gf180mcu/openlane/rules.openrcx.gf180mcuD.min

Extraction Rules for OpenRCX

DIAGMODEL ON

LayerCount 5
DensityRate 1  0

DensityModel 0

Metal 1 RESOVER
WIDTH Table 1 entries:  0.23

Metal 1 RESOVER 0
DIST count 55 width 0.23
0 0 0 0.000274687
0 0.33 0 0.000274687
0 0.56 0 0.000274687
0 0.775 0 0.000274687
0 0.89 0 0.000274687
0 1.12 0 0.000274687
0 1.335 0 0.000274687
0 1.45 0 0.000274687
0 1.68 0 0.000274687
0 2.24 0 0.000274687
0.33 0.33 0 0.000274687
0.33 0.56 0 0.000274687
0.33 0.775 0 0.000274687
0.33 0.89 0 0.000274687
0.33 1.12 0 0.000274687
0.33 1.335 0 0.000274687
0.33 1.45 0 0.000274687
0.33 1.68 0 0.000274687
0.33 2.24 0 0.000274687
0.56 0.56 0 0.000274687
0.56 0.775 0 0.000274687
0.56 0.89 0 0.000274687
0.56 1.12 0 0.000274687
0.56 1.335 0 0.000274687
0.56 1.45 0 0.000274687
0.56 1.68 0 0.000274687
0.56 2.24 0 0.000274687
0.775 0.775 0 0.000274687
0.775 0.89 0 0.000274687
0.775 1.12 0 0.000274687
0.775 1.335 0 0.000274687
0.775 1.45 0 0.000274687
0.775 1.68 0 0.000274687
0.775 2.24 0 0.000274687
0.89 0.89 0 0.000274687
0.89 1.12 0 0.000274687
0.89 1.335 0 0.000274687
0.89 1.45 0 0.000274687
0.89 1.68 0 0.000274687
0.89 2.24 0 0.000274687
1.12 1.12 0 0.000274687
1.12 1.335 0 0.000274687
1.12 1.45 0 0.000274687
1.12 1.68 0 0.000274687
1.12 2.24 0 0.000274687
1.335 1.335 0 0.000274687
1.335 1.45 0 0.000274687
1.335 1.68 0 0.000274687
1.335 2.24 0 0.000274687
1.45 1.45 0 0.000274687
1.45 1.68 0 0.000274687
1.45 2.24 0 0.000274687
1.68 1.68 0 0.000274687
1.68 2.24 0 0.000274687
2.24 0 2.24 0.000274687
END DIST

Metal 1 OVER
WIDTH Table 1 entries:  0.23

Metal 1 OVER 0
DIST count 12 width 0.23
0.23 0.00011688 2.21857e-07 0.000137344
0.46 7.25181e-05 5.99298e-06 0.000137344
0.575 6.13539e-05 8.354e-06 0.000137344
0.69 5.34358e-05 1.04353e-05 0.000137344
0.805 4.71461e-05 1.24234e-05 0.000137344
0.92 4.25655e-05 1.41577e-05 0.000137344
1.035 3.82364e-05 1.60387e-05 0.000137344
1.15 3.48017e-05 1.76181e-05 0.000137344
1.38 2.7318e-05 2.25767e-05 0.000137344
1.84 2.09649e-05 2.66073e-05 0.000137344
2.3 1.63099e-05 2.95748e-05 0.000137344
2.76 0 4.46033e-05 0.000137344
END DIST

Metal 1 UNDER
WIDTH Table 1 entries:  0.23

Metal 1 UNDER 2
DIST count 12 width 0.23
0.23 0.000103043 1.34712e-05 0.000137344
0.46 5.77897e-05 2.43265e-05 0.000137344
0.575 4.34116e-05 3.08566e-05 0.000137344
0.69 3.57227e-05 3.4142e-05 0.000137344
0.805 2.95138e-05 3.76059e-05 0.000137344
0.92 2.52244e-05 4.07301e-05 0.000137344
1.035 2.11173e-05 4.38195e-05 0.000137344
1.15 1.80047e-05 4.61607e-05 0.000137344
1.38 1.36999e-05 4.9492e-05 0.000137344
1.84 8.92938e-06 5.42682e-05 0.000137344
2.3 5.4632e-06 5.77388e-05 0.000137344
2.76 0 6.32051e-05 0.000137344
END DIST

Metal 1 UNDER 3
DIST count 12 width 0.23
0.23 0.00011159 5.58395e-06 0.000137344
0.46 6.66426e-05 1.2648e-05 0.000137344
0.575 5.52124e-05 1.59898e-05 0.000137344
0.69 4.70843e-05 1.87134e-05 0.000137344
0.805 3.84115e-05 2.35689e-05 0.000137344
0.92 3.38852e-05 2.56451e-05 0.000137344
1.035 2.95082e-05 2.809e-05 0.000137344
1.15 2.61164e-05 3.00175e-05 0.000137344
1.38 2.13181e-05 3.28805e-05 0.000137344
1.84 1.39383e-05 3.91637e-05 0.000137344
2.3 9.52978e-06 4.27753e-05 0.000137344
2.76 0 5.16998e-05 0.000137344
END DIST

Metal 1 UNDER 4
DIST count 12 width 0.23
0.23 0.000113902 3.39867e-06 0.000137344
0.46 6.91758e-05 9.86193e-06 0.000137344
0.575 5.78477e-05 1.28367e-05 0.000137344
0.69 5.02065e-05 1.6175e-05 0.000137344
0.805 4.37274e-05 1.83085e-05 0.000137344
0.92 3.89464e-05 2.06849e-05 0.000137344
1.035 3.22904e-05 2.48903e-05 0.000137344
1.15 2.8911e-05 2.68427e-05 0.000137344
1.38 2.38267e-05 2.92613e-05 0.000137344
1.84 1.72745e-05 3.35615e-05 0.000137344
2.3 1.25069e-05 3.7171e-05 0.000137344
2.76 0 4.87984e-05 0.000137344
END DIST

Metal 1 UNDER 5
DIST count 12 width 0.23
0.23 0.000114995 2.38556e-06 0.000137344
0.46 7.0389e-05 8.57693e-06 0.000137344
0.575 5.91123e-05 1.14004e-05 0.000137344
0.69 5.18395e-05 1.48189e-05 0.000137344
0.805 4.54072e-05 1.6872e-05 0.000137344
0.92 4.08889e-05 1.9555e-05 0.000137344
1.035 3.62865e-05 2.09454e-05 0.000137344
1.15 3.25152e-05 2.24704e-05 0.000137344
1.38 2.51679e-05 2.72897e-05 0.000137344
1.84 1.8558e-05 3.13001e-05 0.000137344
2.3 1.37939e-05 3.472e-05 0.000137344
2.76 0 4.74928e-05 0.000137344
END DIST

Metal 1 DIAGUNDER
WIDTH Table 1 entries:  0.23

Metal 1 DIAGUNDER 2
DIST count 13 width 0.23
0 0 2.18218e-05 0.000137344
0.23 0 1.73791e-05 0.000137344
0.46 0 1.58707e-05 0.000137344
0.575 0 1.51804e-05 0.000137344
0.69 0 1.45884e-05 0.000137344
0.805 0 1.39134e-05 0.000137344
0.92 0 1.31961e-05 0.000137344
1.035 0 1.23969e-05 0.000137344
1.15 0 1.17037e-05 0.000137344
1.38 0 1.05608e-05 0.000137344
1.84 0 8.69095e-06 0.000137344
2.3 0 7.12525e-06 0.000137344
2.76 0 6.0103e-06 0.000137344
END DIST

Metal 1 DIAGUNDER 3
DIST count 13 width 0.23
0 0 1.08904e-05 0.000137344
0.23 0 8.48584e-06 0.000137344
0.46 0 8.44365e-06 0.000137344
0.575 0 8.3675e-06 0.000137344
0.69 0 8.29429e-06 0.000137344
0.805 0 8.16908e-06 0.000137344
0.92 0 8.00674e-06 0.000137344
1.035 0 7.77773e-06 0.000137344
1.15 0 7.57896e-06 0.000137344
1.38 0 7.25103e-06 0.000137344
1.84 0 6.58961e-06 0.000137344
2.3 0 5.82178e-06 0.000137344
2.76 0 5.24128e-06 0.000137344
END DIST

Metal 1 DIAGUNDER 4
DIST count 13 width 0.23
0 0 7.39563e-06 0.000137344
0.23 0 5.53849e-06 0.000137344
0.46 0 5.62141e-06 0.000137344
0.575 0 5.61364e-06 0.000137344
0.69 0 5.60068e-06 0.000137344
0.805 0 5.56906e-06 0.000137344
0.92 0 5.52253e-06 0.000137344
1.035 0 5.44556e-06 0.000137344
1.15 0 5.37872e-06 0.000137344
1.38 0 5.26834e-06 0.000137344
1.84 0 5.01076e-06 0.000137344
2.3 0 4.64427e-06 0.000137344
2.76 0 4.35531e-06 0.000137344
END DIST

Metal 1 DIAGUNDER 5
DIST count 13 width 0.23
0 0 5.96091e-06 0.000137344
0.23 0 4.52231e-06 0.000137344
0.46 0 4.5805e-06 0.000137344
0.575 0 4.58575e-06 0.000137344
0.69 0 4.59231e-06 0.000137344
0.805 0 4.59262e-06 0.000137344
0.92 0 4.57378e-06 0.000137344
1.035 0 4.55722e-06 0.000137344
1.15 0 4.54258e-06 0.000137344
1.38 0 4.5177e-06 0.000137344
1.84 0 4.35382e-06 0.000137344
2.3 0 4.18841e-06 0.000137344
2.76 0 4.05867e-06 0.000137344
END DIST

Metal 2 RESOVER
WIDTH Table 1 entries:  0.28

Metal 2 RESOVER 0
DIST count 55 width 0.28
0 0 0 0.000225636
0 0.28 0 0.000225636
0 0.56 0 0.000225636
0 0.7 0 0.000225636
0 0.84 0 0.000225636
0 1.12 0 0.000225636
0 1.26 0 0.000225636
0 1.4 0 0.000225636
0 1.68 0 0.000225636
0 2.24 0 0.000225636
0.28 0.28 0 0.000225636
0.28 0.56 0 0.000225636
0.28 0.7 0 0.000225636
0.28 0.84 0 0.000225636
0.28 1.12 0 0.000225636
0.28 1.26 0 0.000225636
0.28 1.4 0 0.000225636
0.28 1.68 0 0.000225636
0.28 2.24 0 0.000225636
0.56 0.56 0 0.000225636
0.56 0.7 0 0.000225636
0.56 0.84 0 0.000225636
0.56 1.12 0 0.000225636
0.56 1.26 0 0.000225636
0.56 1.4 0 0.000225636
0.56 1.68 0 0.000225636
0.56 2.24 0 0.000225636
0.7 0.7 0 0.000225636
0.7 0.84 0 0.000225636
0.7 1.12 0 0.000225636
0.7 1.26 0 0.000225636
0.7 1.4 0 0.000225636
0.7 1.68 0 0.000225636
0.7 2.24 0 0.000225636
0.84 0.84 0 0.000225636
0.84 1.12 0 0.000225636
0.84 1.26 0 0.000225636
0.84 1.4 0 0.000225636
0.84 1.68 0 0.000225636
0.84 2.24 0 0.000225636
1.12 1.12 0 0.000225636
1.12 1.26 0 0.000225636
1.12 1.4 0 0.000225636
1.12 1.68 0 0.000225636
1.12 2.24 0 0.000225636
1.26 1.26 0 0.000225636
1.26 1.4 0 0.000225636
1.26 1.68 0 0.000225636
1.26 2.24 0 0.000225636
1.4 1.4 0 0.000225636
1.4 1.68 0 0.000225636
1.4 2.24 0 0.000225636
1.68 1.68 0 0.000225636
1.68 2.24 0 0.000225636
2.24 0 2.24 0.000225636
END DIST

Metal 2 RESOVER 1
DIST count 0 width 0.28
END DIST

Metal 2 OVER
WIDTH Table 1 entries:  0.28

Metal 2 OVER 0
DIST count 12 width 0.28
0.28 0.000110322 5.41125e-08 0.000112818
0.56 7.07115e-05 8.79246e-07 0.000112818
0.7 6.04673e-05 3.13334e-06 0.000112818
0.84 5.36249e-05 4.72599e-06 0.000112818
0.98 4.77319e-05 6.58605e-06 0.000112818
1.12 4.37675e-05 7.8986e-06 0.000112818
1.26 3.96638e-05 9.61581e-06 0.000112818
1.4 3.6635e-05 1.08393e-05 0.000112818
1.68 2.89176e-05 1.60635e-05 0.000112818
2.24 2.28082e-05 1.95692e-05 0.000112818
2.8 1.83613e-05 2.21256e-05 0.000112818
3.36 0 3.90517e-05 0.000112818
END DIST

Metal 2 OVER 1
DIST count 12 width 0.28
0.28 9.67879e-05 9.7107e-06 0.000112818
0.56 5.68036e-05 1.94817e-05 0.000112818
0.7 4.65508e-05 2.38362e-05 0.000112818
0.84 3.97033e-05 2.76271e-05 0.000112818
0.98 3.15803e-05 3.35974e-05 0.000112818
1.12 2.78416e-05 3.57847e-05 0.000112818
1.26 2.41905e-05 3.94535e-05 0.000112818
1.4 2.14531e-05 4.16971e-05 0.000112818
1.68 1.75512e-05 4.30008e-05 0.000112818
2.24 1.28999e-05 4.86801e-05 0.000112818
2.8 9.52442e-06 5.21233e-05 0.000112818
3.36 0 6.1699e-05 0.000112818
END DIST

Metal 2 UNDER
WIDTH Table 1 entries:  0.28

Metal 2 UNDER 3
DIST count 12 width 0.28
0.28 9.3307e-05 1.28746e-05 0.000112818
0.56 5.2819e-05 2.31719e-05 0.000112818
0.7 4.23284e-05 2.78037e-05 0.000112818
0.84 3.5312e-05 3.18049e-05 0.000112818
0.98 2.78977e-05 3.71203e-05 0.000112818
1.12 2.40493e-05 3.9566e-05 0.000112818
1.26 1.91015e-05 4.45948e-05 0.000112818
1.4 1.63786e-05 4.68718e-05 0.000112818
1.68 1.25997e-05 4.79089e-05 0.000112818
2.24 8.38461e-06 5.33979e-05 0.000112818
2.8 5.32377e-06 5.65529e-05 0.000112818
3.36 0 6.19482e-05 0.000112818
END DIST

Metal 2 UNDER 4
DIST count 12 width 0.28
0.28 0.000103138 3.26657e-06 0.000112818
0.56 6.28113e-05 1.02158e-05 0.000112818
0.7 5.22404e-05 1.3488e-05 0.000112818
0.84 4.51527e-05 1.56763e-05 0.000112818
0.98 3.89919e-05 1.84241e-05 0.000112818
1.12 3.48343e-05 2.06262e-05 0.000112818
1.26 2.8447e-05 2.50594e-05 0.000112818
1.4 2.53965e-05 2.67789e-05 0.000112818
1.68 2.09702e-05 2.97294e-05 0.000112818
2.24 1.4884e-05 3.48537e-05 0.000112818
2.8 9.56507e-06 3.94741e-05 0.000112818
3.36 0 4.8509e-05 0.000112818
END DIST

Metal 2 UNDER 5
DIST count 12 width 0.28
0.28 0.000106477 9.55014e-08 0.000112818
0.56 6.64311e-05 6.17457e-06 0.000112818
0.7 5.59798e-05 8.98115e-06 0.000112818
0.84 4.9321e-05 1.16938e-05 0.000112818
0.98 4.35545e-05 1.43927e-05 0.000112818
1.12 3.90928e-05 1.59015e-05 0.000112818
1.26 3.489e-05 1.7644e-05 0.000112818
1.4 3.15313e-05 1.90753e-05 0.000112818
1.68 2.44247e-05 2.37352e-05 0.000112818
2.24 1.8071e-05 2.84217e-05 0.000112818
2.8 1.34748e-05 3.18074e-05 0.000112818
3.36 0 4.43632e-05 0.000112818
END DIST

Metal 2 DIAGUNDER
WIDTH Table 1 entries:  0.28

Metal 2 DIAGUNDER 3
DIST count 13 width 0.28
0 0 2.474e-05 0.000112818
0.28 0 1.91394e-05 0.000112818
0.56 0 1.7113e-05 0.000112818
0.7 0 1.63015e-05 0.000112818
0.84 0 1.56346e-05 0.000112818
0.98 0 1.47773e-05 0.000112818
1.12 0 1.38275e-05 0.000112818
1.26 0 1.30179e-05 0.000112818
1.4 0 1.23197e-05 0.000112818
1.68 0 1.11763e-05 0.000112818
2.24 0 9.16512e-06 0.000112818
2.8 0 7.63088e-06 0.000112818
3.36 0 6.5912e-06 0.000112818
END DIST

Metal 2 DIAGUNDER 4
DIST count 13 width 0.28
0 0 1.31547e-05 0.000112818
0.28 0 1.00514e-05 0.000112818
0.56 0 9.88851e-06 0.000112818
0.7 0 9.78059e-06 0.000112818
0.84 0 9.69194e-06 0.000112818
0.98 0 9.46935e-06 0.000112818
1.12 0 9.16928e-06 0.000112818
1.26 0 8.91351e-06 0.000112818
1.4 0 8.69289e-06 0.000112818
1.68 0 8.33164e-06 0.000112818
2.24 0 7.40961e-06 0.000112818
2.8 0 6.55882e-06 0.000112818
3.36 0 5.972e-06 0.000112818
END DIST

Metal 2 DIAGUNDER 5
DIST count 13 width 0.28
0 0 1.00617e-05 0.000112818
0.28 0 7.44475e-06 0.000112818
0.56 0 7.51775e-06 0.000112818
0.7 0 7.49832e-06 0.000112818
0.84 0 7.47933e-06 0.000112818
0.98 0 7.42121e-06 0.000112818
1.12 0 7.35298e-06 0.000112818
1.26 0 7.29398e-06 0.000112818
1.4 0 7.24246e-06 0.000112818
1.68 0 7.07455e-06 0.000112818
2.24 0 6.62316e-06 0.000112818
2.8 0 6.23684e-06 0.000112818
3.36 0 5.88564e-06 0.000112818
END DIST

Metal 2 OVERUNDER
WIDTH Table 1 entries:  0.28

Metal 2 OVER 1 UNDER 3
DIST count 12 width 0.28
0.28 8.11396e-05 2.37932e-05 0.000112818
0.56 4.10291e-05 3.75042e-05 0.000112818
0.7 3.08708e-05 4.35589e-05 0.000112818
0.84 2.40946e-05 4.92054e-05 0.000112818
0.98 1.8629e-05 5.3996e-05 0.000112818
1.12 1.50422e-05 5.68687e-05 0.000112818
1.26 1.18359e-05 6.18548e-05 0.000112818
1.4 9.41027e-06 6.46128e-05 0.000112818
1.68 6.13313e-06 6.4207e-05 0.000112818
2.24 3.76629e-06 6.91702e-05 0.000112818
2.8 2.04758e-06 7.12644e-05 0.000112818
3.36 0 7.35974e-05 0.000112818
END DIST

Metal 2 OVER 1 UNDER 4
DIST count 12 width 0.28
0.28 9.17747e-05 1.34761e-05 0.000112818
0.56 4.93742e-05 2.64715e-05 0.000112818
0.7 3.90815e-05 3.13785e-05 0.000112818
0.84 3.21753e-05 3.54298e-05 0.000112818
0.98 2.52198e-05 4.06578e-05 0.000112818
1.12 2.1466e-05 4.33863e-05 0.000112818
1.26 1.78607e-05 4.71622e-05 0.000112818
1.4 1.51332e-05 4.9659e-05 0.000112818
1.68 1.13641e-05 5.14971e-05 0.000112818
2.24 7.39407e-06 5.69328e-05 0.000112818
2.8 4.51122e-06 6.02009e-05 0.000112818
3.36 0 6.50045e-05 0.000112818
END DIST

Metal 2 OVER 1 UNDER 5
DIST count 12 width 0.28
0.28 9.44359e-05 1.12325e-05 0.000112818
0.56 5.41044e-05 2.16639e-05 0.000112818
0.7 4.36671e-05 2.64195e-05 0.000112818
0.84 3.76177e-05 3.14182e-05 0.000112818
0.98 3.07477e-05 3.74844e-05 0.000112818
1.12 2.63964e-05 3.98226e-05 0.000112818
1.26 2.26208e-05 4.31353e-05 0.000112818
1.4 1.92242e-05 4.5295e-05 0.000112818
1.68 1.35649e-05 4.76829e-05 0.000112818
2.24 9.23277e-06 5.33103e-05 0.000112818
2.8 6.08692e-06 5.67178e-05 0.000112818
3.36 0 6.30034e-05 0.000112818
END DIST

Metal 3 RESOVER
WIDTH Table 1 entries:  0.28

Metal 3 RESOVER 0
DIST count 55 width 0.28
0 0 0 0.000225636
0 0.28 0 0.000225636
0 0.56 0 0.000225636
0 0.7 0 0.000225636
0 0.84 0 0.000225636
0 1.12 0 0.000225636
0 1.26 0 0.000225636
0 1.4 0 0.000225636
0 1.68 0 0.000225636
0 2.24 0 0.000225636
0.28 0.28 0 0.000225636
0.28 0.56 0 0.000225636
0.28 0.7 0 0.000225636
0.28 0.84 0 0.000225636
0.28 1.12 0 0.000225636
0.28 1.26 0 0.000225636
0.28 1.4 0 0.000225636
0.28 1.68 0 0.000225636
0.28 2.24 0 0.000225636
0.56 0.56 0 0.000225636
0.56 0.7 0 0.000225636
0.56 0.84 0 0.000225636
0.56 1.12 0 0.000225636
0.56 1.26 0 0.000225636
0.56 1.4 0 0.000225636
0.56 1.68 0 0.000225636
0.56 2.24 0 0.000225636
0.7 0.7 0 0.000225636
0.7 0.84 0 0.000225636
0.7 1.12 0 0.000225636
0.7 1.26 0 0.000225636
0.7 1.4 0 0.000225636
0.7 1.68 0 0.000225636
0.7 2.24 0 0.000225636
0.84 0.84 0 0.000225636
0.84 1.12 0 0.000225636
0.84 1.26 0 0.000225636
0.84 1.4 0 0.000225636
0.84 1.68 0 0.000225636
0.84 2.24 0 0.000225636
1.12 1.12 0 0.000225636
1.12 1.26 0 0.000225636
1.12 1.4 0 0.000225636
1.12 1.68 0 0.000225636
1.12 2.24 0 0.000225636
1.26 1.26 0 0.000225636
1.26 1.4 0 0.000225636
1.26 1.68 0 0.000225636
1.26 2.24 0 0.000225636
1.4 1.4 0 0.000225636
1.4 1.68 0 0.000225636
1.4 2.24 0 0.000225636
1.68 1.68 0 0.000225636
1.68 2.24 0 0.000225636
2.24 0 2.24 0.000225636
END DIST

Metal 3 RESOVER 1
DIST count 0 width 0.28
END DIST

Metal 3 RESOVER 2
DIST count 0 width 0.28
END DIST

Metal 3 OVER
WIDTH Table 1 entries:  0.28

Metal 3 OVER 0
DIST count 12 width 0.28
0.28 0.000113435 5.41126e-08 0.000112818
0.56 7.39679e-05 5.41125e-08 0.000112818
0.7 6.37911e-05 5.41125e-08 0.000112818
0.84 5.70034e-05 6.47121e-07 0.000112818
0.98 5.11594e-05 2.3421e-06 0.000112818
1.12 4.72347e-05 3.52272e-06 0.000112818
1.26 4.31709e-05 5.0703e-06 0.000112818
1.4 4.01768e-05 6.16086e-06 0.000112818
1.68 3.18186e-05 1.18735e-05 0.000112818
2.24 2.57048e-05 1.4984e-05 0.000112818
2.8 2.12396e-05 1.72684e-05 0.000112818
3.36 0 3.68524e-05 0.000112818
END DIST

Metal 3 OVER 1
DIST count 12 width 0.28
0.28 0.000108325 5.41126e-08 0.000112818
0.56 6.84962e-05 4.40565e-06 0.000112818
0.7 5.8162e-05 7.40588e-06 0.000112818
0.84 5.12548e-05 9.4567e-06 0.000112818
0.98 4.52991e-05 1.19346e-05 0.000112818
1.12 4.12919e-05 1.38325e-05 0.000112818
1.26 3.37998e-05 1.93586e-05 0.000112818
1.4 3.08845e-05 2.087e-05 0.000112818
1.68 2.66359e-05 2.33973e-05 0.000112818
2.24 2.06258e-05 2.81169e-05 0.000112818
2.8 1.62568e-05 3.15488e-05 0.000112818
3.36 0 4.70943e-05 0.000112818
END DIST

Metal 3 OVER 2
DIST count 12 width 0.28
0.28 9.71006e-05 9.49638e-06 0.000112818
0.56 5.70833e-05 1.93093e-05 0.000112818
0.7 4.68166e-05 2.36878e-05 0.000112818
0.84 3.99612e-05 2.75449e-05 0.000112818
0.98 3.17204e-05 3.36285e-05 0.000112818
1.12 2.798e-05 3.57726e-05 0.000112818
1.26 2.43259e-05 3.94928e-05 0.000112818
1.4 2.15873e-05 4.17377e-05 0.000112818
1.68 1.76794e-05 4.29472e-05 0.000112818
2.24 1.30089e-05 4.86475e-05 0.000112818
2.8 9.61719e-06 5.20905e-05 0.000112818
3.36 0 6.17465e-05 0.000112818
END DIST

Metal 3 UNDER
WIDTH Table 1 entries:  0.28

Metal 3 UNDER 4
DIST count 12 width 0.28
0.28 9.4952e-05 1.13675e-05 0.000112818
0.56 5.45967e-05 2.13596e-05 0.000112818
0.7 4.41634e-05 2.58448e-05 0.000112818
0.84 3.719e-05 2.97646e-05 0.000112818
0.98 2.94125e-05 3.53688e-05 0.000112818
1.12 2.55907e-05 3.76944e-05 0.000112818
1.26 2.18426e-05 4.14891e-05 0.000112818
1.4 1.90344e-05 4.38024e-05 0.000112818
1.68 1.50377e-05 4.49499e-05 0.000112818
2.24 9.4567e-06 5.17383e-05 0.000112818
2.8 6.29518e-06 5.49514e-05 0.000112818
3.36 0 6.12857e-05 0.000112818
END DIST

Metal 3 UNDER 5
DIST count 12 width 0.28
0.28 0.000106375 1.86858e-07 0.000112818
0.56 6.62391e-05 6.55541e-06 0.000112818
0.7 5.57477e-05 9.52927e-06 0.000112818
0.84 4.93665e-05 1.25614e-05 0.000112818
0.98 4.38265e-05 1.57862e-05 0.000112818
1.12 3.92353e-05 1.75536e-05 0.000112818
1.26 3.48242e-05 1.90003e-05 0.000112818
1.4 3.12275e-05 2.01294e-05 0.000112818
1.68 2.40401e-05 2.50762e-05 0.000112818
2.24 1.77305e-05 2.99986e-05 0.000112818
2.8 1.31687e-05 3.35531e-05 0.000112818
3.36 0 4.59571e-05 0.000112818
END DIST

Metal 3 DIAGUNDER
WIDTH Table 1 entries:  0.28

Metal 3 DIAGUNDER 4
DIST count 13 width 0.28
0 0 2.59362e-05 0.000112818
0.28 0 1.97365e-05 0.000112818
0.56 0 1.78717e-05 0.000112818
0.7 0 1.70774e-05 0.000112818
0.84 0 1.64248e-05 0.000112818
0.98 0 1.55866e-05 0.000112818
1.12 0 1.46587e-05 0.000112818
1.26 0 1.38677e-05 0.000112818
1.4 0 1.31854e-05 0.000112818
1.68 0 1.20683e-05 0.000112818
2.24 0 1.00903e-05 0.000112818
2.8 0 8.5746e-06 0.000112818
3.36 0 7.54881e-06 0.000112818
END DIST

Metal 3 DIAGUNDER 5
DIST count 13 width 0.28
0 0 1.50313e-05 0.000112818
0.28 0 1.13952e-05 0.000112818
0.56 0 1.12972e-05 0.000112818
0.7 0 1.12138e-05 0.000112818
0.84 0 1.11372e-05 0.000112818
0.98 0 1.09698e-05 0.000112818
1.12 0 1.07815e-05 0.000112818
1.26 0 1.06187e-05 0.000112818
1.4 0 1.04767e-05 0.000112818
1.68 0 1.00963e-05 0.000112818
2.24 0 9.18941e-06 0.000112818
2.8 0 8.44055e-06 0.000112818
3.36 0 7.81755e-06 0.000112818
END DIST

Metal 3 OVERUNDER
WIDTH Table 1 entries:  0.28

Metal 3 OVER 1 UNDER 4
DIST count 12 width 0.28
0.28 9.19792e-05 1.32847e-05 0.000112818
0.56 4.94491e-05 2.64174e-05 0.000112818
0.7 3.91399e-05 3.13469e-05 0.000112818
0.84 3.2226e-05 3.55251e-05 0.000112818
0.98 2.52197e-05 4.08093e-05 0.000112818
1.12 2.14684e-05 4.35127e-05 0.000112818
1.26 1.78636e-05 4.74224e-05 0.000112818
1.4 1.51365e-05 4.99332e-05 0.000112818
1.68 1.13676e-05 5.14105e-05 0.000112818
2.24 7.393e-06 5.70322e-05 0.000112818
2.8 4.50678e-06 6.02892e-05 0.000112818
3.36 0 6.50774e-05 0.000112818
END DIST

Metal 3 OVER 1 UNDER 5
DIST count 12 width 0.28
0.28 0.000102685 3.02604e-06 0.000112818
0.56 6.2228e-05 1.08695e-05 0.000112818
0.7 5.28641e-05 1.56112e-05 0.000112818
0.84 4.66569e-05 1.94357e-05 0.000112818
0.98 3.78626e-05 2.47658e-05 0.000112818
1.12 3.3331e-05 2.67993e-05 0.000112818
1.26 2.9202e-05 2.87656e-05 0.000112818
1.4 2.5341e-05 3.0248e-05 0.000112818
1.68 2.02212e-05 3.28868e-05 0.000112818
2.24 1.4208e-05 3.86258e-05 0.000112818
2.8 9.01056e-06 4.36243e-05 0.000112818
3.36 0 5.24835e-05 0.000112818
END DIST

Metal 3 OVER 2 UNDER 4
DIST count 12 width 0.28
0.28 8.11547e-05 2.38647e-05 0.000112818
0.56 4.104e-05 3.76082e-05 0.000112818
0.7 3.0882e-05 4.36791e-05 0.000112818
0.84 2.41055e-05 4.942e-05 0.000112818
0.98 1.86382e-05 5.42178e-05 0.000112818
1.12 1.50502e-05 5.70159e-05 0.000112818
1.26 1.18422e-05 6.20979e-05 0.000112818
1.4 9.41521e-06 6.48682e-05 0.000112818
1.68 6.13635e-06 6.43395e-05 0.000112818
2.24 3.76806e-06 6.93178e-05 0.000112818
2.8 2.0483e-06 7.14109e-05 0.000112818
3.36 0 7.37427e-05 0.000112818
END DIST

Metal 3 OVER 2 UNDER 5
DIST count 12 width 0.28
0.28 9.28516e-05 1.26666e-05 0.000112818
0.56 5.22539e-05 2.37425e-05 0.000112818
0.7 4.00046e-05 3.05911e-05 0.000112818
0.84 3.39544e-05 3.5603e-05 0.000112818
0.98 2.883e-05 3.98215e-05 0.000112818
1.12 2.31487e-05 4.35992e-05 0.000112818
1.26 1.95241e-05 4.69129e-05 0.000112818
1.4 1.63094e-05 4.92125e-05 0.000112818
1.68 1.20534e-05 5.0468e-05 0.000112818
2.24 7.93979e-06 5.60317e-05 0.000112818
2.8 4.95264e-06 5.93753e-05 0.000112818
3.36 0 6.45985e-05 0.000112818
END DIST

Metal 4 RESOVER
WIDTH Table 1 entries:  0.28

Metal 4 RESOVER 0
DIST count 55 width 0.28
0 0 0 0.000225636
0 0.28 0 0.000225636
0 0.56 0 0.000225636
0 0.7 0 0.000225636
0 0.84 0 0.000225636
0 1.12 0 0.000225636
0 1.26 0 0.000225636
0 1.4 0 0.000225636
0 1.68 0 0.000225636
0 2.24 0 0.000225636
0.28 0.28 0 0.000225636
0.28 0.56 0 0.000225636
0.28 0.7 0 0.000225636
0.28 0.84 0 0.000225636
0.28 1.12 0 0.000225636
0.28 1.26 0 0.000225636
0.28 1.4 0 0.000225636
0.28 1.68 0 0.000225636
0.28 2.24 0 0.000225636
0.56 0.56 0 0.000225636
0.56 0.7 0 0.000225636
0.56 0.84 0 0.000225636
0.56 1.12 0 0.000225636
0.56 1.26 0 0.000225636
0.56 1.4 0 0.000225636
0.56 1.68 0 0.000225636
0.56 2.24 0 0.000225636
0.7 0.7 0 0.000225636
0.7 0.84 0 0.000225636
0.7 1.12 0 0.000225636
0.7 1.26 0 0.000225636
0.7 1.4 0 0.000225636
0.7 1.68 0 0.000225636
0.7 2.24 0 0.000225636
0.84 0.84 0 0.000225636
0.84 1.12 0 0.000225636
0.84 1.26 0 0.000225636
0.84 1.4 0 0.000225636
0.84 1.68 0 0.000225636
0.84 2.24 0 0.000225636
1.12 1.12 0 0.000225636
1.12 1.26 0 0.000225636
1.12 1.4 0 0.000225636
1.12 1.68 0 0.000225636
1.12 2.24 0 0.000225636
1.26 1.26 0 0.000225636
1.26 1.4 0 0.000225636
1.26 1.68 0 0.000225636
1.26 2.24 0 0.000225636
1.4 1.4 0 0.000225636
1.4 1.68 0 0.000225636
1.4 2.24 0 0.000225636
1.68 1.68 0 0.000225636
1.68 2.24 0 0.000225636
2.24 0 2.24 0.000225636
END DIST

Metal 4 RESOVER 1
DIST count 0 width 0.28
END DIST

Metal 4 RESOVER 2
DIST count 0 width 0.28
END DIST

Metal 4 RESOVER 3
DIST count 0 width 0.28
END DIST

Metal 4 OVER
WIDTH Table 1 entries:  0.28

Metal 4 OVER 0
DIST count 12 width 0.28
0.28 0.000114491 5.41125e-08 0.000112818
0.56 7.52082e-05 5.41126e-08 0.000112818
0.7 6.51187e-05 5.41126e-08 0.000112818
0.84 5.83929e-05 5.41126e-08 0.000112818
0.98 5.26223e-05 4.17412e-07 0.000112818
1.12 4.87499e-05 1.49791e-06 0.000112818
1.26 4.47545e-05 2.90795e-06 0.000112818
1.4 4.18094e-05 3.89727e-06 0.000112818
1.68 3.33554e-05 9.62398e-06 0.000112818
2.24 2.73074e-05 1.24438e-05 0.000112818
2.8 2.28834e-05 1.45236e-05 0.000112818
3.36 0 3.56275e-05 0.000112818
END DIST

Metal 4 OVER 1
DIST count 12 width 0.28
0.28 0.000111809 5.41125e-08 0.000112818
0.56 7.23156e-05 5.41125e-08 0.000112818
0.7 6.26166e-05 3.15539e-06 0.000112818
0.84 5.61513e-05 5.19517e-06 0.000112818
0.98 5.02738e-05 6.54505e-06 0.000112818
1.12 4.59909e-05 7.63821e-06 0.000112818
1.26 4.19978e-05 8.85596e-06 0.000112818
1.4 3.87204e-05 1.04881e-05 0.000112818
1.68 3.04981e-05 1.67723e-05 0.000112818
2.24 2.43547e-05 2.0849e-05 0.000112818
2.8 1.98723e-05 2.38306e-05 0.000112818
3.36 0 4.25637e-05 0.000112818
END DIST

Metal 4 OVER 2
DIST count 12 width 0.28
0.28 0.000108019 5.41126e-08 0.000112818
0.56 6.82575e-05 4.6242e-06 0.000112818
0.7 5.79558e-05 7.57614e-06 0.000112818
0.84 5.10693e-05 9.62415e-06 0.000112818
0.98 4.51396e-05 1.20614e-05 0.000112818
1.12 4.11493e-05 1.38954e-05 0.000112818
1.26 3.37958e-05 1.92996e-05 0.000112818
1.4 3.08907e-05 2.07897e-05 0.000112818
1.68 2.66573e-05 2.3236e-05 0.000112818
2.24 2.06352e-05 2.79284e-05 0.000112818
2.8 1.62551e-05 3.13426e-05 0.000112818
3.36 0 4.68647e-05 0.000112818
END DIST

Metal 4 OVER 3
DIST count 12 width 0.28
0.28 9.69534e-05 9.57472e-06 0.000112818
0.56 5.69916e-05 1.92788e-05 0.000112818
0.7 4.67502e-05 2.36141e-05 0.000112818
0.84 3.99112e-05 2.74547e-05 0.000112818
0.98 3.17603e-05 3.3435e-05 0.000112818
1.12 2.80284e-05 3.558e-05 0.000112818
1.26 2.43834e-05 3.92925e-05 0.000112818
1.4 2.16511e-05 4.15208e-05 0.000112818
1.68 1.77555e-05 4.2608e-05 0.000112818
2.24 1.30594e-05 4.83954e-05 0.000112818
2.8 9.64657e-06 5.18507e-05 0.000112818
3.36 0 6.15295e-05 0.000112818
END DIST

Metal 4 UNDER
WIDTH Table 1 entries:  0.28

Metal 4 UNDER 5
DIST count 12 width 0.28
0.28 9.96223e-05 6.92368e-06 0.000112818
0.56 5.93332e-05 1.51725e-05 0.000112818
0.7 4.88745e-05 1.90351e-05 0.000112818
0.84 4.18681e-05 2.16282e-05 0.000112818
0.98 3.58524e-05 2.48065e-05 0.000112818
1.12 3.18118e-05 2.73591e-05 0.000112818
1.26 2.57842e-05 3.18749e-05 0.000112818
1.4 2.28601e-05 3.38368e-05 0.000112818
1.68 1.86642e-05 3.7143e-05 0.000112818
2.24 1.3311e-05 4.21897e-05 0.000112818
2.8 8.47488e-06 4.68033e-05 0.000112818
3.36 0 5.51092e-05 0.000112818
END DIST

Metal 4 DIAGUNDER
WIDTH Table 1 entries:  0.28

Metal 4 DIAGUNDER 5
DIST count 13 width 0.28
0 0 2.48491e-05 0.000112818
0.28 0 1.92845e-05 0.000112818
0.56 0 1.83455e-05 0.000112818
0.7 0 1.77758e-05 0.000112818
0.84 0 1.72869e-05 0.000112818
0.98 0 1.66759e-05 0.000112818
1.12 0 1.60466e-05 0.000112818
1.26 0 1.55019e-05 0.000112818
1.4 0 1.50256e-05 0.000112818
1.68 0 1.40435e-05 0.000112818
2.24 0 1.21566e-05 0.000112818
2.8 0 1.07082e-05 0.000112818
3.36 0 9.60767e-06 0.000112818
END DIST

Metal 4 OVERUNDER
WIDTH Table 1 entries:  0.28

Metal 4 OVER 1 UNDER 5
DIST count 12 width 0.28
0.28 9.8287e-05 7.44988e-06 0.000112818
0.56 5.78408e-05 1.64613e-05 0.000112818
0.7 4.83963e-05 2.16868e-05 0.000112818
0.84 4.21324e-05 2.58075e-05 0.000112818
0.98 3.39614e-05 3.09966e-05 0.000112818
1.12 2.95095e-05 3.35203e-05 0.000112818
1.26 2.55452e-05 3.56192e-05 0.000112818
1.4 2.19362e-05 3.73033e-05 0.000112818
1.68 1.71136e-05 4.03537e-05 0.000112818
2.24 1.0925e-05 4.66842e-05 0.000112818
2.8 7.32792e-06 5.03847e-05 0.000112818
3.36 0 5.77911e-05 0.000112818
END DIST

Metal 4 OVER 2 UNDER 5
DIST count 12 width 0.28
0.28 9.57791e-05 9.68712e-06 0.000112818
0.56 5.50989e-05 1.94319e-05 0.000112818
0.7 4.25862e-05 2.59708e-05 0.000112818
0.84 3.56199e-05 2.89215e-05 0.000112818
0.98 2.97151e-05 3.25161e-05 0.000112818
1.12 2.57343e-05 3.54855e-05 0.000112818
1.26 2.06415e-05 3.94572e-05 0.000112818
1.4 1.7775e-05 4.17167e-05 0.000112818
1.68 1.37829e-05 4.54429e-05 0.000112818
2.24 9.13059e-06 5.04806e-05 0.000112818
2.8 5.75224e-06 5.4139e-05 0.000112818
3.36 0 6.01041e-05 0.000112818
END DIST

Metal 4 OVER 3 UNDER 5
DIST count 12 width 0.28
0.28 8.68154e-05 1.83702e-05 0.000112818
0.56 4.39637e-05 3.33427e-05 0.000112818
0.7 3.3784e-05 3.8889e-05 0.000112818
0.84 2.6958e-05 4.34341e-05 0.000112818
0.98 2.13629e-05 4.78619e-05 0.000112818
1.12 1.7649e-05 5.09582e-05 0.000112818
1.26 1.42035e-05 5.4967e-05 0.000112818
1.4 1.15969e-05 5.76265e-05 0.000112818
1.68 8.04409e-06 5.94922e-05 0.000112818
2.24 5.01658e-06 6.4152e-05 0.000112818
2.8 2.81812e-06 6.67858e-05 0.000112818
3.36 0 6.99348e-05 0.000112818
END DIST

Metal 5 RESOVER
WIDTH Table 1 entries:  0.44

Metal 5 RESOVER 0
DIST count 55 width 0.44
0 0 0 5.85537e-05
0 0.46 0 5.85537e-05
0 0.9 0 5.85537e-05
0 1.14 0 5.85537e-05
0 1.36 0 5.85537e-05
0 1.8 0 5.85537e-05
0 2.04 0 5.85537e-05
0 2.26 0 5.85537e-05
0 2.7 0 5.85537e-05
0 3.6 0 5.85537e-05
0.46 0.46 0 5.85537e-05
0.46 0.9 0 5.85537e-05
0.46 1.14 0 5.85537e-05
0.46 1.36 0 5.85537e-05
0.46 1.8 0 5.85537e-05
0.46 2.04 0 5.85537e-05
0.46 2.26 0 5.85537e-05
0.46 2.7 0 5.85537e-05
0.46 3.6 0 5.85537e-05
0.9 0.9 0 5.85537e-05
0.9 1.14 0 5.85537e-05
0.9 1.36 0 5.85537e-05
0.9 1.8 0 5.85537e-05
0.9 2.04 0 5.85537e-05
0.9 2.26 0 5.85537e-05
0.9 2.7 0 5.85537e-05
0.9 3.6 0 5.85537e-05
1.14 1.14 0 5.85537e-05
1.14 1.36 0 5.85537e-05
1.14 1.8 0 5.85537e-05
1.14 2.04 0 5.85537e-05
1.14 2.26 0 5.85537e-05
1.14 2.7 0 5.85537e-05
1.14 3.6 0 5.85537e-05
1.36 1.36 0 5.85537e-05
1.36 1.8 0 5.85537e-05
1.36 2.04 0 5.85537e-05
1.36 2.26 0 5.85537e-05
1.36 2.7 0 5.85537e-05
1.36 3.6 0 5.85537e-05
1.8 1.8 0 5.85537e-05
1.8 2.04 0 5.85537e-05
1.8 2.26 0 5.85537e-05
1.8 2.7 0 5.85537e-05
1.8 3.6 0 5.85537e-05
2.04 2.04 0 5.85537e-05
2.04 2.26 0 5.85537e-05
2.04 2.7 0 5.85537e-05
2.04 3.6 0 5.85537e-05
2.26 2.26 0 5.85537e-05
2.26 2.7 0 5.85537e-05
2.26 3.6 0 5.85537e-05
2.7 2.7 0 5.85537e-05
2.7 3.6 0 5.85537e-05
3.6 0 3.6 5.85537e-05
END DIST

Metal 5 RESOVER 1
DIST count 0 width 0.44
END DIST

Metal 5 RESOVER 2
DIST count 0 width 0.44
END DIST

Metal 5 RESOVER 3
DIST count 0 width 0.44
END DIST

Metal 5 RESOVER 4
DIST count 0 width 0.44
END DIST

Metal 5 OVER
WIDTH Table 1 entries:  0.44

Metal 5 OVER 0
DIST count 12 width 0.44
0.46 0.000138445 3.44353e-08 2.92769e-05
0.92 8.7101e-05 3.44353e-08 2.92769e-05
1.15 7.41823e-05 3.44353e-08 2.92769e-05
1.38 6.57438e-05 3.44353e-08 2.92769e-05
1.61 5.84178e-05 4.27301e-07 2.92769e-05
1.84 5.36031e-05 1.56055e-06 2.92769e-05
2.07 4.85868e-05 3.11008e-06 2.92769e-05
2.3 4.4892e-05 4.18652e-06 2.92769e-05
2.76 3.59512e-05 9.47402e-06 2.92769e-05
3.68 2.56402e-05 1.55063e-05 2.92769e-05
4.6 0 3.18693e-05 2.92769e-05
5.52 0 3.18693e-05 2.92769e-05
END DIST

Metal 5 OVER 1
DIST count 12 width 0.44
0.46 0.000136363 3.44353e-08 2.92769e-05
0.92 8.48553e-05 3.44353e-08 2.92769e-05
1.15 7.1895e-05 6.94203e-07 2.92769e-05
1.38 6.32267e-05 2.62347e-06 2.92769e-05
1.61 5.59667e-05 4.65424e-06 2.92769e-05
1.84 5.10331e-05 6.37479e-06 2.92769e-05
2.07 4.6118e-05 8.10011e-06 2.92769e-05
2.3 4.23562e-05 9.57295e-06 2.92769e-05
2.76 3.3742e-05 1.50321e-05 2.92769e-05
3.68 2.37799e-05 2.19907e-05 2.92769e-05
4.6 0 4.31451e-05 2.92769e-05
5.52 0 4.31451e-05 2.92769e-05
END DIST

Metal 5 OVER 2
DIST count 12 width 0.44
0.46 0.000134061 4.19807e-07 2.92769e-05
0.92 8.24186e-05 1.03637e-06 2.92769e-05
1.15 6.93834e-05 3.82179e-06 2.92769e-05
1.38 6.08556e-05 5.7531e-06 2.92769e-05
1.61 5.34289e-05 8.13266e-06 2.92769e-05
1.84 4.85395e-05 1.00234e-05 2.92769e-05
2.07 4.34363e-05 1.20572e-05 2.92769e-05
2.3 3.96715e-05 1.36826e-05 2.92769e-05
2.76 3.1463e-05 1.89618e-05 2.92769e-05
3.68 2.18487e-05 2.61492e-05 2.92769e-05
4.6 0 4.68284e-05 2.92769e-05
5.52 0 4.68274e-05 2.92769e-05
END DIST

Metal 5 OVER 3
DIST count 12 width 0.44
0.46 0.000129927 3.44353e-08 2.92769e-05
0.92 7.8136e-05 5.88789e-06 2.92769e-05
1.15 6.50508e-05 9.17339e-06 2.92769e-05
1.38 5.64806e-05 1.14836e-05 2.92769e-05
1.61 4.90315e-05 1.42998e-05 2.92769e-05
1.84 4.41255e-05 1.65724e-05 2.92769e-05
2.07 3.90352e-05 1.89399e-05 2.92769e-05
2.3 3.52708e-05 2.08743e-05 2.92769e-05
2.76 2.76327e-05 2.60411e-05 2.92769e-05
3.68 1.87516e-05 3.35037e-05 2.92769e-05
4.6 0 5.27527e-05 2.92769e-05
5.52 0 5.27527e-05 2.92769e-05
END DIST

Metal 5 OVER 4
DIST count 12 width 0.44
0.46 0.0001208 9.31417e-06 2.92769e-05
0.92 6.91139e-05 1.85849e-05 2.92769e-05
1.15 5.61789e-05 2.32596e-05 2.92769e-05
1.38 4.77222e-05 2.65702e-05 2.92769e-05
1.61 4.05115e-05 3.04134e-05 2.92769e-05
1.84 3.57815e-05 3.35619e-05 2.92769e-05
2.07 2.90663e-05 3.83365e-05 2.92769e-05
2.3 2.56315e-05 4.06731e-05 2.92769e-05
2.76 2.07216e-05 4.41438e-05 2.92769e-05
3.68 1.34752e-05 5.13784e-05 2.92769e-05
4.6 0 6.72762e-05 2.92769e-05
5.52 0 6.72762e-05 2.92769e-05
END DIST

Metal 5 UNDER
WIDTH Table 0 entries: 

Metal 5 DIAGUNDER
WIDTH Table 0 entries: 
END DensityModel 0