diff --git a/VERSION b/VERSION
index 1e12fc6..425236c 100644
--- a/VERSION
+++ b/VERSION
@@ -1 +1 @@
-1.0.337
+1.0.338
diff --git a/sky130/Makefile.in b/sky130/Makefile.in
index 5ed5d4b..d835693 100644
--- a/sky130/Makefile.in
+++ b/sky130/Makefile.in
@@ -1441,6 +1441,7 @@
 		-lib %l/latest/timing/*.lib filter=custom/scripts/add_wireloads.py \
 			filter=custom/scripts/fix_default_fanout_load.py \
 			filter=custom/scripts/fix_related_bias_pins.py \
+			filter=custom/scripts/fix_mismatched_opcond.py \
 		-gds %l/latest/cells/*/*.gds compile-only \
 			include=custom/sky130_fd_sc_hvl/gds/sky130_ef*.gds \
 			options=custom/scripts/gds_import_setup.tcl \
diff --git a/sky130/custom/scripts/fix_mismatched_opcond.py b/sky130/custom/scripts/fix_mismatched_opcond.py
new file mode 100755
index 0000000..42fd7ea
--- /dev/null
+++ b/sky130/custom/scripts/fix_mismatched_opcond.py
@@ -0,0 +1,106 @@
+#!/usr/bin/env python3
+#
+# fix_mismatched_opcond.py ---
+#
+# Fixes an error that appers in the HVL library only.
+# There is at least one example in one file where the string passed to
+# the statement "operating_conditions(...)" does not match the string
+# previously passed to the statement "default_operating_conditions : ...".
+# This causes some tools to throw an error.  Fixed by remembering the
+# default operating condition name and correcting the operating condition
+# name if it does not match the default.
+#
+# This script is a filter to be run by setting the name of this script as
+# the value to "filter=" for the lib install in the sky130 Makefile.
+
+import re
+import os
+import sys
+
+def filter(inname, outname):
+
+    # Read input
+    try:
+        with open(inname, 'r') as inFile:
+            stext = inFile.read()
+            slines = stext.splitlines()
+    except:
+        print('fix_mismatched_opcond.py: failed to open ' + inname + ' for reading.', file=sys.stderr)
+        return 1
+
+    # Process input with regexp
+
+    fixedlines = []
+    modified = False
+
+    default_re = re.compile('\s*default_operating_conditions\s*:\s*"(.+)"\s*;')
+    opcond_re = re.compile('\s*operating_conditions\s*\(\s*"(.+)"\s*\)\s*{')
+
+    opcond_default_name = None
+
+    for line in slines:
+        dmatch = default_re.match(line)
+        if dmatch:
+            opcond_default_name = dmatch.group(1)
+
+        omatch = opcond_re.match(line)
+        if omatch:
+            opcond_name = omatch.group(1)
+            if not opcond_default_name:
+                print('Error: operating condition used without a default')
+            elif (opcond_name != opcond_default_name):
+                # Diagnostic
+                print('Found non-matching names ' + opcond_default_name + ' and ' + opcond_name)
+                modified = True
+                line = line.replace(opcond_name, opcond_default_name)
+                opcond_default_name = ''
+
+        fixedlines.append(line)
+
+    # Write output
+    if outname == None:
+        for i in fixedlines:
+            print(i)
+    else:
+        # If the output is a symbolic link but no modifications have been made,
+        # then leave it alone.  If it was modified, then remove the symbolic
+        # link before writing.
+        if os.path.islink(outname):
+            if not modified:
+                return 0
+            else:
+                os.unlink(outname)
+        try:
+            with open(outname, 'w') as outFile:
+                for i in fixedlines:
+                    print(i, file=outFile)
+        except:
+            print('fix_mismatched_opcond.py: failed to open ' + outname + ' for writing.', file=sys.stderr)
+            return 1
+
+
+if __name__ == '__main__':
+
+    # This script expects to get one or two arguments.  One argument is
+    # mandatory and is the input file.  The other argument is optional and
+    # is the output file.  The output file and input file may be the same
+    # name, in which case the original input is overwritten.
+
+    options = []
+    arguments = []
+    for item in sys.argv[1:]:
+        if item.find('-', 0) == 0:
+            options.append(item[1:])
+        else:
+            arguments.append(item)
+
+    if len(arguments) > 0:
+        infilename = arguments[0]
+
+    if len(arguments) > 1:
+        outfilename = arguments[1]
+    else:
+        outfilename = None
+
+    result = filter(infilename, outfilename)
+    sys.exit(result)
diff --git a/sky130/openlane/rules.openrcx.sky130A.max.calibre b/sky130/openlane/rules.openrcx.sky130A.max.calibre
new file mode 100644
index 0000000..c4c9a4a
--- /dev/null
+++ b/sky130/openlane/rules.openrcx.sky130A.max.calibre
@@ -0,0 +1,1645 @@
+Extraction Rules for OpenRCX
+
+DIAGMODEL ON
+
+LayerCount 6
+DensityRate 1  0
+
+DensityModel 0
+
+Metal 1 RESOVER
+WIDTH Table 1 entries:  0.17
+
+Metal 1 RESOVER 0
+DIST count 55 width 0.17
+0 0 0 0.0909828
+0 0.29 0 0.0909828
+0 0.46 0 0.0909828
+0 0.665 0 0.0909828
+0 0.75 0 0.0909828
+0 0.92 0 0.0909828
+0 1.125 0 0.0909828
+0 1.21 0 0.0909828
+0 1.38 0 0.0909828
+0 1.84 0 0.0909828
+0.29 0.29 0 0.0909828
+0.29 0.46 0 0.0909828
+0.29 0.665 0 0.0909828
+0.29 0.75 0 0.0909828
+0.29 0.92 0 0.0909828
+0.29 1.125 0 0.0909828
+0.29 1.21 0 0.0909828
+0.29 1.38 0 0.0909828
+0.29 1.84 0 0.0909828
+0.46 0.46 0 0.0909828
+0.46 0.665 0 0.0909828
+0.46 0.75 0 0.0909828
+0.46 0.92 0 0.0909828
+0.46 1.125 0 0.0909828
+0.46 1.21 0 0.0909828
+0.46 1.38 0 0.0909828
+0.46 1.84 0 0.0909828
+0.665 0.665 0 0.0909828
+0.665 0.75 0 0.0909828
+0.665 0.92 0 0.0909828
+0.665 1.125 0 0.0909828
+0.665 1.21 0 0.0909828
+0.665 1.38 0 0.0909828
+0.665 1.84 0 0.0909828
+0.75 0.75 0 0.0909828
+0.75 0.92 0 0.0909828
+0.75 1.125 0 0.0909828
+0.75 1.21 0 0.0909828
+0.75 1.38 0 0.0909828
+0.75 1.84 0 0.0909828
+0.92 0.92 0 0.0909828
+0.92 1.125 0 0.0909828
+0.92 1.21 0 0.0909828
+0.92 1.38 0 0.0909828
+0.92 1.84 0 0.0909828
+1.125 1.125 0 0.0909828
+1.125 1.21 0 0.0909828
+1.125 1.38 0 0.0909828
+1.125 1.84 0 0.0909828
+1.21 1.21 0 0.0909828
+1.21 1.38 0 0.0909828
+1.21 1.84 0 0.0909828
+1.38 1.38 0 0.0909828
+1.38 1.84 0 0.0909828
+1.84 0 1.84 0.0909828
+END DIST
+
+Metal 1 OVER
+WIDTH Table 1 entries:  0.17
+
+Metal 1 OVER 0
+DIST count 12 width 0.17
+0.17 9.11271e-05 1.34056e-05 0.0454914
+0.34 5.28895e-05 1.65505e-05 0.0454914
+0.425 4.52756e-05 1.80037e-05 0.0454914
+0.51 3.9446e-05 1.93825e-05 0.0454914
+0.595 3.47082e-05 2.06908e-05 0.0454914
+0.68 3.08141e-05 2.1932e-05 0.0454914
+0.765 2.7615e-05 2.31095e-05 0.0454914
+0.85 2.49686e-05 2.42266e-05 0.0454914
+1.02 2.08969e-05 2.6291e-05 0.0454914
+1.36 1.57043e-05 2.9817e-05 0.0454914
+1.7 1.26248e-05 3.26646e-05 0.0454914
+2.04 0 4.5553e-05 0.0454914
+END DIST
+
+Metal 1 UNDER
+WIDTH Table 1 entries:  0.17
+
+Metal 1 UNDER 2
+DIST count 12 width 0.17
+0.17 8.52177e-05 3.37757e-05 0.0454914
+0.34 4.42008e-05 4.19096e-05 0.0454914
+0.425 3.57322e-05 4.50361e-05 0.0454914
+0.51 2.96088e-05 4.76804e-05 0.0454914
+0.595 2.49248e-05 4.99272e-05 0.0454914
+0.68 2.12687e-05 5.18448e-05 0.0454914
+0.765 1.8391e-05 5.34901e-05 0.0454914
+0.85 1.61019e-05 5.49089e-05 0.0454914
+1.02 1.27659e-05 5.72119e-05 0.0454914
+1.36 8.92544e-06 6.03738e-05 0.0454914
+1.7 6.9046e-06 6.24074e-05 0.0454914
+2.04 0 6.94966e-05 0.0454914
+END DIST
+
+Metal 1 UNDER 3
+DIST count 12 width 0.17
+0.17 8.94887e-05 2.01656e-05 0.0454914
+0.34 4.92776e-05 2.5567e-05 0.0454914
+0.425 4.09546e-05 2.78886e-05 0.0454914
+0.51 3.47555e-05 2.99921e-05 0.0454914
+0.595 2.98278e-05 3.18996e-05 0.0454914
+0.68 2.58277e-05 3.36312e-05 0.0454914
+0.765 2.25592e-05 3.52045e-05 0.0454914
+0.85 1.9863e-05 3.66356e-05 0.0454914
+1.02 1.5738e-05 3.91261e-05 0.0454914
+1.36 1.06367e-05 4.29313e-05 0.0454914
+1.7 7.83057e-06 4.56094e-05 0.0454914
+2.04 0 5.3684e-05 0.0454914
+END DIST
+
+Metal 1 UNDER 4
+DIST count 12 width 0.17
+0.17 9.02744e-05 1.62395e-05 0.0454914
+0.34 5.06368e-05 2.06366e-05 0.0454914
+0.425 4.25874e-05 2.2595e-05 0.0454914
+0.51 3.6604e-05 2.44095e-05 0.0454914
+0.595 3.18259e-05 2.60912e-05 0.0454914
+0.68 2.79154e-05 2.76503e-05 0.0454914
+0.765 2.46881e-05 2.90961e-05 0.0454914
+0.85 2.1993e-05 3.04373e-05 0.0454914
+1.02 1.77809e-05 3.28366e-05 0.0454914
+1.36 1.23162e-05 3.66878e-05 0.0454914
+1.7 9.11162e-06 3.95587e-05 0.0454914
+2.04 0 4.88095e-05 0.0454914
+END DIST
+
+Metal 1 UNDER 5
+DIST count 12 width 0.17
+0.17 9.04461e-05 1.542e-05 0.0454914
+0.34 5.11459e-05 1.92353e-05 0.0454914
+0.425 4.32711e-05 2.09653e-05 0.0454914
+0.51 3.74554e-05 2.25869e-05 0.0454914
+0.595 3.28252e-05 2.41068e-05 0.0454914
+0.68 2.90375e-05 2.55315e-05 0.0454914
+0.765 2.59076e-05 2.68671e-05 0.0454914
+0.85 2.32854e-05 2.81191e-05 0.0454914
+1.02 1.91537e-05 3.03933e-05 0.0454914
+1.36 1.36581e-05 3.41491e-05 0.0454914
+1.7 1.02993e-05 3.70507e-05 0.0454914
+2.04 0 4.73924e-05 0.0454914
+END DIST
+
+Metal 1 UNDER 6
+DIST count 12 width 0.17
+0.17 9.04375e-05 1.39742e-05 0.0454914
+0.34 5.11807e-05 1.76023e-05 0.0454914
+0.425 4.33401e-05 1.92556e-05 0.0454914
+0.51 3.7586e-05 2.08101e-05 0.0454914
+0.595 3.30254e-05 2.22719e-05 0.0454914
+0.68 2.93038e-05 2.36464e-05 0.0454914
+0.765 2.62317e-05 2.49388e-05 0.0454914
+0.85 2.36572e-05 2.6154e-05 0.0454914
+1.02 1.95903e-05 2.8371e-05 0.0454914
+1.36 1.41306e-05 3.2063e-05 0.0454914
+1.7 1.07398e-05 3.49462e-05 0.0454914
+2.04 0 4.5676e-05 0.0454914
+END DIST
+
+Metal 1 DIAGUNDER
+WIDTH Table 1 entries:  0.17
+
+Metal 1 DIAGUNDER 2
+DIST count 13 width 0.17
+0 0 3.82974e-05 0.0454914
+0.17 0 2.79886e-05 0.0454914
+0.34 0 2.25748e-05 0.0454914
+0.425 0 2.04119e-05 0.0454914
+0.51 0 1.8546e-05 0.0454914
+0.595 0 1.69365e-05 0.0454914
+0.68 0 1.5548e-05 0.0454914
+0.765 0 1.43503e-05 0.0454914
+0.85 0 1.33171e-05 0.0454914
+1.02 0 1.16569e-05 0.0454914
+1.36 0 9.50205e-06 0.0454914
+1.7 0 8.30879e-06 0.0454914
+2.04 0 7.64801e-06 0.0454914
+END DIST
+
+Metal 1 DIAGUNDER 3
+DIST count 13 width 0.17
+0 0 1.70139e-05 0.0454914
+0.17 0 1.48689e-05 0.0454914
+0.34 0 1.34252e-05 0.0454914
+0.425 0 1.27581e-05 0.0454914
+0.51 0 1.21251e-05 0.0454914
+0.595 0 1.15244e-05 0.0454914
+0.68 0 1.09543e-05 0.0454914
+0.765 0 1.07492e-05 0.0454914
+0.85 0 1.02658e-05 0.0454914
+1.02 0 9.36325e-06 0.0454914
+1.36 0 7.78919e-06 0.0454914
+1.7 0 6.47974e-06 0.0454914
+2.04 0 5.39043e-06 0.0454914
+END DIST
+
+Metal 1 DIAGUNDER 4
+DIST count 13 width 0.17
+0 0 1.08413e-05 0.0454914
+0.17 0 1.09182e-05 0.0454914
+0.34 0 1.0297e-05 0.0454914
+0.425 0 1e-05 0.0454914
+0.51 0 9.71179e-06 0.0454914
+0.595 0 9.43203e-06 0.0454914
+0.68 0 9.16046e-06 0.0454914
+0.765 0 8.89691e-06 0.0454914
+0.85 0 8.64106e-06 0.0454914
+1.02 0 8.15172e-06 0.0454914
+1.36 0 7.2563e-06 0.0454914
+1.7 0 6.46141e-06 0.0454914
+2.04 0 5.93895e-06 0.0454914
+END DIST
+
+Metal 1 DIAGUNDER 5
+DIST count 13 width 0.17
+0 0 6.26649e-06 0.0454914
+0.17 0 6.51364e-06 0.0454914
+0.34 0 6.28562e-06 0.0454914
+0.425 0 6.17466e-06 0.0454914
+0.51 0 6.06569e-06 0.0454914
+0.595 0 5.9587e-06 0.0454914
+0.68 0 5.85359e-06 0.0454914
+0.765 0 5.75039e-06 0.0454914
+0.85 0 5.64905e-06 0.0454914
+1.02 0 5.45175e-06 0.0454914
+1.36 0 5.07796e-06 0.0454914
+1.7 0 4.73024e-06 0.0454914
+2.04 0 4.4852e-06 0.0454914
+END DIST
+
+Metal 1 DIAGUNDER 6
+DIST count 0 width 0.17
+END DIST
+
+Metal 2 RESOVER
+WIDTH Table 1 entries:  0.14
+
+Metal 2 RESOVER 0
+DIST count 55 width 0.14
+0 0 0 0.00166468
+0 0.2 0 0.00166468
+0 0.34 0 0.00166468
+0 0.47 0 0.00166468
+0 0.54 0 0.00166468
+0 0.68 0 0.00166468
+0 0.81 0 0.00166468
+0 0.88 0 0.00166468
+0 1.02 0 0.00166468
+0 1.36 0 0.00166468
+0.2 0.2 0 0.00166468
+0.2 0.34 0 0.00166468
+0.2 0.47 0 0.00166468
+0.2 0.54 0 0.00166468
+0.2 0.68 0 0.00166468
+0.2 0.81 0 0.00166468
+0.2 0.88 0 0.00166468
+0.2 1.02 0 0.00166468
+0.2 1.36 0 0.00166468
+0.34 0.34 0 0.00166468
+0.34 0.47 0 0.00166468
+0.34 0.54 0 0.00166468
+0.34 0.68 0 0.00166468
+0.34 0.81 0 0.00166468
+0.34 0.88 0 0.00166468
+0.34 1.02 0 0.00166468
+0.34 1.36 0 0.00166468
+0.47 0.47 0 0.00166468
+0.47 0.54 0 0.00166468
+0.47 0.68 0 0.00166468
+0.47 0.81 0 0.00166468
+0.47 0.88 0 0.00166468
+0.47 1.02 0 0.00166468
+0.47 1.36 0 0.00166468
+0.54 0.54 0 0.00166468
+0.54 0.68 0 0.00166468
+0.54 0.81 0 0.00166468
+0.54 0.88 0 0.00166468
+0.54 1.02 0 0.00166468
+0.54 1.36 0 0.00166468
+0.68 0.68 0 0.00166468
+0.68 0.81 0 0.00166468
+0.68 0.88 0 0.00166468
+0.68 1.02 0 0.00166468
+0.68 1.36 0 0.00166468
+0.81 0.81 0 0.00166468
+0.81 0.88 0 0.00166468
+0.81 1.02 0 0.00166468
+0.81 1.36 0 0.00166468
+0.88 0.88 0 0.00166468
+0.88 1.02 0 0.00166468
+0.88 1.36 0 0.00166468
+1.02 1.02 0 0.00166468
+1.02 1.36 0 0.00166468
+1.36 0 1.36 0.00166468
+END DIST
+
+Metal 2 RESOVER 1
+DIST count 0 width 0.14
+END DIST
+
+Metal 2 OVER
+WIDTH Table 1 entries:  0.14
+
+Metal 2 OVER 0
+DIST count 12 width 0.14
+0.14 9.88048e-05 1.0111e-05 0.000832338
+0.28 8.8783e-05 1.27521e-05 0.000832338
+0.35 7.61055e-05 1.38673e-05 0.000832338
+0.42 6.80324e-05 1.48955e-05 0.000832338
+0.49 5.98993e-05 1.59236e-05 0.000832338
+0.56 5.17064e-05 1.69518e-05 0.000832338
+0.63 4.83949e-05 1.77605e-05 0.000832338
+0.7 4.5507e-05 1.855e-05 0.000832338
+0.84 3.97041e-05 2.0129e-05 0.000832338
+1.12 3.04496e-05 2.29407e-05 0.000832338
+1.4 2.61103e-05 2.50524e-05 0.000832338
+1.68 0 4.89214e-05 0.000832338
+END DIST
+
+Metal 2 OVER 1
+DIST count 12 width 0.14
+0.14 9.91354e-05 2.39343e-05 0.000832338
+0.28 8.08546e-05 2.92707e-05 0.000832338
+0.35 6.94154e-05 3.15722e-05 0.000832338
+0.42 6.09841e-05 3.36711e-05 0.000832338
+0.49 5.3178e-05 3.56244e-05 0.000832338
+0.56 4.58992e-05 3.74448e-05 0.000832338
+0.63 4.14743e-05 3.90352e-05 0.000832338
+0.7 3.76683e-05 4.05057e-05 0.000832338
+0.84 3.10455e-05 4.31558e-05 0.000832338
+1.12 2.17494e-05 4.73486e-05 0.000832338
+1.4 1.70932e-05 5.02856e-05 0.000832338
+1.68 0 6.62166e-05 0.000832338
+END DIST
+
+Metal 2 UNDER
+WIDTH Table 1 entries:  0.14
+
+Metal 2 UNDER 3
+DIST count 12 width 0.14
+0.14 9.70828e-05 3.53567e-05 0.000832338
+0.28 7.78497e-05 4.33526e-05 0.000832338
+0.35 6.60614e-05 4.65776e-05 0.000832338
+0.42 5.74304e-05 4.941e-05 0.000832338
+0.49 4.95262e-05 5.19392e-05 0.000832338
+0.56 4.22253e-05 5.42053e-05 0.000832338
+0.63 3.78531e-05 5.6133e-05 0.000832338
+0.7 3.4139e-05 5.78528e-05 0.000832338
+0.84 2.77635e-05 6.07974e-05 0.000832338
+1.12 1.90289e-05 6.50713e-05 0.000832338
+1.4 1.48578e-05 6.77758e-05 0.000832338
+1.68 0 8.15013e-05 0.000832338
+END DIST
+
+Metal 2 UNDER 4
+DIST count 12 width 0.14
+0.14 0.000103289 1.41406e-05 0.000832338
+0.28 8.5105e-05 1.81018e-05 0.000832338
+0.35 7.35498e-05 1.98512e-05 0.000832338
+0.42 6.49725e-05 2.1479e-05 0.000832338
+0.49 5.69438e-05 2.30346e-05 0.000832338
+0.56 4.93881e-05 2.45225e-05 0.000832338
+0.63 4.47227e-05 2.58361e-05 0.000832338
+0.7 4.06631e-05 2.70807e-05 0.000832338
+0.84 3.35095e-05 2.9408e-05 0.000832338
+1.12 2.32378e-05 3.33322e-05 0.000832338
+1.4 1.78669e-05 3.63087e-05 0.000832338
+1.68 0 5.26923e-05 0.000832338
+END DIST
+
+Metal 2 UNDER 5
+DIST count 12 width 0.14
+0.14 0.000103975 1.19465e-05 0.000832338
+0.28 8.67508e-05 1.49494e-05 0.000832338
+0.35 7.5373e-05 1.62893e-05 0.000832338
+0.42 6.69631e-05 1.7549e-05 0.000832338
+0.49 5.91553e-05 1.87746e-05 0.000832338
+0.56 5.17783e-05 1.99675e-05 0.000832338
+0.63 4.72227e-05 2.10179e-05 0.000832338
+0.7 4.3223e-05 2.20289e-05 0.000832338
+0.84 3.60806e-05 2.39671e-05 0.000832338
+1.12 2.55811e-05 2.73679e-05 0.000832338
+1.4 1.9868e-05 3.00715e-05 0.000832338
+1.68 0 4.80324e-05 0.000832338
+END DIST
+
+Metal 2 UNDER 6
+DIST count 12 width 0.14
+0.14 0.000104817 1.05659e-05 0.000832338
+0.28 8.69091e-05 1.33106e-05 0.000832338
+0.35 7.58137e-05 1.45426e-05 0.000832338
+0.42 6.74778e-05 1.57053e-05 0.000832338
+0.49 5.97097e-05 1.68397e-05 0.000832338
+0.56 5.25264e-05 1.79471e-05 0.000832338
+0.63 4.78981e-05 1.89283e-05 0.000832338
+0.7 4.38249e-05 1.98757e-05 0.000832338
+0.84 3.65992e-05 2.16998e-05 0.000832338
+1.12 2.59906e-05 2.49327e-05 0.000832338
+1.4 2.00721e-05 2.75468e-05 0.000832338
+1.68 0 4.55883e-05 0.000832338
+END DIST
+
+Metal 2 DIAGUNDER
+WIDTH Table 1 entries:  0.14
+
+Metal 2 DIAGUNDER 3
+DIST count 13 width 0.14
+0 0 6.40976e-05 0.000832338
+0.14 0 4.46792e-05 0.000832338
+0.28 0 3.90142e-05 0.000832338
+0.35 0 3.62289e-05 0.000832338
+0.42 0 2.99708e-05 0.000832338
+0.49 0 2.47096e-05 0.000832338
+0.56 0 2.28684e-05 0.000832338
+0.63 0 2.12542e-05 0.000832338
+0.7 0 1.98383e-05 0.000832338
+0.84 0 1.75048e-05 0.000832338
+1.12 0 1.43065e-05 0.000832338
+1.4 0 1.23684e-05 0.000832338
+1.68 0 9.4552e-06 0.000832338
+END DIST
+
+Metal 2 DIAGUNDER 4
+DIST count 13 width 0.14
+0 0 2.17741e-05 0.000832338
+0.14 0 2.02217e-05 0.000832338
+0.28 0 1.89142e-05 0.000832338
+0.35 0 1.84404e-05 0.000832338
+0.42 0 1.79774e-05 0.000832338
+0.49 0 1.7525e-05 0.000832338
+0.56 0 1.70831e-05 0.000832338
+0.63 0 1.66516e-05 0.000832338
+0.7 0 1.62303e-05 0.000832338
+0.84 0 1.54182e-05 0.000832338
+1.12 0 1.39134e-05 0.000832338
+1.4 0 1.25614e-05 0.000832338
+1.68 0 1.03615e-05 0.000832338
+END DIST
+
+Metal 2 DIAGUNDER 5
+DIST count 13 width 0.14
+0 0 1.17756e-05 0.000832338
+0.14 0 1.20729e-05 0.000832338
+0.28 0 1.17086e-05 0.000832338
+0.35 0 1.15616e-05 0.000832338
+0.42 0 1.14156e-05 0.000832338
+0.49 0 1.12707e-05 0.000832338
+0.56 0 1.11269e-05 0.000832338
+0.63 0 1.09844e-05 0.000832338
+0.7 0 1.08433e-05 0.000832338
+0.84 0 1.05656e-05 0.000832338
+1.12 0 1.00307e-05 0.000832338
+1.4 0 9.52625e-06 0.000832338
+1.68 0 7.61017e-06 0.000832338
+END DIST
+
+Metal 2 DIAGUNDER 6
+DIST count 13 width 0.14
+0 0 8.84935e-06 0.000832338
+0.14 0 8.44784e-06 0.000832338
+0.28 0 8.27067e-06 0.000832338
+0.35 0 8.18348e-06 0.000832338
+0.42 0 8.09719e-06 0.000832338
+0.49 0 8.01183e-06 0.000832338
+0.56 0 7.92734e-06 0.000832338
+0.63 0 7.84376e-06 0.000832338
+0.7 0 7.76108e-06 0.000832338
+0.84 0 7.59827e-06 0.000832338
+1.12 0 7.2829e-06 0.000832338
+1.4 0 6.9807e-06 0.000832338
+1.68 0 6.72128e-06 0.000832338
+END DIST
+
+Metal 2 OVERUNDER
+WIDTH Table 1 entries:  0.14
+
+Metal 2 OVER 1 UNDER 3
+DIST count 12 width 0.14
+0.14 9.16312e-05 4.83828e-05 0.000832338
+0.28 7.15355e-05 5.96958e-05 0.000832338
+0.35 5.88831e-05 6.40766e-05 0.000832338
+0.42 4.93702e-05 6.78074e-05 0.000832338
+0.49 4.14247e-05 7.10214e-05 0.000832338
+0.56 3.46828e-05 7.38027e-05 0.000832338
+0.63 3.00555e-05 7.61571e-05 0.000832338
+0.7 2.62729e-05 7.81686e-05 0.000832338
+0.84 2.03317e-05 8.14855e-05 0.000832338
+1.12 1.29742e-05 8.59738e-05 0.000832338
+1.4 9.49118e-06 8.86532e-05 0.000832338
+1.68 0 9.76885e-05 0.000832338
+END DIST
+
+Metal 2 OVER 1 UNDER 4
+DIST count 12 width 0.14
+0.14 9.78867e-05 2.71849e-05 0.000832338
+0.28 7.89577e-05 3.4212e-05 0.000832338
+0.35 6.69091e-05 3.71813e-05 0.000832338
+0.42 5.7448e-05 3.98572e-05 0.000832338
+0.49 4.92039e-05 4.22768e-05 0.000832338
+0.56 4.19635e-05 4.44645e-05 0.000832338
+0.63 3.6746e-05 4.64166e-05 0.000832338
+0.7 3.23447e-05 4.82516e-05 0.000832338
+0.84 2.5216e-05 5.13948e-05 0.000832338
+1.12 1.60142e-05 5.6215e-05 0.000832338
+1.4 1.13972e-05 5.95394e-05 0.000832338
+1.68 0 7.04225e-05 0.000832338
+END DIST
+
+Metal 2 OVER 1 UNDER 5
+DIST count 12 width 0.14
+0.14 0.000101706 2.50434e-05 0.000832338
+0.28 7.96482e-05 3.10585e-05 0.000832338
+0.35 6.87431e-05 3.36087e-05 0.000832338
+0.42 6.00561e-05 3.59373e-05 0.000832338
+0.49 5.23432e-05 3.80842e-05 0.000832338
+0.56 4.5418e-05 4.00659e-05 0.000832338
+0.63 4.03375e-05 4.1842e-05 0.000832338
+0.7 3.59528e-05 4.34769e-05 0.000832338
+0.84 2.86355e-05 4.63862e-05 0.000832338
+1.12 1.87189e-05 5.09561e-05 0.000832338
+1.4 1.34077e-05 5.42133e-05 0.000832338
+1.68 0 6.66555e-05 0.000832338
+END DIST
+
+Metal 2 OVER 1 UNDER 6
+DIST count 12 width 0.14
+0.14 0.000102072 2.40548e-05 0.000832338
+0.28 7.98149e-05 2.97337e-05 0.000832338
+0.35 6.90946e-05 3.21609e-05 0.000832338
+0.42 6.04816e-05 3.44021e-05 0.000832338
+0.49 5.28124e-05 3.64722e-05 0.000832338
+0.56 4.5996e-05 3.83864e-05 0.000832338
+0.63 4.08937e-05 4.01088e-05 0.000832338
+0.7 3.64809e-05 4.16974e-05 0.000832338
+0.84 2.91256e-05 4.45313e-05 0.000832338
+1.12 1.91354e-05 4.90102e-05 0.000832338
+1.4 1.36988e-05 5.22366e-05 0.000832338
+1.68 0 6.49048e-05 0.000832338
+END DIST
+
+Metal 3 RESOVER
+WIDTH Table 1 entries:  0.14
+
+Metal 3 RESOVER 0
+DIST count 55 width 0.14
+0 0 0 0.00166468
+0 0.32 0 0.00166468
+0 0.46 0 0.00166468
+0 0.71 0 0.00166468
+0 0.78 0 0.00166468
+0 0.92 0 0.00166468
+0 1.17 0 0.00166468
+0 1.24 0 0.00166468
+0 1.38 0 0.00166468
+0 1.84 0 0.00166468
+0.32 0.32 0 0.00166468
+0.32 0.46 0 0.00166468
+0.32 0.71 0 0.00166468
+0.32 0.78 0 0.00166468
+0.32 0.92 0 0.00166468
+0.32 1.17 0 0.00166468
+0.32 1.24 0 0.00166468
+0.32 1.38 0 0.00166468
+0.32 1.84 0 0.00166468
+0.46 0.46 0 0.00166468
+0.46 0.71 0 0.00166468
+0.46 0.78 0 0.00166468
+0.46 0.92 0 0.00166468
+0.46 1.17 0 0.00166468
+0.46 1.24 0 0.00166468
+0.46 1.38 0 0.00166468
+0.46 1.84 0 0.00166468
+0.71 0.71 0 0.00166468
+0.71 0.78 0 0.00166468
+0.71 0.92 0 0.00166468
+0.71 1.17 0 0.00166468
+0.71 1.24 0 0.00166468
+0.71 1.38 0 0.00166468
+0.71 1.84 0 0.00166468
+0.78 0.78 0 0.00166468
+0.78 0.92 0 0.00166468
+0.78 1.17 0 0.00166468
+0.78 1.24 0 0.00166468
+0.78 1.38 0 0.00166468
+0.78 1.84 0 0.00166468
+0.92 0.92 0 0.00166468
+0.92 1.17 0 0.00166468
+0.92 1.24 0 0.00166468
+0.92 1.38 0 0.00166468
+0.92 1.84 0 0.00166468
+1.17 1.17 0 0.00166468
+1.17 1.24 0 0.00166468
+1.17 1.38 0 0.00166468
+1.17 1.84 0 0.00166468
+1.24 1.24 0 0.00166468
+1.24 1.38 0 0.00166468
+1.24 1.84 0 0.00166468
+1.38 1.38 0 0.00166468
+1.38 1.84 0 0.00166468
+1.84 0 1.84 0.00166468
+END DIST
+
+Metal 3 RESOVER 1
+DIST count 0 width 0.14
+END DIST
+
+Metal 3 RESOVER 2
+DIST count 0 width 0.14
+END DIST
+
+Metal 3 OVER
+WIDTH Table 1 entries:  0.14
+
+Metal 3 OVER 0
+DIST count 12 width 0.14
+0.14 9.95886e-05 8.66356e-06 0.000832338
+0.28 8.88255e-05 1.07302e-05 0.000832338
+0.35 7.64461e-05 1.1588e-05 0.000832338
+0.42 6.85752e-05 1.23733e-05 0.000832338
+0.49 6.06429e-05 1.31587e-05 0.000832338
+0.56 5.26489e-05 1.39442e-05 0.000832338
+0.63 4.94297e-05 1.45637e-05 0.000832338
+0.7 4.6624e-05 1.51688e-05 0.000832338
+0.84 4.09834e-05 1.63789e-05 0.000832338
+1.12 3.1956e-05 1.85702e-05 0.000832338
+1.4 2.76576e-05 2.02986e-05 0.000832338
+1.68 0 4.53683e-05 0.000832338
+END DIST
+
+Metal 3 OVER 1
+DIST count 12 width 0.14
+0.14 0.000104304 1.24143e-05 0.000832338
+0.28 8.58519e-05 1.50557e-05 0.000832338
+0.35 7.46018e-05 1.62531e-05 0.000832338
+0.42 6.62952e-05 1.73825e-05 0.000832338
+0.49 5.86663e-05 1.84787e-05 0.000832338
+0.56 5.14868e-05 1.95418e-05 0.000832338
+0.63 4.70264e-05 2.049e-05 0.000832338
+0.7 4.31361e-05 2.13995e-05 0.000832338
+0.84 3.62643e-05 2.31288e-05 0.000832338
+1.12 2.63053e-05 2.61498e-05 0.000832338
+1.4 2.09504e-05 2.85727e-05 0.000832338
+1.68 0 4.76184e-05 0.000832338
+END DIST
+
+Metal 3 OVER 2
+DIST count 12 width 0.14
+0.14 9.74722e-05 3.19418e-05 0.000832338
+0.28 7.89221e-05 3.80116e-05 0.000832338
+0.35 6.76034e-05 4.05568e-05 0.000832338
+0.42 5.93207e-05 4.28353e-05 0.000832338
+0.49 5.16775e-05 4.49083e-05 0.000832338
+0.56 4.45688e-05 4.67977e-05 0.000832338
+0.63 4.03176e-05 4.84407e-05 0.000832338
+0.7 3.66832e-05 4.99304e-05 0.000832338
+0.84 3.03851e-05 5.25343e-05 0.000832338
+1.12 2.16109e-05 5.64694e-05 0.000832338
+1.4 1.72873e-05 5.91142e-05 0.000832338
+1.68 0 7.51029e-05 0.000832338
+END DIST
+
+Metal 3 UNDER
+WIDTH Table 1 entries:  0.14
+
+Metal 3 UNDER 4
+DIST count 12 width 0.14
+0.14 0.000101016 2.08629e-05 0.000832338
+0.28 8.19589e-05 2.60984e-05 0.000832338
+0.35 7.03318e-05 2.83425e-05 0.000832338
+0.42 6.17297e-05 3.03832e-05 0.000832338
+0.49 5.37774e-05 3.22723e-05 0.000832338
+0.56 4.6375e-05 3.40238e-05 0.000832338
+0.63 4.18411e-05 3.55671e-05 0.000832338
+0.7 3.79445e-05 3.69898e-05 0.000832338
+0.84 3.11871e-05 3.95359e-05 0.000832338
+1.12 2.17322e-05 4.35534e-05 0.000832338
+1.4 1.69792e-05 4.6406e-05 0.000832338
+1.68 0 6.20739e-05 0.000832338
+END DIST
+
+Metal 3 UNDER 5
+DIST count 12 width 0.14
+0.14 0.000104879 1.12334e-05 0.000832338
+0.28 8.70303e-05 1.38459e-05 0.000832338
+0.35 7.58063e-05 1.5012e-05 0.000832338
+0.42 6.74807e-05 1.61091e-05 0.000832338
+0.49 5.97401e-05 1.71751e-05 0.000832338
+0.56 5.24814e-05 1.82113e-05 0.000832338
+0.63 4.79516e-05 1.91357e-05 0.000832338
+0.7 4.39747e-05 2.00256e-05 0.000832338
+0.84 3.68908e-05 2.17287e-05 0.000832338
+1.12 2.64776e-05 2.47429e-05 0.000832338
+1.4 2.07485e-05 2.72066e-05 0.000832338
+1.68 0 4.58318e-05 0.000832338
+END DIST
+
+Metal 3 UNDER 6
+DIST count 12 width 0.14
+0.14 0.000105704 9.54545e-06 0.000832338
+0.28 8.75336e-05 1.17605e-05 0.000832338
+0.35 7.66148e-05 1.27537e-05 0.000832338
+0.42 6.84415e-05 1.36923e-05 0.000832338
+0.49 6.0798e-05 1.46104e-05 0.000832338
+0.56 5.36626e-05 1.55089e-05 0.000832338
+0.63 4.915e-05 1.63118e-05 0.000832338
+0.7 4.51725e-05 1.70897e-05 0.000832338
+0.84 3.80901e-05 1.8593e-05 0.000832338
+1.12 2.7607e-05 2.13009e-05 0.000832338
+1.4 2.16677e-05 2.35667e-05 0.000832338
+1.68 0 4.28474e-05 0.000832338
+END DIST
+
+Metal 3 DIAGUNDER
+WIDTH Table 1 entries:  0.14
+
+Metal 3 DIAGUNDER 4
+DIST count 13 width 0.14
+0 0 4.46265e-05 0.000832338
+0.14 0 4.0557e-05 0.000832338
+0.28 0 3.8065e-05 0.000832338
+0.35 0 3.64345e-05 0.000832338
+0.42 0 3.14032e-05 0.000832338
+0.49 0 2.72764e-05 0.000832338
+0.56 0 2.5971e-05 0.000832338
+0.63 0 2.47473e-05 0.000832338
+0.7 0 2.36003e-05 0.000832338
+0.84 0 2.15173e-05 0.000832338
+1.12 0 1.80784e-05 0.000832338
+1.4 0 1.54233e-05 0.000832338
+1.68 0 1.26967e-05 0.000832338
+END DIST
+
+Metal 3 DIAGUNDER 5
+DIST count 13 width 0.14
+0 0 1.69077e-05 0.000832338
+0.14 0 1.86431e-05 0.000832338
+0.28 0 1.92808e-05 0.000832338
+0.35 0 1.90321e-05 0.000832338
+0.42 0 1.67663e-05 0.000832338
+0.49 0 1.39428e-05 0.000832338
+0.56 0 1.37435e-05 0.000832338
+0.63 0 1.35469e-05 0.000832338
+0.7 0 1.33526e-05 0.000832338
+0.84 0 1.29715e-05 0.000832338
+1.12 0 1.22379e-05 0.000832338
+1.4 0 1.15426e-05 0.000832338
+1.68 0 9.48553e-06 0.000832338
+END DIST
+
+Metal 3 DIAGUNDER 6
+DIST count 13 width 0.14
+0 0 1.17303e-05 0.000832338
+0.14 0 1.09065e-05 0.000832338
+0.28 0 1.06645e-05 0.000832338
+0.35 0 1.05456e-05 0.000832338
+0.42 0 1.0428e-05 0.000832338
+0.49 0 1.03117e-05 0.000832338
+0.56 0 1.01968e-05 0.000832338
+0.63 0 1.00831e-05 0.000832338
+0.7 0 9.97074e-06 0.000832338
+0.84 0 9.74978e-06 0.000832338
+1.12 0 9.32269e-06 0.000832338
+1.4 0 8.91461e-06 0.000832338
+1.68 0 8.58258e-06 0.000832338
+END DIST
+
+Metal 3 OVERUNDER
+WIDTH Table 1 entries:  0.14
+
+Metal 3 OVER 1 UNDER 4
+DIST count 12 width 0.14
+0.14 9.98904e-05 2.38062e-05 0.000832338
+0.28 8.04004e-05 2.99128e-05 0.000832338
+0.35 6.83128e-05 3.25357e-05 0.000832338
+0.42 5.88251e-05 3.49155e-05 0.000832338
+0.49 5.06173e-05 3.70915e-05 0.000832338
+0.56 4.34045e-05 3.90832e-05 0.000832338
+0.63 3.81788e-05 4.08668e-05 0.000832338
+0.7 3.37634e-05 4.24964e-05 0.000832338
+0.84 2.6603e-05 4.53622e-05 0.000832338
+1.12 1.7322e-05 4.97863e-05 0.000832338
+1.4 1.26038e-05 5.28952e-05 0.000832338
+1.68 0 6.47983e-05 0.000832338
+END DIST
+
+Metal 3 OVER 1 UNDER 5
+DIST count 12 width 0.14
+0.14 0.000106706 1.43626e-05 0.000832338
+0.28 8.45202e-05 1.77099e-05 0.000832338
+0.35 7.37471e-05 1.92389e-05 0.000832338
+0.42 6.51256e-05 2.06827e-05 0.000832338
+0.49 5.74484e-05 2.20619e-05 0.000832338
+0.56 5.051e-05 2.33794e-05 0.000832338
+0.63 4.53154e-05 2.4596e-05 0.000832338
+0.7 4.07788e-05 2.5753e-05 0.000832338
+0.84 3.31007e-05 2.79097e-05 0.000832338
+1.12 2.2391e-05 3.16096e-05 0.000832338
+1.4 1.63545e-05 3.45736e-05 0.000832338
+1.68 0 4.94135e-05 0.000832338
+END DIST
+
+Metal 3 OVER 1 UNDER 6
+DIST count 12 width 0.14
+0.14 0.000107257 1.25961e-05 0.000832338
+0.28 8.50387e-05 1.55389e-05 0.000832338
+0.35 7.44496e-05 1.68954e-05 0.000832338
+0.42 6.59804e-05 1.81836e-05 0.000832338
+0.49 5.84182e-05 1.94208e-05 0.000832338
+0.56 5.15984e-05 2.06088e-05 0.000832338
+0.63 4.6428e-05 2.1712e-05 0.000832338
+0.7 4.18969e-05 2.27664e-05 0.000832338
+0.84 3.42172e-05 2.4747e-05 0.000832338
+1.12 2.34268e-05 2.81963e-05 0.000832338
+1.4 1.72081e-05 3.10183e-05 0.000832338
+1.68 0 4.65119e-05 0.000832338
+END DIST
+
+Metal 3 OVER 2 UNDER 4
+DIST count 12 width 0.14
+0.14 9.3616e-05 4.26796e-05 0.000832338
+0.28 7.3434e-05 5.26539e-05 0.000832338
+0.35 6.09343e-05 5.66103e-05 0.000832338
+0.42 5.14512e-05 6.0024e-05 0.000832338
+0.49 4.34448e-05 6.29933e-05 0.000832338
+0.56 3.65907e-05 6.55853e-05 0.000832338
+0.63 3.18522e-05 6.78135e-05 0.000832338
+0.7 2.79527e-05 6.98356e-05 0.000832338
+0.84 2.17852e-05 7.30656e-05 0.000832338
+1.12 1.40767e-05 7.74868e-05 0.000832338
+1.4 1.03767e-05 8.02763e-05 0.000832338
+1.68 0 9.02052e-05 0.000832338
+END DIST
+
+Metal 3 OVER 2 UNDER 5
+DIST count 12 width 0.14
+0.14 0.000100192 3.34231e-05 0.000832338
+0.28 7.77168e-05 4.03124e-05 0.000832338
+0.35 6.68169e-05 4.32051e-05 0.000832338
+0.42 5.81934e-05 4.5792e-05 0.000832338
+0.49 5.05642e-05 4.81243e-05 0.000832338
+0.56 4.37657e-05 5.02307e-05 0.000832338
+0.63 3.88286e-05 5.20946e-05 0.000832338
+0.7 3.45929e-05 5.38699e-05 0.000832338
+0.84 2.75703e-05 5.67789e-05 0.000832338
+1.12 1.81553e-05 6.10493e-05 0.000832338
+1.4 1.31873e-05 6.41123e-05 0.000832338
+1.68 0 7.62363e-05 0.000832338
+END DIST
+
+Metal 3 OVER 2 UNDER 6
+DIST count 12 width 0.14
+0.14 0.000100595 3.18283e-05 0.000832338
+0.28 7.817e-05 3.82687e-05 0.000832338
+0.35 6.7523e-05 4.09901e-05 0.000832338
+0.42 5.90295e-05 4.34334e-05 0.000832338
+0.49 5.14872e-05 4.56438e-05 0.000832338
+0.56 4.47782e-05 4.76466e-05 0.000832338
+0.63 3.98424e-05 4.94268e-05 0.000832338
+0.7 3.55917e-05 5.10389e-05 0.000832338
+0.84 2.85338e-05 5.38388e-05 0.000832338
+1.12 1.90023e-05 5.80749e-05 0.000832338
+1.4 1.385e-05 6.09946e-05 0.000832338
+1.68 0 7.36516e-05 0.000832338
+END DIST
+
+Metal 4 RESOVER
+WIDTH Table 1 entries:  0.3
+
+Metal 4 RESOVER 0
+DIST count 55 width 0.3
+0 0 0 0.000232242
+0 0.38 0 0.000232242
+0 0.68 0 0.000232242
+0 0.91 0 0.000232242
+0 1.06 0 0.000232242
+0 1.36 0 0.000232242
+0 1.59 0 0.000232242
+0 1.74 0 0.000232242
+0 2.04 0 0.000232242
+0 2.72 0 0.000232242
+0.38 0.38 0 0.000232242
+0.38 0.68 0 0.000232242
+0.38 0.91 0 0.000232242
+0.38 1.06 0 0.000232242
+0.38 1.36 0 0.000232242
+0.38 1.59 0 0.000232242
+0.38 1.74 0 0.000232242
+0.38 2.04 0 0.000232242
+0.38 2.72 0 0.000232242
+0.68 0.68 0 0.000232242
+0.68 0.91 0 0.000232242
+0.68 1.06 0 0.000232242
+0.68 1.36 0 0.000232242
+0.68 1.59 0 0.000232242
+0.68 1.74 0 0.000232242
+0.68 2.04 0 0.000232242
+0.68 2.72 0 0.000232242
+0.91 0.91 0 0.000232242
+0.91 1.06 0 0.000232242
+0.91 1.36 0 0.000232242
+0.91 1.59 0 0.000232242
+0.91 1.74 0 0.000232242
+0.91 2.04 0 0.000232242
+0.91 2.72 0 0.000232242
+1.06 1.06 0 0.000232242
+1.06 1.36 0 0.000232242
+1.06 1.59 0 0.000232242
+1.06 1.74 0 0.000232242
+1.06 2.04 0 0.000232242
+1.06 2.72 0 0.000232242
+1.36 1.36 0 0.000232242
+1.36 1.59 0 0.000232242
+1.36 1.74 0 0.000232242
+1.36 2.04 0 0.000232242
+1.36 2.72 0 0.000232242
+1.59 1.59 0 0.000232242
+1.59 1.74 0 0.000232242
+1.59 2.04 0 0.000232242
+1.59 2.72 0 0.000232242
+1.74 1.74 0 0.000232242
+1.74 2.04 0 0.000232242
+1.74 2.72 0 0.000232242
+2.04 2.04 0 0.000232242
+2.04 2.72 0 0.000232242
+2.72 0 2.72 0.000232242
+END DIST
+
+Metal 4 RESOVER 1
+DIST count 0 width 0.3
+END DIST
+
+Metal 4 RESOVER 2
+DIST count 0 width 0.3
+END DIST
+
+Metal 4 RESOVER 3
+DIST count 0 width 0.3
+END DIST
+
+Metal 4 OVER
+WIDTH Table 1 entries:  0.3
+
+Metal 4 OVER 0
+DIST count 12 width 0.3
+0.3 0.00011051 1.02879e-05 0.000116121
+0.6 8.19261e-05 1.2984e-05 0.000116121
+0.75 7.25023e-05 1.41442e-05 0.000116121
+0.9 6.44546e-05 1.52642e-05 0.000116121
+1.05 5.65582e-05 1.63732e-05 0.000116121
+1.2 5.25615e-05 1.72763e-05 0.000116121
+1.35 4.85505e-05 1.81795e-05 0.000116121
+1.5 4.45247e-05 1.90825e-05 0.000116121
+1.8 3.67938e-05 2.08517e-05 0.000116121
+2.4 3.0327e-05 2.34662e-05 0.000116121
+3 2.3827e-05 2.60806e-05 0.000116121
+3.6 0 4.8641e-05 0.000116121
+END DIST
+
+Metal 4 OVER 1
+DIST count 12 width 0.3
+0.3 0.000108888 1.40879e-05 0.000116121
+0.6 7.86515e-05 1.71442e-05 0.000116121
+0.75 6.9244e-05 1.8551e-05 0.000116121
+0.9 6.15179e-05 1.9903e-05 0.000116121
+1.05 5.44817e-05 2.12117e-05 0.000116121
+1.2 4.97889e-05 2.23793e-05 0.000116121
+1.35 4.5461e-05 2.3509e-05 0.000116121
+1.5 4.14298e-05 2.4602e-05 0.000116121
+1.8 3.42436e-05 2.6665e-05 0.000116121
+2.4 2.63008e-05 2.99587e-05 0.000116121
+3 2.01084e-05 3.23104e-05 0.000116121
+3.6 0 5.06128e-05 0.000116121
+END DIST
+
+Metal 4 OVER 2
+DIST count 12 width 0.3
+0.3 0.000106929 1.84859e-05 0.000116121
+0.6 7.67853e-05 2.24964e-05 0.000116121
+0.75 6.72511e-05 2.42941e-05 0.000116121
+0.9 5.59439e-05 2.18909e-05 0.000116121
+1.05 4.92103e-05 2.87287e-05 0.000116121
+1.2 4.7352e-05 2.90482e-05 0.000116121
+1.35 4.29778e-05 3.04193e-05 0.000116121
+1.5 3.52494e-05 3.32536e-05 0.000116121
+1.8 3.17837e-05 3.41439e-05 0.000116121
+2.4 2.41485e-05 3.79156e-05 0.000116121
+3 1.83098e-05 4.10551e-05 0.000116121
+3.6 0 5.85199e-05 0.000116121
+END DIST
+
+Metal 4 OVER 3
+DIST count 12 width 0.3
+0.3 0.000101626 3.55967e-05 0.000116121
+0.6 7.20546e-05 4.17895e-05 0.000116121
+0.75 6.25851e-05 4.44171e-05 0.000116121
+0.9 5.47541e-05 4.68079e-05 0.000116121
+1.05 4.76904e-05 4.89994e-05 0.000116121
+1.2 4.30846e-05 5.09142e-05 0.000116121
+1.35 3.89003e-05 5.26734e-05 0.000116121
+1.5 3.50556e-05 5.42936e-05 0.000116121
+1.8 2.83309e-05 5.71551e-05 0.000116121
+2.4 2.15063e-05 6.1298e-05 0.000116121
+3 1.63169e-05 6.44075e-05 0.000116121
+3.6 0 8.01409e-05 0.000116121
+END DIST
+
+Metal 4 UNDER
+WIDTH Table 1 entries:  0.3
+
+Metal 4 UNDER 5
+DIST count 12 width 0.3
+0.3 0.000101209 4.12679e-05 0.000116121
+0.6 7.1056e-05 4.97449e-05 0.000116121
+0.75 6.09797e-05 5.31621e-05 0.000116121
+0.9 5.26322e-05 5.6164e-05 0.000116121
+1.05 4.51725e-05 5.88209e-05 0.000116121
+1.2 4.02705e-05 6.10831e-05 0.000116121
+1.35 3.58892e-05 6.30945e-05 0.000116121
+1.5 3.19289e-05 6.489e-05 0.000116121
+1.8 2.51489e-05 6.79318e-05 0.000116121
+2.4 1.85595e-05 7.20386e-05 0.000116121
+3 1.37508e-05 7.4902e-05 0.000116121
+3.6 0 8.81389e-05 0.000116121
+END DIST
+
+Metal 4 UNDER 6
+DIST count 12 width 0.3
+0.3 0.000106735 1.33243e-05 0.000116121
+0.6 7.80598e-05 1.86359e-05 0.000116121
+0.75 6.81915e-05 2.05792e-05 0.000116121
+0.9 5.65938e-05 2.11984e-05 0.000116121
+1.05 4.93233e-05 2.28607e-05 0.000116121
+1.2 4.72428e-05 2.5668e-05 0.000116121
+1.35 3.82161e-05 2.58422e-05 0.000116121
+1.5 3.8253e-05 2.85132e-05 0.000116121
+1.8 2.62728e-05 2.96684e-05 0.000116121
+2.4 2.25213e-05 3.50434e-05 0.000116121
+3 1.64711e-05 3.83182e-05 0.000116121
+3.6 0 4.71362e-05 0.000116121
+END DIST
+
+Metal 4 DIAGUNDER
+WIDTH Table 1 entries:  0.3
+
+Metal 4 DIAGUNDER 5
+DIST count 13 width 0.3
+0 0 5.67618e-05 0.000116121
+0.3 0 4.24587e-05 0.000116121
+0.6 0 3.5862e-05 0.000116121
+0.75 0 3.29409e-05 0.000116121
+0.9 0 3.04796e-05 0.000116121
+1.05 0 2.83907e-05 0.000116121
+1.2 0 2.66045e-05 0.000116121
+1.35 0 2.50645e-05 0.000116121
+1.5 0 2.37192e-05 0.000116121
+1.8 0 1.9851e-05 0.000116121
+2.4 0 1.44978e-05 0.000116121
+3 0 1.20519e-05 0.000116121
+3.6 0 9.88667e-06 0.000116121
+END DIST
+
+Metal 4 DIAGUNDER 6
+DIST count 13 width 0.3
+0 0 2.76036e-05 0.000116121
+0.3 0 2.38454e-05 0.000116121
+0.6 0 2.21847e-05 0.000116121
+0.75 0 2.14482e-05 0.000116121
+0.9 0 2.07422e-05 0.000116121
+1.05 0 2.00649e-05 0.000116121
+1.2 0 1.94154e-05 0.000116121
+1.35 0 1.8792e-05 0.000116121
+1.5 0 1.81936e-05 0.000116121
+1.8 0 1.70678e-05 0.000116121
+2.4 0 1.50707e-05 0.000116121
+3 0 1.33674e-05 0.000116121
+3.6 0 1.13075e-05 0.000116121
+END DIST
+
+Metal 4 OVERUNDER
+WIDTH Table 1 entries:  0.3
+
+Metal 4 OVER 1 UNDER 5
+DIST count 12 width 0.3
+0.3 0.000100211 4.39237e-05 0.000116121
+0.6 6.89348e-05 5.33325e-05 0.000116121
+0.75 5.86874e-05 5.70379e-05 0.000116121
+0.9 5.03754e-05 6.02512e-05 0.000116121
+1.05 4.32674e-05 6.3068e-05 0.000116121
+1.2 3.80021e-05 6.54953e-05 0.000116121
+1.35 3.3473e-05 6.76328e-05 0.000116121
+1.5 2.95373e-05 6.95213e-05 0.000116121
+1.8 2.31134e-05 7.26778e-05 0.000116121
+2.4 1.60175e-05 7.70123e-05 0.000116121
+3 1.15289e-05 7.96356e-05 0.000116121
+3.6 0 9.0415e-05 0.000116121
+END DIST
+
+Metal 4 OVER 1 UNDER 6
+DIST count 12 width 0.3
+0.3 0.000105465 1.56169e-05 0.000116121
+0.6 7.34848e-05 2.06358e-05 0.000116121
+0.75 6.59455e-05 2.4579e-05 0.000116121
+0.9 5.40959e-05 2.47493e-05 0.000116121
+1.05 4.67184e-05 2.66209e-05 0.000116121
+1.2 4.49303e-05 3.02538e-05 0.000116121
+1.35 3.50247e-05 2.9976e-05 0.000116121
+1.5 3.57323e-05 3.34423e-05 0.000116121
+1.8 2.84654e-05 3.62319e-05 0.000116121
+2.4 1.97197e-05 4.06309e-05 0.000116121
+3 7.0665e-06 3.29512e-05 0.000116121
+3.6 0 5.68256e-05 0.000116121
+END DIST
+
+Metal 4 OVER 2 UNDER 5
+DIST count 12 width 0.3
+0.3 9.86769e-05 4.83524e-05 0.000116121
+0.6 6.43751e-05 5.63417e-05 0.000116121
+0.75 5.37156e-05 6.00864e-05 0.000116121
+0.9 4.81446e-05 6.65093e-05 0.000116121
+1.05 4.09683e-05 6.95559e-05 0.000116121
+1.2 3.27021e-05 7.34572e-05 0.000116121
+1.35 2.81458e-05 7.58009e-05 0.000116121
+1.5 2.73589e-05 7.64051e-05 0.000116121
+1.8 2.11236e-05 7.96781e-05 0.000116121
+2.4 1.17356e-05 8.57508e-05 0.000116121
+3 1.03267e-05 8.69461e-05 0.000116121
+3.6 0 9.69922e-05 0.000116121
+END DIST
+
+Metal 4 OVER 2 UNDER 6
+DIST count 12 width 0.3
+0.3 0.000104655 2.04617e-05 0.000116121
+0.6 7.0691e-05 2.43333e-05 0.000116121
+0.75 6.39119e-05 3.01423e-05 0.000116121
+0.9 5.05081e-05 2.85857e-05 0.000116121
+1.05 4.28765e-05 3.5071e-05 0.000116121
+1.2 4.25235e-05 3.67388e-05 0.000116121
+1.35 3.14752e-05 3.91681e-05 0.000116121
+1.5 3.33463e-05 4.03147e-05 0.000116121
+1.8 2.6208e-05 4.33704e-05 0.000116121
+2.4 1.78765e-05 4.80498e-05 0.000116121
+3 7.41515e-06 5.2507e-05 0.000116121
+3.6 0 6.36853e-05 0.000116121
+END DIST
+
+Metal 4 OVER 3 UNDER 5
+DIST count 12 width 0.3
+0.3 9.3614e-05 6.52119e-05 0.000116121
+0.6 6.22418e-05 7.82843e-05 0.000116121
+0.75 5.18845e-05 8.31452e-05 0.000116121
+0.9 4.3617e-05 8.71976e-05 0.000116121
+1.05 3.67056e-05 9.06055e-05 0.000116121
+1.2 3.17585e-05 9.34395e-05 0.000116121
+1.35 2.76006e-05 9.58474e-05 0.000116121
+1.5 2.40592e-05 9.7906e-05 0.000116121
+1.8 1.84185e-05 0.000101202 0.000116121
+2.4 1.2666e-05 0.000105414 0.000116121
+3 9.10825e-06 0.000108008 0.000116121
+3.6 0 0.000116951 0.000116121
+END DIST
+
+Metal 4 OVER 3 UNDER 6
+DIST count 12 width 0.3
+0.3 9.96634e-05 3.74054e-05 0.000116121
+0.6 6.76414e-05 4.58695e-05 0.000116121
+0.75 5.92122e-05 5.03285e-05 0.000116121
+0.9 4.83733e-05 5.2384e-05 0.000116121
+1.05 4.11575e-05 5.51101e-05 0.000116121
+1.2 3.8372e-05 5.85575e-05 0.000116121
+1.35 3.04112e-05 5.96677e-05 0.000116121
+1.5 2.97104e-05 6.26593e-05 0.000116121
+1.8 2.30955e-05 6.59715e-05 0.000116121
+2.4 1.56832e-05 7.06933e-05 0.000116121
+3 7.60821e-06 7.26156e-05 0.000116121
+3.6 0 8.46603e-05 0.000116121
+END DIST
+
+Metal 5 RESOVER
+WIDTH Table 1 entries:  0.3
+
+Metal 5 RESOVER 0
+DIST count 55 width 0.3
+0 0 0 0.000232242
+0 0.62 0 0.000232242
+0 0.92 0 0.000232242
+0 1.39 0 0.000232242
+0 1.54 0 0.000232242
+0 1.84 0 0.000232242
+0 2.31 0 0.000232242
+0 2.46 0 0.000232242
+0 2.76 0 0.000232242
+0 3.68 0 0.000232242
+0.62 0.62 0 0.000232242
+0.62 0.92 0 0.000232242
+0.62 1.39 0 0.000232242
+0.62 1.54 0 0.000232242
+0.62 1.84 0 0.000232242
+0.62 2.31 0 0.000232242
+0.62 2.46 0 0.000232242
+0.62 2.76 0 0.000232242
+0.62 3.68 0 0.000232242
+0.92 0.92 0 0.000232242
+0.92 1.39 0 0.000232242
+0.92 1.54 0 0.000232242
+0.92 1.84 0 0.000232242
+0.92 2.31 0 0.000232242
+0.92 2.46 0 0.000232242
+0.92 2.76 0 0.000232242
+0.92 3.68 0 0.000232242
+1.39 1.39 0 0.000232242
+1.39 1.54 0 0.000232242
+1.39 1.84 0 0.000232242
+1.39 2.31 0 0.000232242
+1.39 2.46 0 0.000232242
+1.39 2.76 0 0.000232242
+1.39 3.68 0 0.000232242
+1.54 1.54 0 0.000232242
+1.54 1.84 0 0.000232242
+1.54 2.31 0 0.000232242
+1.54 2.46 0 0.000232242
+1.54 2.76 0 0.000232242
+1.54 3.68 0 0.000232242
+1.84 1.84 0 0.000232242
+1.84 2.31 0 0.000232242
+1.84 2.46 0 0.000232242
+1.84 2.76 0 0.000232242
+1.84 3.68 0 0.000232242
+2.31 2.31 0 0.000232242
+2.31 2.46 0 0.000232242
+2.31 2.76 0 0.000232242
+2.31 3.68 0 0.000232242
+2.46 2.46 0 0.000232242
+2.46 2.76 0 0.000232242
+2.46 3.68 0 0.000232242
+2.76 2.76 0 0.000232242
+2.76 3.68 0 0.000232242
+3.68 0 3.68 0.000232242
+END DIST
+
+Metal 5 RESOVER 1
+DIST count 0 width 0.3
+END DIST
+
+Metal 5 RESOVER 2
+DIST count 0 width 0.3
+END DIST
+
+Metal 5 RESOVER 3
+DIST count 0 width 0.3
+END DIST
+
+Metal 5 RESOVER 4
+DIST count 0 width 0.3
+END DIST
+
+Metal 5 OVER
+WIDTH Table 1 entries:  0.3
+
+Metal 5 OVER 0
+DIST count 12 width 0.3
+0.3 0.000109265 8.73705e-06 0.000116121
+0.6 8.31978e-05 1.07388e-05 0.000116121
+0.75 7.47551e-05 1.15548e-05 0.000116121
+0.9 6.69664e-05 1.23511e-05 0.000116121
+1.05 5.98394e-05 1.31171e-05 0.000116121
+1.2 5.59151e-05 1.37488e-05 0.000116121
+1.35 5.19727e-05 1.43805e-05 0.000116121
+1.5 4.80121e-05 1.50122e-05 0.000116121
+1.8 4.07061e-05 1.62356e-05 0.000116121
+2.4 3.41693e-05 1.8196e-05 0.000116121
+3 2.75844e-05 2.01564e-05 0.000116121
+3.6 0 4.61218e-05 0.000116121
+END DIST
+
+Metal 5 OVER 1
+DIST count 12 width 0.3
+0.3 0.000108925 1.14109e-05 0.000116121
+0.6 8.1156e-05 1.33373e-05 0.000116121
+0.75 7.25996e-05 1.42182e-05 0.000116121
+0.9 6.5216e-05 1.50819e-05 0.000116121
+1.05 5.8728e-05 1.59193e-05 0.000116121
+1.2 5.42689e-05 1.66763e-05 0.000116121
+1.35 5.01762e-05 1.74193e-05 0.000116121
+1.5 4.63301e-05 1.81478e-05 0.000116121
+1.8 3.95127e-05 1.95412e-05 0.000116121
+2.4 3.15195e-05 2.12276e-05 0.000116121
+3 2.32542e-05 1.65458e-05 0.000116121
+3.6 0 4.55753e-05 0.000116121
+END DIST
+
+Metal 5 OVER 2
+DIST count 12 width 0.3
+0.3 0.000107931 1.06276e-05 0.000116121
+0.6 7.89183e-05 1.21072e-05 0.000116121
+0.75 7.19584e-05 1.59853e-05 0.000116121
+0.9 6.2849e-05 1.35213e-05 0.000116121
+1.05 5.66737e-05 1.81287e-05 0.000116121
+1.2 5.34521e-05 1.87284e-05 0.000116121
+1.35 4.75257e-05 1.99342e-05 0.000116121
+1.5 4.36473e-05 2.07958e-05 0.000116121
+1.8 3.84735e-05 2.19089e-05 0.000116121
+2.4 2.79092e-05 2.53136e-05 0.000116121
+3 2.38888e-05 2.69006e-05 0.000116121
+3.6 0 4.89306e-05 0.000116121
+END DIST
+
+Metal 5 OVER 3
+DIST count 12 width 0.3
+0.3 0.000106719 1.21189e-05 0.000116121
+0.6 7.75913e-05 1.40096e-05 0.000116121
+0.75 7.1042e-05 1.80606e-05 0.000116121
+0.9 6.34787e-05 1.91806e-05 0.000116121
+1.05 5.5037e-05 2.10922e-05 0.000116121
+1.2 5.00348e-05 2.22059e-05 0.000116121
+1.35 4.81176e-05 2.21823e-05 0.000116121
+1.5 4.1618e-05 2.43066e-05 0.000116121
+1.8 3.71715e-05 2.48359e-05 0.000116121
+2.4 2.57652e-05 2.95909e-05 0.000116121
+3 2.26876e-05 3.03256e-05 0.000116121
+3.6 0 5.14271e-05 0.000116121
+END DIST
+
+Metal 5 OVER 4
+DIST count 12 width 0.3
+0.3 9.96362e-05 3.76065e-05 0.000116121
+0.6 7.24824e-05 4.35473e-05 0.000116121
+0.75 6.38281e-05 4.60546e-05 0.000116121
+0.9 5.63424e-05 4.83366e-05 0.000116121
+1.05 4.97968e-05 5.04096e-05 0.000116121
+1.2 4.53075e-05 5.22412e-05 0.000116121
+1.35 4.11988e-05 5.39165e-05 0.000116121
+1.5 3.74e-05 5.54513e-05 0.000116121
+1.8 3.08578e-05 5.81355e-05 0.000116121
+2.4 2.385e-05 6.21183e-05 0.000116121
+3 1.84578e-05 6.50337e-05 0.000116121
+3.6 0 8.27106e-05 0.000116121
+END DIST
+
+Metal 5 UNDER
+WIDTH Table 1 entries:  0.3
+
+Metal 5 UNDER 6
+DIST count 12 width 0.3
+0.3 0.000101409 2.72811e-05 0.000116121
+0.6 7.3252e-05 3.40203e-05 0.000116121
+0.75 6.38523e-05 3.68041e-05 0.000116121
+0.9 5.57354e-05 3.93003e-05 0.000116121
+1.05 4.86853e-05 4.1536e-05 0.000116121
+1.2 4.3802e-05 4.34884e-05 0.000116121
+1.35 3.94007e-05 4.52499e-05 0.000116121
+1.5 3.53934e-05 4.68427e-05 0.000116121
+1.8 2.86254e-05 4.95793e-05 0.000116121
+2.4 2.15962e-05 5.35155e-05 0.000116121
+3 1.64212e-05 5.63002e-05 0.000116121
+3.6 0 7.20468e-05 0.000116121
+END DIST
+
+Metal 5 DIAGUNDER
+WIDTH Table 1 entries:  0.3
+
+Metal 5 DIAGUNDER 6
+DIST count 13 width 0.3
+0 0 6.55417e-05 0.000116121
+0.3 0 4.79432e-05 0.000116121
+0.6 0 4.06918e-05 0.000116121
+0.75 0 3.81295e-05 0.000116121
+0.9 0 3.57935e-05 0.000116121
+1.05 0 3.36608e-05 0.000116121
+1.2 0 3.17101e-05 0.000116121
+1.35 0 2.9923e-05 0.000116121
+1.5 0 2.82828e-05 0.000116121
+1.8 0 2.53869e-05 0.000116121
+2.4 0 2.08146e-05 0.000116121
+3 0 1.74223e-05 0.000116121
+3.6 0 1.41145e-05 0.000116121
+END DIST
+
+Metal 5 OVERUNDER
+WIDTH Table 1 entries:  0.3
+
+Metal 5 OVER 1 UNDER 6
+DIST count 12 width 0.3
+0.3 0.000101377 2.91595e-05 0.000116121
+0.6 7.21041e-05 3.60517e-05 0.000116121
+0.75 6.25667e-05 3.89288e-05 0.000116121
+0.9 5.45869e-05 4.15038e-05 0.000116121
+1.05 4.78091e-05 4.38078e-05 0.000116121
+1.2 4.26309e-05 4.58451e-05 0.000116121
+1.35 3.8139e-05 4.76762e-05 0.000116121
+1.5 3.41835e-05 4.93249e-05 0.000116121
+1.8 2.76693e-05 5.21478e-05 0.000116121
+2.4 1.99751e-05 5.59196e-05 0.000116121
+3 1.4893e-05 5.83766e-05 0.000116121
+3.6 0 7.24029e-05 0.000116121
+END DIST
+
+Metal 5 OVER 2 UNDER 6
+DIST count 12 width 0.3
+0.3 0.000100953 3.04289e-05 0.000116121
+0.6 7.06057e-05 3.55231e-05 0.000116121
+0.75 6.07488e-05 3.82822e-05 0.000116121
+0.9 5.38959e-05 4.33167e-05 0.000116121
+1.05 4.59596e-05 4.60557e-05 0.000116121
+1.2 4.18288e-05 4.78152e-05 0.000116121
+1.35 3.59012e-05 5.01466e-05 0.000116121
+1.5 3.33049e-05 5.14047e-05 0.000116121
+1.8 2.67725e-05 5.43043e-05 0.000116121
+2.4 1.91119e-05 5.8514e-05 0.000116121
+3 1.41227e-05 6.14157e-05 0.000116121
+3.6 0 7.47714e-05 0.000116121
+END DIST
+
+Metal 5 OVER 3 UNDER 6
+DIST count 12 width 0.3
+0.3 9.9815e-05 3.02466e-05 0.000116121
+0.6 7.0956e-05 3.95845e-05 0.000116121
+0.75 5.93162e-05 4.03842e-05 0.000116121
+0.9 5.10608e-05 4.29733e-05 0.000116121
+1.05 4.60294e-05 4.80955e-05 0.000116121
+1.2 3.8754e-05 5.13007e-05 0.000116121
+1.35 3.61811e-05 5.22681e-05 0.000116121
+1.5 3.0071e-05 5.5181e-05 0.000116121
+1.8 2.56646e-05 5.70204e-05 0.000116121
+2.4 1.58407e-05 6.27673e-05 0.000116121
+3 1.32925e-05 6.42663e-05 0.000116121
+3.6 0 7.69409e-05 0.000116121
+END DIST
+
+Metal 5 OVER 4 UNDER 6
+DIST count 12 width 0.3
+0.3 9.30292e-05 5.43429e-05 0.000116121
+0.6 6.36471e-05 6.61165e-05 0.000116121
+0.75 5.3799e-05 7.06012e-05 0.000116121
+0.9 4.57298e-05 7.43922e-05 0.000116121
+1.05 3.90537e-05 7.76098e-05 0.000116121
+1.2 3.41031e-05 8.03274e-05 0.000116121
+1.35 2.99069e-05 8.26586e-05 0.000116121
+1.5 2.63056e-05 8.46686e-05 0.000116121
+1.8 2.0588e-05 8.79177e-05 0.000116121
+2.4 1.44388e-05 9.2225e-05 0.000116121
+3 1.05786e-05 9.49006e-05 0.000116121
+3.6 0 0.00010521 0.000116121
+END DIST
+
+Metal 6 RESOVER
+WIDTH Table 1 entries:  1.6
+
+Metal 6 RESOVER 0
+DIST count 55 width 1.6
+0 0 0 2.41625e-05
+0 1.8 0 2.41625e-05
+0 3.4 0 2.41625e-05
+0 4.4 0 2.41625e-05
+0 5.2 0 2.41625e-05
+0 6.8 0 2.41625e-05
+0 7.8 0 2.41625e-05
+0 8.6 0 2.41625e-05
+0 10.2 0 2.41625e-05
+0 13.6 0 2.41625e-05
+1.8 1.8 0 2.41625e-05
+1.8 3.4 0 2.41625e-05
+1.8 4.4 0 2.41625e-05
+1.8 5.2 0 2.41625e-05
+1.8 6.8 0 2.41625e-05
+1.8 7.8 0 2.41625e-05
+1.8 8.6 0 2.41625e-05
+1.8 10.2 0 2.41625e-05
+1.8 13.6 0 2.41625e-05
+3.4 3.4 0 2.41625e-05
+3.4 4.4 0 2.41625e-05
+3.4 5.2 0 2.41625e-05
+3.4 6.8 0 2.41625e-05
+3.4 7.8 0 2.41625e-05
+3.4 8.6 0 2.41625e-05
+3.4 10.2 0 2.41625e-05
+3.4 13.6 0 2.41625e-05
+4.4 4.4 0 2.41625e-05
+4.4 5.2 0 2.41625e-05
+4.4 6.8 0 2.41625e-05
+4.4 7.8 0 2.41625e-05
+4.4 8.6 0 2.41625e-05
+4.4 10.2 0 2.41625e-05
+4.4 13.6 0 2.41625e-05
+5.2 5.2 0 2.41625e-05
+5.2 6.8 0 2.41625e-05
+5.2 7.8 0 2.41625e-05
+5.2 8.6 0 2.41625e-05
+5.2 10.2 0 2.41625e-05
+5.2 13.6 0 2.41625e-05
+6.8 6.8 0 2.41625e-05
+6.8 7.8 0 2.41625e-05
+6.8 8.6 0 2.41625e-05
+6.8 10.2 0 2.41625e-05
+6.8 13.6 0 2.41625e-05
+7.8 7.8 0 2.41625e-05
+7.8 8.6 0 2.41625e-05
+7.8 10.2 0 2.41625e-05
+7.8 13.6 0 2.41625e-05
+8.6 8.6 0 2.41625e-05
+8.6 10.2 0 2.41625e-05
+8.6 13.6 0 2.41625e-05
+10.2 10.2 0 2.41625e-05
+10.2 13.6 0 2.41625e-05
+13.6 0 13.6 2.41625e-05
+END DIST
+
+Metal 6 RESOVER 1
+DIST count 0 width 1.6
+END DIST
+
+Metal 6 RESOVER 2
+DIST count 0 width 1.6
+END DIST
+
+Metal 6 RESOVER 3
+DIST count 0 width 1.6
+END DIST
+
+Metal 6 RESOVER 4
+DIST count 0 width 1.6
+END DIST
+
+Metal 6 RESOVER 5
+DIST count 0 width 1.6
+END DIST
+
+Metal 6 OVER
+WIDTH Table 1 entries:  1.6
+
+Metal 6 OVER 0
+DIST count 12 width 1.6
+1.6 8.24063e-05 1.68124e-05 1.20812e-05
+3.2 4.32612e-05 2.19213e-05 1.20812e-05
+4 3.52331e-05 2.41321e-05 1.20812e-05
+4.8 2.98512e-05 2.61415e-05 1.20812e-05
+5.6 2.59284e-05 2.79677e-05 1.20812e-05
+6.4 2.29783e-05 2.96278e-05 1.20812e-05
+7.2 2.06782e-05 3.11367e-05 1.20812e-05
+8 1.88342e-05 3.25083e-05 1.20812e-05
+9.6 1.60207e-05 3.48888e-05 1.20812e-05
+12.8 1.24832e-05 3.84828e-05 1.20812e-05
+16 1.03594e-05 4.09406e-05 1.20812e-05
+19.2 0 5.15432e-05 1.20812e-05
+END DIST
+
+Metal 6 OVER 1
+DIST count 12 width 1.6
+1.6 7.76851e-05 1.70356e-05 1.20812e-05
+3.2 4.0735e-05 2.06128e-05 1.20812e-05
+4 3.31143e-05 2.19899e-05 1.20812e-05
+4.8 2.71738e-05 2.3217e-05 1.20812e-05
+5.6 2.34174e-05 2.43105e-05 1.20812e-05
+6.4 2.02682e-05 3.60981e-05 1.20812e-05
+7.2 1.77935e-05 3.76735e-05 1.20812e-05
+8 1.63966e-05 3.90903e-05 1.20812e-05
+9.6 1.33699e-05 4.15105e-05 1.20812e-05
+12.8 9.54732e-06 4.50562e-05 1.20812e-05
+16 7.25876e-06 4.7386e-05 1.20812e-05
+19.2 0 5.46719e-05 1.20812e-05
+END DIST
+
+Metal 6 OVER 2
+DIST count 12 width 1.6
+1.6 7.62925e-05 2.77346e-05 1.20812e-05
+3.2 3.96046e-05 3.4323e-05 1.20812e-05
+4 3.16059e-05 3.70761e-05 1.20812e-05
+4.8 2.6104e-05 3.95101e-05 1.20812e-05
+5.6 2.20178e-05 4.16625e-05 1.20812e-05
+6.4 1.9255e-05 4.1793e-05 1.20812e-05
+7.2 1.78955e-05 4.34142e-05 1.20812e-05
+8 1.63751e-05 4.4861e-05 1.20812e-05
+9.6 1.1892e-05 4.7307e-05 1.20812e-05
+12.8 9.40238e-06 5.08207e-05 1.20812e-05
+16 6.40335e-06 5.30736e-05 1.20812e-05
+19.2 0 5.90731e-05 1.20812e-05
+END DIST
+
+Metal 6 OVER 3
+DIST count 12 width 1.6
+1.6 7.5138e-05 3.25987e-05 1.20812e-05
+3.2 3.7944e-05 4.01805e-05 1.20812e-05
+4 2.96051e-05 4.32341e-05 1.20812e-05
+4.8 2.56903e-05 4.3079e-05 1.20812e-05
+5.6 2.05768e-05 4.82157e-05 1.20812e-05
+6.4 1.82266e-05 4.70769e-05 1.20812e-05
+7.2 1.65993e-05 5.0369e-05 1.20812e-05
+8 1.48582e-05 5.02032e-05 1.20812e-05
+9.6 1.16036e-05 5.26546e-05 1.20812e-05
+12.8 8.97018e-06 5.61015e-05 1.20812e-05
+16 5.46192e-06 5.82569e-05 1.20812e-05
+19.2 0 6.46597e-05 1.20812e-05
+END DIST
+
+Metal 6 OVER 4
+DIST count 12 width 1.6
+1.6 6.92796e-05 3.97258e-05 1.20812e-05
+3.2 3.22e-05 4.94166e-05 1.20812e-05
+4 2.4737e-05 5.31275e-05 1.20812e-05
+4.8 2.25834e-05 5.19645e-05 1.20812e-05
+5.6 1.60415e-05 5.88178e-05 1.20812e-05
+6.4 1.60017e-05 5.62025e-05 1.20812e-05
+7.2 1.21823e-05 6.27653e-05 1.20812e-05
+8 1.11566e-05 5.92688e-05 1.20812e-05
+9.6 9.96586e-06 6.15802e-05 1.20812e-05
+12.8 5.81278e-06 6.46152e-05 1.20812e-05
+16 4.30955e-06 6.63933e-05 1.20812e-05
+19.2 0 7.19084e-05 1.20812e-05
+END DIST
+
+Metal 6 OVER 5
+DIST count 12 width 1.6
+1.6 5.92076e-05 0.000118438 1.20812e-05
+3.2 3.17629e-05 0.000126394 1.20812e-05
+4 2.49505e-05 0.000129998 1.20812e-05
+4.8 2.05074e-05 0.000132765 1.20812e-05
+5.6 1.73527e-05 0.000134922 1.20812e-05
+6.4 1.50302e-05 0.00013663 1.20812e-05
+7.2 1.32563e-05 0.000138005 1.20812e-05
+8 1.18621e-05 0.000139129 1.20812e-05
+9.6 9.80092e-06 0.000140848 1.20812e-05
+12.8 7.3349e-06 0.000143048 1.20812e-05
+16 5.93284e-06 0.000144389 1.20812e-05
+19.2 0 0.000150292 1.20812e-05
+END DIST
+
+Metal 6 UNDER
+WIDTH Table 0 entries: 
+
+Metal 6 DIAGUNDER
+WIDTH Table 0 entries: 
+END DensityModel 0
diff --git a/sky130/openlane/rules.openrcx.sky130A.min.calibre b/sky130/openlane/rules.openrcx.sky130A.min.calibre
new file mode 100644
index 0000000..c6d9def
--- /dev/null
+++ b/sky130/openlane/rules.openrcx.sky130A.min.calibre
@@ -0,0 +1,1645 @@
+Extraction Rules for OpenRCX
+
+DIAGMODEL ON
+
+LayerCount 6
+DensityRate 1  0
+
+DensityModel 0
+
+Metal 1 RESOVER
+WIDTH Table 1 entries:  0.17
+
+Metal 1 RESOVER 0
+DIST count 55 width 0.17
+0 0 0 0.0511443
+0 0.29 0 0.0511443
+0 0.46 0 0.0511443
+0 0.665 0 0.0511443
+0 0.75 0 0.0511443
+0 0.92 0 0.0511443
+0 1.125 0 0.0511443
+0 1.21 0 0.0511443
+0 1.38 0 0.0511443
+0 1.84 0 0.0511443
+0.29 0.29 0 0.0511443
+0.29 0.46 0 0.0511443
+0.29 0.665 0 0.0511443
+0.29 0.75 0 0.0511443
+0.29 0.92 0 0.0511443
+0.29 1.125 0 0.0511443
+0.29 1.21 0 0.0511443
+0.29 1.38 0 0.0511443
+0.29 1.84 0 0.0511443
+0.46 0.46 0 0.0511443
+0.46 0.665 0 0.0511443
+0.46 0.75 0 0.0511443
+0.46 0.92 0 0.0511443
+0.46 1.125 0 0.0511443
+0.46 1.21 0 0.0511443
+0.46 1.38 0 0.0511443
+0.46 1.84 0 0.0511443
+0.665 0.665 0 0.0511443
+0.665 0.75 0 0.0511443
+0.665 0.92 0 0.0511443
+0.665 1.125 0 0.0511443
+0.665 1.21 0 0.0511443
+0.665 1.38 0 0.0511443
+0.665 1.84 0 0.0511443
+0.75 0.75 0 0.0511443
+0.75 0.92 0 0.0511443
+0.75 1.125 0 0.0511443
+0.75 1.21 0 0.0511443
+0.75 1.38 0 0.0511443
+0.75 1.84 0 0.0511443
+0.92 0.92 0 0.0511443
+0.92 1.125 0 0.0511443
+0.92 1.21 0 0.0511443
+0.92 1.38 0 0.0511443
+0.92 1.84 0 0.0511443
+1.125 1.125 0 0.0511443
+1.125 1.21 0 0.0511443
+1.125 1.38 0 0.0511443
+1.125 1.84 0 0.0511443
+1.21 1.21 0 0.0511443
+1.21 1.38 0 0.0511443
+1.21 1.84 0 0.0511443
+1.38 1.38 0 0.0511443
+1.38 1.84 0 0.0511443
+1.84 0 1.84 0.0511443
+END DIST
+
+Metal 1 OVER
+WIDTH Table 1 entries:  0.17
+
+Metal 1 OVER 0
+DIST count 12 width 0.17
+0.17 6.87234e-05 1.1551e-05 0.0255721
+0.34 4.4998e-05 1.37081e-05 0.0255721
+0.425 3.95695e-05 1.47198e-05 0.0255721
+0.51 3.5368e-05 1.56892e-05 0.0255721
+0.595 3.18534e-05 1.66179e-05 0.0255721
+0.68 2.88938e-05 1.75077e-05 0.0255721
+0.765 2.63918e-05 1.83601e-05 0.0255721
+0.85 2.4264e-05 1.91764e-05 0.0255721
+1.02 2.08419e-05 2.07068e-05 0.0255721
+1.36 1.62749e-05 2.33947e-05 0.0255721
+1.7 1.34316e-05 2.56475e-05 0.0255721
+2.04 0 3.90213e-05 0.0255721
+END DIST
+
+Metal 1 UNDER
+WIDTH Table 1 entries:  0.17
+
+Metal 1 UNDER 2
+DIST count 12 width 0.17
+0.17 6.52952e-05 2.30226e-05 0.0255721
+0.34 3.95729e-05 2.81806e-05 0.0255721
+0.425 3.33851e-05 3.03268e-05 0.0255721
+0.51 2.87213e-05 3.22323e-05 0.0255721
+0.595 2.49693e-05 3.39274e-05 0.0255721
+0.68 2.19113e-05 3.54381e-05 0.0255721
+0.765 1.93958e-05 3.6787e-05 0.0255721
+0.85 1.73084e-05 3.79943e-05 0.0255721
+1.02 1.40743e-05 4.00497e-05 0.0255721
+1.36 1.00515e-05 4.30823e-05 0.0255721
+1.7 7.79712e-06 4.51505e-05 0.0255721
+2.04 0 5.30233e-05 0.0255721
+END DIST
+
+Metal 1 UNDER 3
+DIST count 12 width 0.17
+0.17 6.77117e-05 1.70206e-05 0.0255721
+0.34 4.23678e-05 2.05464e-05 0.0255721
+0.425 3.65081e-05 2.21244e-05 0.0255721
+0.51 3.20398e-05 2.35913e-05 0.0255721
+0.595 2.83573e-05 2.49554e-05 0.0255721
+0.68 2.52817e-05 2.62245e-05 0.0255721
+0.765 2.26873e-05 2.74054e-05 0.0255721
+0.85 2.04768e-05 2.85048e-05 0.0255721
+1.02 1.69069e-05 3.04821e-05 0.0255721
+1.36 1.2128e-05 3.36915e-05 0.0255721
+1.7 9.22154e-06 3.61225e-05 0.0255721
+2.04 0 4.53212e-05 0.0255721
+END DIST
+
+Metal 1 UNDER 4
+DIST count 12 width 0.17
+0.17 6.81514e-05 1.40544e-05 0.0255721
+0.34 4.31976e-05 1.69101e-05 0.0255721
+0.425 3.73957e-05 1.82214e-05 0.0255721
+0.51 3.30952e-05 1.94606e-05 0.0255721
+0.595 2.9557e-05 2.06318e-05 0.0255721
+0.68 2.65969e-05 2.17386e-05 0.0255721
+0.765 2.40909e-05 2.27847e-05 0.0255721
+0.85 2.1944e-05 2.37733e-05 0.0255721
+1.02 1.84324e-05 2.55904e-05 0.0255721
+1.36 1.35901e-05 2.86622e-05 0.0255721
+1.7 1.05017e-05 3.11097e-05 0.0255721
+2.04 0 4.14719e-05 0.0255721
+END DIST
+
+Metal 1 UNDER 5
+DIST count 12 width 0.17
+0.17 6.82911e-05 1.3506e-05 0.0255721
+0.34 4.35373e-05 1.60492e-05 0.0255721
+0.425 3.78077e-05 1.72289e-05 0.0255721
+0.51 3.35264e-05 1.8351e-05 0.0255721
+0.595 3.00784e-05 1.94184e-05 0.0255721
+0.68 2.72013e-05 2.04336e-05 0.0255721
+0.765 2.47696e-05 2.13991e-05 0.0255721
+0.85 2.2687e-05 2.23174e-05 0.0255721
+1.02 1.9271e-05 2.40207e-05 0.0255721
+1.36 1.45123e-05 2.69511e-05 0.0255721
+1.7 1.14089e-05 2.93403e-05 0.0255721
+2.04 0 4.05362e-05 0.0255721
+END DIST
+
+Metal 1 UNDER 6
+DIST count 12 width 0.17
+0.17 6.83208e-05 1.20948e-05 0.0255721
+0.34 4.35782e-05 1.45302e-05 0.0255721
+0.425 3.78477e-05 1.5663e-05 0.0255721
+0.51 3.35603e-05 1.67427e-05 0.0255721
+0.595 3.01526e-05 1.77715e-05 0.0255721
+0.68 2.73178e-05 1.87519e-05 0.0255721
+0.765 2.49265e-05 1.96861e-05 0.0255721
+0.85 2.28805e-05 2.05761e-05 0.0255721
+1.02 1.95222e-05 2.22314e-05 0.0255721
+1.36 1.48239e-05 2.50943e-05 0.0255721
+1.7 1.17304e-05 2.74448e-05 0.0255721
+2.04 0 3.89251e-05 0.0255721
+END DIST
+
+Metal 1 DIAGUNDER
+WIDTH Table 1 entries:  0.17
+
+Metal 1 DIAGUNDER 2
+DIST count 13 width 0.17
+0 0 2.49737e-05 0.0255721
+0.17 0 1.99495e-05 0.0255721
+0.34 0 1.76472e-05 0.0255721
+0.425 0 1.65364e-05 0.0255721
+0.51 0 1.55001e-05 0.0255721
+0.595 0 1.45332e-05 0.0255721
+0.68 0 1.36307e-05 0.0255721
+0.765 0 1.27882e-05 0.0255721
+0.85 0 1.20015e-05 0.0255721
+1.02 0 1.05802e-05 0.0255721
+1.36 0 8.25416e-06 0.0255721
+1.7 0 6.47291e-06 0.0255721
+2.04 0 5.1027e-06 0.0255721
+END DIST
+
+Metal 1 DIAGUNDER 3
+DIST count 13 width 0.17
+0 0 1.28053e-05 0.0255721
+0.17 0 1.13763e-05 0.0255721
+0.34 0 1.06151e-05 0.0255721
+0.425 0 1.02542e-05 0.0255721
+0.51 0 9.90597e-06 0.0255721
+0.595 0 9.56982e-06 0.0255721
+0.68 0 9.24537e-06 0.0255721
+0.765 0 8.93217e-06 0.0255721
+0.85 0 8.62989e-06 0.0255721
+1.02 0 8.05642e-06 0.0255721
+1.36 0 7.02415e-06 0.0255721
+1.7 0 6.12775e-06 0.0255721
+2.04 0 5.68351e-06 0.0255721
+END DIST
+
+Metal 1 DIAGUNDER 4
+DIST count 13 width 0.17
+0 0 8.68809e-06 0.0255721
+0.17 0 8.67564e-06 0.0255721
+0.34 0 8.31741e-06 0.0255721
+0.425 0 8.144e-06 0.0255721
+0.51 0 7.97424e-06 0.0255721
+0.595 0 7.80808e-06 0.0255721
+0.68 0 7.64545e-06 0.0255721
+0.765 0 7.48627e-06 0.0255721
+0.85 0 7.33048e-06 0.0255721
+1.02 0 7.0287e-06 0.0255721
+1.36 0 6.4626e-06 0.0255721
+1.7 0 5.94296e-06 0.0255721
+2.04 0 5.59002e-06 0.0255721
+END DIST
+
+Metal 1 DIAGUNDER 5
+DIST count 13 width 0.17
+0 0 5.53723e-06 0.0255721
+0.17 0 5.62778e-06 0.0255721
+0.34 0 5.46655e-06 0.0255721
+0.425 0 5.3877e-06 0.0255721
+0.51 0 5.31001e-06 0.0255721
+0.595 0 5.23345e-06 0.0255721
+0.68 0 5.15799e-06 0.0255721
+0.765 0 5.08366e-06 0.0255721
+0.85 0 5.0104e-06 0.0255721
+1.02 0 4.86708e-06 0.0255721
+1.36 0 4.59281e-06 0.0255721
+1.7 0 4.33422e-06 0.0255721
+2.04 0 4.14938e-06 0.0255721
+END DIST
+
+Metal 1 DIAGUNDER 6
+DIST count 0 width 0.17
+END DIST
+
+Metal 2 RESOVER
+WIDTH Table 1 entries:  0.14
+
+Metal 2 RESOVER 0
+DIST count 55 width 0.14
+0 0 0 0.00093671
+0 0.2 0 0.00093671
+0 0.34 0 0.00093671
+0 0.47 0 0.00093671
+0 0.54 0 0.00093671
+0 0.68 0 0.00093671
+0 0.81 0 0.00093671
+0 0.88 0 0.00093671
+0 1.02 0 0.00093671
+0 1.36 0 0.00093671
+0.2 0.2 0 0.00093671
+0.2 0.34 0 0.00093671
+0.2 0.47 0 0.00093671
+0.2 0.54 0 0.00093671
+0.2 0.68 0 0.00093671
+0.2 0.81 0 0.00093671
+0.2 0.88 0 0.00093671
+0.2 1.02 0 0.00093671
+0.2 1.36 0 0.00093671
+0.34 0.34 0 0.00093671
+0.34 0.47 0 0.00093671
+0.34 0.54 0 0.00093671
+0.34 0.68 0 0.00093671
+0.34 0.81 0 0.00093671
+0.34 0.88 0 0.00093671
+0.34 1.02 0 0.00093671
+0.34 1.36 0 0.00093671
+0.47 0.47 0 0.00093671
+0.47 0.54 0 0.00093671
+0.47 0.68 0 0.00093671
+0.47 0.81 0 0.00093671
+0.47 0.88 0 0.00093671
+0.47 1.02 0 0.00093671
+0.47 1.36 0 0.00093671
+0.54 0.54 0 0.00093671
+0.54 0.68 0 0.00093671
+0.54 0.81 0 0.00093671
+0.54 0.88 0 0.00093671
+0.54 1.02 0 0.00093671
+0.54 1.36 0 0.00093671
+0.68 0.68 0 0.00093671
+0.68 0.81 0 0.00093671
+0.68 0.88 0 0.00093671
+0.68 1.02 0 0.00093671
+0.68 1.36 0 0.00093671
+0.81 0.81 0 0.00093671
+0.81 0.88 0 0.00093671
+0.81 1.02 0 0.00093671
+0.81 1.36 0 0.00093671
+0.88 0.88 0 0.00093671
+0.88 1.02 0 0.00093671
+0.88 1.36 0 0.00093671
+1.02 1.02 0 0.00093671
+1.02 1.36 0 0.00093671
+1.36 0 1.36 0.00093671
+END DIST
+
+Metal 2 RESOVER 1
+DIST count 0 width 0.14
+END DIST
+
+Metal 2 OVER
+WIDTH Table 1 entries:  0.14
+
+Metal 2 OVER 0
+DIST count 12 width 0.14
+0.14 9.12556e-05 8.79704e-06 0.000468355
+0.28 7.26222e-05 1.08667e-05 0.000468355
+0.35 6.47118e-05 1.17025e-05 0.000468355
+0.42 5.6935e-05 1.25162e-05 0.000468355
+0.49 5.25754e-05 1.31897e-05 0.000468355
+0.56 4.9194e-05 1.3823e-05 0.000468355
+0.63 4.57954e-05 1.44563e-05 0.000468355
+0.7 4.23794e-05 1.50896e-05 0.000468355
+0.84 3.59092e-05 1.63219e-05 0.000468355
+1.12 3.081e-05 1.81278e-05 0.000468355
+1.4 2.56768e-05 1.99337e-05 0.000468355
+1.68 0 4.33544e-05 0.000468355
+END DIST
+
+Metal 2 OVER 1
+DIST count 12 width 0.14
+0.14 8.76976e-05 1.65244e-05 0.000468355
+0.28 6.63663e-05 2.00551e-05 0.000468355
+0.35 5.86085e-05 2.16007e-05 0.000468355
+0.42 5.16014e-05 2.30551e-05 0.000468355
+0.49 4.67458e-05 2.43645e-05 0.000468355
+0.56 4.2762e-05 2.55841e-05 0.000468355
+0.63 3.90931e-05 2.67386e-05 0.000468355
+0.7 3.56829e-05 2.78329e-05 0.000468355
+0.84 2.96768e-05 2.98397e-05 0.000468355
+1.12 2.33002e-05 3.29703e-05 0.000468355
+1.4 1.84417e-05 3.5521e-05 0.000468355
+1.68 0 5.26385e-05 0.000468355
+END DIST
+
+Metal 2 UNDER
+WIDTH Table 1 entries:  0.14
+
+Metal 2 UNDER 3
+DIST count 12 width 0.14
+0.14 8.67988e-05 2.0687e-05 0.000468355
+0.28 6.55324e-05 2.55139e-05 0.000468355
+0.35 5.73678e-05 2.75565e-05 0.000468355
+0.42 4.9974e-05 2.94388e-05 0.000468355
+0.49 4.47996e-05 3.11159e-05 0.000468355
+0.56 4.05618e-05 3.26499e-05 0.000468355
+0.63 3.6697e-05 3.40723e-05 0.000468355
+0.7 3.31425e-05 3.53933e-05 0.000468355
+0.84 2.69764e-05 3.77503e-05 0.000468355
+1.12 2.06406e-05 4.12746e-05 0.000468355
+1.4 1.60097e-05 4.39624e-05 0.000468355
+1.68 0 5.89142e-05 0.000468355
+END DIST
+
+Metal 2 UNDER 4
+DIST count 12 width 0.14
+0.14 8.99609e-05 1.17942e-05 0.000468355
+0.28 6.896e-05 1.45362e-05 0.000468355
+0.35 6.12185e-05 1.57531e-05 0.000468355
+0.42 5.42019e-05 1.69187e-05 0.000468355
+0.49 4.94478e-05 1.79751e-05 0.000468355
+0.56 4.55104e-05 1.89749e-05 0.000468355
+0.63 4.18321e-05 1.99404e-05 0.000468355
+0.7 3.83673e-05 2.08732e-05 0.000468355
+0.84 3.21577e-05 2.26301e-05 0.000468355
+1.12 2.52649e-05 2.54858e-05 0.000468355
+1.4 1.98269e-05 2.79771e-05 0.000468355
+1.68 0 4.60424e-05 0.000468355
+END DIST
+
+Metal 2 UNDER 5
+DIST count 12 width 0.14
+0.14 9.05279e-05 1.06356e-05 0.000468355
+0.28 6.95775e-05 1.27944e-05 0.000468355
+0.35 6.20605e-05 1.37529e-05 0.000468355
+0.42 5.52625e-05 1.46806e-05 0.000468355
+0.49 5.06477e-05 1.55181e-05 0.000468355
+0.56 4.68535e-05 1.63169e-05 0.000468355
+0.63 4.336e-05 1.7098e-05 0.000468355
+0.7 4.00557e-05 1.78621e-05 0.000468355
+0.84 3.40794e-05 1.93244e-05 0.000468355
+1.12 2.73638e-05 2.17371e-05 0.000468355
+1.4 2.18736e-05 2.394e-05 0.000468355
+1.68 0 4.37099e-05 0.000468355
+END DIST
+
+Metal 2 UNDER 6
+DIST count 12 width 0.14
+0.14 9.06742e-05 9.39735e-06 0.000468355
+0.28 6.94215e-05 1.13674e-05 0.000468355
+0.35 6.20178e-05 1.22463e-05 0.000468355
+0.42 5.54151e-05 1.30989e-05 0.000468355
+0.49 5.08543e-05 1.38719e-05 0.000468355
+0.56 4.70921e-05 1.46114e-05 0.000468355
+0.63 4.36005e-05 1.53362e-05 0.000468355
+0.7 4.03836e-05 1.6047e-05 0.000468355
+0.84 3.4588e-05 1.74121e-05 0.000468355
+1.12 2.7832e-05 1.96908e-05 0.000468355
+1.4 2.2354e-05 2.17896e-05 0.000468355
+1.68 0 4.19416e-05 0.000468355
+END DIST
+
+Metal 2 DIAGUNDER
+WIDTH Table 1 entries:  0.14
+
+Metal 2 DIAGUNDER 3
+DIST count 13 width 0.14
+0 0 3.14106e-05 0.000468355
+0.14 0 2.85753e-05 0.000468355
+0.28 0 2.7078e-05 0.000468355
+0.35 0 2.58873e-05 0.000468355
+0.42 0 2.47565e-05 0.000468355
+0.49 0 2.36828e-05 0.000468355
+0.56 0 2.26633e-05 0.000468355
+0.63 0 2.16955e-05 0.000468355
+0.7 0 2.07666e-05 0.000468355
+0.84 0 1.90457e-05 0.000468355
+1.12 0 1.61405e-05 0.000468355
+1.4 0 1.37918e-05 0.000468355
+1.68 0 9.70486e-06 0.000468355
+END DIST
+
+Metal 2 DIAGUNDER 4
+DIST count 13 width 0.14
+0 0 1.83703e-05 0.000468355
+0.14 0 1.96858e-05 0.000468355
+0.28 0 2.00794e-05 0.000468355
+0.35 0 1.9752e-05 0.000468355
+0.42 0 1.94287e-05 0.000468355
+0.49 0 1.91097e-05 0.000468355
+0.56 0 1.87952e-05 0.000468355
+0.63 0 1.84855e-05 0.000468355
+0.7 0 1.81696e-05 0.000468355
+0.84 0 1.75549e-05 0.000468355
+1.12 0 1.64313e-05 0.000468355
+1.4 0 1.53935e-05 0.000468355
+1.68 0 1.11442e-05 0.000468355
+END DIST
+
+Metal 2 DIAGUNDER 5
+DIST count 13 width 0.14
+0 0 1.21224e-05 0.000468355
+0.14 0 1.42805e-05 0.000468355
+0.28 0 1.49735e-05 0.000468355
+0.35 0 1.48263e-05 0.000468355
+0.42 0 1.46794e-05 0.000468355
+0.49 0 1.4533e-05 0.000468355
+0.56 0 1.43872e-05 0.000468355
+0.63 0 1.42422e-05 0.000468355
+0.7 0 1.40862e-05 0.000468355
+0.84 0 1.37799e-05 0.000468355
+1.12 0 1.32314e-05 0.000468355
+1.4 0 1.27104e-05 0.000468355
+1.68 0 8.88933e-06 0.000468355
+END DIST
+
+Metal 2 DIAGUNDER 6
+DIST count 13 width 0.14
+0 0 8.88669e-06 0.000468355
+0.14 0 8.54921e-06 0.000468355
+0.28 0 8.44048e-06 0.000468355
+0.35 0 8.38176e-06 0.000468355
+0.42 0 8.32367e-06 0.000468355
+0.49 0 8.26624e-06 0.000468355
+0.56 0 8.20948e-06 0.000468355
+0.63 0 8.1533e-06 0.000468355
+0.7 0 8.09778e-06 0.000468355
+0.84 0 7.98856e-06 0.000468355
+1.12 0 7.77731e-06 0.000468355
+1.4 0 7.57528e-06 0.000468355
+1.68 0 5.78009e-06 0.000468355
+END DIST
+
+Metal 2 OVERUNDER
+WIDTH Table 1 entries:  0.14
+
+Metal 2 OVER 1 UNDER 3
+DIST count 12 width 0.14
+0.14 8.43792e-05 2.73741e-05 0.000468355
+0.28 6.10597e-05 3.40054e-05 0.000468355
+0.35 5.26092e-05 3.67867e-05 0.000468355
+0.42 4.53426e-05 3.92855e-05 0.000468355
+0.49 3.97742e-05 4.15031e-05 0.000468355
+0.56 3.51711e-05 4.34915e-05 0.000468355
+0.63 3.11666e-05 4.52884e-05 0.000468355
+0.7 2.76545e-05 4.69199e-05 0.000468355
+0.84 2.18834e-05 4.97264e-05 0.000468355
+1.12 1.53727e-05 5.38256e-05 0.000468355
+1.4 1.12888e-05 5.66797e-05 0.000468355
+1.68 0 6.74535e-05 0.000468355
+END DIST
+
+Metal 2 OVER 1 UNDER 4
+DIST count 12 width 0.14
+0.14 8.68886e-05 1.87034e-05 0.000468355
+0.28 6.43664e-05 2.31836e-05 0.000468355
+0.35 5.64635e-05 2.5142e-05 0.000468355
+0.42 4.96151e-05 2.69613e-05 0.000468355
+0.49 4.43752e-05 2.86141e-05 0.000468355
+0.56 3.99611e-05 3.01348e-05 0.000468355
+0.63 3.60317e-05 3.1561e-05 0.000468355
+0.7 3.25048e-05 3.29299e-05 0.000468355
+0.84 2.65159e-05 3.53556e-05 0.000468355
+1.12 1.92209e-05 3.9208e-05 0.000468355
+1.4 1.43013e-05 4.21915e-05 0.000468355
+1.68 0 5.5547e-05 0.000468355
+END DIST
+
+Metal 2 OVER 1 UNDER 5
+DIST count 12 width 0.14
+0.14 8.73122e-05 1.75662e-05 0.000468355
+0.28 6.48058e-05 2.14903e-05 0.000468355
+0.35 5.71727e-05 2.31909e-05 0.000468355
+0.42 5.05775e-05 2.47855e-05 0.000468355
+0.49 4.55255e-05 2.62512e-05 0.000468355
+0.56 4.12745e-05 2.76197e-05 0.000468355
+0.63 3.75044e-05 2.89072e-05 0.000468355
+0.7 3.41032e-05 3.01196e-05 0.000468355
+0.84 2.82716e-05 3.23302e-05 0.000468355
+1.12 2.10199e-05 3.58894e-05 0.000468355
+1.4 1.59673e-05 3.8716e-05 0.000468355
+1.68 0 5.34937e-05 0.000468355
+END DIST
+
+Metal 2 OVER 1 UNDER 6
+DIST count 12 width 0.14
+0.14 8.7388e-05 1.664e-05 0.000468355
+0.28 6.47326e-05 2.02696e-05 0.000468355
+0.35 5.71933e-05 2.18797e-05 0.000468355
+0.42 5.07299e-05 2.34091e-05 0.000468355
+0.49 4.57384e-05 2.48188e-05 0.000468355
+0.56 4.15319e-05 2.61376e-05 0.000468355
+0.63 3.77855e-05 2.738e-05 0.000468355
+0.7 3.44448e-05 2.85512e-05 0.000468355
+0.84 2.87238e-05 3.06913e-05 0.000468355
+1.12 2.14656e-05 3.41614e-05 0.000468355
+1.4 1.64065e-05 3.69312e-05 0.000468355
+1.68 0 5.20846e-05 0.000468355
+END DIST
+
+Metal 3 RESOVER
+WIDTH Table 1 entries:  0.14
+
+Metal 3 RESOVER 0
+DIST count 55 width 0.14
+0 0 0 0.00093671
+0 0.32 0 0.00093671
+0 0.46 0 0.00093671
+0 0.71 0 0.00093671
+0 0.78 0 0.00093671
+0 0.92 0 0.00093671
+0 1.17 0 0.00093671
+0 1.24 0 0.00093671
+0 1.38 0 0.00093671
+0 1.84 0 0.00093671
+0.32 0.32 0 0.00093671
+0.32 0.46 0 0.00093671
+0.32 0.71 0 0.00093671
+0.32 0.78 0 0.00093671
+0.32 0.92 0 0.00093671
+0.32 1.17 0 0.00093671
+0.32 1.24 0 0.00093671
+0.32 1.38 0 0.00093671
+0.32 1.84 0 0.00093671
+0.46 0.46 0 0.00093671
+0.46 0.71 0 0.00093671
+0.46 0.78 0 0.00093671
+0.46 0.92 0 0.00093671
+0.46 1.17 0 0.00093671
+0.46 1.24 0 0.00093671
+0.46 1.38 0 0.00093671
+0.46 1.84 0 0.00093671
+0.71 0.71 0 0.00093671
+0.71 0.78 0 0.00093671
+0.71 0.92 0 0.00093671
+0.71 1.17 0 0.00093671
+0.71 1.24 0 0.00093671
+0.71 1.38 0 0.00093671
+0.71 1.84 0 0.00093671
+0.78 0.78 0 0.00093671
+0.78 0.92 0 0.00093671
+0.78 1.17 0 0.00093671
+0.78 1.24 0 0.00093671
+0.78 1.38 0 0.00093671
+0.78 1.84 0 0.00093671
+0.92 0.92 0 0.00093671
+0.92 1.17 0 0.00093671
+0.92 1.24 0 0.00093671
+0.92 1.38 0 0.00093671
+0.92 1.84 0 0.00093671
+1.17 1.17 0 0.00093671
+1.17 1.24 0 0.00093671
+1.17 1.38 0 0.00093671
+1.17 1.84 0 0.00093671
+1.24 1.24 0 0.00093671
+1.24 1.38 0 0.00093671
+1.24 1.84 0 0.00093671
+1.38 1.38 0 0.00093671
+1.38 1.84 0 0.00093671
+1.84 0 1.84 0.00093671
+END DIST
+
+Metal 3 RESOVER 1
+DIST count 0 width 0.14
+END DIST
+
+Metal 3 RESOVER 2
+DIST count 0 width 0.14
+END DIST
+
+Metal 3 OVER
+WIDTH Table 1 entries:  0.14
+
+Metal 3 OVER 0
+DIST count 12 width 0.14
+0.14 9.1302e-05 7.93167e-06 0.000468355
+0.28 7.23031e-05 9.5877e-06 0.000468355
+0.35 6.45654e-05 1.02536e-05 0.000468355
+0.42 5.70189e-05 1.08993e-05 0.000468355
+0.49 5.28232e-05 1.14234e-05 0.000468355
+0.56 4.95865e-05 1.19127e-05 0.000468355
+0.63 4.63321e-05 1.24019e-05 0.000468355
+0.7 4.30602e-05 1.28912e-05 0.000468355
+0.84 3.6861e-05 1.38433e-05 0.000468355
+1.12 3.19997e-05 1.52404e-05 0.000468355
+1.4 2.71009e-05 1.66376e-05 0.000468355
+1.68 0 4.13109e-05 0.000468355
+END DIST
+
+Metal 3 OVER 1
+DIST count 12 width 0.14
+0.14 9.03855e-05 1.14475e-05 0.000468355
+0.28 6.87918e-05 1.33186e-05 0.000468355
+0.35 6.12944e-05 1.41589e-05 0.000468355
+0.42 5.46144e-05 1.49739e-05 0.000468355
+0.49 5.00777e-05 1.57121e-05 0.000468355
+0.56 4.63708e-05 1.64159e-05 0.000468355
+0.63 4.29875e-05 1.71029e-05 0.000468355
+0.7 3.98132e-05 1.7773e-05 0.000468355
+0.84 3.41198e-05 1.90511e-05 0.000468355
+1.12 2.77608e-05 2.11718e-05 0.000468355
+1.4 2.26483e-05 2.30748e-05 0.000468355
+1.68 0 4.36566e-05 0.000468355
+END DIST
+
+Metal 3 OVER 2
+DIST count 12 width 0.14
+0.14 8.7226e-05 1.84451e-05 0.000468355
+0.28 6.53841e-05 2.21511e-05 0.000468355
+0.35 5.7601e-05 2.37548e-05 0.000468355
+0.42 5.0627e-05 2.52479e-05 0.000468355
+0.49 4.58294e-05 2.65879e-05 0.000468355
+0.56 4.19209e-05 2.78253e-05 0.000468355
+0.63 3.83389e-05 2.8984e-05 0.000468355
+0.7 3.50235e-05 3.00706e-05 0.000468355
+0.84 2.92162e-05 3.20358e-05 0.000468355
+1.12 2.31712e-05 3.50674e-05 0.000468355
+1.4 1.86058e-05 3.74418e-05 0.000468355
+1.68 0 5.4761e-05 0.000468355
+END DIST
+
+Metal 3 UNDER
+WIDTH Table 1 entries:  0.14
+
+Metal 3 UNDER 4
+DIST count 12 width 0.14
+0.14 8.85891e-05 1.51941e-05 0.000468355
+0.28 6.66956e-05 1.86207e-05 0.000468355
+0.35 5.89183e-05 2.01197e-05 0.000468355
+0.42 5.19334e-05 2.15278e-05 0.000468355
+0.49 4.70838e-05 2.27999e-05 0.000468355
+0.56 4.30983e-05 2.39847e-05 0.000468355
+0.63 3.94238e-05 2.51046e-05 0.000468355
+0.7 3.60057e-05 2.6164e-05 0.000468355
+0.84 2.99787e-05 2.81047e-05 0.000468355
+1.12 2.34991e-05 3.11716e-05 0.000468355
+1.4 1.85876e-05 3.36491e-05 0.000468355
+1.68 0 5.08351e-05 0.000468355
+END DIST
+
+Metal 3 UNDER 5
+DIST count 12 width 0.14
+0.14 9.07991e-05 1.03948e-05 0.000468355
+0.28 6.9239e-05 1.23362e-05 0.000468355
+0.35 6.17942e-05 1.31955e-05 0.000468355
+0.42 5.51389e-05 1.40257e-05 0.000468355
+0.49 5.06274e-05 1.47764e-05 0.000468355
+0.56 4.69294e-05 1.5492e-05 0.000468355
+0.63 4.35175e-05 1.61907e-05 0.000468355
+0.7 4.03212e-05 1.68729e-05 0.000468355
+0.84 3.45487e-05 1.81773e-05 0.000468355
+1.12 2.80049e-05 2.03592e-05 0.000468355
+1.4 2.26642e-05 2.23382e-05 0.000468355
+1.68 0 4.28067e-05 0.000468355
+END DIST
+
+Metal 3 UNDER 6
+DIST count 12 width 0.14
+0.14 9.11476e-05 8.94223e-06 0.000468355
+0.28 6.93519e-05 1.05896e-05 0.000468355
+0.35 6.20478e-05 1.13195e-05 0.000468355
+0.42 5.56016e-05 1.2028e-05 0.000468355
+0.49 5.1201e-05 1.26686e-05 0.000468355
+0.56 4.7595e-05 1.32818e-05 0.000468355
+0.63 4.42451e-05 1.38837e-05 0.000468355
+0.7 4.11044e-05 1.44749e-05 0.000468355
+0.84 3.55665e-05 1.56139e-05 0.000468355
+1.12 2.91191e-05 1.75413e-05 0.000468355
+1.4 2.38216e-05 1.93275e-05 0.000468355
+1.68 0 4.07738e-05 0.000468355
+END DIST
+
+Metal 3 DIAGUNDER
+WIDTH Table 1 entries:  0.14
+
+Metal 3 DIAGUNDER 4
+DIST count 13 width 0.14
+0 0 3.00238e-05 0.000468355
+0.14 0 2.83969e-05 0.000468355
+0.28 0 2.77926e-05 0.000468355
+0.35 0 2.69968e-05 0.000468355
+0.42 0 2.62251e-05 0.000468355
+0.49 0 2.54764e-05 0.000468355
+0.56 0 2.47501e-05 0.000468355
+0.63 0 2.40455e-05 0.000468355
+0.7 0 2.33553e-05 0.000468355
+0.84 0 2.20356e-05 0.000468355
+1.12 0 1.96547e-05 0.000468355
+1.4 0 1.75589e-05 0.000468355
+1.68 0 1.42637e-05 0.000468355
+END DIST
+
+Metal 3 DIAGUNDER 5
+DIST count 13 width 0.14
+0 0 1.54368e-05 0.000468355
+0.14 0 1.72243e-05 0.000468355
+0.28 0 1.78745e-05 0.000468355
+0.35 0 1.76878e-05 0.000468355
+0.42 0 1.75021e-05 0.000468355
+0.49 0 1.73175e-05 0.000468355
+0.56 0 1.7134e-05 0.000468355
+0.63 0 1.69516e-05 0.000468355
+0.7 0 1.67621e-05 0.000468355
+0.84 0 1.63882e-05 0.000468355
+1.12 0 1.56898e-05 0.000468355
+1.4 0 1.50178e-05 0.000468355
+1.68 0 1.08304e-05 0.000468355
+END DIST
+
+Metal 3 DIAGUNDER 6
+DIST count 13 width 0.14
+0 0 1.33812e-05 0.000468355
+0.14 0 1.35642e-05 0.000468355
+0.28 0 1.40116e-05 0.000468355
+0.35 0 1.39191e-05 0.000468355
+0.42 0 1.38268e-05 0.000468355
+0.49 0 1.37346e-05 0.000468355
+0.56 0 1.36426e-05 0.000468355
+0.63 0 1.35507e-05 0.000468355
+0.7 0 1.34534e-05 0.000468355
+0.84 0 1.1788e-05 0.000468355
+1.12 0 9.56525e-06 0.000468355
+1.4 0 9.28306e-06 0.000468355
+1.68 0 7.3039e-06 0.000468355
+END DIST
+
+Metal 3 OVERUNDER
+WIDTH Table 1 entries:  0.14
+
+Metal 3 OVER 1 UNDER 4
+DIST count 12 width 0.14
+0.14 8.79541e-05 1.78018e-05 0.000468355
+0.28 6.4691e-05 2.16978e-05 0.000468355
+0.35 5.68702e-05 2.3427e-05 0.000468355
+0.42 5.01568e-05 2.50426e-05 0.000468355
+0.49 4.50067e-05 2.65259e-05 0.000468355
+0.56 4.06859e-05 2.7906e-05 0.000468355
+0.63 3.68734e-05 2.91985e-05 0.000468355
+0.7 3.34538e-05 3.04093e-05 0.000468355
+0.84 2.76353e-05 3.2603e-05 0.000468355
+1.12 2.04706e-05 3.6116e-05 0.000468355
+1.4 1.55865e-05 3.88511e-05 0.000468355
+1.68 0 5.3319e-05 0.000468355
+END DIST
+
+Metal 3 OVER 1 UNDER 5
+DIST count 12 width 0.14
+0.14 8.99364e-05 1.31241e-05 0.000468355
+0.28 6.7024e-05 1.54753e-05 0.000468355
+0.35 5.9576e-05 1.65559e-05 0.000468355
+0.42 5.32328e-05 1.75946e-05 0.000468355
+0.49 4.84775e-05 1.85663e-05 0.000468355
+0.56 4.44708e-05 1.94942e-05 0.000468355
+0.63 4.09104e-05 2.0388e-05 0.000468355
+0.7 3.76793e-05 2.12493e-05 0.000468355
+0.84 3.20401e-05 2.28722e-05 0.000468355
+1.12 2.46723e-05 2.56514e-05 0.000468355
+1.4 1.92701e-05 2.80393e-05 0.000468355
+1.68 0 4.54973e-05 0.000468355
+END DIST
+
+Metal 3 OVER 1 UNDER 6
+DIST count 12 width 0.14
+0.14 9.02093e-05 1.15675e-05 0.000468355
+0.28 6.71557e-05 1.36243e-05 0.000468355
+0.35 5.9842e-05 1.45764e-05 0.000468355
+0.42 5.36728e-05 1.54959e-05 0.000468355
+0.49 4.89934e-05 1.636e-05 0.000468355
+0.56 4.50909e-05 1.71888e-05 0.000468355
+0.63 4.1613e-05 1.79909e-05 0.000468355
+0.7 3.84558e-05 1.87671e-05 0.000468355
+0.84 3.30061e-05 2.02392e-05 0.000468355
+1.12 2.57207e-05 2.27949e-05 0.000468355
+1.4 2.03275e-05 2.50283e-05 0.000468355
+1.68 0 4.33824e-05 0.000468355
+END DIST
+
+Metal 3 OVER 2 UNDER 4
+DIST count 12 width 0.14
+0.14 8.5325e-05 2.45991e-05 0.000468355
+0.28 6.16285e-05 3.04728e-05 0.000468355
+0.35 5.33311e-05 3.29662e-05 0.000468355
+0.42 4.6227e-05 3.52241e-05 0.000468355
+0.49 4.08034e-05 3.72452e-05 0.000468355
+0.56 3.63165e-05 3.90731e-05 0.000468355
+0.63 3.2398e-05 4.07359e-05 0.000468355
+0.7 2.89457e-05 4.22885e-05 0.000468355
+0.84 2.32321e-05 4.4927e-05 0.000468355
+1.12 1.6689e-05 4.88309e-05 0.000468355
+1.4 1.24997e-05 5.16302e-05 0.000468355
+1.68 0 6.35432e-05 0.000468355
+END DIST
+
+Metal 3 OVER 2 UNDER 5
+DIST count 12 width 0.14
+0.14 8.69196e-05 2.00685e-05 0.000468355
+0.28 6.37832e-05 2.42659e-05 0.000468355
+0.35 5.60192e-05 2.61067e-05 0.000468355
+0.42 4.93654e-05 2.78135e-05 0.000468355
+0.49 4.43018e-05 2.93711e-05 0.000468355
+0.56 4.00717e-05 3.08111e-05 0.000468355
+0.63 3.63353e-05 3.2151e-05 0.000468355
+0.7 3.29964e-05 3.34509e-05 0.000468355
+0.84 2.73177e-05 3.56937e-05 0.000468355
+1.12 2.03815e-05 3.91823e-05 0.000468355
+1.4 1.56167e-05 4.19446e-05 0.000468355
+1.68 0 5.64469e-05 0.000468355
+END DIST
+
+Metal 3 OVER 2 UNDER 6
+DIST count 12 width 0.14
+0.14 8.71352e-05 1.8632e-05 0.000468355
+0.28 6.38543e-05 2.2525e-05 0.000468355
+0.35 5.62425e-05 2.42404e-05 0.000468355
+0.42 4.97771e-05 2.58354e-05 0.000468355
+0.49 4.48284e-05 2.72959e-05 0.000468355
+0.56 4.06893e-05 2.86501e-05 0.000468355
+0.63 3.70201e-05 2.99134e-05 0.000468355
+0.7 3.37373e-05 3.10933e-05 0.000468355
+0.84 2.8211e-05 3.32216e-05 0.000468355
+1.12 2.12989e-05 3.66125e-05 0.000468355
+1.4 1.65086e-05 3.92337e-05 0.000468355
+1.68 0 5.45095e-05 0.000468355
+END DIST
+
+Metal 4 RESOVER
+WIDTH Table 1 entries:  0.3
+
+Metal 4 RESOVER 0
+DIST count 55 width 0.3
+0 0 0 0.000126988
+0 0.38 0 0.000126988
+0 0.68 0 0.000126988
+0 0.91 0 0.000126988
+0 1.06 0 0.000126988
+0 1.36 0 0.000126988
+0 1.59 0 0.000126988
+0 1.74 0 0.000126988
+0 2.04 0 0.000126988
+0 2.72 0 0.000126988
+0.38 0.38 0 0.000126988
+0.38 0.68 0 0.000126988
+0.38 0.91 0 0.000126988
+0.38 1.06 0 0.000126988
+0.38 1.36 0 0.000126988
+0.38 1.59 0 0.000126988
+0.38 1.74 0 0.000126988
+0.38 2.04 0 0.000126988
+0.38 2.72 0 0.000126988
+0.68 0.68 0 0.000126988
+0.68 0.91 0 0.000126988
+0.68 1.06 0 0.000126988
+0.68 1.36 0 0.000126988
+0.68 1.59 0 0.000126988
+0.68 1.74 0 0.000126988
+0.68 2.04 0 0.000126988
+0.68 2.72 0 0.000126988
+0.91 0.91 0 0.000126988
+0.91 1.06 0 0.000126988
+0.91 1.36 0 0.000126988
+0.91 1.59 0 0.000126988
+0.91 1.74 0 0.000126988
+0.91 2.04 0 0.000126988
+0.91 2.72 0 0.000126988
+1.06 1.06 0 0.000126988
+1.06 1.36 0 0.000126988
+1.06 1.59 0 0.000126988
+1.06 1.74 0 0.000126988
+1.06 2.04 0 0.000126988
+1.06 2.72 0 0.000126988
+1.36 1.36 0 0.000126988
+1.36 1.59 0 0.000126988
+1.36 1.74 0 0.000126988
+1.36 2.04 0 0.000126988
+1.36 2.72 0 0.000126988
+1.59 1.59 0 0.000126988
+1.59 1.74 0 0.000126988
+1.59 2.04 0 0.000126988
+1.59 2.72 0 0.000126988
+1.74 1.74 0 0.000126988
+1.74 2.04 0 0.000126988
+1.74 2.72 0 0.000126988
+2.04 2.04 0 0.000126988
+2.04 2.72 0 0.000126988
+2.72 0 2.72 0.000126988
+END DIST
+
+Metal 4 RESOVER 1
+DIST count 0 width 0.3
+END DIST
+
+Metal 4 RESOVER 2
+DIST count 0 width 0.3
+END DIST
+
+Metal 4 RESOVER 3
+DIST count 0 width 0.3
+END DIST
+
+Metal 4 OVER
+WIDTH Table 1 entries:  0.3
+
+Metal 4 OVER 0
+DIST count 12 width 0.3
+0.3 9.22295e-05 8.97545e-06 6.34939e-05
+0.6 7.19806e-05 1.10331e-05 6.34939e-05
+0.75 6.16561e-05 1.20442e-05 6.34939e-05
+0.9 5.57759e-05 1.28864e-05 6.34939e-05
+1.05 5.145e-05 1.36696e-05 6.34939e-05
+1.2 4.70938e-05 1.44528e-05 6.34939e-05
+1.35 4.37532e-05 1.51445e-05 6.34939e-05
+1.5 4.15208e-05 1.57381e-05 6.34939e-05
+1.8 3.70349e-05 1.69253e-05 6.34939e-05
+2.4 2.88471e-05 1.91854e-05 6.34939e-05
+3 2.52225e-05 2.08377e-05 6.34939e-05
+3.6 0 4.40755e-05 6.34939e-05
+END DIST
+
+Metal 4 OVER 1
+DIST count 12 width 0.3
+0.3 9.05351e-05 1.30114e-05 6.34939e-05
+0.6 6.69297e-05 1.52555e-05 6.34939e-05
+0.75 5.8171e-05 1.6364e-05 6.34939e-05
+0.9 5.24456e-05 1.73685e-05 6.34939e-05
+1.05 4.80371e-05 1.83212e-05 6.34939e-05
+1.2 4.40403e-05 1.92506e-05 6.34939e-05
+1.35 4.07791e-05 2.01108e-05 6.34939e-05
+1.5 3.82444e-05 2.08987e-05 6.34939e-05
+1.8 3.36203e-05 2.24071e-05 6.34939e-05
+2.4 2.5986e-05 2.5119e-05 6.34939e-05
+3 2.16305e-05 2.72421e-05 6.34939e-05
+3.6 0 4.70997e-05 6.34939e-05
+END DIST
+
+Metal 4 OVER 2
+DIST count 12 width 0.3
+0.3 8.93773e-05 1.58219e-05 6.34939e-05
+0.6 6.55398e-05 1.87249e-05 6.34939e-05
+0.75 5.66665e-05 2.01126e-05 6.34939e-05
+0.9 5.09273e-05 2.13689e-05 6.34939e-05
+1.05 4.64637e-05 2.25492e-05 6.34939e-05
+1.2 4.23499e-05 2.36844e-05 6.34939e-05
+1.35 3.89993e-05 2.47305e-05 6.34939e-05
+1.5 3.64016e-05 2.56862e-05 6.34939e-05
+1.8 3.16954e-05 2.74822e-05 6.34939e-05
+2.4 2.40396e-05 3.06117e-05 6.34939e-05
+3 1.98114e-05 3.2994e-05 6.34939e-05
+3.6 0 5.13556e-05 6.34939e-05
+END DIST
+
+Metal 4 OVER 3
+DIST count 12 width 0.3
+0.3 8.588e-05 2.4905e-05 6.34939e-05
+0.6 6.2026e-05 2.93995e-05 6.34939e-05
+0.75 5.32112e-05 3.14148e-05 6.34939e-05
+0.9 4.74155e-05 3.32089e-05 6.34939e-05
+1.05 4.29351e-05 3.48494e-05 6.34939e-05
+1.2 3.88317e-05 3.63767e-05 6.34939e-05
+1.35 3.55206e-05 3.77553e-05 6.34939e-05
+1.5 3.29867e-05 3.89912e-05 6.34939e-05
+1.8 2.84474e-05 4.12152e-05 6.34939e-05
+2.4 2.12136e-05 4.48065e-05 6.34939e-05
+3 1.74424e-05 4.73128e-05 6.34939e-05
+3.6 0 6.36565e-05 6.34939e-05
+END DIST
+
+Metal 4 UNDER
+WIDTH Table 1 entries:  0.3
+
+Metal 4 UNDER 5
+DIST count 12 width 0.3
+0.3 8.58816e-05 2.53408e-05 6.34939e-05
+0.6 6.17927e-05 3.10797e-05 6.34939e-05
+0.75 5.27001e-05 3.35706e-05 6.34939e-05
+0.9 4.66132e-05 3.57609e-05 6.34939e-05
+1.05 4.1861e-05 3.77294e-05 6.34939e-05
+1.2 3.7521e-05 3.95264e-05 6.34939e-05
+1.35 3.40087e-05 4.1125e-05 6.34939e-05
+1.5 3.13093e-05 4.25383e-05 6.34939e-05
+1.8 2.65432e-05 4.50147e-05 6.34939e-05
+2.4 1.91626e-05 4.88307e-05 6.34939e-05
+3 1.54659e-05 5.13547e-05 6.34939e-05
+3.6 0 6.5818e-05 6.34939e-05
+END DIST
+
+Metal 4 UNDER 6
+DIST count 12 width 0.3
+0.3 9.01228e-05 1.18676e-05 6.34939e-05
+0.6 6.61379e-05 1.51766e-05 6.34939e-05
+0.75 5.72271e-05 1.67244e-05 6.34939e-05
+0.9 5.13743e-05 1.81241e-05 6.34939e-05
+1.05 4.67591e-05 1.94336e-05 6.34939e-05
+1.2 4.24886e-05 2.06857e-05 6.34939e-05
+1.35 3.89708e-05 2.1839e-05 6.34939e-05
+1.5 3.6201e-05 2.28938e-05 6.34939e-05
+1.8 3.11903e-05 2.48639e-05 6.34939e-05
+2.4 2.30889e-05 2.82666e-05 6.34939e-05
+3 1.85683e-05 3.08522e-05 6.34939e-05
+3.6 0 4.79736e-05 6.34939e-05
+END DIST
+
+Metal 4 DIAGUNDER
+WIDTH Table 1 entries:  0.3
+
+Metal 4 DIAGUNDER 5
+DIST count 13 width 0.3
+0 0 4.08813e-05 6.34939e-05
+0.3 0 3.80442e-05 6.34939e-05
+0.6 0 3.59851e-05 6.34939e-05
+0.75 0 3.42994e-05 6.34939e-05
+0.9 0 3.27687e-05 6.34939e-05
+1.05 0 3.13776e-05 6.34939e-05
+1.2 0 3.01128e-05 6.34939e-05
+1.35 0 2.89624e-05 6.34939e-05
+1.5 0 2.7919e-05 6.34939e-05
+1.8 0 2.61011e-05 6.34939e-05
+2.4 0 2.33393e-05 6.34939e-05
+3 0 2.14369e-05 6.34939e-05
+3.6 0 1.05199e-05 6.34939e-05
+END DIST
+
+Metal 4 DIAGUNDER 6
+DIST count 13 width 0.3
+0 0 2.37164e-05 6.34939e-05
+0.3 0 2.38732e-05 6.34939e-05
+0.6 0 2.46668e-05 6.34939e-05
+0.75 0 2.42045e-05 6.34939e-05
+0.9 0 2.37523e-05 6.34939e-05
+1.05 0 2.33093e-05 6.34939e-05
+1.2 0 2.28752e-05 6.34939e-05
+1.35 0 2.24495e-05 6.34939e-05
+1.5 0 2.20225e-05 6.34939e-05
+1.8 0 2.1193e-05 6.34939e-05
+2.4 0 1.96635e-05 6.34939e-05
+3 0 1.55325e-05 6.34939e-05
+3.6 0 9.95313e-06 6.34939e-05
+END DIST
+
+Metal 4 OVERUNDER
+WIDTH Table 1 entries:  0.3
+
+Metal 4 OVER 1 UNDER 5
+DIST count 12 width 0.3
+0.3 8.50314e-05 2.81924e-05 6.34939e-05
+0.6 5.90635e-05 3.45055e-05 6.34939e-05
+0.75 5.06059e-05 3.71686e-05 6.34939e-05
+0.9 4.44815e-05 3.95277e-05 6.34939e-05
+1.05 3.96004e-05 4.16453e-05 6.34939e-05
+1.2 3.5372e-05 4.35609e-05 6.34939e-05
+1.35 3.18578e-05 4.52737e-05 6.34939e-05
+1.5 2.89889e-05 4.68019e-05 6.34939e-05
+1.8 2.41538e-05 4.94466e-05 6.34939e-05
+2.4 1.71348e-05 5.3441e-05 6.34939e-05
+3 1.32086e-05 5.61218e-05 6.34939e-05
+3.6 0 6.84728e-05 6.34939e-05
+END DIST
+
+Metal 4 OVER 1 UNDER 6
+DIST count 12 width 0.3
+0.3 8.90824e-05 1.50706e-05 6.34939e-05
+0.6 6.32966e-05 1.88707e-05 6.34939e-05
+0.75 5.51387e-05 2.05791e-05 6.34939e-05
+0.9 4.92578e-05 2.20814e-05 6.34939e-05
+1.05 4.45114e-05 2.35547e-05 6.34939e-05
+1.2 4.03405e-05 2.49484e-05 6.34939e-05
+1.35 3.68019e-05 2.62447e-05 6.34939e-05
+1.5 3.38393e-05 2.74463e-05 6.34939e-05
+1.8 2.8708e-05 2.96548e-05 6.34939e-05
+2.4 2.08776e-05 3.33715e-05 6.34939e-05
+3 1.60804e-05 3.6217e-05 6.34939e-05
+3.6 0 5.10527e-05 6.34939e-05
+END DIST
+
+Metal 4 OVER 2 UNDER 5
+DIST count 12 width 0.3
+0.3 8.42478e-05 3.10026e-05 6.34939e-05
+0.6 5.78632e-05 3.81564e-05 6.34939e-05
+0.75 4.92198e-05 4.11052e-05 6.34939e-05
+0.9 4.29904e-05 4.36929e-05 6.34939e-05
+1.05 3.80176e-05 4.59954e-05 6.34939e-05
+1.2 3.36986e-05 4.80601e-05 6.34939e-05
+1.35 3.01331e-05 4.98923e-05 6.34939e-05
+1.5 2.72459e-05 5.15155e-05 6.34939e-05
+1.8 2.24341e-05 5.42936e-05 6.34939e-05
+2.4 1.55923e-05 5.84097e-05 6.34939e-05
+3 1.19029e-05 6.11109e-05 6.34939e-05
+3.6 0 7.23505e-05 6.34939e-05
+END DIST
+
+Metal 4 OVER 2 UNDER 6
+DIST count 12 width 0.3
+0.3 8.80937e-05 1.77781e-05 6.34939e-05
+0.6 6.20945e-05 2.22613e-05 6.34939e-05
+0.75 5.37599e-05 2.4256e-05 6.34939e-05
+0.9 4.77803e-05 2.60028e-05 6.34939e-05
+1.05 4.29363e-05 2.76977e-05 6.34939e-05
+1.2 3.8658e-05 2.92843e-05 6.34939e-05
+1.35 3.50443e-05 3.07481e-05 6.34939e-05
+1.5 3.20368e-05 3.20946e-05 6.34939e-05
+1.8 2.68726e-05 3.45345e-05 6.34939e-05
+2.4 1.91341e-05 3.85354e-05 6.34939e-05
+3 1.4545e-05 4.15053e-05 6.34939e-05
+3.6 0 5.50585e-05 6.34939e-05
+END DIST
+
+Metal 4 OVER 3 UNDER 5
+DIST count 12 width 0.3
+0.3 8.12436e-05 4.00409e-05 6.34939e-05
+0.6 5.44738e-05 4.88901e-05 6.34939e-05
+0.75 4.57434e-05 5.24373e-05 6.34939e-05
+0.9 3.94642e-05 5.54821e-05 6.34939e-05
+1.05 3.4526e-05 5.81243e-05 6.34939e-05
+1.2 3.02991e-05 6.04363e-05 6.34939e-05
+1.35 2.68695e-05 6.24439e-05 6.34939e-05
+1.5 2.41464e-05 6.41861e-05 6.34939e-05
+1.8 1.96903e-05 6.70811e-05 6.34939e-05
+2.4 1.35203e-05 7.11596e-05 6.34939e-05
+3 1.0359e-05 7.36808e-05 6.34939e-05
+3.6 0 8.35483e-05 6.34939e-05
+END DIST
+
+Metal 4 OVER 3 UNDER 6
+DIST count 12 width 0.3
+0.3 8.48812e-05 2.68858e-05 6.34939e-05
+0.6 5.86744e-05 3.29471e-05 6.34939e-05
+0.75 5.0301e-05 3.55769e-05 6.34939e-05
+0.9 4.42695e-05 3.78992e-05 6.34939e-05
+1.05 3.94279e-05 4.00251e-05 6.34939e-05
+1.2 3.519e-05 4.19643e-05 6.34939e-05
+1.35 3.16536e-05 4.37088e-05 6.34939e-05
+1.5 2.87517e-05 4.52785e-05 6.34939e-05
+1.8 2.38406e-05 4.80223e-05 6.34939e-05
+2.4 1.66699e-05 5.22399e-05 6.34939e-05
+3 1.26191e-05 5.51348e-05 6.34939e-05
+3.6 0 6.70035e-05 6.34939e-05
+END DIST
+
+Metal 5 RESOVER
+WIDTH Table 1 entries:  0.3
+
+Metal 5 RESOVER 0
+DIST count 55 width 0.3
+0 0 0 0.000126988
+0 0.62 0 0.000126988
+0 0.92 0 0.000126988
+0 1.39 0 0.000126988
+0 1.54 0 0.000126988
+0 1.84 0 0.000126988
+0 2.31 0 0.000126988
+0 2.46 0 0.000126988
+0 2.76 0 0.000126988
+0 3.68 0 0.000126988
+0.62 0.62 0 0.000126988
+0.62 0.92 0 0.000126988
+0.62 1.39 0 0.000126988
+0.62 1.54 0 0.000126988
+0.62 1.84 0 0.000126988
+0.62 2.31 0 0.000126988
+0.62 2.46 0 0.000126988
+0.62 2.76 0 0.000126988
+0.62 3.68 0 0.000126988
+0.92 0.92 0 0.000126988
+0.92 1.39 0 0.000126988
+0.92 1.54 0 0.000126988
+0.92 1.84 0 0.000126988
+0.92 2.31 0 0.000126988
+0.92 2.46 0 0.000126988
+0.92 2.76 0 0.000126988
+0.92 3.68 0 0.000126988
+1.39 1.39 0 0.000126988
+1.39 1.54 0 0.000126988
+1.39 1.84 0 0.000126988
+1.39 2.31 0 0.000126988
+1.39 2.46 0 0.000126988
+1.39 2.76 0 0.000126988
+1.39 3.68 0 0.000126988
+1.54 1.54 0 0.000126988
+1.54 1.84 0 0.000126988
+1.54 2.31 0 0.000126988
+1.54 2.46 0 0.000126988
+1.54 2.76 0 0.000126988
+1.54 3.68 0 0.000126988
+1.84 1.84 0 0.000126988
+1.84 2.31 0 0.000126988
+1.84 2.46 0 0.000126988
+1.84 2.76 0 0.000126988
+1.84 3.68 0 0.000126988
+2.31 2.31 0 0.000126988
+2.31 2.46 0 0.000126988
+2.31 2.76 0 0.000126988
+2.31 3.68 0 0.000126988
+2.46 2.46 0 0.000126988
+2.46 2.76 0 0.000126988
+2.46 3.68 0 0.000126988
+2.76 2.76 0 0.000126988
+2.76 3.68 0 0.000126988
+3.68 0 3.68 0.000126988
+END DIST
+
+Metal 5 RESOVER 1
+DIST count 0 width 0.3
+END DIST
+
+Metal 5 RESOVER 2
+DIST count 0 width 0.3
+END DIST
+
+Metal 5 RESOVER 3
+DIST count 0 width 0.3
+END DIST
+
+Metal 5 RESOVER 4
+DIST count 0 width 0.3
+END DIST
+
+Metal 5 OVER
+WIDTH Table 1 entries:  0.3
+
+Metal 5 OVER 0
+DIST count 12 width 0.3
+0.3 9.32246e-05 7.70756e-06 6.34939e-05
+0.6 7.35275e-05 9.29167e-06 6.34939e-05
+0.75 6.33862e-05 1.00837e-05 6.34939e-05
+0.9 5.76251e-05 1.07249e-05 6.34939e-05
+1.05 5.33943e-05 1.13134e-05 6.34939e-05
+1.2 4.91313e-05 1.19019e-05 6.34939e-05
+1.35 4.58506e-05 1.24214e-05 6.34939e-05
+1.5 4.36417e-05 1.2867e-05 6.34939e-05
+1.8 3.92007e-05 1.37582e-05 6.34939e-05
+2.4 3.10727e-05 1.54705e-05 6.34939e-05
+3 2.7395e-05 1.68103e-05 6.34939e-05
+3.6 0 4.18507e-05 6.34939e-05
+END DIST
+
+Metal 5 OVER 1
+DIST count 12 width 0.3
+0.3 9.25655e-05 1.08076e-05 6.34939e-05
+0.6 6.94846e-05 1.23245e-05 6.34939e-05
+0.75 6.08799e-05 1.30924e-05 6.34939e-05
+0.9 5.53004e-05 1.37808e-05 6.34939e-05
+1.05 5.10028e-05 1.44359e-05 6.34939e-05
+1.2 4.70357e-05 1.50824e-05 6.34939e-05
+1.35 4.38161e-05 1.56848e-05 6.34939e-05
+1.5 4.13524e-05 1.62401e-05 6.34939e-05
+1.8 3.68695e-05 1.73201e-05 6.34939e-05
+2.4 2.93558e-05 1.93238e-05 6.34939e-05
+3 2.49525e-05 2.09905e-05 6.34939e-05
+3.6 0 4.29942e-05 6.34939e-05
+END DIST
+
+Metal 5 OVER 2
+DIST count 12 width 0.3
+0.3 9.22331e-05 1.20784e-05 6.34939e-05
+0.6 6.89885e-05 1.37665e-05 6.34939e-05
+0.75 6.03526e-05 1.46185e-05 6.34939e-05
+0.9 5.47136e-05 1.53885e-05 6.34939e-05
+1.05 5.03531e-05 1.61222e-05 6.34939e-05
+1.2 4.63335e-05 1.68439e-05 6.34939e-05
+1.35 4.31235e-05 1.75182e-05 6.34939e-05
+1.5 4.06203e-05 1.81421e-05 6.34939e-05
+1.8 3.60373e-05 1.93492e-05 6.34939e-05
+2.4 2.8406e-05 2.15695e-05 6.34939e-05
+3 2.39375e-05 2.34091e-05 6.34939e-05
+3.6 0 4.52155e-05 6.34939e-05
+END DIST
+
+Metal 5 OVER 3
+DIST count 12 width 0.3
+0.3 9.16587e-05 1.35514e-05 6.34939e-05
+0.6 6.82673e-05 1.56075e-05 6.34939e-05
+0.75 5.95503e-05 1.66175e-05 6.34939e-05
+0.9 5.38322e-05 1.75322e-05 6.34939e-05
+1.05 4.94137e-05 1.83987e-05 6.34939e-05
+1.2 4.54163e-05 1.92427e-05 6.34939e-05
+1.35 4.21383e-05 2.00298e-05 6.34939e-05
+1.5 3.95711e-05 2.07576e-05 6.34939e-05
+1.8 3.4888e-05 2.21485e-05 6.34939e-05
+2.4 2.71548e-05 2.46562e-05 6.34939e-05
+3 2.26851e-05 2.66983e-05 6.34939e-05
+3.6 0 4.74444e-05 6.34939e-05
+END DIST
+
+Metal 5 OVER 4
+DIST count 12 width 0.3
+0.3 8.69613e-05 2.25158e-05 6.34939e-05
+0.6 6.34001e-05 2.67636e-05 6.34939e-05
+0.75 5.46862e-05 2.86699e-05 6.34939e-05
+0.9 4.89497e-05 3.03708e-05 6.34939e-05
+1.05 4.45066e-05 3.19264e-05 6.34939e-05
+1.2 4.04299e-05 3.33729e-05 6.34939e-05
+1.35 3.71226e-05 3.46852e-05 6.34939e-05
+1.5 3.45712e-05 3.58693e-05 6.34939e-05
+1.8 2.99894e-05 3.79942e-05 6.34939e-05
+2.4 2.26546e-05 4.14172e-05 6.34939e-05
+3 1.87475e-05 4.38692e-05 6.34939e-05
+3.6 0 6.1337e-05 6.34939e-05
+END DIST
+
+Metal 5 UNDER
+WIDTH Table 1 entries:  0.3
+
+Metal 5 UNDER 6
+DIST count 12 width 0.3
+0.3 8.80976e-05 1.81685e-05 6.34939e-05
+0.6 6.4172e-05 2.29021e-05 6.34939e-05
+0.75 5.51911e-05 2.49979e-05 6.34939e-05
+0.9 4.91764e-05 2.68603e-05 6.34939e-05
+1.05 4.44718e-05 2.85527e-05 6.34939e-05
+1.2 4.01636e-05 3.01149e-05 6.34939e-05
+1.35 3.66525e-05 3.15248e-05 6.34939e-05
+1.5 3.39241e-05 3.27908e-05 6.34939e-05
+1.8 2.9074e-05 3.50405e-05 6.34939e-05
+2.4 2.14636e-05 3.86011e-05 6.34939e-05
+3 1.74862e-05 4.11012e-05 6.34939e-05
+3.6 0 5.73493e-05 6.34939e-05
+END DIST
+
+Metal 5 DIAGUNDER
+WIDTH Table 1 entries:  0.3
+
+Metal 5 DIAGUNDER 6
+DIST count 13 width 0.3
+0 0 4.64806e-05 6.34939e-05
+0.3 0 3.79756e-05 6.34939e-05
+0.6 0 3.62825e-05 6.34939e-05
+0.75 0 3.47552e-05 6.34939e-05
+0.9 0 3.33359e-05 6.34939e-05
+1.05 0 3.20153e-05 6.34939e-05
+1.2 0 3.07851e-05 6.34939e-05
+1.35 0 2.96377e-05 6.34939e-05
+1.5 0 2.85663e-05 6.34939e-05
+1.8 0 2.66246e-05 6.34939e-05
+2.4 0 2.34238e-05 6.34939e-05
+3 0 2.09242e-05 6.34939e-05
+3.6 0 1.44256e-05 6.34939e-05
+END DIST
+
+Metal 5 OVERUNDER
+WIDTH Table 1 entries:  0.3
+
+Metal 5 OVER 1 UNDER 6
+DIST count 12 width 0.3
+0.3 8.78637e-05 2.03716e-05 6.34939e-05
+0.6 6.2095e-05 2.52254e-05 6.34939e-05
+0.75 5.38238e-05 2.73654e-05 6.34939e-05
+0.9 4.78465e-05 2.92967e-05 6.34939e-05
+1.05 4.30621e-05 3.10585e-05 6.34939e-05
+1.2 3.88632e-05 3.26779e-05 6.34939e-05
+1.35 3.5353e-05 3.41506e-05 6.34939e-05
+1.5 3.24763e-05 3.54871e-05 6.34939e-05
+1.8 2.75819e-05 3.78491e-05 6.34939e-05
+2.4 2.02825e-05 4.15558e-05 6.34939e-05
+3 1.59825e-05 4.41958e-05 6.34939e-05
+3.6 0 5.8659e-05 6.34939e-05
+END DIST
+
+Metal 5 OVER 2 UNDER 6
+DIST count 12 width 0.3
+0.3 8.75644e-05 2.15285e-05 6.34939e-05
+0.6 6.17613e-05 2.6632e-05 6.34939e-05
+0.75 5.34143e-05 2.88741e-05 6.34939e-05
+0.9 4.73528e-05 3.08943e-05 6.34939e-05
+1.05 4.24918e-05 3.27334e-05 6.34939e-05
+1.2 3.82311e-05 3.44197e-05 6.34939e-05
+1.35 3.47005e-05 3.59506e-05 6.34939e-05
+1.5 3.17877e-05 3.73376e-05 6.34939e-05
+1.8 2.68305e-05 3.97813e-05 6.34939e-05
+2.4 1.9497e-05 4.35961e-05 6.34939e-05
+3 1.5216e-05 4.62983e-05 6.34939e-05
+3.6 0 6.04238e-05 6.34939e-05
+END DIST
+
+Metal 5 OVER 3 UNDER 6
+DIST count 12 width 0.3
+0.3 8.72297e-05 2.29894e-05 6.34939e-05
+0.6 6.12003e-05 2.85156e-05 6.34939e-05
+0.75 5.27295e-05 3.09209e-05 6.34939e-05
+0.9 4.65589e-05 3.30791e-05 6.34939e-05
+1.05 4.16151e-05 3.50349e-05 6.34939e-05
+1.2 3.73274e-05 3.68199e-05 6.34939e-05
+1.35 3.374e-05 3.84339e-05 6.34939e-05
+1.5 3.07849e-05 3.9891e-05 6.34939e-05
+1.8 2.57839e-05 4.24429e-05 6.34939e-05
+2.4 1.84691e-05 4.63846e-05 6.34939e-05
+3 1.42782e-05 4.9143e-05 6.34939e-05
+3.6 0 6.24562e-05 6.34939e-05
+END DIST
+
+Metal 5 OVER 4 UNDER 6
+DIST count 12 width 0.3
+0.3 8.32873e-05 3.15538e-05 6.34939e-05
+0.6 5.6609e-05 3.95937e-05 6.34939e-05
+0.75 4.79596e-05 4.28871e-05 6.34939e-05
+0.9 4.16901e-05 4.57487e-05 6.34939e-05
+1.05 3.67239e-05 4.82574e-05 6.34939e-05
+1.2 3.24499e-05 5.0473e-05 6.34939e-05
+1.35 2.89481e-05 5.24184e-05 6.34939e-05
+1.5 2.61328e-05 5.41262e-05 6.34939e-05
+1.8 2.14896e-05 5.69963e-05 6.34939e-05
+2.4 1.49797e-05 6.11204e-05 6.34939e-05
+3 1.15236e-05 6.37692e-05 6.34939e-05
+3.6 0 7.46926e-05 6.34939e-05
+END DIST
+
+Metal 6 RESOVER
+WIDTH Table 1 entries:  1.6
+
+Metal 6 RESOVER 0
+DIST count 55 width 1.6
+0 0 0 1.43583e-05
+0 1.8 0 1.43583e-05
+0 3.4 0 1.43583e-05
+0 4.4 0 1.43583e-05
+0 5.2 0 1.43583e-05
+0 6.8 0 1.43583e-05
+0 7.8 0 1.43583e-05
+0 8.6 0 1.43583e-05
+0 10.2 0 1.43583e-05
+0 13.6 0 1.43583e-05
+1.8 1.8 0 1.43583e-05
+1.8 3.4 0 1.43583e-05
+1.8 4.4 0 1.43583e-05
+1.8 5.2 0 1.43583e-05
+1.8 6.8 0 1.43583e-05
+1.8 7.8 0 1.43583e-05
+1.8 8.6 0 1.43583e-05
+1.8 10.2 0 1.43583e-05
+1.8 13.6 0 1.43583e-05
+3.4 3.4 0 1.43583e-05
+3.4 4.4 0 1.43583e-05
+3.4 5.2 0 1.43583e-05
+3.4 6.8 0 1.43583e-05
+3.4 7.8 0 1.43583e-05
+3.4 8.6 0 1.43583e-05
+3.4 10.2 0 1.43583e-05
+3.4 13.6 0 1.43583e-05
+4.4 4.4 0 1.43583e-05
+4.4 5.2 0 1.43583e-05
+4.4 6.8 0 1.43583e-05
+4.4 7.8 0 1.43583e-05
+4.4 8.6 0 1.43583e-05
+4.4 10.2 0 1.43583e-05
+4.4 13.6 0 1.43583e-05
+5.2 5.2 0 1.43583e-05
+5.2 6.8 0 1.43583e-05
+5.2 7.8 0 1.43583e-05
+5.2 8.6 0 1.43583e-05
+5.2 10.2 0 1.43583e-05
+5.2 13.6 0 1.43583e-05
+6.8 6.8 0 1.43583e-05
+6.8 7.8 0 1.43583e-05
+6.8 8.6 0 1.43583e-05
+6.8 10.2 0 1.43583e-05
+6.8 13.6 0 1.43583e-05
+7.8 7.8 0 1.43583e-05
+7.8 8.6 0 1.43583e-05
+7.8 10.2 0 1.43583e-05
+7.8 13.6 0 1.43583e-05
+8.6 8.6 0 1.43583e-05
+8.6 10.2 0 1.43583e-05
+8.6 13.6 0 1.43583e-05
+10.2 10.2 0 1.43583e-05
+10.2 13.6 0 1.43583e-05
+13.6 0 13.6 1.43583e-05
+END DIST
+
+Metal 6 RESOVER 1
+DIST count 0 width 1.6
+END DIST
+
+Metal 6 RESOVER 2
+DIST count 0 width 1.6
+END DIST
+
+Metal 6 RESOVER 3
+DIST count 0 width 1.6
+END DIST
+
+Metal 6 RESOVER 4
+DIST count 0 width 1.6
+END DIST
+
+Metal 6 RESOVER 5
+DIST count 0 width 1.6
+END DIST
+
+Metal 6 OVER
+WIDTH Table 1 entries:  1.6
+
+Metal 6 OVER 0
+DIST count 12 width 1.6
+1.6 6.66627e-05 1.45043e-05 7.17915e-06
+3.2 3.72249e-05 1.84291e-05 7.17915e-06
+4 3.07494e-05 2.01525e-05 7.17915e-06
+4.8 2.63407e-05 2.1734e-05 7.17915e-06
+5.6 2.31409e-05 2.31853e-05 7.17915e-06
+6.4 2.06515e-05 2.45173e-05 7.17915e-06
+7.2 1.86919e-05 2.57396e-05 7.17915e-06
+8 1.71097e-05 2.68615e-05 7.17915e-06
+9.6 1.47095e-05 2.88362e-05 7.17915e-06
+12.8 1.1626e-05 3.19022e-05 7.17915e-06
+16 9.73139e-06 3.4081e-05 7.17915e-06
+19.2 0 4.40858e-05 7.17915e-06
+END DIST
+
+Metal 6 OVER 1
+DIST count 12 width 1.6
+1.6 6.29196e-05 1.64899e-05 7.17915e-06
+3.2 3.46421e-05 1.91398e-05 7.17915e-06
+4 2.88362e-05 2.02634e-05 7.17915e-06
+4.8 2.40282e-05 2.12715e-05 7.17915e-06
+5.6 2.10482e-05 2.21756e-05 7.17915e-06
+6.4 1.82651e-05 3.19919e-05 7.17915e-06
+7.2 1.60883e-05 3.32927e-05 7.17915e-06
+8 1.54206e-05 3.44716e-05 7.17915e-06
+9.6 1.21403e-05 3.65091e-05 7.17915e-06
+12.8 9.34397e-06 3.95634e-05 7.17915e-06
+16 6.54131e-06 4.16361e-05 7.17915e-06
+19.2 0 4.82681e-05 7.17915e-06
+END DIST
+
+Metal 6 OVER 2
+DIST count 12 width 1.6
+1.6 6.15492e-05 2.64609e-05 7.17915e-06
+3.2 3.36711e-05 3.18489e-05 7.17915e-06
+4 2.74269e-05 3.41099e-05 7.17915e-06
+4.8 2.29852e-05 3.61213e-05 7.17915e-06
+5.6 1.96231e-05 3.79107e-05 7.17915e-06
+6.4 1.72071e-05 3.79075e-05 7.17915e-06
+7.2 1.60577e-05 3.92507e-05 7.17915e-06
+8 1.47486e-05 4.04584e-05 7.17915e-06
+9.6 1.06138e-05 4.25212e-05 7.17915e-06
+12.8 8.86515e-06 4.55487e-05 7.17915e-06
+16 5.7098e-06 4.75498e-05 7.17915e-06
+19.2 0 5.29395e-05 7.17915e-06
+END DIST
+
+Metal 6 OVER 3
+DIST count 12 width 1.6
+1.6 6.07751e-05 3.21698e-05 7.17915e-06
+3.2 3.20533e-05 3.84804e-05 7.17915e-06
+4 2.72149e-05 3.88436e-05 7.17915e-06
+4.8 2.23892e-05 4.08074e-05 7.17915e-06
+5.6 1.8029e-05 4.50064e-05 7.17915e-06
+6.4 1.60463e-05 4.3926e-05 7.17915e-06
+7.2 1.46743e-05 4.6754e-05 7.17915e-06
+8 1.31499e-05 4.65322e-05 7.17915e-06
+9.6 1.06158e-05 4.85992e-05 7.17915e-06
+12.8 8.02134e-06 5.15589e-05 7.17915e-06
+16 4.77452e-06 5.34599e-05 7.17915e-06
+19.2 0 5.92968e-05 7.17915e-06
+END DIST
+
+Metal 6 OVER 4
+DIST count 12 width 1.6
+1.6 5.55994e-05 3.3138e-05 7.17915e-06
+3.2 2.72559e-05 4.10486e-05 7.17915e-06
+4 2.11778e-05 4.41059e-05 7.17915e-06
+4.8 1.96147e-05 4.29283e-05 7.17915e-06
+5.6 1.39616e-05 4.88362e-05 7.17915e-06
+6.4 1.41126e-05 4.64272e-05 7.17915e-06
+7.2 1.39169e-05 4.78137e-05 7.17915e-06
+8 9.8897e-06 4.90089e-05 7.17915e-06
+9.6 8.97598e-06 5.09133e-05 7.17915e-06
+12.8 6.3905e-06 5.34918e-05 7.17915e-06
+16 3.92364e-06 5.50778e-05 7.17915e-06
+19.2 0 6.01937e-05 7.17915e-06
+END DIST
+
+Metal 6 OVER 5
+DIST count 12 width 1.6
+1.6 4.77929e-05 7.37127e-05 7.17915e-06
+3.2 2.73854e-05 7.99591e-05 7.17915e-06
+4 2.17929e-05 8.28435e-05 7.17915e-06
+4.8 1.80838e-05 8.50947e-05 7.17915e-06
+5.6 1.54543e-05 8.68752e-05 7.17915e-06
+6.4 1.34659e-05 8.83031e-05 7.17915e-06
+7.2 1.19361e-05 8.9465e-05 7.17915e-06
+8 1.0728e-05 9.04242e-05 7.17915e-06
+9.6 8.95162e-06 9.1909e-05 7.17915e-06
+12.8 6.79595e-06 9.38442e-05 7.17915e-06
+16 5.54918e-06 9.50524e-05 7.17915e-06
+19.2 0 0.000100611 7.17915e-06
+END DIST
+
+Metal 6 UNDER
+WIDTH Table 0 entries: 
+
+Metal 6 DIAGUNDER
+WIDTH Table 0 entries: 
+END DensityModel 0
diff --git a/sky130/openlane/rules.openrcx.sky130A.nom.calibre b/sky130/openlane/rules.openrcx.sky130A.nom.calibre
new file mode 100644
index 0000000..8109043
--- /dev/null
+++ b/sky130/openlane/rules.openrcx.sky130A.nom.calibre
@@ -0,0 +1,1645 @@
+Extraction Rules for OpenRCX
+
+DIAGMODEL ON
+
+LayerCount 6
+DensityRate 1  0
+
+DensityModel 0
+
+Metal 1 RESOVER
+WIDTH Table 1 entries:  0.17
+
+Metal 1 RESOVER 0
+DIST count 55 width 0.17
+0 0 0 0.0684492
+0 0.29 0 0.0684492
+0 0.46 0 0.0684492
+0 0.665 0 0.0684492
+0 0.75 0 0.0684492
+0 0.92 0 0.0684492
+0 1.125 0 0.0684492
+0 1.21 0 0.0684492
+0 1.38 0 0.0684492
+0 1.84 0 0.0684492
+0.29 0.29 0 0.0684492
+0.29 0.46 0 0.0684492
+0.29 0.665 0 0.0684492
+0.29 0.75 0 0.0684492
+0.29 0.92 0 0.0684492
+0.29 1.125 0 0.0684492
+0.29 1.21 0 0.0684492
+0.29 1.38 0 0.0684492
+0.29 1.84 0 0.0684492
+0.46 0.46 0 0.0684492
+0.46 0.665 0 0.0684492
+0.46 0.75 0 0.0684492
+0.46 0.92 0 0.0684492
+0.46 1.125 0 0.0684492
+0.46 1.21 0 0.0684492
+0.46 1.38 0 0.0684492
+0.46 1.84 0 0.0684492
+0.665 0.665 0 0.0684492
+0.665 0.75 0 0.0684492
+0.665 0.92 0 0.0684492
+0.665 1.125 0 0.0684492
+0.665 1.21 0 0.0684492
+0.665 1.38 0 0.0684492
+0.665 1.84 0 0.0684492
+0.75 0.75 0 0.0684492
+0.75 0.92 0 0.0684492
+0.75 1.125 0 0.0684492
+0.75 1.21 0 0.0684492
+0.75 1.38 0 0.0684492
+0.75 1.84 0 0.0684492
+0.92 0.92 0 0.0684492
+0.92 1.125 0 0.0684492
+0.92 1.21 0 0.0684492
+0.92 1.38 0 0.0684492
+0.92 1.84 0 0.0684492
+1.125 1.125 0 0.0684492
+1.125 1.21 0 0.0684492
+1.125 1.38 0 0.0684492
+1.125 1.84 0 0.0684492
+1.21 1.21 0 0.0684492
+1.21 1.38 0 0.0684492
+1.21 1.84 0 0.0684492
+1.38 1.38 0 0.0684492
+1.38 1.84 0 0.0684492
+1.84 0 1.84 0.0684492
+END DIST
+
+Metal 1 OVER
+WIDTH Table 1 entries:  0.17
+
+Metal 1 OVER 0
+DIST count 12 width 0.17
+0.17 7.95044e-05 1.24225e-05 0.0342246
+0.34 4.94413e-05 1.4973e-05 0.0342246
+0.425 4.30439e-05 1.61635e-05 0.0342246
+0.51 3.80924e-05 1.73007e-05 0.0342246
+0.595 3.39877e-05 1.8387e-05 0.0342246
+0.68 3.05504e-05 1.94245e-05 0.0342246
+0.765 2.76742e-05 2.04152e-05 0.0342246
+0.85 2.52543e-05 2.13613e-05 0.0342246
+1.02 2.14414e-05 2.3127e-05 0.0342246
+1.36 1.64505e-05 2.62013e-05 0.0342246
+1.7 1.3421e-05 2.87487e-05 0.0342246
+2.04 0 4.2232e-05 0.0342246
+END DIST
+
+Metal 1 UNDER
+WIDTH Table 1 entries:  0.17
+
+Metal 1 UNDER 2
+DIST count 12 width 0.17
+0.17 7.49958e-05 2.74249e-05 0.0342246
+0.34 4.25069e-05 3.39068e-05 0.0342246
+0.425 3.52213e-05 3.65111e-05 0.0342246
+0.51 2.98153e-05 3.8774e-05 0.0342246
+0.595 2.55569e-05 4.07458e-05 0.0342246
+0.68 2.21426e-05 4.24692e-05 0.0342246
+0.765 1.93856e-05 4.39801e-05 0.0342246
+0.85 1.71395e-05 4.53093e-05 0.0342246
+1.02 1.37592e-05 4.75218e-05 0.0342246
+1.36 9.71052e-06 5.06721e-05 0.0342246
+1.7 7.52534e-06 5.27542e-05 0.0342246
+2.04 0 6.04024e-05 0.0342246
+END DIST
+
+Metal 1 UNDER 3
+DIST count 12 width 0.17
+0.17 7.8161e-05 1.84714e-05 0.0342246
+0.34 4.63794e-05 2.28087e-05 0.0342246
+0.425 3.93875e-05 2.47171e-05 0.0342246
+0.51 3.40959e-05 2.64722e-05 0.0342246
+0.595 2.97969e-05 2.80871e-05 0.0342246
+0.68 2.62377e-05 2.95739e-05 0.0342246
+0.765 2.32718e-05 3.09438e-05 0.0342246
+0.85 2.07773e-05 3.22065e-05 0.0342246
+1.02 1.68459e-05 3.44464e-05 0.0342246
+1.36 1.17537e-05 3.79903e-05 0.0342246
+1.7 8.79687e-06 4.0593e-05 0.0342246
+2.04 0 4.94785e-05 0.0342246
+END DIST
+
+Metal 1 UNDER 4
+DIST count 12 width 0.17
+0.17 7.8755e-05 1.48974e-05 0.0342246
+0.34 4.7364e-05 1.84157e-05 0.0342246
+0.425 4.06147e-05 2.00108e-05 0.0342246
+0.51 3.55322e-05 2.15059e-05 0.0342246
+0.595 3.13951e-05 2.29074e-05 0.0342246
+0.68 2.79539e-05 2.42214e-05 0.0342246
+0.765 2.50678e-05 2.54535e-05 0.0342246
+0.85 2.26197e-05 2.66091e-05 0.0342246
+1.02 1.86967e-05 2.87094e-05 0.0342246
+1.36 1.34139e-05 3.2185e-05 0.0342246
+1.7 1.01678e-05 3.48805e-05 0.0342246
+2.04 0 4.50102e-05 0.0342246
+END DIST
+
+Metal 1 UNDER 5
+DIST count 12 width 0.17
+0.17 7.89071e-05 1.42946e-05 0.0342246
+0.34 4.78104e-05 1.73763e-05 0.0342246
+0.425 4.10868e-05 1.87929e-05 0.0342246
+0.51 3.61324e-05 2.01326e-05 0.0342246
+0.595 3.21136e-05 2.13996e-05 0.0342246
+0.68 2.87766e-05 2.25977e-05 0.0342246
+0.765 2.59792e-05 2.37308e-05 0.0342246
+0.85 2.36039e-05 2.48023e-05 0.0342246
+1.02 1.97794e-05 2.67738e-05 0.0342246
+1.36 1.45452e-05 3.01121e-05 0.0342246
+1.7 1.12318e-05 3.27783e-05 0.0342246
+2.04 0 4.38844e-05 0.0342246
+END DIST
+
+Metal 1 UNDER 6
+DIST count 12 width 0.17
+0.17 7.89202e-05 1.2984e-05 0.0342246
+0.34 4.78681e-05 1.58925e-05 0.0342246
+0.425 4.11257e-05 1.72358e-05 0.0342246
+0.51 3.62093e-05 1.85102e-05 0.0342246
+0.595 3.22464e-05 1.97192e-05 0.0342246
+0.68 2.89657e-05 2.0866e-05 0.0342246
+0.765 2.62201e-05 2.19537e-05 0.0342246
+0.85 2.38899e-05 2.29853e-05 0.0342246
+1.02 2.01333e-05 2.48917e-05 0.0342246
+1.36 1.49579e-05 2.81467e-05 0.0342246
+1.7 1.16402e-05 3.07746e-05 0.0342246
+2.04 0 4.22429e-05 0.0342246
+END DIST
+
+Metal 1 DIAGUNDER
+WIDTH Table 1 entries:  0.17
+
+Metal 1 DIAGUNDER 2
+DIST count 13 width 0.17
+0 0 3.07588e-05 0.0342246
+0.17 0 2.41581e-05 0.0342246
+0.34 0 2.04739e-05 0.0342246
+0.425 0 1.88875e-05 0.0342246
+0.51 0 1.74491e-05 0.0342246
+0.595 0 1.61442e-05 0.0342246
+0.68 0 1.49595e-05 0.0342246
+0.765 0 1.38831e-05 0.0342246
+0.85 0 1.29044e-05 0.0342246
+1.02 0 1.12026e-05 0.0342246
+1.36 0 8.60814e-06 0.0342246
+1.7 0 6.78627e-06 0.0342246
+2.04 0 5.48134e-06 0.0342246
+END DIST
+
+Metal 1 DIAGUNDER 3
+DIST count 13 width 0.17
+0 0 1.49199e-05 0.0342246
+0.17 0 1.32024e-05 0.0342246
+0.34 0 1.21466e-05 0.0342246
+0.425 0 1.16516e-05 0.0342246
+0.51 0 1.11773e-05 0.0342246
+0.595 0 1.07228e-05 0.0342246
+0.68 0 1.02872e-05 0.0342246
+0.765 0 9.86982e-06 0.0342246
+0.85 0 9.46985e-06 0.0342246
+1.02 0 8.71919e-06 0.0342246
+1.36 0 7.39646e-06 0.0342246
+1.7 0 6.2803e-06 0.0342246
+2.04 0 5.74614e-06 0.0342246
+END DIST
+
+Metal 1 DIAGUNDER 4
+DIST count 13 width 0.17
+0 0 9.762e-06 0.0342246
+0.17 0 9.85223e-06 0.0342246
+0.34 0 9.382e-06 0.0342246
+0.425 0 9.15553e-06 0.0342246
+0.51 0 8.93461e-06 0.0342246
+0.595 0 8.71913e-06 0.0342246
+0.68 0 8.50894e-06 0.0342246
+0.765 0 8.30389e-06 0.0342246
+0.85 0 8.10392e-06 0.0342246
+1.02 0 7.71854e-06 0.0342246
+1.36 0 7.00291e-06 0.0342246
+1.7 0 6.35499e-06 0.0342246
+2.04 0 5.924e-06 0.0342246
+END DIST
+
+Metal 1 DIAGUNDER 5
+DIST count 13 width 0.17
+0 0 5.9301e-06 0.0342246
+0.17 0 6.13045e-06 0.0342246
+0.34 0 5.93099e-06 0.0342246
+0.425 0 5.83372e-06 0.0342246
+0.51 0 5.73809e-06 0.0342246
+0.595 0 5.64406e-06 0.0342246
+0.68 0 5.55157e-06 0.0342246
+0.765 0 5.46064e-06 0.0342246
+0.85 0 5.37121e-06 0.0342246
+1.02 0 5.19679e-06 0.0342246
+1.36 0 4.86503e-06 0.0342246
+1.7 0 4.55478e-06 0.0342246
+2.04 0 4.33518e-06 0.0342246
+END DIST
+
+Metal 1 DIAGUNDER 6
+DIST count 0 width 0.17
+END DIST
+
+Metal 2 RESOVER
+WIDTH Table 1 entries:  0.14
+
+Metal 2 RESOVER 0
+DIST count 55 width 0.14
+0 0 0 0.00123763
+0 0.2 0 0.00123763
+0 0.34 0 0.00123763
+0 0.47 0 0.00123763
+0 0.54 0 0.00123763
+0 0.68 0 0.00123763
+0 0.81 0 0.00123763
+0 0.88 0 0.00123763
+0 1.02 0 0.00123763
+0 1.36 0 0.00123763
+0.2 0.2 0 0.00123763
+0.2 0.34 0 0.00123763
+0.2 0.47 0 0.00123763
+0.2 0.54 0 0.00123763
+0.2 0.68 0 0.00123763
+0.2 0.81 0 0.00123763
+0.2 0.88 0 0.00123763
+0.2 1.02 0 0.00123763
+0.2 1.36 0 0.00123763
+0.34 0.34 0 0.00123763
+0.34 0.47 0 0.00123763
+0.34 0.54 0 0.00123763
+0.34 0.68 0 0.00123763
+0.34 0.81 0 0.00123763
+0.34 0.88 0 0.00123763
+0.34 1.02 0 0.00123763
+0.34 1.36 0 0.00123763
+0.47 0.47 0 0.00123763
+0.47 0.54 0 0.00123763
+0.47 0.68 0 0.00123763
+0.47 0.81 0 0.00123763
+0.47 0.88 0 0.00123763
+0.47 1.02 0 0.00123763
+0.47 1.36 0 0.00123763
+0.54 0.54 0 0.00123763
+0.54 0.68 0 0.00123763
+0.54 0.81 0 0.00123763
+0.54 0.88 0 0.00123763
+0.54 1.02 0 0.00123763
+0.54 1.36 0 0.00123763
+0.68 0.68 0 0.00123763
+0.68 0.81 0 0.00123763
+0.68 0.88 0 0.00123763
+0.68 1.02 0 0.00123763
+0.68 1.36 0 0.00123763
+0.81 0.81 0 0.00123763
+0.81 0.88 0 0.00123763
+0.81 1.02 0 0.00123763
+0.81 1.36 0 0.00123763
+0.88 0.88 0 0.00123763
+0.88 1.02 0 0.00123763
+0.88 1.36 0 0.00123763
+1.02 1.02 0 0.00123763
+1.02 1.36 0 0.00123763
+1.36 0 1.36 0.00123763
+END DIST
+
+Metal 2 RESOVER 1
+DIST count 0 width 0.14
+END DIST
+
+Metal 2 OVER
+WIDTH Table 1 entries:  0.14
+
+Metal 2 OVER 0
+DIST count 12 width 0.14
+0.14 0.000105491 9.52417e-06 0.000618813
+0.28 8.15844e-05 1.17812e-05 0.000618813
+0.35 6.91015e-05 1.27853e-05 0.000618813
+0.42 6.33053e-05 1.36215e-05 0.000618813
+0.49 5.74726e-05 1.44576e-05 0.000618813
+0.56 5.16035e-05 1.52937e-05 0.000618813
+0.63 4.61667e-05 1.61043e-05 0.000618813
+0.7 4.38475e-05 1.67435e-05 0.000618813
+0.84 3.91906e-05 1.80221e-05 0.000618813
+1.12 3.01751e-05 2.05277e-05 0.000618813
+1.4 2.63688e-05 2.23064e-05 0.000618813
+1.68 0 4.66363e-05 0.000618813
+END DIST
+
+Metal 2 OVER 1
+DIST count 12 width 0.14
+0.14 0.000101639 1.95764e-05 0.000618813
+0.28 7.49221e-05 2.3912e-05 0.000618813
+0.35 6.37407e-05 2.58302e-05 0.000618813
+0.42 5.67181e-05 2.75512e-05 0.000618813
+0.49 5.03869e-05 2.9167e-05 0.000618813
+0.56 4.46012e-05 3.0686e-05 0.000618813
+0.63 3.94836e-05 3.21027e-05 0.000618813
+0.7 3.62637e-05 3.33522e-05 0.000618813
+0.84 3.0718e-05 3.56304e-05 0.000618813
+1.12 2.22067e-05 3.94314e-05 0.000618813
+1.4 1.8125e-05 4.21334e-05 0.000618813
+1.68 0 5.93213e-05 0.000618813
+END DIST
+
+Metal 2 UNDER
+WIDTH Table 1 entries:  0.14
+
+Metal 2 UNDER 3
+DIST count 12 width 0.14
+0.14 0.00010035 2.56842e-05 0.000618813
+0.28 7.34796e-05 3.1683e-05 0.000618813
+0.35 6.17938e-05 3.42158e-05 0.000618813
+0.42 5.43549e-05 3.64512e-05 0.000618813
+0.49 4.76987e-05 3.84952e-05 0.000618813
+0.56 4.16775e-05 4.03684e-05 0.000618813
+0.63 3.64041e-05 4.20758e-05 0.000618813
+0.7 3.31057e-05 4.35607e-05 0.000618813
+0.84 2.75407e-05 4.61763e-05 0.000618813
+1.12 1.92791e-05 5.02805e-05 0.000618813
+1.4 1.55663e-05 5.30002e-05 0.000618813
+1.68 0 6.78454e-05 0.000618813
+END DIST
+
+Metal 2 UNDER 4
+DIST count 12 width 0.14
+0.14 0.000104872 1.28461e-05 0.000618813
+0.28 7.83225e-05 1.60707e-05 0.000618813
+0.35 6.71745e-05 1.75336e-05 0.000618813
+0.42 6.0278e-05 1.8858e-05 0.000618813
+0.49 5.39577e-05 2.01321e-05 0.000618813
+0.56 4.80915e-05 2.13587e-05 0.000618813
+0.63 4.28293e-05 2.25275e-05 0.000618813
+0.7 3.94561e-05 2.35671e-05 0.000618813
+0.84 3.35131e-05 2.55285e-05 0.000618813
+1.12 2.40959e-05 2.90125e-05 0.000618813
+1.4 1.92691e-05 3.16726e-05 0.000618813
+1.68 0 4.95532e-05 0.000618813
+END DIST
+
+Metal 2 UNDER 5
+DIST count 12 width 0.14
+0.14 0.000105693 1.12747e-05 0.000618813
+0.28 7.91695e-05 1.37895e-05 0.000618813
+0.35 6.82875e-05 1.49421e-05 0.000618813
+0.42 6.16389e-05 1.59834e-05 0.000618813
+0.49 5.55945e-05 1.69995e-05 0.000618813
+0.56 5.00074e-05 1.79914e-05 0.000618813
+0.63 4.49645e-05 1.89471e-05 0.000618813
+0.7 4.17514e-05 1.97938e-05 0.000618813
+0.84 3.5992e-05 2.14241e-05 0.000618813
+1.12 2.65727e-05 2.44291e-05 0.000618813
+1.4 2.14892e-05 2.67989e-05 0.000618813
+1.68 0 4.64264e-05 0.000618813
+END DIST
+
+Metal 2 UNDER 6
+DIST count 12 width 0.14
+0.14 0.000106027 9.98636e-06 0.000618813
+0.28 7.91192e-05 1.22769e-05 0.000618813
+0.35 6.85367e-05 1.33318e-05 0.000618813
+0.42 6.19114e-05 1.42886e-05 0.000618813
+0.49 5.5906e-05 1.5225e-05 0.000618813
+0.56 5.04434e-05 1.61415e-05 0.000618813
+0.63 4.55504e-05 1.70273e-05 0.000618813
+0.7 4.23191e-05 1.78163e-05 0.000618813
+0.84 3.65586e-05 1.93419e-05 0.000618813
+1.12 2.72076e-05 2.21759e-05 0.000618813
+1.4 2.19658e-05 2.44487e-05 0.000618813
+1.68 0 4.43986e-05 0.000618813
+END DIST
+
+Metal 2 DIAGUNDER
+WIDTH Table 1 entries:  0.14
+
+Metal 2 DIAGUNDER 3
+DIST count 13 width 0.14
+0 0 3.87724e-05 0.000618813
+0.14 0 3.5288e-05 0.000618813
+0.28 0 3.2529e-05 0.000618813
+0.35 0 3.07802e-05 0.000618813
+0.42 0 2.91723e-05 0.000618813
+0.49 0 2.76937e-05 0.000618813
+0.56 0 2.63336e-05 0.000618813
+0.63 0 2.50825e-05 0.000618813
+0.7 0 2.39269e-05 0.000618813
+0.84 0 2.18797e-05 0.000618813
+1.12 0 1.8688e-05 0.000618813
+1.4 0 1.34673e-05 0.000618813
+1.68 0 9.24798e-06 0.000618813
+END DIST
+
+Metal 2 DIAGUNDER 4
+DIST count 13 width 0.14
+0 0 2.04874e-05 0.000618813
+0.14 0 2.17715e-05 0.000618813
+0.28 0 2.21394e-05 0.000618813
+0.35 0 2.17243e-05 0.000618813
+0.42 0 2.13154e-05 0.000618813
+0.49 0 2.09128e-05 0.000618813
+0.56 0 2.05168e-05 0.000618813
+0.63 0 2.01275e-05 0.000618813
+0.7 0 1.97336e-05 0.000618813
+0.84 0 1.89688e-05 0.000618813
+1.12 0 1.57487e-05 0.000618813
+1.4 0 1.24872e-05 0.000618813
+1.68 0 1.01329e-05 0.000618813
+END DIST
+
+Metal 2 DIAGUNDER 5
+DIST count 13 width 0.14
+0 0 1.27953e-05 0.000618813
+0.14 0 1.52133e-05 0.000618813
+0.28 0 1.60288e-05 0.000618813
+0.35 0 1.58591e-05 0.000618813
+0.42 0 1.56896e-05 0.000618813
+0.49 0 1.55206e-05 0.000618813
+0.56 0 1.5352e-05 0.000618813
+0.63 0 1.51843e-05 0.000618813
+0.7 0 1.50045e-05 0.000618813
+0.84 0 1.4651e-05 0.000618813
+1.12 0 1.21509e-05 0.000618813
+1.4 0 9.42359e-06 0.000618813
+1.68 0 7.32937e-06 0.000618813
+END DIST
+
+Metal 2 DIAGUNDER 6
+DIST count 13 width 0.14
+0 0 1.02463e-05 0.000618813
+0.14 0 9.62649e-06 0.000618813
+0.28 0 9.47347e-06 0.000618813
+0.35 0 9.39834e-06 0.000618813
+0.42 0 9.32411e-06 0.000618813
+0.49 0 9.25081e-06 0.000618813
+0.56 0 9.17837e-06 0.000618813
+0.63 0 9.10682e-06 0.000618813
+0.7 0 9.03615e-06 0.000618813
+0.84 0 8.89733e-06 0.000618813
+1.12 0 8.62968e-06 0.000618813
+1.4 0 8.37465e-06 0.000618813
+1.68 0 6.44347e-06 0.000618813
+END DIST
+
+Metal 2 OVERUNDER
+WIDTH Table 1 entries:  0.14
+
+Metal 2 OVER 1 UNDER 3
+DIST count 12 width 0.14
+0.14 9.6769e-05 3.47977e-05 0.000618813
+0.28 6.80486e-05 4.32744e-05 0.000618813
+0.35 5.64442e-05 4.67482e-05 0.000618813
+0.42 4.81231e-05 4.97774e-05 0.000618813
+0.49 4.1136e-05 5.2458e-05 0.000618813
+0.56 3.52e-05 5.48364e-05 0.000618813
+0.63 3.0211e-05 5.69445e-05 0.000618813
+0.7 2.66463e-05 5.87779e-05 0.000618813
+0.84 2.10525e-05 6.18763e-05 0.000618813
+1.12 1.37915e-05 6.63706e-05 0.000618813
+1.4 1.0454e-05 6.92185e-05 0.000618813
+1.68 0 7.9507e-05 0.000618813
+END DIST
+
+Metal 2 OVER 1 UNDER 4
+DIST count 12 width 0.14
+0.14 0.000101147 2.21242e-05 0.000618813
+0.28 7.29377e-05 2.77156e-05 0.000618813
+0.35 6.21108e-05 3.01407e-05 0.000618813
+0.42 5.42742e-05 3.23344e-05 0.000618813
+0.49 4.74882e-05 3.43453e-05 0.000618813
+0.56 4.15446e-05 3.61883e-05 0.000618813
+0.63 3.64012e-05 3.78952e-05 0.000618813
+0.7 3.25864e-05 3.94815e-05 0.000618813
+0.84 2.63444e-05 4.22501e-05 0.000618813
+1.12 1.77073e-05 4.66977e-05 0.000618813
+1.4 1.32797e-05 4.98784e-05 0.000618813
+1.68 0 6.26557e-05 0.000618813
+END DIST
+
+Metal 2 OVER 1 UNDER 5
+DIST count 12 width 0.14
+0.14 0.000101663 2.06008e-05 0.000618813
+0.28 7.36569e-05 2.54669e-05 0.000618813
+0.35 6.31645e-05 2.75724e-05 0.000618813
+0.42 5.56154e-05 2.94937e-05 0.000618813
+0.49 4.90883e-05 3.12846e-05 0.000618813
+0.56 4.33665e-05 3.29553e-05 0.000618813
+0.63 3.83826e-05 3.45088e-05 0.000618813
+0.7 3.467e-05 3.5917e-05 0.000618813
+0.84 2.85113e-05 3.84597e-05 0.000618813
+1.12 1.9754e-05 4.26236e-05 0.000618813
+1.4 1.50513e-05 4.56778e-05 0.000618813
+1.68 0 5.99398e-05 0.000618813
+END DIST
+
+Metal 2 OVER 1 UNDER 6
+DIST count 12 width 0.14
+0.14 0.000101842 1.96553e-05 0.000618813
+0.28 7.36578e-05 2.42094e-05 0.000618813
+0.35 6.3361e-05 2.62056e-05 0.000618813
+0.42 5.58743e-05 2.80505e-05 0.000618813
+0.49 4.94069e-05 2.97728e-05 0.000618813
+0.56 4.37764e-05 3.13818e-05 0.000618813
+0.63 3.8888e-05 3.28807e-05 0.000618813
+0.7 3.51848e-05 3.42446e-05 0.000618813
+0.84 2.90442e-05 3.67126e-05 0.000618813
+1.12 2.03156e-05 4.07722e-05 0.000618813
+1.4 1.55133e-05 4.37812e-05 0.000618813
+1.68 0 5.84154e-05 0.000618813
+END DIST
+
+Metal 3 RESOVER
+WIDTH Table 1 entries:  0.14
+
+Metal 3 RESOVER 0
+DIST count 55 width 0.14
+0 0 0 0.00123763
+0 0.32 0 0.00123763
+0 0.46 0 0.00123763
+0 0.71 0 0.00123763
+0 0.78 0 0.00123763
+0 0.92 0 0.00123763
+0 1.17 0 0.00123763
+0 1.24 0 0.00123763
+0 1.38 0 0.00123763
+0 1.84 0 0.00123763
+0.32 0.32 0 0.00123763
+0.32 0.46 0 0.00123763
+0.32 0.71 0 0.00123763
+0.32 0.78 0 0.00123763
+0.32 0.92 0 0.00123763
+0.32 1.17 0 0.00123763
+0.32 1.24 0 0.00123763
+0.32 1.38 0 0.00123763
+0.32 1.84 0 0.00123763
+0.46 0.46 0 0.00123763
+0.46 0.71 0 0.00123763
+0.46 0.78 0 0.00123763
+0.46 0.92 0 0.00123763
+0.46 1.17 0 0.00123763
+0.46 1.24 0 0.00123763
+0.46 1.38 0 0.00123763
+0.46 1.84 0 0.00123763
+0.71 0.71 0 0.00123763
+0.71 0.78 0 0.00123763
+0.71 0.92 0 0.00123763
+0.71 1.17 0 0.00123763
+0.71 1.24 0 0.00123763
+0.71 1.38 0 0.00123763
+0.71 1.84 0 0.00123763
+0.78 0.78 0 0.00123763
+0.78 0.92 0 0.00123763
+0.78 1.17 0 0.00123763
+0.78 1.24 0 0.00123763
+0.78 1.38 0 0.00123763
+0.78 1.84 0 0.00123763
+0.92 0.92 0 0.00123763
+0.92 1.17 0 0.00123763
+0.92 1.24 0 0.00123763
+0.92 1.38 0 0.00123763
+0.92 1.84 0 0.00123763
+1.17 1.17 0 0.00123763
+1.17 1.24 0 0.00123763
+1.17 1.38 0 0.00123763
+1.17 1.84 0 0.00123763
+1.24 1.24 0 0.00123763
+1.24 1.38 0 0.00123763
+1.24 1.84 0 0.00123763
+1.38 1.38 0 0.00123763
+1.38 1.84 0 0.00123763
+1.84 0 1.84 0.00123763
+END DIST
+
+Metal 3 RESOVER 1
+DIST count 0 width 0.14
+END DIST
+
+Metal 3 RESOVER 2
+DIST count 0 width 0.14
+END DIST
+
+Metal 3 OVER
+WIDTH Table 1 entries:  0.14
+
+Metal 3 OVER 0
+DIST count 12 width 0.14
+0.14 0.000104487 8.43597e-06 0.000618813
+0.28 8.01056e-05 1.02685e-05 0.000618813
+0.35 6.80507e-05 1.10703e-05 0.000618813
+0.42 6.25239e-05 1.1722e-05 0.000618813
+0.49 5.69603e-05 1.23738e-05 0.000618813
+0.56 5.13602e-05 1.30255e-05 0.000618813
+0.63 4.61745e-05 1.36564e-05 0.000618813
+0.7 4.39885e-05 1.41472e-05 0.000618813
+0.84 3.95969e-05 1.51289e-05 0.000618813
+1.12 3.10845e-05 1.70565e-05 0.000618813
+1.4 2.7439e-05 1.84817e-05 0.000618813
+1.68 0 4.36865e-05 0.000618813
+END DIST
+
+Metal 3 OVER 1
+DIST count 12 width 0.14
+0.14 0.000104202 1.20609e-05 0.000618813
+0.28 7.69933e-05 1.42981e-05 0.000618813
+0.35 6.63459e-05 1.53335e-05 0.000618813
+0.42 5.9826e-05 1.62708e-05 0.000618813
+0.49 5.39914e-05 1.71837e-05 0.000618813
+0.56 4.86292e-05 1.80721e-05 0.000618813
+0.63 4.38264e-05 1.89258e-05 0.000618813
+0.7 4.07645e-05 1.96862e-05 0.000618813
+0.84 3.53485e-05 2.1139e-05 0.000618813
+1.12 2.66578e-05 2.37776e-05 0.000618813
+1.4 2.20259e-05 2.58771e-05 0.000618813
+1.68 0 4.61419e-05 0.000618813
+END DIST
+
+Metal 3 OVER 2
+DIST count 12 width 0.14
+0.14 9.94973e-05 2.29245e-05 0.000618813
+0.28 7.23842e-05 2.7581e-05 0.000618813
+0.35 6.13386e-05 2.95978e-05 0.000618813
+0.42 5.44837e-05 3.13909e-05 0.000618813
+0.49 4.83449e-05 3.30493e-05 0.000618813
+0.56 4.27668e-05 3.45853e-05 0.000618813
+0.63 3.78606e-05 3.59997e-05 0.000618813
+0.7 3.48295e-05 3.72429e-05 0.000618813
+0.84 2.96511e-05 3.94626e-05 0.000618813
+1.12 2.1776e-05 4.30267e-05 0.000618813
+1.4 1.80753e-05 4.55048e-05 0.000618813
+1.68 0 6.26399e-05 0.000618813
+END DIST
+
+Metal 3 UNDER
+WIDTH Table 1 entries:  0.14
+
+Metal 3 UNDER 4
+DIST count 12 width 0.14
+0.14 0.000101701 1.73094e-05 0.000618813
+0.28 7.45448e-05 2.14319e-05 0.000618813
+0.35 6.34411e-05 2.3251e-05 0.000618813
+0.42 5.64558e-05 2.48844e-05 0.000618813
+0.49 5.01518e-05 2.6416e-05 0.000618813
+0.56 4.43885e-05 2.78539e-05 0.000618813
+0.63 3.92872e-05 2.91949e-05 0.000618813
+0.7 3.60532e-05 3.03857e-05 0.000618813
+0.84 3.04913e-05 3.25525e-05 0.000618813
+1.12 2.19975e-05 3.61547e-05 0.000618813
+1.4 1.7884e-05 3.87755e-05 0.000618813
+1.68 0 5.56581e-05 0.000618813
+END DIST
+
+Metal 3 UNDER 5
+DIST count 12 width 0.14
+0.14 0.000104804 1.08967e-05 0.000618813
+0.28 7.77115e-05 1.31364e-05 0.000618813
+0.35 6.71313e-05 1.41597e-05 0.000618813
+0.42 6.06892e-05 1.50829e-05 0.000618813
+0.49 5.48386e-05 1.59824e-05 0.000618813
+0.56 4.94817e-05 1.68592e-05 0.000618813
+0.63 4.46545e-05 1.77037e-05 0.000618813
+0.7 4.1567e-05 1.84568e-05 0.000618813
+0.84 3.60424e-05 1.99033e-05 0.000618813
+1.12 2.70166e-05 2.25613e-05 0.000618813
+1.4 2.20545e-05 2.47133e-05 0.000618813
+1.68 0 4.47918e-05 0.000618813
+END DIST
+
+Metal 3 UNDER 6
+DIST count 12 width 0.14
+0.14 0.000105343 9.34845e-06 0.000618813
+0.28 7.79329e-05 1.12376e-05 0.000618813
+0.35 6.76593e-05 1.21049e-05 0.000618813
+0.42 6.13448e-05 1.28874e-05 0.000618813
+0.49 5.56411e-05 1.36547e-05 0.000618813
+0.56 5.03752e-05 1.44073e-05 0.000618813
+0.63 4.57441e-05 1.51361e-05 0.000618813
+0.7 4.27226e-05 1.57865e-05 0.000618813
+0.84 3.73102e-05 1.70477e-05 0.000618813
+1.12 2.84192e-05 1.94067e-05 0.000618813
+1.4 2.33209e-05 2.13573e-05 0.000618813
+1.68 0 4.24181e-05 0.000618813
+END DIST
+
+Metal 3 DIAGUNDER
+WIDTH Table 1 entries:  0.14
+
+Metal 3 DIAGUNDER 4
+DIST count 13 width 0.14
+0 0 3.49719e-05 0.000618813
+0.14 0 3.22677e-05 0.000618813
+0.28 0 3.11288e-05 0.000618813
+0.35 0 3.00381e-05 0.000618813
+0.42 0 2.89895e-05 0.000618813
+0.49 0 2.7981e-05 0.000618813
+0.56 0 2.70109e-05 0.000618813
+0.63 0 2.60776e-05 0.000618813
+0.7 0 2.51738e-05 0.000618813
+0.84 0 2.34661e-05 0.000618813
+1.12 0 2.04491e-05 0.000618813
+1.4 0 1.78774e-05 0.000618813
+1.68 0 1.32353e-05 0.000618813
+END DIST
+
+Metal 3 DIAGUNDER 5
+DIST count 13 width 0.14
+0 0 1.6144e-05 0.000618813
+0.14 0 1.80344e-05 0.000618813
+0.28 0 1.87523e-05 0.000618813
+0.35 0 1.85377e-05 0.000618813
+0.42 0 1.83248e-05 0.000618813
+0.49 0 1.81135e-05 0.000618813
+0.56 0 1.79036e-05 0.000618813
+0.63 0 1.76953e-05 0.000618813
+0.7 0 1.74797e-05 0.000618813
+0.84 0 1.70548e-05 0.000618813
+1.12 0 1.62603e-05 0.000618813
+1.4 0 1.54981e-05 0.000618813
+1.68 0 1.11676e-05 0.000618813
+END DIST
+
+Metal 3 DIAGUNDER 6
+DIST count 13 width 0.14
+0 0 1.14489e-05 0.000618813
+0.14 0 1.17652e-05 0.000618813
+0.28 0 1.148e-05 0.000618813
+0.35 0 1.13781e-05 0.000618813
+0.42 0 1.12775e-05 0.000618813
+0.49 0 1.1178e-05 0.000618813
+0.56 0 1.10798e-05 0.000618813
+0.63 0 1.09828e-05 0.000618813
+0.7 0 1.08869e-05 0.000618813
+0.84 0 1.06986e-05 0.000618813
+1.12 0 1.03354e-05 0.000618813
+1.4 0 9.98896e-06 0.000618813
+1.68 0 8.22215e-06 0.000618813
+END DIST
+
+Metal 3 OVERUNDER
+WIDTH Table 1 entries:  0.14
+
+Metal 3 OVER 1 UNDER 4
+DIST count 12 width 0.14
+0.14 0.000101276 2.0083e-05 0.000618813
+0.28 7.25518e-05 2.48804e-05 0.000618813
+0.35 6.19174e-05 2.69952e-05 0.000618813
+0.42 5.42507e-05 2.89203e-05 0.000618813
+0.49 4.76748e-05 3.07056e-05 0.000618813
+0.56 4.19388e-05 3.23622e-05 0.000618813
+0.63 3.69755e-05 3.38954e-05 0.000618813
+0.7 3.3286e-05 3.52847e-05 0.000618813
+0.84 2.7238e-05 3.77728e-05 0.000618813
+1.12 1.88237e-05 4.17848e-05 0.000618813
+1.4 1.44157e-05 4.47067e-05 0.000618813
+1.68 0 5.84427e-05 0.000618813
+END DIST
+
+Metal 3 OVER 1 UNDER 5
+DIST count 12 width 0.14
+0.14 0.0001041 1.3827e-05 0.000618813
+0.28 7.55274e-05 1.66419e-05 0.000618813
+0.35 6.55073e-05 1.79454e-05 0.000618813
+0.42 5.84442e-05 1.91606e-05 0.000618813
+0.49 5.2335e-05 2.03271e-05 0.000618813
+0.56 4.69564e-05 2.14464e-05 0.000618813
+0.63 4.22118e-05 2.25154e-05 0.000618813
+0.7 3.86116e-05 2.35058e-05 0.000618813
+0.84 3.24954e-05 2.5365e-05 0.000618813
+1.12 2.34102e-05 2.8637e-05 0.000618813
+1.4 1.81172e-05 3.12855e-05 0.000618813
+1.68 0 4.79394e-05 0.000618813
+END DIST
+
+Metal 3 OVER 1 UNDER 6
+DIST count 12 width 0.14
+0.14 0.000104524 1.21811e-05 0.000618813
+0.28 7.57587e-05 1.46426e-05 0.000618813
+0.35 6.59609e-05 1.5792e-05 0.000618813
+0.42 5.90296e-05 1.6869e-05 0.000618813
+0.49 5.3081e-05 1.7908e-05 0.000618813
+0.56 4.78264e-05 1.891e-05 0.000618813
+0.63 4.3245e-05 1.98716e-05 0.000618813
+0.7 3.97121e-05 2.07671e-05 0.000618813
+0.84 3.36942e-05 2.246e-05 0.000618813
+1.12 2.46871e-05 2.54811e-05 0.000618813
+1.4 1.9259e-05 2.79762e-05 0.000618813
+1.68 0 4.55366e-05 0.000618813
+END DIST
+
+Metal 3 OVER 2 UNDER 4
+DIST count 12 width 0.14
+0.14 9.75318e-05 3.06032e-05 0.000618813
+0.28 6.79252e-05 3.80803e-05 0.000618813
+0.35 5.68424e-05 4.11833e-05 0.000618813
+0.42 4.89151e-05 4.39112e-05 0.000618813
+0.49 4.2195e-05 4.63447e-05 0.000618813
+0.56 3.64291e-05 4.85201e-05 0.000618813
+0.63 3.1539e-05 5.04639e-05 0.000618813
+0.7 2.8024e-05 5.22227e-05 0.000618813
+0.84 2.24371e-05 5.5138e-05 0.000618813
+1.12 1.50422e-05 5.93939e-05 0.000618813
+1.4 1.15283e-05 6.22142e-05 0.000618813
+1.68 0 7.35001e-05 0.000618813
+END DIST
+
+Metal 3 OVER 2 UNDER 5
+DIST count 12 width 0.14
+0.14 9.95989e-05 2.45039e-05 0.000618813
+0.28 7.10633e-05 2.97924e-05 0.000618813
+0.35 6.05835e-05 3.2085e-05 0.000618813
+0.42 5.31217e-05 3.41515e-05 0.000618813
+0.49 4.67144e-05 3.60483e-05 0.000618813
+0.56 4.11583e-05 3.77913e-05 0.000618813
+0.63 3.63557e-05 3.93898e-05 0.000618813
+0.7 3.28232e-05 4.08928e-05 0.000618813
+0.84 2.70229e-05 4.34345e-05 0.000618813
+1.12 1.88881e-05 4.7379e-05 0.000618813
+1.4 1.45911e-05 5.02945e-05 0.000618813
+1.68 0 6.41205e-05 0.000618813
+END DIST
+
+Metal 3 OVER 2 UNDER 6
+DIST count 12 width 0.14
+0.14 9.98994e-05 2.30196e-05 0.000618813
+0.28 7.12488e-05 2.79285e-05 0.000618813
+0.35 6.10437e-05 3.00678e-05 0.000618813
+0.42 5.37259e-05 3.20036e-05 0.000618813
+0.49 4.74585e-05 3.3786e-05 0.000618813
+0.56 4.20004e-05 3.54289e-05 0.000618813
+0.63 3.73337e-05 3.69403e-05 0.000618813
+0.7 3.38439e-05 3.83045e-05 0.000618813
+0.84 2.80973e-05 4.0728e-05 0.000618813
+1.12 1.99836e-05 4.45839e-05 0.000618813
+1.4 1.55406e-05 4.73593e-05 0.000618813
+1.68 0 6.19714e-05 0.000618813
+END DIST
+
+Metal 4 RESOVER
+WIDTH Table 1 entries:  0.3
+
+Metal 4 RESOVER 0
+DIST count 55 width 0.3
+0 0 0 0.000170909
+0 0.38 0 0.000170909
+0 0.68 0 0.000170909
+0 0.91 0 0.000170909
+0 1.06 0 0.000170909
+0 1.36 0 0.000170909
+0 1.59 0 0.000170909
+0 1.74 0 0.000170909
+0 2.04 0 0.000170909
+0 2.72 0 0.000170909
+0.38 0.38 0 0.000170909
+0.38 0.68 0 0.000170909
+0.38 0.91 0 0.000170909
+0.38 1.06 0 0.000170909
+0.38 1.36 0 0.000170909
+0.38 1.59 0 0.000170909
+0.38 1.74 0 0.000170909
+0.38 2.04 0 0.000170909
+0.38 2.72 0 0.000170909
+0.68 0.68 0 0.000170909
+0.68 0.91 0 0.000170909
+0.68 1.06 0 0.000170909
+0.68 1.36 0 0.000170909
+0.68 1.59 0 0.000170909
+0.68 1.74 0 0.000170909
+0.68 2.04 0 0.000170909
+0.68 2.72 0 0.000170909
+0.91 0.91 0 0.000170909
+0.91 1.06 0 0.000170909
+0.91 1.36 0 0.000170909
+0.91 1.59 0 0.000170909
+0.91 1.74 0 0.000170909
+0.91 2.04 0 0.000170909
+0.91 2.72 0 0.000170909
+1.06 1.06 0 0.000170909
+1.06 1.36 0 0.000170909
+1.06 1.59 0 0.000170909
+1.06 1.74 0 0.000170909
+1.06 2.04 0 0.000170909
+1.06 2.72 0 0.000170909
+1.36 1.36 0 0.000170909
+1.36 1.59 0 0.000170909
+1.36 1.74 0 0.000170909
+1.36 2.04 0 0.000170909
+1.36 2.72 0 0.000170909
+1.59 1.59 0 0.000170909
+1.59 1.74 0 0.000170909
+1.59 2.04 0 0.000170909
+1.59 2.72 0 0.000170909
+1.74 1.74 0 0.000170909
+1.74 2.04 0 0.000170909
+1.74 2.72 0 0.000170909
+2.04 2.04 0 0.000170909
+2.04 2.72 0 0.000170909
+2.72 0 2.72 0.000170909
+END DIST
+
+Metal 4 RESOVER 1
+DIST count 0 width 0.3
+END DIST
+
+Metal 4 RESOVER 2
+DIST count 0 width 0.3
+END DIST
+
+Metal 4 RESOVER 3
+DIST count 0 width 0.3
+END DIST
+
+Metal 4 OVER
+WIDTH Table 1 entries:  0.3
+
+Metal 4 OVER 0
+DIST count 12 width 0.3
+0.3 0.000110251 9.54098e-06 8.54545e-05
+0.6 7.9152e-05 1.19046e-05 8.54545e-05
+0.75 7.27116e-05 1.28113e-05 8.54545e-05
+0.9 6.62294e-05 1.37181e-05 8.54545e-05
+1.05 5.97053e-05 1.46248e-05 8.54545e-05
+1.2 5.3139e-05 1.55315e-05 8.54545e-05
+1.35 4.6531e-05 1.64382e-05 8.54545e-05
+1.5 4.28692e-05 1.71785e-05 8.54545e-05
+1.8 3.85082e-05 1.84924e-05 8.54545e-05
+2.4 2.97283e-05 2.11204e-05 8.54545e-05
+3 2.53403e-05 2.30286e-05 8.54545e-05
+3.6 0 4.66581e-05 8.54545e-05
+END DIST
+
+Metal 4 OVER 1
+DIST count 12 width 0.3
+0.3 0.000108628 1.33248e-05 8.54545e-05
+0.6 7.64477e-05 1.59601e-05 8.54545e-05
+0.75 6.84988e-05 1.71243e-05 8.54545e-05
+0.9 6.15912e-05 1.82633e-05 8.54545e-05
+1.05 5.53779e-05 1.93738e-05 8.54545e-05
+1.2 4.96093e-05 2.04547e-05 8.54545e-05
+1.35 4.4175e-05 2.15059e-05 8.54545e-05
+1.5 4.04498e-05 2.24447e-05 8.54545e-05
+1.8 3.511e-05 2.41551e-05 8.54545e-05
+2.4 2.62826e-05 2.72698e-05 8.54545e-05
+3 2.11906e-05 2.91301e-05 8.54545e-05
+3.6 0 4.81774e-05 8.54545e-05
+END DIST
+
+Metal 4 OVER 2
+DIST count 12 width 0.3
+0.3 0.000107158 1.67749e-05 8.54545e-05
+0.6 7.48954e-05 2.02032e-05 8.54545e-05
+0.75 6.68667e-05 2.1698e-05 8.54545e-05
+0.9 5.98206e-05 2.3133e-05 8.54545e-05
+1.05 5.34346e-05 2.45089e-05 8.54545e-05
+1.2 4.75288e-05 2.58278e-05 8.54545e-05
+1.35 4.19909e-05 2.70922e-05 8.54545e-05
+1.5 3.82151e-05 2.82218e-05 8.54545e-05
+1.8 3.28668e-05 3.02549e-05 8.54545e-05
+2.4 2.41968e-05 3.38246e-05 8.54545e-05
+3 1.93903e-05 3.6501e-05 8.54545e-05
+3.6 0 5.47148e-05 8.54545e-05
+END DIST
+
+Metal 4 OVER 3
+DIST count 12 width 0.3
+0.3 0.000102905 2.85769e-05 8.54545e-05
+0.6 7.0922e-05 3.38559e-05 8.54545e-05
+0.75 6.28034e-05 3.60706e-05 8.54545e-05
+0.9 5.57162e-05 3.81171e-05 8.54545e-05
+1.05 4.93404e-05 4.00109e-05 8.54545e-05
+1.2 4.34901e-05 4.17666e-05 8.54545e-05
+1.35 3.80438e-05 4.33974e-05 8.54545e-05
+1.5 3.43964e-05 4.48316e-05 8.54545e-05
+1.8 2.93635e-05 4.73196e-05 8.54545e-05
+2.4 2.13791e-05 5.13499e-05 8.54545e-05
+3 1.7194e-05 5.41137e-05 8.54545e-05
+3.6 0 7.05113e-05 8.54545e-05
+END DIST
+
+Metal 4 UNDER
+WIDTH Table 1 entries:  0.3
+
+Metal 4 UNDER 5
+DIST count 12 width 0.3
+0.3 0.000102728 3.0693e-05 8.54545e-05
+0.6 7.01553e-05 3.74569e-05 8.54545e-05
+0.75 6.15954e-05 4.0216e-05 8.54545e-05
+0.9 5.41246e-05 4.27023e-05 8.54545e-05
+1.05 4.7441e-05 4.49483e-05 8.54545e-05
+1.2 4.13587e-05 4.69824e-05 8.54545e-05
+1.35 3.57485e-05 4.88299e-05 8.54545e-05
+1.5 3.19857e-05 5.04297e-05 8.54545e-05
+1.8 2.68452e-05 5.31282e-05 8.54545e-05
+2.4 1.89572e-05 5.72683e-05 8.54545e-05
+3 1.50152e-05 5.99368e-05 8.54545e-05
+3.6 0 7.42475e-05 8.54545e-05
+END DIST
+
+Metal 4 UNDER 6
+DIST count 12 width 0.3
+0.3 0.000108084 1.2891e-05 8.54545e-05
+0.6 7.57548e-05 1.66458e-05 8.54545e-05
+0.75 6.7538e-05 1.8263e-05 8.54545e-05
+0.9 6.02838e-05 1.98036e-05 8.54545e-05
+1.05 5.36896e-05 2.12727e-05 8.54545e-05
+1.2 4.75872e-05 2.26749e-05 8.54545e-05
+1.35 4.18704e-05 2.40146e-05 8.54545e-05
+1.5 3.79008e-05 2.52144e-05 8.54545e-05
+1.8 3.21985e-05 2.73721e-05 8.54545e-05
+2.4 2.30645e-05 3.1138e-05 8.54545e-05
+3 1.79919e-05 3.39649e-05 8.54545e-05
+3.6 0 5.07749e-05 8.54545e-05
+END DIST
+
+Metal 4 DIAGUNDER
+WIDTH Table 1 entries:  0.3
+
+Metal 4 DIAGUNDER 5
+DIST count 13 width 0.3
+0 0 5.61948e-05 8.54545e-05
+0.3 0 4.3482e-05 8.54545e-05
+0.6 0 4.00891e-05 8.54545e-05
+0.75 0 3.79593e-05 8.54545e-05
+0.9 0 3.60997e-05 8.54545e-05
+1.05 0 3.44743e-05 8.54545e-05
+1.2 0 3.30529e-05 8.54545e-05
+1.35 0 3.18088e-05 8.54545e-05
+1.5 0 3.07278e-05 8.54545e-05
+1.8 0 2.89464e-05 8.54545e-05
+2.4 0 2.6491e-05 8.54545e-05
+3 0 2.50045e-05 8.54545e-05
+3.6 0 1.03389e-05 8.54545e-05
+END DIST
+
+Metal 4 DIAGUNDER 6
+DIST count 13 width 0.3
+0 0 2.52139e-05 8.54545e-05
+0.3 0 2.58486e-05 8.54545e-05
+0.6 0 2.63237e-05 8.54545e-05
+0.75 0 2.57668e-05 8.54545e-05
+0.9 0 2.52235e-05 8.54545e-05
+1.05 0 2.46931e-05 8.54545e-05
+1.2 0 2.41745e-05 8.54545e-05
+1.35 0 2.07924e-05 8.54545e-05
+1.5 0 1.69667e-05 8.54545e-05
+1.8 0 1.61228e-05 8.54545e-05
+2.4 0 1.45516e-05 8.54545e-05
+3 0 1.3131e-05 8.54545e-05
+3.6 0 1.08365e-05 8.54545e-05
+END DIST
+
+Metal 4 OVERUNDER
+WIDTH Table 1 entries:  0.3
+
+Metal 4 OVER 1 UNDER 5
+DIST count 12 width 0.3
+0.3 0.000101834 3.33456e-05 8.54545e-05
+0.6 6.83988e-05 4.08916e-05 8.54545e-05
+0.75 5.89419e-05 4.39387e-05 8.54545e-05
+0.9 5.1148e-05 4.66459e-05 8.54545e-05
+1.05 4.45437e-05 4.90666e-05 8.54545e-05
+1.2 3.8813e-05 5.12359e-05 8.54545e-05
+1.35 3.37654e-05 5.31841e-05 8.54545e-05
+1.5 2.99814e-05 5.48963e-05 8.54545e-05
+1.8 2.44204e-05 5.77864e-05 8.54545e-05
+2.4 1.66761e-05 6.20888e-05 8.54545e-05
+3 1.25421e-05 6.46284e-05 8.54545e-05
+3.6 0 7.62684e-05 8.54545e-05
+END DIST
+
+Metal 4 OVER 1 UNDER 6
+DIST count 12 width 0.3
+0.3 0.00010697 1.5913e-05 8.54545e-05
+0.6 7.40394e-05 2.0283e-05 8.54545e-05
+0.75 6.49367e-05 2.2169e-05 8.54545e-05
+0.9 5.73494e-05 2.38587e-05 8.54545e-05
+1.05 5.08089e-05 2.55271e-05 8.54545e-05
+1.2 4.50244e-05 2.71001e-05 8.54545e-05
+1.35 3.98325e-05 2.85835e-05 8.54545e-05
+1.5 3.5804e-05 2.99425e-05 8.54545e-05
+1.8 2.96135e-05 3.23897e-05 8.54545e-05
+2.4 2.05434e-05 3.64975e-05 8.54545e-05
+3 1.52668e-05 3.93275e-05 8.54545e-05
+3.6 0 5.33191e-05 8.54545e-05
+END DIST
+
+Metal 4 OVER 2 UNDER 5
+DIST count 12 width 0.3
+0.3 0.000100761 3.67694e-05 8.54545e-05
+0.6 6.69011e-05 4.53273e-05 8.54545e-05
+0.75 5.72426e-05 4.87189e-05 8.54545e-05
+0.9 4.92861e-05 5.1699e-05 8.54545e-05
+1.05 4.256e-05 5.43356e-05 8.54545e-05
+1.2 3.67675e-05 5.66743e-05 8.54545e-05
+1.35 3.17047e-05 5.87546e-05 8.54545e-05
+1.5 2.79491e-05 6.05684e-05 8.54545e-05
+1.8 2.25156e-05 6.35941e-05 8.54545e-05
+2.4 1.51115e-05 6.80031e-05 8.54545e-05
+3 1.13059e-05 7.0817e-05 8.54545e-05
+3.6 0 8.17102e-05 8.54545e-05
+END DIST
+
+Metal 4 OVER 2 UNDER 6
+DIST count 12 width 0.3
+0.3 0.000105775 1.92663e-05 8.54545e-05
+0.6 7.2583e-05 2.44391e-05 8.54545e-05
+0.75 6.32933e-05 2.66644e-05 8.54545e-05
+0.9 5.55336e-05 2.86203e-05 8.54545e-05
+1.05 4.88409e-05 3.05473e-05 8.54545e-05
+1.2 4.2953e-05 3.2343e-05 8.54545e-05
+1.35 3.76995e-05 3.40175e-05 8.54545e-05
+1.5 3.36569e-05 3.55395e-05 8.54545e-05
+1.8 2.75245e-05 3.82417e-05 8.54545e-05
+2.4 1.87269e-05 4.26464e-05 8.54545e-05
+3 1.37885e-05 4.5857e-05 8.54545e-05
+3.6 0 5.89392e-05 8.54545e-05
+END DIST
+
+Metal 4 OVER 3 UNDER 5
+DIST count 12 width 0.3
+0.3 9.69227e-05 4.84207e-05 8.54545e-05
+0.6 6.2839e-05 5.89997e-05 8.54545e-05
+0.75 5.30796e-05 6.30715e-05 8.54545e-05
+0.9 4.51572e-05 6.65578e-05 8.54545e-05
+1.05 3.85606e-05 6.95595e-05 8.54545e-05
+1.2 3.29614e-05 7.21555e-05 8.54545e-05
+1.35 2.8128e-05 7.44108e-05 8.54545e-05
+1.5 2.46244e-05 7.63373e-05 8.54545e-05
+1.8 1.96956e-05 7.94588e-05 8.54545e-05
+2.4 1.31335e-05 8.37873e-05 8.54545e-05
+3 9.91046e-06 8.63942e-05 8.54545e-05
+3.6 0 9.60504e-05 8.54545e-05
+END DIST
+
+Metal 4 OVER 3 UNDER 6
+DIST count 12 width 0.3
+0.3 0.000101807 3.09221e-05 8.54545e-05
+0.6 6.85683e-05 3.80672e-05 8.54545e-05
+0.75 5.91919e-05 4.10287e-05 8.54545e-05
+0.9 5.14158e-05 4.36694e-05 8.54545e-05
+1.05 4.47759e-05 4.6081e-05 8.54545e-05
+1.2 3.89955e-05 4.82661e-05 8.54545e-05
+1.35 3.38904e-05 5.0245e-05 8.54545e-05
+1.5 3.00318e-05 5.20035e-05 8.54545e-05
+1.8 2.43134e-05 5.50141e-05 8.54545e-05
+2.4 1.63264e-05 5.95982e-05 8.54545e-05
+3 1.20453e-05 6.26801e-05 8.54545e-05
+3.6 0 7.42458e-05 8.54545e-05
+END DIST
+
+Metal 5 RESOVER
+WIDTH Table 1 entries:  0.3
+
+Metal 5 RESOVER 0
+DIST count 55 width 0.3
+0 0 0 0.000170909
+0 0.62 0 0.000170909
+0 0.92 0 0.000170909
+0 1.39 0 0.000170909
+0 1.54 0 0.000170909
+0 1.84 0 0.000170909
+0 2.31 0 0.000170909
+0 2.46 0 0.000170909
+0 2.76 0 0.000170909
+0 3.68 0 0.000170909
+0.62 0.62 0 0.000170909
+0.62 0.92 0 0.000170909
+0.62 1.39 0 0.000170909
+0.62 1.54 0 0.000170909
+0.62 1.84 0 0.000170909
+0.62 2.31 0 0.000170909
+0.62 2.46 0 0.000170909
+0.62 2.76 0 0.000170909
+0.62 3.68 0 0.000170909
+0.92 0.92 0 0.000170909
+0.92 1.39 0 0.000170909
+0.92 1.54 0 0.000170909
+0.92 1.84 0 0.000170909
+0.92 2.31 0 0.000170909
+0.92 2.46 0 0.000170909
+0.92 2.76 0 0.000170909
+0.92 3.68 0 0.000170909
+1.39 1.39 0 0.000170909
+1.39 1.54 0 0.000170909
+1.39 1.84 0 0.000170909
+1.39 2.31 0 0.000170909
+1.39 2.46 0 0.000170909
+1.39 2.76 0 0.000170909
+1.39 3.68 0 0.000170909
+1.54 1.54 0 0.000170909
+1.54 1.84 0 0.000170909
+1.54 2.31 0 0.000170909
+1.54 2.46 0 0.000170909
+1.54 2.76 0 0.000170909
+1.54 3.68 0 0.000170909
+1.84 1.84 0 0.000170909
+1.84 2.31 0 0.000170909
+1.84 2.46 0 0.000170909
+1.84 2.76 0 0.000170909
+1.84 3.68 0 0.000170909
+2.31 2.31 0 0.000170909
+2.31 2.46 0 0.000170909
+2.31 2.76 0 0.000170909
+2.31 3.68 0 0.000170909
+2.46 2.46 0 0.000170909
+2.46 2.76 0 0.000170909
+2.46 3.68 0 0.000170909
+2.76 2.76 0 0.000170909
+2.76 3.68 0 0.000170909
+3.68 0 3.68 0.000170909
+END DIST
+
+Metal 5 RESOVER 1
+DIST count 0 width 0.3
+END DIST
+
+Metal 5 RESOVER 2
+DIST count 0 width 0.3
+END DIST
+
+Metal 5 RESOVER 3
+DIST count 0 width 0.3
+END DIST
+
+Metal 5 RESOVER 4
+DIST count 0 width 0.3
+END DIST
+
+Metal 5 OVER
+WIDTH Table 1 entries:  0.3
+
+Metal 5 OVER 0
+DIST count 12 width 0.3
+0.3 0.000108308 8.19535e-06 8.54545e-05
+0.6 7.82879e-05 1.00186e-05 8.54545e-05
+0.75 7.22206e-05 1.06763e-05 8.54545e-05
+0.9 6.61091e-05 1.13339e-05 8.54545e-05
+1.05 5.99537e-05 1.19916e-05 8.54545e-05
+1.2 5.37545e-05 1.26493e-05 8.54545e-05
+1.35 4.75112e-05 1.3307e-05 8.54545e-05
+1.5 4.40468e-05 1.3846e-05 8.54545e-05
+1.8 3.99106e-05 1.48055e-05 8.54545e-05
+2.4 3.15724e-05 1.67245e-05 8.54545e-05
+3 2.72575e-05 1.82421e-05 8.54545e-05
+3.6 0 4.34592e-05 8.54545e-05
+END DIST
+
+Metal 5 OVER 1
+DIST count 12 width 0.3
+0.3 0.000107755 1.10317e-05 8.54545e-05
+0.6 7.66184e-05 1.27642e-05 8.54545e-05
+0.75 6.92116e-05 1.3516e-05 8.54545e-05
+0.9 6.2753e-05 1.42631e-05 8.54545e-05
+1.05 5.68926e-05 1.50017e-05 8.54545e-05
+1.2 5.14438e-05 1.57297e-05 8.54545e-05
+1.35 4.63752e-05 1.6446e-05 8.54545e-05
+1.5 4.2931e-05 1.70906e-05 8.54545e-05
+1.8 3.79743e-05 1.8283e-05 8.54545e-05
+2.4 2.95557e-05 1.98564e-05 8.54545e-05
+3 2.44352e-05 2.0953e-05 8.54545e-05
+3.6 0 4.3229e-05 8.54545e-05
+END DIST
+
+Metal 5 OVER 2
+DIST count 12 width 0.3
+0.3 0.000107354 1.23885e-05 8.54545e-05
+0.6 7.61526e-05 1.43157e-05 8.54545e-05
+0.75 6.86317e-05 1.51614e-05 8.54545e-05
+0.9 6.20746e-05 1.59984e-05 8.54545e-05
+1.05 5.61337e-05 1.68229e-05 8.54545e-05
+1.2 5.06944e-05 1.76325e-05 8.54545e-05
+1.35 4.55891e-05 1.84263e-05 8.54545e-05
+1.5 4.20767e-05 1.91444e-05 8.54545e-05
+1.8 3.70014e-05 2.04723e-05 8.54545e-05
+2.4 2.84859e-05 2.29381e-05 8.54545e-05
+3 2.33549e-05 2.4974e-05 8.54545e-05
+3.6 0 4.63218e-05 8.54545e-05
+END DIST
+
+Metal 5 OVER 3
+DIST count 12 width 0.3
+0.3 0.000106682 1.39333e-05 8.54545e-05
+0.6 7.53957e-05 1.62583e-05 8.54545e-05
+0.75 6.7762e-05 1.72729e-05 8.54545e-05
+0.9 6.10941e-05 1.82637e-05 8.54545e-05
+1.05 5.51445e-05 1.92285e-05 8.54545e-05
+1.2 4.96324e-05 2.01666e-05 8.54545e-05
+1.35 4.44379e-05 2.10782e-05 8.54545e-05
+1.5 4.08575e-05 2.19043e-05 8.54545e-05
+1.8 3.5695e-05 2.34218e-05 8.54545e-05
+2.4 2.7143e-05 2.61795e-05 8.54545e-05
+3 2.20913e-05 2.84161e-05 8.54545e-05
+3.6 0 4.87581e-05 8.54545e-05
+END DIST
+
+Metal 5 OVER 4
+DIST count 12 width 0.3
+0.3 0.000100641 2.74481e-05 8.54545e-05
+0.6 6.96273e-05 3.23788e-05 8.54545e-05
+0.75 6.19288e-05 3.44448e-05 8.54545e-05
+0.9 5.52123e-05 3.63495e-05 8.54545e-05
+1.05 4.91639e-05 3.81071e-05 8.54545e-05
+1.2 4.36042e-05 3.97311e-05 8.54545e-05
+1.35 3.84191e-05 4.12337e-05 8.54545e-05
+1.5 3.49294e-05 4.25669e-05 8.54545e-05
+1.8 3.00814e-05 4.48833e-05 8.54545e-05
+2.4 2.23472e-05 4.85858e-05 8.54545e-05
+3 1.81728e-05 5.11885e-05 8.54545e-05
+3.6 0 6.83974e-05 8.54545e-05
+END DIST
+
+Metal 5 UNDER
+WIDTH Table 1 entries:  0.3
+
+Metal 5 UNDER 6
+DIST count 12 width 0.3
+0.3 0.00010219 2.14417e-05 8.54545e-05
+0.6 7.05056e-05 2.68142e-05 8.54545e-05
+0.75 6.23572e-05 2.9043e-05 8.54545e-05
+0.9 5.52446e-05 3.10806e-05 8.54545e-05
+1.05 4.88631e-05 3.29461e-05 8.54545e-05
+1.2 4.30325e-05 3.46572e-05 8.54545e-05
+1.35 3.76323e-05 3.6229e-05 8.54545e-05
+1.5 3.39664e-05 3.7617e-05 8.54545e-05
+1.8 2.88741e-05 4.00079e-05 8.54545e-05
+2.4 2.09642e-05 4.37656e-05 8.54545e-05
+3 1.68109e-05 4.6358e-05 8.54545e-05
+3.6 0 6.22631e-05 8.54545e-05
+END DIST
+
+Metal 5 DIAGUNDER
+WIDTH Table 1 entries:  0.3
+
+Metal 5 DIAGUNDER 6
+DIST count 13 width 0.3
+0 0 5.26569e-05 8.54545e-05
+0.3 0 4.30002e-05 8.54545e-05
+0.6 0 3.99665e-05 8.54545e-05
+0.75 0 3.79437e-05 8.54545e-05
+0.9 0 3.60923e-05 8.54545e-05
+1.05 0 3.43952e-05 8.54545e-05
+1.2 0 3.28372e-05 8.54545e-05
+1.35 0 3.14046e-05 8.54545e-05
+1.5 0 3.00849e-05 8.54545e-05
+1.8 0 2.77397e-05 8.54545e-05
+2.4 0 2.12873e-05 8.54545e-05
+3 0 1.62857e-05 8.54545e-05
+3.6 0 1.30961e-05 8.54545e-05
+END DIST
+
+Metal 5 OVERUNDER
+WIDTH Table 1 entries:  0.3
+
+Metal 5 OVER 1 UNDER 6
+DIST count 12 width 0.3
+0.3 0.000102099 2.34741e-05 8.54545e-05
+0.6 6.95523e-05 2.8989e-05 8.54545e-05
+0.75 6.06728e-05 3.13293e-05 8.54545e-05
+0.9 5.33341e-05 3.34623e-05 8.54545e-05
+1.05 4.70587e-05 3.54074e-05 8.54545e-05
+1.2 4.15723e-05 3.7183e-05 8.54545e-05
+1.35 3.67382e-05 3.88056e-05 8.54545e-05
+1.5 3.30722e-05 4.02609e-05 8.54545e-05
+1.8 2.75692e-05 4.2782e-05 8.54545e-05
+2.4 1.96532e-05 4.63569e-05 8.54545e-05
+3 1.51475e-05 4.87055e-05 8.54545e-05
+3.6 0 6.28924e-05 8.54545e-05
+END DIST
+
+Metal 5 OVER 2 UNDER 6
+DIST count 12 width 0.3
+0.3 0.000101698 2.46959e-05 8.54545e-05
+0.6 6.91714e-05 3.04969e-05 8.54545e-05
+0.75 6.01574e-05 3.29527e-05 8.54545e-05
+0.9 5.27085e-05 3.5184e-05 8.54545e-05
+1.05 4.63495e-05 3.72129e-05 8.54545e-05
+1.2 4.08397e-05 3.90597e-05 8.54545e-05
+1.35 3.59717e-05 4.07427e-05 8.54545e-05
+1.5 3.22674e-05 4.22494e-05 8.54545e-05
+1.8 2.67175e-05 4.48511e-05 8.54545e-05
+2.4 1.88151e-05 4.88572e-05 8.54545e-05
+3 1.43724e-05 5.16378e-05 8.54545e-05
+3.6 0 6.51407e-05 8.54545e-05
+END DIST
+
+Metal 5 OVER 3 UNDER 6
+DIST count 12 width 0.3
+0.3 0.000101281 2.61992e-05 8.54545e-05
+0.6 6.85051e-05 3.24833e-05 8.54545e-05
+0.75 5.93315e-05 3.512e-05 8.54545e-05
+0.9 5.17529e-05 3.75011e-05 8.54545e-05
+1.05 4.53424e-05 3.96539e-05 8.54545e-05
+1.2 3.97724e-05 4.1603e-05 8.54545e-05
+1.35 3.48539e-05 4.33705e-05 8.54545e-05
+1.5 3.11237e-05 4.49465e-05 8.54545e-05
+1.8 2.55722e-05 4.76514e-05 8.54545e-05
+2.4 1.7768e-05 5.17687e-05 8.54545e-05
+3 1.34703e-05 5.45902e-05 8.54545e-05
+3.6 0 6.73372e-05 8.54545e-05
+END DIST
+
+Metal 5 OVER 4 UNDER 6
+DIST count 12 width 0.3
+0.3 9.60093e-05 3.91424e-05 8.54545e-05
+0.6 6.27428e-05 4.85475e-05 8.54545e-05
+0.75 5.33556e-05 5.22386e-05 8.54545e-05
+0.9 4.57257e-05 5.54293e-05 8.54545e-05
+1.05 3.9355e-05 5.81978e-05 8.54545e-05
+1.2 3.39284e-05 6.06095e-05 8.54545e-05
+1.35 2.92272e-05 6.27185e-05 8.54545e-05
+1.5 2.5775e-05 6.45409e-05 8.54545e-05
+1.8 2.08447e-05 6.753e-05 8.54545e-05
+2.4 1.42041e-05 7.17319e-05 8.54545e-05
+3 1.08128e-05 7.436e-05 8.54545e-05
+3.6 0 8.48209e-05 8.54545e-05
+END DIST
+
+Metal 6 RESOVER
+WIDTH Table 1 entries:  1.6
+
+Metal 6 RESOVER 0
+DIST count 55 width 1.6
+0 0 0 1.88742e-05
+0 1.8 0 1.88742e-05
+0 3.4 0 1.88742e-05
+0 4.4 0 1.88742e-05
+0 5.2 0 1.88742e-05
+0 6.8 0 1.88742e-05
+0 7.8 0 1.88742e-05
+0 8.6 0 1.88742e-05
+0 10.2 0 1.88742e-05
+0 13.6 0 1.88742e-05
+1.8 1.8 0 1.88742e-05
+1.8 3.4 0 1.88742e-05
+1.8 4.4 0 1.88742e-05
+1.8 5.2 0 1.88742e-05
+1.8 6.8 0 1.88742e-05
+1.8 7.8 0 1.88742e-05
+1.8 8.6 0 1.88742e-05
+1.8 10.2 0 1.88742e-05
+1.8 13.6 0 1.88742e-05
+3.4 3.4 0 1.88742e-05
+3.4 4.4 0 1.88742e-05
+3.4 5.2 0 1.88742e-05
+3.4 6.8 0 1.88742e-05
+3.4 7.8 0 1.88742e-05
+3.4 8.6 0 1.88742e-05
+3.4 10.2 0 1.88742e-05
+3.4 13.6 0 1.88742e-05
+4.4 4.4 0 1.88742e-05
+4.4 5.2 0 1.88742e-05
+4.4 6.8 0 1.88742e-05
+4.4 7.8 0 1.88742e-05
+4.4 8.6 0 1.88742e-05
+4.4 10.2 0 1.88742e-05
+4.4 13.6 0 1.88742e-05
+5.2 5.2 0 1.88742e-05
+5.2 6.8 0 1.88742e-05
+5.2 7.8 0 1.88742e-05
+5.2 8.6 0 1.88742e-05
+5.2 10.2 0 1.88742e-05
+5.2 13.6 0 1.88742e-05
+6.8 6.8 0 1.88742e-05
+6.8 7.8 0 1.88742e-05
+6.8 8.6 0 1.88742e-05
+6.8 10.2 0 1.88742e-05
+6.8 13.6 0 1.88742e-05
+7.8 7.8 0 1.88742e-05
+7.8 8.6 0 1.88742e-05
+7.8 10.2 0 1.88742e-05
+7.8 13.6 0 1.88742e-05
+8.6 8.6 0 1.88742e-05
+8.6 10.2 0 1.88742e-05
+8.6 13.6 0 1.88742e-05
+10.2 10.2 0 1.88742e-05
+10.2 13.6 0 1.88742e-05
+13.6 0 13.6 1.88742e-05
+END DIST
+
+Metal 6 RESOVER 1
+DIST count 0 width 1.6
+END DIST
+
+Metal 6 RESOVER 2
+DIST count 0 width 1.6
+END DIST
+
+Metal 6 RESOVER 3
+DIST count 0 width 1.6
+END DIST
+
+Metal 6 RESOVER 4
+DIST count 0 width 1.6
+END DIST
+
+Metal 6 RESOVER 5
+DIST count 0 width 1.6
+END DIST
+
+Metal 6 OVER
+WIDTH Table 1 entries:  1.6
+
+Metal 6 OVER 0
+DIST count 12 width 1.6
+1.6 7.40852e-05 1.53269e-05 9.43708e-06
+3.2 3.91315e-05 1.99228e-05 9.43708e-06
+4 3.19371e-05 2.19115e-05 9.43708e-06
+4.8 2.70964e-05 2.37191e-05 9.43708e-06
+5.6 2.357e-05 2.53621e-05 9.43708e-06
+6.4 2.09156e-05 2.68556e-05 9.43708e-06
+7.2 1.88445e-05 2.82131e-05 9.43708e-06
+8 1.71775e-05 2.94471e-05 9.43708e-06
+9.6 1.46382e-05 3.15888e-05 9.43708e-06
+12.8 1.14443e-05 3.4823e-05 9.43708e-06
+16 9.51897e-06 3.70354e-05 9.43708e-06
+19.2 0 4.67659e-05 9.43708e-06
+END DIST
+
+Metal 6 OVER 1
+DIST count 12 width 1.6
+1.6 6.97966e-05 1.67389e-05 9.43708e-06
+3.2 3.64877e-05 1.99427e-05 9.43708e-06
+4 2.99166e-05 2.12044e-05 9.43708e-06
+4.8 2.466e-05 2.2326e-05 9.43708e-06
+5.6 2.13161e-05 2.33231e-05 9.43708e-06
+6.4 1.84169e-05 3.40396e-05 9.43708e-06
+7.2 1.61341e-05 3.54638e-05 9.43708e-06
+8 1.54206e-05 3.67429e-05 9.43708e-06
+9.6 1.20143e-05 3.89238e-05 9.43708e-06
+12.8 8.69945e-06 4.21081e-05 9.43708e-06
+16 6.39204e-06 4.41918e-05 9.43708e-06
+19.2 0 5.06553e-05 9.43708e-06
+END DIST
+
+Metal 6 OVER 2
+DIST count 12 width 1.6
+1.6 6.84409e-05 2.68397e-05 9.43708e-06
+3.2 3.54871e-05 3.29164e-05 9.43708e-06
+4 2.85e-05 3.54391e-05 9.43708e-06
+4.8 2.361e-05 3.76634e-05 9.43708e-06
+5.6 1.9916e-05 3.96249e-05 9.43708e-06
+6.4 1.73838e-05 3.96498e-05 9.43708e-06
+7.2 1.61689e-05 4.11129e-05 9.43708e-06
+8 1.47732e-05 4.24168e-05 9.43708e-06
+9.6 1.05302e-05 4.46152e-05 9.43708e-06
+12.8 8.72921e-06 4.77605e-05 9.43708e-06
+16 5.62171e-06 4.97672e-05 9.43708e-06
+19.2 0 5.50675e-05 9.43708e-06
+END DIST
+
+Metal 6 OVER 3
+DIST count 12 width 1.6
+1.6 6.7645e-05 3.2193e-05 9.43708e-06
+3.2 3.38391e-05 3.9367e-05 9.43708e-06
+4 2.67021e-05 4.19966e-05 9.43708e-06
+4.8 2.29769e-05 4.18177e-05 9.43708e-06
+5.6 1.82353e-05 4.65442e-05 9.43708e-06
+6.4 1.62227e-05 4.54365e-05 9.43708e-06
+7.2 1.48039e-05 4.84524e-05 9.43708e-06
+8 1.32738e-05 4.82507e-05 9.43708e-06
+9.6 1.07123e-05 5.04464e-05 9.43708e-06
+12.8 8.05801e-06 5.35152e-05 9.43708e-06
+16 4.84253e-06 5.54212e-05 9.43708e-06
+19.2 0 6.11626e-05 9.43708e-06
+END DIST
+
+Metal 6 OVER 4
+DIST count 12 width 1.6
+1.6 6.22864e-05 3.56698e-05 9.43708e-06
+3.2 2.88977e-05 4.44753e-05 9.43708e-06
+4 2.21355e-05 4.78329e-05 9.43708e-06
+4.8 2.02689e-05 4.66506e-05 9.43708e-06
+5.6 1.42772e-05 5.29604e-05 9.43708e-06
+6.4 1.43508e-05 5.04747e-05 9.43708e-06
+7.2 1.36855e-05 5.19708e-05 9.43708e-06
+8 9.97895e-06 5.32154e-05 9.43708e-06
+9.6 8.98714e-06 5.52233e-05 9.43708e-06
+12.8 6.3669e-06 5.79283e-05 9.43708e-06
+16 3.93686e-06 5.95142e-05 9.43708e-06
+19.2 0 6.45661e-05 9.43708e-06
+END DIST
+
+Metal 6 OVER 5
+DIST count 12 width 1.6
+1.6 5.37839e-05 8.90159e-05 9.43708e-06
+3.2 2.88056e-05 9.62448e-05 9.43708e-06
+4 2.26176e-05 9.9472e-05 9.43708e-06
+4.8 1.85813e-05 0.000101954 9.43708e-06
+5.6 1.57289e-05 0.000103891 9.43708e-06
+6.4 1.36365e-05 0.000105426 9.43708e-06
+7.2 1.20437e-05 0.000106662 9.43708e-06
+8 1.07924e-05 0.000107674 9.43708e-06
+9.6 8.94989e-06 0.000109223 9.43708e-06
+12.8 6.74626e-06 0.000111206 9.43708e-06
+16 5.48249e-06 0.000112414 9.43708e-06
+19.2 0 0.000117864 9.43708e-06
+END DIST
+
+Metal 6 UNDER
+WIDTH Table 0 entries: 
+
+Metal 6 DIAGUNDER
+WIDTH Table 0 entries: 
+END DensityModel 0