blob: 9c64437fb38f2ba95c911dc2b7b1764138cde308 [file] [log] [blame]
Extraction Rules for OpenRCX
DIAGMODEL ON
LayerCount 5
DensityRate 1 0
DensityModel 0
Metal 1 RESOVER
WIDTH Table 1 entries: 0.23
Metal 1 RESOVER 0
DIST count 55 width 0.23
0 0 0 0.000395257
0 0.33 0 0.000395257
0 0.56 0 0.000395257
0 0.775 0 0.000395257
0 0.89 0 0.000395257
0 1.12 0 0.000395257
0 1.335 0 0.000395257
0 1.45 0 0.000395257
0 1.68 0 0.000395257
0 2.24 0 0.000395257
0.33 0.33 0 0.000395257
0.33 0.56 0 0.000395257
0.33 0.775 0 0.000395257
0.33 0.89 0 0.000395257
0.33 1.12 0 0.000395257
0.33 1.335 0 0.000395257
0.33 1.45 0 0.000395257
0.33 1.68 0 0.000395257
0.33 2.24 0 0.000395257
0.56 0.56 0 0.000395257
0.56 0.775 0 0.000395257
0.56 0.89 0 0.000395257
0.56 1.12 0 0.000395257
0.56 1.335 0 0.000395257
0.56 1.45 0 0.000395257
0.56 1.68 0 0.000395257
0.56 2.24 0 0.000395257
0.775 0.775 0 0.000395257
0.775 0.89 0 0.000395257
0.775 1.12 0 0.000395257
0.775 1.335 0 0.000395257
0.775 1.45 0 0.000395257
0.775 1.68 0 0.000395257
0.775 2.24 0 0.000395257
0.89 0.89 0 0.000395257
0.89 1.12 0 0.000395257
0.89 1.335 0 0.000395257
0.89 1.45 0 0.000395257
0.89 1.68 0 0.000395257
0.89 2.24 0 0.000395257
1.12 1.12 0 0.000395257
1.12 1.335 0 0.000395257
1.12 1.45 0 0.000395257
1.12 1.68 0 0.000395257
1.12 2.24 0 0.000395257
1.335 1.335 0 0.000395257
1.335 1.45 0 0.000395257
1.335 1.68 0 0.000395257
1.335 2.24 0 0.000395257
1.45 1.45 0 0.000395257
1.45 1.68 0 0.000395257
1.45 2.24 0 0.000395257
1.68 1.68 0 0.000395257
1.68 2.24 0 0.000395257
2.24 0 2.24 0.000395257
END DIST
Metal 1 OVER
WIDTH Table 1 entries: 0.23
Metal 1 OVER 0
DIST count 12 width 0.23
0.23 0.000454697 7.19967e-06 0.000197628
0.46 0.000199632 1.04793e-05 0.000197628
0.575 0.00015589 1.20439e-05 0.000197628
0.69 0.000127879 1.35461e-05 0.000197628
0.805 0.000108401 1.49797e-05 0.000197628
0.92 9.4072e-05 1.63407e-05 0.000197628
1.035 8.30887e-05 1.76274e-05 0.000197628
1.15 7.44022e-05 1.88394e-05 0.000197628
1.38 6.15356e-05 2.10459e-05 0.000197628
1.84 4.5722e-05 2.46722e-05 0.000197628
2.3 3.63744e-05 2.74469e-05 0.000197628
2.76 0 5.97913e-05 0.000197628
END DIST
Metal 1 UNDER
WIDTH Table 1 entries: 0.23
Metal 1 UNDER 2
DIST count 12 width 0.23
0.23 0.000454686 2.77172e-05 0.000197628
0.46 0.000199621 3.58072e-05 0.000197628
0.575 0.00015589 3.93853e-05 0.000197628
0.69 0.000127879 4.26872e-05 0.000197628
0.805 0.000108401 4.56964e-05 0.000197628
0.92 9.4072e-05 4.84343e-05 0.000197628
1.035 8.30887e-05 5.09243e-05 0.000197628
1.15 7.44022e-05 5.31899e-05 0.000197628
1.38 6.15356e-05 5.71381e-05 0.000197628
1.84 4.5722e-05 6.32218e-05 0.000197628
2.3 3.63744e-05 6.7619e-05 0.000197628
2.76 0 0.0001011 0.000197628
END DIST
Metal 1 UNDER 3
DIST count 12 width 0.23
0.23 0.00045468 1.28552e-05 0.000197628
0.46 0.000199615 1.7199e-05 0.000197628
0.575 0.00015589 1.92841e-05 0.000197628
0.69 0.000127879 2.12976e-05 0.000197628
0.805 0.000108401 2.32299e-05 0.000197628
0.92 9.4072e-05 2.50752e-05 0.000197628
1.035 8.30887e-05 2.68316e-05 0.000197628
1.15 7.44022e-05 2.8499e-05 0.000197628
1.38 6.15356e-05 3.15656e-05 0.000197628
1.84 4.5722e-05 3.67204e-05 0.000197628
2.3 3.63744e-05 4.07744e-05 0.000197628
2.76 0 7.41813e-05 0.000197628
END DIST
Metal 1 UNDER 4
DIST count 12 width 0.23
0.23 0.00045468 1.02746e-05 0.000197628
0.46 0.000199615 1.40204e-05 0.000197628
0.575 0.00015589 1.58199e-05 0.000197628
0.69 0.000127879 1.75552e-05 0.000197628
0.805 0.000108401 1.92182e-05 0.000197628
0.92 9.4072e-05 2.0807e-05 0.000197628
1.035 8.30887e-05 2.23195e-05 0.000197628
1.15 7.44022e-05 2.37538e-05 0.000197628
1.38 6.15356e-05 2.63939e-05 0.000197628
1.84 4.5722e-05 3.08459e-05 0.000197628
2.3 3.63744e-05 3.43777e-05 0.000197628
2.76 0 6.74177e-05 0.000197628
END DIST
Metal 1 UNDER 5
DIST count 12 width 0.23
0.23 0.00045468 9.18575e-06 0.000197628
0.46 0.000199615 1.26875e-05 0.000197628
0.575 0.00015589 1.43657e-05 0.000197628
0.69 0.000127879 1.59816e-05 0.000197628
0.805 0.000108401 1.75288e-05 0.000197628
0.92 9.4072e-05 1.90023e-05 0.000197628
1.035 8.30887e-05 2.04004e-05 0.000197628
1.15 7.44022e-05 2.17238e-05 0.000197628
1.38 6.15356e-05 2.41508e-05 0.000197628
1.84 4.5722e-05 2.82071e-05 0.000197628
2.3 3.63744e-05 3.13939e-05 0.000197628
2.76 0 6.41304e-05 0.000197628
END DIST
Metal 1 DIAGUNDER
WIDTH Table 1 entries: 0.23
Metal 1 DIAGUNDER 2
DIST count 13 width 0.23
0 0 1.83924e-05 0.000197628
0.23 0 1.9738e-05 0.000197628
0.46 0 1.70605e-05 0.000197628
0.575 0 1.5706e-05 0.000197628
0.69 0 1.4517e-05 0.000197628
0.805 0 1.34624e-05 0.000197628
0.92 0 1.2542e-05 0.000197628
1.035 0 1.17454e-05 0.000197628
1.15 0 1.10303e-05 0.000197628
1.38 0 9.87202e-06 0.000197628
1.84 0 8.39412e-06 0.000197628
2.3 0 7.48432e-06 0.000197628
2.76 0 5.86245e-06 0.000197628
END DIST
Metal 1 DIAGUNDER 3
DIST count 13 width 0.23
0 0 1.02394e-05 0.000197628
0.23 0 1.03954e-05 0.000197628
0.46 0 1.01706e-05 0.000197628
0.575 0 1.00341e-05 0.000197628
0.69 0 9.8895e-06 0.000197628
0.805 0 9.73856e-06 0.000197628
0.92 0 9.58274e-06 0.000197628
1.035 0 9.42367e-06 0.000197628
1.15 0 9.23505e-06 0.000197628
1.38 0 8.86148e-06 0.000197628
1.84 0 8.24625e-06 0.000197628
2.3 0 7.70531e-06 0.000197628
2.76 0 6.15995e-06 0.000197628
END DIST
Metal 1 DIAGUNDER 4
DIST count 13 width 0.23
0 0 8.25977e-06 0.000197628
0.23 0 8.72723e-06 0.000197628
0.46 0 8.58924e-06 0.000197628
0.575 0 8.51234e-06 0.000197628
0.69 0 8.4343e-06 0.000197628
0.805 0 8.35525e-06 0.000197628
0.92 0 8.27523e-06 0.000197628
1.035 0 8.19447e-06 0.000197628
1.15 0 8.08542e-06 0.000197628
1.38 0 7.87027e-06 0.000197628
1.84 0 7.54664e-06 0.000197628
2.3 0 7.24949e-06 0.000197628
2.76 0 5.83764e-06 0.000197628
END DIST
Metal 1 DIAGUNDER 5
DIST count 13 width 0.23
0 0 7.35753e-06 0.000197628
0.23 0 8.17681e-06 0.000197628
0.46 0 8.02174e-06 0.000197628
0.575 0 7.95771e-06 0.000197628
0.69 0 7.8939e-06 0.000197628
0.805 0 7.83035e-06 0.000197628
0.92 0 7.76706e-06 0.000197628
1.035 0 7.704e-06 0.000197628
1.15 0 7.61484e-06 0.000197628
1.38 0 7.44128e-06 0.000197628
1.84 0 7.20004e-06 0.000197628
2.3 0 6.96399e-06 0.000197628
2.76 0 3.78753e-06 0.000197628
END DIST
Metal 2 RESOVER
WIDTH Table 1 entries: 0.28
Metal 2 RESOVER 0
DIST count 55 width 0.28
0 0 0 0.000324675
0 0.28 0 0.000324675
0 0.56 0 0.000324675
0 0.7 0 0.000324675
0 0.84 0 0.000324675
0 1.12 0 0.000324675
0 1.26 0 0.000324675
0 1.4 0 0.000324675
0 1.68 0 0.000324675
0 2.24 0 0.000324675
0.28 0.28 0 0.000324675
0.28 0.56 0 0.000324675
0.28 0.7 0 0.000324675
0.28 0.84 0 0.000324675
0.28 1.12 0 0.000324675
0.28 1.26 0 0.000324675
0.28 1.4 0 0.000324675
0.28 1.68 0 0.000324675
0.28 2.24 0 0.000324675
0.56 0.56 0 0.000324675
0.56 0.7 0 0.000324675
0.56 0.84 0 0.000324675
0.56 1.12 0 0.000324675
0.56 1.26 0 0.000324675
0.56 1.4 0 0.000324675
0.56 1.68 0 0.000324675
0.56 2.24 0 0.000324675
0.7 0.7 0 0.000324675
0.7 0.84 0 0.000324675
0.7 1.12 0 0.000324675
0.7 1.26 0 0.000324675
0.7 1.4 0 0.000324675
0.7 1.68 0 0.000324675
0.7 2.24 0 0.000324675
0.84 0.84 0 0.000324675
0.84 1.12 0 0.000324675
0.84 1.26 0 0.000324675
0.84 1.4 0 0.000324675
0.84 1.68 0 0.000324675
0.84 2.24 0 0.000324675
1.12 1.12 0 0.000324675
1.12 1.26 0 0.000324675
1.12 1.4 0 0.000324675
1.12 1.68 0 0.000324675
1.12 2.24 0 0.000324675
1.26 1.26 0 0.000324675
1.26 1.4 0 0.000324675
1.26 1.68 0 0.000324675
1.26 2.24 0 0.000324675
1.4 1.4 0 0.000324675
1.4 1.68 0 0.000324675
1.4 2.24 0 0.000324675
1.68 1.68 0 0.000324675
1.68 2.24 0 0.000324675
2.24 0 2.24 0.000324675
END DIST
Metal 2 RESOVER 1
DIST count 0 width 0.28
END DIST
Metal 2 OVER
WIDTH Table 1 entries: 0.28
Metal 2 OVER 0
DIST count 12 width 0.28
0.28 0.000178146 4.25608e-06 0.000162338
0.56 0.000116564 6.02742e-06 0.000162338
0.7 9.93853e-05 6.89645e-06 0.000162338
0.84 8.66205e-05 7.7509e-06 0.000162338
0.98 7.67612e-05 8.58851e-06 0.000162338
1.12 6.89169e-05 9.40727e-06 0.000162338
1.26 6.25273e-05 1.02055e-05 0.000162338
1.4 5.72219e-05 1.09818e-05 0.000162338
1.68 4.89203e-05 1.24648e-05 0.000162338
2.24 3.79181e-05 1.51393e-05 0.000162338
2.8 3.09561e-05 1.74305e-05 0.000162338
3.36 0 4.55294e-05 0.000162338
END DIST
Metal 2 OVER 1
DIST count 12 width 0.28
0.28 0.000178144 2.72428e-05 0.000162338
0.56 0.000116563 3.62158e-05 0.000162338
0.7 9.93853e-05 3.99007e-05 0.000162338
0.84 8.66205e-05 4.30941e-05 0.000162338
0.98 7.67612e-05 4.58584e-05 0.000162338
1.12 6.89169e-05 4.82604e-05 0.000162338
1.26 6.25273e-05 5.03585e-05 0.000162338
1.4 5.72219e-05 5.22047e-05 0.000162338
1.68 4.89203e-05 5.53011e-05 0.000162338
2.24 3.79181e-05 5.986e-05 0.000162338
2.8 3.09561e-05 6.30765e-05 0.000162338
3.36 0 9.16329e-05 0.000162338
END DIST
Metal 2 UNDER
WIDTH Table 1 entries: 0.28
Metal 2 UNDER 3
DIST count 12 width 0.28
0.28 0.000178146 3.03672e-05 0.000162338
0.56 0.000116564 3.83777e-05 0.000162338
0.7 9.93853e-05 4.1754e-05 0.000162338
0.84 8.66205e-05 4.47422e-05 0.000162338
0.98 7.67612e-05 4.7389e-05 0.000162338
1.12 6.89169e-05 4.97446e-05 0.000162338
1.26 6.25273e-05 5.18523e-05 0.000162338
1.4 5.72219e-05 5.37542e-05 0.000162338
1.68 4.89203e-05 5.70536e-05 0.000162338
2.24 3.79181e-05 6.22118e-05 0.000162338
2.8 3.09561e-05 6.60993e-05 0.000162338
3.36 0 9.52982e-05 0.000162338
END DIST
Metal 2 UNDER 4
DIST count 12 width 0.28
0.28 0.000178144 1.1448e-05 0.000162338
0.56 0.000116563 1.48012e-05 0.000162338
0.7 9.93853e-05 1.64368e-05 0.000162338
0.84 8.66205e-05 1.80344e-05 0.000162338
0.98 7.67612e-05 1.95917e-05 0.000162338
1.12 6.89169e-05 2.11013e-05 0.000162338
1.26 6.25273e-05 2.25633e-05 0.000162338
1.4 5.72219e-05 2.3971e-05 0.000162338
1.68 4.89203e-05 2.663e-05 0.000162338
2.24 3.79181e-05 3.13121e-05 0.000162338
2.8 3.09561e-05 3.52068e-05 0.000162338
3.36 0 6.45911e-05 0.000162338
END DIST
Metal 2 UNDER 5
DIST count 12 width 0.28
0.28 0.000178144 7.9099e-06 0.000162338
0.56 0.000116563 1.02802e-05 0.000162338
0.7 9.93853e-05 1.145e-05 0.000162338
0.84 8.66205e-05 1.26009e-05 0.000162338
0.98 7.67612e-05 1.37326e-05 0.000162338
1.12 6.89169e-05 1.48421e-05 0.000162338
1.26 6.25273e-05 1.59266e-05 0.000162338
1.4 5.72219e-05 1.69848e-05 0.000162338
1.68 4.89203e-05 1.90158e-05 0.000162338
2.24 3.79181e-05 2.27202e-05 0.000162338
2.8 3.09561e-05 2.59452e-05 0.000162338
3.36 0 5.48793e-05 0.000162338
END DIST
Metal 2 DIAGUNDER
WIDTH Table 1 entries: 0.28
Metal 2 DIAGUNDER 3
DIST count 13 width 0.28
0 0 2.07232e-05 0.000162338
0.28 0 2.22803e-05 0.000162338
0.56 0 1.84181e-05 0.000162338
0.7 0 1.67029e-05 0.000162338
0.84 0 1.52271e-05 0.000162338
0.98 0 1.39831e-05 0.000162338
1.12 0 1.29434e-05 0.000162338
1.26 0 1.20751e-05 0.000162338
1.4 0 1.13115e-05 0.000162338
1.68 0 1.01105e-05 0.000162338
2.24 0 8.64856e-06 0.000162338
2.8 0 7.76418e-06 0.000162338
3.36 0 6.16973e-06 0.000162338
END DIST
Metal 2 DIAGUNDER 4
DIST count 13 width 0.28
0 0 1.17052e-05 0.000162338
0.28 0 1.19605e-05 0.000162338
0.56 0 1.1631e-05 0.000162338
0.7 0 1.14238e-05 0.000162338
0.84 0 1.12054e-05 0.000162338
0.98 0 1.09793e-05 0.000162338
1.12 0 1.07487e-05 0.000162338
1.26 0 1.05166e-05 0.000162338
1.4 0 1.02498e-05 0.000162338
1.68 0 9.73359e-06 0.000162338
2.24 0 8.91641e-06 0.000162338
2.8 0 8.24455e-06 0.000162338
3.36 0 6.59838e-06 0.000162338
END DIST
Metal 2 DIAGUNDER 5
DIST count 13 width 0.28
0 0 9.41692e-06 0.000162338
0.28 0 1.01787e-05 0.000162338
0.56 0 9.96703e-06 0.000162338
0.7 0 9.86418e-06 0.000162338
0.84 0 9.75927e-06 0.000162338
0.98 0 9.65253e-06 0.000162338
1.12 0 9.54416e-06 0.000162338
1.26 0 9.43449e-06 0.000162338
1.4 0 9.28993e-06 0.000162338
1.68 0 9.00476e-06 0.000162338
2.24 0 8.56576e-06 0.000162338
2.8 0 8.13947e-06 0.000162338
3.36 0 4.5364e-06 0.000162338
END DIST
Metal 2 OVERUNDER
WIDTH Table 1 entries: 0.28
Metal 2 OVER 1 UNDER 3
DIST count 12 width 0.28
0.28 0.000178145 5.33539e-05 0.000162338
0.56 0.000116564 6.85661e-05 0.000162338
0.7 9.93853e-05 7.47582e-05 0.000162338
0.84 8.66205e-05 8.00855e-05 0.000162338
0.98 7.67612e-05 8.46589e-05 0.000162338
1.12 6.89169e-05 8.85977e-05 0.000162338
1.26 6.25273e-05 9.20053e-05 0.000162338
1.4 5.72219e-05 9.4977e-05 0.000162338
1.68 4.89203e-05 9.98898e-05 0.000162338
2.24 3.79181e-05 0.000106933 0.000162338
2.8 3.09561e-05 0.000111745 0.000162338
3.36 0 0.000141403 0.000162338
END DIST
Metal 2 OVER 1 UNDER 4
DIST count 12 width 0.28
0.28 0.000178144 3.44347e-05 0.000162338
0.56 0.000116563 4.49896e-05 0.000162338
0.7 9.93853e-05 4.94411e-05 0.000162338
0.84 8.66205e-05 5.33776e-05 0.000162338
0.98 7.67612e-05 5.68615e-05 0.000162338
1.12 6.89169e-05 5.99544e-05 0.000162338
1.26 6.25273e-05 6.27163e-05 0.000162338
1.4 5.72219e-05 6.51938e-05 0.000162338
1.68 4.89203e-05 6.94663e-05 0.000162338
2.24 3.79181e-05 7.60328e-05 0.000162338
2.8 3.09561e-05 8.08528e-05 0.000162338
3.36 0 0.000110696 0.000162338
END DIST
Metal 2 OVER 1 UNDER 5
DIST count 12 width 0.28
0.28 0.000178144 3.08966e-05 0.000162338
0.56 0.000116563 4.04686e-05 0.000162338
0.7 9.93853e-05 4.44543e-05 0.000162338
0.84 8.66205e-05 4.79441e-05 0.000162338
0.98 7.67612e-05 5.10025e-05 0.000162338
1.12 6.89169e-05 5.36952e-05 0.000162338
1.26 6.25273e-05 5.60796e-05 0.000162338
1.4 5.72219e-05 5.82076e-05 0.000162338
1.68 4.89203e-05 6.1852e-05 0.000162338
2.24 3.79181e-05 6.74409e-05 0.000162338
2.8 3.09561e-05 7.15912e-05 0.000162338
3.36 0 0.000100986 0.000162338
END DIST
Metal 3 RESOVER
WIDTH Table 1 entries: 0.28
Metal 3 RESOVER 0
DIST count 55 width 0.28
0 0 0 0.000324675
0 0.28 0 0.000324675
0 0.56 0 0.000324675
0 0.7 0 0.000324675
0 0.84 0 0.000324675
0 1.12 0 0.000324675
0 1.26 0 0.000324675
0 1.4 0 0.000324675
0 1.68 0 0.000324675
0 2.24 0 0.000324675
0.28 0.28 0 0.000324675
0.28 0.56 0 0.000324675
0.28 0.7 0 0.000324675
0.28 0.84 0 0.000324675
0.28 1.12 0 0.000324675
0.28 1.26 0 0.000324675
0.28 1.4 0 0.000324675
0.28 1.68 0 0.000324675
0.28 2.24 0 0.000324675
0.56 0.56 0 0.000324675
0.56 0.7 0 0.000324675
0.56 0.84 0 0.000324675
0.56 1.12 0 0.000324675
0.56 1.26 0 0.000324675
0.56 1.4 0 0.000324675
0.56 1.68 0 0.000324675
0.56 2.24 0 0.000324675
0.7 0.7 0 0.000324675
0.7 0.84 0 0.000324675
0.7 1.12 0 0.000324675
0.7 1.26 0 0.000324675
0.7 1.4 0 0.000324675
0.7 1.68 0 0.000324675
0.7 2.24 0 0.000324675
0.84 0.84 0 0.000324675
0.84 1.12 0 0.000324675
0.84 1.26 0 0.000324675
0.84 1.4 0 0.000324675
0.84 1.68 0 0.000324675
0.84 2.24 0 0.000324675
1.12 1.12 0 0.000324675
1.12 1.26 0 0.000324675
1.12 1.4 0 0.000324675
1.12 1.68 0 0.000324675
1.12 2.24 0 0.000324675
1.26 1.26 0 0.000324675
1.26 1.4 0 0.000324675
1.26 1.68 0 0.000324675
1.26 2.24 0 0.000324675
1.4 1.4 0 0.000324675
1.4 1.68 0 0.000324675
1.4 2.24 0 0.000324675
1.68 1.68 0 0.000324675
1.68 2.24 0 0.000324675
2.24 0 2.24 0.000324675
END DIST
Metal 3 RESOVER 1
DIST count 0 width 0.28
END DIST
Metal 3 RESOVER 2
DIST count 0 width 0.28
END DIST
Metal 3 OVER
WIDTH Table 1 entries: 0.28
Metal 3 OVER 0
DIST count 12 width 0.28
0.28 0.000183067 2.82092e-06 0.000162338
0.56 0.000134715 3.9044e-06 0.000162338
0.7 0.000118981 4.44075e-06 0.000162338
0.84 0.000106551 4.97345e-06 0.000162338
0.98 9.64711e-05 5.50121e-06 0.000162338
1.12 8.81342e-05 6.02334e-06 0.000162338
1.26 8.11241e-05 6.53914e-06 0.000162338
1.4 7.51465e-05 7.04803e-06 0.000162338
1.68 6.54944e-05 8.04291e-06 0.000162338
2.24 5.21087e-05 9.92909e-06 0.000162338
2.8 4.3266e-05 1.16625e-05 0.000162338
3.36 0 5.02278e-05 0.000162338
END DIST
Metal 3 OVER 1
DIST count 12 width 0.28
0.28 0.000183048 8.44666e-06 0.000162338
0.56 0.000134696 1.15749e-05 0.000162338
0.7 0.000118981 1.30929e-05 0.000162338
0.84 0.000106551 1.45738e-05 0.000162338
0.98 9.64711e-05 1.60105e-05 0.000162338
1.12 8.81342e-05 1.73984e-05 0.000162338
1.26 8.11241e-05 1.8737e-05 0.000162338
1.4 7.51465e-05 2.00241e-05 0.000162338
1.68 6.54944e-05 2.24399e-05 0.000162338
2.24 5.21087e-05 2.66586e-05 0.000162338
2.8 4.3266e-05 3.01412e-05 0.000162338
3.36 0 7.00111e-05 0.000162338
END DIST
Metal 3 OVER 2
DIST count 12 width 0.28
0.28 0.000183048 2.77205e-05 0.000162338
0.56 0.000134696 3.66084e-05 0.000162338
0.7 0.000118981 4.02337e-05 0.000162338
0.84 0.000106551 4.33553e-05 0.000162338
0.98 9.64711e-05 4.60398e-05 0.000162338
1.12 8.81342e-05 4.83572e-05 0.000162338
1.26 8.11241e-05 5.03684e-05 0.000162338
1.4 7.51465e-05 5.21271e-05 0.000162338
1.68 6.54944e-05 5.5056e-05 0.000162338
2.24 5.21087e-05 5.93234e-05 0.000162338
2.8 4.3266e-05 6.23258e-05 0.000162338
3.36 0 0.000101577 0.000162338
END DIST
Metal 3 UNDER
WIDTH Table 1 entries: 0.28
Metal 3 UNDER 4
DIST count 12 width 0.28
0.28 0.000183051 2.94385e-05 0.000162338
0.56 0.000134699 3.73038e-05 0.000162338
0.7 0.000118981 4.05632e-05 0.000162338
0.84 0.000106551 4.34246e-05 0.000162338
0.98 9.64711e-05 4.59256e-05 0.000162338
1.12 8.81342e-05 4.81253e-05 0.000162338
1.26 8.11241e-05 5.00714e-05 0.000162338
1.4 7.51465e-05 5.18069e-05 0.000162338
1.68 6.54944e-05 5.47841e-05 0.000162338
2.24 5.21087e-05 5.93795e-05 0.000162338
2.8 4.3266e-05 6.28554e-05 0.000162338
3.36 0 0.000102625 0.000162338
END DIST
Metal 3 UNDER 5
DIST count 12 width 0.28
0.28 0.000183048 9.26113e-06 0.000162338
0.56 0.000134696 1.1705e-05 0.000162338
0.7 0.000118981 1.29062e-05 0.000162338
0.84 0.000106551 1.40897e-05 0.000162338
0.98 9.64711e-05 1.52516e-05 0.000162338
1.12 8.81342e-05 1.63888e-05 0.000162338
1.26 8.11241e-05 1.75007e-05 0.000162338
1.4 7.51465e-05 1.85854e-05 0.000162338
1.68 6.54944e-05 2.06662e-05 0.000162338
2.24 5.21087e-05 2.44636e-05 0.000162338
2.8 4.3266e-05 2.7784e-05 0.000162338
3.36 0 6.76555e-05 0.000162338
END DIST
Metal 3 DIAGUNDER
WIDTH Table 1 entries: 0.28
Metal 3 DIAGUNDER 4
DIST count 13 width 0.28
0 0 2.24361e-05 0.000162338
0.28 0 2.63919e-05 0.000162338
0.56 0 2.23764e-05 0.000162338
0.7 0 2.05119e-05 0.000162338
0.84 0 1.89638e-05 0.000162338
0.98 0 1.76542e-05 0.000162338
1.12 0 1.65548e-05 0.000162338
1.26 0 1.56318e-05 0.000162338
1.4 0 1.48015e-05 0.000162338
1.68 0 1.34797e-05 0.000162338
2.24 0 1.18669e-05 0.000162338
2.8 0 1.08576e-05 0.000162338
3.36 0 8.70108e-06 0.000162338
END DIST
Metal 3 DIAGUNDER 5
DIST count 13 width 0.28
0 0 1.44373e-05 0.000162338
0.28 0 1.59904e-05 0.000162338
0.56 0 1.55926e-05 0.000162338
0.7 0 1.53684e-05 0.000162338
0.84 0 1.5134e-05 0.000162338
0.98 0 1.48917e-05 0.000162338
1.12 0 1.46441e-05 0.000162338
1.26 0 1.43934e-05 0.000162338
1.4 0 1.4092e-05 0.000162338
1.68 0 1.35017e-05 0.000162338
2.24 0 1.25636e-05 0.000162338
2.8 0 1.17279e-05 0.000162338
3.36 0 6.41021e-06 0.000162338
END DIST
Metal 3 OVERUNDER
WIDTH Table 1 entries: 0.28
Metal 3 OVER 1 UNDER 4
DIST count 12 width 0.28
0.28 0.000183111 3.50196e-05 0.000162338
0.56 0.00013472 4.49875e-05 0.000162338
0.7 0.000118981 4.92598e-05 0.000162338
0.84 0.000106551 5.30693e-05 0.000162338
0.98 9.64711e-05 5.64793e-05 0.000162338
1.12 8.81342e-05 5.95447e-05 0.000162338
1.26 8.11241e-05 6.23138e-05 0.000162338
1.4 7.51465e-05 6.48274e-05 0.000162338
1.68 6.54944e-05 6.92255e-05 0.000162338
2.24 5.21087e-05 7.61534e-05 0.000162338
2.8 4.3266e-05 8.13785e-05 0.000162338
3.36 0 0.00012245 0.000162338
END DIST
Metal 3 OVER 1 UNDER 5
DIST count 12 width 0.28
0.28 0.00018317 1.48545e-05 0.000162338
0.56 0.00013474 1.94068e-05 0.000162338
0.7 0.000118981 2.16221e-05 0.000162338
0.84 0.000106551 2.37538e-05 0.000162338
0.98 9.64711e-05 2.58246e-05 0.000162338
1.12 8.81342e-05 2.78276e-05 0.000162338
1.26 8.11241e-05 2.97624e-05 0.000162338
1.4 7.51465e-05 3.16253e-05 0.000162338
1.68 6.54944e-05 3.51269e-05 0.000162338
2.24 5.21087e-05 4.12569e-05 0.000162338
2.8 4.3266e-05 4.63265e-05 0.000162338
3.36 0 8.7503e-05 0.000162338
END DIST
Metal 3 OVER 2 UNDER 4
DIST count 12 width 0.28
0.28 0.00018317 5.42817e-05 0.000162338
0.56 0.00013474 7.00458e-05 0.000162338
0.7 0.000118981 7.64448e-05 0.000162338
0.84 0.000106551 8.18951e-05 0.000162338
0.98 9.64711e-05 8.65529e-05 0.000162338
1.12 8.81342e-05 9.05477e-05 0.000162338
1.26 8.11241e-05 9.39893e-05 0.000162338
1.4 7.51465e-05 9.69746e-05 0.000162338
1.68 6.54944e-05 0.000101886 0.000162338
2.24 5.21087e-05 0.000108862 0.000162338
2.8 4.3266e-05 0.000113607 0.000162338
3.36 0 0.000154062 0.000162338
END DIST
Metal 3 OVER 2 UNDER 5
DIST count 12 width 0.28
0.28 0.000183127 3.41503e-05 0.000162338
0.56 0.000134736 4.44313e-05 0.000162338
0.7 0.000118981 4.87192e-05 0.000162338
0.84 0.000106551 5.24917e-05 0.000162338
0.98 9.64711e-05 5.58103e-05 0.000162338
1.12 8.81342e-05 5.87427e-05 0.000162338
1.26 8.11241e-05 6.135e-05 0.000162338
1.4 7.51465e-05 6.36847e-05 0.000162338
1.68 6.54944e-05 6.76994e-05 0.000162338
2.24 5.21087e-05 7.3878e-05 0.000162338
2.8 4.3266e-05 7.84673e-05 0.000162338
3.36 0 0.000119027 0.000162338
END DIST
Metal 4 RESOVER
WIDTH Table 1 entries: 0.28
Metal 4 RESOVER 0
DIST count 55 width 0.28
0 0 0 0.000324675
0 0.28 0 0.000324675
0 0.56 0 0.000324675
0 0.7 0 0.000324675
0 0.84 0 0.000324675
0 1.12 0 0.000324675
0 1.26 0 0.000324675
0 1.4 0 0.000324675
0 1.68 0 0.000324675
0 2.24 0 0.000324675
0.28 0.28 0 0.000324675
0.28 0.56 0 0.000324675
0.28 0.7 0 0.000324675
0.28 0.84 0 0.000324675
0.28 1.12 0 0.000324675
0.28 1.26 0 0.000324675
0.28 1.4 0 0.000324675
0.28 1.68 0 0.000324675
0.28 2.24 0 0.000324675
0.56 0.56 0 0.000324675
0.56 0.7 0 0.000324675
0.56 0.84 0 0.000324675
0.56 1.12 0 0.000324675
0.56 1.26 0 0.000324675
0.56 1.4 0 0.000324675
0.56 1.68 0 0.000324675
0.56 2.24 0 0.000324675
0.7 0.7 0 0.000324675
0.7 0.84 0 0.000324675
0.7 1.12 0 0.000324675
0.7 1.26 0 0.000324675
0.7 1.4 0 0.000324675
0.7 1.68 0 0.000324675
0.7 2.24 0 0.000324675
0.84 0.84 0 0.000324675
0.84 1.12 0 0.000324675
0.84 1.26 0 0.000324675
0.84 1.4 0 0.000324675
0.84 1.68 0 0.000324675
0.84 2.24 0 0.000324675
1.12 1.12 0 0.000324675
1.12 1.26 0 0.000324675
1.12 1.4 0 0.000324675
1.12 1.68 0 0.000324675
1.12 2.24 0 0.000324675
1.26 1.26 0 0.000324675
1.26 1.4 0 0.000324675
1.26 1.68 0 0.000324675
1.26 2.24 0 0.000324675
1.4 1.4 0 0.000324675
1.4 1.68 0 0.000324675
1.4 2.24 0 0.000324675
1.68 1.68 0 0.000324675
1.68 2.24 0 0.000324675
2.24 0 2.24 0.000324675
END DIST
Metal 4 RESOVER 1
DIST count 0 width 0.28
END DIST
Metal 4 RESOVER 2
DIST count 0 width 0.28
END DIST
Metal 4 RESOVER 3
DIST count 0 width 0.28
END DIST
Metal 4 OVER
WIDTH Table 1 entries: 0.28
Metal 4 OVER 0
DIST count 12 width 0.28
0.28 0.000177662 2.12962e-06 0.000162338
0.56 0.000134776 2.89704e-06 0.000162338
0.7 0.000120261 3.27888e-06 0.000162338
0.84 0.000108569 3.65898e-06 0.000162338
0.98 9.89488e-05 4.03707e-06 0.000162338
1.12 9.08947e-05 4.41282e-06 0.000162338
1.26 8.40534e-05 4.78593e-06 0.000162338
1.4 7.81696e-05 5.15611e-06 0.000162338
1.68 6.85699e-05 5.88667e-06 0.000162338
2.24 5.50491e-05 7.30177e-06 0.000162338
2.8 4.59822e-05 8.64547e-06 0.000162338
3.36 0 4.93935e-05 0.000162338
END DIST
Metal 4 OVER 1
DIST count 12 width 0.28
0.28 0.000177659 4.94609e-06 0.000162338
0.56 0.000134776 6.72421e-06 0.000162338
0.7 0.000120261 7.60359e-06 0.000162338
0.84 0.000108569 8.4733e-06 0.000162338
0.98 9.89488e-05 9.33324e-06 0.000162338
1.12 9.08947e-05 1.01832e-05 0.000162338
1.26 8.40534e-05 1.10188e-05 0.000162338
1.4 7.81696e-05 1.18419e-05 0.000162338
1.68 6.85699e-05 1.34416e-05 0.000162338
2.24 5.50491e-05 1.64426e-05 0.000162338
2.8 4.59822e-05 1.91602e-05 0.000162338
3.36 0 6.10758e-05 0.000162338
END DIST
Metal 4 OVER 2
DIST count 12 width 0.28
0.28 0.000177659 8.41555e-06 0.000162338
0.56 0.000134776 1.13839e-05 0.000162338
0.7 0.000120261 1.28266e-05 0.000162338
0.84 0.000108569 1.42306e-05 0.000162338
0.98 9.89488e-05 1.55921e-05 0.000162338
1.12 9.08947e-05 1.69091e-05 0.000162338
1.26 8.40534e-05 1.81761e-05 0.000162338
1.4 7.81696e-05 1.93947e-05 0.000162338
1.68 6.85699e-05 2.16792e-05 0.000162338
2.24 5.50491e-05 2.56624e-05 0.000162338
2.8 4.59822e-05 2.89514e-05 0.000162338
3.36 0 7.11555e-05 0.000162338
END DIST
Metal 4 OVER 3
DIST count 12 width 0.28
0.28 0.000177659 2.7814e-05 0.000162338
0.56 0.000134776 3.63525e-05 0.000162338
0.7 0.000120261 3.98209e-05 0.000162338
0.84 0.000108569 4.27995e-05 0.000162338
0.98 9.89488e-05 4.53533e-05 0.000162338
1.12 9.08947e-05 4.75487e-05 0.000162338
1.26 8.40534e-05 4.94488e-05 0.000162338
1.4 7.81696e-05 5.1104e-05 0.000162338
1.68 6.85699e-05 5.3843e-05 0.000162338
2.24 5.50491e-05 5.77973e-05 0.000162338
2.8 4.59822e-05 6.05561e-05 0.000162338
3.36 0 0.000102107 0.000162338
END DIST
Metal 4 UNDER
WIDTH Table 1 entries: 0.28
Metal 4 UNDER 5
DIST count 12 width 0.28
0.28 0.000177662 1.979e-05 0.000162338
0.56 0.000134776 2.48987e-05 0.000162338
0.7 0.000120261 2.72164e-05 0.000162338
0.84 0.000108569 2.93613e-05 0.000162338
0.98 9.89488e-05 3.13352e-05 0.000162338
1.12 9.08947e-05 3.31446e-05 0.000162338
1.26 8.40534e-05 3.48038e-05 0.000162338
1.4 7.81696e-05 3.63259e-05 0.000162338
1.68 6.85699e-05 3.90157e-05 0.000162338
2.24 5.50491e-05 4.33116e-05 0.000162338
2.8 4.59822e-05 4.66258e-05 0.000162338
3.36 0 8.8781e-05 0.000162338
END DIST
Metal 4 DIAGUNDER
WIDTH Table 1 entries: 0.28
Metal 4 DIAGUNDER 5
DIST count 13 width 0.28
0 0 2.02795e-05 0.000162338
0.28 0 2.555e-05 0.000162338
0.56 0 2.32856e-05 0.000162338
0.7 0 2.20977e-05 0.000162338
0.84 0 2.09548e-05 0.000162338
0.98 0 1.9886e-05 0.000162338
1.12 0 1.89057e-05 0.000162338
1.26 0 1.80176e-05 0.000162338
1.4 0 1.71657e-05 0.000162338
1.68 0 1.57124e-05 0.000162338
2.24 0 1.3755e-05 0.000162338
2.8 0 1.24359e-05 0.000162338
3.36 0 6.61111e-06 0.000162338
END DIST
Metal 4 OVERUNDER
WIDTH Table 1 entries: 0.28
Metal 4 OVER 1 UNDER 5
DIST count 12 width 0.28
0.28 0.000177662 2.26336e-05 0.000162338
0.56 0.000134776 2.87287e-05 0.000162338
0.7 0.000120261 3.15411e-05 0.000162338
0.84 0.000108569 3.41756e-05 0.000162338
0.98 9.89488e-05 3.66313e-05 0.000162338
1.12 9.08947e-05 3.89151e-05 0.000162338
1.26 8.40534e-05 4.10367e-05 0.000162338
1.4 7.81696e-05 4.30117e-05 0.000162338
1.68 6.85699e-05 4.65707e-05 0.000162338
2.24 5.50491e-05 5.24525e-05 0.000162338
2.8 4.59822e-05 5.71406e-05 0.000162338
3.36 0 0.000100467 0.000162338
END DIST
Metal 4 OVER 2 UNDER 5
DIST count 12 width 0.28
0.28 0.000177659 2.60759e-05 0.000162338
0.56 0.000134776 3.33856e-05 0.000162338
0.7 0.000120261 3.67641e-05 0.000162338
0.84 0.000108569 3.99328e-05 0.000162338
0.98 9.89488e-05 4.28902e-05 0.000162338
1.12 9.08947e-05 4.56409e-05 0.000162338
1.26 8.40534e-05 4.8194e-05 0.000162338
1.4 7.81696e-05 5.05645e-05 0.000162338
1.68 6.85699e-05 5.48083e-05 0.000162338
2.24 5.50491e-05 6.16722e-05 0.000162338
2.8 4.59822e-05 6.69318e-05 0.000162338
3.36 0 0.000110547 0.000162338
END DIST
Metal 4 OVER 3 UNDER 5
DIST count 12 width 0.28
0.28 0.000177659 4.54744e-05 0.000162338
0.56 0.000134776 5.83542e-05 0.000162338
0.7 0.000120261 6.37584e-05 0.000162338
0.84 0.000108569 6.85018e-05 0.000162338
0.98 9.89488e-05 7.26514e-05 0.000162338
1.12 9.08947e-05 7.62805e-05 0.000162338
1.26 8.40534e-05 7.94667e-05 0.000162338
1.4 7.81696e-05 8.22738e-05 0.000162338
1.68 6.85699e-05 8.69721e-05 0.000162338
2.24 5.50491e-05 9.38072e-05 0.000162338
2.8 4.59822e-05 9.85364e-05 0.000162338
3.36 0 0.0001415 0.000162338
END DIST
Metal 5 RESOVER
WIDTH Table 1 entries: 0.44
Metal 5 RESOVER 0
DIST count 55 width 0.44
0 0 0 0.000137741
0 0.46 0 0.000137741
0 0.9 0 0.000137741
0 1.14 0 0.000137741
0 1.36 0 0.000137741
0 1.8 0 0.000137741
0 2.04 0 0.000137741
0 2.26 0 0.000137741
0 2.7 0 0.000137741
0 3.6 0 0.000137741
0.46 0.46 0 0.000137741
0.46 0.9 0 0.000137741
0.46 1.14 0 0.000137741
0.46 1.36 0 0.000137741
0.46 1.8 0 0.000137741
0.46 2.04 0 0.000137741
0.46 2.26 0 0.000137741
0.46 2.7 0 0.000137741
0.46 3.6 0 0.000137741
0.9 0.9 0 0.000137741
0.9 1.14 0 0.000137741
0.9 1.36 0 0.000137741
0.9 1.8 0 0.000137741
0.9 2.04 0 0.000137741
0.9 2.26 0 0.000137741
0.9 2.7 0 0.000137741
0.9 3.6 0 0.000137741
1.14 1.14 0 0.000137741
1.14 1.36 0 0.000137741
1.14 1.8 0 0.000137741
1.14 2.04 0 0.000137741
1.14 2.26 0 0.000137741
1.14 2.7 0 0.000137741
1.14 3.6 0 0.000137741
1.36 1.36 0 0.000137741
1.36 1.8 0 0.000137741
1.36 2.04 0 0.000137741
1.36 2.26 0 0.000137741
1.36 2.7 0 0.000137741
1.36 3.6 0 0.000137741
1.8 1.8 0 0.000137741
1.8 2.04 0 0.000137741
1.8 2.26 0 0.000137741
1.8 2.7 0 0.000137741
1.8 3.6 0 0.000137741
2.04 2.04 0 0.000137741
2.04 2.26 0 0.000137741
2.04 2.7 0 0.000137741
2.04 3.6 0 0.000137741
2.26 2.26 0 0.000137741
2.26 2.7 0 0.000137741
2.26 3.6 0 0.000137741
2.7 2.7 0 0.000137741
2.7 3.6 0 0.000137741
3.6 0 3.6 0.000137741
END DIST
Metal 5 RESOVER 1
DIST count 0 width 0.44
END DIST
Metal 5 RESOVER 2
DIST count 0 width 0.44
END DIST
Metal 5 RESOVER 3
DIST count 0 width 0.44
END DIST
Metal 5 RESOVER 4
DIST count 0 width 0.44
END DIST
Metal 5 OVER
WIDTH Table 1 entries: 0.44
Metal 5 OVER 0
DIST count 12 width 0.44
0.46 0.000504436 2.63652e-06 6.88705e-05
0.92 0.000252218 3.67202e-06 6.88705e-05
1.15 0.000201774 4.18571e-06 6.88705e-05
1.38 0.000168145 4.69583e-06 6.88705e-05
1.61 0.000144124 5.20172e-06 6.88705e-05
1.84 0.000126109 5.70278e-06 6.88705e-05
2.07 0.000112097 6.1984e-06 6.88705e-05
2.3 0.000100887 6.68807e-06 6.88705e-05
2.76 8.40725e-05 7.64758e-06 6.88705e-05
3.68 6.30546e-05 9.47623e-06 6.88705e-05
4.6 5.04923e-05 1.11491e-05 6.88705e-05
5.52 0 5.47848e-05 6.88705e-05
END DIST
Metal 5 OVER 1
DIST count 12 width 0.44
0.46 0.000504435 5.36227e-06 6.88705e-05
0.92 0.000252249 7.45107e-06 6.88705e-05
1.15 0.000201774 8.50752e-06 6.88705e-05
1.38 0.000168145 9.5352e-06 6.88705e-05
1.61 0.000144124 1.05475e-05 6.88705e-05
1.84 0.000126109 1.15421e-05 6.88705e-05
2.07 0.000112097 1.25207e-05 6.88705e-05
2.3 0.000100887 1.34787e-05 6.88705e-05
2.76 8.40725e-05 1.53341e-05 6.88705e-05
3.68 6.30546e-05 1.87707e-05 6.88705e-05
4.6 5.04435e-05 2.18294e-05 6.88705e-05
5.52 0 6.65692e-05 6.88705e-05
END DIST
Metal 5 OVER 2
DIST count 12 width 0.44
0.46 0.000504435 7.33865e-06 6.88705e-05
0.92 0.000252218 1.01908e-05 6.88705e-05
1.15 0.000201774 1.15817e-05 6.88705e-05
1.38 0.000168188 1.29246e-05 6.88705e-05
1.61 0.000144124 1.42766e-05 6.88705e-05
1.84 0.000126109 1.55694e-05 6.88705e-05
2.07 0.000112097 1.68234e-05 6.88705e-05
2.3 0.000100887 1.80385e-05 6.88705e-05
2.76 8.40725e-05 2.03381e-05 6.88705e-05
3.68 6.30546e-05 2.44246e-05 6.88705e-05
4.6 5.04435e-05 2.78766e-05 6.88705e-05
5.52 0 7.2813e-05 6.88705e-05
END DIST
Metal 5 OVER 3
DIST count 12 width 0.44
0.46 0.000504435 1.18201e-05 6.88705e-05
0.92 0.000252218 1.63326e-05 6.88705e-05
1.15 0.000201774 1.84627e-05 6.88705e-05
1.38 0.000168145 2.04939e-05 6.88705e-05
1.61 0.000144124 2.24151e-05 6.88705e-05
1.84 0.000126109 2.42259e-05 6.88705e-05
2.07 0.000112097 2.5926e-05 6.88705e-05
2.3 0.000100887 2.7517e-05 6.88705e-05
2.76 8.40725e-05 3.03959e-05 6.88705e-05
3.68 6.30546e-05 3.51065e-05 6.88705e-05
4.6 5.04435e-05 3.87439e-05 6.88705e-05
5.52 0 8.36497e-05 6.88705e-05
END DIST
Metal 5 OVER 4
DIST count 12 width 0.44
0.46 0.000504435 2.98393e-05 6.88705e-05
0.92 0.000252218 3.97969e-05 6.88705e-05
1.15 0.000201774 4.37349e-05 6.88705e-05
1.38 0.000168145 4.70667e-05 6.88705e-05
1.61 0.000144124 4.98908e-05 6.88705e-05
1.84 0.000126109 5.22952e-05 6.88705e-05
2.07 0.000112097 5.43641e-05 6.88705e-05
2.3 0.000100887 5.61566e-05 6.88705e-05
2.76 8.40725e-05 5.91129e-05 6.88705e-05
3.68 6.30546e-05 6.33755e-05 6.88705e-05
4.6 5.04435e-05 6.63509e-05 6.88705e-05
5.52 0 0.000110627 6.88705e-05
END DIST
Metal 5 UNDER
WIDTH Table 0 entries:
Metal 5 DIAGUNDER
WIDTH Table 0 entries:
END DensityModel 0