sky130/openlane/rules.openrcx.sky130A.min.magic

Extraction Rules for OpenRCX

DIAGMODEL ON

LayerCount 6
DensityRate 1  0

DensityModel 0

Metal 1 RESOVER
WIDTH Table 1 entries:  0.17

Metal 1 RESOVER 0
DIST count 55 width 0.17
0 0 0 0.0623886
0 0.29 0 0.0623886
0 0.46 0 0.0623886
0 0.665 0 0.0623886
0 0.75 0 0.0623886
0 0.92 0 0.0623886
0 1.125 0 0.0623886
0 1.21 0 0.0623886
0 1.38 0 0.0623886
0 1.84 0 0.0623886
0.29 0.29 0 0.0623886
0.29 0.46 0 0.0623886
0.29 0.665 0 0.0623886
0.29 0.75 0 0.0623886
0.29 0.92 0 0.0623886
0.29 1.125 0 0.0623886
0.29 1.21 0 0.0623886
0.29 1.38 0 0.0623886
0.29 1.84 0 0.0623886
0.46 0.46 0 0.0623886
0.46 0.665 0 0.0623886
0.46 0.75 0 0.0623886
0.46 0.92 0 0.0623886
0.46 1.125 0 0.0623886
0.46 1.21 0 0.0623886
0.46 1.38 0 0.0623886
0.46 1.84 0 0.0623886
0.665 0.665 0 0.0623886
0.665 0.75 0 0.0623886
0.665 0.92 0 0.0623886
0.665 1.125 0 0.0623886
0.665 1.21 0 0.0623886
0.665 1.38 0 0.0623886
0.665 1.84 0 0.0623886
0.75 0.75 0 0.0623886
0.75 0.92 0 0.0623886
0.75 1.125 0 0.0623886
0.75 1.21 0 0.0623886
0.75 1.38 0 0.0623886
0.75 1.84 0 0.0623886
0.92 0.92 0 0.0623886
0.92 1.125 0 0.0623886
0.92 1.21 0 0.0623886
0.92 1.38 0 0.0623886
0.92 1.84 0 0.0623886
1.125 1.125 0 0.0623886
1.125 1.21 0 0.0623886
1.125 1.38 0 0.0623886
1.125 1.84 0 0.0623886
1.21 1.21 0 0.0623886
1.21 1.38 0 0.0623886
1.21 1.84 0 0.0623886
1.38 1.38 0 0.0623886
1.38 1.84 0 0.0623886
1.84 0 1.84 0.0623886
END DIST

Metal 1 OVER
WIDTH Table 1 entries:  0.17

Metal 1 OVER 0
DIST count 12 width 0.17
0.17 0.00065003 3.94578e-06 0.0311943
0.34 0.000325015 5.01447e-06 0.0311943
0.425 0.000260012 5.54816e-06 0.0311943
0.51 0.000216676 6.08125e-06 0.0311943
0.595 0.000185723 6.61367e-06 0.0311943
0.68 0.000162507 7.14525e-06 0.0311943
0.765 0.000144452 7.67588e-06 0.0311943
0.85 0.000130006 8.20547e-06 0.0311943
1.02 0.000108338 9.26096e-06 0.0311943
1.36 8.12537e-05 1.13542e-05 0.0311943
1.7 6.5003e-05 1.34176e-05 0.0311943
2.04 0 6.9613e-05 0.0311943
END DIST

Metal 1 UNDER
WIDTH Table 1 entries:  0.17

Metal 1 UNDER 2
DIST count 12 width 0.17
0.17 0.00065003 1.70597e-05 0.0311943
0.34 0.000325015 1.87433e-05 0.0311943
0.425 0.000260012 1.96244e-05 0.0311943
0.51 0.000216676 2.05307e-05 0.0311943
0.595 0.000185723 2.14628e-05 0.0311943
0.68 0.000162507 2.24191e-05 0.0311943
0.765 0.000144452 2.33993e-05 0.0311943
0.85 0.000130006 2.44038e-05 0.0311943
1.02 0.000108338 2.64805e-05 0.0311943
1.36 8.12537e-05 3.08932e-05 0.0311943
1.7 6.5003e-05 3.56167e-05 0.0311943
2.04 0 9.47761e-05 0.0311943
END DIST

Metal 1 UNDER 3
DIST count 12 width 0.17
0.17 0.00065003 9.69242e-06 0.0311943
0.34 0.000325015 1.11519e-05 0.0311943
0.425 0.000260012 1.19063e-05 0.0311943
0.51 0.000216676 1.26766e-05 0.0311943
0.595 0.000185723 1.34629e-05 0.0311943
0.68 0.000162507 1.42641e-05 0.0311943
0.765 0.000144452 1.50807e-05 0.0311943
0.85 0.000130006 1.59116e-05 0.0311943
1.02 0.000108338 1.76162e-05 0.0311943
1.36 8.12537e-05 2.11832e-05 0.0311943
1.7 6.5003e-05 2.49366e-05 0.0311943
2.04 0 8.30151e-05 0.0311943
END DIST

Metal 1 UNDER 4
DIST count 12 width 0.17
0.17 0.00065003 8.1932e-06 0.0311943
0.34 0.000325015 9.55939e-06 0.0311943
0.425 0.000260012 1.02595e-05 0.0311943
0.51 0.000216676 1.09705e-05 0.0311943
0.595 0.000185723 1.16923e-05 0.0311943
0.68 0.000162507 1.24245e-05 0.0311943
0.765 0.000144452 1.31667e-05 0.0311943
0.85 0.000130006 1.39188e-05 0.0311943
1.02 0.000108338 1.54512e-05 0.0311943
1.36 8.12537e-05 1.86194e-05 0.0311943
1.7 6.5003e-05 2.19064e-05 0.0311943
2.04 0 7.94569e-05 0.0311943
END DIST

Metal 1 UNDER 5
DIST count 12 width 0.17
0.17 0.00065003 6.99439e-06 0.0311943
0.34 0.000325015 8.26289e-06 0.0311943
0.425 0.000260012 8.90853e-06 0.0311943
0.51 0.000216676 9.56105e-06 0.0311943
0.595 0.000185723 1.02209e-05 0.0311943
0.68 0.000162507 1.08876e-05 0.0311943
0.765 0.000144452 1.15602e-05 0.0311943
0.85 0.000130006 1.22395e-05 0.0311943
1.02 0.000108338 1.36154e-05 0.0311943
1.36 8.12537e-05 1.64313e-05 0.0311943
1.7 6.5003e-05 1.93174e-05 0.0311943
2.04 0 7.64238e-05 0.0311943
END DIST

Metal 1 UNDER 6
DIST count 12 width 0.17
0.17 0.00065003 6.82516e-06 0.0311943
0.34 0.000325015 8.14834e-06 0.0311943
0.425 0.000260012 8.81774e-06 0.0311943
0.51 0.000216676 9.49189e-06 0.0311943
0.595 0.000185723 1.01709e-05 0.0311943
0.68 0.000162507 1.08542e-05 0.0311943
0.765 0.000144452 1.15416e-05 0.0311943
0.85 0.000130006 1.2233e-05 0.0311943
1.02 0.000108338 1.36263e-05 0.0311943
1.36 8.12537e-05 1.64482e-05 0.0311943
1.7 6.5003e-05 1.9302e-05 0.0311943
2.04 0 7.63387e-05 0.0311943
END DIST

Metal 1 DIAGUNDER
WIDTH Table 1 entries:  0.17

Metal 1 DIAGUNDER 2
DIST count 13 width 0.17
0 0 1.67258e-05 0.0311943
0.17 0 4.82906e-06 0.0311943
0.34 0 4.82068e-06 0.0311943
0.425 0 4.81491e-06 0.0311943
0.51 0 4.80808e-06 0.0311943
0.595 0 4.80018e-06 0.0311943
0.68 0 4.79121e-06 0.0311943
0.765 0 4.78116e-06 0.0311943
0.85 0 4.77011e-06 0.0311943
1.02 0 4.74486e-06 0.0311943
1.36 0 4.68176e-06 0.0311943
1.7 0 4.60226e-06 0.0311943
2.04 0 4.50648e-06 0.0311943
END DIST

Metal 1 DIAGUNDER 3
DIST count 13 width 0.17
0 0 5.76607e-06 0.0311943
0.17 0 3.56881e-06 0.0311943
0.34 0 3.56257e-06 0.0311943
0.425 0 3.55829e-06 0.0311943
0.51 0 3.55324e-06 0.0311943
0.595 0 3.54742e-06 0.0311943
0.68 0 3.54076e-06 0.0311943
0.765 0 3.53339e-06 0.0311943
0.85 0 3.52519e-06 0.0311943
1.02 0 3.50648e-06 0.0311943
1.36 0 3.45989e-06 0.0311943
1.7 0 3.40107e-06 0.0311943
2.04 0 3.3303e-06 0.0311943
END DIST

Metal 1 DIAGUNDER 4
DIST count 13 width 0.17
0 0 4.22448e-06 0.0311943
0.17 0 4.15645e-06 0.0311943
0.34 0 4.1486e-06 0.0311943
0.425 0 4.14332e-06 0.0311943
0.51 0 4.13714e-06 0.0311943
0.595 0 4.13001e-06 0.0311943
0.68 0 4.12198e-06 0.0311943
0.765 0 4.11307e-06 0.0311943
0.85 0 4.10327e-06 0.0311943
1.02 0 4.08087e-06 0.0311943
1.36 0 4.02543e-06 0.0311943
1.7 0 3.95573e-06 0.0311943
2.04 0 3.87219e-06 0.0311943
END DIST

Metal 1 DIAGUNDER 5
DIST count 13 width 0.17
0 0 2.44397e-06 0.0311943
0.17 0 3.26524e-06 0.0311943
0.34 0 3.25912e-06 0.0311943
0.425 0 3.25502e-06 0.0311943
0.51 0 3.25015e-06 0.0311943
0.595 0 3.24462e-06 0.0311943
0.68 0 3.23832e-06 0.0311943
0.765 0 3.23137e-06 0.0311943
0.85 0 3.22365e-06 0.0311943
1.02 0 3.20618e-06 0.0311943
1.36 0 3.16269e-06 0.0311943
1.7 0 3.10808e-06 0.0311943
2.04 0 3.04254e-06 0.0311943
END DIST

Metal 1 DIAGUNDER 6
DIST count 0 width 0.17
END DIST

Metal 2 RESOVER
WIDTH Table 1 entries:  0.14

Metal 2 RESOVER 0
DIST count 55 width 0.14
0 0 0 0.000757576
0 0.2 0 0.000757576
0 0.34 0 0.000757576
0 0.47 0 0.000757576
0 0.54 0 0.000757576
0 0.68 0 0.000757576
0 0.81 0 0.000757576
0 0.88 0 0.000757576
0 1.02 0 0.000757576
0 1.36 0 0.000757576
0.2 0.2 0 0.000757576
0.2 0.34 0 0.000757576
0.2 0.47 0 0.000757576
0.2 0.54 0 0.000757576
0.2 0.68 0 0.000757576
0.2 0.81 0 0.000757576
0.2 0.88 0 0.000757576
0.2 1.02 0 0.000757576
0.2 1.36 0 0.000757576
0.34 0.34 0 0.000757576
0.34 0.47 0 0.000757576
0.34 0.54 0 0.000757576
0.34 0.68 0 0.000757576
0.34 0.81 0 0.000757576
0.34 0.88 0 0.000757576
0.34 1.02 0 0.000757576
0.34 1.36 0 0.000757576
0.47 0.47 0 0.000757576
0.47 0.54 0 0.000757576
0.47 0.68 0 0.000757576
0.47 0.81 0 0.000757576
0.47 0.88 0 0.000757576
0.47 1.02 0 0.000757576
0.47 1.36 0 0.000757576
0.54 0.54 0 0.000757576
0.54 0.68 0 0.000757576
0.54 0.81 0 0.000757576
0.54 0.88 0 0.000757576
0.54 1.02 0 0.000757576
0.54 1.36 0 0.000757576
0.68 0.68 0 0.000757576
0.68 0.81 0 0.000757576
0.68 0.88 0 0.000757576
0.68 1.02 0 0.000757576
0.68 1.36 0 0.000757576
0.81 0.81 0 0.000757576
0.81 0.88 0 0.000757576
0.81 1.02 0 0.000757576
0.81 1.36 0 0.000757576
0.88 0.88 0 0.000757576
0.88 1.02 0 0.000757576
0.88 1.36 0 0.000757576
1.02 1.02 0 0.000757576
1.02 1.36 0 0.000757576
1.36 0 1.36 0.000757576
END DIST

Metal 2 RESOVER 1
DIST count 0 width 0.14
END DIST

Metal 2 OVER
WIDTH Table 1 entries:  0.14

Metal 2 OVER 0
DIST count 12 width 0.14
0.14 0.00104618 2.62518e-06 0.000378788
0.28 0.000523088 3.47399e-06 0.000378788
0.35 0.00041847 3.89802e-06 0.000378788
0.42 0.000348726 4.32175e-06 0.000378788
0.49 0.000298908 4.74513e-06 0.000378788
0.56 0.000261544 5.16804e-06 0.000378788
0.63 0.000232483 5.59044e-06 0.000378788
0.7 0.000209235 6.0123e-06 0.000378788
0.84 0.000174362 6.854e-06 0.000378788
1.12 0.000130772 8.52785e-06 0.000378788
1.4 0.000104618 1.01855e-05 0.000378788
1.68 0 9.90045e-05 0.000378788
END DIST

Metal 2 OVER 1
DIST count 12 width 0.14
0.14 0.00104618 1.1819e-05 0.000378788
0.28 0.000523088 1.32602e-05 0.000378788
0.35 0.00041847 1.40206e-05 0.000378788
0.42 0.000348726 1.4807e-05 0.000378788
0.49 0.000298908 1.56192e-05 0.000378788
0.56 0.000261544 1.64571e-05 0.000378788
0.63 0.000232483 1.73202e-05 0.000378788
0.7 0.000209235 1.82082e-05 0.000378788
0.84 0.000174362 2.00575e-05 0.000378788
1.12 0.000130772 2.40389e-05 0.000378788
1.4 0.000104618 2.83757e-05 0.000378788
1.68 0 0.000120219 0.000378788
END DIST

Metal 2 UNDER
WIDTH Table 1 entries:  0.14

Metal 2 UNDER 3
DIST count 12 width 0.14
0.14 0.00104618 1.49669e-05 0.000378788
0.28 0.000523088 1.63562e-05 0.000378788
0.35 0.00041847 1.70919e-05 0.000378788
0.42 0.000348726 1.78522e-05 0.000378788
0.49 0.000298908 1.86371e-05 0.000378788
0.56 0.000261544 1.9446e-05 0.000378788
0.63 0.000232483 2.02788e-05 0.000378788
0.7 0.000209235 2.11351e-05 0.000378788
0.84 0.000174362 2.29168e-05 0.000378788
1.12 0.000130772 2.67472e-05 0.000378788
1.4 0.000104618 3.09128e-05 0.000378788
1.68 0 0.000122567 0.000378788
END DIST

Metal 2 UNDER 4
DIST count 12 width 0.14
0.14 0.00104618 7.39747e-06 0.000378788
0.28 0.000523088 8.5926e-06 0.000378788
0.35 0.00041847 9.21129e-06 0.000378788
0.42 0.000348726 9.84405e-06 0.000378788
0.49 0.000298908 1.04902e-05 0.000378788
0.56 0.000261544 1.115e-05 0.000378788
0.63 0.000232483 1.18229e-05 0.000378788
0.7 0.000209235 1.25088e-05 0.000378788
0.84 0.000174362 1.39188e-05 0.000378788
1.12 0.000130772 1.68854e-05 0.000378788
1.4 0.000104618 2.00332e-05 0.000378788
1.68 0 0.000110525 0.000378788
END DIST

Metal 2 UNDER 5
DIST count 12 width 0.14
0.14 0.00104618 5.46263e-06 0.000378788
0.28 0.000523088 6.52565e-06 0.000378788
0.35 0.00041847 7.06973e-06 0.000378788
0.42 0.000348726 7.62269e-06 0.000378788
0.49 0.000298908 8.18387e-06 0.000378788
0.56 0.000261544 8.7531e-06 0.000378788
0.63 0.000232483 9.33077e-06 0.000378788
0.7 0.000209235 9.91569e-06 0.000378788
0.84 0.000174362 1.1109e-05 0.000378788
1.12 0.000130772 1.35823e-05 0.000378788
1.4 0.000104618 1.61614e-05 0.000378788
1.68 0 0.000106015 0.000378788
END DIST

Metal 2 UNDER 6
DIST count 12 width 0.14
0.14 0.00104618 5.19856e-06 0.000378788
0.28 0.000523088 6.34931e-06 0.000378788
0.35 0.00041847 6.93409e-06 0.000378788
0.42 0.000348726 7.52493e-06 0.000378788
0.49 0.000298908 8.12154e-06 0.000378788
0.56 0.000261544 8.7241e-06 0.000378788
0.63 0.000232483 9.332e-06 0.000378788
0.7 0.000209235 9.94535e-06 0.000378788
0.84 0.000174362 1.11874e-05 0.000378788
1.12 0.000130772 1.37279e-05 0.000378788
1.4 0.000104618 1.63334e-05 0.000378788
1.68 0 0.000106172 0.000378788
END DIST

Metal 2 DIAGUNDER
WIDTH Table 1 entries:  0.14

Metal 2 DIAGUNDER 3
DIST count 13 width 0.14
0 0 3.07185e-05 0.000378788
0.14 0 2.80621e-05 0.000378788
0.28 0 2.74879e-05 0.000378788
0.35 0 2.71508e-05 0.000378788
0.42 0 2.68701e-05 0.000378788
0.49 0 2.65895e-05 0.000378788
0.56 0 2.63092e-05 0.000378788
0.63 0 2.60291e-05 0.000378788
0.7 0 2.56685e-05 0.000378788
0.84 0 1.60905e-05 0.000378788
1.12 0 6.70224e-06 0.000378788
1.4 0 6.6811e-06 0.000378788
1.68 0 4.88932e-06 0.000378788
END DIST

Metal 2 DIAGUNDER 4
DIST count 13 width 0.14
0 0 1.75017e-05 0.000378788
0.14 0 2.71276e-05 0.000378788
0.28 0 2.64181e-05 0.000378788
0.35 0 2.6082e-05 0.000378788
0.42 0 2.58057e-05 0.000378788
0.49 0 2.55295e-05 0.000378788
0.56 0 1.61336e-05 0.000378788
0.63 0 6.81739e-06 0.000378788
0.7 0 6.72107e-06 0.000378788
0.84 0 6.68983e-06 0.000378788
1.12 0 6.67994e-06 0.000378788
1.4 0 6.64156e-06 0.000378788
1.68 0 4.97179e-06 0.000378788
END DIST

Metal 2 DIAGUNDER 5
DIST count 13 width 0.14
0 0 1.37558e-05 0.000378788
0.14 0 2.4746e-05 0.000378788
0.28 0 2.41732e-05 0.000378788
0.35 0 2.38876e-05 0.000378788
0.42 0 2.36444e-05 0.000378788
0.49 0 2.34021e-05 0.000378788
0.56 0 1.4041e-05 0.000378788
0.63 0 4.76003e-06 0.000378788
0.7 0 4.6912e-06 0.000378788
0.84 0 4.6684e-06 0.000378788
1.12 0 4.66219e-06 0.000378788
1.4 0 4.63607e-06 0.000378788
1.68 0 3.46912e-06 0.000378788
END DIST

Metal 2 DIAGUNDER 6
DIST count 13 width 0.14
0 0 7.48968e-06 0.000378788
0.14 0 8.8342e-06 0.000378788
0.28 0 8.68723e-06 0.000378788
0.35 0 8.671e-06 0.000378788
0.42 0 8.6531e-06 0.000378788
0.49 0 8.63377e-06 0.000378788
0.56 0 8.61313e-06 0.000378788
0.63 0 8.5912e-06 0.000378788
0.7 0 8.56811e-06 0.000378788
0.84 0 8.51811e-06 0.000378788
1.12 0 8.40361e-06 0.000378788
1.4 0 8.2697e-06 0.000378788
1.68 0 7.80173e-06 0.000378788
END DIST

Metal 2 OVERUNDER
WIDTH Table 1 entries:  0.14

Metal 2 OVER 1 UNDER 3
DIST count 12 width 0.14
0.14 0.00104635 2.43536e-05 0.000378788
0.28 0.000523096 2.63649e-05 0.000378788
0.35 0.00041847 2.74386e-05 0.000378788
0.42 0.000348726 2.85615e-05 0.000378788
0.49 0.000298931 2.97301e-05 0.000378788
0.56 0.000261613 3.09439e-05 0.000378788
0.63 0.000232583 3.22106e-05 0.000378788
0.7 0.000209289 3.35431e-05 0.000378788
0.84 0.000174424 3.63308e-05 0.000378788
1.12 0.00013081 4.24737e-05 0.000378788
1.4 0.000104618 4.93271e-05 0.000378788
1.68 0 0.000144006 0.000378788
END DIST

Metal 2 OVER 1 UNDER 4
DIST count 12 width 0.14
0.14 0.00104639 1.70268e-05 0.000378788
0.28 0.000523203 1.88363e-05 0.000378788
0.35 0.000418578 1.9793e-05 0.000378788
0.42 0.000348834 2.07883e-05 0.000378788
0.49 0.000299038 2.18181e-05 0.000378788
0.56 0.000261721 2.2883e-05 0.000378788
0.63 0.000232691 2.39899e-05 0.000378788
0.7 0.000209397 2.51518e-05 0.000378788
0.84 0.000174531 2.75677e-05 0.000378788
1.12 0.000130918 3.2847e-05 0.000378788
1.4 0.000104725 3.86825e-05 0.000378788
1.68 0 0.000132307 0.000378788
END DIST

Metal 2 OVER 1 UNDER 5
DIST count 12 width 0.14
0.14 0.00104639 1.50575e-05 0.000378788
0.28 0.000523196 1.6735e-05 0.000378788
0.35 0.000418578 1.75101e-05 0.000378788
0.42 0.000348834 1.83365e-05 0.000378788
0.49 0.000299015 1.92866e-05 0.000378788
0.56 0.000261652 2.02708e-05 0.000378788
0.63 0.000232591 2.12892e-05 0.000378788
0.7 0.000209343 2.23403e-05 0.000378788
0.84 0.00017447 2.45412e-05 0.000378788
1.12 0.00013088 2.93221e-05 0.000378788
1.4 0.000104725 3.45802e-05 0.000378788
1.68 0 0.000127566 0.000378788
END DIST

Metal 2 OVER 1 UNDER 6
DIST count 12 width 0.14
0.14 0.00104628 1.45971e-05 0.000378788
0.28 0.000523088 1.63269e-05 0.000378788
0.35 0.00041847 1.70567e-05 0.000378788
0.42 0.000348726 1.80101e-05 0.000378788
0.49 0.000298908 1.89956e-05 0.000378788
0.56 0.000261544 2.00132e-05 0.000378788
0.63 0.000232483 2.10618e-05 0.000378788
0.7 0.000209235 2.21413e-05 0.000378788
0.84 0.000174362 2.43909e-05 0.000378788
1.12 0.000130772 2.9239e-05 0.000378788
1.4 0.000104618 3.45235e-05 0.000378788
1.68 0 0.000127387 0.000378788
END DIST

Metal 3 RESOVER
WIDTH Table 1 entries:  0.14

Metal 3 RESOVER 0
DIST count 55 width 0.14
0 0 0 0.000757576
0 0.32 0 0.000757576
0 0.46 0 0.000757576
0 0.71 0 0.000757576
0 0.78 0 0.000757576
0 0.92 0 0.000757576
0 1.17 0 0.000757576
0 1.24 0 0.000757576
0 1.38 0 0.000757576
0 1.84 0 0.000757576
0.32 0.32 0 0.000757576
0.32 0.46 0 0.000757576
0.32 0.71 0 0.000757576
0.32 0.78 0 0.000757576
0.32 0.92 0 0.000757576
0.32 1.17 0 0.000757576
0.32 1.24 0 0.000757576
0.32 1.38 0 0.000757576
0.32 1.84 0 0.000757576
0.46 0.46 0 0.000757576
0.46 0.71 0 0.000757576
0.46 0.78 0 0.000757576
0.46 0.92 0 0.000757576
0.46 1.17 0 0.000757576
0.46 1.24 0 0.000757576
0.46 1.38 0 0.000757576
0.46 1.84 0 0.000757576
0.71 0.71 0 0.000757576
0.71 0.78 0 0.000757576
0.71 0.92 0 0.000757576
0.71 1.17 0 0.000757576
0.71 1.24 0 0.000757576
0.71 1.38 0 0.000757576
0.71 1.84 0 0.000757576
0.78 0.78 0 0.000757576
0.78 0.92 0 0.000757576
0.78 1.17 0 0.000757576
0.78 1.24 0 0.000757576
0.78 1.38 0 0.000757576
0.78 1.84 0 0.000757576
0.92 0.92 0 0.000757576
0.92 1.17 0 0.000757576
0.92 1.24 0 0.000757576
0.92 1.38 0 0.000757576
0.92 1.84 0 0.000757576
1.17 1.17 0 0.000757576
1.17 1.24 0 0.000757576
1.17 1.38 0 0.000757576
1.17 1.84 0 0.000757576
1.24 1.24 0 0.000757576
1.24 1.38 0 0.000757576
1.24 1.84 0 0.000757576
1.38 1.38 0 0.000757576
1.38 1.84 0 0.000757576
1.84 0 1.84 0.000757576
END DIST

Metal 3 RESOVER 1
DIST count 0 width 0.14
END DIST

Metal 3 RESOVER 2
DIST count 0 width 0.14
END DIST

Metal 3 OVER
WIDTH Table 1 entries:  0.14

Metal 3 OVER 0
DIST count 12 width 0.14
0.14 0.00110678 2.12385e-06 0.000378788
0.28 0.000553391 2.92799e-06 0.000378788
0.35 0.000442713 3.32973e-06 0.000378788
0.42 0.000368928 3.73117e-06 0.000378788
0.49 0.000316224 4.13229e-06 0.000378788
0.56 0.000276696 4.53294e-06 0.000378788
0.63 0.000245951 4.93312e-06 0.000378788
0.7 0.000221356 5.33279e-06 0.000378788
0.84 0.000184463 6.13023e-06 0.000378788
1.12 0.000138348 7.71602e-06 0.000378788
1.4 0.000110678 9.28651e-06 0.000378788
1.68 0 0.00010307 0.000378788
END DIST

Metal 3 OVER 1
DIST count 12 width 0.14
0.14 0.00110678 5.59268e-06 0.000378788
0.28 0.000553391 6.93229e-06 0.000378788
0.35 0.000442713 7.63149e-06 0.000378788
0.42 0.000368928 8.35029e-06 0.000378788
0.49 0.000316224 9.0881e-06 0.000378788
0.56 0.000276696 9.84484e-06 0.000378788
0.63 0.000245951 1.062e-05 0.000378788
0.7 0.000221356 1.14135e-05 0.000378788
0.84 0.000184463 1.30543e-05 0.000378788
1.12 0.000138348 1.6542e-05 0.000378788
1.4 0.000110678 2.02856e-05 0.000378788
1.68 0 0.000116493 0.000378788
END DIST

Metal 3 OVER 2
DIST count 12 width 0.14
0.14 0.00110678 1.35804e-05 0.000378788
0.28 0.000553391 1.51736e-05 0.000378788
0.35 0.000442713 1.60144e-05 0.000378788
0.42 0.000368928 1.68848e-05 0.000378788
0.49 0.000316224 1.77837e-05 0.000378788
0.56 0.000276696 1.87114e-05 0.000378788
0.63 0.000245951 1.96672e-05 0.000378788
0.7 0.000221356 2.06506e-05 0.000378788
0.84 0.000184463 2.26994e-05 0.000378788
1.12 0.000138348 2.71102e-05 0.000378788
1.4 0.000110678 3.19141e-05 0.000378788
1.68 0 0.000129308 0.000378788
END DIST

Metal 3 UNDER
WIDTH Table 1 entries:  0.14

Metal 3 UNDER 4
DIST count 12 width 0.14
0.14 0.00110678 1.14035e-05 0.000378788
0.28 0.000553391 1.28869e-05 0.000378788
0.35 0.000442713 1.36634e-05 0.000378788
0.42 0.000368928 1.44626e-05 0.000378788
0.49 0.000316224 1.52845e-05 0.000378788
0.56 0.000276696 1.61287e-05 0.000378788
0.63 0.000245951 1.69944e-05 0.000378788
0.7 0.000221356 1.78821e-05 0.000378788
0.84 0.000184463 1.97202e-05 0.000378788
1.12 0.000138348 2.36391e-05 0.000378788
1.4 0.000110678 2.78592e-05 0.000378788
1.68 0 0.000124583 0.000378788
END DIST

Metal 3 UNDER 5
DIST count 12 width 0.14
0.14 0.00110678 5.61836e-06 0.000378788
0.28 0.000553391 6.76941e-06 0.000378788
0.35 0.000442713 7.3627e-06 0.000378788
0.42 0.000368928 7.96739e-06 0.000378788
0.49 0.000316224 8.58366e-06 0.000378788
0.56 0.000276696 9.21086e-06 0.000378788
0.63 0.000245951 9.84885e-06 0.000378788
0.7 0.000221356 1.04979e-05 0.000378788
0.84 0.000184463 1.18273e-05 0.000378788
1.12 0.000138348 1.46052e-05 0.000378788
1.4 0.000110678 1.75297e-05 0.000378788
1.68 0 0.000112816 0.000378788
END DIST

Metal 3 UNDER 6
DIST count 12 width 0.14
0.14 0.00110678 5.06057e-06 0.000378788
0.28 0.000553391 6.29279e-06 0.000378788
0.35 0.000442713 6.92071e-06 0.000378788
0.42 0.000368928 7.55635e-06 0.000378788
0.49 0.000316224 8.19953e-06 0.000378788
0.56 0.000276696 8.84996e-06 0.000378788
0.63 0.000245951 9.50743e-06 0.000378788
0.7 0.000221356 1.01719e-05 0.000378788
0.84 0.000184463 1.15201e-05 0.000378788
1.12 0.000138348 1.42892e-05 0.000378788
1.4 0.000110678 1.71421e-05 0.000378788
1.68 0 0.000112294 0.000378788
END DIST

Metal 3 DIAGUNDER
WIDTH Table 1 entries:  0.14

Metal 3 DIAGUNDER 4
DIST count 13 width 0.14
0 0 1.45393e-05 0.000378788
0.14 0 7.63391e-06 0.000378788
0.28 0 7.6233e-06 0.000378788
0.35 0 7.61623e-06 0.000378788
0.42 0 7.60808e-06 0.000378788
0.49 0 7.59885e-06 0.000378788
0.56 0 7.58838e-06 0.000378788
0.63 0 7.57684e-06 0.000378788
0.7 0 7.56414e-06 0.000378788
0.84 0 7.53535e-06 0.000378788
1.12 0 7.46436e-06 0.000378788
1.4 0 7.37554e-06 0.000378788
1.68 0 7.26912e-06 0.000378788
END DIST

Metal 3 DIAGUNDER 5
DIST count 13 width 0.14
0 0 4.07612e-06 0.000378788
0.14 0 4.43117e-06 0.000378788
0.28 0 4.42511e-06 0.000378788
0.35 0 4.42114e-06 0.000378788
0.42 0 4.41645e-06 0.000378788
0.49 0 4.41111e-06 0.000378788
0.56 0 4.40512e-06 0.000378788
0.63 0 4.39841e-06 0.000378788
0.7 0 4.39113e-06 0.000378788
0.84 0 4.37453e-06 0.000378788
1.12 0 4.33355e-06 0.000378788
1.4 0 4.28218e-06 0.000378788
1.68 0 4.22056e-06 0.000378788
END DIST

Metal 3 DIAGUNDER 6
DIST count 13 width 0.14
0 0 9.25743e-06 0.000378788
0.14 0 1.04923e-05 0.000378788
0.28 0 1.04535e-05 0.000378788
0.35 0 1.04318e-05 0.000378788
0.42 0 1.04085e-05 0.000378788
0.49 0 1.03836e-05 0.000378788
0.56 0 1.03573e-05 0.000378788
0.63 0 1.03293e-05 0.000378788
0.7 0 1.02999e-05 0.000378788
0.84 0 1.02362e-05 0.000378788
1.12 0 1.00908e-05 0.000378788
1.4 0 9.92128e-06 0.000378788
1.68 0 9.72807e-06 0.000378788
END DIST

Metal 3 OVERUNDER
WIDTH Table 1 entries:  0.14

Metal 3 OVER 1 UNDER 4
DIST count 12 width 0.14
0.14 0.00110678 1.48723e-05 0.000378788
0.28 0.000553391 1.68912e-05 0.000378788
0.35 0.000442713 1.79652e-05 0.000378788
0.42 0.000368928 1.90817e-05 0.000378788
0.49 0.000316224 2.02403e-05 0.000378788
0.56 0.000276696 2.14406e-05 0.000378788
0.63 0.000245951 2.26813e-05 0.000378788
0.7 0.000221356 2.39628e-05 0.000378788
0.84 0.000184463 2.66443e-05 0.000378788
1.12 0.000138348 3.24651e-05 0.000378788
1.4 0.000110678 3.88583e-05 0.000378788
1.68 0 0.000138006 0.000378788
END DIST

Metal 3 OVER 1 UNDER 5
DIST count 12 width 0.14
0.14 0.00110678 9.08719e-06 0.000378788
0.28 0.000553391 1.07737e-05 0.000378788
0.35 0.000442713 1.16645e-05 0.000378788
0.42 0.000368928 1.25865e-05 0.000378788
0.49 0.000316224 1.35395e-05 0.000378788
0.56 0.000276696 1.45228e-05 0.000378788
0.63 0.000245951 1.55358e-05 0.000378788
0.7 0.000221356 1.65786e-05 0.000378788
0.84 0.000184463 1.87514e-05 0.000378788
1.12 0.000138348 2.34312e-05 0.000378788
1.4 0.000110678 2.85288e-05 0.000378788
1.68 0 0.000126238 0.000378788
END DIST

Metal 3 OVER 1 UNDER 6
DIST count 12 width 0.14
0.14 0.00110678 8.5294e-06 0.000378788
0.28 0.000553391 1.02971e-05 0.000378788
0.35 0.000442713 1.12225e-05 0.000378788
0.42 0.000368928 1.21755e-05 0.000378788
0.49 0.000316224 1.31553e-05 0.000378788
0.56 0.000276696 1.41619e-05 0.000378788
0.63 0.000245951 1.51943e-05 0.000378788
0.7 0.000221356 1.62526e-05 0.000378788
0.84 0.000184463 1.84442e-05 0.000378788
1.12 0.000138348 2.31152e-05 0.000378788
1.4 0.000110678 2.81412e-05 0.000378788
1.68 0 0.000125717 0.000378788
END DIST

Metal 3 OVER 2 UNDER 4
DIST count 12 width 0.14
0.14 0.00110678 2.286e-05 0.000378788
0.28 0.000553391 2.51324e-05 0.000378788
0.35 0.000442713 2.63481e-05 0.000378788
0.42 0.000368928 2.76163e-05 0.000378788
0.49 0.000316224 2.89359e-05 0.000378788
0.56 0.000276696 3.03072e-05 0.000378788
0.63 0.000245951 3.17284e-05 0.000378788
0.7 0.000221356 3.31999e-05 0.000378788
0.84 0.000184463 3.62894e-05 0.000378788
1.12 0.000138348 4.30333e-05 0.000378788
1.4 0.000110678 5.04869e-05 0.000378788
1.68 0 0.000150821 0.000378788
END DIST

Metal 3 OVER 2 UNDER 5
DIST count 12 width 0.14
0.14 0.00110678 1.70749e-05 0.000378788
0.28 0.000553391 1.9015e-05 0.000378788
0.35 0.000442713 2.00473e-05 0.000378788
0.42 0.000368928 2.11211e-05 0.000378788
0.49 0.000316224 2.2235e-05 0.000378788
0.56 0.000276696 2.33894e-05 0.000378788
0.63 0.000245951 2.45829e-05 0.000378788
0.7 0.000221356 2.58158e-05 0.000378788
0.84 0.000184463 2.83964e-05 0.000378788
1.12 0.000138348 3.39994e-05 0.000378788
1.4 0.000110678 4.01573e-05 0.000378788
1.68 0 0.000139054 0.000378788
END DIST

Metal 3 OVER 2 UNDER 6
DIST count 12 width 0.14
0.14 0.00110678 1.65171e-05 0.000378788
0.28 0.000553391 1.85383e-05 0.000378788
0.35 0.000442713 1.96053e-05 0.000378788
0.42 0.000368928 2.071e-05 0.000378788
0.49 0.000316224 2.18509e-05 0.000378788
0.56 0.000276696 2.30285e-05 0.000378788
0.63 0.000245951 2.42415e-05 0.000378788
0.7 0.000221356 2.54897e-05 0.000378788
0.84 0.000184463 2.80893e-05 0.000378788
1.12 0.000138348 3.36835e-05 0.000378788
1.4 0.000110678 3.97697e-05 0.000378788
1.68 0 0.000138532 0.000378788
END DIST

Metal 4 RESOVER
WIDTH Table 1 entries:  0.3

Metal 4 RESOVER 0
DIST count 55 width 0.3
0 0 0 0.000127946
0 0.38 0 0.000127946
0 0.68 0 0.000127946
0 0.91 0 0.000127946
0 1.06 0 0.000127946
0 1.36 0 0.000127946
0 1.59 0 0.000127946
0 1.74 0 0.000127946
0 2.04 0 0.000127946
0 2.72 0 0.000127946
0.38 0.38 0 0.000127946
0.38 0.68 0 0.000127946
0.38 0.91 0 0.000127946
0.38 1.06 0 0.000127946
0.38 1.36 0 0.000127946
0.38 1.59 0 0.000127946
0.38 1.74 0 0.000127946
0.38 2.04 0 0.000127946
0.38 2.72 0 0.000127946
0.68 0.68 0 0.000127946
0.68 0.91 0 0.000127946
0.68 1.06 0 0.000127946
0.68 1.36 0 0.000127946
0.68 1.59 0 0.000127946
0.68 1.74 0 0.000127946
0.68 2.04 0 0.000127946
0.68 2.72 0 0.000127946
0.91 0.91 0 0.000127946
0.91 1.06 0 0.000127946
0.91 1.36 0 0.000127946
0.91 1.59 0 0.000127946
0.91 1.74 0 0.000127946
0.91 2.04 0 0.000127946
0.91 2.72 0 0.000127946
1.06 1.06 0 0.000127946
1.06 1.36 0 0.000127946
1.06 1.59 0 0.000127946
1.06 1.74 0 0.000127946
1.06 2.04 0 0.000127946
1.06 2.72 0 0.000127946
1.36 1.36 0 0.000127946
1.36 1.59 0 0.000127946
1.36 1.74 0 0.000127946
1.36 2.04 0 0.000127946
1.36 2.72 0 0.000127946
1.59 1.59 0 0.000127946
1.59 1.74 0 0.000127946
1.59 2.04 0 0.000127946
1.59 2.72 0 0.000127946
1.74 1.74 0 0.000127946
1.74 2.04 0 0.000127946
1.74 2.72 0 0.000127946
2.04 2.04 0 0.000127946
2.04 2.72 0 0.000127946
2.72 0 2.72 0.000127946
END DIST

Metal 4 RESOVER 1
DIST count 0 width 0.3
END DIST

Metal 4 RESOVER 2
DIST count 0 width 0.3
END DIST

Metal 4 RESOVER 3
DIST count 0 width 0.3
END DIST

Metal 4 OVER
WIDTH Table 1 entries:  0.3

Metal 4 OVER 0
DIST count 12 width 0.3
0.3 0.000547837 3.81561e-06 6.39731e-05
0.6 0.000310331 5.7164e-06 6.39731e-05
0.75 0.000256872 6.6632e-06 6.39731e-05
0.9 0.00021951 7.60675e-06 6.39731e-05
1.05 0.000191823 8.5464e-06 6.39731e-05
1.2 0.000170436 9.48148e-06 6.39731e-05
1.35 0.000153395 1.04114e-05 6.39731e-05
1.5 0.000139485 1.13355e-05 6.39731e-05
1.8 0.000118122 1.31636e-05 6.39731e-05
2.4 9.04929e-05 1.67224e-05 6.39731e-05
3 7.33704e-05 2.01189e-05 6.39731e-05
3.6 0 8.50241e-05 6.39731e-05
END DIST

Metal 4 OVER 1
DIST count 12 width 0.3
0.3 0.000547837 9.14503e-06 6.39731e-05
0.6 0.000310331 1.2866e-05 6.39731e-05
0.75 0.000256872 1.48488e-05 6.39731e-05
0.9 0.00021951 1.69075e-05 6.39731e-05
1.05 0.000191823 1.90398e-05 6.39731e-05
1.2 0.000170436 2.12409e-05 6.39731e-05
1.35 0.000153395 2.35066e-05 6.39731e-05
1.5 0.000139485 2.58328e-05 6.39731e-05
1.8 0.000118122 3.06493e-05 6.39731e-05
2.4 9.04929e-05 4.08012e-05 6.39731e-05
3 7.33704e-05 5.13686e-05 6.39731e-05
3.6 0 0.000123712 6.39731e-05
END DIST

Metal 4 OVER 2
DIST count 12 width 0.3
0.3 0.000547837 1.25992e-05 6.39731e-05
0.6 0.000310331 1.66852e-05 6.39731e-05
0.75 0.000256872 1.88777e-05 6.39731e-05
0.9 0.00021951 2.11646e-05 6.39731e-05
1.05 0.000191823 2.35404e-05 6.39731e-05
1.2 0.000170436 2.60012e-05 6.39731e-05
1.35 0.000153395 2.85412e-05 6.39731e-05
1.5 0.000139485 3.11577e-05 6.39731e-05
1.8 0.000118122 3.65942e-05 6.39731e-05
2.4 9.04929e-05 4.8122e-05 6.39731e-05
3 7.33704e-05 6.0199e-05 6.39731e-05
3.6 0 0.000134116 6.39731e-05
END DIST

Metal 4 OVER 3
DIST count 12 width 0.3
0.3 0.000547837 2.26196e-05 6.39731e-05
0.6 0.000310331 2.74054e-05 6.39731e-05
0.75 0.000256872 2.99972e-05 6.39731e-05
0.9 0.00021951 3.27135e-05 6.39731e-05
1.05 0.000191823 3.55486e-05 6.39731e-05
1.2 0.000170436 3.8497e-05 6.39731e-05
1.35 0.000153395 4.15544e-05 6.39731e-05
1.5 0.000139485 4.4712e-05 6.39731e-05
1.8 0.000118122 5.13017e-05 6.39731e-05
2.4 9.04929e-05 6.53818e-05 6.39731e-05
3 7.33704e-05 8.0237e-05 6.39731e-05
3.6 0 0.000157037 6.39731e-05
END DIST

Metal 4 UNDER
WIDTH Table 1 entries:  0.3

Metal 4 UNDER 5
DIST count 12 width 0.3
0.3 0.000547837 2.46754e-05 6.39731e-05
0.6 0.000310331 2.86836e-05 6.39731e-05
0.75 0.000256872 3.08218e-05 6.39731e-05
0.9 0.00021951 3.30436e-05 6.39731e-05
1.05 0.000191823 3.53455e-05 6.39731e-05
1.2 0.000170436 3.77231e-05 6.39731e-05
1.35 0.000153395 4.01717e-05 6.39731e-05
1.5 0.000139485 4.26867e-05 6.39731e-05
1.8 0.000118122 4.7895e-05 6.39731e-05
2.4 9.04929e-05 5.88746e-05 6.39731e-05
3 7.33704e-05 7.02987e-05 6.39731e-05
3.6 0 0.000143488 6.39731e-05
END DIST

Metal 4 UNDER 6
DIST count 12 width 0.3
0.3 0.000547837 1.35065e-05 6.39731e-05
0.6 0.000310331 1.73725e-05 6.39731e-05
0.75 0.000256872 1.93806e-05 6.39731e-05
0.9 0.00021951 2.14338e-05 6.39731e-05
1.05 0.000191823 2.35288e-05 6.39731e-05
1.2 0.000170436 2.56614e-05 6.39731e-05
1.35 0.000153395 2.7828e-05 6.39731e-05
1.5 0.000139485 3.00244e-05 6.39731e-05
1.8 0.000118122 3.44902e-05 6.39731e-05
2.4 9.04929e-05 4.35937e-05 6.39731e-05
3 7.33704e-05 5.26901e-05 6.39731e-05
3.6 0 0.000123202 6.39731e-05
END DIST

Metal 4 DIAGUNDER
WIDTH Table 1 entries:  0.3

Metal 4 DIAGUNDER 5
DIST count 13 width 0.3
0 0 2.54636e-05 6.39731e-05
0.3 0 1.09926e-05 6.39731e-05
0.6 0 1.09323e-05 6.39731e-05
0.75 0 1.08908e-05 6.39731e-05
0.9 0 1.0842e-05 6.39731e-05
1.05 0 1.07857e-05 6.39731e-05
1.2 0 1.07219e-05 6.39731e-05
1.35 0 1.06509e-05 6.39731e-05
1.5 0 1.05725e-05 6.39731e-05
1.8 0 1.03941e-05 6.39731e-05
2.4 0 9.95246e-06 6.39731e-05
3 0 9.40172e-06 6.39731e-05
3.6 0 8.74798e-06 6.39731e-05
END DIST

Metal 4 DIAGUNDER 6
DIST count 13 width 0.3
0 0 1.79686e-05 6.39731e-05
0.3 0 2.00249e-05 6.39731e-05
0.6 0 1.98266e-05 6.39731e-05
0.75 0 1.9707e-05 6.39731e-05
0.9 0 1.95739e-05 6.39731e-05
1.05 0 1.94274e-05 6.39731e-05
1.2 0 1.92676e-05 6.39731e-05
1.35 0 1.90946e-05 6.39731e-05
1.5 0 1.89085e-05 6.39731e-05
1.8 0 1.84975e-05 6.39731e-05
2.4 0 1.75248e-05 6.39731e-05
3 0 1.63601e-05 6.39731e-05
3.6 0 1.50161e-05 6.39731e-05
END DIST

Metal 4 OVERUNDER
WIDTH Table 1 entries:  0.3

Metal 4 OVER 1 UNDER 5
DIST count 12 width 0.3
0.3 0.000547837 3.00049e-05 6.39731e-05
0.6 0.000310331 3.58331e-05 6.39731e-05
0.75 0.000256872 3.90074e-05 6.39731e-05
0.9 0.00021951 4.23444e-05 6.39731e-05
1.05 0.000191823 4.58389e-05 6.39731e-05
1.2 0.000170436 4.94825e-05 6.39731e-05
1.35 0.000153395 5.3267e-05 6.39731e-05
1.5 0.000139485 5.7184e-05 6.39731e-05
1.8 0.000118122 6.53807e-05 6.39731e-05
2.4 9.04929e-05 8.29535e-05 6.39731e-05
3 7.33704e-05 0.000101548 6.39731e-05
3.6 0 0.000182176 6.39731e-05
END DIST

Metal 4 OVER 1 UNDER 6
DIST count 12 width 0.3
0.3 0.000547837 1.88359e-05 6.39731e-05
0.6 0.000310331 2.45221e-05 6.39731e-05
0.75 0.000256872 2.75662e-05 6.39731e-05
0.9 0.00021951 3.07346e-05 6.39731e-05
1.05 0.000191823 3.40223e-05 6.39731e-05
1.2 0.000170436 3.74208e-05 6.39731e-05
1.35 0.000153395 4.09232e-05 6.39731e-05
1.5 0.000139485 4.45218e-05 6.39731e-05
1.8 0.000118122 5.19759e-05 6.39731e-05
2.4 9.04929e-05 6.76725e-05 6.39731e-05
3 7.33704e-05 8.39398e-05 6.39731e-05
3.6 0 0.000161889 6.39731e-05
END DIST

Metal 4 OVER 2 UNDER 5
DIST count 12 width 0.3
0.3 0.000547837 3.3459e-05 6.39731e-05
0.6 0.000310331 3.96524e-05 6.39731e-05
0.75 0.000256872 4.30363e-05 6.39731e-05
0.9 0.00021951 4.66014e-05 6.39731e-05
1.05 0.000191823 5.03395e-05 6.39731e-05
1.2 0.000170436 5.42428e-05 6.39731e-05
1.35 0.000153395 5.83016e-05 6.39731e-05
1.5 0.000139485 6.25089e-05 6.39731e-05
1.8 0.000118122 7.13256e-05 6.39731e-05
2.4 9.04929e-05 9.02742e-05 6.39731e-05
3 7.33704e-05 0.000110379 6.39731e-05
3.6 0 0.00019258 6.39731e-05
END DIST

Metal 4 OVER 2 UNDER 6
DIST count 12 width 0.3
0.3 0.000547837 2.22901e-05 6.39731e-05
0.6 0.000310331 2.83414e-05 6.39731e-05
0.75 0.000256872 3.15951e-05 6.39731e-05
0.9 0.00021951 3.49917e-05 6.39731e-05
1.05 0.000191823 3.85229e-05 6.39731e-05
1.2 0.000170436 4.21812e-05 6.39731e-05
1.35 0.000153395 4.59578e-05 6.39731e-05
1.5 0.000139485 4.98467e-05 6.39731e-05
1.8 0.000118122 5.79208e-05 6.39731e-05
2.4 9.04929e-05 7.49933e-05 6.39731e-05
3 7.33704e-05 9.27702e-05 6.39731e-05
3.6 0 0.000172294 6.39731e-05
END DIST

Metal 4 OVER 3 UNDER 5
DIST count 12 width 0.3
0.3 0.000547837 4.34794e-05 6.39731e-05
0.6 0.000310331 5.03726e-05 6.39731e-05
0.75 0.000256872 5.41558e-05 6.39731e-05
0.9 0.00021951 5.81503e-05 6.39731e-05
1.05 0.000191823 6.23477e-05 6.39731e-05
1.2 0.000170436 6.67386e-05 6.39731e-05
1.35 0.000153395 7.13147e-05 6.39731e-05
1.5 0.000139485 7.60632e-05 6.39731e-05
1.8 0.000118122 8.60331e-05 6.39731e-05
2.4 9.04929e-05 0.000107534 6.39731e-05
3 7.33704e-05 0.000130417 6.39731e-05
3.6 0 0.000215501 6.39731e-05
END DIST

Metal 4 OVER 3 UNDER 6
DIST count 12 width 0.3
0.3 0.000547837 3.23105e-05 6.39731e-05
0.6 0.000310331 3.90616e-05 6.39731e-05
0.75 0.000256872 4.27146e-05 6.39731e-05
0.9 0.00021951 4.65405e-05 6.39731e-05
1.05 0.000191823 5.0531e-05 6.39731e-05
1.2 0.000170436 5.4677e-05 6.39731e-05
1.35 0.000153395 5.8971e-05 6.39731e-05
1.5 0.000139485 6.3401e-05 6.39731e-05
1.8 0.000118122 7.26283e-05 6.39731e-05
2.4 9.04929e-05 9.22531e-05 6.39731e-05
3 7.33704e-05 0.000112808 6.39731e-05
3.6 0 0.000195215 6.39731e-05
END DIST

Metal 5 RESOVER
WIDTH Table 1 entries:  0.3

Metal 5 RESOVER 0
DIST count 55 width 0.3
0 0 0 0.000127946
0 0.62 0 0.000127946
0 0.92 0 0.000127946
0 1.39 0 0.000127946
0 1.54 0 0.000127946
0 1.84 0 0.000127946
0 2.31 0 0.000127946
0 2.46 0 0.000127946
0 2.76 0 0.000127946
0 3.68 0 0.000127946
0.62 0.62 0 0.000127946
0.62 0.92 0 0.000127946
0.62 1.39 0 0.000127946
0.62 1.54 0 0.000127946
0.62 1.84 0 0.000127946
0.62 2.31 0 0.000127946
0.62 2.46 0 0.000127946
0.62 2.76 0 0.000127946
0.62 3.68 0 0.000127946
0.92 0.92 0 0.000127946
0.92 1.39 0 0.000127946
0.92 1.54 0 0.000127946
0.92 1.84 0 0.000127946
0.92 2.31 0 0.000127946
0.92 2.46 0 0.000127946
0.92 2.76 0 0.000127946
0.92 3.68 0 0.000127946
1.39 1.39 0 0.000127946
1.39 1.54 0 0.000127946
1.39 1.84 0 0.000127946
1.39 2.31 0 0.000127946
1.39 2.46 0 0.000127946
1.39 2.76 0 0.000127946
1.39 3.68 0 0.000127946
1.54 1.54 0 0.000127946
1.54 1.84 0 0.000127946
1.54 2.31 0 0.000127946
1.54 2.46 0 0.000127946
1.54 2.76 0 0.000127946
1.54 3.68 0 0.000127946
1.84 1.84 0 0.000127946
1.84 2.31 0 0.000127946
1.84 2.46 0 0.000127946
1.84 2.76 0 0.000127946
1.84 3.68 0 0.000127946
2.31 2.31 0 0.000127946
2.31 2.46 0 0.000127946
2.31 2.76 0 0.000127946
2.31 3.68 0 0.000127946
2.46 2.46 0 0.000127946
2.46 2.76 0 0.000127946
2.46 3.68 0 0.000127946
2.76 2.76 0 0.000127946
2.76 3.68 0 0.000127946
3.68 0 3.68 0.000127946
END DIST

Metal 5 RESOVER 1
DIST count 0 width 0.3
END DIST

Metal 5 RESOVER 2
DIST count 0 width 0.3
END DIST

Metal 5 RESOVER 3
DIST count 0 width 0.3
END DIST

Metal 5 RESOVER 4
DIST count 0 width 0.3
END DIST

Metal 5 OVER
WIDTH Table 1 entries:  0.3

Metal 5 OVER 0
DIST count 12 width 0.3
0.3 0.000758923 3.14271e-06 6.39731e-05
0.6 0.000379461 4.85052e-06 6.39731e-05
0.75 0.000303569 5.7012e-06 6.39731e-05
0.9 0.000252974 6.54896e-06 6.39731e-05
1.05 0.000216835 7.3932e-06 6.39731e-05
1.2 0.000189731 8.23335e-06 6.39731e-05
1.35 0.000168649 9.06884e-06 6.39731e-05
1.5 0.000151785 9.89911e-06 6.39731e-05
1.8 0.000126487 1.15416e-05 6.39731e-05
2.4 9.48653e-05 1.47391e-05 6.39731e-05
3 7.58923e-05 1.77907e-05 6.39731e-05
3.6 0 8.39065e-05 6.39731e-05
END DIST

Metal 5 OVER 1
DIST count 12 width 0.3
0.3 0.000758923 6.91035e-06 6.39731e-05
0.6 0.000379461 1.04086e-05 6.39731e-05
0.75 0.000303569 1.22519e-05 6.39731e-05
0.9 0.000252974 1.41532e-05 6.39731e-05
1.05 0.000216835 1.61104e-05 6.39731e-05
1.2 0.000189731 1.81177e-05 6.39731e-05
1.35 0.000168649 2.01733e-05 6.39731e-05
1.5 0.000151785 2.22711e-05 6.39731e-05
1.8 0.000126487 2.65825e-05 6.39731e-05
2.4 9.48653e-05 3.5541e-05 6.39731e-05
3 7.58923e-05 4.4707e-05 6.39731e-05
3.6 0 0.000117023 6.39731e-05
END DIST

Metal 5 OVER 2
DIST count 12 width 0.3
0.3 0.000758923 8.14362e-06 6.39731e-05
0.6 0.000379461 1.18071e-05 6.39731e-05
0.75 0.000303569 1.37434e-05 6.39731e-05
0.9 0.000252974 1.57439e-05 6.39731e-05
1.05 0.000216835 1.78047e-05 6.39731e-05
1.2 0.000189731 1.9924e-05 6.39731e-05
1.35 0.000168649 2.20947e-05 6.39731e-05
1.5 0.000151785 2.43163e-05 6.39731e-05
1.8 0.000126487 2.88853e-05 6.39731e-05
2.4 9.48653e-05 3.84068e-05 6.39731e-05
3 7.58923e-05 4.81798e-05 6.39731e-05
3.6 0 0.000121117 6.39731e-05
END DIST

Metal 5 OVER 3
DIST count 12 width 0.3
0.3 0.000758923 9.70914e-06 6.39731e-05
0.6 0.000379461 1.3603e-05 6.39731e-05
0.75 0.000303569 1.56666e-05 6.39731e-05
0.9 0.000252974 1.78019e-05 6.39731e-05
1.05 0.000216835 2.00066e-05 6.39731e-05
1.2 0.000189731 2.22754e-05 6.39731e-05
1.35 0.000168649 2.46055e-05 6.39731e-05
1.5 0.000151785 2.69888e-05 6.39731e-05
1.8 0.000126487 3.19017e-05 6.39731e-05
2.4 9.48653e-05 4.21692e-05 6.39731e-05
3 7.58923e-05 5.2733e-05 6.39731e-05
3.6 0 0.000126474 6.39731e-05
END DIST

Metal 5 OVER 4
DIST count 12 width 0.3
0.3 0.000758923 2.24429e-05 6.39731e-05
0.6 0.000379461 2.77229e-05 6.39731e-05
0.75 0.000303569 3.05439e-05 6.39731e-05
0.9 0.000252974 3.34783e-05 6.39731e-05
1.05 0.000216835 3.65194e-05 6.39731e-05
1.2 0.000189731 3.96603e-05 6.39731e-05
1.35 0.000168649 4.28946e-05 6.39731e-05
1.5 0.000151785 4.62151e-05 6.39731e-05
1.8 0.000126487 5.30839e-05 6.39731e-05
2.4 9.48653e-05 6.75153e-05 6.39731e-05
3 7.58923e-05 8.24286e-05 6.39731e-05
3.6 0 0.000160515 6.39731e-05
END DIST

Metal 5 UNDER
WIDTH Table 1 entries:  0.3

Metal 5 UNDER 6
DIST count 12 width 0.3
0.3 0.000758923 2.41407e-05 6.39731e-05
0.6 0.000379461 2.93533e-05 6.39731e-05
0.75 0.000303569 3.2069e-05 6.39731e-05
0.9 0.000252974 3.48502e-05 6.39731e-05
1.05 0.000216835 3.76909e-05 6.39731e-05
1.2 0.000189731 4.05851e-05 6.39731e-05
1.35 0.000168649 4.35268e-05 6.39731e-05
1.5 0.000151785 4.65092e-05 6.39731e-05
1.8 0.000126487 5.25709e-05 6.39731e-05
2.4 9.48653e-05 6.4895e-05 6.39731e-05
3 7.58923e-05 7.71237e-05 6.39731e-05
3.6 0 0.000152065 6.39731e-05
END DIST

Metal 5 DIAGUNDER
WIDTH Table 1 entries:  0.3

Metal 5 DIAGUNDER 6
DIST count 13 width 0.3
0 0 4.0438e-05 6.39731e-05
0.3 0 3.20376e-05 6.39731e-05
0.6 0 3.17166e-05 6.39731e-05
0.75 0 3.15234e-05 6.39731e-05
0.9 0 3.13087e-05 6.39731e-05
1.05 0 3.10725e-05 6.39731e-05
1.2 0 3.0815e-05 6.39731e-05
1.35 0 3.05363e-05 6.39731e-05
1.5 0 3.02368e-05 6.39731e-05
1.8 0 2.95757e-05 6.39731e-05
2.4 0 2.80125e-05 6.39731e-05
3 0 2.61423e-05 6.39731e-05
3.6 0 2.39857e-05 6.39731e-05
END DIST

Metal 5 OVERUNDER
WIDTH Table 1 entries:  0.3

Metal 5 OVER 1 UNDER 6
DIST count 12 width 0.3
0.3 0.000758923 2.79083e-05 6.39731e-05
0.6 0.000379461 3.49113e-05 6.39731e-05
0.75 0.000303569 3.86197e-05 6.39731e-05
0.9 0.000252974 4.24545e-05 6.39731e-05
1.05 0.000216835 4.64081e-05 6.39731e-05
1.2 0.000189731 5.04695e-05 6.39731e-05
1.35 0.000168649 5.46312e-05 6.39731e-05
1.5 0.000151785 5.88812e-05 6.39731e-05
1.8 0.000126487 6.76117e-05 6.39731e-05
2.4 9.48653e-05 8.5697e-05 6.39731e-05
3 7.58923e-05 0.00010404 6.39731e-05
3.6 0 0.000185182 6.39731e-05
END DIST

Metal 5 OVER 2 UNDER 6
DIST count 12 width 0.3
0.3 0.000758923 2.91416e-05 6.39731e-05
0.6 0.000379461 3.63098e-05 6.39731e-05
0.75 0.000303569 4.01113e-05 6.39731e-05
0.9 0.000252974 4.40452e-05 6.39731e-05
1.05 0.000216835 4.81024e-05 6.39731e-05
1.2 0.000189731 5.22758e-05 6.39731e-05
1.35 0.000168649 5.65526e-05 6.39731e-05
1.5 0.000151785 6.09264e-05 6.39731e-05
1.8 0.000126487 6.99146e-05 6.39731e-05
2.4 9.48653e-05 8.85628e-05 6.39731e-05
3 7.58923e-05 0.000107513 6.39731e-05
3.6 0 0.000189276 6.39731e-05
END DIST

Metal 5 OVER 3 UNDER 6
DIST count 12 width 0.3
0.3 0.000758923 3.07071e-05 6.39731e-05
0.6 0.000379461 3.81058e-05 6.39731e-05
0.75 0.000303569 4.20344e-05 6.39731e-05
0.9 0.000252974 4.61031e-05 6.39731e-05
1.05 0.000216835 5.03043e-05 6.39731e-05
1.2 0.000189731 5.46271e-05 6.39731e-05
1.35 0.000168649 5.90634e-05 6.39731e-05
1.5 0.000151785 6.35989e-05 6.39731e-05
1.8 0.000126487 7.29309e-05 6.39731e-05
2.4 9.48653e-05 9.23251e-05 6.39731e-05
3 7.58923e-05 0.000112066 6.39731e-05
3.6 0 0.000194633 6.39731e-05
END DIST

Metal 5 OVER 4 UNDER 6
DIST count 12 width 0.3
0.3 0.000758923 4.34408e-05 6.39731e-05
0.6 0.000379461 5.22256e-05 6.39731e-05
0.75 0.000303569 5.69117e-05 6.39731e-05
0.9 0.000252974 6.17795e-05 6.39731e-05
1.05 0.000216835 6.68172e-05 6.39731e-05
1.2 0.000189731 7.20121e-05 6.39731e-05
1.35 0.000168649 7.73526e-05 6.39731e-05
1.5 0.000151785 8.28252e-05 6.39731e-05
1.8 0.000126487 9.41131e-05 6.39731e-05
2.4 9.48653e-05 0.000117671 6.39731e-05
3 7.58923e-05 0.000141761 6.39731e-05
3.6 0 0.000228674 6.39731e-05
END DIST

Metal 6 RESOVER
WIDTH Table 1 entries:  1.6

Metal 6 RESOVER 0
DIST count 55 width 1.6
0 0 0 1.32576e-05
0 1.8 0 1.32576e-05
0 3.4 0 1.32576e-05
0 4.4 0 1.32576e-05
0 5.2 0 1.32576e-05
0 6.8 0 1.32576e-05
0 7.8 0 1.32576e-05
0 8.6 0 1.32576e-05
0 10.2 0 1.32576e-05
0 13.6 0 1.32576e-05
1.8 1.8 0 1.32576e-05
1.8 3.4 0 1.32576e-05
1.8 4.4 0 1.32576e-05
1.8 5.2 0 1.32576e-05
1.8 6.8 0 1.32576e-05
1.8 7.8 0 1.32576e-05
1.8 8.6 0 1.32576e-05
1.8 10.2 0 1.32576e-05
1.8 13.6 0 1.32576e-05
3.4 3.4 0 1.32576e-05
3.4 4.4 0 1.32576e-05
3.4 5.2 0 1.32576e-05
3.4 6.8 0 1.32576e-05
3.4 7.8 0 1.32576e-05
3.4 8.6 0 1.32576e-05
3.4 10.2 0 1.32576e-05
3.4 13.6 0 1.32576e-05
4.4 4.4 0 1.32576e-05
4.4 5.2 0 1.32576e-05
4.4 6.8 0 1.32576e-05
4.4 7.8 0 1.32576e-05
4.4 8.6 0 1.32576e-05
4.4 10.2 0 1.32576e-05
4.4 13.6 0 1.32576e-05
5.2 5.2 0 1.32576e-05
5.2 6.8 0 1.32576e-05
5.2 7.8 0 1.32576e-05
5.2 8.6 0 1.32576e-05
5.2 10.2 0 1.32576e-05
5.2 13.6 0 1.32576e-05
6.8 6.8 0 1.32576e-05
6.8 7.8 0 1.32576e-05
6.8 8.6 0 1.32576e-05
6.8 10.2 0 1.32576e-05
6.8 13.6 0 1.32576e-05
7.8 7.8 0 1.32576e-05
7.8 8.6 0 1.32576e-05
7.8 10.2 0 1.32576e-05
7.8 13.6 0 1.32576e-05
8.6 8.6 0 1.32576e-05
8.6 10.2 0 1.32576e-05
8.6 13.6 0 1.32576e-05
10.2 10.2 0 1.32576e-05
10.2 13.6 0 1.32576e-05
13.6 0 13.6 1.32576e-05
END DIST

Metal 6 RESOVER 1
DIST count 0 width 1.6
END DIST

Metal 6 RESOVER 2
DIST count 0 width 1.6
END DIST

Metal 6 RESOVER 3
DIST count 0 width 1.6
END DIST

Metal 6 RESOVER 4
DIST count 0 width 1.6
END DIST

Metal 6 RESOVER 5
DIST count 0 width 1.6
END DIST

Metal 6 OVER
WIDTH Table 1 entries:  1.6

Metal 6 OVER 0
DIST count 12 width 1.6
1.6 0.00022298 1.44914e-05 6.62879e-06
3.2 0.00011149 2.33923e-05 6.62879e-06
4 8.91919e-05 2.73429e-05 6.62879e-06
4.8 7.43266e-05 3.08556e-05 6.62879e-06
5.6 6.37085e-05 3.38617e-05 6.62879e-06
6.4 5.57449e-05 3.6303e-05 6.62879e-06
7.2 4.9551e-05 3.81316e-05 6.62879e-06
8 0 3.93122e-05 6.62879e-06
9.6 0 3.98428e-05 6.62879e-06
12.8 0 3.98428e-05 6.62879e-06
16 0 3.98428e-05 6.62879e-06
19.2 0 3.98428e-05 6.62879e-06
END DIST

Metal 6 OVER 1
DIST count 12 width 1.6
1.6 0.00022298 4.01822e-05 6.62879e-06
3.2 0.00011149 6.4783e-05 6.62879e-06
4 8.91919e-05 7.5701e-05 6.62879e-06
4.8 7.43266e-05 8.54098e-05 6.62879e-06
5.6 6.37085e-05 9.3718e-05 6.62879e-06
6.4 5.57449e-05 0.000100468 6.62879e-06
7.2 4.9551e-05 0.000105521 6.62879e-06
8 0 0.000108784 6.62879e-06
9.6 0 0.00011025 6.62879e-06
12.8 0 0.00011025 6.62879e-06
16 0 0.00011025 6.62879e-06
19.2 0 0.00011025 6.62879e-06
END DIST

Metal 6 OVER 2
DIST count 12 width 1.6
1.6 0.00022298 4.48717e-05 6.62879e-06
3.2 0.00011149 7.05208e-05 6.62879e-06
4 8.91919e-05 8.19047e-05 6.62879e-06
4.8 7.43266e-05 9.20265e-05 6.62879e-06
5.6 6.37085e-05 0.00010069 6.62879e-06
6.4 5.57449e-05 0.000107724 6.62879e-06
7.2 4.9551e-05 0.000112995 6.62879e-06
8 0 0.000116396 6.62879e-06
9.6 0 0.000117925 6.62879e-06
12.8 0 0.000117925 6.62879e-06
16 0 0.000117925 6.62879e-06
19.2 0 0.000117925 6.62879e-06
END DIST

Metal 6 OVER 3
DIST count 12 width 1.6
1.6 0.00022298 4.97454e-05 6.62879e-06
3.2 0.00011149 7.66399e-05 6.62879e-06
4 8.91919e-05 8.85793e-05 6.62879e-06
4.8 7.43266e-05 9.91921e-05 6.62879e-06
5.6 6.37085e-05 0.000108277 6.62879e-06
6.4 5.57449e-05 0.000115652 6.62879e-06
7.2 4.9551e-05 0.000121178 6.62879e-06
8 0 0.000124746 6.62879e-06
9.6 0 0.00012635 6.62879e-06
12.8 0 0.00012635 6.62879e-06
16 0 0.00012635 6.62879e-06
19.2 0 0.00012635 6.62879e-06
END DIST

Metal 6 OVER 4
DIST count 12 width 1.6
1.6 0.00022298 6.73004e-05 6.62879e-06
3.2 0.00011149 9.81835e-05 6.62879e-06
4 8.91919e-05 0.000111891 6.62879e-06
4.8 7.43266e-05 0.000124078 6.62879e-06
5.6 6.37085e-05 0.000134509 6.62879e-06
6.4 5.57449e-05 0.000142979 6.62879e-06
7.2 4.9551e-05 0.000149324 6.62879e-06
8 0 0.000153421 6.62879e-06
9.6 0 0.000155262 6.62879e-06
12.8 0 0.000155262 6.62879e-06
16 0 0.000155262 6.62879e-06
19.2 0 0.000155262 6.62879e-06
END DIST

Metal 6 OVER 5
DIST count 12 width 1.6
1.6 0.00022298 0.000130456 6.62879e-06
3.2 0.00011149 0.000174229 6.62879e-06
4 8.91919e-05 0.000193658 6.62879e-06
4.8 7.43266e-05 0.000210932 6.62879e-06
5.6 6.37085e-05 0.000225717 6.62879e-06
6.4 5.57449e-05 0.000237722 6.62879e-06
7.2 4.9551e-05 0.000246715 6.62879e-06
8 0 0.000252521 6.62879e-06
9.6 0 0.000255132 6.62879e-06
12.8 0 0.000255132 6.62879e-06
16 0 0.000255132 6.62879e-06
19.2 0 0.000255132 6.62879e-06
END DIST

Metal 6 UNDER
WIDTH Table 0 entries: 

Metal 6 DIAGUNDER
WIDTH Table 0 entries: 
END DensityModel 0