sky130/openlane/rules.openrcx.sky130A.max.magic

Extraction Rules for OpenRCX

DIAGMODEL ON

LayerCount 6
DensityRate 1  0

DensityModel 0

Metal 1 RESOVER
WIDTH Table 1 entries:  0.17

Metal 1 RESOVER 0
DIST count 55 width 0.17
0 0 0 0.10101
0 0.29 0 0.10101
0 0.46 0 0.10101
0 0.665 0 0.10101
0 0.75 0 0.10101
0 0.92 0 0.10101
0 1.125 0 0.10101
0 1.21 0 0.10101
0 1.38 0 0.10101
0 1.84 0 0.10101
0.29 0.29 0 0.10101
0.29 0.46 0 0.10101
0.29 0.665 0 0.10101
0.29 0.75 0 0.10101
0.29 0.92 0 0.10101
0.29 1.125 0 0.10101
0.29 1.21 0 0.10101
0.29 1.38 0 0.10101
0.29 1.84 0 0.10101
0.46 0.46 0 0.10101
0.46 0.665 0 0.10101
0.46 0.75 0 0.10101
0.46 0.92 0 0.10101
0.46 1.125 0 0.10101
0.46 1.21 0 0.10101
0.46 1.38 0 0.10101
0.46 1.84 0 0.10101
0.665 0.665 0 0.10101
0.665 0.75 0 0.10101
0.665 0.92 0 0.10101
0.665 1.125 0 0.10101
0.665 1.21 0 0.10101
0.665 1.38 0 0.10101
0.665 1.84 0 0.10101
0.75 0.75 0 0.10101
0.75 0.92 0 0.10101
0.75 1.125 0 0.10101
0.75 1.21 0 0.10101
0.75 1.38 0 0.10101
0.75 1.84 0 0.10101
0.92 0.92 0 0.10101
0.92 1.125 0 0.10101
0.92 1.21 0 0.10101
0.92 1.38 0 0.10101
0.92 1.84 0 0.10101
1.125 1.125 0 0.10101
1.125 1.21 0 0.10101
1.125 1.38 0 0.10101
1.125 1.84 0 0.10101
1.21 1.21 0 0.10101
1.21 1.38 0 0.10101
1.21 1.84 0 0.10101
1.38 1.38 0 0.10101
1.38 1.84 0 0.10101
1.84 0 1.84 0.10101
END DIST

Metal 1 OVER
WIDTH Table 1 entries:  0.17

Metal 1 OVER 0
DIST count 12 width 0.17
0.17 0.000855615 8.46521e-06 0.0505051
0.34 0.000480081 1.00419e-05 0.0505051
0.425 0.000398948 1.08281e-05 0.0505051
0.51 0.000342687 1.16127e-05 0.0505051
0.595 0.000301087 1.23953e-05 0.0505051
0.68 0.000268928 1.31758e-05 0.0505051
0.765 0.000243239 1.3954e-05 0.0505051
0.85 0.000222199 1.47296e-05 0.0505051
1.02 0.000189695 1.62721e-05 0.0505051
1.36 0.000147162 1.93171e-05 0.0505051
1.7 0.00012041 2.22971e-05 0.0505051
2.04 0 0.000127167 0.0505051
END DIST

Metal 1 UNDER
WIDTH Table 1 entries:  0.17

Metal 1 UNDER 2
DIST count 12 width 0.17
0.17 0.000855615 0.000100629 0.0505051
0.34 0.000480081 0.000104937 0.0505051
0.425 0.000398948 0.000107084 0.0505051
0.51 0.000342687 0.000109228 0.0505051
0.595 0.000301087 0.000111366 0.0505051
0.68 0.000268928 0.000113497 0.0505051
0.765 0.000243239 0.000115624 0.0505051
0.85 0.000222199 0.000117742 0.0505051
1.02 0.000189695 0.000121957 0.0505051
1.36 0.000147162 0.000130276 0.0505051
1.7 0.00012041 0.000138415 0.0505051
2.04 0 0.00024831 0.0505051
END DIST

Metal 1 UNDER 3
DIST count 12 width 0.17
0.17 0.000855615 7.07326e-05 0.0505051
0.34 0.000480081 7.39122e-05 0.0505051
0.425 0.000398948 7.54988e-05 0.0505051
0.51 0.000342687 7.70811e-05 0.0505051
0.595 0.000301087 7.86606e-05 0.0505051
0.68 0.000268928 8.02349e-05 0.0505051
0.765 0.000243239 8.18057e-05 0.0505051
0.85 0.000222199 8.33691e-05 0.0505051
1.02 0.000189695 8.64809e-05 0.0505051
1.36 0.000147162 9.26245e-05 0.0505051
1.7 0.00012041 9.86374e-05 0.0505051
2.04 0 0.000206459 0.0505051
END DIST

Metal 1 UNDER 4
DIST count 12 width 0.17
0.17 0.000855615 3.9104e-05 0.0505051
0.34 0.000480081 4.1758e-05 0.0505051
0.425 0.000398948 4.3082e-05 0.0505051
0.51 0.000342687 4.44018e-05 0.0505051
0.595 0.000301087 4.57199e-05 0.0505051
0.68 0.000268928 4.70333e-05 0.0505051
0.765 0.000243239 4.83428e-05 0.0505051
0.85 0.000222199 4.96492e-05 0.0505051
1.02 0.000189695 5.22457e-05 0.0505051
1.36 0.000147162 5.73706e-05 0.0505051
1.7 0.00012041 6.23866e-05 0.0505051
2.04 0 0.00016924 0.0505051
END DIST

Metal 1 UNDER 5
DIST count 12 width 0.17
0.17 0.000855615 3.34287e-05 0.0505051
0.34 0.000480081 3.57276e-05 0.0505051
0.425 0.000398948 3.68741e-05 0.0505051
0.51 0.000342687 3.80187e-05 0.0505051
0.595 0.000301087 3.916e-05 0.0505051
0.68 0.000268928 4.02975e-05 0.0505051
0.765 0.000243239 4.14324e-05 0.0505051
0.85 0.000222199 4.25634e-05 0.0505051
1.02 0.000189695 4.4813e-05 0.0505051
1.36 0.000147162 4.92537e-05 0.0505051
1.7 0.00012041 5.35993e-05 0.0505051
2.04 0 0.000159799 0.0505051
END DIST

Metal 1 UNDER 6
DIST count 12 width 0.17
0.17 0.000855615 1.54368e-05 0.0505051
0.34 0.000480081 1.7595e-05 0.0505051
0.425 0.000398948 1.86713e-05 0.0505051
0.51 0.000342687 1.97453e-05 0.0505051
0.595 0.000301087 2.08165e-05 0.0505051
0.68 0.000268928 2.1885e-05 0.0505051
0.765 0.000243239 2.29501e-05 0.0505051
0.85 0.000222199 2.40119e-05 0.0505051
1.02 0.000189695 2.61234e-05 0.0505051
1.36 0.000147162 3.02914e-05 0.0505051
1.7 0.00012041 3.43706e-05 0.0505051
2.04 0 0.000140311 0.0505051
END DIST

Metal 1 DIAGUNDER
WIDTH Table 1 entries:  0.17

Metal 1 DIAGUNDER 2
DIST count 13 width 0.17
0 0 0.00015718 0.0505051
0.17 0 0 0.0505051
0.34 0 0 0.0505051
0.425 0 0 0.0505051
0.51 0 0 0.0505051
0.595 0 0 0.0505051
0.68 0 0 0.0505051
0.765 0 0 0.0505051
0.85 0 0 0.0505051
1.02 0 0 0.0505051
1.36 0 0 0.0505051
1.7 0 0 0.0505051
2.04 0 0 0.0505051
END DIST

Metal 1 DIAGUNDER 3
DIST count 13 width 0.17
0 0 0.00010818 0.0505051
0.17 0 0 0.0505051
0.34 0 0 0.0505051
0.425 0 0 0.0505051
0.51 0 0 0.0505051
0.595 0 0 0.0505051
0.68 0 0 0.0505051
0.765 0 0 0.0505051
0.85 0 0 0.0505051
1.02 0 0 0.0505051
1.36 0 0 0.0505051
1.7 0 0 0.0505051
2.04 0 0 0.0505051
END DIST

Metal 1 DIAGUNDER 4
DIST count 13 width 0.17
0 0 3.61761e-05 0.0505051
0.17 0 0 0.0505051
0.34 0 0 0.0505051
0.425 0 0 0.0505051
0.51 0 0 0.0505051
0.595 0 0 0.0505051
0.68 0 0 0.0505051
0.765 0 0 0.0505051
0.85 0 0 0.0505051
1.02 0 0 0.0505051
1.36 0 0 0.0505051
1.7 0 0 0.0505051
2.04 0 0 0.0505051
END DIST

Metal 1 DIAGUNDER 5
DIST count 13 width 0.17
0 0 2.38726e-05 0.0505051
0.17 0 0 0.0505051
0.34 0 0 0.0505051
0.425 0 0 0.0505051
0.51 0 0 0.0505051
0.595 0 0 0.0505051
0.68 0 0 0.0505051
0.765 0 0 0.0505051
0.85 0 0 0.0505051
1.02 0 0 0.0505051
1.36 0 0 0.0505051
1.7 0 0 0.0505051
2.04 0 0 0.0505051
END DIST

Metal 1 DIAGUNDER 6
DIST count 0 width 0.17
END DIST

Metal 2 RESOVER
WIDTH Table 1 entries:  0.14

Metal 2 RESOVER 0
DIST count 55 width 0.14
0 0 0 0.00104618
0 0.2 0 0.00104618
0 0.34 0 0.00104618
0 0.47 0 0.00104618
0 0.54 0 0.00104618
0 0.68 0 0.00104618
0 0.81 0 0.00104618
0 0.88 0 0.00104618
0 1.02 0 0.00104618
0 1.36 0 0.00104618
0.2 0.2 0 0.00104618
0.2 0.34 0 0.00104618
0.2 0.47 0 0.00104618
0.2 0.54 0 0.00104618
0.2 0.68 0 0.00104618
0.2 0.81 0 0.00104618
0.2 0.88 0 0.00104618
0.2 1.02 0 0.00104618
0.2 1.36 0 0.00104618
0.34 0.34 0 0.00104618
0.34 0.47 0 0.00104618
0.34 0.54 0 0.00104618
0.34 0.68 0 0.00104618
0.34 0.81 0 0.00104618
0.34 0.88 0 0.00104618
0.34 1.02 0 0.00104618
0.34 1.36 0 0.00104618
0.47 0.47 0 0.00104618
0.47 0.54 0 0.00104618
0.47 0.68 0 0.00104618
0.47 0.81 0 0.00104618
0.47 0.88 0 0.00104618
0.47 1.02 0 0.00104618
0.47 1.36 0 0.00104618
0.54 0.54 0 0.00104618
0.54 0.68 0 0.00104618
0.54 0.81 0 0.00104618
0.54 0.88 0 0.00104618
0.54 1.02 0 0.00104618
0.54 1.36 0 0.00104618
0.68 0.68 0 0.00104618
0.68 0.81 0 0.00104618
0.68 0.88 0 0.00104618
0.68 1.02 0 0.00104618
0.68 1.36 0 0.00104618
0.81 0.81 0 0.00104618
0.81 0.88 0 0.00104618
0.81 1.02 0 0.00104618
0.81 1.36 0 0.00104618
0.88 0.88 0 0.00104618
0.88 1.02 0 0.00104618
0.88 1.36 0 0.00104618
1.02 1.02 0 0.00104618
1.02 1.36 0 0.00104618
1.36 0 1.36 0.00104618
END DIST

Metal 2 RESOVER 1
DIST count 0 width 0.14
END DIST

Metal 2 OVER
WIDTH Table 1 entries:  0.14

Metal 2 OVER 0
DIST count 12 width 0.14
0.14 0.00138859 6.07092e-06 0.000523088
0.28 0.000780268 7.4434e-06 0.000523088
0.35 0.000648137 8.12846e-06 0.000523088
0.42 0.000556378 8.81255e-06 0.000523088
0.49 0.000488485 9.49553e-06 0.000523088
0.56 0.000435987 1.01773e-05 0.000523088
0.63 0.000394058 1.08577e-05 0.000523088
0.7 0.000359723 1.15367e-05 0.000523088
0.84 0.00030672 1.28896e-05 0.000523088
1.12 0.000237465 1.55721e-05 0.000523088
1.4 0.000194001 1.82166e-05 0.000523088
1.68 0 0.000184909 0.000523088
END DIST

Metal 2 OVER 1
DIST count 12 width 0.14
0.14 0.00138859 4.977e-05 0.000523088
0.28 0.000780268 5.43342e-05 0.000523088
0.35 0.000648137 5.66122e-05 0.000523088
0.42 0.000556378 5.88865e-05 0.000523088
0.49 0.000488485 6.11585e-05 0.000523088
0.56 0.000435987 6.34257e-05 0.000523088
0.63 0.000394058 6.56886e-05 0.000523088
0.7 0.000359723 6.79461e-05 0.000523088
0.84 0.00030672 7.24449e-05 0.000523088
1.12 0.000237465 8.13649e-05 0.000523088
1.4 0.000194001 9.01587e-05 0.000523088
1.68 0 0.000262894 0.000523088
END DIST

Metal 2 UNDER
WIDTH Table 1 entries:  0.14

Metal 2 UNDER 3
DIST count 12 width 0.14
0.14 0.00138859 9.72946e-05 0.000523088
0.28 0.000780268 0.000102038 0.000523088
0.35 0.000648137 0.000104405 0.000523088
0.42 0.000556378 0.000106768 0.000523088
0.49 0.000488485 0.000109128 0.000523088
0.56 0.000435987 0.000111484 0.000523088
0.63 0.000394058 0.000113836 0.000523088
0.7 0.000359723 0.000116182 0.000523088
0.84 0.00030672 0.000120858 0.000523088
1.12 0.000237465 0.000130125 0.000523088
1.4 0.000194001 0.000139263 0.000523088
1.68 0 0.000312337 0.000523088
END DIST

Metal 2 UNDER 4
DIST count 12 width 0.14
0.14 0.00138859 3.50888e-05 0.000523088
0.28 0.000780268 3.80236e-05 0.000523088
0.35 0.000648137 3.94887e-05 0.000523088
0.42 0.000556378 4.09521e-05 0.000523088
0.49 0.000488485 4.24133e-05 0.000523088
0.56 0.000435987 4.38707e-05 0.000523088
0.63 0.000394058 4.5326e-05 0.000523088
0.7 0.000359723 4.67782e-05 0.000523088
0.84 0.00030672 4.96723e-05 0.000523088
1.12 0.000237465 5.54088e-05 0.000523088
1.4 0.000194001 6.10652e-05 0.000523088
1.68 0 0.000230717 0.000523088
END DIST

Metal 2 UNDER 5
DIST count 12 width 0.14
0.14 0.00138859 2.70561e-05 0.000523088
0.28 0.000780268 2.93826e-05 0.000523088
0.35 0.000648137 3.0544e-05 0.000523088
0.42 0.000556378 3.17038e-05 0.000523088
0.49 0.000488485 3.28616e-05 0.000523088
0.56 0.000435987 3.40167e-05 0.000523088
0.63 0.000394058 3.51709e-05 0.000523088
0.7 0.000359723 3.63215e-05 0.000523088
0.84 0.00030672 3.86149e-05 0.000523088
1.12 0.000237465 4.31618e-05 0.000523088
1.4 0.000194001 4.76448e-05 0.000523088
1.68 0 0.000216144 0.000523088
END DIST

Metal 2 UNDER 6
DIST count 12 width 0.14
0.14 0.00138859 1.27556e-05 0.000523088
0.28 0.000780268 1.49026e-05 0.000523088
0.35 0.000648137 1.59745e-05 0.000523088
0.42 0.000556378 1.70446e-05 0.000523088
0.49 0.000488485 1.81131e-05 0.000523088
0.56 0.000435987 1.91796e-05 0.000523088
0.63 0.000394058 2.0244e-05 0.000523088
0.7 0.000359723 2.13063e-05 0.000523088
0.84 0.00030672 2.34229e-05 0.000523088
1.12 0.000237465 2.76194e-05 0.000523088
1.4 0.000194001 3.17566e-05 0.000523088
1.68 0 0.000199916 0.000523088
END DIST

Metal 2 DIAGUNDER
WIDTH Table 1 entries:  0.14

Metal 2 DIAGUNDER 3
DIST count 13 width 0.14
0 0 2.93525e-05 0.000523088
0.14 0 2.06473e-05 0.000523088
0.28 0 2.03527e-05 0.000523088
0.35 0 2.01619e-05 0.000523088
0.42 0 1.99746e-05 0.000523088
0.49 0 1.97907e-05 0.000523088
0.56 0 1.96102e-05 0.000523088
0.63 0 1.9433e-05 0.000523088
0.7 0 1.91742e-05 0.000523088
0.84 0 9.50159e-06 0.000523088
1.12 0 0 0.000523088
1.4 0 0 0.000523088
1.68 0 0 0.000523088
END DIST

Metal 2 DIAGUNDER 4
DIST count 13 width 0.14
0 0 7.24987e-05 0.000523088
0.14 0 1.97789e-05 0.000523088
0.28 0 1.95085e-05 0.000523088
0.35 0 1.93331e-05 0.000523088
0.42 0 1.91608e-05 0.000523088
0.49 0 1.89916e-05 0.000523088
0.56 0 9.45382e-06 0.000523088
0.63 0 0 0.000523088
0.7 0 0 0.000523088
0.84 0 0 0.000523088
1.12 0 0 0.000523088
1.4 0 0 0.000523088
1.68 0 0 0.000523088
END DIST

Metal 2 DIAGUNDER 5
DIST count 13 width 0.14
0 0 4.72858e-05 0.000523088
0.14 0 1.97789e-05 0.000523088
0.28 0 1.95085e-05 0.000523088
0.35 0 1.93331e-05 0.000523088
0.42 0 1.91608e-05 0.000523088
0.49 0 1.89916e-05 0.000523088
0.56 0 9.45382e-06 0.000523088
0.63 0 0 0.000523088
0.7 0 0 0.000523088
0.84 0 0 0.000523088
1.12 0 0 0.000523088
1.4 0 0 0.000523088
1.68 0 0 0.000523088
END DIST

Metal 2 DIAGUNDER 6
DIST count 13 width 0.14
0 0 2.7381e-05 0.000523088
0.14 0 0 0.000523088
0.28 0 0 0.000523088
0.35 0 0 0.000523088
0.42 0 0 0.000523088
0.49 0 0 0.000523088
0.56 0 0 0.000523088
0.63 0 0 0.000523088
0.7 0 0 0.000523088
0.84 0 0 0.000523088
1.12 0 0 0.000523088
1.4 0 0 0.000523088
1.68 0 0 0.000523088
END DIST

Metal 2 OVERUNDER
WIDTH Table 1 entries:  0.14

Metal 2 OVER 1 UNDER 3
DIST count 12 width 0.14
0.14 0.0013887 0.000143553 0.000523088
0.28 0.000780276 0.000151528 0.000523088
0.35 0.000648137 0.000155464 0.000523088
0.42 0.000556378 0.000159389 0.000523088
0.49 0.000488509 0.000163295 0.000523088
0.56 0.000436058 0.000167177 0.000523088
0.63 0.00039416 0.000171064 0.000523088
0.7 0.000359778 0.000174991 0.000523088
0.84 0.000306783 0.00018279 0.000523088
1.12 0.000237505 0.000198315 0.000523088
1.4 0.000194001 0.000213632 0.000523088
1.68 0 0.000392751 0.000523088
END DIST

Metal 2 OVER 1 UNDER 4
DIST count 12 width 0.14
0.14 0.00138881 8.13741e-05 0.000523088
0.28 0.000780387 8.75071e-05 0.000523088
0.35 0.000648248 9.05656e-05 0.000523088
0.42 0.000556489 9.36192e-05 0.000523088
0.49 0.000488619 9.66679e-05 0.000523088
0.56 0.000436169 9.97076e-05 0.000523088
0.63 0.000394271 0.000102744 0.000523088
0.7 0.000359889 0.000105777 0.000523088
0.84 0.000306894 0.000111817 0.000523088
1.12 0.000237615 0.000123792 0.000523088
1.4 0.000194111 0.0001356 0.000523088
1.68 0 0.000311406 0.000523088
END DIST

Metal 2 OVER 1 UNDER 5
DIST count 12 width 0.14
0.14 0.00138881 7.33414e-05 0.000523088
0.28 0.000780379 7.84076e-05 0.000523088
0.35 0.000648248 7.98382e-05 0.000523088
0.42 0.000556489 8.17709e-05 0.000523088
0.49 0.000488596 8.45177e-05 0.000523088
0.56 0.000436098 8.72582e-05 0.000523088
0.63 0.000394168 8.99949e-05 0.000523088
0.7 0.000359834 9.2724e-05 0.000523088
0.84 0.00030683 9.81633e-05 0.000523088
1.12 0.000237576 0.000108948 0.000523088
1.4 0.000194111 0.00011958 0.000523088
1.68 0 0.000294373 0.000523088
END DIST

Metal 2 OVER 1 UNDER 6
DIST count 12 width 0.14
0.14 0.0013887 5.64405e-05 0.000523088
0.28 0.000780268 6.17934e-05 0.000523088
0.35 0.000648137 6.44583e-05 0.000523088
0.42 0.000556378 6.71185e-05 0.000523088
0.49 0.000488485 6.97761e-05 0.000523088
0.56 0.000435987 7.2428e-05 0.000523088
0.63 0.000394058 7.50749e-05 0.000523088
0.7 0.000359723 7.77158e-05 0.000523088
0.84 0.00030672 8.29781e-05 0.000523088
1.12 0.000237465 9.34122e-05 0.000523088
1.4 0.000194001 0.000103699 0.000523088
1.68 0 0.000277901 0.000523088
END DIST

Metal 3 RESOVER
WIDTH Table 1 entries:  0.14

Metal 3 RESOVER 0
DIST count 55 width 0.14
0 0 0 0.00104618
0 0.32 0 0.00104618
0 0.46 0 0.00104618
0 0.71 0 0.00104618
0 0.78 0 0.00104618
0 0.92 0 0.00104618
0 1.17 0 0.00104618
0 1.24 0 0.00104618
0 1.38 0 0.00104618
0 1.84 0 0.00104618
0.32 0.32 0 0.00104618
0.32 0.46 0 0.00104618
0.32 0.71 0 0.00104618
0.32 0.78 0 0.00104618
0.32 0.92 0 0.00104618
0.32 1.17 0 0.00104618
0.32 1.24 0 0.00104618
0.32 1.38 0 0.00104618
0.32 1.84 0 0.00104618
0.46 0.46 0 0.00104618
0.46 0.71 0 0.00104618
0.46 0.78 0 0.00104618
0.46 0.92 0 0.00104618
0.46 1.17 0 0.00104618
0.46 1.24 0 0.00104618
0.46 1.38 0 0.00104618
0.46 1.84 0 0.00104618
0.71 0.71 0 0.00104618
0.71 0.78 0 0.00104618
0.71 0.92 0 0.00104618
0.71 1.17 0 0.00104618
0.71 1.24 0 0.00104618
0.71 1.38 0 0.00104618
0.71 1.84 0 0.00104618
0.78 0.78 0 0.00104618
0.78 0.92 0 0.00104618
0.78 1.17 0 0.00104618
0.78 1.24 0 0.00104618
0.78 1.38 0 0.00104618
0.78 1.84 0 0.00104618
0.92 0.92 0 0.00104618
0.92 1.17 0 0.00104618
0.92 1.24 0 0.00104618
0.92 1.38 0 0.00104618
0.92 1.84 0 0.00104618
1.17 1.17 0 0.00104618
1.17 1.24 0 0.00104618
1.17 1.38 0 0.00104618
1.17 1.84 0 0.00104618
1.24 1.24 0 0.00104618
1.24 1.38 0 0.00104618
1.24 1.84 0 0.00104618
1.38 1.38 0 0.00104618
1.38 1.84 0 0.00104618
1.84 0 1.84 0.00104618
END DIST

Metal 3 RESOVER 1
DIST count 0 width 0.14
END DIST

Metal 3 RESOVER 2
DIST count 0 width 0.14
END DIST

Metal 3 OVER
WIDTH Table 1 entries:  0.14

Metal 3 OVER 0
DIST count 12 width 0.14
0.14 0.0014113 5.49841e-06 0.000523088
0.28 0.000788639 6.77056e-06 0.000523088
0.35 0.000655501 7.40538e-06 0.000523088
0.42 0.000563481 8.03921e-06 0.000523088
0.49 0.000495576 8.67193e-06 0.000523088
0.56 0.000443136 9.30339e-06 0.000523088
0.63 0.000401263 9.93351e-06 0.000523088
0.7 0.000366965 1.05622e-05 0.000523088
0.84 0.000313949 1.18145e-05 0.000523088
1.12 0.000244431 1.42964e-05 0.000523088
1.4 0.00020056 1.67414e-05 0.000523088
1.68 0 0.000189361 0.000523088
END DIST

Metal 3 OVER 1
DIST count 12 width 0.14
0.14 0.0014113 3.07427e-05 0.000523088
0.28 0.000788639 3.42003e-05 0.000523088
0.35 0.000655501 3.59242e-05 0.000523088
0.42 0.000563481 3.76465e-05 0.000523088
0.49 0.000495576 3.93671e-05 0.000523088
0.56 0.000443136 4.10825e-05 0.000523088
0.63 0.000401263 4.27943e-05 0.000523088
0.7 0.000366965 4.45026e-05 0.000523088
0.84 0.000313949 4.79059e-05 0.000523088
1.12 0.000244431 5.46499e-05 0.000523088
1.4 0.00020056 6.12939e-05 0.000523088
1.68 0 0.000238037 0.000523088
END DIST

Metal 3 OVER 2
DIST count 12 width 0.14
0.14 0.0014113 7.64769e-05 0.000523088
0.28 0.000788639 8.17955e-05 0.000523088
0.35 0.000655501 8.44482e-05 0.000523088
0.42 0.000563481 8.70986e-05 0.000523088
0.49 0.000495576 8.97428e-05 0.000523088
0.56 0.000443136 9.2384e-05 0.000523088
0.63 0.000401263 9.50185e-05 0.000523088
0.7 0.000366965 9.7646e-05 0.000523088
0.84 0.000313949 0.000102882 0.000523088
1.12 0.000244431 0.000113257 0.000523088
1.4 0.00020056 0.00012348 0.000523088
1.68 0 0.000303735 0.000523088
END DIST

Metal 3 UNDER
WIDTH Table 1 entries:  0.14

Metal 3 UNDER 4
DIST count 12 width 0.14
0.14 0.0014113 5.11276e-05 0.000523088
0.28 0.000788639 5.50662e-05 0.000523088
0.35 0.000655501 5.70314e-05 0.000523088
0.42 0.000563481 5.89931e-05 0.000523088
0.49 0.000495576 6.09516e-05 0.000523088
0.56 0.000443136 6.29069e-05 0.000523088
0.63 0.000401263 6.48578e-05 0.000523088
0.7 0.000366965 6.68038e-05 0.000523088
0.84 0.000313949 7.06808e-05 0.000523088
1.12 0.000244431 7.83634e-05 0.000523088
1.4 0.00020056 8.59326e-05 0.000523088
1.68 0 0.000263584 0.000523088
END DIST

Metal 3 UNDER 5
DIST count 12 width 0.14
0.14 0.0014113 3.11851e-05 0.000523088
0.28 0.000788639 3.37586e-05 0.000523088
0.35 0.000655501 3.50428e-05 0.000523088
0.42 0.000563481 3.63253e-05 0.000523088
0.49 0.000495576 3.76051e-05 0.000523088
0.56 0.000443136 3.88825e-05 0.000523088
0.63 0.000401263 4.01572e-05 0.000523088
0.7 0.000366965 4.14294e-05 0.000523088
0.84 0.000313949 4.39627e-05 0.000523088
1.12 0.000244431 4.89834e-05 0.000523088
1.4 0.00020056 5.39299e-05 0.000523088
1.68 0 0.000229006 0.000523088
END DIST

Metal 3 UNDER 6
DIST count 12 width 0.14
0.14 0.0014113 1.42281e-05 0.000523088
0.28 0.000788639 1.6497e-05 0.000523088
0.35 0.000655501 1.76291e-05 0.000523088
0.42 0.000563481 1.87596e-05 0.000523088
0.49 0.000495576 1.9888e-05 0.000523088
0.56 0.000443136 2.10142e-05 0.000523088
0.63 0.000401263 2.21379e-05 0.000523088
0.7 0.000366965 2.32591e-05 0.000523088
0.84 0.000313949 2.54927e-05 0.000523088
1.12 0.000244431 2.9919e-05 0.000523088
1.4 0.00020056 3.42797e-05 0.000523088
1.68 0 0.000208781 0.000523088
END DIST

Metal 3 DIAGUNDER
WIDTH Table 1 entries:  0.14

Metal 3 DIAGUNDER 4
DIST count 13 width 0.14
0 0 0.000110188 0.000523088
0.14 0 0 0.000523088
0.28 0 0 0.000523088
0.35 0 0 0.000523088
0.42 0 0 0.000523088
0.49 0 0 0.000523088
0.56 0 0 0.000523088
0.63 0 0 0.000523088
0.7 0 0 0.000523088
0.84 0 0 0.000523088
1.12 0 0 0.000523088
1.4 0 0 0.000523088
1.68 0 0 0.000523088
END DIST

Metal 3 DIAGUNDER 5
DIST count 13 width 0.14
0 0 5.07133e-05 0.000523088
0.14 0 0 0.000523088
0.28 0 0 0.000523088
0.35 0 0 0.000523088
0.42 0 0 0.000523088
0.49 0 0 0.000523088
0.56 0 0 0.000523088
0.63 0 0 0.000523088
0.7 0 0 0.000523088
0.84 0 0 0.000523088
1.12 0 0 0.000523088
1.4 0 0 0.000523088
1.68 0 0 0.000523088
END DIST

Metal 3 DIAGUNDER 6
DIST count 13 width 0.14
0 0 3.54218e-05 0.000523088
0.14 0 0 0.000523088
0.28 0 0 0.000523088
0.35 0 0 0.000523088
0.42 0 0 0.000523088
0.49 0 0 0.000523088
0.56 0 0 0.000523088
0.63 0 0 0.000523088
0.7 0 0 0.000523088
0.84 0 0 0.000523088
1.12 0 0 0.000523088
1.4 0 0 0.000523088
1.68 0 0 0.000523088
END DIST

Metal 3 OVERUNDER
WIDTH Table 1 entries:  0.14

Metal 3 OVER 1 UNDER 4
DIST count 12 width 0.14
0.14 0.0014113 7.63719e-05 0.000523088
0.28 0.000788639 8.2496e-05 0.000523088
0.35 0.000655501 8.55503e-05 0.000523088
0.42 0.000563481 8.86004e-05 0.000523088
0.49 0.000495576 9.16468e-05 0.000523088
0.56 0.000443136 9.4686e-05 0.000523088
0.63 0.000401263 9.77186e-05 0.000523088
0.7 0.000366965 0.000100744 0.000523088
0.84 0.000313949 0.000106772 0.000523088
1.12 0.000244431 0.000118717 0.000523088
1.4 0.00020056 0.000130485 0.000523088
1.68 0 0.00031226 0.000523088
END DIST

Metal 3 OVER 1 UNDER 5
DIST count 12 width 0.14
0.14 0.0014113 5.64294e-05 0.000523088
0.28 0.000788639 6.11883e-05 0.000523088
0.35 0.000655501 6.35617e-05 0.000523088
0.42 0.000563481 6.59326e-05 0.000523088
0.49 0.000495576 6.83002e-05 0.000523088
0.56 0.000443136 7.06616e-05 0.000523088
0.63 0.000401263 7.3018e-05 0.000523088
0.7 0.000366965 7.53699e-05 0.000523088
0.84 0.000313949 8.0054e-05 0.000523088
1.12 0.000244431 8.9337e-05 0.000523088
1.4 0.00020056 9.84824e-05 0.000523088
1.68 0 0.000277681 0.000523088
END DIST

Metal 3 OVER 1 UNDER 6
DIST count 12 width 0.14
0.14 0.0014113 3.94724e-05 0.000523088
0.28 0.000788639 4.39267e-05 0.000523088
0.35 0.000655501 4.6148e-05 0.000523088
0.42 0.000563481 4.8367e-05 0.000523088
0.49 0.000495576 5.05831e-05 0.000523088
0.56 0.000443136 5.27933e-05 0.000523088
0.63 0.000401263 5.49987e-05 0.000523088
0.7 0.000366965 5.71995e-05 0.000523088
0.84 0.000313949 6.15841e-05 0.000523088
1.12 0.000244431 7.02726e-05 0.000523088
1.4 0.00020056 7.88322e-05 0.000523088
1.68 0 0.000257456 0.000523088
END DIST

Metal 3 OVER 2 UNDER 4
DIST count 12 width 0.14
0.14 0.0014113 0.000122106 0.000523088
0.28 0.000788639 0.000130091 0.000523088
0.35 0.000655501 0.000134074 0.000523088
0.42 0.000563481 0.000138052 0.000523088
0.49 0.000495576 0.000142022 0.000523088
0.56 0.000443136 0.000145988 0.000523088
0.63 0.000401263 0.000149943 0.000523088
0.7 0.000366965 0.000153888 0.000523088
0.84 0.000313949 0.000161748 0.000523088
1.12 0.000244431 0.000177324 0.000523088
1.4 0.00020056 0.000192671 0.000523088
1.68 0 0.000377958 0.000523088
END DIST

Metal 3 OVER 2 UNDER 5
DIST count 12 width 0.14
0.14 0.0014113 0.000102164 0.000523088
0.28 0.000788639 0.000108784 0.000523088
0.35 0.000655501 0.000112086 0.000523088
0.42 0.000563481 0.000115385 0.000523088
0.49 0.000495576 0.000118676 0.000523088
0.56 0.000443136 0.000121963 0.000523088
0.63 0.000401263 0.000125242 0.000523088
0.7 0.000366965 0.000128513 0.000523088
0.84 0.000313949 0.00013503 0.000523088
1.12 0.000244431 0.000147944 0.000523088
1.4 0.00020056 0.000160668 0.000523088
1.68 0 0.00034338 0.000523088
END DIST

Metal 3 OVER 2 UNDER 6
DIST count 12 width 0.14
0.14 0.0014113 8.52066e-05 0.000523088
0.28 0.000788639 9.15219e-05 0.000523088
0.35 0.000655501 9.46719e-05 0.000523088
0.42 0.000563481 9.7819e-05 0.000523088
0.49 0.000495576 0.000100959 0.000523088
0.56 0.000443136 0.000104095 0.000523088
0.63 0.000401263 0.000107223 0.000523088
0.7 0.000366965 0.000110343 0.000523088
0.84 0.000313949 0.00011656 0.000523088
1.12 0.000244431 0.00012888 0.000523088
1.4 0.00020056 0.000141018 0.000523088
1.68 0 0.000323155 0.000523088
END DIST

Metal 4 RESOVER
WIDTH Table 1 entries:  0.3

Metal 4 RESOVER 0
DIST count 55 width 0.3
0 0 0 0.000188552
0 0.38 0 0.000188552
0 0.68 0 0.000188552
0 0.91 0 0.000188552
0 1.06 0 0.000188552
0 1.36 0 0.000188552
0 1.59 0 0.000188552
0 1.74 0 0.000188552
0 2.04 0 0.000188552
0 2.72 0 0.000188552
0.38 0.38 0 0.000188552
0.38 0.68 0 0.000188552
0.38 0.91 0 0.000188552
0.38 1.06 0 0.000188552
0.38 1.36 0 0.000188552
0.38 1.59 0 0.000188552
0.38 1.74 0 0.000188552
0.38 2.04 0 0.000188552
0.38 2.72 0 0.000188552
0.68 0.68 0 0.000188552
0.68 0.91 0 0.000188552
0.68 1.06 0 0.000188552
0.68 1.36 0 0.000188552
0.68 1.59 0 0.000188552
0.68 1.74 0 0.000188552
0.68 2.04 0 0.000188552
0.68 2.72 0 0.000188552
0.91 0.91 0 0.000188552
0.91 1.06 0 0.000188552
0.91 1.36 0 0.000188552
0.91 1.59 0 0.000188552
0.91 1.74 0 0.000188552
0.91 2.04 0 0.000188552
0.91 2.72 0 0.000188552
1.06 1.06 0 0.000188552
1.06 1.36 0 0.000188552
1.06 1.59 0 0.000188552
1.06 1.74 0 0.000188552
1.06 2.04 0 0.000188552
1.06 2.72 0 0.000188552
1.36 1.36 0 0.000188552
1.36 1.59 0 0.000188552
1.36 1.74 0 0.000188552
1.36 2.04 0 0.000188552
1.36 2.72 0 0.000188552
1.59 1.59 0 0.000188552
1.59 1.74 0 0.000188552
1.59 2.04 0 0.000188552
1.59 2.72 0 0.000188552
1.74 1.74 0 0.000188552
1.74 2.04 0 0.000188552
1.74 2.72 0 0.000188552
2.04 2.04 0 0.000188552
2.04 2.72 0 0.000188552
2.72 0 2.72 0.000188552
END DIST

Metal 4 RESOVER 1
DIST count 0 width 0.3
END DIST

Metal 4 RESOVER 2
DIST count 0 width 0.3
END DIST

Metal 4 RESOVER 3
DIST count 0 width 0.3
END DIST

Metal 4 OVER
WIDTH Table 1 entries:  0.3

Metal 4 OVER 0
DIST count 12 width 0.3
0.3 0.00102731 8.93396e-06 9.42761e-05
0.6 0.000577609 1.1713e-05 9.42761e-05
0.75 0.00047962 1.30916e-05 9.42761e-05
0.9 0.000411519 1.44615e-05 9.42761e-05
1.05 0.000361116 1.58214e-05 9.42761e-05
1.2 0.000322143 1.71702e-05 9.42761e-05
1.35 0.000291022 1.85066e-05 9.42761e-05
1.5 0.000265545 1.98295e-05 9.42761e-05
1.8 0.000226234 2.24301e-05 9.42761e-05
2.4 0.000174927 2.742e-05 9.42761e-05
3 0.000142773 3.20705e-05 9.42761e-05
3.6 0 0.000156992 9.42761e-05
END DIST

Metal 4 OVER 1
DIST count 12 width 0.3
0.3 0.00102731 4.87646e-05 9.42761e-05
0.6 0.000577609 5.60307e-05 9.42761e-05
0.75 0.00047962 5.96371e-05 9.42761e-05
0.9 0.000411519 6.32188e-05 9.42761e-05
1.05 0.000361116 6.67745e-05 9.42761e-05
1.2 0.000322143 7.03009e-05 9.42761e-05
1.35 0.000291022 7.37967e-05 9.42761e-05
1.5 0.000265545 7.72541e-05 9.42761e-05
1.8 0.000226234 8.40556e-05 9.42761e-05
2.4 0.000174927 9.71037e-05 9.42761e-05
3 0.000142773 0.000109265 9.42761e-05
3.6 0 0.000241045 9.42761e-05
END DIST

Metal 4 OVER 2
DIST count 12 width 0.3
0.3 0.00102731 8.50466e-05 9.42761e-05
0.6 0.000577609 9.33376e-05 9.42761e-05
0.75 0.00047962 9.74507e-05 9.42761e-05
0.9 0.000411519 0.000101541 9.42761e-05
1.05 0.000361116 0.000105597 9.42761e-05
1.2 0.000322143 0.000109623 9.42761e-05
1.35 0.000291022 0.00011361 9.42761e-05
1.5 0.000265545 0.000117558 9.42761e-05
1.8 0.000226234 0.000125316 9.42761e-05
2.4 0.000174927 0.000140206 9.42761e-05
3 0.000142773 0.000154083 9.42761e-05
3.6 0 0.00028743 9.42761e-05
END DIST

Metal 4 OVER 3
DIST count 12 width 0.3
0.3 0.00102731 0.000138738 9.42761e-05
0.6 0.000577609 0.000149074 9.42761e-05
0.75 0.00047962 0.000154201 9.42761e-05
0.9 0.000411519 0.000159297 9.42761e-05
1.05 0.000361116 0.000164353 9.42761e-05
1.2 0.000322143 0.000169371 9.42761e-05
1.35 0.000291022 0.00017434 9.42761e-05
1.5 0.000265545 0.000179261 9.42761e-05
1.8 0.000226234 0.000188931 9.42761e-05
2.4 0.000174927 0.00020749 9.42761e-05
3 0.000142773 0.000224786 9.42761e-05
3.6 0 0.000361254 9.42761e-05
END DIST

Metal 4 UNDER
WIDTH Table 1 entries:  0.3

Metal 4 UNDER 5
DIST count 12 width 0.3
0.3 0.00102731 0.00011635 9.42761e-05
0.6 0.000577609 0.000124896 9.42761e-05
0.75 0.00047962 0.000129137 9.42761e-05
0.9 0.000411519 0.00013335 9.42761e-05
1.05 0.000361116 0.000137533 9.42761e-05
1.2 0.000322143 0.00014168 9.42761e-05
1.35 0.000291022 0.000145791 9.42761e-05
1.5 0.000265545 0.00014986 9.42761e-05
1.8 0.000226234 0.000157858 9.42761e-05
2.4 0.000174927 0.000173205 9.42761e-05
3 0.000142773 0.000187508 9.42761e-05
3.6 0 0.000321245 9.42761e-05
END DIST

Metal 4 UNDER 6
DIST count 12 width 0.3
0.3 0.00102731 3.28937e-05 9.42761e-05
0.6 0.000577609 3.9288e-05 9.42761e-05
0.75 0.00047962 4.24601e-05 9.42761e-05
0.9 0.000411519 4.56122e-05 9.42761e-05
1.05 0.000361116 4.87411e-05 9.42761e-05
1.2 0.000322143 5.18446e-05 9.42761e-05
1.35 0.000291022 5.49194e-05 9.42761e-05
1.5 0.000265545 5.79634e-05 9.42761e-05
1.8 0.000226234 6.39473e-05 9.42761e-05
2.4 0.000174927 7.54286e-05 9.42761e-05
3 0.000142773 8.6129e-05 9.42761e-05
3.6 0 0.000216576 9.42761e-05
END DIST

Metal 4 DIAGUNDER
WIDTH Table 1 entries:  0.3

Metal 4 DIAGUNDER 5
DIST count 13 width 0.3
0 0 2.54636e-05 9.42761e-05
0.3 0 0 9.42761e-05
0.6 0 0 9.42761e-05
0.75 0 0 9.42761e-05
0.9 0 0 9.42761e-05
1.05 0 0 9.42761e-05
1.2 0 0 9.42761e-05
1.35 0 0 9.42761e-05
1.5 0 0 9.42761e-05
1.8 0 0 9.42761e-05
2.4 0 0 9.42761e-05
3 0 0 9.42761e-05
3.6 0 0 9.42761e-05
END DIST

Metal 4 DIAGUNDER 6
DIST count 13 width 0.3
0 0 6.69081e-05 9.42761e-05
0.3 0 0 9.42761e-05
0.6 0 0 9.42761e-05
0.75 0 0 9.42761e-05
0.9 0 0 9.42761e-05
1.05 0 0 9.42761e-05
1.2 0 0 9.42761e-05
1.35 0 0 9.42761e-05
1.5 0 0 9.42761e-05
1.8 0 0 9.42761e-05
2.4 0 0 9.42761e-05
3 0 0 9.42761e-05
3.6 0 0 9.42761e-05
END DIST

Metal 4 OVERUNDER
WIDTH Table 1 entries:  0.3

Metal 4 OVER 1 UNDER 5
DIST count 12 width 0.3
0.3 0.00102731 0.00015618 9.42761e-05
0.6 0.000577609 0.000169214 9.42761e-05
0.75 0.00047962 0.000175682 9.42761e-05
0.9 0.000411519 0.000182108 9.42761e-05
1.05 0.000361116 0.000188486 9.42761e-05
1.2 0.000322143 0.000194811 9.42761e-05
1.35 0.000291022 0.000201081 9.42761e-05
1.5 0.000265545 0.000207284 9.42761e-05
1.8 0.000226234 0.000219483 9.42761e-05
2.4 0.000174927 0.000242888 9.42761e-05
3 0.000142773 0.000264702 9.42761e-05
3.6 0 0.000405297 9.42761e-05
END DIST

Metal 4 OVER 1 UNDER 6
DIST count 12 width 0.3
0.3 0.00102731 7.27243e-05 9.42761e-05
0.6 0.000577609 8.36057e-05 9.42761e-05
0.75 0.00047962 8.90055e-05 9.42761e-05
0.9 0.000411519 9.43694e-05 9.42761e-05
1.05 0.000361116 9.96942e-05 9.42761e-05
1.2 0.000322143 0.000104975 9.42761e-05
1.35 0.000291022 0.00011021 9.42761e-05
1.5 0.000265545 0.000115388 9.42761e-05
1.8 0.000226234 0.000125573 9.42761e-05
2.4 0.000174927 0.000145112 9.42761e-05
3 0.000142773 0.000163323 9.42761e-05
3.6 0 0.000300628 9.42761e-05
END DIST

Metal 4 OVER 2 UNDER 5
DIST count 12 width 0.3
0.3 0.00102731 0.000192462 9.42761e-05
0.6 0.000577609 0.000206521 9.42761e-05
0.75 0.00047962 0.000213496 9.42761e-05
0.9 0.000411519 0.000220429 9.42761e-05
1.05 0.000361116 0.000227309 9.42761e-05
1.2 0.000322143 0.000234133 9.42761e-05
1.35 0.000291022 0.000240894 9.42761e-05
1.5 0.000265545 0.000247588 9.42761e-05
1.8 0.000226234 0.000260744 9.42761e-05
2.4 0.000174927 0.000285991 9.42761e-05
3 0.000142773 0.000309521 9.42761e-05
3.6 0 0.000451682 9.42761e-05
END DIST

Metal 4 OVER 2 UNDER 6
DIST count 12 width 0.3
0.3 0.00102731 0.000109006 9.42761e-05
0.6 0.000577609 0.000120913 9.42761e-05
0.75 0.00047962 0.000126819 9.42761e-05
0.9 0.000411519 0.000132691 9.42761e-05
1.05 0.000361116 0.000138517 9.42761e-05
1.2 0.000322143 0.000144297 9.42761e-05
1.35 0.000291022 0.000150023 9.42761e-05
1.5 0.000265545 0.000155692 9.42761e-05
1.8 0.000226234 0.000166833 9.42761e-05
2.4 0.000174927 0.000188215 9.42761e-05
3 0.000142773 0.000208142 9.42761e-05
3.6 0 0.000347013 9.42761e-05
END DIST

Metal 4 OVER 3 UNDER 5
DIST count 12 width 0.3
0.3 0.00102731 0.000246154 9.42761e-05
0.6 0.000577609 0.000262258 9.42761e-05
0.75 0.00047962 0.000270246 9.42761e-05
0.9 0.000411519 0.000278186 9.42761e-05
1.05 0.000361116 0.000286065 9.42761e-05
1.2 0.000322143 0.000293881 9.42761e-05
1.35 0.000291022 0.000301624 9.42761e-05
1.5 0.000265545 0.000309291 9.42761e-05
1.8 0.000226234 0.000324359 9.42761e-05
2.4 0.000174927 0.000353275 9.42761e-05
3 0.000142773 0.000380224 9.42761e-05
3.6 0 0.000525506 9.42761e-05
END DIST

Metal 4 OVER 3 UNDER 6
DIST count 12 width 0.3
0.3 0.00102731 0.000162698 9.42761e-05
0.6 0.000577609 0.000176649 9.42761e-05
0.75 0.00047962 0.000183569 9.42761e-05
0.9 0.000411519 0.000190448 9.42761e-05
1.05 0.000361116 0.000197273 9.42761e-05
1.2 0.000322143 0.000204045 9.42761e-05
1.35 0.000291022 0.000210752 9.42761e-05
1.5 0.000265545 0.000217395 9.42761e-05
1.8 0.000226234 0.000230449 9.42761e-05
2.4 0.000174927 0.000255499 9.42761e-05
3 0.000142773 0.000278845 9.42761e-05
3.6 0 0.000420837 9.42761e-05
END DIST

Metal 5 RESOVER
WIDTH Table 1 entries:  0.3

Metal 5 RESOVER 0
DIST count 55 width 0.3
0 0 0 0.000188552
0 0.62 0 0.000188552
0 0.92 0 0.000188552
0 1.39 0 0.000188552
0 1.54 0 0.000188552
0 1.84 0 0.000188552
0 2.31 0 0.000188552
0 2.46 0 0.000188552
0 2.76 0 0.000188552
0 3.68 0 0.000188552
0.62 0.62 0 0.000188552
0.62 0.92 0 0.000188552
0.62 1.39 0 0.000188552
0.62 1.54 0 0.000188552
0.62 1.84 0 0.000188552
0.62 2.31 0 0.000188552
0.62 2.46 0 0.000188552
0.62 2.76 0 0.000188552
0.62 3.68 0 0.000188552
0.92 0.92 0 0.000188552
0.92 1.39 0 0.000188552
0.92 1.54 0 0.000188552
0.92 1.84 0 0.000188552
0.92 2.31 0 0.000188552
0.92 2.46 0 0.000188552
0.92 2.76 0 0.000188552
0.92 3.68 0 0.000188552
1.39 1.39 0 0.000188552
1.39 1.54 0 0.000188552
1.39 1.84 0 0.000188552
1.39 2.31 0 0.000188552
1.39 2.46 0 0.000188552
1.39 2.76 0 0.000188552
1.39 3.68 0 0.000188552
1.54 1.54 0 0.000188552
1.54 1.84 0 0.000188552
1.54 2.31 0 0.000188552
1.54 2.46 0 0.000188552
1.54 2.76 0 0.000188552
1.54 3.68 0 0.000188552
1.84 1.84 0 0.000188552
1.84 2.31 0 0.000188552
1.84 2.46 0 0.000188552
1.84 2.76 0 0.000188552
1.84 3.68 0 0.000188552
2.31 2.31 0 0.000188552
2.31 2.46 0 0.000188552
2.31 2.76 0 0.000188552
2.31 3.68 0 0.000188552
2.46 2.46 0 0.000188552
2.46 2.76 0 0.000188552
2.46 3.68 0 0.000188552
2.76 2.76 0 0.000188552
2.76 3.68 0 0.000188552
3.68 0 3.68 0.000188552
END DIST

Metal 5 RESOVER 1
DIST count 0 width 0.3
END DIST

Metal 5 RESOVER 2
DIST count 0 width 0.3
END DIST

Metal 5 RESOVER 3
DIST count 0 width 0.3
END DIST

Metal 5 RESOVER 4
DIST count 0 width 0.3
END DIST

Metal 5 OVER
WIDTH Table 1 entries:  0.3

Metal 5 OVER 0
DIST count 12 width 0.3
0.3 0.00104371 8.39173e-06 9.42761e-05
0.6 0.000584193 1.08642e-05 9.42761e-05
0.75 0.000485571 1.20895e-05 9.42761e-05
0.9 0.000417321 1.33061e-05 9.42761e-05
1.05 0.000366917 1.45129e-05 9.42761e-05
1.2 0.000327972 1.57089e-05 9.42761e-05
1.35 0.000296868 1.68931e-05 9.42761e-05
1.5 0.000271391 1.80643e-05 9.42761e-05
1.8 0.000232013 2.03641e-05 9.42761e-05
2.4 0.000180411 2.47655e-05 9.42761e-05
3 0.000147882 2.88519e-05 9.42761e-05
3.6 0 0.000157976 9.42761e-05
END DIST

Metal 5 OVER 1
DIST count 12 width 0.3
0.3 0.00104371 3.72596e-05 9.42761e-05
0.6 0.000584193 4.3432e-05 9.42761e-05
0.75 0.000485571 4.64907e-05 9.42761e-05
0.9 0.000417321 4.95273e-05 9.42761e-05
1.05 0.000366917 5.25385e-05 9.42761e-05
1.2 0.000327972 5.55234e-05 9.42761e-05
1.35 0.000296868 5.84809e-05 9.42761e-05
1.5 0.000271391 6.14032e-05 9.42761e-05
1.8 0.000232013 6.71431e-05 9.42761e-05
2.4 0.000180411 7.81289e-05 9.42761e-05
3 0.000147882 8.83285e-05 9.42761e-05
3.6 0 0.000223011 9.42761e-05
END DIST

Metal 5 OVER 2
DIST count 12 width 0.3
0.3 0.00104371 5.7802e-05 9.42761e-05
0.6 0.000584193 6.43287e-05 9.42761e-05
0.75 0.000485571 6.7563e-05 9.42761e-05
0.9 0.000417321 7.07748e-05 9.42761e-05
1.05 0.000366917 7.39603e-05 9.42761e-05
1.2 0.000327972 7.71184e-05 9.42761e-05
1.35 0.000296868 8.02451e-05 9.42761e-05
1.5 0.000271391 8.33369e-05 9.42761e-05
1.8 0.000232013 8.9406e-05 9.42761e-05
2.4 0.000180411 0.000101024 9.42761e-05
3 0.000147882 0.00011181 9.42761e-05
3.6 0 0.000247026 9.42761e-05
END DIST

Metal 5 OVER 3
DIST count 12 width 0.3
0.3 0.00104371 7.2727e-05 9.42761e-05
0.6 0.000584193 7.97051e-05 9.42761e-05
0.75 0.000485571 8.31633e-05 9.42761e-05
0.9 0.000417321 8.65959e-05 9.42761e-05
1.05 0.000366917 9.00018e-05 9.42761e-05
1.2 0.000327972 9.3377e-05 9.42761e-05
1.35 0.000296868 9.67176e-05 9.42761e-05
1.5 0.000271391 0.000100025 9.42761e-05
1.8 0.000232013 0.000106516 9.42761e-05
2.4 0.000180411 0.000118937 9.42761e-05
3 0.000147882 0.000130471 9.42761e-05
3.6 0 0.000266362 9.42761e-05
END DIST

Metal 5 OVER 4
DIST count 12 width 0.3
0.3 0.00104371 9.00072e-05 9.42761e-05
0.6 0.000584193 0.000100728 9.42761e-05
0.75 0.000485571 0.00010604 9.42761e-05
0.9 0.000417321 0.000111315 9.42761e-05
1.05 0.000366917 0.000116548 9.42761e-05
1.2 0.000327972 0.000121733 9.42761e-05
1.35 0.000296868 0.000126867 9.42761e-05
1.5 0.000271391 0.000131946 9.42761e-05
1.8 0.000232013 0.000141918 9.42761e-05
2.4 0.000180411 0.000161001 9.42761e-05
3 0.000147882 0.000178719 9.42761e-05
3.6 0 0.000320235 9.42761e-05
END DIST

Metal 5 UNDER
WIDTH Table 1 entries:  0.3

Metal 5 UNDER 6
DIST count 12 width 0.3
0.3 0.00104371 5.68653e-05 9.42761e-05
0.6 0.000584193 6.57394e-05 9.42761e-05
0.75 0.000485571 7.01372e-05 9.42761e-05
0.9 0.000417321 7.45037e-05 9.42761e-05
1.05 0.000366917 7.88353e-05 9.42761e-05
1.2 0.000327972 8.31279e-05 9.42761e-05
1.35 0.000296868 8.73783e-05 9.42761e-05
1.5 0.000271391 9.1582e-05 9.42761e-05
1.8 0.000232013 9.98367e-05 9.42761e-05
2.4 0.000180411 0.000115634 9.42761e-05
3 0.000147882 0.000130301 9.42761e-05
3.6 0 0.000269043 9.42761e-05
END DIST

Metal 5 DIAGUNDER
WIDTH Table 1 entries:  0.3

Metal 5 DIAGUNDER 6
DIST count 13 width 0.3
0 0 0.000131009 9.42761e-05
0.3 0 0 9.42761e-05
0.6 0 0 9.42761e-05
0.75 0 0 9.42761e-05
0.9 0 0 9.42761e-05
1.05 0 0 9.42761e-05
1.2 0 0 9.42761e-05
1.35 0 0 9.42761e-05
1.5 0 0 9.42761e-05
1.8 0 0 9.42761e-05
2.4 0 0 9.42761e-05
3 0 0 9.42761e-05
3.6 0 0 9.42761e-05
END DIST

Metal 5 OVERUNDER
WIDTH Table 1 entries:  0.3

Metal 5 OVER 1 UNDER 6
DIST count 12 width 0.3
0.3 0.00104371 8.57331e-05 9.42761e-05
0.6 0.000584193 9.83072e-05 9.42761e-05
0.75 0.000485571 0.000104538 9.42761e-05
0.9 0.000417321 0.000110725 9.42761e-05
1.05 0.000366917 0.000116861 9.42761e-05
1.2 0.000327972 0.000122942 9.42761e-05
1.35 0.000296868 0.000128966 9.42761e-05
1.5 0.000271391 0.000134921 9.42761e-05
1.8 0.000232013 0.000146616 9.42761e-05
2.4 0.000180411 0.000168997 9.42761e-05
3 0.000147882 0.000189777 9.42761e-05
3.6 0 0.000334078 9.42761e-05
END DIST

Metal 5 OVER 2 UNDER 6
DIST count 12 width 0.3
0.3 0.00104371 0.000106276 9.42761e-05
0.6 0.000584193 0.000119204 9.42761e-05
0.75 0.000485571 0.000125611 9.42761e-05
0.9 0.000417321 0.000131972 9.42761e-05
1.05 0.000366917 0.000138283 9.42761e-05
1.2 0.000327972 0.000144537 9.42761e-05
1.35 0.000296868 0.00015073 9.42761e-05
1.5 0.000271391 0.000156855 9.42761e-05
1.8 0.000232013 0.000168879 9.42761e-05
2.4 0.000180411 0.000191893 9.42761e-05
3 0.000147882 0.000213259 9.42761e-05
3.6 0 0.000358093 9.42761e-05
END DIST

Metal 5 OVER 3 UNDER 6
DIST count 12 width 0.3
0.3 0.00104371 0.000121201 9.42761e-05
0.6 0.000584193 0.00013458 9.42761e-05
0.75 0.000485571 0.000141211 9.42761e-05
0.9 0.000417321 0.000147794 9.42761e-05
1.05 0.000366917 0.000154324 9.42761e-05
1.2 0.000327972 0.000160796 9.42761e-05
1.35 0.000296868 0.000167203 9.42761e-05
1.5 0.000271391 0.000173543 9.42761e-05
1.8 0.000232013 0.000185989 9.42761e-05
2.4 0.000180411 0.000209806 9.42761e-05
3 0.000147882 0.000231919 9.42761e-05
3.6 0 0.000377429 9.42761e-05
END DIST

Metal 5 OVER 4 UNDER 6
DIST count 12 width 0.3
0.3 0.00104371 0.000138481 9.42761e-05
0.6 0.000584193 0.000155603 9.42761e-05
0.75 0.000485571 0.000164087 9.42761e-05
0.9 0.000417321 0.000172512 9.42761e-05
1.05 0.000366917 0.00018087 9.42761e-05
1.2 0.000327972 0.000189152 9.42761e-05
1.35 0.000296868 0.000197352 9.42761e-05
1.5 0.000271391 0.000205464 9.42761e-05
1.8 0.000232013 0.00022139 9.42761e-05
2.4 0.000180411 0.000251869 9.42761e-05
3 0.000147882 0.000280167 9.42761e-05
3.6 0 0.000431302 9.42761e-05
END DIST

Metal 6 RESOVER
WIDTH Table 1 entries:  1.6

Metal 6 RESOVER 0
DIST count 55 width 1.6
0 0 0 2.27273e-05
0 1.8 0 2.27273e-05
0 3.4 0 2.27273e-05
0 4.4 0 2.27273e-05
0 5.2 0 2.27273e-05
0 6.8 0 2.27273e-05
0 7.8 0 2.27273e-05
0 8.6 0 2.27273e-05
0 10.2 0 2.27273e-05
0 13.6 0 2.27273e-05
1.8 1.8 0 2.27273e-05
1.8 3.4 0 2.27273e-05
1.8 4.4 0 2.27273e-05
1.8 5.2 0 2.27273e-05
1.8 6.8 0 2.27273e-05
1.8 7.8 0 2.27273e-05
1.8 8.6 0 2.27273e-05
1.8 10.2 0 2.27273e-05
1.8 13.6 0 2.27273e-05
3.4 3.4 0 2.27273e-05
3.4 4.4 0 2.27273e-05
3.4 5.2 0 2.27273e-05
3.4 6.8 0 2.27273e-05
3.4 7.8 0 2.27273e-05
3.4 8.6 0 2.27273e-05
3.4 10.2 0 2.27273e-05
3.4 13.6 0 2.27273e-05
4.4 4.4 0 2.27273e-05
4.4 5.2 0 2.27273e-05
4.4 6.8 0 2.27273e-05
4.4 7.8 0 2.27273e-05
4.4 8.6 0 2.27273e-05
4.4 10.2 0 2.27273e-05
4.4 13.6 0 2.27273e-05
5.2 5.2 0 2.27273e-05
5.2 6.8 0 2.27273e-05
5.2 7.8 0 2.27273e-05
5.2 8.6 0 2.27273e-05
5.2 10.2 0 2.27273e-05
5.2 13.6 0 2.27273e-05
6.8 6.8 0 2.27273e-05
6.8 7.8 0 2.27273e-05
6.8 8.6 0 2.27273e-05
6.8 10.2 0 2.27273e-05
6.8 13.6 0 2.27273e-05
7.8 7.8 0 2.27273e-05
7.8 8.6 0 2.27273e-05
7.8 10.2 0 2.27273e-05
7.8 13.6 0 2.27273e-05
8.6 8.6 0 2.27273e-05
8.6 10.2 0 2.27273e-05
8.6 13.6 0 2.27273e-05
10.2 10.2 0 2.27273e-05
10.2 13.6 0 2.27273e-05
13.6 0 13.6 2.27273e-05
END DIST

Metal 6 RESOVER 1
DIST count 0 width 1.6
END DIST

Metal 6 RESOVER 2
DIST count 0 width 1.6
END DIST

Metal 6 RESOVER 3
DIST count 0 width 1.6
END DIST

Metal 6 RESOVER 4
DIST count 0 width 1.6
END DIST

Metal 6 RESOVER 5
DIST count 0 width 1.6
END DIST

Metal 6 OVER
WIDTH Table 1 entries:  1.6

Metal 6 OVER 0
DIST count 12 width 1.6
1.6 0.000356333 3.2595e-05 1.13636e-05
3.2 0.000200417 4.18892e-05 1.13636e-05
4 0.000166347 4.52895e-05 1.13636e-05
4.8 8.99832e-05 4.34274e-05 1.13636e-05
5.6 7.71284e-05 4.71465e-05 1.13636e-05
6.4 6.74874e-05 4.987e-05 1.13636e-05
7.2 5.99888e-05 5.15309e-05 1.13636e-05
8 0 5.20881e-05 1.13636e-05
9.6 0 5.20881e-05 1.13636e-05
12.8 0 5.20881e-05 1.13636e-05
16 0 5.20881e-05 1.13636e-05
19.2 0 5.20881e-05 1.13636e-05
END DIST

Metal 6 OVER 1
DIST count 12 width 1.6
1.6 0.000356333 0.000154047 1.13636e-05
3.2 0.000200417 0.000176965 1.13636e-05
4 0.000166347 0.000185351 1.13636e-05
4.8 8.99832e-05 0.000180761 1.13636e-05
5.6 7.71284e-05 0.00018993 1.13636e-05
6.4 6.74874e-05 0.000196649 1.13636e-05
7.2 5.99888e-05 0.000200743 1.13636e-05
8 0 0.000202119 1.13636e-05
9.6 0 0.000202119 1.13636e-05
12.8 0 0.000202119 1.13636e-05
16 0 0.000202119 1.13636e-05
19.2 0 0.000202119 1.13636e-05
END DIST

Metal 6 OVER 2
DIST count 12 width 1.6
1.6 0.000356333 0.000230637 1.13636e-05
3.2 0.000200417 0.000254458 1.13636e-05
4 0.000166347 0.000263177 1.13636e-05
4.8 8.99832e-05 0.000258403 1.13636e-05
5.6 7.71284e-05 0.000267935 1.13636e-05
6.4 6.74874e-05 0.000274916 1.13636e-05
7.2 5.99888e-05 0.000279175 1.13636e-05
8 0 0.000280604 1.13636e-05
9.6 0 0.000280604 1.13636e-05
12.8 0 0.000280604 1.13636e-05
16 0 0.000280604 1.13636e-05
19.2 0 0.000280604 1.13636e-05
END DIST

Metal 6 OVER 3
DIST count 12 width 1.6
1.6 0.000356333 0.000280372 1.13636e-05
3.2 0.000200417 0.00030516 1.13636e-05
4 0.000166347 0.00031423 1.13636e-05
4.8 8.99832e-05 0.000309264 1.13636e-05
5.6 7.71284e-05 0.000319182 1.13636e-05
6.4 6.74874e-05 0.000326444 1.13636e-05
7.2 5.99888e-05 0.000330873 1.13636e-05
8 0 0.00033236 1.13636e-05
9.6 0 0.00033236 1.13636e-05
12.8 0 0.00033236 1.13636e-05
16 0 0.00033236 1.13636e-05
19.2 0 0.00033236 1.13636e-05
END DIST

Metal 6 OVER 4
DIST count 12 width 1.6
1.6 0.000356333 0.000271415 1.13636e-05
3.2 0.000200417 0.000300355 1.13636e-05
4 0.000166347 0.000310944 1.13636e-05
4.8 8.99832e-05 0.000305146 1.13636e-05
5.6 7.71284e-05 0.000316726 1.13636e-05
6.4 6.74874e-05 0.000325207 1.13636e-05
7.2 5.99888e-05 0.000330378 1.13636e-05
8 0 0.000332114 1.13636e-05
9.6 0 0.000332114 1.13636e-05
12.8 0 0.000332114 1.13636e-05
16 0 0.000332114 1.13636e-05
19.2 0 0.000332114 1.13636e-05
END DIST

Metal 6 OVER 5
DIST count 12 width 1.6
1.6 0.000356333 0.000492766 1.13636e-05
3.2 0.000200417 0.000537253 1.13636e-05
4 0.000166347 0.000553529 1.13636e-05
4.8 8.99832e-05 0.000544616 1.13636e-05
5.6 7.71284e-05 0.000562418 1.13636e-05
6.4 6.74874e-05 0.000575454 1.13636e-05
7.2 5.99888e-05 0.000583404 1.13636e-05
8 0 0.000586071 1.13636e-05
9.6 0 0.000586071 1.13636e-05
12.8 0 0.000586071 1.13636e-05
16 0 0.000586071 1.13636e-05
19.2 0 0.000586071 1.13636e-05
END DIST

Metal 6 UNDER
WIDTH Table 0 entries: 

Metal 6 DIAGUNDER
WIDTH Table 0 entries: 
END DensityModel 0