sky130/openlane/rules.openrcx.sky130B.min.magic

Extraction Rules for OpenRCX

DIAGMODEL ON

LayerCount 6
DensityRate 1  0

DensityModel 0

Metal 1 RESOVER
WIDTH Table 1 entries:  0.17

Metal 1 RESOVER 0
DIST count 55 width 0.17
0 0 0 0.0623886
0 0.29 0 0.0623886
0 0.46 0 0.0623886
0 0.665 0 0.0623886
0 0.75 0 0.0623886
0 0.92 0 0.0623886
0 1.125 0 0.0623886
0 1.21 0 0.0623886
0 1.38 0 0.0623886
0 1.84 0 0.0623886
0.29 0.29 0 0.0623886
0.29 0.46 0 0.0623886
0.29 0.665 0 0.0623886
0.29 0.75 0 0.0623886
0.29 0.92 0 0.0623886
0.29 1.125 0 0.0623886
0.29 1.21 0 0.0623886
0.29 1.38 0 0.0623886
0.29 1.84 0 0.0623886
0.46 0.46 0 0.0623886
0.46 0.665 0 0.0623886
0.46 0.75 0 0.0623886
0.46 0.92 0 0.0623886
0.46 1.125 0 0.0623886
0.46 1.21 0 0.0623886
0.46 1.38 0 0.0623886
0.46 1.84 0 0.0623886
0.665 0.665 0 0.0623886
0.665 0.75 0 0.0623886
0.665 0.92 0 0.0623886
0.665 1.125 0 0.0623886
0.665 1.21 0 0.0623886
0.665 1.38 0 0.0623886
0.665 1.84 0 0.0623886
0.75 0.75 0 0.0623886
0.75 0.92 0 0.0623886
0.75 1.125 0 0.0623886
0.75 1.21 0 0.0623886
0.75 1.38 0 0.0623886
0.75 1.84 0 0.0623886
0.92 0.92 0 0.0623886
0.92 1.125 0 0.0623886
0.92 1.21 0 0.0623886
0.92 1.38 0 0.0623886
0.92 1.84 0 0.0623886
1.125 1.125 0 0.0623886
1.125 1.21 0 0.0623886
1.125 1.38 0 0.0623886
1.125 1.84 0 0.0623886
1.21 1.21 0 0.0623886
1.21 1.38 0 0.0623886
1.21 1.84 0 0.0623886
1.38 1.38 0 0.0623886
1.38 1.84 0 0.0623886
1.84 0 1.84 0.0623886
END DIST

Metal 1 OVER
WIDTH Table 1 entries:  0.17

Metal 1 OVER 0
DIST count 12 width 0.17
0.17 0.000490583 4.46982e-05 0.0311943
0.34 0.000275263 4.46982e-05 0.0311943
0.425 0.000228745 4.46982e-05 0.0311943
0.51 0.000196486 4.46982e-05 0.0311943
0.595 0.000172634 4.46982e-05 0.0311943
0.68 0.000154195 4.46982e-05 0.0311943
0.765 0.000139466 4.46982e-05 0.0311943
0.85 0.000127402 4.46982e-05 0.0311943
1.02 0.000108765 4.46982e-05 0.0311943
1.36 8.43779e-05 4.46982e-05 0.0311943
1.7 3.86334e-05 4.46982e-05 0.0311943
2.04 0 4.46982e-05 0.0311943
END DIST

Metal 1 UNDER
WIDTH Table 1 entries:  0.17

Metal 1 UNDER 2
DIST count 12 width 0.17
0.17 0.000490583 0.000162627 0.0311943
0.34 0.000275263 0.000162627 0.0311943
0.425 0.000228745 0.000162627 0.0311943
0.51 0.000196486 0.000162627 0.0311943
0.595 0.000172634 0.000162627 0.0311943
0.68 0.000154195 0.000162627 0.0311943
0.765 0.000139466 0.000162627 0.0311943
0.85 0.000127402 0.000162627 0.0311943
1.02 0.000108765 0.000162627 0.0311943
1.36 8.43779e-05 0.000162627 0.0311943
1.7 3.86334e-05 0.000162627 0.0311943
2.04 0 0.000162627 0.0311943
END DIST

Metal 1 UNDER 3
DIST count 12 width 0.17
0.17 0.000490583 0.000107556 0.0311943
0.34 0.000275263 0.000107556 0.0311943
0.425 0.000228745 0.000107556 0.0311943
0.51 0.000196486 0.000107556 0.0311943
0.595 0.000172634 0.000107556 0.0311943
0.68 0.000154195 0.000107556 0.0311943
0.765 0.000139466 0.000107556 0.0311943
0.85 0.000127402 0.000107556 0.0311943
1.02 0.000108765 0.000107556 0.0311943
1.36 8.43779e-05 0.000107556 0.0311943
1.7 3.86334e-05 0.000107556 0.0311943
2.04 0 0.000107556 0.0311943
END DIST

Metal 1 UNDER 4
DIST count 12 width 0.17
0.17 0.000490583 8.23305e-05 0.0311943
0.34 0.000275263 8.23305e-05 0.0311943
0.425 0.000228745 8.23305e-05 0.0311943
0.51 0.000196486 8.23305e-05 0.0311943
0.595 0.000172634 8.23305e-05 0.0311943
0.68 0.000154195 8.23305e-05 0.0311943
0.765 0.000139466 8.23305e-05 0.0311943
0.85 0.000127402 8.23305e-05 0.0311943
1.02 0.000108765 8.23305e-05 0.0311943
1.36 8.43779e-05 8.23305e-05 0.0311943
1.7 3.86334e-05 8.23305e-05 0.0311943
2.04 0 8.23305e-05 0.0311943
END DIST

Metal 1 UNDER 5
DIST count 12 width 0.17
0.17 0.000490583 7.57858e-05 0.0311943
0.34 0.000275263 7.57858e-05 0.0311943
0.425 0.000228745 7.57858e-05 0.0311943
0.51 0.000196486 7.57858e-05 0.0311943
0.595 0.000172634 7.57858e-05 0.0311943
0.68 0.000154195 7.57858e-05 0.0311943
0.765 0.000139466 7.57858e-05 0.0311943
0.85 0.000127402 7.57858e-05 0.0311943
1.02 0.000108765 7.57858e-05 0.0311943
1.36 8.43779e-05 7.57858e-05 0.0311943
1.7 3.86334e-05 7.57858e-05 0.0311943
2.04 0 7.57858e-05 0.0311943
END DIST

Metal 1 UNDER 6
DIST count 12 width 0.17
0.17 0.000490583 5.70653e-05 0.0311943
0.34 0.000275263 5.70653e-05 0.0311943
0.425 0.000228745 5.70653e-05 0.0311943
0.51 0.000196486 5.70653e-05 0.0311943
0.595 0.000172634 5.70653e-05 0.0311943
0.68 0.000154195 5.70653e-05 0.0311943
0.765 0.000139466 5.70653e-05 0.0311943
0.85 0.000127402 5.70653e-05 0.0311943
1.02 0.000108765 5.70653e-05 0.0311943
1.36 8.43779e-05 5.70653e-05 0.0311943
1.7 3.86334e-05 5.70653e-05 0.0311943
2.04 0 5.70653e-05 0.0311943
END DIST

Metal 1 DIAGUNDER
WIDTH Table 1 entries:  0.17

Metal 1 DIAGUNDER 2
DIST count 13 width 0.17
0 0 7.62507e-05 0.0311943
0.17 0 0 0.0311943
0.34 0 0 0.0311943
0.425 0 0 0.0311943
0.51 0 0 0.0311943
0.595 0 0 0.0311943
0.68 0 0 0.0311943
0.765 0 0 0.0311943
0.85 0 0 0.0311943
1.02 0 0 0.0311943
1.36 0 0 0.0311943
1.7 0 0 0.0311943
2.04 0 0 0.0311943
END DIST

Metal 1 DIAGUNDER 3
DIST count 13 width 0.17
0 0 3.99212e-05 0.0311943
0.17 0 0 0.0311943
0.34 0 0 0.0311943
0.425 0 0 0.0311943
0.51 0 0 0.0311943
0.595 0 0 0.0311943
0.68 0 0 0.0311943
0.765 0 0 0.0311943
0.85 0 0 0.0311943
1.02 0 0 0.0311943
1.36 0 0 0.0311943
1.7 0 0 0.0311943
2.04 0 0 0.0311943
END DIST

Metal 1 DIAGUNDER 4
DIST count 13 width 0.17
0 0 1.60851e-05 0.0311943
0.17 0 0 0.0311943
0.34 0 0 0.0311943
0.425 0 0 0.0311943
0.51 0 0 0.0311943
0.595 0 0 0.0311943
0.68 0 0 0.0311943
0.765 0 0 0.0311943
0.85 0 0 0.0311943
1.02 0 0 0.0311943
1.36 0 0 0.0311943
1.7 0 0 0.0311943
2.04 0 0 0.0311943
END DIST

Metal 1 DIAGUNDER 5
DIST count 13 width 0.17
0 0 1.11469e-05 0.0311943
0.17 0 0 0.0311943
0.34 0 0 0.0311943
0.425 0 0 0.0311943
0.51 0 0 0.0311943
0.595 0 0 0.0311943
0.68 0 0 0.0311943
0.765 0 0 0.0311943
0.85 0 0 0.0311943
1.02 0 0 0.0311943
1.36 0 0 0.0311943
1.7 0 0 0.0311943
2.04 0 0 0.0311943
END DIST

Metal 1 DIAGUNDER 6
DIST count 0 width 0.17
END DIST

Metal 2 RESOVER
WIDTH Table 1 entries:  0.14

Metal 2 RESOVER 0
DIST count 55 width 0.14
0 0 0 0.000757576
0 0.2 0 0.000757576
0 0.34 0 0.000757576
0 0.47 0 0.000757576
0 0.54 0 0.000757576
0 0.68 0 0.000757576
0 0.81 0 0.000757576
0 0.88 0 0.000757576
0 1.02 0 0.000757576
0 1.36 0 0.000757576
0.2 0.2 0 0.000757576
0.2 0.34 0 0.000757576
0.2 0.47 0 0.000757576
0.2 0.54 0 0.000757576
0.2 0.68 0 0.000757576
0.2 0.81 0 0.000757576
0.2 0.88 0 0.000757576
0.2 1.02 0 0.000757576
0.2 1.36 0 0.000757576
0.34 0.34 0 0.000757576
0.34 0.47 0 0.000757576
0.34 0.54 0 0.000757576
0.34 0.68 0 0.000757576
0.34 0.81 0 0.000757576
0.34 0.88 0 0.000757576
0.34 1.02 0 0.000757576
0.34 1.36 0 0.000757576
0.47 0.47 0 0.000757576
0.47 0.54 0 0.000757576
0.47 0.68 0 0.000757576
0.47 0.81 0 0.000757576
0.47 0.88 0 0.000757576
0.47 1.02 0 0.000757576
0.47 1.36 0 0.000757576
0.54 0.54 0 0.000757576
0.54 0.68 0 0.000757576
0.54 0.81 0 0.000757576
0.54 0.88 0 0.000757576
0.54 1.02 0 0.000757576
0.54 1.36 0 0.000757576
0.68 0.68 0 0.000757576
0.68 0.81 0 0.000757576
0.68 0.88 0 0.000757576
0.68 1.02 0 0.000757576
0.68 1.36 0 0.000757576
0.81 0.81 0 0.000757576
0.81 0.88 0 0.000757576
0.81 1.02 0 0.000757576
0.81 1.36 0 0.000757576
0.88 0.88 0 0.000757576
0.88 1.02 0 0.000757576
0.88 1.36 0 0.000757576
1.02 1.02 0 0.000757576
1.02 1.36 0 0.000757576
1.36 0 1.36 0.000757576
END DIST

Metal 2 RESOVER 1
DIST count 0 width 0.14
END DIST

Metal 2 OVER
WIDTH Table 1 entries:  0.14

Metal 2 OVER 0
DIST count 12 width 0.14
0.14 0.000833899 4.32125e-05 0.000378788
0.28 0.00046858 4.32125e-05 0.000378788
0.35 0.000389231 4.32125e-05 0.000378788
0.42 0.000334125 4.32125e-05 0.000378788
0.49 0.000293354 4.32125e-05 0.000378788
0.56 0.000261826 4.32125e-05 0.000378788
0.63 0.000236646 4.32125e-05 0.000378788
0.7 0.000216027 4.32125e-05 0.000378788
0.84 0.000184196 4.32125e-05 0.000378788
1.12 0.000142607 4.32125e-05 0.000378788
1.4 0.000116505 4.32125e-05 0.000378788
1.68 0 9.70123e-05 0.000378788
END DIST

Metal 2 OVER 1
DIST count 12 width 0.14
0.14 0.000833899 0.000119325 0.000378788
0.28 0.00046858 0.000119325 0.000378788
0.35 0.000389231 0.000119325 0.000378788
0.42 0.000334125 0.000119325 0.000378788
0.49 0.000293354 0.000119325 0.000378788
0.56 0.000261826 0.000119325 0.000378788
0.63 0.000236646 0.000119325 0.000378788
0.7 0.000216027 0.000119325 0.000378788
0.84 0.000184196 0.000119325 0.000378788
1.12 0.000142607 0.000119325 0.000378788
1.4 0.000116505 0.000119325 0.000378788
1.68 0 0.000173125 0.000378788
END DIST

Metal 2 UNDER
WIDTH Table 1 entries:  0.14

Metal 2 UNDER 3
DIST count 12 width 0.14
0.14 0.000833899 0.000103826 0.000378788
0.28 0.00046858 0.000103826 0.000378788
0.35 0.000389231 0.000103826 0.000378788
0.42 0.000334125 0.000103826 0.000378788
0.49 0.000293354 0.000103826 0.000378788
0.56 0.000261826 0.000103826 0.000378788
0.63 0.000236646 0.000103826 0.000378788
0.7 0.000216027 0.000103826 0.000378788
0.84 0.000184196 0.000103826 0.000378788
1.12 0.000142607 0.000103826 0.000378788
1.4 0.000116505 0.000103826 0.000378788
1.68 0 0.000157626 0.000378788
END DIST

Metal 2 UNDER 4
DIST count 12 width 0.14
0.14 0.000833899 8.57127e-05 0.000378788
0.28 0.00046858 8.57127e-05 0.000378788
0.35 0.000389231 8.57127e-05 0.000378788
0.42 0.000334125 8.57127e-05 0.000378788
0.49 0.000293354 8.57127e-05 0.000378788
0.56 0.000261826 8.57127e-05 0.000378788
0.63 0.000236646 8.57127e-05 0.000378788
0.7 0.000216027 8.57127e-05 0.000378788
0.84 0.000184196 8.57127e-05 0.000378788
1.12 0.000142607 8.57127e-05 0.000378788
1.4 0.000116505 8.57127e-05 0.000378788
1.68 0 0.000139513 0.000378788
END DIST

Metal 2 UNDER 5
DIST count 12 width 0.14
0.14 0.000833899 7.61343e-05 0.000378788
0.28 0.00046858 7.61343e-05 0.000378788
0.35 0.000389231 7.61343e-05 0.000378788
0.42 0.000334125 7.61343e-05 0.000378788
0.49 0.000293354 7.61343e-05 0.000378788
0.56 0.000261826 7.61343e-05 0.000378788
0.63 0.000236646 7.61343e-05 0.000378788
0.7 0.000216027 7.61343e-05 0.000378788
0.84 0.000184196 7.61343e-05 0.000378788
1.12 0.000142607 7.61343e-05 0.000378788
1.4 0.000116505 7.61343e-05 0.000378788
1.68 0 0.000129934 0.000378788
END DIST

Metal 2 UNDER 6
DIST count 12 width 0.14
0.14 0.000833899 5.95338e-05 0.000378788
0.28 0.00046858 5.95338e-05 0.000378788
0.35 0.000389231 5.95338e-05 0.000378788
0.42 0.000334125 5.95338e-05 0.000378788
0.49 0.000293354 5.95338e-05 0.000378788
0.56 0.000261826 5.95338e-05 0.000378788
0.63 0.000236646 5.95338e-05 0.000378788
0.7 0.000216027 5.95338e-05 0.000378788
0.84 0.000184196 5.95338e-05 0.000378788
1.12 0.000142607 5.95338e-05 0.000378788
1.4 0.000116505 5.95338e-05 0.000378788
1.68 0 0.000113334 0.000378788
END DIST

Metal 2 DIAGUNDER
WIDTH Table 1 entries:  0.14

Metal 2 DIAGUNDER 3
DIST count 13 width 0.14
0 0 9.04625e-06 0.000378788
0.14 0 0 0.000378788
0.28 0 0 0.000378788
0.35 0 0 0.000378788
0.42 0 0 0.000378788
0.49 0 0 0.000378788
0.56 0 0 0.000378788
0.63 0 0 0.000378788
0.7 0 0 0.000378788
0.84 0 0 0.000378788
1.12 0 0 0.000378788
1.4 0 0 0.000378788
1.68 0 0 0.000378788
END DIST

Metal 2 DIAGUNDER 4
DIST count 13 width 0.14
0 0 2.4853e-05 0.000378788
0.14 0 0 0.000378788
0.28 0 0 0.000378788
0.35 0 0 0.000378788
0.42 0 0 0.000378788
0.49 0 0 0.000378788
0.56 0 0 0.000378788
0.63 0 0 0.000378788
0.7 0 0 0.000378788
0.84 0 0 0.000378788
1.12 0 0 0.000378788
1.4 0 0 0.000378788
1.68 0 0 0.000378788
END DIST

Metal 2 DIAGUNDER 5
DIST count 13 width 0.14
0 0 1.65691e-05 0.000378788
0.14 0 0 0.000378788
0.28 0 0 0.000378788
0.35 0 0 0.000378788
0.42 0 0 0.000378788
0.49 0 0 0.000378788
0.56 0 0 0.000378788
0.63 0 0 0.000378788
0.7 0 0 0.000378788
0.84 0 0 0.000378788
1.12 0 0 0.000378788
1.4 0 0 0.000378788
1.68 0 0 0.000378788
END DIST

Metal 2 DIAGUNDER 6
DIST count 13 width 0.14
0 0 1.24725e-05 0.000378788
0.14 0 0 0.000378788
0.28 0 0 0.000378788
0.35 0 0 0.000378788
0.42 0 0 0.000378788
0.49 0 0 0.000378788
0.56 0 0 0.000378788
0.63 0 0 0.000378788
0.7 0 0 0.000378788
0.84 0 0 0.000378788
1.12 0 0 0.000378788
1.4 0 0 0.000378788
1.68 0 0 0.000378788
END DIST

Metal 2 OVERUNDER
WIDTH Table 1 entries:  0.14

Metal 2 OVER 1 UNDER 3
DIST count 12 width 0.14
0.14 0.000833899 0.000179938 0.000378788
0.28 0.00046858 0.000179938 0.000378788
0.35 0.000389231 0.000179938 0.000378788
0.42 0.000334125 0.000179938 0.000378788
0.49 0.000293354 0.000179938 0.000378788
0.56 0.000261826 0.000179938 0.000378788
0.63 0.000236646 0.000179938 0.000378788
0.7 0.000216027 0.000179938 0.000378788
0.84 0.000184196 0.000179938 0.000378788
1.12 0.000142607 0.000179938 0.000378788
1.4 0.000116505 0.000179938 0.000378788
1.68 0 0.000233738 0.000378788
END DIST

Metal 2 OVER 1 UNDER 4
DIST count 12 width 0.14
0.14 0.000833899 0.000161825 0.000378788
0.28 0.00046858 0.000161825 0.000378788
0.35 0.000389231 0.000161825 0.000378788
0.42 0.000334125 0.000161825 0.000378788
0.49 0.000293354 0.000161825 0.000378788
0.56 0.000261826 0.000161825 0.000378788
0.63 0.000236646 0.000161825 0.000378788
0.7 0.000216027 0.000161825 0.000378788
0.84 0.000184196 0.000161825 0.000378788
1.12 0.000142607 0.000161825 0.000378788
1.4 0.000116505 0.000161825 0.000378788
1.68 0 0.000215625 0.000378788
END DIST

Metal 2 OVER 1 UNDER 5
DIST count 12 width 0.14
0.14 0.000833899 0.000152247 0.000378788
0.28 0.00046858 0.000152247 0.000378788
0.35 0.000389231 0.000152247 0.000378788
0.42 0.000334125 0.000152247 0.000378788
0.49 0.000293354 0.000152247 0.000378788
0.56 0.000261826 0.000152247 0.000378788
0.63 0.000236646 0.000152247 0.000378788
0.7 0.000216027 0.000152247 0.000378788
0.84 0.000184196 0.000152247 0.000378788
1.12 0.000142607 0.000152247 0.000378788
1.4 0.000116505 0.000152247 0.000378788
1.68 0 0.000206047 0.000378788
END DIST

Metal 2 OVER 1 UNDER 6
DIST count 12 width 0.14
0.14 0.000833899 0.000135646 0.000378788
0.28 0.00046858 0.000135646 0.000378788
0.35 0.000389231 0.000135646 0.000378788
0.42 0.000334125 0.000135646 0.000378788
0.49 0.000293354 0.000135646 0.000378788
0.56 0.000261826 0.000135646 0.000378788
0.63 0.000236646 0.000135646 0.000378788
0.7 0.000216027 0.000135646 0.000378788
0.84 0.000184196 0.000135646 0.000378788
1.12 0.000142607 0.000135646 0.000378788
1.4 0.000116505 0.000135646 0.000378788
1.68 0 0.000189446 0.000378788
END DIST

Metal 3 RESOVER
WIDTH Table 1 entries:  0.14

Metal 3 RESOVER 0
DIST count 55 width 0.14
0 0 0 0.000757576
0 0.32 0 0.000757576
0 0.46 0 0.000757576
0 0.71 0 0.000757576
0 0.78 0 0.000757576
0 0.92 0 0.000757576
0 1.17 0 0.000757576
0 1.24 0 0.000757576
0 1.38 0 0.000757576
0 1.84 0 0.000757576
0.32 0.32 0 0.000757576
0.32 0.46 0 0.000757576
0.32 0.71 0 0.000757576
0.32 0.78 0 0.000757576
0.32 0.92 0 0.000757576
0.32 1.17 0 0.000757576
0.32 1.24 0 0.000757576
0.32 1.38 0 0.000757576
0.32 1.84 0 0.000757576
0.46 0.46 0 0.000757576
0.46 0.71 0 0.000757576
0.46 0.78 0 0.000757576
0.46 0.92 0 0.000757576
0.46 1.17 0 0.000757576
0.46 1.24 0 0.000757576
0.46 1.38 0 0.000757576
0.46 1.84 0 0.000757576
0.71 0.71 0 0.000757576
0.71 0.78 0 0.000757576
0.71 0.92 0 0.000757576
0.71 1.17 0 0.000757576
0.71 1.24 0 0.000757576
0.71 1.38 0 0.000757576
0.71 1.84 0 0.000757576
0.78 0.78 0 0.000757576
0.78 0.92 0 0.000757576
0.78 1.17 0 0.000757576
0.78 1.24 0 0.000757576
0.78 1.38 0 0.000757576
0.78 1.84 0 0.000757576
0.92 0.92 0 0.000757576
0.92 1.17 0 0.000757576
0.92 1.24 0 0.000757576
0.92 1.38 0 0.000757576
0.92 1.84 0 0.000757576
1.17 1.17 0 0.000757576
1.17 1.24 0 0.000757576
1.17 1.38 0 0.000757576
1.17 1.84 0 0.000757576
1.24 1.24 0 0.000757576
1.24 1.38 0 0.000757576
1.24 1.84 0 0.000757576
1.38 1.38 0 0.000757576
1.38 1.84 0 0.000757576
1.84 0 1.84 0.000757576
END DIST

Metal 3 RESOVER 1
DIST count 0 width 0.14
END DIST

Metal 3 RESOVER 2
DIST count 0 width 0.14
END DIST

Metal 3 OVER
WIDTH Table 1 entries:  0.14

Metal 3 OVER 0
DIST count 12 width 0.14
0.14 0.000884156 3.46294e-05 0.000378788
0.28 0.000494068 3.46294e-05 0.000378788
0.35 0.000410659 3.46294e-05 0.000378788
0.42 0.000353011 3.46294e-05 0.000378788
0.49 0.00031047 3.46294e-05 0.000378788
0.56 0.000277616 3.46294e-05 0.000378788
0.63 0.000251384 3.46294e-05 0.000378788
0.7 0.000229897 3.46294e-05 0.000378788
0.84 0.000196683 3.46294e-05 0.000378788
1.12 0.000153132 3.46294e-05 0.000378788
1.4 0.000125647 3.46294e-05 0.000378788
1.68 0 9.43697e-05 0.000378788
END DIST

Metal 3 OVER 1
DIST count 12 width 0.14
0.14 0.000884156 6.95942e-05 0.000378788
0.28 0.000494068 6.95942e-05 0.000378788
0.35 0.000410659 6.95942e-05 0.000378788
0.42 0.000353011 6.95942e-05 0.000378788
0.49 0.00031047 6.95942e-05 0.000378788
0.56 0.000277616 6.95942e-05 0.000378788
0.63 0.000251384 6.95942e-05 0.000378788
0.7 0.000229897 6.95942e-05 0.000378788
0.84 0.000196683 6.95942e-05 0.000378788
1.12 0.000153132 6.95942e-05 0.000378788
1.4 0.000125647 6.95942e-05 0.000378788
1.68 0 0.000129334 0.000378788
END DIST

Metal 3 OVER 2
DIST count 12 width 0.14
0.14 0.000884156 7.76289e-05 0.000378788
0.28 0.000494068 7.76289e-05 0.000378788
0.35 0.000410659 7.76289e-05 0.000378788
0.42 0.000353011 7.76289e-05 0.000378788
0.49 0.00031047 7.76289e-05 0.000378788
0.56 0.000277616 7.76289e-05 0.000378788
0.63 0.000251384 7.76289e-05 0.000378788
0.7 0.000229897 7.76289e-05 0.000378788
0.84 0.000196683 7.76289e-05 0.000378788
1.12 0.000153132 7.76289e-05 0.000378788
1.4 0.000125647 7.76289e-05 0.000378788
1.68 0 0.000137369 0.000378788
END DIST

Metal 3 UNDER
WIDTH Table 1 entries:  0.14

Metal 3 UNDER 4
DIST count 12 width 0.14
0.14 0.000884156 0.000118921 0.000378788
0.28 0.000494068 0.000118921 0.000378788
0.35 0.000410659 0.000118921 0.000378788
0.42 0.000353011 0.000118921 0.000378788
0.49 0.00031047 0.000118921 0.000378788
0.56 0.000277616 0.000118921 0.000378788
0.63 0.000251384 0.000118921 0.000378788
0.7 0.000229897 0.000118921 0.000378788
0.84 0.000196683 0.000118921 0.000378788
1.12 0.000153132 0.000118921 0.000378788
1.4 0.000125647 0.000118921 0.000378788
1.68 0 0.000178661 0.000378788
END DIST

Metal 3 UNDER 5
DIST count 12 width 0.14
0.14 0.000884156 8.07293e-05 0.000378788
0.28 0.000494068 8.07293e-05 0.000378788
0.35 0.000410659 8.07293e-05 0.000378788
0.42 0.000353011 8.07293e-05 0.000378788
0.49 0.00031047 8.07293e-05 0.000378788
0.56 0.000277616 8.07293e-05 0.000378788
0.63 0.000251384 8.07293e-05 0.000378788
0.7 0.000229897 8.07293e-05 0.000378788
0.84 0.000196683 8.07293e-05 0.000378788
1.12 0.000153132 8.07293e-05 0.000378788
1.4 0.000125647 8.07293e-05 0.000378788
1.68 0 0.00014047 0.000378788
END DIST

Metal 3 UNDER 6
DIST count 12 width 0.14
0.14 0.000884156 5.68671e-05 0.000378788
0.28 0.000494068 5.68671e-05 0.000378788
0.35 0.000410659 5.68671e-05 0.000378788
0.42 0.000353011 5.68671e-05 0.000378788
0.49 0.00031047 5.68671e-05 0.000378788
0.56 0.000277616 5.68671e-05 0.000378788
0.63 0.000251384 5.68671e-05 0.000378788
0.7 0.000229897 5.68671e-05 0.000378788
0.84 0.000196683 5.68671e-05 0.000378788
1.12 0.000153132 5.68671e-05 0.000378788
1.4 0.000125647 5.68671e-05 0.000378788
1.68 0 0.000116607 0.000378788
END DIST

Metal 3 DIAGUNDER
WIDTH Table 1 entries:  0.14

Metal 3 DIAGUNDER 4
DIST count 13 width 0.14
0 0 5.70672e-05 0.000378788
0.14 0 0 0.000378788
0.28 0 0 0.000378788
0.35 0 0 0.000378788
0.42 0 0 0.000378788
0.49 0 0 0.000378788
0.56 0 0 0.000378788
0.63 0 0 0.000378788
0.7 0 0 0.000378788
0.84 0 0 0.000378788
1.12 0 0 0.000378788
1.4 0 0 0.000378788
1.68 0 0 0.000378788
END DIST

Metal 3 DIAGUNDER 5
DIST count 13 width 0.14
0 0 2.54305e-05 0.000378788
0.14 0 0 0.000378788
0.28 0 0 0.000378788
0.35 0 0 0.000378788
0.42 0 0 0.000378788
0.49 0 0 0.000378788
0.56 0 0 0.000378788
0.63 0 0 0.000378788
0.7 0 0 0.000378788
0.84 0 0 0.000378788
1.12 0 0 0.000378788
1.4 0 0 0.000378788
1.68 0 0 0.000378788
END DIST

Metal 3 DIAGUNDER 6
DIST count 13 width 0.14
0 0 1.74521e-05 0.000378788
0.14 0 0 0.000378788
0.28 0 0 0.000378788
0.35 0 0 0.000378788
0.42 0 0 0.000378788
0.49 0 0 0.000378788
0.56 0 0 0.000378788
0.63 0 0 0.000378788
0.7 0 0 0.000378788
0.84 0 0 0.000378788
1.12 0 0 0.000378788
1.4 0 0 0.000378788
1.68 0 0 0.000378788
END DIST

Metal 3 OVERUNDER
WIDTH Table 1 entries:  0.14

Metal 3 OVER 1 UNDER 4
DIST count 12 width 0.14
0.14 0.000884156 0.000153886 0.000378788
0.28 0.000494068 0.000153886 0.000378788
0.35 0.000410659 0.000153886 0.000378788
0.42 0.000353011 0.000153886 0.000378788
0.49 0.00031047 0.000153886 0.000378788
0.56 0.000277616 0.000153886 0.000378788
0.63 0.000251384 0.000153886 0.000378788
0.7 0.000229897 0.000153886 0.000378788
0.84 0.000196683 0.000153886 0.000378788
1.12 0.000153132 0.000153886 0.000378788
1.4 0.000125647 0.000153886 0.000378788
1.68 0 0.000213626 0.000378788
END DIST

Metal 3 OVER 1 UNDER 5
DIST count 12 width 0.14
0.14 0.000884156 0.000115694 0.000378788
0.28 0.000494068 0.000115694 0.000378788
0.35 0.000410659 0.000115694 0.000378788
0.42 0.000353011 0.000115694 0.000378788
0.49 0.00031047 0.000115694 0.000378788
0.56 0.000277616 0.000115694 0.000378788
0.63 0.000251384 0.000115694 0.000378788
0.7 0.000229897 0.000115694 0.000378788
0.84 0.000196683 0.000115694 0.000378788
1.12 0.000153132 0.000115694 0.000378788
1.4 0.000125647 0.000115694 0.000378788
1.68 0 0.000175434 0.000378788
END DIST

Metal 3 OVER 1 UNDER 6
DIST count 12 width 0.14
0.14 0.000884156 9.18319e-05 0.000378788
0.28 0.000494068 9.18319e-05 0.000378788
0.35 0.000410659 9.18319e-05 0.000378788
0.42 0.000353011 9.18319e-05 0.000378788
0.49 0.00031047 9.18319e-05 0.000378788
0.56 0.000277616 9.18319e-05 0.000378788
0.63 0.000251384 9.18319e-05 0.000378788
0.7 0.000229897 9.18319e-05 0.000378788
0.84 0.000196683 9.18319e-05 0.000378788
1.12 0.000153132 9.18319e-05 0.000378788
1.4 0.000125647 9.18319e-05 0.000378788
1.68 0 0.000151572 0.000378788
END DIST

Metal 3 OVER 2 UNDER 4
DIST count 12 width 0.14
0.14 0.000884156 0.000161921 0.000378788
0.28 0.000494068 0.000161921 0.000378788
0.35 0.000410659 0.000161921 0.000378788
0.42 0.000353011 0.000161921 0.000378788
0.49 0.00031047 0.000161921 0.000378788
0.56 0.000277616 0.000161921 0.000378788
0.63 0.000251384 0.000161921 0.000378788
0.7 0.000229897 0.000161921 0.000378788
0.84 0.000196683 0.000161921 0.000378788
1.12 0.000153132 0.000161921 0.000378788
1.4 0.000125647 0.000161921 0.000378788
1.68 0 0.000221661 0.000378788
END DIST

Metal 3 OVER 2 UNDER 5
DIST count 12 width 0.14
0.14 0.000884156 0.000123729 0.000378788
0.28 0.000494068 0.000123729 0.000378788
0.35 0.000410659 0.000123729 0.000378788
0.42 0.000353011 0.000123729 0.000378788
0.49 0.00031047 0.000123729 0.000378788
0.56 0.000277616 0.000123729 0.000378788
0.63 0.000251384 0.000123729 0.000378788
0.7 0.000229897 0.000123729 0.000378788
0.84 0.000196683 0.000123729 0.000378788
1.12 0.000153132 0.000123729 0.000378788
1.4 0.000125647 0.000123729 0.000378788
1.68 0 0.000183469 0.000378788
END DIST

Metal 3 OVER 2 UNDER 6
DIST count 12 width 0.14
0.14 0.000884156 9.98665e-05 0.000378788
0.28 0.000494068 9.98665e-05 0.000378788
0.35 0.000410659 9.98665e-05 0.000378788
0.42 0.000353011 9.98665e-05 0.000378788
0.49 0.00031047 9.98665e-05 0.000378788
0.56 0.000277616 9.98665e-05 0.000378788
0.63 0.000251384 9.98665e-05 0.000378788
0.7 0.000229897 9.98665e-05 0.000378788
0.84 0.000196683 9.98665e-05 0.000378788
1.12 0.000153132 9.98665e-05 0.000378788
1.4 0.000125647 9.98665e-05 0.000378788
1.68 0 0.000159607 0.000378788
END DIST

Metal 4 RESOVER
WIDTH Table 1 entries:  0.3

Metal 4 RESOVER 0
DIST count 55 width 0.3
0 0 0 0.000127946
0 0.38 0 0.000127946
0 0.68 0 0.000127946
0 0.91 0 0.000127946
0 1.06 0 0.000127946
0 1.36 0 0.000127946
0 1.59 0 0.000127946
0 1.74 0 0.000127946
0 2.04 0 0.000127946
0 2.72 0 0.000127946
0.38 0.38 0 0.000127946
0.38 0.68 0 0.000127946
0.38 0.91 0 0.000127946
0.38 1.06 0 0.000127946
0.38 1.36 0 0.000127946
0.38 1.59 0 0.000127946
0.38 1.74 0 0.000127946
0.38 2.04 0 0.000127946
0.38 2.72 0 0.000127946
0.68 0.68 0 0.000127946
0.68 0.91 0 0.000127946
0.68 1.06 0 0.000127946
0.68 1.36 0 0.000127946
0.68 1.59 0 0.000127946
0.68 1.74 0 0.000127946
0.68 2.04 0 0.000127946
0.68 2.72 0 0.000127946
0.91 0.91 0 0.000127946
0.91 1.06 0 0.000127946
0.91 1.36 0 0.000127946
0.91 1.59 0 0.000127946
0.91 1.74 0 0.000127946
0.91 2.04 0 0.000127946
0.91 2.72 0 0.000127946
1.06 1.06 0 0.000127946
1.06 1.36 0 0.000127946
1.06 1.59 0 0.000127946
1.06 1.74 0 0.000127946
1.06 2.04 0 0.000127946
1.06 2.72 0 0.000127946
1.36 1.36 0 0.000127946
1.36 1.59 0 0.000127946
1.36 1.74 0 0.000127946
1.36 2.04 0 0.000127946
1.36 2.72 0 0.000127946
1.59 1.59 0 0.000127946
1.59 1.74 0 0.000127946
1.59 2.04 0 0.000127946
1.59 2.72 0 0.000127946
1.74 1.74 0 0.000127946
1.74 2.04 0 0.000127946
1.74 2.72 0 0.000127946
2.04 2.04 0 0.000127946
2.04 2.72 0 0.000127946
2.72 0 2.72 0.000127946
END DIST

Metal 4 RESOVER 1
DIST count 0 width 0.3
END DIST

Metal 4 RESOVER 2
DIST count 0 width 0.3
END DIST

Metal 4 RESOVER 3
DIST count 0 width 0.3
END DIST

Metal 4 OVER
WIDTH Table 1 entries:  0.3

Metal 4 OVER 0
DIST count 12 width 0.3
0.3 0.000555432 3.95143e-05 6.39731e-05
0.6 0.000312295 3.95143e-05 6.39731e-05
0.75 0.000259315 3.95143e-05 6.39731e-05
0.9 0.000222495 3.95143e-05 6.39731e-05
1.05 0.000195244 3.95143e-05 6.39731e-05
1.2 0.000174172 3.95143e-05 6.39731e-05
1.35 9.45003e-05 3.95143e-05 6.39731e-05
1.5 8.50505e-05 3.95143e-05 6.39731e-05
1.8 7.08754e-05 3.95143e-05 6.39731e-05
2.4 0 3.95143e-05 6.39731e-05
3 0 3.95143e-05 6.39731e-05
3.6 0 3.95143e-05 6.39731e-05
END DIST

Metal 4 OVER 1
DIST count 12 width 0.3
0.3 0.000555432 8.62259e-05 6.39731e-05
0.6 0.000312295 8.62259e-05 6.39731e-05
0.75 0.000259315 8.62259e-05 6.39731e-05
0.9 0.000222495 8.62259e-05 6.39731e-05
1.05 0.000195244 8.62259e-05 6.39731e-05
1.2 0.000174172 8.62259e-05 6.39731e-05
1.35 9.45003e-05 8.62259e-05 6.39731e-05
1.5 8.50505e-05 8.62259e-05 6.39731e-05
1.8 7.08754e-05 8.62259e-05 6.39731e-05
2.4 0 8.62259e-05 6.39731e-05
3 0 8.62259e-05 6.39731e-05
3.6 0 8.62259e-05 6.39731e-05
END DIST

Metal 4 OVER 2
DIST count 12 width 0.3
0.3 0.000555432 0.000112732 6.39731e-05
0.6 0.000312295 0.000112732 6.39731e-05
0.75 0.000259315 0.000112732 6.39731e-05
0.9 0.000222495 0.000112732 6.39731e-05
1.05 0.000195244 0.000112732 6.39731e-05
1.2 0.000174172 0.000112732 6.39731e-05
1.35 9.45003e-05 0.000112732 6.39731e-05
1.5 8.50505e-05 0.000112732 6.39731e-05
1.8 7.08754e-05 0.000112732 6.39731e-05
2.4 0 0.000112732 6.39731e-05
3 0 0.000112732 6.39731e-05
3.6 0 0.000112732 6.39731e-05
END DIST

Metal 4 OVER 3
DIST count 12 width 0.3
0.3 0.000555432 0.000200567 6.39731e-05
0.6 0.000312295 0.000200567 6.39731e-05
0.75 0.000259315 0.000200567 6.39731e-05
0.9 0.000222495 0.000200567 6.39731e-05
1.05 0.000195244 0.000200567 6.39731e-05
1.2 0.000174172 0.000200567 6.39731e-05
1.35 9.45003e-05 0.000200567 6.39731e-05
1.5 8.50505e-05 0.000200567 6.39731e-05
1.8 7.08754e-05 0.000200567 6.39731e-05
2.4 0 0.000200567 6.39731e-05
3 0 0.000200567 6.39731e-05
3.6 0 0.000200567 6.39731e-05
END DIST

Metal 4 UNDER
WIDTH Table 1 entries:  0.3

Metal 4 UNDER 5
DIST count 12 width 0.3
0.3 0.000555432 0.000167411 6.39731e-05
0.6 0.000312295 0.000167411 6.39731e-05
0.75 0.000259315 0.000167411 6.39731e-05
0.9 0.000222495 0.000167411 6.39731e-05
1.05 0.000195244 0.000167411 6.39731e-05
1.2 0.000174172 0.000167411 6.39731e-05
1.35 9.45003e-05 0.000167411 6.39731e-05
1.5 8.50505e-05 0.000167411 6.39731e-05
1.8 7.08754e-05 0.000167411 6.39731e-05
2.4 0 0.000167411 6.39731e-05
3 0 0.000167411 6.39731e-05
3.6 0 0.000167411 6.39731e-05
END DIST

Metal 4 UNDER 6
DIST count 12 width 0.3
0.3 0.000555432 8.19466e-05 6.39731e-05
0.6 0.000312295 8.19466e-05 6.39731e-05
0.75 0.000259315 8.19466e-05 6.39731e-05
0.9 0.000222495 8.19466e-05 6.39731e-05
1.05 0.000195244 8.19466e-05 6.39731e-05
1.2 0.000174172 8.19466e-05 6.39731e-05
1.35 9.45003e-05 8.19466e-05 6.39731e-05
1.5 8.50505e-05 8.19466e-05 6.39731e-05
1.8 7.08754e-05 8.19466e-05 6.39731e-05
2.4 0 8.19466e-05 6.39731e-05
3 0 8.19466e-05 6.39731e-05
3.6 0 8.19466e-05 6.39731e-05
END DIST

Metal 4 DIAGUNDER
WIDTH Table 1 entries:  0.3

Metal 4 DIAGUNDER 5
DIST count 13 width 0.3
0 0 2.54636e-05 6.39731e-05
0.3 0 0 6.39731e-05
0.6 0 0 6.39731e-05
0.75 0 0 6.39731e-05
0.9 0 0 6.39731e-05
1.05 0 0 6.39731e-05
1.2 0 0 6.39731e-05
1.35 0 0 6.39731e-05
1.5 0 0 6.39731e-05
1.8 0 0 6.39731e-05
2.4 0 0 6.39731e-05
3 0 0 6.39731e-05
3.6 0 0 6.39731e-05
END DIST

Metal 4 DIAGUNDER 6
DIST count 13 width 0.3
0 0 3.40697e-05 6.39731e-05
0.3 0 0 6.39731e-05
0.6 0 0 6.39731e-05
0.75 0 0 6.39731e-05
0.9 0 0 6.39731e-05
1.05 0 0 6.39731e-05
1.2 0 0 6.39731e-05
1.35 0 0 6.39731e-05
1.5 0 0 6.39731e-05
1.8 0 0 6.39731e-05
2.4 0 0 6.39731e-05
3 0 0 6.39731e-05
3.6 0 0 6.39731e-05
END DIST

Metal 4 OVERUNDER
WIDTH Table 1 entries:  0.3

Metal 4 OVER 1 UNDER 5
DIST count 12 width 0.3
0.3 0.000555432 0.000214123 6.39731e-05
0.6 0.000312295 0.000214123 6.39731e-05
0.75 0.000259315 0.000214123 6.39731e-05
0.9 0.000222495 0.000214123 6.39731e-05
1.05 0.000195244 0.000214123 6.39731e-05
1.2 0.000174172 0.000214123 6.39731e-05
1.35 9.45003e-05 0.000214123 6.39731e-05
1.5 8.50505e-05 0.000214123 6.39731e-05
1.8 7.08754e-05 0.000214123 6.39731e-05
2.4 0 0.000214123 6.39731e-05
3 0 0.000214123 6.39731e-05
3.6 0 0.000214123 6.39731e-05
END DIST

Metal 4 OVER 1 UNDER 6
DIST count 12 width 0.3
0.3 0.000555432 0.000128658 6.39731e-05
0.6 0.000312295 0.000128658 6.39731e-05
0.75 0.000259315 0.000128658 6.39731e-05
0.9 0.000222495 0.000128658 6.39731e-05
1.05 0.000195244 0.000128658 6.39731e-05
1.2 0.000174172 0.000128658 6.39731e-05
1.35 9.45003e-05 0.000128658 6.39731e-05
1.5 8.50505e-05 0.000128658 6.39731e-05
1.8 7.08754e-05 0.000128658 6.39731e-05
2.4 0 0.000128658 6.39731e-05
3 0 0.000128658 6.39731e-05
3.6 0 0.000128658 6.39731e-05
END DIST

Metal 4 OVER 2 UNDER 5
DIST count 12 width 0.3
0.3 0.000555432 0.000240628 6.39731e-05
0.6 0.000312295 0.000240628 6.39731e-05
0.75 0.000259315 0.000240628 6.39731e-05
0.9 0.000222495 0.000240628 6.39731e-05
1.05 0.000195244 0.000240628 6.39731e-05
1.2 0.000174172 0.000240628 6.39731e-05
1.35 9.45003e-05 0.000240628 6.39731e-05
1.5 8.50505e-05 0.000240628 6.39731e-05
1.8 7.08754e-05 0.000240628 6.39731e-05
2.4 0 0.000240628 6.39731e-05
3 0 0.000240628 6.39731e-05
3.6 0 0.000240628 6.39731e-05
END DIST

Metal 4 OVER 2 UNDER 6
DIST count 12 width 0.3
0.3 0.000555432 0.000155164 6.39731e-05
0.6 0.000312295 0.000155164 6.39731e-05
0.75 0.000259315 0.000155164 6.39731e-05
0.9 0.000222495 0.000155164 6.39731e-05
1.05 0.000195244 0.000155164 6.39731e-05
1.2 0.000174172 0.000155164 6.39731e-05
1.35 9.45003e-05 0.000155164 6.39731e-05
1.5 8.50505e-05 0.000155164 6.39731e-05
1.8 7.08754e-05 0.000155164 6.39731e-05
2.4 0 0.000155164 6.39731e-05
3 0 0.000155164 6.39731e-05
3.6 0 0.000155164 6.39731e-05
END DIST

Metal 4 OVER 3 UNDER 5
DIST count 12 width 0.3
0.3 0.000555432 0.000328464 6.39731e-05
0.6 0.000312295 0.000328464 6.39731e-05
0.75 0.000259315 0.000328464 6.39731e-05
0.9 0.000222495 0.000328464 6.39731e-05
1.05 0.000195244 0.000328464 6.39731e-05
1.2 0.000174172 0.000328464 6.39731e-05
1.35 9.45003e-05 0.000328464 6.39731e-05
1.5 8.50505e-05 0.000328464 6.39731e-05
1.8 7.08754e-05 0.000328464 6.39731e-05
2.4 0 0.000328464 6.39731e-05
3 0 0.000328464 6.39731e-05
3.6 0 0.000328464 6.39731e-05
END DIST

Metal 4 OVER 3 UNDER 6
DIST count 12 width 0.3
0.3 0.000555432 0.000242999 6.39731e-05
0.6 0.000312295 0.000242999 6.39731e-05
0.75 0.000259315 0.000242999 6.39731e-05
0.9 0.000222495 0.000242999 6.39731e-05
1.05 0.000195244 0.000242999 6.39731e-05
1.2 0.000174172 0.000242999 6.39731e-05
1.35 9.45003e-05 0.000242999 6.39731e-05
1.5 8.50505e-05 0.000242999 6.39731e-05
1.8 7.08754e-05 0.000242999 6.39731e-05
2.4 0 0.000242999 6.39731e-05
3 0 0.000242999 6.39731e-05
3.6 0 0.000242999 6.39731e-05
END DIST

Metal 5 RESOVER
WIDTH Table 1 entries:  0.3

Metal 5 RESOVER 0
DIST count 55 width 0.3
0 0 0 0.000127946
0 0.62 0 0.000127946
0 0.92 0 0.000127946
0 1.39 0 0.000127946
0 1.54 0 0.000127946
0 1.84 0 0.000127946
0 2.31 0 0.000127946
0 2.46 0 0.000127946
0 2.76 0 0.000127946
0 3.68 0 0.000127946
0.62 0.62 0 0.000127946
0.62 0.92 0 0.000127946
0.62 1.39 0 0.000127946
0.62 1.54 0 0.000127946
0.62 1.84 0 0.000127946
0.62 2.31 0 0.000127946
0.62 2.46 0 0.000127946
0.62 2.76 0 0.000127946
0.62 3.68 0 0.000127946
0.92 0.92 0 0.000127946
0.92 1.39 0 0.000127946
0.92 1.54 0 0.000127946
0.92 1.84 0 0.000127946
0.92 2.31 0 0.000127946
0.92 2.46 0 0.000127946
0.92 2.76 0 0.000127946
0.92 3.68 0 0.000127946
1.39 1.39 0 0.000127946
1.39 1.54 0 0.000127946
1.39 1.84 0 0.000127946
1.39 2.31 0 0.000127946
1.39 2.46 0 0.000127946
1.39 2.76 0 0.000127946
1.39 3.68 0 0.000127946
1.54 1.54 0 0.000127946
1.54 1.84 0 0.000127946
1.54 2.31 0 0.000127946
1.54 2.46 0 0.000127946
1.54 2.76 0 0.000127946
1.54 3.68 0 0.000127946
1.84 1.84 0 0.000127946
1.84 2.31 0 0.000127946
1.84 2.46 0 0.000127946
1.84 2.76 0 0.000127946
1.84 3.68 0 0.000127946
2.31 2.31 0 0.000127946
2.31 2.46 0 0.000127946
2.31 2.76 0 0.000127946
2.31 3.68 0 0.000127946
2.46 2.46 0 0.000127946
2.46 2.76 0 0.000127946
2.46 3.68 0 0.000127946
2.76 2.76 0 0.000127946
2.76 3.68 0 0.000127946
3.68 0 3.68 0.000127946
END DIST

Metal 5 RESOVER 1
DIST count 0 width 0.3
END DIST

Metal 5 RESOVER 2
DIST count 0 width 0.3
END DIST

Metal 5 RESOVER 3
DIST count 0 width 0.3
END DIST

Metal 5 RESOVER 4
DIST count 0 width 0.3
END DIST

Metal 5 OVER
WIDTH Table 1 entries:  0.3

Metal 5 OVER 0
DIST count 12 width 0.3
0.3 0.000564893 3.60481e-05 6.39731e-05
0.6 0.000316187 3.60481e-05 6.39731e-05
0.75 0.000262809 3.60481e-05 6.39731e-05
0.9 0.00022587 3.60481e-05 6.39731e-05
1.05 0.000198589 3.60481e-05 6.39731e-05
1.2 0.00011335 3.60481e-05 6.39731e-05
1.35 0.000100756 3.60481e-05 6.39731e-05
1.5 9.06801e-05 3.60481e-05 6.39731e-05
1.8 7.5567e-05 3.60481e-05 6.39731e-05
2.4 0 3.60481e-05 6.39731e-05
3 0 3.60481e-05 6.39731e-05
3.6 0 3.60481e-05 6.39731e-05
END DIST

Metal 5 OVER 1
DIST count 12 width 0.3
0.3 0.000564893 7.2665e-05 6.39731e-05
0.6 0.000316187 7.2665e-05 6.39731e-05
0.75 0.000262809 7.2665e-05 6.39731e-05
0.9 0.00022587 7.2665e-05 6.39731e-05
1.05 0.000198589 7.2665e-05 6.39731e-05
1.2 0.00011335 7.2665e-05 6.39731e-05
1.35 0.000100756 7.2665e-05 6.39731e-05
1.5 9.06801e-05 7.2665e-05 6.39731e-05
1.8 7.5567e-05 7.2665e-05 6.39731e-05
2.4 0 7.2665e-05 6.39731e-05
3 0 7.2665e-05 6.39731e-05
3.6 0 7.2665e-05 6.39731e-05
END DIST

Metal 5 OVER 2
DIST count 12 width 0.3
0.3 0.000564893 9.01702e-05 6.39731e-05
0.6 0.000316187 9.01702e-05 6.39731e-05
0.75 0.000262809 9.01702e-05 6.39731e-05
0.9 0.00022587 9.01702e-05 6.39731e-05
1.05 0.000198589 9.01702e-05 6.39731e-05
1.2 0.00011335 9.01702e-05 6.39731e-05
1.35 0.000100756 9.01702e-05 6.39731e-05
1.5 9.06801e-05 9.01702e-05 6.39731e-05
1.8 7.5567e-05 9.01702e-05 6.39731e-05
2.4 0 9.01702e-05 6.39731e-05
3 0 9.01702e-05 6.39731e-05
3.6 0 9.01702e-05 6.39731e-05
END DIST

Metal 5 OVER 3
DIST count 12 width 0.3
0.3 0.000564893 0.000117028 6.39731e-05
0.6 0.000316187 0.000117028 6.39731e-05
0.75 0.000262809 0.000117028 6.39731e-05
0.9 0.00022587 0.000117028 6.39731e-05
1.05 0.000198589 0.000117028 6.39731e-05
1.2 0.00011335 0.000117028 6.39731e-05
1.35 0.000100756 0.000117028 6.39731e-05
1.5 9.06801e-05 0.000117028 6.39731e-05
1.8 7.5567e-05 0.000117028 6.39731e-05
2.4 0 0.000117028 6.39731e-05
3 0 0.000117028 6.39731e-05
3.6 0 0.000117028 6.39731e-05
END DIST

Metal 5 OVER 4
DIST count 12 width 0.3
0.3 0.000564893 0.000145232 6.39731e-05
0.6 0.000316187 0.000145232 6.39731e-05
0.75 0.000262809 0.000145232 6.39731e-05
0.9 0.00022587 0.000145232 6.39731e-05
1.05 0.000198589 0.000145232 6.39731e-05
1.2 0.00011335 0.000145232 6.39731e-05
1.35 0.000100756 0.000145232 6.39731e-05
1.5 9.06801e-05 0.000145232 6.39731e-05
1.8 7.5567e-05 0.000145232 6.39731e-05
2.4 0 0.000145232 6.39731e-05
3 0 0.000145232 6.39731e-05
3.6 0 0.000145232 6.39731e-05
END DIST

Metal 5 UNDER
WIDTH Table 1 entries:  0.3

Metal 5 UNDER 6
DIST count 12 width 0.3
0.3 0.000564893 0.000110533 6.39731e-05
0.6 0.000316187 0.000110533 6.39731e-05
0.75 0.000262809 0.000110533 6.39731e-05
0.9 0.00022587 0.000110533 6.39731e-05
1.05 0.000198589 0.000110533 6.39731e-05
1.2 0.00011335 0.000110533 6.39731e-05
1.35 0.000100756 0.000110533 6.39731e-05
1.5 9.06801e-05 0.000110533 6.39731e-05
1.8 7.5567e-05 0.000110533 6.39731e-05
2.4 0 0.000110533 6.39731e-05
3 0 0.000110533 6.39731e-05
3.6 0 0.000110533 6.39731e-05
END DIST

Metal 5 DIAGUNDER
WIDTH Table 1 entries:  0.3

Metal 5 DIAGUNDER 6
DIST count 13 width 0.3
0 0 6.81606e-05 6.39731e-05
0.3 0 0 6.39731e-05
0.6 0 0 6.39731e-05
0.75 0 0 6.39731e-05
0.9 0 0 6.39731e-05
1.05 0 0 6.39731e-05
1.2 0 0 6.39731e-05
1.35 0 0 6.39731e-05
1.5 0 0 6.39731e-05
1.8 0 0 6.39731e-05
2.4 0 0 6.39731e-05
3 0 0 6.39731e-05
3.6 0 0 6.39731e-05
END DIST

Metal 5 OVERUNDER
WIDTH Table 1 entries:  0.3

Metal 5 OVER 1 UNDER 6
DIST count 12 width 0.3
0.3 0.000564893 0.00014715 6.39731e-05
0.6 0.000316187 0.00014715 6.39731e-05
0.75 0.000262809 0.00014715 6.39731e-05
0.9 0.00022587 0.00014715 6.39731e-05
1.05 0.000198589 0.00014715 6.39731e-05
1.2 0.00011335 0.00014715 6.39731e-05
1.35 0.000100756 0.00014715 6.39731e-05
1.5 9.06801e-05 0.00014715 6.39731e-05
1.8 7.5567e-05 0.00014715 6.39731e-05
2.4 0 0.00014715 6.39731e-05
3 0 0.00014715 6.39731e-05
3.6 0 0.00014715 6.39731e-05
END DIST

Metal 5 OVER 2 UNDER 6
DIST count 12 width 0.3
0.3 0.000564893 0.000164655 6.39731e-05
0.6 0.000316187 0.000164655 6.39731e-05
0.75 0.000262809 0.000164655 6.39731e-05
0.9 0.00022587 0.000164655 6.39731e-05
1.05 0.000198589 0.000164655 6.39731e-05
1.2 0.00011335 0.000164655 6.39731e-05
1.35 0.000100756 0.000164655 6.39731e-05
1.5 9.06801e-05 0.000164655 6.39731e-05
1.8 7.5567e-05 0.000164655 6.39731e-05
2.4 0 0.000164655 6.39731e-05
3 0 0.000164655 6.39731e-05
3.6 0 0.000164655 6.39731e-05
END DIST

Metal 5 OVER 3 UNDER 6
DIST count 12 width 0.3
0.3 0.000564893 0.000191513 6.39731e-05
0.6 0.000316187 0.000191513 6.39731e-05
0.75 0.000262809 0.000191513 6.39731e-05
0.9 0.00022587 0.000191513 6.39731e-05
1.05 0.000198589 0.000191513 6.39731e-05
1.2 0.00011335 0.000191513 6.39731e-05
1.35 0.000100756 0.000191513 6.39731e-05
1.5 9.06801e-05 0.000191513 6.39731e-05
1.8 7.5567e-05 0.000191513 6.39731e-05
2.4 0 0.000191513 6.39731e-05
3 0 0.000191513 6.39731e-05
3.6 0 0.000191513 6.39731e-05
END DIST

Metal 5 OVER 4 UNDER 6
DIST count 12 width 0.3
0.3 0.000564893 0.000219717 6.39731e-05
0.6 0.000316187 0.000219717 6.39731e-05
0.75 0.000262809 0.000219717 6.39731e-05
0.9 0.00022587 0.000219717 6.39731e-05
1.05 0.000198589 0.000219717 6.39731e-05
1.2 0.00011335 0.000219717 6.39731e-05
1.35 0.000100756 0.000219717 6.39731e-05
1.5 9.06801e-05 0.000219717 6.39731e-05
1.8 7.5567e-05 0.000219717 6.39731e-05
2.4 0 0.000219717 6.39731e-05
3 0 0.000219717 6.39731e-05
3.6 0 0.000219717 6.39731e-05
END DIST

Metal 6 RESOVER
WIDTH Table 1 entries:  1.6

Metal 6 RESOVER 0
DIST count 55 width 1.6
0 0 0 1.32576e-05
0 1.8 0 1.32576e-05
0 3.4 0 1.32576e-05
0 4.4 0 1.32576e-05
0 5.2 0 1.32576e-05
0 6.8 0 1.32576e-05
0 7.8 0 1.32576e-05
0 8.6 0 1.32576e-05
0 10.2 0 1.32576e-05
0 13.6 0 1.32576e-05
1.8 1.8 0 1.32576e-05
1.8 3.4 0 1.32576e-05
1.8 4.4 0 1.32576e-05
1.8 5.2 0 1.32576e-05
1.8 6.8 0 1.32576e-05
1.8 7.8 0 1.32576e-05
1.8 8.6 0 1.32576e-05
1.8 10.2 0 1.32576e-05
1.8 13.6 0 1.32576e-05
3.4 3.4 0 1.32576e-05
3.4 4.4 0 1.32576e-05
3.4 5.2 0 1.32576e-05
3.4 6.8 0 1.32576e-05
3.4 7.8 0 1.32576e-05
3.4 8.6 0 1.32576e-05
3.4 10.2 0 1.32576e-05
3.4 13.6 0 1.32576e-05
4.4 4.4 0 1.32576e-05
4.4 5.2 0 1.32576e-05
4.4 6.8 0 1.32576e-05
4.4 7.8 0 1.32576e-05
4.4 8.6 0 1.32576e-05
4.4 10.2 0 1.32576e-05
4.4 13.6 0 1.32576e-05
5.2 5.2 0 1.32576e-05
5.2 6.8 0 1.32576e-05
5.2 7.8 0 1.32576e-05
5.2 8.6 0 1.32576e-05
5.2 10.2 0 1.32576e-05
5.2 13.6 0 1.32576e-05
6.8 6.8 0 1.32576e-05
6.8 7.8 0 1.32576e-05
6.8 8.6 0 1.32576e-05
6.8 10.2 0 1.32576e-05
6.8 13.6 0 1.32576e-05
7.8 7.8 0 1.32576e-05
7.8 8.6 0 1.32576e-05
7.8 10.2 0 1.32576e-05
7.8 13.6 0 1.32576e-05
8.6 8.6 0 1.32576e-05
8.6 10.2 0 1.32576e-05
8.6 13.6 0 1.32576e-05
10.2 10.2 0 1.32576e-05
10.2 13.6 0 1.32576e-05
13.6 0 13.6 1.32576e-05
END DIST

Metal 6 RESOVER 1
DIST count 0 width 1.6
END DIST

Metal 6 RESOVER 2
DIST count 0 width 1.6
END DIST

Metal 6 RESOVER 3
DIST count 0 width 1.6
END DIST

Metal 6 RESOVER 4
DIST count 0 width 1.6
END DIST

Metal 6 RESOVER 5
DIST count 0 width 1.6
END DIST

Metal 6 OVER
WIDTH Table 1 entries:  1.6

Metal 6 OVER 0
DIST count 12 width 1.6
1.6 0.000160429 4.24145e-05 6.62879e-06
3.2 0 4.24145e-05 6.62879e-06
4 0 4.24145e-05 6.62879e-06
4.8 0 4.24145e-05 6.62879e-06
5.6 0 4.24145e-05 6.62879e-06
6.4 0 4.24145e-05 6.62879e-06
7.2 0 4.24145e-05 6.62879e-06
8 0 4.24145e-05 6.62879e-06
9.6 0 4.24145e-05 6.62879e-06
12.8 0 4.24145e-05 6.62879e-06
16 0 4.24145e-05 6.62879e-06
19.2 0 4.24145e-05 6.62879e-06
END DIST

Metal 6 OVER 1
DIST count 12 width 1.6
1.6 0.000160429 0.000134372 6.62879e-06
3.2 0 0.000134372 6.62879e-06
4 0 0.000134372 6.62879e-06
4.8 0 0.000134372 6.62879e-06
5.6 0 0.000134372 6.62879e-06
6.4 0 0.000134372 6.62879e-06
7.2 0 0.000134372 6.62879e-06
8 0 0.000134372 6.62879e-06
9.6 0 0.000134372 6.62879e-06
12.8 0 0.000134372 6.62879e-06
16 0 0.000134372 6.62879e-06
19.2 0 0.000134372 6.62879e-06
END DIST

Metal 6 OVER 2
DIST count 12 width 1.6
1.6 0.000160429 0.000197452 6.62879e-06
3.2 0 0.000197452 6.62879e-06
4 0 0.000197452 6.62879e-06
4.8 0 0.000197452 6.62879e-06
5.6 0 0.000197452 6.62879e-06
6.4 0 0.000197452 6.62879e-06
7.2 0 0.000197452 6.62879e-06
8 0 0.000197452 6.62879e-06
9.6 0 0.000197452 6.62879e-06
12.8 0 0.000197452 6.62879e-06
16 0 0.000197452 6.62879e-06
19.2 0 0.000197452 6.62879e-06
END DIST

Metal 6 OVER 3
DIST count 12 width 1.6
1.6 0.000160429 0.000258046 6.62879e-06
3.2 0 0.000258046 6.62879e-06
4 0 0.000258046 6.62879e-06
4.8 0 0.000258046 6.62879e-06
5.6 0 0.000258046 6.62879e-06
6.4 0 0.000258046 6.62879e-06
7.2 0 0.000258046 6.62879e-06
8 0 0.000258046 6.62879e-06
9.6 0 0.000258046 6.62879e-06
12.8 0 0.000258046 6.62879e-06
16 0 0.000258046 6.62879e-06
19.2 0 0.000258046 6.62879e-06
END DIST

Metal 6 OVER 4
DIST count 12 width 1.6
1.6 0.000160429 0.000242199 6.62879e-06
3.2 0 0.000242199 6.62879e-06
4 0 0.000242199 6.62879e-06
4.8 0 0.000242199 6.62879e-06
5.6 0 0.000242199 6.62879e-06
6.4 0 0.000242199 6.62879e-06
7.2 0 0.000242199 6.62879e-06
8 0 0.000242199 6.62879e-06
9.6 0 0.000242199 6.62879e-06
12.8 0 0.000242199 6.62879e-06
16 0 0.000242199 6.62879e-06
19.2 0 0.000242199 6.62879e-06
END DIST

Metal 6 OVER 5
DIST count 12 width 1.6
1.6 0.000160429 0.000413849 6.62879e-06
3.2 0 0.000413849 6.62879e-06
4 0 0.000413849 6.62879e-06
4.8 0 0.000413849 6.62879e-06
5.6 0 0.000413849 6.62879e-06
6.4 0 0.000413849 6.62879e-06
7.2 0 0.000413849 6.62879e-06
8 0 0.000413849 6.62879e-06
9.6 0 0.000413849 6.62879e-06
12.8 0 0.000413849 6.62879e-06
16 0 0.000413849 6.62879e-06
19.2 0 0.000413849 6.62879e-06
END DIST

Metal 6 UNDER
WIDTH Table 0 entries: 

Metal 6 DIAGUNDER
WIDTH Table 0 entries: 
END DensityModel 0