blob: dc7a210a5b37176367260f09af49f88f6b8718f1 [file] [log] [blame]
Extraction Rules for OpenRCX
DIAGMODEL ON
LayerCount 5
DensityRate 1 0
DensityModel 0
Metal 1 RESOVER
WIDTH Table 1 entries: 0.23
Metal 1 RESOVER 0
DIST count 55 width 0.23
0 0 0 0.000628392
0 0.33 0 0.000628392
0 0.56 0 0.000628392
0 0.775 0 0.000628392
0 0.89 0 0.000628392
0 1.12 0 0.000628392
0 1.335 0 0.000628392
0 1.45 0 0.000628392
0 1.68 0 0.000628392
0 2.24 0 0.000628392
0.33 0.33 0 0.000628392
0.33 0.56 0 0.000628392
0.33 0.775 0 0.000628392
0.33 0.89 0 0.000628392
0.33 1.12 0 0.000628392
0.33 1.335 0 0.000628392
0.33 1.45 0 0.000628392
0.33 1.68 0 0.000628392
0.33 2.24 0 0.000628392
0.56 0.56 0 0.000628392
0.56 0.775 0 0.000628392
0.56 0.89 0 0.000628392
0.56 1.12 0 0.000628392
0.56 1.335 0 0.000628392
0.56 1.45 0 0.000628392
0.56 1.68 0 0.000628392
0.56 2.24 0 0.000628392
0.775 0.775 0 0.000628392
0.775 0.89 0 0.000628392
0.775 1.12 0 0.000628392
0.775 1.335 0 0.000628392
0.775 1.45 0 0.000628392
0.775 1.68 0 0.000628392
0.775 2.24 0 0.000628392
0.89 0.89 0 0.000628392
0.89 1.12 0 0.000628392
0.89 1.335 0 0.000628392
0.89 1.45 0 0.000628392
0.89 1.68 0 0.000628392
0.89 2.24 0 0.000628392
1.12 1.12 0 0.000628392
1.12 1.335 0 0.000628392
1.12 1.45 0 0.000628392
1.12 1.68 0 0.000628392
1.12 2.24 0 0.000628392
1.335 1.335 0 0.000628392
1.335 1.45 0 0.000628392
1.335 1.68 0 0.000628392
1.335 2.24 0 0.000628392
1.45 1.45 0 0.000628392
1.45 1.68 0 0.000628392
1.45 2.24 0 0.000628392
1.68 1.68 0 0.000628392
1.68 2.24 0 0.000628392
2.24 0 2.24 0.000628392
END DIST
Metal 1 OVER
WIDTH Table 1 entries: 0.23
Metal 1 OVER 0
DIST count 12 width 0.23
0.23 0.000163066 2.14511e-06 0.000314196
0.46 8.80869e-05 8.70507e-06 0.000314196
0.575 7.24573e-05 1.15035e-05 0.000314196
0.69 6.22235e-05 1.3715e-05 0.000314196
0.805 5.37493e-05 1.61066e-05 0.000314196
0.92 4.79864e-05 1.80001e-05 0.000314196
1.035 4.2843e-05 2.01039e-05 0.000314196
1.15 3.84751e-05 2.20757e-05 0.000314196
1.38 2.99935e-05 2.72403e-05 0.000314196
1.84 2.26977e-05 3.18281e-05 0.000314196
2.3 1.74152e-05 3.52563e-05 0.000314196
2.76 0 5.12697e-05 0.000314196
END DIST
Metal 1 UNDER
WIDTH Table 1 entries: 0.23
Metal 1 UNDER 2
DIST count 12 width 0.23
0.23 0.000144459 2.1481e-05 0.000314196
0.46 6.85778e-05 3.67021e-05 0.000314196
0.575 5.17716e-05 4.29389e-05 0.000314196
0.69 4.16004e-05 4.73552e-05 0.000314196
0.805 3.31513e-05 5.22894e-05 0.000314196
0.92 2.75672e-05 5.6341e-05 0.000314196
1.035 2.27466e-05 6.01151e-05 0.000314196
1.15 1.88026e-05 6.33821e-05 0.000314196
1.38 1.33435e-05 6.7905e-05 0.000314196
1.84 8.43152e-06 7.29208e-05 0.000314196
2.3 5.02921e-06 7.64798e-05 0.000314196
2.76 0 8.16266e-05 0.000314196
END DIST
Metal 1 UNDER 3
DIST count 12 width 0.23
0.23 0.000156199 8.90965e-06 0.000314196
0.46 8.04996e-05 1.77523e-05 0.000314196
0.575 6.45163e-05 2.17548e-05 0.000314196
0.69 5.40298e-05 2.48023e-05 0.000314196
0.805 4.36082e-05 2.9885e-05 0.000314196
0.92 3.78495e-05 3.23147e-05 0.000314196
1.035 3.26244e-05 3.52033e-05 0.000314196
1.15 2.82585e-05 3.7801e-05 0.000314196
1.38 2.22065e-05 4.14058e-05 0.000314196
1.84 1.51207e-05 4.7377e-05 0.000314196
2.3 1.00576e-05 5.17591e-05 0.000314196
2.76 0 6.13032e-05 0.000314196
END DIST
Metal 1 UNDER 4
DIST count 12 width 0.23
0.23 0.000159351 5.95133e-06 0.000314196
0.46 8.39158e-05 1.37471e-05 0.000314196
0.575 6.80646e-05 1.7232e-05 0.000314196
0.69 5.81271e-05 2.0671e-05 0.000314196
0.805 4.95076e-05 2.33824e-05 0.000314196
0.92 4.35802e-05 2.60516e-05 0.000314196
1.035 3.62046e-05 2.97238e-05 0.000314196
1.15 3.19542e-05 3.22196e-05 0.000314196
1.38 2.55962e-05 3.56473e-05 0.000314196
1.84 1.8064e-05 4.08711e-05 0.000314196
2.3 1.2703e-05 4.50786e-05 0.000314196
2.76 0 5.69098e-05 0.000314196
END DIST
Metal 1 UNDER 5
DIST count 12 width 0.23
0.23 0.000160794 4.59863e-06 0.000314196
0.46 8.55223e-05 1.18341e-05 0.000314196
0.575 6.97516e-05 1.51867e-05 0.000314196
0.69 6.02153e-05 1.86621e-05 0.000314196
0.805 5.16937e-05 2.12297e-05 0.000314196
0.92 4.61314e-05 2.41765e-05 0.000314196
1.035 4.05471e-05 2.59112e-05 0.000314196
1.15 3.57071e-05 2.75295e-05 0.000314196
1.38 2.73536e-05 3.27571e-05 0.000314196
1.84 1.97251e-05 3.77005e-05 0.000314196
2.3 1.43247e-05 4.16908e-05 0.000314196
2.76 0 5.4947e-05 0.000314196
END DIST
Metal 1 DIAGUNDER
WIDTH Table 1 entries: 0.23
Metal 1 DIAGUNDER 2
DIST count 13 width 0.23
0 0 3.05977e-05 0.000314196
0.23 0 2.38751e-05 0.000314196
0.46 0 2.10224e-05 0.000314196
0.575 0 1.96077e-05 0.000314196
0.69 0 1.84195e-05 0.000314196
0.805 0 1.74009e-05 0.000314196
0.92 0 1.62592e-05 0.000314196
1.035 0 1.51557e-05 0.000314196
1.15 0 1.41315e-05 0.000314196
1.38 0 1.24546e-05 0.000314196
1.84 0 9.91186e-06 0.000314196
2.3 0 7.94357e-06 0.000314196
2.76 0 6.54998e-06 0.000314196
END DIST
Metal 1 DIAGUNDER 3
DIST count 13 width 0.23
0 0 1.3517e-05 0.000314196
0.23 0 1.1076e-05 0.000314196
0.46 0 1.08754e-05 0.000314196
0.575 0 1.06794e-05 0.000314196
0.69 0 1.05053e-05 0.000314196
0.805 0 1.03468e-05 0.000314196
0.92 0 1.00643e-05 0.000314196
1.035 0 9.72639e-06 0.000314196
1.15 0 9.37997e-06 0.000314196
1.38 0 8.81243e-06 0.000314196
1.84 0 7.81724e-06 0.000314196
2.3 0 6.75577e-06 0.000314196
2.76 0 5.94664e-06 0.000314196
END DIST
Metal 1 DIAGUNDER 4
DIST count 13 width 0.23
0 0 8.94223e-06 0.000314196
0.23 0 7.06581e-06 0.000314196
0.46 0 7.13013e-06 0.000314196
0.575 0 7.09256e-06 0.000314196
0.69 0 7.0534e-06 0.000314196
0.805 0 7.01579e-06 0.000314196
0.92 0 6.92857e-06 0.000314196
1.035 0 6.80995e-06 0.000314196
1.15 0 6.68254e-06 0.000314196
1.38 0 6.47365e-06 0.000314196
1.84 0 6.06199e-06 0.000314196
2.3 0 5.51765e-06 0.000314196
2.76 0 5.08397e-06 0.000314196
END DIST
Metal 1 DIAGUNDER 5
DIST count 13 width 0.23
0 0 6.95758e-06 0.000314196
0.23 0 5.54732e-06 0.000314196
0.46 0 5.61287e-06 0.000314196
0.575 0 5.61186e-06 0.000314196
0.69 0 5.60604e-06 0.000314196
0.805 0 5.60274e-06 0.000314196
0.92 0 5.55766e-06 0.000314196
1.035 0 5.51853e-06 0.000314196
1.15 0 5.48423e-06 0.000314196
1.38 0 5.42681e-06 0.000314196
1.84 0 5.1906e-06 0.000314196
2.3 0 4.90938e-06 0.000314196
2.76 0 4.70766e-06 0.000314196
END DIST
Metal 2 RESOVER
WIDTH Table 1 entries: 0.28
Metal 2 RESOVER 0
DIST count 55 width 0.28
0 0 0 0.000516178
0 0.28 0 0.000516178
0 0.56 0 0.000516178
0 0.7 0 0.000516178
0 0.84 0 0.000516178
0 1.12 0 0.000516178
0 1.26 0 0.000516178
0 1.4 0 0.000516178
0 1.68 0 0.000516178
0 2.24 0 0.000516178
0.28 0.28 0 0.000516178
0.28 0.56 0 0.000516178
0.28 0.7 0 0.000516178
0.28 0.84 0 0.000516178
0.28 1.12 0 0.000516178
0.28 1.26 0 0.000516178
0.28 1.4 0 0.000516178
0.28 1.68 0 0.000516178
0.28 2.24 0 0.000516178
0.56 0.56 0 0.000516178
0.56 0.7 0 0.000516178
0.56 0.84 0 0.000516178
0.56 1.12 0 0.000516178
0.56 1.26 0 0.000516178
0.56 1.4 0 0.000516178
0.56 1.68 0 0.000516178
0.56 2.24 0 0.000516178
0.7 0.7 0 0.000516178
0.7 0.84 0 0.000516178
0.7 1.12 0 0.000516178
0.7 1.26 0 0.000516178
0.7 1.4 0 0.000516178
0.7 1.68 0 0.000516178
0.7 2.24 0 0.000516178
0.84 0.84 0 0.000516178
0.84 1.12 0 0.000516178
0.84 1.26 0 0.000516178
0.84 1.4 0 0.000516178
0.84 1.68 0 0.000516178
0.84 2.24 0 0.000516178
1.12 1.12 0 0.000516178
1.12 1.26 0 0.000516178
1.12 1.4 0 0.000516178
1.12 1.68 0 0.000516178
1.12 2.24 0 0.000516178
1.26 1.26 0 0.000516178
1.26 1.4 0 0.000516178
1.26 1.68 0 0.000516178
1.26 2.24 0 0.000516178
1.4 1.4 0 0.000516178
1.4 1.68 0 0.000516178
1.4 2.24 0 0.000516178
1.68 1.68 0 0.000516178
1.68 2.24 0 0.000516178
2.24 0 2.24 0.000516178
END DIST
Metal 2 RESOVER 1
DIST count 0 width 0.28
END DIST
Metal 2 OVER
WIDTH Table 1 entries: 0.28
Metal 2 OVER 0
DIST count 12 width 0.28
0.28 0.000145548 3.6075e-08 0.000258089
0.56 8.35102e-05 2.14621e-06 0.000258089
0.7 6.98459e-05 4.64856e-06 0.000258089
0.84 6.12109e-05 6.31562e-06 0.000258089
0.98 5.36044e-05 8.41986e-06 0.000258089
1.12 4.87101e-05 9.82618e-06 0.000258089
1.26 4.39285e-05 1.16817e-05 0.000258089
1.4 4.01431e-05 1.31527e-05 0.000258089
1.68 3.16449e-05 1.84411e-05 0.000258089
2.24 2.46436e-05 2.239e-05 0.000258089
2.8 1.95722e-05 2.5315e-05 0.000258089
3.36 0 4.32645e-05 0.000258089
END DIST
Metal 2 OVER 1
DIST count 12 width 0.28
0.28 0.000127917 1.74794e-05 0.000258089
0.56 6.58078e-05 3.11777e-05 0.000258089
0.7 5.23913e-05 3.71175e-05 0.000258089
0.84 4.39173e-05 4.20495e-05 0.000258089
0.98 3.44776e-05 4.88277e-05 0.000258089
1.12 2.99391e-05 5.13264e-05 0.000258089
1.26 2.58538e-05 5.5632e-05 0.000258089
1.4 2.26084e-05 5.84476e-05 0.000258089
1.68 1.8023e-05 6.01398e-05 0.000258089
2.24 1.31006e-05 6.61678e-05 0.000258089
2.8 9.60341e-06 6.98399e-05 0.000258089
3.36 0 7.95735e-05 0.000258089
END DIST
Metal 2 UNDER
WIDTH Table 1 entries: 0.28
Metal 2 UNDER 3
DIST count 12 width 0.28
0.28 0.000123557 2.08395e-05 0.000258089
0.56 6.07539e-05 3.53458e-05 0.000258089
0.7 4.70284e-05 4.16977e-05 0.000258089
0.84 3.83461e-05 4.68897e-05 0.000258089
0.98 2.97389e-05 5.29551e-05 0.000258089
1.12 2.50597e-05 5.58549e-05 0.000258089
1.26 2.08749e-05 6.03672e-05 0.000258089
1.4 1.75501e-05 6.33683e-05 0.000258089
1.68 1.28696e-05 6.50223e-05 0.000258089
2.24 8.35846e-06 7.10099e-05 0.000258089
2.8 5.22224e-06 7.43539e-05 0.000258089
3.36 0 7.97333e-05 0.000258089
END DIST
Metal 2 UNDER 4
DIST count 12 width 0.28
0.28 0.000136511 5.8183e-06 0.000258089
0.56 7.3606e-05 1.42692e-05 0.000258089
0.7 5.95455e-05 1.81876e-05 0.000258089
0.84 5.06362e-05 2.07885e-05 0.000258089
0.98 4.2714e-05 2.4161e-05 0.000258089
1.12 3.76002e-05 2.65166e-05 0.000258089
1.26 3.09573e-05 3.10532e-05 0.000258089
1.4 2.71282e-05 3.33406e-05 0.000258089
1.68 2.17146e-05 3.6715e-05 0.000258089
2.24 1.50034e-05 4.24794e-05 0.000258089
2.8 1.02261e-05 4.66541e-05 0.000258089
3.36 0 5.64317e-05 0.000258089
END DIST
Metal 2 UNDER 5
DIST count 12 width 0.28
0.28 0.000140876 1.58261e-06 0.000258089
0.56 7.8303e-05 8.55126e-06 0.000258089
0.7 6.43691e-05 1.18086e-05 0.000258089
0.84 5.59244e-05 1.45969e-05 0.000258089
0.98 4.8581e-05 1.75902e-05 0.000258089
1.12 4.30698e-05 1.93843e-05 0.000258089
1.26 3.80163e-05 2.10808e-05 0.000258089
1.4 3.39021e-05 2.31706e-05 0.000258089
1.68 2.60856e-05 2.80995e-05 0.000258089
2.24 1.8862e-05 3.34993e-05 0.000258089
2.8 1.3671e-05 3.74463e-05 0.000258089
3.36 0 5.0163e-05 0.000258089
END DIST
Metal 2 DIAGUNDER
WIDTH Table 1 entries: 0.28
Metal 2 DIAGUNDER 3
DIST count 13 width 0.28
0 0 3.35462e-05 0.000258089
0.28 0 2.52224e-05 0.000258089
0.56 0 2.15451e-05 0.000258089
0.7 0 2.00225e-05 0.000258089
0.84 0 1.87823e-05 0.000258089
0.98 0 1.76897e-05 0.000258089
1.12 0 1.63479e-05 0.000258089
1.26 0 1.52107e-05 0.000258089
1.4 0 1.42345e-05 0.000258089
1.68 0 1.26455e-05 0.000258089
2.24 0 1.01289e-05 0.000258089
2.8 0 8.25074e-06 0.000258089
3.36 0 6.97881e-06 0.000258089
END DIST
Metal 2 DIAGUNDER 4
DIST count 13 width 0.28
0 0 1.57479e-05 0.000258089
0.28 0 1.26326e-05 0.000258089
0.56 0 1.21992e-05 0.000258089
0.7 0 1.19576e-05 0.000258089
0.84 0 1.17609e-05 0.000258089
0.98 0 1.15501e-05 0.000258089
1.12 0 1.10518e-05 0.000258089
1.26 0 1.06295e-05 0.000258089
1.4 0 1.02671e-05 0.000258089
1.68 0 9.67704e-06 0.000258089
2.24 0 8.45372e-06 0.000258089
2.8 0 7.28947e-06 0.000258089
3.36 0 6.50099e-06 0.000258089
END DIST
Metal 2 DIAGUNDER 5
DIST count 13 width 0.28
0 0 1.13604e-05 0.000258089
0.28 0 8.84264e-06 0.000258089
0.56 0 8.88858e-06 0.000258089
0.7 0 8.82174e-06 0.000258089
0.84 0 8.76248e-06 0.000258089
0.98 0 8.68831e-06 0.000258089
1.12 0 8.55538e-06 0.000258089
1.26 0 8.44118e-06 0.000258089
1.4 0 8.34196e-06 0.000258089
1.68 0 8.10804e-06 0.000258089
2.24 0 7.45611e-06 0.000258089
2.8 0 6.875e-06 0.000258089
3.36 0 6.41997e-06 0.000258089
END DIST
Metal 2 OVERUNDER
WIDTH Table 1 entries: 0.28
Metal 2 OVER 1 UNDER 3
DIST count 12 width 0.28
0.28 0.000109014 3.7376e-05 0.000258089
0.56 4.62623e-05 5.93091e-05 0.000258089
0.7 3.2953e-05 6.84277e-05 0.000258089
0.84 2.45551e-05 7.63923e-05 0.000258089
0.98 1.78732e-05 8.267e-05 0.000258089
1.12 1.36293e-05 8.60258e-05 0.000258089
1.26 1.03985e-05 9.16513e-05 0.000258089
1.4 7.90501e-06 9.47409e-05 0.000258089
1.68 4.4469e-06 9.41461e-05 0.000258089
2.24 2.60119e-06 9.85681e-05 0.000258089
2.8 1.40083e-06 0.00010007 0.000258089
3.36 0 0.000101699 0.000258089
END DIST
Metal 2 OVER 1 UNDER 4
DIST count 12 width 0.28
0.28 0.000121388 2.28247e-05 0.000258089
0.56 5.71273e-05 4.03362e-05 0.000258089
0.7 4.35388e-05 4.72808e-05 0.000258089
0.84 3.49328e-05 5.28474e-05 0.000258089
0.98 2.76408e-05 5.81243e-05 0.000258089
1.12 2.29509e-05 6.13072e-05 0.000258089
1.26 1.88113e-05 6.61209e-05 0.000258089
1.4 1.55278e-05 6.93697e-05 0.000258089
1.68 1.09281e-05 7.175e-05 0.000258089
2.24 6.89082e-06 7.73569e-05 0.000258089
2.8 4.11412e-06 8.06105e-05 0.000258089
3.36 0 8.50852e-05 0.000258089
END DIST
Metal 2 OVER 1 UNDER 5
DIST count 12 width 0.28
0.28 0.00012497 1.95288e-05 0.000258089
0.56 6.23628e-05 3.43503e-05 0.000258089
0.7 4.87141e-05 4.08636e-05 0.000258089
0.84 4.09273e-05 4.68354e-05 0.000258089
0.98 3.29107e-05 5.33842e-05 0.000258089
1.12 2.76907e-05 5.62874e-05 0.000258089
1.26 2.32108e-05 6.01306e-05 0.000258089
1.4 1.95075e-05 6.31665e-05 0.000258089
1.68 1.43483e-05 6.52491e-05 0.000258089
2.24 9.57242e-06 7.14325e-05 0.000258089
2.8 6.22865e-06 7.51876e-05 0.000258089
3.36 0 8.16907e-05 0.000258089
END DIST
Metal 3 RESOVER
WIDTH Table 1 entries: 0.28
Metal 3 RESOVER 0
DIST count 55 width 0.28
0 0 0 0.000516178
0 0.28 0 0.000516178
0 0.56 0 0.000516178
0 0.7 0 0.000516178
0 0.84 0 0.000516178
0 1.12 0 0.000516178
0 1.26 0 0.000516178
0 1.4 0 0.000516178
0 1.68 0 0.000516178
0 2.24 0 0.000516178
0.28 0.28 0 0.000516178
0.28 0.56 0 0.000516178
0.28 0.7 0 0.000516178
0.28 0.84 0 0.000516178
0.28 1.12 0 0.000516178
0.28 1.26 0 0.000516178
0.28 1.4 0 0.000516178
0.28 1.68 0 0.000516178
0.28 2.24 0 0.000516178
0.56 0.56 0 0.000516178
0.56 0.7 0 0.000516178
0.56 0.84 0 0.000516178
0.56 1.12 0 0.000516178
0.56 1.26 0 0.000516178
0.56 1.4 0 0.000516178
0.56 1.68 0 0.000516178
0.56 2.24 0 0.000516178
0.7 0.7 0 0.000516178
0.7 0.84 0 0.000516178
0.7 1.12 0 0.000516178
0.7 1.26 0 0.000516178
0.7 1.4 0 0.000516178
0.7 1.68 0 0.000516178
0.7 2.24 0 0.000516178
0.84 0.84 0 0.000516178
0.84 1.12 0 0.000516178
0.84 1.26 0 0.000516178
0.84 1.4 0 0.000516178
0.84 1.68 0 0.000516178
0.84 2.24 0 0.000516178
1.12 1.12 0 0.000516178
1.12 1.26 0 0.000516178
1.12 1.4 0 0.000516178
1.12 1.68 0 0.000516178
1.12 2.24 0 0.000516178
1.26 1.26 0 0.000516178
1.26 1.4 0 0.000516178
1.26 1.68 0 0.000516178
1.26 2.24 0 0.000516178
1.4 1.4 0 0.000516178
1.4 1.68 0 0.000516178
1.4 2.24 0 0.000516178
1.68 1.68 0 0.000516178
1.68 2.24 0 0.000516178
2.24 0 2.24 0.000516178
END DIST
Metal 3 RESOVER 1
DIST count 0 width 0.28
END DIST
Metal 3 RESOVER 2
DIST count 0 width 0.28
END DIST
Metal 3 OVER
WIDTH Table 1 entries: 0.28
Metal 3 OVER 0
DIST count 12 width 0.28
0.28 0.000149184 3.6075e-08 0.000258089
0.56 8.73169e-05 3.6075e-08 0.000258089
0.7 7.37272e-05 6.09149e-08 0.000258089
0.84 6.51482e-05 1.54351e-06 0.000258089
0.98 5.75961e-05 3.41864e-06 0.000258089
1.12 5.27422e-05 4.66134e-06 0.000258089
1.26 4.79916e-05 6.30323e-06 0.000258089
1.4 4.42411e-05 7.57878e-06 0.000258089
1.68 3.50658e-05 1.33216e-05 0.000258089
2.24 2.80246e-05 1.67694e-05 0.000258089
2.8 2.29063e-05 1.93387e-05 0.000258089
3.36 0 4.03178e-05 0.000258089
END DIST
Metal 3 OVER 1
DIST count 12 width 0.28
0.28 0.000142749 3.6075e-08 0.000258089
0.56 8.04743e-05 7.53855e-06 0.000258089
0.7 6.67314e-05 1.09906e-05 0.000258089
0.84 5.80411e-05 1.33755e-05 0.000258089
0.98 5.03687e-05 1.63123e-05 0.000258089
1.12 4.54289e-05 1.82328e-05 0.000258089
1.26 3.75337e-05 2.3964e-05 0.000258089
1.4 3.3871e-05 2.5915e-05 0.000258089
1.68 2.86776e-05 2.86452e-05 0.000258089
2.24 2.19176e-05 3.39722e-05 0.000258089
2.8 1.70366e-05 3.79024e-05 0.000258089
3.36 0 5.42203e-05 0.000258089
END DIST
Metal 3 OVER 2
DIST count 12 width 0.28
0.28 0.000128187 1.69281e-05 0.000258089
0.56 6.60521e-05 3.05403e-05 0.000258089
0.7 5.26246e-05 3.64542e-05 0.000258089
0.84 4.4144e-05 4.14062e-05 0.000258089
0.98 3.45987e-05 4.82854e-05 0.000258089
1.12 3.00586e-05 5.0765e-05 0.000258089
1.26 2.59703e-05 5.5124e-05 0.000258089
1.4 2.27237e-05 5.79424e-05 0.000258089
1.68 1.8133e-05 5.94757e-05 0.000258089
2.24 1.3203e-05 6.55743e-05 0.000258089
2.8 9.69903e-06 6.92443e-05 0.000258089
3.36 0 7.90672e-05 0.000258089
END DIST
Metal 3 UNDER
WIDTH Table 1 entries: 0.28
Metal 3 UNDER 4
DIST count 12 width 0.28
0.28 0.000125586 1.90373e-05 0.000258089
0.56 6.29906e-05 3.30205e-05 0.000258089
0.7 4.93421e-05 3.91403e-05 0.000258089
0.84 4.07141e-05 4.42038e-05 0.000258089
0.98 3.16986e-05 5.05722e-05 0.000258089
1.12 2.70523e-05 5.33072e-05 0.000258089
1.26 2.28634e-05 5.77671e-05 0.000258089
1.4 1.95352e-05 6.06929e-05 0.000258089
1.68 1.48344e-05 6.22078e-05 0.000258089
2.24 9.98955e-06 6.84498e-05 0.000258089
2.8 6.58982e-06 7.20272e-05 0.000258089
3.36 0 7.87506e-05 0.000258089
END DIST
Metal 3 UNDER 5
DIST count 12 width 0.28
0.28 0.000140534 1.92115e-06 0.000258089
0.56 7.78682e-05 9.38896e-06 0.000258089
0.7 6.38979e-05 1.28644e-05 0.000258089
0.84 5.57551e-05 1.60742e-05 0.000258089
0.98 4.87224e-05 1.96951e-05 0.000258089
1.12 4.30973e-05 2.18051e-05 0.000258089
1.26 3.78829e-05 2.36274e-05 0.000258089
1.4 3.33962e-05 2.50219e-05 0.000258089
1.68 2.55249e-05 3.01847e-05 0.000258089
2.24 1.83947e-05 3.58353e-05 0.000258089
2.8 1.32766e-05 3.99749e-05 0.000258089
3.36 0 5.25111e-05 0.000258089
END DIST
Metal 3 DIAGUNDER
WIDTH Table 1 entries: 0.28
Metal 3 DIAGUNDER 4
DIST count 13 width 0.28
0 0 3.53001e-05 0.000258089
0.28 0 2.64062e-05 0.000258089
0.56 0 2.28665e-05 0.000258089
0.7 0 2.13398e-05 0.000258089
0.84 0 2.00961e-05 0.000258089
0.98 0 1.90014e-05 0.000258089
1.12 0 1.76622e-05 0.000258089
1.26 0 1.6527e-05 0.000258089
1.4 0 1.55527e-05 0.000258089
1.68 0 1.39667e-05 0.000258089
2.24 0 1.1432e-05 0.000258089
2.8 0 9.52062e-06 0.000258089
3.36 0 8.22621e-06 0.000258089
END DIST
Metal 3 DIAGUNDER 5
DIST count 13 width 0.28
0 0 1.73422e-05 0.000258089
0.28 0 1.38866e-05 0.000258089
0.56 0 1.36647e-05 0.000258089
0.7 0 1.34496e-05 0.000258089
0.84 0 1.32616e-05 0.000258089
0.98 0 1.30462e-05 0.000258089
1.12 0 1.27076e-05 0.000258089
1.26 0 1.24166e-05 0.000258089
1.4 0 1.21637e-05 0.000258089
1.68 0 1.16346e-05 0.000258089
2.24 0 1.03781e-05 0.000258089
2.8 0 9.31373e-06 0.000258089
3.36 0 8.5116e-06 0.000258089
END DIST
Metal 3 OVERUNDER
WIDTH Table 1 entries: 0.28
Metal 3 OVER 1 UNDER 4
DIST count 12 width 0.28
0.28 0.000121561 2.24609e-05 0.000258089
0.56 5.71894e-05 4.00572e-05 0.000258089
0.7 4.35711e-05 4.69295e-05 0.000258089
0.84 3.49436e-05 5.25894e-05 0.000258089
0.98 2.7645e-05 5.79039e-05 0.000258089
1.12 2.29539e-05 6.10788e-05 0.000258089
1.26 1.88151e-05 6.60375e-05 0.000258089
1.4 1.55316e-05 6.93247e-05 0.000258089
1.68 1.09269e-05 7.12163e-05 0.000258089
2.24 6.88544e-06 7.7e-05 0.000258089
2.8 4.10586e-06 8.01884e-05 0.000258089
3.36 0 8.46021e-05 0.000258089
END DIST
Metal 3 OVER 1 UNDER 5
DIST count 12 width 0.28
0.28 0.000135669 6.27068e-06 0.000258089
0.56 7.26122e-05 1.61246e-05 0.000258089
0.7 5.95446e-05 2.12571e-05 0.000258089
0.84 5.13025e-05 2.60276e-05 0.000258089
0.98 4.14507e-05 3.17467e-05 0.000258089
1.12 3.58894e-05 3.41299e-05 0.000258089
1.26 3.09335e-05 3.63233e-05 0.000258089
1.4 2.65747e-05 3.85283e-05 0.000258089
1.68 2.06243e-05 4.16495e-05 0.000258089
2.24 1.40713e-05 4.80509e-05 0.000258089
2.8 9.42283e-06 5.26888e-05 0.000258089
3.36 0 6.21031e-05 0.000258089
END DIST
Metal 3 OVER 2 UNDER 4
DIST count 12 width 0.28
0.28 0.000109026 3.71034e-05 0.000258089
0.56 4.6268e-05 5.89905e-05 0.000258089
0.7 3.29571e-05 6.80812e-05 0.000258089
0.84 2.45582e-05 7.61031e-05 0.000258089
0.98 1.78755e-05 8.23523e-05 0.000258089
1.12 1.3631e-05 8.56499e-05 0.000258089
1.26 1.03998e-05 9.13804e-05 0.000258089
1.4 7.90602e-06 9.44821e-05 0.000258089
1.68 4.44744e-06 9.36951e-05 0.000258089
2.24 2.60151e-06 9.82192e-05 0.000258089
2.8 1.401e-06 9.97207e-05 0.000258089
3.36 0 0.000101348 0.000258089
END DIST
Metal 3 OVER 2 UNDER 5
DIST count 12 width 0.28
0.28 0.00012273 2.12441e-05 0.000258089
0.56 5.98112e-05 3.69485e-05 0.000258089
0.7 4.47401e-05 4.51944e-05 0.000258089
0.84 3.68985e-05 5.13275e-05 0.000258089
0.98 3.03377e-05 5.64419e-05 0.000258089
1.12 2.50518e-05 5.96021e-05 0.000258089
1.26 2.05618e-05 6.3681e-05 0.000258089
1.4 1.70069e-05 6.68843e-05 0.000258089
1.68 1.19743e-05 6.91183e-05 0.000258089
2.24 7.66382e-06 7.50302e-05 0.000258089
2.8 4.68514e-06 7.84756e-05 0.000258089
3.36 0 8.35123e-05 0.000258089
END DIST
Metal 4 RESOVER
WIDTH Table 1 entries: 0.28
Metal 4 RESOVER 0
DIST count 55 width 0.28
0 0 0 0.000516178
0 0.28 0 0.000516178
0 0.56 0 0.000516178
0 0.7 0 0.000516178
0 0.84 0 0.000516178
0 1.12 0 0.000516178
0 1.26 0 0.000516178
0 1.4 0 0.000516178
0 1.68 0 0.000516178
0 2.24 0 0.000516178
0.28 0.28 0 0.000516178
0.28 0.56 0 0.000516178
0.28 0.7 0 0.000516178
0.28 0.84 0 0.000516178
0.28 1.12 0 0.000516178
0.28 1.26 0 0.000516178
0.28 1.4 0 0.000516178
0.28 1.68 0 0.000516178
0.28 2.24 0 0.000516178
0.56 0.56 0 0.000516178
0.56 0.7 0 0.000516178
0.56 0.84 0 0.000516178
0.56 1.12 0 0.000516178
0.56 1.26 0 0.000516178
0.56 1.4 0 0.000516178
0.56 1.68 0 0.000516178
0.56 2.24 0 0.000516178
0.7 0.7 0 0.000516178
0.7 0.84 0 0.000516178
0.7 1.12 0 0.000516178
0.7 1.26 0 0.000516178
0.7 1.4 0 0.000516178
0.7 1.68 0 0.000516178
0.7 2.24 0 0.000516178
0.84 0.84 0 0.000516178
0.84 1.12 0 0.000516178
0.84 1.26 0 0.000516178
0.84 1.4 0 0.000516178
0.84 1.68 0 0.000516178
0.84 2.24 0 0.000516178
1.12 1.12 0 0.000516178
1.12 1.26 0 0.000516178
1.12 1.4 0 0.000516178
1.12 1.68 0 0.000516178
1.12 2.24 0 0.000516178
1.26 1.26 0 0.000516178
1.26 1.4 0 0.000516178
1.26 1.68 0 0.000516178
1.26 2.24 0 0.000516178
1.4 1.4 0 0.000516178
1.4 1.68 0 0.000516178
1.4 2.24 0 0.000516178
1.68 1.68 0 0.000516178
1.68 2.24 0 0.000516178
2.24 0 2.24 0.000516178
END DIST
Metal 4 RESOVER 1
DIST count 0 width 0.28
END DIST
Metal 4 RESOVER 2
DIST count 0 width 0.28
END DIST
Metal 4 RESOVER 3
DIST count 0 width 0.28
END DIST
Metal 4 OVER
WIDTH Table 1 entries: 0.28
Metal 4 OVER 0
DIST count 12 width 0.28
0.28 0.000150548 3.6075e-08 0.000258089
0.56 8.88777e-05 3.6075e-08 0.000258089
0.7 7.53868e-05 3.6075e-08 0.000258089
0.84 6.68738e-05 3.6075e-08 0.000258089
0.98 5.94036e-05 1.08513e-06 0.000258089
1.12 5.46051e-05 2.21401e-06 0.000258089
1.26 4.99263e-05 3.69484e-06 0.000258089
1.4 4.62341e-05 4.83389e-06 0.000258089
1.68 3.69284e-05 1.05993e-05 0.000258089
2.24 2.99117e-05 1.37261e-05 0.000258089
2.8 2.47981e-05 1.60692e-05 0.000258089
3.36 0 3.87734e-05 0.000258089
END DIST
Metal 4 OVER 1
DIST count 12 width 0.28
0.28 0.000147246 3.6075e-08 0.000258089
0.56 8.53316e-05 1.36409e-06 0.000258089
0.7 7.22756e-05 4.74687e-06 0.000258089
0.84 6.4057e-05 7.0201e-06 0.000258089
0.98 5.6608e-05 8.63074e-06 0.000258089
1.12 5.13038e-05 9.80603e-06 0.000258089
1.26 4.64724e-05 1.10895e-05 0.000258089
1.4 4.24693e-05 1.31671e-05 0.000258089
1.68 3.34184e-05 1.95538e-05 0.000258089
2.24 2.63423e-05 2.4184e-05 0.000258089
2.8 2.12023e-05 2.76266e-05 0.000258089
3.36 0 4.75458e-05 0.000258089
END DIST
Metal 4 OVER 2
DIST count 12 width 0.28
0.28 0.000142468 3.6075e-08 0.000258089
0.56 8.02612e-05 7.50745e-06 0.000258089
0.7 6.6551e-05 1.09103e-05 0.000258089
0.84 5.78808e-05 1.32843e-05 0.000258089
0.98 5.02344e-05 1.61789e-05 0.000258089
1.12 4.53111e-05 1.80467e-05 0.000258089
1.26 3.7542e-05 2.36597e-05 0.000258089
1.4 3.38897e-05 2.55869e-05 0.000258089
1.68 2.87136e-05 2.82469e-05 0.000258089
2.24 2.19167e-05 3.35794e-05 0.000258089
2.8 1.7003e-05 3.75194e-05 0.000258089
3.36 0 5.37863e-05 0.000258089
END DIST
Metal 4 OVER 3
DIST count 12 width 0.28
0.28 0.000128063 1.69235e-05 0.000258089
0.56 6.59762e-05 3.04369e-05 0.000258089
0.7 5.25712e-05 3.63075e-05 0.000258089
0.84 4.41052e-05 4.12461e-05 0.000258089
0.98 3.46433e-05 4.80239e-05 0.000258089
1.12 3.01112e-05 5.05138e-05 0.000258089
1.26 2.60324e-05 5.48622e-05 0.000258089
1.4 2.27927e-05 5.76683e-05 0.000258089
1.68 1.82137e-05 5.90691e-05 0.000258089
2.24 1.32447e-05 6.52727e-05 0.000258089
2.8 9.70738e-06 6.89656e-05 0.000258089
3.36 0 7.87907e-05 0.000258089
END DIST
Metal 4 UNDER
WIDTH Table 1 entries: 0.28
Metal 4 UNDER 5
DIST count 12 width 0.28
0.28 0.000131848 1.10991e-05 0.000258089
0.56 6.9174e-05 2.19307e-05 0.000258089
0.7 5.53526e-05 2.67917e-05 0.000258089
0.84 4.65985e-05 2.99251e-05 0.000258089
0.98 3.89666e-05 3.38837e-05 0.000258089
1.12 3.40521e-05 3.68265e-05 0.000258089
1.26 2.77381e-05 4.15613e-05 0.000258089
1.4 2.41624e-05 4.41281e-05 0.000258089
1.68 1.91157e-05 4.80664e-05 0.000258089
2.24 1.33472e-05 5.36077e-05 0.000258089
2.8 9.24309e-06 5.76243e-05 0.000258089
3.36 0 6.68013e-05 0.000258089
END DIST
Metal 4 DIAGUNDER
WIDTH Table 1 entries: 0.28
Metal 4 DIAGUNDER 5
DIST count 13 width 0.28
0 0 3.05388e-05 0.000258089
0.28 0 2.37574e-05 0.000258089
0.56 0 2.20855e-05 0.000258089
0.7 0 2.10532e-05 0.000258089
0.84 0 2.01788e-05 0.000258089
0.98 0 1.93687e-05 0.000258089
1.12 0 1.84058e-05 0.000258089
1.26 0 1.75762e-05 0.000258089
1.4 0 1.68535e-05 0.000258089
1.68 0 1.555e-05 0.000258089
2.24 0 1.31859e-05 0.000258089
2.8 0 1.1375e-05 0.000258089
3.36 0 1.00565e-05 0.000258089
END DIST
Metal 4 OVERUNDER
WIDTH Table 1 entries: 0.28
Metal 4 OVER 1 UNDER 5
DIST count 12 width 0.28
0.28 0.000130073 1.23095e-05 0.000258089
0.56 6.71631e-05 2.43602e-05 0.000258089
0.7 5.41907e-05 3.02694e-05 0.000258089
0.84 4.60429e-05 3.53398e-05 0.000258089
0.98 3.67927e-05 4.11178e-05 0.000258089
1.12 3.13831e-05 4.41948e-05 0.000258089
1.26 2.6651e-05 4.65987e-05 0.000258089
1.4 2.26279e-05 4.90661e-05 0.000258089
1.68 1.70636e-05 5.29144e-05 0.000258089
2.24 1.14826e-05 5.87625e-05 0.000258089
2.8 7.54473e-06 6.29701e-05 0.000258089
3.36 0 7.07042e-05 0.000258089
END DIST
Metal 4 OVER 2 UNDER 5
DIST count 12 width 0.28
0.28 0.00012673 1.53303e-05 0.000258089
0.56 6.35009e-05 2.86347e-05 0.000258089
0.7 4.81436e-05 3.59563e-05 0.000258089
0.84 3.93814e-05 3.97907e-05 0.000258089
0.98 3.18169e-05 4.44914e-05 0.000258089
1.12 2.69326e-05 4.78316e-05 0.000258089
1.26 2.24437e-05 5.14569e-05 0.000258089
1.4 1.88527e-05 5.45909e-05 0.000258089
1.68 1.38215e-05 5.91145e-05 0.000258089
2.24 8.88307e-06 6.4563e-05 0.000258089
2.8 5.44228e-06 6.84547e-05 0.000258089
3.36 0 7.42086e-05 0.000258089
END DIST
Metal 4 OVER 3 UNDER 5
DIST count 12 width 0.28
0.28 0.000114696 2.94989e-05 0.000258089
0.56 5.10486e-05 4.92566e-05 0.000258089
0.7 3.74526e-05 5.74134e-05 0.000258089
0.84 2.88439e-05 6.37596e-05 0.000258089
0.98 2.17551e-05 6.97238e-05 0.000258089
1.12 1.72186e-05 7.34456e-05 0.000258089
1.26 1.35091e-05 7.81857e-05 0.000258089
1.4 1.06013e-05 8.14481e-05 0.000258089
1.68 6.5611e-06 8.36691e-05 0.000258089
2.24 3.92714e-06 8.79365e-05 0.000258089
2.8 2.16877e-06 9.01098e-05 0.000258089
3.36 0 9.26209e-05 0.000258089
END DIST
Metal 5 RESOVER
WIDTH Table 1 entries: 0.44
Metal 5 RESOVER 0
DIST count 55 width 0.44
0 0 0 0.000161545
0 0.46 0 0.000161545
0 0.9 0 0.000161545
0 1.14 0 0.000161545
0 1.36 0 0.000161545
0 1.8 0 0.000161545
0 2.04 0 0.000161545
0 2.26 0 0.000161545
0 2.7 0 0.000161545
0 3.6 0 0.000161545
0.46 0.46 0 0.000161545
0.46 0.9 0 0.000161545
0.46 1.14 0 0.000161545
0.46 1.36 0 0.000161545
0.46 1.8 0 0.000161545
0.46 2.04 0 0.000161545
0.46 2.26 0 0.000161545
0.46 2.7 0 0.000161545
0.46 3.6 0 0.000161545
0.9 0.9 0 0.000161545
0.9 1.14 0 0.000161545
0.9 1.36 0 0.000161545
0.9 1.8 0 0.000161545
0.9 2.04 0 0.000161545
0.9 2.26 0 0.000161545
0.9 2.7 0 0.000161545
0.9 3.6 0 0.000161545
1.14 1.14 0 0.000161545
1.14 1.36 0 0.000161545
1.14 1.8 0 0.000161545
1.14 2.04 0 0.000161545
1.14 2.26 0 0.000161545
1.14 2.7 0 0.000161545
1.14 3.6 0 0.000161545
1.36 1.36 0 0.000161545
1.36 1.8 0 0.000161545
1.36 2.04 0 0.000161545
1.36 2.26 0 0.000161545
1.36 2.7 0 0.000161545
1.36 3.6 0 0.000161545
1.8 1.8 0 0.000161545
1.8 2.04 0 0.000161545
1.8 2.26 0 0.000161545
1.8 2.7 0 0.000161545
1.8 3.6 0 0.000161545
2.04 2.04 0 0.000161545
2.04 2.26 0 0.000161545
2.04 2.7 0 0.000161545
2.04 3.6 0 0.000161545
2.26 2.26 0 0.000161545
2.26 2.7 0 0.000161545
2.26 3.6 0 0.000161545
2.7 2.7 0 0.000161545
2.7 3.6 0 0.000161545
3.6 0 3.6 0.000161545
END DIST
Metal 5 RESOVER 1
DIST count 0 width 0.44
END DIST
Metal 5 RESOVER 2
DIST count 0 width 0.44
END DIST
Metal 5 RESOVER 3
DIST count 0 width 0.44
END DIST
Metal 5 RESOVER 4
DIST count 0 width 0.44
END DIST
Metal 5 OVER
WIDTH Table 1 entries: 0.44
Metal 5 OVER 0
DIST count 12 width 0.44
0.46 0.000157913 3.44353e-08 8.07726e-05
0.92 9.2302e-05 3.44353e-08 8.07726e-05
1.15 7.77012e-05 3.44353e-08 8.07726e-05
1.38 6.85797e-05 3.44353e-08 8.07726e-05
1.61 6.04476e-05 1.51479e-06 8.07726e-05
1.84 5.5302e-05 2.69088e-06 8.07726e-05
2.07 5.01138e-05 4.28671e-06 8.07726e-05
2.3 4.60771e-05 5.47972e-06 8.07726e-05
2.76 3.67227e-05 1.08831e-05 8.07726e-05
3.68 2.60882e-05 1.71201e-05 8.07726e-05
4.6 0 3.35096e-05 8.07726e-05
5.52 0 3.35094e-05 8.07726e-05
END DIST
Metal 5 OVER 1
DIST count 12 width 0.44
0.46 0.000155419 3.44353e-08 8.07726e-05
0.92 8.96519e-05 3.67272e-07 8.07726e-05
1.15 7.50003e-05 3.12422e-06 8.07726e-05
1.38 6.56547e-05 5.10699e-06 8.07726e-05
1.61 5.75552e-05 7.34809e-06 8.07726e-05
1.84 5.227e-05 9.05854e-06 8.07726e-05
2.07 4.71889e-05 1.0934e-05 8.07726e-05
2.3 4.30908e-05 1.26e-05 8.07726e-05
2.76 3.4103e-05 1.82085e-05 8.07726e-05
3.68 2.39034e-05 2.54459e-05 8.07726e-05
4.6 0 4.64619e-05 8.07726e-05
5.52 0 4.64622e-05 8.07726e-05
END DIST
Metal 5 OVER 2
DIST count 12 width 0.44
0.46 0.000152671 3.44353e-08 8.07726e-05
0.92 8.67565e-05 3.84137e-06 8.07726e-05
1.15 7.20382e-05 6.93991e-06 8.07726e-05
1.38 6.28343e-05 8.96708e-06 8.07726e-05
1.61 5.4581e-05 1.16228e-05 8.07726e-05
1.84 4.93446e-05 1.35283e-05 8.07726e-05
2.07 4.40895e-05 1.57706e-05 8.07726e-05
2.3 3.99916e-05 1.76555e-05 8.07726e-05
2.76 3.14496e-05 2.31227e-05 8.07726e-05
3.68 2.16884e-05 3.05894e-05 8.07726e-05
4.6 0 5.09564e-05 8.07726e-05
5.52 0 5.09554e-05 8.07726e-05
END DIST
Metal 5 OVER 3
DIST count 12 width 0.44
0.46 0.000147741 2.17221e-06 8.07726e-05
0.92 8.16758e-05 1.02415e-05 8.07726e-05
1.15 6.69364e-05 1.40358e-05 8.07726e-05
1.38 5.77127e-05 1.65386e-05 8.07726e-05
1.61 4.94856e-05 1.97629e-05 8.07726e-05
1.84 4.42634e-05 2.20905e-05 8.07726e-05
2.07 3.90835e-05 2.47661e-05 8.07726e-05
2.3 3.50352e-05 2.70526e-05 8.07726e-05
2.76 2.71027e-05 3.25364e-05 8.07726e-05
3.68 1.8243e-05 4.01808e-05 8.07726e-05
4.6 0 5.8759e-05 8.07726e-05
5.52 0 5.87615e-05 8.07726e-05
END DIST
Metal 5 OVER 4
DIST count 12 width 0.44
0.46 0.00013675 1.61405e-05 8.07726e-05
0.92 7.10314e-05 2.92324e-05 8.07726e-05
1.15 5.6641e-05 3.49526e-05 8.07726e-05
1.38 4.76467e-05 3.87438e-05 8.07726e-05
1.61 3.98317e-05 4.32253e-05 8.07726e-05
1.84 3.48873e-05 4.65582e-05 8.07726e-05
2.07 2.82076e-05 5.16833e-05 8.07726e-05
2.3 2.46594e-05 5.43888e-05 8.07726e-05
2.76 1.96205e-05 5.82431e-05 8.07726e-05
3.68 1.26076e-05 6.53383e-05 8.07726e-05
4.6 0 7.98501e-05 8.07726e-05
5.52 0 7.98442e-05 8.07726e-05
END DIST
Metal 5 UNDER
WIDTH Table 0 entries:
Metal 5 DIAGUNDER
WIDTH Table 0 entries:
END DensityModel 0