blob: c1cf45a537899de024be29e305d15429564c138c [file] [log] [blame]
Extraction Rules for OpenRCX
DIAGMODEL ON
LayerCount 5
DensityRate 1 0
DensityModel 0
Metal 1 RESOVER
WIDTH Table 1 entries: 0.23
Metal 1 RESOVER 0
DIST count 55 width 0.23
0 0 0 0.000395696
0 0.33 0 0.000395696
0 0.56 0 0.000395696
0 0.775 0 0.000395696
0 0.89 0 0.000395696
0 1.12 0 0.000395696
0 1.335 0 0.000395696
0 1.45 0 0.000395696
0 1.68 0 0.000395696
0 2.24 0 0.000395696
0.33 0.33 0 0.000395696
0.33 0.56 0 0.000395696
0.33 0.775 0 0.000395696
0.33 0.89 0 0.000395696
0.33 1.12 0 0.000395696
0.33 1.335 0 0.000395696
0.33 1.45 0 0.000395696
0.33 1.68 0 0.000395696
0.33 2.24 0 0.000395696
0.56 0.56 0 0.000395696
0.56 0.775 0 0.000395696
0.56 0.89 0 0.000395696
0.56 1.12 0 0.000395696
0.56 1.335 0 0.000395696
0.56 1.45 0 0.000395696
0.56 1.68 0 0.000395696
0.56 2.24 0 0.000395696
0.775 0.775 0 0.000395696
0.775 0.89 0 0.000395696
0.775 1.12 0 0.000395696
0.775 1.335 0 0.000395696
0.775 1.45 0 0.000395696
0.775 1.68 0 0.000395696
0.775 2.24 0 0.000395696
0.89 0.89 0 0.000395696
0.89 1.12 0 0.000395696
0.89 1.335 0 0.000395696
0.89 1.45 0 0.000395696
0.89 1.68 0 0.000395696
0.89 2.24 0 0.000395696
1.12 1.12 0 0.000395696
1.12 1.335 0 0.000395696
1.12 1.45 0 0.000395696
1.12 1.68 0 0.000395696
1.12 2.24 0 0.000395696
1.335 1.335 0 0.000395696
1.335 1.45 0 0.000395696
1.335 1.68 0 0.000395696
1.335 2.24 0 0.000395696
1.45 1.45 0 0.000395696
1.45 1.68 0 0.000395696
1.45 2.24 0 0.000395696
1.68 1.68 0 0.000395696
1.68 2.24 0 0.000395696
2.24 0 2.24 0.000395696
END DIST
Metal 1 OVER
WIDTH Table 1 entries: 0.23
Metal 1 OVER 0
DIST count 12 width 0.23
0.23 0.000137987 9.18354e-07 0.000197848
0.46 8.04445e-05 6.971e-06 0.000197848
0.575 6.6619e-05 9.76238e-06 0.000197848
0.69 5.80466e-05 1.17146e-05 0.000197848
0.805 5.03101e-05 1.4094e-05 0.000197848
0.92 4.54466e-05 1.57433e-05 0.000197848
1.035 4.04834e-05 1.78834e-05 0.000197848
1.15 3.66118e-05 1.96377e-05 0.000197848
1.38 2.8659e-05 2.46263e-05 0.000197848
1.84 2.18429e-05 2.89855e-05 0.000197848
2.3 1.68681e-05 3.21813e-05 0.000197848
2.76 0 4.77015e-05 0.000197848
END DIST
Metal 1 UNDER
WIDTH Table 1 entries: 0.23
Metal 1 UNDER 2
DIST count 12 width 0.23
0.23 0.000122147 1.65282e-05 0.000197848
0.46 6.36676e-05 2.90067e-05 0.000197848
0.575 4.71427e-05 3.6228e-05 0.000197848
0.69 3.87954e-05 3.9518e-05 0.000197848
0.805 3.11208e-05 4.40301e-05 0.000197848
0.92 2.65161e-05 4.72207e-05 0.000197848
1.035 2.18567e-05 5.08792e-05 0.000197848
1.15 1.83622e-05 5.36233e-05 0.000197848
1.38 1.34699e-05 5.74647e-05 0.000197848
1.84 8.68928e-06 6.23485e-05 0.000197848
2.3 5.2274e-06 6.58852e-05 0.000197848
2.76 0 7.11692e-05 0.000197848
END DIST
Metal 1 UNDER 3
DIST count 12 width 0.23
0.23 0.000132049 6.87051e-06 0.000197848
0.46 7.38661e-05 1.46129e-05 0.000197848
0.575 5.97106e-05 1.85652e-05 0.000197848
0.69 5.09362e-05 2.11508e-05 0.000197848
0.805 4.09856e-05 2.6403e-05 0.000197848
0.92 3.61643e-05 2.8405e-05 0.000197848
1.035 3.11204e-05 3.12825e-05 0.000197848
1.15 2.72702e-05 3.35078e-05 0.000197848
1.38 2.07381e-05 3.7765e-05 0.000197848
1.84 1.42769e-05 4.31817e-05 0.000197848
2.3 9.5982e-06 4.71043e-05 0.000197848
2.76 0 5.61297e-05 0.000197848
END DIST
Metal 1 UNDER 4
DIST count 12 width 0.23
0.23 0.00013471 4.36861e-06 0.000197848
0.46 7.67599e-05 1.1341e-05 0.000197848
0.575 6.27267e-05 1.48271e-05 0.000197848
0.69 5.43754e-05 1.80735e-05 0.000197848
0.805 4.65653e-05 2.0591e-05 0.000197848
0.92 4.13937e-05 2.30853e-05 0.000197848
1.035 3.42688e-05 2.70444e-05 0.000197848
1.15 3.04715e-05 2.92483e-05 0.000197848
1.38 2.47724e-05 3.21064e-05 0.000197848
1.84 1.77402e-05 3.68879e-05 0.000197848
2.3 1.16465e-05 4.18099e-05 0.000197848
2.76 0 5.25686e-05 0.000197848
END DIST
Metal 1 UNDER 5
DIST count 12 width 0.23
0.23 0.000135951 3.20653e-06 0.000197848
0.46 7.81386e-05 9.78282e-06 0.000197848
0.575 6.41802e-05 1.31095e-05 0.000197848
0.69 5.62245e-05 1.64165e-05 0.000197848
0.805 4.8482e-05 1.88203e-05 0.000197848
0.92 4.36238e-05 2.1604e-05 0.000197848
1.035 3.84211e-05 2.31534e-05 0.000197848
1.15 3.40767e-05 2.4617e-05 0.000197848
1.38 2.63104e-05 2.9712e-05 0.000197848
1.84 1.91962e-05 3.421e-05 0.000197848
2.3 1.41075e-05 3.79091e-05 0.000197848
2.76 0 5.09639e-05 0.000197848
END DIST
Metal 1 DIAGUNDER
WIDTH Table 1 entries: 0.23
Metal 1 DIAGUNDER 2
DIST count 13 width 0.23
0 0 2.55026e-05 0.000197848
0.23 0 2.02799e-05 0.000197848
0.46 0 1.81574e-05 0.000197848
0.575 0 1.71719e-05 0.000197848
0.69 0 1.63359e-05 0.000197848
0.805 0 1.55264e-05 0.000197848
0.92 0 1.46436e-05 0.000197848
1.035 0 1.36943e-05 0.000197848
1.15 0 1.28496e-05 0.000197848
1.38 0 1.14616e-05 0.000197848
1.84 0 9.28129e-06 0.000197848
2.3 0 7.52508e-06 0.000197848
2.76 0 6.27626e-06 0.000197848
END DIST
Metal 1 DIAGUNDER 3
DIST count 13 width 0.23
0 0 1.20899e-05 0.000197848
0.23 0 9.62841e-06 0.000197848
0.46 0 9.51572e-06 0.000197848
0.575 0 9.39447e-06 0.000197848
0.69 0 9.28303e-06 0.000197848
0.805 0 9.14379e-06 0.000197848
0.92 0 8.94238e-06 0.000197848
1.035 0 8.65665e-06 0.000197848
1.15 0 8.39548e-06 0.000197848
1.38 0 7.96605e-06 0.000197848
1.84 0 7.16012e-06 0.000197848
2.3 0 6.26008e-06 0.000197848
2.76 0 5.58059e-06 0.000197848
END DIST
Metal 1 DIAGUNDER 4
DIST count 13 width 0.23
0 0 8.10446e-06 0.000197848
0.23 0 6.20479e-06 0.000197848
0.46 0 6.28118e-06 0.000197848
0.575 0 6.26298e-06 0.000197848
0.69 0 6.24067e-06 0.000197848
0.805 0 6.20604e-06 0.000197848
0.92 0 6.14774e-06 0.000197848
1.035 0 6.0491e-06 0.000197848
1.15 0 5.95773e-06 0.000197848
1.38 0 5.80736e-06 0.000197848
1.84 0 5.48518e-06 0.000197848
2.3 0 5.04181e-06 0.000197848
2.76 0 4.69543e-06 0.000197848
END DIST
Metal 1 DIAGUNDER 5
DIST count 13 width 0.23
0 0 6.48041e-06 0.000197848
0.23 0 5.01383e-06 0.000197848
0.46 0 5.08186e-06 0.000197848
0.575 0 5.08276e-06 0.000197848
0.69 0 5.08584e-06 0.000197848
0.805 0 5.08509e-06 0.000197848
0.92 0 5.05707e-06 0.000197848
1.035 0 5.03259e-06 0.000197848
1.15 0 5.01102e-06 0.000197848
1.38 0 4.97466e-06 0.000197848
1.84 0 4.7821e-06 0.000197848
2.3 0 4.56994e-06 0.000197848
2.76 0 4.4168e-06 0.000197848
END DIST
Metal 2 RESOVER
WIDTH Table 1 entries: 0.28
Metal 2 RESOVER 0
DIST count 55 width 0.28
0 0 0 0.000325036
0 0.28 0 0.000325036
0 0.56 0 0.000325036
0 0.7 0 0.000325036
0 0.84 0 0.000325036
0 1.12 0 0.000325036
0 1.26 0 0.000325036
0 1.4 0 0.000325036
0 1.68 0 0.000325036
0 2.24 0 0.000325036
0.28 0.28 0 0.000325036
0.28 0.56 0 0.000325036
0.28 0.7 0 0.000325036
0.28 0.84 0 0.000325036
0.28 1.12 0 0.000325036
0.28 1.26 0 0.000325036
0.28 1.4 0 0.000325036
0.28 1.68 0 0.000325036
0.28 2.24 0 0.000325036
0.56 0.56 0 0.000325036
0.56 0.7 0 0.000325036
0.56 0.84 0 0.000325036
0.56 1.12 0 0.000325036
0.56 1.26 0 0.000325036
0.56 1.4 0 0.000325036
0.56 1.68 0 0.000325036
0.56 2.24 0 0.000325036
0.7 0.7 0 0.000325036
0.7 0.84 0 0.000325036
0.7 1.12 0 0.000325036
0.7 1.26 0 0.000325036
0.7 1.4 0 0.000325036
0.7 1.68 0 0.000325036
0.7 2.24 0 0.000325036
0.84 0.84 0 0.000325036
0.84 1.12 0 0.000325036
0.84 1.26 0 0.000325036
0.84 1.4 0 0.000325036
0.84 1.68 0 0.000325036
0.84 2.24 0 0.000325036
1.12 1.12 0 0.000325036
1.12 1.26 0 0.000325036
1.12 1.4 0 0.000325036
1.12 1.68 0 0.000325036
1.12 2.24 0 0.000325036
1.26 1.26 0 0.000325036
1.26 1.4 0 0.000325036
1.26 1.68 0 0.000325036
1.26 2.24 0 0.000325036
1.4 1.4 0 0.000325036
1.4 1.68 0 0.000325036
1.4 2.24 0 0.000325036
1.68 1.68 0 0.000325036
1.68 2.24 0 0.000325036
2.24 0 2.24 0.000325036
END DIST
Metal 2 RESOVER 1
DIST count 0 width 0.28
END DIST
Metal 2 OVER
WIDTH Table 1 entries: 0.28
Metal 2 OVER 0
DIST count 12 width 0.28
0.28 0.000126828 5.41125e-08 0.000162518
0.56 7.72023e-05 1.30109e-06 0.000162518
0.7 6.49272e-05 3.82001e-06 0.000162518
0.84 5.75621e-05 5.33136e-06 0.000162518
0.98 5.05513e-05 7.43246e-06 0.000162518
1.12 4.63449e-05 8.69312e-06 0.000162518
1.26 4.17342e-05 1.05739e-05 0.000162518
1.4 3.83479e-05 1.19127e-05 0.000162518
1.68 3.0268e-05 1.71262e-05 0.000162518
2.24 2.37152e-05 2.08915e-05 0.000162518
2.8 1.89603e-05 2.3628e-05 0.000162518
3.36 0 4.10592e-05 0.000162518
END DIST
Metal 2 OVER 1
DIST count 12 width 0.28
0.28 0.000111517 1.26152e-05 0.000162518
0.56 6.16028e-05 2.39072e-05 0.000162518
0.7 4.94075e-05 2.93458e-05 0.000162518
0.84 4.20902e-05 3.33395e-05 0.000162518
0.98 3.30407e-05 3.99656e-05 0.000162518
1.12 2.90782e-05 4.20969e-05 0.000162518
1.26 2.50572e-05 4.6247e-05 0.000162518
1.4 2.20639e-05 4.87674e-05 0.000162518
1.68 1.779e-05 5.02819e-05 0.000162518
2.24 1.30238e-05 5.61286e-05 0.000162518
2.8 8.39e-06 6.08842e-05 0.000162518
3.36 0 6.93664e-05 0.000162518
END DIST
Metal 2 UNDER
WIDTH Table 1 entries: 0.28
Metal 2 UNDER 3
DIST count 12 width 0.28
0.28 0.000107674 1.5913e-05 0.000162518
0.56 5.71857e-05 2.7816e-05 0.000162518
0.7 4.46925e-05 3.36179e-05 0.000162518
0.84 3.71966e-05 3.78294e-05 0.000162518
0.98 2.75907e-05 4.51103e-05 0.000162518
1.12 2.36254e-05 4.74235e-05 0.000162518
1.26 1.9638e-05 5.16394e-05 0.000162518
1.4 1.66475e-05 5.423e-05 0.000162518
1.68 1.24607e-05 5.55104e-05 0.000162518
2.24 8.21265e-06 6.1105e-05 0.000162518
2.8 5.13643e-06 6.43176e-05 0.000162518
3.36 0 6.95573e-05 0.000162518
END DIST
Metal 2 UNDER 4
DIST count 12 width 0.28
0.28 0.000118876 4.23823e-06 0.000162518
0.56 6.84594e-05 1.17786e-05 0.000162518
0.7 5.57915e-05 1.56035e-05 0.000162518
0.84 4.81907e-05 1.77802e-05 0.000162518
0.98 4.08631e-05 2.10309e-05 0.000162518
1.12 3.64665e-05 2.31147e-05 0.000162518
1.26 2.9751e-05 2.77849e-05 0.000162518
1.4 2.63284e-05 2.97649e-05 0.000162518
1.68 2.14322e-05 3.28313e-05 0.000162518
2.24 1.50253e-05 3.83269e-05 0.000162518
2.8 9.60569e-06 4.30866e-05 0.000162518
3.36 0 5.21925e-05 0.000162518
END DIST
Metal 2 UNDER 5
DIST count 12 width 0.28
0.28 0.000122658 6.19224e-07 0.000162518
0.56 7.25444e-05 7.05512e-06 0.000162518
0.7 6.00177e-05 1.02638e-05 0.000162518
0.84 5.27857e-05 1.29354e-05 0.000162518
0.98 4.60342e-05 1.58505e-05 0.000162518
1.12 4.11841e-05 1.74742e-05 0.000162518
1.26 3.64779e-05 1.9209e-05 0.000162518
1.4 3.27558e-05 2.09536e-05 0.000162518
1.68 2.53126e-05 2.56821e-05 0.000162518
2.24 1.85217e-05 3.07615e-05 0.000162518
2.8 1.36269e-05 3.4417e-05 0.000162518
3.36 0 4.7105e-05 0.000162518
END DIST
Metal 2 DIAGUNDER
WIDTH Table 1 entries: 0.28
Metal 2 DIAGUNDER 3
DIST count 13 width 0.28
0 0 2.86411e-05 0.000162518
0.28 0 2.21796e-05 0.000162518
0.56 0 1.9293e-05 0.000162518
0.7 0 1.81725e-05 0.000162518
0.84 0 1.72557e-05 0.000162518
0.98 0 1.6305e-05 0.000162518
1.12 0 1.51628e-05 0.000162518
1.26 0 1.41919e-05 0.000162518
1.4 0 1.33564e-05 0.000162518
1.68 0 1.19925e-05 0.000162518
2.24 0 9.72587e-06 0.000162518
2.8 0 8.01122e-06 0.000162518
3.36 0 6.84524e-06 0.000162518
END DIST
Metal 2 DIAGUNDER 4
DIST count 13 width 0.28
0 0 1.44585e-05 0.000162518
0.28 0 1.13239e-05 0.000162518
0.56 0 1.10236e-05 0.000162518
0.7 0 1.08622e-05 0.000162518
0.84 0 1.07302e-05 0.000162518
0.98 0 1.05093e-05 0.000162518
1.12 0 1.01203e-05 0.000162518
1.26 0 9.7897e-06 0.000162518
1.4 0 9.50519e-06 0.000162518
1.68 0 9.04067e-06 0.000162518
2.24 0 7.97473e-06 0.000162518
2.8 0 6.97076e-06 0.000162518
3.36 0 6.28805e-06 0.000162518
END DIST
Metal 2 DIAGUNDER 5
DIST count 13 width 0.28
0 0 1.08743e-05 0.000162518
0.28 0 8.23456e-06 0.000162518
0.56 0 8.3002e-06 0.000162518
0.7 0 8.26394e-06 0.000162518
0.84 0 8.23052e-06 0.000162518
0.98 0 8.1656e-06 0.000162518
1.12 0 8.07128e-06 0.000162518
1.26 0 7.99001e-06 0.000162518
1.4 0 7.91919e-06 0.000162518
1.68 0 7.72341e-06 0.000162518
2.24 0 7.18166e-06 0.000162518
2.8 0 6.70624e-06 0.000162518
3.36 0 6.31261e-06 0.000162518
END DIST
Metal 2 OVERUNDER
WIDTH Table 1 entries: 0.28
Metal 2 OVER 1 UNDER 3
DIST count 12 width 0.28
0.28 9.4631e-05 2.8761e-05 0.000162518
0.56 4.43557e-05 4.56734e-05 0.000162518
0.7 3.21817e-05 5.37197e-05 0.000162518
0.84 2.48773e-05 6.00081e-05 0.000162518
0.98 1.84943e-05 6.59126e-05 0.000162518
1.12 1.46645e-05 6.88203e-05 0.000162518
1.26 1.13168e-05 7.43044e-05 0.000162518
1.4 8.80616e-06 7.72763e-05 0.000162518
1.68 5.29118e-06 7.69932e-05 0.000162518
2.24 3.23563e-06 8.15781e-05 0.000162518
2.8 1.74713e-06 8.33987e-05 0.000162518
3.36 0 8.53973e-05 0.000162518
END DIST
Metal 2 OVER 1 UNDER 4
DIST count 12 width 0.28
0.28 0.000105877 1.70607e-05 0.000162518
0.56 5.21827e-05 3.32785e-05 0.000162518
0.7 4.00764e-05 3.93206e-05 0.000162518
0.84 3.28127e-05 4.35581e-05 0.000162518
0.98 2.61485e-05 4.83775e-05 0.000162518
1.12 2.215e-05 5.10248e-05 0.000162518
1.26 1.81728e-05 5.54555e-05 0.000162518
1.4 1.51899e-05 5.83e-05 0.000162518
1.68 1.10138e-05 6.03748e-05 0.000162518
2.24 7.09683e-06 6.58077e-05 0.000162518
2.8 4.26039e-06 6.9081e-05 0.000162518
3.36 0 7.36725e-05 0.000162518
END DIST
Metal 2 OVER 1 UNDER 5
DIST count 12 width 0.28
0.28 0.000108925 1.43789e-05 0.000162518
0.56 5.85958e-05 2.65158e-05 0.000162518
0.7 4.61864e-05 3.24504e-05 0.000162518
0.84 3.95621e-05 3.76979e-05 0.000162518
0.98 3.19138e-05 4.41254e-05 0.000162518
1.12 2.72255e-05 4.66967e-05 0.000162518
1.26 2.17095e-05 5.15659e-05 0.000162518
1.4 1.824e-05 5.40694e-05 0.000162518
1.68 1.35543e-05 5.55651e-05 0.000162518
2.24 9.1425e-06 6.1339e-05 0.000162518
2.8 5.94776e-06 6.48595e-05 0.000162518
3.36 0 7.1054e-05 0.000162518
END DIST
Metal 3 RESOVER
WIDTH Table 1 entries: 0.28
Metal 3 RESOVER 0
DIST count 55 width 0.28
0 0 0 0.000325036
0 0.28 0 0.000325036
0 0.56 0 0.000325036
0 0.7 0 0.000325036
0 0.84 0 0.000325036
0 1.12 0 0.000325036
0 1.26 0 0.000325036
0 1.4 0 0.000325036
0 1.68 0 0.000325036
0 2.24 0 0.000325036
0.28 0.28 0 0.000325036
0.28 0.56 0 0.000325036
0.28 0.7 0 0.000325036
0.28 0.84 0 0.000325036
0.28 1.12 0 0.000325036
0.28 1.26 0 0.000325036
0.28 1.4 0 0.000325036
0.28 1.68 0 0.000325036
0.28 2.24 0 0.000325036
0.56 0.56 0 0.000325036
0.56 0.7 0 0.000325036
0.56 0.84 0 0.000325036
0.56 1.12 0 0.000325036
0.56 1.26 0 0.000325036
0.56 1.4 0 0.000325036
0.56 1.68 0 0.000325036
0.56 2.24 0 0.000325036
0.7 0.7 0 0.000325036
0.7 0.84 0 0.000325036
0.7 1.12 0 0.000325036
0.7 1.26 0 0.000325036
0.7 1.4 0 0.000325036
0.7 1.68 0 0.000325036
0.7 2.24 0 0.000325036
0.84 0.84 0 0.000325036
0.84 1.12 0 0.000325036
0.84 1.26 0 0.000325036
0.84 1.4 0 0.000325036
0.84 1.68 0 0.000325036
0.84 2.24 0 0.000325036
1.12 1.12 0 0.000325036
1.12 1.26 0 0.000325036
1.12 1.4 0 0.000325036
1.12 1.68 0 0.000325036
1.12 2.24 0 0.000325036
1.26 1.26 0 0.000325036
1.26 1.4 0 0.000325036
1.26 1.68 0 0.000325036
1.26 2.24 0 0.000325036
1.4 1.4 0 0.000325036
1.4 1.68 0 0.000325036
1.4 2.24 0 0.000325036
1.68 1.68 0 0.000325036
1.68 2.24 0 0.000325036
2.24 0 2.24 0.000325036
END DIST
Metal 3 RESOVER 1
DIST count 0 width 0.28
END DIST
Metal 3 RESOVER 2
DIST count 0 width 0.28
END DIST
Metal 3 OVER
WIDTH Table 1 entries: 0.28
Metal 3 OVER 0
DIST count 12 width 0.28
0.28 0.000130147 5.41126e-08 0.000162518
0.56 8.06781e-05 5.41125e-08 0.000162518
0.7 6.84808e-05 5.41125e-08 0.000162518
0.84 6.11623e-05 9.8247e-07 0.000162518
0.98 5.42115e-05 2.86892e-06 0.000162518
1.12 5.00411e-05 4.00079e-06 0.000162518
1.26 4.54704e-05 5.67655e-06 0.000162518
1.4 4.21193e-05 6.85649e-06 0.000162518
1.68 3.33861e-05 1.25501e-05 0.000162518
2.24 2.683e-05 1.58495e-05 0.000162518
2.8 2.20576e-05 1.82635e-05 0.000162518
3.36 0 3.85345e-05 0.000162518
END DIST
Metal 3 OVER 1
DIST count 12 width 0.28
0.28 0.000124472 5.41126e-08 0.000162518
0.56 7.46128e-05 5.59483e-06 0.000162518
0.7 6.22354e-05 9.03603e-06 0.000162518
0.84 5.48088e-05 1.10734e-05 0.000162518
0.98 4.77335e-05 1.39474e-05 0.000162518
1.12 4.34883e-05 1.57025e-05 0.000162518
1.26 3.56172e-05 2.14735e-05 0.000162518
1.4 3.23444e-05 2.31924e-05 0.000162518
1.68 2.76448e-05 2.576e-05 0.000162518
2.24 2.12713e-05 3.08186e-05 0.000162518
2.8 1.66514e-05 3.44862e-05 0.000162518
3.36 0 5.04164e-05 0.000162518
END DIST
Metal 3 OVER 2
DIST count 12 width 0.28
0.28 0.000111793 1.22765e-05 0.000162518
0.56 6.18476e-05 2.35654e-05 0.000162518
0.7 4.96385e-05 2.90079e-05 0.000162518
0.84 4.23132e-05 3.30583e-05 0.000162518
0.98 3.31558e-05 3.97886e-05 0.000162518
1.12 2.91909e-05 4.18836e-05 0.000162518
1.26 2.51671e-05 4.60952e-05 0.000162518
1.4 2.21725e-05 4.86184e-05 0.000162518
1.68 1.78932e-05 5.00003e-05 0.000162518
2.24 1.3121e-05 5.58855e-05 0.000162518
2.8 8.43401e-06 6.06801e-05 0.000162518
3.36 0 6.91956e-05 0.000162518
END DIST
Metal 3 UNDER
WIDTH Table 1 entries: 0.28
Metal 3 UNDER 4
DIST count 12 width 0.28
0.28 0.000109488 1.42699e-05 0.000162518
0.56 5.91534e-05 2.5806e-05 0.000162518
0.7 4.67321e-05 3.14094e-05 0.000162518
0.84 3.92793e-05 3.55334e-05 0.000162518
0.98 3.06125e-05 4.17694e-05 0.000162518
1.12 2.65676e-05 4.40588e-05 0.000162518
1.26 2.24393e-05 4.83664e-05 0.000162518
1.4 1.80128e-05 5.23312e-05 0.000162518
1.68 1.38495e-05 5.34561e-05 0.000162518
2.24 9.40264e-06 5.91882e-05 0.000162518
2.8 6.18252e-06 6.25051e-05 0.000162518
3.36 0 6.87609e-05 0.000162518
END DIST
Metal 3 UNDER 5
DIST count 12 width 0.28
0.28 0.000122451 8.09325e-07 0.000162518
0.56 7.22443e-05 7.61556e-06 0.000162518
0.7 5.96769e-05 1.10368e-05 0.000162518
0.84 5.27413e-05 1.40532e-05 0.000162518
0.98 4.62685e-05 1.75371e-05 0.000162518
1.12 4.12916e-05 1.9454e-05 0.000162518
1.26 3.63906e-05 2.1085e-05 0.000162518
1.4 3.23403e-05 2.23083e-05 0.000162518
1.68 2.48446e-05 2.73415e-05 0.000162518
2.24 1.81215e-05 3.2674e-05 0.000162518
2.8 1.32773e-05 3.65114e-05 0.000162518
3.36 0 4.90257e-05 0.000162518
END DIST
Metal 3 DIAGUNDER
WIDTH Table 1 entries: 0.28
Metal 3 DIAGUNDER 4
DIST count 13 width 0.28
0 0 2.98675e-05 0.000162518
0.28 0 2.28027e-05 0.000162518
0.56 0 2.01063e-05 0.000162518
0.7 0 1.90073e-05 0.000162518
0.84 0 1.8108e-05 0.000162518
0.98 0 1.71769e-05 0.000162518
1.12 0 1.60605e-05 0.000162518
1.26 0 1.51116e-05 0.000162518
1.4 0 1.42951e-05 0.000162518
1.68 0 1.2962e-05 0.000162518
2.24 0 1.07343e-05 0.000162518
2.8 0 9.0406e-06 0.000162518
3.36 0 7.88891e-06 0.000162518
END DIST
Metal 3 DIAGUNDER 5
DIST count 13 width 0.28
0 0 1.61154e-05 0.000162518
0.28 0 1.25672e-05 0.000162518
0.56 0 1.24193e-05 0.000162518
0.7 0 1.22876e-05 0.000162518
0.84 0 1.21699e-05 0.000162518
0.98 0 1.19841e-05 0.000162518
1.12 0 1.17354e-05 0.000162518
1.26 0 1.1521e-05 0.000162518
1.4 0 1.13344e-05 0.000162518
1.68 0 1.08953e-05 0.000162518
2.24 0 9.84013e-06 0.000162518
2.8 0 8.95352e-06 0.000162518
3.36 0 8.25828e-06 0.000162518
END DIST
Metal 3 OVERUNDER
WIDTH Table 1 entries: 0.28
Metal 3 OVER 1 UNDER 4
DIST count 12 width 0.28
0.28 0.000106063 1.6783e-05 0.000162518
0.56 5.21952e-05 3.31661e-05 0.000162518
0.7 4.00793e-05 3.91979e-05 0.000162518
0.84 3.28097e-05 4.35516e-05 0.000162518
0.98 2.61538e-05 4.83699e-05 0.000162518
1.12 2.21601e-05 5.09943e-05 0.000162518
1.26 1.81824e-05 5.55761e-05 0.000162518
1.4 1.5199e-05 5.84376e-05 0.000162518
1.68 1.10224e-05 6.00951e-05 0.000162518
2.24 7.09673e-06 6.57346e-05 0.000162518
2.8 4.25404e-06 6.89844e-05 0.000162518
3.36 0 7.3547e-05 0.000162518
END DIST
Metal 3 OVER 1 UNDER 5
DIST count 12 width 0.28
0.28 0.000118256 4.26589e-06 0.000162518
0.56 6.77002e-05 1.2912e-05 0.000162518
0.7 5.61539e-05 1.81221e-05 0.000162518
0.84 4.91708e-05 2.23926e-05 0.000162518
0.98 3.96981e-05 2.79077e-05 0.000162518
1.12 3.47803e-05 3.00862e-05 0.000162518
1.26 3.01583e-05 3.2176e-05 0.000162518
1.4 2.60518e-05 3.39928e-05 0.000162518
1.68 2.05248e-05 3.67669e-05 0.000162518
2.24 1.32601e-05 4.3868e-05 0.000162518
2.8 8.96878e-06 4.80406e-05 0.000162518
3.36 0 5.69195e-05 0.000162518
END DIST
Metal 3 OVER 2 UNDER 4
DIST count 12 width 0.28
0.28 9.46527e-05 2.867e-05 0.000162518
0.56 4.43658e-05 4.55771e-05 0.000162518
0.7 3.219e-05 5.36224e-05 0.000162518
0.84 2.48845e-05 5.99964e-05 0.000162518
0.98 1.84996e-05 6.59086e-05 0.000162518
1.12 1.46688e-05 6.87448e-05 0.000162518
1.26 1.13202e-05 7.43364e-05 0.000162518
1.4 8.80874e-06 7.73215e-05 0.000162518
1.68 5.29269e-06 7.68711e-05 0.000162518
2.24 3.23657e-06 8.14981e-05 0.000162518
2.8 1.74763e-06 8.33163e-05 0.000162518
3.36 0 8.53135e-05 0.000162518
END DIST
Metal 3 OVER 2 UNDER 5
DIST count 12 width 0.28
0.28 0.000107065 1.59176e-05 0.000162518
0.56 5.64552e-05 2.87924e-05 0.000162518
0.7 4.24152e-05 3.66805e-05 0.000162518
0.84 3.43544e-05 4.34126e-05 0.000162518
0.98 2.84872e-05 4.80099e-05 0.000162518
1.12 2.38406e-05 5.06838e-05 0.000162518
1.26 1.97872e-05 5.42736e-05 0.000162518
1.4 1.64224e-05 5.7008e-05 0.000162518
1.68 1.18042e-05 5.86957e-05 0.000162518
2.24 7.69735e-06 6.43397e-05 0.000162518
2.8 4.72344e-06 6.77283e-05 0.000162518
3.36 0 7.27663e-05 0.000162518
END DIST
Metal 4 RESOVER
WIDTH Table 1 entries: 0.28
Metal 4 RESOVER 0
DIST count 55 width 0.28
0 0 0 0.000325036
0 0.28 0 0.000325036
0 0.56 0 0.000325036
0 0.7 0 0.000325036
0 0.84 0 0.000325036
0 1.12 0 0.000325036
0 1.26 0 0.000325036
0 1.4 0 0.000325036
0 1.68 0 0.000325036
0 2.24 0 0.000325036
0.28 0.28 0 0.000325036
0.28 0.56 0 0.000325036
0.28 0.7 0 0.000325036
0.28 0.84 0 0.000325036
0.28 1.12 0 0.000325036
0.28 1.26 0 0.000325036
0.28 1.4 0 0.000325036
0.28 1.68 0 0.000325036
0.28 2.24 0 0.000325036
0.56 0.56 0 0.000325036
0.56 0.7 0 0.000325036
0.56 0.84 0 0.000325036
0.56 1.12 0 0.000325036
0.56 1.26 0 0.000325036
0.56 1.4 0 0.000325036
0.56 1.68 0 0.000325036
0.56 2.24 0 0.000325036
0.7 0.7 0 0.000325036
0.7 0.84 0 0.000325036
0.7 1.12 0 0.000325036
0.7 1.26 0 0.000325036
0.7 1.4 0 0.000325036
0.7 1.68 0 0.000325036
0.7 2.24 0 0.000325036
0.84 0.84 0 0.000325036
0.84 1.12 0 0.000325036
0.84 1.26 0 0.000325036
0.84 1.4 0 0.000325036
0.84 1.68 0 0.000325036
0.84 2.24 0 0.000325036
1.12 1.12 0 0.000325036
1.12 1.26 0 0.000325036
1.12 1.4 0 0.000325036
1.12 1.68 0 0.000325036
1.12 2.24 0 0.000325036
1.26 1.26 0 0.000325036
1.26 1.4 0 0.000325036
1.26 1.68 0 0.000325036
1.26 2.24 0 0.000325036
1.4 1.4 0 0.000325036
1.4 1.68 0 0.000325036
1.4 2.24 0 0.000325036
1.68 1.68 0 0.000325036
1.68 2.24 0 0.000325036
2.24 0 2.24 0.000325036
END DIST
Metal 4 RESOVER 1
DIST count 0 width 0.28
END DIST
Metal 4 RESOVER 2
DIST count 0 width 0.28
END DIST
Metal 4 RESOVER 3
DIST count 0 width 0.28
END DIST
Metal 4 OVER
WIDTH Table 1 entries: 0.28
Metal 4 OVER 0
DIST count 12 width 0.28
0.28 0.000131337 5.41125e-08 0.000162518
0.56 8.20535e-05 5.41126e-08 0.000162518
0.7 6.99551e-05 5.41126e-08 0.000162518
0.84 6.2696e-05 5.41126e-08 0.000162518
0.98 5.58291e-05 7.60841e-07 0.000162518
1.12 5.17089e-05 1.79852e-06 0.000162518
1.26 4.72137e-05 3.31628e-06 0.000162518
1.4 4.39166e-05 4.38034e-06 0.000162518
1.68 3.5069e-05 1.01017e-05 0.000162518
2.24 2.85554e-05 1.31049e-05 0.000162518
2.8 2.38055e-05 1.53128e-05 0.000162518
3.36 0 3.71924e-05 0.000162518
END DIST
Metal 4 OVER 1
DIST count 12 width 0.28
0.28 0.000128379 5.41125e-08 0.000162518
0.56 7.88726e-05 3.92691e-07 0.000162518
0.7 6.71927e-05 3.93223e-06 0.000162518
0.84 6.00786e-05 6.09402e-06 0.000162518
0.98 5.32943e-05 7.56863e-06 0.000162518
1.12 4.86271e-05 8.69222e-06 0.000162518
1.26 4.41457e-05 9.95024e-06 0.000162518
1.4 4.05213e-05 1.17874e-05 0.000162518
1.68 3.19128e-05 1.80742e-05 0.000162518
2.24 2.53163e-05 2.24706e-05 0.000162518
2.8 2.05192e-05 2.56744e-05 0.000162518
3.36 0 4.49866e-05 0.000162518
END DIST
Metal 4 OVER 2
DIST count 12 width 0.28
0.28 0.000124168 5.41126e-08 0.000162518
0.56 7.43775e-05 5.72459e-06 0.000162518
0.7 6.20338e-05 9.11603e-06 0.000162518
0.84 5.46276e-05 1.11515e-05 0.000162518
0.98 4.75793e-05 1.39841e-05 0.000162518
1.12 4.33503e-05 1.56835e-05 0.000162518
1.26 3.56111e-05 2.13374e-05 0.000162518
1.4 3.23483e-05 2.3036e-05 0.000162518
1.68 2.76663e-05 2.55279e-05 0.000162518
2.24 2.12655e-05 3.05852e-05 0.000162518
2.8 1.66231e-05 3.42551e-05 0.000162518
3.36 0 5.01413e-05 0.000162518
END DIST
Metal 4 OVER 3
DIST count 12 width 0.28
0.28 0.000111647 1.2346e-05 0.000162518
0.56 6.17526e-05 2.3535e-05 0.000162518
0.7 4.95687e-05 2.89353e-05 0.000162518
0.84 4.22582e-05 3.2974e-05 0.000162518
0.98 3.3188e-05 3.96043e-05 0.000162518
1.12 2.92309e-05 4.17055e-05 0.000162518
1.26 2.52175e-05 4.59097e-05 0.000162518
1.4 2.22299e-05 4.84174e-05 0.000162518
1.68 1.79625e-05 4.9678e-05 0.000162518
2.24 1.3159e-05 5.56593e-05 0.000162518
2.8 8.48814e-06 6.04307e-05 0.000162518
3.36 0 6.89951e-05 0.000162518
END DIST
Metal 4 UNDER
WIDTH Table 1 entries: 0.28
Metal 4 UNDER 5
DIST count 12 width 0.28
0.28 0.000114836 8.5263e-06 0.000162518
0.56 6.45316e-05 1.77809e-05 0.000162518
0.7 5.20361e-05 2.24168e-05 0.000162518
0.84 4.45389e-05 2.50047e-05 0.000162518
0.98 3.74312e-05 2.88158e-05 0.000162518
1.12 3.31666e-05 3.13212e-05 0.000162518
1.26 2.68168e-05 3.6142e-05 0.000162518
1.4 2.35721e-05 3.83897e-05 0.000162518
1.68 1.89415e-05 4.19356e-05 0.000162518
2.24 1.22714e-05 4.83858e-05 0.000162518
2.8 8.49298e-06 5.20051e-05 0.000162518
3.36 0 6.03778e-05 0.000162518
END DIST
Metal 4 DIAGUNDER
WIDTH Table 1 entries: 0.28
Metal 4 DIAGUNDER 5
DIST count 13 width 0.28
0 0 2.77653e-05 0.000162518
0.28 0 2.17479e-05 0.000162518
0.56 0 2.04591e-05 0.000162518
0.7 0 1.96921e-05 0.000162518
0.84 0 1.90381e-05 0.000162518
0.98 0 1.83419e-05 0.000162518
1.12 0 1.75576e-05 0.000162518
1.26 0 1.68803e-05 0.000162518
1.4 0 1.62892e-05 0.000162518
1.68 0 1.5155e-05 0.000162518
2.24 0 1.30176e-05 0.000162518
2.8 0 1.13717e-05 0.000162518
3.36 0 1.01486e-05 0.000162518
END DIST
Metal 4 OVERUNDER
WIDTH Table 1 entries: 0.28
Metal 4 OVER 1 UNDER 5
DIST count 12 width 0.28
0.28 0.000113313 9.33143e-06 0.000162518
0.56 6.2816e-05 1.95441e-05 0.000162518
0.7 5.12642e-05 2.54277e-05 0.000162518
0.84 4.42927e-05 2.99838e-05 0.000162518
0.98 3.54369e-05 3.54489e-05 0.000162518
1.12 3.06237e-05 3.81877e-05 0.000162518
1.26 2.61999e-05 4.0443e-05 0.000162518
1.4 2.23792e-05 4.2513e-05 0.000162518
1.68 1.60646e-05 4.6977e-05 0.000162518
2.24 1.09348e-05 5.23607e-05 0.000162518
2.8 7.22009e-06 5.62593e-05 0.000162518
3.36 0 6.36189e-05 0.000162518
END DIST
Metal 4 OVER 2 UNDER 5
DIST count 12 width 0.28
0.28 0.000110456 1.18937e-05 0.000162518
0.56 5.96965e-05 2.30397e-05 0.000162518
0.7 4.53713e-05 3.03139e-05 0.000162518
0.84 3.7898e-05 3.33633e-05 0.000162518
0.98 2.96444e-05 3.90137e-05 0.000162518
1.12 2.55473e-05 4.17674e-05 0.000162518
1.26 2.13004e-05 4.5068e-05 0.000162518
1.4 1.81153e-05 4.76932e-05 0.000162518
1.68 1.36561e-05 5.1679e-05 0.000162518
2.24 8.94269e-06 5.689e-05 0.000162518
2.8 5.52953e-06 6.06638e-05 0.000162518
3.36 0 6.64667e-05 0.000162518
END DIST
Metal 4 OVER 3 UNDER 5
DIST count 12 width 0.28
0.28 0.000100156 2.26707e-05 0.000162518
0.56 4.78448e-05 3.95415e-05 0.000162518
0.7 3.56091e-05 4.67432e-05 0.000162518
0.84 2.82677e-05 5.1669e-05 0.000162518
0.98 2.16675e-05 5.71707e-05 0.000162518
1.12 1.77074e-05 6.02981e-05 0.000162518
1.26 1.39942e-05 6.48835e-05 0.000162518
1.4 1.12093e-05 6.78494e-05 0.000162518
1.68 7.31041e-06 6.99777e-05 0.000162518
2.24 4.52841e-06 7.4397e-05 0.000162518
2.8 2.51385e-06 7.68451e-05 0.000162518
3.36 0 7.96876e-05 0.000162518
END DIST
Metal 5 RESOVER
WIDTH Table 1 entries: 0.44
Metal 5 RESOVER 0
DIST count 55 width 0.44
0 0 0 9.32048e-05
0 0.46 0 9.32048e-05
0 0.9 0 9.32048e-05
0 1.14 0 9.32048e-05
0 1.36 0 9.32048e-05
0 1.8 0 9.32048e-05
0 2.04 0 9.32048e-05
0 2.26 0 9.32048e-05
0 2.7 0 9.32048e-05
0 3.6 0 9.32048e-05
0.46 0.46 0 9.32048e-05
0.46 0.9 0 9.32048e-05
0.46 1.14 0 9.32048e-05
0.46 1.36 0 9.32048e-05
0.46 1.8 0 9.32048e-05
0.46 2.04 0 9.32048e-05
0.46 2.26 0 9.32048e-05
0.46 2.7 0 9.32048e-05
0.46 3.6 0 9.32048e-05
0.9 0.9 0 9.32048e-05
0.9 1.14 0 9.32048e-05
0.9 1.36 0 9.32048e-05
0.9 1.8 0 9.32048e-05
0.9 2.04 0 9.32048e-05
0.9 2.26 0 9.32048e-05
0.9 2.7 0 9.32048e-05
0.9 3.6 0 9.32048e-05
1.14 1.14 0 9.32048e-05
1.14 1.36 0 9.32048e-05
1.14 1.8 0 9.32048e-05
1.14 2.04 0 9.32048e-05
1.14 2.26 0 9.32048e-05
1.14 2.7 0 9.32048e-05
1.14 3.6 0 9.32048e-05
1.36 1.36 0 9.32048e-05
1.36 1.8 0 9.32048e-05
1.36 2.04 0 9.32048e-05
1.36 2.26 0 9.32048e-05
1.36 2.7 0 9.32048e-05
1.36 3.6 0 9.32048e-05
1.8 1.8 0 9.32048e-05
1.8 2.04 0 9.32048e-05
1.8 2.26 0 9.32048e-05
1.8 2.7 0 9.32048e-05
1.8 3.6 0 9.32048e-05
2.04 2.04 0 9.32048e-05
2.04 2.26 0 9.32048e-05
2.04 2.7 0 9.32048e-05
2.04 3.6 0 9.32048e-05
2.26 2.26 0 9.32048e-05
2.26 2.7 0 9.32048e-05
2.26 3.6 0 9.32048e-05
2.7 2.7 0 9.32048e-05
2.7 3.6 0 9.32048e-05
3.6 0 3.6 9.32048e-05
END DIST
Metal 5 RESOVER 1
DIST count 0 width 0.44
END DIST
Metal 5 RESOVER 2
DIST count 0 width 0.44
END DIST
Metal 5 RESOVER 3
DIST count 0 width 0.44
END DIST
Metal 5 RESOVER 4
DIST count 0 width 0.44
END DIST
Metal 5 OVER
WIDTH Table 1 entries: 0.44
Metal 5 OVER 0
DIST count 12 width 0.44
0.46 0.000159218 3.44353e-08 4.66024e-05
0.92 9.56708e-05 3.44353e-08 4.66024e-05
1.15 8.03637e-05 3.44353e-08 4.66024e-05
1.38 7.11793e-05 3.44353e-08 4.66024e-05
1.61 6.26717e-05 8.18752e-07 4.66024e-05
1.84 5.75672e-05 1.93941e-06 4.66024e-05
2.07 5.19815e-05 3.59124e-06 4.66024e-05
2.3 4.7883e-05 4.73927e-06 4.66024e-05
2.76 3.83342e-05 1.01575e-05 4.66024e-05
3.68 2.73737e-05 1.64546e-05 4.66024e-05
4.6 0 3.33862e-05 4.66024e-05
5.52 0 3.33862e-05 4.66024e-05
END DIST
Metal 5 OVER 1
DIST count 12 width 0.44
0.46 0.000156934 3.44353e-08 4.66024e-05
0.92 9.32397e-05 3.44353e-08 4.66024e-05
1.15 7.79297e-05 1.70016e-06 4.66024e-05
1.38 6.85517e-05 3.56522e-06 4.66024e-05
1.61 6.00336e-05 5.83556e-06 4.66024e-05
1.84 5.4775e-05 7.47158e-06 4.66024e-05
2.07 4.92912e-05 9.39262e-06 4.66024e-05
2.3 4.51275e-05 1.09787e-05 4.66024e-05
2.76 3.59219e-05 1.65759e-05 4.66024e-05
3.68 2.53484e-05 2.38383e-05 4.66024e-05
4.6 0 4.57882e-05 4.66024e-05
5.52 0 4.57882e-05 4.66024e-05
END DIST
Metal 5 OVER 2
DIST count 12 width 0.44
0.46 0.000154423 4.50251e-07 4.66024e-05
0.92 9.05861e-05 2.04447e-06 4.66024e-05
1.15 7.51983e-05 5.15388e-06 4.66024e-05
1.38 6.59657e-05 7.01924e-06 4.66024e-05
1.61 5.72845e-05 9.68934e-06 4.66024e-05
1.84 5.20754e-05 1.14895e-05 4.66024e-05
2.07 4.64047e-05 1.37718e-05 4.66024e-05
2.3 4.22369e-05 1.5547e-05 4.66024e-05
2.76 3.34562e-05 2.09775e-05 4.66024e-05
3.68 2.32649e-05 2.8497e-05 4.66024e-05
4.6 0 4.99523e-05 4.66024e-05
5.52 0 4.99514e-05 4.66024e-05
END DIST
Metal 5 OVER 3
DIST count 12 width 0.44
0.46 0.000149922 3.52948e-07 4.66024e-05
0.92 8.59352e-05 7.54173e-06 4.66024e-05
1.15 7.05011e-05 1.12938e-05 4.66024e-05
1.38 6.12409e-05 1.35451e-05 4.66024e-05
1.61 5.25522e-05 1.67541e-05 4.66024e-05
1.84 4.73393e-05 1.89252e-05 4.66024e-05
2.07 4.17133e-05 2.16281e-05 4.66024e-05
2.3 3.75686e-05 2.37648e-05 4.66024e-05
2.76 2.93681e-05 2.9154e-05 4.66024e-05
3.68 1.99871e-05 3.69477e-05 4.66024e-05
4.6 0 5.69299e-05 4.66024e-05
5.52 0 5.69299e-05 4.66024e-05
END DIST
Metal 5 OVER 4
DIST count 12 width 0.44
0.46 0.000139987 1.17988e-05 4.66024e-05
0.92 7.61989e-05 2.26987e-05 4.66024e-05
1.15 6.09948e-05 2.82329e-05 4.66024e-05
1.38 5.18721e-05 3.15534e-05 4.66024e-05
1.61 4.35093e-05 3.5991e-05 4.66024e-05
1.84 3.84917e-05 3.90701e-05 4.66024e-05
2.07 3.12246e-05 4.44077e-05 4.66024e-05
2.3 2.74787e-05 4.70189e-05 4.66024e-05
2.76 2.21272e-05 5.07816e-05 4.66024e-05
3.68 1.44458e-05 5.83228e-05 4.66024e-05
4.6 0 7.46063e-05 4.66024e-05
5.52 0 7.46063e-05 4.66024e-05
END DIST
Metal 5 UNDER
WIDTH Table 0 entries:
Metal 5 DIAGUNDER
WIDTH Table 0 entries:
END DensityModel 0