Blame - sky130/openlane/rules.openrcx.sky130A.max.spef_extractor - third_party/opencircuitdesign.com/open_pdks

blob: f9b1fb74746261e35dbab4eb5ece5f4aa8684f1f [file] [log] [blame]

Donn	d74222c	2022-04-14 13:18:24 +0000	[diff] [blame]	1	Extraction Rules for OpenRCX
				2
				3	DIAGMODEL ON
				4
				5	LayerCount 6
				6	DensityRate 1 0
				7
				8	DensityModel 0
				9
				10	Metal 1 RESOVER
				11	WIDTH Table 1 entries: 0.17
				12
				13	Metal 1 RESOVER 0
				14	DIST count 55 width 0.17
				15	0 0 0 0.1
				16	0 0.29 0 0.1
				17	0 0.46 0 0.1
				18	0 0.665 0 0.1
				19	0 0.75 0 0.1
				20	0 0.92 0 0.1
				21	0 1.125 0 0.1
				22	0 1.21 0 0.1
				23	0 1.38 0 0.1
				24	0 1.84 0 0.1
				25	0.29 0.29 0 0.1
				26	0.29 0.46 0 0.1
				27	0.29 0.665 0 0.1
				28	0.29 0.75 0 0.1
				29	0.29 0.92 0 0.1
				30	0.29 1.125 0 0.1
				31	0.29 1.21 0 0.1
				32	0.29 1.38 0 0.1
				33	0.29 1.84 0 0.1
				34	0.46 0.46 0 0.1
				35	0.46 0.665 0 0.1
				36	0.46 0.75 0 0.1
				37	0.46 0.92 0 0.1
				38	0.46 1.125 0 0.1
				39	0.46 1.21 0 0.1
				40	0.46 1.38 0 0.1
				41	0.46 1.84 0 0.1
				42	0.665 0.665 0 0.1
				43	0.665 0.75 0 0.1
				44	0.665 0.92 0 0.1
				45	0.665 1.125 0 0.1
				46	0.665 1.21 0 0.1
				47	0.665 1.38 0 0.1
				48	0.665 1.84 0 0.1
				49	0.75 0.75 0 0.1
				50	0.75 0.92 0 0.1
				51	0.75 1.125 0 0.1
				52	0.75 1.21 0 0.1
				53	0.75 1.38 0 0.1
				54	0.75 1.84 0 0.1
				55	0.92 0.92 0 0.1
				56	0.92 1.125 0 0.1
				57	0.92 1.21 0 0.1
				58	0.92 1.38 0 0.1
				59	0.92 1.84 0 0.1
				60	1.125 1.125 0 0.1
				61	1.125 1.21 0 0.1
				62	1.125 1.38 0 0.1
				63	1.125 1.84 0 0.1
				64	1.21 1.21 0 0.1
				65	1.21 1.38 0 0.1
				66	1.21 1.84 0 0.1
				67	1.38 1.38 0 0.1
				68	1.38 1.84 0 0.1
				69	1.84 0 1.84 0.1
				70	END DIST
				71
				72	Metal 1 OVER
				73	WIDTH Table 1 entries: 0.17
				74
				75	Metal 1 OVER 0
				76	DIST count 12 width 0.17
				77	0.17 0 4.42519e-05 0.05
				78	0.34 0 4.42519e-05 0.05
				79	0.425 0 4.42519e-05 0.05
				80	0.51 0 4.42519e-05 0.05
				81	0.595 0 4.42519e-05 0.05
				82	0.68 0 4.42519e-05 0.05
				83	0.765 0 4.42519e-05 0.05
				84	0.85 0 4.42519e-05 0.05
				85	1.02 0 4.42519e-05 0.05
				86	1.36 0 4.42519e-05 0.05
				87	1.7 0 4.42519e-05 0.05
				88	2.04 0 4.42519e-05 0.05
				89	END DIST
				90
				91	Metal 1 UNDER
				92	WIDTH Table 1 entries: 0.17
				93
				94	Metal 1 UNDER 2
				95	DIST count 12 width 0.17
				96	0.17 0 4.42519e-05 0.05
				97	0.34 0 4.42519e-05 0.05
				98	0.425 0 4.42519e-05 0.05
				99	0.51 0 4.42519e-05 0.05
				100	0.595 0 4.42519e-05 0.05
				101	0.68 0 4.42519e-05 0.05
				102	0.765 0 4.42519e-05 0.05
				103	0.85 0 4.42519e-05 0.05
				104	1.02 0 4.42519e-05 0.05
				105	1.36 0 4.42519e-05 0.05
				106	1.7 0 4.42519e-05 0.05
				107	2.04 0 4.42519e-05 0.05
				108	END DIST
				109
				110	Metal 1 UNDER 3
				111	DIST count 12 width 0.17
				112	0.17 0 4.42519e-05 0.05
				113	0.34 0 4.42519e-05 0.05
				114	0.425 0 4.42519e-05 0.05
				115	0.51 0 4.42519e-05 0.05
				116	0.595 0 4.42519e-05 0.05
				117	0.68 0 4.42519e-05 0.05
				118	0.765 0 4.42519e-05 0.05
				119	0.85 0 4.42519e-05 0.05
				120	1.02 0 4.42519e-05 0.05
				121	1.36 0 4.42519e-05 0.05
				122	1.7 0 4.42519e-05 0.05
				123	2.04 0 4.42519e-05 0.05
				124	END DIST
				125
				126	Metal 1 UNDER 4
				127	DIST count 12 width 0.17
				128	0.17 0 4.42519e-05 0.05
				129	0.34 0 4.42519e-05 0.05
				130	0.425 0 4.42519e-05 0.05
				131	0.51 0 4.42519e-05 0.05
				132	0.595 0 4.42519e-05 0.05
				133	0.68 0 4.42519e-05 0.05
				134	0.765 0 4.42519e-05 0.05
				135	0.85 0 4.42519e-05 0.05
				136	1.02 0 4.42519e-05 0.05
				137	1.36 0 4.42519e-05 0.05
				138	1.7 0 4.42519e-05 0.05
				139	2.04 0 4.42519e-05 0.05
				140	END DIST
				141
				142	Metal 1 UNDER 5
				143	DIST count 12 width 0.17
				144	0.17 0 4.42519e-05 0.05
				145	0.34 0 4.42519e-05 0.05
				146	0.425 0 4.42519e-05 0.05
				147	0.51 0 4.42519e-05 0.05
				148	0.595 0 4.42519e-05 0.05
				149	0.68 0 4.42519e-05 0.05
				150	0.765 0 4.42519e-05 0.05
				151	0.85 0 4.42519e-05 0.05
				152	1.02 0 4.42519e-05 0.05
				153	1.36 0 4.42519e-05 0.05
				154	1.7 0 4.42519e-05 0.05
				155	2.04 0 4.42519e-05 0.05
				156	END DIST
				157
				158	Metal 1 UNDER 6
				159	DIST count 12 width 0.17
				160	0.17 0 4.42519e-05 0.05
				161	0.34 0 4.42519e-05 0.05
				162	0.425 0 4.42519e-05 0.05
				163	0.51 0 4.42519e-05 0.05
				164	0.595 0 4.42519e-05 0.05
				165	0.68 0 4.42519e-05 0.05
				166	0.765 0 4.42519e-05 0.05
				167	0.85 0 4.42519e-05 0.05
				168	1.02 0 4.42519e-05 0.05
				169	1.36 0 4.42519e-05 0.05
				170	1.7 0 4.42519e-05 0.05
				171	2.04 0 4.42519e-05 0.05
				172	END DIST
				173
				174	Metal 1 DIAGUNDER
				175	WIDTH Table 1 entries: 0.17
				176
				177	Metal 1 DIAGUNDER 2
				178	DIST count 13 width 0.17
				179	0 0 0 0.05
				180	0.17 0 0 0.05
				181	0.34 0 0 0.05
				182	0.425 0 0 0.05
				183	0.51 0 0 0.05
				184	0.595 0 0 0.05
				185	0.68 0 0 0.05
				186	0.765 0 0 0.05
				187	0.85 0 0 0.05
				188	1.02 0 0 0.05
				189	1.36 0 0 0.05
				190	1.7 0 0 0.05
				191	2.04 0 0 0.05
				192	END DIST
				193
				194	Metal 1 DIAGUNDER 3
				195	DIST count 13 width 0.17
				196	0 0 0 0.05
				197	0.17 0 0 0.05
				198	0.34 0 0 0.05
				199	0.425 0 0 0.05
				200	0.51 0 0 0.05
				201	0.595 0 0 0.05
				202	0.68 0 0 0.05
				203	0.765 0 0 0.05
				204	0.85 0 0 0.05
				205	1.02 0 0 0.05
				206	1.36 0 0 0.05
				207	1.7 0 0 0.05
				208	2.04 0 0 0.05
				209	END DIST
				210
				211	Metal 1 DIAGUNDER 4
				212	DIST count 13 width 0.17
				213	0 0 0 0.05
				214	0.17 0 0 0.05
				215	0.34 0 0 0.05
				216	0.425 0 0 0.05
				217	0.51 0 0 0.05
				218	0.595 0 0 0.05
				219	0.68 0 0 0.05
				220	0.765 0 0 0.05
				221	0.85 0 0 0.05
				222	1.02 0 0 0.05
				223	1.36 0 0 0.05
				224	1.7 0 0 0.05
				225	2.04 0 0 0.05
				226	END DIST
				227
				228	Metal 1 DIAGUNDER 5
				229	DIST count 13 width 0.17
				230	0 0 0 0.05
				231	0.17 0 0 0.05
				232	0.34 0 0 0.05
				233	0.425 0 0 0.05
				234	0.51 0 0 0.05
				235	0.595 0 0 0.05
				236	0.68 0 0 0.05
				237	0.765 0 0 0.05
				238	0.85 0 0 0.05
				239	1.02 0 0 0.05
				240	1.36 0 0 0.05
				241	1.7 0 0 0.05
				242	2.04 0 0 0.05
				243	END DIST
				244
				245	Metal 1 DIAGUNDER 6
				246	DIST count 0 width 0.17
				247	END DIST
				248
				249	Metal 2 RESOVER
				250	WIDTH Table 1 entries: 0.14
				251
				252	Metal 2 RESOVER 0
				253	DIST count 55 width 0.14
				254	0 0 0 0.00103571
				255	0 0.2 0 0.00103571
				256	0 0.34 0 0.00103571
				257	0 0.47 0 0.00103571
				258	0 0.54 0 0.00103571
				259	0 0.68 0 0.00103571
				260	0 0.81 0 0.00103571
				261	0 0.88 0 0.00103571
				262	0 1.02 0 0.00103571
				263	0 1.36 0 0.00103571
				264	0.2 0.2 0 0.00103571
				265	0.2 0.34 0 0.00103571
				266	0.2 0.47 0 0.00103571
				267	0.2 0.54 0 0.00103571
				268	0.2 0.68 0 0.00103571
				269	0.2 0.81 0 0.00103571
				270	0.2 0.88 0 0.00103571
				271	0.2 1.02 0 0.00103571
				272	0.2 1.36 0 0.00103571
				273	0.34 0.34 0 0.00103571
				274	0.34 0.47 0 0.00103571
				275	0.34 0.54 0 0.00103571
				276	0.34 0.68 0 0.00103571
				277	0.34 0.81 0 0.00103571
				278	0.34 0.88 0 0.00103571
				279	0.34 1.02 0 0.00103571
				280	0.34 1.36 0 0.00103571
				281	0.47 0.47 0 0.00103571
				282	0.47 0.54 0 0.00103571
				283	0.47 0.68 0 0.00103571
				284	0.47 0.81 0 0.00103571
				285	0.47 0.88 0 0.00103571
				286	0.47 1.02 0 0.00103571
				287	0.47 1.36 0 0.00103571
				288	0.54 0.54 0 0.00103571
				289	0.54 0.68 0 0.00103571
				290	0.54 0.81 0 0.00103571
				291	0.54 0.88 0 0.00103571
				292	0.54 1.02 0 0.00103571
				293	0.54 1.36 0 0.00103571
				294	0.68 0.68 0 0.00103571
				295	0.68 0.81 0 0.00103571
				296	0.68 0.88 0 0.00103571
				297	0.68 1.02 0 0.00103571
				298	0.68 1.36 0 0.00103571
				299	0.81 0.81 0 0.00103571
				300	0.81 0.88 0 0.00103571
				301	0.81 1.02 0 0.00103571
				302	0.81 1.36 0 0.00103571
				303	0.88 0.88 0 0.00103571
				304	0.88 1.02 0 0.00103571
				305	0.88 1.36 0 0.00103571
				306	1.02 1.02 0 0.00103571
				307	1.02 1.36 0 0.00103571
				308	1.36 0 1.36 0.00103571
				309	END DIST
				310
				311	Metal 2 RESOVER 1
				312	DIST count 0 width 0.14
				313	END DIST
				314
				315	Metal 2 OVER
				316	WIDTH Table 1 entries: 0.14
				317
				318	Metal 2 OVER 0
				319	DIST count 12 width 0.14
				320	0.14 0 4.27813e-05 0.000517857
				321	0.28 0 4.27813e-05 0.000517857
				322	0.35 0 4.27813e-05 0.000517857
				323	0.42 0 4.27813e-05 0.000517857
				324	0.49 0 4.27813e-05 0.000517857
				325	0.56 0 4.27813e-05 0.000517857
				326	0.63 0 4.27813e-05 0.000517857
				327	0.7 0 4.27813e-05 0.000517857
				328	0.84 0 4.27813e-05 0.000517857
				329	1.12 0 4.27813e-05 0.000517857
				330	1.4 0 4.27813e-05 0.000517857
				331	1.68 0 4.27813e-05 0.000517857
				332	END DIST
				333
				334	Metal 2 OVER 1
				335	DIST count 12 width 0.14
				336	0.14 0 4.27813e-05 0.000517857
				337	0.28 0 4.27813e-05 0.000517857
				338	0.35 0 4.27813e-05 0.000517857
				339	0.42 0 4.27813e-05 0.000517857
				340	0.49 0 4.27813e-05 0.000517857
				341	0.56 0 4.27813e-05 0.000517857
				342	0.63 0 4.27813e-05 0.000517857
				343	0.7 0 4.27813e-05 0.000517857
				344	0.84 0 4.27813e-05 0.000517857
				345	1.12 0 4.27813e-05 0.000517857
				346	1.4 0 4.27813e-05 0.000517857
				347	1.68 0 4.27813e-05 0.000517857
				348	END DIST
				349
				350	Metal 2 UNDER
				351	WIDTH Table 1 entries: 0.14
				352
				353	Metal 2 UNDER 3
				354	DIST count 12 width 0.14
				355	0.14 0 4.27813e-05 0.000517857
				356	0.28 0 4.27813e-05 0.000517857
				357	0.35 0 4.27813e-05 0.000517857
				358	0.42 0 4.27813e-05 0.000517857
				359	0.49 0 4.27813e-05 0.000517857
				360	0.56 0 4.27813e-05 0.000517857
				361	0.63 0 4.27813e-05 0.000517857
				362	0.7 0 4.27813e-05 0.000517857
				363	0.84 0 4.27813e-05 0.000517857
				364	1.12 0 4.27813e-05 0.000517857
				365	1.4 0 4.27813e-05 0.000517857
				366	1.68 0 4.27813e-05 0.000517857
				367	END DIST
				368
				369	Metal 2 UNDER 4
				370	DIST count 12 width 0.14
				371	0.14 0 4.27813e-05 0.000517857
				372	0.28 0 4.27813e-05 0.000517857
				373	0.35 0 4.27813e-05 0.000517857
				374	0.42 0 4.27813e-05 0.000517857
				375	0.49 0 4.27813e-05 0.000517857
				376	0.56 0 4.27813e-05 0.000517857
				377	0.63 0 4.27813e-05 0.000517857
				378	0.7 0 4.27813e-05 0.000517857
				379	0.84 0 4.27813e-05 0.000517857
				380	1.12 0 4.27813e-05 0.000517857
				381	1.4 0 4.27813e-05 0.000517857
				382	1.68 0 4.27813e-05 0.000517857
				383	END DIST
				384
				385	Metal 2 UNDER 5
				386	DIST count 12 width 0.14
				387	0.14 0 4.27813e-05 0.000517857
				388	0.28 0 4.27813e-05 0.000517857
				389	0.35 0 4.27813e-05 0.000517857
				390	0.42 0 4.27813e-05 0.000517857
				391	0.49 0 4.27813e-05 0.000517857
				392	0.56 0 4.27813e-05 0.000517857
				393	0.63 0 4.27813e-05 0.000517857
				394	0.7 0 4.27813e-05 0.000517857
				395	0.84 0 4.27813e-05 0.000517857
				396	1.12 0 4.27813e-05 0.000517857
				397	1.4 0 4.27813e-05 0.000517857
				398	1.68 0 4.27813e-05 0.000517857
				399	END DIST
				400
				401	Metal 2 UNDER 6
				402	DIST count 12 width 0.14
				403	0.14 0 4.27813e-05 0.000517857
				404	0.28 0 4.27813e-05 0.000517857
				405	0.35 0 4.27813e-05 0.000517857
				406	0.42 0 4.27813e-05 0.000517857
				407	0.49 0 4.27813e-05 0.000517857
				408	0.56 0 4.27813e-05 0.000517857
				409	0.63 0 4.27813e-05 0.000517857
				410	0.7 0 4.27813e-05 0.000517857
				411	0.84 0 4.27813e-05 0.000517857
				412	1.12 0 4.27813e-05 0.000517857
				413	1.4 0 4.27813e-05 0.000517857
				414	1.68 0 4.27813e-05 0.000517857
				415	END DIST
				416
				417	Metal 2 DIAGUNDER
				418	WIDTH Table 1 entries: 0.14
				419
				420	Metal 2 DIAGUNDER 3
				421	DIST count 13 width 0.14
				422	0 0 0 0.000517857
				423	0.14 0 0 0.000517857
				424	0.28 0 0 0.000517857
				425	0.35 0 0 0.000517857
				426	0.42 0 0 0.000517857
				427	0.49 0 0 0.000517857
				428	0.56 0 0 0.000517857
				429	0.63 0 0 0.000517857
				430	0.7 0 0 0.000517857
				431	0.84 0 0 0.000517857
				432	1.12 0 0 0.000517857
				433	1.4 0 0 0.000517857
				434	1.68 0 0 0.000517857
				435	END DIST
				436
				437	Metal 2 DIAGUNDER 4
				438	DIST count 13 width 0.14
				439	0 0 0 0.000517857
				440	0.14 0 0 0.000517857
				441	0.28 0 0 0.000517857
				442	0.35 0 0 0.000517857
				443	0.42 0 0 0.000517857
				444	0.49 0 0 0.000517857
				445	0.56 0 0 0.000517857
				446	0.63 0 0 0.000517857
				447	0.7 0 0 0.000517857
				448	0.84 0 0 0.000517857
				449	1.12 0 0 0.000517857
				450	1.4 0 0 0.000517857
				451	1.68 0 0 0.000517857
				452	END DIST
				453
				454	Metal 2 DIAGUNDER 5
				455	DIST count 13 width 0.14
				456	0 0 0 0.000517857
				457	0.14 0 0 0.000517857
				458	0.28 0 0 0.000517857
				459	0.35 0 0 0.000517857
				460	0.42 0 0 0.000517857
				461	0.49 0 0 0.000517857
				462	0.56 0 0 0.000517857
				463	0.63 0 0 0.000517857
				464	0.7 0 0 0.000517857
				465	0.84 0 0 0.000517857
				466	1.12 0 0 0.000517857
				467	1.4 0 0 0.000517857
				468	1.68 0 0 0.000517857
				469	END DIST
				470
				471	Metal 2 DIAGUNDER 6
				472	DIST count 13 width 0.14
				473	0 0 0 0.000517857
				474	0.14 0 0 0.000517857
				475	0.28 0 0 0.000517857
				476	0.35 0 0 0.000517857
				477	0.42 0 0 0.000517857
				478	0.49 0 0 0.000517857
				479	0.56 0 0 0.000517857
				480	0.63 0 0 0.000517857
				481	0.7 0 0 0.000517857
				482	0.84 0 0 0.000517857
				483	1.12 0 0 0.000517857
				484	1.4 0 0 0.000517857
				485	1.68 0 0 0.000517857
				486	END DIST
				487
				488	Metal 2 OVERUNDER
				489	WIDTH Table 1 entries: 0.14
				490
				491	Metal 2 OVER 1 UNDER 3
				492	DIST count 12 width 0.14
				493	0.14 0 4.27813e-05 0.000517857
				494	0.28 0 4.27813e-05 0.000517857
				495	0.35 0 4.27813e-05 0.000517857
				496	0.42 0 4.27813e-05 0.000517857
				497	0.49 0 4.27813e-05 0.000517857
				498	0.56 0 4.27813e-05 0.000517857
				499	0.63 0 4.27813e-05 0.000517857
				500	0.7 0 4.27813e-05 0.000517857
				501	0.84 0 4.27813e-05 0.000517857
				502	1.12 0 4.27813e-05 0.000517857
				503	1.4 0 4.27813e-05 0.000517857
				504	1.68 0 4.27813e-05 0.000517857
				505	END DIST
				506
				507	Metal 2 OVER 1 UNDER 4
				508	DIST count 12 width 0.14
				509	0.14 0 4.27813e-05 0.000517857
				510	0.28 0 4.27813e-05 0.000517857
				511	0.35 0 4.27813e-05 0.000517857
				512	0.42 0 4.27813e-05 0.000517857
				513	0.49 0 4.27813e-05 0.000517857
				514	0.56 0 4.27813e-05 0.000517857
				515	0.63 0 4.27813e-05 0.000517857
				516	0.7 0 4.27813e-05 0.000517857
				517	0.84 0 4.27813e-05 0.000517857
				518	1.12 0 4.27813e-05 0.000517857
				519	1.4 0 4.27813e-05 0.000517857
				520	1.68 0 4.27813e-05 0.000517857
				521	END DIST
				522
				523	Metal 2 OVER 1 UNDER 5
				524	DIST count 12 width 0.14
				525	0.14 0 4.27813e-05 0.000517857
				526	0.28 0 4.27813e-05 0.000517857
				527	0.35 0 4.27813e-05 0.000517857
				528	0.42 0 4.27813e-05 0.000517857
				529	0.49 0 4.27813e-05 0.000517857
				530	0.56 0 4.27813e-05 0.000517857
				531	0.63 0 4.27813e-05 0.000517857
				532	0.7 0 4.27813e-05 0.000517857
				533	0.84 0 4.27813e-05 0.000517857
				534	1.12 0 4.27813e-05 0.000517857
				535	1.4 0 4.27813e-05 0.000517857
				536	1.68 0 4.27813e-05 0.000517857
				537	END DIST
				538
				539	Metal 2 OVER 1 UNDER 6
				540	DIST count 12 width 0.14
				541	0.14 0 4.27813e-05 0.000517857
				542	0.28 0 4.27813e-05 0.000517857
				543	0.35 0 4.27813e-05 0.000517857
				544	0.42 0 4.27813e-05 0.000517857
				545	0.49 0 4.27813e-05 0.000517857
				546	0.56 0 4.27813e-05 0.000517857
				547	0.63 0 4.27813e-05 0.000517857
				548	0.7 0 4.27813e-05 0.000517857
				549	0.84 0 4.27813e-05 0.000517857
				550	1.12 0 4.27813e-05 0.000517857
				551	1.4 0 4.27813e-05 0.000517857
				552	1.68 0 4.27813e-05 0.000517857
				553	END DIST
				554
				555	Metal 3 RESOVER
				556	WIDTH Table 1 entries: 0.14
				557
				558	Metal 3 RESOVER 0
				559	DIST count 55 width 0.14
				560	0 0 0 0.00103571
				561	0 0.32 0 0.00103571
				562	0 0.46 0 0.00103571
				563	0 0.71 0 0.00103571
				564	0 0.78 0 0.00103571
				565	0 0.92 0 0.00103571
				566	0 1.17 0 0.00103571
				567	0 1.24 0 0.00103571
				568	0 1.38 0 0.00103571
				569	0 1.84 0 0.00103571
				570	0.32 0.32 0 0.00103571
				571	0.32 0.46 0 0.00103571
				572	0.32 0.71 0 0.00103571
				573	0.32 0.78 0 0.00103571
				574	0.32 0.92 0 0.00103571
				575	0.32 1.17 0 0.00103571
				576	0.32 1.24 0 0.00103571
				577	0.32 1.38 0 0.00103571
				578	0.32 1.84 0 0.00103571
				579	0.46 0.46 0 0.00103571
				580	0.46 0.71 0 0.00103571
				581	0.46 0.78 0 0.00103571
				582	0.46 0.92 0 0.00103571
				583	0.46 1.17 0 0.00103571
				584	0.46 1.24 0 0.00103571
				585	0.46 1.38 0 0.00103571
				586	0.46 1.84 0 0.00103571
				587	0.71 0.71 0 0.00103571
				588	0.71 0.78 0 0.00103571
				589	0.71 0.92 0 0.00103571
				590	0.71 1.17 0 0.00103571
				591	0.71 1.24 0 0.00103571
				592	0.71 1.38 0 0.00103571
				593	0.71 1.84 0 0.00103571
				594	0.78 0.78 0 0.00103571
				595	0.78 0.92 0 0.00103571
				596	0.78 1.17 0 0.00103571
				597	0.78 1.24 0 0.00103571
				598	0.78 1.38 0 0.00103571
				599	0.78 1.84 0 0.00103571
				600	0.92 0.92 0 0.00103571
				601	0.92 1.17 0 0.00103571
				602	0.92 1.24 0 0.00103571
				603	0.92 1.38 0 0.00103571
				604	0.92 1.84 0 0.00103571
				605	1.17 1.17 0 0.00103571
				606	1.17 1.24 0 0.00103571
				607	1.17 1.38 0 0.00103571
				608	1.17 1.84 0 0.00103571
				609	1.24 1.24 0 0.00103571
				610	1.24 1.38 0 0.00103571
				611	1.24 1.84 0 0.00103571
				612	1.38 1.38 0 0.00103571
				613	1.38 1.84 0 0.00103571
				614	1.84 0 1.84 0.00103571
				615	END DIST
				616
				617	Metal 3 RESOVER 1
				618	DIST count 0 width 0.14
				619	END DIST
				620
				621	Metal 3 RESOVER 2
				622	DIST count 0 width 0.14
				623	END DIST
				624
				625	Metal 3 OVER
				626	WIDTH Table 1 entries: 0.14
				627
				628	Metal 3 OVER 0
				629	DIST count 12 width 0.14
				630	0.14 0 3.93264e-05 0.000517857
				631	0.28 0 3.93264e-05 0.000517857
				632	0.35 0 3.93264e-05 0.000517857
				633	0.42 0 3.93264e-05 0.000517857
				634	0.49 0 3.93264e-05 0.000517857
				635	0.56 0 3.93264e-05 0.000517857
				636	0.63 0 3.93264e-05 0.000517857
				637	0.7 0 3.93264e-05 0.000517857
				638	0.84 0 3.93264e-05 0.000517857
				639	1.12 0 3.93264e-05 0.000517857
				640	1.4 0 3.93264e-05 0.000517857
				641	1.68 0 3.93264e-05 0.000517857
				642	END DIST
				643
				644	Metal 3 OVER 1
				645	DIST count 12 width 0.14
				646	0.14 0 3.93264e-05 0.000517857
				647	0.28 0 3.93264e-05 0.000517857
				648	0.35 0 3.93264e-05 0.000517857
				649	0.42 0 3.93264e-05 0.000517857
				650	0.49 0 3.93264e-05 0.000517857
				651	0.56 0 3.93264e-05 0.000517857
				652	0.63 0 3.93264e-05 0.000517857
				653	0.7 0 3.93264e-05 0.000517857
				654	0.84 0 3.93264e-05 0.000517857
				655	1.12 0 3.93264e-05 0.000517857
				656	1.4 0 3.93264e-05 0.000517857
				657	1.68 0 3.93264e-05 0.000517857
				658	END DIST
				659
				660	Metal 3 OVER 2
				661	DIST count 12 width 0.14
				662	0.14 0 3.93264e-05 0.000517857
				663	0.28 0 3.93264e-05 0.000517857
				664	0.35 0 3.93264e-05 0.000517857
				665	0.42 0 3.93264e-05 0.000517857
				666	0.49 0 3.93264e-05 0.000517857
				667	0.56 0 3.93264e-05 0.000517857
				668	0.63 0 3.93264e-05 0.000517857
				669	0.7 0 3.93264e-05 0.000517857
				670	0.84 0 3.93264e-05 0.000517857
				671	1.12 0 3.93264e-05 0.000517857
				672	1.4 0 3.93264e-05 0.000517857
				673	1.68 0 3.93264e-05 0.000517857
				674	END DIST
				675
				676	Metal 3 UNDER
				677	WIDTH Table 1 entries: 0.14
				678
				679	Metal 3 UNDER 4
				680	DIST count 12 width 0.14
				681	0.14 0 3.93264e-05 0.000517857
				682	0.28 0 3.93264e-05 0.000517857
				683	0.35 0 3.93264e-05 0.000517857
				684	0.42 0 3.93264e-05 0.000517857
				685	0.49 0 3.93264e-05 0.000517857
				686	0.56 0 3.93264e-05 0.000517857
				687	0.63 0 3.93264e-05 0.000517857
				688	0.7 0 3.93264e-05 0.000517857
				689	0.84 0 3.93264e-05 0.000517857
				690	1.12 0 3.93264e-05 0.000517857
				691	1.4 0 3.93264e-05 0.000517857
				692	1.68 0 3.93264e-05 0.000517857
				693	END DIST
				694
				695	Metal 3 UNDER 5
				696	DIST count 12 width 0.14
				697	0.14 0 3.93264e-05 0.000517857
				698	0.28 0 3.93264e-05 0.000517857
				699	0.35 0 3.93264e-05 0.000517857
				700	0.42 0 3.93264e-05 0.000517857
				701	0.49 0 3.93264e-05 0.000517857
				702	0.56 0 3.93264e-05 0.000517857
				703	0.63 0 3.93264e-05 0.000517857
				704	0.7 0 3.93264e-05 0.000517857
				705	0.84 0 3.93264e-05 0.000517857
				706	1.12 0 3.93264e-05 0.000517857
				707	1.4 0 3.93264e-05 0.000517857
				708	1.68 0 3.93264e-05 0.000517857
				709	END DIST
				710
				711	Metal 3 UNDER 6
				712	DIST count 12 width 0.14
				713	0.14 0 3.93264e-05 0.000517857
				714	0.28 0 3.93264e-05 0.000517857
				715	0.35 0 3.93264e-05 0.000517857
				716	0.42 0 3.93264e-05 0.000517857
				717	0.49 0 3.93264e-05 0.000517857
				718	0.56 0 3.93264e-05 0.000517857
				719	0.63 0 3.93264e-05 0.000517857
				720	0.7 0 3.93264e-05 0.000517857
				721	0.84 0 3.93264e-05 0.000517857
				722	1.12 0 3.93264e-05 0.000517857
				723	1.4 0 3.93264e-05 0.000517857
				724	1.68 0 3.93264e-05 0.000517857
				725	END DIST
				726
				727	Metal 3 DIAGUNDER
				728	WIDTH Table 1 entries: 0.14
				729
				730	Metal 3 DIAGUNDER 4
				731	DIST count 13 width 0.14
				732	0 0 0 0.000517857
				733	0.14 0 0 0.000517857
				734	0.28 0 0 0.000517857
				735	0.35 0 0 0.000517857
				736	0.42 0 0 0.000517857
				737	0.49 0 0 0.000517857
				738	0.56 0 0 0.000517857
				739	0.63 0 0 0.000517857
				740	0.7 0 0 0.000517857
				741	0.84 0 0 0.000517857
				742	1.12 0 0 0.000517857
				743	1.4 0 0 0.000517857
				744	1.68 0 0 0.000517857
				745	END DIST
				746
				747	Metal 3 DIAGUNDER 5
				748	DIST count 13 width 0.14
				749	0 0 0 0.000517857
				750	0.14 0 0 0.000517857
				751	0.28 0 0 0.000517857
				752	0.35 0 0 0.000517857
				753	0.42 0 0 0.000517857
				754	0.49 0 0 0.000517857
				755	0.56 0 0 0.000517857
				756	0.63 0 0 0.000517857
				757	0.7 0 0 0.000517857
				758	0.84 0 0 0.000517857
				759	1.12 0 0 0.000517857
				760	1.4 0 0 0.000517857
				761	1.68 0 0 0.000517857
				762	END DIST
				763
				764	Metal 3 DIAGUNDER 6
				765	DIST count 13 width 0.14
				766	0 0 0 0.000517857
				767	0.14 0 0 0.000517857
				768	0.28 0 0 0.000517857
				769	0.35 0 0 0.000517857
				770	0.42 0 0 0.000517857
				771	0.49 0 0 0.000517857
				772	0.56 0 0 0.000517857
				773	0.63 0 0 0.000517857
				774	0.7 0 0 0.000517857
				775	0.84 0 0 0.000517857
				776	1.12 0 0 0.000517857
				777	1.4 0 0 0.000517857
				778	1.68 0 0 0.000517857
				779	END DIST
				780
				781	Metal 3 OVERUNDER
				782	WIDTH Table 1 entries: 0.14
				783
				784	Metal 3 OVER 1 UNDER 4
				785	DIST count 12 width 0.14
				786	0.14 0 3.93264e-05 0.000517857
				787	0.28 0 3.93264e-05 0.000517857
				788	0.35 0 3.93264e-05 0.000517857
				789	0.42 0 3.93264e-05 0.000517857
				790	0.49 0 3.93264e-05 0.000517857
				791	0.56 0 3.93264e-05 0.000517857
				792	0.63 0 3.93264e-05 0.000517857
				793	0.7 0 3.93264e-05 0.000517857
				794	0.84 0 3.93264e-05 0.000517857
				795	1.12 0 3.93264e-05 0.000517857
				796	1.4 0 3.93264e-05 0.000517857
				797	1.68 0 3.93264e-05 0.000517857
				798	END DIST
				799
				800	Metal 3 OVER 1 UNDER 5
				801	DIST count 12 width 0.14
				802	0.14 0 3.93264e-05 0.000517857
				803	0.28 0 3.93264e-05 0.000517857
				804	0.35 0 3.93264e-05 0.000517857
				805	0.42 0 3.93264e-05 0.000517857
				806	0.49 0 3.93264e-05 0.000517857
				807	0.56 0 3.93264e-05 0.000517857
				808	0.63 0 3.93264e-05 0.000517857
				809	0.7 0 3.93264e-05 0.000517857
				810	0.84 0 3.93264e-05 0.000517857
				811	1.12 0 3.93264e-05 0.000517857
				812	1.4 0 3.93264e-05 0.000517857
				813	1.68 0 3.93264e-05 0.000517857
				814	END DIST
				815
				816	Metal 3 OVER 1 UNDER 6
				817	DIST count 12 width 0.14
				818	0.14 0 3.93264e-05 0.000517857
				819	0.28 0 3.93264e-05 0.000517857
				820	0.35 0 3.93264e-05 0.000517857
				821	0.42 0 3.93264e-05 0.000517857
				822	0.49 0 3.93264e-05 0.000517857
				823	0.56 0 3.93264e-05 0.000517857
				824	0.63 0 3.93264e-05 0.000517857
				825	0.7 0 3.93264e-05 0.000517857
				826	0.84 0 3.93264e-05 0.000517857
				827	1.12 0 3.93264e-05 0.000517857
				828	1.4 0 3.93264e-05 0.000517857
				829	1.68 0 3.93264e-05 0.000517857
				830	END DIST
				831
				832	Metal 3 OVER 2 UNDER 4
				833	DIST count 12 width 0.14
				834	0.14 0 3.93264e-05 0.000517857
				835	0.28 0 3.93264e-05 0.000517857
				836	0.35 0 3.93264e-05 0.000517857
				837	0.42 0 3.93264e-05 0.000517857
				838	0.49 0 3.93264e-05 0.000517857
				839	0.56 0 3.93264e-05 0.000517857
				840	0.63 0 3.93264e-05 0.000517857
				841	0.7 0 3.93264e-05 0.000517857
				842	0.84 0 3.93264e-05 0.000517857
				843	1.12 0 3.93264e-05 0.000517857
				844	1.4 0 3.93264e-05 0.000517857
				845	1.68 0 3.93264e-05 0.000517857
				846	END DIST
				847
				848	Metal 3 OVER 2 UNDER 5
				849	DIST count 12 width 0.14
				850	0.14 0 3.93264e-05 0.000517857
				851	0.28 0 3.93264e-05 0.000517857
				852	0.35 0 3.93264e-05 0.000517857
				853	0.42 0 3.93264e-05 0.000517857
				854	0.49 0 3.93264e-05 0.000517857
				855	0.56 0 3.93264e-05 0.000517857
				856	0.63 0 3.93264e-05 0.000517857
				857	0.7 0 3.93264e-05 0.000517857
				858	0.84 0 3.93264e-05 0.000517857
				859	1.12 0 3.93264e-05 0.000517857
				860	1.4 0 3.93264e-05 0.000517857
				861	1.68 0 3.93264e-05 0.000517857
				862	END DIST
				863
				864	Metal 3 OVER 2 UNDER 6
				865	DIST count 12 width 0.14
				866	0.14 0 3.93264e-05 0.000517857
				867	0.28 0 3.93264e-05 0.000517857
				868	0.35 0 3.93264e-05 0.000517857
				869	0.42 0 3.93264e-05 0.000517857
				870	0.49 0 3.93264e-05 0.000517857
				871	0.56 0 3.93264e-05 0.000517857
				872	0.63 0 3.93264e-05 0.000517857
				873	0.7 0 3.93264e-05 0.000517857
				874	0.84 0 3.93264e-05 0.000517857
				875	1.12 0 3.93264e-05 0.000517857
				876	1.4 0 3.93264e-05 0.000517857
				877	1.68 0 3.93264e-05 0.000517857
				878	END DIST
				879
				880	Metal 4 RESOVER
				881	WIDTH Table 1 entries: 0.3
				882
				883	Metal 4 RESOVER 0
				884	DIST count 55 width 0.3
				885	0 0 0 0.000186667
				886	0 0.38 0 0.000186667
				887	0 0.68 0 0.000186667
				888	0 0.91 0 0.000186667
				889	0 1.06 0 0.000186667
				890	0 1.36 0 0.000186667
				891	0 1.59 0 0.000186667
				892	0 1.74 0 0.000186667
				893	0 2.04 0 0.000186667
				894	0 2.72 0 0.000186667
				895	0.38 0.38 0 0.000186667
				896	0.38 0.68 0 0.000186667
				897	0.38 0.91 0 0.000186667
				898	0.38 1.06 0 0.000186667
				899	0.38 1.36 0 0.000186667
				900	0.38 1.59 0 0.000186667
				901	0.38 1.74 0 0.000186667
				902	0.38 2.04 0 0.000186667
				903	0.38 2.72 0 0.000186667
				904	0.68 0.68 0 0.000186667
				905	0.68 0.91 0 0.000186667
				906	0.68 1.06 0 0.000186667
				907	0.68 1.36 0 0.000186667
				908	0.68 1.59 0 0.000186667
				909	0.68 1.74 0 0.000186667
				910	0.68 2.04 0 0.000186667
				911	0.68 2.72 0 0.000186667
				912	0.91 0.91 0 0.000186667
				913	0.91 1.06 0 0.000186667
				914	0.91 1.36 0 0.000186667
				915	0.91 1.59 0 0.000186667
				916	0.91 1.74 0 0.000186667
				917	0.91 2.04 0 0.000186667
				918	0.91 2.72 0 0.000186667
				919	1.06 1.06 0 0.000186667
				920	1.06 1.36 0 0.000186667
				921	1.06 1.59 0 0.000186667
				922	1.06 1.74 0 0.000186667
				923	1.06 2.04 0 0.000186667
				924	1.06 2.72 0 0.000186667
				925	1.36 1.36 0 0.000186667
				926	1.36 1.59 0 0.000186667
				927	1.36 1.74 0 0.000186667
				928	1.36 2.04 0 0.000186667
				929	1.36 2.72 0 0.000186667
				930	1.59 1.59 0 0.000186667
				931	1.59 1.74 0 0.000186667
				932	1.59 2.04 0 0.000186667
				933	1.59 2.72 0 0.000186667
				934	1.74 1.74 0 0.000186667
				935	1.74 2.04 0 0.000186667
				936	1.74 2.72 0 0.000186667
				937	2.04 2.04 0 0.000186667
				938	2.04 2.72 0 0.000186667
				939	2.72 0 2.72 0.000186667
				940	END DIST
				941
				942	Metal 4 RESOVER 1
				943	DIST count 0 width 0.3
				944	END DIST
				945
				946	Metal 4 RESOVER 2
				947	DIST count 0 width 0.3
				948	END DIST
				949
				950	Metal 4 RESOVER 3
				951	DIST count 0 width 0.3
				952	END DIST
				953
				954	Metal 4 OVER
				955	WIDTH Table 1 entries: 0.3
				956
				957	Metal 4 OVER 0
				958	DIST count 12 width 0.3
				959	0.3 0 4.3259e-05 9.33333e-05
				960	0.6 0 4.3259e-05 9.33333e-05
				961	0.75 0 4.3259e-05 9.33333e-05
				962	0.9 0 4.3259e-05 9.33333e-05
				963	1.05 0 4.3259e-05 9.33333e-05
				964	1.2 0 4.3259e-05 9.33333e-05
				965	1.35 0 4.3259e-05 9.33333e-05
				966	1.5 0 4.3259e-05 9.33333e-05
				967	1.8 0 4.3259e-05 9.33333e-05
				968	2.4 0 4.3259e-05 9.33333e-05
				969	3 0 4.3259e-05 9.33333e-05
				970	3.6 0 4.3259e-05 9.33333e-05
				971	END DIST
				972
				973	Metal 4 OVER 1
				974	DIST count 12 width 0.3
				975	0.3 0 4.3259e-05 9.33333e-05
				976	0.6 0 4.3259e-05 9.33333e-05
				977	0.75 0 4.3259e-05 9.33333e-05
				978	0.9 0 4.3259e-05 9.33333e-05
				979	1.05 0 4.3259e-05 9.33333e-05
				980	1.2 0 4.3259e-05 9.33333e-05
				981	1.35 0 4.3259e-05 9.33333e-05
				982	1.5 0 4.3259e-05 9.33333e-05
				983	1.8 0 4.3259e-05 9.33333e-05
				984	2.4 0 4.3259e-05 9.33333e-05
				985	3 0 4.3259e-05 9.33333e-05
				986	3.6 0 4.3259e-05 9.33333e-05
				987	END DIST
				988
				989	Metal 4 OVER 2
				990	DIST count 12 width 0.3
				991	0.3 0 4.3259e-05 9.33333e-05
				992	0.6 0 4.3259e-05 9.33333e-05
				993	0.75 0 4.3259e-05 9.33333e-05
				994	0.9 0 4.3259e-05 9.33333e-05
				995	1.05 0 4.3259e-05 9.33333e-05
				996	1.2 0 4.3259e-05 9.33333e-05
				997	1.35 0 4.3259e-05 9.33333e-05
				998	1.5 0 4.3259e-05 9.33333e-05
				999	1.8 0 4.3259e-05 9.33333e-05
				1000	2.4 0 4.3259e-05 9.33333e-05
				1001	3 0 4.3259e-05 9.33333e-05
				1002	3.6 0 4.3259e-05 9.33333e-05
				1003	END DIST
				1004
				1005	Metal 4 OVER 3
				1006	DIST count 12 width 0.3
				1007	0.3 0 4.3259e-05 9.33333e-05
				1008	0.6 0 4.3259e-05 9.33333e-05
				1009	0.75 0 4.3259e-05 9.33333e-05
				1010	0.9 0 4.3259e-05 9.33333e-05
				1011	1.05 0 4.3259e-05 9.33333e-05
				1012	1.2 0 4.3259e-05 9.33333e-05
				1013	1.35 0 4.3259e-05 9.33333e-05
				1014	1.5 0 4.3259e-05 9.33333e-05
				1015	1.8 0 4.3259e-05 9.33333e-05
				1016	2.4 0 4.3259e-05 9.33333e-05
				1017	3 0 4.3259e-05 9.33333e-05
				1018	3.6 0 4.3259e-05 9.33333e-05
				1019	END DIST
				1020
				1021	Metal 4 UNDER
				1022	WIDTH Table 1 entries: 0.3
				1023
				1024	Metal 4 UNDER 5
				1025	DIST count 12 width 0.3
				1026	0.3 0 4.3259e-05 9.33333e-05
				1027	0.6 0 4.3259e-05 9.33333e-05
				1028	0.75 0 4.3259e-05 9.33333e-05
				1029	0.9 0 4.3259e-05 9.33333e-05
				1030	1.05 0 4.3259e-05 9.33333e-05
				1031	1.2 0 4.3259e-05 9.33333e-05
				1032	1.35 0 4.3259e-05 9.33333e-05
				1033	1.5 0 4.3259e-05 9.33333e-05
				1034	1.8 0 4.3259e-05 9.33333e-05
				1035	2.4 0 4.3259e-05 9.33333e-05
				1036	3 0 4.3259e-05 9.33333e-05
				1037	3.6 0 4.3259e-05 9.33333e-05
				1038	END DIST
				1039
				1040	Metal 4 UNDER 6
				1041	DIST count 12 width 0.3
				1042	0.3 0 4.3259e-05 9.33333e-05
				1043	0.6 0 4.3259e-05 9.33333e-05
				1044	0.75 0 4.3259e-05 9.33333e-05
				1045	0.9 0 4.3259e-05 9.33333e-05
				1046	1.05 0 4.3259e-05 9.33333e-05
				1047	1.2 0 4.3259e-05 9.33333e-05
				1048	1.35 0 4.3259e-05 9.33333e-05
				1049	1.5 0 4.3259e-05 9.33333e-05
				1050	1.8 0 4.3259e-05 9.33333e-05
				1051	2.4 0 4.3259e-05 9.33333e-05
				1052	3 0 4.3259e-05 9.33333e-05
				1053	3.6 0 4.3259e-05 9.33333e-05
				1054	END DIST
				1055
				1056	Metal 4 DIAGUNDER
				1057	WIDTH Table 1 entries: 0.3
				1058
				1059	Metal 4 DIAGUNDER 5
				1060	DIST count 13 width 0.3
				1061	0 0 0 9.33333e-05
				1062	0.3 0 0 9.33333e-05
				1063	0.6 0 0 9.33333e-05
				1064	0.75 0 0 9.33333e-05
				1065	0.9 0 0 9.33333e-05
				1066	1.05 0 0 9.33333e-05
				1067	1.2 0 0 9.33333e-05
				1068	1.35 0 0 9.33333e-05
				1069	1.5 0 0 9.33333e-05
				1070	1.8 0 0 9.33333e-05
				1071	2.4 0 0 9.33333e-05
				1072	3 0 0 9.33333e-05
				1073	3.6 0 0 9.33333e-05
				1074	END DIST
				1075
				1076	Metal 4 DIAGUNDER 6
				1077	DIST count 13 width 0.3
				1078	0 0 0 9.33333e-05
				1079	0.3 0 0 9.33333e-05
				1080	0.6 0 0 9.33333e-05
				1081	0.75 0 0 9.33333e-05
				1082	0.9 0 0 9.33333e-05
				1083	1.05 0 0 9.33333e-05
				1084	1.2 0 0 9.33333e-05
				1085	1.35 0 0 9.33333e-05
				1086	1.5 0 0 9.33333e-05
				1087	1.8 0 0 9.33333e-05
				1088	2.4 0 0 9.33333e-05
				1089	3 0 0 9.33333e-05
				1090	3.6 0 0 9.33333e-05
				1091	END DIST
				1092
				1093	Metal 4 OVERUNDER
				1094	WIDTH Table 1 entries: 0.3
				1095
				1096	Metal 4 OVER 1 UNDER 5
				1097	DIST count 12 width 0.3
				1098	0.3 0 4.3259e-05 9.33333e-05
				1099	0.6 0 4.3259e-05 9.33333e-05
				1100	0.75 0 4.3259e-05 9.33333e-05
				1101	0.9 0 4.3259e-05 9.33333e-05
				1102	1.05 0 4.3259e-05 9.33333e-05
				1103	1.2 0 4.3259e-05 9.33333e-05
				1104	1.35 0 4.3259e-05 9.33333e-05
				1105	1.5 0 4.3259e-05 9.33333e-05
				1106	1.8 0 4.3259e-05 9.33333e-05
				1107	2.4 0 4.3259e-05 9.33333e-05
				1108	3 0 4.3259e-05 9.33333e-05
				1109	3.6 0 4.3259e-05 9.33333e-05
				1110	END DIST
				1111
				1112	Metal 4 OVER 1 UNDER 6
				1113	DIST count 12 width 0.3
				1114	0.3 0 4.3259e-05 9.33333e-05
				1115	0.6 0 4.3259e-05 9.33333e-05
				1116	0.75 0 4.3259e-05 9.33333e-05
				1117	0.9 0 4.3259e-05 9.33333e-05
				1118	1.05 0 4.3259e-05 9.33333e-05
				1119	1.2 0 4.3259e-05 9.33333e-05
				1120	1.35 0 4.3259e-05 9.33333e-05
				1121	1.5 0 4.3259e-05 9.33333e-05
				1122	1.8 0 4.3259e-05 9.33333e-05
				1123	2.4 0 4.3259e-05 9.33333e-05
				1124	3 0 4.3259e-05 9.33333e-05
				1125	3.6 0 4.3259e-05 9.33333e-05
				1126	END DIST
				1127
				1128	Metal 4 OVER 2 UNDER 5
				1129	DIST count 12 width 0.3
				1130	0.3 0 4.3259e-05 9.33333e-05
				1131	0.6 0 4.3259e-05 9.33333e-05
				1132	0.75 0 4.3259e-05 9.33333e-05
				1133	0.9 0 4.3259e-05 9.33333e-05
				1134	1.05 0 4.3259e-05 9.33333e-05
				1135	1.2 0 4.3259e-05 9.33333e-05
				1136	1.35 0 4.3259e-05 9.33333e-05
				1137	1.5 0 4.3259e-05 9.33333e-05
				1138	1.8 0 4.3259e-05 9.33333e-05
				1139	2.4 0 4.3259e-05 9.33333e-05
				1140	3 0 4.3259e-05 9.33333e-05
				1141	3.6 0 4.3259e-05 9.33333e-05
				1142	END DIST
				1143
				1144	Metal 4 OVER 2 UNDER 6
				1145	DIST count 12 width 0.3
				1146	0.3 0 4.3259e-05 9.33333e-05
				1147	0.6 0 4.3259e-05 9.33333e-05
				1148	0.75 0 4.3259e-05 9.33333e-05
				1149	0.9 0 4.3259e-05 9.33333e-05
				1150	1.05 0 4.3259e-05 9.33333e-05
				1151	1.2 0 4.3259e-05 9.33333e-05
				1152	1.35 0 4.3259e-05 9.33333e-05
				1153	1.5 0 4.3259e-05 9.33333e-05
				1154	1.8 0 4.3259e-05 9.33333e-05
				1155	2.4 0 4.3259e-05 9.33333e-05
				1156	3 0 4.3259e-05 9.33333e-05
				1157	3.6 0 4.3259e-05 9.33333e-05
				1158	END DIST
				1159
				1160	Metal 4 OVER 3 UNDER 5
				1161	DIST count 12 width 0.3
				1162	0.3 0 4.3259e-05 9.33333e-05
				1163	0.6 0 4.3259e-05 9.33333e-05
				1164	0.75 0 4.3259e-05 9.33333e-05
				1165	0.9 0 4.3259e-05 9.33333e-05
				1166	1.05 0 4.3259e-05 9.33333e-05
				1167	1.2 0 4.3259e-05 9.33333e-05
				1168	1.35 0 4.3259e-05 9.33333e-05
				1169	1.5 0 4.3259e-05 9.33333e-05
				1170	1.8 0 4.3259e-05 9.33333e-05
				1171	2.4 0 4.3259e-05 9.33333e-05
				1172	3 0 4.3259e-05 9.33333e-05
				1173	3.6 0 4.3259e-05 9.33333e-05
				1174	END DIST
				1175
				1176	Metal 4 OVER 3 UNDER 6
				1177	DIST count 12 width 0.3
				1178	0.3 0 4.3259e-05 9.33333e-05
				1179	0.6 0 4.3259e-05 9.33333e-05
				1180	0.75 0 4.3259e-05 9.33333e-05
				1181	0.9 0 4.3259e-05 9.33333e-05
				1182	1.05 0 4.3259e-05 9.33333e-05
				1183	1.2 0 4.3259e-05 9.33333e-05
				1184	1.35 0 4.3259e-05 9.33333e-05
				1185	1.5 0 4.3259e-05 9.33333e-05
				1186	1.8 0 4.3259e-05 9.33333e-05
				1187	2.4 0 4.3259e-05 9.33333e-05
				1188	3 0 4.3259e-05 9.33333e-05
				1189	3.6 0 4.3259e-05 9.33333e-05
				1190	END DIST
				1191
				1192	Metal 5 RESOVER
				1193	WIDTH Table 1 entries: 0.3
				1194
				1195	Metal 5 RESOVER 0
				1196	DIST count 55 width 0.3
				1197	0 0 0 0.000186667
				1198	0 0.62 0 0.000186667
				1199	0 0.92 0 0.000186667
				1200	0 1.39 0 0.000186667
				1201	0 1.54 0 0.000186667
				1202	0 1.84 0 0.000186667
				1203	0 2.31 0 0.000186667
				1204	0 2.46 0 0.000186667
				1205	0 2.76 0 0.000186667
				1206	0 3.68 0 0.000186667
				1207	0.62 0.62 0 0.000186667
				1208	0.62 0.92 0 0.000186667
				1209	0.62 1.39 0 0.000186667
				1210	0.62 1.54 0 0.000186667
				1211	0.62 1.84 0 0.000186667
				1212	0.62 2.31 0 0.000186667
				1213	0.62 2.46 0 0.000186667
				1214	0.62 2.76 0 0.000186667
				1215	0.62 3.68 0 0.000186667
				1216	0.92 0.92 0 0.000186667
				1217	0.92 1.39 0 0.000186667
				1218	0.92 1.54 0 0.000186667
				1219	0.92 1.84 0 0.000186667
				1220	0.92 2.31 0 0.000186667
				1221	0.92 2.46 0 0.000186667
				1222	0.92 2.76 0 0.000186667
				1223	0.92 3.68 0 0.000186667
				1224	1.39 1.39 0 0.000186667
				1225	1.39 1.54 0 0.000186667
				1226	1.39 1.84 0 0.000186667
				1227	1.39 2.31 0 0.000186667
				1228	1.39 2.46 0 0.000186667
				1229	1.39 2.76 0 0.000186667
				1230	1.39 3.68 0 0.000186667
				1231	1.54 1.54 0 0.000186667
				1232	1.54 1.84 0 0.000186667
				1233	1.54 2.31 0 0.000186667
				1234	1.54 2.46 0 0.000186667
				1235	1.54 2.76 0 0.000186667
				1236	1.54 3.68 0 0.000186667
				1237	1.84 1.84 0 0.000186667
				1238	1.84 2.31 0 0.000186667
				1239	1.84 2.46 0 0.000186667
				1240	1.84 2.76 0 0.000186667
				1241	1.84 3.68 0 0.000186667
				1242	2.31 2.31 0 0.000186667
				1243	2.31 2.46 0 0.000186667
				1244	2.31 2.76 0 0.000186667
				1245	2.31 3.68 0 0.000186667
				1246	2.46 2.46 0 0.000186667
				1247	2.46 2.76 0 0.000186667
				1248	2.46 3.68 0 0.000186667
				1249	2.76 2.76 0 0.000186667
				1250	2.76 3.68 0 0.000186667
				1251	3.68 0 3.68 0.000186667
				1252	END DIST
				1253
				1254	Metal 5 RESOVER 1
				1255	DIST count 0 width 0.3
				1256	END DIST
				1257
				1258	Metal 5 RESOVER 2
				1259	DIST count 0 width 0.3
				1260	END DIST
				1261
				1262	Metal 5 RESOVER 3
				1263	DIST count 0 width 0.3
				1264	END DIST
				1265
				1266	Metal 5 RESOVER 4
				1267	DIST count 0 width 0.3
				1268	END DIST
				1269
				1270	Metal 5 OVER
				1271	WIDTH Table 1 entries: 0.3
				1272
				1273	Metal 5 OVER 0
				1274	DIST count 12 width 0.3
				1275	0.3 0 3.83088e-05 9.33333e-05
				1276	0.6 0 3.83088e-05 9.33333e-05
				1277	0.75 0 3.83088e-05 9.33333e-05
				1278	0.9 0 3.83088e-05 9.33333e-05
				1279	1.05 0 3.83088e-05 9.33333e-05
				1280	1.2 0 3.83088e-05 9.33333e-05
				1281	1.35 0 3.83088e-05 9.33333e-05
				1282	1.5 0 3.83088e-05 9.33333e-05
				1283	1.8 0 3.83088e-05 9.33333e-05
				1284	2.4 0 3.83088e-05 9.33333e-05
				1285	3 0 3.83088e-05 9.33333e-05
				1286	3.6 0 3.83088e-05 9.33333e-05
				1287	END DIST
				1288
				1289	Metal 5 OVER 1
				1290	DIST count 12 width 0.3
				1291	0.3 0 3.83088e-05 9.33333e-05
				1292	0.6 0 3.83088e-05 9.33333e-05
				1293	0.75 0 3.83088e-05 9.33333e-05
				1294	0.9 0 3.83088e-05 9.33333e-05
				1295	1.05 0 3.83088e-05 9.33333e-05
				1296	1.2 0 3.83088e-05 9.33333e-05
				1297	1.35 0 3.83088e-05 9.33333e-05
				1298	1.5 0 3.83088e-05 9.33333e-05
				1299	1.8 0 3.83088e-05 9.33333e-05
				1300	2.4 0 3.83088e-05 9.33333e-05
				1301	3 0 3.83088e-05 9.33333e-05
				1302	3.6 0 3.83088e-05 9.33333e-05
				1303	END DIST
				1304
				1305	Metal 5 OVER 2
				1306	DIST count 12 width 0.3
				1307	0.3 0 3.83088e-05 9.33333e-05
				1308	0.6 0 3.83088e-05 9.33333e-05
				1309	0.75 0 3.83088e-05 9.33333e-05
				1310	0.9 0 3.83088e-05 9.33333e-05
				1311	1.05 0 3.83088e-05 9.33333e-05
				1312	1.2 0 3.83088e-05 9.33333e-05
				1313	1.35 0 3.83088e-05 9.33333e-05
				1314	1.5 0 3.83088e-05 9.33333e-05
				1315	1.8 0 3.83088e-05 9.33333e-05
				1316	2.4 0 3.83088e-05 9.33333e-05
				1317	3 0 3.83088e-05 9.33333e-05
				1318	3.6 0 3.83088e-05 9.33333e-05
				1319	END DIST
				1320
				1321	Metal 5 OVER 3
				1322	DIST count 12 width 0.3
				1323	0.3 0 3.83088e-05 9.33333e-05
				1324	0.6 0 3.83088e-05 9.33333e-05
				1325	0.75 0 3.83088e-05 9.33333e-05
				1326	0.9 0 3.83088e-05 9.33333e-05
				1327	1.05 0 3.83088e-05 9.33333e-05
				1328	1.2 0 3.83088e-05 9.33333e-05
				1329	1.35 0 3.83088e-05 9.33333e-05
				1330	1.5 0 3.83088e-05 9.33333e-05
				1331	1.8 0 3.83088e-05 9.33333e-05
				1332	2.4 0 3.83088e-05 9.33333e-05
				1333	3 0 3.83088e-05 9.33333e-05
				1334	3.6 0 3.83088e-05 9.33333e-05
				1335	END DIST
				1336
				1337	Metal 5 OVER 4
				1338	DIST count 12 width 0.3
				1339	0.3 0 3.83088e-05 9.33333e-05
				1340	0.6 0 3.83088e-05 9.33333e-05
				1341	0.75 0 3.83088e-05 9.33333e-05
				1342	0.9 0 3.83088e-05 9.33333e-05
				1343	1.05 0 3.83088e-05 9.33333e-05
				1344	1.2 0 3.83088e-05 9.33333e-05
				1345	1.35 0 3.83088e-05 9.33333e-05
				1346	1.5 0 3.83088e-05 9.33333e-05
				1347	1.8 0 3.83088e-05 9.33333e-05
				1348	2.4 0 3.83088e-05 9.33333e-05
				1349	3 0 3.83088e-05 9.33333e-05
				1350	3.6 0 3.83088e-05 9.33333e-05
				1351	END DIST
				1352
				1353	Metal 5 UNDER
				1354	WIDTH Table 1 entries: 0.3
				1355
				1356	Metal 5 UNDER 6
				1357	DIST count 12 width 0.3
				1358	0.3 0 3.83088e-05 9.33333e-05
				1359	0.6 0 3.83088e-05 9.33333e-05
				1360	0.75 0 3.83088e-05 9.33333e-05
				1361	0.9 0 3.83088e-05 9.33333e-05
				1362	1.05 0 3.83088e-05 9.33333e-05
				1363	1.2 0 3.83088e-05 9.33333e-05
				1364	1.35 0 3.83088e-05 9.33333e-05
				1365	1.5 0 3.83088e-05 9.33333e-05
				1366	1.8 0 3.83088e-05 9.33333e-05
				1367	2.4 0 3.83088e-05 9.33333e-05
				1368	3 0 3.83088e-05 9.33333e-05
				1369	3.6 0 3.83088e-05 9.33333e-05
				1370	END DIST
				1371
				1372	Metal 5 DIAGUNDER
				1373	WIDTH Table 1 entries: 0.3
				1374
				1375	Metal 5 DIAGUNDER 6
				1376	DIST count 13 width 0.3
				1377	0 0 0 9.33333e-05
				1378	0.3 0 0 9.33333e-05
				1379	0.6 0 0 9.33333e-05
				1380	0.75 0 0 9.33333e-05
				1381	0.9 0 0 9.33333e-05
				1382	1.05 0 0 9.33333e-05
				1383	1.2 0 0 9.33333e-05
				1384	1.35 0 0 9.33333e-05
				1385	1.5 0 0 9.33333e-05
				1386	1.8 0 0 9.33333e-05
				1387	2.4 0 0 9.33333e-05
				1388	3 0 0 9.33333e-05
				1389	3.6 0 0 9.33333e-05
				1390	END DIST
				1391
				1392	Metal 5 OVERUNDER
				1393	WIDTH Table 1 entries: 0.3
				1394
				1395	Metal 5 OVER 1 UNDER 6
				1396	DIST count 12 width 0.3
				1397	0.3 0 3.83088e-05 9.33333e-05
				1398	0.6 0 3.83088e-05 9.33333e-05
				1399	0.75 0 3.83088e-05 9.33333e-05
				1400	0.9 0 3.83088e-05 9.33333e-05
				1401	1.05 0 3.83088e-05 9.33333e-05
				1402	1.2 0 3.83088e-05 9.33333e-05
				1403	1.35 0 3.83088e-05 9.33333e-05
				1404	1.5 0 3.83088e-05 9.33333e-05
				1405	1.8 0 3.83088e-05 9.33333e-05
				1406	2.4 0 3.83088e-05 9.33333e-05
				1407	3 0 3.83088e-05 9.33333e-05
				1408	3.6 0 3.83088e-05 9.33333e-05
				1409	END DIST
				1410
				1411	Metal 5 OVER 2 UNDER 6
				1412	DIST count 12 width 0.3
				1413	0.3 0 3.83088e-05 9.33333e-05
				1414	0.6 0 3.83088e-05 9.33333e-05
				1415	0.75 0 3.83088e-05 9.33333e-05
				1416	0.9 0 3.83088e-05 9.33333e-05
				1417	1.05 0 3.83088e-05 9.33333e-05
				1418	1.2 0 3.83088e-05 9.33333e-05
				1419	1.35 0 3.83088e-05 9.33333e-05
				1420	1.5 0 3.83088e-05 9.33333e-05
				1421	1.8 0 3.83088e-05 9.33333e-05
				1422	2.4 0 3.83088e-05 9.33333e-05
				1423	3 0 3.83088e-05 9.33333e-05
				1424	3.6 0 3.83088e-05 9.33333e-05
				1425	END DIST
				1426
				1427	Metal 5 OVER 3 UNDER 6
				1428	DIST count 12 width 0.3
				1429	0.3 0 3.83088e-05 9.33333e-05
				1430	0.6 0 3.83088e-05 9.33333e-05
				1431	0.75 0 3.83088e-05 9.33333e-05
				1432	0.9 0 3.83088e-05 9.33333e-05
				1433	1.05 0 3.83088e-05 9.33333e-05
				1434	1.2 0 3.83088e-05 9.33333e-05
				1435	1.35 0 3.83088e-05 9.33333e-05
				1436	1.5 0 3.83088e-05 9.33333e-05
				1437	1.8 0 3.83088e-05 9.33333e-05
				1438	2.4 0 3.83088e-05 9.33333e-05
				1439	3 0 3.83088e-05 9.33333e-05
				1440	3.6 0 3.83088e-05 9.33333e-05
				1441	END DIST
				1442
				1443	Metal 5 OVER 4 UNDER 6
				1444	DIST count 12 width 0.3
				1445	0.3 0 3.83088e-05 9.33333e-05
				1446	0.6 0 3.83088e-05 9.33333e-05
				1447	0.75 0 3.83088e-05 9.33333e-05
				1448	0.9 0 3.83088e-05 9.33333e-05
				1449	1.05 0 3.83088e-05 9.33333e-05
				1450	1.2 0 3.83088e-05 9.33333e-05
				1451	1.35 0 3.83088e-05 9.33333e-05
				1452	1.5 0 3.83088e-05 9.33333e-05
				1453	1.8 0 3.83088e-05 9.33333e-05
				1454	2.4 0 3.83088e-05 9.33333e-05
				1455	3 0 3.83088e-05 9.33333e-05
				1456	3.6 0 3.83088e-05 9.33333e-05
				1457	END DIST
				1458
				1459	Metal 6 RESOVER
				1460	WIDTH Table 1 entries: 1.6
				1461
				1462	Metal 6 RESOVER 0
				1463	DIST count 55 width 1.6
				1464	0 0 0 2.2375e-05
				1465	0 1.8 0 2.2375e-05
				1466	0 3.4 0 2.2375e-05
				1467	0 4.4 0 2.2375e-05
				1468	0 5.2 0 2.2375e-05
				1469	0 6.8 0 2.2375e-05
				1470	0 7.8 0 2.2375e-05
				1471	0 8.6 0 2.2375e-05
				1472	0 10.2 0 2.2375e-05
				1473	0 13.6 0 2.2375e-05
				1474	1.8 1.8 0 2.2375e-05
				1475	1.8 3.4 0 2.2375e-05
				1476	1.8 4.4 0 2.2375e-05
				1477	1.8 5.2 0 2.2375e-05
				1478	1.8 6.8 0 2.2375e-05
				1479	1.8 7.8 0 2.2375e-05
				1480	1.8 8.6 0 2.2375e-05
				1481	1.8 10.2 0 2.2375e-05
				1482	1.8 13.6 0 2.2375e-05
				1483	3.4 3.4 0 2.2375e-05
				1484	3.4 4.4 0 2.2375e-05
				1485	3.4 5.2 0 2.2375e-05
				1486	3.4 6.8 0 2.2375e-05
				1487	3.4 7.8 0 2.2375e-05
				1488	3.4 8.6 0 2.2375e-05
				1489	3.4 10.2 0 2.2375e-05
				1490	3.4 13.6 0 2.2375e-05
				1491	4.4 4.4 0 2.2375e-05
				1492	4.4 5.2 0 2.2375e-05
				1493	4.4 6.8 0 2.2375e-05
				1494	4.4 7.8 0 2.2375e-05
				1495	4.4 8.6 0 2.2375e-05
				1496	4.4 10.2 0 2.2375e-05
				1497	4.4 13.6 0 2.2375e-05
				1498	5.2 5.2 0 2.2375e-05
				1499	5.2 6.8 0 2.2375e-05
				1500	5.2 7.8 0 2.2375e-05
				1501	5.2 8.6 0 2.2375e-05
				1502	5.2 10.2 0 2.2375e-05
				1503	5.2 13.6 0 2.2375e-05
				1504	6.8 6.8 0 2.2375e-05
				1505	6.8 7.8 0 2.2375e-05
				1506	6.8 8.6 0 2.2375e-05
				1507	6.8 10.2 0 2.2375e-05
				1508	6.8 13.6 0 2.2375e-05
				1509	7.8 7.8 0 2.2375e-05
				1510	7.8 8.6 0 2.2375e-05
				1511	7.8 10.2 0 2.2375e-05
				1512	7.8 13.6 0 2.2375e-05
				1513	8.6 8.6 0 2.2375e-05
				1514	8.6 10.2 0 2.2375e-05
				1515	8.6 13.6 0 2.2375e-05
				1516	10.2 10.2 0 2.2375e-05
				1517	10.2 13.6 0 2.2375e-05
				1518	13.6 0 13.6 2.2375e-05
				1519	END DIST
				1520
				1521	Metal 6 RESOVER 1
				1522	DIST count 0 width 1.6
				1523	END DIST
				1524
				1525	Metal 6 RESOVER 2
				1526	DIST count 0 width 1.6
				1527	END DIST
				1528
				1529	Metal 6 RESOVER 3
				1530	DIST count 0 width 1.6
				1531	END DIST
				1532
				1533	Metal 6 RESOVER 4
				1534	DIST count 0 width 1.6
				1535	END DIST
				1536
				1537	Metal 6 RESOVER 5
				1538	DIST count 0 width 1.6
				1539	END DIST
				1540
				1541	Metal 6 OVER
				1542	WIDTH Table 1 entries: 1.6
				1543
				1544	Metal 6 OVER 0
				1545	DIST count 12 width 1.6
				1546	1.6 0 4.42999e-05 1.11875e-05
				1547	3.2 0 4.42999e-05 1.11875e-05
				1548	4 0 4.42999e-05 1.11875e-05
				1549	4.8 0 4.42999e-05 1.11875e-05
				1550	5.6 0 4.42999e-05 1.11875e-05
				1551	6.4 0 4.42999e-05 1.11875e-05
				1552	7.2 0 4.42999e-05 1.11875e-05
				1553	8 0 4.42999e-05 1.11875e-05
				1554	9.6 0 4.42999e-05 1.11875e-05
				1555	12.8 0 4.42999e-05 1.11875e-05
				1556	16 0 4.42999e-05 1.11875e-05
				1557	19.2 0 4.42999e-05 1.11875e-05
				1558	END DIST
				1559
				1560	Metal 6 OVER 1
				1561	DIST count 12 width 1.6
				1562	1.6 0 4.42999e-05 1.11875e-05
				1563	3.2 0 4.42999e-05 1.11875e-05
				1564	4 0 4.42999e-05 1.11875e-05
				1565	4.8 0 4.42999e-05 1.11875e-05
				1566	5.6 0 4.42999e-05 1.11875e-05
				1567	6.4 0 4.42999e-05 1.11875e-05
				1568	7.2 0 4.42999e-05 1.11875e-05
				1569	8 0 4.42999e-05 1.11875e-05
				1570	9.6 0 4.42999e-05 1.11875e-05
				1571	12.8 0 4.42999e-05 1.11875e-05
				1572	16 0 4.42999e-05 1.11875e-05
				1573	19.2 0 4.42999e-05 1.11875e-05
				1574	END DIST
				1575
				1576	Metal 6 OVER 2
				1577	DIST count 12 width 1.6
				1578	1.6 0 4.42999e-05 1.11875e-05
				1579	3.2 0 4.42999e-05 1.11875e-05
				1580	4 0 4.42999e-05 1.11875e-05
				1581	4.8 0 4.42999e-05 1.11875e-05
				1582	5.6 0 4.42999e-05 1.11875e-05
				1583	6.4 0 4.42999e-05 1.11875e-05
				1584	7.2 0 4.42999e-05 1.11875e-05
				1585	8 0 4.42999e-05 1.11875e-05
				1586	9.6 0 4.42999e-05 1.11875e-05
				1587	12.8 0 4.42999e-05 1.11875e-05
				1588	16 0 4.42999e-05 1.11875e-05
				1589	19.2 0 4.42999e-05 1.11875e-05
				1590	END DIST
				1591
				1592	Metal 6 OVER 3
				1593	DIST count 12 width 1.6
				1594	1.6 0 4.42999e-05 1.11875e-05
				1595	3.2 0 4.42999e-05 1.11875e-05
				1596	4 0 4.42999e-05 1.11875e-05
				1597	4.8 0 4.42999e-05 1.11875e-05
				1598	5.6 0 4.42999e-05 1.11875e-05
				1599	6.4 0 4.42999e-05 1.11875e-05
				1600	7.2 0 4.42999e-05 1.11875e-05
				1601	8 0 4.42999e-05 1.11875e-05
				1602	9.6 0 4.42999e-05 1.11875e-05
				1603	12.8 0 4.42999e-05 1.11875e-05
				1604	16 0 4.42999e-05 1.11875e-05
				1605	19.2 0 4.42999e-05 1.11875e-05
				1606	END DIST
				1607
				1608	Metal 6 OVER 4
				1609	DIST count 12 width 1.6
				1610	1.6 0 4.42999e-05 1.11875e-05
				1611	3.2 0 4.42999e-05 1.11875e-05
				1612	4 0 4.42999e-05 1.11875e-05
				1613	4.8 0 4.42999e-05 1.11875e-05
				1614	5.6 0 4.42999e-05 1.11875e-05
				1615	6.4 0 4.42999e-05 1.11875e-05
				1616	7.2 0 4.42999e-05 1.11875e-05
				1617	8 0 4.42999e-05 1.11875e-05
				1618	9.6 0 4.42999e-05 1.11875e-05
				1619	12.8 0 4.42999e-05 1.11875e-05
				1620	16 0 4.42999e-05 1.11875e-05
				1621	19.2 0 4.42999e-05 1.11875e-05
				1622	END DIST
				1623
				1624	Metal 6 OVER 5
				1625	DIST count 12 width 1.6
				1626	1.6 0 4.42999e-05 1.11875e-05
				1627	3.2 0 4.42999e-05 1.11875e-05
				1628	4 0 4.42999e-05 1.11875e-05
				1629	4.8 0 4.42999e-05 1.11875e-05
				1630	5.6 0 4.42999e-05 1.11875e-05
				1631	6.4 0 4.42999e-05 1.11875e-05
				1632	7.2 0 4.42999e-05 1.11875e-05
				1633	8 0 4.42999e-05 1.11875e-05
				1634	9.6 0 4.42999e-05 1.11875e-05
				1635	12.8 0 4.42999e-05 1.11875e-05
				1636	16 0 4.42999e-05 1.11875e-05
				1637	19.2 0 4.42999e-05 1.11875e-05
				1638	END DIST
				1639
				1640	Metal 6 UNDER
				1641	WIDTH Table 0 entries:
				1642
				1643	Metal 6 DIAGUNDER
				1644	WIDTH Table 0 entries:
				1645	END DensityModel 0