Added a fix for the operation condition in one of the sky130 HVL standard cell library liberty files. Added the OpenRCX rule decks for sky130A derived from Calibre extraction decks (specifically, from SPEF files produced for Efabless by SkyWater and approved for public release).
diff --git a/VERSION b/VERSION index 1e12fc6..425236c 100644 --- a/VERSION +++ b/VERSION
@@ -1 +1 @@ -1.0.337 +1.0.338
diff --git a/sky130/Makefile.in b/sky130/Makefile.in index 5ed5d4b..d835693 100644 --- a/sky130/Makefile.in +++ b/sky130/Makefile.in
@@ -1441,6 +1441,7 @@ -lib %l/latest/timing/*.lib filter=custom/scripts/add_wireloads.py \ filter=custom/scripts/fix_default_fanout_load.py \ filter=custom/scripts/fix_related_bias_pins.py \ + filter=custom/scripts/fix_mismatched_opcond.py \ -gds %l/latest/cells/*/*.gds compile-only \ include=custom/sky130_fd_sc_hvl/gds/sky130_ef*.gds \ options=custom/scripts/gds_import_setup.tcl \
diff --git a/sky130/custom/scripts/fix_mismatched_opcond.py b/sky130/custom/scripts/fix_mismatched_opcond.py new file mode 100755 index 0000000..42fd7ea --- /dev/null +++ b/sky130/custom/scripts/fix_mismatched_opcond.py
@@ -0,0 +1,106 @@ +#!/usr/bin/env python3 +# +# fix_mismatched_opcond.py --- +# +# Fixes an error that appers in the HVL library only. +# There is at least one example in one file where the string passed to +# the statement "operating_conditions(...)" does not match the string +# previously passed to the statement "default_operating_conditions : ...". +# This causes some tools to throw an error. Fixed by remembering the +# default operating condition name and correcting the operating condition +# name if it does not match the default. +# +# This script is a filter to be run by setting the name of this script as +# the value to "filter=" for the lib install in the sky130 Makefile. + +import re +import os +import sys + +def filter(inname, outname): + + # Read input + try: + with open(inname, 'r') as inFile: + stext = inFile.read() + slines = stext.splitlines() + except: + print('fix_mismatched_opcond.py: failed to open ' + inname + ' for reading.', file=sys.stderr) + return 1 + + # Process input with regexp + + fixedlines = [] + modified = False + + default_re = re.compile('\s*default_operating_conditions\s*:\s*"(.+)"\s*;') + opcond_re = re.compile('\s*operating_conditions\s*\(\s*"(.+)"\s*\)\s*{') + + opcond_default_name = None + + for line in slines: + dmatch = default_re.match(line) + if dmatch: + opcond_default_name = dmatch.group(1) + + omatch = opcond_re.match(line) + if omatch: + opcond_name = omatch.group(1) + if not opcond_default_name: + print('Error: operating condition used without a default') + elif (opcond_name != opcond_default_name): + # Diagnostic + print('Found non-matching names ' + opcond_default_name + ' and ' + opcond_name) + modified = True + line = line.replace(opcond_name, opcond_default_name) + opcond_default_name = '' + + fixedlines.append(line) + + # Write output + if outname == None: + for i in fixedlines: + print(i) + else: + # If the output is a symbolic link but no modifications have been made, + # then leave it alone. If it was modified, then remove the symbolic + # link before writing. + if os.path.islink(outname): + if not modified: + return 0 + else: + os.unlink(outname) + try: + with open(outname, 'w') as outFile: + for i in fixedlines: + print(i, file=outFile) + except: + print('fix_mismatched_opcond.py: failed to open ' + outname + ' for writing.', file=sys.stderr) + return 1 + + +if __name__ == '__main__': + + # This script expects to get one or two arguments. One argument is + # mandatory and is the input file. The other argument is optional and + # is the output file. The output file and input file may be the same + # name, in which case the original input is overwritten. + + options = [] + arguments = [] + for item in sys.argv[1:]: + if item.find('-', 0) == 0: + options.append(item[1:]) + else: + arguments.append(item) + + if len(arguments) > 0: + infilename = arguments[0] + + if len(arguments) > 1: + outfilename = arguments[1] + else: + outfilename = None + + result = filter(infilename, outfilename) + sys.exit(result)
diff --git a/sky130/openlane/rules.openrcx.sky130A.max.calibre b/sky130/openlane/rules.openrcx.sky130A.max.calibre new file mode 100644 index 0000000..c4c9a4a --- /dev/null +++ b/sky130/openlane/rules.openrcx.sky130A.max.calibre
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2.17741e-05 0.000832338 +0.14 0 2.02217e-05 0.000832338 +0.28 0 1.89142e-05 0.000832338 +0.35 0 1.84404e-05 0.000832338 +0.42 0 1.79774e-05 0.000832338 +0.49 0 1.7525e-05 0.000832338 +0.56 0 1.70831e-05 0.000832338 +0.63 0 1.66516e-05 0.000832338 +0.7 0 1.62303e-05 0.000832338 +0.84 0 1.54182e-05 0.000832338 +1.12 0 1.39134e-05 0.000832338 +1.4 0 1.25614e-05 0.000832338 +1.68 0 1.03615e-05 0.000832338 +END DIST + +Metal 2 DIAGUNDER 5 +DIST count 13 width 0.14 +0 0 1.17756e-05 0.000832338 +0.14 0 1.20729e-05 0.000832338 +0.28 0 1.17086e-05 0.000832338 +0.35 0 1.15616e-05 0.000832338 +0.42 0 1.14156e-05 0.000832338 +0.49 0 1.12707e-05 0.000832338 +0.56 0 1.11269e-05 0.000832338 +0.63 0 1.09844e-05 0.000832338 +0.7 0 1.08433e-05 0.000832338 +0.84 0 1.05656e-05 0.000832338 +1.12 0 1.00307e-05 0.000832338 +1.4 0 9.52625e-06 0.000832338 +1.68 0 7.61017e-06 0.000832338 +END DIST + +Metal 2 DIAGUNDER 6 +DIST count 13 width 0.14 +0 0 8.84935e-06 0.000832338 +0.14 0 8.44784e-06 0.000832338 +0.28 0 8.27067e-06 0.000832338 +0.35 0 8.18348e-06 0.000832338 +0.42 0 8.09719e-06 0.000832338 +0.49 0 8.01183e-06 0.000832338 +0.56 0 7.92734e-06 0.000832338 +0.63 0 7.84376e-06 0.000832338 +0.7 0 7.76108e-06 0.000832338 +0.84 0 7.59827e-06 0.000832338 +1.12 0 7.2829e-06 0.000832338 +1.4 0 6.9807e-06 0.000832338 +1.68 0 6.72128e-06 0.000832338 +END DIST + +Metal 2 OVERUNDER +WIDTH Table 1 entries: 0.14 + +Metal 2 OVER 1 UNDER 3 +DIST count 12 width 0.14 +0.14 9.16312e-05 4.83828e-05 0.000832338 +0.28 7.15355e-05 5.96958e-05 0.000832338 +0.35 5.88831e-05 6.40766e-05 0.000832338 +0.42 4.93702e-05 6.78074e-05 0.000832338 +0.49 4.14247e-05 7.10214e-05 0.000832338 +0.56 3.46828e-05 7.38027e-05 0.000832338 +0.63 3.00555e-05 7.61571e-05 0.000832338 +0.7 2.62729e-05 7.81686e-05 0.000832338 +0.84 2.03317e-05 8.14855e-05 0.000832338 +1.12 1.29742e-05 8.59738e-05 0.000832338 +1.4 9.49118e-06 8.86532e-05 0.000832338 +1.68 0 9.76885e-05 0.000832338 +END DIST + +Metal 2 OVER 1 UNDER 4 +DIST count 12 width 0.14 +0.14 9.78867e-05 2.71849e-05 0.000832338 +0.28 7.89577e-05 3.4212e-05 0.000832338 +0.35 6.69091e-05 3.71813e-05 0.000832338 +0.42 5.7448e-05 3.98572e-05 0.000832338 +0.49 4.92039e-05 4.22768e-05 0.000832338 +0.56 4.19635e-05 4.44645e-05 0.000832338 +0.63 3.6746e-05 4.64166e-05 0.000832338 +0.7 3.23447e-05 4.82516e-05 0.000832338 +0.84 2.5216e-05 5.13948e-05 0.000832338 +1.12 1.60142e-05 5.6215e-05 0.000832338 +1.4 1.13972e-05 5.95394e-05 0.000832338 +1.68 0 7.04225e-05 0.000832338 +END DIST + +Metal 2 OVER 1 UNDER 5 +DIST count 12 width 0.14 +0.14 0.000101706 2.50434e-05 0.000832338 +0.28 7.96482e-05 3.10585e-05 0.000832338 +0.35 6.87431e-05 3.36087e-05 0.000832338 +0.42 6.00561e-05 3.59373e-05 0.000832338 +0.49 5.23432e-05 3.80842e-05 0.000832338 +0.56 4.5418e-05 4.00659e-05 0.000832338 +0.63 4.03375e-05 4.1842e-05 0.000832338 +0.7 3.59528e-05 4.34769e-05 0.000832338 +0.84 2.86355e-05 4.63862e-05 0.000832338 +1.12 1.87189e-05 5.09561e-05 0.000832338 +1.4 1.34077e-05 5.42133e-05 0.000832338 +1.68 0 6.66555e-05 0.000832338 +END DIST + +Metal 2 OVER 1 UNDER 6 +DIST count 12 width 0.14 +0.14 0.000102072 2.40548e-05 0.000832338 +0.28 7.98149e-05 2.97337e-05 0.000832338 +0.35 6.90946e-05 3.21609e-05 0.000832338 +0.42 6.04816e-05 3.44021e-05 0.000832338 +0.49 5.28124e-05 3.64722e-05 0.000832338 +0.56 4.5996e-05 3.83864e-05 0.000832338 +0.63 4.08937e-05 4.01088e-05 0.000832338 +0.7 3.64809e-05 4.16974e-05 0.000832338 +0.84 2.91256e-05 4.45313e-05 0.000832338 +1.12 1.91354e-05 4.90102e-05 0.000832338 +1.4 1.36988e-05 5.22366e-05 0.000832338 +1.68 0 6.49048e-05 0.000832338 +END DIST + +Metal 3 RESOVER +WIDTH Table 1 entries: 0.14 + +Metal 3 RESOVER 0 +DIST count 55 width 0.14 +0 0 0 0.00166468 +0 0.32 0 0.00166468 +0 0.46 0 0.00166468 +0 0.71 0 0.00166468 +0 0.78 0 0.00166468 +0 0.92 0 0.00166468 +0 1.17 0 0.00166468 +0 1.24 0 0.00166468 +0 1.38 0 0.00166468 +0 1.84 0 0.00166468 +0.32 0.32 0 0.00166468 +0.32 0.46 0 0.00166468 +0.32 0.71 0 0.00166468 +0.32 0.78 0 0.00166468 +0.32 0.92 0 0.00166468 +0.32 1.17 0 0.00166468 +0.32 1.24 0 0.00166468 +0.32 1.38 0 0.00166468 +0.32 1.84 0 0.00166468 +0.46 0.46 0 0.00166468 +0.46 0.71 0 0.00166468 +0.46 0.78 0 0.00166468 +0.46 0.92 0 0.00166468 +0.46 1.17 0 0.00166468 +0.46 1.24 0 0.00166468 +0.46 1.38 0 0.00166468 +0.46 1.84 0 0.00166468 +0.71 0.71 0 0.00166468 +0.71 0.78 0 0.00166468 +0.71 0.92 0 0.00166468 +0.71 1.17 0 0.00166468 +0.71 1.24 0 0.00166468 +0.71 1.38 0 0.00166468 +0.71 1.84 0 0.00166468 +0.78 0.78 0 0.00166468 +0.78 0.92 0 0.00166468 +0.78 1.17 0 0.00166468 +0.78 1.24 0 0.00166468 +0.78 1.38 0 0.00166468 +0.78 1.84 0 0.00166468 +0.92 0.92 0 0.00166468 +0.92 1.17 0 0.00166468 +0.92 1.24 0 0.00166468 +0.92 1.38 0 0.00166468 +0.92 1.84 0 0.00166468 +1.17 1.17 0 0.00166468 +1.17 1.24 0 0.00166468 +1.17 1.38 0 0.00166468 +1.17 1.84 0 0.00166468 +1.24 1.24 0 0.00166468 +1.24 1.38 0 0.00166468 +1.24 1.84 0 0.00166468 +1.38 1.38 0 0.00166468 +1.38 1.84 0 0.00166468 +1.84 0 1.84 0.00166468 +END DIST + +Metal 3 RESOVER 1 +DIST count 0 width 0.14 +END DIST + +Metal 3 RESOVER 2 +DIST count 0 width 0.14 +END DIST + +Metal 3 OVER +WIDTH Table 1 entries: 0.14 + +Metal 3 OVER 0 +DIST count 12 width 0.14 +0.14 9.95886e-05 8.66356e-06 0.000832338 +0.28 8.88255e-05 1.07302e-05 0.000832338 +0.35 7.64461e-05 1.1588e-05 0.000832338 +0.42 6.85752e-05 1.23733e-05 0.000832338 +0.49 6.06429e-05 1.31587e-05 0.000832338 +0.56 5.26489e-05 1.39442e-05 0.000832338 +0.63 4.94297e-05 1.45637e-05 0.000832338 +0.7 4.6624e-05 1.51688e-05 0.000832338 +0.84 4.09834e-05 1.63789e-05 0.000832338 +1.12 3.1956e-05 1.85702e-05 0.000832338 +1.4 2.76576e-05 2.02986e-05 0.000832338 +1.68 0 4.53683e-05 0.000832338 +END DIST + +Metal 3 OVER 1 +DIST count 12 width 0.14 +0.14 0.000104304 1.24143e-05 0.000832338 +0.28 8.58519e-05 1.50557e-05 0.000832338 +0.35 7.46018e-05 1.62531e-05 0.000832338 +0.42 6.62952e-05 1.73825e-05 0.000832338 +0.49 5.86663e-05 1.84787e-05 0.000832338 +0.56 5.14868e-05 1.95418e-05 0.000832338 +0.63 4.70264e-05 2.049e-05 0.000832338 +0.7 4.31361e-05 2.13995e-05 0.000832338 +0.84 3.62643e-05 2.31288e-05 0.000832338 +1.12 2.63053e-05 2.61498e-05 0.000832338 +1.4 2.09504e-05 2.85727e-05 0.000832338 +1.68 0 4.76184e-05 0.000832338 +END DIST + +Metal 3 OVER 2 +DIST count 12 width 0.14 +0.14 9.74722e-05 3.19418e-05 0.000832338 +0.28 7.89221e-05 3.80116e-05 0.000832338 +0.35 6.76034e-05 4.05568e-05 0.000832338 +0.42 5.93207e-05 4.28353e-05 0.000832338 +0.49 5.16775e-05 4.49083e-05 0.000832338 +0.56 4.45688e-05 4.67977e-05 0.000832338 +0.63 4.03176e-05 4.84407e-05 0.000832338 +0.7 3.66832e-05 4.99304e-05 0.000832338 +0.84 3.03851e-05 5.25343e-05 0.000832338 +1.12 2.16109e-05 5.64694e-05 0.000832338 +1.4 1.72873e-05 5.91142e-05 0.000832338 +1.68 0 7.51029e-05 0.000832338 +END DIST + +Metal 3 UNDER +WIDTH Table 1 entries: 0.14 + +Metal 3 UNDER 4 +DIST count 12 width 0.14 +0.14 0.000101016 2.08629e-05 0.000832338 +0.28 8.19589e-05 2.60984e-05 0.000832338 +0.35 7.03318e-05 2.83425e-05 0.000832338 +0.42 6.17297e-05 3.03832e-05 0.000832338 +0.49 5.37774e-05 3.22723e-05 0.000832338 +0.56 4.6375e-05 3.40238e-05 0.000832338 +0.63 4.18411e-05 3.55671e-05 0.000832338 +0.7 3.79445e-05 3.69898e-05 0.000832338 +0.84 3.11871e-05 3.95359e-05 0.000832338 +1.12 2.17322e-05 4.35534e-05 0.000832338 +1.4 1.69792e-05 4.6406e-05 0.000832338 +1.68 0 6.20739e-05 0.000832338 +END DIST + +Metal 3 UNDER 5 +DIST count 12 width 0.14 +0.14 0.000104879 1.12334e-05 0.000832338 +0.28 8.70303e-05 1.38459e-05 0.000832338 +0.35 7.58063e-05 1.5012e-05 0.000832338 +0.42 6.74807e-05 1.61091e-05 0.000832338 +0.49 5.97401e-05 1.71751e-05 0.000832338 +0.56 5.24814e-05 1.82113e-05 0.000832338 +0.63 4.79516e-05 1.91357e-05 0.000832338 +0.7 4.39747e-05 2.00256e-05 0.000832338 +0.84 3.68908e-05 2.17287e-05 0.000832338 +1.12 2.64776e-05 2.47429e-05 0.000832338 +1.4 2.07485e-05 2.72066e-05 0.000832338 +1.68 0 4.58318e-05 0.000832338 +END DIST + +Metal 3 UNDER 6 +DIST count 12 width 0.14 +0.14 0.000105704 9.54545e-06 0.000832338 +0.28 8.75336e-05 1.17605e-05 0.000832338 +0.35 7.66148e-05 1.27537e-05 0.000832338 +0.42 6.84415e-05 1.36923e-05 0.000832338 +0.49 6.0798e-05 1.46104e-05 0.000832338 +0.56 5.36626e-05 1.55089e-05 0.000832338 +0.63 4.915e-05 1.63118e-05 0.000832338 +0.7 4.51725e-05 1.70897e-05 0.000832338 +0.84 3.80901e-05 1.8593e-05 0.000832338 +1.12 2.7607e-05 2.13009e-05 0.000832338 +1.4 2.16677e-05 2.35667e-05 0.000832338 +1.68 0 4.28474e-05 0.000832338 +END DIST + +Metal 3 DIAGUNDER +WIDTH Table 1 entries: 0.14 + +Metal 3 DIAGUNDER 4 +DIST count 13 width 0.14 +0 0 4.46265e-05 0.000832338 +0.14 0 4.0557e-05 0.000832338 +0.28 0 3.8065e-05 0.000832338 +0.35 0 3.64345e-05 0.000832338 +0.42 0 3.14032e-05 0.000832338 +0.49 0 2.72764e-05 0.000832338 +0.56 0 2.5971e-05 0.000832338 +0.63 0 2.47473e-05 0.000832338 +0.7 0 2.36003e-05 0.000832338 +0.84 0 2.15173e-05 0.000832338 +1.12 0 1.80784e-05 0.000832338 +1.4 0 1.54233e-05 0.000832338 +1.68 0 1.26967e-05 0.000832338 +END DIST + +Metal 3 DIAGUNDER 5 +DIST count 13 width 0.14 +0 0 1.69077e-05 0.000832338 +0.14 0 1.86431e-05 0.000832338 +0.28 0 1.92808e-05 0.000832338 +0.35 0 1.90321e-05 0.000832338 +0.42 0 1.67663e-05 0.000832338 +0.49 0 1.39428e-05 0.000832338 +0.56 0 1.37435e-05 0.000832338 +0.63 0 1.35469e-05 0.000832338 +0.7 0 1.33526e-05 0.000832338 +0.84 0 1.29715e-05 0.000832338 +1.12 0 1.22379e-05 0.000832338 +1.4 0 1.15426e-05 0.000832338 +1.68 0 9.48553e-06 0.000832338 +END DIST + +Metal 3 DIAGUNDER 6 +DIST count 13 width 0.14 +0 0 1.17303e-05 0.000832338 +0.14 0 1.09065e-05 0.000832338 +0.28 0 1.06645e-05 0.000832338 +0.35 0 1.05456e-05 0.000832338 +0.42 0 1.0428e-05 0.000832338 +0.49 0 1.03117e-05 0.000832338 +0.56 0 1.01968e-05 0.000832338 +0.63 0 1.00831e-05 0.000832338 +0.7 0 9.97074e-06 0.000832338 +0.84 0 9.74978e-06 0.000832338 +1.12 0 9.32269e-06 0.000832338 +1.4 0 8.91461e-06 0.000832338 +1.68 0 8.58258e-06 0.000832338 +END DIST + +Metal 3 OVERUNDER +WIDTH Table 1 entries: 0.14 + +Metal 3 OVER 1 UNDER 4 +DIST count 12 width 0.14 +0.14 9.98904e-05 2.38062e-05 0.000832338 +0.28 8.04004e-05 2.99128e-05 0.000832338 +0.35 6.83128e-05 3.25357e-05 0.000832338 +0.42 5.88251e-05 3.49155e-05 0.000832338 +0.49 5.06173e-05 3.70915e-05 0.000832338 +0.56 4.34045e-05 3.90832e-05 0.000832338 +0.63 3.81788e-05 4.08668e-05 0.000832338 +0.7 3.37634e-05 4.24964e-05 0.000832338 +0.84 2.6603e-05 4.53622e-05 0.000832338 +1.12 1.7322e-05 4.97863e-05 0.000832338 +1.4 1.26038e-05 5.28952e-05 0.000832338 +1.68 0 6.47983e-05 0.000832338 +END DIST + +Metal 3 OVER 1 UNDER 5 +DIST count 12 width 0.14 +0.14 0.000106706 1.43626e-05 0.000832338 +0.28 8.45202e-05 1.77099e-05 0.000832338 +0.35 7.37471e-05 1.92389e-05 0.000832338 +0.42 6.51256e-05 2.06827e-05 0.000832338 +0.49 5.74484e-05 2.20619e-05 0.000832338 +0.56 5.051e-05 2.33794e-05 0.000832338 +0.63 4.53154e-05 2.4596e-05 0.000832338 +0.7 4.07788e-05 2.5753e-05 0.000832338 +0.84 3.31007e-05 2.79097e-05 0.000832338 +1.12 2.2391e-05 3.16096e-05 0.000832338 +1.4 1.63545e-05 3.45736e-05 0.000832338 +1.68 0 4.94135e-05 0.000832338 +END DIST + +Metal 3 OVER 1 UNDER 6 +DIST count 12 width 0.14 +0.14 0.000107257 1.25961e-05 0.000832338 +0.28 8.50387e-05 1.55389e-05 0.000832338 +0.35 7.44496e-05 1.68954e-05 0.000832338 +0.42 6.59804e-05 1.81836e-05 0.000832338 +0.49 5.84182e-05 1.94208e-05 0.000832338 +0.56 5.15984e-05 2.06088e-05 0.000832338 +0.63 4.6428e-05 2.1712e-05 0.000832338 +0.7 4.18969e-05 2.27664e-05 0.000832338 +0.84 3.42172e-05 2.4747e-05 0.000832338 +1.12 2.34268e-05 2.81963e-05 0.000832338 +1.4 1.72081e-05 3.10183e-05 0.000832338 +1.68 0 4.65119e-05 0.000832338 +END DIST + +Metal 3 OVER 2 UNDER 4 +DIST count 12 width 0.14 +0.14 9.3616e-05 4.26796e-05 0.000832338 +0.28 7.3434e-05 5.26539e-05 0.000832338 +0.35 6.09343e-05 5.66103e-05 0.000832338 +0.42 5.14512e-05 6.0024e-05 0.000832338 +0.49 4.34448e-05 6.29933e-05 0.000832338 +0.56 3.65907e-05 6.55853e-05 0.000832338 +0.63 3.18522e-05 6.78135e-05 0.000832338 +0.7 2.79527e-05 6.98356e-05 0.000832338 +0.84 2.17852e-05 7.30656e-05 0.000832338 +1.12 1.40767e-05 7.74868e-05 0.000832338 +1.4 1.03767e-05 8.02763e-05 0.000832338 +1.68 0 9.02052e-05 0.000832338 +END DIST + +Metal 3 OVER 2 UNDER 5 +DIST count 12 width 0.14 +0.14 0.000100192 3.34231e-05 0.000832338 +0.28 7.77168e-05 4.03124e-05 0.000832338 +0.35 6.68169e-05 4.32051e-05 0.000832338 +0.42 5.81934e-05 4.5792e-05 0.000832338 +0.49 5.05642e-05 4.81243e-05 0.000832338 +0.56 4.37657e-05 5.02307e-05 0.000832338 +0.63 3.88286e-05 5.20946e-05 0.000832338 +0.7 3.45929e-05 5.38699e-05 0.000832338 +0.84 2.75703e-05 5.67789e-05 0.000832338 +1.12 1.81553e-05 6.10493e-05 0.000832338 +1.4 1.31873e-05 6.41123e-05 0.000832338 +1.68 0 7.62363e-05 0.000832338 +END DIST + +Metal 3 OVER 2 UNDER 6 +DIST count 12 width 0.14 +0.14 0.000100595 3.18283e-05 0.000832338 +0.28 7.817e-05 3.82687e-05 0.000832338 +0.35 6.7523e-05 4.09901e-05 0.000832338 +0.42 5.90295e-05 4.34334e-05 0.000832338 +0.49 5.14872e-05 4.56438e-05 0.000832338 +0.56 4.47782e-05 4.76466e-05 0.000832338 +0.63 3.98424e-05 4.94268e-05 0.000832338 +0.7 3.55917e-05 5.10389e-05 0.000832338 +0.84 2.85338e-05 5.38388e-05 0.000832338 +1.12 1.90023e-05 5.80749e-05 0.000832338 +1.4 1.385e-05 6.09946e-05 0.000832338 +1.68 0 7.36516e-05 0.000832338 +END DIST + +Metal 4 RESOVER +WIDTH Table 1 entries: 0.3 + +Metal 4 RESOVER 0 +DIST count 55 width 0.3 +0 0 0 0.000232242 +0 0.38 0 0.000232242 +0 0.68 0 0.000232242 +0 0.91 0 0.000232242 +0 1.06 0 0.000232242 +0 1.36 0 0.000232242 +0 1.59 0 0.000232242 +0 1.74 0 0.000232242 +0 2.04 0 0.000232242 +0 2.72 0 0.000232242 +0.38 0.38 0 0.000232242 +0.38 0.68 0 0.000232242 +0.38 0.91 0 0.000232242 +0.38 1.06 0 0.000232242 +0.38 1.36 0 0.000232242 +0.38 1.59 0 0.000232242 +0.38 1.74 0 0.000232242 +0.38 2.04 0 0.000232242 +0.38 2.72 0 0.000232242 +0.68 0.68 0 0.000232242 +0.68 0.91 0 0.000232242 +0.68 1.06 0 0.000232242 +0.68 1.36 0 0.000232242 +0.68 1.59 0 0.000232242 +0.68 1.74 0 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2.15063e-05 6.1298e-05 0.000116121 +3 1.63169e-05 6.44075e-05 0.000116121 +3.6 0 8.01409e-05 0.000116121 +END DIST + +Metal 4 UNDER +WIDTH Table 1 entries: 0.3 + +Metal 4 UNDER 5 +DIST count 12 width 0.3 +0.3 0.000101209 4.12679e-05 0.000116121 +0.6 7.1056e-05 4.97449e-05 0.000116121 +0.75 6.09797e-05 5.31621e-05 0.000116121 +0.9 5.26322e-05 5.6164e-05 0.000116121 +1.05 4.51725e-05 5.88209e-05 0.000116121 +1.2 4.02705e-05 6.10831e-05 0.000116121 +1.35 3.58892e-05 6.30945e-05 0.000116121 +1.5 3.19289e-05 6.489e-05 0.000116121 +1.8 2.51489e-05 6.79318e-05 0.000116121 +2.4 1.85595e-05 7.20386e-05 0.000116121 +3 1.37508e-05 7.4902e-05 0.000116121 +3.6 0 8.81389e-05 0.000116121 +END DIST + +Metal 4 UNDER 6 +DIST count 12 width 0.3 +0.3 0.000106735 1.33243e-05 0.000116121 +0.6 7.80598e-05 1.86359e-05 0.000116121 +0.75 6.81915e-05 2.05792e-05 0.000116121 +0.9 5.65938e-05 2.11984e-05 0.000116121 +1.05 4.93233e-05 2.28607e-05 0.000116121 +1.2 4.72428e-05 2.5668e-05 0.000116121 +1.35 3.82161e-05 2.58422e-05 0.000116121 +1.5 3.8253e-05 2.85132e-05 0.000116121 +1.8 2.62728e-05 2.96684e-05 0.000116121 +2.4 2.25213e-05 3.50434e-05 0.000116121 +3 1.64711e-05 3.83182e-05 0.000116121 +3.6 0 4.71362e-05 0.000116121 +END DIST + +Metal 4 DIAGUNDER +WIDTH Table 1 entries: 0.3 + +Metal 4 DIAGUNDER 5 +DIST count 13 width 0.3 +0 0 5.67618e-05 0.000116121 +0.3 0 4.24587e-05 0.000116121 +0.6 0 3.5862e-05 0.000116121 +0.75 0 3.29409e-05 0.000116121 +0.9 0 3.04796e-05 0.000116121 +1.05 0 2.83907e-05 0.000116121 +1.2 0 2.66045e-05 0.000116121 +1.35 0 2.50645e-05 0.000116121 +1.5 0 2.37192e-05 0.000116121 +1.8 0 1.9851e-05 0.000116121 +2.4 0 1.44978e-05 0.000116121 +3 0 1.20519e-05 0.000116121 +3.6 0 9.88667e-06 0.000116121 +END DIST + +Metal 4 DIAGUNDER 6 +DIST count 13 width 0.3 +0 0 2.76036e-05 0.000116121 +0.3 0 2.38454e-05 0.000116121 +0.6 0 2.21847e-05 0.000116121 +0.75 0 2.14482e-05 0.000116121 +0.9 0 2.07422e-05 0.000116121 +1.05 0 2.00649e-05 0.000116121 +1.2 0 1.94154e-05 0.000116121 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0.000116121 +0.75 6.39119e-05 3.01423e-05 0.000116121 +0.9 5.05081e-05 2.85857e-05 0.000116121 +1.05 4.28765e-05 3.5071e-05 0.000116121 +1.2 4.25235e-05 3.67388e-05 0.000116121 +1.35 3.14752e-05 3.91681e-05 0.000116121 +1.5 3.33463e-05 4.03147e-05 0.000116121 +1.8 2.6208e-05 4.33704e-05 0.000116121 +2.4 1.78765e-05 4.80498e-05 0.000116121 +3 7.41515e-06 5.2507e-05 0.000116121 +3.6 0 6.36853e-05 0.000116121 +END DIST + +Metal 4 OVER 3 UNDER 5 +DIST count 12 width 0.3 +0.3 9.3614e-05 6.52119e-05 0.000116121 +0.6 6.22418e-05 7.82843e-05 0.000116121 +0.75 5.18845e-05 8.31452e-05 0.000116121 +0.9 4.3617e-05 8.71976e-05 0.000116121 +1.05 3.67056e-05 9.06055e-05 0.000116121 +1.2 3.17585e-05 9.34395e-05 0.000116121 +1.35 2.76006e-05 9.58474e-05 0.000116121 +1.5 2.40592e-05 9.7906e-05 0.000116121 +1.8 1.84185e-05 0.000101202 0.000116121 +2.4 1.2666e-05 0.000105414 0.000116121 +3 9.10825e-06 0.000108008 0.000116121 +3.6 0 0.000116951 0.000116121 +END DIST + +Metal 4 OVER 3 UNDER 6 +DIST count 12 width 0.3 +0.3 9.96634e-05 3.74054e-05 0.000116121 +0.6 6.76414e-05 4.58695e-05 0.000116121 +0.75 5.92122e-05 5.03285e-05 0.000116121 +0.9 4.83733e-05 5.2384e-05 0.000116121 +1.05 4.11575e-05 5.51101e-05 0.000116121 +1.2 3.8372e-05 5.85575e-05 0.000116121 +1.35 3.04112e-05 5.96677e-05 0.000116121 +1.5 2.97104e-05 6.26593e-05 0.000116121 +1.8 2.30955e-05 6.59715e-05 0.000116121 +2.4 1.56832e-05 7.06933e-05 0.000116121 +3 7.60821e-06 7.26156e-05 0.000116121 +3.6 0 8.46603e-05 0.000116121 +END DIST + +Metal 5 RESOVER +WIDTH Table 1 entries: 0.3 + +Metal 5 RESOVER 0 +DIST count 55 width 0.3 +0 0 0 0.000232242 +0 0.62 0 0.000232242 +0 0.92 0 0.000232242 +0 1.39 0 0.000232242 +0 1.54 0 0.000232242 +0 1.84 0 0.000232242 +0 2.31 0 0.000232242 +0 2.46 0 0.000232242 +0 2.76 0 0.000232242 +0 3.68 0 0.000232242 +0.62 0.62 0 0.000232242 +0.62 0.92 0 0.000232242 +0.62 1.39 0 0.000232242 +0.62 1.54 0 0.000232242 +0.62 1.84 0 0.000232242 +0.62 2.31 0 0.000232242 +0.62 2.46 0 0.000232242 +0.62 2.76 0 0.000232242 +0.62 3.68 0 0.000232242 +0.92 0.92 0 0.000232242 +0.92 1.39 0 0.000232242 +0.92 1.54 0 0.000232242 +0.92 1.84 0 0.000232242 +0.92 2.31 0 0.000232242 +0.92 2.46 0 0.000232242 +0.92 2.76 0 0.000232242 +0.92 3.68 0 0.000232242 +1.39 1.39 0 0.000232242 +1.39 1.54 0 0.000232242 +1.39 1.84 0 0.000232242 +1.39 2.31 0 0.000232242 +1.39 2.46 0 0.000232242 +1.39 2.76 0 0.000232242 +1.39 3.68 0 0.000232242 +1.54 1.54 0 0.000232242 +1.54 1.84 0 0.000232242 +1.54 2.31 0 0.000232242 +1.54 2.46 0 0.000232242 +1.54 2.76 0 0.000232242 +1.54 3.68 0 0.000232242 +1.84 1.84 0 0.000232242 +1.84 2.31 0 0.000232242 +1.84 2.46 0 0.000232242 +1.84 2.76 0 0.000232242 +1.84 3.68 0 0.000232242 +2.31 2.31 0 0.000232242 +2.31 2.46 0 0.000232242 +2.31 2.76 0 0.000232242 +2.31 3.68 0 0.000232242 +2.46 2.46 0 0.000232242 +2.46 2.76 0 0.000232242 +2.46 3.68 0 0.000232242 +2.76 2.76 0 0.000232242 +2.76 3.68 0 0.000232242 +3.68 0 3.68 0.000232242 +END DIST + +Metal 5 RESOVER 1 +DIST count 0 width 0.3 +END 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diff --git a/sky130/openlane/rules.openrcx.sky130A.min.calibre b/sky130/openlane/rules.openrcx.sky130A.min.calibre new file mode 100644 index 0000000..c6d9def --- /dev/null +++ b/sky130/openlane/rules.openrcx.sky130A.min.calibre
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0.000468355 +END DIST + +Metal 3 DIAGUNDER 5 +DIST count 13 width 0.14 +0 0 1.54368e-05 0.000468355 +0.14 0 1.72243e-05 0.000468355 +0.28 0 1.78745e-05 0.000468355 +0.35 0 1.76878e-05 0.000468355 +0.42 0 1.75021e-05 0.000468355 +0.49 0 1.73175e-05 0.000468355 +0.56 0 1.7134e-05 0.000468355 +0.63 0 1.69516e-05 0.000468355 +0.7 0 1.67621e-05 0.000468355 +0.84 0 1.63882e-05 0.000468355 +1.12 0 1.56898e-05 0.000468355 +1.4 0 1.50178e-05 0.000468355 +1.68 0 1.08304e-05 0.000468355 +END DIST + +Metal 3 DIAGUNDER 6 +DIST count 13 width 0.14 +0 0 1.33812e-05 0.000468355 +0.14 0 1.35642e-05 0.000468355 +0.28 0 1.40116e-05 0.000468355 +0.35 0 1.39191e-05 0.000468355 +0.42 0 1.38268e-05 0.000468355 +0.49 0 1.37346e-05 0.000468355 +0.56 0 1.36426e-05 0.000468355 +0.63 0 1.35507e-05 0.000468355 +0.7 0 1.34534e-05 0.000468355 +0.84 0 1.1788e-05 0.000468355 +1.12 0 9.56525e-06 0.000468355 +1.4 0 9.28306e-06 0.000468355 +1.68 0 7.3039e-06 0.000468355 +END DIST + +Metal 3 OVERUNDER +WIDTH Table 1 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2.46723e-05 2.56514e-05 0.000468355 +1.4 1.92701e-05 2.80393e-05 0.000468355 +1.68 0 4.54973e-05 0.000468355 +END DIST + +Metal 3 OVER 1 UNDER 6 +DIST count 12 width 0.14 +0.14 9.02093e-05 1.15675e-05 0.000468355 +0.28 6.71557e-05 1.36243e-05 0.000468355 +0.35 5.9842e-05 1.45764e-05 0.000468355 +0.42 5.36728e-05 1.54959e-05 0.000468355 +0.49 4.89934e-05 1.636e-05 0.000468355 +0.56 4.50909e-05 1.71888e-05 0.000468355 +0.63 4.1613e-05 1.79909e-05 0.000468355 +0.7 3.84558e-05 1.87671e-05 0.000468355 +0.84 3.30061e-05 2.02392e-05 0.000468355 +1.12 2.57207e-05 2.27949e-05 0.000468355 +1.4 2.03275e-05 2.50283e-05 0.000468355 +1.68 0 4.33824e-05 0.000468355 +END DIST + +Metal 3 OVER 2 UNDER 4 +DIST count 12 width 0.14 +0.14 8.5325e-05 2.45991e-05 0.000468355 +0.28 6.16285e-05 3.04728e-05 0.000468355 +0.35 5.33311e-05 3.29662e-05 0.000468355 +0.42 4.6227e-05 3.52241e-05 0.000468355 +0.49 4.08034e-05 3.72452e-05 0.000468355 +0.56 3.63165e-05 3.90731e-05 0.000468355 +0.63 3.2398e-05 4.07359e-05 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4.48284e-05 2.72959e-05 0.000468355 +0.56 4.06893e-05 2.86501e-05 0.000468355 +0.63 3.70201e-05 2.99134e-05 0.000468355 +0.7 3.37373e-05 3.10933e-05 0.000468355 +0.84 2.8211e-05 3.32216e-05 0.000468355 +1.12 2.12989e-05 3.66125e-05 0.000468355 +1.4 1.65086e-05 3.92337e-05 0.000468355 +1.68 0 5.45095e-05 0.000468355 +END DIST + +Metal 4 RESOVER +WIDTH Table 1 entries: 0.3 + +Metal 4 RESOVER 0 +DIST count 55 width 0.3 +0 0 0 0.000126988 +0 0.38 0 0.000126988 +0 0.68 0 0.000126988 +0 0.91 0 0.000126988 +0 1.06 0 0.000126988 +0 1.36 0 0.000126988 +0 1.59 0 0.000126988 +0 1.74 0 0.000126988 +0 2.04 0 0.000126988 +0 2.72 0 0.000126988 +0.38 0.38 0 0.000126988 +0.38 0.68 0 0.000126988 +0.38 0.91 0 0.000126988 +0.38 1.06 0 0.000126988 +0.38 1.36 0 0.000126988 +0.38 1.59 0 0.000126988 +0.38 1.74 0 0.000126988 +0.38 2.04 0 0.000126988 +0.38 2.72 0 0.000126988 +0.68 0.68 0 0.000126988 +0.68 0.91 0 0.000126988 +0.68 1.06 0 0.000126988 +0.68 1.36 0 0.000126988 +0.68 1.59 0 0.000126988 +0.68 1.74 0 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3.89708e-05 2.1839e-05 6.34939e-05 +1.5 3.6201e-05 2.28938e-05 6.34939e-05 +1.8 3.11903e-05 2.48639e-05 6.34939e-05 +2.4 2.30889e-05 2.82666e-05 6.34939e-05 +3 1.85683e-05 3.08522e-05 6.34939e-05 +3.6 0 4.79736e-05 6.34939e-05 +END DIST + +Metal 4 DIAGUNDER +WIDTH Table 1 entries: 0.3 + +Metal 4 DIAGUNDER 5 +DIST count 13 width 0.3 +0 0 4.08813e-05 6.34939e-05 +0.3 0 3.80442e-05 6.34939e-05 +0.6 0 3.59851e-05 6.34939e-05 +0.75 0 3.42994e-05 6.34939e-05 +0.9 0 3.27687e-05 6.34939e-05 +1.05 0 3.13776e-05 6.34939e-05 +1.2 0 3.01128e-05 6.34939e-05 +1.35 0 2.89624e-05 6.34939e-05 +1.5 0 2.7919e-05 6.34939e-05 +1.8 0 2.61011e-05 6.34939e-05 +2.4 0 2.33393e-05 6.34939e-05 +3 0 2.14369e-05 6.34939e-05 +3.6 0 1.05199e-05 6.34939e-05 +END DIST + +Metal 4 DIAGUNDER 6 +DIST count 13 width 0.3 +0 0 2.37164e-05 6.34939e-05 +0.3 0 2.38732e-05 6.34939e-05 +0.6 0 2.46668e-05 6.34939e-05 +0.75 0 2.42045e-05 6.34939e-05 +0.9 0 2.37523e-05 6.34939e-05 +1.05 0 2.33093e-05 6.34939e-05 +1.2 0 2.28752e-05 6.34939e-05 +1.35 0 2.24495e-05 6.34939e-05 +1.5 0 2.20225e-05 6.34939e-05 +1.8 0 2.1193e-05 6.34939e-05 +2.4 0 1.96635e-05 6.34939e-05 +3 0 1.55325e-05 6.34939e-05 +3.6 0 9.95313e-06 6.34939e-05 +END DIST + +Metal 4 OVERUNDER +WIDTH Table 1 entries: 0.3 + +Metal 4 OVER 1 UNDER 5 +DIST count 12 width 0.3 +0.3 8.50314e-05 2.81924e-05 6.34939e-05 +0.6 5.90635e-05 3.45055e-05 6.34939e-05 +0.75 5.06059e-05 3.71686e-05 6.34939e-05 +0.9 4.44815e-05 3.95277e-05 6.34939e-05 +1.05 3.96004e-05 4.16453e-05 6.34939e-05 +1.2 3.5372e-05 4.35609e-05 6.34939e-05 +1.35 3.18578e-05 4.52737e-05 6.34939e-05 +1.5 2.89889e-05 4.68019e-05 6.34939e-05 +1.8 2.41538e-05 4.94466e-05 6.34939e-05 +2.4 1.71348e-05 5.3441e-05 6.34939e-05 +3 1.32086e-05 5.61218e-05 6.34939e-05 +3.6 0 6.84728e-05 6.34939e-05 +END DIST + +Metal 4 OVER 1 UNDER 6 +DIST count 12 width 0.3 +0.3 8.90824e-05 1.50706e-05 6.34939e-05 +0.6 6.32966e-05 1.88707e-05 6.34939e-05 +0.75 5.51387e-05 2.05791e-05 6.34939e-05 +0.9 4.92578e-05 2.20814e-05 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2.22613e-05 6.34939e-05 +0.75 5.37599e-05 2.4256e-05 6.34939e-05 +0.9 4.77803e-05 2.60028e-05 6.34939e-05 +1.05 4.29363e-05 2.76977e-05 6.34939e-05 +1.2 3.8658e-05 2.92843e-05 6.34939e-05 +1.35 3.50443e-05 3.07481e-05 6.34939e-05 +1.5 3.20368e-05 3.20946e-05 6.34939e-05 +1.8 2.68726e-05 3.45345e-05 6.34939e-05 +2.4 1.91341e-05 3.85354e-05 6.34939e-05 +3 1.4545e-05 4.15053e-05 6.34939e-05 +3.6 0 5.50585e-05 6.34939e-05 +END DIST + +Metal 4 OVER 3 UNDER 5 +DIST count 12 width 0.3 +0.3 8.12436e-05 4.00409e-05 6.34939e-05 +0.6 5.44738e-05 4.88901e-05 6.34939e-05 +0.75 4.57434e-05 5.24373e-05 6.34939e-05 +0.9 3.94642e-05 5.54821e-05 6.34939e-05 +1.05 3.4526e-05 5.81243e-05 6.34939e-05 +1.2 3.02991e-05 6.04363e-05 6.34939e-05 +1.35 2.68695e-05 6.24439e-05 6.34939e-05 +1.5 2.41464e-05 6.41861e-05 6.34939e-05 +1.8 1.96903e-05 6.70811e-05 6.34939e-05 +2.4 1.35203e-05 7.11596e-05 6.34939e-05 +3 1.0359e-05 7.36808e-05 6.34939e-05 +3.6 0 8.35483e-05 6.34939e-05 +END DIST + +Metal 4 OVER 3 UNDER 6 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0.3 +END DIST + +Metal 5 RESOVER 2 +DIST count 0 width 0.3 +END DIST + +Metal 5 RESOVER 3 +DIST count 0 width 0.3 +END DIST + +Metal 5 RESOVER 4 +DIST count 0 width 0.3 +END DIST + +Metal 5 OVER +WIDTH Table 1 entries: 0.3 + +Metal 5 OVER 0 +DIST count 12 width 0.3 +0.3 9.32246e-05 7.70756e-06 6.34939e-05 +0.6 7.35275e-05 9.29167e-06 6.34939e-05 +0.75 6.33862e-05 1.00837e-05 6.34939e-05 +0.9 5.76251e-05 1.07249e-05 6.34939e-05 +1.05 5.33943e-05 1.13134e-05 6.34939e-05 +1.2 4.91313e-05 1.19019e-05 6.34939e-05 +1.35 4.58506e-05 1.24214e-05 6.34939e-05 +1.5 4.36417e-05 1.2867e-05 6.34939e-05 +1.8 3.92007e-05 1.37582e-05 6.34939e-05 +2.4 3.10727e-05 1.54705e-05 6.34939e-05 +3 2.7395e-05 1.68103e-05 6.34939e-05 +3.6 0 4.18507e-05 6.34939e-05 +END DIST + +Metal 5 OVER 1 +DIST count 12 width 0.3 +0.3 9.25655e-05 1.08076e-05 6.34939e-05 +0.6 6.94846e-05 1.23245e-05 6.34939e-05 +0.75 6.08799e-05 1.30924e-05 6.34939e-05 +0.9 5.53004e-05 1.37808e-05 6.34939e-05 +1.05 5.10028e-05 1.44359e-05 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diff --git a/sky130/openlane/rules.openrcx.sky130A.nom.calibre b/sky130/openlane/rules.openrcx.sky130A.nom.calibre new file mode 100644 index 0000000..8109043 --- /dev/null +++ b/sky130/openlane/rules.openrcx.sky130A.nom.calibre
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8.54545e-05 +1.2 0 2.41745e-05 8.54545e-05 +1.35 0 2.07924e-05 8.54545e-05 +1.5 0 1.69667e-05 8.54545e-05 +1.8 0 1.61228e-05 8.54545e-05 +2.4 0 1.45516e-05 8.54545e-05 +3 0 1.3131e-05 8.54545e-05 +3.6 0 1.08365e-05 8.54545e-05 +END DIST + +Metal 4 OVERUNDER +WIDTH Table 1 entries: 0.3 + +Metal 4 OVER 1 UNDER 5 +DIST count 12 width 0.3 +0.3 0.000101834 3.33456e-05 8.54545e-05 +0.6 6.83988e-05 4.08916e-05 8.54545e-05 +0.75 5.89419e-05 4.39387e-05 8.54545e-05 +0.9 5.1148e-05 4.66459e-05 8.54545e-05 +1.05 4.45437e-05 4.90666e-05 8.54545e-05 +1.2 3.8813e-05 5.12359e-05 8.54545e-05 +1.35 3.37654e-05 5.31841e-05 8.54545e-05 +1.5 2.99814e-05 5.48963e-05 8.54545e-05 +1.8 2.44204e-05 5.77864e-05 8.54545e-05 +2.4 1.66761e-05 6.20888e-05 8.54545e-05 +3 1.25421e-05 6.46284e-05 8.54545e-05 +3.6 0 7.62684e-05 8.54545e-05 +END DIST + +Metal 4 OVER 1 UNDER 6 +DIST count 12 width 0.3 +0.3 0.00010697 1.5913e-05 8.54545e-05 +0.6 7.40394e-05 2.0283e-05 8.54545e-05 +0.75 6.49367e-05 2.2169e-05 8.54545e-05 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2.46 0 0.000170909 +0.62 2.76 0 0.000170909 +0.62 3.68 0 0.000170909 +0.92 0.92 0 0.000170909 +0.92 1.39 0 0.000170909 +0.92 1.54 0 0.000170909 +0.92 1.84 0 0.000170909 +0.92 2.31 0 0.000170909 +0.92 2.46 0 0.000170909 +0.92 2.76 0 0.000170909 +0.92 3.68 0 0.000170909 +1.39 1.39 0 0.000170909 +1.39 1.54 0 0.000170909 +1.39 1.84 0 0.000170909 +1.39 2.31 0 0.000170909 +1.39 2.46 0 0.000170909 +1.39 2.76 0 0.000170909 +1.39 3.68 0 0.000170909 +1.54 1.54 0 0.000170909 +1.54 1.84 0 0.000170909 +1.54 2.31 0 0.000170909 +1.54 2.46 0 0.000170909 +1.54 2.76 0 0.000170909 +1.54 3.68 0 0.000170909 +1.84 1.84 0 0.000170909 +1.84 2.31 0 0.000170909 +1.84 2.46 0 0.000170909 +1.84 2.76 0 0.000170909 +1.84 3.68 0 0.000170909 +2.31 2.31 0 0.000170909 +2.31 2.46 0 0.000170909 +2.31 2.76 0 0.000170909 +2.31 3.68 0 0.000170909 +2.46 2.46 0 0.000170909 +2.46 2.76 0 0.000170909 +2.46 3.68 0 0.000170909 +2.76 2.76 0 0.000170909 +2.76 3.68 0 0.000170909 +3.68 0 3.68 0.000170909 +END DIST + +Metal 5 RESOVER 1 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1.50017e-05 8.54545e-05 +1.2 5.14438e-05 1.57297e-05 8.54545e-05 +1.35 4.63752e-05 1.6446e-05 8.54545e-05 +1.5 4.2931e-05 1.70906e-05 8.54545e-05 +1.8 3.79743e-05 1.8283e-05 8.54545e-05 +2.4 2.95557e-05 1.98564e-05 8.54545e-05 +3 2.44352e-05 2.0953e-05 8.54545e-05 +3.6 0 4.3229e-05 8.54545e-05 +END DIST + +Metal 5 OVER 2 +DIST count 12 width 0.3 +0.3 0.000107354 1.23885e-05 8.54545e-05 +0.6 7.61526e-05 1.43157e-05 8.54545e-05 +0.75 6.86317e-05 1.51614e-05 8.54545e-05 +0.9 6.20746e-05 1.59984e-05 8.54545e-05 +1.05 5.61337e-05 1.68229e-05 8.54545e-05 +1.2 5.06944e-05 1.76325e-05 8.54545e-05 +1.35 4.55891e-05 1.84263e-05 8.54545e-05 +1.5 4.20767e-05 1.91444e-05 8.54545e-05 +1.8 3.70014e-05 2.04723e-05 8.54545e-05 +2.4 2.84859e-05 2.29381e-05 8.54545e-05 +3 2.33549e-05 2.4974e-05 8.54545e-05 +3.6 0 4.63218e-05 8.54545e-05 +END DIST + +Metal 5 OVER 3 +DIST count 12 width 0.3 +0.3 0.000106682 1.39333e-05 8.54545e-05 +0.6 7.53957e-05 1.62583e-05 8.54545e-05 +0.75 6.7762e-05 1.72729e-05 8.54545e-05 +0.9 6.10941e-05 1.82637e-05 8.54545e-05 +1.05 5.51445e-05 1.92285e-05 8.54545e-05 +1.2 4.96324e-05 2.01666e-05 8.54545e-05 +1.35 4.44379e-05 2.10782e-05 8.54545e-05 +1.5 4.08575e-05 2.19043e-05 8.54545e-05 +1.8 3.5695e-05 2.34218e-05 8.54545e-05 +2.4 2.7143e-05 2.61795e-05 8.54545e-05 +3 2.20913e-05 2.84161e-05 8.54545e-05 +3.6 0 4.87581e-05 8.54545e-05 +END DIST + +Metal 5 OVER 4 +DIST count 12 width 0.3 +0.3 0.000100641 2.74481e-05 8.54545e-05 +0.6 6.96273e-05 3.23788e-05 8.54545e-05 +0.75 6.19288e-05 3.44448e-05 8.54545e-05 +0.9 5.52123e-05 3.63495e-05 8.54545e-05 +1.05 4.91639e-05 3.81071e-05 8.54545e-05 +1.2 4.36042e-05 3.97311e-05 8.54545e-05 +1.35 3.84191e-05 4.12337e-05 8.54545e-05 +1.5 3.49294e-05 4.25669e-05 8.54545e-05 +1.8 3.00814e-05 4.48833e-05 8.54545e-05 +2.4 2.23472e-05 4.85858e-05 8.54545e-05 +3 1.81728e-05 5.11885e-05 8.54545e-05 +3.6 0 6.83974e-05 8.54545e-05 +END DIST + +Metal 5 UNDER +WIDTH Table 1 entries: 0.3 + +Metal 5 UNDER 6 +DIST count 12 width 0.3 +0.3 0.00010219 2.14417e-05 8.54545e-05 +0.6 7.05056e-05 2.68142e-05 8.54545e-05 +0.75 6.23572e-05 2.9043e-05 8.54545e-05 +0.9 5.52446e-05 3.10806e-05 8.54545e-05 +1.05 4.88631e-05 3.29461e-05 8.54545e-05 +1.2 4.30325e-05 3.46572e-05 8.54545e-05 +1.35 3.76323e-05 3.6229e-05 8.54545e-05 +1.5 3.39664e-05 3.7617e-05 8.54545e-05 +1.8 2.88741e-05 4.00079e-05 8.54545e-05 +2.4 2.09642e-05 4.37656e-05 8.54545e-05 +3 1.68109e-05 4.6358e-05 8.54545e-05 +3.6 0 6.22631e-05 8.54545e-05 +END DIST + +Metal 5 DIAGUNDER +WIDTH Table 1 entries: 0.3 + +Metal 5 DIAGUNDER 6 +DIST count 13 width 0.3 +0 0 5.26569e-05 8.54545e-05 +0.3 0 4.30002e-05 8.54545e-05 +0.6 0 3.99665e-05 8.54545e-05 +0.75 0 3.79437e-05 8.54545e-05 +0.9 0 3.60923e-05 8.54545e-05 +1.05 0 3.43952e-05 8.54545e-05 +1.2 0 3.28372e-05 8.54545e-05 +1.35 0 3.14046e-05 8.54545e-05 +1.5 0 3.00849e-05 8.54545e-05 +1.8 0 2.77397e-05 8.54545e-05 +2.4 0 2.12873e-05 8.54545e-05 +3 0 1.62857e-05 8.54545e-05 +3.6 0 1.30961e-05 8.54545e-05 +END DIST 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8.54545e-05 +2.4 1.88151e-05 4.88572e-05 8.54545e-05 +3 1.43724e-05 5.16378e-05 8.54545e-05 +3.6 0 6.51407e-05 8.54545e-05 +END DIST + +Metal 5 OVER 3 UNDER 6 +DIST count 12 width 0.3 +0.3 0.000101281 2.61992e-05 8.54545e-05 +0.6 6.85051e-05 3.24833e-05 8.54545e-05 +0.75 5.93315e-05 3.512e-05 8.54545e-05 +0.9 5.17529e-05 3.75011e-05 8.54545e-05 +1.05 4.53424e-05 3.96539e-05 8.54545e-05 +1.2 3.97724e-05 4.1603e-05 8.54545e-05 +1.35 3.48539e-05 4.33705e-05 8.54545e-05 +1.5 3.11237e-05 4.49465e-05 8.54545e-05 +1.8 2.55722e-05 4.76514e-05 8.54545e-05 +2.4 1.7768e-05 5.17687e-05 8.54545e-05 +3 1.34703e-05 5.45902e-05 8.54545e-05 +3.6 0 6.73372e-05 8.54545e-05 +END DIST + +Metal 5 OVER 4 UNDER 6 +DIST count 12 width 0.3 +0.3 9.60093e-05 3.91424e-05 8.54545e-05 +0.6 6.27428e-05 4.85475e-05 8.54545e-05 +0.75 5.33556e-05 5.22386e-05 8.54545e-05 +0.9 4.57257e-05 5.54293e-05 8.54545e-05 +1.05 3.9355e-05 5.81978e-05 8.54545e-05 +1.2 3.39284e-05 6.06095e-05 8.54545e-05 +1.35 2.92272e-05 6.27185e-05 8.54545e-05 +1.5 2.5775e-05 6.45409e-05 8.54545e-05 +1.8 2.08447e-05 6.753e-05 8.54545e-05 +2.4 1.42041e-05 7.17319e-05 8.54545e-05 +3 1.08128e-05 7.436e-05 8.54545e-05 +3.6 0 8.48209e-05 8.54545e-05 +END DIST + +Metal 6 RESOVER +WIDTH Table 1 entries: 1.6 + +Metal 6 RESOVER 0 +DIST count 55 width 1.6 +0 0 0 1.88742e-05 +0 1.8 0 1.88742e-05 +0 3.4 0 1.88742e-05 +0 4.4 0 1.88742e-05 +0 5.2 0 1.88742e-05 +0 6.8 0 1.88742e-05 +0 7.8 0 1.88742e-05 +0 8.6 0 1.88742e-05 +0 10.2 0 1.88742e-05 +0 13.6 0 1.88742e-05 +1.8 1.8 0 1.88742e-05 +1.8 3.4 0 1.88742e-05 +1.8 4.4 0 1.88742e-05 +1.8 5.2 0 1.88742e-05 +1.8 6.8 0 1.88742e-05 +1.8 7.8 0 1.88742e-05 +1.8 8.6 0 1.88742e-05 +1.8 10.2 0 1.88742e-05 +1.8 13.6 0 1.88742e-05 +3.4 3.4 0 1.88742e-05 +3.4 4.4 0 1.88742e-05 +3.4 5.2 0 1.88742e-05 +3.4 6.8 0 1.88742e-05 +3.4 7.8 0 1.88742e-05 +3.4 8.6 0 1.88742e-05 +3.4 10.2 0 1.88742e-05 +3.4 13.6 0 1.88742e-05 +4.4 4.4 0 1.88742e-05 +4.4 5.2 0 1.88742e-05 +4.4 6.8 0 1.88742e-05 +4.4 7.8 0 1.88742e-05 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1.99228e-05 9.43708e-06 +4 3.19371e-05 2.19115e-05 9.43708e-06 +4.8 2.70964e-05 2.37191e-05 9.43708e-06 +5.6 2.357e-05 2.53621e-05 9.43708e-06 +6.4 2.09156e-05 2.68556e-05 9.43708e-06 +7.2 1.88445e-05 2.82131e-05 9.43708e-06 +8 1.71775e-05 2.94471e-05 9.43708e-06 +9.6 1.46382e-05 3.15888e-05 9.43708e-06 +12.8 1.14443e-05 3.4823e-05 9.43708e-06 +16 9.51897e-06 3.70354e-05 9.43708e-06 +19.2 0 4.67659e-05 9.43708e-06 +END DIST + +Metal 6 OVER 1 +DIST count 12 width 1.6 +1.6 6.97966e-05 1.67389e-05 9.43708e-06 +3.2 3.64877e-05 1.99427e-05 9.43708e-06 +4 2.99166e-05 2.12044e-05 9.43708e-06 +4.8 2.466e-05 2.2326e-05 9.43708e-06 +5.6 2.13161e-05 2.33231e-05 9.43708e-06 +6.4 1.84169e-05 3.40396e-05 9.43708e-06 +7.2 1.61341e-05 3.54638e-05 9.43708e-06 +8 1.54206e-05 3.67429e-05 9.43708e-06 +9.6 1.20143e-05 3.89238e-05 9.43708e-06 +12.8 8.69945e-06 4.21081e-05 9.43708e-06 +16 6.39204e-06 4.41918e-05 9.43708e-06 +19.2 0 5.06553e-05 9.43708e-06 +END DIST + +Metal 6 OVER 2 +DIST count 12 width 1.6 +1.6 6.84409e-05 2.68397e-05 9.43708e-06 +3.2 3.54871e-05 3.29164e-05 9.43708e-06 +4 2.85e-05 3.54391e-05 9.43708e-06 +4.8 2.361e-05 3.76634e-05 9.43708e-06 +5.6 1.9916e-05 3.96249e-05 9.43708e-06 +6.4 1.73838e-05 3.96498e-05 9.43708e-06 +7.2 1.61689e-05 4.11129e-05 9.43708e-06 +8 1.47732e-05 4.24168e-05 9.43708e-06 +9.6 1.05302e-05 4.46152e-05 9.43708e-06 +12.8 8.72921e-06 4.77605e-05 9.43708e-06 +16 5.62171e-06 4.97672e-05 9.43708e-06 +19.2 0 5.50675e-05 9.43708e-06 +END DIST + +Metal 6 OVER 3 +DIST count 12 width 1.6 +1.6 6.7645e-05 3.2193e-05 9.43708e-06 +3.2 3.38391e-05 3.9367e-05 9.43708e-06 +4 2.67021e-05 4.19966e-05 9.43708e-06 +4.8 2.29769e-05 4.18177e-05 9.43708e-06 +5.6 1.82353e-05 4.65442e-05 9.43708e-06 +6.4 1.62227e-05 4.54365e-05 9.43708e-06 +7.2 1.48039e-05 4.84524e-05 9.43708e-06 +8 1.32738e-05 4.82507e-05 9.43708e-06 +9.6 1.07123e-05 5.04464e-05 9.43708e-06 +12.8 8.05801e-06 5.35152e-05 9.43708e-06 +16 4.84253e-06 5.54212e-05 9.43708e-06 +19.2 0 6.11626e-05 9.43708e-06 +END DIST + +Metal 6 OVER 4 +DIST count 12 width 1.6 +1.6 6.22864e-05 3.56698e-05 9.43708e-06 +3.2 2.88977e-05 4.44753e-05 9.43708e-06 +4 2.21355e-05 4.78329e-05 9.43708e-06 +4.8 2.02689e-05 4.66506e-05 9.43708e-06 +5.6 1.42772e-05 5.29604e-05 9.43708e-06 +6.4 1.43508e-05 5.04747e-05 9.43708e-06 +7.2 1.36855e-05 5.19708e-05 9.43708e-06 +8 9.97895e-06 5.32154e-05 9.43708e-06 +9.6 8.98714e-06 5.52233e-05 9.43708e-06 +12.8 6.3669e-06 5.79283e-05 9.43708e-06 +16 3.93686e-06 5.95142e-05 9.43708e-06 +19.2 0 6.45661e-05 9.43708e-06 +END DIST + +Metal 6 OVER 5 +DIST count 12 width 1.6 +1.6 5.37839e-05 8.90159e-05 9.43708e-06 +3.2 2.88056e-05 9.62448e-05 9.43708e-06 +4 2.26176e-05 9.9472e-05 9.43708e-06 +4.8 1.85813e-05 0.000101954 9.43708e-06 +5.6 1.57289e-05 0.000103891 9.43708e-06 +6.4 1.36365e-05 0.000105426 9.43708e-06 +7.2 1.20437e-05 0.000106662 9.43708e-06 +8 1.07924e-05 0.000107674 9.43708e-06 +9.6 8.94989e-06 0.000109223 9.43708e-06 +12.8 6.74626e-06 0.000111206 9.43708e-06 +16 5.48249e-06 0.000112414 9.43708e-06 +19.2 0 0.000117864 9.43708e-06 +END DIST + +Metal 6 UNDER +WIDTH Table 0 entries: + +Metal 6 DIAGUNDER +WIDTH Table 0 entries: +END DensityModel 0