blob: 675332a43d4cfc9b9b45a728abca8b1311ca8530 [file] [log] [blame]
* File: sky130_fd_sc_ms__nor4_2.pex.spice
* Created: Wed Sep 2 12:16:44 2020
* Program "Calibre xRC"
* Version "v2018.4_34.26"
* Nominal Temperature: 27C
* Circuit Temperature: 27C
*
.subckt PM_SKY130_FD_SC_MS__NOR4_2%C 3 7 11 16 17 21 22 30 31 36 42
c72 30 0 8.73469e-20 $X=1.91 $Y=1.485
c73 16 0 1.10961e-19 $X=0.535 $Y=1.335
r74 34 36 0.751593 $w=2.28e-07 $l=1.5e-08 $layer=LI1_cond $X=1.68 $Y=1.65
+ $X2=1.68 $Y2=1.665
r75 30 33 40.6903 $w=3.3e-07 $l=1.65e-07 $layer=POLY_cond $X=1.91 $Y=1.485
+ $X2=1.91 $Y2=1.65
r76 30 32 46.2115 $w=3.3e-07 $l=1.65e-07 $layer=POLY_cond $X=1.91 $Y=1.485
+ $X2=1.91 $Y2=1.32
r77 30 31 145.28 $w=1.7e-07 $l=1.7e-07 $layer=licon1_POLY $count=1 $X=1.91
+ $Y=1.485 $X2=1.91 $Y2=1.485
r78 21 31 8.03218 $w=3.28e-07 $l=2.3e-07 $layer=LI1_cond $X=1.68 $Y=1.485
+ $X2=1.91 $Y2=1.485
r79 21 34 2.85155 $w=2.3e-07 $l=1.65e-07 $layer=LI1_cond $X=1.68 $Y=1.485
+ $X2=1.68 $Y2=1.65
r80 21 42 6.38036 $w=3.28e-07 $l=1.15e-07 $layer=LI1_cond $X=1.68 $Y=1.485
+ $X2=1.565 $Y2=1.485
r81 21 22 16.7856 $w=2.28e-07 $l=3.35e-07 $layer=LI1_cond $X=1.68 $Y=1.7
+ $X2=1.68 $Y2=2.035
r82 21 36 1.75372 $w=2.28e-07 $l=3.5e-08 $layer=LI1_cond $X=1.68 $Y=1.7 $X2=1.68
+ $Y2=1.665
r83 17 28 40.6903 $w=3.3e-07 $l=1.65e-07 $layer=POLY_cond $X=0.535 $Y=1.335
+ $X2=0.535 $Y2=1.5
r84 16 19 3.14303 $w=2.73e-07 $l=7.5e-08 $layer=LI1_cond $X=0.562 $Y=1.335
+ $X2=0.562 $Y2=1.41
r85 16 17 145.28 $w=1.7e-07 $l=1.7e-07 $layer=licon1_POLY $count=1 $X=0.535
+ $Y=1.335 $X2=0.535 $Y2=1.335
r86 14 19 3.21752 $w=1.8e-07 $l=1.38e-07 $layer=LI1_cond $X=0.7 $Y=1.41
+ $X2=0.562 $Y2=1.41
r87 14 42 53.298 $w=1.78e-07 $l=8.65e-07 $layer=LI1_cond $X=0.7 $Y=1.41
+ $X2=1.565 $Y2=1.41
r88 11 32 297.404 $w=1.5e-07 $l=5.8e-07 $layer=POLY_cond $X=1.93 $Y=0.74
+ $X2=1.93 $Y2=1.32
r89 7 33 291.532 $w=1.8e-07 $l=7.5e-07 $layer=POLY_cond $X=1.895 $Y=2.4
+ $X2=1.895 $Y2=1.65
r90 3 28 349.839 $w=1.8e-07 $l=9e-07 $layer=POLY_cond $X=0.505 $Y=2.4 $X2=0.505
+ $Y2=1.5
.ends
.subckt PM_SKY130_FD_SC_MS__NOR4_2%D 1 5 8 9 11 13 15 20 23
c56 23 0 6.36756e-20 $X=0.27 $Y=0.495
c57 9 0 1.10961e-19 $X=1.445 $Y=1.52
r58 20 23 145.28 $w=1.7e-07 $l=1.7e-07 $layer=licon1_POLY $count=1 $X=0.27
+ $Y=0.495 $X2=0.27 $Y2=0.495
r59 16 17 1.97541 $w=3.66e-07 $l=1.5e-08 $layer=POLY_cond $X=0.97 $Y=1.445
+ $X2=0.985 $Y2=1.445
r60 13 19 23.7042 $w=1.5e-07 $l=2.6e-07 $layer=POLY_cond $X=1.46 $Y=1.185
+ $X2=1.46 $Y2=1.445
r61 13 15 142.993 $w=1.5e-07 $l=4.45e-07 $layer=POLY_cond $X=1.46 $Y=1.185
+ $X2=1.46 $Y2=0.74
r62 9 19 1.97541 $w=3.66e-07 $l=1.5e-08 $layer=POLY_cond $X=1.445 $Y=1.445
+ $X2=1.46 $Y2=1.445
r63 9 17 60.5792 $w=3.66e-07 $l=4.6e-07 $layer=POLY_cond $X=1.445 $Y=1.445
+ $X2=0.985 $Y2=1.445
r64 9 11 342.065 $w=1.8e-07 $l=8.8e-07 $layer=POLY_cond $X=1.445 $Y=1.52
+ $X2=1.445 $Y2=2.4
r65 8 17 23.7042 $w=1.5e-07 $l=2.6e-07 $layer=POLY_cond $X=0.985 $Y=1.185
+ $X2=0.985 $Y2=1.445
r66 7 8 153.83 $w=1.5e-07 $l=3e-07 $layer=POLY_cond $X=0.985 $Y=0.885 $X2=0.985
+ $Y2=1.185
r67 3 16 19.3576 $w=1.8e-07 $l=2.6e-07 $layer=POLY_cond $X=0.97 $Y=1.705
+ $X2=0.97 $Y2=1.445
r68 3 5 270.153 $w=1.8e-07 $l=6.95e-07 $layer=POLY_cond $X=0.97 $Y=1.705
+ $X2=0.97 $Y2=2.4
r69 2 23 59.0778 $w=2.57e-07 $l=3.88844e-07 $layer=POLY_cond $X=0.435 $Y=0.81
+ $X2=0.27 $Y2=0.495
r70 1 7 26.9307 $w=1.5e-07 $l=1.06066e-07 $layer=POLY_cond $X=0.91 $Y=0.81
+ $X2=0.985 $Y2=0.885
r71 1 2 243.564 $w=1.5e-07 $l=4.75e-07 $layer=POLY_cond $X=0.91 $Y=0.81
+ $X2=0.435 $Y2=0.81
.ends
.subckt PM_SKY130_FD_SC_MS__NOR4_2%B 3 7 11 13 16 17 19 20 21 22 30 31 37 40 52
c79 17 0 1.87727e-19 $X=2.45 $Y=1.485
c80 7 0 7.78362e-20 $X=2.5 $Y=0.74
c81 3 0 1.63967e-19 $X=2.375 $Y=2.4
r82 40 52 1.57151 $w=3.28e-07 $l=4.5e-08 $layer=LI1_cond $X=4.05 $Y=1.71
+ $X2=4.05 $Y2=1.665
r83 37 39 40.5227 $w=4.9e-07 $l=1.65e-07 $layer=POLY_cond $X=3.97 $Y=1.465
+ $X2=3.97 $Y2=1.63
r84 37 38 72.64 $w=1.7e-07 $l=3.4e-07 $layer=licon1_POLY $count=2 $X=4.05
+ $Y=1.465 $X2=4.05 $Y2=1.465
r85 30 31 72.64 $w=1.7e-07 $l=3.4e-07 $layer=licon1_POLY $count=2 $X=4.05
+ $Y=0.445 $X2=4.05 $Y2=0.445
r86 28 37 8.73518 $w=4.9e-07 $l=8e-08 $layer=POLY_cond $X=3.97 $Y=1.385 $X2=3.97
+ $Y2=1.465
r87 28 30 102.638 $w=4.9e-07 $l=9.4e-07 $layer=POLY_cond $X=3.97 $Y=1.385
+ $X2=3.97 $Y2=0.445
r88 22 40 2.6405 $w=3.3e-07 $l=8.5e-08 $layer=LI1_cond $X=4.05 $Y=1.795 $X2=4.05
+ $Y2=1.71
r89 22 52 0.69845 $w=3.28e-07 $l=2e-08 $layer=LI1_cond $X=4.05 $Y=1.645 $X2=4.05
+ $Y2=1.665
r90 22 38 6.28605 $w=3.28e-07 $l=1.8e-07 $layer=LI1_cond $X=4.05 $Y=1.645
+ $X2=4.05 $Y2=1.465
r91 21 38 5.93683 $w=3.28e-07 $l=1.7e-07 $layer=LI1_cond $X=4.05 $Y=1.295
+ $X2=4.05 $Y2=1.465
r92 20 21 12.9213 $w=3.28e-07 $l=3.7e-07 $layer=LI1_cond $X=4.05 $Y=0.925
+ $X2=4.05 $Y2=1.295
r93 19 20 12.9213 $w=3.28e-07 $l=3.7e-07 $layer=LI1_cond $X=4.05 $Y=0.555
+ $X2=4.05 $Y2=0.925
r94 19 31 3.84148 $w=3.28e-07 $l=1.1e-07 $layer=LI1_cond $X=4.05 $Y=0.555
+ $X2=4.05 $Y2=0.445
r95 17 35 40.6903 $w=3.3e-07 $l=1.65e-07 $layer=POLY_cond $X=2.45 $Y=1.485
+ $X2=2.45 $Y2=1.65
r96 17 34 46.2115 $w=3.3e-07 $l=1.65e-07 $layer=POLY_cond $X=2.45 $Y=1.485
+ $X2=2.45 $Y2=1.32
r97 16 18 14.0074 $w=2.7e-07 $l=3.1e-07 $layer=LI1_cond $X=2.455 $Y=1.485
+ $X2=2.455 $Y2=1.795
r98 16 17 145.28 $w=1.7e-07 $l=1.7e-07 $layer=licon1_POLY $count=1 $X=2.45
+ $Y=1.485 $X2=2.45 $Y2=1.485
r99 14 18 3.44395 $w=1.7e-07 $l=1.7e-07 $layer=LI1_cond $X=2.625 $Y=1.795
+ $X2=2.455 $Y2=1.795
r100 13 22 5.12568 $w=1.7e-07 $l=1.65e-07 $layer=LI1_cond $X=3.885 $Y=1.795
+ $X2=4.05 $Y2=1.795
r101 13 14 82.2032 $w=1.68e-07 $l=1.26e-06 $layer=LI1_cond $X=3.885 $Y=1.795
+ $X2=2.625 $Y2=1.795
r102 11 39 299.306 $w=1.8e-07 $l=7.7e-07 $layer=POLY_cond $X=3.815 $Y=2.4
+ $X2=3.815 $Y2=1.63
r103 7 34 297.404 $w=1.5e-07 $l=5.8e-07 $layer=POLY_cond $X=2.5 $Y=0.74 $X2=2.5
+ $Y2=1.32
r104 3 35 291.532 $w=1.8e-07 $l=7.5e-07 $layer=POLY_cond $X=2.375 $Y=2.4
+ $X2=2.375 $Y2=1.65
.ends
.subckt PM_SKY130_FD_SC_MS__NOR4_2%A 3 5 7 10 12 20
c44 12 0 1.87727e-19 $X=3.6 $Y=1.295
r45 18 20 18.3604 $w=3.3e-07 $l=1.05e-07 $layer=POLY_cond $X=3.26 $Y=1.385
+ $X2=3.365 $Y2=1.385
r46 18 19 145.28 $w=1.7e-07 $l=1.7e-07 $layer=licon1_POLY $count=1 $X=3.26
+ $Y=1.385 $X2=3.26 $Y2=1.385
r47 16 18 57.7042 $w=3.3e-07 $l=3.3e-07 $layer=POLY_cond $X=2.93 $Y=1.385
+ $X2=3.26 $Y2=1.385
r48 14 16 2.62292 $w=3.3e-07 $l=1.5e-08 $layer=POLY_cond $X=2.915 $Y=1.385
+ $X2=2.93 $Y2=1.385
r49 12 19 10.8842 $w=3.58e-07 $l=3.4e-07 $layer=LI1_cond $X=3.6 $Y=1.36 $X2=3.26
+ $Y2=1.36
r50 8 20 16.9318 $w=1.8e-07 $l=1.65e-07 $layer=POLY_cond $X=3.365 $Y=1.55
+ $X2=3.365 $Y2=1.385
r51 8 10 330.403 $w=1.8e-07 $l=8.5e-07 $layer=POLY_cond $X=3.365 $Y=1.55
+ $X2=3.365 $Y2=2.4
r52 5 16 21.2229 $w=1.5e-07 $l=1.65e-07 $layer=POLY_cond $X=2.93 $Y=1.22
+ $X2=2.93 $Y2=1.385
r53 5 7 154.24 $w=1.5e-07 $l=4.8e-07 $layer=POLY_cond $X=2.93 $Y=1.22 $X2=2.93
+ $Y2=0.74
r54 1 14 16.9318 $w=1.8e-07 $l=1.65e-07 $layer=POLY_cond $X=2.915 $Y=1.55
+ $X2=2.915 $Y2=1.385
r55 1 3 330.403 $w=1.8e-07 $l=8.5e-07 $layer=POLY_cond $X=2.915 $Y=1.55
+ $X2=2.915 $Y2=2.4
.ends
.subckt PM_SKY130_FD_SC_MS__NOR4_2%A_27_368# 1 2 3 12 14 18 20 22 24 27 32
c62 32 0 1.63967e-19 $X=2.12 $Y=1.985
c63 14 0 8.73469e-20 $X=2.035 $Y=2.405
r64 34 35 12.4464 $w=2.48e-07 $l=2.7e-07 $layer=LI1_cond $X=2.16 $Y=2.135
+ $X2=2.16 $Y2=2.405
r65 32 34 6.91466 $w=2.48e-07 $l=1.5e-07 $layer=LI1_cond $X=2.16 $Y=1.985
+ $X2=2.16 $Y2=2.135
r66 29 30 3.67308 $w=3.28e-07 $l=8.5e-08 $layer=LI1_cond $X=0.28 $Y=2.405
+ $X2=0.28 $Y2=2.49
r67 27 29 8.73063 $w=3.28e-07 $l=2.5e-07 $layer=LI1_cond $X=0.28 $Y=2.155
+ $X2=0.28 $Y2=2.405
r68 22 37 2.8391 $w=2.65e-07 $l=8.5e-08 $layer=LI1_cond $X=4.072 $Y=2.22
+ $X2=4.072 $Y2=2.135
r69 22 24 25.8756 $w=2.63e-07 $l=5.95e-07 $layer=LI1_cond $X=4.072 $Y=2.22
+ $X2=4.072 $Y2=2.815
r70 21 34 2.99516 $w=1.7e-07 $l=1.25e-07 $layer=LI1_cond $X=2.285 $Y=2.135
+ $X2=2.16 $Y2=2.135
r71 20 37 4.40896 $w=1.7e-07 $l=1.32e-07 $layer=LI1_cond $X=3.94 $Y=2.135
+ $X2=4.072 $Y2=2.135
r72 20 21 107.973 $w=1.68e-07 $l=1.655e-06 $layer=LI1_cond $X=3.94 $Y=2.135
+ $X2=2.285 $Y2=2.135
r73 16 35 3.91831 $w=2.48e-07 $l=8.5e-08 $layer=LI1_cond $X=2.16 $Y=2.49
+ $X2=2.16 $Y2=2.405
r74 16 18 14.9818 $w=2.48e-07 $l=3.25e-07 $layer=LI1_cond $X=2.16 $Y=2.49
+ $X2=2.16 $Y2=2.815
r75 15 29 4.62375 $w=1.7e-07 $l=1.65e-07 $layer=LI1_cond $X=0.445 $Y=2.405
+ $X2=0.28 $Y2=2.405
r76 14 35 2.99516 $w=1.7e-07 $l=1.25e-07 $layer=LI1_cond $X=2.035 $Y=2.405
+ $X2=2.16 $Y2=2.405
r77 14 15 103.733 $w=1.68e-07 $l=1.59e-06 $layer=LI1_cond $X=2.035 $Y=2.405
+ $X2=0.445 $Y2=2.405
r78 12 30 0.230489 $w=2.48e-07 $l=5e-09 $layer=LI1_cond $X=0.24 $Y=2.495
+ $X2=0.24 $Y2=2.49
r79 3 37 600 $w=1.7e-07 $l=3.5616e-07 $layer=licon1_PDIFF $count=1 $X=3.905
+ $Y=1.84 $X2=4.04 $Y2=2.135
r80 3 24 600 $w=1.7e-07 $l=1.04031e-06 $layer=licon1_PDIFF $count=1 $X=3.905
+ $Y=1.84 $X2=4.04 $Y2=2.815
r81 2 32 300 $w=1.7e-07 $l=2.01494e-07 $layer=licon1_PDIFF $count=2 $X=1.985
+ $Y=1.84 $X2=2.12 $Y2=1.985
r82 2 18 600 $w=1.7e-07 $l=1.04031e-06 $layer=licon1_PDIFF $count=1 $X=1.985
+ $Y=1.84 $X2=2.12 $Y2=2.815
r83 1 27 600 $w=1.7e-07 $l=3.80657e-07 $layer=licon1_PDIFF $count=1 $X=0.135
+ $Y=1.84 $X2=0.28 $Y2=2.155
r84 1 12 300 $w=1.7e-07 $l=7.23878e-07 $layer=licon1_PDIFF $count=2 $X=0.135
+ $Y=1.84 $X2=0.28 $Y2=2.495
.ends
.subckt PM_SKY130_FD_SC_MS__NOR4_2%A_119_368# 1 2 11
r15 8 11 33.6729 $w=3.18e-07 $l=9.35e-07 $layer=LI1_cond $X=0.735 $Y=2.82
+ $X2=1.67 $Y2=2.82
r16 2 11 600 $w=1.7e-07 $l=1.00524e-06 $layer=licon1_PDIFF $count=1 $X=1.535
+ $Y=1.84 $X2=1.67 $Y2=2.78
r17 1 8 600 $w=1.7e-07 $l=9.72484e-07 $layer=licon1_PDIFF $count=1 $X=0.595
+ $Y=1.84 $X2=0.735 $Y2=2.745
.ends
.subckt PM_SKY130_FD_SC_MS__NOR4_2%Y 1 2 3 11 12 13 15 18 20 24 26 31 32 36
c76 26 0 7.78362e-20 $X=1.715 $Y=0.915
r77 31 32 11.9608 $w=4.78e-07 $l=4.8e-07 $layer=LI1_cond $X=0.72 $Y=1.91 $X2=1.2
+ $Y2=1.91
r78 31 36 7.90124 $w=4.78e-07 $l=1.05e-07 $layer=LI1_cond $X=0.72 $Y=1.91
+ $X2=0.615 $Y2=1.91
r79 28 29 3.49225 $w=3.28e-07 $l=1e-07 $layer=LI1_cond $X=1.715 $Y=0.965
+ $X2=1.715 $Y2=1.065
r80 26 28 1.74613 $w=3.28e-07 $l=5e-08 $layer=LI1_cond $X=1.715 $Y=0.915
+ $X2=1.715 $Y2=0.965
r81 22 24 16.239 $w=3.28e-07 $l=4.65e-07 $layer=LI1_cond $X=2.715 $Y=0.98
+ $X2=2.715 $Y2=0.515
r82 21 29 4.62375 $w=1.7e-07 $l=1.65e-07 $layer=LI1_cond $X=1.88 $Y=1.065
+ $X2=1.715 $Y2=1.065
r83 20 22 7.76618 $w=1.7e-07 $l=2.03101e-07 $layer=LI1_cond $X=2.55 $Y=1.065
+ $X2=2.715 $Y2=0.98
r84 20 21 43.7112 $w=1.68e-07 $l=6.7e-07 $layer=LI1_cond $X=2.55 $Y=1.065
+ $X2=1.88 $Y2=1.065
r85 16 26 2.96841 $w=3.28e-07 $l=8.5e-08 $layer=LI1_cond $X=1.715 $Y=0.83
+ $X2=1.715 $Y2=0.915
r86 16 18 11.0006 $w=3.28e-07 $l=3.15e-07 $layer=LI1_cond $X=1.715 $Y=0.83
+ $X2=1.715 $Y2=0.515
r87 15 36 23.4866 $w=1.68e-07 $l=3.6e-07 $layer=LI1_cond $X=0.255 $Y=1.755
+ $X2=0.615 $Y2=1.755
r88 12 26 4.62375 $w=1.7e-07 $l=1.65e-07 $layer=LI1_cond $X=1.55 $Y=0.915
+ $X2=1.715 $Y2=0.915
r89 12 13 84.4866 $w=1.68e-07 $l=1.295e-06 $layer=LI1_cond $X=1.55 $Y=0.915
+ $X2=0.255 $Y2=0.915
r90 11 15 6.81649 $w=1.7e-07 $l=1.20208e-07 $layer=LI1_cond $X=0.17 $Y=1.67
+ $X2=0.255 $Y2=1.755
r91 10 13 6.81649 $w=1.7e-07 $l=1.20208e-07 $layer=LI1_cond $X=0.17 $Y=1
+ $X2=0.255 $Y2=0.915
r92 10 11 43.7112 $w=1.68e-07 $l=6.7e-07 $layer=LI1_cond $X=0.17 $Y=1 $X2=0.17
+ $Y2=1.67
r93 3 32 600 $w=1.7e-07 $l=2.05061e-07 $layer=licon1_PDIFF $count=1 $X=1.06
+ $Y=1.84 $X2=1.205 $Y2=1.985
r94 2 24 91 $w=1.7e-07 $l=2.03286e-07 $layer=licon1_NDIFF $count=2 $X=2.575
+ $Y=0.37 $X2=2.715 $Y2=0.515
r95 1 28 182 $w=1.7e-07 $l=6.79062e-07 $layer=licon1_NDIFF $count=1 $X=1.535
+ $Y=0.37 $X2=1.715 $Y2=0.965
r96 1 18 182 $w=1.7e-07 $l=2.41868e-07 $layer=licon1_NDIFF $count=1 $X=1.535
+ $Y=0.37 $X2=1.715 $Y2=0.515
.ends
.subckt PM_SKY130_FD_SC_MS__NOR4_2%A_493_368# 1 2 9 11 13 16
r28 11 18 2.89128 $w=2.5e-07 $l=8.5e-08 $layer=LI1_cond $X=3.63 $Y=2.56 $X2=3.63
+ $Y2=2.475
r29 11 13 12.6769 $w=2.48e-07 $l=2.75e-07 $layer=LI1_cond $X=3.63 $Y=2.56
+ $X2=3.63 $Y2=2.835
r30 10 16 5.12568 $w=1.7e-07 $l=1.65e-07 $layer=LI1_cond $X=2.805 $Y=2.475
+ $X2=2.64 $Y2=2.475
r31 9 18 4.25188 $w=1.7e-07 $l=1.25e-07 $layer=LI1_cond $X=3.505 $Y=2.475
+ $X2=3.63 $Y2=2.475
r32 9 10 45.6684 $w=1.68e-07 $l=7e-07 $layer=LI1_cond $X=3.505 $Y=2.475
+ $X2=2.805 $Y2=2.475
r33 2 18 600 $w=1.7e-07 $l=6.9925e-07 $layer=licon1_PDIFF $count=1 $X=3.455
+ $Y=1.84 $X2=3.59 $Y2=2.475
r34 2 13 600 $w=1.7e-07 $l=1.06035e-06 $layer=licon1_PDIFF $count=1 $X=3.455
+ $Y=1.84 $X2=3.59 $Y2=2.835
r35 1 16 300 $w=1.7e-07 $l=7.37326e-07 $layer=licon1_PDIFF $count=2 $X=2.465
+ $Y=1.84 $X2=2.64 $Y2=2.495
.ends
.subckt PM_SKY130_FD_SC_MS__NOR4_2%VPWR 1 6 8 10 20 21 24
r47 24 25 9.3 $w=1.7e-07 $l=1.7e-07 $layer=mcon $count=1 $X=3.12 $Y=3.33
+ $X2=3.12 $Y2=3.33
r48 21 25 0.267585 $w=4.9e-07 $l=9.6e-07 $layer=MET1_cond $X=4.08 $Y=3.33
+ $X2=3.12 $Y2=3.33
r49 20 21 4.65 $w=1.7e-07 $l=3.4e-07 $layer=mcon $count=2 $X=4.08 $Y=3.33
+ $X2=4.08 $Y2=3.33
r50 18 24 8.61065 $w=1.7e-07 $l=1.65e-07 $layer=LI1_cond $X=3.305 $Y=3.33
+ $X2=3.14 $Y2=3.33
r51 18 20 50.5615 $w=1.68e-07 $l=7.75e-07 $layer=LI1_cond $X=3.305 $Y=3.33
+ $X2=4.08 $Y2=3.33
r52 17 25 0.133793 $w=4.9e-07 $l=4.8e-07 $layer=MET1_cond $X=2.64 $Y=3.33
+ $X2=3.12 $Y2=3.33
r53 16 17 3.1 $w=1.7e-07 $l=5.1e-07 $layer=mcon $count=3 $X=2.64 $Y=3.33
+ $X2=2.64 $Y2=3.33
r54 12 16 156.578 $w=1.68e-07 $l=2.4e-06 $layer=LI1_cond $X=0.24 $Y=3.33
+ $X2=2.64 $Y2=3.33
r55 12 13 3.1 $w=1.7e-07 $l=5.1e-07 $layer=mcon $count=3 $X=0.24 $Y=3.33
+ $X2=0.24 $Y2=3.33
r56 10 24 8.61065 $w=1.7e-07 $l=1.65e-07 $layer=LI1_cond $X=2.975 $Y=3.33
+ $X2=3.14 $Y2=3.33
r57 10 16 21.8556 $w=1.68e-07 $l=3.35e-07 $layer=LI1_cond $X=2.975 $Y=3.33
+ $X2=2.64 $Y2=3.33
r58 8 17 0.133793 $w=4.9e-07 $l=4.8e-07 $layer=MET1_cond $X=2.16 $Y=3.33
+ $X2=2.64 $Y2=3.33
r59 8 13 0.535171 $w=4.9e-07 $l=1.92e-06 $layer=MET1_cond $X=2.16 $Y=3.33
+ $X2=0.24 $Y2=3.33
r60 4 24 0.89609 $w=3.3e-07 $l=8.5e-08 $layer=LI1_cond $X=3.14 $Y=3.245 $X2=3.14
+ $Y2=3.33
r61 4 6 15.0167 $w=3.28e-07 $l=4.3e-07 $layer=LI1_cond $X=3.14 $Y=3.245 $X2=3.14
+ $Y2=2.815
r62 1 6 600 $w=1.7e-07 $l=1.04031e-06 $layer=licon1_PDIFF $count=1 $X=3.005
+ $Y=1.84 $X2=3.14 $Y2=2.815
.ends
.subckt PM_SKY130_FD_SC_MS__NOR4_2%VGND 1 2 3 12 14 18 20 27 34 35 40 46 48 51
c52 35 0 6.36756e-20 $X=4.08 $Y=0
r53 51 52 4.65 $w=1.7e-07 $l=3.4e-07 $layer=mcon $count=2 $X=3.12 $Y=0 $X2=3.12
+ $Y2=0
r54 45 46 10.7086 $w=6.83e-07 $l=1.65e-07 $layer=LI1_cond $X=1.215 $Y=0.257
+ $X2=1.38 $Y2=0.257
r55 42 45 0.261915 $w=6.83e-07 $l=1.5e-08 $layer=LI1_cond $X=1.2 $Y=0.257
+ $X2=1.215 $Y2=0.257
r56 42 43 9.3 $w=1.7e-07 $l=1.7e-07 $layer=mcon $count=1 $X=1.2 $Y=0 $X2=1.2
+ $Y2=0
r57 39 43 0.133793 $w=4.9e-07 $l=4.8e-07 $layer=MET1_cond $X=0.72 $Y=0 $X2=1.2
+ $Y2=0
r58 38 42 8.38128 $w=6.83e-07 $l=4.8e-07 $layer=LI1_cond $X=0.72 $Y=0.257
+ $X2=1.2 $Y2=0.257
r59 38 40 9.83558 $w=6.83e-07 $l=1.15e-07 $layer=LI1_cond $X=0.72 $Y=0.257
+ $X2=0.605 $Y2=0.257
r60 38 39 9.3 $w=1.7e-07 $l=1.7e-07 $layer=mcon $count=1 $X=0.72 $Y=0 $X2=0.72
+ $Y2=0
r61 35 52 0.267585 $w=4.9e-07 $l=9.6e-07 $layer=MET1_cond $X=4.08 $Y=0 $X2=3.12
+ $Y2=0
r62 34 35 4.65 $w=1.7e-07 $l=3.4e-07 $layer=mcon $count=2 $X=4.08 $Y=0 $X2=4.08
+ $Y2=0
r63 32 51 8.61065 $w=1.7e-07 $l=1.65e-07 $layer=LI1_cond $X=3.38 $Y=0 $X2=3.215
+ $Y2=0
r64 32 34 45.6684 $w=1.68e-07 $l=7e-07 $layer=LI1_cond $X=3.38 $Y=0 $X2=4.08
+ $Y2=0
r65 31 43 0.133793 $w=4.9e-07 $l=4.8e-07 $layer=MET1_cond $X=1.68 $Y=0 $X2=1.2
+ $Y2=0
r66 30 46 19.5722 $w=1.68e-07 $l=3e-07 $layer=LI1_cond $X=1.68 $Y=0 $X2=1.38
+ $Y2=0
r67 30 31 9.3 $w=1.7e-07 $l=1.7e-07 $layer=mcon $count=1 $X=1.68 $Y=0 $X2=1.68
+ $Y2=0
r68 27 48 8.61065 $w=1.7e-07 $l=1.65e-07 $layer=LI1_cond $X=2.05 $Y=0 $X2=2.215
+ $Y2=0
r69 27 30 24.139 $w=1.68e-07 $l=3.7e-07 $layer=LI1_cond $X=2.05 $Y=0 $X2=1.68
+ $Y2=0
r70 25 39 0.133793 $w=4.9e-07 $l=4.8e-07 $layer=MET1_cond $X=0.24 $Y=0 $X2=0.72
+ $Y2=0
r71 24 40 23.8128 $w=1.68e-07 $l=3.65e-07 $layer=LI1_cond $X=0.24 $Y=0 $X2=0.605
+ $Y2=0
r72 24 25 9.3 $w=1.7e-07 $l=1.7e-07 $layer=mcon $count=1 $X=0.24 $Y=0 $X2=0.24
+ $Y2=0
r73 20 52 0.267585 $w=4.9e-07 $l=9.6e-07 $layer=MET1_cond $X=2.16 $Y=0 $X2=3.12
+ $Y2=0
r74 20 31 0.133793 $w=4.9e-07 $l=4.8e-07 $layer=MET1_cond $X=2.16 $Y=0 $X2=1.68
+ $Y2=0
r75 20 48 9.3 $w=1.7e-07 $l=1.7e-07 $layer=mcon $count=1 $X=2.16 $Y=0 $X2=2.16
+ $Y2=0
r76 16 51 0.89609 $w=3.3e-07 $l=8.5e-08 $layer=LI1_cond $X=3.215 $Y=0.085
+ $X2=3.215 $Y2=0
r77 16 18 14.6675 $w=3.28e-07 $l=4.2e-07 $layer=LI1_cond $X=3.215 $Y=0.085
+ $X2=3.215 $Y2=0.505
r78 15 48 8.61065 $w=1.7e-07 $l=1.65e-07 $layer=LI1_cond $X=2.38 $Y=0 $X2=2.215
+ $Y2=0
r79 14 51 8.61065 $w=1.7e-07 $l=1.65e-07 $layer=LI1_cond $X=3.05 $Y=0 $X2=3.215
+ $Y2=0
r80 14 15 43.7112 $w=1.68e-07 $l=6.7e-07 $layer=LI1_cond $X=3.05 $Y=0 $X2=2.38
+ $Y2=0
r81 10 48 0.89609 $w=3.3e-07 $l=8.5e-08 $layer=LI1_cond $X=2.215 $Y=0.085
+ $X2=2.215 $Y2=0
r82 10 12 19.5566 $w=3.28e-07 $l=5.6e-07 $layer=LI1_cond $X=2.215 $Y=0.085
+ $X2=2.215 $Y2=0.645
r83 3 18 91 $w=1.7e-07 $l=1.96214e-07 $layer=licon1_NDIFF $count=2 $X=3.005
+ $Y=0.37 $X2=3.145 $Y2=0.505
r84 2 12 182 $w=1.7e-07 $l=3.65205e-07 $layer=licon1_NDIFF $count=1 $X=2.005
+ $Y=0.37 $X2=2.215 $Y2=0.645
r85 1 45 91 $w=1.7e-07 $l=6.58521e-07 $layer=licon1_NDIFF $count=2 $X=0.625
+ $Y=0.37 $X2=1.215 $Y2=0.515
.ends