| Conductor,"Thickness (um) |
| |
| for typical cap","Thickness (um) |
| |
| for best cap ","Thickness (um) |
| |
| for worst cap","Width (um) |
| |
| for typical cap","Width (um) |
| |
| for best cap","Width (um) |
| |
| for worst cap","Space (um) |
| |
| for typical cap","Space (um) |
| |
| for best cap","Space (um) |
| |
| for worst cap" |
| TM (6KA),0.7025,0.6325,0.7725,0.36,0.32,0.4,0.38,0.42,0.34 |
| TM (9KA),1.0025,0.9025,1.1025,0.44,0.4,0.48,0.46,0.5,0.42 |
| TM (11KA),1.25,1.125,1.375,0.44,0.4,0.48,0.46,0.5,0.42 |
| TM (30kA),3,2.7,3.3,1.8,1.62,1.98,1.8,1.98,1.62 |
| MIM_Top_Plate,0.295,0.265,0.325,1.06,0.954,1.166,0.6,0.706,0.494 |
| M5,0.55,0.5,0.6,0.28,0.25,0.31,0.28,0.31,0.25 |
| M4,0.55,0.5,0.6,0.28,0.25,0.31,0.28,0.31,0.25 |
| M3,0.55,0.5,0.6,0.28,0.25,0.31,0.28,0.31,0.25 |
| M2,0.55,0.5,0.6,0.28,0.25,0.31,0.28,0.31,0.25 |
| M1,0.55,0.5,0.6,0.23,0.2,0.26,0.23,0.26,0.2 |
| POLY1,0.2,0.19,0.21,0.18,0.16,0.2,0.25,0.27,0.23 |
