| ### | |
| ### Source file sky130.tech | |
| ### Process this file with the preproc.py macro processor | |
| ### Note that the tech name is always TECHNAME for | |
| ### magic; this keeps compatibility between layouts | |
| ### for all process variants. | |
| ### | |
| #------------------------------------------------------------------------ | |
| # Copyright (c) 2020 R. Timothy Edwards | |
| # Revisions: See below | |
| # | |
| # This file is an Open Source foundry process describing | |
| # the SkyWater sky130 hybrid 0.18um / 0.13um fabrication | |
| # process. The file may be distributed under the terms | |
| # of the Apache 2.0 license agreement. | |
| # | |
| #------------------------------------------------------------------------ | |
| tech | |
| format 35 | |
| TECHNAME | |
| end | |
| version | |
| version REVISION | |
| description "SkyWater SKY130: Open Source rules and DRC" | |
| requires magic-8.3.411 | |
| end | |
| #------------------------------------------------------------------------ | |
| # Status 7/10/20: Rev 1 (alpha): | |
| # First public release | |
| # Status 8/14/20: Rev 2 (alpha): | |
| # Started updating with new device/model naming convention | |
| # Status 1/3/21: Taking out of beta and declaring an official release. | |
| # Status 3/17/22: Added fringeshieldhalo to improve parasitic capacitance | |
| # calculations. | |
| # Status 5/21/22: Added sidewall edge (spacing) enlargement. | |
| #------------------------------------------------------------------------ | |
| #------------------------------------------------------------------------ | |
| # Supported device types | |
| #------------------------------------------------------------------------ | |
| # device name magic ID layer description | |
| #------------------------------------------------------------------------ | |
| # sky130_fd_pr__nfet_01v8 nfet standard nFET | |
| # sky130_fd_pr__nfet_01v8 scnfet standard nFET in standard cell** | |
| # sky130_fd_pr__special_nfet_latch npd special nFET in SRAM cell | |
| # sky130_fd_pr__special_nfet_pass npass special nFET in SRAM cell | |
| # sky130_fd_pr__nfet_01v8_lvt nfetlvt low Vt nFET | |
| # sky130_fd_pr__nfet_01v8_lvt scnfetlvt low Vt nFET in standard cell** | |
| # sky130_fd_bs_flash__special_sonosfet_star nsonos SONOS nFET | |
| # sky130_fd_pr__pfet_01v8 pfet standard pFET | |
| # sky130_fd_pr__pfet_01v8 scpfet standard pFET in standard cell** | |
| # sky130_fd_pr__special_pfet_latch ppu special pFET in SRAM cell | |
| # sky130_fd_pr__pfet_01v8_lvt pfetlvt low Vt pFET | |
| # sky130_fd_pr__pfet_01v8_mvt pfetmvt med Vt pFET | |
| # sky130_fd_pr__pfet_01v8_hvt pfethvt high Vt pFET | |
| # sky130_fd_pr__nfet_03v3_nvt nnfet native nFET | |
| # sky130_fd_pr__pfet_g5v0d10v5 mvpfet thickox pFET | |
| # sky130_fd_pr__nfet_g5v0d10v5 mvnfet thickox nFET | |
| # sky130_fd_pr__nfet_05v0_nvt mvnnfet thickox native nFET | |
| # sky130_fd_pr__nfet_g5v0d16v0 mvnfet extended-drain nFET*** | |
| # sky130_fd_pr__pfet_g5v0d16v0 mvpfet extended-drain pFET*** | |
| # sky130_fd_pr__diode_pw2nd_05v5 ndiode n+ diff diode | |
| # sky130_fd_pr__diode_pw2nd_05v5_lvt ndiodelvt low Vt n+ diff diode | |
| # sky130_fd_pr__diode_pw2nd_05v5_nvt nndiode diode with nndiff | |
| # sky130_fd_pr__diode_pw2nd_11v0 mvndiode thickox n+ diff diode | |
| # sky130_fd_pr__diode_pd2nw_05v5 pdiode p+ diff diode | |
| # sky130_fd_pr__diode_pd2nw_05v5_lvt pdiodelvt low Vt p+ diff diode | |
| # sky130_fd_pr__diode_pd2nw_05v5_hvt pdiodehvt high Vt p+ diff diode | |
| # sky130_fd_pr__diode_pd2nw_11v0 mvpdiode thickox p+ diff diode | |
| # sky130_fd_pr__npn_05v5 pbase NPN in deep nwell | |
| # sky130_fd_pr__npn_11v0 pbase thick oxide gated NPN | |
| # sky130_fd_pr__pnp_05v5 nbase PNP | |
| # sky130_fd_pr__cap_mim_m3_1 mimcap MiM cap 1st plate | |
| # sky130_fd_pr__cap_mim_m3_2 mimcap2 MiM cap 2nd plate | |
| # sky130_fd_pr__res_generic_nd rdn n+ diff resistor | |
| # sky130_fd_pr__res_generic_nd__hv mvrdn thickox n+ diff resistor | |
| # sky130_fd_pr__res_generic_pd rdp p+ diff resistor | |
| # sky130_fd_pr__res_generic_pd__nv mvrdp thickox p+ diff resistor | |
| # sky130_fd_pr__res_generic_l1 rli local interconnect resistor | |
| # sky130_fd_pr__res_generic_po npres n+ poly resistor | |
| # sky130_fd_pr__res_high_po_* ppres (*) p+ poly resistor (300 Ohms/sq) | |
| # sky130_fd_pr__res_xhigh_po_* xres (*) p+ poly resistor (2k Ohms/sq) | |
| # sky130_fd_pr__cap_var_lvt varactor low Vt varactor | |
| # sky130_fd_pr__cap_var_hvt varactorhvt high Vt varactor | |
| # sky130_fd_pr__cap_var mvvaractor thickox varactor | |
| # sky130_fd_pr__res_iso_pw rpw pwell resistor (in deep nwell) | |
| # sky130_fd_pr__esd_nfet_g5v0d10v5 mvnfetesd ESD thickox nFET | |
| # sky130_fd_pr__esd_pfet_g5v0d10v5 mvpfetesd ESD thickox pFET | |
| # sky130_fd_pr__photodiode photo Photodiode | |
| # | |
| # (*) Note that ppres may extract into some generic type called | |
| # "sky130_fd_pr__res_xhigh_po", but only specific sizes of xhrpoly are | |
| # allowed, and these are created from fixed layouts like the types below. | |
| # | |
| # (**) nFET and pFET in standard cells are the same as devices | |
| # outside of the standard cell except for the DRC rule for | |
| # FET to diffusion contact spacing (which is 0.05um, not 0.055um) | |
| # | |
| # (***) The extended-drain devices have the same identifying | |
| # FET type as the thick oxide devices, but the drain side of the | |
| # device is represented by layer extdrain extending to nsd or psd. | |
| # | |
| #------------------------------------------------------------- | |
| # The following devices are not extracted but are represented | |
| # only by script-generated subcells in the PDK. | |
| #------------------------------------------------------------- | |
| # sky130_fd_pr__esd_nfet_01v8 ESD nFET | |
| # sky130_fd_pr__esd_nfet_05v0_nvt ESD native nFET | |
| # sky130_fd_pr__special_nfet_pass_flash flash nFET device | |
| # sky130_fd_pr__esd_rf_diode_pw2nd_11v0 ESD n+ diode | |
| # sky130_fd_pr__esd_rf_diode_pd2nw_11v0 ESD p+ diode | |
| # sky130_fd_pr__cap_vpp_* Vpp cap | |
| # sky130_fd_pr__ind_* inductor | |
| # sky130_fd_pr__fuse_m4 metal fuse device | |
| #-------------------------------------------------------------- | |
| #----------------------------------------------------- | |
| # Tile planes | |
| #----------------------------------------------------- | |
| planes | |
| dwell,dw | |
| well,w | |
| active,a | |
| locali,li1,li | |
| metal1,m1 | |
| metal2,m2 | |
| metal3,m3 | |
| #ifdef METAL5 | |
| #ifdef MIM | |
| cap1,c1 | |
| #endif (MIM) | |
| metal4,m4 | |
| #ifdef MIM | |
| cap2,c2 | |
| #endif (MIM) | |
| metal5,m5 | |
| #endif (METAL5) | |
| #ifdef REDISTRIBUTION | |
| metali,mi | |
| #endif | |
| block,b | |
| comment,c | |
| end | |
| #----------------------------------------------------- | |
| # Tile types | |
| #----------------------------------------------------- | |
| types | |
| # Deep nwell | |
| dwell dnwell,dnw | |
| dwell isosubstrate,isosub | |
| dwell photodiode,photo | |
| # Wells | |
| well nwell,nw | |
| well pwell,pw | |
| well rpw,rpwell | |
| -well obswell | |
| well pbase,npn | |
| well nbase,pnp | |
| # Transistors | |
| active nmos,ntransistor,nfet | |
| -active scnmos,scntransistor,scnfet | |
| -active npd,npdfet,sramnfet | |
| -active npass,npassfet,srampassfet | |
| active pmos,ptransistor,pfet | |
| -active scpmos,scptransistor,scpfet | |
| -active ppu,ppufet,srampfet | |
| active nnmos,nntransistor,nnfet | |
| active mvnmos,mvntransistor,mvnfet | |
| active mvpmos,mvptransistor,mvpfet | |
| active mvnnmos,mvnntransistor,mvnnfet | |
| -active mvnmosesd,mvntransistoresd,mvnfetesd | |
| -active mvpmosesd,mvptransistoresd,mvpfetesd | |
| active varactor,varact,var | |
| active mvvaractor,mvvaract,mvvar | |
| active pmoslvt,pfetlvt | |
| active pmosmvt,pfetmvt | |
| active pmoshvt,pfethvt | |
| -active scpmoshvt,scpfethvt | |
| active nmoslvt,nfetlvt | |
| -active scnmoslvt,scnfetlvt | |
| active varactorhvt,varacthvt,varhvt | |
| -active nsonos,sonos | |
| -active sramnvar,corenvar,corenvaractor | |
| -active srampvar,corepvar,corepvaractor | |
| # Diffusions | |
| -active fomfill | |
| active ndiff,ndiffusion,ndif | |
| active pdiff,pdiffusion,pdif | |
| active mvndiff,mvndiffusion,mvndif | |
| active mvpdiff,mvpdiffusion,mvpdif | |
| active ndiffc,ndcontact,ndc | |
| active pdiffc,pdcontact,pdc | |
| active mvndiffc,mvndcontact,mvndc | |
| active mvpdiffc,mvpdcontact,mvpdc | |
| active psubdiff,psubstratepdiff,ppdiff,ppd,psd,ptap | |
| active nsubdiff,nsubstratendiff,nndiff,nnd,nsd,ntap | |
| active mvpsubdiff,mvpsubstratepdiff,mvppdiff,mvppd,mvpsd,mvptap | |
| active mvnsubdiff,mvnsubstratendiff,mvnndiff,mvnnd,mvnsd,mvntap | |
| active psubdiffcont,psubstratepcontact,psc,ptapc | |
| active nsubdiffcont,nsubstratencontact,nsc,ntapc | |
| active mvpsubdiffcont,mvpsubstratepcontact,mvpsc,mvptapc | |
| active mvnsubdiffcont,mvnsubstratencontact,mvnsc,mvntapc | |
| active extdrain,ed | |
| -active obsactive | |
| -active mvobsactive | |
| # Poly | |
| active poly,p,polysilicon | |
| active polycont,pc,pcontact,polycut,polyc | |
| active xpolycontact,xpolyc,xpc | |
| -active polyfill | |
| # Resistors | |
| active npolyres,npres,mrp1 | |
| active ppolyres,ppres,xhrpoly | |
| active xpolyres,xpres,xres,uhrpoly | |
| active ndiffres,rnd,rdn,rndiff | |
| active pdiffres,rpd,rdp,rpdiff | |
| active mvndiffres,mvrnd,mvrdn,mvrndiff | |
| active mvpdiffres,mvrpd,mvrdp,mvrpdiff | |
| active rmp | |
| # Diodes | |
| active pdiode,pdi | |
| active ndiode,ndi | |
| active nndiode,nndi | |
| active pdiodec,pdic | |
| active ndiodec,ndic | |
| active nndiodec,nndic | |
| active mvpdiode,mvpdi | |
| active mvndiode,mvndi | |
| active mvpdiodec,mvpdic | |
| active mvndiodec,mvndic | |
| active pdiodelvt,pdilvt | |
| active pdiodehvt,pdihvt | |
| active ndiodelvt,ndilvt | |
| active pdiodelvtc,pdilvtc | |
| active pdiodehvtc,pdihvtc | |
| active ndiodelvtc,ndilvtc | |
| # Local Interconnect | |
| locali locali,li1,li | |
| -locali corelocali,coreli1,coreli | |
| locali rlocali,rli1,rli | |
| locali viali,vial,mcon,m1c,v0 | |
| -locali obsli1,obsli | |
| -locali obsli1c,obsmcon | |
| -locali lifill | |
| # Metal 1 | |
| metal1 metal1,m1,met1 | |
| metal1 rmetal1,rm1,rmet1 | |
| metal1 via1,m2contact,m2cut,m2c,via,v,v1 | |
| -metal1 obsm1 | |
| -metal1 m1fill | |
| #ifdef RERAM | |
| metal2 reram,rr | |
| #endif | |
| # Metal 2 | |
| metal2 metal2,m2,met2 | |
| metal2 rmetal2,rm2,rmet2 | |
| metal2 via2,m3contact,m3cut,m3c,v2 | |
| -metal2 obsm2 | |
| -metal2 m2fill | |
| # Metal 3 | |
| metal3 metal3,m3,met3 | |
| metal3 rmetal3,rm3,rmet3 | |
| -metal3 obsm3 | |
| #ifdef METAL5 | |
| metal3 via3,v3 | |
| -metal3 m3fill | |
| #ifdef MIM | |
| cap1 mimcap,mim,capm | |
| cap1 mimcapcontact,mimcapc,mimcc,capmc | |
| #endif | |
| # Metal 4 | |
| metal4 metal4,m4,met4 | |
| metal4 rmetal4,rm4,rmet4 | |
| -metal4 obsm4 | |
| metal4 via4,v4 | |
| -metal4 m4fill | |
| #ifdef MIM | |
| cap2 mimcap2,mim2,capm2 | |
| cap2 mimcap2contact,mimcap2c,mim2cc,capm2c | |
| #endif | |
| # Metal 5 | |
| metal5 metal5,m5,met5 | |
| metal5 rm5,rmetal5,rmet5 | |
| -metal5 obsm5 | |
| -metal5 m5fill | |
| #endif (METAL5) | |
| #ifdef REDISTRIBUTION | |
| metal5 mrdlcontact,mrdlc,pi1 | |
| metali metalrdl,mrdl,metrdl,rdl | |
| -metali obsmrdl | |
| metali pi2 | |
| block ubm | |
| #endif (REDISTRIBUTION) | |
| # Miscellaneous | |
| -block glass | |
| -block fillblock | |
| comment comment | |
| -comment obscomment | |
| end | |
| #----------------------------------------------------- | |
| # Magic contact types | |
| #----------------------------------------------------- | |
| contact | |
| pc poly locali | |
| ndc ndiff locali | |
| pdc pdiff locali | |
| nsc nsd locali | |
| psc psd locali | |
| ndic ndiode locali | |
| ndilvtc ndiodelvt locali | |
| nndic nndiode locali | |
| pdic pdiode locali | |
| pdilvtc pdiodelvt locali | |
| pdihvtc pdiodehvt locali | |
| xpc xpc locali | |
| mvndc mvndiff locali | |
| mvpdc mvpdiff locali | |
| mvnsc mvnsd locali | |
| mvpsc mvpsd locali | |
| mvndic mvndiode locali | |
| mvpdic mvpdiode locali | |
| mcon locali metal1 | |
| obsmcon obsli metal1 | |
| via1 metal1 metal2 | |
| via2 metal2 metal3 | |
| #ifdef METAL5 | |
| via3 metal3 metal4 | |
| via4 metal4 metal5 | |
| #endif (METAL5) | |
| stackable | |
| #ifdef METAL5 | |
| #ifdef MIM | |
| # MiM cap contacts are not stackable! | |
| mimcc mimcap metal4 | |
| mim2cc mimcap2 metal5 | |
| #endif (MIM) | |
| #endif (!METAL5) | |
| #ifdef REDISTRIBUTION | |
| mrdlc metal5 mrdl | |
| pi2 mrdl ubm | |
| #endif (REDISTRIBUTION) | |
| end | |
| #----------------------------------------------------- | |
| # Layer aliases | |
| #----------------------------------------------------- | |
| aliases | |
| allwellplane nwell | |
| allnwell nwell,obswell,pnp | |
| allnfets nfet,npass,npd,scnfet,mvnfet,mvnfetesd,mvnnfet,nnfet,nfetlvt,scnfetlvt,nsonos | |
| allpfets pfet,ppu,scpfet,scpfethvt,mvpfet,mvpfetesd,pfethvt,pfetlvt,pfetmvt | |
| allfets allnfets,allpfets,varactor,mvvaractor,varhvt,corenvar,corepvar | |
| allfetsstd nfet,mvnfet,mvnfetesd,mvnnfet,nnfet,nfetlvt,pfet,mvpfet,mvpfetesd,pfethvt,pfetlvt,pfetmvt | |
| allfetsspecial scnfet,scpfet,scpfethvt,scnfetlvt | |
| allfetscore npass,npd,nsonos,ppu,corenvar,corepvar | |
| allfetsnolvt nfet,npass,npd,scnfet,mvnfet,mvnfetesd,mvnnfet,nnfet,nsonos,pfet,ppu,scpfet,scpfethvt,mvpfet,mvpfetesd,pfethvt,pfetmvt,varactor,mvvaractor,varhvt,corenvar | |
| allnactivenonfet *ndiff,*nsd,*ndiode,*nndiode,*mvndiff,*mvnsd,*mvndiode,*ndiodelvt | |
| allnactive allnactivenonfet,allnfets | |
| allnactivenontap *ndiff,*ndiode,*nndiode,*mvndiff,*mvndiode,*ndiodelvt,allnfets | |
| allnactivetap *nsd,*mvnsd,var,varhvt,mvvar,corenvar | |
| allpactivenonfet *pdiff,*psd,*pdiode,*mvpdiff,*mvpsd,*mvpdiode,*pdiodelvt,*pdiodehvt | |
| allpactive allpactivenonfet,allpfets | |
| allpactivenontap *pdiff,*pdiode,*mvpdiff,*mvpdiode,*pdiodelvt,*pdiodehvt,allpfets | |
| allpactivetap *psd,*mvpsd,corepvar | |
| allactivenonfet allnactivenonfet,allpactivenonfet | |
| allactive allactivenonfet,allfets | |
| allactiveres ndiffres,pdiffres,mvndiffres,mvpdiffres | |
| allndifflv *ndif,*nsd,*ndiode,ndiffres,nfet,npass,npd,scnfet,scnfetlvt,nfetlvt,nsonos | |
| allpdifflv *pdif,*psd,*pdiode,pdiffres,pfet,ppu,scpfet,scpfethvt,pfetlvt,pfetmvt,pfethvt | |
| alldifflv allndifflv,allpdifflv | |
| allndifflvnonfet *ndif,*nsd,*ndiode,*nndiode,ndiffres,*ndiodelvt | |
| allpdifflvnonfet *pdif,*psd,*pdiode,pdiffres,*pdiodelvt,*pdiodehvt | |
| alldifflvnonfet allndifflvnonfet,allpdifflvnonfet | |
| allndiffmv *mvndif,*mvnsd,*mvndiode,*nndiode,mvndiffres,mvnfet,mvnfetesd,mvnnfet,nnfet | |
| allpdiffmv *mvpdif,*mvpsd,*mvpdiode,mvpdiffres,mvpfet,mvpfetesd | |
| alldiffmv allndiffmv,allpdiffmv | |
| allndiffmvnontap *mvndif,*mvndiode,*nndiode,mvndiffres,mvnfet,mvnfetesd,mvnnfet,nnfet | |
| allpdiffmvnontap *mvpdif,*mvpdiode,mvpdiffres,mvpfet,mvpfetesd | |
| alldiffmvnontap allndiffmvnontap,allpdiffmvnontap | |
| allndiffmvnonfet *mvndif,*mvnsd,*mvndiode,*nndiode,mvndiffres | |
| allpdiffmvnonfet *mvpdif,*mvpsd,*mvpdiode,mvpdiffres | |
| alldiffmvnonfet allndiffmvnonfet,allpdiffmvnonfet | |
| alldiffnonfet alldifflvnonfet,alldiffmvnonfet | |
| alldiff alldifflv,alldiffmv,fomfill | |
| allpolyres mrp1,xhrpoly,uhrpoly,rmp | |
| allpolynonfet *poly,allpolyres,xpc | |
| allpolynonres *poly,allfets,xpc | |
| allpoly allpolynonfet,allfets | |
| allpolynoncap *poly,xpc,allfets,allpolyres | |
| allndiffcontlv ndc,nsc,ndic,nndic,ndilvtc | |
| allpdiffcontlv pdc,psc,pdic,pdilvtc,pdihvtc | |
| allndiffcontmv mvndc,mvnsc,mvndic | |
| allpdiffcontmv mvpdc,mvpsc,mvpdic | |
| allndiffcont allndiffcontlv,allndiffcontmv | |
| allpdiffcont allpdiffcontlv,allpdiffcontmv | |
| alldiffcontlv allndiffcontlv,allpdiffcontlv | |
| alldiffcontmv allndiffcontmv,allpdiffcontmv | |
| alldiffcont alldiffcontlv,alldiffcontmv | |
| allcont alldiffcont,pc | |
| allres allpolyres,allactiveres | |
| allli *locali,coreli,rli | |
| allm1 *m1,rm1 | |
| #ifdef RERAM | |
| allm2 *m2,rm2,reram | |
| #else (!RERAM) | |
| allm2 *m2,rm2 | |
| #endif (!RERAM) | |
| allm3 *m3,rm3 | |
| #ifdef METAL5 | |
| allm4 *m4,rm4 | |
| allm5 *m5,rm5 | |
| #endif (METAL5) | |
| psub pwell | |
| obstypes obswell,mvobsactive,obsactive,obsli,obsmcon,obsm1,obsm2,obsm3,obsm4,obsm5,obsmrdl,obscomment | |
| blocktypes fillblock | |
| end | |
| #----------------------------------------------------- | |
| # Layer drawing styles | |
| #----------------------------------------------------- | |
| styles | |
| styletype mos | |
| dnwell cwell | |
| isosub subcircuit | |
| nwell nwell | |
| pwell pwell | |
| rpwell pwell ptransistor_stripes | |
| photo nwell nwell_field_implant | |
| ndiff ndiffusion | |
| fomfill ndiffusion | |
| pdiff pdiffusion | |
| nsd ndiff_in_nwell | |
| psd pdiff_in_pwell | |
| nfet ntransistor ntransistor_stripes | |
| scnfet ntransistor ntransistor_stripes | |
| scnfetlvt ntransistor ntransistor_stripes implant1 | |
| npass ntransistor ntransistor_stripes | |
| npd ntransistor ntransistor_stripes | |
| pfet ptransistor ptransistor_stripes | |
| scpfet ptransistor ptransistor_stripes | |
| scpfethvt ptransistor ptransistor_stripes implant2 | |
| ppu ptransistor ptransistor_stripes | |
| var polysilicon ndiff_in_nwell | |
| ndc ndiffusion metal1 contact_X'es | |
| pdc pdiffusion metal1 contact_X'es | |
| nsc ndiff_in_nwell metal1 contact_X'es | |
| psc pdiff_in_pwell metal1 contact_X'es | |
| corenvar polysilicon ndiff_in_nwell | |
| corepvar polysilicon pdiff_in_pwell | |
| pnp nwell ntransistor_stripes | |
| npn pwell ptransistor_stripes | |
| pfetlvt ptransistor ptransistor_stripes implant1 | |
| pfetmvt ptransistor ptransistor_stripes implant3 | |
| pfethvt ptransistor ptransistor_stripes implant2 | |
| nfetlvt ntransistor ntransistor_stripes implant1 | |
| nsonos ntransistor implant3 | |
| varhvt polysilicon ndiff_in_nwell implant2 | |
| nnfet ntransistor ndiff_in_nwell | |
| mvndiff ndiffusion hvndiff_mask | |
| mvpdiff pdiffusion hvpdiff_mask | |
| mvnsd ndiff_in_nwell hvndiff_mask | |
| mvpsd pdiff_in_pwell hvpdiff_mask | |
| mvnfet ntransistor ntransistor_stripes hvndiff_mask | |
| mvnfetesd ntransistor ntransistor_stripes hvndiff_mask | |
| mvnnfet ntransistor ndiff_in_nwell hvndiff_mask | |
| mvpfet ptransistor ptransistor_stripes | |
| mvpfetesd ptransistor ptransistor_stripes | |
| mvvar polysilicon ndiff_in_nwell hvndiff_mask | |
| mvndc ndiffusion metal1 contact_X'es hvndiff_mask | |
| mvpdc pdiffusion metal1 contact_X'es hvpdiff_mask | |
| mvnsc ndiff_in_nwell metal1 contact_X'es hvndiff_mask | |
| mvpsc pdiff_in_pwell metal1 contact_X'es hvpdiff_mask | |
| extdrain nselect pselect | |
| poly polysilicon | |
| polyfill polysilicon | |
| pc polysilicon metal1 contact_X'es | |
| npolyres polysilicon silicide_block nselect2 | |
| ppolyres polysilicon silicide_block pselect2 | |
| xpc polysilicon pselect2 metal1 contact_X'es | |
| rmp polysilicon poly_resist_stripes | |
| pdiode pdiffusion pselect2 | |
| ndiode ndiffusion nselect2 | |
| pdiodec pdiffusion pselect2 metal1 contact_X'es | |
| ndiodec ndiffusion nselect2 metal1 contact_X'es | |
| nndiode ndiffusion nselect2 implant3 | |
| ndiodelvt ndiffusion nselect2 implant1 | |
| pdiodelvt pdiffusion pselect2 implant1 | |
| pdiodehvt pdiffusion pselect2 implant2 | |
| pdilvtc pdiffusion pselect2 implant1 metal1 contact_X'es | |
| pdihvtc pdiffusion pselect2 implant2 metal1 contact_X'es | |
| ndilvtc ndiffusion nselect2 implant1 metal1 contact_X'es | |
| mvpdiode pdiffusion pselect2 hvpdiff_mask | |
| mvndiode ndiffusion nselect2 hvndiff_mask | |
| mvpdiodec pdiffusion pselect2 metal1 contact_X'es hvpdiff_mask | |
| mvndiodec ndiffusion nselect2 metal1 contact_X'es hvndiff_mask | |
| nndiodec ndiff_in_nwell nselect2 metal1 contact_X'es hvndiff_mask | |
| locali metal1 | |
| lifill metal1 | |
| coreli metal1 | |
| rli metal1 poly_resist_stripes | |
| mcon metal1 metal2 via1arrow | |
| obsli metal1 | |
| obsmcon metal1 metal2 via1arrow | |
| metal1 metal2 | |
| m1fill metal2 | |
| rm1 metal2 poly_resist_stripes | |
| obsm1 metal2 | |
| m2c metal2 metal3 via2arrow | |
| #ifdef RERAM | |
| reram metal2 metal3 via2 contact_X'es | |
| #endif (RERAM) | |
| metal2 metal3 | |
| m2fill metal3 | |
| rm2 metal3 poly_resist_stripes | |
| obsm2 metal3 | |
| m3c metal3 metal4 via3alt | |
| metal3 metal4 | |
| m3fill metal4 | |
| rm3 metal4 poly_resist_stripes | |
| obsm3 metal4 | |
| #ifdef METAL5 | |
| #ifdef MIM | |
| mimcap metal3 mems | |
| mimcc metal3 contact_X'es mems | |
| mimcap2 metal4 mems | |
| mim2cc metal4 contact_X'es mems | |
| #endif (MIM) | |
| via3 metal4 metal5 via4 | |
| metal4 metal5 | |
| m4fill metal5 | |
| rm4 metal5 poly_resist_stripes | |
| obsm4 metal5 | |
| via4 metal5 metal6 via5 | |
| metal5 metal6 | |
| m5fill metal6 | |
| rm5 metal6 poly_resist_stripes | |
| obsm5 metal6 | |
| #endif (METAL5) | |
| #ifdef REDISTRIBUTION | |
| mrdlc metal6 metal7 via6 | |
| metalrdl metal7 | |
| obsmrdl metal7 | |
| ubm metal8 | |
| pi2 metal7 metal8 via7 | |
| #endif (REDISTRIBUTION) | |
| glass overglass | |
| mrp1 poly_resist poly_resist_stripes | |
| xhrpoly poly_resist silicide_block | |
| uhrpoly poly_resist | |
| ndiffres ndiffusion ndop_stripes | |
| pdiffres pdiffusion pdop_stripes | |
| mvndiffres ndiffusion hvndiff_mask ndop_stripes | |
| mvpdiffres pdiffusion hvpdiff_mask pdop_stripes | |
| comment comment | |
| error_p error_waffle | |
| error_s error_waffle | |
| error_ps error_waffle | |
| fillblock cwell | |
| obswell cwell | |
| obsactive implant4 | |
| magnet substrate_field_implant | |
| rotate via3alt | |
| fence via5 | |
| end | |
| #----------------------------------------------------- | |
| # Special paint/erase rules | |
| #----------------------------------------------------- | |
| compose | |
| compose nfet poly ndiff | |
| compose pfet poly pdiff | |
| compose var poly nsd | |
| decompose npass poly ndiff | |
| decompose npd poly ndiff | |
| decompose scnfet poly ndiff | |
| decompose scnfetlvt poly ndiff | |
| decompose nfetlvt poly ndiff | |
| decompose nsonos poly ndiff | |
| decompose ppu poly pdiff | |
| decompose scpfet poly pdiff | |
| decompose scpfethvt poly pdiff | |
| decompose pfethvt poly pdiff | |
| decompose pfetlvt poly pdiff | |
| decompose pfetmvt poly pdiff | |
| decompose corenvar poly nsd | |
| decompose corepvar poly psd | |
| decompose varhvt poly nsd | |
| compose mvnfet poly mvndiff | |
| compose mvpfet poly mvpdiff | |
| compose mvvar poly mvnsd | |
| decompose nnfet poly mvndiff | |
| decompose mvnfetesd poly mvndiff | |
| decompose mvnnfet poly mvndiff | |
| decompose mvpfetesd poly mvpdiff | |
| paint obsmcon locali via1 | |
| paint obsmcon obsm1 obsli,obsm1 | |
| paint ndc nwell pdc | |
| paint nfet nwell pfet | |
| paint scnfet nwell scpfet | |
| paint ndiff nwell pdiff | |
| paint psd nwell nsd | |
| paint psc nwell nsc | |
| paint npd nwell ppu | |
| paint pdc pwell ndc | |
| paint pfet pwell nfet | |
| paint scpfet pwell scnfet | |
| paint pdiff pwell ndiff | |
| paint nsd pwell psd | |
| paint nsc pwell psc | |
| paint ppu pwell npd | |
| paint pdc coreli pdc | |
| paint ndc coreli ndc | |
| paint pc coreli pc | |
| paint nsc coreli nsc | |
| paint psc coreli psc | |
| paint viali coreli viali | |
| paint mvpdc coreli mvpdc | |
| paint mvndc coreli mvndc | |
| paint mvnsc coreli mvnsc | |
| paint mvpsc coreli mvpsc | |
| paint coreli pdc pdc | |
| paint coreli ndc ndc | |
| paint coreli pc pc | |
| paint coreli nsc nsc | |
| paint coreli psc psc | |
| paint coreli viali viali | |
| paint coreli mvpdc mvpdc | |
| paint coreli mvndc mvndc | |
| paint coreli mvnsc mvnsc | |
| paint coreli mvpsc mvpsc | |
| #ifdef RERAM | |
| paint reram metal2 reram | |
| #endif (RERAM) | |
| #ifdef METAL5 | |
| paint m4 obsm4 m4 | |
| paint m5 obsm5 m5 | |
| #endif (METAL5) | |
| end | |
| #----------------------------------------------------- | |
| # Electrical connectivity | |
| #----------------------------------------------------- | |
| connect | |
| *nwell,*nsd,*mvnsd,dnwell,pnp,photo *nwell,*nsd,*mvnsd,dnwell,pnp,photo | |
| pwell,*psd,*mvpsd,npn,isosub pwell,*psd,*mvpsd,npn,isosub | |
| *mvnsd ed | |
| *mvpsd ed | |
| *li,coreli,lifill *li,coreli,lifill | |
| *m1,m1fill,obsmcon *m1,m1fill,obsmcon | |
| #ifdef RERAM | |
| *m2,m2fill,reram *m2,m2fill,reram | |
| #else (!RERAM) | |
| *m2,m2fill *m2,m2fill | |
| #endif (!RERAM) | |
| *m3,m3fill *m3,m3fill | |
| #ifdef METAL5 | |
| *m4,m4fill *m4,m4fill | |
| *m5,m5fill *m5,m5fill | |
| #ifdef MIM | |
| *mimcap *mimcap | |
| *mimcap2 *mimcap2 | |
| #endif (MIM) | |
| #endif (METAL5) | |
| allnactivenonfet allnactivenonfet | |
| allpactivenonfet allpactivenonfet | |
| *poly,xpc,allfets,polyfill *poly,xpc,allfets,polyfill | |
| #ifdef REDISTRIBUTION | |
| # RDL connects to m5 through glass cut | |
| *mrdl *mrdl | |
| glass metrdl | |
| #endif (REDISTRIBUTION) | |
| end | |
| #----------------------------------------------------- | |
| # CIF/GDS output layer definitions | |
| #----------------------------------------------------- | |
| # NOTE: All values in this section MUST be multiples of 25 | |
| # or else magic will scale below the allowed layout grid size | |
| cifoutput | |
| #---------------------------------------------------------------- | |
| style gdsii variants (),(origfill) | |
| # NOTE: This section is used for actual GDS output | |
| #---------------------------------------------------------------- | |
| scalefactor 10 nanometers | |
| options calma-permissive-labels | |
| gridlimit 5 | |
| #---------------------------------------------------------------- | |
| # Create a temp layer from the cell bounding box for use in | |
| # generating ID layers. Note that "boundary", unlike "bbox", | |
| # requires the FIXED_BBOX property (abutment box) in the cell. | |
| #---------------------------------------------------------------- | |
| templayer CELLBOUND | |
| boundary | |
| #---------------------------------------------------------------- | |
| # BOUND | |
| #---------------------------------------------------------------- | |
| layer BOUND CELLBOUND | |
| calma 235 4 | |
| #---------------------------------------------------------------- | |
| # DNWELL | |
| #---------------------------------------------------------------- | |
| layer DNWELL dnwell,npn,photo | |
| calma 64 18 | |
| layer PWRES rpw | |
| and dnwell | |
| calma 64 13 | |
| #---------------------------------------------------------------- | |
| # SUBCUT | |
| #---------------------------------------------------------------- | |
| layer SUBCUT isosub | |
| calma 81 53 | |
| #---------------------------------------------------------------- | |
| # NWELL | |
| #---------------------------------------------------------------- | |
| # Identify LDMOS drain areas | |
| templayer ndrainarea | |
| bloat-all ed *mvnsd | |
| and-not ed | |
| templayer pdrainarea | |
| bloat-all ed *mvpsd | |
| and-not ed | |
| # Generate n-well under extended-drain nFET | |
| templayer extnwell | |
| bloat-or *mvnsd * 0 extdrain 1150 | |
| and-not *mvnsd | |
| or ndrainarea | |
| grow 660 | |
| # Erase n-well under extended-drain pFET | |
| templayer extpwell | |
| bloat-or *mvpsd * 0 extdrain 590 | |
| and-not *mvpsd | |
| or pdrainarea | |
| grow 860 | |
| layer NWELL allnwell | |
| bloat-all rpw dnwell | |
| and-not rpw,pwell | |
| or extnwell | |
| and-not extpwell | |
| calma 64 20 | |
| layer WELLTXT | |
| labels allnwell | |
| calma 64 5 | |
| layer WELLPIN | |
| labels allnwell port | |
| calma 64 16 | |
| #---------------------------------------------------------------- | |
| # SUB (text/port only) | |
| #---------------------------------------------------------------- | |
| layer SUBTXT | |
| labels pwell | |
| calma 64 59 | |
| layer SUBPIN | |
| labels pwell port | |
| calma 122 16 | |
| #---------------------------------------------------------------- | |
| # DIFF | |
| #---------------------------------------------------------------- | |
| # Extended-drain FETs cut the diffusion under the gate | |
| templayer ldbreak | |
| bloat-or *mvnsd * 0 extdrain 1585 | |
| bloat-or *mvpsd * 0 extdrain 1190 | |
| layer DIFF allnactivenontap,allpactivenontap,allactiveres | |
| and-not ldbreak | |
| calma 65 20 | |
| layer DIFFTXT | |
| labels allnactivenontap,allpactivenontap | |
| calma 65 6 | |
| layer DIFFPIN | |
| labels allnactivenontap,allpactivenontap port | |
| calma 65 16 | |
| #---------------------------------------------------------------- | |
| # TAP | |
| #---------------------------------------------------------------- | |
| layer TAP allnactivetap,allpactivetap | |
| labels allnactivetap,allpactivetap port | |
| calma 65 44 | |
| layer TAPTXT | |
| labels allnactivetap,allpactivetap | |
| calma 65 5 | |
| #---------------------------------------------------------------- | |
| # FOM | |
| #---------------------------------------------------------------- | |
| layer FOMFILL fomfill | |
| labels fomfill | |
| calma 23 28 | |
| #---------------------------------------------------------------- | |
| # PSDM, NSDM (PPLUS, NPLUS implants) | |
| #---------------------------------------------------------------- | |
| templayer basePSDM pdiffres,mvpdiffres | |
| grow 15 | |
| or xhrpoly,uhrpoly,xpc | |
| grow 110 | |
| bloat-or allpactivetap * 125 allnactivenontap 0 | |
| bloat-or allpactivenontap * 125 allnactivetap 0 | |
| templayer baseNSDM ndiffres,mvndiffres | |
| grow 125 | |
| bloat-or allnactivetap * 125 allpactivenontap 0 | |
| bloat-or allnactivenontap * 125 allpactivetap 0 | |
| templayer extendPSDM basePSDM | |
| bridge 380 380 | |
| and-not baseNSDM | |
| layer PSDM basePSDM,extendPSDM | |
| grow 185 | |
| shrink 185 | |
| close 265000 | |
| mask-hints PSDM | |
| calma 94 20 | |
| templayer extendNSDM baseNSDM | |
| bridge 380 380 | |
| and-not basePSDM | |
| layer NSDM baseNSDM,extendNSDM | |
| grow 185 | |
| shrink 185 | |
| close 265000 | |
| mask-hints NSDM | |
| calma 93 44 | |
| #---------------------------------------------------------------- | |
| # EDID (Extended drain identifier) | |
| #---------------------------------------------------------------- | |
| layer EDID | |
| bloat-all extdrain *mvnsd,*mvpsd,mvnfet,mvpfet,*mvndiff,*mvpdiff | |
| labels extdrain | |
| calma 81 57 | |
| #---------------------------------------------------------------- | |
| # LVID | |
| #---------------------------------------------------------------- | |
| layer LVID nnfet | |
| grow 100 | |
| calma 81 60 | |
| #---------------------------------------------------------------- | |
| # LVTN | |
| #---------------------------------------------------------------- | |
| layer LVTN pfetlvt,nfetlvt,scnfetlvt,mvvar,mvnnfet,nnfet,nsonos,*pdiodelvt,*ndiodelvt,*nndiode | |
| grow 180 | |
| bridge 380 380 | |
| grow 185 | |
| shrink 185 | |
| close 265000 | |
| mask-hints LVTN | |
| calma 125 44 | |
| #---------------------------------------------------------------- | |
| # HVTR | |
| #---------------------------------------------------------------- | |
| layer HVTR pfetmvt | |
| grow 180 | |
| bridge 380 380 | |
| grow 185 | |
| shrink 185 | |
| close 265000 | |
| calma 18 20 | |
| #---------------------------------------------------------------- | |
| # HVTP | |
| #---------------------------------------------------------------- | |
| layer HVTP scpfethvt,ppu,pfethvt,varhvt,*pdiodehvt | |
| grow 180 | |
| bridge 380 380 | |
| grow 185 | |
| shrink 185 | |
| close 265000 | |
| mask-hints HVTP | |
| calma 78 44 | |
| #---------------------------------------------------------------- | |
| # SONOS | |
| #---------------------------------------------------------------- | |
| layer SONOS nsonos | |
| grow 100 | |
| grow-min 410 | |
| bridge 500 410 | |
| grow 250 | |
| shrink 250 | |
| calma 80 20 | |
| #---------------------------------------------------------------- | |
| # The coreli layer indicates a cell needing COREID. Also, | |
| # devices npd, npass, and ppu indicate a COREID cell. NOTE: | |
| # SONOS does not use COREID, counter to SkyWater rules. | |
| #---------------------------------------------------------------- | |
| layer COREID | |
| bloat-all coreli,ppu,npd,npass,corepvar,corenvar CELLBOUND | |
| mask-hints COREID | |
| calma 81 2 | |
| #---------------------------------------------------------------- | |
| # STDCELL applies to all cells containing scnfet or scpfet. | |
| #---------------------------------------------------------------- | |
| layer STDCELL scnfet | |
| bloat-all scpfet,scpfethvt,scnfet,scnfetlvt CELLBOUND | |
| mask-hints STDCELL | |
| calma 81 4 | |
| #---------------------------------------------------------------- | |
| # ESDID is a marker layer for ESD devices in the padframe I/O. | |
| #---------------------------------------------------------------- | |
| layer ESDID | |
| bloat-all mvnfetesd *mvndiff,*poly | |
| bloat-all mvpfetesd *mvpdiff,*poly | |
| grow 100 | |
| mask-hints ESDID | |
| calma 81 19 | |
| #---------------------------------------------------------------- | |
| # NPNID and PNPID apply to bipolar transistors | |
| #---------------------------------------------------------------- | |
| layer NPNID | |
| bloat-all npn dnwell | |
| mask-hints NPNID | |
| calma 82 20 | |
| templayer pnparea pnp | |
| grow 400 | |
| layer PNPID | |
| bloat-all pnparea *psd | |
| or pnparea | |
| mask-hints PNPID | |
| calma 82 44 | |
| layer PHOTO photo | |
| calma 81 81 | |
| #---------------------------------------------------------------- | |
| # RPM | |
| #---------------------------------------------------------------- | |
| layer RPM | |
| bloat-all xhrpoly xpc | |
| grow 620 | |
| shrink 420 | |
| mask-hints RPM | |
| calma 86 20 | |
| #---------------------------------------------------------------- | |
| # URPM (2kOhms/sq. poly implant) | |
| #---------------------------------------------------------------- | |
| layer URPM | |
| bloat-all uhrpoly xpc | |
| grow 620 | |
| shrink 420 | |
| mask-hints URPM | |
| calma 79 20 | |
| #---------------------------------------------------------------- | |
| # LDNTM (Tip implant for SONOS FETs) | |
| #---------------------------------------------------------------- | |
| layer LDNTM | |
| bloat-all nsonos *ndiff | |
| grow 185 | |
| grow 345 | |
| shrink 345 | |
| mask-hints LDNTM | |
| calma 11 44 | |
| #---------------------------------------------------------------- | |
| # HVNTM (Tip implant for MV ndiff devices) | |
| #---------------------------------------------------------------- | |
| templayer hvntm_block *mvpsd | |
| grow 185 | |
| layer HVNTM | |
| bloat-all mvnfet,mvnfetesd,mvnnfet,nnfet,*mvndiode,mvrdn,*nndiode *mvndiff | |
| bloat-all mvvaractor *mvnsd | |
| and-not hvntm_block | |
| grow 185 | |
| bridge 700 700 | |
| grow 345 | |
| shrink 345 | |
| and-not hvntm_block | |
| mask-hints HVNTM | |
| calma 125 20 | |
| #---------------------------------------------------------------- | |
| # POLY | |
| #---------------------------------------------------------------- | |
| layer POLY allpoly | |
| calma 66 20 | |
| layer POLYTXT | |
| labels allpoly | |
| calma 66 5 | |
| layer POLYPIN | |
| labels allpoly port | |
| calma 66 16 | |
| layer POLYFILL polyfill | |
| labels polyfill | |
| calma 28 28 | |
| #---------------------------------------------------------------- | |
| # HVI (includes rules NWELL 8-11 and DIFFTAP 14-26) | |
| #---------------------------------------------------------------- | |
| templayer thkox_area ed | |
| grow 475 | |
| or alldiffmv,mvvar | |
| grow 185 | |
| bloat-all alldiffmv nwell | |
| grow 345 | |
| shrink 345 | |
| templayer large_ptap_mv thkox_area | |
| shrink 420 | |
| grow 420 | |
| templayer small_ptap_mv thkox_area | |
| and-not large_ptap_mv | |
| # (HVI min width rule is 0.6 but CNTM min width rule is 0.84um) | |
| grow-min 840 | |
| layer HVI thkox_area,small_ptap_mv | |
| bridge 700 600 | |
| grow 345 | |
| shrink 345 | |
| mask-hints HVI | |
| calma 75 20 | |
| #---------------------------------------------------------------- | |
| # CONT (LICON) | |
| #---------------------------------------------------------------- | |
| layer CONT allcont | |
| squares-grid 0 170 170 | |
| calma 66 44 | |
| # Contact for pres is different than other LICON contacts | |
| # See rules LICON 1b, 1c (width/length) and 2b (spacing) | |
| templayer xpc_horiz xpc | |
| shrink 1007 | |
| grow 1007 | |
| layer CONT xpc | |
| and-not xpc_horiz | |
| # Force long edge vertical for contacts narrower than 2um | |
| # Minimum space is 350 but 520 satisfies no. of contacts rule | |
| slots 80 190 520 80 2000 350 | |
| calma 66 44 | |
| layer CONT xpc | |
| and xpc_horiz | |
| # Force long edge vertical for contacts wider than 2um | |
| # Minimum space is 350 but 520 satisfies no. of contacts rule | |
| slots 80 2000 350 80 190 520 | |
| calma 66 44 | |
| #---------------------------------------------------------------- | |
| # NPC (Nitride poly cut) | |
| # surrounds CONT (LICON) on poly only (i.e., pc) | |
| #---------------------------------------------------------------- | |
| # Avoids a common case of NPC bridges too close to other LICON shapes. | |
| templayer diffcutarea pdc,ndc,psc,nsc,mvpdc,mvndc,mvpsc,mvnsc | |
| grow 90 | |
| layer NPC pc | |
| squares-grid 0 170 170 | |
| grow 100 | |
| bridge 270 270 | |
| and-not diffcutarea | |
| bridge 270 270 | |
| grow 130 | |
| shrink 130 | |
| mask-hints NPC | |
| calma 95 20 | |
| # NPC is also generated on xhrpoly and uhrpoly resistors | |
| layer NPC xpc,xhrpoly,uhrpoly | |
| # xpc surrounds precision_resistor by 0.095um | |
| grow 95 | |
| grow 130 | |
| shrink 130 | |
| calma 95 20 | |
| #---------------------------------------------------------------- | |
| # Device markers | |
| #---------------------------------------------------------------- | |
| layer DIFFRES rdn,mvrdn,rdp,mvrdp | |
| calma 65 13 | |
| layer POLYRES mrp1 | |
| calma 66 13 | |
| # POLYSHORT is a poly layer resistor like rli, rm1, etc., for metal layers | |
| layer POLYSHORT rmp | |
| calma 66 15 | |
| # POLYRES extends to edge of contact cut | |
| layer POLYRES xhrpoly,uhrpoly | |
| grow 80 | |
| and xpc | |
| or xhrpoly,uhrpoly | |
| calma 66 13 | |
| layer DIODE *pdi,*ndi,*nndi,*mvpdi,*mvndi,*pdilvt,*pdihvt,*ndilvt | |
| # To be done: Expand to include anode, cathode, and guard ring | |
| calma 81 23 | |
| #---------------------------------------------------------------- | |
| # LI | |
| #---------------------------------------------------------------- | |
| layer LI allli | |
| calma 67 20 | |
| layer LITXT | |
| labels *locali,coreli | |
| calma 67 5 | |
| layer LIPIN | |
| labels *locali,coreli port | |
| calma 67 16 | |
| layer LIRES rli | |
| labels rli | |
| calma 67 13 | |
| layer LIFILL lifill | |
| labels lifill | |
| calma 56 28 | |
| #---------------------------------------------------------------- | |
| # MCON | |
| #---------------------------------------------------------------- | |
| layer MCON mcon | |
| squares-grid 0 170 190 | |
| calma 67 44 | |
| #---------------------------------------------------------------- | |
| # MET1 | |
| #---------------------------------------------------------------- | |
| layer MET1 allm1 | |
| calma 68 20 | |
| layer MET1TXT | |
| labels allm1 | |
| calma 68 5 | |
| layer MET1PIN | |
| labels allm1 port | |
| calma 68 16 | |
| layer MET1RES rm1 | |
| labels rm1 | |
| calma 68 13 | |
| layer MET1FILL m1fill | |
| labels m1fill | |
| calma 36 28 | |
| #---------------------------------------------------------------- | |
| # VIA1 | |
| #---------------------------------------------------------------- | |
| layer VIA1 via1 | |
| squares-grid 55 150 170 | |
| calma 68 44 | |
| #ifdef RERAM | |
| #undef RERAM | |
| layer VIA1 reram | |
| squares-grid 55 150 170 | |
| calma 68 44 | |
| layer RERAM reram | |
| calma 201 20 | |
| #define RERAM | |
| #endif (RERAM) | |
| #---------------------------------------------------------------- | |
| # MET2 | |
| #---------------------------------------------------------------- | |
| layer MET2 allm2 | |
| calma 69 20 | |
| layer MET2TXT | |
| labels allm2 | |
| calma 69 5 | |
| layer MET2PIN | |
| labels allm2 port | |
| calma 69 16 | |
| layer MET2RES rm2 | |
| labels rm2 | |
| calma 69 13 | |
| layer MET2FILL m2fill | |
| labels m2fill | |
| calma 41 28 | |
| #---------------------------------------------------------------- | |
| # VIA2 | |
| #---------------------------------------------------------------- | |
| layer VIA2 via2 | |
| squares-grid 40 200 200 | |
| calma 69 44 | |
| #---------------------------------------------------------------- | |
| # MET3 | |
| #---------------------------------------------------------------- | |
| layer MET3 allm3 | |
| calma 70 20 | |
| layer MET3TXT | |
| labels allm3 | |
| calma 70 5 | |
| layer MET3PIN | |
| labels allm3 port | |
| calma 70 16 | |
| layer MET3RES rm3 | |
| labels rm3 | |
| calma 70 13 | |
| layer MET3FILL m3fill | |
| labels m3fill | |
| calma 34 28 | |
| #ifdef METAL5 | |
| #---------------------------------------------------------------- | |
| # VIA3 | |
| #---------------------------------------------------------------- | |
| layer VIA3 via3 | |
| #ifdef MIM | |
| or mimcc | |
| #endif (MIM) | |
| squares-grid 60 200 200 | |
| calma 70 44 | |
| #---------------------------------------------------------------- | |
| # MET4 | |
| #---------------------------------------------------------------- | |
| layer MET4 allm4 | |
| calma 71 20 | |
| layer MET4TXT | |
| labels allm4 | |
| calma 71 5 | |
| layer MET4PIN | |
| labels allm4 port | |
| calma 71 16 | |
| layer MET4RES rm4 | |
| labels rm4 | |
| calma 71 13 | |
| layer MET4FILL m4fill | |
| labels m4fill | |
| calma 51 28 | |
| #---------------------------------------------------------------- | |
| # VIA4 | |
| #---------------------------------------------------------------- | |
| layer VIA4 via4 | |
| #ifdef MIM | |
| or mim2cc | |
| #endif (MIM) | |
| squares-grid 190 800 800 | |
| calma 71 44 | |
| #---------------------------------------------------------------- | |
| # MET5 | |
| #---------------------------------------------------------------- | |
| layer MET5 allm5,m5fill | |
| calma 72 20 | |
| layer MET5TXT | |
| labels allm5 | |
| calma 72 5 | |
| layer MET5PIN | |
| labels allm5 port | |
| calma 72 16 | |
| layer MET5RES rm5 | |
| labels rm5 | |
| calma 72 13 | |
| layer MET5FILL m5fill | |
| labels m5fill | |
| calma 59 28 | |
| #endif (METAL5) | |
| #ifdef REDISTRIBUTION | |
| #---------------------------------------------------------------- | |
| # RDL | |
| #---------------------------------------------------------------- | |
| layer RDL *metrdl | |
| calma 74 20 | |
| layer RDLTXT | |
| labels *metrdl | |
| calma 74 5 | |
| layer RDLPIN | |
| labels *metrdl port | |
| calma 74 16 | |
| layer PI1 *metrdl | |
| and m5,glass | |
| # Test only---needs GDS layer number | |
| layer UBM *metrdl | |
| shrink 50000 | |
| grow 40000 | |
| # Test only---needs GDS layer number | |
| layer PI2 *metrdl | |
| shrink 50000 | |
| grow 25000 | |
| # Test only---needs GDS layer number | |
| #endif REDISTRIBUTION | |
| #---------------------------------------------------------------- | |
| # GLASS | |
| #---------------------------------------------------------------- | |
| layer GLASS glass | |
| calma 76 20 | |
| #ifdef MIM | |
| #---------------------------------------------------------------- | |
| # CAPM | |
| #---------------------------------------------------------------- | |
| layer CAPM *mimcap | |
| labels mimcap | |
| calma 89 44 | |
| layer CAPM2 *mimcap2 | |
| labels mimcap2 | |
| calma 97 44 | |
| #endif (MIM) | |
| #---------------------------------------------------------------- | |
| # Chip top level marker for DRC latchup rules to check 15um | |
| # distance to taps (otherwise 6um is used) | |
| #---------------------------------------------------------------- | |
| layer LOWTAPDENSITY | |
| bbox top | |
| # Clear 200um for pads + 50um for required high tap density | |
| # in critical area. | |
| shrink 250000 | |
| calma 81 14 | |
| #---------------------------------------------------------------- | |
| # FILLBLOCK | |
| #---------------------------------------------------------------- | |
| variants (origfill) | |
| layer FILLOBSFOM obsactive | |
| calma 22 24 | |
| layer FILLOBSLI fillblock,obsli | |
| calma 67 10 | |
| layer FILLOBSM1 fillblock,obsm1 | |
| calma 62 24 | |
| layer FILLOBSM2 fillblock,obsm2 | |
| calma 105 52 | |
| layer FILLOBSM3 fillblock,obsm3 | |
| calma 107 24 | |
| #ifdef METAL5 | |
| layer FILLOBSM4 fillblock,obsm4 | |
| calma 112 4 | |
| layer FILLOBSM5 fillblock,obsm5 | |
| calma 117 4 | |
| #endif | |
| variants () | |
| layer FILLOBSFOM obsactive | |
| calma 65 98 | |
| # NOTE: should there be an "obspoly" layer? | |
| layer FILLOBSLI fillblock,obsli | |
| calma 67 98 | |
| layer FILLOBSM1 fillblock,obsm1 | |
| calma 68 98 | |
| layer FILLOBSM2 fillblock,obsm2 | |
| calma 69 98 | |
| layer FILLOBSM3 fillblock,obsm3 | |
| calma 70 98 | |
| #ifdef METAL5 | |
| layer FILLOBSM4 fillblock,obsm4 | |
| calma 71 98 | |
| layer FILLOBSM5 fillblock,obsm5 | |
| calma 72 98 | |
| #endif | |
| variants * | |
| render DNWELL cwell -0.1 0.1 | |
| render NWELL nwell 0.0 0.2062 | |
| render DIFF ndiffusion 0.2062 0.12 | |
| render TAP pdiffusion 0.2062 0.12 | |
| render POLY polysilicon 0.3262 0.18 | |
| render CONT via 0.5062 0.43 | |
| render LI metal1 0.9361 0.10 | |
| render MCON via 1.0361 0.34 | |
| render MET1 metal2 1.3761 0.36 | |
| render VIA1 via 1.7361 0.27 | |
| render MET2 metal3 2.0061 0.36 | |
| render VIA2 via 2.3661 0.42 | |
| render MET3 metal4 2.7861 0.845 | |
| #ifdef METAL5 | |
| render VIA3 via 3.6311 0.39 | |
| render MET4 metal5 4.0211 0.845 | |
| render VIA4 via 4.8661 0.505 | |
| render MET5 metal6 5.3711 1.26 | |
| render CAPM metal8 2.4661 0.2 | |
| render CAPM2 metal9 3.7311 0.2 | |
| #ifdef REDISTRIBUTION | |
| render RDL metal7 11.8834 4.0 | |
| #endif (!REDISTRIBUTION) | |
| #endif (!METAL5) | |
| #---------------------------------------------------------------- | |
| style drc | |
| #---------------------------------------------------------------- | |
| # NOTE: This style is used for DRC only, not for GDS output | |
| #---------------------------------------------------------------- | |
| scalefactor 10 nanometers | |
| options calma-permissive-labels | |
| # Ensure nwell overlaps dnwell at least 0.4um outside and 1.03um inside | |
| templayer dnwell_shrink dnwell | |
| shrink 1030 | |
| templayer nwell_missing dnwell | |
| grow 400 | |
| and-not dnwell_shrink | |
| and-not nwell | |
| templayer pwell_in_dnwell dnwell | |
| and-not nwell | |
| # SONOS nFET devices must be in deep nwell | |
| templayer dnwell_missing nsonos | |
| and-not dnwell | |
| # SONOS nFET devices must be in cell with abutment box | |
| templayer abutment_box | |
| boundary | |
| templayer bbox_missing nsonos | |
| and-not abutment_box | |
| # Make sure nwell covers varactor poly | |
| templayer var_poly_no_nwell | |
| bloat-all varactor,mvvaractor *poly | |
| grow 150 | |
| and-not nwell | |
| # Define areas where mim2cc is inside the boundary of mimcc | |
| # by more than the contact surround | |
| templayer mim2_contact_overlap | |
| bloat-all *mimcap2 mimcc | |
| shrink 60 | |
| and-not *mimcap2 | |
| # Note that metal fill is performed by the foundry and so is not | |
| # an option for a cifoutput style. | |
| # Check latchup rule (15um minimum from tap LICON center to any | |
| # non-tap diffusion. Note that to count as a tap, the diffusion | |
| # must be contacted to LI | |
| templayer ptap_reach psc,mvpsc | |
| and-not dnwell | |
| # grow total is 15um. grow in 0.84um increments to ensure that | |
| # no nwell ring is crossed | |
| grow 840 | |
| and-not nwell,dnwell | |
| grow 840 | |
| and-not nwell,dnwell | |
| grow 840 | |
| and-not nwell,dnwell | |
| grow 840 | |
| and-not nwell,dnwell | |
| grow 840 | |
| and-not nwell,dnwell | |
| grow 840 | |
| and-not nwell,dnwell | |
| grow 840 | |
| and-not nwell,dnwell | |
| grow 840 | |
| and-not nwell,dnwell | |
| grow 840 | |
| and-not nwell,dnwell | |
| grow 840 | |
| and-not nwell,dnwell | |
| grow 840 | |
| and-not nwell,dnwell | |
| grow 840 | |
| and-not nwell,dnwell | |
| grow 840 | |
| and-not nwell,dnwell | |
| grow 840 | |
| and-not nwell,dnwell | |
| grow 840 | |
| and-not nwell,dnwell | |
| grow 840 | |
| and-not nwell,dnwell | |
| grow 840 | |
| and-not nwell,dnwell | |
| grow 635 | |
| and-not nwell,dnwell | |
| templayer ptap_missing *ndiff,*mvndiff | |
| and-not dnwell | |
| and-not ptap_reach | |
| templayer ntap_reach nsc,mvnsc | |
| # grow total is 15um. grow in 1.27um increments to ensure that | |
| # no nwell ring is crossed. There is no difference between | |
| # ntaps in and out of deep nwell. | |
| grow 1270 | |
| and nwell,pnp | |
| grow 1270 | |
| and nwell,pnp | |
| grow 1270 | |
| and nwell,pnp | |
| grow 1270 | |
| and nwell,pnp | |
| grow 1270 | |
| and nwell,pnp | |
| grow 1270 | |
| and nwell,pnp | |
| grow 1270 | |
| and nwell,pnp | |
| grow 1270 | |
| and nwell,pnp | |
| grow 1270 | |
| and nwell,pnp | |
| grow 1270 | |
| and nwell,pnp | |
| grow 1270 | |
| and nwell,pnp | |
| grow 945 | |
| and nwell,pnp | |
| templayer ntap_missing *pdiff,*mvpdiff | |
| and-not pwell_in_dnwell | |
| and-not ntap_reach | |
| templayer dptap_reach psc,mvpsc | |
| and dnwell | |
| grow 840 | |
| and-not nwell | |
| and dnwell | |
| grow 840 | |
| and-not nwell | |
| and dnwell | |
| grow 840 | |
| and-not nwell | |
| and dnwell | |
| grow 840 | |
| and-not nwell | |
| and dnwell | |
| grow 840 | |
| and-not nwell | |
| and dnwell | |
| grow 840 | |
| and-not nwell | |
| and dnwell | |
| grow 840 | |
| and-not nwell | |
| and dnwell | |
| grow 840 | |
| and-not nwell | |
| and dnwell | |
| grow 840 | |
| and-not nwell | |
| and dnwell | |
| grow 840 | |
| and-not nwell | |
| and dnwell | |
| grow 840 | |
| and-not nwell | |
| and dnwell | |
| grow 840 | |
| and-not nwell | |
| and dnwell | |
| grow 840 | |
| and-not nwell | |
| and dnwell | |
| grow 840 | |
| and-not nwell | |
| and dnwell | |
| grow 840 | |
| and-not nwell | |
| and dnwell | |
| grow 840 | |
| and-not nwell | |
| and dnwell | |
| grow 840 | |
| and-not nwell | |
| and dnwell | |
| grow 635 | |
| and-not nwell | |
| and dnwell | |
| templayer dptap_missing *ndiff,*mvndiff | |
| and dnwell | |
| and-not dptap_reach | |
| templayer pdiff_crosses_dnwell dnwell | |
| grow 20 | |
| and-not dnwell | |
| and allpdifflv,allpdiffmv | |
| # MV nwell must be 2um from any other nwell | |
| templayer mvnwell_simple | |
| bloat-all alldiffmv nwell | |
| templayer mvnwell mvnwell_simple | |
| grow-min 840 | |
| bridge 700 600 | |
| # Diffusion spacing to mvnwell. Note: mvdiff to any well | |
| # (mv or lv) is the same rule and can be checked by regular | |
| # edge-based rules. Only mvwell to lvdiff needs a CIF rule. | |
| templayer difftap_near_mvnwell mvnwell_simple | |
| grow 430 | |
| and alldifflv,*mvpsd | |
| # Simple spacing checks to lvnwell must use CIF-DRC rule | |
| # Note that HVI may *abut* lvnwell; this can only be handled | |
| # with mask-hints layers. | |
| templayer drawn_hvi | |
| mask-hints HVI | |
| templayer allmvdiffnowell *mvndiff,*mvpsd | |
| and-not drawn_hvi | |
| templayer lvnwell nwell | |
| and-not mvnwell | |
| templayer hvi_abut_lvnwell lvnwell | |
| grow 5 | |
| and drawn_hvi | |
| grow 695 | |
| templayer hvi_to_lvnwell drawn_hvi | |
| and-not hvi_abut_lvnwell | |
| grow 700 | |
| and lvnwell | |
| # Check for low-voltage diffusion in high-voltage well | |
| templayer lvdiff_in_mvnwell *pdiff,*pdiode,pdiffres,*nsd | |
| or pfet,ppu,scpfet,scpfethvt,pfetlvt,pfetmvt,pfethvt | |
| and mvnwell | |
| templayer nwell_with_tap | |
| bloat-all nsc,mvnsc nwell,pnp | |
| templayer nwell_missing_tap nwell,pnp | |
| and-not nwell_with_tap | |
| templayer tap_with_licon | |
| bloat-all allpactivetap psd,mvpsd | |
| bloat-all allnactivetap nsd,mvnsd | |
| templayer tap_missing_licon allnactivetap,allpactivetap | |
| and-not tap_with_licon | |
| # Make sure varactor nwell contains no P diffusion | |
| templayer pdiff_in_varactor_well | |
| bloat-all varactor,mvvaractor nwell | |
| and allpactive | |
| # HVNTM spacing requires recreating HVNTM | |
| templayer hvntm_block *mvpsd | |
| grow 185 | |
| templayer hvntm_generate | |
| bloat-all mvnfet,mvnfetesd,mvnnfet,nnfet,*mvndiode,mvrdn,*nndiode *mvndiff | |
| bloat-all mvvaractor *mvnsd | |
| and-not hvntm_block | |
| grow 185 | |
| bridge 700 700 | |
| grow 345 | |
| shrink 345 | |
| and-not hvntm_block | |
| # Generate RPM for DRC checks | |
| templayer rpm_generate | |
| bloat-all xhrpoly,uhrpoly xpc | |
| grow 620 | |
| shrink 420 | |
| mask-hints RPM | |
| mask-hints URPM | |
| # Check distance RPM to NSDM | |
| templayer rpm_nsd_check rpm_generate | |
| grow 325 | |
| and allndifflv,allndiffmv | |
| # Check distance RPM to (unrelated) POLY | |
| templayer rpm_poly_check rpm_generate | |
| grow 200 | |
| and-not xhrpoly,uhrpoly,xpc | |
| and allpoly | |
| # Check distance RPM to HVNTM | |
| templayer rpm_hvntm_check rpm_generate | |
| grow 385 | |
| and allndiffmvnontap | |
| templayer m1_small_hole allm1,obsm1,obsmcon | |
| close 140000 | |
| templayer m1_hole_empty m1_small_hole | |
| and-not allm1,obsm1,obsmcon | |
| templayer m2_small_hole allm2,obsm2 | |
| close 140000 | |
| templayer m2_hole_empty m2_small_hole | |
| and-not allm2,obsm2 | |
| templayer m1_huge allm1 | |
| shrink 1500 | |
| grow 1500 | |
| templayer m1_large_halo m1_huge | |
| grow 280 | |
| and-not m1_huge | |
| and allm1 | |
| templayer m2_huge allm2 | |
| shrink 1500 | |
| grow 1500 | |
| templayer m2_large_halo m2_huge | |
| grow 280 | |
| and-not m2_huge | |
| and allm2 | |
| templayer m3_huge allm3 | |
| shrink 1500 | |
| grow 1500 | |
| templayer m3_large_halo m3_huge | |
| grow 400 | |
| and-not m3_huge | |
| and allm3 | |
| templayer m4_huge allm4 | |
| shrink 1500 | |
| grow 1500 | |
| templayer m4_large_halo m4_huge | |
| grow 400 | |
| and-not m4_huge | |
| and allm4 | |
| #ifdef EXPERIMENTAL | |
| #---------------------------------------------------------------- | |
| style paint | |
| #---------------------------------------------------------------- | |
| # NOTE: This style is used for database manipulations only via | |
| # the "cif paint" command. | |
| #---------------------------------------------------------------- | |
| scalefactor 10 nanometers | |
| templayer m1grow *m1 | |
| grow 290 | |
| # layer listrap: Use the following set of commands to strap local | |
| # interconnect wires with metal1 (inside the cursor box) to satisfy | |
| # the maximum aspect ratio rule for local interconnect: | |
| # | |
| # tech unlock * | |
| # cif ostyle paint | |
| # cif paint m1strap comment | |
| # cif paint m1strap m1 | |
| # cif paint listrap viali | |
| # erase comment | |
| templayer m1strap *li | |
| and-not m1grow | |
| grow 30 | |
| templayer listrap comment | |
| slots 30 170 170 60 | |
| #endif (EXPERIMENTAL) | |
| #---------------------------------------------------------------- | |
| style density | |
| #---------------------------------------------------------------- | |
| # Style used by scripts to check for fill density | |
| #---------------------------------------------------------------- | |
| scalefactor 10 nanometers | |
| options calma-permissive-labels | |
| gridlimit 5 | |
| templayer fom_all alldiff,fomfill | |
| templayer poly_all allpoly,polyfill | |
| templayer li_all allli,lifill | |
| templayer m1_all allm1,m1fill | |
| templayer m2_all allm2,m2fill | |
| templayer m3_all allm3,m3fill | |
| templayer m4_all allm4,m4fill | |
| templayer m5_all allm5,m5fill | |
| #---------------------------------------------------------------- | |
| style wafflefill variants (),(tiled) | |
| #---------------------------------------------------------------- | |
| # Style used by scripts for automatically generating fill layers | |
| # NOTE: Be sure to generate output on flattened layout. | |
| # Also note: This fill generator script uses the older GDS | |
| # layer assignments for fill layers. The generator script that | |
| # uses the sky130gds.tech (e.g., sky130A-GDS.tech) technology file | |
| # is preferred. | |
| #---------------------------------------------------------------- | |
| scalefactor 10 nanometers | |
| options calma-permissive-labels | |
| gridlimit 5 | |
| #---------------------------------------------------------------- | |
| # Generate and retain a layer representing the bounding box. | |
| # | |
| # For variant (): | |
| # The bounding box is the full extent of geometry on the top level | |
| # cell. | |
| # | |
| # For variant (tiled): | |
| # Use with a script that breaks layout into flattened tiles and runs | |
| # fill individually on each. The tiles should be larger than the | |
| # step size, and each should draw a layer "comment" the size of the | |
| # step box. | |
| #---------------------------------------------------------------- | |
| variants () | |
| templayer topbox | |
| bbox top | |
| variants (tiled) | |
| templayer topbox comment | |
| # Each tile imposes the full keepout distance rule of | |
| # 3um on all sides. | |
| shrink 1500 | |
| variants * | |
| #---------------------------------------------------------------- | |
| # Generate guard-band around nwells to keep FOM from crossing | |
| # Spacing from LV nwell = Diff/Tap 9 = 0.34um | |
| # Spacing from HV nwell = Diff/Tap 18 = 0.43um (= 0.18 + 0.25) | |
| # Enclosure by nwell = Diff/Tap 8 = 0.18um | |
| #---------------------------------------------------------------- | |
| templayer mvnwell | |
| bloat-all alldiffmv nwell | |
| templayer lvnwell allnwell | |
| and-not mvnwell | |
| templayer well_shrink mvnwell | |
| shrink 250 | |
| or lvnwell | |
| shrink 180 | |
| templayer well_guardband allnwell | |
| grow 340 | |
| and-not well_shrink | |
| #--------------------------------------------------- | |
| # Diffusion and poly keep-out areas | |
| #--------------------------------------------------- | |
| templayer obstruct_fom alldiff,allpoly,fomfill,polyfill,obsactive | |
| or rpw,pnp,npn | |
| grow 500 | |
| or well_guardband | |
| templayer obstruct_poly alldiff,allpoly,fomfill,polyfill,obsactive | |
| or rpw,pnp,npn | |
| grow 1000 | |
| #--------------------------------------------------- | |
| # FOM and POLY fill | |
| #--------------------------------------------------- | |
| templayer fomfill_pass1 topbox | |
| # slots 0 4080 1320 0 4080 1320 1360 0 | |
| slots 0 4080 1600 0 4080 1600 1360 0 | |
| and-not obstruct_fom | |
| and topbox | |
| shrink 2035 | |
| grow 2035 | |
| #--------------------------------------------------- | |
| templayer obstruct_poly_pass1 fomfill_pass1 | |
| grow 300 | |
| or obstruct_poly | |
| templayer polyfill_pass1 topbox | |
| slots 0 720 360 0 720 360 240 0 | |
| and-not obstruct_poly_pass1 | |
| and topbox | |
| shrink 355 | |
| grow 355 | |
| #--------------------------------------------------- | |
| templayer obstruct_fom_pass2 fomfill_pass1 | |
| grow 1290 | |
| or polyfill_pass1 | |
| grow 300 | |
| or obstruct_fom | |
| templayer fomfill_pass2 topbox | |
| slots 0 2500 1320 0 2500 1320 1360 0 | |
| and-not obstruct_fom_pass2 | |
| and topbox | |
| shrink 1245 | |
| grow 1245 | |
| #--------------------------------------------------- | |
| templayer obstruct_poly_coarse polyfill_pass1 | |
| grow 60 | |
| or fomfill_pass1,fomfill_pass2 | |
| grow 300 | |
| or obstruct_poly | |
| templayer polyfill_coarse topbox | |
| slots 0 720 360 0 720 360 240 120 | |
| and-not obstruct_poly_coarse | |
| and topbox | |
| shrink 355 | |
| grow 355 | |
| #--------------------------------------------------- | |
| templayer obstruct_poly_medium polyfill_pass1,polyfill_coarse | |
| grow 60 | |
| or fomfill_pass1,fomfill_pass2 | |
| grow 300 | |
| or obstruct_poly | |
| templayer polyfill_medium topbox | |
| slots 0 540 360 0 540 360 240 100 | |
| and-not obstruct_poly_medium | |
| and topbox | |
| shrink 265 | |
| grow 265 | |
| #--------------------------------------------------- | |
| templayer obstruct_poly_fine polyfill_pass1,polyfill_coarse,polyfill_medium | |
| grow 60 | |
| or fomfill_pass1,fomfill_pass2 | |
| grow 300 | |
| or obstruct_poly | |
| templayer polyfill_fine topbox | |
| slots 0 480 360 0 480 360 240 200 | |
| and-not obstruct_poly_fine | |
| and topbox | |
| shrink 235 | |
| grow 235 | |
| #--------------------------------------------------- | |
| templayer obstruct_fom_coarse fomfill_pass1,fomfill_pass2 | |
| grow 1290 | |
| or polyfill_pass1,polyfill_coarse,polyfill_medium,polyfill_fine | |
| grow 300 | |
| or obstruct_fom | |
| templayer fomfill_coarse topbox | |
| slots 0 1500 1320 0 1500 1320 1360 0 | |
| and-not obstruct_fom_coarse | |
| and topbox | |
| shrink 745 | |
| grow 745 | |
| #--------------------------------------------------- | |
| templayer obstruct_fom_fine fomfill_pass1,fomfill_pass2,fomfill_coarse | |
| grow 1290 | |
| or polyfill_pass1,polyfill_coarse,polyfill_medium,polyfill_fine | |
| grow 300 | |
| or obstruct_fom | |
| templayer fomfill_fine topbox | |
| slots 0 500 400 0 500 400 160 0 | |
| and-not obstruct_fom_fine | |
| and topbox | |
| shrink 245 | |
| grow 245 | |
| #--------------------------------------------------- | |
| layer FOMFILL fomfill_pass1 | |
| or fomfill_pass2 | |
| or fomfill_coarse | |
| or fomfill_fine | |
| calma 23 28 | |
| layer POLYFILL polyfill_pass1 | |
| or polyfill_coarse | |
| or polyfill_medium | |
| or polyfill_fine | |
| calma 28 28 | |
| #--------------------------------------------------------- | |
| # LI fill | |
| # Note requirement that LI fill may not overlap (non-fill) | |
| # diff or poly. | |
| # | |
| # Important note: sky130 does not define an LI mask fill | |
| # blockage layer, because LI fill requirements were added | |
| # to the process after the open PDK was made. While | |
| # obstruction layers can be used in magic to block LI | |
| # fill, this does not translate into GDS, so running fill | |
| # on a GDS top level cell will result in LI fill shapes | |
| # being placed in the corner and under the seal ring. To | |
| # work around this, I have added obsm1 to the layers that | |
| # obstruct LI, which is a bit of a hack but should not | |
| # cause issues in practice. | |
| #--------------------------------------------------------- | |
| templayer obstruct_li_coarse allli,obsli,lifill,fillblock | |
| grow 2800 | |
| or alldiff,allpoly | |
| grow 200 | |
| or obsm1 | |
| templayer lifill_coarse topbox | |
| # slots 0 3000 650 0 3000 650 700 0 | |
| slots 0 3000 900 0 3000 900 700 0 | |
| and-not obstruct_li_coarse | |
| and topbox | |
| shrink 1495 | |
| grow 1495 | |
| templayer obstruct_li_medium allli,obsli,lifill,fillblock | |
| grow 2500 | |
| or lifill_coarse | |
| grow 300 | |
| or alldiff,allpoly | |
| grow 200 | |
| or obsm1 | |
| templayer lifill_medium topbox | |
| slots 0 1500 500 0 1500 500 700 0 | |
| and-not obstruct_li_medium | |
| and topbox | |
| shrink 745 | |
| grow 745 | |
| templayer obstruct_li_fine allli,obsli,lifill,fillblock | |
| or lifill_coarse,lifill_medium | |
| grow 300 | |
| or alldiff,allpoly | |
| grow 200 | |
| or obsm1 | |
| templayer lifill_fine topbox | |
| slots 0 580 500 0 580 500 700 0 | |
| and-not obstruct_li_fine | |
| and topbox | |
| shrink 285 | |
| grow 285 | |
| layer LIFILL lifill_coarse | |
| or lifill_medium | |
| or lifill_fine | |
| calma 56 28 | |
| #--------------------------------------------------- | |
| # MET1 fill | |
| #--------------------------------------------------- | |
| templayer obstruct_m1_coarse allm1,glass,obsm1,m1fill,fillblock | |
| grow 3000 | |
| templayer met1fill_coarse topbox | |
| # slots 0 2000 200 0 2000 200 700 0 | |
| slots 0 2000 800 0 2000 800 700 350 | |
| and-not obstruct_m1_coarse | |
| and topbox | |
| shrink 995 | |
| grow 995 | |
| templayer obstruct_m1_medium allm1,glass,obsm1,m1fill,fillblock | |
| grow 2800 | |
| or met1fill_coarse | |
| grow 200 | |
| templayer met1fill_medium topbox | |
| slots 0 1000 200 0 1000 200 700 0 | |
| and-not obstruct_m1_medium | |
| and topbox | |
| shrink 495 | |
| grow 495 | |
| templayer obstruct_m1_fine allm1,glass,obsm1,m1fill,fillblock | |
| grow 300 | |
| or met1fill_coarse,met1fill_medium | |
| grow 200 | |
| templayer met1fill_fine topbox | |
| slots 0 580 200 0 580 200 700 0 | |
| and-not obstruct_m1_fine | |
| and topbox | |
| shrink 285 | |
| grow 285 | |
| templayer obstruct_m1_veryfine allm1,glass,obsm1,m1fill,fillblock | |
| grow 100 | |
| or met1fill_coarse,met1fill_medium,met1fill_fine | |
| grow 200 | |
| templayer met1fill_veryfine topbox | |
| slots 0 300 200 0 300 200 100 50 | |
| and-not obstruct_m1_veryfine | |
| and topbox | |
| shrink 145 | |
| grow 145 | |
| layer MET1FILL met1fill_coarse | |
| or met1fill_medium | |
| or met1fill_fine | |
| or met1fill_veryfine | |
| calma 36 28 | |
| #--------------------------------------------------- | |
| # MET2 fill | |
| #--------------------------------------------------- | |
| templayer obstruct_m2 allm2,glass,obsm2,m2fill,fillblock | |
| grow 3000 | |
| templayer met2fill_coarse topbox | |
| # slots 0 2000 200 0 2000 200 700 350 | |
| slots 0 2000 800 0 2000 800 700 350 | |
| and-not obstruct_m2 | |
| and topbox | |
| shrink 995 | |
| grow 995 | |
| templayer obstruct_m2_medium allm2,glass,obsm2,m2fill,fillblock | |
| grow 2800 | |
| or met2fill_coarse | |
| grow 200 | |
| templayer met2fill_medium topbox | |
| slots 0 1000 200 0 1000 200 700 350 | |
| and-not obstruct_m2_medium | |
| and topbox | |
| shrink 495 | |
| grow 495 | |
| templayer obstruct_m2_fine allm2,glass,obsm2,m2fill,fillblock | |
| grow 300 | |
| or met2fill_coarse,met2fill_medium | |
| grow 200 | |
| templayer met2fill_fine topbox | |
| slots 0 580 200 0 580 200 700 350 | |
| and-not obstruct_m2_fine | |
| and topbox | |
| shrink 285 | |
| grow 285 | |
| templayer obstruct_m2_veryfine allm2,glass,obsm2,m2fill,fillblock | |
| grow 100 | |
| or met2fill_coarse,met2fill_medium,met2fill_fine | |
| grow 200 | |
| templayer met2fill_veryfine topbox | |
| slots 0 300 200 0 300 200 100 100 | |
| and-not obstruct_m2_veryfine | |
| and topbox | |
| shrink 145 | |
| grow 145 | |
| layer MET2FILL met2fill_coarse | |
| or met2fill_medium | |
| or met2fill_fine | |
| or met2fill_veryfine | |
| calma 41 28 | |
| #--------------------------------------------------- | |
| # MET3 fill | |
| #--------------------------------------------------- | |
| templayer obstruct_m3 allm3,glass,obsm3,m3fill,fillblock | |
| grow 3000 | |
| templayer met3fill_coarse topbox | |
| # slots 0 2000 300 0 2000 300 700 700 | |
| slots 0 2000 800 0 2000 800 700 350 | |
| and-not obstruct_m3 | |
| and topbox | |
| shrink 995 | |
| grow 995 | |
| templayer obstruct_m3_medium allm3,glass,obsm3,m3fill,fillblock | |
| grow 2700 | |
| or met3fill_coarse | |
| grow 300 | |
| templayer met3fill_medium topbox | |
| slots 0 1000 300 0 1000 300 700 700 | |
| and-not obstruct_m3_medium | |
| and topbox | |
| shrink 495 | |
| grow 495 | |
| templayer obstruct_m3_fine allm3,glass,obsm3,m3fill,fillblock | |
| grow 200 | |
| or met3fill_coarse,met3fill_medium | |
| grow 300 | |
| templayer met3fill_fine topbox | |
| slots 0 580 300 0 580 300 700 700 | |
| and-not obstruct_m3_fine | |
| and topbox | |
| shrink 285 | |
| grow 285 | |
| templayer obstruct_m3_veryfine allm3,glass,obsm3,m3fill,fillblock | |
| # Note: Adding 0.1 to waffle rule to clear wide spacing rule | |
| grow 100 | |
| or met3fill_coarse,met3fill_medium,met3fill_fine | |
| grow 300 | |
| templayer met3fill_veryfine topbox | |
| slots 0 500 300 0 500 300 150 200 | |
| and-not obstruct_m3_veryfine | |
| and topbox | |
| shrink 245 | |
| grow 245 | |
| layer MET3FILL met3fill_coarse | |
| or met3fill_medium | |
| or met3fill_fine | |
| or met3fill_veryfine | |
| calma 34 28 | |
| #ifdef METAL5 | |
| #--------------------------------------------------- | |
| # MET4 fill | |
| #--------------------------------------------------- | |
| templayer obstruct_m4 glass | |
| grow 2500 | |
| or allm4,obsm4,m4fill,fillblock | |
| grow 3000 | |
| templayer met4fill_coarse topbox | |
| # slots 0 2000 300 0 2000 300 700 1050 | |
| slots 0 2000 800 0 2000 800 700 350 | |
| and-not obstruct_m4 | |
| and topbox | |
| shrink 995 | |
| grow 995 | |
| templayer obstruct_m4_medium glass | |
| grow 2500 | |
| or allm4,obsm4,m4fill,fillblock | |
| grow 2700 | |
| or met4fill_coarse | |
| grow 300 | |
| templayer met4fill_medium topbox | |
| slots 0 1000 300 0 1000 300 700 1050 | |
| and-not obstruct_m4_medium | |
| and topbox | |
| shrink 495 | |
| grow 495 | |
| templayer obstruct_m4_fine glass | |
| grow 5000 | |
| or allm4,obsm4,m4fill,fillblock | |
| grow 200 | |
| or met4fill_coarse,met4fill_medium | |
| grow 300 | |
| templayer met4fill_fine topbox | |
| slots 0 580 300 0 580 300 700 1050 | |
| and-not obstruct_m4_fine | |
| and topbox | |
| shrink 285 | |
| grow 285 | |
| templayer obstruct_m4_veryfine glass | |
| grow 5100 | |
| or allm4,obsm4,m4fill,fillblock | |
| # Note: Adding 0.1 to waffle rule to clear wide spacing rule | |
| grow 100 | |
| or met4fill_coarse,met4fill_medium,met4fill_fine | |
| grow 300 | |
| templayer met4fill_veryfine topbox | |
| slots 0 500 300 0 500 300 150 300 | |
| and-not obstruct_m4_veryfine | |
| and topbox | |
| shrink 245 | |
| grow 245 | |
| layer MET4FILL met4fill_coarse | |
| or met4fill_medium | |
| or met4fill_fine | |
| or met4fill_veryfine | |
| calma 51 28 | |
| #--------------------------------------------------- | |
| # MET5 fill | |
| #--------------------------------------------------- | |
| templayer obstruct_m5 allm5,glass,obsm5,m5fill,fillblock | |
| grow 3000 | |
| templayer met5fill_coarse topbox | |
| slots 0 5000 1600 0 5000 1600 1000 100 | |
| and-not obstruct_m5 | |
| and topbox | |
| shrink 2495 | |
| grow 2495 | |
| templayer obstruct_m5_medium allm5,glass,obsm5,m5fill,fillblock | |
| grow 1400 | |
| or met5fill_coarse | |
| grow 1600 | |
| templayer met5fill_medium topbox | |
| slots 0 3000 1600 0 3000 1600 1000 100 | |
| and-not obstruct_m5_medium | |
| and topbox | |
| shrink 1495 | |
| grow 1495 | |
| layer MET5FILL met5fill_coarse | |
| or met5fill_medium | |
| calma 59 28 | |
| #endif (METAL5) | |
| end | |
| #----------------------------------------------------------------------- | |
| cifinput | |
| #----------------------------------------------------------------------- | |
| # NOTE: All values in this section MUST be multiples of 25 | |
| # or else magic will scale below the allowed layout grid size | |
| #----------------------------------------------------------------------- | |
| style sky130 variants (),(vendor) | |
| scalefactor 10 nanometers | |
| gridlimit 5 | |
| options ignore-unknown-layer-labels | |
| #ifndef MIM | |
| ignore CAPM | |
| ignore CAPM2 | |
| #endif (!MIM) | |
| #ifndef METAL5 | |
| ignore MET4,VIA3 | |
| ignore MET5,VIA4 | |
| #endif | |
| ignore NPC | |
| ignore SEALID | |
| ignore CAPID | |
| ignore LDNTM | |
| ignore HVNTM | |
| ignore POLYMOD | |
| ignore LOWTAPDENSITY | |
| ignore OUTLINE | |
| ignore POLYCUT | |
| ignore POLYGATE | |
| ignore DIFFCUT | |
| ignore HVNWELLID | |
| ignore PADDIFFID | |
| ignore PADMETALID | |
| ignore PADCENTERID | |
| layer pnp NWELL,WELLTXT,WELLPIN | |
| and PNPID | |
| labels NWELL | |
| labels WELLPIN port | |
| labels WELLTXT text | |
| layer nwell NWELL,WELLTXT,WELLPIN | |
| and-not PNPID | |
| labels NWELL | |
| labels WELLPIN port | |
| labels WELLTXT text | |
| variants * | |
| templayer nwellarea NWELL | |
| copyup nwelcheck | |
| # Copy nwell areas up for diffusion checks | |
| templayer xnwelcheck nwelcheck | |
| copyup nwelcheck | |
| templayer hvarea HVI | |
| copyup hvcheck | |
| # Copy high-voltage (HVI) areas up for diffusion checks | |
| templayer xhvcheck hvcheck | |
| copyup hvcheck | |
| # Always draw pwell under p-tap and n-diff. This is not always | |
| # necessary but works better with deep nwell for correct extraction. | |
| layer pwell TAP,DIFF | |
| and-not NWELL,nwelcheck | |
| grow 130 | |
| or SUBTXT,SUBPIN | |
| grow 420 | |
| shrink 420 | |
| labels SUBPIN port | |
| labels SUBTXT text | |
| layer dnwell DNWELL | |
| labels DNWELL | |
| layer isosub SUBCUT | |
| labels SUBCUT | |
| layer npn DNWELL | |
| and-not NWELL,nwelcheck | |
| and NPNID | |
| layer photo DNWELL | |
| and PHOTO | |
| layer rpw PWRES | |
| and DNWELL | |
| labels PWRES | |
| templayer ndiffarea DIFF,DIFFTXT,DIFFPIN,barediff | |
| and-not POLY | |
| and-not NWELL,nwelcheck | |
| and-not PSDM | |
| and-not DIODE | |
| and-not DIFFRES | |
| and-not HVI,hvcheck | |
| and NSDM | |
| and-not CORELI | |
| copyup ndifcheck | |
| labels DIFF | |
| labels DIFFPIN port | |
| labels DIFFTXT text | |
| variants * | |
| layer ndiff ndiffarea | |
| # Copy ndiff areas up for contact checks | |
| templayer xndifcheck ndifcheck | |
| copyup ndifcheck | |
| templayer mvndiffarea DIFF,DIFFTXT,DIFFPIN,barediff | |
| and-not POLY | |
| and-not NWELL,nwelcheck | |
| and-not PSDM | |
| and-not DIODE | |
| and-not DIFFRES | |
| and HVI,hvcheck | |
| and NSDM | |
| copyup ndifcheck | |
| labels DIFF | |
| labels DIFFPIN port | |
| labels DIFFTXT text | |
| layer mvndiff mvndiffarea | |
| # Copy ndiff areas up for contact checks | |
| templayer mvxndifcheck mvndifcheck | |
| copyup mvndifcheck | |
| layer ndiode DIFF,barediff | |
| and NSDM | |
| and DIODE | |
| and-not NWELL,nwelcheck | |
| and-not POLY | |
| and-not PSDM | |
| and-not HVI,hvcheck | |
| and-not LVTN | |
| labels DIFF | |
| layer ndiodelvt DIFF,barediff | |
| and NSDM | |
| and DIODE | |
| and-not NWELL,nwelcheck | |
| and-not POLY | |
| and-not PSDM | |
| and-not HVI,hvcheck | |
| and LVTN | |
| labels DIFF | |
| templayer ndiodearea DIODE | |
| and NSDM | |
| and-not HVI,hvcheck | |
| and-not NWELL,nwelcheck | |
| copyup DIODE,NSDM | |
| layer ndiffres DIFFRES | |
| and NSDM | |
| and-not HVI,hvcheck | |
| labels DIFF | |
| templayer pdiffarea DIFF,DIFFTXT,DIFFPIN,barediff | |
| and-not POLY | |
| and NWELL,nwelcheck | |
| and-not NSDM | |
| and-not DIODE | |
| and-not HVI,hvcheck | |
| and PSDM | |
| copyup pdifcheck | |
| labels DIFF | |
| labels DIFFPIN port | |
| labels DIFFTXT text | |
| layer pdiff pdiffarea | |
| layer mvndiode DIFF,barediff | |
| and NSDM | |
| and DIODE | |
| and HVI,hvcheck | |
| and-not POLY | |
| and-not PSDM | |
| and-not LVTN | |
| labels DIFF | |
| layer nndiode DIFF,barediff | |
| and NSDM | |
| and DIODE | |
| and HVI,hvcheck | |
| and-not POLY | |
| and-not PSDM | |
| and LVTN | |
| labels DIFF | |
| templayer mvndiodearea DIODE | |
| and NSDM | |
| and HVI,hvcheck | |
| and-not NWELL,nwelcheck | |
| copyup DIODE,NSDM | |
| layer mvndiffres DIFFRES | |
| and NSDM | |
| and HVI,hvcheck | |
| labels DIFF | |
| # Note: Not checking PSDM specifically, just lack of NSDM | |
| templayer mvpdiffarea DIFF,DIFFTXT,DIFFPIN,barediff | |
| and-not POLY | |
| and NWELL,nwelcheck | |
| and-not NSDM | |
| and HVI,hvcheck | |
| and-not DIODE | |
| and-not DIFFRES | |
| copyup mvpdifcheck | |
| labels DIFF | |
| labels DIFFPIN port | |
| labels DIFFTXT text | |
| layer mvpdiff mvpdiffarea | |
| # Copy pdiff areas up for contact checks | |
| templayer xpdifcheck pdifcheck | |
| copyup pdifcheck | |
| layer pdiode DIFF,barediff | |
| and PSDM | |
| and-not POLY | |
| and-not NSDM | |
| and-not HVI,hvcheck | |
| and-not LVTN | |
| and-not HVTP | |
| and DIODE | |
| labels DIFF | |
| layer pdiodelvt DIFF,barediff | |
| and PSDM | |
| and-not POLY | |
| and-not NSDM | |
| and-not HVI,hvcheck | |
| and LVTN | |
| and-not HVTP | |
| and DIODE | |
| labels DIFF | |
| layer pdiodehvt DIFF,barediff | |
| and PSDM | |
| and-not POLY | |
| and-not NSDM | |
| and-not HVI,hvcheck | |
| and-not LVTN | |
| and HVTP | |
| and DIODE | |
| labels DIFF | |
| templayer pdiodearea DIODE | |
| and PSDM | |
| and-not HVI,hvcheck | |
| copyup DIODE,PSDM | |
| # Define pfet areas as known pdiff, regardless of the presence of a well. | |
| templayer pfetarea DIFF,barediff | |
| and POLY | |
| or baretrans | |
| and-not NSDM | |
| and-not HVI,hvcheck | |
| layer pfet pfetarea | |
| and-not LVTN | |
| and-not HVTP | |
| and-not STDCELL | |
| and-not COREID | |
| labels DIFF | |
| layer scpfet pfetarea | |
| and-not LVTN | |
| and-not HVTP | |
| and STDCELL | |
| and-not COREID | |
| labels DIFF | |
| layer scpfethvt pfetarea | |
| and-not LVTN | |
| and HVTP | |
| and STDCELL | |
| labels DIFF | |
| layer ppu pfetarea | |
| and-not LVTN | |
| and HVTP | |
| and COREID | |
| # Shrink-grow operation eliminates the smaller parasitie device | |
| # shrink 70 | |
| # grow 70 | |
| labels DIFF | |
| layer pfetlvt pfetarea | |
| and LVTN | |
| labels DIFF | |
| layer pfetmvt pfetarea | |
| and HVTR | |
| labels DIFF | |
| layer pfethvt pfetarea | |
| and HVTP | |
| and-not STDCELL | |
| and-not COREID | |
| labels DIFF | |
| # Always force nwell under pfet (nwell encloses pdiff by 0.18) | |
| layer nwell pfetarea | |
| and-not COREID | |
| grow 180 | |
| # Copy mvpdiff areas up for contact checks | |
| templayer mvxpdifcheck mvpdifcheck | |
| copyup mvpdifcheck | |
| layer mvpdiode DIFF,barediff | |
| and PSDM | |
| and-not POLY | |
| and-not NSDM | |
| and HVI,hvcheck | |
| and DIODE | |
| labels DIFF | |
| templayer mvpdiodearea DIODE | |
| and PSDM | |
| and HVI,hvcheck | |
| copyup DIODE,PSDM | |
| # Define pfet areas as known pdiff, | |
| # regardless of the presence of a | |
| # well. | |
| templayer mvpfetarea DIFF,barediff | |
| and POLY | |
| or baretrans | |
| and-not NSDM | |
| and HVI,hvcheck | |
| layer mvpfet mvpfetarea | |
| and-not ESDID | |
| labels DIFF | |
| layer mvpfetesd mvpfetarea | |
| and ESDID | |
| labels DIFF | |
| layer pdiff DIFF,DIFFTXT,DIFFPIN,barediff | |
| and-not NSDM | |
| and-not POLY | |
| and-not HVI,hvcheck | |
| and-not DIODE | |
| and-not DIFFRES | |
| labels DIFF | |
| labels DIFFPIN port | |
| labels DIFFTXT text | |
| layer pdiffres DIFFRES | |
| and PSDM | |
| and NWELL,nwelcheck | |
| and-not HVI,hvcheck | |
| labels DIFF | |
| layer nfet DIFF,barediff | |
| and POLY | |
| or baretrans | |
| and-not PSDM | |
| and NSDM | |
| and-not HVI,hvcheck | |
| and-not LVTN | |
| and-not SONOS | |
| and-not STDCELL | |
| and-not COREID | |
| labels DIFF | |
| layer scnfet DIFF,barediff | |
| and POLY | |
| or baretrans | |
| and-not PSDM | |
| and NSDM | |
| and-not NWELL,nwelcheck | |
| and-not HVI,hvcheck | |
| and-not LVTN | |
| and-not SONOS | |
| and STDCELL | |
| labels DIFF | |
| layer scnfetlvt DIFF,barediff | |
| and POLY | |
| or baretrans | |
| and-not PSDM | |
| and NSDM | |
| and-not NWELL,nwelcheck | |
| and-not HVI,hvcheck | |
| and LVTN | |
| and-not SONOS | |
| and STDCELL | |
| labels DIFF | |
| layer npass DIFF,barediff | |
| and POLY | |
| or baretrans | |
| and-not PSDM | |
| and NSDM | |
| and-not NWELL,nwelcheck | |
| and COREID | |
| labels DIFF | |
| layer npd DIFF,barediff | |
| and POLY | |
| or baretrans | |
| and-not PSDM | |
| and NSDM | |
| and-not NWELL,nwelcheck | |
| and COREID | |
| # Shrink-grow operation eliminates the smaller npass device | |
| shrink 70 | |
| grow 70 | |
| labels DIFF | |
| # Devices abutting tap under gate are officially npd, not npass | |
| layer npd TAP | |
| grow 100 | |
| and DIFF | |
| and POLY | |
| and-not PSDM | |
| and NSDM | |
| and-not NWELL,nwelcheck | |
| and COREID | |
| labels DIFF | |
| layer nfetlvt DIFF,barediff | |
| and POLY | |
| or baretrans | |
| and-not PSDM | |
| and NSDM | |
| and-not HVI,hvcheck | |
| and LVTN | |
| and-not SONOS | |
| and-not STDCELL | |
| labels DIFF | |
| layer nsonos DIFF,barediff | |
| and POLY | |
| or baretrans | |
| and-not PSDM | |
| and NSDM | |
| and-not HVI,hvcheck | |
| and LVTN | |
| and SONOS | |
| labels DIFF | |
| templayer nsdarea TAP,DIFF | |
| and NSDM | |
| and NWELL,nwelcheck | |
| and-not POLY | |
| and-not PSDM | |
| and-not HVI,hvcheck | |
| and-not CORELI | |
| copyup nsubcheck | |
| layer nsd nsdarea | |
| labels TAP | |
| layer nsd TAP,TAPTXT | |
| and NSDM | |
| and-not POLY | |
| and-not HVI,hvcheck | |
| labels TAP | |
| labels TAPTXT text | |
| layer corenvar TAP | |
| and NSDM | |
| and POLY | |
| and COREID | |
| labels TAP | |
| templayer nsdexpand nsdarea | |
| grow 500 | |
| # Copy nsub areas up for contact checks | |
| templayer xnsubcheck nsubcheck | |
| copyup nsubcheck | |
| templayer psdarea TAP,DIFF | |
| and PSDM | |
| and-not NWELL,nwelcheck | |
| and-not POLY | |
| and-not NSDM | |
| and-not HVI,hvcheck | |
| and-not pfetexpand | |
| copyup psubcheck | |
| layer psd psdarea | |
| labels TAP | |
| layer psd TAP | |
| and PSDM | |
| and-not POLY | |
| and-not HVI,hvcheck | |
| labels TAP | |
| labels TAPTXT text | |
| layer corepvar TAP | |
| and PSDM | |
| and POLY | |
| and COREID | |
| labels TAP | |
| templayer psdexpand psdarea | |
| grow 500 | |
| layer mvpdiff DIFF,DIFFTXT,DIFFPIN,barediff | |
| and-not NSDM | |
| and-not POLY | |
| and HVI,hvcheck | |
| and mvpfetexpand | |
| labels DIFF | |
| labels DIFFPIN port | |
| labels DIFFTXT text | |
| layer mvpdiffres DIFFRES | |
| and PSDM | |
| and NWELL,nwelcheck | |
| and HVI,hvcheck | |
| and-not mvrdpioedge | |
| labels DIFF | |
| templayer mvnfetarea DIFF,barediff | |
| and POLY | |
| or baretrans | |
| and-not PSDM | |
| and NSDM | |
| and-not LVTN | |
| and HVI,hvcheck | |
| grow 350 | |
| templayer mvnnfetarea DIFF,TAP,barediff | |
| and POLY | |
| or baretrans | |
| and-not PSDM | |
| and NSDM | |
| and LVTN | |
| and HVI,hvcheck | |
| and-not mvnfetarea | |
| layer mvnfetesd DIFF,barediff | |
| and POLY | |
| or baretrans | |
| and-not PSDM | |
| and NSDM | |
| and HVI,hvcheck | |
| and ESDID | |
| and-not mvnnfetarea | |
| labels DIFF | |
| layer mvnfet DIFF,barediff | |
| and POLY | |
| or baretrans | |
| and-not PSDM | |
| and NSDM | |
| and HVI,hvcheck | |
| and-not ESDID | |
| and-not mvnnfetarea | |
| labels DIFF | |
| layer nnfet mvnnfetarea | |
| and LVID | |
| labels DIFF | |
| layer mvnnfet mvnnfetarea | |
| and-not LVID | |
| labels DIFF | |
| templayer mvnsdarea TAP,DIFF | |
| and NSDM | |
| and NWELL,nwelcheck | |
| and-not POLY | |
| and-not PSDM | |
| and HVI,hvcheck | |
| copyup mvnsubcheck | |
| layer mvnsd mvnsdarea | |
| labels TAP | |
| layer mvnsd TAP,TAPTXT | |
| and NSDM | |
| and HVI,hvcheck | |
| labels TAP | |
| labels TAPTXT text | |
| # Fill in FET under extended drain | |
| layer mvpfet EDID | |
| and POLY | |
| and-not DIFF | |
| and-not TAP | |
| and-not NWELL | |
| layer mvnfet EDID | |
| and POLY | |
| and-not DIFF | |
| and-not TAP | |
| and NWELL | |
| # Restrict where nwell is merged | |
| templayer ldmos_nwell EDID | |
| grow 1200 | |
| and NWELL | |
| # Remove or add well under extended FET gate | |
| layer nwell EDID | |
| and POLY | |
| and DIFF | |
| and PSDM | |
| grow 685 | |
| or ldmos_nwell | |
| grow 420 | |
| shrink 420 | |
| layer pwell EDID | |
| and POLY | |
| and DIFF | |
| and NSDM | |
| grow 660 | |
| grow 420 | |
| shrink 420 | |
| layer ed EDID | |
| and-not POLY | |
| and-not DIFF | |
| and-not TAP | |
| templayer mvnsdexpand mvnsdarea | |
| grow 500 | |
| # Copy nsub areas up for contact checks | |
| templayer mvxnsubcheck mvnsubcheck | |
| copyup mvnsubcheck | |
| templayer mvpsdarea TAP,DIFF,barediff | |
| and PSDM | |
| and-not NWELL,nwelcheck | |
| and-not POLY | |
| and-not NSDM | |
| and HVI,hvcheck | |
| and-not mvpfetexpand | |
| copyup mvpsubcheck | |
| layer mvpsd mvpsdarea | |
| labels DIFF | |
| layer mvpsd TAP,TAPTXT | |
| and PSDM | |
| and HVI,hvcheck | |
| labels TAP | |
| labels TAPTXT text | |
| templayer mvpsdexpand mvpsdarea | |
| grow 500 | |
| # Copy psub areas up for contact checks | |
| templayer xpsubcheck psubcheck | |
| copyup psubcheck | |
| templayer mvxpsubcheck mvpsubcheck | |
| copyup mvpsubcheck | |
| layer psd TAP | |
| and-not PSDM | |
| and-not NSDM | |
| and-not POLY | |
| and-not HVI,hvcheck | |
| and-not pfetexpand | |
| and psdexpand | |
| layer nsd TAP | |
| and-not PSDM | |
| and-not NSDM | |
| and-not POLY | |
| and-not HVI,hvcheck | |
| and nsdexpand | |
| layer mvpsd TAP | |
| and-not PSDM | |
| and-not NSDM | |
| and-not POLY | |
| and HVI,hvcheck | |
| and-not mvpfetexpand | |
| and mvpsdexpand | |
| layer mvnsd TAP | |
| and-not PSDM | |
| and-not NSDM | |
| and-not POLY | |
| and HVI,hvcheck | |
| and mvnsdexpand | |
| # The following recipes deal with DIFFRES layers expanded over large areas | |
| # outside the resistor. Find areas which may have been accidentally | |
| # captured as a resistor which were supposed to be transistors. | |
| templayer diffresarea DIFFRES | |
| and-not HVI,hvcheck | |
| grow 3000 | |
| layer pfet DIFF | |
| and diffresarea | |
| and POLY | |
| and-not NSDM | |
| and-not STDCELL | |
| and-not HVI | |
| layer mvpfet DIFF | |
| and diffresarea | |
| and POLY | |
| and-not NSDM | |
| and-not STDCELL | |
| and HVI | |
| layer scpfet STDCELL | |
| and POLY | |
| and diffresarea | |
| and DIFF | |
| and-not NSDM | |
| and-not HVTP | |
| layer scpfethvt STDCELL | |
| and POLY | |
| and diffresarea | |
| and DIFF | |
| and-not NSDM | |
| and HVTP | |
| # End of resistor area hack | |
| templayer xpolyterm RPM,URPM | |
| and POLY | |
| and-not POLYRES | |
| # add back the 0.08um contact surround in the direction of the resistor | |
| grow 80 | |
| and POLY | |
| layer xpc xpolyterm | |
| templayer polyarea POLY,POLYTXT,POLYPIN | |
| and-not POLYRES | |
| and-not POLYSHORT | |
| and-not DIFF | |
| and-not TAP | |
| and-not RPM | |
| and-not URPM | |
| templayer polycontarea polyarea | |
| # Remove areas too small for a contact | |
| shrink 130 | |
| grow 130 | |
| copyup polycheck | |
| layer poly polyarea | |
| labels POLY | |
| labels POLYPIN port | |
| labels POLYTXT text | |
| # Copy (non-resistor) poly areas up for contact checks | |
| templayer xpolycheck polycheck | |
| copyup polycheck | |
| layer mrp1 POLYRES | |
| and POLY | |
| and-not RPM | |
| and-not URPM | |
| labels POLY | |
| layer rmp POLYSHORT | |
| and POLY | |
| labels POLY | |
| layer xhrpoly RPM | |
| and POLYRES | |
| and POLY | |
| and-not URPM | |
| and PSDM | |
| and NPC | |
| and-not xpolyterm | |
| labels POLY | |
| layer uhrpoly URPM | |
| and POLYRES | |
| and POLY | |
| and-not RPM | |
| and NPC | |
| and-not xpolyterm | |
| labels POLY | |
| templayer ndcbase CONT | |
| or barecont | |
| and LI | |
| or barelicont | |
| and DIFF | |
| and NSDM | |
| and-not NWELL,nwelcheck | |
| and-not HVI,hvcheck | |
| layer ndc ndcbase | |
| grow 85 | |
| shrink 85 | |
| shrink 85 | |
| grow 85 | |
| or ndcbase | |
| labels CONT | |
| templayer nscbase CONT | |
| or barecont | |
| and LI | |
| or barelicont | |
| and DIFF,TAP | |
| and NSDM | |
| and NWELL,nwelcheck | |
| and-not HVI,hvcheck | |
| layer nsc nscbase | |
| grow 85 | |
| shrink 85 | |
| shrink 85 | |
| grow 85 | |
| or nscbase | |
| labels CONT | |
| templayer pdcbase CONT | |
| or barecont | |
| and LI | |
| or barelicont | |
| and DIFF | |
| and PSDM | |
| and NWELL,nwelcheck | |
| and-not HVI,hvcheck | |
| layer pdc pdcbase | |
| grow 85 | |
| shrink 85 | |
| shrink 85 | |
| grow 85 | |
| or pdcbase | |
| labels CONT | |
| templayer pdcnowell CONT | |
| or barecont | |
| and LI | |
| or barelicont | |
| and DIFF | |
| and PSDM | |
| and pfetexpand | |
| and-not HVI,hvcheck | |
| layer pdc pdcnowell | |
| grow 85 | |
| shrink 85 | |
| shrink 85 | |
| grow 85 | |
| or pdcnowell | |
| labels CONT | |
| templayer pscbase CONT | |
| or barecont | |
| and LI | |
| or barelicont | |
| and DIFF,TAP | |
| and PSDM | |
| and-not NWELL,nwelcheck | |
| and-not pfetexpand | |
| and-not HVI,hvcheck | |
| layer psc pscbase | |
| grow 85 | |
| shrink 85 | |
| shrink 85 | |
| grow 85 | |
| or pscbase | |
| labels CONT | |
| templayer pcbase CONT | |
| or barecont | |
| and LI | |
| or barelicont | |
| and POLY | |
| and-not DIFF | |
| and-not RPM,URPM | |
| layer pc pcbase | |
| grow 85 | |
| shrink 85 | |
| shrink 85 | |
| grow 85 | |
| or pcbase | |
| labels CONT | |
| templayer ndicbase CONT | |
| or barecont | |
| and LI | |
| or barelicont | |
| and DIFF | |
| and NSDM | |
| and DIODE | |
| and-not NWELL,nwelcheck | |
| and-not POLY | |
| and-not PSDM | |
| and-not HVI,hvcheck | |
| and-not LVTN | |
| layer ndic ndicbase | |
| grow 85 | |
| shrink 85 | |
| shrink 85 | |
| grow 85 | |
| or ndicbase | |
| labels CONT | |
| templayer ndilvtcbase CONT | |
| or barecont | |
| and LI | |
| or barelicont | |
| and DIFF | |
| and NSDM | |
| and DIODE | |
| and-not NWELL,nwelcheck | |
| and-not POLY | |
| and-not PSDM | |
| and-not HVI,hvcheck | |
| and LVTN | |
| layer ndilvtc ndilvtcbase | |
| grow 85 | |
| shrink 85 | |
| shrink 85 | |
| grow 85 | |
| or ndilvtcbase | |
| labels CONT | |
| templayer pdicbase CONT | |
| or barecont | |
| and LI | |
| or barelicont | |
| and DIFF | |
| and PSDM | |
| and DIODE | |
| and-not POLY | |
| and-not NSDM | |
| and-not HVI,hvcheck | |
| and-not LVTN | |
| and-not HVTP | |
| layer pdic pdicbase | |
| grow 85 | |
| shrink 85 | |
| shrink 85 | |
| grow 85 | |
| or pdicbase | |
| labels CONT | |
| templayer pdilvtcbase CONT | |
| or barecont | |
| and LI | |
| or barelicont | |
| and DIFF | |
| and PSDM | |
| and DIODE | |
| and-not POLY | |
| and-not NSDM | |
| and-not HVI,hvcheck | |
| and LVTN | |
| and-not HVTP | |
| layer pdilvtc pdilvtcbase | |
| grow 85 | |
| shrink 85 | |
| shrink 85 | |
| grow 85 | |
| or pdilvtcbase | |
| labels CONT | |
| templayer pdihvtcbase CONT | |
| or barecont | |
| and LI | |
| or barelicont | |
| and DIFF | |
| and PSDM | |
| and DIODE | |
| and-not POLY | |
| and-not NSDM | |
| and-not HVI,hvcheck | |
| and-not LVTN | |
| and HVTP | |
| layer pdihvtc pdihvtcbase | |
| grow 85 | |
| shrink 85 | |
| shrink 85 | |
| grow 85 | |
| or pdihvtcbase | |
| labels CONT | |
| templayer mvndcbase CONT | |
| or barecont | |
| and LI | |
| or barelicont | |
| and DIFF | |
| and NSDM | |
| and-not NWELL,nwelcheck | |
| and HVI,hvcheck | |
| layer mvndc mvndcbase | |
| grow 85 | |
| shrink 85 | |
| shrink 85 | |
| grow 85 | |
| or mvndcbase | |
| labels CONT | |
| templayer mvnscbase CONT | |
| or barecont | |
| and LI | |
| or barelicont | |
| and DIFF,TAP | |
| and NSDM | |
| and NWELL,nwelcheck | |
| and HVI,hvcheck | |
| layer mvnsc mvnscbase | |
| grow 85 | |
| shrink 85 | |
| shrink 85 | |
| grow 85 | |
| or mvnscbase | |
| labels CONT | |
| # See note above: Not checking PSDM | |
| templayer mvpdcbase CONT | |
| or barecont | |
| and LI | |
| or barelicont | |
| and DIFF | |
| and-not NSDM | |
| and NWELL,nwelcheck | |
| and HVI,hvcheck | |
| layer mvpdc mvpdcbase | |
| grow 85 | |
| shrink 85 | |
| shrink 85 | |
| grow 85 | |
| or mvpdcbase | |
| labels CONT | |
| templayer mvpdcnowell CONT | |
| or barecont | |
| and LI | |
| or barelicont | |
| and DIFF | |
| and PSDM | |
| and mvpfetexpand | |
| and MET1 | |
| and HVI,hvcheck | |
| layer mvpdc mvpdcnowell | |
| grow 85 | |
| shrink 85 | |
| shrink 85 | |
| grow 85 | |
| or mvpdcnowell | |
| labels CONT | |
| # Note: Not checking PSDM specifically, just lack of NSDM | |
| templayer mvpscbase CONT | |
| or barecont | |
| and LI | |
| or barelicont | |
| and DIFF,TAP | |
| and-not NSDM | |
| and-not NWELL,nwelcheck | |
| and-not mvpfetexpand | |
| and HVI,hvcheck | |
| layer mvpsc mvpscbase | |
| grow 85 | |
| shrink 85 | |
| shrink 85 | |
| grow 85 | |
| or mvpscbase | |
| labels CONT | |
| templayer mvndicbase CONT | |
| or barecont | |
| and LI | |
| or barelicont | |
| and DIFF | |
| and NSDM | |
| and DIODE | |
| and-not POLY | |
| and-not PSDM | |
| and-not LVTN | |
| and HVI,hvcheck | |
| layer mvndic mvndicbase | |
| grow 85 | |
| shrink 85 | |
| shrink 85 | |
| grow 85 | |
| or mvndicbase | |
| labels CONT | |
| templayer nndicbase CONT | |
| or barecont | |
| and LI | |
| or barelicont | |
| and DIFF | |
| and NSDM | |
| and DIODE | |
| and-not POLY | |
| and-not PSDM | |
| and LVTN | |
| and HVI,hvcheck | |
| layer nndic nndicbase | |
| grow 85 | |
| shrink 85 | |
| shrink 85 | |
| grow 85 | |
| or nndicbase | |
| labels CONT | |
| templayer mvpdicbase CONT | |
| or barecont | |
| and LI | |
| or barelicont | |
| and DIFF | |
| and PSDM | |
| and DIODE | |
| and-not POLY | |
| and-not NSDM | |
| and HVI,hvcheck | |
| layer mvpdic mvpdicbase | |
| grow 85 | |
| shrink 85 | |
| shrink 85 | |
| grow 85 | |
| or mvpdicbase | |
| labels CONT | |
| layer fomfill FOMFILL | |
| or DIFFFILLALT | |
| labels FOMFILL,DIFFFILLALT | |
| layer polyfill POLYFILL | |
| or POLYFILLALT | |
| labels POLYFILL,POLYFILLALT | |
| layer coreli LI,LITXT,LIPIN | |
| and-not LIRES,LISHORT | |
| and COREID | |
| labels LI | |
| labels LIPIN port | |
| labels LITXT text | |
| layer locali LI,LITXT,LIPIN | |
| and-not LIRES,LISHORT | |
| and-not COREID | |
| labels LI | |
| labels LIPIN port | |
| labels LITXT text | |
| layer rli LI | |
| and LIRES,LISHORT | |
| labels LIRES,LISHORT | |
| layer lifill LIFILL | |
| or LIFILLALT | |
| labels LIFILL,LIFILLALT | |
| layer mcon MCON | |
| grow 95 | |
| shrink 95 | |
| shrink 85 | |
| grow 85 | |
| or MCON | |
| labels MCON | |
| layer m1 MET1,MET1TXT,MET1PIN | |
| and-not MET1RES,MET1SHORT | |
| labels MET1 | |
| labels MET1PIN port | |
| labels MET1TXT text | |
| layer rm1 MET1 | |
| and MET1RES,MET1SHORT | |
| labels MET1RES,MET1SHORT | |
| layer m1fill MET1FILL | |
| or MET1FILLALT | |
| labels MET1FILL,MET1FILLALT | |
| #ifdef MIM | |
| layer mimcap MET3 | |
| and CAPM | |
| labels CAPM | |
| layer mimcc VIA3 | |
| and CAPM | |
| grow 60 | |
| grow 40 | |
| shrink 40 | |
| labels CAPM | |
| layer mimcap2 MET4 | |
| and CAPM2 | |
| labels CAPM2 | |
| layer mim2cc VIA4 | |
| and CAPM2 | |
| grow 190 | |
| grow 210 | |
| shrink 210 | |
| labels CAPM2 | |
| #endif (MIM) | |
| #ifdef RERAM | |
| #undef RERAM | |
| # RERAM is drawn as-is | |
| layer reram RERAM | |
| #define RERAM | |
| #endif (RERAM) | |
| templayer m2cbase VIA1 | |
| #ifdef RERAM | |
| #undef RERAM | |
| and-not RERAM | |
| #define RERAM | |
| #endif (RERAM) | |
| and-not COREID | |
| grow 5 | |
| or VIA1 | |
| #ifdef RERAM | |
| #undef RERAM | |
| and-not RERAM | |
| #define RERAM | |
| #endif (RERAM) | |
| grow 50 | |
| layer m2c m2cbase | |
| grow 30 | |
| shrink 30 | |
| shrink 130 | |
| grow 130 | |
| or m2cbase | |
| layer m2 MET2,MET2TXT,MET2PIN | |
| and-not MET2RES,MET2SHORT | |
| labels MET2 | |
| labels MET2PIN port | |
| labels MET2TXT text | |
| layer rm2 MET2 | |
| and MET2RES,MET2SHORT | |
| labels MET2RES,MET2SHORT | |
| layer m2fill MET2FILL | |
| or MET2FILLALT | |
| labels MET2FILL,MET2FILLALT | |
| templayer m3cbase VIA2 | |
| grow 40 | |
| layer m3c m3cbase | |
| grow 60 | |
| shrink 60 | |
| shrink 140 | |
| grow 140 | |
| or m3cbase | |
| layer m3 MET3,MET3TXT,MET3PIN | |
| and-not MET3RES,MET3SHORT | |
| labels MET3 | |
| labels MET3PIN port | |
| labels MET3TXT text | |
| layer rm3 MET3 | |
| and MET3RES,MET3SHORT | |
| labels MET3RES,MET3SHORT | |
| layer m3fill MET3FILL | |
| or MET3FILLALT | |
| labels MET3FILL,MET3FILLALT | |
| #ifdef (METAL5) | |
| templayer via3base VIA3 | |
| #ifdef MIM | |
| and-not CAPM | |
| #endif (MIM) | |
| grow 60 | |
| layer via3 via3base | |
| grow 40 | |
| shrink 40 | |
| shrink 160 | |
| grow 160 | |
| or via3base | |
| layer m4 MET4,MET4TXT,MET4PIN | |
| and-not MET4RES,MET4SHORT | |
| labels MET4 | |
| labels MET4PIN port | |
| labels MET4TXT text | |
| layer rm4 MET4 | |
| and MET4RES,MET4SHORT | |
| labels MET4RES,MET4SHORT | |
| layer m4fill MET4FILL | |
| or MET4FILLALT | |
| labels MET4FILL,MET4FILLALT | |
| layer m5 MET5,MET5TXT,MET5PIN | |
| and-not MET5RES,MET5SHORT | |
| labels MET5 | |
| labels MET5PIN port | |
| labels MET5TXT text | |
| layer rm5 MET5 | |
| and MET5RES,MET5SHORT | |
| labels MET5RES,MET5SHORT | |
| layer m5fill MET5FILL | |
| or MET5FILLALT | |
| labels MET5FILL,MET5FILLALT | |
| templayer via4base VIA4 | |
| #ifdef MIM | |
| and-not CAPM2 | |
| #endif (MIM) | |
| grow 190 | |
| layer via4 via4base | |
| grow 210 | |
| shrink 210 | |
| shrink 590 | |
| grow 590 | |
| or via4base | |
| #endif (METAL5) | |
| #ifdef REDISTRIBUTION | |
| layer metrdl RDL,RDLTXT,RDLPIN | |
| labels RDL | |
| labels RDLPIN port | |
| labels RDLTXT text | |
| #endif | |
| # Find diffusion not covered in | |
| # NSDM or PSDM and pull it into | |
| # the next layer up | |
| templayer gentrans DIFF | |
| and-not PSDM | |
| and-not NSDM | |
| and POLY | |
| copyup baretrans | |
| templayer gendiff DIFF,TAP | |
| and-not PSDM | |
| and-not NSDM | |
| and-not POLY | |
| and-not COREID | |
| copyup barediff | |
| # Handle contacts found by copyup | |
| templayer ndiccopy CONT | |
| and LI | |
| and DIODE | |
| and DIFF | |
| and-not NWELL,nwelcheck | |
| and NSDM | |
| and-not LVTN | |
| and-not HVI,hvcheck | |
| layer ndic ndiccopy | |
| grow 85 | |
| shrink 85 | |
| shrink 85 | |
| grow 85 | |
| or ndiccopy | |
| labels CONT | |
| templayer mvndiccopy CONT | |
| and LI | |
| and DIODE | |
| and DIFF | |
| and-not NWELL,nwelcheck | |
| and NSDM | |
| and-not LVTN | |
| and HVI,hvcheck | |
| layer mvndic mvndiccopy | |
| grow 85 | |
| shrink 85 | |
| shrink 85 | |
| grow 85 | |
| or mvndiccopy | |
| labels CONT | |
| templayer pdiccopy CONT | |
| and LI | |
| and DIODE | |
| and DIFF | |
| and PSDM | |
| and-not HVI,hvcheck | |
| layer pdic pdiccopy | |
| grow 85 | |
| shrink 85 | |
| shrink 85 | |
| grow 85 | |
| or pdiccopy | |
| labels CONT | |
| templayer mvpdiccopy CONT | |
| and LI | |
| and DIODE | |
| and PSDM | |
| and HVI,hvcheck | |
| layer mvpdic mvpdiccopy | |
| grow 85 | |
| shrink 85 | |
| shrink 85 | |
| grow 85 | |
| or mvpdiccopy | |
| labels CONT | |
| templayer ndccopy CONT | |
| and ndifcheck | |
| layer ndc ndccopy | |
| grow 85 | |
| shrink 85 | |
| shrink 85 | |
| grow 85 | |
| or ndccopy | |
| labels CONT | |
| templayer mvndccopy CONT | |
| and mvndifcheck | |
| layer mvndc mvndccopy | |
| grow 85 | |
| shrink 85 | |
| shrink 85 | |
| grow 85 | |
| or mvndccopy | |
| labels CONT | |
| templayer pdccopy CONT | |
| and pdifcheck | |
| layer pdc pdccopy | |
| grow 85 | |
| shrink 85 | |
| shrink 85 | |
| grow 85 | |
| or pdccopy | |
| labels CONT | |
| templayer mvpdccopy CONT | |
| and mvpdifcheck | |
| layer mvpdc mvpdccopy | |
| grow 85 | |
| shrink 85 | |
| shrink 85 | |
| grow 85 | |
| or mvpdccopy | |
| labels CONT | |
| templayer pccopy CONT | |
| and polycheck | |
| layer pc pccopy | |
| grow 85 | |
| shrink 85 | |
| shrink 85 | |
| grow 85 | |
| or pccopy | |
| labels CONT | |
| templayer nsccopy CONT | |
| and nsubcheck | |
| layer nsc nsccopy | |
| grow 85 | |
| shrink 85 | |
| shrink 85 | |
| grow 85 | |
| or nsccopy | |
| labels CONT | |
| templayer mvnsccopy CONT | |
| and mvnsubcheck | |
| layer mvnsc mvnsccopy | |
| grow 85 | |
| shrink 85 | |
| shrink 85 | |
| grow 85 | |
| or mvnsccopy | |
| labels CONT | |
| templayer psccopy CONT | |
| and psubcheck | |
| layer psc psccopy | |
| grow 85 | |
| shrink 85 | |
| shrink 85 | |
| grow 85 | |
| or psccopy | |
| labels CONT | |
| templayer mvpsccopy CONT | |
| and mvpsubcheck | |
| layer mvpsc mvpsccopy | |
| grow 85 | |
| shrink 85 | |
| shrink 85 | |
| grow 85 | |
| or mvpsccopy | |
| labels CONT | |
| # Find contacts not covered in | |
| # metal and pull them into the | |
| # next layer up | |
| templayer barelicont CONT | |
| and LI | |
| and-not DIFF,TAP | |
| and-not POLY | |
| and-not DIODE | |
| and-not nsubcheck | |
| and-not psubcheck | |
| and-not mvnsubcheck | |
| and-not mvpsubcheck | |
| and-not CORELI | |
| copyup barelicont | |
| templayer barecont CONT | |
| and-not LI | |
| and-not nsubcheck | |
| and-not psubcheck | |
| and-not mvnsubcheck | |
| and-not mvpsubcheck | |
| and-not CORELI | |
| copyup barecont | |
| layer glass GLASS,PADTXT,PADPIN | |
| labels GLASS | |
| labels PADPIN port | |
| labels PADTXT text | |
| templayer boundary BOUND,STDCELL,PADCELL | |
| boundary | |
| layer comment LVSTEXT | |
| labels LVSTEXT text | |
| layer comment TTEXT | |
| labels TTEXT text | |
| # Do not infer generic "fillblock" from GDS input | |
| # layer fillblock FILLOBSM5 | |
| # and FILLOBSM1,FILLOBSM2,FILLOBSM3,FILLOBSM4 | |
| # Use the obstruction types for fill block on individual layers | |
| templayer obspoly FILLOBSPOLY,POLYBLOCK | |
| and-not POLY | |
| labels FILLOBSPOLY | |
| layer obsactive FILLOBSFOM,DIFFBLOCK | |
| and-not DIFF,TAP | |
| or obspoly | |
| labels FILLOBSFOM | |
| layer obsli LIBLOCK | |
| and-not LI | |
| labels LIBLOCK | |
| layer obsm1 FILLOBSM1,MET1BLOCK | |
| and-not MET1 | |
| labels FILLOBSM1,MET1BLOCK | |
| layer obsm2 FILLOBSM2,MET2BLOCK | |
| and-not MET2 | |
| labels FILLOBSM2,MET2BLOCK | |
| layer obsm3 FILLOBSM3,MET3BLOCK | |
| and-not MET3 | |
| labels FILLOBSM3,MET3BLOCK | |
| layer obsm4 FILLOBSM4,MET4BLOCK | |
| and-not MET4 | |
| labels FILLOBSM4,MET4BLOCK | |
| layer obsm5 FILLOBSM5,MET5BLOCK | |
| and-not MET5 | |
| labels FILLOBSM5,MET5BLOCK | |
| # MOS Varactor | |
| layer var POLY | |
| and TAP | |
| and NSDM | |
| and NWELL,nwelcheck | |
| and-not HVI,hvcheck | |
| and-not HVTP | |
| # NOTE: Else forms a varactor that is not in the vendor netlist. | |
| and-not COREID | |
| labels POLY | |
| layer varhvt POLY | |
| and TAP | |
| and NSDM | |
| and NWELL,nwelcheck | |
| and-not HVI,hvcheck | |
| and HVTP | |
| labels POLY | |
| layer mvvar POLY | |
| and TAP | |
| and NSDM | |
| and NWELL,nwelcheck | |
| and HVI,hvcheck | |
| labels POLY | |
| calma NWELL 64 20 | |
| calma DIFF 65 20 | |
| calma TAP 65 44 | |
| calma DNWELL 64 18 | |
| calma SUBCUT 81 53 | |
| calma PWRES 64 13 | |
| # LVTN | |
| calma LVTN 125 44 | |
| # HVTR | |
| calma HVTR 18 20 | |
| # HVTP | |
| calma HVTP 78 44 | |
| # SONOS (TUNM) | |
| calma SONOS 80 20 | |
| # NSDM (NPLUS) | |
| calma NSDM 93 44 | |
| # PSDM (PPLUS) | |
| calma PSDM 94 20 | |
| # HVI (THKOX) | |
| calma HVI 75 20 | |
| # EDID | |
| calma EDID 81 57 | |
| # NPC | |
| calma NPC 95 20 | |
| # P+ POLY MASK | |
| calma RPM 86 20 | |
| calma URPM 79 20 | |
| calma LDNTM 11 44 | |
| calma HVNTM 125 20 | |
| # Poly resistor ID mark | |
| calma POLYRES 66 13 | |
| # Diffusion resistor ID mark | |
| calma DIFFRES 65 13 | |
| calma POLY 66 20 | |
| calma POLYMOD 66 83 | |
| # 3.3V native FET ID mark | |
| calma LVID 81 60 | |
| # Diode ID mark | |
| calma DIODE 81 23 | |
| # Bipolar NPN mark | |
| calma NPNID 82 20 | |
| # Bipolar PNP mark | |
| calma PNPID 82 44 | |
| # Capacitor ID | |
| calma CAPID 82 64 | |
| # Core area ID mark | |
| calma COREID 81 2 | |
| # Photodiode ID mark | |
| calma PHOTO 81 81 | |
| # Standard cell ID mark | |
| calma STDCELL 81 4 | |
| # Padframe cell ID mark | |
| calma PADCELL 81 3 | |
| # Seal ring ID mark | |
| calma SEALID 81 1 | |
| # Low tap density ID mark | |
| calma LOWTAPDENSITY 81 14 | |
| # ESD area ID | |
| calma ESDID 81 19 | |
| # Various unused layers | |
| calma OUTLINE 236 0 | |
| calma POLYCUT 66 14 | |
| calma POLYGATE 66 9 | |
| calma DIFFCUT 65 14 | |
| calma HVNWELLID 81 63 | |
| calma PADDIFFID 81 6 | |
| calma PADMETALID 81 8 | |
| calma PADCENTERID 81 20 | |
| # LICON | |
| calma CONT 66 44 | |
| calma LI 67 20 | |
| calma MCON 67 44 | |
| calma MET1 68 20 | |
| calma VIA1 68 44 | |
| #ifdef RERAM | |
| #undef RERAM | |
| calma RERAM 201 20 | |
| #define RERAM | |
| #endif (RERAM) | |
| calma MET2 69 20 | |
| calma VIA2 69 44 | |
| calma MET3 70 20 | |
| #ifdef METAL5 | |
| calma VIA3 70 44 | |
| calma MET4 71 20 | |
| calma VIA4 71 44 | |
| calma MET5 72 20 | |
| #endif | |
| #ifdef REDISTRIBUTION | |
| calma RDL 74 20 | |
| #endif | |
| calma GLASS 76 20 | |
| calma SUBTXT 64 59 | |
| calma PADTXT 76 5 | |
| calma DIFFTXT 65 6 | |
| calma TAPTXT 65 5 | |
| calma WELLTXT 64 5 | |
| calma LITXT 67 5 | |
| calma POLYTXT 66 5 | |
| calma MET1TXT 68 5 | |
| calma MET2TXT 69 5 | |
| calma MET3TXT 70 5 | |
| #ifdef METAL5 | |
| calma MET4TXT 71 5 | |
| calma MET5TXT 72 5 | |
| #endif | |
| #ifdef REDISTRIBUTION | |
| calma RDLTXT 74 5 | |
| #endif | |
| calma LIRES 67 13 | |
| calma MET1RES 68 13 | |
| calma MET2RES 69 13 | |
| calma MET3RES 70 13 | |
| #ifdef METAL5 | |
| calma MET4RES 71 13 | |
| calma MET5RES 72 13 | |
| #endif | |
| calma FOMFILL 23 28 | |
| calma POLYFILL 28 28 | |
| calma LIFILL 56 28 | |
| calma MET1FILL 36 28 | |
| calma MET2FILL 41 28 | |
| calma MET3FILL 34 28 | |
| #ifdef METAL5 | |
| calma MET4FILL 51 28 | |
| calma MET5FILL 59 28 | |
| #endif | |
| calma POLYSHORT 66 15 | |
| calma LISHORT 67 15 | |
| calma MET1SHORT 68 15 | |
| calma MET2SHORT 69 15 | |
| calma MET3SHORT 70 15 | |
| #ifdef METAL5 | |
| calma MET4SHORT 71 15 | |
| calma MET5SHORT 72 15 | |
| #endif | |
| calma SUBPIN 122 16 | |
| calma PADPIN 76 16 | |
| calma DIFFPIN 65 16 | |
| calma POLYPIN 66 16 | |
| calma WELLPIN 64 16 | |
| calma LIPIN 67 16 | |
| calma MET1PIN 68 16 | |
| calma MET2PIN 69 16 | |
| calma MET3PIN 70 16 | |
| #ifdef METAL5 | |
| calma MET4PIN 71 16 | |
| calma MET5PIN 72 16 | |
| #endif | |
| #ifdef REDISTRIBUTION | |
| calma RDLPIN 74 16 | |
| #endif | |
| calma BOUND 235 4 | |
| calma LVSTEXT 83 44 | |
| #ifdef (MIM) | |
| calma CAPM 89 44 | |
| calma CAPM2 97 44 | |
| #endif (MIM) | |
| # Obstruction (fill block) layers | |
| calma FILLOBSFOM 22 24 | |
| calma FILLOBSPOLY 33 24 | |
| calma FILLOBSM1 62 24 | |
| calma FILLOBSM2 105 52 | |
| calma FILLOBSM3 107 24 | |
| #ifdef METAL5 | |
| calma FILLOBSM4 112 4 | |
| calma FILLOBSM5 117 4 | |
| #endif | |
| # Alternate layer purpose used for fill | |
| # which uses the regular layer numbers. | |
| calma DIFFFILLALT 65 99 | |
| calma POLYFILLALT 66 99 | |
| calma LIFILLALT 67 99 | |
| calma MET1FILLALT 68 99 | |
| calma MET2FILLALT 69 99 | |
| calma MET3FILLALT 70 99 | |
| #ifdef METAL5 | |
| calma MET4FILLALT 71 99 | |
| calma MET5FILLALT 72 99 | |
| #endif | |
| # Alternate layer purpose used for obstruction (fill block) | |
| calma DIFFBLOCK 65 98 | |
| calma POLYBLOCK 66 98 | |
| calma LIBLOCK 67 98 | |
| calma MET1BLOCK 68 98 | |
| calma MET2BLOCK 69 98 | |
| calma MET3BLOCK 70 98 | |
| #ifdef METAL5 | |
| calma MET4BLOCK 71 98 | |
| calma MET5BLOCK 72 98 | |
| #endif | |
| #----------------------------------------------------------------------- | |
| style rdlimport | |
| # This style is for reading shapes generated with the RDL layers | |
| scalefactor 10 nanometers | |
| gridlimit 5 | |
| options ignore-unknown-layer-labels no-reconnect-labels | |
| layer mrdl RDL | |
| layer mrdlc RDLC | |
| calma RDL 10 0 | |
| calma RDLC 20 0 | |
| end | |
| #----------------------------------------------------- | |
| # Digital flow maze router cost parameters | |
| #----------------------------------------------------- | |
| mzrouter | |
| end | |
| #----------------------------------------------------- | |
| # Vendor DRC rules | |
| #----------------------------------------------------- | |
| drc | |
| style drc variants (fast),(full),(routing) | |
| scalefactor 10 | |
| cifstyle drc | |
| variants (fast),(full) | |
| #----------------------------- | |
| # DNWELL | |
| #----------------------------- | |
| width dnwell 3000 "Deep N-well width < %d (dnwell.2)" | |
| spacing dnwell dnwell 6300 touching_ok "Deep N-well spacing < %d (dnwell.3)" | |
| spacing allnwell dnwell 4500 surround_ok \ | |
| "Deep N-well spacing to N-well < %d (nwell.7)" | |
| variants (full) | |
| cifmaxwidth nwell_missing 0 bend_illegal \ | |
| "N-well overlap of Deep N-well < 0.4um outside, 1.03um inside (nwell.5a, 7)" | |
| cifmaxwidth dnwell_missing 0 bend_illegal \ | |
| "SONOS nFET must be in Deep N-well (tunm.6a)" | |
| cifmaxwidth pdiff_crosses_dnwell 0 bend_illegal \ | |
| "P+ diff cannot straddle Deep N-well (dnwell.5)" | |
| variants (fast),(full) | |
| width photo 3000 "Photodiode width < %d (photo.2)" | |
| spacing photo photo 5000 touching_ok "Photodiode spacing < %d (photo.3)" | |
| spacing photo dnwell 5300 touching_illegal \ | |
| "Photodiode spacing to deep nwell < %d (photo.4)" | |
| #----------------------------- | |
| # NWELL | |
| #----------------------------- | |
| width allnwell 840 "N-well width < %d (nwell.1)" | |
| spacing allnwell allnwell 1270 touching_ok "N-well spacing < %d (nwell.2a)" | |
| variants (full) | |
| cifmaxwidth nwell_missing_tap 0 bend_illegal \ | |
| "All nwells must contain metal-connected N+ taps (nwell.4)" | |
| cifspacing mvnwell lvnwell 2000 touching_illegal \ | |
| "Spacing of HV nwell to LV nwell < 2.0um (nwell.8)" | |
| cifspacing mvnwell mvnwell 2000 touching_ok \ | |
| "Spacing of HV nwell to HV nwell < 2.0um (nwell.8)" | |
| cifmaxwidth lvdiff_in_mvnwell 0 bend_illegal \ | |
| "All HV nwell can contain only HV diffusion (diff/tap.21)" | |
| variants (fast),(full) | |
| #----------------------------- | |
| # DIFF | |
| #----------------------------- | |
| width *ndiff,nfet,scnfet,scnfetlvt,npd,npass,*nsd,*ndiode,ndiffres,*pdiff,pfet,scpfet,scpfethvt,ppu,*psd,*pdiode,pdiffres,fomfill \ | |
| 150 "Diffusion width < %d (diff/tap.1)" | |
| width *mvndiff,mvnfet,mvnfetesd,mvnnfet,nnfet,*mvndiode,*nndiode,mvndiffres,*mvpdiff,mvpfet,mvpfetesd,*mvpdiode,mvpdiffres 290 \ | |
| "MV Diffusion width < %d (diff/tap.14)" | |
| width *mvnsd,*mvpsd 150 "MV Tap width < %d (diff/tap.1)" | |
| extend *mvpsd *mvndiff 700 "MV Butting tap length < %d (diff/tap.16)" | |
| extend *mvnsd *mvpdiff 700 "MV Butting tap length < %d (diff/tap.16)" | |
| extend *psd *ndiff 290 "Butting tap length < %d (diff/tap.4)" | |
| extend *nsd *pdiff 290 "Butting tap length < %d (diff/tap.4)" | |
| width mvpdiffres 150 "MV P-Diffusion resistor width < %d (diff/tap.14a)" | |
| spacing alldifflv,var,varhvt,corenvar,corepvar,fomfill \ | |
| alldifflv,var,varhvt,corenvar,corepvar,fomfill 270 touching_ok \ | |
| "Diffusion spacing < %d (diff/tap.3)" | |
| spacing alldifflv,var,varhvt alldiffmv,mvvar 270 touching_illegal \ | |
| "LV to MV Diffusion spacing < %d (diff/tap.3)" | |
| spacing alldiffmvnontap,mvvar alldiffmvnontap,mvvar 300 touching_ok \ | |
| "MV Diffusion spacing < %d (diff/tap.15a)" | |
| spacing alldiffmv *mvnsd,*mvpsd 270 touching_ok \ | |
| "MV Diffusion to MV tap spacing < %d (diff/tap.3)" | |
| spacing *mvndiff,mvnfet,mvnfetesd,mvnnfet,nnfet,*mvndiode,*nndiode,mvndiffres,mvvar \ | |
| *mvpsd 370 touching_ok \ | |
| "MV P-Diffusion to MV N-tap spacing < %d (diff/tap.15b)" | |
| spacing *mvnsd,*mvpdiff,mvpfet,mvpfetesd,mvvar,*mvpdiode *mvpsd,*psd 760 \ | |
| touching_illegal \ | |
| "MV Diffusion in N-well to P-tap spacing < %d (diff/tap.20 + diff/tap.17,19)" | |
| spacing *ndiff,*ndiode,nfet allnwell 340 touching_illegal \ | |
| "N-Diffusion spacing to N-well < %d (diff/tap.9)" | |
| spacing *mvndiff,*mvndiode,mvnfet,mvnnfet,nnfet allnwell 430 touching_illegal \ | |
| "N-Diffusion spacing to N-well < %d (diff/tap.24)" | |
| spacing *psd allnwell 130 touching_illegal \ | |
| "P-tap spacing to N-well < %d (diff/tap.11)" | |
| spacing *mvpsd allnwell 130 touching_illegal \ | |
| "P-tap spacing to N-well < %d (diff/tap.11)" | |
| surround *nsd allnwell 180 absence_illegal \ | |
| "N-well overlap of N-tap < %d (diff/tap.10)" | |
| surround *mvnsd allnwell 330 absence_illegal \ | |
| "N-well overlap of MV N-tap < %d (diff/tap.19)" | |
| surround *pdiff,*pdiode,pfet,scpfet,ppu allnwell 180 absence_illegal \ | |
| "N-well overlap of P-Diffusion < %d (diff/tap.8)" | |
| surround *mvpdiff,*mvpdiode,mvpfet,mvpfetesd allnwell 330 absence_illegal \ | |
| "N-well overlap of P-Diffusion < %d (diff/tap.17)" | |
| surround mvvar allnwell 560 absence_illegal \ | |
| "N-well overlap of MV varactor < %d (lvtn.10 + lvtn.4b)" | |
| spacing *mvndiode *mvndiode 1070 touching_ok \ | |
| "MV N-diode spacing < %d (hvntm.2 + 2 * hvntm.3)" | |
| variants (full) | |
| cifspacing allmvdiffnowell lvnwell 825 touching_illegal \ | |
| "MV diffusion to LV nwell spacing < %d (hvi.5 + nsd/psd.5)" | |
| cifspacing drawn_hvi drawn_hvi 700 touching_ok \ | |
| "HVI to HVI spacing < %d (hvi.5)" | |
| cifmaxwidth hvi_to_lvnwell 0 bend_illegal \ | |
| "HVI to LV nwell spacing < 0.7um (hvi.5)" | |
| cifmaxwidth difftap_near_mvnwell 0 bend_illegal \ | |
| "Spacing of N-Diffusion or P-tap to MV nwell < 0.43um (diff/tap.18,20)" | |
| variants (fast),(full) | |
| spacing allnfets allpactivenonfet 270 touching_illegal \ | |
| "nFET cannot abut P-diffusion (diff/tap.3)" | |
| spacing allpfets allnactivenonfet 270 touching_illegal \ | |
| "pFET cannot abut N-diffusion (diff/tap.3)" | |
| # Butting junction rules | |
| edge4way (*psd)/a ~(*ndiff,*psd)/a 125 ~(*ndiff)/a (*ndiff)/a 125 \ | |
| "N-Diffusion to P-tap spacing < %d across butted junction (psd.5b)" | |
| edge4way (*ndiff)/a ~(*ndiff,*psd)/a 125 ~(*psd)/a (*psd)/a 125 \ | |
| "N-Diffusion to P-tap spacing < %d across butted junction (psd.5a)" | |
| edge4way (*nsd)/a ~(*pdiff,*nsd)/a 125 ~(*pdiff)/a (*pdiff)/a 125 \ | |
| "P-Diffusion to N-tap spacing < %d across butted junction (nsd.5b)" | |
| edge4way (*pdiff)/a ~(*pdiff,*nsd)/a 125 ~(*nsd)/a (*nsd)/a 125 \ | |
| "P-Diffusion to N-tap spacing < %d across butted junction (nsd.5a)" | |
| edge4way (*mvpsd)/a ~(*mvndiff,*mvpsd)/a 125 ~(*mvndiff)/a (*mvndiff)/a 125 \ | |
| "MV N-Diffusion to MV P-tap spacing < %d across butted junction (psd.5b)" | |
| edge4way (*mvndiff)/a ~(*mvndiff,*mvpsd)/a 125 ~(*mvpsd)/a (*mvpsd)/a 125 \ | |
| "MV N-Diffusion to MV P-tap spacing < %d across butted junction (psd.5a)" | |
| edge4way (*mvnsd)/a ~(*mvpdiff,*mvnsd)/a 125 ~(*mvpdiff)/a (*mvpdiff)/a 125 \ | |
| "MV P-Diffusion to MV N-tap spacing < %d across butted junction (nsd.5b)" | |
| edge4way (*mvpdiff)/a ~(*mvpdiff,*mvnsd)/a 125 ~(*mvnsd)/a (*mvnsd)/a 125 \ | |
| "MV P-Diffusion to MV N-tap spacing < %d across butted junction (nsd.5a)" | |
| # Sandwiched butting junction restrictions | |
| edge4way (*pdiff)/a (*nsd)/a 400 ~(*pdiff)/a 0 0 "NSDM width < %d (diff/tap.5)" | |
| edge4way (*ndiff)/a (*psd)/a 400 ~(*ndiff)/a 0 0 "PSDM width < %d (diff/tap.5)" | |
| # Extended drain rules | |
| edge4way space/a ed/a 5000 ~(space)/a 0 0 "LDNFET/LDPFET width < %d (denmos/depmos.2)" | |
| edge4way (*mvndiff)/a mvnfet 1055 ~(ed)/a 0 0 "LDNFET length < %d (denmos.1)" | |
| edge4way (*mvnsd)/a ed/a 2510 ~(*mvndiff)/a 0 0 \ | |
| "LDNFET drain to source < %d (denmos.6 + denmos.3)" | |
| edge4way (*mvpdiff)/a mvpfet 1050 ~(ed)/a 0 0 "LDPFET length < %d (depmos.1)" | |
| edge4way (*mvpsd)/a ed/a 2110 ~(*mvpdiff)/a 0 0 \ | |
| "LDPFET drain to source < %d (depmos.6 + depmos.3)" | |
| area *nsd,*mvnsd 70110 150 "N-tap minimum area < 0.07011um^2 (nsd.10b)" | |
| area *psd,*mvpsd 70110 150 "P-tap minimum area < 0.07011um^2 (psd.10b)" | |
| angles allactive 90 "Only 90 degree angles permitted on diff and tap (x.2)" | |
| variants (full) | |
| cifmaxwidth tap_missing_licon 0 bend_illegal "All taps must be contacted (licon.16)" | |
| # Latchup rules | |
| cifmaxwidth ptap_missing 0 bend_illegal \ | |
| "N-diff distance to P-tap must be < 15.0um (LU.2)" | |
| cifmaxwidth dptap_missing 0 bend_illegal \ | |
| "N-diff distance to P-tap in deep nwell.must be < 15.0um (LU.2.1)" | |
| cifmaxwidth ntap_missing 0 bend_illegal \ | |
| "P-diff distance to N-tap must be < 15.0um (LU.3)" | |
| variants (fast),(full) | |
| #----------------------------- | |
| # POLY | |
| #----------------------------- | |
| width allpoly,polyfill 150 "poly width < %d (poly.1a)" | |
| spacing allpoly,polyfill allpoly,polyfill 210 touching_ok "poly spacing < %d (poly.2)" | |
| spacing allpolynonfet,polyfill \ | |
| *ndiff,*mvndiff,*ndiode,*nndiode,ndiffres,*ndiodelvt,*pdiff,*mvpdiff,*pdiode,pdiffres,*pdiodelvt,*pdiodehvt \ | |
| 75 corner_ok allfets \ | |
| "poly spacing to Diffusion < %d (poly.4)" | |
| spacing npres *nsd 480 touching_illegal \ | |
| "poly resistor spacing to N-tap < %d (poly.9)" | |
| overhang *ndiff,rndiff nfet,scnfet,scnfetlvt,npd,npass,nsonos 250 "N-Diffusion overhang of nFET < %d (poly.7)" | |
| overhang *mvndiff,mvrndiff mvnfet,mvnnfet,nnfet 250 \ | |
| "N-Diffusion overhang of nFET < %d (poly.7)" | |
| overhang *pdiff,rpdiff pfet,scpfet,ppu 250 "P-Diffusion overhang of pmos < %d (poly.7)" | |
| overhang *mvpdiff,mvrpdiff mvpfet,mvpfetesd 250 "P-Diffusion overhang of pmos < %d (poly.7)" | |
| overhang *poly allfetsstd,allfetsspecial 130 "poly overhang of transistor < %d (poly.8)" | |
| overhang *poly allfetscore 110 "poly overhang of SRAM core transistor < %d (poly.8)" | |
| rect_only allfets "No bends in transistors (poly.11)" | |
| extend xpc/a xhrpoly,uhrpoly 2160 \ | |
| "poly contact extends poly resistor by < %d (licon.1c + li.5)" | |
| spacing xhrpoly,uhrpoly,xpc xhrpoly,uhrpoly,xpc 210 touching_illegal \ | |
| "Distance between precision resistors < %d (poly.2)" | |
| spacing xhrpoly,uhrpoly,xpc *poly,allfets,mrp1,rmp 400 touching_illegal \ | |
| "Distance from precision resistor to poly < %d (rpm.7 + rpm.3)" | |
| variants (fast) | |
| spacing xhrpoly,uhrpoly,xpc allndifflv,allndiffmv 525 touching_illegal \ | |
| "Distance from precision resistor to N+ diffusion < %d (rpm.3 + rpm.6 + nsd.5a)" | |
| spacing xhrpoly,uhrpoly,xpc *poly 400 touching_illegal \ | |
| "Distance from precision resistor to unrelated poly < %d (rpm.3 + rpm.7)" | |
| spacing xhrpoly,uhrpoly,xpc allndiffmvnontap 585 touching_illegal \ | |
| "Distance from precision resistor to MV N+ device < %d (rpm.3 + rpm.9 + hvntm.3)" | |
| # Minimum width requirement means actual spacing from res to ndiff has to be | |
| # constructed from mask rules. These supercede the simpler checks. | |
| variants (full) | |
| cifmaxwidth rpm_nsd_check 0 bend_illegal \ | |
| "Distance from precision resistor to N+ diffusion < 0.525um (rpm.3 + rpm.6 + nsd.5a)" | |
| cifmaxwidth rpm_poly_check 0 bend_illegal \ | |
| "Distance from precision resistor to unrelated poly < 0.4um (rpm.3 + rpm.7)" | |
| cifmaxwidth rpm_hvntm_check 0 bend_illegal \ | |
| "Distance from precision resistor to MV N+ device < 0.585um (rpm.3 + rpm.9 + hvntm.3)" | |
| variants (fast),(full) | |
| angles allpoly,polyfill 90 "Only 90 degree angles permitted on poly (x.2)" | |
| #-------------------------------------------------------------------- | |
| # HVTP | |
| #-------------------------------------------------------------------- | |
| spacing pfethvt,pdiodehvt,varactorhvt pfet,ppu,scpfet,mvpfet,mvpfetesd,pfetlvt,pfetmvt \ | |
| 360 touching_illegal \ | |
| "Min. spacing between pFET and HVTP < %d (hvtp.4)" | |
| spacing pfethvt,pdiodehvt,varactorhvt varactor 360 touching_illegal \ | |
| "Min. spacing between varactor and HVTP < %d (hvtp.4 + varac.3)" | |
| #-------------------------------------------------------------------- | |
| # LVTN | |
| #-------------------------------------------------------------------- | |
| spacing pfetlvt,nfetlvt,pdiodelvt,ndiodelvt \ | |
| allfetsnolvt 360 touching_illegal \ | |
| "Min. spacing between FET and LVTN < %d (lvtn.3a)" | |
| spacing pfetlvt,nfetlvt,pdiodelvt,ndiodelvt scpfethvt,pfethvt,pdiodehvt,varactorhvt \ | |
| 740 touching_illegal \ | |
| "Min. spacing between LVTN and HVTP < %d (lvtn.9)" | |
| # Spacing across S/D direction requires edge rule | |
| edge4way allfetsnolvt allactivenonfet 415 \ | |
| ~(pfetlvt,nfetlvt,pdiodelvt,ndiodelvt)/a allfetsnolvt 415 \ | |
| "Min. spacing between FET and LVTN in S/D direction < %d (lvtn.3b)" | |
| #-------------------------------------------------------------------- | |
| # HVNTM | |
| #-------------------------------------------------------------------- | |
| variants (full) | |
| # This requires extra spacing of hvndiff if a ptap is in between | |
| cifwidth hvntm_generate 700 "Width of HVNTM < %d (hvntm.1)" | |
| cifspacing hvntm_generate hvntm_generate 700 touching_ok \ | |
| "HVNTM spacing < %d (hvntm.2)" | |
| variants * | |
| #-------------------------------------------------------------------- | |
| # RPM, URPM | |
| #-------------------------------------------------------------------- | |
| variants (full) | |
| # This requires extra spacing of poly resistors if a ptap is in between | |
| cifwidth rpm_generate 1270 "Width of RPM/URPM < %d (rpm.1)" | |
| cifspacing rpm_generate rpm_generate 840 touching_ok \ | |
| "RPM spacing < %d (rpm.2)" | |
| variants * | |
| #-------------------------------------------------------------------- | |
| # NPC (Nitride poly Cut) | |
| #-------------------------------------------------------------------- | |
| # Layer NPC is defined automatically around poly contacts (grow 0.1um) | |
| #-------------------------------------------------------------------- | |
| # CONT (LICON, contact between poly/diff and LI) | |
| #-------------------------------------------------------------------- | |
| width ndc/li 170 "N-diffusion contact width < %d (licon.1)" | |
| width nsc/li 170 "N-tap contact width < %d (licon.1)" | |
| width pdc/li 170 "P-diffusion contact width < %d (licon.1)" | |
| width psc/li 170 "P-tap contact width < %d (licon.1)" | |
| width ndic/li 170 "N-diode contact width < %d (licon.1)" | |
| width pdic/li 170 "P-diode contact width < %d (licon.1)" | |
| width pc/li 170 "poly contact width < %d (licon.1)" | |
| width xpc/li 350 "poly resistor contact width < %d (licon.1b + 2 * li.5)" | |
| area xpc/li 700000 350 "poly resistor contact length < 2.0um (licon.1c)" | |
| area allli,*obsli 56100 170 "Local interconnect minimum area < %a (li.6)" | |
| width mvndc/li 170 "N-diffusion contact width < %d (licon.1)" | |
| width mvnsc/li 170 "N-tap contact width < %d (licon.1)" | |
| width mvpdc/li 170 "P-diffusion contact width < %d (licon.1)" | |
| width mvpsc/li 170 "P-tap contact width < %d (licon.1)" | |
| width mvndic/li 170 "N-diode contact width < %d (licon.1)" | |
| width mvpdic/li 170 "P-diode contact width < %d (licon.1)" | |
| spacing allpdiffcont allndiffcont 170 touching_illegal \ | |
| "Diffusion contact spacing < %d (licon.2)" | |
| spacing allndiffcont allndiffcont 170 touching_ok \ | |
| "Diffusion contact spacing < %d (licon.2)" | |
| spacing allpdiffcont allpdiffcont 170 touching_ok \ | |
| "Diffusion contact spacing < %d (licon.2)" | |
| spacing pc pc 170 touching_ok "Poly1 contact spacing < %d (licon.2)" | |
| spacing pc alldiff 190 touching_illegal \ | |
| "poly contact spacing to diffusion < %d (licon.14)" | |
| spacing pc allpdifflv,allpdiffmv 235 touching_illegal \ | |
| "poly contact spacing to P-diffusion < %d (licon.9 + psdm.5a)" | |
| spacing ndc,pdc nfet,nfetlvt,pfet,pfethvt,pfetlvt,pfetmvt 55 touching_illegal \ | |
| "Diffusion contact to gate < %d (licon.11)" | |
| spacing ndc,pdc scnfet,scpfet,scnfetlvt,scpfethvt 50 touching_illegal \ | |
| "Diffusion contact to standard cell gate < %d (licon.11)" | |
| spacing ndc,pdc npd,npass,ppu 40 touching_illegal \ | |
| "Diffusion contact to SRAM gate < %d (licon.11)" | |
| spacing ndc,pdc nsonos 75 touching_illegal \ | |
| "Diffusion contact to SONOS gate < %d (licon.11)" | |
| spacing mvndc,mvpdc mvnfet,mvnfetesd,mvnnfet,nnfet,mvpfet,mvpfetesd 55 touching_illegal \ | |
| "Diffusion contact to gate < %d (licon.11)" | |
| spacing nsc varactor,varhvt 250 touching_illegal \ | |
| "Diffusion contact to varactor gate < %d (licon.10)" | |
| spacing mvnsc mvvar 250 touching_illegal \ | |
| "Diffusion contact to varactor gate < %d (licon.10)" | |
| surround ndc/a *ndiff,nfet,scnfet,scnfetlvt,npd,npass,nfetlvt,rnd 40 absence_illegal \ | |
| "N-diffusion overlap of N-diffusion contact < %d (licon.5a)" | |
| surround pdc/a *pdiff,pfet,scpfet,scpfethvt,ppu,pfethvt,pfetmvt,pfetlvt,rpd \ | |
| 40 absence_illegal \ | |
| "P-diffusion overlap of P-diffusion contact < %d (licon.5a)" | |
| surround ndic/a *ndi 40 absence_illegal \ | |
| "N-diode overlap of N-diode contact < %d (licon.5a)" | |
| surround pdic/a *pdi 40 absence_illegal \ | |
| "P-diode overlap of N-diode contact < %d (licon.5a)" | |
| spacing psc/a allnactivenontap 60 touching_illegal \ | |
| "Min. space between P-tap contact and butting N diffusion < %d (licon.5b)" | |
| spacing nsc/a allpactivenontap 60 touching_illegal \ | |
| "Min. space between N-tap contact and butting P diffusion < %d (licon.5b)" | |
| surround ndc/a *ndiff,nfet,scnfet,scnfetlvt,npd,npass,nfetlvt,rnd 60 directional \ | |
| "N-diffusion overlap of N-diffusion contact < %d in one direction (licon.5c)" | |
| surround pdc/a *pdiff,pfet,scpfet,scpfethvt,ppu,pfethvt,pfetmvt,pfetlvt,rpd \ | |
| 60 directional \ | |
| "P-diffusion overlap of P-diffusion contact < %d in one direction (licon.5c)" | |
| surround ndic/a *ndi 60 directional \ | |
| "N-diode overlap of N-diode contact < %d in one direction (licon.5c)" | |
| surround pdic/a *pdi 60 directional \ | |
| "P-diode overlap of N-diode contact < %d in one direction (licon.5c)" | |
| surround nsc/a *nsd,pdiff,corenvar 120 directional \ | |
| "N-tap overlap of N-tap contact < %d in one direction (licon.7)" | |
| surround psc/a *psd,ndiff,corepvar 120 directional \ | |
| "P-tap overlap of P-tap contact < %d in one direction (licon.7)" | |
| surround mvndc/a *mvndiff,mvnfet,mvnfetesd,mvrnd 40 absence_illegal \ | |
| "N-diffusion overlap of N-diffusion contact < %d (licon.5a)" | |
| surround mvpdc/a *mvpdiff,mvpfet,mvpfetesd,mvrpd 40 absence_illegal \ | |
| "P-diffusion overlap of P-diffusion contact < %d (licon.5a)" | |
| surround mvndic/a *mvndi 40 absence_illegal \ | |
| "N-diode overlap of N-diode contact < %d (licon.5a)" | |
| surround mvpdic/a *mvpdi 40 absence_illegal \ | |
| "P-diode overlap of N-diode contact < %d (licon.5a)" | |
| spacing mvpsc/a allndiffmvnontap 60 touching_illegal \ | |
| "Min. space between P-tap contact and butting N diffusion < %d (licon.5b)" | |
| spacing mvnsc/a allpdiffmvnontap 60 touching_illegal \ | |
| "Min. space between N-tap contact and butting P diffusion < %d (licon.5b)" | |
| surround mvndc/a *mvndiff,mvnfet,mvnfetesd,mvrnd 60 directional \ | |
| "N-diffusion overlap of N-diffusion contact < %d in one direction (licon.5c)" | |
| surround mvpdc/a *mvpdiff,mvpfet,mvpfetesd,mvrpd 60 directional \ | |
| "P-diffusion overlap of P-diffusion contact < %d in one direction (licon.5c)" | |
| surround mvndic/a *mvndi 60 directional \ | |
| "N-diode overlap of N-diode contact < %d in one direction (licon.5c)" | |
| surround mvpdic/a *mvpdi 60 directional \ | |
| "P-diode overlap of N-diode contact < %d in one direction (licon.5c)" | |
| surround mvnsc/a *mvnsd 120 directional \ | |
| "N-tap overlap of N-tap contact < %d in one direction (licon.7)" | |
| surround mvpsc/a *mvpsd 120 directional \ | |
| "P-tap overlap of P-tap contact < %d in one direction (licon.7)" | |
| surround pc/a *poly,mrp1,xhrpoly,uhrpoly 50 absence_illegal \ | |
| "poly overlap of poly contact < %d (licon.8)" | |
| surround pc/a *poly,mrp1,xhrpoly,uhrpoly 80 directional \ | |
| "poly overlap of poly contact < %d in one direction (licon.8a)" | |
| exact_overlap (allcont)/a | |
| #------------------------------------------------------------- | |
| # LI - Local interconnect layer | |
| #------------------------------------------------------------- | |
| variants * | |
| width *li 170 "Local interconnect width < %d (li.1)" | |
| width rli 290 "Local interconnect width < %d (li.7)" | |
| spacing *locali,rli *locali,rli,*obsli 170 touching_ok \ | |
| "Local interconnect spacing < %d (li.3)" | |
| # Local interconnect in core (SRAM) cells has more relaxed rules. There are | |
| # no special layers for the contacts in core cells, so they must be included | |
| # in the rule. | |
| width coreli,pc,ndc,nsc,pdc,psc,allli,*obsli 140 \ | |
| "Core local interconnect width < %d (li.c1)" | |
| spacing coreli,pc,ndc,nsc,pdc,psc,mcon allli,*obsli 140 touching_ok \ | |
| "Core local interconnect spacing < %d (li.c2)" | |
| surround pc/li *li,coreli 80 directional \ | |
| "Local interconnect overlap of poly contact < %d in one direction (li.5)" | |
| surround ndc/li,nsc/li,pdc/li,psc/li,ndic/li,pdic/li,mvndc/li,mvnsc/li,mvpdc/li,mvpsc/li,mvndic/li,mvpdic/li \ | |
| *li,rli,coreli 80 directional \ | |
| "Local interconnect overlap of diffusion contact < %d in one direction (li.5)" | |
| area allli,*obsli,coreli 56100 170 "Local interconnect minimum area < %a (li.6)" | |
| angles *locali,rli 90 "Only 90 degree angles permitted on local interconnect (x.2)" | |
| angles coreli 45 \ | |
| "Only 45 degree angles permitted on local interconnect in SRAM cell (x.2)" | |
| #------------------------------------------------------------- | |
| # MCON - Contact between local interconnect and metal1 | |
| #------------------------------------------------------------- | |
| width mcon/m1 170 "mcon.width < %d (mcon.1)" | |
| spacing mcon/m1 mcon/m1,obsmcon/m1 190 touching_ok "mcon.spacing < %d (mcon.2)" | |
| exact_overlap mcon/li | |
| #------------------------------------------------------------- | |
| # METAL1 - | |
| #------------------------------------------------------------- | |
| width *m1,rm1 140 "Metal1 width < %d (met1.1)" | |
| spacing allm1,m1fill allm1,*obsm1,m1fill 140 touching_ok "Metal1 spacing < %d (met1.2)" | |
| area allm1,*obsm1 83000 140 "Metal1 minimum area < %a (met1.6)" | |
| surround mcon/m1 *met1 30 absence_illegal \ | |
| "Metal1 overlap of local interconnect contact < %d (met1.4)" | |
| surround mcon/m1 *met1 60 directional \ | |
| "Metal1 overlap of local interconnect contact < %d in one direction (met1.5)" | |
| angles allm1,m1fill 45 "Only 45 and 90 degree angles permitted on metal1 (x.3a)" | |
| variants (fast),(full) | |
| widespacing allm1 3005 allm1,*obsm1,m1fill 280 touching_ok \ | |
| "Metal1 > 3um spacing to unrelated m1 < %d (met1.3b)" | |
| widespacing *obsm1 3005 allm1 280 touching_ok \ | |
| "Metal1 > 3um spacing to unrelated m1 < %d (met1.3b)" | |
| variants (full) | |
| cifmaxwidth m1_hole_empty 0 bend_illegal \ | |
| "Min area of metal1 holes > 0.14um^2 (met1.7)" | |
| cifspacing m1_large_halo m1_large_halo 280 touching_ok \ | |
| "Spacing of metal1 features attached to and within 0.28um of large metal1 < %d (met1.3a)" | |
| variants * | |
| #-------------------------------------------------- | |
| # VIA1 | |
| #-------------------------------------------------- | |
| width v1/m1 260 "Via1 width < %d (via.1a + 2 * via.4a)" | |
| spacing v1 v1 60 touching_ok "Via1 spacing < %d (via.2 - 2 * via.4a)" | |
| surround v1/m1 *m1,rm1 30 directional \ | |
| "Metal1 overlap of Via1 < %d in one direction (via.5a - via.4a)" | |
| surround v1/m2 *m2,rm2 30 directional \ | |
| "Metal2 overlap of Via1 < %d in one direction (met2.5 - met2.4)" | |
| exact_overlap v1/m1 | |
| #ifdef RERAM | |
| #-------------------------------------------------- | |
| # ReRAM | |
| #-------------------------------------------------- | |
| width reram 260 "ReRAM width < %d (rr1.1)" | |
| spacing reram reram 55 touching_illegal "ReRAM spacing < %d (rr1.2)" | |
| surround reram *m1,rm1 30 directional \ | |
| "Metal1 overlap of ReRAM < %d in one direction (via.5a - via.4a)" | |
| surround reram *m2,rm2 30 directional \ | |
| "Metal2 overlap of ReRAM < %d in one direction (met2.5 - met2.4)" | |
| no_overlap reram v1 | |
| #endif (RERAM) | |
| #-------------------------------------------------- | |
| # METAL2 - | |
| #-------------------------------------------------- | |
| width allm2,m2fill 140 "Metal2 width < %d (met2.1)" | |
| spacing allm2 allm2,obsm2,m2fill 140 touching_ok "Metal2 spacing < %d (met2.2)" | |
| area allm2,obsm2 67600 140 "Metal2 minimum area < %a (met2.6)" | |
| angles allm2 45 "Only 45 and 90 degree angles permitted on metal2 (x.3a)" | |
| variants (fast),(full) | |
| widespacing allm2 3005 allm2,obsm2,m2fill 280 touching_ok \ | |
| "Metal2 > 3um spacing to unrelated m2 < %d (met2.3b)" | |
| widespacing obsm2 3005 allm2 280 touching_ok \ | |
| "Metal2 > 3um spacing to unrelated m2 < %d (met2.3b)" | |
| variants (full) | |
| cifmaxwidth m2_hole_empty 0 bend_illegal \ | |
| "Min area of metal2 holes > 0.14um^2 (met2.7)" | |
| cifspacing m2_large_halo m2_large_halo 280 touching_ok \ | |
| "Spacing of metal2 features attached to and within 0.28um of large metal2 < %d (met2.3a)" | |
| variants * | |
| #-------------------------------------------------- | |
| # VIA2 | |
| #-------------------------------------------------- | |
| width v2/m2 280 "via2 width < %d (via2.1a + 2 * via2.4)" | |
| spacing v2 v2 120 touching_ok "via2 spacing < %d (via2.2 - 2 * via2.4)" | |
| surround v2/m2 *m2,rm2 45 directional \ | |
| "Metal2 overlap of via2 < %d in one direction (via2.4a - via2.4)" | |
| surround v2/m3 *m3,rm3 25 absence_illegal "Metal3 overlap of via2 < %d (met3.4)" | |
| exact_overlap v2/m2 | |
| #-------------------------------------------------- | |
| # METAL3 - | |
| #-------------------------------------------------- | |
| width allm3,m3fill 300 "Metal3 width < %d (met3.1)" | |
| spacing allm3 allm3,obsm3,m3fill 300 touching_ok "Metal3 spacing < %d (met3.2)" | |
| area allm3,obsm3 240000 300 "Metal3 minimum area < %a (met3.6)" | |
| angles allm3 45 "Only 45 and 90 degree angles permitted on metal3 (x.3a)" | |
| variants (fast),(full) | |
| widespacing allm3,m3fill 3005 allm3,obsm3 400 touching_ok \ | |
| "Metal3 > 3um spacing to unrelated m3 < %d (met3.3d)" | |
| widespacing obsm3 3005 allm3 400 touching_ok \ | |
| "Metal3 > 3um spacing to unrelated m3 < %d (met3.3d)" | |
| variants (full) | |
| cifspacing m3_large_halo m3_large_halo 400 touching_ok \ | |
| "Spacing of metal3 features attached to and within 0.40um of large metal3 < %d (met3.3c)" | |
| variants * | |
| #ifdef METAL5 | |
| #undef METAL5 | |
| #-------------------------------------------------- | |
| # VIA3 - Requires METAL5 Module | |
| #-------------------------------------------------- | |
| width v3/m3 320 "via3 width < %d (via3.1 + 2 * via3.4)" | |
| spacing v3 v3 80 touching_ok "via3 spacing < %d (via3.2 - 2 * via3.4)" | |
| surround v3/m3 *m3,rm3 30 directional \ | |
| "Metal3 overlap of via3 in one direction < %d (via3.5 - via3.4)" | |
| surround v3/m4 *m4,rm4 5 absence_illegal \ | |
| "Metal4 overlap of via3 < %d (met4.3 - via3.4)" | |
| exact_overlap v3/m3 | |
| #----------------------------- | |
| # METAL4 - METAL4 Module | |
| #----------------------------- | |
| variants * | |
| width allm4,m4fill 300 "Metal4 width < %d (met4.1)" | |
| spacing allm4 allm4,obsm4,m4fill 300 touching_ok "Metal4 spacing < %d (met4.2)" | |
| area allm4,obsm4 240000 300 "Metal4 minimum area < %a (met4.4a)" | |
| angles allm4 45 "Only 45 and 90 degree angles permitted on metal4 (x.3a)" | |
| variants (fast),(full) | |
| widespacing allm4,m4fill 3005 allm4,obsm4 400 touching_ok \ | |
| "Metal4 > 3um spacing to unrelated m4 < %d (met4.5b)" | |
| widespacing obsm4 3005 allm4 400 touching_ok \ | |
| "Metal4 > 3um spacing to unrelated m4 < %d (met4.5b)" | |
| variants (full) | |
| cifspacing m4_large_halo m4_large_halo 400 touching_ok \ | |
| "Spacing of metal4 features attached to and within 0.40um of large metal4 < %d (met4.5a)" | |
| variants * | |
| #-------------------------------------------------- | |
| # VIA4 - Requires METAL5 Module | |
| #-------------------------------------------------- | |
| width v4/m4 1180 "via4 width < %d (via4.1 + 2 * via4.4)" | |
| spacing v4 v4 420 touching_ok "via4 spacing < %d (via4.2 - 2 * via4.4)" | |
| surround v4/m5 *m5,rm5 120 absence_illegal \ | |
| "Metal5 overlap of via4 < %d (met5.3 - via4.4)" | |
| exact_overlap v4/m4 | |
| #----------------------------- | |
| # METAL5 - METAL5 Module | |
| #----------------------------- | |
| width allm5,m5fill 1600 "Metal5 width < %d (met5.1)" | |
| spacing allm5 allm5,obsm5,m5fill 1600 touching_ok "Metal5 spacing < %d (met5.2)" | |
| area allm5,obsm5 4000000 1600 "Metal5 minimum area < %a (met5.4)" | |
| angles allm5 45 "Only 45 and 90 degree angles permitted on metal5 (x.3a)" | |
| #define METAL5 | |
| #endif (METAL5) | |
| #ifdef REDISTRIBUTION | |
| variants (full) | |
| width metrdl 10000 "RDL width < %d (rdl.1)" | |
| spacing metrdl metrdl 10000 touching_ok "RDL spacing < %d (rdl.2)" | |
| surround glass metrdl 10750 absence_ok "RDL must surround glass cut by %d (rdl.3)" | |
| spacing glass metrdl 19660 surround_ok "RDL spacing to unrelated pad < %d (rdl.6)" | |
| variants (fast),(full) | |
| #endif (REDISTRIBUTION) | |
| #-------------------------------------------------- | |
| # NMOS, PMOS | |
| #-------------------------------------------------- | |
| edge4way *poly allfetsstd 420 allfets 0 0 \ | |
| "Transistor width < %d (diff/tap.2)" | |
| edge4way *poly allfetsspecial 360 allfets 0 0 \ | |
| "Transistor in standard cell width < %d (diff/tap.2)" | |
| edge4way *poly npass,npd,nsonos 210 allfets 0 0 \ | |
| "N-Transistor in SRAM core width < %d (diff/tap.2)" | |
| edge4way *poly ppu 140 allfets 0 0 \ | |
| "P-Transistor in SRAM core width < %d (diff/tap.2)" | |
| # Except: Note that standard cells allow transistor width minimum 0.36um | |
| width pfetlvt 350 "LVT PMOS gate length < %d (poly.1b)" | |
| spacing allpolynonfet,polyfill *nsd 55 corner_ok var,varhvt,corenvar \ | |
| "poly spacing to diffusion tap < %d (poly.5)" | |
| spacing allpolynonfet,polyfill *psd 55 corner_ok corepvar \ | |
| "poly spacing to diffusion tap < %d (poly.5)" | |
| spacing allpolynonfet,polyfill *mvnsd 55 corner_ok mvvar \ | |
| "poly spacing to diffusion tap < %d (poly.5)" | |
| spacing allpolynonfet,polyfill *mvpsd 55 touching_illegal \ | |
| "poly spacing to diffusion tap < %d (poly.5)" | |
| edge4way *psd *ndiff 300 ~(nfet,npass,npd,scnfet,scnfetlvt,nfetlvt,nsonos)/a *psd 300 \ | |
| "Butting P-tap spacing to NMOS gate < %d (poly.6)" | |
| edge4way *nsd *pdiff 300 ~(pfet,ppu,scpfet,scpfethvt,pfetlvt,pfetmvt)/a *nsd 300 \ | |
| "Butting N-tap spacing to PMOS gate < %d (poly.6)" | |
| edge4way *mvpsd *mvndiff 300 ~(mvnfet,mvnfetesd,mvnnfet,nnfet)/a *mvpsd 300 \ | |
| "Butting MV P-tap spacing to MV NMOS gate < %d (poly.6)" | |
| edge4way *mvnsd *mvpdiff 300 ~(mvpfet,mvpfetesd)/a *mvnsd 300 \ | |
| "Butting MV N-tap spacing to MV PMOS gate < %d (poly.6)" | |
| # No LV FETs in HV diff | |
| spacing pfet,scpfet,scpfethvt,ppu,pfetlvt,pfetmvt,pfethvt,*pdiff *mvpdiff 360 touching_illegal \ | |
| "LV P-diffusion to MV P-diffusion < %d (diff/tap.23 + diff/tap.22)" | |
| spacing nfet,scnfet,scnfetlvt,npd,npass,nfetlvt,varactor,varhvt,*ndiff *mvndiff 360 touching_illegal \ | |
| "LV N-diffusion to MV N-diffusion < %d (diff/tap.23 + diff/tap.22)" | |
| # No HV FETs in LV diff | |
| spacing mvpfet,mvpfetesd,*mvpdiff *pdiff 360 touching_illegal \ | |
| "MV P-diffusion to LV P-diffusion < %d (diff/tap.23 + diff/tap.22)" | |
| spacing mvnfet,mvnfetesd,mvvaractor,*mvndiff *ndiff 360 touching_illegal \ | |
| "MV N-diffusion to LV N-diffusion < %d (diff/tap.23 + diff/tap.22)" | |
| # Minimum length of MV FETs. Note that this is larger than the minimum | |
| # width (0.29um), so an edge rule is required | |
| edge4way mvndiff mvnfet,mvnfetesd 500 mvnfet,mvnfetesd 0 0 \ | |
| "MV NMOS minimum length < %d (poly.13)" | |
| edge4way mvnsd mvvaractor 500 mvvaractor 0 0 \ | |
| "MV Varactor minimum length < %d (poly.13)" | |
| edge4way mvpdiff mvpfet,mvpfetesd 500 mvpfet,mvpfetesd 0 0 \ | |
| "MV PMOS minimum length < %d (poly.13)" | |
| #-------------------------------------------------- | |
| # mrp1 (N+ poly resistor) | |
| #-------------------------------------------------- | |
| width mrp1 330 "mrp1 resistor width < %d (poly.3)" | |
| #-------------------------------------------------- | |
| # xhrpoly (P+ poly resistor) | |
| # uhrpoly (P+ poly resistor, 2kOhm/sq) | |
| #-------------------------------------------------- | |
| # NOTE: u/xhrpoly resistor requires discrete widths 0.35, 0.69, ... up to 1.27. | |
| width xhrpoly 350 "xhrpoly resistor width < %d (P+ poly.1a)" | |
| width uhrpoly 350 "uhrpoly resistor width < %d (P+ poly.1a)" | |
| spacing xhrpoly,uhrpoly,xpc alldiff 480 touching_illegal \ | |
| "xhrpoly/uhrpoly resistor spacing to diffusion < %d (poly.9)" | |
| spacing mrp1,xhrpoly,uhrpoly,xpc allfets 480 touching_illegal \ | |
| "Poly resistor spacing to poly < %d (poly.9)" | |
| spacing xhrpoly,uhrpoly,xpc *poly 480 touching_illegal \ | |
| "Poly resistor spacing to poly < %d (poly.9)" | |
| spacing mrp1 *poly 480 touching_ok \ | |
| "Poly resistor spacing to poly < %d (poly.9)" | |
| spacing mrp1,xhrpoly,uhrpoly,xpc alldiff 480 touching_illegal \ | |
| "Poly resistor spacing to diffusion < %d (poly.9)" | |
| #------------------------------------ | |
| # nsonos | |
| #------------------------------------ | |
| variants (full) | |
| cifmaxwidth bbox_missing 0 bend_illegal \ | |
| "SONOS transistor must be in cell with abutment box (tunm.8)" | |
| variants (fast),(full) | |
| #------------------------------------ | |
| # MOS Varactor device rules | |
| #------------------------------------ | |
| overhang *nsd var,varhvt 250 \ | |
| "N-Tap overhang of Varactor < %d (var.4)" | |
| overhang *mvnsd mvvar 250 \ | |
| "N-Tap overhang of Varactor < %d (var.4)" | |
| width var,varhvt,mvvar 180 "Varactor length < %d (var.1)" | |
| extend var,varhvt,mvvar *poly 1000 "Varactor width < %d (var.2)" | |
| variants (full) | |
| cifmaxwidth var_poly_no_nwell 0 bend_illegal \ | |
| "N-well overlap of varactor poly < 0.15um (varac.5)" | |
| cifmaxwidth pdiff_in_varactor_well 0 bend_illegal \ | |
| "Varactor N-well must not contain P+ diffusion (varac.7)" | |
| variants (fast),(full) | |
| #ifdef MIM | |
| #----------------------------------------------------------- | |
| # MiM CAP (CAPM) - | |
| #----------------------------------------------------------- | |
| width *mimcap 1000 "MiM cap width < %d (capm.1)" | |
| spacing *mimcap *mimcap 840 touching_ok "MiM cap spacing < %d (capm.2a)" | |
| spacing *mimcap via3/m3 80 touching_illegal \ | |
| "MiM cap spacing to via3 < %d (capm.5 - via3.4)" | |
| surround *mimcc *mimcap 80 absence_illegal \ | |
| "MiM cap must surround MiM cap contact by %d (capm.4 - via3.4)" | |
| rect_only *mimcap "MiM cap must be rectangular (capm.7) | |
| surround *mimcap *metal3/m3 140 absence_illegal \ | |
| "Metal3 must surround MiM cap by %d (capm.3)" | |
| spacing via2 *mimcap 100 touching_illegal \ | |
| "MiM cap spacing to via2 < %d (capm.8 - via2.4)" | |
| spacing *metal3 *mimcap 1340 surround_ok \ | |
| "MiM cap spacing to unrelated metal3 < %d (capm.11)" | |
| # MiM cap contact rules (VIA3) | |
| width mimcc/c1 320 "MiM cap contact width < %d (via3.1 + 2 * via3.4)" | |
| spacing mimcc mimcc 80 touching_ok "MiM cap contact spacing < %d (via3.2 - 2 * via3.4)" | |
| surround mimcc/m4 *m4 5 directional \ | |
| "Metal4 overlap of MiM cap contact in one direction < %d (met4.3 - via3.4)" | |
| exact_overlap mimcc/c1 | |
| width *mimcap2 1000 "MiM2 cap width < %d (cap2m.1)" | |
| spacing *mimcap2 *mimcap2 840 touching_ok "MiM2 cap spacing < %d (cap2m.2a)" | |
| spacing *mimcap2 via4/m4 10 touching_illegal \ | |
| "MiM2 cap spacing to via4 < %d (cap2m.5 - via4.4)" | |
| surround *mim2cc *mimcap2 10 absence_illegal \ | |
| "MiM2 cap must surround MiM cap 2 contact by %d (cap2m.4 - via4.4)" | |
| rect_only *mimcap2 "MiM2 cap must be rectangular (cap2m.7) | |
| surround *mimcap2 *metal4/m4 140 absence_illegal \ | |
| "Metal4 must surround MiM2 cap by %d (cap2m.3)" | |
| spacing via3 *mimcap2 80 touching_illegal \ | |
| "MiM2 cap spacing to via3 < %d (cap2m.8 - via3.4)" | |
| spacing *metal4 *mimcap2 1340 surround_ok \ | |
| "MiM2 cap spacing to unrelated metal4 < %d (cap2m.11)" | |
| variants (full) | |
| cifmaxwidth mim2_contact_overlap 0 bend_illegal \ | |
| "MiM2 cap contact must not cross MiM cap contact (cap2m.8)" | |
| variants (fast),(full) | |
| # MiM cap contact rules (VIA4) | |
| width mim2cc/c2 1180 "MiM2 cap contact width < %d (via4.1 + 2 * via4.4)" | |
| spacing mim2cc mim2cc 420 touching_ok \ | |
| "MiM2 cap contact spacing < %d (via4.2 - 2 * via4.4)" | |
| surround mim2cc/m5 *m5 120 absence_illegal \ | |
| "Metal5 overlap of MiM2 cap contact < %d (met5.3 - via4.4)" | |
| exact_overlap mim2cc/c2 | |
| #endif (MIM) | |
| #---------------------------- | |
| # HVNTM | |
| #---------------------------- | |
| variants (full) | |
| cifspacing hvntm_generate hvntm_generate 700 touching_ok \ | |
| "HVNTM spacing < %d (hvntm.2)" | |
| variants (fast),(full) | |
| #---------------------------- | |
| # End DRC style | |
| #---------------------------- | |
| end | |
| #---------------------------- | |
| # LEF format definitions | |
| #---------------------------- | |
| lef | |
| masterslice pwell pwell PWELL substrate | |
| masterslice nwell nwell NWELL | |
| routing li li1 LI1 LI li | |
| routing m1 met1 MET1 m1 | |
| routing m2 met2 MET2 m2 | |
| routing m3 met3 MET3 m3 | |
| #ifdef METAL5 | |
| routing m4 met4 MET4 m4 | |
| routing m5 met5 MET5 m5 | |
| #endif (METAL5) | |
| #ifdef REDISTRIBUTION | |
| routing mrdl met6 MET6 m6 MRDL METRDL | |
| #endif | |
| cut mcon mcon MCON Mcon | |
| cut m2c via via1 VIA VIA1 cont2 via12 | |
| cut m3c via2 VIA2 cont3 via23 | |
| #ifdef METAL5 | |
| cut via3 via3 VIA3 cont4 via34 | |
| cut via4 via4 VIA4 cont5 via45 | |
| #endif (METAL5) | |
| obs obsli li1 | |
| obs obsm1 met1 | |
| obs obsm2 met2 | |
| obs obsm3 met3 | |
| #ifdef METAL5 | |
| obs obsm4 met4 | |
| obs obsm5 met5 | |
| #endif (METAL5) | |
| #ifdef REDISTRIBUTION | |
| obs obsmrdl met6 | |
| #endif | |
| # NOTE: obsmcon only used with li1, not obsli. | |
| obs obsmcon mcon | |
| # Vias on obstruction layers should be ignored, so cast to obstruction metal. | |
| obs obsm1 via | |
| obs obsm2 via2 | |
| #ifdef METAL5 | |
| obs obsm3 via3 | |
| obs obsm4 via4 | |
| #endif (METAL5) | |
| end | |
| #----------------------------------------------------- | |
| # Device and Parasitic extraction | |
| #----------------------------------------------------- | |
| extract | |
| style ngspice variants (),(orig),(si),(hrhc),(lrhc),(hrlc),(lrlc) | |
| cscale 1 | |
| # NOTE: SkyWater SPICE libraries use .option scale 1E6 so all | |
| # dimensions must be in units of microns in the extract file. | |
| # Use extract style "ngspice(si)" to override this and produce | |
| # a file with SI units for length/area. | |
| variants (),(orig),(hrhc),(lrhc),(hrlc),(lrlc) | |
| lambda 1E6 | |
| variants (si) | |
| lambda 1.0 | |
| variants * | |
| units microns | |
| step 7 | |
| sidehalo 8 | |
| fringeshieldhalo 8 | |
| # NOTE: MiM cap layers have been purposely put out of order, | |
| # may want to reconsider. | |
| planeorder dwell 0 | |
| planeorder well 1 | |
| planeorder active 2 | |
| planeorder locali 3 | |
| planeorder metal1 4 | |
| planeorder metal2 5 | |
| planeorder metal3 6 | |
| #ifdef METAL5 | |
| planeorder metal4 7 | |
| planeorder metal5 8 | |
| #ifdef REDISTRIBUTION | |
| planeorder metali 9 | |
| planeorder block 10 | |
| planeorder comment 11 | |
| planeorder cap1 12 | |
| planeorder cap2 13 | |
| #else (!REDISTRIBUTION) | |
| planeorder block 9 | |
| planeorder comment 10 | |
| planeorder cap1 11 | |
| planeorder cap2 12 | |
| #endif (!REDISTRIBUTION) | |
| #else (!METAL5) | |
| #ifdef REDISTRIBUTION | |
| planeorder metali 7 | |
| planeorder block 8 | |
| planeorder comment 9 | |
| planeorder cap1 10 | |
| planeorder cap2 11 | |
| #else (!REDISTRIBUTION) | |
| planeorder block 7 | |
| planeorder comment 8 | |
| planeorder cap1 9 | |
| planeorder cap2 10 | |
| #endif (!REDISTRIBUTION) | |
| #endif (!METAL5) | |
| height dnwell -0.1 0.1 | |
| height nwell,pwell 0.0 0.2062 | |
| height alldiff 0.2062 0.12 | |
| height fomfill 0.2062 0.12 | |
| height allpoly 0.3262 0.18 | |
| height polyfill 0.3262 0.18 | |
| height alldiffcont 0.3262 0.61 | |
| height pc 0.5062 0.43 | |
| height allli 0.9361 0.10 | |
| height mcon 1.0361 0.34 | |
| height allm1 1.3761 0.36 | |
| height m1fill 1.3761 0.36 | |
| #ifdef RERAM | |
| height v1 1.7361 0.565 | |
| height allm2 2.3011 0.36 | |
| height m2fill 2.3011 0.36 | |
| height v2 2.6611 0.42 | |
| height allm3 3.0811 0.845 | |
| height m3fill 3.0811 0.845 | |
| #ifdef MIM | |
| height mimcap 2.7611 0.2 | |
| height mimcap2 4.0261 0.2 | |
| height mimcc 2.9611 0.12 | |
| height mim2cc 4.2261 0.09 | |
| #endif (MIM) | |
| #ifdef METAL5 | |
| height v3 3.9261 0.39 | |
| height allm4 4.3161 0.845 | |
| height m4fill 4.3161 0.845 | |
| height v4 5.1611 0.505 | |
| height allm5 5.6661 1.26 | |
| height m5fill 5.6661 1.26 | |
| #ifdef REDISTRIBUTION | |
| height mrdlc 6.9261 0.63 | |
| height mrdl 7.5561 3.0 | |
| #endif (!REDISTRIBUTION) | |
| #endif (!METAL5) | |
| #else (!RERAM) | |
| height v1 1.7361 0.27 | |
| height allm2 2.0061 0.36 | |
| height m2fill 2.0061 0.36 | |
| height v2 2.3661 0.42 | |
| height allm3 2.7861 0.845 | |
| height m3fill 2.7861 0.845 | |
| #ifdef MIM | |
| height mimcap 2.4661 0.2 | |
| height mimcap2 3.7311 0.2 | |
| height mimcc 2.6661 0.12 | |
| height mim2cc 3.9311 0.09 | |
| #endif (MIM) | |
| #ifdef METAL5 | |
| height v3 3.6311 0.39 | |
| height allm4 4.0211 0.845 | |
| height m4fill 4.0211 0.845 | |
| height v4 4.8661 0.505 | |
| height allm5 5.3711 1.26 | |
| height m5fill 5.3711 1.26 | |
| #ifdef REDISTRIBUTION | |
| height mrdlc 6.6311 0.63 | |
| height mrdl 7.2611 3.0 | |
| #endif (!REDISTRIBUTION) | |
| #endif (!METAL5) | |
| #endif (!RERAM) | |
| # Antenna check parameters | |
| # Note that checks w/diode diffusion are not modeled | |
| model partial | |
| antenna poly sidewall 50 none | |
| antenna allcont surface 3 none | |
| antenna li sidewall 75 0 450 | |
| antenna mcon surface 3 0 18 | |
| antenna m1,m2,m3 sidewall 400 2200 400 | |
| antenna v1 surface 3 0 18 | |
| antenna v2 surface 6 0 36 | |
| #ifdef METAL5 | |
| antenna m4,m5 sidewall 400 2200 400 | |
| antenna v3,v4 surface 6 0 36 | |
| #endif (METAL5) | |
| tiedown alldiffnonfet | |
| substrate *ppdiff,*mvppdiff,space/w,pwell well $SUB -dnwell,isosub | |
| # Resistances are in milliohms per square | |
| # Optional 3rd argument is the corner adjustment fraction | |
| # Device values come from trtc.cor (typical corner) | |
| variants (),(orig),(si) | |
| resist (pwell,isosub)/well 4400000 | |
| resist (dnwell)/dwell 2200000 | |
| resist (nwell)/well 950000 | |
| resist (rpw)/well 3050000 0.5 | |
| resist (*ndiff,nsd)/active 120000 | |
| resist (*pdiff,*psd)/active 197000 | |
| resist (*mvndiff,mvnsd)/active 114000 | |
| resist (*mvpdiff,*mvpsd)/active 191000 | |
| resist ndiffres/active 120000 0.5 | |
| resist pdiffres/active 197000 0.5 | |
| resist mvndiffres/active 114000 0.5 | |
| resist mvpdiffres/active 191000 0.5 | |
| resist mrp1/active 48200 0.5 | |
| resist xhrpoly/active 319800 0.5 | |
| resist uhrpoly/active 2000000 0.5 | |
| resist (allpolynonres)/active 48200 | |
| resist rmp/active 48200 | |
| resist (allli)/locali 12800 | |
| resist (allm1)/metal1 125 | |
| resist (allm2)/metal2 125 | |
| resist (allm3)/metal3 47 | |
| #ifdef METAL5 | |
| resist (allm4)/metal4 47 | |
| resist (allm5)/metal5 29 | |
| #endif (METAL5) | |
| #ifdef REDISTRIBUTION | |
| resist mrdl/metali 5 | |
| #endif (REDISTRIBUTION) | |
| contact ndc,nsc 185000 | |
| contact ndic,ndilvtc,nndic 185000 | |
| contact pdc,psc 585000 | |
| contact pdic,pdilvtc,pdihvtc 585000 | |
| contact mvndc,mvnsc,mvndic 185000 | |
| contact mvpdc,mvpsc,mvpdic 585000 | |
| contact pc,xpc 152000 | |
| contact mcon 9300 | |
| #ifdef RERAM | |
| contact m2c 9000 | |
| #else | |
| contact m2c 4500 | |
| #endif | |
| contact m3c 3410 | |
| #ifdef METAL5 | |
| #ifdef MIM | |
| contact mimcc 4500 | |
| contact mim2cc 3410 | |
| #endif (MIM) | |
| contact via3 3410 | |
| contact via4 380 | |
| #endif (METAL5) | |
| #ifdef REDISTRIBUTION | |
| contact mrdlc 6 | |
| #endif (REDISTRIBUTION) | |
| variants (hrhc),(hrlc) | |
| # High-end corner resistances | |
| # No corner values available for: substrate, xhrpoly, uhrpoly, RDL | |
| resist (pwell,isosub)/well 4400000 | |
| resist (dnwell)/dwell 2575000 | |
| resist (nwell)/well 1350000 | |
| resist (rpw)/well 3535000 0.5 | |
| resist (*ndiff,nsd)/active 132000 | |
| resist (*pdiff,*psd)/active 228000 | |
| resist (*mvndiff,mvnsd)/active 126000 | |
| resist (*mvpdiff,*mvpsd)/active 228000 | |
| resist ndiffres/active 132000 0.5 | |
| resist pdiffres/active 228000 0.5 | |
| resist mvndiffres/active 126000 0.5 | |
| resist mvpdiffres/active 228000 0.5 | |
| resist mrp1/active 55800 0.5 | |
| resist xhrpoly/active 319800 0.5 | |
| resist uhrpoly/active 2000000 0.5 | |
| resist (allpolynonres)/active 55800 | |
| resist rmp/active 55800 | |
| resist (allli)/locali 17000 | |
| resist (allm1)/metal1 145 | |
| resist (allm2)/metal2 145 | |
| resist (allm3)/metal3 56 | |
| #ifdef METAL5 | |
| resist (allm4)/metal4 56 | |
| resist (allm5)/metal5 36 | |
| #endif (METAL5) | |
| #ifdef REDISTRIBUTION | |
| resist mrdl/metali 5 | |
| #endif (REDISTRIBUTION) | |
| contact ndc,nsc 280000 | |
| contact ndic,ndilvtc,nndic 280000 | |
| contact pdc,psc 840000 | |
| contact pdic,pdilvtc,pdihvtc 840000 | |
| contact mvndc,mvnsc,mvndic 280000 | |
| contact mvpdc,mvpsc,mvpdic 840000 | |
| contact pc,xpc 252000 | |
| contact mcon 23000 | |
| #ifdef RERAM | |
| contact m2c 30000 | |
| #else | |
| contact m2c 15000 | |
| #endif | |
| contact m3c 8000 | |
| #ifdef METAL5 | |
| #ifdef MIM | |
| contact mimcc 15000 | |
| contact mim2cc 8000 | |
| #endif (MIM) | |
| contact via3 8000 | |
| contact via4 891 | |
| #endif (METAL5) | |
| #ifdef REDISTRIBUTION | |
| contact mrdlc 6 | |
| #endif (REDISTRIBUTION) | |
| variants (lrhc),(lrlc) | |
| # Low-end corner resistances | |
| # No corner values available for: substrate, xhrpoly, uhrpoly, RDL | |
| resist (pwell,isosub)/well 4400000 | |
| resist (dnwell)/dwell 1825000 | |
| resist (nwell)/well 550000 | |
| resist (rpw)/well 2565000 0.5 | |
| resist (*ndiff,nsd)/active 108000 | |
| resist (*pdiff,*psd)/active 166000 | |
| resist (*mvndiff,mvnsd)/active 102000 | |
| resist (*mvpdiff,*mvpsd)/active 160000 | |
| resist ndiffres/active 108000 0.5 | |
| resist pdiffres/active 166000 0.5 | |
| resist mvndiffres/active 102000 0.5 | |
| resist mvpdiffres/active 160000 0.5 | |
| resist mrp1/active 42200 0.5 | |
| resist xhrpoly/active 319800 0.5 | |
| resist uhrpoly/active 2000000 0.5 | |
| resist (allpolynonres)/active 42200 | |
| resist rmp/active 42200 | |
| resist (allli)/locali 10500 | |
| resist (allm1)/metal1 105 | |
| resist (allm2)/metal2 105 | |
| resist (allm3)/metal3 38 | |
| #ifdef METAL5 | |
| resist (allm4)/metal4 38 | |
| resist (allm5)/metal5 21 | |
| #endif (METAL5) | |
| #ifdef REDISTRIBUTION | |
| resist mrdl/metali 5 | |
| #endif (REDISTRIBUTION) | |
| contact ndc,nsc 95000 | |
| contact ndic,ndilvtc,nndic 95000 | |
| contact pdc,psc 345000 | |
| contact pdic,pdilvtc,pdihvtc 345000 | |
| contact mvndc,mvnsc,mvndic 95000 | |
| contact mvpdc,mvpsc,mvpdic 345000 | |
| contact pc,xpc 52000 | |
| contact mcon 1600 | |
| #ifdef RERAM | |
| contact m2c 4000 | |
| #else | |
| contact m2c 2000 | |
| #endif | |
| contact m3c 500 | |
| #ifdef METAL5 | |
| #ifdef MIM | |
| contact mimcc 2000 | |
| contact mim2cc 500 | |
| #endif (MIM) | |
| contact via3 500 | |
| contact via4 12 | |
| #endif (METAL5) | |
| #ifdef REDISTRIBUTION | |
| contact mrdlc 6 | |
| #endif (REDISTRIBUTION) | |
| variants * | |
| # These types should not be considered as electrical nodes | |
| resist blocktypes None | |
| resist obstypes None | |
| resist comment None | |
| #------------------------------------------------------------------------- | |
| # Parasitic capacitance values: Use document (...) | |
| #------------------------------------------------------------------------- | |
| # This uses the new "default" definitions that determine the intervening | |
| # planes from the planeorder stack, take care of the reflexive sideoverlap | |
| # definitions, and generally clean up the section and make it more readable. | |
| # | |
| # Also uses "units microns" statement. All values are taken from the | |
| # document PEX/xRC/cap_models. Fringe capacitance values are approximated. | |
| # Units are aF/um^2 for area caps and aF/um for perimeter and sidewall caps. | |
| #------------------------------------------------------------------------- | |
| # Remember that device capacitances to substrate are taken care of by the | |
| # models. Thus, active and poly definitions ignore all "fet" types. | |
| # fet types are excluded when computing parasitic capacitance to | |
| # active from layers above them because poly is a shield; fet types are | |
| # included for parasitics from layers above to poly. Resistor types | |
| # should be removed from all parasitic capacitance calculations, or else | |
| # they just create floating caps. Technically, the capacitance probably | |
| # should be split between the two terminals. Unsure of the correct model. | |
| #------------------------------------------------------------------------- | |
| variants (),(orig),(si) | |
| # Nominal capacitances | |
| #deep n-well | |
| defaultareacap dnwell dwell 120 | |
| #p-well | |
| defaultoverlap pwell well dnwell dwell 120 | |
| #n-well | |
| # NOTE: This value not found in PEX files | |
| defaultareacap nwell well dnwell dwell 120 | |
| #n-active | |
| # Rely on device models to capture *ndiff area cap | |
| # Do not extract parasitics from resistors | |
| # defaultareacap allnactivenonfet active 790 | |
| # defaultperimeter allnactivenonfet active 280 | |
| #p-active | |
| # Rely on device models to capture *pdiff area cap | |
| # Do not extract parasitics from resistors | |
| # defaultareacap allpactivenonfet active 810 | |
| # defaultperimeter allpactivenonfet active 300 | |
| #poly | |
| # Do not extract parasitics from resistors | |
| # defaultsidewall allpolynonfet active 17 | |
| # defaultareacap allpolynonfet active 106 | |
| # defaultperimeter allpolynonfet active 57 | |
| defaultsidewall *poly active 16.0 | |
| defaultareacap *poly active 106.13 | |
| defaultperimeter *poly active 55.27 | |
| defaultoverlap *poly active nwell,pwell well 106.13 | |
| defaultsideoverlap *poly active nwell,pwell well 55.27 | |
| #locali | |
| defaultsidewall allli locali 25.5 0.14 | |
| defaultareacap allli locali 36.99 | |
| defaultperimeter allli locali 40.70 | |
| defaultoverlap allli locali nwell,pwell well 36.99 | |
| defaultsideoverlap allli locali nwell,pwell well 40.70 | |
| #locali->diff | |
| defaultoverlap allli locali allactivenonfet active 55.3 | |
| defaultsideoverlap allli locali allactivenonfet active 44.27 | |
| #locali->poly | |
| defaultoverlap allli locali allpolynonres active 94.16 | |
| defaultsideoverlap allli locali allpolynonres active 51.85 | |
| defaultsideoverlap *poly active allli locali 25.14 | |
| #metal1 | |
| defaultsidewall allm1 metal1 44 0.25 | |
| defaultareacap allm1 metal1 25.78 | |
| defaultperimeter allm1 metal1 40.57 | |
| defaultoverlap allm1 metal1 nwell,pwell well 25.78 | |
| defaultsideoverlap allm1 metal1 nwell,pwell well 40.57 | |
| #metal1->diff | |
| defaultoverlap allm1 metal1 allactivenonfet active 33.6 | |
| defaultsideoverlap allm1 metal1 allactivenonfet active 43.10 | |
| #metal1->poly | |
| defaultoverlap allm1 metal1 allpolynonres active 44.81 | |
| defaultsideoverlap allm1 metal1 allpolynonres active 46.72 | |
| defaultsideoverlap *poly active allm1 metal1 16.69 | |
| #metal1->locali | |
| defaultoverlap allm1 metal1 allli locali 114.20 | |
| defaultsideoverlap allm1 metal1 allli locali 59.50 | |
| defaultsideoverlap allli locali allm1 metal1 34.70 | |
| #metal2 | |
| defaultsidewall allm2 metal2 50 0.3 | |
| #ifdef RERAM | |
| # For ReRAM, all parasitics account for the additional 0.295um between | |
| # metal1 and metal2 | |
| defaultareacap allm2 metal2 14.73 | |
| defaultperimeter allm2 metal2 32.92 | |
| defaultoverlap allm2 metal2 nwell,pwell well 14.73 | |
| defaultsideoverlap allm2 metal2 nwell,pwell well 32.92 | |
| #metal2->diff | |
| defaultoverlap allm2 metal2 allactivenonfet active 17.87 | |
| defaultsideoverlap allm2 metal2 allactivenonfet active 33.96 | |
| #metal2->poly | |
| defaultoverlap allm2 metal2 allpolynonres active 20.47 | |
| defaultsideoverlap allm2 metal2 allpolynonres active 34.44 | |
| defaultsideoverlap *poly active allm2 metal2 9.33 | |
| #metal2->locali | |
| defaultoverlap allm2 metal2 allli locali 28.80 | |
| defaultsideoverlap allm2 metal2 allli locali 35.49 | |
| defaultsideoverlap allli locali allm2 metal2 16.67 | |
| #metal2->metal1 | |
| defaultoverlap allm2 metal2 allm1 metal1 63.97 | |
| defaultsideoverlap allm2 metal2 allm1 metal1 32.04 | |
| defaultsideoverlap allm1 metal1 allm2 metal2 23.03 | |
| #else (!RERAM) | |
| defaultareacap allm2 metal2 17.5 | |
| defaultperimeter allm2 metal2 37.76 | |
| defaultoverlap allm2 metal2 nwell,pwell well 17.5 | |
| defaultsideoverlap allm2 metal2 nwell,pwell well 37.76 | |
| #metal2->diff | |
| defaultoverlap allm2 metal2 allactivenonfet active 20.8 | |
| defaultsideoverlap allm2 metal2 allactivenonfet active 39.54 | |
| #metal2->poly | |
| defaultoverlap allm2 metal2 allpolynonres active 24.50 | |
| defaultsideoverlap allm2 metal2 allpolynonres active 41.22 | |
| defaultsideoverlap *poly active allm2 metal2 11.17 | |
| #metal2->locali | |
| defaultoverlap allm2 metal2 allli locali 37.56 | |
| defaultsideoverlap allm2 metal2 allli locali 46.28 | |
| defaultsideoverlap allli locali allm2 metal2 21.74 | |
| #metal2->metal1 | |
| defaultoverlap allm2 metal2 allm1 metal1 133.86 | |
| defaultsideoverlap allm2 metal2 allm1 metal1 67.05 | |
| defaultsideoverlap allm1 metal1 allm2 metal2 48.19 | |
| #endif (!RERAM) | |
| #metal3 | |
| defaultsidewall allm3 metal3 74.0 0.40 | |
| #ifdef RERAM | |
| defaultareacap allm3 metal3 11.19 | |
| defaultperimeter allm3 metal3 37.07 | |
| defaultoverlap allm3 metal3 nwell,pwell well 11.19 | |
| defaultsideoverlap allm3 metal3 nwell,pwell well 37.07 | |
| #metal3->diff | |
| defaultoverlap allm3 metal3 allactive active 11.92 | |
| defaultsideoverlap allm3 metal3 allactive active 37.94 | |
| #metal3->poly | |
| defaultoverlap allm3 metal3 allpolynonres active 14.22 | |
| defaultsideoverlap allm3 metal3 allpolynonres active 38.54 | |
| defaultsideoverlap *poly active allm3 metal3 8.13 | |
| #metal3->locali | |
| defaultoverlap allm3 metal3 allli locali 17.79 | |
| defaultsideoverlap allm3 metal3 allli locali 39.97 | |
| defaultsideoverlap allli locali allm3 metal3 12.90 | |
| #metal3->metal1 | |
| defaultoverlap allm3 metal3 allm1 metal1 26.96 | |
| defaultsideoverlap allm3 metal3 allm1 metal1 42.79 | |
| defaultsideoverlap allm1 metal1 allm3 metal3 20.83 | |
| #else (!RERAM) | |
| defaultareacap allm3 metal3 12.37 | |
| defaultperimeter allm3 metal3 40.99 | |
| defaultoverlap allm3 metal3 nwell,pwell well 12.37 | |
| defaultsideoverlap allm3 metal3 nwell,pwell well 40.99 | |
| #metal3->diff | |
| defaultoverlap allm3 metal3 allactive active 14.2 | |
| defaultsideoverlap allm3 metal3 allactive active 42.25 | |
| #metal3->poly | |
| defaultoverlap allm3 metal3 allpolynonres active 16.06 | |
| defaultsideoverlap allm3 metal3 allpolynonres active 43.53 | |
| defaultsideoverlap *poly active allm3 metal3 9.18 | |
| #metal3->locali | |
| defaultoverlap allm3 metal3 allli locali 20.79 | |
| defaultsideoverlap allm3 metal3 allli locali 46.71 | |
| defaultsideoverlap allli locali allm3 metal3 15.08 | |
| #metal3->metal1 | |
| defaultoverlap allm3 metal3 allm1 metal1 34.54 | |
| defaultsideoverlap allm3 metal3 allm1 metal1 54.81 | |
| defaultsideoverlap allm1 metal1 allm3 metal3 26.68 | |
| #endif (!RERAM) | |
| #metal3->metal2 | |
| defaultoverlap allm3 metal3 allm2 metal2 86.19 | |
| defaultsideoverlap allm3 metal3 allm2 metal2 69.85 | |
| defaultsideoverlap allm2 metal2 allm3 metal3 44.43 | |
| #ifdef METAL5 | |
| #metal4 | |
| defaultsidewall allm4 metal4 94.0 0.57 | |
| #ifdef RERAM | |
| defaultareacap allm4 metal4 7.84 | |
| defaultperimeter allm4 metal4 34.17 | |
| defaultoverlap allm4 metal4 nwell,pwell well 7.84 | |
| defaultsideoverlap allm4 metal4 nwell,pwell well 34.17 | |
| #metal4->diff | |
| defaultoverlap allm4 metal4 allactivenonfet active 8.21 | |
| defaultsideoverlap allm4 metal4 allactivenonfet active 34.87 | |
| #metal4->poly | |
| defaultoverlap allm4 metal4 allpolynonres active 9.24 | |
| defaultsideoverlap allm4 metal4 allpolynonres active 35.16 | |
| defaultsideoverlap *poly active allm4 metal4 5.86 | |
| #metal4->locali | |
| defaultoverlap allm4 metal4 allli locali 10.62 | |
| defaultsideoverlap allm4 metal4 allli locali 36.14 | |
| defaultsideoverlap allli locali allm4 metal4 9.23 | |
| #metal4->metal1 | |
| defaultoverlap allm4 metal4 allm1 metal1 13.31 | |
| defaultsideoverlap allm4 metal4 allm1 metal1 37.70 | |
| defaultsideoverlap allm1 metal1 allm4 metal4 14.54 | |
| #else (!RERAM) | |
| defaultareacap allm4 metal4 8.42 | |
| defaultperimeter allm4 metal4 36.68 | |
| defaultoverlap allm4 metal4 nwell,pwell well 8.42 | |
| defaultsideoverlap allm4 metal4 nwell,pwell well 36.68 | |
| #metal4->diff | |
| defaultoverlap allm4 metal4 allactivenonfet active 9.41 | |
| defaultsideoverlap allm4 metal4 allactivenonfet active 37.57 | |
| #metal4->poly | |
| defaultoverlap allm4 metal4 allpolynonres active 10.01 | |
| defaultsideoverlap allm4 metal4 allpolynonres active 38.11 | |
| defaultsideoverlap *poly active allm4 metal4 6.35 | |
| #metal4->locali | |
| defaultoverlap allm4 metal4 allli locali 11.67 | |
| defaultsideoverlap allm4 metal4 allli locali 39.71 | |
| defaultsideoverlap allli locali allm4 metal4 10.14 | |
| #metal4->metal1 | |
| defaultoverlap allm4 metal4 allm1 metal1 15.03 | |
| defaultsideoverlap allm4 metal4 allm1 metal1 42.56 | |
| defaultsideoverlap allm1 metal1 allm4 metal4 16.42 | |
| #endif (!RERAM) | |
| #metal4->metal2 | |
| defaultoverlap allm4 metal4 allm2 metal2 20.33 | |
| defaultsideoverlap allm4 metal4 allm2 metal2 46.38 | |
| defaultsideoverlap allm2 metal2 allm4 metal4 22.33 | |
| #metal4->metal3 | |
| defaultoverlap allm4 metal4 allm3 metal3 84.03 | |
| defaultsideoverlap allm4 metal4 allm3 metal3 70.52 | |
| defaultsideoverlap allm3 metal3 allm4 metal4 42.64 | |
| #metal5 | |
| defaultsidewall allm5 metal5 155 0.5 | |
| #ifdef RERAM | |
| defaultareacap allm5 metal5 5.99 | |
| defaultperimeter allm5 metal5 36.83 | |
| defaultoverlap allm5 metal5 nwell,pwell well 5.99 | |
| defaultsideoverlap allm5 metal5 nwell,pwell well 36.83 | |
| #metal5->diff | |
| defaultoverlap allm5 metal5 allactivenonfet active 6.21 | |
| defaultsideoverlap allm5 metal5 allactivenonfet active 37.39 | |
| #metal5->poly | |
| defaultoverlap allm5 metal5 allpolynonres active 6.80 | |
| defaultsideoverlap allm5 metal5 allpolynonres active 37.63 | |
| defaultsideoverlap *poly active allm5 metal5 6.12 | |
| #metal5->locali | |
| defaultoverlap allm5 metal5 allli locali 7.52 | |
| defaultsideoverlap allm5 metal5 allli locali 38.53 | |
| defaultsideoverlap allli locali allm5 metal5 7.15 | |
| #metal5->metal1 | |
| defaultoverlap allm5 metal5 allm1 metal1 8.77 | |
| defaultsideoverlap allm5 metal5 allm1 metal1 39.95 | |
| defaultsideoverlap allm1 metal1 allm5 metal5 11.12 | |
| #else (!RERAM) | |
| defaultareacap allm5 metal5 6.32 | |
| defaultperimeter allm5 metal5 38.85 | |
| defaultoverlap allm5 metal5 nwell,pwell well 6.32 | |
| defaultsideoverlap allm5 metal5 nwell,pwell well 38.85 | |
| #metal5->diff | |
| defaultoverlap allm5 metal5 allactivenonfet active 6.88 | |
| defaultsideoverlap allm5 metal5 allactivenonfet active 39.52 | |
| #metal5->poly | |
| defaultoverlap allm5 metal5 allpolynonres active 7.21 | |
| defaultsideoverlap allm5 metal5 allpolynonres active 39.91 | |
| defaultsideoverlap *poly active allm5 metal5 6.49 | |
| #metal5->locali | |
| defaultoverlap allm5 metal5 allli locali 8.03 | |
| defaultsideoverlap allm5 metal5 allli locali 41.15 | |
| defaultsideoverlap allli locali allm5 metal5 7.64 | |
| #metal5->metal1 | |
| defaultoverlap allm5 metal5 allm1 metal1 9.48 | |
| defaultsideoverlap allm5 metal5 allm1 metal1 43.19 | |
| defaultsideoverlap allm1 metal1 allm5 metal5 12.02 | |
| #endif (!RERAM) | |
| #metal5->metal2 | |
| defaultoverlap allm5 metal5 allm2 metal2 11.34 | |
| defaultsideoverlap allm5 metal5 allm2 metal2 45.59 | |
| defaultsideoverlap allm2 metal2 allm5 metal5 15.69 | |
| #metal5->metal3 | |
| defaultoverlap allm5 metal5 allm3 metal3 19.63 | |
| defaultsideoverlap allm5 metal5 allm3 metal3 54.15 | |
| defaultsideoverlap allm3 metal3 allm5 metal5 27.84 | |
| #metal5->metal4 | |
| defaultoverlap allm5 metal5 allm4 metal4 68.33 | |
| defaultsideoverlap allm5 metal5 allm4 metal4 82.82 | |
| defaultsideoverlap allm4 metal4 allm5 metal5 46.98 | |
| #endif (METAL5) | |
| #------------------------------------------------------------------------- | |
| # Parasitic capacitance values for minimum corner | |
| #------------------------------------------------------------------------- | |
| variants (hrlc),(lrlc) | |
| # Minimum corner capacitances | |
| #deep n-well | |
| defaultareacap dnwell dwell 120 | |
| #p-well | |
| defaultoverlap pwell well dnwell dwell 120 | |
| #n-well | |
| # NOTE: This value not found in PEX files | |
| defaultareacap nwell well dnwell dwell 120 | |
| #n-active | |
| # Rely on device models to capture *ndiff area cap | |
| # Do not extract parasitics from resistors | |
| # defaultareacap allnactivenonfet active 790 | |
| # defaultperimeter allnactivenonfet active 280 | |
| #p-active | |
| # Rely on device models to capture *pdiff area cap | |
| # Do not extract parasitics from resistors | |
| # defaultareacap allpactivenonfet active 810 | |
| # defaultperimeter allpactivenonfet active 300 | |
| #poly | |
| # Do not extract parasitics from resistors | |
| # defaultsidewall allpolynonfet active 22 | |
| # defaultareacap allpolynonfet active 80.4 | |
| # defaultperimeter allpolynonfet active 57 | |
| defaultsidewall *poly active 17.0 0.21 | |
| defaultareacap *poly active 80.4 | |
| defaultperimeter *poly active 48.83 | |
| defaultoverlap *poly active nwell,pwell well 80.4 | |
| defaultsideoverlap *poly active nwell,pwell well 48.83 | |
| #locali | |
| defaultsidewall allli locali 26.7 0.17 | |
| defaultareacap allli locali 29.3 | |
| defaultperimeter allli locali 35.69 | |
| defaultoverlap allli locali nwell,pwell well 29.3 | |
| defaultsideoverlap allli locali nwell,pwell well 35.69 | |
| #locali->diff | |
| defaultoverlap allli locali allactivenonfet active 45.3 | |
| defaultsideoverlap allli locali allactivenonfet active 39.59 | |
| #locali->poly | |
| defaultoverlap allli locali allpolynonres active 64.5 | |
| defaultsideoverlap allli locali allpolynonres active 43.75 | |
| defaultsideoverlap *poly active allli locali 21.21 | |
| #metal1 | |
| defaultsidewall allm1 metal1 35.6 0.14 | |
| defaultareacap allm1 metal1 20.2 | |
| defaultperimeter allm1 metal1 34.41 | |
| defaultoverlap allm1 metal1 nwell,pwell well 20.2 | |
| defaultsideoverlap allm1 metal1 nwell,pwell well 34.41 | |
| #metal1->diff | |
| defaultoverlap allm1 metal1 allactivenonfet active 26.7 | |
| defaultsideoverlap allm1 metal1 allactivenonfet active 37.22 | |
| #metal1->poly | |
| defaultoverlap allm1 metal1 allpolynonres active 32.3 | |
| defaultsideoverlap allm1 metal1 allpolynonres active 40.34 | |
| defaultsideoverlap *poly active allm1 metal1 14.41 | |
| #metal1->locali | |
| defaultoverlap allm1 metal1 allli locali 77.2 | |
| defaultsideoverlap allm1 metal1 allli locali 49.46 | |
| defaultsideoverlap allli locali allm1 metal1 28.84 | |
| #metal2 | |
| defaultsidewall allm2 metal2 37.61 0.14 | |
| #ifdef RERAM | |
| # For ReRAM, all parasitics account for the additional 0.295um between | |
| # metal1 and metal2 | |
| defaultareacap allm2 metal2 12.52 | |
| defaultperimeter allm2 metal2 27.90 | |
| defaultoverlap allm2 metal2 nwell,pwell well 12.52 | |
| defaultsideoverlap allm2 metal2 nwell,pwell well 27.90 | |
| #metal2->diff | |
| defaultoverlap allm2 metal2 allactivenonfet active 13.60 | |
| defaultsideoverlap allm2 metal2 allactivenonfet active 29.35 | |
| #metal2->poly | |
| defaultoverlap allm2 metal2 allpolynonres active 17.11 | |
| defaultsideoverlap allm2 metal2 allpolynonres active 28.80 | |
| defaultsideoverlap *poly active allm2 metal2 7.52 | |
| #metal2->locali | |
| defaultoverlap allm2 metal2 allli locali 24.68 | |
| defaultsideoverlap allm2 metal2 allli locali 30.42 | |
| defaultsideoverlap allli locali allm2 metal2 14.29 | |
| #metal2->metal1 | |
| defaultoverlap allm2 metal2 allm1 metal1 51.37 | |
| defaultsideoverlap allm2 metal2 allm1 metal1 25.73 | |
| defaultsideoverlap allm1 metal1 allm2 metal2 18.50 | |
| #else (!RERAM) | |
| defaultareacap allm2 metal2 14.0 | |
| defaultperimeter allm2 metal2 32.60 | |
| defaultoverlap allm2 metal2 nwell,pwell well 14.0 | |
| defaultsideoverlap allm2 metal2 nwell,pwell well 32.60 | |
| #metal2->diff | |
| defaultoverlap allm2 metal2 allactivenonfet active 16.8 | |
| defaultsideoverlap allm2 metal2 allactivenonfet active 34.16 | |
| #metal2->poly | |
| defaultoverlap allm2 metal2 allpolynonres active 18.9 | |
| defaultsideoverlap allm2 metal2 allpolynonres active 34.46 | |
| defaultsideoverlap *poly active allm2 metal2 9.34 | |
| #metal2->locali | |
| defaultoverlap allm2 metal2 allli locali 28.6 | |
| defaultsideoverlap allm2 metal2 allli locali 39.67 | |
| defaultsideoverlap allli locali allm2 metal2 18.63 | |
| #metal2->metal1 | |
| defaultoverlap allm2 metal2 allm1 metal1 80.4 | |
| defaultsideoverlap allm2 metal2 allm1 metal1 53.85 | |
| defaultsideoverlap allm1 metal1 allm2 metal2 38.70 | |
| #endif (!RERAM) | |
| #metal3 | |
| defaultsidewall allm3 metal3 52.0 0.30 | |
| #ifdef RERAM | |
| defaultareacap allm3 metal3 9.84 | |
| defaultperimeter allm3 metal3 32.60 | |
| defaultoverlap allm3 metal3 nwell,pwell well 9.84 | |
| defaultsideoverlap allm3 metal3 nwell,pwell well 32.60 | |
| #metal3->diff | |
| defaultoverlap allm3 metal3 allactive active 10.60 | |
| defaultsideoverlap allm3 metal3 allactive active 33.73 | |
| #metal3->poly | |
| defaultoverlap allm3 metal3 allpolynonres active 12.51 | |
| defaultsideoverlap allm3 metal3 allpolynonres active 33.89 | |
| defaultsideoverlap *poly active allm3 metal3 7.15 | |
| #metal3->locali | |
| defaultoverlap allm3 metal3 allli locali 15.90 | |
| defaultsideoverlap allm3 metal3 allli locali 35.72 | |
| defaultsideoverlap allli locali allm3 metal3 11.53 | |
| #metal3->metal1 | |
| defaultoverlap allm3 metal3 allm1 metal1 24.01 | |
| defaultsideoverlap allm3 metal3 allm1 metal1 38.11 | |
| defaultsideoverlap allm1 metal1 allm3 metal3 18.55 | |
| #else (!RERAM) | |
| defaultareacap allm3 metal3 10.2 | |
| defaultperimeter allm3 metal3 36.05 | |
| defaultoverlap allm3 metal3 nwell,pwell well 10.2 | |
| defaultsideoverlap allm3 metal3 nwell,pwell well 36.05 | |
| #metal3->diff | |
| defaultoverlap allm3 metal3 allactive active 11.7 | |
| defaultsideoverlap allm3 metal3 allactive active 37.59 | |
| #metal3->poly | |
| defaultoverlap allm3 metal3 allpolynonres active 12.6 | |
| defaultsideoverlap allm3 metal3 allpolynonres active 38.28 | |
| defaultsideoverlap *poly active allm3 metal3 8.07 | |
| #metal3->locali | |
| defaultoverlap allm3 metal3 allli locali 16.3 | |
| defaultsideoverlap allm3 metal3 allli locali 41.75 | |
| defaultsideoverlap allli locali allm3 metal3 13.48 | |
| #metal3->metal1 | |
| defaultoverlap allm3 metal3 allm1 metal1 25.8 | |
| defaultsideoverlap allm3 metal3 allm1 metal1 48.82 | |
| defaultsideoverlap allm1 metal1 allm3 metal3 23.76 | |
| #endif (!RERAM) | |
| #metal3->metal2 | |
| defaultoverlap allm3 metal3 allm2 metal2 59.5 | |
| defaultsideoverlap allm3 metal3 allm2 metal2 61.18 | |
| defaultsideoverlap allm2 metal2 allm3 metal3 38.92 | |
| #ifdef METAL5 | |
| #metal4 | |
| defaultsidewall allm4 metal4 53.7 0.30 | |
| #ifdef RERAM | |
| defaultareacap allm4 metal4 6.92 | |
| defaultperimeter allm4 metal4 30.18 | |
| defaultoverlap allm4 metal4 nwell,pwell well 6.92 | |
| defaultsideoverlap allm4 metal4 nwell,pwell well 30.18 | |
| #metal4->diff | |
| defaultoverlap allm4 metal4 allactivenonfet active 7.33 | |
| defaultsideoverlap allm4 metal4 allactivenonfet active 30.88 | |
| #metal4->poly | |
| defaultoverlap allm4 metal4 allpolynonres active 8.14 | |
| defaultsideoverlap allm4 metal4 allpolynonres active 30.99 | |
| defaultsideoverlap *poly active allm4 metal4 5.17 | |
| #metal4->locali | |
| defaultoverlap allm4 metal4 allli locali 9.49 | |
| defaultsideoverlap allm4 metal4 allli locali 32.30 | |
| defaultsideoverlap allli locali allm4 metal4 8.25 | |
| #metal4->metal1 | |
| defaultoverlap allm4 metal4 allm1 metal1 11.81 | |
| defaultsideoverlap allm4 metal4 allm1 metal1 33.92 | |
| defaultsideoverlap allm1 metal1 allm4 metal4 13.08 | |
| #else (!RERAM) | |
| defaultareacap allm4 metal4 7.28 | |
| defaultperimeter allm4 metal4 32.39 | |
| defaultoverlap allm4 metal4 nwell,pwell well 7.28 | |
| defaultsideoverlap allm4 metal4 nwell,pwell well 32.39 | |
| #metal4->diff | |
| defaultoverlap allm4 metal4 allactivenonfet active 7.98 | |
| defaultsideoverlap allm4 metal4 allactivenonfet active 33.54 | |
| #metal4->poly | |
| defaultoverlap allm4 metal4 allpolynonres active 8.42 | |
| defaultsideoverlap allm4 metal4 allpolynonres active 33.59 | |
| defaultsideoverlap *poly active allm4 metal4 5.60 | |
| #metal4->locali | |
| defaultoverlap allm4 metal4 allli locali 9.92 | |
| defaultsideoverlap allm4 metal4 allli locali 35.49 | |
| defaultsideoverlap allli locali allm4 metal4 9.06 | |
| #metal4->metal1 | |
| defaultoverlap allm4 metal4 allm1 metal1 12.8 | |
| defaultsideoverlap allm4 metal4 allm1 metal1 38.29 | |
| defaultsideoverlap allm1 metal1 allm4 metal4 14.77 | |
| #endif (!RERAM) | |
| #metal4->metal2 | |
| defaultoverlap allm4 metal4 allm2 metal2 17.8 | |
| defaultsideoverlap allm4 metal4 allm2 metal2 42.08 | |
| defaultsideoverlap allm2 metal2 allm4 metal4 20.26 | |
| #metal4->metal3 | |
| defaultoverlap allm4 metal4 allm3 metal3 57.6 | |
| defaultsideoverlap allm4 metal4 allm3 metal3 59.42 | |
| defaultsideoverlap allm3 metal3 allm4 metal4 35.93 | |
| #metal5 | |
| defaultsidewall allm5 metal5 81.5 1.6 | |
| #ifdef RERAM | |
| defaultareacap allm5 metal5 5.34 | |
| defaultperimeter allm5 metal5 32.85 | |
| defaultoverlap allm5 metal5 nwell,pwell well 5.34 | |
| defaultsideoverlap allm5 metal5 nwell,pwell well 32.85 | |
| #metal5->diff | |
| defaultoverlap allm5 metal5 allactivenonfet active 5.54 | |
| defaultsideoverlap allm5 metal5 allactivenonfet active 33.48 | |
| #metal5->poly | |
| defaultoverlap allm5 metal5 allpolynonres active 6.06 | |
| defaultsideoverlap allm5 metal5 allpolynonres active 33.55 | |
| defaultsideoverlap *poly active allm5 metal5 5.46 | |
| #metal5->locali | |
| defaultoverlap allm5 metal5 allli locali 6.80 | |
| defaultsideoverlap allm5 metal5 allli locali 34.87 | |
| defaultsideoverlap allli locali allm5 metal5 6.47 | |
| #metal5->metal1 | |
| defaultoverlap allm5 metal5 allm1 metal1 7.98 | |
| defaultsideoverlap allm5 metal5 allm1 metal1 36.36 | |
| defaultsideoverlap allm1 metal1 allm5 metal5 10.12 | |
| #else (!RERAM) | |
| defaultareacap allm5 metal5 5.56 | |
| defaultperimeter allm5 metal5 34.65 | |
| defaultoverlap allm5 metal5 nwell,pwell well 5.56 | |
| defaultsideoverlap allm5 metal5 nwell,pwell well 34.65 | |
| #metal5->diff | |
| defaultoverlap allm5 metal5 allactivenonfet active 5.96 | |
| defaultsideoverlap allm5 metal5 allactivenonfet active 35.55 | |
| #metal5->poly | |
| defaultoverlap allm5 metal5 allpolynonres active 6.2 | |
| defaultsideoverlap allm5 metal5 allpolynonres active 35.59 | |
| defaultsideoverlap *poly active allm5 metal5 5.79 | |
| #metal5->locali | |
| defaultoverlap allm5 metal5 allli locali 6.97 | |
| defaultsideoverlap allm5 metal5 allli locali 37.24 | |
| defaultsideoverlap allli locali allm5 metal5 6.91 | |
| #metal5->metal1 | |
| defaultoverlap allm5 metal5 allm1 metal1 8.26 | |
| defaultsideoverlap allm5 metal5 allm1 metal1 39.30 | |
| defaultsideoverlap allm1 metal1 allm5 metal5 10.94 | |
| #endif (!RERAM) | |
| #metal5->metal2 | |
| defaultoverlap allm5 metal5 allm2 metal2 10.1 | |
| defaultsideoverlap allm5 metal5 allm2 metal2 41.75 | |
| defaultsideoverlap allm2 metal2 allm5 metal5 14.37 | |
| #metal5->metal3 | |
| defaultoverlap allm5 metal5 allm3 metal3 16.7 | |
| defaultsideoverlap allm5 metal5 allm3 metal3 48.75 | |
| defaultsideoverlap allm3 metal3 allm5 metal5 25.06 | |
| #metal5->metal4 | |
| defaultoverlap allm5 metal5 allm4 metal4 48.7 | |
| defaultsideoverlap allm5 metal5 allm4 metal4 70.26 | |
| defaultsideoverlap allm4 metal4 allm5 metal5 39.86 | |
| #endif (METAL5) | |
| #------------------------------------------------------------------------- | |
| # Parasitic capacitance values for maximum corner | |
| #------------------------------------------------------------------------- | |
| variants (hrhc),(lrhc) | |
| # Maximum corner capacitances | |
| #deep n-well | |
| defaultareacap dnwell dwell 120 | |
| #p-well | |
| defaultoverlap pwell well dnwell dwell 120 | |
| #n-well | |
| # NOTE: This value not found in PEX files | |
| defaultareacap nwell well dnwell dwell 120 | |
| #n-active | |
| # Rely on device models to capture *ndiff area cap | |
| # Do not extract parasitics from resistors | |
| # defaultareacap allnactivenonfet active 790 | |
| # defaultperimeter allnactivenonfet active 280 | |
| #p-active | |
| # Rely on device models to capture *pdiff area cap | |
| # Do not extract parasitics from resistors | |
| # defaultareacap allpactivenonfet active 810 | |
| # defaultperimeter allpactivenonfet active 300 | |
| #poly | |
| # Do not extract parasitics from resistors | |
| # defaultsidewall allpolynonfet active 22 | |
| # defaultareacap allpolynonfet active 106 | |
| # defaultperimeter allpolynonfet active 57 | |
| defaultsidewall *poly active 17.0 0.21 | |
| defaultareacap *poly active 155.0 | |
| defaultperimeter *poly active 64.82 | |
| defaultoverlap *poly active nwell,pwell well 155.0 | |
| defaultsideoverlap *poly active nwell,pwell well 64.82 | |
| #locali | |
| defaultsidewall allli locali 28.7 0.17 | |
| defaultareacap allli locali 49.7 | |
| defaultperimeter allli locali 47.02 | |
| defaultoverlap allli locali nwell,pwell well 49.7 | |
| defaultsideoverlap allli locali nwell,pwell well 47.02 | |
| #locali->diff | |
| defaultoverlap allli locali allactivenonfet active 70.9 | |
| defaultsideoverlap allli locali allactivenonfet active 49.94 | |
| #locali->poly | |
| defaultoverlap allli locali allpolynonres active 174.0 | |
| defaultsideoverlap allli locali allpolynonres active 66.60 | |
| defaultsideoverlap *poly active allli locali 32.29 | |
| #metal1 | |
| defaultsidewall allm1 metal1 37.6 0.14 | |
| defaultareacap allm1 metal1 35.7 | |
| defaultperimeter allm1 metal1 49.59 | |
| defaultoverlap allm1 metal1 nwell,pwell well 35.7 | |
| defaultsideoverlap allm1 metal1 nwell,pwell well 49.59 | |
| #metal1->diff | |
| defaultoverlap allm1 metal1 allactivenonfet active 45.4 | |
| defaultsideoverlap allm1 metal1 allactivenonfet active 51.17 | |
| #metal1->poly | |
| defaultoverlap allm1 metal1 allpolynonres active 73.2 | |
| defaultsideoverlap allm1 metal1 allpolynonres active 59.78 | |
| defaultsideoverlap *poly active allm1 metal1 21.36 | |
| #metal1->locali | |
| defaultoverlap allm1 metal1 allli locali 215.0 | |
| defaultsideoverlap allm1 metal1 allli locali 80.12 | |
| defaultsideoverlap allli locali allm1 metal1 46.73 | |
| #metal2 | |
| defaultsidewall allm2 metal2 40.2 0.14 | |
| #ifdef RERAM | |
| # For ReRAM, all parasitics account for the additional 0.295um between | |
| # metal1 and metal2 | |
| defaultareacap allm2 metal2 20.49 | |
| defaultperimeter allm2 metal2 40.13 | |
| defaultoverlap allm2 metal2 nwell,pwell well 20.49 | |
| defaultsideoverlap allm2 metal2 nwell,pwell well 40.13 | |
| #metal2->diff | |
| defaultoverlap allm2 metal2 allactivenonfet active 23.52 | |
| defaultsideoverlap allm2 metal2 allactivenonfet active 40.77 | |
| #metal2->poly | |
| defaultoverlap allm2 metal2 allpolynonres active 29.66 | |
| defaultsideoverlap allm2 metal2 allpolynonres active 42.87 | |
| defaultsideoverlap *poly active allm2 metal2 11.20 | |
| #metal2->locali | |
| defaultoverlap allm2 metal2 allli locali 40.10 | |
| defaultsideoverlap allm2 metal2 allli locali 42.61 | |
| defaultsideoverlap allli locali allm2 metal2 20.01 | |
| #metal2->metal1 | |
| defaultoverlap allm2 metal2 allm1 metal1 149.6 | |
| defaultsideoverlap allm2 metal2 allm1 metal1 48.92 | |
| defaultsideoverlap allm1 metal1 allm2 metal2 35.16 | |
| #else (!RERAM) | |
| defaultareacap allm2 metal2 23.5 | |
| defaultperimeter allm2 metal2 46.03 | |
| defaultoverlap allm2 metal2 nwell,pwell well 23.5 | |
| defaultsideoverlap allm2 metal2 nwell,pwell well 46.03 | |
| #metal2->diff | |
| defaultoverlap allm2 metal2 allactivenonfet active 27.4 | |
| defaultsideoverlap allm2 metal2 allactivenonfet active 47.45 | |
| #metal2->poly | |
| defaultoverlap allm2 metal2 allpolynonres active 35.5 | |
| defaultsideoverlap allm2 metal2 allpolynonres active 51.29 | |
| defaultsideoverlap *poly active allm2 metal2 13.90 | |
| #metal2->locali | |
| defaultoverlap allm2 metal2 allli locali 52.3 | |
| defaultsideoverlap allm2 metal2 allli locali 55.56 | |
| defaultsideoverlap allli locali allm2 metal2 26.10 | |
| #metal2->metal1 | |
| defaultoverlap allm2 metal2 allm1 metal1 313.0 | |
| defaultsideoverlap allm2 metal2 allm1 metal1 102.37 | |
| defaultsideoverlap allm1 metal1 allm2 metal2 73.576 | |
| #endif (!RERAM) | |
| #metal3 | |
| defaultsidewall allm3 metal3 60.6 0.30 | |
| #ifdef RERAM | |
| defaultareacap allm3 metal3 14.74 | |
| defaultperimeter allm3 metal3 42.85 | |
| defaultoverlap allm3 metal3 nwell,pwell well 14.74 | |
| defaultsideoverlap allm3 metal3 nwell,pwell well 42.85 | |
| #metal3->diff | |
| defaultoverlap allm3 metal3 allactive active 16.24 | |
| defaultsideoverlap allm3 metal3 allactive active 43.24 | |
| #metal3->poly | |
| defaultoverlap allm3 metal3 allpolynonres active 18.86 | |
| defaultsideoverlap allm3 metal3 allpolynonres active 44.66 | |
| defaultsideoverlap *poly active allm3 metal3 9.42 | |
| #metal3->locali | |
| defaultoverlap allm3 metal3 allli locali 22.51 | |
| defaultsideoverlap allm3 metal3 allli locali 45.60 | |
| defaultsideoverlap allli locali allm3 metal3 14.72 | |
| #metal3->metal1 | |
| defaultoverlap allm3 metal3 allm1 metal1 35.29 | |
| defaultsideoverlap allm3 metal3 allm1 metal1 49.09 | |
| defaultsideoverlap allm1 metal1 allm3 metal3 23.90 | |
| #else (!RERAM) | |
| defaultareacap allm3 metal3 16.3 | |
| defaultperimeter allm3 metal3 47.38 | |
| defaultoverlap allm3 metal3 nwell,pwell well 16.3 | |
| defaultsideoverlap allm3 metal3 nwell,pwell well 47.38 | |
| #metal3->diff | |
| defaultoverlap allm3 metal3 allactive active 18.1 | |
| defaultsideoverlap allm3 metal3 allactive active 48.19 | |
| #metal3->poly | |
| defaultoverlap allm3 metal3 allpolynonres active 21.3 | |
| defaultsideoverlap allm3 metal3 allpolynonres active 50.44 | |
| defaultsideoverlap *poly active allm3 metal3 10.64 | |
| #metal3->locali | |
| defaultoverlap allm3 metal3 allli locali 26.3 | |
| defaultsideoverlap allm3 metal3 allli locali 53.29 | |
| defaultsideoverlap allli locali allm3 metal3 17.20 | |
| #metal3->metal1 | |
| defaultoverlap allm3 metal3 allm1 metal1 45.2 | |
| defaultsideoverlap allm3 metal3 allm1 metal1 62.88 | |
| defaultsideoverlap allm1 metal1 allm3 metal3 30.61 | |
| #endif (!RERAM) | |
| #metal3->metal2 | |
| defaultoverlap allm3 metal3 allm2 metal2 131.0 | |
| defaultsideoverlap allm3 metal3 allm2 metal2 82.67 | |
| defaultsideoverlap allm2 metal2 allm3 metal3 52.59 | |
| #ifdef METAL5 | |
| #metal4 | |
| defaultsidewall allm4 metal4 65.4 0.30 | |
| #ifdef RERAM | |
| defaultareacap allm4 metal4 9.97 | |
| defaultperimeter allm4 metal4 39.49 | |
| defaultoverlap allm4 metal4 nwell,pwell well 9.97 | |
| defaultsideoverlap allm4 metal4 nwell,pwell well 39.49 | |
| #metal4->diff | |
| defaultoverlap allm4 metal4 allactivenonfet active 10.58 | |
| defaultsideoverlap allm4 metal4 allactivenonfet active 39.91 | |
| #metal4->poly | |
| defaultoverlap allm4 metal4 allpolynonres active 11.63 | |
| defaultsideoverlap allm4 metal4 allpolynonres active 40.58 | |
| defaultsideoverlap *poly active allm4 metal4 6.76 | |
| #metal4->locali | |
| defaultoverlap allm4 metal4 allli locali 13.01 | |
| defaultsideoverlap allm4 metal4 allli locali 41.04 | |
| defaultsideoverlap allli locali allm4 metal4 10.48 | |
| #metal4->metal1 | |
| defaultoverlap allm4 metal4 allm1 metal1 16.39 | |
| defaultsideoverlap allm4 metal4 allm1 metal1 42.58 | |
| defaultsideoverlap allm1 metal1 allm4 metal4 16.42 | |
| #else (!RERAM) | |
| defaultareacap allm4 metal4 10.7 | |
| defaultperimeter allm4 metal4 42.40 | |
| defaultoverlap allm4 metal4 nwell,pwell well 10.7 | |
| defaultsideoverlap allm4 metal4 nwell,pwell well 42.40 | |
| #metal4->diff | |
| defaultoverlap allm4 metal4 allactivenonfet active 11.4 | |
| defaultsideoverlap allm4 metal4 allactivenonfet active 43.0 | |
| #metal4->poly | |
| defaultoverlap allm4 metal4 allpolynonres active 12.6 | |
| defaultsideoverlap allm4 metal4 allpolynonres active 43.99 | |
| defaultsideoverlap *poly active allm4 metal4 7.33 | |
| #metal4->locali | |
| defaultoverlap allm4 metal4 allli locali 14.3 | |
| defaultsideoverlap allm4 metal4 allli locali 45.09 | |
| defaultsideoverlap allli locali allm4 metal4 11.51 | |
| #metal4->metal1 | |
| defaultoverlap allm4 metal4 allm1 metal1 18.5 | |
| defaultsideoverlap allm4 metal4 allm1 metal1 48.07 | |
| defaultsideoverlap allm1 metal1 allm4 metal4 18.55 | |
| #endif (!RERAM) | |
| #metal4->metal2 | |
| defaultoverlap allm4 metal4 allm2 metal2 25.2 | |
| defaultsideoverlap allm4 metal4 allm2 metal2 51.98 | |
| defaultsideoverlap allm2 metal2 allm4 metal4 25.03 | |
| #metal4->metal3 | |
| defaultoverlap allm4 metal4 allm3 metal3 191.0 | |
| defaultsideoverlap allm4 metal4 allm3 metal3 92.12 | |
| defaultsideoverlap allm3 metal3 allm4 metal4 55.70 | |
| #metal5 | |
| defaultsidewall allm5 metal5 118.7 1.6 | |
| #ifdef RERAM | |
| defaultareacap allm5 metal5 7.36 | |
| defaultperimeter allm5 metal5 42.58 | |
| defaultoverlap allm5 metal5 nwell,pwell well 7.36 | |
| defaultsideoverlap allm5 metal5 nwell,pwell well 42.58 | |
| #metal5->diff | |
| defaultoverlap allm5 metal5 allactivenonfet active 7.70 | |
| defaultsideoverlap allm5 metal5 allactivenonfet active 43.01 | |
| #metal5->poly | |
| defaultoverlap allm5 metal5 allpolynonres active 8.25 | |
| defaultsideoverlap allm5 metal5 allpolynonres active 43.67 | |
| defaultsideoverlap *poly active allm5 metal5 7.10 | |
| #metal5->locali | |
| defaultoverlap allm5 metal5 allli locali 8.88 | |
| defaultsideoverlap allm5 metal5 allli locali 44.08 | |
| defaultsideoverlap allli locali allm5 metal5 8.18 | |
| #metal5->metal1 | |
| defaultoverlap allm5 metal5 allm1 metal1 10.36 | |
| defaultsideoverlap allm5 metal5 allm1 metal1 45.73 | |
| defaultsideoverlap allm1 metal1 allm5 metal5 12.73 | |
| #else (!RERAM) | |
| defaultareacap allm5 metal5 7.76 | |
| defaultperimeter allm5 metal5 44.91 | |
| defaultoverlap allm5 metal5 nwell,pwell well 7.76 | |
| defaultsideoverlap allm5 metal5 nwell,pwell well 44.91 | |
| #metal5->diff | |
| defaultoverlap allm5 metal5 allactivenonfet active 8.14 | |
| defaultsideoverlap allm5 metal5 allactivenonfet active 45.47 | |
| #metal5->poly | |
| defaultoverlap allm5 metal5 allpolynonres active 8.74 | |
| defaultsideoverlap allm5 metal5 allpolynonres active 46.31 | |
| defaultsideoverlap *poly active allm5 metal5 7.53 | |
| #metal5->locali | |
| defaultoverlap allm5 metal5 allli locali 9.48 | |
| defaultsideoverlap allm5 metal5 allli locali 47.09 | |
| defaultsideoverlap allli locali allm5 metal5 8.74 | |
| #metal5->metal1 | |
| defaultoverlap allm5 metal5 allm1 metal1 11.2 | |
| defaultsideoverlap allm5 metal5 allm1 metal1 49.44 | |
| defaultsideoverlap allm1 metal1 allm5 metal5 13.76 | |
| #endif (!RERAM) | |
| #metal5->metal2 | |
| defaultoverlap allm5 metal5 allm2 metal2 13.3 | |
| defaultsideoverlap allm5 metal5 allm2 metal2 51.69 | |
| defaultsideoverlap allm2 metal2 allm5 metal5 17.79 | |
| #metal5->metal3 | |
| defaultoverlap allm5 metal5 allm3 metal3 24.6 | |
| defaultsideoverlap allm5 metal5 allm3 metal3 63.24 | |
| defaultsideoverlap allm3 metal3 allm5 metal5 32.51 | |
| #metal5->metal4 | |
| defaultoverlap allm5 metal5 allm4 metal4 115.0 | |
| defaultsideoverlap allm5 metal5 allm4 metal4 109.69 | |
| defaultsideoverlap allm4 metal4 allm5 metal5 62.22 | |
| #endif (METAL5) | |
| #--------------------------------------------------------- | |
| variants * | |
| #ifdef REDISTRIBUTION | |
| #endif (REDISTRIBUTION) | |
| # Devices: Base models (not subcircuit wrappers) | |
| variants (),(si),(hrhc),(lrhc),(hrlc),(lrlc) | |
| device msubcircuit sky130_fd_pr__pfet_01v8 pfet,scpfet \ | |
| *pdiff,pdiffres *pdiff,pdiffres nwell error l=l w=w \ | |
| a1=as p1=ps a2=ad p2=pd | |
| device msubcircuit sky130_fd_pr__special_pfet_latch ppu \ | |
| *pdiff,pdiffres *pdiff,pdiffres nwell error l=l w=w \ | |
| a1=as p1=ps a2=ad p2=pd | |
| device msubcircuit sky130_fd_pr__pfet_01v8_lvt pfetlvt \ | |
| *pdiff,pdiffres *pdiff,pdiffres nwell error l=l w=w \ | |
| a1=as p1=ps a2=ad p2=pd | |
| device msubcircuit sky130_fd_pr__pfet_01v8_mvt pfetmvt \ | |
| *pdiff,pdiffres *pdiff,pdiffres nwell error l=l w=w \ | |
| a1=as p1=ps a2=ad p2=pd | |
| device msubcircuit sky130_fd_pr__pfet_01v8_hvt pfethvt,scpfethvt \ | |
| *pdiff,pdiffres *pdiff,pdiffres nwell error w>=0.42 l=l \ | |
| w=w a1=as p1=ps a2=ad p2=pd | |
| device msubcircuit sky130_fd_pr__special_pfet_01v8_hvt scpfethvt \ | |
| *pdiff,pdiffres *pdiff,pdiffres nwell error w<0.42 l=l \ | |
| w=w a1=as p1=ps a2=ad p2=pd | |
| device msubcircuit sky130_fd_pr__nfet_01v8 nfet,scnfet \ | |
| *ndiff,ndiffres *ndiff,ndiffres pwell,space/w error \ | |
| w>=0.42 l=l w=w a1=as p1=ps a2=ad p2=pd | |
| device msubcircuit sky130_fd_pr__special_nfet_01v8 scnfet \ | |
| *ndiff,ndiffres *ndiff,ndiffres pwell,space/w error \ | |
| w<0.42 l=l w=w a1=as p1=ps a2=ad p2=pd | |
| device msubcircuit sky130_fd_pr__special_nfet_latch npd \ | |
| *ndiff,ndiffres *ndiff,ndiffres pwell,space/w error l=l w=w \ | |
| a1=as p1=ps a2=ad p2=pd | |
| device msubcircuit sky130_fd_pr__special_nfet_latch npd \ | |
| *ndiff,ndiffres *srampvar pwell,space/w error l=l w=w \ | |
| a1=as p1=ps a2=ad p2=pd | |
| device msubcircuit sky130_fd_pr__special_nfet_pass npass \ | |
| *ndiff,ndiffres *ndiff,ndiffres pwell,space/w error l=l w=w \ | |
| a1=as p1=ps a2=ad p2=pd | |
| device msubcircuit sky130_fd_pr__nfet_01v8_lvt nfetlvt,scnfetlvt \ | |
| *ndiff,ndiffres *ndiff,ndiffres pwell,space/w error l=l w=w \ | |
| a1=as p1=ps a2=ad p2=pd | |
| device msubcircuit sky130_fd_bs_flash__special_sonosfet_star nsonos \ | |
| *ndiff,ndiffres *ndiff,ndiffres pwell,space/w error l=l w=w \ | |
| a1=as p1=ps a2=ad p2=pd | |
| device subcircuit sky130_fd_pr__cap_var_lvt varactor \ | |
| *nndiff pwell,space/w error l=l w=w | |
| device subcircuit sky130_fd_pr__cap_var_hvt varhvt \ | |
| *nndiff pwell,space/w error l=l w=w | |
| device subcircuit sky130_fd_pr__cap_var mvvaractor \ | |
| *mvnndiff pwell,space/w error l=l w=w | |
| # Bipolars | |
| device msubcircuit sky130_fd_pr__npn_05v5 npn *ndiff dnwell space/w error a1=area | |
| device msubcircuit sky130_fd_pr__npn_05v5_W1p00L1p00 npn *ndiff dnwell space/w \ | |
| error a1>0.99 a1<1.01 | |
| device msubcircuit sky130_fd_pr__npn_05v5_W1p00L2p00 npn *ndiff dnwell space/w \ | |
| error a1>1.99 a1<2.01 | |
| device msubcircuit sky130_fd_pr__pnp_05v5 pnp *pdiff pwell,space/w a1=area | |
| device msubcircuit sky130_fd_pr__pnp_05v5_W0p68L0p68 pnp *pdiff \ | |
| pwell,space/w a1>0.45 a1<0.47 | |
| device msubcircuit sky130_fd_pr__pnp_05v5_W3p40L3p40 pnp *pdiff \ | |
| pwell,space/w a1>11.55 a1<11.57 | |
| device msubcircuit sky130_fd_pr__npn_11v0 npn *mvndiff dnwell space/w error a1=area | |
| device msubcircuit sky130_fd_pr__npn_11v0_W1p00L1p00 npn *mvndiff \ | |
| dnwell space/w error a1>0.99 a1<1.01 | |
| # Ignore the extended-drain FET geometry that forms part of the high-voltage | |
| # bipolar devices. | |
| device msubcircuit Ignore mvnfet *mvndiff,mvndiffres dnwell pwell,space/w error +npn,pnp | |
| device msubcircuit Ignore mvpfet *mvpdiff,mvpdiffres pwell,space/w nwell error +npn,pnp | |
| # Extended drain devices (must appear before the regular devices) | |
| device msubcircuit sky130_fd_pr__nfet_g5v0d16v0 mvnfet *mvndiff \ | |
| extdrain,*mvnsd pwell,space/w error l=l w=w a1=as p1=ps a2=ad p2=pd | |
| device msubcircuit sky130_fd_pr__pfet_g5v0d16v0 mvpfet *mvpdiff \ | |
| extdrain,*mvpsd nwell error l=l w=w a1=as p1=ps a2=ad p2=pd | |
| device msubcircuit sky130_fd_pr__nfet_20v0_nvt mvnnfet *mvndiff,mvndiffres \ | |
| dnwell pwell,space/w error l=l w=w a1=as a2=ad p1=ps p2=pd | |
| device msubcircuit sky130_fd_pr__nfet_20v0 mvnfet *mvndiff,mvndiffres \ | |
| dnwell pwell,space/w error l=l w=w a1=as a2=ad p1=ps p2=pd | |
| device msubcircuit sky130_fd_pr__pfet_20v0 mvpfet *mvpdiff,mvpdiffres \ | |
| pwell,space/w nwell error l=l w=w a1=as a2=ad p1=ps p2=pd | |
| device msubcircuit sky130_fd_pr__pfet_g5v0d10v5 mvpfet \ | |
| *mvpdiff,mvpdiffres *mvpdiff,mvpdiffres nwell error l=l w=w \ | |
| a1=as p1=ps a2=ad p2=pd | |
| device msubcircuit sky130_fd_pr__nfet_g5v0d10v5 mvnfet \ | |
| *mvndiff,mvndiffres *mvndiff,mvndiffres pwell,space/w error l=l w=w \ | |
| a1=as p1=ps a2=ad p2=pd | |
| device msubcircuit sky130_fd_pr__nfet_05v0_nvt mvnnfet \ | |
| *mvndiff,mvndiffres *mvndiff,mvndiffres pwell,space/w error l=l w=w \ | |
| a1=as p1=ps a2=ad p2=pd | |
| device msubcircuit sky130_fd_pr__nfet_03v3_nvt nnfet \ | |
| *mvndiff,mvndiffres *mvndiff,mvndiffres pwell,space/w error l=l w=w \ | |
| a1=as p1=ps a2=ad p2=pd | |
| device msubcircuit sky130_fd_pr__esd_nfet_g5v0d10v5 mvnfetesd \ | |
| *mvndiff,mvndiffres *mvndiff,mvndiffres pwell,space/w error l=l w=w \ | |
| a1=as p1=ps a2=ad p2=pd | |
| device msubcircuit sky130_fd_pr__esd_pfet_g5v0d10v5 mvpfetesd \ | |
| *mvpdiff,mvpdiffres *mvpdiff,mvpdiffres nwell error l=l w=w \ | |
| a1=as p1=ps a2=ad p2=pd | |
| device resistor sky130_fd_pr__res_generic_l1 rli1 *li,coreli | |
| device resistor sky130_fd_pr__res_generic_m1 rmetal1 *metal1 | |
| device resistor sky130_fd_pr__res_generic_m2 rmetal2 *metal2 | |
| device resistor sky130_fd_pr__res_generic_m3 rmetal3 *metal3 | |
| #ifdef METAL5 | |
| device resistor sky130_fd_pr__res_generic_m4 rm4 *m4 | |
| device resistor sky130_fd_pr__res_generic_m5 rm5 *m5 | |
| #endif (METAL5) | |
| device ndiode sky130_fd_pr__model__parasitic__diode_ps2dn \ | |
| photo pwell,space/w error a=area | |
| device rsubcircuit sky130_fd_pr__res_high_po xhrpoly \ | |
| xpc nwell,pwell,space/w error l=l+0.16 w=w | |
| device rsubcircuit sky130_fd_pr__res_high_po_0p35 xhrpoly \ | |
| xpc nwell,pwell,space/w error w>0.34 w<0.36 l=l+0.16 | |
| device rsubcircuit sky130_fd_pr__res_high_po_0p69 xhrpoly \ | |
| xpc nwell,pwell,space/w error w>0.68 w<0.70 l=l+0.16 | |
| device rsubcircuit sky130_fd_pr__res_high_po_1p41 xhrpoly \ | |
| xpc nwell,pwell,space/w error w>1.40 w<1.42 l=l+0.16 | |
| device rsubcircuit sky130_fd_pr__res_high_po_2p85 xhrpoly \ | |
| xpc nwell,pwell,space/w error w>2.84 w<2.86 l=l+0.16 | |
| device rsubcircuit sky130_fd_pr__res_high_po_5p73 xhrpoly \ | |
| xpc nwell,pwell,space/w error w>5.72 w<5.74 l=l+0.16 | |
| device rsubcircuit sky130_fd_pr__res_xhigh_po uhrpoly \ | |
| xpc nwell,pwell,space/w error l=l+0.16 w=w | |
| device rsubcircuit sky130_fd_pr__res_xhigh_po_0p35 uhrpoly \ | |
| xpc nwell,pwell,space/w error w>0.34 w<0.36 l=l+0.16 | |
| device rsubcircuit sky130_fd_pr__res_xhigh_po_0p69 uhrpoly \ | |
| xpc nwell,pwell,space/w error w>0.68 w<0.70 l=l+0.16 | |
| device rsubcircuit sky130_fd_pr__res_xhigh_po_1p41 uhrpoly \ | |
| xpc nwell,pwell,space/w error w>1.40 w<1.42 l=l+0.16 | |
| device rsubcircuit sky130_fd_pr__res_xhigh_po_2p85 uhrpoly \ | |
| xpc nwell,pwell,space/w error w>2.84 w<2.86 l=l+0.16 | |
| device rsubcircuit sky130_fd_pr__res_xhigh_po_5p73 uhrpoly \ | |
| xpc nwell,pwell,space/w error w>5.72 w<5.74 l=l+0.16 | |
| device rsubcircuit sky130_fd_pr__res_generic_nd ndiffres \ | |
| *ndiff pwell,space/w error l=l w=w | |
| device rsubcircuit sky130_fd_pr__res_generic_pd pdiffres \ | |
| *pdiff nwell error l=l w=w | |
| device rsubcircuit sky130_fd_pr__res_iso_pw rpw \ | |
| pwell dnwell error l=l w=w | |
| device rsubcircuit sky130_fd_pr__res_generic_nd__hv mvndiffres \ | |
| *mvndiff pwell,space/w error l=l w=w | |
| device rsubcircuit sky130_fd_pr__res_generic_pd__hv mvpdiffres \ | |
| *mvpdiff nwell error l=l w=w | |
| device rsubcircuit sky130_fd_pr__res_generic_po rmp *poly l=l w=w | |
| device rsubcircuit sky130_fd_pr__res_generic_po mrp1 *poly l=l w=w | |
| # NOTE: SkyWater diode models have bizarre units requiring bizarre scaling | |
| device subcircuit sky130_fd_pr__diode_pd2nw_05v5 *pdiode nwell a=area*1E12 p=perim*1E6 | |
| device subcircuit sky130_fd_pr__diode_pd2nw_05v5_lvt *pdiodelvt nwell a=area*1E12 p=perim*1E6 | |
| device subcircuit sky130_fd_pr__diode_pd2nw_05v5_hvt *pdiodehvt nwell a=area*1E12 p=perim*1E6 | |
| device subcircuit sky130_fd_pr__diode_pd2nw_11v0 *mvpdiode nwell a=area*1E12 p=perim*1E6 | |
| device msubcircuit sky130_fd_pr__diode_pw2nd_05v5 *ndiode pwell,space/w a=area*1E12 p=perim*1E6 | |
| device msubcircuit sky130_fd_pr__diode_pw2nd_05v5_lvt *ndiodelvt pwell,space/w a=area*1E12 p=perim*1E6 | |
| device msubcircuit sky130_fd_pr__diode_pw2nd_05v5_nvt *nndiode pwell,space/w a=area*1E12 p=perim*1E6 | |
| device msubcircuit sky130_fd_pr__diode_pw2nd_11v0 *mvndiode pwell,space/w a=area*1E12 p=perim*1E6 | |
| #ifdef RERAM | |
| device csubcircuit sky130_fd_pr_reram__reram_cell reram m1 a=area_ox | |
| #endif (RERAM) | |
| #ifdef MIM | |
| device csubcircuit sky130_fd_pr__cap_mim_m3_1 *mimcap *m3 w=w l=l | |
| device csubcircuit sky130_fd_pr__cap_mim_m3_2 *mimcap2 *m4 w=w l=l | |
| #endif (MIM) | |
| variants (orig) | |
| device mosfet sky130_fd_pr__pfet_01v8 scpfet,pfet pdiff,pdiffres,pdc nwell | |
| device mosfet sky130_fd_pr__special_pfet_latch ppu pdiff,pdiffres,pdc nwell | |
| device mosfet sky130_fd_pr__pfet_01v8_lvt pfetlvt pdiff,pdiffres,pdc nwell | |
| device mosfet sky130_fd_pr__pfet_01v8_mvt pfetmvt pdiff,pdiffres,pdc nwell | |
| device mosfet sky130_fd_pr__pfet_01v8_hvt scpfethvt,pfethvt pdiff,pdiffres,pdc nwell | |
| device mosfet sky130_fd_pr__nfet_01v8 scnfet,nfet ndiff,ndiffres,ndc pwell,space/w | |
| device mosfet sky130_fd_pr__special_nfet_pass npass ndiff,ndiffres,ndc pwell,space/w | |
| device mosfet sky130_fd_pr__special_nfet_latch npd ndiff,ndiffres,ndc pwell,space/w | |
| device mosfet sky130_fd_pr__nfet_01v8_lvt scnfetlvt,nfetlvt ndiff,ndiffres,ndc pwell,space/w | |
| device mosfet sky130_fd_bs_flash__special_sonosfet_star nsonos ndiff,ndiffres,ndc \ | |
| pwell,space/w | |
| # Note that corenvar, corepvar are not considered devices, and extract as | |
| # parasitic capacitance instead (but cap values need to be added). | |
| # Extended drain devices (must appear before the regular devices) | |
| device mosfet sky130_fd_pr__nfet_20v0_nvt mvnnfet *mvndiff,mvndiffres \ | |
| dnwell pwell,space/w error | |
| device mosfet sky130_fd_pr__nfet_20v0 mvnfet *mvndiff,mvndiffres \ | |
| dnwell pwell,space/w error | |
| device mosfet sky130_fd_pr__pfet_20v0 mvpfet *mvpdiff,mvpdiffres \ | |
| pwell,space/w nwell error | |
| device mosfet sky130_fd_pr__pfet_g5v0d10v5 mvpfet mvpdiff,mvpdiffres,mvpdc nwell | |
| device mosfet sky130_fd_pr__esd_pfet_g5v0d10v5 mvpfetesd mvpdiff,mvpdiffres,mvpdc nwell | |
| device mosfet sky130_fd_pr__nfet_g5v0d10v5 mvnfet mvndiff,mvndiffres,mvndc pwell,space/w | |
| device mosfet sky130_fd_pr__esd_nfet_g5v0d10v5 mvnfetesd mvndiff,mvndiffres,mvndc pwell,space/w | |
| device mosfet sky130_fd_pr__nfet_05v0_nvt mvnnfet *mvndiff,mvndiffres pwell,space/w | |
| device mosfet sky130_fd_pr__nfet_03v3_nvt nnfet *mvndiff,mvndiffres pwell,space/w | |
| # These devices always extract as subcircuits | |
| device subcircuit sky130_fd_pr__cap_var_lvt varactor *nndiff nwell error l=l w=w | |
| device subcircuit sky130_fd_pr__cap_var_hvt varhvt *nndiff nwell error l=l w=w | |
| device subcircuit sky130_fd_pr__cap_var mvvaractor *mvnndiff nwell error l=l w=w | |
| device resistor sky130_fd_pr__res_generic_po rmp *poly | |
| device resistor sky130_fd_pr__res_generic_l1 rli1 *li,coreli | |
| device resistor sky130_fd_pr__res_generic_m1 rmetal1 *metal1 | |
| device resistor sky130_fd_pr__res_generic_m2 rmetal2 *metal2 | |
| device resistor sky130_fd_pr__res_generic_m3 rmetal3 *metal3 | |
| #ifdef METAL5 | |
| device resistor sky130_fd_pr__res_generic_m4 rm4 *m4 | |
| device resistor sky130_fd_pr__res_generic_m5 rm5 *m5 | |
| #endif (METAL5) | |
| device resistor sky130_fd_pr__res_high_po xhrpoly xpc | |
| device resistor sky130_fd_pr__res_xhigh_po uhrpoly xpc | |
| device resistor sky130_fd_pr__res_generic_po mrp1 *poly | |
| device resistor sky130_fd_pr__res_generic_nd ndiffres *ndiff | |
| device resistor sky130_fd_pr__res_generic_pd pdiffres *pdiff | |
| device resistor mrdn_hv mvndiffres *mvndiff | |
| device resistor mrdp_hv mvpdiffres *mvpdiff | |
| device resistor sky130_fd_pr__res_iso_pw rpw pwell | |
| # NOTE: SkyWater diode models have bizarre units requiring bizarre scaling | |
| device ndiode sky130_fd_pr__diode_pw2nd_05v5 *ndiode pwell,space/w a=area*1E12 p=pj*1E6 | |
| device ndiode sky130_fd_pr__diode_pw2nd_05v5_lvt *ndiodelvt pwell,space/w a=area*1E12 p=pj*1E6 | |
| device ndiode sky130_fd_pr__diode_pw2nd_05v5_nvt *nndiode pwell,space/w a=area*1E12 p=pj*1E6 | |
| device ndiode sky130_fd_pr__diode_pw2nd_11v0 *mvndiode pwell,space/w a=area*1E12 p=pj*1E6 | |
| device pdiode sky130_fd_pr__diode_pd2nw_05v5 *pdiode nwell a=area*1E12 p=pj*1E6 | |
| device pdiode sky130_fd_pr__diode_pd2nw_05v5_lvt *pdiodelvt nwell a=area*1E12 p=pj*1E6 | |
| device pdiode sky130_fd_pr__diode_pd2nw_05v5_hvt *pdiodehvt nwell a=area*1E12 p=pj*1E6 | |
| device pdiode sky130_fd_pr__diode_pd2nw_11v0 *mvpdiode nwell a=area*1E12 p=pj*1E6 | |
| device bjt sky130_fd_pr__npn_05v5 npn *ndiff dnwell space/w error a1=area | |
| device bjt sky130_fd_pr__npn_05v5_W1p00L1p00 npn *ndiff dnwell space/w error \ | |
| a1>0.99 a1<1.01 | |
| device bjt sky130_fd_pr__npn_05v5_W1p00L2p00 npn *ndiff dnwell space/w error \ | |
| a1>1.99 a1<2.01 | |
| device bjt sky130_fd_pr__pnp_05v5 pnp *pdiff pwell,space/w a1=area | |
| device bjt sky130_fd_pr__pnp_05v5_W0p68L0p68 pnp *pdiff pwell,space/w \ | |
| a1>0.45 a1<0.48 | |
| device bjt sky130_fd_pr__pnp_05v5_W3p40L3p40 pnp *pdiff pwell,space/w \ | |
| a1>11.55 a1<11.57 | |
| device bjt sky130_fd_pr__npn_11v0 npn *mvndiff dnwell space/w error a1=area | |
| device bjt sky130_fd_pr__npn_11v0_W1p00L1p00 npn *mvndiff dnwell space/w error \ | |
| a1>0.99 a1<1.01 | |
| #ifdef MIM | |
| device capacitor sky130_fd_pr__cap_mim_m3_1 *mimcap *m3 1 | |
| device capacitor sky130_fd_pr__cap_mim_m3_2 *mimcap2 *m4 1 | |
| #endif (MIM) | |
| end | |
| #----------------------------------------------------- | |
| # Wiring tool definitions | |
| #----------------------------------------------------- | |
| wiring | |
| # All wiring values are in nanometers | |
| scalefactor 10 | |
| contact mcon 170 li 0 0 m1 30 60 | |
| contact v1 260 m1 0 30 m2 0 30 | |
| contact v2 280 m2 0 45 m3 25 0 | |
| #ifdef METAL5 | |
| contact v3 320 m3 0 30 m4 5 5 | |
| contact v4 1180 m4 0 m5 120 | |
| #endif (METAL5) | |
| contact pc 170 poly 50 80 li 0 80 | |
| contact xpc 170 xpolyres 50 80 li 0 80 | |
| contact pdc 170 pdiff 40 60 li 0 80 | |
| contact ndc 170 ndiff 40 60 li 0 80 | |
| contact psc 170 psd 40 60 li 0 80 | |
| contact nsc 170 nsd 40 60 li 0 80 | |
| end | |
| #----------------------------------------------------- | |
| # Plain old router. . . | |
| #----------------------------------------------------- | |
| router | |
| end | |
| #------------------------------------------------------------ | |
| # Plowing (restored in magic 8.2, need to fill this section) | |
| #------------------------------------------------------------ | |
| plowing | |
| end | |
| #----------------------------------------------------------------- | |
| # No special plot layers defined (use default PNM color choices) | |
| #----------------------------------------------------------------- | |
| plot | |
| style pnm | |
| default | |
| draw fillblock no_color_at_all | |
| draw obsactive no_color_at_all | |
| draw obsm1 no_color_at_all | |
| draw obsm2 no_color_at_all | |
| draw obsm3 no_color_at_all | |
| draw obsm4 no_color_at_all | |
| draw obsm5 no_color_at_all | |
| draw fomfill no_color_at_all | |
| draw polyfill no_color_at_all | |
| draw m1fill no_color_at_all | |
| draw m2fill no_color_at_all | |
| draw m3fill no_color_at_all | |
| draw m4fill no_color_at_all | |
| draw m5fill no_color_at_all | |
| draw isosub no_color_at_all | |
| draw nwell cwell | |
| end | |