///////////////////////////////////////////////////////////////////////////
// SDA PTF Generated on Fri Jul  3 06:35:33 2009 Using ElCap Version 1.87 //
// Copyright 2003 - 2008 Sierra Design Automation, Inc.                  //
///////////////////////////////////////////////////////////////////////////
process_technology ( master_techFreePDK45 ) {

	capacitance_unit : ff
	resistance_unit  : ohm
	inductance_unit  : nH
	voltage_unit     : V
	current_unit     : mA
	power_unit       : mW
	length_unit      : um
	per_length_unit  : um
	thickness_unit   : um
	height_unit      : um
	area_unit        : um2

	nom_process      : 1.00
	nom_temperature  : 25.00
	nom_voltage      : 1.20

	half_node_scale_factor : 1.00

	///////////////////////////////////////////////////////////////////////
	// Dielectric-type Dielectric-name  Thickness   Dielectric-constant  //
	///////////////////////////////////////////////////////////////////////

	dielectric_stack {
		planar metal10_diel_b	 2.000000	 2.500000;
		planar metal10_diel_a	 2.000000	 2.500000;
		planar metal9_diel_b	 2.000000	 2.500000;
		planar metal9_diel_a	 2.000000	 2.500000;
		planar metal8_diel_b	 0.820000	 2.500000;
		planar metal8_diel_a	 0.800000	 2.500000;
		planar metal7_diel_b	 0.820000	 2.500000;
		planar metal7_diel_a	 0.800000	 2.500000;
		planar metal6_diel_b	 0.290000	 2.500000;
		planar metal6_diel_a	 0.280000	 2.500000;
		planar metal5_diel_b	 0.290000	 2.500000;
		planar metal5_diel_a	 0.280000	 2.500000;
		planar metal4_diel_b	 0.290000	 2.500000;
		planar metal4_diel_a	 0.280000	 2.500000;
		planar metal3_diel_b	 0.120000	 2.500000;
		planar metal3_diel_a	 0.140000	 2.500000;
		planar metal2_diel_b	 0.120000	 2.500000;
		planar metal2_diel_a	 0.140000	 2.500000;
		planar metal1_diel_b	 0.120000	 2.500000;
		planar metal1_diel_a	 0.130000	 2.500000;
		planar poly_diel_b	 0.085000	 2.500000;
		planar poly_diel_a	 0.085000	 2.500000;
		planar field_active_diel	 0.100000	 3.900000;
		planar field_base_diel	 0.100000	 3.900000;
	}

	////////////////////////////////////////////
	// Layer-name    Thickness     Height     //
	////////////////////////////////////////////

	layer_stack {
		metal10	2.000000	10.090000;
		metal9	2.000000	6.090000;
		metal8	0.800000	4.470000;
		metal7	0.800000	2.850000;
		metal6	0.280000	2.280000;
		metal5	0.280000	1.710000;
		metal4	0.280000	1.140000;
		metal3	0.140000	0.880000;
		metal2	0.140000	0.620000;
		metal1	0.130000	0.370000;
		poly	0.085000	0.200000;
	}

	capacitance_lut_template(capacitance_template_WxS) {
		variable_1 : width;
		variable_2 : spacing;
		index_1 (" 1, 2, 3, 4, 5 ");
		index_2 (" 1, 2, 3, 4, 5, 6, 7, 8, 9, 10, 11, 12, 13 ");
		etched : false;
		infinite_spacing : true;
	}

	capacitance_lut_template(capacitance_template_etched_WxS) {
		variable_1 : width;
		variable_2 : spacing;
		index_1 (" 1, 2, 3, 4, 5 ");
		index_2 (" 1, 2, 3, 4, 5, 6, 7, 8, 9, 10, 11, 12, 13 ");
		etched : true;
		infinite_spacing : true;
	}

	cross_capacitance_lut_template(cross_capacitance_template_WxS) {
		variable_1 : width;
		variable_2 : spacing;
		variable_3 : cross_width;
		variable_4 : cross_spacing;
		index_1 (" 1, 2, 3, 4, 5 ");
		index_2 (" 1, 2, 3, 4, 5, 6, 7, 8, 9, 10, 11, 12, 13 ");
		index_3 (" 1, 2, 3, 4, 5 ");
		index_4 (" 1, 2, 3, 4, 5, 6, 7, 8, 9, 10, 11, 12, 13 ");
		etched : false;
		infinite_spacing : true;
	}

	cross_capacitance_lut_template(cross_capacitance_template_etched_WxS) {
		variable_1 : width;
		variable_2 : spacing;
		variable_3 : cross_width;
		variable_4 : cross_spacing;
		index_1 (" 1, 2, 3, 4, 5 ");
		index_2 (" 1, 2, 3, 4, 5, 6, 7, 8, 9, 10, 11, 12, 13 ");
		index_3 (" 1, 2, 3, 4, 5 ");
		index_4 (" 1, 2, 3, 4, 5, 6, 7, 8, 9, 10, 11, 12, 13 ");
		etched : true;
		infinite_spacing : true;
	}

	layer (metal10) {
		resistance: 0.030000

		capacitance () {
			top_plane: AIR;
			bottom_plane: metal9;
			lateral_capacitance (capacitance_template_WxS) {
				index_1 (" 0.8000, 0.9000, 1.5000, 1.6000, 3.2000 ");
				index_2 (" 0.8000, 0.9000, 1.2000, 1.5000, 1.8000, 2.7000, 4.0500, 6.0750,  \
				           9.1125, 13.6688, 20.5031, 30.7547, 3075.4688 ");
				values  ("  0.07632,  0.06890,  0.05358,  0.04392,  0.03718,  0.02508,  0.01593,  0.00904,  \
				            0.00419,  0.00139,  0.00027,  0.00003,  0.00000,  0.07692,  0.06947,  0.05406,  \
				            0.04433,  0.03755,  0.02533,  0.01609,  0.00913,  0.00423,  0.00140,  0.00028,  \
				            0.00003,  0.00000,  0.07954,  0.07194,  0.05617,  0.04616,  0.03914,  0.02645,  \
				            0.01681,  0.00953,  0.00442,  0.00146,  0.00029,  0.00003,  0.00000,  0.07986,  \
				            0.07224,  0.05643,  0.04638,  0.03934,  0.02659,  0.01690,  0.00958,  0.00444,  \
				            0.00147,  0.00029,  0.00003,  0.00000,  0.08275,  0.07499,  0.05880,  0.04844,  \
				            0.04115,  0.02787,  0.01772,  0.01004,  0.00465,  0.00154,  0.00030,  0.00003,  \
				            0.00000 ");
			}
			ground_capacitance (capacitance_template_WxS) {
				index_1 (" 0.8000, 0.9000, 1.5000, 1.6000, 3.2000 ");
				index_2 (" 0.8000, 0.9000, 1.2000, 1.5000, 1.8000, 2.7000, 4.0500, 6.0750,  \
				           9.1125, 13.6688, 20.5031, 30.7547, 3075.4688 ");
				values  ("  0.02011,  0.02105,  0.02372,  0.02621,  0.02854,  0.03472,  0.04215,  0.05027,  \
				            0.05778,  0.06293,  0.06518,  0.06572,  0.06552,  0.02110,  0.02203,  0.02469,  \
				            0.02718,  0.02952,  0.03573,  0.04322,  0.05141,  0.05899,  0.06419,  0.06646,  \
				            0.06701,  0.06680,  0.02700,  0.02792,  0.03059,  0.03311,  0.03549,  0.04187,  \
				            0.04962,  0.05813,  0.06602,  0.07145,  0.07381,  0.07439,  0.07418,  0.02799,  \
				            0.02891,  0.03159,  0.03411,  0.03651,  0.04291,  0.05068,  0.05924,  0.06717,  \
				            0.07262,  0.07500,  0.07557,  0.07537,  0.04451,  0.04546,  0.04820,  0.05079,  \
				            0.05325,  0.05987,  0.06797,  0.07691,  0.08520,  0.09091,  0.09340,  0.09400,  \
				            0.09380 ");
			}
		}

		capacitance () {
			top_plane: AIR;
			bottom_plane: metal8;
			lateral_capacitance (capacitance_template_WxS) {
				index_1 (" 0.8000, 0.9000, 1.5000, 1.6000, 3.2000 ");
				index_2 (" 0.8000, 0.9000, 1.2000, 1.5000, 1.8000, 2.7000, 4.0500, 6.0750,  \
				           9.1125, 13.6688, 20.5031, 30.7547, 3075.4688 ");
				values  ("  0.07973,  0.07241,  0.05736,  0.04791,  0.04135,  0.02955,  0.02047,  0.01323,  \
				            0.00751,  0.00341,  0.00108,  0.00020,  0.00000,  0.08046,  0.07310,  0.05796,  \
				            0.04843,  0.04182,  0.02989,  0.02069,  0.01336,  0.00757,  0.00344,  0.00109,  \
				            0.00020,  0.00000,  0.08380,  0.07628,  0.06071,  0.05084,  0.04394,  0.03141,  \
				            0.02168,  0.01394,  0.00788,  0.00358,  0.00114,  0.00021,  0.00000,  0.08422,  \
				            0.07668,  0.06106,  0.05115,  0.04421,  0.03160,  0.02181,  0.01402,  0.00792,  \
				            0.00359,  0.00114,  0.00021,  0.00000,  0.08826,  0.08052,  0.06438,  0.05405,  \
				            0.04676,  0.03339,  0.02296,  0.01469,  0.00828,  0.00375,  0.00119,  0.00022,  \
				            0.00000 ");
			}
			ground_capacitance (capacitance_template_WxS) {
				index_1 (" 0.8000, 0.9000, 1.5000, 1.6000, 3.2000 ");
				index_2 (" 0.8000, 0.9000, 1.2000, 1.5000, 1.8000, 2.7000, 4.0500, 6.0750,  \
				           9.1125, 13.6688, 20.5031, 30.7547, 3075.4688 ");
				values  ("  0.01031,  0.01076,  0.01203,  0.01320,  0.01429,  0.01727,  0.02131,  0.02669,  \
				            0.03314,  0.03940,  0.04368,  0.04548,  0.04571,  0.01072,  0.01116,  0.01239,  \
				            0.01354,  0.01462,  0.01761,  0.02169,  0.02713,  0.03365,  0.03996,  0.04428,  \
				            0.04609,  0.04633,  0.01292,  0.01331,  0.01446,  0.01557,  0.01666,  0.01975,  \
				            0.02405,  0.02977,  0.03658,  0.04314,  0.04763,  0.04951,  0.04976,  0.01327,  \
				            0.01366,  0.01481,  0.01592,  0.01701,  0.02012,  0.02445,  0.03021,  0.03705,  \
				            0.04365,  0.04816,  0.05005,  0.05031,  0.01925,  0.01966,  0.02086,  0.02205,  \
				            0.02321,  0.02657,  0.03124,  0.03736,  0.04456,  0.05145,  0.05615,  0.05812,  \
				            0.05840 ");
			}
		}

		capacitance () {
			top_plane: AIR;
			bottom_plane: metal7;
			lateral_capacitance (capacitance_template_WxS) {
				index_1 (" 0.8000, 0.9000, 1.5000, 1.6000, 3.2000 ");
				index_2 (" 0.8000, 0.9000, 1.2000, 1.5000, 1.8000, 2.7000, 4.0500, 6.0750,  \
				           9.1125, 13.6688, 20.5031, 30.7547, 3075.4688 ");
				values  ("  0.08049,  0.07320,  0.05821,  0.04882,  0.04231,  0.03065,  0.02173,  0.01459,  \
				            0.00882,  0.00444,  0.00166,  0.00039,  0.00000,  0.08124,  0.07391,  0.05883,  \
				            0.04936,  0.04280,  0.03101,  0.02197,  0.01474,  0.00890,  0.00448,  0.00167,  \
				            0.00039,  0.00000,  0.08472,  0.07722,  0.06172,  0.05192,  0.04507,  0.03268,  \
				            0.02309,  0.01542,  0.00928,  0.00467,  0.00174,  0.00041,  0.00000,  0.08517,  \
				            0.07765,  0.06209,  0.05225,  0.04537,  0.03289,  0.02323,  0.01551,  0.00933,  \
				            0.00469,  0.00175,  0.00041,  0.00000,  0.08961,  0.08189,  0.06580,  0.05552,  \
				            0.04827,  0.03499,  0.02462,  0.01635,  0.00980,  0.00491,  0.00183,  0.00043,  \
				            0.00000 ");
			}
			ground_capacitance (capacitance_template_WxS) {
				index_1 (" 0.8000, 0.9000, 1.5000, 1.6000, 3.2000 ");
				index_2 (" 0.8000, 0.9000, 1.2000, 1.5000, 1.8000, 2.7000, 4.0500, 6.0750,  \
				           9.1125, 13.6688, 20.5031, 30.7547, 3075.4688 ");
				values  ("  0.00837,  0.00875,  0.00980,  0.01075,  0.01162,  0.01395,  0.01707,  0.02136,  \
				            0.02689,  0.03288,  0.03769,  0.04019,  0.04084,  0.00871,  0.00907,  0.01008,  \
				            0.01101,  0.01186,  0.01418,  0.01733,  0.02167,  0.02726,  0.03330,  0.03815,  \
				            0.04067,  0.04133,  0.01043,  0.01074,  0.01163,  0.01248,  0.01330,  0.01564,  \
				            0.01895,  0.02353,  0.02939,  0.03569,  0.04074,  0.04336,  0.04404,  0.01069,  \
				            0.01099,  0.01187,  0.01272,  0.01354,  0.01589,  0.01923,  0.02384,  0.02974,  \
				            0.03607,  0.04114,  0.04378,  0.04447,  0.01492,  0.01522,  0.01612,  0.01700,  \
				            0.01787,  0.02042,  0.02406,  0.02903,  0.03529,  0.04194,  0.04725,  0.05001,  \
				            0.05073 ");
			}
		}

		capacitance () {
			top_plane: AIR;
			bottom_plane: metal6;
			lateral_capacitance (capacitance_template_WxS) {
				index_1 (" 0.8000, 0.9000, 1.5000, 1.6000, 3.2000 ");
				index_2 (" 0.8000, 0.9000, 1.2000, 1.5000, 1.8000, 2.7000, 4.0500, 6.0750,  \
				           9.1125, 13.6688, 20.5031, 30.7547, 3075.4688 ");
				values  ("  0.08085,  0.07357,  0.05861,  0.04924,  0.04276,  0.03116,  0.02232,  0.01526,  \
				            0.00952,  0.00505,  0.00205,  0.00055,  0.00000,  0.08161,  0.07429,  0.05924,  \
				            0.04979,  0.04325,  0.03153,  0.02258,  0.01542,  0.00961,  0.00510,  0.00207,  \
				            0.00055,  0.00000,  0.08514,  0.07765,  0.06218,  0.05240,  0.04559,  0.03326,  \
				            0.02376,  0.01616,  0.01004,  0.00531,  0.00216,  0.00058,  0.00000,  0.08560,  \
				            0.07809,  0.06256,  0.05275,  0.04589,  0.03349,  0.02391,  0.01626,  0.01009,  \
				            0.00534,  0.00217,  0.00058,  0.00000,  0.09023,  0.08252,  0.06646,  0.05620,  \
				            0.04897,  0.03575,  0.02544,  0.01721,  0.01063,  0.00561,  0.00228,  0.00061,  \
				            0.00000 ");
			}
			ground_capacitance (capacitance_template_WxS) {
				index_1 (" 0.8000, 0.9000, 1.5000, 1.6000, 3.2000 ");
				index_2 (" 0.8000, 0.9000, 1.2000, 1.5000, 1.8000, 2.7000, 4.0500, 6.0750,  \
				           9.1125, 13.6688, 20.5031, 30.7547, 3075.4688 ");
				values  ("  0.00747,  0.00782,  0.00877,  0.00964,  0.01043,  0.01250,  0.01522,  0.01897,  \
				            0.02395,  0.02965,  0.03461,  0.03751,  0.03848,  0.00778,  0.00811,  0.00903,  \
				            0.00987,  0.01064,  0.01269,  0.01542,  0.01922,  0.02425,  0.03000,  0.03501,  \
				            0.03793,  0.03892,  0.00933,  0.00961,  0.01039,  0.01114,  0.01185,  0.01388,  \
				            0.01673,  0.02074,  0.02604,  0.03203,  0.03725,  0.04028,  0.04131,  0.00956,  \
				            0.00983,  0.01060,  0.01134,  0.01206,  0.01408,  0.01696,  0.02100,  0.02633,  \
				            0.03236,  0.03760,  0.04065,  0.04169,  0.01310,  0.01336,  0.01412,  0.01488,  \
				            0.01562,  0.01780,  0.02094,  0.02533,  0.03101,  0.03737,  0.04287,  0.04608,  \
				            0.04717 ");
			}
		}

		capacitance () {
			top_plane: AIR;
			bottom_plane: SUBSTRATE;
			lateral_capacitance (capacitance_template_WxS) {
				index_1 (" 0.8000, 0.9000, 1.5000, 1.6000, 3.2000 ");
				index_2 (" 0.8000, 0.9000, 1.2000, 1.5000, 1.8000, 2.7000, 4.0500, 6.0750,  \
				           9.1125, 13.6688, 20.5031, 30.7547, 3075.4688 ");
				values  ("  0.08144,  0.07418,  0.05926,  0.04993,  0.04348,  0.03197,  0.02326,  0.01636,  \
				            0.01073,  0.00621,  0.00291,  0.00096,  0.00000,  0.08222,  0.07491,  0.05990,  \
				            0.05049,  0.04398,  0.03235,  0.02353,  0.01654,  0.01084,  0.00627,  0.00293,  \
				            0.00097,  0.00000,  0.08582,  0.07834,  0.06290,  0.05317,  0.04639,  0.03417,  \
				            0.02482,  0.01738,  0.01135,  0.00655,  0.00306,  0.00101,  0.00000,  0.08628,  \
				            0.07879,  0.06330,  0.05352,  0.04671,  0.03442,  0.02499,  0.01749,  0.01141,  \
				            0.00658,  0.00307,  0.00102,  0.00000,  0.09117,  0.08347,  0.06745,  0.05724,  \
				            0.05006,  0.03695,  0.02677,  0.01865,  0.01212,  0.00697,  0.00325,  0.00108,  \
				            0.00000 ");
			}
			ground_capacitance (capacitance_template_WxS) {
				index_1 (" 0.8000, 0.9000, 1.5000, 1.6000, 3.2000 ");
				index_2 (" 0.8000, 0.9000, 1.2000, 1.5000, 1.8000, 2.7000, 4.0500, 6.0750,  \
				           9.1125, 13.6688, 20.5031, 30.7547, 3075.4688 ");
				values  ("  0.00602,  0.00632,  0.00714,  0.00789,  0.00856,  0.01029,  0.01246,  0.01538,  \
				            0.01938,  0.02433,  0.02929,  0.03282,  0.03463,  0.00630,  0.00658,  0.00737,  \
				            0.00809,  0.00874,  0.01044,  0.01260,  0.01554,  0.01959,  0.02459,  0.02959,  \
				            0.03315,  0.03498,  0.00764,  0.00787,  0.00852,  0.00913,  0.00970,  0.01129,  \
				            0.01349,  0.01659,  0.02084,  0.02607,  0.03128,  0.03500,  0.03691,  0.00783,  \
				            0.00805,  0.00869,  0.00928,  0.00985,  0.01144,  0.01364,  0.01677,  0.02105,  \
				            0.02631,  0.03155,  0.03528,  0.03721,  0.01050,  0.01070,  0.01127,  0.01184,  \
				            0.01240,  0.01404,  0.01642,  0.01981,  0.02442,  0.03002,  0.03556,  0.03950,  \
				            0.04153 ");
			}
		}
	}

	layer (metal9) {
		resistance: 0.030000

		capacitance () {
			top_plane: metal10;
			bottom_plane: metal8;
			lateral_capacitance (capacitance_template_WxS) {
				index_1 (" 0.8000, 0.9000, 1.5000, 1.6000, 3.2000 ");
				index_2 (" 0.8000, 0.9000, 1.2000, 1.5000, 1.8000, 2.7000, 4.0500, 6.0750,  \
				           9.1125, 13.6688, 20.5031, 30.7547, 3075.4688 ");
				values  ("  0.06581,  0.05816,  0.04229,  0.03223,  0.02526,  0.01314,  0.00535,  0.00146,  \
				            0.00022,  0.00001,  0.00000,  0.00000,  0.00000,  0.06600,  0.05833,  0.04242,  \
				            0.03233,  0.02534,  0.01318,  0.00536,  0.00146,  0.00022,  0.00001,  0.00000,  \
				            0.00000,  0.00000,  0.06662,  0.05889,  0.04284,  0.03266,  0.02559,  0.01332,  \
				            0.00542,  0.00148,  0.00022,  0.00001,  0.00000,  0.00000,  0.00000,  0.06667,  \
				            0.05894,  0.04287,  0.03268,  0.02561,  0.01333,  0.00543,  0.00148,  0.00022,  \
				            0.00001,  0.00000,  0.00000,  0.00000,  0.06696,  0.05920,  0.04307,  0.03284,  \
				            0.02574,  0.01340,  0.00546,  0.00149,  0.00022,  0.00001,  0.00000,  0.00000,  \
				            0.00000 ");
			}
			ground_capacitance (capacitance_template_WxS) {
				index_1 (" 0.8000, 0.9000, 1.5000, 1.6000, 3.2000 ");
				index_2 (" 0.8000, 0.9000, 1.2000, 1.5000, 1.8000, 2.7000, 4.0500, 6.0750,  \
				           9.1125, 13.6688, 20.5031, 30.7547, 3075.4688 ");
				values  ("  0.05787,  0.06066,  0.06849,  0.07548,  0.08172,  0.09622,  0.10872,  0.11609,  \
				            0.11864,  0.11908,  0.11911,  0.11915,  0.11875,  0.06159,  0.06439,  0.07224,  \
				            0.07925,  0.08552,  0.10005,  0.11259,  0.11998,  0.12255,  0.12299,  0.12302,  \
				            0.12306,  0.12266,  0.08410,  0.08694,  0.09488,  0.10196,  0.10828,  0.12296,  \
				            0.13562,  0.14309,  0.14568,  0.14613,  0.14616,  0.14620,  0.14580,  0.08787,  \
				            0.09071,  0.09866,  0.10575,  0.11208,  0.12676,  0.13943,  0.14691,  0.14951,  \
				            0.14995,  0.14998,  0.15003,  0.14962,  0.14861,  0.15147,  0.15946,  0.16658,  \
				            0.17294,  0.18768,  0.20042,  0.20794,  0.21054,  0.21099,  0.21102,  0.21107,  \
				            0.21066 ");
			}
		}

		capacitance () {
			top_plane: metal10;
			bottom_plane: metal7;
			lateral_capacitance (capacitance_template_WxS) {
				index_1 (" 0.8000, 0.9000, 1.5000, 1.6000, 3.2000 ");
				index_2 (" 0.8000, 0.9000, 1.2000, 1.5000, 1.8000, 2.7000, 4.0500, 6.0750,  \
				           9.1125, 13.6688, 20.5031, 30.7547, 3075.4688 ");
				values  ("  0.07181,  0.06422,  0.04843,  0.03835,  0.03125,  0.01844,  0.00919,  0.00343,  \
				            0.00081,  0.00010,  0.00000,  0.00000,  0.00000,  0.07218,  0.06456,  0.04870,  \
				            0.03855,  0.03142,  0.01853,  0.00924,  0.00345,  0.00082,  0.00010,  0.00000,  \
				            0.00000,  0.00000,  0.07354,  0.06580,  0.04965,  0.03931,  0.03203,  0.01888,  \
				            0.00941,  0.00351,  0.00083,  0.00010,  0.00000,  0.00000,  0.00000,  0.07366,  \
				            0.06591,  0.04974,  0.03938,  0.03209,  0.01891,  0.00943,  0.00352,  0.00083,  \
				            0.00010,  0.00000,  0.00000,  0.00000,  0.07444,  0.06662,  0.05028,  0.03981,  \
				            0.03244,  0.01912,  0.00952,  0.00355,  0.00084,  0.00010,  0.00000,  0.00000,  \
				            0.00000 ");
			}
			ground_capacitance (capacitance_template_WxS) {
				index_1 (" 0.8000, 0.9000, 1.5000, 1.6000, 3.2000 ");
				index_2 (" 0.8000, 0.9000, 1.2000, 1.5000, 1.8000, 2.7000, 4.0500, 6.0750,  \
				           9.1125, 13.6688, 20.5031, 30.7547, 3075.4688 ");
				values  ("  0.03274,  0.03440,  0.03924,  0.04385,  0.04821,  0.05960,  0.07182,  0.08164,  \
				            0.08676,  0.08825,  0.08845,  0.08849,  0.08816,  0.03458,  0.03625,  0.04113,  \
				            0.04577,  0.05017,  0.06162,  0.07391,  0.08378,  0.08892,  0.09042,  0.09062,  \
				            0.09066,  0.09033,  0.04599,  0.04771,  0.05274,  0.05751,  0.06201,  0.07371,  \
				            0.08623,  0.09628,  0.10152,  0.10305,  0.10326,  0.10329,  0.10295,  0.04793,  \
				            0.04966,  0.05470,  0.05948,  0.06399,  0.07572,  0.08826,  0.09833,  0.10358,  \
				            0.10511,  0.10532,  0.10535,  0.10502,  0.07972,  0.08149,  0.08663,  0.09149,  \
				            0.09606,  0.10794,  0.12062,  0.13079,  0.13609,  0.13763,  0.13785,  0.13788,  \
				            0.13754 ");
			}
		}

		capacitance () {
			top_plane: metal10;
			bottom_plane: metal6;
			lateral_capacitance (capacitance_template_WxS) {
				index_1 (" 0.8000, 0.9000, 1.5000, 1.6000, 3.2000 ");
				index_2 (" 0.8000, 0.9000, 1.2000, 1.5000, 1.8000, 2.7000, 4.0500, 6.0750,  \
				           9.1125, 13.6688, 20.5031, 30.7547, 3075.4688 ");
				values  ("  0.07305,  0.06552,  0.04987,  0.03989,  0.03288,  0.02018,  0.01080,  0.00455,  \
				            0.00130,  0.00021,  0.00001,  0.00000,  0.00000,  0.07350,  0.06593,  0.05019,  \
				            0.04016,  0.03311,  0.02032,  0.01088,  0.00458,  0.00131,  0.00021,  0.00001,  \
				            0.00000,  0.00000,  0.07525,  0.06755,  0.05149,  0.04123,  0.03400,  0.02087,  \
				            0.01118,  0.00471,  0.00135,  0.00022,  0.00002,  0.00000,  0.00000,  0.07543,  \
				            0.06771,  0.05163,  0.04134,  0.03409,  0.02093,  0.01121,  0.00473,  0.00136,  \
				            0.00022,  0.00002,  0.00000,  0.00000,  0.07678,  0.06897,  0.05265,  0.04219,  \
				            0.03480,  0.02138,  0.01146,  0.00483,  0.00139,  0.00022,  0.00002,  0.00000,  \
				            0.00000 ");
			}
			ground_capacitance (capacitance_template_WxS) {
				index_1 (" 0.8000, 0.9000, 1.5000, 1.6000, 3.2000 ");
				index_2 (" 0.8000, 0.9000, 1.2000, 1.5000, 1.8000, 2.7000, 4.0500, 6.0750,  \
				           9.1125, 13.6688, 20.5031, 30.7547, 3075.4688 ");
				values  ("  0.02905,  0.03048,  0.03467,  0.03866,  0.04246,  0.05254,  0.06389,  0.07393,  \
				            0.08006,  0.08231,  0.08273,  0.08278,  0.08247,  0.03060,  0.03205,  0.03626,  \
				            0.04028,  0.04410,  0.05425,  0.06567,  0.07578,  0.08196,  0.08422,  0.08465,  \
				            0.08470,  0.08438,  0.04021,  0.04170,  0.04604,  0.05017,  0.05410,  0.06452,  \
				            0.07624,  0.08661,  0.09297,  0.09530,  0.09573,  0.09579,  0.09547,  0.04185,  \
				            0.04334,  0.04769,  0.05184,  0.05579,  0.06623,  0.07798,  0.08839,  0.09476,  \
				            0.09710,  0.09753,  0.09759,  0.09727,  0.06886,  0.07040,  0.07486,  0.07911,  \
				            0.08314,  0.09382,  0.10580,  0.11643,  0.12294,  0.12533,  0.12578,  0.12583,  \
				            0.12551 ");
			}
		}

		capacitance () {
			top_plane: metal10;
			bottom_plane: metal5;
			lateral_capacitance (capacitance_template_WxS) {
				index_1 (" 0.8000, 0.9000, 1.5000, 1.6000, 3.2000 ");
				index_2 (" 0.8000, 0.9000, 1.2000, 1.5000, 1.8000, 2.7000, 4.0500, 6.0750,  \
				           9.1125, 13.6688, 20.5031, 30.7547, 3075.4688 ");
				values  ("  0.07344,  0.06592,  0.05032,  0.04039,  0.03342,  0.02080,  0.01143,  0.00504,  \
				            0.00156,  0.00028,  0.00002,  0.00000,  0.00000,  0.07391,  0.06636,  0.05068,  \
				            0.04069,  0.03367,  0.02096,  0.01152,  0.00508,  0.00157,  0.00029,  0.00002,  \
				            0.00000,  0.00000,  0.07581,  0.06812,  0.05211,  0.04188,  0.03468,  0.02161,  \
				            0.01189,  0.00525,  0.00163,  0.00030,  0.00003,  0.00000,  0.00000,  0.07601,  \
				            0.06831,  0.05227,  0.04201,  0.03479,  0.02168,  0.01193,  0.00527,  0.00164,  \
				            0.00030,  0.00003,  0.00000,  0.00000,  0.07763,  0.06983,  0.05353,  0.04308,  \
				            0.03570,  0.02228,  0.01227,  0.00543,  0.00169,  0.00031,  0.00003,  0.00000,  \
				            0.00000 ");
			}
			ground_capacitance (capacitance_template_WxS) {
				index_1 (" 0.8000, 0.9000, 1.5000, 1.6000, 3.2000 ");
				index_2 (" 0.8000, 0.9000, 1.2000, 1.5000, 1.8000, 2.7000, 4.0500, 6.0750,  \
				           9.1125, 13.6688, 20.5031, 30.7547, 3075.4688 ");
				values  ("  0.02796,  0.02933,  0.03331,  0.03711,  0.04072,  0.05032,  0.06127,  0.07127,  \
				            0.07775,  0.08035,  0.08090,  0.08097,  0.08066,  0.02944,  0.03081,  0.03482,  \
				            0.03863,  0.04227,  0.05194,  0.06296,  0.07303,  0.07956,  0.08218,  0.08274,  \
				            0.08281,  0.08250,  0.03851,  0.03992,  0.04403,  0.04796,  0.05169,  0.06162,  \
				            0.07296,  0.08332,  0.09007,  0.09278,  0.09336,  0.09343,  0.09312,  0.04005,  \
				            0.04147,  0.04560,  0.04953,  0.05328,  0.06324,  0.07461,  0.08501,  0.09178,  \
				            0.09450,  0.09508,  0.09516,  0.09484,  0.06555,  0.06700,  0.07124,  0.07528,  \
				            0.07912,  0.08933,  0.10098,  0.11166,  0.11863,  0.12144,  0.12204,  0.12211,  \
				            0.12179 ");
			}
		}

		capacitance () {
			top_plane: metal10;
			bottom_plane: SUBSTRATE;
			lateral_capacitance (capacitance_template_WxS) {
				index_1 (" 0.8000, 0.9000, 1.5000, 1.6000, 3.2000 ");
				index_2 (" 0.8000, 0.9000, 1.2000, 1.5000, 1.8000, 2.7000, 4.0500, 6.0750,  \
				           9.1125, 13.6688, 20.5031, 30.7547, 3075.4688 ");
				values  ("  0.07419,  0.06671,  0.05121,  0.04138,  0.03450,  0.02209,  0.01283,  0.00629,  \
				            0.00234,  0.00057,  0.00007,  0.00000,  0.00000,  0.07471,  0.06719,  0.05161,  \
				            0.04172,  0.03480,  0.02229,  0.01296,  0.00636,  0.00237,  0.00058,  0.00007,  \
				            0.00000,  0.00000,  0.07689,  0.06924,  0.05334,  0.04321,  0.03609,  0.02320,  \
				            0.01353,  0.00667,  0.00249,  0.00061,  0.00008,  0.00000,  0.00000,  0.07715,  \
				            0.06948,  0.05355,  0.04338,  0.03625,  0.02331,  0.01360,  0.00670,  0.00251,  \
				            0.00061,  0.00008,  0.00000,  0.00000,  0.07945,  0.07168,  0.05545,  0.04505,  \
				            0.03772,  0.02437,  0.01429,  0.00708,  0.00266,  0.00065,  0.00008,  0.00000,  \
				            0.00000 ");
			}
			ground_capacitance (capacitance_template_WxS) {
				index_1 (" 0.8000, 0.9000, 1.5000, 1.6000, 3.2000 ");
				index_2 (" 0.8000, 0.9000, 1.2000, 1.5000, 1.8000, 2.7000, 4.0500, 6.0750,  \
				           9.1125, 13.6688, 20.5031, 30.7547, 3075.4688 ");
				values  ("  0.02595,  0.02719,  0.03081,  0.03423,  0.03747,  0.04608,  0.05604,  0.06565,  \
				            0.07269,  0.07620,  0.07723,  0.07741,  0.07711,  0.02727,  0.02852,  0.03215,  \
				            0.03558,  0.03884,  0.04750,  0.05753,  0.06722,  0.07433,  0.07788,  0.07892,  \
				            0.07910,  0.07881,  0.03537,  0.03664,  0.04032,  0.04382,  0.04715,  0.05603,  \
				            0.06637,  0.07641,  0.08384,  0.08756,  0.08867,  0.08885,  0.08855,  0.03674,  \
				            0.03801,  0.04170,  0.04521,  0.04855,  0.05745,  0.06783,  0.07792,  0.08538,  \
				            0.08913,  0.09024,  0.09042,  0.09013,  0.05927,  0.06056,  0.06433,  0.06792,  \
				            0.07134,  0.08050,  0.09123,  0.10175,  0.10960,  0.11357,  0.11475,  0.11494,  \
				            0.11464 ");
			}
		}

		capacitance () {
			top_plane: AIR;
			bottom_plane: metal8;
			lateral_capacitance (capacitance_template_WxS) {
				index_1 (" 0.8000, 0.9000, 1.5000, 1.6000, 3.2000 ");
				index_2 (" 0.8000, 0.9000, 1.2000, 1.5000, 1.8000, 2.7000, 4.0500, 6.0750,  \
				           9.1125, 13.6688, 20.5031, 30.7547, 3075.4688 ");
				values  ("  0.07049,  0.06302,  0.04766,  0.03806,  0.03148,  0.02010,  0.01228,  0.00708,  \
				            0.00371,  0.00162,  0.00051,  0.00009,  0.00000,  0.07093,  0.06344,  0.04804,  \
				            0.03841,  0.03181,  0.02038,  0.01250,  0.00723,  0.00380,  0.00166,  0.00052,  \
				            0.00010,  0.00000,  0.07308,  0.06553,  0.04996,  0.04021,  0.03350,  0.02181,  \
				            0.01363,  0.00803,  0.00428,  0.00188,  0.00059,  0.00011,  0.00000,  0.07338,  \
				            0.06582,  0.05024,  0.04047,  0.03374,  0.02202,  0.01380,  0.00815,  0.00435,  \
				            0.00192,  0.00060,  0.00011,  0.00000,  0.07713,  0.06949,  0.05368,  0.04372,  \
				            0.03683,  0.02468,  0.01593,  0.00968,  0.00527,  0.00235,  0.00074,  0.00014,  \
				            0.00000 ");
			}
			ground_capacitance (capacitance_template_WxS) {
				index_1 (" 0.8000, 0.9000, 1.5000, 1.6000, 3.2000 ");
				index_2 (" 0.8000, 0.9000, 1.2000, 1.5000, 1.8000, 2.7000, 4.0500, 6.0750,  \
				           9.1125, 13.6688, 20.5031, 30.7547, 3075.4688 ");
				values  ("  0.04474,  0.04679,  0.05239,  0.05724,  0.06147,  0.07115,  0.08029,  0.08792,  \
				            0.09365,  0.09756,  0.09977,  0.10066,  0.10051,  0.04753,  0.04957,  0.05514,  \
				            0.05995,  0.06416,  0.07382,  0.08298,  0.09068,  0.09650,  0.10050,  0.10276,  \
				            0.10368,  0.10353,  0.06396,  0.06593,  0.07133,  0.07602,  0.08013,  0.08970,  \
				            0.09899,  0.10704,  0.11335,  0.11781,  0.12036,  0.12140,  0.12128,  0.06666,  \
				            0.06862,  0.07400,  0.07867,  0.08278,  0.09233,  0.10164,  0.10975,  0.11613,  \
				            0.12065,  0.12325,  0.12430,  0.12419,  0.10922,  0.11112,  0.11635,  0.12091,  \
				            0.12494,  0.13447,  0.14406,  0.15282,  0.16013,  0.16553,  0.16870,  0.16998,  \
				            0.16992 ");
			}
		}

		capacitance () {
			top_plane: AIR;
			bottom_plane: metal7;
			lateral_capacitance (capacitance_template_WxS) {
				index_1 (" 0.8000, 0.9000, 1.5000, 1.6000, 3.2000 ");
				index_2 (" 0.8000, 0.9000, 1.2000, 1.5000, 1.8000, 2.7000, 4.0500, 6.0750,  \
				           9.1125, 13.6688, 20.5031, 30.7547, 3075.4688 ");
				values  ("  0.07694,  0.06954,  0.05427,  0.04465,  0.03797,  0.02609,  0.01735,  0.01093,  \
				            0.00629,  0.00308,  0.00114,  0.00027,  0.00000,  0.07755,  0.07012,  0.05477,  \
				            0.04509,  0.03838,  0.02642,  0.01760,  0.01111,  0.00640,  0.00314,  0.00116,  \
				            0.00027,  0.00000,  0.08035,  0.07279,  0.05714,  0.04725,  0.04036,  0.02802,  \
				            0.01884,  0.01200,  0.00697,  0.00343,  0.00127,  0.00030,  0.00000,  0.08072,  \
				            0.07314,  0.05746,  0.04754,  0.04063,  0.02824,  0.01902,  0.01213,  0.00705,  \
				            0.00348,  0.00129,  0.00030,  0.00000,  0.08484,  0.07715,  0.06115,  0.05098,  \
				            0.04385,  0.03096,  0.02120,  0.01374,  0.00809,  0.00401,  0.00149,  0.00035,  \
				            0.00000 ");
			}
			ground_capacitance (capacitance_template_WxS) {
				index_1 (" 0.8000, 0.9000, 1.5000, 1.6000, 3.2000 ");
				index_2 (" 0.8000, 0.9000, 1.2000, 1.5000, 1.8000, 2.7000, 4.0500, 6.0750,  \
				           9.1125, 13.6688, 20.5031, 30.7547, 3075.4688 ");
				values  ("  0.01839,  0.01930,  0.02193,  0.02437,  0.02665,  0.03254,  0.03932,  0.04638,  \
				            0.05298,  0.05840,  0.06207,  0.06385,  0.06415,  0.01935,  0.02026,  0.02286,  \
				            0.02527,  0.02753,  0.03340,  0.04020,  0.04731,  0.05398,  0.05949,  0.06323,  \
				            0.06503,  0.06535,  0.02488,  0.02574,  0.02822,  0.03054,  0.03273,  0.03853,  \
				            0.04539,  0.05274,  0.05979,  0.06572,  0.06980,  0.07177,  0.07214,  0.02577,  \
				            0.02663,  0.02909,  0.03140,  0.03359,  0.03937,  0.04624,  0.05362,  0.06073,  \
				            0.06673,  0.07085,  0.07285,  0.07322,  0.03966,  0.04046,  0.04282,  0.04505,  \
				            0.04717,  0.05290,  0.05989,  0.06768,  0.07546,  0.08223,  0.08696,  0.08927,  \
				            0.08974 ");
			}
		}

		capacitance () {
			top_plane: AIR;
			bottom_plane: metal6;
			lateral_capacitance (capacitance_template_WxS) {
				index_1 (" 0.8000, 0.9000, 1.5000, 1.6000, 3.2000 ");
				index_2 (" 0.8000, 0.9000, 1.2000, 1.5000, 1.8000, 2.7000, 4.0500, 6.0750,  \
				           9.1125, 13.6688, 20.5031, 30.7547, 3075.4688 ");
				values  ("  0.07849,  0.07114,  0.05600,  0.04649,  0.03989,  0.02814,  0.01939,  0.01277,  \
				            0.00773,  0.00403,  0.00162,  0.00043,  0.00000,  0.07917,  0.07178,  0.05656,  \
				            0.04699,  0.04035,  0.02850,  0.01966,  0.01296,  0.00786,  0.00410,  0.00165,  \
				            0.00044,  0.00000,  0.08231,  0.07479,  0.05923,  0.04940,  0.04256,  0.03027,  \
				            0.02103,  0.01394,  0.00849,  0.00444,  0.00179,  0.00048,  0.00000,  0.08272,  \
				            0.07518,  0.05959,  0.04973,  0.04286,  0.03052,  0.02122,  0.01408,  0.00858,  \
				            0.00449,  0.00181,  0.00048,  0.00000,  0.08734,  0.07965,  0.06368,  0.05351,  \
				            0.04637,  0.03343,  0.02351,  0.01576,  0.00968,  0.00509,  0.00206,  0.00055,  \
				            0.00000 ");
			}
			ground_capacitance (capacitance_template_WxS) {
				index_1 (" 0.8000, 0.9000, 1.5000, 1.6000, 3.2000 ");
				index_2 (" 0.8000, 0.9000, 1.2000, 1.5000, 1.8000, 2.7000, 4.0500, 6.0750,  \
				           9.1125, 13.6688, 20.5031, 30.7547, 3075.4688 ");
				values  ("  0.01398,  0.01467,  0.01665,  0.01849,  0.02021,  0.02471,  0.03011,  0.03619,  \
				            0.04249,  0.04829,  0.05265,  0.05502,  0.05570,  0.01467,  0.01535,  0.01730,  \
				            0.01911,  0.02081,  0.02529,  0.03069,  0.03682,  0.04319,  0.04906,  0.05350,  \
				            0.05590,  0.05660,  0.01854,  0.01917,  0.02097,  0.02267,  0.02429,  0.02867,  \
				            0.03413,  0.04047,  0.04719,  0.05346,  0.05825,  0.06085,  0.06162,  0.01915,  \
				            0.01977,  0.02155,  0.02325,  0.02486,  0.02923,  0.03470,  0.04107,  0.04783,  \
				            0.05417,  0.05900,  0.06164,  0.06241,  0.02846,  0.02903,  0.03071,  0.03234,  \
				            0.03390,  0.03823,  0.04383,  0.05056,  0.05791,  0.06495,  0.07040,  0.07339,  \
				            0.07429 ");
			}
		}

		capacitance () {
			top_plane: AIR;
			bottom_plane: metal5;
			lateral_capacitance (capacitance_template_WxS) {
				index_1 (" 0.8000, 0.9000, 1.5000, 1.6000, 3.2000 ");
				index_2 (" 0.8000, 0.9000, 1.2000, 1.5000, 1.8000, 2.7000, 4.0500, 6.0750,  \
				           9.1125, 13.6688, 20.5031, 30.7547, 3075.4688 ");
				values  ("  0.07903,  0.07169,  0.05660,  0.04713,  0.04058,  0.02890,  0.02019,  0.01354,  \
				            0.00839,  0.00450,  0.00189,  0.00053,  0.00000,  0.07973,  0.07236,  0.05718,  \
				            0.04765,  0.04105,  0.02927,  0.02047,  0.01374,  0.00852,  0.00458,  0.00192,  \
				            0.00054,  0.00000,  0.08299,  0.07548,  0.05997,  0.05017,  0.04336,  0.03113,  \
				            0.02190,  0.01476,  0.00918,  0.00494,  0.00207,  0.00058,  0.00000,  0.08342,  \
				            0.07590,  0.06034,  0.05052,  0.04367,  0.03139,  0.02210,  0.01490,  0.00928,  \
				            0.00499,  0.00209,  0.00059,  0.00000,  0.08827,  0.08059,  0.06463,  0.05447,  \
				            0.04735,  0.03442,  0.02447,  0.01664,  0.01041,  0.00562,  0.00236,  0.00067,  \
				            0.00000 ");
			}
			ground_capacitance (capacitance_template_WxS) {
				index_1 (" 0.8000, 0.9000, 1.5000, 1.6000, 3.2000 ");
				index_2 (" 0.8000, 0.9000, 1.2000, 1.5000, 1.8000, 2.7000, 4.0500, 6.0750,  \
				           9.1125, 13.6688, 20.5031, 30.7547, 3075.4688 ");
				values  ("  0.01254,  0.01317,  0.01495,  0.01660,  0.01813,  0.02215,  0.02700,  0.03260,  \
				            0.03864,  0.04448,  0.04911,  0.05178,  0.05267,  0.01316,  0.01377,  0.01552,  \
				            0.01713,  0.01865,  0.02264,  0.02749,  0.03312,  0.03923,  0.04515,  0.04985,  \
				            0.05256,  0.05347,  0.01655,  0.01710,  0.01869,  0.02019,  0.02161,  0.02548,  \
				            0.03037,  0.03621,  0.04265,  0.04896,  0.05401,  0.05693,  0.05793,  0.01708,  \
				            0.01762,  0.01919,  0.02068,  0.02209,  0.02595,  0.03085,  0.03671,  0.04320,  \
				            0.04957,  0.05467,  0.05762,  0.05863,  0.02497,  0.02547,  0.02693,  0.02834,  \
				            0.02971,  0.03353,  0.03856,  0.04477,  0.05182,  0.05887,  0.06458,  0.06790,  \
				            0.06906 ");
			}
		}

		capacitance () {
			top_plane: AIR;
			bottom_plane: SUBSTRATE;
			lateral_capacitance (capacitance_template_WxS) {
				index_1 (" 0.8000, 0.9000, 1.5000, 1.6000, 3.2000 ");
				index_2 (" 0.8000, 0.9000, 1.2000, 1.5000, 1.8000, 2.7000, 4.0500, 6.0750,  \
				           9.1125, 13.6688, 20.5031, 30.7547, 3075.4688 ");
				values  ("  0.08020,  0.07291,  0.05793,  0.04855,  0.04208,  0.03060,  0.02207,  0.01548,  \
				            0.01018,  0.00592,  0.00277,  0.00092,  0.00000,  0.08094,  0.07361,  0.05855,  \
				            0.04911,  0.04259,  0.03101,  0.02238,  0.01571,  0.01033,  0.00600,  0.00281,  \
				            0.00093,  0.00000,  0.08446,  0.07698,  0.06156,  0.05186,  0.04512,  0.03307,  \
				            0.02397,  0.01685,  0.01109,  0.00644,  0.00301,  0.00100,  0.00000,  0.08493,  \
				            0.07744,  0.06198,  0.05224,  0.04547,  0.03335,  0.02420,  0.01701,  0.01119,  \
				            0.00650,  0.00304,  0.00101,  0.00000,  0.09034,  0.08268,  0.06678,  0.05668,  \
				            0.04960,  0.03676,  0.02685,  0.01894,  0.01247,  0.00723,  0.00338,  0.00112,  \
				            0.00000 ");
			}
			ground_capacitance (capacitance_template_WxS) {
				index_1 (" 0.8000, 0.9000, 1.5000, 1.6000, 3.2000 ");
				index_2 (" 0.8000, 0.9000, 1.2000, 1.5000, 1.8000, 2.7000, 4.0500, 6.0750,  \
				           9.1125, 13.6688, 20.5031, 30.7547, 3075.4688 ");
				values  ("  0.00952,  0.01001,  0.01139,  0.01267,  0.01384,  0.01688,  0.02050,  0.02480,  \
				            0.02987,  0.03545,  0.04058,  0.04407,  0.04576,  0.01000,  0.01047,  0.01182,  \
				            0.01306,  0.01421,  0.01720,  0.02081,  0.02513,  0.03026,  0.03590,  0.04110,  \
				            0.04464,  0.04636,  0.01253,  0.01293,  0.01410,  0.01520,  0.01624,  0.01903,  \
				            0.02260,  0.02707,  0.03248,  0.03849,  0.04404,  0.04782,  0.04967,  0.01290,  \
				            0.01330,  0.01445,  0.01553,  0.01655,  0.01933,  0.02289,  0.02739,  0.03284,  \
				            0.03890,  0.04450,  0.04832,  0.05019,  0.01814,  0.01848,  0.01948,  0.02046,  \
				            0.02140,  0.02409,  0.02775,  0.03256,  0.03852,  0.04519,  0.05139,  0.05562,  \
				            0.05772 ");
			}
		}
	}

	layer (metal8) {
		resistance: 0.075000

		capacitance () {
			top_plane: metal9;
			bottom_plane: metal7;
			lateral_capacitance (capacitance_template_WxS) {
				index_1 (" 0.4000, 0.5000, 0.8000, 0.9000, 1.5000, 1.6000 ");
				index_2 (" 0.4000, 0.5000, 0.6000, 0.9000, 1.3500, 1.5000, 2.0250, 3.0375,  \
				           4.5563, 6.8344, 10.2516, 15.3773, 1537.7344 ");
				values  ("  0.05816,  0.04643,  0.03813,  0.02327,  0.01237,  0.01014,  0.00514,  0.00144,  \
				            0.00022,  0.00002,  0.00000,  0.00000,  0.00000,  0.05862,  0.04679,  0.03843,  \
				            0.02344,  0.01246,  0.01021,  0.00518,  0.00145,  0.00023,  0.00002,  0.00000,  \
				            0.00000,  0.00000,  0.05924,  0.04729,  0.03883,  0.02368,  0.01258,  0.01031,  \
				            0.00523,  0.00146,  0.00023,  0.00002,  0.00000,  0.00000,  0.00000,  0.05934,  \
				            0.04737,  0.03889,  0.02372,  0.01260,  0.01033,  0.00524,  0.00147,  0.00023,  \
				            0.00002,  0.00000,  0.00000,  0.00000,  0.05952,  0.04751,  0.03901,  0.02379,  \
				            0.01264,  0.01036,  0.00525,  0.00147,  0.00023,  0.00002,  0.00000,  0.00000,  \
				            0.00000,  0.05952,  0.04751,  0.03901,  0.02379,  0.01264,  0.01036,  0.00525,  \
				            0.00147,  0.00023,  0.00002,  0.00000,  0.00000,  0.00000 ");
			}
			ground_capacitance (capacitance_template_WxS) {
				index_1 (" 0.4000, 0.5000, 0.8000, 0.9000, 1.5000, 1.6000 ");
				index_2 (" 0.4000, 0.5000, 0.6000, 0.9000, 1.3500, 1.5000, 2.0250, 3.0375,  \
				           4.5563, 6.8344, 10.2516, 15.3773, 1537.7344 ");
				values  ("  0.04236,  0.04670,  0.05081,  0.06192,  0.07468,  0.07794,  0.08613,  0.09320,  \
				            0.09569,  0.09613,  0.09615,  0.09588,  0.09589,  0.04754,  0.05193,  0.05608,  \
				            0.06730,  0.08015,  0.08344,  0.09169,  0.09881,  0.10132,  0.10176,  0.10178,  \
				            0.10151,  0.10151,  0.06340,  0.06787,  0.07209,  0.08345,  0.09645,  0.09977,  \
				            0.10810,  0.11529,  0.11782,  0.11827,  0.11829,  0.11801,  0.11802,  0.06875,  \
				            0.07323,  0.07746,  0.08885,  0.10186,  0.10519,  0.11354,  0.12073,  0.12327,  \
				            0.12371,  0.12374,  0.12346,  0.12347,  0.10104,  0.10554,  0.10980,  0.12123,  \
				            0.13429,  0.13762,  0.14599,  0.15320,  0.15575,  0.15620,  0.15622,  0.15594,  \
				            0.15595,  0.10642,  0.11093,  0.11519,  0.12662,  0.13968,  0.14301,  0.15138,  \
				            0.15859,  0.16114,  0.16159,  0.16161,  0.16133,  0.16134 ");
			}
		}

		capacitance () {
			top_plane: metal9;
			bottom_plane: metal6;
			lateral_capacitance (capacitance_template_WxS) {
				index_1 (" 0.4000, 0.5000, 0.8000, 0.9000, 1.5000, 1.6000 ");
				index_2 (" 0.4000, 0.5000, 0.6000, 0.9000, 1.3500, 1.5000, 2.0250, 3.0375,  \
				           4.5563, 6.8344, 10.2516, 15.3773, 1537.7344 ");
				values  ("  0.06139,  0.04987,  0.04175,  0.02722,  0.01631,  0.01398,  0.00838,  0.00332,  \
				            0.00088,  0.00013,  0.00001,  0.00000,  0.00000,  0.06219,  0.05055,  0.04235,  \
				            0.02763,  0.01657,  0.01420,  0.00852,  0.00338,  0.00089,  0.00013,  0.00001,  \
				            0.00000,  0.00000,  0.06364,  0.05181,  0.04344,  0.02840,  0.01706,  0.01462,  \
				            0.00878,  0.00349,  0.00092,  0.00013,  0.00001,  0.00000,  0.00000,  0.06395,  \
				            0.05208,  0.04368,  0.02857,  0.01717,  0.01472,  0.00884,  0.00352,  0.00093,  \
				            0.00013,  0.00001,  0.00000,  0.00000,  0.06493,  0.05294,  0.04444,  0.02912,  \
				            0.01752,  0.01503,  0.00904,  0.00360,  0.00095,  0.00014,  0.00001,  0.00000,  \
				            0.00000,  0.06500,  0.05300,  0.04450,  0.02916,  0.01755,  0.01505,  0.00905,  \
				            0.00361,  0.00095,  0.00014,  0.00001,  0.00000,  0.00000 ");
			}
			ground_capacitance (capacitance_template_WxS) {
				index_1 (" 0.4000, 0.5000, 0.8000, 0.9000, 1.5000, 1.6000 ");
				index_2 (" 0.4000, 0.5000, 0.6000, 0.9000, 1.3500, 1.5000, 2.0250, 3.0375,  \
				           4.5563, 6.8344, 10.2516, 15.3773, 1537.7344 ");
				values  ("  0.03201,  0.03515,  0.03814,  0.04639,  0.05656,  0.05938,  0.06721,  0.07586,  \
				            0.08061,  0.08215,  0.08240,  0.08217,  0.08217,  0.03554,  0.03871,  0.04174,  \
				            0.05009,  0.06039,  0.06324,  0.07119,  0.07997,  0.08479,  0.08637,  0.08662,  \
				            0.08638,  0.08639,  0.04643,  0.04967,  0.05276,  0.06130,  0.07184,  0.07477,  \
				            0.08292,  0.09196,  0.09694,  0.09857,  0.09884,  0.09859,  0.09860,  0.05013,  \
				            0.05338,  0.05649,  0.06508,  0.07567,  0.07861,  0.08681,  0.09590,  0.10092,  \
				            0.10256,  0.10283,  0.10258,  0.10259,  0.07273,  0.07603,  0.07919,  0.08791,  \
				            0.09867,  0.10167,  0.11002,  0.11930,  0.12443,  0.12611,  0.12638,  0.12614,  \
				            0.12614,  0.07653,  0.07984,  0.08300,  0.09173,  0.10251,  0.10551,  0.11387,  \
				            0.12316,  0.12830,  0.12999,  0.13026,  0.13002,  0.13002 ");
			}
		}

		capacitance () {
			top_plane: metal9;
			bottom_plane: metal5;
			lateral_capacitance (capacitance_template_WxS) {
				index_1 (" 0.4000, 0.5000, 0.8000, 0.9000, 1.5000, 1.6000 ");
				index_2 (" 0.4000, 0.5000, 0.6000, 0.9000, 1.3500, 1.5000, 2.0250, 3.0375,  \
				           4.5563, 6.8344, 10.2516, 15.3773, 1537.7344 ");
				values  ("  0.06195,  0.05049,  0.04242,  0.02803,  0.01724,  0.01493,  0.00932,  0.00406,  \
				            0.00125,  0.00023,  0.00002,  0.00000,  0.00000,  0.06283,  0.05125,  0.04309,  \
				            0.02851,  0.01756,  0.01521,  0.00951,  0.00415,  0.00128,  0.00024,  0.00002,  \
				            0.00000,  0.00000,  0.06450,  0.05273,  0.04441,  0.02948,  0.01823,  0.01580,  \
				            0.00990,  0.00433,  0.00134,  0.00025,  0.00002,  0.00000,  0.00000,  0.06489,  \
				            0.05307,  0.04472,  0.02971,  0.01838,  0.01594,  0.01000,  0.00438,  0.00136,  \
				            0.00025,  0.00002,  0.00000,  0.00000,  0.06624,  0.05428,  0.04581,  0.03055,  \
				            0.01896,  0.01645,  0.01035,  0.00455,  0.00141,  0.00026,  0.00002,  0.00000,  \
				            0.00000,  0.06636,  0.05439,  0.04591,  0.03063,  0.01902,  0.01650,  0.01038,  \
				            0.00456,  0.00142,  0.00026,  0.00002,  0.00000,  0.00000 ");
			}
			ground_capacitance (capacitance_template_WxS) {
				index_1 (" 0.4000, 0.5000, 0.8000, 0.9000, 1.5000, 1.6000 ");
				index_2 (" 0.4000, 0.5000, 0.6000, 0.9000, 1.3500, 1.5000, 2.0250, 3.0375,  \
				           4.5563, 6.8344, 10.2516, 15.3773, 1537.7344 ");
				values  ("  0.03046,  0.03339,  0.03619,  0.04387,  0.05335,  0.05600,  0.06347,  0.07215,  \
				            0.07746,  0.07954,  0.07998,  0.07978,  0.07978,  0.03374,  0.03670,  0.03951,  \
				            0.04728,  0.05687,  0.05956,  0.06715,  0.07597,  0.08140,  0.08353,  0.08398,  \
				            0.08377,  0.08378,  0.04381,  0.04682,  0.04969,  0.05760,  0.06743,  0.07019,  \
				            0.07801,  0.08716,  0.09281,  0.09505,  0.09552,  0.09531,  0.09531,  0.04723,  \
				            0.05024,  0.05312,  0.06108,  0.07096,  0.07373,  0.08161,  0.09083,  0.09655,  \
				            0.09880,  0.09928,  0.09907,  0.09908,  0.06807,  0.07112,  0.07405,  0.08214,  \
				            0.09222,  0.09506,  0.10313,  0.11264,  0.11857,  0.12092,  0.12142,  0.12120,  \
				            0.12121,  0.07158,  0.07464,  0.07757,  0.08567,  0.09577,  0.09861,  0.10671,  \
				            0.11625,  0.12219,  0.12455,  0.12505,  0.12484,  0.12485 ");
			}
		}

		capacitance () {
			top_plane: metal9;
			bottom_plane: metal4;
			lateral_capacitance (capacitance_template_WxS) {
				index_1 (" 0.4000, 0.5000, 0.8000, 0.9000, 1.5000, 1.6000 ");
				index_2 (" 0.4000, 0.5000, 0.6000, 0.9000, 1.3500, 1.5000, 2.0250, 3.0375,  \
				           4.5563, 6.8344, 10.2516, 15.3773, 1537.7344 ");
				values  ("  0.06229,  0.05086,  0.04283,  0.02853,  0.01784,  0.01555,  0.00997,  0.00463,  \
				            0.00160,  0.00035,  0.00004,  0.00000,  0.00000,  0.06321,  0.05167,  0.04355,  \
				            0.02906,  0.01821,  0.01588,  0.01020,  0.00474,  0.00164,  0.00036,  0.00004,  \
				            0.00000,  0.00000,  0.06503,  0.05329,  0.04501,  0.03017,  0.01900,  0.01659,  \
				            0.01070,  0.00500,  0.00174,  0.00038,  0.00004,  0.00000,  0.00000,  0.06547,  \
				            0.05368,  0.04536,  0.03045,  0.01920,  0.01677,  0.01083,  0.00507,  0.00176,  \
				            0.00039,  0.00004,  0.00000,  0.00000,  0.06709,  0.05516,  0.04672,  0.03152,  \
				            0.01998,  0.01747,  0.01133,  0.00534,  0.00186,  0.00041,  0.00005,  0.00000,  \
				            0.00000,  0.06725,  0.05531,  0.04686,  0.03163,  0.02006,  0.01755,  0.01138,  \
				            0.00536,  0.00188,  0.00042,  0.00005,  0.00000,  0.00000 ");
			}
			ground_capacitance (capacitance_template_WxS) {
				index_1 (" 0.4000, 0.5000, 0.8000, 0.9000, 1.5000, 1.6000 ");
				index_2 (" 0.4000, 0.5000, 0.6000, 0.9000, 1.3500, 1.5000, 2.0250, 3.0375,  \
				           4.5563, 6.8344, 10.2516, 15.3773, 1537.7344 ");
				values  ("  0.02955,  0.03238,  0.03505,  0.04239,  0.05143,  0.05396,  0.06114,  0.06971,  \
				            0.07533,  0.07784,  0.07849,  0.07833,  0.07834,  0.03270,  0.03553,  0.03823,  \
				            0.04563,  0.05477,  0.05733,  0.06462,  0.07336,  0.07911,  0.08168,  0.08236,  \
				            0.08219,  0.08220,  0.04230,  0.04516,  0.04789,  0.05542,  0.06476,  0.06739,  \
				            0.07492,  0.08401,  0.09006,  0.09278,  0.09350,  0.09334,  0.09334,  0.04555,  \
				            0.04842,  0.05115,  0.05871,  0.06810,  0.07075,  0.07834,  0.08751,  0.09364,  \
				            0.09640,  0.09712,  0.09696,  0.09697,  0.06530,  0.06821,  0.07098,  0.07865,  \
				            0.08824,  0.09095,  0.09877,  0.10831,  0.11473,  0.11765,  0.11841,  0.11825,  \
				            0.11826,  0.06863,  0.07153,  0.07431,  0.08199,  0.09160,  0.09433,  0.10217,  \
				            0.11174,  0.11820,  0.12113,  0.12191,  0.12175,  0.12175 ");
			}
		}

		capacitance () {
			top_plane: metal9;
			bottom_plane: SUBSTRATE;
			lateral_capacitance (capacitance_template_WxS) {
				index_1 (" 0.4000, 0.5000, 0.8000, 0.9000, 1.5000, 1.6000 ");
				index_2 (" 0.4000, 0.5000, 0.6000, 0.9000, 1.3500, 1.5000, 2.0250, 3.0375,  \
				           4.5563, 6.8344, 10.2516, 15.3773, 1537.7344 ");
				values  ("  0.06273,  0.05133,  0.04333,  0.02915,  0.01861,  0.01636,  0.01087,  0.00550,  \
				            0.00224,  0.00065,  0.00011,  0.00001,  0.00000,  0.06369,  0.05219,  0.04411,  \
				            0.02974,  0.01905,  0.01676,  0.01116,  0.00567,  0.00231,  0.00068,  0.00012,  \
				            0.00001,  0.00000,  0.06568,  0.05399,  0.04576,  0.03106,  0.02004,  0.01766,  \
				            0.01184,  0.00607,  0.00250,  0.00073,  0.00013,  0.00001,  0.00000,  0.06618,  \
				            0.05445,  0.04618,  0.03140,  0.02030,  0.01790,  0.01202,  0.00618,  0.00255,  \
				            0.00075,  0.00013,  0.00001,  0.00000,  0.06820,  0.05632,  0.04792,  0.03284,  \
				            0.02143,  0.01894,  0.01282,  0.00667,  0.00278,  0.00082,  0.00014,  0.00001,  \
				            0.00000,  0.06842,  0.05653,  0.04812,  0.03301,  0.02156,  0.01907,  0.01292,  \
				            0.00673,  0.00281,  0.00083,  0.00015,  0.00001,  0.00000 ");
			}
			ground_capacitance (capacitance_template_WxS) {
				index_1 (" 0.4000, 0.5000, 0.8000, 0.9000, 1.5000, 1.6000 ");
				index_2 (" 0.4000, 0.5000, 0.6000, 0.9000, 1.3500, 1.5000, 2.0250, 3.0375,  \
				           4.5563, 6.8344, 10.2516, 15.3773, 1537.7344 ");
				values  ("  0.02841,  0.03112,  0.03367,  0.04061,  0.04908,  0.05144,  0.05819,  0.06644,  \
				            0.07231,  0.07542,  0.07653,  0.07651,  0.07653,  0.03142,  0.03412,  0.03668,  \
				            0.04365,  0.05218,  0.05458,  0.06142,  0.06983,  0.07586,  0.07908,  0.08023,  \
				            0.08022,  0.08024,  0.04050,  0.04319,  0.04575,  0.05278,  0.06147,  0.06392,  \
				            0.07097,  0.07976,  0.08616,  0.08962,  0.09087,  0.09087,  0.09090,  0.04354,  \
				            0.04623,  0.04880,  0.05584,  0.06456,  0.06703,  0.07414,  0.08302,  0.08952,  \
				            0.09305,  0.09433,  0.09434,  0.09436,  0.06195,  0.06465,  0.06723,  0.07433,  \
				            0.08321,  0.08574,  0.09308,  0.10240,  0.10934,  0.11317,  0.11457,  0.11460,  \
				            0.11462,  0.06504,  0.06774,  0.07031,  0.07742,  0.08632,  0.08886,  0.09624,  \
				            0.10561,  0.11260,  0.11647,  0.11788,  0.11791,  0.11794 ");
			}
		}

		capacitance () {
			top_plane: metal10;
			bottom_plane: metal7;
			lateral_capacitance (capacitance_template_WxS) {
				index_1 (" 0.4000, 0.5000, 0.8000, 0.9000, 1.5000, 1.6000 ");
				index_2 (" 0.4000, 0.5000, 0.6000, 0.9000, 1.3500, 1.5000, 2.0250, 3.0375,  \
				           4.5563, 6.8344, 10.2516, 15.3773, 1537.7344 ");
				values  ("  0.06281,  0.05142,  0.04343,  0.02927,  0.01876,  0.01652,  0.01104,  0.00569,  \
				            0.00239,  0.00074,  0.00014,  0.00001,  0.00000,  0.06378,  0.05229,  0.04422,  \
				            0.02987,  0.01921,  0.01693,  0.01135,  0.00587,  0.00248,  0.00077,  0.00015,  \
				            0.00001,  0.00000,  0.06581,  0.05412,  0.04590,  0.03123,  0.02024,  0.01787,  \
				            0.01207,  0.00631,  0.00269,  0.00084,  0.00016,  0.00001,  0.00000,  0.06632,  \
				            0.05459,  0.04634,  0.03158,  0.02052,  0.01813,  0.01227,  0.00643,  0.00275,  \
				            0.00086,  0.00017,  0.00001,  0.00000,  0.06842,  0.05655,  0.04816,  0.03311,  \
				            0.02172,  0.01925,  0.01314,  0.00698,  0.00301,  0.00095,  0.00018,  0.00002,  \
				            0.00000,  0.06865,  0.05677,  0.04838,  0.03329,  0.02187,  0.01939,  0.01325,  \
				            0.00704,  0.00305,  0.00096,  0.00019,  0.00002,  0.00000 ");
			}
			ground_capacitance (capacitance_template_WxS) {
				index_1 (" 0.4000, 0.5000, 0.8000, 0.9000, 1.5000, 1.6000 ");
				index_2 (" 0.4000, 0.5000, 0.6000, 0.9000, 1.3500, 1.5000, 2.0250, 3.0375,  \
				           4.5563, 6.8344, 10.2516, 15.3773, 1537.7344 ");
				values  ("  0.02819,  0.03088,  0.03342,  0.04030,  0.04866,  0.05099,  0.05764,  0.06581,  \
				            0.07169,  0.07492,  0.07615,  0.07618,  0.07621,  0.03119,  0.03387,  0.03640,  \
				            0.04330,  0.05172,  0.05408,  0.06083,  0.06916,  0.07520,  0.07854,  0.07982,  \
				            0.07986,  0.07989,  0.04018,  0.04284,  0.04538,  0.05231,  0.06087,  0.06329,  \
				            0.07024,  0.07894,  0.08537,  0.08898,  0.09036,  0.09043,  0.09046,  0.04319,  \
				            0.04585,  0.04838,  0.05533,  0.06392,  0.06635,  0.07336,  0.08215,  0.08869,  \
				            0.09237,  0.09379,  0.09386,  0.09390,  0.06135,  0.06402,  0.06655,  0.07354,  \
				            0.08228,  0.08477,  0.09201,  0.10124,  0.10825,  0.11227,  0.11384,  0.11394,  \
				            0.11398,  0.06440,  0.06706,  0.06959,  0.07659,  0.08535,  0.08784,  0.09511,  \
				            0.10440,  0.11147,  0.11553,  0.11711,  0.11722,  0.11726 ");
			}
		}

		capacitance () {
			top_plane: metal10;
			bottom_plane: metal6;
			lateral_capacitance (capacitance_template_WxS) {
				index_1 (" 0.4000, 0.5000, 0.8000, 0.9000, 1.5000, 1.6000 ");
				index_2 (" 0.4000, 0.5000, 0.6000, 0.9000, 1.3500, 1.5000, 2.0250, 3.0375,  \
				           4.5563, 6.8344, 10.2516, 15.3773, 1537.7344 ");
				values  ("  0.06641,  0.05523,  0.04741,  0.03357,  0.02319,  0.02091,  0.01515,  0.00893,  \
				            0.00440,  0.00164,  0.00040,  0.00005,  0.00000,  0.06769,  0.05638,  0.04845,  \
				            0.03439,  0.02379,  0.02146,  0.01557,  0.00918,  0.00453,  0.00169,  0.00041,  \
				            0.00005,  0.00000,  0.07046,  0.05890,  0.05077,  0.03622,  0.02515,  0.02271,  \
				            0.01651,  0.00976,  0.00484,  0.00181,  0.00044,  0.00005,  0.00000,  0.07117,  \
				            0.05954,  0.05136,  0.03669,  0.02551,  0.02303,  0.01675,  0.00992,  0.00492,  \
				            0.00184,  0.00045,  0.00006,  0.00000,  0.07398,  0.06213,  0.05375,  0.03863,  \
				            0.02698,  0.02439,  0.01780,  0.01058,  0.00527,  0.00198,  0.00048,  0.00006,  \
				            0.00000,  0.07428,  0.06241,  0.05401,  0.03885,  0.02715,  0.02455,  0.01792,  \
				            0.01066,  0.00531,  0.00200,  0.00049,  0.00006,  0.00000 ");
			}
			ground_capacitance (capacitance_template_WxS) {
				index_1 (" 0.4000, 0.5000, 0.8000, 0.9000, 1.5000, 1.6000 ");
				index_2 (" 0.4000, 0.5000, 0.6000, 0.9000, 1.3500, 1.5000, 2.0250, 3.0375,  \
				           4.5563, 6.8344, 10.2516, 15.3773, 1537.7344 ");
				values  ("  0.01697,  0.01849,  0.01993,  0.02391,  0.02916,  0.03075,  0.03572,  0.04313,  \
				            0.05013,  0.05516,  0.05763,  0.05816,  0.05827,  0.01842,  0.01990,  0.02131,  \
				            0.02529,  0.03059,  0.03220,  0.03727,  0.04485,  0.05202,  0.05719,  0.05974,  \
				            0.06028,  0.06039,  0.02264,  0.02408,  0.02548,  0.02949,  0.03495,  0.03662,  \
				            0.04190,  0.04984,  0.05741,  0.06291,  0.06563,  0.06623,  0.06635,  0.02405,  \
				            0.02549,  0.02689,  0.03092,  0.03642,  0.03810,  0.04344,  0.05148,  0.05916,  \
				            0.06474,  0.06751,  0.06812,  0.06824,  0.03272,  0.03418,  0.03560,  0.03973,  \
				            0.04542,  0.04717,  0.05274,  0.06119,  0.06931,  0.07527,  0.07825,  0.07892,  \
				            0.07904,  0.03420,  0.03566,  0.03709,  0.04123,  0.04694,  0.04870,  0.05430,  \
				            0.06279,  0.07097,  0.07697,  0.07998,  0.08065,  0.08078 ");
			}
		}

		capacitance () {
			top_plane: metal10;
			bottom_plane: metal5;
			lateral_capacitance (capacitance_template_WxS) {
				index_1 (" 0.4000, 0.5000, 0.8000, 0.9000, 1.5000, 1.6000 ");
				index_2 (" 0.4000, 0.5000, 0.6000, 0.9000, 1.3500, 1.5000, 2.0250, 3.0375,  \
				           4.5563, 6.8344, 10.2516, 15.3773, 1537.7344 ");
				values  ("  0.06713,  0.05600,  0.04823,  0.03452,  0.02428,  0.02203,  0.01633,  0.01005,  \
				            0.00526,  0.00212,  0.00057,  0.00008,  0.00000,  0.06847,  0.05722,  0.04934,  \
				            0.03541,  0.02494,  0.02264,  0.01679,  0.01034,  0.00541,  0.00218,  0.00059,  \
				            0.00008,  0.00000,  0.07145,  0.05993,  0.05185,  0.03742,  0.02646,  0.02403,  \
				            0.01785,  0.01100,  0.00577,  0.00233,  0.00063,  0.00009,  0.00000,  0.07222,  \
				            0.06064,  0.05250,  0.03794,  0.02685,  0.02440,  0.01813,  0.01118,  0.00587,  \
				            0.00237,  0.00064,  0.00009,  0.00000,  0.07536,  0.06354,  0.05519,  0.04013,  \
				            0.02853,  0.02594,  0.01931,  0.01193,  0.00628,  0.00254,  0.00069,  0.00010,  \
				            0.00000,  0.07571,  0.06386,  0.05549,  0.04038,  0.02872,  0.02612,  0.01945,  \
				            0.01202,  0.00632,  0.00256,  0.00069,  0.00010,  0.00000 ");
			}
			ground_capacitance (capacitance_template_WxS) {
				index_1 (" 0.4000, 0.5000, 0.8000, 0.9000, 1.5000, 1.6000 ");
				index_2 (" 0.4000, 0.5000, 0.6000, 0.9000, 1.3500, 1.5000, 2.0250, 3.0375,  \
				           4.5563, 6.8344, 10.2516, 15.3773, 1537.7344 ");
				values  ("  0.01503,  0.01637,  0.01762,  0.02105,  0.02554,  0.02691,  0.03126,  0.03804,  \
				            0.04497,  0.05048,  0.05351,  0.05433,  0.05450,  0.01627,  0.01755,  0.01877,  \
				            0.02216,  0.02668,  0.02807,  0.03251,  0.03945,  0.04655,  0.05221,  0.05533,  \
				            0.05618,  0.05636,  0.01975,  0.02097,  0.02215,  0.02553,  0.03017,  0.03161,  \
				            0.03625,  0.04356,  0.05107,  0.05709,  0.06042,  0.06133,  0.06152,  0.02090,  \
				            0.02210,  0.02328,  0.02667,  0.03136,  0.03281,  0.03751,  0.04491,  0.05254,  \
				            0.05864,  0.06203,  0.06296,  0.06315,  0.02789,  0.02911,  0.03031,  0.03379,  \
				            0.03866,  0.04019,  0.04512,  0.05295,  0.06104,  0.06755,  0.07117,  0.07219,  \
				            0.07239,  0.02909,  0.03031,  0.03151,  0.03501,  0.03991,  0.04144,  0.04640,  \
				            0.05428,  0.06242,  0.06899,  0.07264,  0.07366,  0.07387 ");
			}
		}

		capacitance () {
			top_plane: metal10;
			bottom_plane: metal4;
			lateral_capacitance (capacitance_template_WxS) {
				index_1 (" 0.4000, 0.5000, 0.8000, 0.9000, 1.5000, 1.6000 ");
				index_2 (" 0.4000, 0.5000, 0.6000, 0.9000, 1.3500, 1.5000, 2.0250, 3.0375,  \
				           4.5563, 6.8344, 10.2516, 15.3773, 1537.7344 ");
				values  ("  0.06761,  0.05651,  0.04876,  0.03514,  0.02500,  0.02279,  0.01716,  0.01090,  \
				            0.00598,  0.00257,  0.00076,  0.00012,  0.00000,  0.06898,  0.05776,  0.04992,  \
				            0.03607,  0.02571,  0.02344,  0.01766,  0.01121,  0.00615,  0.00265,  0.00078,  \
				            0.00013,  0.00000,  0.07208,  0.06060,  0.05254,  0.03821,  0.02735,  0.02494,  \
				            0.01882,  0.01196,  0.00656,  0.00282,  0.00083,  0.00013,  0.00000,  0.07289,  \
				            0.06135,  0.05324,  0.03877,  0.02778,  0.02534,  0.01912,  0.01215,  0.00667,  \
				            0.00287,  0.00085,  0.00014,  0.00000,  0.07629,  0.06449,  0.05617,  0.04118,  \
				            0.02964,  0.02706,  0.02045,  0.01301,  0.00715,  0.00308,  0.00091,  0.00015,  \
				            0.00000,  0.07667,  0.06485,  0.05650,  0.04145,  0.02985,  0.02726,  0.02061,  \
				            0.01311,  0.00720,  0.00310,  0.00091,  0.00015,  0.00000 ");
			}
			ground_capacitance (capacitance_template_WxS) {
				index_1 (" 0.4000, 0.5000, 0.8000, 0.9000, 1.5000, 1.6000 ");
				index_2 (" 0.4000, 0.5000, 0.6000, 0.9000, 1.3500, 1.5000, 2.0250, 3.0375,  \
				           4.5563, 6.8344, 10.2516, 15.3773, 1537.7344 ");
				values  ("  0.01380,  0.01502,  0.01617,  0.01927,  0.02329,  0.02451,  0.02841,  0.03465,  \
				            0.04137,  0.04713,  0.05062,  0.05174,  0.05200,  0.01492,  0.01609,  0.01719,  \
				            0.02023,  0.02426,  0.02549,  0.02947,  0.03586,  0.04275,  0.04868,  0.05227,  \
				            0.05342,  0.05369,  0.01800,  0.01908,  0.02012,  0.02311,  0.02721,  0.02849,  \
				            0.03266,  0.03940,  0.04671,  0.05301,  0.05684,  0.05808,  0.05836,  0.01899,  \
				            0.02005,  0.02109,  0.02408,  0.02822,  0.02951,  0.03373,  0.04056,  0.04798,  \
				            0.05439,  0.05828,  0.05954,  0.05983,  0.02497,  0.02603,  0.02708,  0.03014,  \
				            0.03445,  0.03581,  0.04026,  0.04752,  0.05543,  0.06227,  0.06643,  0.06780,  \
				            0.06811,  0.02599,  0.02706,  0.02811,  0.03118,  0.03551,  0.03688,  0.04136,  \
				            0.04868,  0.05664,  0.06353,  0.06773,  0.06911,  0.06942 ");
			}
		}

		capacitance () {
			top_plane: metal10;
			bottom_plane: SUBSTRATE;
			lateral_capacitance (capacitance_template_WxS) {
				index_1 (" 0.4000, 0.5000, 0.8000, 0.9000, 1.5000, 1.6000 ");
				index_2 (" 0.4000, 0.5000, 0.6000, 0.9000, 1.3500, 1.5000, 2.0250, 3.0375,  \
				           4.5563, 6.8344, 10.2516, 15.3773, 1537.7344 ");
				values  ("  0.06830,  0.05723,  0.04952,  0.03600,  0.02601,  0.02384,  0.01835,  0.01221,  \
				            0.00722,  0.00348,  0.00121,  0.00025,  0.00000,  0.06971,  0.05852,  0.05071,  \
				            0.03698,  0.02678,  0.02455,  0.01891,  0.01258,  0.00744,  0.00359,  0.00124,  \
				            0.00025,  0.00000,  0.07293,  0.06150,  0.05349,  0.03928,  0.02859,  0.02624,  \
				            0.02024,  0.01347,  0.00797,  0.00384,  0.00133,  0.00027,  0.00000,  0.07380,  \
				            0.06231,  0.05424,  0.03991,  0.02908,  0.02669,  0.02060,  0.01371,  0.00811,  \
				            0.00391,  0.00135,  0.00028,  0.00000,  0.07755,  0.06580,  0.05752,  0.04265,  \
				            0.03126,  0.02872,  0.02220,  0.01478,  0.00874,  0.00421,  0.00146,  0.00030,  \
				            0.00000,  0.07799,  0.06622,  0.05791,  0.04298,  0.03152,  0.02896,  0.02239,  \
				            0.01492,  0.00881,  0.00424,  0.00147,  0.00030,  0.00000 ");
			}
			ground_capacitance (capacitance_template_WxS) {
				index_1 (" 0.4000, 0.5000, 0.8000, 0.9000, 1.5000, 1.6000 ");
				index_2 (" 0.4000, 0.5000, 0.6000, 0.9000, 1.3500, 1.5000, 2.0250, 3.0375,  \
				           4.5563, 6.8344, 10.2516, 15.3773, 1537.7344 ");
				values  ("  0.01206,  0.01316,  0.01418,  0.01691,  0.02035,  0.02137,  0.02465,  0.02998,  \
				            0.03610,  0.04200,  0.04620,  0.04796,  0.04848,  0.01308,  0.01411,  0.01508,  \
				            0.01771,  0.02111,  0.02214,  0.02546,  0.03092,  0.03720,  0.04327,  0.04760,  \
				            0.04941,  0.04994,  0.01572,  0.01664,  0.01752,  0.02001,  0.02340,  0.02446,  \
				            0.02791,  0.03367,  0.04036,  0.04683,  0.05145,  0.05340,  0.05397,  0.01653,  \
				            0.01743,  0.01830,  0.02077,  0.02418,  0.02524,  0.02874,  0.03459,  0.04139,  \
				            0.04797,  0.05267,  0.05465,  0.05523,  0.02127,  0.02214,  0.02299,  0.02547,  \
				            0.02899,  0.03011,  0.03381,  0.04006,  0.04736,  0.05443,  0.05949,  0.06163,  \
				            0.06225,  0.02207,  0.02294,  0.02379,  0.02628,  0.02981,  0.03094,  0.03467,  \
				            0.04097,  0.04834,  0.05547,  0.06057,  0.06274,  0.06336 ");
			}
		}

		capacitance () {
			top_plane: AIR;
			bottom_plane: metal7;
			lateral_capacitance (capacitance_template_WxS) {
				index_1 (" 0.4000, 0.5000, 0.8000, 0.9000, 1.5000, 1.6000 ");
				index_2 (" 0.4000, 0.5000, 0.6000, 0.9000, 1.3500, 1.5000, 2.0250, 3.0375,  \
				           4.5563, 6.8344, 10.2516, 15.3773, 1537.7344 ");
				values  ("  0.06381,  0.05246,  0.04450,  0.03044,  0.02007,  0.01787,  0.01253,  0.00733,  \
				            0.00403,  0.00211,  0.00104,  0.00045,  0.00000,  0.06481,  0.05336,  0.04532,  \
				            0.03110,  0.02060,  0.01837,  0.01294,  0.00763,  0.00424,  0.00224,  0.00111,  \
				            0.00048,  0.00000,  0.06696,  0.05534,  0.04716,  0.03265,  0.02188,  0.01958,  \
				            0.01398,  0.00842,  0.00478,  0.00258,  0.00130,  0.00056,  0.00000,  0.06753,  \
				            0.05587,  0.04766,  0.03308,  0.02225,  0.01994,  0.01429,  0.00866,  0.00495,  \
				            0.00269,  0.00136,  0.00059,  0.00000,  0.07010,  0.05831,  0.05001,  0.03518,  \
				            0.02410,  0.02172,  0.01585,  0.00992,  0.00587,  0.00329,  0.00170,  0.00075,  \
				            0.00000,  0.07044,  0.05863,  0.05032,  0.03547,  0.02436,  0.02197,  0.01608,  \
				            0.01011,  0.00601,  0.00338,  0.00176,  0.00077,  0.00000 ");
			}
			ground_capacitance (capacitance_template_WxS) {
				index_1 (" 0.4000, 0.5000, 0.8000, 0.9000, 1.5000, 1.6000 ");
				index_2 (" 0.4000, 0.5000, 0.6000, 0.9000, 1.3500, 1.5000, 2.0250, 3.0375,  \
				           4.5563, 6.8344, 10.2516, 15.3773, 1537.7344 ");
				values  ("  0.02565,  0.02821,  0.03061,  0.03713,  0.04497,  0.04713,  0.05326,  0.06070,  \
				            0.06623,  0.06975,  0.07182,  0.07279,  0.07370,  0.02855,  0.03109,  0.03348,  \
				            0.03997,  0.04780,  0.04997,  0.05612,  0.06366,  0.06932,  0.07298,  0.07515,  \
				            0.07619,  0.07716,  0.03715,  0.03964,  0.04199,  0.04839,  0.05616,  0.05833,  \
				            0.06453,  0.07226,  0.07824,  0.08225,  0.08471,  0.08594,  0.08709,  0.03999,  \
				            0.04246,  0.04480,  0.05117,  0.05892,  0.06109,  0.06729,  0.07508,  0.08115,  \
				            0.08526,  0.08781,  0.08910,  0.09031,  0.05674,  0.05914,  0.06142,  0.06762,  \
				            0.07525,  0.07740,  0.08363,  0.09165,  0.09817,  0.10280,  0.10583,  0.10748,  \
				            0.10900,  0.05949,  0.06188,  0.06415,  0.07033,  0.07794,  0.08009,  0.08633,  \
				            0.09438,  0.10095,  0.10567,  0.10876,  0.11047,  0.11204 ");
			}
		}

		capacitance () {
			top_plane: AIR;
			bottom_plane: metal6;
			lateral_capacitance (capacitance_template_WxS) {
				index_1 (" 0.4000, 0.5000, 0.8000, 0.9000, 1.5000, 1.6000 ");
				index_2 (" 0.4000, 0.5000, 0.6000, 0.9000, 1.3500, 1.5000, 2.0250, 3.0375,  \
				           4.5563, 6.8344, 10.2516, 15.3773, 1537.7344 ");
				values  ("  0.06776,  0.05663,  0.04885,  0.03513,  0.02489,  0.02267,  0.01709,  0.01116,  \
				            0.00684,  0.00391,  0.00206,  0.00095,  0.00000,  0.06907,  0.05781,  0.04993,  \
				            0.03599,  0.02557,  0.02330,  0.01761,  0.01154,  0.00710,  0.00408,  0.00216,  \
				            0.00099,  0.00000,  0.07196,  0.06045,  0.05237,  0.03799,  0.02717,  0.02480,  \
				            0.01886,  0.01250,  0.00780,  0.00454,  0.00244,  0.00113,  0.00000,  0.07272,  \
				            0.06115,  0.05302,  0.03854,  0.02761,  0.02522,  0.01922,  0.01278,  0.00800,  \
				            0.00468,  0.00252,  0.00117,  0.00000,  0.07597,  0.06420,  0.05590,  0.04102,  \
				            0.02972,  0.02723,  0.02096,  0.01419,  0.00907,  0.00543,  0.00297,  0.00139,  \
				            0.00000,  0.07637,  0.06458,  0.05626,  0.04134,  0.03000,  0.02750,  0.02121,  \
				            0.01439,  0.00923,  0.00554,  0.00304,  0.00143,  0.00000 ");
			}
			ground_capacitance (capacitance_template_WxS) {
				index_1 (" 0.4000, 0.5000, 0.8000, 0.9000, 1.5000, 1.6000 ");
				index_2 (" 0.4000, 0.5000, 0.6000, 0.9000, 1.3500, 1.5000, 2.0250, 3.0375,  \
				           4.5563, 6.8344, 10.2516, 15.3773, 1537.7344 ");
				values  ("  0.01359,  0.01495,  0.01624,  0.01983,  0.02449,  0.02588,  0.03016,  0.03635,  \
				            0.04219,  0.04690,  0.05022,  0.05218,  0.05408,  0.01495,  0.01627,  0.01753,  \
				            0.02108,  0.02572,  0.02711,  0.03140,  0.03765,  0.04359,  0.04843,  0.05186,  \
				            0.05393,  0.05592,  0.01882,  0.02008,  0.02130,  0.02475,  0.02934,  0.03072,  \
				            0.03502,  0.04138,  0.04756,  0.05271,  0.05646,  0.05878,  0.06103,  0.02008,  \
				            0.02132,  0.02253,  0.02596,  0.03053,  0.03191,  0.03621,  0.04259,  0.04883,  \
				            0.05407,  0.05791,  0.06031,  0.06264,  0.02741,  0.02860,  0.02976,  0.03308,  \
				            0.03755,  0.03891,  0.04319,  0.04966,  0.05617,  0.06184,  0.06616,  0.06897,  \
				            0.07175,  0.02861,  0.02979,  0.03095,  0.03424,  0.03870,  0.04006,  0.04433,  \
				            0.05081,  0.05736,  0.06309,  0.06748,  0.07035,  0.07320 ");
			}
		}

		capacitance () {
			top_plane: AIR;
			bottom_plane: metal5;
			lateral_capacitance (capacitance_template_WxS) {
				index_1 (" 0.4000, 0.5000, 0.8000, 0.9000, 1.5000, 1.6000 ");
				index_2 (" 0.4000, 0.5000, 0.6000, 0.9000, 1.3500, 1.5000, 2.0250, 3.0375,  \
				           4.5563, 6.8344, 10.2516, 15.3773, 1537.7344 ");
				values  ("  0.06863,  0.05756,  0.04984,  0.03625,  0.02616,  0.02397,  0.01846,  0.01250,  \
				            0.00799,  0.00476,  0.00260,  0.00124,  0.00000,  0.07001,  0.05881,  0.05098,  \
				            0.03718,  0.02689,  0.02465,  0.01901,  0.01291,  0.00828,  0.00495,  0.00272,  \
				            0.00129,  0.00000,  0.07310,  0.06165,  0.05361,  0.03935,  0.02864,  0.02629,  \
				            0.02038,  0.01396,  0.00904,  0.00547,  0.00303,  0.00145,  0.00000,  0.07392,  \
				            0.06240,  0.05432,  0.03994,  0.02912,  0.02675,  0.02077,  0.01426,  0.00927,  \
				            0.00562,  0.00313,  0.00150,  0.00000,  0.07750,  0.06575,  0.05748,  0.04267,  \
				            0.03141,  0.02893,  0.02265,  0.01576,  0.01041,  0.00643,  0.00363,  0.00176,  \
				            0.00000,  0.07793,  0.06617,  0.05788,  0.04302,  0.03172,  0.02922,  0.02291,  \
				            0.01598,  0.01058,  0.00655,  0.00371,  0.00180,  0.00000 ");
			}
			ground_capacitance (capacitance_template_WxS) {
				index_1 (" 0.4000, 0.5000, 0.8000, 0.9000, 1.5000, 1.6000 ");
				index_2 (" 0.4000, 0.5000, 0.6000, 0.9000, 1.3500, 1.5000, 2.0250, 3.0375,  \
				           4.5563, 6.8344, 10.2516, 15.3773, 1537.7344 ");
				values  ("  0.01129,  0.01243,  0.01352,  0.01652,  0.02043,  0.02159,  0.02523,  0.03067,  \
				            0.03615,  0.04097,  0.04467,  0.04707,  0.04953,  0.01242,  0.01352,  0.01457,  \
				            0.01751,  0.02138,  0.02254,  0.02617,  0.03165,  0.03722,  0.04216,  0.04599,  \
				            0.04850,  0.05107,  0.01556,  0.01658,  0.01758,  0.02039,  0.02416,  0.02531,  \
				            0.02894,  0.03450,  0.04027,  0.04551,  0.04965,  0.05243,  0.05530,  0.01655,  \
				            0.01756,  0.01854,  0.02133,  0.02508,  0.02622,  0.02984,  0.03542,  0.04125,  \
				            0.04657,  0.05080,  0.05366,  0.05663,  0.02226,  0.02321,  0.02414,  0.02680,  \
				            0.03044,  0.03156,  0.03516,  0.04080,  0.04687,  0.05258,  0.05727,  0.06056,  \
				            0.06404,  0.02318,  0.02412,  0.02505,  0.02769,  0.03132,  0.03244,  0.03603,  \
				            0.04168,  0.04777,  0.05354,  0.05830,  0.06166,  0.06521 ");
			}
		}

		capacitance () {
			top_plane: AIR;
			bottom_plane: metal4;
			lateral_capacitance (capacitance_template_WxS) {
				index_1 (" 0.4000, 0.5000, 0.8000, 0.9000, 1.5000, 1.6000 ");
				index_2 (" 0.4000, 0.5000, 0.6000, 0.9000, 1.3500, 1.5000, 2.0250, 3.0375,  \
				           4.5563, 6.8344, 10.2516, 15.3773, 1537.7344 ");
				values  ("  0.06924,  0.05821,  0.05052,  0.03704,  0.02706,  0.02489,  0.01945,  0.01353,  \
				            0.00894,  0.00553,  0.00313,  0.00153,  0.00000,  0.07066,  0.05950,  0.05171,  \
				            0.03800,  0.02783,  0.02561,  0.02004,  0.01398,  0.00926,  0.00574,  0.00326,  \
				            0.00160,  0.00000,  0.07388,  0.06246,  0.05446,  0.04029,  0.02968,  0.02736,  \
				            0.02151,  0.01510,  0.01008,  0.00631,  0.00361,  0.00178,  0.00000,  0.07475,  \
				            0.06326,  0.05521,  0.04092,  0.03020,  0.02785,  0.02192,  0.01542,  0.01033,  \
				            0.00647,  0.00371,  0.00184,  0.00000,  0.07855,  0.06684,  0.05859,  0.04384,  \
				            0.03265,  0.03018,  0.02393,  0.01702,  0.01155,  0.00734,  0.00427,  0.00213,  \
				            0.00000,  0.07902,  0.06729,  0.05902,  0.04422,  0.03298,  0.03050,  0.02421,  \
				            0.01725,  0.01173,  0.00747,  0.00435,  0.00217,  0.00000 ");
			}
			ground_capacitance (capacitance_template_WxS) {
				index_1 (" 0.4000, 0.5000, 0.8000, 0.9000, 1.5000, 1.6000 ");
				index_2 (" 0.4000, 0.5000, 0.6000, 0.9000, 1.3500, 1.5000, 2.0250, 3.0375,  \
				           4.5563, 6.8344, 10.2516, 15.3773, 1537.7344 ");
				values  ("  0.00974,  0.01075,  0.01170,  0.01434,  0.01775,  0.01877,  0.02195,  0.02678,  \
				            0.03184,  0.03658,  0.04052,  0.04328,  0.04630,  0.01073,  0.01170,  0.01262,  \
				            0.01518,  0.01854,  0.01955,  0.02271,  0.02757,  0.03270,  0.03756,  0.04162,  \
				            0.04449,  0.04764,  0.01344,  0.01432,  0.01518,  0.01759,  0.02083,  0.02181,  \
				            0.02494,  0.02985,  0.03515,  0.04029,  0.04466,  0.04781,  0.05131,  0.01428,  \
				            0.01515,  0.01599,  0.01836,  0.02157,  0.02255,  0.02567,  0.03058,  0.03594,  \
				            0.04115,  0.04561,  0.04885,  0.05245,  0.01902,  0.01982,  0.02060,  0.02283,  \
				            0.02590,  0.02686,  0.02994,  0.03489,  0.04045,  0.04602,  0.05093,  0.05461,  \
				            0.05878,  0.01977,  0.02056,  0.02133,  0.02355,  0.02661,  0.02756,  0.03063,  \
				            0.03559,  0.04118,  0.04680,  0.05177,  0.05552,  0.05977 ");
			}
		}

		capacitance () {
			top_plane: AIR;
			bottom_plane: SUBSTRATE;
			lateral_capacitance (capacitance_template_WxS) {
				index_1 (" 0.4000, 0.5000, 0.8000, 0.9000, 1.5000, 1.6000 ");
				index_2 (" 0.4000, 0.5000, 0.6000, 0.9000, 1.3500, 1.5000, 2.0250, 3.0375,  \
				           4.5563, 6.8344, 10.2516, 15.3773, 1537.7344 ");
				values  ("  0.07015,  0.05919,  0.05156,  0.03822,  0.02842,  0.02630,  0.02099,  0.01521,  \
				            0.01063,  0.00702,  0.00426,  0.00225,  0.00000,  0.07164,  0.06054,  0.05281,  \
				            0.03924,  0.02924,  0.02708,  0.02164,  0.01571,  0.01100,  0.00728,  0.00443,  \
				            0.00234,  0.00000,  0.07504,  0.06368,  0.05573,  0.04170,  0.03125,  0.02898,  \
				            0.02326,  0.01697,  0.01194,  0.00794,  0.00485,  0.00257,  0.00000,  0.07596,  \
				            0.06454,  0.05654,  0.04239,  0.03182,  0.02952,  0.02372,  0.01733,  0.01221,  \
				            0.00814,  0.00498,  0.00264,  0.00000,  0.08010,  0.06844,  0.06024,  0.04561,  \
				            0.03456,  0.03213,  0.02597,  0.01914,  0.01360,  0.00914,  0.00563,  0.00301,  \
				            0.00000,  0.08063,  0.06894,  0.06072,  0.04604,  0.03493,  0.03248,  0.02628,  \
				            0.01939,  0.01380,  0.00928,  0.00573,  0.00306,  0.00000 ");
			}
			ground_capacitance (capacitance_template_WxS) {
				index_1 (" 0.4000, 0.5000, 0.8000, 0.9000, 1.5000, 1.6000 ");
				index_2 (" 0.4000, 0.5000, 0.6000, 0.9000, 1.3500, 1.5000, 2.0250, 3.0375,  \
				           4.5563, 6.8344, 10.2516, 15.3773, 1537.7344 ");
				values  ("  0.00743,  0.00824,  0.00901,  0.01115,  0.01390,  0.01472,  0.01726,  0.02113,  \
				            0.02531,  0.02958,  0.03363,  0.03694,  0.04126,  0.00824,  0.00902,  0.00976,  \
				            0.01182,  0.01450,  0.01530,  0.01780,  0.02166,  0.02588,  0.03025,  0.03441,  \
				            0.03784,  0.04232,  0.01041,  0.01111,  0.01178,  0.01367,  0.01618,  0.01694,  \
				            0.01936,  0.02318,  0.02751,  0.03210,  0.03655,  0.04028,  0.04519,  0.01107,  \
				            0.01175,  0.01240,  0.01425,  0.01671,  0.01747,  0.01986,  0.02368,  0.02803,  \
				            0.03269,  0.03722,  0.04103,  0.04608,  0.01462,  0.01522,  0.01580,  0.01746,  \
				            0.01974,  0.02045,  0.02275,  0.02653,  0.03103,  0.03598,  0.04093,  0.04519,  \
				            0.05092,  0.01516,  0.01575,  0.01632,  0.01796,  0.02022,  0.02093,  0.02321,  \
				            0.02700,  0.03151,  0.03651,  0.04151,  0.04583,  0.05167 ");
			}
		}
	}

	layer (metal7) {
		resistance: 0.075000

		capacitance () {
			top_plane: metal8;
			bottom_plane: metal6;
			lateral_capacitance (capacitance_template_WxS) {
				index_1 (" 0.4000, 0.5000, 0.8000, 0.9000, 1.5000, 1.6000 ");
				index_2 (" 0.4000, 0.5000, 0.6000, 0.9000, 1.3500, 1.5000, 2.0250, 3.0375,  \
				           4.5563, 6.8344, 10.2516, 15.3773, 1537.7344 ");
				values  ("  0.05185,  0.04018,  0.03202,  0.01780,  0.00815,  0.00635,  0.00269,  0.00054,  \
				            0.00005,  0.00000,  0.00000,  0.00000,  0.00000,  0.05209,  0.04038,  0.03218,  \
				            0.01789,  0.00820,  0.00639,  0.00271,  0.00054,  0.00005,  0.00000,  0.00000,  \
				            0.00000,  0.00000,  0.05240,  0.04063,  0.03239,  0.01801,  0.00826,  0.00643,  \
				            0.00273,  0.00055,  0.00005,  0.00000,  0.00000,  0.00000,  0.00000,  0.05246,  \
				            0.04067,  0.03242,  0.01803,  0.00827,  0.00644,  0.00273,  0.00055,  0.00005,  \
				            0.00000,  0.00000,  0.00000,  0.00000,  0.05255,  0.04075,  0.03248,  0.01807,  \
				            0.00828,  0.00646,  0.00274,  0.00055,  0.00005,  0.00000,  0.00000,  0.00000,  \
				            0.00000,  0.05255,  0.04074,  0.03248,  0.01807,  0.00828,  0.00646,  0.00274,  \
				            0.00055,  0.00005,  0.00000,  0.00000,  0.00000,  0.00000 ");
			}
			ground_capacitance (capacitance_template_WxS) {
				index_1 (" 0.4000, 0.5000, 0.8000, 0.9000, 1.5000, 1.6000 ");
				index_2 (" 0.4000, 0.5000, 0.6000, 0.9000, 1.3500, 1.5000, 2.0250, 3.0375,  \
				           4.5563, 6.8344, 10.2516, 15.3773, 1537.7344 ");
				values  ("  0.07642,  0.08310,  0.08902,  0.10356,  0.11751,  0.12060,  0.12729,  0.13174,  \
				            0.13275,  0.13284,  0.13282,  0.13255,  0.13256,  0.08664,  0.09335,  0.09930,  \
				            0.11389,  0.12791,  0.13101,  0.13774,  0.14222,  0.14323,  0.14332,  0.14330,  \
				            0.14303,  0.14303,  0.11745,  0.12420,  0.13019,  0.14488,  0.15898,  0.16210,  \
				            0.16888,  0.17338,  0.17441,  0.17450,  0.17448,  0.17420,  0.17421,  0.12776,  \
				            0.13452,  0.14051,  0.15521,  0.16932,  0.17245,  0.17923,  0.18375,  0.18477,  \
				            0.18486,  0.18485,  0.18457,  0.18457,  0.18970,  0.19647,  0.20248,  0.21720,  \
				            0.23134,  0.23448,  0.24127,  0.24579,  0.24682,  0.24691,  0.24690,  0.24661,  \
				            0.24662,  0.20002,  0.20679,  0.21279,  0.22752,  0.24165,  0.24479,  0.25158,  \
				            0.25611,  0.25714,  0.25723,  0.25721,  0.25693,  0.25694 ");
			}
		}

		capacitance () {
			top_plane: metal8;
			bottom_plane: metal5;
			lateral_capacitance (capacitance_template_WxS) {
				index_1 (" 0.4000, 0.5000, 0.8000, 0.9000, 1.5000, 1.6000 ");
				index_2 (" 0.4000, 0.5000, 0.6000, 0.9000, 1.3500, 1.5000, 2.0250, 3.0375,  \
				           4.5563, 6.8344, 10.2516, 15.3773, 1537.7344 ");
				values  ("  0.05836,  0.04664,  0.03835,  0.02350,  0.01258,  0.01034,  0.00530,  0.00151,  \
				            0.00024,  0.00002,  0.00000,  0.00000,  0.00000,  0.05884,  0.04701,  0.03866,  \
				            0.02368,  0.01268,  0.01042,  0.00534,  0.00152,  0.00024,  0.00002,  0.00000,  \
				            0.00000,  0.00000,  0.05950,  0.04754,  0.03909,  0.02394,  0.01281,  0.01053,  \
				            0.00539,  0.00154,  0.00024,  0.00002,  0.00000,  0.00000,  0.00000,  0.05960,  \
				            0.04763,  0.03916,  0.02398,  0.01283,  0.01055,  0.00540,  0.00154,  0.00025,  \
				            0.00002,  0.00000,  0.00000,  0.00000,  0.05981,  0.04779,  0.03929,  0.02406,  \
				            0.01287,  0.01058,  0.00542,  0.00154,  0.00025,  0.00002,  0.00000,  0.00000,  \
				            0.00000,  0.05981,  0.04779,  0.03929,  0.02406,  0.01287,  0.01058,  0.00542,  \
				            0.00154,  0.00025,  0.00002,  0.00000,  0.00000,  0.00000 ");
			}
			ground_capacitance (capacitance_template_WxS) {
				index_1 (" 0.4000, 0.5000, 0.8000, 0.9000, 1.5000, 1.6000 ");
				index_2 (" 0.4000, 0.5000, 0.6000, 0.9000, 1.3500, 1.5000, 2.0250, 3.0375,  \
				           4.5563, 6.8344, 10.2516, 15.3773, 1537.7344 ");
				values  ("  0.04148,  0.04573,  0.04976,  0.06068,  0.07330,  0.07655,  0.08476,  0.09195,  \
				            0.09454,  0.09501,  0.09504,  0.09477,  0.09477,  0.04652,  0.05082,  0.05490,  \
				            0.06593,  0.07865,  0.08192,  0.09020,  0.09743,  0.10005,  0.10052,  0.10055,  \
				            0.10028,  0.10028,  0.06198,  0.06636,  0.07051,  0.08169,  0.09456,  0.09787,  \
				            0.10623,  0.11354,  0.11619,  0.11667,  0.11669,  0.11642,  0.11642,  0.06720,  \
				            0.07160,  0.07576,  0.08696,  0.09985,  0.10317,  0.11154,  0.11886,  0.12151,  \
				            0.12199,  0.12202,  0.12174,  0.12175,  0.09873,  0.10315,  0.10733,  0.11858,  \
				            0.13152,  0.13485,  0.14325,  0.15059,  0.15325,  0.15373,  0.15376,  0.15348,  \
				            0.15348,  0.10399,  0.10841,  0.11259,  0.12385,  0.13679,  0.14011,  0.14851,  \
				            0.15586,  0.15851,  0.15899,  0.15902,  0.15874,  0.15875 ");
			}
		}

		capacitance () {
			top_plane: metal8;
			bottom_plane: metal4;
			lateral_capacitance (capacitance_template_WxS) {
				index_1 (" 0.4000, 0.5000, 0.8000, 0.9000, 1.5000, 1.6000 ");
				index_2 (" 0.4000, 0.5000, 0.6000, 0.9000, 1.3500, 1.5000, 2.0250, 3.0375,  \
				           4.5563, 6.8344, 10.2516, 15.3773, 1537.7344 ");
				values  ("  0.06051,  0.04891,  0.04073,  0.02605,  0.01505,  0.01272,  0.00723,  0.00255,  \
				            0.00056,  0.00006,  0.00000,  0.00000,  0.00000,  0.06120,  0.04949,  0.04122,  \
				            0.02637,  0.01524,  0.01288,  0.00732,  0.00259,  0.00057,  0.00006,  0.00000,  \
				            0.00000,  0.00000,  0.06235,  0.05046,  0.04205,  0.02692,  0.01556,  0.01315,  \
				            0.00748,  0.00264,  0.00058,  0.00006,  0.00000,  0.00000,  0.00000,  0.06258,  \
				            0.05066,  0.04222,  0.02703,  0.01563,  0.01321,  0.00751,  0.00265,  0.00058,  \
				            0.00006,  0.00000,  0.00000,  0.00000,  0.06320,  0.05118,  0.04267,  0.02732,  \
				            0.01580,  0.01336,  0.00760,  0.00269,  0.00059,  0.00007,  0.00000,  0.00000,  \
				            0.00000,  0.06322,  0.05120,  0.04269,  0.02734,  0.01581,  0.01337,  0.00761,  \
				            0.00269,  0.00059,  0.00007,  0.00000,  0.00000,  0.00000 ");
			}
			ground_capacitance (capacitance_template_WxS) {
				index_1 (" 0.4000, 0.5000, 0.8000, 0.9000, 1.5000, 1.6000 ");
				index_2 (" 0.4000, 0.5000, 0.6000, 0.9000, 1.3500, 1.5000, 2.0250, 3.0375,  \
				           4.5563, 6.8344, 10.2516, 15.3773, 1537.7344 ");
				values  ("  0.03447,  0.03792,  0.04121,  0.05028,  0.06133,  0.06434,  0.07248,  0.08082,  \
				            0.08477,  0.08581,  0.08593,  0.08568,  0.08568,  0.03840,  0.04189,  0.04523,  \
				            0.05442,  0.06559,  0.06864,  0.07687,  0.08531,  0.08932,  0.09037,  0.09049,  \
				            0.09024,  0.09024,  0.05054,  0.05412,  0.05753,  0.06692,  0.07833,  0.08143,  \
				            0.08983,  0.09844,  0.10254,  0.10362,  0.10375,  0.10348,  0.10349,  0.05467,  \
				            0.05826,  0.06169,  0.07112,  0.08257,  0.08568,  0.09412,  0.10277,  0.10688,  \
				            0.10796,  0.10809,  0.10783,  0.10783,  0.07980,  0.08343,  0.08691,  0.09645,  \
				            0.10802,  0.11117,  0.11969,  0.12844,  0.13260,  0.13370,  0.13383,  0.13356,  \
				            0.13357,  0.08401,  0.08765,  0.09113,  0.10068,  0.11226,  0.11541,  0.12394,  \
				            0.13269,  0.13686,  0.13795,  0.13808,  0.13782,  0.13782 ");
			}
		}

		capacitance () {
			top_plane: metal8;
			bottom_plane: metal3;
			lateral_capacitance (capacitance_template_WxS) {
				index_1 (" 0.4000, 0.5000, 0.8000, 0.9000, 1.5000, 1.6000 ");
				index_2 (" 0.4000, 0.5000, 0.6000, 0.9000, 1.3500, 1.5000, 2.0250, 3.0375,  \
				           4.5563, 6.8344, 10.2516, 15.3773, 1537.7344 ");
				values  ("  0.06124,  0.04971,  0.04159,  0.02704,  0.01612,  0.01379,  0.00820,  0.00320,  \
				            0.00082,  0.00011,  0.00001,  0.00000,  0.00000,  0.06202,  0.05038,  0.04217,  \
				            0.02744,  0.01637,  0.01400,  0.00834,  0.00325,  0.00083,  0.00012,  0.00001,  \
				            0.00000,  0.00000,  0.06344,  0.05160,  0.04323,  0.02818,  0.01683,  0.01441,  \
				            0.00859,  0.00336,  0.00086,  0.00012,  0.00001,  0.00000,  0.00000,  0.06374,  \
				            0.05186,  0.04346,  0.02834,  0.01694,  0.01449,  0.00864,  0.00338,  0.00087,  \
				            0.00012,  0.00001,  0.00000,  0.00000,  0.06467,  0.05267,  0.04417,  0.02885,  \
				            0.01726,  0.01477,  0.00882,  0.00345,  0.00089,  0.00012,  0.00001,  0.00000,  \
				            0.00000,  0.06473,  0.05273,  0.04422,  0.02888,  0.01728,  0.01480,  0.00883,  \
				            0.00346,  0.00089,  0.00012,  0.00001,  0.00000,  0.00000 ");
			}
			ground_capacitance (capacitance_template_WxS) {
				index_1 (" 0.4000, 0.5000, 0.8000, 0.9000, 1.5000, 1.6000 ");
				index_2 (" 0.4000, 0.5000, 0.6000, 0.9000, 1.3500, 1.5000, 2.0250, 3.0375,  \
				           4.5563, 6.8344, 10.2516, 15.3773, 1537.7344 ");
				values  ("  0.03233,  0.03550,  0.03853,  0.04690,  0.05718,  0.06003,  0.06791,  0.07653,  \
				            0.08116,  0.08262,  0.08285,  0.08261,  0.08261,  0.03591,  0.03912,  0.04219,  \
				            0.05065,  0.06107,  0.06395,  0.07194,  0.08068,  0.08539,  0.08688,  0.08711,  \
				            0.08687,  0.08687,  0.04696,  0.05024,  0.05337,  0.06203,  0.07269,  0.07564,  \
				            0.08384,  0.09283,  0.09768,  0.09922,  0.09946,  0.09921,  0.09921,  0.05071,  \
				            0.05401,  0.05716,  0.06586,  0.07657,  0.07954,  0.08778,  0.09682,  0.10170,  \
				            0.10325,  0.10349,  0.10324,  0.10325,  0.07364,  0.07699,  0.08019,  0.08902,  \
				            0.09990,  0.10292,  0.11130,  0.12051,  0.12550,  0.12708,  0.12733,  0.12708,  \
				            0.12708,  0.07750,  0.08085,  0.08405,  0.09289,  0.10379,  0.10681,  0.11520,  \
				            0.12443,  0.12943,  0.13101,  0.13126,  0.13101,  0.13101 ");
			}
		}

		capacitance () {
			top_plane: metal8;
			bottom_plane: SUBSTRATE;
			lateral_capacitance (capacitance_template_WxS) {
				index_1 (" 0.4000, 0.5000, 0.8000, 0.9000, 1.5000, 1.6000 ");
				index_2 (" 0.4000, 0.5000, 0.6000, 0.9000, 1.3500, 1.5000, 2.0250, 3.0375,  \
				           4.5563, 6.8344, 10.2516, 15.3773, 1537.7344 ");
				values  ("  0.06211,  0.05066,  0.04262,  0.02829,  0.01757,  0.01527,  0.00968,  0.00437,  \
				            0.00144,  0.00029,  0.00003,  0.00000,  0.00000,  0.06301,  0.05145,  0.04332,  \
				            0.02880,  0.01792,  0.01558,  0.00989,  0.00448,  0.00147,  0.00030,  0.00003,  \
				            0.00000,  0.00000,  0.06478,  0.05302,  0.04473,  0.02986,  0.01866,  0.01624,  \
				            0.01035,  0.00470,  0.00155,  0.00032,  0.00003,  0.00000,  0.00000,  0.06519,  \
				            0.05339,  0.04506,  0.03011,  0.01884,  0.01640,  0.01046,  0.00476,  0.00157,  \
				            0.00032,  0.00003,  0.00000,  0.00000,  0.06670,  0.05475,  0.04631,  0.03108,  \
				            0.01953,  0.01702,  0.01089,  0.00498,  0.00165,  0.00034,  0.00003,  0.00000,  \
				            0.00000,  0.06684,  0.05489,  0.04643,  0.03118,  0.01960,  0.01708,  0.01094,  \
				            0.00500,  0.00166,  0.00034,  0.00003,  0.00000,  0.00000 ");
			}
			ground_capacitance (capacitance_template_WxS) {
				index_1 (" 0.4000, 0.5000, 0.8000, 0.9000, 1.5000, 1.6000 ");
				index_2 (" 0.4000, 0.5000, 0.6000, 0.9000, 1.3500, 1.5000, 2.0250, 3.0375,  \
				           4.5563, 6.8344, 10.2516, 15.3773, 1537.7344 ");
				values  ("  0.02994,  0.03281,  0.03554,  0.04302,  0.05224,  0.05482,  0.06213,  0.07074,  \
				            0.07624,  0.07856,  0.07911,  0.07892,  0.07893,  0.03314,  0.03603,  0.03877,  \
				            0.04633,  0.05565,  0.05827,  0.06569,  0.07447,  0.08009,  0.08246,  0.08303,  \
				            0.08284,  0.08285,  0.04294,  0.04586,  0.04865,  0.05634,  0.06588,  0.06857,  \
				            0.07623,  0.08535,  0.09124,  0.09374,  0.09434,  0.09415,  0.09415,  0.04625,  \
				            0.04918,  0.05198,  0.05970,  0.06930,  0.07201,  0.07972,  0.08893,  0.09488,  \
				            0.09742,  0.09802,  0.09784,  0.09784,  0.06646,  0.06943,  0.07227,  0.08012,  \
				            0.08992,  0.09269,  0.10063,  0.11016,  0.11637,  0.11903,  0.11967,  0.11948,  \
				            0.11948,  0.06987,  0.07284,  0.07568,  0.08354,  0.09336,  0.09614,  0.10410,  \
				            0.11367,  0.11991,  0.12258,  0.12322,  0.12303,  0.12304 ");
			}
		}

		capacitance () {
			top_plane: metal9;
			bottom_plane: metal6;
			lateral_capacitance (capacitance_template_WxS) {
				index_1 (" 0.4000, 0.5000, 0.8000, 0.9000, 1.5000, 1.6000 ");
				index_2 (" 0.4000, 0.5000, 0.6000, 0.9000, 1.3500, 1.5000, 2.0250, 3.0375,  \
				           4.5563, 6.8344, 10.2516, 15.3773, 1537.7344 ");
				values  ("  0.05551,  0.04411,  0.03617,  0.02233,  0.01255,  0.01057,  0.00604,  0.00227,  \
				            0.00058,  0.00008,  0.00000,  0.00000,  0.00000,  0.05618,  0.04471,  0.03671,  \
				            0.02274,  0.01283,  0.01081,  0.00619,  0.00234,  0.00060,  0.00009,  0.00001,  \
				            0.00000,  0.00000,  0.05757,  0.04597,  0.03785,  0.02361,  0.01342,  0.01134,  \
				            0.00654,  0.00248,  0.00064,  0.00009,  0.00001,  0.00000,  0.00000,  0.05792,  \
				            0.04628,  0.03813,  0.02382,  0.01357,  0.01147,  0.00662,  0.00252,  0.00065,  \
				            0.00009,  0.00001,  0.00000,  0.00000,  0.05919,  0.04744,  0.03919,  0.02463,  \
				            0.01413,  0.01196,  0.00694,  0.00266,  0.00069,  0.00010,  0.00001,  0.00000,  \
				            0.00000,  0.05931,  0.04755,  0.03929,  0.02471,  0.01418,  0.01201,  0.00697,  \
				            0.00267,  0.00069,  0.00010,  0.00001,  0.00000,  0.00000 ");
			}
			ground_capacitance (capacitance_template_WxS) {
				index_1 (" 0.4000, 0.5000, 0.8000, 0.9000, 1.5000, 1.6000 ");
				index_2 (" 0.4000, 0.5000, 0.6000, 0.9000, 1.3500, 1.5000, 2.0250, 3.0375,  \
				           4.5563, 6.8344, 10.2516, 15.3773, 1537.7344 ");
				values  ("  0.06487,  0.07017,  0.07481,  0.08624,  0.09792,  0.10080,  0.10800,  0.11497,  \
				            0.11832,  0.11934,  0.11949,  0.11924,  0.11924,  0.07318,  0.07848,  0.08313,  \
				            0.09461,  0.10640,  0.10931,  0.11664,  0.12377,  0.12721,  0.12826,  0.12842,  \
				            0.12817,  0.12817,  0.09818,  0.10349,  0.10817,  0.11977,  0.13181,  0.13481,  \
				            0.14240,  0.14987,  0.15352,  0.15464,  0.15481,  0.15455,  0.15456,  0.10655,  \
				            0.11187,  0.11656,  0.12819,  0.14029,  0.14331,  0.15097,  0.15852,  0.16223,  \
				            0.16337,  0.16354,  0.16328,  0.16329,  0.15705,  0.16241,  0.16714,  0.17891,  \
				            0.19126,  0.19436,  0.20228,  0.21015,  0.21405,  0.21526,  0.21544,  0.21518,  \
				            0.21519,  0.16550,  0.17086,  0.17559,  0.18739,  0.19976,  0.20287,  0.21081,  \
				            0.21871,  0.22263,  0.22385,  0.22403,  0.22377,  0.22378 ");
			}
		}

		capacitance () {
			top_plane: metal9;
			bottom_plane: metal5;
			lateral_capacitance (capacitance_template_WxS) {
				index_1 (" 0.4000, 0.5000, 0.8000, 0.9000, 1.5000, 1.6000 ");
				index_2 (" 0.4000, 0.5000, 0.6000, 0.9000, 1.3500, 1.5000, 2.0250, 3.0375,  \
				           4.5563, 6.8344, 10.2516, 15.3773, 1537.7344 ");
				values  ("  0.06213,  0.05067,  0.04261,  0.02822,  0.01742,  0.01510,  0.00945,  0.00413,  \
				            0.00128,  0.00023,  0.00002,  0.00000,  0.00000,  0.06302,  0.05144,  0.04329,  \
				            0.02871,  0.01774,  0.01538,  0.00964,  0.00422,  0.00131,  0.00024,  0.00002,  \
				            0.00000,  0.00000,  0.06472,  0.05294,  0.04462,  0.02969,  0.01840,  0.01597,  \
				            0.01003,  0.00441,  0.00137,  0.00025,  0.00002,  0.00000,  0.00000,  0.06511,  \
				            0.05328,  0.04493,  0.02992,  0.01856,  0.01611,  0.01013,  0.00445,  0.00138,  \
				            0.00025,  0.00002,  0.00000,  0.00000,  0.06645,  0.05449,  0.04602,  0.03074,  \
				            0.01913,  0.01661,  0.01047,  0.00461,  0.00144,  0.00026,  0.00002,  0.00000,  \
				            0.00000,  0.06657,  0.05459,  0.04612,  0.03082,  0.01918,  0.01666,  0.01050,  \
				            0.00463,  0.00144,  0.00027,  0.00002,  0.00000,  0.00000 ");
			}
			ground_capacitance (capacitance_template_WxS) {
				index_1 (" 0.4000, 0.5000, 0.8000, 0.9000, 1.5000, 1.6000 ");
				index_2 (" 0.4000, 0.5000, 0.6000, 0.9000, 1.3500, 1.5000, 2.0250, 3.0375,  \
				           4.5563, 6.8344, 10.2516, 15.3773, 1537.7344 ");
				values  ("  0.02964,  0.03250,  0.03522,  0.04274,  0.05209,  0.05471,  0.06217,  0.07089,  \
				            0.07628,  0.07840,  0.07886,  0.07865,  0.07865,  0.03281,  0.03568,  0.03843,  \
				            0.04603,  0.05550,  0.05816,  0.06573,  0.07460,  0.08011,  0.08228,  0.08274,  \
				            0.08253,  0.08254,  0.04253,  0.04545,  0.04826,  0.05602,  0.06572,  0.06846,  \
				            0.07626,  0.08545,  0.09119,  0.09346,  0.09394,  0.09373,  0.09374,  0.04583,  \
				            0.04877,  0.05158,  0.05938,  0.06914,  0.07189,  0.07975,  0.08902,  0.09481,  \
				            0.09710,  0.09759,  0.09738,  0.09739,  0.06600,  0.06899,  0.07185,  0.07978,  \
				            0.08974,  0.09256,  0.10061,  0.11016,  0.11616,  0.11854,  0.11905,  0.11884,  \
				            0.11884,  0.06940,  0.07239,  0.07526,  0.08321,  0.09318,  0.09601,  0.10408,  \
				            0.11366,  0.11967,  0.12207,  0.12258,  0.12236,  0.12237 ");
			}
		}

		capacitance () {
			top_plane: metal9;
			bottom_plane: metal4;
			lateral_capacitance (capacitance_template_WxS) {
				index_1 (" 0.4000, 0.5000, 0.8000, 0.9000, 1.5000, 1.6000 ");
				index_2 (" 0.4000, 0.5000, 0.6000, 0.9000, 1.3500, 1.5000, 2.0250, 3.0375,  \
				           4.5563, 6.8344, 10.2516, 15.3773, 1537.7344 ");
				values  ("  0.06438,  0.05305,  0.04509,  0.03089,  0.02008,  0.01770,  0.01177,  0.00574,  \
				            0.00206,  0.00046,  0.00005,  0.00000,  0.00000,  0.06547,  0.05401,  0.04594,  \
				            0.03150,  0.02049,  0.01806,  0.01201,  0.00586,  0.00210,  0.00047,  0.00005,  \
				            0.00000,  0.00000,  0.06765,  0.05592,  0.04765,  0.03275,  0.02132,  0.01880,  \
				            0.01251,  0.00610,  0.00219,  0.00049,  0.00006,  0.00000,  0.00000,  0.06815,  \
				            0.05637,  0.04805,  0.03304,  0.02152,  0.01898,  0.01263,  0.00616,  0.00221,  \
				            0.00050,  0.00006,  0.00000,  0.00000,  0.06987,  0.05790,  0.04942,  0.03406,  \
				            0.02221,  0.01959,  0.01304,  0.00637,  0.00229,  0.00052,  0.00006,  0.00000,  \
				            0.00000,  0.07001,  0.05803,  0.04954,  0.03415,  0.02227,  0.01965,  0.01308,  \
				            0.00639,  0.00230,  0.00052,  0.00006,  0.00000,  0.00000 ");
			}
			ground_capacitance (capacitance_template_WxS) {
				index_1 (" 0.4000, 0.5000, 0.8000, 0.9000, 1.5000, 1.6000 ");
				index_2 (" 0.4000, 0.5000, 0.6000, 0.9000, 1.3500, 1.5000, 2.0250, 3.0375,  \
				           4.5563, 6.8344, 10.2516, 15.3773, 1537.7344 ");
				values  ("  0.02237,  0.02444,  0.02643,  0.03207,  0.03954,  0.04176,  0.04847,  0.05738,  \
				            0.06396,  0.06713,  0.06799,  0.06787,  0.06788,  0.02446,  0.02654,  0.02855,  \
				            0.03427,  0.04186,  0.04412,  0.05096,  0.06004,  0.06676,  0.07000,  0.07087,  \
				            0.07075,  0.07075,  0.03094,  0.03306,  0.03513,  0.04104,  0.04891,  0.05126,  \
				            0.05835,  0.06778,  0.07477,  0.07815,  0.07907,  0.07895,  0.07895,  0.03316,  \
				            0.03530,  0.03739,  0.04334,  0.05128,  0.05365,  0.06080,  0.07032,  0.07737,  \
				            0.08079,  0.08171,  0.08159,  0.08159,  0.04701,  0.04922,  0.05136,  0.05750,  \
				            0.06568,  0.06811,  0.07548,  0.08529,  0.09258,  0.09611,  0.09707,  0.09695,  \
				            0.09695,  0.04938,  0.05159,  0.05374,  0.05989,  0.06809,  0.07053,  0.07792,  \
				            0.08776,  0.09507,  0.09861,  0.09957,  0.09945,  0.09946 ");
			}
		}

		capacitance () {
			top_plane: metal9;
			bottom_plane: metal3;
			lateral_capacitance (capacitance_template_WxS) {
				index_1 (" 0.4000, 0.5000, 0.8000, 0.9000, 1.5000, 1.6000 ");
				index_2 (" 0.4000, 0.5000, 0.6000, 0.9000, 1.3500, 1.5000, 2.0250, 3.0375,  \
				           4.5563, 6.8344, 10.2516, 15.3773, 1537.7344 ");
				values  ("  0.06519,  0.05392,  0.04602,  0.03194,  0.02123,  0.01887,  0.01290,  0.00665,  \
				            0.00259,  0.00065,  0.00009,  0.00000,  0.00000,  0.06636,  0.05496,  0.04695,  \
				            0.03263,  0.02170,  0.01928,  0.01319,  0.00679,  0.00264,  0.00067,  0.00009,  \
				            0.00000,  0.00000,  0.06877,  0.05710,  0.04887,  0.03405,  0.02267,  0.02015,  \
				            0.01378,  0.00710,  0.00276,  0.00070,  0.00009,  0.00000,  0.00000,  0.06935,  \
				            0.05761,  0.04933,  0.03439,  0.02290,  0.02035,  0.01392,  0.00717,  0.00279,  \
				            0.00070,  0.00009,  0.00000,  0.00000,  0.07136,  0.05941,  0.05095,  0.03560,  \
				            0.02373,  0.02108,  0.01442,  0.00743,  0.00289,  0.00073,  0.00010,  0.00000,  \
				            0.00000,  0.07154,  0.05957,  0.05109,  0.03571,  0.02380,  0.02115,  0.01446,  \
				            0.00745,  0.00290,  0.00073,  0.00010,  0.00000,  0.00000 ");
			}
			ground_capacitance (capacitance_template_WxS) {
				index_1 (" 0.4000, 0.5000, 0.8000, 0.9000, 1.5000, 1.6000 ");
				index_2 (" 0.4000, 0.5000, 0.6000, 0.9000, 1.3500, 1.5000, 2.0250, 3.0375,  \
				           4.5563, 6.8344, 10.2516, 15.3773, 1537.7344 ");
				values  ("  0.02007,  0.02187,  0.02361,  0.02852,  0.03514,  0.03714,  0.04333,  0.05202,  \
				            0.05903,  0.06281,  0.06399,  0.06395,  0.06396,  0.02183,  0.02363,  0.02537,  \
				            0.03036,  0.03709,  0.03914,  0.04545,  0.05432,  0.06148,  0.06534,  0.06654,  \
				            0.06650,  0.06651,  0.02725,  0.02909,  0.03088,  0.03603,  0.04305,  0.04517,  \
				            0.05176,  0.06100,  0.06848,  0.07251,  0.07377,  0.07373,  0.07374,  0.02912,  \
				            0.03096,  0.03277,  0.03798,  0.04506,  0.04721,  0.05386,  0.06319,  0.07074,  \
				            0.07482,  0.07609,  0.07605,  0.07606,  0.04081,  0.04272,  0.04460,  0.05000,  \
				            0.05734,  0.05957,  0.06646,  0.07613,  0.08394,  0.08817,  0.08948,  0.08944,  \
				            0.08945,  0.04282,  0.04474,  0.04662,  0.05204,  0.05941,  0.06165,  0.06856,  \
				            0.07826,  0.08610,  0.09034,  0.09165,  0.09162,  0.09163 ");
			}
		}

		capacitance () {
			top_plane: metal9;
			bottom_plane: SUBSTRATE;
			lateral_capacitance (capacitance_template_WxS) {
				index_1 (" 0.4000, 0.5000, 0.8000, 0.9000, 1.5000, 1.6000 ");
				index_2 (" 0.4000, 0.5000, 0.6000, 0.9000, 1.3500, 1.5000, 2.0250, 3.0375,  \
				           4.5563, 6.8344, 10.2516, 15.3773, 1537.7344 ");
				values  ("  0.06619,  0.05500,  0.04718,  0.03331,  0.02283,  0.02051,  0.01463,  0.00823,  \
				            0.00368,  0.00114,  0.00021,  0.00002,  0.00000,  0.06747,  0.05615,  0.04822,  \
				            0.03411,  0.02339,  0.02102,  0.01499,  0.00843,  0.00377,  0.00117,  0.00021,  \
				            0.00002,  0.00000,  0.07021,  0.05862,  0.05046,  0.03583,  0.02462,  0.02212,  \
				            0.01577,  0.00887,  0.00396,  0.00123,  0.00022,  0.00002,  0.00000,  0.07089,  \
				            0.05923,  0.05102,  0.03626,  0.02492,  0.02240,  0.01597,  0.00898,  0.00401,  \
				            0.00124,  0.00022,  0.00002,  0.00000,  0.07345,  0.06155,  0.05313,  0.03790,  \
				            0.02609,  0.02345,  0.01672,  0.00939,  0.00420,  0.00130,  0.00023,  0.00002,  \
				            0.00000,  0.07370,  0.06178,  0.05334,  0.03806,  0.02621,  0.02356,  0.01680,  \
				            0.00943,  0.00422,  0.00131,  0.00024,  0.00002,  0.00000 ");
			}
			ground_capacitance (capacitance_template_WxS) {
				index_1 (" 0.4000, 0.5000, 0.8000, 0.9000, 1.5000, 1.6000 ");
				index_2 (" 0.4000, 0.5000, 0.6000, 0.9000, 1.3500, 1.5000, 2.0250, 3.0375,  \
				           4.5563, 6.8344, 10.2516, 15.3773, 1537.7344 ");
				values  ("  0.01735,  0.01887,  0.02031,  0.02435,  0.02980,  0.03147,  0.03676,  0.04471,  \
				            0.05201,  0.05678,  0.05869,  0.05888,  0.05892,  0.01878,  0.02026,  0.02169,  \
				            0.02576,  0.03130,  0.03300,  0.03841,  0.04654,  0.05402,  0.05889,  0.06085,  \
				            0.06105,  0.06108,  0.02301,  0.02449,  0.02594,  0.03012,  0.03588,  0.03767,  \
				            0.04334,  0.05187,  0.05973,  0.06486,  0.06691,  0.06713,  0.06717,  0.02445,  \
				            0.02594,  0.02740,  0.03161,  0.03744,  0.03925,  0.04499,  0.05362,  0.06157,  \
				            0.06676,  0.06884,  0.06907,  0.06910,  0.03351,  0.03505,  0.03656,  0.04095,  \
				            0.04705,  0.04894,  0.05495,  0.06399,  0.07230,  0.07773,  0.07991,  0.08014,  \
				            0.08018,  0.03508,  0.03662,  0.03814,  0.04255,  0.04868,  0.05058,  0.05662,  \
				            0.06570,  0.07405,  0.07950,  0.08169,  0.08193,  0.08197 ");
			}
		}

		capacitance () {
			top_plane: metal10;
			bottom_plane: metal6;
			lateral_capacitance (capacitance_template_WxS) {
				index_1 (" 0.4000, 0.5000, 0.8000, 0.9000, 1.5000, 1.6000 ");
				index_2 (" 0.4000, 0.5000, 0.6000, 0.9000, 1.3500, 1.5000, 2.0250, 3.0375,  \
				           4.5563, 6.8344, 10.2516, 15.3773, 1537.7344 ");
				values  ("  0.05648,  0.04517,  0.03732,  0.02374,  0.01424,  0.01231,  0.00786,  0.00388,  \
				            0.00164,  0.00055,  0.00013,  0.00002,  0.00000,  0.05727,  0.04590,  0.03800,  \
				            0.02430,  0.01467,  0.01272,  0.00816,  0.00407,  0.00174,  0.00059,  0.00014,  \
				            0.00002,  0.00000,  0.05909,  0.04760,  0.03959,  0.02564,  0.01574,  0.01371,  \
				            0.00893,  0.00454,  0.00197,  0.00068,  0.00016,  0.00002,  0.00000,  0.05959,  \
				            0.04807,  0.04003,  0.02602,  0.01604,  0.01399,  0.00915,  0.00468,  0.00204,  \
				            0.00070,  0.00016,  0.00002,  0.00000,  0.06182,  0.05018,  0.04204,  0.02775,  \
				            0.01746,  0.01531,  0.01020,  0.00535,  0.00239,  0.00083,  0.00020,  0.00002,  \
				            0.00000,  0.06210,  0.05045,  0.04229,  0.02798,  0.01764,  0.01549,  0.01034,  \
				            0.00544,  0.00244,  0.00085,  0.00020,  0.00002,  0.00000 ");
			}
			ground_capacitance (capacitance_template_WxS) {
				index_1 (" 0.4000, 0.5000, 0.8000, 0.9000, 1.5000, 1.6000 ");
				index_2 (" 0.4000, 0.5000, 0.6000, 0.9000, 1.3500, 1.5000, 2.0250, 3.0375,  \
				           4.5563, 6.8344, 10.2516, 15.3773, 1537.7344 ");
				values  ("  0.06227,  0.06728,  0.07161,  0.08212,  0.09266,  0.09526,  0.10185,  0.10874,  \
				            0.11295,  0.11510,  0.11596,  0.11594,  0.11598,  0.07022,  0.07519,  0.07950,  \
				            0.08999,  0.10058,  0.10320,  0.10989,  0.11697,  0.12135,  0.12362,  0.12453,  \
				            0.12452,  0.12456,  0.09390,  0.09880,  0.10307,  0.11352,  0.12424,  0.12692,  \
				            0.13387,  0.14139,  0.14619,  0.14875,  0.14980,  0.14983,  0.14987,  0.10177,  \
				            0.10666,  0.11092,  0.12137,  0.13212,  0.13482,  0.14184,  0.14948,  0.15441,  \
				            0.15705,  0.15814,  0.15818,  0.15822,  0.14891,  0.15377,  0.15801,  0.16847,  \
				            0.17940,  0.18218,  0.18951,  0.19773,  0.20323,  0.20630,  0.20759,  0.20768,  \
				            0.20774,  0.15676,  0.16162,  0.16586,  0.17632,  0.18727,  0.19006,  0.19743,  \
				            0.20572,  0.21130,  0.21443,  0.21575,  0.21585,  0.21591 ");
			}
		}

		capacitance () {
			top_plane: metal10;
			bottom_plane: metal5;
			lateral_capacitance (capacitance_template_WxS) {
				index_1 (" 0.4000, 0.5000, 0.8000, 0.9000, 1.5000, 1.6000 ");
				index_2 (" 0.4000, 0.5000, 0.6000, 0.9000, 1.3500, 1.5000, 2.0250, 3.0375,  \
				           4.5563, 6.8344, 10.2516, 15.3773, 1537.7344 ");
				values  ("  0.06326,  0.05189,  0.04392,  0.02980,  0.01936,  0.01712,  0.01168,  0.00631,  \
				            0.00290,  0.00106,  0.00027,  0.00004,  0.00000,  0.06425,  0.05278,  0.04473,  \
				            0.03044,  0.01984,  0.01757,  0.01203,  0.00653,  0.00302,  0.00111,  0.00028,  \
				            0.00004,  0.00000,  0.06637,  0.05471,  0.04651,  0.03189,  0.02097,  0.01862,  \
				            0.01285,  0.00707,  0.00331,  0.00122,  0.00031,  0.00004,  0.00000,  0.06691,  \
				            0.05521,  0.04697,  0.03228,  0.02128,  0.01891,  0.01308,  0.00722,  0.00339,  \
				            0.00126,  0.00032,  0.00005,  0.00000,  0.06921,  0.05736,  0.04900,  0.03402,  \
				            0.02270,  0.02024,  0.01416,  0.00794,  0.00380,  0.00143,  0.00037,  0.00005,  \
				            0.00000,  0.06948,  0.05762,  0.04925,  0.03423,  0.02288,  0.02041,  0.01430,  \
				            0.00804,  0.00385,  0.00145,  0.00038,  0.00005,  0.00000 ");
			}
			ground_capacitance (capacitance_template_WxS) {
				index_1 (" 0.4000, 0.5000, 0.8000, 0.9000, 1.5000, 1.6000 ");
				index_2 (" 0.4000, 0.5000, 0.6000, 0.9000, 1.3500, 1.5000, 2.0250, 3.0375,  \
				           4.5563, 6.8344, 10.2516, 15.3773, 1537.7344 ");
				values  ("  0.02668,  0.02925,  0.03166,  0.03821,  0.04616,  0.04839,  0.05475,  0.06267,  \
				            0.06860,  0.07214,  0.07373,  0.07398,  0.07406,  0.02952,  0.03206,  0.03446,  \
				            0.04101,  0.04900,  0.05125,  0.05769,  0.06576,  0.07186,  0.07553,  0.07719,  \
				            0.07746,  0.07754,  0.03795,  0.04046,  0.04284,  0.04938,  0.05746,  0.05975,  \
				            0.06637,  0.07479,  0.08128,  0.08527,  0.08711,  0.08743,  0.08752,  0.04075,  \
				            0.04326,  0.04564,  0.05217,  0.06028,  0.06257,  0.06924,  0.07776,  0.08436,  \
				            0.08844,  0.09033,  0.09066,  0.09076,  0.05760,  0.06008,  0.06245,  0.06898,  \
				            0.07718,  0.07952,  0.08640,  0.09534,  0.10246,  0.10697,  0.10911,  0.10952,  \
				            0.10963,  0.06041,  0.06288,  0.06525,  0.07179,  0.08000,  0.08235,  0.08925,  \
				            0.09824,  0.10543,  0.11001,  0.11217,  0.11259,  0.11271 ");
			}
		}

		capacitance () {
			top_plane: metal10;
			bottom_plane: metal4;
			lateral_capacitance (capacitance_template_WxS) {
				index_1 (" 0.4000, 0.5000, 0.8000, 0.9000, 1.5000, 1.6000 ");
				index_2 (" 0.4000, 0.5000, 0.6000, 0.9000, 1.3500, 1.5000, 2.0250, 3.0375,  \
				           4.5563, 6.8344, 10.2516, 15.3773, 1537.7344 ");
				values  ("  0.06564,  0.05440,  0.04653,  0.03259,  0.02215,  0.01988,  0.01421,  0.00826,  \
				            0.00411,  0.00162,  0.00045,  0.00007,  0.00000,  0.06683,  0.05547,  0.04750,  \
				            0.03335,  0.02272,  0.02041,  0.01461,  0.00852,  0.00425,  0.00168,  0.00047,  \
				            0.00007,  0.00000,  0.06940,  0.05780,  0.04964,  0.03506,  0.02403,  0.02161,  \
				            0.01555,  0.00913,  0.00459,  0.00183,  0.00051,  0.00008,  0.00000,  0.07005,  \
				            0.05839,  0.05019,  0.03551,  0.02438,  0.02193,  0.01580,  0.00930,  0.00469,  \
				            0.00187,  0.00053,  0.00008,  0.00000,  0.07271,  0.06086,  0.05249,  0.03742,  \
				            0.02590,  0.02336,  0.01694,  0.01007,  0.00514,  0.00207,  0.00059,  0.00009,  \
				            0.00000,  0.07301,  0.06114,  0.05275,  0.03765,  0.02609,  0.02353,  0.01709,  \
				            0.01017,  0.00520,  0.00210,  0.00059,  0.00009,  0.00000 ");
			}
			ground_capacitance (capacitance_template_WxS) {
				index_1 (" 0.4000, 0.5000, 0.8000, 0.9000, 1.5000, 1.6000 ");
				index_2 (" 0.4000, 0.5000, 0.6000, 0.9000, 1.3500, 1.5000, 2.0250, 3.0375,  \
				           4.5563, 6.8344, 10.2516, 15.3773, 1537.7344 ");
				values  ("  0.01910,  0.02089,  0.02257,  0.02724,  0.03326,  0.03503,  0.04042,  0.04799,  \
				            0.05462,  0.05919,  0.06152,  0.06210,  0.06225,  0.02089,  0.02264,  0.02431,  \
				            0.02897,  0.03502,  0.03681,  0.04229,  0.05000,  0.05680,  0.06152,  0.06393,  \
				            0.06453,  0.06469,  0.02613,  0.02784,  0.02949,  0.03415,  0.04031,  0.04215,  \
				            0.04781,  0.05586,  0.06305,  0.06810,  0.07072,  0.07139,  0.07157,  0.02787,  \
				            0.02957,  0.03122,  0.03589,  0.04208,  0.04394,  0.04963,  0.05777,  0.06507,  \
				            0.07022,  0.07289,  0.07359,  0.07377,  0.03843,  0.04013,  0.04178,  0.04649,  \
				            0.05280,  0.05470,  0.06058,  0.06910,  0.07687,  0.08246,  0.08541,  0.08620,  \
				            0.08640,  0.04020,  0.04190,  0.04356,  0.04828,  0.05459,  0.05650,  0.06241,  \
				            0.07097,  0.07880,  0.08445,  0.08743,  0.08824,  0.08844 ");
			}
		}

		capacitance () {
			top_plane: metal10;
			bottom_plane: metal3;
			lateral_capacitance (capacitance_template_WxS) {
				index_1 (" 0.4000, 0.5000, 0.8000, 0.9000, 1.5000, 1.6000 ");
				index_2 (" 0.4000, 0.5000, 0.6000, 0.9000, 1.3500, 1.5000, 2.0250, 3.0375,  \
				           4.5563, 6.8344, 10.2516, 15.3773, 1537.7344 ");
				values  ("  0.06653,  0.05535,  0.04753,  0.03372,  0.02339,  0.02113,  0.01545,  0.00934,  \
				            0.00487,  0.00203,  0.00060,  0.00010,  0.00000,  0.06780,  0.05649,  0.04858,  \
				            0.03455,  0.02401,  0.02170,  0.01589,  0.00962,  0.00503,  0.00210,  0.00062,  \
				            0.00011,  0.00000,  0.07059,  0.05904,  0.05092,  0.03643,  0.02545,  0.02303,  \
				            0.01692,  0.01029,  0.00541,  0.00227,  0.00067,  0.00011,  0.00000,  0.07131,  \
				            0.05970,  0.05153,  0.03692,  0.02583,  0.02338,  0.01719,  0.01048,  0.00552,  \
				            0.00232,  0.00069,  0.00012,  0.00000,  0.07425,  0.06242,  0.05406,  0.03902,  \
				            0.02748,  0.02492,  0.01842,  0.01131,  0.00600,  0.00254,  0.00076,  0.00013,  \
				            0.00000,  0.07458,  0.06273,  0.05435,  0.03927,  0.02768,  0.02511,  0.01857,  \
				            0.01141,  0.00607,  0.00257,  0.00077,  0.00013,  0.00000 ");
			}
			ground_capacitance (capacitance_template_WxS) {
				index_1 (" 0.4000, 0.5000, 0.8000, 0.9000, 1.5000, 1.6000 ");
				index_2 (" 0.4000, 0.5000, 0.6000, 0.9000, 1.3500, 1.5000, 2.0250, 3.0375,  \
				           4.5563, 6.8344, 10.2516, 15.3773, 1537.7344 ");
				values  ("  0.01660,  0.01812,  0.01956,  0.02352,  0.02867,  0.03021,  0.03500,  0.04209,  \
				            0.04883,  0.05390,  0.05669,  0.05752,  0.05773,  0.01807,  0.01955,  0.02096,  \
				            0.02489,  0.03006,  0.03162,  0.03649,  0.04373,  0.05064,  0.05586,  0.05874,  \
				            0.05960,  0.05982,  0.02229,  0.02371,  0.02509,  0.02900,  0.03428,  0.03588,  \
				            0.04093,  0.04850,  0.05580,  0.06138,  0.06449,  0.06544,  0.06568,  0.02368,  \
				            0.02510,  0.02647,  0.03039,  0.03569,  0.03731,  0.04240,  0.05006,  0.05747,  \
				            0.06314,  0.06632,  0.06729,  0.06754,  0.03212,  0.03353,  0.03491,  0.03888,  \
				            0.04432,  0.04599,  0.05127,  0.05931,  0.06718,  0.07330,  0.07678,  0.07786,  \
				            0.07813,  0.03355,  0.03496,  0.03634,  0.04032,  0.04577,  0.04744,  0.05276,  \
				            0.06084,  0.06877,  0.07494,  0.07846,  0.07956,  0.07983 ");
			}
		}

		capacitance () {
			top_plane: metal10;
			bottom_plane: SUBSTRATE;
			lateral_capacitance (capacitance_template_WxS) {
				index_1 (" 0.4000, 0.5000, 0.8000, 0.9000, 1.5000, 1.6000 ");
				index_2 (" 0.4000, 0.5000, 0.6000, 0.9000, 1.3500, 1.5000, 2.0250, 3.0375,  \
				           4.5563, 6.8344, 10.2516, 15.3773, 1537.7344 ");
				values  ("  0.06771,  0.05660,  0.04886,  0.03525,  0.02513,  0.02293,  0.01735,  0.01118,  \
				            0.00635,  0.00293,  0.00098,  0.00020,  0.00000,  0.06907,  0.05784,  0.05001,  \
				            0.03617,  0.02585,  0.02359,  0.01786,  0.01152,  0.00655,  0.00303,  0.00101,  \
				            0.00020,  0.00000,  0.07216,  0.06069,  0.05264,  0.03833,  0.02752,  0.02514,  \
				            0.01908,  0.01233,  0.00702,  0.00325,  0.00109,  0.00022,  0.00000,  0.07298,  \
				            0.06144,  0.05334,  0.03891,  0.02797,  0.02556,  0.01941,  0.01255,  0.00715,  \
				            0.00332,  0.00112,  0.00022,  0.00000,  0.07644,  0.06466,  0.05635,  0.04141,  \
				            0.02995,  0.02740,  0.02087,  0.01354,  0.00774,  0.00360,  0.00122,  0.00025,  \
				            0.00000,  0.07684,  0.06503,  0.05670,  0.04171,  0.03019,  0.02762,  0.02105,  \
				            0.01366,  0.00782,  0.00364,  0.00123,  0.00025,  0.00000 ");
			}
			ground_capacitance (capacitance_template_WxS) {
				index_1 (" 0.4000, 0.5000, 0.8000, 0.9000, 1.5000, 1.6000 ");
				index_2 (" 0.4000, 0.5000, 0.6000, 0.9000, 1.3500, 1.5000, 2.0250, 3.0375,  \
				           4.5563, 6.8344, 10.2516, 15.3773, 1537.7344 ");
				values  ("  0.01348,  0.01471,  0.01586,  0.01897,  0.02295,  0.02415,  0.02795,  0.03396,  \
				            0.04040,  0.04607,  0.04976,  0.05117,  0.05158,  0.01463,  0.01579,  0.01689,  \
				            0.01993,  0.02391,  0.02512,  0.02898,  0.03512,  0.04173,  0.04756,  0.05136,  \
				            0.05282,  0.05324,  0.01774,  0.01881,  0.01985,  0.02279,  0.02680,  0.02804,  \
				            0.03205,  0.03851,  0.04552,  0.05173,  0.05580,  0.05739,  0.05784,  0.01872,  \
				            0.01978,  0.02081,  0.02374,  0.02777,  0.02902,  0.03308,  0.03962,  0.04674,  \
				            0.05306,  0.05721,  0.05882,  0.05929,  0.02460,  0.02564,  0.02666,  0.02962,  \
				            0.03377,  0.03508,  0.03933,  0.04626,  0.05385,  0.06065,  0.06514,  0.06692,  \
				            0.06743,  0.02559,  0.02663,  0.02765,  0.03062,  0.03479,  0.03610,  0.04039,  \
				            0.04736,  0.05501,  0.06187,  0.06641,  0.06820,  0.06872 ");
			}
		}

		capacitance () {
			top_plane: AIR;
			bottom_plane: metal6;
			lateral_capacitance (capacitance_template_WxS) {
				index_1 (" 0.4000, 0.5000, 0.8000, 0.9000, 1.5000, 1.6000 ");
				index_2 (" 0.4000, 0.5000, 0.6000, 0.9000, 1.3500, 1.5000, 2.0250, 3.0375,  \
				           4.5563, 6.8344, 10.2516, 15.3773, 1537.7344 ");
				values  ("  0.05708,  0.04580,  0.03797,  0.02444,  0.01498,  0.01307,  0.00864,  0.00468,  \
				            0.00242,  0.00122,  0.00060,  0.00026,  0.00000,  0.05789,  0.04655,  0.03867,  \
				            0.02503,  0.01546,  0.01352,  0.00901,  0.00494,  0.00258,  0.00131,  0.00065,  \
				            0.00029,  0.00000,  0.05979,  0.04833,  0.04035,  0.02649,  0.01668,  0.01467,  \
				            0.00997,  0.00564,  0.00304,  0.00158,  0.00079,  0.00036,  0.00000,  0.06032,  \
				            0.04883,  0.04083,  0.02691,  0.01704,  0.01502,  0.01025,  0.00585,  0.00318,  \
				            0.00167,  0.00084,  0.00038,  0.00000,  0.06283,  0.05124,  0.04314,  0.02899,  \
				            0.01885,  0.01675,  0.01175,  0.00699,  0.00398,  0.00217,  0.00112,  0.00051,  \
				            0.00000,  0.06317,  0.05156,  0.04346,  0.02928,  0.01911,  0.01700,  0.01197,  \
				            0.00717,  0.00410,  0.00225,  0.00117,  0.00054,  0.00000 ");
			}
			ground_capacitance (capacitance_template_WxS) {
				index_1 (" 0.4000, 0.5000, 0.8000, 0.9000, 1.5000, 1.6000 ");
				index_2 (" 0.4000, 0.5000, 0.6000, 0.9000, 1.3500, 1.5000, 2.0250, 3.0375,  \
				           4.5563, 6.8344, 10.2516, 15.3773, 1537.7344 ");
				values  ("  0.06068,  0.06561,  0.06987,  0.08019,  0.09054,  0.09308,  0.09954,  0.10629,  \
				            0.11045,  0.11277,  0.11400,  0.11442,  0.11496,  0.06857,  0.07345,  0.07769,  \
				            0.08796,  0.09832,  0.10087,  0.10740,  0.11429,  0.11861,  0.12106,  0.12237,  \
				            0.12285,  0.12344,  0.09202,  0.09682,  0.10100,  0.11116,  0.12152,  0.12411,  \
				            0.13078,  0.13801,  0.14273,  0.14552,  0.14707,  0.14769,  0.14842,  0.09979,  \
				            0.10458,  0.10873,  0.11887,  0.12923,  0.13182,  0.13854,  0.14586,  0.15069,  \
				            0.15358,  0.15521,  0.15588,  0.15666,  0.14613,  0.15084,  0.15493,  0.16494,  \
				            0.17529,  0.17791,  0.18479,  0.19255,  0.19794,  0.20137,  0.20342,  0.20438,  \
				            0.20543,  0.15381,  0.15851,  0.16259,  0.17258,  0.18293,  0.18555,  0.19246,  \
				            0.20027,  0.20574,  0.20925,  0.21136,  0.21237,  0.21347 ");
			}
		}

		capacitance () {
			top_plane: AIR;
			bottom_plane: metal5;
			lateral_capacitance (capacitance_template_WxS) {
				index_1 (" 0.4000, 0.5000, 0.8000, 0.9000, 1.5000, 1.6000 ");
				index_2 (" 0.4000, 0.5000, 0.6000, 0.9000, 1.3500, 1.5000, 2.0250, 3.0375,  \
				           4.5563, 6.8344, 10.2516, 15.3773, 1537.7344 ");
				values  ("  0.06404,  0.05270,  0.04475,  0.03070,  0.02032,  0.01811,  0.01274,  0.00746,  \
				            0.00409,  0.00214,  0.00107,  0.00049,  0.00000,  0.06506,  0.05361,  0.04558,  \
				            0.03136,  0.02085,  0.01861,  0.01314,  0.00776,  0.00430,  0.00227,  0.00114,  \
				            0.00052,  0.00000,  0.06724,  0.05561,  0.04744,  0.03292,  0.02213,  0.01982,  \
				            0.01417,  0.00854,  0.00484,  0.00261,  0.00134,  0.00061,  0.00000,  0.06782,  \
				            0.05614,  0.04794,  0.03335,  0.02250,  0.02017,  0.01447,  0.00878,  0.00501,  \
				            0.00272,  0.00140,  0.00064,  0.00000,  0.07038,  0.05858,  0.05027,  0.03543,  \
				            0.02432,  0.02192,  0.01601,  0.01001,  0.00592,  0.00332,  0.00175,  0.00082,  \
				            0.00000,  0.07071,  0.05890,  0.05058,  0.03571,  0.02457,  0.02217,  0.01624,  \
				            0.01020,  0.00606,  0.00342,  0.00181,  0.00085,  0.00000 ");
			}
			ground_capacitance (capacitance_template_WxS) {
				index_1 (" 0.4000, 0.5000, 0.8000, 0.9000, 1.5000, 1.6000 ");
				index_2 (" 0.4000, 0.5000, 0.6000, 0.9000, 1.3500, 1.5000, 2.0250, 3.0375,  \
				           4.5563, 6.8344, 10.2516, 15.3773, 1537.7344 ");
				values  ("  0.02470,  0.02717,  0.02949,  0.03581,  0.04348,  0.04561,  0.05170,  0.05919,  \
				            0.06481,  0.06840,  0.07046,  0.07141,  0.07240,  0.02747,  0.02992,  0.03223,  \
				            0.03853,  0.04619,  0.04833,  0.05445,  0.06203,  0.06779,  0.07150,  0.07367,  \
				            0.07468,  0.07574,  0.03569,  0.03809,  0.04037,  0.04658,  0.05421,  0.05635,  \
				            0.06252,  0.07029,  0.07636,  0.08041,  0.08285,  0.08405,  0.08530,  0.03840,  \
				            0.04079,  0.04305,  0.04924,  0.05685,  0.05899,  0.06517,  0.07299,  0.07914,  \
				            0.08329,  0.08582,  0.08708,  0.08839,  0.05445,  0.05677,  0.05898,  0.06503,  \
				            0.07252,  0.07465,  0.08085,  0.08889,  0.09546,  0.10011,  0.10310,  0.10470,  \
				            0.10636,  0.05709,  0.05940,  0.06160,  0.06763,  0.07511,  0.07724,  0.08343,  \
				            0.09150,  0.09813,  0.10285,  0.10591,  0.10757,  0.10928 ");
			}
		}

		capacitance () {
			top_plane: AIR;
			bottom_plane: metal4;
			lateral_capacitance (capacitance_template_WxS) {
				index_1 (" 0.4000, 0.5000, 0.8000, 0.9000, 1.5000, 1.6000 ");
				index_2 (" 0.4000, 0.5000, 0.6000, 0.9000, 1.3500, 1.5000, 2.0250, 3.0375,  \
				           4.5563, 6.8344, 10.2516, 15.3773, 1537.7344 ");
				values  ("  0.06658,  0.05537,  0.04752,  0.03365,  0.02330,  0.02105,  0.01547,  0.00967,  \
				            0.00563,  0.00309,  0.00159,  0.00074,  0.00000,  0.06779,  0.05645,  0.04851,  \
				            0.03444,  0.02391,  0.02162,  0.01593,  0.01001,  0.00587,  0.00324,  0.00168,  \
				            0.00079,  0.00000,  0.07042,  0.05885,  0.05073,  0.03625,  0.02535,  0.02298,  \
				            0.01707,  0.01088,  0.00649,  0.00364,  0.00192,  0.00091,  0.00000,  0.07110,  \
				            0.05948,  0.05131,  0.03673,  0.02576,  0.02336,  0.01740,  0.01113,  0.00668,  \
				            0.00377,  0.00200,  0.00094,  0.00000,  0.07402,  0.06222,  0.05390,  0.03898,  \
				            0.02768,  0.02521,  0.01901,  0.01244,  0.00767,  0.00445,  0.00241,  0.00116,  \
				            0.00000,  0.07437,  0.06256,  0.05423,  0.03928,  0.02794,  0.02546,  0.01924,  \
				            0.01263,  0.00782,  0.00456,  0.00248,  0.00119,  0.00000 ");
			}
			ground_capacitance (capacitance_template_WxS) {
				index_1 (" 0.4000, 0.5000, 0.8000, 0.9000, 1.5000, 1.6000 ");
				index_2 (" 0.4000, 0.5000, 0.6000, 0.9000, 1.3500, 1.5000, 2.0250, 3.0375,  \
				           4.5563, 6.8344, 10.2516, 15.3773, 1537.7344 ");
				values  ("  0.01675,  0.01842,  0.02002,  0.02444,  0.03013,  0.03180,  0.03684,  0.04379,  \
				            0.04982,  0.05420,  0.05698,  0.05845,  0.05995,  0.01848,  0.02012,  0.02169,  \
				            0.02609,  0.03178,  0.03345,  0.03852,  0.04554,  0.05168,  0.05619,  0.05909,  \
				            0.06064,  0.06222,  0.02352,  0.02511,  0.02665,  0.03098,  0.03665,  0.03833,  \
				            0.04343,  0.05059,  0.05699,  0.06182,  0.06501,  0.06678,  0.06860,  0.02517,  \
				            0.02676,  0.02829,  0.03260,  0.03826,  0.03993,  0.04504,  0.05223,  0.05869,  \
				            0.06362,  0.06689,  0.06873,  0.07063,  0.03496,  0.03650,  0.03799,  0.04220,  \
				            0.04775,  0.04941,  0.05451,  0.06181,  0.06859,  0.07396,  0.07770,  0.07991,  \
				            0.08224,  0.03657,  0.03810,  0.03958,  0.04378,  0.04931,  0.05097,  0.05606,  \
				            0.06338,  0.07020,  0.07563,  0.07943,  0.08171,  0.08410 ");
			}
		}

		capacitance () {
			top_plane: AIR;
			bottom_plane: metal3;
			lateral_capacitance (capacitance_template_WxS) {
				index_1 (" 0.4000, 0.5000, 0.8000, 0.9000, 1.5000, 1.6000 ");
				index_2 (" 0.4000, 0.5000, 0.6000, 0.9000, 1.3500, 1.5000, 2.0250, 3.0375,  \
				           4.5563, 6.8344, 10.2516, 15.3773, 1537.7344 ");
				values  ("  0.06757,  0.05642,  0.04863,  0.03490,  0.02465,  0.02242,  0.01683,  0.01089,  \
				            0.00659,  0.00373,  0.00197,  0.00094,  0.00000,  0.06886,  0.05758,  0.04970,  \
				            0.03574,  0.02531,  0.02303,  0.01733,  0.01126,  0.00685,  0.00389,  0.00207,  \
				            0.00099,  0.00000,  0.07172,  0.06019,  0.05211,  0.03772,  0.02688,  0.02451,  \
				            0.01856,  0.01219,  0.00752,  0.00434,  0.00234,  0.00113,  0.00000,  0.07246,  \
				            0.06088,  0.05275,  0.03825,  0.02731,  0.02492,  0.01890,  0.01246,  0.00772,  \
				            0.00448,  0.00242,  0.00117,  0.00000,  0.07565,  0.06387,  0.05556,  0.04067,  \
				            0.02936,  0.02687,  0.02060,  0.01383,  0.00877,  0.00521,  0.00288,  0.00141,  \
				            0.00000,  0.07604,  0.06424,  0.05592,  0.04099,  0.02963,  0.02713,  0.02083,  \
				            0.01403,  0.00892,  0.00532,  0.00295,  0.00145,  0.00000 ");
			}
			ground_capacitance (capacitance_template_WxS) {
				index_1 (" 0.4000, 0.5000, 0.8000, 0.9000, 1.5000, 1.6000 ");
				index_2 (" 0.4000, 0.5000, 0.6000, 0.9000, 1.3500, 1.5000, 2.0250, 3.0375,  \
				           4.5563, 6.8344, 10.2516, 15.3773, 1537.7344 ");
				values  ("  0.01402,  0.01541,  0.01674,  0.02044,  0.02526,  0.02670,  0.03111,  0.03750,  \
				            0.04345,  0.04813,  0.05131,  0.05312,  0.05500,  0.01542,  0.01678,  0.01809,  \
				            0.02175,  0.02655,  0.02798,  0.03242,  0.03887,  0.04492,  0.04973,  0.05303,  \
				            0.05493,  0.05690,  0.01945,  0.02075,  0.02201,  0.02559,  0.03036,  0.03179,  \
				            0.03626,  0.04282,  0.04911,  0.05422,  0.05782,  0.05996,  0.06221,  0.02075,  \
				            0.02205,  0.02330,  0.02686,  0.03161,  0.03305,  0.03751,  0.04410,  0.05045,  \
				            0.05565,  0.05934,  0.06155,  0.06388,  0.02845,  0.02969,  0.03091,  0.03437,  \
				            0.03904,  0.04045,  0.04491,  0.05159,  0.05820,  0.06381,  0.06796,  0.07056,  \
				            0.07337,  0.02971,  0.03095,  0.03216,  0.03560,  0.04026,  0.04167,  0.04612,  \
				            0.05281,  0.05945,  0.06513,  0.06933,  0.07200,  0.07488 ");
			}
		}

		capacitance () {
			top_plane: AIR;
			bottom_plane: SUBSTRATE;
			lateral_capacitance (capacitance_template_WxS) {
				index_1 (" 0.4000, 0.5000, 0.8000, 0.9000, 1.5000, 1.6000 ");
				index_2 (" 0.4000, 0.5000, 0.6000, 0.9000, 1.3500, 1.5000, 2.0250, 3.0375,  \
				           4.5563, 6.8344, 10.2516, 15.3773, 1537.7344 ");
				values  ("  0.06894,  0.05788,  0.05018,  0.03667,  0.02664,  0.02446,  0.01898,  0.01302,  \
				            0.00843,  0.00510,  0.00286,  0.00143,  0.00000,  0.07034,  0.05915,  0.05135,  \
				            0.03761,  0.02739,  0.02516,  0.01956,  0.01345,  0.00874,  0.00531,  0.00298,  \
				            0.00149,  0.00000,  0.07350,  0.06207,  0.05406,  0.03985,  0.02919,  0.02685,  \
				            0.02096,  0.01452,  0.00952,  0.00584,  0.00332,  0.00167,  0.00000,  0.07435,  \
				            0.06285,  0.05479,  0.04046,  0.02969,  0.02733,  0.02136,  0.01482,  0.00975,  \
				            0.00600,  0.00342,  0.00173,  0.00000,  0.07804,  0.06631,  0.05805,  0.04327,  \
				            0.03204,  0.02956,  0.02328,  0.01635,  0.01093,  0.00685,  0.00396,  0.00203,  \
				            0.00000,  0.07849,  0.06674,  0.05846,  0.04363,  0.03235,  0.02985,  0.02354,  \
				            0.01657,  0.01110,  0.00697,  0.00404,  0.00207,  0.00000 ");
			}
			ground_capacitance (capacitance_template_WxS) {
				index_1 (" 0.4000, 0.5000, 0.8000, 0.9000, 1.5000, 1.6000 ");
				index_2 (" 0.4000, 0.5000, 0.6000, 0.9000, 1.3500, 1.5000, 2.0250, 3.0375,  \
				           4.5563, 6.8344, 10.2516, 15.3773, 1537.7344 ");
				values  ("  0.01042,  0.01148,  0.01249,  0.01529,  0.01892,  0.02001,  0.02341,  0.02861,  \
				            0.03397,  0.03880,  0.04258,  0.04507,  0.04789,  0.01147,  0.01249,  0.01347,  \
				            0.01620,  0.01978,  0.02086,  0.02427,  0.02950,  0.03494,  0.03989,  0.04379,  \
				            0.04638,  0.04933,  0.01436,  0.01530,  0.01622,  0.01881,  0.02231,  0.02337,  \
				            0.02677,  0.03207,  0.03769,  0.04291,  0.04712,  0.04998,  0.05327,  0.01527,  \
				            0.01620,  0.01710,  0.01966,  0.02313,  0.02420,  0.02759,  0.03290,  0.03857,  \
				            0.04387,  0.04816,  0.05110,  0.05450,  0.02045,  0.02132,  0.02218,  0.02463,  \
				            0.02799,  0.02904,  0.03240,  0.03776,  0.04364,  0.04929,  0.05402,  0.05738,  \
				            0.06135,  0.02129,  0.02215,  0.02300,  0.02544,  0.02879,  0.02984,  0.03319,  \
				            0.03856,  0.04445,  0.05016,  0.05494,  0.05837,  0.06243 ");
			}
		}
	}

	layer (metal6) {
		resistance: 0.210000

		capacitance () {
			top_plane: metal7;
			bottom_plane: metal5;
			lateral_capacitance (capacitance_template_WxS) {
				index_1 (" 0.1400, 0.2700, 0.2800, 0.5000, 0.5600, 0.9000, 1.5000 ");
				index_2 (" 0.1400, 0.2100, 0.2700, 0.3150, 0.4725, 0.5000, 0.7088, 0.9000,  \
				           1.0631, 1.5000, 1.5947, 2.3920, 3.5880, 5.3821, 538.2070 ");
				values  ("  0.05924,  0.03873,  0.02882,  0.02365,  0.01261,  0.01137,  0.00528,  0.00266,  \
				            0.00150,  0.00033,  0.00024,  0.00002,  0.00000,  0.00000,  0.00000,  0.06023,  \
				            0.03939,  0.02930,  0.02404,  0.01281,  0.01155,  0.00536,  0.00271,  0.00152,  \
				            0.00033,  0.00024,  0.00002,  0.00000,  0.00000,  0.00000,  0.06027,  0.03941,  \
				            0.02932,  0.02405,  0.01282,  0.01156,  0.00536,  0.00271,  0.00152,  0.00033,  \
				            0.00024,  0.00002,  0.00000,  0.00000,  0.00000,  0.06055,  0.03960,  0.02945,  \
				            0.02416,  0.01287,  0.01161,  0.00538,  0.00272,  0.00153,  0.00033,  0.00024,  \
				            0.00002,  0.00000,  0.00000,  0.00000,  0.06053,  0.03959,  0.02945,  0.02415,  \
				            0.01287,  0.01160,  0.00538,  0.00272,  0.00153,  0.00033,  0.00024,  0.00002,  \
				            0.00000,  0.00000,  0.00000,  0.06055,  0.03960,  0.02945,  0.02416,  0.01287,  \
				            0.01161,  0.00538,  0.00272,  0.00153,  0.00033,  0.00024,  0.00002,  0.00000,  \
				            0.00000,  0.00000,  0.06055,  0.03960,  0.02945,  0.02416,  0.01287,  0.01161,  \
				            0.00538,  0.00272,  0.00153,  0.00033,  0.00024,  0.00002,  0.00000,  0.00000,  \
				            0.00000 ");
			}
			ground_capacitance (capacitance_template_WxS) {
				index_1 (" 0.1400, 0.2700, 0.2800, 0.5000, 0.5600, 0.9000, 1.5000 ");
				index_2 (" 0.1400, 0.2100, 0.2700, 0.3150, 0.4725, 0.5000, 0.7088, 0.9000,  \
				           1.0631, 1.5000, 1.5947, 2.3920, 3.5880, 5.3821, 538.2070 ");
				values  ("  0.04216,  0.05055,  0.05708,  0.06162,  0.07440,  0.07619,  0.08596,  0.09090,  \
				            0.09329,  0.09561,  0.09584,  0.09627,  0.09628,  0.09637,  0.09636,  0.06145,  \
				            0.07008,  0.07677,  0.08140,  0.09441,  0.09623,  0.10616,  0.11116,  0.11359,  \
				            0.11595,  0.11618,  0.11663,  0.11663,  0.11669,  0.11669,  0.06296,  0.07160,  \
				            0.07829,  0.08293,  0.09594,  0.09777,  0.10770,  0.11271,  0.11513,  0.11750,  \
				            0.11773,  0.11817,  0.11817,  0.11824,  0.11823,  0.09639,  0.10509,  0.11183,  \
				            0.11649,  0.12957,  0.13140,  0.14137,  0.14640,  0.14884,  0.15121,  0.15144,  \
				            0.15189,  0.15189,  0.15195,  0.15194,  0.10552,  0.11423,  0.12096,  0.12562,  \
				            0.13870,  0.14053,  0.15050,  0.15553,  0.15797,  0.16034,  0.16057,  0.16102,  \
				            0.16102,  0.16108,  0.16108,  0.15742,  0.16613,  0.17286,  0.17753,  0.19061,  \
				            0.19244,  0.20241,  0.20744,  0.20988,  0.21225,  0.21248,  0.21293,  0.21293,  \
				            0.21299,  0.21299,  0.24902,  0.25772,  0.26446,  0.26912,  0.28221,  0.28403,  \
				            0.29401,  0.29904,  0.30148,  0.30386,  0.30408,  0.30453,  0.30454,  0.30451,  \
				            0.30459 ");
			}
		}

		capacitance () {
			top_plane: metal7;
			bottom_plane: metal4;
			lateral_capacitance (capacitance_template_WxS) {
				index_1 (" 0.1400, 0.2700, 0.2800, 0.5000, 0.5600, 0.9000, 1.5000 ");
				index_2 (" 0.1400, 0.2100, 0.2700, 0.3150, 0.4725, 0.5000, 0.7088, 0.9000,  \
				           1.0631, 1.5000, 1.5947, 2.3920, 3.5880, 5.3821, 538.2070 ");
				values  ("  0.06297,  0.04297,  0.03336,  0.02835,  0.01743,  0.01615,  0.00941,  0.00597,  \
				            0.00411,  0.00155,  0.00126,  0.00023,  0.00002,  0.00000,  0.00000,  0.06533,  \
				            0.04481,  0.03489,  0.02970,  0.01834,  0.01700,  0.00995,  0.00633,  0.00436,  \
				            0.00165,  0.00135,  0.00025,  0.00002,  0.00000,  0.00000,  0.06546,  0.04491,  \
				            0.03498,  0.02977,  0.01839,  0.01705,  0.00998,  0.00635,  0.00438,  0.00166,  \
				            0.00135,  0.00025,  0.00002,  0.00000,  0.00000,  0.06706,  0.04621,  0.03608,  \
				            0.03075,  0.01906,  0.01769,  0.01039,  0.00662,  0.00457,  0.00174,  0.00142,  \
				            0.00026,  0.00002,  0.00000,  0.00000,  0.06726,  0.04638,  0.03623,  0.03088,  \
				            0.01916,  0.01778,  0.01045,  0.00666,  0.00460,  0.00175,  0.00143,  0.00026,  \
				            0.00002,  0.00000,  0.00000,  0.06792,  0.04692,  0.03669,  0.03130,  0.01945,  \
				            0.01805,  0.01062,  0.00678,  0.00468,  0.00178,  0.00145,  0.00027,  0.00002,  \
				            0.00000,  0.00000,  0.06816,  0.04712,  0.03687,  0.03146,  0.01956,  0.01815,  \
				            0.01069,  0.00682,  0.00471,  0.00180,  0.00146,  0.00027,  0.00002,  0.00000,  \
				            0.00000 ");
			}
			ground_capacitance (capacitance_template_WxS) {
				index_1 (" 0.1400, 0.2700, 0.2800, 0.5000, 0.5600, 0.9000, 1.5000 ");
				index_2 (" 0.1400, 0.2100, 0.2700, 0.3150, 0.4725, 0.5000, 0.7088, 0.9000,  \
				           1.0631, 1.5000, 1.5947, 2.3920, 3.5880, 5.3821, 538.2070 ");
				values  ("  0.03040,  0.03611,  0.04061,  0.04380,  0.05332,  0.05475,  0.06351,  0.06903,  \
				            0.07234,  0.07710,  0.07770,  0.07978,  0.08021,  0.08026,  0.08026,  0.04271,  \
				            0.04856,  0.05320,  0.05647,  0.06632,  0.06780,  0.07693,  0.08271,  0.08620,  \
				            0.09124,  0.09188,  0.09410,  0.09456,  0.09458,  0.09458,  0.04368,  0.04954,  \
				            0.05418,  0.05746,  0.06732,  0.06881,  0.07796,  0.08375,  0.08725,  0.09231,  \
				            0.09294,  0.09518,  0.09564,  0.09566,  0.09566,  0.06531,  0.07127,  0.07600,  \
				            0.07935,  0.08944,  0.09097,  0.10039,  0.10639,  0.11001,  0.11529,  0.11596,  \
				            0.11830,  0.11878,  0.11879,  0.11879,  0.07128,  0.07726,  0.08200,  0.08536,  \
				            0.09549,  0.09702,  0.10649,  0.11251,  0.11616,  0.12147,  0.12213,  0.12449,  \
				            0.12498,  0.12499,  0.12499,  0.10558,  0.11161,  0.11639,  0.11979,  0.13002,  \
				            0.13157,  0.14115,  0.14726,  0.15096,  0.15637,  0.15705,  0.15945,  0.15995,  \
				            0.15996,  0.15996,  0.16667,  0.17271,  0.17752,  0.18092,  0.19120,  0.19275,  \
				            0.20238,  0.20852,  0.21224,  0.21768,  0.21836,  0.22078,  0.22129,  0.22132,  \
				            0.22130 ");
			}
		}

		capacitance () {
			top_plane: metal7;
			bottom_plane: metal3;
			lateral_capacitance (capacitance_template_WxS) {
				index_1 (" 0.1400, 0.2700, 0.2800, 0.5000, 0.5600, 0.9000, 1.5000 ");
				index_2 (" 0.1400, 0.2100, 0.2700, 0.3150, 0.4725, 0.5000, 0.7088, 0.9000,  \
				           1.0631, 1.5000, 1.5947, 2.3920, 3.5880, 5.3821, 538.2070 ");
				values  ("  0.06355,  0.04366,  0.03414,  0.02920,  0.01845,  0.01720,  0.01055,  0.00708,  \
				            0.00514,  0.00228,  0.00192,  0.00049,  0.00007,  0.00000,  0.00000,  0.06620,  \
				            0.04580,  0.03598,  0.03085,  0.01966,  0.01834,  0.01134,  0.00765,  0.00557,  \
				            0.00249,  0.00210,  0.00054,  0.00008,  0.00000,  0.00000,  0.06635,  0.04593,  \
				            0.03609,  0.03095,  0.01973,  0.01841,  0.01139,  0.00768,  0.00560,  0.00250,  \
				            0.00212,  0.00054,  0.00008,  0.00000,  0.00000,  0.06846,  0.04772,  0.03767,  \
				            0.03239,  0.02081,  0.01944,  0.01212,  0.00822,  0.00601,  0.00270,  0.00229,  \
				            0.00058,  0.00008,  0.00000,  0.00000,  0.06879,  0.04801,  0.03793,  0.03263,  \
				            0.02100,  0.01962,  0.01225,  0.00831,  0.00608,  0.00274,  0.00232,  0.00059,  \
				            0.00008,  0.00000,  0.00000,  0.07000,  0.04906,  0.03887,  0.03350,  0.02166,  \
				            0.02026,  0.01270,  0.00865,  0.00634,  0.00287,  0.00243,  0.00062,  0.00009,  \
				            0.00000,  0.00000,  0.07070,  0.04967,  0.03942,  0.03400,  0.02205,  0.02062,  \
				            0.01296,  0.00884,  0.00649,  0.00294,  0.00249,  0.00064,  0.00009,  0.00001,  \
				            0.00000 ");
			}
			ground_capacitance (capacitance_template_WxS) {
				index_1 (" 0.1400, 0.2700, 0.2800, 0.5000, 0.5600, 0.9000, 1.5000 ");
				index_2 (" 0.1400, 0.2100, 0.2700, 0.3150, 0.4725, 0.5000, 0.7088, 0.9000,  \
				           1.0631, 1.5000, 1.5947, 2.3920, 3.5880, 5.3821, 538.2070 ");
				values  ("  0.02886,  0.03420,  0.03838,  0.04131,  0.05007,  0.05139,  0.05952,  0.06480,  \
				            0.06809,  0.07323,  0.07393,  0.07677,  0.07763,  0.07777,  0.07777,  0.04026,  \
				            0.04564,  0.04989,  0.05289,  0.06189,  0.06326,  0.07175,  0.07731,  0.08081,  \
				            0.08634,  0.08710,  0.09021,  0.09115,  0.09127,  0.09127,  0.04114,  0.04653,  \
				            0.05078,  0.05379,  0.06280,  0.06417,  0.07268,  0.07826,  0.08178,  0.08733,  \
				            0.08809,  0.09121,  0.09216,  0.09228,  0.09228,  0.06089,  0.06633,  0.07063,  \
				            0.07368,  0.08291,  0.08432,  0.09314,  0.09898,  0.10268,  0.10860,  0.10942,  \
				            0.11279,  0.11382,  0.11394,  0.11395,  0.06633,  0.07177,  0.07609,  0.07915,  \
				            0.08841,  0.08982,  0.09870,  0.10459,  0.10833,  0.11431,  0.11514,  0.11855,  \
				            0.11960,  0.11972,  0.11973,  0.09755,  0.10304,  0.10740,  0.11050,  0.11990,  \
				            0.12134,  0.13042,  0.13647,  0.14033,  0.14654,  0.14740,  0.15098,  0.15208,  \
				            0.15220,  0.15221,  0.15343,  0.15896,  0.16335,  0.16648,  0.17597,  0.17743,  \
				            0.18662,  0.19277,  0.19670,  0.20304,  0.20393,  0.20759,  0.20872,  0.20889,  \
				            0.20886 ");
			}
		}

		capacitance () {
			top_plane: metal7;
			bottom_plane: metal2;
			lateral_capacitance (capacitance_template_WxS) {
				index_1 (" 0.1400, 0.2700, 0.2800, 0.5000, 0.5600, 0.9000, 1.5000 ");
				index_2 (" 0.1400, 0.2100, 0.2700, 0.3150, 0.4725, 0.5000, 0.7088, 0.9000,  \
				           1.0631, 1.5000, 1.5947, 2.3920, 3.5880, 5.3821, 538.2070 ");
				values  ("  0.06376,  0.04390,  0.03441,  0.02949,  0.01882,  0.01757,  0.01098,  0.00752,  \
				            0.00557,  0.00263,  0.00226,  0.00066,  0.00011,  0.00001,  0.00000,  0.06649,  \
				            0.04614,  0.03636,  0.03125,  0.02013,  0.01883,  0.01188,  0.00819,  0.00609,  \
				            0.00291,  0.00250,  0.00073,  0.00013,  0.00001,  0.00000,  0.06665,  0.04627,  \
				            0.03647,  0.03136,  0.02021,  0.01891,  0.01193,  0.00823,  0.00613,  0.00293,  \
				            0.00251,  0.00073,  0.00013,  0.00001,  0.00000,  0.06896,  0.04826,  0.03825,  \
				            0.03299,  0.02148,  0.02012,  0.01283,  0.00891,  0.00666,  0.00321,  0.00276,  \
				            0.00081,  0.00014,  0.00001,  0.00000,  0.06934,  0.04860,  0.03856,  0.03328,  \
				            0.02171,  0.02035,  0.01300,  0.00904,  0.00677,  0.00327,  0.00281,  0.00083,  \
				            0.00014,  0.00001,  0.00000,  0.07082,  0.04992,  0.03976,  0.03440,  0.02260,  \
				            0.02120,  0.01363,  0.00952,  0.00715,  0.00348,  0.00299,  0.00089,  0.00016,  \
				            0.00001,  0.00000,  0.07183,  0.05082,  0.04057,  0.03516,  0.02320,  0.02178,  \
				            0.01406,  0.00986,  0.00742,  0.00362,  0.00312,  0.00093,  0.00016,  0.00001,  \
				            0.00000 ");
			}
			ground_capacitance (capacitance_template_WxS) {
				index_1 (" 0.1400, 0.2700, 0.2800, 0.5000, 0.5600, 0.9000, 1.5000 ");
				index_2 (" 0.1400, 0.2100, 0.2700, 0.3150, 0.4725, 0.5000, 0.7088, 0.9000,  \
				           1.0631, 1.5000, 1.5947, 2.3920, 3.5880, 5.3821, 538.2070 ");
				values  ("  0.02833,  0.03356,  0.03764,  0.04050,  0.04898,  0.05026,  0.05815,  0.06330,  \
				            0.06653,  0.07173,  0.07246,  0.07559,  0.07669,  0.07691,  0.07692,  0.03946,  \
				            0.04469,  0.04881,  0.05171,  0.06041,  0.06172,  0.06994,  0.07536,  0.07882,  \
				            0.08444,  0.08524,  0.08870,  0.08992,  0.09014,  0.09015,  0.04032,  0.04556,  \
				            0.04967,  0.05258,  0.06128,  0.06261,  0.07084,  0.07628,  0.07975,  0.08540,  \
				            0.08620,  0.08968,  0.09091,  0.09113,  0.09114,  0.05943,  0.06469,  0.06884,  \
				            0.07178,  0.08066,  0.08202,  0.09055,  0.09627,  0.09995,  0.10602,  0.10689,  \
				            0.11070,  0.11207,  0.11230,  0.11232,  0.06468,  0.06994,  0.07410,  0.07704,  \
				            0.08596,  0.08732,  0.09591,  0.10169,  0.10540,  0.11155,  0.11244,  0.11631,  \
				            0.11770,  0.11794,  0.11796,  0.09477,  0.10006,  0.10426,  0.10723,  0.11629,  \
				            0.11768,  0.12650,  0.13247,  0.13633,  0.14279,  0.14372,  0.14783,  0.14933,  \
				            0.14957,  0.14960,  0.14866,  0.15399,  0.15822,  0.16123,  0.17040,  0.17181,  \
				            0.18079,  0.18689,  0.19086,  0.19752,  0.19848,  0.20276,  0.20432,  0.20463,  \
				            0.20460 ");
			}
		}

		capacitance () {
			top_plane: metal7;
			bottom_plane: SUBSTRATE;
			lateral_capacitance (capacitance_template_WxS) {
				index_1 (" 0.1400, 0.2700, 0.2800, 0.5000, 0.5600, 0.9000, 1.5000 ");
				index_2 (" 0.1400, 0.2100, 0.2700, 0.3150, 0.4725, 0.5000, 0.7088, 0.9000,  \
				           1.0631, 1.5000, 1.5947, 2.3920, 3.5880, 5.3821, 538.2070 ");
				values  ("  0.06407,  0.04424,  0.03479,  0.02989,  0.01932,  0.01809,  0.01159,  0.00817,  \
				            0.00623,  0.00324,  0.00284,  0.00103,  0.00026,  0.00003,  0.00000,  0.06690,  \
				            0.04661,  0.03687,  0.03181,  0.02081,  0.01952,  0.01267,  0.00902,  0.00692,  \
				            0.00365,  0.00321,  0.00117,  0.00029,  0.00004,  0.00000,  0.06707,  0.04675,  \
				            0.03700,  0.03192,  0.02090,  0.01961,  0.01274,  0.00907,  0.00697,  0.00368,  \
				            0.00323,  0.00118,  0.00030,  0.00004,  0.00000,  0.06965,  0.04902,  0.03906,  \
				            0.03385,  0.02246,  0.02112,  0.01391,  0.01002,  0.00775,  0.00415,  0.00366,  \
				            0.00135,  0.00034,  0.00005,  0.00000,  0.07010,  0.04944,  0.03946,  0.03422,  \
				            0.02277,  0.02142,  0.01415,  0.01021,  0.00792,  0.00426,  0.00375,  0.00139,  \
				            0.00035,  0.00005,  0.00000,  0.07205,  0.05121,  0.04110,  0.03578,  0.02407,  \
				            0.02268,  0.01516,  0.01103,  0.00860,  0.00468,  0.00414,  0.00155,  0.00040,  \
				            0.00005,  0.00000,  0.07370,  0.05273,  0.04252,  0.03713,  0.02521,  0.02379,  \
				            0.01605,  0.01176,  0.00922,  0.00507,  0.00449,  0.00170,  0.00044,  0.00006,  \
				            0.00000 ");
			}
			ground_capacitance (capacitance_template_WxS) {
				index_1 (" 0.1400, 0.2700, 0.2800, 0.5000, 0.5600, 0.9000, 1.5000 ");
				index_2 (" 0.1400, 0.2100, 0.2700, 0.3150, 0.4725, 0.5000, 0.7088, 0.9000,  \
				           1.0631, 1.5000, 1.5947, 2.3920, 3.5880, 5.3821, 538.2070 ");
				values  ("  0.02753,  0.03264,  0.03660,  0.03937,  0.04753,  0.04875,  0.05626,  0.06119,  \
				            0.06431,  0.06947,  0.07023,  0.07370,  0.07524,  0.07570,  0.07577,  0.03838,  \
				            0.04342,  0.04737,  0.05014,  0.05841,  0.05966,  0.06745,  0.07263,  0.07597,  \
				            0.08157,  0.08240,  0.08630,  0.08806,  0.08855,  0.08863,  0.03921,  0.04425,  \
				            0.04819,  0.05097,  0.05924,  0.06050,  0.06830,  0.07349,  0.07685,  0.08248,  \
				            0.08332,  0.08724,  0.08901,  0.08951,  0.08959,  0.05750,  0.06250,  0.06644,  \
				            0.06922,  0.07760,  0.07888,  0.08694,  0.09240,  0.09597,  0.10210,  0.10302,  \
				            0.10742,  0.10945,  0.11001,  0.11011,  0.06249,  0.06748,  0.07142,  0.07420,  \
				            0.08260,  0.08388,  0.09200,  0.09751,  0.10113,  0.10735,  0.10829,  0.11279,  \
				            0.11488,  0.11546,  0.11556,  0.09097,  0.09595,  0.09990,  0.10270,  0.11121,  \
				            0.11251,  0.12085,  0.12659,  0.13038,  0.13703,  0.13804,  0.14296,  0.14528,  \
				            0.14594,  0.14605,  0.14179,  0.14681,  0.15079,  0.15361,  0.16224,  0.16357,  \
				            0.17211,  0.17805,  0.18201,  0.18902,  0.19010,  0.19540,  0.19793,  0.19870,  \
				            0.19878 ");
			}
		}

		capacitance () {
			top_plane: metal8;
			bottom_plane: metal5;
			lateral_capacitance (capacitance_template_WxS) {
				index_1 (" 0.1400, 0.2700, 0.2800, 0.5000, 0.5600, 0.9000, 1.5000 ");
				index_2 (" 0.1400, 0.2100, 0.2700, 0.3150, 0.4725, 0.5000, 0.7088, 0.9000,  \
				           1.0631, 1.5000, 1.5947, 2.3920, 3.5880, 5.3821, 538.2070 ");
				values  ("  0.06396,  0.04412,  0.03466,  0.02976,  0.01916,  0.01792,  0.01139,  0.00796,  \
				            0.00601,  0.00302,  0.00263,  0.00088,  0.00019,  0.00002,  0.00000,  0.06677,  \
				            0.04646,  0.03671,  0.03163,  0.02059,  0.01930,  0.01241,  0.00875,  0.00664,  \
				            0.00339,  0.00295,  0.00100,  0.00022,  0.00002,  0.00000,  0.06693,  0.04660,  \
				            0.03683,  0.03175,  0.02068,  0.01939,  0.01248,  0.00880,  0.00668,  0.00341,  \
				            0.00297,  0.00100,  0.00022,  0.00002,  0.00000,  0.06943,  0.04878,  0.03880,  \
				            0.03358,  0.02215,  0.02080,  0.01356,  0.00964,  0.00738,  0.00381,  0.00333,  \
				            0.00114,  0.00025,  0.00003,  0.00000,  0.06986,  0.04918,  0.03917,  0.03392,  \
				            0.02243,  0.02108,  0.01377,  0.00982,  0.00752,  0.00390,  0.00341,  0.00116,  \
				            0.00026,  0.00003,  0.00000,  0.07165,  0.05079,  0.04066,  0.03533,  0.02358,  \
				            0.02218,  0.01463,  0.01050,  0.00809,  0.00423,  0.00371,  0.00128,  0.00028,  \
				            0.00003,  0.00000,  0.07306,  0.05207,  0.04184,  0.03644,  0.02450,  0.02308,  \
				            0.01533,  0.01106,  0.00855,  0.00451,  0.00395,  0.00137,  0.00031,  0.00004,  \
				            0.00000 ");
			}
			ground_capacitance (capacitance_template_WxS) {
				index_1 (" 0.1400, 0.2700, 0.2800, 0.5000, 0.5600, 0.9000, 1.5000 ");
				index_2 (" 0.1400, 0.2100, 0.2700, 0.3150, 0.4725, 0.5000, 0.7088, 0.9000,  \
				           1.0631, 1.5000, 1.5947, 2.3920, 3.5880, 5.3821, 538.2070 ");
				values  ("  0.02781,  0.03296,  0.03696,  0.03975,  0.04800,  0.04924,  0.05688,  0.06188,  \
				            0.06505,  0.07024,  0.07099,  0.07437,  0.07576,  0.07611,  0.07616,  0.03874,  \
				            0.04384,  0.04784,  0.05065,  0.05906,  0.06033,  0.06826,  0.07353,  0.07692,  \
				            0.08255,  0.08338,  0.08715,  0.08872,  0.08909,  0.08914,  0.03958,  0.04468,  \
				            0.04868,  0.05149,  0.05991,  0.06118,  0.06913,  0.07441,  0.07782,  0.08348,  \
				            0.08431,  0.08811,  0.08969,  0.09006,  0.09011,  0.05813,  0.06321,  0.06721,  \
				            0.07005,  0.07859,  0.07990,  0.08813,  0.09369,  0.09730,  0.10345,  0.10436,  \
				            0.10858,  0.11037,  0.11079,  0.11084,  0.06320,  0.06828,  0.07228,  0.07512,  \
				            0.08369,  0.08500,  0.09329,  0.09890,  0.10256,  0.10880,  0.10973,  0.11404,  \
				            0.11587,  0.11630,  0.11636,  0.09221,  0.09730,  0.10133,  0.10419,  0.11288,  \
				            0.11422,  0.12274,  0.12857,  0.13240,  0.13902,  0.14001,  0.14468,  0.14669,  \
				            0.14716,  0.14722,  0.14409,  0.14921,  0.15328,  0.15617,  0.16499,  0.16635,  \
				            0.17506,  0.18107,  0.18504,  0.19197,  0.19302,  0.19797,  0.20013,  0.20068,  \
				            0.20070 ");
			}
		}

		capacitance () {
			top_plane: metal8;
			bottom_plane: metal4;
			lateral_capacitance (capacitance_template_WxS) {
				index_1 (" 0.1400, 0.2700, 0.2800, 0.5000, 0.5600, 0.9000, 1.5000 ");
				index_2 (" 0.1400, 0.2100, 0.2700, 0.3150, 0.4725, 0.5000, 0.7088, 0.9000,  \
				           1.0631, 1.5000, 1.5947, 2.3920, 3.5880, 5.3821, 538.2070 ");
				values  ("  0.06827,  0.04889,  0.03972,  0.03498,  0.02464,  0.02341,  0.01666,  0.01279,  \
				            0.01040,  0.00621,  0.00558,  0.00236,  0.00069,  0.00011,  0.00000,  0.07227,  \
				            0.05228,  0.04270,  0.03771,  0.02672,  0.02540,  0.01813,  0.01394,  0.01134,  \
				            0.00678,  0.00610,  0.00258,  0.00075,  0.00012,  0.00000,  0.07252,  0.05248,  \
				            0.04289,  0.03788,  0.02684,  0.02552,  0.01822,  0.01401,  0.01139,  0.00682,  \
				            0.00613,  0.00260,  0.00076,  0.00012,  0.00000,  0.07621,  0.05565,  0.04570,  \
				            0.04047,  0.02885,  0.02744,  0.01966,  0.01514,  0.01233,  0.00740,  0.00666,  \
				            0.00283,  0.00083,  0.00013,  0.00000,  0.07683,  0.05620,  0.04620,  0.04093,  \
				            0.02921,  0.02780,  0.01993,  0.01535,  0.01251,  0.00751,  0.00676,  0.00288,  \
				            0.00084,  0.00014,  0.00000,  0.07915,  0.05825,  0.04805,  0.04265,  0.03057,  \
				            0.02910,  0.02093,  0.01615,  0.01318,  0.00794,  0.00715,  0.00305,  0.00089,  \
				            0.00015,  0.00000,  0.08072,  0.05965,  0.04933,  0.04385,  0.03154,  0.03004,  \
				            0.02166,  0.01674,  0.01367,  0.00825,  0.00743,  0.00318,  0.00093,  0.00016,  \
				            0.00000 ");
			}
			ground_capacitance (capacitance_template_WxS) {
				index_1 (" 0.1400, 0.2700, 0.2800, 0.5000, 0.5600, 0.9000, 1.5000 ");
				index_2 (" 0.1400, 0.2100, 0.2700, 0.3150, 0.4725, 0.5000, 0.7088, 0.9000,  \
				           1.0631, 1.5000, 1.5947, 2.3920, 3.5880, 5.3821, 538.2070 ");
				values  ("  0.01473,  0.01728,  0.01926,  0.02066,  0.02508,  0.02579,  0.03067,  0.03449,  \
				            0.03730,  0.04314,  0.04413,  0.04969,  0.05293,  0.05404,  0.05427,  0.01908,  \
				            0.02143,  0.02334,  0.02473,  0.02924,  0.02998,  0.03513,  0.03920,  0.04223,  \
				            0.04852,  0.04960,  0.05565,  0.05919,  0.06039,  0.06064,  0.01940,  0.02174,  \
				            0.02365,  0.02504,  0.02957,  0.03031,  0.03547,  0.03956,  0.04261,  0.04892,  \
				            0.05001,  0.05609,  0.05965,  0.06085,  0.06111,  0.02647,  0.02881,  0.03076,  \
				            0.03218,  0.03688,  0.03766,  0.04311,  0.04746,  0.05071,  0.05748,  0.05864,  \
				            0.06522,  0.06909,  0.07039,  0.07067,  0.02845,  0.03080,  0.03275,  0.03419,  \
				            0.03893,  0.03970,  0.04522,  0.04962,  0.05290,  0.05975,  0.06093,  0.06760,  \
				            0.07153,  0.07286,  0.07314,  0.04009,  0.04249,  0.04449,  0.04596,  0.05085,  \
				            0.05166,  0.05738,  0.06196,  0.06538,  0.07256,  0.07379,  0.08082,  0.08497,  \
				            0.08639,  0.08669,  0.06164,  0.06408,  0.06613,  0.06763,  0.07263,  0.07346,  \
				            0.07933,  0.08404,  0.08756,  0.09498,  0.09625,  0.10354,  0.10787,  0.10947,  \
				            0.10966 ");
			}
		}

		capacitance () {
			top_plane: metal8;
			bottom_plane: metal3;
			lateral_capacitance (capacitance_template_WxS) {
				index_1 (" 0.1400, 0.2700, 0.2800, 0.5000, 0.5600, 0.9000, 1.5000 ");
				index_2 (" 0.1400, 0.2100, 0.2700, 0.3150, 0.4725, 0.5000, 0.7088, 0.9000,  \
				           1.0631, 1.5000, 1.5947, 2.3920, 3.5880, 5.3821, 538.2070 ");
				values  ("  0.06912,  0.04985,  0.04076,  0.03608,  0.02592,  0.02473,  0.01813,  0.01433,  \
				            0.01195,  0.00762,  0.00695,  0.00329,  0.00111,  0.00022,  0.00000,  0.07336,  \
				            0.05348,  0.04400,  0.03907,  0.02826,  0.02697,  0.01984,  0.01569,  0.01307,  \
				            0.00835,  0.00761,  0.00359,  0.00122,  0.00024,  0.00000,  0.07363,  0.05371,  \
				            0.04421,  0.03926,  0.02841,  0.02711,  0.01995,  0.01578,  0.01315,  0.00839,  \
				            0.00765,  0.00361,  0.00122,  0.00024,  0.00000,  0.07777,  0.05732,  0.04745,  \
				            0.04226,  0.03078,  0.02939,  0.02168,  0.01716,  0.01430,  0.00913,  0.00833,  \
				            0.00393,  0.00133,  0.00027,  0.00000,  0.07851,  0.05797,  0.04804,  0.04282,  \
				            0.03122,  0.02982,  0.02201,  0.01742,  0.01452,  0.00927,  0.00845,  0.00400,  \
				            0.00135,  0.00027,  0.00000,  0.08133,  0.06048,  0.05032,  0.04494,  0.03291,  \
				            0.03145,  0.02326,  0.01842,  0.01536,  0.00981,  0.00895,  0.00423,  0.00143,  \
				            0.00029,  0.00000,  0.08329,  0.06223,  0.05191,  0.04643,  0.03411,  0.03260,  \
				            0.02415,  0.01914,  0.01596,  0.01020,  0.00930,  0.00440,  0.00149,  0.00031,  \
				            0.00000 ");
			}
			ground_capacitance (capacitance_template_WxS) {
				index_1 (" 0.1400, 0.2700, 0.2800, 0.5000, 0.5600, 0.9000, 1.5000 ");
				index_2 (" 0.1400, 0.2100, 0.2700, 0.3150, 0.4725, 0.5000, 0.7088, 0.9000,  \
				           1.0631, 1.5000, 1.5947, 2.3920, 3.5880, 5.3821, 538.2070 ");
				values  ("  0.01253,  0.01472,  0.01639,  0.01756,  0.02118,  0.02175,  0.02572,  0.02890,  \
				            0.03132,  0.03667,  0.03763,  0.04351,  0.04756,  0.04928,  0.04974,  0.01610,  \
				            0.01801,  0.01954,  0.02065,  0.02424,  0.02483,  0.02900,  0.03239,  0.03502,  \
				            0.04080,  0.04185,  0.04826,  0.05269,  0.05455,  0.05505,  0.01635,  0.01825,  \
				            0.01978,  0.02088,  0.02448,  0.02507,  0.02925,  0.03266,  0.03530,  0.04111,  \
				            0.04217,  0.04861,  0.05306,  0.05493,  0.05543,  0.02170,  0.02352,  0.02504,  \
				            0.02615,  0.02987,  0.03049,  0.03493,  0.03860,  0.04143,  0.04772,  0.04886,  \
				            0.05585,  0.06068,  0.06271,  0.06326,  0.02316,  0.02499,  0.02652,  0.02764,  \
				            0.03139,  0.03201,  0.03651,  0.04023,  0.04310,  0.04948,  0.05063,  0.05773,  \
				            0.06263,  0.06470,  0.06526,  0.03187,  0.03374,  0.03531,  0.03647,  0.04038,  \
				            0.04104,  0.04576,  0.04967,  0.05269,  0.05942,  0.06064,  0.06813,  0.07332,  \
				            0.07551,  0.07610,  0.04834,  0.05026,  0.05189,  0.05309,  0.05713,  0.05782,  \
				            0.06271,  0.06677,  0.06991,  0.07688,  0.07815,  0.08593,  0.09133,  0.09372,  \
				            0.09423 ");
			}
		}

		capacitance () {
			top_plane: metal8;
			bottom_plane: metal2;
			lateral_capacitance (capacitance_template_WxS) {
				index_1 (" 0.1400, 0.2700, 0.2800, 0.5000, 0.5600, 0.9000, 1.5000 ");
				index_2 (" 0.1400, 0.2100, 0.2700, 0.3150, 0.4725, 0.5000, 0.7088, 0.9000,  \
				           1.0631, 1.5000, 1.5947, 2.3920, 3.5880, 5.3821, 538.2070 ");
				values  ("  0.06946,  0.05023,  0.04117,  0.03651,  0.02642,  0.02523,  0.01872,  0.01497,  \
				            0.01261,  0.00828,  0.00760,  0.00380,  0.00139,  0.00031,  0.00000,  0.07378,  \
				            0.05394,  0.04449,  0.03959,  0.02886,  0.02758,  0.02053,  0.01643,  0.01383,  \
				            0.00909,  0.00834,  0.00415,  0.00152,  0.00034,  0.00000,  0.07405,  0.05417,  \
				            0.04470,  0.03978,  0.02901,  0.02773,  0.02065,  0.01652,  0.01391,  0.00914,  \
				            0.00838,  0.00418,  0.00153,  0.00034,  0.00000,  0.07836,  0.05795,  0.04812,  \
				            0.04296,  0.03155,  0.03018,  0.02253,  0.01804,  0.01519,  0.00997,  0.00915,  \
				            0.00456,  0.00166,  0.00037,  0.00000,  0.07914,  0.05865,  0.04876,  0.04356,  \
				            0.03204,  0.03065,  0.02290,  0.01833,  0.01544,  0.01014,  0.00930,  0.00463,  \
				            0.00169,  0.00038,  0.00000,  0.08221,  0.06139,  0.05126,  0.04590,  0.03392,  \
				            0.03246,  0.02430,  0.01947,  0.01639,  0.01077,  0.00988,  0.00492,  0.00180,  \
				            0.00040,  0.00000,  0.08444,  0.06339,  0.05309,  0.04762,  0.03531,  0.03380,  \
				            0.02535,  0.02031,  0.01711,  0.01123,  0.01030,  0.00513,  0.00187,  0.00043,  \
				            0.00000 ");
			}
			ground_capacitance (capacitance_template_WxS) {
				index_1 (" 0.1400, 0.2700, 0.2800, 0.5000, 0.5600, 0.9000, 1.5000 ");
				index_2 (" 0.1400, 0.2100, 0.2700, 0.3150, 0.4725, 0.5000, 0.7088, 0.9000,  \
				           1.0631, 1.5000, 1.5947, 2.3920, 3.5880, 5.3821, 538.2070 ");
				values  ("  0.01167,  0.01374,  0.01532,  0.01641,  0.01976,  0.02029,  0.02392,  0.02683,  \
				            0.02906,  0.03409,  0.03502,  0.04088,  0.04526,  0.04733,  0.04797,  0.01503,  \
				            0.01678,  0.01819,  0.01920,  0.02246,  0.02300,  0.02677,  0.02987,  0.03229,  \
				            0.03774,  0.03875,  0.04516,  0.04995,  0.05220,  0.05290,  0.01526,  0.01700,  \
				            0.01840,  0.01941,  0.02267,  0.02321,  0.02699,  0.03011,  0.03254,  0.03802,  \
				            0.03903,  0.04548,  0.05028,  0.05255,  0.05325,  0.02003,  0.02167,  0.02304,  \
				            0.02404,  0.02738,  0.02794,  0.03196,  0.03531,  0.03792,  0.04387,  0.04498,  \
				            0.05199,  0.05722,  0.05968,  0.06045,  0.02132,  0.02296,  0.02433,  0.02534,  \
				            0.02871,  0.02927,  0.03334,  0.03674,  0.03940,  0.04544,  0.04656,  0.05368,  \
				            0.05900,  0.06150,  0.06228,  0.02896,  0.03063,  0.03204,  0.03308,  0.03659,  \
				            0.03719,  0.04148,  0.04508,  0.04789,  0.05429,  0.05548,  0.06303,  0.06867,  \
				            0.07133,  0.07216,  0.04351,  0.04524,  0.04670,  0.04778,  0.05144,  0.05206,  \
				            0.05654,  0.06029,  0.06323,  0.06991,  0.07115,  0.07902,  0.08491,  0.08779,  \
				            0.08854 ");
			}
		}

		capacitance () {
			top_plane: metal8;
			bottom_plane: SUBSTRATE;
			lateral_capacitance (capacitance_template_WxS) {
				index_1 (" 0.1400, 0.2700, 0.2800, 0.5000, 0.5600, 0.9000, 1.5000 ");
				index_2 (" 0.1400, 0.2100, 0.2700, 0.3150, 0.4725, 0.5000, 0.7088, 0.9000,  \
				           1.0631, 1.5000, 1.5947, 2.3920, 3.5880, 5.3821, 538.2070 ");
				values  ("  0.07003,  0.05085,  0.04182,  0.03719,  0.02718,  0.02601,  0.01962,  0.01596,  \
				            0.01367,  0.00942,  0.00874,  0.00481,  0.00204,  0.00057,  0.00000,  0.07442,  \
				            0.05464,  0.04524,  0.04037,  0.02977,  0.02851,  0.02160,  0.01760,  0.01506,  \
				            0.01038,  0.00963,  0.00528,  0.00224,  0.00063,  0.00000,  0.07470,  0.05488,  \
				            0.04546,  0.04058,  0.02993,  0.02867,  0.02173,  0.01770,  0.01515,  0.01044,  \
				            0.00969,  0.00532,  0.00225,  0.00063,  0.00000,  0.07923,  0.05890,  0.04912,  \
				            0.04401,  0.03274,  0.03139,  0.02388,  0.01948,  0.01668,  0.01150,  0.01066,  \
				            0.00584,  0.00248,  0.00070,  0.00000,  0.08009,  0.05968,  0.04984,  0.04469,  \
				            0.03330,  0.03193,  0.02431,  0.01984,  0.01699,  0.01171,  0.01086,  0.00595,  \
				            0.00252,  0.00071,  0.00000,  0.08358,  0.06283,  0.05275,  0.04742,  0.03556,  \
				            0.03412,  0.02606,  0.02128,  0.01823,  0.01257,  0.01165,  0.00638,  0.00271,  \
				            0.00076,  0.00000,  0.08640,  0.06540,  0.05512,  0.04967,  0.03743,  0.03593,  \
				            0.02752,  0.02249,  0.01927,  0.01328,  0.01231,  0.00674,  0.00286,  0.00081,  \
				            0.00000 ");
			}
			ground_capacitance (capacitance_template_WxS) {
				index_1 (" 0.1400, 0.2700, 0.2800, 0.5000, 0.5600, 0.9000, 1.5000 ");
				index_2 (" 0.1400, 0.2100, 0.2700, 0.3150, 0.4725, 0.5000, 0.7088, 0.9000,  \
				           1.0631, 1.5000, 1.5947, 2.3920, 3.5880, 5.3821, 538.2070 ");
				values  ("  0.01025,  0.01216,  0.01362,  0.01462,  0.01765,  0.01811,  0.02127,  0.02376,  \
				            0.02567,  0.03008,  0.03092,  0.03650,  0.04127,  0.04404,  0.04521,  0.01337,  \
				            0.01494,  0.01619,  0.01707,  0.01989,  0.02035,  0.02354,  0.02616,  0.02823,  \
				            0.03300,  0.03392,  0.04003,  0.04526,  0.04828,  0.04957,  0.01357,  0.01513,  \
				            0.01637,  0.01725,  0.02006,  0.02052,  0.02372,  0.02635,  0.02842,  0.03322,  \
				            0.03414,  0.04029,  0.04554,  0.04859,  0.04988,  0.01766,  0.01905,  0.02019,  \
				            0.02103,  0.02382,  0.02428,  0.02764,  0.03046,  0.03269,  0.03792,  0.03892,  \
				            0.04565,  0.05141,  0.05474,  0.05616,  0.01871,  0.02009,  0.02123,  0.02207,  \
				            0.02487,  0.02533,  0.02873,  0.03159,  0.03386,  0.03918,  0.04020,  0.04704,  \
				            0.05290,  0.05630,  0.05775,  0.02483,  0.02620,  0.02736,  0.02822,  0.03111,  \
				            0.03161,  0.03518,  0.03823,  0.04065,  0.04633,  0.04742,  0.05475,  0.06103,  \
				            0.06467,  0.06622,  0.03646,  0.03788,  0.03908,  0.03997,  0.04301,  0.04352,  \
				            0.04729,  0.05050,  0.05306,  0.05907,  0.06022,  0.06797,  0.07459,  0.07853,  \
				            0.08007 ");
			}
		}

		capacitance () {
			top_plane: metal9;
			bottom_plane: metal5;
			lateral_capacitance (capacitance_template_WxS) {
				index_1 (" 0.1400, 0.2700, 0.2800, 0.5000, 0.5600, 0.9000, 1.5000 ");
				index_2 (" 0.1400, 0.2100, 0.2700, 0.3150, 0.4725, 0.5000, 0.7088, 0.9000,  \
				           1.0631, 1.5000, 1.5947, 2.3920, 3.5880, 5.3821, 538.2070 ");
				values  ("  0.06435,  0.04454,  0.03510,  0.03021,  0.01969,  0.01847,  0.01203,  0.00866,  \
				            0.00674,  0.00375,  0.00335,  0.00144,  0.00049,  0.00012,  0.00000,  0.06721,  \
				            0.04695,  0.03725,  0.03221,  0.02128,  0.02001,  0.01324,  0.00964,  0.00757,  \
				            0.00429,  0.00385,  0.00168,  0.00058,  0.00014,  0.00000,  0.06739,  0.04710,  \
				            0.03739,  0.03233,  0.02138,  0.02011,  0.01332,  0.00971,  0.00762,  0.00433,  \
				            0.00388,  0.00169,  0.00059,  0.00014,  0.00000,  0.07013,  0.04955,  0.03964,  \
				            0.03446,  0.02317,  0.02184,  0.01473,  0.01089,  0.00864,  0.00502,  0.00451,  \
				            0.00202,  0.00071,  0.00017,  0.00000,  0.07064,  0.05003,  0.04009,  0.03489,  \
				            0.02355,  0.02221,  0.01504,  0.01115,  0.00887,  0.00518,  0.00466,  0.00209,  \
				            0.00074,  0.00018,  0.00000,  0.07295,  0.05217,  0.04211,  0.03682,  0.02523,  \
				            0.02385,  0.01641,  0.01232,  0.00990,  0.00590,  0.00533,  0.00245,  0.00088,  \
				            0.00021,  0.00000,  0.07527,  0.05435,  0.04418,  0.03882,  0.02700,  0.02558,  \
				            0.01790,  0.01361,  0.01103,  0.00672,  0.00609,  0.00286,  0.00105,  0.00026,  \
				            0.00000 ");
			}
			ground_capacitance (capacitance_template_WxS) {
				index_1 (" 0.1400, 0.2700, 0.2800, 0.5000, 0.5600, 0.9000, 1.5000 ");
				index_2 (" 0.1400, 0.2100, 0.2700, 0.3150, 0.4725, 0.5000, 0.7088, 0.9000,  \
				           1.0631, 1.5000, 1.5947, 2.3920, 3.5880, 5.3821, 538.2070 ");
				values  ("  0.02683,  0.03188,  0.03579,  0.03851,  0.04650,  0.04769,  0.05498,  0.05973,  \
				            0.06275,  0.06779,  0.06854,  0.07213,  0.07399,  0.07476,  0.07500,  0.03757,  \
				            0.04251,  0.04636,  0.04906,  0.05707,  0.05827,  0.06576,  0.07073,  0.07395,  \
				            0.07942,  0.08024,  0.08430,  0.08646,  0.08733,  0.08762,  0.03839,  0.04332,  \
				            0.04717,  0.04987,  0.05787,  0.05908,  0.06658,  0.07156,  0.07479,  0.08029,  \
				            0.08112,  0.08521,  0.08739,  0.08827,  0.08856,  0.05622,  0.06105,  0.06484,  \
				            0.06752,  0.07554,  0.07676,  0.08445,  0.08967,  0.09309,  0.09909,  0.10001,  \
				            0.10466,  0.10723,  0.10828,  0.10864,  0.06104,  0.06586,  0.06964,  0.07231,  \
				            0.08034,  0.08156,  0.08929,  0.09455,  0.09802,  0.10412,  0.10506,  0.10984,  \
				            0.11249,  0.11359,  0.11396,  0.08840,  0.09316,  0.09693,  0.09959,  0.10766,  \
				            0.10890,  0.11680,  0.12227,  0.12593,  0.13248,  0.13352,  0.13885,  0.14193,  \
				            0.14324,  0.14368,  0.13684,  0.14161,  0.14537,  0.14805,  0.15619,  0.15745,  \
				            0.16554,  0.17122,  0.17507,  0.18211,  0.18324,  0.18920,  0.19275,  0.19434,  \
				            0.19483 ");
			}
		}

		capacitance () {
			top_plane: metal9;
			bottom_plane: metal4;
			lateral_capacitance (capacitance_template_WxS) {
				index_1 (" 0.1400, 0.2700, 0.2800, 0.5000, 0.5600, 0.9000, 1.5000 ");
				index_2 (" 0.1400, 0.2100, 0.2700, 0.3150, 0.4725, 0.5000, 0.7088, 0.9000,  \
				           1.0631, 1.5000, 1.5947, 2.3920, 3.5880, 5.3821, 538.2070 ");
				values  ("  0.06883,  0.04949,  0.04034,  0.03562,  0.02535,  0.02414,  0.01751,  0.01374,  \
				            0.01142,  0.00733,  0.00671,  0.00339,  0.00136,  0.00038,  0.00000,  0.07288,  \
				            0.05293,  0.04341,  0.03844,  0.02757,  0.02628,  0.01917,  0.01510,  0.01257,  \
				            0.00812,  0.00744,  0.00378,  0.00152,  0.00043,  0.00000,  0.07313,  0.05315,  \
				            0.04360,  0.03862,  0.02771,  0.02641,  0.01927,  0.01518,  0.01265,  0.00817,  \
				            0.00749,  0.00380,  0.00153,  0.00043,  0.00000,  0.07704,  0.05656,  0.04668,  \
				            0.04149,  0.03003,  0.02865,  0.02105,  0.01666,  0.01392,  0.00907,  0.00832,  \
				            0.00427,  0.00174,  0.00050,  0.00000,  0.07774,  0.05719,  0.04726,  0.04204,  \
				            0.03048,  0.02910,  0.02141,  0.01696,  0.01419,  0.00926,  0.00850,  0.00437,  \
				            0.00179,  0.00051,  0.00000,  0.08057,  0.05975,  0.04963,  0.04428,  0.03237,  \
				            0.03093,  0.02292,  0.01825,  0.01532,  0.01009,  0.00928,  0.00483,  0.00199,  \
				            0.00057,  0.00000,  0.08303,  0.06203,  0.05177,  0.04633,  0.03416,  0.03268,  \
				            0.02441,  0.01954,  0.01648,  0.01095,  0.01009,  0.00531,  0.00221,  0.00065,  \
				            0.00000 ");
			}
			ground_capacitance (capacitance_template_WxS) {
				index_1 (" 0.1400, 0.2700, 0.2800, 0.5000, 0.5600, 0.9000, 1.5000 ");
				index_2 (" 0.1400, 0.2100, 0.2700, 0.3150, 0.4725, 0.5000, 0.7088, 0.9000,  \
				           1.0631, 1.5000, 1.5947, 2.3920, 3.5880, 5.3821, 538.2070 ");
				values  ("  0.01334,  0.01576,  0.01765,  0.01898,  0.02313,  0.02379,  0.02823,  0.03165,  \
				            0.03416,  0.03943,  0.04035,  0.04574,  0.04949,  0.05136,  0.05214,  0.01753,  \
				            0.01972,  0.02149,  0.02276,  0.02685,  0.02751,  0.03209,  0.03568,  0.03837,  \
				            0.04401,  0.04501,  0.05091,  0.05506,  0.05714,  0.05802,  0.01783,  0.02001,  \
				            0.02177,  0.02305,  0.02714,  0.02780,  0.03238,  0.03599,  0.03868,  0.04436,  \
				            0.04535,  0.05129,  0.05546,  0.05755,  0.05844,  0.02426,  0.02635,  0.02808,  \
				            0.02933,  0.03346,  0.03414,  0.03889,  0.04268,  0.04553,  0.05161,  0.05269,  \
				            0.05917,  0.06381,  0.06616,  0.06718,  0.02600,  0.02808,  0.02980,  0.03106,  \
				            0.03520,  0.03588,  0.04067,  0.04449,  0.04737,  0.05353,  0.05463,  0.06122,  \
				            0.06596,  0.06838,  0.06942,  0.03601,  0.03809,  0.03981,  0.04108,  0.04528,  \
				            0.04598,  0.05089,  0.05486,  0.05786,  0.06435,  0.06550,  0.07258,  0.07776,  \
				            0.08045,  0.08162,  0.05418,  0.05626,  0.05800,  0.05928,  0.06353,  0.06424,  \
				            0.06928,  0.07337,  0.07649,  0.08329,  0.08452,  0.09209,  0.09773,  0.10083,  \
				            0.10203 ");
			}
		}

		capacitance () {
			top_plane: metal9;
			bottom_plane: metal3;
			lateral_capacitance (capacitance_template_WxS) {
				index_1 (" 0.1400, 0.2700, 0.2800, 0.5000, 0.5600, 0.9000, 1.5000 ");
				index_2 (" 0.1400, 0.2100, 0.2700, 0.3150, 0.4725, 0.5000, 0.7088, 0.9000,  \
				           1.0631, 1.5000, 1.5947, 2.3920, 3.5880, 5.3821, 538.2070 ");
				values  ("  0.06977,  0.05054,  0.04149,  0.03683,  0.02674,  0.02555,  0.01908,  0.01538,  \
				            0.01308,  0.00890,  0.00824,  0.00453,  0.00199,  0.00063,  0.00000,  0.07407,  \
				            0.05423,  0.04480,  0.03990,  0.02921,  0.02794,  0.02097,  0.01695,  0.01442,  \
				            0.00984,  0.00911,  0.00501,  0.00222,  0.00070,  0.00000,  0.07434,  0.05447,  \
				            0.04501,  0.04009,  0.02937,  0.02809,  0.02109,  0.01705,  0.01451,  0.00990,  \
				            0.00917,  0.00504,  0.00223,  0.00070,  0.00000,  0.07868,  0.05830,  0.04849,  \
				            0.04336,  0.03204,  0.03068,  0.02315,  0.01877,  0.01600,  0.01096,  0.01016,  \
				            0.00562,  0.00250,  0.00079,  0.00000,  0.07949,  0.05904,  0.04917,  0.04400,  \
				            0.03257,  0.03120,  0.02357,  0.01912,  0.01631,  0.01118,  0.01037,  0.00574,  \
				            0.00256,  0.00081,  0.00000,  0.08281,  0.06204,  0.05195,  0.04663,  0.03477,  \
				            0.03333,  0.02532,  0.02060,  0.01761,  0.01213,  0.01126,  0.00627,  0.00281,  \
				            0.00090,  0.00000,  0.08565,  0.06466,  0.05440,  0.04896,  0.03678,  0.03529,  \
				            0.02696,  0.02202,  0.01887,  0.01306,  0.01214,  0.00681,  0.00307,  0.00099,  \
				            0.00000 ");
			}
			ground_capacitance (capacitance_template_WxS) {
				index_1 (" 0.1400, 0.2700, 0.2800, 0.5000, 0.5600, 0.9000, 1.5000 ");
				index_2 (" 0.1400, 0.2100, 0.2700, 0.3150, 0.4725, 0.5000, 0.7088, 0.9000,  \
				           1.0631, 1.5000, 1.5947, 2.3920, 3.5880, 5.3821, 538.2070 ");
				values  ("  0.01092,  0.01296,  0.01453,  0.01562,  0.01897,  0.01950,  0.02304,  0.02580,  \
				            0.02788,  0.03251,  0.03337,  0.03883,  0.04325,  0.04583,  0.04710,  0.01433,  \
				            0.01607,  0.01746,  0.01846,  0.02163,  0.02215,  0.02573,  0.02862,  0.03085,  \
				            0.03583,  0.03676,  0.04273,  0.04759,  0.05043,  0.05185,  0.01456,  0.01629,  \
				            0.01767,  0.01866,  0.02183,  0.02235,  0.02594,  0.02883,  0.03107,  0.03608,  \
				            0.03701,  0.04301,  0.04790,  0.05076,  0.05219,  0.01931,  0.02088,  0.02218,  \
				            0.02313,  0.02627,  0.02679,  0.03050,  0.03357,  0.03595,  0.04135,  0.04236,  \
				            0.04891,  0.05431,  0.05750,  0.05910,  0.02054,  0.02210,  0.02340,  0.02435,  \
				            0.02749,  0.02801,  0.03176,  0.03486,  0.03727,  0.04275,  0.04378,  0.05044,  \
				            0.05595,  0.05921,  0.06085,  0.02765,  0.02920,  0.03050,  0.03145,  0.03466,  \
				            0.03520,  0.03909,  0.04233,  0.04487,  0.05068,  0.05177,  0.05891,  0.06487,  \
				            0.06845,  0.07026,  0.04078,  0.04235,  0.04366,  0.04464,  0.04793,  0.04849,  \
				            0.05250,  0.05588,  0.05853,  0.06464,  0.06580,  0.07340,  0.07982,  0.08382,  \
				            0.08572 ");
			}
		}

		capacitance () {
			top_plane: metal9;
			bottom_plane: metal2;
			lateral_capacitance (capacitance_template_WxS) {
				index_1 (" 0.1400, 0.2700, 0.2800, 0.5000, 0.5600, 0.9000, 1.5000 ");
				index_2 (" 0.1400, 0.2100, 0.2700, 0.3150, 0.4725, 0.5000, 0.7088, 0.9000,  \
				           1.0631, 1.5000, 1.5947, 2.3920, 3.5880, 5.3821, 538.2070 ");
				values  ("  0.07015,  0.05097,  0.04194,  0.03731,  0.02729,  0.02611,  0.01971,  0.01607,  \
				            0.01380,  0.00963,  0.00896,  0.00514,  0.00238,  0.00080,  0.00000,  0.07453,  \
				            0.05474,  0.04534,  0.04046,  0.02985,  0.02860,  0.02171,  0.01773,  0.01523,  \
				            0.01065,  0.00992,  0.00568,  0.00264,  0.00089,  0.00000,  0.07481,  0.05498,  \
				            0.04555,  0.04067,  0.03002,  0.02876,  0.02183,  0.01784,  0.01532,  0.01071,  \
				            0.00998,  0.00572,  0.00266,  0.00089,  0.00000,  0.07931,  0.05898,  0.04921,  \
				            0.04410,  0.03285,  0.03150,  0.02405,  0.01969,  0.01694,  0.01187,  0.01106,  \
				            0.00635,  0.00297,  0.00100,  0.00000,  0.08016,  0.05976,  0.04993,  0.04478,  \
				            0.03342,  0.03206,  0.02450,  0.02008,  0.01728,  0.01212,  0.01129,  0.00649,  \
				            0.00304,  0.00102,  0.00000,  0.08373,  0.06299,  0.05293,  0.04762,  0.03581,  \
				            0.03438,  0.02640,  0.02169,  0.01870,  0.01315,  0.01226,  0.00708,  0.00332,  \
				            0.00112,  0.00000,  0.08683,  0.06585,  0.05561,  0.05017,  0.03800,  0.03651,  \
				            0.02819,  0.02322,  0.02006,  0.01416,  0.01321,  0.00766,  0.00361,  0.00124,  \
				            0.00000 ");
			}
			ground_capacitance (capacitance_template_WxS) {
				index_1 (" 0.1400, 0.2700, 0.2800, 0.5000, 0.5600, 0.9000, 1.5000 ");
				index_2 (" 0.1400, 0.2100, 0.2700, 0.3150, 0.4725, 0.5000, 0.7088, 0.9000,  \
				           1.0631, 1.5000, 1.5947, 2.3920, 3.5880, 5.3821, 538.2070 ");
				values  ("  0.00996,  0.01186,  0.01332,  0.01433,  0.01741,  0.01789,  0.02110,  0.02358,  \
				            0.02546,  0.02973,  0.03053,  0.03585,  0.04050,  0.04345,  0.04506,  0.01312,  \
				            0.01472,  0.01598,  0.01688,  0.01973,  0.02019,  0.02338,  0.02596,  0.02797,  \
				            0.03256,  0.03343,  0.03925,  0.04435,  0.04760,  0.04939,  0.01333,  0.01491,  \
				            0.01617,  0.01706,  0.01990,  0.02036,  0.02356,  0.02614,  0.02816,  0.03277,  \
				            0.03365,  0.03950,  0.04463,  0.04789,  0.04970,  0.01754,  0.01893,  0.02008,  \
				            0.02091,  0.02368,  0.02414,  0.02742,  0.03015,  0.03230,  0.03729,  0.03824,  \
				            0.04464,  0.05029,  0.05392,  0.05594,  0.01860,  0.01998,  0.02112,  0.02195,  \
				            0.02471,  0.02517,  0.02848,  0.03125,  0.03343,  0.03849,  0.03946,  0.04598,  \
				            0.05174,  0.05545,  0.05751,  0.02467,  0.02602,  0.02715,  0.02798,  0.03080,  \
				            0.03127,  0.03472,  0.03763,  0.03993,  0.04532,  0.04636,  0.05335,  0.05959,  \
				            0.06364,  0.06591,  0.03591,  0.03727,  0.03843,  0.03928,  0.04218,  0.04268,  \
				            0.04626,  0.04931,  0.05173,  0.05744,  0.05853,  0.06599,  0.07270,  0.07718,  \
				            0.07957 ");
			}
		}

		capacitance () {
			top_plane: metal9;
			bottom_plane: SUBSTRATE;
			lateral_capacitance (capacitance_template_WxS) {
				index_1 (" 0.1400, 0.2700, 0.2800, 0.5000, 0.5600, 0.9000, 1.5000 ");
				index_2 (" 0.1400, 0.2100, 0.2700, 0.3150, 0.4725, 0.5000, 0.7088, 0.9000,  \
				           1.0631, 1.5000, 1.5947, 2.3920, 3.5880, 5.3821, 538.2070 ");
				values  ("  0.07080,  0.05169,  0.04271,  0.03810,  0.02818,  0.02702,  0.02073,  0.01718,  \
				            0.01497,  0.01090,  0.01025,  0.00634,  0.00327,  0.00126,  0.00000,  0.07529,  \
				            0.05556,  0.04620,  0.04137,  0.03087,  0.02964,  0.02288,  0.01901,  0.01657,  \
				            0.01208,  0.01135,  0.00701,  0.00362,  0.00140,  0.00000,  0.07557,  0.05581,  \
				            0.04643,  0.04158,  0.03105,  0.02981,  0.02302,  0.01913,  0.01668,  0.01216,  \
				            0.01143,  0.00706,  0.00364,  0.00140,  0.00000,  0.08029,  0.06002,  0.05031,  \
				            0.04524,  0.03413,  0.03280,  0.02549,  0.02123,  0.01854,  0.01353,  0.01272,  \
				            0.00785,  0.00406,  0.00157,  0.00000,  0.08121,  0.06087,  0.05111,  0.04600,  \
				            0.03477,  0.03343,  0.02601,  0.02168,  0.01894,  0.01382,  0.01299,  0.00803,  \
				            0.00415,  0.00160,  0.00000,  0.08518,  0.06451,  0.05450,  0.04922,  0.03753,  \
				            0.03611,  0.02824,  0.02360,  0.02063,  0.01508,  0.01418,  0.00877,  0.00453,  \
				            0.00175,  0.00000,  0.08884,  0.06791,  0.05769,  0.05228,  0.04017,  0.03869,  \
				            0.03041,  0.02547,  0.02229,  0.01633,  0.01535,  0.00950,  0.00492,  0.00192,  \
				            0.00000 ");
			}
			ground_capacitance (capacitance_template_WxS) {
				index_1 (" 0.1400, 0.2700, 0.2800, 0.5000, 0.5600, 0.9000, 1.5000 ");
				index_2 (" 0.1400, 0.2100, 0.2700, 0.3150, 0.4725, 0.5000, 0.7088, 0.9000,  \
				           1.0631, 1.5000, 1.5947, 2.3920, 3.5880, 5.3821, 538.2070 ");
				values  ("  0.00835,  0.01004,  0.01134,  0.01225,  0.01497,  0.01539,  0.01814,  0.02021,  \
				            0.02177,  0.02534,  0.02603,  0.03084,  0.03562,  0.03922,  0.04173,  0.01119,  \
				            0.01259,  0.01368,  0.01445,  0.01687,  0.01725,  0.01988,  0.02197,  0.02361,  \
				            0.02743,  0.02818,  0.03345,  0.03869,  0.04265,  0.04542,  0.01138,  0.01276,  \
				            0.01384,  0.01461,  0.01700,  0.01739,  0.02001,  0.02211,  0.02375,  0.02759,  \
				            0.02834,  0.03364,  0.03891,  0.04289,  0.04568,  0.01491,  0.01606,  0.01699,  \
				            0.01767,  0.01988,  0.02025,  0.02286,  0.02505,  0.02678,  0.03094,  0.03176,  \
				            0.03758,  0.04340,  0.04781,  0.05092,  0.01576,  0.01687,  0.01779,  0.01845,  \
				            0.02065,  0.02101,  0.02364,  0.02585,  0.02761,  0.03184,  0.03267,  0.03860,  \
				            0.04454,  0.04904,  0.05222,  0.02035,  0.02141,  0.02229,  0.02294,  0.02514,  \
				            0.02551,  0.02823,  0.03056,  0.03243,  0.03697,  0.03787,  0.04428,  0.05073,  \
				            0.05564,  0.05912,  0.02873,  0.02979,  0.03069,  0.03135,  0.03363,  0.03402,  \
				            0.03687,  0.03934,  0.04134,  0.04620,  0.04716,  0.05407,  0.06103,  0.06643,  \
				            0.07012 ");
			}
		}

		capacitance () {
			top_plane: metal10;
			bottom_plane: metal5;
			lateral_capacitance (capacitance_template_WxS) {
				index_1 (" 0.1400, 0.2700, 0.2800, 0.5000, 0.5600, 0.9000, 1.5000 ");
				index_2 (" 0.1400, 0.2100, 0.2700, 0.3150, 0.4725, 0.5000, 0.7088, 0.9000,  \
				           1.0631, 1.5000, 1.5947, 2.3920, 3.5880, 5.3821, 538.2070 ");
				values  ("  0.06461,  0.04482,  0.03539,  0.03051,  0.02000,  0.01878,  0.01236,  0.00899,  \
				            0.00709,  0.00411,  0.00371,  0.00179,  0.00078,  0.00030,  0.00000,  0.06750,  \
				            0.04726,  0.03757,  0.03253,  0.02164,  0.02037,  0.01363,  0.01006,  0.00800,  \
				            0.00476,  0.00431,  0.00213,  0.00095,  0.00036,  0.00000,  0.06768,  0.04741,  \
				            0.03770,  0.03266,  0.02174,  0.02047,  0.01372,  0.01013,  0.00807,  0.00480,  \
				            0.00435,  0.00215,  0.00096,  0.00037,  0.00000,  0.07048,  0.04992,  0.04003,  \
				            0.03487,  0.02364,  0.02232,  0.01527,  0.01147,  0.00925,  0.00567,  0.00516,  \
				            0.00263,  0.00121,  0.00047,  0.00000,  0.07102,  0.05043,  0.04052,  0.03534,  \
				            0.02405,  0.02273,  0.01562,  0.01178,  0.00953,  0.00587,  0.00536,  0.00275,  \
				            0.00127,  0.00050,  0.00000,  0.07352,  0.05278,  0.04276,  0.03750,  0.02598,  \
				            0.02462,  0.01727,  0.01324,  0.01085,  0.00689,  0.00632,  0.00336,  0.00160,  \
				            0.00065,  0.00000,  0.07635,  0.05549,  0.04536,  0.04003,  0.02830,  0.02690,  \
				            0.01931,  0.01508,  0.01254,  0.00823,  0.00759,  0.00421,  0.00209,  0.00087,  \
				            0.00000 ");
			}
			ground_capacitance (capacitance_template_WxS) {
				index_1 (" 0.1400, 0.2700, 0.2800, 0.5000, 0.5600, 0.9000, 1.5000 ");
				index_2 (" 0.1400, 0.2100, 0.2700, 0.3150, 0.4725, 0.5000, 0.7088, 0.9000,  \
				           1.0631, 1.5000, 1.5947, 2.3920, 3.5880, 5.3821, 538.2070 ");
				values  ("  0.02616,  0.03115,  0.03502,  0.03772,  0.04564,  0.04682,  0.05404,  0.05874,  \
				            0.06172,  0.06667,  0.06741,  0.07098,  0.07294,  0.07392,  0.07452,  0.03683,  \
				            0.04171,  0.04551,  0.04818,  0.05608,  0.05727,  0.06463,  0.06950,  0.07265,  \
				            0.07798,  0.07879,  0.08282,  0.08511,  0.08625,  0.08699,  0.03764,  0.04251,  \
				            0.04631,  0.04898,  0.05687,  0.05806,  0.06543,  0.07031,  0.07347,  0.07883,  \
				            0.07965,  0.08371,  0.08602,  0.08717,  0.08792,  0.05529,  0.06004,  0.06376,  \
				            0.06638,  0.07422,  0.07541,  0.08288,  0.08793,  0.09125,  0.09706,  0.09796,  \
				            0.10258,  0.10534,  0.10677,  0.10773,  0.06004,  0.06476,  0.06847,  0.07108,  \
				            0.07890,  0.08009,  0.08758,  0.09267,  0.09602,  0.10193,  0.10285,  0.10760,  \
				            0.11046,  0.11196,  0.11298,  0.08680,  0.09144,  0.09509,  0.09766,  0.10545,  \
				            0.10664,  0.11423,  0.11948,  0.12298,  0.12931,  0.13032,  0.13566,  0.13905,  \
				            0.14091,  0.14222,  0.13368,  0.13826,  0.14187,  0.14443,  0.15221,  0.15341,  \
				            0.16111,  0.16653,  0.17020,  0.17701,  0.17812,  0.18418,  0.18826,  0.19067,  \
				            0.19238 ");
			}
		}

		capacitance () {
			top_plane: metal10;
			bottom_plane: metal4;
			lateral_capacitance (capacitance_template_WxS) {
				index_1 (" 0.1400, 0.2700, 0.2800, 0.5000, 0.5600, 0.9000, 1.5000 ");
				index_2 (" 0.1400, 0.2100, 0.2700, 0.3150, 0.4725, 0.5000, 0.7088, 0.9000,  \
				           1.0631, 1.5000, 1.5947, 2.3920, 3.5880, 5.3821, 538.2070 ");
				values  ("  0.06923,  0.04992,  0.04079,  0.03608,  0.02582,  0.02462,  0.01800,  0.01426,  \
				            0.01197,  0.00794,  0.00733,  0.00406,  0.00197,  0.00081,  0.00000,  0.07331,  \
				            0.05338,  0.04387,  0.03891,  0.02808,  0.02679,  0.01972,  0.01570,  0.01321,  \
				            0.00885,  0.00818,  0.00458,  0.00225,  0.00093,  0.00000,  0.07356,  0.05360,  \
				            0.04406,  0.03909,  0.02822,  0.02693,  0.01983,  0.01579,  0.01329,  0.00891,  \
				            0.00824,  0.00461,  0.00227,  0.00094,  0.00000,  0.07751,  0.05706,  0.04720,  \
				            0.04203,  0.03063,  0.02927,  0.02175,  0.01742,  0.01475,  0.01001,  0.00928,  \
				            0.00528,  0.00264,  0.00111,  0.00000,  0.07824,  0.05772,  0.04781,  0.04261,  \
				            0.03112,  0.02975,  0.02215,  0.01778,  0.01506,  0.01025,  0.00951,  0.00544,  \
				            0.00273,  0.00116,  0.00000,  0.08127,  0.06049,  0.05040,  0.04508,  0.03326,  \
				            0.03184,  0.02394,  0.01937,  0.01651,  0.01140,  0.01061,  0.00619,  0.00318,  \
				            0.00137,  0.00000,  0.08424,  0.06329,  0.05308,  0.04767,  0.03561,  0.03414,  \
				            0.02600,  0.02124,  0.01824,  0.01283,  0.01198,  0.00717,  0.00378,  0.00168,  \
				            0.00000 ");
			}
			ground_capacitance (capacitance_template_WxS) {
				index_1 (" 0.1400, 0.2700, 0.2800, 0.5000, 0.5600, 0.9000, 1.5000 ");
				index_2 (" 0.1400, 0.2100, 0.2700, 0.3150, 0.4725, 0.5000, 0.7088, 0.9000,  \
				           1.0631, 1.5000, 1.5947, 2.3920, 3.5880, 5.3821, 538.2070 ");
				values  ("  0.01234,  0.01468,  0.01651,  0.01781,  0.02187,  0.02251,  0.02686,  0.03018,  \
				            0.03260,  0.03761,  0.03848,  0.04359,  0.04733,  0.04950,  0.05112,  0.01645,  \
				            0.01858,  0.02030,  0.02153,  0.02550,  0.02614,  0.03055,  0.03397,  0.03652,  \
				            0.04182,  0.04275,  0.04832,  0.05246,  0.05490,  0.05677,  0.01675,  0.01887,  \
				            0.02058,  0.02181,  0.02578,  0.02642,  0.03083,  0.03426,  0.03681,  0.04213,  \
				            0.04306,  0.04867,  0.05283,  0.05529,  0.05717,  0.02304,  0.02504,  0.02669,  \
				            0.02789,  0.03181,  0.03245,  0.03692,  0.04046,  0.04310,  0.04873,  0.04973,  \
				            0.05582,  0.06047,  0.06329,  0.06553,  0.02471,  0.02670,  0.02834,  0.02953,  \
				            0.03344,  0.03408,  0.03856,  0.04212,  0.04478,  0.05047,  0.05148,  0.05767,  \
				            0.06243,  0.06535,  0.06766,  0.03416,  0.03609,  0.03770,  0.03887,  0.04275,  \
				            0.04339,  0.04791,  0.05153,  0.05427,  0.06021,  0.06127,  0.06791,  0.07317,  \
				            0.07651,  0.07925,  0.05074,  0.05264,  0.05422,  0.05538,  0.05923,  0.05987,  \
				            0.06440,  0.06809,  0.07091,  0.07710,  0.07822,  0.08537,  0.09123,  0.09522,  \
				            0.09846 ");
			}
		}

		capacitance () {
			top_plane: metal10;
			bottom_plane: metal3;
			lateral_capacitance (capacitance_template_WxS) {
				index_1 (" 0.1400, 0.2700, 0.2800, 0.5000, 0.5600, 0.9000, 1.5000 ");
				index_2 (" 0.1400, 0.2100, 0.2700, 0.3150, 0.4725, 0.5000, 0.7088, 0.9000,  \
				           1.0631, 1.5000, 1.5947, 2.3920, 3.5880, 5.3821, 538.2070 ");
				values  ("  0.07023,  0.05105,  0.04201,  0.03737,  0.02730,  0.02612,  0.01967,  0.01600,  \
				            0.01372,  0.00961,  0.00897,  0.00535,  0.00279,  0.00122,  0.00000,  0.07457,  \
				            0.05477,  0.04534,  0.04046,  0.02980,  0.02854,  0.02161,  0.01764,  0.01515,  \
				            0.01068,  0.00997,  0.00598,  0.00314,  0.00138,  0.00000,  0.07485,  0.05500,  \
				            0.04556,  0.04065,  0.02996,  0.02869,  0.02174,  0.01774,  0.01525,  0.01075,  \
				            0.01004,  0.00602,  0.00317,  0.00139,  0.00000,  0.07923,  0.05888,  0.04910,  \
				            0.04398,  0.03272,  0.03137,  0.02393,  0.01962,  0.01692,  0.01202,  0.01124,  \
				            0.00681,  0.00363,  0.00162,  0.00000,  0.08006,  0.05964,  0.04980,  0.04465,  \
				            0.03328,  0.03192,  0.02439,  0.02002,  0.01728,  0.01229,  0.01151,  0.00699,  \
				            0.00373,  0.00167,  0.00000,  0.08357,  0.06284,  0.05279,  0.04749,  0.03573,  \
				            0.03431,  0.02642,  0.02180,  0.01889,  0.01357,  0.01272,  0.00784,  0.00425,  \
				            0.00193,  0.00000,  0.08692,  0.06598,  0.05577,  0.05037,  0.03829,  0.03682,  \
				            0.02863,  0.02379,  0.02072,  0.01507,  0.01416,  0.00888,  0.00491,  0.00228,  \
				            0.00000 ");
			}
			ground_capacitance (capacitance_template_WxS) {
				index_1 (" 0.1400, 0.2700, 0.2800, 0.5000, 0.5600, 0.9000, 1.5000 ");
				index_2 (" 0.1400, 0.2100, 0.2700, 0.3150, 0.4725, 0.5000, 0.7088, 0.9000,  \
				           1.0631, 1.5000, 1.5947, 2.3920, 3.5880, 5.3821, 538.2070 ");
				values  ("  0.00977,  0.01168,  0.01318,  0.01423,  0.01747,  0.01798,  0.02143,  0.02409,  \
				            0.02607,  0.03039,  0.03118,  0.03621,  0.04047,  0.04333,  0.04574,  0.01306,  \
				            0.01472,  0.01605,  0.01701,  0.02006,  0.02055,  0.02397,  0.02668,  0.02875,  \
				            0.03332,  0.03416,  0.03963,  0.04430,  0.04748,  0.05022,  0.01328,  0.01493,  \
				            0.01626,  0.01721,  0.02026,  0.02075,  0.02416,  0.02688,  0.02895,  0.03354,  \
				            0.03438,  0.03987,  0.04458,  0.04777,  0.05053,  0.01789,  0.01938,  0.02061,  \
				            0.02150,  0.02443,  0.02492,  0.02834,  0.03113,  0.03328,  0.03814,  0.03905,  \
				            0.04500,  0.05019,  0.05380,  0.05700,  0.01907,  0.02054,  0.02175,  0.02264,  \
				            0.02556,  0.02604,  0.02947,  0.03228,  0.03445,  0.03936,  0.04028,  0.04632,  \
				            0.05162,  0.05533,  0.05863,  0.02564,  0.02705,  0.02823,  0.02909,  0.03198,  \
				            0.03246,  0.03593,  0.03880,  0.04104,  0.04618,  0.04715,  0.05360,  0.05939,  \
				            0.06354,  0.06735,  0.03721,  0.03859,  0.03975,  0.04060,  0.04348,  0.04396,  \
				            0.04746,  0.05040,  0.05271,  0.05806,  0.05908,  0.06598,  0.07232,  0.07711,  \
				            0.08151 ");
			}
		}

		capacitance () {
			top_plane: metal10;
			bottom_plane: metal2;
			lateral_capacitance (capacitance_template_WxS) {
				index_1 (" 0.1400, 0.2700, 0.2800, 0.5000, 0.5600, 0.9000, 1.5000 ");
				index_2 (" 0.1400, 0.2100, 0.2700, 0.3150, 0.4725, 0.5000, 0.7088, 0.9000,  \
				           1.0631, 1.5000, 1.5947, 2.3920, 3.5880, 5.3821, 538.2070 ");
				values  ("  0.07065,  0.05152,  0.04252,  0.03790,  0.02791,  0.02674,  0.02036,  0.01674,  \
				            0.01449,  0.01040,  0.00976,  0.00604,  0.00328,  0.00149,  0.00000,  0.07508,  \
				            0.05532,  0.04594,  0.04108,  0.03050,  0.02925,  0.02240,  0.01847,  0.01601,  \
				            0.01155,  0.01084,  0.00673,  0.00368,  0.00168,  0.00000,  0.07536,  0.05556,  \
				            0.04616,  0.04128,  0.03067,  0.02941,  0.02253,  0.01859,  0.01612,  0.01162,  \
				            0.01091,  0.00678,  0.00370,  0.00169,  0.00000,  0.07991,  0.05960,  0.04986,  \
				            0.04476,  0.03358,  0.03224,  0.02487,  0.02060,  0.01791,  0.01299,  0.01221,  \
				            0.00764,  0.00422,  0.00195,  0.00000,  0.08079,  0.06041,  0.05060,  0.04547,  \
				            0.03418,  0.03283,  0.02537,  0.02103,  0.01830,  0.01329,  0.01249,  0.00784,  \
				            0.00434,  0.00200,  0.00000,  0.08452,  0.06383,  0.05381,  0.04853,  0.03681,  \
				            0.03540,  0.02755,  0.02294,  0.02003,  0.01466,  0.01380,  0.00874,  0.00490,  \
				            0.00229,  0.00000,  0.08813,  0.06721,  0.05701,  0.05161,  0.03955,  0.03809,  \
				            0.02990,  0.02505,  0.02196,  0.01623,  0.01531,  0.00983,  0.00560,  0.00268,  \
				            0.00000 ");
			}
			ground_capacitance (capacitance_template_WxS) {
				index_1 (" 0.1400, 0.2700, 0.2800, 0.5000, 0.5600, 0.9000, 1.5000 ");
				index_2 (" 0.1400, 0.2100, 0.2700, 0.3150, 0.4725, 0.5000, 0.7088, 0.9000,  \
				           1.0631, 1.5000, 1.5947, 2.3920, 3.5880, 5.3821, 538.2070 ");
				values  ("  0.00872,  0.01048,  0.01185,  0.01281,  0.01577,  0.01623,  0.01934,  0.02173,  \
				            0.02351,  0.02745,  0.02818,  0.03300,  0.03739,  0.04057,  0.04350,  0.01174,  \
				            0.01324,  0.01444,  0.01530,  0.01802,  0.01846,  0.02149,  0.02389,  0.02574,  \
				            0.02989,  0.03067,  0.03590,  0.04070,  0.04423,  0.04753,  0.01194,  0.01343,  \
				            0.01463,  0.01548,  0.01819,  0.01863,  0.02165,  0.02406,  0.02591,  0.03007,  \
				            0.03085,  0.03611,  0.04094,  0.04449,  0.04781,  0.01601,  0.01732,  0.01839,  \
				            0.01917,  0.02172,  0.02215,  0.02514,  0.02760,  0.02951,  0.03392,  0.03476,  \
				            0.04046,  0.04577,  0.04975,  0.05357,  0.01702,  0.01830,  0.01936,  0.02013,  \
				            0.02266,  0.02308,  0.02608,  0.02855,  0.03048,  0.03493,  0.03579,  0.04158,  \
				            0.04700,  0.05108,  0.05501,  0.02257,  0.02378,  0.02479,  0.02553,  0.02802,  \
				            0.02844,  0.03145,  0.03398,  0.03598,  0.04066,  0.04155,  0.04774,  0.05365,  \
				            0.05818,  0.06267,  0.03226,  0.03344,  0.03443,  0.03516,  0.03765,  0.03807,  \
				            0.04112,  0.04372,  0.04579,  0.05068,  0.05163,  0.05824,  0.06468,  0.06984,  \
				            0.07498 ");
			}
		}

		capacitance () {
			top_plane: metal10;
			bottom_plane: SUBSTRATE;
			lateral_capacitance (capacitance_template_WxS) {
				index_1 (" 0.1400, 0.2700, 0.2800, 0.5000, 0.5600, 0.9000, 1.5000 ");
				index_2 (" 0.1400, 0.2100, 0.2700, 0.3150, 0.4725, 0.5000, 0.7088, 0.9000,  \
				           1.0631, 1.5000, 1.5947, 2.3920, 3.5880, 5.3821, 538.2070 ");
				values  ("  0.07135,  0.05231,  0.04337,  0.03879,  0.02892,  0.02777,  0.02151,  0.01798,  \
				            0.01579,  0.01180,  0.01117,  0.00741,  0.00438,  0.00218,  0.00000,  0.07594,  \
				            0.05625,  0.04692,  0.04210,  0.03165,  0.03042,  0.02370,  0.01987,  0.01748,  \
				            0.01311,  0.01241,  0.00823,  0.00488,  0.00243,  0.00000,  0.07622,  0.05650,  \
				            0.04715,  0.04231,  0.03182,  0.03059,  0.02384,  0.02000,  0.01759,  0.01319,  \
				            0.01249,  0.00829,  0.00491,  0.00245,  0.00000,  0.08100,  0.06077,  0.05108,  \
				            0.04603,  0.03497,  0.03366,  0.02642,  0.02225,  0.01962,  0.01477,  0.01399,  \
				            0.00932,  0.00555,  0.00279,  0.00000,  0.08194,  0.06164,  0.05189,  0.04680,  \
				            0.03564,  0.03431,  0.02698,  0.02274,  0.02006,  0.01512,  0.01433,  0.00955,  \
				            0.00570,  0.00286,  0.00000,  0.08607,  0.06544,  0.05547,  0.05022,  0.03862,  \
				            0.03723,  0.02948,  0.02494,  0.02206,  0.01671,  0.01584,  0.01062,  0.00637,  \
				            0.00323,  0.00000,  0.09023,  0.06935,  0.05918,  0.05380,  0.04180,  0.04035,  \
				            0.03221,  0.02738,  0.02429,  0.01852,  0.01757,  0.01187,  0.00719,  0.00369,  \
				            0.00000 ");
			}
			ground_capacitance (capacitance_template_WxS) {
				index_1 (" 0.1400, 0.2700, 0.2800, 0.5000, 0.5600, 0.9000, 1.5000 ");
				index_2 (" 0.1400, 0.2100, 0.2700, 0.3150, 0.4725, 0.5000, 0.7088, 0.9000,  \
				           1.0631, 1.5000, 1.5947, 2.3920, 3.5880, 5.3821, 538.2070 ");
				values  ("  0.00696,  0.00846,  0.00964,  0.01046,  0.01301,  0.01341,  0.01604,  0.01802,  \
				            0.01948,  0.02272,  0.02333,  0.02752,  0.03183,  0.03551,  0.03970,  0.00958,  \
				            0.01085,  0.01186,  0.01258,  0.01484,  0.01520,  0.01766,  0.01959,  0.02107,  \
				            0.02443,  0.02507,  0.02961,  0.03431,  0.03836,  0.04303,  0.00975,  0.01101,  \
				            0.01201,  0.01272,  0.01497,  0.01533,  0.01778,  0.01971,  0.02119,  0.02455,  \
				            0.02520,  0.02976,  0.03449,  0.03856,  0.04326,  0.01311,  0.01416,  0.01502,  \
				            0.01563,  0.01764,  0.01797,  0.02030,  0.02221,  0.02371,  0.02724,  0.02793,  \
				            0.03287,  0.03807,  0.04260,  0.04794,  0.01390,  0.01492,  0.01575,  0.01635,  \
				            0.01833,  0.01865,  0.02097,  0.02288,  0.02438,  0.02795,  0.02865,  0.03367,  \
				            0.03898,  0.04362,  0.04909,  0.01802,  0.01894,  0.01970,  0.02026,  0.02213,  \
				            0.02245,  0.02473,  0.02667,  0.02823,  0.03197,  0.03272,  0.03811,  0.04388,  \
				            0.04900,  0.05516,  0.02490,  0.02577,  0.02651,  0.02705,  0.02891,  0.02922,  \
				            0.03154,  0.03354,  0.03516,  0.03912,  0.03991,  0.04571,  0.05200,  0.05774,  \
				            0.06469 ");
			}
		}

		capacitance () {
			top_plane: AIR;
			bottom_plane: metal5;
			lateral_capacitance (capacitance_template_WxS) {
				index_1 (" 0.1400, 0.2700, 0.2800, 0.5000, 0.5600, 0.9000, 1.5000 ");
				index_2 (" 0.1400, 0.2100, 0.2700, 0.3150, 0.4725, 0.5000, 0.7088, 0.9000,  \
				           1.0631, 1.5000, 1.5947, 2.3920, 3.5880, 5.3821, 538.2070 ");
				values  ("  0.06486,  0.04509,  0.03567,  0.03080,  0.02030,  0.01908,  0.01265,  0.00928,  \
				            0.00736,  0.00436,  0.00395,  0.00199,  0.00096,  0.00046,  0.00000,  0.06778,  \
				            0.04755,  0.03787,  0.03284,  0.02196,  0.02069,  0.01396,  0.01039,  0.00832,  \
				            0.00505,  0.00460,  0.00238,  0.00118,  0.00057,  0.00000,  0.06795,  0.04770,  \
				            0.03801,  0.03297,  0.02207,  0.02080,  0.01405,  0.01046,  0.00839,  0.00510,  \
				            0.00464,  0.00241,  0.00119,  0.00058,  0.00000,  0.07079,  0.05026,  0.04038,  \
				            0.03522,  0.02401,  0.02269,  0.01565,  0.01186,  0.00964,  0.00604,  0.00553,  \
				            0.00298,  0.00153,  0.00076,  0.00000,  0.07134,  0.05078,  0.04087,  0.03570,  \
				            0.02444,  0.02311,  0.01602,  0.01218,  0.00993,  0.00627,  0.00575,  0.00313,  \
				            0.00162,  0.00081,  0.00000,  0.07392,  0.05320,  0.04319,  0.03794,  0.02645,  \
				            0.02509,  0.01777,  0.01375,  0.01137,  0.00741,  0.00684,  0.00389,  0.00210,  \
				            0.00110,  0.00000,  0.07693,  0.05609,  0.04598,  0.04066,  0.02898,  0.02759,  \
				            0.02004,  0.01584,  0.01331,  0.00904,  0.00841,  0.00504,  0.00289,  0.00159,  \
				            0.00000 ");
			}
			ground_capacitance (capacitance_template_WxS) {
				index_1 (" 0.1400, 0.2700, 0.2800, 0.5000, 0.5600, 0.9000, 1.5000 ");
				index_2 (" 0.1400, 0.2100, 0.2700, 0.3150, 0.4725, 0.5000, 0.7088, 0.9000,  \
				           1.0631, 1.5000, 1.5947, 2.3920, 3.5880, 5.3821, 538.2070 ");
				values  ("  0.02552,  0.03045,  0.03428,  0.03695,  0.04481,  0.04598,  0.05320,  0.05792,  \
				            0.06092,  0.06596,  0.06671,  0.07037,  0.07239,  0.07341,  0.07432,  0.03611,  \
				            0.04094,  0.04471,  0.04734,  0.05518,  0.05636,  0.06369,  0.06857,  0.07173,  \
				            0.07713,  0.07795,  0.08206,  0.08440,  0.08559,  0.08674,  0.03692,  0.04174,  \
				            0.04550,  0.04814,  0.05597,  0.05715,  0.06449,  0.06937,  0.07254,  0.07797,  \
				            0.07880,  0.08293,  0.08530,  0.08650,  0.08766,  0.05445,  0.05915,  0.06283,  \
				            0.06542,  0.07318,  0.07436,  0.08179,  0.08682,  0.09014,  0.09597,  0.09688,  \
				            0.10154,  0.10434,  0.10582,  0.10736,  0.05916,  0.06384,  0.06750,  0.07009,  \
				            0.07783,  0.07901,  0.08645,  0.09151,  0.09486,  0.10077,  0.10170,  0.10648,  \
				            0.10938,  0.11094,  0.11258,  0.08572,  0.09030,  0.09390,  0.09645,  0.10414,  \
				            0.10532,  0.11282,  0.11800,  0.12147,  0.12775,  0.12876,  0.13408,  0.13749,  \
				            0.13942,  0.14163,  0.13208,  0.13659,  0.14014,  0.14266,  0.15028,  0.15146,  \
				            0.15901,  0.16431,  0.16791,  0.17458,  0.17566,  0.18163,  0.18571,  0.18824,  \
				            0.19139 ");
			}
		}

		capacitance () {
			top_plane: AIR;
			bottom_plane: metal4;
			lateral_capacitance (capacitance_template_WxS) {
				index_1 (" 0.1400, 0.2700, 0.2800, 0.5000, 0.5600, 0.9000, 1.5000 ");
				index_2 (" 0.1400, 0.2100, 0.2700, 0.3150, 0.4725, 0.5000, 0.7088, 0.9000,  \
				           1.0631, 1.5000, 1.5947, 2.3920, 3.5880, 5.3821, 538.2070 ");
				values  ("  0.06962,  0.05034,  0.04123,  0.03653,  0.02631,  0.02510,  0.01850,  0.01475,  \
				            0.01245,  0.00840,  0.00779,  0.00449,  0.00238,  0.00119,  0.00000,  0.07374,  \
				            0.05383,  0.04433,  0.03939,  0.02858,  0.02729,  0.02024,  0.01622,  0.01374,  \
				            0.00937,  0.00870,  0.00508,  0.00274,  0.00139,  0.00000,  0.07399,  0.05405,  \
				            0.04453,  0.03957,  0.02872,  0.02743,  0.02036,  0.01632,  0.01382,  0.00943,  \
				            0.00876,  0.00512,  0.00276,  0.00141,  0.00000,  0.07798,  0.05755,  0.04770,  \
				            0.04254,  0.03117,  0.02981,  0.02231,  0.01801,  0.01534,  0.01061,  0.00989,  \
				            0.00591,  0.00327,  0.00171,  0.00000,  0.07872,  0.05822,  0.04832,  0.04313,  \
				            0.03168,  0.03030,  0.02273,  0.01838,  0.01568,  0.01088,  0.01015,  0.00609,  \
				            0.00340,  0.00178,  0.00000,  0.08182,  0.06106,  0.05098,  0.04567,  0.03389,  \
				            0.03247,  0.02462,  0.02007,  0.01724,  0.01218,  0.01140,  0.00703,  0.00404,  \
				            0.00219,  0.00000,  0.08496,  0.06404,  0.05385,  0.04846,  0.03644,  0.03499,  \
				            0.02691,  0.02219,  0.01924,  0.01391,  0.01308,  0.00836,  0.00502,  0.00285,  \
				            0.00000 ");
			}
			ground_capacitance (capacitance_template_WxS) {
				index_1 (" 0.1400, 0.2700, 0.2800, 0.5000, 0.5600, 0.9000, 1.5000 ");
				index_2 (" 0.1400, 0.2100, 0.2700, 0.3150, 0.4725, 0.5000, 0.7088, 0.9000,  \
				           1.0631, 1.5000, 1.5947, 2.3920, 3.5880, 5.3821, 538.2070 ");
				values  ("  0.01137,  0.01360,  0.01537,  0.01663,  0.02059,  0.02122,  0.02551,  0.02882,  \
				            0.03124,  0.03627,  0.03715,  0.04232,  0.04608,  0.04828,  0.05064,  0.01538,  \
				            0.01743,  0.01909,  0.02029,  0.02416,  0.02479,  0.02912,  0.03252,  0.03504,  \
				            0.04033,  0.04126,  0.04683,  0.05096,  0.05342,  0.05618,  0.01567,  0.01771,  \
				            0.01937,  0.02057,  0.02444,  0.02506,  0.02940,  0.03279,  0.03532,  0.04063,  \
				            0.04156,  0.04716,  0.05131,  0.05379,  0.05658,  0.02184,  0.02378,  0.02538,  \
				            0.02655,  0.03036,  0.03099,  0.03537,  0.03884,  0.04144,  0.04699,  0.04797,  \
				            0.05397,  0.05854,  0.06138,  0.06475,  0.02348,  0.02541,  0.02700,  0.02816,  \
				            0.03197,  0.03259,  0.03697,  0.04045,  0.04307,  0.04866,  0.04965,  0.05573,  \
				            0.06040,  0.06332,  0.06684,  0.03272,  0.03460,  0.03616,  0.03730,  0.04106,  \
				            0.04168,  0.04605,  0.04956,  0.05222,  0.05796,  0.05899,  0.06540,  0.07050,  \
				            0.07383,  0.07814,  0.04880,  0.05062,  0.05213,  0.05324,  0.05693,  0.05754,  \
				            0.06186,  0.06537,  0.06804,  0.07391,  0.07497,  0.08173,  0.08734,  0.09132,  \
				            0.09679 ");
			}
		}

		capacitance () {
			top_plane: AIR;
			bottom_plane: metal3;
			lateral_capacitance (capacitance_template_WxS) {
				index_1 (" 0.1400, 0.2700, 0.2800, 0.5000, 0.5600, 0.9000, 1.5000 ");
				index_2 (" 0.1400, 0.2100, 0.2700, 0.3150, 0.4725, 0.5000, 0.7088, 0.9000,  \
				           1.0631, 1.5000, 1.5947, 2.3920, 3.5880, 5.3821, 538.2070 ");
				values  ("  0.07069,  0.05155,  0.04255,  0.03792,  0.02790,  0.02672,  0.02028,  0.01661,  \
				            0.01433,  0.01021,  0.00956,  0.00592,  0.00335,  0.00176,  0.00000,  0.07509,  \
				            0.05532,  0.04591,  0.04104,  0.03041,  0.02916,  0.02225,  0.01828,  0.01580,  \
				            0.01132,  0.01062,  0.00663,  0.00380,  0.00202,  0.00000,  0.07537,  0.05555,  \
				            0.04613,  0.04124,  0.03058,  0.02931,  0.02238,  0.01839,  0.01590,  0.01140,  \
				            0.01069,  0.00667,  0.00383,  0.00204,  0.00000,  0.07980,  0.05947,  0.04970,  \
				            0.04460,  0.03337,  0.03202,  0.02461,  0.02032,  0.01763,  0.01275,  0.01198,  \
				            0.00759,  0.00444,  0.00241,  0.00000,  0.08064,  0.06024,  0.05042,  0.04527,  \
				            0.03394,  0.03259,  0.02508,  0.02074,  0.01801,  0.01305,  0.01227,  0.00780,  \
				            0.00458,  0.00250,  0.00000,  0.08421,  0.06351,  0.05347,  0.04818,  0.03646,  \
				            0.03505,  0.02720,  0.02262,  0.01973,  0.01447,  0.01364,  0.00884,  0.00532,  \
				            0.00299,  0.00000,  0.08773,  0.06682,  0.05663,  0.05124,  0.03922,  0.03776,  \
				            0.02964,  0.02486,  0.02184,  0.01629,  0.01541,  0.01026,  0.00640,  0.00374,  \
				            0.00000 ");
			}
			ground_capacitance (capacitance_template_WxS) {
				index_1 (" 0.1400, 0.2700, 0.2800, 0.5000, 0.5600, 0.9000, 1.5000 ");
				index_2 (" 0.1400, 0.2100, 0.2700, 0.3150, 0.4725, 0.5000, 0.7088, 0.9000,  \
				           1.0631, 1.5000, 1.5947, 2.3920, 3.5880, 5.3821, 538.2070 ");
				values  ("  0.00863,  0.01040,  0.01180,  0.01279,  0.01590,  0.01640,  0.01977,  0.02240,  \
				            0.02438,  0.02871,  0.02951,  0.03455,  0.03877,  0.04161,  0.04504,  0.01176,  \
				            0.01333,  0.01459,  0.01550,  0.01844,  0.01892,  0.02225,  0.02492,  0.02696,  \
				            0.03149,  0.03233,  0.03773,  0.04232,  0.04544,  0.04937,  0.01198,  0.01354,  \
				            0.01480,  0.01570,  0.01863,  0.01911,  0.02244,  0.02511,  0.02715,  0.03170,  \
				            0.03254,  0.03796,  0.04257,  0.04572,  0.04968,  0.01645,  0.01787,  0.01904,  \
				            0.01990,  0.02272,  0.02319,  0.02651,  0.02922,  0.03132,  0.03606,  0.03694,  \
				            0.04272,  0.04772,  0.05125,  0.05592,  0.01760,  0.01900,  0.02016,  0.02101,  \
				            0.02382,  0.02428,  0.02760,  0.03033,  0.03243,  0.03721,  0.03810,  0.04394,  \
				            0.04903,  0.05264,  0.05749,  0.02399,  0.02533,  0.02645,  0.02728,  0.03004,  \
				            0.03050,  0.03382,  0.03656,  0.03870,  0.04359,  0.04451,  0.05062,  0.05609,  \
				            0.06010,  0.06586,  0.03506,  0.03636,  0.03745,  0.03825,  0.04095,  0.04140,  \
				            0.04468,  0.04742,  0.04956,  0.05452,  0.05546,  0.06182,  0.06769,  0.07229,  \
				            0.07937 ");
			}
		}

		capacitance () {
			top_plane: AIR;
			bottom_plane: metal2;
			lateral_capacitance (capacitance_template_WxS) {
				index_1 (" 0.1400, 0.2700, 0.2800, 0.5000, 0.5600, 0.9000, 1.5000 ");
				index_2 (" 0.1400, 0.2100, 0.2700, 0.3150, 0.4725, 0.5000, 0.7088, 0.9000,  \
				           1.0631, 1.5000, 1.5947, 2.3920, 3.5880, 5.3821, 538.2070 ");
				values  ("  0.07114,  0.05206,  0.04310,  0.03851,  0.02857,  0.02740,  0.02104,  0.01743,  \
				            0.01518,  0.01107,  0.01042,  0.00669,  0.00393,  0.00213,  0.00000,  0.07566,  \
				            0.05593,  0.04657,  0.04172,  0.03118,  0.02994,  0.02311,  0.01919,  0.01674,  \
				            0.01227,  0.01156,  0.00746,  0.00443,  0.00243,  0.00000,  0.07594,  0.05617,  \
				            0.04679,  0.04193,  0.03135,  0.03010,  0.02325,  0.01931,  0.01684,  0.01235,  \
				            0.01164,  0.00751,  0.00446,  0.00245,  0.00000,  0.08054,  0.06026,  0.05053,  \
				            0.04545,  0.03429,  0.03296,  0.02562,  0.02136,  0.01869,  0.01380,  0.01302,  \
				            0.00850,  0.00513,  0.00287,  0.00000,  0.08143,  0.06107,  0.05129,  0.04617,  \
				            0.03491,  0.03356,  0.02613,  0.02181,  0.01910,  0.01413,  0.01334,  0.00873,  \
				            0.00529,  0.00297,  0.00000,  0.08523,  0.06456,  0.05455,  0.04928,  0.03760,  \
				            0.03620,  0.02839,  0.02382,  0.02093,  0.01564,  0.01479,  0.00984,  0.00609,  \
				            0.00350,  0.00000,  0.08900,  0.06811,  0.05793,  0.05255,  0.04054,  0.03908,  \
				            0.03096,  0.02617,  0.02314,  0.01753,  0.01663,  0.01132,  0.00722,  0.00430,  \
				            0.00000 ");
			}
			ground_capacitance (capacitance_template_WxS) {
				index_1 (" 0.1400, 0.2700, 0.2800, 0.5000, 0.5600, 0.9000, 1.5000 ");
				index_2 (" 0.1400, 0.2100, 0.2700, 0.3150, 0.4725, 0.5000, 0.7088, 0.9000,  \
				           1.0631, 1.5000, 1.5947, 2.3920, 3.5880, 5.3821, 538.2070 ");
				values  ("  0.00750,  0.00909,  0.01035,  0.01124,  0.01403,  0.01448,  0.01749,  0.01985,  \
				            0.02162,  0.02557,  0.02630,  0.03112,  0.03543,  0.03855,  0.04265,  0.01031,  \
				            0.01171,  0.01283,  0.01364,  0.01623,  0.01665,  0.01958,  0.02194,  0.02376,  \
				            0.02786,  0.02863,  0.03378,  0.03843,  0.04185,  0.04652,  0.01051,  0.01189,  \
				            0.01301,  0.01381,  0.01639,  0.01681,  0.01974,  0.02210,  0.02392,  0.02803,  \
				            0.02880,  0.03397,  0.03865,  0.04209,  0.04679,  0.01441,  0.01565,  0.01666,  \
				            0.01740,  0.01984,  0.02025,  0.02313,  0.02551,  0.02736,  0.03164,  0.03245,  \
				            0.03793,  0.04299,  0.04681,  0.05230,  0.01540,  0.01661,  0.01761,  0.01834,  \
				            0.02076,  0.02116,  0.02404,  0.02642,  0.02828,  0.03259,  0.03341,  0.03895,  \
				            0.04409,  0.04800,  0.05367,  0.02076,  0.02191,  0.02287,  0.02357,  0.02593,  \
				            0.02633,  0.02919,  0.03159,  0.03348,  0.03788,  0.03873,  0.04451,  0.04999,  \
				            0.05429,  0.06095,  0.02997,  0.03107,  0.03200,  0.03268,  0.03498,  0.03537,  \
				            0.03820,  0.04059,  0.04248,  0.04695,  0.04781,  0.05380,  0.05965,  0.06450,  \
				            0.07256 ");
			}
		}

		capacitance () {
			top_plane: AIR;
			bottom_plane: SUBSTRATE;
			lateral_capacitance (capacitance_template_WxS) {
				index_1 (" 0.1400, 0.2700, 0.2800, 0.5000, 0.5600, 0.9000, 1.5000 ");
				index_2 (" 0.1400, 0.2100, 0.2700, 0.3150, 0.4725, 0.5000, 0.7088, 0.9000,  \
				           1.0631, 1.5000, 1.5947, 2.3920, 3.5880, 5.3821, 538.2070 ");
				values  ("  0.07191,  0.05294,  0.04406,  0.03952,  0.02973,  0.02859,  0.02237,  0.01885,  \
				            0.01667,  0.01266,  0.01202,  0.00825,  0.00524,  0.00306,  0.00000,  0.07662,  \
				            0.05698,  0.04768,  0.04289,  0.03249,  0.03127,  0.02459,  0.02077,  0.01838,  \
				            0.01402,  0.01332,  0.00916,  0.00585,  0.00344,  0.00000,  0.07691,  0.05723,  \
				            0.04792,  0.04310,  0.03267,  0.03144,  0.02473,  0.02090,  0.01850,  0.01411,  \
				            0.01340,  0.00922,  0.00590,  0.00347,  0.00000,  0.08178,  0.06158,  0.05191,  \
				            0.04687,  0.03586,  0.03455,  0.02735,  0.02319,  0.02058,  0.01577,  0.01499,  \
				            0.01038,  0.00671,  0.00400,  0.00000,  0.08274,  0.06246,  0.05273,  0.04766,  \
				            0.03654,  0.03521,  0.02791,  0.02369,  0.02104,  0.01614,  0.01535,  0.01065,  \
				            0.00690,  0.00412,  0.00000,  0.08693,  0.06632,  0.05637,  0.05113,  0.03957,  \
				            0.03818,  0.03048,  0.02598,  0.02314,  0.01787,  0.01701,  0.01192,  0.00783,  \
				            0.00476,  0.00000,  0.09124,  0.07039,  0.06024,  0.05488,  0.04294,  0.04149,  \
				            0.03342,  0.02866,  0.02563,  0.01999,  0.01907,  0.01357,  0.00910,  0.00569,  \
				            0.00000 ");
			}
			ground_capacitance (capacitance_template_WxS) {
				index_1 (" 0.1400, 0.2700, 0.2800, 0.5000, 0.5600, 0.9000, 1.5000 ");
				index_2 (" 0.1400, 0.2100, 0.2700, 0.3150, 0.4725, 0.5000, 0.7088, 0.9000,  \
				           1.0631, 1.5000, 1.5947, 2.3920, 3.5880, 5.3821, 538.2070 ");
				values  ("  0.00559,  0.00686,  0.00788,  0.00860,  0.01090,  0.01126,  0.01374,  0.01565,  \
				            0.01709,  0.02033,  0.02094,  0.02512,  0.02928,  0.03276,  0.03846,  0.00788,  \
				            0.00900,  0.00991,  0.01055,  0.01263,  0.01297,  0.01530,  0.01716,  0.01860,  \
				            0.02190,  0.02254,  0.02695,  0.03140,  0.03518,  0.04158,  0.00804,  0.00915,  \
				            0.01005,  0.01069,  0.01276,  0.01309,  0.01541,  0.01727,  0.01872,  0.02202,  \
				            0.02265,  0.02708,  0.03155,  0.03535,  0.04180,  0.01115,  0.01211,  0.01290,  \
				            0.01347,  0.01534,  0.01565,  0.01785,  0.01968,  0.02111,  0.02449,  0.02515,  \
				            0.02981,  0.03460,  0.03876,  0.04615,  0.01191,  0.01284,  0.01360,  0.01416,  \
				            0.01600,  0.01631,  0.01849,  0.02031,  0.02174,  0.02514,  0.02580,  0.03050,  \
				            0.03537,  0.03961,  0.04722,  0.01584,  0.01669,  0.01739,  0.01791,  0.01965,  \
				            0.01994,  0.02207,  0.02387,  0.02530,  0.02875,  0.02943,  0.03432,  0.03947,  \
				            0.04408,  0.05282,  0.02228,  0.02307,  0.02373,  0.02422,  0.02589,  0.02618,  \
				            0.02825,  0.03004,  0.03147,  0.03496,  0.03565,  0.04069,  0.04612,  0.05120,  \
				            0.06151 ");
			}
		}
	}

	layer (metal5) {
		resistance: 0.210000

		capacitance () {
			top_plane: metal6;
			bottom_plane: metal4;
			lateral_capacitance (capacitance_template_WxS) {
				index_1 (" 0.1400, 0.2800, 0.5600 ");
				index_2 (" 0.1400, 0.2100, 0.3150, 0.4725, 0.7088, 1.0631, 1.5947, 2.3920,  \
				           3.5880, 5.3821, 538.2070 ");
				values  ("  0.05924,  0.03873,  0.02365,  0.01261,  0.00528,  0.00150,  0.00024,  0.00002,  \
				            0.00000,  0.00000,  0.00000,  0.06027,  0.03941,  0.02405,  0.01282,  0.00536,  \
				            0.00152,  0.00024,  0.00002,  0.00000,  0.00000,  0.00000,  0.06053,  0.03959,  \
				            0.02415,  0.01287,  0.00538,  0.00153,  0.00024,  0.00002,  0.00000,  0.00000,  \
				            0.00000 ");
			}
			ground_capacitance (capacitance_template_WxS) {
				index_1 (" 0.1400, 0.2800, 0.5600 ");
				index_2 (" 0.1400, 0.2100, 0.3150, 0.4725, 0.7088, 1.0631, 1.5947, 2.3920,  \
				           3.5880, 5.3821, 538.2070 ");
				values  ("  0.04216,  0.05055,  0.06162,  0.07440,  0.08596,  0.09329,  0.09584,  0.09627,  \
				            0.09628,  0.09637,  0.09636,  0.06296,  0.07160,  0.08293,  0.09594,  0.10770,  \
				            0.11513,  0.11773,  0.11817,  0.11817,  0.11824,  0.11823,  0.10552,  0.11423,  \
				            0.12562,  0.13870,  0.15050,  0.15797,  0.16057,  0.16102,  0.16102,  0.16108,  \
				            0.16108 ");
			}
		}

		capacitance () {
			top_plane: metal6;
			bottom_plane: metal3;
			lateral_capacitance (capacitance_template_WxS) {
				index_1 (" 0.1400, 0.2800, 0.5600 ");
				index_2 (" 0.1400, 0.2100, 0.3150, 0.4725, 0.7088, 1.0631, 1.5947, 2.3920,  \
				           3.5880, 5.3821, 538.2070 ");
				values  ("  0.06250,  0.04241,  0.02767,  0.01664,  0.00862,  0.00348,  0.00094,  0.00014,  \
				            0.00001,  0.00000,  0.00000,  0.06473,  0.04410,  0.02886,  0.01740,  0.00904,  \
				            0.00366,  0.00099,  0.00015,  0.00001,  0.00000,  0.00000,  0.06612,  0.04519,  \
				            0.02965,  0.01792,  0.00933,  0.00378,  0.00102,  0.00015,  0.00001,  0.00000,  \
				            0.00000 ");
			}
			ground_capacitance (capacitance_template_WxS) {
				index_1 (" 0.1400, 0.2800, 0.5600 ");
				index_2 (" 0.1400, 0.2100, 0.3150, 0.4725, 0.7088, 1.0631, 1.5947, 2.3920,  \
				           3.5880, 5.3821, 538.2070 ");
				values  ("  0.03170,  0.03774,  0.04591,  0.05601,  0.06665,  0.07548,  0.08037,  0.08199,  \
				            0.08225,  0.08228,  0.08228,  0.04586,  0.05210,  0.06055,  0.07101,  0.08208,  \
				            0.09130,  0.09643,  0.09815,  0.09842,  0.09843,  0.09842,  0.07541,  0.08179,  \
				            0.09042,  0.10112,  0.11248,  0.12197,  0.12727,  0.12905,  0.12934,  0.12933,  \
				            0.12933 ");
			}
		}

		capacitance () {
			top_plane: metal6;
			bottom_plane: metal2;
			lateral_capacitance (capacitance_template_WxS) {
				index_1 (" 0.1400, 0.2800, 0.5600 ");
				index_2 (" 0.1400, 0.2100, 0.3150, 0.4725, 0.7088, 1.0631, 1.5947, 2.3920,  \
				           3.5880, 5.3821, 538.2070 ");
				values  ("  0.06315,  0.04318,  0.02861,  0.01773,  0.00974,  0.00439,  0.00143,  0.00029,  \
				            0.00003,  0.00000,  0.00000,  0.06573,  0.04522,  0.03013,  0.01878,  0.01039,  \
				            0.00471,  0.00154,  0.00031,  0.00003,  0.00000,  0.00000,  0.06771,  0.04686,  \
				            0.03139,  0.01968,  0.01095,  0.00499,  0.00164,  0.00033,  0.00003,  0.00000,  \
				            0.00000 ");
			}
			ground_capacitance (capacitance_template_WxS) {
				index_1 (" 0.1400, 0.2800, 0.5600 ");
				index_2 (" 0.1400, 0.2100, 0.3150, 0.4725, 0.7088, 1.0631, 1.5947, 2.3920,  \
				           3.5880, 5.3821, 538.2070 ");
				values  ("  0.02993,  0.03552,  0.04303,  0.05232,  0.06230,  0.07109,  0.07662,  0.07891,  \
				            0.07944,  0.07950,  0.07950,  0.04289,  0.04860,  0.05632,  0.06594,  0.07637,  \
				            0.08564,  0.09154,  0.09402,  0.09459,  0.09463,  0.09463,  0.06975,  0.07557,  \
				            0.08346,  0.09334,  0.10416,  0.11386,  0.12010,  0.12274,  0.12335,  0.12338,  \
				            0.12338 ");
			}
		}

		capacitance () {
			top_plane: metal6;
			bottom_plane: metal1;
			lateral_capacitance (capacitance_template_WxS) {
				index_1 (" 0.1400, 0.2800, 0.5600 ");
				index_2 (" 0.1400, 0.2100, 0.3150, 0.4725, 0.7088, 1.0631, 1.5947, 2.3920,  \
				           3.5880, 5.3821, 538.2070 ");
				values  ("  0.06350,  0.04360,  0.02912,  0.01836,  0.01045,  0.00504,  0.00185,  0.00046,  \
				            0.00006,  0.00000,  0.00000,  0.06627,  0.04584,  0.03085,  0.01961,  0.01126,  \
				            0.00548,  0.00203,  0.00050,  0.00007,  0.00000,  0.00000,  0.06865,  0.04786,  \
				            0.03247,  0.02083,  0.01207,  0.00593,  0.00222,  0.00055,  0.00007,  0.00000,  \
				            0.00000 ");
			}
			ground_capacitance (capacitance_template_WxS) {
				index_1 (" 0.1400, 0.2800, 0.5600 ");
				index_2 (" 0.1400, 0.2100, 0.3150, 0.4725, 0.7088, 1.0631, 1.5947, 2.3920,  \
				           3.5880, 5.3821, 538.2070 ");
				values  ("  0.02900,  0.03436,  0.04152,  0.05034,  0.05987,  0.06847,  0.07429,  0.07706,  \
				            0.07786,  0.07798,  0.07799,  0.04136,  0.04679,  0.05410,  0.06319,  0.07314,  \
				            0.08227,  0.08854,  0.09158,  0.09247,  0.09257,  0.09258,  0.06675,  0.07224,  \
				            0.07968,  0.08902,  0.09938,  0.10903,  0.11578,  0.11909,  0.12007,  0.12018,  \
				            0.12018 ");
			}
		}

		capacitance () {
			top_plane: metal6;
			bottom_plane: SUBSTRATE;
			lateral_capacitance (capacitance_template_WxS) {
				index_1 (" 0.1400, 0.2800, 0.5600 ");
				index_2 (" 0.1400, 0.2100, 0.3150, 0.4725, 0.7088, 1.0631, 1.5947, 2.3920,  \
				           3.5880, 5.3821, 538.2070 ");
				values  ("  0.06383,  0.04398,  0.02958,  0.01894,  0.01112,  0.00572,  0.00238,  0.00073,  \
				            0.00014,  0.00001,  0.00000,  0.06675,  0.04639,  0.03150,  0.02038,  0.01213,  \
				            0.00632,  0.00267,  0.00082,  0.00015,  0.00001,  0.00000,  0.06953,  0.04881,  \
				            0.03351,  0.02197,  0.01327,  0.00703,  0.00301,  0.00093,  0.00018,  0.00002,  \
				            0.00000 ");
			}
			ground_capacitance (capacitance_template_WxS) {
				index_1 (" 0.1400, 0.2800, 0.5600 ");
				index_2 (" 0.1400, 0.2100, 0.3150, 0.4725, 0.7088, 1.0631, 1.5947, 2.3920,  \
				           3.5880, 5.3821, 538.2070 ");
				values  ("  0.02815,  0.03335,  0.04023,  0.04863,  0.05769,  0.06600,  0.07194,  0.07516,  \
				            0.07636,  0.07662,  0.07664,  0.04005,  0.04524,  0.05218,  0.06078,  0.07022,  \
				            0.07906,  0.08553,  0.08913,  0.09048,  0.09074,  0.09077,  0.06414,  0.06933,  \
				            0.07635,  0.08514,  0.09497,  0.10439,  0.11148,  0.11551,  0.11705,  0.11735,  \
				            0.11738 ");
			}
		}

		capacitance () {
			top_plane: metal7;
			bottom_plane: metal4;
			lateral_capacitance (capacitance_template_WxS) {
				index_1 (" 0.1400, 0.2800, 0.5600 ");
				index_2 (" 0.1400, 0.2100, 0.3150, 0.4725, 0.7088, 1.0631, 1.5947, 2.3920,  \
				           3.5880, 5.3821, 538.2070 ");
				values  ("  0.06297,  0.04297,  0.02835,  0.01743,  0.00941,  0.00411,  0.00126,  0.00023,  \
				            0.00002,  0.00000,  0.00000,  0.06546,  0.04491,  0.02977,  0.01839,  0.00998,  \
				            0.00438,  0.00135,  0.00025,  0.00002,  0.00000,  0.00000,  0.06726,  0.04638,  \
				            0.03088,  0.01916,  0.01045,  0.00460,  0.00143,  0.00026,  0.00002,  0.00000,  \
				            0.00000 ");
			}
			ground_capacitance (capacitance_template_WxS) {
				index_1 (" 0.1400, 0.2800, 0.5600 ");
				index_2 (" 0.1400, 0.2100, 0.3150, 0.4725, 0.7088, 1.0631, 1.5947, 2.3920,  \
				           3.5880, 5.3821, 538.2070 ");
				values  ("  0.03040,  0.03611,  0.04380,  0.05332,  0.06351,  0.07234,  0.07770,  0.07978,  \
				            0.08021,  0.08026,  0.08026,  0.04368,  0.04954,  0.05746,  0.06732,  0.07796,  \
				            0.08725,  0.09294,  0.09518,  0.09564,  0.09566,  0.09565,  0.07128,  0.07726,  \
				            0.08536,  0.09549,  0.10649,  0.11615,  0.12213,  0.12449,  0.12497,  0.12499,  \
				            0.12498 ");
			}
		}

		capacitance () {
			top_plane: metal7;
			bottom_plane: metal3;
			lateral_capacitance (capacitance_template_WxS) {
				index_1 (" 0.1400, 0.2800, 0.5600 ");
				index_2 (" 0.1400, 0.2100, 0.3150, 0.4725, 0.7088, 1.0631, 1.5947, 2.3920,  \
				           3.5880, 5.3821, 538.2070 ");
				values  ("  0.06645,  0.04684,  0.03257,  0.02177,  0.01337,  0.00703,  0.00281,  0.00074,  \
				            0.00011,  0.00000,  0.00000,  0.07005,  0.04972,  0.03473,  0.02325,  0.01427,  \
				            0.00750,  0.00300,  0.00079,  0.00011,  0.00001,  0.00000,  0.07290,  0.05203,  \
				            0.03646,  0.02444,  0.01501,  0.00788,  0.00315,  0.00083,  0.00012,  0.00001,  \
				            0.00000 ");
			}
			ground_capacitance (capacitance_template_WxS) {
				index_1 (" 0.1400, 0.2800, 0.5600 ");
				index_2 (" 0.1400, 0.2100, 0.3150, 0.4725, 0.7088, 1.0631, 1.5947, 2.3920,  \
				           3.5880, 5.3821, 538.2070 ");
				values  ("  0.01946,  0.02286,  0.02759,  0.03398,  0.04197,  0.05063,  0.05779,  0.06180,  \
				            0.06311,  0.06326,  0.06327,  0.02629,  0.02976,  0.03471,  0.04148,  0.04998,  \
				            0.05919,  0.06683,  0.07111,  0.07251,  0.07264,  0.07265,  0.04106,  0.04471,  \
				            0.04992,  0.05705,  0.06599,  0.07567,  0.08369,  0.08819,  0.08966,  0.08978,  \
				            0.08979 ");
			}
		}

		capacitance () {
			top_plane: metal7;
			bottom_plane: metal2;
			lateral_capacitance (capacitance_template_WxS) {
				index_1 (" 0.1400, 0.2800, 0.5600 ");
				index_2 (" 0.1400, 0.2100, 0.3150, 0.4725, 0.7088, 1.0631, 1.5947, 2.3920,  \
				           3.5880, 5.3821, 538.2070 ");
				values  ("  0.06720,  0.04771,  0.03361,  0.02298,  0.01468,  0.00825,  0.00367,  0.00114,  \
				            0.00020,  0.00001,  0.00000,  0.07112,  0.05092,  0.03606,  0.02472,  0.01580,  \
				            0.00887,  0.00395,  0.00122,  0.00022,  0.00002,  0.00000,  0.07453,  0.05374,  \
				            0.03825,  0.02628,  0.01680,  0.00942,  0.00419,  0.00129,  0.00023,  0.00002,  \
				            0.00000 ");
			}
			ground_capacitance (capacitance_template_WxS) {
				index_1 (" 0.1400, 0.2800, 0.5600 ");
				index_2 (" 0.1400, 0.2100, 0.3150, 0.4725, 0.7088, 1.0631, 1.5947, 2.3920,  \
				           3.5880, 5.3821, 538.2070 ");
				values  ("  0.01744,  0.02041,  0.02448,  0.02999,  0.03704,  0.04509,  0.05244,  0.05720,  \
				            0.05909,  0.05942,  0.05944,  0.02315,  0.02610,  0.03031,  0.03614,  0.04367,  \
				            0.05230,  0.06019,  0.06531,  0.06734,  0.06766,  0.06769,  0.03532,  0.03841,  \
				            0.04286,  0.04904,  0.05705,  0.06621,  0.07459,  0.08002,  0.08218,  0.08251,  \
				            0.08255 ");
			}
		}

		capacitance () {
			top_plane: metal7;
			bottom_plane: metal1;
			lateral_capacitance (capacitance_template_WxS) {
				index_1 (" 0.1400, 0.2800, 0.5600 ");
				index_2 (" 0.1400, 0.2100, 0.3150, 0.4725, 0.7088, 1.0631, 1.5947, 2.3920,  \
				           3.5880, 5.3821, 538.2070 ");
				values  ("  0.06764,  0.04821,  0.03420,  0.02369,  0.01551,  0.00910,  0.00436,  0.00152,  \
				            0.00032,  0.00003,  0.00000,  0.07173,  0.05160,  0.03685,  0.02563,  0.01680,  \
				            0.00985,  0.00472,  0.00164,  0.00035,  0.00003,  0.00000,  0.07552,  0.05479,  \
				            0.03937,  0.02748,  0.01804,  0.01058,  0.00507,  0.00176,  0.00037,  0.00004,  \
				            0.00000 ");
			}
			ground_capacitance (capacitance_template_WxS) {
				index_1 (" 0.1400, 0.2800, 0.5600 ");
				index_2 (" 0.1400, 0.2100, 0.3150, 0.4725, 0.7088, 1.0631, 1.5947, 2.3920,  \
				           3.5880, 5.3821, 538.2070 ");
				values  ("  0.01630,  0.01906,  0.02280,  0.02780,  0.03423,  0.04176,  0.04904,  0.05422,  \
				            0.05662,  0.05715,  0.05722,  0.02147,  0.02414,  0.02794,  0.03320,  0.04006,  \
				            0.04816,  0.05601,  0.06163,  0.06421,  0.06477,  0.06484,  0.03222,  0.03498,  \
				            0.03897,  0.04456,  0.05189,  0.06055,  0.06896,  0.07500,  0.07777,  0.07836,  \
				            0.07844 ");
			}
		}

		capacitance () {
			top_plane: metal7;
			bottom_plane: SUBSTRATE;
			lateral_capacitance (capacitance_template_WxS) {
				index_1 (" 0.1400, 0.2800, 0.5600 ");
				index_2 (" 0.1400, 0.2100, 0.3150, 0.4725, 0.7088, 1.0631, 1.5947, 2.3920,  \
				           3.5880, 5.3821, 538.2070 ");
				values  ("  0.06808,  0.04869,  0.03476,  0.02437,  0.01633,  0.01001,  0.00519,  0.00207,  \
				            0.00054,  0.00008,  0.00000,  0.07229,  0.05223,  0.03758,  0.02649,  0.01781,  \
				            0.01093,  0.00568,  0.00226,  0.00060,  0.00008,  0.00000,  0.07645,  0.05580,  \
				            0.04048,  0.02870,  0.01936,  0.01191,  0.00621,  0.00248,  0.00065,  0.00009,  \
				            0.00000 ");
			}
			ground_capacitance (capacitance_template_WxS) {
				index_1 (" 0.1400, 0.2800, 0.5600 ");
				index_2 (" 0.1400, 0.2100, 0.3150, 0.4725, 0.7088, 1.0631, 1.5947, 2.3920,  \
				           3.5880, 5.3821, 538.2070 ");
				values  ("  0.01519,  0.01779,  0.02126,  0.02583,  0.03165,  0.03856,  0.04556,  0.05106,  \
				            0.05404,  0.05494,  0.05509,  0.01997,  0.02240,  0.02583,  0.03056,  0.03674,  \
				            0.04417,  0.05176,  0.05775,  0.06101,  0.06198,  0.06215,  0.02947,  0.03193,  \
				            0.03549,  0.04047,  0.04707,  0.05507,  0.06328,  0.06981,  0.07338,  0.07443,  \
				            0.07461 ");
			}
		}

		capacitance () {
			top_plane: metal8;
			bottom_plane: metal4;
			lateral_capacitance (capacitance_template_WxS) {
				index_1 (" 0.1400, 0.2800, 0.5600 ");
				index_2 (" 0.1400, 0.2100, 0.3150, 0.4725, 0.7088, 1.0631, 1.5947, 2.3920,  \
				           3.5880, 5.3821, 538.2070 ");
				values  ("  0.06415,  0.04433,  0.02999,  0.01943,  0.01172,  0.00639,  0.00299,  0.00114,  \
				            0.00031,  0.00005,  0.00000,  0.06716,  0.04686,  0.03205,  0.02105,  0.01291,  \
				            0.00717,  0.00342,  0.00132,  0.00036,  0.00006,  0.00000,  0.07027,  0.04962,  \
				            0.03443,  0.02301,  0.01442,  0.00820,  0.00401,  0.00158,  0.00044,  0.00007,  \
				            0.00000 ");
			}
			ground_capacitance (capacitance_template_WxS) {
				index_1 (" 0.1400, 0.2800, 0.5600 ");
				index_2 (" 0.1400, 0.2100, 0.3150, 0.4725, 0.7088, 1.0631, 1.5947, 2.3920,  \
				           3.5880, 5.3821, 538.2070 ");
				values  ("  0.02733,  0.03242,  0.03912,  0.04721,  0.05586,  0.06382,  0.06970,  0.07323,  \
				            0.07488,  0.07542,  0.07552,  0.03896,  0.04396,  0.05062,  0.05881,  0.06775,  \
				            0.07620,  0.08264,  0.08664,  0.08854,  0.08914,  0.08926,  0.06202,  0.06696,  \
				            0.07359,  0.08188,  0.09114,  0.10015,  0.10730,  0.11191,  0.11418,  0.11490,  \
				            0.11504 ");
			}
		}

		capacitance () {
			top_plane: metal8;
			bottom_plane: metal3;
			lateral_capacitance (capacitance_template_WxS) {
				index_1 (" 0.1400, 0.2800, 0.5600 ");
				index_2 (" 0.1400, 0.2100, 0.3150, 0.4725, 0.7088, 1.0631, 1.5947, 2.3920,  \
				           3.5880, 5.3821, 538.2070 ");
				values  ("  0.06790,  0.04846,  0.03446,  0.02405,  0.01607,  0.00993,  0.00534,  0.00235,  \
				            0.00075,  0.00015,  0.00000,  0.07197,  0.05188,  0.03722,  0.02616,  0.01759,  \
				            0.01093,  0.00593,  0.00262,  0.00084,  0.00016,  0.00000,  0.07608,  0.05544,  \
				            0.04018,  0.02852,  0.01935,  0.01215,  0.00666,  0.00297,  0.00096,  0.00019,  \
				            0.00000 ");
			}
			ground_capacitance (capacitance_template_WxS) {
				index_1 (" 0.1400, 0.2800, 0.5600 ");
				index_2 (" 0.1400, 0.2100, 0.3150, 0.4725, 0.7088, 1.0631, 1.5947, 2.3920,  \
				           3.5880, 5.3821, 538.2070 ");
				values  ("  0.01575,  0.01855,  0.02231,  0.02719,  0.03322,  0.04007,  0.04676,  0.05198,  \
				            0.05506,  0.05622,  0.05653,  0.02109,  0.02371,  0.02738,  0.03234,  0.03865,  \
				            0.04596,  0.05318,  0.05894,  0.06236,  0.06365,  0.06398,  0.03145,  0.03405,  \
				            0.03776,  0.04287,  0.04949,  0.05728,  0.06513,  0.07151,  0.07537,  0.07684,  \
				            0.07723 ");
			}
		}

		capacitance () {
			top_plane: metal8;
			bottom_plane: metal2;
			lateral_capacitance (capacitance_template_WxS) {
				index_1 (" 0.1400, 0.2800, 0.5600 ");
				index_2 (" 0.1400, 0.2100, 0.3150, 0.4725, 0.7088, 1.0631, 1.5947, 2.3920,  \
				           3.5880, 5.3821, 538.2070 ");
				values  ("  0.06879,  0.04947,  0.03563,  0.02538,  0.01752,  0.01136,  0.00652,  0.00309,  \
				            0.00108,  0.00024,  0.00000,  0.07316,  0.05318,  0.03866,  0.02775,  0.01926,  \
				            0.01252,  0.00721,  0.00342,  0.00120,  0.00026,  0.00000,  0.07779,  0.05723,  \
				            0.04205,  0.03044,  0.02127,  0.01390,  0.00805,  0.00385,  0.00136,  0.00030,  \
				            0.00000 ");
			}
			ground_capacitance (capacitance_template_WxS) {
				index_1 (" 0.1400, 0.2800, 0.5600 ");
				index_2 (" 0.1400, 0.2100, 0.3150, 0.4725, 0.7088, 1.0631, 1.5947, 2.3920,  \
				           3.5880, 5.3821, 538.2070 ");
				values  ("  0.01339,  0.01576,  0.01888,  0.02289,  0.02789,  0.03387,  0.04027,  0.04590,  \
				            0.04967,  0.05130,  0.05178,  0.01767,  0.01978,  0.02273,  0.02673,  0.03196,  \
				            0.03837,  0.04530,  0.05149,  0.05565,  0.05744,  0.05799,  0.02552,  0.02757,  \
				            0.03052,  0.03466,  0.04020,  0.04710,  0.05466,  0.06150,  0.06615,  0.06817,  \
				            0.06878 ");
			}
		}

		capacitance () {
			top_plane: metal8;
			bottom_plane: metal1;
			lateral_capacitance (capacitance_template_WxS) {
				index_1 (" 0.1400, 0.2800, 0.5600 ");
				index_2 (" 0.1400, 0.2100, 0.3150, 0.4725, 0.7088, 1.0631, 1.5947, 2.3920,  \
				           3.5880, 5.3821, 538.2070 ");
				values  ("  0.06935,  0.05009,  0.03633,  0.02620,  0.01846,  0.01236,  0.00743,  0.00375,  \
				            0.00142,  0.00034,  0.00000,  0.07386,  0.05396,  0.03954,  0.02874,  0.02036,  \
				            0.01365,  0.00823,  0.00415,  0.00157,  0.00038,  0.00000,  0.07885,  0.05835,  \
				            0.04324,  0.03171,  0.02260,  0.01520,  0.00919,  0.00464,  0.00177,  0.00043,  \
				            0.00000 ");
			}
			ground_capacitance (capacitance_template_WxS) {
				index_1 (" 0.1400, 0.2800, 0.5600 ");
				index_2 (" 0.1400, 0.2100, 0.3150, 0.4725, 0.7088, 1.0631, 1.5947, 2.3920,  \
				           3.5880, 5.3821, 538.2070 ");
				values  ("  0.01197,  0.01412,  0.01691,  0.02043,  0.02479,  0.03009,  0.03608,  0.04181,  \
				            0.04606,  0.04812,  0.04883,  0.01575,  0.01759,  0.02013,  0.02357,  0.02808,  \
				            0.03377,  0.04028,  0.04658,  0.05126,  0.05353,  0.05431,  0.02226,  0.02398,  \
				            0.02648,  0.03000,  0.03480,  0.04097,  0.04811,  0.05509,  0.06030,  0.06284,  \
				            0.06373 ");
			}
		}

		capacitance () {
			top_plane: metal8;
			bottom_plane: SUBSTRATE;
			lateral_capacitance (capacitance_template_WxS) {
				index_1 (" 0.1400, 0.2800, 0.5600 ");
				index_2 (" 0.1400, 0.2100, 0.3150, 0.4725, 0.7088, 1.0631, 1.5947, 2.3920,  \
				           3.5880, 5.3821, 538.2070 ");
				values  ("  0.06993,  0.05073,  0.03705,  0.02702,  0.01943,  0.01346,  0.00853,  0.00465,  \
				            0.00195,  0.00054,  0.00000,  0.07457,  0.05473,  0.04041,  0.02974,  0.02150,  \
				            0.01491,  0.00946,  0.00514,  0.00216,  0.00060,  0.00000,  0.07989,  0.05946,  \
				            0.04445,  0.03304,  0.02403,  0.01671,  0.01060,  0.00576,  0.00242,  0.00068,  \
				            0.00000 ");
			}
			ground_capacitance (capacitance_template_WxS) {
				index_1 (" 0.1400, 0.2800, 0.5600 ");
				index_2 (" 0.1400, 0.2100, 0.3150, 0.4725, 0.7088, 1.0631, 1.5947, 2.3920,  \
				           3.5880, 5.3821, 538.2070 ");
				values  ("  0.01051,  0.01246,  0.01497,  0.01808,  0.02183,  0.02638,  0.03175,  0.03735,  \
				            0.04203,  0.04469,  0.04580,  0.01391,  0.01551,  0.01770,  0.02061,  0.02441,  \
				            0.02927,  0.03511,  0.04128,  0.04644,  0.04937,  0.05060,  0.01927,  0.02070,  \
				            0.02276,  0.02567,  0.02968,  0.03497,  0.04143,  0.04830,  0.05405,  0.05733,  \
				            0.05871 ");
			}
		}

		capacitance () {
			top_plane: metal9;
			bottom_plane: metal4;
			lateral_capacitance (capacitance_template_WxS) {
				index_1 (" 0.1400, 0.2800, 0.5600 ");
				index_2 (" 0.1400, 0.2100, 0.3150, 0.4725, 0.7088, 1.0631, 1.5947, 2.3920,  \
				           3.5880, 5.3821, 538.2070 ");
				values  ("  0.06441,  0.04461,  0.03029,  0.01976,  0.01211,  0.00684,  0.00345,  0.00154,  \
				            0.00056,  0.00015,  0.00000,  0.06746,  0.04718,  0.03241,  0.02147,  0.01342,  \
				            0.00775,  0.00402,  0.00182,  0.00068,  0.00019,  0.00000,  0.07073,  0.05013,  \
				            0.03501,  0.02368,  0.01520,  0.00906,  0.00486,  0.00227,  0.00087,  0.00024,  \
				            0.00000 ");
			}
			ground_capacitance (capacitance_template_WxS) {
				index_1 (" 0.1400, 0.2800, 0.5600 ");
				index_2 (" 0.1400, 0.2100, 0.3150, 0.4725, 0.7088, 1.0631, 1.5947, 2.3920,  \
				           3.5880, 5.3821, 538.2070 ");
				values  ("  0.02666,  0.03169,  0.03830,  0.04627,  0.05472,  0.06245,  0.06820,  0.07178,  \
				            0.07369,  0.07453,  0.07484,  0.03819,  0.04311,  0.04963,  0.05760,  0.06625,  \
				            0.07439,  0.08067,  0.08476,  0.08700,  0.08797,  0.08835,  0.06076,  0.06554,  \
				            0.07195,  0.07991,  0.08877,  0.09741,  0.10439,  0.10917,  0.11192,  0.11315,  \
				            0.11364 ");
			}
		}

		capacitance () {
			top_plane: metal9;
			bottom_plane: metal3;
			lateral_capacitance (capacitance_template_WxS) {
				index_1 (" 0.1400, 0.2800, 0.5600 ");
				index_2 (" 0.1400, 0.2100, 0.3150, 0.4725, 0.7088, 1.0631, 1.5947, 2.3920,  \
				           3.5880, 5.3821, 538.2070 ");
				values  ("  0.06826,  0.04884,  0.03486,  0.02448,  0.01657,  0.01053,  0.00602,  0.00299,  \
				            0.00121,  0.00036,  0.00000,  0.07235,  0.05229,  0.03767,  0.02668,  0.01822,  \
				            0.01168,  0.00676,  0.00340,  0.00139,  0.00042,  0.00000,  0.07662,  0.05603,  \
				            0.04084,  0.02928,  0.02025,  0.01318,  0.00777,  0.00398,  0.00166,  0.00051,  \
				            0.00000 ");
			}
			ground_capacitance (capacitance_template_WxS) {
				index_1 (" 0.1400, 0.2800, 0.5600 ");
				index_2 (" 0.1400, 0.2100, 0.3150, 0.4725, 0.7088, 1.0631, 1.5947, 2.3920,  \
				           3.5880, 5.3821, 538.2070 ");
				values  ("  0.01486,  0.01759,  0.02126,  0.02601,  0.03179,  0.03826,  0.04457,  0.04967,  \
				            0.05301,  0.05464,  0.05538,  0.02011,  0.02265,  0.02618,  0.03091,  0.03685,  \
				            0.04368,  0.05046,  0.05609,  0.05983,  0.06168,  0.06254,  0.03002,  0.03247,  \
				            0.03594,  0.04069,  0.04681,  0.05402,  0.06137,  0.06765,  0.07196,  0.07415,  \
				            0.07518 ");
			}
		}

		capacitance () {
			top_plane: metal9;
			bottom_plane: metal2;
			lateral_capacitance (capacitance_template_WxS) {
				index_1 (" 0.1400, 0.2800, 0.5600 ");
				index_2 (" 0.1400, 0.2100, 0.3150, 0.4725, 0.7088, 1.0631, 1.5947, 2.3920,  \
				           3.5880, 5.3821, 538.2070 ");
				values  ("  0.06920,  0.04990,  0.03608,  0.02587,  0.01808,  0.01203,  0.00729,  0.00386,  \
				            0.00167,  0.00053,  0.00000,  0.07359,  0.05364,  0.03916,  0.02831,  0.01993,  \
				            0.01333,  0.00814,  0.00434,  0.00189,  0.00060,  0.00000,  0.07837,  0.05786,  \
				            0.04275,  0.03124,  0.02221,  0.01501,  0.00927,  0.00500,  0.00221,  0.00071,  \
				            0.00000 ");
			}
			ground_capacitance (capacitance_template_WxS) {
				index_1 (" 0.1400, 0.2800, 0.5600 ");
				index_2 (" 0.1400, 0.2100, 0.3150, 0.4725, 0.7088, 1.0631, 1.5947, 2.3920,  \
				           3.5880, 5.3821, 538.2070 ");
				values  ("  0.01238,  0.01466,  0.01769,  0.02157,  0.02633,  0.03189,  0.03781,  0.04318,  \
				            0.04714,  0.04930,  0.05038,  0.01657,  0.01860,  0.02141,  0.02519,  0.03003,  \
				            0.03591,  0.04229,  0.04819,  0.05259,  0.05501,  0.05624,  0.02400,  0.02589,  \
				            0.02861,  0.03238,  0.03740,  0.04364,  0.05057,  0.05712,  0.06212,  0.06492,  \
				            0.06638 ");
			}
		}

		capacitance () {
			top_plane: metal9;
			bottom_plane: metal1;
			lateral_capacitance (capacitance_template_WxS) {
				index_1 (" 0.1400, 0.2800, 0.5600 ");
				index_2 (" 0.1400, 0.2100, 0.3150, 0.4725, 0.7088, 1.0631, 1.5947, 2.3920,  \
				           3.5880, 5.3821, 538.2070 ");
				values  ("  0.06979,  0.05057,  0.03684,  0.02674,  0.01907,  0.01308,  0.00828,  0.00462,  \
				            0.00211,  0.00071,  0.00000,  0.07434,  0.05447,  0.04009,  0.02935,  0.02108,  \
				            0.01452,  0.00923,  0.00516,  0.00237,  0.00081,  0.00000,  0.07946,  0.05901,  \
				            0.04398,  0.03255,  0.02358,  0.01636,  0.01048,  0.00591,  0.00274,  0.00094,  \
				            0.00000 ");
			}
			ground_capacitance (capacitance_template_WxS) {
				index_1 (" 0.1400, 0.2800, 0.5600 ");
				index_2 (" 0.1400, 0.2100, 0.3150, 0.4725, 0.7088, 1.0631, 1.5947, 2.3920,  \
				           3.5880, 5.3821, 538.2070 ");
				values  ("  0.01086,  0.01290,  0.01559,  0.01898,  0.02310,  0.02797,  0.03341,  0.03877,  \
				            0.04313,  0.04575,  0.04719,  0.01454,  0.01629,  0.01869,  0.02191,  0.02604,  \
				            0.03117,  0.03704,  0.04293,  0.04776,  0.05067,  0.05231,  0.02064,  0.02222,  \
				            0.02448,  0.02764,  0.03190,  0.03737,  0.04378,  0.05032,  0.05576,  0.05911,  \
				            0.06101 ");
			}
		}

		capacitance () {
			top_plane: metal9;
			bottom_plane: SUBSTRATE;
			lateral_capacitance (capacitance_template_WxS) {
				index_1 (" 0.1400, 0.2800, 0.5600 ");
				index_2 (" 0.1400, 0.2100, 0.3150, 0.4725, 0.7088, 1.0631, 1.5947, 2.3920,  \
				           3.5880, 5.3821, 538.2070 ");
				values  ("  0.07042,  0.05127,  0.03763,  0.02764,  0.02010,  0.01424,  0.00946,  0.00564,  \
				            0.00279,  0.00103,  0.00000,  0.07511,  0.05531,  0.04102,  0.03041,  0.02228,  \
				            0.01584,  0.01055,  0.00628,  0.00312,  0.00116,  0.00000,  0.08056,  0.06018,  \
				            0.04524,  0.03393,  0.02508,  0.01793,  0.01199,  0.00717,  0.00357,  0.00134,  \
				            0.00000 ");
			}
			ground_capacitance (capacitance_template_WxS) {
				index_1 (" 0.1400, 0.2800, 0.5600 ");
				index_2 (" 0.1400, 0.2100, 0.3150, 0.4725, 0.7088, 1.0631, 1.5947, 2.3920,  \
				           3.5880, 5.3821, 538.2070 ");
				values  ("  0.00928,  0.01110,  0.01348,  0.01644,  0.01996,  0.02407,  0.02882,  0.03392,  \
				            0.03858,  0.04178,  0.04385,  0.01254,  0.01405,  0.01609,  0.01879,  0.02221,  \
				            0.02649,  0.03162,  0.03721,  0.04236,  0.04591,  0.04823,  0.01752,  0.01880,  \
				            0.02063,  0.02318,  0.02665,  0.03121,  0.03683,  0.04306,  0.04885,  0.05289,  \
				            0.05556 ");
			}
		}

		capacitance () {
			top_plane: AIR;
			bottom_plane: metal4;
			lateral_capacitance (capacitance_template_WxS) {
				index_1 (" 0.1400, 0.2800, 0.5600 ");
				index_2 (" 0.1400, 0.2100, 0.3150, 0.4725, 0.7088, 1.0631, 1.5947, 2.3920,  \
				           3.5880, 5.3821, 538.2070 ");
				values  ("  0.06486,  0.04508,  0.03080,  0.02030,  0.01266,  0.00737,  0.00396,  0.00200,  \
				            0.00096,  0.00045,  0.00000,  0.06795,  0.04770,  0.03297,  0.02208,  0.01406,  \
				            0.00840,  0.00465,  0.00241,  0.00119,  0.00058,  0.00000,  0.07135,  0.05079,  \
				            0.03571,  0.02445,  0.01604,  0.00995,  0.00576,  0.00313,  0.00162,  0.00081,  \
				            0.00000 ");
			}
			ground_capacitance (capacitance_template_WxS) {
				index_1 (" 0.1400, 0.2800, 0.5600 ");
				index_2 (" 0.1400, 0.2100, 0.3150, 0.4725, 0.7088, 1.0631, 1.5947, 2.3920,  \
				           3.5880, 5.3821, 538.2070 ");
				values  ("  0.02553,  0.03046,  0.03696,  0.04482,  0.05321,  0.06092,  0.06671,  0.07038,  \
				            0.07241,  0.07343,  0.07434,  0.03693,  0.04175,  0.04815,  0.05598,  0.06449,  \
				            0.07254,  0.07880,  0.08295,  0.08532,  0.08653,  0.08769,  0.05917,  0.06385,  \
				            0.07009,  0.07783,  0.08644,  0.09486,  0.10171,  0.10650,  0.10942,  0.11098,  \
				            0.11261 ");
			}
		}

		capacitance () {
			top_plane: AIR;
			bottom_plane: metal3;
			lateral_capacitance (capacitance_template_WxS) {
				index_1 (" 0.1400, 0.2800, 0.5600 ");
				index_2 (" 0.1400, 0.2100, 0.3150, 0.4725, 0.7088, 1.0631, 1.5947, 2.3920,  \
				           3.5880, 5.3821, 538.2070 ");
				values  ("  0.06888,  0.04951,  0.03558,  0.02524,  0.01735,  0.01133,  0.00683,  0.00379,  \
				            0.00195,  0.00095,  0.00000,  0.07303,  0.05301,  0.03843,  0.02749,  0.01908,  \
				            0.01260,  0.00773,  0.00436,  0.00229,  0.00114,  0.00000,  0.07741,  0.05687,  \
				            0.04173,  0.03024,  0.02131,  0.01435,  0.00903,  0.00527,  0.00286,  0.00148,  \
				            0.00000 ");
			}
			ground_capacitance (capacitance_template_WxS) {
				index_1 (" 0.1400, 0.2800, 0.5600 ");
				index_2 (" 0.1400, 0.2100, 0.3150, 0.4725, 0.7088, 1.0631, 1.5947, 2.3920,  \
				           3.5880, 5.3821, 538.2070 ");
				values  ("  0.01330,  0.01589,  0.01941,  0.02401,  0.02966,  0.03602,  0.04222,  0.04724,  \
				            0.05064,  0.05251,  0.05441,  0.01841,  0.02083,  0.02422,  0.02878,  0.03451,  \
				            0.04110,  0.04766,  0.05313,  0.05691,  0.05904,  0.06132,  0.02802,  0.03034,  \
				            0.03364,  0.03814,  0.04393,  0.05071,  0.05765,  0.06365,  0.06797,  0.07052,  \
				            0.07345 ");
			}
		}

		capacitance () {
			top_plane: AIR;
			bottom_plane: metal2;
			lateral_capacitance (capacitance_template_WxS) {
				index_1 (" 0.1400, 0.2800, 0.5600 ");
				index_2 (" 0.1400, 0.2100, 0.3150, 0.4725, 0.7088, 1.0631, 1.5947, 2.3920,  \
				           3.5880, 5.3821, 538.2070 ");
				values  ("  0.06992,  0.05068,  0.03692,  0.02676,  0.01900,  0.01297,  0.00826,  0.00485,  \
				            0.00260,  0.00131,  0.00000,  0.07438,  0.05448,  0.04005,  0.02925,  0.02093,  \
				            0.01439,  0.00927,  0.00551,  0.00301,  0.00154,  0.00000,  0.07928,  0.05880,  \
				            0.04375,  0.03232,  0.02339,  0.01631,  0.01070,  0.00651,  0.00367,  0.00194,  \
				            0.00000 ");
			}
			ground_capacitance (capacitance_template_WxS) {
				index_1 (" 0.1400, 0.2800, 0.5600 ");
				index_2 (" 0.1400, 0.2100, 0.3150, 0.4725, 0.7088, 1.0631, 1.5947, 2.3920,  \
				           3.5880, 5.3821, 538.2070 ");
				values  ("  0.01060,  0.01270,  0.01553,  0.01924,  0.02386,  0.02928,  0.03502,  0.04021,  \
				            0.04413,  0.04651,  0.04910,  0.01461,  0.01650,  0.01915,  0.02274,  0.02737,  \
				            0.03298,  0.03903,  0.04464,  0.04895,  0.05162,  0.05466,  0.02174,  0.02351,  \
				            0.02604,  0.02956,  0.03422,  0.03999,  0.04637,  0.05246,  0.05729,  0.06040,  \
				            0.06421 ");
			}
		}

		capacitance () {
			top_plane: AIR;
			bottom_plane: metal1;
			lateral_capacitance (capacitance_template_WxS) {
				index_1 (" 0.1400, 0.2800, 0.5600 ");
				index_2 (" 0.1400, 0.2100, 0.3150, 0.4725, 0.7088, 1.0631, 1.5947, 2.3920,  \
				           3.5880, 5.3821, 538.2070 ");
				values  ("  0.07058,  0.05144,  0.03779,  0.02775,  0.02011,  0.01415,  0.00938,  0.00576,  \
				            0.00323,  0.00168,  0.00000,  0.07524,  0.05541,  0.04109,  0.03041,  0.02219,  \
				            0.01570,  0.01050,  0.00650,  0.00370,  0.00195,  0.00000,  0.08047,  0.06006,  \
				            0.04509,  0.03374,  0.02487,  0.01779,  0.01206,  0.00761,  0.00444,  0.00241,  \
				            0.00000 ");
			}
			ground_capacitance (capacitance_template_WxS) {
				index_1 (" 0.1400, 0.2800, 0.5600 ");
				index_2 (" 0.1400, 0.2100, 0.3150, 0.4725, 0.7088, 1.0631, 1.5947, 2.3920,  \
				           3.5880, 5.3821, 538.2070 ");
				values  ("  0.00890,  0.01071,  0.01316,  0.01635,  0.02031,  0.02502,  0.03025,  0.03533,  \
				            0.03954,  0.04232,  0.04561,  0.01233,  0.01393,  0.01616,  0.01917,  0.02308,  \
				            0.02792,  0.03340,  0.03888,  0.04347,  0.04656,  0.05038,  0.01813,  0.01958,  \
				            0.02166,  0.02455,  0.02845,  0.03342,  0.03919,  0.04510,  0.05019,  0.05374,  \
				            0.05842 ");
			}
		}

		capacitance () {
			top_plane: AIR;
			bottom_plane: SUBSTRATE;
			lateral_capacitance (capacitance_template_WxS) {
				index_1 (" 0.1400, 0.2800, 0.5600 ");
				index_2 (" 0.1400, 0.2100, 0.3150, 0.4725, 0.7088, 1.0631, 1.5947, 2.3920,  \
				           3.5880, 5.3821, 538.2070 ");
				values  ("  0.07131,  0.05226,  0.03873,  0.02882,  0.02134,  0.01551,  0.01077,  0.00701,  \
				            0.00418,  0.00229,  0.00000,  0.07615,  0.05641,  0.04219,  0.03165,  0.02358,  \
				            0.01721,  0.01202,  0.00786,  0.00473,  0.00262,  0.00000,  0.08173,  0.06139,  \
				            0.04651,  0.03529,  0.02654,  0.01953,  0.01377,  0.00912,  0.00559,  0.00317,  \
				            0.00000 ");
			}
			ground_capacitance (capacitance_template_WxS) {
				index_1 (" 0.1400, 0.2800, 0.5600 ");
				index_2 (" 0.1400, 0.2100, 0.3150, 0.4725, 0.7088, 1.0631, 1.5947, 2.3920,  \
				           3.5880, 5.3821, 538.2070 ");
				values  ("  0.00709,  0.00861,  0.01067,  0.01336,  0.01667,  0.02062,  0.02512,  0.02983,  \
				            0.03416,  0.03739,  0.04178,  0.00997,  0.01130,  0.01313,  0.01559,  0.01877,  \
				            0.02275,  0.02744,  0.03248,  0.03717,  0.04073,  0.04575,  0.01462,  0.01576,  \
				            0.01740,  0.01968,  0.02278,  0.02680,  0.03171,  0.03712,  0.04226,  0.04628,  \
				            0.05230 ");
			}
		}
	}

	layer (metal4) {
		resistance: 0.210000

		capacitance () {
			top_plane: metal5;
			bottom_plane: metal3;
			lateral_capacitance (capacitance_template_WxS) {
				index_1 (" 0.1400, 0.2700, 0.2800, 0.5000, 0.5600, 0.9000 ");
				index_2 (" 0.1400, 0.2100, 0.2700, 0.3150, 0.4725, 0.5000, 0.7088, 0.9000,  \
				           1.0631, 1.5947, 2.3920, 3.5880, 5.3821, 538.2070 ");
				values  ("  0.05409,  0.03360,  0.02388,  0.01892,  0.00886,  0.00781,  0.00303,  0.00130,  \
				            0.00064,  0.00007,  0.00000,  0.00000,  0.00000,  0.00000,  0.05460,  0.03393,  \
				            0.02413,  0.01912,  0.00896,  0.00790,  0.00307,  0.00132,  0.00065,  0.00007,  \
				            0.00000,  0.00000,  0.00000,  0.00000,  0.05462,  0.03395,  0.02414,  0.01913,  \
				            0.00897,  0.00790,  0.00307,  0.00132,  0.00065,  0.00007,  0.00000,  0.00000,  \
				            0.00000,  0.00000,  0.05477,  0.03404,  0.02421,  0.01918,  0.00899,  0.00792,  \
				            0.00308,  0.00132,  0.00065,  0.00007,  0.00000,  0.00000,  0.00000,  0.00000,  \
				            0.05475,  0.03404,  0.02420,  0.01918,  0.00899,  0.00792,  0.00308,  0.00132,  \
				            0.00065,  0.00007,  0.00000,  0.00000,  0.00000,  0.00000,  0.05476,  0.03404,  \
				            0.02421,  0.01918,  0.00899,  0.00792,  0.00308,  0.00132,  0.00065,  0.00007,  \
				            0.00000,  0.00000,  0.00000,  0.00000 ");
			}
			ground_capacitance (capacitance_template_WxS) {
				index_1 (" 0.1400, 0.2700, 0.2800, 0.5000, 0.5600, 0.9000 ");
				index_2 (" 0.1400, 0.2100, 0.2700, 0.3150, 0.4725, 0.5000, 0.7088, 0.9000,  \
				           1.0631, 1.5947, 2.3920, 3.5880, 5.3821, 538.2070 ");
				values  ("  0.06910,  0.08108,  0.08965,  0.09530,  0.10938,  0.11116,  0.11965,  0.12323,  \
				            0.12476,  0.12589,  0.12597,  0.12592,  0.12624,  0.12623,  0.10271,  0.11483,  \
				            0.12348,  0.12919,  0.14341,  0.14521,  0.15378,  0.15740,  0.15894,  0.16010,  \
				            0.16017,  0.16013,  0.16043,  0.16042,  0.10531,  0.11743,  0.12609,  0.13180,  \
				            0.14603,  0.14782,  0.15640,  0.16003,  0.16156,  0.16272,  0.16280,  0.16275,  \
				            0.16305,  0.16304,  0.16260,  0.17476,  0.18344,  0.18916,  0.20343,  0.20523,  \
				            0.21384,  0.21747,  0.21901,  0.22016,  0.22024,  0.22020,  0.22049,  0.22049,  \
				            0.17822,  0.19038,  0.19905,  0.20478,  0.21904,  0.22084,  0.22945,  0.23308,  \
				            0.23462,  0.23578,  0.23586,  0.23581,  0.23611,  0.23610,  0.26688,  0.27904,  \
				            0.28772,  0.29345,  0.30771,  0.30951,  0.31812,  0.32175,  0.32329,  0.32445,  \
				            0.32453,  0.32448,  0.32478,  0.32478 ");
			}
		}

		capacitance () {
			top_plane: metal5;
			bottom_plane: metal2;
			lateral_capacitance (capacitance_template_WxS) {
				index_1 (" 0.1400, 0.2700, 0.2800, 0.5000, 0.5600, 0.9000 ");
				index_2 (" 0.1400, 0.2100, 0.2700, 0.3150, 0.4725, 0.5000, 0.7088, 0.9000,  \
				           1.0631, 1.5947, 2.3920, 3.5880, 5.3821, 538.2070 ");
				values  ("  0.06052,  0.04011,  0.03024,  0.02508,  0.01394,  0.01267,  0.00626,  0.00335,  \
				            0.00198,  0.00037,  0.00003,  0.00000,  0.00000,  0.00000,  0.06185,  0.04103,  \
				            0.03093,  0.02564,  0.01425,  0.01295,  0.00639,  0.00343,  0.00203,  0.00038,  \
				            0.00003,  0.00000,  0.00000,  0.00000,  0.06191,  0.04107,  0.03096,  0.02567,  \
				            0.01426,  0.01296,  0.00640,  0.00343,  0.00203,  0.00038,  0.00003,  0.00000,  \
				            0.00000,  0.00000,  0.06239,  0.04139,  0.03121,  0.02587,  0.01437,  0.01306,  \
				            0.00645,  0.00346,  0.00204,  0.00038,  0.00003,  0.00000,  0.00000,  0.00000,  \
				            0.06239,  0.04140,  0.03121,  0.02587,  0.01437,  0.01306,  0.00645,  0.00346,  \
				            0.00204,  0.00038,  0.00003,  0.00000,  0.00000,  0.00000,  0.06244,  0.04143,  \
				            0.03124,  0.02589,  0.01438,  0.01307,  0.00646,  0.00346,  0.00205,  0.00038,  \
				            0.00003,  0.00000,  0.00000,  0.00000 ");
			}
			ground_capacitance (capacitance_template_WxS) {
				index_1 (" 0.1400, 0.2700, 0.2800, 0.5000, 0.5600, 0.9000 ");
				index_2 (" 0.1400, 0.2100, 0.2700, 0.3150, 0.4725, 0.5000, 0.7088, 0.9000,  \
				           1.0631, 1.5947, 2.3920, 3.5880, 5.3821, 538.2070 ");
				values  ("  0.03771,  0.04519,  0.05108,  0.05522,  0.06719,  0.06892,  0.07871,  0.08399,  \
				            0.08671,  0.08995,  0.09063,  0.09067,  0.09071,  0.09071,  0.05448,  0.06222,  \
				            0.06829,  0.07254,  0.08479,  0.08656,  0.09656,  0.10196,  0.10473,  0.10804,  \
				            0.10874,  0.10879,  0.10880,  0.10880,  0.05580,  0.06354,  0.06962,  0.07387,  \
				            0.08614,  0.08791,  0.09792,  0.10333,  0.10610,  0.10942,  0.11011,  0.11016,  \
				            0.11017,  0.11017,  0.08513,  0.09297,  0.09912,  0.10340,  0.11578,  0.11755,  \
				            0.12765,  0.13309,  0.13588,  0.13922,  0.13993,  0.13997,  0.13998,  0.13998,  \
				            0.09317,  0.10102,  0.10716,  0.11145,  0.12383,  0.12561,  0.13570,  0.14115,  \
				            0.14394,  0.14728,  0.14799,  0.14803,  0.14804,  0.14804,  0.13890,  0.14676,  \
				            0.15291,  0.15720,  0.16959,  0.17137,  0.18147,  0.18692,  0.18971,  0.19306,  \
				            0.19376,  0.19381,  0.19382,  0.19382 ");
			}
		}

		capacitance () {
			top_plane: metal5;
			bottom_plane: metal1;
			lateral_capacitance (capacitance_template_WxS) {
				index_1 (" 0.1400, 0.2700, 0.2800, 0.5000, 0.5600, 0.9000 ");
				index_2 (" 0.1400, 0.2100, 0.2700, 0.3150, 0.4725, 0.5000, 0.7088, 0.9000,  \
				           1.0631, 1.5947, 2.3920, 3.5880, 5.3821, 538.2070 ");
				values  ("  0.06232,  0.04218,  0.03247,  0.02740,  0.01634,  0.01505,  0.00832,  0.00499,  \
				            0.00327,  0.00084,  0.00012,  0.00001,  0.00000,  0.00000,  0.06435,  0.04370,  \
				            0.03370,  0.02845,  0.01700,  0.01566,  0.00868,  0.00522,  0.00341,  0.00088,  \
				            0.00012,  0.00001,  0.00000,  0.00000,  0.06446,  0.04378,  0.03376,  0.02851,  \
				            0.01703,  0.01569,  0.00870,  0.00523,  0.00342,  0.00088,  0.00012,  0.00001,  \
				            0.00000,  0.00000,  0.06561,  0.04467,  0.03449,  0.02913,  0.01743,  0.01606,  \
				            0.00892,  0.00536,  0.00351,  0.00091,  0.00013,  0.00001,  0.00000,  0.00000,  \
				            0.06572,  0.04475,  0.03456,  0.02920,  0.01748,  0.01611,  0.00894,  0.00537,  \
				            0.00352,  0.00091,  0.00013,  0.00001,  0.00000,  0.00000,  0.06604,  0.04500,  \
				            0.03477,  0.02938,  0.01759,  0.01621,  0.00900,  0.00541,  0.00354,  0.00092,  \
				            0.00013,  0.00001,  0.00000,  0.00000 ");
			}
			ground_capacitance (capacitance_template_WxS) {
				index_1 (" 0.1400, 0.2700, 0.2800, 0.5000, 0.5600, 0.9000 ");
				index_2 (" 0.1400, 0.2100, 0.2700, 0.3150, 0.4725, 0.5000, 0.7088, 0.9000,  \
				           1.0631, 1.5947, 2.3920, 3.5880, 5.3821, 538.2070 ");
				values  ("  0.03225,  0.03842,  0.04331,  0.04678,  0.05709,  0.05863,  0.06788,  0.07348,  \
				            0.07668,  0.08137,  0.08284,  0.08306,  0.08308,  0.08308,  0.04570,  0.05209,  \
				            0.05715,  0.06072,  0.07139,  0.07298,  0.08257,  0.08838,  0.09170,  0.09661,  \
				            0.09815,  0.09838,  0.09838,  0.09838,  0.04676,  0.05316,  0.05822,  0.06181,  \
				            0.07249,  0.07408,  0.08369,  0.08951,  0.09284,  0.09775,  0.09931,  0.09954,  \
				            0.09953,  0.09953,  0.07052,  0.07704,  0.08220,  0.08585,  0.09674,  0.09837,  \
				            0.10818,  0.11413,  0.11754,  0.12258,  0.12417,  0.12441,  0.12439,  0.12439,  \
				            0.07708,  0.08361,  0.08878,  0.09244,  0.10335,  0.10498,  0.11482,  0.12078,  \
				            0.12420,  0.12926,  0.13086,  0.13109,  0.13108,  0.13108,  0.11459,  0.12116,  \
				            0.12636,  0.13004,  0.14101,  0.14265,  0.15254,  0.15854,  0.16199,  0.16708,  \
				            0.16869,  0.16893,  0.16891,  0.16891 ");
			}
		}

		capacitance () {
			top_plane: metal5;
			bottom_plane: poly;
			lateral_capacitance (capacitance_template_WxS) {
				index_1 (" 0.1400, 0.2700, 0.2800, 0.5000, 0.5600, 0.9000 ");
				index_2 (" 0.1400, 0.2100, 0.2700, 0.3150, 0.4725, 0.5000, 0.7088, 0.9000,  \
				           1.0631, 1.5947, 2.3920, 3.5880, 5.3821, 538.2070 ");
				values  ("  0.06297,  0.04295,  0.03334,  0.02832,  0.01740,  0.01613,  0.00939,  0.00595,  \
				            0.00409,  0.00126,  0.00023,  0.00002,  0.00000,  0.00000,  0.06532,  0.04479,  \
				            0.03487,  0.02967,  0.01831,  0.01698,  0.00993,  0.00631,  0.00434,  0.00134,  \
				            0.00025,  0.00002,  0.00000,  0.00000,  0.06545,  0.04489,  0.03495,  0.02974,  \
				            0.01836,  0.01702,  0.00996,  0.00633,  0.00436,  0.00134,  0.00025,  0.00002,  \
				            0.00000,  0.00000,  0.06705,  0.04618,  0.03605,  0.03072,  0.01903,  0.01766,  \
				            0.01036,  0.00660,  0.00455,  0.00141,  0.00026,  0.00002,  0.00000,  0.00000,  \
				            0.06725,  0.04635,  0.03620,  0.03085,  0.01913,  0.01775,  0.01042,  0.00664,  \
				            0.00458,  0.00142,  0.00026,  0.00002,  0.00000,  0.00000,  0.06791,  0.04689,  \
				            0.03666,  0.03127,  0.01942,  0.01802,  0.01060,  0.00676,  0.00466,  0.00144,  \
				            0.00026,  0.00002,  0.00000,  0.00000 ");
			}
			ground_capacitance (capacitance_template_WxS) {
				index_1 (" 0.1400, 0.2700, 0.2800, 0.5000, 0.5600, 0.9000 ");
				index_2 (" 0.1400, 0.2100, 0.2700, 0.3150, 0.4725, 0.5000, 0.7088, 0.9000,  \
				           1.0631, 1.5947, 2.3920, 3.5880, 5.3821, 538.2070 ");
				values  ("  0.03045,  0.03616,  0.04067,  0.04386,  0.05339,  0.05482,  0.06359,  0.06911,  \
				            0.07241,  0.07776,  0.07983,  0.08026,  0.08030,  0.08030,  0.04277,  0.04863,  \
				            0.05327,  0.05655,  0.06641,  0.06790,  0.07703,  0.08281,  0.08629,  0.09196,  \
				            0.09417,  0.09463,  0.09465,  0.09464,  0.04374,  0.04961,  0.05425,  0.05754,  \
				            0.06741,  0.06890,  0.07806,  0.08385,  0.08735,  0.09303,  0.09525,  0.09571,  \
				            0.09572,  0.09572,  0.06540,  0.07137,  0.07611,  0.07947,  0.08957,  0.09110,  \
				            0.10053,  0.10653,  0.11015,  0.11607,  0.11840,  0.11888,  0.11889,  0.11888,  \
				            0.07139,  0.07737,  0.08212,  0.08549,  0.09563,  0.09716,  0.10663,  0.11266,  \
				            0.11630,  0.12226,  0.12460,  0.12509,  0.12509,  0.12509,  0.10574,  0.11177,  \
				            0.11657,  0.11996,  0.13021,  0.13176,  0.14135,  0.14746,  0.15116,  0.15722,  \
				            0.15961,  0.16011,  0.16011,  0.16011 ");
			}
		}

		capacitance () {
			top_plane: metal5;
			bottom_plane: SUBSTRATE;
			lateral_capacitance (capacitance_template_WxS) {
				index_1 (" 0.1400, 0.2700, 0.2800, 0.5000, 0.5600, 0.9000 ");
				index_2 (" 0.1400, 0.2100, 0.2700, 0.3150, 0.4725, 0.5000, 0.7088, 0.9000,  \
				           1.0631, 1.5947, 2.3920, 3.5880, 5.3821, 538.2070 ");
				values  ("  0.06334,  0.04339,  0.03384,  0.02887,  0.01805,  0.01679,  0.01010,  0.00663,  \
				            0.00471,  0.00163,  0.00036,  0.00004,  0.00000,  0.00000,  0.06588,  0.04542,  \
				            0.03557,  0.03041,  0.01914,  0.01782,  0.01079,  0.00711,  0.00507,  0.00177,  \
				            0.00039,  0.00005,  0.00000,  0.00000,  0.06602,  0.04554,  0.03566,  0.03049,  \
				            0.01920,  0.01788,  0.01083,  0.00714,  0.00509,  0.00178,  0.00040,  0.00005,  \
				            0.00000,  0.00000,  0.06794,  0.04713,  0.03705,  0.03175,  0.02012,  0.01874,  \
				            0.01142,  0.00755,  0.00540,  0.00189,  0.00042,  0.00005,  0.00000,  0.00000,  \
				            0.06822,  0.04738,  0.03726,  0.03194,  0.02026,  0.01888,  0.01151,  0.00762,  \
				            0.00545,  0.00191,  0.00043,  0.00005,  0.00000,  0.00000,  0.06919,  0.04821,  \
				            0.03800,  0.03261,  0.02075,  0.01935,  0.01183,  0.00785,  0.00562,  0.00198,  \
				            0.00044,  0.00005,  0.00000,  0.00000 ");
			}
			ground_capacitance (capacitance_template_WxS) {
				index_1 (" 0.1400, 0.2700, 0.2800, 0.5000, 0.5600, 0.9000 ");
				index_2 (" 0.1400, 0.2100, 0.2700, 0.3150, 0.4725, 0.5000, 0.7088, 0.9000,  \
				           1.0631, 1.5947, 2.3920, 3.5880, 5.3821, 538.2070 ");
				values  ("  0.02945,  0.03492,  0.03922,  0.04225,  0.05129,  0.05266,  0.06104,  0.06644,  \
				            0.06975,  0.07543,  0.07797,  0.07863,  0.07871,  0.07871,  0.04118,  0.04674,  \
				            0.05113,  0.05423,  0.06356,  0.06497,  0.07373,  0.07940,  0.08291,  0.08900,  \
				            0.09174,  0.09246,  0.09252,  0.09252,  0.04209,  0.04766,  0.05205,  0.05516,  \
				            0.06451,  0.06592,  0.07470,  0.08038,  0.08391,  0.09002,  0.09278,  0.09349,  \
				            0.09355,  0.09355,  0.06254,  0.06818,  0.07265,  0.07582,  0.08539,  0.08685,  \
				            0.09593,  0.10186,  0.10555,  0.11201,  0.11495,  0.11572,  0.11577,  0.11577,  \
				            0.06818,  0.07383,  0.07832,  0.08149,  0.09110,  0.09256,  0.10170,  0.10767,  \
				            0.11139,  0.11790,  0.12087,  0.12165,  0.12171,  0.12171,  0.10059,  0.10630,  \
				            0.11083,  0.11404,  0.12378,  0.12527,  0.13457,  0.14068,  0.14449,  0.15119,  \
				            0.15426,  0.15507,  0.15512,  0.15513 ");
			}
		}

		capacitance () {
			top_plane: metal6;
			bottom_plane: metal3;
			lateral_capacitance (capacitance_template_WxS) {
				index_1 (" 0.1400, 0.2700, 0.2800, 0.5000, 0.5600, 0.9000 ");
				index_2 (" 0.1400, 0.2100, 0.2700, 0.3150, 0.4725, 0.5000, 0.7088, 0.9000,  \
				           1.0631, 1.5947, 2.3920, 3.5880, 5.3821, 538.2070 ");
				values  ("  0.05760,  0.03766,  0.02825,  0.02343,  0.01331,  0.01218,  0.00649,  0.00383,  \
				            0.00250,  0.00065,  0.00010,  0.00001,  0.00000,  0.00000,  0.05951,  0.03922,  \
				            0.02958,  0.02462,  0.01413,  0.01294,  0.00697,  0.00414,  0.00270,  0.00071,  \
				            0.00011,  0.00001,  0.00000,  0.00000,  0.05963,  0.03931,  0.02966,  0.02468,  \
				            0.01417,  0.01299,  0.00699,  0.00416,  0.00271,  0.00072,  0.00011,  0.00001,  \
				            0.00000,  0.00000,  0.06113,  0.04056,  0.03073,  0.02564,  0.01483,  0.01361,  \
				            0.00738,  0.00440,  0.00288,  0.00076,  0.00011,  0.00001,  0.00000,  0.00000,  \
				            0.06134,  0.04073,  0.03088,  0.02578,  0.01493,  0.01370,  0.00744,  0.00444,  \
				            0.00291,  0.00077,  0.00011,  0.00001,  0.00000,  0.00000,  0.06201,  0.04129,  \
				            0.03136,  0.02621,  0.01523,  0.01398,  0.00761,  0.00455,  0.00298,  0.00079,  \
				            0.00012,  0.00001,  0.00000,  0.00000 ");
			}
			ground_capacitance (capacitance_template_WxS) {
				index_1 (" 0.1400, 0.2700, 0.2800, 0.5000, 0.5600, 0.9000 ");
				index_2 (" 0.1400, 0.2100, 0.2700, 0.3150, 0.4725, 0.5000, 0.7088, 0.9000,  \
				           1.0631, 1.5947, 2.3920, 3.5880, 5.3821, 538.2070 ");
				values  ("  0.05752,  0.06681,  0.07342,  0.07784,  0.08944,  0.09104,  0.09973,  0.10457,  \
				            0.10723,  0.11081,  0.11192,  0.11206,  0.11235,  0.11234,  0.08406,  0.09340,  \
				            0.10009,  0.10459,  0.11650,  0.11816,  0.12726,  0.13238,  0.13521,  0.13908,  \
				            0.14029,  0.14046,  0.14072,  0.14071,  0.08611,  0.09546,  0.10215,  0.10665,  \
				            0.11859,  0.12024,  0.12937,  0.13450,  0.13735,  0.14124,  0.14245,  0.14262,  \
				            0.14288,  0.14287,  0.13152,  0.14095,  0.14773,  0.15230,  0.16451,  0.16621,  \
				            0.17567,  0.18104,  0.18402,  0.18814,  0.18945,  0.18963,  0.18988,  0.18987,  \
				            0.14396,  0.15341,  0.16020,  0.16478,  0.17704,  0.17874,  0.18825,  0.19365,  \
				            0.19666,  0.20082,  0.20213,  0.20232,  0.20257,  0.20257,  0.21499,  0.22449,  \
				            0.23133,  0.23595,  0.24833,  0.25007,  0.25972,  0.26523,  0.26830,  0.27256,  \
				            0.27391,  0.27410,  0.27436,  0.27435 ");
			}
		}

		capacitance () {
			top_plane: metal6;
			bottom_plane: metal2;
			lateral_capacitance (capacitance_template_WxS) {
				index_1 (" 0.1400, 0.2700, 0.2800, 0.5000, 0.5600, 0.9000 ");
				index_2 (" 0.1400, 0.2100, 0.2700, 0.3150, 0.4725, 0.5000, 0.7088, 0.9000,  \
				           1.0631, 1.5947, 2.3920, 3.5880, 5.3821, 538.2070 ");
				values  ("  0.06431,  0.04440,  0.03484,  0.02984,  0.01886,  0.01756,  0.01060,  0.00693,  \
				            0.00489,  0.00162,  0.00033,  0.00003,  0.00000,  0.00000,  0.06698,  0.04648,  \
				            0.03656,  0.03135,  0.01987,  0.01851,  0.01120,  0.00733,  0.00517,  0.00172,  \
				            0.00035,  0.00003,  0.00000,  0.00000,  0.06713,  0.04659,  0.03665,  0.03143,  \
				            0.01992,  0.01856,  0.01124,  0.00736,  0.00519,  0.00172,  0.00035,  0.00003,  \
				            0.00000,  0.00000,  0.06891,  0.04802,  0.03785,  0.03249,  0.02065,  0.01924,  \
				            0.01167,  0.00765,  0.00540,  0.00180,  0.00036,  0.00004,  0.00000,  0.00000,  \
				            0.06913,  0.04820,  0.03801,  0.03263,  0.02075,  0.01933,  0.01173,  0.00769,  \
				            0.00543,  0.00181,  0.00037,  0.00004,  0.00000,  0.00000,  0.06981,  0.04876,  \
				            0.03849,  0.03306,  0.02104,  0.01961,  0.01191,  0.00781,  0.00552,  0.00184,  \
				            0.00037,  0.00004,  0.00000,  0.00000 ");
			}
			ground_capacitance (capacitance_template_WxS) {
				index_1 (" 0.1400, 0.2700, 0.2800, 0.5000, 0.5600, 0.9000 ");
				index_2 (" 0.1400, 0.2100, 0.2700, 0.3150, 0.4725, 0.5000, 0.7088, 0.9000,  \
				           1.0631, 1.5947, 2.3920, 3.5880, 5.3821, 538.2070 ");
				values  ("  0.02584,  0.03064,  0.03449,  0.03725,  0.04578,  0.04710,  0.05546,  0.06102,  \
				            0.06449,  0.07051,  0.07310,  0.07371,  0.07373,  0.07373,  0.03568,  0.04063,  \
				            0.04463,  0.04749,  0.05637,  0.05775,  0.06650,  0.07233,  0.07598,  0.08235,  \
				            0.08510,  0.08574,  0.08575,  0.08575,  0.03645,  0.04142,  0.04542,  0.04830,  \
				            0.05719,  0.05857,  0.06734,  0.07318,  0.07685,  0.08323,  0.08599,  0.08664,  \
				            0.08664,  0.08664,  0.05402,  0.05912,  0.06323,  0.06618,  0.07532,  0.07674,  \
				            0.08579,  0.09184,  0.09563,  0.10227,  0.10515,  0.10582,  0.10582,  0.10582,  \
				            0.05891,  0.06402,  0.06815,  0.07111,  0.08029,  0.08171,  0.09081,  0.09688,  \
				            0.10069,  0.10736,  0.11026,  0.11094,  0.11093,  0.11093,  0.08706,  0.09222,  \
				            0.09640,  0.09939,  0.10867,  0.11012,  0.11932,  0.12547,  0.12934,  0.13612,  \
				            0.13906,  0.13976,  0.13975,  0.13975 ");
			}
		}

		capacitance () {
			top_plane: metal6;
			bottom_plane: metal1;
			lateral_capacitance (capacitance_template_WxS) {
				index_1 (" 0.1400, 0.2700, 0.2800, 0.5000, 0.5600, 0.9000 ");
				index_2 (" 0.1400, 0.2100, 0.2700, 0.3150, 0.4725, 0.5000, 0.7088, 0.9000,  \
				           1.0631, 1.5947, 2.3920, 3.5880, 5.3821, 538.2070 ");
				values  ("  0.06624,  0.04659,  0.03719,  0.03228,  0.02144,  0.02014,  0.01303,  0.00907,  \
				            0.00674,  0.00263,  0.00067,  0.00009,  0.00000,  0.00000,  0.06957,  0.04924,  \
				            0.03942,  0.03425,  0.02278,  0.02140,  0.01385,  0.00963,  0.00716,  0.00279,  \
				            0.00071,  0.00010,  0.00000,  0.00000,  0.06976,  0.04939,  0.03954,  0.03436,  \
				            0.02285,  0.02147,  0.01389,  0.00967,  0.00718,  0.00280,  0.00071,  0.00010,  \
				            0.00000,  0.00000,  0.07218,  0.05133,  0.04118,  0.03581,  0.02384,  0.02240,  \
				            0.01449,  0.01008,  0.00749,  0.00292,  0.00074,  0.00010,  0.00000,  0.00000,  \
				            0.07249,  0.05159,  0.04140,  0.03600,  0.02398,  0.02253,  0.01458,  0.01014,  \
				            0.00753,  0.00294,  0.00075,  0.00010,  0.00000,  0.00000,  0.07342,  0.05234,  \
				            0.04204,  0.03657,  0.02437,  0.02290,  0.01481,  0.01030,  0.00765,  0.00299,  \
				            0.00076,  0.00010,  0.00000,  0.00000 ");
			}
			ground_capacitance (capacitance_template_WxS) {
				index_1 (" 0.1400, 0.2700, 0.2800, 0.5000, 0.5600, 0.9000 ");
				index_2 (" 0.1400, 0.2100, 0.2700, 0.3150, 0.4725, 0.5000, 0.7088, 0.9000,  \
				           1.0631, 1.5947, 2.3920, 3.5880, 5.3821, 538.2070 ");
				values  ("  0.02006,  0.02359,  0.02644,  0.02851,  0.03514,  0.03621,  0.04336,  0.04858,  \
				            0.05212,  0.05919,  0.06301,  0.06421,  0.06432,  0.06433,  0.02670,  0.03031,  \
				            0.03329,  0.03546,  0.04245,  0.04358,  0.05116,  0.05668,  0.06044,  0.06794,  \
				            0.07200,  0.07327,  0.07337,  0.07338,  0.02723,  0.03085,  0.03383,  0.03600,  \
				            0.04302,  0.04415,  0.05175,  0.05730,  0.06107,  0.06859,  0.07267,  0.07394,  \
				            0.07404,  0.07404,  0.03933,  0.04309,  0.04621,  0.04848,  0.05580,  0.05698,  \
				            0.06491,  0.07069,  0.07461,  0.08246,  0.08671,  0.08804,  0.08813,  0.08814,  \
				            0.04275,  0.04654,  0.04968,  0.05196,  0.05933,  0.06052,  0.06850,  0.07431,  \
				            0.07825,  0.08614,  0.09042,  0.09176,  0.09185,  0.09186,  0.06273,  0.06660,  \
				            0.06979,  0.07212,  0.07962,  0.08083,  0.08894,  0.09485,  0.09885,  0.10687,  \
				            0.11122,  0.11257,  0.11266,  0.11267 ");
			}
		}

		capacitance () {
			top_plane: metal6;
			bottom_plane: poly;
			lateral_capacitance (capacitance_template_WxS) {
				index_1 (" 0.1400, 0.2700, 0.2800, 0.5000, 0.5600, 0.9000 ");
				index_2 (" 0.1400, 0.2100, 0.2700, 0.3150, 0.4725, 0.5000, 0.7088, 0.9000,  \
				           1.0631, 1.5947, 2.3920, 3.5880, 5.3821, 538.2070 ");
				values  ("  0.06699,  0.04744,  0.03814,  0.03329,  0.02261,  0.02133,  0.01427,  0.01026,  \
				            0.00785,  0.00338,  0.00099,  0.00016,  0.00001,  0.00000,  0.07061,  0.05039,  \
				            0.04065,  0.03553,  0.02418,  0.02281,  0.01526,  0.01097,  0.00839,  0.00361,  \
				            0.00105,  0.00017,  0.00001,  0.00000,  0.07082,  0.05056,  0.04079,  0.03566,  \
				            0.02427,  0.02289,  0.01532,  0.01101,  0.00842,  0.00362,  0.00106,  0.00017,  \
				            0.00001,  0.00000,  0.07366,  0.05288,  0.04278,  0.03743,  0.02551,  0.02407,  \
				            0.01610,  0.01157,  0.00884,  0.00380,  0.00111,  0.00018,  0.00001,  0.00000,  \
				            0.07406,  0.05322,  0.04307,  0.03769,  0.02570,  0.02425,  0.01622,  0.01165,  \
				            0.00890,  0.00383,  0.00112,  0.00018,  0.00001,  0.00000,  0.07530,  0.05424,  \
				            0.04395,  0.03848,  0.02625,  0.02476,  0.01656,  0.01189,  0.00909,  0.00391,  \
				            0.00114,  0.00019,  0.00001,  0.00000 ");
			}
			ground_capacitance (capacitance_template_WxS) {
				index_1 (" 0.1400, 0.2700, 0.2800, 0.5000, 0.5600, 0.9000 ");
				index_2 (" 0.1400, 0.2100, 0.2700, 0.3150, 0.4725, 0.5000, 0.7088, 0.9000,  \
				           1.0631, 1.5947, 2.3920, 3.5880, 5.3821, 538.2070 ");
				values  ("  0.01804,  0.02113,  0.02360,  0.02539,  0.03116,  0.03210,  0.03850,  0.04335,  \
				            0.04677,  0.05410,  0.05863,  0.06031,  0.06056,  0.06058,  0.02362,  0.02671,  \
				            0.02927,  0.03113,  0.03723,  0.03822,  0.04504,  0.05020,  0.05385,  0.06167,  \
				            0.06651,  0.06831,  0.06855,  0.06858,  0.02406,  0.02716,  0.02972,  0.03159,  \
				            0.03770,  0.03870,  0.04554,  0.05072,  0.05438,  0.06223,  0.06709,  0.06890,  \
				            0.06914,  0.06916,  0.03412,  0.03735,  0.04003,  0.04199,  0.04842,  0.04947,  \
				            0.05667,  0.06212,  0.06595,  0.07419,  0.07930,  0.08119,  0.08144,  0.08146,  \
				            0.03699,  0.04024,  0.04294,  0.04492,  0.05140,  0.05245,  0.05971,  0.06520,  \
				            0.06907,  0.07736,  0.08250,  0.08441,  0.08466,  0.08468,  0.05385,  0.05718,  \
				            0.05996,  0.06199,  0.06863,  0.06971,  0.07714,  0.08275,  0.08669,  0.09516,  \
				            0.10041,  0.10236,  0.10260,  0.10263 ");
			}
		}

		capacitance () {
			top_plane: metal6;
			bottom_plane: SUBSTRATE;
			lateral_capacitance (capacitance_template_WxS) {
				index_1 (" 0.1400, 0.2700, 0.2800, 0.5000, 0.5600, 0.9000 ");
				index_2 (" 0.1400, 0.2100, 0.2700, 0.3150, 0.4725, 0.5000, 0.7088, 0.9000,  \
				           1.0631, 1.5947, 2.3920, 3.5880, 5.3821, 538.2070 ");
				values  ("  0.06744,  0.04796,  0.03871,  0.03390,  0.02334,  0.02207,  0.01510,  0.01111,  \
				            0.00867,  0.00401,  0.00131,  0.00025,  0.00002,  0.00000,  0.07123,  0.05108,  \
				            0.04140,  0.03632,  0.02508,  0.02373,  0.01624,  0.01194,  0.00932,  0.00430,  \
				            0.00141,  0.00027,  0.00002,  0.00000,  0.07145,  0.05126,  0.04156,  0.03646,  \
				            0.02518,  0.02382,  0.01630,  0.01199,  0.00935,  0.00432,  0.00141,  0.00027,  \
				            0.00002,  0.00000,  0.07459,  0.05388,  0.04382,  0.03850,  0.02665,  0.02522,  \
				            0.01726,  0.01269,  0.00990,  0.00457,  0.00149,  0.00029,  0.00002,  0.00000,  \
				            0.07506,  0.05428,  0.04417,  0.03882,  0.02688,  0.02544,  0.01742,  0.01280,  \
				            0.00999,  0.00461,  0.00151,  0.00029,  0.00003,  0.00000,  0.07660,  0.05558,  \
				            0.04530,  0.03984,  0.02762,  0.02614,  0.01790,  0.01315,  0.01026,  0.00474,  \
				            0.00155,  0.00030,  0.00003,  0.00000 ");
			}
			ground_capacitance (capacitance_template_WxS) {
				index_1 (" 0.1400, 0.2700, 0.2800, 0.5000, 0.5600, 0.9000 ");
				index_2 (" 0.1400, 0.2100, 0.2700, 0.3150, 0.4725, 0.5000, 0.7088, 0.9000,  \
				           1.0631, 1.5947, 2.3920, 3.5880, 5.3821, 538.2070 ");
				values  ("  0.01687,  0.01972,  0.02198,  0.02361,  0.02886,  0.02971,  0.03559,  0.04013,  \
				            0.04338,  0.05072,  0.05571,  0.05784,  0.05825,  0.05830,  0.02189,  0.02469,  \
				            0.02700,  0.02868,  0.03419,  0.03510,  0.04136,  0.04620,  0.04970,  0.05756,  \
				            0.06293,  0.06521,  0.06564,  0.06568,  0.02228,  0.02508,  0.02739,  0.02908,  \
				            0.03461,  0.03552,  0.04181,  0.04667,  0.05018,  0.05807,  0.06345,  0.06575,  \
				            0.06618,  0.06622,  0.03117,  0.03407,  0.03648,  0.03825,  0.04408,  0.04504,  \
				            0.05168,  0.05682,  0.06053,  0.06887,  0.07457,  0.07700,  0.07744,  0.07749,  \
				            0.03370,  0.03663,  0.03906,  0.04084,  0.04672,  0.04768,  0.05439,  0.05958,  \
				            0.06332,  0.07174,  0.07748,  0.07994,  0.08038,  0.08043,  0.04867,  0.05167,  \
				            0.05418,  0.05602,  0.06208,  0.06307,  0.06997,  0.07531,  0.07915,  0.08779,  \
				            0.09369,  0.09621,  0.09666,  0.09672 ");
			}
		}

		capacitance () {
			top_plane: metal7;
			bottom_plane: metal3;
			lateral_capacitance (capacitance_template_WxS) {
				index_1 (" 0.1400, 0.2700, 0.2800, 0.5000, 0.5600, 0.9000 ");
				index_2 (" 0.1400, 0.2100, 0.2700, 0.3150, 0.4725, 0.5000, 0.7088, 0.9000,  \
				           1.0631, 1.5947, 2.3920, 3.5880, 5.3821, 538.2070 ");
				values  ("  0.05824,  0.03844,  0.02914,  0.02439,  0.01446,  0.01335,  0.00772,  0.00498,  \
				            0.00353,  0.00127,  0.00031,  0.00004,  0.00000,  0.00000,  0.06052,  0.04039,  \
				            0.03086,  0.02597,  0.01566,  0.01449,  0.00851,  0.00556,  0.00397,  0.00144,  \
				            0.00036,  0.00005,  0.00000,  0.00000,  0.06067,  0.04051,  0.03097,  0.02607,  \
				            0.01573,  0.01456,  0.00856,  0.00559,  0.00399,  0.00145,  0.00036,  0.00005,  \
				            0.00000,  0.00000,  0.06283,  0.04239,  0.03266,  0.02763,  0.01694,  0.01571,  \
				            0.00938,  0.00619,  0.00445,  0.00164,  0.00041,  0.00006,  0.00000,  0.00000,  \
				            0.06320,  0.04273,  0.03296,  0.02792,  0.01716,  0.01593,  0.00954,  0.00631,  \
				            0.00454,  0.00168,  0.00042,  0.00006,  0.00000,  0.00000,  0.06463,  0.04400,  \
				            0.03411,  0.02899,  0.01799,  0.01672,  0.01011,  0.00673,  0.00486,  0.00182,  \
				            0.00046,  0.00006,  0.00000,  0.00000 ");
			}
			ground_capacitance (capacitance_template_WxS) {
				index_1 (" 0.1400, 0.2700, 0.2800, 0.5000, 0.5600, 0.9000 ");
				index_2 (" 0.1400, 0.2100, 0.2700, 0.3150, 0.4725, 0.5000, 0.7088, 0.9000,  \
				           1.0631, 1.5947, 2.3920, 3.5880, 5.3821, 538.2070 ");
				values  ("  0.05577,  0.06461,  0.07083,  0.07497,  0.08577,  0.08725,  0.09545,  0.10021,  \
				            0.10296,  0.10724,  0.10911,  0.10963,  0.10998,  0.10998,  0.08117,  0.08996,  \
				            0.09618,  0.10035,  0.11137,  0.11291,  0.12152,  0.12660,  0.12959,  0.13434,  \
				            0.13648,  0.13709,  0.13743,  0.13743,  0.08313,  0.09191,  0.09813,  0.10231,  \
				            0.11335,  0.11489,  0.12352,  0.12862,  0.13163,  0.13641,  0.13857,  0.13918,  \
				            0.13951,  0.13951,  0.12618,  0.13497,  0.14123,  0.14545,  0.15673,  0.15832,  \
				            0.16736,  0.17280,  0.17605,  0.18133,  0.18376,  0.18446,  0.18480,  0.18480,  \
				            0.13795,  0.14674,  0.15301,  0.15724,  0.16857,  0.17017,  0.17928,  0.18479,  \
				            0.18808,  0.19345,  0.19594,  0.19666,  0.19700,  0.19700,  0.20507,  0.21390,  \
				            0.22022,  0.22449,  0.23602,  0.23765,  0.24705,  0.25279,  0.25625,  0.26197,  \
				            0.26466,  0.26544,  0.26579,  0.26579 ");
			}
		}

		capacitance () {
			top_plane: metal7;
			bottom_plane: metal2;
			lateral_capacitance (capacitance_template_WxS) {
				index_1 (" 0.1400, 0.2700, 0.2800, 0.5000, 0.5600, 0.9000 ");
				index_2 (" 0.1400, 0.2100, 0.2700, 0.3150, 0.4725, 0.5000, 0.7088, 0.9000,  \
				           1.0631, 1.5947, 2.3920, 3.5880, 5.3821, 538.2070 ");
				values  ("  0.06507,  0.04528,  0.03583,  0.03092,  0.02018,  0.01891,  0.01210,  0.00843,  \
				            0.00632,  0.00262,  0.00077,  0.00013,  0.00001,  0.00000,  0.06808,  0.04774,  \
				            0.03794,  0.03281,  0.02156,  0.02023,  0.01303,  0.00912,  0.00686,  0.00287,  \
				            0.00085,  0.00015,  0.00001,  0.00000,  0.06826,  0.04788,  0.03806,  0.03292,  \
				            0.02164,  0.02031,  0.01309,  0.00917,  0.00689,  0.00288,  0.00085,  0.00015,  \
				            0.00001,  0.00000,  0.07068,  0.04993,  0.03987,  0.03457,  0.02290,  0.02150,  \
				            0.01396,  0.00982,  0.00741,  0.00312,  0.00093,  0.00016,  0.00001,  0.00000,  \
				            0.07106,  0.05026,  0.04017,  0.03485,  0.02312,  0.02172,  0.01411,  0.00994,  \
				            0.00750,  0.00317,  0.00094,  0.00016,  0.00001,  0.00000,  0.07248,  0.05151,  \
				            0.04129,  0.03589,  0.02393,  0.02249,  0.01469,  0.01037,  0.00785,  0.00333,  \
				            0.00099,  0.00017,  0.00001,  0.00000 ");
			}
			ground_capacitance (capacitance_template_WxS) {
				index_1 (" 0.1400, 0.2700, 0.2800, 0.5000, 0.5600, 0.9000 ");
				index_2 (" 0.1400, 0.2100, 0.2700, 0.3150, 0.4725, 0.5000, 0.7088, 0.9000,  \
				           1.0631, 1.5947, 2.3920, 3.5880, 5.3821, 538.2070 ");
				values  ("  0.02385,  0.02821,  0.03166,  0.03412,  0.04166,  0.04283,  0.05030,  0.05543,  \
				            0.05877,  0.06522,  0.06880,  0.07010,  0.07032,  0.07034,  0.03260,  0.03698,  \
				            0.04050,  0.04301,  0.05080,  0.05201,  0.05983,  0.06523,  0.06879,  0.07572,  \
				            0.07964,  0.08107,  0.08128,  0.08130,  0.03328,  0.03767,  0.04119,  0.04371,  \
				            0.05150,  0.05272,  0.06055,  0.06597,  0.06955,  0.07651,  0.08044,  0.08188,  \
				            0.08210,  0.08212,  0.04853,  0.05297,  0.05655,  0.05912,  0.06711,  0.06836,  \
				            0.07650,  0.08218,  0.08594,  0.09337,  0.09763,  0.09919,  0.09942,  0.09944,  \
				            0.05275,  0.05720,  0.06079,  0.06336,  0.07139,  0.07265,  0.08084,  0.08657,  \
				            0.09036,  0.09788,  0.10219,  0.10378,  0.10401,  0.10403,  0.07705,  0.08154,  \
				            0.08517,  0.08778,  0.09595,  0.09723,  0.10561,  0.11151,  0.11544,  0.12326,  \
				            0.12779,  0.12947,  0.12971,  0.12974 ");
			}
		}

		capacitance () {
			top_plane: metal7;
			bottom_plane: metal1;
			lateral_capacitance (capacitance_template_WxS) {
				index_1 (" 0.1400, 0.2700, 0.2800, 0.5000, 0.5600, 0.9000 ");
				index_2 (" 0.1400, 0.2100, 0.2700, 0.3150, 0.4725, 0.5000, 0.7088, 0.9000,  \
				           1.0631, 1.5947, 2.3920, 3.5880, 5.3821, 538.2070 ");
				values  ("  0.06709,  0.04755,  0.03826,  0.03344,  0.02284,  0.02158,  0.01466,  0.01074,  \
				            0.00838,  0.00391,  0.00133,  0.00028,  0.00003,  0.00000,  0.07074,  0.05056,  \
				            0.04086,  0.03578,  0.02455,  0.02321,  0.01580,  0.01160,  0.00905,  0.00423,  \
				            0.00144,  0.00030,  0.00003,  0.00000,  0.07095,  0.05074,  0.04101,  0.03591,  \
				            0.02465,  0.02330,  0.01587,  0.01165,  0.00909,  0.00425,  0.00145,  0.00030,  \
				            0.00003,  0.00000,  0.07400,  0.05329,  0.04324,  0.03794,  0.02616,  0.02474,  \
				            0.01690,  0.01242,  0.00971,  0.00456,  0.00156,  0.00033,  0.00003,  0.00000,  \
				            0.07446,  0.05370,  0.04360,  0.03827,  0.02641,  0.02498,  0.01707,  0.01256,  \
				            0.00982,  0.00461,  0.00158,  0.00033,  0.00003,  0.00000,  0.07611,  0.05512,  \
				            0.04487,  0.03943,  0.02730,  0.02583,  0.01769,  0.01303,  0.01020,  0.00480,  \
				            0.00164,  0.00035,  0.00003,  0.00000 ");
			}
			ground_capacitance (capacitance_template_WxS) {
				index_1 (" 0.1400, 0.2700, 0.2800, 0.5000, 0.5600, 0.9000 ");
				index_2 (" 0.1400, 0.2100, 0.2700, 0.3150, 0.4725, 0.5000, 0.7088, 0.9000,  \
				           1.0631, 1.5947, 2.3920, 3.5880, 5.3821, 538.2070 ");
				values  ("  0.01787,  0.02097,  0.02343,  0.02519,  0.03081,  0.03171,  0.03783,  0.04243,  \
				            0.04568,  0.05281,  0.05759,  0.05971,  0.06016,  0.06022,  0.02348,  0.02652,  \
				            0.02902,  0.03083,  0.03668,  0.03763,  0.04411,  0.04900,  0.05247,  0.06013,  \
				            0.06531,  0.06760,  0.06807,  0.06813,  0.02391,  0.02696,  0.02945,  0.03127,  \
				            0.03714,  0.03809,  0.04459,  0.04950,  0.05299,  0.06067,  0.06588,  0.06818,  \
				            0.06865,  0.06871,  0.03373,  0.03685,  0.03943,  0.04131,  0.04742,  0.04842,  \
				            0.05523,  0.06041,  0.06409,  0.07226,  0.07782,  0.08030,  0.08080,  0.08086,  \
				            0.03650,  0.03963,  0.04222,  0.04411,  0.05027,  0.05127,  0.05815,  0.06337,  \
				            0.06709,  0.07533,  0.08096,  0.08347,  0.08398,  0.08404,  0.05267,  0.05586,  \
				            0.05851,  0.06045,  0.06676,  0.06779,  0.07486,  0.08024,  0.08407,  0.09261,  \
				            0.09846,  0.10108,  0.10161,  0.10168 ");
			}
		}

		capacitance () {
			top_plane: metal7;
			bottom_plane: poly;
			lateral_capacitance (capacitance_template_WxS) {
				index_1 (" 0.1400, 0.2700, 0.2800, 0.5000, 0.5600, 0.9000 ");
				index_2 (" 0.1400, 0.2100, 0.2700, 0.3150, 0.4725, 0.5000, 0.7088, 0.9000,  \
				           1.0631, 1.5947, 2.3920, 3.5880, 5.3821, 538.2070 ");
				values  ("  0.06789,  0.04847,  0.03927,  0.03450,  0.02406,  0.02282,  0.01596,  0.01203,  \
				            0.00960,  0.00481,  0.00180,  0.00043,  0.00005,  0.00000,  0.07182,  0.05175,  \
				            0.04213,  0.03710,  0.02599,  0.02466,  0.01728,  0.01302,  0.01039,  0.00521,  \
				            0.00195,  0.00047,  0.00006,  0.00000,  0.07206,  0.05195,  0.04230,  0.03726,  \
				            0.02611,  0.02477,  0.01736,  0.01308,  0.01044,  0.00524,  0.00196,  0.00047,  \
				            0.00006,  0.00000,  0.07551,  0.05487,  0.04487,  0.03960,  0.02786,  0.02644,  \
				            0.01856,  0.01399,  0.01117,  0.00561,  0.00210,  0.00050,  0.00006,  0.00000,  \
				            0.07607,  0.05535,  0.04530,  0.03999,  0.02816,  0.02673,  0.01877,  0.01415,  \
				            0.01130,  0.00568,  0.00213,  0.00051,  0.00006,  0.00000,  0.07801,  0.05703,  \
				            0.04679,  0.04136,  0.02920,  0.02772,  0.01949,  0.01470,  0.01175,  0.00591,  \
				            0.00222,  0.00053,  0.00006,  0.00000 ");
			}
			ground_capacitance (capacitance_template_WxS) {
				index_1 (" 0.1400, 0.2700, 0.2800, 0.5000, 0.5600, 0.9000 ");
				index_2 (" 0.1400, 0.2100, 0.2700, 0.3150, 0.4725, 0.5000, 0.7088, 0.9000,  \
				           1.0631, 1.5947, 2.3920, 3.5880, 5.3821, 538.2070 ");
				values  ("  0.01570,  0.01836,  0.02045,  0.02194,  0.02670,  0.02747,  0.03278,  0.03693,  \
				            0.03997,  0.04712,  0.05250,  0.05522,  0.05593,  0.05603,  0.02029,  0.02282,  \
				            0.02489,  0.02640,  0.03135,  0.03216,  0.03781,  0.04224,  0.04551,  0.05321,  \
				            0.05903,  0.06197,  0.06273,  0.06284,  0.02063,  0.02316,  0.02524,  0.02675,  \
				            0.03171,  0.03253,  0.03819,  0.04265,  0.04593,  0.05366,  0.05951,  0.06247,  \
				            0.06322,  0.06334,  0.02845,  0.03103,  0.03318,  0.03475,  0.03995,  0.04081,  \
				            0.04681,  0.05155,  0.05503,  0.06327,  0.06954,  0.07271,  0.07351,  0.07363,  \
				            0.03067,  0.03326,  0.03542,  0.03701,  0.04226,  0.04312,  0.04919,  0.05397,  \
				            0.05750,  0.06583,  0.07216,  0.07536,  0.07618,  0.07630,  0.04375,  0.04642,  \
				            0.04865,  0.05028,  0.05570,  0.05660,  0.06288,  0.06784,  0.07149,  0.08013,  \
				            0.08671,  0.09005,  0.09089,  0.09102 ");
			}
		}

		capacitance () {
			top_plane: metal7;
			bottom_plane: SUBSTRATE;
			lateral_capacitance (capacitance_template_WxS) {
				index_1 (" 0.1400, 0.2700, 0.2800, 0.5000, 0.5600, 0.9000 ");
				index_2 (" 0.1400, 0.2100, 0.2700, 0.3150, 0.4725, 0.5000, 0.7088, 0.9000,  \
				           1.0631, 1.5947, 2.3920, 3.5880, 5.3821, 538.2070 ");
				values  ("  0.06839,  0.04903,  0.03989,  0.03516,  0.02484,  0.02361,  0.01684,  0.01293,  \
				            0.01050,  0.00555,  0.00225,  0.00060,  0.00008,  0.00000,  0.07248,  0.05249,  \
				            0.04292,  0.03793,  0.02693,  0.02561,  0.01830,  0.01405,  0.01140,  0.00603,  \
				            0.00244,  0.00065,  0.00009,  0.00000,  0.07273,  0.05269,  0.04311,  0.03810,  \
				            0.02706,  0.02574,  0.01839,  0.01412,  0.01145,  0.00606,  0.00245,  0.00065,  \
				            0.00009,  0.00000,  0.07647,  0.05589,  0.04594,  0.04069,  0.02903,  0.02762,  \
				            0.01976,  0.01517,  0.01231,  0.00651,  0.00263,  0.00070,  0.00010,  0.00000,  \
				            0.07709,  0.05644,  0.04643,  0.04114,  0.02937,  0.02795,  0.02001,  0.01536,  \
				            0.01246,  0.00659,  0.00267,  0.00071,  0.00010,  0.00000,  0.07933,  0.05838,  \
				            0.04816,  0.04274,  0.03059,  0.02911,  0.02086,  0.01602,  0.01299,  0.00687,  \
				            0.00278,  0.00074,  0.00010,  0.00000 ");
			}
			ground_capacitance (capacitance_template_WxS) {
				index_1 (" 0.1400, 0.2700, 0.2800, 0.5000, 0.5600, 0.9000 ");
				index_2 (" 0.1400, 0.2100, 0.2700, 0.3150, 0.4725, 0.5000, 0.7088, 0.9000,  \
				           1.0631, 1.5947, 2.3920, 3.5880, 5.3821, 538.2070 ");
				values  ("  0.01440,  0.01683,  0.01872,  0.02005,  0.02429,  0.02497,  0.02973,  0.03352,  \
				            0.03634,  0.04332,  0.04903,  0.05224,  0.05323,  0.05340,  0.01846,  0.02070,  \
				            0.02253,  0.02386,  0.02822,  0.02894,  0.03400,  0.03805,  0.04111,  0.04864,  \
				            0.05484,  0.05832,  0.05937,  0.05956,  0.01876,  0.02100,  0.02283,  0.02416,  \
				            0.02853,  0.02925,  0.03433,  0.03840,  0.04147,  0.04903,  0.05526,  0.05876,  \
				            0.05982,  0.06001,  0.02544,  0.02769,  0.02957,  0.03095,  0.03554,  0.03630,  \
				            0.04171,  0.04607,  0.04935,  0.05745,  0.06413,  0.06789,  0.06902,  0.06922,  \
				            0.02733,  0.02959,  0.03148,  0.03287,  0.03751,  0.03828,  0.04375,  0.04816,  \
				            0.05148,  0.05968,  0.06645,  0.07025,  0.07139,  0.07160,  0.03854,  0.04088,  \
				            0.04283,  0.04428,  0.04910,  0.04991,  0.05561,  0.06021,  0.06367,  0.07221,  \
				            0.07925,  0.08322,  0.08441,  0.08462 ");
			}
		}

		capacitance () {
			top_plane: metal8;
			bottom_plane: metal3;
			lateral_capacitance (capacitance_template_WxS) {
				index_1 (" 0.1400, 0.2700, 0.2800, 0.5000, 0.5600, 0.9000 ");
				index_2 (" 0.1400, 0.2100, 0.2700, 0.3150, 0.4725, 0.5000, 0.7088, 0.9000,  \
				           1.0631, 1.5947, 2.3920, 3.5880, 5.3821, 538.2070 ");
				values  ("  0.05873,  0.03898,  0.02973,  0.02503,  0.01523,  0.01414,  0.00860,  0.00590,  \
				            0.00444,  0.00203,  0.00079,  0.00024,  0.00004,  0.00000,  0.06117,  0.04112,  \
				            0.03168,  0.02685,  0.01670,  0.01556,  0.00970,  0.00677,  0.00515,  0.00242,  \
				            0.00096,  0.00029,  0.00006,  0.00000,  0.06133,  0.04126,  0.03181,  0.02697,  \
				            0.01680,  0.01565,  0.00977,  0.00683,  0.00520,  0.00245,  0.00097,  0.00030,  \
				            0.00006,  0.00000,  0.06394,  0.04362,  0.03399,  0.02903,  0.01852,  0.01732,  \
				            0.01109,  0.00789,  0.00610,  0.00296,  0.00121,  0.00037,  0.00007,  0.00000,  \
				            0.06445,  0.04410,  0.03444,  0.02946,  0.01888,  0.01768,  0.01138,  0.00813,  \
				            0.00630,  0.00308,  0.00126,  0.00039,  0.00007,  0.00000,  0.06670,  0.04618,  \
				            0.03640,  0.03133,  0.02049,  0.01924,  0.01265,  0.00919,  0.00720,  0.00362,  \
				            0.00152,  0.00048,  0.00009,  0.00000 ");
			}
			ground_capacitance (capacitance_template_WxS) {
				index_1 (" 0.1400, 0.2700, 0.2800, 0.5000, 0.5600, 0.9000 ");
				index_2 (" 0.1400, 0.2100, 0.2700, 0.3150, 0.4725, 0.5000, 0.7088, 0.9000,  \
				           1.0631, 1.5947, 2.3920, 3.5880, 5.3821, 538.2070 ");
				values  ("  0.05450,  0.06316,  0.06920,  0.07320,  0.08352,  0.08494,  0.09271,  0.09725,  \
				            0.09993,  0.10434,  0.10673,  0.10781,  0.10847,  0.10855,  0.07943,  0.08791,  \
				            0.09386,  0.09783,  0.10823,  0.10968,  0.11776,  0.12260,  0.12552,  0.13049,  \
				            0.13330,  0.13462,  0.13534,  0.13545,  0.08134,  0.08980,  0.09575,  0.09972,  \
				            0.11013,  0.11158,  0.11968,  0.12454,  0.12748,  0.13248,  0.13532,  0.13666,  \
				            0.13738,  0.13749,  0.12301,  0.13137,  0.13728,  0.14124,  0.15176,  0.15325,  \
				            0.16169,  0.16689,  0.17008,  0.17576,  0.17913,  0.18078,  0.18162,  0.18176,  \
				            0.13434,  0.14268,  0.14858,  0.15254,  0.16309,  0.16457,  0.17309,  0.17836,  \
				            0.18161,  0.18742,  0.19092,  0.19264,  0.19351,  0.19366,  0.19864,  0.20694,  \
				            0.21284,  0.21681,  0.22748,  0.22900,  0.23781,  0.24337,  0.24686,  0.25330,  \
				            0.25735,  0.25941,  0.26041,  0.26060 ");
			}
		}

		capacitance () {
			top_plane: metal8;
			bottom_plane: metal2;
			lateral_capacitance (capacitance_template_WxS) {
				index_1 (" 0.1400, 0.2700, 0.2800, 0.5000, 0.5600, 0.9000 ");
				index_2 (" 0.1400, 0.2100, 0.2700, 0.3150, 0.4725, 0.5000, 0.7088, 0.9000,  \
				           1.0631, 1.5947, 2.3920, 3.5880, 5.3821, 538.2070 ");
				values  ("  0.06569,  0.04596,  0.03656,  0.03169,  0.02111,  0.01987,  0.01324,  0.00967,  \
				            0.00760,  0.00382,  0.00162,  0.00053,  0.00011,  0.00000,  0.06885,  0.04860,  \
				            0.03888,  0.03382,  0.02278,  0.02148,  0.01448,  0.01068,  0.00844,  0.00432,  \
				            0.00185,  0.00061,  0.00013,  0.00000,  0.06903,  0.04875,  0.03903,  0.03395,  \
				            0.02288,  0.02158,  0.01456,  0.01074,  0.00849,  0.00435,  0.00187,  0.00061,  \
				            0.00013,  0.00000,  0.07191,  0.05128,  0.04132,  0.03610,  0.02466,  0.02330,  \
				            0.01594,  0.01189,  0.00948,  0.00496,  0.00216,  0.00072,  0.00015,  0.00000,  \
				            0.07242,  0.05176,  0.04177,  0.03653,  0.02502,  0.02365,  0.01623,  0.01213,  \
				            0.00969,  0.00509,  0.00223,  0.00075,  0.00016,  0.00000,  0.07465,  0.05381,  \
				            0.04369,  0.03836,  0.02659,  0.02519,  0.01751,  0.01321,  0.01063,  0.00569,  \
				            0.00254,  0.00086,  0.00018,  0.00000 ");
			}
			ground_capacitance (capacitance_template_WxS) {
				index_1 (" 0.1400, 0.2700, 0.2800, 0.5000, 0.5600, 0.9000 ");
				index_2 (" 0.1400, 0.2100, 0.2700, 0.3150, 0.4725, 0.5000, 0.7088, 0.9000,  \
				           1.0631, 1.5947, 2.3920, 3.5880, 5.3821, 538.2070 ");
				values  ("  0.02227,  0.02644,  0.02971,  0.03202,  0.03899,  0.04006,  0.04685,  0.05150,  \
				            0.05457,  0.06079,  0.06488,  0.06703,  0.06783,  0.06806,  0.03059,  0.03466,  \
				            0.03789,  0.04019,  0.04723,  0.04832,  0.05532,  0.06019,  0.06345,  0.07018,  \
				            0.07473,  0.07718,  0.07809,  0.07835,  0.03123,  0.03529,  0.03852,  0.04082,  \
				            0.04786,  0.04895,  0.05596,  0.06084,  0.06412,  0.07088,  0.07546,  0.07793,  \
				            0.07885,  0.07911,  0.04512,  0.04912,  0.05232,  0.05461,  0.06170,  0.06280,  \
				            0.07001,  0.07511,  0.07857,  0.08589,  0.09102,  0.09386,  0.09493,  0.09524,  \
				            0.04890,  0.05288,  0.05608,  0.05837,  0.06546,  0.06657,  0.07382,  0.07896,  \
				            0.08246,  0.08989,  0.09514,  0.09806,  0.09917,  0.09950,  0.07039,  0.07435,  \
				            0.07754,  0.07982,  0.08697,  0.08810,  0.09550,  0.10083,  0.10450,  0.11243,  \
				            0.11819,  0.12150,  0.12278,  0.12316 ");
			}
		}

		capacitance () {
			top_plane: metal8;
			bottom_plane: metal1;
			lateral_capacitance (capacitance_template_WxS) {
				index_1 (" 0.1400, 0.2700, 0.2800, 0.5000, 0.5600, 0.9000 ");
				index_2 (" 0.1400, 0.2100, 0.2700, 0.3150, 0.4725, 0.5000, 0.7088, 0.9000,  \
				           1.0631, 1.5947, 2.3920, 3.5880, 5.3821, 538.2070 ");
				values  ("  0.06782,  0.04834,  0.03911,  0.03432,  0.02389,  0.02266,  0.01593,  0.01216,  \
				            0.00987,  0.00540,  0.00248,  0.00087,  0.00020,  0.00000,  0.07160,  0.05151,  \
				            0.04190,  0.03688,  0.02587,  0.02456,  0.01739,  0.01333,  0.01086,  0.00600,  \
				            0.00278,  0.00099,  0.00023,  0.00000,  0.07183,  0.05171,  0.04207,  0.03704,  \
				            0.02599,  0.02468,  0.01748,  0.01341,  0.01092,  0.00604,  0.00280,  0.00100,  \
				            0.00023,  0.00000,  0.07530,  0.05472,  0.04478,  0.03955,  0.02802,  0.02663,  \
				            0.01902,  0.01468,  0.01202,  0.00673,  0.00316,  0.00113,  0.00027,  0.00000,  \
				            0.07591,  0.05527,  0.04528,  0.04003,  0.02841,  0.02702,  0.01933,  0.01494,  \
				            0.01224,  0.00688,  0.00324,  0.00117,  0.00027,  0.00000,  0.07836,  0.05749,  \
				            0.04734,  0.04198,  0.03005,  0.02861,  0.02065,  0.01606,  0.01322,  0.00752,  \
				            0.00358,  0.00130,  0.00031,  0.00000 ");
			}
			ground_capacitance (capacitance_template_WxS) {
				index_1 (" 0.1400, 0.2700, 0.2800, 0.5000, 0.5600, 0.9000 ");
				index_2 (" 0.1400, 0.2100, 0.2700, 0.3150, 0.4725, 0.5000, 0.7088, 0.9000,  \
				           1.0631, 1.5947, 2.3920, 3.5880, 5.3821, 538.2070 ");
				values  ("  0.01602,  0.01892,  0.02120,  0.02282,  0.02787,  0.02866,  0.03401,  0.03801,  \
				            0.04085,  0.04738,  0.05246,  0.05554,  0.05682,  0.05724,  0.02125,  0.02398,  \
				            0.02619,  0.02778,  0.03286,  0.03368,  0.03922,  0.04343,  0.04646,  0.05348,  \
				            0.05905,  0.06248,  0.06392,  0.06439,  0.02163,  0.02436,  0.02657,  0.02816,  \
				            0.03325,  0.03407,  0.03962,  0.04384,  0.04688,  0.05394,  0.05954,  0.06299,  \
				            0.06444,  0.06491,  0.03014,  0.03282,  0.03501,  0.03661,  0.04177,  0.04261,  \
				            0.04837,  0.05279,  0.05600,  0.06356,  0.06970,  0.07356,  0.07521,  0.07575,  \
				            0.03247,  0.03514,  0.03734,  0.03893,  0.04411,  0.04495,  0.05075,  0.05521,  \
				            0.05845,  0.06611,  0.07236,  0.07632,  0.07800,  0.07857,  0.04586,  0.04852,  \
				            0.05073,  0.05233,  0.05757,  0.05843,  0.06436,  0.06897,  0.07235,  0.08044,  \
				            0.08717,  0.09152,  0.09340,  0.09404 ");
			}
		}

		capacitance () {
			top_plane: metal8;
			bottom_plane: poly;
			lateral_capacitance (capacitance_template_WxS) {
				index_1 (" 0.1400, 0.2700, 0.2800, 0.5000, 0.5600, 0.9000 ");
				index_2 (" 0.1400, 0.2100, 0.2700, 0.3150, 0.4725, 0.5000, 0.7088, 0.9000,  \
				           1.0631, 1.5947, 2.3920, 3.5880, 5.3821, 538.2070 ");
				values  ("  0.06871,  0.04935,  0.04019,  0.03547,  0.02519,  0.02397,  0.01732,  0.01354,  \
				            0.01121,  0.00648,  0.00316,  0.00119,  0.00030,  0.00000,  0.07276,  0.05278,  \
				            0.04324,  0.03827,  0.02738,  0.02609,  0.01895,  0.01486,  0.01232,  0.00716,  \
				            0.00351,  0.00133,  0.00033,  0.00000,  0.07300,  0.05299,  0.04343,  0.03845,  \
				            0.02752,  0.02622,  0.01905,  0.01494,  0.01239,  0.00721,  0.00353,  0.00134,  \
				            0.00034,  0.00000,  0.07687,  0.05636,  0.04647,  0.04127,  0.02978,  0.02840,  \
				            0.02077,  0.01635,  0.01360,  0.00798,  0.00394,  0.00151,  0.00038,  0.00000,  \
				            0.07756,  0.05698,  0.04704,  0.04180,  0.03022,  0.02883,  0.02111,  0.01663,  \
				            0.01385,  0.00814,  0.00403,  0.00154,  0.00039,  0.00000,  0.08030,  0.05945,  \
				            0.04931,  0.04395,  0.03200,  0.03056,  0.02252,  0.01782,  0.01488,  0.00882,  \
				            0.00441,  0.00170,  0.00043,  0.00000 ");
			}
			ground_capacitance (capacitance_template_WxS) {
				index_1 (" 0.1400, 0.2700, 0.2800, 0.5000, 0.5600, 0.9000 ");
				index_2 (" 0.1400, 0.2100, 0.2700, 0.3150, 0.4725, 0.5000, 0.7088, 0.9000,  \
				           1.0631, 1.5947, 2.3920, 3.5880, 5.3821, 538.2070 ");
				values  ("  0.01366,  0.01611,  0.01803,  0.01937,  0.02357,  0.02423,  0.02874,  0.03224,  \
				            0.03481,  0.04112,  0.04658,  0.05026,  0.05197,  0.05258,  0.01788,  0.02011,  \
				            0.02190,  0.02319,  0.02736,  0.02804,  0.03272,  0.03640,  0.03915,  0.04595,  \
				            0.05192,  0.05598,  0.05787,  0.05856,  0.01819,  0.02040,  0.02219,  0.02348,  \
				            0.02765,  0.02833,  0.03302,  0.03671,  0.03948,  0.04630,  0.05231,  0.05640,  \
				            0.05830,  0.05899,  0.02473,  0.02687,  0.02864,  0.02992,  0.03416,  0.03486,  \
				            0.03975,  0.04365,  0.04657,  0.05391,  0.06045,  0.06498,  0.06712,  0.06790,  \
				            0.02651,  0.02865,  0.03041,  0.03171,  0.03596,  0.03666,  0.04159,  0.04553,  \
				            0.04849,  0.05592,  0.06258,  0.06720,  0.06939,  0.07019,  0.03684,  0.03898,  \
				            0.04076,  0.04207,  0.04640,  0.04712,  0.05220,  0.05629,  0.05938,  0.06722,  \
				            0.07434,  0.07937,  0.08178,  0.08267 ");
			}
		}

		capacitance () {
			top_plane: metal8;
			bottom_plane: SUBSTRATE;
			lateral_capacitance (capacitance_template_WxS) {
				index_1 (" 0.1400, 0.2700, 0.2800, 0.5000, 0.5600, 0.9000 ");
				index_2 (" 0.1400, 0.2100, 0.2700, 0.3150, 0.4725, 0.5000, 0.7088, 0.9000,  \
				           1.0631, 1.5947, 2.3920, 3.5880, 5.3821, 538.2070 ");
				values  ("  0.06928,  0.04998,  0.04089,  0.03620,  0.02603,  0.02483,  0.01827,  0.01453,  \
				            0.01220,  0.00735,  0.00378,  0.00151,  0.00041,  0.00000,  0.07348,  0.05358,  \
				            0.04410,  0.03917,  0.02838,  0.02710,  0.02004,  0.01596,  0.01341,  0.00812,  \
				            0.00418,  0.00167,  0.00045,  0.00000,  0.07374,  0.05380,  0.04430,  0.03935,  \
				            0.02853,  0.02724,  0.02015,  0.01606,  0.01349,  0.00817,  0.00421,  0.00168,  \
				            0.00046,  0.00000,  0.07788,  0.05743,  0.04758,  0.04241,  0.03100,  0.02963,  \
				            0.02203,  0.01760,  0.01482,  0.00902,  0.00467,  0.00188,  0.00051,  0.00000,  \
				            0.07864,  0.05812,  0.04821,  0.04300,  0.03148,  0.03010,  0.02240,  0.01791,  \
				            0.01509,  0.00919,  0.00477,  0.00192,  0.00052,  0.00000,  0.08166,  0.06084,  \
				            0.05071,  0.04536,  0.03344,  0.03199,  0.02394,  0.01920,  0.01621,  0.00994,  \
				            0.00519,  0.00211,  0.00057,  0.00000 ");
			}
			ground_capacitance (capacitance_template_WxS) {
				index_1 (" 0.1400, 0.2700, 0.2800, 0.5000, 0.5600, 0.9000 ");
				index_2 (" 0.1400, 0.2100, 0.2700, 0.3150, 0.4725, 0.5000, 0.7088, 0.9000,  \
				           1.0631, 1.5947, 2.3920, 3.5880, 5.3821, 538.2070 ");
				values  ("  0.01219,  0.01440,  0.01611,  0.01730,  0.02098,  0.02156,  0.02551,  0.02861,  \
				            0.03093,  0.03690,  0.04249,  0.04661,  0.04871,  0.04954,  0.01590,  0.01783,  \
				            0.01938,  0.02050,  0.02409,  0.02467,  0.02874,  0.03200,  0.03450,  0.04093,  \
				            0.04704,  0.05158,  0.05389,  0.05482,  0.01616,  0.01808,  0.01963,  0.02074,  \
				            0.02432,  0.02491,  0.02899,  0.03226,  0.03477,  0.04123,  0.04737,  0.05194,  \
				            0.05427,  0.05520,  0.02160,  0.02341,  0.02491,  0.02600,  0.02962,  0.03023,  \
				            0.03449,  0.03796,  0.04063,  0.04760,  0.05429,  0.05933,  0.06192,  0.06297,  \
				            0.02306,  0.02486,  0.02636,  0.02746,  0.03110,  0.03170,  0.03600,  0.03952,  \
				            0.04222,  0.04929,  0.05609,  0.06122,  0.06388,  0.06495,  0.03154,  0.03335,  \
				            0.03486,  0.03598,  0.03971,  0.04033,  0.04479,  0.04847,  0.05130,  0.05877,  \
				            0.06605,  0.07159,  0.07449,  0.07567 ");
			}
		}

		capacitance () {
			top_plane: AIR;
			bottom_plane: metal3;
			lateral_capacitance (capacitance_template_WxS) {
				index_1 (" 0.1400, 0.2700, 0.2800, 0.5000, 0.5600, 0.9000 ");
				index_2 (" 0.1400, 0.2100, 0.2700, 0.3150, 0.4725, 0.5000, 0.7088, 0.9000,  \
				           1.0631, 1.5947, 2.3920, 3.5880, 5.3821, 538.2070 ");
				values  ("  0.05920,  0.03948,  0.03025,  0.02556,  0.01579,  0.01470,  0.00917,  0.00646,  \
				            0.00500,  0.00255,  0.00124,  0.00058,  0.00027,  0.00000,  0.06170,  0.04169,  \
				            0.03227,  0.02746,  0.01737,  0.01623,  0.01040,  0.00748,  0.00587,  0.00310,  \
				            0.00155,  0.00075,  0.00036,  0.00000,  0.06186,  0.04184,  0.03241,  0.02759,  \
				            0.01747,  0.01634,  0.01049,  0.00755,  0.00593,  0.00314,  0.00158,  0.00076,  \
				            0.00036,  0.00000,  0.06463,  0.04436,  0.03477,  0.02984,  0.01942,  0.01823,  \
				            0.01206,  0.00890,  0.00711,  0.00393,  0.00206,  0.00104,  0.00051,  0.00000,  \
				            0.06519,  0.04490,  0.03528,  0.03033,  0.01985,  0.01866,  0.01243,  0.00921,  \
				            0.00739,  0.00413,  0.00219,  0.00111,  0.00055,  0.00000,  0.06782,  0.04738,  \
				            0.03765,  0.03262,  0.02190,  0.02066,  0.01417,  0.01075,  0.00877,  0.00514,  \
				            0.00286,  0.00152,  0.00079,  0.00000 ");
			}
			ground_capacitance (capacitance_template_WxS) {
				index_1 (" 0.1400, 0.2700, 0.2800, 0.5000, 0.5600, 0.9000 ");
				index_2 (" 0.1400, 0.2100, 0.2700, 0.3150, 0.4725, 0.5000, 0.7088, 0.9000,  \
				           1.0631, 1.5947, 2.3920, 3.5880, 5.3821, 538.2070 ");
				values  ("  0.05329,  0.06183,  0.06779,  0.07174,  0.08196,  0.08336,  0.09109,  0.09563,  \
				            0.09831,  0.10279,  0.10531,  0.10659,  0.10748,  0.10803,  0.07806,  0.08641,  \
				            0.09226,  0.09617,  0.10639,  0.10781,  0.11576,  0.12054,  0.12344,  0.12845,  \
				            0.13141,  0.13297,  0.13401,  0.13473,  0.07994,  0.08829,  0.09414,  0.09804,  \
				            0.10826,  0.10968,  0.11765,  0.12245,  0.12536,  0.13040,  0.13339,  0.13498,  \
				            0.13602,  0.13675,  0.12121,  0.12940,  0.13517,  0.13904,  0.14927,  0.15071,  \
				            0.15891,  0.16397,  0.16711,  0.17277,  0.17633,  0.17832,  0.17961,  0.18064,  \
				            0.13239,  0.14055,  0.14630,  0.15016,  0.16039,  0.16183,  0.17008,  0.17520,  \
				            0.17838,  0.18418,  0.18786,  0.18996,  0.19131,  0.19243,  0.19560,  0.20368,  \
				            0.20938,  0.21321,  0.22346,  0.22492,  0.23335,  0.23871,  0.24209,  0.24847,  \
				            0.25276,  0.25536,  0.25705,  0.25864 ");
			}
		}

		capacitance () {
			top_plane: AIR;
			bottom_plane: metal2;
			lateral_capacitance (capacitance_template_WxS) {
				index_1 (" 0.1400, 0.2700, 0.2800, 0.5000, 0.5600, 0.9000 ");
				index_2 (" 0.1400, 0.2100, 0.2700, 0.3150, 0.4725, 0.5000, 0.7088, 0.9000,  \
				           1.0631, 1.5947, 2.3920, 3.5880, 5.3821, 538.2070 ");
				values  ("  0.06633,  0.04665,  0.03728,  0.03242,  0.02189,  0.02066,  0.01406,  0.01051,  \
				            0.00845,  0.00468,  0.00241,  0.00117,  0.00056,  0.00000,  0.06955,  0.04934,  \
				            0.03966,  0.03462,  0.02365,  0.02236,  0.01544,  0.01168,  0.00947,  0.00537,  \
				            0.00283,  0.00141,  0.00068,  0.00000,  0.06974,  0.04950,  0.03981,  0.03476,  \
				            0.02376,  0.02247,  0.01553,  0.01175,  0.00953,  0.00542,  0.00286,  0.00143,  \
				            0.00069,  0.00000,  0.07276,  0.05219,  0.04228,  0.03709,  0.02576,  0.02441,  \
				            0.01717,  0.01319,  0.01082,  0.00635,  0.00347,  0.00179,  0.00090,  0.00000,  \
				            0.07333,  0.05272,  0.04278,  0.03758,  0.02619,  0.02484,  0.01754,  0.01352,  \
				            0.01112,  0.00657,  0.00362,  0.00189,  0.00095,  0.00000,  0.07594,  0.05516,  \
				            0.04511,  0.03983,  0.02821,  0.02682,  0.01930,  0.01510,  0.01258,  0.00769,  \
				            0.00441,  0.00240,  0.00125,  0.00000 ");
			}
			ground_capacitance (capacitance_template_WxS) {
				index_1 (" 0.1400, 0.2700, 0.2800, 0.5000, 0.5600, 0.9000 ");
				index_2 (" 0.1400, 0.2100, 0.2700, 0.3150, 0.4725, 0.5000, 0.7088, 0.9000,  \
				           1.0631, 1.5947, 2.3920, 3.5880, 5.3821, 538.2070 ");
				values  ("  0.02066,  0.02468,  0.02785,  0.03009,  0.03690,  0.03794,  0.04457,  0.04912,  \
				            0.05212,  0.05824,  0.06237,  0.06477,  0.06596,  0.06708,  0.02882,  0.03275,  \
				            0.03587,  0.03809,  0.04487,  0.04592,  0.05266,  0.05734,  0.06049,  0.06701,  \
				            0.07159,  0.07433,  0.07571,  0.07709,  0.02944,  0.03336,  0.03648,  0.03870,  \
				            0.04548,  0.04653,  0.05327,  0.05796,  0.06112,  0.06767,  0.07228,  0.07503,  \
				            0.07643,  0.07783,  0.04294,  0.04676,  0.04981,  0.05199,  0.05871,  0.05976,  \
				            0.06656,  0.07137,  0.07464,  0.08163,  0.08675,  0.08995,  0.09165,  0.09345,  \
				            0.04657,  0.05037,  0.05341,  0.05558,  0.06228,  0.06332,  0.07013,  0.07497,  \
				            0.07826,  0.08534,  0.09057,  0.09388,  0.09565,  0.09756,  0.06699,  0.07070,  \
				            0.07368,  0.07582,  0.08245,  0.08349,  0.09033,  0.09526,  0.09865,  0.10611,  \
				            0.11185,  0.11565,  0.11782,  0.12032 ");
			}
		}

		capacitance () {
			top_plane: AIR;
			bottom_plane: metal1;
			lateral_capacitance (capacitance_template_WxS) {
				index_1 (" 0.1400, 0.2700, 0.2800, 0.5000, 0.5600, 0.9000 ");
				index_2 (" 0.1400, 0.2100, 0.2700, 0.3150, 0.4725, 0.5000, 0.7088, 0.9000,  \
				           1.0631, 1.5947, 2.3920, 3.5880, 5.3821, 538.2070 ");
				values  ("  0.06861,  0.04919,  0.03999,  0.03522,  0.02484,  0.02362,  0.01694,  0.01320,  \
				            0.01095,  0.00652,  0.00358,  0.00182,  0.00088,  0.00000,  0.07245,  0.05242,  \
				            0.04284,  0.03784,  0.02691,  0.02562,  0.01853,  0.01454,  0.01211,  0.00734,  \
				            0.00409,  0.00212,  0.00105,  0.00000,  0.07269,  0.05261,  0.04301,  0.03801,  \
				            0.02704,  0.02574,  0.01863,  0.01463,  0.01219,  0.00739,  0.00413,  0.00215,  \
				            0.00106,  0.00000,  0.07630,  0.05578,  0.04588,  0.04069,  0.02927,  0.02791,  \
				            0.02043,  0.01619,  0.01359,  0.00843,  0.00484,  0.00259,  0.00132,  0.00000,  \
				            0.07696,  0.05638,  0.04645,  0.04123,  0.02974,  0.02836,  0.02082,  0.01653,  \
				            0.01391,  0.00867,  0.00501,  0.00270,  0.00138,  0.00000,  0.07978,  0.05899,  \
				            0.04890,  0.04359,  0.03182,  0.03041,  0.02262,  0.01816,  0.01541,  0.00986,  \
				            0.00588,  0.00329,  0.00174,  0.00000 ");
			}
			ground_capacitance (capacitance_template_WxS) {
				index_1 (" 0.1400, 0.2700, 0.2800, 0.5000, 0.5600, 0.9000 ");
				index_2 (" 0.1400, 0.2100, 0.2700, 0.3150, 0.4725, 0.5000, 0.7088, 0.9000,  \
				           1.0631, 1.5947, 2.3920, 3.5880, 5.3821, 538.2070 ");
				values  ("  0.01405,  0.01677,  0.01894,  0.02048,  0.02533,  0.02610,  0.03125,  0.03508,  \
				            0.03780,  0.04405,  0.04900,  0.05227,  0.05403,  0.05580,  0.01911,  0.02169,  \
				            0.02378,  0.02529,  0.03010,  0.03087,  0.03610,  0.04005,  0.04289,  0.04949,  \
				            0.05486,  0.05849,  0.06049,  0.06259,  0.01949,  0.02206,  0.02415,  0.02565,  \
				            0.03046,  0.03124,  0.03647,  0.04042,  0.04327,  0.04989,  0.05529,  0.05895,  \
				            0.06096,  0.06309,  0.02762,  0.03012,  0.03216,  0.03364,  0.03841,  0.03918,  \
				            0.04446,  0.04850,  0.05144,  0.05840,  0.06425,  0.06834,  0.07069,  0.07332,  \
				            0.02981,  0.03229,  0.03432,  0.03580,  0.04055,  0.04132,  0.04661,  0.05067,  \
				            0.05361,  0.06063,  0.06658,  0.07077,  0.07320,  0.07596,  0.04214,  0.04456,  \
				            0.04654,  0.04799,  0.05269,  0.05345,  0.05873,  0.06283,  0.06584,  0.07311,  \
				            0.07945,  0.08411,  0.08695,  0.09041 ");
			}
		}

		capacitance () {
			top_plane: AIR;
			bottom_plane: poly;
			lateral_capacitance (capacitance_template_WxS) {
				index_1 (" 0.1400, 0.2700, 0.2800, 0.5000, 0.5600, 0.9000 ");
				index_2 (" 0.1400, 0.2100, 0.2700, 0.3150, 0.4725, 0.5000, 0.7088, 0.9000,  \
				           1.0631, 1.5947, 2.3920, 3.5880, 5.3821, 538.2070 ");
				values  ("  0.06960,  0.05031,  0.04120,  0.03650,  0.02628,  0.02507,  0.01847,  0.01473,  \
				            0.01243,  0.00778,  0.00448,  0.00236,  0.00118,  0.00000,  0.07373,  0.05381,  \
				            0.04431,  0.03936,  0.02855,  0.02727,  0.02023,  0.01621,  0.01372,  0.00869,  \
				            0.00506,  0.00272,  0.00138,  0.00000,  0.07398,  0.05402,  0.04450,  0.03954,  \
				            0.02870,  0.02741,  0.02034,  0.01630,  0.01381,  0.00875,  0.00510,  0.00275,  \
				            0.00139,  0.00000,  0.07798,  0.05753,  0.04769,  0.04252,  0.03116,  0.02980,  \
				            0.02230,  0.01800,  0.01533,  0.00988,  0.00589,  0.00325,  0.00169,  0.00000,  \
				            0.07872,  0.05820,  0.04831,  0.04312,  0.03166,  0.03029,  0.02272,  0.01837,  \
				            0.01566,  0.01013,  0.00607,  0.00337,  0.00176,  0.00000,  0.08183,  0.06105,  \
				            0.05098,  0.04566,  0.03388,  0.03246,  0.02461,  0.02006,  0.01723,  0.01138,  \
				            0.00700,  0.00401,  0.00216,  0.00000 ");
			}
			ground_capacitance (capacitance_template_WxS) {
				index_1 (" 0.1400, 0.2700, 0.2800, 0.5000, 0.5600, 0.9000 ");
				index_2 (" 0.1400, 0.2100, 0.2700, 0.3150, 0.4725, 0.5000, 0.7088, 0.9000,  \
				           1.0631, 1.5947, 2.3920, 3.5880, 5.3821, 538.2070 ");
				values  ("  0.01143,  0.01367,  0.01545,  0.01671,  0.02069,  0.02132,  0.02563,  0.02894,  \
				            0.03136,  0.03728,  0.04246,  0.04623,  0.04843,  0.05076,  0.01546,  0.01752,  \
				            0.01919,  0.02040,  0.02428,  0.02491,  0.02926,  0.03265,  0.03518,  0.04141,  \
				            0.04700,  0.05114,  0.05360,  0.05633,  0.01575,  0.01780,  0.01947,  0.02067,  \
				            0.02455,  0.02518,  0.02953,  0.03293,  0.03547,  0.04172,  0.04733,  0.05149,  \
				            0.05398,  0.05673,  0.02195,  0.02390,  0.02551,  0.02668,  0.03051,  0.03114,  \
				            0.03553,  0.03901,  0.04161,  0.04817,  0.05419,  0.05878,  0.06162,  0.06495,  \
				            0.02360,  0.02554,  0.02713,  0.02830,  0.03212,  0.03275,  0.03714,  0.04064,  \
				            0.04325,  0.04986,  0.05596,  0.06065,  0.06357,  0.06705,  0.03289,  0.03477,  \
				            0.03634,  0.03748,  0.04126,  0.04188,  0.04627,  0.04980,  0.05246,  0.05926,  \
				            0.06571,  0.07082,  0.07415,  0.07841 ");
			}
		}

		capacitance () {
			top_plane: AIR;
			bottom_plane: SUBSTRATE;
			lateral_capacitance (capacitance_template_WxS) {
				index_1 (" 0.1400, 0.2700, 0.2800, 0.5000, 0.5600, 0.9000 ");
				index_2 (" 0.1400, 0.2100, 0.2700, 0.3150, 0.4725, 0.5000, 0.7088, 0.9000,  \
				           1.0631, 1.5947, 2.3920, 3.5880, 5.3821, 538.2070 ");
				values  ("  0.07026,  0.05105,  0.04201,  0.03735,  0.02725,  0.02606,  0.01955,  0.01585,  \
				            0.01355,  0.00881,  0.00528,  0.00289,  0.00148,  0.00000,  0.07456,  0.05472,  \
				            0.04528,  0.04037,  0.02968,  0.02841,  0.02144,  0.01744,  0.01495,  0.00980,  \
				            0.00593,  0.00330,  0.00171,  0.00000,  0.07483,  0.05495,  0.04548,  0.04057,  \
				            0.02983,  0.02856,  0.02156,  0.01754,  0.01504,  0.00987,  0.00598,  0.00333,  \
				            0.00172,  0.00000,  0.07910,  0.05871,  0.04891,  0.04378,  0.03249,  0.03114,  \
				            0.02368,  0.01937,  0.01668,  0.01109,  0.00683,  0.00389,  0.00206,  0.00000,  \
				            0.07990,  0.05944,  0.04959,  0.04442,  0.03304,  0.03167,  0.02413,  0.01977,  \
				            0.01704,  0.01136,  0.00703,  0.00402,  0.00214,  0.00000,  0.08328,  0.06254,  \
				            0.05248,  0.04718,  0.03542,  0.03400,  0.02614,  0.02156,  0.01869,  0.01267,  \
				            0.00802,  0.00471,  0.00259,  0.00000 ");
			}
			ground_capacitance (capacitance_template_WxS) {
				index_1 (" 0.1400, 0.2700, 0.2800, 0.5000, 0.5600, 0.9000 ");
				index_2 (" 0.1400, 0.2100, 0.2700, 0.3150, 0.4725, 0.5000, 0.7088, 0.9000,  \
				           1.0631, 1.5947, 2.3920, 3.5880, 5.3821, 538.2070 ");
				values  ("  0.00975,  0.01170,  0.01325,  0.01434,  0.01778,  0.01833,  0.02206,  0.02497,  \
				            0.02713,  0.03263,  0.03780,  0.04189,  0.04446,  0.04737,  0.01321,  0.01496,  \
				            0.01638,  0.01741,  0.02071,  0.02124,  0.02497,  0.02794,  0.03019,  0.03596,  \
				            0.04152,  0.04597,  0.04883,  0.05218,  0.01346,  0.01520,  0.01661,  0.01763,  \
				            0.02093,  0.02146,  0.02519,  0.02816,  0.03041,  0.03620,  0.04179,  0.04626,  \
				            0.04914,  0.05253,  0.01856,  0.02018,  0.02152,  0.02249,  0.02571,  0.02624,  \
				            0.02999,  0.03302,  0.03534,  0.04140,  0.04736,  0.05225,  0.05550,  0.05954,  \
				            0.01989,  0.02150,  0.02283,  0.02380,  0.02700,  0.02753,  0.03128,  0.03432,  \
				            0.03665,  0.04276,  0.04879,  0.05378,  0.05711,  0.06131,  0.02737,  0.02892,  \
				            0.03021,  0.03116,  0.03432,  0.03485,  0.03860,  0.04168,  0.04404,  0.05032,  \
				            0.05666,  0.06204,  0.06578,  0.07083 ");
			}
		}
	}

	layer (metal3) {
		resistance: 0.250000

		capacitance () {
			top_plane: metal4;
			bottom_plane: metal2;
			lateral_capacitance (capacitance_template_WxS) {
				index_1 (" 0.0700, 0.0900, 0.1400, 0.2700, 0.2800, 0.5000, 0.9000, 1.5000 ");
				index_2 (" 0.0700, 0.0900, 0.1050, 0.1575, 0.2363, 0.2700, 0.3544, 0.5000,  \
				           0.5316, 0.7973, 0.9000, 1.1960, 1.5000, 1.7940, 2.6910, 269.1035 ");
				values  ("  0.05741,  0.04373,  0.03672,  0.02161,  0.01082,  0.00818,  0.00409,  0.00128,  \
				            0.00100,  0.00013,  0.00006,  0.00001,  0.00000,  0.00000,  0.00000,  0.00000,  \
				            0.05773,  0.04398,  0.03692,  0.02172,  0.01088,  0.00822,  0.00411,  0.00128,  \
				            0.00100,  0.00013,  0.00006,  0.00001,  0.00000,  0.00000,  0.00000,  0.00000,  \
				            0.05804,  0.04422,  0.03712,  0.02183,  0.01093,  0.00826,  0.00413,  0.00129,  \
				            0.00101,  0.00013,  0.00006,  0.00001,  0.00000,  0.00000,  0.00000,  0.00000,  \
				            0.05814,  0.04429,  0.03718,  0.02187,  0.01095,  0.00827,  0.00414,  0.00129,  \
				            0.00101,  0.00013,  0.00006,  0.00001,  0.00000,  0.00000,  0.00000,  0.00000,  \
				            0.05815,  0.04430,  0.03719,  0.02187,  0.01095,  0.00827,  0.00414,  0.00129,  \
				            0.00101,  0.00013,  0.00006,  0.00001,  0.00000,  0.00000,  0.00000,  0.00000,  \
				            0.05816,  0.04431,  0.03719,  0.02188,  0.01095,  0.00828,  0.00414,  0.00129,  \
				            0.00101,  0.00013,  0.00006,  0.00001,  0.00000,  0.00000,  0.00000,  0.00000,  \
				            0.05815,  0.04430,  0.03719,  0.02187,  0.01095,  0.00828,  0.00414,  0.00129,  \
				            0.00101,  0.00013,  0.00006,  0.00001,  0.00000,  0.00000,  0.00000,  0.00000,  \
				            0.05816,  0.04430,  0.03719,  0.02187,  0.01095,  0.00828,  0.00414,  0.00129,  \
				            0.00101,  0.00013,  0.00006,  0.00001,  0.00000,  0.00000,  0.00000,  0.00000 ");
			}
			ground_capacitance (capacitance_template_WxS) {
				index_1 (" 0.0700, 0.0900, 0.1400, 0.2700, 0.2800, 0.5000, 0.9000, 1.5000 ");
				index_2 (" 0.0700, 0.0900, 0.1050, 0.1575, 0.2363, 0.2700, 0.3544, 0.5000,  \
				           0.5316, 0.7973, 0.9000, 1.1960, 1.5000, 1.7940, 2.6910, 269.1035 ");
				values  ("  0.05019,  0.05590,  0.06004,  0.07264,  0.08637,  0.09060,  0.09763,  0.10327,  \
				            0.10389,  0.10565,  0.10561,  0.10587,  0.10575,  0.10584,  0.10596,  0.10595,  \
				            0.05742,  0.06319,  0.06737,  0.08005,  0.09386,  0.09811,  0.10518,  0.11084,  \
				            0.11146,  0.11324,  0.11320,  0.11346,  0.11335,  0.11343,  0.11353,  0.11353,  \
				            0.07566,  0.08150,  0.08571,  0.09849,  0.11237,  0.11664,  0.12375,  0.12943,  \
				            0.13006,  0.13184,  0.13181,  0.13206,  0.13195,  0.13204,  0.13213,  0.13213,  \
				            0.12354,  0.12939,  0.13362,  0.14642,  0.16033,  0.16461,  0.17173,  0.17742,  \
				            0.17805,  0.17984,  0.17980,  0.18006,  0.17995,  0.18003,  0.18013,  0.18012,  \
				            0.12722,  0.13308,  0.13731,  0.15011,  0.16402,  0.16830,  0.17542,  0.18111,  \
				            0.18174,  0.18353,  0.18349,  0.18375,  0.18364,  0.18373,  0.18382,  0.18382,  \
				            0.20839,  0.21424,  0.21847,  0.23128,  0.24519,  0.24947,  0.25659,  0.26229,  \
				            0.26291,  0.26470,  0.26467,  0.26492,  0.26481,  0.26490,  0.26499,  0.26499,  \
				            0.35597,  0.36183,  0.36606,  0.37886,  0.39277,  0.39705,  0.40417,  0.40987,  \
				            0.41049,  0.41228,  0.41225,  0.41250,  0.41239,  0.41248,  0.41245,  0.41257,  \
				            0.57734,  0.58319,  0.58742,  0.60023,  0.61414,  0.61842,  0.62554,  0.63123,  \
				            0.63186,  0.63365,  0.63362,  0.63387,  0.63376,  0.63385,  0.63382,  0.63394 ");
			}
		}

		capacitance () {
			top_plane: metal4;
			bottom_plane: metal1;
			lateral_capacitance (capacitance_template_WxS) {
				index_1 (" 0.0700, 0.0900, 0.1400, 0.2700, 0.2800, 0.5000, 0.9000, 1.5000 ");
				index_2 (" 0.0700, 0.0900, 0.1050, 0.1575, 0.2363, 0.2700, 0.3544, 0.5000,  \
				           0.5316, 0.7973, 0.9000, 1.1960, 1.5000, 1.7940, 2.6910, 269.1035 ");
				values  ("  0.06188,  0.04851,  0.04169,  0.02696,  0.01605,  0.01317,  0.00824,  0.00389,  \
				            0.00332,  0.00091,  0.00055,  0.00014,  0.00004,  0.00001,  0.00000,  0.00000,  \
				            0.06272,  0.04923,  0.04233,  0.02742,  0.01635,  0.01342,  0.00841,  0.00397,  \
				            0.00339,  0.00093,  0.00057,  0.00014,  0.00004,  0.00001,  0.00000,  0.00000,  \
				            0.06403,  0.05037,  0.04336,  0.02817,  0.01685,  0.01385,  0.00870,  0.00412,  \
				            0.00352,  0.00096,  0.00059,  0.00015,  0.00004,  0.00001,  0.00000,  0.00000,  \
				            0.06548,  0.05164,  0.04453,  0.02904,  0.01743,  0.01435,  0.00903,  0.00429,  \
				            0.00367,  0.00101,  0.00061,  0.00015,  0.00004,  0.00001,  0.00000,  0.00000,  \
				            0.06554,  0.05170,  0.04458,  0.02908,  0.01746,  0.01437,  0.00905,  0.00430,  \
				            0.00367,  0.00101,  0.00062,  0.00016,  0.00004,  0.00001,  0.00000,  0.00000,  \
				            0.06611,  0.05220,  0.04503,  0.02942,  0.01769,  0.01456,  0.00918,  0.00436,  \
				            0.00373,  0.00102,  0.00063,  0.00016,  0.00004,  0.00001,  0.00000,  0.00000,  \
				            0.06621,  0.05229,  0.04512,  0.02948,  0.01773,  0.01460,  0.00920,  0.00438,  \
				            0.00374,  0.00103,  0.00063,  0.00016,  0.00004,  0.00001,  0.00000,  0.00000,  \
				            0.06622,  0.05230,  0.04512,  0.02949,  0.01773,  0.01460,  0.00921,  0.00438,  \
				            0.00374,  0.00103,  0.00063,  0.00016,  0.00004,  0.00001,  0.00000,  0.00000 ");
			}
			ground_capacitance (capacitance_template_WxS) {
				index_1 (" 0.0700, 0.0900, 0.1400, 0.2700, 0.2800, 0.5000, 0.9000, 1.5000 ");
				index_2 (" 0.0700, 0.0900, 0.1050, 0.1575, 0.2363, 0.2700, 0.3544, 0.5000,  \
				           0.5316, 0.7973, 0.9000, 1.1960, 1.5000, 1.7940, 2.6910, 269.1035 ");
				values  ("  0.03514,  0.03897,  0.04176,  0.05050,  0.06098,  0.06460,  0.07162,  0.07912,  \
				            0.08020,  0.08486,  0.08545,  0.08641,  0.08655,  0.08667,  0.08671,  0.08671,  \
				            0.03968,  0.04354,  0.04636,  0.05519,  0.06579,  0.06947,  0.07660,  0.08423,  \
				            0.08533,  0.09009,  0.09070,  0.09168,  0.09183,  0.09194,  0.09197,  0.09197,  \
				            0.05120,  0.05511,  0.05797,  0.06694,  0.07775,  0.08151,  0.08882,  0.09668,  \
				            0.09782,  0.10274,  0.10339,  0.10440,  0.10456,  0.10468,  0.10469,  0.10469,  \
				            0.08193,  0.08590,  0.08881,  0.09795,  0.10900,  0.11286,  0.12039,  0.12852,  \
				            0.12969,  0.13482,  0.13550,  0.13656,  0.13673,  0.13685,  0.13685,  0.13685,  \
				            0.08432,  0.08830,  0.09120,  0.10035,  0.11142,  0.11528,  0.12282,  0.13096,  \
				            0.13214,  0.13727,  0.13795,  0.13901,  0.13918,  0.13930,  0.13930,  0.13930,  \
				            0.13736,  0.14137,  0.14430,  0.15352,  0.16469,  0.16859,  0.17621,  0.18446,  \
				            0.18565,  0.19087,  0.19156,  0.19264,  0.19281,  0.19293,  0.19293,  0.19293,  \
				            0.23438,  0.23840,  0.24133,  0.25057,  0.26176,  0.26567,  0.27331,  0.28157,  \
				            0.28277,  0.28800,  0.28870,  0.28977,  0.28995,  0.29007,  0.29007,  0.29007,  \
				            0.38002,  0.38403,  0.38697,  0.39621,  0.40740,  0.41130,  0.41895,  0.42721,  \
				            0.42841,  0.43364,  0.43434,  0.43541,  0.43559,  0.43571,  0.43571,  0.43571 ");
			}
		}

		capacitance () {
			top_plane: metal4;
			bottom_plane: poly;
			lateral_capacitance (capacitance_template_WxS) {
				index_1 (" 0.0700, 0.0900, 0.1400, 0.2700, 0.2800, 0.5000, 0.9000, 1.5000 ");
				index_2 (" 0.0700, 0.0900, 0.1050, 0.1575, 0.2363, 0.2700, 0.3544, 0.5000,  \
				           0.5316, 0.7973, 0.9000, 1.1960, 1.5000, 1.7940, 2.6910, 269.1035 ");
				values  ("  0.06262,  0.04933,  0.04258,  0.02805,  0.01735,  0.01452,  0.00962,  0.00511,  \
				            0.00449,  0.00159,  0.00108,  0.00037,  0.00013,  0.00005,  0.00000,  0.00000,  \
				            0.06357,  0.05017,  0.04334,  0.02863,  0.01776,  0.01488,  0.00989,  0.00527,  \
				            0.00463,  0.00164,  0.00111,  0.00038,  0.00013,  0.00005,  0.00000,  0.00000,  \
				            0.06519,  0.05162,  0.04468,  0.02968,  0.01853,  0.01556,  0.01039,  0.00557,  \
				            0.00490,  0.00175,  0.00119,  0.00041,  0.00014,  0.00005,  0.00000,  0.00000,  \
				            0.06737,  0.05361,  0.04654,  0.03118,  0.01966,  0.01656,  0.01114,  0.00602,  \
				            0.00531,  0.00191,  0.00130,  0.00045,  0.00015,  0.00006,  0.00000,  0.00000,  \
				            0.06748,  0.05371,  0.04663,  0.03126,  0.01972,  0.01661,  0.01118,  0.00605,  \
				            0.00533,  0.00192,  0.00131,  0.00045,  0.00015,  0.00006,  0.00000,  0.00000,  \
				            0.06881,  0.05493,  0.04778,  0.03219,  0.02042,  0.01724,  0.01165,  0.00633,  \
				            0.00558,  0.00202,  0.00138,  0.00047,  0.00016,  0.00006,  0.00000,  0.00000,  \
				            0.06932,  0.05540,  0.04822,  0.03256,  0.02070,  0.01748,  0.01183,  0.00645,  \
				            0.00568,  0.00206,  0.00141,  0.00048,  0.00017,  0.00006,  0.00000,  0.00000,  \
				            0.06940,  0.05547,  0.04829,  0.03262,  0.02074,  0.01752,  0.01186,  0.00646,  \
				            0.00570,  0.00207,  0.00141,  0.00049,  0.00017,  0.00006,  0.00000,  0.00000 ");
			}
			ground_capacitance (capacitance_template_WxS) {
				index_1 (" 0.0700, 0.0900, 0.1400, 0.2700, 0.2800, 0.5000, 0.9000, 1.5000 ");
				index_2 (" 0.0700, 0.0900, 0.1050, 0.1575, 0.2363, 0.2700, 0.3544, 0.5000,  \
				           0.5316, 0.7973, 0.9000, 1.1960, 1.5000, 1.7940, 2.6910, 269.1035 ");
				values  ("  0.03315,  0.03668,  0.03926,  0.04724,  0.05675,  0.06007,  0.06658,  0.07393,  \
				            0.07505,  0.08044,  0.08133,  0.08287,  0.08329,  0.08352,  0.08363,  0.08363,  \
				            0.03733,  0.04088,  0.04346,  0.05149,  0.06110,  0.06445,  0.07108,  0.07858,  \
				            0.07973,  0.08528,  0.08620,  0.08778,  0.08823,  0.08847,  0.08856,  0.08856,  \
				            0.04784,  0.05140,  0.05399,  0.06210,  0.07188,  0.07531,  0.08214,  0.08993,  \
				            0.09113,  0.09697,  0.09796,  0.09965,  0.10013,  0.10037,  0.10046,  0.10046,  \
				            0.07563,  0.07921,  0.08183,  0.09006,  0.10008,  0.10362,  0.11074,  0.11897,  \
				            0.12025,  0.12653,  0.12762,  0.12945,  0.12999,  0.13025,  0.13034,  0.13034,  \
				            0.07779,  0.08137,  0.08399,  0.09223,  0.10226,  0.10581,  0.11295,  0.12119,  \
				            0.12248,  0.12879,  0.12988,  0.13172,  0.13226,  0.13252,  0.13261,  0.13261,  \
				            0.12576,  0.12938,  0.13202,  0.14036,  0.15057,  0.15420,  0.16153,  0.17004,  \
				            0.17137,  0.17796,  0.17912,  0.18105,  0.18162,  0.18190,  0.18198,  0.18199,  \
				            0.21408,  0.21772,  0.22038,  0.22876,  0.23905,  0.24271,  0.25011,  0.25874,  \
				            0.26009,  0.26679,  0.26797,  0.26993,  0.27053,  0.27080,  0.27091,  0.27089,  \
				            0.34703,  0.35067,  0.35334,  0.36173,  0.37203,  0.37570,  0.38311,  0.39175,  \
				            0.39310,  0.39982,  0.40100,  0.40297,  0.40357,  0.40385,  0.40395,  0.40394 ");
			}
		}

		capacitance () {
			top_plane: metal4;
			bottom_plane: SUBSTRATE;
			lateral_capacitance (capacitance_template_WxS) {
				index_1 (" 0.0700, 0.0900, 0.1400, 0.2700, 0.2800, 0.5000, 0.9000, 1.5000 ");
				index_2 (" 0.0700, 0.0900, 0.1050, 0.1575, 0.2363, 0.2700, 0.3544, 0.5000,  \
				           0.5316, 0.7973, 0.9000, 1.1960, 1.5000, 1.7940, 2.6910, 269.1035 ");
				values  ("  0.06295,  0.04969,  0.04295,  0.02851,  0.01792,  0.01513,  0.01029,  0.00579,  \
				            0.00516,  0.00209,  0.00150,  0.00062,  0.00025,  0.00011,  0.00001,  0.00000,  \
				            0.06393,  0.05056,  0.04376,  0.02914,  0.01840,  0.01555,  0.01062,  0.00600,  \
				            0.00535,  0.00217,  0.00157,  0.00065,  0.00027,  0.00012,  0.00001,  0.00000,  \
				            0.06567,  0.05214,  0.04523,  0.03034,  0.01931,  0.01637,  0.01126,  0.00642,  \
				            0.00573,  0.00235,  0.00170,  0.00070,  0.00029,  0.00013,  0.00001,  0.00000,  \
				            0.06823,  0.05451,  0.04747,  0.03221,  0.02079,  0.01772,  0.01232,  0.00712,  \
				            0.00637,  0.00266,  0.00193,  0.00080,  0.00033,  0.00015,  0.00001,  0.00000,  \
				            0.06837,  0.05464,  0.04759,  0.03232,  0.02087,  0.01780,  0.01238,  0.00716,  \
				            0.00641,  0.00268,  0.00194,  0.00080,  0.00033,  0.00015,  0.00001,  0.00000,  \
				            0.07025,  0.05640,  0.04927,  0.03375,  0.02202,  0.01884,  0.01321,  0.00772,  \
				            0.00692,  0.00292,  0.00213,  0.00089,  0.00037,  0.00016,  0.00001,  0.00000,  \
				            0.07130,  0.05739,  0.05022,  0.03457,  0.02268,  0.01944,  0.01369,  0.00805,  \
				            0.00722,  0.00307,  0.00224,  0.00093,  0.00039,  0.00017,  0.00002,  0.00000,  \
				            0.07158,  0.05766,  0.05047,  0.03478,  0.02285,  0.01960,  0.01382,  0.00813,  \
				            0.00730,  0.00311,  0.00227,  0.00095,  0.00040,  0.00017,  0.00002,  0.00000 ");
			}
			ground_capacitance (capacitance_template_WxS) {
				index_1 (" 0.0700, 0.0900, 0.1400, 0.2700, 0.2800, 0.5000, 0.9000, 1.5000 ");
				index_2 (" 0.0700, 0.0900, 0.1050, 0.1575, 0.2363, 0.2700, 0.3544, 0.5000,  \
				           0.5316, 0.7973, 0.9000, 1.1960, 1.5000, 1.7940, 2.6910, 269.1035 ");
				values  ("  0.03230,  0.03575,  0.03824,  0.04593,  0.05503,  0.05819,  0.06442,  0.07153,  \
				            0.07264,  0.07821,  0.07922,  0.08109,  0.08175,  0.08211,  0.08234,  0.08235,  \
				            0.03638,  0.03981,  0.04230,  0.05002,  0.05918,  0.06238,  0.06871,  0.07597,  \
				            0.07711,  0.08285,  0.08391,  0.08584,  0.08655,  0.08692,  0.08714,  0.08715,  \
				            0.04652,  0.04994,  0.05243,  0.06016,  0.06945,  0.07272,  0.07922,  0.08679,  \
				            0.08798,  0.09408,  0.09523,  0.09731,  0.09808,  0.09848,  0.09870,  0.09872,  \
				            0.07308,  0.07649,  0.07897,  0.08677,  0.09624,  0.09960,  0.10641,  0.11446,  \
				            0.11574,  0.12243,  0.12373,  0.12607,  0.12696,  0.12740,  0.12765,  0.12767,  \
				            0.07513,  0.07854,  0.08103,  0.08883,  0.09831,  0.10168,  0.10850,  0.11658,  \
				            0.11787,  0.12459,  0.12590,  0.12825,  0.12914,  0.12959,  0.12984,  0.12987,  \
				            0.12070,  0.12413,  0.12664,  0.13452,  0.14418,  0.14764,  0.15470,  0.16315,  \
				            0.16452,  0.17170,  0.17313,  0.17569,  0.17668,  0.17717,  0.17744,  0.17747,  \
				            0.20474,  0.20819,  0.21072,  0.21867,  0.22845,  0.23197,  0.23916,  0.24783,  \
				            0.24924,  0.25670,  0.25819,  0.26088,  0.26192,  0.26243,  0.26275,  0.26275,  \
				            0.33166,  0.33512,  0.33765,  0.34562,  0.35544,  0.35897,  0.36620,  0.37493,  \
				            0.37635,  0.38387,  0.38539,  0.38810,  0.38916,  0.38968,  0.39000,  0.39000 ");
			}
		}

		capacitance () {
			top_plane: metal5;
			bottom_plane: metal2;
			lateral_capacitance (capacitance_template_WxS) {
				index_1 (" 0.0700, 0.0900, 0.1400, 0.2700, 0.2800, 0.5000, 0.9000, 1.5000 ");
				index_2 (" 0.0700, 0.0900, 0.1050, 0.1575, 0.2363, 0.2700, 0.3544, 0.5000,  \
				           0.5316, 0.7973, 0.9000, 1.1960, 1.5000, 1.7940, 2.6910, 269.1035 ");
				values  ("  0.06279,  0.04952,  0.04278,  0.02830,  0.01766,  0.01485,  0.00998,  0.00547,  \
				            0.00484,  0.00183,  0.00128,  0.00048,  0.00018,  0.00007,  0.00000,  0.00000,  \
				            0.06377,  0.05038,  0.04357,  0.02891,  0.01811,  0.01525,  0.01028,  0.00565,  \
				            0.00500,  0.00190,  0.00133,  0.00050,  0.00019,  0.00007,  0.00000,  0.00000,  \
				            0.06545,  0.05190,  0.04498,  0.03004,  0.01895,  0.01600,  0.01085,  0.00601,  \
				            0.00532,  0.00204,  0.00143,  0.00054,  0.00020,  0.00008,  0.00000,  0.00000,  \
				            0.06784,  0.05410,  0.04704,  0.03174,  0.02026,  0.01718,  0.01175,  0.00658,  \
				            0.00584,  0.00227,  0.00159,  0.00060,  0.00023,  0.00009,  0.00001,  0.00000,  \
				            0.06797,  0.05421,  0.04715,  0.03183,  0.02033,  0.01724,  0.01180,  0.00661,  \
				            0.00587,  0.00228,  0.00160,  0.00060,  0.00023,  0.00009,  0.00001,  0.00000,  \
				            0.06957,  0.05570,  0.04856,  0.03300,  0.02124,  0.01806,  0.01243,  0.00702,  \
				            0.00624,  0.00244,  0.00172,  0.00065,  0.00024,  0.00010,  0.00001,  0.00000,  \
				            0.07031,  0.05640,  0.04922,  0.03356,  0.02167,  0.01845,  0.01274,  0.00721,  \
				            0.00641,  0.00252,  0.00178,  0.00067,  0.00025,  0.00010,  0.00001,  0.00000,  \
				            0.07046,  0.05654,  0.04935,  0.03367,  0.02176,  0.01852,  0.01279,  0.00725,  \
				            0.00645,  0.00253,  0.00179,  0.00068,  0.00025,  0.00010,  0.00001,  0.00000 ");
			}
			ground_capacitance (capacitance_template_WxS) {
				index_1 (" 0.0700, 0.0900, 0.1400, 0.2700, 0.2800, 0.5000, 0.9000, 1.5000 ");
				index_2 (" 0.0700, 0.0900, 0.1050, 0.1575, 0.2363, 0.2700, 0.3544, 0.5000,  \
				           0.5316, 0.7973, 0.9000, 1.1960, 1.5000, 1.7940, 2.6910, 269.1035 ");
				values  ("  0.03270,  0.03619,  0.03872,  0.04653,  0.05583,  0.05906,  0.06542,  0.07266,  \
				            0.07378,  0.07929,  0.08024,  0.08196,  0.08250,  0.08279,  0.08294,  0.08295,  \
				            0.03682,  0.04031,  0.04284,  0.05070,  0.06006,  0.06333,  0.06981,  0.07720,  \
				            0.07834,  0.08402,  0.08503,  0.08680,  0.08737,  0.08766,  0.08781,  0.08781,  \
				            0.04713,  0.05061,  0.05315,  0.06105,  0.07057,  0.07391,  0.08058,  0.08827,  \
				            0.08947,  0.09548,  0.09656,  0.09845,  0.09907,  0.09939,  0.09953,  0.09953,  \
				            0.07425,  0.07774,  0.08029,  0.08828,  0.09802,  0.10147,  0.10844,  0.11660,  \
				            0.11789,  0.12442,  0.12562,  0.12771,  0.12841,  0.12875,  0.12890,  0.12891,  \
				            0.07635,  0.07984,  0.08239,  0.09039,  0.10014,  0.10360,  0.11059,  0.11877,  \
				            0.12006,  0.12662,  0.12783,  0.12993,  0.13064,  0.13098,  0.13113,  0.13114,  \
				            0.12306,  0.12658,  0.12915,  0.13725,  0.14719,  0.15074,  0.15793,  0.16645,  \
				            0.16780,  0.17473,  0.17602,  0.17827,  0.17903,  0.17940,  0.17955,  0.17956,  \
				            0.20917,  0.21272,  0.21531,  0.22347,  0.23350,  0.23709,  0.24440,  0.25306,  \
				            0.25445,  0.26155,  0.26289,  0.26520,  0.26600,  0.26637,  0.26655,  0.26654,  \
				            0.33900,  0.34255,  0.34515,  0.35332,  0.36337,  0.36697,  0.37430,  0.38300,  \
				            0.38438,  0.39152,  0.39287,  0.39519,  0.39599,  0.39637,  0.39655,  0.39654 ");
			}
		}

		capacitance () {
			top_plane: metal5;
			bottom_plane: metal1;
			lateral_capacitance (capacitance_template_WxS) {
				index_1 (" 0.0700, 0.0900, 0.1400, 0.2700, 0.2800, 0.5000, 0.9000, 1.5000 ");
				index_2 (" 0.0700, 0.0900, 0.1050, 0.1575, 0.2363, 0.2700, 0.3544, 0.5000,  \
				           0.5316, 0.7973, 0.9000, 1.1960, 1.5000, 1.7940, 2.6910, 269.1035 ");
				values  ("  0.06774,  0.05476,  0.04820,  0.03411,  0.02356,  0.02067,  0.01539,  0.00988,  \
				            0.00902,  0.00435,  0.00330,  0.00154,  0.00071,  0.00034,  0.00004,  0.00000,  \
				            0.06917,  0.05604,  0.04938,  0.03503,  0.02424,  0.02126,  0.01584,  0.01017,  \
				            0.00929,  0.00448,  0.00340,  0.00159,  0.00073,  0.00035,  0.00004,  0.00000,  \
				            0.07177,  0.05837,  0.05154,  0.03673,  0.02548,  0.02237,  0.01668,  0.01071,  \
				            0.00978,  0.00472,  0.00359,  0.00167,  0.00077,  0.00037,  0.00004,  0.00000,  \
				            0.07535,  0.06163,  0.05456,  0.03914,  0.02728,  0.02397,  0.01790,  0.01151,  \
				            0.01051,  0.00509,  0.00387,  0.00180,  0.00083,  0.00040,  0.00004,  0.00000,  \
				            0.07553,  0.06178,  0.05471,  0.03926,  0.02736,  0.02405,  0.01796,  0.01155,  \
				            0.01055,  0.00510,  0.00389,  0.00181,  0.00083,  0.00040,  0.00004,  0.00000,  \
				            0.07758,  0.06366,  0.05647,  0.04069,  0.02844,  0.02501,  0.01870,  0.01204,  \
				            0.01100,  0.00533,  0.00406,  0.00189,  0.00087,  0.00042,  0.00004,  0.00000,  \
				            0.07838,  0.06441,  0.05718,  0.04127,  0.02889,  0.02541,  0.01901,  0.01225,  \
				            0.01120,  0.00543,  0.00414,  0.00193,  0.00089,  0.00043,  0.00005,  0.00000,  \
				            0.07853,  0.06455,  0.05731,  0.04138,  0.02897,  0.02548,  0.01907,  0.01229,  \
				            0.01123,  0.00545,  0.00415,  0.00193,  0.00089,  0.00043,  0.00005,  0.00000 ");
			}
			ground_capacitance (capacitance_template_WxS) {
				index_1 (" 0.0700, 0.0900, 0.1400, 0.2700, 0.2800, 0.5000, 0.9000, 1.5000 ");
				index_2 (" 0.0700, 0.0900, 0.1050, 0.1575, 0.2363, 0.2700, 0.3544, 0.5000,  \
				           0.5316, 0.7973, 0.9000, 1.1960, 1.5000, 1.7940, 2.6910, 269.1035 ");
				values  ("  0.01662,  0.01827,  0.01947,  0.02332,  0.02846,  0.03046,  0.03499,  0.04138,  \
				            0.04254,  0.04976,  0.05153,  0.05488,  0.05650,  0.05728,  0.05783,  0.05790,  \
				            0.01819,  0.01980,  0.02098,  0.02484,  0.03004,  0.03209,  0.03672,  0.04326,  \
				            0.04446,  0.05187,  0.05370,  0.05714,  0.05881,  0.05961,  0.06017,  0.06025,  \
				            0.02200,  0.02359,  0.02476,  0.02866,  0.03404,  0.03617,  0.04099,  0.04784,  \
				            0.04910,  0.05688,  0.05882,  0.06245,  0.06420,  0.06505,  0.06563,  0.06571,  \
				            0.03231,  0.03393,  0.03514,  0.03921,  0.04488,  0.04712,  0.05225,  0.05955,  \
				            0.06089,  0.06922,  0.07130,  0.07520,  0.07710,  0.07801,  0.07863,  0.07871,  \
				            0.03313,  0.03476,  0.03597,  0.04005,  0.04573,  0.04798,  0.05313,  0.06045,  \
				            0.06180,  0.07015,  0.07223,  0.07615,  0.07806,  0.07897,  0.07959,  0.07968,  \
				            0.05194,  0.05362,  0.05487,  0.05908,  0.06495,  0.06729,  0.07262,  0.08022,  \
				            0.08162,  0.09030,  0.09248,  0.09657,  0.09856,  0.09951,  0.10016,  0.10025,  \
				            0.08759,  0.08929,  0.09056,  0.09483,  0.10079,  0.10316,  0.10858,  0.11629,  \
				            0.11771,  0.12654,  0.12876,  0.13291,  0.13495,  0.13592,  0.13671,  0.13667,  \
				            0.14171,  0.14341,  0.14468,  0.14897,  0.15494,  0.15732,  0.16275,  0.17048,  \
				            0.17190,  0.18076,  0.18298,  0.18715,  0.18919,  0.19017,  0.19096,  0.19093 ");
			}
		}

		capacitance () {
			top_plane: metal5;
			bottom_plane: poly;
			lateral_capacitance (capacitance_template_WxS) {
				index_1 (" 0.0700, 0.0900, 0.1400, 0.2700, 0.2800, 0.5000, 0.9000, 1.5000 ");
				index_2 (" 0.0700, 0.0900, 0.1050, 0.1575, 0.2363, 0.2700, 0.3544, 0.5000,  \
				           0.5316, 0.7973, 0.9000, 1.1960, 1.5000, 1.7940, 2.6910, 269.1035 ");
				values  ("  0.06875,  0.05585,  0.04934,  0.03544,  0.02513,  0.02231,  0.01716,  0.01168,  \
				            0.01081,  0.00581,  0.00461,  0.00242,  0.00125,  0.00066,  0.00010,  0.00000,  \
				            0.07027,  0.05722,  0.05062,  0.03646,  0.02591,  0.02301,  0.01770,  0.01205,  \
				            0.01115,  0.00600,  0.00475,  0.00250,  0.00129,  0.00069,  0.00010,  0.00000,  \
				            0.07312,  0.05982,  0.05305,  0.03844,  0.02740,  0.02435,  0.01875,  0.01276,  \
				            0.01180,  0.00635,  0.00503,  0.00263,  0.00136,  0.00072,  0.00011,  0.00000,  \
				            0.07738,  0.06372,  0.05671,  0.04142,  0.02968,  0.02640,  0.02035,  0.01384,  \
				            0.01280,  0.00688,  0.00546,  0.00285,  0.00147,  0.00078,  0.00011,  0.00000,  \
				            0.07760,  0.06392,  0.05690,  0.04158,  0.02980,  0.02651,  0.02043,  0.01389,  \
				            0.01285,  0.00691,  0.00548,  0.00286,  0.00148,  0.00079,  0.00011,  0.00000,  \
				            0.08033,  0.06644,  0.05927,  0.04352,  0.03129,  0.02785,  0.02147,  0.01460,  \
				            0.01350,  0.00726,  0.00576,  0.00300,  0.00155,  0.00083,  0.00012,  0.00000,  \
				            0.08151,  0.06753,  0.06030,  0.04438,  0.03194,  0.02843,  0.02193,  0.01491,  \
				            0.01379,  0.00741,  0.00588,  0.00307,  0.00159,  0.00084,  0.00013,  0.00000,  \
				            0.08172,  0.06772,  0.06048,  0.04453,  0.03206,  0.02854,  0.02201,  0.01496,  \
				            0.01384,  0.00743,  0.00590,  0.00308,  0.00159,  0.00085,  0.00013,  0.00000 ");
			}
			ground_capacitance (capacitance_template_WxS) {
				index_1 (" 0.0700, 0.0900, 0.1400, 0.2700, 0.2800, 0.5000, 0.9000, 1.5000 ");
				index_2 (" 0.0700, 0.0900, 0.1050, 0.1575, 0.2363, 0.2700, 0.3544, 0.5000,  \
				           0.5316, 0.7973, 0.9000, 1.1960, 1.5000, 1.7940, 2.6910, 269.1035 ");
				values  ("  0.01398,  0.01537,  0.01635,  0.01947,  0.02356,  0.02515,  0.02880,  0.03419,  \
				            0.03523,  0.04212,  0.04403,  0.04793,  0.05013,  0.05132,  0.05240,  0.05260,  \
				            0.01526,  0.01658,  0.01752,  0.02060,  0.02469,  0.02631,  0.03004,  0.03558,  \
				            0.03664,  0.04374,  0.04571,  0.04972,  0.05199,  0.05321,  0.05432,  0.05453,  \
				            0.01819,  0.01943,  0.02034,  0.02337,  0.02757,  0.02924,  0.03315,  0.03897,  \
				            0.04010,  0.04758,  0.04967,  0.05392,  0.05632,  0.05760,  0.05877,  0.05899,  \
				            0.02572,  0.02695,  0.02788,  0.03101,  0.03545,  0.03724,  0.04144,  0.04774,  \
				            0.04895,  0.05705,  0.05931,  0.06391,  0.06651,  0.06790,  0.06916,  0.06940,  \
				            0.02632,  0.02756,  0.02848,  0.03162,  0.03607,  0.03787,  0.04209,  0.04842,  \
				            0.04963,  0.05777,  0.06003,  0.06465,  0.06726,  0.06866,  0.06992,  0.07016,  \
				            0.04022,  0.04151,  0.04248,  0.04576,  0.05044,  0.05233,  0.05677,  0.06343,  \
				            0.06470,  0.07324,  0.07562,  0.08048,  0.08322,  0.08468,  0.08600,  0.08625,  \
				            0.06726,  0.06859,  0.06957,  0.07294,  0.07773,  0.07968,  0.08422,  0.09102,  \
				            0.09233,  0.10105,  0.10348,  0.10843,  0.11123,  0.11272,  0.11420,  0.11433,  \
				            0.10872,  0.11005,  0.11104,  0.11442,  0.11923,  0.12118,  0.12575,  0.13257,  \
				            0.13388,  0.14263,  0.14507,  0.15004,  0.15285,  0.15435,  0.15584,  0.15596 ");
			}
		}

		capacitance () {
			top_plane: metal5;
			bottom_plane: SUBSTRATE;
			lateral_capacitance (capacitance_template_WxS) {
				index_1 (" 0.0700, 0.0900, 0.1400, 0.2700, 0.2800, 0.5000, 0.9000, 1.5000 ");
				index_2 (" 0.0700, 0.0900, 0.1050, 0.1575, 0.2363, 0.2700, 0.3544, 0.5000,  \
				           0.5316, 0.7973, 0.9000, 1.1960, 1.5000, 1.7940, 2.6910, 269.1035 ");
				values  ("  0.06927,  0.05639,  0.04991,  0.03608,  0.02588,  0.02311,  0.01806,  0.01269,  \
				            0.01183,  0.00680,  0.00554,  0.00314,  0.00176,  0.00102,  0.00019,  0.00000,  \
				            0.07081,  0.05779,  0.05122,  0.03715,  0.02671,  0.02387,  0.01866,  0.01311,  \
				            0.01222,  0.00702,  0.00572,  0.00325,  0.00182,  0.00105,  0.00020,  0.00000,  \
				            0.07376,  0.06049,  0.05375,  0.03924,  0.02834,  0.02534,  0.01984,  0.01394,  \
				            0.01299,  0.00746,  0.00608,  0.00344,  0.00193,  0.00111,  0.00021,  0.00000,  \
				            0.07836,  0.06474,  0.05776,  0.04257,  0.03095,  0.02772,  0.02174,  0.01527,  \
				            0.01423,  0.00817,  0.00666,  0.00376,  0.00211,  0.00122,  0.00023,  0.00000,  \
				            0.07860,  0.06497,  0.05797,  0.04275,  0.03109,  0.02784,  0.02184,  0.01534,  \
				            0.01430,  0.00821,  0.00669,  0.00378,  0.00212,  0.00122,  0.00023,  0.00000,  \
				            0.08185,  0.06799,  0.06084,  0.04515,  0.03299,  0.02956,  0.02322,  0.01631,  \
				            0.01520,  0.00873,  0.00711,  0.00402,  0.00226,  0.00130,  0.00024,  0.00000,  \
				            0.08351,  0.06954,  0.06232,  0.04641,  0.03398,  0.03047,  0.02394,  0.01683,  \
				            0.01568,  0.00900,  0.00734,  0.00414,  0.00233,  0.00134,  0.00026,  0.00000,  \
				            0.08390,  0.06991,  0.06266,  0.04670,  0.03422,  0.03068,  0.02411,  0.01695,  \
				            0.01579,  0.00906,  0.00739,  0.00417,  0.00234,  0.00135,  0.00026,  0.00000 ");
			}
			ground_capacitance (capacitance_template_WxS) {
				index_1 (" 0.0700, 0.0900, 0.1400, 0.2700, 0.2800, 0.5000, 0.9000, 1.5000 ");
				index_2 (" 0.0700, 0.0900, 0.1050, 0.1575, 0.2363, 0.2700, 0.3544, 0.5000,  \
				           0.5316, 0.7973, 0.9000, 1.1960, 1.5000, 1.7940, 2.6910, 269.1035 ");
				values  ("  0.01269,  0.01397,  0.01488,  0.01774,  0.02138,  0.02278,  0.02599,  0.03076,  \
				            0.03169,  0.03812,  0.03999,  0.04404,  0.04656,  0.04803,  0.04962,  0.05001,  \
				            0.01388,  0.01509,  0.01595,  0.01872,  0.02233,  0.02375,  0.02702,  0.03192,  \
				            0.03287,  0.03949,  0.04143,  0.04559,  0.04819,  0.04971,  0.05135,  0.05175,  \
				            0.01651,  0.01761,  0.01842,  0.02108,  0.02473,  0.02619,  0.02959,  0.03474,  \
				            0.03576,  0.04275,  0.04481,  0.04924,  0.05200,  0.05360,  0.05533,  0.05576,  \
				            0.02290,  0.02397,  0.02476,  0.02745,  0.03126,  0.03281,  0.03648,  0.04208,  \
				            0.04318,  0.05081,  0.05305,  0.05790,  0.06091,  0.06266,  0.06455,  0.06502,  \
				            0.02340,  0.02447,  0.02526,  0.02796,  0.03179,  0.03334,  0.03702,  0.04265,  \
				            0.04375,  0.05141,  0.05367,  0.05854,  0.06156,  0.06332,  0.06522,  0.06569,  \
				            0.03502,  0.03612,  0.03694,  0.03976,  0.04379,  0.04544,  0.04935,  0.05533,  \
				            0.05650,  0.06464,  0.06704,  0.07220,  0.07542,  0.07729,  0.07930,  0.07980,  \
				            0.05788,  0.05902,  0.05987,  0.06278,  0.06695,  0.06866,  0.07269,  0.07887,  \
				            0.08007,  0.08847,  0.09095,  0.09627,  0.09958,  0.10151,  0.10371,  0.10410,  \
				            0.09334,  0.09449,  0.09535,  0.09828,  0.10248,  0.10420,  0.10827,  0.11449,  \
				            0.11570,  0.12416,  0.12665,  0.13202,  0.13535,  0.13729,  0.13951,  0.13990 ");
			}
		}

		capacitance () {
			top_plane: metal6;
			bottom_plane: metal2;
			lateral_capacitance (capacitance_template_WxS) {
				index_1 (" 0.0700, 0.0900, 0.1400, 0.2700, 0.2800, 0.5000, 0.9000, 1.5000 ");
				index_2 (" 0.0700, 0.0900, 0.1050, 0.1575, 0.2363, 0.2700, 0.3544, 0.5000,  \
				           0.5316, 0.7973, 0.9000, 1.1960, 1.5000, 1.7940, 2.6910, 269.1035 ");
				values  ("  0.06328,  0.05004,  0.04332,  0.02894,  0.01844,  0.01568,  0.01092,  0.00647,  \
				            0.00583,  0.00269,  0.00205,  0.00101,  0.00051,  0.00027,  0.00004,  0.00000,  \
				            0.06428,  0.05094,  0.04416,  0.02961,  0.01897,  0.01616,  0.01130,  0.00673,  \
				            0.00608,  0.00282,  0.00215,  0.00107,  0.00054,  0.00029,  0.00005,  0.00000,  \
				            0.06611,  0.05261,  0.04573,  0.03092,  0.02002,  0.01713,  0.01208,  0.00729,  \
				            0.00659,  0.00310,  0.00238,  0.00118,  0.00060,  0.00032,  0.00005,  0.00000,  \
				            0.06900,  0.05532,  0.04832,  0.03317,  0.02187,  0.01885,  0.01351,  0.00832,  \
				            0.00756,  0.00365,  0.00282,  0.00142,  0.00073,  0.00039,  0.00006,  0.00000,  \
				            0.06917,  0.05548,  0.04847,  0.03330,  0.02199,  0.01895,  0.01360,  0.00839,  \
				            0.00762,  0.00369,  0.00285,  0.00143,  0.00074,  0.00040,  0.00006,  0.00000,  \
				            0.07169,  0.05788,  0.05078,  0.03535,  0.02372,  0.02057,  0.01496,  0.00941,  \
				            0.00858,  0.00425,  0.00331,  0.00168,  0.00087,  0.00047,  0.00008,  0.00000,  \
				            0.07363,  0.05974,  0.05259,  0.03698,  0.02512,  0.02188,  0.01608,  0.01025,  \
				            0.00938,  0.00472,  0.00369,  0.00190,  0.00099,  0.00054,  0.00009,  0.00000,  \
				            0.07450,  0.06058,  0.05340,  0.03771,  0.02575,  0.02247,  0.01659,  0.01064,  \
				            0.00974,  0.00494,  0.00387,  0.00200,  0.00104,  0.00057,  0.00009,  0.00000 ");
			}
			ground_capacitance (capacitance_template_WxS) {
				index_1 (" 0.0700, 0.0900, 0.1400, 0.2700, 0.2800, 0.5000, 0.9000, 1.5000 ");
				index_2 (" 0.0700, 0.0900, 0.1050, 0.1575, 0.2363, 0.2700, 0.3544, 0.5000,  \
				           0.5316, 0.7973, 0.9000, 1.1960, 1.5000, 1.7940, 2.6910, 269.1035 ");
				values  ("  0.03146,  0.03484,  0.03729,  0.04478,  0.05355,  0.05657,  0.06252,  0.06935,  \
				            0.07042,  0.07598,  0.07707,  0.07920,  0.08012,  0.08067,  0.08116,  0.08124,  \
				            0.03547,  0.03883,  0.04126,  0.04874,  0.05753,  0.06058,  0.06661,  0.07358,  \
				            0.07468,  0.08043,  0.08158,  0.08379,  0.08477,  0.08534,  0.08584,  0.08593,  \
				            0.04538,  0.04869,  0.05109,  0.05851,  0.06737,  0.07047,  0.07664,  0.08389,  \
				            0.08505,  0.09117,  0.09243,  0.09485,  0.09594,  0.09657,  0.09711,  0.09722,  \
				            0.07091,  0.07417,  0.07654,  0.08393,  0.09288,  0.09605,  0.10248,  0.11020,  \
				            0.11146,  0.11827,  0.11972,  0.12254,  0.12385,  0.12459,  0.12524,  0.12537,  \
				            0.07288,  0.07613,  0.07850,  0.08589,  0.09485,  0.09802,  0.10447,  0.11222,  \
				            0.11348,  0.12034,  0.12180,  0.12464,  0.12596,  0.12671,  0.12737,  0.12750,  \
				            0.11621,  0.11946,  0.12182,  0.12924,  0.13832,  0.14157,  0.14825,  0.15644,  \
				            0.15779,  0.16531,  0.16696,  0.17019,  0.17174,  0.17261,  0.17339,  0.17355,  \
				            0.19583,  0.19909,  0.20147,  0.20895,  0.21816,  0.22149,  0.22836,  0.23691,  \
				            0.23834,  0.24639,  0.24820,  0.25176,  0.25351,  0.25448,  0.25539,  0.25554,  \
				            0.31643,  0.31970,  0.32209,  0.32961,  0.33889,  0.34226,  0.34923,  0.35793,  \
				            0.35940,  0.36769,  0.36958,  0.37328,  0.37512,  0.37614,  0.37710,  0.37726 ");
			}
		}

		capacitance () {
			top_plane: metal6;
			bottom_plane: metal1;
			lateral_capacitance (capacitance_template_WxS) {
				index_1 (" 0.0700, 0.0900, 0.1400, 0.2700, 0.2800, 0.5000, 0.9000, 1.5000 ");
				index_2 (" 0.0700, 0.0900, 0.1050, 0.1575, 0.2363, 0.2700, 0.3544, 0.5000,  \
				           0.5316, 0.7973, 0.9000, 1.1960, 1.5000, 1.7940, 2.6910, 269.1035 ");
				values  ("  0.06842,  0.05547,  0.04893,  0.03493,  0.02454,  0.02171,  0.01658,  0.01124,  \
				            0.01041,  0.00572,  0.00462,  0.00258,  0.00146,  0.00085,  0.00017,  0.00000,  \
				            0.06987,  0.05678,  0.05014,  0.03590,  0.02528,  0.02238,  0.01712,  0.01162,  \
				            0.01076,  0.00593,  0.00478,  0.00268,  0.00152,  0.00089,  0.00018,  0.00000,  \
				            0.07258,  0.05924,  0.05244,  0.03778,  0.02673,  0.02370,  0.01817,  0.01238,  \
				            0.01146,  0.00635,  0.00513,  0.00287,  0.00163,  0.00096,  0.00020,  0.00000,  \
				            0.07665,  0.06299,  0.05598,  0.04072,  0.02906,  0.02583,  0.01991,  0.01365,  \
				            0.01266,  0.00708,  0.00574,  0.00323,  0.00184,  0.00108,  0.00022,  0.00000,  \
				            0.07686,  0.06319,  0.05617,  0.04088,  0.02919,  0.02595,  0.02001,  0.01372,  \
				            0.01273,  0.00712,  0.00577,  0.00325,  0.00185,  0.00109,  0.00022,  0.00000,  \
				            0.07981,  0.06595,  0.05880,  0.04315,  0.03106,  0.02768,  0.02146,  0.01482,  \
				            0.01377,  0.00777,  0.00632,  0.00358,  0.00205,  0.00121,  0.00025,  0.00000,  \
				            0.08175,  0.06781,  0.06060,  0.04475,  0.03243,  0.02896,  0.02256,  0.01567,  \
				            0.01457,  0.00829,  0.00675,  0.00385,  0.00221,  0.00131,  0.00028,  0.00000,  \
				            0.08258,  0.06860,  0.06137,  0.04545,  0.03303,  0.02952,  0.02304,  0.01604,  \
				            0.01492,  0.00851,  0.00695,  0.00397,  0.00228,  0.00135,  0.00029,  0.00000 ");
			}
			ground_capacitance (capacitance_template_WxS) {
				index_1 (" 0.0700, 0.0900, 0.1400, 0.2700, 0.2800, 0.5000, 0.9000, 1.5000 ");
				index_2 (" 0.0700, 0.0900, 0.1050, 0.1575, 0.2363, 0.2700, 0.3544, 0.5000,  \
				           0.5316, 0.7973, 0.9000, 1.1960, 1.5000, 1.7940, 2.6910, 269.1035 ");
				values  ("  0.01493,  0.01647,  0.01758,  0.02112,  0.02571,  0.02746,  0.03140,  0.03696,  \
				            0.03799,  0.04461,  0.04638,  0.05000,  0.05209,  0.05330,  0.05461,  0.05497,  \
				            0.01641,  0.01790,  0.01898,  0.02246,  0.02705,  0.02882,  0.03283,  0.03851,  \
				            0.03957,  0.04638,  0.04820,  0.05192,  0.05410,  0.05536,  0.05671,  0.05708,  \
				            0.01989,  0.02130,  0.02234,  0.02576,  0.03040,  0.03222,  0.03635,  0.04227,  \
				            0.04339,  0.05055,  0.05249,  0.05647,  0.05880,  0.06014,  0.06158,  0.06198,  \
				            0.02868,  0.03007,  0.03109,  0.03454,  0.03932,  0.04121,  0.04557,  0.05188,  \
				            0.05306,  0.06082,  0.06294,  0.06734,  0.06993,  0.07144,  0.07307,  0.07353,  \
				            0.02937,  0.03076,  0.03178,  0.03523,  0.04002,  0.04192,  0.04628,  0.05262,  \
				            0.05380,  0.06159,  0.06373,  0.06815,  0.07076,  0.07227,  0.07391,  0.07438,  \
				            0.04487,  0.04627,  0.04731,  0.05082,  0.05573,  0.05769,  0.06222,  0.06885,  \
				            0.07011,  0.07838,  0.08068,  0.08546,  0.08832,  0.08999,  0.09181,  0.09232,  \
				            0.07414,  0.07556,  0.07661,  0.08018,  0.08518,  0.08719,  0.09185,  0.09871,  \
				            0.10001,  0.10867,  0.11109,  0.11615,  0.11921,  0.12099,  0.12309,  0.12352,  \
				            0.11910,  0.12053,  0.12159,  0.12519,  0.13025,  0.13228,  0.13700,  0.14396,  \
				            0.14529,  0.15411,  0.15659,  0.16178,  0.16492,  0.16676,  0.16892,  0.16937 ");
			}
		}

		capacitance () {
			top_plane: metal6;
			bottom_plane: poly;
			lateral_capacitance (capacitance_template_WxS) {
				index_1 (" 0.0700, 0.0900, 0.1400, 0.2700, 0.2800, 0.5000, 0.9000, 1.5000 ");
				index_2 (" 0.0700, 0.0900, 0.1050, 0.1575, 0.2363, 0.2700, 0.3544, 0.5000,  \
				           0.5316, 0.7973, 0.9000, 1.1960, 1.5000, 1.7940, 2.6910, 269.1035 ");
				values  ("  0.06954,  0.05667,  0.05019,  0.03638,  0.02621,  0.02346,  0.01846,  0.01319,  \
				            0.01234,  0.00742,  0.00617,  0.00374,  0.00227,  0.00142,  0.00034,  0.00000,  \
				            0.07109,  0.05807,  0.05150,  0.03745,  0.02706,  0.02423,  0.01909,  0.01364,  \
				            0.01277,  0.00768,  0.00638,  0.00388,  0.00235,  0.00147,  0.00036,  0.00000,  \
				            0.07404,  0.06079,  0.05405,  0.03958,  0.02874,  0.02577,  0.02035,  0.01456,  \
				            0.01363,  0.00820,  0.00683,  0.00413,  0.00251,  0.00157,  0.00038,  0.00000,  \
				            0.07875,  0.06516,  0.05820,  0.04307,  0.03155,  0.02835,  0.02246,  0.01611,  \
				            0.01509,  0.00911,  0.00759,  0.00461,  0.00280,  0.00176,  0.00043,  0.00000,  \
				            0.07901,  0.06540,  0.05843,  0.04327,  0.03170,  0.02849,  0.02258,  0.01620,  \
				            0.01517,  0.00916,  0.00764,  0.00463,  0.00282,  0.00177,  0.00043,  0.00000,  \
				            0.08262,  0.06878,  0.06165,  0.04604,  0.03397,  0.03058,  0.02432,  0.01751,  \
				            0.01641,  0.00994,  0.00830,  0.00505,  0.00308,  0.00193,  0.00047,  0.00000,  \
				            0.08490,  0.07095,  0.06374,  0.04788,  0.03551,  0.03202,  0.02553,  0.01844,  \
				            0.01729,  0.01051,  0.00878,  0.00535,  0.00327,  0.00206,  0.00051,  0.00000,  \
				            0.08577,  0.07179,  0.06455,  0.04860,  0.03613,  0.03260,  0.02602,  0.01882,  \
				            0.01765,  0.01075,  0.00899,  0.00548,  0.00335,  0.00211,  0.00053,  0.00000 ");
			}
			ground_capacitance (capacitance_template_WxS) {
				index_1 (" 0.0700, 0.0900, 0.1400, 0.2700, 0.2800, 0.5000, 0.9000, 1.5000 ");
				index_2 (" 0.0700, 0.0900, 0.1050, 0.1575, 0.2363, 0.2700, 0.3544, 0.5000,  \
				           0.5316, 0.7973, 0.9000, 1.1960, 1.5000, 1.7940, 2.6910, 269.1035 ");
				values  ("  0.01201,  0.01327,  0.01417,  0.01698,  0.02053,  0.02187,  0.02491,  0.02938,  \
				            0.03024,  0.03625,  0.03803,  0.04198,  0.04458,  0.04621,  0.04826,  0.04897,  \
				            0.01320,  0.01439,  0.01524,  0.01795,  0.02144,  0.02278,  0.02587,  0.03043,  \
				            0.03132,  0.03750,  0.03935,  0.04341,  0.04610,  0.04779,  0.04991,  0.05064,  \
				            0.01582,  0.01689,  0.01767,  0.02023,  0.02369,  0.02506,  0.02823,  0.03301,  \
				            0.03395,  0.04047,  0.04243,  0.04677,  0.04964,  0.05143,  0.05369,  0.05448,  \
				            0.02191,  0.02291,  0.02365,  0.02616,  0.02970,  0.03113,  0.03451,  0.03967,  \
				            0.04068,  0.04780,  0.04995,  0.05474,  0.05791,  0.05990,  0.06242,  0.06330,  \
				            0.02238,  0.02338,  0.02412,  0.02663,  0.03018,  0.03161,  0.03500,  0.04018,  \
				            0.04120,  0.04836,  0.05051,  0.05533,  0.05852,  0.06052,  0.06306,  0.06394,  \
				            0.03303,  0.03404,  0.03480,  0.03738,  0.04108,  0.04258,  0.04616,  0.05166,  \
				            0.05274,  0.06039,  0.06272,  0.06791,  0.07137,  0.07354,  0.07631,  0.07728,  \
				            0.05376,  0.05480,  0.05558,  0.05824,  0.06205,  0.06361,  0.06731,  0.07304,  \
				            0.07417,  0.08219,  0.08463,  0.09008,  0.09374,  0.09605,  0.09911,  0.10003,  \
				            0.08610,  0.08715,  0.08794,  0.09063,  0.09449,  0.09608,  0.09984,  0.10566,  \
				            0.10681,  0.11497,  0.11746,  0.12303,  0.12677,  0.12913,  0.13227,  0.13321 ");
			}
		}

		capacitance () {
			top_plane: metal6;
			bottom_plane: SUBSTRATE;
			lateral_capacitance (capacitance_template_WxS) {
				index_1 (" 0.0700, 0.0900, 0.1400, 0.2700, 0.2800, 0.5000, 0.9000, 1.5000 ");
				index_2 (" 0.0700, 0.0900, 0.1050, 0.1575, 0.2363, 0.2700, 0.3544, 0.5000,  \
				           0.5316, 0.7973, 0.9000, 1.1960, 1.5000, 1.7940, 2.6910, 269.1035 ");
				values  ("  0.07013,  0.05730,  0.05085,  0.03712,  0.02706,  0.02435,  0.01945,  0.01429,  \
				            0.01346,  0.00854,  0.00725,  0.00465,  0.00298,  0.00196,  0.00055,  0.00000,  \
				            0.07171,  0.05874,  0.05219,  0.03823,  0.02795,  0.02518,  0.02013,  0.01480,  \
				            0.01394,  0.00884,  0.00751,  0.00482,  0.00309,  0.00203,  0.00057,  0.00000,  \
				            0.07476,  0.06155,  0.05484,  0.04047,  0.02976,  0.02684,  0.02152,  0.01583,  \
				            0.01491,  0.00946,  0.00804,  0.00515,  0.00330,  0.00217,  0.00061,  0.00000,  \
				            0.07979,  0.06624,  0.05931,  0.04429,  0.03288,  0.02972,  0.02391,  0.01763,  \
				            0.01661,  0.01055,  0.00897,  0.00574,  0.00368,  0.00242,  0.00068,  0.00000,  \
				            0.08008,  0.06651,  0.05956,  0.04450,  0.03306,  0.02989,  0.02405,  0.01774,  \
				            0.01671,  0.01061,  0.00902,  0.00577,  0.00370,  0.00243,  0.00068,  0.00000,  \
				            0.08418,  0.07038,  0.06327,  0.04772,  0.03572,  0.03235,  0.02611,  0.01930,  \
				            0.01819,  0.01156,  0.00983,  0.00629,  0.00404,  0.00266,  0.00075,  0.00000,  \
				            0.08693,  0.07299,  0.06578,  0.04994,  0.03758,  0.03408,  0.02757,  0.02041,  \
				            0.01924,  0.01225,  0.01042,  0.00667,  0.00429,  0.00282,  0.00081,  0.00000,  \
				            0.08796,  0.07398,  0.06673,  0.05078,  0.03829,  0.03475,  0.02814,  0.02085,  \
				            0.01966,  0.01252,  0.01065,  0.00682,  0.00439,  0.00289,  0.00082,  0.00000 ");
			}
			ground_capacitance (capacitance_template_WxS) {
				index_1 (" 0.0700, 0.0900, 0.1400, 0.2700, 0.2800, 0.5000, 0.9000, 1.5000 ");
				index_2 (" 0.0700, 0.0900, 0.1050, 0.1575, 0.2363, 0.2700, 0.3544, 0.5000,  \
				           0.5316, 0.7973, 0.9000, 1.1960, 1.5000, 1.7940, 2.6910, 269.1035 ");
				values  ("  0.01052,  0.01166,  0.01248,  0.01500,  0.01812,  0.01928,  0.02188,  0.02569,  \
				            0.02644,  0.03181,  0.03349,  0.03741,  0.04022,  0.04210,  0.04476,  0.04588,  \
				            0.01161,  0.01268,  0.01343,  0.01583,  0.01886,  0.02001,  0.02262,  0.02651,  \
				            0.02728,  0.03281,  0.03455,  0.03858,  0.04148,  0.04343,  0.04618,  0.04734,  \
				            0.01393,  0.01487,  0.01554,  0.01773,  0.02066,  0.02181,  0.02447,  0.02852,  \
				            0.02934,  0.03518,  0.03703,  0.04135,  0.04444,  0.04651,  0.04944,  0.05068,  \
				            0.01894,  0.01977,  0.02038,  0.02245,  0.02537,  0.02655,  0.02937,  0.03376,  \
				            0.03464,  0.04107,  0.04311,  0.04789,  0.05132,  0.05362,  0.05688,  0.05827,  \
				            0.01931,  0.02014,  0.02075,  0.02282,  0.02574,  0.02693,  0.02976,  0.03417,  \
				            0.03505,  0.04152,  0.04357,  0.04838,  0.05182,  0.05413,  0.05742,  0.05881,  \
				            0.02772,  0.02855,  0.02917,  0.03128,  0.03433,  0.03559,  0.03859,  0.04333,  \
				            0.04428,  0.05126,  0.05349,  0.05870,  0.06245,  0.06496,  0.06855,  0.07007,  \
				            0.04434,  0.04519,  0.04583,  0.04803,  0.05121,  0.05253,  0.05569,  0.06068,  \
				            0.06168,  0.06905,  0.07141,  0.07691,  0.08088,  0.08354,  0.08745,  0.08896,  \
				            0.07072,  0.07159,  0.07224,  0.07448,  0.07772,  0.07906,  0.08228,  0.08738,  \
				            0.08840,  0.09592,  0.09833,  0.10395,  0.10801,  0.11072,  0.11472,  0.11627 ");
			}
		}

		capacitance () {
			top_plane: metal7;
			bottom_plane: metal2;
			lateral_capacitance (capacitance_template_WxS) {
				index_1 (" 0.0700, 0.0900, 0.1400, 0.2700, 0.2800, 0.5000, 0.9000, 1.5000 ");
				index_2 (" 0.0700, 0.0900, 0.1050, 0.1575, 0.2363, 0.2700, 0.3544, 0.5000,  \
				           0.5316, 0.7973, 0.9000, 1.1960, 1.5000, 1.7940, 2.6910, 269.1035 ");
				values  ("  0.06347,  0.05024,  0.04352,  0.02916,  0.01869,  0.01595,  0.01121,  0.00679,  \
				            0.00616,  0.00302,  0.00238,  0.00129,  0.00073,  0.00044,  0.00011,  0.00000,  \
				            0.06448,  0.05115,  0.04437,  0.02984,  0.01923,  0.01645,  0.01162,  0.00709,  \
				            0.00644,  0.00318,  0.00251,  0.00137,  0.00078,  0.00047,  0.00011,  0.00000,  \
				            0.06633,  0.05284,  0.04597,  0.03120,  0.02034,  0.01747,  0.01247,  0.00772,  \
				            0.00703,  0.00354,  0.00280,  0.00154,  0.00088,  0.00054,  0.00013,  0.00000,  \
				            0.06935,  0.05569,  0.04870,  0.03360,  0.02238,  0.01938,  0.01409,  0.00895,  \
				            0.00820,  0.00426,  0.00341,  0.00191,  0.00111,  0.00068,  0.00017,  0.00000,  \
				            0.06953,  0.05586,  0.04886,  0.03375,  0.02250,  0.01950,  0.01419,  0.00903,  \
				            0.00827,  0.00431,  0.00345,  0.00193,  0.00113,  0.00069,  0.00017,  0.00000,  \
				            0.07238,  0.05859,  0.05151,  0.03615,  0.02460,  0.02147,  0.01591,  0.01039,  \
				            0.00956,  0.00515,  0.00416,  0.00238,  0.00140,  0.00087,  0.00022,  0.00000,  \
				            0.07496,  0.06110,  0.05396,  0.03841,  0.02661,  0.02338,  0.01761,  0.01175,  \
				            0.01086,  0.00603,  0.00492,  0.00286,  0.00171,  0.00107,  0.00027,  0.00000,  \
				            0.07654,  0.06263,  0.05546,  0.03980,  0.02786,  0.02458,  0.01867,  0.01262,  \
				            0.01170,  0.00660,  0.00541,  0.00318,  0.00192,  0.00120,  0.00031,  0.00000 ");
			}
			ground_capacitance (capacitance_template_WxS) {
				index_1 (" 0.0700, 0.0900, 0.1400, 0.2700, 0.2800, 0.5000, 0.9000, 1.5000 ");
				index_2 (" 0.0700, 0.0900, 0.1050, 0.1575, 0.2363, 0.2700, 0.3544, 0.5000,  \
				           0.5316, 0.7973, 0.9000, 1.1960, 1.5000, 1.7940, 2.6910, 269.1035 ");
				values  ("  0.03097,  0.03432,  0.03675,  0.04417,  0.05285,  0.05583,  0.06167,  0.06835,  \
				            0.06940,  0.07488,  0.07597,  0.07816,  0.07919,  0.07983,  0.08053,  0.08075,  \
				            0.03496,  0.03829,  0.04070,  0.04810,  0.05677,  0.05977,  0.06568,  0.07249,  \
				            0.07356,  0.07923,  0.08038,  0.08266,  0.08375,  0.08443,  0.08516,  0.08539,  \
				            0.04480,  0.04808,  0.05044,  0.05776,  0.06644,  0.06947,  0.07550,  0.08255,  \
				            0.08369,  0.08972,  0.09098,  0.09349,  0.09472,  0.09547,  0.09629,  0.09655,  \
				            0.06997,  0.07316,  0.07548,  0.08270,  0.09139,  0.09447,  0.10070,  0.10819,  \
				            0.10942,  0.11615,  0.11762,  0.12057,  0.12208,  0.12299,  0.12401,  0.12436,  \
				            0.07190,  0.07508,  0.07740,  0.08461,  0.09331,  0.09639,  0.10264,  0.11016,  \
				            0.11139,  0.11816,  0.11964,  0.12262,  0.12415,  0.12507,  0.12611,  0.12646,  \
				            0.11420,  0.11735,  0.11965,  0.12683,  0.13560,  0.13874,  0.14519,  0.15312,  \
				            0.15445,  0.16192,  0.16363,  0.16711,  0.16895,  0.17008,  0.17137,  0.17182,  \
				            0.19147,  0.19462,  0.19692,  0.20412,  0.21299,  0.21619,  0.22283,  0.23116,  \
				            0.23257,  0.24073,  0.24266,  0.24663,  0.24882,  0.25016,  0.25177,  0.25229,  \
				            0.30833,  0.31149,  0.31380,  0.32104,  0.32999,  0.33324,  0.34001,  0.34859,  \
				            0.35005,  0.35863,  0.36071,  0.36499,  0.36740,  0.36889,  0.37069,  0.37128 ");
			}
		}

		capacitance () {
			top_plane: metal7;
			bottom_plane: metal1;
			lateral_capacitance (capacitance_template_WxS) {
				index_1 (" 0.0700, 0.0900, 0.1400, 0.2700, 0.2800, 0.5000, 0.9000, 1.5000 ");
				index_2 (" 0.0700, 0.0900, 0.1050, 0.1575, 0.2363, 0.2700, 0.3544, 0.5000,  \
				           0.5316, 0.7973, 0.9000, 1.1960, 1.5000, 1.7940, 2.6910, 269.1035 ");
				values  ("  0.06870,  0.05576,  0.04923,  0.03526,  0.02489,  0.02207,  0.01698,  0.01172,  \
				            0.01090,  0.00628,  0.00518,  0.00311,  0.00191,  0.00123,  0.00035,  0.00000,  \
				            0.07016,  0.05708,  0.05045,  0.03623,  0.02565,  0.02277,  0.01755,  0.01213,  \
				            0.01128,  0.00652,  0.00538,  0.00325,  0.00200,  0.00129,  0.00036,  0.00000,  \
				            0.07288,  0.05956,  0.05277,  0.03814,  0.02715,  0.02414,  0.01867,  0.01296,  \
				            0.01207,  0.00702,  0.00581,  0.00351,  0.00217,  0.00140,  0.00040,  0.00000,  \
				            0.07707,  0.06343,  0.05643,  0.04123,  0.02966,  0.02646,  0.02061,  0.01445,  \
				            0.01348,  0.00795,  0.00661,  0.00403,  0.00251,  0.00163,  0.00046,  0.00000,  \
				            0.07730,  0.06364,  0.05664,  0.04141,  0.02980,  0.02659,  0.02073,  0.01454,  \
				            0.01356,  0.00801,  0.00666,  0.00406,  0.00253,  0.00165,  0.00047,  0.00000,  \
				            0.08057,  0.06674,  0.05961,  0.04403,  0.03203,  0.02868,  0.02254,  0.01598,  \
				            0.01494,  0.00896,  0.00749,  0.00462,  0.00291,  0.00190,  0.00055,  0.00000,  \
				            0.08315,  0.06923,  0.06203,  0.04624,  0.03399,  0.03055,  0.02419,  0.01734,  \
				            0.01625,  0.00989,  0.00830,  0.00518,  0.00329,  0.00216,  0.00064,  0.00000,  \
				            0.08466,  0.07069,  0.06346,  0.04757,  0.03518,  0.03168,  0.02521,  0.01819,  \
				            0.01706,  0.01047,  0.00881,  0.00553,  0.00353,  0.00232,  0.00069,  0.00000 ");
			}
			ground_capacitance (capacitance_template_WxS) {
				index_1 (" 0.0700, 0.0900, 0.1400, 0.2700, 0.2800, 0.5000, 0.9000, 1.5000 ");
				index_2 (" 0.0700, 0.0900, 0.1050, 0.1575, 0.2363, 0.2700, 0.3544, 0.5000,  \
				           0.5316, 0.7973, 0.9000, 1.1960, 1.5000, 1.7940, 2.6910, 269.1035 ");
				values  ("  0.01421,  0.01572,  0.01681,  0.02028,  0.02476,  0.02646,  0.03025,  0.03554,  \
				            0.03652,  0.04282,  0.04452,  0.04809,  0.05027,  0.05161,  0.05330,  0.05400,  \
				            0.01568,  0.01714,  0.01819,  0.02160,  0.02606,  0.02777,  0.03160,  0.03699,  \
				            0.03799,  0.04446,  0.04622,  0.04989,  0.05216,  0.05355,  0.05531,  0.05605,  \
				            0.01911,  0.02048,  0.02149,  0.02480,  0.02925,  0.03099,  0.03490,  0.04050,  \
				            0.04154,  0.04834,  0.05021,  0.05414,  0.05657,  0.05806,  0.05997,  0.06078,  \
				            0.02757,  0.02889,  0.02986,  0.03313,  0.03762,  0.03940,  0.04348,  0.04938,  \
				            0.05050,  0.05784,  0.05989,  0.06425,  0.06700,  0.06870,  0.07091,  0.07186,  \
				            0.02822,  0.02954,  0.03051,  0.03378,  0.03828,  0.04006,  0.04414,  0.05006,  \
				            0.05118,  0.05855,  0.06061,  0.06501,  0.06777,  0.06949,  0.07171,  0.07268,  \
				            0.04270,  0.04401,  0.04497,  0.04824,  0.05280,  0.05462,  0.05883,  0.06500,  \
				            0.06617,  0.07403,  0.07627,  0.08109,  0.08418,  0.08612,  0.08868,  0.08980,  \
				            0.06965,  0.07096,  0.07193,  0.07522,  0.07983,  0.08169,  0.08600,  0.09239,  \
				            0.09362,  0.10192,  0.10432,  0.10955,  0.11296,  0.11512,  0.11814,  0.11931,  \
				            0.11094,  0.11225,  0.11323,  0.11655,  0.12122,  0.12311,  0.12749,  0.13404,  \
				            0.13530,  0.14388,  0.14638,  0.15186,  0.15547,  0.15777,  0.16102,  0.16230 ");
			}
		}

		capacitance () {
			top_plane: metal7;
			bottom_plane: poly;
			lateral_capacitance (capacitance_template_WxS) {
				index_1 (" 0.0700, 0.0900, 0.1400, 0.2700, 0.2800, 0.5000, 0.9000, 1.5000 ");
				index_2 (" 0.0700, 0.0900, 0.1050, 0.1575, 0.2363, 0.2700, 0.3544, 0.5000,  \
				           0.5316, 0.7973, 0.9000, 1.1960, 1.5000, 1.7940, 2.6910, 269.1035 ");
				values  ("  0.06988,  0.05703,  0.05056,  0.03677,  0.02663,  0.02389,  0.01893,  0.01373,  \
				            0.01291,  0.00807,  0.00684,  0.00440,  0.00287,  0.00193,  0.00061,  0.00000,  \
				            0.07144,  0.05844,  0.05187,  0.03784,  0.02749,  0.02468,  0.01958,  0.01422,  \
				            0.01337,  0.00837,  0.00709,  0.00458,  0.00299,  0.00201,  0.00064,  0.00000,  \
				            0.07441,  0.06117,  0.05444,  0.04000,  0.02922,  0.02627,  0.02091,  0.01522,  \
				            0.01430,  0.00899,  0.00762,  0.00491,  0.00321,  0.00217,  0.00069,  0.00000,  \
				            0.07922,  0.06565,  0.05870,  0.04363,  0.03219,  0.02903,  0.02321,  0.01698,  \
				            0.01598,  0.01010,  0.00859,  0.00556,  0.00365,  0.00247,  0.00079,  0.00000,  \
				            0.07949,  0.06591,  0.05894,  0.04384,  0.03236,  0.02918,  0.02335,  0.01709,  \
				            0.01608,  0.01017,  0.00865,  0.00560,  0.00368,  0.00249,  0.00079,  0.00000,  \
				            0.08342,  0.06962,  0.06250,  0.04696,  0.03498,  0.03163,  0.02544,  0.01873,  \
				            0.01765,  0.01125,  0.00960,  0.00625,  0.00413,  0.00281,  0.00090,  0.00000,  \
				            0.08633,  0.07240,  0.06521,  0.04940,  0.03711,  0.03364,  0.02721,  0.02017,  \
				            0.01903,  0.01223,  0.01047,  0.00686,  0.00456,  0.00311,  0.00102,  0.00000,  \
				            0.08786,  0.07389,  0.06666,  0.05074,  0.03830,  0.03478,  0.02822,  0.02101,  \
				            0.01984,  0.01282,  0.01099,  0.00723,  0.00481,  0.00329,  0.00108,  0.00000 ");
			}
			ground_capacitance (capacitance_template_WxS) {
				index_1 (" 0.0700, 0.0900, 0.1400, 0.2700, 0.2800, 0.5000, 0.9000, 1.5000 ");
				index_2 (" 0.0700, 0.0900, 0.1050, 0.1575, 0.2363, 0.2700, 0.3544, 0.5000,  \
				           0.5316, 0.7973, 0.9000, 1.1960, 1.5000, 1.7940, 2.6910, 269.1035 ");
				values  ("  0.01117,  0.01238,  0.01325,  0.01597,  0.01941,  0.02071,  0.02360,  0.02778,  \
				            0.02858,  0.03416,  0.03583,  0.03962,  0.04224,  0.04397,  0.04646,  0.04770,  \
				            0.01233,  0.01347,  0.01430,  0.01692,  0.02028,  0.02157,  0.02448,  0.02873,  \
				            0.02955,  0.03529,  0.03702,  0.04090,  0.04361,  0.04541,  0.04800,  0.04929,  \
				            0.01489,  0.01592,  0.01667,  0.01912,  0.02240,  0.02369,  0.02664,  0.03104,  \
				            0.03191,  0.03794,  0.03978,  0.04394,  0.04683,  0.04875,  0.05152,  0.05292,  \
				            0.02069,  0.02162,  0.02231,  0.02464,  0.02789,  0.02920,  0.03229,  0.03699,  \
				            0.03791,  0.04447,  0.04649,  0.05109,  0.05432,  0.05647,  0.05962,  0.06122,  \
				            0.02112,  0.02205,  0.02274,  0.02506,  0.02832,  0.02963,  0.03273,  0.03745,  \
				            0.03837,  0.04497,  0.04699,  0.05162,  0.05487,  0.05704,  0.06021,  0.06182,  \
				            0.03077,  0.03169,  0.03238,  0.03472,  0.03805,  0.03942,  0.04264,  0.04762,  \
				            0.04861,  0.05566,  0.05786,  0.06290,  0.06647,  0.06887,  0.07244,  0.07427,  \
				            0.04920,  0.05014,  0.05083,  0.05321,  0.05663,  0.05803,  0.06136,  0.06655,  \
				            0.06759,  0.07504,  0.07737,  0.08278,  0.08665,  0.08927,  0.09331,  0.09525,  \
				            0.07790,  0.07884,  0.07955,  0.08196,  0.08543,  0.08685,  0.09025,  0.09557,  \
				            0.09663,  0.10432,  0.10674,  0.11237,  0.11642,  0.11917,  0.12344,  0.12550 ");
			}
		}

		capacitance () {
			top_plane: metal7;
			bottom_plane: SUBSTRATE;
			lateral_capacitance (capacitance_template_WxS) {
				index_1 (" 0.0700, 0.0900, 0.1400, 0.2700, 0.2800, 0.5000, 0.9000, 1.5000 ");
				index_2 (" 0.0700, 0.0900, 0.1050, 0.1575, 0.2363, 0.2700, 0.3544, 0.5000,  \
				           0.5316, 0.7973, 0.9000, 1.1960, 1.5000, 1.7940, 2.6910, 269.1035 ");
				values  ("  0.07051,  0.05770,  0.05126,  0.03756,  0.02753,  0.02484,  0.01997,  0.01489,  \
				            0.01408,  0.00926,  0.00800,  0.00541,  0.00369,  0.00259,  0.00090,  0.00000,  \
				            0.07211,  0.05915,  0.05261,  0.03867,  0.02844,  0.02567,  0.02068,  0.01543,  \
				            0.01459,  0.00960,  0.00829,  0.00562,  0.00384,  0.00269,  0.00094,  0.00000,  \
				            0.07518,  0.06198,  0.05528,  0.04094,  0.03029,  0.02739,  0.02213,  0.01654,  \
				            0.01564,  0.01031,  0.00891,  0.00603,  0.00411,  0.00289,  0.00101,  0.00000,  \
				            0.08030,  0.06678,  0.05986,  0.04489,  0.03357,  0.03044,  0.02471,  0.01855,  \
				            0.01755,  0.01161,  0.01004,  0.00680,  0.00466,  0.00327,  0.00115,  0.00000,  \
				            0.08060,  0.06705,  0.06012,  0.04512,  0.03376,  0.03062,  0.02487,  0.01867,  \
				            0.01767,  0.01169,  0.01011,  0.00685,  0.00469,  0.00329,  0.00116,  0.00000,  \
				            0.08502,  0.07124,  0.06415,  0.04867,  0.03676,  0.03343,  0.02727,  0.02057,  \
				            0.01948,  0.01294,  0.01121,  0.00761,  0.00523,  0.00368,  0.00130,  0.00000,  \
				            0.08838,  0.07446,  0.06727,  0.05148,  0.03919,  0.03573,  0.02928,  0.02218,  \
				            0.02102,  0.01404,  0.01218,  0.00830,  0.00572,  0.00403,  0.00144,  0.00000,  \
				            0.09007,  0.07609,  0.06886,  0.05293,  0.04048,  0.03694,  0.03036,  0.02307,  \
				            0.02188,  0.01465,  0.01273,  0.00869,  0.00600,  0.00424,  0.00152,  0.00000 ");
			}
			ground_capacitance (capacitance_template_WxS) {
				index_1 (" 0.0700, 0.0900, 0.1400, 0.2700, 0.2800, 0.5000, 0.9000, 1.5000 ");
				index_2 (" 0.0700, 0.0900, 0.1050, 0.1575, 0.2363, 0.2700, 0.3544, 0.5000,  \
				           0.5316, 0.7973, 0.9000, 1.1960, 1.5000, 1.7940, 2.6910, 269.1035 ");
				values  ("  0.00958,  0.01066,  0.01144,  0.01386,  0.01686,  0.01797,  0.02043,  0.02395,  \
				            0.02464,  0.02953,  0.03107,  0.03475,  0.03750,  0.03944,  0.04254,  0.04436,  \
				            0.01063,  0.01164,  0.01237,  0.01467,  0.01757,  0.01866,  0.02111,  0.02468,  \
				            0.02537,  0.03040,  0.03200,  0.03577,  0.03861,  0.04063,  0.04384,  0.04573,  \
				            0.01288,  0.01378,  0.01442,  0.01650,  0.01925,  0.02031,  0.02275,  0.02643,  \
				            0.02716,  0.03245,  0.03415,  0.03819,  0.04123,  0.04337,  0.04680,  0.04884,  \
				            0.01761,  0.01838,  0.01894,  0.02082,  0.02346,  0.02452,  0.02704,  0.03096,  \
				            0.03174,  0.03753,  0.03940,  0.04389,  0.04727,  0.04967,  0.05355,  0.05586,  \
				            0.01795,  0.01871,  0.01927,  0.02115,  0.02379,  0.02485,  0.02738,  0.03131,  \
				            0.03210,  0.03791,  0.03980,  0.04431,  0.04771,  0.05013,  0.05403,  0.05636,  \
				            0.02539,  0.02612,  0.02667,  0.02854,  0.03123,  0.03234,  0.03499,  0.03918,  \
				            0.04003,  0.04631,  0.04836,  0.05330,  0.05704,  0.05971,  0.06405,  0.06666,  \
				            0.03973,  0.04048,  0.04104,  0.04296,  0.04574,  0.04689,  0.04967,  0.05409,  \
				            0.05498,  0.06167,  0.06387,  0.06916,  0.07321,  0.07610,  0.08094,  0.08372,  \
				            0.06249,  0.06325,  0.06382,  0.06578,  0.06863,  0.06981,  0.07265,  0.07720,  \
				            0.07812,  0.08504,  0.08731,  0.09281,  0.09703,  0.10005,  0.10512,  0.10806 ");
			}
		}

		capacitance () {
			top_plane: AIR;
			bottom_plane: metal2;
			lateral_capacitance (capacitance_template_WxS) {
				index_1 (" 0.0700, 0.0900, 0.1400, 0.2700, 0.2800, 0.5000, 0.9000, 1.5000 ");
				index_2 (" 0.0700, 0.0900, 0.1050, 0.1575, 0.2363, 0.2700, 0.3544, 0.5000,  \
				           0.5316, 0.7973, 0.9000, 1.1960, 1.5000, 1.7940, 2.6910, 269.1035 ");
				values  ("  0.06394,  0.05072,  0.04403,  0.02969,  0.01925,  0.01651,  0.01177,  0.00735,  \
				            0.00672,  0.00355,  0.00289,  0.00177,  0.00117,  0.00084,  0.00039,  0.00000,  \
				            0.06497,  0.05165,  0.04488,  0.03039,  0.01981,  0.01703,  0.01221,  0.00768,  \
				            0.00703,  0.00375,  0.00306,  0.00189,  0.00126,  0.00091,  0.00042,  0.00000,  \
				            0.06685,  0.05338,  0.04652,  0.03178,  0.02097,  0.01811,  0.01313,  0.00840,  \
				            0.00771,  0.00421,  0.00346,  0.00216,  0.00145,  0.00105,  0.00050,  0.00000,  \
				            0.06998,  0.05635,  0.04938,  0.03433,  0.02318,  0.02020,  0.01497,  0.00988,  \
				            0.00913,  0.00521,  0.00435,  0.00279,  0.00193,  0.00142,  0.00069,  0.00000,  \
				            0.07018,  0.05653,  0.04955,  0.03449,  0.02332,  0.02034,  0.01509,  0.00998,  \
				            0.00923,  0.00528,  0.00441,  0.00284,  0.00196,  0.00145,  0.00071,  0.00000,  \
				            0.07338,  0.05962,  0.05257,  0.03728,  0.02584,  0.02275,  0.01727,  0.01183,  \
				            0.01101,  0.00663,  0.00562,  0.00376,  0.00267,  0.00202,  0.00103,  0.00000,  \
				            0.07689,  0.06306,  0.05596,  0.04050,  0.02884,  0.02566,  0.01998,  0.01422,  \
				            0.01335,  0.00850,  0.00735,  0.00515,  0.00380,  0.00296,  0.00162,  0.00000,  \
				            0.08013,  0.06626,  0.05913,  0.04357,  0.03177,  0.02853,  0.02271,  0.01672,  \
				            0.01580,  0.01059,  0.00932,  0.00681,  0.00522,  0.00418,  0.00245,  0.00000 ");
			}
			ground_capacitance (capacitance_template_WxS) {
				index_1 (" 0.0700, 0.0900, 0.1400, 0.2700, 0.2800, 0.5000, 0.9000, 1.5000 ");
				index_2 (" 0.0700, 0.0900, 0.1050, 0.1575, 0.2363, 0.2700, 0.3544, 0.5000,  \
				           0.5316, 0.7973, 0.9000, 1.1960, 1.5000, 1.7940, 2.6910, 269.1035 ");
				values  ("  0.02977,  0.03305,  0.03543,  0.04274,  0.05130,  0.05425,  0.06005,  0.06672,  \
				            0.06778,  0.07329,  0.07441,  0.07666,  0.07777,  0.07849,  0.07942,  0.08021,  \
				            0.03372,  0.03699,  0.03935,  0.04662,  0.05517,  0.05813,  0.06399,  0.07075,  \
				            0.07183,  0.07751,  0.07868,  0.08102,  0.08220,  0.08296,  0.08394,  0.08480,  \
				            0.04345,  0.04666,  0.04898,  0.05616,  0.06469,  0.06766,  0.07359,  0.08055,  \
				            0.08167,  0.08768,  0.08895,  0.09153,  0.09285,  0.09370,  0.09481,  0.09582,  \
				            0.06826,  0.07138,  0.07364,  0.08067,  0.08912,  0.09211,  0.09815,  0.10543,  \
				            0.10662,  0.11323,  0.11470,  0.11771,  0.11934,  0.12039,  0.12184,  0.12324,  \
				            0.07015,  0.07327,  0.07553,  0.08255,  0.09099,  0.09398,  0.10003,  0.10733,  \
				            0.10853,  0.11517,  0.11665,  0.11969,  0.12134,  0.12241,  0.12387,  0.12531,  \
				            0.11143,  0.11448,  0.11670,  0.12361,  0.13201,  0.13501,  0.14116,  0.14875,  \
				            0.15002,  0.15726,  0.15896,  0.16251,  0.16454,  0.16587,  0.16781,  0.16990,  \
				            0.18584,  0.18884,  0.19103,  0.19786,  0.20622,  0.20923,  0.21547,  0.22333,  \
				            0.22466,  0.23254,  0.23447,  0.23859,  0.24109,  0.24278,  0.24542,  0.24865,  \
				            0.29695,  0.29993,  0.30210,  0.30889,  0.31722,  0.32024,  0.32653,  0.33458,  \
				            0.33597,  0.34432,  0.34644,  0.35107,  0.35401,  0.35604,  0.35943,  0.36431 ");
			}
		}

		capacitance () {
			top_plane: AIR;
			bottom_plane: metal1;
			lateral_capacitance (capacitance_template_WxS) {
				index_1 (" 0.0700, 0.0900, 0.1400, 0.2700, 0.2800, 0.5000, 0.9000, 1.5000 ");
				index_2 (" 0.0700, 0.0900, 0.1050, 0.1575, 0.2363, 0.2700, 0.3544, 0.5000,  \
				           0.5316, 0.7973, 0.9000, 1.1960, 1.5000, 1.7940, 2.6910, 269.1035 ");
				values  ("  0.06943,  0.05652,  0.05001,  0.03608,  0.02576,  0.02296,  0.01789,  0.01265,  \
				            0.01183,  0.00725,  0.00615,  0.00408,  0.00285,  0.00211,  0.00102,  0.00000,  \
				            0.07091,  0.05785,  0.05124,  0.03707,  0.02653,  0.02367,  0.01847,  0.01309,  \
				            0.01226,  0.00754,  0.00641,  0.00428,  0.00299,  0.00222,  0.00108,  0.00000,  \
				            0.07367,  0.06036,  0.05359,  0.03901,  0.02807,  0.02508,  0.01966,  0.01402,  \
				            0.01314,  0.00817,  0.00697,  0.00467,  0.00330,  0.00246,  0.00121,  0.00000,  \
				            0.07796,  0.06434,  0.05737,  0.04223,  0.03074,  0.02758,  0.02181,  0.01577,  \
				            0.01482,  0.00942,  0.00810,  0.00554,  0.00397,  0.00301,  0.00152,  0.00000,  \
				            0.07820,  0.06457,  0.05758,  0.04241,  0.03090,  0.02773,  0.02194,  0.01588,  \
				            0.01492,  0.00950,  0.00817,  0.00560,  0.00402,  0.00305,  0.00155,  0.00000,  \
				            0.08181,  0.06801,  0.06091,  0.04541,  0.03354,  0.03025,  0.02422,  0.01783,  \
				            0.01682,  0.01102,  0.00957,  0.00672,  0.00493,  0.00381,  0.00201,  0.00000,  \
				            0.08533,  0.07145,  0.06429,  0.04861,  0.03651,  0.03313,  0.02691,  0.02026,  \
				            0.01920,  0.01302,  0.01145,  0.00830,  0.00626,  0.00495,  0.00277,  0.00000,  \
				            0.08851,  0.07458,  0.06739,  0.05161,  0.03937,  0.03594,  0.02960,  0.02275,  \
				            0.02165,  0.01518,  0.01351,  0.01010,  0.00784,  0.00634,  0.00377,  0.00000 ");
			}
			ground_capacitance (capacitance_template_WxS) {
				index_1 (" 0.0700, 0.0900, 0.1400, 0.2700, 0.2800, 0.5000, 0.9000, 1.5000 ");
				index_2 (" 0.0700, 0.0900, 0.1050, 0.1575, 0.2363, 0.2700, 0.3544, 0.5000,  \
				           0.5316, 0.7973, 0.9000, 1.1960, 1.5000, 1.7940, 2.6910, 269.1035 ");
				values  ("  0.01241,  0.01381,  0.01483,  0.01812,  0.02243,  0.02408,  0.02777,  0.03291,  \
				            0.03386,  0.03996,  0.04160,  0.04508,  0.04727,  0.04868,  0.05073,  0.05278,  \
				            0.01382,  0.01518,  0.01617,  0.01941,  0.02369,  0.02534,  0.02904,  0.03425,  \
				            0.03522,  0.04143,  0.04313,  0.04669,  0.04896,  0.05042,  0.05257,  0.05474,  \
				            0.01713,  0.01843,  0.01938,  0.02252,  0.02677,  0.02842,  0.03216,  0.03748,  \
				            0.03848,  0.04492,  0.04670,  0.05049,  0.05291,  0.05448,  0.05681,  0.05925,  \
				            0.02528,  0.02652,  0.02743,  0.03048,  0.03468,  0.03634,  0.04012,  0.04558,  \
				            0.04661,  0.05341,  0.05532,  0.05947,  0.06218,  0.06398,  0.06672,  0.06976,  \
				            0.02590,  0.02713,  0.02804,  0.03109,  0.03529,  0.03694,  0.04073,  0.04620,  \
				            0.04723,  0.05404,  0.05596,  0.06013,  0.06286,  0.06467,  0.06744,  0.07053,  \
				            0.03938,  0.04057,  0.04146,  0.04443,  0.04856,  0.05020,  0.05398,  0.05953,  \
				            0.06058,  0.06767,  0.06972,  0.07423,  0.07728,  0.07934,  0.08264,  0.08664,  \
				            0.06345,  0.06460,  0.06546,  0.06836,  0.07240,  0.07402,  0.07777,  0.08335,  \
				            0.08442,  0.09176,  0.09393,  0.09880,  0.10221,  0.10458,  0.10865,  0.11401,  \
				            0.09900,  0.10013,  0.10097,  0.10380,  0.10778,  0.10939,  0.11312,  0.11872,  \
				            0.11980,  0.12732,  0.12959,  0.13476,  0.13849,  0.14113,  0.14589,  0.15318 ");
			}
		}

		capacitance () {
			top_plane: AIR;
			bottom_plane: poly;
			lateral_capacitance (capacitance_template_WxS) {
				index_1 (" 0.0700, 0.0900, 0.1400, 0.2700, 0.2800, 0.5000, 0.9000, 1.5000 ");
				index_2 (" 0.0700, 0.0900, 0.1050, 0.1575, 0.2363, 0.2700, 0.3544, 0.5000,  \
				           0.5316, 0.7973, 0.9000, 1.1960, 1.5000, 1.7940, 2.6910, 269.1035 ");
				values  ("  0.07075,  0.05795,  0.05151,  0.03780,  0.02772,  0.02500,  0.02006,  0.01489,  \
				            0.01407,  0.00930,  0.00809,  0.00569,  0.00414,  0.00316,  0.00161,  0.00000,  \
				            0.07235,  0.05939,  0.05285,  0.03889,  0.02859,  0.02580,  0.02073,  0.01542,  \
				            0.01457,  0.00966,  0.00840,  0.00593,  0.00433,  0.00331,  0.00169,  0.00000,  \
				            0.07538,  0.06217,  0.05546,  0.04108,  0.03036,  0.02743,  0.02212,  0.01651,  \
				            0.01561,  0.01041,  0.00908,  0.00642,  0.00471,  0.00362,  0.00187,  0.00000,  \
				            0.08030,  0.06676,  0.05983,  0.04482,  0.03347,  0.03034,  0.02462,  0.01852,  \
				            0.01755,  0.01185,  0.01039,  0.00744,  0.00553,  0.00429,  0.00227,  0.00000,  \
				            0.08058,  0.06702,  0.06008,  0.04504,  0.03366,  0.03052,  0.02477,  0.01865,  \
				            0.01767,  0.01195,  0.01048,  0.00751,  0.00558,  0.00433,  0.00230,  0.00000,  \
				            0.08483,  0.07106,  0.06397,  0.04852,  0.03668,  0.03338,  0.02732,  0.02081,  \
				            0.01976,  0.01361,  0.01202,  0.00876,  0.00662,  0.00521,  0.00286,  0.00000,  \
				            0.08867,  0.07479,  0.06763,  0.05194,  0.03980,  0.03640,  0.03012,  0.02331,  \
				            0.02221,  0.01568,  0.01397,  0.01043,  0.00805,  0.00646,  0.00373,  0.00000,  \
				            0.09187,  0.07794,  0.07074,  0.05494,  0.04266,  0.03921,  0.03280,  0.02580,  \
				            0.02466,  0.01786,  0.01606,  0.01228,  0.00970,  0.00794,  0.00482,  0.00000 ");
			}
			ground_capacitance (capacitance_template_WxS) {
				index_1 (" 0.0700, 0.0900, 0.1400, 0.2700, 0.2800, 0.5000, 0.9000, 1.5000 ");
				index_2 (" 0.0700, 0.0900, 0.1050, 0.1575, 0.2363, 0.2700, 0.3544, 0.5000,  \
				           0.5316, 0.7973, 0.9000, 1.1960, 1.5000, 1.7940, 2.6910, 269.1035 ");
				values  ("  0.00900,  0.01006,  0.01083,  0.01330,  0.01652,  0.01775,  0.02053,  0.02453,  \
				            0.02530,  0.03057,  0.03213,  0.03568,  0.03819,  0.03992,  0.04274,  0.04593,  \
				            0.01006,  0.01108,  0.01181,  0.01421,  0.01736,  0.01858,  0.02135,  0.02539,  \
				            0.02616,  0.03152,  0.03313,  0.03675,  0.03934,  0.04113,  0.04405,  0.04740,  \
				            0.01246,  0.01339,  0.01408,  0.01633,  0.01939,  0.02059,  0.02334,  0.02744,  \
				            0.02824,  0.03377,  0.03546,  0.03929,  0.04203,  0.04392,  0.04706,  0.05075,  \
				            0.01794,  0.01879,  0.01942,  0.02153,  0.02447,  0.02566,  0.02843,  0.03262,  \
				            0.03344,  0.03926,  0.04105,  0.04520,  0.04821,  0.05033,  0.05391,  0.05837,  \
				            0.01835,  0.01919,  0.01982,  0.02192,  0.02486,  0.02604,  0.02882,  0.03302,  \
				            0.03384,  0.03967,  0.04147,  0.04564,  0.04866,  0.05079,  0.05440,  0.05891,  \
				            0.02705,  0.02786,  0.02846,  0.03050,  0.03339,  0.03456,  0.03733,  0.04159,  \
				            0.04243,  0.04847,  0.05037,  0.05481,  0.05810,  0.06046,  0.06458,  0.07016,  \
				            0.04263,  0.04341,  0.04399,  0.04596,  0.04879,  0.04994,  0.05268,  0.05695,  \
				            0.05780,  0.06398,  0.06595,  0.07064,  0.07421,  0.07681,  0.08164,  0.08877,  \
				            0.06560,  0.06636,  0.06692,  0.06884,  0.07160,  0.07274,  0.07544,  0.07969,  \
				            0.08054,  0.08680,  0.08882,  0.09371,  0.09749,  0.10032,  0.10575,  0.11493 ");
			}
		}

		capacitance () {
			top_plane: AIR;
			bottom_plane: SUBSTRATE;
			lateral_capacitance (capacitance_template_WxS) {
				index_1 (" 0.0700, 0.0900, 0.1400, 0.2700, 0.2800, 0.5000, 0.9000, 1.5000 ");
				index_2 (" 0.0700, 0.0900, 0.1050, 0.1575, 0.2363, 0.2700, 0.3544, 0.5000,  \
				           0.5316, 0.7973, 0.9000, 1.1960, 1.5000, 1.7940, 2.6910, 269.1035 ");
				values  ("  0.07149,  0.05874,  0.05234,  0.03876,  0.02881,  0.02614,  0.02131,  0.01626,  \
				            0.01545,  0.01071,  0.00948,  0.00695,  0.00524,  0.00411,  0.00221,  0.00000,  \
				            0.07314,  0.06024,  0.05374,  0.03989,  0.02974,  0.02700,  0.02203,  0.01683,  \
				            0.01600,  0.01111,  0.00983,  0.00723,  0.00546,  0.00429,  0.00231,  0.00000,  \
				            0.07631,  0.06315,  0.05648,  0.04220,  0.03162,  0.02875,  0.02354,  0.01803,  \
				            0.01715,  0.01195,  0.01059,  0.00780,  0.00591,  0.00466,  0.00253,  0.00000,  \
				            0.08156,  0.06806,  0.06116,  0.04626,  0.03503,  0.03194,  0.02630,  0.02028,  \
				            0.01932,  0.01359,  0.01208,  0.00896,  0.00685,  0.00544,  0.00301,  0.00000,  \
				            0.08186,  0.06835,  0.06144,  0.04650,  0.03523,  0.03214,  0.02647,  0.02042,  \
				            0.01945,  0.01369,  0.01218,  0.00904,  0.00692,  0.00549,  0.00305,  0.00000,  \
				            0.08659,  0.07285,  0.06578,  0.05039,  0.03862,  0.03534,  0.02932,  0.02282,  \
				            0.02178,  0.01552,  0.01388,  0.01043,  0.00807,  0.00648,  0.00369,  0.00000,  \
				            0.09087,  0.07700,  0.06984,  0.05416,  0.04204,  0.03864,  0.03235,  0.02550,  \
				            0.02439,  0.01771,  0.01594,  0.01219,  0.00961,  0.00783,  0.00466,  0.00000,  \
				            0.09421,  0.08028,  0.07308,  0.05727,  0.04498,  0.04152,  0.03508,  0.02803,  \
				            0.02688,  0.01992,  0.01806,  0.01408,  0.01130,  0.00936,  0.00582,  0.00000 ");
			}
			ground_capacitance (capacitance_template_WxS) {
				index_1 (" 0.0700, 0.0900, 0.1400, 0.2700, 0.2800, 0.5000, 0.9000, 1.5000 ");
				index_2 (" 0.0700, 0.0900, 0.1050, 0.1575, 0.2363, 0.2700, 0.3544, 0.5000,  \
				           0.5316, 0.7973, 0.9000, 1.1960, 1.5000, 1.7940, 2.6910, 269.1035 ");
				values  ("  0.00715,  0.00804,  0.00869,  0.01077,  0.01348,  0.01450,  0.01682,  0.02016,  \
				            0.02080,  0.02534,  0.02675,  0.03009,  0.03262,  0.03447,  0.03778,  0.04207,  \
				            0.00805,  0.00890,  0.00952,  0.01153,  0.01415,  0.01515,  0.01744,  0.02079,  \
				            0.02144,  0.02604,  0.02749,  0.03088,  0.03349,  0.03540,  0.03882,  0.04330,  \
				            0.01006,  0.01084,  0.01140,  0.01325,  0.01574,  0.01671,  0.01895,  0.02230,  \
				            0.02297,  0.02769,  0.02920,  0.03278,  0.03553,  0.03754,  0.04119,  0.04608,  \
				            0.01444,  0.01511,  0.01561,  0.01727,  0.01959,  0.02052,  0.02272,  0.02611,  \
				            0.02678,  0.03172,  0.03332,  0.03718,  0.04018,  0.04240,  0.04651,  0.05230,  \
				            0.01476,  0.01542,  0.01591,  0.01757,  0.01988,  0.02081,  0.02301,  0.02640,  \
				            0.02707,  0.03203,  0.03363,  0.03750,  0.04051,  0.04275,  0.04688,  0.05274,  \
				            0.02130,  0.02191,  0.02237,  0.02394,  0.02617,  0.02709,  0.02927,  0.03270,  \
				            0.03339,  0.03852,  0.04020,  0.04432,  0.04757,  0.05001,  0.05464,  0.06170,  \
				            0.03283,  0.03342,  0.03386,  0.03538,  0.03756,  0.03846,  0.04062,  0.04406,  \
				            0.04475,  0.04999,  0.05174,  0.05605,  0.05952,  0.06218,  0.06744,  0.07618,  \
				            0.04989,  0.05047,  0.05089,  0.05236,  0.05449,  0.05537,  0.05749,  0.06090,  \
				            0.06160,  0.06687,  0.06865,  0.07309,  0.07673,  0.07956,  0.08532,  0.09619 ");
			}
		}
	}

	layer (metal2) {
		resistance: 0.250000

		capacitance () {
			top_plane: metal3;
			bottom_plane: metal1;
			lateral_capacitance (capacitance_template_WxS) {
				index_1 (" 0.0700, 0.0900, 0.1400, 0.2700, 0.2800, 0.5000, 0.9000, 1.5000 ");
				index_2 (" 0.0700, 0.0900, 0.1050, 0.1575, 0.2363, 0.2700, 0.3544, 0.5000,  \
				           0.5316, 0.7973, 0.9000, 1.1960, 1.5000, 1.7940, 2.6910, 269.1035 ");
				values  ("  0.05741,  0.04373,  0.03672,  0.02161,  0.01082,  0.00818,  0.00409,  0.00128,  \
				            0.00100,  0.00013,  0.00006,  0.00001,  0.00000,  0.00000,  0.00000,  0.00000,  \
				            0.05773,  0.04398,  0.03692,  0.02172,  0.01088,  0.00822,  0.00411,  0.00128,  \
				            0.00100,  0.00013,  0.00006,  0.00001,  0.00000,  0.00000,  0.00000,  0.00000,  \
				            0.05804,  0.04422,  0.03712,  0.02183,  0.01093,  0.00826,  0.00413,  0.00129,  \
				            0.00101,  0.00013,  0.00006,  0.00001,  0.00000,  0.00000,  0.00000,  0.00000,  \
				            0.05814,  0.04429,  0.03718,  0.02187,  0.01095,  0.00827,  0.00414,  0.00129,  \
				            0.00101,  0.00013,  0.00006,  0.00001,  0.00000,  0.00000,  0.00000,  0.00000,  \
				            0.05815,  0.04430,  0.03719,  0.02187,  0.01095,  0.00827,  0.00414,  0.00129,  \
				            0.00101,  0.00013,  0.00006,  0.00001,  0.00000,  0.00000,  0.00000,  0.00000,  \
				            0.05816,  0.04431,  0.03719,  0.02188,  0.01095,  0.00828,  0.00414,  0.00129,  \
				            0.00101,  0.00013,  0.00006,  0.00001,  0.00000,  0.00000,  0.00000,  0.00000,  \
				            0.05815,  0.04430,  0.03719,  0.02187,  0.01095,  0.00828,  0.00414,  0.00129,  \
				            0.00101,  0.00013,  0.00006,  0.00001,  0.00000,  0.00000,  0.00000,  0.00000,  \
				            0.05816,  0.04430,  0.03719,  0.02187,  0.01095,  0.00828,  0.00414,  0.00129,  \
				            0.00101,  0.00013,  0.00006,  0.00001,  0.00000,  0.00000,  0.00000,  0.00000 ");
			}
			ground_capacitance (capacitance_template_WxS) {
				index_1 (" 0.0700, 0.0900, 0.1400, 0.2700, 0.2800, 0.5000, 0.9000, 1.5000 ");
				index_2 (" 0.0700, 0.0900, 0.1050, 0.1575, 0.2363, 0.2700, 0.3544, 0.5000,  \
				           0.5316, 0.7973, 0.9000, 1.1960, 1.5000, 1.7940, 2.6910, 269.1035 ");
				values  ("  0.05019,  0.05590,  0.06004,  0.07264,  0.08637,  0.09060,  0.09763,  0.10327,  \
				            0.10389,  0.10565,  0.10561,  0.10587,  0.10575,  0.10584,  0.10596,  0.10595,  \
				            0.05742,  0.06319,  0.06737,  0.08005,  0.09386,  0.09811,  0.10518,  0.11084,  \
				            0.11146,  0.11324,  0.11320,  0.11346,  0.11335,  0.11343,  0.11353,  0.11353,  \
				            0.07566,  0.08150,  0.08571,  0.09849,  0.11237,  0.11664,  0.12375,  0.12943,  \
				            0.13006,  0.13184,  0.13181,  0.13206,  0.13195,  0.13204,  0.13213,  0.13213,  \
				            0.12354,  0.12939,  0.13362,  0.14642,  0.16033,  0.16461,  0.17173,  0.17742,  \
				            0.17805,  0.17984,  0.17980,  0.18006,  0.17995,  0.18003,  0.18013,  0.18012,  \
				            0.12722,  0.13308,  0.13731,  0.15011,  0.16402,  0.16830,  0.17542,  0.18111,  \
				            0.18174,  0.18353,  0.18349,  0.18375,  0.18364,  0.18373,  0.18382,  0.18382,  \
				            0.20839,  0.21424,  0.21847,  0.23128,  0.24519,  0.24947,  0.25659,  0.26229,  \
				            0.26291,  0.26470,  0.26467,  0.26492,  0.26481,  0.26490,  0.26499,  0.26499,  \
				            0.35597,  0.36183,  0.36606,  0.37886,  0.39277,  0.39705,  0.40417,  0.40987,  \
				            0.41049,  0.41228,  0.41225,  0.41250,  0.41239,  0.41248,  0.41245,  0.41257,  \
				            0.57734,  0.58319,  0.58742,  0.60023,  0.61414,  0.61842,  0.62554,  0.63123,  \
				            0.63186,  0.63365,  0.63362,  0.63387,  0.63376,  0.63385,  0.63382,  0.63394 ");
			}
		}

		capacitance () {
			top_plane: metal3;
			bottom_plane: poly;
			lateral_capacitance (capacitance_template_WxS) {
				index_1 (" 0.0700, 0.0900, 0.1400, 0.2700, 0.2800, 0.5000, 0.9000, 1.5000 ");
				index_2 (" 0.0700, 0.0900, 0.1050, 0.1575, 0.2363, 0.2700, 0.3544, 0.5000,  \
				           0.5316, 0.7973, 0.9000, 1.1960, 1.5000, 1.7940, 2.6910, 269.1035 ");
				values  ("  0.06159,  0.04819,  0.04135,  0.02655,  0.01558,  0.01270,  0.00778,  0.00353,  \
				            0.00298,  0.00075,  0.00044,  0.00010,  0.00002,  0.00001,  0.00000,  0.00000,  \
				            0.06239,  0.04886,  0.04195,  0.02696,  0.01585,  0.01291,  0.00793,  0.00360,  \
				            0.00304,  0.00076,  0.00045,  0.00010,  0.00002,  0.00001,  0.00000,  0.00000,  \
				            0.06359,  0.04990,  0.04287,  0.02763,  0.01627,  0.01327,  0.00816,  0.00371,  \
				            0.00314,  0.00079,  0.00047,  0.00011,  0.00002,  0.00001,  0.00000,  0.00000,  \
				            0.06481,  0.05096,  0.04383,  0.02832,  0.01672,  0.01365,  0.00841,  0.00383,  \
				            0.00324,  0.00082,  0.00048,  0.00011,  0.00003,  0.00001,  0.00000,  0.00000,  \
				            0.06486,  0.05100,  0.04387,  0.02835,  0.01674,  0.01366,  0.00842,  0.00383,  \
				            0.00324,  0.00082,  0.00048,  0.00011,  0.00003,  0.00001,  0.00000,  0.00000,  \
				            0.06527,  0.05136,  0.04419,  0.02858,  0.01689,  0.01379,  0.00850,  0.00387,  \
				            0.00328,  0.00083,  0.00049,  0.00011,  0.00003,  0.00001,  0.00000,  0.00000,  \
				            0.06532,  0.05140,  0.04423,  0.02861,  0.01691,  0.01381,  0.00851,  0.00388,  \
				            0.00328,  0.00083,  0.00049,  0.00011,  0.00003,  0.00001,  0.00000,  0.00000,  \
				            0.06532,  0.05141,  0.04424,  0.02861,  0.01691,  0.01381,  0.00851,  0.00388,  \
				            0.00328,  0.00083,  0.00049,  0.00011,  0.00003,  0.00001,  0.00000,  0.00000 ");
			}
			ground_capacitance (capacitance_template_WxS) {
				index_1 (" 0.0700, 0.0900, 0.1400, 0.2700, 0.2800, 0.5000, 0.9000, 1.5000 ");
				index_2 (" 0.0700, 0.0900, 0.1050, 0.1575, 0.2363, 0.2700, 0.3544, 0.5000,  \
				           0.5316, 0.7973, 0.9000, 1.1960, 1.5000, 1.7940, 2.6910, 269.1035 ");
				values  ("  0.03595,  0.03989,  0.04278,  0.05181,  0.06263,  0.06636,  0.07350,  0.08097,  \
				            0.08202,  0.08637,  0.08687,  0.08769,  0.08777,  0.08787,  0.08791,  0.08791,  \
				            0.04064,  0.04463,  0.04754,  0.05668,  0.06762,  0.07140,  0.07865,  0.08624,  \
				            0.08731,  0.09174,  0.09226,  0.09309,  0.09317,  0.09328,  0.09330,  0.09330,  \
				            0.05257,  0.05662,  0.05957,  0.06886,  0.08002,  0.08387,  0.09130,  0.09909,  \
				            0.10018,  0.10475,  0.10529,  0.10615,  0.10624,  0.10634,  0.10635,  0.10635,  \
				            0.08441,  0.08853,  0.09154,  0.10100,  0.11238,  0.11632,  0.12393,  0.13193,  \
				            0.13305,  0.13777,  0.13833,  0.13922,  0.13932,  0.13942,  0.13942,  0.13942,  \
				            0.08689,  0.09101,  0.09402,  0.10348,  0.11488,  0.11882,  0.12643,  0.13444,  \
				            0.13557,  0.14030,  0.14086,  0.14174,  0.14184,  0.14194,  0.14195,  0.14194,  \
				            0.14176,  0.14591,  0.14893,  0.15846,  0.16992,  0.17389,  0.18157,  0.18965,  \
				            0.19079,  0.19556,  0.19613,  0.19702,  0.19712,  0.19723,  0.19723,  0.19723,  \
				            0.24195,  0.24610,  0.24913,  0.25866,  0.27014,  0.27411,  0.28180,  0.28989,  \
				            0.29103,  0.29581,  0.29638,  0.29727,  0.29737,  0.29748,  0.29747,  0.29748,  \
				            0.39228,  0.39643,  0.39946,  0.40899,  0.42047,  0.42445,  0.43213,  0.44022,  \
				            0.44136,  0.44614,  0.44671,  0.44760,  0.44771,  0.44781,  0.44780,  0.44781 ");
			}
		}

		capacitance () {
			top_plane: metal3;
			bottom_plane: SUBSTRATE;
			lateral_capacitance (capacitance_template_WxS) {
				index_1 (" 0.0700, 0.0900, 0.1400, 0.2700, 0.2800, 0.5000, 0.9000, 1.5000 ");
				index_2 (" 0.0700, 0.0900, 0.1050, 0.1575, 0.2363, 0.2700, 0.3544, 0.5000,  \
				           0.5316, 0.7973, 0.9000, 1.1960, 1.5000, 1.7940, 2.6910, 269.1035 ");
				values  ("  0.06251,  0.04921,  0.04244,  0.02788,  0.01715,  0.01431,  0.00941,  0.00492,  \
				            0.00430,  0.00147,  0.00099,  0.00033,  0.00011,  0.00004,  0.00000,  0.00000,  \
				            0.06344,  0.05003,  0.04319,  0.02844,  0.01755,  0.01466,  0.00966,  0.00506,  \
				            0.00443,  0.00152,  0.00102,  0.00034,  0.00011,  0.00004,  0.00000,  0.00000,  \
				            0.06502,  0.05143,  0.04448,  0.02945,  0.01827,  0.01530,  0.01013,  0.00534,  \
				            0.00468,  0.00161,  0.00108,  0.00036,  0.00012,  0.00004,  0.00000,  0.00000,  \
				            0.06709,  0.05331,  0.04623,  0.03086,  0.01932,  0.01622,  0.01081,  0.00575,  \
				            0.00504,  0.00175,  0.00118,  0.00039,  0.00013,  0.00005,  0.00000,  0.00000,  \
				            0.06719,  0.05341,  0.04632,  0.03093,  0.01937,  0.01627,  0.01085,  0.00577,  \
				            0.00506,  0.00176,  0.00119,  0.00039,  0.00013,  0.00005,  0.00000,  0.00000,  \
				            0.06840,  0.05451,  0.04736,  0.03177,  0.02000,  0.01682,  0.01126,  0.00602,  \
				            0.00528,  0.00185,  0.00125,  0.00041,  0.00014,  0.00005,  0.00000,  0.00000,  \
				            0.06885,  0.05493,  0.04775,  0.03209,  0.02024,  0.01704,  0.01142,  0.00611,  \
				            0.00537,  0.00188,  0.00127,  0.00042,  0.00014,  0.00005,  0.00000,  0.00000,  \
				            0.06891,  0.05499,  0.04781,  0.03214,  0.02027,  0.01707,  0.01144,  0.00613,  \
				            0.00538,  0.00189,  0.00127,  0.00042,  0.00014,  0.00005,  0.00000,  0.00000 ");
			}
			ground_capacitance (capacitance_template_WxS) {
				index_1 (" 0.0700, 0.0900, 0.1400, 0.2700, 0.2800, 0.5000, 0.9000, 1.5000 ");
				index_2 (" 0.0700, 0.0900, 0.1050, 0.1575, 0.2363, 0.2700, 0.3544, 0.5000,  \
				           0.5316, 0.7973, 0.9000, 1.1960, 1.5000, 1.7940, 2.6910, 269.1035 ");
				values  ("  0.03346,  0.03704,  0.03964,  0.04774,  0.05741,  0.06077,  0.06737,  0.07475,  \
				            0.07587,  0.08116,  0.08200,  0.08344,  0.08382,  0.08403,  0.08412,  0.08412,  \
				            0.03769,  0.04129,  0.04390,  0.05206,  0.06182,  0.06523,  0.07194,  0.07947,  \
				            0.08061,  0.08605,  0.08693,  0.08842,  0.08881,  0.08902,  0.08911,  0.08910,  \
				            0.04835,  0.05197,  0.05460,  0.06284,  0.07278,  0.07627,  0.08318,  0.09099,  \
				            0.09219,  0.09790,  0.09884,  0.10041,  0.10084,  0.10106,  0.10113,  0.10113,  \
				            0.07658,  0.08023,  0.08289,  0.09125,  0.10144,  0.10504,  0.11223,  0.12046,  \
				            0.12173,  0.12785,  0.12888,  0.13058,  0.13106,  0.13129,  0.13136,  0.13136,  \
				            0.07877,  0.08242,  0.08508,  0.09346,  0.10366,  0.10726,  0.11447,  0.12272,  \
				            0.12399,  0.13014,  0.13117,  0.13288,  0.13335,  0.13359,  0.13365,  0.13366,  \
				            0.12750,  0.13119,  0.13387,  0.14235,  0.15271,  0.15639,  0.16378,  0.17228,  \
				            0.17359,  0.17999,  0.18107,  0.18286,  0.18337,  0.18361,  0.18368,  0.18368,  \
				            0.21714,  0.22084,  0.22354,  0.23206,  0.24249,  0.24620,  0.25365,  0.26225,  \
				            0.26357,  0.27007,  0.27118,  0.27299,  0.27351,  0.27376,  0.27384,  0.27383,  \
				            0.35201,  0.35571,  0.35841,  0.36694,  0.37738,  0.38109,  0.38855,  0.39716,  \
				            0.39849,  0.40500,  0.40611,  0.40793,  0.40845,  0.40870,  0.40878,  0.40877 ");
			}
		}

		capacitance () {
			top_plane: metal4;
			bottom_plane: metal1;
			lateral_capacitance (capacitance_template_WxS) {
				index_1 (" 0.0700, 0.0900, 0.1400, 0.2700, 0.2800, 0.5000, 0.9000, 1.5000 ");
				index_2 (" 0.0700, 0.0900, 0.1050, 0.1575, 0.2363, 0.2700, 0.3544, 0.5000,  \
				           0.5316, 0.7973, 0.9000, 1.1960, 1.5000, 1.7940, 2.6910, 269.1035 ");
				values  ("  0.06188,  0.04851,  0.04169,  0.02696,  0.01605,  0.01317,  0.00824,  0.00389,  \
				            0.00332,  0.00091,  0.00055,  0.00014,  0.00004,  0.00001,  0.00000,  0.00000,  \
				            0.06272,  0.04923,  0.04233,  0.02742,  0.01635,  0.01342,  0.00841,  0.00397,  \
				            0.00339,  0.00093,  0.00057,  0.00014,  0.00004,  0.00001,  0.00000,  0.00000,  \
				            0.06403,  0.05037,  0.04336,  0.02817,  0.01685,  0.01385,  0.00870,  0.00412,  \
				            0.00352,  0.00096,  0.00059,  0.00015,  0.00004,  0.00001,  0.00000,  0.00000,  \
				            0.06548,  0.05164,  0.04453,  0.02904,  0.01743,  0.01435,  0.00903,  0.00429,  \
				            0.00367,  0.00101,  0.00061,  0.00015,  0.00004,  0.00001,  0.00000,  0.00000,  \
				            0.06554,  0.05170,  0.04458,  0.02908,  0.01746,  0.01437,  0.00905,  0.00430,  \
				            0.00367,  0.00101,  0.00062,  0.00015,  0.00004,  0.00001,  0.00000,  0.00000,  \
				            0.06611,  0.05220,  0.04503,  0.02942,  0.01769,  0.01456,  0.00918,  0.00436,  \
				            0.00373,  0.00102,  0.00063,  0.00016,  0.00004,  0.00001,  0.00000,  0.00000,  \
				            0.06621,  0.05229,  0.04512,  0.02948,  0.01773,  0.01460,  0.00920,  0.00438,  \
				            0.00374,  0.00103,  0.00063,  0.00016,  0.00004,  0.00001,  0.00000,  0.00000,  \
				            0.06622,  0.05230,  0.04512,  0.02949,  0.01773,  0.01460,  0.00920,  0.00438,  \
				            0.00374,  0.00103,  0.00063,  0.00016,  0.00004,  0.00001,  0.00000,  0.00000 ");
			}
			ground_capacitance (capacitance_template_WxS) {
				index_1 (" 0.0700, 0.0900, 0.1400, 0.2700, 0.2800, 0.5000, 0.9000, 1.5000 ");
				index_2 (" 0.0700, 0.0900, 0.1050, 0.1575, 0.2363, 0.2700, 0.3544, 0.5000,  \
				           0.5316, 0.7973, 0.9000, 1.1960, 1.5000, 1.7940, 2.6910, 269.1035 ");
				values  ("  0.03514,  0.03897,  0.04176,  0.05050,  0.06097,  0.06460,  0.07162,  0.07912,  \
				            0.08020,  0.08486,  0.08545,  0.08641,  0.08655,  0.08667,  0.08671,  0.08671,  \
				            0.03968,  0.04354,  0.04636,  0.05519,  0.06579,  0.06946,  0.07660,  0.08423,  \
				            0.08533,  0.09009,  0.09070,  0.09168,  0.09182,  0.09194,  0.09197,  0.09197,  \
				            0.05120,  0.05511,  0.05797,  0.06694,  0.07775,  0.08151,  0.08882,  0.09668,  \
				            0.09782,  0.10274,  0.10339,  0.10441,  0.10456,  0.10468,  0.10469,  0.10469,  \
				            0.08193,  0.08590,  0.08880,  0.09795,  0.10900,  0.11286,  0.12039,  0.12852,  \
				            0.12969,  0.13482,  0.13550,  0.13656,  0.13673,  0.13685,  0.13685,  0.13685,  \
				            0.08432,  0.08830,  0.09120,  0.10035,  0.11142,  0.11528,  0.12282,  0.13096,  \
				            0.13213,  0.13727,  0.13795,  0.13901,  0.13918,  0.13930,  0.13931,  0.13930,  \
				            0.13736,  0.14137,  0.14430,  0.15352,  0.16469,  0.16859,  0.17621,  0.18446,  \
				            0.18565,  0.19087,  0.19156,  0.19264,  0.19281,  0.19293,  0.19293,  0.19293,  \
				            0.23438,  0.23840,  0.24133,  0.25057,  0.26176,  0.26567,  0.27331,  0.28157,  \
				            0.28277,  0.28800,  0.28870,  0.28977,  0.28995,  0.29007,  0.29007,  0.29007,  \
				            0.38002,  0.38403,  0.38697,  0.39621,  0.40740,  0.41130,  0.41894,  0.42721,  \
				            0.42840,  0.43364,  0.43433,  0.43541,  0.43558,  0.43571,  0.43571,  0.43571 ");
			}
		}

		capacitance () {
			top_plane: metal4;
			bottom_plane: poly;
			lateral_capacitance (capacitance_template_WxS) {
				index_1 (" 0.0700, 0.0900, 0.1400, 0.2700, 0.2800, 0.5000, 0.9000, 1.5000 ");
				index_2 (" 0.0700, 0.0900, 0.1050, 0.1575, 0.2363, 0.2700, 0.3544, 0.5000,  \
				           0.5316, 0.7973, 0.9000, 1.1960, 1.5000, 1.7940, 2.6910, 269.1035 ");
				values  ("  0.06630,  0.05320,  0.04654,  0.03214,  0.02122,  0.01821,  0.01276,  0.00729,  \
				            0.00648,  0.00245,  0.00169,  0.00059,  0.00020,  0.00007,  0.00000,  0.00000,  \
				            0.06757,  0.05431,  0.04754,  0.03287,  0.02172,  0.01864,  0.01306,  0.00745,  \
				            0.00662,  0.00250,  0.00173,  0.00061,  0.00021,  0.00008,  0.00000,  0.00000,  \
				            0.06972,  0.05619,  0.04925,  0.03414,  0.02256,  0.01936,  0.01357,  0.00774,  \
				            0.00688,  0.00260,  0.00179,  0.00063,  0.00022,  0.00008,  0.00000,  0.00000,  \
				            0.07220,  0.05837,  0.05124,  0.03560,  0.02355,  0.02020,  0.01415,  0.00807,  \
				            0.00717,  0.00271,  0.00187,  0.00065,  0.00022,  0.00008,  0.00000,  0.00000,  \
				            0.07230,  0.05846,  0.05132,  0.03566,  0.02359,  0.02024,  0.01418,  0.00808,  \
				            0.00718,  0.00271,  0.00187,  0.00065,  0.00023,  0.00008,  0.00000,  0.00000,  \
				            0.07323,  0.05927,  0.05205,  0.03620,  0.02395,  0.02054,  0.01439,  0.00820,  \
				            0.00729,  0.00275,  0.00190,  0.00066,  0.00023,  0.00008,  0.00000,  0.00000,  \
				            0.07338,  0.05941,  0.05218,  0.03630,  0.02401,  0.02060,  0.01443,  0.00822,  \
				            0.00731,  0.00276,  0.00190,  0.00066,  0.00023,  0.00008,  0.00000,  0.00000,  \
				            0.07339,  0.05942,  0.05219,  0.03630,  0.02401,  0.02060,  0.01443,  0.00822,  \
				            0.00731,  0.00276,  0.00190,  0.00066,  0.00023,  0.00008,  0.00000,  0.00000 ");
			}
			ground_capacitance (capacitance_template_WxS) {
				index_1 (" 0.0700, 0.0900, 0.1400, 0.2700, 0.2800, 0.5000, 0.9000, 1.5000 ");
				index_2 (" 0.0700, 0.0900, 0.1050, 0.1575, 0.2363, 0.2700, 0.3544, 0.5000,  \
				           0.5316, 0.7973, 0.9000, 1.1960, 1.5000, 1.7940, 2.6910, 269.1035 ");
				values  ("  0.02044,  0.02252,  0.02405,  0.02912,  0.03596,  0.03860,  0.04439,  0.05200,  \
				            0.05330,  0.06031,  0.06170,  0.06394,  0.06471,  0.06502,  0.06510,  0.06510,  \
				            0.02251,  0.02460,  0.02615,  0.03131,  0.03827,  0.04097,  0.04690,  0.05467,  \
				            0.05600,  0.06316,  0.06459,  0.06688,  0.06767,  0.06798,  0.06805,  0.06806,  \
				            0.02784,  0.02998,  0.03157,  0.03689,  0.04413,  0.04693,  0.05308,  0.06115,  \
				            0.06252,  0.06996,  0.07145,  0.07383,  0.07464,  0.07497,  0.07503,  0.07503,  \
				            0.04273,  0.04497,  0.04664,  0.05221,  0.05979,  0.06272,  0.06915,  0.07756,  \
				            0.07899,  0.08674,  0.08830,  0.09078,  0.09163,  0.09196,  0.09202,  0.09202,  \
				            0.04392,  0.04617,  0.04783,  0.05342,  0.06101,  0.06394,  0.07039,  0.07882,  \
				            0.08024,  0.08801,  0.08957,  0.09205,  0.09290,  0.09324,  0.09329,  0.09330,  \
				            0.07074,  0.07304,  0.07474,  0.08044,  0.08817,  0.09115,  0.09770,  0.10625,  \
				            0.10770,  0.11558,  0.11717,  0.11968,  0.12055,  0.12089,  0.12094,  0.12094,  \
				            0.12038,  0.12269,  0.12440,  0.13012,  0.13787,  0.14086,  0.14743,  0.15600,  \
				            0.15746,  0.16536,  0.16695,  0.16947,  0.17034,  0.17068,  0.17084,  0.17073,  \
				            0.19498,  0.19729,  0.19900,  0.20472,  0.21247,  0.21546,  0.22203,  0.23061,  \
				            0.23206,  0.23996,  0.24155,  0.24408,  0.24494,  0.24528,  0.24545,  0.24534 ");
			}
		}

		capacitance () {
			top_plane: metal4;
			bottom_plane: SUBSTRATE;
			lateral_capacitance (capacitance_template_WxS) {
				index_1 (" 0.0700, 0.0900, 0.1400, 0.2700, 0.2800, 0.5000, 0.9000, 1.5000 ");
				index_2 (" 0.0700, 0.0900, 0.1050, 0.1575, 0.2363, 0.2700, 0.3544, 0.5000,  \
				           0.5316, 0.7973, 0.9000, 1.1960, 1.5000, 1.7940, 2.6910, 269.1035 ");
				values  ("  0.06738,  0.05437,  0.04779,  0.03363,  0.02297,  0.02004,  0.01469,  0.00915,  \
				            0.00829,  0.00374,  0.00277,  0.00119,  0.00050,  0.00022,  0.00002,  0.00000,  \
				            0.06877,  0.05561,  0.04893,  0.03449,  0.02360,  0.02059,  0.01510,  0.00940,  \
				            0.00852,  0.00384,  0.00284,  0.00122,  0.00052,  0.00023,  0.00002,  0.00000,  \
				            0.07127,  0.05784,  0.05098,  0.03608,  0.02473,  0.02159,  0.01584,  0.00986,  \
				            0.00894,  0.00403,  0.00298,  0.00128,  0.00054,  0.00024,  0.00002,  0.00000,  \
				            0.07455,  0.06080,  0.05371,  0.03822,  0.02627,  0.02294,  0.01685,  0.01049,  \
				            0.00951,  0.00430,  0.00318,  0.00136,  0.00058,  0.00025,  0.00002,  0.00000,  \
				            0.07471,  0.06093,  0.05384,  0.03832,  0.02634,  0.02301,  0.01689,  0.01052,  \
				            0.00954,  0.00431,  0.00319,  0.00137,  0.00058,  0.00025,  0.00002,  0.00000,  \
				            0.07639,  0.06245,  0.05525,  0.03943,  0.02716,  0.02372,  0.01743,  0.01085,  \
				            0.00984,  0.00445,  0.00330,  0.00141,  0.00060,  0.00026,  0.00002,  0.00000,  \
				            0.07691,  0.06293,  0.05570,  0.03979,  0.02742,  0.02396,  0.01760,  0.01097,  \
				            0.00994,  0.00450,  0.00333,  0.00143,  0.00060,  0.00027,  0.00002,  0.00000,  \
				            0.07698,  0.06300,  0.05576,  0.03984,  0.02746,  0.02399,  0.01763,  0.01098,  \
				            0.00996,  0.00450,  0.00334,  0.00143,  0.00060,  0.00027,  0.00002,  0.00000 ");
			}
			ground_capacitance (capacitance_template_WxS) {
				index_1 (" 0.0700, 0.0900, 0.1400, 0.2700, 0.2800, 0.5000, 0.9000, 1.5000 ");
				index_2 (" 0.0700, 0.0900, 0.1050, 0.1575, 0.2363, 0.2700, 0.3544, 0.5000,  \
				           0.5316, 0.7973, 0.9000, 1.1960, 1.5000, 1.7940, 2.6910, 269.1035 ");
				values  ("  0.01756,  0.01930,  0.02057,  0.02469,  0.03024,  0.03241,  0.03729,  0.04408,  \
				            0.04530,  0.05260,  0.05431,  0.05738,  0.05872,  0.05933,  0.05968,  0.05972,  \
				            0.01923,  0.02094,  0.02220,  0.02636,  0.03200,  0.03421,  0.03921,  0.04616,  \
				            0.04741,  0.05491,  0.05666,  0.05981,  0.06119,  0.06182,  0.06217,  0.06221,  \
				            0.02336,  0.02508,  0.02634,  0.03059,  0.03644,  0.03875,  0.04395,  0.05122,  \
				            0.05253,  0.06037,  0.06222,  0.06553,  0.06698,  0.06764,  0.06799,  0.06803,  \
				            0.03474,  0.03651,  0.03783,  0.04228,  0.04846,  0.05089,  0.05641,  0.06412,  \
				            0.06550,  0.07383,  0.07580,  0.07932,  0.08087,  0.08157,  0.08194,  0.08198,  \
				            0.03565,  0.03743,  0.03875,  0.04321,  0.04940,  0.05184,  0.05738,  0.06511,  \
				            0.06650,  0.07485,  0.07682,  0.08035,  0.08191,  0.08260,  0.08297,  0.08301,  \
				            0.05644,  0.05827,  0.05963,  0.06424,  0.07061,  0.07313,  0.07884,  0.08680,  \
				            0.08823,  0.09684,  0.09888,  0.10252,  0.10413,  0.10485,  0.10523,  0.10527,  \
				            0.09557,  0.09743,  0.09880,  0.10345,  0.10990,  0.11244,  0.11820,  0.12624,  \
				            0.12768,  0.13638,  0.13844,  0.14212,  0.14375,  0.14448,  0.14499,  0.14490,  \
				            0.15471,  0.15657,  0.15795,  0.16260,  0.16906,  0.17160,  0.17737,  0.18542,  \
				            0.18686,  0.19557,  0.19764,  0.20132,  0.20295,  0.20368,  0.20419,  0.20411 ");
			}
		}

		capacitance () {
			top_plane: metal5;
			bottom_plane: metal1;
			lateral_capacitance (capacitance_template_WxS) {
				index_1 (" 0.0700, 0.0900, 0.1400, 0.2700, 0.2800, 0.5000, 0.9000, 1.5000 ");
				index_2 (" 0.0700, 0.0900, 0.1050, 0.1575, 0.2363, 0.2700, 0.3544, 0.5000,  \
				           0.5316, 0.7973, 0.9000, 1.1960, 1.5000, 1.7940, 2.6910, 269.1035 ");
				values  ("  0.06308,  0.04983,  0.04311,  0.02869,  0.01815,  0.01537,  0.01056,  0.00608,  \
				            0.00544,  0.00232,  0.00172,  0.00076,  0.00034,  0.00016,  0.00002,  0.00000,  \
				            0.06408,  0.05072,  0.04393,  0.02934,  0.01864,  0.01582,  0.01091,  0.00631,  \
				            0.00565,  0.00243,  0.00179,  0.00080,  0.00036,  0.00017,  0.00002,  0.00000,  \
				            0.06586,  0.05234,  0.04545,  0.03059,  0.01962,  0.01670,  0.01161,  0.00678,  \
				            0.00609,  0.00265,  0.00196,  0.00087,  0.00039,  0.00018,  0.00002,  0.00000,  \
				            0.06856,  0.05486,  0.04784,  0.03263,  0.02125,  0.01820,  0.01282,  0.00761,  \
				            0.00686,  0.00304,  0.00226,  0.00101,  0.00046,  0.00022,  0.00002,  0.00000,  \
				            0.06872,  0.05500,  0.04797,  0.03274,  0.02135,  0.01829,  0.01289,  0.00766,  \
				            0.00690,  0.00306,  0.00228,  0.00102,  0.00046,  0.00022,  0.00002,  0.00000,  \
				            0.07086,  0.05702,  0.04991,  0.03442,  0.02272,  0.01955,  0.01392,  0.00838,  \
				            0.00757,  0.00341,  0.00255,  0.00115,  0.00052,  0.00025,  0.00003,  0.00000,  \
				            0.07222,  0.05832,  0.05115,  0.03551,  0.02363,  0.02038,  0.01460,  0.00887,  \
				            0.00802,  0.00364,  0.00273,  0.00124,  0.00056,  0.00027,  0.00003,  0.00000,  \
				            0.07266,  0.05874,  0.05156,  0.03586,  0.02392,  0.02065,  0.01482,  0.00902,  \
				            0.00816,  0.00372,  0.00279,  0.00126,  0.00057,  0.00027,  0.00003,  0.00000 ");
			}
			ground_capacitance (capacitance_template_WxS) {
				index_1 (" 0.0700, 0.0900, 0.1400, 0.2700, 0.2800, 0.5000, 0.9000, 1.5000 ");
				index_2 (" 0.0700, 0.0900, 0.1050, 0.1575, 0.2363, 0.2700, 0.3544, 0.5000,  \
				           0.5316, 0.7973, 0.9000, 1.1960, 1.5000, 1.7940, 2.6910, 269.1035 ");
				values  ("  0.03195,  0.03536,  0.03783,  0.04543,  0.05437,  0.05747,  0.06358,  0.07057,  \
				            0.07167,  0.07726,  0.07831,  0.08031,  0.08108,  0.08151,  0.08182,  0.08185,  \
				            0.03599,  0.03939,  0.04185,  0.04945,  0.05844,  0.06157,  0.06777,  0.07492,  \
				            0.07605,  0.08182,  0.08293,  0.08499,  0.08581,  0.08626,  0.08657,  0.08660,  \
				            0.04602,  0.04939,  0.05183,  0.05943,  0.06852,  0.07171,  0.07808,  0.08552,  \
				            0.08670,  0.09284,  0.09405,  0.09629,  0.09720,  0.09768,  0.09801,  0.09804,  \
				            0.07211,  0.07545,  0.07788,  0.08550,  0.09475,  0.09803,  0.10468,  0.11261,  \
				            0.11389,  0.12068,  0.12205,  0.12461,  0.12567,  0.12622,  0.12659,  0.12664,  \
				            0.07412,  0.07746,  0.07990,  0.08752,  0.09678,  0.10006,  0.10673,  0.11469,  \
				            0.11597,  0.12280,  0.12418,  0.12676,  0.12782,  0.12838,  0.12876,  0.12880,  \
				            0.11872,  0.12207,  0.12452,  0.13220,  0.14163,  0.14501,  0.15192,  0.16029,  \
				            0.16166,  0.16903,  0.17057,  0.17341,  0.17462,  0.17524,  0.17566,  0.17571,  \
				            0.20093,  0.20431,  0.20677,  0.21453,  0.22408,  0.22753,  0.23460,  0.24326,  \
				            0.24468,  0.25242,  0.25405,  0.25708,  0.25838,  0.25905,  0.25953,  0.25956,  \
				            0.32528,  0.32866,  0.33114,  0.33892,  0.34852,  0.35199,  0.35912,  0.36786,  \
				            0.36930,  0.37716,  0.37882,  0.38191,  0.38325,  0.38392,  0.38442,  0.38445 ");
			}
		}

		capacitance () {
			top_plane: metal5;
			bottom_plane: poly;
			lateral_capacitance (capacitance_template_WxS) {
				index_1 (" 0.0700, 0.0900, 0.1400, 0.2700, 0.2800, 0.5000, 0.9000, 1.5000 ");
				index_2 (" 0.0700, 0.0900, 0.1050, 0.1575, 0.2363, 0.2700, 0.3544, 0.5000,  \
				           0.5316, 0.7973, 0.9000, 1.1960, 1.5000, 1.7940, 2.6910, 269.1035 ");
				values  ("  0.06776,  0.05477,  0.04821,  0.03412,  0.02360,  0.02073,  0.01552,  0.01013,  \
				            0.00930,  0.00472,  0.00368,  0.00186,  0.00094,  0.00050,  0.00007,  0.00000,  \
				            0.06917,  0.05604,  0.04937,  0.03503,  0.02429,  0.02135,  0.01600,  0.01046,  \
				            0.00960,  0.00488,  0.00381,  0.00193,  0.00098,  0.00052,  0.00007,  0.00000,  \
				            0.07175,  0.05836,  0.05154,  0.03677,  0.02559,  0.02252,  0.01692,  0.01109,  \
				            0.01018,  0.00520,  0.00406,  0.00206,  0.00104,  0.00055,  0.00008,  0.00000,  \
				            0.07544,  0.06174,  0.05470,  0.03935,  0.02759,  0.02433,  0.01836,  0.01209,  \
				            0.01111,  0.00572,  0.00448,  0.00227,  0.00116,  0.00061,  0.00009,  0.00000,  \
				            0.07563,  0.06191,  0.05486,  0.03948,  0.02770,  0.02442,  0.01844,  0.01214,  \
				            0.01116,  0.00574,  0.00450,  0.00229,  0.00116,  0.00061,  0.00009,  0.00000,  \
				            0.07807,  0.06418,  0.05701,  0.04130,  0.02915,  0.02575,  0.01952,  0.01292,  \
				            0.01189,  0.00616,  0.00483,  0.00246,  0.00126,  0.00066,  0.00010,  0.00000,  \
				            0.07942,  0.06546,  0.05824,  0.04237,  0.03003,  0.02656,  0.02019,  0.01341,  \
				            0.01234,  0.00642,  0.00504,  0.00258,  0.00132,  0.00070,  0.00010,  0.00000,  \
				            0.07984,  0.06586,  0.05862,  0.04270,  0.03031,  0.02682,  0.02040,  0.01356,  \
				            0.01249,  0.00650,  0.00511,  0.00261,  0.00133,  0.00071,  0.00011,  0.00000 ");
			}
			ground_capacitance (capacitance_template_WxS) {
				index_1 (" 0.0700, 0.0900, 0.1400, 0.2700, 0.2800, 0.5000, 0.9000, 1.5000 ");
				index_2 (" 0.0700, 0.0900, 0.1050, 0.1575, 0.2363, 0.2700, 0.3544, 0.5000,  \
				           0.5316, 0.7973, 0.9000, 1.1960, 1.5000, 1.7940, 2.6910, 269.1035 ");
				values  ("  0.01663,  0.01832,  0.01954,  0.02347,  0.02863,  0.03061,  0.03504,  0.04121,  \
				            0.04233,  0.04927,  0.05101,  0.05440,  0.05617,  0.05710,  0.05790,  0.05804,  \
				            0.01827,  0.01991,  0.02111,  0.02503,  0.03022,  0.03223,  0.03676,  0.04306,  \
				            0.04421,  0.05135,  0.05315,  0.05664,  0.05847,  0.05943,  0.06025,  0.06040,  \
				            0.02221,  0.02381,  0.02499,  0.02890,  0.03422,  0.03630,  0.04099,  0.04757,  \
				            0.04878,  0.05628,  0.05819,  0.06190,  0.06385,  0.06487,  0.06574,  0.06590,  \
				            0.03258,  0.03419,  0.03539,  0.03940,  0.04492,  0.04710,  0.05205,  0.05905,  \
				            0.06034,  0.06843,  0.07051,  0.07458,  0.07673,  0.07785,  0.07881,  0.07900,  \
				            0.03340,  0.03502,  0.03621,  0.04023,  0.04576,  0.04794,  0.05290,  0.05993,  \
				            0.06123,  0.06935,  0.07144,  0.07552,  0.07768,  0.07881,  0.07978,  0.07996,  \
				            0.05193,  0.05357,  0.05479,  0.05890,  0.06459,  0.06684,  0.07199,  0.07932,  \
				            0.08068,  0.08924,  0.09147,  0.09583,  0.09815,  0.09937,  0.10042,  0.10061,  \
				            0.08688,  0.08854,  0.08978,  0.09395,  0.09975,  0.10205,  0.10731,  0.11484,  \
				            0.11623,  0.12508,  0.12738,  0.13192,  0.13435,  0.13562,  0.13684,  0.13692,  \
				            0.14024,  0.14191,  0.14315,  0.14735,  0.15318,  0.15550,  0.16079,  0.16838,  \
				            0.16979,  0.17872,  0.18106,  0.18565,  0.18811,  0.18940,  0.19064,  0.19072 ");
			}
		}

		capacitance () {
			top_plane: metal5;
			bottom_plane: SUBSTRATE;
			lateral_capacitance (capacitance_template_WxS) {
				index_1 (" 0.0700, 0.0900, 0.1400, 0.2700, 0.2800, 0.5000, 0.9000, 1.5000 ");
				index_2 (" 0.0700, 0.0900, 0.1050, 0.1575, 0.2363, 0.2700, 0.3544, 0.5000,  \
				           0.5316, 0.7973, 0.9000, 1.1960, 1.5000, 1.7940, 2.6910, 269.1035 ");
				values  ("  0.06904,  0.05614,  0.04964,  0.03578,  0.02552,  0.02274,  0.01766,  0.01228,  \
				            0.01142,  0.00646,  0.00524,  0.00294,  0.00164,  0.00094,  0.00017,  0.00000,  \
				            0.07056,  0.05752,  0.05093,  0.03682,  0.02633,  0.02347,  0.01824,  0.01268,  \
				            0.01180,  0.00668,  0.00542,  0.00305,  0.00170,  0.00097,  0.00018,  0.00000,  \
				            0.07345,  0.06016,  0.05341,  0.03885,  0.02791,  0.02490,  0.01938,  0.01349,  \
				            0.01254,  0.00711,  0.00577,  0.00323,  0.00180,  0.00103,  0.00019,  0.00000,  \
				            0.07790,  0.06427,  0.05728,  0.04207,  0.03043,  0.02719,  0.02122,  0.01479,  \
				            0.01376,  0.00781,  0.00634,  0.00355,  0.00198,  0.00114,  0.00021,  0.00000,  \
				            0.07814,  0.06449,  0.05749,  0.04224,  0.03057,  0.02731,  0.02132,  0.01486,  \
				            0.01382,  0.00785,  0.00637,  0.00357,  0.00199,  0.00114,  0.00021,  0.00000,  \
				            0.08128,  0.06742,  0.06026,  0.04458,  0.03243,  0.02901,  0.02269,  0.01584,  \
				            0.01474,  0.00838,  0.00681,  0.00382,  0.00213,  0.00123,  0.00023,  0.00000,  \
				            0.08297,  0.06900,  0.06178,  0.04588,  0.03348,  0.02998,  0.02347,  0.01641,  \
				            0.01527,  0.00869,  0.00707,  0.00397,  0.00222,  0.00128,  0.00024,  0.00000,  \
				            0.08344,  0.06945,  0.06220,  0.04625,  0.03378,  0.03025,  0.02370,  0.01657,  \
				            0.01542,  0.00878,  0.00714,  0.00401,  0.00224,  0.00129,  0.00025,  0.00000 ");
			}
			ground_capacitance (capacitance_template_WxS) {
				index_1 (" 0.0700, 0.0900, 0.1400, 0.2700, 0.2800, 0.5000, 0.9000, 1.5000 ");
				index_2 (" 0.0700, 0.0900, 0.1050, 0.1575, 0.2363, 0.2700, 0.3544, 0.5000,  \
				           0.5316, 0.7973, 0.9000, 1.1960, 1.5000, 1.7940, 2.6910, 269.1035 ");
				values  ("  0.01328,  0.01463,  0.01559,  0.01861,  0.02249,  0.02398,  0.02739,  0.03240,  \
				            0.03336,  0.03990,  0.04176,  0.04572,  0.04811,  0.04950,  0.05097,  0.05133,  \
				            0.01454,  0.01581,  0.01673,  0.01967,  0.02354,  0.02505,  0.02852,  0.03366,  \
				            0.03465,  0.04138,  0.04330,  0.04737,  0.04985,  0.05128,  0.05280,  0.05317,  \
				            0.01737,  0.01855,  0.01941,  0.02226,  0.02617,  0.02772,  0.03133,  0.03673,  \
				            0.03777,  0.04488,  0.04692,  0.05126,  0.05389,  0.05540,  0.05701,  0.05740,  \
				            0.02435,  0.02549,  0.02635,  0.02923,  0.03331,  0.03495,  0.03882,  0.04465,  \
				            0.04578,  0.05352,  0.05575,  0.06049,  0.06338,  0.06504,  0.06681,  0.06724,  \
				            0.02490,  0.02604,  0.02690,  0.02979,  0.03388,  0.03553,  0.03941,  0.04527,  \
				            0.04640,  0.05417,  0.05641,  0.06117,  0.06408,  0.06575,  0.06752,  0.06796,  \
				            0.03750,  0.03868,  0.03956,  0.04257,  0.04684,  0.04858,  0.05268,  0.05887,  \
				            0.06008,  0.06832,  0.07070,  0.07578,  0.07888,  0.08067,  0.08257,  0.08304,  \
				            0.06203,  0.06325,  0.06415,  0.06724,  0.07164,  0.07344,  0.07766,  0.08406,  \
				            0.08530,  0.09382,  0.09629,  0.10155,  0.10477,  0.10662,  0.10872,  0.10909,  \
				            0.09996,  0.10118,  0.10209,  0.10521,  0.10965,  0.11146,  0.11572,  0.12217,  \
				            0.12343,  0.13203,  0.13452,  0.13983,  0.14308,  0.14496,  0.14708,  0.14745 ");
			}
		}

		capacitance () {
			top_plane: metal6;
			bottom_plane: metal1;
			lateral_capacitance (capacitance_template_WxS) {
				index_1 (" 0.0700, 0.0900, 0.1400, 0.2700, 0.2800, 0.5000, 0.9000, 1.5000 ");
				index_2 (" 0.0700, 0.0900, 0.1050, 0.1575, 0.2363, 0.2700, 0.3544, 0.5000,  \
				           0.5316, 0.7973, 0.9000, 1.1960, 1.5000, 1.7940, 2.6910, 269.1035 ");
				values  ("  0.06338,  0.05014,  0.04343,  0.02905,  0.01857,  0.01583,  0.01108,  0.00665,  \
				            0.00602,  0.00287,  0.00223,  0.00116,  0.00063,  0.00036,  0.00007,  0.00000,  \
				            0.06439,  0.05105,  0.04427,  0.02973,  0.01911,  0.01632,  0.01147,  0.00693,  \
				            0.00628,  0.00302,  0.00235,  0.00123,  0.00067,  0.00038,  0.00008,  0.00000,  \
				            0.06622,  0.05273,  0.04585,  0.03107,  0.02019,  0.01731,  0.01230,  0.00753,  \
				            0.00684,  0.00334,  0.00261,  0.00137,  0.00075,  0.00043,  0.00009,  0.00000,  \
				            0.06919,  0.05552,  0.04853,  0.03341,  0.02215,  0.01914,  0.01383,  0.00867,  \
				            0.00792,  0.00399,  0.00314,  0.00168,  0.00092,  0.00054,  0.00011,  0.00000,  \
				            0.06936,  0.05569,  0.04868,  0.03355,  0.02227,  0.01925,  0.01393,  0.00874,  \
				            0.00798,  0.00403,  0.00318,  0.00170,  0.00094,  0.00054,  0.00011,  0.00000,  \
				            0.07207,  0.05827,  0.05119,  0.03579,  0.02421,  0.02107,  0.01549,  0.00995,  \
				            0.00912,  0.00473,  0.00376,  0.00204,  0.00114,  0.00066,  0.00013,  0.00000,  \
				            0.07436,  0.06048,  0.05334,  0.03776,  0.02593,  0.02270,  0.01691,  0.01106,  \
				            0.01017,  0.00541,  0.00433,  0.00238,  0.00134,  0.00078,  0.00016,  0.00000,  \
				            0.07558,  0.06166,  0.05449,  0.03882,  0.02686,  0.02358,  0.01768,  0.01167,  \
				            0.01075,  0.00578,  0.00464,  0.00257,  0.00145,  0.00085,  0.00018,  0.00000 ");
			}
			ground_capacitance (capacitance_template_WxS) {
				index_1 (" 0.0700, 0.0900, 0.1400, 0.2700, 0.2800, 0.5000, 0.9000, 1.5000 ");
				index_2 (" 0.0700, 0.0900, 0.1050, 0.1575, 0.2363, 0.2700, 0.3544, 0.5000,  \
				           0.5316, 0.7973, 0.9000, 1.1960, 1.5000, 1.7940, 2.6910, 269.1035 ");
				values  ("  0.03119,  0.03456,  0.03699,  0.04444,  0.05315,  0.05615,  0.06203,  0.06877,  \
				            0.06983,  0.07535,  0.07644,  0.07861,  0.07960,  0.08020,  0.08081,  0.08095,  \
				            0.03519,  0.03854,  0.04095,  0.04838,  0.05710,  0.06012,  0.06608,  0.07295,  \
				            0.07404,  0.07974,  0.08089,  0.08315,  0.08420,  0.08483,  0.08546,  0.08561,  \
				            0.04506,  0.04835,  0.05073,  0.05809,  0.06684,  0.06989,  0.07598,  0.08312,  \
				            0.08426,  0.09034,  0.09160,  0.09409,  0.09526,  0.09596,  0.09665,  0.09682,  \
				            0.07037,  0.07359,  0.07593,  0.08322,  0.09202,  0.09514,  0.10146,  0.10905,  \
				            0.11029,  0.11706,  0.11853,  0.12144,  0.12286,  0.12370,  0.12455,  0.12477,  \
				            0.07231,  0.07553,  0.07787,  0.08515,  0.09396,  0.09708,  0.10342,  0.11103,  \
				            0.11228,  0.11910,  0.12058,  0.12351,  0.12495,  0.12580,  0.12666,  0.12688,  \
				            0.11505,  0.11825,  0.12057,  0.12785,  0.13676,  0.13995,  0.14650,  0.15455,  \
				            0.15589,  0.16340,  0.16509,  0.16847,  0.17020,  0.17121,  0.17226,  0.17254,  \
				            0.19335,  0.19655,  0.19888,  0.20621,  0.21523,  0.21849,  0.22524,  0.23368,  \
				            0.23511,  0.24324,  0.24513,  0.24893,  0.25093,  0.25210,  0.25336,  0.25366,  \
				            0.31191,  0.31512,  0.31746,  0.32483,  0.33394,  0.33724,  0.34411,  0.35276,  \
				            0.35423,  0.36270,  0.36469,  0.36872,  0.37087,  0.37213,  0.37351,  0.37383 ");
			}
		}

		capacitance () {
			top_plane: metal6;
			bottom_plane: poly;
			lateral_capacitance (capacitance_template_WxS) {
				index_1 (" 0.0700, 0.0900, 0.1400, 0.2700, 0.2800, 0.5000, 0.9000, 1.5000 ");
				index_2 (" 0.0700, 0.0900, 0.1050, 0.1575, 0.2363, 0.2700, 0.3544, 0.5000,  \
				           0.5316, 0.7973, 0.9000, 1.1960, 1.5000, 1.7940, 2.6910, 269.1035 ");
				values  ("  0.06818,  0.05520,  0.04864,  0.03459,  0.02415,  0.02131,  0.01619,  0.01091,  \
				            0.01010,  0.00557,  0.00451,  0.00258,  0.00150,  0.00092,  0.00021,  0.00000,  \
				            0.06960,  0.05647,  0.04982,  0.03553,  0.02487,  0.02197,  0.01671,  0.01129,  \
				            0.01045,  0.00578,  0.00468,  0.00269,  0.00157,  0.00096,  0.00022,  0.00000,  \
				            0.07221,  0.05885,  0.05204,  0.03734,  0.02628,  0.02325,  0.01776,  0.01205,  \
				            0.01116,  0.00622,  0.00505,  0.00290,  0.00170,  0.00104,  0.00024,  0.00000,  \
				            0.07615,  0.06249,  0.05548,  0.04022,  0.02860,  0.02539,  0.01953,  0.01338,  \
				            0.01242,  0.00702,  0.00573,  0.00332,  0.00196,  0.00120,  0.00029,  0.00000,  \
				            0.07636,  0.06269,  0.05566,  0.04038,  0.02873,  0.02551,  0.01963,  0.01346,  \
				            0.01249,  0.00707,  0.00577,  0.00335,  0.00198,  0.00121,  0.00029,  0.00000,  \
				            0.07936,  0.06551,  0.05837,  0.04276,  0.03074,  0.02739,  0.02124,  0.01472,  \
				            0.01369,  0.00786,  0.00645,  0.00377,  0.00224,  0.00138,  0.00033,  0.00000,  \
				            0.08161,  0.06768,  0.06048,  0.04468,  0.03241,  0.02897,  0.02262,  0.01583,  \
				            0.01475,  0.00857,  0.00706,  0.00417,  0.00249,  0.00154,  0.00038,  0.00000,  \
				            0.08278,  0.06881,  0.06158,  0.04568,  0.03330,  0.02981,  0.02336,  0.01642,  \
				            0.01531,  0.00895,  0.00739,  0.00438,  0.00263,  0.00163,  0.00040,  0.00000 ");
			}
			ground_capacitance (capacitance_template_WxS) {
				index_1 (" 0.0700, 0.0900, 0.1400, 0.2700, 0.2800, 0.5000, 0.9000, 1.5000 ");
				index_2 (" 0.0700, 0.0900, 0.1050, 0.1575, 0.2363, 0.2700, 0.3544, 0.5000,  \
				           0.5316, 0.7973, 0.9000, 1.1960, 1.5000, 1.7940, 2.6910, 269.1035 ");
				values  ("  0.01560,  0.01724,  0.01842,  0.02221,  0.02712,  0.02898,  0.03311,  0.03881,  \
				            0.03985,  0.04638,  0.04807,  0.05153,  0.05353,  0.05471,  0.05605,  0.05649,  \
				            0.01721,  0.01880,  0.01995,  0.02370,  0.02860,  0.03048,  0.03467,  0.04048,  \
				            0.04155,  0.04825,  0.05001,  0.05357,  0.05565,  0.05687,  0.05827,  0.05873,  \
				            0.02102,  0.02254,  0.02366,  0.02733,  0.03227,  0.03419,  0.03849,  0.04453,  \
				            0.04564,  0.05269,  0.05455,  0.05837,  0.06061,  0.06193,  0.06343,  0.06394,  \
				            0.03066,  0.03214,  0.03324,  0.03691,  0.04194,  0.04391,  0.04840,  0.05479,  \
				            0.05597,  0.06359,  0.06565,  0.06989,  0.07242,  0.07392,  0.07566,  0.07625,  \
				            0.03141,  0.03289,  0.03399,  0.03766,  0.04269,  0.04467,  0.04917,  0.05558,  \
				            0.05676,  0.06442,  0.06648,  0.07075,  0.07330,  0.07481,  0.07656,  0.07715,  \
				            0.04809,  0.04957,  0.05067,  0.05436,  0.05947,  0.06150,  0.06614,  0.07283,  \
				            0.07408,  0.08224,  0.08448,  0.08916,  0.09200,  0.09370,  0.09570,  0.09638,  \
				            0.07918,  0.08067,  0.08178,  0.08551,  0.09070,  0.09277,  0.09753,  0.10447,  \
				            0.10577,  0.11438,  0.11677,  0.12182,  0.12492,  0.12679,  0.12914,  0.12979,  \
				            0.12682,  0.12832,  0.12944,  0.13320,  0.13845,  0.14055,  0.14538,  0.15246,  \
				            0.15379,  0.16265,  0.16512,  0.17036,  0.17361,  0.17557,  0.17805,  0.17874 ");
			}
		}

		capacitance () {
			top_plane: metal6;
			bottom_plane: SUBSTRATE;
			lateral_capacitance (capacitance_template_WxS) {
				index_1 (" 0.0700, 0.0900, 0.1400, 0.2700, 0.2800, 0.5000, 0.9000, 1.5000 ");
				index_2 (" 0.0700, 0.0900, 0.1050, 0.1575, 0.2363, 0.2700, 0.3544, 0.5000,  \
				           0.5316, 0.7973, 0.9000, 1.1960, 1.5000, 1.7940, 2.6910, 269.1035 ");
				values  ("  0.06953,  0.05666,  0.05017,  0.03635,  0.02616,  0.02340,  0.01841,  0.01316,  \
				            0.01233,  0.00748,  0.00625,  0.00387,  0.00241,  0.00155,  0.00042,  0.00000,  \
				            0.07107,  0.05805,  0.05147,  0.03740,  0.02700,  0.02417,  0.01904,  0.01362,  \
				            0.01276,  0.00775,  0.00648,  0.00402,  0.00251,  0.00162,  0.00044,  0.00000,  \
				            0.07400,  0.06074,  0.05400,  0.03951,  0.02868,  0.02571,  0.02030,  0.01456,  \
				            0.01364,  0.00831,  0.00696,  0.00431,  0.00269,  0.00174,  0.00047,  0.00000,  \
				            0.07868,  0.06509,  0.05812,  0.04301,  0.03151,  0.02832,  0.02247,  0.01619,  \
				            0.01518,  0.00929,  0.00780,  0.00485,  0.00304,  0.00197,  0.00054,  0.00000,  \
				            0.07894,  0.06533,  0.05835,  0.04321,  0.03167,  0.02847,  0.02259,  0.01628,  \
				            0.01527,  0.00935,  0.00785,  0.00488,  0.00306,  0.00198,  0.00054,  0.00000,  \
				            0.08263,  0.06880,  0.06168,  0.04610,  0.03407,  0.03070,  0.02448,  0.01774,  \
				            0.01665,  0.01027,  0.00864,  0.00540,  0.00340,  0.00221,  0.00061,  0.00000,  \
				            0.08519,  0.07126,  0.06405,  0.04822,  0.03590,  0.03242,  0.02596,  0.01892,  \
				            0.01777,  0.01103,  0.00930,  0.00584,  0.00369,  0.00240,  0.00067,  0.00000,  \
				            0.08639,  0.07241,  0.06517,  0.04924,  0.03678,  0.03326,  0.02670,  0.01951,  \
				            0.01834,  0.01142,  0.00964,  0.00606,  0.00384,  0.00250,  0.00070,  0.00000 ");
			}
			ground_capacitance (capacitance_template_WxS) {
				index_1 (" 0.0700, 0.0900, 0.1400, 0.2700, 0.2800, 0.5000, 0.9000, 1.5000 ");
				index_2 (" 0.0700, 0.0900, 0.1050, 0.1575, 0.2363, 0.2700, 0.3544, 0.5000,  \
				           0.5316, 0.7973, 0.9000, 1.1960, 1.5000, 1.7940, 2.6910, 269.1035 ");
				values  ("  0.01204,  0.01332,  0.01424,  0.01711,  0.02075,  0.02213,  0.02522,  0.02971,  \
				            0.03057,  0.03649,  0.03823,  0.04208,  0.04464,  0.04627,  0.04843,  0.04929,  \
				            0.01326,  0.01447,  0.01534,  0.01812,  0.02170,  0.02308,  0.02620,  0.03078,  \
				            0.03166,  0.03775,  0.03955,  0.04351,  0.04616,  0.04785,  0.05009,  0.05099,  \
				            0.01597,  0.01707,  0.01787,  0.02050,  0.02403,  0.02542,  0.02862,  0.03339,  \
				            0.03432,  0.04073,  0.04264,  0.04689,  0.04971,  0.05152,  0.05391,  0.05488,  \
				            0.02227,  0.02329,  0.02405,  0.02659,  0.03017,  0.03160,  0.03497,  0.04009,  \
				            0.04108,  0.04807,  0.05017,  0.05486,  0.05802,  0.06004,  0.06274,  0.06384,  \
				            0.02275,  0.02377,  0.02452,  0.02707,  0.03065,  0.03209,  0.03547,  0.04060,  \
				            0.04161,  0.04862,  0.05073,  0.05545,  0.05863,  0.06066,  0.06338,  0.06449,  \
				            0.03355,  0.03457,  0.03533,  0.03792,  0.04160,  0.04310,  0.04665,  0.05207,  \
				            0.05314,  0.06065,  0.06293,  0.06805,  0.07153,  0.07377,  0.07679,  0.07804,  \
				            0.05427,  0.05531,  0.05608,  0.05873,  0.06252,  0.06406,  0.06773,  0.07338,  \
				            0.07450,  0.08241,  0.08482,  0.09028,  0.09401,  0.09643,  0.09983,  0.10107,  \
				            0.08652,  0.08757,  0.08835,  0.09103,  0.09488,  0.09645,  0.10019,  0.10596,  \
				            0.10710,  0.11520,  0.11769,  0.12332,  0.12718,  0.12968,  0.13322,  0.13453 ");
			}
		}

		capacitance () {
			top_plane: AIR;
			bottom_plane: metal1;
			lateral_capacitance (capacitance_template_WxS) {
				index_1 (" 0.0700, 0.0900, 0.1400, 0.2700, 0.2800, 0.5000, 0.9000, 1.5000 ");
				index_2 (" 0.0700, 0.0900, 0.1050, 0.1575, 0.2363, 0.2700, 0.3544, 0.5000,  \
				           0.5316, 0.7973, 0.9000, 1.1960, 1.5000, 1.7940, 2.6910, 269.1035 ");
				values  ("  0.06394,  0.05072,  0.04402,  0.02969,  0.01924,  0.01650,  0.01176,  0.00734,  \
				            0.00671,  0.00354,  0.00289,  0.00177,  0.00117,  0.00084,  0.00039,  0.00000,  \
				            0.06496,  0.05164,  0.04488,  0.03038,  0.01980,  0.01702,  0.01220,  0.00767,  \
				            0.00702,  0.00375,  0.00306,  0.00189,  0.00126,  0.00090,  0.00042,  0.00000,  \
				            0.06684,  0.05337,  0.04651,  0.03178,  0.02096,  0.01810,  0.01313,  0.00839,  \
				            0.00770,  0.00421,  0.00346,  0.00216,  0.00145,  0.00105,  0.00050,  0.00000,  \
				            0.06997,  0.05634,  0.04936,  0.03432,  0.02317,  0.02020,  0.01496,  0.00988,  \
				            0.00913,  0.00521,  0.00435,  0.00279,  0.00192,  0.00142,  0.00069,  0.00000,  \
				            0.07017,  0.05652,  0.04954,  0.03448,  0.02331,  0.02033,  0.01508,  0.00998,  \
				            0.00922,  0.00528,  0.00441,  0.00284,  0.00196,  0.00145,  0.00071,  0.00000,  \
				            0.07336,  0.05961,  0.05255,  0.03727,  0.02583,  0.02274,  0.01726,  0.01182,  \
				            0.01101,  0.00662,  0.00562,  0.00376,  0.00267,  0.00202,  0.00103,  0.00000,  \
				            0.07687,  0.06305,  0.05595,  0.04049,  0.02883,  0.02566,  0.01997,  0.01422,  \
				            0.01334,  0.00850,  0.00735,  0.00515,  0.00380,  0.00296,  0.00162,  0.00000,  \
				            0.08012,  0.06625,  0.05912,  0.04357,  0.03176,  0.02853,  0.02270,  0.01672,  \
				            0.01579,  0.01059,  0.00932,  0.00681,  0.00521,  0.00418,  0.00245,  0.00000 ");
			}
			ground_capacitance (capacitance_template_WxS) {
				index_1 (" 0.0700, 0.0900, 0.1400, 0.2700, 0.2800, 0.5000, 0.9000, 1.5000 ");
				index_2 (" 0.0700, 0.0900, 0.1050, 0.1575, 0.2363, 0.2700, 0.3544, 0.5000,  \
				           0.5316, 0.7973, 0.9000, 1.1960, 1.5000, 1.7940, 2.6910, 269.1035 ");
				values  ("  0.02976,  0.03305,  0.03543,  0.04273,  0.05130,  0.05425,  0.06005,  0.06672,  \
				            0.06778,  0.07329,  0.07440,  0.07665,  0.07776,  0.07848,  0.07942,  0.08020,  \
				            0.03372,  0.03698,  0.03934,  0.04662,  0.05517,  0.05813,  0.06399,  0.07075,  \
				            0.07183,  0.07750,  0.07867,  0.08101,  0.08219,  0.08295,  0.08394,  0.08479,  \
				            0.04345,  0.04666,  0.04898,  0.05616,  0.06469,  0.06766,  0.07359,  0.08055,  \
				            0.08167,  0.08767,  0.08895,  0.09152,  0.09284,  0.09369,  0.09480,  0.09581,  \
				            0.06826,  0.07138,  0.07364,  0.08067,  0.08912,  0.09211,  0.09815,  0.10543,  \
				            0.10662,  0.11322,  0.11469,  0.11770,  0.11933,  0.12038,  0.12183,  0.12323,  \
				            0.07016,  0.07327,  0.07553,  0.08255,  0.09100,  0.09398,  0.10003,  0.10733,  \
				            0.10852,  0.11516,  0.11664,  0.11968,  0.12133,  0.12240,  0.12387,  0.12530,  \
				            0.11144,  0.11449,  0.11670,  0.12361,  0.13201,  0.13501,  0.14116,  0.14874,  \
				            0.15001,  0.15726,  0.15896,  0.16250,  0.16453,  0.16586,  0.16780,  0.16989,  \
				            0.18584,  0.18884,  0.19103,  0.19786,  0.20622,  0.20923,  0.21547,  0.22332,  \
				            0.22466,  0.23253,  0.23446,  0.23858,  0.24108,  0.24277,  0.24541,  0.24864,  \
				            0.29695,  0.29993,  0.30210,  0.30889,  0.31722,  0.32024,  0.32653,  0.33458,  \
				            0.33597,  0.34432,  0.34644,  0.35106,  0.35400,  0.35604,  0.35943,  0.36430 ");
			}
		}

		capacitance () {
			top_plane: AIR;
			bottom_plane: poly;
			lateral_capacitance (capacitance_template_WxS) {
				index_1 (" 0.0700, 0.0900, 0.1400, 0.2700, 0.2800, 0.5000, 0.9000, 1.5000 ");
				index_2 (" 0.0700, 0.0900, 0.1050, 0.1575, 0.2363, 0.2700, 0.3544, 0.5000,  \
				           0.5316, 0.7973, 0.9000, 1.1960, 1.5000, 1.7940, 2.6910, 269.1035 ");
				values  ("  0.06899,  0.05604,  0.04951,  0.03551,  0.02512,  0.02230,  0.01721,  0.01198,  \
				            0.01118,  0.00671,  0.00565,  0.00370,  0.00256,  0.00188,  0.00090,  0.00000,  \
				            0.07043,  0.05734,  0.05070,  0.03646,  0.02586,  0.02298,  0.01777,  0.01241,  \
				            0.01158,  0.00699,  0.00590,  0.00389,  0.00269,  0.00199,  0.00096,  0.00000,  \
				            0.07309,  0.05975,  0.05296,  0.03832,  0.02734,  0.02434,  0.01891,  0.01330,  \
				            0.01243,  0.00759,  0.00643,  0.00426,  0.00298,  0.00221,  0.00108,  0.00000,  \
				            0.07718,  0.06355,  0.05656,  0.04139,  0.02989,  0.02673,  0.02098,  0.01499,  \
				            0.01406,  0.00879,  0.00752,  0.00509,  0.00362,  0.00273,  0.00137,  0.00000,  \
				            0.07741,  0.06376,  0.05677,  0.04157,  0.03005,  0.02687,  0.02111,  0.01510,  \
				            0.01416,  0.00887,  0.00760,  0.00515,  0.00367,  0.00277,  0.00139,  0.00000,  \
				            0.08089,  0.06709,  0.05998,  0.04449,  0.03263,  0.02935,  0.02335,  0.01703,  \
				            0.01603,  0.01036,  0.00897,  0.00624,  0.00455,  0.00350,  0.00184,  0.00000,  \
				            0.08437,  0.07050,  0.06334,  0.04766,  0.03559,  0.03222,  0.02604,  0.01945,  \
				            0.01840,  0.01235,  0.01083,  0.00780,  0.00586,  0.00461,  0.00257,  0.00000,  \
				            0.08756,  0.07364,  0.06644,  0.05067,  0.03846,  0.03504,  0.02873,  0.02195,  \
				            0.02086,  0.01451,  0.01288,  0.00958,  0.00742,  0.00598,  0.00354,  0.00000 ");
			}
			ground_capacitance (capacitance_template_WxS) {
				index_1 (" 0.0700, 0.0900, 0.1400, 0.2700, 0.2800, 0.5000, 0.9000, 1.5000 ");
				index_2 (" 0.0700, 0.0900, 0.1050, 0.1575, 0.2363, 0.2700, 0.3544, 0.5000,  \
				           0.5316, 0.7973, 0.9000, 1.1960, 1.5000, 1.7940, 2.6910, 269.1035 ");
				values  ("  0.01357,  0.01510,  0.01621,  0.01980,  0.02451,  0.02630,  0.03028,  0.03574,  \
				            0.03673,  0.04295,  0.04458,  0.04796,  0.05002,  0.05133,  0.05319,  0.05501,  \
				            0.01512,  0.01661,  0.01770,  0.02125,  0.02593,  0.02773,  0.03173,  0.03726,  \
				            0.03826,  0.04461,  0.04629,  0.04975,  0.05190,  0.05326,  0.05521,  0.05714,  \
				            0.01880,  0.02024,  0.02129,  0.02476,  0.02942,  0.03123,  0.03526,  0.04091,  \
				            0.04195,  0.04854,  0.05030,  0.05400,  0.05629,  0.05776,  0.05989,  0.06206,  \
				            0.02799,  0.02937,  0.03039,  0.03377,  0.03839,  0.04019,  0.04428,  0.05008,  \
				            0.05115,  0.05811,  0.06002,  0.06408,  0.06668,  0.06836,  0.07089,  0.07365,  \
				            0.02869,  0.03007,  0.03108,  0.03446,  0.03907,  0.04088,  0.04497,  0.05077,  \
				            0.05185,  0.05883,  0.06074,  0.06483,  0.06744,  0.06914,  0.07170,  0.07450,  \
				            0.04394,  0.04527,  0.04625,  0.04955,  0.05408,  0.05587,  0.05996,  0.06585,  \
				            0.06695,  0.07424,  0.07629,  0.08074,  0.08369,  0.08565,  0.08872,  0.09239,  \
				            0.07113,  0.07242,  0.07338,  0.07659,  0.08104,  0.08281,  0.08687,  0.09282,  \
				            0.09394,  0.10152,  0.10371,  0.10855,  0.11188,  0.11416,  0.11802,  0.12301,  \
				            0.11135,  0.11262,  0.11356,  0.11671,  0.12110,  0.12286,  0.12690,  0.13288,  \
				            0.13403,  0.14182,  0.14412,  0.14930,  0.15296,  0.15553,  0.16011,  0.16698 ");
			}
		}

		capacitance () {
			top_plane: AIR;
			bottom_plane: SUBSTRATE;
			lateral_capacitance (capacitance_template_WxS) {
				index_1 (" 0.0700, 0.0900, 0.1400, 0.2700, 0.2800, 0.5000, 0.9000, 1.5000 ");
				index_2 (" 0.0700, 0.0900, 0.1050, 0.1575, 0.2363, 0.2700, 0.3544, 0.5000,  \
				           0.5316, 0.7973, 0.9000, 1.1960, 1.5000, 1.7940, 2.6910, 269.1035 ");
				values  ("  0.07053,  0.05771,  0.05126,  0.03751,  0.02739,  0.02465,  0.01969,  0.01451,  \
				            0.01369,  0.00894,  0.00775,  0.00539,  0.00389,  0.00295,  0.00149,  0.00000,  \
				            0.07211,  0.05913,  0.05258,  0.03859,  0.02825,  0.02544,  0.02036,  0.01502,  \
				            0.01418,  0.00929,  0.00805,  0.00562,  0.00407,  0.00310,  0.00156,  0.00000,  \
				            0.07510,  0.06187,  0.05515,  0.04073,  0.02998,  0.02704,  0.02171,  0.01609,  \
				            0.01519,  0.01001,  0.00870,  0.00610,  0.00444,  0.00339,  0.00173,  0.00000,  \
				            0.07992,  0.06636,  0.05943,  0.04440,  0.03303,  0.02989,  0.02416,  0.01807,  \
				            0.01710,  0.01143,  0.00999,  0.00709,  0.00523,  0.00404,  0.00211,  0.00000,  \
				            0.08019,  0.06662,  0.05967,  0.04462,  0.03321,  0.03006,  0.02431,  0.01819,  \
				            0.01721,  0.01152,  0.01007,  0.00716,  0.00528,  0.00408,  0.00214,  0.00000,  \
				            0.08435,  0.07057,  0.06348,  0.04802,  0.03617,  0.03288,  0.02682,  0.02032,  \
				            0.01928,  0.01316,  0.01159,  0.00839,  0.00630,  0.00494,  0.00268,  0.00000,  \
				            0.08814,  0.07426,  0.06710,  0.05141,  0.03928,  0.03588,  0.02960,  0.02281,  \
				            0.02171,  0.01522,  0.01353,  0.01004,  0.00772,  0.00617,  0.00353,  0.00000,  \
				            0.09134,  0.07741,  0.07021,  0.05441,  0.04214,  0.03868,  0.03228,  0.02530,  \
				            0.02417,  0.01740,  0.01561,  0.01188,  0.00935,  0.00763,  0.00460,  0.00000 ");
			}
			ground_capacitance (capacitance_template_WxS) {
				index_1 (" 0.0700, 0.0900, 0.1400, 0.2700, 0.2800, 0.5000, 0.9000, 1.5000 ");
				index_2 (" 0.0700, 0.0900, 0.1050, 0.1575, 0.2363, 0.2700, 0.3544, 0.5000,  \
				           0.5316, 0.7973, 0.9000, 1.1960, 1.5000, 1.7940, 2.6910, 269.1035 ");
				values  ("  0.00956,  0.01068,  0.01149,  0.01409,  0.01749,  0.01878,  0.02170,  0.02590,  \
				            0.02670,  0.03214,  0.03374,  0.03731,  0.03978,  0.04147,  0.04416,  0.04711,  \
				            0.01068,  0.01175,  0.01253,  0.01506,  0.01839,  0.01967,  0.02259,  0.02683,  \
				            0.02764,  0.03318,  0.03482,  0.03846,  0.04102,  0.04276,  0.04555,  0.04866,  \
				            0.01322,  0.01421,  0.01493,  0.01732,  0.02056,  0.02184,  0.02475,  0.02906,  \
				            0.02990,  0.03562,  0.03734,  0.04120,  0.04391,  0.04576,  0.04877,  0.05219,  \
				            0.01909,  0.02000,  0.02067,  0.02293,  0.02607,  0.02733,  0.03027,  0.03468,  \
				            0.03554,  0.04157,  0.04340,  0.04759,  0.05058,  0.05266,  0.05610,  0.06027,  \
				            0.01953,  0.02043,  0.02110,  0.02335,  0.02649,  0.02775,  0.03069,  0.03511,  \
				            0.03597,  0.04201,  0.04385,  0.04806,  0.05107,  0.05316,  0.05663,  0.06085,  \
				            0.02894,  0.02981,  0.03045,  0.03264,  0.03572,  0.03697,  0.03991,  0.04440,  \
				            0.04528,  0.05155,  0.05349,  0.05799,  0.06127,  0.06360,  0.06759,  0.07285,  \
				            0.04579,  0.04663,  0.04725,  0.04937,  0.05239,  0.05362,  0.05653,  0.06103,  \
				            0.06193,  0.06835,  0.07038,  0.07515,  0.07872,  0.08131,  0.08603,  0.09280,  \
				            0.07066,  0.07147,  0.07208,  0.07415,  0.07710,  0.07831,  0.08119,  0.08567,  \
				            0.08657,  0.09309,  0.09518,  0.10016,  0.10398,  0.10680,  0.11213,  0.12093 ");
			}
		}
	}

	layer (metal1) {
		resistance: 0.380000

		capacitance () {
			top_plane: metal2;
			bottom_plane: poly;
			lateral_capacitance (capacitance_template_WxS) {
				index_1 (" 0.0700, 0.0900, 0.1400, 0.2700, 0.2800, 0.5000, 0.9000, 1.5000 ");
				index_2 (" 0.0650, 0.0900, 0.0975, 0.1462, 0.2194, 0.2700, 0.3291, 0.4936,  \
				           0.5000, 0.7404, 0.9000, 1.1106, 1.5000, 1.6659, 2.4988, 249.8818 ");
				values  ("  0.05612,  0.03899,  0.03546,  0.02048,  0.00993,  0.00618,  0.00357,  0.00081,  \
				            0.00076,  0.00009,  0.00002,  0.00000,  0.00000,  0.00000,  0.00000,  0.00000,  \
				            0.05637,  0.03916,  0.03562,  0.02056,  0.00997,  0.00621,  0.00358,  0.00081,  \
				            0.00076,  0.00009,  0.00002,  0.00000,  0.00000,  0.00000,  0.00000,  0.00000,  \
				            0.05658,  0.03931,  0.03575,  0.02064,  0.01001,  0.00623,  0.00360,  0.00082,  \
				            0.00076,  0.00009,  0.00002,  0.00000,  0.00000,  0.00000,  0.00000,  0.00000,  \
				            0.05663,  0.03935,  0.03579,  0.02066,  0.01002,  0.00624,  0.00360,  0.00082,  \
				            0.00076,  0.00009,  0.00002,  0.00000,  0.00000,  0.00000,  0.00000,  0.00000,  \
				            0.05664,  0.03935,  0.03579,  0.02066,  0.01002,  0.00624,  0.00360,  0.00082,  \
				            0.00076,  0.00009,  0.00002,  0.00000,  0.00000,  0.00000,  0.00000,  0.00000,  \
				            0.05662,  0.03934,  0.03578,  0.02066,  0.01002,  0.00624,  0.00360,  0.00082,  \
				            0.00076,  0.00009,  0.00002,  0.00000,  0.00000,  0.00000,  0.00000,  0.00000,  \
				            0.05664,  0.03935,  0.03579,  0.02066,  0.01002,  0.00624,  0.00360,  0.00082,  \
				            0.00076,  0.00009,  0.00002,  0.00000,  0.00000,  0.00000,  0.00000,  0.00000,  \
				            0.05664,  0.03935,  0.03579,  0.02066,  0.01002,  0.00624,  0.00360,  0.00082,  \
				            0.00076,  0.00009,  0.00002,  0.00000,  0.00000,  0.00000,  0.00000,  0.00000 ");
			}
			ground_capacitance (capacitance_template_WxS) {
				index_1 (" 0.0700, 0.0900, 0.1400, 0.2700, 0.2800, 0.5000, 0.9000, 1.5000 ");
				index_2 (" 0.0650, 0.0900, 0.0975, 0.1462, 0.2194, 0.2700, 0.3291, 0.4936,  \
				           0.5000, 0.7404, 0.9000, 1.1106, 1.5000, 1.6659, 2.4988, 249.8818 ");
				values  ("  0.05792,  0.06622,  0.06861,  0.08193,  0.09595,  0.10228,  0.10687,  0.11258,  \
				            0.11239,  0.11402,  0.11399,  0.11416,  0.11407,  0.11413,  0.11430,  0.11429,  \
				            0.06672,  0.07508,  0.07748,  0.09087,  0.10496,  0.11131,  0.11592,  0.12165,  \
				            0.12147,  0.12310,  0.12308,  0.12325,  0.12315,  0.12321,  0.12337,  0.12336,  \
				            0.08881,  0.09723,  0.09964,  0.11310,  0.12724,  0.13362,  0.13824,  0.14399,  \
				            0.14381,  0.14545,  0.14542,  0.14559,  0.14550,  0.14556,  0.14571,  0.14571,  \
				            0.14658,  0.15501,  0.15742,  0.17090,  0.18505,  0.19144,  0.19607,  0.20182,  \
				            0.20164,  0.20328,  0.20326,  0.20343,  0.20333,  0.20339,  0.20355,  0.20355,  \
				            0.15102,  0.15946,  0.16187,  0.17535,  0.18951,  0.19589,  0.20052,  0.20627,  \
				            0.20609,  0.20774,  0.20771,  0.20788,  0.20778,  0.20785,  0.20801,  0.20800,  \
				            0.24891,  0.25735,  0.25976,  0.27323,  0.28739,  0.29378,  0.29840,  0.30416,  \
				            0.30397,  0.30562,  0.30559,  0.30576,  0.30567,  0.30573,  0.30589,  0.30588,  \
				            0.42687,  0.43531,  0.43772,  0.45120,  0.46536,  0.47174,  0.47637,  0.48212,  \
				            0.48194,  0.48358,  0.48356,  0.48373,  0.48364,  0.48369,  0.48366,  0.48385,  \
				            0.69381,  0.70225,  0.70467,  0.71814,  0.73230,  0.73869,  0.74332,  0.74907,  \
				            0.74889,  0.75053,  0.75051,  0.75068,  0.75058,  0.75064,  0.75061,  0.75080 ");
			}
		}

		capacitance () {
			top_plane: metal2;
			bottom_plane: SUBSTRATE;
			lateral_capacitance (capacitance_template_WxS) {
				index_1 (" 0.0700, 0.0900, 0.1400, 0.2700, 0.2800, 0.5000, 0.9000, 1.5000 ");
				index_2 (" 0.0650, 0.0900, 0.0975, 0.1462, 0.2194, 0.2700, 0.3291, 0.4936,  \
				           0.5000, 0.7404, 0.9000, 1.1106, 1.5000, 1.6659, 2.4988, 249.8818 ");
				values  ("  0.06204,  0.04523,  0.04177,  0.02694,  0.01592,  0.01154,  0.00805,  0.00316,  \
				            0.00304,  0.00083,  0.00036,  0.00012,  0.00002,  0.00001,  0.00000,  0.00000,  \
				            0.06285,  0.04588,  0.04238,  0.02737,  0.01620,  0.01175,  0.00821,  0.00323,  \
				            0.00311,  0.00085,  0.00037,  0.00013,  0.00002,  0.00001,  0.00000,  0.00000,  \
				            0.06406,  0.04687,  0.04332,  0.02807,  0.01666,  0.01210,  0.00847,  0.00335,  \
				            0.00322,  0.00088,  0.00038,  0.00013,  0.00002,  0.00001,  0.00000,  0.00000,  \
				            0.06530,  0.04793,  0.04433,  0.02882,  0.01717,  0.01250,  0.00877,  0.00348,  \
				            0.00334,  0.00092,  0.00040,  0.00014,  0.00002,  0.00001,  0.00000,  0.00000,  \
				            0.06536,  0.04798,  0.04438,  0.02885,  0.01719,  0.01251,  0.00878,  0.00348,  \
				            0.00335,  0.00092,  0.00040,  0.00014,  0.00002,  0.00001,  0.00000,  0.00000,  \
				            0.06580,  0.04836,  0.04474,  0.02913,  0.01738,  0.01266,  0.00889,  0.00353,  \
				            0.00340,  0.00094,  0.00041,  0.00014,  0.00002,  0.00001,  0.00000,  0.00000,  \
				            0.06590,  0.04845,  0.04482,  0.02919,  0.01742,  0.01269,  0.00891,  0.00354,  \
				            0.00341,  0.00094,  0.00041,  0.00014,  0.00002,  0.00001,  0.00000,  0.00000,  \
				            0.06591,  0.04845,  0.04483,  0.02920,  0.01743,  0.01269,  0.00892,  0.00354,  \
				            0.00341,  0.00094,  0.00041,  0.00014,  0.00002,  0.00001,  0.00000,  0.00000 ");
			}
			ground_capacitance (capacitance_template_WxS) {
				index_1 (" 0.0700, 0.0900, 0.1400, 0.2700, 0.2800, 0.5000, 0.9000, 1.5000 ");
				index_2 (" 0.0650, 0.0900, 0.0975, 0.1462, 0.2194, 0.2700, 0.3291, 0.4936,  \
				           0.5000, 0.7404, 0.9000, 1.1106, 1.5000, 1.6659, 2.4988, 249.8818 ");
				values  ("  0.03600,  0.04115,  0.04265,  0.05152,  0.06222,  0.06798,  0.07309,  0.08169,  \
				            0.08175,  0.08622,  0.08709,  0.08766,  0.08783,  0.08789,  0.08792,  0.08791,  \
				            0.04085,  0.04606,  0.04758,  0.05654,  0.06738,  0.07321,  0.07840,  0.08715,  \
				            0.08721,  0.09176,  0.09266,  0.09324,  0.09342,  0.09348,  0.09349,  0.09349,  \
				            0.05319,  0.05848,  0.06002,  0.06912,  0.08016,  0.08611,  0.09143,  0.10043,  \
				            0.10050,  0.10520,  0.10613,  0.10674,  0.10692,  0.10698,  0.10698,  0.10698,  \
				            0.08609,  0.09145,  0.09302,  0.10227,  0.11353,  0.11962,  0.12508,  0.13435,  \
				            0.13444,  0.13931,  0.14029,  0.14092,  0.14111,  0.14117,  0.14116,  0.14116,  \
				            0.08864,  0.09401,  0.09558,  0.10484,  0.11611,  0.12220,  0.12767,  0.13695,  \
				            0.13704,  0.14192,  0.14290,  0.14352,  0.14372,  0.14378,  0.14377,  0.14377,  \
				            0.14526,  0.15067,  0.15224,  0.16157,  0.17292,  0.17907,  0.18459,  0.19397,  \
				            0.19407,  0.19900,  0.20000,  0.20064,  0.20084,  0.20090,  0.20089,  0.20089,  \
				            0.24868,  0.25410,  0.25567,  0.26501,  0.27638,  0.28254,  0.28807,  0.29748,  \
				            0.29757,  0.30252,  0.30352,  0.30416,  0.30436,  0.30442,  0.30442,  0.30441,  \
				            0.40390,  0.40932,  0.41089,  0.42023,  0.43160,  0.43776,  0.44330,  0.45270,  \
				            0.45279,  0.45775,  0.45875,  0.45939,  0.45959,  0.45965,  0.45964,  0.45964 ");
			}
		}

		capacitance () {
			top_plane: metal3;
			bottom_plane: poly;
			lateral_capacitance (capacitance_template_WxS) {
				index_1 (" 0.0700, 0.0900, 0.1400, 0.2700, 0.2800, 0.5000, 0.9000, 1.5000 ");
				index_2 (" 0.0650, 0.0900, 0.0975, 0.1462, 0.2194, 0.2700, 0.3291, 0.4936,  \
				           0.5000, 0.7404, 0.9000, 1.1106, 1.5000, 1.6659, 2.4988, 249.8818 ");
				values  ("  0.06056,  0.04380,  0.04037,  0.02574,  0.01505,  0.01087,  0.00758,  0.00301,  \
				            0.00290,  0.00081,  0.00036,  0.00013,  0.00002,  0.00001,  0.00000,  0.00000,  \
				            0.06134,  0.04445,  0.04098,  0.02619,  0.01536,  0.01111,  0.00776,  0.00309,  \
				            0.00297,  0.00084,  0.00037,  0.00013,  0.00002,  0.00001,  0.00000,  0.00000,  \
				            0.06259,  0.04551,  0.04199,  0.02696,  0.01588,  0.01151,  0.00807,  0.00322,  \
				            0.00310,  0.00087,  0.00039,  0.00013,  0.00002,  0.00001,  0.00000,  0.00000,  \
				            0.06405,  0.04677,  0.04320,  0.02788,  0.01651,  0.01201,  0.00843,  0.00339,  \
				            0.00326,  0.00092,  0.00041,  0.00014,  0.00002,  0.00001,  0.00000,  0.00000,  \
				            0.06412,  0.04682,  0.04325,  0.02792,  0.01654,  0.01203,  0.00845,  0.00339,  \
				            0.00327,  0.00092,  0.00041,  0.00014,  0.00002,  0.00001,  0.00000,  0.00000,  \
				            0.06469,  0.04731,  0.04372,  0.02828,  0.01678,  0.01222,  0.00859,  0.00346,  \
				            0.00333,  0.00094,  0.00042,  0.00015,  0.00002,  0.00001,  0.00000,  0.00000,  \
				            0.06482,  0.04742,  0.04382,  0.02835,  0.01684,  0.01226,  0.00862,  0.00347,  \
				            0.00334,  0.00095,  0.00042,  0.00015,  0.00002,  0.00001,  0.00000,  0.00000,  \
				            0.06483,  0.04743,  0.04383,  0.02836,  0.01684,  0.01226,  0.00863,  0.00347,  \
				            0.00334,  0.00095,  0.00042,  0.00015,  0.00002,  0.00001,  0.00000,  0.00000 ");
			}
			ground_capacitance (capacitance_template_WxS) {
				index_1 (" 0.0700, 0.0900, 0.1400, 0.2700, 0.2800, 0.5000, 0.9000, 1.5000 ");
				index_2 (" 0.0650, 0.0900, 0.0975, 0.1462, 0.2194, 0.2700, 0.3291, 0.4936,  \
				           0.5000, 0.7404, 0.9000, 1.1106, 1.5000, 1.6659, 2.4988, 249.8818 ");
				values  ("  0.04351,  0.04943,  0.05113,  0.06081,  0.07186,  0.07758,  0.08249,  0.09069,  \
				            0.09068,  0.09495,  0.09575,  0.09634,  0.09648,  0.09655,  0.09667,  0.09666,  \
				            0.04961,  0.05555,  0.05726,  0.06702,  0.07818,  0.08399,  0.08898,  0.09734,  \
				            0.09734,  0.10170,  0.10253,  0.10313,  0.10329,  0.10336,  0.10345,  0.10345,  \
				            0.06494,  0.07093,  0.07266,  0.08252,  0.09389,  0.09983,  0.10497,  0.11361,  \
				            0.11362,  0.11816,  0.11904,  0.11966,  0.11983,  0.11990,  0.11999,  0.11998,  \
				            0.10551,  0.11157,  0.11332,  0.12334,  0.13496,  0.14107,  0.14638,  0.15537,  \
				            0.15539,  0.16014,  0.16107,  0.16173,  0.16191,  0.16198,  0.16206,  0.16206,  \
				            0.10866,  0.11472,  0.11647,  0.12650,  0.13814,  0.14425,  0.14957,  0.15857,  \
				            0.15859,  0.16335,  0.16429,  0.16494,  0.16512,  0.16519,  0.16528,  0.16527,  \
				            0.17839,  0.18449,  0.18626,  0.19636,  0.20811,  0.21428,  0.21968,  0.22881,  \
				            0.22884,  0.23368,  0.23464,  0.23530,  0.23549,  0.23556,  0.23564,  0.23564,  \
				            0.30579,  0.31190,  0.31367,  0.32379,  0.33555,  0.34175,  0.34715,  0.35632,  \
				            0.35634,  0.36120,  0.36216,  0.36283,  0.36302,  0.36309,  0.36309,  0.36317,  \
				            0.49700,  0.50311,  0.50488,  0.51500,  0.52677,  0.53296,  0.53837,  0.54753,  \
				            0.54756,  0.55242,  0.55338,  0.55405,  0.55424,  0.55431,  0.55431,  0.55439 ");
			}
		}

		capacitance () {
			top_plane: metal3;
			bottom_plane: SUBSTRATE;
			lateral_capacitance (capacitance_template_WxS) {
				index_1 (" 0.0700, 0.0900, 0.1400, 0.2700, 0.2800, 0.5000, 0.9000, 1.5000 ");
				index_2 (" 0.0650, 0.0900, 0.0975, 0.1462, 0.2194, 0.2700, 0.3291, 0.4936,  \
				           0.5000, 0.7404, 0.9000, 1.1106, 1.5000, 1.6659, 2.4988, 249.8818 ");
				values  ("  0.06663,  0.05020,  0.04684,  0.03244,  0.02152,  0.01695,  0.01308,  0.00676,  \
				            0.00658,  0.00264,  0.00145,  0.00067,  0.00016,  0.00009,  0.00000,  0.00000,  \
				            0.06793,  0.05130,  0.04788,  0.03321,  0.02206,  0.01737,  0.01340,  0.00693,  \
				            0.00674,  0.00270,  0.00149,  0.00069,  0.00017,  0.00009,  0.00000,  0.00000,  \
				            0.07013,  0.05315,  0.04965,  0.03455,  0.02297,  0.01810,  0.01397,  0.00722,  \
				            0.00703,  0.00282,  0.00155,  0.00071,  0.00017,  0.00010,  0.00000,  0.00000,  \
				            0.07269,  0.05534,  0.05174,  0.03613,  0.02407,  0.01896,  0.01464,  0.00757,  \
				            0.00737,  0.00295,  0.00162,  0.00075,  0.00018,  0.00010,  0.00000,  0.00000,  \
				            0.07279,  0.05543,  0.05183,  0.03619,  0.02411,  0.01900,  0.01467,  0.00758,  \
				            0.00738,  0.00296,  0.00163,  0.00075,  0.00018,  0.00010,  0.00000,  0.00000,  \
				            0.07377,  0.05627,  0.05263,  0.03680,  0.02453,  0.01933,  0.01492,  0.00771,  \
				            0.00751,  0.00301,  0.00166,  0.00076,  0.00019,  0.00010,  0.00000,  0.00000,  \
				            0.07398,  0.05645,  0.05280,  0.03693,  0.02462,  0.01940,  0.01498,  0.00774,  \
				            0.00753,  0.00302,  0.00166,  0.00076,  0.00019,  0.00010,  0.00001,  0.00000,  \
				            0.07400,  0.05646,  0.05281,  0.03694,  0.02462,  0.01940,  0.01498,  0.00774,  \
				            0.00754,  0.00302,  0.00166,  0.00076,  0.00019,  0.00010,  0.00001,  0.00000 ");
			}
			ground_capacitance (capacitance_template_WxS) {
				index_1 (" 0.0700, 0.0900, 0.1400, 0.2700, 0.2800, 0.5000, 0.9000, 1.5000 ");
				index_2 (" 0.0650, 0.0900, 0.0975, 0.1462, 0.2194, 0.2700, 0.3291, 0.4936,  \
				           0.5000, 0.7404, 0.9000, 1.1106, 1.5000, 1.6659, 2.4988, 249.8818 ");
				values  ("  0.02105,  0.02384,  0.02466,  0.02970,  0.03646,  0.04059,  0.04480,  0.05365,  \
				            0.05385,  0.06077,  0.06300,  0.06461,  0.06563,  0.06581,  0.06592,  0.06592,  \
				            0.02329,  0.02609,  0.02691,  0.03203,  0.03893,  0.04315,  0.04746,  0.05651,  \
				            0.05672,  0.06381,  0.06609,  0.06774,  0.06879,  0.06897,  0.06907,  0.06908,  \
				            0.02902,  0.03188,  0.03272,  0.03799,  0.04515,  0.04953,  0.05401,  0.06343,  \
				            0.06366,  0.07102,  0.07341,  0.07513,  0.07622,  0.07641,  0.07650,  0.07651,  \
				            0.04492,  0.04790,  0.04879,  0.05429,  0.06179,  0.06638,  0.07108,  0.08094,  \
				            0.08118,  0.08889,  0.09139,  0.09319,  0.09434,  0.09453,  0.09462,  0.09463,  \
				            0.04619,  0.04918,  0.05006,  0.05558,  0.06309,  0.06769,  0.07240,  0.08227,  \
				            0.08252,  0.09024,  0.09275,  0.09455,  0.09570,  0.09589,  0.09598,  0.09599,  \
				            0.07476,  0.07781,  0.07871,  0.08434,  0.09200,  0.09669,  0.10148,  0.11152,  \
				            0.11177,  0.11963,  0.12218,  0.12401,  0.12518,  0.12538,  0.12547,  0.12548,  \
				            0.12763,  0.13070,  0.13161,  0.13726,  0.14495,  0.14965,  0.15446,  0.16454,  \
				            0.16479,  0.17267,  0.17523,  0.17707,  0.17825,  0.17844,  0.17864,  0.17854,  \
				            0.20712,  0.21019,  0.21109,  0.21675,  0.22444,  0.22914,  0.23395,  0.24403,  \
				            0.24428,  0.25216,  0.25473,  0.25657,  0.25774,  0.25794,  0.25814,  0.25803 ");
			}
		}

		capacitance () {
			top_plane: metal4;
			bottom_plane: poly;
			lateral_capacitance (capacitance_template_WxS) {
				index_1 (" 0.0700, 0.0900, 0.1400, 0.2700, 0.2800, 0.5000, 0.9000, 1.5000 ");
				index_2 (" 0.0650, 0.0900, 0.0975, 0.1462, 0.2194, 0.2700, 0.3291, 0.4936,  \
				           0.5000, 0.7404, 0.9000, 1.1106, 1.5000, 1.6659, 2.4988, 249.8818 ");
				values  ("  0.06132,  0.04467,  0.04128,  0.02686,  0.01639,  0.01229,  0.00902,  0.00424,  \
				            0.00411,  0.00155,  0.00084,  0.00039,  0.00010,  0.00006,  0.00000,  0.00000,  \
				            0.06222,  0.04546,  0.04203,  0.02745,  0.01683,  0.01265,  0.00931,  0.00440,  \
				            0.00427,  0.00162,  0.00088,  0.00041,  0.00010,  0.00006,  0.00000,  0.00000,  \
				            0.06382,  0.04687,  0.04339,  0.02856,  0.01767,  0.01335,  0.00988,  0.00472,  \
				            0.00458,  0.00175,  0.00096,  0.00044,  0.00011,  0.00006,  0.00000,  0.00000,  \
				            0.06613,  0.04895,  0.04541,  0.03024,  0.01897,  0.01444,  0.01077,  0.00522,  \
				            0.00507,  0.00196,  0.00108,  0.00050,  0.00013,  0.00007,  0.00000,  0.00000,  \
				            0.06625,  0.04906,  0.04551,  0.03032,  0.01903,  0.01449,  0.01081,  0.00525,  \
				            0.00510,  0.00197,  0.00108,  0.00050,  0.00013,  0.00007,  0.00000,  0.00000,  \
				            0.06774,  0.05041,  0.04683,  0.03143,  0.01989,  0.01522,  0.01140,  0.00558,  \
				            0.00543,  0.00212,  0.00116,  0.00054,  0.00014,  0.00008,  0.00000,  0.00000,  \
				            0.06841,  0.05102,  0.04742,  0.03192,  0.02027,  0.01554,  0.01167,  0.00574,  \
				            0.00558,  0.00218,  0.00120,  0.00056,  0.00014,  0.00008,  0.00000,  0.00000,  \
				            0.06853,  0.05112,  0.04752,  0.03200,  0.02033,  0.01559,  0.01171,  0.00576,  \
				            0.00560,  0.00219,  0.00121,  0.00056,  0.00014,  0.00008,  0.00000,  0.00000 ");
			}
			ground_capacitance (capacitance_template_WxS) {
				index_1 (" 0.0700, 0.0900, 0.1400, 0.2700, 0.2800, 0.5000, 0.9000, 1.5000 ");
				index_2 (" 0.0650, 0.0900, 0.0975, 0.1462, 0.2194, 0.2700, 0.3291, 0.4936,  \
				           0.5000, 0.7404, 0.9000, 1.1106, 1.5000, 1.6659, 2.4988, 249.8818 ");
				values  ("  0.04145,  0.04698,  0.04856,  0.05748,  0.06756,  0.07282,  0.07740,  0.08551,  \
				            0.08553,  0.09052,  0.09180,  0.09282,  0.09336,  0.09350,  0.09369,  0.09369,  \
				            0.04716,  0.05268,  0.05426,  0.06320,  0.07337,  0.07869,  0.08336,  0.09166,  \
				            0.09169,  0.09684,  0.09819,  0.09924,  0.09981,  0.09995,  0.10013,  0.10014,  \
				            0.06139,  0.06689,  0.06847,  0.07745,  0.08777,  0.09322,  0.09804,  0.10672,  \
				            0.10677,  0.11224,  0.11370,  0.11484,  0.11546,  0.11560,  0.11579,  0.11579,  \
				            0.09866,  0.10417,  0.10576,  0.11483,  0.12538,  0.13104,  0.13611,  0.14537,  \
				            0.14544,  0.15142,  0.15306,  0.15433,  0.15504,  0.15520,  0.15539,  0.15539,  \
				            0.10155,  0.10706,  0.10865,  0.11772,  0.12829,  0.13396,  0.13904,  0.14834,  \
				            0.14840,  0.15441,  0.15606,  0.15734,  0.15805,  0.15821,  0.15840,  0.15840,  \
				            0.16553,  0.17109,  0.17269,  0.18186,  0.19263,  0.19844,  0.20369,  0.21338,  \
				            0.21346,  0.21981,  0.22158,  0.22294,  0.22371,  0.22388,  0.22408,  0.22408,  \
				            0.28308,  0.28867,  0.29028,  0.29951,  0.31037,  0.31624,  0.32157,  0.33143,  \
				            0.33152,  0.33802,  0.33984,  0.34124,  0.34204,  0.34221,  0.34235,  0.34242,  \
				            0.46002,  0.46561,  0.46722,  0.47646,  0.48734,  0.49322,  0.49856,  0.50845,  \
				            0.50854,  0.51506,  0.51690,  0.51830,  0.51911,  0.51928,  0.51942,  0.51949 ");
			}
		}

		capacitance () {
			top_plane: metal4;
			bottom_plane: SUBSTRATE;
			lateral_capacitance (capacitance_template_WxS) {
				index_1 (" 0.0700, 0.0900, 0.1400, 0.2700, 0.2800, 0.5000, 0.9000, 1.5000 ");
				index_2 (" 0.0650, 0.0900, 0.0975, 0.1462, 0.2194, 0.2700, 0.3291, 0.4936,  \
				           0.5000, 0.7404, 0.9000, 1.1106, 1.5000, 1.6659, 2.4988, 249.8818 ");
				values  ("  0.06757,  0.05124,  0.04792,  0.03372,  0.02307,  0.01863,  0.01484,  0.00851,  \
				            0.00832,  0.00397,  0.00247,  0.00134,  0.00044,  0.00028,  0.00003,  0.00000,  \
				            0.06898,  0.05246,  0.04908,  0.03463,  0.02373,  0.01917,  0.01528,  0.00877,  \
				            0.00857,  0.00409,  0.00254,  0.00139,  0.00046,  0.00029,  0.00003,  0.00000,  \
				            0.07148,  0.05464,  0.05117,  0.03629,  0.02495,  0.02018,  0.01611,  0.00925,  \
				            0.00905,  0.00433,  0.00269,  0.00146,  0.00048,  0.00030,  0.00003,  0.00000,  \
				            0.07486,  0.05761,  0.05404,  0.03859,  0.02668,  0.02161,  0.01728,  0.00996,  \
				            0.00974,  0.00467,  0.00291,  0.00158,  0.00052,  0.00033,  0.00003,  0.00000,  \
				            0.07502,  0.05776,  0.05418,  0.03870,  0.02676,  0.02168,  0.01734,  0.00999,  \
				            0.00977,  0.00469,  0.00292,  0.00159,  0.00052,  0.00033,  0.00003,  0.00000,  \
				            0.07686,  0.05940,  0.05577,  0.04000,  0.02775,  0.02252,  0.01803,  0.01040,  \
				            0.01018,  0.00489,  0.00305,  0.00166,  0.00055,  0.00034,  0.00003,  0.00000,  \
				            0.07759,  0.06005,  0.05640,  0.04052,  0.02814,  0.02285,  0.01830,  0.01057,  \
				            0.01035,  0.00497,  0.00311,  0.00169,  0.00056,  0.00035,  0.00004,  0.00000,  \
				            0.07770,  0.06015,  0.05650,  0.04060,  0.02821,  0.02290,  0.01835,  0.01060,  \
				            0.01037,  0.00499,  0.00311,  0.00169,  0.00056,  0.00035,  0.00004,  0.00000 ");
			}
			ground_capacitance (capacitance_template_WxS) {
				index_1 (" 0.0700, 0.0900, 0.1400, 0.2700, 0.2800, 0.5000, 0.9000, 1.5000 ");
				index_2 (" 0.0650, 0.0900, 0.0975, 0.1462, 0.2194, 0.2700, 0.3291, 0.4936,  \
				           0.5000, 0.7404, 0.9000, 1.1106, 1.5000, 1.6659, 2.4988, 249.8818 ");
				values  ("  0.01859,  0.02101,  0.02171,  0.02598,  0.03163,  0.03510,  0.03870,  0.04662,  \
				            0.04682,  0.05387,  0.05655,  0.05874,  0.06053,  0.06089,  0.06134,  0.06139,  \
				            0.02049,  0.02287,  0.02357,  0.02785,  0.03359,  0.03714,  0.04081,  0.04894,  \
				            0.04914,  0.05638,  0.05915,  0.06140,  0.06325,  0.06362,  0.06408,  0.06413,  \
				            0.02518,  0.02755,  0.02825,  0.03259,  0.03852,  0.04220,  0.04603,  0.05454,  \
				            0.05476,  0.06236,  0.06528,  0.06768,  0.06963,  0.07002,  0.07049,  0.07055,  \
				            0.03788,  0.04032,  0.04104,  0.04555,  0.05176,  0.05565,  0.05971,  0.06876,  \
				            0.06901,  0.07714,  0.08029,  0.08287,  0.08498,  0.08540,  0.08590,  0.08596,  \
				            0.03889,  0.04133,  0.04206,  0.04658,  0.05280,  0.05670,  0.06077,  0.06985,  \
				            0.07010,  0.07826,  0.08142,  0.08401,  0.08612,  0.08654,  0.08704,  0.08711,  \
				            0.06182,  0.06432,  0.06506,  0.06971,  0.07613,  0.08015,  0.08437,  0.09377,  \
				            0.09403,  0.10250,  0.10579,  0.10849,  0.11070,  0.11114,  0.11166,  0.11173,  \
				            0.10491,  0.10745,  0.10820,  0.11290,  0.11940,  0.12346,  0.12774,  0.13726,  \
				            0.13753,  0.14613,  0.14947,  0.15221,  0.15447,  0.15491,  0.15557,  0.15552,  \
				            0.17014,  0.17268,  0.17343,  0.17814,  0.18465,  0.18872,  0.19300,  0.20255,  \
				            0.20282,  0.21143,  0.21478,  0.21754,  0.21980,  0.22024,  0.22090,  0.22085 ");
			}
		}

		capacitance () {
			top_plane: metal5;
			bottom_plane: poly;
			lateral_capacitance (capacitance_template_WxS) {
				index_1 (" 0.0700, 0.0900, 0.1400, 0.2700, 0.2800, 0.5000, 0.9000, 1.5000 ");
				index_2 (" 0.0650, 0.0900, 0.0975, 0.1462, 0.2194, 0.2700, 0.3291, 0.4936,  \
				           0.5000, 0.7404, 0.9000, 1.1106, 1.5000, 1.6659, 2.4988, 249.8818 ");
				values  ("  0.06180,  0.04521,  0.04182,  0.02750,  0.01719,  0.01317,  0.00996,  0.00522,  \
				            0.00509,  0.00237,  0.00152,  0.00089,  0.00035,  0.00024,  0.00004,  0.00000,  \
				            0.06275,  0.04604,  0.04263,  0.02817,  0.01771,  0.01362,  0.01034,  0.00547,  \
				            0.00533,  0.00250,  0.00161,  0.00095,  0.00038,  0.00026,  0.00004,  0.00000,  \
				            0.06451,  0.04763,  0.04418,  0.02950,  0.01878,  0.01455,  0.01115,  0.00599,  \
				            0.00585,  0.00279,  0.00181,  0.00106,  0.00043,  0.00029,  0.00005,  0.00000,  \
				            0.06740,  0.05031,  0.04680,  0.03179,  0.02070,  0.01624,  0.01261,  0.00699,  \
				            0.00683,  0.00336,  0.00220,  0.00131,  0.00053,  0.00036,  0.00006,  0.00000,  \
				            0.06757,  0.05047,  0.04695,  0.03192,  0.02081,  0.01634,  0.01270,  0.00705,  \
				            0.00689,  0.00339,  0.00222,  0.00132,  0.00053,  0.00037,  0.00006,  0.00000,  \
				            0.07008,  0.05283,  0.04927,  0.03399,  0.02257,  0.01793,  0.01410,  0.00803,  \
				            0.00786,  0.00396,  0.00262,  0.00157,  0.00064,  0.00045,  0.00007,  0.00000,  \
				            0.07202,  0.05466,  0.05107,  0.03562,  0.02397,  0.01919,  0.01522,  0.00883,  \
				            0.00865,  0.00444,  0.00296,  0.00179,  0.00074,  0.00051,  0.00009,  0.00000,  \
				            0.07284,  0.05544,  0.05184,  0.03632,  0.02458,  0.01974,  0.01570,  0.00918,  \
				            0.00899,  0.00465,  0.00311,  0.00189,  0.00078,  0.00054,  0.00009,  0.00000 ");
			}
			ground_capacitance (capacitance_template_WxS) {
				index_1 (" 0.0700, 0.0900, 0.1400, 0.2700, 0.2800, 0.5000, 0.9000, 1.5000 ");
				index_2 (" 0.0650, 0.0900, 0.0975, 0.1462, 0.2194, 0.2700, 0.3291, 0.4936,  \
				           0.5000, 0.7404, 0.9000, 1.1106, 1.5000, 1.6659, 2.4988, 249.8818 ");
				values  ("  0.04019,  0.04556,  0.04709,  0.05566,  0.06522,  0.07016,  0.07447,  0.08220,  \
				            0.08222,  0.08733,  0.08886,  0.09020,  0.09121,  0.09148,  0.09198,  0.09206,  \
				            0.04577,  0.05110,  0.05262,  0.06115,  0.07074,  0.07574,  0.08011,  0.08802,  \
				            0.08805,  0.09335,  0.09495,  0.09636,  0.09744,  0.09772,  0.09824,  0.09832,  \
				            0.05952,  0.06477,  0.06627,  0.07474,  0.08439,  0.08946,  0.09397,  0.10225,  \
				            0.10230,  0.10797,  0.10975,  0.11131,  0.11253,  0.11284,  0.11341,  0.11350,  \
				            0.09496,  0.10013,  0.10162,  0.11006,  0.11981,  0.12505,  0.12977,  0.13868,  \
				            0.13876,  0.14515,  0.14724,  0.14909,  0.15059,  0.15096,  0.15164,  0.15176,  \
				            0.09769,  0.10286,  0.10434,  0.11278,  0.12254,  0.12779,  0.13253,  0.14147,  \
				            0.14155,  0.14798,  0.15010,  0.15196,  0.15348,  0.15386,  0.15455,  0.15467,  \
				            0.15783,  0.16299,  0.16448,  0.17294,  0.18286,  0.18825,  0.19318,  0.20270,  \
				            0.20280,  0.20990,  0.21233,  0.21448,  0.21629,  0.21674,  0.21755,  0.21770,  \
				            0.26809,  0.27327,  0.27477,  0.28330,  0.29335,  0.29887,  0.30397,  0.31394,  \
				            0.31406,  0.32170,  0.32439,  0.32677,  0.32882,  0.32933,  0.33019,  0.33041,  \
				            0.43471,  0.43992,  0.44142,  0.44999,  0.46012,  0.46569,  0.47086,  0.48103,  \
				            0.48116,  0.48902,  0.49182,  0.49431,  0.49647,  0.49700,  0.49791,  0.49815 ");
			}
		}

		capacitance () {
			top_plane: metal5;
			bottom_plane: SUBSTRATE;
			lateral_capacitance (capacitance_template_WxS) {
				index_1 (" 0.0700, 0.0900, 0.1400, 0.2700, 0.2800, 0.5000, 0.9000, 1.5000 ");
				index_2 (" 0.0650, 0.0900, 0.0975, 0.1462, 0.2194, 0.2700, 0.3291, 0.4936,  \
				           0.5000, 0.7404, 0.9000, 1.1106, 1.5000, 1.6659, 2.4988, 249.8818 ");
				values  ("  0.06824,  0.05197,  0.04865,  0.03456,  0.02407,  0.01974,  0.01606,  0.00992,  \
				            0.00973,  0.00535,  0.00370,  0.00236,  0.00106,  0.00077,  0.00015,  0.00000,  \
				            0.06969,  0.05322,  0.04986,  0.03553,  0.02482,  0.02037,  0.01660,  0.01028,  \
				            0.01008,  0.00555,  0.00385,  0.00246,  0.00111,  0.00080,  0.00016,  0.00000,  \
				            0.07233,  0.05557,  0.05212,  0.03739,  0.02627,  0.02162,  0.01767,  0.01099,  \
				            0.01079,  0.00598,  0.00416,  0.00265,  0.00120,  0.00087,  0.00017,  0.00000,  \
				            0.07627,  0.05912,  0.05557,  0.04029,  0.02859,  0.02365,  0.01942,  0.01221,  \
				            0.01199,  0.00671,  0.00471,  0.00302,  0.00138,  0.00100,  0.00020,  0.00000,  \
				            0.07648,  0.05931,  0.05576,  0.04045,  0.02872,  0.02377,  0.01952,  0.01228,  \
				            0.01206,  0.00676,  0.00474,  0.00304,  0.00139,  0.00100,  0.00020,  0.00000,  \
				            0.07932,  0.06193,  0.05833,  0.04269,  0.03059,  0.02543,  0.02099,  0.01333,  \
				            0.01310,  0.00743,  0.00524,  0.00337,  0.00155,  0.00112,  0.00023,  0.00000,  \
				            0.08124,  0.06375,  0.06010,  0.04428,  0.03195,  0.02666,  0.02209,  0.01414,  \
				            0.01390,  0.00794,  0.00562,  0.00364,  0.00168,  0.00122,  0.00026,  0.00000,  \
				            0.08203,  0.06449,  0.06084,  0.04494,  0.03252,  0.02718,  0.02255,  0.01448,  \
				            0.01424,  0.00816,  0.00579,  0.00375,  0.00174,  0.00126,  0.00026,  0.00000 ");
			}
			ground_capacitance (capacitance_template_WxS) {
				index_1 (" 0.0700, 0.0900, 0.1400, 0.2700, 0.2800, 0.5000, 0.9000, 1.5000 ");
				index_2 (" 0.0650, 0.0900, 0.0975, 0.1462, 0.2194, 0.2700, 0.3291, 0.4936,  \
				           0.5000, 0.7404, 0.9000, 1.1106, 1.5000, 1.6659, 2.4988, 249.8818 ");
				values  ("  0.01688,  0.01914,  0.01980,  0.02372,  0.02879,  0.03184,  0.03499,  0.04197,  \
				            0.04215,  0.04871,  0.05146,  0.05394,  0.05641,  0.05702,  0.05819,  0.05850,  \
				            0.01867,  0.02087,  0.02151,  0.02539,  0.03047,  0.03357,  0.03677,  0.04391,  \
				            0.04410,  0.05084,  0.05369,  0.05624,  0.05882,  0.05945,  0.06067,  0.06100,  \
				            0.02294,  0.02506,  0.02568,  0.02950,  0.03465,  0.03783,  0.04114,  0.04860,  \
				            0.04880,  0.05591,  0.05894,  0.06170,  0.06446,  0.06514,  0.06646,  0.06681,  \
				            0.03388,  0.03597,  0.03659,  0.04044,  0.04572,  0.04904,  0.05252,  0.06047,  \
				            0.06069,  0.06841,  0.07175,  0.07482,  0.07794,  0.07871,  0.08021,  0.08063,  \
				            0.03473,  0.03682,  0.03744,  0.04130,  0.04659,  0.04991,  0.05340,  0.06137,  \
				            0.06160,  0.06935,  0.07271,  0.07580,  0.07894,  0.07972,  0.08123,  0.08165,  \
				            0.05388,  0.05599,  0.05662,  0.06053,  0.06595,  0.06937,  0.07299,  0.08135,  \
				            0.08160,  0.08985,  0.09348,  0.09685,  0.10031,  0.10118,  0.10287,  0.10335,  \
				            0.08981,  0.09195,  0.09258,  0.09654,  0.10206,  0.10556,  0.10929,  0.11793,  \
				            0.11819,  0.12682,  0.13066,  0.13424,  0.13797,  0.13890,  0.14086,  0.14126,  \
				            0.14481,  0.14696,  0.14759,  0.15159,  0.15716,  0.16069,  0.16447,  0.17324,  \
				            0.17350,  0.18229,  0.18622,  0.18990,  0.19373,  0.19468,  0.19671,  0.19713 ");
			}
		}

		capacitance () {
			top_plane: AIR;
			bottom_plane: poly;
			lateral_capacitance (capacitance_template_WxS) {
				index_1 (" 0.0700, 0.0900, 0.1400, 0.2700, 0.2800, 0.5000, 0.9000, 1.5000 ");
				index_2 (" 0.0650, 0.0900, 0.0975, 0.1462, 0.2194, 0.2700, 0.3291, 0.4936,  \
				           0.5000, 0.7404, 0.9000, 1.1106, 1.5000, 1.6659, 2.4988, 249.8818 ");
				values  ("  0.06241,  0.04584,  0.04247,  0.02819,  0.01792,  0.01392,  0.01073,  0.00601,  \
				            0.00587,  0.00313,  0.00223,  0.00154,  0.00089,  0.00073,  0.00034,  0.00000,  \
				            0.06338,  0.04670,  0.04330,  0.02889,  0.01849,  0.01442,  0.01117,  0.00632,  \
				            0.00618,  0.00333,  0.00239,  0.00167,  0.00096,  0.00079,  0.00037,  0.00000,  \
				            0.06520,  0.04836,  0.04491,  0.03030,  0.01967,  0.01549,  0.01212,  0.00702,  \
				            0.00687,  0.00379,  0.00275,  0.00193,  0.00114,  0.00094,  0.00044,  0.00000,  \
				            0.06836,  0.05132,  0.04782,  0.03292,  0.02196,  0.01758,  0.01402,  0.00848,  \
				            0.00832,  0.00481,  0.00358,  0.00257,  0.00157,  0.00131,  0.00064,  0.00000,  \
				            0.06856,  0.05151,  0.04801,  0.03308,  0.02211,  0.01772,  0.01414,  0.00858,  \
				            0.00842,  0.00488,  0.00364,  0.00262,  0.00160,  0.00134,  0.00065,  0.00000,  \
				            0.07179,  0.05461,  0.05107,  0.03594,  0.02469,  0.02014,  0.01638,  0.01041,  \
				            0.01023,  0.00626,  0.00480,  0.00356,  0.00226,  0.00192,  0.00099,  0.00000,  \
				            0.07538,  0.05810,  0.05454,  0.03924,  0.02776,  0.02307,  0.01916,  0.01279,  \
				            0.01261,  0.00817,  0.00647,  0.00498,  0.00333,  0.00288,  0.00159,  0.00000,  \
				            0.07866,  0.06133,  0.05775,  0.04235,  0.03074,  0.02595,  0.02193,  0.01529,  \
				            0.01509,  0.01030,  0.00840,  0.00667,  0.00470,  0.00413,  0.00244,  0.00000 ");
			}
			ground_capacitance (capacitance_template_WxS) {
				index_1 (" 0.0700, 0.0900, 0.1400, 0.2700, 0.2800, 0.5000, 0.9000, 1.5000 ");
				index_2 (" 0.0650, 0.0900, 0.0975, 0.1462, 0.2194, 0.2700, 0.3291, 0.4936,  \
				           0.5000, 0.7404, 0.9000, 1.1106, 1.5000, 1.6659, 2.4988, 249.8818 ");
				values  ("  0.03864,  0.04389,  0.04539,  0.05379,  0.06317,  0.06801,  0.07224,  0.07986,  \
				            0.07988,  0.08499,  0.08658,  0.08802,  0.08926,  0.08962,  0.09051,  0.09120,  \
				            0.04415,  0.04937,  0.05085,  0.05920,  0.06857,  0.07345,  0.07772,  0.08547,  \
				            0.08550,  0.09078,  0.09245,  0.09395,  0.09529,  0.09567,  0.09661,  0.09736,  \
				            0.05772,  0.06284,  0.06430,  0.07253,  0.08188,  0.08679,  0.09114,  0.09917,  \
				            0.09922,  0.10484,  0.10668,  0.10837,  0.10988,  0.11032,  0.11140,  0.11230,  \
				            0.09238,  0.09737,  0.09880,  0.10688,  0.11618,  0.12115,  0.12562,  0.13412,  \
				            0.13419,  0.14046,  0.14264,  0.14466,  0.14658,  0.14714,  0.14855,  0.14985,  \
				            0.09503,  0.10001,  0.10144,  0.10952,  0.11881,  0.12378,  0.12826,  0.13679,  \
				            0.13686,  0.14317,  0.14537,  0.14742,  0.14937,  0.14993,  0.15136,  0.15269,  \
				            0.15297,  0.15788,  0.15929,  0.16726,  0.17653,  0.18156,  0.18615,  0.19511,  \
				            0.19521,  0.20217,  0.20473,  0.20717,  0.20964,  0.21036,  0.21227,  0.21427,  \
				            0.25770,  0.26255,  0.26395,  0.27186,  0.28111,  0.28618,  0.29087,  0.30023,  \
				            0.30035,  0.30797,  0.31094,  0.31382,  0.31693,  0.31786,  0.32042,  0.32367,  \
				            0.41436,  0.41918,  0.42056,  0.42843,  0.43767,  0.44276,  0.44752,  0.45717,  \
				            0.45730,  0.46542,  0.46872,  0.47200,  0.47571,  0.47685,  0.48017,  0.48512 ");
			}
		}

		capacitance () {
			top_plane: AIR;
			bottom_plane: SUBSTRATE;
			lateral_capacitance (capacitance_template_WxS) {
				index_1 (" 0.0700, 0.0900, 0.1400, 0.2700, 0.2800, 0.5000, 0.9000, 1.5000 ");
				index_2 (" 0.0650, 0.0900, 0.0975, 0.1462, 0.2194, 0.2700, 0.3291, 0.4936,  \
				           0.5000, 0.7404, 0.9000, 1.1106, 1.5000, 1.6659, 2.4988, 249.8818 ");
				values  ("  0.06917,  0.05294,  0.04964,  0.03560,  0.02518,  0.02089,  0.01726,  0.01122,  \
				            0.01103,  0.00672,  0.00508,  0.00370,  0.00224,  0.00187,  0.00089,  0.00000,  \
				            0.07064,  0.05422,  0.05087,  0.03660,  0.02597,  0.02157,  0.01785,  0.01165,  \
				            0.01146,  0.00702,  0.00532,  0.00389,  0.00237,  0.00198,  0.00095,  0.00000,  \
				            0.07334,  0.05662,  0.05319,  0.03853,  0.02752,  0.02294,  0.01906,  0.01255,  \
				            0.01235,  0.00765,  0.00584,  0.00429,  0.00265,  0.00222,  0.00108,  0.00000,  \
				            0.07752,  0.06043,  0.05691,  0.04174,  0.03021,  0.02537,  0.02125,  0.01427,  \
				            0.01405,  0.00893,  0.00692,  0.00516,  0.00327,  0.00276,  0.00138,  0.00000,  \
				            0.07776,  0.06065,  0.05712,  0.04193,  0.03037,  0.02552,  0.02139,  0.01438,  \
				            0.01416,  0.00901,  0.00699,  0.00522,  0.00331,  0.00280,  0.00141,  0.00000,  \
				            0.08132,  0.06402,  0.06043,  0.04495,  0.03306,  0.02803,  0.02372,  0.01633,  \
				            0.01610,  0.01057,  0.00835,  0.00637,  0.00417,  0.00357,  0.00187,  0.00000,  \
				            0.08490,  0.06749,  0.06387,  0.04821,  0.03609,  0.03093,  0.02649,  0.01877,  \
				            0.01853,  0.01262,  0.01020,  0.00798,  0.00545,  0.00473,  0.00264,  0.00000,  \
				            0.08811,  0.07064,  0.06701,  0.05125,  0.03900,  0.03376,  0.02922,  0.02128,  \
				            0.02103,  0.01483,  0.01224,  0.00982,  0.00698,  0.00615,  0.00366,  0.00000 ");
			}
			ground_capacitance (capacitance_template_WxS) {
				index_1 (" 0.0700, 0.0900, 0.1400, 0.2700, 0.2800, 0.5000, 0.9000, 1.5000 ");
				index_2 (" 0.0650, 0.0900, 0.0975, 0.1462, 0.2194, 0.2700, 0.3291, 0.4936,  \
				           0.5000, 0.7404, 0.9000, 1.1106, 1.5000, 1.6659, 2.4988, 249.8818 ");
				values  ("  0.01456,  0.01667,  0.01728,  0.02098,  0.02579,  0.02868,  0.03166,  0.03820,  \
				            0.03837,  0.04451,  0.04713,  0.04957,  0.05224,  0.05297,  0.05483,  0.05663,  \
				            0.01629,  0.01834,  0.01894,  0.02258,  0.02737,  0.03029,  0.03328,  0.03991,  \
				            0.04009,  0.04636,  0.04906,  0.05157,  0.05434,  0.05511,  0.05706,  0.05897,  \
				            0.02039,  0.02236,  0.02294,  0.02650,  0.03126,  0.03419,  0.03722,  0.04403,  \
				            0.04422,  0.05073,  0.05359,  0.05629,  0.05927,  0.06010,  0.06224,  0.06441,  \
				            0.03061,  0.03250,  0.03306,  0.03653,  0.04126,  0.04420,  0.04729,  0.05431,  \
				            0.05451,  0.06142,  0.06452,  0.06752,  0.07092,  0.07189,  0.07446,  0.07723,  \
				            0.03138,  0.03328,  0.03384,  0.03730,  0.04202,  0.04497,  0.04805,  0.05509,  \
				            0.05529,  0.06222,  0.06534,  0.06835,  0.07178,  0.07275,  0.07535,  0.07818,  \
				            0.04836,  0.05020,  0.05074,  0.05413,  0.05880,  0.06173,  0.06483,  0.07199,  \
				            0.07221,  0.07946,  0.08282,  0.08613,  0.09001,  0.09114,  0.09429,  0.09803,  \
				            0.07877,  0.08056,  0.08109,  0.08441,  0.08899,  0.09189,  0.09499,  0.10225,  \
				            0.10247,  0.11002,  0.11361,  0.11723,  0.12164,  0.12297,  0.12692,  0.13206,  \
				            0.12386,  0.12562,  0.12615,  0.12941,  0.13393,  0.13682,  0.13991,  0.14722,  \
				            0.14745,  0.15522,  0.15900,  0.16288,  0.16775,  0.16925,  0.17393,  0.18103 ");
			}
		}
	}

	layer (poly) {
		resistance: 7.800000

		capacitance () {
			top_plane: metal1;
			bottom_plane: SUBSTRATE;
			lateral_capacitance (capacitance_template_WxS) {
				index_1 (" 0.0500, 0.1000, 0.2000 ");
				index_2 (" 0.0750, 0.1125, 0.1687, 0.2531, 0.3797, 0.5695, 0.8543, 1.2814,  \
				           1.9222, 2.8833, 288.3252 ");
				values  ("  0.04024,  0.02567,  0.01469,  0.00693,  0.00240,  0.00052,  0.00006,  0.00000,  \
				            0.00000,  0.00000,  0.00000,  0.04222,  0.02703,  0.01552,  0.00736,  0.00255,  \
				            0.00055,  0.00006,  0.00000,  0.00000,  0.00000,  0.00000,  0.04337,  0.02784,  \
				            0.01602,  0.00761,  0.00264,  0.00057,  0.00006,  0.00000,  0.00000,  0.00000,  \
				            0.00000 ");
			}
			ground_capacitance (capacitance_template_WxS) {
				index_1 (" 0.0500, 0.1000, 0.2000 ");
				index_2 (" 0.0750, 0.1125, 0.1687, 0.2531, 0.3797, 0.5695, 0.8543, 1.2814,  \
				           1.9222, 2.8833, 288.3252 ");
				values  ("  0.05273,  0.06348,  0.07589,  0.08767,  0.09591,  0.09967,  0.10062,  0.10092,  \
				            0.10070,  0.10072,  0.10073,  0.07338,  0.08457,  0.09755,  0.10993,  0.11866,  \
				            0.12265,  0.12367,  0.12396,  0.12372,  0.12374,  0.12375,  0.11593,  0.12739,  \
				            0.14071,  0.15346,  0.16247,  0.16661,  0.16766,  0.16796,  0.16771,  0.16774,  \
				            0.16775 ");
			}
		}

		capacitance () {
			top_plane: metal2;
			bottom_plane: SUBSTRATE;
			lateral_capacitance (capacitance_template_WxS) {
				index_1 (" 0.0500, 0.1000, 0.2000 ");
				index_2 (" 0.0750, 0.1125, 0.1687, 0.2531, 0.3797, 0.5695, 0.8543, 1.2814,  \
				           1.9222, 2.8833, 288.3252 ");
				values  ("  0.04589,  0.03178,  0.02083,  0.01223,  0.00594,  0.00211,  0.00048,  0.00005,  \
				            0.00000,  0.00000,  0.00000,  0.04932,  0.03431,  0.02253,  0.01326,  0.00644,  \
				            0.00230,  0.00051,  0.00006,  0.00000,  0.00000,  0.00000,  0.05192,  0.03627,  \
				            0.02387,  0.01406,  0.00684,  0.00245,  0.00055,  0.00006,  0.00000,  0.00000,  \
				            0.00000 ");
			}
			ground_capacitance (capacitance_template_WxS) {
				index_1 (" 0.0500, 0.1000, 0.2000 ");
				index_2 (" 0.0750, 0.1125, 0.1687, 0.2531, 0.3797, 0.5695, 0.8543, 1.2814,  \
				           1.9222, 2.8833, 288.3252 ");
				values  ("  0.03258,  0.03910,  0.04753,  0.05741,  0.06699,  0.07393,  0.07720,  0.07820,  \
				            0.07809,  0.07811,  0.07812,  0.04300,  0.04991,  0.05894,  0.06955,  0.07990,  \
				            0.08740,  0.09096,  0.09202,  0.09191,  0.09192,  0.09193,  0.06540,  0.07266,  \
				            0.08218,  0.09339,  0.10433,  0.11228,  0.11607,  0.11719,  0.11707,  0.11709,  \
				            0.11709 ");
			}
		}

		capacitance () {
			top_plane: metal3;
			bottom_plane: SUBSTRATE;
			lateral_capacitance (capacitance_template_WxS) {
				index_1 (" 0.0500, 0.1000, 0.2000 ");
				index_2 (" 0.0750, 0.1125, 0.1687, 0.2531, 0.3797, 0.5695, 0.8543, 1.2814,  \
				           1.9222, 2.8833, 288.3252 ");
				values  ("  0.04678,  0.03285,  0.02213,  0.01373,  0.00743,  0.00324,  0.00104,  0.00021,  \
				            0.00002,  0.00000,  0.00000,  0.05058,  0.03579,  0.02425,  0.01514,  0.00824,  \
				            0.00363,  0.00116,  0.00023,  0.00002,  0.00000,  0.00000,  0.05400,  0.03852,  \
				            0.02630,  0.01655,  0.00910,  0.00405,  0.00131,  0.00026,  0.00002,  0.00000,  \
				            0.00000 ");
			}
			ground_capacitance (capacitance_template_WxS) {
				index_1 (" 0.0500, 0.1000, 0.2000 ");
				index_2 (" 0.0750, 0.1125, 0.1687, 0.2531, 0.3797, 0.5695, 0.8543, 1.2814,  \
				           1.9222, 2.8833, 288.3252 ");
				values  ("  0.03017,  0.03605,  0.04356,  0.05241,  0.06135,  0.06855,  0.07279,  0.07459,  \
				            0.07477,  0.07483,  0.07483,  0.03938,  0.04548,  0.05344,  0.06291,  0.07261,  \
				            0.08052,  0.08525,  0.08725,  0.08746,  0.08752,  0.08752,  0.05878,  0.06512,  \
				            0.07347,  0.08353,  0.09394,  0.10256,  0.10781,  0.11004,  0.11030,  0.11036,  \
				            0.11036 ");
			}
		}

		capacitance () {
			top_plane: metal4;
			bottom_plane: SUBSTRATE;
			lateral_capacitance (capacitance_template_WxS) {
				index_1 (" 0.0500, 0.1000, 0.2000 ");
				index_2 (" 0.0750, 0.1125, 0.1687, 0.2531, 0.3797, 0.5695, 0.8543, 1.2814,  \
				           1.9222, 2.8833, 288.3252 ");
				values  ("  0.04711,  0.03322,  0.02258,  0.01429,  0.00805,  0.00383,  0.00145,  0.00039,  \
				            0.00006,  0.00000,  0.00000,  0.05101,  0.03629,  0.02486,  0.01587,  0.00904,  \
				            0.00435,  0.00166,  0.00045,  0.00007,  0.00000,  0.00000,  0.05474,  0.03935,  \
				            0.02724,  0.01761,  0.01019,  0.00500,  0.00194,  0.00053,  0.00008,  0.00001,  \
				            0.00000 ");
			}
			ground_capacitance (capacitance_template_WxS) {
				index_1 (" 0.0500, 0.1000, 0.2000 ");
				index_2 (" 0.0750, 0.1125, 0.1687, 0.2531, 0.3797, 0.5695, 0.8543, 1.2814,  \
				           1.9222, 2.8833, 288.3252 ");
				values  ("  0.02930,  0.03503,  0.04227,  0.05073,  0.05931,  0.06639,  0.07087,  0.07311,  \
				            0.07358,  0.07372,  0.07373,  0.03822,  0.04407,  0.05166,  0.06067,  0.06995,  \
				            0.07775,  0.08281,  0.08533,  0.08589,  0.08604,  0.08605,  0.05665,  0.06266,  \
				            0.07056,  0.08007,  0.09004,  0.09861,  0.10434,  0.10725,  0.10795,  0.10812,  \
				            0.10813 ");
			}
		}

		capacitance () {
			top_plane: AIR;
			bottom_plane: SUBSTRATE;
			lateral_capacitance (capacitance_template_WxS) {
				index_1 (" 0.0500, 0.1000, 0.2000 ");
				index_2 (" 0.0750, 0.1125, 0.1687, 0.2531, 0.3797, 0.5695, 0.8543, 1.2814,  \
				           1.9222, 2.8833, 288.3252 ");
				values  ("  0.04795,  0.03412,  0.02354,  0.01532,  0.00917,  0.00496,  0.00246,  0.00115,  \
				            0.00052,  0.00024,  0.00000,  0.05194,  0.03730,  0.02598,  0.01713,  0.01043,  \
				            0.00578,  0.00294,  0.00141,  0.00065,  0.00030,  0.00000,  0.05600,  0.04074,  \
				            0.02881,  0.01938,  0.01214,  0.00699,  0.00371,  0.00186,  0.00089,  0.00042,  \
				            0.00000 ");
			}
			ground_capacitance (capacitance_template_WxS) {
				index_1 (" 0.0500, 0.1000, 0.2000 ");
				index_2 (" 0.0750, 0.1125, 0.1687, 0.2531, 0.3797, 0.5695, 0.8543, 1.2814,  \
				           1.9222, 2.8833, 288.3252 ");
				values  ("  0.02712,  0.03266,  0.03967,  0.04783,  0.05606,  0.06293,  0.06751,  0.07019,  \
				            0.07127,  0.07187,  0.07235,  0.03581,  0.04139,  0.04860,  0.05711,  0.06586,  \
				            0.07333,  0.07850,  0.08156,  0.08288,  0.08361,  0.08423,  0.05331,  0.05891,  \
				            0.06621,  0.07498,  0.08418,  0.09229,  0.09816,  0.10181,  0.10354,  0.10450,  \
				            0.10537 ");
			}
		}
	}

	layer (via9) {
		resistance : 0.500000;
	}
	layer (via8) {
		resistance : 1.000000;
	}
	layer (via7) {
		resistance : 1.000000;
	}
	layer (via6) {
		resistance : 3.000000;
	}
	layer (via5) {
		resistance : 3.000000;
	}
	layer (via4) {
		resistance : 3.000000;
	}
	layer (via3) {
		resistance : 5.000000;
	}
	layer (via2) {
		resistance : 5.000000;
	}
	layer (via1) {
		resistance : 5.000000;
	}
	layer (contact) {
		resistance : 25.000000;
	}
	layer (diffco) {
		resistance : 30.000000;
	}

}