| #---------------------------------------------------------- |
| # Copyright (c) 2019 R. Timothy Edwards |
| # Revisions: See below |
| # |
| # This file is an Open Source foundry process describing |
| # the SkyWater S8 hybrid 0.18um / 0.13um fabrication |
| # process. The file may be distributed under the terms |
| # of the (Apache 2.0(?)) license agreement. |
| # |
| #---------------------------------------------------------- |
| # This file is designed to be used with magic versions 8.2 |
| # or newer. |
| #---------------------------------------------------------- |
| tech |
| format 34 |
| EFS8A |
| end |
| |
| version |
| version 20191024 |
| description "SkyWater S8: PRE ALPHA Vendor Open Source rules and DRC" |
| end |
| |
| #---------------------------------------------------------- |
| # Status: 3/17/19: s8.tech created from xh018.tech |
| # |
| # Status: 3/20/19: Rev 0 (pre-alpha): |
| # Work in progress. Converted from original techfile to S8 |
| # with all sections updated with as much information as could |
| # be immediately gleaned from the documentation. Cifinput and |
| # DRC sections have been checked against one standard cell |
| # library. |
| #-------------------------------------------------------------- |
| |
| #-------------------------------------------------------------- |
| # Supported device types |
| #-------------------------------------------------------------- |
| # device name magic ID layer description |
| #------------------------------------------------------------- |
| # nshort nfet standard nFET |
| # nlowvt nfetlvt low Vt nFET |
| # sonos_p/e nsonos SONOS nFET |
| # pshort pfet standard pFET |
| # plowvt pfetlvt low Vt pFET |
| # phighvt pfethvt high Vt pFET |
| # ntvnative --- native nFET |
| # phv mvpfet thickox pFET |
| # nhv mvnfet thickox nFET |
| # nhvnative mvnnfet thickox native nFET |
| # ndiode ndiode n+ diff diode |
| # ndiode_h mvndiode thickox n+ diff diode |
| # pdiode pdiode p+ diff diode |
| # pdiode_h mvpdiode thickox p+ diff diode |
| # ndiode_native nndiode diode with nndiff |
| # ndiode_lvt ndiodelvt low Vt n+ diff diode |
| # pdiode_lvt pdiodelvt low Vt p+ diff diode |
| # pdiode_hvt pdiodehvt high Vt p+ diff diode |
| # nwdiode --- nwell diode |
| # dnwdiode_psub --- deep nwell diode to substrate |
| # dnwdiode_pw --- deep nwell diode to pwell |
| # xcmimc1 mimcap MiM cap 1st plate |
| # xcmimc2 mimcap2 MiM cap 2nd plate |
| # mrdn rdn n+ diff resistor |
| # mrdn_hv mvrdn thickox n+ diff resistor |
| # mrdp rdp p+ diff resistor |
| # mrdp_hv mvrdp thickox p+ diff resistor |
| # mrl1 rli local interconnect resistor |
| # mrp1 npres n+ poly resistor |
| # xhrpoly_* ppres (*) p+ poly resistor |
| # xcnwvc varactor varactor (low Vt?) |
| # xcnwvc2 varactorhvt high Vt varactor |
| # xchnwc mvvaractor thickox varactor |
| # xpwres rpw pwell resistor (in deep nwell) |
| # |
| # (*) Note that ppres may extract into some generic type |
| # called "xhrpoly", but only specific sizes of xhrpoly are |
| # allowed, and these are created from fixed layouts like the |
| # types below. |
| # |
| # To avoid creating a large number of types, a few ID layers are |
| # used in conjunction with standard devices types: "lvt" for |
| # low threshold voltage, and "hvt" for high threshold voltage. |
| # "dnwell" is used as an identifier layer where appropriate. |
| # Layer HVI (thick oxide) is treated differently, and types |
| # "mv*" are defined where thick oxide is required. |
| # |
| #------------------------------------------------------------- |
| # The following devices are not extracted but are represented |
| # only by script-generated subcells in the PDK. |
| #------------------------------------------------------------- |
| # nshortesd ESD nFET |
| # nhvesd ESD thickox nFET |
| # nhvnativeesd ESD native nFET |
| # phvesd ESD thickox pFET |
| # fnpass flash nFET device |
| # xchvnwc floating gate varactor |
| # npnpar1x* parasitic NPN |
| # npn_1x1_2p0_hv thickox gated parasitic NPN |
| # pnppar parasitic PNP |
| # pnppar5x parasitic PNP |
| # xesd_ndiode_h_*** ESD n+ diode |
| # xesd_pdiode_h_*** ESD p+ diode |
| # reslocsub local substrate island indicator |
| # xcmvpp Vpp cap |
| # xcmvpp_2 Vpp cap |
| # xcmvpp_* Vpp cap |
| # xcmvpp* Vpp cap |
| # balun balun inductor |
| # ind4 inductor |
| # fuse metal fuse device |
| #-------------------------------------------------------------- |
| |
| #----------------------------------------------------- |
| # Tile planes |
| #----------------------------------------------------- |
| |
| planes |
| dwell,dw |
| well,w |
| active,a |
| locali,li1,li |
| metal1,m1 |
| metal2,m2 |
| metal3,m3 |
| metal4,m4 |
| metal5,m5 |
| metali,mi |
| block,b |
| comment,c |
| end |
| |
| #----------------------------------------------------- |
| # Tile types |
| #----------------------------------------------------- |
| |
| types |
| # Deep nwell |
| dwell dnwell,dnw |
| |
| # Wells |
| well nwell,nw |
| -well pwell,pw |
| -well rpw,rpwell |
| -well obswell |
| |
| # Transistors |
| active nmos,ntransistor,nfet |
| active pmos,ptransistor,pfet |
| -active nnmos,nntransistor |
| active mvnmos,mvntransistor,mvnfet |
| active mvpmos,mvptransistor,mvpfet |
| -active mvnnmos,mvnntransistor,mvnnfet,nnfet |
| -active varactor,varact,var |
| -active mvvaractor,mvvaract,mvvar |
| |
| -active pmoslvt,pfetlvt |
| -active pmoshvt,pfethvt |
| -active nmoslvt,nfetlvt |
| -active varactorhvt,varacthvt,varhvt |
| -active nsonos,sonos |
| |
| # Diffusions |
| active ndiff,ndiffusion,ndif |
| active pdiff,pdiffusion,pdif |
| -active mvndiff,mvndiffusion,mvndif |
| -active mvpdiff,mvpdiffusion,mvpdif |
| active ndiffc,ndcontact,ndc |
| active pdiffc,pdcontact,pdc |
| -active mvndiffc,mvndcontact,mvndc |
| -active mvpdiffc,mvpdcontact,mvpdc |
| active psubdiff,psubstratepdiff,ppdiff,ppd,psd |
| active nsubdiff,nsubstratendiff,nndiff,nnd,nsd |
| -active mvpsubdiff,mvpsubstratepdiff,mvppdiff,mvppd,mvpsd |
| -active mvnsubdiff,mvnsubstratendiff,mvnndiff,mvnnd,mvnsd |
| active psubdiffcont,psubstratepcontact,psc |
| active nsubdiffcont,nsubstratencontact,nsc |
| -active mvpsubdiffcont,mvpsubstratepcontact,mvpsc |
| -active mvnsubdiffcont,mvnsubstratencontact,mvnsc |
| -active obsactive |
| -active mvobsactive |
| |
| # Poly |
| active poly,p,polysilicon |
| active polycont,pc,pcontact,polycut,polyc |
| |
| # Resistors |
| -active npolyres,npres,mrp1 |
| -active ppolyres,ppres,xhrpoly |
| -active ndiffres,rnd,rdn,rndiff |
| -active pdiffres,rpd,rdp,rpdiff |
| -active mvndiffres,mvrnd,mvrdn,mvrndiff |
| -active mvpdiffres,mvrpd,mvrdp,mvrpdiff |
| |
| # Diodes |
| -active pdiode,pdi |
| -active ndiode,ndi |
| -active nndiode,nndi |
| -active pdiodec,pdic |
| -active ndiodec,ndic |
| -active nndiodec,nndic |
| -active mvpdiode,mvpdi |
| -active mvndiode,mvndi |
| -active mvpdiodec,mvpdic |
| -active mvndiodec,mvndic |
| -active pdiodelvt,pdilvt |
| -active pdiodehvt,pdihvt |
| -active ndiodelvt,ndilvt |
| -active pdiodelvtc,pdilvtc |
| -active pdiodehvtc,pdihvtc |
| -active ndiodelvtc,ndilvtc |
| |
| # Local Interconnect |
| locali locali,li1,li |
| -locali rlocali,rli1,rli |
| locali viali,vial,lic,licon,m1c,v0 |
| -locali obsli1,obsli |
| -locali obsli1c,obslic,obslicon |
| |
| # Metal 1 |
| metal1 metal1,m1,met1 |
| -metal1 rmetal1,rm1,rmet1 |
| metal1 via1,m2contact,m2cut,m2c,via,v,v1 |
| -metal1 obsm1 |
| -metal1 padl |
| |
| # Metal 2 |
| metal2 metal2,m2,met2 |
| -metal2 rmetal2,rm2,rmet2 |
| metal2 via2,m3contact,m3cut,m3c,v2 |
| -metal2 obsm2 |
| |
| # Metal 3 |
| metal3 metal3,m3,met3 |
| -metal3 rmetal3,rm3,rmet3 |
| -metal3 obsm3 |
| metal3 via3,v3 |
| -metal2 mimcapcontact,mimcapc,mimcc,capmc |
| -metal3 mimcap,mim,capm |
| |
| # Metal 4 |
| metal4 metal4,m4,met4 |
| -metal4 rmetal4,rm4,rmet4 |
| -metal4 obsm4 |
| metal4 via4,v4 |
| -metal3 mimcap2contact,mimcap2c,mim2cc,capm2c |
| -metal4 mimcap2,mim2,capm2 |
| |
| # Metal 5 |
| metal5 metal5,m5,met5 |
| -metal5 rm5,rmetal5,rmet5 |
| -metal5 obsm5 |
| |
| -metali metalrdl,mrdl,metrdl |
| |
| # Miscellaneous |
| -block glass |
| -block fillblock |
| -comment comment |
| -comment obscomment |
| |
| end |
| |
| #----------------------------------------------------- |
| # Magic contact types |
| #----------------------------------------------------- |
| |
| contact |
| pc poly locali |
| ndc ndiff locali |
| pdc pdiff locali |
| nsc nsd locali |
| psc psd locali |
| ndic ndiode locali |
| nndic nndiode locali |
| pdic pdiode locali |
| |
| mvndc mvndiff locali |
| mvpdc mvpdiff locali |
| mvnsc mvnsd locali |
| mvpsc mvpsd locali |
| mvndic mvndiode locali |
| mvpdic mvpdiode locali |
| |
| lic locali metal1 |
| |
| via1 metal1 metal2 |
| via2 metal2 metal3 |
| mimcc metal2 mimcap |
| mim2cc metal3 mimcap2 |
| via3 metal3 metal4 |
| via4 metal4 metal5 |
| stackable |
| |
| padl m1 m2 m3 m4 m5 glass |
| end |
| |
| #----------------------------------------------------- |
| # Layer aliases |
| #----------------------------------------------------- |
| |
| aliases |
| |
| allwellplane nwell |
| allnwell nwell,obswell |
| |
| allnfets nfet,mvnfet,mvnnfet,nfetlvt,nsonos |
| allpfets pfet,mvpfet,pfethvt,pfetlvt |
| allfets allnfets,allpfets,varactor,mvvaractor,varhvt |
| |
| allnactivenonfet *ndiff,*nsd,*ndiode,*nndiode,*mvndiff,*mvnsd,*mvndiode,*ndiodelvt |
| allnactive allnactivenonfet,allnfets |
| allnactivenontap *ndiff,*ndiode,*nndiode,*mvndiff,*mvndiode,*ndiodelvt,allnfets |
| allnactivetap *nsd,*mvnsd |
| |
| allpactivenonfet *pdiff,*psd,*pdiode,*mvpdiff,*mvpsd,*mvpdiode,*pdiodelvt,*pdiodehvt |
| allpactive allpactivenonfet,allpfets |
| allpactivenontap *pdiff,*pdiode,*mvpdiff,*mvpdiode,*pdiodelvt,*pdiodehvt,allpfets |
| allpactivetap *psd,*mvpsd |
| |
| allactivenonfet allnactivenonfet,allpactivenonfet |
| allactive allactivenonfet,allfets |
| |
| allactiveres ndiffres,pdiffres,mvndiffres,mvpdiffres |
| |
| allndifflv *ndif,*nsd,*ndiode,ndiffres,nfet,nfetlvt,nsonos |
| allpdifflv *pdif,*psd,*pdiode,pdiffres,pfet,pfetlvt,pfethvt |
| alldifflv allndifflv,allpdifflv |
| allndifflvnonfet *ndif,*nsd,*ndiode,*nndiode,ndiffres,*ndiodelvt |
| allpdifflvnonfet *pdif,*psd,*pdiode,pdiffres,*pdiodelvt,*pdiodehvt |
| alldifflvnonfet allndifflvnonfet,allpdifflvnonfet |
| |
| allndiffmv *mvndif,*mvnsd,*mvndiode,*nndiode,mvndiffres,mvnfet,mvnnfet |
| allpdiffmv *mvpdif,*mvpsd,*mvpdiode,mvpdiffres,mvpfet |
| alldiffmv allndiffmv,allpdiffmv |
| allndiffmvnonfet *mvndif,*mvnsd,*mvndiode,*nndiode,mvndiffres |
| allpdiffmvnonfet *mvpdif,*mvpsd,*mvpdiode,mvpdiffres |
| alldiffmvnonfet allndiffmvnonfet,allpdiffmvnonfet |
| |
| alldiffnonfet alldifflvnonfet,alldiffmvnonfet |
| alldiff alldifflv,alldiffmv |
| |
| allpolyres mrp1,xhrpoly |
| allsblkgennocap_0_4um mrp1,xhrpoly,rnd,rpd,mvrdn,mvrdp |
| |
| allpolynonfet *poly,allpolyres |
| allpolynonres *poly,allfets |
| |
| allpoly allpolynonfet,allfets |
| allpolynoncap *poly,allfets,allpolyres |
| |
| allndiffcontlv ndc,nsc,ndic,ndilvtc |
| allpdiffcontlv pdc,psc,pdic,pdilvtc,pdihvtc |
| allndiffcontmv mvndc,mvnsc,mvndic |
| allpdiffcontmv mvpdc,mvpsc,mvpdic |
| allndiffcont allndiffcontlv,allndiffcontmv |
| allpdiffcont allpdiffcontlv,allpdiffcontmv |
| alldiffcontlv allndiffcontlv,allpdiffcontlv |
| alldiffcontmv allndiffcontmv,allpdiffcontmv |
| alldiffcont alldiffcontlv,alldiffcontmv |
| |
| allcont alldiffcont,pc |
| |
| allres allpolyres,allactiveres |
| |
| allli *locali,rli |
| allm1 *m1,rm1 |
| allm2 *m2,rm2 |
| allm3 *m3,rm3 |
| allm4 *m4,rm4 |
| allm5 *m5,rm5 |
| |
| allpad padl |
| |
| psub pwell |
| |
| end |
| |
| #----------------------------------------------------- |
| # Layer drawing styles |
| #----------------------------------------------------- |
| |
| styles |
| styletype mos |
| dnwell cwell |
| nwell nwell |
| pwell pwell |
| rpwell pwell ptransistor_stripes |
| ndiff ndiffusion |
| pdiff pdiffusion |
| nsd ndiff_in_nwell |
| psd pdiff_in_pwell |
| nfet ntransistor ntransistor_stripes |
| pfet ptransistor ptransistor_stripes |
| var polysilicon ndiff_in_nwell |
| ndc ndiffusion metal1 contact_X'es |
| pdc pdiffusion metal1 contact_X'es |
| nsc ndiff_in_nwell metal1 contact_X'es |
| psc pdiff_in_pwell metal1 contact_X'es |
| |
| pfetlvt ptransistor ptransistor_stripes implant1 |
| pfethvt ptransistor ptransistor_stripes implant2 |
| nfetlvt ntransistor ntransistor_stripes implant1 |
| nsonos ntransistor implant3 |
| |
| mvndiff ndiffusion hvndiff_mask |
| mvpdiff pdiffusion hvpdiff_mask |
| mvnsd ndiff_in_nwell hvndiff_mask |
| mvpsd pdiff_in_pwell hvpdiff_mask |
| mvnfet ntransistor ntransistor_stripes hvndiff_mask |
| mvnnfet ntransistor ndiff_in_nwell hvndiff_mask |
| mvpfet ptransistor ptransistor_stripes |
| mvvar polysilicon ndiff_in_nwell hvndiff_mask |
| mvndc ndiffusion metal1 contact_X'es hvndiff_mask |
| mvpdc pdiffusion metal1 contact_X'es hvpdiff_mask |
| mvnsc ndiff_in_nwell metal1 contact_X'es hvndiff_mask |
| mvpsc pdiff_in_pwell metal1 contact_X'es hvpdiff_mask |
| |
| poly polysilicon |
| pc polysilicon metal1 contact_X'es |
| npolyres polysilicon silicide_block nselect2 |
| ppolyres polysilicon silicide_block pselect2 |
| |
| pdiode pdiffusion pselect2 |
| ndiode ndiffusion nselect2 |
| pdiodec pdiffusion pselect2 metal1 contact_X'es |
| ndiodec ndiffusion nselect2 metal1 contact_X'es |
| |
| ndiodelvt ndiffusion nselect2 implant1 |
| pdiodelvt pdiffusion pselect2 implant1 |
| pdiodehvt pdiffusion pselect2 implant2 |
| |
| mvpdiode pdiffusion pselect2 hvpdiff_mask |
| mvndiode ndiffusion nselect2 hvndiff_mask |
| nndiode ndiff_in_nwell nselect2 hvndiff_mask |
| mvpdiodec pdiffusion pselect2 metal1 contact_X'es hvpdiff_mask |
| mvndiodec ndiffusion nselect2 metal1 contact_X'es hvndiff_mask |
| nndiodec ndiff_in_nwell nselect2 metal1 contact_X'es hvndiff_mask |
| |
| locali metal1 |
| rli metal1 poly_resist_stripes |
| lic metal1 metal2 via1arrow |
| obsli metal1 |
| |
| metal1 metal2 |
| rm1 metal2 poly_resist_stripes |
| obsm1 metal2 |
| m2c metal2 metal3 via2arrow |
| metal2 metal3 |
| rm2 metal3 poly_resist_stripes |
| obsm2 metal3 |
| m3c metal3 metal4 via3alt |
| metal3 metal4 |
| rm3 metal4 poly_resist_stripes |
| obsm3 metal4 |
| mimcap metal3 metal2 |
| mimcc metal3 contact_X'es mems |
| mimcap2 metal4 metal3 |
| mim2cc metal4 contact_X'es mems |
| via3 metal4 metal5 via4 |
| metal4 metal5 |
| rm4 metal5 poly_resist_stripes |
| obsm4 metal5 |
| via4 metal5 metal6 via5 |
| metal5 metal6 |
| rm5 metal6 poly_resist_stripes |
| obsm5 metal6 |
| metalrdl metal7 |
| |
| glass overglass |
| mrp1 poly_resist poly_resist_stripes |
| xhrpoly poly_resist silicide_block |
| ndiffres ndiffusion ndop_stripes |
| pdiffres pdiffusion pdop_stripes |
| mvndiffres ndiffusion hvndiff_mask ndop_stripes |
| mvpdiffres pdiffusion hvpdiff_mask pdop_stripes |
| comment comment |
| error_p error_waffle |
| error_s error_waffle |
| error_ps error_waffle |
| fillblock cwell |
| |
| obswell cwell |
| obsactive implant4 |
| |
| padl metal6 via6 overglass |
| |
| magnet substrate_field_implant |
| rotate via3alt |
| fence via5 |
| end |
| |
| #----------------------------------------------------- |
| # Special paint/erase rules |
| #----------------------------------------------------- |
| |
| compose |
| compose nfet poly ndiff |
| compose pfet poly pdiff |
| compose var poly nsd |
| |
| compose mvnfet poly mvndiff |
| compose mvpfet poly mvpdiff |
| compose mvvar poly mvnsd |
| |
| paint mimcap m3 mimcap |
| paint mimcapc m3 mimcapc |
| paint mimcap2 m4 mimcap2 |
| paint mimcap2c m4 mimcap2c |
| |
| paint ndc nwell pdc |
| paint nfet nwell pfet |
| paint ndiff nwell pdiff |
| paint psd nwell nsd |
| paint psc nwell nsc |
| |
| paint pdc pwell ndc |
| paint pfet pwell nfet |
| paint pdiff pwell ndiff |
| paint nsd pwell psd |
| paint nsc pwell psc |
| |
| paint m4 obsm4 m4 |
| paint m5 obsm5 m5 |
| end |
| |
| #----------------------------------------------------- |
| # Electrical connectivity |
| #----------------------------------------------------- |
| |
| connect |
| *nwell,*nsd,*mvnsd *nwell,*nsd,*mvnsd |
| pwell,*psd,*mvpsd pwell,*psd,*mvpsd |
| *li *li |
| *m1 *m1 |
| *m2 *m2 |
| *m3 *m3 |
| *m4 *m4 |
| *m5 *m5 |
| *mimcap *mimcap |
| *mimcap2 *mimcap2 |
| allnactivenonfet allnactivenonfet |
| allpactivenonfet allpactivenonfet |
| *poly,allfets *poly,allfets |
| # RDL connects to m5 (i.e., padl) through glass cut |
| glass metrdl |
| end |
| |
| #----------------------------------------------------- |
| # CIF/GDS output layer definitions |
| #----------------------------------------------------- |
| # NOTE: All values in this section MUST be multiples of 25 |
| # or else magic will scale below the allowed layout grid size |
| |
| cifoutput |
| |
| #---------------------------------------------------------------- |
| style gdsii |
| # NOTE: This section is used for actual GDS output |
| #---------------------------------------------------------------- |
| scalefactor 10 nanometers |
| options calma-permissive-labels |
| gridlimit 5 |
| |
| #---------------------------------------------------------------- |
| # DNWELL |
| #---------------------------------------------------------------- |
| |
| layer DNWELL dnwell |
| calma 64 18 |
| |
| layer PWRES rpw |
| and dnwell |
| calma 64 13 |
| |
| #---------------------------------------------------------------- |
| # NWELL |
| #---------------------------------------------------------------- |
| |
| layer NWELL allnwell |
| calma 64 20 |
| |
| templayer nwell_grow allnwell |
| grow 430 |
| |
| #---------------------------------------------------------------- |
| # DIFF |
| #---------------------------------------------------------------- |
| |
| layer DIFF allnactivenontap,allpactivenontap |
| labels allnactivenontap,allpactivenontap |
| calma 65 20 |
| |
| #---------------------------------------------------------------- |
| # TAP |
| #---------------------------------------------------------------- |
| |
| layer TAP allnactivetap,allpactivetap |
| labels allnactivetap,allpactivetap |
| calma 65 44 |
| |
| #---------------------------------------------------------------- |
| # PPLUS, NPLUS (PSDM, NSDM) |
| #---------------------------------------------------------------- |
| |
| layer PPLUS allpactivetap |
| grow 180 |
| calma 94 20 |
| |
| layer PPLUS allpactivenontap |
| grow 180 |
| calma 94 20 |
| |
| layer NPLUS allnactivetap |
| grow 180 |
| calma 93 44 |
| |
| layer NPLUS allnactivenontap |
| grow 180 |
| calma 93 44 |
| |
| layer PPLUS |
| bloat-all xhrpoly *poly |
| grow 110 |
| calma 94 20 |
| |
| #---------------------------------------------------------------- |
| # LVTN |
| #---------------------------------------------------------------- |
| |
| layer LVTN pfetlvt,nfetlvt,mvvar,mvnnfet,pdiodelvt,ndiodelvt,nndiode |
| grow 180 |
| calma 125 44 |
| |
| #---------------------------------------------------------------- |
| # HVTP |
| #---------------------------------------------------------------- |
| |
| layer HVTP pfethvt,varhvt,pdiodehvt |
| grow 180 |
| calma 78 44 |
| |
| #---------------------------------------------------------------- |
| # SONOS |
| #---------------------------------------------------------------- |
| |
| layer SONOS nsonos |
| grow 100 |
| calma 80 20 |
| |
| #---------------------------------------------------------------- |
| # RPM |
| #---------------------------------------------------------------- |
| |
| layer RPM |
| bloat-all xhrpoly *poly |
| grow 200 |
| calma 86 20 |
| |
| #---------------------------------------------------------------- |
| # POLY |
| #---------------------------------------------------------------- |
| |
| layer POLY allpoly |
| calma 66 20 |
| |
| layer POLYTXT |
| labels allpoly noport |
| calma 66 16 |
| |
| layer POLYPIN |
| labels allpoly port |
| calma 66 5 |
| |
| #---------------------------------------------------------------- |
| # THKOX (HVI) |
| #---------------------------------------------------------------- |
| |
| layer THKOX alldiffmv,mvvar |
| grow 3600 |
| shrink 3280 |
| bloat-all alldiffmv nwell |
| calma 75 20 |
| |
| #---------------------------------------------------------------- |
| # CONT (LICON) |
| #---------------------------------------------------------------- |
| |
| layer CONT allcont |
| squares-grid 0 170 170 |
| calma 66 44 |
| |
| #---------------------------------------------------------------- |
| # NPC (Nitride poly cut) |
| # surrounds CONT (LICON) on poly only (i.e., pc) |
| #---------------------------------------------------------------- |
| |
| layer NPC pc |
| squares-grid 0 170 170 |
| grow 100 |
| calma 95 20 |
| |
| # NPC is also generated around xhrpoly resistors |
| |
| layer NPC |
| bloat-all xhrpoly *poly |
| grow 95 |
| calma 95 20 |
| |
| #---------------------------------------------------------------- |
| # Device markers |
| #---------------------------------------------------------------- |
| |
| layer DIFFRES rdn,mvrdn,rdp,mvrdp |
| calma 65 13 |
| |
| layer POLYRES mrp1,xhrpoly |
| calma 66 13 |
| |
| layer DIODE *pdi,*ndi,*nndi,*mvpdi,*mvndi,*pdilvt,*pdihvt,*ndilvt |
| # To be done: Expand to include anode, cathode, and guard ring |
| calma 81 23 |
| |
| #---------------------------------------------------------------- |
| # LI |
| #---------------------------------------------------------------- |
| layer LI allli |
| calma 67 20 |
| |
| #---------------------------------------------------------------- |
| # MCON |
| #---------------------------------------------------------------- |
| layer MCON lic |
| squares-grid 0 170 190 |
| calma 67 44 |
| |
| #---------------------------------------------------------------- |
| # MET1 |
| #---------------------------------------------------------------- |
| layer MET1 allm1 |
| calma 68 20 |
| |
| layer MET1TXT |
| labels allm1 noport |
| calma 68 16 |
| |
| layer MET1PIN |
| labels allm1 port |
| calma 68 5 |
| |
| #---------------------------------------------------------------- |
| # VIA1 |
| #---------------------------------------------------------------- |
| layer VIA1 via1 |
| squares-grid 55 150 170 |
| calma 68 44 |
| |
| #---------------------------------------------------------------- |
| # MET2 |
| #---------------------------------------------------------------- |
| layer MET2 allm2 |
| calma 69 20 |
| |
| layer MET2TXT |
| labels allm2 noport |
| calma 69 16 |
| |
| layer MET2PIN |
| labels allm2 port |
| calma 69 5 |
| |
| #---------------------------------------------------------------- |
| # VIA2 |
| #---------------------------------------------------------------- |
| layer VIA2 via2 |
| squares-grid 40 200 200 |
| calma 69 44 |
| |
| #---------------------------------------------------------------- |
| # MET3 |
| #---------------------------------------------------------------- |
| layer MET3 allm3 |
| calma 70 20 |
| |
| layer MET3TXT |
| labels allm3 noport |
| calma 70 5 |
| |
| layer MET3PIN |
| labels allm3 port |
| calma 70 16 |
| |
| #---------------------------------------------------------------- |
| # VIA3 |
| #---------------------------------------------------------------- |
| layer VIA3 via3 |
| squares-grid 60 200 200 |
| calma 70 44 |
| |
| #---------------------------------------------------------------- |
| # MET4 |
| #---------------------------------------------------------------- |
| layer MET4 allm4 |
| labels allm4 noport |
| calma 71 20 |
| |
| layer MET4TXT |
| labels allm4 noport |
| calma 71 16 |
| |
| layer MET4PIN |
| labels allm4 port |
| calma 71 5 |
| |
| #---------------------------------------------------------------- |
| # VIA4 |
| #---------------------------------------------------------------- |
| layer VIA4 via4 |
| squares-grid 190 800 800 |
| calma 71 44 |
| |
| #---------------------------------------------------------------- |
| # MET5 |
| #---------------------------------------------------------------- |
| layer MET5 allm5 |
| calma 72 20 |
| |
| layer MET5TXT |
| labels allm5 noport |
| calma 50 16 |
| |
| layer MET5PIN |
| labels allm5 port |
| calma 50 5 |
| |
| #---------------------------------------------------------------- |
| # RDL |
| #---------------------------------------------------------------- |
| layer RDL metrdl |
| calma 74 20 |
| |
| layer RDLTXT |
| labels metrdl noport |
| calma 74 16 |
| |
| layer RDLPIN |
| labels metrdl port |
| calma 74 5 |
| |
| #---------------------------------------------------------------- |
| # GLASS |
| #---------------------------------------------------------------- |
| layer GLASS glass |
| calma 76 20 |
| |
| #---------------------------------------------------------------- |
| # BOUND |
| #---------------------------------------------------------------- |
| layer BOUND |
| boundary |
| calma 81 4 |
| |
| #---------------------------------------------------------------- |
| # CAPM |
| #---------------------------------------------------------------- |
| layer CAPM *mimcap |
| labels mimcap |
| calma 89 44 |
| |
| layer CAPM2 *mimcap2 |
| labels mimcap2 |
| calma 97 44 |
| |
| #---------------------------------------------------------------- |
| # FILLBLOCK |
| #---------------------------------------------------------------- |
| layer FILLOBSM1 fillblock |
| calma 62 24 |
| |
| layer FILLOBSM2 fillblock |
| calma 105 52 |
| |
| layer FILLOBSM3 fillblock |
| calma 107 24 |
| |
| layer FILLOBSM4 fillblock |
| calma 112 4 |
| |
| #---------------------------------------------------------------- |
| style drc |
| #---------------------------------------------------------------- |
| # NOTE: This style is used for DRC only, not for GDS output |
| #---------------------------------------------------------------- |
| scalefactor 10 nanometers |
| options calma-permissive-labels |
| |
| # Ensure nwell overlaps dnwell at least 0.4um outside and 1.03um inside |
| templayer dnwell_shrink dnwell |
| shrink 1030 |
| |
| templayer nwell_missing dnwell |
| grow 400 |
| and-not dnwell_shrink |
| and-not nwell |
| |
| # SONOS nFET devices must be in deep nwell |
| templayer dnwell_missing nsonos |
| and-not dnwell |
| |
| templayer ptap_reach *psd,*mvpsd |
| grow 1600 |
| and-not allnwell |
| grow 1600 |
| and-not allnwell |
| grow 1600 |
| and-not allnwell |
| grow 1600 |
| and-not allnwell |
| grow 1600 |
| and-not allnwell |
| grow 1600 |
| and-not allnwell |
| grow 1600 |
| and-not allnwell |
| grow 800 |
| |
| templayer ptap_missing *ndiff,*mvndiff |
| and-not ptap_reach |
| |
| templayer ntap_reach *nsd |
| grow 1600 |
| and allnwell |
| grow 1600 |
| and allnwell |
| grow 1600 |
| and allnwell |
| grow 1600 |
| and allnwell |
| grow 800 |
| and allnwell |
| |
| templayer mvntap_reach *mvnsd |
| grow 1600 |
| and allnwell |
| grow 1600 |
| and allnwell |
| grow 1600 |
| and allnwell |
| grow 1600 |
| and allnwell |
| grow 800 |
| and allnwell |
| |
| templayer mvptap_reach *mvpsd |
| grow 1600 |
| and-not allnwell |
| grow 1600 |
| and-not allnwell |
| grow 1600 |
| and-not allnwell |
| grow 1600 |
| and-not allnwell |
| grow 800 |
| and-not allnwell |
| |
| templayer ntap_missing *pdiff |
| and-not ntap_reach |
| |
| templayer mvntap_missing *mvpdiff |
| and-not mvntap_reach |
| |
| templayer mvptap_missing *mvndiff |
| and-not mvptap_reach |
| |
| #---------------------------------------------------------------- |
| style metfill |
| #---------------------------------------------------------------- |
| # NOTE: This section used for metal filling output |
| # by a sequence of cif paint commands |
| #---------------------------------------------------------------- |
| |
| scalefactor 10 nanometers |
| options calma-permissive-labels |
| gridlimit 5 |
| |
| #---------------------------------------------------------------- |
| # MET1 FILL |
| #---------------------------------------------------------------- |
| templayer slots_m1 |
| bbox top |
| slots 32000 1150 1650 32000 13350 14650 |
| templayer slots_m1 |
| bbox top |
| slots 33400 1150 1650 46000 13350 14650 |
| templayer obstruct_m1 allm1,allpad,allngf |
| grow 800 |
| shrink 500 |
| grow 500 |
| layer met1fill slots_m1 |
| and-not obstruct_m1 |
| shrink 550 |
| grow 550 |
| |
| #---------------------------------------------------------------- |
| # MET2 FILL |
| #---------------------------------------------------------------- |
| templayer slots_m2 |
| bbox top |
| slots 32000 13350 14650 32000 1150 1650 |
| templayer slots_m2 |
| bbox top |
| slots 46000 13350 14650 33400 1150 1650 |
| templayer obstruct_m2 allm2,allpad,allngf |
| grow 800 |
| shrink 500 |
| grow 500 |
| layer met2fill slots_m2 |
| and-not obstruct_m2 |
| shrink 550 |
| grow 550 |
| |
| #---------------------------------------------------------------- |
| # MET3 FILL |
| #---------------------------------------------------------------- |
| templayer slots_m3 |
| bbox top |
| slots 33400 1150 1650 32000 13350 14650 |
| templayer slots_m3 |
| bbox top |
| slots 32000 1150 1650 46000 13350 14650 |
| templayer obstruct_m3 allm3,allpad,allngf |
| grow 800 |
| shrink 500 |
| grow 500 |
| layer met3fill slots_m3 |
| and-not obstruct_m3 |
| shrink 550 |
| grow 550 |
| |
| |
| #---------------------------------------------------------------- |
| # MET4 FILL |
| #---------------------------------------------------------------- |
| templayer slots_m4 |
| bbox top |
| slots 32000 11500 2500 32000 4500 2500 |
| templayer obstruct_m4 allm4,allpad,allngf |
| grow 500 |
| shrink 500 |
| grow 500 |
| layer met4fill slots_m4 |
| and-not obstruct_m4 |
| shrink 220 |
| grow 220 |
| |
| #---------------------------------------------------------------- |
| # MET5 FILL |
| #---------------------------------------------------------------- |
| templayer slots_m5 |
| bbox top |
| slots 32000 11500 2500 32000 4500 2500 |
| templayer obstruct_m5 allm5,allpad,allngf |
| grow 500 |
| shrink 500 |
| grow 500 |
| layer met4fill slots_m5 |
| and-not obstruct_m5 |
| shrink 220 |
| grow 220 |
| |
| end |
| |
| #----------------------------------------------------------------------- |
| cifinput |
| #----------------------------------------------------------------------- |
| # NOTE: All values in this section MUST be multiples of 25 |
| # or else magic will scale below the allowed layout grid size |
| #----------------------------------------------------------------------- |
| |
| style vendorimport |
| scalefactor 10 nanometers |
| gridlimit 5 |
| |
| options ignore-unknown-layer-labels no-reconnect-labels |
| |
| ignore NPC |
| ignore AREAID |
| |
| layer nwell NWELL,WELLTXT,WELLPIN |
| labels NWELL |
| labels WELLTXT text |
| labels WELLPIN port |
| |
| layer pwell PWELLTXT,PWELLPIN,SUBTXT |
| labels PWELLTXT text |
| labels PWELLPIN port |
| labels SUBTXT text |
| |
| layer dnwell DNWELL |
| labels DNWELL |
| |
| layer rpw PWRES |
| and DNWELL |
| labels PWRES |
| |
| templayer ndiffarea DIFF,DIFFTXT,DIFFPIN |
| and-not POLY |
| and-not NWELL |
| and-not PPLUS |
| and-not DIODE |
| and-not THKOX |
| and NPLUS |
| copyup ndifcheck |
| labels DIFF |
| labels DIFFTXT text |
| labels DIFFPIN port |
| labels TAPPIN port |
| |
| layer ndiff ndiffarea |
| |
| # Copy ndiff areas up for contact checks |
| templayer xndifcheck ndifcheck |
| copyup ndifcheck |
| |
| templayer mvndiffarea DIFF,DIFFTXT,DIFFPIN |
| and-not POLY |
| and-not NWELL |
| and-not PPLUS |
| and-not DIODE |
| and THKOX |
| and NPLUS |
| copyup ndifcheck |
| labels DIFF |
| labels DIFFTXT text |
| labels DIFFPIN port |
| |
| layer mvndiff mvndiffarea |
| |
| # Copy ndiff areas up for contact checks |
| templayer mvxndifcheck mvndifcheck |
| copyup mvndifcheck |
| |
| layer ndiode DIFF |
| and NPLUS |
| and DIODE |
| and-not NWELL |
| and-not POLY |
| and-not PPLUS |
| and-not THKOX |
| and-not LVTN |
| labels DIFF |
| |
| layer ndiodelvt DIFF |
| and NPLUS |
| and DIODE |
| and-not NWELL |
| and-not POLY |
| and-not PPLUS |
| and-not THKOX |
| and LVTN |
| labels DIFF |
| |
| templayer ndiodearea DIODE |
| and NPLUS |
| and-not THKOX |
| and-not NWELL |
| copyup DIODE,NPLUS |
| |
| layer ndiffres DIFFRES |
| and NPLUS |
| and-not THKOX |
| labels DIFF |
| |
| templayer pdiffarea DIFF,DIFFTXT,DIFFPIN |
| and-not POLY |
| and NWELL |
| and-not NPLUS |
| and-not DIODE |
| and-not THKOX |
| and PPLUS |
| copyup pdifcheck |
| labels DIFF |
| labels DIFFTXT text |
| labels DIFFPIN port |
| |
| layer pdiff pdiffarea |
| |
| layer mvndiode DIFF |
| and NPLUS |
| and DIODE |
| and THKOX |
| and-not POLY |
| and-not PPLUS |
| and-not LVTN |
| labels DIFF |
| |
| layer nndiode DIFF |
| and NPLUS |
| and DIODE |
| and THKOX |
| and-not POLY |
| and-not PPLUS |
| and LVTN |
| labels DIFF |
| |
| templayer mvndiodearea DIODE |
| and NPLUS |
| and THKOX |
| and-not NWELL |
| copyup DIODE,NPLUS |
| |
| layer mvndiffres DIFFRES |
| and NPLUS |
| and THKOX |
| labels DIFF |
| |
| templayer mvpdiffarea DIFF,DIFFTXT,DIFFPIN |
| and-not POLY |
| and NWELL |
| and-not NPLUS |
| and THKOX |
| and-not DIODE |
| and PPLUS |
| copyup mvpdifcheck |
| labels DIFF |
| labels DIFFTXT text |
| labels DIFFPIN port |
| |
| layer mvpdiff mvpdiffarea |
| |
| # Copy pdiff areas up for contact checks |
| templayer xpdifcheck pdifcheck |
| copyup pdifcheck |
| |
| layer pdiode DIFF |
| and PPLUS |
| and-not POLY |
| and-not NPLUS |
| and-not THKOX |
| and-not LVTN |
| and-not HVTP |
| and DIODE |
| labels DIFF |
| |
| layer pdiodelvt DIFF |
| and PPLUS |
| and-not POLY |
| and-not NPLUS |
| and-not THKOX |
| and LVTN |
| and-not HVTP |
| and DIODE |
| labels DIFF |
| |
| layer pdiodehvt DIFF |
| and PPLUS |
| and-not POLY |
| and-not NPLUS |
| and-not THKOX |
| and-not LVTN |
| and HVTP |
| and DIODE |
| labels DIFF |
| |
| templayer pdiodearea DIODE |
| and PPLUS |
| and-not THKOX |
| copyup DIODE,PPLUS |
| |
| # Define pfet areas as known pdiff, regardless of the presence of a well. |
| |
| templayer pfetarea DIFF |
| and-not NPLUS |
| and-not THKOX |
| and POLY |
| |
| layer pfet pfetarea |
| and-not LVTN |
| and-not HVTP |
| labels DIFF |
| |
| layer pfetlvt pfetarea |
| and LVTN |
| labels DIFF |
| |
| layer pfethvt pfetarea |
| and HVTP |
| labels DIFF |
| |
| # Always force nwell under pfet (nwell encloses pdiff by 0.18) |
| layer nwell pfetarea |
| grow 180 |
| |
| # Copy mvpdiff areas up for contact checks |
| templayer mvxpdifcheck mvpdifcheck |
| copyup mvpdifcheck |
| |
| layer mvpdiode DIFF |
| and PPLUS |
| and-not POLY |
| and-not NPLUS |
| and THKOX |
| and DIODE |
| labels DIFF |
| |
| templayer mvpdiodearea DIODE |
| and PPLUS |
| and THKOX |
| copyup DIODE,PPLUS |
| |
| # Define pfet areas as known pdiff, |
| # regardless of the presence of a |
| # well. |
| |
| templayer mvpfetarea DIFF |
| and-not NPLUS |
| and THKOX |
| and POLY |
| |
| layer mvpfet mvpfetarea |
| labels DIFF |
| |
| layer pdiff DIFF,DIFFTXT,DIFFPIN |
| and-not NPLUS |
| and-not POLY |
| and-not THKOX |
| labels DIFF |
| labels DIFFTXT text |
| labels DIFFPIN port |
| |
| layer pdiffres DIFFRES |
| and PPLUS |
| and NWELL |
| and-not THKOX |
| labels DIFF |
| |
| layer nfet DIFF |
| and POLY |
| and-not PPLUS |
| and NPLUS |
| and-not THKOX |
| and-not LVTN |
| and-not SONOS |
| labels DIFF |
| |
| layer nfetlvt DIFF |
| and POLY |
| and-not PPLUS |
| and NPLUS |
| and-not THKOX |
| and LVTN |
| and-not SONOS |
| labels DIFF |
| |
| layer nsonos DIFF |
| and POLY |
| and-not PPLUS |
| and NPLUS |
| and-not THKOX |
| and LVTN |
| and SONOS |
| labels DIFF |
| |
| templayer nsdarea DIFF |
| and NPLUS |
| and NWELL |
| and-not POLY |
| and-not PPLUS |
| and-not THKOX |
| copyup nsubcheck |
| |
| layer nsd nsdarea |
| labels DIFF |
| |
| layer nsd TAP,TAPPIN |
| and NPLUS |
| labels TAP |
| labels TAPPIN port |
| |
| templayer nsdexpand nsdarea |
| grow 500 |
| |
| # Copy nsub areas up for contact checks |
| templayer xnsubcheck nsubcheck |
| copyup nsubcheck |
| |
| templayer psdarea DIFF |
| and PPLUS |
| and-not NWELL |
| and-not POLY |
| and-not NPLUS |
| and-not THKOX |
| and-not pfetexpand |
| copyup psubcheck |
| |
| layer psd psdarea |
| labels DIFF |
| |
| layer psd TAP,TAPPIN |
| and PPLUS |
| and-not THKOX |
| labels TAP |
| labels TAPPIN port |
| |
| templayer psdexpand psdarea |
| grow 500 |
| |
| layer mvpdiff DIFF,DIFFTXT,DIFFPIN |
| and-not NPLUS |
| and-not POLY |
| and THKOX |
| and mvpfetexpand |
| labels DIFF |
| labels DIFFTXT text |
| labels DIFFPIN port |
| |
| layer mvpdiffres DIFFRES |
| and PPLUS |
| and NWELL |
| and THKOX |
| and-not mvrdpioedge |
| labels DIFF |
| |
| layer mvnfet DIFF |
| and POLY |
| and-not PPLUS |
| and NPLUS |
| and-not LVTN |
| and THKOX |
| labels DIFF |
| |
| layer mvnnfet DIFF |
| and POLY |
| and-not PPLUS |
| and NPLUS |
| and LVTN |
| and THKOX |
| labels DIFF |
| |
| templayer mvnsdarea DIFF |
| and NPLUS |
| and NWELL |
| and-not POLY |
| and-not PPLUS |
| and THKOX |
| copyup mvnsubcheck |
| |
| layer mvnsd mvnsdarea |
| labels DIFF |
| |
| layer mvnsd TAP,TAPPIN |
| and NPLUS |
| and THKOX |
| labels TAP |
| labels TAPPIN port |
| |
| templayer mvnsdexpand mvnsdarea |
| grow 500 |
| |
| # Copy nsub areas up for contact checks |
| templayer mvxnsubcheck mvnsubcheck |
| copyup mvnsubcheck |
| |
| templayer mvpsdarea DIFF |
| and PPLUS |
| and-not NWELL |
| and-not POLY |
| and-not NPLUS |
| and THKOX |
| and-not mvpfetexpand |
| copyup mvpsubcheck |
| |
| layer mvpsd mvpsdarea |
| labels DIFF |
| |
| layer mvpsd TAP,TAPPIN |
| and PPLUS |
| and THKOX |
| labels TAP |
| labels TAPPIN port |
| |
| templayer mvpsdexpand mvpsdarea |
| grow 500 |
| |
| # Copy psub areas up for contact checks |
| templayer xpsubcheck psubcheck |
| copyup psubcheck |
| |
| templayer mvxpsubcheck mvpsubcheck |
| copyup mvpsubcheck |
| |
| layer psd DIFF |
| and-not PPLUS |
| and-not NPLUS |
| and-not POLY |
| and-not THKOX |
| and-not pfetexpand |
| and psdexpand |
| |
| layer nsd DIFF |
| and-not PPLUS |
| and-not NPLUS |
| and-not POLY |
| and-not THKOX |
| and nsdexpand |
| |
| layer mvpsd DIFF |
| and-not PPLUS |
| and-not NPLUS |
| and-not POLY |
| and THKOX |
| and-not mvpfetexpand |
| and mvpsdexpand |
| |
| layer mvnsd DIFF |
| and-not PPLUS |
| and-not NPLUS |
| and-not POLY |
| and THKOX |
| and mvnsdexpand |
| |
| templayer hresarea POLY |
| and RPM |
| grow 3000 |
| |
| templayer diffresarea DIFFRES |
| and-not THKOX |
| grow 3000 |
| |
| templayer mvdiffresarea DIFFRES |
| and THKOX |
| grow 3000 |
| |
| templayer resarea diffresarea,mvdiffresarea,hresarea,xresarea |
| |
| layer pfet POLY |
| and DIFF |
| and diffresarea |
| and-not NPLUS |
| |
| templayer polyarea POLY |
| and-not POLYRES |
| and-not DIFF |
| copyup polycheck |
| |
| layer poly polyarea,POLYTXT,POLYPIN |
| labels POLY |
| labels POLYTXT text |
| labels POLYPIN port |
| |
| # Copy (non-resistor) poly areas up for contact checks |
| templayer xpolycheck polycheck |
| copyup polycheck |
| |
| layer mrp1 POLY |
| and POLYRES |
| and-not RPM |
| labels POLY |
| |
| layer xhrpoly POLY |
| and POLYRES |
| and RPM |
| and PPLUS |
| and NPC |
| labels POLY |
| |
| layer ndc CONT |
| and DIFF |
| and NPLUS |
| and-not NWELL |
| and LI |
| and-not THKOX |
| |
| layer nsc CONT |
| and DIFF,TAP |
| and NPLUS |
| and NWELL |
| and LI |
| and-not THKOX |
| |
| layer pdc CONT |
| and DIFF |
| and PPLUS |
| and NWELL |
| and LI |
| and-not THKOX |
| |
| layer pdc CONT |
| and DIFF |
| and PPLUS |
| and pfetexpand |
| and LI |
| and-not THKOX |
| |
| layer psc CONT |
| and DIFF,TAP |
| and PPLUS |
| and-not NWELL |
| and-not pfetexpand |
| and LI |
| and-not THKOX |
| |
| layer pc CONT |
| and POLY |
| and-not DIFF |
| and LI |
| |
| layer ndic CONT |
| and DIFF |
| and NPLUS |
| and DIODE |
| and-not POLY |
| and-not PPLUS |
| and-not THKOX |
| and-not LVTN |
| |
| layer ndilvtc CONT |
| and DIFF |
| and NPLUS |
| and DIODE |
| and-not POLY |
| and-not PPLUS |
| and-not THKOX |
| and LVTN |
| |
| layer pdic CONT |
| and DIFF |
| and PPLUS |
| and DIODE |
| and-not POLY |
| and-not NPLUS |
| and-not THKOX |
| and-not LVTN |
| and-not HVTP |
| |
| layer pdilvtc CONT |
| and DIFF |
| and PPLUS |
| and DIODE |
| and-not POLY |
| and-not NPLUS |
| and-not THKOX |
| and LVTN |
| and-not HVTP |
| |
| layer pdihvtc CONT |
| and DIFF |
| and PPLUS |
| and DIODE |
| and-not POLY |
| and-not NPLUS |
| and-not THKOX |
| and-not LVTN |
| and HVTP |
| |
| layer mvndc CONT |
| and DIFF |
| and NPLUS |
| and-not NWELL |
| and LI |
| and THKOX |
| |
| layer mvnsc CONT |
| and DIFF,TAP |
| and NPLUS |
| and NWELL |
| and LI |
| and THKOX |
| |
| layer mvpdc CONT |
| and DIFF |
| and PPLUS |
| and NWELL |
| and LI |
| and THKOX |
| |
| layer mvpdc CONT |
| and DIFF |
| and PPLUS |
| and mvpfetexpand |
| and MET1 |
| and THKOX |
| |
| layer mvpsc CONT |
| and DIFF,TAP |
| and PPLUS |
| and-not NWELL |
| and-not mvpfetexpand |
| and LI |
| and THKOX |
| |
| layer mvndic CONT |
| and DIFF |
| and NPLUS |
| and DIODE |
| and-not POLY |
| and-not PPLUS |
| and THKOX |
| |
| layer mvpdic CONT |
| and DIFF |
| and PPLUS |
| and DIODE |
| and-not POLY |
| and-not NPLUS |
| and THKOX |
| |
| layer locali LI,LITXT,LIPIN |
| labels LI |
| labels LITXT text |
| labels LIPIN port |
| |
| layer lic MCON |
| labels MCON |
| |
| layer m1 MET1 |
| and resarea |
| |
| layer m1 MET1,MET1TXT,MET1PIN |
| labels MET1 |
| labels MET1TXT text |
| labels MET1PIN port |
| |
| layer mimcap MET3 |
| and CAPM |
| labels CAPM |
| |
| layer mimcc VIA2 |
| and CAPM |
| grow 150 |
| labels CAPM |
| |
| layer mimcap2 MET4 |
| and CAPM2 |
| labels CAPM2 |
| |
| layer mim2cc VIA3 |
| and CAPM2 |
| grow 150 |
| labels CAPM2 |
| |
| |
| layer m2c VIA1 |
| grow 55 |
| grow 30 |
| shrink 30 |
| |
| layer m2 MET2,MET2TXT,MET2PIN |
| labels MET2 |
| labels MET2TXT text |
| labels MET2PIN port |
| |
| layer m3c VIA2 |
| grow 40 |
| grow 60 |
| shrink 60 |
| |
| layer m3 MET3,MET3TXT,MET3PIN |
| labels MET3 |
| labels MET3TXT text |
| labels MET3PIN port |
| |
| |
| layer via3 VIA3 |
| grow 60 |
| grow 40 |
| shrink 40 |
| |
| layer m4 MET4,MET4TXT,MET4PIN |
| labels MET4 |
| labels MET4TXT text |
| labels MET4PIN port |
| |
| layer m5 MET5,MET5TXT,MET5PIN |
| labels MET5 |
| labels MET5TXT text |
| labels MET5PIN port |
| |
| layer via4 VIA4 |
| grow 190 |
| grow 210 |
| shrink 210 |
| |
| layer metrdl RDL,RDLTXT,RDLPIN |
| labels RDL |
| labels RDLTXT text |
| labels RDLPIN port |
| |
| # Find diffusion not covered in |
| # NPLUS or PPLUS and pull it into |
| # the next layer up |
| |
| templayer gentrans DIFF |
| and-not PPLUS |
| and-not NPLUS |
| and POLY |
| copyup DIFF,POLY |
| |
| templayer gendiff DIFF,TAP |
| and-not PPLUS |
| and-not NPLUS |
| and-not POLY |
| copyup DIFF |
| |
| # Handle contacts found by copyup |
| |
| layer ndic CONT |
| and MET1 |
| and DIODE |
| and NPLUS |
| and-not THKOX |
| |
| layer mvndic CONT |
| and MET1 |
| and DIODE |
| and NPLUS |
| and THKOX |
| |
| layer pdic CONT |
| and MET1 |
| and DIODE |
| and PPLUS |
| and-not THKOX |
| |
| layer mvpdic CONT |
| and MET1 |
| and DIODE |
| and PPLUS |
| and THKOX |
| |
| layer ndc CONT |
| and ndifcheck |
| |
| layer mvndc CONT |
| and mvndifcheck |
| |
| layer pdc CONT |
| and pdifcheck |
| |
| layer mvpdc CONT |
| and mvpdifcheck |
| |
| layer pc CONT |
| and polycheck |
| |
| layer nsc CONT |
| and nsubcheck |
| |
| layer mvnsc CONT |
| and mvnsubcheck |
| |
| layer psc CONT |
| and psubcheck |
| |
| layer mvpsc CONT |
| and mvpsubcheck |
| |
| # Find contacts not covered in |
| # metal and pull them into the |
| # next layer up |
| |
| templayer gencont CONT |
| and LI |
| and-not DIFF,TAP |
| and-not POLY |
| and-not DIODE |
| and-not nsubcheck |
| and-not psubcheck |
| and-not mvnsubcheck |
| and-not mvpsubcheck |
| copyup CONT,MET1 |
| |
| templayer barecont CONT |
| and-not LI |
| and-not nsubcheck |
| and-not psubcheck |
| and-not mvnsubcheck |
| and-not mvpsubcheck |
| copyup CONT |
| |
| layer glass GLASS,PADTXT,PADPIN |
| labels GLASS |
| labels PADTXT text |
| labels PADPIN port |
| |
| templayer boundary BOUND |
| boundary |
| |
| layer comment LVSTEXT |
| labels LVSTEXT text |
| |
| layer comment TTEXT |
| labels TTEXT text |
| |
| layer fillblock FILLOBSM1,FILLOBSM2,FILLOBSM3,FILLOBSM4 |
| labels FILLOBSM1,FILLOBSM2,FILLOBSM3,FILLOBSM4 |
| |
| # MOS Varactor |
| |
| layer var POLY |
| and DIFF |
| and NPLUS |
| and NWELL |
| and-not THKOX |
| grow 25 |
| labels POLY |
| |
| layer mvvar POLY |
| and DIFF |
| and NPLUS |
| and NWELL |
| and THKOX |
| grow 25 |
| labels POLY |
| |
| calma NWELL 64 20 |
| calma DIFF 65 20 |
| calma DNWELL 64 18 |
| calma PWRES 64 13 |
| calma TAP 65 44 |
| # LVTN |
| calma LVTN 125 44 |
| # HVTP |
| calma HVTP 78 44 |
| # SONOS (TUNM) |
| calma SONOS 80 20 |
| # NPLUS = NSDM |
| calma NPLUS 93 44 |
| # PPLUS = PSDM |
| calma PPLUS 94 20 |
| # HVI |
| calma THKOX 75 20 |
| # NPC |
| calma NPC 95 20 |
| # P+ POLY MASK |
| calma RPM 86 20 |
| # Poly resistor ID mark |
| calma POLYRES 66 13 |
| # Diffusion resistor ID mark |
| calma DIFFRES 65 13 |
| calma POLY 66 20 |
| # Diode ID mark |
| calma DIODE 81 23 |
| |
| # LICON |
| calma CONT 66 44 |
| calma LI 67 20 |
| calma MCON 67 44 |
| |
| calma MET1 68 20 |
| calma VIA1 68 44 |
| calma MET2 69 20 |
| calma VIA2 69 44 |
| calma MET3 70 20 |
| calma VIA3 70 44 |
| calma MET4 71 20 |
| calma VIA4 71 44 |
| calma MET5 72 20 |
| calma RDL 74 20 |
| calma GLASS 76 20 |
| |
| calma PADPIN 76 5 |
| calma DIFFPIN 65 6 |
| calma TAPPIN 65 5 |
| calma WELLPIN 64 5 |
| calma PWELLPIN 122 16 |
| calma LIPIN 67 5 |
| calma POLYPIN 66 5 |
| calma MET1PIN 68 5 |
| calma MET2PIN 69 5 |
| calma MET3PIN 70 5 |
| calma MET4PIN 71 5 |
| calma MET5PIN 72 5 |
| calma RDLPIN 74 5 |
| |
| calma SUBTXT 64 59 |
| calma PADTXT 76 16 |
| calma DIFFTXT 65 16 |
| calma POLYTXT 66 16 |
| calma WELLTXT 64 16 |
| calma PWELLTXT 122 16 |
| calma LITXT 67 16 |
| calma MET1TXT 68 16 |
| calma MET2TXT 69 16 |
| calma MET3TXT 70 16 |
| calma MET4TXT 71 16 |
| calma MET5TXT 72 16 |
| calma RDLPIN 74 16 |
| |
| calma BOUND 81 4 |
| |
| calma LVSTEXT 83 44 |
| |
| calma CAPM 89 44 |
| calma CAPM 97 44 |
| |
| calma FILLOBSM1 62 24 |
| calma FILLOBSM2 105 52 |
| calma FILLOBSM3 107 24 |
| calma FILLOBSM4 112 4 |
| |
| end |
| |
| #----------------------------------------------------- |
| # Digital flow maze router cost parameters |
| #----------------------------------------------------- |
| |
| mzrouter |
| end |
| |
| #----------------------------------------------------- |
| # Vendor DRC rules |
| #----------------------------------------------------- |
| |
| drc |
| |
| style drc variants (fast),(full),(routing) |
| |
| scalefactor 10 |
| |
| cifstyle drc |
| |
| variants (fast),(full) |
| |
| #----------------------------- |
| # DNWELL |
| #----------------------------- |
| |
| width dnwell 3000 "Deep N-well width < %d (Dnwell 2)" |
| spacing dnwell dnwell 6300 touching_ok "Deep N-well spacing < %d (Dnwell 3)" |
| spacing dnwell allnwell 4500 surround_ok \ |
| "Deep N-well spacing to N-well < %d (Nwell 7)" |
| cifmaxwidth nwell_missing 1 bend_illegal \ |
| "N-well overlap of Deep N-well < 0.4um outside, 1.03um inside (Nwell 5a, 7)" |
| cifmaxwidth dnwell_missing 1 bend_illegal \ |
| "SONOS nFET must be in Deep N-well (Tunm 6a)" |
| |
| #----------------------------- |
| # NWELL |
| #----------------------------- |
| |
| width allnwell 840 "N-well width < %d (Nwell 1)" |
| spacing allnwell allnwell 1270 touching_ok "N-well spacing < %d (Nwell 2a)" |
| |
| #----------------------------- |
| # DIFF |
| #----------------------------- |
| |
| width *ndiff,nfet,*nsd,*ndiode,ndiffres,*pdiff,pfet,*psd,*pdiode,pdiffres 150 \ |
| "Diffusion width < %d (Diff/tap 1)" |
| width *mvndiff,mvnfet,mvnnfet,*mvnsd,*mvndiode,*nndiode,mvndiffres,*mvpdiff,mvpfet,*mvpsd,*mvpdiode,mvpdiffres 150 \ |
| "Diffusion width < %d (Diff/tap 1)" |
| spacing alldifflv,var,alldiffmv,mvvar alldifflv,var,alldiffmv,mvvar 270 touching_ok \ |
| "Diffusion spacing < %d (Diff/tap 3)" |
| spacing *ndiff,*ndiode,nfet allnwell 340 touching_illegal \ |
| "N-Diffusion spacing to N-well < %d (Diff/tap 9)" |
| spacing *mvndiff,*mvndiode,mvnfet,mvnnfet allnwell 340 touching_illegal \ |
| "N-Diffusion spacing to N-well < %d (Diff/tap 9)" |
| spacing *psd allnwell 130 touching_illegal \ |
| "P-tap spacing to N-well < %d (Diff/tap 11)" |
| spacing *mvpsd allnwell 130 touching_illegal \ |
| "P-tap spacing to N-well < %d (Diff/tap 11)" |
| surround *nsd allnwell 180 absence_illegal "N-well overlap of N-tap < %d (Diff/tap 10)" |
| surround *mvnsd,*nndiode allnwell 180 absence_illegal "N-well overlap of N-tap < %d (Diff/tap 10)" |
| |
| surround *pdiff,*pdiode,pfet allnwell 180 absence_illegal \ |
| "N-well overlap of P-Diffusion < %d (Diff/tap 8)" |
| surround *mvpdiff,*mvpdiode,mvpfet allnwell 180 absence_illegal \ |
| "N-well overlap of P-Diffusion < %d (Diff/tap 8)" |
| |
| variants (full) |
| cifmaxwidth ptap_missing 6000 bend_illegal \ |
| "N-diff distance to P-tap must be < %d (tap rule)" |
| cifmaxwidth ntap_missing 6000 bend_illegal \ |
| "P-diff distance to N-tap must be < %d (tap rule)" |
| cifmaxwidth mvntap_missing 6000 bend_illegal \ |
| "5.0V P-diff distance to 5.0V N-tap must be < %d (tap rule)" |
| cifmaxwidth mvptap_missing 6000 bend_illegal \ |
| "5.0V P-diff distance to 5.0V N-tap must be < %d (tap rule)" |
| variants * |
| |
| #----------------------------- |
| # POLY |
| #----------------------------- |
| |
| width allpoly 150 "Poly width < %d (Poly 1a)" |
| spacing allpoly allpoly 210 touching_ok "Poly spacing < %d (Poly 2)" |
| spacing allpolynonfet alldifflvnonfet 75 corner_ok allfets \ |
| "Poly spacing to Diffusion < %d (Poly 4a)" |
| overhang *ndiff,rndiff nfet 250 "N-Diffusion overhang of nmos < %d (Poly 7)" |
| overhang *mvndiff,mvrndiff mvnfet,mvnnfet 250 "N-Diffusion overhang of nmos < %d (Poly 7)" |
| overhang *pdiff,rpdiff pfet 250 "P-Diffusion overhang of pmos < %d (Poly 7)" |
| overhang *mvpdiff,mvrpdiff mvpfet 250 "P-Diffusion overhang of pmos < %d (Poly 7)" |
| overhang *poly allfets 130 "Poly overhang of transistor < %d (Poly 8)" |
| |
| #-------------------------------------------------------------------- |
| # NPC (Nitride Poly Cut) |
| #-------------------------------------------------------------------- |
| |
| # Layer NPC is defined automatically around poly contacts (grow 0.1um) |
| |
| #-------------------------------------------------------------------- |
| # CONT (LICON, contact between poly/diff and LI) |
| #-------------------------------------------------------------------- |
| |
| width ndc/li 170 "N-diffusion contact width < %d (LIcon 1)" |
| width nsc/li 170 "N-tap contact width < %d (LIcon 1)" |
| width pdc/li 170 "P-diffusion contact width < %d (LIcon 1)" |
| width psc/li 170 "P-tap contact width < %d (LIcon 1)" |
| width ndic/li 170 "N-diode contact width < %d (LIcon 1)" |
| width pdic/li 170 "P-diode contact width < %d (LIcon 1)" |
| width pc/li 170 "Poly contact width < %d (LIcon 1)" |
| |
| width mvndc/li 170 "N-diffusion contact width < %d (LIcon 1)" |
| width mvnsc/li 170 "N-tap contact width < %d (LIcon 1)" |
| width mvpdc/li 170 "P-diffusion contact width < %d (LIcon 1)" |
| width mvpsc/li 170 "P-tap contact width < %d (LIcon 1)" |
| width mvndic/li 170 "N-diode contact width < %d (LIcon 1)" |
| width mvpdic/li 170 "P-diode contact width < %d (LIcon 1)" |
| |
| spacing allpdiffcont allndiffcont 170 touching_illegal "Diffusion contact spacing < %d (LIcon 2)" |
| spacing allndiffcont allndiffcont 170 touching_ok "Diffusion contact spacing < %d (LIcon 2)" |
| spacing allpdiffcont allpdiffcont 170 touching_ok "Diffusion contact spacing < %d (LIcon 2)" |
| spacing pc pc 170 touching_ok "Poly1 contact spacing < %d (LIcon 2)" |
| |
| spacing pc alldiff 190 touching_illegal "Poly contact spacing to diffusion < %d (LIcon 14)" |
| |
| spacing ndc,pdc nfet,pfet 55 touching_illegal \ |
| "Diffusion contact to gate < %d (LIcon 11)" |
| spacing mvndc,mvpdc mvnfet,mvnnfet,mvpfet 55 touching_illegal \ |
| "Diffusion contact to gate < %d (LIcon 11)" |
| spacing ndc,mvndc rnd,mvrnd 60 touching_illegal "Diffusion contact to rndiff < %d ()" |
| spacing pdc,mvpdc rdp,mvrdp 60 touching_illegal "Diffusion contact to rndiff < %d ()" |
| |
| |
| surround ndc/a *ndiff 40 absence_illegal \ |
| "N-diffusion overlap of N-diffusion contact < %d (LIcon 5a)" |
| surround pdc/a *pdiff 40 absence_illegal \ |
| "P-diffusion overlap of P-diffusion contact < %d (LIcon 5a)" |
| surround ndic/a *ndi 40 absence_illegal \ |
| "N-diode overlap of N-diode contact < %d (LIcon 5a)" |
| surround pdic/a *pdi 40 absence_illegal \ |
| "P-diode overlap of N-diode contact < %d (LIcon 5a)" |
| |
| surround ndc/a *ndiff,nfet 60 directional \ |
| "N-diffusion overlap of N-diffusion contact < %d in one direction (LIcon 5c)" |
| surround pdc/a *pdiff,pfet 60 directional \ |
| "P-diffusion overlap of P-diffusion contact < %d in one direction (LIcon 5c)" |
| surround ndic/a *ndi 60 directional \ |
| "N-diode overlap of N-diode contact < %d in one direction (LIcon 5c)" |
| surround pdic/a *pdi 60 directional \ |
| "P-diode overlap of N-diode contact < %d in one direction (LIcon 5c)" |
| |
| surround nsc/a *nsd 120 directional \ |
| "N-tap overlap of N-tap contact < %d in one direction (LIcon 7)" |
| surround psc/a *psd 120 directional \ |
| "P-tap overlap of P-tap contact < %d in one direction (LIcon 7)" |
| |
| surround mvndc/a *mvndiff 40 absence_illegal \ |
| "N-diffusion overlap of N-diffusion contact < %d (LIcon 5a)" |
| surround mvpdc/a *mvpdiff 40 absence_illegal \ |
| "P-diffusion overlap of P-diffusion contact < %d (LIcon 5a)" |
| surround mvndic/a *mvndi 40 absence_illegal \ |
| "N-diode overlap of N-diode contact < %d (LIcon 5a)" |
| surround mvpdic/a *mvpdi 40 absence_illegal \ |
| "P-diode overlap of N-diode contact < %d (LIcon 5a)" |
| |
| surround mvndc/a *mvndiff,mvnfet 60 directional \ |
| "N-diffusion overlap of N-diffusion contact < %d in one direction (LIcon 5c)" |
| surround mvpdc/a *mvpdiff,mvpfet 60 directional \ |
| "P-diffusion overlap of P-diffusion contact < %d in one direction (LIcon 5c)" |
| surround mvndic/a *mvndi 60 directional \ |
| "N-diode overlap of N-diode contact < %d in one direction (LIcon 5c)" |
| surround mvpdic/a *mvpdi 60 directional \ |
| "P-diode overlap of N-diode contact < %d in one direction (LIcon 5c)" |
| |
| surround mvnsc/a *mvnsd 120 directional \ |
| "N-tap overlap of N-tap contact < %d in one direction (LIcon 7)" |
| surround mvpsc/a *mvpsd 120 directional \ |
| "P-tap overlap of P-tap contact < %d in one direction (LIcon 7)" |
| |
| surround pc/a *poly,mrp1,xhrpoly 80 absence_illegal \ |
| "Poly overlap of poly contact < %d (LIcon 8, 8a)" |
| |
| exact_overlap ndc/a,pdc/a,psc/a,nsc/a,pc/a,ndic/a,pdic/a |
| exact_overlap mvndc/a,mvpdc/a,mvpsc/a,mvnsc/a,mvndic/a,mvpdic/a |
| |
| #------------------------------------------------------------- |
| # LI - Local interconnect layer |
| #------------------------------------------------------------- |
| |
| width *li,rli 170 "Local interconnect width < %d (LI 1)" |
| spacing allli allli,obsli 170 touching_ok "Local interconnect spacing < %d (LI 3)" |
| |
| surround pc/li *li 80 directional \ |
| "Local interconnect overlap of poly contact < %d in one direction (LI 5)" |
| |
| surround ndc/li,nsc/li,pdc/li,psc/li,ndic/li,pdic/li,mvndc/li,mvnsc/li,mvpdc/li,mvpsc/li,mvndic/li,mvpdic/li \ |
| *li 80 directional \ |
| "Local interconnect overlap of diffusion contact < %d in one direction (LI 5)" |
| |
| area allli,obsli 56100 170 "Local interconnect minimum area < %a (LI 6)" |
| |
| #------------------------------------------------------------- |
| # MCON - Contact between local interconnect and metal1 |
| #------------------------------------------------------------- |
| |
| width lic/m1 170 "Mcon width < %d (Mcon 1)" |
| spacing lic/m1 lic/m1 170 touching_ok "Mcon spacing < %d (Mcon 2)" |
| |
| exact_overlap lic/m1 |
| |
| #------------------------------------------------------------- |
| # METAL1 - |
| #------------------------------------------------------------- |
| |
| width *m1,rm1 140 "Metal1 width < %d (Met1 1)" |
| spacing allm1 allm1,obsm1 140 touching_ok "Metal1 spacing < %d (Met1 2)" |
| area allm1,obsm1 83000 140 "Metal1 minimum area < %a (Met1 6)" |
| |
| surround lic/m1 *met1 30 absence_illegal \ |
| "Metal1 overlap of local interconnect contact < %d (Met1 4)" |
| surround lic/m1 *met1 60 directional \ |
| "Metal1 overlap of local interconnect contact < %d in one direction (Met1 5)" |
| |
| variants (fast),(full) |
| widespacing allm1 3000 allm1,obsm1 280 touching_ok \ |
| "Metal1 > 3um spacing to unrelated m1 < %d (Met1 3a)" |
| variants * |
| |
| #-------------------------------------------------- |
| # VIA1 |
| #-------------------------------------------------- |
| |
| width v1/m1 260 "Via1 width < %d (Via 1a + 2 * Via 4a)" |
| spacing v1 v1 60 touching_ok "Via1 spacing < %d (Via 2 - 2 * Via 4a)" |
| surround v1/m1 *m1 30 directional \ |
| "Metal1 overlap of Via1 < %d in one direction (Via 5a - Via 4a)" |
| surround v1/m2 *m2 30 directional \ |
| "Metal2 overlap of Via1 < %d in one direction (Met2 5 - Met2 4)" |
| |
| exact_overlap v1/m2 |
| |
| #-------------------------------------------------- |
| # METAL2 - |
| #-------------------------------------------------- |
| |
| width allm2 140 "Metal2 width < %d (Met2 1)" |
| spacing allm2 allm2,obsm2 140 touching_ok "Metal2 spacing < %d (Met2 2)" |
| area allm2,obsm2 67600 140 "Metal2 minimum area < %a (Met2 6)" |
| |
| variants (fast),(full) |
| widespacing allm2 3000 allm2,obsm2 280 touching_ok \ |
| "Metal2 > 3um spacing to unrelated m2 < %d (Met2 3)" |
| variants * |
| |
| #-------------------------------------------------- |
| # VIA2 |
| #-------------------------------------------------- |
| |
| width v2/m2 280 "Via2 width < %d (Via2 1a + 2 * Via2 4)" |
| |
| spacing v2 v2 120 touching_ok "Via2 spacing < 0.24um (Via2 2 - 2 * Via2 4)" |
| |
| surround v2/m2 *m2 45 directional \ |
| "Metal2 overlap of Via2 < %d in one direction (Via2 4a - Via2 4)" |
| surround v2/m3 *m3 25 absence_illegal "Metal3 overlap of Via2 < %d (Met3 4)" |
| |
| exact_overlap v2/m2 |
| |
| #-------------------------------------------------- |
| # METAL3 - |
| #-------------------------------------------------- |
| |
| width allm3 300 "Metal3 width < %d (Met3 1)" |
| spacing allm3 allm3,obsm3 300 touching_ok "Metal3 spacing < %d (Met3 2)" |
| area allm3,obsm3 240000 300 "Metal3 minimum area < %a (Met3 6)" |
| |
| variants (fast),(full) |
| widespacing allm3 3000 allm3,obsm3 400 touching_ok \ |
| "Metal3 > 3um spacing to unrelated m3 < %d (Met3 3d)" |
| variants * |
| |
| |
| #-------------------------------------------------- |
| # VIA3 - Requires 1 Module |
| #-------------------------------------------------- |
| |
| width v3/m3 320 "Via3 width < %d (Via3 1 + 2 * Via3 4)" |
| spacing v3 v3 80 touching_ok "Via3 spacing < %d (Via3 2 - 2 * Via3 4)" |
| surround v3/m3 *m3 30 directional \ |
| "Metal3 overlap of Via3 in one direction < %d (Via3 5 - Via3 4)" |
| surround v3/m4 *m4 5 directional \ |
| "Metal4 overlap of Via3 in one direction < %d (Met4 3 - Via3 4)" |
| |
| exact_overlap v3/m3 |
| |
| #----------------------------- |
| # METAL4 - METAL4 Module |
| #----------------------------- |
| |
| variants * |
| |
| width allm4 300 "Metal4 width < %d (Met4 1)" |
| spacing allm4 allm4,obsm4 300 touching_ok "Metal4 spacing < %d (Met4 2)" |
| area allm4,obsm4 240000 300 "Metal4 minimum area < %a (Met4 4a)" |
| |
| variants (fast),(full) |
| widespacing allm4 3000 allm4,obsm4 400 touching_ok \ |
| "Metal4 > 3um spacing to unrelated m4 < %d (S2M4)" |
| variants * |
| |
| #-------------------------------------------------- |
| # VIA4 - Requires 1 Module |
| #-------------------------------------------------- |
| |
| width v4/m4 1180 "Via4 width < %d (Via4 1 + 2 * Via4 4)" |
| spacing v4 v4 420 touching_ok "Via4 spacing < %d (Via4 2 - 2 * Via4 4)" |
| surround v4/m5 *m5 120 absence_illegal \ |
| "Metal5 overlap of Via4 < %d (Met5 3 - Via4 4)" |
| |
| exact_overlap v4/m4 |
| |
| #----------------------------- |
| # 1 - 1 Module |
| #----------------------------- |
| |
| width allm5 1600 "Metal5 width < %d (Met5 1)" |
| spacing allm5 allm5,obsm5 1600 touching_ok "Metal5 spacing < %d (Met5 2)" |
| area allm5,obsm5 4000000 1600 "Metal5 minimum area < %a (Met5 4)" |
| |
| |
| |
| variants (full) |
| |
| width metrdl 10000 "RDL width < %d (Rdl 1)" |
| spacing metrdl metrdl 10000 touching_ok "RDL spacing < %d (Rdl 2)" |
| surround glass metrdl 10750 absence_ok "RDL must surround glass cut by %d (Rdl 3)" |
| spacing metrdl padl 19660 surround_ok "RDL spacing to unrelated pad < %d (Rdl 6)" |
| |
| variants * |
| |
| |
| #-------------------------------------------------- |
| # NMOS, PMOS |
| #-------------------------------------------------- |
| |
| extend allfets *poly 420 "Transistor width < %d (Diff/tap 2)" |
| # Except: Note that standard cells allow transistor width minimum 0.36um |
| |
| spacing *nsd,*mvnsd pfet,mvpfet 300 touching_illegal \ |
| "N-tap spacing to PMOS gate < %d (Poly 6)" |
| spacing *psd,*mvpsd nfet,mvnfet 300 touching_illegal \ |
| "P-tap spacing to NMOS gate < %d (Poly 6)" |
| |
| #-------------------------------------------------- |
| # mrp1 (N+ poly resistor) |
| #-------------------------------------------------- |
| |
| width mrp1 330 "mrp1 resistor width < %d (Poly 3)" |
| # spacing mrp1 pc 120 touching_illegal "mrp1 spacing to Cont < 0.12um ()" |
| |
| #-------------------------------------------------- |
| # xhrpoly (P+ poly resistor) |
| #-------------------------------------------------- |
| |
| width xhrpoly 350 "xhrpoly resistor width < %d (P+ Poly 1a)" |
| # NOTE: xhrpoly resistor requires choice of discrete widths 0.35, 0.69, ... up to 1.27. |
| # spacing xhrpoly pc 120 touching_illegal "xhrpoly spacing to Cont < 0.12um ()" |
| |
| #------------------------------------ |
| # MOS Varactor device rules |
| #------------------------------------ |
| # |
| |
| overhang nsd var 250 \ |
| "N-Tap overhang of Varactor < %d (Var 4)" |
| |
| overhang mvnsd mvvar 250 \ |
| "N-Tap overhang of Varactor < %d (Var 4)" |
| |
| width var,mvvar 180 "Varactor length < %d (Var 1)" |
| extend var,mvvar *poly 1000 "Transistor width < %d (Var 2)" |
| |
| #----------------------------------------------------------- |
| # 1CAP - (work in progress) |
| #----------------------------------------------------------- |
| |
| width *mimcap 2000 "MiM cap width < 5.00um ()" |
| maxwidth *mimcap 30000 bend_ok "MiM cap width > 30.0um ()" |
| spacing *mimcap *mimcap 1500 touching_ok "MiM cap spacing < 1.50um ()" |
| spacing *mimcap via2/m3 850 touching_illegal \ |
| "MiM cap spacing to via2 < 0.85um ()" |
| width mimcapc/m2 660 "MiM Contact width < 0.66um ()" |
| surround *mimcc *mimcap 150 absence_illegal \ |
| "MiM cap must surround MiM cap contact by 0.15um ()" |
| spacing pad *mimcap 50 touching_illegal "MiM cap cannot overlap pad ()" |
| |
| surround *mimcap *metal2/m2 500 absence_illegal \ |
| "Metal3 must surround MiM cap by 0.5um ()" |
| spacing via2 *mimcap 50 touching_illegal "MiM cap cannot overlap via2 ()" |
| surround *mimcap *metal3/m3 500 absence_illegal \ |
| "Metal4 must surround MiM cap by 0.5um ()" |
| spacing via3 *mimcap 50 touching_illegal "MiM cap cannot overlap via3 ()" |
| |
| width *mimcap2 2000 "MiM cap width < 5.00um ()" |
| maxwidth *mimcap2 30000 bend_ok "MiM cap width > 30.0um ()" |
| spacing *mimcap2 *mimcap2 1500 touching_ok "MiM cap spacing < 1.50um ()" |
| spacing *mimcap2 via3/m4 850 touching_illegal \ |
| "MiM cap spacing to via3 < 0.85um ()" |
| width mimcap2c/m3 660 "MiM Contact width < 0.66um ()" |
| surround *mim2cc *mimcap2 150 absence_illegal \ |
| "MiM cap must surround MiM cap contact by 0.15um ()" |
| spacing pad *mimcap2 50 touching_illegal "MiM cap cannot overlap pad ()" |
| |
| surround *mimcap2 *metal3/m3 500 absence_illegal \ |
| "Metal3 must surround MiM cap by 0.5um ()" |
| spacing via3 *mimcap2 50 touching_illegal "MiM cap cannot overlap via3 ()" |
| surround *mimcap2 *metal4/m4 500 absence_illegal \ |
| "Metal4 must surround MiM cap by 0.5um ()" |
| spacing via4 *mimcap2 50 touching_illegal "MiM cap cannot overlap via4 ()" |
| |
| #---------------------------- |
| # End DRC style |
| #---------------------------- |
| |
| end |
| |
| #---------------------------- |
| # LEF format definitions |
| #---------------------------- |
| |
| lef |
| |
| routing li LI1 li1 LI li |
| |
| routing m1 MET1 m1 met1 |
| routing m2 MET2 m2 met2 |
| routing m3 MET3 m3 met3 |
| routing m4 MET4 m4 met4 |
| routing m5 MET5 m5 met5 |
| |
| cut lic MCON Mcon mcon |
| cut m2c VIA1 via1 cont2 via12 |
| cut m3c VIA2 via2 cont3 via23 |
| cut via3 VIA3 via3 cont4 via34 |
| cut via4 VIA4 via4 cont5 via45 |
| |
| obs obsli LI1 |
| obs obsm1 MET1 |
| obs obsm2 MET2 |
| obs obsm3 MET3 |
| |
| obs obsm4 MET4 |
| obs obsm5 MET5 |
| |
| # Map contact obstructions to the base metal layer |
| obs obsli MCON |
| obs obsm1 VIA1 |
| |
| end |
| |
| #----------------------------------------------------- |
| # Device and Parasitic extraction |
| #----------------------------------------------------- |
| |
| |
| extract |
| style ngspice variants (sim),(lvs) |
| cscale 1 |
| lambda 1.0 |
| units microns |
| step 100 |
| sidehalo 8 |
| |
| planeorder dwell 0 |
| planeorder well 1 |
| planeorder active 2 |
| planeorder locali 3 |
| planeorder metal1 4 |
| planeorder metal2 5 |
| planeorder metal3 6 |
| planeorder metal4 7 |
| planeorder metal5 8 |
| planeorder metali 9 |
| planeorder block 10 |
| planeorder comment 11 |
| |
| substrate *ppdiff,*mvppdiff,space/w,pwell well -dnwell |
| |
| # Layer resistance: Use document xp018-PDS-v4_2_1.pdf |
| |
| # Resistances are in milliohms per square |
| # Optional 3rd argument is the corner adjustment fraction |
| resist (nwell)/well 975000 |
| resist (rpw)/well 975000 0.5 |
| resist (pwell)/well 975000 |
| resist (*ndiff,nsd)/active 7500 |
| resist (*pdiff,*psd)/active 7100 |
| resist (*mvndiff,mvnsd)/active 7500 |
| resist (*mvpdiff,*mvpsd)/active 7100 |
| resist ndiffres/active 120000 0.5 |
| resist pdiffres/active 197000 0.5 |
| resist mvndiffres/active 120000 0.5 |
| resist mvpdiffres/active 197000 0.5 |
| resist mrp1/active 48200 0.5 |
| # NOTE: Have not found P+ poly resistance in documentation |
| resist xhrpoly/active 55000 0.5 |
| |
| resist (allpolynonres)/active 48200 |
| |
| resist (allli)/locali 12800 |
| resist (allm1)/metal1 125 |
| resist (allm2)/metal2 125 |
| resist (allm3)/metal3 47 |
| resist (allm4)/metal4 47 |
| resist (allm5)/metal5 29 |
| |
| contact ndc,nsc 15000 |
| contact pdc,psc 15000 |
| contact mvndc,mvnsc 15000 |
| contact mvpdc,mvpsc 15000 |
| contact pc 15000 |
| contact lic 152000 |
| contact m2c 4500 |
| contact m3c 3410 |
| contact mimcc 4500 |
| contact mim2cc 3410 |
| contact via3 3410 |
| contact via4 380 |
| |
| #------------------------------------------------------------------------- |
| # Parasitic capacitance values: Use document (...) |
| #------------------------------------------------------------------------- |
| # This uses the new "default" definitions that determine the intervening |
| # planes from the planeorder stack, take care of the reflexive sideoverlap |
| # definitions, and generally clean up the section and make it more readable. |
| # |
| # Also uses "units microns" statement, so all parasitic capacitance values |
| # are taken directly from the source document PDS_035_03, in units of |
| # aF/um^2 for area caps and aF/um for perimeter and sidewall caps. |
| #------------------------------------------------------------------------- |
| # Remember that device capacitances to substrate are taken care of by the |
| # models. Thus, active and poly definitions ignore all "fet" types. |
| # fet types are excluded when computing parasitic capacitance to |
| # active from layers above them because poly is a shield; fet types are |
| # included for parasitics from layers above to poly. Resistor types |
| # should be removed from all parasitic capacitance calculations, or else |
| # they just create floating caps. Technically, the capacitance probably |
| # should be split between the two terminals. Unsure of the correct model. |
| #------------------------------------------------------------------------- |
| |
| variant (sim) |
| |
| #n-well |
| # NOTE: This value not found in PEX files |
| defaultareacap nwell well 120 |
| |
| #n-active |
| # Rely on device models to capture *ndiff area cap |
| # Do not extract parasitics from resistors |
| # defaultareacap allnactivenonfet active 790 |
| # defaultperimeter allnactivenonfet active 280 |
| |
| #p-active |
| # Rely on device models to capture *pdiff area cap |
| # Do not extract parasitics from resistors |
| # defaultareacap allpactivenonfet active 810 |
| # defaultperimeter allpactivenonfet active 300 |
| |
| #poly |
| # Do not extract parasitics from resistors |
| # defaultsidewall allpolynonfet active 22 |
| # defaultareacap allpolynonfet active 105 |
| # defaultperimeter allpolynonfet active 57 |
| |
| defaultsidewall *poly active 63 |
| defaultareacap *poly active nwell,obswell,pwell well 63 |
| defaultperimeter *poly active nwell,obswell,pwell well 16 |
| |
| #locali |
| defaultsidewall allm1 metal1 113 |
| defaultareacap allm1 metal1 nwell,obswell,pwell well 37 |
| defaultperimeter allm1 metal1 nwell,obswell,pwell well 8 |
| defaultoverlap allm1 metal1 nwell well 37 |
| |
| #locali->diff |
| defaultoverlap allm1 metal1 allactivenonfet active 36 |
| defaultsideoverlap allm1 metal1 allactivenonfet active 9 |
| |
| #locali->poly |
| defaultoverlap allm1 metal1 allpolynonres active 46 |
| defaultsideoverlap allm1 metal1 allpolynonres active 10 |
| |
| #metal1 |
| defaultsidewall allm1 metal1 113 |
| defaultareacap allm1 metal1 nwell,obswell,pwell well 17 |
| defaultperimeter allm1 metal1 nwell,obswell,pwell well 8 |
| defaultoverlap allm1 metal1 nwell well 26 |
| |
| #metal1->locali |
| defaultoverlap allm1 metal1 allactivenonfet active 36 |
| defaultsideoverlap allm1 metal1 allactivenonfet active 9 |
| |
| #metal1->diff |
| defaultoverlap allm1 metal1 allactivenonfet active 36 |
| defaultsideoverlap allm1 metal1 allactivenonfet active 9 |
| |
| #metal1->poly |
| defaultoverlap allm1 metal1 allpolynonres active 46 |
| defaultsideoverlap allm1 metal1 allpolynonres active 10 |
| |
| #metal2 |
| defaultsidewall allm2 metal2 101 |
| defaultareacap allm2 metal2 nwell,obswell,pwell well 12 |
| defaultperimeter allm2 metal2 nwell,obswell,pwell well 6 |
| defaultoverlap allm2 metal2 nwell well 13 |
| |
| #metal2->diff |
| defaultoverlap allm2 metal2 allactivenonfet active 14 |
| defaultsideoverlap allm2 metal2 allactivenonfet active 7 |
| |
| #metal2->poly |
| defaultoverlap allm2 metal2 allpolynonres active 16 |
| defaultsideoverlap allm2 metal2 allpolynonres active 7 |
| |
| #metal2->metal1 |
| defaultoverlap allm2 metal2 allm1 metal1 39 |
| defaultsideoverlap allm2 metal2 allm1 metal1 10 |
| |
| #metal3 |
| defaultsidewall allm3 metal3 102 |
| defaultoverlap allm3 metal3 nwell well 8 |
| defaultareacap allm3 metal3 nwell,obswell,pwell well 8 |
| defaultperimeter allm3 metal3 nwell,obswell,pwell well 5 |
| |
| #metal3->diff |
| defaultoverlap allm3 metal3 allactive active 9 |
| defaultsideoverlap allm3 metal3 allactive active 6 |
| |
| #metal3->poly |
| defaultoverlap allm3 metal3 allpolynonres active 10 |
| defaultsideoverlap allm3 metal3 allpolynonres active 6 |
| |
| #metal3->metal1 |
| defaultoverlap allm3 metal3 allm1 metal1 15 |
| defaultsideoverlap allm3 metal3 allm1 metal1 7 |
| |
| #metal3->metal2 |
| defaultoverlap allm3 metal3 allm2 metal2 39 |
| defaultsideoverlap allm3 metal3 allm2 metal2 10 |
| |
| #metal4 |
| defaultsidewall allm4 metal4 102 |
| # defaultareacap alltopm metal4 well 6 |
| areacap allm4/m4 8 |
| defaultoverlap allm4 metal4 nwell well 8 |
| defaultperimeter allm4 metal4 well 5 |
| |
| #metal4->diff |
| defaultoverlap allm4 metal4 allactivenonfet active 7 |
| defaultsideoverlap allm4 metal4 allactivenonfet active 7 |
| |
| #metal4->poly |
| defaultoverlap allm4 metal4 allpolynonres active 7 |
| defaultsideoverlap allm4 metal4 allpolynonres active 5 |
| |
| #metal4->metal1 |
| defaultoverlap allm4 metal4 allm1 metal1 9 |
| defaultsideoverlap allm4 metal4 allm1 metal1 6 |
| |
| #metal4->metal2 |
| defaultoverlap allm4 metal4 allm2 metal2 15 |
| defaultsideoverlap allm4 metal4 allm2 metal2 7 |
| |
| #metal4->metal3 |
| defaultoverlap allm4 metal4 allm3 metal3 39 |
| defaultsideoverlap allm4 metal4 allm3 metal3 10 |
| |
| #metal5 |
| defaultsidewall allm5 metal5 103 |
| # defaultareacap allm5 metal5 well 6 |
| areacap allm5/m5 6 |
| defaultoverlap allm5 metal5 nwell well 6 |
| defaultperimeter allm5 metal5 well 5 |
| |
| #metal5->diff |
| defaultoverlap allm5 metal5 allactivenonfet active 5 |
| defaultsideoverlap allm5 metal5 allactivenonfet active 5 |
| |
| #metal5->poly |
| defaultoverlap allm5 metal5 allpolynonres active 5 |
| defaultsideoverlap allm5 metal5 allpolynonres active 5 |
| |
| #metal5->metal1 |
| defaultoverlap allm5 metal5 allm1 metal1 7 |
| defaultsideoverlap allm5 metal5 allm1 metal1 5 |
| |
| #metal5->metal2 |
| defaultoverlap allm5 metal5 allm2 metal2 9 |
| defaultsideoverlap allm5 metal5 allm2 metal2 6 |
| |
| #metal5->metal3 |
| defaultoverlap allm5 metal5 allm3 metal3 15 |
| defaultsideoverlap allm5 metal5 allm3 metal3 7 |
| |
| #metal5->metal4 |
| defaultoverlap allm5 metal5 allm4 metal4 39 |
| defaultsideoverlap allm5 metal5 allm4 metal4 10 |
| |
| # Devices: Use document (...) |
| |
| device msubcircuit pshort pfet *pdiff,pdiffres *pdiff,pdiffres nwell error l=l w=w |
| device msubcircuit plowvt pfetlvt *pdiff,pdiffres *pdiff,pdiffres nwell error l=l w=w |
| device msubcircuit phighvt pfethvt *pdiff,pdiffres *pdiff,pdiffres nwell error l=l w=w |
| |
| device msubcircuit nshort nfet *ndiff,ndiffres *ndiff,ndiffres pwell,space/w error l=l w=w |
| device msubcircuit nlowvt nfetlvt *ndiff,ndiffres *ndiff,ndiffres pwell,space/w error l=l w=w |
| device msubcircuit sonos_p nsonos *ndiff,ndiffres *ndiff,ndiffres pwell,space/w error l=l w=w |
| device subcircuit xcnwvc varactor *nndiff nwell error l=l w=w |
| device subcircuit xcnwvc2 varhvt *nndiff nwell error l=l w=w |
| |
| device msubcircuit phv mvpfet *mvpdiff,mvpdiffres *mvpdiff,mvpdiffres nwell error l=l w=w |
| device msubcircuit nhv mvnfet *mvndiff,mvndiffres *mvndiff,mvndiffres pwell,space/w error l=l w=w |
| device msubcircuit nhv_native mvnnfet *mvndiff,mvndiffres *mvndiff,mvndiffres pwell,space/w error l=l w=w |
| device subcircuit xchvnwc mvvaractor *mvnndiff nwell error l=l w=w |
| |
| device rsubcircuit mrl1 rli1 *li pwell,space/w,nwell error l=l w=w |
| device rsubcircuit mrm1 rmetal1 *metal1 space/w,pwell,nwell error l=l w=w |
| device rsubcircuit mrm2 rmetal2 *metal2 space/w,pwell,nwell error l=l w=w |
| device rsubcircuit mrm3 rmetal3 *metal3 space/w,pwell,nwell error l=l w=w |
| device rsubcircuit mrm4 rm4 *m4 space/w,pwell,nwell error l=l w=w |
| device rsubcircuit mrm5 rm5 *m5 space/w,pwell,nwell error l=l w=w |
| |
| device rsubcircuit xhrpoly xhrpoly *poly pwell,space/w error l=l w=w |
| device rsubcircuit mrp1 mrp1 *poly pwell,space/w error l=l w=w |
| |
| device rsubcircuit mrdn ndiffres *ndiff pwell,space/w error l=l w=w |
| device rsubcircuit mrdp pdiffres *pdiff nwell error l=l w=w |
| device rsubcircuit xpwres rpw *psd dnwell error l=l w=w |
| |
| device rsubcircuit mrdn_hv mvndiffres *mvndiff pwell,space/w error l=l w=w |
| device rsubcircuit mrdp_hv mvpdiffres *mvpdiff nwell error l=l w=w |
| |
| device subcircuit pdiode *pdiode nwell a=area |
| device msubcircuit ndiode *ndiode pwell,space/w a=area |
| device msubcircuit ndiode_lvt *ndiodelvt pwell,space/w a=area |
| device msubcircuit ndiode_native *nndiode nwell a=area |
| device subcircuit pdiode_lvt *pdiodelvt nwell a=area |
| device subcircuit pdiode_hvt *pdiodehvt nwell a=area |
| |
| device subcircuit pdiode_h *mvpdiode nwell a=area |
| device msubcircuit ndiode_h *mvndiode pwell,space/w a=area |
| |
| device subcircuit xcmim1 *mimcap *m3 space/w,pwell,nwell error a=a p=p |
| device subcircuit xcmim2 *mimcap2 *m4 space/w,pwell,nwell error a=a p=p |
| |
| variant (lvs) |
| |
| device mosfet pshort pfet pdiff,pdiffres,pdc nwell |
| device mosfet plowvt pfetlvt pdiff,pdiffres,pdc nwell |
| device mosfet phighvt pfethvt pdiff,pdiffres,pdc nwell |
| device mosfet nshort nfet ndiff,ndiffres,ndc pwell,space/w |
| device mosfet nlowvt nfetlvt ndiff,ndiffres,ndc pwell,space/w |
| device mosfet sonos_p nsonos ndiff,ndiffres,ndc pwell,space/w |
| device mosfet xcnwvc varactor *nndiff nwell |
| device mosfet phv mvpfet mvpdiff,mvpdiffres,mvpdc nwell |
| device mosfet hnv mvnfet mvndiff,mvndiffres,mvndc pwell,space/w |
| device mosfet xchvnwc mvvaractor *mvnndiff nwell |
| |
| device resistor mli1 rli1 *li |
| device resistor mrm1 rmetal1 *metal1 |
| device resistor mrm2 rmetal2 *metal2 |
| device resistor mrm3 rmetal3 *metal3 |
| device resistor mrm4 rm4 *m4 |
| device resistor mrm5 rm5 *m5 |
| |
| device resistor xhrpoly xhrpoly *poly |
| device resistor mrp1 mrp1 *poly |
| device resistor mrdn ndiffres *ndiff |
| device resistor mrdp pdiffres *pdiff |
| device resistor mrdn_hv mvndiffres *mvndiff |
| device resistor mrdp_hv mvpdiffres *mvpdiff |
| device resistor xpwres rpw *psd |
| |
| device pdiode pdiode *pdiode nwell a=area |
| device ndiode ndiode *ndiode pwell,space/w a=area |
| device ndiode ndiode_native *nndiode nwell a=area |
| device pdiode pdiode_h *mvpdiode nwell a=area |
| device ndiode ndiode_h *mvndiode pwell,space/w a=area |
| |
| device subcircuit xcmim1 *mimcap *m3 space/w,pwell,nwell error a=a p=p |
| device subcircuit xcmim2 *mimcap2 *m4 space/w,pwell,nwell error a=a p=p |
| |
| end |
| |
| #----------------------------------------------------- |
| # Wiring tool definitions |
| #----------------------------------------------------- |
| |
| wiring |
| |
| contact v1 16 m1 1 m2 0 |
| contact v2 16 m2 1 m3 0 |
| contact v3 18 m3 0 m4 4 |
| contact v4 18 m4 0 m5 4 |
| |
| contact lic 14 li 0 m1 0 |
| |
| end |
| |
| #----------------------------------------------------- |
| # Plain old router. . . |
| #----------------------------------------------------- |
| |
| router |
| end |
| |
| #------------------------------------------------------------ |
| # Plowing (restored in magic 8.2, need to fill this section) |
| #------------------------------------------------------------ |
| |
| plowing |
| end |
| |
| #----------------------------------------------------------------- |
| # No special plot layers defined (use default PNM color choices) |
| #----------------------------------------------------------------- |
| |
| plot |
| style pnm |
| default |
| draw fillblock no_color_at_all |
| draw nwell cwell |
| end |
| |
