6.2 MIM Capacitor
=================

Three types of MIM-capacitor are offered; they are 2.0fF/um2, 1.5fF/um2, 1.0 fF/um2. Extra mask layer (L92) is required for the MIM Cap.

.. note::
    One process is only allowed to use one type of MIM-capacitor; it is not possible to have more than one type of MIM Caps in the same process flow with just one masking step.

**(a) 1.5 fF/um2 MIM CAP (<=6V application)**

 .. csv-table::
    :file: tables_clear/6_Passive_Elements4.csv

**(b) 1fF/um2 MIM CAP (<=20V application)**

 .. csv-table::
    :file: tables_clear/6_Passive_Elements5.csv

**(c) 2fF/um2 Single MIM CAP (<=6V application)**

 .. csv-table::
    :file: tables_clear/6_Passive_Elements6.csv