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foss-eda-tools / third_party / opencircuitdesign.com / open_pdks / ebffedd16788db327af050ac01c3fb1558ebffd1 / . / gf180mcu / openlane / rules.openrcx.gf180mcuC.nom.magic
blob: 9155f1038df997acdc153af235482115a979a5bc [file] [log] [blame]
Extraction Rules for OpenRCX
DIAGMODEL ON
LayerCount 5
DensityRate 1 0
DensityModel 0
Metal 1 RESOVER
WIDTH Table 1 entries: 0.23
Metal 1 RESOVER 0
DIST count 55 width 0.23
0 0 0 0.000395257
0 0.33 0 0.000395257
0 0.56 0 0.000395257
0 0.775 0 0.000395257
0 0.89 0 0.000395257
0 1.12 0 0.000395257
0 1.335 0 0.000395257
0 1.45 0 0.000395257
0 1.68 0 0.000395257
0 2.24 0 0.000395257
0.33 0.33 0 0.000395257
0.33 0.56 0 0.000395257
0.33 0.775 0 0.000395257
0.33 0.89 0 0.000395257
0.33 1.12 0 0.000395257
0.33 1.335 0 0.000395257
0.33 1.45 0 0.000395257
0.33 1.68 0 0.000395257
0.33 2.24 0 0.000395257
0.56 0.56 0 0.000395257
0.56 0.775 0 0.000395257
0.56 0.89 0 0.000395257
0.56 1.12 0 0.000395257
0.56 1.335 0 0.000395257
0.56 1.45 0 0.000395257
0.56 1.68 0 0.000395257
0.56 2.24 0 0.000395257
0.775 0.775 0 0.000395257
0.775 0.89 0 0.000395257
0.775 1.12 0 0.000395257
0.775 1.335 0 0.000395257
0.775 1.45 0 0.000395257
0.775 1.68 0 0.000395257
0.775 2.24 0 0.000395257
0.89 0.89 0 0.000395257
0.89 1.12 0 0.000395257
0.89 1.335 0 0.000395257
0.89 1.45 0 0.000395257
0.89 1.68 0 0.000395257
0.89 2.24 0 0.000395257
1.12 1.12 0 0.000395257
1.12 1.335 0 0.000395257
1.12 1.45 0 0.000395257
1.12 1.68 0 0.000395257
1.12 2.24 0 0.000395257
1.335 1.335 0 0.000395257
1.335 1.45 0 0.000395257
1.335 1.68 0 0.000395257
1.335 2.24 0 0.000395257
1.45 1.45 0 0.000395257
1.45 1.68 0 0.000395257
1.45 2.24 0 0.000395257
1.68 1.68 0 0.000395257
1.68 2.24 0 0.000395257
2.24 0 2.24 0.000395257
END DIST
Metal 1 OVER
WIDTH Table 1 entries: 0.23
Metal 1 OVER 0
DIST count 12 width 0.23
0.23 0.000246025 4.84038e-06 0.000197628
0.46 0.000123013 6.01388e-06 0.000197628
0.575 9.84102e-05 6.59897e-06 0.000197628
0.69 8.20085e-05 7.18256e-06 0.000197628
0.805 7.0293e-05 7.76438e-06 0.000197628
0.92 6.15064e-05 8.34409e-06 0.000197628
1.035 5.46723e-05 8.92141e-06 0.000197628
1.15 4.92051e-05 9.49607e-06 0.000197628
1.38 4.10042e-05 1.06361e-05 0.000197628
1.84 3.07532e-05 1.28713e-05 0.000197628
2.3 2.46025e-05 1.50315e-05 0.000197628
2.76 0 3.76011e-05 0.000197628
END DIST
Metal 1 UNDER
WIDTH Table 1 entries: 0.23
Metal 1 UNDER 2
DIST count 12 width 0.23
0.23 0.000246025 1.33892e-05 0.000197628
0.46 0.000123013 1.45627e-05 0.000197628
0.575 9.84102e-05 1.51478e-05 0.000197628
0.69 8.20085e-05 1.57314e-05 0.000197628
0.805 7.0293e-05 1.63132e-05 0.000197628
0.92 6.15064e-05 1.68929e-05 0.000197628
1.035 5.46723e-05 1.74702e-05 0.000197628
1.15 4.92051e-05 1.80449e-05 0.000197628
1.38 4.10042e-05 1.91849e-05 0.000197628
1.84 3.07532e-05 2.14201e-05 0.000197628
2.3 2.46025e-05 2.35803e-05 0.000197628
2.76 0 4.61498e-05 0.000197628
END DIST
Metal 1 UNDER 3
DIST count 12 width 0.23
0.23 0.000246025 8.08729e-06 0.000197628
0.46 0.000123013 9.26078e-06 0.000197628
0.575 9.84102e-05 9.84587e-06 0.000197628
0.69 8.20085e-05 1.04295e-05 0.000197628
0.805 7.0293e-05 1.10113e-05 0.000197628
0.92 6.15064e-05 1.1591e-05 0.000197628
1.035 5.46723e-05 1.21683e-05 0.000197628
1.15 4.92051e-05 1.2743e-05 0.000197628
1.38 4.10042e-05 1.3883e-05 0.000197628
1.84 3.07532e-05 1.61182e-05 0.000197628
2.3 2.46025e-05 1.82784e-05 0.000197628
2.76 0 4.0848e-05 0.000197628
END DIST
Metal 1 UNDER 4
DIST count 12 width 0.23
0.23 0.000246025 6.87077e-06 0.000197628
0.46 0.000123013 8.04427e-06 0.000197628
0.575 9.84102e-05 8.62936e-06 0.000197628
0.69 8.20085e-05 9.21296e-06 0.000197628
0.805 7.0293e-05 9.79477e-06 0.000197628
0.92 6.15064e-05 1.03745e-05 0.000197628
1.035 5.46723e-05 1.09518e-05 0.000197628
1.15 4.92051e-05 1.15265e-05 0.000197628
1.38 4.10042e-05 1.26665e-05 0.000197628
1.84 3.07532e-05 1.49017e-05 0.000197628
2.3 2.46025e-05 1.70619e-05 0.000197628
2.76 0 3.96314e-05 0.000197628
END DIST
Metal 1 UNDER 5
DIST count 12 width 0.23
0.23 0.000246025 6.33805e-06 0.000197628
0.46 0.000123013 7.51155e-06 0.000197628
0.575 9.84102e-05 8.09664e-06 0.000197628
0.69 8.20085e-05 8.68024e-06 0.000197628
0.805 7.0293e-05 9.26206e-06 0.000197628
0.92 6.15064e-05 9.84177e-06 0.000197628
1.035 5.46723e-05 1.04191e-05 0.000197628
1.15 4.92051e-05 1.09937e-05 0.000197628
1.38 4.10042e-05 1.21338e-05 0.000197628
1.84 3.07532e-05 1.4369e-05 0.000197628
2.3 2.46025e-05 1.65291e-05 0.000197628
2.76 0 3.90987e-05 0.000197628
END DIST
Metal 1 DIAGUNDER
WIDTH Table 1 entries: 0.23
Metal 1 DIAGUNDER 2
DIST count 13 width 0.23
0 0 1.37136e-05 0.000197628
0.23 0 1.86039e-06 0.000197628
0.46 0 1.85279e-06 0.000197628
0.575 0 1.84756e-06 0.000197628
0.69 0 1.84141e-06 0.000197628
0.805 0 1.8343e-06 0.000197628
0.92 0 1.82626e-06 0.000197628
1.035 0 1.8173e-06 0.000197628
1.15 0 1.80742e-06 0.000197628
1.38 0 1.78489e-06 0.000197628
1.84 0 1.72894e-06 0.000197628
2.3 0 1.65894e-06 0.000197628
2.76 0 1.57536e-06 0.000197628
END DIST
Metal 1 DIAGUNDER 3
DIST count 13 width 0.23
0 0 4.7018e-06 0.000197628
0.23 0 9.87747e-07 0.000197628
0.46 0 9.83707e-07 0.000197628
0.575 0 9.8094e-07 0.000197628
0.69 0 9.7769e-07 0.000197628
0.805 0 9.73913e-07 0.000197628
0.92 0 9.69653e-07 0.000197628
1.035 0 9.6491e-07 0.000197628
1.15 0 9.5964e-07 0.000197628
1.38 0 9.47694e-07 0.000197628
1.84 0 9.17962e-07 0.000197628
2.3 0 8.80808e-07 0.000197628
2.76 0 8.36408e-07 0.000197628
END DIST
Metal 1 DIAGUNDER 4
DIST count 13 width 0.23
0 0 2.83729e-06 0.000197628
0.23 0 6.74835e-07 0.000197628
0.46 0 6.72069e-07 0.000197628
0.575 0 6.7018e-07 0.000197628
0.69 0 6.67984e-07 0.000197628
0.805 0 6.65393e-07 0.000197628
0.92 0 6.62494e-07 0.000197628
1.035 0 6.59201e-07 0.000197628
1.15 0 6.55643e-07 0.000197628
1.38 0 6.47475e-07 0.000197628
1.84 0 6.27185e-07 0.000197628
2.3 0 6.01757e-07 0.000197628
2.76 0 5.71454e-07 0.000197628
END DIST
Metal 1 DIAGUNDER 5
DIST count 13 width 0.23
0 0 1.89152e-06 0.000197628
0.23 0 6.35222e-07 0.000197628
0.46 0 6.32631e-07 0.000197628
0.575 0 6.3083e-07 0.000197628
0.69 0 6.28722e-07 0.000197628
0.805 0 6.26307e-07 0.000197628
0.92 0 6.2354e-07 0.000197628
1.035 0 6.20509e-07 0.000197628
1.15 0 6.17128e-07 0.000197628
1.38 0 6.09442e-07 0.000197628
1.84 0 5.90338e-07 0.000197628
2.3 0 5.66403e-07 0.000197628
2.76 0 5.37901e-07 0.000197628
END DIST
Metal 2 RESOVER
WIDTH Table 1 entries: 0.28
Metal 2 RESOVER 0
DIST count 55 width 0.28
0 0 0 0.000324675
0 0.28 0 0.000324675
0 0.56 0 0.000324675
0 0.7 0 0.000324675
0 0.84 0 0.000324675
0 1.12 0 0.000324675
0 1.26 0 0.000324675
0 1.4 0 0.000324675
0 1.68 0 0.000324675
0 2.24 0 0.000324675
0.28 0.28 0 0.000324675
0.28 0.56 0 0.000324675
0.28 0.7 0 0.000324675
0.28 0.84 0 0.000324675
0.28 1.12 0 0.000324675
0.28 1.26 0 0.000324675
0.28 1.4 0 0.000324675
0.28 1.68 0 0.000324675
0.28 2.24 0 0.000324675
0.56 0.56 0 0.000324675
0.56 0.7 0 0.000324675
0.56 0.84 0 0.000324675
0.56 1.12 0 0.000324675
0.56 1.26 0 0.000324675
0.56 1.4 0 0.000324675
0.56 1.68 0 0.000324675
0.56 2.24 0 0.000324675
0.7 0.7 0 0.000324675
0.7 0.84 0 0.000324675
0.7 1.12 0 0.000324675
0.7 1.26 0 0.000324675
0.7 1.4 0 0.000324675
0.7 1.68 0 0.000324675
0.7 2.24 0 0.000324675
0.84 0.84 0 0.000324675
0.84 1.12 0 0.000324675
0.84 1.26 0 0.000324675
0.84 1.4 0 0.000324675
0.84 1.68 0 0.000324675
0.84 2.24 0 0.000324675
1.12 1.12 0 0.000324675
1.12 1.26 0 0.000324675
1.12 1.4 0 0.000324675
1.12 1.68 0 0.000324675
1.12 2.24 0 0.000324675
1.26 1.26 0 0.000324675
1.26 1.4 0 0.000324675
1.26 1.68 0 0.000324675
1.26 2.24 0 0.000324675
1.4 1.4 0 0.000324675
1.4 1.68 0 0.000324675
1.4 2.24 0 0.000324675
1.68 1.68 0 0.000324675
1.68 2.24 0 0.000324675
2.24 0 2.24 0.000324675
END DIST
Metal 2 RESOVER 1
DIST count 0 width 0.28
END DIST
Metal 2 OVER
WIDTH Table 1 entries: 0.28
Metal 2 OVER 0
DIST count 12 width 0.28
0.28 0.000219199 3.32181e-06 0.000162338
0.56 0.0001096 4.33256e-06 0.000162338
0.7 8.76797e-05 4.83584e-06 0.000162338
0.84 7.30664e-05 5.33719e-06 0.000162338
0.98 6.26284e-05 5.83627e-06 0.000162338
1.12 5.47998e-05 6.33268e-06 0.000162338
1.26 4.87109e-05 6.82605e-06 0.000162338
1.4 4.38398e-05 7.316e-06 0.000162338
1.68 3.65332e-05 8.28418e-06 0.000162338
2.24 2.73999e-05 1.01635e-05 0.000162338
2.8 2.19199e-05 1.19479e-05 0.000162338
3.36 0 3.18824e-05 0.000162338
END DIST
Metal 2 OVER 1
DIST count 12 width 0.28
0.28 0.000219199 1.13274e-05 0.000162338
0.56 0.0001096 1.32011e-05 0.000162338
0.7 8.76797e-05 1.41959e-05 0.000162338
0.84 7.30664e-05 1.52301e-05 0.000162338
0.98 6.26284e-05 1.62993e-05 0.000162338
1.12 5.47998e-05 1.74015e-05 0.000162338
1.26 4.87109e-05 1.85348e-05 0.000162338
1.4 4.38398e-05 1.96969e-05 0.000162338
1.68 3.65332e-05 2.2096e-05 0.000162338
2.24 2.73999e-05 2.71322e-05 0.000162338
2.8 2.19199e-05 3.2332e-05 0.000162338
3.36 0 5.57751e-05 0.000162338
END DIST
Metal 2 UNDER
WIDTH Table 1 entries: 0.28
Metal 2 UNDER 3
DIST count 12 width 0.28
0.28 0.000219199 1.37358e-05 0.000162338
0.56 0.0001096 1.47466e-05 0.000162338
0.7 8.76797e-05 1.52498e-05 0.000162338
0.84 7.30664e-05 1.57512e-05 0.000162338
0.98 6.26284e-05 1.62503e-05 0.000162338
1.12 5.47998e-05 1.67467e-05 0.000162338
1.26 4.87109e-05 1.724e-05 0.000162338
1.4 4.38398e-05 1.773e-05 0.000162338
1.68 3.65332e-05 1.86982e-05 0.000162338
2.24 2.73999e-05 2.05775e-05 0.000162338
2.8 2.19199e-05 2.23619e-05 0.000162338
3.36 0 4.22964e-05 0.000162338
END DIST
Metal 2 UNDER 4
DIST count 12 width 0.28
0.28 0.000219199 7.2572e-06 0.000162338
0.56 0.0001096 8.26795e-06 0.000162338
0.7 8.76797e-05 8.77123e-06 0.000162338
0.84 7.30664e-05 9.27258e-06 0.000162338
0.98 6.26284e-05 9.77166e-06 0.000162338
1.12 5.47998e-05 1.02681e-05 0.000162338
1.26 4.87109e-05 1.07614e-05 0.000162338
1.4 4.38398e-05 1.12514e-05 0.000162338
1.68 3.65332e-05 1.22196e-05 0.000162338
2.24 2.73999e-05 1.40989e-05 0.000162338
2.8 2.19199e-05 1.58833e-05 0.000162338
3.36 0 3.58178e-05 0.000162338
END DIST
Metal 2 UNDER 5
DIST count 12 width 0.28
0.28 0.000219199 5.7647e-06 0.000162338
0.56 0.0001096 6.77545e-06 0.000162338
0.7 8.76797e-05 7.27873e-06 0.000162338
0.84 7.30664e-05 7.78009e-06 0.000162338
0.98 6.26284e-05 8.27917e-06 0.000162338
1.12 5.47998e-05 8.77558e-06 0.000162338
1.26 4.87109e-05 9.26894e-06 0.000162338
1.4 4.38398e-05 9.75889e-06 0.000162338
1.68 3.65332e-05 1.07271e-05 0.000162338
2.24 2.73999e-05 1.26064e-05 0.000162338
2.8 2.19199e-05 1.43908e-05 0.000162338
3.36 0 3.43253e-05 0.000162338
END DIST
Metal 2 DIAGUNDER
WIDTH Table 1 entries: 0.28
Metal 2 DIAGUNDER 3
DIST count 13 width 0.28
0 0 1.66948e-05 0.000162338
0.28 0 2.24019e-06 0.000162338
0.56 0 2.22662e-06 0.000162338
0.7 0 2.21732e-06 0.000162338
0.84 0 2.20631e-06 0.000162338
0.98 0 2.19369e-06 0.000162338
1.12 0 2.17937e-06 0.000162338
1.26 0 2.16342e-06 0.000162338
1.4 0 2.14585e-06 0.000162338
1.68 0 2.10581e-06 0.000162338
2.24 0 2.00682e-06 0.000162338
2.8 0 1.88359e-06 0.000162338
3.36 0 1.73759e-06 0.000162338
END DIST
Metal 2 DIAGUNDER 4
DIST count 13 width 0.28
0 0 5.72392e-06 0.000162338
0.28 0 1.16349e-06 0.000162338
0.56 0 1.15642e-06 0.000162338
0.7 0 1.15159e-06 0.000162338
0.84 0 1.14589e-06 0.000162338
0.98 0 1.13932e-06 0.000162338
1.12 0 1.13189e-06 0.000162338
1.26 0 1.12363e-06 0.000162338
1.4 0 1.11447e-06 0.000162338
1.68 0 1.09369e-06 0.000162338
2.24 0 1.04228e-06 0.000162338
2.8 0 9.78247e-07 0.000162338
3.36 0 9.02453e-07 0.000162338
END DIST
Metal 2 DIAGUNDER 5
DIST count 13 width 0.28
0 0 3.13027e-06 0.000162338
0.28 0 9.76154e-07 0.000162338
0.56 0 9.70238e-07 0.000162338
0.7 0 9.66198e-07 0.000162338
0.84 0 9.614e-07 0.000162338
0.98 0 9.5588e-07 0.000162338
1.12 0 9.49675e-07 0.000162338
1.26 0 9.42713e-07 0.000162338
1.4 0 9.35029e-07 0.000162338
1.68 0 9.17605e-07 0.000162338
2.24 0 8.74459e-07 0.000162338
2.8 0 8.20779e-07 0.000162338
3.36 0 7.57143e-07 0.000162338
END DIST
Metal 2 OVERUNDER
WIDTH Table 1 entries: 0.28
Metal 2 OVER 1 UNDER 3
DIST count 12 width 0.28
0.28 0.000219199 2.17414e-05 0.000162338
0.56 0.0001096 2.36151e-05 0.000162338
0.7 8.76797e-05 2.46099e-05 0.000162338
0.84 7.30664e-05 2.56441e-05 0.000162338
0.98 6.26284e-05 2.67133e-05 0.000162338
1.12 5.47998e-05 2.78155e-05 0.000162338
1.26 4.87109e-05 2.89488e-05 0.000162338
1.4 4.38398e-05 3.01109e-05 0.000162338
1.68 3.65332e-05 3.251e-05 0.000162338
2.24 2.73999e-05 3.75462e-05 0.000162338
2.8 2.19199e-05 4.2746e-05 0.000162338
3.36 0 6.61891e-05 0.000162338
END DIST
Metal 2 OVER 1 UNDER 4
DIST count 12 width 0.28
0.28 0.000219199 1.52628e-05 0.000162338
0.56 0.0001096 1.71365e-05 0.000162338
0.7 8.76797e-05 1.81313e-05 0.000162338
0.84 7.30664e-05 1.91655e-05 0.000162338
0.98 6.26284e-05 2.02347e-05 0.000162338
1.12 5.47998e-05 2.13369e-05 0.000162338
1.26 4.87109e-05 2.24702e-05 0.000162338
1.4 4.38398e-05 2.36323e-05 0.000162338
1.68 3.65332e-05 2.60314e-05 0.000162338
2.24 2.73999e-05 3.10676e-05 0.000162338
2.8 2.19199e-05 3.62674e-05 0.000162338
3.36 0 5.97105e-05 0.000162338
END DIST
Metal 2 OVER 1 UNDER 5
DIST count 12 width 0.28
0.28 0.000219199 1.37703e-05 0.000162338
0.56 0.0001096 1.5644e-05 0.000162338
0.7 8.76797e-05 1.66388e-05 0.000162338
0.84 7.30664e-05 1.7673e-05 0.000162338
0.98 6.26284e-05 1.87422e-05 0.000162338
1.12 5.47998e-05 1.98444e-05 0.000162338
1.26 4.87109e-05 2.09777e-05 0.000162338
1.4 4.38398e-05 2.21398e-05 0.000162338
1.68 3.65332e-05 2.45389e-05 0.000162338
2.24 2.73999e-05 2.95751e-05 0.000162338
2.8 2.19199e-05 3.47749e-05 0.000162338
3.36 0 5.8218e-05 0.000162338
END DIST
Metal 3 RESOVER
WIDTH Table 1 entries: 0.28
Metal 3 RESOVER 0
DIST count 55 width 0.28
0 0 0 0.000324675
0 0.28 0 0.000324675
0 0.56 0 0.000324675
0 0.7 0 0.000324675
0 0.84 0 0.000324675
0 1.12 0 0.000324675
0 1.26 0 0.000324675
0 1.4 0 0.000324675
0 1.68 0 0.000324675
0 2.24 0 0.000324675
0.28 0.28 0 0.000324675
0.28 0.56 0 0.000324675
0.28 0.7 0 0.000324675
0.28 0.84 0 0.000324675
0.28 1.12 0 0.000324675
0.28 1.26 0 0.000324675
0.28 1.4 0 0.000324675
0.28 1.68 0 0.000324675
0.28 2.24 0 0.000324675
0.56 0.56 0 0.000324675
0.56 0.7 0 0.000324675
0.56 0.84 0 0.000324675
0.56 1.12 0 0.000324675
0.56 1.26 0 0.000324675
0.56 1.4 0 0.000324675
0.56 1.68 0 0.000324675
0.56 2.24 0 0.000324675
0.7 0.7 0 0.000324675
0.7 0.84 0 0.000324675
0.7 1.12 0 0.000324675
0.7 1.26 0 0.000324675
0.7 1.4 0 0.000324675
0.7 1.68 0 0.000324675
0.7 2.24 0 0.000324675
0.84 0.84 0 0.000324675
0.84 1.12 0 0.000324675
0.84 1.26 0 0.000324675
0.84 1.4 0 0.000324675
0.84 1.68 0 0.000324675
0.84 2.24 0 0.000324675
1.12 1.12 0 0.000324675
1.12 1.26 0 0.000324675
1.12 1.4 0 0.000324675
1.12 1.68 0 0.000324675
1.12 2.24 0 0.000324675
1.26 1.26 0 0.000324675
1.26 1.4 0 0.000324675
1.26 1.68 0 0.000324675
1.26 2.24 0 0.000324675
1.4 1.4 0 0.000324675
1.4 1.68 0 0.000324675
1.4 2.24 0 0.000324675
1.68 1.68 0 0.000324675
1.68 2.24 0 0.000324675
2.24 0 2.24 0.000324675
END DIST
Metal 3 RESOVER 1
DIST count 0 width 0.28
END DIST
Metal 3 RESOVER 2
DIST count 0 width 0.28
END DIST
Metal 3 OVER
WIDTH Table 1 entries: 0.28
Metal 3 OVER 0
DIST count 12 width 0.28
0.28 0.000222035 2.31459e-06 0.000162338
0.56 0.000111017 3.06284e-06 0.000162338
0.7 8.88139e-05 3.43541e-06 0.000162338
0.84 7.40115e-05 3.80657e-06 0.000162338
0.98 6.34385e-05 4.17603e-06 0.000162338
1.12 5.55087e-05 4.54352e-06 0.000162338
1.26 4.93411e-05 4.90877e-06 0.000162338
1.4 4.44069e-05 5.27146e-06 0.000162338
1.68 3.70058e-05 5.9882e-06 0.000162338
2.24 2.77543e-05 7.37944e-06 0.000162338
2.8 2.22035e-05 8.70041e-06 0.000162338
3.36 0 2.84381e-05 0.000162338
END DIST
Metal 3 OVER 1
DIST count 12 width 0.28
0.28 0.000222035 4.80408e-06 0.000162338
0.56 0.000111017 5.95819e-06 0.000162338
0.7 8.88139e-05 6.56328e-06 0.000162338
0.84 7.40115e-05 7.18488e-06 0.000162338
0.98 6.34385e-05 7.82307e-06 0.000162338
1.12 5.55087e-05 8.47569e-06 0.000162338
1.26 4.93411e-05 9.14077e-06 0.000162338
1.4 4.44069e-05 9.82053e-06 0.000162338
1.68 3.70058e-05 1.12117e-05 0.000162338
2.24 2.77543e-05 1.40872e-05 0.000162338
2.8 2.22035e-05 1.70167e-05 0.000162338
3.36 0 3.84063e-05 0.000162338
END DIST
Metal 3 OVER 2
DIST count 12 width 0.28
0.28 0.000222035 1.07543e-05 0.000162338
0.56 0.000111017 1.24355e-05 0.000162338
0.7 8.88139e-05 1.33399e-05 0.000162338
0.84 7.40115e-05 1.42851e-05 0.000162338
0.98 6.34385e-05 1.52676e-05 0.000162338
1.12 5.55087e-05 1.62873e-05 0.000162338
1.26 4.93411e-05 1.73391e-05 0.000162338
1.4 4.44069e-05 1.8423e-05 0.000162338
1.68 3.70058e-05 2.06754e-05 0.000162338
2.24 2.77543e-05 2.54413e-05 0.000162338
2.8 2.22035e-05 3.0406e-05 0.000162338
3.36 0 5.38805e-05 0.000162338
END DIST
Metal 3 UNDER
WIDTH Table 1 entries: 0.28
Metal 3 UNDER 4
DIST count 12 width 0.28
0.28 0.000222035 1.26926e-05 0.000162338
0.56 0.000111017 1.34409e-05 0.000162338
0.7 8.88139e-05 1.38134e-05 0.000162338
0.84 7.40115e-05 1.41846e-05 0.000162338
0.98 6.34385e-05 1.45541e-05 0.000162338
1.12 5.55087e-05 1.49216e-05 0.000162338
1.26 4.93411e-05 1.52868e-05 0.000162338
1.4 4.44069e-05 1.56495e-05 0.000162338
1.68 3.70058e-05 1.63662e-05 0.000162338
2.24 2.77543e-05 1.77575e-05 0.000162338
2.8 2.22035e-05 1.90784e-05 0.000162338
3.36 0 3.88161e-05 0.000162338
END DIST
Metal 3 UNDER 5
DIST count 12 width 0.28
0.28 0.000222035 5.95842e-06 0.000162338
0.56 0.000111017 6.70667e-06 0.000162338
0.7 8.88139e-05 7.07924e-06 0.000162338
0.84 7.40115e-05 7.4504e-06 0.000162338
0.98 6.34385e-05 7.81986e-06 0.000162338
1.12 5.55087e-05 8.18736e-06 0.000162338
1.26 4.93411e-05 8.5526e-06 0.000162338
1.4 4.44069e-05 8.9153e-06 0.000162338
1.68 3.70058e-05 9.63203e-06 0.000162338
2.24 2.77543e-05 1.10233e-05 0.000162338
2.8 2.22035e-05 1.23442e-05 0.000162338
3.36 0 3.20819e-05 0.000162338
END DIST
Metal 3 DIAGUNDER
WIDTH Table 1 entries: 0.28
Metal 3 DIAGUNDER 4
DIST count 13 width 0.28
0 0 1.66948e-05 0.000162338
0.28 0 2.20166e-06 0.000162338
0.56 0 2.18835e-06 0.000162338
0.7 0 2.17918e-06 0.000162338
0.84 0 2.1684e-06 0.000162338
0.98 0 2.15595e-06 0.000162338
1.12 0 2.14192e-06 0.000162338
1.26 0 2.12623e-06 0.000162338
1.4 0 2.10895e-06 0.000162338
1.68 0 2.06962e-06 0.000162338
2.24 0 1.97229e-06 0.000162338
2.8 0 1.85119e-06 0.000162338
3.36 0 1.70772e-06 0.000162338
END DIST
Metal 3 DIAGUNDER 5
DIST count 13 width 0.28
0 0 4.88629e-06 0.000162338
0.28 0 1.34394e-06 0.000162338
0.56 0 1.33579e-06 0.000162338
0.7 0 1.33019e-06 0.000162338
0.84 0 1.32363e-06 0.000162338
0.98 0 1.31602e-06 0.000162338
1.12 0 1.30747e-06 0.000162338
1.26 0 1.29787e-06 0.000162338
1.4 0 1.28734e-06 0.000162338
1.68 0 1.26331e-06 0.000162338
2.24 0 1.20393e-06 0.000162338
2.8 0 1.12998e-06 0.000162338
3.36 0 1.04242e-06 0.000162338
END DIST
Metal 3 OVERUNDER
WIDTH Table 1 entries: 0.28
Metal 3 OVER 1 UNDER 4
DIST count 12 width 0.28
0.28 0.000222035 1.51821e-05 0.000162338
0.56 0.000111017 1.63362e-05 0.000162338
0.7 8.88139e-05 1.69413e-05 0.000162338
0.84 7.40115e-05 1.75629e-05 0.000162338
0.98 6.34385e-05 1.82011e-05 0.000162338
1.12 5.55087e-05 1.88537e-05 0.000162338
1.26 4.93411e-05 1.95188e-05 0.000162338
1.4 4.44069e-05 2.01986e-05 0.000162338
1.68 3.70058e-05 2.15898e-05 0.000162338
2.24 2.77543e-05 2.44652e-05 0.000162338
2.8 2.22035e-05 2.73948e-05 0.000162338
3.36 0 4.87844e-05 0.000162338
END DIST
Metal 3 OVER 1 UNDER 5
DIST count 12 width 0.28
0.28 0.000222035 8.44791e-06 0.000162338
0.56 0.000111017 9.60202e-06 0.000162338
0.7 8.88139e-05 1.02071e-05 0.000162338
0.84 7.40115e-05 1.08287e-05 0.000162338
0.98 6.34385e-05 1.14669e-05 0.000162338
1.12 5.55087e-05 1.21195e-05 0.000162338
1.26 4.93411e-05 1.27846e-05 0.000162338
1.4 4.44069e-05 1.34644e-05 0.000162338
1.68 3.70058e-05 2.27715e-05 0.000162338
2.24 2.77543e-05 1.7731e-05 0.000162338
2.8 2.22035e-05 2.06606e-05 0.000162338
3.36 0 4.20502e-05 0.000162338
END DIST
Metal 3 OVER 2 UNDER 4
DIST count 12 width 0.28
0.28 0.000222035 2.11323e-05 0.000162338
0.56 0.000111017 2.28135e-05 0.000162338
0.7 8.88139e-05 2.3718e-05 0.000162338
0.84 7.40115e-05 2.46632e-05 0.000162338
0.98 6.34385e-05 2.56456e-05 0.000162338
1.12 5.55087e-05 2.66653e-05 0.000162338
1.26 4.93411e-05 2.77171e-05 0.000162338
1.4 4.44069e-05 2.8801e-05 0.000162338
1.68 3.70058e-05 3.10535e-05 0.000162338
2.24 2.77543e-05 3.58194e-05 0.000162338
2.8 2.22035e-05 4.0784e-05 0.000162338
3.36 0 6.42585e-05 0.000162338
END DIST
Metal 3 OVER 2 UNDER 5
DIST count 12 width 0.28
0.28 0.000222035 1.43981e-05 0.000162338
0.56 0.000111017 1.60793e-05 0.000162338
0.7 8.88139e-05 1.69838e-05 0.000162338
0.84 7.40115e-05 1.7929e-05 0.000162338
0.98 6.34385e-05 1.89114e-05 0.000162338
1.12 5.55087e-05 1.99311e-05 0.000162338
1.26 4.93411e-05 2.09829e-05 0.000162338
1.4 4.44069e-05 2.20668e-05 0.000162338
1.68 3.70058e-05 3.64812e-05 0.000162338
2.24 2.77543e-05 2.90852e-05 0.000162338
2.8 2.22035e-05 3.40498e-05 0.000162338
3.36 0 5.75243e-05 0.000162338
END DIST
Metal 4 RESOVER
WIDTH Table 1 entries: 0.28
Metal 4 RESOVER 0
DIST count 55 width 0.28
0 0 0 0.000324675
0 0.28 0 0.000324675
0 0.56 0 0.000324675
0 0.7 0 0.000324675
0 0.84 0 0.000324675
0 1.12 0 0.000324675
0 1.26 0 0.000324675
0 1.4 0 0.000324675
0 1.68 0 0.000324675
0 2.24 0 0.000324675
0.28 0.28 0 0.000324675
0.28 0.56 0 0.000324675
0.28 0.7 0 0.000324675
0.28 0.84 0 0.000324675
0.28 1.12 0 0.000324675
0.28 1.26 0 0.000324675
0.28 1.4 0 0.000324675
0.28 1.68 0 0.000324675
0.28 2.24 0 0.000324675
0.56 0.56 0 0.000324675
0.56 0.7 0 0.000324675
0.56 0.84 0 0.000324675
0.56 1.12 0 0.000324675
0.56 1.26 0 0.000324675
0.56 1.4 0 0.000324675
0.56 1.68 0 0.000324675
0.56 2.24 0 0.000324675
0.7 0.7 0 0.000324675
0.7 0.84 0 0.000324675
0.7 1.12 0 0.000324675
0.7 1.26 0 0.000324675
0.7 1.4 0 0.000324675
0.7 1.68 0 0.000324675
0.7 2.24 0 0.000324675
0.84 0.84 0 0.000324675
0.84 1.12 0 0.000324675
0.84 1.26 0 0.000324675
0.84 1.4 0 0.000324675
0.84 1.68 0 0.000324675
0.84 2.24 0 0.000324675
1.12 1.12 0 0.000324675
1.12 1.26 0 0.000324675
1.12 1.4 0 0.000324675
1.12 1.68 0 0.000324675
1.12 2.24 0 0.000324675
1.26 1.26 0 0.000324675
1.26 1.4 0 0.000324675
1.26 1.68 0 0.000324675
1.26 2.24 0 0.000324675
1.4 1.4 0 0.000324675
1.4 1.68 0 0.000324675
1.4 2.24 0 0.000324675
1.68 1.68 0 0.000324675
1.68 2.24 0 0.000324675
2.24 0 2.24 0.000324675
END DIST
Metal 4 RESOVER 1
DIST count 0 width 0.28
END DIST
Metal 4 RESOVER 2
DIST count 0 width 0.28
END DIST
Metal 4 RESOVER 3
DIST count 0 width 0.28
END DIST
Metal 4 OVER
WIDTH Table 1 entries: 0.28
Metal 4 OVER 0
DIST count 12 width 0.28
0.28 0.000223622 1.77383e-06 0.000162338
0.56 0.000111811 2.36319e-06 0.000162338
0.7 8.94488e-05 2.65664e-06 0.000162338
0.84 7.45404e-05 2.94897e-06 0.000162338
0.98 6.3892e-05 3.23999e-06 0.000162338
1.12 5.59055e-05 3.52944e-06 0.000162338
1.26 4.96938e-05 3.81712e-06 0.000162338
1.4 4.47244e-05 4.1028e-06 0.000162338
1.68 3.72703e-05 4.66733e-06 0.000162338
2.24 2.79527e-05 5.76315e-06 0.000162338
2.8 2.23622e-05 6.80361e-06 0.000162338
3.36 0 2.64113e-05 0.000162338
END DIST
Metal 4 OVER 1
DIST count 12 width 0.28
0.28 0.000223622 3.18038e-06 0.000162338
0.56 0.000111811 4.02834e-06 0.000162338
0.7 8.94488e-05 4.46919e-06 0.000162338
0.84 7.45404e-05 4.92208e-06 0.000162338
0.98 6.3892e-05 5.38268e-06 0.000162338
1.12 5.59055e-05 5.85325e-06 0.000162338
1.26 4.96938e-05 6.3316e-06 0.000162338
1.4 4.47244e-05 6.82009e-06 0.000162338
1.68 3.72703e-05 7.81275e-06 0.000162338
2.24 2.79527e-05 9.85395e-06 0.000162338
2.8 2.23622e-05 1.19168e-05 0.000162338
3.36 0 3.25748e-05 0.000162338
END DIST
Metal 4 OVER 2
DIST count 12 width 0.28
0.28 0.000223622 4.47365e-06 0.000162338
0.56 0.000111811 5.49821e-06 0.000162338
0.7 8.94488e-05 6.03954e-06 0.000162338
0.84 7.45404e-05 6.59845e-06 0.000162338
0.98 6.3892e-05 7.17498e-06 0.000162338
1.12 5.59055e-05 7.76744e-06 0.000162338
1.26 4.96938e-05 8.37588e-06 0.000162338
1.4 4.47244e-05 8.99683e-06 0.000162338
1.68 3.72703e-05 1.02768e-05 0.000162338
2.24 2.79527e-05 1.29429e-05 0.000162338
2.8 2.23622e-05 1.56808e-05 0.000162338
3.36 0 3.70271e-05 0.000162338
END DIST
Metal 4 OVER 3
DIST count 12 width 0.28
0.28 0.000223622 1.04066e-05 0.000162338
0.56 0.000111811 1.19507e-05 0.000162338
0.7 8.94488e-05 1.27878e-05 0.000162338
0.84 7.45404e-05 1.3666e-05 0.000162338
0.98 6.3892e-05 1.45852e-05 0.000162338
1.12 5.59055e-05 1.55402e-05 0.000162338
1.26 4.96938e-05 1.65293e-05 0.000162338
1.4 4.47244e-05 1.75525e-05 0.000162338
1.68 3.72703e-05 1.96856e-05 0.000162338
2.24 2.79527e-05 2.42294e-05 0.000162338
2.8 2.23622e-05 2.89947e-05 0.000162338
3.36 0 5.24207e-05 0.000162338
END DIST
Metal 4 UNDER
WIDTH Table 1 entries: 0.28
Metal 4 UNDER 5
DIST count 12 width 0.28
0.28 0.000223622 9.25529e-06 0.000162338
0.56 0.000111811 9.84464e-06 0.000162338
0.7 8.94488e-05 1.01381e-05 0.000162338
0.84 7.45404e-05 1.04304e-05 0.000162338
0.98 6.3892e-05 1.07214e-05 0.000162338
1.12 5.59055e-05 1.10109e-05 0.000162338
1.26 4.96938e-05 1.12986e-05 0.000162338
1.4 4.47244e-05 1.15843e-05 0.000162338
1.68 3.72703e-05 1.21488e-05 0.000162338
2.24 2.79527e-05 1.32446e-05 0.000162338
2.8 2.23622e-05 1.42851e-05 0.000162338
3.36 0 3.38928e-05 0.000162338
END DIST
Metal 4 DIAGUNDER
WIDTH Table 1 entries: 0.28
Metal 4 DIAGUNDER 5
DIST count 13 width 0.28
0 0 1.11298e-05 0.000162338
0.28 0 2.19058e-06 0.000162338
0.56 0 2.17734e-06 0.000162338
0.7 0 2.16822e-06 0.000162338
0.84 0 2.1575e-06 0.000162338
0.98 0 2.14513e-06 0.000162338
1.12 0 2.13113e-06 0.000162338
1.26 0 2.11555e-06 0.000162338
1.4 0 2.09834e-06 0.000162338
1.68 0 2.0592e-06 0.000162338
2.24 0 1.96241e-06 0.000162338
2.8 0 1.84188e-06 0.000162338
3.36 0 1.69913e-06 0.000162338
END DIST
Metal 4 OVERUNDER
WIDTH Table 1 entries: 0.28
Metal 4 OVER 1 UNDER 5
DIST count 12 width 0.28
0.28 0.000223622 1.06618e-05 0.000162338
0.56 0.000111811 1.15098e-05 0.000162338
0.7 8.94488e-05 1.19506e-05 0.000162338
0.84 7.45404e-05 1.24035e-05 0.000162338
0.98 6.3892e-05 1.28641e-05 0.000162338
1.12 5.59055e-05 1.33347e-05 0.000162338
1.26 4.96938e-05 1.38131e-05 0.000162338
1.4 4.47244e-05 1.43016e-05 0.000162338
1.68 3.72703e-05 1.52942e-05 0.000162338
2.24 2.79527e-05 1.73354e-05 0.000162338
2.8 2.23622e-05 1.93983e-05 0.000162338
3.36 0 4.00563e-05 0.000162338
END DIST
Metal 4 OVER 2 UNDER 5
DIST count 12 width 0.28
0.28 0.000223622 1.19551e-05 0.000162338
0.56 0.000111811 1.29797e-05 0.000162338
0.7 8.94488e-05 1.3521e-05 0.000162338
0.84 7.45404e-05 1.40799e-05 0.000162338
0.98 6.3892e-05 1.46564e-05 0.000162338
1.12 5.59055e-05 1.52489e-05 0.000162338
1.26 4.96938e-05 1.58573e-05 0.000162338
1.4 4.47244e-05 1.64783e-05 0.000162338
1.68 3.72703e-05 1.77582e-05 0.000162338
2.24 2.79527e-05 2.04243e-05 0.000162338
2.8 2.23622e-05 2.31622e-05 0.000162338
3.36 0 4.45085e-05 0.000162338
END DIST
Metal 4 OVER 3 UNDER 5
DIST count 12 width 0.28
0.28 0.000223622 1.78881e-05 0.000162338
0.56 0.000111811 1.94321e-05 0.000162338
0.7 8.94488e-05 2.02693e-05 0.000162338
0.84 7.45404e-05 2.11474e-05 0.000162338
0.98 6.3892e-05 2.20667e-05 0.000162338
1.12 5.59055e-05 2.30217e-05 0.000162338
1.26 4.96938e-05 2.40107e-05 0.000162338
1.4 4.47244e-05 2.50339e-05 0.000162338
1.68 3.72703e-05 2.7167e-05 0.000162338
2.24 2.79527e-05 3.17108e-05 0.000162338
2.8 2.23622e-05 3.64761e-05 0.000162338
3.36 0 5.99022e-05 0.000162338
END DIST
Metal 5 RESOVER
WIDTH Table 1 entries: 0.44
Metal 5 RESOVER 0
DIST count 55 width 0.44
0 0 0 0.000137741
0 0.46 0 0.000137741
0 0.9 0 0.000137741
0 1.14 0 0.000137741
0 1.36 0 0.000137741
0 1.8 0 0.000137741
0 2.04 0 0.000137741
0 2.26 0 0.000137741
0 2.7 0 0.000137741
0 3.6 0 0.000137741
0.46 0.46 0 0.000137741
0.46 0.9 0 0.000137741
0.46 1.14 0 0.000137741
0.46 1.36 0 0.000137741
0.46 1.8 0 0.000137741
0.46 2.04 0 0.000137741
0.46 2.26 0 0.000137741
0.46 2.7 0 0.000137741
0.46 3.6 0 0.000137741
0.9 0.9 0 0.000137741
0.9 1.14 0 0.000137741
0.9 1.36 0 0.000137741
0.9 1.8 0 0.000137741
0.9 2.04 0 0.000137741
0.9 2.26 0 0.000137741
0.9 2.7 0 0.000137741
0.9 3.6 0 0.000137741
1.14 1.14 0 0.000137741
1.14 1.36 0 0.000137741
1.14 1.8 0 0.000137741
1.14 2.04 0 0.000137741
1.14 2.26 0 0.000137741
1.14 2.7 0 0.000137741
1.14 3.6 0 0.000137741
1.36 1.36 0 0.000137741
1.36 1.8 0 0.000137741
1.36 2.04 0 0.000137741
1.36 2.26 0 0.000137741
1.36 2.7 0 0.000137741
1.36 3.6 0 0.000137741
1.8 1.8 0 0.000137741
1.8 2.04 0 0.000137741
1.8 2.26 0 0.000137741
1.8 2.7 0 0.000137741
1.8 3.6 0 0.000137741
2.04 2.04 0 0.000137741
2.04 2.26 0 0.000137741
2.04 2.7 0 0.000137741
2.04 3.6 0 0.000137741
2.26 2.26 0 0.000137741
2.26 2.7 0 0.000137741
2.26 3.6 0 0.000137741
2.7 2.7 0 0.000137741
2.7 3.6 0 0.000137741
3.6 0 3.6 0.000137741
END DIST
Metal 5 RESOVER 1
DIST count 0 width 0.44
END DIST
Metal 5 RESOVER 2
DIST count 0 width 0.44
END DIST
Metal 5 RESOVER 3
DIST count 0 width 0.44
END DIST
Metal 5 RESOVER 4
DIST count 0 width 0.44
END DIST
Metal 5 OVER
WIDTH Table 1 entries: 0.44
Metal 5 OVER 0
DIST count 12 width 0.44
0.46 0.000237804 2.38669e-06 6.88705e-05
0.92 0.000118902 3.36728e-06 6.88705e-05
1.15 9.51217e-05 3.85205e-06 6.88705e-05
1.38 7.92681e-05 4.33182e-06 6.88705e-05
1.61 6.7944e-05 4.8056e-06 6.88705e-05
1.84 5.94509e-05 5.27244e-06 6.88705e-05
2.07 5.28453e-05 5.73137e-06 6.88705e-05
2.3 4.75606e-05 6.18146e-06 6.88705e-05
2.76 3.9634e-05 7.05148e-06 6.88705e-05
3.68 2.97255e-05 8.6465e-06 6.88705e-05
4.6 2.37804e-05 1.00056e-05 6.88705e-05
5.52 0 3.09014e-05 6.88705e-05
END DIST
Metal 5 OVER 1
DIST count 12 width 0.44
0.46 0.000237804 4.02391e-06 6.88705e-05
0.92 0.000118902 5.56539e-06 6.88705e-05
1.15 9.51217e-05 6.36383e-06 6.88705e-05
1.38 7.92681e-05 7.17789e-06 6.88705e-05
1.61 6.7944e-05 8.0017e-06 6.88705e-05
1.84 5.94509e-05 8.83391e-06 6.88705e-05
2.07 5.28453e-05 9.66884e-06 6.88705e-05
2.3 4.75606e-05 1.05031e-05 6.88705e-05
2.76 3.9634e-05 1.21519e-05 6.88705e-05
3.68 2.97255e-05 1.52593e-05 6.88705e-05
4.6 2.37804e-05 1.79134e-05 6.88705e-05
5.52 0 3.97324e-05 6.88705e-05
END DIST
Metal 5 OVER 2
DIST count 12 width 0.44
0.46 0.000237804 4.87476e-06 6.88705e-05
0.92 0.000118902 6.66038e-06 6.88705e-05
1.15 9.51217e-05 7.59455e-06 6.88705e-05
1.38 7.92681e-05 8.5529e-06 6.88705e-05
1.61 6.7944e-05 9.5272e-06 6.88705e-05
1.84 5.94509e-05 1.05147e-05 6.88705e-05
2.07 5.28453e-05 1.15091e-05 6.88705e-05
2.3 4.75606e-05 1.25061e-05 6.88705e-05
2.76 3.9634e-05 1.44849e-05 6.88705e-05
3.68 2.97255e-05 1.82287e-05 6.88705e-05
4.6 2.37804e-05 2.14161e-05 6.88705e-05
5.52 0 4.3611e-05 6.88705e-05
END DIST
Metal 5 OVER 3
DIST count 12 width 0.44
0.46 0.000237804 6.6204e-06 6.88705e-05
0.92 0.000118902 8.84135e-06 6.88705e-05
1.15 9.51217e-05 1.0022e-05 6.88705e-05
1.38 7.92681e-05 1.12393e-05 6.88705e-05
1.61 6.7944e-05 1.24871e-05 6.88705e-05
1.84 5.94509e-05 1.37588e-05 6.88705e-05
2.07 5.28453e-05 1.50446e-05 6.88705e-05
2.3 4.75606e-05 1.63384e-05 6.88705e-05
2.76 3.9634e-05 1.89198e-05 6.88705e-05
3.68 2.97255e-05 2.38329e-05 6.88705e-05
4.6 2.37804e-05 2.8015e-05 6.88705e-05
5.52 0 5.09186e-05 6.88705e-05
END DIST
Metal 5 OVER 4
DIST count 12 width 0.44
0.46 0.000237804 1.23625e-05 6.88705e-05
0.92 0.000118902 1.55908e-05 6.88705e-05
1.15 9.51217e-05 1.73344e-05 6.88705e-05
1.38 7.92681e-05 1.91508e-05 6.88705e-05
1.61 6.7944e-05 2.10263e-05 6.88705e-05
1.84 5.94509e-05 2.29492e-05 6.88705e-05
2.07 5.28453e-05 2.4906e-05 6.88705e-05
2.3 4.75606e-05 2.68852e-05 6.88705e-05
2.76 3.9634e-05 3.08553e-05 6.88705e-05
3.68 2.97255e-05 3.84576e-05 6.88705e-05
4.6 2.37804e-05 4.49333e-05 6.88705e-05
5.52 0 6.9463e-05 6.88705e-05
END DIST
Metal 5 UNDER
WIDTH Table 0 entries:
Metal 5 DIAGUNDER
WIDTH Table 0 entries:
END DensityModel 0