050, 0.1575, 0.2363, 0.2700, 0.3544, 0.5000, \
0.5316, 0.7973, 0.9000, 1.1960, 1.5000, 1.7940, 2.6910, 269.1035 ");
values (" 0.01117, 0.01238, 0.01325, 0.01597, 0.01941, 0.02071, 0.02360, 0.02778, \
0.02858, 0.03416, 0.03583, 0.03962, 0.04224, 0.04397, 0.04646, 0.04770, \
0.01233, 0.01347, 0.01430, 0.01692, 0.02028, 0.02157, 0.02448, 0.02873, \
0.02955, 0.03529, 0.03702, 0.04090, 0.04361, 0.04541, 0.04800, 0.04929, \
0.01489, 0.01592, 0.01667, 0.01912, 0.02240, 0.02369, 0.02664, 0.03104, \
0.03191, 0.03794, 0.03978, 0.04394, 0.04683, 0.04875, 0.05152, 0.05292, \
0.02069, 0.02162, 0.02231, 0.02464, 0.02789, 0.02920, 0.03229, 0.03699, \
0.03791, 0.04447, 0.04649, 0.05109, 0.05432, 0.05647, 0.05962, 0.06122, \
0.02112, 0.02205, 0.02274, 0.02506, 0.02832, 0.02963, 0.03273, 0.03745, \
0.03837, 0.04497, 0.04699, 0.05162, 0.05487, 0.05704, 0.06021, 0.06182, \
0.03077, 0.03169, 0.03238, 0.03472, 0.03805, 0.03942, 0.04264, 0.04762, \
0.04861, 0.05566, 0.05786, 0.06290, 0.06647, 0.06887, 0.07244, 0.07427, \
0.04920, 0.05014, 0.05083, 0.05321, 0.05663, 0.05803, 0.06136, 0.06655, \
0.06759, 0.07504, 0.07737, 0.08278, 0.08665, 0.08927, 0.09331, 0.09525, \
0.07790, 0.07884, 0.07955, 0.08196, 0.08543, 0.08685, 0.09025, 0.09557, \
0.09663, 0.10432, 0.10674, 0.11237, 0.11642, 0.11917, 0.12344, 0.12550 ");
}
}
capacitance () {
top_plane: metal7;
bottom_plane: SUBSTRATE;
lateral_capacitance (capacitance_template_WxS) {
index_1 (" 0.0700, 0.0900, 0.1400, 0.2700, 0.2800, 0.5000, 0.9000, 1.5000 ");
index_2 (" 0.0700, 0.0900, 0.1050, 0.1575, 0.2363, 0.2700, 0.3544, 0.5000, \
0.5316, 0.7973, 0.9000, 1.1960, 1.5000, 1.7940, 2.6910, 269.1035 ");
values (" 0.07051, 0.05770, 0.05126, 0.03756, 0.02753, 0.02484, 0.01997, 0.01489, \
0.01408, 0.00926, 0.00800, 0.00541, 0.00369, 0.00259, 0.00090, 0.00000, \
0.07211, 0.05915, 0.05261, 0.03867, 0.02844, 0.02567, 0.02068, 0.01543, \
0.01459, 0.00960, 0.00829, 0.00562, 0.00384, 0.00269, 0.00094, 0.00000, \
0.07518, 0.06198, 0.05528, 0.04094, 0.03029, 0.02739, 0.02213, 0.01654, \
0.01564, 0.01031, 0.00891, 0.00603, 0.00411, 0.00289, 0.00101, 0.00000, \
0.08030, 0.06678, 0.05986, 0.04489, 0.03357, 0.03044, 0.02471, 0.01855, \
0.01755, 0.01161, 0.01004, 0.00680, 0.00466, 0.00327, 0.00115, 0.00000, \
0.08060, 0.06705, 0.06012, 0.04512, 0.03376, 0.03062, 0.02487, 0.01867, \
0.01767, 0.01169, 0.01011, 0.00685, 0.00469, 0.00329, 0.00116, 0.00000, \
0.08502, 0.07124, 0.06415, 0.04867, 0.03676, 0.03343, 0.02727, 0.02057, \
0.01948, 0.01294, 0.01121, 0.00761, 0.00523, 0.00368, 0.00130, 0.00000, \
0.08838, 0.07446, 0.06727, 0.05148, 0.03919, 0.03573, 0.02928, 0.02218, \
0.02102, 0.01404, 0.01218, 0.00830, 0.00572, 0.00403, 0.00144, 0.00000, \
0.09007, 0.07609, 0.06886, 0.05293, 0.04048, 0.03694, 0.03036, 0.02307, \
0.02188, 0.01465, 0.01273, 0.00869, 0.00600, 0.00424, 0.00152, 0.00000 ");
}
ground_capacitance (capacitance_template_WxS) {
index_1 (" 0.0700, 0.0900, 0.1400, 0.2700, 0.2800, 0.5000, 0.9000, 1.5000 ");
index_2 (" 0.0700, 0.0900, 0.1050, 0.1575, 0.2363, 0.2700, 0.3544, 0.5000, \
0.5316, 0.7973, 0.9000, 1.1960, 1.5000, 1.7940, 2.6910, 269.1035 ");
values (" 0.00958, 0.01066, 0.01144, 0.01386, 0.01686, 0.01797, 0.02043, 0.02395, \
0.02464, 0.02953, 0.03107, 0.03475, 0.03750, 0.03944, 0.04254, 0.04436, \
0.01063, 0.01164, 0.01237, 0.01467, 0.01757, 0.01866, 0.02111, 0.02468, \
0.02537, 0.03040, 0.03200, 0.03577, 0.03861, 0.04063, 0.04384, 0.04573, \
0.01288, 0.01378, 0.01442, 0.01650, 0.01925, 0.02031, 0.02275, 0.02643, \
0.02716, 0.03245, 0.03415, 0.03819, 0.04123, 0.04337, 0.04680, 0.04884, \
0.01761, 0.01838, 0.01894, 0.02082, 0.02346, 0.02452, 0.02704, 0.03096, \
0.03174, 0.03753, 0.03940, 0.04389, 0.04727, 0.04967, 0.05355, 0.05586, \
0.01795, 0.01871, 0.01927, 0.02115, 0.02379, 0.02485, 0.02738, 0.03131, \
0.03210, 0.03791, 0.03980, 0.04431, 0.04771, 0.05013, 0.05403, 0.05636, \
0.02539, 0.02612, 0.02667, 0.02854, 0.03123, 0.03234, 0.03499, 0.03918, \
0.04003, 0.04631, 0.04836, 0.05330, 0.05704, 0.05971, 0.06405, 0.06666, \
0.03973, 0.04048, 0.04104, 0.04296, 0.04574, 0.04689, 0.04967, 0.05409, \
0.05498, 0.06167, 0.06387, 0.06916, 0.07321, 0.07610, 0.08094, 0.08372, \
0.06249, 0.06325, 0.06382, 0.06578, 0.06863, 0.06981, 0.07265, 0.07720, \
0.07812, 0.08504, 0.08731, 0.09281, 0.09703, 0.10005, 0.10512, 0.10806 ");
}
}
capacitance () {
top_plane: AIR;
bottom_plane: metal2;
lateral_capacitance (capacitance_template_WxS) {
index_1 (" 0.0700, 0.0900, 0.1400, 0.2700, 0.2800, 0.5000, 0.9000, 1.5000 ");
index_2 (" 0.0700, 0.0900, 0.1050, 0.1575, 0.2363, 0.2700, 0.3544, 0.5000, \
0.5316, 0.7973, 0.9000, 1.1960, 1.5000, 1.7940, 2.6910, 269.1035 ");
values (" 0.06394, 0.05072, 0.04403, 0.02969, 0.01925, 0.01651, 0.01177, 0.00735, \
0.00672, 0.00355, 0.00289, 0.00177, 0.00117, 0.00084, 0.00039, 0.00000, \
0.06497, 0.05165, 0.04488, 0.03039, 0.01981, 0.01703, 0.01221, 0.00768, \
0.00703, 0.00375, 0.00306, 0.00189, 0.00126, 0.00091, 0.00042, 0.00000, \
0.06685, 0.05338, 0.04652, 0.03178, 0.02097, 0.01811, 0.01313, 0.00840, \
0.00771, 0.00421, 0.00346, 0.00216, 0.00145, 0.00105, 0.00050, 0.00000, \
0.06998, 0.05635, 0.04938, 0.03433, 0.02318, 0.02020, 0.01497, 0.00988, \
0.00913, 0.00521, 0.00435, 0.00279, 0.00193, 0.00142, 0.00069, 0.00000, \
0.07018, 0.05653, 0.04955, 0.03449, 0.02332, 0.02034, 0.01509, 0.00998, \
0.00923, 0.00528, 0.00441, 0.00284, 0.00196, 0.00145, 0.00071, 0.00000, \
0.07338, 0.05962, 0.05257, 0.03728, 0.02584, 0.02275, 0.01727, 0.01183, \
0.01101, 0.00663, 0.00562, 0.00376, 0.00267, 0.00202, 0.00103, 0.00000, \
0.07689, 0.06306, 0.05596, 0.04050, 0.02884, 0.02566, 0.01998, 0.01422, \
0.01335, 0.00850, 0.00735, 0.00515, 0.00380, 0.00296, 0.00162, 0.00000, \
0.08013, 0.06626, 0.05913, 0.04357, 0.03177, 0.02853, 0.02271, 0.01672, \
0.01580, 0.01059, 0.00932, 0.00681, 0.00522, 0.00418, 0.00245, 0.00000 ");
}
ground_capacitance (capacitance_template_WxS) {
index_1 (" 0.0700, 0.0900, 0.1400, 0.2700, 0.2800, 0.5000, 0.9000, 1.5000 ");
index_2 (" 0.0700, 0.0900, 0.1050, 0.1575, 0.2363, 0.2700, 0.3544, 0.5000, \
0.5316, 0.7973, 0.9000, 1.1960, 1.5000, 1.7940, 2.6910, 269.1035 ");
values (" 0.02977, 0.03305, 0.03543, 0.04274, 0.05130, 0.05425, 0.06005, 0.06672, \
0.06778, 0.07329, 0.07441, 0.07666, 0.07777, 0.07849, 0.07942, 0.08021, \
0.03372, 0.03699, 0.03935, 0.04662, 0.05517, 0.05813, 0.06399, 0.07075, \
0.07183, 0.07751, 0.07868, 0.08102, 0.08220, 0.08296, 0.08394, 0.08480, \
0.04345, 0.04666, 0.04898, 0.05616, 0.06469, 0.06766, 0.07359, 0.08055, \
0.08167, 0.08768, 0.08895, 0.09153, 0.09285, 0.09370, 0.09481, 0.09582, \
0.06826, 0.07138, 0.07364, 0.08067, 0.08912, 0.09211, 0.09815, 0.10543, \
0.10662, 0.11323, 0.11470, 0.11771, 0.11934, 0.12039, 0.12184, 0.12324, \
0.07015, 0.07327, 0.07553, 0.08255, 0.09099, 0.09398, 0.10003, 0.10733, \
0.10853, 0.11517, 0.11665, 0.11969, 0.12134, 0.12241, 0.12387, 0.12531, \
0.11143, 0.11448, 0.11670, 0.12361, 0.13201, 0.13501, 0.14116, 0.14875, \
0.15002, 0.15726, 0.15896, 0.16251, 0.16454, 0.16587, 0.16781, 0.16990, \
0.18584, 0.18884, 0.19103, 0.19786, 0.20622, 0.20923, 0.21547, 0.22333, \
0.22466, 0.23254, 0.23447, 0.23859, 0.24109, 0.24278, 0.24542, 0.24865, \
0.29695, 0.29993, 0.30210, 0.30889, 0.31722, 0.32024, 0.32653, 0.33458, \
0.33597, 0.34432, 0.34644, 0.35107, 0.35401, 0.35604, 0.35943, 0.36431 ");
}
}
capacitance () {
top_plane: AIR;
bottom_plane: metal1;
lateral_capacitance (capacitance_template_WxS) {
index_1 (" 0.0700, 0.0900, 0.1400, 0.2700, 0.2800, 0.5000, 0.9000, 1.5000 ");
index_2 (" 0.0700, 0.0900, 0.1050, 0.1575, 0.2363, 0.2700, 0.3544, 0.5000, \
0.5316, 0.7973, 0.9000, 1.1960, 1.5000, 1.7940, 2.6910, 269.1035 ");
values (" 0.06943, 0.05652, 0.05001, 0.03608, 0.02576, 0.02296, 0.01789, 0.01265, \
0.01183, 0.00725, 0.00615, 0.00408, 0.00285, 0.00211, 0.00102, 0.00000, \
0.07091, 0.05785, 0.05124, 0.03707, 0.02653, 0.02367, 0.01847, 0.01309, \
0.01226, 0.00754, 0.00641, 0.00428, 0.00299, 0.00222, 0.00108, 0.00000, \
0.07367, 0.06036, 0.05359, 0.03901, 0.02807, 0.02508, 0.01966, 0.01402, \
0.01314, 0.00817, 0.00697, 0.00467, 0.00330, 0.00246, 0.00121, 0.00000, \
0.07796, 0.06434, 0.05737, 0.04223, 0.03074, 0.02758, 0.02181, 0.01577, \
0.01482, 0.00942, 0.00810, 0.00554, 0.00397, 0.00301, 0.00152, 0.00000, \
0.07820, 0.06457, 0.05758, 0.04241, 0.03090, 0.02773, 0.02194, 0.01588, \
0.01492, 0.00950, 0.00817, 0.00560, 0.00402, 0.00305, 0.00155, 0.00000, \
0.08181, 0.06801, 0.06091, 0.04541, 0.03354, 0.03025, 0.02422, 0.01783, \
0.01682, 0.01102, 0.00957, 0.00672, 0.00493, 0.00381, 0.00201, 0.00000, \
0.08533, 0.07145, 0.06429, 0.04861, 0.03651, 0.03313, 0.02691, 0.02026, \
0.01920, 0.01302, 0.01145, 0.00830, 0.00626, 0.00495, 0.00277, 0.00000, \
0.08851, 0.07458, 0.06739, 0.05161, 0.03937, 0.03594, 0.02960, 0.02275, \
0.02165, 0.01518, 0.01351, 0.01010, 0.00784, 0.00634, 0.00377, 0.00000 ");
}
ground_capacitance (capacitance_template_WxS) {
index_1 (" 0.0700, 0.0900, 0.1400, 0.2700, 0.2800, 0.5000, 0.9000, 1.5000 ");
index_2 (" 0.0700, 0.0900, 0.1050, 0.1575, 0.2363, 0.2700, 0.3544, 0.5000, \
0.5316, 0.7973, 0.9000, 1.1960, 1.5000, 1.7940, 2.6910, 269.1035 ");
values (" 0.01241, 0.01381, 0.01483, 0.01812, 0.02243, 0.02408, 0.02777, 0.03291, \
0.03386, 0.03996, 0.04160, 0.04508, 0.04727, 0.04868, 0.05073, 0.05278, \
0.01382, 0.01518, 0.01617, 0.01941, 0.02369, 0.02534, 0.02904, 0.03425, \
0.03522, 0.04143, 0.04313, 0.04669, 0.04896, 0.05042, 0.05257, 0.05474, \
0.01713, 0.01843, 0.01938, 0.02252, 0.02677, 0.02842, 0.03216, 0.03748, \
0.03848, 0.04492, 0.04670, 0.05049, 0.05291, 0.05448, 0.05681, 0.05925, \
0.02528, 0.02652, 0.02743, 0.03048, 0.03468, 0.03634, 0.04012, 0.04558, \
0.04661, 0.05341, 0.05532, 0.05947, 0.06218, 0.06398, 0.06672, 0.06976, \
0.02590, 0.02713, 0.02804, 0.03109, 0.03529, 0.03694, 0.04073, 0.04620, \
0.04723, 0.05404, 0.05596, 0.06013, 0.06286, 0.06467, 0.06744, 0.07053, \
0.03938, 0.04057, 0.04146, 0.04443, 0.04856, 0.05020, 0.05398, 0.05953, \
0.06058, 0.06767, 0.06972, 0.07423, 0.07728, 0.07934, 0.08264, 0.08664, \
0.06345, 0.06460, 0.06546, 0.06836, 0.07240, 0.07402, 0.07777, 0.08335, \
0.08442, 0.09176, 0.09393, 0.09880, 0.10221, 0.10458, 0.10865, 0.11401, \
0.09900, 0.10013, 0.10097, 0.10380, 0.10778, 0.10939, 0.11312, 0.11872, \
0.11980, 0.12732, 0.12959, 0.13476, 0.13849, 0.14113, 0.14589, 0.15318 ");
}
}
capacitance () {
top_plane: AIR;
bottom_plane: poly;
lateral_capacitance (capacitance_template_WxS) {
index_1 (" 0.0700, 0.0900, 0.1400, 0.2700, 0.2800, 0.5000, 0.9000, 1.5000 ");
index_2 (" 0.0700, 0.0900, 0.1050, 0.1575, 0.2363, 0.2700, 0.3544, 0.5000, \
0.5316, 0.7973, 0.9000, 1.1960, 1.5000, 1.7940, 2.6910, 269.1035 ");
values (" 0.07075, 0.05795, 0.05151, 0.03780, 0.02772, 0.02500, 0.02006, 0.01489, \
0.01407, 0.00930, 0.00809, 0.00569, 0.00414, 0.00316, 0.00161, 0.00000, \
0.07235, 0.05939, 0.05285, 0.03889, 0.02859, 0.02580, 0.02073, 0.01542, \
0.01457, 0.00966, 0.00840, 0.00593, 0.00433, 0.00331, 0.00169, 0.00000, \
0.07538, 0.06217, 0.05546, 0.04108, 0.03036, 0.02743, 0.02212, 0.01651, \
0.01561, 0.01041, 0.00908, 0.00642, 0.00471, 0.00362, 0.00187, 0.00000, \
0.08030, 0.06676, 0.05983, 0.04482, 0.03347, 0.03034, 0.02462, 0.01852, \
0.01755, 0.01185, 0.01039, 0.00744, 0.00553, 0.00429, 0.00227, 0.00000, \
0.08058, 0.06702, 0.06008, 0.04504, 0.03366, 0.03052, 0.02477, 0.01865, \
0.01767, 0.01195, 0.01048, 0.00751, 0.00558, 0.00433, 0.00230, 0.00000, \
0.08483, 0.07106, 0.06397, 0.04852, 0.03668, 0.03338, 0.02732, 0.02081, \
0.01976, 0.01361, 0.01202, 0.00876, 0.00662, 0.00521, 0.00286, 0.00000, \
0.08867, 0.07479, 0.06763, 0.05194, 0.03980, 0.03640, 0.03012, 0.02331, \
0.02221, 0.01568, 0.01397, 0.01043, 0.00805, 0.00646, 0.00373, 0.00000, \
0.09187, 0.07794, 0.07074, 0.05494, 0.04266, 0.03921, 0.03280, 0.02580, \
0.02466, 0.01786, 0.01606, 0.01228, 0.00970, 0.00794, 0.00482, 0.00000 ");
}
ground_capacitance (capacitance_template_WxS) {
index_1 (" 0.0700, 0.0900, 0.1400, 0.2700, 0.2800, 0.5000, 0.9000, 1.5000 ");
index_2 (" 0.0700, 0.0900, 0.1050, 0.1575, 0.2363, 0.2700, 0.3544, 0.5000, \
0.5316, 0.7973, 0.9000, 1.1960, 1.5000, 1.7940, 2.6910, 269.1035 ");
values (" 0.00900, 0.01006, 0.01083, 0.01330, 0.01652, 0.01775, 0.02053, 0.02453, \
0.02530, 0.03057, 0.03213, 0.03568, 0.03819, 0.03992, 0.04274, 0.04593, \
0.01006, 0.01108, 0.01181, 0.01421, 0.01736, 0.01858, 0.02135, 0.02539, \
0.02616, 0.03152, 0.03313, 0.03675, 0.03934, 0.04113, 0.04405, 0.04740, \
0.01246, 0.01339, 0.01408, 0.01633, 0.01939, 0.02059, 0.02334, 0.02744, \
0.02824, 0.03377, 0.03546, 0.03929, 0.04203, 0.04392, 0.04706, 0.05075, \
0.01794, 0.01879, 0.01942, 0.02153, 0.02447, 0.02566, 0.02843, 0.03262, \
0.03344, 0.03926, 0.04105, 0.04520, 0.04821, 0.05033, 0.05391, 0.05837, \
0.01835, 0.01919, 0.01982, 0.02192, 0.02486, 0.02604, 0.02882, 0.03302, \
0.03384, 0.03967, 0.04147, 0.04564, 0.04866, 0.05079, 0.05440, 0.05891, \
0.02705, 0.02786, 0.02846, 0.03050, 0.03339, 0.03456, 0.03733, 0.04159, \
0.04243, 0.04847, 0.05037, 0.05481, 0.05810, 0.06046, 0.06458, 0.07016, \
0.04263, 0.04341, 0.04399, 0.04596, 0.04879, 0.04994, 0.05268, 0.05695, \
0.05780, 0.06398, 0.06595, 0.07064, 0.07421, 0.07681, 0.08164, 0.08877, \
0.06560, 0.06636, 0.06692, 0.06884, 0.07160, 0.07274, 0.07544, 0.07969, \
0.08054, 0.08680, 0.08882, 0.09371, 0.09749, 0.10032, 0.10575, 0.11493 ");
}
}
capacitance () {
top_plane: AIR;
bottom_plane: SUBSTRATE;
lateral_capacitance (capacitance_template_WxS) {
index_1 (" 0.0700, 0.0900, 0.1400, 0.2700, 0.2800, 0.5000, 0.9000, 1.5000 ");
index_2 (" 0.0700, 0.0900, 0.1050, 0.1575, 0.2363, 0.2700, 0.3544, 0.5000, \
0.5316, 0.7973, 0.9000, 1.1960, 1.5000, 1.7940, 2.6910, 269.1035 ");
values (" 0.07149, 0.05874, 0.05234, 0.03876, 0.02881, 0.02614, 0.02131, 0.01626, \
0.01545, 0.01071, 0.00948, 0.00695, 0.00524, 0.00411, 0.00221, 0.00000, \
0.07314, 0.06024, 0.05374, 0.03989, 0.02974, 0.02700, 0.02203, 0.01683, \
0.01600, 0.01111, 0.00983, 0.00723, 0.00546, 0.00429, 0.00231, 0.00000, \
0.07631, 0.06315, 0.05648, 0.04220, 0.03162, 0.02875, 0.02354, 0.01803, \
0.01715, 0.01195, 0.01059, 0.00780, 0.00591, 0.00466, 0.00253, 0.00000, \
0.08156, 0.06806, 0.06116, 0.04626, 0.03503, 0.03194, 0.02630, 0.02028, \
0.01932, 0.01359, 0.01208, 0.00896, 0.00685, 0.00544, 0.00301, 0.00000, \
0.08186, 0.06835, 0.06144, 0.04650, 0.03523, 0.03214, 0.02647, 0.02042, \
0.01945, 0.01369, 0.01218, 0.00904, 0.00692, 0.00549, 0.00305, 0.00000, \
0.08659, 0.07285, 0.06578, 0.05039, 0.03862, 0.03534, 0.02932, 0.02282, \
0.02178, 0.01552, 0.01388, 0.01043, 0.00807, 0.00648, 0.00369, 0.00000, \
0.09087, 0.07700, 0.06984, 0.05416, 0.04204, 0.03864, 0.03235, 0.02550, \
0.02439, 0.01771, 0.01594, 0.01219, 0.00961, 0.00783, 0.00466, 0.00000, \
0.09421, 0.08028, 0.07308, 0.05727, 0.04498, 0.04152, 0.03508, 0.02803, \
0.02688, 0.01992, 0.01806, 0.01408, 0.01130, 0.00936, 0.00582, 0.00000 ");
}
ground_capacitance (capacitance_template_WxS) {
index_1 (" 0.0700, 0.0900, 0.1400, 0.2700, 0.2800, 0.5000, 0.9000, 1.5000 ");
index_2 (" 0.0700, 0.0900, 0.1050, 0.1575, 0.2363, 0.2700, 0.3544, 0.5000, \
0.5316, 0.7973, 0.9000, 1.1960, 1.5000, 1.7940, 2.6910, 269.1035 ");
values (" 0.00715, 0.00804, 0.00869, 0.01077, 0.01348, 0.01450, 0.01682, 0.02016, \
0.02080, 0.02534, 0.02675, 0.03009, 0.03262, 0.03447, 0.03778, 0.04207, \
0.00805, 0.00890, 0.00952, 0.01153, 0.01415, 0.01515, 0.01744, 0.02079, \
0.02144, 0.02604, 0.02749, 0.03088, 0.03349, 0.03540, 0.03882, 0.04330, \
0.01006, 0.01084, 0.01140, 0.01325, 0.01574, 0.01671, 0.01895, 0.02230, \
0.02297, 0.02769, 0.02920, 0.03278, 0.03553, 0.03754, 0.04119, 0.04608, \
0.01444, 0.01511, 0.01561, 0.01727, 0.01959, 0.02052, 0.02272, 0.02611, \
0.02678, 0.03172, 0.03332, 0.03718, 0.04018, 0.04240, 0.04651, 0.05230, \
0.01476, 0.01542, 0.01591, 0.01757, 0.01988, 0.02081, 0.02301, 0.02640, \
0.02707, 0.03203, 0.03363, 0.03750, 0.04051, 0.04275, 0.04688, 0.05274, \
0.02130, 0.02191, 0.02237, 0.02394, 0.02617, 0.02709, 0.02927, 0.03270, \
0.03339, 0.03852, 0.04020, 0.04432, 0.04757, 0.05001, 0.05464, 0.06170, \
0.03283, 0.03342, 0.03386, 0.03538, 0.03756, 0.03846, 0.04062, 0.04406, \
0.04475, 0.04999, 0.05174, 0.05605, 0.05952, 0.06218, 0.06744, 0.07618, \
0.04989, 0.05047, 0.05089, 0.05236, 0.05449, 0.05537, 0.05749, 0.06090, \
0.06160, 0.06687, 0.06865, 0.07309, 0.07673, 0.07956, 0.08532, 0.09619 ");
}
}
}
layer (metal2) {
resistance: 0.250000
capacitance () {
top_plane: metal3;
bottom_plane: metal1;
lateral_capacitance (capacitance_template_WxS) {
index_1 (" 0.0700, 0.0900, 0.1400, 0.2700, 0.2800, 0.5000, 0.9000, 1.5000 ");
index_2 (" 0.0700, 0.0900, 0.1050, 0.1575, 0.2363, 0.2700, 0.3544, 0.5000, \
0.5316, 0.7973, 0.9000, 1.1960, 1.5000, 1.7940, 2.6910, 269.1035 ");
values (" 0.05741, 0.04373, 0.03672, 0.02161, 0.01082, 0.00818, 0.00409, 0.00128, \
0.00100, 0.00013, 0.00006, 0.00001, 0.00000, 0.00000, 0.00000, 0.00000, \
0.05773, 0.04398, 0.03692, 0.02172, 0.01088, 0.00822, 0.00411, 0.00128, \
0.00100, 0.00013, 0.00006, 0.00001, 0.00000, 0.00000, 0.00000, 0.00000, \
0.05804, 0.04422, 0.03712, 0.02183, 0.01093, 0.00826, 0.00413, 0.00129, \
0.00101, 0.00013, 0.00006, 0.00001, 0.00000, 0.00000, 0.00000, 0.00000, \
0.05814, 0.04429, 0.03718, 0.02187, 0.01095, 0.00827, 0.00414, 0.00129, \
0.00101, 0.00013, 0.00006, 0.00001, 0.00000, 0.00000, 0.00000, 0.00000, \
0.05815, 0.04430, 0.03719, 0.02187, 0.01095, 0.00827, 0.00414, 0.00129, \
0.00101, 0.00013, 0.00006, 0.00001, 0.00000, 0.00000, 0.00000, 0.00000, \
0.05816, 0.04431, 0.03719, 0.02188, 0.01095, 0.00828, 0.00414, 0.00129, \
0.00101, 0.00013, 0.00006, 0.00001, 0.00000, 0.00000, 0.00000, 0.00000, \
0.05815, 0.04430, 0.03719, 0.02187, 0.01095, 0.00828, 0.00414, 0.00129, \
0.00101, 0.00013, 0.00006, 0.00001, 0.00000, 0.00000, 0.00000, 0.00000, \
0.05816, 0.04430, 0.03719, 0.02187, 0.01095, 0.00828, 0.00414, 0.00129, \
0.00101, 0.00013, 0.00006, 0.00001, 0.00000, 0.00000, 0.00000, 0.00000 ");
}
ground_capacitance (capacitance_template_WxS) {
index_1 (" 0.0700, 0.0900, 0.1400, 0.2700, 0.2800, 0.5000, 0.9000, 1.5000 ");
index_2 (" 0.0700, 0.0900, 0.1050, 0.1575, 0.2363, 0.2700, 0.3544, 0.5000, \
0.5316, 0.7973, 0.9000, 1.1960, 1.5000, 1.7940, 2.6910, 269.1035 ");
values (" 0.05019, 0.05590, 0.06004, 0.07264, 0.08637, 0.09060, 0.09763, 0.10327, \
0.10389, 0.10565, 0.10561, 0.10587, 0.10575, 0.10584, 0.10596, 0.10595, \
0.05742, 0.06319, 0.06737, 0.08005, 0.09386, 0.09811, 0.10518, 0.11084, \
0.11146, 0.11324, 0.11320, 0.11346, 0.11335, 0.11343, 0.11353, 0.11353, \
0.07566, 0.08150, 0.08571, 0.09849, 0.11237, 0.11664, 0.12375, 0.12943, \
0.13006, 0.13184, 0.13181, 0.13206, 0.13195, 0.13204, 0.13213, 0.13213, \
0.12354, 0.12939, 0.13362, 0.14642, 0.16033, 0.16461, 0.17173, 0.17742, \
0.17805, 0.17984, 0.17980, 0.18006, 0.17995, 0.18003, 0.18013, 0.18012, \
0.12722, 0.13308, 0.13731, 0.15011, 0.16402, 0.16830, 0.17542, 0.18111, \
0.18174, 0.18353, 0.18349, 0.18375, 0.18364, 0.18373, 0.18382, 0.18382, \
0.20839, 0.21424, 0.21847, 0.23128, 0.24519, 0.24947, 0.25659, 0.26229, \
0.26291, 0.26470, 0.26467, 0.26492, 0.26481, 0.26490, 0.26499, 0.26499, \
0.35597, 0.36183, 0.36606, 0.37886, 0.39277, 0.39705, 0.40417, 0.40987, \
0.41049, 0.41228, 0.41225, 0.41250, 0.41239, 0.41248, 0.41245, 0.41257, \
0.57734, 0.58319, 0.58742, 0.60023, 0.61414, 0.61842, 0.62554, 0.63123, \
0.63186, 0.63365, 0.63362, 0.63387, 0.63376, 0.63385, 0.63382, 0.63394 ");
}
}
capacitance () {
top_plane: metal3;
bottom_plane: poly;
lateral_capacitance (capacitance_template_WxS) {
index_1 (" 0.0700, 0.0900, 0.1400, 0.2700, 0.2800, 0.5000, 0.9000, 1.5000 ");
index_2 (" 0.0700, 0.0900, 0.1050, 0.1575, 0.2363, 0.2700, 0.3544, 0.5000, \
0.5316, 0.7973, 0.9000, 1.1960, 1.5000, 1.7940, 2.6910, 269.1035 ");
values (" 0.06159, 0.04819, 0.04135, 0.02655, 0.01558, 0.01270, 0.00778, 0.00353, \
0.00298, 0.00075, 0.00044, 0.00010, 0.00002, 0.00001, 0.00000, 0.00000, \
0.06239, 0.04886, 0.04195, 0.02696, 0.01585, 0.01291, 0.00793, 0.00360, \
0.00304, 0.00076, 0.00045, 0.00010, 0.00002, 0.00001, 0.00000, 0.00000, \
0.06359, 0.04990, 0.04287, 0.02763, 0.01627, 0.01327, 0.00816, 0.00371, \
0.00314, 0.00079, 0.00047, 0.00011, 0.00002, 0.00001, 0.00000, 0.00000, \
0.06481, 0.05096, 0.04383, 0.02832, 0.01672, 0.01365, 0.00841, 0.00383, \
0.00324, 0.00082, 0.00048, 0.00011, 0.00003, 0.00001, 0.00000, 0.00000, \
0.06486, 0.05100, 0.04387, 0.02835, 0.01674, 0.01366, 0.00842, 0.00383, \
0.00324, 0.00082, 0.00048, 0.00011, 0.00003, 0.00001, 0.00000, 0.00000, \
0.06527, 0.05136, 0.04419, 0.02858, 0.01689, 0.01379, 0.00850, 0.00387, \
0.00328, 0.00083, 0.00049, 0.00011, 0.00003, 0.00001, 0.00000, 0.00000, \
0.06532, 0.05140, 0.04423, 0.02861, 0.01691, 0.01381, 0.00851, 0.00388, \
0.00328, 0.00083, 0.00049, 0.00011, 0.00003, 0.00001, 0.00000, 0.00000, \
0.06532, 0.05141, 0.04424, 0.02861, 0.01691, 0.01381, 0.00851, 0.00388, \
0.00328, 0.00083, 0.00049, 0.00011, 0.00003, 0.00001, 0.00000, 0.00000 ");
}
ground_capacitance (capacitance_template_WxS) {
index_1 (" 0.0700, 0.0900, 0.1400, 0.2700, 0.2800, 0.5000, 0.9000, 1.5000 ");
index_2 (" 0.0700, 0.0900, 0.1050, 0.1575, 0.2363, 0.2700, 0.3544, 0.5000, \
0.5316, 0.7973, 0.9000, 1.1960, 1.5000, 1.7940, 2.6910, 269.1035 ");
values (" 0.03595, 0.03989, 0.04278, 0.05181, 0.06263, 0.06636, 0.07350, 0.08097, \
0.08202, 0.08637, 0.08687, 0.08769, 0.08777, 0.08787, 0.08791, 0.08791, \
0.04064, 0.04463, 0.04754, 0.05668, 0.06762, 0.07140, 0.07865, 0.08624, \
0.08731, 0.09174, 0.09226, 0.09309, 0.09317, 0.09328, 0.09330, 0.09330, \
0.05257, 0.05662, 0.05957, 0.06886, 0.08002, 0.08387, 0.09130, 0.09909, \
0.10018, 0.10475, 0.10529, 0.10615, 0.10624, 0.10634, 0.10635, 0.10635, \
0.08441, 0.08853, 0.09154, 0.10100, 0.11238, 0.11632, 0.12393, 0.13193, \
0.13305, 0.13777, 0.13833, 0.13922, 0.13932, 0.13942, 0.13942, 0.13942, \
0.08689, 0.09101, 0.09402, 0.10348, 0.11488, 0.11882, 0.12643, 0.13444, \
0.13557, 0.14030, 0.14086, 0.14174, 0.14184, 0.14194, 0.14195, 0.14194, \
0.14176, 0.14591, 0.14893, 0.15846, 0.16992, 0.17389, 0.18157, 0.18965, \
0.19079, 0.19556, 0.19613, 0.19702, 0.19712, 0.19723, 0.19723, 0.19723, \
0.24195, 0.24610, 0.24913, 0.25866, 0.27014, 0.27411, 0.28180, 0.28989, \
0.29103, 0.29581, 0.29638, 0.29727, 0.29737, 0.29748, 0.29747, 0.29748, \
0.39228, 0.39643, 0.39946, 0.40899, 0.42047, 0.42445, 0.43213, 0.44022, \
0.44136, 0.44614, 0.44671, 0.44760, 0.44771, 0.44781, 0.44780, 0.44781 ");
}
}
capacitance () {
top_plane: metal3;
bottom_plane: SUBSTRATE;
lateral_capacitance (capacitance_template_WxS) {
index_1 (" 0.0700, 0.0900, 0.1400, 0.2700, 0.2800, 0.5000, 0.9000, 1.5000 ");
index_2 (" 0.0700, 0.0900, 0.1050, 0.1575, 0.2363, 0.2700, 0.3544, 0.5000, \
0.5316, 0.7973, 0.9000, 1.1960, 1.5000, 1.7940, 2.6910, 269.1035 ");
values (" 0.06251, 0.04921, 0.04244, 0.02788, 0.01715, 0.01431, 0.00941, 0.00492, \
0.00430, 0.00147, 0.00099, 0.00033, 0.00011, 0.00004, 0.00000, 0.00000, \
0.06344, 0.05003, 0.04319, 0.02844, 0.01755, 0.01466, 0.00966, 0.00506, \
0.00443, 0.00152, 0.00102, 0.00034, 0.00011, 0.00004, 0.00000, 0.00000, \
0.06502, 0.05143, 0.04448, 0.02945, 0.01827, 0.01530, 0.01013, 0.00534, \
0.00468, 0.00161, 0.00108, 0.00036, 0.00012, 0.00004, 0.00000, 0.00000, \
0.06709, 0.05331, 0.04623, 0.03086, 0.01932, 0.01622, 0.01081, 0.00575, \
0.00504, 0.00175, 0.00118, 0.00039, 0.00013, 0.00005, 0.00000, 0.00000, \
0.06719, 0.05341, 0.04632, 0.03093, 0.01937, 0.01627, 0.01085, 0.00577, \
0.00506, 0.00176, 0.00119, 0.00039, 0.00013, 0.00005, 0.00000, 0.00000, \
0.06840, 0.05451, 0.04736, 0.03177, 0.02000, 0.01682, 0.01126, 0.00602, \
0.00528, 0.00185, 0.00125, 0.00041, 0.00014, 0.00005, 0.00000, 0.00000, \
0.06885, 0.05493, 0.04775, 0.03209, 0.02024, 0.01704, 0.01142, 0.00611, \
0.00537, 0.00188, 0.00127, 0.00042, 0.00014, 0.00005, 0.00000, 0.00000, \
0.06891, 0.05499, 0.04781, 0.03214, 0.02027, 0.01707, 0.01144, 0.00613, \
0.00538, 0.00189, 0.00127, 0.00042, 0.00014, 0.00005, 0.00000, 0.00000 ");
}
ground_capacitance (capacitance_template_WxS) {
index_1 (" 0.0700, 0.0900, 0.1400, 0.2700, 0.2800, 0.5000, 0.9000, 1.5000 ");
index_2 (" 0.0700, 0.0900, 0.1050, 0.1575, 0.2363, 0.2700, 0.3544, 0.5000, \
0.5316, 0.7973, 0.9000, 1.1960, 1.5000, 1.7940, 2.6910, 269.1035 ");
values (" 0.03346, 0.03704, 0.03964, 0.04774, 0.05741, 0.06077, 0.06737, 0.07475, \
0.07587, 0.08116, 0.08200, 0.08344, 0.08382, 0.08403, 0.08412, 0.08412, \
0.03769, 0.04129, 0.04390, 0.05206, 0.06182, 0.06523, 0.07194, 0.07947, \
0.08061, 0.08605, 0.08693, 0.08842, 0.08881, 0.08902, 0.08911, 0.08910, \
0.04835, 0.05197, 0.05460, 0.06284, 0.07278, 0.07627, 0.08318, 0.09099, \
0.09219, 0.09790, 0.09884, 0.10041, 0.10084, 0.10106, 0.10113, 0.10113, \
0.07658, 0.08023, 0.08289, 0.09125, 0.10144, 0.10504, 0.11223, 0.12046, \
0.12173, 0.12785, 0.12888, 0.13058, 0.13106, 0.13129, 0.13136, 0.13136, \
0.07877, 0.08242, 0.08508, 0.09346, 0.10366, 0.10726, 0.11447, 0.12272, \
0.12399, 0.13014, 0.13117, 0.13288, 0.13335, 0.13359, 0.13365, 0.13366, \
0.12750, 0.13119, 0.13387, 0.14235, 0.15271, 0.15639, 0.16378, 0.17228, \
0.17359, 0.17999, 0.18107, 0.18286, 0.18337, 0.18361, 0.18368, 0.18368, \
0.21714, 0.22084, 0.22354, 0.23206, 0.24249, 0.24620, 0.25365, 0.26225, \
0.26357, 0.27007, 0.27118, 0.27299, 0.27351, 0.27376, 0.27384, 0.27383, \
0.35201, 0.35571, 0.35841, 0.36694, 0.37738, 0.38109, 0.38855, 0.39716, \
0.39849, 0.40500, 0.40611, 0.40793, 0.40845, 0.40870, 0.40878, 0.40877 ");
}
}
capacitance () {
top_plane: metal4;
bottom_plane: metal1;
lateral_capacitance (capacitance_template_WxS) {
index_1 (" 0.0700, 0.0900, 0.1400, 0.2700, 0.2800, 0.5000, 0.9000, 1.5000 ");
index_2 (" 0.0700, 0.0900, 0.1050, 0.1575, 0.2363, 0.2700, 0.3544, 0.5000, \
0.5316, 0.7973, 0.9000, 1.1960, 1.5000, 1.7940, 2.6910, 269.1035 ");
values (" 0.06188, 0.04851, 0.04169, 0.02696, 0.01605, 0.01317, 0.00824, 0.00389, \
0.00332, 0.00091, 0.00055, 0.00014, 0.00004, 0.00001, 0.00000, 0.00000, \
0.06272, 0.04923, 0.04233, 0.02742, 0.01635, 0.01342, 0.00841, 0.00397, \
0.00339, 0.00093, 0.00057, 0.00014, 0.00004, 0.00001, 0.00000, 0.00000, \
0.06403, 0.05037, 0.04336, 0.02817, 0.01685, 0.01385, 0.00870, 0.00412, \
0.00352, 0.00096, 0.00059, 0.00015, 0.00004, 0.00001, 0.00000, 0.00000, \
0.06548, 0.05164, 0.04453, 0.02904, 0.01743, 0.01435, 0.00903, 0.00429, \
0.00367, 0.00101, 0.00061, 0.00015, 0.00004, 0.00001, 0.00000, 0.00000, \
0.06554, 0.05170, 0.04458, 0.02908, 0.01746, 0.01437, 0.00905, 0.00430, \
0.00367, 0.00101, 0.00062, 0.00015, 0.00004, 0.00001, 0.00000, 0.00000, \
0.06611, 0.05220, 0.04503, 0.02942, 0.01769, 0.01456, 0.00918, 0.00436, \
0.00373, 0.00102, 0.00063, 0.00016, 0.00004, 0.00001, 0.00000, 0.00000, \
0.06621, 0.05229, 0.04512, 0.02948, 0.01773, 0.01460, 0.00920, 0.00438, \
0.00374, 0.00103, 0.00063, 0.00016, 0.00004, 0.00001, 0.00000, 0.00000, \
0.06622, 0.05230, 0.04512, 0.02949, 0.01773, 0.01460, 0.00920, 0.00438, \
0.00374, 0.00103, 0.00063, 0.00016, 0.00004, 0.00001, 0.00000, 0.00000 ");
}
ground_capacitance (capacitance_template_WxS) {
index_1 (" 0.0700, 0.0900, 0.1400, 0.2700, 0.2800, 0.5000, 0.9000, 1.5000 ");
index_2 (" 0.0700, 0.0900, 0.1050, 0.1575, 0.2363, 0.2700, 0.3544, 0.5000, \
0.5316, 0.7973, 0.9000, 1.1960, 1.5000, 1.7940, 2.6910, 269.1035 ");
values (" 0.03514, 0.03897, 0.04176, 0.05050, 0.06097, 0.06460, 0.07162, 0.07912, \
0.08020, 0.08486, 0.08545, 0.08641, 0.08655, 0.08667, 0.08671, 0.08671, \
0.03968, 0.04354, 0.04636, 0.05519, 0.06579, 0.06946, 0.07660, 0.08423, \
0.08533, 0.09009, 0.09070, 0.09168, 0.09182, 0.09194, 0.09197, 0.09197, \
0.05120, 0.05511, 0.05797, 0.06694, 0.07775, 0.08151, 0.08882, 0.09668, \
0.09782, 0.10274, 0.10339, 0.10441, 0.10456, 0.10468, 0.10469, 0.10469, \
0.08193, 0.08590, 0.08880, 0.09795, 0.10900, 0.11286, 0.12039, 0.12852, \
0.12969, 0.13482, 0.13550, 0.13656, 0.13673, 0.13685, 0.13685, 0.13685, \
0.08432, 0.08830, 0.09120, 0.10035, 0.11142, 0.11528, 0.12282, 0.13096, \
0.13213, 0.13727, 0.13795, 0.13901, 0.13918, 0.13930, 0.13931, 0.13930, \
0.13736, 0.14137, 0.14430, 0.15352, 0.16469, 0.16859, 0.17621, 0.18446, \
0.18565, 0.19087, 0.19156, 0.19264, 0.19281, 0.19293, 0.19293, 0.19293, \
0.23438, 0.23840, 0.24133, 0.25057, 0.26176, 0.26567, 0.27331, 0.28157, \
0.28277, 0.28800, 0.28870, 0.28977, 0.28995, 0.29007, 0.29007, 0.29007, \
0.38002, 0.38403, 0.38697, 0.39621, 0.40740, 0.41130, 0.41894, 0.42721, \
0.42840, 0.43364, 0.43433, 0.43541, 0.43558, 0.43571, 0.43571, 0.43571 ");
}
}
capacitance () {
top_plane: metal4;
bottom_plane: poly;
lateral_capacitance (capacitance_template_WxS) {
index_1 (" 0.0700, 0.0900, 0.1400, 0.2700, 0.2800, 0.5000, 0.9000, 1.5000 ");
index_2 (" 0.0700, 0.0900, 0.1050, 0.1575, 0.2363, 0.2700, 0.3544, 0.5000, \
0.5316, 0.7973, 0.9000, 1.1960, 1.5000, 1.7940, 2.6910, 269.1035 ");
values (" 0.06630, 0.05320, 0.04654, 0.03214, 0.02122, 0.01821, 0.01276, 0.00729, \
0.00648, 0.00245, 0.00169, 0.00059, 0.00020, 0.00007, 0.00000, 0.00000, \
0.06757, 0.05431, 0.04754, 0.03287, 0.02172, 0.01864, 0.01306, 0.00745, \
0.00662, 0.00250, 0.00173, 0.00061, 0.00021, 0.00008, 0.00000, 0.00000, \
0.06972, 0.05619, 0.04925, 0.03414, 0.02256, 0.01936, 0.01357, 0.00774, \
0.00688, 0.00260, 0.00179, 0.00063, 0.00022, 0.00008, 0.00000, 0.00000, \
0.07220, 0.05837, 0.05124, 0.03560, 0.02355, 0.02020, 0.01415, 0.00807, \
0.00717, 0.00271, 0.00187, 0.00065, 0.00022, 0.00008, 0.00000, 0.00000, \
0.07230, 0.05846, 0.05132, 0.03566, 0.02359, 0.02024, 0.01418, 0.00808, \
0.00718, 0.00271, 0.00187, 0.00065, 0.00023, 0.00008, 0.00000, 0.00000, \
0.07323, 0.05927, 0.05205, 0.03620, 0.02395, 0.02054, 0.01439, 0.00820, \
0.00729, 0.00275, 0.00190, 0.00066, 0.00023, 0.00008, 0.00000, 0.00000, \
0.07338, 0.05941, 0.05218, 0.03630, 0.02401, 0.02060, 0.01443, 0.00822, \
0.00731, 0.00276, 0.00190, 0.00066, 0.00023, 0.00008, 0.00000, 0.00000, \
0.07339, 0.05942, 0.05219, 0.03630, 0.02401, 0.02060, 0.01443, 0.00822, \
0.00731, 0.00276, 0.00190, 0.00066, 0.00023, 0.00008, 0.00000, 0.00000 ");
}
ground_capacitance (capacitance_template_WxS) {
index_1 (" 0.0700, 0.0900, 0.1400, 0.2700, 0.2800, 0.5000, 0.9000, 1.5000 ");
index_2 (" 0.0700, 0.0900, 0.1050, 0.1575, 0.2363, 0.2700, 0.3544, 0.5000, \
0.5316, 0.7973, 0.9000, 1.1960, 1.5000, 1.7940, 2.6910, 269.1035 ");
values (" 0.02044, 0.02252, 0.02405, 0.02912, 0.03596, 0.03860, 0.04439, 0.05200, \
0.05330, 0.06031, 0.06170, 0.06394, 0.06471, 0.06502, 0.06510, 0.06510, \
0.02251, 0.02460, 0.02615, 0.03131, 0.03827, 0.04097, 0.04690, 0.05467, \
0.05600, 0.06316, 0.06459, 0.06688, 0.06767, 0.06798, 0.06805, 0.06806, \
0.02784, 0.02998, 0.03157, 0.03689, 0.04413, 0.04693, 0.05308, 0.06115, \
0.06252, 0.06996, 0.07145, 0.07383, 0.07464, 0.07497, 0.07503, 0.07503, \
0.04273, 0.04497, 0.04664, 0.05221, 0.05979, 0.06272, 0.06915, 0.07756, \
0.07899, 0.08674, 0.08830, 0.09078, 0.09163, 0.09196, 0.09202, 0.09202, \
0.04392, 0.04617, 0.04783, 0.05342, 0.06101, 0.06394, 0.07039, 0.07882, \
0.08024, 0.08801, 0.08957, 0.09205, 0.09290, 0.09324, 0.09329, 0.09330, \
0.07074, 0.07304, 0.07474, 0.08044, 0.08817, 0.09115, 0.09770, 0.10625, \
0.10770, 0.11558, 0.11717, 0.11968, 0.12055, 0.12089, 0.12094, 0.12094, \
0.12038, 0.12269, 0.12440, 0.13012, 0.13787, 0.14086, 0.14743, 0.15600, \
0.15746, 0.16536, 0.16695, 0.16947, 0.17034, 0.17068, 0.17084, 0.17073, \
0.19498, 0.19729, 0.19900, 0.20472, 0.21247, 0.21546, 0.22203, 0.23061, \
0.23206, 0.23996, 0.24155, 0.24408, 0.24494, 0.24528, 0.24545, 0.24534 ");
}
}
capacitance () {
top_plane: metal4;
bottom_plane: SUBSTRATE;
lateral_capacitance (capacitance_template_WxS) {
index_1 (" 0.0700, 0.0900, 0.1400, 0.2700, 0.2800, 0.5000, 0.9000, 1.5000 ");
index_2 (" 0.0700, 0.0900, 0.1050, 0.1575, 0.2363, 0.2700, 0.3544, 0.5000, \
0.5316, 0.7973, 0.9000, 1.1960, 1.5000, 1.7940, 2.6910, 269.1035 ");
values (" 0.06738, 0.05437, 0.04779, 0.03363, 0.02297, 0.02004, 0.01469, 0.00915, \
0.00829, 0.00374, 0.00277, 0.00119, 0.00050, 0.00022, 0.00002, 0.00000, \
0.06877, 0.05561, 0.04893, 0.03449, 0.02360, 0.02059, 0.01510, 0.00940, \
0.00852, 0.00384, 0.00284, 0.00122, 0.00052, 0.00023, 0.00002, 0.00000, \
0.07127, 0.05784, 0.05098, 0.03608, 0.02473, 0.02159, 0.01584, 0.00986, \
0.00894, 0.00403, 0.00298, 0.00128, 0.00054, 0.00024, 0.00002, 0.00000, \
0.07455, 0.06080, 0.05371, 0.03822, 0.02627, 0.02294, 0.01685, 0.01049, \
0.00951, 0.00430, 0.00318, 0.00136, 0.00058, 0.00025, 0.00002, 0.00000, \
0.07471, 0.06093, 0.05384, 0.03832, 0.02634, 0.02301, 0.01689, 0.01052, \
0.00954, 0.00431, 0.00319, 0.00137, 0.00058, 0.00025, 0.00002, 0.00000, \
0.07639, 0.06245, 0.05525, 0.03943, 0.02716, 0.02372, 0.01743, 0.01085, \
0.00984, 0.00445, 0.00330, 0.00141, 0.00060, 0.00026, 0.00002, 0.00000, \
0.07691, 0.06293, 0.05570, 0.03979, 0.02742, 0.02396, 0.01760, 0.01097, \
0.00994, 0.00450, 0.00333, 0.00143, 0.00060, 0.00027, 0.00002, 0.00000, \
0.07698, 0.06300, 0.05576, 0.03984, 0.02746, 0.02399, 0.01763, 0.01098, \
0.00996, 0.00450, 0.00334, 0.00143, 0.00060, 0.00027, 0.00002, 0.00000 ");
}
ground_capacitance (capacitance_template_WxS) {
index_1 (" 0.0700, 0.0900, 0.1400, 0.2700, 0.2800, 0.5000, 0.9000, 1.5000 ");
index_2 (" 0.0700, 0.0900, 0.1050, 0.1575, 0.2363, 0.2700, 0.3544, 0.5000, \
0.5316, 0.7973, 0.9000, 1.1960, 1.5000, 1.7940, 2.6910, 269.1035 ");
values (" 0.01756, 0.01930, 0.02057, 0.02469, 0.03024, 0.03241, 0.03729, 0.04408, \
0.04530, 0.05260, 0.05431, 0.05738, 0.05872, 0.05933, 0.05968, 0.05972, \
0.01923, 0.02094, 0.02220, 0.02636, 0.03200, 0.03421, 0.03921, 0.04616, \
0.04741, 0.05491, 0.05666, 0.05981, 0.06119, 0.06182, 0.06217, 0.06221, \
0.02336, 0.02508, 0.02634, 0.03059, 0.03644, 0.03875, 0.04395, 0.05122, \
0.05253, 0.06037, 0.06222, 0.06553, 0.06698, 0.06764, 0.06799, 0.06803, \
0.03474, 0.03651, 0.03783, 0.04228, 0.04846, 0.05089, 0.05641, 0.06412, \
0.06550, 0.07383, 0.07580, 0.07932, 0.08087, 0.08157, 0.08194, 0.08198, \
0.03565, 0.03743, 0.03875, 0.04321, 0.04940, 0.05184, 0.05738, 0.06511, \
0.06650, 0.07485, 0.07682, 0.08035, 0.08191, 0.08260, 0.08297, 0.08301, \
0.05644, 0.05827, 0.05963, 0.06424, 0.07061, 0.07313, 0.07884, 0.08680, \
0.08823, 0.09684, 0.09888, 0.10252, 0.10413, 0.10485, 0.10523, 0.10527, \
0.09557, 0.09743, 0.09880, 0.10345, 0.10990, 0.11244, 0.11820, 0.12624, \
0.12768, 0.13638, 0.13844, 0.14212, 0.14375, 0.14448, 0.14499, 0.14490, \
0.15471, 0.15657, 0.15795, 0.16260, 0.16906, 0.17160, 0.17737, 0.18542, \
0.18686, 0.19557, 0.19764, 0.20132, 0.20295, 0.20368, 0.20419, 0.20411 ");
}
}
capacitance () {
top_plane: metal5;
bottom_plane: metal1;
lateral_capacitance (capacitance_template_WxS) {
index_1 (" 0.0700, 0.0900, 0.1400, 0.2700, 0.2800, 0.5000, 0.9000, 1.5000 ");
index_2 (" 0.0700, 0.0900, 0.1050, 0.1575, 0.2363, 0.2700, 0.3544, 0.5000, \
0.5316, 0.7973, 0.9000, 1.1960, 1.5000, 1.7940, 2.6910, 269.1035 ");
values (" 0.06308, 0.04983, 0.04311, 0.02869, 0.01815, 0.01537, 0.01056, 0.00608, \
0.00544, 0.00232, 0.00172, 0.00076, 0.00034, 0.00016, 0.00002, 0.00000, \
0.06408, 0.05072, 0.04393, 0.02934, 0.01864, 0.01582, 0.01091, 0.00631, \
0.00565, 0.00243, 0.00179, 0.00080, 0.00036, 0.00017, 0.00002, 0.00000, \
0.06586, 0.05234, 0.04545, 0.03059, 0.01962, 0.01670, 0.01161, 0.00678, \
0.00609, 0.00265, 0.00196, 0.00087, 0.00039, 0.00018, 0.00002, 0.00000, \
0.06856, 0.05486, 0.04784, 0.03263, 0.02125, 0.01820, 0.01282, 0.00761, \
0.00686, 0.00304, 0.00226, 0.00101, 0.00046, 0.00022, 0.00002, 0.00000, \
0.06872, 0.05500, 0.04797, 0.03274, 0.02135, 0.01829, 0.01289, 0.00766, \
0.00690, 0.00306, 0.00228, 0.00102, 0.00046, 0.00022, 0.00002, 0.00000, \
0.07086, 0.05702, 0.04991, 0.03442, 0.02272, 0.01955, 0.01392, 0.00838, \
0.00757, 0.00341, 0.00255, 0.00115, 0.00052, 0.00025, 0.00003, 0.00000, \
0.07222, 0.05832, 0.05115, 0.03551, 0.02363, 0.02038, 0.01460, 0.00887, \
0.00802, 0.00364, 0.00273, 0.00124, 0.00056, 0.00027, 0.00003, 0.00000, \
0.07266, 0.05874, 0.05156, 0.03586, 0.02392, 0.02065, 0.01482, 0.00902, \
0.00816, 0.00372, 0.00279, 0.00126, 0.00057, 0.00027, 0.00003, 0.00000 ");
}
ground_capacitance (capacitance_template_WxS) {
index_1 (" 0.0700, 0.0900, 0.1400, 0.2700, 0.2800, 0.5000, 0.9000, 1.5000 ");
index_2 (" 0.0700, 0.0900, 0.1050, 0.1575, 0.2363, 0.2700, 0.3544, 0.5000, \
0.5316, 0.7973, 0.9000, 1.1960, 1.5000, 1.7940, 2.6910, 269.1035 ");
values (" 0.03195, 0.03536, 0.03783, 0.04543, 0.05437, 0.05747, 0.06358, 0.07057, \
0.07167, 0.07726, 0.07831, 0.08031, 0.08108, 0.08151, 0.08182, 0.08185, \
0.03599, 0.03939, 0.04185, 0.04945, 0.05844, 0.06157, 0.06777, 0.07492, \
0.07605, 0.08182, 0.08293, 0.08499, 0.08581, 0.08626, 0.08657, 0.08660, \
0.04602, 0.04939, 0.05183, 0.05943, 0.06852, 0.07171, 0.07808, 0.08552, \
0.08670, 0.09284, 0.09405, 0.09629, 0.09720, 0.09768, 0.09801, 0.09804, \
0.07211, 0.07545, 0.07788, 0.08550, 0.09475, 0.09803, 0.10468, 0.11261, \
0.11389, 0.12068, 0.12205, 0.12461, 0.12567, 0.12622, 0.12659, 0.12664, \
0.07412, 0.07746, 0.07990, 0.08752, 0.09678, 0.10006, 0.10673, 0.11469, \
0.11597, 0.12280, 0.12418, 0.12676, 0.12782, 0.12838, 0.12876, 0.12880, \
0.11872, 0.12207, 0.12452, 0.13220, 0.14163, 0.14501, 0.15192, 0.16029, \
0.16166, 0.16903, 0.17057, 0.17341, 0.17462, 0.17524, 0.17566, 0.17571, \
0.20093, 0.20431, 0.20677, 0.21453, 0.22408, 0.22753, 0.23460, 0.24326, \
0.24468, 0.25242, 0.25405, 0.25708, 0.25838, 0.25905, 0.25953, 0.25956, \
0.32528, 0.32866, 0.33114, 0.33892, 0.34852, 0.35199, 0.35912, 0.36786, \
0.36930, 0.37716, 0.37882, 0.38191, 0.38325, 0.38392, 0.38442, 0.38445 ");
}
}
capacitance () {
top_plane: metal5;
bottom_plane: poly;
lateral_capacitance (capacitance_template_WxS) {
index_1 (" 0.0700, 0.0900, 0.1400, 0.2700, 0.2800, 0.5000, 0.9000, 1.5000 ");
index_2 (" 0.0700, 0.0900, 0.1050, 0.1575, 0.2363, 0.2700, 0.3544, 0.5000, \
0.5316, 0.7973, 0.9000, 1.1960, 1.5000, 1.7940, 2.6910, 269.1035 ");
values (" 0.06776, 0.05477, 0.04821, 0.03412, 0.02360, 0.02073, 0.01552, 0.01013, \
0.00930, 0.00472, 0.00368, 0.00186, 0.00094, 0.00050, 0.00007, 0.00000, \
0.06917, 0.05604, 0.04937, 0.03503, 0.02429, 0.02135, 0.01600, 0.01046, \
0.00960, 0.00488, 0.00381, 0.00193, 0.00098, 0.00052, 0.00007, 0.00000, \
0.07175, 0.05836, 0.05154, 0.03677, 0.02559, 0.02252, 0.01692, 0.01109, \
0.01018, 0.00520, 0.00406, 0.00206, 0.00104, 0.00055, 0.00008, 0.00000, \
0.07544, 0.06174, 0.05470, 0.03935, 0.02759, 0.02433, 0.01836, 0.01209, \
0.01111, 0.00572, 0.00448, 0.00227, 0.00116, 0.00061, 0.00009, 0.00000, \
0.07563, 0.06191, 0.05486, 0.03948, 0.02770, 0.02442, 0.01844, 0.01214, \
0.01116, 0.00574, 0.00450, 0.00229, 0.00116, 0.00061, 0.00009, 0.00000, \
0.07807, 0.06418, 0.05701, 0.04130, 0.02915, 0.02575, 0.01952, 0.01292, \
0.01189, 0.00616, 0.00483, 0.00246, 0.00126, 0.00066, 0.00010, 0.00000, \
0.07942, 0.06546, 0.05824, 0.04237, 0.03003, 0.02656, 0.02019, 0.01341, \
0.01234, 0.00642, 0.00504, 0.00258, 0.00132, 0.00070, 0.00010, 0.00000, \
0.07984, 0.06586, 0.05862, 0.04270, 0.03031, 0.02682, 0.02040, 0.01356, \
0.01249, 0.00650, 0.00511, 0.00261, 0.00133, 0.00071, 0.00011, 0.00000 ");
}
ground_capacitance (capacitance_template_WxS) {
index_1 (" 0.0700, 0.0900, 0.1400, 0.2700, 0.2800, 0.5000, 0.9000, 1.5000 ");
index_2 (" 0.0700, 0.0900, 0.1050, 0.1575, 0.2363, 0.2700, 0.3544, 0.5000, \
0.5316, 0.7973, 0.9000, 1.1960, 1.5000, 1.7940, 2.6910, 269.1035 ");
values (" 0.01663, 0.01832, 0.01954, 0.02347, 0.02863, 0.03061, 0.03504, 0.04121, \
0.04233, 0.04927, 0.05101, 0.05440, 0.05617, 0.05710, 0.05790, 0.05804, \
0.01827, 0.01991, 0.02111, 0.02503, 0.03022, 0.03223, 0.03676, 0.04306, \
0.04421, 0.05135, 0.05315, 0.05664, 0.05847, 0.05943, 0.06025, 0.06040, \
0.02221, 0.02381, 0.02499, 0.02890, 0.03422, 0.03630, 0.04099, 0.04757, \
0.04878, 0.05628, 0.05819, 0.06190, 0.06385, 0.06487, 0.06574, 0.06590, \
0.03258, 0.03419, 0.03539, 0.03940, 0.04492, 0.04710, 0.05205, 0.05905, \
0.06034, 0.06843, 0.07051, 0.07458, 0.07673, 0.07785, 0.07881, 0.07900, \
0.03340, 0.03502, 0.03621, 0.04023, 0.04576, 0.04794, 0.05290, 0.05993, \
0.06123, 0.06935, 0.07144, 0.07552, 0.07768, 0.07881, 0.07978, 0.07996, \
0.05193, 0.05357, 0.05479, 0.05890, 0.06459, 0.06684, 0.07199, 0.07932, \
0.08068, 0.08924, 0.09147, 0.09583, 0.09815, 0.09937, 0.10042, 0.10061, \
0.08688, 0.08854, 0.08978, 0.09395, 0.09975, 0.10205, 0.10731, 0.11484, \
0.11623, 0.12508, 0.12738, 0.13192, 0.13435, 0.13562, 0.13684, 0.13692, \
0.14024, 0.14191, 0.14315, 0.14735, 0.15318, 0.15550, 0.16079, 0.16838, \
0.16979, 0.17872, 0.18106, 0.18565, 0.18811, 0.18940, 0.19064, 0.19072 ");
}
}
capacitance () {
top_plane: metal5;
bottom_plane: SUBSTRATE;
lateral_capacitance (capacitance_template_WxS) {
index_1 (" 0.0700, 0.0900, 0.1400, 0.2700, 0.2800, 0.5000, 0.9000, 1.5000 ");
index_2 (" 0.0700, 0.0900, 0.1050, 0.1575, 0.2363, 0.2700, 0.3544, 0.5000, \
0.5316, 0.7973, 0.9000, 1.1960, 1.5000, 1.7940, 2.6910, 269.1035 ");
values (" 0.06904, 0.05614, 0.04964, 0.03578, 0.02552, 0.02274, 0.01766, 0.01228, \
0.01142, 0.00646, 0.00524, 0.00294, 0.00164, 0.00094, 0.00017, 0.00000, \
0.07056, 0.05752, 0.05093, 0.03682, 0.02633, 0.02347, 0.01824, 0.01268, \
0.01180, 0.00668, 0.00542, 0.00305, 0.00170, 0.00097, 0.00018, 0.00000, \
0.07345, 0.06016, 0.05341, 0.03885, 0.02791, 0.02490, 0.01938, 0.01349, \
0.01254, 0.00711, 0.00577, 0.00323, 0.00180, 0.00103, 0.00019, 0.00000, \
0.07790, 0.06427, 0.05728, 0.04207, 0.03043, 0.02719, 0.02122, 0.01479, \
0.01376, 0.00781, 0.00634, 0.00355, 0.00198, 0.00114, 0.00021, 0.00000, \
0.07814, 0.06449, 0.05749, 0.04224, 0.03057, 0.02731, 0.02132, 0.01486, \
0.01382, 0.00785, 0.00637, 0.00357, 0.00199, 0.00114, 0.00021, 0.00000, \
0.08128, 0.06742, 0.06026, 0.04458, 0.03243, 0.02901, 0.02269, 0.01584, \
0.01474, 0.00838, 0.00681, 0.00382, 0.00213, 0.00123, 0.00023, 0.00000, \
0.08297, 0.06900, 0.06178, 0.04588, 0.03348, 0.02998, 0.02347, 0.01641, \
0.01527, 0.00869, 0.00707, 0.00397, 0.00222, 0.00128, 0.00024, 0.00000, \
0.08344, 0.06945, 0.06220, 0.04625, 0.03378, 0.03025, 0.02370, 0.01657, \
0.01542, 0.00878, 0.00714, 0.00401, 0.00224, 0.00129, 0.00025, 0.00000 ");
}
ground_capacitance (capacitance_template_WxS) {
index_1 (" 0.0700, 0.0900, 0.1400, 0.2700, 0.2800, 0.5000, 0.9000, 1.5000 ");
index_2 (" 0.0700, 0.0900, 0.1050, 0.1575, 0.2363, 0.2700, 0.3544, 0.5000, \
0.5316, 0.7973, 0.9000, 1.1960, 1.5000, 1.7940, 2.6910, 269.1035 ");
values (" 0.01328, 0.01463, 0.01559, 0.01861, 0.02249, 0.02398, 0.02739, 0.03240, \
0.03336, 0.03990, 0.04176, 0.04572, 0.04811, 0.04950, 0.05097, 0.05133, \
0.01454, 0.01581, 0.01673, 0.01967, 0.02354, 0.02505, 0.02852, 0.03366, \
0.03465, 0.04138, 0.04330, 0.04737, 0.04985, 0.05128, 0.05280, 0.05317, \
0.01737, 0.01855, 0.01941, 0.02226, 0.02617, 0.02772, 0.03133, 0.03673, \
0.03777, 0.04488, 0.04692, 0.05126, 0.05389, 0.05540, 0.05701, 0.05740, \
0.02435, 0.02549, 0.02635, 0.02923, 0.03331, 0.03495, 0.03882, 0.04465, \
0.04578, 0.05352, 0.05575, 0.06049, 0.06338, 0.06504, 0.06681, 0.06724, \
0.02490, 0.02604, 0.02690, 0.02979, 0.03388, 0.03553, 0.03941, 0.04527, \
0.04640, 0.05417, 0.05641, 0.06117, 0.06408, 0.06575, 0.06752, 0.06796, \
0.03750, 0.03868, 0.03956, 0.04257, 0.04684, 0.04858, 0.05268, 0.05887, \
0.06008, 0.06832, 0.07070, 0.07578, 0.07888, 0.08067, 0.08257, 0.08304, \
0.06203, 0.06325, 0.06415, 0.06724, 0.07164, 0.07344, 0.07766, 0.08406, \
0.08530, 0.09382, 0.09629, 0.10155, 0.10477, 0.10662, 0.10872, 0.10909, \
0.09996, 0.10118, 0.10209, 0.10521, 0.10965, 0.11146, 0.11572, 0.12217, \
0.12343, 0.13203, 0.13452, 0.13983, 0.14308, 0.14496, 0.14708, 0.14745 ");
}
}
capacitance () {
top_plane: metal6;
bottom_plane: metal1;
lateral_capacitance (capacitance_template_WxS) {
index_1 (" 0.0700, 0.0900, 0.1400, 0.2700, 0.2800, 0.5000, 0.9000, 1.5000 ");
index_2 (" 0.0700, 0.0900, 0.1050, 0.1575, 0.2363, 0.2700, 0.3544, 0.5000, \
0.5316, 0.7973, 0.9000, 1.1960, 1.5000, 1.7940, 2.6910, 269.1035 ");
values (" 0.06338, 0.05014, 0.04343, 0.02905, 0.01857, 0.01583, 0.01108, 0.00665, \
0.00602, 0.00287, 0.00223, 0.00116, 0.00063, 0.00036, 0.00007, 0.00000, \
0.06439, 0.05105, 0.04427, 0.02973, 0.01911, 0.01632, 0.01147, 0.00693, \
0.00628, 0.00302, 0.00235, 0.00123, 0.00067, 0.00038, 0.00008, 0.00000, \
0.06622, 0.05273, 0.04585, 0.03107, 0.02019, 0.01731, 0.01230, 0.00753, \
0.00684, 0.00334, 0.00261, 0.00137, 0.00075, 0.00043, 0.00009, 0.00000, \
0.06919, 0.05552, 0.04853, 0.03341, 0.02215, 0.01914, 0.01383, 0.00867, \
0.00792, 0.00399, 0.00314, 0.00168, 0.00092, 0.00054, 0.00011, 0.00000, \
0.06936, 0.05569, 0.04868, 0.03355, 0.02227, 0.01925, 0.01393, 0.00874, \
0.00798, 0.00403, 0.00318, 0.00170, 0.00094, 0.00054, 0.00011, 0.00000, \
0.07207, 0.05827, 0.05119, 0.03579, 0.02421, 0.02107, 0.01549, 0.00995, \
0.00912, 0.00473, 0.00376, 0.00204, 0.00114, 0.00066, 0.00013, 0.00000, \
0.07436, 0.06048, 0.05334, 0.03776, 0.02593, 0.02270, 0.01691, 0.01106, \
0.01017, 0.00541, 0.00433, 0.00238, 0.00134, 0.00078, 0.00016, 0.00000, \
0.07558, 0.06166, 0.05449, 0.03882, 0.02686, 0.02358, 0.01768, 0.01167, \
0.01075, 0.00578, 0.00464, 0.00257, 0.00145, 0.00085, 0.00018, 0.00000 ");
}
ground_capacitance (capacitance_template_WxS) {
index_1 (" 0.0700, 0.0900, 0.1400, 0.2700, 0.2800, 0.5000, 0.9000, 1.5000 ");
index_2 (" 0.0700, 0.0900, 0.1050, 0.1575, 0.2363, 0.2700, 0.3544, 0.5000, \
0.5316, 0.7973, 0.9000, 1.1960, 1.5000, 1.7940, 2.6910, 269.1035 ");
values (" 0.03119, 0.03456, 0.03699, 0.04444, 0.05315, 0.05615, 0.06203, 0.06877, \
0.06983, 0.07535, 0.07644, 0.07861, 0.07960, 0.08020, 0.08081, 0.08095, \
0.03519, 0.03854, 0.04095, 0.04838, 0.05710, 0.06012, 0.06608, 0.07295, \
0.07404, 0.07974, 0.08089, 0.08315, 0.08420, 0.08483, 0.08546, 0.08561, \
0.04506, 0.04835, 0.05073, 0.05809, 0.06684, 0.06989, 0.07598, 0.08312, \
0.08426, 0.09034, 0.09160, 0.09409, 0.09526, 0.09596, 0.09665, 0.09682, \
0.07037, 0.07359, 0.07593, 0.08322, 0.09202, 0.09514, 0.10146, 0.10905, \
0.11029, 0.11706, 0.11853, 0.12144, 0.12286, 0.12370, 0.12455, 0.12477, \
0.07231, 0.07553, 0.07787, 0.08515, 0.09396, 0.09708, 0.10342, 0.11103, \
0.11228, 0.11910, 0.12058, 0.12351, 0.12495, 0.12580, 0.12666, 0.12688, \
0.11505, 0.11825, 0.12057, 0.12785, 0.13676, 0.13995, 0.14650, 0.15455, \
0.15589, 0.16340, 0.16509, 0.16847, 0.17020, 0.17121, 0.17226, 0.17254, \
0.19335, 0.19655, 0.19888, 0.20621, 0.21523, 0.21849, 0.22524, 0.23368, \
0.23511, 0.24324, 0.24513, 0.24893, 0.25093, 0.25210, 0.25336, 0.25366, \
0.31191, 0.31512, 0.31746, 0.32483, 0.33394, 0.33724, 0.34411, 0.35276, \
0.35423, 0.36270, 0.36469, 0.36872, 0.37087, 0.37213, 0.37351, 0.37383 ");
}
}
capacitance () {
top_plane: metal6;
bottom_plane: poly;
lateral_capacitance (capacitance_template_WxS) {
index_1 (" 0.0700, 0.0900, 0.1400, 0.2700, 0.2800, 0.5000, 0.9000, 1.5000 ");
index_2 (" 0.0700, 0.0900, 0.1050, 0.1575, 0.2363, 0.2700, 0.3544, 0.5000, \
0.5316, 0.7973, 0.9000, 1.1960, 1.5000, 1.7940, 2.6910, 269.1035 ");
values (" 0.06818, 0.05520, 0.04864, 0.03459, 0.02415, 0.02131, 0.01619, 0.01091, \
0.01010, 0.00557, 0.00451, 0.00258, 0.00150, 0.00092, 0.00021, 0.00000, \
0.06960, 0.05647, 0.04982, 0.03553, 0.02487, 0.02197, 0.01671, 0.01129, \
0.01045, 0.00578, 0.00468, 0.00269, 0.00157, 0.00096, 0.00022, 0.00000, \
0.07221, 0.05885, 0.05204, 0.03734, 0.02628, 0.02325, 0.01776, 0.01205, \
0.01116, 0.00622, 0.00505, 0.00290, 0.00170, 0.00104, 0.00024, 0.00000, \
0.07615, 0.06249, 0.05548, 0.04022, 0.02860, 0.02539, 0.01953, 0.01338, \
0.01242, 0.00702, 0.00573, 0.00332, 0.00196, 0.00120, 0.00029, 0.00000, \
0.07636, 0.06269, 0.05566, 0.04038, 0.02873, 0.02551, 0.01963, 0.01346, \
0.01249, 0.00707, 0.00577, 0.00335, 0.00198, 0.00121, 0.00029, 0.00000, \
0.07936, 0.06551, 0.05837, 0.04276, 0.03074, 0.02739, 0.02124, 0.01472, \
0.01369, 0.00786, 0.00645, 0.00377, 0.00224, 0.00138, 0.00033, 0.00000, \
0.08161, 0.06768, 0.06048, 0.04468, 0.03241, 0.02897, 0.02262, 0.01583, \
0.01475, 0.00857, 0.00706, 0.00417, 0.00249, 0.00154, 0.00038, 0.00000, \
0.08278, 0.06881, 0.06158, 0.04568, 0.03330, 0.02981, 0.02336, 0.01642, \
0.01531, 0.00895, 0.00739, 0.00438, 0.00263, 0.00163, 0.00040, 0.00000 ");
}
ground_capacitance (capacitance_template_WxS) {
index_1 (" 0.0700, 0.0900, 0.1400, 0.2700, 0.2800, 0.5000, 0.9000, 1.5000 ");
index_2 (" 0.0700, 0.0900, 0.1050, 0.1575, 0.2363, 0.2700, 0.3544, 0.5000, \
0.5316, 0.7973, 0.9000, 1.1960, 1.5000, 1.7940, 2.6910, 269.1035 ");
values (" 0.01560, 0.01724, 0.01842, 0.02221, 0.02712, 0.02898, 0.03311, 0.03881, \
0.03985, 0.04638, 0.04807, 0.05153, 0.05353, 0.05471, 0.05605, 0.05649, \
0.01721, 0.01880, 0.01995, 0.02370, 0.02860, 0.03048, 0.03467, 0.04048, \
0.04155, 0.04825, 0.05001, 0.05357, 0.05565, 0.05687, 0.05827, 0.05873, \
0.02102, 0.02254, 0.02366, 0.02733, 0.03227, 0.03419, 0.03849, 0.04453, \
0.04564, 0.05269, 0.05455, 0.05837, 0.06061, 0.06193, 0.06343, 0.06394, \
0.03066, 0.03214, 0.03324, 0.03691, 0.04194, 0.04391, 0.04840, 0.05479, \
0.05597, 0.06359, 0.06565, 0.06989, 0.07242, 0.07392, 0.07566, 0.07625, \
0.03141, 0.03289, 0.03399, 0.03766, 0.04269, 0.04467, 0.04917, 0.05558, \
0.05676, 0.06442, 0.06648, 0.07075, 0.07330, 0.07481, 0.07656, 0.07715, \
0.04809, 0.04957, 0.05067, 0.05436, 0.05947, 0.06150, 0.06614, 0.07283, \
0.07408, 0.08224, 0.08448, 0.08916, 0.09200, 0.09370, 0.09570, 0.09638, \
0.07918, 0.08067, 0.08178, 0.08551, 0.09070, 0.09277, 0.09753, 0.10447, \
0.10577, 0.11438, 0.11677, 0.12182, 0.12492, 0.12679, 0.12914, 0.12979, \
0.12682, 0.12832, 0.12944, 0.13320, 0.13845, 0.14055, 0.14538, 0.15246, \
0.15379, 0.16265, 0.16512, 0.17036, 0.17361, 0.17557, 0.17805, 0.17874 ");
}
}
capacitance () {
top_plane: metal6;
bottom_plane: SUBSTRATE;
lateral_capacitance (capacitance_template_WxS) {
index_1 (" 0.0700, 0.0900, 0.1400, 0.2700, 0.2800, 0.5000, 0.9000, 1.5000 ");
index_2 (" 0.0700, 0.0900, 0.1050, 0.1575, 0.2363, 0.2700, 0.3544, 0.5000, \
0.5316, 0.7973, 0.9000, 1.1960, 1.5000, 1.7940, 2.6910, 269.1035 ");
values (" 0.06953, 0.05666, 0.05017, 0.03635, 0.02616, 0.02340, 0.01841, 0.01316, \
0.01233, 0.00748, 0.00625, 0.00387, 0.00241, 0.00155, 0.00042, 0.00000, \
0.07107, 0.05805, 0.05147, 0.03740, 0.02700, 0.02417, 0.01904, 0.01362, \
0.01276, 0.00775, 0.00648, 0.00402, 0.00251, 0.00162, 0.00044, 0.00000, \
0.07400, 0.06074, 0.05400, 0.03951, 0.02868, 0.02571, 0.02030, 0.01456, \
0.01364, 0.00831, 0.00696, 0.00431, 0.00269, 0.00174, 0.00047, 0.00000, \
0.07868, 0.06509, 0.05812, 0.04301, 0.03151, 0.02832, 0.02247, 0.01619, \
0.01518, 0.00929, 0.00780, 0.00485, 0.00304, 0.00197, 0.00054, 0.00000, \
0.07894, 0.06533, 0.05835, 0.04321, 0.03167, 0.02847, 0.02259, 0.01628, \
0.01527, 0.00935, 0.00785, 0.00488, 0.00306, 0.00198, 0.00054, 0.00000, \
0.08263, 0.06880, 0.06168, 0.04610, 0.03407, 0.03070, 0.02448, 0.01774, \
0.01665, 0.01027, 0.00864, 0.00540, 0.00340, 0.00221, 0.00061, 0.00000, \
0.08519, 0.07126, 0.06405, 0.04822, 0.03590, 0.03242, 0.02596, 0.01892, \
0.01777, 0.01103, 0.00930, 0.00584, 0.00369, 0.00240, 0.00067, 0.00000, \
0.08639, 0.07241, 0.06517, 0.04924, 0.03678, 0.03326, 0.02670, 0.01951, \
0.01834, 0.01142, 0.00964, 0.00606, 0.00384, 0.00250, 0.00070, 0.00000 ");
}
ground_capacitance (capacitance_template_WxS) {
index_1 (" 0.0700, 0.0900, 0.1400, 0.2700, 0.2800, 0.5000, 0.9000, 1.5000 ");
index_2 (" 0.0700, 0.0900, 0.1050, 0.1575, 0.2363, 0.2700, 0.3544, 0.5000, \
0.5316, 0.7973, 0.9000, 1.1960, 1.5000, 1.7940, 2.6910, 269.1035 ");
values (" 0.01204, 0.01332, 0.01424, 0.01711, 0.02075, 0.02213, 0.02522, 0.02971, \
0.03057, 0.03649, 0.03823, 0.04208, 0.04464, 0.04627, 0.04843, 0.04929, \
0.01326, 0.01447, 0.01534, 0.01812, 0.02170, 0.02308, 0.02620, 0.03078, \
0.03166, 0.03775, 0.03955, 0.04351, 0.04616, 0.04785, 0.05009, 0.05099, \
0.01597, 0.01707, 0.01787, 0.02050, 0.02403, 0.02542, 0.02862, 0.03339, \
0.03432, 0.04073, 0.04264, 0.04689, 0.04971, 0.05152, 0.05391, 0.05488, \
0.02227, 0.02329, 0.02405, 0.02659, 0.03017, 0.03160, 0.03497, 0.04009, \
0.04108, 0.04807, 0.05017, 0.05486, 0.05802, 0.06004, 0.06274, 0.06384, \
0.02275, 0.02377, 0.02452, 0.02707, 0.03065, 0.03209, 0.03547, 0.04060, \
0.04161, 0.04862, 0.05073, 0.05545, 0.05863, 0.06066, 0.06338, 0.06449, \
0.03355, 0.03457, 0.03533, 0.03792, 0.04160, 0.04310, 0.04665, 0.05207, \
0.05314, 0.06065, 0.06293, 0.06805, 0.07153, 0.07377, 0.07679, 0.07804, \
0.05427, 0.05531, 0.05608, 0.05873, 0.06252, 0.06406, 0.06773, 0.07338, \
0.07450, 0.08241, 0.08482, 0.09028, 0.09401, 0.09643, 0.09983, 0.10107, \
0.08652, 0.08757, 0.08835, 0.09103, 0.09488, 0.09645, 0.10019, 0.10596, \
0.10710, 0.11520, 0.11769, 0.12332, 0.12718, 0.12968, 0.13322, 0.13453 ");
}
}
capacitance () {
top_plane: AIR;
bottom_plane: metal1;
lateral_capacitance (capacitance_template_WxS) {
index_1 (" 0.0700, 0.0900, 0.1400, 0.2700, 0.2800, 0.5000, 0.9000, 1.5000 ");
index_2 (" 0.0700, 0.0900, 0.1050, 0.1575, 0.2363, 0.2700, 0.3544, 0.5000, \
0.5316, 0.7973, 0.9000, 1.1960, 1.5000, 1.7940, 2.6910, 269.1035 ");
values (" 0.06394, 0.05072, 0.04402, 0.02969, 0.01924, 0.01650, 0.01176, 0.00734, \
0.00671, 0.00354, 0.00289, 0.00177, 0.00117, 0.00084, 0.00039, 0.00000, \
0.06496, 0.05164, 0.04488, 0.03038, 0.01980, 0.01702, 0.01220, 0.00767, \
0.00702, 0.00375, 0.00306, 0.00189, 0.00126, 0.00090, 0.00042, 0.00000, \
0.06684, 0.05337, 0.04651, 0.03178, 0.02096, 0.01810, 0.01313, 0.00839, \
0.00770, 0.00421, 0.00346, 0.00216, 0.00145, 0.00105, 0.00050, 0.00000, \
0.06997, 0.05634, 0.04936, 0.03432, 0.02317, 0.02020, 0.01496, 0.00988, \
0.00913, 0.00521, 0.00435, 0.00279, 0.00192, 0.00142, 0.00069, 0.00000, \
0.07017, 0.05652, 0.04954, 0.03448, 0.02331, 0.02033, 0.01508, 0.00998, \
0.00922, 0.00528, 0.00441, 0.00284, 0.00196, 0.00145, 0.00071, 0.00000, \
0.07336, 0.05961, 0.05255, 0.03727, 0.02583, 0.02274, 0.01726, 0.01182, \
0.01101, 0.00662, 0.00562, 0.00376, 0.00267, 0.00202, 0.00103, 0.00000, \
0.07687, 0.06305, 0.05595, 0.04049, 0.02883, 0.02566, 0.01997, 0.01422, \
0.01334, 0.00850, 0.00735, 0.00515, 0.00380, 0.00296, 0.00162, 0.00000, \
0.08012, 0.06625, 0.05912, 0.04357, 0.03176, 0.02853, 0.02270, 0.01672, \
0.01579, 0.01059, 0.00932, 0.00681, 0.00521, 0.00418, 0.00245, 0.00000 ");
}
ground_capacitance (capacitance_template_WxS) {
index_1 (" 0.0700, 0.0900, 0.1400, 0.2700, 0.2800, 0.5000, 0.9000, 1.5000 ");
index_2 (" 0.0700, 0.0900, 0.1050, 0.1575, 0.2363, 0.2700, 0.3544, 0.5000, \
0.5316, 0.7973, 0.9000, 1.1960, 1.5000, 1.7940, 2.6910, 269.1035 ");
values (" 0.02976, 0.03305, 0.03543, 0.04273, 0.05130, 0.05425, 0.06005, 0.06672, \
0.06778, 0.07329, 0.07440, 0.07665, 0.07776, 0.07848, 0.07942, 0.08020, \
0.03372, 0.03698, 0.03934, 0.04662, 0.05517, 0.05813, 0.06399, 0.07075, \
0.07183, 0.07750, 0.07867, 0.08101, 0.08219, 0.08295, 0.08394, 0.08479, \
0.04345, 0.04666, 0.04898, 0.05616, 0.06469, 0.06766, 0.07359, 0.08055, \
0.08167, 0.08767, 0.08895, 0.09152, 0.09284, 0.09369, 0.09480, 0.09581, \
0.06826, 0.07138, 0.07364, 0.08067, 0.08912, 0.09211, 0.09815, 0.10543, \
0.10662, 0.11322, 0.11469, 0.11770, 0.11933, 0.12038, 0.12183, 0.12323, \
0.07016, 0.07327, 0.07553, 0.08255, 0.09100, 0.09398, 0.10003, 0.10733, \
0.10852, 0.11516, 0.11664, 0.11968, 0.12133, 0.12240, 0.12387, 0.12530, \
0.11144, 0.11449, 0.11670, 0.12361, 0.13201, 0.13501, 0.14116, 0.14874, \
0.15001, 0.15726, 0.15896, 0.16250, 0.16453, 0.16586, 0.16780, 0.16989, \
0.18584, 0.18884, 0.19103, 0.19786, 0.20622, 0.20923, 0.21547, 0.22332, \
0.22466, 0.23253, 0.23446, 0.23858, 0.24108, 0.24277, 0.24541, 0.24864, \
0.29695, 0.29993, 0.30210, 0.30889, 0.31722, 0.32024, 0.32653, 0.33458, \
0.33597, 0.34432, 0.34644, 0.35106, 0.35400, 0.35604, 0.35943, 0.36430 ");
}
}
capacitance () {
top_plane: AIR;
bottom_plane: poly;
lateral_capacitance (capacitance_template_WxS) {
index_1 (" 0.0700, 0.0900, 0.1400, 0.2700, 0.2800, 0.5000, 0.9000, 1.5000 ");
index_2 (" 0.0700, 0.0900, 0.1050, 0.1575, 0.2363, 0.2700, 0.3544, 0.5000, \
0.5316, 0.7973, 0.9000, 1.1960, 1.5000, 1.7940, 2.6910, 269.1035 ");
values (" 0.06899, 0.05604, 0.04951, 0.03551, 0.02512, 0.02230, 0.01721, 0.01198, \
0.01118, 0.00671, 0.00565, 0.00370, 0.00256, 0.00188, 0.00090, 0.00000, \
0.07043, 0.05734, 0.05070, 0.03646, 0.02586, 0.02298, 0.01777, 0.01241, \
0.01158, 0.00699, 0.00590, 0.00389, 0.00269, 0.00199, 0.00096, 0.00000, \
0.07309, 0.05975, 0.05296, 0.03832, 0.02734, 0.02434, 0.01891, 0.01330, \
0.01243, 0.00759, 0.00643, 0.00426, 0.00298, 0.00221, 0.00108, 0.00000, \
0.07718, 0.06355, 0.05656, 0.04139, 0.02989, 0.02673, 0.02098, 0.01499, \
0.01406, 0.00879, 0.00752, 0.00509, 0.00362, 0.00273, 0.00137, 0.00000, \
0.07741, 0.06376, 0.05677, 0.04157, 0.03005, 0.02687, 0.02111, 0.01510, \
0.01416, 0.00887, 0.00760, 0.00515, 0.00367, 0.00277, 0.00139, 0.00000, \
0.08089, 0.06709, 0.05998, 0.04449, 0.03263, 0.02935, 0.02335, 0.01703, \
0.01603, 0.01036, 0.00897, 0.00624, 0.00455, 0.00350, 0.00184, 0.00000, \
0.08437, 0.07050, 0.06334, 0.04766, 0.03559, 0.03222, 0.02604, 0.01945, \
0.01840, 0.01235, 0.01083, 0.00780, 0.00586, 0.00461, 0.00257, 0.00000, \
0.08756, 0.07364, 0.06644, 0.05067, 0.03846, 0.03504, 0.02873, 0.02195, \
0.02086, 0.01451, 0.01288, 0.00958, 0.00742, 0.00598, 0.00354, 0.00000 ");
}
ground_capacitance (capacitance_template_WxS) {
index_1 (" 0.0700, 0.0900, 0.1400, 0.2700, 0.2800, 0.5000, 0.9000, 1.5000 ");
index_2 (" 0.0700, 0.0900, 0.1050, 0.1575, 0.2363, 0.2700, 0.3544, 0.5000, \
0.5316, 0.7973, 0.9000, 1.1960, 1.5000, 1.7940, 2.6910, 269.1035 ");
values (" 0.01357, 0.01510, 0.01621, 0.01980, 0.02451, 0.02630, 0.03028, 0.03574, \
0.03673, 0.04295, 0.04458, 0.04796, 0.05002, 0.05133, 0.05319, 0.05501, \
0.01512, 0.01661, 0.01770, 0.02125, 0.02593, 0.02773, 0.03173, 0.03726, \
0.03826, 0.04461, 0.04629, 0.04975, 0.05190, 0.05326, 0.05521, 0.05714, \
0.01880, 0.02024, 0.02129, 0.02476, 0.02942, 0.03123, 0.03526, 0.04091, \
0.04195, 0.04854, 0.05030, 0.05400, 0.05629, 0.05776, 0.05989, 0.06206, \
0.02799, 0.02937, 0.03039, 0.03377, 0.03839, 0.04019, 0.04428, 0.05008, \
0.05115, 0.05811, 0.06002, 0.06408, 0.06668, 0.06836, 0.07089, 0.07365, \
0.02869, 0.03007, 0.03108, 0.03446, 0.03907, 0.04088, 0.04497, 0.05077, \
0.05185, 0.05883, 0.06074, 0.06483, 0.06744, 0.06914, 0.07170, 0.07450, \
0.04394, 0.04527, 0.04625, 0.04955, 0.05408, 0.05587, 0.05996, 0.06585, \
0.06695, 0.07424, 0.07629, 0.08074, 0.08369, 0.08565, 0.08872, 0.09239, \
0.07113, 0.07242, 0.07338, 0.07659, 0.08104, 0.08281, 0.08687, 0.09282, \
0.09394, 0.10152, 0.10371, 0.10855, 0.11188, 0.11416, 0.11802, 0.12301, \
0.11135, 0.11262, 0.11356, 0.11671, 0.12110, 0.12286, 0.12690, 0.13288, \
0.13403, 0.14182, 0.14412, 0.14930, 0.15296, 0.15553, 0.16011, 0.16698 ");
}
}
capacitance () {
top_plane: AIR;
bottom_plane: SUBSTRATE;
lateral_capacitance (capacitance_template_WxS) {
index_1 (" 0.0700, 0.0900, 0.1400, 0.2700, 0.2800, 0.5000, 0.9000, 1.5000 ");
index_2 (" 0.0700, 0.0900, 0.1050, 0.1575, 0.2363, 0.2700, 0.3544, 0.5000, \
0.5316, 0.7973, 0.9000, 1.1960, 1.5000, 1.7940, 2.6910, 269.1035 ");
values (" 0.07053, 0.05771, 0.05126, 0.03751, 0.02739, 0.02465, 0.01969, 0.01451, \
0.01369, 0.00894, 0.00775, 0.00539, 0.00389, 0.00295, 0.00149, 0.00000, \
0.07211, 0.05913, 0.05258, 0.03859, 0.02825, 0.02544, 0.02036, 0.01502, \
0.01418, 0.00929, 0.00805, 0.00562, 0.00407, 0.00310, 0.00156, 0.00000, \
0.07510, 0.06187, 0.05515, 0.04073, 0.02998, 0.02704, 0.02171, 0.01609, \
0.01519, 0.01001, 0.00870, 0.00610, 0.00444, 0.00339, 0.00173, 0.00000, \
0.07992, 0.06636, 0.05943, 0.04440, 0.03303, 0.02989, 0.02416, 0.01807, \
0.01710, 0.01143, 0.00999, 0.00709, 0.00523, 0.00404, 0.00211, 0.00000, \
0.08019, 0.06662, 0.05967, 0.04462, 0.03321, 0.03006, 0.02431, 0.01819, \
0.01721, 0.01152, 0.01007, 0.00716, 0.00528, 0.00408, 0.00214, 0.00000, \
0.08435, 0.07057, 0.06348, 0.04802, 0.03617, 0.03288, 0.02682, 0.02032, \
0.01928, 0.01316, 0.01159, 0.00839, 0.00630, 0.00494, 0.00268, 0.00000, \
0.08814, 0.07426, 0.06710, 0.05141, 0.03928, 0.03588, 0.02960, 0.02281, \
0.02171, 0.01522, 0.01353, 0.01004, 0.00772, 0.00617, 0.00353, 0.00000, \
0.09134, 0.07741, 0.07021, 0.05441, 0.04214, 0.03868, 0.03228, 0.02530, \
0.02417, 0.01740, 0.01561, 0.01188, 0.00935, 0.00763, 0.00460, 0.00000 ");
}
ground_capacitance (capacitance_template_WxS) {
index_1 (" 0.0700, 0.0900, 0.1400, 0.2700, 0.2800, 0.5000, 0.9000, 1.5000 ");
index_2 (" 0.0700, 0.0900, 0.1050, 0.1575, 0.2363, 0.2700, 0.3544, 0.5000, \
0.5316, 0.7973, 0.9000, 1.1960, 1.5000, 1.7940, 2.6910, 269.1035 ");
values (" 0.00956, 0.01068, 0.01149, 0.01409, 0.01749, 0.01878, 0.02170, 0.02590, \
0.02670, 0.03214, 0.03374, 0.03731, 0.03978, 0.04147, 0.04416, 0.04711, \
0.01068, 0.01175, 0.01253, 0.01506, 0.01839, 0.01967, 0.02259, 0.02683, \
0.02764, 0.03318, 0.03482, 0.03846, 0.04102, 0.04276, 0.04555, 0.04866, \
0.01322, 0.01421, 0.01493, 0.01732, 0.02056, 0.02184, 0.02475, 0.02906, \
0.02990, 0.03562, 0.03734, 0.04120, 0.04391, 0.04576, 0.04877, 0.05219, \
0.01909, 0.02000, 0.02067, 0.02293, 0.02607, 0.02733, 0.03027, 0.03468, \
0.03554, 0.04157, 0.04340, 0.04759, 0.05058, 0.05266, 0.05610, 0.06027, \
0.01953, 0.02043, 0.02110, 0.02335, 0.02649, 0.02775, 0.03069, 0.03511, \
0.03597, 0.04201, 0.04385, 0.04806, 0.05107, 0.05316, 0.05663, 0.06085, \
0.02894, 0.02981, 0.03045, 0.03264, 0.03572, 0.03697, 0.03991, 0.04440, \
0.04528, 0.05155, 0.05349, 0.05799, 0.06127, 0.06360, 0.06759, 0.07285, \
0.04579, 0.04663, 0.04725, 0.04937, 0.05239, 0.05362, 0.05653, 0.06103, \
0.06193, 0.06835, 0.07038, 0.07515, 0.07872, 0.08131, 0.08603, 0.09280, \
0.07066, 0.07147, 0.07208, 0.07415, 0.07710, 0.07831, 0.08119, 0.08567, \
0.08657, 0.09309, 0.09518, 0.10016, 0.10398, 0.10680, 0.11213, 0.12093 ");
}
}
}
layer (metal1) {
resistance: 0.380000
capacitance () {
top_plane: metal2;
bottom_plane: poly;
lateral_capacitance (capacitance_template_WxS) {
index_1 (" 0.0700, 0.0900, 0.1400, 0.2700, 0.2800, 0.5000, 0.9000, 1.5000 ");
index_2 (" 0.0650, 0.0900, 0.0975, 0.1462, 0.2194, 0.2700, 0.3291, 0.4936, \
0.5000, 0.7404, 0.9000, 1.1106, 1.5000, 1.6659, 2.4988, 249.8818 ");
values (" 0.05612, 0.03899, 0.03546, 0.02048, 0.00993, 0.00618, 0.00357, 0.00081, \
0.00076, 0.00009, 0.00002, 0.00000, 0.00000, 0.00000, 0.00000, 0.00000, \
0.05637, 0.03916, 0.03562, 0.02056, 0.00997, 0.00621, 0.00358, 0.00081, \
0.00076, 0.00009, 0.00002, 0.00000, 0.00000, 0.00000, 0.00000, 0.00000, \
0.05658, 0.03931, 0.03575, 0.02064, 0.01001, 0.00623, 0.00360, 0.00082, \
0.00076, 0.00009, 0.00002, 0.00000, 0.00000, 0.00000, 0.00000, 0.00000, \
0.05663, 0.03935, 0.03579, 0.02066, 0.01002, 0.00624, 0.00360, 0.00082, \
0.00076, 0.00009, 0.00002, 0.00000, 0.00000, 0.00000, 0.00000, 0.00000, \
0.05664, 0.03935, 0.03579, 0.02066, 0.01002, 0.00624, 0.00360, 0.00082, \
0.00076, 0.00009, 0.00002, 0.00000, 0.00000, 0.00000, 0.00000, 0.00000, \
0.05662, 0.03934, 0.03578, 0.02066, 0.01002, 0.00624, 0.00360, 0.00082, \
0.00076, 0.00009, 0.00002, 0.00000, 0.00000, 0.00000, 0.00000, 0.00000, \
0.05664, 0.03935, 0.03579, 0.02066, 0.01002, 0.00624, 0.00360, 0.00082, \
0.00076, 0.00009, 0.00002, 0.00000, 0.00000, 0.00000, 0.00000, 0.00000, \
0.05664, 0.03935, 0.03579, 0.02066, 0.01002, 0.00624, 0.00360, 0.00082, \
0.00076, 0.00009, 0.00002, 0.00000, 0.00000, 0.00000, 0.00000, 0.00000 ");
}
ground_capacitance (capacitance_template_WxS) {
index_1 (" 0.0700, 0.0900, 0.1400, 0.2700, 0.2800, 0.5000, 0.9000, 1.5000 ");
index_2 (" 0.0650, 0.0900, 0.0975, 0.1462, 0.2194, 0.2700, 0.3291, 0.4936, \
0.5000, 0.7404, 0.9000, 1.1106, 1.5000, 1.6659, 2.4988, 249.8818 ");
values (" 0.05792, 0.06622, 0.06861, 0.08193, 0.09595, 0.10228, 0.10687, 0.11258, \
0.11239, 0.11402, 0.11399, 0.11416, 0.11407, 0.11413, 0.11430, 0.11429, \
0.06672, 0.07508, 0.07748, 0.09087, 0.10496, 0.11131, 0.11592, 0.12165, \
0.12147, 0.12310, 0.12308, 0.12325, 0.12315, 0.12321, 0.12337, 0.12336, \
0.08881, 0.09723, 0.09964, 0.11310, 0.12724, 0.13362, 0.13824, 0.14399, \
0.14381, 0.14545, 0.14542, 0.14559, 0.14550, 0.14556, 0.14571, 0.14571, \
0.14658, 0.15501, 0.15742, 0.17090, 0.18505, 0.19144, 0.19607, 0.20182, \
0.20164, 0.20328, 0.20326, 0.20343, 0.20333, 0.20339, 0.20355, 0.20355, \
0.15102, 0.15946, 0.16187, 0.17535, 0.18951, 0.19589, 0.20052, 0.20627, \
0.20609, 0.20774, 0.20771, 0.20788, 0.20778, 0.20785, 0.20801, 0.20800, \
0.24891, 0.25735, 0.25976, 0.27323, 0.28739, 0.29378, 0.29840, 0.30416, \
0.30397, 0.30562, 0.30559, 0.30576, 0.30567, 0.30573, 0.30589, 0.30588, \
0.42687, 0.43531, 0.43772, 0.45120, 0.46536, 0.47174, 0.47637, 0.48212, \
0.48194, 0.48358, 0.48356, 0.48373, 0.48364, 0.48369, 0.48366, 0.48385, \
0.69381, 0.70225, 0.70467, 0.71814, 0.73230, 0.73869, 0.74332, 0.74907, \
0.74889, 0.75053, 0.75051, 0.75068, 0.75058, 0.75064, 0.75061, 0.75080 ");
}
}
capacitance () {
top_plane: metal2;
bottom_plane: SUBSTRATE;
lateral_capacitance (capacitance_template_WxS) {
index_1 (" 0.0700, 0.0900, 0.1400, 0.2700, 0.2800, 0.5000, 0.9000, 1.5000 ");
index_2 (" 0.0650, 0.0900, 0.0975, 0.1462, 0.2194, 0.2700, 0.3291, 0.4936, \
0.5000, 0.7404, 0.9000, 1.1106, 1.5000, 1.6659, 2.4988, 249.8818 ");
values (" 0.06204, 0.04523, 0.04177, 0.02694, 0.01592, 0.01154, 0.00805, 0.00316, \
0.00304, 0.00083, 0.00036, 0.00012, 0.00002, 0.00001, 0.00000, 0.00000, \
0.06285, 0.04588, 0.04238, 0.02737, 0.01620, 0.01175, 0.00821, 0.00323, \
0.00311, 0.00085, 0.00037, 0.00013, 0.00002, 0.00001, 0.00000, 0.00000, \
0.06406, 0.04687, 0.04332, 0.02807, 0.01666, 0.01210, 0.00847, 0.00335, \
0.00322, 0.00088, 0.00038, 0.00013, 0.00002, 0.00001, 0.00000, 0.00000, \
0.06530, 0.04793, 0.04433, 0.02882, 0.01717, 0.01250, 0.00877, 0.00348, \
0.00334, 0.00092, 0.00040, 0.00014, 0.00002, 0.00001, 0.00000, 0.00000, \
0.06536, 0.04798, 0.04438, 0.02885, 0.01719, 0.01251, 0.00878, 0.00348, \
0.00335, 0.00092, 0.00040, 0.00014, 0.00002, 0.00001, 0.00000, 0.00000, \
0.06580, 0.04836, 0.04474, 0.02913, 0.01738, 0.01266, 0.00889, 0.00353, \
0.00340, 0.00094, 0.00041, 0.00014, 0.00002, 0.00001, 0.00000, 0.00000, \
0.06590, 0.04845, 0.04482, 0.02919, 0.01742, 0.01269, 0.00891, 0.00354, \
0.00341, 0.00094, 0.00041, 0.00014, 0.00002, 0.00001, 0.00000, 0.00000, \
0.06591, 0.04845, 0.04483, 0.02920, 0.01743, 0.01269, 0.00892, 0.00354, \
0.00341, 0.00094, 0.00041, 0.00014, 0.00002, 0.00001, 0.00000, 0.00000 ");
}
ground_capacitance (capacitance_template_WxS) {
index_1 (" 0.0700, 0.0900, 0.1400, 0.2700, 0.2800, 0.5000, 0.9000, 1.5000 ");
index_2 (" 0.0650, 0.0900, 0.0975, 0.1462, 0.2194, 0.2700, 0.3291, 0.4936, \
0.5000, 0.7404, 0.9000, 1.1106, 1.5000, 1.6659, 2.4988, 249.8818 ");
values (" 0.03600, 0.04115, 0.04265, 0.05152, 0.06222, 0.06798, 0.07309, 0.08169, \
0.08175, 0.08622, 0.08709, 0.08766, 0.08783, 0.08789, 0.08792, 0.08791, \
0.04085, 0.04606, 0.04758, 0.05654, 0.06738, 0.07321, 0.07840, 0.08715, \
0.08721, 0.09176, 0.09266, 0.09324, 0.09342, 0.09348, 0.09349, 0.09349, \
0.05319, 0.05848, 0.06002, 0.06912, 0.08016, 0.08611, 0.09143, 0.10043, \
0.10050, 0.10520, 0.10613, 0.10674, 0.10692, 0.10698, 0.10698, 0.10698, \
0.08609, 0.09145, 0.09302, 0.10227, 0.11353, 0.11962, 0.12508, 0.13435, \
0.13444, 0.13931, 0.14029, 0.14092, 0.14111, 0.14117, 0.14116, 0.14116, \
0.08864, 0.09401, 0.09558, 0.10484, 0.11611, 0.12220, 0.12767, 0.13695, \
0.13704, 0.14192, 0.14290, 0.14352, 0.14372, 0.14378, 0.14377, 0.14377, \
0.14526, 0.15067, 0.15224, 0.16157, 0.17292, 0.17907, 0.18459, 0.19397, \
0.19407, 0.19900, 0.20000, 0.20064, 0.20084, 0.20090, 0.20089, 0.20089, \
0.24868, 0.25410, 0.25567, 0.26501, 0.27638, 0.28254, 0.28807, 0.29748, \
0.29757, 0.30252, 0.30352, 0.30416, 0.30436, 0.30442, 0.30442, 0.30441, \
0.40390, 0.40932, 0.41089, 0.42023, 0.43160, 0.43776, 0.44330, 0.45270, \
0.45279, 0.45775, 0.45875, 0.45939, 0.45959, 0.45965, 0.45964, 0.45964 ");
}
}
capacitance () {
top_plane: metal3;
bottom_plane: poly;
lateral_capacitance (capacitance_template_WxS) {
index_1 (" 0.0700, 0.0900, 0.1400, 0.2700, 0.2800, 0.5000, 0.9000, 1.5000 ");
index_2 (" 0.0650, 0.0900, 0.0975, 0.1462, 0.2194, 0.2700, 0.3291, 0.4936, \
0.5000, 0.7404, 0.9000, 1.1106, 1.5000, 1.6659, 2.4988, 249.8818 ");
values (" 0.06056, 0.04380, 0.04037, 0.02574, 0.01505, 0.01087, 0.00758, 0.00301, \
0.00290, 0.00081, 0.00036, 0.00013, 0.00002, 0.00001, 0.00000, 0.00000, \
0.06134, 0.04445, 0.04098, 0.02619, 0.01536, 0.01111, 0.00776, 0.00309, \
0.00297, 0.00084, 0.00037, 0.00013, 0.00002, 0.00001, 0.00000, 0.00000, \
0.06259, 0.04551, 0.04199, 0.02696, 0.01588, 0.01151, 0.00807, 0.00322, \
0.00310, 0.00087, 0.00039, 0.00013, 0.00002, 0.00001, 0.00000, 0.00000, \
0.06405, 0.04677, 0.04320, 0.02788, 0.01651, 0.01201, 0.00843, 0.00339, \
0.00326, 0.00092, 0.00041, 0.00014, 0.00002, 0.00001, 0.00000, 0.00000, \
0.06412, 0.04682, 0.04325, 0.02792, 0.01654, 0.01203, 0.00845, 0.00339, \
0.00327, 0.00092, 0.00041, 0.00014, 0.00002, 0.00001, 0.00000, 0.00000, \
0.06469, 0.04731, 0.04372, 0.02828, 0.01678, 0.01222, 0.00859, 0.00346, \
0.00333, 0.00094, 0.00042, 0.00015, 0.00002, 0.00001, 0.00000, 0.00000, \
0.06482, 0.04742, 0.04382, 0.02835, 0.01684, 0.01226, 0.00862, 0.00347, \
0.00334, 0.00095, 0.00042, 0.00015, 0.00002, 0.00001, 0.00000, 0.00000, \
0.06483, 0.04743, 0.04383, 0.02836, 0.01684, 0.01226, 0.00863, 0.00347, \
0.00334, 0.00095, 0.00042, 0.00015, 0.00002, 0.00001, 0.00000, 0.00000 ");
}
ground_capacitance (capacitance_template_WxS) {
index_1 (" 0.0700, 0.0900, 0.1400, 0.2700, 0.2800, 0.5000, 0.9000, 1.5000 ");
index_2 (" 0.0650, 0.0900, 0.0975, 0.1462, 0.2194, 0.2700, 0.3291, 0.4936, \
0.5000, 0.7404, 0.9000, 1.1106, 1.5000, 1.6659, 2.4988, 249.8818 ");
values (" 0.04351, 0.04943, 0.05113, 0.06081, 0.07186, 0.07758, 0.08249, 0.09069, \
0.09068, 0.09495, 0.09575, 0.09634, 0.09648, 0.09655, 0.09667, 0.09666, \
0.04961, 0.05555, 0.05726, 0.06702, 0.07818, 0.08399, 0.08898, 0.09734, \
0.09734, 0.10170, 0.10253, 0.10313, 0.10329, 0.10336, 0.10345, 0.10345, \
0.06494, 0.07093, 0.07266, 0.08252, 0.09389, 0.09983, 0.10497, 0.11361, \
0.11362, 0.11816, 0.11904, 0.11966, 0.11983, 0.11990, 0.11999, 0.11998, \
0.10551, 0.11157, 0.11332, 0.12334, 0.13496, 0.14107, 0.14638, 0.15537, \
0.15539, 0.16014, 0.16107, 0.16173, 0.16191, 0.16198, 0.16206, 0.16206, \
0.10866, 0.11472, 0.11647, 0.12650, 0.13814, 0.14425, 0.14957, 0.15857, \
0.15859, 0.16335, 0.16429, 0.16494, 0.16512, 0.16519, 0.16528, 0.16527, \
0.17839, 0.18449, 0.18626, 0.19636, 0.20811, 0.21428, 0.21968, 0.22881, \
0.22884, 0.23368, 0.23464, 0.23530, 0.23549, 0.23556, 0.23564, 0.23564, \
0.30579, 0.31190, 0.31367, 0.32379, 0.33555, 0.34175, 0.34715, 0.35632, \
0.35634, 0.36120, 0.36216, 0.36283, 0.36302, 0.36309, 0.36309, 0.36317, \
0.49700, 0.50311, 0.50488, 0.51500, 0.52677, 0.53296, 0.53837, 0.54753, \
0.54756, 0.55242, 0.55338, 0.55405, 0.55424, 0.55431, 0.55431, 0.55439 ");
}
}
capacitance () {
top_plane: metal3;
bottom_plane: SUBSTRATE;
lateral_capacitance (capacitance_template_WxS) {
index_1 (" 0.0700, 0.0900, 0.1400, 0.2700, 0.2800, 0.5000, 0.9000, 1.5000 ");
index_2 (" 0.0650, 0.0900, 0.0975, 0.1462, 0.2194, 0.2700, 0.3291, 0.4936, \
0.5000, 0.7404, 0.9000, 1.1106, 1.5000, 1.6659, 2.4988, 249.8818 ");
values (" 0.06663, 0.05020, 0.04684, 0.03244, 0.02152, 0.01695, 0.01308, 0.00676, \
0.00658, 0.00264, 0.00145, 0.00067, 0.00016, 0.00009, 0.00000, 0.00000, \
0.06793, 0.05130, 0.04788, 0.03321, 0.02206, 0.01737, 0.01340, 0.00693, \
0.00674, 0.00270, 0.00149, 0.00069, 0.00017, 0.00009, 0.00000, 0.00000, \
0.07013, 0.05315, 0.04965, 0.03455, 0.02297, 0.01810, 0.01397, 0.00722, \
0.00703, 0.00282, 0.00155, 0.00071, 0.00017, 0.00010, 0.00000, 0.00000, \
0.07269, 0.05534, 0.05174, 0.03613, 0.02407, 0.01896, 0.01464, 0.00757, \
0.00737, 0.00295, 0.00162, 0.00075, 0.00018, 0.00010, 0.00000, 0.00000, \
0.07279, 0.05543, 0.05183, 0.03619, 0.02411, 0.01900, 0.01467, 0.00758, \
0.00738, 0.00296, 0.00163, 0.00075, 0.00018, 0.00010, 0.00000, 0.00000, \
0.07377, 0.05627, 0.05263, 0.03680, 0.02453, 0.01933, 0.01492, 0.00771, \
0.00751, 0.00301, 0.00166, 0.00076, 0.00019, 0.00010, 0.00000, 0.00000, \
0.07398, 0.05645, 0.05280, 0.03693, 0.02462, 0.01940, 0.01498, 0.00774, \
0.00753, 0.00302, 0.00166, 0.00076, 0.00019, 0.00010, 0.00001, 0.00000, \
0.07400, 0.05646, 0.05281, 0.03694, 0.02462, 0.01940, 0.01498, 0.00774, \
0.00754, 0.00302, 0.00166, 0.00076, 0.00019, 0.00010, 0.00001, 0.00000 ");
}
ground_capacitance (capacitance_template_WxS) {
index_1 (" 0.0700, 0.0900, 0.1400, 0.2700, 0.2800, 0.5000, 0.9000, 1.5000 ");
index_2 (" 0.0650, 0.0900, 0.0975, 0.1462, 0.2194, 0.2700, 0.3291, 0.4936, \
0.5000, 0.7404, 0.9000, 1.1106, 1.5000, 1.6659, 2.4988, 249.8818 ");
values (" 0.02105, 0.02384, 0.02466, 0.02970, 0.03646, 0.04059, 0.04480, 0.05365, \
0.05385, 0.06077, 0.06300, 0.06461, 0.06563, 0.06581, 0.06592, 0.06592, \
0.02329, 0.02609, 0.02691, 0.03203, 0.03893, 0.04315, 0.04746, 0.05651, \
0.05672, 0.06381, 0.06609, 0.06774, 0.06879, 0.06897, 0.06907, 0.06908, \
0.02902, 0.03188, 0.03272, 0.03799, 0.04515, 0.04953, 0.05401, 0.06343, \
0.06366, 0.07102, 0.07341, 0.07513, 0.07622, 0.07641, 0.07650, 0.07651, \
0.04492, 0.04790, 0.04879, 0.05429, 0.06179, 0.06638, 0.07108, 0.08094, \
0.08118, 0.08889, 0.09139, 0.09319, 0.09434, 0.09453, 0.09462, 0.09463, \
0.04619, 0.04918, 0.05006, 0.05558, 0.06309, 0.06769, 0.07240, 0.08227, \
0.08252, 0.09024, 0.09275, 0.09455, 0.09570, 0.09589, 0.09598, 0.09599, \
0.07476, 0.07781, 0.07871, 0.08434, 0.09200, 0.09669, 0.10148, 0.11152, \
0.11177, 0.11963, 0.12218, 0.12401, 0.12518, 0.12538, 0.12547, 0.12548, \
0.12763, 0.13070, 0.13161, 0.13726, 0.14495, 0.14965, 0.15446, 0.16454, \
0.16479, 0.17267, 0.17523, 0.17707, 0.17825, 0.17844, 0.17864, 0.17854, \
0.20712, 0.21019, 0.21109, 0.21675, 0.22444, 0.22914, 0.23395, 0.24403, \
0.24428, 0.25216, 0.25473, 0.25657, 0.25774, 0.25794, 0.25814, 0.25803 ");
}
}
capacitance () {
top_plane: metal4;
bottom_plane: poly;
lateral_capacitance (capacitance_template_WxS) {
index_1 (" 0.0700, 0.0900, 0.1400, 0.2700, 0.2800, 0.5000, 0.9000, 1.5000 ");
index_2 (" 0.0650, 0.0900, 0.0975, 0.1462, 0.2194, 0.2700, 0.3291, 0.4936, \
0.5000, 0.7404, 0.9000, 1.1106, 1.5000, 1.6659, 2.4988, 249.8818 ");
values (" 0.06132, 0.04467, 0.04128, 0.02686, 0.01639, 0.01229, 0.00902, 0.00424, \
0.00411, 0.00155, 0.00084, 0.00039, 0.00010, 0.00006, 0.00000, 0.00000, \
0.06222, 0.04546, 0.04203, 0.02745, 0.01683, 0.01265, 0.00931, 0.00440, \
0.00427, 0.00162, 0.00088, 0.00041, 0.00010, 0.00006, 0.00000, 0.00000, \
0.06382, 0.04687, 0.04339, 0.02856, 0.01767, 0.01335, 0.00988, 0.00472, \
0.00458, 0.00175, 0.00096, 0.00044, 0.00011, 0.00006, 0.00000, 0.00000, \
0.06613, 0.04895, 0.04541, 0.03024, 0.01897, 0.01444, 0.01077, 0.00522, \
0.00507, 0.00196, 0.00108, 0.00050, 0.00013, 0.00007, 0.00000, 0.00000, \
0.06625, 0.04906, 0.04551, 0.03032, 0.01903, 0.01449, 0.01081, 0.00525, \
0.00510, 0.00197, 0.00108, 0.00050, 0.00013, 0.00007, 0.00000, 0.00000, \
0.06774, 0.05041, 0.04683, 0.03143, 0.01989, 0.01522, 0.01140, 0.00558, \
0.00543, 0.00212, 0.00116, 0.00054, 0.00014, 0.00008, 0.00000, 0.00000, \
0.06841, 0.05102, 0.04742, 0.03192, 0.02027, 0.01554, 0.01167, 0.00574, \
0.00558, 0.00218, 0.00120, 0.00056, 0.00014, 0.00008, 0.00000, 0.00000, \
0.06853, 0.05112, 0.04752, 0.03200, 0.02033, 0.01559, 0.01171, 0.00576, \
0.00560, 0.00219, 0.00121, 0.00056, 0.00014, 0.00008, 0.00000, 0.00000 ");
}
ground_capacitance (capacitance_template_WxS) {
index_1 (" 0.0700, 0.0900, 0.1400, 0.2700, 0.2800, 0.5000, 0.9000, 1.5000 ");
index_2 (" 0.0650, 0.0900, 0.0975, 0.1462, 0.2194, 0.2700, 0.3291, 0.4936, \
0.5000, 0.7404, 0.9000, 1.1106, 1.5000, 1.6659, 2.4988, 249.8818 ");
values (" 0.04145, 0.04698, 0.04856, 0.05748, 0.06756, 0.07282, 0.07740, 0.08551, \
0.08553, 0.09052, 0.09180, 0.09282, 0.09336, 0.09350, 0.09369, 0.09369, \
0.04716, 0.05268, 0.05426, 0.06320, 0.07337, 0.07869, 0.08336, 0.09166, \
0.09169, 0.09684, 0.09819, 0.09924, 0.09981, 0.09995, 0.10013, 0.10014, \
0.06139, 0.06689, 0.06847, 0.07745, 0.08777, 0.09322, 0.09804, 0.10672, \
0.10677, 0.11224, 0.11370, 0.11484, 0.11546, 0.11560, 0.11579, 0.11579, \
0.09866, 0.10417, 0.10576, 0.11483, 0.12538, 0.13104, 0.13611, 0.14537, \
0.14544, 0.15142, 0.15306, 0.15433, 0.15504, 0.15520, 0.15539, 0.15539, \
0.10155, 0.10706, 0.10865, 0.11772, 0.12829, 0.13396, 0.13904, 0.14834, \
0.14840, 0.15441, 0.15606, 0.15734, 0.15805, 0.15821, 0.15840, 0.15840, \
0.16553, 0.17109, 0.17269, 0.18186, 0.19263, 0.19844, 0.20369, 0.21338, \
0.21346, 0.21981, 0.22158, 0.22294, 0.22371, 0.22388, 0.22408, 0.22408, \
0.28308, 0.28867, 0.29028, 0.29951, 0.31037, 0.31624, 0.32157, 0.33143, \
0.33152, 0.33802, 0.33984, 0.34124, 0.34204, 0.34221, 0.34235, 0.34242, \
0.46002, 0.46561, 0.46722, 0.47646, 0.48734, 0.49322, 0.49856, 0.50845, \
0.50854, 0.51506, 0.51690, 0.51830, 0.51911, 0.51928, 0.51942, 0.51949 ");
}
}
capacitance () {
top_plane: metal4;
bottom_plane: SUBSTRATE;
lateral_capacitance (capacitance_template_WxS) {
index_1 (" 0.0700, 0.0900, 0.1400, 0.2700, 0.2800, 0.5000, 0.9000, 1.5000 ");
index_2 (" 0.0650, 0.0900, 0.0975, 0.1462, 0.2194, 0.2700, 0.3291, 0.4936, \
0.5000, 0.7404, 0.9000, 1.1106, 1.5000, 1.6659, 2.4988, 249.8818 ");
values (" 0.06757, 0.05124, 0.04792, 0.03372, 0.02307, 0.01863, 0.01484, 0.00851, \
0.00832, 0.00397, 0.00247, 0.00134, 0.00044, 0.00028, 0.00003, 0.00000, \
0.06898, 0.05246, 0.04908, 0.03463, 0.02373, 0.01917, 0.01528, 0.00877, \
0.00857, 0.00409, 0.00254, 0.00139, 0.00046, 0.00029, 0.00003, 0.00000, \
0.07148, 0.05464, 0.05117, 0.03629, 0.02495, 0.02018, 0.01611, 0.00925, \
0.00905, 0.00433, 0.00269, 0.00146, 0.00048, 0.00030, 0.00003, 0.00000, \
0.07486, 0.05761, 0.05404, 0.03859, 0.02668, 0.02161, 0.01728, 0.00996, \
0.00974, 0.00467, 0.00291, 0.00158, 0.00052, 0.00033, 0.00003, 0.00000, \
0.07502, 0.05776, 0.05418, 0.03870, 0.02676, 0.02168, 0.01734, 0.00999, \
0.00977, 0.00469, 0.00292, 0.00159, 0.00052, 0.00033, 0.00003, 0.00000, \
0.07686, 0.05940, 0.05577, 0.04000, 0.02775, 0.02252, 0.01803, 0.01040, \
0.01018, 0.00489, 0.00305, 0.00166, 0.00055, 0.00034, 0.00003, 0.00000, \
0.07759, 0.06005, 0.05640, 0.04052, 0.02814, 0.02285, 0.01830, 0.01057, \
0.01035, 0.00497, 0.00311, 0.00169, 0.00056, 0.00035, 0.00004, 0.00000, \
0.07770, 0.06015, 0.05650, 0.04060, 0.02821, 0.02290, 0.01835, 0.01060, \
0.01037, 0.00499, 0.00311, 0.00169, 0.00056, 0.00035, 0.00004, 0.00000 ");
}
ground_capacitance (capacitance_template_WxS) {
index_1 (" 0.0700, 0.0900, 0.1400, 0.2700, 0.2800, 0.5000, 0.9000, 1.5000 ");
index_2 (" 0.0650, 0.0900, 0.0975, 0.1462, 0.2194, 0.2700, 0.3291, 0.4936, \
0.5000, 0.7404, 0.9000, 1.1106, 1.5000, 1.6659, 2.4988, 249.8818 ");
values (" 0.01859, 0.02101, 0.02171, 0.02598, 0.03163, 0.03510, 0.03870, 0.04662, \
0.04682, 0.05387, 0.05655, 0.05874, 0.06053, 0.06089, 0.06134, 0.06139, \
0.02049, 0.02287, 0.02357, 0.02785, 0.03359, 0.03714, 0.04081, 0.04894, \
0.04914, 0.05638, 0.05915, 0.06140, 0.06325, 0.06362, 0.06408, 0.06413, \
0.02518, 0.02755, 0.02825, 0.03259, 0.03852, 0.04220, 0.04603, 0.05454, \
0.05476, 0.06236, 0.06528, 0.06768, 0.06963, 0.07002, 0.07049, 0.07055, \
0.03788, 0.04032, 0.04104, 0.04555, 0.05176, 0.05565, 0.05971, 0.06876, \
0.06901, 0.07714, 0.08029, 0.08287, 0.08498, 0.08540, 0.08590, 0.08596, \
0.03889, 0.04133, 0.04206, 0.04658, 0.05280, 0.05670, 0.06077, 0.06985, \
0.07010, 0.07826, 0.08142, 0.08401, 0.08612, 0.08654, 0.08704, 0.08711, \
0.06182, 0.06432, 0.06506, 0.06971, 0.07613, 0.08015, 0.08437, 0.09377, \
0.09403, 0.10250, 0.10579, 0.10849, 0.11070, 0.11114, 0.11166, 0.11173, \
0.10491, 0.10745, 0.10820, 0.11290, 0.11940, 0.12346, 0.12774, 0.13726, \
0.13753, 0.14613, 0.14947, 0.15221, 0.15447, 0.15491, 0.15557, 0.15552, \
0.17014, 0.17268, 0.17343, 0.17814, 0.18465, 0.18872, 0.19300, 0.20255, \
0.20282, 0.21143, 0.21478, 0.21754, 0.21980, 0.22024, 0.22090, 0.22085 ");
}
}
capacitance () {
top_plane: metal5;
bottom_plane: poly;
lateral_capacitance (capacitance_template_WxS) {
index_1 (" 0.0700, 0.0900, 0.1400, 0.2700, 0.2800, 0.5000, 0.9000, 1.5000 ");
index_2 (" 0.0650, 0.0900, 0.0975, 0.1462, 0.2194, 0.2700, 0.3291, 0.4936, \
0.5000, 0.7404, 0.9000, 1.1106, 1.5000, 1.6659, 2.4988, 249.8818 ");
values (" 0.06180, 0.04521, 0.04182, 0.02750, 0.01719, 0.01317, 0.00996, 0.00522, \
0.00509, 0.00237, 0.00152, 0.00089, 0.00035, 0.00024, 0.00004, 0.00000, \
0.06275, 0.04604, 0.04263, 0.02817, 0.01771, 0.01362, 0.01034, 0.00547, \
0.00533, 0.00250, 0.00161, 0.00095, 0.00038, 0.00026, 0.00004, 0.00000, \
0.06451, 0.04763, 0.04418, 0.02950, 0.01878, 0.01455, 0.01115, 0.00599, \
0.00585, 0.00279, 0.00181, 0.00106, 0.00043, 0.00029, 0.00005, 0.00000, \
0.06740, 0.05031, 0.04680, 0.03179, 0.02070, 0.01624, 0.01261, 0.00699, \
0.00683, 0.00336, 0.00220, 0.00131, 0.00053, 0.00036, 0.00006, 0.00000, \
0.06757, 0.05047, 0.04695, 0.03192, 0.02081, 0.01634, 0.01270, 0.00705, \
0.00689, 0.00339, 0.00222, 0.00132, 0.00053, 0.00037, 0.00006, 0.00000, \
0.07008, 0.05283, 0.04927, 0.03399, 0.02257, 0.01793, 0.01410, 0.00803, \
0.00786, 0.00396, 0.00262, 0.00157, 0.00064, 0.00045, 0.00007, 0.00000, \
0.07202, 0.05466, 0.05107, 0.03562, 0.02397, 0.01919, 0.01522, 0.00883, \
0.00865, 0.00444, 0.00296, 0.00179, 0.00074, 0.00051, 0.00009, 0.00000, \
0.07284, 0.05544, 0.05184, 0.03632, 0.02458, 0.01974, 0.01570, 0.00918, \
0.00899, 0.00465, 0.00311, 0.00189, 0.00078, 0.00054, 0.00009, 0.00000 ");
}
ground_capacitance (capacitance_template_WxS) {
index_1 (" 0.0700, 0.0900, 0.1400, 0.2700, 0.2800, 0.5000, 0.9000, 1.5000 ");
index_2 (" 0.0650, 0.0900, 0.0975, 0.1462, 0.2194, 0.2700, 0.3291, 0.4936, \
0.5000, 0.7404, 0.9000, 1.1106, 1.5000, 1.6659, 2.4988, 249.8818 ");
values (" 0.04019, 0.04556, 0.04709, 0.05566, 0.06522, 0.07016, 0.07447, 0.08220, \
0.08222, 0.08733, 0.08886, 0.09020, 0.09121, 0.09148, 0.09198, 0.09206, \
0.04577, 0.05110, 0.05262, 0.06115, 0.07074, 0.07574, 0.08011, 0.08802, \
0.08805, 0.09335, 0.09495, 0.09636, 0.09744, 0.09772, 0.09824, 0.09832, \
0.05952, 0.06477, 0.06627, 0.07474, 0.08439, 0.08946, 0.09397, 0.10225, \
0.10230, 0.10797, 0.10975, 0.11131, 0.11253, 0.11284, 0.11341, 0.11350, \
0.09496, 0.10013, 0.10162, 0.11006, 0.11981, 0.12505, 0.12977, 0.13868, \
0.13876, 0.14515, 0.14724, 0.14909, 0.15059, 0.15096, 0.15164, 0.15176, \
0.09769, 0.10286, 0.10434, 0.11278, 0.12254, 0.12779, 0.13253, 0.14147, \
0.14155, 0.14798, 0.15010, 0.15196, 0.15348, 0.15386, 0.15455, 0.15467, \
0.15783, 0.16299, 0.16448, 0.17294, 0.18286, 0.18825, 0.19318, 0.20270, \
0.20280, 0.20990, 0.21233, 0.21448, 0.21629, 0.21674, 0.21755, 0.21770, \
0.26809, 0.27327, 0.27477, 0.28330, 0.29335, 0.29887, 0.30397, 0.31394, \
0.31406, 0.32170, 0.32439, 0.32677, 0.32882, 0.32933, 0.33019, 0.33041, \
0.43471, 0.43992, 0.44142, 0.44999, 0.46012, 0.46569, 0.47086, 0.48103, \
0.48116, 0.48902, 0.49182, 0.49431, 0.49647, 0.49700, 0.49791, 0.49815 ");
}
}
capacitance () {
top_plane: metal5;
bottom_plane: SUBSTRATE;
lateral_capacitance (capacitance_template_WxS) {
index_1 (" 0.0700, 0.0900, 0.1400, 0.2700, 0.2800, 0.5000, 0.9000, 1.5000 ");
index_2 (" 0.0650, 0.0900, 0.0975, 0.1462, 0.2194, 0.2700, 0.3291, 0.4936, \
0.5000, 0.7404, 0.9000, 1.1106, 1.5000, 1.6659, 2.4988, 249.8818 ");
values (" 0.06824, 0.05197, 0.04865, 0.03456, 0.02407, 0.01974, 0.01606, 0.00992, \
0.00973, 0.00535, 0.00370, 0.00236, 0.00106, 0.00077, 0.00015, 0.00000, \
0.06969, 0.05322, 0.04986, 0.03553, 0.02482, 0.02037, 0.01660, 0.01028, \
0.01008, 0.00555, 0.00385, 0.00246, 0.00111, 0.00080, 0.00016, 0.00000, \
0.07233, 0.05557, 0.05212, 0.03739, 0.02627, 0.02162, 0.01767, 0.01099, \
0.01079, 0.00598, 0.00416, 0.00265, 0.00120, 0.00087, 0.00017, 0.00000, \
0.07627, 0.05912, 0.05557, 0.04029, 0.02859, 0.02365, 0.01942, 0.01221, \
0.01199, 0.00671, 0.00471, 0.00302, 0.00138, 0.00100, 0.00020, 0.00000, \
0.07648, 0.05931, 0.05576, 0.04045, 0.02872, 0.02377, 0.01952, 0.01228, \
0.01206, 0.00676, 0.00474, 0.00304, 0.00139, 0.00100, 0.00020, 0.00000, \
0.07932, 0.06193, 0.05833, 0.04269, 0.03059, 0.02543, 0.02099, 0.01333, \
0.01310, 0.00743, 0.00524, 0.00337, 0.00155, 0.00112, 0.00023, 0.00000, \
0.08124, 0.06375, 0.06010, 0.04428, 0.03195, 0.02666, 0.02209, 0.01414, \
0.01390, 0.00794, 0.00562, 0.00364, 0.00168, 0.00122, 0.00026, 0.00000, \
0.08203, 0.06449, 0.06084, 0.04494, 0.03252, 0.02718, 0.02255, 0.01448, \
0.01424, 0.00816, 0.00579, 0.00375, 0.00174, 0.00126, 0.00026, 0.00000 ");
}
ground_capacitance (capacitance_template_WxS) {
index_1 (" 0.0700, 0.0900, 0.1400, 0.2700, 0.2800, 0.5000, 0.9000, 1.5000 ");
index_2 (" 0.0650, 0.0900, 0.0975, 0.1462, 0.2194, 0.2700, 0.3291, 0.4936, \
0.5000, 0.7404, 0.9000, 1.1106, 1.5000, 1.6659, 2.4988, 249.8818 ");
values (" 0.01688, 0.01914, 0.01980, 0.02372, 0.02879, 0.03184, 0.03499, 0.04197, \
0.04215, 0.04871, 0.05146, 0.05394, 0.05641, 0.05702, 0.05819, 0.05850, \
0.01867, 0.02087, 0.02151, 0.02539, 0.03047, 0.03357, 0.03677, 0.04391, \
0.04410, 0.05084, 0.05369, 0.05624, 0.05882, 0.05945, 0.06067, 0.06100, \
0.02294, 0.02506, 0.02568, 0.02950, 0.03465, 0.03783, 0.04114, 0.04860, \
0.04880, 0.05591, 0.05894, 0.06170, 0.06446, 0.06514, 0.06646, 0.06681, \
0.03388, 0.03597, 0.03659, 0.04044, 0.04572, 0.04904, 0.05252, 0.06047, \
0.06069, 0.06841, 0.07175, 0.07482, 0.07794, 0.07871, 0.08021, 0.08063, \
0.03473, 0.03682, 0.03744, 0.04130, 0.04659, 0.04991, 0.05340, 0.06137, \
0.06160, 0.06935, 0.07271, 0.07580, 0.07894, 0.07972, 0.08123, 0.08165, \
0.05388, 0.05599, 0.05662, 0.06053, 0.06595, 0.06937, 0.07299, 0.08135, \
0.08160, 0.08985, 0.09348, 0.09685, 0.10031, 0.10118, 0.10287, 0.10335, \
0.08981, 0.09195, 0.09258, 0.09654, 0.10206, 0.10556, 0.10929, 0.11793, \
0.11819, 0.12682, 0.13066, 0.13424, 0.13797, 0.13890, 0.14086, 0.14126, \
0.14481, 0.14696, 0.14759, 0.15159, 0.15716, 0.16069, 0.16447, 0.17324, \
0.17350, 0.18229, 0.18622, 0.18990, 0.19373, 0.19468, 0.19671, 0.19713 ");
}
}
capacitance () {
top_plane: AIR;
bottom_plane: poly;
lateral_capacitance (capacitance_template_WxS) {
index_1 (" 0.0700, 0.0900, 0.1400, 0.2700, 0.2800, 0.5000, 0.9000, 1.5000 ");
index_2 (" 0.0650, 0.0900, 0.0975, 0.1462, 0.2194, 0.2700, 0.3291, 0.4936, \
0.5000, 0.7404, 0.9000, 1.1106, 1.5000, 1.6659, 2.4988, 249.8818 ");
values (" 0.06241, 0.04584, 0.04247, 0.02819, 0.01792, 0.01392, 0.01073, 0.00601, \
0.00587, 0.00313, 0.00223, 0.00154, 0.00089, 0.00073, 0.00034, 0.00000, \
0.06338, 0.04670, 0.04330, 0.02889, 0.01849, 0.01442, 0.01117, 0.00632, \
0.00618, 0.00333, 0.00239, 0.00167, 0.00096, 0.00079, 0.00037, 0.00000, \
0.06520, 0.04836, 0.04491, 0.03030, 0.01967, 0.01549, 0.01212, 0.00702, \
0.00687, 0.00379, 0.00275, 0.00193, 0.00114, 0.00094, 0.00044, 0.00000, \
0.06836, 0.05132, 0.04782, 0.03292, 0.02196, 0.01758, 0.01402, 0.00848, \
0.00832, 0.00481, 0.00358, 0.00257, 0.00157, 0.00131, 0.00064, 0.00000, \
0.06856, 0.05151, 0.04801, 0.03308, 0.02211, 0.01772, 0.01414, 0.00858, \
0.00842, 0.00488, 0.00364, 0.00262, 0.00160, 0.00134, 0.00065, 0.00000, \
0.07179, 0.05461, 0.05107, 0.03594, 0.02469, 0.02014, 0.01638, 0.01041, \
0.01023, 0.00626, 0.00480, 0.00356, 0.00226, 0.00192, 0.00099, 0.00000, \
0.07538, 0.05810, 0.05454, 0.03924, 0.02776, 0.02307, 0.01916, 0.01279, \
0.01261, 0.00817, 0.00647, 0.00498, 0.00333, 0.00288, 0.00159, 0.00000, \
0.07866, 0.06133, 0.05775, 0.04235, 0.03074, 0.02595, 0.02193, 0.01529, \
0.01509, 0.01030, 0.00840, 0.00667, 0.00470, 0.00413, 0.00244, 0.00000 ");
}
ground_capacitance (capacitance_template_WxS) {
index_1 (" 0.0700, 0.0900, 0.1400, 0.2700, 0.2800, 0.5000, 0.9000, 1.5000 ");
index_2 (" 0.0650, 0.0900, 0.0975, 0.1462, 0.2194, 0.2700, 0.3291, 0.4936, \
0.5000, 0.7404, 0.9000, 1.1106, 1.5000, 1.6659, 2.4988, 249.8818 ");
values (" 0.03864, 0.04389, 0.04539, 0.05379, 0.06317, 0.06801, 0.07224, 0.07986, \
0.07988, 0.08499, 0.08658, 0.08802, 0.08926, 0.08962, 0.09051, 0.09120, \
0.04415, 0.04937, 0.05085, 0.05920, 0.06857, 0.07345, 0.07772, 0.08547, \
0.08550, 0.09078, 0.09245, 0.09395, 0.09529, 0.09567, 0.09661, 0.09736, \
0.05772, 0.06284, 0.06430, 0.07253, 0.08188, 0.08679, 0.09114, 0.09917, \
0.09922, 0.10484, 0.10668, 0.10837, 0.10988, 0.11032, 0.11140, 0.11230, \
0.09238, 0.09737, 0.09880, 0.10688, 0.11618, 0.12115, 0.12562, 0.13412, \
0.13419, 0.14046, 0.14264, 0.14466, 0.14658, 0.14714, 0.14855, 0.14985, \
0.09503, 0.10001, 0.10144, 0.10952, 0.11881, 0.12378, 0.12826, 0.13679, \
0.13686, 0.14317, 0.14537, 0.14742, 0.14937, 0.14993, 0.15136, 0.15269, \
0.15297, 0.15788, 0.15929, 0.16726, 0.17653, 0.18156, 0.18615, 0.19511, \
0.19521, 0.20217, 0.20473, 0.20717, 0.20964, 0.21036, 0.21227, 0.21427, \
0.25770, 0.26255, 0.26395, 0.27186, 0.28111, 0.28618, 0.29087, 0.30023, \
0.30035, 0.30797, 0.31094, 0.31382, 0.31693, 0.31786, 0.32042, 0.32367, \
0.41436, 0.41918, 0.42056, 0.42843, 0.43767, 0.44276, 0.44752, 0.45717, \
0.45730, 0.46542, 0.46872, 0.47200, 0.47571, 0.47685, 0.48017, 0.48512 ");
}
}
capacitance () {
top_plane: AIR;
bottom_plane: SUBSTRATE;
lateral_capacitance (capacitance_template_WxS) {
index_1 (" 0.0700, 0.0900, 0.1400, 0.2700, 0.2800, 0.5000, 0.9000, 1.5000 ");
index_2 (" 0.0650, 0.0900, 0.0975, 0.1462, 0.2194, 0.2700, 0.3291, 0.4936, \
0.5000, 0.7404, 0.9000, 1.1106, 1.5000, 1.6659, 2.4988, 249.8818 ");
values (" 0.06917, 0.05294, 0.04964, 0.03560, 0.02518, 0.02089, 0.01726, 0.01122, \
0.01103, 0.00672, 0.00508, 0.00370, 0.00224, 0.00187, 0.00089, 0.00000, \
0.07064, 0.05422, 0.05087, 0.03660, 0.02597, 0.02157, 0.01785, 0.01165, \
0.01146, 0.00702, 0.00532, 0.00389, 0.00237, 0.00198, 0.00095, 0.00000, \
0.07334, 0.05662, 0.05319, 0.03853, 0.02752, 0.02294, 0.01906, 0.01255, \
0.01235, 0.00765, 0.00584, 0.00429, 0.00265, 0.00222, 0.00108, 0.00000, \
0.07752, 0.06043, 0.05691, 0.04174, 0.03021, 0.02537, 0.02125, 0.01427, \
0.01405, 0.00893, 0.00692, 0.00516, 0.00327, 0.00276, 0.00138, 0.00000, \
0.07776, 0.06065, 0.05712, 0.04193, 0.03037, 0.02552, 0.02139, 0.01438, \
0.01416, 0.00901, 0.00699, 0.00522, 0.00331, 0.00280, 0.00141, 0.00000, \
0.08132, 0.06402, 0.06043, 0.04495, 0.03306, 0.02803, 0.02372, 0.01633, \
0.01610, 0.01057, 0.00835, 0.00637, 0.00417, 0.00357, 0.00187, 0.00000, \
0.08490, 0.06749, 0.06387, 0.04821, 0.03609, 0.03093, 0.02649, 0.01877, \
0.01853, 0.01262, 0.01020, 0.00798, 0.00545, 0.00473, 0.00264, 0.00000, \
0.08811, 0.07064, 0.06701, 0.05125, 0.03900, 0.03376, 0.02922, 0.02128, \
0.02103, 0.01483, 0.01224, 0.00982, 0.00698, 0.00615, 0.00366, 0.00000 ");
}
ground_capacitance (capacitance_template_WxS) {
index_1 (" 0.0700, 0.0900, 0.1400, 0.2700, 0.2800, 0.5000, 0.9000, 1.5000 ");
index_2 (" 0.0650, 0.0900, 0.0975, 0.1462, 0.2194, 0.2700, 0.3291, 0.4936, \
0.5000, 0.7404, 0.9000, 1.1106, 1.5000, 1.6659, 2.4988, 249.8818 ");
values (" 0.01456, 0.01667, 0.01728, 0.02098, 0.02579, 0.02868, 0.03166, 0.03820, \
0.03837, 0.04451, 0.04713, 0.04957, 0.05224, 0.05297, 0.05483, 0.05663, \
0.01629, 0.01834, 0.01894, 0.02258, 0.02737, 0.03029, 0.03328, 0.03991, \
0.04009, 0.04636, 0.04906, 0.05157, 0.05434, 0.05511, 0.05706, 0.05897, \
0.02039, 0.02236, 0.02294, 0.02650, 0.03126, 0.03419, 0.03722, 0.04403, \
0.04422, 0.05073, 0.05359, 0.05629, 0.05927, 0.06010, 0.06224, 0.06441, \
0.03061, 0.03250, 0.03306, 0.03653, 0.04126, 0.04420, 0.04729, 0.05431, \
0.05451, 0.06142, 0.06452, 0.06752, 0.07092, 0.07189, 0.07446, 0.07723, \
0.03138, 0.03328, 0.03384, 0.03730, 0.04202, 0.04497, 0.04805, 0.05509, \
0.05529, 0.06222, 0.06534, 0.06835, 0.07178, 0.07275, 0.07535, 0.07818, \
0.04836, 0.05020, 0.05074, 0.05413, 0.05880, 0.06173, 0.06483, 0.07199, \
0.07221, 0.07946, 0.08282, 0.08613, 0.09001, 0.09114, 0.09429, 0.09803, \
0.07877, 0.08056, 0.08109, 0.08441, 0.08899, 0.09189, 0.09499, 0.10225, \
0.10247, 0.11002, 0.11361, 0.11723, 0.12164, 0.12297, 0.12692, 0.13206, \
0.12386, 0.12562, 0.12615, 0.12941, 0.13393, 0.13682, 0.13991, 0.14722, \
0.14745, 0.15522, 0.15900, 0.16288, 0.16775, 0.16925, 0.17393, 0.18103 ");
}
}
}
layer (poly) {
resistance: 7.800000
capacitance () {
top_plane: metal1;
bottom_plane: SUBSTRATE;
lateral_capacitance (capacitance_template_WxS) {
index_1 (" 0.0500, 0.1000, 0.2000 ");
index_2 (" 0.0750, 0.1125, 0.1687, 0.2531, 0.3797, 0.5695, 0.8543, 1.2814, \
1.9222, 2.8833, 288.3252 ");
values (" 0.04024, 0.02567, 0.01469, 0.00693, 0.00240, 0.00052, 0.00006, 0.00000, \
0.00000, 0.00000, 0.00000, 0.04222, 0.02703, 0.01552, 0.00736, 0.00255, \
0.00055, 0.00006, 0.00000, 0.00000, 0.00000, 0.00000, 0.04337, 0.02784, \
0.01602, 0.00761, 0.00264, 0.00057, 0.00006, 0.00000, 0.00000, 0.00000, \
0.00000 ");
}
ground_capacitance (capacitance_template_WxS) {
index_1 (" 0.0500, 0.1000, 0.2000 ");
index_2 (" 0.0750, 0.1125, 0.1687, 0.2531, 0.3797, 0.5695, 0.8543, 1.2814, \
1.9222, 2.8833, 288.3252 ");
values (" 0.05273, 0.06348, 0.07589, 0.08767, 0.09591, 0.09967, 0.10062, 0.10092, \
0.10070, 0.10072, 0.10073, 0.07338, 0.08457, 0.09755, 0.10993, 0.11866, \
0.12265, 0.12367, 0.12396, 0.12372, 0.12374, 0.12375, 0.11593, 0.12739, \
0.14071, 0.15346, 0.16247, 0.16661, 0.16766, 0.16796, 0.16771, 0.16774, \
0.16775 ");
}
}
capacitance () {
top_plane: metal2;
bottom_plane: SUBSTRATE;
lateral_capacitance (capacitance_template_WxS) {
index_1 (" 0.0500, 0.1000, 0.2000 ");
index_2 (" 0.0750, 0.1125, 0.1687, 0.2531, 0.3797, 0.5695, 0.8543, 1.2814, \
1.9222, 2.8833, 288.3252 ");
values (" 0.04589, 0.03178, 0.02083, 0.01223, 0.00594, 0.00211, 0.00048, 0.00005, \
0.00000, 0.00000, 0.00000, 0.04932, 0.03431, 0.02253, 0.01326, 0.00644, \
0.00230, 0.00051, 0.00006, 0.00000, 0.00000, 0.00000, 0.05192, 0.03627, \
0.02387, 0.01406, 0.00684, 0.00245, 0.00055, 0.00006, 0.00000, 0.00000, \
0.00000 ");
}
ground_capacitance (capacitance_template_WxS) {
index_1 (" 0.0500, 0.1000, 0.2000 ");
index_2 (" 0.0750, 0.1125, 0.1687, 0.2531, 0.3797, 0.5695, 0.8543, 1.2814, \
1.9222, 2.8833, 288.3252 ");
values (" 0.03258, 0.03910, 0.04753, 0.05741, 0.06699, 0.07393, 0.07720, 0.07820, \
0.07809, 0.07811, 0.07812, 0.04300, 0.04991, 0.05894, 0.06955, 0.07990, \
0.08740, 0.09096, 0.09202, 0.09191, 0.09192, 0.09193, 0.06540, 0.07266, \
0.08218, 0.09339, 0.10433, 0.11228, 0.11607, 0.11719, 0.11707, 0.11709, \
0.11709 ");
}
}
capacitance () {
top_plane: metal3;
bottom_plane: SUBSTRATE;
lateral_capacitance (capacitance_template_WxS) {
index_1 (" 0.0500, 0.1000, 0.2000 ");
index_2 (" 0.0750, 0.1125, 0.1687, 0.2531, 0.3797, 0.5695, 0.8543, 1.2814, \
1.9222, 2.8833, 288.3252 ");
values (" 0.04678, 0.03285, 0.02213, 0.01373, 0.00743, 0.00324, 0.00104, 0.00021, \
0.00002, 0.00000, 0.00000, 0.05058, 0.03579, 0.02425, 0.01514, 0.00824, \
0.00363, 0.00116, 0.00023, 0.00002, 0.00000, 0.00000, 0.05400, 0.03852, \
0.02630, 0.01655, 0.00910, 0.00405, 0.00131, 0.00026, 0.00002, 0.00000, \
0.00000 ");
}
ground_capacitance (capacitance_template_WxS) {
index_1 (" 0.0500, 0.1000, 0.2000 ");
index_2 (" 0.0750, 0.1125, 0.1687, 0.2531, 0.3797, 0.5695, 0.8543, 1.2814, \
1.9222, 2.8833, 288.3252 ");
values (" 0.03017, 0.03605, 0.04356, 0.05241, 0.06135, 0.06855, 0.07279, 0.07459, \
0.07477, 0.07483, 0.07483, 0.03938, 0.04548, 0.05344, 0.06291, 0.07261, \
0.08052, 0.08525, 0.08725, 0.08746, 0.08752, 0.08752, 0.05878, 0.06512, \
0.07347, 0.08353, 0.09394, 0.10256, 0.10781, 0.11004, 0.11030, 0.11036, \
0.11036 ");
}
}
capacitance () {
top_plane: metal4;
bottom_plane: SUBSTRATE;
lateral_capacitance (capacitance_template_WxS) {
index_1 (" 0.0500, 0.1000, 0.2000 ");
index_2 (" 0.0750, 0.1125, 0.1687, 0.2531, 0.3797, 0.5695, 0.8543, 1.2814, \
1.9222, 2.8833, 288.3252 ");
values (" 0.04711, 0.03322, 0.02258, 0.01429, 0.00805, 0.00383, 0.00145, 0.00039, \
0.00006, 0.00000, 0.00000, 0.05101, 0.03629, 0.02486, 0.01587, 0.00904, \
0.00435, 0.00166, 0.00045, 0.00007, 0.00000, 0.00000, 0.05474, 0.03935, \
0.02724, 0.01761, 0.01019, 0.00500, 0.00194, 0.00053, 0.00008, 0.00001, \
0.00000 ");
}
ground_capacitance (capacitance_template_WxS) {
index_1 (" 0.0500, 0.1000, 0.2000 ");
index_2 (" 0.0750, 0.1125, 0.1687, 0.2531, 0.3797, 0.5695, 0.8543, 1.2814, \
1.9222, 2.8833, 288.3252 ");
values (" 0.02930, 0.03503, 0.04227, 0.05073, 0.05931, 0.06639, 0.07087, 0.07311, \
0.07358, 0.07372, 0.07373, 0.03822, 0.04407, 0.05166, 0.06067, 0.06995, \
0.07775, 0.08281, 0.08533, 0.08589, 0.08604, 0.08605, 0.05665, 0.06266, \
0.07056, 0.08007, 0.09004, 0.09861, 0.10434, 0.10725, 0.10795, 0.10812, \
0.10813 ");
}
}
capacitance () {
top_plane: AIR;
bottom_plane: SUBSTRATE;
lateral_capacitance (capacitance_template_WxS) {
index_1 (" 0.0500, 0.1000, 0.2000 ");
index_2 (" 0.0750, 0.1125, 0.1687, 0.2531, 0.3797, 0.5695, 0.8543, 1.2814, \
1.9222, 2.8833, 288.3252 ");
values (" 0.04795, 0.03412, 0.02354, 0.01532, 0.00917, 0.00496, 0.00246, 0.00115, \
0.00052, 0.00024, 0.00000, 0.05194, 0.03730, 0.02598, 0.01713, 0.01043, \
0.00578, 0.00294, 0.00141, 0.00065, 0.00030, 0.00000, 0.05600, 0.04074, \
0.02881, 0.01938, 0.01214, 0.00699, 0.00371, 0.00186, 0.00089, 0.00042, \
0.00000 ");
}
ground_capacitance (capacitance_template_WxS) {
index_1 (" 0.0500, 0.1000, 0.2000 ");
index_2 (" 0.0750, 0.1125, 0.1687, 0.2531, 0.3797, 0.5695, 0.8543, 1.2814, \
1.9222, 2.8833, 288.3252 ");
values (" 0.02712, 0.03266, 0.03967, 0.04783, 0.05606, 0.06293, 0.06751, 0.07019, \
0.07127, 0.07187, 0.07235, 0.03581, 0.04139, 0.04860, 0.05711, 0.06586, \
0.07333, 0.07850, 0.08156, 0.08288, 0.08361, 0.08423, 0.05331, 0.05891, \
0.06621, 0.07498, 0.08418, 0.09229, 0.09816, 0.10181, 0.10354, 0.10450, \
0.10537 ");
}
}
}
layer (via9) {
resistance : 0.500000;
}
layer (via8) {
resistance : 1.000000;
}
layer (via7) {
resistance : 1.000000;
}
layer (via6) {
resistance : 3.000000;
}
layer (via5) {
resistance : 3.000000;
}
layer (via4) {
resistance : 3.000000;
}
layer (via3) {
resistance : 5.000000;
}
layer (via2) {
resistance : 5.000000;
}
layer (via1) {
resistance : 5.000000;
}
layer (contact) {
resistance : 25.000000;
}
layer (diffco) {
resistance : 30.000000;
}
}