sky130/openlane/rules.openrcx.sky130B.max.magic

Extraction Rules for OpenRCX

DIAGMODEL ON

LayerCount 6
DensityRate 1  0

DensityModel 0

Metal 1 RESOVER
WIDTH Table 1 entries:  0.17

Metal 1 RESOVER 0
DIST count 55 width 0.17
0 0 0 0.10101
0 0.29 0 0.10101
0 0.46 0 0.10101
0 0.665 0 0.10101
0 0.75 0 0.10101
0 0.92 0 0.10101
0 1.125 0 0.10101
0 1.21 0 0.10101
0 1.38 0 0.10101
0 1.84 0 0.10101
0.29 0.29 0 0.10101
0.29 0.46 0 0.10101
0.29 0.665 0 0.10101
0.29 0.75 0 0.10101
0.29 0.92 0 0.10101
0.29 1.125 0 0.10101
0.29 1.21 0 0.10101
0.29 1.38 0 0.10101
0.29 1.84 0 0.10101
0.46 0.46 0 0.10101
0.46 0.665 0 0.10101
0.46 0.75 0 0.10101
0.46 0.92 0 0.10101
0.46 1.125 0 0.10101
0.46 1.21 0 0.10101
0.46 1.38 0 0.10101
0.46 1.84 0 0.10101
0.665 0.665 0 0.10101
0.665 0.75 0 0.10101
0.665 0.92 0 0.10101
0.665 1.125 0 0.10101
0.665 1.21 0 0.10101
0.665 1.38 0 0.10101
0.665 1.84 0 0.10101
0.75 0.75 0 0.10101
0.75 0.92 0 0.10101
0.75 1.125 0 0.10101
0.75 1.21 0 0.10101
0.75 1.38 0 0.10101
0.75 1.84 0 0.10101
0.92 0.92 0 0.10101
0.92 1.125 0 0.10101
0.92 1.21 0 0.10101
0.92 1.38 0 0.10101
0.92 1.84 0 0.10101
1.125 1.125 0 0.10101
1.125 1.21 0 0.10101
1.125 1.38 0 0.10101
1.125 1.84 0 0.10101
1.21 1.21 0 0.10101
1.21 1.38 0 0.10101
1.21 1.84 0 0.10101
1.38 1.38 0 0.10101
1.38 1.84 0 0.10101
1.84 0 1.84 0.10101
END DIST

Metal 1 OVER
WIDTH Table 1 entries:  0.17

Metal 1 OVER 0
DIST count 12 width 0.17
0.17 0.000497977 4.50051e-05 0.0505051
0.34 0.000279412 4.50051e-05 0.0505051
0.425 0.000232192 4.50051e-05 0.0505051
0.51 0.000199448 4.50051e-05 0.0505051
0.595 0.000175236 4.50051e-05 0.0505051
0.68 0.000156519 4.50051e-05 0.0505051
0.765 0.000141568 4.50051e-05 0.0505051
0.85 0.000129322 4.50051e-05 0.0505051
1.02 0.000110405 4.50051e-05 0.0505051
1.36 8.56497e-05 4.50051e-05 0.0505051
1.7 3.92157e-05 4.50051e-05 0.0505051
2.04 0 4.50051e-05 0.0505051
END DIST

Metal 1 UNDER
WIDTH Table 1 entries:  0.17

Metal 1 UNDER 2
DIST count 12 width 0.17
0.17 0.000497977 0.00016261 0.0505051
0.34 0.000279412 0.00016261 0.0505051
0.425 0.000232192 0.00016261 0.0505051
0.51 0.000199448 0.00016261 0.0505051
0.595 0.000175236 0.00016261 0.0505051
0.68 0.000156519 0.00016261 0.0505051
0.765 0.000141568 0.00016261 0.0505051
0.85 0.000129322 0.00016261 0.0505051
1.02 0.000110405 0.00016261 0.0505051
1.36 8.56497e-05 0.00016261 0.0505051
1.7 3.92157e-05 0.00016261 0.0505051
2.04 0 0.00016261 0.0505051
END DIST

Metal 1 UNDER 3
DIST count 12 width 0.17
0.17 0.000497977 0.000107615 0.0505051
0.34 0.000279412 0.000107615 0.0505051
0.425 0.000232192 0.000107615 0.0505051
0.51 0.000199448 0.000107615 0.0505051
0.595 0.000175236 0.000107615 0.0505051
0.68 0.000156519 0.000107615 0.0505051
0.765 0.000141568 0.000107615 0.0505051
0.85 0.000129322 0.000107615 0.0505051
1.02 0.000110405 0.000107615 0.0505051
1.36 8.56497e-05 0.000107615 0.0505051
1.7 3.92157e-05 0.000107615 0.0505051
2.04 0 0.000107615 0.0505051
END DIST

Metal 1 UNDER 4
DIST count 12 width 0.17
0.17 0.000497977 8.27744e-05 0.0505051
0.34 0.000279412 8.27744e-05 0.0505051
0.425 0.000232192 8.27744e-05 0.0505051
0.51 0.000199448 8.27744e-05 0.0505051
0.595 0.000175236 8.27744e-05 0.0505051
0.68 0.000156519 8.27744e-05 0.0505051
0.765 0.000141568 8.27744e-05 0.0505051
0.85 0.000129322 8.27744e-05 0.0505051
1.02 0.000110405 8.27744e-05 0.0505051
1.36 8.56497e-05 8.27744e-05 0.0505051
1.7 3.92157e-05 8.27744e-05 0.0505051
2.04 0 8.27744e-05 0.0505051
END DIST

Metal 1 UNDER 5
DIST count 12 width 0.17
0.17 0.000497977 7.58113e-05 0.0505051
0.34 0.000279412 7.58113e-05 0.0505051
0.425 0.000232192 7.58113e-05 0.0505051
0.51 0.000199448 7.58113e-05 0.0505051
0.595 0.000175236 7.58113e-05 0.0505051
0.68 0.000156519 7.58113e-05 0.0505051
0.765 0.000141568 7.58113e-05 0.0505051
0.85 0.000129322 7.58113e-05 0.0505051
1.02 0.000110405 7.58113e-05 0.0505051
1.36 8.56497e-05 7.58113e-05 0.0505051
1.7 3.92157e-05 7.58113e-05 0.0505051
2.04 0 7.58113e-05 0.0505051
END DIST

Metal 1 UNDER 6
DIST count 12 width 0.17
0.17 0.000497977 5.72998e-05 0.0505051
0.34 0.000279412 5.72998e-05 0.0505051
0.425 0.000232192 5.72998e-05 0.0505051
0.51 0.000199448 5.72998e-05 0.0505051
0.595 0.000175236 5.72998e-05 0.0505051
0.68 0.000156519 5.72998e-05 0.0505051
0.765 0.000141568 5.72998e-05 0.0505051
0.85 0.000129322 5.72998e-05 0.0505051
1.02 0.000110405 5.72998e-05 0.0505051
1.36 8.56497e-05 5.72998e-05 0.0505051
1.7 3.92157e-05 5.72998e-05 0.0505051
2.04 0 5.72998e-05 0.0505051
END DIST

Metal 1 DIAGUNDER
WIDTH Table 1 entries:  0.17

Metal 1 DIAGUNDER 2
DIST count 13 width 0.17
0 0 7.57172e-05 0.0505051
0.17 0 0 0.0505051
0.34 0 0 0.0505051
0.425 0 0 0.0505051
0.51 0 0 0.0505051
0.595 0 0 0.0505051
0.68 0 0 0.0505051
0.765 0 0 0.0505051
0.85 0 0 0.0505051
1.02 0 0 0.0505051
1.36 0 0 0.0505051
1.7 0 0 0.0505051
2.04 0 0 0.0505051
END DIST

Metal 1 DIAGUNDER 3
DIST count 13 width 0.17
0 0 3.94545e-05 0.0505051
0.17 0 0 0.0505051
0.34 0 0 0.0505051
0.425 0 0 0.0505051
0.51 0 0 0.0505051
0.595 0 0 0.0505051
0.68 0 0 0.0505051
0.765 0 0 0.0505051
0.85 0 0 0.0505051
1.02 0 0 0.0505051
1.36 0 0 0.0505051
1.7 0 0 0.0505051
2.04 0 0 0.0505051
END DIST

Metal 1 DIAGUNDER 4
DIST count 13 width 0.17
0 0 1.62222e-05 0.0505051
0.17 0 0 0.0505051
0.34 0 0 0.0505051
0.425 0 0 0.0505051
0.51 0 0 0.0505051
0.595 0 0 0.0505051
0.68 0 0 0.0505051
0.765 0 0 0.0505051
0.85 0 0 0.0505051
1.02 0 0 0.0505051
1.36 0 0 0.0505051
1.7 0 0 0.0505051
2.04 0 0 0.0505051
END DIST

Metal 1 DIAGUNDER 5
DIST count 13 width 0.17
0 0 1.09798e-05 0.0505051
0.17 0 0 0.0505051
0.34 0 0 0.0505051
0.425 0 0 0.0505051
0.51 0 0 0.0505051
0.595 0 0 0.0505051
0.68 0 0 0.0505051
0.765 0 0 0.0505051
0.85 0 0 0.0505051
1.02 0 0 0.0505051
1.36 0 0 0.0505051
1.7 0 0 0.0505051
2.04 0 0 0.0505051
END DIST

Metal 1 DIAGUNDER 6
DIST count 0 width 0.17
END DIST

Metal 2 RESOVER
WIDTH Table 1 entries:  0.14

Metal 2 RESOVER 0
DIST count 55 width 0.14
0 0 0 0.00104618
0 0.2 0 0.00104618
0 0.34 0 0.00104618
0 0.47 0 0.00104618
0 0.54 0 0.00104618
0 0.68 0 0.00104618
0 0.81 0 0.00104618
0 0.88 0 0.00104618
0 1.02 0 0.00104618
0 1.36 0 0.00104618
0.2 0.2 0 0.00104618
0.2 0.34 0 0.00104618
0.2 0.47 0 0.00104618
0.2 0.54 0 0.00104618
0.2 0.68 0 0.00104618
0.2 0.81 0 0.00104618
0.2 0.88 0 0.00104618
0.2 1.02 0 0.00104618
0.2 1.36 0 0.00104618
0.34 0.34 0 0.00104618
0.34 0.47 0 0.00104618
0.34 0.54 0 0.00104618
0.34 0.68 0 0.00104618
0.34 0.81 0 0.00104618
0.34 0.88 0 0.00104618
0.34 1.02 0 0.00104618
0.34 1.36 0 0.00104618
0.47 0.47 0 0.00104618
0.47 0.54 0 0.00104618
0.47 0.68 0 0.00104618
0.47 0.81 0 0.00104618
0.47 0.88 0 0.00104618
0.47 1.02 0 0.00104618
0.47 1.36 0 0.00104618
0.54 0.54 0 0.00104618
0.54 0.68 0 0.00104618
0.54 0.81 0 0.00104618
0.54 0.88 0 0.00104618
0.54 1.02 0 0.00104618
0.54 1.36 0 0.00104618
0.68 0.68 0 0.00104618
0.68 0.81 0 0.00104618
0.68 0.88 0 0.00104618
0.68 1.02 0 0.00104618
0.68 1.36 0 0.00104618
0.81 0.81 0 0.00104618
0.81 0.88 0 0.00104618
0.81 1.02 0 0.00104618
0.81 1.36 0 0.00104618
0.88 0.88 0 0.00104618
0.88 1.02 0 0.00104618
0.88 1.36 0 0.00104618
1.02 1.02 0 0.00104618
1.02 1.36 0 0.00104618
1.36 0 1.36 0.00104618
END DIST

Metal 2 RESOVER 1
DIST count 0 width 0.14
END DIST

Metal 2 OVER
WIDTH Table 1 entries:  0.14

Metal 2 OVER 0
DIST count 12 width 0.14
0.14 0.000838745 4.36667e-05 0.000523088
0.28 0.000471303 4.36667e-05 0.000523088
0.35 0.000391492 4.36667e-05 0.000523088
0.42 0.000336067 4.36667e-05 0.000523088
0.49 0.000295057 4.36667e-05 0.000523088
0.56 0.000263348 4.36667e-05 0.000523088
0.63 0.000238021 4.36667e-05 0.000523088
0.7 0.000217283 4.36667e-05 0.000523088
0.84 0.000185267 4.36667e-05 0.000523088
1.12 0.000143435 4.36667e-05 0.000523088
1.4 0.000117182 4.36667e-05 0.000523088
1.68 0 9.77792e-05 0.000523088
END DIST

Metal 2 OVER 1
DIST count 12 width 0.14
0.14 0.000838745 0.000119272 0.000523088
0.28 0.000471303 0.000119272 0.000523088
0.35 0.000391492 0.000119272 0.000523088
0.42 0.000336067 0.000119272 0.000523088
0.49 0.000295057 0.000119272 0.000523088
0.56 0.000263348 0.000119272 0.000523088
0.63 0.000238021 0.000119272 0.000523088
0.7 0.000217283 0.000119272 0.000523088
0.84 0.000185267 0.000119272 0.000523088
1.12 0.000143435 0.000119272 0.000523088
1.4 0.000117182 0.000119272 0.000523088
1.68 0 0.000173385 0.000523088
END DIST

Metal 2 UNDER
WIDTH Table 1 entries:  0.14

Metal 2 UNDER 3
DIST count 12 width 0.14
0.14 0.000838745 0.000104211 0.000523088
0.28 0.000471303 0.000104211 0.000523088
0.35 0.000391492 0.000104211 0.000523088
0.42 0.000336067 0.000104211 0.000523088
0.49 0.000295057 0.000104211 0.000523088
0.56 0.000263348 0.000104211 0.000523088
0.63 0.000238021 0.000104211 0.000523088
0.7 0.000217283 0.000104211 0.000523088
0.84 0.000185267 0.000104211 0.000523088
1.12 0.000143435 0.000104211 0.000523088
1.4 0.000117182 0.000104211 0.000523088
1.68 0 0.000158323 0.000523088
END DIST

Metal 2 UNDER 4
DIST count 12 width 0.14
0.14 0.000838745 8.64374e-05 0.000523088
0.28 0.000471303 8.64374e-05 0.000523088
0.35 0.000391492 8.64374e-05 0.000523088
0.42 0.000336067 8.64374e-05 0.000523088
0.49 0.000295057 8.64374e-05 0.000523088
0.56 0.000263348 8.64374e-05 0.000523088
0.63 0.000238021 8.64374e-05 0.000523088
0.7 0.000217283 8.64374e-05 0.000523088
0.84 0.000185267 8.64374e-05 0.000523088
1.12 0.000143435 8.64374e-05 0.000523088
1.4 0.000117182 8.64374e-05 0.000523088
1.68 0 0.00014055 0.000523088
END DIST

Metal 2 UNDER 5
DIST count 12 width 0.14
0.14 0.000838745 7.71644e-05 0.000523088
0.28 0.000471303 7.71644e-05 0.000523088
0.35 0.000391492 7.71644e-05 0.000523088
0.42 0.000336067 7.71644e-05 0.000523088
0.49 0.000295057 7.71644e-05 0.000523088
0.56 0.000263348 7.71644e-05 0.000523088
0.63 0.000238021 7.71644e-05 0.000523088
0.7 0.000217283 7.71644e-05 0.000523088
0.84 0.000185267 7.71644e-05 0.000523088
1.12 0.000143435 7.71644e-05 0.000523088
1.4 0.000117182 7.71644e-05 0.000523088
1.68 0 0.000131277 0.000523088
END DIST

Metal 2 UNDER 6
DIST count 12 width 0.14
0.14 0.000838745 5.98756e-05 0.000523088
0.28 0.000471303 5.98756e-05 0.000523088
0.35 0.000391492 5.98756e-05 0.000523088
0.42 0.000336067 5.98756e-05 0.000523088
0.49 0.000295057 5.98756e-05 0.000523088
0.56 0.000263348 5.98756e-05 0.000523088
0.63 0.000238021 5.98756e-05 0.000523088
0.7 0.000217283 5.98756e-05 0.000523088
0.84 0.000185267 5.98756e-05 0.000523088
1.12 0.000143435 5.98756e-05 0.000523088
1.4 0.000117182 5.98756e-05 0.000523088
1.68 0 0.000113988 0.000523088
END DIST

Metal 2 DIAGUNDER
WIDTH Table 1 entries:  0.14

Metal 2 DIAGUNDER 3
DIST count 13 width 0.14
0 0 9.05051e-06 0.000523088
0.14 0 0 0.000523088
0.28 0 0 0.000523088
0.35 0 0 0.000523088
0.42 0 0 0.000523088
0.49 0 0 0.000523088
0.56 0 0 0.000523088
0.63 0 0 0.000523088
0.7 0 0 0.000523088
0.84 0 0 0.000523088
1.12 0 0 0.000523088
1.4 0 0 0.000523088
1.68 0 0 0.000523088
END DIST

Metal 2 DIAGUNDER 4
DIST count 13 width 0.14
0 0 2.50303e-05 0.000523088
0.14 0 0 0.000523088
0.28 0 0 0.000523088
0.35 0 0 0.000523088
0.42 0 0 0.000523088
0.49 0 0 0.000523088
0.56 0 0 0.000523088
0.63 0 0 0.000523088
0.7 0 0 0.000523088
0.84 0 0 0.000523088
1.12 0 0 0.000523088
1.4 0 0 0.000523088
1.68 0 0 0.000523088
END DIST

Metal 2 DIAGUNDER 5
DIST count 13 width 0.14
0 0 1.69899e-05 0.000523088
0.14 0 0 0.000523088
0.28 0 0 0.000523088
0.35 0 0 0.000523088
0.42 0 0 0.000523088
0.49 0 0 0.000523088
0.56 0 0 0.000523088
0.63 0 0 0.000523088
0.7 0 0 0.000523088
0.84 0 0 0.000523088
1.12 0 0 0.000523088
1.4 0 0 0.000523088
1.68 0 0 0.000523088
END DIST

Metal 2 DIAGUNDER 6
DIST count 13 width 0.14
0 0 1.23838e-05 0.000523088
0.14 0 0 0.000523088
0.28 0 0 0.000523088
0.35 0 0 0.000523088
0.42 0 0 0.000523088
0.49 0 0 0.000523088
0.56 0 0 0.000523088
0.63 0 0 0.000523088
0.7 0 0 0.000523088
0.84 0 0 0.000523088
1.12 0 0 0.000523088
1.4 0 0 0.000523088
1.68 0 0 0.000523088
END DIST

Metal 2 OVERUNDER
WIDTH Table 1 entries:  0.14

Metal 2 OVER 1 UNDER 3
DIST count 12 width 0.14
0.14 0.000838745 0.000179817 0.000523088
0.28 0.000471303 0.000179817 0.000523088
0.35 0.000391492 0.000179817 0.000523088
0.42 0.000336067 0.000179817 0.000523088
0.49 0.000295057 0.000179817 0.000523088
0.56 0.000263348 0.000179817 0.000523088
0.63 0.000238021 0.000179817 0.000523088
0.7 0.000217283 0.000179817 0.000523088
0.84 0.000185267 0.000179817 0.000523088
1.12 0.000143435 0.000179817 0.000523088
1.4 0.000117182 0.000179817 0.000523088
1.68 0 0.000233929 0.000523088
END DIST

Metal 2 OVER 1 UNDER 4
DIST count 12 width 0.14
0.14 0.000838745 0.000162043 0.000523088
0.28 0.000471303 0.000162043 0.000523088
0.35 0.000391492 0.000162043 0.000523088
0.42 0.000336067 0.000162043 0.000523088
0.49 0.000295057 0.000162043 0.000523088
0.56 0.000263348 0.000162043 0.000523088
0.63 0.000238021 0.000162043 0.000523088
0.7 0.000217283 0.000162043 0.000523088
0.84 0.000185267 0.000162043 0.000523088
1.12 0.000143435 0.000162043 0.000523088
1.4 0.000117182 0.000162043 0.000523088
1.68 0 0.000216156 0.000523088
END DIST

Metal 2 OVER 1 UNDER 5
DIST count 12 width 0.14
0.14 0.000838745 0.00015277 0.000523088
0.28 0.000471303 0.00015277 0.000523088
0.35 0.000391492 0.00015277 0.000523088
0.42 0.000336067 0.00015277 0.000523088
0.49 0.000295057 0.00015277 0.000523088
0.56 0.000263348 0.00015277 0.000523088
0.63 0.000238021 0.00015277 0.000523088
0.7 0.000217283 0.00015277 0.000523088
0.84 0.000185267 0.00015277 0.000523088
1.12 0.000143435 0.00015277 0.000523088
1.4 0.000117182 0.00015277 0.000523088
1.68 0 0.000206883 0.000523088
END DIST

Metal 2 OVER 1 UNDER 6
DIST count 12 width 0.14
0.14 0.000838745 0.000135481 0.000523088
0.28 0.000471303 0.000135481 0.000523088
0.35 0.000391492 0.000135481 0.000523088
0.42 0.000336067 0.000135481 0.000523088
0.49 0.000295057 0.000135481 0.000523088
0.56 0.000263348 0.000135481 0.000523088
0.63 0.000238021 0.000135481 0.000523088
0.7 0.000217283 0.000135481 0.000523088
0.84 0.000185267 0.000135481 0.000523088
1.12 0.000143435 0.000135481 0.000523088
1.4 0.000117182 0.000135481 0.000523088
1.68 0 0.000189594 0.000523088
END DIST

Metal 3 RESOVER
WIDTH Table 1 entries:  0.14

Metal 3 RESOVER 0
DIST count 55 width 0.14
0 0 0 0.00104618
0 0.32 0 0.00104618
0 0.46 0 0.00104618
0 0.71 0 0.00104618
0 0.78 0 0.00104618
0 0.92 0 0.00104618
0 1.17 0 0.00104618
0 1.24 0 0.00104618
0 1.38 0 0.00104618
0 1.84 0 0.00104618
0.32 0.32 0 0.00104618
0.32 0.46 0 0.00104618
0.32 0.71 0 0.00104618
0.32 0.78 0 0.00104618
0.32 0.92 0 0.00104618
0.32 1.17 0 0.00104618
0.32 1.24 0 0.00104618
0.32 1.38 0 0.00104618
0.32 1.84 0 0.00104618
0.46 0.46 0 0.00104618
0.46 0.71 0 0.00104618
0.46 0.78 0 0.00104618
0.46 0.92 0 0.00104618
0.46 1.17 0 0.00104618
0.46 1.24 0 0.00104618
0.46 1.38 0 0.00104618
0.46 1.84 0 0.00104618
0.71 0.71 0 0.00104618
0.71 0.78 0 0.00104618
0.71 0.92 0 0.00104618
0.71 1.17 0 0.00104618
0.71 1.24 0 0.00104618
0.71 1.38 0 0.00104618
0.71 1.84 0 0.00104618
0.78 0.78 0 0.00104618
0.78 0.92 0 0.00104618
0.78 1.17 0 0.00104618
0.78 1.24 0 0.00104618
0.78 1.38 0 0.00104618
0.78 1.84 0 0.00104618
0.92 0.92 0 0.00104618
0.92 1.17 0 0.00104618
0.92 1.24 0 0.00104618
0.92 1.38 0 0.00104618
0.92 1.84 0 0.00104618
1.17 1.17 0 0.00104618
1.17 1.24 0 0.00104618
1.17 1.38 0 0.00104618
1.17 1.84 0 0.00104618
1.24 1.24 0 0.00104618
1.24 1.38 0 0.00104618
1.24 1.84 0 0.00104618
1.38 1.38 0 0.00104618
1.38 1.84 0 0.00104618
1.84 0 1.84 0.00104618
END DIST

Metal 3 RESOVER 1
DIST count 0 width 0.14
END DIST

Metal 3 RESOVER 2
DIST count 0 width 0.14
END DIST

Metal 3 OVER
WIDTH Table 1 entries:  0.14

Metal 3 OVER 0
DIST count 12 width 0.14
0.14 0.000889851 3.47273e-05 0.000523088
0.28 0.000497251 3.47273e-05 0.000523088
0.35 0.000413304 3.47273e-05 0.000523088
0.42 0.000355285 3.47273e-05 0.000523088
0.49 0.000312469 3.47273e-05 0.000523088
0.56 0.000279405 3.47273e-05 0.000523088
0.63 0.000253003 3.47273e-05 0.000523088
0.7 0.000231378 3.47273e-05 0.000523088
0.84 0.00019795 3.47273e-05 0.000523088
1.12 0.000154118 3.47273e-05 0.000523088
1.4 0.000126457 3.47273e-05 0.000523088
1.68 0 9.48524e-05 0.000523088
END DIST

Metal 3 OVER 1
DIST count 12 width 0.14
0.14 0.000889851 6.94309e-05 0.000523088
0.28 0.000497251 6.94309e-05 0.000523088
0.35 0.000413304 6.94309e-05 0.000523088
0.42 0.000355285 6.94309e-05 0.000523088
0.49 0.000312469 6.94309e-05 0.000523088
0.56 0.000279405 6.94309e-05 0.000523088
0.63 0.000253003 6.94309e-05 0.000523088
0.7 0.000231378 6.94309e-05 0.000523088
0.84 0.00019795 6.94309e-05 0.000523088
1.12 0.000154118 6.94309e-05 0.000523088
1.4 0.000126457 6.94309e-05 0.000523088
1.68 0 0.000129556 0.000523088
END DIST

Metal 3 OVER 2
DIST count 12 width 0.14
0.14 0.000889851 7.76097e-05 0.000523088
0.28 0.000497251 7.76097e-05 0.000523088
0.35 0.000413304 7.76097e-05 0.000523088
0.42 0.000355285 7.76097e-05 0.000523088
0.49 0.000312469 7.76097e-05 0.000523088
0.56 0.000279405 7.76097e-05 0.000523088
0.63 0.000253003 7.76097e-05 0.000523088
0.7 0.000231378 7.76097e-05 0.000523088
0.84 0.00019795 7.76097e-05 0.000523088
1.12 0.000154118 7.76097e-05 0.000523088
1.4 0.000126457 7.76097e-05 0.000523088
1.68 0 0.000137735 0.000523088
END DIST

Metal 3 UNDER
WIDTH Table 1 entries:  0.14

Metal 3 UNDER 4
DIST count 12 width 0.14
0.14 0.000889851 0.000118641 0.000523088
0.28 0.000497251 0.000118641 0.000523088
0.35 0.000413304 0.000118641 0.000523088
0.42 0.000355285 0.000118641 0.000523088
0.49 0.000312469 0.000118641 0.000523088
0.56 0.000279405 0.000118641 0.000523088
0.63 0.000253003 0.000118641 0.000523088
0.7 0.000231378 0.000118641 0.000523088
0.84 0.00019795 0.000118641 0.000523088
1.12 0.000154118 0.000118641 0.000523088
1.4 0.000126457 0.000118641 0.000523088
1.68 0 0.000178766 0.000523088
END DIST

Metal 3 UNDER 5
DIST count 12 width 0.14
0.14 0.000889851 8.02892e-05 0.000523088
0.28 0.000497251 8.02892e-05 0.000523088
0.35 0.000413304 8.02892e-05 0.000523088
0.42 0.000355285 8.02892e-05 0.000523088
0.49 0.000312469 8.02892e-05 0.000523088
0.56 0.000279405 8.02892e-05 0.000523088
0.63 0.000253003 8.02892e-05 0.000523088
0.7 0.000231378 8.02892e-05 0.000523088
0.84 0.00019795 8.02892e-05 0.000523088
1.12 0.000154118 8.02892e-05 0.000523088
1.4 0.000126457 8.02892e-05 0.000523088
1.68 0 0.000140414 0.000523088
END DIST

Metal 3 UNDER 6
DIST count 12 width 0.14
0.14 0.000889851 5.73169e-05 0.000523088
0.28 0.000497251 5.73169e-05 0.000523088
0.35 0.000413304 5.73169e-05 0.000523088
0.42 0.000355285 5.73169e-05 0.000523088
0.49 0.000312469 5.73169e-05 0.000523088
0.56 0.000279405 5.73169e-05 0.000523088
0.63 0.000253003 5.73169e-05 0.000523088
0.7 0.000231378 5.73169e-05 0.000523088
0.84 0.00019795 5.73169e-05 0.000523088
1.12 0.000154118 5.73169e-05 0.000523088
1.4 0.000126457 5.73169e-05 0.000523088
1.68 0 0.000117442 0.000523088
END DIST

Metal 3 DIAGUNDER
WIDTH Table 1 entries:  0.14

Metal 3 DIAGUNDER 4
DIST count 13 width 0.14
0 0 5.66061e-05 0.000523088
0.14 0 0 0.000523088
0.28 0 0 0.000523088
0.35 0 0 0.000523088
0.42 0 0 0.000523088
0.49 0 0 0.000523088
0.56 0 0 0.000523088
0.63 0 0 0.000523088
0.7 0 0 0.000523088
0.84 0 0 0.000523088
1.12 0 0 0.000523088
1.4 0 0 0.000523088
1.68 0 0 0.000523088
END DIST

Metal 3 DIAGUNDER 5
DIST count 13 width 0.14
0 0 2.50505e-05 0.000523088
0.14 0 0 0.000523088
0.28 0 0 0.000523088
0.35 0 0 0.000523088
0.42 0 0 0.000523088
0.49 0 0 0.000523088
0.56 0 0 0.000523088
0.63 0 0 0.000523088
0.7 0 0 0.000523088
0.84 0 0 0.000523088
1.12 0 0 0.000523088
1.4 0 0 0.000523088
1.68 0 0 0.000523088
END DIST

Metal 3 DIAGUNDER 6
DIST count 13 width 0.14
0 0 1.77172e-05 0.000523088
0.14 0 0 0.000523088
0.28 0 0 0.000523088
0.35 0 0 0.000523088
0.42 0 0 0.000523088
0.49 0 0 0.000523088
0.56 0 0 0.000523088
0.63 0 0 0.000523088
0.7 0 0 0.000523088
0.84 0 0 0.000523088
1.12 0 0 0.000523088
1.4 0 0 0.000523088
1.68 0 0 0.000523088
END DIST

Metal 3 OVERUNDER
WIDTH Table 1 entries:  0.14

Metal 3 OVER 1 UNDER 4
DIST count 12 width 0.14
0.14 0.000889851 0.000153344 0.000523088
0.28 0.000497251 0.000153344 0.000523088
0.35 0.000413304 0.000153344 0.000523088
0.42 0.000355285 0.000153344 0.000523088
0.49 0.000312469 0.000153344 0.000523088
0.56 0.000279405 0.000153344 0.000523088
0.63 0.000253003 0.000153344 0.000523088
0.7 0.000231378 0.000153344 0.000523088
0.84 0.00019795 0.000153344 0.000523088
1.12 0.000154118 0.000153344 0.000523088
1.4 0.000126457 0.000153344 0.000523088
1.68 0 0.000213469 0.000523088
END DIST

Metal 3 OVER 1 UNDER 5
DIST count 12 width 0.14
0.14 0.000889851 0.000114993 0.000523088
0.28 0.000497251 0.000114993 0.000523088
0.35 0.000413304 0.000114993 0.000523088
0.42 0.000355285 0.000114993 0.000523088
0.49 0.000312469 0.000114993 0.000523088
0.56 0.000279405 0.000114993 0.000523088
0.63 0.000253003 0.000114993 0.000523088
0.7 0.000231378 0.000114993 0.000523088
0.84 0.00019795 0.000114993 0.000523088
1.12 0.000154118 0.000114993 0.000523088
1.4 0.000126457 0.000114993 0.000523088
1.68 0 0.000175118 0.000523088
END DIST

Metal 3 OVER 1 UNDER 6
DIST count 12 width 0.14
0.14 0.000889851 9.20205e-05 0.000523088
0.28 0.000497251 9.20205e-05 0.000523088
0.35 0.000413304 9.20205e-05 0.000523088
0.42 0.000355285 9.20205e-05 0.000523088
0.49 0.000312469 9.20205e-05 0.000523088
0.56 0.000279405 9.20205e-05 0.000523088
0.63 0.000253003 9.20205e-05 0.000523088
0.7 0.000231378 9.20205e-05 0.000523088
0.84 0.00019795 9.20205e-05 0.000523088
1.12 0.000154118 9.20205e-05 0.000523088
1.4 0.000126457 9.20205e-05 0.000523088
1.68 0 0.000152146 0.000523088
END DIST

Metal 3 OVER 2 UNDER 4
DIST count 12 width 0.14
0.14 0.000889851 0.000161523 0.000523088
0.28 0.000497251 0.000161523 0.000523088
0.35 0.000413304 0.000161523 0.000523088
0.42 0.000355285 0.000161523 0.000523088
0.49 0.000312469 0.000161523 0.000523088
0.56 0.000279405 0.000161523 0.000523088
0.63 0.000253003 0.000161523 0.000523088
0.7 0.000231378 0.000161523 0.000523088
0.84 0.00019795 0.000161523 0.000523088
1.12 0.000154118 0.000161523 0.000523088
1.4 0.000126457 0.000161523 0.000523088
1.68 0 0.000221648 0.000523088
END DIST

Metal 3 OVER 2 UNDER 5
DIST count 12 width 0.14
0.14 0.000889851 0.000123172 0.000523088
0.28 0.000497251 0.000123172 0.000523088
0.35 0.000413304 0.000123172 0.000523088
0.42 0.000355285 0.000123172 0.000523088
0.49 0.000312469 0.000123172 0.000523088
0.56 0.000279405 0.000123172 0.000523088
0.63 0.000253003 0.000123172 0.000523088
0.7 0.000231378 0.000123172 0.000523088
0.84 0.00019795 0.000123172 0.000523088
1.12 0.000154118 0.000123172 0.000523088
1.4 0.000126457 0.000123172 0.000523088
1.68 0 0.000183297 0.000523088
END DIST

Metal 3 OVER 2 UNDER 6
DIST count 12 width 0.14
0.14 0.000889851 0.000100199 0.000523088
0.28 0.000497251 0.000100199 0.000523088
0.35 0.000413304 0.000100199 0.000523088
0.42 0.000355285 0.000100199 0.000523088
0.49 0.000312469 0.000100199 0.000523088
0.56 0.000279405 0.000100199 0.000523088
0.63 0.000253003 0.000100199 0.000523088
0.7 0.000231378 0.000100199 0.000523088
0.84 0.00019795 0.000100199 0.000523088
1.12 0.000154118 0.000100199 0.000523088
1.4 0.000126457 0.000100199 0.000523088
1.68 0 0.000160324 0.000523088
END DIST

Metal 4 RESOVER
WIDTH Table 1 entries:  0.3

Metal 4 RESOVER 0
DIST count 55 width 0.3
0 0 0 0.000188552
0 0.38 0 0.000188552
0 0.68 0 0.000188552
0 0.91 0 0.000188552
0 1.06 0 0.000188552
0 1.36 0 0.000188552
0 1.59 0 0.000188552
0 1.74 0 0.000188552
0 2.04 0 0.000188552
0 2.72 0 0.000188552
0.38 0.38 0 0.000188552
0.38 0.68 0 0.000188552
0.38 0.91 0 0.000188552
0.38 1.06 0 0.000188552
0.38 1.36 0 0.000188552
0.38 1.59 0 0.000188552
0.38 1.74 0 0.000188552
0.38 2.04 0 0.000188552
0.38 2.72 0 0.000188552
0.68 0.68 0 0.000188552
0.68 0.91 0 0.000188552
0.68 1.06 0 0.000188552
0.68 1.36 0 0.000188552
0.68 1.59 0 0.000188552
0.68 1.74 0 0.000188552
0.68 2.04 0 0.000188552
0.68 2.72 0 0.000188552
0.91 0.91 0 0.000188552
0.91 1.06 0 0.000188552
0.91 1.36 0 0.000188552
0.91 1.59 0 0.000188552
0.91 1.74 0 0.000188552
0.91 2.04 0 0.000188552
0.91 2.72 0 0.000188552
1.06 1.06 0 0.000188552
1.06 1.36 0 0.000188552
1.06 1.59 0 0.000188552
1.06 1.74 0 0.000188552
1.06 2.04 0 0.000188552
1.06 2.72 0 0.000188552
1.36 1.36 0 0.000188552
1.36 1.59 0 0.000188552
1.36 1.74 0 0.000188552
1.36 2.04 0 0.000188552
1.36 2.72 0 0.000188552
1.59 1.59 0 0.000188552
1.59 1.74 0 0.000188552
1.59 2.04 0 0.000188552
1.59 2.72 0 0.000188552
1.74 1.74 0 0.000188552
1.74 2.04 0 0.000188552
1.74 2.72 0 0.000188552
2.04 2.04 0 0.000188552
2.04 2.72 0 0.000188552
2.72 0 2.72 0.000188552
END DIST

Metal 4 RESOVER 1
DIST count 0 width 0.3
END DIST

Metal 4 RESOVER 2
DIST count 0 width 0.3
END DIST

Metal 4 RESOVER 3
DIST count 0 width 0.3
END DIST

Metal 4 OVER
WIDTH Table 1 entries:  0.3

Metal 4 OVER 0
DIST count 12 width 0.3
0.3 0.000554112 3.94141e-05 9.42761e-05
0.6 0.000311553 3.94141e-05 9.42761e-05
0.75 0.000258699 3.94141e-05 9.42761e-05
0.9 0.000221966 3.94141e-05 9.42761e-05
1.05 0.00019478 3.94141e-05 9.42761e-05
1.2 0.000173759 3.94141e-05 9.42761e-05
1.35 9.42761e-05 3.94141e-05 9.42761e-05
1.5 8.48485e-05 3.94141e-05 9.42761e-05
1.8 7.07071e-05 3.94141e-05 9.42761e-05
2.4 0 3.94141e-05 9.42761e-05
3 0 3.94141e-05 9.42761e-05
3.6 0 3.94141e-05 9.42761e-05
END DIST

Metal 4 OVER 1
DIST count 12 width 0.3
0.3 0.000554112 8.64165e-05 9.42761e-05
0.6 0.000311553 8.64165e-05 9.42761e-05
0.75 0.000258699 8.64165e-05 9.42761e-05
0.9 0.000221966 8.64165e-05 9.42761e-05
1.05 0.00019478 8.64165e-05 9.42761e-05
1.2 0.000173759 8.64165e-05 9.42761e-05
1.35 9.42761e-05 8.64165e-05 9.42761e-05
1.5 8.48485e-05 8.64165e-05 9.42761e-05
1.8 7.07071e-05 8.64165e-05 9.42761e-05
2.4 0 8.64165e-05 9.42761e-05
3 0 8.64165e-05 9.42761e-05
3.6 0 8.64165e-05 9.42761e-05
END DIST

Metal 4 OVER 2
DIST count 12 width 0.3
0.3 0.000554112 0.000113273 9.42761e-05
0.6 0.000311553 0.000113273 9.42761e-05
0.75 0.000258699 0.000113273 9.42761e-05
0.9 0.000221966 0.000113273 9.42761e-05
1.05 0.00019478 0.000113273 9.42761e-05
1.2 0.000173759 0.000113273 9.42761e-05
1.35 9.42761e-05 0.000113273 9.42761e-05
1.5 8.48485e-05 0.000113273 9.42761e-05
1.8 7.07071e-05 0.000113273 9.42761e-05
2.4 0 0.000113273 9.42761e-05
3 0 0.000113273 9.42761e-05
3.6 0 0.000113273 9.42761e-05
END DIST

Metal 4 OVER 3
DIST count 12 width 0.3
0.3 0.000554112 0.000199707 9.42761e-05
0.6 0.000311553 0.000199707 9.42761e-05
0.75 0.000258699 0.000199707 9.42761e-05
0.9 0.000221966 0.000199707 9.42761e-05
1.05 0.00019478 0.000199707 9.42761e-05
1.2 0.000173759 0.000199707 9.42761e-05
1.35 9.42761e-05 0.000199707 9.42761e-05
1.5 8.48485e-05 0.000199707 9.42761e-05
1.8 7.07071e-05 0.000199707 9.42761e-05
2.4 0 0.000199707 9.42761e-05
3 0 0.000199707 9.42761e-05
3.6 0 0.000199707 9.42761e-05
END DIST

Metal 4 UNDER
WIDTH Table 1 entries:  0.3

Metal 4 UNDER 5
DIST count 12 width 0.3
0.3 0.000554112 0.000168162 9.42761e-05
0.6 0.000311553 0.000168162 9.42761e-05
0.75 0.000258699 0.000168162 9.42761e-05
0.9 0.000221966 0.000168162 9.42761e-05
1.05 0.00019478 0.000168162 9.42761e-05
1.2 0.000173759 0.000168162 9.42761e-05
1.35 9.42761e-05 0.000168162 9.42761e-05
1.5 8.48485e-05 0.000168162 9.42761e-05
1.8 7.07071e-05 0.000168162 9.42761e-05
2.4 0 0.000168162 9.42761e-05
3 0 0.000168162 9.42761e-05
3.6 0 0.000168162 9.42761e-05
END DIST

Metal 4 UNDER 6
DIST count 12 width 0.3
0.3 0.000554112 8.20418e-05 9.42761e-05
0.6 0.000311553 8.20418e-05 9.42761e-05
0.75 0.000258699 8.20418e-05 9.42761e-05
0.9 0.000221966 8.20418e-05 9.42761e-05
1.05 0.00019478 8.20418e-05 9.42761e-05
1.2 0.000173759 8.20418e-05 9.42761e-05
1.35 9.42761e-05 8.20418e-05 9.42761e-05
1.5 8.48485e-05 8.20418e-05 9.42761e-05
1.8 7.07071e-05 8.20418e-05 9.42761e-05
2.4 0 8.20418e-05 9.42761e-05
3 0 8.20418e-05 9.42761e-05
3.6 0 8.20418e-05 9.42761e-05
END DIST

Metal 4 DIAGUNDER
WIDTH Table 1 entries:  0.3

Metal 4 DIAGUNDER 5
DIST count 13 width 0.3
0 0 2.54545e-05 9.42761e-05
0.3 0 0 9.42761e-05
0.6 0 0 9.42761e-05
0.75 0 0 9.42761e-05
0.9 0 0 9.42761e-05
1.05 0 0 9.42761e-05
1.2 0 0 9.42761e-05
1.35 0 0 9.42761e-05
1.5 0 0 9.42761e-05
1.8 0 0 9.42761e-05
2.4 0 0 9.42761e-05
3 0 0 9.42761e-05
3.6 0 0 9.42761e-05
END DIST

Metal 4 DIAGUNDER 6
DIST count 13 width 0.3
0 0 3.43434e-05 9.42761e-05
0.3 0 0 9.42761e-05
0.6 0 0 9.42761e-05
0.75 0 0 9.42761e-05
0.9 0 0 9.42761e-05
1.05 0 0 9.42761e-05
1.2 0 0 9.42761e-05
1.35 0 0 9.42761e-05
1.5 0 0 9.42761e-05
1.8 0 0 9.42761e-05
2.4 0 0 9.42761e-05
3 0 0 9.42761e-05
3.6 0 0 9.42761e-05
END DIST

Metal 4 OVERUNDER
WIDTH Table 1 entries:  0.3

Metal 4 OVER 1 UNDER 5
DIST count 12 width 0.3
0.3 0.000554112 0.000215164 9.42761e-05
0.6 0.000311553 0.000215164 9.42761e-05
0.75 0.000258699 0.000215164 9.42761e-05
0.9 0.000221966 0.000215164 9.42761e-05
1.05 0.00019478 0.000215164 9.42761e-05
1.2 0.000173759 0.000215164 9.42761e-05
1.35 9.42761e-05 0.000215164 9.42761e-05
1.5 8.48485e-05 0.000215164 9.42761e-05
1.8 7.07071e-05 0.000215164 9.42761e-05
2.4 0 0.000215164 9.42761e-05
3 0 0.000215164 9.42761e-05
3.6 0 0.000215164 9.42761e-05
END DIST

Metal 4 OVER 1 UNDER 6
DIST count 12 width 0.3
0.3 0.000554112 0.000129044 9.42761e-05
0.6 0.000311553 0.000129044 9.42761e-05
0.75 0.000258699 0.000129044 9.42761e-05
0.9 0.000221966 0.000129044 9.42761e-05
1.05 0.00019478 0.000129044 9.42761e-05
1.2 0.000173759 0.000129044 9.42761e-05
1.35 9.42761e-05 0.000129044 9.42761e-05
1.5 8.48485e-05 0.000129044 9.42761e-05
1.8 7.07071e-05 0.000129044 9.42761e-05
2.4 0 0.000129044 9.42761e-05
3 0 0.000129044 9.42761e-05
3.6 0 0.000129044 9.42761e-05
END DIST

Metal 4 OVER 2 UNDER 5
DIST count 12 width 0.3
0.3 0.000554112 0.00024202 9.42761e-05
0.6 0.000311553 0.00024202 9.42761e-05
0.75 0.000258699 0.00024202 9.42761e-05
0.9 0.000221966 0.00024202 9.42761e-05
1.05 0.00019478 0.00024202 9.42761e-05
1.2 0.000173759 0.00024202 9.42761e-05
1.35 9.42761e-05 0.00024202 9.42761e-05
1.5 8.48485e-05 0.00024202 9.42761e-05
1.8 7.07071e-05 0.00024202 9.42761e-05
2.4 0 0.00024202 9.42761e-05
3 0 0.00024202 9.42761e-05
3.6 0 0.00024202 9.42761e-05
END DIST

Metal 4 OVER 2 UNDER 6
DIST count 12 width 0.3
0.3 0.000554112 0.0001559 9.42761e-05
0.6 0.000311553 0.0001559 9.42761e-05
0.75 0.000258699 0.0001559 9.42761e-05
0.9 0.000221966 0.0001559 9.42761e-05
1.05 0.00019478 0.0001559 9.42761e-05
1.2 0.000173759 0.0001559 9.42761e-05
1.35 9.42761e-05 0.0001559 9.42761e-05
1.5 8.48485e-05 0.0001559 9.42761e-05
1.8 7.07071e-05 0.0001559 9.42761e-05
2.4 0 0.0001559 9.42761e-05
3 0 0.0001559 9.42761e-05
3.6 0 0.0001559 9.42761e-05
END DIST

Metal 4 OVER 3 UNDER 5
DIST count 12 width 0.3
0.3 0.000554112 0.000328455 9.42761e-05
0.6 0.000311553 0.000328455 9.42761e-05
0.75 0.000258699 0.000328455 9.42761e-05
0.9 0.000221966 0.000328455 9.42761e-05
1.05 0.00019478 0.000328455 9.42761e-05
1.2 0.000173759 0.000328455 9.42761e-05
1.35 9.42761e-05 0.000328455 9.42761e-05
1.5 8.48485e-05 0.000328455 9.42761e-05
1.8 7.07071e-05 0.000328455 9.42761e-05
2.4 0 0.000328455 9.42761e-05
3 0 0.000328455 9.42761e-05
3.6 0 0.000328455 9.42761e-05
END DIST

Metal 4 OVER 3 UNDER 6
DIST count 12 width 0.3
0.3 0.000554112 0.000242335 9.42761e-05
0.6 0.000311553 0.000242335 9.42761e-05
0.75 0.000258699 0.000242335 9.42761e-05
0.9 0.000221966 0.000242335 9.42761e-05
1.05 0.00019478 0.000242335 9.42761e-05
1.2 0.000173759 0.000242335 9.42761e-05
1.35 9.42761e-05 0.000242335 9.42761e-05
1.5 8.48485e-05 0.000242335 9.42761e-05
1.8 7.07071e-05 0.000242335 9.42761e-05
2.4 0 0.000242335 9.42761e-05
3 0 0.000242335 9.42761e-05
3.6 0 0.000242335 9.42761e-05
END DIST

Metal 5 RESOVER
WIDTH Table 1 entries:  0.3

Metal 5 RESOVER 0
DIST count 55 width 0.3
0 0 0 0.000188552
0 0.62 0 0.000188552
0 0.92 0 0.000188552
0 1.39 0 0.000188552
0 1.54 0 0.000188552
0 1.84 0 0.000188552
0 2.31 0 0.000188552
0 2.46 0 0.000188552
0 2.76 0 0.000188552
0 3.68 0 0.000188552
0.62 0.62 0 0.000188552
0.62 0.92 0 0.000188552
0.62 1.39 0 0.000188552
0.62 1.54 0 0.000188552
0.62 1.84 0 0.000188552
0.62 2.31 0 0.000188552
0.62 2.46 0 0.000188552
0.62 2.76 0 0.000188552
0.62 3.68 0 0.000188552
0.92 0.92 0 0.000188552
0.92 1.39 0 0.000188552
0.92 1.54 0 0.000188552
0.92 1.84 0 0.000188552
0.92 2.31 0 0.000188552
0.92 2.46 0 0.000188552
0.92 2.76 0 0.000188552
0.92 3.68 0 0.000188552
1.39 1.39 0 0.000188552
1.39 1.54 0 0.000188552
1.39 1.84 0 0.000188552
1.39 2.31 0 0.000188552
1.39 2.46 0 0.000188552
1.39 2.76 0 0.000188552
1.39 3.68 0 0.000188552
1.54 1.54 0 0.000188552
1.54 1.84 0 0.000188552
1.54 2.31 0 0.000188552
1.54 2.46 0 0.000188552
1.54 2.76 0 0.000188552
1.54 3.68 0 0.000188552
1.84 1.84 0 0.000188552
1.84 2.31 0 0.000188552
1.84 2.46 0 0.000188552
1.84 2.76 0 0.000188552
1.84 3.68 0 0.000188552
2.31 2.31 0 0.000188552
2.31 2.46 0 0.000188552
2.31 2.76 0 0.000188552
2.31 3.68 0 0.000188552
2.46 2.46 0 0.000188552
2.46 2.76 0 0.000188552
2.46 3.68 0 0.000188552
2.76 2.76 0 0.000188552
2.76 3.68 0 0.000188552
3.68 0 3.68 0.000188552
END DIST

Metal 5 RESOVER 1
DIST count 0 width 0.3
END DIST

Metal 5 RESOVER 2
DIST count 0 width 0.3
END DIST

Metal 5 RESOVER 3
DIST count 0 width 0.3
END DIST

Metal 5 RESOVER 4
DIST count 0 width 0.3
END DIST

Metal 5 OVER
WIDTH Table 1 entries:  0.3

Metal 5 OVER 0
DIST count 12 width 0.3
0.3 0.000562124 3.5899e-05 9.42761e-05
0.6 0.000314638 3.5899e-05 9.42761e-05
0.75 0.000261521 3.5899e-05 9.42761e-05
0.9 0.000224763 3.5899e-05 9.42761e-05
1.05 0.000197615 3.5899e-05 9.42761e-05
1.2 0.000112795 3.5899e-05 9.42761e-05
1.35 0.000100262 3.5899e-05 9.42761e-05
1.5 9.02357e-05 3.5899e-05 9.42761e-05
1.8 7.51966e-05 3.5899e-05 9.42761e-05
2.4 0 3.5899e-05 9.42761e-05
3 0 3.5899e-05 9.42761e-05
3.6 0 3.5899e-05 9.42761e-05
END DIST

Metal 5 OVER 1
DIST count 12 width 0.3
0.3 0.000562124 7.20976e-05 9.42761e-05
0.6 0.000314638 7.20976e-05 9.42761e-05
0.75 0.000261521 7.20976e-05 9.42761e-05
0.9 0.000224763 7.20976e-05 9.42761e-05
1.05 0.000197615 7.20976e-05 9.42761e-05
1.2 0.000112795 7.20976e-05 9.42761e-05
1.35 0.000100262 7.20976e-05 9.42761e-05
1.5 9.02357e-05 7.20976e-05 9.42761e-05
1.8 7.51966e-05 7.20976e-05 9.42761e-05
2.4 0 7.20976e-05 9.42761e-05
3 0 7.20976e-05 9.42761e-05
3.6 0 7.20976e-05 9.42761e-05
END DIST

Metal 5 OVER 2
DIST count 12 width 0.3
0.3 0.000562124 9.13533e-05 9.42761e-05
0.6 0.000314638 9.13533e-05 9.42761e-05
0.75 0.000261521 9.13533e-05 9.42761e-05
0.9 0.000224763 9.13533e-05 9.42761e-05
1.05 0.000197615 9.13533e-05 9.42761e-05
1.2 0.000112795 9.13533e-05 9.42761e-05
1.35 0.000100262 9.13533e-05 9.42761e-05
1.5 9.02357e-05 9.13533e-05 9.42761e-05
1.8 7.51966e-05 9.13533e-05 9.42761e-05
2.4 0 9.13533e-05 9.42761e-05
3 0 9.13533e-05 9.42761e-05
3.6 0 9.13533e-05 9.42761e-05
END DIST

Metal 5 OVER 3
DIST count 12 width 0.3
0.3 0.000562124 0.0001158 9.42761e-05
0.6 0.000314638 0.0001158 9.42761e-05
0.75 0.000261521 0.0001158 9.42761e-05
0.9 0.000224763 0.0001158 9.42761e-05
1.05 0.000197615 0.0001158 9.42761e-05
1.2 0.000112795 0.0001158 9.42761e-05
1.35 0.000100262 0.0001158 9.42761e-05
1.5 9.02357e-05 0.0001158 9.42761e-05
1.8 7.51966e-05 0.0001158 9.42761e-05
2.4 0 0.0001158 9.42761e-05
3 0 0.0001158 9.42761e-05
3.6 0 0.0001158 9.42761e-05
END DIST

Metal 5 OVER 4
DIST count 12 width 0.3
0.3 0.000562124 0.000146 9.42761e-05
0.6 0.000314638 0.000146 9.42761e-05
0.75 0.000261521 0.000146 9.42761e-05
0.9 0.000224763 0.000146 9.42761e-05
1.05 0.000197615 0.000146 9.42761e-05
1.2 0.000112795 0.000146 9.42761e-05
1.35 0.000100262 0.000146 9.42761e-05
1.5 9.02357e-05 0.000146 9.42761e-05
1.8 7.51966e-05 0.000146 9.42761e-05
2.4 0 0.000146 9.42761e-05
3 0 0.000146 9.42761e-05
3.6 0 0.000146 9.42761e-05
END DIST

Metal 5 UNDER
WIDTH Table 1 entries:  0.3

Metal 5 UNDER 6
DIST count 12 width 0.3
0.3 0.000562124 0.000110389 9.42761e-05
0.6 0.000314638 0.000110389 9.42761e-05
0.75 0.000261521 0.000110389 9.42761e-05
0.9 0.000224763 0.000110389 9.42761e-05
1.05 0.000197615 0.000110389 9.42761e-05
1.2 0.000112795 0.000110389 9.42761e-05
1.35 0.000100262 0.000110389 9.42761e-05
1.5 9.02357e-05 0.000110389 9.42761e-05
1.8 7.51966e-05 0.000110389 9.42761e-05
2.4 0 0.000110389 9.42761e-05
3 0 0.000110389 9.42761e-05
3.6 0 0.000110389 9.42761e-05
END DIST

Metal 5 DIAGUNDER
WIDTH Table 1 entries:  0.3

Metal 5 DIAGUNDER 6
DIST count 13 width 0.3
0 0 6.80808e-05 9.42761e-05
0.3 0 0 9.42761e-05
0.6 0 0 9.42761e-05
0.75 0 0 9.42761e-05
0.9 0 0 9.42761e-05
1.05 0 0 9.42761e-05
1.2 0 0 9.42761e-05
1.35 0 0 9.42761e-05
1.5 0 0 9.42761e-05
1.8 0 0 9.42761e-05
2.4 0 0 9.42761e-05
3 0 0 9.42761e-05
3.6 0 0 9.42761e-05
END DIST

Metal 5 OVERUNDER
WIDTH Table 1 entries:  0.3

Metal 5 OVER 1 UNDER 6
DIST count 12 width 0.3
0.3 0.000562124 0.000146588 9.42761e-05
0.6 0.000314638 0.000146588 9.42761e-05
0.75 0.000261521 0.000146588 9.42761e-05
0.9 0.000224763 0.000146588 9.42761e-05
1.05 0.000197615 0.000146588 9.42761e-05
1.2 0.000112795 0.000146588 9.42761e-05
1.35 0.000100262 0.000146588 9.42761e-05
1.5 9.02357e-05 0.000146588 9.42761e-05
1.8 7.51966e-05 0.000146588 9.42761e-05
2.4 0 0.000146588 9.42761e-05
3 0 0.000146588 9.42761e-05
3.6 0 0.000146588 9.42761e-05
END DIST

Metal 5 OVER 2 UNDER 6
DIST count 12 width 0.3
0.3 0.000562124 0.000165843 9.42761e-05
0.6 0.000314638 0.000165843 9.42761e-05
0.75 0.000261521 0.000165843 9.42761e-05
0.9 0.000224763 0.000165843 9.42761e-05
1.05 0.000197615 0.000165843 9.42761e-05
1.2 0.000112795 0.000165843 9.42761e-05
1.35 0.000100262 0.000165843 9.42761e-05
1.5 9.02357e-05 0.000165843 9.42761e-05
1.8 7.51966e-05 0.000165843 9.42761e-05
2.4 0 0.000165843 9.42761e-05
3 0 0.000165843 9.42761e-05
3.6 0 0.000165843 9.42761e-05
END DIST

Metal 5 OVER 3 UNDER 6
DIST count 12 width 0.3
0.3 0.000562124 0.00019029 9.42761e-05
0.6 0.000314638 0.00019029 9.42761e-05
0.75 0.000261521 0.00019029 9.42761e-05
0.9 0.000224763 0.00019029 9.42761e-05
1.05 0.000197615 0.00019029 9.42761e-05
1.2 0.000112795 0.00019029 9.42761e-05
1.35 0.000100262 0.00019029 9.42761e-05
1.5 9.02357e-05 0.00019029 9.42761e-05
1.8 7.51966e-05 0.00019029 9.42761e-05
2.4 0 0.00019029 9.42761e-05
3 0 0.00019029 9.42761e-05
3.6 0 0.00019029 9.42761e-05
END DIST

Metal 5 OVER 4 UNDER 6
DIST count 12 width 0.3
0.3 0.000562124 0.00022049 9.42761e-05
0.6 0.000314638 0.00022049 9.42761e-05
0.75 0.000261521 0.00022049 9.42761e-05
0.9 0.000224763 0.00022049 9.42761e-05
1.05 0.000197615 0.00022049 9.42761e-05
1.2 0.000112795 0.00022049 9.42761e-05
1.35 0.000100262 0.00022049 9.42761e-05
1.5 9.02357e-05 0.00022049 9.42761e-05
1.8 7.51966e-05 0.00022049 9.42761e-05
2.4 0 0.00022049 9.42761e-05
3 0 0.00022049 9.42761e-05
3.6 0 0.00022049 9.42761e-05
END DIST

Metal 6 RESOVER
WIDTH Table 1 entries:  1.6

Metal 6 RESOVER 0
DIST count 55 width 1.6
0 0 0 2.27273e-05
0 1.8 0 2.27273e-05
0 3.4 0 2.27273e-05
0 4.4 0 2.27273e-05
0 5.2 0 2.27273e-05
0 6.8 0 2.27273e-05
0 7.8 0 2.27273e-05
0 8.6 0 2.27273e-05
0 10.2 0 2.27273e-05
0 13.6 0 2.27273e-05
1.8 1.8 0 2.27273e-05
1.8 3.4 0 2.27273e-05
1.8 4.4 0 2.27273e-05
1.8 5.2 0 2.27273e-05
1.8 6.8 0 2.27273e-05
1.8 7.8 0 2.27273e-05
1.8 8.6 0 2.27273e-05
1.8 10.2 0 2.27273e-05
1.8 13.6 0 2.27273e-05
3.4 3.4 0 2.27273e-05
3.4 4.4 0 2.27273e-05
3.4 5.2 0 2.27273e-05
3.4 6.8 0 2.27273e-05
3.4 7.8 0 2.27273e-05
3.4 8.6 0 2.27273e-05
3.4 10.2 0 2.27273e-05
3.4 13.6 0 2.27273e-05
4.4 4.4 0 2.27273e-05
4.4 5.2 0 2.27273e-05
4.4 6.8 0 2.27273e-05
4.4 7.8 0 2.27273e-05
4.4 8.6 0 2.27273e-05
4.4 10.2 0 2.27273e-05
4.4 13.6 0 2.27273e-05
5.2 5.2 0 2.27273e-05
5.2 6.8 0 2.27273e-05
5.2 7.8 0 2.27273e-05
5.2 8.6 0 2.27273e-05
5.2 10.2 0 2.27273e-05
5.2 13.6 0 2.27273e-05
6.8 6.8 0 2.27273e-05
6.8 7.8 0 2.27273e-05
6.8 8.6 0 2.27273e-05
6.8 10.2 0 2.27273e-05
6.8 13.6 0 2.27273e-05
7.8 7.8 0 2.27273e-05
7.8 8.6 0 2.27273e-05
7.8 10.2 0 2.27273e-05
7.8 13.6 0 2.27273e-05
8.6 8.6 0 2.27273e-05
8.6 10.2 0 2.27273e-05
8.6 13.6 0 2.27273e-05
10.2 10.2 0 2.27273e-05
10.2 13.6 0 2.27273e-05
13.6 0 13.6 2.27273e-05
END DIST

Metal 6 RESOVER 1
DIST count 0 width 1.6
END DIST

Metal 6 RESOVER 2
DIST count 0 width 1.6
END DIST

Metal 6 RESOVER 3
DIST count 0 width 1.6
END DIST

Metal 6 RESOVER 4
DIST count 0 width 1.6
END DIST

Metal 6 RESOVER 5
DIST count 0 width 1.6
END DIST

Metal 6 OVER
WIDTH Table 1 entries:  1.6

Metal 6 OVER 0
DIST count 12 width 1.6
1.6 0.000160354 4.15758e-05 1.13636e-05
3.2 0 4.15758e-05 1.13636e-05
4 0 4.15758e-05 1.13636e-05
4.8 0 4.15758e-05 1.13636e-05
5.6 0 4.15758e-05 1.13636e-05
6.4 0 4.15758e-05 1.13636e-05
7.2 0 4.15758e-05 1.13636e-05
8 0 4.15758e-05 1.13636e-05
9.6 0 4.15758e-05 1.13636e-05
12.8 0 4.15758e-05 1.13636e-05
16 0 4.15758e-05 1.13636e-05
19.2 0 4.15758e-05 1.13636e-05
END DIST

Metal 6 OVER 1
DIST count 12 width 1.6
1.6 0.000160354 0.000133386 1.13636e-05
3.2 0 0.000133386 1.13636e-05
4 0 0.000133386 1.13636e-05
4.8 0 0.000133386 1.13636e-05
5.6 0 0.000133386 1.13636e-05
6.4 0 0.000133386 1.13636e-05
7.2 0 0.000133386 1.13636e-05
8 0 0.000133386 1.13636e-05
9.6 0 0.000133386 1.13636e-05
12.8 0 0.000133386 1.13636e-05
16 0 0.000133386 1.13636e-05
19.2 0 0.000133386 1.13636e-05
END DIST

Metal 6 OVER 2
DIST count 12 width 1.6
1.6 0.000160354 0.000195882 1.13636e-05
3.2 0 0.000195882 1.13636e-05
4 0 0.000195882 1.13636e-05
4.8 0 0.000195882 1.13636e-05
5.6 0 0.000195882 1.13636e-05
6.4 0 0.000195882 1.13636e-05
7.2 0 0.000195882 1.13636e-05
8 0 0.000195882 1.13636e-05
9.6 0 0.000195882 1.13636e-05
12.8 0 0.000195882 1.13636e-05
16 0 0.000195882 1.13636e-05
19.2 0 0.000195882 1.13636e-05
END DIST

Metal 6 OVER 3
DIST count 12 width 1.6
1.6 0.000160354 0.000261351 1.13636e-05
3.2 0 0.000261351 1.13636e-05
4 0 0.000261351 1.13636e-05
4.8 0 0.000261351 1.13636e-05
5.6 0 0.000261351 1.13636e-05
6.4 0 0.000261351 1.13636e-05
7.2 0 0.000261351 1.13636e-05
8 0 0.000261351 1.13636e-05
9.6 0 0.000261351 1.13636e-05
12.8 0 0.000261351 1.13636e-05
16 0 0.000261351 1.13636e-05
19.2 0 0.000261351 1.13636e-05
END DIST

Metal 6 OVER 4
DIST count 12 width 1.6
1.6 0.000160354 0.000242788 1.13636e-05
3.2 0 0.000242788 1.13636e-05
4 0 0.000242788 1.13636e-05
4.8 0 0.000242788 1.13636e-05
5.6 0 0.000242788 1.13636e-05
6.4 0 0.000242788 1.13636e-05
7.2 0 0.000242788 1.13636e-05
8 0 0.000242788 1.13636e-05
9.6 0 0.000242788 1.13636e-05
12.8 0 0.000242788 1.13636e-05
16 0 0.000242788 1.13636e-05
19.2 0 0.000242788 1.13636e-05
END DIST

Metal 6 OVER 5
DIST count 12 width 1.6
1.6 0.000160354 0.000413455 1.13636e-05
3.2 0 0.000413455 1.13636e-05
4 0 0.000413455 1.13636e-05
4.8 0 0.000413455 1.13636e-05
5.6 0 0.000413455 1.13636e-05
6.4 0 0.000413455 1.13636e-05
7.2 0 0.000413455 1.13636e-05
8 0 0.000413455 1.13636e-05
9.6 0 0.000413455 1.13636e-05
12.8 0 0.000413455 1.13636e-05
16 0 0.000413455 1.13636e-05
19.2 0 0.000413455 1.13636e-05
END DIST

Metal 6 UNDER
WIDTH Table 0 entries: 

Metal 6 DIAGUNDER
WIDTH Table 0 entries: 
END DensityModel 0