| * Copyright 2020 The SkyWater PDK Authors |
| * |
| * Licensed under the Apache License, Version 2.0 (the "License"); |
| * you may not use this file except in compliance with the License. |
| * You may obtain a copy of the License at |
| * |
| * https://www.apache.org/licenses/LICENSE-2.0 |
| * |
| * Unless required by applicable law or agreed to in writing, software |
| * distributed under the License is distributed on an "AS IS" BASIS, |
| * WITHOUT WARRANTIES OR CONDITIONS OF ANY KIND, either express or implied. |
| * See the License for the specific language governing permissions and |
| * limitations under the License. |
| |
| * SKY130 Spice File. |
| * statistics { |
| * mismatch { |
| * } |
| * } |
| * 4-terminal Vertical Parallel Plate Capacitor /w LI-M4 fingers and M5 Shield |
| * 4-terminal Vertical Parallel Plate Capacitor /w LI-M4 fingers and Poly/M5 Shield |
| * Layout: sky130_fd_pr__cap_vpp_11p5x11p7_l1m1m2m3m4_shieldpom5_x |
| .subckt sky130_fd_pr__cap_vpp_11p5x11p7_l1m1m2m3m4_shieldpom5_x c0 c1 b m5 |
| + |
| .param mult = 1 presim_flag = 0.0 |
| + |
| + ctot_a = {141.23e-15*sky130_fd_pr__cap_vpp_11p5x11p7_l1m1m2m3m4_shieldpom5__cor+1.5*0.00244/sqrt(mult/0.21936)*141.23e-15*sky130_fd_pr__cap_vpp_11p5x11p7_l1m1m2m3m4_shieldpom5__cor*sky130_fd_pr__model__cap_vpp_only_p__slope} |
| + cm5_c0 = {((2.074e-15)*c0m5m4_vpp0p4shield+(2.916e-15*presim_flag))} |
| + cm5_c1 = {((3.67e-15)*c1m5m4_vpp0p4shield)} |
| + cpl2s = {((15.22e-15)*cpl2s_vpp0p4shield+(2.84e-15*presim_flag))} |
| + rat_m4 = 0.1120 |
| + rat_m3 = 0.1120 |
| + rat_m2 = 0.2836 |
| + rat_m1 = 0.2801 |
| + rat_li = 0.1863 |
| + rat_li2p = 0.026 |
| + cap_m4 = {rat_m4*ctot_a} |
| + cap_m3 = {rat_m3*ctot_a} |
| + cap_m2 = {rat_m2*ctot_a} |
| + cap_m1 = {rat_m1*ctot_a} |
| + cap_li = {rat_li*ctot_a} |
| + cap_li2p = {rat_li2p*ctot_a} |
| + ll1 = 5.070 |
| + lm1 = 5.215 |
| + lm2 = 5.095 |
| + lm3 = 5.050 |
| + lm4 = 4.910 |
| + wl1 = 0.170 |
| + wm1 = 0.140 |
| + wm2 = 0.140 |
| + wm3 = 0.300 |
| + wm4 = 0.300 |
| + nfl1 = 62.0 |
| + nfm1 = 72.0 |
| + nfm2 = 72.0 |
| + nfm3 = 34.0 |
| + nfm4 = 34.0 |
| + nvia3_c0 = 103.0 |
| + nvia3_c1 = 49.0 |
| + nvia2_c0 = 104.0 |
| + nvia2_c1 = 49.0 |
| + nvia_c0 = 124.0 |
| + nvia_c1 = 62.0 |
| + ncon_c0 = 116.0 |
| + ncon_c1 = 28.0 |
| + nlicon = 126.0 |
| ccmvpp11p5x11p7_polym50p4shield m5 a0 c = {cm5_c0} |
| cm5_1 m5 a1 c = {cm5_c1} |
| rsm4 a0 a2 r = {rm4*lm4/wm4*(1/3)*(1/nfm4)} |
| cm4 a2 a1 c = {cap_m4} |
| rvia3_0 a0 b0 r = {rcvia3/nvia3_c0} |
| rvia3_1 a1 b1 r = {rcvia3/nvia3_c1} |
| rsm3 b0 b2 r = {rm3*lm3/wm3*(1/3)*(1/nfm3)} |
| cm3 b2 b1 c = {cap_m3} |
| rvia2_0 b0 c0 r = {rcvia2/nvia2_c0} |
| rvia2_1 b1 c1 r = {rcvia2/nvia2_c1} |
| rsm2 c0 c2 r = {rm2*lm2/wm2*(1/3)*(1/nfm2)} |
| cm2 c2 c1 c = {cap_m2} |
| rvia_0 c0 d0 r = {rcvia/nvia_c0} |
| rvia_1 c1 d1 r = {rcvia/nvia_c1} |
| rsm1 d0 d2 r = {rm1*lm1/wm1*(1/3)*(1/nfm1)} |
| cm1 d2 d1 c = {cap_m1} |
| rcon1 d0 e0 r = {rcl1/ncon_c0} |
| rcon2 d1 e1 r = {rcl1/ncon_c1} |
| rli1 e0 e2 r = {rl1*ll1/wl1*(1/3)*(1/nfl1)} |
| cli e2 e1 c = {cap_li} |
| rlicon e0 f0 r = {rcp1/nlicon} |
| rpoly f0 f2 r = {rp1} |
| cl12p e1 f2 c = {cap_li2p} |
| cpl2b f0 b c = {cpl2s} |
| .ends sky130_fd_pr__cap_vpp_11p5x11p7_l1m1m2m3m4_shieldpom5_x |