| ### |
| ### Source file sky130.tech |
| ### Process this file with the preproc.py macro processor |
| ### Note that the tech name is always TECHNAME for |
| ### magic; this keeps compatibility between layouts |
| ### for all process variants. |
| ### |
| #------------------------------------------------------------------------ |
| # Copyright (c) 2020 R. Timothy Edwards |
| # Revisions: See below |
| # |
| # This file is an Open Source foundry process describing |
| # the SkyWater sky130 hybrid 0.18um / 0.13um fabrication |
| # process. The file may be distributed under the terms |
| # of the Apache 2.0 license agreement. |
| # |
| #------------------------------------------------------------------------ |
| tech |
| format 35 |
| TECHNAME |
| end |
| |
| version |
| version REVISION |
| description "SkyWater SKY130: Open Source rules and DRC" |
| requires magic-8.3.411 |
| end |
| |
| #------------------------------------------------------------------------ |
| # Status 7/10/20: Rev 1 (alpha): |
| # First public release |
| # Status 8/14/20: Rev 2 (alpha): |
| # Started updating with new device/model naming convention |
| # Status 1/3/21: Taking out of beta and declaring an official release. |
| # Status 3/17/22: Added fringeshieldhalo to improve parasitic capacitance |
| # calculations. |
| # Status 5/21/22: Added sidewall edge (spacing) enlargement. |
| #------------------------------------------------------------------------ |
| |
| #------------------------------------------------------------------------ |
| # Supported device types |
| #------------------------------------------------------------------------ |
| # device name magic ID layer description |
| #------------------------------------------------------------------------ |
| # sky130_fd_pr__nfet_01v8 nfet standard nFET |
| # sky130_fd_pr__nfet_01v8 scnfet standard nFET in standard cell** |
| # sky130_fd_pr__special_nfet_latch npd special nFET in SRAM cell |
| # sky130_fd_pr__special_nfet_pass npass special nFET in SRAM cell |
| # sky130_fd_pr__nfet_01v8_lvt nfetlvt low Vt nFET |
| # sky130_fd_pr__nfet_01v8_lvt scnfetlvt low Vt nFET in standard cell** |
| # sky130_fd_bs_flash__special_sonosfet_star nsonos SONOS nFET |
| # sky130_fd_pr__pfet_01v8 pfet standard pFET |
| # sky130_fd_pr__pfet_01v8 scpfet standard pFET in standard cell** |
| # sky130_fd_pr__special_pfet_latch ppu special pFET in SRAM cell |
| # sky130_fd_pr__pfet_01v8_lvt pfetlvt low Vt pFET |
| # sky130_fd_pr__pfet_01v8_mvt pfetmvt med Vt pFET |
| # sky130_fd_pr__pfet_01v8_hvt pfethvt high Vt pFET |
| # sky130_fd_pr__nfet_03v3_nvt nnfet native nFET |
| # sky130_fd_pr__pfet_g5v0d10v5 mvpfet thickox pFET |
| # sky130_fd_pr__nfet_g5v0d10v5 mvnfet thickox nFET |
| # sky130_fd_pr__nfet_05v0_nvt mvnnfet thickox native nFET |
| # sky130_fd_pr__nfet_g5v0d16v0 mvnfet extended-drain nFET*** |
| # sky130_fd_pr__pfet_g5v0d16v0 mvpfet extended-drain pFET*** |
| # sky130_fd_pr__diode_pw2nd_05v5 ndiode n+ diff diode |
| # sky130_fd_pr__diode_pw2nd_05v5_lvt ndiodelvt low Vt n+ diff diode |
| # sky130_fd_pr__diode_pw2nd_05v5_nvt nndiode diode with nndiff |
| # sky130_fd_pr__diode_pw2nd_11v0 mvndiode thickox n+ diff diode |
| # sky130_fd_pr__diode_pd2nw_05v5 pdiode p+ diff diode |
| # sky130_fd_pr__diode_pd2nw_05v5_lvt pdiodelvt low Vt p+ diff diode |
| # sky130_fd_pr__diode_pd2nw_05v5_hvt pdiodehvt high Vt p+ diff diode |
| # sky130_fd_pr__diode_pd2nw_11v0 mvpdiode thickox p+ diff diode |
| # sky130_fd_pr__npn_05v5 pbase NPN in deep nwell |
| # sky130_fd_pr__npn_11v0 pbase thick oxide gated NPN |
| # sky130_fd_pr__pnp_05v5 nbase PNP |
| # sky130_fd_pr__cap_mim_m3_1 mimcap MiM cap 1st plate |
| # sky130_fd_pr__cap_mim_m3_2 mimcap2 MiM cap 2nd plate |
| # sky130_fd_pr__res_generic_nd rdn n+ diff resistor |
| # sky130_fd_pr__res_generic_nd__hv mvrdn thickox n+ diff resistor |
| # sky130_fd_pr__res_generic_pd rdp p+ diff resistor |
| # sky130_fd_pr__res_generic_pd__nv mvrdp thickox p+ diff resistor |
| # sky130_fd_pr__res_generic_l1 rli local interconnect resistor |
| # sky130_fd_pr__res_generic_po npres n+ poly resistor |
| # sky130_fd_pr__res_high_po_* ppres (*) p+ poly resistor (300 Ohms/sq) |
| # sky130_fd_pr__res_xhigh_po_* xres (*) p+ poly resistor (2k Ohms/sq) |
| # sky130_fd_pr__cap_var_lvt varactor low Vt varactor |
| # sky130_fd_pr__cap_var_hvt varactorhvt high Vt varactor |
| # sky130_fd_pr__cap_var mvvaractor thickox varactor |
| # sky130_fd_pr__res_iso_pw rpw pwell resistor (in deep nwell) |
| # sky130_fd_pr__esd_nfet_g5v0d10v5 mvnfetesd ESD thickox nFET |
| # sky130_fd_pr__esd_pfet_g5v0d10v5 mvpfetesd ESD thickox pFET |
| # sky130_fd_pr__photodiode photo Photodiode |
| # |
| # (*) Note that ppres may extract into some generic type called |
| # "sky130_fd_pr__res_xhigh_po", but only specific sizes of xhrpoly are |
| # allowed, and these are created from fixed layouts like the types below. |
| # |
| # (**) nFET and pFET in standard cells are the same as devices |
| # outside of the standard cell except for the DRC rule for |
| # FET to diffusion contact spacing (which is 0.05um, not 0.055um) |
| # |
| # (***) The extended-drain devices have the same identifying |
| # FET type as the thick oxide devices, but the drain side of the |
| # device is represented by layer extdrain extending to nsd or psd. |
| # |
| #------------------------------------------------------------- |
| # The following devices are not extracted but are represented |
| # only by script-generated subcells in the PDK. |
| #------------------------------------------------------------- |
| # sky130_fd_pr__esd_nfet_01v8 ESD nFET |
| # sky130_fd_pr__esd_nfet_05v0_nvt ESD native nFET |
| # sky130_fd_pr__special_nfet_pass_flash flash nFET device |
| # sky130_fd_pr__esd_rf_diode_pw2nd_11v0 ESD n+ diode |
| # sky130_fd_pr__esd_rf_diode_pd2nw_11v0 ESD p+ diode |
| # sky130_fd_pr__cap_vpp_* Vpp cap |
| # sky130_fd_pr__ind_* inductor |
| # sky130_fd_pr__fuse_m4 metal fuse device |
| #-------------------------------------------------------------- |
| |
| #----------------------------------------------------- |
| # Tile planes |
| #----------------------------------------------------- |
| |
| planes |
| dwell,dw |
| well,w |
| active,a |
| locali,li1,li |
| metal1,m1 |
| metal2,m2 |
| metal3,m3 |
| #ifdef METAL5 |
| #ifdef MIM |
| cap1,c1 |
| #endif (MIM) |
| metal4,m4 |
| #ifdef MIM |
| cap2,c2 |
| #endif (MIM) |
| metal5,m5 |
| #endif (METAL5) |
| #ifdef REDISTRIBUTION |
| metali,mi |
| #endif |
| block,b |
| comment,c |
| end |
| |
| #----------------------------------------------------- |
| # Tile types |
| #----------------------------------------------------- |
| |
| types |
| # Deep nwell |
| dwell dnwell,dnw |
| dwell isosubstrate,isosub |
| dwell photodiode,photo |
| |
| # Wells |
| well nwell,nw |
| well pwell,pw |
| well rpw,rpwell |
| -well obswell |
| well pbase,npn |
| well nbase,pnp |
| |
| # Transistors |
| active nmos,ntransistor,nfet |
| -active scnmos,scntransistor,scnfet |
| -active npd,npdfet,sramnfet |
| -active npass,npassfet,srampassfet |
| active pmos,ptransistor,pfet |
| -active scpmos,scptransistor,scpfet |
| -active ppu,ppufet,srampfet |
| active nnmos,nntransistor,nnfet |
| active mvnmos,mvntransistor,mvnfet |
| active mvpmos,mvptransistor,mvpfet |
| active mvnnmos,mvnntransistor,mvnnfet |
| -active mvnmosesd,mvntransistoresd,mvnfetesd |
| -active mvpmosesd,mvptransistoresd,mvpfetesd |
| active varactor,varact,var |
| active mvvaractor,mvvaract,mvvar |
| |
| active pmoslvt,pfetlvt |
| active pmosmvt,pfetmvt |
| active pmoshvt,pfethvt |
| -active scpmoshvt,scpfethvt |
| active nmoslvt,nfetlvt |
| -active scnmoslvt,scnfetlvt |
| active varactorhvt,varacthvt,varhvt |
| -active nsonos,sonos |
| -active sramnvar,corenvar,corenvaractor |
| -active srampvar,corepvar,corepvaractor |
| |
| # Diffusions |
| -active fomfill |
| active ndiff,ndiffusion,ndif |
| active pdiff,pdiffusion,pdif |
| active mvndiff,mvndiffusion,mvndif |
| active mvpdiff,mvpdiffusion,mvpdif |
| active ndiffc,ndcontact,ndc |
| active pdiffc,pdcontact,pdc |
| active mvndiffc,mvndcontact,mvndc |
| active mvpdiffc,mvpdcontact,mvpdc |
| active psubdiff,psubstratepdiff,ppdiff,ppd,psd,ptap |
| active nsubdiff,nsubstratendiff,nndiff,nnd,nsd,ntap |
| active mvpsubdiff,mvpsubstratepdiff,mvppdiff,mvppd,mvpsd,mvptap |
| active mvnsubdiff,mvnsubstratendiff,mvnndiff,mvnnd,mvnsd,mvntap |
| active psubdiffcont,psubstratepcontact,psc,ptapc |
| active nsubdiffcont,nsubstratencontact,nsc,ntapc |
| active mvpsubdiffcont,mvpsubstratepcontact,mvpsc,mvptapc |
| active mvnsubdiffcont,mvnsubstratencontact,mvnsc,mvntapc |
| active extdrain,ed |
| -active obsactive |
| -active mvobsactive |
| |
| # Poly |
| active poly,p,polysilicon |
| active polycont,pc,pcontact,polycut,polyc |
| active xpolycontact,xpolyc,xpc |
| -active polyfill |
| |
| # Resistors |
| active npolyres,npres,mrp1 |
| active ppolyres,ppres,xhrpoly |
| active xpolyres,xpres,xres,uhrpoly |
| active ndiffres,rnd,rdn,rndiff |
| active pdiffres,rpd,rdp,rpdiff |
| active mvndiffres,mvrnd,mvrdn,mvrndiff |
| active mvpdiffres,mvrpd,mvrdp,mvrpdiff |
| active rmp |
| |
| # Diodes |
| active pdiode,pdi |
| active ndiode,ndi |
| active nndiode,nndi |
| active pdiodec,pdic |
| active ndiodec,ndic |
| active nndiodec,nndic |
| active mvpdiode,mvpdi |
| active mvndiode,mvndi |
| active mvpdiodec,mvpdic |
| active mvndiodec,mvndic |
| active pdiodelvt,pdilvt |
| active pdiodehvt,pdihvt |
| active ndiodelvt,ndilvt |
| active pdiodelvtc,pdilvtc |
| active pdiodehvtc,pdihvtc |
| active ndiodelvtc,ndilvtc |
| |
| # Local Interconnect |
| locali locali,li1,li |
| -locali corelocali,coreli1,coreli |
| locali rlocali,rli1,rli |
| locali viali,vial,mcon,m1c,v0 |
| -locali obsli1,obsli |
| -locali obsli1c,obsmcon |
| -locali lifill |
| |
| # Metal 1 |
| metal1 metal1,m1,met1 |
| metal1 rmetal1,rm1,rmet1 |
| metal1 via1,m2contact,m2cut,m2c,via,v,v1 |
| -metal1 obsm1 |
| -metal1 m1fill |
| |
| #ifdef RERAM |
| metal2 reram,rr |
| #endif |
| |
| # Metal 2 |
| metal2 metal2,m2,met2 |
| metal2 rmetal2,rm2,rmet2 |
| metal2 via2,m3contact,m3cut,m3c,v2 |
| -metal2 obsm2 |
| -metal2 m2fill |
| |
| # Metal 3 |
| metal3 metal3,m3,met3 |
| metal3 rmetal3,rm3,rmet3 |
| -metal3 obsm3 |
| #ifdef METAL5 |
| metal3 via3,v3 |
| -metal3 m3fill |
| |
| #ifdef MIM |
| cap1 mimcap,mim,capm |
| cap1 mimcapcontact,mimcapc,mimcc,capmc |
| #endif |
| |
| # Metal 4 |
| metal4 metal4,m4,met4 |
| metal4 rmetal4,rm4,rmet4 |
| -metal4 obsm4 |
| metal4 via4,v4 |
| -metal4 m4fill |
| |
| #ifdef MIM |
| cap2 mimcap2,mim2,capm2 |
| cap2 mimcap2contact,mimcap2c,mim2cc,capm2c |
| #endif |
| |
| # Metal 5 |
| metal5 metal5,m5,met5 |
| metal5 rm5,rmetal5,rmet5 |
| -metal5 obsm5 |
| -metal5 m5fill |
| #endif (METAL5) |
| |
| #ifdef REDISTRIBUTION |
| metal5 mrdlcontact,mrdlc,pi1 |
| metali metalrdl,mrdl,metrdl,rdl |
| -metali obsmrdl |
| metali pi2 |
| block ubm |
| #endif (REDISTRIBUTION) |
| |
| # Miscellaneous |
| -block glass |
| -block fillblock |
| comment comment |
| -comment obscomment |
| |
| end |
| |
| #----------------------------------------------------- |
| # Magic contact types |
| #----------------------------------------------------- |
| |
| contact |
| pc poly locali |
| ndc ndiff locali |
| pdc pdiff locali |
| nsc nsd locali |
| psc psd locali |
| ndic ndiode locali |
| ndilvtc ndiodelvt locali |
| nndic nndiode locali |
| pdic pdiode locali |
| pdilvtc pdiodelvt locali |
| pdihvtc pdiodehvt locali |
| xpc xpc locali |
| |
| mvndc mvndiff locali |
| mvpdc mvpdiff locali |
| mvnsc mvnsd locali |
| mvpsc mvpsd locali |
| mvndic mvndiode locali |
| mvpdic mvpdiode locali |
| |
| mcon locali metal1 |
| obsmcon obsli metal1 |
| |
| via1 metal1 metal2 |
| via2 metal2 metal3 |
| #ifdef METAL5 |
| via3 metal3 metal4 |
| via4 metal4 metal5 |
| #endif (METAL5) |
| stackable |
| |
| #ifdef METAL5 |
| #ifdef MIM |
| # MiM cap contacts are not stackable! |
| mimcc mimcap metal4 |
| mim2cc mimcap2 metal5 |
| #endif (MIM) |
| #endif (!METAL5) |
| |
| #ifdef REDISTRIBUTION |
| mrdlc metal5 mrdl |
| pi2 mrdl ubm |
| #endif (REDISTRIBUTION) |
| end |
| |
| #----------------------------------------------------- |
| # Layer aliases |
| #----------------------------------------------------- |
| |
| aliases |
| |
| allwellplane nwell |
| allnwell nwell,obswell,pnp |
| |
| allnfets nfet,npass,npd,scnfet,mvnfet,mvnfetesd,mvnnfet,nnfet,nfetlvt,scnfetlvt,nsonos |
| allpfets pfet,ppu,scpfet,scpfethvt,mvpfet,mvpfetesd,pfethvt,pfetlvt,pfetmvt |
| allfets allnfets,allpfets,varactor,mvvaractor,varhvt,corenvar,corepvar |
| allfetsstd nfet,mvnfet,mvnfetesd,mvnnfet,nnfet,nfetlvt,pfet,mvpfet,mvpfetesd,pfethvt,pfetlvt,pfetmvt |
| allfetsspecial scnfet,scpfet,scpfethvt,scnfetlvt |
| allfetscore npass,npd,nsonos,ppu,corenvar,corepvar |
| allfetsnolvt nfet,npass,npd,scnfet,mvnfet,mvnfetesd,mvnnfet,nnfet,nsonos,pfet,ppu,scpfet,scpfethvt,mvpfet,mvpfetesd,pfethvt,pfetmvt,varactor,mvvaractor,varhvt,corenvar |
| |
| allnactivenonfet *ndiff,*nsd,*ndiode,*nndiode,*mvndiff,*mvnsd,*mvndiode,*ndiodelvt |
| allnactive allnactivenonfet,allnfets |
| allnactivenontap *ndiff,*ndiode,*nndiode,*mvndiff,*mvndiode,*ndiodelvt,allnfets |
| allnactivetap *nsd,*mvnsd,var,varhvt,mvvar,corenvar |
| |
| allpactivenonfet *pdiff,*psd,*pdiode,*mvpdiff,*mvpsd,*mvpdiode,*pdiodelvt,*pdiodehvt |
| allpactive allpactivenonfet,allpfets |
| allpactivenontap *pdiff,*pdiode,*mvpdiff,*mvpdiode,*pdiodelvt,*pdiodehvt,allpfets |
| allpactivetap *psd,*mvpsd,corepvar |
| |
| allactivenonfet allnactivenonfet,allpactivenonfet |
| allactive allactivenonfet,allfets |
| |
| allactiveres ndiffres,pdiffres,mvndiffres,mvpdiffres |
| |
| allndifflv *ndif,*nsd,*ndiode,ndiffres,nfet,npass,npd,scnfet,scnfetlvt,nfetlvt,nsonos |
| allpdifflv *pdif,*psd,*pdiode,pdiffres,pfet,ppu,scpfet,scpfethvt,pfetlvt,pfetmvt,pfethvt |
| alldifflv allndifflv,allpdifflv |
| allndifflvnonfet *ndif,*nsd,*ndiode,*nndiode,ndiffres,*ndiodelvt |
| allpdifflvnonfet *pdif,*psd,*pdiode,pdiffres,*pdiodelvt,*pdiodehvt |
| alldifflvnonfet allndifflvnonfet,allpdifflvnonfet |
| |
| allndiffmv *mvndif,*mvnsd,*mvndiode,*nndiode,mvndiffres,mvnfet,mvnfetesd,mvnnfet,nnfet |
| allpdiffmv *mvpdif,*mvpsd,*mvpdiode,mvpdiffres,mvpfet,mvpfetesd |
| alldiffmv allndiffmv,allpdiffmv |
| allndiffmvnontap *mvndif,*mvndiode,*nndiode,mvndiffres,mvnfet,mvnfetesd,mvnnfet,nnfet |
| allpdiffmvnontap *mvpdif,*mvpdiode,mvpdiffres,mvpfet,mvpfetesd |
| alldiffmvnontap allndiffmvnontap,allpdiffmvnontap |
| allndiffmvnonfet *mvndif,*mvnsd,*mvndiode,*nndiode,mvndiffres |
| allpdiffmvnonfet *mvpdif,*mvpsd,*mvpdiode,mvpdiffres |
| alldiffmvnonfet allndiffmvnonfet,allpdiffmvnonfet |
| |
| alldiffnonfet alldifflvnonfet,alldiffmvnonfet |
| alldiff alldifflv,alldiffmv,fomfill |
| |
| allpolyres mrp1,xhrpoly,uhrpoly,rmp |
| allpolynonfet *poly,allpolyres,xpc |
| allpolynonres *poly,allfets,xpc |
| |
| allpoly allpolynonfet,allfets |
| allpolynoncap *poly,xpc,allfets,allpolyres |
| |
| allndiffcontlv ndc,nsc,ndic,nndic,ndilvtc |
| allpdiffcontlv pdc,psc,pdic,pdilvtc,pdihvtc |
| allndiffcontmv mvndc,mvnsc,mvndic |
| allpdiffcontmv mvpdc,mvpsc,mvpdic |
| allndiffcont allndiffcontlv,allndiffcontmv |
| allpdiffcont allpdiffcontlv,allpdiffcontmv |
| alldiffcontlv allndiffcontlv,allpdiffcontlv |
| alldiffcontmv allndiffcontmv,allpdiffcontmv |
| alldiffcont alldiffcontlv,alldiffcontmv |
| |
| allcont alldiffcont,pc |
| |
| allres allpolyres,allactiveres |
| |
| allli *locali,coreli,rli |
| allm1 *m1,rm1 |
| #ifdef RERAM |
| allm2 *m2,rm2,reram |
| #else (!RERAM) |
| allm2 *m2,rm2 |
| #endif (!RERAM) |
| allm3 *m3,rm3 |
| #ifdef METAL5 |
| allm4 *m4,rm4 |
| allm5 *m5,rm5 |
| #endif (METAL5) |
| |
| psub pwell |
| |
| obstypes obswell,mvobsactive,obsactive,obsli,obsmcon,obsm1,obsm2,obsm3,obsm4,obsm5,obsmrdl,obscomment |
| blocktypes fillblock |
| |
| end |
| |
| #----------------------------------------------------- |
| # Layer drawing styles |
| #----------------------------------------------------- |
| |
| styles |
| styletype mos |
| dnwell cwell |
| isosub subcircuit |
| nwell nwell |
| pwell pwell |
| rpwell pwell ptransistor_stripes |
| photo nwell nwell_field_implant |
| ndiff ndiffusion |
| fomfill ndiffusion |
| pdiff pdiffusion |
| nsd ndiff_in_nwell |
| psd pdiff_in_pwell |
| nfet ntransistor ntransistor_stripes |
| scnfet ntransistor ntransistor_stripes |
| scnfetlvt ntransistor ntransistor_stripes implant1 |
| npass ntransistor ntransistor_stripes |
| npd ntransistor ntransistor_stripes |
| pfet ptransistor ptransistor_stripes |
| scpfet ptransistor ptransistor_stripes |
| scpfethvt ptransistor ptransistor_stripes implant2 |
| ppu ptransistor ptransistor_stripes |
| var polysilicon ndiff_in_nwell |
| ndc ndiffusion metal1 contact_X'es |
| pdc pdiffusion metal1 contact_X'es |
| nsc ndiff_in_nwell metal1 contact_X'es |
| psc pdiff_in_pwell metal1 contact_X'es |
| corenvar polysilicon ndiff_in_nwell |
| corepvar polysilicon pdiff_in_pwell |
| |
| pnp nwell ntransistor_stripes |
| npn pwell ptransistor_stripes |
| |
| pfetlvt ptransistor ptransistor_stripes implant1 |
| pfetmvt ptransistor ptransistor_stripes implant3 |
| pfethvt ptransistor ptransistor_stripes implant2 |
| nfetlvt ntransistor ntransistor_stripes implant1 |
| nsonos ntransistor implant3 |
| varhvt polysilicon ndiff_in_nwell implant2 |
| nnfet ntransistor ndiff_in_nwell |
| |
| mvndiff ndiffusion hvndiff_mask |
| mvpdiff pdiffusion hvpdiff_mask |
| mvnsd ndiff_in_nwell hvndiff_mask |
| mvpsd pdiff_in_pwell hvpdiff_mask |
| mvnfet ntransistor ntransistor_stripes hvndiff_mask |
| mvnfetesd ntransistor ntransistor_stripes hvndiff_mask |
| mvnnfet ntransistor ndiff_in_nwell hvndiff_mask |
| mvpfet ptransistor ptransistor_stripes |
| mvpfetesd ptransistor ptransistor_stripes |
| mvvar polysilicon ndiff_in_nwell hvndiff_mask |
| mvndc ndiffusion metal1 contact_X'es hvndiff_mask |
| mvpdc pdiffusion metal1 contact_X'es hvpdiff_mask |
| mvnsc ndiff_in_nwell metal1 contact_X'es hvndiff_mask |
| mvpsc pdiff_in_pwell metal1 contact_X'es hvpdiff_mask |
| |
| extdrain nselect pselect |
| |
| poly polysilicon |
| polyfill polysilicon |
| pc polysilicon metal1 contact_X'es |
| npolyres polysilicon silicide_block nselect2 |
| ppolyres polysilicon silicide_block pselect2 |
| xpc polysilicon pselect2 metal1 contact_X'es |
| rmp polysilicon poly_resist_stripes |
| |
| pdiode pdiffusion pselect2 |
| ndiode ndiffusion nselect2 |
| pdiodec pdiffusion pselect2 metal1 contact_X'es |
| ndiodec ndiffusion nselect2 metal1 contact_X'es |
| |
| nndiode ndiffusion nselect2 implant3 |
| ndiodelvt ndiffusion nselect2 implant1 |
| pdiodelvt pdiffusion pselect2 implant1 |
| pdiodehvt pdiffusion pselect2 implant2 |
| pdilvtc pdiffusion pselect2 implant1 metal1 contact_X'es |
| pdihvtc pdiffusion pselect2 implant2 metal1 contact_X'es |
| ndilvtc ndiffusion nselect2 implant1 metal1 contact_X'es |
| |
| mvpdiode pdiffusion pselect2 hvpdiff_mask |
| mvndiode ndiffusion nselect2 hvndiff_mask |
| mvpdiodec pdiffusion pselect2 metal1 contact_X'es hvpdiff_mask |
| mvndiodec ndiffusion nselect2 metal1 contact_X'es hvndiff_mask |
| nndiodec ndiff_in_nwell nselect2 metal1 contact_X'es hvndiff_mask |
| |
| locali metal1 |
| lifill metal1 |
| coreli metal1 |
| rli metal1 poly_resist_stripes |
| mcon metal1 metal2 via1arrow |
| obsli metal1 |
| obsmcon metal1 metal2 via1arrow |
| |
| metal1 metal2 |
| m1fill metal2 |
| rm1 metal2 poly_resist_stripes |
| obsm1 metal2 |
| m2c metal2 metal3 via2arrow |
| |
| #ifdef RERAM |
| reram metal2 metal3 via2 contact_X'es |
| #endif (RERAM) |
| |
| metal2 metal3 |
| m2fill metal3 |
| rm2 metal3 poly_resist_stripes |
| obsm2 metal3 |
| m3c metal3 metal4 via3alt |
| metal3 metal4 |
| m3fill metal4 |
| rm3 metal4 poly_resist_stripes |
| obsm3 metal4 |
| #ifdef METAL5 |
| #ifdef MIM |
| mimcap metal3 mems |
| mimcc metal3 contact_X'es mems |
| mimcap2 metal4 mems |
| mim2cc metal4 contact_X'es mems |
| #endif (MIM) |
| via3 metal4 metal5 via4 |
| metal4 metal5 |
| m4fill metal5 |
| rm4 metal5 poly_resist_stripes |
| obsm4 metal5 |
| via4 metal5 metal6 via5 |
| metal5 metal6 |
| m5fill metal6 |
| rm5 metal6 poly_resist_stripes |
| obsm5 metal6 |
| #endif (METAL5) |
| #ifdef REDISTRIBUTION |
| mrdlc metal6 metal7 via6 |
| metalrdl metal7 |
| obsmrdl metal7 |
| ubm metal8 |
| pi2 metal7 metal8 via7 |
| #endif (REDISTRIBUTION) |
| |
| glass overglass |
| mrp1 poly_resist poly_resist_stripes |
| xhrpoly poly_resist silicide_block |
| uhrpoly poly_resist |
| ndiffres ndiffusion ndop_stripes |
| pdiffres pdiffusion pdop_stripes |
| mvndiffres ndiffusion hvndiff_mask ndop_stripes |
| mvpdiffres pdiffusion hvpdiff_mask pdop_stripes |
| comment comment |
| error_p error_waffle |
| error_s error_waffle |
| error_ps error_waffle |
| fillblock cwell |
| |
| obswell cwell |
| obsactive implant4 |
| |
| magnet substrate_field_implant |
| rotate via3alt |
| fence via5 |
| end |
| |
| #----------------------------------------------------- |
| # Special paint/erase rules |
| #----------------------------------------------------- |
| |
| compose |
| compose nfet poly ndiff |
| compose pfet poly pdiff |
| compose var poly nsd |
| |
| decompose npass poly ndiff |
| decompose npd poly ndiff |
| decompose scnfet poly ndiff |
| decompose scnfetlvt poly ndiff |
| decompose nfetlvt poly ndiff |
| decompose nsonos poly ndiff |
| |
| decompose ppu poly pdiff |
| decompose scpfet poly pdiff |
| decompose scpfethvt poly pdiff |
| decompose pfethvt poly pdiff |
| decompose pfetlvt poly pdiff |
| decompose pfetmvt poly pdiff |
| decompose corenvar poly nsd |
| decompose corepvar poly psd |
| decompose varhvt poly nsd |
| |
| compose mvnfet poly mvndiff |
| compose mvpfet poly mvpdiff |
| compose mvvar poly mvnsd |
| |
| decompose nnfet poly mvndiff |
| decompose mvnfetesd poly mvndiff |
| decompose mvnnfet poly mvndiff |
| decompose mvpfetesd poly mvpdiff |
| |
| paint obsmcon locali via1 |
| paint obsmcon obsm1 obsli,obsm1 |
| |
| paint ndc nwell pdc |
| paint nfet nwell pfet |
| paint scnfet nwell scpfet |
| paint ndiff nwell pdiff |
| paint psd nwell nsd |
| paint psc nwell nsc |
| paint npd nwell ppu |
| |
| paint pdc pwell ndc |
| paint pfet pwell nfet |
| paint scpfet pwell scnfet |
| paint pdiff pwell ndiff |
| paint nsd pwell psd |
| paint nsc pwell psc |
| paint ppu pwell npd |
| |
| paint pdc coreli pdc |
| paint ndc coreli ndc |
| paint pc coreli pc |
| paint nsc coreli nsc |
| paint psc coreli psc |
| paint viali coreli viali |
| paint mvpdc coreli mvpdc |
| paint mvndc coreli mvndc |
| paint mvnsc coreli mvnsc |
| paint mvpsc coreli mvpsc |
| |
| paint coreli pdc pdc |
| paint coreli ndc ndc |
| paint coreli pc pc |
| paint coreli nsc nsc |
| paint coreli psc psc |
| paint coreli viali viali |
| paint coreli mvpdc mvpdc |
| paint coreli mvndc mvndc |
| paint coreli mvnsc mvnsc |
| paint coreli mvpsc mvpsc |
| |
| #ifdef RERAM |
| paint reram metal2 reram |
| #endif (RERAM) |
| |
| #ifdef METAL5 |
| paint m4 obsm4 m4 |
| paint m5 obsm5 m5 |
| #endif (METAL5) |
| end |
| |
| #----------------------------------------------------- |
| # Electrical connectivity |
| #----------------------------------------------------- |
| |
| connect |
| *nwell,*nsd,*mvnsd,dnwell,pnp,photo *nwell,*nsd,*mvnsd,dnwell,pnp,photo |
| pwell,*psd,*mvpsd,npn,isosub pwell,*psd,*mvpsd,npn,isosub |
| *mvnsd ed |
| *mvpsd ed |
| *li,coreli,lifill *li,coreli,lifill |
| *m1,m1fill,obsmcon *m1,m1fill,obsmcon |
| #ifdef RERAM |
| *m2,m2fill,reram *m2,m2fill,reram |
| #else (!RERAM) |
| *m2,m2fill *m2,m2fill |
| #endif (!RERAM) |
| *m3,m3fill *m3,m3fill |
| #ifdef METAL5 |
| *m4,m4fill *m4,m4fill |
| *m5,m5fill *m5,m5fill |
| #ifdef MIM |
| *mimcap *mimcap |
| *mimcap2 *mimcap2 |
| #endif (MIM) |
| #endif (METAL5) |
| allnactivenonfet allnactivenonfet |
| allpactivenonfet allpactivenonfet |
| *poly,xpc,allfets,polyfill *poly,xpc,allfets,polyfill |
| #ifdef REDISTRIBUTION |
| # RDL connects to m5 through glass cut |
| *mrdl *mrdl |
| glass metrdl |
| #endif (REDISTRIBUTION) |
| end |
| |
| #----------------------------------------------------- |
| # CIF/GDS output layer definitions |
| #----------------------------------------------------- |
| # NOTE: All values in this section MUST be multiples of 25 |
| # or else magic will scale below the allowed layout grid size |
| |
| cifoutput |
| |
| #---------------------------------------------------------------- |
| style gdsii |
| # NOTE: This section is used for actual GDS output |
| #---------------------------------------------------------------- |
| scalefactor 10 nanometers |
| options calma-permissive-labels |
| gridlimit 5 |
| |
| #---------------------------------------------------------------- |
| # Create a temp layer from the cell bounding box for use in |
| # generating ID layers. Note that "boundary", unlike "bbox", |
| # requires the FIXED_BBOX property (abutment box) in the cell. |
| #---------------------------------------------------------------- |
| templayer CELLBOUND |
| boundary |
| |
| #---------------------------------------------------------------- |
| # BOUND |
| #---------------------------------------------------------------- |
| layer BOUND CELLBOUND |
| calma 235 4 |
| |
| #---------------------------------------------------------------- |
| # DNWELL |
| #---------------------------------------------------------------- |
| |
| layer DNWELL dnwell,npn,photo |
| calma 64 18 |
| |
| layer PWRES rpw |
| and dnwell |
| calma 64 13 |
| |
| #---------------------------------------------------------------- |
| # SUBCUT |
| #---------------------------------------------------------------- |
| |
| layer SUBCUT isosub |
| calma 81 53 |
| |
| #---------------------------------------------------------------- |
| # NWELL |
| #---------------------------------------------------------------- |
| |
| # Identify LDMOS drain areas |
| templayer ndrainarea |
| bloat-all ed *mvnsd |
| and-not ed |
| |
| templayer pdrainarea |
| bloat-all ed *mvpsd |
| and-not ed |
| |
| # Generate n-well under extended-drain nFET |
| templayer extnwell |
| bloat-or *mvnsd * 0 extdrain 1150 |
| and-not *mvnsd |
| or ndrainarea |
| grow 660 |
| |
| # Erase n-well under extended-drain pFET |
| templayer extpwell |
| bloat-or *mvpsd * 0 extdrain 590 |
| and-not *mvpsd |
| or pdrainarea |
| grow 860 |
| |
| layer NWELL allnwell |
| bloat-all rpw dnwell |
| and-not rpw,pwell |
| or extnwell |
| and-not extpwell |
| calma 64 20 |
| |
| layer WELLTXT |
| labels allnwell |
| calma 64 5 |
| |
| layer WELLPIN |
| labels allnwell port |
| calma 64 16 |
| |
| #---------------------------------------------------------------- |
| # SUB (text/port only) |
| #---------------------------------------------------------------- |
| |
| layer SUBTXT |
| labels pwell |
| calma 64 59 |
| |
| layer SUBPIN |
| labels pwell port |
| calma 122 16 |
| |
| #---------------------------------------------------------------- |
| # DIFF |
| #---------------------------------------------------------------- |
| |
| # Extended-drain FETs cut the diffusion under the gate |
| templayer ldbreak |
| bloat-or *mvnsd * 0 extdrain 1585 |
| bloat-or *mvpsd * 0 extdrain 1190 |
| |
| layer DIFF allnactivenontap,allpactivenontap,allactiveres |
| and-not ldbreak |
| calma 65 20 |
| |
| layer DIFFTXT |
| labels allnactivenontap,allpactivenontap |
| calma 65 6 |
| |
| layer DIFFPIN |
| labels allnactivenontap,allpactivenontap port |
| calma 65 16 |
| |
| #---------------------------------------------------------------- |
| # TAP |
| #---------------------------------------------------------------- |
| |
| layer TAP allnactivetap,allpactivetap |
| labels allnactivetap,allpactivetap port |
| calma 65 44 |
| |
| layer TAPTXT |
| labels allnactivetap,allpactivetap |
| calma 65 5 |
| |
| #---------------------------------------------------------------- |
| # FOM |
| #---------------------------------------------------------------- |
| |
| layer FOMFILL fomfill |
| labels fomfill |
| calma 23 28 |
| |
| #---------------------------------------------------------------- |
| # PSDM, NSDM (PPLUS, NPLUS implants) |
| #---------------------------------------------------------------- |
| |
| templayer basePSDM pdiffres,mvpdiffres |
| grow 15 |
| or xhrpoly,uhrpoly,xpc |
| grow 110 |
| bloat-or allpactivetap * 125 allnactivenontap 0 |
| bloat-or allpactivenontap * 125 allnactivetap 0 |
| |
| templayer baseNSDM ndiffres,mvndiffres |
| grow 125 |
| bloat-or allnactivetap * 125 allpactivenontap 0 |
| bloat-or allnactivenontap * 125 allpactivetap 0 |
| |
| templayer extendPSDM basePSDM |
| bridge 380 380 |
| and-not baseNSDM |
| |
| layer PSDM basePSDM,extendPSDM |
| grow 185 |
| shrink 185 |
| close 265000 |
| mask-hints PSDM |
| calma 94 20 |
| |
| templayer extendNSDM baseNSDM |
| bridge 380 380 |
| and-not basePSDM |
| |
| layer NSDM baseNSDM,extendNSDM |
| grow 185 |
| shrink 185 |
| close 265000 |
| mask-hints NSDM |
| calma 93 44 |
| |
| #---------------------------------------------------------------- |
| # EDID (Extended drain identifier) |
| #---------------------------------------------------------------- |
| |
| layer EDID |
| bloat-all extdrain *mvnsd,*mvpsd,mvnfet,mvpfet,*mvndiff,*mvpdiff |
| labels extdrain |
| calma 81 57 |
| |
| #---------------------------------------------------------------- |
| # LVID |
| #---------------------------------------------------------------- |
| |
| layer LVID nnfet |
| grow 100 |
| calma 81 60 |
| |
| #---------------------------------------------------------------- |
| # LVTN |
| #---------------------------------------------------------------- |
| |
| layer LVTN pfetlvt,nfetlvt,scnfetlvt,mvvar,mvnnfet,nnfet,nsonos,*pdiodelvt,*ndiodelvt,*nndiode |
| grow 180 |
| bridge 380 380 |
| grow 185 |
| shrink 185 |
| close 265000 |
| mask-hints LVTN |
| calma 125 44 |
| |
| #---------------------------------------------------------------- |
| # HVTR |
| #---------------------------------------------------------------- |
| |
| layer HVTR pfetmvt |
| grow 180 |
| bridge 380 380 |
| grow 185 |
| shrink 185 |
| close 265000 |
| calma 18 20 |
| |
| #---------------------------------------------------------------- |
| # HVTP |
| #---------------------------------------------------------------- |
| |
| layer HVTP scpfethvt,ppu,pfethvt,varhvt,*pdiodehvt |
| grow 180 |
| bridge 380 380 |
| grow 185 |
| shrink 185 |
| close 265000 |
| mask-hints HVTP |
| calma 78 44 |
| |
| #---------------------------------------------------------------- |
| # SONOS |
| #---------------------------------------------------------------- |
| |
| layer SONOS nsonos |
| grow 100 |
| grow-min 410 |
| bridge 500 410 |
| grow 250 |
| shrink 250 |
| calma 80 20 |
| |
| #---------------------------------------------------------------- |
| # The coreli layer indicates a cell needing COREID. Also, |
| # devices npd, npass, and ppu indicate a COREID cell. NOTE: |
| # SONOS does not use COREID, counter to SkyWater rules. |
| #---------------------------------------------------------------- |
| |
| layer COREID |
| bloat-all coreli,ppu,npd,npass,corepvar,corenvar CELLBOUND |
| mask-hints COREID |
| calma 81 2 |
| |
| #---------------------------------------------------------------- |
| # STDCELL applies to all cells containing scnfet or scpfet. |
| #---------------------------------------------------------------- |
| |
| layer STDCELL scnfet |
| bloat-all scpfet,scpfethvt,scnfet,scnfetlvt CELLBOUND |
| mask-hints STDCELL |
| calma 81 4 |
| |
| #---------------------------------------------------------------- |
| # ESDID is a marker layer for ESD devices in the padframe I/O. |
| #---------------------------------------------------------------- |
| |
| layer ESDID |
| bloat-all mvnfetesd *mvndiff,*poly |
| bloat-all mvpfetesd *mvpdiff,*poly |
| grow 100 |
| mask-hints ESDID |
| calma 81 19 |
| |
| #---------------------------------------------------------------- |
| # NPNID and PNPID apply to bipolar transistors |
| #---------------------------------------------------------------- |
| |
| layer NPNID |
| bloat-all npn dnwell |
| mask-hints NPNID |
| calma 82 20 |
| |
| templayer pnparea pnp |
| grow 400 |
| |
| layer PNPID |
| bloat-all pnparea *psd |
| or pnparea |
| mask-hints PNPID |
| calma 82 44 |
| |
| layer PHOTO photo |
| calma 81 81 |
| |
| #---------------------------------------------------------------- |
| # RPM |
| #---------------------------------------------------------------- |
| |
| layer RPM |
| bloat-all xhrpoly xpc |
| grow 200 |
| grow-min 1270 |
| grow 420 |
| shrink 420 |
| calma 86 20 |
| |
| #---------------------------------------------------------------- |
| # URPM (2kOhms/sq. poly implant) |
| #---------------------------------------------------------------- |
| |
| layer URPM |
| bloat-all uhrpoly xpc |
| grow 200 |
| grow-min 1270 |
| grow 420 |
| shrink 420 |
| calma 79 20 |
| |
| #---------------------------------------------------------------- |
| # LDNTM (Tip implant for SONOS FETs) |
| #---------------------------------------------------------------- |
| |
| layer LDNTM |
| bloat-all nsonos *ndiff |
| grow 185 |
| grow 345 |
| shrink 345 |
| calma 11 44 |
| |
| #---------------------------------------------------------------- |
| # HVNTM (Tip implant for MV ndiff devices) |
| #---------------------------------------------------------------- |
| |
| templayer hvntm_block *mvpsd |
| grow 185 |
| |
| layer HVNTM |
| bloat-all mvnfet,mvnfetesd,mvnnfet,nnfet,*mvndiode,mvrdn,*nndiode *mvndiff |
| bloat-all mvvaractor *mvnsd |
| and-not hvntm_block |
| grow 185 |
| bridge 700 700 |
| grow 345 |
| shrink 345 |
| and-not hvntm_block |
| mask-hints HVNTM |
| calma 125 20 |
| |
| #---------------------------------------------------------------- |
| # POLY |
| #---------------------------------------------------------------- |
| |
| layer POLY allpoly |
| calma 66 20 |
| |
| layer POLYTXT |
| labels allpoly |
| calma 66 5 |
| |
| layer POLYPIN |
| labels allpoly port |
| calma 66 16 |
| |
| layer POLYFILL polyfill |
| labels polyfill |
| calma 28 28 |
| |
| #---------------------------------------------------------------- |
| # HVI (includes rules NWELL 8-11 and DIFFTAP 14-26) |
| #---------------------------------------------------------------- |
| |
| templayer thkox_area ed |
| grow 475 |
| or alldiffmv,mvvar |
| grow 185 |
| bloat-all alldiffmv nwell |
| grow 345 |
| shrink 345 |
| |
| templayer large_ptap_mv thkox_area |
| shrink 420 |
| grow 420 |
| |
| templayer small_ptap_mv thkox_area |
| and-not large_ptap_mv |
| # (HVI min width rule is 0.6 but CNTM min width rule is 0.84um) |
| grow-min 840 |
| |
| layer HVI thkox_area,small_ptap_mv |
| bridge 700 600 |
| grow 345 |
| shrink 345 |
| mask-hints HVI |
| calma 75 20 |
| |
| #---------------------------------------------------------------- |
| # CONT (LICON) |
| #---------------------------------------------------------------- |
| |
| layer CONT allcont |
| squares-grid 0 170 170 |
| calma 66 44 |
| |
| # Contact for pres is different than other LICON contacts |
| # See rules LICON 1b, 1c (width/length) and 2b (spacing) |
| templayer xpc_horiz xpc |
| shrink 1007 |
| grow 1007 |
| |
| layer CONT xpc |
| and-not xpc_horiz |
| # Force long edge vertical for contacts narrower than 2um |
| # Minimum space is 350 but 520 satisfies no. of contacts rule |
| slots 80 190 520 80 2000 350 |
| calma 66 44 |
| |
| layer CONT xpc |
| and xpc_horiz |
| # Force long edge vertical for contacts wider than 2um |
| # Minimum space is 350 but 520 satisfies no. of contacts rule |
| slots 80 2000 350 80 190 520 |
| calma 66 44 |
| |
| #---------------------------------------------------------------- |
| # NPC (Nitride poly cut) |
| # surrounds CONT (LICON) on poly only (i.e., pc) |
| #---------------------------------------------------------------- |
| |
| # Avoids a common case of NPC bridges too close to other LICON shapes. |
| templayer diffcutarea pdc,ndc,psc,nsc,mvpdc,mvndc,mvpsc,mvnsc |
| grow 90 |
| |
| layer NPC pc |
| squares-grid 0 170 170 |
| grow 100 |
| bridge 270 270 |
| and-not diffcutarea |
| bridge 270 270 |
| grow 130 |
| shrink 130 |
| mask-hints NPC |
| calma 95 20 |
| |
| # NPC is also generated on xhrpoly and uhrpoly resistors |
| |
| layer NPC xpc,xhrpoly,uhrpoly |
| # xpc surrounds precision_resistor by 0.095um |
| grow 95 |
| grow 130 |
| shrink 130 |
| calma 95 20 |
| |
| #---------------------------------------------------------------- |
| # Device markers |
| #---------------------------------------------------------------- |
| |
| layer DIFFRES rdn,mvrdn,rdp,mvrdp |
| calma 65 13 |
| |
| layer POLYRES mrp1 |
| calma 66 13 |
| |
| # POLYSHORT is a poly layer resistor like rli, rm1, etc., for metal layers |
| layer POLYSHORT rmp |
| calma 66 15 |
| |
| # POLYRES extends to edge of contact cut |
| layer POLYRES xhrpoly,uhrpoly |
| grow 80 |
| and xpc |
| or xhrpoly,uhrpoly |
| calma 66 13 |
| |
| layer DIODE *pdi,*ndi,*nndi,*mvpdi,*mvndi,*pdilvt,*pdihvt,*ndilvt |
| # To be done: Expand to include anode, cathode, and guard ring |
| calma 81 23 |
| |
| #---------------------------------------------------------------- |
| # LI |
| #---------------------------------------------------------------- |
| layer LI allli |
| calma 67 20 |
| |
| layer LITXT |
| labels *locali,coreli |
| calma 67 5 |
| |
| layer LIPIN |
| labels *locali,coreli port |
| calma 67 16 |
| |
| layer LIRES rli |
| labels rli |
| calma 67 13 |
| |
| layer LIFILL lifill |
| labels lifill |
| calma 56 28 |
| |
| #---------------------------------------------------------------- |
| # MCON |
| #---------------------------------------------------------------- |
| layer MCON mcon |
| squares-grid 0 170 190 |
| calma 67 44 |
| |
| #---------------------------------------------------------------- |
| # MET1 |
| #---------------------------------------------------------------- |
| layer MET1 allm1 |
| calma 68 20 |
| |
| layer MET1TXT |
| labels allm1 |
| calma 68 5 |
| |
| layer MET1PIN |
| labels allm1 port |
| calma 68 16 |
| |
| layer MET1RES rm1 |
| labels rm1 |
| calma 68 13 |
| |
| layer MET1FILL m1fill |
| labels m1fill |
| calma 36 28 |
| |
| #---------------------------------------------------------------- |
| # VIA1 |
| #---------------------------------------------------------------- |
| layer VIA1 via1 |
| squares-grid 55 150 170 |
| calma 68 44 |
| |
| #ifdef RERAM |
| #undef RERAM |
| layer VIA1 reram |
| squares-grid 55 150 170 |
| calma 68 44 |
| |
| layer RERAM reram |
| calma 201 20 |
| #define RERAM |
| #endif (RERAM) |
| |
| #---------------------------------------------------------------- |
| # MET2 |
| #---------------------------------------------------------------- |
| layer MET2 allm2 |
| calma 69 20 |
| |
| layer MET2TXT |
| labels allm2 |
| calma 69 5 |
| |
| layer MET2PIN |
| labels allm2 port |
| calma 69 16 |
| |
| layer MET2RES rm2 |
| labels rm2 |
| calma 69 13 |
| |
| layer MET2FILL m2fill |
| labels m2fill |
| calma 41 28 |
| |
| #---------------------------------------------------------------- |
| # VIA2 |
| #---------------------------------------------------------------- |
| layer VIA2 via2 |
| squares-grid 40 200 200 |
| calma 69 44 |
| |
| #---------------------------------------------------------------- |
| # MET3 |
| #---------------------------------------------------------------- |
| layer MET3 allm3 |
| calma 70 20 |
| |
| layer MET3TXT |
| labels allm3 |
| calma 70 5 |
| |
| layer MET3PIN |
| labels allm3 port |
| calma 70 16 |
| |
| layer MET3RES rm3 |
| labels rm3 |
| calma 70 13 |
| |
| layer MET3FILL m3fill |
| labels m3fill |
| calma 34 28 |
| |
| #ifdef METAL5 |
| #---------------------------------------------------------------- |
| # VIA3 |
| #---------------------------------------------------------------- |
| layer VIA3 via3 |
| #ifdef MIM |
| or mimcc |
| #endif (MIM) |
| squares-grid 60 200 200 |
| calma 70 44 |
| |
| #---------------------------------------------------------------- |
| # MET4 |
| #---------------------------------------------------------------- |
| layer MET4 allm4 |
| calma 71 20 |
| |
| layer MET4TXT |
| labels allm4 |
| calma 71 5 |
| |
| layer MET4PIN |
| labels allm4 port |
| calma 71 16 |
| |
| layer MET4RES rm4 |
| labels rm4 |
| calma 71 13 |
| |
| layer MET4FILL m4fill |
| labels m4fill |
| calma 51 28 |
| |
| #---------------------------------------------------------------- |
| # VIA4 |
| #---------------------------------------------------------------- |
| layer VIA4 via4 |
| #ifdef MIM |
| or mim2cc |
| #endif (MIM) |
| squares-grid 190 800 800 |
| calma 71 44 |
| |
| #---------------------------------------------------------------- |
| # MET5 |
| #---------------------------------------------------------------- |
| layer MET5 allm5,m5fill |
| calma 72 20 |
| |
| layer MET5TXT |
| labels allm5 |
| calma 72 5 |
| |
| layer MET5PIN |
| labels allm5 port |
| calma 72 16 |
| |
| layer MET5RES rm5 |
| labels rm5 |
| calma 72 13 |
| |
| layer MET5FILL m5fill |
| labels m5fill |
| calma 59 28 |
| |
| #endif (METAL5) |
| |
| #ifdef REDISTRIBUTION |
| #---------------------------------------------------------------- |
| # RDL |
| #---------------------------------------------------------------- |
| layer RDL *metrdl |
| calma 74 20 |
| |
| layer RDLTXT |
| labels *metrdl |
| calma 74 5 |
| |
| layer RDLPIN |
| labels *metrdl port |
| calma 74 16 |
| |
| layer PI1 *metrdl |
| and m5,glass |
| # Test only---needs GDS layer number |
| |
| layer UBM *metrdl |
| shrink 50000 |
| grow 40000 |
| # Test only---needs GDS layer number |
| |
| layer PI2 *metrdl |
| shrink 50000 |
| grow 25000 |
| # Test only---needs GDS layer number |
| |
| #endif REDISTRIBUTION |
| |
| #---------------------------------------------------------------- |
| # GLASS |
| #---------------------------------------------------------------- |
| layer GLASS glass |
| calma 76 20 |
| |
| #ifdef MIM |
| #---------------------------------------------------------------- |
| # CAPM |
| #---------------------------------------------------------------- |
| layer CAPM *mimcap |
| labels mimcap |
| calma 89 44 |
| |
| layer CAPM2 *mimcap2 |
| labels mimcap2 |
| calma 97 44 |
| #endif (MIM) |
| |
| #---------------------------------------------------------------- |
| # Chip top level marker for DRC latchup rules to check 15um |
| # distance to taps (otherwise 6um is used) |
| #---------------------------------------------------------------- |
| |
| layer LOWTAPDENSITY |
| bbox top |
| # Clear 200um for pads + 50um for required high tap density |
| # in critical area. |
| shrink 250000 |
| calma 81 14 |
| |
| #---------------------------------------------------------------- |
| # FILLBLOCK |
| #---------------------------------------------------------------- |
| layer FILLOBSFOM obsactive |
| calma 22 24 |
| |
| layer FILLOBSLI fillblock,obsli |
| calma 67 10 |
| |
| layer FILLOBSM1 fillblock,obsm1 |
| calma 62 24 |
| |
| layer FILLOBSM2 fillblock,obsm2 |
| calma 105 52 |
| |
| layer FILLOBSM3 fillblock,obsm3 |
| calma 107 24 |
| |
| layer FILLOBSM4 fillblock,obsm4 |
| calma 112 4 |
| |
| layer FILLOBSM5 fillblock,obsm5 |
| calma 117 4 |
| |
| render DNWELL cwell -0.1 0.1 |
| render NWELL nwell 0.0 0.2062 |
| render DIFF ndiffusion 0.2062 0.12 |
| render TAP pdiffusion 0.2062 0.12 |
| render POLY polysilicon 0.3262 0.18 |
| render CONT via 0.5062 0.43 |
| render LI metal1 0.9361 0.10 |
| render MCON via 1.0361 0.34 |
| render MET1 metal2 1.3761 0.36 |
| render VIA1 via 1.7361 0.27 |
| render MET2 metal3 2.0061 0.36 |
| render VIA2 via 2.3661 0.42 |
| render MET3 metal4 2.7861 0.845 |
| #ifdef METAL5 |
| render VIA3 via 3.6311 0.39 |
| render MET4 metal5 4.0211 0.845 |
| render VIA4 via 4.8661 0.505 |
| render MET5 metal6 5.3711 1.26 |
| render CAPM metal8 2.4661 0.2 |
| render CAPM2 metal9 3.7311 0.2 |
| #ifdef REDISTRIBUTION |
| render RDL metal7 11.8834 4.0 |
| #endif (!REDISTRIBUTION) |
| #endif (!METAL5) |
| |
| #---------------------------------------------------------------- |
| style drc |
| #---------------------------------------------------------------- |
| # NOTE: This style is used for DRC only, not for GDS output |
| #---------------------------------------------------------------- |
| scalefactor 10 nanometers |
| options calma-permissive-labels |
| |
| # Ensure nwell overlaps dnwell at least 0.4um outside and 1.03um inside |
| templayer dnwell_shrink dnwell |
| shrink 1030 |
| |
| templayer nwell_missing dnwell |
| grow 400 |
| and-not dnwell_shrink |
| and-not nwell |
| |
| templayer pwell_in_dnwell dnwell |
| and-not nwell |
| |
| # SONOS nFET devices must be in deep nwell |
| templayer dnwell_missing nsonos |
| and-not dnwell |
| |
| # SONOS nFET devices must be in cell with abutment box |
| templayer abutment_box |
| boundary |
| |
| templayer bbox_missing nsonos |
| and-not abutment_box |
| |
| # Make sure nwell covers varactor poly |
| templayer var_poly_no_nwell |
| bloat-all varactor,mvvaractor *poly |
| grow 150 |
| and-not nwell |
| |
| # Define areas where mim2cc is inside the boundary of mimcc |
| # by more than the contact surround |
| templayer mim2_contact_overlap |
| bloat-all *mimcap2 mimcc |
| shrink 60 |
| and-not *mimcap2 |
| |
| # Note that metal fill is performed by the foundry and so is not |
| # an option for a cifoutput style. |
| |
| # Check latchup rule (15um minimum from tap LICON center to any |
| # non-tap diffusion. Note that to count as a tap, the diffusion |
| # must be contacted to LI |
| |
| templayer ptap_reach psc,mvpsc |
| and-not dnwell |
| # grow total is 15um. grow in 0.84um increments to ensure that |
| # no nwell ring is crossed |
| grow 840 |
| and-not nwell,dnwell |
| grow 840 |
| and-not nwell,dnwell |
| grow 840 |
| and-not nwell,dnwell |
| grow 840 |
| and-not nwell,dnwell |
| grow 840 |
| and-not nwell,dnwell |
| grow 840 |
| and-not nwell,dnwell |
| grow 840 |
| and-not nwell,dnwell |
| grow 840 |
| and-not nwell,dnwell |
| grow 840 |
| and-not nwell,dnwell |
| grow 840 |
| and-not nwell,dnwell |
| grow 840 |
| and-not nwell,dnwell |
| grow 840 |
| and-not nwell,dnwell |
| grow 840 |
| and-not nwell,dnwell |
| grow 840 |
| and-not nwell,dnwell |
| grow 840 |
| and-not nwell,dnwell |
| grow 840 |
| and-not nwell,dnwell |
| grow 840 |
| and-not nwell,dnwell |
| grow 635 |
| and-not nwell,dnwell |
| |
| templayer ptap_missing *ndiff,*mvndiff |
| and-not dnwell |
| and-not ptap_reach |
| |
| templayer ntap_reach nsc,mvnsc |
| # grow total is 15um. grow in 1.27um increments to ensure that |
| # no nwell ring is crossed. There is no difference between |
| # ntaps in and out of deep nwell. |
| grow 1270 |
| and nwell,pnp |
| grow 1270 |
| and nwell,pnp |
| grow 1270 |
| and nwell,pnp |
| grow 1270 |
| and nwell,pnp |
| grow 1270 |
| and nwell,pnp |
| grow 1270 |
| and nwell,pnp |
| grow 1270 |
| and nwell,pnp |
| grow 1270 |
| and nwell,pnp |
| grow 1270 |
| and nwell,pnp |
| grow 1270 |
| and nwell,pnp |
| grow 1270 |
| and nwell,pnp |
| grow 945 |
| and nwell,pnp |
| |
| templayer ntap_missing *pdiff,*mvpdiff |
| and-not pwell_in_dnwell |
| and-not ntap_reach |
| |
| templayer dptap_reach psc,mvpsc |
| and dnwell |
| grow 840 |
| and-not nwell |
| and dnwell |
| grow 840 |
| and-not nwell |
| and dnwell |
| grow 840 |
| and-not nwell |
| and dnwell |
| grow 840 |
| and-not nwell |
| and dnwell |
| grow 840 |
| and-not nwell |
| and dnwell |
| grow 840 |
| and-not nwell |
| and dnwell |
| grow 840 |
| and-not nwell |
| and dnwell |
| grow 840 |
| and-not nwell |
| and dnwell |
| grow 840 |
| and-not nwell |
| and dnwell |
| grow 840 |
| and-not nwell |
| and dnwell |
| grow 840 |
| and-not nwell |
| and dnwell |
| grow 840 |
| and-not nwell |
| and dnwell |
| grow 840 |
| and-not nwell |
| and dnwell |
| grow 840 |
| and-not nwell |
| and dnwell |
| grow 840 |
| and-not nwell |
| and dnwell |
| grow 840 |
| and-not nwell |
| and dnwell |
| grow 840 |
| and-not nwell |
| and dnwell |
| grow 635 |
| and-not nwell |
| and dnwell |
| |
| templayer dptap_missing *ndiff,*mvndiff |
| and dnwell |
| and-not dptap_reach |
| |
| templayer pdiff_crosses_dnwell dnwell |
| grow 20 |
| and-not dnwell |
| and allpdifflv,allpdiffmv |
| |
| # MV nwell must be 2um from any other nwell |
| templayer mvnwell |
| bloat-all alldiffmv nwell |
| grow-min 840 |
| bridge 700 600 |
| |
| # Simple spacing checks to lvnwell must use CIF-DRC rule |
| # Note that HVI may *abut* lvnwell; this can only be handled |
| # with mask-hints layers. |
| |
| templayer drawn_hvi |
| mask-hints HVI |
| |
| templayer allmvdiffnowell *mvndiff,*mvpsd |
| and-not drawn_hvi |
| |
| templayer nwell_or_hvi nwell,drawn_hvi |
| |
| templayer lvnwell nwell |
| and-not mvnwell |
| |
| # Check for low-voltage diffusion in high-voltage well |
| templayer lvdiff_in_mvnwell *pdiff,*pdiode,pdiffres,*nsd |
| or pfet,ppu,scpfet,scpfethvt,pfetlvt,pfetmvt,pfethvt |
| and mvnwell |
| |
| templayer nwell_with_tap |
| bloat-all nsc,mvnsc nwell,pnp |
| |
| templayer nwell_missing_tap nwell,pnp |
| and-not nwell_with_tap |
| |
| templayer tap_with_licon |
| bloat-all allpactivetap psd,mvpsd |
| bloat-all allnactivetap nsd,mvnsd |
| |
| templayer tap_missing_licon allnactivetap,allpactivetap |
| and-not tap_with_licon |
| |
| # Make sure varactor nwell contains no P diffusion |
| templayer pdiff_in_varactor_well |
| bloat-all varactor,mvvaractor nwell |
| and allpactive |
| |
| # HVNTM spacing requires recreating HVNTM |
| templayer hvntm_block *mvpsd |
| grow 185 |
| |
| templayer hvntm_generate |
| bloat-all mvnfet,mvnfetesd,mvnnfet,nnfet,*mvndiode,mvrdn,*nndiode *mvndiff |
| bloat-all mvvaractor *mvnsd |
| and-not hvntm_block |
| grow 185 |
| bridge 700 700 |
| grow 345 |
| shrink 345 |
| and-not hvntm_block |
| |
| # RPM spacing checks require recreating RPM |
| templayer rpm_generate |
| bloat-all xhrpoly,uhrpoly xpc |
| grow 200 |
| grow-min 1270 |
| grow 420 |
| shrink 420 |
| |
| # Check distance RPM to NSDM |
| templayer rpm_nsd_check rpm_generate |
| grow 325 |
| and allndifflv,allndiffmv |
| |
| # Check distance RPM to (unrelated) POLY |
| templayer rpm_poly_check rpm_generate |
| grow 200 |
| and-not xhrpoly,uhrpoly,xpc |
| and allpoly |
| |
| # Check distance RPM to HVNTM |
| templayer rpm_hvntm_check rpm_generate |
| grow 385 |
| and allndiffmvnontap |
| |
| templayer m1_small_hole allm1,obsm1,obsmcon |
| close 140000 |
| |
| templayer m1_hole_empty m1_small_hole |
| and-not allm1,obsm1,obsmcon |
| |
| templayer m2_small_hole allm2,obsm2 |
| close 140000 |
| |
| templayer m2_hole_empty m2_small_hole |
| and-not allm2,obsm2 |
| |
| templayer m1_huge allm1 |
| shrink 1500 |
| grow 1500 |
| |
| templayer m1_large_halo m1_huge |
| grow 280 |
| and-not m1_huge |
| and allm1 |
| |
| templayer m2_huge allm2 |
| shrink 1500 |
| grow 1500 |
| |
| templayer m2_large_halo m2_huge |
| grow 280 |
| and-not m2_huge |
| and allm2 |
| |
| templayer m3_huge allm3 |
| shrink 1500 |
| grow 1500 |
| |
| templayer m3_large_halo m3_huge |
| grow 400 |
| and-not m3_huge |
| and allm3 |
| |
| templayer m4_huge allm4 |
| shrink 1500 |
| grow 1500 |
| |
| templayer m4_large_halo m4_huge |
| grow 400 |
| and-not m4_huge |
| and allm4 |
| |
| #ifdef EXPERIMENTAL |
| #---------------------------------------------------------------- |
| style paint |
| #---------------------------------------------------------------- |
| # NOTE: This style is used for database manipulations only via |
| # the "cif paint" command. |
| #---------------------------------------------------------------- |
| |
| scalefactor 10 nanometers |
| |
| templayer m1grow *m1 |
| grow 290 |
| |
| # layer listrap: Use the following set of commands to strap local |
| # interconnect wires with metal1 (inside the cursor box) to satisfy |
| # the maximum aspect ratio rule for local interconnect: |
| # |
| # tech unlock * |
| # cif ostyle paint |
| # cif paint m1strap comment |
| # cif paint m1strap m1 |
| # cif paint listrap viali |
| # erase comment |
| |
| templayer m1strap *li |
| and-not m1grow |
| grow 30 |
| |
| templayer listrap comment |
| slots 30 170 170 60 |
| |
| #endif (EXPERIMENTAL) |
| |
| #---------------------------------------------------------------- |
| style density |
| #---------------------------------------------------------------- |
| # Style used by scripts to check for fill density |
| #---------------------------------------------------------------- |
| scalefactor 10 nanometers |
| options calma-permissive-labels |
| gridlimit 5 |
| |
| templayer fom_all alldiff,fomfill |
| |
| templayer poly_all allpoly,polyfill |
| |
| templayer li_all allli,lifill |
| |
| templayer m1_all allm1,m1fill |
| |
| templayer m2_all allm2,m2fill |
| |
| templayer m3_all allm3,m3fill |
| |
| templayer m4_all allm4,m4fill |
| |
| templayer m5_all allm5,m5fill |
| |
| #---------------------------------------------------------------- |
| style wafflefill variants (),(tiled) |
| #---------------------------------------------------------------- |
| # Style used by scripts for automatically generating fill layers |
| # NOTE: Be sure to generate output on flattened layout. |
| #---------------------------------------------------------------- |
| scalefactor 10 nanometers |
| options calma-permissive-labels |
| gridlimit 5 |
| |
| #---------------------------------------------------------------- |
| # Generate and retain a layer representing the bounding box. |
| # |
| # For variant (): |
| # The bounding box is the full extent of geometry on the top level |
| # cell. |
| # |
| # For variant (tiled): |
| # Use with a script that breaks layout into flattened tiles and runs |
| # fill individually on each. The tiles should be larger than the |
| # step size, and each should draw a layer "comment" the size of the |
| # step box. |
| #---------------------------------------------------------------- |
| |
| variants () |
| templayer topbox |
| bbox top |
| |
| variants (tiled) |
| templayer topbox comment |
| # Each tile imposes the full keepout distance rule of |
| # 3um on all sides. |
| shrink 1500 |
| |
| variants * |
| |
| #---------------------------------------------------------------- |
| # Generate guard-band around nwells to keep FOM from crossing |
| # Spacing from LV nwell = Diff/Tap 9 = 0.34um |
| # Spacing from HV nwell = Diff/Tap 18 = 0.43um (= 0.18 + 0.25) |
| # Enclosure by nwell = Diff/Tap 8 = 0.18um |
| #---------------------------------------------------------------- |
| |
| templayer mvnwell |
| bloat-all alldiffmv nwell |
| |
| templayer lvnwell allnwell |
| and-not mvnwell |
| |
| templayer well_shrink mvnwell |
| shrink 250 |
| or lvnwell |
| shrink 180 |
| templayer well_guardband allnwell |
| grow 340 |
| and-not well_shrink |
| |
| #--------------------------------------------------- |
| # Diffusion and poly keep-out areas |
| #--------------------------------------------------- |
| templayer obstruct_fom alldiff,allpoly,fomfill,polyfill,obsactive |
| or rpw,pnp,npn |
| grow 500 |
| or well_guardband |
| |
| templayer obstruct_poly alldiff,allpoly,fomfill,polyfill,obsactive |
| or rpw,pnp,npn |
| grow 1000 |
| |
| #--------------------------------------------------- |
| # FOM and POLY fill |
| #--------------------------------------------------- |
| templayer fomfill_pass1 topbox |
| # slots 0 4080 1320 0 4080 1320 1360 0 |
| slots 0 4080 1600 0 4080 1600 1360 0 |
| and-not obstruct_fom |
| and topbox |
| shrink 2035 |
| grow 2035 |
| |
| #--------------------------------------------------- |
| |
| templayer obstruct_poly_pass1 fomfill_pass1 |
| grow 300 |
| or obstruct_poly |
| templayer polyfill_pass1 topbox |
| slots 0 720 360 0 720 360 240 0 |
| and-not obstruct_poly_pass1 |
| and topbox |
| shrink 355 |
| grow 355 |
| |
| #--------------------------------------------------- |
| |
| templayer obstruct_fom_pass2 fomfill_pass1 |
| grow 1290 |
| or polyfill_pass1 |
| grow 300 |
| or obstruct_fom |
| templayer fomfill_pass2 topbox |
| slots 0 2500 1320 0 2500 1320 1360 0 |
| and-not obstruct_fom_pass2 |
| and topbox |
| shrink 1245 |
| grow 1245 |
| |
| #--------------------------------------------------- |
| |
| templayer obstruct_poly_coarse polyfill_pass1 |
| grow 60 |
| or fomfill_pass1,fomfill_pass2 |
| grow 300 |
| or obstruct_poly |
| templayer polyfill_coarse topbox |
| slots 0 720 360 0 720 360 240 120 |
| and-not obstruct_poly_coarse |
| and topbox |
| shrink 355 |
| grow 355 |
| |
| #--------------------------------------------------- |
| templayer obstruct_poly_medium polyfill_pass1,polyfill_coarse |
| grow 60 |
| or fomfill_pass1,fomfill_pass2 |
| grow 300 |
| or obstruct_poly |
| templayer polyfill_medium topbox |
| slots 0 540 360 0 540 360 240 100 |
| and-not obstruct_poly_medium |
| and topbox |
| shrink 265 |
| grow 265 |
| |
| #--------------------------------------------------- |
| templayer obstruct_poly_fine polyfill_pass1,polyfill_coarse,polyfill_medium |
| grow 60 |
| or fomfill_pass1,fomfill_pass2 |
| grow 300 |
| or obstruct_poly |
| templayer polyfill_fine topbox |
| slots 0 480 360 0 480 360 240 200 |
| and-not obstruct_poly_fine |
| and topbox |
| shrink 235 |
| grow 235 |
| |
| #--------------------------------------------------- |
| |
| templayer obstruct_fom_coarse fomfill_pass1,fomfill_pass2 |
| grow 1290 |
| or polyfill_pass1,polyfill_coarse,polyfill_medium,polyfill_fine |
| grow 300 |
| or obstruct_fom |
| templayer fomfill_coarse topbox |
| slots 0 1500 1320 0 1500 1320 1360 0 |
| and-not obstruct_fom_coarse |
| and topbox |
| shrink 745 |
| grow 745 |
| |
| #--------------------------------------------------- |
| |
| templayer obstruct_fom_fine fomfill_pass1,fomfill_pass2,fomfill_coarse |
| grow 1290 |
| or polyfill_pass1,polyfill_coarse,polyfill_medium,polyfill_fine |
| grow 300 |
| or obstruct_fom |
| templayer fomfill_fine topbox |
| slots 0 500 400 0 500 400 160 0 |
| and-not obstruct_fom_fine |
| and topbox |
| shrink 245 |
| grow 245 |
| |
| #--------------------------------------------------- |
| layer FOMFILL fomfill_pass1 |
| or fomfill_pass2 |
| or fomfill_coarse |
| or fomfill_fine |
| calma 23 28 |
| |
| layer POLYFILL polyfill_pass1 |
| or polyfill_coarse |
| or polyfill_medium |
| or polyfill_fine |
| calma 28 28 |
| |
| #--------------------------------------------------------- |
| # LI fill |
| # Note requirement that LI fill may not overlap (non-fill) |
| # diff or poly. |
| #--------------------------------------------------------- |
| |
| templayer obstruct_li_coarse allli,obsli,lifill,fillblock |
| grow 2800 |
| or alldiff,allpoly |
| grow 200 |
| templayer lifill_coarse topbox |
| # slots 0 3000 650 0 3000 650 700 0 |
| slots 0 3000 900 0 3000 900 700 0 |
| and-not obstruct_li_coarse |
| and topbox |
| shrink 1495 |
| grow 1495 |
| |
| templayer obstruct_li_medium allli,obsli,lifill,fillblock |
| grow 2500 |
| or lifill_coarse |
| grow 300 |
| or alldiff,allpoly |
| grow 200 |
| templayer lifill_medium topbox |
| slots 0 1500 500 0 1500 500 700 0 |
| and-not obstruct_li_medium |
| and topbox |
| shrink 745 |
| grow 745 |
| |
| templayer obstruct_li_fine allli,obsli,lifill,fillblock |
| or lifill_coarse,lifill_medium |
| grow 300 |
| or alldiff,allpoly |
| grow 200 |
| templayer lifill_fine topbox |
| slots 0 580 500 0 580 500 700 0 |
| and-not obstruct_li_fine |
| and topbox |
| shrink 285 |
| grow 285 |
| |
| layer LIFILL lifill_coarse |
| or lifill_medium |
| or lifill_fine |
| calma 56 28 |
| |
| #--------------------------------------------------- |
| # MET1 fill |
| #--------------------------------------------------- |
| |
| templayer obstruct_m1_coarse allm1,glass,obsm1,m1fill,fillblock |
| grow 3000 |
| templayer met1fill_coarse topbox |
| # slots 0 2000 200 0 2000 200 700 0 |
| slots 0 2000 800 0 2000 800 700 350 |
| and-not obstruct_m1_coarse |
| and topbox |
| shrink 995 |
| grow 995 |
| |
| templayer obstruct_m1_medium allm1,glass,obsm1,m1fill,fillblock |
| grow 2800 |
| or met1fill_coarse |
| grow 200 |
| templayer met1fill_medium topbox |
| slots 0 1000 200 0 1000 200 700 0 |
| and-not obstruct_m1_medium |
| and topbox |
| shrink 495 |
| grow 495 |
| |
| templayer obstruct_m1_fine allm1,glass,obsm1,m1fill,fillblock |
| grow 300 |
| or met1fill_coarse,met1fill_medium |
| grow 200 |
| templayer met1fill_fine topbox |
| slots 0 580 200 0 580 200 700 0 |
| and-not obstruct_m1_fine |
| and topbox |
| shrink 285 |
| grow 285 |
| |
| templayer obstruct_m1_veryfine allm1,glass,obsm1,m1fill,fillblock |
| grow 100 |
| or met1fill_coarse,met1fill_medium,met1fill_fine |
| grow 200 |
| templayer met1fill_veryfine topbox |
| slots 0 300 200 0 300 200 100 50 |
| and-not obstruct_m1_veryfine |
| and topbox |
| shrink 145 |
| grow 145 |
| |
| layer MET1FILL met1fill_coarse |
| or met1fill_medium |
| or met1fill_fine |
| or met1fill_veryfine |
| calma 36 28 |
| |
| #--------------------------------------------------- |
| # MET2 fill |
| #--------------------------------------------------- |
| templayer obstruct_m2 allm2,glass,obsm2,m2fill,fillblock |
| grow 3000 |
| templayer met2fill_coarse topbox |
| # slots 0 2000 200 0 2000 200 700 350 |
| slots 0 2000 800 0 2000 800 700 350 |
| and-not obstruct_m2 |
| and topbox |
| shrink 995 |
| grow 995 |
| |
| templayer obstruct_m2_medium allm2,glass,obsm2,m2fill,fillblock |
| grow 2800 |
| or met2fill_coarse |
| grow 200 |
| templayer met2fill_medium topbox |
| slots 0 1000 200 0 1000 200 700 350 |
| and-not obstruct_m2_medium |
| and topbox |
| shrink 495 |
| grow 495 |
| |
| templayer obstruct_m2_fine allm2,glass,obsm2,m2fill,fillblock |
| grow 300 |
| or met2fill_coarse,met2fill_medium |
| grow 200 |
| templayer met2fill_fine topbox |
| slots 0 580 200 0 580 200 700 350 |
| and-not obstruct_m2_fine |
| and topbox |
| shrink 285 |
| grow 285 |
| |
| templayer obstruct_m2_veryfine allm2,glass,obsm2,m2fill,fillblock |
| grow 100 |
| or met2fill_coarse,met2fill_medium,met2fill_fine |
| grow 200 |
| templayer met2fill_veryfine topbox |
| slots 0 300 200 0 300 200 100 100 |
| and-not obstruct_m2_veryfine |
| and topbox |
| shrink 145 |
| grow 145 |
| |
| layer MET2FILL met2fill_coarse |
| or met2fill_medium |
| or met2fill_fine |
| or met2fill_veryfine |
| calma 41 28 |
| |
| #--------------------------------------------------- |
| # MET3 fill |
| #--------------------------------------------------- |
| templayer obstruct_m3 allm3,glass,obsm3,m3fill,fillblock |
| grow 3000 |
| templayer met3fill_coarse topbox |
| # slots 0 2000 300 0 2000 300 700 700 |
| slots 0 2000 800 0 2000 800 700 350 |
| and-not obstruct_m3 |
| and topbox |
| shrink 995 |
| grow 995 |
| |
| templayer obstruct_m3_medium allm3,glass,obsm3,m3fill,fillblock |
| grow 2700 |
| or met3fill_coarse |
| grow 300 |
| templayer met3fill_medium topbox |
| slots 0 1000 300 0 1000 300 700 700 |
| and-not obstruct_m3_medium |
| and topbox |
| shrink 495 |
| grow 495 |
| |
| templayer obstruct_m3_fine allm3,glass,obsm3,m3fill,fillblock |
| grow 200 |
| or met3fill_coarse,met3fill_medium |
| grow 300 |
| templayer met3fill_fine topbox |
| slots 0 580 300 0 580 300 700 700 |
| and-not obstruct_m3_fine |
| and topbox |
| shrink 285 |
| grow 285 |
| |
| templayer obstruct_m3_veryfine allm3,glass,obsm3,m3fill,fillblock |
| # Note: Adding 0.1 to waffle rule to clear wide spacing rule |
| grow 100 |
| or met3fill_coarse,met3fill_medium,met3fill_fine |
| grow 300 |
| templayer met3fill_veryfine topbox |
| slots 0 500 300 0 500 300 150 200 |
| and-not obstruct_m3_veryfine |
| and topbox |
| shrink 245 |
| grow 245 |
| |
| layer MET3FILL met3fill_coarse |
| or met3fill_medium |
| or met3fill_fine |
| or met3fill_veryfine |
| calma 34 28 |
| |
| #ifdef METAL5 |
| #--------------------------------------------------- |
| # MET4 fill |
| #--------------------------------------------------- |
| templayer obstruct_m4 glass |
| grow 2500 |
| or allm4,obsm4,m4fill,fillblock |
| grow 3000 |
| templayer met4fill_coarse topbox |
| # slots 0 2000 300 0 2000 300 700 1050 |
| slots 0 2000 800 0 2000 800 700 350 |
| and-not obstruct_m4 |
| and topbox |
| shrink 995 |
| grow 995 |
| |
| templayer obstruct_m4_medium glass |
| grow 2500 |
| or allm4,obsm4,m4fill,fillblock |
| grow 2700 |
| or met4fill_coarse |
| grow 300 |
| templayer met4fill_medium topbox |
| slots 0 1000 300 0 1000 300 700 1050 |
| and-not obstruct_m4_medium |
| and topbox |
| shrink 495 |
| grow 495 |
| |
| templayer obstruct_m4_fine glass |
| grow 5000 |
| or allm4,obsm4,m4fill,fillblock |
| grow 200 |
| or met4fill_coarse,met4fill_medium |
| grow 300 |
| templayer met4fill_fine topbox |
| slots 0 580 300 0 580 300 700 1050 |
| and-not obstruct_m4_fine |
| and topbox |
| shrink 285 |
| grow 285 |
| |
| templayer obstruct_m4_veryfine glass |
| grow 5100 |
| or allm4,obsm4,m4fill,fillblock |
| # Note: Adding 0.1 to waffle rule to clear wide spacing rule |
| grow 100 |
| or met4fill_coarse,met4fill_medium,met4fill_fine |
| grow 300 |
| templayer met4fill_veryfine topbox |
| slots 0 500 300 0 500 300 150 300 |
| and-not obstruct_m4_veryfine |
| and topbox |
| shrink 245 |
| grow 245 |
| |
| layer MET4FILL met4fill_coarse |
| or met4fill_medium |
| or met4fill_fine |
| or met4fill_veryfine |
| calma 51 28 |
| |
| #--------------------------------------------------- |
| # MET5 fill |
| #--------------------------------------------------- |
| templayer obstruct_m5 allm5,glass,obsm5,m5fill,fillblock |
| grow 3000 |
| templayer met5fill_coarse topbox |
| slots 0 5000 1600 0 5000 1600 1000 100 |
| and-not obstruct_m5 |
| and topbox |
| shrink 2495 |
| grow 2495 |
| |
| templayer obstruct_m5_medium allm5,glass,obsm5,m5fill,fillblock |
| grow 1400 |
| or met5fill_coarse |
| grow 1600 |
| templayer met5fill_medium topbox |
| slots 0 3000 1600 0 3000 1600 1000 100 |
| and-not obstruct_m5_medium |
| and topbox |
| shrink 1495 |
| grow 1495 |
| |
| layer MET5FILL met5fill_coarse |
| or met5fill_medium |
| calma 59 28 |
| #endif (METAL5) |
| |
| end |
| |
| #----------------------------------------------------------------------- |
| cifinput |
| #----------------------------------------------------------------------- |
| # NOTE: All values in this section MUST be multiples of 25 |
| # or else magic will scale below the allowed layout grid size |
| #----------------------------------------------------------------------- |
| |
| style sky130 variants (),(vendor) |
| scalefactor 10 nanometers |
| gridlimit 5 |
| |
| options ignore-unknown-layer-labels |
| |
| #ifndef MIM |
| ignore CAPM |
| ignore CAPM2 |
| #endif (!MIM) |
| #ifndef METAL5 |
| ignore MET4,VIA3 |
| ignore MET5,VIA4 |
| #endif |
| ignore NPC |
| ignore SEALID |
| ignore CAPID |
| ignore LDNTM |
| ignore HVNTM |
| ignore POLYMOD |
| ignore LOWTAPDENSITY |
| ignore OUTLINE |
| ignore POLYCUT |
| ignore POLYGATE |
| ignore DIFFCUT |
| ignore HVNWELLID |
| ignore PADDIFFID |
| ignore PADMETALID |
| ignore PADCENTERID |
| |
| layer pnp NWELL,WELLTXT,WELLPIN |
| and PNPID |
| labels NWELL |
| labels WELLPIN port |
| labels WELLTXT text |
| |
| layer nwell NWELL,WELLTXT,WELLPIN |
| and-not PNPID |
| labels NWELL |
| labels WELLPIN port |
| labels WELLTXT text |
| variants * |
| |
| templayer nwellarea NWELL |
| copyup nwelcheck |
| |
| # Copy nwell areas up for diffusion checks |
| templayer xnwelcheck nwelcheck |
| copyup nwelcheck |
| |
| templayer hvarea HVI |
| copyup hvcheck |
| |
| # Copy high-voltage (HVI) areas up for diffusion checks |
| templayer xhvcheck hvcheck |
| copyup hvcheck |
| |
| # Always draw pwell under p-tap and n-diff. This is not always |
| # necessary but works better with deep nwell for correct extraction. |
| layer pwell TAP,DIFF |
| and-not NWELL,nwelcheck |
| grow 130 |
| or SUBTXT,SUBPIN |
| grow 420 |
| shrink 420 |
| labels SUBPIN port |
| labels SUBTXT text |
| |
| layer dnwell DNWELL |
| labels DNWELL |
| |
| layer isosub SUBCUT |
| labels SUBCUT |
| |
| layer npn DNWELL |
| and-not NWELL,nwelcheck |
| and NPNID |
| |
| layer photo DNWELL |
| and PHOTO |
| |
| layer rpw PWRES |
| and DNWELL |
| labels PWRES |
| |
| templayer ndiffarea DIFF,DIFFTXT,DIFFPIN,barediff |
| and-not POLY |
| and-not NWELL,nwelcheck |
| and-not PSDM |
| and-not DIODE |
| and-not DIFFRES |
| and-not HVI,hvcheck |
| and NSDM |
| and-not CORELI |
| copyup ndifcheck |
| labels DIFF |
| labels DIFFPIN port |
| labels DIFFTXT text |
| variants * |
| |
| layer ndiff ndiffarea |
| |
| # Copy ndiff areas up for contact checks |
| templayer xndifcheck ndifcheck |
| copyup ndifcheck |
| |
| templayer mvndiffarea DIFF,DIFFTXT,DIFFPIN,barediff |
| and-not POLY |
| and-not NWELL,nwelcheck |
| and-not PSDM |
| and-not DIODE |
| and-not DIFFRES |
| and HVI,hvcheck |
| and NSDM |
| copyup ndifcheck |
| labels DIFF |
| labels DIFFPIN port |
| labels DIFFTXT text |
| |
| layer mvndiff mvndiffarea |
| |
| # Copy ndiff areas up for contact checks |
| templayer mvxndifcheck mvndifcheck |
| copyup mvndifcheck |
| |
| layer ndiode DIFF,barediff |
| and NSDM |
| and DIODE |
| and-not NWELL,nwelcheck |
| and-not POLY |
| and-not PSDM |
| and-not HVI,hvcheck |
| and-not LVTN |
| labels DIFF |
| |
| layer ndiodelvt DIFF,barediff |
| and NSDM |
| and DIODE |
| and-not NWELL,nwelcheck |
| and-not POLY |
| and-not PSDM |
| and-not HVI,hvcheck |
| and LVTN |
| labels DIFF |
| |
| templayer ndiodearea DIODE |
| and NSDM |
| and-not HVI,hvcheck |
| and-not NWELL,nwelcheck |
| copyup DIODE,NSDM |
| |
| layer ndiffres DIFFRES |
| and NSDM |
| and-not HVI,hvcheck |
| labels DIFF |
| |
| templayer pdiffarea DIFF,DIFFTXT,DIFFPIN,barediff |
| and-not POLY |
| and NWELL,nwelcheck |
| and-not NSDM |
| and-not DIODE |
| and-not HVI,hvcheck |
| and PSDM |
| copyup pdifcheck |
| labels DIFF |
| labels DIFFPIN port |
| labels DIFFTXT text |
| |
| layer pdiff pdiffarea |
| |
| layer mvndiode DIFF,barediff |
| and NSDM |
| and DIODE |
| and HVI,hvcheck |
| and-not POLY |
| and-not PSDM |
| and-not LVTN |
| labels DIFF |
| |
| layer nndiode DIFF,barediff |
| and NSDM |
| and DIODE |
| and HVI,hvcheck |
| and-not POLY |
| and-not PSDM |
| and LVTN |
| labels DIFF |
| |
| templayer mvndiodearea DIODE |
| and NSDM |
| and HVI,hvcheck |
| and-not NWELL,nwelcheck |
| copyup DIODE,NSDM |
| |
| layer mvndiffres DIFFRES |
| and NSDM |
| and HVI,hvcheck |
| labels DIFF |
| |
| # Note: Not checking PSDM specifically, just lack of NSDM |
| templayer mvpdiffarea DIFF,DIFFTXT,DIFFPIN,barediff |
| and-not POLY |
| and NWELL,nwelcheck |
| and-not NSDM |
| and HVI,hvcheck |
| and-not DIODE |
| and-not DIFFRES |
| copyup mvpdifcheck |
| labels DIFF |
| labels DIFFPIN port |
| labels DIFFTXT text |
| |
| layer mvpdiff mvpdiffarea |
| |
| # Copy pdiff areas up for contact checks |
| templayer xpdifcheck pdifcheck |
| copyup pdifcheck |
| |
| layer pdiode DIFF,barediff |
| and PSDM |
| and-not POLY |
| and-not NSDM |
| and-not HVI,hvcheck |
| and-not LVTN |
| and-not HVTP |
| and DIODE |
| labels DIFF |
| |
| layer pdiodelvt DIFF,barediff |
| and PSDM |
| and-not POLY |
| and-not NSDM |
| and-not HVI,hvcheck |
| and LVTN |
| and-not HVTP |
| and DIODE |
| labels DIFF |
| |
| layer pdiodehvt DIFF,barediff |
| and PSDM |
| and-not POLY |
| and-not NSDM |
| and-not HVI,hvcheck |
| and-not LVTN |
| and HVTP |
| and DIODE |
| labels DIFF |
| |
| templayer pdiodearea DIODE |
| and PSDM |
| and-not HVI,hvcheck |
| copyup DIODE,PSDM |
| |
| # Define pfet areas as known pdiff, regardless of the presence of a well. |
| |
| templayer pfetarea DIFF,barediff |
| and POLY |
| or baretrans |
| and-not NSDM |
| and-not HVI,hvcheck |
| |
| layer pfet pfetarea |
| and-not LVTN |
| and-not HVTP |
| and-not STDCELL |
| and-not COREID |
| labels DIFF |
| |
| layer scpfet pfetarea |
| and-not LVTN |
| and-not HVTP |
| and STDCELL |
| and-not COREID |
| labels DIFF |
| |
| layer scpfethvt pfetarea |
| and-not LVTN |
| and HVTP |
| and STDCELL |
| labels DIFF |
| |
| layer ppu pfetarea |
| and-not LVTN |
| and HVTP |
| and COREID |
| # Shrink-grow operation eliminates the smaller parasitie device |
| # shrink 70 |
| # grow 70 |
| labels DIFF |
| |
| layer pfetlvt pfetarea |
| and LVTN |
| labels DIFF |
| |
| layer pfetmvt pfetarea |
| and HVTR |
| labels DIFF |
| |
| layer pfethvt pfetarea |
| and HVTP |
| and-not STDCELL |
| and-not COREID |
| labels DIFF |
| |
| # Always force nwell under pfet (nwell encloses pdiff by 0.18) |
| layer nwell pfetarea |
| and-not COREID |
| grow 180 |
| |
| # Copy mvpdiff areas up for contact checks |
| templayer mvxpdifcheck mvpdifcheck |
| copyup mvpdifcheck |
| |
| layer mvpdiode DIFF,barediff |
| and PSDM |
| and-not POLY |
| and-not NSDM |
| and HVI,hvcheck |
| and DIODE |
| labels DIFF |
| |
| templayer mvpdiodearea DIODE |
| and PSDM |
| and HVI,hvcheck |
| copyup DIODE,PSDM |
| |
| # Define pfet areas as known pdiff, |
| # regardless of the presence of a |
| # well. |
| |
| templayer mvpfetarea DIFF,barediff |
| and POLY |
| or baretrans |
| and-not NSDM |
| and HVI,hvcheck |
| |
| layer mvpfet mvpfetarea |
| and-not ESDID |
| labels DIFF |
| |
| layer mvpfetesd mvpfetarea |
| and ESDID |
| labels DIFF |
| |
| layer pdiff DIFF,DIFFTXT,DIFFPIN,barediff |
| and-not NSDM |
| and-not POLY |
| and-not HVI,hvcheck |
| and-not DIODE |
| and-not DIFFRES |
| labels DIFF |
| labels DIFFPIN port |
| labels DIFFTXT text |
| |
| layer pdiffres DIFFRES |
| and PSDM |
| and NWELL,nwelcheck |
| and-not HVI,hvcheck |
| labels DIFF |
| |
| layer nfet DIFF,barediff |
| and POLY |
| or baretrans |
| and-not PSDM |
| and NSDM |
| and-not HVI,hvcheck |
| and-not LVTN |
| and-not SONOS |
| and-not STDCELL |
| and-not COREID |
| labels DIFF |
| |
| layer scnfet DIFF,barediff |
| and POLY |
| or baretrans |
| and-not PSDM |
| and NSDM |
| and-not NWELL,nwelcheck |
| and-not HVI,hvcheck |
| and-not LVTN |
| and-not SONOS |
| and STDCELL |
| labels DIFF |
| |
| layer scnfetlvt DIFF,barediff |
| and POLY |
| or baretrans |
| and-not PSDM |
| and NSDM |
| and-not NWELL,nwelcheck |
| and-not HVI,hvcheck |
| and LVTN |
| and-not SONOS |
| and STDCELL |
| labels DIFF |
| |
| layer npass DIFF,barediff |
| and POLY |
| or baretrans |
| and-not PSDM |
| and NSDM |
| and-not NWELL,nwelcheck |
| and COREID |
| labels DIFF |
| |
| layer npd DIFF,barediff |
| and POLY |
| or baretrans |
| and-not PSDM |
| and NSDM |
| and-not NWELL,nwelcheck |
| and COREID |
| # Shrink-grow operation eliminates the smaller npass device |
| shrink 70 |
| grow 70 |
| labels DIFF |
| |
| # Devices abutting tap under gate are officially npd, not npass |
| layer npd TAP |
| grow 100 |
| and DIFF |
| and POLY |
| and-not PSDM |
| and NSDM |
| and-not NWELL,nwelcheck |
| and COREID |
| labels DIFF |
| |
| layer nfetlvt DIFF,barediff |
| and POLY |
| or baretrans |
| and-not PSDM |
| and NSDM |
| and-not HVI,hvcheck |
| and LVTN |
| and-not SONOS |
| and-not STDCELL |
| labels DIFF |
| |
| layer nsonos DIFF,barediff |
| and POLY |
| or baretrans |
| and-not PSDM |
| and NSDM |
| and-not HVI,hvcheck |
| and LVTN |
| and SONOS |
| labels DIFF |
| |
| templayer nsdarea TAP,DIFF |
| and NSDM |
| and NWELL,nwelcheck |
| and-not POLY |
| and-not PSDM |
| and-not HVI,hvcheck |
| and-not CORELI |
| copyup nsubcheck |
| |
| layer nsd nsdarea |
| labels TAP |
| |
| layer nsd TAP,TAPTXT |
| and NSDM |
| and-not POLY |
| and-not HVI,hvcheck |
| labels TAP |
| labels TAPTXT text |
| |
| layer corenvar TAP |
| and NSDM |
| and POLY |
| and COREID |
| labels TAP |
| |
| templayer nsdexpand nsdarea |
| grow 500 |
| |
| # Copy nsub areas up for contact checks |
| templayer xnsubcheck nsubcheck |
| copyup nsubcheck |
| |
| templayer psdarea TAP,DIFF |
| and PSDM |
| and-not NWELL,nwelcheck |
| and-not POLY |
| and-not NSDM |
| and-not HVI,hvcheck |
| and-not pfetexpand |
| copyup psubcheck |
| |
| layer psd psdarea |
| labels TAP |
| |
| layer psd TAP |
| and PSDM |
| and-not POLY |
| and-not HVI,hvcheck |
| labels TAP |
| labels TAPTXT text |
| |
| layer corepvar TAP |
| and PSDM |
| and POLY |
| and COREID |
| labels TAP |
| |
| templayer psdexpand psdarea |
| grow 500 |
| |
| layer mvpdiff DIFF,DIFFTXT,DIFFPIN,barediff |
| and-not NSDM |
| and-not POLY |
| and HVI,hvcheck |
| and mvpfetexpand |
| labels DIFF |
| labels DIFFPIN port |
| labels DIFFTXT text |
| |
| layer mvpdiffres DIFFRES |
| and PSDM |
| and NWELL,nwelcheck |
| and HVI,hvcheck |
| and-not mvrdpioedge |
| labels DIFF |
| |
| templayer mvnfetarea DIFF,barediff |
| and POLY |
| or baretrans |
| and-not PSDM |
| and NSDM |
| and-not LVTN |
| and HVI,hvcheck |
| grow 350 |
| |
| templayer mvnnfetarea DIFF,TAP,barediff |
| and POLY |
| or baretrans |
| and-not PSDM |
| and NSDM |
| and LVTN |
| and HVI,hvcheck |
| and-not mvnfetarea |
| |
| layer mvnfetesd DIFF,barediff |
| and POLY |
| or baretrans |
| and-not PSDM |
| and NSDM |
| and HVI,hvcheck |
| and ESDID |
| and-not mvnnfetarea |
| labels DIFF |
| |
| layer mvnfet DIFF,barediff |
| and POLY |
| or baretrans |
| and-not PSDM |
| and NSDM |
| and HVI,hvcheck |
| and-not ESDID |
| and-not mvnnfetarea |
| labels DIFF |
| |
| layer nnfet mvnnfetarea |
| and LVID |
| labels DIFF |
| |
| layer mvnnfet mvnnfetarea |
| and-not LVID |
| labels DIFF |
| |
| templayer mvnsdarea TAP,DIFF |
| and NSDM |
| and NWELL,nwelcheck |
| and-not POLY |
| and-not PSDM |
| and HVI,hvcheck |
| copyup mvnsubcheck |
| |
| layer mvnsd mvnsdarea |
| labels TAP |
| |
| layer mvnsd TAP,TAPTXT |
| and NSDM |
| and HVI,hvcheck |
| labels TAP |
| labels TAPTXT text |
| |
| # Fill in FET under extended drain |
| layer mvpfet EDID |
| and POLY |
| and-not DIFF |
| and-not TAP |
| and-not NWELL |
| |
| layer mvnfet EDID |
| and POLY |
| and-not DIFF |
| and-not TAP |
| and NWELL |
| |
| # Restrict where nwell is merged |
| templayer ldmos_nwell EDID |
| grow 1200 |
| and NWELL |
| |
| # Remove or add well under extended FET gate |
| layer nwell EDID |
| and POLY |
| and DIFF |
| and PSDM |
| grow 685 |
| or ldmos_nwell |
| grow 420 |
| shrink 420 |
| |
| layer pwell EDID |
| and POLY |
| and DIFF |
| and NSDM |
| grow 660 |
| grow 420 |
| shrink 420 |
| |
| layer ed EDID |
| and-not POLY |
| and-not DIFF |
| and-not TAP |
| |
| templayer mvnsdexpand mvnsdarea |
| grow 500 |
| |
| # Copy nsub areas up for contact checks |
| templayer mvxnsubcheck mvnsubcheck |
| copyup mvnsubcheck |
| |
| templayer mvpsdarea TAP,DIFF,barediff |
| and PSDM |
| and-not NWELL,nwelcheck |
| and-not POLY |
| and-not NSDM |
| and HVI,hvcheck |
| and-not mvpfetexpand |
| copyup mvpsubcheck |
| |
| layer mvpsd mvpsdarea |
| labels DIFF |
| |
| layer mvpsd TAP,TAPTXT |
| and PSDM |
| and HVI,hvcheck |
| labels TAP |
| labels TAPTXT text |
| |
| templayer mvpsdexpand mvpsdarea |
| grow 500 |
| |
| # Copy psub areas up for contact checks |
| templayer xpsubcheck psubcheck |
| copyup psubcheck |
| |
| templayer mvxpsubcheck mvpsubcheck |
| copyup mvpsubcheck |
| |
| layer psd TAP |
| and-not PSDM |
| and-not NSDM |
| and-not POLY |
| and-not HVI,hvcheck |
| and-not pfetexpand |
| and psdexpand |
| |
| layer nsd TAP |
| and-not PSDM |
| and-not NSDM |
| and-not POLY |
| and-not HVI,hvcheck |
| and nsdexpand |
| |
| layer mvpsd TAP |
| and-not PSDM |
| and-not NSDM |
| and-not POLY |
| and HVI,hvcheck |
| and-not mvpfetexpand |
| and mvpsdexpand |
| |
| layer mvnsd TAP |
| and-not PSDM |
| and-not NSDM |
| and-not POLY |
| and HVI,hvcheck |
| and mvnsdexpand |
| |
| # The following recipes deal with DIFFRES layers expanded over large areas |
| # outside the resistor. Find areas which may have been accidentally |
| # captured as a resistor which were supposed to be transistors. |
| |
| templayer diffresarea DIFFRES |
| and-not HVI,hvcheck |
| grow 3000 |
| |
| layer pfet DIFF |
| and diffresarea |
| and POLY |
| and-not NSDM |
| and-not STDCELL |
| and-not HVI |
| |
| layer mvpfet DIFF |
| and diffresarea |
| and POLY |
| and-not NSDM |
| and-not STDCELL |
| and HVI |
| |
| layer scpfet STDCELL |
| and POLY |
| and diffresarea |
| and DIFF |
| and-not NSDM |
| and-not HVTP |
| |
| layer scpfethvt STDCELL |
| and POLY |
| and diffresarea |
| and DIFF |
| and-not NSDM |
| and HVTP |
| |
| # End of resistor area hack |
| |
| templayer xpolyterm RPM,URPM |
| and POLY |
| and-not POLYRES |
| # add back the 0.08um contact surround in the direction of the resistor |
| grow 80 |
| and POLY |
| |
| layer xpc xpolyterm |
| |
| templayer polyarea POLY,POLYTXT,POLYPIN |
| and-not POLYRES |
| and-not POLYSHORT |
| and-not DIFF |
| and-not TAP |
| and-not RPM |
| and-not URPM |
| |
| templayer polycontarea polyarea |
| # Remove areas too small for a contact |
| shrink 130 |
| grow 130 |
| copyup polycheck |
| |
| layer poly polyarea |
| labels POLY |
| labels POLYPIN port |
| labels POLYTXT text |
| |
| # Copy (non-resistor) poly areas up for contact checks |
| templayer xpolycheck polycheck |
| copyup polycheck |
| |
| layer mrp1 POLYRES |
| and POLY |
| and-not RPM |
| and-not URPM |
| labels POLY |
| |
| layer rmp POLYSHORT |
| and POLY |
| labels POLY |
| |
| layer xhrpoly RPM |
| and POLYRES |
| and POLY |
| and-not URPM |
| and PSDM |
| and NPC |
| and-not xpolyterm |
| labels POLY |
| |
| layer uhrpoly URPM |
| and POLYRES |
| and POLY |
| and-not RPM |
| and NPC |
| and-not xpolyterm |
| labels POLY |
| |
| templayer ndcbase CONT |
| or barecont |
| and LI |
| or barelicont |
| and DIFF |
| and NSDM |
| and-not NWELL,nwelcheck |
| and-not HVI,hvcheck |
| |
| layer ndc ndcbase |
| grow 85 |
| shrink 85 |
| shrink 85 |
| grow 85 |
| or ndcbase |
| labels CONT |
| |
| templayer nscbase CONT |
| or barecont |
| and LI |
| or barelicont |
| and DIFF,TAP |
| and NSDM |
| and NWELL,nwelcheck |
| and-not HVI,hvcheck |
| |
| layer nsc nscbase |
| grow 85 |
| shrink 85 |
| shrink 85 |
| grow 85 |
| or nscbase |
| labels CONT |
| |
| templayer pdcbase CONT |
| or barecont |
| and LI |
| or barelicont |
| and DIFF |
| and PSDM |
| and NWELL,nwelcheck |
| and-not HVI,hvcheck |
| |
| layer pdc pdcbase |
| grow 85 |
| shrink 85 |
| shrink 85 |
| grow 85 |
| or pdcbase |
| labels CONT |
| |
| templayer pdcnowell CONT |
| or barecont |
| and LI |
| or barelicont |
| and DIFF |
| and PSDM |
| and pfetexpand |
| and-not HVI,hvcheck |
| |
| layer pdc pdcnowell |
| grow 85 |
| shrink 85 |
| shrink 85 |
| grow 85 |
| or pdcnowell |
| labels CONT |
| |
| templayer pscbase CONT |
| or barecont |
| and LI |
| or barelicont |
| and DIFF,TAP |
| and PSDM |
| and-not NWELL,nwelcheck |
| and-not pfetexpand |
| and-not HVI,hvcheck |
| |
| layer psc pscbase |
| grow 85 |
| shrink 85 |
| shrink 85 |
| grow 85 |
| or pscbase |
| labels CONT |
| |
| templayer pcbase CONT |
| or barecont |
| and LI |
| or barelicont |
| and POLY |
| and-not DIFF |
| and-not RPM,URPM |
| |
| layer pc pcbase |
| grow 85 |
| shrink 85 |
| shrink 85 |
| grow 85 |
| or pcbase |
| labels CONT |
| |
| templayer ndicbase CONT |
| or barecont |
| and LI |
| or barelicont |
| and DIFF |
| and NSDM |
| and DIODE |
| and-not NWELL,nwelcheck |
| and-not POLY |
| and-not PSDM |
| and-not HVI,hvcheck |
| and-not LVTN |
| |
| layer ndic ndicbase |
| grow 85 |
| shrink 85 |
| shrink 85 |
| grow 85 |
| or ndicbase |
| labels CONT |
| |
| templayer ndilvtcbase CONT |
| or barecont |
| and LI |
| or barelicont |
| and DIFF |
| and NSDM |
| and DIODE |
| and-not NWELL,nwelcheck |
| and-not POLY |
| and-not PSDM |
| and-not HVI,hvcheck |
| and LVTN |
| |
| layer ndilvtc ndilvtcbase |
| grow 85 |
| shrink 85 |
| shrink 85 |
| grow 85 |
| or ndilvtcbase |
| labels CONT |
| |
| templayer pdicbase CONT |
| or barecont |
| and LI |
| or barelicont |
| and DIFF |
| and PSDM |
| and DIODE |
| and-not POLY |
| and-not NSDM |
| and-not HVI,hvcheck |
| and-not LVTN |
| and-not HVTP |
| |
| layer pdic pdicbase |
| grow 85 |
| shrink 85 |
| shrink 85 |
| grow 85 |
| or pdicbase |
| labels CONT |
| |
| templayer pdilvtcbase CONT |
| or barecont |
| and LI |
| or barelicont |
| and DIFF |
| and PSDM |
| and DIODE |
| and-not POLY |
| and-not NSDM |
| and-not HVI,hvcheck |
| and LVTN |
| and-not HVTP |
| |
| layer pdilvtc pdilvtcbase |
| grow 85 |
| shrink 85 |
| shrink 85 |
| grow 85 |
| or pdilvtcbase |
| labels CONT |
| |
| templayer pdihvtcbase CONT |
| or barecont |
| and LI |
| or barelicont |
| and DIFF |
| and PSDM |
| and DIODE |
| and-not POLY |
| and-not NSDM |
| and-not HVI,hvcheck |
| and-not LVTN |
| and HVTP |
| |
| layer pdihvtc pdihvtcbase |
| grow 85 |
| shrink 85 |
| shrink 85 |
| grow 85 |
| or pdihvtcbase |
| labels CONT |
| |
| templayer mvndcbase CONT |
| or barecont |
| and LI |
| or barelicont |
| and DIFF |
| and NSDM |
| and-not NWELL,nwelcheck |
| and HVI,hvcheck |
| |
| layer mvndc mvndcbase |
| grow 85 |
| shrink 85 |
| shrink 85 |
| grow 85 |
| or mvndcbase |
| labels CONT |
| |
| templayer mvnscbase CONT |
| or barecont |
| and LI |
| or barelicont |
| and DIFF,TAP |
| and NSDM |
| and NWELL,nwelcheck |
| and HVI,hvcheck |
| |
| layer mvnsc mvnscbase |
| grow 85 |
| shrink 85 |
| shrink 85 |
| grow 85 |
| or mvnscbase |
| labels CONT |
| |
| # See note above: Not checking PSDM |
| templayer mvpdcbase CONT |
| or barecont |
| and LI |
| or barelicont |
| and DIFF |
| and-not NSDM |
| and NWELL,nwelcheck |
| and HVI,hvcheck |
| |
| layer mvpdc mvpdcbase |
| grow 85 |
| shrink 85 |
| shrink 85 |
| grow 85 |
| or mvpdcbase |
| labels CONT |
| |
| templayer mvpdcnowell CONT |
| or barecont |
| and LI |
| or barelicont |
| and DIFF |
| and PSDM |
| and mvpfetexpand |
| and MET1 |
| and HVI,hvcheck |
| |
| layer mvpdc mvpdcnowell |
| grow 85 |
| shrink 85 |
| shrink 85 |
| grow 85 |
| or mvpdcnowell |
| labels CONT |
| |
| # Note: Not checking PSDM specifically, just lack of NSDM |
| templayer mvpscbase CONT |
| or barecont |
| and LI |
| or barelicont |
| and DIFF,TAP |
| and-not NSDM |
| and-not NWELL,nwelcheck |
| and-not mvpfetexpand |
| and HVI,hvcheck |
| |
| layer mvpsc mvpscbase |
| grow 85 |
| shrink 85 |
| shrink 85 |
| grow 85 |
| or mvpscbase |
| labels CONT |
| |
| templayer mvndicbase CONT |
| or barecont |
| and LI |
| or barelicont |
| and DIFF |
| and NSDM |
| and DIODE |
| and-not POLY |
| and-not PSDM |
| and-not LVTN |
| and HVI,hvcheck |
| |
| layer mvndic mvndicbase |
| grow 85 |
| shrink 85 |
| shrink 85 |
| grow 85 |
| or mvndicbase |
| labels CONT |
| |
| templayer nndicbase CONT |
| or barecont |
| and LI |
| or barelicont |
| and DIFF |
| and NSDM |
| and DIODE |
| and-not POLY |
| and-not PSDM |
| and LVTN |
| and HVI,hvcheck |
| |
| layer nndic nndicbase |
| grow 85 |
| shrink 85 |
| shrink 85 |
| grow 85 |
| or nndicbase |
| labels CONT |
| |
| templayer mvpdicbase CONT |
| or barecont |
| and LI |
| or barelicont |
| and DIFF |
| and PSDM |
| and DIODE |
| and-not POLY |
| and-not NSDM |
| and HVI,hvcheck |
| |
| layer mvpdic mvpdicbase |
| grow 85 |
| shrink 85 |
| shrink 85 |
| grow 85 |
| or mvpdicbase |
| labels CONT |
| |
| layer fomfill FOMFILL |
| or FOMFILLALT,DIFFFILLALT |
| labels FOMFILL,FOMFILLALT,DIFFFILLALT |
| |
| layer polyfill POLYFILL |
| or POLYFILLALT |
| labels POLYFILL,POLYFILLALT |
| |
| layer coreli LI,LITXT,LIPIN |
| and-not LIRES,LISHORT |
| and COREID |
| labels LI |
| labels LIPIN port |
| labels LITXT text |
| |
| layer locali LI,LITXT,LIPIN |
| and-not LIRES,LISHORT |
| and-not COREID |
| labels LI |
| labels LIPIN port |
| labels LITXT text |
| |
| layer rli LI |
| and LIRES,LISHORT |
| labels LIRES,LISHORT |
| |
| layer lifill LIFILL |
| or LIFILLALT |
| labels LIFILL,LIFILLALT |
| |
| layer mcon MCON |
| grow 95 |
| shrink 95 |
| shrink 85 |
| grow 85 |
| or MCON |
| labels MCON |
| |
| layer m1 MET1,MET1TXT,MET1PIN |
| and-not MET1RES,MET1SHORT |
| labels MET1 |
| labels MET1PIN port |
| labels MET1TXT text |
| |
| layer rm1 MET1 |
| and MET1RES,MET1SHORT |
| labels MET1RES,MET1SHORT |
| |
| layer m1fill MET1FILL |
| or MET1FILLALT |
| labels MET1FILL,MET1FILLALT |
| |
| #ifdef MIM |
| layer mimcap MET3 |
| and CAPM |
| labels CAPM |
| |
| layer mimcc VIA3 |
| and CAPM |
| grow 60 |
| grow 40 |
| shrink 40 |
| labels CAPM |
| |
| layer mimcap2 MET4 |
| and CAPM2 |
| labels CAPM2 |
| |
| layer mim2cc VIA4 |
| and CAPM2 |
| grow 190 |
| grow 210 |
| shrink 210 |
| labels CAPM2 |
| |
| #endif (MIM) |
| |
| #ifdef RERAM |
| #undef RERAM |
| # RERAM is drawn as-is |
| layer reram RERAM |
| #define RERAM |
| #endif (RERAM) |
| |
| templayer m2cbase VIA1 |
| #ifdef RERAM |
| #undef RERAM |
| and-not RERAM |
| #define RERAM |
| #endif (RERAM) |
| and-not COREID |
| grow 5 |
| or VIA1 |
| #ifdef RERAM |
| #undef RERAM |
| and-not RERAM |
| #define RERAM |
| #endif (RERAM) |
| grow 50 |
| |
| layer m2c m2cbase |
| grow 30 |
| shrink 30 |
| shrink 130 |
| grow 130 |
| or m2cbase |
| |
| layer m2 MET2,MET2TXT,MET2PIN |
| and-not MET2RES,MET2SHORT |
| labels MET2 |
| labels MET2PIN port |
| labels MET2TXT text |
| |
| layer rm2 MET2 |
| and MET2RES,MET2SHORT |
| labels MET2RES,MET2SHORT |
| |
| layer m2fill MET2FILL |
| or MET2FILLALT |
| labels MET2FILL,MET2FILLALT |
| |
| templayer m3cbase VIA2 |
| grow 40 |
| |
| layer m3c m3cbase |
| grow 60 |
| shrink 60 |
| shrink 140 |
| grow 140 |
| or m3cbase |
| |
| layer m3 MET3,MET3TXT,MET3PIN |
| and-not MET3RES,MET3SHORT |
| labels MET3 |
| labels MET3PIN port |
| labels MET3TXT text |
| |
| layer rm3 MET3 |
| and MET3RES,MET3SHORT |
| labels MET3RES,MET3SHORT |
| |
| layer m3fill MET3FILL |
| or MET3FILLALT |
| labels MET3FILL,MET3FILLALT |
| |
| #ifdef (METAL5) |
| |
| templayer via3base VIA3 |
| #ifdef MIM |
| and-not CAPM |
| #endif (MIM) |
| grow 60 |
| |
| layer via3 via3base |
| grow 40 |
| shrink 40 |
| shrink 160 |
| grow 160 |
| or via3base |
| |
| layer m4 MET4,MET4TXT,MET4PIN |
| and-not MET4RES,MET4SHORT |
| labels MET4 |
| labels MET4PIN port |
| labels MET4TXT text |
| |
| layer rm4 MET4 |
| and MET4RES,MET4SHORT |
| labels MET4RES,MET4SHORT |
| |
| layer m4fill MET4FILL |
| or MET4FILLALT |
| labels MET4FILL,MET4FILLALT |
| |
| layer m5 MET5,MET5TXT,MET5PIN |
| and-not MET5RES,MET5SHORT |
| labels MET5 |
| labels MET5PIN port |
| labels MET5TXT text |
| |
| layer rm5 MET5 |
| and MET5RES,MET5SHORT |
| labels MET5RES,MET5SHORT |
| |
| layer m5fill MET5FILL |
| or MET5FILLALT |
| labels MET5FILL,MET5FILLALT |
| |
| templayer via4base VIA4 |
| #ifdef MIM |
| and-not CAPM2 |
| #endif (MIM) |
| grow 190 |
| |
| layer via4 via4base |
| grow 210 |
| shrink 210 |
| shrink 590 |
| grow 590 |
| or via4base |
| #endif (METAL5) |
| |
| #ifdef REDISTRIBUTION |
| layer metrdl RDL,RDLTXT,RDLPIN |
| labels RDL |
| labels RDLPIN port |
| labels RDLTXT text |
| #endif |
| |
| # Find diffusion not covered in |
| # NSDM or PSDM and pull it into |
| # the next layer up |
| |
| templayer gentrans DIFF |
| and-not PSDM |
| and-not NSDM |
| and POLY |
| copyup baretrans |
| |
| templayer gendiff DIFF,TAP |
| and-not PSDM |
| and-not NSDM |
| and-not POLY |
| and-not COREID |
| copyup barediff |
| |
| # Handle contacts found by copyup |
| |
| templayer ndiccopy CONT |
| and LI |
| and DIODE |
| and DIFF |
| and-not NWELL,nwelcheck |
| and NSDM |
| and-not LVTN |
| and-not HVI,hvcheck |
| |
| layer ndic ndiccopy |
| grow 85 |
| shrink 85 |
| shrink 85 |
| grow 85 |
| or ndiccopy |
| labels CONT |
| |
| templayer mvndiccopy CONT |
| and LI |
| and DIODE |
| and DIFF |
| and-not NWELL,nwelcheck |
| and NSDM |
| and-not LVTN |
| and HVI,hvcheck |
| |
| layer mvndic mvndiccopy |
| grow 85 |
| shrink 85 |
| shrink 85 |
| grow 85 |
| or mvndiccopy |
| labels CONT |
| |
| templayer pdiccopy CONT |
| and LI |
| and DIODE |
| and DIFF |
| and PSDM |
| and-not HVI,hvcheck |
| |
| layer pdic pdiccopy |
| grow 85 |
| shrink 85 |
| shrink 85 |
| grow 85 |
| or pdiccopy |
| labels CONT |
| |
| templayer mvpdiccopy CONT |
| and LI |
| and DIODE |
| and PSDM |
| and HVI,hvcheck |
| |
| layer mvpdic mvpdiccopy |
| grow 85 |
| shrink 85 |
| shrink 85 |
| grow 85 |
| or mvpdiccopy |
| labels CONT |
| |
| templayer ndccopy CONT |
| and ndifcheck |
| |
| layer ndc ndccopy |
| grow 85 |
| shrink 85 |
| shrink 85 |
| grow 85 |
| or ndccopy |
| labels CONT |
| |
| templayer mvndccopy CONT |
| and mvndifcheck |
| |
| layer mvndc mvndccopy |
| grow 85 |
| shrink 85 |
| shrink 85 |
| grow 85 |
| or mvndccopy |
| labels CONT |
| |
| templayer pdccopy CONT |
| and pdifcheck |
| |
| layer pdc pdccopy |
| grow 85 |
| shrink 85 |
| shrink 85 |
| grow 85 |
| or pdccopy |
| labels CONT |
| |
| templayer mvpdccopy CONT |
| and mvpdifcheck |
| |
| layer mvpdc mvpdccopy |
| grow 85 |
| shrink 85 |
| shrink 85 |
| grow 85 |
| or mvpdccopy |
| labels CONT |
| |
| templayer pccopy CONT |
| and polycheck |
| |
| layer pc pccopy |
| grow 85 |
| shrink 85 |
| shrink 85 |
| grow 85 |
| or pccopy |
| labels CONT |
| |
| templayer nsccopy CONT |
| and nsubcheck |
| |
| layer nsc nsccopy |
| grow 85 |
| shrink 85 |
| shrink 85 |
| grow 85 |
| or nsccopy |
| labels CONT |
| |
| templayer mvnsccopy CONT |
| and mvnsubcheck |
| |
| layer mvnsc mvnsccopy |
| grow 85 |
| shrink 85 |
| shrink 85 |
| grow 85 |
| or mvnsccopy |
| labels CONT |
| |
| templayer psccopy CONT |
| and psubcheck |
| |
| layer psc psccopy |
| grow 85 |
| shrink 85 |
| shrink 85 |
| grow 85 |
| or psccopy |
| labels CONT |
| |
| templayer mvpsccopy CONT |
| and mvpsubcheck |
| |
| layer mvpsc mvpsccopy |
| grow 85 |
| shrink 85 |
| shrink 85 |
| grow 85 |
| or mvpsccopy |
| labels CONT |
| |
| # Find contacts not covered in |
| # metal and pull them into the |
| # next layer up |
| |
| templayer barelicont CONT |
| and LI |
| and-not DIFF,TAP |
| and-not POLY |
| and-not DIODE |
| and-not nsubcheck |
| and-not psubcheck |
| and-not mvnsubcheck |
| and-not mvpsubcheck |
| and-not CORELI |
| copyup barelicont |
| |
| templayer barecont CONT |
| and-not LI |
| and-not nsubcheck |
| and-not psubcheck |
| and-not mvnsubcheck |
| and-not mvpsubcheck |
| and-not CORELI |
| copyup barecont |
| |
| layer glass GLASS,PADTXT,PADPIN |
| labels GLASS |
| labels PADPIN port |
| labels PADTXT text |
| |
| templayer boundary BOUND,STDCELL,PADCELL |
| boundary |
| |
| layer comment LVSTEXT |
| labels LVSTEXT text |
| |
| layer comment TTEXT |
| labels TTEXT text |
| |
| # Do not infer generic "fillblock" from GDS input |
| # layer fillblock FILLOBSM5 |
| # and FILLOBSM1,FILLOBSM2,FILLOBSM3,FILLOBSM4 |
| |
| # Use the obstruction types for fill block on individual layers |
| templayer obspoly FILLOBSPOLY |
| and-not POLY |
| |
| layer obsactive FILLOBSFOM |
| and-not DIFF,TAP |
| or obspoly |
| labels FILLOBSFOM,FILLOBSPOLY |
| |
| layer obsli LIBLOCK |
| and-not LI |
| labels LIBLOCK |
| |
| layer obsm1 FILLOBSM1,MET1BLOCK |
| and-not MET1 |
| labels FILLOBSM1,MET1BLOCK |
| |
| layer obsm2 FILLOBSM2,MET2BLOCK |
| and-not MET2 |
| labels FILLOBSM2,MET2BLOCK |
| |
| layer obsm3 FILLOBSM3,MET3BLOCK |
| and-not MET3 |
| labels FILLOBSM3,MET3BLOCK |
| |
| layer obsm4 FILLOBSM4,MET4BLOCK |
| and-not MET4 |
| labels FILLOBSM4,MET4BLOCK |
| |
| layer obsm5 FILLOBSM5,MET5BLOCK |
| and-not MET5 |
| labels FILLOBSM5,MET5BLOCK |
| |
| # MOS Varactor |
| |
| layer var POLY |
| and TAP |
| and NSDM |
| and NWELL,nwelcheck |
| and-not HVI,hvcheck |
| and-not HVTP |
| # NOTE: Else forms a varactor that is not in the vendor netlist. |
| and-not COREID |
| labels POLY |
| |
| layer varhvt POLY |
| and TAP |
| and NSDM |
| and NWELL,nwelcheck |
| and-not HVI,hvcheck |
| and HVTP |
| labels POLY |
| |
| layer mvvar POLY |
| and TAP |
| and NSDM |
| and NWELL,nwelcheck |
| and HVI,hvcheck |
| labels POLY |
| |
| calma NWELL 64 20 |
| calma DIFF 65 20 |
| calma TAP 65 44 |
| calma DNWELL 64 18 |
| calma SUBCUT 81 53 |
| calma PWRES 64 13 |
| # LVTN |
| calma LVTN 125 44 |
| # HVTR |
| calma HVTR 18 20 |
| # HVTP |
| calma HVTP 78 44 |
| # SONOS (TUNM) |
| calma SONOS 80 20 |
| # NSDM (NPLUS) |
| calma NSDM 93 44 |
| # PSDM (PPLUS) |
| calma PSDM 94 20 |
| # HVI (THKOX) |
| calma HVI 75 20 |
| # EDID |
| calma EDID 81 57 |
| # NPC |
| calma NPC 95 20 |
| # P+ POLY MASK |
| calma RPM 86 20 |
| calma URPM 79 20 |
| calma LDNTM 11 44 |
| calma HVNTM 125 20 |
| # Poly resistor ID mark |
| calma POLYRES 66 13 |
| # Diffusion resistor ID mark |
| calma DIFFRES 65 13 |
| calma POLY 66 20 |
| calma POLYMOD 66 83 |
| # 3.3V native FET ID mark |
| calma LVID 81 60 |
| # Diode ID mark |
| calma DIODE 81 23 |
| # Bipolar NPN mark |
| calma NPNID 82 20 |
| # Bipolar PNP mark |
| calma PNPID 82 44 |
| # Capacitor ID |
| calma CAPID 82 64 |
| # Core area ID mark |
| calma COREID 81 2 |
| # Photodiode ID mark |
| calma PHOTO 81 81 |
| # Standard cell ID mark |
| calma STDCELL 81 4 |
| # Padframe cell ID mark |
| calma PADCELL 81 3 |
| # Seal ring ID mark |
| calma SEALID 81 1 |
| # Low tap density ID mark |
| calma LOWTAPDENSITY 81 14 |
| # ESD area ID |
| calma ESDID 81 19 |
| # Various unused layers |
| calma OUTLINE 236 0 |
| calma POLYCUT 66 14 |
| calma POLYGATE 66 9 |
| calma DIFFCUT 65 14 |
| calma HVNWELLID 81 63 |
| calma PADDIFFID 81 6 |
| calma PADMETALID 81 8 |
| calma PADCENTERID 81 20 |
| |
| # LICON |
| calma CONT 66 44 |
| calma LI 67 20 |
| calma MCON 67 44 |
| |
| calma MET1 68 20 |
| calma VIA1 68 44 |
| #ifdef RERAM |
| #undef RERAM |
| calma RERAM 201 20 |
| #define RERAM |
| #endif (RERAM) |
| calma MET2 69 20 |
| calma VIA2 69 44 |
| calma MET3 70 20 |
| #ifdef METAL5 |
| calma VIA3 70 44 |
| calma MET4 71 20 |
| calma VIA4 71 44 |
| calma MET5 72 20 |
| #endif |
| #ifdef REDISTRIBUTION |
| calma RDL 74 20 |
| #endif |
| calma GLASS 76 20 |
| |
| calma SUBTXT 64 59 |
| calma PADTXT 76 5 |
| calma DIFFTXT 65 6 |
| calma TAPTXT 65 5 |
| calma WELLTXT 64 5 |
| calma LITXT 67 5 |
| calma POLYTXT 66 5 |
| calma MET1TXT 68 5 |
| calma MET2TXT 69 5 |
| calma MET3TXT 70 5 |
| #ifdef METAL5 |
| calma MET4TXT 71 5 |
| calma MET5TXT 72 5 |
| #endif |
| #ifdef REDISTRIBUTION |
| calma RDLTXT 74 5 |
| #endif |
| |
| calma LIRES 67 13 |
| calma MET1RES 68 13 |
| calma MET2RES 69 13 |
| calma MET3RES 70 13 |
| #ifdef METAL5 |
| calma MET4RES 71 13 |
| calma MET5RES 72 13 |
| #endif |
| |
| calma FOMFILL 23 28 |
| calma POLYFILL 28 28 |
| calma LIFILL 56 28 |
| calma MET1FILL 36 28 |
| calma MET2FILL 41 28 |
| calma MET3FILL 34 28 |
| #ifdef METAL5 |
| calma MET4FILL 51 28 |
| calma MET5FILL 59 28 |
| #endif |
| |
| calma POLYSHORT 66 15 |
| calma LISHORT 67 15 |
| calma MET1SHORT 68 15 |
| calma MET2SHORT 69 15 |
| calma MET3SHORT 70 15 |
| #ifdef METAL5 |
| calma MET4SHORT 71 15 |
| calma MET5SHORT 72 15 |
| #endif |
| |
| calma SUBPIN 122 16 |
| calma PADPIN 76 16 |
| calma DIFFPIN 65 16 |
| calma POLYPIN 66 16 |
| calma WELLPIN 64 16 |
| calma LIPIN 67 16 |
| calma MET1PIN 68 16 |
| calma MET2PIN 69 16 |
| calma MET3PIN 70 16 |
| #ifdef METAL5 |
| calma MET4PIN 71 16 |
| calma MET5PIN 72 16 |
| #endif |
| #ifdef REDISTRIBUTION |
| calma RDLPIN 74 16 |
| #endif |
| |
| calma BOUND 235 4 |
| |
| calma LVSTEXT 83 44 |
| |
| #ifdef (MIM) |
| calma CAPM 89 44 |
| calma CAPM2 97 44 |
| #endif (MIM) |
| |
| # Obstruction (fill block) layers |
| calma FILLOBSFOM 22 24 |
| calma FILLOBSPOLY 33 24 |
| calma FILLOBSM1 62 24 |
| calma FILLOBSM2 105 52 |
| calma FILLOBSM3 107 24 |
| #ifdef METAL5 |
| calma FILLOBSM4 112 4 |
| calma FILLOBSM5 117 4 |
| #endif |
| |
| # Alternate layer purpose used for fill |
| # which uses the regular layer numbers. |
| calma FOMFILLALT 22 99 |
| calma DIFFFILLALT 65 99 |
| calma POLYFILLALT 66 99 |
| calma LIFILLALT 67 99 |
| calma MET1FILLALT 68 99 |
| calma MET2FILLALT 69 99 |
| calma MET3FILLALT 70 99 |
| #ifdef METAL5 |
| calma MET4FILLALT 71 99 |
| calma MET5FILLALT 72 99 |
| #endif |
| |
| # Alternate layer purpose used for obstruction (fill block) |
| calma LIBLOCK 67 10 |
| calma MET1BLOCK 68 10 |
| calma MET2BLOCK 69 10 |
| calma MET3BLOCK 70 10 |
| #ifdef METAL5 |
| calma MET4BLOCK 71 10 |
| calma MET5BLOCK 72 10 |
| #endif |
| |
| #----------------------------------------------------------------------- |
| |
| style rdlimport |
| # This style is for reading shapes generated with the RDL layers |
| |
| scalefactor 10 nanometers |
| gridlimit 5 |
| |
| options ignore-unknown-layer-labels no-reconnect-labels |
| |
| layer mrdl RDL |
| layer mrdlc RDLC |
| |
| calma RDL 10 0 |
| calma RDLC 20 0 |
| |
| end |
| |
| #----------------------------------------------------- |
| # Digital flow maze router cost parameters |
| #----------------------------------------------------- |
| |
| mzrouter |
| end |
| |
| #----------------------------------------------------- |
| # Vendor DRC rules |
| #----------------------------------------------------- |
| |
| drc |
| |
| style drc variants (fast),(full),(routing) |
| scalefactor 10 |
| cifstyle drc |
| |
| variants (fast),(full) |
| |
| #----------------------------- |
| # DNWELL |
| #----------------------------- |
| |
| width dnwell 3000 "Deep N-well width < %d (dnwell.2)" |
| spacing dnwell dnwell 6300 touching_ok "Deep N-well spacing < %d (dnwell.3)" |
| spacing allnwell dnwell 4500 surround_ok \ |
| "Deep N-well spacing to N-well < %d (nwell.7)" |
| |
| variants (full) |
| cifmaxwidth nwell_missing 0 bend_illegal \ |
| "N-well overlap of Deep N-well < 0.4um outside, 1.03um inside (nwell.5a, 7)" |
| cifmaxwidth dnwell_missing 0 bend_illegal \ |
| "SONOS nFET must be in Deep N-well (tunm.6a)" |
| |
| cifmaxwidth pdiff_crosses_dnwell 0 bend_illegal \ |
| "P+ diff cannot straddle Deep N-well (dnwell.5)" |
| variants (fast),(full) |
| |
| width photo 3000 "Photodiode width < %d (photo.2)" |
| spacing photo photo 5000 touching_ok "Photodiode spacing < %d (photo.3)" |
| spacing photo dnwell 5300 touching_illegal \ |
| "Photodiode spacing to deep nwell < %d (photo.4)" |
| |
| #----------------------------- |
| # NWELL |
| #----------------------------- |
| |
| width allnwell 840 "N-well width < %d (nwell.1)" |
| spacing allnwell allnwell 1270 touching_ok "N-well spacing < %d (nwell.2a)" |
| |
| variants (full) |
| cifmaxwidth nwell_missing_tap 0 bend_illegal \ |
| "All nwells must contain metal-connected N+ taps (nwell.4)" |
| |
| cifspacing mvnwell lvnwell 2000 touching_illegal \ |
| "Spacing of HV nwell to LV nwell < 2.0um (nwell.8)" |
| cifspacing mvnwell mvnwell 2000 touching_ok \ |
| "Spacing of HV nwell to HV nwell < 2.0um (nwell.8)" |
| |
| cifmaxwidth lvdiff_in_mvnwell 0 bend_illegal \ |
| "All HV nwell can contain only HV diffusion (diff/tap.21)" |
| |
| variants (fast),(full) |
| |
| #----------------------------- |
| # DIFF |
| #----------------------------- |
| |
| width *ndiff,nfet,scnfet,scnfetlvt,npd,npass,*nsd,*ndiode,ndiffres,*pdiff,pfet,scpfet,scpfethvt,ppu,*psd,*pdiode,pdiffres,fomfill \ |
| 150 "Diffusion width < %d (diff/tap.1)" |
| width *mvndiff,mvnfet,mvnfetesd,mvnnfet,nnfet,*mvndiode,*nndiode,mvndiffres,*mvpdiff,mvpfet,mvpfetesd,*mvpdiode,mvpdiffres 290 \ |
| "MV Diffusion width < %d (diff/tap.14)" |
| |
| width *mvnsd,*mvpsd 150 "MV Tap width < %d (diff/tap.1)" |
| extend *mvpsd *mvndiff 700 "MV Butting tap length < %d (diff/tap.16)" |
| extend *mvnsd *mvpdiff 700 "MV Butting tap length < %d (diff/tap.16)" |
| extend *psd *ndiff 290 "Butting tap length < %d (diff/tap.4)" |
| extend *nsd *pdiff 290 "Butting tap length < %d (diff/tap.4)" |
| width mvpdiffres 150 "MV P-Diffusion resistor width < %d (diff/tap.14a)" |
| spacing alldifflv,var,varhvt,corenvar,corepvar,fomfill \ |
| alldifflv,var,varhvt,corenvar,corepvar,fomfill 270 touching_ok \ |
| "Diffusion spacing < %d (diff/tap.3)" |
| spacing alldifflv,var,varhvt alldiffmv,mvvar 270 touching_illegal \ |
| "LV to MV Diffusion spacing < %d (diff/tap.3)" |
| spacing alldiffmvnontap,mvvar alldiffmvnontap,mvvar 300 touching_ok \ |
| "MV Diffusion spacing < %d (diff/tap.15a)" |
| spacing alldiffmv *mvnsd,*mvpsd 270 touching_ok \ |
| "MV Diffusion to MV tap spacing < %d (diff/tap.3)" |
| spacing *mvndiff,mvnfet,mvnfetesd,mvnnfet,nnfet,*mvndiode,*nndiode,mvndiffres,mvvar *mvpsd 370 \ |
| touching_ok "MV P-Diffusion to MV N-tap spacing < %d (diff/tap.15b)" |
| spacing *mvnsd,*mvpdiff,mvpfet,mvpfetesd,mvvar,*mvpdiode *mvpsd,*psd 760 touching_illegal \ |
| "MV Diffusion in N-well to P-tap spacing < %d (diff/tap.20 + diff/tap.17,19)" |
| spacing *ndiff,*ndiode,nfet allnwell 340 touching_illegal \ |
| "N-Diffusion spacing to N-well < %d (diff/tap.9)" |
| spacing *mvndiff,*mvndiode,mvnfet,mvnnfet,nnfet allnwell 340 touching_illegal \ |
| "N-Diffusion spacing to N-well < %d (diff/tap.9)" |
| spacing *psd allnwell 130 touching_illegal \ |
| "P-tap spacing to N-well < %d (diff/tap.11)" |
| spacing *mvpsd allnwell 130 touching_illegal \ |
| "P-tap spacing to N-well < %d (diff/tap.11)" |
| surround *nsd allnwell 180 absence_illegal \ |
| "N-well overlap of N-tap < %d (diff/tap.10)" |
| surround *mvnsd allnwell 330 absence_illegal \ |
| "N-well overlap of MV N-tap < %d (diff/tap.19)" |
| surround *pdiff,*pdiode,pfet,scpfet,ppu allnwell 180 absence_illegal \ |
| "N-well overlap of P-Diffusion < %d (diff/tap.8)" |
| surround *mvpdiff,*mvpdiode,mvpfet,mvpfetesd allnwell 330 absence_illegal \ |
| "N-well overlap of P-Diffusion < %d (diff/tap.17)" |
| surround mvvar allnwell 560 absence_illegal \ |
| "N-well overlap of MV varactor < %d (lvtn.10 + lvtn.4b)" |
| spacing *mvndiode *mvndiode 1070 touching_ok \ |
| "MV N-diode spacing < %d (hvntm.2 + 2 * hvntm.3)" |
| |
| variants (full) |
| cifspacing allmvdiffnowell lvnwell 825 touching_illegal \ |
| "MV diffusion to LV nwell spacing < %d (hvi.5 + nsd/psd.5)" |
| cifspacing nwell_or_hvi nwell_or_hvi 700 touching_ok \ |
| "HVI to HVI or LV nwell spacing < %d (hvi.5)" |
| variants (fast),(full) |
| |
| spacing allnfets allpactivenonfet 270 touching_illegal \ |
| "nFET cannot abut P-diffusion (diff/tap.3)" |
| spacing allpfets allnactivenonfet 270 touching_illegal \ |
| "pFET cannot abut N-diffusion (diff/tap.3)" |
| |
| # Butting junction rules |
| edge4way (*psd)/a ~(*ndiff,*psd)/a 125 ~(*ndiff)/a (*ndiff)/a 125 \ |
| "N-Diffusion to P-tap spacing < %d across butted junction (psd.5b)" |
| edge4way (*ndiff)/a ~(*ndiff,*psd)/a 125 ~(*psd)/a (*psd)/a 125 \ |
| "N-Diffusion to P-tap spacing < %d across butted junction (psd.5a)" |
| edge4way (*nsd)/a ~(*pdiff,*nsd)/a 125 ~(*pdiff)/a (*pdiff)/a 125 \ |
| "P-Diffusion to N-tap spacing < %d across butted junction (nsd.5b)" |
| edge4way (*pdiff)/a ~(*pdiff,*nsd)/a 125 ~(*nsd)/a (*nsd)/a 125 \ |
| "P-Diffusion to N-tap spacing < %d across butted junction (nsd.5a)" |
| |
| edge4way (*mvpsd)/a ~(*mvndiff,*mvpsd)/a 125 ~(*mvndiff)/a (*mvndiff)/a 125 \ |
| "MV N-Diffusion to MV P-tap spacing < %d across butted junction (psd.5b)" |
| edge4way (*mvndiff)/a ~(*mvndiff,*mvpsd)/a 125 ~(*mvpsd)/a (*mvpsd)/a 125 \ |
| "MV N-Diffusion to MV P-tap spacing < %d across butted junction (psd.5a)" |
| edge4way (*mvnsd)/a ~(*mvpdiff,*mvnsd)/a 125 ~(*mvpdiff)/a (*mvpdiff)/a 125 \ |
| "MV P-Diffusion to MV N-tap spacing < %d across butted junction (nsd.5b)" |
| edge4way (*mvpdiff)/a ~(*mvpdiff,*mvnsd)/a 125 ~(*mvnsd)/a (*mvnsd)/a 125 \ |
| "MV P-Diffusion to MV N-tap spacing < %d across butted junction (nsd.5a)" |
| |
| # Sandwiched butting junction restrictions |
| edge4way (*pdiff)/a (*nsd)/a 400 ~(*pdiff)/a 0 0 "NSDM width < %d (diff/tap.5)" |
| edge4way (*ndiff)/a (*psd)/a 400 ~(*ndiff)/a 0 0 "PSDM width < %d (diff/tap.5)" |
| |
| # Extended drain rules |
| edge4way space/a ed/a 5000 ~(space)/a 0 0 "LDNFET/LDPFET width < %d (denmos/depmos.2)" |
| edge4way (*mvndiff)/a mvnfet 1055 ~(ed)/a 0 0 "LDNFET length < %d (denmos.1)" |
| edge4way (*mvnsd)/a ed/a 2510 ~(*mvndiff)/a 0 0 \ |
| "LDNFET drain to source < %d (denmos.6 + denmos.3)" |
| edge4way (*mvpdiff)/a mvpfet 1050 ~(ed)/a 0 0 "LDPFET length < %d (depmos.1)" |
| edge4way (*mvpsd)/a ed/a 2110 ~(*mvpdiff)/a 0 0 \ |
| "LDPFET drain to source < %d (depmos.6 + depmos.3)" |
| |
| area *nsd,*mvnsd 70110 150 "N-tap minimum area < 0.07011um^2 (nsd.10b)" |
| area *psd,*mvpsd 70110 150 "P-tap minimum area < 0.07011um^2 (psd.10b)" |
| |
| angles allactive 90 "Only 90 degree angles permitted on diff and tap (x.2)" |
| |
| variants (full) |
| cifmaxwidth tap_missing_licon 0 bend_illegal "All taps must be contacted (licon.16)" |
| |
| # Latchup rules |
| cifmaxwidth ptap_missing 0 bend_illegal \ |
| "N-diff distance to P-tap must be < 15.0um (LU.2)" |
| cifmaxwidth dptap_missing 0 bend_illegal \ |
| "N-diff distance to P-tap in deep nwell.must be < 15.0um (LU.2.1)" |
| cifmaxwidth ntap_missing 0 bend_illegal \ |
| "P-diff distance to N-tap must be < 15.0um (LU.3)" |
| |
| variants (fast),(full) |
| |
| #----------------------------- |
| # POLY |
| #----------------------------- |
| |
| width allpoly,polyfill 150 "poly width < %d (poly.1a)" |
| spacing allpoly,polyfill allpoly,polyfill 210 touching_ok "poly spacing < %d (poly.2)" |
| |
| spacing allpolynonfet,polyfill \ |
| *ndiff,*mvndiff,*ndiode,*nndiode,ndiffres,*ndiodelvt,*pdiff,*mvpdiff,*pdiode,pdiffres,*pdiodelvt,*pdiodehvt \ |
| 75 corner_ok allfets \ |
| "poly spacing to Diffusion < %d (poly.4)" |
| spacing npres *nsd 480 touching_illegal \ |
| "poly resistor spacing to N-tap < %d (poly.9)" |
| overhang *ndiff,rndiff nfet,scnfet,scnfetlvt,npd,npass,nsonos 250 "N-Diffusion overhang of nFET < %d (poly.7)" |
| overhang *mvndiff,mvrndiff mvnfet,mvnnfet,nnfet 250 \ |
| "N-Diffusion overhang of nFET < %d (poly.7)" |
| overhang *pdiff,rpdiff pfet,scpfet,ppu 250 "P-Diffusion overhang of pmos < %d (poly.7)" |
| overhang *mvpdiff,mvrpdiff mvpfet,mvpfetesd 250 "P-Diffusion overhang of pmos < %d (poly.7)" |
| overhang *poly allfetsstd,allfetsspecial 130 "poly overhang of transistor < %d (poly.8)" |
| overhang *poly allfetscore 110 "poly overhang of SRAM core transistor < %d (poly.8)" |
| rect_only allfets "No bends in transistors (poly.11)" |
| extend xpc/a xhrpoly,uhrpoly 2160 \ |
| "poly contact extends poly resistor by < %d (licon.1c + li.5)" |
| spacing xhrpoly,uhrpoly,xpc xhrpoly,uhrpoly,xpc 210 touching_illegal \ |
| "Distance between precision resistors < %d (poly.2)" |
| spacing xhrpoly,uhrpoly,xpc *poly,allfets,mrp1,rmp 400 touching_illegal \ |
| "Distance from precision resistor to poly < %d (rpm.7 + rpm.3)" |
| |
| variants (fast) |
| |
| spacing xhrpoly,uhrpoly,xpc allndifflv,allndiffmv 525 touching_illegal \ |
| "Distance from precision resistor to N+ diffusion < %d (rpm.3 + rpm.6 + nsd.5a)" |
| spacing xhrpoly,uhrpoly,xpc *poly 400 touching_illegal \ |
| "Distance from precision resistor to unrelated poly < %d (rpm.3 + rpm.7)" |
| spacing xhrpoly,uhrpoly,xpc allndiffmvnontap 585 touching_illegal \ |
| "Distance from precision resistor to MV N+ device < %d (rpm.3 + rpm.9 + hvntm.3)" |
| |
| # Minimum width requirement means actual spacing from res to ndiff has to be |
| # constructed from mask rules. These supercede the simpler checks. |
| |
| variants (full) |
| |
| cifmaxwidth rpm_nsd_check 0 bend_illegal \ |
| "Distance from precision resistor to N+ diffusion < 0.525um (rpm.3 + rpm.6 + nsd.5a)" |
| cifmaxwidth rpm_poly_check 0 bend_illegal \ |
| "Distance from precision resistor to unrelated poly < 0.4um (rpm.3 + rpm.7)" |
| cifmaxwidth rpm_hvntm_check 0 bend_illegal \ |
| "Distance from precision resistor to MV N+ device < 0.585um (rpm.3 + rpm.9 + hvntm.3)" |
| |
| variants (fast),(full) |
| |
| angles allpoly,polyfill 90 "Only 90 degree angles permitted on poly (x.2)" |
| |
| #-------------------------------------------------------------------- |
| # HVTP |
| #-------------------------------------------------------------------- |
| |
| spacing pfethvt,pdiodehvt,varactorhvt pfet,ppu,scpfet,mvpfet,mvpfetesd,pfetlvt,pfetmvt \ |
| 360 touching_illegal \ |
| "Min. spacing between pFET and HVTP < %d (hvtp.4)" |
| |
| spacing pfethvt,pdiodehvt,varactorhvt varactor 360 touching_illegal \ |
| "Min. spacing between varactor and HVTP < %d (hvtp.4 + varac.3)" |
| |
| #-------------------------------------------------------------------- |
| # LVTN |
| #-------------------------------------------------------------------- |
| |
| spacing pfetlvt,nfetlvt,pdiodelvt,ndiodelvt \ |
| allfetsnolvt 360 touching_illegal \ |
| "Min. spacing between FET and LVTN < %d (lvtn.3a)" |
| |
| spacing pfetlvt,nfetlvt,pdiodelvt,ndiodelvt scpfethvt,pfethvt,pdiodehvt,varactorhvt \ |
