| 6.2 MIM Capacitor |
| ================= |
| |
| Three types of MIM-capacitor are offered; they are 2.0fF/um2, 1.5fF/um2, 1.0 fF/um2. Extra mask layer (L92) is required for the MIM Cap. |
| |
| .. note:: |
| One process is only allowed to use one type of MIM-capacitor; it is not possible to have more than one type of MIM Caps in the same process flow with just one masking step. |
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| **(a) 1.5 fF/um2 MIM CAP (<=6V application)** |
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| .. csv-table:: |
| :file: tables_clear/6_Passive_Elements4.csv |
| |
| **(b) 1fF/um2 MIM CAP (<=20V application)** |
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| .. csv-table:: |
| :file: tables_clear/6_Passive_Elements5.csv |
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| **(c) 2fF/um2 Single MIM CAP (<=6V application)** |
| |
| .. csv-table:: |
| :file: tables_clear/6_Passive_Elements6.csv |
| |