sky130/openlane/rules.openrcx.sky130B.max.magic

Extraction Rules for OpenRCX

DIAGMODEL ON

LayerCount 6
DensityRate 1  0

DensityModel 0

Metal 1 RESOVER
WIDTH Table 1 entries:  0.17

Metal 1 RESOVER 0
DIST count 55 width 0.17
0 0 0 0.10101
0 0.29 0 0.10101
0 0.46 0 0.10101
0 0.665 0 0.10101
0 0.75 0 0.10101
0 0.92 0 0.10101
0 1.125 0 0.10101
0 1.21 0 0.10101
0 1.38 0 0.10101
0 1.84 0 0.10101
0.29 0.29 0 0.10101
0.29 0.46 0 0.10101
0.29 0.665 0 0.10101
0.29 0.75 0 0.10101
0.29 0.92 0 0.10101
0.29 1.125 0 0.10101
0.29 1.21 0 0.10101
0.29 1.38 0 0.10101
0.29 1.84 0 0.10101
0.46 0.46 0 0.10101
0.46 0.665 0 0.10101
0.46 0.75 0 0.10101
0.46 0.92 0 0.10101
0.46 1.125 0 0.10101
0.46 1.21 0 0.10101
0.46 1.38 0 0.10101
0.46 1.84 0 0.10101
0.665 0.665 0 0.10101
0.665 0.75 0 0.10101
0.665 0.92 0 0.10101
0.665 1.125 0 0.10101
0.665 1.21 0 0.10101
0.665 1.38 0 0.10101
0.665 1.84 0 0.10101
0.75 0.75 0 0.10101
0.75 0.92 0 0.10101
0.75 1.125 0 0.10101
0.75 1.21 0 0.10101
0.75 1.38 0 0.10101
0.75 1.84 0 0.10101
0.92 0.92 0 0.10101
0.92 1.125 0 0.10101
0.92 1.21 0 0.10101
0.92 1.38 0 0.10101
0.92 1.84 0 0.10101
1.125 1.125 0 0.10101
1.125 1.21 0 0.10101
1.125 1.38 0 0.10101
1.125 1.84 0 0.10101
1.21 1.21 0 0.10101
1.21 1.38 0 0.10101
1.21 1.84 0 0.10101
1.38 1.38 0 0.10101
1.38 1.84 0 0.10101
1.84 0 1.84 0.10101
END DIST

Metal 1 OVER
WIDTH Table 1 entries:  0.17

Metal 1 OVER 0
DIST count 12 width 0.17
0.17 0.000855615 8.46521e-06 0.0505051
0.34 0.000480081 1.00419e-05 0.0505051
0.425 0.000398948 1.08281e-05 0.0505051
0.51 0.000342687 1.16127e-05 0.0505051
0.595 0.000301087 1.23953e-05 0.0505051
0.68 0.000268928 1.31758e-05 0.0505051
0.765 0.000243239 1.3954e-05 0.0505051
0.85 0.000222199 1.47296e-05 0.0505051
1.02 0.000189695 1.62721e-05 0.0505051
1.36 0.000147162 1.93171e-05 0.0505051
1.7 0.00012041 2.22971e-05 0.0505051
2.04 0 0.000127167 0.0505051
END DIST

Metal 1 UNDER
WIDTH Table 1 entries:  0.17

Metal 1 UNDER 2
DIST count 12 width 0.17
0.17 0.000855615 0.000100629 0.0505051
0.34 0.000480081 0.000104937 0.0505051
0.425 0.000398948 0.000107084 0.0505051
0.51 0.000342687 0.000109228 0.0505051
0.595 0.000301087 0.000111366 0.0505051
0.68 0.000268928 0.000113497 0.0505051
0.765 0.000243239 0.000115624 0.0505051
0.85 0.000222199 0.000117742 0.0505051
1.02 0.000189695 0.000121957 0.0505051
1.36 0.000147162 0.000130276 0.0505051
1.7 0.00012041 0.000138415 0.0505051
2.04 0 0.00024831 0.0505051
END DIST

Metal 1 UNDER 3
DIST count 12 width 0.17
0.17 0.000855615 5.62148e-05 0.0505051
0.34 0.000480081 5.90216e-05 0.0505051
0.425 0.000398948 6.04211e-05 0.0505051
0.51 0.000342687 6.18183e-05 0.0505051
0.595 0.000301087 6.32111e-05 0.0505051
0.68 0.000268928 6.46008e-05 0.0505051
0.765 0.000243239 6.59854e-05 0.0505051
0.85 0.000222199 6.73666e-05 0.0505051
1.02 0.000189695 7.01136e-05 0.0505051
1.36 0.000147162 7.55329e-05 0.0505051
1.7 0.00012041 8.08368e-05 0.0505051
2.04 0 0.000187971 0.0505051
END DIST

Metal 1 UNDER 4
DIST count 12 width 0.17
0.17 0.000855615 3.46825e-05 0.0505051
0.34 0.000480081 3.7181e-05 0.0505051
0.425 0.000398948 3.84266e-05 0.0505051
0.51 0.000342687 3.967e-05 0.0505051
0.595 0.000301087 4.09102e-05 0.0505051
0.68 0.000268928 4.21475e-05 0.0505051
0.765 0.000243239 4.33803e-05 0.0505051
0.85 0.000222199 4.46096e-05 0.0505051
1.02 0.000189695 4.70537e-05 0.0505051
1.36 0.000147162 5.18787e-05 0.0505051
1.7 0.00012041 5.66011e-05 0.0505051
2.04 0 0.000163168 0.0505051
END DIST

Metal 1 UNDER 5
DIST count 12 width 0.17
0.17 0.000855615 3.11859e-05 0.0505051
0.34 0.000480081 3.342e-05 0.0505051
0.425 0.000398948 3.45345e-05 0.0505051
0.51 0.000342687 3.5646e-05 0.0505051
0.595 0.000301087 3.67553e-05 0.0505051
0.68 0.000268928 3.7862e-05 0.0505051
0.765 0.000243239 3.89651e-05 0.0505051
0.85 0.000222199 4.00641e-05 0.0505051
1.02 0.000189695 4.22501e-05 0.0505051
1.36 0.000147162 4.65654e-05 0.0505051
1.7 0.00012041 5.07887e-05 0.0505051
2.04 0 0.000156868 0.0505051
END DIST

Metal 1 UNDER 6
DIST count 12 width 0.17
0.17 0.000855615 1.49918e-05 0.0505051
0.34 0.000480081 1.71126e-05 0.0505051
0.425 0.000398948 1.81703e-05 0.0505051
0.51 0.000342687 1.92258e-05 0.0505051
0.595 0.000301087 2.02785e-05 0.0505051
0.68 0.000268928 2.13284e-05 0.0505051
0.765 0.000243239 2.23752e-05 0.0505051
0.85 0.000222199 2.34186e-05 0.0505051
1.02 0.000189695 2.54936e-05 0.0505051
1.36 0.000147162 2.95897e-05 0.0505051
1.7 0.00012041 3.35985e-05 0.0505051
2.04 0 0.00013947 0.0505051
END DIST

Metal 1 DIAGUNDER
WIDTH Table 1 entries:  0.17

Metal 1 DIAGUNDER 2
DIST count 13 width 0.17
0 0 0.00015718 0.0505051
0.17 0 0 0.0505051
0.34 0 0 0.0505051
0.425 0 0 0.0505051
0.51 0 0 0.0505051
0.595 0 0 0.0505051
0.68 0 0 0.0505051
0.765 0 0 0.0505051
0.85 0 0 0.0505051
1.02 0 0 0.0505051
1.36 0 0 0.0505051
1.7 0 0 0.0505051
2.04 0 0 0.0505051
END DIST

Metal 1 DIAGUNDER 3
DIST count 13 width 0.17
0 0 8.29614e-05 0.0505051
0.17 0 0 0.0505051
0.34 0 0 0.0505051
0.425 0 0 0.0505051
0.51 0 0 0.0505051
0.595 0 0 0.0505051
0.68 0 0 0.0505051
0.765 0 0 0.0505051
0.85 0 0 0.0505051
1.02 0 0 0.0505051
1.36 0 0 0.0505051
1.7 0 0 0.0505051
2.04 0 0 0.0505051
END DIST

Metal 1 DIAGUNDER 4
DIST count 13 width 0.17
0 0 3.09538e-05 0.0505051
0.17 0 0 0.0505051
0.34 0 0 0.0505051
0.425 0 0 0.0505051
0.51 0 0 0.0505051
0.595 0 0 0.0505051
0.68 0 0 0.0505051
0.765 0 0 0.0505051
0.85 0 0 0.0505051
1.02 0 0 0.0505051
1.36 0 0 0.0505051
1.7 0 0 0.0505051
2.04 0 0 0.0505051
END DIST

Metal 1 DIAGUNDER 5
DIST count 13 width 0.17
0 0 2.17327e-05 0.0505051
0.17 0 0 0.0505051
0.34 0 0 0.0505051
0.425 0 0 0.0505051
0.51 0 0 0.0505051
0.595 0 0 0.0505051
0.68 0 0 0.0505051
0.765 0 0 0.0505051
0.85 0 0 0.0505051
1.02 0 0 0.0505051
1.36 0 0 0.0505051
1.7 0 0 0.0505051
2.04 0 0 0.0505051
END DIST

Metal 1 DIAGUNDER 6
DIST count 0 width 0.17
END DIST

Metal 2 RESOVER
WIDTH Table 1 entries:  0.14

Metal 2 RESOVER 0
DIST count 55 width 0.14
0 0 0 0.00104618
0 0.2 0 0.00104618
0 0.34 0 0.00104618
0 0.47 0 0.00104618
0 0.54 0 0.00104618
0 0.68 0 0.00104618
0 0.81 0 0.00104618
0 0.88 0 0.00104618
0 1.02 0 0.00104618
0 1.36 0 0.00104618
0.2 0.2 0 0.00104618
0.2 0.34 0 0.00104618
0.2 0.47 0 0.00104618
0.2 0.54 0 0.00104618
0.2 0.68 0 0.00104618
0.2 0.81 0 0.00104618
0.2 0.88 0 0.00104618
0.2 1.02 0 0.00104618
0.2 1.36 0 0.00104618
0.34 0.34 0 0.00104618
0.34 0.47 0 0.00104618
0.34 0.54 0 0.00104618
0.34 0.68 0 0.00104618
0.34 0.81 0 0.00104618
0.34 0.88 0 0.00104618
0.34 1.02 0 0.00104618
0.34 1.36 0 0.00104618
0.47 0.47 0 0.00104618
0.47 0.54 0 0.00104618
0.47 0.68 0 0.00104618
0.47 0.81 0 0.00104618
0.47 0.88 0 0.00104618
0.47 1.02 0 0.00104618
0.47 1.36 0 0.00104618
0.54 0.54 0 0.00104618
0.54 0.68 0 0.00104618
0.54 0.81 0 0.00104618
0.54 0.88 0 0.00104618
0.54 1.02 0 0.00104618
0.54 1.36 0 0.00104618
0.68 0.68 0 0.00104618
0.68 0.81 0 0.00104618
0.68 0.88 0 0.00104618
0.68 1.02 0 0.00104618
0.68 1.36 0 0.00104618
0.81 0.81 0 0.00104618
0.81 0.88 0 0.00104618
0.81 1.02 0 0.00104618
0.81 1.36 0 0.00104618
0.88 0.88 0 0.00104618
0.88 1.02 0 0.00104618
0.88 1.36 0 0.00104618
1.02 1.02 0 0.00104618
1.02 1.36 0 0.00104618
1.36 0 1.36 0.00104618
END DIST

Metal 2 RESOVER 1
DIST count 0 width 0.14
END DIST

Metal 2 OVER
WIDTH Table 1 entries:  0.14

Metal 2 OVER 0
DIST count 12 width 0.14
0.14 0.00138859 6.07092e-06 0.000523088
0.28 0.000780268 7.4434e-06 0.000523088
0.35 0.000648137 8.12846e-06 0.000523088
0.42 0.000556378 8.81255e-06 0.000523088
0.49 0.000488485 9.49553e-06 0.000523088
0.56 0.000435987 1.01773e-05 0.000523088
0.63 0.000394058 1.08577e-05 0.000523088
0.7 0.000359723 1.15367e-05 0.000523088
0.84 0.00030672 1.28896e-05 0.000523088
1.12 0.000237465 1.55721e-05 0.000523088
1.4 0.000194001 1.82166e-05 0.000523088
1.68 0 0.000184909 0.000523088
END DIST

Metal 2 OVER 1
DIST count 12 width 0.14
0.14 0.00138859 4.977e-05 0.000523088
0.28 0.000780268 5.43342e-05 0.000523088
0.35 0.000648137 5.66122e-05 0.000523088
0.42 0.000556378 5.88865e-05 0.000523088
0.49 0.000488485 6.11585e-05 0.000523088
0.56 0.000435987 6.34257e-05 0.000523088
0.63 0.000394058 6.56886e-05 0.000523088
0.7 0.000359723 6.79461e-05 0.000523088
0.84 0.00030672 7.24449e-05 0.000523088
1.12 0.000237465 8.13649e-05 0.000523088
1.4 0.000194001 9.01587e-05 0.000523088
1.68 0 0.000262894 0.000523088
END DIST

Metal 2 UNDER
WIDTH Table 1 entries:  0.14

Metal 2 UNDER 3
DIST count 12 width 0.14
0.14 0.00138859 4.96634e-05 0.000523088
0.28 0.000780268 5.26474e-05 0.000523088
0.35 0.000648137 5.41368e-05 0.000523088
0.42 0.000556378 5.56225e-05 0.000523088
0.49 0.000488485 5.71068e-05 0.000523088
0.56 0.000435987 5.8589e-05 0.000523088
0.63 0.000394058 6.00672e-05 0.000523088
0.7 0.000359723 6.15432e-05 0.000523088
0.84 0.00030672 6.44836e-05 0.000523088
1.12 0.000237465 7.03144e-05 0.000523088
1.4 0.000194001 7.60619e-05 0.000523088
1.68 0 0.000245803 0.000523088
END DIST

Metal 2 UNDER 4
DIST count 12 width 0.14
0.14 0.00138859 2.87245e-05 0.000523088
0.28 0.000780268 3.13168e-05 0.000523088
0.35 0.000648137 3.26119e-05 0.000523088
0.42 0.000556378 3.39038e-05 0.000523088
0.49 0.000488485 3.51942e-05 0.000523088
0.56 0.000435987 3.64818e-05 0.000523088
0.63 0.000394058 3.77677e-05 0.000523088
0.7 0.000359723 3.90503e-05 0.000523088
0.84 0.00030672 4.16054e-05 0.000523088
1.12 0.000237465 4.66737e-05 0.000523088
1.4 0.000194001 5.16695e-05 0.000523088
1.68 0 0.000220672 0.000523088
END DIST

Metal 2 UNDER 5
DIST count 12 width 0.14
0.14 0.00138859 2.46589e-05 0.000523088
0.28 0.000780268 2.68752e-05 0.000523088
0.35 0.000648137 2.79827e-05 0.000523088
0.42 0.000556378 2.90872e-05 0.000523088
0.49 0.000488485 3.01911e-05 0.000523088
0.56 0.000435987 3.12918e-05 0.000523088
0.63 0.000394058 3.23914e-05 0.000523088
0.7 0.000359723 3.34876e-05 0.000523088
0.84 0.00030672 3.56733e-05 0.000523088
1.12 0.000237465 4.00067e-05 0.000523088
1.4 0.000194001 4.4279e-05 0.000523088
1.68 0 0.00021257 0.000523088
END DIST

Metal 2 UNDER 6
DIST count 12 width 0.14
0.14 0.00138859 1.22545e-05 0.000523088
0.28 0.000780268 1.43436e-05 0.000523088
0.35 0.000648137 1.53863e-05 0.000523088
0.42 0.000556378 1.64277e-05 0.000523088
0.49 0.000488485 1.74672e-05 0.000523088
0.56 0.000435987 1.85051e-05 0.000523088
0.63 0.000394058 1.95408e-05 0.000523088
0.7 0.000359723 2.05742e-05 0.000523088
0.84 0.00030672 2.26337e-05 0.000523088
1.12 0.000237465 2.67169e-05 0.000523088
1.4 0.000194001 3.07422e-05 0.000523088
1.68 0 0.000198792 0.000523088
END DIST

Metal 2 DIAGUNDER
WIDTH Table 1 entries:  0.14

Metal 2 DIAGUNDER 3
DIST count 13 width 0.14
0 0 1.9469e-05 0.000523088
0.14 0 2.06473e-05 0.000523088
0.28 0 2.03527e-05 0.000523088
0.35 0 2.01619e-05 0.000523088
0.42 0 1.99746e-05 0.000523088
0.49 0 1.97907e-05 0.000523088
0.56 0 1.96102e-05 0.000523088
0.63 0 1.9433e-05 0.000523088
0.7 0 1.91742e-05 0.000523088
0.84 0 9.50159e-06 0.000523088
1.12 0 0 0.000523088
1.4 0 0 0.000523088
1.68 0 0 0.000523088
END DIST

Metal 2 DIAGUNDER 4
DIST count 13 width 0.14
0 0 5.87914e-05 0.000523088
0.14 0 1.97789e-05 0.000523088
0.28 0 1.95085e-05 0.000523088
0.35 0 1.93331e-05 0.000523088
0.42 0 1.91608e-05 0.000523088
0.49 0 1.89916e-05 0.000523088
0.56 0 9.45382e-06 0.000523088
0.63 0 0 0.000523088
0.7 0 0 0.000523088
0.84 0 0 0.000523088
1.12 0 0 0.000523088
1.4 0 0 0.000523088
1.68 0 0 0.000523088
END DIST

Metal 2 DIAGUNDER 5
DIST count 13 width 0.14
0 0 4.30084e-05 0.000523088
0.14 0 1.97789e-05 0.000523088
0.28 0 1.95085e-05 0.000523088
0.35 0 1.93331e-05 0.000523088
0.42 0 1.91608e-05 0.000523088
0.49 0 1.89916e-05 0.000523088
0.56 0 9.45382e-06 0.000523088
0.63 0 0 0.000523088
0.7 0 0 0.000523088
0.84 0 0 0.000523088
1.12 0 0 0.000523088
1.4 0 0 0.000523088
1.68 0 0 0.000523088
END DIST

Metal 2 DIAGUNDER 6
DIST count 13 width 0.14
0 0 2.53311e-05 0.000523088
0.14 0 0 0.000523088
0.28 0 0 0.000523088
0.35 0 0 0.000523088
0.42 0 0 0.000523088
0.49 0 0 0.000523088
0.56 0 0 0.000523088
0.63 0 0 0.000523088
0.7 0 0 0.000523088
0.84 0 0 0.000523088
1.12 0 0 0.000523088
1.4 0 0 0.000523088
1.68 0 0 0.000523088
END DIST

Metal 2 OVERUNDER
WIDTH Table 1 entries:  0.14

Metal 2 OVER 1 UNDER 3
DIST count 12 width 0.14
0.14 0.0013887 9.59394e-05 0.000523088
0.28 0.000780276 0.000102138 0.000523088
0.35 0.000648137 0.000105196 0.000523088
0.42 0.000556378 0.000108244 0.000523088
0.49 0.000488509 0.000111277 0.000523088
0.56 0.000436058 0.000114293 0.000523088
0.63 0.00039416 0.000117311 0.000523088
0.7 0.000359778 0.000120361 0.000523088
0.84 0.000306783 0.000126427 0.000523088
1.12 0.000237505 0.00013851 0.000523088
1.4 0.000194001 0.00015043 0.000523088
1.68 0 0.000326217 0.000523088
END DIST

Metal 2 OVER 1 UNDER 4
DIST count 12 width 0.14
0.14 0.00138881 7.50098e-05 0.000523088
0.28 0.000780387 8.08004e-05 0.000523088
0.35 0.000648248 8.36888e-05 0.000523088
0.42 0.000556489 8.65709e-05 0.000523088
0.49 0.000488619 8.94488e-05 0.000523088
0.56 0.000436169 9.23188e-05 0.000523088
0.63 0.000394271 9.51853e-05 0.000523088
0.7 0.000359889 9.80495e-05 0.000523088
0.84 0.000306894 0.00010375 0.000523088
1.12 0.000237615 0.000115057 0.000523088
1.4 0.000194111 0.000126205 0.000523088
1.68 0 0.000301362 0.000523088
END DIST

Metal 2 OVER 1 UNDER 5
DIST count 12 width 0.14
0.14 0.00138881 7.09443e-05 0.000523088
0.28 0.000780379 7.59001e-05 0.000523088
0.35 0.000648248 7.7277e-05 0.000523088
0.42 0.000556489 7.91543e-05 0.000523088
0.49 0.000488596 8.18471e-05 0.000523088
0.56 0.000436098 8.45333e-05 0.000523088
0.63 0.000394168 8.72154e-05 0.000523088
0.7 0.000359834 8.98901e-05 0.000523088
0.84 0.00030683 9.52217e-05 0.000523088
1.12 0.000237576 0.000105793 0.000523088
1.4 0.000194111 0.000116214 0.000523088
1.68 0 0.000290799 0.000523088
END DIST

Metal 2 OVER 1 UNDER 6
DIST count 12 width 0.14
0.14 0.0013887 5.594e-05 0.000523088
0.28 0.000780268 6.12344e-05 0.000523088
0.35 0.000648137 6.38701e-05 0.000523088
0.42 0.000556378 6.65017e-05 0.000523088
0.49 0.000488485 6.91302e-05 0.000523088
0.56 0.000435987 7.17535e-05 0.000523088
0.63 0.000394058 7.43717e-05 0.000523088
0.7 0.000359723 7.69837e-05 0.000523088
0.84 0.00030672 8.2189e-05 0.000523088
1.12 0.000237465 9.25097e-05 0.000523088
1.4 0.000194001 0.000102684 0.000523088
1.68 0 0.000276777 0.000523088
END DIST

Metal 3 RESOVER
WIDTH Table 1 entries:  0.14

Metal 3 RESOVER 0
DIST count 55 width 0.14
0 0 0 0.00104618
0 0.32 0 0.00104618
0 0.46 0 0.00104618
0 0.71 0 0.00104618
0 0.78 0 0.00104618
0 0.92 0 0.00104618
0 1.17 0 0.00104618
0 1.24 0 0.00104618
0 1.38 0 0.00104618
0 1.84 0 0.00104618
0.32 0.32 0 0.00104618
0.32 0.46 0 0.00104618
0.32 0.71 0 0.00104618
0.32 0.78 0 0.00104618
0.32 0.92 0 0.00104618
0.32 1.17 0 0.00104618
0.32 1.24 0 0.00104618
0.32 1.38 0 0.00104618
0.32 1.84 0 0.00104618
0.46 0.46 0 0.00104618
0.46 0.71 0 0.00104618
0.46 0.78 0 0.00104618
0.46 0.92 0 0.00104618
0.46 1.17 0 0.00104618
0.46 1.24 0 0.00104618
0.46 1.38 0 0.00104618
0.46 1.84 0 0.00104618
0.71 0.71 0 0.00104618
0.71 0.78 0 0.00104618
0.71 0.92 0 0.00104618
0.71 1.17 0 0.00104618
0.71 1.24 0 0.00104618
0.71 1.38 0 0.00104618
0.71 1.84 0 0.00104618
0.78 0.78 0 0.00104618
0.78 0.92 0 0.00104618
0.78 1.17 0 0.00104618
0.78 1.24 0 0.00104618
0.78 1.38 0 0.00104618
0.78 1.84 0 0.00104618
0.92 0.92 0 0.00104618
0.92 1.17 0 0.00104618
0.92 1.24 0 0.00104618
0.92 1.38 0 0.00104618
0.92 1.84 0 0.00104618
1.17 1.17 0 0.00104618
1.17 1.24 0 0.00104618
1.17 1.38 0 0.00104618
1.17 1.84 0 0.00104618
1.24 1.24 0 0.00104618
1.24 1.38 0 0.00104618
1.24 1.84 0 0.00104618
1.38 1.38 0 0.00104618
1.38 1.84 0 0.00104618
1.84 0 1.84 0.00104618
END DIST

Metal 3 RESOVER 1
DIST count 0 width 0.14
END DIST

Metal 3 RESOVER 2
DIST count 0 width 0.14
END DIST

Metal 3 OVER
WIDTH Table 1 entries:  0.14

Metal 3 OVER 0
DIST count 12 width 0.14
0.14 0.0014113 4.79379e-06 0.000523088
0.28 0.000788639 5.90289e-06 0.000523088
0.35 0.000655501 6.45635e-06 0.000523088
0.42 0.000563481 7.00891e-06 0.000523088
0.49 0.000495576 7.56053e-06 0.000523088
0.56 0.000443136 8.11108e-06 0.000523088
0.63 0.000401263 8.66043e-06 0.000523088
0.7 0.000366965 9.20848e-06 0.000523088
0.84 0.000313949 1.03003e-05 0.000523088
1.12 0.000244431 1.2464e-05 0.000523088
1.4 0.00020056 1.45957e-05 0.000523088
1.68 0 0.000186908 0.000523088
END DIST

Metal 3 OVER 1
DIST count 12 width 0.14
0.14 0.0014113 2.38613e-05 0.000523088
0.28 0.000788639 2.6578e-05 0.000523088
0.35 0.000655501 2.79348e-05 0.000523088
0.42 0.000563481 2.92888e-05 0.000523088
0.49 0.000495576 3.06399e-05 0.000523088
0.56 0.000443136 3.19894e-05 0.000523088
0.63 0.000401263 3.33358e-05 0.000523088
0.7 0.000366965 3.46787e-05 0.000523088
0.84 0.000313949 3.73536e-05 0.000523088
1.12 0.000244431 4.26551e-05 0.000523088
1.4 0.00020056 4.78788e-05 0.000523088
1.68 0 0.000223227 0.000523088
END DIST

Metal 3 OVER 2
DIST count 12 width 0.14
0.14 0.0014113 3.77209e-05 0.000523088
0.28 0.000788639 4.05125e-05 0.000523088
0.35 0.000655501 4.19067e-05 0.000523088
0.42 0.000563481 4.32978e-05 0.000523088
0.49 0.000495576 4.46871e-05 0.000523088
0.56 0.000443136 4.60716e-05 0.000523088
0.63 0.000401263 4.74557e-05 0.000523088
0.7 0.000366965 4.88349e-05 0.000523088
0.84 0.000313949 5.15841e-05 0.000523088
1.12 0.000244431 5.70311e-05 0.000523088
1.4 0.00020056 6.23972e-05 0.000523088
1.68 0 0.000237885 0.000523088
END DIST

Metal 3 UNDER
WIDTH Table 1 entries:  0.14

Metal 3 UNDER 4
DIST count 12 width 0.14
0.14 0.0014113 5.0423e-05 0.000523088
0.28 0.000788639 5.41986e-05 0.000523088
0.35 0.000655501 5.60824e-05 0.000523088
0.42 0.000563481 5.79628e-05 0.000523088
0.49 0.000495576 5.98402e-05 0.000523088
0.56 0.000443136 6.17146e-05 0.000523088
0.63 0.000401263 6.35847e-05 0.000523088
0.7 0.000366965 6.54501e-05 0.000523088
0.84 0.000313949 6.91666e-05 0.000523088
1.12 0.000244431 7.65311e-05 0.000523088
1.4 0.00020056 8.37869e-05 0.000523088
1.68 0 0.00026113 0.000523088
END DIST

Metal 3 UNDER 5
DIST count 12 width 0.14
0.14 0.0014113 3.04805e-05 0.000523088
0.28 0.000788639 3.28909e-05 0.000523088
0.35 0.000655501 3.40938e-05 0.000523088
0.42 0.000563481 3.5295e-05 0.000523088
0.49 0.000495576 3.64937e-05 0.000523088
0.56 0.000443136 3.76902e-05 0.000523088
0.63 0.000401263 3.88841e-05 0.000523088
0.7 0.000366965 4.00757e-05 0.000523088
0.84 0.000313949 4.24484e-05 0.000523088
1.12 0.000244431 4.71511e-05 0.000523088
1.4 0.00020056 5.17842e-05 0.000523088
1.68 0 0.000226552 0.000523088
END DIST

Metal 3 UNDER 6
DIST count 12 width 0.14
0.14 0.0014113 9.3438e-06 0.000523088
0.28 0.000788639 1.09201e-05 0.000523088
0.35 0.000655501 1.17066e-05 0.000523088
0.42 0.000563481 1.24919e-05 0.000523088
0.49 0.000495576 1.32758e-05 0.000523088
0.56 0.000443136 1.40582e-05 0.000523088
0.63 0.000401263 1.48389e-05 0.000523088
0.7 0.000366965 1.56177e-05 0.000523088
0.84 0.000313949 1.71695e-05 0.000523088
1.12 0.000244431 2.02442e-05 0.000523088
1.4 0.00020056 2.32738e-05 0.000523088
1.68 0 0.000196467 0.000523088
END DIST

Metal 3 DIAGUNDER
WIDTH Table 1 entries:  0.14

Metal 3 DIAGUNDER 4
DIST count 13 width 0.14
0 0 0.000110188 0.000523088
0.14 0 0 0.000523088
0.28 0 0 0.000523088
0.35 0 0 0.000523088
0.42 0 0 0.000523088
0.49 0 0 0.000523088
0.56 0 0 0.000523088
0.63 0 0 0.000523088
0.7 0 0 0.000523088
0.84 0 0 0.000523088
1.12 0 0 0.000523088
1.4 0 0 0.000523088
1.68 0 0 0.000523088
END DIST

Metal 3 DIAGUNDER 5
DIST count 13 width 0.14
0 0 5.07133e-05 0.000523088
0.14 0 0 0.000523088
0.28 0 0 0.000523088
0.35 0 0 0.000523088
0.42 0 0 0.000523088
0.49 0 0 0.000523088
0.56 0 0 0.000523088
0.63 0 0 0.000523088
0.7 0 0 0.000523088
0.84 0 0 0.000523088
1.12 0 0 0.000523088
1.4 0 0 0.000523088
1.68 0 0 0.000523088
END DIST

Metal 3 DIAGUNDER 6
DIST count 13 width 0.14
0 0 1.74521e-05 0.000523088
0.14 0 0 0.000523088
0.28 0 0 0.000523088
0.35 0 0 0.000523088
0.42 0 0 0.000523088
0.49 0 0 0.000523088
0.56 0 0 0.000523088
0.63 0 0 0.000523088
0.7 0 0 0.000523088
0.84 0 0 0.000523088
1.12 0 0 0.000523088
1.4 0 0 0.000523088
1.68 0 0 0.000523088
END DIST

Metal 3 OVERUNDER
WIDTH Table 1 entries:  0.14

Metal 3 OVER 1 UNDER 4
DIST count 12 width 0.14
0.14 0.0014113 6.94905e-05 0.000523088
0.28 0.000788639 7.48737e-05 0.000523088
0.35 0.000655501 7.75609e-05 0.000523088
0.42 0.000563481 8.02427e-05 0.000523088
0.49 0.000495576 8.29196e-05 0.000523088
0.56 0.000443136 8.55929e-05 0.000523088
0.63 0.000401263 8.826e-05 0.000523088
0.7 0.000366965 9.09203e-05 0.000523088
0.84 0.000313949 9.62199e-05 0.000523088
1.12 0.000244431 0.000106722 0.000523088
1.4 0.00020056 0.00011707 0.000523088
1.68 0 0.000297449 0.000523088
END DIST

Metal 3 OVER 1 UNDER 5
DIST count 12 width 0.14
0.14 0.0014113 4.9548e-05 0.000523088
0.28 0.000788639 5.3566e-05 0.000523088
0.35 0.000655501 5.55723e-05 0.000523088
0.42 0.000563481 5.75749e-05 0.000523088
0.49 0.000495576 5.9573e-05 0.000523088
0.56 0.000443136 6.15685e-05 0.000523088
0.63 0.000401263 6.35595e-05 0.000523088
0.7 0.000366965 6.55459e-05 0.000523088
0.84 0.000313949 6.95018e-05 0.000523088
1.12 0.000244431 7.73421e-05 0.000523088
1.4 0.00020056 8.50673e-05 0.000523088
1.68 0 0.000262871 0.000523088
END DIST

Metal 3 OVER 1 UNDER 6
DIST count 12 width 0.14
0.14 0.0014113 2.84113e-05 0.000523088
0.28 0.000788639 3.15952e-05 0.000523088
0.35 0.000655501 3.3185e-05 0.000523088
0.42 0.000563481 3.47718e-05 0.000523088
0.49 0.000495576 3.63551e-05 0.000523088
0.56 0.000443136 3.79365e-05 0.000523088
0.63 0.000401263 3.95142e-05 0.000523088
0.7 0.000366965 4.10879e-05 0.000523088
0.84 0.000313949 4.42228e-05 0.000523088
1.12 0.000244431 5.04352e-05 0.000523088
1.4 0.00020056 5.65569e-05 0.000523088
1.68 0 0.000232786 0.000523088
END DIST

Metal 3 OVER 2 UNDER 4
DIST count 12 width 0.14
0.14 0.0014113 8.33501e-05 0.000523088
0.28 0.000788639 8.88082e-05 0.000523088
0.35 0.000655501 9.15327e-05 0.000523088
0.42 0.000563481 9.42517e-05 0.000523088
0.49 0.000495576 9.69668e-05 0.000523088
0.56 0.000443136 9.96751e-05 0.000523088
0.63 0.000401263 0.00010238 0.000523088
0.7 0.000366965 0.000105077 0.000523088
0.84 0.000313949 0.00011045 0.000523088
1.12 0.000244431 0.000121098 0.000523088
1.4 0.00020056 0.000131588 0.000523088
1.68 0 0.000312107 0.000523088
END DIST

Metal 3 OVER 2 UNDER 5
DIST count 12 width 0.14
0.14 0.0014113 6.34076e-05 0.000523088
0.28 0.000788639 6.75005e-05 0.000523088
0.35 0.000655501 6.95441e-05 0.000523088
0.42 0.000563481 7.15839e-05 0.000523088
0.49 0.000495576 7.36202e-05 0.000523088
0.56 0.000443136 7.56506e-05 0.000523088
0.63 0.000401263 7.76794e-05 0.000523088
0.7 0.000366965 7.97022e-05 0.000523088
0.84 0.000313949 8.37322e-05 0.000523088
1.12 0.000244431 9.17182e-05 0.000523088
1.4 0.00020056 9.95857e-05 0.000523088
1.68 0 0.000277529 0.000523088
END DIST

Metal 3 OVER 2 UNDER 6
DIST count 12 width 0.14
0.14 0.0014113 4.22709e-05 0.000523088
0.28 0.000788639 4.55297e-05 0.000523088
0.35 0.000655501 4.71569e-05 0.000523088
0.42 0.000563481 4.87808e-05 0.000523088
0.49 0.000495576 5.04023e-05 0.000523088
0.56 0.000443136 5.20187e-05 0.000523088
0.63 0.000401263 5.36342e-05 0.000523088
0.7 0.000366965 5.52442e-05 0.000523088
0.84 0.000313949 5.84533e-05 0.000523088
1.12 0.000244431 6.48113e-05 0.000523088
1.4 0.00020056 7.10753e-05 0.000523088
1.68 0 0.000247444 0.000523088
END DIST

Metal 4 RESOVER
WIDTH Table 1 entries:  0.3

Metal 4 RESOVER 0
DIST count 55 width 0.3
0 0 0 0.000188552
0 0.38 0 0.000188552
0 0.68 0 0.000188552
0 0.91 0 0.000188552
0 1.06 0 0.000188552
0 1.36 0 0.000188552
0 1.59 0 0.000188552
0 1.74 0 0.000188552
0 2.04 0 0.000188552
0 2.72 0 0.000188552
0.38 0.38 0 0.000188552
0.38 0.68 0 0.000188552
0.38 0.91 0 0.000188552
0.38 1.06 0 0.000188552
0.38 1.36 0 0.000188552
0.38 1.59 0 0.000188552
0.38 1.74 0 0.000188552
0.38 2.04 0 0.000188552
0.38 2.72 0 0.000188552
0.68 0.68 0 0.000188552
0.68 0.91 0 0.000188552
0.68 1.06 0 0.000188552
0.68 1.36 0 0.000188552
0.68 1.59 0 0.000188552
0.68 1.74 0 0.000188552
0.68 2.04 0 0.000188552
0.68 2.72 0 0.000188552
0.91 0.91 0 0.000188552
0.91 1.06 0 0.000188552
0.91 1.36 0 0.000188552
0.91 1.59 0 0.000188552
0.91 1.74 0 0.000188552
0.91 2.04 0 0.000188552
0.91 2.72 0 0.000188552
1.06 1.06 0 0.000188552
1.06 1.36 0 0.000188552
1.06 1.59 0 0.000188552
1.06 1.74 0 0.000188552
1.06 2.04 0 0.000188552
1.06 2.72 0 0.000188552
1.36 1.36 0 0.000188552
1.36 1.59 0 0.000188552
1.36 1.74 0 0.000188552
1.36 2.04 0 0.000188552
1.36 2.72 0 0.000188552
1.59 1.59 0 0.000188552
1.59 1.74 0 0.000188552
1.59 2.04 0 0.000188552
1.59 2.72 0 0.000188552
1.74 1.74 0 0.000188552
1.74 2.04 0 0.000188552
1.74 2.72 0 0.000188552
2.04 2.04 0 0.000188552
2.04 2.72 0 0.000188552
2.72 0 2.72 0.000188552
END DIST

Metal 4 RESOVER 1
DIST count 0 width 0.3
END DIST

Metal 4 RESOVER 2
DIST count 0 width 0.3
END DIST

Metal 4 RESOVER 3
DIST count 0 width 0.3
END DIST

Metal 4 OVER
WIDTH Table 1 entries:  0.3

Metal 4 OVER 0
DIST count 12 width 0.3
0.3 0.00102731 8.07955e-06 9.42761e-05
0.6 0.000577609 1.05928e-05 9.42761e-05
0.75 0.00047962 1.18397e-05 9.42761e-05
0.9 0.000411519 1.30787e-05 9.42761e-05
1.05 0.000361116 1.43085e-05 9.42761e-05
1.2 0.000322143 1.55283e-05 9.42761e-05
1.35 0.000291022 1.67369e-05 9.42761e-05
1.5 0.000265545 1.79333e-05 9.42761e-05
1.8 0.000226234 2.02854e-05 9.42761e-05
2.4 0.000174927 2.47981e-05 9.42761e-05
3 0.000142773 2.9004e-05 9.42761e-05
3.6 0 0.00015352 9.42761e-05
END DIST

Metal 4 OVER 1
DIST count 12 width 0.3
0.3 0.00102731 4.19436e-05 9.42761e-05
0.6 0.000577609 4.82284e-05 9.42761e-05
0.75 0.00047962 5.13465e-05 9.42761e-05
0.9 0.000411519 5.44455e-05 9.42761e-05
1.05 0.000361116 5.75221e-05 9.42761e-05
1.2 0.000322143 6.05707e-05 9.42761e-05
1.35 0.000291022 6.35947e-05 9.42761e-05
1.5 0.000265545 6.65864e-05 9.42761e-05
1.8 0.000226234 7.24687e-05 9.42761e-05
2.4 0.000174927 8.37564e-05 9.42761e-05
3 0.000142773 9.42749e-05 9.42761e-05
3.6 0 0.000224554 9.42761e-05
END DIST

Metal 4 OVER 2
DIST count 12 width 0.3
0.3 0.00102731 6.69508e-05 9.42761e-05
0.6 0.000577609 7.3597e-05 9.42761e-05
0.75 0.00047962 7.68937e-05 9.42761e-05
0.9 0.000411519 8.01686e-05 9.42761e-05
1.05 0.000361116 8.34206e-05 9.42761e-05
1.2 0.000322143 8.6646e-05 9.42761e-05
1.35 0.000291022 8.98407e-05 9.42761e-05
1.5 0.000265545 9.30068e-05 9.42761e-05
1.8 0.000226234 9.92261e-05 9.42761e-05
2.4 0.000174927 0.000111158 9.42761e-05
3 0.000142773 0.00012228 9.42761e-05
3.6 0 0.000253111 9.42761e-05
END DIST

Metal 4 OVER 3
DIST count 12 width 0.3
0.3 0.00102731 0.000138311 9.42761e-05
0.6 0.000577609 0.000148514 9.42761e-05
0.75 0.00047962 0.000153575 9.42761e-05
0.9 0.000411519 0.000158606 9.42761e-05
1.05 0.000361116 0.000163597 9.42761e-05
1.2 0.000322143 0.00016855 9.42761e-05
1.35 0.000291022 0.000173455 9.42761e-05
1.5 0.000265545 0.000178313 9.42761e-05
1.8 0.000226234 0.000187859 9.42761e-05
2.4 0.000174927 0.000206179 9.42761e-05
3 0.000142773 0.000223253 9.42761e-05
3.6 0 0.000359518 9.42761e-05
END DIST

Metal 4 UNDER
WIDTH Table 1 entries:  0.3

Metal 4 UNDER 5
DIST count 12 width 0.3
0.3 0.00102731 0.000115495 9.42761e-05
0.6 0.000577609 0.000123776 9.42761e-05
0.75 0.00047962 0.000127885 9.42761e-05
0.9 0.000411519 0.000131967 9.42761e-05
1.05 0.000361116 0.00013602 9.42761e-05
1.2 0.000322143 0.000140038 9.42761e-05
1.35 0.000291022 0.000144021 9.42761e-05
1.5 0.000265545 0.000147964 9.42761e-05
1.8 0.000226234 0.000155713 9.42761e-05
2.4 0.000174927 0.000170583 9.42761e-05
3 0.000142773 0.000184442 9.42761e-05
3.6 0 0.000317772 9.42761e-05
END DIST

Metal 4 UNDER 6
DIST count 12 width 0.3
0.3 0.00102731 2.07684e-05 9.42761e-05
0.6 0.000577609 2.49494e-05 9.42761e-05
0.75 0.00047962 2.70236e-05 9.42761e-05
0.9 0.000411519 2.90846e-05 9.42761e-05
1.05 0.000361116 3.11308e-05 9.42761e-05
1.2 0.000322143 3.31598e-05 9.42761e-05
1.35 0.000291022 3.51705e-05 9.42761e-05
1.5 0.000265545 3.71609e-05 9.42761e-05
1.8 0.000226234 4.10736e-05 9.42761e-05
2.4 0.000174927 4.85808e-05 9.42761e-05
3 0.000142773 5.55777e-05 9.42761e-05
3.6 0 0.000182642 9.42761e-05
END DIST

Metal 4 DIAGUNDER
WIDTH Table 1 entries:  0.3

Metal 4 DIAGUNDER 5
DIST count 13 width 0.3
0 0 2.54636e-05 9.42761e-05
0.3 0 0 9.42761e-05
0.6 0 0 9.42761e-05
0.75 0 0 9.42761e-05
0.9 0 0 9.42761e-05
1.05 0 0 9.42761e-05
1.2 0 0 9.42761e-05
1.35 0 0 9.42761e-05
1.5 0 0 9.42761e-05
1.8 0 0 9.42761e-05
2.4 0 0 9.42761e-05
3 0 0 9.42761e-05
3.6 0 0 9.42761e-05
END DIST

Metal 4 DIAGUNDER 6
DIST count 13 width 0.3
0 0 3.40697e-05 9.42761e-05
0.3 0 0 9.42761e-05
0.6 0 0 9.42761e-05
0.75 0 0 9.42761e-05
0.9 0 0 9.42761e-05
1.05 0 0 9.42761e-05
1.2 0 0 9.42761e-05
1.35 0 0 9.42761e-05
1.5 0 0 9.42761e-05
1.8 0 0 9.42761e-05
2.4 0 0 9.42761e-05
3 0 0 9.42761e-05
3.6 0 0 9.42761e-05
END DIST

Metal 4 OVERUNDER
WIDTH Table 1 entries:  0.3

Metal 4 OVER 1 UNDER 5
DIST count 12 width 0.3
0.3 0.00102731 0.000149359 9.42761e-05
0.6 0.000577609 0.000161412 9.42761e-05
0.75 0.00047962 0.000167392 9.42761e-05
0.9 0.000411519 0.000173334 9.42761e-05
1.05 0.000361116 0.000179234 9.42761e-05
1.2 0.000322143 0.000185081 9.42761e-05
1.35 0.000291022 0.000190879 9.42761e-05
1.5 0.000265545 0.000196617 9.42761e-05
1.8 0.000226234 0.000207896 9.42761e-05
2.4 0.000174927 0.000229541 9.42761e-05
3 0.000142773 0.000249712 9.42761e-05
3.6 0 0.000388806 9.42761e-05
END DIST

Metal 4 OVER 1 UNDER 6
DIST count 12 width 0.3
0.3 0.00102731 5.46324e-05 9.42761e-05
0.6 0.000577609 6.2585e-05 9.42761e-05
0.75 0.00047962 6.65304e-05 9.42761e-05
0.9 0.000411519 7.04515e-05 9.42761e-05
1.05 0.000361116 7.43443e-05 9.42761e-05
1.2 0.000322143 7.82021e-05 9.42761e-05
1.35 0.000291022 8.20283e-05 9.42761e-05
1.5 0.000265545 8.5814e-05 9.42761e-05
1.8 0.000226234 9.3257e-05 9.42761e-05
2.4 0.000174927 0.000107539 9.42761e-05
3 0.000142773 0.000120849 9.42761e-05
3.6 0 0.000253676 9.42761e-05
END DIST

Metal 4 OVER 2 UNDER 5
DIST count 12 width 0.3
0.3 0.00102731 0.000174367 9.42761e-05
0.6 0.000577609 0.000186781 9.42761e-05
0.75 0.00047962 0.000192939 9.42761e-05
0.9 0.000411519 0.000199057 9.42761e-05
1.05 0.000361116 0.000205132 9.42761e-05
1.2 0.000322143 0.000211156 9.42761e-05
1.35 0.000291022 0.000217125 9.42761e-05
1.5 0.000265545 0.000223037 9.42761e-05
1.8 0.000226234 0.000234654 9.42761e-05
2.4 0.000174927 0.000256943 9.42761e-05
3 0.000142773 0.000277717 9.42761e-05
3.6 0 0.000417363 9.42761e-05
END DIST

Metal 4 OVER 2 UNDER 6
DIST count 12 width 0.3
0.3 0.00102731 7.96397e-05 9.42761e-05
0.6 0.000577609 8.79536e-05 9.42761e-05
0.75 0.00047962 9.20775e-05 9.42761e-05
0.9 0.000411519 9.61746e-05 9.42761e-05
1.05 0.000361116 0.000100243 9.42761e-05
1.2 0.000322143 0.000104277 9.42761e-05
1.35 0.000291022 0.000108274 9.42761e-05
1.5 0.000265545 0.000112234 9.42761e-05
1.8 0.000226234 0.000120014 9.42761e-05
2.4 0.000174927 0.000134941 9.42761e-05
3 0.000142773 0.000148853 9.42761e-05
3.6 0 0.000282233 9.42761e-05
END DIST

Metal 4 OVER 3 UNDER 5
DIST count 12 width 0.3
0.3 0.00102731 0.000245727 9.42761e-05
0.6 0.000577609 0.000261697 9.42761e-05
0.75 0.00047962 0.00026962 9.42761e-05
0.9 0.000411519 0.000277495 9.42761e-05
1.05 0.000361116 0.000285309 9.42761e-05
1.2 0.000322143 0.00029306 9.42761e-05
1.35 0.000291022 0.000300739 9.42761e-05
1.5 0.000265545 0.000308343 9.42761e-05
1.8 0.000226234 0.000323287 9.42761e-05
2.4 0.000174927 0.000351964 9.42761e-05
3 0.000142773 0.000378691 9.42761e-05
3.6 0 0.00052377 9.42761e-05
END DIST

Metal 4 OVER 3 UNDER 6
DIST count 12 width 0.3
0.3 0.00102731 0.000151 9.42761e-05
0.6 0.000577609 0.000162871 9.42761e-05
0.75 0.00047962 0.000168759 9.42761e-05
0.9 0.000411519 0.000174612 9.42761e-05
1.05 0.000361116 0.000180419 9.42761e-05
1.2 0.000322143 0.000186181 9.42761e-05
1.35 0.000291022 0.000191888 9.42761e-05
1.5 0.000265545 0.000197541 9.42761e-05
1.8 0.000226234 0.000208647 9.42761e-05
2.4 0.000174927 0.000229962 9.42761e-05
3 0.000142773 0.000249827 9.42761e-05
3.6 0 0.00038864 9.42761e-05
END DIST

Metal 5 RESOVER
WIDTH Table 1 entries:  0.3

Metal 5 RESOVER 0
DIST count 55 width 0.3
0 0 0 0.000188552
0 0.62 0 0.000188552
0 0.92 0 0.000188552
0 1.39 0 0.000188552
0 1.54 0 0.000188552
0 1.84 0 0.000188552
0 2.31 0 0.000188552
0 2.46 0 0.000188552
0 2.76 0 0.000188552
0 3.68 0 0.000188552
0.62 0.62 0 0.000188552
0.62 0.92 0 0.000188552
0.62 1.39 0 0.000188552
0.62 1.54 0 0.000188552
0.62 1.84 0 0.000188552
0.62 2.31 0 0.000188552
0.62 2.46 0 0.000188552
0.62 2.76 0 0.000188552
0.62 3.68 0 0.000188552
0.92 0.92 0 0.000188552
0.92 1.39 0 0.000188552
0.92 1.54 0 0.000188552
0.92 1.84 0 0.000188552
0.92 2.31 0 0.000188552
0.92 2.46 0 0.000188552
0.92 2.76 0 0.000188552
0.92 3.68 0 0.000188552
1.39 1.39 0 0.000188552
1.39 1.54 0 0.000188552
1.39 1.84 0 0.000188552
1.39 2.31 0 0.000188552
1.39 2.46 0 0.000188552
1.39 2.76 0 0.000188552
1.39 3.68 0 0.000188552
1.54 1.54 0 0.000188552
1.54 1.84 0 0.000188552
1.54 2.31 0 0.000188552
1.54 2.46 0 0.000188552
1.54 2.76 0 0.000188552
1.54 3.68 0 0.000188552
1.84 1.84 0 0.000188552
1.84 2.31 0 0.000188552
1.84 2.46 0 0.000188552
1.84 2.76 0 0.000188552
1.84 3.68 0 0.000188552
2.31 2.31 0 0.000188552
2.31 2.46 0 0.000188552
2.31 2.76 0 0.000188552
2.31 3.68 0 0.000188552
2.46 2.46 0 0.000188552
2.46 2.76 0 0.000188552
2.46 3.68 0 0.000188552
2.76 2.76 0 0.000188552
2.76 3.68 0 0.000188552
3.68 0 3.68 0.000188552
END DIST

Metal 5 RESOVER 1
DIST count 0 width 0.3
END DIST

Metal 5 RESOVER 2
DIST count 0 width 0.3
END DIST

Metal 5 RESOVER 3
DIST count 0 width 0.3
END DIST

Metal 5 RESOVER 4
DIST count 0 width 0.3
END DIST

Metal 5 OVER
WIDTH Table 1 entries:  0.3

Metal 5 OVER 0
DIST count 12 width 0.3
0.3 0.00104371 7.81645e-06 9.42761e-05
0.6 0.000584193 1.01192e-05 9.42761e-05
0.75 0.000485571 1.12604e-05 9.42761e-05
0.9 0.000417321 1.23935e-05 9.42761e-05
1.05 0.000366917 1.35175e-05 9.42761e-05
1.2 0.000327972 1.46314e-05 9.42761e-05
1.35 0.000296868 1.57343e-05 9.42761e-05
1.5 0.000271391 1.68252e-05 9.42761e-05
1.8 0.000232013 1.89672e-05 9.42761e-05
2.4 0.000180411 2.30665e-05 9.42761e-05
3 0.000147882 2.68724e-05 9.42761e-05
3.6 0 0.000155742 9.42761e-05
END DIST

Metal 5 OVER 1
DIST count 12 width 0.3
0.3 0.00104371 3.40114e-05 9.42761e-05
0.6 0.000584193 3.96546e-05 9.42761e-05
0.75 0.000485571 4.24495e-05 9.42761e-05
0.9 0.000417321 4.52275e-05 9.42761e-05
1.05 0.000366917 4.79809e-05 9.42761e-05
1.2 0.000327972 5.07111e-05 9.42761e-05
1.35 0.000296868 5.34147e-05 9.42761e-05
1.5 0.000271391 5.60865e-05 9.42761e-05
1.8 0.000232013 6.13377e-05 9.42761e-05
2.4 0.000180411 7.13813e-05 9.42761e-05
3 0.000147882 8.07084e-05 9.42761e-05
3.6 0 0.000214596 9.42761e-05
END DIST

Metal 5 OVER 2
DIST count 12 width 0.3
0.3 0.00104371 5.13662e-05 9.42761e-05
0.6 0.000584193 5.72045e-05 9.42761e-05
0.75 0.000485571 6.00971e-05 9.42761e-05
0.9 0.000417321 6.29681e-05 9.42761e-05
1.05 0.000366917 6.5819e-05 9.42761e-05
1.2 0.000327972 6.86408e-05 9.42761e-05
1.35 0.000296868 7.14379e-05 9.42761e-05
1.5 0.000271391 7.4204e-05 9.42761e-05
1.8 0.000232013 7.96336e-05 9.42761e-05
2.4 0.000180411 9.0025e-05 9.42761e-05
3 0.000147882 9.96736e-05 9.42761e-05
3.6 0 0.000233852 9.42761e-05
END DIST

Metal 5 OVER 3
DIST count 12 width 0.3
0.3 0.00104371 7.24544e-05 9.42761e-05
0.6 0.000584193 7.93478e-05 9.42761e-05
0.75 0.000485571 8.2764e-05 9.42761e-05
0.9 0.000417321 8.61549e-05 9.42761e-05
1.05 0.000366917 8.95194e-05 9.42761e-05
1.2 0.000327972 9.28537e-05 9.42761e-05
1.35 0.000296868 9.61537e-05 9.42761e-05
1.5 0.000271391 9.94213e-05 9.42761e-05
1.8 0.000232013 0.000105833 9.42761e-05
2.4 0.000180411 0.000118103 9.42761e-05
3 0.000147882 0.000129497 9.42761e-05
3.6 0 0.000265261 9.42761e-05
END DIST

Metal 5 OVER 4
DIST count 12 width 0.3
0.3 0.00104371 8.97048e-05 9.42761e-05
0.6 0.000584193 0.000100341 9.42761e-05
0.75 0.000485571 0.00010561 9.42761e-05
0.9 0.000417321 0.000110844 9.42761e-05
1.05 0.000366917 0.000116035 9.42761e-05
1.2 0.000327972 0.00012118 9.42761e-05
1.35 0.000296868 0.000126273 9.42761e-05
1.5 0.000271391 0.000131312 9.42761e-05
1.8 0.000232013 0.000141204 9.42761e-05
2.4 0.000180411 0.000160136 9.42761e-05
3 0.000147882 0.000177714 9.42761e-05
3.6 0 0.000319103 9.42761e-05
END DIST

Metal 5 UNDER
WIDTH Table 1 entries:  0.3

Metal 5 UNDER 6
DIST count 12 width 0.3
0.3 0.00104371 3.46009e-05 9.42761e-05
0.6 0.000584193 3.96577e-05 9.42761e-05
0.75 0.000485571 4.21638e-05 9.42761e-05
0.9 0.000417321 4.46523e-05 9.42761e-05
1.05 0.000366917 4.71205e-05 9.42761e-05
1.2 0.000327972 4.95666e-05 9.42761e-05
1.35 0.000296868 5.19887e-05 9.42761e-05
1.5 0.000271391 5.43842e-05 9.42761e-05
1.8 0.000232013 5.9088e-05 9.42761e-05
2.4 0.000180411 6.80903e-05 9.42761e-05
3 0.000147882 7.64478e-05 9.42761e-05
3.6 0 0.000209455 9.42761e-05
END DIST

Metal 5 DIAGUNDER
WIDTH Table 1 entries:  0.3

Metal 5 DIAGUNDER 6
DIST count 13 width 0.3
0 0 6.81606e-05 9.42761e-05
0.3 0 0 9.42761e-05
0.6 0 0 9.42761e-05
0.75 0 0 9.42761e-05
0.9 0 0 9.42761e-05
1.05 0 0 9.42761e-05
1.2 0 0 9.42761e-05
1.35 0 0 9.42761e-05
1.5 0 0 9.42761e-05
1.8 0 0 9.42761e-05
2.4 0 0 9.42761e-05
3 0 0 9.42761e-05
3.6 0 0 9.42761e-05
END DIST

Metal 5 OVERUNDER
WIDTH Table 1 entries:  0.3

Metal 5 OVER 1 UNDER 6
DIST count 12 width 0.3
0.3 0.00104371 6.07958e-05 9.42761e-05
0.6 0.000584193 6.91932e-05 9.42761e-05
0.75 0.000485571 7.33529e-05 9.42761e-05
0.9 0.000417321 7.74863e-05 9.42761e-05
1.05 0.000366917 8.15839e-05 9.42761e-05
1.2 0.000327972 8.56463e-05 9.42761e-05
1.35 0.000296868 8.96691e-05 9.42761e-05
1.5 0.000271391 9.36455e-05 9.42761e-05
1.8 0.000232013 0.000101459 9.42761e-05
2.4 0.000180411 0.000116405 9.42761e-05
3 0.000147882 0.000130284 9.42761e-05
3.6 0 0.00026831 9.42761e-05
END DIST

Metal 5 OVER 2 UNDER 6
DIST count 12 width 0.3
0.3 0.00104371 7.81506e-05 9.42761e-05
0.6 0.000584193 8.6743e-05 9.42761e-05
0.75 0.000485571 9.10005e-05 9.42761e-05
0.9 0.000417321 9.52268e-05 9.42761e-05
1.05 0.000366917 9.9422e-05 9.42761e-05
1.2 0.000327972 0.000103576 9.42761e-05
1.35 0.000296868 0.000107692 9.42761e-05
1.5 0.000271391 0.000111763 9.42761e-05
1.8 0.000232013 0.000119755 9.42761e-05
2.4 0.000180411 0.000135049 9.42761e-05
3 0.000147882 0.000149249 9.42761e-05
3.6 0 0.000287565 9.42761e-05
END DIST

Metal 5 OVER 3 UNDER 6
DIST count 12 width 0.3
0.3 0.00104371 9.92388e-05 9.42761e-05
0.6 0.000584193 0.000108886 9.42761e-05
0.75 0.000485571 0.000113667 9.42761e-05
0.9 0.000417321 0.000118414 9.42761e-05
1.05 0.000366917 0.000123122 9.42761e-05
1.2 0.000327972 0.000127789 9.42761e-05
1.35 0.000296868 0.000132408 9.42761e-05
1.5 0.000271391 0.00013698 9.42761e-05
1.8 0.000232013 0.000145954 9.42761e-05
2.4 0.000180411 0.000163127 9.42761e-05
3 0.000147882 0.000179072 9.42761e-05
3.6 0 0.000318974 9.42761e-05
END DIST

Metal 5 OVER 4 UNDER 6
DIST count 12 width 0.3
0.3 0.00104371 0.000116489 9.42761e-05
0.6 0.000584193 0.000129879 9.42761e-05
0.75 0.000485571 0.000136514 9.42761e-05
0.9 0.000417321 0.000143102 9.42761e-05
1.05 0.000366917 0.000149638 9.42761e-05
1.2 0.000327972 0.000156115 9.42761e-05
1.35 0.000296868 0.000162528 9.42761e-05
1.5 0.000271391 0.000168871 9.42761e-05
1.8 0.000232013 0.000181325 9.42761e-05
2.4 0.000180411 0.00020516 9.42761e-05
3 0.000147882 0.00022729 9.42761e-05
3.6 0 0.000372816 9.42761e-05
END DIST

Metal 6 RESOVER
WIDTH Table 1 entries:  1.6

Metal 6 RESOVER 0
DIST count 55 width 1.6
0 0 0 2.27273e-05
0 1.8 0 2.27273e-05
0 3.4 0 2.27273e-05
0 4.4 0 2.27273e-05
0 5.2 0 2.27273e-05
0 6.8 0 2.27273e-05
0 7.8 0 2.27273e-05
0 8.6 0 2.27273e-05
0 10.2 0 2.27273e-05
0 13.6 0 2.27273e-05
1.8 1.8 0 2.27273e-05
1.8 3.4 0 2.27273e-05
1.8 4.4 0 2.27273e-05
1.8 5.2 0 2.27273e-05
1.8 6.8 0 2.27273e-05
1.8 7.8 0 2.27273e-05
1.8 8.6 0 2.27273e-05
1.8 10.2 0 2.27273e-05
1.8 13.6 0 2.27273e-05
3.4 3.4 0 2.27273e-05
3.4 4.4 0 2.27273e-05
3.4 5.2 0 2.27273e-05
3.4 6.8 0 2.27273e-05
3.4 7.8 0 2.27273e-05
3.4 8.6 0 2.27273e-05
3.4 10.2 0 2.27273e-05
3.4 13.6 0 2.27273e-05
4.4 4.4 0 2.27273e-05
4.4 5.2 0 2.27273e-05
4.4 6.8 0 2.27273e-05
4.4 7.8 0 2.27273e-05
4.4 8.6 0 2.27273e-05
4.4 10.2 0 2.27273e-05
4.4 13.6 0 2.27273e-05
5.2 5.2 0 2.27273e-05
5.2 6.8 0 2.27273e-05
5.2 7.8 0 2.27273e-05
5.2 8.6 0 2.27273e-05
5.2 10.2 0 2.27273e-05
5.2 13.6 0 2.27273e-05
6.8 6.8 0 2.27273e-05
6.8 7.8 0 2.27273e-05
6.8 8.6 0 2.27273e-05
6.8 10.2 0 2.27273e-05
6.8 13.6 0 2.27273e-05
7.8 7.8 0 2.27273e-05
7.8 8.6 0 2.27273e-05
7.8 10.2 0 2.27273e-05
7.8 13.6 0 2.27273e-05
8.6 8.6 0 2.27273e-05
8.6 10.2 0 2.27273e-05
8.6 13.6 0 2.27273e-05
10.2 10.2 0 2.27273e-05
10.2 13.6 0 2.27273e-05
13.6 0 13.6 2.27273e-05
END DIST

Metal 6 RESOVER 1
DIST count 0 width 1.6
END DIST

Metal 6 RESOVER 2
DIST count 0 width 1.6
END DIST

Metal 6 RESOVER 3
DIST count 0 width 1.6
END DIST

Metal 6 RESOVER 4
DIST count 0 width 1.6
END DIST

Metal 6 RESOVER 5
DIST count 0 width 1.6
END DIST

Metal 6 OVER
WIDTH Table 1 entries:  1.6

Metal 6 OVER 0
DIST count 12 width 1.6
1.6 0.000356333 3.09062e-05 1.13636e-05
3.2 0.000200417 3.97181e-05 1.13636e-05
4 0.000166347 4.29419e-05 1.13636e-05
4.8 8.99832e-05 4.11765e-05 1.13636e-05
5.6 7.71284e-05 4.47027e-05 1.13636e-05
6.4 6.74874e-05 4.72847e-05 1.13636e-05
7.2 5.99888e-05 4.88595e-05 1.13636e-05
8 0 4.93876e-05 1.13636e-05
9.6 0 4.93876e-05 1.13636e-05
12.8 0 4.93876e-05 1.13636e-05
16 0 4.93876e-05 1.13636e-05
19.2 0 4.93876e-05 1.13636e-05
END DIST

Metal 6 OVER 1
DIST count 12 width 1.6
1.6 0.000356333 0.000144393 1.13636e-05
3.2 0.000200417 0.000165907 1.13636e-05
4 0.000166347 0.000173777 1.13636e-05
4.8 8.99832e-05 0.000169466 1.13636e-05
5.6 7.71284e-05 0.000178076 1.13636e-05
6.4 6.74874e-05 0.000184379 1.13636e-05
7.2 5.99888e-05 0.000188225 1.13636e-05
8 0 0.000189515 1.13636e-05
9.6 0 0.000189515 1.13636e-05
12.8 0 0.000189515 1.13636e-05
16 0 0.000189515 1.13636e-05
19.2 0 0.000189515 1.13636e-05
END DIST

Metal 6 OVER 2
DIST count 12 width 1.6
1.6 0.000356333 0.000213736 1.13636e-05
3.2 0.000200417 0.000235879 1.13636e-05
4 0.000166347 0.00024398 1.13636e-05
4.8 8.99832e-05 0.000239546 1.13636e-05
5.6 7.71284e-05 0.000248404 1.13636e-05
6.4 6.74874e-05 0.000254896 1.13636e-05
7.2 5.99888e-05 0.000258852 1.13636e-05
8 0 0.00026018 1.13636e-05
9.6 0 0.00026018 1.13636e-05
12.8 0 0.00026018 1.13636e-05
16 0 0.00026018 1.13636e-05
19.2 0 0.00026018 1.13636e-05
END DIST

Metal 6 OVER 3
DIST count 12 width 1.6
1.6 0.000356333 0.000144077 1.13636e-05
3.2 0.000200417 0.000157919 1.13636e-05
4 0.000166347 0.000162984 1.13636e-05
4.8 8.99832e-05 0.000160211 1.13636e-05
5.6 7.71284e-05 0.000165752 1.13636e-05
6.4 6.74874e-05 0.000169807 1.13636e-05
7.2 5.99888e-05 0.00017228 1.13636e-05
8 0 0.00017311 1.13636e-05
9.6 0 0.00017311 1.13636e-05
12.8 0 0.00017311 1.13636e-05
16 0 0.00017311 1.13636e-05
19.2 0 0.00017311 1.13636e-05
END DIST

Metal 6 OVER 4
DIST count 12 width 1.6
1.6 0.000356333 0.000141683 1.13636e-05
3.2 0.000200417 0.000157296 1.13636e-05
4 0.000166347 0.000163008 1.13636e-05
4.8 8.99832e-05 0.000159881 1.13636e-05
5.6 7.71284e-05 0.000166127 1.13636e-05
6.4 6.74874e-05 0.000170703 1.13636e-05
7.2 5.99888e-05 0.000173492 1.13636e-05
8 0 0.000174428 1.13636e-05
9.6 0 0.000174428 1.13636e-05
12.8 0 0.000174428 1.13636e-05
16 0 0.000174428 1.13636e-05
19.2 0 0.000174428 1.13636e-05
END DIST

Metal 6 OVER 5
DIST count 12 width 1.6
1.6 0.000356333 0.0002519 1.13636e-05
3.2 0.000200417 0.000273445 1.13636e-05
4 0.000166347 0.000281328 1.13636e-05
4.8 8.99832e-05 0.000277011 1.13636e-05
5.6 7.71284e-05 0.000285633 1.13636e-05
6.4 6.74874e-05 0.000291946 1.13636e-05
7.2 5.99888e-05 0.000295796 1.13636e-05
8 0 0.000297088 1.13636e-05
9.6 0 0.000297088 1.13636e-05
12.8 0 0.000297088 1.13636e-05
16 0 0.000297088 1.13636e-05
19.2 0 0.000297088 1.13636e-05
END DIST

Metal 6 UNDER
WIDTH Table 0 entries: 

Metal 6 DIAGUNDER
WIDTH Table 0 entries: 
END DensityModel 0