Conductor,"Thickness (um)

 for typical cap","Thickness (um)

 for best cap ","Thickness (um)

for worst cap","Width (um)

 for typical cap","Width (um)

for best cap","Width (um)

 for worst cap","Space (um)

 for typical cap","Space (um)

 for best cap","Space (um)

 for worst cap"
TM (6KA),0.7025,0.6325,0.7725,0.36,0.32,0.4,0.38,0.42,0.34
TM (9KA),1.0025,0.9025,1.1025,0.44,0.4,0.48,0.46,0.5,0.42
TM (11KA),1.25,1.125,1.375,0.44,0.4,0.48,0.46,0.5,0.42
TM (30kA),3,2.7,3.3,1.8,1.62,1.98,1.8,1.98,1.62
MIM_Top_Plate,0.295,0.265,0.325,1.06,0.954,1.166,0.6,0.706,0.494
M5,0.55,0.5,0.6,0.28,0.25,0.31,0.28,0.31,0.25
M4,0.55,0.5,0.6,0.28,0.25,0.31,0.28,0.31,0.25
M3,0.55,0.5,0.6,0.28,0.25,0.31,0.28,0.31,0.25
M2,0.55,0.5,0.6,0.28,0.25,0.31,0.28,0.31,0.25
M1,0.55,0.5,0.6,0.23,0.2,0.26,0.23,0.26,0.2
POLY1,0.2,0.19,0.21,0.18,0.16,0.2,0.25,0.27,0.23