#----------------------------------------------------------
# Copyright (c) 2019 R. Timothy Edwards
# Revisions:  See below
#
# This file is an Open Source foundry process describing
# the SkyWater S8 hybrid 0.18um / 0.13um fabrication
# process.  The file may be distributed under the terms
# of the (Apache 2.0(?)) license agreement.
#
#----------------------------------------------------------
# This file is designed to be used with magic versions 8.2
# or newer.
#----------------------------------------------------------
tech
  format 34
  EFS8A
end

version
 version 20191024
 description "SkyWater S8: PRE ALPHA Vendor Open Source rules and DRC"
end

#----------------------------------------------------------
# Status: 3/17/19: s8.tech created from xh018.tech
#
# Status: 3/20/19: Rev 0 (pre-alpha):
# Work in progress.  Converted from original techfile to S8
# with all sections updated with as much information as could
# be immediately gleaned from the documentation.  Cifinput and
# DRC sections have been checked against one standard cell
# library.
#--------------------------------------------------------------

#--------------------------------------------------------------
# Supported device types
#--------------------------------------------------------------
# device name   magic ID layer  description
#-------------------------------------------------------------
# nshort	nfet		standard nFET
# nlowvt	nfetlvt		low Vt nFET
# sonos_p/e	nsonos		SONOS nFET
# pshort	pfet		standard pFET
# plowvt	pfetlvt		low Vt pFET
# phighvt	pfethvt		high Vt pFET
# ntvnative	---		native nFET
# phv		mvpfet		thickox pFET
# nhv		mvnfet		thickox nFET
# nhvnative	mvnnfet		thickox native nFET
# ndiode	ndiode		n+ diff diode
# ndiode_h	mvndiode	thickox n+ diff diode
# pdiode	pdiode		p+ diff diode
# pdiode_h	mvpdiode	thickox p+ diff diode
# ndiode_native	nndiode		diode with nndiff
# ndiode_lvt	ndiodelvt	low Vt n+ diff diode
# pdiode_lvt	pdiodelvt	low Vt p+ diff diode
# pdiode_hvt	pdiodehvt	high Vt p+ diff diode
# nwdiode	---		nwell diode
# dnwdiode_psub	---		deep nwell diode to substrate
# dnwdiode_pw	---		deep nwell diode to pwell
# xcmimc1	mimcap		MiM cap 1st plate
# xcmimc2	mimcap2		MiM cap 2nd plate
# mrdn		rdn		n+ diff resistor
# mrdn_hv	mvrdn		thickox n+ diff resistor
# mrdp		rdp		p+ diff resistor
# mrdp_hv	mvrdp		thickox p+ diff resistor
# mrl1		rli		local interconnect resistor
# mrp1		npres		n+ poly resistor
# xhrpoly_*	ppres (*)	p+ poly resistor
# xcnwvc	varactor	varactor (low Vt?)
# xcnwvc2	varactorhvt	high Vt varactor
# xchnwc	mvvaractor	thickox varactor
# xpwres	rpw		pwell resistor (in deep nwell)
#
# (*) Note that ppres may extract into some generic type
# called "xhrpoly", but only specific sizes of xhrpoly are
# allowed, and these are created from fixed layouts like the
# types below.
#
# To avoid creating a large number of types, a few ID layers are
# used in conjunction with standard devices types:  "lvt" for
# low threshold voltage, and "hvt" for high threshold voltage.
# "dnwell" is used as an identifier layer where appropriate.
# Layer HVI (thick oxide) is treated differently, and types
# "mv*" are defined where thick oxide is required.
#
#-------------------------------------------------------------
# The following devices are not extracted but are represented
# only by script-generated subcells in the PDK.
#-------------------------------------------------------------
# nshortesd			ESD nFET
# nhvesd			ESD thickox nFET
# nhvnativeesd			ESD native nFET
# phvesd			ESD thickox pFET
# fnpass			flash nFET device
# xchvnwc			floating gate varactor
# npnpar1x*			parasitic NPN
# npn_1x1_2p0_hv		thickox gated parasitic NPN
# pnppar			parasitic PNP
# pnppar5x			parasitic PNP
# xesd_ndiode_h_***		ESD n+ diode
# xesd_pdiode_h_***		ESD p+ diode
# reslocsub			local substrate island indicator
# xcmvpp			Vpp cap
# xcmvpp_2			Vpp cap
# xcmvpp_*			Vpp cap
# xcmvpp*			Vpp cap
# balun				balun inductor
# ind4				inductor
# fuse				metal fuse device
#--------------------------------------------------------------

#-----------------------------------------------------
# Tile planes
#-----------------------------------------------------

planes
  dwell,dw
  well,w
  active,a
  locali,li1,li
  metal1,m1
  metal2,m2
  metal3,m3
  metal4,m4
  metal5,m5
  metali,mi
  block,b
  comment,c
end

#-----------------------------------------------------
# Tile types
#-----------------------------------------------------

types
# Deep nwell
  dwell dnwell,dnw

# Wells
  well nwell,nw
 -well pwell,pw
 -well rpw,rpwell
 -well obswell

# Transistors
  active nmos,ntransistor,nfet
  active pmos,ptransistor,pfet
 -active nnmos,nntransistor
  active mvnmos,mvntransistor,mvnfet
  active mvpmos,mvptransistor,mvpfet
 -active mvnnmos,mvnntransistor,mvnnfet,nnfet
 -active varactor,varact,var
 -active mvvaractor,mvvaract,mvvar

 -active pmoslvt,pfetlvt
 -active pmoshvt,pfethvt
 -active nmoslvt,nfetlvt
 -active varactorhvt,varacthvt,varhvt
 -active nsonos,sonos

# Diffusions
  active ndiff,ndiffusion,ndif
  active pdiff,pdiffusion,pdif
 -active mvndiff,mvndiffusion,mvndif
 -active mvpdiff,mvpdiffusion,mvpdif
  active ndiffc,ndcontact,ndc
  active pdiffc,pdcontact,pdc
 -active mvndiffc,mvndcontact,mvndc
 -active mvpdiffc,mvpdcontact,mvpdc
  active psubdiff,psubstratepdiff,ppdiff,ppd,psd
  active nsubdiff,nsubstratendiff,nndiff,nnd,nsd
 -active mvpsubdiff,mvpsubstratepdiff,mvppdiff,mvppd,mvpsd
 -active mvnsubdiff,mvnsubstratendiff,mvnndiff,mvnnd,mvnsd
  active psubdiffcont,psubstratepcontact,psc
  active nsubdiffcont,nsubstratencontact,nsc
 -active mvpsubdiffcont,mvpsubstratepcontact,mvpsc
 -active mvnsubdiffcont,mvnsubstratencontact,mvnsc
 -active obsactive
 -active mvobsactive

# Poly
  active poly,p,polysilicon
  active polycont,pc,pcontact,polycut,polyc

# Resistors
 -active npolyres,npres,mrp1
 -active ppolyres,ppres,xhrpoly
 -active ndiffres,rnd,rdn,rndiff
 -active pdiffres,rpd,rdp,rpdiff
 -active mvndiffres,mvrnd,mvrdn,mvrndiff
 -active mvpdiffres,mvrpd,mvrdp,mvrpdiff

# Diodes
 -active pdiode,pdi
 -active ndiode,ndi
 -active nndiode,nndi
 -active pdiodec,pdic
 -active ndiodec,ndic
 -active nndiodec,nndic
 -active mvpdiode,mvpdi
 -active mvndiode,mvndi
 -active mvpdiodec,mvpdic
 -active mvndiodec,mvndic
 -active pdiodelvt,pdilvt
 -active pdiodehvt,pdihvt
 -active ndiodelvt,ndilvt
 -active pdiodelvtc,pdilvtc
 -active pdiodehvtc,pdihvtc
 -active ndiodelvtc,ndilvtc

# Local Interconnect 
  locali locali,li1,li
 -locali rlocali,rli1,rli
  locali viali,vial,lic,licon,m1c,v0
 -locali obsli1,obsli
 -locali obsli1c,obslic,obslicon

# Metal 1
  metal1 metal1,m1,met1
 -metal1 rmetal1,rm1,rmet1
  metal1 via1,m2contact,m2cut,m2c,via,v,v1
 -metal1 obsm1
 -metal1 padl

# Metal 2
  metal2 metal2,m2,met2
 -metal2 rmetal2,rm2,rmet2
  metal2 via2,m3contact,m3cut,m3c,v2
 -metal2 obsm2

# Metal 3
  metal3 metal3,m3,met3
 -metal3 rmetal3,rm3,rmet3
 -metal3 obsm3
  metal3 via3,v3
 -metal2 mimcapcontact,mimcapc,mimcc,capmc
 -metal3 mimcap,mim,capm

# Metal 4
  metal4 metal4,m4,met4
 -metal4 rmetal4,rm4,rmet4
 -metal4 obsm4
  metal4 via4,v4
 -metal3 mimcap2contact,mimcap2c,mim2cc,capm2c
 -metal4 mimcap2,mim2,capm2

# Metal 5
  metal5 metal5,m5,met5
 -metal5 rm5,rmetal5,rmet5
 -metal5 obsm5

 -metali metalrdl,mrdl,metrdl

# Miscellaneous
 -block  glass
 -block  fillblock
 -comment comment
 -comment obscomment

end

#-----------------------------------------------------
# Magic contact types
#-----------------------------------------------------

contact
  pc    poly    locali
  ndc   ndiff   locali
  pdc   pdiff   locali
  nsc   nsd     locali
  psc   psd     locali
  ndic  ndiode  locali
  nndic nndiode locali
  pdic  pdiode  locali

  mvndc   mvndiff   locali
  mvpdc   mvpdiff   locali
  mvnsc   mvnsd     locali
  mvpsc   mvpsd     locali
  mvndic  mvndiode  locali
  mvpdic  mvpdiode  locali

  lic locali metal1

  via1   metal1 metal2
  via2   metal2 metal3
  mimcc  metal2 mimcap
  mim2cc metal3 mimcap2
  via3   metal3 metal4
  via4   metal4 metal5
  stackable

  padl m1 m2 m3 m4 m5 glass
end

#-----------------------------------------------------
# Layer aliases
#-----------------------------------------------------

aliases

  allwellplane     nwell
  allnwell	   nwell,obswell

  allnfets	   nfet,mvnfet,mvnnfet,nfetlvt,nsonos
  allpfets	   pfet,mvpfet,pfethvt,pfetlvt
  allfets	   allnfets,allpfets,varactor,mvvaractor,varhvt

  allnactivenonfet *ndiff,*nsd,*ndiode,*nndiode,*mvndiff,*mvnsd,*mvndiode,*ndiodelvt
  allnactive	   allnactivenonfet,allnfets
  allnactivenontap *ndiff,*ndiode,*nndiode,*mvndiff,*mvndiode,*ndiodelvt,allnfets
  allnactivetap	   *nsd,*mvnsd

  allpactivenonfet *pdiff,*psd,*pdiode,*mvpdiff,*mvpsd,*mvpdiode,*pdiodelvt,*pdiodehvt
  allpactive	   allpactivenonfet,allpfets
  allpactivenontap *pdiff,*pdiode,*mvpdiff,*mvpdiode,*pdiodelvt,*pdiodehvt,allpfets
  allpactivetap    *psd,*mvpsd

  allactivenonfet  allnactivenonfet,allpactivenonfet
  allactive	   allactivenonfet,allfets

  allactiveres	   ndiffres,pdiffres,mvndiffres,mvpdiffres

  allndifflv       *ndif,*nsd,*ndiode,ndiffres,nfet,nfetlvt,nsonos
  allpdifflv       *pdif,*psd,*pdiode,pdiffres,pfet,pfetlvt,pfethvt
  alldifflv        allndifflv,allpdifflv
  allndifflvnonfet *ndif,*nsd,*ndiode,*nndiode,ndiffres,*ndiodelvt
  allpdifflvnonfet *pdif,*psd,*pdiode,pdiffres,*pdiodelvt,*pdiodehvt
  alldifflvnonfet  allndifflvnonfet,allpdifflvnonfet

  allndiffmv       *mvndif,*mvnsd,*mvndiode,*nndiode,mvndiffres,mvnfet,mvnnfet
  allpdiffmv       *mvpdif,*mvpsd,*mvpdiode,mvpdiffres,mvpfet
  alldiffmv        allndiffmv,allpdiffmv
  allndiffmvnonfet *mvndif,*mvnsd,*mvndiode,*nndiode,mvndiffres
  allpdiffmvnonfet *mvpdif,*mvpsd,*mvpdiode,mvpdiffres
  alldiffmvnonfet  allndiffmvnonfet,allpdiffmvnonfet

  alldiffnonfet	   alldifflvnonfet,alldiffmvnonfet
  alldiff	   alldifflv,alldiffmv

  allpolyres	   mrp1,xhrpoly
  allsblkgennocap_0_4um mrp1,xhrpoly,rnd,rpd,mvrdn,mvrdp

  allpolynonfet	   *poly,allpolyres
  allpolynonres	   *poly,allfets

  allpoly	   allpolynonfet,allfets
  allpolynoncap	   *poly,allfets,allpolyres

  allndiffcontlv   ndc,nsc,ndic,ndilvtc
  allpdiffcontlv   pdc,psc,pdic,pdilvtc,pdihvtc
  allndiffcontmv   mvndc,mvnsc,mvndic
  allpdiffcontmv   mvpdc,mvpsc,mvpdic
  allndiffcont	   allndiffcontlv,allndiffcontmv
  allpdiffcont	   allpdiffcontlv,allpdiffcontmv
  alldiffcontlv	   allndiffcontlv,allpdiffcontlv
  alldiffcontmv	   allndiffcontmv,allpdiffcontmv
  alldiffcont	   alldiffcontlv,alldiffcontmv

  allcont	alldiffcont,pc

  allres	allpolyres,allactiveres

  allli		*locali,rli
  allm1		*m1,rm1
  allm2		*m2,rm2
  allm3		*m3,rm3
  allm4	   	*m4,rm4
  allm5	   	*m5,rm5

  allpad	padl

  psub		pwell
  
end

#-----------------------------------------------------
# Layer drawing styles
#-----------------------------------------------------

styles
 styletype mos
  dnwell    cwell
  nwell     nwell
  pwell	    pwell
  rpwell    pwell 	ptransistor_stripes
  ndiff     ndiffusion
  pdiff     pdiffusion
  nsd       ndiff_in_nwell
  psd       pdiff_in_pwell
  nfet      ntransistor    ntransistor_stripes
  pfet      ptransistor    ptransistor_stripes
  var       polysilicon    ndiff_in_nwell
  ndc       ndiffusion     metal1  contact_X'es
  pdc       pdiffusion     metal1  contact_X'es
  nsc       ndiff_in_nwell metal1  contact_X'es
  psc       pdiff_in_pwell metal1  contact_X'es

  pfetlvt   ptransistor	ptransistor_stripes implant1
  pfethvt   ptransistor ptransistor_stripes implant2
  nfetlvt   ntransistor ntransistor_stripes implant1
  nsonos    ntransistor implant3

  mvndiff   ndiffusion     hvndiff_mask
  mvpdiff   pdiffusion     hvpdiff_mask
  mvnsd     ndiff_in_nwell hvndiff_mask
  mvpsd     pdiff_in_pwell hvpdiff_mask
  mvnfet    ntransistor    ntransistor_stripes hvndiff_mask
  mvnnfet   ntransistor    ndiff_in_nwell hvndiff_mask
  mvpfet    ptransistor    ptransistor_stripes
  mvvar     polysilicon    ndiff_in_nwell hvndiff_mask
  mvndc     ndiffusion     metal1  contact_X'es hvndiff_mask
  mvpdc     pdiffusion     metal1  contact_X'es hvpdiff_mask
  mvnsc     ndiff_in_nwell metal1  contact_X'es hvndiff_mask
  mvpsc     pdiff_in_pwell metal1  contact_X'es hvpdiff_mask

  poly      polysilicon 
  pc        polysilicon    metal1  contact_X'es
  npolyres  polysilicon    silicide_block nselect2
  ppolyres  polysilicon    silicide_block pselect2

  pdiode    pdiffusion     pselect2
  ndiode    ndiffusion     nselect2
  pdiodec   pdiffusion     pselect2 metal1 contact_X'es
  ndiodec   ndiffusion     nselect2 metal1 contact_X'es

  ndiodelvt ndiffusion	nselect2 implant1
  pdiodelvt pdiffusion  pselect2 implant1
  pdiodehvt pdiffusion  pselect2 implant2

  mvpdiode    pdiffusion     pselect2 hvpdiff_mask
  mvndiode    ndiffusion     nselect2 hvndiff_mask
  nndiode     ndiff_in_nwell nselect2 hvndiff_mask
  mvpdiodec   pdiffusion     pselect2 metal1 contact_X'es hvpdiff_mask
  mvndiodec   ndiffusion     nselect2 metal1 contact_X'es hvndiff_mask
  nndiodec    ndiff_in_nwell nselect2 metal1 contact_X'es hvndiff_mask

  locali    metal1
  rli       metal1         poly_resist_stripes
  lic	    metal1	   metal2 via1arrow
  obsli     metal1

  metal1    metal2
  rm1       metal2         poly_resist_stripes
  obsm1     metal2
  m2c       metal2         metal3  via2arrow
  metal2    metal3
  rm2       metal3         poly_resist_stripes
  obsm2     metal3
  m3c       metal3         metal4  via3alt
  metal3    metal4
  rm3       metal4         poly_resist_stripes
  obsm3     metal4
  mimcap    metal3         metal2
  mimcc     metal3         contact_X'es mems
  mimcap2   metal4         metal3
  mim2cc    metal4         contact_X'es mems
  via3      metal4         metal5  via4
  metal4    metal5
  rm4       metal5         poly_resist_stripes
  obsm4     metal5
  via4      metal5         metal6  via5
  metal5    metal6
  rm5       metal6         poly_resist_stripes
  obsm5     metal6
  metalrdl  metal7

  glass	    overglass
  mrp1      poly_resist    poly_resist_stripes
  xhrpoly   poly_resist    silicide_block
  ndiffres  ndiffusion	   ndop_stripes
  pdiffres  pdiffusion	   pdop_stripes
  mvndiffres  ndiffusion hvndiff_mask   ndop_stripes
  mvpdiffres  pdiffusion hvpdiff_mask   pdop_stripes
  comment   comment
  error_p   error_waffle
  error_s   error_waffle
  error_ps  error_waffle
  fillblock cwell

  obswell   cwell
  obsactive implant4

  padl      metal6 via6 overglass

  magnet    substrate_field_implant
  rotate    via3alt
  fence     via5
end

#-----------------------------------------------------
# Special paint/erase rules
#-----------------------------------------------------

compose
  compose  nfet  poly  ndiff
  compose  pfet  poly  pdiff
  compose  var   poly  nsd

  compose  mvnfet  poly  mvndiff
  compose  mvpfet  poly  mvpdiff
  compose  mvvar   poly  mvnsd
  
  paint  mimcap   m3     mimcap
  paint  mimcapc  m3     mimcapc
  paint  mimcap2  m4     mimcap2
  paint  mimcap2c m4     mimcap2c

  paint  ndc     nwell  pdc
  paint  nfet    nwell  pfet
  paint  ndiff   nwell  pdiff
  paint  psd     nwell  nsd
  paint  psc     nwell  nsc

  paint  pdc     pwell  ndc
  paint  pfet    pwell  nfet
  paint  pdiff   pwell  ndiff
  paint  nsd     pwell  psd
  paint  nsc     pwell  psc

  paint  m4      obsm4  m4
  paint  m5      obsm5  m5
end

#-----------------------------------------------------
# Electrical connectivity
#-----------------------------------------------------

connect
  *nwell,*nsd,*mvnsd *nwell,*nsd,*mvnsd
  pwell,*psd,*mvpsd  pwell,*psd,*mvpsd
  *li	*li
  *m1	*m1
  *m2	*m2
  *m3	*m3
  *m4	*m4
  *m5	*m5
  *mimcap     *mimcap
  *mimcap2    *mimcap2
   allnactivenonfet	allnactivenonfet
   allpactivenonfet	allpactivenonfet
  *poly,allfets		*poly,allfets
  # RDL connects to m5 (i.e., padl) through glass cut
  glass			metrdl
end

#-----------------------------------------------------
# CIF/GDS output layer definitions
#-----------------------------------------------------
# NOTE:  All values in this section MUST be multiples of 25 
# or else magic will scale below the allowed layout grid size

cifoutput

#----------------------------------------------------------------
style gdsii
# NOTE: This section is used for actual GDS output
#----------------------------------------------------------------
 scalefactor 10  nanometers
 options calma-permissive-labels
 gridlimit 5

#----------------------------------------------------------------
# DNWELL
#----------------------------------------------------------------

 layer DNWELL	dnwell
	calma	64 18

 layer PWRES    rpw
	and	dnwell
	calma	64 13

#----------------------------------------------------------------
# NWELL
#----------------------------------------------------------------

 layer NWELL 	allnwell
 	calma 	64 20

 templayer nwell_grow  allnwell
	grow 430

#----------------------------------------------------------------
# DIFF
#----------------------------------------------------------------

 layer DIFF 	allnactivenontap,allpactivenontap
 	labels 	allnactivenontap,allpactivenontap
 	calma 	65 20

#----------------------------------------------------------------
# TAP
#----------------------------------------------------------------

 layer TAP 	allnactivetap,allpactivetap
 	labels 	allnactivetap,allpactivetap
 	calma 	65 44

#----------------------------------------------------------------
# PPLUS, NPLUS (PSDM, NSDM)
#----------------------------------------------------------------

 layer PPLUS	allpactivetap
	grow	180
	calma	94 20

 layer PPLUS	allpactivenontap
	grow	180
	calma	94 20

 layer NPLUS	allnactivetap
	grow	180
	calma	93 44

 layer NPLUS	allnactivenontap
	grow	180
	calma	93 44

 layer PPLUS
	bloat-all xhrpoly *poly
	grow	110
	calma	94 20

#----------------------------------------------------------------
# LVTN
#----------------------------------------------------------------

 layer LVTN  pfetlvt,nfetlvt,mvvar,mvnnfet,pdiodelvt,ndiodelvt,nndiode
        grow 180
	calma 125 44

#----------------------------------------------------------------
# HVTP
#----------------------------------------------------------------

 layer HVTP pfethvt,varhvt,pdiodehvt
        grow 180
	calma 78 44

#----------------------------------------------------------------
# SONOS 
#----------------------------------------------------------------

 layer SONOS nsonos
	grow 100
	calma 80 20

#----------------------------------------------------------------
# RPM
#----------------------------------------------------------------

 layer RPM
	bloat-all xhrpoly *poly
	grow 200
	calma 86 20

#----------------------------------------------------------------
# POLY
#----------------------------------------------------------------

 layer POLY 	allpoly
 	calma 	66 20

 layer POLYTXT
	labels  allpoly noport
	calma	66 16

 layer POLYPIN
	labels  allpoly port
	calma	66 5

#----------------------------------------------------------------
# THKOX (HVI)
#----------------------------------------------------------------

 layer THKOX 	alldiffmv,mvvar
 	grow 	3600
 	shrink 	3280
        bloat-all alldiffmv nwell
 	calma 	75 20

#----------------------------------------------------------------
# CONT (LICON)
#----------------------------------------------------------------

 layer CONT allcont
 	squares-grid 0 170 170
 	calma	66 44

#----------------------------------------------------------------
# NPC (Nitride poly cut)
# surrounds CONT (LICON) on poly only (i.e., pc)
#----------------------------------------------------------------

 layer NPC pc
 	squares-grid 0 170 170
	grow 100
	calma  95 20

 # NPC is also generated around xhrpoly resistors

 layer NPC
	bloat-all xhrpoly *poly
	grow 95
	calma  95 20

#----------------------------------------------------------------
# Device markers
#----------------------------------------------------------------

 layer DIFFRES rdn,mvrdn,rdp,mvrdp
	calma 65 13

 layer POLYRES mrp1,xhrpoly
	calma 66 13

 layer DIODE *pdi,*ndi,*nndi,*mvpdi,*mvndi,*pdilvt,*pdihvt,*ndilvt
        # To be done:  Expand to include anode, cathode, and guard ring
	calma 81 23

#----------------------------------------------------------------
# LI
#----------------------------------------------------------------
 layer LI allli
	calma 67 20

#----------------------------------------------------------------
# MCON
#----------------------------------------------------------------
 layer MCON lic
 	squares-grid 0 170 190
 	calma 	67 44

#----------------------------------------------------------------
# MET1
#----------------------------------------------------------------
 layer MET1 	allm1
 	calma 	68 20

 layer MET1TXT
	labels	allm1 noport
	calma 	68 16

 layer MET1PIN
	labels	allm1 port
	calma 	68 5

#----------------------------------------------------------------
# VIA1
#----------------------------------------------------------------
 layer VIA1 	via1
 	squares-grid 55 150 170
 	calma 	68 44

#----------------------------------------------------------------
# MET2
#----------------------------------------------------------------
 layer MET2 	allm2
 	calma 	69 20

 layer MET2TXT
	labels	allm2 noport
	calma	69 16

 layer MET2PIN
	labels	allm2 port
	calma	69 5

#----------------------------------------------------------------
# VIA2
#----------------------------------------------------------------
 layer VIA2 	via2
 	squares-grid 40 200 200
 	calma 	69 44

#----------------------------------------------------------------
# MET3
#----------------------------------------------------------------
 layer MET3 	allm3
 	calma 	70 20

 layer MET3TXT
 	labels 	allm3 noport
	calma	70 5

 layer MET3PIN
	labels	allm3 port
	calma	70 16

#----------------------------------------------------------------
# VIA3
#----------------------------------------------------------------
 layer VIA3	via3
 	squares-grid 60 200 200
 	calma 	70 44

#----------------------------------------------------------------
# MET4
#----------------------------------------------------------------
 layer MET4 	allm4
 	labels 	allm4 noport
 	calma 	71 20

 layer MET4TXT
	labels	allm4 noport
	calma	71 16

 layer MET4PIN
	labels	allm4 port
	calma	71 5

#----------------------------------------------------------------
# VIA4
#----------------------------------------------------------------
 layer VIA4	via4
 	squares-grid 190 800 800
 	calma 	71 44

#----------------------------------------------------------------
# MET5
#----------------------------------------------------------------
 layer MET5 	allm5
 	calma 	72 20

 layer MET5TXT
	labels	allm5 noport
	calma	50 16

 layer MET5PIN
	labels	allm5 port
	calma	50 5

#----------------------------------------------------------------
# RDL
#----------------------------------------------------------------
  layer RDL	metrdl
	calma   74 20

  layer RDLTXT
	labels	metrdl noport
	calma	74 16

  layer RDLPIN
	labels  metrdl port
	calma	74 5

#----------------------------------------------------------------
# GLASS
#----------------------------------------------------------------
 layer GLASS 	glass
 	calma 	76 20

#----------------------------------------------------------------
# BOUND
#----------------------------------------------------------------
 layer 	BOUND
	boundary 
	calma 81 4

#----------------------------------------------------------------
# CAPM
#----------------------------------------------------------------
 layer CAPM 	*mimcap
 	labels 	mimcap
 	calma 	89 44

 layer CAPM2 	*mimcap2
 	labels 	mimcap2
 	calma 	97 44

#----------------------------------------------------------------
# FILLBLOCK
#----------------------------------------------------------------
 layer FILLOBSM1 fillblock
 	calma 	62 24

 layer FILLOBSM2 fillblock
 	calma 	105 52

 layer FILLOBSM3 fillblock
 	calma 	107 24

 layer FILLOBSM4 fillblock
 	calma 	112 4

#----------------------------------------------------------------
style drc
#----------------------------------------------------------------
# NOTE:  This style is used for DRC only, not for GDS output
#----------------------------------------------------------------
 scalefactor 10  nanometers
 options calma-permissive-labels

 # Ensure nwell overlaps dnwell at least 0.4um outside and 1.03um inside
 templayer dnwell_shrink dnwell
 shrink 1030

 templayer nwell_missing dnwell
 grow 400
 and-not dnwell_shrink
 and-not nwell

 # SONOS nFET devices must be in deep nwell
 templayer dnwell_missing nsonos
 and-not dnwell

 templayer ptap_reach *psd,*mvpsd
 grow 1600
 and-not allnwell 
 grow 1600
 and-not allnwell 
 grow 1600
 and-not allnwell 
 grow 1600
 and-not allnwell 
 grow 1600
 and-not allnwell 
 grow 1600
 and-not allnwell 
 grow 1600
 and-not allnwell 
 grow 800
 
 templayer ptap_missing *ndiff,*mvndiff
 and-not ptap_reach
 
 templayer ntap_reach *nsd
 grow 1600
 and allnwell
 grow 1600
 and allnwell
 grow 1600
 and allnwell
 grow 1600
 and allnwell
 grow 800
 and allnwell
 
 templayer mvntap_reach *mvnsd
 grow 1600
 and allnwell
 grow 1600
 and allnwell
 grow 1600
 and allnwell
 grow 1600
 and allnwell
 grow 800
 and allnwell
 
 templayer mvptap_reach *mvpsd
 grow 1600
 and-not allnwell
 grow 1600
 and-not allnwell
 grow 1600
 and-not allnwell
 grow 1600
 and-not allnwell
 grow 800
 and-not allnwell
 
 templayer ntap_missing *pdiff
 and-not ntap_reach

 templayer mvntap_missing *mvpdiff
 and-not mvntap_reach

 templayer mvptap_missing *mvndiff
 and-not mvptap_reach

#----------------------------------------------------------------
style metfill
#----------------------------------------------------------------
# NOTE: This section used for metal filling output
#       by a sequence of cif paint commands
#----------------------------------------------------------------

 scalefactor 10  nanometers
 options calma-permissive-labels
 gridlimit 5

#----------------------------------------------------------------
# MET1 FILL
#----------------------------------------------------------------
 templayer 	slots_m1
	bbox 	top
	slots 	32000 1150 1650 32000 13350 14650
 templayer 	slots_m1
	bbox 	top
	slots 	33400 1150 1650 46000 13350 14650
 templayer 	obstruct_m1 allm1,allpad,allngf
	grow 	800
	shrink 	500
	grow 	500
 layer met1fill slots_m1
	and-not obstruct_m1
	shrink 	550
	grow 	550

#----------------------------------------------------------------
# MET2 FILL
#----------------------------------------------------------------
 templayer 	slots_m2
	bbox 	top
	slots 	32000 13350 14650 32000 1150 1650
 templayer 	slots_m2
	bbox 	top
	slots 	46000 13350 14650 33400 1150 1650
 templayer 	obstruct_m2 allm2,allpad,allngf
	grow 	800
	shrink 	500
	grow 	500
 layer met2fill slots_m2
	and-not obstruct_m2
	shrink 	550
	grow 	550

#----------------------------------------------------------------
# MET3 FILL
#----------------------------------------------------------------
 templayer 	slots_m3
	bbox 	top
	slots 	33400 1150 1650 32000 13350 14650
 templayer 	slots_m3
	bbox 	top
	slots 	32000 1150 1650 46000 13350 14650
 templayer 	obstruct_m3 allm3,allpad,allngf
	grow 	800
	shrink 	500
	grow 	500
 layer met3fill slots_m3
	and-not obstruct_m3
	shrink 	550
	grow 	550


#----------------------------------------------------------------
# MET4 FILL
#----------------------------------------------------------------
 templayer 	slots_m4
	bbox 	top
	slots 	32000 11500 2500 32000 4500 2500
 templayer 	obstruct_m4 allm4,allpad,allngf
	grow 	500
	shrink 	500
	grow 	500
 layer met4fill slots_m4
	and-not obstruct_m4
	shrink 	220
	grow 	220

#----------------------------------------------------------------
# MET5 FILL
#----------------------------------------------------------------
 templayer 	slots_m5
	bbox 	top
	slots 	32000 11500 2500 32000 4500 2500
 templayer 	obstruct_m5 allm5,allpad,allngf
	grow 	500
	shrink 	500
	grow 	500
 layer met4fill slots_m5
	and-not obstruct_m5
	shrink 	220
	grow 	220

end

#-----------------------------------------------------------------------
cifinput
#-----------------------------------------------------------------------
# NOTE:  All values in this section MUST be multiples of 25 
# or else magic will scale below the allowed layout grid size
#-----------------------------------------------------------------------

style  vendorimport
 scalefactor 10 nanometers
 gridlimit 5

 options ignore-unknown-layer-labels no-reconnect-labels

 ignore NPC
 ignore AREAID

 layer nwell NWELL,WELLTXT,WELLPIN
 labels NWELL
 labels WELLTXT text
 labels WELLPIN port

 layer pwell PWELLTXT,PWELLPIN,SUBTXT
 labels PWELLTXT text
 labels PWELLPIN port
 labels SUBTXT text

 layer dnwell DNWELL
 labels DNWELL

 layer rpw PWRES
 and DNWELL
 labels PWRES

 templayer ndiffarea DIFF,DIFFTXT,DIFFPIN
 and-not POLY
 and-not NWELL
 and-not PPLUS
 and-not DIODE
 and-not THKOX
 and NPLUS
 copyup ndifcheck
 labels DIFF
 labels DIFFTXT text
 labels DIFFPIN port
 labels TAPPIN port

 layer ndiff ndiffarea

 # Copy ndiff areas up for contact checks
 templayer xndifcheck ndifcheck
 copyup ndifcheck

 templayer mvndiffarea DIFF,DIFFTXT,DIFFPIN
 and-not POLY
 and-not NWELL
 and-not PPLUS
 and-not DIODE
 and THKOX
 and NPLUS
 copyup ndifcheck
 labels DIFF
 labels DIFFTXT text
 labels DIFFPIN port

 layer mvndiff mvndiffarea

 # Copy ndiff areas up for contact checks
 templayer mvxndifcheck mvndifcheck
 copyup mvndifcheck

 layer ndiode DIFF
 and NPLUS
 and DIODE
 and-not NWELL
 and-not POLY
 and-not PPLUS
 and-not THKOX
 and-not LVTN
 labels DIFF

 layer ndiodelvt DIFF
 and NPLUS
 and DIODE
 and-not NWELL
 and-not POLY
 and-not PPLUS
 and-not THKOX
 and LVTN
 labels DIFF

 templayer ndiodearea DIODE
 and NPLUS
 and-not THKOX
 and-not NWELL
 copyup DIODE,NPLUS

 layer ndiffres DIFFRES
 and NPLUS
 and-not THKOX
 labels DIFF

 templayer pdiffarea DIFF,DIFFTXT,DIFFPIN
 and-not POLY
 and NWELL
 and-not NPLUS
 and-not DIODE
 and-not THKOX
 and PPLUS
 copyup pdifcheck
 labels DIFF 
 labels DIFFTXT text
 labels DIFFPIN port

 layer pdiff pdiffarea

 layer mvndiode DIFF
 and NPLUS
 and DIODE
 and THKOX
 and-not POLY
 and-not PPLUS
 and-not LVTN
 labels DIFF

 layer nndiode DIFF
 and NPLUS
 and DIODE
 and THKOX
 and-not POLY
 and-not PPLUS
 and LVTN
 labels DIFF

 templayer mvndiodearea DIODE
 and NPLUS
 and THKOX
 and-not NWELL
 copyup DIODE,NPLUS

 layer mvndiffres DIFFRES
 and NPLUS
 and THKOX
 labels DIFF

 templayer mvpdiffarea DIFF,DIFFTXT,DIFFPIN
 and-not POLY
 and NWELL
 and-not NPLUS
 and THKOX
 and-not DIODE
 and PPLUS
 copyup mvpdifcheck
 labels DIFF
 labels DIFFTXT text
 labels DIFFPIN port

 layer mvpdiff mvpdiffarea

 # Copy pdiff areas up for contact checks
 templayer xpdifcheck pdifcheck
 copyup pdifcheck

 layer pdiode DIFF
 and PPLUS
 and-not POLY
 and-not NPLUS
 and-not THKOX
 and-not LVTN
 and-not HVTP
 and DIODE
 labels DIFF

 layer pdiodelvt DIFF
 and PPLUS
 and-not POLY
 and-not NPLUS
 and-not THKOX
 and LVTN
 and-not HVTP
 and DIODE
 labels DIFF

 layer pdiodehvt DIFF
 and PPLUS
 and-not POLY
 and-not NPLUS
 and-not THKOX
 and-not LVTN
 and HVTP
 and DIODE
 labels DIFF

 templayer pdiodearea DIODE
 and PPLUS
 and-not THKOX
 copyup DIODE,PPLUS

 # Define pfet areas as known pdiff, regardless of the presence of a well.

 templayer pfetarea DIFF
 and-not NPLUS
 and-not THKOX
 and POLY

 layer pfet pfetarea
 and-not LVTN
 and-not HVTP
 labels DIFF

 layer pfetlvt pfetarea
 and LVTN
 labels DIFF

 layer pfethvt pfetarea
 and HVTP
 labels DIFF

 # Always force nwell under pfet (nwell encloses pdiff by 0.18)
 layer nwell pfetarea
 grow 180

 # Copy mvpdiff areas up for contact checks
 templayer mvxpdifcheck mvpdifcheck
 copyup mvpdifcheck

 layer mvpdiode DIFF
 and PPLUS
 and-not POLY
 and-not NPLUS
 and THKOX
 and DIODE
 labels DIFF

 templayer mvpdiodearea DIODE
 and PPLUS
 and THKOX
 copyup DIODE,PPLUS

 # Define pfet areas as known pdiff,
 # regardless of the presence of a
 # well.

 templayer mvpfetarea DIFF
 and-not NPLUS
 and THKOX
 and POLY

 layer mvpfet mvpfetarea
 labels DIFF

 layer pdiff DIFF,DIFFTXT,DIFFPIN
 and-not NPLUS
 and-not POLY
 and-not THKOX
 labels DIFF
 labels DIFFTXT text
 labels DIFFPIN port

 layer pdiffres DIFFRES
 and PPLUS
 and NWELL
 and-not THKOX
 labels DIFF

 layer nfet DIFF
 and POLY
 and-not PPLUS
 and NPLUS
 and-not THKOX
 and-not LVTN
 and-not SONOS
 labels DIFF

 layer nfetlvt DIFF
 and POLY
 and-not PPLUS
 and NPLUS
 and-not THKOX
 and LVTN
 and-not SONOS
 labels DIFF

 layer nsonos DIFF
 and POLY
 and-not PPLUS
 and NPLUS
 and-not THKOX
 and LVTN
 and SONOS
 labels DIFF

 templayer nsdarea DIFF
 and NPLUS
 and NWELL
 and-not POLY
 and-not PPLUS
 and-not THKOX
 copyup nsubcheck

 layer nsd nsdarea
 labels DIFF

 layer nsd TAP,TAPPIN
 and NPLUS
 labels TAP
 labels TAPPIN port

 templayer nsdexpand nsdarea
 grow 500

 # Copy nsub areas up for contact checks
 templayer xnsubcheck nsubcheck
 copyup nsubcheck

 templayer psdarea DIFF
 and PPLUS
 and-not NWELL
 and-not POLY
 and-not NPLUS
 and-not THKOX
 and-not pfetexpand
 copyup psubcheck

 layer psd psdarea
 labels DIFF

 layer psd TAP,TAPPIN
 and PPLUS
 and-not THKOX
 labels TAP
 labels TAPPIN port

 templayer psdexpand psdarea
 grow 500

 layer mvpdiff DIFF,DIFFTXT,DIFFPIN
 and-not NPLUS
 and-not POLY
 and THKOX
 and mvpfetexpand
 labels DIFF
 labels DIFFTXT text
 labels DIFFPIN port

 layer mvpdiffres DIFFRES
 and PPLUS
 and NWELL
 and THKOX
 and-not mvrdpioedge
 labels DIFF

 layer mvnfet DIFF
 and POLY
 and-not PPLUS
 and NPLUS
 and-not LVTN
 and THKOX
 labels DIFF

 layer mvnnfet DIFF
 and POLY
 and-not PPLUS
 and NPLUS
 and LVTN
 and THKOX
 labels DIFF

 templayer mvnsdarea DIFF
 and NPLUS
 and NWELL
 and-not POLY
 and-not PPLUS
 and THKOX
 copyup mvnsubcheck

 layer mvnsd mvnsdarea
 labels DIFF

 layer mvnsd TAP,TAPPIN
 and NPLUS
 and THKOX
 labels TAP
 labels TAPPIN port

 templayer mvnsdexpand mvnsdarea
 grow 500

 # Copy nsub areas up for contact checks
 templayer mvxnsubcheck mvnsubcheck
 copyup mvnsubcheck

 templayer mvpsdarea DIFF
 and PPLUS
 and-not NWELL
 and-not POLY
 and-not NPLUS
 and THKOX
 and-not mvpfetexpand
 copyup mvpsubcheck

 layer mvpsd mvpsdarea
 labels DIFF

 layer mvpsd TAP,TAPPIN
 and PPLUS
 and THKOX
 labels TAP
 labels TAPPIN port

 templayer mvpsdexpand mvpsdarea
 grow 500

 # Copy psub areas up for contact checks
 templayer xpsubcheck psubcheck
 copyup psubcheck

 templayer mvxpsubcheck mvpsubcheck
 copyup mvpsubcheck

 layer psd DIFF
 and-not PPLUS
 and-not NPLUS
 and-not POLY
 and-not THKOX
 and-not pfetexpand
 and psdexpand

 layer nsd DIFF
 and-not PPLUS
 and-not NPLUS
 and-not POLY
 and-not THKOX
 and nsdexpand

 layer mvpsd DIFF
 and-not PPLUS
 and-not NPLUS
 and-not POLY
 and THKOX
 and-not mvpfetexpand
 and mvpsdexpand

 layer mvnsd DIFF
 and-not PPLUS
 and-not NPLUS
 and-not POLY
 and THKOX
 and mvnsdexpand

 templayer hresarea POLY
 and RPM
 grow 3000

 templayer diffresarea DIFFRES
 and-not THKOX
 grow 3000

 templayer mvdiffresarea DIFFRES
 and THKOX
 grow 3000

 templayer resarea diffresarea,mvdiffresarea,hresarea,xresarea

 layer pfet POLY
 and DIFF
 and diffresarea
 and-not NPLUS

 templayer polyarea POLY
 and-not POLYRES
 and-not DIFF
 copyup polycheck

 layer poly polyarea,POLYTXT,POLYPIN
 labels POLY
 labels POLYTXT text
 labels POLYPIN port

 # Copy (non-resistor) poly areas up for contact checks
 templayer xpolycheck polycheck
 copyup polycheck

 layer mrp1 POLY
 and POLYRES
 and-not RPM
 labels POLY

 layer xhrpoly POLY
 and POLYRES
 and RPM
 and PPLUS
 and NPC
 labels POLY

 layer ndc CONT
 and DIFF
 and NPLUS
 and-not NWELL
 and LI
 and-not THKOX

 layer nsc CONT
 and DIFF,TAP
 and NPLUS
 and NWELL
 and LI
 and-not THKOX

 layer pdc CONT
 and DIFF
 and PPLUS
 and NWELL
 and LI
 and-not THKOX

 layer pdc CONT
 and DIFF
 and PPLUS
 and pfetexpand
 and LI
 and-not THKOX

 layer psc CONT
 and DIFF,TAP
 and PPLUS
 and-not NWELL
 and-not pfetexpand
 and LI
 and-not THKOX

 layer pc CONT
 and POLY
 and-not DIFF
 and LI

 layer ndic CONT
 and DIFF
 and NPLUS
 and DIODE
 and-not POLY
 and-not PPLUS
 and-not THKOX
 and-not LVTN

 layer ndilvtc CONT
 and DIFF
 and NPLUS
 and DIODE
 and-not POLY
 and-not PPLUS
 and-not THKOX
 and LVTN

 layer pdic CONT
 and DIFF
 and PPLUS
 and DIODE
 and-not POLY
 and-not NPLUS
 and-not THKOX
 and-not LVTN
 and-not HVTP

 layer pdilvtc CONT
 and DIFF
 and PPLUS
 and DIODE
 and-not POLY
 and-not NPLUS
 and-not THKOX
 and LVTN
 and-not HVTP

 layer pdihvtc CONT
 and DIFF
 and PPLUS
 and DIODE
 and-not POLY
 and-not NPLUS
 and-not THKOX
 and-not LVTN
 and HVTP

 layer mvndc CONT
 and DIFF
 and NPLUS
 and-not NWELL
 and LI
 and THKOX

 layer mvnsc CONT
 and DIFF,TAP
 and NPLUS
 and NWELL
 and LI
 and THKOX

 layer mvpdc CONT
 and DIFF
 and PPLUS
 and NWELL
 and LI
 and THKOX

 layer mvpdc CONT
 and DIFF
 and PPLUS
 and mvpfetexpand
 and MET1
 and THKOX

 layer mvpsc CONT
 and DIFF,TAP
 and PPLUS
 and-not NWELL
 and-not mvpfetexpand
 and LI
 and THKOX

 layer mvndic CONT
 and DIFF
 and NPLUS
 and DIODE
 and-not POLY
 and-not PPLUS
 and THKOX

 layer mvpdic CONT
 and DIFF
 and PPLUS
 and DIODE
 and-not POLY
 and-not NPLUS
 and THKOX

 layer locali LI,LITXT,LIPIN
 labels LI
 labels LITXT text
 labels LIPIN port

 layer lic MCON
 labels MCON

 layer m1 MET1
 and resarea

 layer m1 MET1,MET1TXT,MET1PIN
 labels MET1
 labels MET1TXT text
 labels MET1PIN port

 layer mimcap MET3
 and CAPM
 labels CAPM

 layer mimcc VIA2
 and CAPM
 grow 150
 labels CAPM

 layer mimcap2 MET4
 and CAPM2
 labels CAPM2

 layer mim2cc VIA3
 and CAPM2
 grow 150
 labels CAPM2


 layer m2c VIA1
 grow 55
 grow 30
 shrink 30

 layer m2 MET2,MET2TXT,MET2PIN
 labels MET2
 labels MET2TXT text
 labels MET2PIN port

 layer m3c VIA2
 grow 40
 grow 60
 shrink 60

 layer m3 MET3,MET3TXT,MET3PIN
 labels MET3
 labels MET3TXT text
 labels MET3PIN port


 layer via3 VIA3
 grow 60
 grow 40
 shrink 40

 layer m4 MET4,MET4TXT,MET4PIN
 labels MET4
 labels MET4TXT text
 labels MET4PIN port

 layer m5 MET5,MET5TXT,MET5PIN
 labels MET5
 labels MET5TXT text
 labels MET5PIN port

 layer via4 VIA4
 grow 190
 grow 210
 shrink 210

 layer metrdl RDL,RDLTXT,RDLPIN
 labels RDL
 labels RDLTXT text
 labels RDLPIN port

 # Find diffusion not covered in
 # NPLUS or PPLUS and pull it into
 # the next layer up

 templayer gentrans DIFF
 and-not PPLUS
 and-not NPLUS
 and POLY
 copyup DIFF,POLY

 templayer gendiff DIFF,TAP
 and-not PPLUS
 and-not NPLUS
 and-not POLY
 copyup DIFF

 # Handle contacts found by copyup

 layer ndic CONT
 and MET1
 and DIODE
 and NPLUS
 and-not THKOX

 layer mvndic CONT
 and MET1
 and DIODE
 and NPLUS
 and THKOX

 layer pdic CONT
 and MET1
 and DIODE
 and PPLUS
 and-not THKOX

 layer mvpdic CONT
 and MET1
 and DIODE
 and PPLUS
 and THKOX

 layer ndc CONT
 and ndifcheck

 layer mvndc CONT
 and mvndifcheck

 layer pdc CONT
 and pdifcheck

 layer mvpdc CONT
 and mvpdifcheck

 layer pc CONT
 and polycheck

 layer nsc CONT
 and nsubcheck

 layer mvnsc CONT
 and mvnsubcheck

 layer psc CONT
 and psubcheck

 layer mvpsc CONT
 and mvpsubcheck

 # Find contacts not covered in
 # metal and pull them into the
 # next layer up
 
 templayer gencont CONT
 and LI
 and-not DIFF,TAP
 and-not POLY
 and-not DIODE
 and-not nsubcheck
 and-not psubcheck
 and-not mvnsubcheck
 and-not mvpsubcheck
 copyup CONT,MET1

 templayer barecont CONT
 and-not LI
 and-not nsubcheck
 and-not psubcheck
 and-not mvnsubcheck
 and-not mvpsubcheck
 copyup CONT

 layer glass GLASS,PADTXT,PADPIN
 labels GLASS
 labels PADTXT text
 labels PADPIN port

 templayer boundary BOUND
 boundary

 layer comment LVSTEXT
 labels LVSTEXT text

 layer comment TTEXT
 labels TTEXT text

 layer fillblock  FILLOBSM1,FILLOBSM2,FILLOBSM3,FILLOBSM4
 labels FILLOBSM1,FILLOBSM2,FILLOBSM3,FILLOBSM4

# MOS Varactor

 layer var POLY
 and DIFF
 and NPLUS
 and NWELL
 and-not THKOX
 grow 25
 labels POLY

 layer mvvar POLY
 and DIFF
 and NPLUS
 and NWELL
 and THKOX
 grow 25
 labels POLY

 calma NWELL 64 20
 calma DIFF 65 20
 calma DNWELL 64 18
 calma PWRES 64 13
 calma TAP  65 44
 # LVTN
 calma LVTN 125 44
 # HVTP
 calma HVTP 78 44
 # SONOS (TUNM)
 calma SONOS 80 20
 # NPLUS = NSDM
 calma NPLUS 93 44
 # PPLUS = PSDM
 calma PPLUS 94 20
 # HVI
 calma THKOX 75 20
 # NPC
 calma NPC 95 20
 # P+ POLY MASK
 calma RPM 86 20
 # Poly resistor ID mark
 calma POLYRES 66 13
 # Diffusion resistor ID mark
 calma DIFFRES 65 13
 calma POLY 66 20
 # Diode ID mark
 calma DIODE 81 23
 
 # LICON
 calma CONT 66 44
 calma LI   67 20
 calma MCON 67 44

 calma MET1 68 20
 calma VIA1 68 44
 calma MET2 69 20
 calma VIA2 69 44
 calma MET3 70 20
 calma VIA3 70 44
 calma MET4 71 20
 calma VIA4 71 44
 calma MET5 72 20
 calma RDL 74 20
 calma GLASS 76 20

 calma PADPIN  76 5
 calma DIFFPIN 65 6
 calma TAPPIN  65 5
 calma WELLPIN  64 5
 calma PWELLPIN 122 16
 calma LIPIN 67 5
 calma POLYPIN 66 5
 calma MET1PIN 68 5
 calma MET2PIN 69 5
 calma MET3PIN 70 5
 calma MET4PIN 71 5
 calma MET5PIN 72 5
 calma RDLPIN 74 5

 calma SUBTXT  64 59
 calma PADTXT 76 16
 calma DIFFTXT 65 16
 calma POLYTXT 66 16
 calma WELLTXT 64 16
 calma PWELLTXT 122 16
 calma LITXT 67 16
 calma MET1TXT 68 16
 calma MET2TXT 69 16
 calma MET3TXT 70 16
 calma MET4TXT 71 16
 calma MET5TXT 72 16
 calma RDLPIN 74 16

 calma BOUND 81 4

 calma LVSTEXT 83 44

 calma CAPM 89 44
 calma CAPM 97 44

 calma FILLOBSM1  62  24
 calma FILLOBSM2  105 52
 calma FILLOBSM3  107 24
 calma FILLOBSM4  112 4

end

#-----------------------------------------------------
# Digital flow maze router cost parameters
#-----------------------------------------------------

mzrouter
end

#-----------------------------------------------------
# Vendor DRC rules
#-----------------------------------------------------

drc

 style drc variants (fast),(full),(routing)

 scalefactor 10 

 cifstyle drc

 variants (fast),(full)

#-----------------------------
# DNWELL
#-----------------------------

 width dnwell 3000 "Deep N-well width < %d (Dnwell 2)"
 spacing dnwell dnwell 6300 touching_ok "Deep N-well spacing < %d (Dnwell 3)"
 spacing dnwell allnwell 4500 surround_ok \
	"Deep N-well spacing to N-well < %d (Nwell 7)"
 cifmaxwidth nwell_missing 1 bend_illegal \
	"N-well overlap of Deep N-well < 0.4um outside, 1.03um inside (Nwell 5a, 7)"
 cifmaxwidth dnwell_missing 1 bend_illegal \
	"SONOS nFET must be in Deep N-well (Tunm 6a)"

#-----------------------------
# NWELL
#-----------------------------

 width allnwell 840 "N-well width < %d (Nwell 1)"
 spacing allnwell allnwell 1270 touching_ok "N-well spacing < %d (Nwell 2a)"

#-----------------------------
# DIFF
#-----------------------------

 width *ndiff,nfet,*nsd,*ndiode,ndiffres,*pdiff,pfet,*psd,*pdiode,pdiffres 150 \
	"Diffusion width < %d (Diff/tap 1)"
 width *mvndiff,mvnfet,mvnnfet,*mvnsd,*mvndiode,*nndiode,mvndiffres,*mvpdiff,mvpfet,*mvpsd,*mvpdiode,mvpdiffres 150 \
	"Diffusion width < %d (Diff/tap 1)"
 spacing alldifflv,var,alldiffmv,mvvar alldifflv,var,alldiffmv,mvvar 270 touching_ok \
	"Diffusion spacing < %d (Diff/tap 3)"
 spacing *ndiff,*ndiode,nfet allnwell 340 touching_illegal \
  "N-Diffusion spacing to N-well < %d (Diff/tap 9)"
 spacing *mvndiff,*mvndiode,mvnfet,mvnnfet allnwell 340 touching_illegal \
  "N-Diffusion spacing to N-well < %d (Diff/tap 9)"
 spacing *psd allnwell 130 touching_illegal \
  "P-tap spacing to N-well < %d (Diff/tap 11)"
 spacing *mvpsd allnwell 130 touching_illegal \
  "P-tap spacing to N-well < %d (Diff/tap 11)"
 surround *nsd allnwell 180 absence_illegal "N-well overlap of N-tap < %d (Diff/tap 10)"
 surround *mvnsd,*nndiode allnwell 180 absence_illegal "N-well overlap of N-tap < %d (Diff/tap 10)"

 surround *pdiff,*pdiode,pfet allnwell 180 absence_illegal \
 "N-well overlap of P-Diffusion < %d (Diff/tap 8)"
 surround *mvpdiff,*mvpdiode,mvpfet allnwell 180 absence_illegal \
 "N-well overlap of P-Diffusion < %d (Diff/tap 8)"

 variants (full)
 cifmaxwidth ptap_missing 6000 bend_illegal \
	"N-diff distance to P-tap must be < %d (tap rule)"
 cifmaxwidth ntap_missing 6000 bend_illegal \
	"P-diff distance to N-tap must be < %d (tap rule)"
 cifmaxwidth mvntap_missing 6000 bend_illegal \
	"5.0V P-diff distance to 5.0V N-tap must be < %d (tap rule)"
 cifmaxwidth mvptap_missing 6000 bend_illegal \
	"5.0V P-diff distance to 5.0V N-tap must be < %d (tap rule)"
 variants *

#-----------------------------
# POLY
#-----------------------------

 width allpoly 150 "Poly width < %d (Poly 1a)"
 spacing allpoly allpoly 210 touching_ok "Poly spacing < %d (Poly 2)"
 spacing allpolynonfet alldifflvnonfet 75 corner_ok allfets \
    "Poly spacing to Diffusion < %d (Poly 4a)"
 overhang *ndiff,rndiff nfet 250 "N-Diffusion overhang of nmos < %d (Poly 7)"
 overhang *mvndiff,mvrndiff mvnfet,mvnnfet 250 "N-Diffusion overhang of nmos < %d (Poly 7)"
 overhang *pdiff,rpdiff pfet 250 "P-Diffusion overhang of pmos < %d (Poly 7)"
 overhang *mvpdiff,mvrpdiff mvpfet 250 "P-Diffusion overhang of pmos < %d (Poly 7)"
 overhang *poly allfets 130 "Poly overhang of transistor < %d (Poly 8)"

#--------------------------------------------------------------------
# NPC (Nitride Poly Cut)
#--------------------------------------------------------------------

# Layer NPC is defined automatically around poly contacts (grow 0.1um)

#--------------------------------------------------------------------
# CONT (LICON, contact between poly/diff and LI)
#--------------------------------------------------------------------

 width ndc/li 170 "N-diffusion contact width < %d (LIcon 1)"
 width nsc/li 170 "N-tap contact width     < %d (LIcon 1)"
 width pdc/li 170 "P-diffusion contact width < %d (LIcon 1)"
 width psc/li 170 "P-tap contact width     < %d (LIcon 1)"
 width ndic/li 170 "N-diode contact width < %d (LIcon 1)"
 width pdic/li 170 "P-diode contact width < %d (LIcon 1)"
 width pc/li  170 "Poly contact width        < %d (LIcon 1)"

 width mvndc/li 170 "N-diffusion contact width < %d (LIcon 1)"
 width mvnsc/li 170 "N-tap contact width     < %d (LIcon 1)"
 width mvpdc/li 170 "P-diffusion contact width < %d (LIcon 1)"
 width mvpsc/li 170 "P-tap contact width     < %d (LIcon 1)"
 width mvndic/li 170 "N-diode contact width < %d (LIcon 1)"
 width mvpdic/li 170 "P-diode contact width < %d (LIcon 1)"

 spacing allpdiffcont allndiffcont 170 touching_illegal "Diffusion contact spacing < %d (LIcon 2)"
 spacing allndiffcont allndiffcont 170 touching_ok      "Diffusion contact spacing < %d (LIcon 2)"
 spacing allpdiffcont allpdiffcont 170 touching_ok      "Diffusion contact spacing < %d (LIcon 2)"
 spacing pc pc 170 touching_ok "Poly1 contact spacing < %d (LIcon 2)"

 spacing pc alldiff 190 touching_illegal "Poly contact spacing to diffusion < %d (LIcon 14)"

 spacing ndc,pdc nfet,pfet 55 touching_illegal \
	"Diffusion contact to gate < %d (LIcon 11)"
 spacing mvndc,mvpdc mvnfet,mvnnfet,mvpfet 55 touching_illegal \
	"Diffusion contact to gate < %d (LIcon 11)"
 spacing ndc,mvndc rnd,mvrnd 60 touching_illegal "Diffusion contact to rndiff < %d ()"
 spacing pdc,mvpdc rdp,mvrdp 60 touching_illegal "Diffusion contact to rndiff < %d ()"


 surround ndc/a *ndiff 40 absence_illegal \
	"N-diffusion overlap of N-diffusion contact < %d (LIcon 5a)"
 surround pdc/a *pdiff 40 absence_illegal \
	"P-diffusion overlap of P-diffusion contact < %d (LIcon 5a)"
 surround ndic/a *ndi 40 absence_illegal \
	"N-diode overlap of N-diode contact < %d (LIcon 5a)"
 surround pdic/a *pdi 40 absence_illegal \
	"P-diode overlap of N-diode contact < %d (LIcon 5a)"

 surround ndc/a *ndiff,nfet 60 directional \
	"N-diffusion overlap of N-diffusion contact < %d in one direction (LIcon 5c)"
 surround pdc/a *pdiff,pfet 60 directional \
	"P-diffusion overlap of P-diffusion contact < %d in one direction (LIcon 5c)"
 surround ndic/a *ndi 60 directional \
	"N-diode overlap of N-diode contact < %d in one direction (LIcon 5c)"
 surround pdic/a *pdi 60 directional \
	"P-diode overlap of N-diode contact < %d in one direction (LIcon 5c)"

 surround nsc/a *nsd 120 directional \
	"N-tap overlap of N-tap contact < %d in one direction (LIcon 7)"
 surround psc/a *psd 120 directional \
	"P-tap overlap of P-tap contact < %d in one direction (LIcon 7)"

 surround mvndc/a *mvndiff 40 absence_illegal \
	"N-diffusion overlap of N-diffusion contact < %d (LIcon 5a)"
 surround mvpdc/a *mvpdiff 40 absence_illegal \
	"P-diffusion overlap of P-diffusion contact < %d (LIcon 5a)"
 surround mvndic/a *mvndi 40 absence_illegal \
	"N-diode overlap of N-diode contact < %d (LIcon 5a)"
 surround mvpdic/a *mvpdi 40 absence_illegal \
	"P-diode overlap of N-diode contact < %d (LIcon 5a)"

 surround mvndc/a *mvndiff,mvnfet 60 directional \
	"N-diffusion overlap of N-diffusion contact < %d in one direction (LIcon 5c)"
 surround mvpdc/a *mvpdiff,mvpfet 60 directional \
	"P-diffusion overlap of P-diffusion contact < %d in one direction (LIcon 5c)"
 surround mvndic/a *mvndi 60 directional \
	"N-diode overlap of N-diode contact < %d in one direction (LIcon 5c)"
 surround mvpdic/a *mvpdi 60 directional \
	"P-diode overlap of N-diode contact < %d in one direction (LIcon 5c)"

 surround mvnsc/a *mvnsd 120 directional \
	"N-tap overlap of N-tap contact < %d in one direction (LIcon 7)"
 surround mvpsc/a *mvpsd 120 directional \
	"P-tap overlap of P-tap contact < %d in one direction (LIcon 7)"

 surround pc/a *poly,mrp1,xhrpoly 80 absence_illegal \
	"Poly overlap of poly contact < %d (LIcon 8, 8a)"

 exact_overlap ndc/a,pdc/a,psc/a,nsc/a,pc/a,ndic/a,pdic/a
 exact_overlap mvndc/a,mvpdc/a,mvpsc/a,mvnsc/a,mvndic/a,mvpdic/a

#-------------------------------------------------------------
# LI - Local interconnect layer
#-------------------------------------------------------------

 width *li,rli 170 "Local interconnect width < %d (LI 1)"
 spacing allli allli,obsli 170 touching_ok  "Local interconnect spacing < %d (LI 3)"

 surround pc/li *li 80 directional \
	"Local interconnect overlap of poly contact < %d in one direction (LI 5)"

 surround ndc/li,nsc/li,pdc/li,psc/li,ndic/li,pdic/li,mvndc/li,mvnsc/li,mvpdc/li,mvpsc/li,mvndic/li,mvpdic/li \
	*li 80 directional \
	"Local interconnect overlap of diffusion contact < %d in one direction (LI 5)"

 area allli,obsli 56100 170 "Local interconnect minimum area < %a (LI 6)"

#-------------------------------------------------------------
# MCON - Contact between local interconnect and metal1
#-------------------------------------------------------------

 width lic/m1 170 "Mcon width < %d (Mcon 1)"
 spacing lic/m1 lic/m1 170 touching_ok "Mcon spacing < %d (Mcon 2)"

 exact_overlap lic/m1

#-------------------------------------------------------------
# METAL1 -
#-------------------------------------------------------------

 width *m1,rm1 140 "Metal1 width < %d (Met1 1)"
 spacing allm1 allm1,obsm1 140 touching_ok "Metal1 spacing < %d (Met1 2)"
 area allm1,obsm1 83000 140 "Metal1 minimum area < %a (Met1 6)"

 surround lic/m1 *met1 30 absence_illegal \
	"Metal1 overlap of local interconnect contact < %d (Met1 4)"
 surround lic/m1 *met1 60 directional \
	"Metal1 overlap of local interconnect contact < %d in one direction (Met1 5)"

variants (fast),(full)
 widespacing allm1 3000 allm1,obsm1 280 touching_ok \
	"Metal1 > 3um spacing to unrelated m1 < %d (Met1 3a)"
variants *

#--------------------------------------------------
# VIA1
#--------------------------------------------------

 width v1/m1 260 "Via1 width < %d (Via 1a + 2 * Via 4a)"
 spacing v1 v1 60 touching_ok "Via1 spacing < %d (Via 2 - 2 * Via 4a)"
 surround v1/m1 *m1 30 directional \
	"Metal1 overlap of Via1 < %d in one direction (Via 5a - Via 4a)"
 surround v1/m2 *m2 30 directional \
	"Metal2 overlap of Via1 < %d in one direction (Met2 5 - Met2 4)"

 exact_overlap v1/m2

#--------------------------------------------------
# METAL2 - 
#--------------------------------------------------

 width allm2 140 "Metal2 width < %d (Met2 1)"
 spacing allm2  allm2,obsm2 140 touching_ok       "Metal2 spacing < %d (Met2 2)"
 area allm2,obsm2 67600 140 "Metal2 minimum area < %a (Met2 6)"

variants (fast),(full)
 widespacing allm2 3000 allm2,obsm2  280 touching_ok \
	"Metal2 > 3um spacing to unrelated m2 < %d (Met2 3)"
variants *

#--------------------------------------------------
# VIA2
#--------------------------------------------------

 width v2/m2 280 "Via2 width < %d (Via2 1a + 2 * Via2 4)"

 spacing v2 v2 120 touching_ok "Via2 spacing < 0.24um (Via2 2 - 2 * Via2 4)"

 surround v2/m2 *m2 45 directional \
	"Metal2 overlap of Via2 < %d in one direction (Via2 4a - Via2 4)"
 surround v2/m3 *m3 25 absence_illegal "Metal3 overlap of Via2 < %d (Met3 4)"

 exact_overlap v2/m2

#--------------------------------------------------
# METAL3 - 
#--------------------------------------------------

 width allm3 300 "Metal3 width < %d (Met3 1)"
 spacing allm3 allm3,obsm3  300 touching_ok "Metal3 spacing < %d (Met3 2)"
 area allm3,obsm3 240000 300 "Metal3 minimum area < %a (Met3 6)"

variants (fast),(full)
 widespacing allm3 3000 allm3,obsm3  400 touching_ok \
	"Metal3 > 3um spacing to unrelated m3 < %d (Met3 3d)"
variants *


#--------------------------------------------------
# VIA3 - Requires 1 Module
#--------------------------------------------------

 width v3/m3 320 "Via3 width < %d (Via3 1 + 2 * Via3 4)"
 spacing v3 v3 80 touching_ok "Via3 spacing < %d (Via3 2 - 2 * Via3 4)"
 surround v3/m3 *m3 30 directional \
	"Metal3 overlap of Via3 in one direction < %d (Via3 5 - Via3 4)"
 surround v3/m4 *m4 5 directional \
	"Metal4 overlap of Via3 in one direction < %d (Met4 3 - Via3 4)"

 exact_overlap v3/m3

#-----------------------------
# METAL4 - METAL4 Module
#-----------------------------

variants *

 width allm4 300 "Metal4 width < %d (Met4 1)"
 spacing allm4  allm4,obsm4 300 touching_ok      "Metal4 spacing < %d (Met4 2)"
 area allm4,obsm4 240000 300 "Metal4 minimum area < %a (Met4 4a)"

variants (fast),(full)
 widespacing allm4 3000 allm4,obsm4  400 touching_ok \
	"Metal4 > 3um spacing to unrelated m4 < %d (S2M4)"
variants *

#--------------------------------------------------
# VIA4 - Requires 1 Module
#--------------------------------------------------

 width v4/m4 1180 "Via4 width < %d (Via4 1 + 2 * Via4 4)"
 spacing v4 v4 420 touching_ok "Via4 spacing < %d (Via4 2 - 2 * Via4 4)"
 surround v4/m5 *m5 120 absence_illegal \
	"Metal5 overlap of Via4 < %d (Met5 3 - Via4 4)"

 exact_overlap v4/m4

#-----------------------------
# 1 - 1 Module
#-----------------------------

 width allm5 1600 "Metal5 width < %d (Met5 1)"
 spacing allm5  allm5,obsm5 1600 touching_ok "Metal5 spacing < %d (Met5 2)"
 area allm5,obsm5 4000000 1600 "Metal5 minimum area < %a (Met5 4)"


variants (full)

 width metrdl 10000 "RDL width < %d (Rdl 1)"
 spacing metrdl metrdl 10000 touching_ok "RDL spacing < %d (Rdl 2)"
 surround glass metrdl 10750 absence_ok "RDL must surround glass cut by %d (Rdl 3)"
 spacing metrdl padl 19660 surround_ok "RDL spacing to unrelated pad < %d (Rdl 6)"

variants *


#--------------------------------------------------
# NMOS, PMOS
#--------------------------------------------------

 extend allfets *poly 420 "Transistor width < %d (Diff/tap 2)"
 # Except:  Note that standard cells allow transistor width minimum 0.36um

 spacing *nsd,*mvnsd pfet,mvpfet 300 touching_illegal \
	"N-tap spacing to PMOS gate < %d (Poly 6)"
 spacing *psd,*mvpsd nfet,mvnfet 300 touching_illegal \
	"P-tap spacing to NMOS gate < %d (Poly 6)"

#--------------------------------------------------
# mrp1 (N+ poly resistor)
#--------------------------------------------------

  width mrp1 330 "mrp1 resistor width < %d (Poly 3)"
  # spacing mrp1 pc 120 touching_illegal "mrp1 spacing to Cont < 0.12um ()"

#--------------------------------------------------
# xhrpoly (P+ poly resistor)
#--------------------------------------------------

  width xhrpoly 350 "xhrpoly resistor width < %d (P+ Poly 1a)"
  # NOTE: xhrpoly resistor requires choice of discrete widths 0.35, 0.69, ... up to 1.27.
  # spacing xhrpoly pc 120 touching_illegal "xhrpoly spacing to Cont < 0.12um ()"

#------------------------------------
# MOS Varactor device rules
#------------------------------------
#

 overhang nsd var 250 \
 "N-Tap overhang of Varactor < %d (Var 4)"

 overhang mvnsd mvvar 250 \
 "N-Tap overhang of Varactor < %d (Var 4)"

 width var,mvvar 180 "Varactor length < %d (Var 1)"
 extend var,mvvar *poly 1000 "Transistor width < %d (Var 2)"

#-----------------------------------------------------------
# 1CAP - (work in progress)
#-----------------------------------------------------------

 width *mimcap 2000 "MiM cap width < 5.00um ()"
 maxwidth *mimcap 30000 bend_ok "MiM cap width > 30.0um ()"
 spacing *mimcap *mimcap 1500 touching_ok "MiM cap spacing < 1.50um ()"
 spacing *mimcap via2/m3  850 touching_illegal \
 "MiM cap spacing to via2 < 0.85um ()"
 width mimcapc/m2 660 "MiM Contact width < 0.66um ()"
 surround *mimcc *mimcap 150 absence_illegal \
 "MiM cap must surround MiM cap contact by 0.15um ()"
 spacing pad *mimcap 50 touching_illegal "MiM cap cannot overlap pad ()"

 surround *mimcap *metal2/m2 500 absence_illegal \
 "Metal3 must surround MiM cap by 0.5um ()"
 spacing via2 *mimcap 50 touching_illegal "MiM cap cannot overlap via2 ()"
 surround *mimcap *metal3/m3 500 absence_illegal \
 "Metal4 must surround MiM cap by 0.5um ()"
 spacing via3 *mimcap 50 touching_illegal "MiM cap cannot overlap via3 ()"

 width *mimcap2 2000 "MiM cap width < 5.00um ()"
 maxwidth *mimcap2 30000 bend_ok "MiM cap width > 30.0um ()"
 spacing *mimcap2 *mimcap2 1500 touching_ok "MiM cap spacing < 1.50um ()"
 spacing *mimcap2 via3/m4  850 touching_illegal \
 "MiM cap spacing to via3 < 0.85um ()"
 width mimcap2c/m3 660 "MiM Contact width < 0.66um ()"
 surround *mim2cc *mimcap2 150 absence_illegal \
 "MiM cap must surround MiM cap contact by 0.15um ()"
 spacing pad *mimcap2 50 touching_illegal "MiM cap cannot overlap pad ()"

 surround *mimcap2 *metal3/m3 500 absence_illegal \
 "Metal3 must surround MiM cap by 0.5um ()"
 spacing via3 *mimcap2 50 touching_illegal "MiM cap cannot overlap via3 ()"
 surround *mimcap2 *metal4/m4 500 absence_illegal \
 "Metal4 must surround MiM cap by 0.5um ()"
 spacing via4 *mimcap2 50 touching_illegal "MiM cap cannot overlap via4 ()"

#----------------------------
# End DRC style
#----------------------------

end

#----------------------------
# LEF format definitions
#----------------------------

lef

 routing li	LI1 li1 LI li

 routing m1	MET1 m1 met1
 routing m2	MET2 m2 met2
 routing m3	MET3 m3 met3
 routing m4	MET4 m4 met4
 routing m5	MET5 m5 met5

 cut lic  MCON Mcon mcon
 cut m2c  VIA1 via1 cont2 via12
 cut m3c  VIA2 via2 cont3 via23
 cut via3 VIA3 via3 cont4 via34
 cut via4 VIA4 via4 cont5 via45

 obs obsli   LI1
 obs obsm1   MET1
 obs obsm2   MET2
 obs obsm3   MET3

 obs obsm4   MET4
 obs obsm5   MET5

 # Map contact obstructions to the base metal layer
 obs obsli MCON
 obs obsm1 VIA1

end

#-----------------------------------------------------
# Device and Parasitic extraction
#-----------------------------------------------------


extract
 style ngspice variants (sim),(lvs)
 cscale 1
 lambda  1.0
 units	microns
 step   100
 sidehalo 8

 planeorder dwell 	0
 planeorder well 	1
 planeorder active 	2
 planeorder locali 	3
 planeorder metal1 	4
 planeorder metal2 	5
 planeorder metal3 	6
 planeorder metal4 	7
 planeorder metal5 	8
 planeorder metali	9
 planeorder block      10
 planeorder comment    11

 substrate *ppdiff,*mvppdiff,space/w,pwell well -dnwell

# Layer resistance: Use document xp018-PDS-v4_2_1.pdf

# Resistances are in milliohms per square
# Optional 3rd argument is the corner adjustment fraction
 resist (nwell)/well            975000
 resist (rpw)/well              975000 0.5
 resist (pwell)/well            975000
 resist (*ndiff,nsd)/active 	  7500
 resist (*pdiff,*psd)/active	  7100
 resist (*mvndiff,mvnsd)/active   7500
 resist (*mvpdiff,*mvpsd)/active  7100
 resist ndiffres/active 	120000 0.5
 resist pdiffres/active 	197000 0.5
 resist mvndiffres/active 	120000 0.5
 resist mvpdiffres/active 	197000 0.5
 resist mrp1/active		 48200 0.5
# NOTE:  Have not found P+ poly resistance in documentation
 resist xhrpoly/active	         55000 0.5

 resist (allpolynonres)/active   48200

 resist (allli)/locali		 12800
 resist (allm1)/metal1		   125
 resist (allm2)/metal2		   125
 resist (allm3)/metal3	            47
 resist (allm4)/metal4  	    47
 resist (allm5)/metal5  	    29

 contact ndc,nsc		 15000
 contact pdc,psc		 15000
 contact mvndc,mvnsc		 15000
 contact mvpdc,mvpsc	  	 15000
 contact pc			 15000
 contact lic			152000
 contact m2c			  4500
 contact m3c			  3410
 contact mimcc			  4500
 contact mim2cc			  3410
 contact via3			  3410
 contact via4			   380

#-------------------------------------------------------------------------
# Parasitic capacitance values:  Use document (...)
#-------------------------------------------------------------------------
# This uses the new "default" definitions that determine the intervening
# planes from the planeorder stack, take care of the reflexive sideoverlap
# definitions, and generally clean up the section and make it more readable.
#
# Also uses "units microns" statement, so all parasitic capacitance values
# are taken directly from the source document PDS_035_03, in units of
# aF/um^2 for area caps and aF/um for perimeter and sidewall caps.
#-------------------------------------------------------------------------
# Remember that device capacitances to substrate are taken care of by the
# models.  Thus, active and poly definitions ignore all "fet" types.
# fet types are excluded when computing parasitic capacitance to
# active from layers above them because poly is a shield; fet types are
# included for parasitics from layers above to poly.  Resistor types
# should be removed from all parasitic capacitance calculations, or else
# they just create floating caps.  Technically, the capacitance probably
# should be split between the two terminals.  Unsure of the correct model.
#-------------------------------------------------------------------------

variant (sim)

#n-well
# NOTE:  This value not found in PEX files
defaultareacap     nwell well 120

#n-active 
# Rely on device models to capture *ndiff area cap
# Do not extract parasitics from resistors
# defaultareacap     allnactivenonfet active 790
# defaultperimeter   allnactivenonfet active 280

#p-active
# Rely on device models to capture *pdiff area cap
# Do not extract parasitics from resistors
# defaultareacap     allpactivenonfet active 810
# defaultperimeter   allpactivenonfet active 300

#poly
# Do not extract parasitics from resistors
# defaultsidewall    allpolynonfet active  22
# defaultareacap     allpolynonfet active  105
# defaultperimeter   allpolynonfet active   57

 defaultsidewall    *poly active  63
 defaultareacap     *poly active nwell,obswell,pwell well  63
 defaultperimeter   *poly active nwell,obswell,pwell well  16

#locali
 defaultsidewall    allm1 metal1       113
 defaultareacap     allm1 metal1 nwell,obswell,pwell well  37
 defaultperimeter   allm1 metal1 nwell,obswell,pwell well  8
 defaultoverlap     allm1 metal1 nwell well 37

#locali->diff
 defaultoverlap     allm1 metal1 allactivenonfet active 36
 defaultsideoverlap allm1 metal1 allactivenonfet active 9

#locali->poly
 defaultoverlap     allm1 metal1 allpolynonres active 46
 defaultsideoverlap allm1 metal1 allpolynonres active 10

#metal1
 defaultsidewall    allm1 metal1       113
 defaultareacap     allm1 metal1 nwell,obswell,pwell well  17
 defaultperimeter   allm1 metal1 nwell,obswell,pwell well  8
 defaultoverlap     allm1 metal1 nwell well 26

#metal1->locali
 defaultoverlap     allm1 metal1 allactivenonfet active 36
 defaultsideoverlap allm1 metal1 allactivenonfet active 9

#metal1->diff
 defaultoverlap     allm1 metal1 allactivenonfet active 36
 defaultsideoverlap allm1 metal1 allactivenonfet active 9

#metal1->poly
 defaultoverlap     allm1 metal1 allpolynonres active 46
 defaultsideoverlap allm1 metal1 allpolynonres active 10

#metal2
 defaultsidewall    allm2 metal2      101
 defaultareacap     allm2 metal2 nwell,obswell,pwell well 12
 defaultperimeter   allm2 metal2 nwell,obswell,pwell well 6
 defaultoverlap     allm2 metal2 nwell well 13

#metal2->diff
 defaultoverlap     allm2 metal2 allactivenonfet active 14
 defaultsideoverlap allm2 metal2 allactivenonfet active 7

#metal2->poly
 defaultoverlap     allm2 metal2 allpolynonres active 16
 defaultsideoverlap allm2 metal2 allpolynonres active 7

#metal2->metal1
 defaultoverlap     allm2 metal2 allm1 metal1 39
 defaultsideoverlap allm2 metal2 allm1 metal1 10

#metal3
 defaultsidewall    allm3 metal3     102
 defaultoverlap     allm3 metal3 nwell well 8
 defaultareacap     allm3 metal3 nwell,obswell,pwell well 8
 defaultperimeter   allm3 metal3 nwell,obswell,pwell well 5

#metal3->diff
 defaultoverlap     allm3 metal3 allactive active 9
 defaultsideoverlap allm3 metal3 allactive active 6

#metal3->poly
 defaultoverlap     allm3 metal3 allpolynonres active 10
 defaultsideoverlap allm3 metal3 allpolynonres active 6

#metal3->metal1
 defaultoverlap     allm3 metal3 allm1 metal1 15
 defaultsideoverlap allm3 metal3 allm1 metal1 7

#metal3->metal2
 defaultoverlap     allm3 metal3 allm2 metal2 39
 defaultsideoverlap allm3 metal3 allm2 metal2 10

#metal4
 defaultsidewall    allm4 metal4       102
# defaultareacap     alltopm metal4 well  6
 areacap     	    allm4/m4 8
 defaultoverlap     allm4 metal4 nwell well 8
 defaultperimeter   allm4 metal4 well  5

#metal4->diff
 defaultoverlap     allm4 metal4 allactivenonfet active 7
 defaultsideoverlap allm4 metal4 allactivenonfet active 7

#metal4->poly
 defaultoverlap     allm4 metal4 allpolynonres active 7
 defaultsideoverlap allm4 metal4 allpolynonres active 5

#metal4->metal1
 defaultoverlap     allm4 metal4 allm1 metal1 9
 defaultsideoverlap allm4 metal4 allm1 metal1 6

#metal4->metal2
 defaultoverlap     allm4 metal4 allm2 metal2 15
 defaultsideoverlap allm4 metal4 allm2 metal2 7

#metal4->metal3
 defaultoverlap     allm4 metal4 allm3 metal3 39
 defaultsideoverlap allm4 metal4 allm3 metal3 10

#metal5
 defaultsidewall    allm5 metal5       103
# defaultareacap     allm5 metal5 well  6
 areacap     	    allm5/m5 6
 defaultoverlap     allm5 metal5 nwell well 6
 defaultperimeter   allm5 metal5 well  5

#metal5->diff
 defaultoverlap     allm5 metal5 allactivenonfet active 5
 defaultsideoverlap allm5 metal5 allactivenonfet active 5

#metal5->poly
 defaultoverlap     allm5 metal5 allpolynonres active 5
 defaultsideoverlap allm5 metal5 allpolynonres active 5

#metal5->metal1
 defaultoverlap     allm5 metal5 allm1 metal1 7
 defaultsideoverlap allm5 metal5 allm1 metal1 5

#metal5->metal2
 defaultoverlap     allm5 metal5 allm2 metal2 9
 defaultsideoverlap allm5 metal5 allm2 metal2 6

#metal5->metal3
 defaultoverlap     allm5 metal5 allm3 metal3 15
 defaultsideoverlap allm5 metal5 allm3 metal3 7

#metal5->metal4
 defaultoverlap     allm5 metal5 allm4 metal4 39
 defaultsideoverlap allm5 metal5 allm4 metal4 10

# Devices:  Use document (...)

 device msubcircuit pshort pfet *pdiff,pdiffres *pdiff,pdiffres nwell error l=l w=w
 device msubcircuit plowvt pfetlvt *pdiff,pdiffres *pdiff,pdiffres nwell error l=l w=w
 device msubcircuit phighvt pfethvt *pdiff,pdiffres *pdiff,pdiffres nwell error l=l w=w

 device msubcircuit nshort nfet *ndiff,ndiffres *ndiff,ndiffres pwell,space/w error l=l w=w
 device msubcircuit nlowvt nfetlvt *ndiff,ndiffres *ndiff,ndiffres pwell,space/w error l=l w=w
 device msubcircuit sonos_p nsonos *ndiff,ndiffres *ndiff,ndiffres pwell,space/w error l=l w=w
 device subcircuit xcnwvc varactor *nndiff nwell error l=l w=w
 device subcircuit xcnwvc2 varhvt *nndiff nwell error l=l w=w

 device msubcircuit phv mvpfet *mvpdiff,mvpdiffres *mvpdiff,mvpdiffres nwell error l=l w=w
 device msubcircuit nhv mvnfet *mvndiff,mvndiffres *mvndiff,mvndiffres pwell,space/w error l=l w=w
 device msubcircuit nhv_native mvnnfet *mvndiff,mvndiffres *mvndiff,mvndiffres pwell,space/w error l=l w=w
 device subcircuit xchvnwc mvvaractor *mvnndiff nwell error l=l w=w

 device rsubcircuit mrl1 rli1    *li     pwell,space/w,nwell error l=l w=w
 device rsubcircuit mrm1 rmetal1 *metal1 space/w,pwell,nwell error l=l w=w
 device rsubcircuit mrm2 rmetal2 *metal2 space/w,pwell,nwell error l=l w=w
 device rsubcircuit mrm3 rmetal3 *metal3 space/w,pwell,nwell error l=l w=w
 device rsubcircuit mrm4 rm4 *m4 space/w,pwell,nwell error l=l w=w
 device rsubcircuit mrm5 rm5 *m5 space/w,pwell,nwell error l=l w=w

 device rsubcircuit xhrpoly  xhrpoly *poly pwell,space/w error 	l=l w=w
 device rsubcircuit mrp1     mrp1    *poly pwell,space/w error 	l=l w=w

 device rsubcircuit mrdn     ndiffres *ndiff pwell,space/w  error l=l w=w
 device rsubcircuit mrdp     pdiffres *pdiff nwell    error l=l w=w
 device rsubcircuit xpwres   rpw      *psd   dnwell   error l=l w=w

 device rsubcircuit mrdn_hv  mvndiffres *mvndiff pwell,space/w error l=l w=w
 device rsubcircuit mrdp_hv  mvpdiffres *mvpdiff nwell   error l=l w=w

 device subcircuit  pdiode *pdiode nwell a=area
 device msubcircuit ndiode *ndiode pwell,space/w a=area
 device msubcircuit ndiode_lvt *ndiodelvt pwell,space/w a=area
 device msubcircuit ndiode_native *nndiode nwell a=area
 device subcircuit  pdiode_lvt *pdiodelvt nwell a=area
 device subcircuit  pdiode_hvt *pdiodehvt nwell a=area

 device subcircuit  pdiode_h *mvpdiode nwell a=area
 device msubcircuit ndiode_h *mvndiode pwell,space/w a=area

 device subcircuit xcmim1 *mimcap  *m3   space/w,pwell,nwell error a=a p=p
 device subcircuit xcmim2 *mimcap2 *m4   space/w,pwell,nwell error a=a p=p

 variant (lvs)

 device mosfet pshort pfet pdiff,pdiffres,pdc nwell 
 device mosfet plowvt pfetlvt pdiff,pdiffres,pdc nwell 
 device mosfet phighvt pfethvt pdiff,pdiffres,pdc nwell 
 device mosfet nshort nfet ndiff,ndiffres,ndc pwell,space/w
 device mosfet nlowvt nfetlvt ndiff,ndiffres,ndc pwell,space/w
 device mosfet sonos_p nsonos ndiff,ndiffres,ndc pwell,space/w
 device mosfet xcnwvc varactor *nndiff nwell
 device mosfet phv mvpfet mvpdiff,mvpdiffres,mvpdc nwell 
 device mosfet hnv mvnfet mvndiff,mvndiffres,mvndc pwell,space/w
 device mosfet xchvnwc mvvaractor *mvnndiff nwell

 device resistor mli1 rli1    *li
 device resistor mrm1 rmetal1 *metal1
 device resistor mrm2 rmetal2 *metal2
 device resistor mrm3 rmetal3 *metal3
 device resistor mrm4 rm4 *m4
 device resistor mrm5 rm5 *m5

 device resistor xhrpoly xhrpoly *poly 
 device resistor mrp1 mrp1       *poly 
 device resistor mrdn  ndiffres *ndiff 
 device resistor mrdp  pdiffres *pdiff 
 device resistor mrdn_hv   mvndiffres *mvndiff 
 device resistor mrdp_hv   mvpdiffres *mvpdiff 
 device resistor xpwres   rpw       *psd

 device pdiode pdiode *pdiode nwell a=area
 device ndiode ndiode *ndiode pwell,space/w a=area
 device ndiode ndiode_native *nndiode nwell a=area
 device pdiode pdiode_h *mvpdiode nwell a=area
 device ndiode ndiode_h *mvndiode pwell,space/w a=area

 device subcircuit xcmim1 *mimcap  *m3   space/w,pwell,nwell error a=a p=p
 device subcircuit xcmim2 *mimcap2 *m4   space/w,pwell,nwell error a=a p=p

end

#-----------------------------------------------------
# Wiring tool definitions
#-----------------------------------------------------

wiring

 contact v1 16 m1 1 m2 0 
 contact v2 16 m2 1 m3 0 
 contact v3 18 m3 0 m4 4 
 contact v4 18 m4 0 m5 4 

 contact lic 14 li 0 m1 0

end

#-----------------------------------------------------
# Plain old router. . . 
#-----------------------------------------------------

router
end

#------------------------------------------------------------
# Plowing (restored in magic 8.2, need to fill this section)
#------------------------------------------------------------

plowing
end

#-----------------------------------------------------------------
# No special plot layers defined (use default PNM color choices)
#-----------------------------------------------------------------

plot
  style pnm
     default
     draw fillblock no_color_at_all
     draw nwell cwell
end