sky130/openlane/rules.openrcx.sky130A.max.calibre

Extraction Rules for OpenRCX

DIAGMODEL ON

LayerCount 6
DensityRate 1  0

DensityModel 0

Metal 1 RESOVER
WIDTH Table 1 entries:  0.17

Metal 1 RESOVER 0
DIST count 55 width 0.17
0 0 0 0.0909828
0 0.29 0 0.0909828
0 0.46 0 0.0909828
0 0.665 0 0.0909828
0 0.75 0 0.0909828
0 0.92 0 0.0909828
0 1.125 0 0.0909828
0 1.21 0 0.0909828
0 1.38 0 0.0909828
0 1.84 0 0.0909828
0.29 0.29 0 0.0909828
0.29 0.46 0 0.0909828
0.29 0.665 0 0.0909828
0.29 0.75 0 0.0909828
0.29 0.92 0 0.0909828
0.29 1.125 0 0.0909828
0.29 1.21 0 0.0909828
0.29 1.38 0 0.0909828
0.29 1.84 0 0.0909828
0.46 0.46 0 0.0909828
0.46 0.665 0 0.0909828
0.46 0.75 0 0.0909828
0.46 0.92 0 0.0909828
0.46 1.125 0 0.0909828
0.46 1.21 0 0.0909828
0.46 1.38 0 0.0909828
0.46 1.84 0 0.0909828
0.665 0.665 0 0.0909828
0.665 0.75 0 0.0909828
0.665 0.92 0 0.0909828
0.665 1.125 0 0.0909828
0.665 1.21 0 0.0909828
0.665 1.38 0 0.0909828
0.665 1.84 0 0.0909828
0.75 0.75 0 0.0909828
0.75 0.92 0 0.0909828
0.75 1.125 0 0.0909828
0.75 1.21 0 0.0909828
0.75 1.38 0 0.0909828
0.75 1.84 0 0.0909828
0.92 0.92 0 0.0909828
0.92 1.125 0 0.0909828
0.92 1.21 0 0.0909828
0.92 1.38 0 0.0909828
0.92 1.84 0 0.0909828
1.125 1.125 0 0.0909828
1.125 1.21 0 0.0909828
1.125 1.38 0 0.0909828
1.125 1.84 0 0.0909828
1.21 1.21 0 0.0909828
1.21 1.38 0 0.0909828
1.21 1.84 0 0.0909828
1.38 1.38 0 0.0909828
1.38 1.84 0 0.0909828
1.84 0 1.84 0.0909828
END DIST

Metal 1 OVER
WIDTH Table 1 entries:  0.17

Metal 1 OVER 0
DIST count 12 width 0.17
0.17 9.11271e-05 1.34056e-05 0.0454914
0.34 5.28895e-05 1.65505e-05 0.0454914
0.425 4.52756e-05 1.80037e-05 0.0454914
0.51 3.9446e-05 1.93825e-05 0.0454914
0.595 3.47082e-05 2.06908e-05 0.0454914
0.68 3.08141e-05 2.1932e-05 0.0454914
0.765 2.7615e-05 2.31095e-05 0.0454914
0.85 2.49686e-05 2.42266e-05 0.0454914
1.02 2.08969e-05 2.6291e-05 0.0454914
1.36 1.57043e-05 2.9817e-05 0.0454914
1.7 1.26248e-05 3.26646e-05 0.0454914
2.04 0 4.5553e-05 0.0454914
END DIST

Metal 1 UNDER
WIDTH Table 1 entries:  0.17

Metal 1 UNDER 2
DIST count 12 width 0.17
0.17 8.52177e-05 3.37757e-05 0.0454914
0.34 4.42008e-05 4.19096e-05 0.0454914
0.425 3.57322e-05 4.50361e-05 0.0454914
0.51 2.96088e-05 4.76804e-05 0.0454914
0.595 2.49248e-05 4.99272e-05 0.0454914
0.68 2.12687e-05 5.18448e-05 0.0454914
0.765 1.8391e-05 5.34901e-05 0.0454914
0.85 1.61019e-05 5.49089e-05 0.0454914
1.02 1.27659e-05 5.72119e-05 0.0454914
1.36 8.92544e-06 6.03738e-05 0.0454914
1.7 6.9046e-06 6.24074e-05 0.0454914
2.04 0 6.94966e-05 0.0454914
END DIST

Metal 1 UNDER 3
DIST count 12 width 0.17
0.17 8.94887e-05 2.01656e-05 0.0454914
0.34 4.92776e-05 2.5567e-05 0.0454914
0.425 4.09546e-05 2.78886e-05 0.0454914
0.51 3.47555e-05 2.99921e-05 0.0454914
0.595 2.98278e-05 3.18996e-05 0.0454914
0.68 2.58277e-05 3.36312e-05 0.0454914
0.765 2.25592e-05 3.52045e-05 0.0454914
0.85 1.9863e-05 3.66356e-05 0.0454914
1.02 1.5738e-05 3.91261e-05 0.0454914
1.36 1.06367e-05 4.29313e-05 0.0454914
1.7 7.83057e-06 4.56094e-05 0.0454914
2.04 0 5.3684e-05 0.0454914
END DIST

Metal 1 UNDER 4
DIST count 12 width 0.17
0.17 9.02744e-05 1.62395e-05 0.0454914
0.34 5.06368e-05 2.06366e-05 0.0454914
0.425 4.25874e-05 2.2595e-05 0.0454914
0.51 3.6604e-05 2.44095e-05 0.0454914
0.595 3.18259e-05 2.60912e-05 0.0454914
0.68 2.79154e-05 2.76503e-05 0.0454914
0.765 2.46881e-05 2.90961e-05 0.0454914
0.85 2.1993e-05 3.04373e-05 0.0454914
1.02 1.77809e-05 3.28366e-05 0.0454914
1.36 1.23162e-05 3.66878e-05 0.0454914
1.7 9.11162e-06 3.95587e-05 0.0454914
2.04 0 4.88095e-05 0.0454914
END DIST

Metal 1 UNDER 5
DIST count 12 width 0.17
0.17 9.04461e-05 1.542e-05 0.0454914
0.34 5.11459e-05 1.92353e-05 0.0454914
0.425 4.32711e-05 2.09653e-05 0.0454914
0.51 3.74554e-05 2.25869e-05 0.0454914
0.595 3.28252e-05 2.41068e-05 0.0454914
0.68 2.90375e-05 2.55315e-05 0.0454914
0.765 2.59076e-05 2.68671e-05 0.0454914
0.85 2.32854e-05 2.81191e-05 0.0454914
1.02 1.91537e-05 3.03933e-05 0.0454914
1.36 1.36581e-05 3.41491e-05 0.0454914
1.7 1.02993e-05 3.70507e-05 0.0454914
2.04 0 4.73924e-05 0.0454914
END DIST

Metal 1 UNDER 6
DIST count 12 width 0.17
0.17 9.04375e-05 1.39742e-05 0.0454914
0.34 5.11807e-05 1.76023e-05 0.0454914
0.425 4.33401e-05 1.92556e-05 0.0454914
0.51 3.7586e-05 2.08101e-05 0.0454914
0.595 3.30254e-05 2.22719e-05 0.0454914
0.68 2.93038e-05 2.36464e-05 0.0454914
0.765 2.62317e-05 2.49388e-05 0.0454914
0.85 2.36572e-05 2.6154e-05 0.0454914
1.02 1.95903e-05 2.8371e-05 0.0454914
1.36 1.41306e-05 3.2063e-05 0.0454914
1.7 1.07398e-05 3.49462e-05 0.0454914
2.04 0 4.5676e-05 0.0454914
END DIST

Metal 1 DIAGUNDER
WIDTH Table 1 entries:  0.17

Metal 1 DIAGUNDER 2
DIST count 13 width 0.17
0 0 3.82974e-05 0.0454914
0.17 0 2.79886e-05 0.0454914
0.34 0 2.25748e-05 0.0454914
0.425 0 2.04119e-05 0.0454914
0.51 0 1.8546e-05 0.0454914
0.595 0 1.69365e-05 0.0454914
0.68 0 1.5548e-05 0.0454914
0.765 0 1.43503e-05 0.0454914
0.85 0 1.33171e-05 0.0454914
1.02 0 1.16569e-05 0.0454914
1.36 0 9.50205e-06 0.0454914
1.7 0 8.30879e-06 0.0454914
2.04 0 7.64801e-06 0.0454914
END DIST

Metal 1 DIAGUNDER 3
DIST count 13 width 0.17
0 0 1.70139e-05 0.0454914
0.17 0 1.48689e-05 0.0454914
0.34 0 1.34252e-05 0.0454914
0.425 0 1.27581e-05 0.0454914
0.51 0 1.21251e-05 0.0454914
0.595 0 1.15244e-05 0.0454914
0.68 0 1.09543e-05 0.0454914
0.765 0 1.07492e-05 0.0454914
0.85 0 1.02658e-05 0.0454914
1.02 0 9.36325e-06 0.0454914
1.36 0 7.78919e-06 0.0454914
1.7 0 6.47974e-06 0.0454914
2.04 0 5.39043e-06 0.0454914
END DIST

Metal 1 DIAGUNDER 4
DIST count 13 width 0.17
0 0 1.08413e-05 0.0454914
0.17 0 1.09182e-05 0.0454914
0.34 0 1.0297e-05 0.0454914
0.425 0 1e-05 0.0454914
0.51 0 9.71179e-06 0.0454914
0.595 0 9.43203e-06 0.0454914
0.68 0 9.16046e-06 0.0454914
0.765 0 8.89691e-06 0.0454914
0.85 0 8.64106e-06 0.0454914
1.02 0 8.15172e-06 0.0454914
1.36 0 7.2563e-06 0.0454914
1.7 0 6.46141e-06 0.0454914
2.04 0 5.93895e-06 0.0454914
END DIST

Metal 1 DIAGUNDER 5
DIST count 13 width 0.17
0 0 6.26649e-06 0.0454914
0.17 0 6.51364e-06 0.0454914
0.34 0 6.28562e-06 0.0454914
0.425 0 6.17466e-06 0.0454914
0.51 0 6.06569e-06 0.0454914
0.595 0 5.9587e-06 0.0454914
0.68 0 5.85359e-06 0.0454914
0.765 0 5.75039e-06 0.0454914
0.85 0 5.64905e-06 0.0454914
1.02 0 5.45175e-06 0.0454914
1.36 0 5.07796e-06 0.0454914
1.7 0 4.73024e-06 0.0454914
2.04 0 4.4852e-06 0.0454914
END DIST

Metal 1 DIAGUNDER 6
DIST count 0 width 0.17
END DIST

Metal 2 RESOVER
WIDTH Table 1 entries:  0.14

Metal 2 RESOVER 0
DIST count 55 width 0.14
0 0 0 0.00166468
0 0.2 0 0.00166468
0 0.34 0 0.00166468
0 0.47 0 0.00166468
0 0.54 0 0.00166468
0 0.68 0 0.00166468
0 0.81 0 0.00166468
0 0.88 0 0.00166468
0 1.02 0 0.00166468
0 1.36 0 0.00166468
0.2 0.2 0 0.00166468
0.2 0.34 0 0.00166468
0.2 0.47 0 0.00166468
0.2 0.54 0 0.00166468
0.2 0.68 0 0.00166468
0.2 0.81 0 0.00166468
0.2 0.88 0 0.00166468
0.2 1.02 0 0.00166468
0.2 1.36 0 0.00166468
0.34 0.34 0 0.00166468
0.34 0.47 0 0.00166468
0.34 0.54 0 0.00166468
0.34 0.68 0 0.00166468
0.34 0.81 0 0.00166468
0.34 0.88 0 0.00166468
0.34 1.02 0 0.00166468
0.34 1.36 0 0.00166468
0.47 0.47 0 0.00166468
0.47 0.54 0 0.00166468
0.47 0.68 0 0.00166468
0.47 0.81 0 0.00166468
0.47 0.88 0 0.00166468
0.47 1.02 0 0.00166468
0.47 1.36 0 0.00166468
0.54 0.54 0 0.00166468
0.54 0.68 0 0.00166468
0.54 0.81 0 0.00166468
0.54 0.88 0 0.00166468
0.54 1.02 0 0.00166468
0.54 1.36 0 0.00166468
0.68 0.68 0 0.00166468
0.68 0.81 0 0.00166468
0.68 0.88 0 0.00166468
0.68 1.02 0 0.00166468
0.68 1.36 0 0.00166468
0.81 0.81 0 0.00166468
0.81 0.88 0 0.00166468
0.81 1.02 0 0.00166468
0.81 1.36 0 0.00166468
0.88 0.88 0 0.00166468
0.88 1.02 0 0.00166468
0.88 1.36 0 0.00166468
1.02 1.02 0 0.00166468
1.02 1.36 0 0.00166468
1.36 0 1.36 0.00166468
END DIST

Metal 2 RESOVER 1
DIST count 0 width 0.14
END DIST

Metal 2 OVER
WIDTH Table 1 entries:  0.14

Metal 2 OVER 0
DIST count 12 width 0.14
0.14 9.88048e-05 1.0111e-05 0.000832338
0.28 8.8783e-05 1.27521e-05 0.000832338
0.35 7.61055e-05 1.38673e-05 0.000832338
0.42 6.80324e-05 1.48955e-05 0.000832338
0.49 5.98993e-05 1.59236e-05 0.000832338
0.56 5.17064e-05 1.69518e-05 0.000832338
0.63 4.83949e-05 1.77605e-05 0.000832338
0.7 4.5507e-05 1.855e-05 0.000832338
0.84 3.97041e-05 2.0129e-05 0.000832338
1.12 3.04496e-05 2.29407e-05 0.000832338
1.4 2.61103e-05 2.50524e-05 0.000832338
1.68 0 4.89214e-05 0.000832338
END DIST

Metal 2 OVER 1
DIST count 12 width 0.14
0.14 9.91354e-05 2.39343e-05 0.000832338
0.28 8.08546e-05 2.92707e-05 0.000832338
0.35 6.94154e-05 3.15722e-05 0.000832338
0.42 6.09841e-05 3.36711e-05 0.000832338
0.49 5.3178e-05 3.56244e-05 0.000832338
0.56 4.58992e-05 3.74448e-05 0.000832338
0.63 4.14743e-05 3.90352e-05 0.000832338
0.7 3.76683e-05 4.05057e-05 0.000832338
0.84 3.10455e-05 4.31558e-05 0.000832338
1.12 2.17494e-05 4.73486e-05 0.000832338
1.4 1.70932e-05 5.02856e-05 0.000832338
1.68 0 6.62166e-05 0.000832338
END DIST

Metal 2 UNDER
WIDTH Table 1 entries:  0.14

Metal 2 UNDER 3
DIST count 12 width 0.14
0.14 9.70828e-05 3.53567e-05 0.000832338
0.28 7.78497e-05 4.33526e-05 0.000832338
0.35 6.60614e-05 4.65776e-05 0.000832338
0.42 5.74304e-05 4.941e-05 0.000832338
0.49 4.95262e-05 5.19392e-05 0.000832338
0.56 4.22253e-05 5.42053e-05 0.000832338
0.63 3.78531e-05 5.6133e-05 0.000832338
0.7 3.4139e-05 5.78528e-05 0.000832338
0.84 2.77635e-05 6.07974e-05 0.000832338
1.12 1.90289e-05 6.50713e-05 0.000832338
1.4 1.48578e-05 6.77758e-05 0.000832338
1.68 0 8.15013e-05 0.000832338
END DIST

Metal 2 UNDER 4
DIST count 12 width 0.14
0.14 0.000103289 1.41406e-05 0.000832338
0.28 8.5105e-05 1.81018e-05 0.000832338
0.35 7.35498e-05 1.98512e-05 0.000832338
0.42 6.49725e-05 2.1479e-05 0.000832338
0.49 5.69438e-05 2.30346e-05 0.000832338
0.56 4.93881e-05 2.45225e-05 0.000832338
0.63 4.47227e-05 2.58361e-05 0.000832338
0.7 4.06631e-05 2.70807e-05 0.000832338
0.84 3.35095e-05 2.9408e-05 0.000832338
1.12 2.32378e-05 3.33322e-05 0.000832338
1.4 1.78669e-05 3.63087e-05 0.000832338
1.68 0 5.26923e-05 0.000832338
END DIST

Metal 2 UNDER 5
DIST count 12 width 0.14
0.14 0.000103975 1.19465e-05 0.000832338
0.28 8.67508e-05 1.49494e-05 0.000832338
0.35 7.5373e-05 1.62893e-05 0.000832338
0.42 6.69631e-05 1.7549e-05 0.000832338
0.49 5.91553e-05 1.87746e-05 0.000832338
0.56 5.17783e-05 1.99675e-05 0.000832338
0.63 4.72227e-05 2.10179e-05 0.000832338
0.7 4.3223e-05 2.20289e-05 0.000832338
0.84 3.60806e-05 2.39671e-05 0.000832338
1.12 2.55811e-05 2.73679e-05 0.000832338
1.4 1.9868e-05 3.00715e-05 0.000832338
1.68 0 4.80324e-05 0.000832338
END DIST

Metal 2 UNDER 6
DIST count 12 width 0.14
0.14 0.000104817 1.05659e-05 0.000832338
0.28 8.69091e-05 1.33106e-05 0.000832338
0.35 7.58137e-05 1.45426e-05 0.000832338
0.42 6.74778e-05 1.57053e-05 0.000832338
0.49 5.97097e-05 1.68397e-05 0.000832338
0.56 5.25264e-05 1.79471e-05 0.000832338
0.63 4.78981e-05 1.89283e-05 0.000832338
0.7 4.38249e-05 1.98757e-05 0.000832338
0.84 3.65992e-05 2.16998e-05 0.000832338
1.12 2.59906e-05 2.49327e-05 0.000832338
1.4 2.00721e-05 2.75468e-05 0.000832338
1.68 0 4.55883e-05 0.000832338
END DIST

Metal 2 DIAGUNDER
WIDTH Table 1 entries:  0.14

Metal 2 DIAGUNDER 3
DIST count 13 width 0.14
0 0 6.40976e-05 0.000832338
0.14 0 4.46792e-05 0.000832338
0.28 0 3.90142e-05 0.000832338
0.35 0 3.62289e-05 0.000832338
0.42 0 2.99708e-05 0.000832338
0.49 0 2.47096e-05 0.000832338
0.56 0 2.28684e-05 0.000832338
0.63 0 2.12542e-05 0.000832338
0.7 0 1.98383e-05 0.000832338
0.84 0 1.75048e-05 0.000832338
1.12 0 1.43065e-05 0.000832338
1.4 0 1.23684e-05 0.000832338
1.68 0 9.4552e-06 0.000832338
END DIST

Metal 2 DIAGUNDER 4
DIST count 13 width 0.14
0 0 2.17741e-05 0.000832338
0.14 0 2.02217e-05 0.000832338
0.28 0 1.89142e-05 0.000832338
0.35 0 1.84404e-05 0.000832338
0.42 0 1.79774e-05 0.000832338
0.49 0 1.7525e-05 0.000832338
0.56 0 1.70831e-05 0.000832338
0.63 0 1.66516e-05 0.000832338
0.7 0 1.62303e-05 0.000832338
0.84 0 1.54182e-05 0.000832338
1.12 0 1.39134e-05 0.000832338
1.4 0 1.25614e-05 0.000832338
1.68 0 1.03615e-05 0.000832338
END DIST

Metal 2 DIAGUNDER 5
DIST count 13 width 0.14
0 0 1.17756e-05 0.000832338
0.14 0 1.20729e-05 0.000832338
0.28 0 1.17086e-05 0.000832338
0.35 0 1.15616e-05 0.000832338
0.42 0 1.14156e-05 0.000832338
0.49 0 1.12707e-05 0.000832338
0.56 0 1.11269e-05 0.000832338
0.63 0 1.09844e-05 0.000832338
0.7 0 1.08433e-05 0.000832338
0.84 0 1.05656e-05 0.000832338
1.12 0 1.00307e-05 0.000832338
1.4 0 9.52625e-06 0.000832338
1.68 0 7.61017e-06 0.000832338
END DIST

Metal 2 DIAGUNDER 6
DIST count 13 width 0.14
0 0 8.84935e-06 0.000832338
0.14 0 8.44784e-06 0.000832338
0.28 0 8.27067e-06 0.000832338
0.35 0 8.18348e-06 0.000832338
0.42 0 8.09719e-06 0.000832338
0.49 0 8.01183e-06 0.000832338
0.56 0 7.92734e-06 0.000832338
0.63 0 7.84376e-06 0.000832338
0.7 0 7.76108e-06 0.000832338
0.84 0 7.59827e-06 0.000832338
1.12 0 7.2829e-06 0.000832338
1.4 0 6.9807e-06 0.000832338
1.68 0 6.72128e-06 0.000832338
END DIST

Metal 2 OVERUNDER
WIDTH Table 1 entries:  0.14

Metal 2 OVER 1 UNDER 3
DIST count 12 width 0.14
0.14 9.16312e-05 4.83828e-05 0.000832338
0.28 7.15355e-05 5.96958e-05 0.000832338
0.35 5.88831e-05 6.40766e-05 0.000832338
0.42 4.93702e-05 6.78074e-05 0.000832338
0.49 4.14247e-05 7.10214e-05 0.000832338
0.56 3.46828e-05 7.38027e-05 0.000832338
0.63 3.00555e-05 7.61571e-05 0.000832338
0.7 2.62729e-05 7.81686e-05 0.000832338
0.84 2.03317e-05 8.14855e-05 0.000832338
1.12 1.29742e-05 8.59738e-05 0.000832338
1.4 9.49118e-06 8.86532e-05 0.000832338
1.68 0 9.76885e-05 0.000832338
END DIST

Metal 2 OVER 1 UNDER 4
DIST count 12 width 0.14
0.14 9.78867e-05 2.71849e-05 0.000832338
0.28 7.89577e-05 3.4212e-05 0.000832338
0.35 6.69091e-05 3.71813e-05 0.000832338
0.42 5.7448e-05 3.98572e-05 0.000832338
0.49 4.92039e-05 4.22768e-05 0.000832338
0.56 4.19635e-05 4.44645e-05 0.000832338
0.63 3.6746e-05 4.64166e-05 0.000832338
0.7 3.23447e-05 4.82516e-05 0.000832338
0.84 2.5216e-05 5.13948e-05 0.000832338
1.12 1.60142e-05 5.6215e-05 0.000832338
1.4 1.13972e-05 5.95394e-05 0.000832338
1.68 0 7.04225e-05 0.000832338
END DIST

Metal 2 OVER 1 UNDER 5
DIST count 12 width 0.14
0.14 0.000101706 2.50434e-05 0.000832338
0.28 7.96482e-05 3.10585e-05 0.000832338
0.35 6.87431e-05 3.36087e-05 0.000832338
0.42 6.00561e-05 3.59373e-05 0.000832338
0.49 5.23432e-05 3.80842e-05 0.000832338
0.56 4.5418e-05 4.00659e-05 0.000832338
0.63 4.03375e-05 4.1842e-05 0.000832338
0.7 3.59528e-05 4.34769e-05 0.000832338
0.84 2.86355e-05 4.63862e-05 0.000832338
1.12 1.87189e-05 5.09561e-05 0.000832338
1.4 1.34077e-05 5.42133e-05 0.000832338
1.68 0 6.66555e-05 0.000832338
END DIST

Metal 2 OVER 1 UNDER 6
DIST count 12 width 0.14
0.14 0.000102072 2.40548e-05 0.000832338
0.28 7.98149e-05 2.97337e-05 0.000832338
0.35 6.90946e-05 3.21609e-05 0.000832338
0.42 6.04816e-05 3.44021e-05 0.000832338
0.49 5.28124e-05 3.64722e-05 0.000832338
0.56 4.5996e-05 3.83864e-05 0.000832338
0.63 4.08937e-05 4.01088e-05 0.000832338
0.7 3.64809e-05 4.16974e-05 0.000832338
0.84 2.91256e-05 4.45313e-05 0.000832338
1.12 1.91354e-05 4.90102e-05 0.000832338
1.4 1.36988e-05 5.22366e-05 0.000832338
1.68 0 6.49048e-05 0.000832338
END DIST

Metal 3 RESOVER
WIDTH Table 1 entries:  0.14

Metal 3 RESOVER 0
DIST count 55 width 0.14
0 0 0 0.00166468
0 0.32 0 0.00166468
0 0.46 0 0.00166468
0 0.71 0 0.00166468
0 0.78 0 0.00166468
0 0.92 0 0.00166468
0 1.17 0 0.00166468
0 1.24 0 0.00166468
0 1.38 0 0.00166468
0 1.84 0 0.00166468
0.32 0.32 0 0.00166468
0.32 0.46 0 0.00166468
0.32 0.71 0 0.00166468
0.32 0.78 0 0.00166468
0.32 0.92 0 0.00166468
0.32 1.17 0 0.00166468
0.32 1.24 0 0.00166468
0.32 1.38 0 0.00166468
0.32 1.84 0 0.00166468
0.46 0.46 0 0.00166468
0.46 0.71 0 0.00166468
0.46 0.78 0 0.00166468
0.46 0.92 0 0.00166468
0.46 1.17 0 0.00166468
0.46 1.24 0 0.00166468
0.46 1.38 0 0.00166468
0.46 1.84 0 0.00166468
0.71 0.71 0 0.00166468
0.71 0.78 0 0.00166468
0.71 0.92 0 0.00166468
0.71 1.17 0 0.00166468
0.71 1.24 0 0.00166468
0.71 1.38 0 0.00166468
0.71 1.84 0 0.00166468
0.78 0.78 0 0.00166468
0.78 0.92 0 0.00166468
0.78 1.17 0 0.00166468
0.78 1.24 0 0.00166468
0.78 1.38 0 0.00166468
0.78 1.84 0 0.00166468
0.92 0.92 0 0.00166468
0.92 1.17 0 0.00166468
0.92 1.24 0 0.00166468
0.92 1.38 0 0.00166468
0.92 1.84 0 0.00166468
1.17 1.17 0 0.00166468
1.17 1.24 0 0.00166468
1.17 1.38 0 0.00166468
1.17 1.84 0 0.00166468
1.24 1.24 0 0.00166468
1.24 1.38 0 0.00166468
1.24 1.84 0 0.00166468
1.38 1.38 0 0.00166468
1.38 1.84 0 0.00166468
1.84 0 1.84 0.00166468
END DIST

Metal 3 RESOVER 1
DIST count 0 width 0.14
END DIST

Metal 3 RESOVER 2
DIST count 0 width 0.14
END DIST

Metal 3 OVER
WIDTH Table 1 entries:  0.14

Metal 3 OVER 0
DIST count 12 width 0.14
0.14 9.95886e-05 8.66356e-06 0.000832338
0.28 8.88255e-05 1.07302e-05 0.000832338
0.35 7.64461e-05 1.1588e-05 0.000832338
0.42 6.85752e-05 1.23733e-05 0.000832338
0.49 6.06429e-05 1.31587e-05 0.000832338
0.56 5.26489e-05 1.39442e-05 0.000832338
0.63 4.94297e-05 1.45637e-05 0.000832338
0.7 4.6624e-05 1.51688e-05 0.000832338
0.84 4.09834e-05 1.63789e-05 0.000832338
1.12 3.1956e-05 1.85702e-05 0.000832338
1.4 2.76576e-05 2.02986e-05 0.000832338
1.68 0 4.53683e-05 0.000832338
END DIST

Metal 3 OVER 1
DIST count 12 width 0.14
0.14 0.000104304 1.24143e-05 0.000832338
0.28 8.58519e-05 1.50557e-05 0.000832338
0.35 7.46018e-05 1.62531e-05 0.000832338
0.42 6.62952e-05 1.73825e-05 0.000832338
0.49 5.86663e-05 1.84787e-05 0.000832338
0.56 5.14868e-05 1.95418e-05 0.000832338
0.63 4.70264e-05 2.049e-05 0.000832338
0.7 4.31361e-05 2.13995e-05 0.000832338
0.84 3.62643e-05 2.31288e-05 0.000832338
1.12 2.63053e-05 2.61498e-05 0.000832338
1.4 2.09504e-05 2.85727e-05 0.000832338
1.68 0 4.76184e-05 0.000832338
END DIST

Metal 3 OVER 2
DIST count 12 width 0.14
0.14 9.74722e-05 3.19418e-05 0.000832338
0.28 7.89221e-05 3.80116e-05 0.000832338
0.35 6.76034e-05 4.05568e-05 0.000832338
0.42 5.93207e-05 4.28353e-05 0.000832338
0.49 5.16775e-05 4.49083e-05 0.000832338
0.56 4.45688e-05 4.67977e-05 0.000832338
0.63 4.03176e-05 4.84407e-05 0.000832338
0.7 3.66832e-05 4.99304e-05 0.000832338
0.84 3.03851e-05 5.25343e-05 0.000832338
1.12 2.16109e-05 5.64694e-05 0.000832338
1.4 1.72873e-05 5.91142e-05 0.000832338
1.68 0 7.51029e-05 0.000832338
END DIST

Metal 3 UNDER
WIDTH Table 1 entries:  0.14

Metal 3 UNDER 4
DIST count 12 width 0.14
0.14 0.000101016 2.08629e-05 0.000832338
0.28 8.19589e-05 2.60984e-05 0.000832338
0.35 7.03318e-05 2.83425e-05 0.000832338
0.42 6.17297e-05 3.03832e-05 0.000832338
0.49 5.37774e-05 3.22723e-05 0.000832338
0.56 4.6375e-05 3.40238e-05 0.000832338
0.63 4.18411e-05 3.55671e-05 0.000832338
0.7 3.79445e-05 3.69898e-05 0.000832338
0.84 3.11871e-05 3.95359e-05 0.000832338
1.12 2.17322e-05 4.35534e-05 0.000832338
1.4 1.69792e-05 4.6406e-05 0.000832338
1.68 0 6.20739e-05 0.000832338
END DIST

Metal 3 UNDER 5
DIST count 12 width 0.14
0.14 0.000104879 1.12334e-05 0.000832338
0.28 8.70303e-05 1.38459e-05 0.000832338
0.35 7.58063e-05 1.5012e-05 0.000832338
0.42 6.74807e-05 1.61091e-05 0.000832338
0.49 5.97401e-05 1.71751e-05 0.000832338
0.56 5.24814e-05 1.82113e-05 0.000832338
0.63 4.79516e-05 1.91357e-05 0.000832338
0.7 4.39747e-05 2.00256e-05 0.000832338
0.84 3.68908e-05 2.17287e-05 0.000832338
1.12 2.64776e-05 2.47429e-05 0.000832338
1.4 2.07485e-05 2.72066e-05 0.000832338
1.68 0 4.58318e-05 0.000832338
END DIST

Metal 3 UNDER 6
DIST count 12 width 0.14
0.14 0.000105704 9.54545e-06 0.000832338
0.28 8.75336e-05 1.17605e-05 0.000832338
0.35 7.66148e-05 1.27537e-05 0.000832338
0.42 6.84415e-05 1.36923e-05 0.000832338
0.49 6.0798e-05 1.46104e-05 0.000832338
0.56 5.36626e-05 1.55089e-05 0.000832338
0.63 4.915e-05 1.63118e-05 0.000832338
0.7 4.51725e-05 1.70897e-05 0.000832338
0.84 3.80901e-05 1.8593e-05 0.000832338
1.12 2.7607e-05 2.13009e-05 0.000832338
1.4 2.16677e-05 2.35667e-05 0.000832338
1.68 0 4.28474e-05 0.000832338
END DIST

Metal 3 DIAGUNDER
WIDTH Table 1 entries:  0.14

Metal 3 DIAGUNDER 4
DIST count 13 width 0.14
0 0 4.46265e-05 0.000832338
0.14 0 4.0557e-05 0.000832338
0.28 0 3.8065e-05 0.000832338
0.35 0 3.64345e-05 0.000832338
0.42 0 3.14032e-05 0.000832338
0.49 0 2.72764e-05 0.000832338
0.56 0 2.5971e-05 0.000832338
0.63 0 2.47473e-05 0.000832338
0.7 0 2.36003e-05 0.000832338
0.84 0 2.15173e-05 0.000832338
1.12 0 1.80784e-05 0.000832338
1.4 0 1.54233e-05 0.000832338
1.68 0 1.26967e-05 0.000832338
END DIST

Metal 3 DIAGUNDER 5
DIST count 13 width 0.14
0 0 1.69077e-05 0.000832338
0.14 0 1.86431e-05 0.000832338
0.28 0 1.92808e-05 0.000832338
0.35 0 1.90321e-05 0.000832338
0.42 0 1.67663e-05 0.000832338
0.49 0 1.39428e-05 0.000832338
0.56 0 1.37435e-05 0.000832338
0.63 0 1.35469e-05 0.000832338
0.7 0 1.33526e-05 0.000832338
0.84 0 1.29715e-05 0.000832338
1.12 0 1.22379e-05 0.000832338
1.4 0 1.15426e-05 0.000832338
1.68 0 9.48553e-06 0.000832338
END DIST

Metal 3 DIAGUNDER 6
DIST count 13 width 0.14
0 0 1.17303e-05 0.000832338
0.14 0 1.09065e-05 0.000832338
0.28 0 1.06645e-05 0.000832338
0.35 0 1.05456e-05 0.000832338
0.42 0 1.0428e-05 0.000832338
0.49 0 1.03117e-05 0.000832338
0.56 0 1.01968e-05 0.000832338
0.63 0 1.00831e-05 0.000832338
0.7 0 9.97074e-06 0.000832338
0.84 0 9.74978e-06 0.000832338
1.12 0 9.32269e-06 0.000832338
1.4 0 8.91461e-06 0.000832338
1.68 0 8.58258e-06 0.000832338
END DIST

Metal 3 OVERUNDER
WIDTH Table 1 entries:  0.14

Metal 3 OVER 1 UNDER 4
DIST count 12 width 0.14
0.14 9.98904e-05 2.38062e-05 0.000832338
0.28 8.04004e-05 2.99128e-05 0.000832338
0.35 6.83128e-05 3.25357e-05 0.000832338
0.42 5.88251e-05 3.49155e-05 0.000832338
0.49 5.06173e-05 3.70915e-05 0.000832338
0.56 4.34045e-05 3.90832e-05 0.000832338
0.63 3.81788e-05 4.08668e-05 0.000832338
0.7 3.37634e-05 4.24964e-05 0.000832338
0.84 2.6603e-05 4.53622e-05 0.000832338
1.12 1.7322e-05 4.97863e-05 0.000832338
1.4 1.26038e-05 5.28952e-05 0.000832338
1.68 0 6.47983e-05 0.000832338
END DIST

Metal 3 OVER 1 UNDER 5
DIST count 12 width 0.14
0.14 0.000106706 1.43626e-05 0.000832338
0.28 8.45202e-05 1.77099e-05 0.000832338
0.35 7.37471e-05 1.92389e-05 0.000832338
0.42 6.51256e-05 2.06827e-05 0.000832338
0.49 5.74484e-05 2.20619e-05 0.000832338
0.56 5.051e-05 2.33794e-05 0.000832338
0.63 4.53154e-05 2.4596e-05 0.000832338
0.7 4.07788e-05 2.5753e-05 0.000832338
0.84 3.31007e-05 2.79097e-05 0.000832338
1.12 2.2391e-05 3.16096e-05 0.000832338
1.4 1.63545e-05 3.45736e-05 0.000832338
1.68 0 4.94135e-05 0.000832338
END DIST

Metal 3 OVER 1 UNDER 6
DIST count 12 width 0.14
0.14 0.000107257 1.25961e-05 0.000832338
0.28 8.50387e-05 1.55389e-05 0.000832338
0.35 7.44496e-05 1.68954e-05 0.000832338
0.42 6.59804e-05 1.81836e-05 0.000832338
0.49 5.84182e-05 1.94208e-05 0.000832338
0.56 5.15984e-05 2.06088e-05 0.000832338
0.63 4.6428e-05 2.1712e-05 0.000832338
0.7 4.18969e-05 2.27664e-05 0.000832338
0.84 3.42172e-05 2.4747e-05 0.000832338
1.12 2.34268e-05 2.81963e-05 0.000832338
1.4 1.72081e-05 3.10183e-05 0.000832338
1.68 0 4.65119e-05 0.000832338
END DIST

Metal 3 OVER 2 UNDER 4
DIST count 12 width 0.14
0.14 9.3616e-05 4.26796e-05 0.000832338
0.28 7.3434e-05 5.26539e-05 0.000832338
0.35 6.09343e-05 5.66103e-05 0.000832338
0.42 5.14512e-05 6.0024e-05 0.000832338
0.49 4.34448e-05 6.29933e-05 0.000832338
0.56 3.65907e-05 6.55853e-05 0.000832338
0.63 3.18522e-05 6.78135e-05 0.000832338
0.7 2.79527e-05 6.98356e-05 0.000832338
0.84 2.17852e-05 7.30656e-05 0.000832338
1.12 1.40767e-05 7.74868e-05 0.000832338
1.4 1.03767e-05 8.02763e-05 0.000832338
1.68 0 9.02052e-05 0.000832338
END DIST

Metal 3 OVER 2 UNDER 5
DIST count 12 width 0.14
0.14 0.000100192 3.34231e-05 0.000832338
0.28 7.77168e-05 4.03124e-05 0.000832338
0.35 6.68169e-05 4.32051e-05 0.000832338
0.42 5.81934e-05 4.5792e-05 0.000832338
0.49 5.05642e-05 4.81243e-05 0.000832338
0.56 4.37657e-05 5.02307e-05 0.000832338
0.63 3.88286e-05 5.20946e-05 0.000832338
0.7 3.45929e-05 5.38699e-05 0.000832338
0.84 2.75703e-05 5.67789e-05 0.000832338
1.12 1.81553e-05 6.10493e-05 0.000832338
1.4 1.31873e-05 6.41123e-05 0.000832338
1.68 0 7.62363e-05 0.000832338
END DIST

Metal 3 OVER 2 UNDER 6
DIST count 12 width 0.14
0.14 0.000100595 3.18283e-05 0.000832338
0.28 7.817e-05 3.82687e-05 0.000832338
0.35 6.7523e-05 4.09901e-05 0.000832338
0.42 5.90295e-05 4.34334e-05 0.000832338
0.49 5.14872e-05 4.56438e-05 0.000832338
0.56 4.47782e-05 4.76466e-05 0.000832338
0.63 3.98424e-05 4.94268e-05 0.000832338
0.7 3.55917e-05 5.10389e-05 0.000832338
0.84 2.85338e-05 5.38388e-05 0.000832338
1.12 1.90023e-05 5.80749e-05 0.000832338
1.4 1.385e-05 6.09946e-05 0.000832338
1.68 0 7.36516e-05 0.000832338
END DIST

Metal 4 RESOVER
WIDTH Table 1 entries:  0.3

Metal 4 RESOVER 0
DIST count 55 width 0.3
0 0 0 0.000232242
0 0.38 0 0.000232242
0 0.68 0 0.000232242
0 0.91 0 0.000232242
0 1.06 0 0.000232242
0 1.36 0 0.000232242
0 1.59 0 0.000232242
0 1.74 0 0.000232242
0 2.04 0 0.000232242
0 2.72 0 0.000232242
0.38 0.38 0 0.000232242
0.38 0.68 0 0.000232242
0.38 0.91 0 0.000232242
0.38 1.06 0 0.000232242
0.38 1.36 0 0.000232242
0.38 1.59 0 0.000232242
0.38 1.74 0 0.000232242
0.38 2.04 0 0.000232242
0.38 2.72 0 0.000232242
0.68 0.68 0 0.000232242
0.68 0.91 0 0.000232242
0.68 1.06 0 0.000232242
0.68 1.36 0 0.000232242
0.68 1.59 0 0.000232242
0.68 1.74 0 0.000232242
0.68 2.04 0 0.000232242
0.68 2.72 0 0.000232242
0.91 0.91 0 0.000232242
0.91 1.06 0 0.000232242
0.91 1.36 0 0.000232242
0.91 1.59 0 0.000232242
0.91 1.74 0 0.000232242
0.91 2.04 0 0.000232242
0.91 2.72 0 0.000232242
1.06 1.06 0 0.000232242
1.06 1.36 0 0.000232242
1.06 1.59 0 0.000232242
1.06 1.74 0 0.000232242
1.06 2.04 0 0.000232242
1.06 2.72 0 0.000232242
1.36 1.36 0 0.000232242
1.36 1.59 0 0.000232242
1.36 1.74 0 0.000232242
1.36 2.04 0 0.000232242
1.36 2.72 0 0.000232242
1.59 1.59 0 0.000232242
1.59 1.74 0 0.000232242
1.59 2.04 0 0.000232242
1.59 2.72 0 0.000232242
1.74 1.74 0 0.000232242
1.74 2.04 0 0.000232242
1.74 2.72 0 0.000232242
2.04 2.04 0 0.000232242
2.04 2.72 0 0.000232242
2.72 0 2.72 0.000232242
END DIST

Metal 4 RESOVER 1
DIST count 0 width 0.3
END DIST

Metal 4 RESOVER 2
DIST count 0 width 0.3
END DIST

Metal 4 RESOVER 3
DIST count 0 width 0.3
END DIST

Metal 4 OVER
WIDTH Table 1 entries:  0.3

Metal 4 OVER 0
DIST count 12 width 0.3
0.3 0.00011051 1.02879e-05 0.000116121
0.6 8.19261e-05 1.2984e-05 0.000116121
0.75 7.25023e-05 1.41442e-05 0.000116121
0.9 6.44546e-05 1.52642e-05 0.000116121
1.05 5.65582e-05 1.63732e-05 0.000116121
1.2 5.25615e-05 1.72763e-05 0.000116121
1.35 4.85505e-05 1.81795e-05 0.000116121
1.5 4.45247e-05 1.90825e-05 0.000116121
1.8 3.67938e-05 2.08517e-05 0.000116121
2.4 3.0327e-05 2.34662e-05 0.000116121
3 2.3827e-05 2.60806e-05 0.000116121
3.6 0 4.8641e-05 0.000116121
END DIST

Metal 4 OVER 1
DIST count 12 width 0.3
0.3 0.000108888 1.40879e-05 0.000116121
0.6 7.86515e-05 1.71442e-05 0.000116121
0.75 6.9244e-05 1.8551e-05 0.000116121
0.9 6.15179e-05 1.9903e-05 0.000116121
1.05 5.44817e-05 2.12117e-05 0.000116121
1.2 4.97889e-05 2.23793e-05 0.000116121
1.35 4.5461e-05 2.3509e-05 0.000116121
1.5 4.14298e-05 2.4602e-05 0.000116121
1.8 3.42436e-05 2.6665e-05 0.000116121
2.4 2.63008e-05 2.99587e-05 0.000116121
3 2.01084e-05 3.23104e-05 0.000116121
3.6 0 5.06128e-05 0.000116121
END DIST

Metal 4 OVER 2
DIST count 12 width 0.3
0.3 0.000106929 1.84859e-05 0.000116121
0.6 7.67853e-05 2.24964e-05 0.000116121
0.75 6.72511e-05 2.42941e-05 0.000116121
0.9 5.59439e-05 2.18909e-05 0.000116121
1.05 4.92103e-05 2.87287e-05 0.000116121
1.2 4.7352e-05 2.90482e-05 0.000116121
1.35 4.29778e-05 3.04193e-05 0.000116121
1.5 3.52494e-05 3.32536e-05 0.000116121
1.8 3.17837e-05 3.41439e-05 0.000116121
2.4 2.41485e-05 3.79156e-05 0.000116121
3 1.83098e-05 4.10551e-05 0.000116121
3.6 0 5.85199e-05 0.000116121
END DIST

Metal 4 OVER 3
DIST count 12 width 0.3
0.3 0.000101626 3.55967e-05 0.000116121
0.6 7.20546e-05 4.17895e-05 0.000116121
0.75 6.25851e-05 4.44171e-05 0.000116121
0.9 5.47541e-05 4.68079e-05 0.000116121
1.05 4.76904e-05 4.89994e-05 0.000116121
1.2 4.30846e-05 5.09142e-05 0.000116121
1.35 3.89003e-05 5.26734e-05 0.000116121
1.5 3.50556e-05 5.42936e-05 0.000116121
1.8 2.83309e-05 5.71551e-05 0.000116121
2.4 2.15063e-05 6.1298e-05 0.000116121
3 1.63169e-05 6.44075e-05 0.000116121
3.6 0 8.01409e-05 0.000116121
END DIST

Metal 4 UNDER
WIDTH Table 1 entries:  0.3

Metal 4 UNDER 5
DIST count 12 width 0.3
0.3 0.000101209 4.12679e-05 0.000116121
0.6 7.1056e-05 4.97449e-05 0.000116121
0.75 6.09797e-05 5.31621e-05 0.000116121
0.9 5.26322e-05 5.6164e-05 0.000116121
1.05 4.51725e-05 5.88209e-05 0.000116121
1.2 4.02705e-05 6.10831e-05 0.000116121
1.35 3.58892e-05 6.30945e-05 0.000116121
1.5 3.19289e-05 6.489e-05 0.000116121
1.8 2.51489e-05 6.79318e-05 0.000116121
2.4 1.85595e-05 7.20386e-05 0.000116121
3 1.37508e-05 7.4902e-05 0.000116121
3.6 0 8.81389e-05 0.000116121
END DIST

Metal 4 UNDER 6
DIST count 12 width 0.3
0.3 0.000106735 1.33243e-05 0.000116121
0.6 7.80598e-05 1.86359e-05 0.000116121
0.75 6.81915e-05 2.05792e-05 0.000116121
0.9 5.65938e-05 2.11984e-05 0.000116121
1.05 4.93233e-05 2.28607e-05 0.000116121
1.2 4.72428e-05 2.5668e-05 0.000116121
1.35 3.82161e-05 2.58422e-05 0.000116121
1.5 3.8253e-05 2.85132e-05 0.000116121
1.8 2.62728e-05 2.96684e-05 0.000116121
2.4 2.25213e-05 3.50434e-05 0.000116121
3 1.64711e-05 3.83182e-05 0.000116121
3.6 0 4.71362e-05 0.000116121
END DIST

Metal 4 DIAGUNDER
WIDTH Table 1 entries:  0.3

Metal 4 DIAGUNDER 5
DIST count 13 width 0.3
0 0 5.67618e-05 0.000116121
0.3 0 4.24587e-05 0.000116121
0.6 0 3.5862e-05 0.000116121
0.75 0 3.29409e-05 0.000116121
0.9 0 3.04796e-05 0.000116121
1.05 0 2.83907e-05 0.000116121
1.2 0 2.66045e-05 0.000116121
1.35 0 2.50645e-05 0.000116121
1.5 0 2.37192e-05 0.000116121
1.8 0 1.9851e-05 0.000116121
2.4 0 1.44978e-05 0.000116121
3 0 1.20519e-05 0.000116121
3.6 0 9.88667e-06 0.000116121
END DIST

Metal 4 DIAGUNDER 6
DIST count 13 width 0.3
0 0 2.76036e-05 0.000116121
0.3 0 2.38454e-05 0.000116121
0.6 0 2.21847e-05 0.000116121
0.75 0 2.14482e-05 0.000116121
0.9 0 2.07422e-05 0.000116121
1.05 0 2.00649e-05 0.000116121
1.2 0 1.94154e-05 0.000116121
1.35 0 1.8792e-05 0.000116121
1.5 0 1.81936e-05 0.000116121
1.8 0 1.70678e-05 0.000116121
2.4 0 1.50707e-05 0.000116121
3 0 1.33674e-05 0.000116121
3.6 0 1.13075e-05 0.000116121
END DIST

Metal 4 OVERUNDER
WIDTH Table 1 entries:  0.3

Metal 4 OVER 1 UNDER 5
DIST count 12 width 0.3
0.3 0.000100211 4.39237e-05 0.000116121
0.6 6.89348e-05 5.33325e-05 0.000116121
0.75 5.86874e-05 5.70379e-05 0.000116121
0.9 5.03754e-05 6.02512e-05 0.000116121
1.05 4.32674e-05 6.3068e-05 0.000116121
1.2 3.80021e-05 6.54953e-05 0.000116121
1.35 3.3473e-05 6.76328e-05 0.000116121
1.5 2.95373e-05 6.95213e-05 0.000116121
1.8 2.31134e-05 7.26778e-05 0.000116121
2.4 1.60175e-05 7.70123e-05 0.000116121
3 1.15289e-05 7.96356e-05 0.000116121
3.6 0 9.0415e-05 0.000116121
END DIST

Metal 4 OVER 1 UNDER 6
DIST count 12 width 0.3
0.3 0.000105465 1.56169e-05 0.000116121
0.6 7.34848e-05 2.06358e-05 0.000116121
0.75 6.59455e-05 2.4579e-05 0.000116121
0.9 5.40959e-05 2.47493e-05 0.000116121
1.05 4.67184e-05 2.66209e-05 0.000116121
1.2 4.49303e-05 3.02538e-05 0.000116121
1.35 3.50247e-05 2.9976e-05 0.000116121
1.5 3.57323e-05 3.34423e-05 0.000116121
1.8 2.84654e-05 3.62319e-05 0.000116121
2.4 1.97197e-05 4.06309e-05 0.000116121
3 7.0665e-06 3.29512e-05 0.000116121
3.6 0 5.68256e-05 0.000116121
END DIST

Metal 4 OVER 2 UNDER 5
DIST count 12 width 0.3
0.3 9.86769e-05 4.83524e-05 0.000116121
0.6 6.43751e-05 5.63417e-05 0.000116121
0.75 5.37156e-05 6.00864e-05 0.000116121
0.9 4.81446e-05 6.65093e-05 0.000116121
1.05 4.09683e-05 6.95559e-05 0.000116121
1.2 3.27021e-05 7.34572e-05 0.000116121
1.35 2.81458e-05 7.58009e-05 0.000116121
1.5 2.73589e-05 7.64051e-05 0.000116121
1.8 2.11236e-05 7.96781e-05 0.000116121
2.4 1.17356e-05 8.57508e-05 0.000116121
3 1.03267e-05 8.69461e-05 0.000116121
3.6 0 9.69922e-05 0.000116121
END DIST

Metal 4 OVER 2 UNDER 6
DIST count 12 width 0.3
0.3 0.000104655 2.04617e-05 0.000116121
0.6 7.0691e-05 2.43333e-05 0.000116121
0.75 6.39119e-05 3.01423e-05 0.000116121
0.9 5.05081e-05 2.85857e-05 0.000116121
1.05 4.28765e-05 3.5071e-05 0.000116121
1.2 4.25235e-05 3.67388e-05 0.000116121
1.35 3.14752e-05 3.91681e-05 0.000116121
1.5 3.33463e-05 4.03147e-05 0.000116121
1.8 2.6208e-05 4.33704e-05 0.000116121
2.4 1.78765e-05 4.80498e-05 0.000116121
3 7.41515e-06 5.2507e-05 0.000116121
3.6 0 6.36853e-05 0.000116121
END DIST

Metal 4 OVER 3 UNDER 5
DIST count 12 width 0.3
0.3 9.3614e-05 6.52119e-05 0.000116121
0.6 6.22418e-05 7.82843e-05 0.000116121
0.75 5.18845e-05 8.31452e-05 0.000116121
0.9 4.3617e-05 8.71976e-05 0.000116121
1.05 3.67056e-05 9.06055e-05 0.000116121
1.2 3.17585e-05 9.34395e-05 0.000116121
1.35 2.76006e-05 9.58474e-05 0.000116121
1.5 2.40592e-05 9.7906e-05 0.000116121
1.8 1.84185e-05 0.000101202 0.000116121
2.4 1.2666e-05 0.000105414 0.000116121
3 9.10825e-06 0.000108008 0.000116121
3.6 0 0.000116951 0.000116121
END DIST

Metal 4 OVER 3 UNDER 6
DIST count 12 width 0.3
0.3 9.96634e-05 3.74054e-05 0.000116121
0.6 6.76414e-05 4.58695e-05 0.000116121
0.75 5.92122e-05 5.03285e-05 0.000116121
0.9 4.83733e-05 5.2384e-05 0.000116121
1.05 4.11575e-05 5.51101e-05 0.000116121
1.2 3.8372e-05 5.85575e-05 0.000116121
1.35 3.04112e-05 5.96677e-05 0.000116121
1.5 2.97104e-05 6.26593e-05 0.000116121
1.8 2.30955e-05 6.59715e-05 0.000116121
2.4 1.56832e-05 7.06933e-05 0.000116121
3 7.60821e-06 7.26156e-05 0.000116121
3.6 0 8.46603e-05 0.000116121
END DIST

Metal 5 RESOVER
WIDTH Table 1 entries:  0.3

Metal 5 RESOVER 0
DIST count 55 width 0.3
0 0 0 0.000232242
0 0.62 0 0.000232242
0 0.92 0 0.000232242
0 1.39 0 0.000232242
0 1.54 0 0.000232242
0 1.84 0 0.000232242
0 2.31 0 0.000232242
0 2.46 0 0.000232242
0 2.76 0 0.000232242
0 3.68 0 0.000232242
0.62 0.62 0 0.000232242
0.62 0.92 0 0.000232242
0.62 1.39 0 0.000232242
0.62 1.54 0 0.000232242
0.62 1.84 0 0.000232242
0.62 2.31 0 0.000232242
0.62 2.46 0 0.000232242
0.62 2.76 0 0.000232242
0.62 3.68 0 0.000232242
0.92 0.92 0 0.000232242
0.92 1.39 0 0.000232242
0.92 1.54 0 0.000232242
0.92 1.84 0 0.000232242
0.92 2.31 0 0.000232242
0.92 2.46 0 0.000232242
0.92 2.76 0 0.000232242
0.92 3.68 0 0.000232242
1.39 1.39 0 0.000232242
1.39 1.54 0 0.000232242
1.39 1.84 0 0.000232242
1.39 2.31 0 0.000232242
1.39 2.46 0 0.000232242
1.39 2.76 0 0.000232242
1.39 3.68 0 0.000232242
1.54 1.54 0 0.000232242
1.54 1.84 0 0.000232242
1.54 2.31 0 0.000232242
1.54 2.46 0 0.000232242
1.54 2.76 0 0.000232242
1.54 3.68 0 0.000232242
1.84 1.84 0 0.000232242
1.84 2.31 0 0.000232242
1.84 2.46 0 0.000232242
1.84 2.76 0 0.000232242
1.84 3.68 0 0.000232242
2.31 2.31 0 0.000232242
2.31 2.46 0 0.000232242
2.31 2.76 0 0.000232242
2.31 3.68 0 0.000232242
2.46 2.46 0 0.000232242
2.46 2.76 0 0.000232242
2.46 3.68 0 0.000232242
2.76 2.76 0 0.000232242
2.76 3.68 0 0.000232242
3.68 0 3.68 0.000232242
END DIST

Metal 5 RESOVER 1
DIST count 0 width 0.3
END DIST

Metal 5 RESOVER 2
DIST count 0 width 0.3
END DIST

Metal 5 RESOVER 3
DIST count 0 width 0.3
END DIST

Metal 5 RESOVER 4
DIST count 0 width 0.3
END DIST

Metal 5 OVER
WIDTH Table 1 entries:  0.3

Metal 5 OVER 0
DIST count 12 width 0.3
0.3 0.000109265 8.73705e-06 0.000116121
0.6 8.31978e-05 1.07388e-05 0.000116121
0.75 7.47551e-05 1.15548e-05 0.000116121
0.9 6.69664e-05 1.23511e-05 0.000116121
1.05 5.98394e-05 1.31171e-05 0.000116121
1.2 5.59151e-05 1.37488e-05 0.000116121
1.35 5.19727e-05 1.43805e-05 0.000116121
1.5 4.80121e-05 1.50122e-05 0.000116121
1.8 4.07061e-05 1.62356e-05 0.000116121
2.4 3.41693e-05 1.8196e-05 0.000116121
3 2.75844e-05 2.01564e-05 0.000116121
3.6 0 4.61218e-05 0.000116121
END DIST

Metal 5 OVER 1
DIST count 12 width 0.3
0.3 0.000108925 1.14109e-05 0.000116121
0.6 8.1156e-05 1.33373e-05 0.000116121
0.75 7.25996e-05 1.42182e-05 0.000116121
0.9 6.5216e-05 1.50819e-05 0.000116121
1.05 5.8728e-05 1.59193e-05 0.000116121
1.2 5.42689e-05 1.66763e-05 0.000116121
1.35 5.01762e-05 1.74193e-05 0.000116121
1.5 4.63301e-05 1.81478e-05 0.000116121
1.8 3.95127e-05 1.95412e-05 0.000116121
2.4 3.15195e-05 2.12276e-05 0.000116121
3 2.32542e-05 1.65458e-05 0.000116121
3.6 0 4.55753e-05 0.000116121
END DIST

Metal 5 OVER 2
DIST count 12 width 0.3
0.3 0.000107931 1.06276e-05 0.000116121
0.6 7.89183e-05 1.21072e-05 0.000116121
0.75 7.19584e-05 1.59853e-05 0.000116121
0.9 6.2849e-05 1.35213e-05 0.000116121
1.05 5.66737e-05 1.81287e-05 0.000116121
1.2 5.34521e-05 1.87284e-05 0.000116121
1.35 4.75257e-05 1.99342e-05 0.000116121
1.5 4.36473e-05 2.07958e-05 0.000116121
1.8 3.84735e-05 2.19089e-05 0.000116121
2.4 2.79092e-05 2.53136e-05 0.000116121
3 2.38888e-05 2.69006e-05 0.000116121
3.6 0 4.89306e-05 0.000116121
END DIST

Metal 5 OVER 3
DIST count 12 width 0.3
0.3 0.000106719 1.21189e-05 0.000116121
0.6 7.75913e-05 1.40096e-05 0.000116121
0.75 7.1042e-05 1.80606e-05 0.000116121
0.9 6.34787e-05 1.91806e-05 0.000116121
1.05 5.5037e-05 2.10922e-05 0.000116121
1.2 5.00348e-05 2.22059e-05 0.000116121
1.35 4.81176e-05 2.21823e-05 0.000116121
1.5 4.1618e-05 2.43066e-05 0.000116121
1.8 3.71715e-05 2.48359e-05 0.000116121
2.4 2.57652e-05 2.95909e-05 0.000116121
3 2.26876e-05 3.03256e-05 0.000116121
3.6 0 5.14271e-05 0.000116121
END DIST

Metal 5 OVER 4
DIST count 12 width 0.3
0.3 9.96362e-05 3.76065e-05 0.000116121
0.6 7.24824e-05 4.35473e-05 0.000116121
0.75 6.38281e-05 4.60546e-05 0.000116121
0.9 5.63424e-05 4.83366e-05 0.000116121
1.05 4.97968e-05 5.04096e-05 0.000116121
1.2 4.53075e-05 5.22412e-05 0.000116121
1.35 4.11988e-05 5.39165e-05 0.000116121
1.5 3.74e-05 5.54513e-05 0.000116121
1.8 3.08578e-05 5.81355e-05 0.000116121
2.4 2.385e-05 6.21183e-05 0.000116121
3 1.84578e-05 6.50337e-05 0.000116121
3.6 0 8.27106e-05 0.000116121
END DIST

Metal 5 UNDER
WIDTH Table 1 entries:  0.3

Metal 5 UNDER 6
DIST count 12 width 0.3
0.3 0.000101409 2.72811e-05 0.000116121
0.6 7.3252e-05 3.40203e-05 0.000116121
0.75 6.38523e-05 3.68041e-05 0.000116121
0.9 5.57354e-05 3.93003e-05 0.000116121
1.05 4.86853e-05 4.1536e-05 0.000116121
1.2 4.3802e-05 4.34884e-05 0.000116121
1.35 3.94007e-05 4.52499e-05 0.000116121
1.5 3.53934e-05 4.68427e-05 0.000116121
1.8 2.86254e-05 4.95793e-05 0.000116121
2.4 2.15962e-05 5.35155e-05 0.000116121
3 1.64212e-05 5.63002e-05 0.000116121
3.6 0 7.20468e-05 0.000116121
END DIST

Metal 5 DIAGUNDER
WIDTH Table 1 entries:  0.3

Metal 5 DIAGUNDER 6
DIST count 13 width 0.3
0 0 6.55417e-05 0.000116121
0.3 0 4.79432e-05 0.000116121
0.6 0 4.06918e-05 0.000116121
0.75 0 3.81295e-05 0.000116121
0.9 0 3.57935e-05 0.000116121
1.05 0 3.36608e-05 0.000116121
1.2 0 3.17101e-05 0.000116121
1.35 0 2.9923e-05 0.000116121
1.5 0 2.82828e-05 0.000116121
1.8 0 2.53869e-05 0.000116121
2.4 0 2.08146e-05 0.000116121
3 0 1.74223e-05 0.000116121
3.6 0 1.41145e-05 0.000116121
END DIST

Metal 5 OVERUNDER
WIDTH Table 1 entries:  0.3

Metal 5 OVER 1 UNDER 6
DIST count 12 width 0.3
0.3 0.000101377 2.91595e-05 0.000116121
0.6 7.21041e-05 3.60517e-05 0.000116121
0.75 6.25667e-05 3.89288e-05 0.000116121
0.9 5.45869e-05 4.15038e-05 0.000116121
1.05 4.78091e-05 4.38078e-05 0.000116121
1.2 4.26309e-05 4.58451e-05 0.000116121
1.35 3.8139e-05 4.76762e-05 0.000116121
1.5 3.41835e-05 4.93249e-05 0.000116121
1.8 2.76693e-05 5.21478e-05 0.000116121
2.4 1.99751e-05 5.59196e-05 0.000116121
3 1.4893e-05 5.83766e-05 0.000116121
3.6 0 7.24029e-05 0.000116121
END DIST

Metal 5 OVER 2 UNDER 6
DIST count 12 width 0.3
0.3 0.000100953 3.04289e-05 0.000116121
0.6 7.06057e-05 3.55231e-05 0.000116121
0.75 6.07488e-05 3.82822e-05 0.000116121
0.9 5.38959e-05 4.33167e-05 0.000116121
1.05 4.59596e-05 4.60557e-05 0.000116121
1.2 4.18288e-05 4.78152e-05 0.000116121
1.35 3.59012e-05 5.01466e-05 0.000116121
1.5 3.33049e-05 5.14047e-05 0.000116121
1.8 2.67725e-05 5.43043e-05 0.000116121
2.4 1.91119e-05 5.8514e-05 0.000116121
3 1.41227e-05 6.14157e-05 0.000116121
3.6 0 7.47714e-05 0.000116121
END DIST

Metal 5 OVER 3 UNDER 6
DIST count 12 width 0.3
0.3 9.9815e-05 3.02466e-05 0.000116121
0.6 7.0956e-05 3.95845e-05 0.000116121
0.75 5.93162e-05 4.03842e-05 0.000116121
0.9 5.10608e-05 4.29733e-05 0.000116121
1.05 4.60294e-05 4.80955e-05 0.000116121
1.2 3.8754e-05 5.13007e-05 0.000116121
1.35 3.61811e-05 5.22681e-05 0.000116121
1.5 3.0071e-05 5.5181e-05 0.000116121
1.8 2.56646e-05 5.70204e-05 0.000116121
2.4 1.58407e-05 6.27673e-05 0.000116121
3 1.32925e-05 6.42663e-05 0.000116121
3.6 0 7.69409e-05 0.000116121
END DIST

Metal 5 OVER 4 UNDER 6
DIST count 12 width 0.3
0.3 9.30292e-05 5.43429e-05 0.000116121
0.6 6.36471e-05 6.61165e-05 0.000116121
0.75 5.3799e-05 7.06012e-05 0.000116121
0.9 4.57298e-05 7.43922e-05 0.000116121
1.05 3.90537e-05 7.76098e-05 0.000116121
1.2 3.41031e-05 8.03274e-05 0.000116121
1.35 2.99069e-05 8.26586e-05 0.000116121
1.5 2.63056e-05 8.46686e-05 0.000116121
1.8 2.0588e-05 8.79177e-05 0.000116121
2.4 1.44388e-05 9.2225e-05 0.000116121
3 1.05786e-05 9.49006e-05 0.000116121
3.6 0 0.00010521 0.000116121
END DIST

Metal 6 RESOVER
WIDTH Table 1 entries:  1.6

Metal 6 RESOVER 0
DIST count 55 width 1.6
0 0 0 2.41625e-05
0 1.8 0 2.41625e-05
0 3.4 0 2.41625e-05
0 4.4 0 2.41625e-05
0 5.2 0 2.41625e-05
0 6.8 0 2.41625e-05
0 7.8 0 2.41625e-05
0 8.6 0 2.41625e-05
0 10.2 0 2.41625e-05
0 13.6 0 2.41625e-05
1.8 1.8 0 2.41625e-05
1.8 3.4 0 2.41625e-05
1.8 4.4 0 2.41625e-05
1.8 5.2 0 2.41625e-05
1.8 6.8 0 2.41625e-05
1.8 7.8 0 2.41625e-05
1.8 8.6 0 2.41625e-05
1.8 10.2 0 2.41625e-05
1.8 13.6 0 2.41625e-05
3.4 3.4 0 2.41625e-05
3.4 4.4 0 2.41625e-05
3.4 5.2 0 2.41625e-05
3.4 6.8 0 2.41625e-05
3.4 7.8 0 2.41625e-05
3.4 8.6 0 2.41625e-05
3.4 10.2 0 2.41625e-05
3.4 13.6 0 2.41625e-05
4.4 4.4 0 2.41625e-05
4.4 5.2 0 2.41625e-05
4.4 6.8 0 2.41625e-05
4.4 7.8 0 2.41625e-05
4.4 8.6 0 2.41625e-05
4.4 10.2 0 2.41625e-05
4.4 13.6 0 2.41625e-05
5.2 5.2 0 2.41625e-05
5.2 6.8 0 2.41625e-05
5.2 7.8 0 2.41625e-05
5.2 8.6 0 2.41625e-05
5.2 10.2 0 2.41625e-05
5.2 13.6 0 2.41625e-05
6.8 6.8 0 2.41625e-05
6.8 7.8 0 2.41625e-05
6.8 8.6 0 2.41625e-05
6.8 10.2 0 2.41625e-05
6.8 13.6 0 2.41625e-05
7.8 7.8 0 2.41625e-05
7.8 8.6 0 2.41625e-05
7.8 10.2 0 2.41625e-05
7.8 13.6 0 2.41625e-05
8.6 8.6 0 2.41625e-05
8.6 10.2 0 2.41625e-05
8.6 13.6 0 2.41625e-05
10.2 10.2 0 2.41625e-05
10.2 13.6 0 2.41625e-05
13.6 0 13.6 2.41625e-05
END DIST

Metal 6 RESOVER 1
DIST count 0 width 1.6
END DIST

Metal 6 RESOVER 2
DIST count 0 width 1.6
END DIST

Metal 6 RESOVER 3
DIST count 0 width 1.6
END DIST

Metal 6 RESOVER 4
DIST count 0 width 1.6
END DIST

Metal 6 RESOVER 5
DIST count 0 width 1.6
END DIST

Metal 6 OVER
WIDTH Table 1 entries:  1.6

Metal 6 OVER 0
DIST count 12 width 1.6
1.6 8.24063e-05 1.68124e-05 1.20812e-05
3.2 4.32612e-05 2.19213e-05 1.20812e-05
4 3.52331e-05 2.41321e-05 1.20812e-05
4.8 2.98512e-05 2.61415e-05 1.20812e-05
5.6 2.59284e-05 2.79677e-05 1.20812e-05
6.4 2.29783e-05 2.96278e-05 1.20812e-05
7.2 2.06782e-05 3.11367e-05 1.20812e-05
8 1.88342e-05 3.25083e-05 1.20812e-05
9.6 1.60207e-05 3.48888e-05 1.20812e-05
12.8 1.24832e-05 3.84828e-05 1.20812e-05
16 1.03594e-05 4.09406e-05 1.20812e-05
19.2 0 5.15432e-05 1.20812e-05
END DIST

Metal 6 OVER 1
DIST count 12 width 1.6
1.6 7.76851e-05 1.70356e-05 1.20812e-05
3.2 4.0735e-05 2.06128e-05 1.20812e-05
4 3.31143e-05 2.19899e-05 1.20812e-05
4.8 2.71738e-05 2.3217e-05 1.20812e-05
5.6 2.34174e-05 2.43105e-05 1.20812e-05
6.4 2.02682e-05 3.60981e-05 1.20812e-05
7.2 1.77935e-05 3.76735e-05 1.20812e-05
8 1.63966e-05 3.90903e-05 1.20812e-05
9.6 1.33699e-05 4.15105e-05 1.20812e-05
12.8 9.54732e-06 4.50562e-05 1.20812e-05
16 7.25876e-06 4.7386e-05 1.20812e-05
19.2 0 5.46719e-05 1.20812e-05
END DIST

Metal 6 OVER 2
DIST count 12 width 1.6
1.6 7.62925e-05 2.77346e-05 1.20812e-05
3.2 3.96046e-05 3.4323e-05 1.20812e-05
4 3.16059e-05 3.70761e-05 1.20812e-05
4.8 2.6104e-05 3.95101e-05 1.20812e-05
5.6 2.20178e-05 4.16625e-05 1.20812e-05
6.4 1.9255e-05 4.1793e-05 1.20812e-05
7.2 1.78955e-05 4.34142e-05 1.20812e-05
8 1.63751e-05 4.4861e-05 1.20812e-05
9.6 1.1892e-05 4.7307e-05 1.20812e-05
12.8 9.40238e-06 5.08207e-05 1.20812e-05
16 6.40335e-06 5.30736e-05 1.20812e-05
19.2 0 5.90731e-05 1.20812e-05
END DIST

Metal 6 OVER 3
DIST count 12 width 1.6
1.6 7.5138e-05 3.25987e-05 1.20812e-05
3.2 3.7944e-05 4.01805e-05 1.20812e-05
4 2.96051e-05 4.32341e-05 1.20812e-05
4.8 2.56903e-05 4.3079e-05 1.20812e-05
5.6 2.05768e-05 4.82157e-05 1.20812e-05
6.4 1.82266e-05 4.70769e-05 1.20812e-05
7.2 1.65993e-05 5.0369e-05 1.20812e-05
8 1.48582e-05 5.02032e-05 1.20812e-05
9.6 1.16036e-05 5.26546e-05 1.20812e-05
12.8 8.97018e-06 5.61015e-05 1.20812e-05
16 5.46192e-06 5.82569e-05 1.20812e-05
19.2 0 6.46597e-05 1.20812e-05
END DIST

Metal 6 OVER 4
DIST count 12 width 1.6
1.6 6.92796e-05 3.97258e-05 1.20812e-05
3.2 3.22e-05 4.94166e-05 1.20812e-05
4 2.4737e-05 5.31275e-05 1.20812e-05
4.8 2.25834e-05 5.19645e-05 1.20812e-05
5.6 1.60415e-05 5.88178e-05 1.20812e-05
6.4 1.60017e-05 5.62025e-05 1.20812e-05
7.2 1.21823e-05 6.27653e-05 1.20812e-05
8 1.11566e-05 5.92688e-05 1.20812e-05
9.6 9.96586e-06 6.15802e-05 1.20812e-05
12.8 5.81278e-06 6.46152e-05 1.20812e-05
16 4.30955e-06 6.63933e-05 1.20812e-05
19.2 0 7.19084e-05 1.20812e-05
END DIST

Metal 6 OVER 5
DIST count 12 width 1.6
1.6 5.92076e-05 0.000118438 1.20812e-05
3.2 3.17629e-05 0.000126394 1.20812e-05
4 2.49505e-05 0.000129998 1.20812e-05
4.8 2.05074e-05 0.000132765 1.20812e-05
5.6 1.73527e-05 0.000134922 1.20812e-05
6.4 1.50302e-05 0.00013663 1.20812e-05
7.2 1.32563e-05 0.000138005 1.20812e-05
8 1.18621e-05 0.000139129 1.20812e-05
9.6 9.80092e-06 0.000140848 1.20812e-05
12.8 7.3349e-06 0.000143048 1.20812e-05
16 5.93284e-06 0.000144389 1.20812e-05
19.2 0 0.000150292 1.20812e-05
END DIST

Metal 6 UNDER
WIDTH Table 0 entries: 

Metal 6 DIAGUNDER
WIDTH Table 0 entries: 
END DensityModel 0