| Version 2.2 |
| Micron 2000 |
| 32 |
| VIAGEN56_1 null Metal6 0 1 45 720 720 1800 1800 3 3 -2160 -2160 2160 2160 |
| 1 |
| -3000 -3000 3000 3000 |
| 1 |
| -3000 -3000 3000 3000 |
| VIAGEN56_8 null Metal6 0 1 45 720 720 1800 1800 4 3 -3060 -2160 3060 2160 |
| 1 |
| -3700 -3000 3700 3000 |
| 1 |
| -3700 -3000 3700 3000 |
| VIAGEN45_9 null Metal5 0 1 33 140 140 320 320 18 2 -2790 -230 2790 230 |
| 1 |
| -3000 -230 3000 230 |
| 1 |
| -3000 -230 3000 230 |
| VIAGEN56_13 null Metal6 0 1 45 720 720 1800 0 3 1 -2160 -360 2160 360 |
| 1 |
| -3000 -520 3000 520 |
| 1 |
| -3000 -520 3000 520 |
| VIAGEN56_18 null Metal6 0 1 45 720 720 1800 1800 3 4 -2160 -3060 2160 3060 |
| 1 |
| -3000 -3300 3000 3300 |
| 1 |
| -3000 -3300 3000 3300 |
| VIAGEN45_14 M5_M4 Metal5 0 1 0 140 140 320 140 18 1 -2790 -70 2790 70 |
| 1 |
| -3000 -140 3000 140 |
| 1 |
| -3000 -140 3000 140 |
| VIAGEN56_19 null Metal6 0 1 45 720 720 1800 1800 3 4 -2160 -3060 2160 3060 |
| 1 |
| -3000 -3760 3000 3760 |
| 1 |
| -3000 -3760 3000 3760 |
| VIAGEN45_15 M5_M4 Metal5 0 1 0 140 140 320 320 8 19 -1190 -2950 1190 2950 |
| 1 |
| -1280 -3000 1280 3000 |
| 1 |
| -1280 -3000 1280 3000 |
| VIAGEN45_16 M5_M4 Metal5 0 1 0 140 140 320 320 11 19 -1670 -2950 1670 2950 |
| 1 |
| -1770 -3000 1770 3000 |
| 1 |
| -1770 -3000 1770 3000 |
| VIAGEN45_17 M5_M4 Metal5 0 1 0 140 140 320 320 19 18 -2950 -2790 2950 2790 |
| 1 |
| -3000 -3000 3000 3000 |
| 1 |
| -3000 -3000 3000 3000 |
| VIAGEN56_21 null Metal6 0 1 45 720 720 1800 1800 3 5 -2160 -3960 2160 3960 |
| 1 |
| -3000 -4000 3000 4000 |
| 1 |
| -3000 -4000 3000 4000 |
| VIAGEN45_19 M5_M4 Metal5 0 1 0 140 140 320 320 3 23 -390 -3590 390 3590 |
| 1 |
| -420 -3800 420 3800 |
| 1 |
| -420 -3800 420 3800 |
| VIAGEN45_20 M5_M4 Metal5 0 1 0 140 140 320 320 14 19 -2150 -2950 2150 2950 |
| 1 |
| -2300 -3000 2300 3000 |
| 1 |
| -2300 -3000 2300 3000 |
| VIAGEN45_21 M5_M4 Metal5 0 1 0 140 140 320 320 5 18 -710 -2790 710 2790 |
| 1 |
| -720 -3000 720 3000 |
| 1 |
| -720 -3000 720 3000 |
| VIAGEN45_22 M5_M4 Metal5 0 1 0 140 140 320 320 7 18 -1030 -2790 1030 2790 |
| 1 |
| -1040 -3000 1040 3000 |
| 1 |
| -1040 -3000 1040 3000 |
| VIAGEN45_24 M5_M4 Metal5 0 1 0 140 140 320 320 8 25 -1190 -3910 1190 3910 |
| 1 |
| -1310 -4000 1310 4000 |
| 1 |
| -1310 -4000 1310 4000 |
| VIAGEN45_25 M5_M4 Metal5 0 1 0 140 140 320 320 19 25 -2950 -3910 2950 3910 |
| 1 |
| -3000 -4000 3000 4000 |
| 1 |
| -3000 -4000 3000 4000 |
| VIAGEN45_26 M5_M4 Metal5 0 1 0 140 140 320 320 7 25 -1030 -3910 1030 3910 |
| 1 |
| -1160 -4000 1160 4000 |
| 1 |
| -1160 -4000 1160 4000 |
| VIAGEN45_27 M5_M4 Metal5 0 1 0 140 140 140 320 1 17 -70 -2630 70 2630 |
| 1 |
| -100 -2800 100 2800 |
| 1 |
| -100 -2800 100 2800 |
| VIAGEN45_28 M5_M4 Metal5 0 1 0 140 140 140 320 1 19 -70 -2950 70 2950 |
| 1 |
| -170 -3000 170 3000 |
| 1 |
| -170 -3000 170 3000 |
| VIAGEN45_29 M5_M4 Metal5 0 1 0 140 140 320 320 3 18 -390 -2790 390 2790 |
| 1 |
| -430 -3000 430 3000 |
| 1 |
| -430 -3000 430 3000 |
| VIAGEN45_30 M5_M4 Metal5 0 1 0 140 140 320 320 3 23 -390 -3590 390 3590 |
| 1 |
| -450 -3800 450 3800 |
| 1 |
| -450 -3800 450 3800 |
| M5_M4_1 M5_M4 Metal5 0 1 0 140 140 280 280 21 1 -2870 -70 2870 70 |
| 1 |
| -3000 -120 3000 120 |
| 1 |
| -3000 -120 3000 120 |
| M4_M3_1 M4_M3 Metal4 0 1 0 140 140 280 280 21 1 -2870 -70 2870 70 |
| 1 |
| -3000 -120 3000 120 |
| 1 |
| -3000 -120 3000 120 |
| M3_M2_1 M3_M2 Metal3 0 1 0 140 140 280 280 21 1 -2870 -70 2870 70 |
| 1 |
| -3000 -120 3000 120 |
| 1 |
| -3000 -120 3000 120 |
| M2_M1_1 M2_M1 Metal2 0 1 0 140 140 280 280 21 1 -2870 -70 2870 70 |
| 1 |
| -3000 -120 3000 120 |
| 1 |
| -3000 -120 3000 120 |
| M6_M5_2 M6_M5 Metal6 0 1 0 140 140 280 280 21 1 -2870 -70 2870 70 |
| 1 |
| -3000 -120 3000 120 |
| 1 |
| -3000 -120 3000 120 |
| M6_M5_7 M6_M5 Metal6 0 1 0 140 140 280 280 21 1 -2870 -70 2870 70 |
| 1 |
| -3000 -100 3000 100 |
| 1 |
| -3000 -100 3000 100 |
| M5_M4_6 M5_M4 Metal5 0 1 0 140 140 280 280 21 1 -2870 -70 2870 70 |
| 1 |
| -3000 -100 3000 100 |
| 1 |
| -3000 -100 3000 100 |
| M4_M3_3 M4_M3 Metal4 0 1 0 140 140 280 280 21 1 -2870 -70 2870 70 |
| 1 |
| -3000 -100 3000 100 |
| 1 |
| -3000 -100 3000 100 |
| M3_M2_7 M3_M2 Metal3 0 1 0 140 140 280 280 21 1 -2870 -70 2870 70 |
| 1 |
| -3000 -100 3000 100 |
| 1 |
| -3000 -100 3000 100 |
| M2_M1_44 M2_M1 Metal2 0 1 0 140 140 280 280 21 1 -2870 -70 2870 70 |
| 1 |
| -3000 -100 3000 100 |
| 1 |
| -3000 -100 3000 100 |
| 48 675 1 VDD |
| 0 304260 283600 240 Metal1 100 3 0 |
| 50800 0 6000 307800 Metal6 010 2 0 |
| 136800 0 6000 307800 Metal6 010 2 0 |
| 222800 0 6000 307800 Metal6 010 2 0 |
| 0 297420 283600 240 Metal1 100 3 0 |
| 0 235860 283600 240 Metal1 100 3 0 |
| 0 229020 283600 240 Metal1 100 3 0 |
| 0 222180 283600 240 Metal1 100 3 0 |
| 0 215340 283600 240 Metal1 100 3 0 |
| 0 208500 283600 240 Metal1 100 3 0 |
| 0 249540 283600 240 Metal1 100 3 0 |
| 0 242700 283600 240 Metal1 100 3 0 |
| 0 290580 283600 240 Metal1 100 3 0 |
| 0 263220 283600 240 Metal1 100 3 0 |
| 0 283740 283600 240 Metal1 100 3 0 |
| 0 276900 283600 240 Metal1 100 3 0 |
| 0 270060 283600 240 Metal1 100 3 0 |
| 0 256380 283600 240 Metal1 100 3 0 |
| 0 119580 283600 240 Metal1 100 3 0 |
| 0 126420 283600 240 Metal1 100 3 0 |
| 0 146940 283600 240 Metal1 100 3 0 |
| 0 140100 283600 240 Metal1 100 3 0 |
| 0 133260 283600 240 Metal1 100 3 0 |
| 0 153780 283600 240 Metal1 100 3 0 |
| 0 160620 283600 240 Metal1 100 3 0 |
| 0 181140 283600 240 Metal1 100 3 0 |
| 0 174300 283600 240 Metal1 100 3 0 |
| 0 167460 283600 240 Metal1 100 3 0 |
| 0 194820 283600 240 Metal1 100 3 0 |
| 0 201660 283600 240 Metal1 100 3 0 |
| 0 187980 283600 240 Metal1 100 3 0 |
| 0 51180 283600 240 Metal1 100 3 0 |
| 0 30660 283600 240 Metal1 100 3 0 |
| 0 37500 283600 240 Metal1 100 3 0 |
| 0 44340 283600 240 Metal1 100 3 0 |
| 0 58020 283600 240 Metal1 100 3 0 |
| 0 64860 283600 240 Metal1 100 3 0 |
| 0 71700 283600 240 Metal1 100 3 0 |
| 0 99060 283600 240 Metal1 100 3 0 |
| 0 105900 283600 240 Metal1 100 3 0 |
| 0 92220 283600 240 Metal1 100 3 0 |
| 0 78540 283600 240 Metal1 100 3 0 |
| 0 85380 283600 240 Metal1 100 3 0 |
| 0 112740 283600 240 Metal1 100 3 0 |
| 0 16980 283600 240 Metal1 100 3 0 |
| 0 23820 283600 240 Metal1 100 3 0 |
| 0 10140 283600 240 Metal1 100 3 0 |
| 0 3300 283600 240 Metal1 100 3 0 |
| 222800 304260 25 0 3 0 |
| 222800 304260 24 0 3 0 |
| 222800 304260 23 0 3 0 |
| 222800 304260 22 0 3 0 |
| 222800 304260 26 0 3 0 |
| 136800 304260 25 0 3 0 |
| 136800 304260 24 0 3 0 |
| 136800 304260 23 0 3 0 |
| 136800 304260 22 0 3 0 |
| 136800 304260 26 0 3 0 |
| 50800 304260 25 0 3 0 |
| 50800 304260 24 0 3 0 |
| 50800 304260 23 0 3 0 |
| 50800 304260 22 0 3 0 |
| 50800 304260 26 0 3 0 |
| 50800 297420 25 0 3 0 |
| 50800 297420 24 0 3 0 |
| 50800 297420 23 0 3 0 |
| 50800 297420 22 0 3 0 |
| 50800 297420 26 0 3 0 |
| 136800 297420 25 0 3 0 |
| 136800 297420 24 0 3 0 |
| 136800 297420 23 0 3 0 |
| 136800 297420 22 0 3 0 |
| 136800 297420 26 0 3 0 |
| 222800 297420 25 0 3 0 |
| 222800 297420 24 0 3 0 |
| 222800 297420 23 0 3 0 |
| 222800 297420 22 0 3 0 |
| 222800 297420 26 0 3 0 |
| 222800 290580 25 0 3 0 |
| 222800 290580 24 0 3 0 |
| 222800 290580 23 0 3 0 |
| 222800 290580 22 0 3 0 |
| 222800 290580 26 0 3 0 |
| 222800 283740 25 0 3 0 |
| 222800 283740 24 0 3 0 |
| 222800 283740 23 0 3 0 |
| 222800 283740 22 0 3 0 |
| 222800 283740 26 0 3 0 |
| 222800 276900 25 0 3 0 |
| 222800 276900 24 0 3 0 |
| 222800 276900 23 0 3 0 |
| 222800 276900 22 0 3 0 |
| 222800 276900 26 0 3 0 |
| 222800 270060 25 0 3 0 |
| 222800 270060 24 0 3 0 |
| 222800 270060 23 0 3 0 |
| 222800 270060 22 0 3 0 |
| 222800 270060 26 0 3 0 |
| 222800 263220 25 0 3 0 |
| 222800 263220 24 0 3 0 |
| 222800 263220 23 0 3 0 |
| 222800 263220 22 0 3 0 |
| 222800 263220 26 0 3 0 |
| 222800 256380 25 0 3 0 |
| 222800 256380 24 0 3 0 |
| 222800 256380 23 0 3 0 |
| 222800 256380 22 0 3 0 |
| 222800 256380 26 0 3 0 |
| 222800 249540 25 0 3 0 |
| 222800 249540 24 0 3 0 |
| 222800 249540 23 0 3 0 |
| 222800 249540 22 0 3 0 |
| 222800 249540 26 0 3 0 |
| 222800 242700 25 0 3 0 |
| 222800 242700 24 0 3 0 |
| 222800 242700 23 0 3 0 |
| 222800 242700 22 0 3 0 |
| 222800 242700 26 0 3 0 |
| 222800 235860 25 0 3 0 |
| 222800 235860 24 0 3 0 |
| 222800 235860 23 0 3 0 |
| 222800 235860 22 0 3 0 |
| 222800 235860 26 0 3 0 |
| 222800 215340 25 0 3 0 |
| 222800 215340 24 0 3 0 |
| 222800 215340 23 0 3 0 |
| 222800 215340 22 0 3 0 |
| 222800 215340 26 0 3 0 |
| 222800 208500 25 0 3 0 |
| 222800 208500 24 0 3 0 |
| 222800 208500 23 0 3 0 |
| 222800 208500 22 0 3 0 |
| 222800 208500 26 0 3 0 |
| 222800 222180 25 0 3 0 |
| 222800 222180 24 0 3 0 |
| 222800 222180 23 0 3 0 |
| 222800 222180 22 0 3 0 |
| 222800 222180 26 0 3 0 |
| 222800 229020 25 0 3 0 |
| 222800 229020 24 0 3 0 |
| 222800 229020 23 0 3 0 |
| 222800 229020 22 0 3 0 |
| 222800 229020 26 0 3 0 |
| 222800 194820 25 0 3 0 |
| 222800 194820 24 0 3 0 |
| 222800 194820 23 0 3 0 |
| 222800 194820 22 0 3 0 |
| 222800 194820 26 0 3 0 |
| 222800 187980 25 0 3 0 |
| 222800 187980 24 0 3 0 |
| 222800 187980 23 0 3 0 |
| 222800 187980 22 0 3 0 |
| 222800 187980 26 0 3 0 |
| 222800 201660 25 0 3 0 |
| 222800 201660 24 0 3 0 |
| 222800 201660 23 0 3 0 |
| 222800 201660 22 0 3 0 |
| 222800 201660 26 0 3 0 |
| 222800 167460 25 0 3 0 |
| 222800 167460 24 0 3 0 |
| 222800 167460 23 0 3 0 |
| 222800 167460 22 0 3 0 |
| 222800 167460 26 0 3 0 |
| 222800 181140 25 0 3 0 |
| 222800 181140 24 0 3 0 |
| 222800 181140 23 0 3 0 |
| 222800 181140 22 0 3 0 |
| 222800 181140 26 0 3 0 |
| 222800 174300 25 0 3 0 |
| 222800 174300 24 0 3 0 |
| 222800 174300 23 0 3 0 |
| 222800 174300 22 0 3 0 |
| 222800 174300 26 0 3 0 |
| 222800 146940 25 0 3 0 |
| 222800 146940 24 0 3 0 |
| 222800 146940 23 0 3 0 |
| 222800 146940 22 0 3 0 |
| 222800 146940 26 0 3 0 |
| 222800 140100 25 0 3 0 |
| 222800 140100 24 0 3 0 |
| 222800 140100 23 0 3 0 |
| 222800 140100 22 0 3 0 |
| 222800 140100 26 0 3 0 |
| 222800 160620 25 0 3 0 |
| 222800 160620 24 0 3 0 |
| 222800 160620 23 0 3 0 |
| 222800 160620 22 0 3 0 |
| 222800 160620 26 0 3 0 |
| 222800 153780 25 0 3 0 |
| 222800 153780 24 0 3 0 |
| 222800 153780 23 0 3 0 |
| 222800 153780 22 0 3 0 |
| 222800 153780 26 0 3 0 |
| 222800 133260 25 0 3 0 |
| 222800 133260 24 0 3 0 |
| 222800 133260 23 0 3 0 |
| 222800 133260 22 0 3 0 |
| 222800 133260 26 0 3 0 |
| 222800 126420 25 0 3 0 |
| 222800 126420 24 0 3 0 |
| 222800 126420 23 0 3 0 |
| 222800 126420 22 0 3 0 |
| 222800 126420 26 0 3 0 |
| 222800 119580 25 0 3 0 |
| 222800 119580 24 0 3 0 |
| 222800 119580 23 0 3 0 |
| 222800 119580 22 0 3 0 |
| 222800 119580 26 0 3 0 |
| 136800 283740 25 0 3 0 |
| 136800 283740 24 0 3 0 |
| 136800 283740 23 0 3 0 |
| 136800 283740 22 0 3 0 |
| 136800 283740 26 0 3 0 |
| 136800 276900 25 0 3 0 |
| 136800 276900 24 0 3 0 |
| 136800 276900 23 0 3 0 |
| 136800 276900 22 0 3 0 |
| 136800 276900 26 0 3 0 |
| 136800 290580 25 0 3 0 |
| 136800 290580 24 0 3 0 |
| 136800 290580 23 0 3 0 |
| 136800 290580 22 0 3 0 |
| 136800 290580 26 0 3 0 |
| 136800 263220 25 0 3 0 |
| 136800 263220 24 0 3 0 |
| 136800 263220 23 0 3 0 |
| 136800 263220 22 0 3 0 |
| 136800 263220 26 0 3 0 |
| 136800 256380 25 0 3 0 |
| 136800 256380 24 0 3 0 |
| 136800 256380 23 0 3 0 |
| 136800 256380 22 0 3 0 |
| 136800 256380 26 0 3 0 |
| 136800 270060 25 0 3 0 |
| 136800 270060 24 0 3 0 |
| 136800 270060 23 0 3 0 |
| 136800 270060 22 0 3 0 |
| 136800 270060 26 0 3 0 |
| 136800 235860 25 0 3 0 |
| 136800 235860 24 0 3 0 |
| 136800 235860 23 0 3 0 |
| 136800 235860 22 0 3 0 |
| 136800 235860 26 0 3 0 |
| 136800 249540 25 0 3 0 |
| 136800 249540 24 0 3 0 |
| 136800 249540 23 0 3 0 |
| 136800 249540 22 0 3 0 |
| 136800 249540 26 0 3 0 |
| 136800 242700 25 0 3 0 |
| 136800 242700 24 0 3 0 |
| 136800 242700 23 0 3 0 |
| 136800 242700 22 0 3 0 |
| 136800 242700 26 0 3 0 |
| 136800 215340 25 0 3 0 |
| 136800 215340 24 0 3 0 |
| 136800 215340 23 0 3 0 |
| 136800 215340 22 0 3 0 |
| 136800 215340 26 0 3 0 |
| 136800 208500 25 0 3 0 |
| 136800 208500 24 0 3 0 |
| 136800 208500 23 0 3 0 |
| 136800 208500 22 0 3 0 |
| 136800 208500 26 0 3 0 |
| 136800 229020 25 0 3 0 |
| 136800 229020 24 0 3 0 |
| 136800 229020 23 0 3 0 |
| 136800 229020 22 0 3 0 |
| 136800 229020 26 0 3 0 |
| 136800 222180 25 0 3 0 |
| 136800 222180 24 0 3 0 |
| 136800 222180 23 0 3 0 |
| 136800 222180 22 0 3 0 |
| 136800 222180 26 0 3 0 |
| 50800 290580 25 0 3 0 |
| 50800 290580 24 0 3 0 |
| 50800 290580 23 0 3 0 |
| 50800 290580 22 0 3 0 |
| 50800 290580 26 0 3 0 |
| 50800 283740 25 0 3 0 |
| 50800 283740 24 0 3 0 |
| 50800 283740 23 0 3 0 |
| 50800 283740 22 0 3 0 |
| 50800 283740 26 0 3 0 |
| 50800 276900 25 0 3 0 |
| 50800 276900 24 0 3 0 |
| 50800 276900 23 0 3 0 |
| 50800 276900 22 0 3 0 |
| 50800 276900 26 0 3 0 |
| 50800 263220 25 0 3 0 |
| 50800 263220 24 0 3 0 |
| 50800 263220 23 0 3 0 |
| 50800 263220 22 0 3 0 |
| 50800 263220 26 0 3 0 |
| 50800 256380 25 0 3 0 |
| 50800 256380 24 0 3 0 |
| 50800 256380 23 0 3 0 |
| 50800 256380 22 0 3 0 |
| 50800 256380 26 0 3 0 |
| 50800 270060 25 0 3 0 |
| 50800 270060 24 0 3 0 |
| 50800 270060 23 0 3 0 |
| 50800 270060 22 0 3 0 |
| 50800 270060 26 0 3 0 |
| 50800 235860 25 0 3 0 |
| 50800 235860 24 0 3 0 |
| 50800 235860 23 0 3 0 |
| 50800 235860 22 0 3 0 |
| 50800 235860 26 0 3 0 |
| 50800 242700 25 0 3 0 |
| 50800 242700 24 0 3 0 |
| 50800 242700 23 0 3 0 |
| 50800 242700 22 0 3 0 |
| 50800 242700 26 0 3 0 |
| 50800 249540 25 0 3 0 |
| 50800 249540 24 0 3 0 |
| 50800 249540 23 0 3 0 |
| 50800 249540 22 0 3 0 |
| 50800 249540 26 0 3 0 |
| 50800 215340 25 0 3 0 |
| 50800 215340 24 0 3 0 |
| 50800 215340 23 0 3 0 |
| 50800 215340 22 0 3 0 |
| 50800 215340 26 0 3 0 |
| 50800 208500 25 0 3 0 |
| 50800 208500 24 0 3 0 |
| 50800 208500 23 0 3 0 |
| 50800 208500 22 0 3 0 |
| 50800 208500 26 0 3 0 |
| 50800 222180 25 0 3 0 |
| 50800 222180 24 0 3 0 |
| 50800 222180 23 0 3 0 |
| 50800 222180 22 0 3 0 |
| 50800 222180 26 0 3 0 |
| 50800 229020 25 0 3 0 |
| 50800 229020 24 0 3 0 |
| 50800 229020 23 0 3 0 |
| 50800 229020 22 0 3 0 |
| 50800 229020 26 0 3 0 |
| 136800 187980 25 0 3 0 |
| 136800 187980 24 0 3 0 |
| 136800 187980 23 0 3 0 |
| 136800 187980 22 0 3 0 |
| 136800 187980 26 0 3 0 |
| 136800 194820 25 0 3 0 |
| 136800 194820 24 0 3 0 |
| 136800 194820 23 0 3 0 |
| 136800 194820 22 0 3 0 |
| 136800 194820 26 0 3 0 |
| 136800 201660 25 0 3 0 |
| 136800 201660 24 0 3 0 |
| 136800 201660 23 0 3 0 |
| 136800 201660 22 0 3 0 |
| 136800 201660 26 0 3 0 |
| 136800 167460 25 0 3 0 |
| 136800 167460 24 0 3 0 |
| 136800 167460 23 0 3 0 |
| 136800 167460 22 0 3 0 |
| 136800 167460 26 0 3 0 |
| 136800 181140 25 0 3 0 |
| 136800 181140 24 0 3 0 |
| 136800 181140 23 0 3 0 |
| 136800 181140 22 0 3 0 |
| 136800 181140 26 0 3 0 |
| 136800 174300 25 0 3 0 |
| 136800 174300 24 0 3 0 |
| 136800 174300 23 0 3 0 |
| 136800 174300 22 0 3 0 |
| 136800 174300 26 0 3 0 |
| 136800 140100 25 0 3 0 |
| 136800 140100 24 0 3 0 |
| 136800 140100 23 0 3 0 |
| 136800 140100 22 0 3 0 |
| 136800 140100 26 0 3 0 |
| 136800 146940 25 0 3 0 |
| 136800 146940 24 0 3 0 |
| 136800 146940 23 0 3 0 |
| 136800 146940 22 0 3 0 |
| 136800 146940 26 0 3 0 |
| 136800 160620 25 0 3 0 |
| 136800 160620 24 0 3 0 |
| 136800 160620 23 0 3 0 |
| 136800 160620 22 0 3 0 |
| 136800 160620 26 0 3 0 |
| 136800 153780 25 0 3 0 |
| 136800 153780 24 0 3 0 |
| 136800 153780 23 0 3 0 |
| 136800 153780 22 0 3 0 |
| 136800 153780 26 0 3 0 |
| 136800 126420 25 0 3 0 |
| 136800 126420 24 0 3 0 |
| 136800 126420 23 0 3 0 |
| 136800 126420 22 0 3 0 |
| 136800 126420 26 0 3 0 |
| 136800 119580 25 0 3 0 |
| 136800 119580 24 0 3 0 |
| 136800 119580 23 0 3 0 |
| 136800 119580 22 0 3 0 |
| 136800 119580 26 0 3 0 |
| 136800 133260 25 0 3 0 |
| 136800 133260 24 0 3 0 |
| 136800 133260 23 0 3 0 |
| 136800 133260 22 0 3 0 |
| 136800 133260 26 0 3 0 |
| 50800 187980 25 0 3 0 |
| 50800 187980 24 0 3 0 |
| 50800 187980 23 0 3 0 |
| 50800 187980 22 0 3 0 |
| 50800 187980 26 0 3 0 |
| 50800 194820 25 0 3 0 |
| 50800 194820 24 0 3 0 |
| 50800 194820 23 0 3 0 |
| 50800 194820 22 0 3 0 |
| 50800 194820 26 0 3 0 |
| 50800 201660 25 0 3 0 |
| 50800 201660 24 0 3 0 |
| 50800 201660 23 0 3 0 |
| 50800 201660 22 0 3 0 |
| 50800 201660 26 0 3 0 |
| 50800 167460 25 0 3 0 |
| 50800 167460 24 0 3 0 |
| 50800 167460 23 0 3 0 |
| 50800 167460 22 0 3 0 |
| 50800 167460 26 0 3 0 |
| 50800 181140 25 0 3 0 |
| 50800 181140 24 0 3 0 |
| 50800 181140 23 0 3 0 |
| 50800 181140 22 0 3 0 |
| 50800 181140 26 0 3 0 |
| 50800 174300 25 0 3 0 |
| 50800 174300 24 0 3 0 |
| 50800 174300 23 0 3 0 |
| 50800 174300 22 0 3 0 |
| 50800 174300 26 0 3 0 |
| 50800 146940 25 0 3 0 |
| 50800 146940 24 0 3 0 |
| 50800 146940 23 0 3 0 |
| 50800 146940 22 0 3 0 |
| 50800 146940 26 0 3 0 |
| 50800 140100 25 0 3 0 |
| 50800 140100 24 0 3 0 |
| 50800 140100 23 0 3 0 |
| 50800 140100 22 0 3 0 |
| 50800 140100 26 0 3 0 |
| 50800 160620 25 0 3 0 |
| 50800 160620 24 0 3 0 |
| 50800 160620 23 0 3 0 |
| 50800 160620 22 0 3 0 |
| 50800 160620 26 0 3 0 |
| 50800 153780 25 0 3 0 |
| 50800 153780 24 0 3 0 |
| 50800 153780 23 0 3 0 |
| 50800 153780 22 0 3 0 |
| 50800 153780 26 0 3 0 |
| 50800 133260 25 0 3 0 |
| 50800 133260 24 0 3 0 |
| 50800 133260 23 0 3 0 |
| 50800 133260 22 0 3 0 |
| 50800 133260 26 0 3 0 |
| 50800 126420 25 0 3 0 |
| 50800 126420 24 0 3 0 |
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