sky130/openlane/rules.openrcx.sky130B.min.magic

Extraction Rules for OpenRCX

DIAGMODEL ON

LayerCount 6
DensityRate 1  0

DensityModel 0

Metal 1 RESOVER
WIDTH Table 1 entries:  0.17

Metal 1 RESOVER 0
DIST count 55 width 0.17
0 0 0 0.0623886
0 0.29 0 0.0623886
0 0.46 0 0.0623886
0 0.665 0 0.0623886
0 0.75 0 0.0623886
0 0.92 0 0.0623886
0 1.125 0 0.0623886
0 1.21 0 0.0623886
0 1.38 0 0.0623886
0 1.84 0 0.0623886
0.29 0.29 0 0.0623886
0.29 0.46 0 0.0623886
0.29 0.665 0 0.0623886
0.29 0.75 0 0.0623886
0.29 0.92 0 0.0623886
0.29 1.125 0 0.0623886
0.29 1.21 0 0.0623886
0.29 1.38 0 0.0623886
0.29 1.84 0 0.0623886
0.46 0.46 0 0.0623886
0.46 0.665 0 0.0623886
0.46 0.75 0 0.0623886
0.46 0.92 0 0.0623886
0.46 1.125 0 0.0623886
0.46 1.21 0 0.0623886
0.46 1.38 0 0.0623886
0.46 1.84 0 0.0623886
0.665 0.665 0 0.0623886
0.665 0.75 0 0.0623886
0.665 0.92 0 0.0623886
0.665 1.125 0 0.0623886
0.665 1.21 0 0.0623886
0.665 1.38 0 0.0623886
0.665 1.84 0 0.0623886
0.75 0.75 0 0.0623886
0.75 0.92 0 0.0623886
0.75 1.125 0 0.0623886
0.75 1.21 0 0.0623886
0.75 1.38 0 0.0623886
0.75 1.84 0 0.0623886
0.92 0.92 0 0.0623886
0.92 1.125 0 0.0623886
0.92 1.21 0 0.0623886
0.92 1.38 0 0.0623886
0.92 1.84 0 0.0623886
1.125 1.125 0 0.0623886
1.125 1.21 0 0.0623886
1.125 1.38 0 0.0623886
1.125 1.84 0 0.0623886
1.21 1.21 0 0.0623886
1.21 1.38 0 0.0623886
1.21 1.84 0 0.0623886
1.38 1.38 0 0.0623886
1.38 1.84 0 0.0623886
1.84 0 1.84 0.0623886
END DIST

Metal 1 OVER
WIDTH Table 1 entries:  0.17

Metal 1 OVER 0
DIST count 12 width 0.17
0.17 0.000490583 6.80969e-06 0.0311943
0.34 0.000275263 8.17445e-06 0.0311943
0.425 0.000228745 8.85502e-06 0.0311943
0.51 0.000196486 9.53411e-06 0.0311943
0.595 0.000172634 1.02116e-05 0.0311943
0.68 0.000154195 1.08871e-05 0.0311943
0.765 0.000139466 1.15607e-05 0.0311943
0.85 0.000127402 1.2232e-05 0.0311943
1.02 0.000108765 1.35673e-05 0.0311943
1.36 8.43779e-05 1.6203e-05 0.0311943
1.7 6.90393e-05 1.87824e-05 0.0311943
2.04 0 7.97594e-05 0.0311943
END DIST

Metal 1 UNDER
WIDTH Table 1 entries:  0.17

Metal 1 UNDER 2
DIST count 12 width 0.17
0.17 0.000490583 5.17131e-05 0.0311943
0.34 0.000275263 5.42405e-05 0.0311943
0.425 0.000228745 5.55018e-05 0.0311943
0.51 0.000196486 5.67587e-05 0.0311943
0.595 0.000172634 5.80155e-05 0.0311943
0.68 0.000154195 5.92659e-05 0.0311943
0.765 0.000139466 6.05132e-05 0.0311943
0.85 0.000127402 6.17576e-05 0.0311943
1.02 0.000108765 6.4232e-05 0.0311943
1.36 8.43779e-05 6.9115e-05 0.0311943
1.7 6.90393e-05 7.38925e-05 0.0311943
2.04 0 0.000137012 0.0311943
END DIST

Metal 1 UNDER 3
DIST count 12 width 0.17
0.17 0.000490583 2.98567e-05 0.0311943
0.34 0.000275263 3.17805e-05 0.0311943
0.425 0.000228745 3.27413e-05 0.0311943
0.51 0.000196486 3.36983e-05 0.0311943
0.595 0.000172634 3.46534e-05 0.0311943
0.68 0.000154195 3.56043e-05 0.0311943
0.765 0.000139466 3.65547e-05 0.0311943
0.85 0.000127402 3.75007e-05 0.0311943
1.02 0.000108765 3.93836e-05 0.0311943
1.36 8.43779e-05 4.30983e-05 0.0311943
1.7 6.90393e-05 4.67345e-05 0.0311943
2.04 0 0.00010874 0.0311943
END DIST

Metal 1 UNDER 4
DIST count 12 width 0.17
0.17 0.000490583 1.98654e-05 0.0311943
0.34 0.000275263 2.16608e-05 0.0311943
0.425 0.000228745 2.25559e-05 0.0311943
0.51 0.000196486 2.34494e-05 0.0311943
0.595 0.000172634 2.43411e-05 0.0311943
0.68 0.000154195 2.52296e-05 0.0311943
0.765 0.000139466 2.61159e-05 0.0311943
0.85 0.000127402 2.69985e-05 0.0311943
1.02 0.000108765 2.87556e-05 0.0311943
1.36 8.43779e-05 3.22226e-05 0.0311943
1.7 6.90393e-05 3.5616e-05 0.0311943
2.04 0 9.73845e-05 0.0311943
END DIST

Metal 1 UNDER 5
DIST count 12 width 0.17
0.17 0.000490583 1.79316e-05 0.0311943
0.34 0.000275263 1.96046e-05 0.0311943
0.425 0.000228745 2.04381e-05 0.0311943
0.51 0.000196486 2.12709e-05 0.0311943
0.595 0.000172634 2.2101e-05 0.0311943
0.68 0.000154195 2.2929e-05 0.0311943
0.765 0.000139466 2.3755e-05 0.0311943
0.85 0.000127402 2.45775e-05 0.0311943
1.02 0.000108765 2.62142e-05 0.0311943
1.36 8.43779e-05 2.94447e-05 0.0311943
1.7 6.90393e-05 3.2607e-05 0.0311943
2.04 0 9.41505e-05 0.0311943
END DIST

Metal 1 UNDER 6
DIST count 12 width 0.17
0.17 0.000490583 1.02185e-05 0.0311943
0.34 0.000275263 1.1837e-05 0.0311943
0.425 0.000228745 1.26442e-05 0.0311943
0.51 0.000196486 1.34496e-05 0.0311943
0.595 0.000172634 1.42531e-05 0.0311943
0.68 0.000154195 1.50543e-05 0.0311943
0.765 0.000139466 1.58532e-05 0.0311943
0.85 0.000127402 1.66494e-05 0.0311943
1.02 0.000108765 1.82331e-05 0.0311943
1.36 8.43779e-05 2.13591e-05 0.0311943
1.7 6.90393e-05 2.44182e-05 0.0311943
2.04 0 8.58624e-05 0.0311943
END DIST

Metal 1 DIAGUNDER
WIDTH Table 1 entries:  0.17

Metal 1 DIAGUNDER 2
DIST count 13 width 0.17
0 0 7.62507e-05 0.0311943
0.17 0 0 0.0311943
0.34 0 0 0.0311943
0.425 0 0 0.0311943
0.51 0 0 0.0311943
0.595 0 0 0.0311943
0.68 0 0 0.0311943
0.765 0 0 0.0311943
0.85 0 0 0.0311943
1.02 0 0 0.0311943
1.36 0 0 0.0311943
1.7 0 0 0.0311943
2.04 0 0 0.0311943
END DIST

Metal 1 DIAGUNDER 3
DIST count 13 width 0.17
0 0 3.99212e-05 0.0311943
0.17 0 0 0.0311943
0.34 0 0 0.0311943
0.425 0 0 0.0311943
0.51 0 0 0.0311943
0.595 0 0 0.0311943
0.68 0 0 0.0311943
0.765 0 0 0.0311943
0.85 0 0 0.0311943
1.02 0 0 0.0311943
1.36 0 0 0.0311943
1.7 0 0 0.0311943
2.04 0 0 0.0311943
END DIST

Metal 1 DIAGUNDER 4
DIST count 13 width 0.17
0 0 1.60851e-05 0.0311943
0.17 0 0 0.0311943
0.34 0 0 0.0311943
0.425 0 0 0.0311943
0.51 0 0 0.0311943
0.595 0 0 0.0311943
0.68 0 0 0.0311943
0.765 0 0 0.0311943
0.85 0 0 0.0311943
1.02 0 0 0.0311943
1.36 0 0 0.0311943
1.7 0 0 0.0311943
2.04 0 0 0.0311943
END DIST

Metal 1 DIAGUNDER 5
DIST count 13 width 0.17
0 0 1.11469e-05 0.0311943
0.17 0 0 0.0311943
0.34 0 0 0.0311943
0.425 0 0 0.0311943
0.51 0 0 0.0311943
0.595 0 0 0.0311943
0.68 0 0 0.0311943
0.765 0 0 0.0311943
0.85 0 0 0.0311943
1.02 0 0 0.0311943
1.36 0 0 0.0311943
1.7 0 0 0.0311943
2.04 0 0 0.0311943
END DIST

Metal 1 DIAGUNDER 6
DIST count 0 width 0.17
END DIST

Metal 2 RESOVER
WIDTH Table 1 entries:  0.14

Metal 2 RESOVER 0
DIST count 55 width 0.14
0 0 0 0.000757576
0 0.2 0 0.000757576
0 0.34 0 0.000757576
0 0.47 0 0.000757576
0 0.54 0 0.000757576
0 0.68 0 0.000757576
0 0.81 0 0.000757576
0 0.88 0 0.000757576
0 1.02 0 0.000757576
0 1.36 0 0.000757576
0.2 0.2 0 0.000757576
0.2 0.34 0 0.000757576
0.2 0.47 0 0.000757576
0.2 0.54 0 0.000757576
0.2 0.68 0 0.000757576
0.2 0.81 0 0.000757576
0.2 0.88 0 0.000757576
0.2 1.02 0 0.000757576
0.2 1.36 0 0.000757576
0.34 0.34 0 0.000757576
0.34 0.47 0 0.000757576
0.34 0.54 0 0.000757576
0.34 0.68 0 0.000757576
0.34 0.81 0 0.000757576
0.34 0.88 0 0.000757576
0.34 1.02 0 0.000757576
0.34 1.36 0 0.000757576
0.47 0.47 0 0.000757576
0.47 0.54 0 0.000757576
0.47 0.68 0 0.000757576
0.47 0.81 0 0.000757576
0.47 0.88 0 0.000757576
0.47 1.02 0 0.000757576
0.47 1.36 0 0.000757576
0.54 0.54 0 0.000757576
0.54 0.68 0 0.000757576
0.54 0.81 0 0.000757576
0.54 0.88 0 0.000757576
0.54 1.02 0 0.000757576
0.54 1.36 0 0.000757576
0.68 0.68 0 0.000757576
0.68 0.81 0 0.000757576
0.68 0.88 0 0.000757576
0.68 1.02 0 0.000757576
0.68 1.36 0 0.000757576
0.81 0.81 0 0.000757576
0.81 0.88 0 0.000757576
0.81 1.02 0 0.000757576
0.81 1.36 0 0.000757576
0.88 0.88 0 0.000757576
0.88 1.02 0 0.000757576
0.88 1.36 0 0.000757576
1.02 1.02 0 0.000757576
1.02 1.36 0 0.000757576
1.36 0 1.36 0.000757576
END DIST

Metal 2 RESOVER 1
DIST count 0 width 0.14
END DIST

Metal 2 OVER
WIDTH Table 1 entries:  0.14

Metal 2 OVER 0
DIST count 12 width 0.14
0.14 0.000833899 4.72439e-06 0.000378788
0.28 0.00046858 5.84722e-06 0.000378788
0.35 0.000389231 6.40768e-06 0.000378788
0.42 0.000334125 6.96735e-06 0.000378788
0.49 0.000293354 7.52612e-06 0.000378788
0.56 0.000261826 8.08387e-06 0.000378788
0.63 0.000236646 8.64055e-06 0.000378788
0.7 0.000216027 9.196e-06 0.000378788
0.84 0.000184196 1.03028e-05 0.000378788
1.12 0.000142607 1.24974e-05 0.000378788
1.4 0.000116505 1.46609e-05 0.000378788
1.68 0 0.000115331 0.000378788
END DIST

Metal 2 OVER 1
DIST count 12 width 0.14
0.14 0.000833899 2.69268e-05 0.000378788
0.28 0.00046858 2.91393e-05 0.000378788
0.35 0.000389231 3.02442e-05 0.000378788
0.42 0.000334125 3.13468e-05 0.000378788
0.49 0.000293354 3.24481e-05 0.000378788
0.56 0.000261826 3.35484e-05 0.000378788
0.63 0.000236646 3.46443e-05 0.000378788
0.7 0.000216027 3.57401e-05 0.000378788
0.84 0.000184196 3.79207e-05 0.000378788
1.12 0.000142607 4.22452e-05 0.000378788
1.4 0.000116505 4.65089e-05 0.000378788
1.68 0 0.000149243 0.000378788
END DIST

Metal 2 UNDER
WIDTH Table 1 entries:  0.14

Metal 2 UNDER 3
DIST count 12 width 0.14
0.14 0.000833899 2.47099e-05 0.000378788
0.28 0.00046858 2.64692e-05 0.000378788
0.35 0.000389231 2.73491e-05 0.000378788
0.42 0.000334125 2.82262e-05 0.000378788
0.49 0.000293354 2.91025e-05 0.000378788
0.56 0.000261826 2.99755e-05 0.000378788
0.63 0.000236646 3.08488e-05 0.000378788
0.7 0.000216027 3.17189e-05 0.000378788
0.84 0.000184196 3.34556e-05 0.000378788
1.12 0.000142607 3.68952e-05 0.000378788
1.4 0.000116505 4.02863e-05 0.000378788
1.68 0 0.000142164 0.000378788
END DIST

Metal 2 UNDER 4
DIST count 12 width 0.14
0.14 0.000833899 1.62785e-05 0.000378788
0.28 0.00046858 1.79693e-05 0.000378788
0.35 0.000389231 1.88135e-05 0.000378788
0.42 0.000334125 1.96565e-05 0.000378788
0.49 0.000293354 2.04978e-05 0.000378788
0.56 0.000261826 2.13378e-05 0.000378788
0.63 0.000236646 2.21765e-05 0.000378788
0.7 0.000216027 2.30134e-05 0.000378788
0.84 0.000184196 2.468e-05 0.000378788
1.12 0.000142607 2.7985e-05 0.000378788
1.4 0.000116505 3.12436e-05 0.000378788
1.68 0 0.00013299 0.000378788
END DIST

Metal 2 UNDER 5
DIST count 12 width 0.14
0.14 0.000833899 1.39455e-05 0.000378788
0.28 0.00046858 1.54649e-05 0.000378788
0.35 0.000389231 1.62232e-05 0.000378788
0.42 0.000334125 1.69803e-05 0.000378788
0.49 0.000293354 1.77366e-05 0.000378788
0.56 0.000261826 1.84916e-05 0.000378788
0.63 0.000236646 1.92453e-05 0.000378788
0.7 0.000216027 1.99968e-05 0.000378788
0.84 0.000184196 2.14941e-05 0.000378788
1.12 0.000142607 2.44645e-05 0.000378788
1.4 0.000116505 2.7392e-05 0.000378788
1.68 0 0.000128814 0.000378788
END DIST

Metal 2 UNDER 6
DIST count 12 width 0.14
0.14 0.000833899 7.96688e-06 0.000378788
0.28 0.00046858 9.42385e-06 0.000378788
0.35 0.000389231 1.01512e-05 0.000378788
0.42 0.000334125 1.08774e-05 0.000378788
0.49 0.000293354 1.16024e-05 0.000378788
0.56 0.000261826 1.2326e-05 0.000378788
0.63 0.000236646 1.30484e-05 0.000378788
0.7 0.000216027 1.37692e-05 0.000378788
0.84 0.000184196 1.52054e-05 0.000378788
1.12 0.000142607 1.80529e-05 0.000378788
1.4 0.000116505 2.08604e-05 0.000378788
1.68 0 0.000122163 0.000378788
END DIST

Metal 2 DIAGUNDER
WIDTH Table 1 entries:  0.14

Metal 2 DIAGUNDER 3
DIST count 13 width 0.14
0 0 1.53055e-05 0.000378788
0.14 0 1.23994e-05 0.000378788
0.28 0 1.22226e-05 0.000378788
0.35 0 1.2108e-05 0.000378788
0.42 0 1.19955e-05 0.000378788
0.49 0 1.1885e-05 0.000378788
0.56 0 1.17766e-05 0.000378788
0.63 0 1.16702e-05 0.000378788
0.7 0 1.15148e-05 0.000378788
0.84 0 5.70606e-06 0.000378788
1.12 0 0 0.000378788
1.4 0 0 0.000378788
1.68 0 0 0.000378788
END DIST

Metal 2 DIAGUNDER 4
DIST count 13 width 0.14
0 0 3.07612e-05 0.000378788
0.14 0 1.1878e-05 0.000378788
0.28 0 1.17156e-05 0.000378788
0.35 0 1.16102e-05 0.000378788
0.42 0 1.15068e-05 0.000378788
0.49 0 1.14051e-05 0.000378788
0.56 0 5.67735e-06 0.000378788
0.63 0 0 0.000378788
0.7 0 0 0.000378788
0.84 0 0 0.000378788
1.12 0 0 0.000378788
1.4 0 0 0.000378788
1.68 0 0 0.000378788
END DIST

Metal 2 DIAGUNDER 5
DIST count 13 width 0.14
0 0 2.25031e-05 0.000378788
0.14 0 1.1878e-05 0.000378788
0.28 0 1.17156e-05 0.000378788
0.35 0 1.16102e-05 0.000378788
0.42 0 1.15068e-05 0.000378788
0.49 0 1.14051e-05 0.000378788
0.56 0 5.67735e-06 0.000378788
0.63 0 0 0.000378788
0.7 0 0 0.000378788
0.84 0 0 0.000378788
1.12 0 0 0.000378788
1.4 0 0 0.000378788
1.68 0 0 0.000378788
END DIST

Metal 2 DIAGUNDER 6
DIST count 13 width 0.14
0 0 1.24725e-05 0.000378788
0.14 0 0 0.000378788
0.28 0 0 0.000378788
0.35 0 0 0.000378788
0.42 0 0 0.000378788
0.49 0 0 0.000378788
0.56 0 0 0.000378788
0.63 0 0 0.000378788
0.7 0 0 0.000378788
0.84 0 0 0.000378788
1.12 0 0 0.000378788
1.4 0 0 0.000378788
1.68 0 0 0.000378788
END DIST

Metal 2 OVERUNDER
WIDTH Table 1 entries:  0.14

Metal 2 OVER 1 UNDER 3
DIST count 12 width 0.14
0.14 0.000833965 4.80108e-05 0.000378788
0.28 0.000468585 5.08926e-05 0.000378788
0.35 0.000389231 5.23287e-05 0.000378788
0.42 0.000334125 5.3758e-05 0.000378788
0.49 0.000293368 5.51803e-05 0.000378788
0.56 0.000261869 5.65935e-05 0.000378788
0.63 0.000236707 5.80062e-05 0.000378788
0.7 0.000216061 5.94328e-05 0.000378788
0.84 0.000184234 6.22447e-05 0.000378788
1.12 0.00014263 6.78185e-05 0.000378788
1.4 0.000116505 7.33174e-05 0.000378788
1.68 0 0.000177259 0.000378788
END DIST

Metal 2 OVER 1 UNDER 4
DIST count 12 width 0.14
0.14 0.000834032 3.95801e-05 0.000378788
0.28 0.000468651 4.23661e-05 0.000378788
0.35 0.000389297 4.37549e-05 0.000378788
0.42 0.000334192 4.51411e-05 0.000378788
0.49 0.000293434 4.65238e-05 0.000378788
0.56 0.000261935 4.79038e-05 0.000378788
0.63 0.000236774 4.92801e-05 0.000378788
0.7 0.000216127 5.06597e-05 0.000378788
0.84 0.000184301 5.33996e-05 0.000378788
1.12 0.000142697 5.88359e-05 0.000378788
1.4 0.000116571 6.41967e-05 0.000378788
1.68 0 0.000168074 0.000378788
END DIST

Metal 2 OVER 1 UNDER 5
DIST count 12 width 0.14
0.14 0.000834032 3.72471e-05 0.000378788
0.28 0.000468647 3.99181e-05 0.000378788
0.35 4.10518e-05 3.18535e-06 0.000378788
0.42 0.000334192 4.13541e-05 0.000378788
0.49 0.00029342 4.26529e-05 0.000378788
0.56 0.000261893 4.39504e-05 0.000378788
0.63 0.000236712 4.52434e-05 0.000378788
0.7 0.000216094 4.65353e-05 0.000378788
0.84 0.000184263 4.91063e-05 0.000378788
1.12 0.000142673 5.42067e-05 0.000378788
1.4 0.000116571 5.92343e-05 0.000378788
1.68 0 -1.37223 0.000378788
END DIST

Metal 2 OVER 1 UNDER 6
DIST count 12 width 0.14
0.14 0.000833965 3.01605e-05 0.000378788
0.28 0.00046858 3.27159e-05 0.000378788
0.35 0.000389231 3.39877e-05 0.000378788
0.42 0.000334125 3.52568e-05 0.000378788
0.49 0.000293354 3.65244e-05 0.000378788
0.56 0.000261826 3.77905e-05 0.000378788
0.63 0.000236646 3.90521e-05 0.000378788
0.7 0.000216027 4.03133e-05 0.000378788
0.84 0.000184196 4.28233e-05 0.000378788
1.12 0.000142607 4.78007e-05 0.000378788
1.4 0.000116505 5.27083e-05 0.000378788
1.68 0 0.000156076 0.000378788
END DIST

Metal 3 RESOVER
WIDTH Table 1 entries:  0.14

Metal 3 RESOVER 0
DIST count 55 width 0.14
0 0 0 0.000757576
0 0.32 0 0.000757576
0 0.46 0 0.000757576
0 0.71 0 0.000757576
0 0.78 0 0.000757576
0 0.92 0 0.000757576
0 1.17 0 0.000757576
0 1.24 0 0.000757576
0 1.38 0 0.000757576
0 1.84 0 0.000757576
0.32 0.32 0 0.000757576
0.32 0.46 0 0.000757576
0.32 0.71 0 0.000757576
0.32 0.78 0 0.000757576
0.32 0.92 0 0.000757576
0.32 1.17 0 0.000757576
0.32 1.24 0 0.000757576
0.32 1.38 0 0.000757576
0.32 1.84 0 0.000757576
0.46 0.46 0 0.000757576
0.46 0.71 0 0.000757576
0.46 0.78 0 0.000757576
0.46 0.92 0 0.000757576
0.46 1.17 0 0.000757576
0.46 1.24 0 0.000757576
0.46 1.38 0 0.000757576
0.46 1.84 0 0.000757576
0.71 0.71 0 0.000757576
0.71 0.78 0 0.000757576
0.71 0.92 0 0.000757576
0.71 1.17 0 0.000757576
0.71 1.24 0 0.000757576
0.71 1.38 0 0.000757576
0.71 1.84 0 0.000757576
0.78 0.78 0 0.000757576
0.78 0.92 0 0.000757576
0.78 1.17 0 0.000757576
0.78 1.24 0 0.000757576
0.78 1.38 0 0.000757576
0.78 1.84 0 0.000757576
0.92 0.92 0 0.000757576
0.92 1.17 0 0.000757576
0.92 1.24 0 0.000757576
0.92 1.38 0 0.000757576
0.92 1.84 0 0.000757576
1.17 1.17 0 0.000757576
1.17 1.24 0 0.000757576
1.17 1.38 0 0.000757576
1.17 1.84 0 0.000757576
1.24 1.24 0 0.000757576
1.24 1.38 0 0.000757576
1.24 1.84 0 0.000757576
1.38 1.38 0 0.000757576
1.38 1.84 0 0.000757576
1.84 0 1.84 0.000757576
END DIST

Metal 3 RESOVER 1
DIST count 0 width 0.14
END DIST

Metal 3 RESOVER 2
DIST count 0 width 0.14
END DIST

Metal 3 OVER
WIDTH Table 1 entries:  0.14

Metal 3 OVER 0
DIST count 12 width 0.14
0.14 0.000884156 3.78838e-06 0.000378788
0.28 0.000494068 4.6982e-06 0.000378788
0.35 0.000410659 5.1522e-06 0.000378788
0.42 0.000353011 5.60552e-06 0.000378788
0.49 0.00031047 6.05801e-06 0.000378788
0.56 0.000277616 6.50963e-06 0.000378788
0.63 0.000251384 6.96028e-06 0.000378788
0.7 0.000229897 7.40988e-06 0.000378788
0.84 0.000196683 8.30556e-06 0.000378788
1.12 0.000153132 1.00805e-05 0.000378788
1.4 0.000125647 1.18292e-05 0.000378788
1.68 0 0.000120185 0.000378788
END DIST

Metal 3 OVER 1
DIST count 12 width 0.14
0.14 0.000884156 1.27603e-05 0.000378788
0.28 0.000494068 1.41974e-05 0.000378788
0.35 0.000410659 1.4915e-05 0.000378788
0.42 0.000353011 1.56315e-05 0.000378788
0.49 0.00031047 1.63461e-05 0.000378788
0.56 0.000277616 1.70598e-05 0.000378788
0.63 0.000251384 1.7771e-05 0.000378788
0.7 0.000229897 1.84811e-05 0.000378788
0.84 0.000196683 1.98959e-05 0.000378788
1.12 0.000153132 2.26996e-05 0.000378788
1.4 0.000125647 2.54631e-05 0.000378788
1.68 0 0.000134814 0.000378788
END DIST

Metal 3 OVER 2
DIST count 12 width 0.14
0.14 0.000884156 1.86933e-05 0.000378788
0.28 0.000494068 2.00343e-05 0.000378788
0.35 0.000410659 2.07027e-05 0.000378788
0.42 0.000353011 2.13699e-05 0.000378788
0.49 0.00031047 2.2038e-05 0.000378788
0.56 0.000277616 2.27021e-05 0.000378788
0.63 0.000251384 2.33665e-05 0.000378788
0.7 0.000229897 2.40287e-05 0.000378788
0.84 0.000196683 2.53486e-05 0.000378788
1.12 0.000153132 2.79637e-05 0.000378788
1.4 0.000125647 3.05405e-05 0.000378788
1.68 0 0.000139709 0.000378788
END DIST

Metal 3 UNDER
WIDTH Table 1 entries:  0.14

Metal 3 UNDER 4
DIST count 12 width 0.14
0.14 0.000884156 2.79694e-05 0.000378788
0.28 0.000494068 3.00999e-05 0.000378788
0.35 0.000410659 3.1164e-05 0.000378788
0.42 0.000353011 3.22253e-05 0.000378788
0.49 0.00031047 3.32851e-05 0.000378788
0.56 0.000277616 3.43427e-05 0.000378788
0.63 0.000251384 3.5398e-05 0.000378788
0.7 0.000229897 3.64506e-05 0.000378788
0.84 0.000196683 3.85488e-05 0.000378788
1.12 0.000153132 4.2705e-05 0.000378788
1.4 0.000125647 4.68004e-05 0.000378788
1.68 0 0.000157461 0.000378788
END DIST

Metal 3 UNDER 5
DIST count 12 width 0.14
0.14 0.000884156 1.66557e-05 0.000378788
0.28 0.000494068 1.81788e-05 0.000378788
0.35 0.000410659 1.89389e-05 0.000378788
0.42 0.000353011 1.96984e-05 0.000378788
0.49 0.00031047 2.04557e-05 0.000378788
0.56 0.000277616 2.1212e-05 0.000378788
0.63 0.000251384 2.19668e-05 0.000378788
0.7 0.000229897 2.27196e-05 0.000378788
0.84 0.000196683 2.42194e-05 0.000378788
1.12 0.000153132 2.71913e-05 0.000378788
1.4 0.000125647 3.01197e-05 0.000378788
1.68 0 0.000139633 0.000378788
END DIST

Metal 3 UNDER 6
DIST count 12 width 0.14
0.14 0.000884156 8.33838e-06 0.000378788
0.28 0.000494068 9.71537e-06 0.000378788
0.35 0.000410659 1.04024e-05 0.000378788
0.42 0.000353011 1.10885e-05 0.000378788
0.49 0.00031047 1.17732e-05 0.000378788
0.56 0.000277616 1.24567e-05 0.000378788
0.63 0.000251384 1.31387e-05 0.000378788
0.7 0.000229897 1.38191e-05 0.000378788
0.84 0.000196683 1.51747e-05 0.000378788
1.12 0.000153132 1.78607e-05 0.000378788
1.4 0.000125647 2.05073e-05 0.000378788
1.68 0 0.000129745 0.000378788
END DIST

Metal 3 DIAGUNDER
WIDTH Table 1 entries:  0.14

Metal 3 DIAGUNDER 4
DIST count 13 width 0.14
0 0 5.70672e-05 0.000378788
0.14 0 0 0.000378788
0.28 0 0 0.000378788
0.35 0 0 0.000378788
0.42 0 0 0.000378788
0.49 0 0 0.000378788
0.56 0 0 0.000378788
0.63 0 0 0.000378788
0.7 0 0 0.000378788
0.84 0 0 0.000378788
1.12 0 0 0.000378788
1.4 0 0 0.000378788
1.68 0 0 0.000378788
END DIST

Metal 3 DIAGUNDER 5
DIST count 13 width 0.14
0 0 2.54305e-05 0.000378788
0.14 0 0 0.000378788
0.28 0 0 0.000378788
0.35 0 0 0.000378788
0.42 0 0 0.000378788
0.49 0 0 0.000378788
0.56 0 0 0.000378788
0.63 0 0 0.000378788
0.7 0 0 0.000378788
0.84 0 0 0.000378788
1.12 0 0 0.000378788
1.4 0 0 0.000378788
1.68 0 0 0.000378788
END DIST

Metal 3 DIAGUNDER 6
DIST count 13 width 0.14
0 0 1.74521e-05 0.000378788
0.14 0 0 0.000378788
0.28 0 0 0.000378788
0.35 0 0 0.000378788
0.42 0 0 0.000378788
0.49 0 0 0.000378788
0.56 0 0 0.000378788
0.63 0 0 0.000378788
0.7 0 0 0.000378788
0.84 0 0 0.000378788
1.12 0 0 0.000378788
1.4 0 0 0.000378788
1.68 0 0 0.000378788
END DIST

Metal 3 OVERUNDER
WIDTH Table 1 entries:  0.14

Metal 3 OVER 1 UNDER 4
DIST count 12 width 0.14
0.14 0.000884156 3.69413e-05 0.000378788
0.28 0.000494068 3.95991e-05 0.000378788
0.35 0.000410659 4.09269e-05 0.000378788
0.42 0.000353011 4.22513e-05 0.000378788
0.49 0.00031047 4.35733e-05 0.000378788
0.56 0.000277616 4.4893e-05 0.000378788
0.63 0.000251384 4.62088e-05 0.000378788
0.7 0.000229897 4.75218e-05 0.000378788
0.84 0.000196683 5.01392e-05 0.000378788
1.12 0.000153132 5.53242e-05 0.000378788
1.4 0.000125647 6.04343e-05 0.000378788
1.68 0 0.00017209 0.000378788
END DIST

Metal 3 OVER 1 UNDER 5
DIST count 12 width 0.14
0.14 0.000884156 2.56276e-05 0.000378788
0.28 0.000494068 2.7678e-05 0.000378788
0.35 0.000410659 2.87018e-05 0.000378788
0.42 0.000353011 2.97244e-05 0.000378788
0.49 0.00031047 3.07438e-05 0.000378788
0.56 0.000277616 3.17622e-05 0.000378788
0.63 0.000251384 3.27776e-05 0.000378788
0.7 0.000229897 3.37907e-05 0.000378788
0.84 0.000196683 3.58098e-05 0.000378788
1.12 0.000153132 3.98105e-05 0.000378788
1.4 0.000125647 4.37535e-05 0.000378788
1.68 0 0.000154262 0.000378788
END DIST

Metal 3 OVER 1 UNDER 6
DIST count 12 width 0.14
0.14 0.000884156 1.73103e-05 0.000378788
0.28 0.000494068 1.92146e-05 0.000378788
0.35 0.000410659 2.01653e-05 0.000378788
0.42 0.000353011 2.11145e-05 0.000378788
0.49 0.00031047 2.20614e-05 0.000378788
0.56 0.000277616 2.3007e-05 0.000378788
0.63 0.000251384 2.39495e-05 0.000378788
0.7 0.000229897 2.48903e-05 0.000378788
0.84 0.000196683 2.67651e-05 0.000378788
1.12 0.000153132 3.04798e-05 0.000378788
1.4 0.000125647 3.41411e-05 0.000378788
1.68 0 0.000144374 0.000378788
END DIST

Metal 3 OVER 2 UNDER 4
DIST count 12 width 0.14
0.14 0.000884156 4.28743e-05 0.000378788
0.28 0.000494068 4.54361e-05 0.000378788
0.35 0.000410659 4.67145e-05 0.000378788
0.42 0.000353011 4.79897e-05 0.000378788
0.49 0.00031047 4.92651e-05 0.000378788
0.56 0.000277616 5.05352e-05 0.000378788
0.63 0.000251384 5.18042e-05 0.000378788
0.7 0.000229897 5.30694e-05 0.000378788
0.84 0.000196683 5.55919e-05 0.000378788
1.12 0.000153132 6.05882e-05 0.000378788
1.4 0.000125647 6.55118e-05 0.000378788
1.68 0 0.000176984 0.000378788
END DIST

Metal 3 OVER 2 UNDER 5
DIST count 12 width 0.14
0.14 0.000884156 3.15606e-05 0.000378788
0.28 0.000494068 3.35149e-05 0.000378788
0.35 0.000410659 3.44894e-05 0.000378788
0.42 0.000353011 3.54628e-05 0.000378788
0.49 0.00031047 3.64357e-05 0.000378788
0.56 0.000277616 3.74045e-05 0.000378788
0.63 0.000251384 3.8373e-05 0.000378788
0.7 0.000229897 3.93384e-05 0.000378788
0.84 0.000196683 4.12625e-05 0.000378788
1.12 0.000153132 4.50745e-05 0.000378788
1.4 0.000125647 4.8831e-05 0.000378788
1.68 0 0.000159157 0.000378788
END DIST

Metal 3 OVER 2 UNDER 6
DIST count 12 width 0.14
0.14 0.000884156 2.32433e-05 0.000378788
0.28 0.000494068 2.50515e-05 0.000378788
0.35 0.000410659 2.59529e-05 0.000378788
0.42 0.000353011 2.68529e-05 0.000378788
0.49 0.00031047 2.77532e-05 0.000378788
0.56 0.000277616 2.86492e-05 0.000378788
0.63 0.000251384 2.95449e-05 0.000378788
0.7 0.000229897 3.0438e-05 0.000378788
0.84 0.000196683 3.22178e-05 0.000378788
1.12 0.000153132 3.57438e-05 0.000378788
1.4 0.000125647 3.92186e-05 0.000378788
1.68 0 0.000149268 0.000378788
END DIST

Metal 4 RESOVER
WIDTH Table 1 entries:  0.3

Metal 4 RESOVER 0
DIST count 55 width 0.3
0 0 0 0.000127946
0 0.38 0 0.000127946
0 0.68 0 0.000127946
0 0.91 0 0.000127946
0 1.06 0 0.000127946
0 1.36 0 0.000127946
0 1.59 0 0.000127946
0 1.74 0 0.000127946
0 2.04 0 0.000127946
0 2.72 0 0.000127946
0.38 0.38 0 0.000127946
0.38 0.68 0 0.000127946
0.38 0.91 0 0.000127946
0.38 1.06 0 0.000127946
0.38 1.36 0 0.000127946
0.38 1.59 0 0.000127946
0.38 1.74 0 0.000127946
0.38 2.04 0 0.000127946
0.38 2.72 0 0.000127946
0.68 0.68 0 0.000127946
0.68 0.91 0 0.000127946
0.68 1.06 0 0.000127946
0.68 1.36 0 0.000127946
0.68 1.59 0 0.000127946
0.68 1.74 0 0.000127946
0.68 2.04 0 0.000127946
0.68 2.72 0 0.000127946
0.91 0.91 0 0.000127946
0.91 1.06 0 0.000127946
0.91 1.36 0 0.000127946
0.91 1.59 0 0.000127946
0.91 1.74 0 0.000127946
0.91 2.04 0 0.000127946
0.91 2.72 0 0.000127946
1.06 1.06 0 0.000127946
1.06 1.36 0 0.000127946
1.06 1.59 0 0.000127946
1.06 1.74 0 0.000127946
1.06 2.04 0 0.000127946
1.06 2.72 0 0.000127946
1.36 1.36 0 0.000127946
1.36 1.59 0 0.000127946
1.36 1.74 0 0.000127946
1.36 2.04 0 0.000127946
1.36 2.72 0 0.000127946
1.59 1.59 0 0.000127946
1.59 1.74 0 0.000127946
1.59 2.04 0 0.000127946
1.59 2.72 0 0.000127946
1.74 1.74 0 0.000127946
1.74 2.04 0 0.000127946
1.74 2.72 0 0.000127946
2.04 2.04 0 0.000127946
2.04 2.72 0 0.000127946
2.72 0 2.72 0.000127946
END DIST

Metal 4 RESOVER 1
DIST count 0 width 0.3
END DIST

Metal 4 RESOVER 2
DIST count 0 width 0.3
END DIST

Metal 4 RESOVER 3
DIST count 0 width 0.3
END DIST

Metal 4 OVER
WIDTH Table 1 entries:  0.3

Metal 4 OVER 0
DIST count 12 width 0.3
0.3 0.000555432 6.75308e-06 6.39731e-05
0.6 0.000312295 8.92736e-06 6.39731e-05
0.75 0.000259315 1.0006e-05 6.39731e-05
0.9 0.000222495 1.10778e-05 6.39731e-05
1.05 0.000195244 1.21418e-05 6.39731e-05
1.2 0.000174172 1.31971e-05 6.39731e-05
1.35 0.000157346 1.42427e-05 6.39731e-05
1.5 0.000143572 1.52777e-05 6.39731e-05
1.8 0.000122317 1.73125e-05 6.39731e-05
2.4 9.45772e-05 2.12165e-05 6.39731e-05
3 7.71926e-05 2.48552e-05 6.39731e-05
3.6 0 9.34229e-05 6.39731e-05
END DIST

Metal 4 OVER 1
DIST count 12 width 0.3
0.3 0.000555432 2.25161e-05 6.39731e-05
0.6 0.000312295 2.59508e-05 6.39731e-05
0.75 0.000259315 2.7656e-05 6.39731e-05
0.9 0.000222495 2.93493e-05 6.39731e-05
1.05 0.000195244 3.10297e-05 6.39731e-05
1.2 0.000174172 3.26968e-05 6.39731e-05
1.35 0.000157346 3.43475e-05 6.39731e-05
1.5 0.000143572 3.59834e-05 6.39731e-05
1.8 0.000122317 3.91968e-05 6.39731e-05
2.4 9.45772e-05 4.53646e-05 6.39731e-05
3 7.71926e-05 5.11137e-05 6.39731e-05
3.6 0 0.000121608 6.39731e-05
END DIST

Metal 4 OVER 2
DIST count 12 width 0.3
0.3 0.000555432 3.48571e-05 6.39731e-05
0.6 0.000312295 3.8452e-05 6.39731e-05
0.75 0.000259315 4.02361e-05 6.39731e-05
0.9 0.000222495 4.20094e-05 6.39731e-05
1.05 0.000195244 4.3771e-05 6.39731e-05
1.2 0.000174172 4.55177e-05 6.39731e-05
1.35 0.000157346 4.72458e-05 6.39731e-05
1.5 0.000143572 4.89575e-05 6.39731e-05
1.8 0.000122317 5.23236e-05 6.39731e-05
2.4 9.45772e-05 5.87843e-05 6.39731e-05
3 7.71926e-05 6.48029e-05 6.39731e-05
3.6 0 0.000135544 6.39731e-05
END DIST

Metal 4 OVER 3
DIST count 12 width 0.3
0.3 0.000555432 7.19437e-05 6.39731e-05
0.6 0.000312295 7.71287e-05 6.39731e-05
0.75 0.000259315 7.97023e-05 6.39731e-05
0.9 0.000222495 8.22555e-05 6.39731e-05
1.05 0.000195244 8.47929e-05 6.39731e-05
1.2 0.000174172 8.73084e-05 6.39731e-05
1.35 0.000157346 8.98012e-05 6.39731e-05
1.5 0.000143572 9.22699e-05 6.39731e-05
1.8 0.000122317 9.7122e-05 6.39731e-05
2.4 9.45772e-05 0.00010643 6.39731e-05
3 7.71926e-05 0.000115104 6.39731e-05
3.6 0 0.000188272 6.39731e-05
END DIST

Metal 4 UNDER
WIDTH Table 1 entries:  0.3

Metal 4 UNDER 5
DIST count 12 width 0.3
0.3 0.000555432 6.05399e-05 6.39731e-05
0.6 0.000312295 6.52145e-05 6.39731e-05
0.75 0.000259315 6.75339e-05 6.39731e-05
0.9 0.000222495 6.98394e-05 6.39731e-05
1.05 0.000195244 7.2126e-05 6.39731e-05
1.2 0.000174172 7.43951e-05 6.39731e-05
1.35 0.000157346 7.66442e-05 6.39731e-05
1.5 0.000143572 7.88695e-05 6.39731e-05
1.8 0.000122317 8.32444e-05 6.39731e-05
2.4 9.45772e-05 9.16399e-05 6.39731e-05
3 7.71926e-05 9.94638e-05 6.39731e-05
3.6 0 0.000171853 6.39731e-05
END DIST

Metal 4 UNDER 6
DIST count 12 width 0.3
0.3 0.000555432 1.94419e-05 6.39731e-05
0.6 0.000312295 2.3284e-05 6.39731e-05
0.75 0.000259315 2.51899e-05 6.39731e-05
0.9 0.000222495 2.70838e-05 6.39731e-05
1.05 0.000195244 2.89641e-05 6.39731e-05
1.2 0.000174172 3.08286e-05 6.39731e-05
1.35 0.000157346 3.26762e-05 6.39731e-05
1.5 0.000143572 3.45053e-05 6.39731e-05
1.8 0.000122317 3.81007e-05 6.39731e-05
2.4 9.45772e-05 4.49992e-05 6.39731e-05
3 7.71926e-05 5.14289e-05 6.39731e-05
3.6 0 0.000122545 6.39731e-05
END DIST

Metal 4 DIAGUNDER
WIDTH Table 1 entries:  0.3

Metal 4 DIAGUNDER 5
DIST count 13 width 0.3
0 0 2.54636e-05 6.39731e-05
0.3 0 0 6.39731e-05
0.6 0 0 6.39731e-05
0.75 0 0 6.39731e-05
0.9 0 0 6.39731e-05
1.05 0 0 6.39731e-05
1.2 0 0 6.39731e-05
1.35 0 0 6.39731e-05
1.5 0 0 6.39731e-05
1.8 0 0 6.39731e-05
2.4 0 0 6.39731e-05
3 0 0 6.39731e-05
3.6 0 0 6.39731e-05
END DIST

Metal 4 DIAGUNDER 6
DIST count 13 width 0.3
0 0 3.40697e-05 6.39731e-05
0.3 0 0 6.39731e-05
0.6 0 0 6.39731e-05
0.75 0 0 6.39731e-05
0.9 0 0 6.39731e-05
1.05 0 0 6.39731e-05
1.2 0 0 6.39731e-05
1.35 0 0 6.39731e-05
1.5 0 0 6.39731e-05
1.8 0 0 6.39731e-05
2.4 0 0 6.39731e-05
3 0 0 6.39731e-05
3.6 0 0 6.39731e-05
END DIST

Metal 4 OVERUNDER
WIDTH Table 1 entries:  0.3

Metal 4 OVER 1 UNDER 5
DIST count 12 width 0.3
0.3 0.000555432 7.63029e-05 6.39731e-05
0.6 0.000312295 8.22379e-05 6.39731e-05
0.75 0.000259315 8.51839e-05 6.39731e-05
0.9 0.000222495 8.81108e-05 6.39731e-05
1.05 0.000195244 9.10139e-05 6.39731e-05
1.2 0.000174172 9.38948e-05 6.39731e-05
1.35 0.000157346 9.6749e-05 6.39731e-05
1.5 0.000143572 9.95752e-05 6.39731e-05
1.8 0.000122317 0.000105129 6.39731e-05
2.4 9.45772e-05 0.000115788 6.39731e-05
3 7.71926e-05 0.000125722 6.39731e-05
3.6 0 0.000200038 6.39731e-05
END DIST

Metal 4 OVER 1 UNDER 6
DIST count 12 width 0.3
0.3 0.000555432 3.52049e-05 6.39731e-05
0.6 0.000312295 4.03074e-05 6.39731e-05
0.75 0.000259315 4.28399e-05 6.39731e-05
0.9 0.000222495 4.53553e-05 6.39731e-05
1.05 0.000195244 4.78519e-05 6.39731e-05
1.2 0.000174172 5.03283e-05 6.39731e-05
1.35 0.000157346 5.27811e-05 6.39731e-05
1.5 0.000143572 5.52109e-05 6.39731e-05
1.8 0.000122317 5.99851e-05 6.39731e-05
2.4 9.45772e-05 6.91473e-05 6.39731e-05
3 7.71926e-05 7.76873e-05 6.39731e-05
3.6 0 0.00015073 6.39731e-05
END DIST

Metal 4 OVER 2 UNDER 5
DIST count 12 width 0.3
0.3 0.000555432 8.8644e-05 6.39731e-05
0.6 0.000312295 9.47391e-05 6.39731e-05
0.75 0.000259315 9.7764e-05 6.39731e-05
0.9 0.000222495 0.000100771 6.39731e-05
1.05 0.000195244 0.000103755 6.39731e-05
1.2 0.000174172 0.000106716 6.39731e-05
1.35 0.000157346 0.000109647 6.39731e-05
1.5 0.000143572 0.000112549 6.39731e-05
1.8 0.000122317 0.000118255 6.39731e-05
2.4 9.45772e-05 0.000129208 6.39731e-05
3 7.71926e-05 0.000139411 6.39731e-05
3.6 0 0.000213974 6.39731e-05
END DIST

Metal 4 OVER 2 UNDER 6
DIST count 12 width 0.3
0.3 0.000555432 4.7546e-05 6.39731e-05
0.6 0.000312295 5.28086e-05 6.39731e-05
0.75 0.000259315 5.542e-05 6.39731e-05
0.9 0.000222495 5.80154e-05 6.39731e-05
1.05 0.000195244 6.05932e-05 6.39731e-05
1.2 0.000174172 6.31492e-05 6.39731e-05
1.35 0.000157346 6.56794e-05 6.39731e-05
1.5 0.000143572 6.81851e-05 6.39731e-05
1.8 0.000122317 7.31119e-05 6.39731e-05
2.4 9.45772e-05 8.2567e-05 6.39731e-05
3 7.71926e-05 9.13765e-05 6.39731e-05
3.6 0 0.000164667 6.39731e-05
END DIST

Metal 4 OVER 3 UNDER 5
DIST count 12 width 0.3
0.3 0.000555432 0.000125731 6.39731e-05
0.6 0.000312295 0.000133416 6.39731e-05
0.75 0.000259315 0.00013723 6.39731e-05
0.9 0.000222495 0.000141017 6.39731e-05
1.05 0.000195244 0.000144777 6.39731e-05
1.2 0.000174172 0.000148506 6.39731e-05
1.35 0.000157346 0.000152203 6.39731e-05
1.5 0.000143572 0.000155862 6.39731e-05
1.8 0.000122317 0.000163054 6.39731e-05
2.4 9.45772e-05 0.000176853 6.39731e-05
3 7.71926e-05 0.000189712 6.39731e-05
3.6 0 0.000266703 6.39731e-05
END DIST

Metal 4 OVER 3 UNDER 6
DIST count 12 width 0.3
0.3 0.000555432 8.46326e-05 6.39731e-05
0.6 0.000312295 9.14853e-05 6.39731e-05
0.75 0.000259315 9.48862e-05 6.39731e-05
0.9 0.000222495 9.82614e-05 6.39731e-05
1.05 0.000195244 0.000101615 6.39731e-05
1.2 0.000174172 0.00010494 6.39731e-05
1.35 0.000157346 0.000108235 6.39731e-05
1.5 0.000143572 0.000111498 6.39731e-05
1.8 0.000122317 0.00011791 6.39731e-05
2.4 9.45772e-05 0.000130212 6.39731e-05
3 7.71926e-05 0.000141678 6.39731e-05
3.6 0 0.000217395 6.39731e-05
END DIST

Metal 5 RESOVER
WIDTH Table 1 entries:  0.3

Metal 5 RESOVER 0
DIST count 55 width 0.3
0 0 0 0.000127946
0 0.62 0 0.000127946
0 0.92 0 0.000127946
0 1.39 0 0.000127946
0 1.54 0 0.000127946
0 1.84 0 0.000127946
0 2.31 0 0.000127946
0 2.46 0 0.000127946
0 2.76 0 0.000127946
0 3.68 0 0.000127946
0.62 0.62 0 0.000127946
0.62 0.92 0 0.000127946
0.62 1.39 0 0.000127946
0.62 1.54 0 0.000127946
0.62 1.84 0 0.000127946
0.62 2.31 0 0.000127946
0.62 2.46 0 0.000127946
0.62 2.76 0 0.000127946
0.62 3.68 0 0.000127946
0.92 0.92 0 0.000127946
0.92 1.39 0 0.000127946
0.92 1.54 0 0.000127946
0.92 1.84 0 0.000127946
0.92 2.31 0 0.000127946
0.92 2.46 0 0.000127946
0.92 2.76 0 0.000127946
0.92 3.68 0 0.000127946
1.39 1.39 0 0.000127946
1.39 1.54 0 0.000127946
1.39 1.84 0 0.000127946
1.39 2.31 0 0.000127946
1.39 2.46 0 0.000127946
1.39 2.76 0 0.000127946
1.39 3.68 0 0.000127946
1.54 1.54 0 0.000127946
1.54 1.84 0 0.000127946
1.54 2.31 0 0.000127946
1.54 2.46 0 0.000127946
1.54 2.76 0 0.000127946
1.54 3.68 0 0.000127946
1.84 1.84 0 0.000127946
1.84 2.31 0 0.000127946
1.84 2.46 0 0.000127946
1.84 2.76 0 0.000127946
1.84 3.68 0 0.000127946
2.31 2.31 0 0.000127946
2.31 2.46 0 0.000127946
2.31 2.76 0 0.000127946
2.31 3.68 0 0.000127946
2.46 2.46 0 0.000127946
2.46 2.76 0 0.000127946
2.46 3.68 0 0.000127946
2.76 2.76 0 0.000127946
2.76 3.68 0 0.000127946
3.68 0 3.68 0.000127946
END DIST

Metal 5 RESOVER 1
DIST count 0 width 0.3
END DIST

Metal 5 RESOVER 2
DIST count 0 width 0.3
END DIST

Metal 5 RESOVER 3
DIST count 0 width 0.3
END DIST

Metal 5 RESOVER 4
DIST count 0 width 0.3
END DIST

Metal 5 OVER
WIDTH Table 1 entries:  0.3

Metal 5 OVER 0
DIST count 12 width 0.3
0.3 0.000564893 6.64423e-06 6.39731e-05
0.6 0.000316187 8.63677e-06 6.39731e-05
0.75 0.000262809 9.62423e-06 6.39731e-05
0.9 0.00022587 1.06047e-05 6.39731e-05
1.05 0.000198589 1.15772e-05 6.39731e-05
1.2 0.000177511 1.25411e-05 6.39731e-05
1.35 0.000160676 1.34954e-05 6.39731e-05
1.5 0.000146887 1.44393e-05 6.39731e-05
1.8 0.000125574 1.62928e-05 6.39731e-05
2.4 9.7645e-05 1.98397e-05 6.39731e-05
3 8.00391e-05 2.3133e-05 6.39731e-05
3.6 0 9.4003e-05 6.39731e-05
END DIST

Metal 5 OVER 1
DIST count 12 width 0.3
0.3 0.000564893 1.83556e-05 6.39731e-05
0.6 0.000316187 2.14556e-05 6.39731e-05
0.75 0.000262809 2.29932e-05 6.39731e-05
0.9 0.00022587 2.45189e-05 6.39731e-05
1.05 0.000198589 2.60318e-05 6.39731e-05
1.2 0.000177511 2.75314e-05 6.39731e-05
1.35 0.000160676 2.90171e-05 6.39731e-05
1.5 0.000146887 3.04859e-05 6.39731e-05
1.8 0.000125574 3.33705e-05 6.39731e-05
2.4 9.7645e-05 3.88886e-05 6.39731e-05
3 8.00391e-05 4.40146e-05 6.39731e-05
3.6 0 0.00011655 6.39731e-05
END DIST

Metal 5 OVER 2
DIST count 12 width 0.3
0.3 0.000564893 2.65997e-05 6.39731e-05
0.6 0.000316187 2.97949e-05 6.39731e-05
0.75 0.000262809 3.13789e-05 6.39731e-05
0.9 0.00022587 3.2952e-05 6.39731e-05
1.05 0.000198589 3.45136e-05 6.39731e-05
1.2 0.000177511 3.60603e-05 6.39731e-05
1.35 0.000160676 3.75888e-05 6.39731e-05
1.5 0.000146887 3.91038e-05 6.39731e-05
1.8 0.000125574 4.20774e-05 6.39731e-05
2.4 9.7645e-05 4.77677e-05 6.39731e-05
3 8.00391e-05 5.30499e-05 6.39731e-05
3.6 0 0.000125729 6.39731e-05
END DIST

Metal 5 OVER 3
DIST count 12 width 0.3
0.3 0.000564893 3.71912e-05 6.39731e-05
0.6 0.000316187 4.0895e-05 6.39731e-05
0.75 0.000262809 4.27288e-05 6.39731e-05
0.9 0.00022587 4.45512e-05 6.39731e-05
1.05 0.000198589 4.63589e-05 6.39731e-05
1.2 0.000177511 4.8151e-05 6.39731e-05
1.35 0.000160676 4.99244e-05 6.39731e-05
1.5 0.000146887 5.16783e-05 6.39731e-05
1.8 0.000125574 5.5122e-05 6.39731e-05
2.4 9.7645e-05 6.17151e-05 6.39731e-05
3 8.00391e-05 6.78352e-05 6.39731e-05
3.6 0 0.000141274 6.39731e-05
END DIST

Metal 5 OVER 4
DIST count 12 width 0.3
0.3 0.000564893 4.78203e-05 6.39731e-05
0.6 0.000316187 5.29292e-05 6.39731e-05
0.75 0.000262809 5.54602e-05 6.39731e-05
0.9 0.00022587 5.79739e-05 6.39731e-05
1.05 0.000198589 6.04684e-05 6.39731e-05
1.2 0.000177511 6.29387e-05 6.39731e-05
1.35 0.000160676 6.53856e-05 6.39731e-05
1.5 0.000146887 6.78053e-05 6.39731e-05
1.8 0.000125574 7.2557e-05 6.39731e-05
2.4 9.7645e-05 8.16518e-05 6.39731e-05
3 8.00391e-05 9.00947e-05 6.39731e-05
3.6 0 0.000165646 6.39731e-05
END DIST

Metal 5 UNDER
WIDTH Table 1 entries:  0.3

Metal 5 UNDER 6
DIST count 12 width 0.3
0.3 0.000564893 3.34286e-05 6.39731e-05
0.6 0.000316187 3.81753e-05 6.39731e-05
0.75 0.000262809 4.05276e-05 6.39731e-05
0.9 0.00022587 4.28634e-05 6.39731e-05
1.05 0.000198589 4.51802e-05 6.39731e-05
1.2 0.000177511 4.74763e-05 6.39731e-05
1.35 0.000160676 4.97498e-05 6.39731e-05
1.5 0.000146887 5.19983e-05 6.39731e-05
1.8 0.000125574 5.64136e-05 6.39731e-05
2.4 9.7645e-05 6.48635e-05 6.39731e-05
3 8.00391e-05 7.27085e-05 6.39731e-05
3.6 0 0.000147716 6.39731e-05
END DIST

Metal 5 DIAGUNDER
WIDTH Table 1 entries:  0.3

Metal 5 DIAGUNDER 6
DIST count 13 width 0.3
0 0 6.81606e-05 6.39731e-05
0.3 0 0 6.39731e-05
0.6 0 0 6.39731e-05
0.75 0 0 6.39731e-05
0.9 0 0 6.39731e-05
1.05 0 0 6.39731e-05
1.2 0 0 6.39731e-05
1.35 0 0 6.39731e-05
1.5 0 0 6.39731e-05
1.8 0 0 6.39731e-05
2.4 0 0 6.39731e-05
3 0 0 6.39731e-05
3.6 0 0 6.39731e-05
END DIST

Metal 5 OVERUNDER
WIDTH Table 1 entries:  0.3

Metal 5 OVER 1 UNDER 6
DIST count 12 width 0.3
0.3 0.000564893 4.51401e-05 6.39731e-05
0.6 0.000316187 5.09941e-05 6.39731e-05
0.75 0.000262809 5.38966e-05 6.39731e-05
0.9 0.00022587 5.67776e-05 6.39731e-05
1.05 0.000198589 5.96348e-05 6.39731e-05
1.2 0.000177511 6.24666e-05 6.39731e-05
1.35 0.000160676 6.52715e-05 6.39731e-05
1.5 0.000146887 6.80449e-05 6.39731e-05
1.8 0.000125574 7.34914e-05 6.39731e-05
2.4 9.7645e-05 8.39123e-05 6.39731e-05
3 8.00391e-05 9.35901e-05 6.39731e-05
3.6 0 0.000170264 6.39731e-05
END DIST

Metal 5 OVER 2 UNDER 6
DIST count 12 width 0.3
0.3 0.000564893 5.33841e-05 6.39731e-05
0.6 0.000316187 5.93334e-05 6.39731e-05
0.75 0.000262809 6.22823e-05 6.39731e-05
0.9 0.00022587 6.52108e-05 6.39731e-05
1.05 0.000198589 6.81166e-05 6.39731e-05
1.2 0.000177511 7.09956e-05 6.39731e-05
1.35 0.000160676 7.38431e-05 6.39731e-05
1.5 0.000146887 7.66628e-05 6.39731e-05
1.8 0.000125574 8.21982e-05 6.39731e-05
2.4 9.7645e-05 9.27914e-05 6.39731e-05
3 8.00391e-05 0.000102625 6.39731e-05
3.6 0 0.000179443 6.39731e-05
END DIST

Metal 5 OVER 3 UNDER 6
DIST count 12 width 0.3
0.3 0.000564893 6.39756e-05 6.39731e-05
0.6 0.000316187 7.04335e-05 6.39731e-05
0.75 0.000262809 7.36322e-05 6.39731e-05
0.9 0.00022587 7.681e-05 6.39731e-05
1.05 0.000198589 7.99619e-05 6.39731e-05
1.2 0.000177511 8.30863e-05 6.39731e-05
1.35 0.000160676 8.61788e-05 6.39731e-05
1.5 0.000146887 8.92373e-05 6.39731e-05
1.8 0.000125574 9.52429e-05 6.39731e-05
2.4 9.7645e-05 0.000106739 6.39731e-05
3 8.00391e-05 0.000117411 6.39731e-05
3.6 0 0.000194988 6.39731e-05
END DIST

Metal 5 OVER 4 UNDER 6
DIST count 12 width 0.3
0.3 0.000564893 7.46047e-05 6.39731e-05
0.6 0.000316187 8.24677e-05 6.39731e-05
0.75 0.000262809 8.63636e-05 6.39731e-05
0.9 0.00022587 9.02327e-05 6.39731e-05
1.05 0.000198589 9.40714e-05 6.39731e-05
1.2 0.000177511 9.78739e-05 6.39731e-05
1.35 0.000160676 0.00010164 6.39731e-05
1.5 0.000146887 0.000105364 6.39731e-05
1.8 0.000125574 0.000112678 6.39731e-05
2.4 9.7645e-05 0.000126676 6.39731e-05
3 8.00391e-05 0.00013967 6.39731e-05
3.6 0 0.00021936 6.39731e-05
END DIST

Metal 6 RESOVER
WIDTH Table 1 entries:  1.6

Metal 6 RESOVER 0
DIST count 55 width 1.6
0 0 0 1.32576e-05
0 1.8 0 1.32576e-05
0 3.4 0 1.32576e-05
0 4.4 0 1.32576e-05
0 5.2 0 1.32576e-05
0 6.8 0 1.32576e-05
0 7.8 0 1.32576e-05
0 8.6 0 1.32576e-05
0 10.2 0 1.32576e-05
0 13.6 0 1.32576e-05
1.8 1.8 0 1.32576e-05
1.8 3.4 0 1.32576e-05
1.8 4.4 0 1.32576e-05
1.8 5.2 0 1.32576e-05
1.8 6.8 0 1.32576e-05
1.8 7.8 0 1.32576e-05
1.8 8.6 0 1.32576e-05
1.8 10.2 0 1.32576e-05
1.8 13.6 0 1.32576e-05
3.4 3.4 0 1.32576e-05
3.4 4.4 0 1.32576e-05
3.4 5.2 0 1.32576e-05
3.4 6.8 0 1.32576e-05
3.4 7.8 0 1.32576e-05
3.4 8.6 0 1.32576e-05
3.4 10.2 0 1.32576e-05
3.4 13.6 0 1.32576e-05
4.4 4.4 0 1.32576e-05
4.4 5.2 0 1.32576e-05
4.4 6.8 0 1.32576e-05
4.4 7.8 0 1.32576e-05
4.4 8.6 0 1.32576e-05
4.4 10.2 0 1.32576e-05
4.4 13.6 0 1.32576e-05
5.2 5.2 0 1.32576e-05
5.2 6.8 0 1.32576e-05
5.2 7.8 0 1.32576e-05
5.2 8.6 0 1.32576e-05
5.2 10.2 0 1.32576e-05
5.2 13.6 0 1.32576e-05
6.8 6.8 0 1.32576e-05
6.8 7.8 0 1.32576e-05
6.8 8.6 0 1.32576e-05
6.8 10.2 0 1.32576e-05
6.8 13.6 0 1.32576e-05
7.8 7.8 0 1.32576e-05
7.8 8.6 0 1.32576e-05
7.8 10.2 0 1.32576e-05
7.8 13.6 0 1.32576e-05
8.6 8.6 0 1.32576e-05
8.6 10.2 0 1.32576e-05
8.6 13.6 0 1.32576e-05
10.2 10.2 0 1.32576e-05
10.2 13.6 0 1.32576e-05
13.6 0 13.6 1.32576e-05
END DIST

Metal 6 RESOVER 1
DIST count 0 width 1.6
END DIST

Metal 6 RESOVER 2
DIST count 0 width 1.6
END DIST

Metal 6 RESOVER 3
DIST count 0 width 1.6
END DIST

Metal 6 RESOVER 4
DIST count 0 width 1.6
END DIST

Metal 6 RESOVER 5
DIST count 0 width 1.6
END DIST

Metal 6 OVER
WIDTH Table 1 entries:  1.6

Metal 6 OVER 0
DIST count 12 width 1.6
1.6 0.000211767 2.64287e-05 6.62879e-06
3.2 0.000119107 3.40505e-05 6.62879e-06
4 9.88591e-05 3.6839e-05 6.62879e-06
4.8 5.34764e-05 3.53122e-05 6.62879e-06
5.6 4.5837e-05 3.83621e-05 6.62879e-06
6.4 4.01073e-05 4.05956e-05 6.62879e-06
7.2 3.5651e-05 4.19574e-05 6.62879e-06
8 0 4.24145e-05 6.62879e-06
9.6 0 4.24145e-05 6.62879e-06
12.8 0 4.24145e-05 6.62879e-06
16 0 4.24145e-05 6.62879e-06
19.2 0 4.24145e-05 6.62879e-06
END DIST

Metal 6 OVER 1
DIST count 12 width 1.6
1.6 0.000211767 7.6678e-05 6.62879e-06
3.2 0.000119107 8.84665e-05 6.62879e-06
4 9.88591e-05 9.27795e-05 6.62879e-06
4.8 5.34764e-05 9.0417e-05 6.62879e-06
5.6 4.5837e-05 9.5137e-05 6.62879e-06
6.4 4.01073e-05 9.85899e-05 6.62879e-06
7.2 3.5651e-05 0.000100698 6.62879e-06
8 0 0.000101405 6.62879e-06
9.6 0 0.000101405 6.62879e-06
12.8 0 0.000101405 6.62879e-06
16 0 0.000101405 6.62879e-06
19.2 0 0.000101405 6.62879e-06
END DIST

Metal 6 OVER 2
DIST count 12 width 1.6
1.6 0.000211767 0.000109446 6.62879e-06
3.2 0.000119107 0.000121528 6.62879e-06
4 9.88591e-05 0.000125946 6.62879e-06
4.8 5.34764e-05 0.000123526 6.62879e-06
5.6 4.5837e-05 0.00012836 6.62879e-06
6.4 4.01073e-05 0.000131898 6.62879e-06
7.2 3.5651e-05 0.000134059 6.62879e-06
8 0 0.000134782 6.62879e-06
9.6 0 0.000134782 6.62879e-06
12.8 0 0.000134782 6.62879e-06
16 0 0.000134782 6.62879e-06
19.2 0 0.000134782 6.62879e-06
END DIST

Metal 6 OVER 3
DIST count 12 width 1.6
1.6 0.000211767 0.000141839 6.62879e-06
3.2 0.000119107 0.000155087 6.62879e-06
4 9.88591e-05 0.000159935 6.62879e-06
4.8 5.34764e-05 0.00015728 6.62879e-06
5.6 4.5837e-05 0.000162583 6.62879e-06
6.4 4.01073e-05 0.000166464 6.62879e-06
7.2 3.5651e-05 0.00016883 6.62879e-06
8 0 0.000169625 6.62879e-06
9.6 0 0.000169625 6.62879e-06
12.8 0 0.000169625 6.62879e-06
16 0 0.000169625 6.62879e-06
19.2 0 0.000169625 6.62879e-06
END DIST

Metal 6 OVER 4
DIST count 12 width 1.6
1.6 0.000211767 0.000139445 6.62879e-06
3.2 0.000119107 0.000154463 6.62879e-06
4 9.88591e-05 0.000159956 6.62879e-06
4.8 5.34764e-05 0.000156949 6.62879e-06
5.6 4.5837e-05 0.000162957 6.62879e-06
6.4 4.01073e-05 0.000167358 6.62879e-06
7.2 3.5651e-05 0.000170041 6.62879e-06
8 0 0.000170941 6.62879e-06
9.6 0 0.000170941 6.62879e-06
12.8 0 0.000170941 6.62879e-06
16 0 0.000170941 6.62879e-06
19.2 0 0.000170941 6.62879e-06
END DIST

Metal 6 OVER 5
DIST count 12 width 1.6
1.6 0.000211767 0.000249661 6.62879e-06
3.2 0.000119107 0.000270612 6.62879e-06
4 9.88591e-05 0.000278277 6.62879e-06
4.8 5.34764e-05 0.000274079 6.62879e-06
5.6 4.5837e-05 0.000282463 6.62879e-06
6.4 4.01073e-05 0.000288601 6.62879e-06
7.2 3.5651e-05 0.000292345 6.62879e-06
8 0 0.000293602 6.62879e-06
9.6 0 0.000293602 6.62879e-06
12.8 0 0.000293602 6.62879e-06
16 0 0.000293602 6.62879e-06
19.2 0 0.000293602 6.62879e-06
END DIST

Metal 6 UNDER
WIDTH Table 0 entries: 

Metal 6 DIAGUNDER
WIDTH Table 0 entries: 
END DensityModel 0