sky130/openlane/rules.openrcx.sky130A.nom.magic

Extraction Rules for OpenRCX

DIAGMODEL ON

LayerCount 6
DensityRate 1  0

DensityModel 0

Metal 1 RESOVER
WIDTH Table 1 entries:  0.17

Metal 1 RESOVER 0
DIST count 55 width 0.17
0 0 0 0.0760547
0 0.29 0 0.0760547
0 0.46 0 0.0760547
0 0.665 0 0.0760547
0 0.75 0 0.0760547
0 0.92 0 0.0760547
0 1.125 0 0.0760547
0 1.21 0 0.0760547
0 1.38 0 0.0760547
0 1.84 0 0.0760547
0.29 0.29 0 0.0760547
0.29 0.46 0 0.0760547
0.29 0.665 0 0.0760547
0.29 0.75 0 0.0760547
0.29 0.92 0 0.0760547
0.29 1.125 0 0.0760547
0.29 1.21 0 0.0760547
0.29 1.38 0 0.0760547
0.29 1.84 0 0.0760547
0.46 0.46 0 0.0760547
0.46 0.665 0 0.0760547
0.46 0.75 0 0.0760547
0.46 0.92 0 0.0760547
0.46 1.125 0 0.0760547
0.46 1.21 0 0.0760547
0.46 1.38 0 0.0760547
0.46 1.84 0 0.0760547
0.665 0.665 0 0.0760547
0.665 0.75 0 0.0760547
0.665 0.92 0 0.0760547
0.665 1.125 0 0.0760547
0.665 1.21 0 0.0760547
0.665 1.38 0 0.0760547
0.665 1.84 0 0.0760547
0.75 0.75 0 0.0760547
0.75 0.92 0 0.0760547
0.75 1.125 0 0.0760547
0.75 1.21 0 0.0760547
0.75 1.38 0 0.0760547
0.75 1.84 0 0.0760547
0.92 0.92 0 0.0760547
0.92 1.125 0 0.0760547
0.92 1.21 0 0.0760547
0.92 1.38 0 0.0760547
0.92 1.84 0 0.0760547
1.125 1.125 0 0.0760547
1.125 1.21 0 0.0760547
1.125 1.38 0 0.0760547
1.125 1.84 0 0.0760547
1.21 1.21 0 0.0760547
1.21 1.38 0 0.0760547
1.21 1.84 0 0.0760547
1.38 1.38 0 0.0760547
1.38 1.84 0 0.0760547
1.84 0 1.84 0.0760547
END DIST

Metal 1 OVER
WIDTH Table 1 entries:  0.17

Metal 1 OVER 0
DIST count 12 width 0.17
0.17 0.000332739 4.8068e-06 0.0380273
0.34 0.00016637 6.02549e-06 0.0380273
0.425 0.000133096 6.63411e-06 0.0380273
0.51 0.000110913 7.24204e-06 0.0380273
0.595 9.50683e-05 7.84917e-06 0.0380273
0.68 8.31848e-05 8.45538e-06 0.0380273
0.765 7.3942e-05 9.06049e-06 0.0380273
0.85 6.65478e-05 9.66441e-06 0.0380273
1.02 5.54566e-05 1.08681e-05 0.0380273
1.36 4.15924e-05 1.32552e-05 0.0380273
1.7 3.32739e-05 1.56083e-05 0.0380273
2.04 0 4.56472e-05 0.0380273
END DIST

Metal 1 UNDER
WIDTH Table 1 entries:  0.17

Metal 1 UNDER 2
DIST count 12 width 0.17
0.17 0.000332739 1.64184e-05 0.0380273
0.34 0.00016637 1.79731e-05 0.0380273
0.425 0.000133096 1.87717e-05 0.0380273
0.51 0.000110913 1.95834e-05 0.0380273
0.595 9.50683e-05 2.04088e-05 0.0380273
0.68 8.31848e-05 2.12466e-05 0.0380273
0.765 7.3942e-05 2.20974e-05 0.0380273
0.85 6.65478e-05 2.29605e-05 0.0380273
1.02 5.54566e-05 2.47225e-05 0.0380273
1.36 4.15924e-05 2.8376e-05 0.0380273
1.7 3.32739e-05 3.21821e-05 0.0380273
2.04 0 6.38391e-05 0.0380273
END DIST

Metal 1 UNDER 3
DIST count 12 width 0.17
0.17 0.000332739 9.38951e-06 0.0380273
0.34 0.00016637 1.08188e-05 0.0380273
0.425 0.000133096 1.15463e-05 0.0380273
0.51 0.000110913 1.22818e-05 0.0380273
0.595 9.50683e-05 1.30256e-05 0.0380273
0.68 8.31848e-05 1.37769e-05 0.0380273
0.765 7.3942e-05 1.45363e-05 0.0380273
0.85 6.65478e-05 1.53026e-05 0.0380273
1.02 5.54566e-05 1.68556e-05 0.0380273
1.36 4.15924e-05 2.00363e-05 0.0380273
1.7 3.32739e-05 2.32996e-05 0.0380273
2.04 0 5.43525e-05 0.0380273
END DIST

Metal 1 UNDER 4
DIST count 12 width 0.17
0.17 0.000332739 7.88815e-06 0.0380273
0.34 0.00016637 9.26387e-06 0.0380273
0.425 0.000133096 9.96031e-06 0.0380273
0.51 0.000110913 1.06621e-05 0.0380273
0.595 9.50683e-05 1.13694e-05 0.0380273
0.68 8.31848e-05 1.20815e-05 0.0380273
0.765 7.3942e-05 1.27983e-05 0.0380273
0.85 6.65478e-05 1.35198e-05 0.0380273
1.02 5.54566e-05 1.49751e-05 0.0380273
1.36 4.15924e-05 1.79299e-05 0.0380273
1.7 3.32739e-05 2.09289e-05 0.0380273
2.04 0 5.16836e-05 0.0380273
END DIST

Metal 1 UNDER 5
DIST count 12 width 0.17
0.17 0.000332739 6.88731e-06 0.0380273
0.34 0.00016637 8.21159e-06 0.0380273
0.425 0.000133096 8.87926e-06 0.0380273
0.51 0.000110913 9.55042e-06 0.0380273
0.595 9.50683e-05 1.02247e-05 0.0380273
0.68 8.31848e-05 1.09021e-05 0.0380273
0.765 7.3942e-05 1.15824e-05 0.0380273
0.85 6.65478e-05 1.22653e-05 0.0380273
1.02 5.54566e-05 1.36383e-05 0.0380273
1.36 4.15924e-05 1.64069e-05 0.0380273
1.7 3.32739e-05 1.91945e-05 0.0380273
2.04 0 4.97147e-05 0.0380273
END DIST

Metal 1 UNDER 6
DIST count 12 width 0.17
0.17 0.000332739 6.66521e-06 0.0380273
0.34 0.00016637 8.01741e-06 0.0380273
0.425 0.000133096 8.69733e-06 0.0380273
0.51 0.000110913 9.37929e-06 0.0380273
0.595 9.50683e-05 1.00634e-05 0.0380273
0.68 8.31848e-05 1.07493e-05 0.0380273
0.765 7.3942e-05 1.14368e-05 0.0380273
0.85 6.65478e-05 1.21256e-05 0.0380273
1.02 5.54566e-05 1.35067e-05 0.0380273
1.36 4.15924e-05 1.62763e-05 0.0380273
1.7 3.32739e-05 1.90445e-05 0.0380273
2.04 0 4.95252e-05 0.0380273
END DIST

Metal 1 DIAGUNDER
WIDTH Table 1 entries:  0.17

Metal 1 DIAGUNDER 2
DIST count 13 width 0.17
0 0 1.64642e-05 0.0380273
0.17 0 2.63708e-06 0.0380273
0.34 0 2.6325e-06 0.0380273
0.425 0 2.62935e-06 0.0380273
0.51 0 2.62561e-06 0.0380273
0.595 0 2.62127e-06 0.0380273
0.68 0 2.6164e-06 0.0380273
0.765 0 2.61093e-06 0.0380273
0.85 0 2.60487e-06 0.0380273
1.02 0 2.59109e-06 0.0380273
1.36 0 2.55668e-06 0.0380273
1.7 0 2.51319e-06 0.0380273
2.04 0 2.4609e-06 0.0380273
END DIST

Metal 1 DIAGUNDER 3
DIST count 13 width 0.17
0 0 5.55627e-06 0.0380273
0.17 0 1.92169e-06 0.0380273
0.34 0 1.91836e-06 0.0380273
0.425 0 1.91604e-06 0.0380273
0.51 0 1.91331e-06 0.0380273
0.595 0 1.91016e-06 0.0380273
0.68 0 1.9066e-06 0.0380273
0.765 0 1.90261e-06 0.0380273
0.85 0 1.89822e-06 0.0380273
1.02 0 1.88818e-06 0.0380273
1.36 0 1.86304e-06 0.0380273
1.7 0 1.83137e-06 0.0380273
2.04 0 1.79329e-06 0.0380273
END DIST

Metal 1 DIAGUNDER 4
DIST count 13 width 0.17
0 0 3.91557e-06 0.0380273
0.17 0 2.19471e-06 0.0380273
0.34 0 2.19055e-06 0.0380273
0.425 0 2.18776e-06 0.0380273
0.51 0 2.18449e-06 0.0380273
0.595 0 2.18075e-06 0.0380273
0.68 0 2.17653e-06 0.0380273
0.765 0 2.17184e-06 0.0380273
0.85 0 2.16661e-06 0.0380273
1.02 0 2.15484e-06 0.0380273
1.36 0 2.12549e-06 0.0380273
1.7 0 2.08877e-06 0.0380273
2.04 0 2.04462e-06 0.0380273
END DIST

Metal 1 DIAGUNDER 5
DIST count 13 width 0.17
0 0 2.2363e-06 0.0380273
0.17 0 1.7243e-06 0.0380273
0.34 0 1.72109e-06 0.0380273
0.425 0 1.71889e-06 0.0380273
0.51 0 1.71634e-06 0.0380273
0.595 0 1.71343e-06 0.0380273
0.68 0 1.7101e-06 0.0380273
0.765 0 1.70642e-06 0.0380273
0.85 0 1.70238e-06 0.0380273
1.02 0 1.69311e-06 0.0380273
1.36 0 1.67017e-06 0.0380273
1.7 0 1.6413e-06 0.0380273
2.04 0 1.60671e-06 0.0380273
END DIST

Metal 1 DIAGUNDER 6
DIST count 0 width 0.17
END DIST

Metal 2 RESOVER
WIDTH Table 1 entries:  0.14

Metal 2 RESOVER 0
DIST count 55 width 0.14
0 0 0 0.000901876
0 0.2 0 0.000901876
0 0.34 0 0.000901876
0 0.47 0 0.000901876
0 0.54 0 0.000901876
0 0.68 0 0.000901876
0 0.81 0 0.000901876
0 0.88 0 0.000901876
0 1.02 0 0.000901876
0 1.36 0 0.000901876
0.2 0.2 0 0.000901876
0.2 0.34 0 0.000901876
0.2 0.47 0 0.000901876
0.2 0.54 0 0.000901876
0.2 0.68 0 0.000901876
0.2 0.81 0 0.000901876
0.2 0.88 0 0.000901876
0.2 1.02 0 0.000901876
0.2 1.36 0 0.000901876
0.34 0.34 0 0.000901876
0.34 0.47 0 0.000901876
0.34 0.54 0 0.000901876
0.34 0.68 0 0.000901876
0.34 0.81 0 0.000901876
0.34 0.88 0 0.000901876
0.34 1.02 0 0.000901876
0.34 1.36 0 0.000901876
0.47 0.47 0 0.000901876
0.47 0.54 0 0.000901876
0.47 0.68 0 0.000901876
0.47 0.81 0 0.000901876
0.47 0.88 0 0.000901876
0.47 1.02 0 0.000901876
0.47 1.36 0 0.000901876
0.54 0.54 0 0.000901876
0.54 0.68 0 0.000901876
0.54 0.81 0 0.000901876
0.54 0.88 0 0.000901876
0.54 1.02 0 0.000901876
0.54 1.36 0 0.000901876
0.68 0.68 0 0.000901876
0.68 0.81 0 0.000901876
0.68 0.88 0 0.000901876
0.68 1.02 0 0.000901876
0.68 1.36 0 0.000901876
0.81 0.81 0 0.000901876
0.81 0.88 0 0.000901876
0.81 1.02 0 0.000901876
0.81 1.36 0 0.000901876
0.88 0.88 0 0.000901876
0.88 1.02 0 0.000901876
0.88 1.36 0 0.000901876
1.02 1.02 0 0.000901876
1.02 1.36 0 0.000901876
1.36 0 1.36 0.000901876
END DIST

Metal 2 RESOVER 1
DIST count 0 width 0.14
END DIST

Metal 2 OVER
WIDTH Table 1 entries:  0.14

Metal 2 OVER 0
DIST count 12 width 0.14
0.14 0.000532468 3.23398e-06 0.000450938
0.28 0.000266234 4.23474e-06 0.000450938
0.35 0.000212987 4.7347e-06 0.000450938
0.42 0.000177489 5.23431e-06 0.000450938
0.49 0.000152134 5.73344e-06 0.000450938
0.56 0.000133117 6.23207e-06 0.000450938
0.63 0.000118326 6.73009e-06 0.000450938
0.7 0.000106494 7.22745e-06 0.000450938
0.84 8.87446e-05 8.21984e-06 0.000450938
1.12 6.65584e-05 1.01933e-05 0.000450938
1.4 5.32468e-05 1.21478e-05 0.000450938
1.68 0 5.84509e-05 0.000450938
END DIST

Metal 2 OVER 1
DIST count 12 width 0.14
0.14 0.000532468 1.13459e-05 0.000450938
0.28 0.000266234 1.25998e-05 0.000450938
0.35 0.000212987 1.32435e-05 0.000450938
0.42 0.000177489 1.38981e-05 0.000450938
0.49 0.000152134 1.45635e-05 0.000450938
0.56 0.000133117 1.52394e-05 0.000450938
0.63 0.000118326 1.59259e-05 0.000450938
0.7 0.000106494 1.66222e-05 0.000450938
0.84 8.87446e-05 1.80452e-05 0.000450938
1.12 6.65584e-05 2.10051e-05 0.000450938
1.4 5.32468e-05 2.41047e-05 0.000450938
1.68 0 7.17003e-05 0.000450938
END DIST

Metal 2 UNDER
WIDTH Table 1 entries:  0.14

Metal 2 UNDER 3
DIST count 12 width 0.14
0.14 0.000532468 1.42941e-05 0.000450938
0.28 0.000266234 1.55948e-05 0.000450938
0.35 0.000212987 1.62676e-05 0.000450938
0.42 0.000177489 1.69541e-05 0.000450938
0.49 0.000152134 1.76534e-05 0.000450938
0.56 0.000133117 1.83665e-05 0.000450938
0.63 0.000118326 1.90919e-05 0.000450938
0.7 0.000106494 1.98299e-05 0.000450938
0.84 8.87446e-05 2.13439e-05 0.000450938
1.12 6.65584e-05 2.45133e-05 0.000450938
1.4 5.32468e-05 2.7859e-05 0.000450938
1.68 0 7.57344e-05 0.000450938
END DIST

Metal 2 UNDER 4
DIST count 12 width 0.14
0.14 0.000532468 6.89206e-06 0.000450938
0.28 0.000266234 8.07608e-06 0.000450938
0.35 0.000212987 8.67908e-06 0.000450938
0.42 0.000177489 9.28907e-06 0.000450938
0.49 0.000152134 9.9061e-06 0.000450938
0.56 0.000133117 1.05301e-05 0.000450938
0.63 0.000118326 1.11605e-05 0.000450938
0.7 0.000106494 1.17976e-05 0.000450938
0.84 8.87446e-05 1.30907e-05 0.000450938
1.12 6.65584e-05 1.57479e-05 0.000450938
1.4 5.32468e-05 1.84907e-05 0.000450938
1.68 0 6.56786e-05 0.000450938
END DIST

Metal 2 UNDER 5
DIST count 12 width 0.14
0.14 0.000532468 5.22345e-06 0.000450938
0.28 0.000266234 6.33698e-06 0.000450938
0.35 0.000212987 6.90058e-06 0.000450938
0.42 0.000177489 7.468e-06 0.000450938
0.49 0.000152134 8.03979e-06 0.000450938
0.56 0.000133117 8.61569e-06 0.000450938
0.63 0.000118326 9.19517e-06 0.000450938
0.7 0.000106494 9.77861e-06 0.000450938
0.84 8.87446e-05 1.09559e-05 0.000450938
1.12 6.65584e-05 1.33503e-05 0.000450938
1.4 5.32468e-05 1.57897e-05 0.000450938
1.68 0 6.26374e-05 0.000450938
END DIST

Metal 2 UNDER 6
DIST count 12 width 0.14
0.14 0.000532468 4.92799e-06 0.000450938
0.28 0.000266234 6.08683e-06 0.000450938
0.35 0.000212987 6.671e-06 0.000450938
0.42 0.000177489 7.25804e-06 0.000450938
0.49 0.000152134 7.84794e-06 0.000450938
0.56 0.000133117 8.44051e-06 0.000450938
0.63 0.000118326 9.03579e-06 0.000450938
0.7 0.000106494 9.63337e-06 0.000450938
0.84 8.87446e-05 1.08354e-05 0.000450938
1.12 6.65584e-05 1.32625e-05 0.000450938
1.4 5.32468e-05 1.57131e-05 0.000450938
1.68 0 6.25501e-05 0.000450938
END DIST

Metal 2 DIAGUNDER
WIDTH Table 1 entries:  0.14

Metal 2 DIAGUNDER 3
DIST count 13 width 0.14
0 0 2.50049e-05 0.000450938
0.14 0 1.46463e-05 0.000450938
0.28 0 1.43409e-05 0.000450938
0.35 0 1.41625e-05 0.000450938
0.42 0 1.40151e-05 0.000450938
0.49 0 1.38677e-05 0.000450938
0.56 0 1.37202e-05 0.000450938
0.63 0 1.35727e-05 0.000450938
0.7 0 1.33843e-05 0.000450938
0.84 0 8.50173e-06 0.000450938
1.12 0 3.71703e-06 0.000450938
1.4 0 3.70527e-06 0.000450938
1.68 0 2.71162e-06 0.000450938
END DIST

Metal 2 DIAGUNDER 4
DIST count 13 width 0.14
0 0 1.13642e-05 0.000450938
0.14 0 1.39644e-05 0.000450938
0.28 0 1.35942e-05 0.000450938
0.35 0 1.34198e-05 0.000450938
0.42 0 1.32771e-05 0.000450938
0.49 0 1.31343e-05 0.000450938
0.56 0 8.34978e-06 0.000450938
0.63 0 3.60584e-06 0.000450938
0.7 0 3.55498e-06 0.000450938
0.84 0 3.53838e-06 0.000450938
1.12 0 3.53319e-06 0.000450938
1.4 0 3.51291e-06 0.000450938
1.68 0 2.62973e-06 0.000450938
END DIST

Metal 2 DIAGUNDER 5
DIST count 13 width 0.14
0 0 8.07843e-06 0.000450938
0.14 0 1.2691e-05 0.000450938
0.28 0 1.23939e-05 0.000450938
0.35 0 1.22465e-05 0.000450938
0.42 0 1.21214e-05 0.000450938
0.49 0 1.19967e-05 0.000450938
0.56 0 7.23081e-06 0.000450938
0.63 0 2.5057e-06 0.000450938
0.7 0 2.46955e-06 0.000450938
0.84 0 2.45758e-06 0.000450938
1.12 0 2.45433e-06 0.000450938
1.4 0 2.44055e-06 0.000450938
1.68 0 1.82619e-06 0.000450938
END DIST

Metal 2 DIAGUNDER 6
DIST count 13 width 0.14
0 0 4.55974e-06 0.000450938
0.14 0 4.62504e-06 0.000450938
0.28 0 4.54805e-06 0.000450938
0.35 0 4.53954e-06 0.000450938
0.42 0 4.53016e-06 0.000450938
0.49 0 4.52006e-06 0.000450938
0.56 0 4.50924e-06 0.000450938
0.63 0 4.49776e-06 0.000450938
0.7 0 4.48564e-06 0.000450938
0.84 0 4.45952e-06 0.000450938
1.12 0 4.39957e-06 0.000450938
1.4 0 4.32944e-06 0.000450938
1.68 0 4.08449e-06 0.000450938
END DIST

Metal 2 OVERUNDER
WIDTH Table 1 entries:  0.14

Metal 2 OVER 1 UNDER 3
DIST count 12 width 0.14
0.14 0.000532559 2.24967e-05 0.000450938
0.28 0.000266238 2.40729e-05 0.000450938
0.35 0.000212987 2.48909e-05 0.000450938
0.42 0.000177489 2.57323e-05 0.000450938
0.49 0.000152146 2.65939e-05 0.000450938
0.56 0.000133152 2.74755e-05 0.000450938
0.63 0.000118377 2.83836e-05 0.000450938
0.7 0.000106521 2.93292e-05 0.000450938
0.84 8.87759e-05 3.12723e-05 0.000450938
1.12 6.6578e-05 3.54325e-05 0.000450938
1.4 5.32468e-05 3.99304e-05 0.000450938
1.68 0 8.90983e-05 0.000450938
END DIST

Metal 2 OVER 1 UNDER 4
DIST count 12 width 0.14
0.14 0.000532577 1.5215e-05 0.000450938
0.28 0.000266293 1.66712e-05 0.000450938
0.35 0.000213042 1.74191e-05 0.000450938
0.42 0.000177544 1.81841e-05 0.000450938
0.49 0.000152201 1.89633e-05 0.000450938
0.56 0.000133207 1.97558e-05 0.000450938
0.63 0.000118432 2.05689e-05 0.000450938
0.7 0.000106576 2.14136e-05 0.000450938
0.84 8.88307e-05 2.31358e-05 0.000450938
1.12 6.66328e-05 2.67838e-05 0.000450938
1.4 5.33016e-05 3.06788e-05 0.000450938
1.68 0 7.92141e-05 0.000450938
END DIST

Metal 2 OVER 1 UNDER 5
DIST count 12 width 0.14
0.14 0.000532577 1.35237e-05 0.000450938
0.28 0.000266289 1.49097e-05 0.000450938
0.35 0.000213042 1.55652e-05 0.000450938
0.42 0.000177544 1.62409e-05 0.000450938
0.49 0.000152189 1.6979e-05 0.000450938
0.56 0.000133172 1.77321e-05 0.000450938
0.63 0.000118381 1.85e-05 0.000450938
0.7 0.000106548 1.92825e-05 0.000450938
0.84 8.87994e-05 2.08903e-05 0.000450938
1.12 6.66133e-05 2.42712e-05 0.000450938
1.4 5.33016e-05 2.78558e-05 0.000450938
1.68 0 7.60508e-05 0.000450938
END DIST

Metal 2 OVER 1 UNDER 6
DIST count 12 width 0.14
0.14 0.000532522 1.31359e-05 0.000450938
0.28 0.000266234 1.45496e-05 0.000450938
0.35 0.000212987 1.51798e-05 0.000450938
0.42 0.000177489 1.59218e-05 0.000450938
0.49 0.000152134 1.6678e-05 0.000450938
0.56 0.000133117 1.74478e-05 0.000450938
0.63 0.000118326 1.82316e-05 0.000450938
0.7 0.000106494 1.90281e-05 0.000450938
0.84 8.87446e-05 2.06607e-05 0.000450938
1.12 6.65584e-05 2.40743e-05 0.000450938
1.4 5.32468e-05 2.767e-05 0.000450938
1.68 0 7.57995e-05 0.000450938
END DIST

Metal 3 RESOVER
WIDTH Table 1 entries:  0.14

Metal 3 RESOVER 0
DIST count 55 width 0.14
0 0 0 0.000901876
0 0.32 0 0.000901876
0 0.46 0 0.000901876
0 0.71 0 0.000901876
0 0.78 0 0.000901876
0 0.92 0 0.000901876
0 1.17 0 0.000901876
0 1.24 0 0.000901876
0 1.38 0 0.000901876
0 1.84 0 0.000901876
0.32 0.32 0 0.000901876
0.32 0.46 0 0.000901876
0.32 0.71 0 0.000901876
0.32 0.78 0 0.000901876
0.32 0.92 0 0.000901876
0.32 1.17 0 0.000901876
0.32 1.24 0 0.000901876
0.32 1.38 0 0.000901876
0.32 1.84 0 0.000901876
0.46 0.46 0 0.000901876
0.46 0.71 0 0.000901876
0.46 0.78 0 0.000901876
0.46 0.92 0 0.000901876
0.46 1.17 0 0.000901876
0.46 1.24 0 0.000901876
0.46 1.38 0 0.000901876
0.46 1.84 0 0.000901876
0.71 0.71 0 0.000901876
0.71 0.78 0 0.000901876
0.71 0.92 0 0.000901876
0.71 1.17 0 0.000901876
0.71 1.24 0 0.000901876
0.71 1.38 0 0.000901876
0.71 1.84 0 0.000901876
0.78 0.78 0 0.000901876
0.78 0.92 0 0.000901876
0.78 1.17 0 0.000901876
0.78 1.24 0 0.000901876
0.78 1.38 0 0.000901876
0.78 1.84 0 0.000901876
0.92 0.92 0 0.000901876
0.92 1.17 0 0.000901876
0.92 1.24 0 0.000901876
0.92 1.38 0 0.000901876
0.92 1.84 0 0.000901876
1.17 1.17 0 0.000901876
1.17 1.24 0 0.000901876
1.17 1.38 0 0.000901876
1.17 1.84 0 0.000901876
1.24 1.24 0 0.000901876
1.24 1.38 0 0.000901876
1.24 1.84 0 0.000901876
1.38 1.38 0 0.000901876
1.38 1.84 0 0.000901876
1.84 0 1.84 0.000901876
END DIST

Metal 3 RESOVER 1
DIST count 0 width 0.14
END DIST

Metal 3 RESOVER 2
DIST count 0 width 0.14
END DIST

Metal 3 OVER
WIDTH Table 1 entries:  0.14

Metal 3 OVER 0
DIST count 12 width 0.14
0.14 0.000564214 2.50837e-06 0.000450938
0.28 0.000282107 3.43979e-06 0.000450938
0.35 0.000225685 3.90516e-06 0.000450938
0.42 0.000188071 4.37013e-06 0.000450938
0.49 0.000161203 4.8347e-06 0.000450938
0.56 0.000141053 5.29881e-06 0.000450938
0.63 0.000125381 5.76234e-06 0.000450938
0.7 0.000112843 6.22522e-06 0.000450938
0.84 9.40356e-05 7.14888e-06 0.000450938
1.12 7.05267e-05 8.98568e-06 0.000450938
1.4 5.64214e-05 1.08048e-05 0.000450938
1.68 0 5.96196e-05 0.000450938
END DIST

Metal 3 OVER 1
DIST count 12 width 0.14
0.14 0.000564214 5.19957e-06 0.000450938
0.28 0.000282107 6.34163e-06 0.000450938
0.35 0.000225685 6.92399e-06 0.000450938
0.42 0.000188071 7.51403e-06 0.000450938
0.49 0.000161203 8.11079e-06 0.000450938
0.56 0.000141053 8.71497e-06 0.000450938
0.63 0.000125381 9.32597e-06 0.000450938
0.7 0.000112843 9.94394e-06 0.000450938
0.84 9.40356e-05 1.11994e-05 0.000450938
1.12 7.05267e-05 1.37843e-05 0.000450938
1.4 5.64214e-05 1.64583e-05 0.000450938
1.68 0 6.62265e-05 0.000450938
END DIST

Metal 3 OVER 2
DIST count 12 width 0.14
0.14 0.000564214 1.26823e-05 0.000450938
0.28 0.000282107 1.39771e-05 0.000450938
0.35 0.000225685 1.46447e-05 0.000450938
0.42 0.000188071 1.53257e-05 0.000450938
0.49 0.000161203 1.60193e-05 0.000450938
0.56 0.000141053 1.67262e-05 0.000450938
0.63 0.000125381 1.74454e-05 0.000450938
0.7 0.000112843 1.81772e-05 0.000450938
0.84 9.40356e-05 1.96772e-05 0.000450938
1.12 7.05267e-05 2.28153e-05 0.000450938
1.4 5.64214e-05 2.61232e-05 0.000450938
1.68 0 7.66006e-05 0.000450938
END DIST

Metal 3 UNDER
WIDTH Table 1 entries:  0.14

Metal 3 UNDER 4
DIST count 12 width 0.14
0.14 0.000564214 1.02845e-05 0.000450938
0.28 0.000282107 1.1578e-05 0.000450938
0.35 0.000225685 1.22432e-05 0.000450938
0.42 0.000188071 1.29201e-05 0.000450938
0.49 0.000161203 1.3609e-05 0.000450938
0.56 0.000141053 1.43096e-05 0.000450938
0.63 0.000125381 1.50212e-05 0.000450938
0.7 0.000112843 1.57441e-05 0.000450938
0.84 9.40356e-05 1.72227e-05 0.000450938
1.12 7.05267e-05 2.03032e-05 0.000450938
1.4 5.64214e-05 2.35346e-05 0.000450938
1.68 0 7.3917e-05 0.000450938
END DIST

Metal 3 UNDER 5
DIST count 12 width 0.14
0.14 0.000564214 5.02042e-06 0.000450938
0.28 0.000282107 6.1338e-06 0.000450938
0.35 0.000225685 6.6996e-06 0.000450938
0.42 0.000188071 7.27107e-06 0.000450938
0.49 0.000161203 7.84841e-06 0.000450938
0.56 0.000141053 8.43135e-06 0.000450938
0.63 0.000125381 9.01977e-06 0.000450938
0.7 0.000112843 9.61324e-06 0.000450938
0.84 9.40356e-05 1.08157e-05 0.000450938
1.12 7.05267e-05 1.32776e-05 0.000450938
1.4 5.64214e-05 1.58065e-05 0.000450938
1.68 0 6.54093e-05 0.000450938
END DIST

Metal 3 UNDER 6
DIST count 12 width 0.14
0.14 0.000564214 4.45404e-06 0.000450938
0.28 0.000282107 5.60891e-06 0.000450938
0.35 0.000225685 6.19246e-06 0.000450938
0.42 0.000188071 6.77958e-06 0.000450938
0.49 0.000161203 7.37056e-06 0.000450938
0.56 0.000141053 7.96497e-06 0.000450938
0.63 0.000125381 8.56277e-06 0.000450938
0.7 0.000112843 9.16396e-06 0.000450938
0.84 9.40356e-05 1.03751e-05 0.000450938
1.12 7.05267e-05 1.28295e-05 0.000450938
1.4 5.64214e-05 1.53178e-05 0.000450938
1.68 0 6.48474e-05 0.000450938
END DIST

Metal 3 DIAGUNDER
WIDTH Table 1 entries:  0.14

Metal 3 DIAGUNDER 4
DIST count 13 width 0.14
0 0 1.34416e-05 0.000450938
0.14 0 4.06941e-06 0.000450938
0.28 0 4.06371e-06 0.000450938
0.35 0 4.05996e-06 0.000450938
0.42 0 4.05563e-06 0.000450938
0.49 0 4.05065e-06 0.000450938
0.56 0 4.04509e-06 0.000450938
0.63 0 4.03896e-06 0.000450938
0.7 0 4.03218e-06 0.000450938
0.84 0 4.01688e-06 0.000450938
1.12 0 3.979e-06 0.000450938
1.4 0 3.93167e-06 0.000450938
1.68 0 3.87489e-06 0.000450938
END DIST

Metal 3 DIAGUNDER 5
DIST count 13 width 0.14
0 0 3.50476e-06 0.000450938
0.14 0 2.3233e-06 0.000450938
0.28 0 2.32013e-06 0.000450938
0.35 0 2.31797e-06 0.000450938
0.42 0 2.31551e-06 0.000450938
0.49 0 2.31277e-06 0.000450938
0.56 0 2.3096e-06 0.000450938
0.63 0 2.30613e-06 0.000450938
0.7 0 2.30231e-06 0.000450938
0.84 0 2.29358e-06 0.000450938
1.12 0 2.27208e-06 0.000450938
1.4 0 2.24517e-06 0.000450938
1.68 0 2.21284e-06 0.000450938
END DIST

Metal 3 DIAGUNDER 6
DIST count 13 width 0.14
0 0 5.59856e-06 0.000450938
0.14 0 5.47662e-06 0.000450938
0.28 0 5.45635e-06 0.000450938
0.35 0 5.44502e-06 0.000450938
0.42 0 5.43283e-06 0.000450938
0.49 0 5.41984e-06 0.000450938
0.56 0 5.40606e-06 0.000450938
0.63 0 5.39149e-06 0.000450938
0.7 0 5.37612e-06 0.000450938
0.84 0 5.34293e-06 0.000450938
1.12 0 5.26703e-06 0.000450938
1.4 0 5.1785e-06 0.000450938
1.68 0 5.07763e-06 0.000450938
END DIST

Metal 3 OVERUNDER
WIDTH Table 1 entries:  0.14

Metal 3 OVER 1 UNDER 4
DIST count 12 width 0.14
0.14 0.000564214 1.29757e-05 0.000450938
0.28 0.000282107 1.44799e-05 0.000450938
0.35 0.000225685 1.5262e-05 0.000450938
0.42 0.000188071 1.6064e-05 0.000450938
0.49 0.000161203 1.68851e-05 0.000450938
0.56 0.000141053 1.77258e-05 0.000450938
0.63 0.000125381 1.85848e-05 0.000450938
0.7 0.000112843 1.94628e-05 0.000450938
0.84 9.40356e-05 2.12732e-05 0.000450938
1.12 7.05267e-05 2.51019e-05 0.000450938
1.4 5.64214e-05 2.91881e-05 0.000450938
1.68 0 8.05239e-05 0.000450938
END DIST

Metal 3 OVER 1 UNDER 5
DIST count 12 width 0.14
0.14 0.000564214 7.71162e-06 0.000450938
0.28 0.000282107 9.03564e-06 0.000450938
0.35 0.000225685 9.71843e-06 0.000450938
0.42 0.000188071 1.0415e-05 0.000450938
0.49 0.000161203 1.11245e-05 0.000450938
0.56 0.000141053 1.18475e-05 0.000450938
0.63 0.000125381 1.25834e-05 0.000450938
0.7 0.000112843 1.3332e-05 0.000450938
0.84 9.40356e-05 1.48662e-05 0.000450938
1.12 7.05267e-05 1.80763e-05 0.000450938
1.4 5.64214e-05 2.146e-05 0.000450938
1.68 0 7.20162e-05 0.000450938
END DIST

Metal 3 OVER 1 UNDER 6
DIST count 12 width 0.14
0.14 0.000564214 7.14524e-06 0.000450938
0.28 0.000282107 8.51075e-06 0.000450938
0.35 0.000225685 9.21129e-06 0.000450938
0.42 0.000188071 9.92348e-06 0.000450938
0.49 0.000161203 1.06466e-05 0.000450938
0.56 0.000141053 1.13811e-05 0.000450938
0.63 0.000125381 1.21264e-05 0.000450938
0.7 0.000112843 1.28827e-05 0.000450938
0.84 9.40356e-05 1.44256e-05 0.000450938
1.12 7.05267e-05 1.76282e-05 0.000450938
1.4 5.64214e-05 2.09713e-05 0.000450938
1.68 0 7.14543e-05 0.000450938
END DIST

Metal 3 OVER 2 UNDER 4
DIST count 12 width 0.14
0.14 0.000564214 2.04584e-05 0.000450938
0.28 0.000282107 2.21153e-05 0.000450938
0.35 0.000225685 2.29827e-05 0.000450938
0.42 0.000188071 2.38757e-05 0.000450938
0.49 0.000161203 2.47937e-05 0.000450938
0.56 0.000141053 2.5737e-05 0.000450938
0.63 0.000125381 2.67043e-05 0.000450938
0.7 0.000112843 2.76961e-05 0.000450938
0.84 9.40356e-05 2.9751e-05 0.000450938
1.12 7.05267e-05 3.41328e-05 0.000450938
1.4 5.64214e-05 3.88531e-05 0.000450938
1.68 0 9.08981e-05 0.000450938
END DIST

Metal 3 OVER 2 UNDER 5
DIST count 12 width 0.14
0.14 0.000564214 1.51943e-05 0.000450938
0.28 0.000282107 1.66711e-05 0.000450938
0.35 0.000225685 1.74391e-05 0.000450938
0.42 0.000188071 1.82266e-05 0.000450938
0.49 0.000161203 1.9033e-05 0.000450938
0.56 0.000141053 1.98587e-05 0.000450938
0.63 0.000125381 2.07029e-05 0.000450938
0.7 0.000112843 2.15652e-05 0.000450938
0.84 9.40356e-05 2.3344e-05 0.000450938
1.12 7.05267e-05 2.71072e-05 0.000450938
1.4 5.64214e-05 3.11249e-05 0.000450938
1.68 0 8.23903e-05 0.000450938
END DIST

Metal 3 OVER 2 UNDER 6
DIST count 12 width 0.14
0.14 0.000564214 1.46279e-05 0.000450938
0.28 0.000282107 1.61462e-05 0.000450938
0.35 0.000225685 1.6932e-05 0.000450938
0.42 0.000188071 1.77351e-05 0.000450938
0.49 0.000161203 1.85552e-05 0.000450938
0.56 0.000141053 1.93924e-05 0.000450938
0.63 0.000125381 2.02459e-05 0.000450938
0.7 0.000112843 2.11159e-05 0.000450938
0.84 9.40356e-05 2.29035e-05 0.000450938
1.12 7.05267e-05 2.66591e-05 0.000450938
1.4 5.64214e-05 3.06363e-05 0.000450938
1.68 0 8.18284e-05 0.000450938
END DIST

Metal 4 RESOVER
WIDTH Table 1 entries:  0.3

Metal 4 RESOVER 0
DIST count 55 width 0.3
0 0 0 0.000158249
0 0.38 0 0.000158249
0 0.68 0 0.000158249
0 0.91 0 0.000158249
0 1.06 0 0.000158249
0 1.36 0 0.000158249
0 1.59 0 0.000158249
0 1.74 0 0.000158249
0 2.04 0 0.000158249
0 2.72 0 0.000158249
0.38 0.38 0 0.000158249
0.38 0.68 0 0.000158249
0.38 0.91 0 0.000158249
0.38 1.06 0 0.000158249
0.38 1.36 0 0.000158249
0.38 1.59 0 0.000158249
0.38 1.74 0 0.000158249
0.38 2.04 0 0.000158249
0.38 2.72 0 0.000158249
0.68 0.68 0 0.000158249
0.68 0.91 0 0.000158249
0.68 1.06 0 0.000158249
0.68 1.36 0 0.000158249
0.68 1.59 0 0.000158249
0.68 1.74 0 0.000158249
0.68 2.04 0 0.000158249
0.68 2.72 0 0.000158249
0.91 0.91 0 0.000158249
0.91 1.06 0 0.000158249
0.91 1.36 0 0.000158249
0.91 1.59 0 0.000158249
0.91 1.74 0 0.000158249
0.91 2.04 0 0.000158249
0.91 2.72 0 0.000158249
1.06 1.06 0 0.000158249
1.06 1.36 0 0.000158249
1.06 1.59 0 0.000158249
1.06 1.74 0 0.000158249
1.06 2.04 0 0.000158249
1.06 2.72 0 0.000158249
1.36 1.36 0 0.000158249
1.36 1.59 0 0.000158249
1.36 1.74 0 0.000158249
1.36 2.04 0 0.000158249
1.36 2.72 0 0.000158249
1.59 1.59 0 0.000158249
1.59 1.74 0 0.000158249
1.59 2.04 0 0.000158249
1.59 2.72 0 0.000158249
1.74 1.74 0 0.000158249
1.74 2.04 0 0.000158249
1.74 2.72 0 0.000158249
2.04 2.04 0 0.000158249
2.04 2.72 0 0.000158249
2.72 0 2.72 0.000158249
END DIST

Metal 4 RESOVER 1
DIST count 0 width 0.3
END DIST

Metal 4 RESOVER 2
DIST count 0 width 0.3
END DIST

Metal 4 RESOVER 3
DIST count 0 width 0.3
END DIST

Metal 4 OVER
WIDTH Table 1 entries:  0.3

Metal 4 OVER 0
DIST count 12 width 0.3
0.3 0.000197669 3.82008e-06 7.91246e-05
0.6 0.000135247 5.44934e-06 7.91246e-05
0.75 0.000116805 6.26089e-06 7.91246e-05
0.9 0.000102788 7.06965e-06 7.91246e-05
1.05 9.17751e-05 7.87505e-06 7.91246e-05
1.2 8.28936e-05 8.67657e-06 7.91246e-05
1.35 7.55791e-05 9.47362e-06 7.91246e-05
1.5 6.94512e-05 1.02657e-05 7.91246e-05
1.8 5.97604e-05 1.18326e-05 7.91246e-05
2.4 4.67217e-05 1.4883e-05 7.91246e-05
3 3.83537e-05 1.77943e-05 7.91246e-05
3.6 0 5.30623e-05 7.91246e-05
END DIST

Metal 4 OVER 1
DIST count 12 width 0.3
0.3 0.000197669 7.46221e-06 7.91246e-05
0.6 0.000135247 9.89914e-06 7.91246e-05
0.75 0.000116805 1.11708e-05 7.91246e-05
0.9 0.000102788 1.24743e-05 7.91246e-05
1.05 9.17751e-05 1.38095e-05 7.91246e-05
1.2 8.28936e-05 1.51731e-05 7.91246e-05
1.35 7.55791e-05 1.65625e-05 7.91246e-05
1.5 6.94512e-05 1.79766e-05 7.91246e-05
1.8 5.97604e-05 2.08696e-05 7.91246e-05
2.4 4.67217e-05 2.68462e-05 7.91246e-05
3 3.83537e-05 3.29408e-05 7.91246e-05
3.6 0 7.15087e-05 7.91246e-05
END DIST

Metal 4 OVER 2
DIST count 12 width 0.3
0.3 0.000197669 1.02721e-05 7.91246e-05
0.6 0.000135247 1.29065e-05 7.91246e-05
0.75 0.000116805 1.42907e-05 7.91246e-05
0.9 0.000102788 1.5718e-05 7.91246e-05
1.05 9.17751e-05 1.71824e-05 7.91246e-05
1.2 8.28936e-05 1.86855e-05 7.91246e-05
1.35 7.55791e-05 2.02234e-05 7.91246e-05
1.5 6.94512e-05 2.17932e-05 7.91246e-05
1.8 5.97604e-05 2.50199e-05 7.91246e-05
2.4 4.67217e-05 3.17338e-05 7.91246e-05
3 3.83537e-05 3.86368e-05 7.91246e-05
3.6 0 7.80476e-05 7.91246e-05
END DIST

Metal 4 OVER 3
DIST count 12 width 0.3
0.3 0.000197669 1.92885e-05 7.91246e-05
0.6 0.000135247 2.23061e-05 7.91246e-05
0.75 0.000116805 2.39098e-05 7.91246e-05
0.9 0.000102788 2.55705e-05 7.91246e-05
1.05 9.17751e-05 2.72889e-05 7.91246e-05
1.2 8.28936e-05 2.90597e-05 7.91246e-05
1.35 7.55791e-05 3.08817e-05 7.91246e-05
1.5 6.94512e-05 3.27477e-05 7.91246e-05
1.8 5.97604e-05 3.66074e-05 7.91246e-05
2.4 4.67217e-05 4.47228e-05 7.91246e-05
3 3.83537e-05 5.31496e-05 7.91246e-05
3.6 0 9.41454e-05 7.91246e-05
END DIST

Metal 4 UNDER
WIDTH Table 1 entries:  0.3

Metal 4 UNDER 5
DIST count 12 width 0.3
0.3 0.000197669 2.09628e-05 7.91246e-05
0.6 0.000135247 2.37362e-05 7.91246e-05
0.75 0.000116805 2.51942e-05 7.91246e-05
0.9 0.000102788 2.66967e-05 7.91246e-05
1.05 9.17751e-05 2.82412e-05 7.91246e-05
1.2 8.28936e-05 2.98256e-05 7.91246e-05
1.35 7.55791e-05 3.14471e-05 7.91246e-05
1.5 6.94512e-05 3.3102e-05 7.91246e-05
1.8 5.97604e-05 3.65036e-05 7.91246e-05
2.4 4.67217e-05 4.35811e-05 7.91246e-05
3 3.83537e-05 5.08492e-05 7.91246e-05
3.6 0 9.06135e-05 7.91246e-05
END DIST

Metal 4 UNDER 6
DIST count 12 width 0.3
0.3 0.000197669 1.0359e-05 7.91246e-05
0.6 0.000135247 1.30225e-05 7.91246e-05
0.75 0.000116805 1.43926e-05 7.91246e-05
0.9 0.000102788 1.57854e-05 7.91246e-05
1.05 9.17751e-05 1.71988e-05 7.91246e-05
1.2 8.28936e-05 1.86305e-05 7.91246e-05
1.35 7.55791e-05 2.00784e-05 7.91246e-05
1.5 6.94512e-05 2.15401e-05 7.91246e-05
1.8 5.97604e-05 2.44952e-05 7.91246e-05
2.4 4.67217e-05 3.04635e-05 7.91246e-05
3 3.83537e-05 3.63745e-05 7.91246e-05
3.6 0 7.45932e-05 7.91246e-05
END DIST

Metal 4 DIAGUNDER
WIDTH Table 1 entries:  0.3

Metal 4 DIAGUNDER 5
DIST count 13 width 0.3
0 0 2.54636e-05 7.91246e-05
0.3 0 5.96579e-06 7.91246e-05
0.6 0 5.93303e-06 7.91246e-05
0.75 0 5.91054e-06 7.91246e-05
0.9 0 5.88401e-06 7.91246e-05
1.05 0 5.85347e-06 7.91246e-05
1.2 0 5.81889e-06 7.91246e-05
1.35 0 5.7803e-06 7.91246e-05
1.5 0 5.73778e-06 7.91246e-05
1.8 0 5.64098e-06 7.91246e-05
2.4 0 5.40128e-06 7.91246e-05
3 0 5.10239e-06 7.91246e-05
3.6 0 4.74761e-06 7.91246e-05
END DIST

Metal 4 DIAGUNDER 6
DIST count 13 width 0.3
0 0 1.22744e-05 7.91246e-05
0.3 0 1.05384e-05 7.91246e-05
0.6 0 1.0434e-05 7.91246e-05
0.75 0 1.03711e-05 7.91246e-05
0.9 0 1.03011e-05 7.91246e-05
1.05 0 1.0224e-05 7.91246e-05
1.2 0 1.01399e-05 7.91246e-05
1.35 0 1.00488e-05 7.91246e-05
1.5 0 9.95088e-06 7.91246e-05
1.8 0 9.73461e-06 7.91246e-05
2.4 0 9.22269e-06 7.91246e-05
3 0 8.60973e-06 7.91246e-05
3.6 0 7.90242e-06 7.91246e-05
END DIST

Metal 4 OVERUNDER
WIDTH Table 1 entries:  0.3

Metal 4 OVER 1 UNDER 5
DIST count 12 width 0.3
0.3 0.000197669 2.46049e-05 7.91246e-05
0.6 0.000135247 2.8186e-05 7.91246e-05
0.75 0.000116805 3.01041e-05 7.91246e-05
0.9 0.000102788 3.21013e-05 7.91246e-05
1.05 9.17751e-05 3.41757e-05 7.91246e-05
1.2 8.28936e-05 3.63221e-05 7.91246e-05
1.35 7.55791e-05 3.8536e-05 7.91246e-05
1.5 6.94512e-05 4.0813e-05 7.91246e-05
1.8 5.97604e-05 4.55405e-05 7.91246e-05
2.4 4.67217e-05 5.55443e-05 7.91246e-05
3 3.83537e-05 6.59957e-05 7.91246e-05
3.6 0 0.00010906 7.91246e-05
END DIST

Metal 4 OVER 1 UNDER 6
DIST count 12 width 0.3
0.3 0.000197669 1.40011e-05 7.91246e-05
0.6 0.000135247 1.74723e-05 7.91246e-05
0.75 0.000116805 1.93025e-05 7.91246e-05
0.9 0.000102788 2.119e-05 7.91246e-05
1.05 9.17751e-05 2.31332e-05 7.91246e-05
1.2 8.28936e-05 2.5127e-05 7.91246e-05
1.35 7.55791e-05 2.71673e-05 7.91246e-05
1.5 6.94512e-05 2.9251e-05 7.91246e-05
1.8 5.97604e-05 3.35322e-05 7.91246e-05
2.4 4.67217e-05 4.24267e-05 7.91246e-05
3 3.83537e-05 5.15211e-05 7.91246e-05
3.6 0 9.30395e-05 7.91246e-05
END DIST

Metal 4 OVER 2 UNDER 5
DIST count 12 width 0.3
0.3 0.000197669 2.74148e-05 7.91246e-05
0.6 0.000135247 3.11934e-05 7.91246e-05
0.75 0.000116805 3.3224e-05 7.91246e-05
0.9 0.000102788 3.53451e-05 7.91246e-05
1.05 9.17751e-05 3.75486e-05 7.91246e-05
1.2 8.28936e-05 3.98345e-05 7.91246e-05
1.35 7.55791e-05 4.21969e-05 7.91246e-05
1.5 6.94512e-05 4.46295e-05 7.91246e-05
1.8 5.97604e-05 4.96908e-05 7.91246e-05
2.4 4.67217e-05 6.04319e-05 7.91246e-05
3 3.83537e-05 7.16917e-05 7.91246e-05
3.6 0 0.000115599 7.91246e-05
END DIST

Metal 4 OVER 2 UNDER 6
DIST count 12 width 0.3
0.3 0.000197669 1.6811e-05 7.91246e-05
0.6 0.000135247 2.04797e-05 7.91246e-05
0.75 0.000116805 2.24224e-05 7.91246e-05
0.9 0.000102788 2.44337e-05 7.91246e-05
1.05 9.17751e-05 2.65061e-05 7.91246e-05
1.2 8.28936e-05 2.86394e-05 7.91246e-05
1.35 7.55791e-05 3.08282e-05 7.91246e-05
1.5 6.94512e-05 3.30676e-05 7.91246e-05
1.8 5.97604e-05 3.76825e-05 7.91246e-05
2.4 4.67217e-05 4.73142e-05 7.91246e-05
3 3.83537e-05 5.72171e-05 7.91246e-05
3.6 0 9.95784e-05 7.91246e-05
END DIST

Metal 4 OVER 3 UNDER 5
DIST count 12 width 0.3
0.3 0.000197669 3.64312e-05 7.91246e-05
0.6 0.000135247 4.0593e-05 7.91246e-05
0.75 0.000116805 4.28431e-05 7.91246e-05
0.9 0.000102788 4.51976e-05 7.91246e-05
1.05 9.17751e-05 4.76551e-05 7.91246e-05
1.2 8.28936e-05 5.02088e-05 7.91246e-05
1.35 7.55791e-05 5.28552e-05 7.91246e-05
1.5 6.94512e-05 5.5584e-05 7.91246e-05
1.8 5.97604e-05 6.12783e-05 7.91246e-05
2.4 4.67217e-05 7.34209e-05 7.91246e-05
3 3.83537e-05 8.62045e-05 7.91246e-05
3.6 0 0.000131697 7.91246e-05
END DIST

Metal 4 OVER 3 UNDER 6
DIST count 12 width 0.3
0.3 0.000197669 2.58274e-05 7.91246e-05
0.6 0.000135247 2.98793e-05 7.91246e-05
0.75 0.000116805 3.20415e-05 7.91246e-05
0.9 0.000102788 3.42863e-05 7.91246e-05
1.05 9.17751e-05 3.66126e-05 7.91246e-05
1.2 8.28936e-05 3.90137e-05 7.91246e-05
1.35 7.55791e-05 4.14865e-05 7.91246e-05
1.5 6.94512e-05 4.40221e-05 7.91246e-05
1.8 5.97604e-05 4.92699e-05 7.91246e-05
2.4 4.67217e-05 6.03032e-05 7.91246e-05
3 3.83537e-05 7.17299e-05 7.91246e-05
3.6 0 0.000115676 7.91246e-05
END DIST

Metal 5 RESOVER
WIDTH Table 1 entries:  0.3

Metal 5 RESOVER 0
DIST count 55 width 0.3
0 0 0 0.000158249
0 0.62 0 0.000158249
0 0.92 0 0.000158249
0 1.39 0 0.000158249
0 1.54 0 0.000158249
0 1.84 0 0.000158249
0 2.31 0 0.000158249
0 2.46 0 0.000158249
0 2.76 0 0.000158249
0 3.68 0 0.000158249
0.62 0.62 0 0.000158249
0.62 0.92 0 0.000158249
0.62 1.39 0 0.000158249
0.62 1.54 0 0.000158249
0.62 1.84 0 0.000158249
0.62 2.31 0 0.000158249
0.62 2.46 0 0.000158249
0.62 2.76 0 0.000158249
0.62 3.68 0 0.000158249
0.92 0.92 0 0.000158249
0.92 1.39 0 0.000158249
0.92 1.54 0 0.000158249
0.92 1.84 0 0.000158249
0.92 2.31 0 0.000158249
0.92 2.46 0 0.000158249
0.92 2.76 0 0.000158249
0.92 3.68 0 0.000158249
1.39 1.39 0 0.000158249
1.39 1.54 0 0.000158249
1.39 1.84 0 0.000158249
1.39 2.31 0 0.000158249
1.39 2.46 0 0.000158249
1.39 2.76 0 0.000158249
1.39 3.68 0 0.000158249
1.54 1.54 0 0.000158249
1.54 1.84 0 0.000158249
1.54 2.31 0 0.000158249
1.54 2.46 0 0.000158249
1.54 2.76 0 0.000158249
1.54 3.68 0 0.000158249
1.84 1.84 0 0.000158249
1.84 2.31 0 0.000158249
1.84 2.46 0 0.000158249
1.84 2.76 0 0.000158249
1.84 3.68 0 0.000158249
2.31 2.31 0 0.000158249
2.31 2.46 0 0.000158249
2.31 2.76 0 0.000158249
2.31 3.68 0 0.000158249
2.46 2.46 0 0.000158249
2.46 2.76 0 0.000158249
2.46 3.68 0 0.000158249
2.76 2.76 0 0.000158249
2.76 3.68 0 0.000158249
3.68 0 3.68 0.000158249
END DIST

Metal 5 RESOVER 1
DIST count 0 width 0.3
END DIST

Metal 5 RESOVER 2
DIST count 0 width 0.3
END DIST

Metal 5 RESOVER 3
DIST count 0 width 0.3
END DIST

Metal 5 RESOVER 4
DIST count 0 width 0.3
END DIST

Metal 5 OVER
WIDTH Table 1 entries:  0.3

Metal 5 OVER 0
DIST count 12 width 0.3
0.3 0.000397306 3.58559e-06 7.91246e-05
0.6 0.000198653 5.5196e-06 7.91246e-05
0.75 0.000158923 6.48295e-06 7.91246e-05
0.9 0.000132436 7.44298e-06 7.91246e-05
1.05 0.000113516 8.39904e-06 7.91246e-05
1.2 9.93266e-05 9.35047e-06 7.91246e-05
1.35 8.82902e-05 1.02966e-05 7.91246e-05
1.5 7.94613e-05 1.12369e-05 7.91246e-05
1.8 6.62177e-05 1.30969e-05 7.91246e-05
2.4 4.96633e-05 1.67179e-05 7.91246e-05
3 3.97306e-05 2.01737e-05 7.91246e-05
3.6 0 5.65353e-05 7.91246e-05
END DIST

Metal 5 OVER 1
DIST count 12 width 0.3
0.3 0.000397306 5.79261e-06 7.91246e-05
0.6 0.000198653 8.37557e-06 7.91246e-05
0.75 0.000158923 9.69795e-06 7.91246e-05
0.9 0.000132436 1.10404e-05 7.91246e-05
1.05 0.000113516 1.23985e-05 7.91246e-05
1.2 9.93266e-05 1.37726e-05 7.91246e-05
1.35 8.82902e-05 1.51605e-05 7.91246e-05
1.5 7.94613e-05 1.65599e-05 7.91246e-05
1.8 6.62177e-05 1.93862e-05 7.91246e-05
2.4 4.96633e-05 2.50942e-05 7.91246e-05
3 3.97306e-05 3.07647e-05 7.91246e-05
3.6 0 6.93717e-05 7.91246e-05
END DIST

Metal 5 OVER 2
DIST count 12 width 0.3
0.3 0.000397306 6.68337e-06 7.91246e-05
0.6 0.000198653 9.34946e-06 7.91246e-05
0.75 0.000158923 1.07197e-05 7.91246e-05
0.9 0.000132436 1.21115e-05 7.91246e-05
1.05 0.000113516 1.35238e-05 7.91246e-05
1.2 9.93266e-05 1.49542e-05 7.91246e-05
1.35 8.82902e-05 1.64003e-05 7.91246e-05
1.5 7.94613e-05 1.78621e-05 7.91246e-05
1.8 6.62177e-05 2.0818e-05 7.91246e-05
2.4 4.96633e-05 2.6809e-05 7.91246e-05
3 3.97306e-05 3.27813e-05 7.91246e-05
3.6 0 7.16998e-05 7.91246e-05
END DIST

Metal 5 OVER 3
DIST count 12 width 0.3
0.3 0.000397306 7.87798e-06 7.91246e-05
0.6 0.000198653 1.06613e-05 7.91246e-05
0.75 0.000158923 1.20945e-05 7.91246e-05
0.9 0.000132436 1.35546e-05 7.91246e-05
1.05 0.000113516 1.50389e-05 7.91246e-05
1.2 9.93266e-05 1.65451e-05 7.91246e-05
1.35 8.82902e-05 1.80702e-05 7.91246e-05
1.5 7.94613e-05 1.96132e-05 7.91246e-05
1.8 6.62177e-05 2.27421e-05 7.91246e-05
2.4 4.96633e-05 2.91061e-05 7.91246e-05
3 3.97306e-05 3.54771e-05 7.91246e-05
3.6 0 7.4798e-05 7.91246e-05
END DIST

Metal 5 OVER 4
DIST count 12 width 0.3
0.3 0.000397306 1.92675e-05 7.91246e-05
0.6 0.000198653 2.28406e-05 7.91246e-05
0.75 0.000158923 2.47074e-05 7.91246e-05
0.9 0.000132436 2.6625e-05 7.91246e-05
1.05 0.000113516 2.85889e-05 7.91246e-05
1.2 9.93266e-05 3.05955e-05 7.91246e-05
1.35 8.82902e-05 3.26418e-05 7.91246e-05
1.5 7.94613e-05 3.47243e-05 7.91246e-05
1.8 6.62177e-05 3.89821e-05 7.91246e-05
2.4 4.96633e-05 4.77566e-05 7.91246e-05
3 3.97306e-05 5.66544e-05 7.91246e-05
3.6 0 9.85072e-05 7.91246e-05
END DIST

Metal 5 UNDER
WIDTH Table 1 entries:  0.3

Metal 5 UNDER 6
DIST count 12 width 0.3
0.3 0.000397306 1.97231e-05 7.91246e-05
0.6 0.000198653 2.35531e-05 7.91246e-05
0.75 0.000158923 2.55255e-05 7.91246e-05
0.9 0.000132436 2.75315e-05 7.91246e-05
1.05 0.000113516 2.95676e-05 7.91246e-05
1.2 9.93266e-05 3.16303e-05 7.91246e-05
1.35 8.82902e-05 3.37158e-05 7.91246e-05
1.5 7.94613e-05 3.58204e-05 7.91246e-05
1.8 6.62177e-05 4.00712e-05 7.91246e-05
2.4 4.96633e-05 4.86296e-05 7.91246e-05
3 3.97306e-05 5.70501e-05 7.91246e-05
3.6 0 9.81866e-05 7.91246e-05
END DIST

Metal 5 DIAGUNDER
WIDTH Table 1 entries:  0.3

Metal 5 DIAGUNDER 6
DIST count 13 width 0.3
0 0 3.1381e-05 7.91246e-05
0.3 0 1.73324e-05 7.91246e-05
0.6 0 1.71588e-05 7.91246e-05
0.75 0 1.70542e-05 7.91246e-05
0.9 0 1.69381e-05 7.91246e-05
1.05 0 1.68103e-05 7.91246e-05
1.2 0 1.6671e-05 7.91246e-05
1.35 0 1.65202e-05 7.91246e-05
1.5 0 1.63582e-05 7.91246e-05
1.8 0 1.60005e-05 7.91246e-05
2.4 0 1.51548e-05 7.91246e-05
3 0 1.4143e-05 7.91246e-05
3.6 0 1.29763e-05 7.91246e-05
END DIST

Metal 5 OVERUNDER
WIDTH Table 1 entries:  0.3

Metal 5 OVER 1 UNDER 6
DIST count 12 width 0.3
0.3 0.000397306 2.19301e-05 7.91246e-05
0.6 0.000198653 2.64091e-05 7.91246e-05
0.75 0.000158923 2.87405e-05 7.91246e-05
0.9 0.000132436 3.11288e-05 7.91246e-05
1.05 0.000113516 3.3567e-05 7.91246e-05
1.2 9.93266e-05 3.60525e-05 7.91246e-05
1.35 8.82902e-05 3.85796e-05 7.91246e-05
1.5 7.94613e-05 4.11434e-05 7.91246e-05
1.8 6.62177e-05 4.63605e-05 7.91246e-05
2.4 4.96633e-05 5.7006e-05 7.91246e-05
3 3.97306e-05 6.76411e-05 7.91246e-05
3.6 0 0.000111023 7.91246e-05
END DIST

Metal 5 OVER 2 UNDER 6
DIST count 12 width 0.3
0.3 0.000397306 2.28208e-05 7.91246e-05
0.6 0.000198653 2.7383e-05 7.91246e-05
0.75 0.000158923 2.97622e-05 7.91246e-05
0.9 0.000132436 3.22e-05 7.91246e-05
1.05 0.000113516 3.46923e-05 7.91246e-05
1.2 9.93266e-05 3.7234e-05 7.91246e-05
1.35 8.82902e-05 3.98194e-05 7.91246e-05
1.5 7.94613e-05 4.24456e-05 7.91246e-05
1.8 6.62177e-05 4.77923e-05 7.91246e-05
2.4 4.96633e-05 5.87208e-05 7.91246e-05
3 3.97306e-05 6.96577e-05 7.91246e-05
3.6 0 0.000113351 7.91246e-05
END DIST

Metal 5 OVER 3 UNDER 6
DIST count 12 width 0.3
0.3 0.000397306 2.40155e-05 7.91246e-05
0.6 0.000198653 2.86949e-05 7.91246e-05
0.75 0.000158923 3.1137e-05 7.91246e-05
0.9 0.000132436 3.36431e-05 7.91246e-05
1.05 0.000113516 3.62075e-05 7.91246e-05
1.2 9.93266e-05 3.88249e-05 7.91246e-05
1.35 8.82902e-05 4.14893e-05 7.91246e-05
1.5 7.94613e-05 4.41968e-05 7.91246e-05
1.8 6.62177e-05 4.97164e-05 7.91246e-05
2.4 4.96633e-05 6.10178e-05 7.91246e-05
3 3.97306e-05 7.23535e-05 7.91246e-05
3.6 0 0.000116449 7.91246e-05
END DIST

Metal 5 OVER 4 UNDER 6
DIST count 12 width 0.3
0.3 0.000397306 3.5405e-05 7.91246e-05
0.6 0.000198653 4.08741e-05 7.91246e-05
0.75 0.000158923 4.37499e-05 7.91246e-05
0.9 0.000132436 4.67135e-05 7.91246e-05
1.05 0.000113516 4.97574e-05 7.91246e-05
1.2 9.93266e-05 5.28754e-05 7.91246e-05
1.35 8.82902e-05 5.6061e-05 7.91246e-05
1.5 7.94613e-05 5.93078e-05 7.91246e-05
1.8 6.62177e-05 6.59564e-05 7.91246e-05
2.4 4.96633e-05 7.96683e-05 7.91246e-05
3 3.97306e-05 9.35308e-05 7.91246e-05
3.6 0 0.000140159 7.91246e-05
END DIST

Metal 6 RESOVER
WIDTH Table 1 entries:  1.6

Metal 6 RESOVER 0
DIST count 55 width 1.6
0 0 0 1.83081e-05
0 1.8 0 1.83081e-05
0 3.4 0 1.83081e-05
0 4.4 0 1.83081e-05
0 5.2 0 1.83081e-05
0 6.8 0 1.83081e-05
0 7.8 0 1.83081e-05
0 8.6 0 1.83081e-05
0 10.2 0 1.83081e-05
0 13.6 0 1.83081e-05
1.8 1.8 0 1.83081e-05
1.8 3.4 0 1.83081e-05
1.8 4.4 0 1.83081e-05
1.8 5.2 0 1.83081e-05
1.8 6.8 0 1.83081e-05
1.8 7.8 0 1.83081e-05
1.8 8.6 0 1.83081e-05
1.8 10.2 0 1.83081e-05
1.8 13.6 0 1.83081e-05
3.4 3.4 0 1.83081e-05
3.4 4.4 0 1.83081e-05
3.4 5.2 0 1.83081e-05
3.4 6.8 0 1.83081e-05
3.4 7.8 0 1.83081e-05
3.4 8.6 0 1.83081e-05
3.4 10.2 0 1.83081e-05
3.4 13.6 0 1.83081e-05
4.4 4.4 0 1.83081e-05
4.4 5.2 0 1.83081e-05
4.4 6.8 0 1.83081e-05
4.4 7.8 0 1.83081e-05
4.4 8.6 0 1.83081e-05
4.4 10.2 0 1.83081e-05
4.4 13.6 0 1.83081e-05
5.2 5.2 0 1.83081e-05
5.2 6.8 0 1.83081e-05
5.2 7.8 0 1.83081e-05
5.2 8.6 0 1.83081e-05
5.2 10.2 0 1.83081e-05
5.2 13.6 0 1.83081e-05
6.8 6.8 0 1.83081e-05
6.8 7.8 0 1.83081e-05
6.8 8.6 0 1.83081e-05
6.8 10.2 0 1.83081e-05
6.8 13.6 0 1.83081e-05
7.8 7.8 0 1.83081e-05
7.8 8.6 0 1.83081e-05
7.8 10.2 0 1.83081e-05
7.8 13.6 0 1.83081e-05
8.6 8.6 0 1.83081e-05
8.6 10.2 0 1.83081e-05
8.6 13.6 0 1.83081e-05
10.2 10.2 0 1.83081e-05
10.2 13.6 0 1.83081e-05
13.6 0 13.6 1.83081e-05
END DIST

Metal 6 RESOVER 1
DIST count 0 width 1.6
END DIST

Metal 6 RESOVER 2
DIST count 0 width 1.6
END DIST

Metal 6 RESOVER 3
DIST count 0 width 1.6
END DIST

Metal 6 RESOVER 4
DIST count 0 width 1.6
END DIST

Metal 6 RESOVER 5
DIST count 0 width 1.6
END DIST

Metal 6 OVER
WIDTH Table 1 entries:  1.6

Metal 6 OVER 0
DIST count 12 width 1.6
1.6 0.000120076 1.63176e-05 9.15404e-06
3.2 6.00379e-05 2.62972e-05 9.15404e-06
4 4.80303e-05 3.07268e-05 9.15404e-06
4.8 4.00253e-05 3.46651e-05 9.15404e-06
5.6 3.43073e-05 3.80357e-05 9.15404e-06
6.4 3.00189e-05 4.07727e-05 9.15404e-06
7.2 2.66835e-05 4.28232e-05 9.15404e-06
8 0 4.41471e-05 9.15404e-06
9.6 0 4.47418e-05 9.15404e-06
12.8 0 4.47418e-05 9.15404e-06
16 0 4.47418e-05 9.15404e-06
19.2 0 4.47418e-05 9.15404e-06
END DIST

Metal 6 OVER 1
DIST count 12 width 1.6
1.6 0.000120076 2.85756e-05 9.15404e-06
3.2 6.00379e-05 4.41434e-05 9.15404e-06
4 4.80303e-05 5.10514e-05 9.15404e-06
4.8 4.00253e-05 5.71937e-05 9.15404e-06
5.6 3.43073e-05 6.24515e-05 9.15404e-06
6.4 3.00189e-05 6.67184e-05 9.15404e-06
7.2 2.66835e-05 6.99163e-05 9.15404e-06
8 0 7.1981e-05 9.15404e-06
9.6 0 7.29113e-05 9.15404e-06
12.8 0 7.29113e-05 9.15404e-06
16 0 7.29113e-05 9.15404e-06
19.2 0 7.29113e-05 9.15404e-06
END DIST

Metal 6 OVER 2
DIST count 12 width 1.6
1.6 0.000120076 3.15538e-05 9.15404e-06
3.2 6.00379e-05 4.76431e-05 9.15404e-06
4 4.80303e-05 5.47835e-05 9.15404e-06
4.8 4.00253e-05 6.11301e-05 9.15404e-06
5.6 3.43073e-05 6.65644e-05 9.15404e-06
6.4 3.00189e-05 7.09752e-05 9.15404e-06
7.2 2.66835e-05 7.42809e-05 9.15404e-06
8 0 7.6415e-05 9.15404e-06
9.6 0 7.73762e-05 9.15404e-06
12.8 0 7.73762e-05 9.15404e-06
16 0 7.73762e-05 9.15404e-06
19.2 0 7.73762e-05 9.15404e-06
END DIST

Metal 6 OVER 3
DIST count 12 width 1.6
1.6 0.000120076 3.47698e-05 9.15404e-06
3.2 6.00379e-05 5.14731e-05 9.15404e-06
4 4.80303e-05 5.88877e-05 9.15404e-06
4.8 4.00253e-05 6.54795e-05 9.15404e-06
5.6 3.43073e-05 7.11231e-05 9.15404e-06
6.4 3.00189e-05 7.57034e-05 9.15404e-06
7.2 2.66835e-05 7.91355e-05 9.15404e-06
8 0 8.13525e-05 9.15404e-06
9.6 0 8.23466e-05 9.15404e-06
12.8 0 8.23466e-05 9.15404e-06
16 0 8.23466e-05 9.15404e-06
19.2 0 8.23466e-05 9.15404e-06
END DIST

Metal 6 OVER 4
DIST count 12 width 1.6
1.6 0.000120076 4.73189e-05 9.15404e-06
3.2 6.00379e-05 6.62194e-05 9.15404e-06
4 4.80303e-05 7.46076e-05 9.15404e-06
4.8 4.00253e-05 8.20666e-05 9.15404e-06
5.6 3.43073e-05 8.8449e-05 9.15404e-06
6.4 3.00189e-05 9.36324e-05 9.15404e-06
7.2 2.66835e-05 9.75161e-05 9.15404e-06
8 0 0.000100023 9.15404e-06
9.6 0 0.000101149 9.15404e-06
12.8 0 0.000101149 9.15404e-06
16 0 0.000101149 9.15404e-06
19.2 0 0.000101149 9.15404e-06
END DIST

Metal 6 OVER 5
DIST count 12 width 1.6
1.6 0.000120076 0.000100201 9.15404e-06
3.2 6.00379e-05 0.000126465 9.15404e-06
4 4.80303e-05 0.000138122 9.15404e-06
4.8 4.00253e-05 0.000148487 9.15404e-06
5.6 3.43073e-05 0.000157358 9.15404e-06
6.4 3.00189e-05 0.000164561 9.15404e-06
7.2 2.66835e-05 0.000169958 9.15404e-06
8 0 0.000173442 9.15404e-06
9.6 0 0.000175007 9.15404e-06
12.8 0 0.000175007 9.15404e-06
16 0 0.000175007 9.15404e-06
19.2 0 0.000175007 9.15404e-06
END DIST

Metal 6 UNDER
WIDTH Table 0 entries: 

Metal 6 DIAGUNDER
WIDTH Table 0 entries: 
END DensityModel 0