| # SKY90FD Technology LEF |
| |
| VERSION 5.7 ; |
| BUSBITCHARS "[]" ; |
| DIVIDERCHAR "/" ; |
| |
| PROPERTYDEFINITIONS |
| LAYER LEF58_TYPE STRING ; |
| END PROPERTYDEFINITIONS |
| |
| UNITS |
| DATABASE MICRONS 1000 ; |
| TIME NANOSECONDS 1 ; |
| VOLTAGE VOLTS 1 ; |
| CURRENT MILLIAMPS 1 ; |
| POWER MILLIWATTS 1 ; |
| END UNITS |
| |
| MANUFACTURINGGRID 0.005 ; |
| LAYER OVERLAP |
| TYPE OVERLAP ; |
| END OVERLAP |
| |
| # Layers up to bottom of metal |
| |
| LAYER CAPP |
| TYPE IMPLANT ; |
| WIDTH 0.32 ; |
| END CAPP |
| |
| LAYER VTN1 |
| TYPE IMPLANT ; |
| END VTN1 |
| |
| LAYER VTP1 |
| TYPE IMPLANT ; |
| END VTP1 |
| |
| LAYER VTN2 |
| TYPE IMPLANT ; |
| END VTN2 |
| |
| LAYER VTP2 |
| TYPE IMPLANT ; |
| END VTP2 |
| |
| LAYER POLY |
| TYPE MASTERSLICE ; |
| END POLY |
| |
| LAYER NSD |
| TYPE IMPLANT ; |
| WIDTH 0.2 ; |
| END NSD |
| |
| LAYER PSD |
| TYPE IMPLANT ; |
| WIDTH 0.2 ; |
| END PSD |
| |
| LAYER CON |
| TYPE CUT ; |
| SPACING 0.13 ; |
| WIDTH 0.13 ; |
| ENCLOSURE ABOVE 0.015 0.035 ; |
| END CON |
| |
| |
| LAYER M1Cu |
| TYPE ROUTING ; |
| WIDTH 0.1600 ; |
| AREA 0.0832 ; |
| SPACING 0.1600 ; |
| SPACING 0.1600 SAMENET ; |
| PITCH 0.3200 ; |
| DIRECTION HORIZONTAL ; |
| RESISTANCE RPERSQ 0.09000000 ; |
| THICKNESS 0.24000000 ; |
| END M1Cu |
| |
| LAYER V12Cu |
| TYPE CUT ; |
| RESISTANCE 5.0 ; |
| SPACING 0.170 ; |
| SPACING 0.00 SAMENET LAYER CON STACK ; |
| ENCLOSURE BELOW 0.005 0.035 ; |
| ENCLOSURE ABOVE 0.005 0.035 ; |
| END V12Cu |
| |
| LAYER M2Cu |
| TYPE ROUTING ; |
| WIDTH 0.1600 ; |
| AREA 0.0952 ; |
| SPACING 0.1600 ; |
| SPACING 0.1600 SAMENET ; |
| PITCH 0.320 ; |
| DIRECTION VERTICAL ; |
| RESISTANCE RPERSQ 0.09000000 ; |
| THICKNESS 0.24000000 ; |
| END M2Cu |
| |
| LAYER V23Cu |
| TYPE CUT ; |
| RESISTANCE 5.0 ; |
| SPACING 0.170 ; |
| SPACING 0.00 SAMENET LAYER V12Cu STACK ; |
| SPACING 0.00 SAMENET LAYER CON STACK ; |
| ENCLOSURE BELOW 0.005 0.035 ; |
| ENCLOSURE ABOVE 0.005 0.035 ; |
| END V23Cu |
| |
| |
| LAYER M3Cu |
| TYPE ROUTING ; |
| WIDTH 0.1600 ; |
| AREA 0.0832 ; |
| SPACING 0.1600 ; |
| SPACING 0.1600 SAMENET ; |
| PITCH 0.3200 ; |
| DIRECTION HORIZONTAL ; |
| RESISTANCE RPERSQ 0.09000000 ; |
| THICKNESS 0.24000000 ; |
| END M3Cu |
| |
| LAYER V34Cu |
| TYPE CUT ; |
| RESISTANCE 5.0 ; |
| SPACING 0.170 ; |
| SPACING 0.00 SAMENET LAYER V23Cu STACK ; |
| SPACING 0.00 SAMENET LAYER V12Cu STACK ; |
| SPACING 0.00 SAMENET LAYER CON STACK ; |
| ENCLOSURE BELOW 0.005 0.035 ; |
| ENCLOSURE ABOVE 0.005 0.035 ; |
| END V34Cu |
| |
| LAYER M4Cu |
| TYPE ROUTING ; |
| WIDTH 0.1600 ; |
| AREA 0.0952 ; |
| SPACING 0.1600 ; |
| SPACING 0.1600 SAMENET ; |
| PITCH 0.3200 ; |
| DIRECTION VERTICAL ; |
| RESISTANCE RPERSQ 0.09000000 ; |
| THICKNESS 0.24000000 ; |
| END M4Cu |
| |
| LAYER V45Cu |
| TYPE CUT ; |
| RESISTANCE 5.0 ; |
| SPACING 0.170 ; |
| SPACING 0.00 SAMENET LAYER V34Cu STACK ; |
| SPACING 0.00 SAMENET LAYER V23Cu STACK ; |
| SPACING 0.00 SAMENET LAYER V12Cu STACK ; |
| SPACING 0.00 SAMENET LAYER CON STACK ; |
| ENCLOSURE BELOW 0.005 0.035 ; |
| ENCLOSURE ABOVE 0.005 0.035 ; |
| END V45Cu |
| |
| LAYER M5Cu |
| TYPE ROUTING ; |
| WIDTH 0.1600 ; |
| AREA 0.0832 ; |
| SPACING 0.1600 ; |
| SPACING 0.1600 SAMENET ; |
| PITCH 0.3200 ; |
| DIRECTION HORIZONTAL ; |
| RESISTANCE RPERSQ 0.09000000 ; |
| THICKNESS 0.24000000 ; |
| END M5Cu |
| |
| |
| LAYER VK01 |
| TYPE CUT ; |
| RESISTANCE 8.0 ; |
| SPACING 0.170 ; |
| ENCLOSURE BELOW 0.005 0.035 ; |
| ENCLOSURE ABOVE 0.035 0.035 ; |
| END VK01 |
| |
| LAYER MTK1 |
| TYPE ROUTING ; |
| DIRECTION VERTICAL ; |
| PITCH 0.48 ; |
| WIDTH 0.24 ; |
| AREA 0.28 ; |
| SPACING 0.24 ; |
| SPACING 0.48 RANGE 3 10000 ; |
| THICKNESS 0.46800000 ; |
| RESISTANCE RPERSQ 0.10 ; |
| END MTK1 |
| |
| LAYER VR01 |
| TYPE CUT ; |
| RESISTANCE 7.0 ; |
| WIDTH 0.17 ; |
| SPACING 0.25 ; |
| ENCLOSURE BELOW 0.035 0.035 ; |
| ENCLOSURE ABOVE 0.095 0.095 ; |
| END VR01 |
| |
| LAYER MRF1 |
| TYPE ROUTING ; |
| DIRECTION HORIZONTAL ; |
| PITCH 0.72 ; |
| WIDTH 0.36 ; |
| AREA 0.28 ; |
| SPACING 0.36 ; |
| SPACING 0.72 RANGE 3 10000 ; |
| RESISTANCE RPERSQ 0.048 ; |
| THICKNESS 0.84500000 ; |
| END MRF1 |
| |
| LAYER OGC |
| TYPE CUT ; |
| PROPERTY LEF58_TYPE "TYPE PASSIVATION ;" ; |
| SPACING 5 ; |
| WIDTH 5 ; |
| END OGC |
| |
| VIARULE M1Cu_M2Cu GENERATE DEFAULT |
| LAYER M1Cu ; |
| ENCLOSURE 0.005 0.035 ; |
| LAYER M2Cu ; |
| ENCLOSURE 0.035 0.005 ; |
| LAYER V12Cu ; |
| RECT -0.075 -0.075 0.075 0.075 ; |
| SPACING 0.32 BY 0.32 ; |
| END M1Cu_M2Cu |
| |
| VIARULE M2Cu_M3Cu GENERATE DEFAULT |
| LAYER M2Cu ; |
| ENCLOSURE 0.035 0.005 ; |
| LAYER M3Cu ; |
| ENCLOSURE 0.005 0.035 ; |
| LAYER V23Cu ; |
| RECT -0.075 -0.075 0.075 0.075 ; |
| SPACING 0.32 BY 0.32 ; |
| END M2Cu_M3Cu |
| |
| VIARULE M3Cu_M4Cu GENERATE DEFAULT |
| LAYER M3Cu ; |
| ENCLOSURE 0.005 0.035 ; |
| LAYER M4Cu ; |
| ENCLOSURE 0.035 0.005 ; |
| LAYER V34Cu ; |
| RECT -0.075 -0.075 0.075 0.075 ; |
| SPACING 0.32 BY 0.32 ; |
| END M3Cu_M4Cu |
| |
| VIARULE M4Cu_M5Cu GENERATE DEFAULT |
| LAYER M4Cu ; |
| ENCLOSURE 0.035 0.005 ; |
| LAYER M5Cu ; |
| ENCLOSURE 0.005 0.035 ; |
| LAYER V45Cu ; |
| RECT -0.075 -0.075 0.075 0.075 ; |
| SPACING 0.32 BY 0.32 ; |
| END M4Cu_M5Cu |
| |
| VIARULE M5Cu_MTK1 GENERATE DEFAULT |
| LAYER M5Cu ; |
| ENCLOSURE 0.005 0.035 ; |
| LAYER MTK1 ; |
| ENCLOSURE 0.035 0.035 ; |
| LAYER VK01 ; |
| RECT -0.075 -0.075 0.075 0.075 ; |
| SPACING 0.32 BY 0.32 ; |
| END M5Cu_MTK1 |
| |
| |
| VIARULE MTK1_MRF1 GENERATE DEFAULT |
| LAYER MTK1 ; |
| ENCLOSURE 0.035 0.035 ; |
| LAYER MRF1 ; |
| ENCLOSURE 0.095 0.095 ; |
| LAYER VR01 ; |
| RECT -0.085 -0.085 0.085 0.085 ; |
| SPACING 0.42 BY 0.42 ; |
| END MTK1_MRF1 |
| |
| VIA M1CuM2Cu_C DEFAULT |
| LAYER M2Cu ; |
| RECT -0.1100 -0.0800 0.1100 0.0800 ; |
| LAYER V12Cu ; |
| RECT -0.0750 -0.0750 0.0750 0.0750 ; |
| LAYER M1Cu ; |
| RECT -0.0800 -0.1100 0.0800 0.1100 ; |
| END M1CuM2Cu_C |
| |
| |
| VIA M1CuM2Cu_EW |
| LAYER M2Cu ; |
| RECT -0.1100 -0.0800 0.1100 0.0800 ; |
| LAYER V12Cu ; |
| RECT -0.0750 -0.0750 0.0750 0.0750 ; |
| LAYER M1Cu ; |
| RECT -0.1100 -0.0800 0.1100 0.0800 ; |
| END M1CuM2Cu_EW |
| |
| |
| |
| VIA M1CuM2Cu_NS |
| LAYER M2Cu ; |
| RECT -0.0800 -0.1100 0.0800 0.1100 ; |
| LAYER V12Cu ; |
| RECT -0.0750 -0.0750 0.0750 0.0750 ; |
| LAYER M1Cu ; |
| RECT -0.0800 -0.1100 0.0800 0.1100 ; |
| END M1CuM2Cu_NS |
| |
| |
| |
| VIA M2CuM3Cu_C |
| LAYER M3Cu ; |
| RECT -0.0800 -0.1100 0.0800 0.1100 ; |
| LAYER V23Cu ; |
| RECT -0.0750 -0.0750 0.0750 0.0750 ; |
| LAYER M2Cu ; |
| RECT -0.1100 -0.0800 0.1100 0.0800 ; |
| END M2CuM3Cu_C |
| |
| VIA M3CuM4Cu_C |
| LAYER M4Cu ; |
| RECT -0.1100 -0.0800 0.1100 0.0800 ; |
| LAYER V34Cu ; |
| RECT -0.0750 -0.0750 0.0750 0.0750 ; |
| LAYER M3Cu ; |
| RECT -0.0800 -0.1100 0.0800 0.1100 ; |
| END M3CuM4Cu_C |
| |
| VIA M4CuM5Cu_C |
| LAYER M5Cu ; |
| RECT -0.0800 -0.1100 0.0800 0.1100 ; |
| LAYER V45Cu ; |
| RECT -0.0750 -0.0750 0.0750 0.0750 ; |
| LAYER M4Cu ; |
| RECT -0.1100 -0.0800 0.1100 0.0800 ; |
| END M4CuM5Cu_C |
| |
| |
| VIA M5Cu_MTK1 |
| LAYER M5Cu ; |
| RECT -0.080 -0.110 0.080 0.110 ; |
| LAYER VK01 ; |
| RECT -0.075 -0.075 0.075 0.075 ; |
| LAYER MTK1 ; |
| RECT -0.110 -0.110 0.110 0.110 ; |
| END M5Cu_MTK1 |
| |
| VIA MTK1_MRF1 |
| LAYER MTK1 ; |
| RECT -0.120 -0.120 0.120 0.120 ; |
| LAYER VR01 ; |
| RECT -0.085 -0.085 0.085 0.085 ; |
| LAYER MRF1 ; |
| RECT -0.180 -0.180 0.180 0.180 ; |
| END MTK1_MRF1 |
| |
| |
| |
| SITE core12t |
| SYMMETRY Y ; |
| CLASS core ; |
| SIZE 0.32 BY 3.84 ; |
| END core12t |
| |
| SITE core12tDH |
| SYMMETRY Y ; |
| CLASS core ; |
| SIZE 0.32 BY 7.68 ; |
| END core12tDH |
| |
| END LIBRARY |