sky130/openlane/rules.openrcx.sky130A.min.magic

Extraction Rules for OpenRCX

DIAGMODEL ON

LayerCount 6
DensityRate 1  0

DensityModel 0

Metal 1 RESOVER
WIDTH Table 1 entries:  0.17

Metal 1 RESOVER 0
DIST count 55 width 0.17
0 0 0 0.0623886
0 0.29 0 0.0623886
0 0.46 0 0.0623886
0 0.665 0 0.0623886
0 0.75 0 0.0623886
0 0.92 0 0.0623886
0 1.125 0 0.0623886
0 1.21 0 0.0623886
0 1.38 0 0.0623886
0 1.84 0 0.0623886
0.29 0.29 0 0.0623886
0.29 0.46 0 0.0623886
0.29 0.665 0 0.0623886
0.29 0.75 0 0.0623886
0.29 0.92 0 0.0623886
0.29 1.125 0 0.0623886
0.29 1.21 0 0.0623886
0.29 1.38 0 0.0623886
0.29 1.84 0 0.0623886
0.46 0.46 0 0.0623886
0.46 0.665 0 0.0623886
0.46 0.75 0 0.0623886
0.46 0.92 0 0.0623886
0.46 1.125 0 0.0623886
0.46 1.21 0 0.0623886
0.46 1.38 0 0.0623886
0.46 1.84 0 0.0623886
0.665 0.665 0 0.0623886
0.665 0.75 0 0.0623886
0.665 0.92 0 0.0623886
0.665 1.125 0 0.0623886
0.665 1.21 0 0.0623886
0.665 1.38 0 0.0623886
0.665 1.84 0 0.0623886
0.75 0.75 0 0.0623886
0.75 0.92 0 0.0623886
0.75 1.125 0 0.0623886
0.75 1.21 0 0.0623886
0.75 1.38 0 0.0623886
0.75 1.84 0 0.0623886
0.92 0.92 0 0.0623886
0.92 1.125 0 0.0623886
0.92 1.21 0 0.0623886
0.92 1.38 0 0.0623886
0.92 1.84 0 0.0623886
1.125 1.125 0 0.0623886
1.125 1.21 0 0.0623886
1.125 1.38 0 0.0623886
1.125 1.84 0 0.0623886
1.21 1.21 0 0.0623886
1.21 1.38 0 0.0623886
1.21 1.84 0 0.0623886
1.38 1.38 0 0.0623886
1.38 1.84 0 0.0623886
1.84 0 1.84 0.0623886
END DIST

Metal 1 OVER
WIDTH Table 1 entries:  0.17

Metal 1 OVER 0
DIST count 12 width 0.17
0.17 0.000490583 6.80969e-06 0.0311943
0.34 0.000275263 8.17445e-06 0.0311943
0.425 0.000228745 8.85502e-06 0.0311943
0.51 0.000196486 9.53411e-06 0.0311943
0.595 0.000172634 1.02116e-05 0.0311943
0.68 0.000154195 1.08871e-05 0.0311943
0.765 0.000139466 1.15607e-05 0.0311943
0.85 0.000127402 1.2232e-05 0.0311943
1.02 0.000108765 1.35673e-05 0.0311943
1.36 8.43779e-05 1.6203e-05 0.0311943
1.7 6.90393e-05 1.87824e-05 0.0311943
2.04 0 7.97594e-05 0.0311943
END DIST

Metal 1 UNDER
WIDTH Table 1 entries:  0.17

Metal 1 UNDER 2
DIST count 12 width 0.17
0.17 0.000490583 5.17131e-05 0.0311943
0.34 0.000275263 5.42405e-05 0.0311943
0.425 0.000228745 5.55018e-05 0.0311943
0.51 0.000196486 5.67587e-05 0.0311943
0.595 0.000172634 5.80155e-05 0.0311943
0.68 0.000154195 5.92659e-05 0.0311943
0.765 0.000139466 6.05132e-05 0.0311943
0.85 0.000127402 6.17576e-05 0.0311943
1.02 0.000108765 6.4232e-05 0.0311943
1.36 8.43779e-05 6.9115e-05 0.0311943
1.7 6.90393e-05 7.38925e-05 0.0311943
2.04 0 0.000137012 0.0311943
END DIST

Metal 1 UNDER 3
DIST count 12 width 0.17
0.17 0.000490583 3.68654e-05 0.0311943
0.34 0.000275263 3.89591e-05 0.0311943
0.425 0.000228745 4.00035e-05 0.0311943
0.51 0.000196486 4.10444e-05 0.0311943
0.595 0.000172634 4.20849e-05 0.0311943
0.68 0.000154195 4.31213e-05 0.0311943
0.765 0.000139466 4.41534e-05 0.0311943
0.85 0.000127402 4.51843e-05 0.0311943
1.02 0.000108765 4.72335e-05 0.0311943
1.36 8.43779e-05 5.12764e-05 0.0311943
1.7 6.90393e-05 5.52338e-05 0.0311943
2.04 0 0.000117553 0.0311943
END DIST

Metal 1 UNDER 4
DIST count 12 width 0.17
0.17 0.000490583 2.20682e-05 0.0311943
0.34 0.000275263 2.3936e-05 0.0311943
0.425 0.000228745 2.48677e-05 0.0311943
0.51 0.000196486 2.57967e-05 0.0311943
0.595 0.000172634 2.6724e-05 0.0311943
0.68 0.000154195 2.76491e-05 0.0311943
0.765 0.000139466 2.85707e-05 0.0311943
0.85 0.000127402 2.94899e-05 0.0311943
1.02 0.000108765 3.13177e-05 0.0311943
1.36 8.43779e-05 3.49253e-05 0.0311943
1.7 6.90393e-05 3.84561e-05 0.0311943
2.04 0 0.00010036 0.0311943
END DIST

Metal 1 UNDER 5
DIST count 12 width 0.17
0.17 0.000490583 1.903e-05 0.0311943
0.34 0.000275263 2.07332e-05 0.0311943
0.425 0.000228745 2.15829e-05 0.0311943
0.51 0.000196486 2.24299e-05 0.0311943
0.595 0.000172634 2.3275e-05 0.0311943
0.68 0.000154195 2.41182e-05 0.0311943
0.765 0.000139466 2.49592e-05 0.0311943
0.85 0.000127402 2.57965e-05 0.0311943
1.02 0.000108765 2.74633e-05 0.0311943
1.36 8.43779e-05 3.07526e-05 0.0311943
1.7 6.90393e-05 3.39718e-05 0.0311943
2.04 0 9.55709e-05 0.0311943
END DIST

Metal 1 UNDER 6
DIST count 12 width 0.17
0.17 0.000490583 1.04506e-05 0.0311943
0.34 0.000275263 1.20865e-05 0.0311943
0.425 0.000228745 1.29024e-05 0.0311943
0.51 0.000196486 1.37165e-05 0.0311943
0.595 0.000172634 1.45287e-05 0.0311943
0.68 0.000154195 1.53383e-05 0.0311943
0.765 0.000139466 1.61459e-05 0.0311943
0.85 0.000127402 1.69506e-05 0.0311943
1.02 0.000108765 1.85512e-05 0.0311943
1.36 8.43779e-05 2.17109e-05 0.0311943
1.7 6.90393e-05 2.48031e-05 0.0311943
2.04 0 8.62791e-05 0.0311943
END DIST

Metal 1 DIAGUNDER
WIDTH Table 1 entries:  0.17

Metal 1 DIAGUNDER 2
DIST count 13 width 0.17
0 0 7.62507e-05 0.0311943
0.17 0 0 0.0311943
0.34 0 0 0.0311943
0.425 0 0 0.0311943
0.51 0 0 0.0311943
0.595 0 0 0.0311943
0.68 0 0 0.0311943
0.765 0 0 0.0311943
0.85 0 0 0.0311943
1.02 0 0 0.0311943
1.36 0 0 0.0311943
1.7 0 0 0.0311943
2.04 0 0 0.0311943
END DIST

Metal 1 DIAGUNDER 3
DIST count 13 width 0.17
0 0 5.2059e-05 0.0311943
0.17 0 0 0.0311943
0.34 0 0 0.0311943
0.425 0 0 0.0311943
0.51 0 0 0.0311943
0.595 0 0 0.0311943
0.68 0 0 0.0311943
0.765 0 0 0.0311943
0.85 0 0 0.0311943
1.02 0 0 0.0311943
1.36 0 0 0.0311943
1.7 0 0 0.0311943
2.04 0 0 0.0311943
END DIST

Metal 1 DIAGUNDER 4
DIST count 13 width 0.17
0 0 1.88023e-05 0.0311943
0.17 0 0 0.0311943
0.34 0 0 0.0311943
0.425 0 0 0.0311943
0.51 0 0 0.0311943
0.595 0 0 0.0311943
0.68 0 0 0.0311943
0.765 0 0 0.0311943
0.85 0 0 0.0311943
1.02 0 0 0.0311943
1.36 0 0 0.0311943
1.7 0 0 0.0311943
2.04 0 0 0.0311943
END DIST

Metal 1 DIAGUNDER 5
DIST count 13 width 0.17
0 0 1.22463e-05 0.0311943
0.17 0 0 0.0311943
0.34 0 0 0.0311943
0.425 0 0 0.0311943
0.51 0 0 0.0311943
0.595 0 0 0.0311943
0.68 0 0 0.0311943
0.765 0 0 0.0311943
0.85 0 0 0.0311943
1.02 0 0 0.0311943
1.36 0 0 0.0311943
1.7 0 0 0.0311943
2.04 0 0 0.0311943
END DIST

Metal 1 DIAGUNDER 6
DIST count 0 width 0.17
END DIST

Metal 2 RESOVER
WIDTH Table 1 entries:  0.14

Metal 2 RESOVER 0
DIST count 55 width 0.14
0 0 0 0.000757576
0 0.2 0 0.000757576
0 0.34 0 0.000757576
0 0.47 0 0.000757576
0 0.54 0 0.000757576
0 0.68 0 0.000757576
0 0.81 0 0.000757576
0 0.88 0 0.000757576
0 1.02 0 0.000757576
0 1.36 0 0.000757576
0.2 0.2 0 0.000757576
0.2 0.34 0 0.000757576
0.2 0.47 0 0.000757576
0.2 0.54 0 0.000757576
0.2 0.68 0 0.000757576
0.2 0.81 0 0.000757576
0.2 0.88 0 0.000757576
0.2 1.02 0 0.000757576
0.2 1.36 0 0.000757576
0.34 0.34 0 0.000757576
0.34 0.47 0 0.000757576
0.34 0.54 0 0.000757576
0.34 0.68 0 0.000757576
0.34 0.81 0 0.000757576
0.34 0.88 0 0.000757576
0.34 1.02 0 0.000757576
0.34 1.36 0 0.000757576
0.47 0.47 0 0.000757576
0.47 0.54 0 0.000757576
0.47 0.68 0 0.000757576
0.47 0.81 0 0.000757576
0.47 0.88 0 0.000757576
0.47 1.02 0 0.000757576
0.47 1.36 0 0.000757576
0.54 0.54 0 0.000757576
0.54 0.68 0 0.000757576
0.54 0.81 0 0.000757576
0.54 0.88 0 0.000757576
0.54 1.02 0 0.000757576
0.54 1.36 0 0.000757576
0.68 0.68 0 0.000757576
0.68 0.81 0 0.000757576
0.68 0.88 0 0.000757576
0.68 1.02 0 0.000757576
0.68 1.36 0 0.000757576
0.81 0.81 0 0.000757576
0.81 0.88 0 0.000757576
0.81 1.02 0 0.000757576
0.81 1.36 0 0.000757576
0.88 0.88 0 0.000757576
0.88 1.02 0 0.000757576
0.88 1.36 0 0.000757576
1.02 1.02 0 0.000757576
1.02 1.36 0 0.000757576
1.36 0 1.36 0.000757576
END DIST

Metal 2 RESOVER 1
DIST count 0 width 0.14
END DIST

Metal 2 OVER
WIDTH Table 1 entries:  0.14

Metal 2 OVER 0
DIST count 12 width 0.14
0.14 0.000833899 4.72439e-06 0.000378788
0.28 0.00046858 5.84722e-06 0.000378788
0.35 0.000389231 6.40768e-06 0.000378788
0.42 0.000334125 6.96735e-06 0.000378788
0.49 0.000293354 7.52612e-06 0.000378788
0.56 0.000261826 8.08387e-06 0.000378788
0.63 0.000236646 8.64055e-06 0.000378788
0.7 0.000216027 9.196e-06 0.000378788
0.84 0.000184196 1.03028e-05 0.000378788
1.12 0.000142607 1.24974e-05 0.000378788
1.4 0.000116505 1.46609e-05 0.000378788
1.68 0 0.000115331 0.000378788
END DIST

Metal 2 OVER 1
DIST count 12 width 0.14
0.14 0.000833899 2.69268e-05 0.000378788
0.28 0.00046858 2.91393e-05 0.000378788
0.35 0.000389231 3.02442e-05 0.000378788
0.42 0.000334125 3.13468e-05 0.000378788
0.49 0.000293354 3.24481e-05 0.000378788
0.56 0.000261826 3.35484e-05 0.000378788
0.63 0.000236646 3.46443e-05 0.000378788
0.7 0.000216027 3.57401e-05 0.000378788
0.84 0.000184196 3.79207e-05 0.000378788
1.12 0.000142607 4.22452e-05 0.000378788
1.4 0.000116505 4.65089e-05 0.000378788
1.68 0 0.000149243 0.000378788
END DIST

Metal 2 UNDER
WIDTH Table 1 entries:  0.14

Metal 2 UNDER 3
DIST count 12 width 0.14
0.14 0.000833899 4.65463e-05 0.000378788
0.28 0.00046858 4.90034e-05 0.000378788
0.35 0.000389231 5.02288e-05 0.000378788
0.42 0.000334125 5.14544e-05 0.000378788
0.49 0.000293354 5.26768e-05 0.000378788
0.56 0.000261826 5.38961e-05 0.000378788
0.63 0.000236646 5.51152e-05 0.000378788
0.7 0.000216027 5.63288e-05 0.000378788
0.84 0.000184196 5.87512e-05 0.000378788
1.12 0.000142607 6.35518e-05 0.000378788
1.4 0.000116505 6.8286e-05 0.000378788
1.68 0 0.000171482 0.000378788
END DIST

Metal 2 UNDER 4
DIST count 12 width 0.14
0.14 0.000833899 1.9524e-05 0.000378788
0.28 0.00046858 2.13751e-05 0.000378788
0.35 0.000389231 2.2299e-05 0.000378788
0.42 0.000334125 2.32216e-05 0.000378788
0.49 0.000293354 2.41424e-05 0.000378788
0.56 0.000261826 2.50618e-05 0.000378788
0.63 0.000236646 2.59789e-05 0.000378788
0.7 0.000216027 2.68944e-05 0.000378788
0.84 0.000184196 2.87185e-05 0.000378788
1.12 0.000142607 3.23362e-05 0.000378788
1.4 0.000116505 3.59022e-05 0.000378788
1.68 0 0.00013795 0.000378788
END DIST

Metal 2 UNDER 5
DIST count 12 width 0.14
0.14 0.000833899 1.51347e-05 0.000378788
0.28 0.00046858 1.67056e-05 0.000378788
0.35 0.000389231 1.74899e-05 0.000378788
0.42 0.000334125 1.82723e-05 0.000378788
0.49 0.000293354 1.90546e-05 0.000378788
0.56 0.000261826 1.98347e-05 0.000378788
0.63 0.000236646 2.06128e-05 0.000378788
0.7 0.000216027 2.13902e-05 0.000378788
0.84 0.000184196 2.29386e-05 0.000378788
1.12 0.000142607 2.6009e-05 0.000378788
1.4 0.000116505 2.90356e-05 0.000378788
1.68 0 0.000130554 0.000378788
END DIST

Metal 2 UNDER 6
DIST count 12 width 0.14
0.14 0.000833899 8.22958e-06 0.000378788
0.28 0.00046858 9.7136e-06 0.000378788
0.35 0.000389231 1.04543e-05 0.000378788
0.42 0.000334125 1.11941e-05 0.000378788
0.49 0.000293354 1.19325e-05 0.000378788
0.56 0.000261826 1.26698e-05 0.000378788
0.63 0.000236646 1.34055e-05 0.000378788
0.7 0.000216027 1.41395e-05 0.000378788
0.84 0.000184196 1.56024e-05 0.000378788
1.12 0.000142607 1.8503e-05 0.000378788
1.4 0.000116505 2.13624e-05 0.000378788
1.68 0 0.000122717 0.000378788
END DIST

Metal 2 DIAGUNDER
WIDTH Table 1 entries:  0.14

Metal 2 DIAGUNDER 3
DIST count 13 width 0.14
0 0 2.5189e-05 0.000378788
0.14 0 1.23994e-05 0.000378788
0.28 0 1.22226e-05 0.000378788
0.35 0 1.2108e-05 0.000378788
0.42 0 1.19955e-05 0.000378788
0.49 0 1.1885e-05 0.000378788
0.56 0 1.17766e-05 0.000378788
0.63 0 1.16702e-05 0.000378788
0.7 0 1.15148e-05 0.000378788
0.84 0 5.70606e-06 0.000378788
1.12 0 0 0.000378788
1.4 0 0 0.000378788
1.68 0 0 0.000378788
END DIST

Metal 2 DIAGUNDER 4
DIST count 13 width 0.14
0 0 3.77182e-05 0.000378788
0.14 0 1.1878e-05 0.000378788
0.28 0 1.17156e-05 0.000378788
0.35 0 1.16102e-05 0.000378788
0.42 0 1.15068e-05 0.000378788
0.49 0 1.14051e-05 0.000378788
0.56 0 5.67735e-06 0.000378788
0.63 0 0 0.000378788
0.7 0 0 0.000378788
0.84 0 0 0.000378788
1.12 0 0 0.000378788
1.4 0 0 0.000378788
1.68 0 0 0.000378788
END DIST

Metal 2 DIAGUNDER 5
DIST count 13 width 0.14
0 0 2.46377e-05 0.000378788
0.14 0 1.1878e-05 0.000378788
0.28 0 1.17156e-05 0.000378788
0.35 0 1.16102e-05 0.000378788
0.42 0 1.15068e-05 0.000378788
0.49 0 1.14051e-05 0.000378788
0.56 0 5.67735e-06 0.000378788
0.63 0 0 0.000378788
0.7 0 0 0.000378788
0.84 0 0 0.000378788
1.12 0 0 0.000378788
1.4 0 0 0.000378788
1.68 0 0 0.000378788
END DIST

Metal 2 DIAGUNDER 6
DIST count 13 width 0.14
0 0 1.3482e-05 0.000378788
0.14 0 0 0.000378788
0.28 0 0 0.000378788
0.35 0 0 0.000378788
0.42 0 0 0.000378788
0.49 0 0 0.000378788
0.56 0 0 0.000378788
0.63 0 0 0.000378788
0.7 0 0 0.000378788
0.84 0 0 0.000378788
1.12 0 0 0.000378788
1.4 0 0 0.000378788
1.68 0 0 0.000378788
END DIST

Metal 2 OVERUNDER
WIDTH Table 1 entries:  0.14

Metal 2 OVER 1 UNDER 3
DIST count 12 width 0.14
0.14 0.000833965 6.98402e-05 0.000378788
0.28 0.000468585 7.34263e-05 0.000378788
0.35 0.000389231 7.52084e-05 0.000378788
0.42 0.000334125 7.69861e-05 0.000378788
0.49 0.000293368 7.87532e-05 0.000378788
0.56 0.000261869 8.05096e-05 0.000378788
0.63 0.000236707 8.22661e-05 0.000378788
0.7 0.000216061 8.40392e-05 0.000378788
0.84 0.000184234 8.75363e-05 0.000378788
1.12 0.00014263 9.44725e-05 0.000378788
1.4 0.000116505 0.000101317 0.000378788
1.68 0 0.000206577 0.000378788
END DIST

Metal 2 OVER 1 UNDER 4
DIST count 12 width 0.14
0.14 0.000834032 4.28256e-05 0.000378788
0.28 0.000468651 4.57718e-05 0.000378788
0.35 0.000389297 4.72403e-05 0.000378788
0.42 0.000334192 4.87061e-05 0.000378788
0.49 0.000293434 5.01684e-05 0.000378788
0.56 0.000261935 5.16277e-05 0.000378788
0.63 0.000236774 5.30824e-05 0.000378788
0.7 0.000216127 5.45408e-05 0.000378788
0.84 0.000184301 5.74382e-05 0.000378788
1.12 0.000142697 6.31871e-05 0.000378788
1.4 0.000116571 6.88553e-05 0.000378788
1.68 0 0.000173034 0.000378788
END DIST

Metal 2 OVER 1 UNDER 5
DIST count 12 width 0.14
0.14 0.000834032 3.84363e-05 0.000378788
0.28 0.000468647 4.11588e-05 0.000378788
0.35 4.23185e-05 3.18535e-06 0.000378788
0.42 0.000334192 4.26461e-05 0.000378788
0.49 0.00029342 4.39709e-05 0.000378788
0.56 0.000261893 4.52936e-05 0.000378788
0.63 0.000236712 4.66108e-05 0.000378788
0.7 0.000216094 4.79287e-05 0.000378788
0.84 0.000184263 5.05508e-05 0.000378788
1.12 0.000142673 5.57511e-05 0.000378788
1.4 0.000116571 6.08779e-05 0.000378788
1.68 0 -1.37223 0.000378788
END DIST

Metal 2 OVER 1 UNDER 6
DIST count 12 width 0.14
0.14 0.000833965 3.0423e-05 0.000378788
0.28 0.00046858 3.30056e-05 0.000378788
0.35 0.000389231 3.42908e-05 0.000378788
0.42 0.000334125 3.55735e-05 0.000378788
0.49 0.000293354 3.68545e-05 0.000378788
0.56 0.000261826 3.81343e-05 0.000378788
0.63 0.000236646 3.94092e-05 0.000378788
0.7 0.000216027 4.06836e-05 0.000378788
0.84 0.000184196 4.32202e-05 0.000378788
1.12 0.000142607 4.82508e-05 0.000378788
1.4 0.000116505 5.32104e-05 0.000378788
1.68 0 0.000156629 0.000378788
END DIST

Metal 3 RESOVER
WIDTH Table 1 entries:  0.14

Metal 3 RESOVER 0
DIST count 55 width 0.14
0 0 0 0.000757576
0 0.32 0 0.000757576
0 0.46 0 0.000757576
0 0.71 0 0.000757576
0 0.78 0 0.000757576
0 0.92 0 0.000757576
0 1.17 0 0.000757576
0 1.24 0 0.000757576
0 1.38 0 0.000757576
0 1.84 0 0.000757576
0.32 0.32 0 0.000757576
0.32 0.46 0 0.000757576
0.32 0.71 0 0.000757576
0.32 0.78 0 0.000757576
0.32 0.92 0 0.000757576
0.32 1.17 0 0.000757576
0.32 1.24 0 0.000757576
0.32 1.38 0 0.000757576
0.32 1.84 0 0.000757576
0.46 0.46 0 0.000757576
0.46 0.71 0 0.000757576
0.46 0.78 0 0.000757576
0.46 0.92 0 0.000757576
0.46 1.17 0 0.000757576
0.46 1.24 0 0.000757576
0.46 1.38 0 0.000757576
0.46 1.84 0 0.000757576
0.71 0.71 0 0.000757576
0.71 0.78 0 0.000757576
0.71 0.92 0 0.000757576
0.71 1.17 0 0.000757576
0.71 1.24 0 0.000757576
0.71 1.38 0 0.000757576
0.71 1.84 0 0.000757576
0.78 0.78 0 0.000757576
0.78 0.92 0 0.000757576
0.78 1.17 0 0.000757576
0.78 1.24 0 0.000757576
0.78 1.38 0 0.000757576
0.78 1.84 0 0.000757576
0.92 0.92 0 0.000757576
0.92 1.17 0 0.000757576
0.92 1.24 0 0.000757576
0.92 1.38 0 0.000757576
0.92 1.84 0 0.000757576
1.17 1.17 0 0.000757576
1.17 1.24 0 0.000757576
1.17 1.38 0 0.000757576
1.17 1.84 0 0.000757576
1.24 1.24 0 0.000757576
1.24 1.38 0 0.000757576
1.24 1.84 0 0.000757576
1.38 1.38 0 0.000757576
1.38 1.84 0 0.000757576
1.84 0 1.84 0.000757576
END DIST

Metal 3 RESOVER 1
DIST count 0 width 0.14
END DIST

Metal 3 RESOVER 2
DIST count 0 width 0.14
END DIST

Metal 3 OVER
WIDTH Table 1 entries:  0.14

Metal 3 OVER 0
DIST count 12 width 0.14
0.14 0.000884156 4.34524e-06 0.000378788
0.28 0.000494068 5.38882e-06 0.000378788
0.35 0.000410659 5.9096e-06 0.000378788
0.42 0.000353011 6.42955e-06 0.000378788
0.49 0.00031047 6.94859e-06 0.000378788
0.56 0.000277616 7.46659e-06 0.000378788
0.63 0.000251384 7.98348e-06 0.000378788
0.7 0.000229897 8.49921e-06 0.000378788
0.84 0.000196683 9.52655e-06 0.000378788
1.12 0.000153132 1.15625e-05 0.000378788
1.4 0.000125647 1.35683e-05 0.000378788
1.68 0 0.000122177 0.000378788
END DIST

Metal 3 OVER 1
DIST count 12 width 0.14
0.14 0.000884156 1.63439e-05 0.000378788
0.28 0.000494068 1.81478e-05 0.000378788
0.35 0.000410659 1.90478e-05 0.000378788
0.42 0.000353011 1.99452e-05 0.000378788
0.49 0.00031047 2.08417e-05 0.000378788
0.56 0.000277616 2.17373e-05 0.000378788
0.63 0.000251384 2.26299e-05 0.000378788
0.7 0.000229897 2.35213e-05 0.000378788
0.84 0.000196683 2.52966e-05 0.000378788
1.12 0.000153132 2.88142e-05 0.000378788
1.4 0.000125647 3.22787e-05 0.000378788
1.68 0 0.000142321 0.000378788
END DIST

Metal 3 OVER 2
DIST count 12 width 0.14
0.14 0.000884156 3.71683e-05 0.000378788
0.28 0.000494068 3.95439e-05 0.000378788
0.35 0.000410659 4.07282e-05 0.000378788
0.42 0.000353011 4.19117e-05 0.000378788
0.49 0.00031047 4.30936e-05 0.000378788
0.56 0.000277616 4.42724e-05 0.000378788
0.63 0.000251384 4.54481e-05 0.000378788
0.7 0.000229897 4.66221e-05 0.000378788
0.84 0.000196683 4.89587e-05 0.000378788
1.12 0.000153132 5.35933e-05 0.000378788
1.4 0.000125647 5.81574e-05 0.000378788
1.68 0 0.000169278 0.000378788
END DIST

Metal 3 UNDER
WIDTH Table 1 entries:  0.14

Metal 3 UNDER 4
DIST count 12 width 0.14
0.14 0.000884156 2.85263e-05 0.000378788
0.28 0.000494068 3.07905e-05 0.000378788
0.35 0.000410659 3.19214e-05 0.000378788
0.42 0.000353011 3.30493e-05 0.000378788
0.49 0.00031047 3.41757e-05 0.000378788
0.56 0.000277616 3.52997e-05 0.000378788
0.63 0.000251384 3.64212e-05 0.000378788
0.7 0.000229897 3.75399e-05 0.000378788
0.84 0.000196683 3.97698e-05 0.000378788
1.12 0.000153132 4.4187e-05 0.000378788
1.4 0.000125647 4.85395e-05 0.000378788
1.68 0 0.000159453 0.000378788
END DIST

Metal 3 UNDER 5
DIST count 12 width 0.14
0.14 0.000884156 1.72126e-05 0.000378788
0.28 0.000494068 1.88694e-05 0.000378788
0.35 0.000410659 1.96963e-05 0.000378788
0.42 0.000353011 2.05224e-05 0.000378788
0.49 0.00031047 2.13463e-05 0.000378788
0.56 0.000277616 2.2169e-05 0.000378788
0.63 0.000251384 2.299e-05 0.000378788
0.7 0.000229897 2.38089e-05 0.000378788
0.84 0.000196683 2.54404e-05 0.000378788
1.12 0.000153132 2.86733e-05 0.000378788
1.4 0.000125647 3.18587e-05 0.000378788
1.68 0 0.000141625 0.000378788
END DIST

Metal 3 UNDER 6
DIST count 12 width 0.14
0.14 0.000884156 8.89524e-06 0.000378788
0.28 0.000494068 1.0406e-05 0.000378788
0.35 0.000410659 1.11598e-05 0.000378788
0.42 0.000353011 1.19125e-05 0.000378788
0.49 0.00031047 1.26638e-05 0.000378788
0.56 0.000277616 1.34137e-05 0.000378788
0.63 0.000251384 1.41619e-05 0.000378788
0.7 0.000229897 1.49084e-05 0.000378788
0.84 0.000196683 1.63957e-05 0.000378788
1.12 0.000153132 1.93427e-05 0.000378788
1.4 0.000125647 2.22463e-05 0.000378788
1.68 0 0.000131736 0.000378788
END DIST

Metal 3 DIAGUNDER
WIDTH Table 1 entries:  0.14

Metal 3 DIAGUNDER 4
DIST count 13 width 0.14
0 0 5.70672e-05 0.000378788
0.14 0 0 0.000378788
0.28 0 0 0.000378788
0.35 0 0 0.000378788
0.42 0 0 0.000378788
0.49 0 0 0.000378788
0.56 0 0 0.000378788
0.63 0 0 0.000378788
0.7 0 0 0.000378788
0.84 0 0 0.000378788
1.12 0 0 0.000378788
1.4 0 0 0.000378788
1.68 0 0 0.000378788
END DIST

Metal 3 DIAGUNDER 5
DIST count 13 width 0.14
0 0 2.54305e-05 0.000378788
0.14 0 0 0.000378788
0.28 0 0 0.000378788
0.35 0 0 0.000378788
0.42 0 0 0.000378788
0.49 0 0 0.000378788
0.56 0 0 0.000378788
0.63 0 0 0.000378788
0.7 0 0 0.000378788
0.84 0 0 0.000378788
1.12 0 0 0.000378788
1.4 0 0 0.000378788
1.68 0 0 0.000378788
END DIST

Metal 3 DIAGUNDER 6
DIST count 13 width 0.14
0 0 1.74521e-05 0.000378788
0.14 0 0 0.000378788
0.28 0 0 0.000378788
0.35 0 0 0.000378788
0.42 0 0 0.000378788
0.49 0 0 0.000378788
0.56 0 0 0.000378788
0.63 0 0 0.000378788
0.7 0 0 0.000378788
0.84 0 0 0.000378788
1.12 0 0 0.000378788
1.4 0 0 0.000378788
1.68 0 0 0.000378788
END DIST

Metal 3 OVERUNDER
WIDTH Table 1 entries:  0.14

Metal 3 OVER 1 UNDER 4
DIST count 12 width 0.14
0.14 0.000884156 4.05249e-05 0.000378788
0.28 0.000494068 4.35495e-05 0.000378788
0.35 0.000410659 4.50596e-05 0.000378788
0.42 0.000353011 4.6565e-05 0.000378788
0.49 0.00031047 4.80688e-05 0.000378788
0.56 0.000277616 4.95704e-05 0.000378788
0.63 0.000251384 5.10676e-05 0.000378788
0.7 0.000229897 5.2562e-05 0.000378788
0.84 0.000196683 5.55399e-05 0.000378788
1.12 0.000153132 6.14388e-05 0.000378788
1.4 0.000125647 6.72499e-05 0.000378788
1.68 0 0.000179597 0.000378788
END DIST

Metal 3 OVER 1 UNDER 5
DIST count 12 width 0.14
0.14 0.000884156 2.92112e-05 0.000378788
0.28 0.000494068 3.16284e-05 0.000378788
0.35 0.000410659 3.28345e-05 0.000378788
0.42 0.000353011 3.40381e-05 0.000378788
0.49 0.00031047 3.52394e-05 0.000378788
0.56 0.000277616 3.64397e-05 0.000378788
0.63 0.000251384 3.76364e-05 0.000378788
0.7 0.000229897 3.8831e-05 0.000378788
0.84 0.000196683 4.12105e-05 0.000378788
1.12 0.000153132 4.59251e-05 0.000378788
1.4 0.000125647 5.05692e-05 0.000378788
1.68 0 0.000161769 0.000378788
END DIST

Metal 3 OVER 1 UNDER 6
DIST count 12 width 0.14
0.14 0.000884156 2.08939e-05 0.000378788
0.28 0.000494068 2.3165e-05 0.000378788
0.35 0.000410659 2.4298e-05 0.000378788
0.42 0.000353011 2.54282e-05 0.000378788
0.49 0.00031047 2.65569e-05 0.000378788
0.56 0.000277616 2.76844e-05 0.000378788
0.63 0.000251384 2.88083e-05 0.000378788
0.7 0.000229897 2.99306e-05 0.000378788
0.84 0.000196683 3.21658e-05 0.000378788
1.12 0.000153132 3.65944e-05 0.000378788
1.4 0.000125647 4.09568e-05 0.000378788
1.68 0 0.000151881 0.000378788
END DIST

Metal 3 OVER 2 UNDER 4
DIST count 12 width 0.14
0.14 0.000884156 6.13493e-05 0.000378788
0.28 0.000494068 6.49456e-05 0.000378788
0.35 0.000410659 6.67401e-05 0.000378788
0.42 0.000353011 6.85315e-05 0.000378788
0.49 0.00031047 7.03207e-05 0.000378788
0.56 0.000277616 7.21055e-05 0.000378788
0.63 0.000251384 7.38859e-05 0.000378788
0.7 0.000229897 7.56628e-05 0.000378788
0.84 0.000196683 7.92019e-05 0.000378788
1.12 0.000153132 8.62179e-05 0.000378788
1.4 0.000125647 9.31286e-05 0.000378788
1.68 0 0.000206553 0.000378788
END DIST

Metal 3 OVER 2 UNDER 5
DIST count 12 width 0.14
0.14 0.000884156 5.00356e-05 0.000378788
0.28 0.000494068 5.30245e-05 0.000378788
0.35 0.000410659 5.4515e-05 0.000378788
0.42 0.000353011 5.60045e-05 0.000378788
0.49 0.00031047 5.74913e-05 0.000378788
0.56 0.000277616 5.89748e-05 0.000378788
0.63 0.000251384 6.04547e-05 0.000378788
0.7 0.000229897 6.19318e-05 0.000378788
0.84 0.000196683 6.48725e-05 0.000378788
1.12 0.000153132 7.07041e-05 0.000378788
1.4 0.000125647 7.64479e-05 0.000378788
1.68 0 0.000188726 0.000378788
END DIST

Metal 3 OVER 2 UNDER 6
DIST count 12 width 0.14
0.14 0.000884156 4.17183e-05 0.000378788
0.28 0.000494068 4.4561e-05 0.000378788
0.35 0.000410659 4.59785e-05 0.000378788
0.42 0.000353011 4.73947e-05 0.000378788
0.49 0.00031047 4.88088e-05 0.000378788
0.56 0.000277616 5.02195e-05 0.000378788
0.63 0.000251384 5.16266e-05 0.000378788
0.7 0.000229897 5.30314e-05 0.000378788
0.84 0.000196683 5.58278e-05 0.000378788
1.12 0.000153132 6.13735e-05 0.000378788
1.4 0.000125647 6.68355e-05 0.000378788
1.68 0 0.000178837 0.000378788
END DIST

Metal 4 RESOVER
WIDTH Table 1 entries:  0.3

Metal 4 RESOVER 0
DIST count 55 width 0.3
0 0 0 0.000127946
0 0.38 0 0.000127946
0 0.68 0 0.000127946
0 0.91 0 0.000127946
0 1.06 0 0.000127946
0 1.36 0 0.000127946
0 1.59 0 0.000127946
0 1.74 0 0.000127946
0 2.04 0 0.000127946
0 2.72 0 0.000127946
0.38 0.38 0 0.000127946
0.38 0.68 0 0.000127946
0.38 0.91 0 0.000127946
0.38 1.06 0 0.000127946
0.38 1.36 0 0.000127946
0.38 1.59 0 0.000127946
0.38 1.74 0 0.000127946
0.38 2.04 0 0.000127946
0.38 2.72 0 0.000127946
0.68 0.68 0 0.000127946
0.68 0.91 0 0.000127946
0.68 1.06 0 0.000127946
0.68 1.36 0 0.000127946
0.68 1.59 0 0.000127946
0.68 1.74 0 0.000127946
0.68 2.04 0 0.000127946
0.68 2.72 0 0.000127946
0.91 0.91 0 0.000127946
0.91 1.06 0 0.000127946
0.91 1.36 0 0.000127946
0.91 1.59 0 0.000127946
0.91 1.74 0 0.000127946
0.91 2.04 0 0.000127946
0.91 2.72 0 0.000127946
1.06 1.06 0 0.000127946
1.06 1.36 0 0.000127946
1.06 1.59 0 0.000127946
1.06 1.74 0 0.000127946
1.06 2.04 0 0.000127946
1.06 2.72 0 0.000127946
1.36 1.36 0 0.000127946
1.36 1.59 0 0.000127946
1.36 1.74 0 0.000127946
1.36 2.04 0 0.000127946
1.36 2.72 0 0.000127946
1.59 1.59 0 0.000127946
1.59 1.74 0 0.000127946
1.59 2.04 0 0.000127946
1.59 2.72 0 0.000127946
1.74 1.74 0 0.000127946
1.74 2.04 0 0.000127946
1.74 2.72 0 0.000127946
2.04 2.04 0 0.000127946
2.04 2.72 0 0.000127946
2.72 0 2.72 0.000127946
END DIST

Metal 4 RESOVER 1
DIST count 0 width 0.3
END DIST

Metal 4 RESOVER 2
DIST count 0 width 0.3
END DIST

Metal 4 RESOVER 3
DIST count 0 width 0.3
END DIST

Metal 4 OVER
WIDTH Table 1 entries:  0.3

Metal 4 OVER 0
DIST count 12 width 0.3
0.3 0.000555432 7.46668e-06 6.39731e-05
0.6 0.000312295 9.87089e-06 6.39731e-05
0.75 0.000259315 1.10637e-05 6.39731e-05
0.9 0.000222495 1.22488e-05 6.39731e-05
1.05 0.000195244 1.34253e-05 6.39731e-05
1.2 0.000174172 1.45921e-05 6.39731e-05
1.35 0.000157346 1.57483e-05 6.39731e-05
1.5 0.000143572 1.68928e-05 6.39731e-05
1.8 0.000122317 1.91428e-05 6.39731e-05
2.4 9.45772e-05 2.34596e-05 6.39731e-05
3 7.71926e-05 2.7483e-05 6.39731e-05
3.6 0 9.6402e-05 6.39731e-05
END DIST

Metal 4 OVER 1
DIST count 12 width 0.3
0.3 0.000555432 2.61063e-05 6.39731e-05
0.6 0.000312295 3.00518e-05 6.39731e-05
0.75 0.000259315 3.20083e-05 6.39731e-05
0.9 0.000222495 3.39543e-05 6.39731e-05
1.05 0.000195244 3.58846e-05 6.39731e-05
1.2 0.000174172 3.78007e-05 6.39731e-05
1.35 0.000157346 3.96971e-05 6.39731e-05
1.5 0.000143572 4.15755e-05 6.39731e-05
1.8 0.000122317 4.52682e-05 6.39731e-05
2.4 9.45772e-05 5.23538e-05 6.39731e-05
3 7.71926e-05 5.89566e-05 6.39731e-05
3.6 0 0.000130231 6.39731e-05
END DIST

Metal 4 OVER 2
DIST count 12 width 0.3
0.3 0.000555432 4.40548e-05 6.39731e-05
0.6 0.000312295 4.84714e-05 6.39731e-05
0.75 0.000259315 5.06624e-05 6.39731e-05
0.9 0.000222495 5.28415e-05 6.39731e-05
1.05 0.000195244 5.50027e-05 6.39731e-05
1.2 0.000174172 5.71451e-05 6.39731e-05
1.35 0.000157346 5.92703e-05 6.39731e-05
1.5 0.000143572 6.13723e-05 6.39731e-05
1.8 0.000122317 6.5506e-05 6.39731e-05
2.4 9.45772e-05 7.34365e-05 6.39731e-05
3 7.71926e-05 8.08273e-05 6.39731e-05
3.6 0 0.000152823 6.39731e-05
END DIST

Metal 4 OVER 3
DIST count 12 width 0.3
0.3 0.000555432 7.23006e-05 6.39731e-05
0.6 0.000312295 7.76004e-05 6.39731e-05
0.75 0.000259315 8.02311e-05 6.39731e-05
0.9 0.000222495 8.28409e-05 6.39731e-05
1.05 0.000195244 8.54346e-05 6.39731e-05
1.2 0.000174172 8.80059e-05 6.39731e-05
1.35 0.000157346 9.0554e-05 6.39731e-05
1.5 0.000143572 9.30775e-05 6.39731e-05
1.8 0.000122317 9.80371e-05 6.39731e-05
2.4 9.45772e-05 0.000107551 6.39731e-05
3 7.71926e-05 0.000116418 6.39731e-05
3.6 0 0.000189762 6.39731e-05
END DIST

Metal 4 UNDER
WIDTH Table 1 entries:  0.3

Metal 4 UNDER 5
DIST count 12 width 0.3
0.3 0.000555432 6.12535e-05 6.39731e-05
0.6 0.000312295 6.6158e-05 6.39731e-05
0.75 0.000259315 6.85915e-05 6.39731e-05
0.9 0.000222495 7.10103e-05 6.39731e-05
1.05 0.000195244 7.34095e-05 6.39731e-05
1.2 0.000174172 7.57901e-05 6.39731e-05
1.35 0.000157346 7.81498e-05 6.39731e-05
1.5 0.000143572 8.04846e-05 6.39731e-05
1.8 0.000122317 8.50747e-05 6.39731e-05
2.4 9.45772e-05 9.3883e-05 6.39731e-05
3 7.71926e-05 0.000102092 6.39731e-05
3.6 0 0.000174832 6.39731e-05
END DIST

Metal 4 UNDER 6
DIST count 12 width 0.3
0.3 0.000555432 2.01555e-05 6.39731e-05
0.6 0.000312295 2.42275e-05 6.39731e-05
0.75 0.000259315 2.62475e-05 6.39731e-05
0.9 0.000222495 2.82548e-05 6.39731e-05
1.05 0.000195244 3.02475e-05 6.39731e-05
1.2 0.000174172 3.22236e-05 6.39731e-05
1.35 0.000157346 3.41819e-05 6.39731e-05
1.5 0.000143572 3.61203e-05 6.39731e-05
1.8 0.000122317 3.9931e-05 6.39731e-05
2.4 9.45772e-05 4.72423e-05 6.39731e-05
3 7.71926e-05 5.40566e-05 6.39731e-05
3.6 0 0.000125524 6.39731e-05
END DIST

Metal 4 DIAGUNDER
WIDTH Table 1 entries:  0.3

Metal 4 DIAGUNDER 5
DIST count 13 width 0.3
0 0 2.54636e-05 6.39731e-05
0.3 0 0 6.39731e-05
0.6 0 0 6.39731e-05
0.75 0 0 6.39731e-05
0.9 0 0 6.39731e-05
1.05 0 0 6.39731e-05
1.2 0 0 6.39731e-05
1.35 0 0 6.39731e-05
1.5 0 0 6.39731e-05
1.8 0 0 6.39731e-05
2.4 0 0 6.39731e-05
3 0 0 6.39731e-05
3.6 0 0 6.39731e-05
END DIST

Metal 4 DIAGUNDER 6
DIST count 13 width 0.3
0 0 3.40697e-05 6.39731e-05
0.3 0 0 6.39731e-05
0.6 0 0 6.39731e-05
0.75 0 0 6.39731e-05
0.9 0 0 6.39731e-05
1.05 0 0 6.39731e-05
1.2 0 0 6.39731e-05
1.35 0 0 6.39731e-05
1.5 0 0 6.39731e-05
1.8 0 0 6.39731e-05
2.4 0 0 6.39731e-05
3 0 0 6.39731e-05
3.6 0 0 6.39731e-05
END DIST

Metal 4 OVERUNDER
WIDTH Table 1 entries:  0.3

Metal 4 OVER 1 UNDER 5
DIST count 12 width 0.3
0.3 0.000555432 7.98932e-05 6.39731e-05
0.6 0.000312295 8.63389e-05 6.39731e-05
0.75 0.000259315 8.95361e-05 6.39731e-05
0.9 0.000222495 9.27158e-05 6.39731e-05
1.05 0.000195244 9.58688e-05 6.39731e-05
1.2 0.000174172 9.89986e-05 6.39731e-05
1.35 0.000157346 0.000102099 6.39731e-05
1.5 0.000143572 0.000105167 6.39731e-05
1.8 0.000122317 0.0001112 6.39731e-05
2.4 9.45772e-05 0.000122777 6.39731e-05
3 7.71926e-05 0.000133565 6.39731e-05
3.6 0 0.000208661 6.39731e-05
END DIST

Metal 4 OVER 1 UNDER 6
DIST count 12 width 0.3
0.3 0.000555432 3.87952e-05 6.39731e-05
0.6 0.000312295 4.44084e-05 6.39731e-05
0.75 0.000259315 4.71921e-05 6.39731e-05
0.9 0.000222495 4.99603e-05 6.39731e-05
1.05 0.000195244 5.27069e-05 6.39731e-05
1.2 0.000174172 5.54321e-05 6.39731e-05
1.35 0.000157346 5.81307e-05 6.39731e-05
1.5 0.000143572 6.08031e-05 6.39731e-05
1.8 0.000122317 6.60565e-05 6.39731e-05
2.4 9.45772e-05 7.61365e-05 6.39731e-05
3 7.71926e-05 8.55302e-05 6.39731e-05
3.6 0 0.000159353 6.39731e-05
END DIST

Metal 4 OVER 2 UNDER 5
DIST count 12 width 0.3
0.3 0.000555432 9.78417e-05 6.39731e-05
0.6 0.000312295 0.000104759 6.39731e-05
0.75 0.000259315 0.00010819 6.39731e-05
0.9 0.000222495 0.000111603 6.39731e-05
1.05 0.000195244 0.000114987 6.39731e-05
1.2 0.000174172 0.000118343 6.39731e-05
1.35 0.000157346 0.000121672 6.39731e-05
1.5 0.000143572 0.000124964 6.39731e-05
1.8 0.000122317 0.000131438 6.39731e-05
2.4 9.45772e-05 0.00014386 6.39731e-05
3 7.71926e-05 0.000155436 6.39731e-05
3.6 0 0.000231253 6.39731e-05
END DIST

Metal 4 OVER 2 UNDER 6
DIST count 12 width 0.3
0.3 0.000555432 5.67437e-05 6.39731e-05
0.6 0.000312295 6.2828e-05 6.39731e-05
0.75 0.000259315 6.58463e-05 6.39731e-05
0.9 0.000222495 6.88475e-05 6.39731e-05
1.05 0.000195244 7.18249e-05 6.39731e-05
1.2 0.000174172 7.47766e-05 6.39731e-05
1.35 0.000157346 7.77038e-05 6.39731e-05
1.5 0.000143572 8.05999e-05 6.39731e-05
1.8 0.000122317 8.62943e-05 6.39731e-05
2.4 9.45772e-05 9.72192e-05 6.39731e-05
3 7.71926e-05 0.000107401 6.39731e-05
3.6 0 0.000181945 6.39731e-05
END DIST

Metal 4 OVER 3 UNDER 5
DIST count 12 width 0.3
0.3 0.000555432 0.000126087 6.39731e-05
0.6 0.000312295 0.000133888 6.39731e-05
0.75 0.000259315 0.000137759 6.39731e-05
0.9 0.000222495 0.000141602 6.39731e-05
1.05 0.000195244 0.000145419 6.39731e-05
1.2 0.000174172 0.000149204 6.39731e-05
1.35 0.000157346 0.000152955 6.39731e-05
1.5 0.000143572 0.000156669 6.39731e-05
1.8 0.000122317 0.000163969 6.39731e-05
2.4 9.45772e-05 0.000177975 6.39731e-05
3 7.71926e-05 0.000191026 6.39731e-05
3.6 0 0.000268192 6.39731e-05
END DIST

Metal 4 OVER 3 UNDER 6
DIST count 12 width 0.3
0.3 0.000555432 8.49894e-05 6.39731e-05
0.6 0.000312295 9.1957e-05 6.39731e-05
0.75 0.000259315 9.5415e-05 6.39731e-05
0.9 0.000222495 9.88469e-05 6.39731e-05
1.05 0.000195244 0.000102257 6.39731e-05
1.2 0.000174172 0.000105637 6.39731e-05
1.35 0.000157346 0.000108988 6.39731e-05
1.5 0.000143572 0.000112305 6.39731e-05
1.8 0.000122317 0.000118825 6.39731e-05
2.4 9.45772e-05 0.000131334 6.39731e-05
3 7.71926e-05 0.000142991 6.39731e-05
3.6 0 0.000218884 6.39731e-05
END DIST

Metal 5 RESOVER
WIDTH Table 1 entries:  0.3

Metal 5 RESOVER 0
DIST count 55 width 0.3
0 0 0 0.000127946
0 0.62 0 0.000127946
0 0.92 0 0.000127946
0 1.39 0 0.000127946
0 1.54 0 0.000127946
0 1.84 0 0.000127946
0 2.31 0 0.000127946
0 2.46 0 0.000127946
0 2.76 0 0.000127946
0 3.68 0 0.000127946
0.62 0.62 0 0.000127946
0.62 0.92 0 0.000127946
0.62 1.39 0 0.000127946
0.62 1.54 0 0.000127946
0.62 1.84 0 0.000127946
0.62 2.31 0 0.000127946
0.62 2.46 0 0.000127946
0.62 2.76 0 0.000127946
0.62 3.68 0 0.000127946
0.92 0.92 0 0.000127946
0.92 1.39 0 0.000127946
0.92 1.54 0 0.000127946
0.92 1.84 0 0.000127946
0.92 2.31 0 0.000127946
0.92 2.46 0 0.000127946
0.92 2.76 0 0.000127946
0.92 3.68 0 0.000127946
1.39 1.39 0 0.000127946
1.39 1.54 0 0.000127946
1.39 1.84 0 0.000127946
1.39 2.31 0 0.000127946
1.39 2.46 0 0.000127946
1.39 2.76 0 0.000127946
1.39 3.68 0 0.000127946
1.54 1.54 0 0.000127946
1.54 1.84 0 0.000127946
1.54 2.31 0 0.000127946
1.54 2.46 0 0.000127946
1.54 2.76 0 0.000127946
1.54 3.68 0 0.000127946
1.84 1.84 0 0.000127946
1.84 2.31 0 0.000127946
1.84 2.46 0 0.000127946
1.84 2.76 0 0.000127946
1.84 3.68 0 0.000127946
2.31 2.31 0 0.000127946
2.31 2.46 0 0.000127946
2.31 2.76 0 0.000127946
2.31 3.68 0 0.000127946
2.46 2.46 0 0.000127946
2.46 2.76 0 0.000127946
2.46 3.68 0 0.000127946
2.76 2.76 0 0.000127946
2.76 3.68 0 0.000127946
3.68 0 3.68 0.000127946
END DIST

Metal 5 RESOVER 1
DIST count 0 width 0.3
END DIST

Metal 5 RESOVER 2
DIST count 0 width 0.3
END DIST

Metal 5 RESOVER 3
DIST count 0 width 0.3
END DIST

Metal 5 RESOVER 4
DIST count 0 width 0.3
END DIST

Metal 5 OVER
WIDTH Table 1 entries:  0.3

Metal 5 OVER 0
DIST count 12 width 0.3
0.3 0.000564893 7.1329e-06 6.39731e-05
0.6 0.000316187 9.27182e-06 6.39731e-05
0.75 0.000262809 1.03318e-05 6.39731e-05
0.9 0.00022587 1.13843e-05 6.39731e-05
1.05 0.000198589 1.24283e-05 6.39731e-05
1.2 0.000177511 1.34629e-05 6.39731e-05
1.35 0.000160676 1.44873e-05 6.39731e-05
1.5 0.000146887 1.55006e-05 6.39731e-05
1.8 0.000125574 1.74902e-05 6.39731e-05
2.4 9.7645e-05 2.12978e-05 6.39731e-05
3 8.00391e-05 2.48328e-05 6.39731e-05
3.6 0 9.59227e-05 6.39731e-05
END DIST

Metal 5 OVER 1
DIST count 12 width 0.3
0.3 0.000564893 2.0078e-05 6.39731e-05
0.6 0.000316187 2.3459e-05 6.39731e-05
0.75 0.000262809 2.51364e-05 6.39731e-05
0.9 0.00022587 2.67992e-05 6.39731e-05
1.05 0.000198589 2.84511e-05 6.39731e-05
1.2 0.000177511 3.00869e-05 6.39731e-05
1.35 0.000160676 3.17058e-05 6.39731e-05
1.5 0.000146887 3.33073e-05 6.39731e-05
1.8 0.000125574 3.6453e-05 6.39731e-05
2.4 9.7645e-05 4.2474e-05 6.39731e-05
3 8.00391e-05 4.80626e-05 6.39731e-05
3.6 0 0.00012102 6.39731e-05
END DIST

Metal 5 OVER 2
DIST count 12 width 0.3
0.3 0.000564893 2.98605e-05 6.39731e-05
0.6 0.000316187 3.34137e-05 6.39731e-05
0.75 0.000262809 3.51747e-05 6.39731e-05
0.9 0.00022587 3.69243e-05 6.39731e-05
1.05 0.000198589 3.86593e-05 6.39731e-05
1.2 0.000177511 4.03759e-05 6.39731e-05
1.35 0.000160676 4.20789e-05 6.39731e-05
1.5 0.000146887 4.37624e-05 6.39731e-05
1.8 0.000125574 4.70677e-05 6.39731e-05
2.4 9.7645e-05 5.33911e-05 6.39731e-05
3 8.00391e-05 5.92634e-05 6.39731e-05
3.6 0 0.000132479 6.39731e-05
END DIST

Metal 5 OVER 3
DIST count 12 width 0.3
0.3 0.000564893 3.74225e-05 6.39731e-05
0.6 0.000316187 4.11994e-05 6.39731e-05
0.75 0.000262809 4.30695e-05 6.39731e-05
0.9 0.00022587 4.49278e-05 6.39731e-05
1.05 0.000198589 4.67711e-05 6.39731e-05
1.2 0.000177511 4.85987e-05 6.39731e-05
1.35 0.000160676 5.04071e-05 6.39731e-05
1.5 0.000146887 5.21956e-05 6.39731e-05
1.8 0.000125574 5.57073e-05 6.39731e-05
2.4 9.7645e-05 6.24304e-05 6.39731e-05
3 8.00391e-05 6.86713e-05 6.39731e-05
3.6 0 0.00014222 6.39731e-05
END DIST

Metal 5 OVER 4
DIST count 12 width 0.3
0.3 0.000564893 4.80773e-05 6.39731e-05
0.6 0.000316187 5.32594e-05 6.39731e-05
0.75 0.000262809 5.58267e-05 6.39731e-05
0.9 0.00022587 5.83764e-05 6.39731e-05
1.05 0.000198589 6.09066e-05 6.39731e-05
1.2 0.000177511 6.34123e-05 6.39731e-05
1.35 0.000160676 6.58942e-05 6.39731e-05
1.5 0.000146887 6.83487e-05 6.39731e-05
1.8 0.000125574 7.31684e-05 6.39731e-05
2.4 9.7645e-05 8.23935e-05 6.39731e-05
3 8.00391e-05 9.09573e-05 6.39731e-05
3.6 0 0.000166619 6.39731e-05
END DIST

Metal 5 UNDER
WIDTH Table 1 entries:  0.3

Metal 5 UNDER 6
DIST count 12 width 0.3
0.3 0.000564893 3.39173e-05 6.39731e-05
0.6 0.000316187 3.88103e-05 6.39731e-05
0.75 0.000262809 4.12352e-05 6.39731e-05
0.9 0.00022587 4.3643e-05 6.39731e-05
1.05 0.000198589 4.60313e-05 6.39731e-05
1.2 0.000177511 4.83981e-05 6.39731e-05
1.35 0.000160676 5.07417e-05 6.39731e-05
1.5 0.000146887 5.30596e-05 6.39731e-05
1.8 0.000125574 5.76111e-05 6.39731e-05
2.4 9.7645e-05 6.63216e-05 6.39731e-05
3 8.00391e-05 7.44083e-05 6.39731e-05
3.6 0 0.000149636 6.39731e-05
END DIST

Metal 5 DIAGUNDER
WIDTH Table 1 entries:  0.3

Metal 5 DIAGUNDER 6
DIST count 13 width 0.3
0 0 6.81606e-05 6.39731e-05
0.3 0 0 6.39731e-05
0.6 0 0 6.39731e-05
0.75 0 0 6.39731e-05
0.9 0 0 6.39731e-05
1.05 0 0 6.39731e-05
1.2 0 0 6.39731e-05
1.35 0 0 6.39731e-05
1.5 0 0 6.39731e-05
1.8 0 0 6.39731e-05
2.4 0 0 6.39731e-05
3 0 0 6.39731e-05
3.6 0 0 6.39731e-05
END DIST

Metal 5 OVERUNDER
WIDTH Table 1 entries:  0.3

Metal 5 OVER 1 UNDER 6
DIST count 12 width 0.3
0.3 0.000564893 4.68624e-05 6.39731e-05
0.6 0.000316187 5.29975e-05 6.39731e-05
0.75 0.000262809 5.60398e-05 6.39731e-05
0.9 0.00022587 5.90579e-05 6.39731e-05
1.05 0.000198589 6.20541e-05 6.39731e-05
1.2 0.000177511 6.50221e-05 6.39731e-05
1.35 0.000160676 6.79601e-05 6.39731e-05
1.5 0.000146887 7.08663e-05 6.39731e-05
1.8 0.000125574 7.65739e-05 6.39731e-05
2.4 9.7645e-05 8.74978e-05 6.39731e-05
3 8.00391e-05 9.76381e-05 6.39731e-05
3.6 0 0.000174733 6.39731e-05
END DIST

Metal 5 OVER 2 UNDER 6
DIST count 12 width 0.3
0.3 0.000564893 5.66449e-05 6.39731e-05
0.6 0.000316187 6.29523e-05 6.39731e-05
0.75 0.000262809 6.60781e-05 6.39731e-05
0.9 0.00022587 6.9183e-05 6.39731e-05
1.05 0.000198589 7.22623e-05 6.39731e-05
1.2 0.000177511 7.53112e-05 6.39731e-05
1.35 0.000160676 7.83333e-05 6.39731e-05
1.5 0.000146887 8.13214e-05 6.39731e-05
1.8 0.000125574 8.71886e-05 6.39731e-05
2.4 9.7645e-05 9.84149e-05 6.39731e-05
3 8.00391e-05 0.000108839 6.39731e-05
3.6 0 0.000186193 6.39731e-05
END DIST

Metal 5 OVER 3 UNDER 6
DIST count 12 width 0.3
0.3 0.000564893 6.42069e-05 6.39731e-05
0.6 0.000316187 7.07379e-05 6.39731e-05
0.75 0.000262809 7.39729e-05 6.39731e-05
0.9 0.00022587 7.71866e-05 6.39731e-05
1.05 0.000198589 8.03741e-05 6.39731e-05
1.2 0.000177511 8.35339e-05 6.39731e-05
1.35 0.000160676 8.66615e-05 6.39731e-05
1.5 0.000146887 8.97546e-05 6.39731e-05
1.8 0.000125574 9.58281e-05 6.39731e-05
2.4 9.7645e-05 0.000107454 6.39731e-05
3 8.00391e-05 0.000118247 6.39731e-05
3.6 0 0.000195934 6.39731e-05
END DIST

Metal 5 OVER 4 UNDER 6
DIST count 12 width 0.3
0.3 0.000564893 7.48617e-05 6.39731e-05
0.6 0.000316187 8.27979e-05 6.39731e-05
0.75 0.000262809 8.67301e-05 6.39731e-05
0.9 0.00022587 9.06352e-05 6.39731e-05
1.05 0.000198589 9.45096e-05 6.39731e-05
1.2 0.000177511 9.83475e-05 6.39731e-05
1.35 0.000160676 0.000102149 6.39731e-05
1.5 0.000146887 0.000105908 6.39731e-05
1.8 0.000125574 0.000113289 6.39731e-05
2.4 9.7645e-05 0.000127417 6.39731e-05
3 8.00391e-05 0.000140533 6.39731e-05
3.6 0 0.000220332 6.39731e-05
END DIST

Metal 6 RESOVER
WIDTH Table 1 entries:  1.6

Metal 6 RESOVER 0
DIST count 55 width 1.6
0 0 0 1.32576e-05
0 1.8 0 1.32576e-05
0 3.4 0 1.32576e-05
0 4.4 0 1.32576e-05
0 5.2 0 1.32576e-05
0 6.8 0 1.32576e-05
0 7.8 0 1.32576e-05
0 8.6 0 1.32576e-05
0 10.2 0 1.32576e-05
0 13.6 0 1.32576e-05
1.8 1.8 0 1.32576e-05
1.8 3.4 0 1.32576e-05
1.8 4.4 0 1.32576e-05
1.8 5.2 0 1.32576e-05
1.8 6.8 0 1.32576e-05
1.8 7.8 0 1.32576e-05
1.8 8.6 0 1.32576e-05
1.8 10.2 0 1.32576e-05
1.8 13.6 0 1.32576e-05
3.4 3.4 0 1.32576e-05
3.4 4.4 0 1.32576e-05
3.4 5.2 0 1.32576e-05
3.4 6.8 0 1.32576e-05
3.4 7.8 0 1.32576e-05
3.4 8.6 0 1.32576e-05
3.4 10.2 0 1.32576e-05
3.4 13.6 0 1.32576e-05
4.4 4.4 0 1.32576e-05
4.4 5.2 0 1.32576e-05
4.4 6.8 0 1.32576e-05
4.4 7.8 0 1.32576e-05
4.4 8.6 0 1.32576e-05
4.4 10.2 0 1.32576e-05
4.4 13.6 0 1.32576e-05
5.2 5.2 0 1.32576e-05
5.2 6.8 0 1.32576e-05
5.2 7.8 0 1.32576e-05
5.2 8.6 0 1.32576e-05
5.2 10.2 0 1.32576e-05
5.2 13.6 0 1.32576e-05
6.8 6.8 0 1.32576e-05
6.8 7.8 0 1.32576e-05
6.8 8.6 0 1.32576e-05
6.8 10.2 0 1.32576e-05
6.8 13.6 0 1.32576e-05
7.8 7.8 0 1.32576e-05
7.8 8.6 0 1.32576e-05
7.8 10.2 0 1.32576e-05
7.8 13.6 0 1.32576e-05
8.6 8.6 0 1.32576e-05
8.6 10.2 0 1.32576e-05
8.6 13.6 0 1.32576e-05
10.2 10.2 0 1.32576e-05
10.2 13.6 0 1.32576e-05
13.6 0 13.6 1.32576e-05
END DIST

Metal 6 RESOVER 1
DIST count 0 width 1.6
END DIST

Metal 6 RESOVER 2
DIST count 0 width 1.6
END DIST

Metal 6 RESOVER 3
DIST count 0 width 1.6
END DIST

Metal 6 RESOVER 4
DIST count 0 width 1.6
END DIST

Metal 6 RESOVER 5
DIST count 0 width 1.6
END DIST

Metal 6 OVER
WIDTH Table 1 entries:  1.6

Metal 6 OVER 0
DIST count 12 width 1.6
1.6 0.000211767 2.78794e-05 6.62879e-06
3.2 0.000119107 3.59192e-05 6.62879e-06
4 9.88591e-05 3.88608e-05 6.62879e-06
4.8 5.34764e-05 3.725e-05 6.62879e-06
5.6 4.5837e-05 4.04672e-05 6.62879e-06
6.4 4.01073e-05 4.28232e-05 6.62879e-06
7.2 3.5651e-05 4.42598e-05 6.62879e-06
8 0 4.47418e-05 6.62879e-06
9.6 0 4.47418e-05 6.62879e-06
12.8 0 4.47418e-05 6.62879e-06
16 0 4.47418e-05 6.62879e-06
19.2 0 4.47418e-05 6.62879e-06
END DIST

Metal 6 OVER 1
DIST count 12 width 1.6
1.6 0.000211767 8.17344e-05 6.62879e-06
3.2 0.000119107 9.42758e-05 6.62879e-06
4 9.88591e-05 9.88616e-05 6.62879e-06
4.8 5.34764e-05 9.63501e-05 6.62879e-06
5.6 4.5837e-05 0.000101368 6.62879e-06
6.4 4.01073e-05 0.000105043 6.62879e-06
7.2 3.5651e-05 0.000107283 6.62879e-06
8 0 0.000108035 6.62879e-06
9.6 0 0.000108035 6.62879e-06
12.8 0 0.000108035 6.62879e-06
16 0 0.000108035 6.62879e-06
19.2 0 0.000108035 6.62879e-06
END DIST

Metal 6 OVER 2
DIST count 12 width 1.6
1.6 0.000211767 0.000117965 6.62879e-06
3.2 0.000119107 0.000130923 6.62879e-06
4 9.88591e-05 0.000135666 6.62879e-06
4.8 5.34764e-05 0.000133071 6.62879e-06
5.6 4.5837e-05 0.000138256 6.62879e-06
6.4 4.01073e-05 0.000142054 6.62879e-06
7.2 3.5651e-05 0.00014437 6.62879e-06
8 0 0.000145146 6.62879e-06
9.6 0 0.000145146 6.62879e-06
12.8 0 0.000145146 6.62879e-06
16 0 0.000145146 6.62879e-06
19.2 0 0.000145146 6.62879e-06
END DIST

Metal 6 OVER 3
DIST count 12 width 1.6
1.6 0.000211767 0.000142564 6.62879e-06
3.2 0.000119107 0.000156021 6.62879e-06
4 9.88591e-05 0.000160945 6.62879e-06
4.8 5.34764e-05 0.000158249 6.62879e-06
5.6 4.5837e-05 0.000163635 6.62879e-06
6.4 4.01073e-05 0.000167577 6.62879e-06
7.2 3.5651e-05 0.000169981 6.62879e-06
8 0 0.000170789 6.62879e-06
9.6 0 0.000170789 6.62879e-06
12.8 0 0.000170789 6.62879e-06
16 0 0.000170789 6.62879e-06
19.2 0 0.000170789 6.62879e-06
END DIST

Metal 6 OVER 4
DIST count 12 width 1.6
1.6 0.000211767 0.00014017 6.62879e-06
3.2 0.000119107 0.000155397 6.62879e-06
4 9.88591e-05 0.000160967 6.62879e-06
4.8 5.34764e-05 0.000157918 6.62879e-06
5.6 4.5837e-05 0.000164009 6.62879e-06
6.4 4.01073e-05 0.000168472 6.62879e-06
7.2 3.5651e-05 0.000171192 6.62879e-06
8 0 0.000172105 6.62879e-06
9.6 0 0.000172105 6.62879e-06
12.8 0 0.000172105 6.62879e-06
16 0 0.000172105 6.62879e-06
19.2 0 0.000172105 6.62879e-06
END DIST

Metal 6 OVER 5
DIST count 12 width 1.6
1.6 0.000211767 0.000250386 6.62879e-06
3.2 0.000119107 0.000271546 6.62879e-06
4 9.88591e-05 0.000279288 6.62879e-06
4.8 5.34764e-05 0.000275048 6.62879e-06
5.6 4.5837e-05 0.000283515 6.62879e-06
6.4 4.01073e-05 0.000289715 6.62879e-06
7.2 3.5651e-05 0.000293496 6.62879e-06
8 0 0.000294765 6.62879e-06
9.6 0 0.000294765 6.62879e-06
12.8 0 0.000294765 6.62879e-06
16 0 0.000294765 6.62879e-06
19.2 0 0.000294765 6.62879e-06
END DIST

Metal 6 UNDER
WIDTH Table 0 entries: 

Metal 6 DIAGUNDER
WIDTH Table 0 entries: 
END DensityModel 0