blob: e65d57ec13e52686a4816c78f72fa0c119fd1044 [file] [log] [blame]
Extraction Rules for OpenRCX
DIAGMODEL ON
LayerCount 5
DensityRate 1 0
DensityModel 0
Metal 1 RESOVER
WIDTH Table 1 entries: 0.23
Metal 1 RESOVER 0
DIST count 55 width 0.23
0 0 0 0.000456741
0 0.33 0 0.000456741
0 0.56 0 0.000456741
0 0.775 0 0.000456741
0 0.89 0 0.000456741
0 1.12 0 0.000456741
0 1.335 0 0.000456741
0 1.45 0 0.000456741
0 1.68 0 0.000456741
0 2.24 0 0.000456741
0.33 0.33 0 0.000456741
0.33 0.56 0 0.000456741
0.33 0.775 0 0.000456741
0.33 0.89 0 0.000456741
0.33 1.12 0 0.000456741
0.33 1.335 0 0.000456741
0.33 1.45 0 0.000456741
0.33 1.68 0 0.000456741
0.33 2.24 0 0.000456741
0.56 0.56 0 0.000456741
0.56 0.775 0 0.000456741
0.56 0.89 0 0.000456741
0.56 1.12 0 0.000456741
0.56 1.335 0 0.000456741
0.56 1.45 0 0.000456741
0.56 1.68 0 0.000456741
0.56 2.24 0 0.000456741
0.775 0.775 0 0.000456741
0.775 0.89 0 0.000456741
0.775 1.12 0 0.000456741
0.775 1.335 0 0.000456741
0.775 1.45 0 0.000456741
0.775 1.68 0 0.000456741
0.775 2.24 0 0.000456741
0.89 0.89 0 0.000456741
0.89 1.12 0 0.000456741
0.89 1.335 0 0.000456741
0.89 1.45 0 0.000456741
0.89 1.68 0 0.000456741
0.89 2.24 0 0.000456741
1.12 1.12 0 0.000456741
1.12 1.335 0 0.000456741
1.12 1.45 0 0.000456741
1.12 1.68 0 0.000456741
1.12 2.24 0 0.000456741
1.335 1.335 0 0.000456741
1.335 1.45 0 0.000456741
1.335 1.68 0 0.000456741
1.335 2.24 0 0.000456741
1.45 1.45 0 0.000456741
1.45 1.68 0 0.000456741
1.45 2.24 0 0.000456741
1.68 1.68 0 0.000456741
1.68 2.24 0 0.000456741
2.24 0 2.24 0.000456741
END DIST
Metal 1 OVER
WIDTH Table 1 entries: 0.23
Metal 1 OVER 0
DIST count 12 width 0.23
0.23 0.000452944 8.28768e-06 0.000228371
0.46 0.000163573 1.21336e-05 0.000228371
0.575 0.00012396 1.39464e-05 0.000228371
0.69 9.9798e-05 1.56699e-05 0.000228371
0.805 8.35188e-05 1.72971e-05 0.000228371
0.92 7.18059e-05 1.88247e-05 0.000228371
1.035 6.29741e-05 2.02524e-05 0.000228371
1.15 5.60769e-05 2.15823e-05 0.000228371
1.38 4.60006e-05 2.39649e-05 0.000228371
1.84 3.38395e-05 2.77718e-05 0.000228371
2.3 2.6764e-05 3.05977e-05 0.000228371
2.76 0 5.48695e-05 0.000228371
END DIST
Metal 1 UNDER
WIDTH Table 1 entries: 0.23
Metal 1 UNDER 2
DIST count 12 width 0.23
0.23 0.000452935 3.5595e-05 0.000228371
0.46 0.000163563 4.56797e-05 0.000228371
0.575 0.00012396 4.99502e-05 0.000228371
0.69 9.9798e-05 5.37751e-05 0.000228371
0.805 8.35188e-05 5.71785e-05 0.000228371
0.92 7.18059e-05 6.02094e-05 0.000228371
1.035 6.29741e-05 6.29147e-05 0.000228371
1.15 5.60769e-05 6.53395e-05 0.000228371
1.38 4.60006e-05 6.94855e-05 0.000228371
1.84 3.38395e-05 7.56939e-05 0.000228371
2.3 2.6764e-05 8.0061e-05 0.000228371
2.76 0 0.000105393 0.000228371
END DIST
Metal 1 UNDER 3
DIST count 12 width 0.23
0.23 0.000452929 1.48138e-05 0.000228371
0.46 0.000163558 1.99174e-05 0.000228371
0.575 0.00012396 2.23409e-05 0.000228371
0.69 9.9798e-05 2.46606e-05 0.000228371
0.805 8.35188e-05 2.68678e-05 0.000228371
0.92 7.18059e-05 2.89556e-05 0.000228371
1.035 6.29741e-05 3.09218e-05 0.000228371
1.15 5.60769e-05 3.27703e-05 0.000228371
1.38 4.60006e-05 3.61249e-05 0.000228371
1.84 3.38395e-05 4.16177e-05 0.000228371
2.3 2.6764e-05 4.58186e-05 0.000228371
2.76 0 7.1207e-05 0.000228371
END DIST
Metal 1 UNDER 4
DIST count 12 width 0.23
0.23 0.000452929 1.17132e-05 0.000228371
0.46 0.000163558 1.6094e-05 0.000228371
0.575 0.00012396 1.8176e-05 0.000228371
0.69 9.9798e-05 2.01633e-05 0.000228371
0.805 8.35188e-05 2.20525e-05 0.000228371
0.92 7.18059e-05 2.38402e-05 0.000228371
1.035 6.29741e-05 2.55227e-05 0.000228371
1.15 5.60769e-05 2.71038e-05 0.000228371
1.38 4.60006e-05 2.9976e-05 0.000228371
1.84 3.38395e-05 3.47009e-05 0.000228371
2.3 2.6764e-05 3.83616e-05 0.000228371
2.76 0 6.33866e-05 0.000228371
END DIST
Metal 1 UNDER 5
DIST count 12 width 0.23
0.23 0.000452929 1.0515e-05 0.000228371
0.46 0.000163558 1.46132e-05 0.000228371
0.575 0.00012396 1.65552e-05 0.000228371
0.69 9.9798e-05 1.84068e-05 0.000228371
0.805 8.35188e-05 2.01621e-05 0.000228371
0.92 7.18059e-05 2.18166e-05 0.000228371
1.035 6.29741e-05 2.33714e-05 0.000228371
1.15 5.60769e-05 2.48271e-05 0.000228371
1.38 4.60006e-05 2.7457e-05 0.000228371
1.84 3.38395e-05 3.17463e-05 0.000228371
2.3 2.6764e-05 3.5031e-05 0.000228371
2.76 0 5.97362e-05 0.000228371
END DIST
Metal 1 DIAGUNDER
WIDTH Table 1 entries: 0.23
Metal 1 DIAGUNDER 2
DIST count 13 width 0.23
0 0 2.13146e-05 0.000228371
0.23 0 2.1564e-05 0.000228371
0.46 0 1.7109e-05 0.000228371
0.575 0 1.51418e-05 0.000228371
0.69 0 1.35108e-05 0.000228371
0.805 0 1.21523e-05 0.000228371
0.92 0 1.10295e-05 0.000228371
1.035 0 1.01019e-05 0.000228371
1.15 0 9.31252e-06 0.000228371
1.38 0 8.09368e-06 0.000228371
1.84 0 6.61906e-06 0.000228371
2.3 0 5.76886e-06 0.000228371
2.76 0 4.47874e-06 0.000228371
END DIST
Metal 1 DIAGUNDER 3
DIST count 13 width 0.23
0 0 9.39007e-06 0.000228371
0.23 0 9.09772e-06 0.000228371
0.46 0 8.84835e-06 0.000228371
0.575 0 8.69688e-06 0.000228371
0.69 0 8.53443e-06 0.000228371
0.805 0 8.36372e-06 0.000228371
0.92 0 8.18726e-06 0.000228371
1.035 0 8.00751e-06 0.000228371
1.15 0 7.8065e-06 0.000228371
1.38 0 7.41102e-06 0.000228371
1.84 0 6.74545e-06 0.000228371
2.3 0 6.18485e-06 0.000228371
2.76 0 4.90887e-06 0.000228371
END DIST
Metal 1 DIAGUNDER 4
DIST count 13 width 0.23
0 0 7.09205e-06 0.000228371
0.23 0 7.05582e-06 0.000228371
0.46 0 6.93746e-06 0.000228371
0.575 0 6.87264e-06 0.000228371
0.69 0 6.80567e-06 0.000228371
0.805 0 6.73671e-06 0.000228371
0.92 0 6.66601e-06 0.000228371
1.035 0 6.59381e-06 0.000228371
1.15 0 6.50026e-06 0.000228371
1.38 0 6.31339e-06 0.000228371
1.84 0 6.01313e-06 0.000228371
2.3 0 5.73764e-06 0.000228371
2.76 0 4.61897e-06 0.000228371
END DIST
Metal 1 DIAGUNDER 5
DIST count 13 width 0.23
0 0 6.12086e-06 0.000228371
0.23 0 6.52995e-06 0.000228371
0.46 0 6.39846e-06 0.000228371
0.575 0 6.34888e-06 0.000228371
0.69 0 6.29899e-06 0.000228371
0.805 0 6.24879e-06 0.000228371
0.92 0 6.19842e-06 0.000228371
1.035 0 6.14774e-06 0.000228371
1.15 0 6.07782e-06 0.000228371
1.38 0 5.94018e-06 0.000228371
1.84 0 5.73808e-06 0.000228371
2.3 0 5.53654e-06 0.000228371
2.76 0 3.13478e-06 0.000228371
END DIST
Metal 2 RESOVER
WIDTH Table 1 entries: 0.28
Metal 2 RESOVER 0
DIST count 55 width 0.28
0 0 0 0.00037518
0 0.28 0 0.00037518
0 0.56 0 0.00037518
0 0.7 0 0.00037518
0 0.84 0 0.00037518
0 1.12 0 0.00037518
0 1.26 0 0.00037518
0 1.4 0 0.00037518
0 1.68 0 0.00037518
0 2.24 0 0.00037518
0.28 0.28 0 0.00037518
0.28 0.56 0 0.00037518
0.28 0.7 0 0.00037518
0.28 0.84 0 0.00037518
0.28 1.12 0 0.00037518
0.28 1.26 0 0.00037518
0.28 1.4 0 0.00037518
0.28 1.68 0 0.00037518
0.28 2.24 0 0.00037518
0.56 0.56 0 0.00037518
0.56 0.7 0 0.00037518
0.56 0.84 0 0.00037518
0.56 1.12 0 0.00037518
0.56 1.26 0 0.00037518
0.56 1.4 0 0.00037518
0.56 1.68 0 0.00037518
0.56 2.24 0 0.00037518
0.7 0.7 0 0.00037518
0.7 0.84 0 0.00037518
0.7 1.12 0 0.00037518
0.7 1.26 0 0.00037518
0.7 1.4 0 0.00037518
0.7 1.68 0 0.00037518
0.7 2.24 0 0.00037518
0.84 0.84 0 0.00037518
0.84 1.12 0 0.00037518
0.84 1.26 0 0.00037518
0.84 1.4 0 0.00037518
0.84 1.68 0 0.00037518
0.84 2.24 0 0.00037518
1.12 1.12 0 0.00037518
1.12 1.26 0 0.00037518
1.12 1.4 0 0.00037518
1.12 1.68 0 0.00037518
1.12 2.24 0 0.00037518
1.26 1.26 0 0.00037518
1.26 1.4 0 0.00037518
1.26 1.68 0 0.00037518
1.26 2.24 0 0.00037518
1.4 1.4 0 0.00037518
1.4 1.68 0 0.00037518
1.4 2.24 0 0.00037518
1.68 1.68 0 0.00037518
1.68 2.24 0 0.00037518
2.24 0 2.24 0.00037518
END DIST
Metal 2 RESOVER 1
DIST count 0 width 0.28
END DIST
Metal 2 OVER
WIDTH Table 1 entries: 0.28
Metal 2 OVER 0
DIST count 12 width 0.28
0.28 0.000415557 4.74686e-06 0.00018759
0.56 0.000187408 6.77747e-06 0.00018759
0.7 0.000147043 7.76997e-06 0.00018759
0.84 0.000120985 8.74266e-06 0.00018759
0.98 0.000102772 9.69259e-06 0.00018759
1.12 8.93247e-05 1.06173e-05 0.00018759
1.26 7.89899e-05 1.15147e-05 0.00018759
1.4 7.07983e-05 1.23833e-05 0.00018759
1.68 5.86367e-05 1.40301e-05 0.00018759
2.24 4.36428e-05 1.69541e-05 0.00018759
2.8 3.47556e-05 1.94085e-05 0.00018759
3.36 0 5.033e-05 0.00018759
END DIST
Metal 2 OVER 1
DIST count 12 width 0.28
0.28 0.000415556 3.57674e-05 0.00018759
0.56 0.000187408 4.69694e-05 0.00018759
0.7 0.000147043 5.12531e-05 0.00018759
0.84 0.000120985 5.48234e-05 0.00018759
0.98 0.000102772 5.78214e-05 0.00018759
1.12 8.93247e-05 6.0362e-05 0.00018759
1.26 7.89899e-05 6.25449e-05 0.00018759
1.4 7.07983e-05 6.44351e-05 0.00018759
1.68 5.86367e-05 6.75631e-05 0.00018759
2.24 4.36428e-05 7.20916e-05 0.00018759
2.8 3.47556e-05 7.52453e-05 0.00018759
3.36 0 0.00010646 0.00018759
END DIST
Metal 2 UNDER
WIDTH Table 1 entries: 0.28
Metal 2 UNDER 3
DIST count 12 width 0.28
0.28 0.000415558 3.88328e-05 0.00018759
0.56 0.000187408 4.85528e-05 0.00018759
0.7 0.000147043 5.24043e-05 0.00018759
0.84 0.000120985 5.57056e-05 0.00018759
0.98 0.000102772 5.85585e-05 0.00018759
1.12 8.93247e-05 6.10524e-05 0.00018759
1.26 7.89899e-05 6.32576e-05 0.00018759
1.4 7.07983e-05 6.52265e-05 0.00018759
1.68 5.86367e-05 6.86103e-05 0.00018759
2.24 4.36428e-05 7.38485e-05 0.00018759
2.8 3.47556e-05 7.7755e-05 0.00018759
3.36 0 0.000109668 0.00018759
END DIST
Metal 2 UNDER 4
DIST count 12 width 0.28
0.28 0.000415556 1.3049e-05 0.00018759
0.56 0.000187408 1.69393e-05 0.00018759
0.7 0.000147043 1.88264e-05 0.00018759
0.84 0.000120985 2.06595e-05 0.00018759
0.98 0.000102772 2.24356e-05 0.00018759
1.12 8.93247e-05 2.41485e-05 0.00018759
1.26 7.89899e-05 2.57945e-05 0.00018759
1.4 7.07983e-05 2.7372e-05 0.00018759
1.68 5.86367e-05 3.03174e-05 0.00018759
2.24 4.36428e-05 3.54078e-05 0.00018759
2.8 3.47556e-05 3.95433e-05 0.00018759
3.36 0 7.17825e-05 0.00018759
END DIST
Metal 2 UNDER 5
DIST count 12 width 0.28
0.28 0.000415556 8.86685e-06 0.00018759
0.56 0.000187408 1.15769e-05 0.00018759
0.7 0.000147043 1.29094e-05 0.00018759
0.84 0.000120985 1.42176e-05 0.00018759
0.98 0.000102772 1.54985e-05 0.00018759
1.12 8.93247e-05 1.67497e-05 0.00018759
1.26 7.89899e-05 1.7967e-05 0.00018759
1.4 7.07983e-05 1.9151e-05 0.00018759
1.68 5.86367e-05 2.14072e-05 0.00018759
2.24 4.36428e-05 2.54642e-05 0.00018759
2.8 3.47556e-05 2.89317e-05 0.00018759
3.36 0 6.07454e-05 0.00018759
END DIST
Metal 2 DIAGUNDER
WIDTH Table 1 entries: 0.28
Metal 2 DIAGUNDER 3
DIST count 13 width 0.28
0 0 2.49948e-05 0.00018759
0.28 0 2.58591e-05 0.00018759
0.56 0 1.98998e-05 0.00018759
0.7 0 1.75894e-05 0.00018759
0.84 0 1.57388e-05 0.00018759
0.98 0 1.42677e-05 0.00018759
1.12 0 1.30943e-05 0.00018759
1.26 0 1.21502e-05 0.00018759
1.4 0 1.1344e-05 0.00018759
1.68 0 1.01126e-05 0.00018759
2.24 0 8.66948e-06 0.00018759
2.8 0 7.81356e-06 0.00018759
3.36 0 6.20988e-06 0.00018759
END DIST
Metal 2 DIAGUNDER 4
DIST count 13 width 0.28
0 0 1.25865e-05 0.00018759
0.28 0 1.29424e-05 0.00018759
0.56 0 1.25188e-05 0.00018759
0.7 0 1.22547e-05 0.00018759
0.84 0 1.19772e-05 0.00018759
0.98 0 1.16917e-05 0.00018759
1.12 0 1.14032e-05 0.00018759
1.26 0 1.11159e-05 0.00018759
1.4 0 1.07954e-05 0.00018759
1.68 0 1.01847e-05 0.00018759
2.24 0 9.23636e-06 0.00018759
2.8 0 8.48481e-06 0.00018759
3.36 0 6.75924e-06 0.00018759
END DIST
Metal 2 DIAGUNDER 5
DIST count 13 width 0.28
0 0 9.94473e-06 0.00018759
0.28 0 1.07997e-05 0.00018759
0.56 0 1.05688e-05 0.00018759
0.7 0 1.04522e-05 0.00018759
0.84 0 1.03325e-05 0.00018759
0.98 0 1.02101e-05 0.00018759
1.12 0 1.00854e-05 0.00018759
1.26 0 9.95887e-06 0.00018759
1.4 0 9.79517e-06 0.00018759
1.68 0 9.47161e-06 0.00018759
2.24 0 8.96508e-06 0.00018759
2.8 0 8.47836e-06 0.00018759
3.36 0 4.73824e-06 0.00018759
END DIST
Metal 2 OVERUNDER
WIDTH Table 1 entries: 0.28
Metal 2 OVER 1 UNDER 3
DIST count 12 width 0.28
0.28 0.000415556 6.98534e-05 0.00018759
0.56 0.000187408 8.87448e-05 0.00018759
0.7 0.000147043 9.58874e-05 0.00018759
0.84 0.000120985 0.000101786 0.00018759
0.98 0.000102772 0.000106687 0.00018759
1.12 8.93247e-05 0.000110797 0.00018759
1.26 7.89899e-05 0.000114288 0.00018759
1.4 7.07983e-05 0.000117278 0.00018759
1.68 5.86367e-05 0.000122143 0.00018759
2.24 4.36428e-05 0.000128986 0.00018759
2.8 3.47556e-05 0.000133592 0.00018759
3.36 0 0.0001658 0.00018759
END DIST
Metal 2 OVER 1 UNDER 4
DIST count 12 width 0.28
0.28 0.000415556 4.40696e-05 0.00018759
0.56 0.000187408 5.71313e-05 0.00018759
0.7 0.000147043 6.23096e-05 0.00018759
0.84 0.000120985 6.67403e-05 0.00018759
0.98 0.000102772 7.05644e-05 0.00018759
1.12 8.93247e-05 7.38933e-05 0.00018759
1.26 7.89899e-05 7.68247e-05 0.00018759
1.4 7.07983e-05 7.94238e-05 0.00018759
1.68 5.86367e-05 8.38505e-05 0.00018759
2.24 4.36428e-05 9.05452e-05 0.00018759
2.8 3.47556e-05 9.53801e-05 0.00018759
3.36 0 0.000127914 0.00018759
END DIST
Metal 2 OVER 1 UNDER 5
DIST count 12 width 0.28
0.28 0.000415556 3.98874e-05 0.00018759
0.56 0.000187408 5.17689e-05 0.00018759
0.7 0.000147043 5.63925e-05 0.00018759
0.84 0.000120985 6.02983e-05 0.00018759
0.98 0.000102772 6.36274e-05 0.00018759
1.12 8.93247e-05 6.64944e-05 0.00018759
1.26 7.89899e-05 6.89972e-05 0.00018759
1.4 7.07983e-05 7.12028e-05 0.00018759
1.68 5.86367e-05 7.49403e-05 0.00018759
2.24 4.36428e-05 8.06016e-05 0.00018759
2.8 3.47556e-05 8.47685e-05 0.00018759
3.36 0 0.000116878 0.00018759
END DIST
Metal 3 RESOVER
WIDTH Table 1 entries: 0.28
Metal 3 RESOVER 0
DIST count 55 width 0.28
0 0 0 0.00037518
0 0.28 0 0.00037518
0 0.56 0 0.00037518
0 0.7 0 0.00037518
0 0.84 0 0.00037518
0 1.12 0 0.00037518
0 1.26 0 0.00037518
0 1.4 0 0.00037518
0 1.68 0 0.00037518
0 2.24 0 0.00037518
0.28 0.28 0 0.00037518
0.28 0.56 0 0.00037518
0.28 0.7 0 0.00037518
0.28 0.84 0 0.00037518
0.28 1.12 0 0.00037518
0.28 1.26 0 0.00037518
0.28 1.4 0 0.00037518
0.28 1.68 0 0.00037518
0.28 2.24 0 0.00037518
0.56 0.56 0 0.00037518
0.56 0.7 0 0.00037518
0.56 0.84 0 0.00037518
0.56 1.12 0 0.00037518
0.56 1.26 0 0.00037518
0.56 1.4 0 0.00037518
0.56 1.68 0 0.00037518
0.56 2.24 0 0.00037518
0.7 0.7 0 0.00037518
0.7 0.84 0 0.00037518
0.7 1.12 0 0.00037518
0.7 1.26 0 0.00037518
0.7 1.4 0 0.00037518
0.7 1.68 0 0.00037518
0.7 2.24 0 0.00037518
0.84 0.84 0 0.00037518
0.84 1.12 0 0.00037518
0.84 1.26 0 0.00037518
0.84 1.4 0 0.00037518
0.84 1.68 0 0.00037518
0.84 2.24 0 0.00037518
1.12 1.12 0 0.00037518
1.12 1.26 0 0.00037518
1.12 1.4 0 0.00037518
1.12 1.68 0 0.00037518
1.12 2.24 0 0.00037518
1.26 1.26 0 0.00037518
1.26 1.4 0 0.00037518
1.26 1.68 0 0.00037518
1.26 2.24 0 0.00037518
1.4 1.4 0 0.00037518
1.4 1.68 0 0.00037518
1.4 2.24 0 0.00037518
1.68 1.68 0 0.00037518
1.68 2.24 0 0.00037518
2.24 0 2.24 0.00037518
END DIST
Metal 3 RESOVER 1
DIST count 0 width 0.28
END DIST
Metal 3 RESOVER 2
DIST count 0 width 0.28
END DIST
Metal 3 OVER
WIDTH Table 1 entries: 0.28
Metal 3 OVER 0
DIST count 12 width 0.28
0.28 0.000375666 3.12482e-06 0.00018759
0.56 0.000187841 4.36928e-06 0.00018759
0.7 0.00015026 4.98452e-06 0.00018759
0.84 0.000125216 5.59461e-06 0.00018759
0.98 0.000107328 6.19807e-06 0.00018759
1.12 9.3912e-05 6.79398e-06 0.00018759
1.26 8.34776e-05 7.38149e-06 0.00018759
1.4 7.51299e-05 7.95981e-06 0.00018759
1.68 6.26082e-05 9.08626e-06 0.00018759
2.24 4.69561e-05 1.12043e-05 0.00018759
2.8 3.75649e-05 1.31273e-05 0.00018759
3.36 0 4.61581e-05 0.00018759
END DIST
Metal 3 OVER 1
DIST count 12 width 0.28
0.28 0.000375649 9.66806e-06 0.00018759
0.56 0.000187825 1.33065e-05 0.00018759
0.7 0.00015026 1.5059e-05 0.00018759
0.84 0.000125216 1.67583e-05 0.00018759
0.98 0.000107328 1.83973e-05 0.00018759
1.12 9.3912e-05 1.99711e-05 0.00018759
1.26 8.34776e-05 2.1475e-05 0.00018759
1.4 7.51299e-05 2.2913e-05 0.00018759
1.68 6.26082e-05 2.55788e-05 0.00018759
2.24 4.69561e-05 3.01437e-05 0.00018759
2.8 3.75649e-05 3.38265e-05 0.00018759
3.36 0 6.81241e-05 0.00018759
END DIST
Metal 3 OVER 2
DIST count 12 width 0.28
0.28 0.000375649 3.58666e-05 0.00018759
0.56 0.000187825 4.66912e-05 0.00018759
0.7 0.00015026 5.07942e-05 0.00018759
0.84 0.000125216 5.41873e-05 0.00018759
0.98 0.000107328 5.7016e-05 0.00018759
1.12 9.3912e-05 5.93955e-05 0.00018759
1.26 8.34776e-05 6.14245e-05 0.00018759
1.4 7.51299e-05 6.31729e-05 0.00018759
1.68 6.26082e-05 6.60431e-05 0.00018759
2.24 4.69561e-05 7.01703e-05 0.00018759
2.8 3.75649e-05 7.30618e-05 0.00018759
3.36 0 0.000106543 0.00018759
END DIST
Metal 3 UNDER
WIDTH Table 1 entries: 0.28
Metal 3 UNDER 4
DIST count 12 width 0.28
0.28 0.000375652 3.78743e-05 0.00018759
0.56 0.000187827 4.75214e-05 0.00018759
0.7 0.00015026 5.1257e-05 0.00018759
0.84 0.000125216 5.44194e-05 0.00018759
0.98 0.000107328 5.7108e-05 0.00018759
1.12 9.3912e-05 5.94246e-05 0.00018759
1.26 8.34776e-05 6.14444e-05 0.00018759
1.4 7.51299e-05 6.32276e-05 0.00018759
1.68 6.26082e-05 6.62606e-05 0.00018759
2.24 4.69561e-05 7.09129e-05 0.00018759
2.8 3.75649e-05 7.44287e-05 0.00018759
3.36 0 0.000108548 0.00018759
END DIST
Metal 3 UNDER 5
DIST count 12 width 0.28
0.28 0.000375649 1.05452e-05 0.00018759
0.56 0.000187825 1.33599e-05 0.00018759
0.7 0.00015026 1.47383e-05 0.00018759
0.84 0.000125216 1.6091e-05 0.00018759
0.98 0.000107328 1.74136e-05 0.00018759
1.12 9.3912e-05 1.8704e-05 0.00018759
1.26 8.34776e-05 1.99602e-05 0.00018759
1.4 7.51299e-05 2.11782e-05 0.00018759
1.68 6.26082e-05 2.35012e-05 0.00018759
2.24 4.69561e-05 2.76837e-05 0.00018759
2.8 3.75649e-05 3.12775e-05 0.00018759
3.36 0 6.56548e-05 0.00018759
END DIST
Metal 3 DIAGUNDER
WIDTH Table 1 entries: 0.28
Metal 3 DIAGUNDER 4
DIST count 13 width 0.28
0 0 2.52357e-05 0.00018759
0.28 0 2.7144e-05 0.00018759
0.56 0 2.10226e-05 0.00018759
0.7 0 1.85811e-05 0.00018759
0.84 0 1.66772e-05 0.00018759
0.98 0 1.51627e-05 0.00018759
1.12 0 1.39538e-05 0.00018759
1.26 0 1.29801e-05 0.00018759
1.4 0 1.21453e-05 0.00018759
1.68 0 1.08676e-05 0.00018759
2.24 0 9.36898e-06 0.00018759
2.8 0 8.47727e-06 0.00018759
3.36 0 6.73874e-06 0.00018759
END DIST
Metal 3 DIAGUNDER 5
DIST count 13 width 0.28
0 0 1.3055e-05 0.00018759
0.28 0 1.42014e-05 0.00018759
0.56 0 1.37686e-05 0.00018759
0.7 0 1.35228e-05 0.00018759
0.84 0 1.32633e-05 0.00018759
0.98 0 1.2994e-05 0.00018759
1.12 0 1.27185e-05 0.00018759
1.26 0 1.24403e-05 0.00018759
1.4 0 1.21232e-05 0.00018759
1.68 0 1.1506e-05 0.00018759
2.24 0 1.05072e-05 0.00018759
2.8 0 9.65314e-06 0.00018759
3.36 0 5.39657e-06 0.00018759
END DIST
Metal 3 OVERUNDER
WIDTH Table 1 entries: 0.28
Metal 3 OVER 1 UNDER 4
DIST count 12 width 0.28
0.28 0.000375698 4.43737e-05 0.00018759
0.56 0.000187843 5.64703e-05 0.00018759
0.7 0.00015026 6.13732e-05 0.00018759
0.84 0.000125216 6.56248e-05 0.00018759
0.98 0.000107328 6.93489e-05 0.00018759
1.12 9.3912e-05 7.26435e-05 0.00018759
1.26 8.34776e-05 7.55797e-05 0.00018759
1.4 7.51299e-05 7.82225e-05 0.00018759
1.68 6.26082e-05 8.27948e-05 0.00018759
2.24 4.69561e-05 8.98941e-05 0.00018759
2.8 3.75649e-05 9.51696e-05 0.00018759
3.36 0 0.000130553 0.00018759
END DIST
Metal 3 OVER 1 UNDER 5
DIST count 12 width 0.28
0.28 0.000375743 1.70522e-05 0.00018759
0.56 0.000187858 2.23197e-05 0.00018759
0.7 0.00015026 2.48662e-05 0.00018759
0.84 0.000125216 2.7308e-05 0.00018759
0.98 0.000107328 2.96662e-05 0.00018759
1.12 9.3912e-05 3.19345e-05 0.00018759
1.26 8.34776e-05 3.41071e-05 0.00018759
1.4 7.51299e-05 3.61847e-05 0.00018759
1.68 6.26082e-05 4.00471e-05 0.00018759
2.24 4.69561e-05 4.66765e-05 0.00018759
2.8 3.75649e-05 5.20301e-05 0.00018759
3.36 0 8.76745e-05 0.00018759
END DIST
Metal 3 OVER 2 UNDER 4
DIST count 12 width 0.28
0.28 0.000375743 7.05601e-05 0.00018759
0.56 0.000187858 8.98777e-05 0.00018759
0.7 0.00015026 9.71493e-05 0.00018759
0.84 0.000125216 0.000103095 0.00018759
0.98 0.000107328 0.000108009 0.00018759
1.12 9.3912e-05 0.000112109 0.00018759
1.26 8.34776e-05 0.00011557 0.00018759
1.4 7.51299e-05 0.000118523 0.00018759
1.68 6.26082e-05 0.0001233 0.00018759
2.24 4.69561e-05 0.000129962 0.00018759
2.8 3.75649e-05 0.000134446 0.00018759
3.36 0 0.000169015 0.00018759
END DIST
Metal 3 OVER 2 UNDER 5
DIST count 12 width 0.28
0.28 0.000375712 4.32753e-05 0.00018759
0.56 0.000187857 5.56994e-05 0.00018759
0.7 0.00015026 6.05635e-05 0.00018759
0.84 0.000125216 6.46991e-05 0.00018759
0.98 0.000107328 6.8247e-05 0.00018759
1.12 9.3912e-05 7.1321e-05 0.00018759
1.26 8.34776e-05 7.40187e-05 0.00018759
1.4 7.51299e-05 7.64068e-05 0.00018759
1.68 6.26082e-05 8.04736e-05 0.00018759
2.24 4.69561e-05 8.66652e-05 0.00018759
2.8 3.75649e-05 9.12275e-05 0.00018759
3.36 0 0.000126058 0.00018759
END DIST
Metal 4 RESOVER
WIDTH Table 1 entries: 0.28
Metal 4 RESOVER 0
DIST count 55 width 0.28
0 0 0 0.00037518
0 0.28 0 0.00037518
0 0.56 0 0.00037518
0 0.7 0 0.00037518
0 0.84 0 0.00037518
0 1.12 0 0.00037518
0 1.26 0 0.00037518
0 1.4 0 0.00037518
0 1.68 0 0.00037518
0 2.24 0 0.00037518
0.28 0.28 0 0.00037518
0.28 0.56 0 0.00037518
0.28 0.7 0 0.00037518
0.28 0.84 0 0.00037518
0.28 1.12 0 0.00037518
0.28 1.26 0 0.00037518
0.28 1.4 0 0.00037518
0.28 1.68 0 0.00037518
0.28 2.24 0 0.00037518
0.56 0.56 0 0.00037518
0.56 0.7 0 0.00037518
0.56 0.84 0 0.00037518
0.56 1.12 0 0.00037518
0.56 1.26 0 0.00037518
0.56 1.4 0 0.00037518
0.56 1.68 0 0.00037518
0.56 2.24 0 0.00037518
0.7 0.7 0 0.00037518
0.7 0.84 0 0.00037518
0.7 1.12 0 0.00037518
0.7 1.26 0 0.00037518
0.7 1.4 0 0.00037518
0.7 1.68 0 0.00037518
0.7 2.24 0 0.00037518
0.84 0.84 0 0.00037518
0.84 1.12 0 0.00037518
0.84 1.26 0 0.00037518
0.84 1.4 0 0.00037518
0.84 1.68 0 0.00037518
0.84 2.24 0 0.00037518
1.12 1.12 0 0.00037518
1.12 1.26 0 0.00037518
1.12 1.4 0 0.00037518
1.12 1.68 0 0.00037518
1.12 2.24 0 0.00037518
1.26 1.26 0 0.00037518
1.26 1.4 0 0.00037518
1.26 1.68 0 0.00037518
1.26 2.24 0 0.00037518
1.4 1.4 0 0.00037518
1.4 1.68 0 0.00037518
1.4 2.24 0 0.00037518
1.68 1.68 0 0.00037518
1.68 2.24 0 0.00037518
2.24 0 2.24 0.00037518
END DIST
Metal 4 RESOVER 1
DIST count 0 width 0.28
END DIST
Metal 4 RESOVER 2
DIST count 0 width 0.28
END DIST
Metal 4 RESOVER 3
DIST count 0 width 0.28
END DIST
Metal 4 OVER
WIDTH Table 1 entries: 0.28
Metal 4 OVER 0
DIST count 12 width 0.28
0.28 0.000463379 2.32404e-06 0.00018759
0.56 0.000231689 3.18685e-06 0.00018759
0.7 0.000185351 3.61578e-06 0.00018759
0.84 0.000154459 4.04248e-06 0.00018759
0.98 0.000132393 4.46652e-06 0.00018759
1.12 0.000115844 4.88752e-06 0.00018759
1.26 0.000102973 5.30509e-06 0.00018759
1.4 9.26753e-05 5.71885e-06 0.00018759
1.68 7.72294e-05 6.53368e-06 0.00018759
2.24 5.79221e-05 8.10433e-06 0.00018759
2.8 4.63377e-05 9.58443e-06 0.00018759
3.36 0 4.95819e-05 0.00018759
END DIST
Metal 4 OVER 1
DIST count 12 width 0.28
0.28 0.000463377 5.47592e-06 0.00018759
0.56 0.000231688 7.47054e-06 0.00018759
0.7 0.000185351 8.45456e-06 0.00018759
0.84 0.000154459 9.42651e-06 0.00018759
0.98 0.000132393 1.03862e-05 0.00018759
1.12 0.000115844 1.13312e-05 0.00018759
1.26 0.000102973 1.22569e-05 0.00018759
1.4 9.26753e-05 1.31676e-05 0.00018759
1.68 7.72294e-05 1.49278e-05 0.00018759
2.24 5.79221e-05 1.81952e-05 0.00018759
2.8 4.63377e-05 2.11105e-05 0.00018759
3.36 0 6.23028e-05 0.00018759
END DIST
Metal 4 OVER 2
DIST count 12 width 0.28
0.28 0.000463377 9.63194e-06 0.00018759
0.56 0.000231688 1.30791e-05 0.00018759
0.7 0.000185351 1.4742e-05 0.00018759
0.84 0.000154459 1.63497e-05 0.00018759
0.98 0.000132393 1.79001e-05 0.00018759
1.12 0.000115844 1.93858e-05 0.00018759
1.26 0.000102973 2.08067e-05 0.00018759
1.4 9.26753e-05 2.21626e-05 0.00018759
1.68 7.72294e-05 2.4675e-05 0.00018759
2.24 5.79221e-05 2.89668e-05 0.00018759
2.8 4.63377e-05 3.24305e-05 0.00018759
3.36 0 7.38658e-05 0.00018759
END DIST
Metal 4 OVER 3
DIST count 12 width 0.28
0.28 0.000463377 3.60541e-05 0.00018759
0.56 0.000231688 4.64116e-05 0.00018759
0.7 0.000185351 5.03165e-05 0.00018759
0.84 0.000154459 5.3535e-05 0.00018759
0.98 0.000132393 5.62054e-05 0.00018759
1.12 0.000115844 5.84416e-05 0.00018759
1.26 0.000102973 6.03369e-05 0.00018759
1.4 9.26753e-05 6.19633e-05 0.00018759
1.68 7.72294e-05 6.46164e-05 0.00018759
2.24 5.79221e-05 6.83869e-05 0.00018759
2.8 4.63377e-05 7.10029e-05 0.00018759
3.36 0 0.000111589 0.00018759
END DIST
Metal 4 UNDER
WIDTH Table 1 entries: 0.28
Metal 4 UNDER 5
DIST count 12 width 0.28
0.28 0.000463379 2.42463e-05 0.00018759
0.56 0.000231689 3.04971e-05 0.00018759
0.7 0.000185351 3.32433e-05 0.00018759
0.84 0.000154459 3.57299e-05 0.00018759
0.98 0.000132393 3.79701e-05 0.00018759
1.12 0.000115844 3.99869e-05 0.00018759
1.26 0.000102973 4.18069e-05 0.00018759
1.4 9.26753e-05 4.34531e-05 0.00018759
1.68 7.72294e-05 4.63178e-05 0.00018759
2.24 5.79221e-05 5.08062e-05 0.00018759
2.8 4.63377e-05 5.42254e-05 0.00018759
3.36 0 9.55853e-05 0.00018759
END DIST
Metal 4 DIAGUNDER
WIDTH Table 1 entries: 0.28
Metal 4 DIAGUNDER 5
DIST count 13 width 0.28
0 0 2.22676e-05 0.00018759
0.28 0 2.70569e-05 0.00018759
0.56 0 2.36819e-05 0.00018759
0.7 0 2.20294e-05 0.00018759
0.84 0 2.05082e-05 0.00018759
0.98 0 1.91446e-05 0.00018759
1.12 0 1.79415e-05 0.00018759
1.26 0 1.6889e-05 0.00018759
1.4 0 1.59232e-05 0.00018759
1.68 0 1.43366e-05 0.00018759
2.24 0 1.22902e-05 0.00018759
2.8 0 1.0981e-05 0.00018759
3.36 0 5.85981e-06 0.00018759
END DIST
Metal 4 OVERUNDER
WIDTH Table 1 entries: 0.28
Metal 4 OVER 1 UNDER 5
DIST count 12 width 0.28
0.28 0.000463379 2.74236e-05 0.00018759
0.56 0.000231689 3.47834e-05 0.00018759
0.7 0.000185351 3.80821e-05 0.00018759
0.84 0.000154459 4.11139e-05 0.00018759
0.98 0.000132393 4.38898e-05 0.00018759
1.12 0.000115844 4.64306e-05 0.00018759
1.26 0.000102973 4.87587e-05 0.00018759
1.4 9.26753e-05 5.09019e-05 0.00018759
1.68 7.72294e-05 5.4712e-05 0.00018759
2.24 5.79221e-05 6.08971e-05 0.00018759
2.8 4.63377e-05 6.57514e-05 0.00018759
3.36 0 0.000108308 0.00018759
END DIST
Metal 4 OVER 2 UNDER 5
DIST count 12 width 0.28
0.28 0.000463377 3.15542e-05 0.00018759
0.56 0.000231688 4.03894e-05 0.00018759
0.7 0.000185351 4.43695e-05 0.00018759
0.84 0.000154459 4.8037e-05 0.00018759
0.98 0.000132393 5.14036e-05 0.00018759
1.12 0.000115844 5.44852e-05 0.00018759
1.26 0.000102973 5.73085e-05 0.00018759
1.4 9.26753e-05 5.98968e-05 0.00018759
1.68 7.72294e-05 6.44591e-05 0.00018759
2.24 5.79221e-05 7.16687e-05 0.00018759
2.8 4.63377e-05 7.70715e-05 0.00018759
3.36 0 0.000119871 0.00018759
END DIST
Metal 4 OVER 3 UNDER 5
DIST count 12 width 0.28
0.28 0.000463377 5.79764e-05 0.00018759
0.56 0.000231688 7.37218e-05 0.00018759
0.7 0.000185351 7.9944e-05 0.00018759
0.84 0.000154459 8.52223e-05 0.00018759
0.98 0.000132393 8.9709e-05 0.00018759
1.12 0.000115844 9.3541e-05 0.00018759
1.26 0.000102973 9.68386e-05 0.00018759
1.4 9.26753e-05 9.96976e-05 0.00018759
1.68 7.72294e-05 0.000104401 0.00018759
2.24 5.79221e-05 0.000111089 0.00018759
2.8 4.63377e-05 0.000115644 0.00018759
3.36 0 0.000157595 0.00018759
END DIST
Metal 5 RESOVER
WIDTH Table 1 entries: 0.44
Metal 5 RESOVER 0
DIST count 55 width 0.44
0 0 0 0.000160698
0 0.46 0 0.000160698
0 0.9 0 0.000160698
0 1.14 0 0.000160698
0 1.36 0 0.000160698
0 1.8 0 0.000160698
0 2.04 0 0.000160698
0 2.26 0 0.000160698
0 2.7 0 0.000160698
0 3.6 0 0.000160698
0.46 0.46 0 0.000160698
0.46 0.9 0 0.000160698
0.46 1.14 0 0.000160698
0.46 1.36 0 0.000160698
0.46 1.8 0 0.000160698
0.46 2.04 0 0.000160698
0.46 2.26 0 0.000160698
0.46 2.7 0 0.000160698
0.46 3.6 0 0.000160698
0.9 0.9 0 0.000160698
0.9 1.14 0 0.000160698
0.9 1.36 0 0.000160698
0.9 1.8 0 0.000160698
0.9 2.04 0 0.000160698
0.9 2.26 0 0.000160698
0.9 2.7 0 0.000160698
0.9 3.6 0 0.000160698
1.14 1.14 0 0.000160698
1.14 1.36 0 0.000160698
1.14 1.8 0 0.000160698
1.14 2.04 0 0.000160698
1.14 2.26 0 0.000160698
1.14 2.7 0 0.000160698
1.14 3.6 0 0.000160698
1.36 1.36 0 0.000160698
1.36 1.8 0 0.000160698
1.36 2.04 0 0.000160698
1.36 2.26 0 0.000160698
1.36 2.7 0 0.000160698
1.36 3.6 0 0.000160698
1.8 1.8 0 0.000160698
1.8 2.04 0 0.000160698
1.8 2.26 0 0.000160698
1.8 2.7 0 0.000160698
1.8 3.6 0 0.000160698
2.04 2.04 0 0.000160698
2.04 2.26 0 0.000160698
2.04 2.7 0 0.000160698
2.04 3.6 0 0.000160698
2.26 2.26 0 0.000160698
2.26 2.7 0 0.000160698
2.26 3.6 0 0.000160698
2.7 2.7 0 0.000160698
2.7 3.6 0 0.000160698
3.6 0 3.6 0.000160698
END DIST
Metal 5 RESOVER 1
DIST count 0 width 0.44
END DIST
Metal 5 RESOVER 2
DIST count 0 width 0.44
END DIST
Metal 5 RESOVER 3
DIST count 0 width 0.44
END DIST
Metal 5 RESOVER 4
DIST count 0 width 0.44
END DIST
Metal 5 OVER
WIDTH Table 1 entries: 0.44
Metal 5 OVER 0
DIST count 12 width 0.44
0.46 0.000569744 2.90194e-06 8.03489e-05
0.92 0.000284871 4.08382e-06 8.03489e-05
1.15 0.000227896 4.66943e-06 8.03489e-05
1.38 0.000189914 5.25034e-06 8.03489e-05
1.61 0.000162783 5.8257e-06 8.03489e-05
1.84 0.000142435 6.39472e-06 8.03489e-05
2.07 0.000126609 6.95666e-06 8.03489e-05
2.3 0.000113948 7.51085e-06 8.03489e-05
2.76 9.49568e-05 8.59356e-06 8.03489e-05
3.68 7.12176e-05 1.06432e-05 8.03489e-05
4.6 5.70228e-05 1.25016e-05 8.03489e-05
5.52 0 6.17315e-05 8.03489e-05
END DIST
Metal 5 OVER 1
DIST count 12 width 0.44
0.46 0.000569743 5.97866e-06 8.03489e-05
0.92 0.000284902 8.38484e-06 8.03489e-05
1.15 0.000227896 9.59854e-06 8.03489e-05
1.38 0.000189914 1.07761e-05 8.03489e-05
1.61 0.000162783 1.19333e-05 8.03489e-05
1.84 0.000142435 1.30696e-05 8.03489e-05
2.07 0.000126609 1.41826e-05 8.03489e-05
2.3 0.000113948 1.52698e-05 8.03489e-05
2.76 9.49568e-05 1.73629e-05 8.03489e-05
3.68 7.12176e-05 2.12005e-05 8.03489e-05
4.6 5.69743e-05 2.45677e-05 8.03489e-05
5.52 0 7.49795e-05 8.03489e-05
END DIST
Metal 5 OVER 2
DIST count 12 width 0.44
0.46 0.000569743 8.23147e-06 8.03489e-05
0.92 0.000284871 1.15186e-05 8.03489e-05
1.15 0.000227896 1.31164e-05 8.03489e-05
1.38 0.000189956 1.46546e-05 8.03489e-05
1.61 0.000162783 1.61893e-05 8.03489e-05
1.84 0.000142435 1.76546e-05 8.03489e-05
2.07 0.000126609 1.90696e-05 8.03489e-05
2.3 0.000113948 2.04303e-05 8.03489e-05
2.76 9.49568e-05 2.29879e-05 8.03489e-05
3.68 7.12176e-05 2.74693e-05 8.03489e-05
4.6 5.69743e-05 3.11836e-05 8.03489e-05
5.52 0 8.17374e-05 8.03489e-05
END DIST
Metal 5 OVER 3
DIST count 12 width 0.44
0.46 0.000569743 1.35424e-05 8.03489e-05
0.92 0.000284871 1.88191e-05 8.03489e-05
1.15 0.000227896 2.12803e-05 8.03489e-05
1.38 0.000189914 2.36042e-05 8.03489e-05
1.61 0.000162783 2.57815e-05 8.03489e-05
1.84 0.000142435 2.78116e-05 8.03489e-05
2.07 0.000126609 2.96997e-05 8.03489e-05
2.3 0.000113948 3.14508e-05 8.03489e-05
2.76 9.49568e-05 3.45804e-05 8.03489e-05
3.68 7.12176e-05 3.96014e-05 8.03489e-05
4.6 5.69743e-05 4.34075e-05 8.03489e-05
5.52 0 9.38515e-05 8.03489e-05
END DIST
Metal 5 OVER 4
DIST count 12 width 0.44
0.46 0.000569743 3.68234e-05 8.03489e-05
0.92 0.000284871 4.85362e-05 8.03489e-05
1.15 0.000227896 5.29078e-05 8.03489e-05
1.38 0.000189914 5.64964e-05 8.03489e-05
1.61 0.000162783 5.94669e-05 8.03489e-05
1.84 0.000142435 6.19539e-05 8.03489e-05
2.07 0.000126609 6.40615e-05 8.03489e-05
2.3 0.000113948 6.58719e-05 8.03489e-05
2.76 9.49568e-05 6.88324e-05 8.03489e-05
3.68 7.12176e-05 7.3062e-05 8.03489e-05
4.6 5.69743e-05 7.60118e-05 8.03489e-05
5.52 0 0.000125711 8.03489e-05
END DIST
Metal 5 UNDER
WIDTH Table 0 entries:
Metal 5 DIAGUNDER
WIDTH Table 0 entries:
END DensityModel 0