sky130/openlane/rules.openrcx.sky130A.min.calibre

Extraction Rules for OpenRCX

DIAGMODEL ON

LayerCount 6
DensityRate 1  0

DensityModel 0

Metal 1 RESOVER
WIDTH Table 1 entries:  0.17

Metal 1 RESOVER 0
DIST count 55 width 0.17
0 0 0 0.0511443
0 0.29 0 0.0511443
0 0.46 0 0.0511443
0 0.665 0 0.0511443
0 0.75 0 0.0511443
0 0.92 0 0.0511443
0 1.125 0 0.0511443
0 1.21 0 0.0511443
0 1.38 0 0.0511443
0 1.84 0 0.0511443
0.29 0.29 0 0.0511443
0.29 0.46 0 0.0511443
0.29 0.665 0 0.0511443
0.29 0.75 0 0.0511443
0.29 0.92 0 0.0511443
0.29 1.125 0 0.0511443
0.29 1.21 0 0.0511443
0.29 1.38 0 0.0511443
0.29 1.84 0 0.0511443
0.46 0.46 0 0.0511443
0.46 0.665 0 0.0511443
0.46 0.75 0 0.0511443
0.46 0.92 0 0.0511443
0.46 1.125 0 0.0511443
0.46 1.21 0 0.0511443
0.46 1.38 0 0.0511443
0.46 1.84 0 0.0511443
0.665 0.665 0 0.0511443
0.665 0.75 0 0.0511443
0.665 0.92 0 0.0511443
0.665 1.125 0 0.0511443
0.665 1.21 0 0.0511443
0.665 1.38 0 0.0511443
0.665 1.84 0 0.0511443
0.75 0.75 0 0.0511443
0.75 0.92 0 0.0511443
0.75 1.125 0 0.0511443
0.75 1.21 0 0.0511443
0.75 1.38 0 0.0511443
0.75 1.84 0 0.0511443
0.92 0.92 0 0.0511443
0.92 1.125 0 0.0511443
0.92 1.21 0 0.0511443
0.92 1.38 0 0.0511443
0.92 1.84 0 0.0511443
1.125 1.125 0 0.0511443
1.125 1.21 0 0.0511443
1.125 1.38 0 0.0511443
1.125 1.84 0 0.0511443
1.21 1.21 0 0.0511443
1.21 1.38 0 0.0511443
1.21 1.84 0 0.0511443
1.38 1.38 0 0.0511443
1.38 1.84 0 0.0511443
1.84 0 1.84 0.0511443
END DIST

Metal 1 OVER
WIDTH Table 1 entries:  0.17

Metal 1 OVER 0
DIST count 12 width 0.17
0.17 6.87234e-05 1.1551e-05 0.0255721
0.34 4.4998e-05 1.37081e-05 0.0255721
0.425 3.95695e-05 1.47198e-05 0.0255721
0.51 3.5368e-05 1.56892e-05 0.0255721
0.595 3.18534e-05 1.66179e-05 0.0255721
0.68 2.88938e-05 1.75077e-05 0.0255721
0.765 2.63918e-05 1.83601e-05 0.0255721
0.85 2.4264e-05 1.91764e-05 0.0255721
1.02 2.08419e-05 2.07068e-05 0.0255721
1.36 1.62749e-05 2.33947e-05 0.0255721
1.7 1.34316e-05 2.56475e-05 0.0255721
2.04 0 3.90213e-05 0.0255721
END DIST

Metal 1 UNDER
WIDTH Table 1 entries:  0.17

Metal 1 UNDER 2
DIST count 12 width 0.17
0.17 6.52952e-05 2.30226e-05 0.0255721
0.34 3.95729e-05 2.81806e-05 0.0255721
0.425 3.33851e-05 3.03268e-05 0.0255721
0.51 2.87213e-05 3.22323e-05 0.0255721
0.595 2.49693e-05 3.39274e-05 0.0255721
0.68 2.19113e-05 3.54381e-05 0.0255721
0.765 1.93958e-05 3.6787e-05 0.0255721
0.85 1.73084e-05 3.79943e-05 0.0255721
1.02 1.40743e-05 4.00497e-05 0.0255721
1.36 1.00515e-05 4.30823e-05 0.0255721
1.7 7.79712e-06 4.51505e-05 0.0255721
2.04 0 5.30233e-05 0.0255721
END DIST

Metal 1 UNDER 3
DIST count 12 width 0.17
0.17 6.77117e-05 1.70206e-05 0.0255721
0.34 4.23678e-05 2.05464e-05 0.0255721
0.425 3.65081e-05 2.21244e-05 0.0255721
0.51 3.20398e-05 2.35913e-05 0.0255721
0.595 2.83573e-05 2.49554e-05 0.0255721
0.68 2.52817e-05 2.62245e-05 0.0255721
0.765 2.26873e-05 2.74054e-05 0.0255721
0.85 2.04768e-05 2.85048e-05 0.0255721
1.02 1.69069e-05 3.04821e-05 0.0255721
1.36 1.2128e-05 3.36915e-05 0.0255721
1.7 9.22154e-06 3.61225e-05 0.0255721
2.04 0 4.53212e-05 0.0255721
END DIST

Metal 1 UNDER 4
DIST count 12 width 0.17
0.17 6.81514e-05 1.40544e-05 0.0255721
0.34 4.31976e-05 1.69101e-05 0.0255721
0.425 3.73957e-05 1.82214e-05 0.0255721
0.51 3.30952e-05 1.94606e-05 0.0255721
0.595 2.9557e-05 2.06318e-05 0.0255721
0.68 2.65969e-05 2.17386e-05 0.0255721
0.765 2.40909e-05 2.27847e-05 0.0255721
0.85 2.1944e-05 2.37733e-05 0.0255721
1.02 1.84324e-05 2.55904e-05 0.0255721
1.36 1.35901e-05 2.86622e-05 0.0255721
1.7 1.05017e-05 3.11097e-05 0.0255721
2.04 0 4.14719e-05 0.0255721
END DIST

Metal 1 UNDER 5
DIST count 12 width 0.17
0.17 6.82911e-05 1.3506e-05 0.0255721
0.34 4.35373e-05 1.60492e-05 0.0255721
0.425 3.78077e-05 1.72289e-05 0.0255721
0.51 3.35264e-05 1.8351e-05 0.0255721
0.595 3.00784e-05 1.94184e-05 0.0255721
0.68 2.72013e-05 2.04336e-05 0.0255721
0.765 2.47696e-05 2.13991e-05 0.0255721
0.85 2.2687e-05 2.23174e-05 0.0255721
1.02 1.9271e-05 2.40207e-05 0.0255721
1.36 1.45123e-05 2.69511e-05 0.0255721
1.7 1.14089e-05 2.93403e-05 0.0255721
2.04 0 4.05362e-05 0.0255721
END DIST

Metal 1 UNDER 6
DIST count 12 width 0.17
0.17 6.83208e-05 1.20948e-05 0.0255721
0.34 4.35782e-05 1.45302e-05 0.0255721
0.425 3.78477e-05 1.5663e-05 0.0255721
0.51 3.35603e-05 1.67427e-05 0.0255721
0.595 3.01526e-05 1.77715e-05 0.0255721
0.68 2.73178e-05 1.87519e-05 0.0255721
0.765 2.49265e-05 1.96861e-05 0.0255721
0.85 2.28805e-05 2.05761e-05 0.0255721
1.02 1.95222e-05 2.22314e-05 0.0255721
1.36 1.48239e-05 2.50943e-05 0.0255721
1.7 1.17304e-05 2.74448e-05 0.0255721
2.04 0 3.89251e-05 0.0255721
END DIST

Metal 1 DIAGUNDER
WIDTH Table 1 entries:  0.17

Metal 1 DIAGUNDER 2
DIST count 13 width 0.17
0 0 2.49737e-05 0.0255721
0.17 0 1.99495e-05 0.0255721
0.34 0 1.76472e-05 0.0255721
0.425 0 1.65364e-05 0.0255721
0.51 0 1.55001e-05 0.0255721
0.595 0 1.45332e-05 0.0255721
0.68 0 1.36307e-05 0.0255721
0.765 0 1.27882e-05 0.0255721
0.85 0 1.20015e-05 0.0255721
1.02 0 1.05802e-05 0.0255721
1.36 0 8.25416e-06 0.0255721
1.7 0 6.47291e-06 0.0255721
2.04 0 5.1027e-06 0.0255721
END DIST

Metal 1 DIAGUNDER 3
DIST count 13 width 0.17
0 0 1.28053e-05 0.0255721
0.17 0 1.13763e-05 0.0255721
0.34 0 1.06151e-05 0.0255721
0.425 0 1.02542e-05 0.0255721
0.51 0 9.90597e-06 0.0255721
0.595 0 9.56982e-06 0.0255721
0.68 0 9.24537e-06 0.0255721
0.765 0 8.93217e-06 0.0255721
0.85 0 8.62989e-06 0.0255721
1.02 0 8.05642e-06 0.0255721
1.36 0 7.02415e-06 0.0255721
1.7 0 6.12775e-06 0.0255721
2.04 0 5.68351e-06 0.0255721
END DIST

Metal 1 DIAGUNDER 4
DIST count 13 width 0.17
0 0 8.68809e-06 0.0255721
0.17 0 8.67564e-06 0.0255721
0.34 0 8.31741e-06 0.0255721
0.425 0 8.144e-06 0.0255721
0.51 0 7.97424e-06 0.0255721
0.595 0 7.80808e-06 0.0255721
0.68 0 7.64545e-06 0.0255721
0.765 0 7.48627e-06 0.0255721
0.85 0 7.33048e-06 0.0255721
1.02 0 7.0287e-06 0.0255721
1.36 0 6.4626e-06 0.0255721
1.7 0 5.94296e-06 0.0255721
2.04 0 5.59002e-06 0.0255721
END DIST

Metal 1 DIAGUNDER 5
DIST count 13 width 0.17
0 0 5.53723e-06 0.0255721
0.17 0 5.62778e-06 0.0255721
0.34 0 5.46655e-06 0.0255721
0.425 0 5.3877e-06 0.0255721
0.51 0 5.31001e-06 0.0255721
0.595 0 5.23345e-06 0.0255721
0.68 0 5.15799e-06 0.0255721
0.765 0 5.08366e-06 0.0255721
0.85 0 5.0104e-06 0.0255721
1.02 0 4.86708e-06 0.0255721
1.36 0 4.59281e-06 0.0255721
1.7 0 4.33422e-06 0.0255721
2.04 0 4.14938e-06 0.0255721
END DIST

Metal 1 DIAGUNDER 6
DIST count 0 width 0.17
END DIST

Metal 2 RESOVER
WIDTH Table 1 entries:  0.14

Metal 2 RESOVER 0
DIST count 55 width 0.14
0 0 0 0.00093671
0 0.2 0 0.00093671
0 0.34 0 0.00093671
0 0.47 0 0.00093671
0 0.54 0 0.00093671
0 0.68 0 0.00093671
0 0.81 0 0.00093671
0 0.88 0 0.00093671
0 1.02 0 0.00093671
0 1.36 0 0.00093671
0.2 0.2 0 0.00093671
0.2 0.34 0 0.00093671
0.2 0.47 0 0.00093671
0.2 0.54 0 0.00093671
0.2 0.68 0 0.00093671
0.2 0.81 0 0.00093671
0.2 0.88 0 0.00093671
0.2 1.02 0 0.00093671
0.2 1.36 0 0.00093671
0.34 0.34 0 0.00093671
0.34 0.47 0 0.00093671
0.34 0.54 0 0.00093671
0.34 0.68 0 0.00093671
0.34 0.81 0 0.00093671
0.34 0.88 0 0.00093671
0.34 1.02 0 0.00093671
0.34 1.36 0 0.00093671
0.47 0.47 0 0.00093671
0.47 0.54 0 0.00093671
0.47 0.68 0 0.00093671
0.47 0.81 0 0.00093671
0.47 0.88 0 0.00093671
0.47 1.02 0 0.00093671
0.47 1.36 0 0.00093671
0.54 0.54 0 0.00093671
0.54 0.68 0 0.00093671
0.54 0.81 0 0.00093671
0.54 0.88 0 0.00093671
0.54 1.02 0 0.00093671
0.54 1.36 0 0.00093671
0.68 0.68 0 0.00093671
0.68 0.81 0 0.00093671
0.68 0.88 0 0.00093671
0.68 1.02 0 0.00093671
0.68 1.36 0 0.00093671
0.81 0.81 0 0.00093671
0.81 0.88 0 0.00093671
0.81 1.02 0 0.00093671
0.81 1.36 0 0.00093671
0.88 0.88 0 0.00093671
0.88 1.02 0 0.00093671
0.88 1.36 0 0.00093671
1.02 1.02 0 0.00093671
1.02 1.36 0 0.00093671
1.36 0 1.36 0.00093671
END DIST

Metal 2 RESOVER 1
DIST count 0 width 0.14
END DIST

Metal 2 OVER
WIDTH Table 1 entries:  0.14

Metal 2 OVER 0
DIST count 12 width 0.14
0.14 9.12556e-05 8.79704e-06 0.000468355
0.28 7.26222e-05 1.08667e-05 0.000468355
0.35 6.47118e-05 1.17025e-05 0.000468355
0.42 5.6935e-05 1.25162e-05 0.000468355
0.49 5.25754e-05 1.31897e-05 0.000468355
0.56 4.9194e-05 1.3823e-05 0.000468355
0.63 4.57954e-05 1.44563e-05 0.000468355
0.7 4.23794e-05 1.50896e-05 0.000468355
0.84 3.59092e-05 1.63219e-05 0.000468355
1.12 3.081e-05 1.81278e-05 0.000468355
1.4 2.56768e-05 1.99337e-05 0.000468355
1.68 0 4.33544e-05 0.000468355
END DIST

Metal 2 OVER 1
DIST count 12 width 0.14
0.14 8.76976e-05 1.65244e-05 0.000468355
0.28 6.63663e-05 2.00551e-05 0.000468355
0.35 5.86085e-05 2.16007e-05 0.000468355
0.42 5.16014e-05 2.30551e-05 0.000468355
0.49 4.67458e-05 2.43645e-05 0.000468355
0.56 4.2762e-05 2.55841e-05 0.000468355
0.63 3.90931e-05 2.67386e-05 0.000468355
0.7 3.56829e-05 2.78329e-05 0.000468355
0.84 2.96768e-05 2.98397e-05 0.000468355
1.12 2.33002e-05 3.29703e-05 0.000468355
1.4 1.84417e-05 3.5521e-05 0.000468355
1.68 0 5.26385e-05 0.000468355
END DIST

Metal 2 UNDER
WIDTH Table 1 entries:  0.14

Metal 2 UNDER 3
DIST count 12 width 0.14
0.14 8.67988e-05 2.0687e-05 0.000468355
0.28 6.55324e-05 2.55139e-05 0.000468355
0.35 5.73678e-05 2.75565e-05 0.000468355
0.42 4.9974e-05 2.94388e-05 0.000468355
0.49 4.47996e-05 3.11159e-05 0.000468355
0.56 4.05618e-05 3.26499e-05 0.000468355
0.63 3.6697e-05 3.40723e-05 0.000468355
0.7 3.31425e-05 3.53933e-05 0.000468355
0.84 2.69764e-05 3.77503e-05 0.000468355
1.12 2.06406e-05 4.12746e-05 0.000468355
1.4 1.60097e-05 4.39624e-05 0.000468355
1.68 0 5.89142e-05 0.000468355
END DIST

Metal 2 UNDER 4
DIST count 12 width 0.14
0.14 8.99609e-05 1.17942e-05 0.000468355
0.28 6.896e-05 1.45362e-05 0.000468355
0.35 6.12185e-05 1.57531e-05 0.000468355
0.42 5.42019e-05 1.69187e-05 0.000468355
0.49 4.94478e-05 1.79751e-05 0.000468355
0.56 4.55104e-05 1.89749e-05 0.000468355
0.63 4.18321e-05 1.99404e-05 0.000468355
0.7 3.83673e-05 2.08732e-05 0.000468355
0.84 3.21577e-05 2.26301e-05 0.000468355
1.12 2.52649e-05 2.54858e-05 0.000468355
1.4 1.98269e-05 2.79771e-05 0.000468355
1.68 0 4.60424e-05 0.000468355
END DIST

Metal 2 UNDER 5
DIST count 12 width 0.14
0.14 9.05279e-05 1.06356e-05 0.000468355
0.28 6.95775e-05 1.27944e-05 0.000468355
0.35 6.20605e-05 1.37529e-05 0.000468355
0.42 5.52625e-05 1.46806e-05 0.000468355
0.49 5.06477e-05 1.55181e-05 0.000468355
0.56 4.68535e-05 1.63169e-05 0.000468355
0.63 4.336e-05 1.7098e-05 0.000468355
0.7 4.00557e-05 1.78621e-05 0.000468355
0.84 3.40794e-05 1.93244e-05 0.000468355
1.12 2.73638e-05 2.17371e-05 0.000468355
1.4 2.18736e-05 2.394e-05 0.000468355
1.68 0 4.37099e-05 0.000468355
END DIST

Metal 2 UNDER 6
DIST count 12 width 0.14
0.14 9.06742e-05 9.39735e-06 0.000468355
0.28 6.94215e-05 1.13674e-05 0.000468355
0.35 6.20178e-05 1.22463e-05 0.000468355
0.42 5.54151e-05 1.30989e-05 0.000468355
0.49 5.08543e-05 1.38719e-05 0.000468355
0.56 4.70921e-05 1.46114e-05 0.000468355
0.63 4.36005e-05 1.53362e-05 0.000468355
0.7 4.03836e-05 1.6047e-05 0.000468355
0.84 3.4588e-05 1.74121e-05 0.000468355
1.12 2.7832e-05 1.96908e-05 0.000468355
1.4 2.2354e-05 2.17896e-05 0.000468355
1.68 0 4.19416e-05 0.000468355
END DIST

Metal 2 DIAGUNDER
WIDTH Table 1 entries:  0.14

Metal 2 DIAGUNDER 3
DIST count 13 width 0.14
0 0 3.14106e-05 0.000468355
0.14 0 2.85753e-05 0.000468355
0.28 0 2.7078e-05 0.000468355
0.35 0 2.58873e-05 0.000468355
0.42 0 2.47565e-05 0.000468355
0.49 0 2.36828e-05 0.000468355
0.56 0 2.26633e-05 0.000468355
0.63 0 2.16955e-05 0.000468355
0.7 0 2.07666e-05 0.000468355
0.84 0 1.90457e-05 0.000468355
1.12 0 1.61405e-05 0.000468355
1.4 0 1.37918e-05 0.000468355
1.68 0 9.70486e-06 0.000468355
END DIST

Metal 2 DIAGUNDER 4
DIST count 13 width 0.14
0 0 1.83703e-05 0.000468355
0.14 0 1.96858e-05 0.000468355
0.28 0 2.00794e-05 0.000468355
0.35 0 1.9752e-05 0.000468355
0.42 0 1.94287e-05 0.000468355
0.49 0 1.91097e-05 0.000468355
0.56 0 1.87952e-05 0.000468355
0.63 0 1.84855e-05 0.000468355
0.7 0 1.81696e-05 0.000468355
0.84 0 1.75549e-05 0.000468355
1.12 0 1.64313e-05 0.000468355
1.4 0 1.53935e-05 0.000468355
1.68 0 1.11442e-05 0.000468355
END DIST

Metal 2 DIAGUNDER 5
DIST count 13 width 0.14
0 0 1.21224e-05 0.000468355
0.14 0 1.42805e-05 0.000468355
0.28 0 1.49735e-05 0.000468355
0.35 0 1.48263e-05 0.000468355
0.42 0 1.46794e-05 0.000468355
0.49 0 1.4533e-05 0.000468355
0.56 0 1.43872e-05 0.000468355
0.63 0 1.42422e-05 0.000468355
0.7 0 1.40862e-05 0.000468355
0.84 0 1.37799e-05 0.000468355
1.12 0 1.32314e-05 0.000468355
1.4 0 1.27104e-05 0.000468355
1.68 0 8.88933e-06 0.000468355
END DIST

Metal 2 DIAGUNDER 6
DIST count 13 width 0.14
0 0 8.88669e-06 0.000468355
0.14 0 8.54921e-06 0.000468355
0.28 0 8.44048e-06 0.000468355
0.35 0 8.38176e-06 0.000468355
0.42 0 8.32367e-06 0.000468355
0.49 0 8.26624e-06 0.000468355
0.56 0 8.20948e-06 0.000468355
0.63 0 8.1533e-06 0.000468355
0.7 0 8.09778e-06 0.000468355
0.84 0 7.98856e-06 0.000468355
1.12 0 7.77731e-06 0.000468355
1.4 0 7.57528e-06 0.000468355
1.68 0 5.78009e-06 0.000468355
END DIST

Metal 2 OVERUNDER
WIDTH Table 1 entries:  0.14

Metal 2 OVER 1 UNDER 3
DIST count 12 width 0.14
0.14 8.43792e-05 2.73741e-05 0.000468355
0.28 6.10597e-05 3.40054e-05 0.000468355
0.35 5.26092e-05 3.67867e-05 0.000468355
0.42 4.53426e-05 3.92855e-05 0.000468355
0.49 3.97742e-05 4.15031e-05 0.000468355
0.56 3.51711e-05 4.34915e-05 0.000468355
0.63 3.11666e-05 4.52884e-05 0.000468355
0.7 2.76545e-05 4.69199e-05 0.000468355
0.84 2.18834e-05 4.97264e-05 0.000468355
1.12 1.53727e-05 5.38256e-05 0.000468355
1.4 1.12888e-05 5.66797e-05 0.000468355
1.68 0 6.74535e-05 0.000468355
END DIST

Metal 2 OVER 1 UNDER 4
DIST count 12 width 0.14
0.14 8.68886e-05 1.87034e-05 0.000468355
0.28 6.43664e-05 2.31836e-05 0.000468355
0.35 5.64635e-05 2.5142e-05 0.000468355
0.42 4.96151e-05 2.69613e-05 0.000468355
0.49 4.43752e-05 2.86141e-05 0.000468355
0.56 3.99611e-05 3.01348e-05 0.000468355
0.63 3.60317e-05 3.1561e-05 0.000468355
0.7 3.25048e-05 3.29299e-05 0.000468355
0.84 2.65159e-05 3.53556e-05 0.000468355
1.12 1.92209e-05 3.9208e-05 0.000468355
1.4 1.43013e-05 4.21915e-05 0.000468355
1.68 0 5.5547e-05 0.000468355
END DIST

Metal 2 OVER 1 UNDER 5
DIST count 12 width 0.14
0.14 8.73122e-05 1.75662e-05 0.000468355
0.28 6.48058e-05 2.14903e-05 0.000468355
0.35 5.71727e-05 2.31909e-05 0.000468355
0.42 5.05775e-05 2.47855e-05 0.000468355
0.49 4.55255e-05 2.62512e-05 0.000468355
0.56 4.12745e-05 2.76197e-05 0.000468355
0.63 3.75044e-05 2.89072e-05 0.000468355
0.7 3.41032e-05 3.01196e-05 0.000468355
0.84 2.82716e-05 3.23302e-05 0.000468355
1.12 2.10199e-05 3.58894e-05 0.000468355
1.4 1.59673e-05 3.8716e-05 0.000468355
1.68 0 5.34937e-05 0.000468355
END DIST

Metal 2 OVER 1 UNDER 6
DIST count 12 width 0.14
0.14 8.7388e-05 1.664e-05 0.000468355
0.28 6.47326e-05 2.02696e-05 0.000468355
0.35 5.71933e-05 2.18797e-05 0.000468355
0.42 5.07299e-05 2.34091e-05 0.000468355
0.49 4.57384e-05 2.48188e-05 0.000468355
0.56 4.15319e-05 2.61376e-05 0.000468355
0.63 3.77855e-05 2.738e-05 0.000468355
0.7 3.44448e-05 2.85512e-05 0.000468355
0.84 2.87238e-05 3.06913e-05 0.000468355
1.12 2.14656e-05 3.41614e-05 0.000468355
1.4 1.64065e-05 3.69312e-05 0.000468355
1.68 0 5.20846e-05 0.000468355
END DIST

Metal 3 RESOVER
WIDTH Table 1 entries:  0.14

Metal 3 RESOVER 0
DIST count 55 width 0.14
0 0 0 0.00093671
0 0.32 0 0.00093671
0 0.46 0 0.00093671
0 0.71 0 0.00093671
0 0.78 0 0.00093671
0 0.92 0 0.00093671
0 1.17 0 0.00093671
0 1.24 0 0.00093671
0 1.38 0 0.00093671
0 1.84 0 0.00093671
0.32 0.32 0 0.00093671
0.32 0.46 0 0.00093671
0.32 0.71 0 0.00093671
0.32 0.78 0 0.00093671
0.32 0.92 0 0.00093671
0.32 1.17 0 0.00093671
0.32 1.24 0 0.00093671
0.32 1.38 0 0.00093671
0.32 1.84 0 0.00093671
0.46 0.46 0 0.00093671
0.46 0.71 0 0.00093671
0.46 0.78 0 0.00093671
0.46 0.92 0 0.00093671
0.46 1.17 0 0.00093671
0.46 1.24 0 0.00093671
0.46 1.38 0 0.00093671
0.46 1.84 0 0.00093671
0.71 0.71 0 0.00093671
0.71 0.78 0 0.00093671
0.71 0.92 0 0.00093671
0.71 1.17 0 0.00093671
0.71 1.24 0 0.00093671
0.71 1.38 0 0.00093671
0.71 1.84 0 0.00093671
0.78 0.78 0 0.00093671
0.78 0.92 0 0.00093671
0.78 1.17 0 0.00093671
0.78 1.24 0 0.00093671
0.78 1.38 0 0.00093671
0.78 1.84 0 0.00093671
0.92 0.92 0 0.00093671
0.92 1.17 0 0.00093671
0.92 1.24 0 0.00093671
0.92 1.38 0 0.00093671
0.92 1.84 0 0.00093671
1.17 1.17 0 0.00093671
1.17 1.24 0 0.00093671
1.17 1.38 0 0.00093671
1.17 1.84 0 0.00093671
1.24 1.24 0 0.00093671
1.24 1.38 0 0.00093671
1.24 1.84 0 0.00093671
1.38 1.38 0 0.00093671
1.38 1.84 0 0.00093671
1.84 0 1.84 0.00093671
END DIST

Metal 3 RESOVER 1
DIST count 0 width 0.14
END DIST

Metal 3 RESOVER 2
DIST count 0 width 0.14
END DIST

Metal 3 OVER
WIDTH Table 1 entries:  0.14

Metal 3 OVER 0
DIST count 12 width 0.14
0.14 9.1302e-05 7.93167e-06 0.000468355
0.28 7.23031e-05 9.5877e-06 0.000468355
0.35 6.45654e-05 1.02536e-05 0.000468355
0.42 5.70189e-05 1.08993e-05 0.000468355
0.49 5.28232e-05 1.14234e-05 0.000468355
0.56 4.95865e-05 1.19127e-05 0.000468355
0.63 4.63321e-05 1.24019e-05 0.000468355
0.7 4.30602e-05 1.28912e-05 0.000468355
0.84 3.6861e-05 1.38433e-05 0.000468355
1.12 3.19997e-05 1.52404e-05 0.000468355
1.4 2.71009e-05 1.66376e-05 0.000468355
1.68 0 4.13109e-05 0.000468355
END DIST

Metal 3 OVER 1
DIST count 12 width 0.14
0.14 9.03855e-05 1.14475e-05 0.000468355
0.28 6.87918e-05 1.33186e-05 0.000468355
0.35 6.12944e-05 1.41589e-05 0.000468355
0.42 5.46144e-05 1.49739e-05 0.000468355
0.49 5.00777e-05 1.57121e-05 0.000468355
0.56 4.63708e-05 1.64159e-05 0.000468355
0.63 4.29875e-05 1.71029e-05 0.000468355
0.7 3.98132e-05 1.7773e-05 0.000468355
0.84 3.41198e-05 1.90511e-05 0.000468355
1.12 2.77608e-05 2.11718e-05 0.000468355
1.4 2.26483e-05 2.30748e-05 0.000468355
1.68 0 4.36566e-05 0.000468355
END DIST

Metal 3 OVER 2
DIST count 12 width 0.14
0.14 8.7226e-05 1.84451e-05 0.000468355
0.28 6.53841e-05 2.21511e-05 0.000468355
0.35 5.7601e-05 2.37548e-05 0.000468355
0.42 5.0627e-05 2.52479e-05 0.000468355
0.49 4.58294e-05 2.65879e-05 0.000468355
0.56 4.19209e-05 2.78253e-05 0.000468355
0.63 3.83389e-05 2.8984e-05 0.000468355
0.7 3.50235e-05 3.00706e-05 0.000468355
0.84 2.92162e-05 3.20358e-05 0.000468355
1.12 2.31712e-05 3.50674e-05 0.000468355
1.4 1.86058e-05 3.74418e-05 0.000468355
1.68 0 5.4761e-05 0.000468355
END DIST

Metal 3 UNDER
WIDTH Table 1 entries:  0.14

Metal 3 UNDER 4
DIST count 12 width 0.14
0.14 8.85891e-05 1.51941e-05 0.000468355
0.28 6.66956e-05 1.86207e-05 0.000468355
0.35 5.89183e-05 2.01197e-05 0.000468355
0.42 5.19334e-05 2.15278e-05 0.000468355
0.49 4.70838e-05 2.27999e-05 0.000468355
0.56 4.30983e-05 2.39847e-05 0.000468355
0.63 3.94238e-05 2.51046e-05 0.000468355
0.7 3.60057e-05 2.6164e-05 0.000468355
0.84 2.99787e-05 2.81047e-05 0.000468355
1.12 2.34991e-05 3.11716e-05 0.000468355
1.4 1.85876e-05 3.36491e-05 0.000468355
1.68 0 5.08351e-05 0.000468355
END DIST

Metal 3 UNDER 5
DIST count 12 width 0.14
0.14 9.07991e-05 1.03948e-05 0.000468355
0.28 6.9239e-05 1.23362e-05 0.000468355
0.35 6.17942e-05 1.31955e-05 0.000468355
0.42 5.51389e-05 1.40257e-05 0.000468355
0.49 5.06274e-05 1.47764e-05 0.000468355
0.56 4.69294e-05 1.5492e-05 0.000468355
0.63 4.35175e-05 1.61907e-05 0.000468355
0.7 4.03212e-05 1.68729e-05 0.000468355
0.84 3.45487e-05 1.81773e-05 0.000468355
1.12 2.80049e-05 2.03592e-05 0.000468355
1.4 2.26642e-05 2.23382e-05 0.000468355
1.68 0 4.28067e-05 0.000468355
END DIST

Metal 3 UNDER 6
DIST count 12 width 0.14
0.14 9.11476e-05 8.94223e-06 0.000468355
0.28 6.93519e-05 1.05896e-05 0.000468355
0.35 6.20478e-05 1.13195e-05 0.000468355
0.42 5.56016e-05 1.2028e-05 0.000468355
0.49 5.1201e-05 1.26686e-05 0.000468355
0.56 4.7595e-05 1.32818e-05 0.000468355
0.63 4.42451e-05 1.38837e-05 0.000468355
0.7 4.11044e-05 1.44749e-05 0.000468355
0.84 3.55665e-05 1.56139e-05 0.000468355
1.12 2.91191e-05 1.75413e-05 0.000468355
1.4 2.38216e-05 1.93275e-05 0.000468355
1.68 0 4.07738e-05 0.000468355
END DIST

Metal 3 DIAGUNDER
WIDTH Table 1 entries:  0.14

Metal 3 DIAGUNDER 4
DIST count 13 width 0.14
0 0 3.00238e-05 0.000468355
0.14 0 2.83969e-05 0.000468355
0.28 0 2.77926e-05 0.000468355
0.35 0 2.69968e-05 0.000468355
0.42 0 2.62251e-05 0.000468355
0.49 0 2.54764e-05 0.000468355
0.56 0 2.47501e-05 0.000468355
0.63 0 2.40455e-05 0.000468355
0.7 0 2.33553e-05 0.000468355
0.84 0 2.20356e-05 0.000468355
1.12 0 1.96547e-05 0.000468355
1.4 0 1.75589e-05 0.000468355
1.68 0 1.42637e-05 0.000468355
END DIST

Metal 3 DIAGUNDER 5
DIST count 13 width 0.14
0 0 1.54368e-05 0.000468355
0.14 0 1.72243e-05 0.000468355
0.28 0 1.78745e-05 0.000468355
0.35 0 1.76878e-05 0.000468355
0.42 0 1.75021e-05 0.000468355
0.49 0 1.73175e-05 0.000468355
0.56 0 1.7134e-05 0.000468355
0.63 0 1.69516e-05 0.000468355
0.7 0 1.67621e-05 0.000468355
0.84 0 1.63882e-05 0.000468355
1.12 0 1.56898e-05 0.000468355
1.4 0 1.50178e-05 0.000468355
1.68 0 1.08304e-05 0.000468355
END DIST

Metal 3 DIAGUNDER 6
DIST count 13 width 0.14
0 0 1.33812e-05 0.000468355
0.14 0 1.35642e-05 0.000468355
0.28 0 1.40116e-05 0.000468355
0.35 0 1.39191e-05 0.000468355
0.42 0 1.38268e-05 0.000468355
0.49 0 1.37346e-05 0.000468355
0.56 0 1.36426e-05 0.000468355
0.63 0 1.35507e-05 0.000468355
0.7 0 1.34534e-05 0.000468355
0.84 0 1.1788e-05 0.000468355
1.12 0 9.56525e-06 0.000468355
1.4 0 9.28306e-06 0.000468355
1.68 0 7.3039e-06 0.000468355
END DIST

Metal 3 OVERUNDER
WIDTH Table 1 entries:  0.14

Metal 3 OVER 1 UNDER 4
DIST count 12 width 0.14
0.14 8.79541e-05 1.78018e-05 0.000468355
0.28 6.4691e-05 2.16978e-05 0.000468355
0.35 5.68702e-05 2.3427e-05 0.000468355
0.42 5.01568e-05 2.50426e-05 0.000468355
0.49 4.50067e-05 2.65259e-05 0.000468355
0.56 4.06859e-05 2.7906e-05 0.000468355
0.63 3.68734e-05 2.91985e-05 0.000468355
0.7 3.34538e-05 3.04093e-05 0.000468355
0.84 2.76353e-05 3.2603e-05 0.000468355
1.12 2.04706e-05 3.6116e-05 0.000468355
1.4 1.55865e-05 3.88511e-05 0.000468355
1.68 0 5.3319e-05 0.000468355
END DIST

Metal 3 OVER 1 UNDER 5
DIST count 12 width 0.14
0.14 8.99364e-05 1.31241e-05 0.000468355
0.28 6.7024e-05 1.54753e-05 0.000468355
0.35 5.9576e-05 1.65559e-05 0.000468355
0.42 5.32328e-05 1.75946e-05 0.000468355
0.49 4.84775e-05 1.85663e-05 0.000468355
0.56 4.44708e-05 1.94942e-05 0.000468355
0.63 4.09104e-05 2.0388e-05 0.000468355
0.7 3.76793e-05 2.12493e-05 0.000468355
0.84 3.20401e-05 2.28722e-05 0.000468355
1.12 2.46723e-05 2.56514e-05 0.000468355
1.4 1.92701e-05 2.80393e-05 0.000468355
1.68 0 4.54973e-05 0.000468355
END DIST

Metal 3 OVER 1 UNDER 6
DIST count 12 width 0.14
0.14 9.02093e-05 1.15675e-05 0.000468355
0.28 6.71557e-05 1.36243e-05 0.000468355
0.35 5.9842e-05 1.45764e-05 0.000468355
0.42 5.36728e-05 1.54959e-05 0.000468355
0.49 4.89934e-05 1.636e-05 0.000468355
0.56 4.50909e-05 1.71888e-05 0.000468355
0.63 4.1613e-05 1.79909e-05 0.000468355
0.7 3.84558e-05 1.87671e-05 0.000468355
0.84 3.30061e-05 2.02392e-05 0.000468355
1.12 2.57207e-05 2.27949e-05 0.000468355
1.4 2.03275e-05 2.50283e-05 0.000468355
1.68 0 4.33824e-05 0.000468355
END DIST

Metal 3 OVER 2 UNDER 4
DIST count 12 width 0.14
0.14 8.5325e-05 2.45991e-05 0.000468355
0.28 6.16285e-05 3.04728e-05 0.000468355
0.35 5.33311e-05 3.29662e-05 0.000468355
0.42 4.6227e-05 3.52241e-05 0.000468355
0.49 4.08034e-05 3.72452e-05 0.000468355
0.56 3.63165e-05 3.90731e-05 0.000468355
0.63 3.2398e-05 4.07359e-05 0.000468355
0.7 2.89457e-05 4.22885e-05 0.000468355
0.84 2.32321e-05 4.4927e-05 0.000468355
1.12 1.6689e-05 4.88309e-05 0.000468355
1.4 1.24997e-05 5.16302e-05 0.000468355
1.68 0 6.35432e-05 0.000468355
END DIST

Metal 3 OVER 2 UNDER 5
DIST count 12 width 0.14
0.14 8.69196e-05 2.00685e-05 0.000468355
0.28 6.37832e-05 2.42659e-05 0.000468355
0.35 5.60192e-05 2.61067e-05 0.000468355
0.42 4.93654e-05 2.78135e-05 0.000468355
0.49 4.43018e-05 2.93711e-05 0.000468355
0.56 4.00717e-05 3.08111e-05 0.000468355
0.63 3.63353e-05 3.2151e-05 0.000468355
0.7 3.29964e-05 3.34509e-05 0.000468355
0.84 2.73177e-05 3.56937e-05 0.000468355
1.12 2.03815e-05 3.91823e-05 0.000468355
1.4 1.56167e-05 4.19446e-05 0.000468355
1.68 0 5.64469e-05 0.000468355
END DIST

Metal 3 OVER 2 UNDER 6
DIST count 12 width 0.14
0.14 8.71352e-05 1.8632e-05 0.000468355
0.28 6.38543e-05 2.2525e-05 0.000468355
0.35 5.62425e-05 2.42404e-05 0.000468355
0.42 4.97771e-05 2.58354e-05 0.000468355
0.49 4.48284e-05 2.72959e-05 0.000468355
0.56 4.06893e-05 2.86501e-05 0.000468355
0.63 3.70201e-05 2.99134e-05 0.000468355
0.7 3.37373e-05 3.10933e-05 0.000468355
0.84 2.8211e-05 3.32216e-05 0.000468355
1.12 2.12989e-05 3.66125e-05 0.000468355
1.4 1.65086e-05 3.92337e-05 0.000468355
1.68 0 5.45095e-05 0.000468355
END DIST

Metal 4 RESOVER
WIDTH Table 1 entries:  0.3

Metal 4 RESOVER 0
DIST count 55 width 0.3
0 0 0 0.000126988
0 0.38 0 0.000126988
0 0.68 0 0.000126988
0 0.91 0 0.000126988
0 1.06 0 0.000126988
0 1.36 0 0.000126988
0 1.59 0 0.000126988
0 1.74 0 0.000126988
0 2.04 0 0.000126988
0 2.72 0 0.000126988
0.38 0.38 0 0.000126988
0.38 0.68 0 0.000126988
0.38 0.91 0 0.000126988
0.38 1.06 0 0.000126988
0.38 1.36 0 0.000126988
0.38 1.59 0 0.000126988
0.38 1.74 0 0.000126988
0.38 2.04 0 0.000126988
0.38 2.72 0 0.000126988
0.68 0.68 0 0.000126988
0.68 0.91 0 0.000126988
0.68 1.06 0 0.000126988
0.68 1.36 0 0.000126988
0.68 1.59 0 0.000126988
0.68 1.74 0 0.000126988
0.68 2.04 0 0.000126988
0.68 2.72 0 0.000126988
0.91 0.91 0 0.000126988
0.91 1.06 0 0.000126988
0.91 1.36 0 0.000126988
0.91 1.59 0 0.000126988
0.91 1.74 0 0.000126988
0.91 2.04 0 0.000126988
0.91 2.72 0 0.000126988
1.06 1.06 0 0.000126988
1.06 1.36 0 0.000126988
1.06 1.59 0 0.000126988
1.06 1.74 0 0.000126988
1.06 2.04 0 0.000126988
1.06 2.72 0 0.000126988
1.36 1.36 0 0.000126988
1.36 1.59 0 0.000126988
1.36 1.74 0 0.000126988
1.36 2.04 0 0.000126988
1.36 2.72 0 0.000126988
1.59 1.59 0 0.000126988
1.59 1.74 0 0.000126988
1.59 2.04 0 0.000126988
1.59 2.72 0 0.000126988
1.74 1.74 0 0.000126988
1.74 2.04 0 0.000126988
1.74 2.72 0 0.000126988
2.04 2.04 0 0.000126988
2.04 2.72 0 0.000126988
2.72 0 2.72 0.000126988
END DIST

Metal 4 RESOVER 1
DIST count 0 width 0.3
END DIST

Metal 4 RESOVER 2
DIST count 0 width 0.3
END DIST

Metal 4 RESOVER 3
DIST count 0 width 0.3
END DIST

Metal 4 OVER
WIDTH Table 1 entries:  0.3

Metal 4 OVER 0
DIST count 12 width 0.3
0.3 9.22295e-05 8.97545e-06 6.34939e-05
0.6 7.19806e-05 1.10331e-05 6.34939e-05
0.75 6.16561e-05 1.20442e-05 6.34939e-05
0.9 5.57759e-05 1.28864e-05 6.34939e-05
1.05 5.145e-05 1.36696e-05 6.34939e-05
1.2 4.70938e-05 1.44528e-05 6.34939e-05
1.35 4.37532e-05 1.51445e-05 6.34939e-05
1.5 4.15208e-05 1.57381e-05 6.34939e-05
1.8 3.70349e-05 1.69253e-05 6.34939e-05
2.4 2.88471e-05 1.91854e-05 6.34939e-05
3 2.52225e-05 2.08377e-05 6.34939e-05
3.6 0 4.40755e-05 6.34939e-05
END DIST

Metal 4 OVER 1
DIST count 12 width 0.3
0.3 9.05351e-05 1.30114e-05 6.34939e-05
0.6 6.69297e-05 1.52555e-05 6.34939e-05
0.75 5.8171e-05 1.6364e-05 6.34939e-05
0.9 5.24456e-05 1.73685e-05 6.34939e-05
1.05 4.80371e-05 1.83212e-05 6.34939e-05
1.2 4.40403e-05 1.92506e-05 6.34939e-05
1.35 4.07791e-05 2.01108e-05 6.34939e-05
1.5 3.82444e-05 2.08987e-05 6.34939e-05
1.8 3.36203e-05 2.24071e-05 6.34939e-05
2.4 2.5986e-05 2.5119e-05 6.34939e-05
3 2.16305e-05 2.72421e-05 6.34939e-05
3.6 0 4.70997e-05 6.34939e-05
END DIST

Metal 4 OVER 2
DIST count 12 width 0.3
0.3 8.93773e-05 1.58219e-05 6.34939e-05
0.6 6.55398e-05 1.87249e-05 6.34939e-05
0.75 5.66665e-05 2.01126e-05 6.34939e-05
0.9 5.09273e-05 2.13689e-05 6.34939e-05
1.05 4.64637e-05 2.25492e-05 6.34939e-05
1.2 4.23499e-05 2.36844e-05 6.34939e-05
1.35 3.89993e-05 2.47305e-05 6.34939e-05
1.5 3.64016e-05 2.56862e-05 6.34939e-05
1.8 3.16954e-05 2.74822e-05 6.34939e-05
2.4 2.40396e-05 3.06117e-05 6.34939e-05
3 1.98114e-05 3.2994e-05 6.34939e-05
3.6 0 5.13556e-05 6.34939e-05
END DIST

Metal 4 OVER 3
DIST count 12 width 0.3
0.3 8.588e-05 2.4905e-05 6.34939e-05
0.6 6.2026e-05 2.93995e-05 6.34939e-05
0.75 5.32112e-05 3.14148e-05 6.34939e-05
0.9 4.74155e-05 3.32089e-05 6.34939e-05
1.05 4.29351e-05 3.48494e-05 6.34939e-05
1.2 3.88317e-05 3.63767e-05 6.34939e-05
1.35 3.55206e-05 3.77553e-05 6.34939e-05
1.5 3.29867e-05 3.89912e-05 6.34939e-05
1.8 2.84474e-05 4.12152e-05 6.34939e-05
2.4 2.12136e-05 4.48065e-05 6.34939e-05
3 1.74424e-05 4.73128e-05 6.34939e-05
3.6 0 6.36565e-05 6.34939e-05
END DIST

Metal 4 UNDER
WIDTH Table 1 entries:  0.3

Metal 4 UNDER 5
DIST count 12 width 0.3
0.3 8.58816e-05 2.53408e-05 6.34939e-05
0.6 6.17927e-05 3.10797e-05 6.34939e-05
0.75 5.27001e-05 3.35706e-05 6.34939e-05
0.9 4.66132e-05 3.57609e-05 6.34939e-05
1.05 4.1861e-05 3.77294e-05 6.34939e-05
1.2 3.7521e-05 3.95264e-05 6.34939e-05
1.35 3.40087e-05 4.1125e-05 6.34939e-05
1.5 3.13093e-05 4.25383e-05 6.34939e-05
1.8 2.65432e-05 4.50147e-05 6.34939e-05
2.4 1.91626e-05 4.88307e-05 6.34939e-05
3 1.54659e-05 5.13547e-05 6.34939e-05
3.6 0 6.5818e-05 6.34939e-05
END DIST

Metal 4 UNDER 6
DIST count 12 width 0.3
0.3 9.01228e-05 1.18676e-05 6.34939e-05
0.6 6.61379e-05 1.51766e-05 6.34939e-05
0.75 5.72271e-05 1.67244e-05 6.34939e-05
0.9 5.13743e-05 1.81241e-05 6.34939e-05
1.05 4.67591e-05 1.94336e-05 6.34939e-05
1.2 4.24886e-05 2.06857e-05 6.34939e-05
1.35 3.89708e-05 2.1839e-05 6.34939e-05
1.5 3.6201e-05 2.28938e-05 6.34939e-05
1.8 3.11903e-05 2.48639e-05 6.34939e-05
2.4 2.30889e-05 2.82666e-05 6.34939e-05
3 1.85683e-05 3.08522e-05 6.34939e-05
3.6 0 4.79736e-05 6.34939e-05
END DIST

Metal 4 DIAGUNDER
WIDTH Table 1 entries:  0.3

Metal 4 DIAGUNDER 5
DIST count 13 width 0.3
0 0 4.08813e-05 6.34939e-05
0.3 0 3.80442e-05 6.34939e-05
0.6 0 3.59851e-05 6.34939e-05
0.75 0 3.42994e-05 6.34939e-05
0.9 0 3.27687e-05 6.34939e-05
1.05 0 3.13776e-05 6.34939e-05
1.2 0 3.01128e-05 6.34939e-05
1.35 0 2.89624e-05 6.34939e-05
1.5 0 2.7919e-05 6.34939e-05
1.8 0 2.61011e-05 6.34939e-05
2.4 0 2.33393e-05 6.34939e-05
3 0 2.14369e-05 6.34939e-05
3.6 0 1.05199e-05 6.34939e-05
END DIST

Metal 4 DIAGUNDER 6
DIST count 13 width 0.3
0 0 2.37164e-05 6.34939e-05
0.3 0 2.38732e-05 6.34939e-05
0.6 0 2.46668e-05 6.34939e-05
0.75 0 2.42045e-05 6.34939e-05
0.9 0 2.37523e-05 6.34939e-05
1.05 0 2.33093e-05 6.34939e-05
1.2 0 2.28752e-05 6.34939e-05
1.35 0 2.24495e-05 6.34939e-05
1.5 0 2.20225e-05 6.34939e-05
1.8 0 2.1193e-05 6.34939e-05
2.4 0 1.96635e-05 6.34939e-05
3 0 1.55325e-05 6.34939e-05
3.6 0 9.95313e-06 6.34939e-05
END DIST

Metal 4 OVERUNDER
WIDTH Table 1 entries:  0.3

Metal 4 OVER 1 UNDER 5
DIST count 12 width 0.3
0.3 8.50314e-05 2.81924e-05 6.34939e-05
0.6 5.90635e-05 3.45055e-05 6.34939e-05
0.75 5.06059e-05 3.71686e-05 6.34939e-05
0.9 4.44815e-05 3.95277e-05 6.34939e-05
1.05 3.96004e-05 4.16453e-05 6.34939e-05
1.2 3.5372e-05 4.35609e-05 6.34939e-05
1.35 3.18578e-05 4.52737e-05 6.34939e-05
1.5 2.89889e-05 4.68019e-05 6.34939e-05
1.8 2.41538e-05 4.94466e-05 6.34939e-05
2.4 1.71348e-05 5.3441e-05 6.34939e-05
3 1.32086e-05 5.61218e-05 6.34939e-05
3.6 0 6.84728e-05 6.34939e-05
END DIST

Metal 4 OVER 1 UNDER 6
DIST count 12 width 0.3
0.3 8.90824e-05 1.50706e-05 6.34939e-05
0.6 6.32966e-05 1.88707e-05 6.34939e-05
0.75 5.51387e-05 2.05791e-05 6.34939e-05
0.9 4.92578e-05 2.20814e-05 6.34939e-05
1.05 4.45114e-05 2.35547e-05 6.34939e-05
1.2 4.03405e-05 2.49484e-05 6.34939e-05
1.35 3.68019e-05 2.62447e-05 6.34939e-05
1.5 3.38393e-05 2.74463e-05 6.34939e-05
1.8 2.8708e-05 2.96548e-05 6.34939e-05
2.4 2.08776e-05 3.33715e-05 6.34939e-05
3 1.60804e-05 3.6217e-05 6.34939e-05
3.6 0 5.10527e-05 6.34939e-05
END DIST

Metal 4 OVER 2 UNDER 5
DIST count 12 width 0.3
0.3 8.42478e-05 3.10026e-05 6.34939e-05
0.6 5.78632e-05 3.81564e-05 6.34939e-05
0.75 4.92198e-05 4.11052e-05 6.34939e-05
0.9 4.29904e-05 4.36929e-05 6.34939e-05
1.05 3.80176e-05 4.59954e-05 6.34939e-05
1.2 3.36986e-05 4.80601e-05 6.34939e-05
1.35 3.01331e-05 4.98923e-05 6.34939e-05
1.5 2.72459e-05 5.15155e-05 6.34939e-05
1.8 2.24341e-05 5.42936e-05 6.34939e-05
2.4 1.55923e-05 5.84097e-05 6.34939e-05
3 1.19029e-05 6.11109e-05 6.34939e-05
3.6 0 7.23505e-05 6.34939e-05
END DIST

Metal 4 OVER 2 UNDER 6
DIST count 12 width 0.3
0.3 8.80937e-05 1.77781e-05 6.34939e-05
0.6 6.20945e-05 2.22613e-05 6.34939e-05
0.75 5.37599e-05 2.4256e-05 6.34939e-05
0.9 4.77803e-05 2.60028e-05 6.34939e-05
1.05 4.29363e-05 2.76977e-05 6.34939e-05
1.2 3.8658e-05 2.92843e-05 6.34939e-05
1.35 3.50443e-05 3.07481e-05 6.34939e-05
1.5 3.20368e-05 3.20946e-05 6.34939e-05
1.8 2.68726e-05 3.45345e-05 6.34939e-05
2.4 1.91341e-05 3.85354e-05 6.34939e-05
3 1.4545e-05 4.15053e-05 6.34939e-05
3.6 0 5.50585e-05 6.34939e-05
END DIST

Metal 4 OVER 3 UNDER 5
DIST count 12 width 0.3
0.3 8.12436e-05 4.00409e-05 6.34939e-05
0.6 5.44738e-05 4.88901e-05 6.34939e-05
0.75 4.57434e-05 5.24373e-05 6.34939e-05
0.9 3.94642e-05 5.54821e-05 6.34939e-05
1.05 3.4526e-05 5.81243e-05 6.34939e-05
1.2 3.02991e-05 6.04363e-05 6.34939e-05
1.35 2.68695e-05 6.24439e-05 6.34939e-05
1.5 2.41464e-05 6.41861e-05 6.34939e-05
1.8 1.96903e-05 6.70811e-05 6.34939e-05
2.4 1.35203e-05 7.11596e-05 6.34939e-05
3 1.0359e-05 7.36808e-05 6.34939e-05
3.6 0 8.35483e-05 6.34939e-05
END DIST

Metal 4 OVER 3 UNDER 6
DIST count 12 width 0.3
0.3 8.48812e-05 2.68858e-05 6.34939e-05
0.6 5.86744e-05 3.29471e-05 6.34939e-05
0.75 5.0301e-05 3.55769e-05 6.34939e-05
0.9 4.42695e-05 3.78992e-05 6.34939e-05
1.05 3.94279e-05 4.00251e-05 6.34939e-05
1.2 3.519e-05 4.19643e-05 6.34939e-05
1.35 3.16536e-05 4.37088e-05 6.34939e-05
1.5 2.87517e-05 4.52785e-05 6.34939e-05
1.8 2.38406e-05 4.80223e-05 6.34939e-05
2.4 1.66699e-05 5.22399e-05 6.34939e-05
3 1.26191e-05 5.51348e-05 6.34939e-05
3.6 0 6.70035e-05 6.34939e-05
END DIST

Metal 5 RESOVER
WIDTH Table 1 entries:  0.3

Metal 5 RESOVER 0
DIST count 55 width 0.3
0 0 0 0.000126988
0 0.62 0 0.000126988
0 0.92 0 0.000126988
0 1.39 0 0.000126988
0 1.54 0 0.000126988
0 1.84 0 0.000126988
0 2.31 0 0.000126988
0 2.46 0 0.000126988
0 2.76 0 0.000126988
0 3.68 0 0.000126988
0.62 0.62 0 0.000126988
0.62 0.92 0 0.000126988
0.62 1.39 0 0.000126988
0.62 1.54 0 0.000126988
0.62 1.84 0 0.000126988
0.62 2.31 0 0.000126988
0.62 2.46 0 0.000126988
0.62 2.76 0 0.000126988
0.62 3.68 0 0.000126988
0.92 0.92 0 0.000126988
0.92 1.39 0 0.000126988
0.92 1.54 0 0.000126988
0.92 1.84 0 0.000126988
0.92 2.31 0 0.000126988
0.92 2.46 0 0.000126988
0.92 2.76 0 0.000126988
0.92 3.68 0 0.000126988
1.39 1.39 0 0.000126988
1.39 1.54 0 0.000126988
1.39 1.84 0 0.000126988
1.39 2.31 0 0.000126988
1.39 2.46 0 0.000126988
1.39 2.76 0 0.000126988
1.39 3.68 0 0.000126988
1.54 1.54 0 0.000126988
1.54 1.84 0 0.000126988
1.54 2.31 0 0.000126988
1.54 2.46 0 0.000126988
1.54 2.76 0 0.000126988
1.54 3.68 0 0.000126988
1.84 1.84 0 0.000126988
1.84 2.31 0 0.000126988
1.84 2.46 0 0.000126988
1.84 2.76 0 0.000126988
1.84 3.68 0 0.000126988
2.31 2.31 0 0.000126988
2.31 2.46 0 0.000126988
2.31 2.76 0 0.000126988
2.31 3.68 0 0.000126988
2.46 2.46 0 0.000126988
2.46 2.76 0 0.000126988
2.46 3.68 0 0.000126988
2.76 2.76 0 0.000126988
2.76 3.68 0 0.000126988
3.68 0 3.68 0.000126988
END DIST

Metal 5 RESOVER 1
DIST count 0 width 0.3
END DIST

Metal 5 RESOVER 2
DIST count 0 width 0.3
END DIST

Metal 5 RESOVER 3
DIST count 0 width 0.3
END DIST

Metal 5 RESOVER 4
DIST count 0 width 0.3
END DIST

Metal 5 OVER
WIDTH Table 1 entries:  0.3

Metal 5 OVER 0
DIST count 12 width 0.3
0.3 9.32246e-05 7.70756e-06 6.34939e-05
0.6 7.35275e-05 9.29167e-06 6.34939e-05
0.75 6.33862e-05 1.00837e-05 6.34939e-05
0.9 5.76251e-05 1.07249e-05 6.34939e-05
1.05 5.33943e-05 1.13134e-05 6.34939e-05
1.2 4.91313e-05 1.19019e-05 6.34939e-05
1.35 4.58506e-05 1.24214e-05 6.34939e-05
1.5 4.36417e-05 1.2867e-05 6.34939e-05
1.8 3.92007e-05 1.37582e-05 6.34939e-05
2.4 3.10727e-05 1.54705e-05 6.34939e-05
3 2.7395e-05 1.68103e-05 6.34939e-05
3.6 0 4.18507e-05 6.34939e-05
END DIST

Metal 5 OVER 1
DIST count 12 width 0.3
0.3 9.25655e-05 1.08076e-05 6.34939e-05
0.6 6.94846e-05 1.23245e-05 6.34939e-05
0.75 6.08799e-05 1.30924e-05 6.34939e-05
0.9 5.53004e-05 1.37808e-05 6.34939e-05
1.05 5.10028e-05 1.44359e-05 6.34939e-05
1.2 4.70357e-05 1.50824e-05 6.34939e-05
1.35 4.38161e-05 1.56848e-05 6.34939e-05
1.5 4.13524e-05 1.62401e-05 6.34939e-05
1.8 3.68695e-05 1.73201e-05 6.34939e-05
2.4 2.93558e-05 1.93238e-05 6.34939e-05
3 2.49525e-05 2.09905e-05 6.34939e-05
3.6 0 4.29942e-05 6.34939e-05
END DIST

Metal 5 OVER 2
DIST count 12 width 0.3
0.3 9.22331e-05 1.20784e-05 6.34939e-05
0.6 6.89885e-05 1.37665e-05 6.34939e-05
0.75 6.03526e-05 1.46185e-05 6.34939e-05
0.9 5.47136e-05 1.53885e-05 6.34939e-05
1.05 5.03531e-05 1.61222e-05 6.34939e-05
1.2 4.63335e-05 1.68439e-05 6.34939e-05
1.35 4.31235e-05 1.75182e-05 6.34939e-05
1.5 4.06203e-05 1.81421e-05 6.34939e-05
1.8 3.60373e-05 1.93492e-05 6.34939e-05
2.4 2.8406e-05 2.15695e-05 6.34939e-05
3 2.39375e-05 2.34091e-05 6.34939e-05
3.6 0 4.52155e-05 6.34939e-05
END DIST

Metal 5 OVER 3
DIST count 12 width 0.3
0.3 9.16587e-05 1.35514e-05 6.34939e-05
0.6 6.82673e-05 1.56075e-05 6.34939e-05
0.75 5.95503e-05 1.66175e-05 6.34939e-05
0.9 5.38322e-05 1.75322e-05 6.34939e-05
1.05 4.94137e-05 1.83987e-05 6.34939e-05
1.2 4.54163e-05 1.92427e-05 6.34939e-05
1.35 4.21383e-05 2.00298e-05 6.34939e-05
1.5 3.95711e-05 2.07576e-05 6.34939e-05
1.8 3.4888e-05 2.21485e-05 6.34939e-05
2.4 2.71548e-05 2.46562e-05 6.34939e-05
3 2.26851e-05 2.66983e-05 6.34939e-05
3.6 0 4.74444e-05 6.34939e-05
END DIST

Metal 5 OVER 4
DIST count 12 width 0.3
0.3 8.69613e-05 2.25158e-05 6.34939e-05
0.6 6.34001e-05 2.67636e-05 6.34939e-05
0.75 5.46862e-05 2.86699e-05 6.34939e-05
0.9 4.89497e-05 3.03708e-05 6.34939e-05
1.05 4.45066e-05 3.19264e-05 6.34939e-05
1.2 4.04299e-05 3.33729e-05 6.34939e-05
1.35 3.71226e-05 3.46852e-05 6.34939e-05
1.5 3.45712e-05 3.58693e-05 6.34939e-05
1.8 2.99894e-05 3.79942e-05 6.34939e-05
2.4 2.26546e-05 4.14172e-05 6.34939e-05
3 1.87475e-05 4.38692e-05 6.34939e-05
3.6 0 6.1337e-05 6.34939e-05
END DIST

Metal 5 UNDER
WIDTH Table 1 entries:  0.3

Metal 5 UNDER 6
DIST count 12 width 0.3
0.3 8.80976e-05 1.81685e-05 6.34939e-05
0.6 6.4172e-05 2.29021e-05 6.34939e-05
0.75 5.51911e-05 2.49979e-05 6.34939e-05
0.9 4.91764e-05 2.68603e-05 6.34939e-05
1.05 4.44718e-05 2.85527e-05 6.34939e-05
1.2 4.01636e-05 3.01149e-05 6.34939e-05
1.35 3.66525e-05 3.15248e-05 6.34939e-05
1.5 3.39241e-05 3.27908e-05 6.34939e-05
1.8 2.9074e-05 3.50405e-05 6.34939e-05
2.4 2.14636e-05 3.86011e-05 6.34939e-05
3 1.74862e-05 4.11012e-05 6.34939e-05
3.6 0 5.73493e-05 6.34939e-05
END DIST

Metal 5 DIAGUNDER
WIDTH Table 1 entries:  0.3

Metal 5 DIAGUNDER 6
DIST count 13 width 0.3
0 0 4.64806e-05 6.34939e-05
0.3 0 3.79756e-05 6.34939e-05
0.6 0 3.62825e-05 6.34939e-05
0.75 0 3.47552e-05 6.34939e-05
0.9 0 3.33359e-05 6.34939e-05
1.05 0 3.20153e-05 6.34939e-05
1.2 0 3.07851e-05 6.34939e-05
1.35 0 2.96377e-05 6.34939e-05
1.5 0 2.85663e-05 6.34939e-05
1.8 0 2.66246e-05 6.34939e-05
2.4 0 2.34238e-05 6.34939e-05
3 0 2.09242e-05 6.34939e-05
3.6 0 1.44256e-05 6.34939e-05
END DIST

Metal 5 OVERUNDER
WIDTH Table 1 entries:  0.3

Metal 5 OVER 1 UNDER 6
DIST count 12 width 0.3
0.3 8.78637e-05 2.03716e-05 6.34939e-05
0.6 6.2095e-05 2.52254e-05 6.34939e-05
0.75 5.38238e-05 2.73654e-05 6.34939e-05
0.9 4.78465e-05 2.92967e-05 6.34939e-05
1.05 4.30621e-05 3.10585e-05 6.34939e-05
1.2 3.88632e-05 3.26779e-05 6.34939e-05
1.35 3.5353e-05 3.41506e-05 6.34939e-05
1.5 3.24763e-05 3.54871e-05 6.34939e-05
1.8 2.75819e-05 3.78491e-05 6.34939e-05
2.4 2.02825e-05 4.15558e-05 6.34939e-05
3 1.59825e-05 4.41958e-05 6.34939e-05
3.6 0 5.8659e-05 6.34939e-05
END DIST

Metal 5 OVER 2 UNDER 6
DIST count 12 width 0.3
0.3 8.75644e-05 2.15285e-05 6.34939e-05
0.6 6.17613e-05 2.6632e-05 6.34939e-05
0.75 5.34143e-05 2.88741e-05 6.34939e-05
0.9 4.73528e-05 3.08943e-05 6.34939e-05
1.05 4.24918e-05 3.27334e-05 6.34939e-05
1.2 3.82311e-05 3.44197e-05 6.34939e-05
1.35 3.47005e-05 3.59506e-05 6.34939e-05
1.5 3.17877e-05 3.73376e-05 6.34939e-05
1.8 2.68305e-05 3.97813e-05 6.34939e-05
2.4 1.9497e-05 4.35961e-05 6.34939e-05
3 1.5216e-05 4.62983e-05 6.34939e-05
3.6 0 6.04238e-05 6.34939e-05
END DIST

Metal 5 OVER 3 UNDER 6
DIST count 12 width 0.3
0.3 8.72297e-05 2.29894e-05 6.34939e-05
0.6 6.12003e-05 2.85156e-05 6.34939e-05
0.75 5.27295e-05 3.09209e-05 6.34939e-05
0.9 4.65589e-05 3.30791e-05 6.34939e-05
1.05 4.16151e-05 3.50349e-05 6.34939e-05
1.2 3.73274e-05 3.68199e-05 6.34939e-05
1.35 3.374e-05 3.84339e-05 6.34939e-05
1.5 3.07849e-05 3.9891e-05 6.34939e-05
1.8 2.57839e-05 4.24429e-05 6.34939e-05
2.4 1.84691e-05 4.63846e-05 6.34939e-05
3 1.42782e-05 4.9143e-05 6.34939e-05
3.6 0 6.24562e-05 6.34939e-05
END DIST

Metal 5 OVER 4 UNDER 6
DIST count 12 width 0.3
0.3 8.32873e-05 3.15538e-05 6.34939e-05
0.6 5.6609e-05 3.95937e-05 6.34939e-05
0.75 4.79596e-05 4.28871e-05 6.34939e-05
0.9 4.16901e-05 4.57487e-05 6.34939e-05
1.05 3.67239e-05 4.82574e-05 6.34939e-05
1.2 3.24499e-05 5.0473e-05 6.34939e-05
1.35 2.89481e-05 5.24184e-05 6.34939e-05
1.5 2.61328e-05 5.41262e-05 6.34939e-05
1.8 2.14896e-05 5.69963e-05 6.34939e-05
2.4 1.49797e-05 6.11204e-05 6.34939e-05
3 1.15236e-05 6.37692e-05 6.34939e-05
3.6 0 7.46926e-05 6.34939e-05
END DIST

Metal 6 RESOVER
WIDTH Table 1 entries:  1.6

Metal 6 RESOVER 0
DIST count 55 width 1.6
0 0 0 1.43583e-05
0 1.8 0 1.43583e-05
0 3.4 0 1.43583e-05
0 4.4 0 1.43583e-05
0 5.2 0 1.43583e-05
0 6.8 0 1.43583e-05
0 7.8 0 1.43583e-05
0 8.6 0 1.43583e-05
0 10.2 0 1.43583e-05
0 13.6 0 1.43583e-05
1.8 1.8 0 1.43583e-05
1.8 3.4 0 1.43583e-05
1.8 4.4 0 1.43583e-05
1.8 5.2 0 1.43583e-05
1.8 6.8 0 1.43583e-05
1.8 7.8 0 1.43583e-05
1.8 8.6 0 1.43583e-05
1.8 10.2 0 1.43583e-05
1.8 13.6 0 1.43583e-05
3.4 3.4 0 1.43583e-05
3.4 4.4 0 1.43583e-05
3.4 5.2 0 1.43583e-05
3.4 6.8 0 1.43583e-05
3.4 7.8 0 1.43583e-05
3.4 8.6 0 1.43583e-05
3.4 10.2 0 1.43583e-05
3.4 13.6 0 1.43583e-05
4.4 4.4 0 1.43583e-05
4.4 5.2 0 1.43583e-05
4.4 6.8 0 1.43583e-05
4.4 7.8 0 1.43583e-05
4.4 8.6 0 1.43583e-05
4.4 10.2 0 1.43583e-05
4.4 13.6 0 1.43583e-05
5.2 5.2 0 1.43583e-05
5.2 6.8 0 1.43583e-05
5.2 7.8 0 1.43583e-05
5.2 8.6 0 1.43583e-05
5.2 10.2 0 1.43583e-05
5.2 13.6 0 1.43583e-05
6.8 6.8 0 1.43583e-05
6.8 7.8 0 1.43583e-05
6.8 8.6 0 1.43583e-05
6.8 10.2 0 1.43583e-05
6.8 13.6 0 1.43583e-05
7.8 7.8 0 1.43583e-05
7.8 8.6 0 1.43583e-05
7.8 10.2 0 1.43583e-05
7.8 13.6 0 1.43583e-05
8.6 8.6 0 1.43583e-05
8.6 10.2 0 1.43583e-05
8.6 13.6 0 1.43583e-05
10.2 10.2 0 1.43583e-05
10.2 13.6 0 1.43583e-05
13.6 0 13.6 1.43583e-05
END DIST

Metal 6 RESOVER 1
DIST count 0 width 1.6
END DIST

Metal 6 RESOVER 2
DIST count 0 width 1.6
END DIST

Metal 6 RESOVER 3
DIST count 0 width 1.6
END DIST

Metal 6 RESOVER 4
DIST count 0 width 1.6
END DIST

Metal 6 RESOVER 5
DIST count 0 width 1.6
END DIST

Metal 6 OVER
WIDTH Table 1 entries:  1.6

Metal 6 OVER 0
DIST count 12 width 1.6
1.6 6.66627e-05 1.45043e-05 7.17915e-06
3.2 3.72249e-05 1.84291e-05 7.17915e-06
4 3.07494e-05 2.01525e-05 7.17915e-06
4.8 2.63407e-05 2.1734e-05 7.17915e-06
5.6 2.31409e-05 2.31853e-05 7.17915e-06
6.4 2.06515e-05 2.45173e-05 7.17915e-06
7.2 1.86919e-05 2.57396e-05 7.17915e-06
8 1.71097e-05 2.68615e-05 7.17915e-06
9.6 1.47095e-05 2.88362e-05 7.17915e-06
12.8 1.1626e-05 3.19022e-05 7.17915e-06
16 9.73139e-06 3.4081e-05 7.17915e-06
19.2 0 4.40858e-05 7.17915e-06
END DIST

Metal 6 OVER 1
DIST count 12 width 1.6
1.6 6.29196e-05 1.64899e-05 7.17915e-06
3.2 3.46421e-05 1.91398e-05 7.17915e-06
4 2.88362e-05 2.02634e-05 7.17915e-06
4.8 2.40282e-05 2.12715e-05 7.17915e-06
5.6 2.10482e-05 2.21756e-05 7.17915e-06
6.4 1.82651e-05 3.19919e-05 7.17915e-06
7.2 1.60883e-05 3.32927e-05 7.17915e-06
8 1.54206e-05 3.44716e-05 7.17915e-06
9.6 1.21403e-05 3.65091e-05 7.17915e-06
12.8 9.34397e-06 3.95634e-05 7.17915e-06
16 6.54131e-06 4.16361e-05 7.17915e-06
19.2 0 4.82681e-05 7.17915e-06
END DIST

Metal 6 OVER 2
DIST count 12 width 1.6
1.6 6.15492e-05 2.64609e-05 7.17915e-06
3.2 3.36711e-05 3.18489e-05 7.17915e-06
4 2.74269e-05 3.41099e-05 7.17915e-06
4.8 2.29852e-05 3.61213e-05 7.17915e-06
5.6 1.96231e-05 3.79107e-05 7.17915e-06
6.4 1.72071e-05 3.79075e-05 7.17915e-06
7.2 1.60577e-05 3.92507e-05 7.17915e-06
8 1.47486e-05 4.04584e-05 7.17915e-06
9.6 1.06138e-05 4.25212e-05 7.17915e-06
12.8 8.86515e-06 4.55487e-05 7.17915e-06
16 5.7098e-06 4.75498e-05 7.17915e-06
19.2 0 5.29395e-05 7.17915e-06
END DIST

Metal 6 OVER 3
DIST count 12 width 1.6
1.6 6.07751e-05 3.21698e-05 7.17915e-06
3.2 3.20533e-05 3.84804e-05 7.17915e-06
4 2.72149e-05 3.88436e-05 7.17915e-06
4.8 2.23892e-05 4.08074e-05 7.17915e-06
5.6 1.8029e-05 4.50064e-05 7.17915e-06
6.4 1.60463e-05 4.3926e-05 7.17915e-06
7.2 1.46743e-05 4.6754e-05 7.17915e-06
8 1.31499e-05 4.65322e-05 7.17915e-06
9.6 1.06158e-05 4.85992e-05 7.17915e-06
12.8 8.02134e-06 5.15589e-05 7.17915e-06
16 4.77452e-06 5.34599e-05 7.17915e-06
19.2 0 5.92968e-05 7.17915e-06
END DIST

Metal 6 OVER 4
DIST count 12 width 1.6
1.6 5.55994e-05 3.3138e-05 7.17915e-06
3.2 2.72559e-05 4.10486e-05 7.17915e-06
4 2.11778e-05 4.41059e-05 7.17915e-06
4.8 1.96147e-05 4.29283e-05 7.17915e-06
5.6 1.39616e-05 4.88362e-05 7.17915e-06
6.4 1.41126e-05 4.64272e-05 7.17915e-06
7.2 1.39169e-05 4.78137e-05 7.17915e-06
8 9.8897e-06 4.90089e-05 7.17915e-06
9.6 8.97598e-06 5.09133e-05 7.17915e-06
12.8 6.3905e-06 5.34918e-05 7.17915e-06
16 3.92364e-06 5.50778e-05 7.17915e-06
19.2 0 6.01937e-05 7.17915e-06
END DIST

Metal 6 OVER 5
DIST count 12 width 1.6
1.6 4.77929e-05 7.37127e-05 7.17915e-06
3.2 2.73854e-05 7.99591e-05 7.17915e-06
4 2.17929e-05 8.28435e-05 7.17915e-06
4.8 1.80838e-05 8.50947e-05 7.17915e-06
5.6 1.54543e-05 8.68752e-05 7.17915e-06
6.4 1.34659e-05 8.83031e-05 7.17915e-06
7.2 1.19361e-05 8.9465e-05 7.17915e-06
8 1.0728e-05 9.04242e-05 7.17915e-06
9.6 8.95162e-06 9.1909e-05 7.17915e-06
12.8 6.79595e-06 9.38442e-05 7.17915e-06
16 5.54918e-06 9.50524e-05 7.17915e-06
19.2 0 0.000100611 7.17915e-06
END DIST

Metal 6 UNDER
WIDTH Table 0 entries: 

Metal 6 DIAGUNDER
WIDTH Table 0 entries: 
END DensityModel 0