sky130/openlane/rules.openrcx.sky130B.max.magic

Extraction Rules for OpenRCX

DIAGMODEL ON

LayerCount 6
DensityRate 1  0

DensityModel 0

Metal 1 RESOVER
WIDTH Table 1 entries:  0.17

Metal 1 RESOVER 0
DIST count 55 width 0.17
0 0 0 0.10101
0 0.29 0 0.10101
0 0.46 0 0.10101
0 0.665 0 0.10101
0 0.75 0 0.10101
0 0.92 0 0.10101
0 1.125 0 0.10101
0 1.21 0 0.10101
0 1.38 0 0.10101
0 1.84 0 0.10101
0.29 0.29 0 0.10101
0.29 0.46 0 0.10101
0.29 0.665 0 0.10101
0.29 0.75 0 0.10101
0.29 0.92 0 0.10101
0.29 1.125 0 0.10101
0.29 1.21 0 0.10101
0.29 1.38 0 0.10101
0.29 1.84 0 0.10101
0.46 0.46 0 0.10101
0.46 0.665 0 0.10101
0.46 0.75 0 0.10101
0.46 0.92 0 0.10101
0.46 1.125 0 0.10101
0.46 1.21 0 0.10101
0.46 1.38 0 0.10101
0.46 1.84 0 0.10101
0.665 0.665 0 0.10101
0.665 0.75 0 0.10101
0.665 0.92 0 0.10101
0.665 1.125 0 0.10101
0.665 1.21 0 0.10101
0.665 1.38 0 0.10101
0.665 1.84 0 0.10101
0.75 0.75 0 0.10101
0.75 0.92 0 0.10101
0.75 1.125 0 0.10101
0.75 1.21 0 0.10101
0.75 1.38 0 0.10101
0.75 1.84 0 0.10101
0.92 0.92 0 0.10101
0.92 1.125 0 0.10101
0.92 1.21 0 0.10101
0.92 1.38 0 0.10101
0.92 1.84 0 0.10101
1.125 1.125 0 0.10101
1.125 1.21 0 0.10101
1.125 1.38 0 0.10101
1.125 1.84 0 0.10101
1.21 1.21 0 0.10101
1.21 1.38 0 0.10101
1.21 1.84 0 0.10101
1.38 1.38 0 0.10101
1.38 1.84 0 0.10101
1.84 0 1.84 0.10101
END DIST

Metal 1 OVER
WIDTH Table 1 entries:  0.17

Metal 1 OVER 0
DIST count 12 width 0.17
0.17 0.000673797 6.32739e-06 0.0505051
0.34 0.000336898 7.91087e-06 0.0505051
0.425 0.000269519 8.70143e-06 0.0505051
0.51 0.000224599 9.49085e-06 0.0505051
0.595 0.000192513 1.0279e-05 0.0505051
0.68 0.000168449 1.10655e-05 0.0505051
0.765 0.000149733 1.18503e-05 0.0505051
0.85 0.000134759 1.26332e-05 0.0505051
1.02 0.000112299 1.4192e-05 0.0505051
1.36 8.42246e-05 1.72764e-05 0.0505051
1.7 6.73797e-05 2.03048e-05 0.0505051
2.04 0 7.94137e-05 0.0505051
END DIST

Metal 1 UNDER
WIDTH Table 1 entries:  0.17

Metal 1 UNDER 2
DIST count 12 width 0.17
0.17 0.000673797 2.10903e-05 0.0505051
0.34 0.000336898 2.36667e-05 0.0505051
0.425 0.000269519 2.50172e-05 0.0505051
0.51 0.000224599 2.64077e-05 0.0505051
0.595 0.000192513 2.7838e-05 0.0505051
0.68 0.000168449 2.9307e-05 0.0505051
0.765 0.000149733 3.08134e-05 0.0505051
0.85 0.000134759 3.23563e-05 0.0505051
1.02 0.000112299 3.55479e-05 0.0505051
1.36 8.42246e-05 4.232e-05 0.0505051
1.7 6.73797e-05 4.9544e-05 0.0505051
2.04 0 0.000113282 0.0505051
END DIST

Metal 1 UNDER 3
DIST count 12 width 0.17
0.17 0.000673797 1.1474e-05 0.0505051
0.34 0.000336898 1.35046e-05 0.0505051
0.425 0.000269519 1.45473e-05 0.0505051
0.51 0.000224599 1.56076e-05 0.0505051
0.595 0.000192513 1.66848e-05 0.0505051
0.68 0.000168449 1.77784e-05 0.0505051
0.765 0.000149733 1.88884e-05 0.0505051
0.85 0.000134759 2.00135e-05 0.0505051
1.02 0.000112299 2.2308e-05 0.0505051
1.36 8.42246e-05 2.70536e-05 0.0505051
1.7 6.73797e-05 3.19718e-05 0.0505051
2.04 0 9.31656e-05 0.0505051
END DIST

Metal 1 UNDER 4
DIST count 12 width 0.17
0.17 0.000673797 1.06302e-05 0.0505051
0.34 0.000336898 1.25759e-05 0.0505051
0.425 0.000269519 1.35688e-05 0.0505051
0.51 0.000224599 1.45743e-05 0.0505051
0.595 0.000192513 1.55919e-05 0.0505051
0.68 0.000168449 1.66212e-05 0.0505051
0.765 0.000149733 1.76616e-05 0.0505051
0.85 0.000134759 1.87133e-05 0.0505051
1.02 0.000112299 2.08462e-05 0.0505051
1.36 8.42246e-05 2.52183e-05 0.0505051
1.7 6.73797e-05 2.96997e-05 0.0505051
2.04 0 9.04018e-05 0.0505051
END DIST

Metal 1 UNDER 5
DIST count 12 width 0.17
0.17 0.000673797 9.68182e-06 0.0505051
0.34 0.000336898 1.15236e-05 0.0505051
0.425 0.000269519 1.24588e-05 0.0505051
0.51 0.000224599 1.34023e-05 0.0505051
0.595 0.000192513 1.4354e-05 0.0505051
0.68 0.000168449 1.53138e-05 0.0505051
0.765 0.000149733 1.62812e-05 0.0505051
0.85 0.000134759 1.72558e-05 0.0505051
1.02 0.000112299 1.92244e-05 0.0505051
1.36 8.42246e-05 2.32275e-05 0.0505051
1.7 6.73797e-05 2.72929e-05 0.0505051
2.04 0 8.75386e-05 0.0505051
END DIST

Metal 1 UNDER 6
DIST count 12 width 0.17
0.17 0.000673797 9.63892e-06 0.0505051
0.34 0.000336898 1.15564e-05 0.0505051
0.425 0.000269519 1.25246e-05 0.0505051
0.51 0.000224599 1.34986e-05 0.0505051
0.595 0.000192513 1.44778e-05 0.0505051
0.68 0.000168449 1.54619e-05 0.0505051
0.765 0.000149733 1.64506e-05 0.0505051
0.85 0.000134759 1.74431e-05 0.0505051
1.02 0.000112299 1.94384e-05 0.0505051
1.36 8.42246e-05 2.34567e-05 0.0505051
1.7 6.73797e-05 2.74866e-05 0.0505051
2.04 0 8.76463e-05 0.0505051
END DIST

Metal 1 DIAGUNDER
WIDTH Table 1 entries:  0.17

Metal 1 DIAGUNDER 2
DIST count 13 width 0.17
0 0 1.69802e-05 0.0505051
0.17 0 6.95983e-06 0.0505051
0.34 0 6.94456e-06 0.0505051
0.425 0 6.93405e-06 0.0505051
0.51 0 6.92151e-06 0.0505051
0.595 0 6.90713e-06 0.0505051
0.68 0 6.89079e-06 0.0505051
0.765 0 6.87255e-06 0.0505051
0.85 0 6.85235e-06 0.0505051
1.02 0 6.8063e-06 0.0505051
1.36 0 6.6915e-06 0.0505051
1.7 0 6.54694e-06 0.0505051
2.04 0 6.37314e-06 0.0505051
END DIST

Metal 1 DIAGUNDER 3
DIST count 13 width 0.17
0 0 4.53743e-06 0.0505051
0.17 0 3.64718e-06 0.0505051
0.34 0 3.63916e-06 0.0505051
0.425 0 3.63357e-06 0.0505051
0.51 0 3.62704e-06 0.0505051
0.595 0 3.61949e-06 0.0505051
0.68 0 3.61093e-06 0.0505051
0.765 0 3.60137e-06 0.0505051
0.85 0 3.59079e-06 0.0505051
1.02 0 3.56661e-06 0.0505051
1.36 0 3.50642e-06 0.0505051
1.7 0 3.4306e-06 0.0505051
2.04 0 3.33951e-06 0.0505051
END DIST

Metal 1 DIAGUNDER 4
DIST count 13 width 0.17
0 0 3.7669e-06 0.0505051
0.17 0 4.52127e-06 0.0505051
0.34 0 4.51052e-06 0.0505051
0.425 0 4.50327e-06 0.0505051
0.51 0 4.49471e-06 0.0505051
0.595 0 4.48491e-06 0.0505051
0.68 0 4.47392e-06 0.0505051
0.765 0 4.46162e-06 0.0505051
0.85 0 4.44813e-06 0.0505051
1.02 0 4.41735e-06 0.0505051
1.36 0 4.34112e-06 0.0505051
1.7 0 4.24557e-06 0.0505051
2.04 0 4.13108e-06 0.0505051
END DIST

Metal 1 DIAGUNDER 5
DIST count 13 width 0.17
0 0 2.33179e-06 0.0505051
0.17 0 3.76916e-06 0.0505051
0.34 0 3.76025e-06 0.0505051
0.425 0 3.75419e-06 0.0505051
0.51 0 3.74712e-06 0.0505051
0.595 0 3.73904e-06 0.0505051
0.68 0 3.72989e-06 0.0505051
0.765 0 3.71967e-06 0.0505051
0.85 0 3.70844e-06 0.0505051
1.02 0 3.68289e-06 0.0505051
1.36 0 3.61949e-06 0.0505051
1.7 0 3.53999e-06 0.0505051
2.04 0 3.44474e-06 0.0505051
END DIST

Metal 1 DIAGUNDER 6
DIST count 0 width 0.17
END DIST

Metal 2 RESOVER
WIDTH Table 1 entries:  0.14

Metal 2 RESOVER 0
DIST count 55 width 0.14
0 0 0 0.00104618
0 0.2 0 0.00104618
0 0.34 0 0.00104618
0 0.47 0 0.00104618
0 0.54 0 0.00104618
0 0.68 0 0.00104618
0 0.81 0 0.00104618
0 0.88 0 0.00104618
0 1.02 0 0.00104618
0 1.36 0 0.00104618
0.2 0.2 0 0.00104618
0.2 0.34 0 0.00104618
0.2 0.47 0 0.00104618
0.2 0.54 0 0.00104618
0.2 0.68 0 0.00104618
0.2 0.81 0 0.00104618
0.2 0.88 0 0.00104618
0.2 1.02 0 0.00104618
0.2 1.36 0 0.00104618
0.34 0.34 0 0.00104618
0.34 0.47 0 0.00104618
0.34 0.54 0 0.00104618
0.34 0.68 0 0.00104618
0.34 0.81 0 0.00104618
0.34 0.88 0 0.00104618
0.34 1.02 0 0.00104618
0.34 1.36 0 0.00104618
0.47 0.47 0 0.00104618
0.47 0.54 0 0.00104618
0.47 0.68 0 0.00104618
0.47 0.81 0 0.00104618
0.47 0.88 0 0.00104618
0.47 1.02 0 0.00104618
0.47 1.36 0 0.00104618
0.54 0.54 0 0.00104618
0.54 0.68 0 0.00104618
0.54 0.81 0 0.00104618
0.54 0.88 0 0.00104618
0.54 1.02 0 0.00104618
0.54 1.36 0 0.00104618
0.68 0.68 0 0.00104618
0.68 0.81 0 0.00104618
0.68 0.88 0 0.00104618
0.68 1.02 0 0.00104618
0.68 1.36 0 0.00104618
0.81 0.81 0 0.00104618
0.81 0.88 0 0.00104618
0.81 1.02 0 0.00104618
0.81 1.36 0 0.00104618
0.88 0.88 0 0.00104618
0.88 1.02 0 0.00104618
0.88 1.36 0 0.00104618
1.02 1.02 0 0.00104618
1.02 1.36 0 0.00104618
1.36 0 1.36 0.00104618
END DIST

Metal 2 RESOVER 1
DIST count 0 width 0.14
END DIST

Metal 2 OVER
WIDTH Table 1 entries:  0.14

Metal 2 OVER 0
DIST count 12 width 0.14
0.14 0.00107504 4.40209e-06 0.000523088
0.28 0.000537518 5.77799e-06 0.000523088
0.35 0.000430014 6.46526e-06 0.000523088
0.42 0.000358345 7.15184e-06 0.000523088
0.49 0.000307153 7.83766e-06 0.000523088
0.56 0.000268759 8.52255e-06 0.000523088
0.63 0.000238898 9.20642e-06 0.000523088
0.7 0.000215007 9.88911e-06 0.000523088
0.84 0.000179173 1.12505e-05 0.000523088
1.12 0.00013438 1.39535e-05 0.000523088
1.4 0.000107504 1.66236e-05 0.000523088
1.68 0 0.000108839 0.000523088
END DIST

Metal 2 OVER 1
DIST count 12 width 0.14
0.14 0.00107504 1.39646e-05 0.000523088
0.28 0.000537518 1.62758e-05 0.000523088
0.35 0.000430014 1.74934e-05 0.000523088
0.42 0.000358345 1.87517e-05 0.000523088
0.49 0.000307153 2.00502e-05 0.000523088
0.56 0.000268759 2.13881e-05 0.000523088
0.63 0.000238898 2.27649e-05 0.000523088
0.7 0.000215007 2.41801e-05 0.000523088
0.84 0.000179173 2.7122e-05 0.000523088
1.12 0.00013438 3.3433e-05 0.000523088
1.4 0.000107504 4.02692e-05 0.000523088
1.68 0 0.000137158 0.000523088
END DIST

Metal 2 UNDER
WIDTH Table 1 entries:  0.14

Metal 2 UNDER 3
DIST count 12 width 0.14
0.14 0.00107504 1.11861e-05 0.000523088
0.28 0.000537518 1.30255e-05 0.000523088
0.35 0.000430014 1.39757e-05 0.000523088
0.42 0.000358345 1.4946e-05 0.000523088
0.49 0.000307153 1.59368e-05 0.000523088
0.56 0.000268759 1.69469e-05 0.000523088
0.63 0.000238898 1.79763e-05 0.000523088
0.7 0.000215007 1.90241e-05 0.000523088
0.84 0.000179173 2.1175e-05 0.000523088
1.12 0.00013438 2.56827e-05 0.000523088
1.4 0.000107504 3.04406e-05 0.000523088
1.68 0 0.000125001 0.000523088
END DIST

Metal 2 UNDER 4
DIST count 12 width 0.14
0.14 0.00107504 8.74105e-06 0.000523088
0.28 0.000537518 1.05043e-05 0.000523088
0.35 0.000430014 1.14089e-05 0.000523088
0.42 0.000358345 1.23288e-05 0.000523088
0.49 0.000307153 1.32631e-05 0.000523088
0.56 0.000268759 1.42118e-05 0.000523088
0.63 0.000238898 1.51747e-05 0.000523088
0.7 0.000215007 1.61513e-05 0.000523088
0.84 0.000179173 1.81439e-05 0.000523088
1.12 0.00013438 2.22775e-05 0.000523088
1.4 0.000107504 2.65874e-05 0.000523088
1.68 0 0.000120632 0.000523088
END DIST

Metal 2 UNDER 5
DIST count 12 width 0.14
0.14 0.00107504 7.41089e-06 0.000523088
0.28 0.000537518 9.05476e-06 0.000523088
0.35 0.000430014 9.89268e-06 0.000523088
0.42 0.000358345 1.07406e-05 0.000523088
0.49 0.000307153 1.15986e-05 0.000523088
0.56 0.000268759 1.24661e-05 0.000523088
0.63 0.000238898 1.33429e-05 0.000523088
0.7 0.000215007 1.42291e-05 0.000523088
0.84 0.000179173 1.60272e-05 0.000523088
1.12 0.00013438 1.97207e-05 0.000523088
1.4 0.000107504 2.35257e-05 0.000523088
1.68 0 0.000117007 0.000523088
END DIST

Metal 2 UNDER 6
DIST count 12 width 0.14
0.14 0.00107504 7.32157e-06 0.000523088
0.28 0.000537518 9.08968e-06 0.000523088
0.35 0.000430014 9.98539e-06 0.000523088
0.42 0.000358345 1.08884e-05 0.000523088
0.49 0.000307153 1.17985e-05 0.000523088
0.56 0.000268759 1.27152e-05 0.000523088
0.63 0.000238898 1.36383e-05 0.000523088
0.7 0.000215007 1.45676e-05 0.000523088
0.84 0.000179173 1.64433e-05 0.000523088
1.12 0.00013438 2.02537e-05 0.000523088
1.4 0.000107504 2.41249e-05 0.000523088
1.68 0 0.000117621 0.000523088
END DIST

Metal 2 DIAGUNDER
WIDTH Table 1 entries:  0.14

Metal 2 DIAGUNDER 3
DIST count 13 width 0.14
0 0 2.02024e-05 0.000523088
0.14 0 2.57288e-05 0.000523088
0.28 0 2.51355e-05 0.000523088
0.35 0 2.47907e-05 0.000523088
0.42 0 2.45452e-05 0.000523088
0.49 0 2.43614e-05 0.000523088
0.56 0 2.41795e-05 0.000523088
0.63 0 2.39993e-05 0.000523088
0.7 0 2.37361e-05 0.000523088
0.84 0 1.40495e-05 0.000523088
1.12 0 4.50491e-06 0.000523088
1.4 0 4.45007e-06 0.000523088
1.68 0 3.63773e-06 0.000523088
END DIST

Metal 2 DIAGUNDER 4
DIST count 13 width 0.14
0 0 1.60003e-05 0.000523088
0.14 0 2.62688e-05 0.000523088
0.28 0 2.54951e-05 0.000523088
0.35 0 2.53153e-05 0.000523088
0.42 0 2.51406e-05 0.000523088
0.49 0 2.4967e-05 0.000523088
0.56 0 1.54227e-05 0.000523088
0.63 0 5.96039e-06 0.000523088
0.7 0 5.95029e-06 0.000523088
0.84 0 5.92576e-06 0.000523088
1.12 0 5.86486e-06 0.000523088
1.4 0 5.78867e-06 0.000523088
1.68 0 4.89307e-06 0.000523088
END DIST

Metal 2 DIAGUNDER 5
DIST count 13 width 0.14
0 0 1.3464e-05 0.000523088
0.14 0 2.48539e-05 0.000523088
0.28 0 2.41877e-05 0.000523088
0.35 0 2.40088e-05 0.000523088
0.42 0 2.38348e-05 0.000523088
0.49 0 2.36623e-05 0.000523088
0.56 0 1.41197e-05 0.000523088
0.63 0 4.65945e-06 0.000523088
0.7 0 4.65159e-06 0.000523088
0.84 0 4.63261e-06 0.000523088
1.12 0 4.58521e-06 0.000523088
1.4 0 4.5259e-06 0.000523088
1.68 0 3.82294e-06 0.000523088
END DIST

Metal 2 DIAGUNDER 6
DIST count 13 width 0.14
0 0 8.05216e-06 0.000523088
0.14 0 9.78622e-06 0.000523088
0.28 0 9.74185e-06 0.000523088
0.35 0 9.71688e-06 0.000523088
0.42 0 9.69004e-06 0.000523088
0.49 0 9.6614e-06 0.000523088
0.56 0 9.63095e-06 0.000523088
0.63 0 9.5987e-06 0.000523088
0.7 0 9.56457e-06 0.000523088
0.84 0 9.49098e-06 0.000523088
1.12 0 9.32237e-06 0.000523088
1.4 0 9.12554e-06 0.000523088
1.68 0 8.90115e-06 0.000523088
END DIST

Metal 2 OVERUNDER
WIDTH Table 1 entries:  0.14

Metal 2 OVER 1 UNDER 3
DIST count 12 width 0.14
0.14 0.00107518 2.08545e-05 0.000523088
0.28 0.000537526 2.36388e-05 0.000523088
0.35 0.000430014 2.51202e-05 0.000523088
0.42 0.000358345 2.66622e-05 0.000523088
0.49 0.000307177 2.82635e-05 0.000523088
0.56 0.00026883 2.99222e-05 0.000523088
0.63 0.000239 3.16413e-05 0.000523088
0.7 0.000215063 3.34261e-05 0.000523088
0.84 0.000179236 3.71568e-05 0.000523088
1.12 0.000134419 4.52747e-05 0.000523088
1.4 0.000107504 5.42026e-05 0.000523088
1.68 0 0.000153437 0.000523088
END DIST

Metal 2 OVER 1 UNDER 4
DIST count 12 width 0.14
0.14 0.00107526 1.85201e-05 0.000523088
0.28 0.000537637 2.12277e-05 0.000523088
0.35 0.000430125 2.26635e-05 0.000523088
0.42 0.000358456 2.41552e-05 0.000523088
0.49 0.000307287 2.57e-05 0.000523088
0.56 0.000268941 2.72974e-05 0.000523088
0.63 0.000239111 2.89505e-05 0.000523088
0.7 0.000215173 3.06638e-05 0.000523088
0.84 0.000179347 3.42361e-05 0.000523088
1.12 0.00013453 4.19798e-05 0.000523088
1.4 0.000107614 5.04596e-05 0.000523088
1.68 0 0.000149289 0.000523088
END DIST

Metal 2 OVER 1 UNDER 5
DIST count 12 width 0.14
0.14 0.00107526 1.71966e-05 0.000523088
0.28 0.000537629 1.9786e-05 0.000523088
0.35 0.000430125 2.10893e-05 0.000523088
0.42 0.000358456 2.24622e-05 0.000523088
0.49 0.000307264 2.39328e-05 0.000523088
0.56 0.00026887 2.54534e-05 0.000523088
0.63 0.000239008 2.70231e-05 0.000523088
0.7 0.000215118 2.86418e-05 0.000523088
0.84 0.000179284 3.20205e-05 0.000523088
1.12 0.00013449 3.93219e-05 0.000523088
1.4 0.000107614 4.72931e-05 0.000523088
1.68 0 0.000145559 0.000523088
END DIST

Metal 2 OVER 1 UNDER 6
DIST count 12 width 0.14
0.14 0.00107515 1.69965e-05 0.000523088
0.28 0.000537518 1.96934e-05 0.000523088
0.35 0.000430014 2.10135e-05 0.000523088
0.42 0.000358345 2.24882e-05 0.000523088
0.49 0.000307153 2.4011e-05 0.000523088
0.56 0.000268759 2.55807e-05 0.000523088
0.63 0.000238898 2.71968e-05 0.000523088
0.7 0.000215007 2.88586e-05 0.000523088
0.84 0.000179173 3.23148e-05 0.000523088
1.12 0.00013438 3.97331e-05 0.000523088
1.4 0.000107504 4.77706e-05 0.000523088
1.68 0 0.00014594 0.000523088
END DIST

Metal 3 RESOVER
WIDTH Table 1 entries:  0.14

Metal 3 RESOVER 0
DIST count 55 width 0.14
0 0 0 0.00104618
0 0.32 0 0.00104618
0 0.46 0 0.00104618
0 0.71 0 0.00104618
0 0.78 0 0.00104618
0 0.92 0 0.00104618
0 1.17 0 0.00104618
0 1.24 0 0.00104618
0 1.38 0 0.00104618
0 1.84 0 0.00104618
0.32 0.32 0 0.00104618
0.32 0.46 0 0.00104618
0.32 0.71 0 0.00104618
0.32 0.78 0 0.00104618
0.32 0.92 0 0.00104618
0.32 1.17 0 0.00104618
0.32 1.24 0 0.00104618
0.32 1.38 0 0.00104618
0.32 1.84 0 0.00104618
0.46 0.46 0 0.00104618
0.46 0.71 0 0.00104618
0.46 0.78 0 0.00104618
0.46 0.92 0 0.00104618
0.46 1.17 0 0.00104618
0.46 1.24 0 0.00104618
0.46 1.38 0 0.00104618
0.46 1.84 0 0.00104618
0.71 0.71 0 0.00104618
0.71 0.78 0 0.00104618
0.71 0.92 0 0.00104618
0.71 1.17 0 0.00104618
0.71 1.24 0 0.00104618
0.71 1.38 0 0.00104618
0.71 1.84 0 0.00104618
0.78 0.78 0 0.00104618
0.78 0.92 0 0.00104618
0.78 1.17 0 0.00104618
0.78 1.24 0 0.00104618
0.78 1.38 0 0.00104618
0.78 1.84 0 0.00104618
0.92 0.92 0 0.00104618
0.92 1.17 0 0.00104618
0.92 1.24 0 0.00104618
0.92 1.38 0 0.00104618
0.92 1.84 0 0.00104618
1.17 1.17 0 0.00104618
1.17 1.24 0 0.00104618
1.17 1.38 0 0.00104618
1.17 1.84 0 0.00104618
1.24 1.24 0 0.00104618
1.24 1.38 0 0.00104618
1.24 1.84 0 0.00104618
1.38 1.38 0 0.00104618
1.38 1.84 0 0.00104618
1.84 0 1.84 0.00104618
END DIST

Metal 3 RESOVER 1
DIST count 0 width 0.14
END DIST

Metal 3 RESOVER 2
DIST count 0 width 0.14
END DIST

Metal 3 OVER
WIDTH Table 1 entries:  0.14

Metal 3 OVER 0
DIST count 12 width 0.14
0.14 0.0011443 2.96843e-06 0.000523088
0.28 0.00057215 4.08185e-06 0.000523088
0.35 0.00045772 4.63799e-06 0.000523088
0.42 0.000381433 5.19361e-06 0.000523088
0.49 0.000326942 5.74859e-06 0.000523088
0.56 0.000286075 6.30285e-06 0.000523088
0.63 0.000254289 6.85624e-06 0.000523088
0.7 0.00022886 7.40869e-06 0.000523088
0.84 0.000190717 8.51035e-06 0.000523088
1.12 0.000143038 1.06978e-05 0.000523088
1.4 0.00011443 1.28585e-05 0.000523088
1.68 0 0.000110344 0.000523088
END DIST

Metal 3 OVER 1
DIST count 12 width 0.14
0.14 0.0011443 5.64946e-06 0.000523088
0.28 0.00057215 7.32514e-06 0.000523088
0.35 0.00045772 8.1934e-06 0.000523088
0.42 0.000381433 9.08113e-06 0.000523088
0.49 0.000326942 9.98835e-06 0.000523088
0.56 0.000286075 1.09152e-05 0.000523088
0.63 0.000254289 1.18604e-05 0.000523088
0.7 0.00022886 1.2824e-05 0.000523088
0.84 0.000190717 1.48045e-05 0.000523088
1.12 0.000143038 1.89666e-05 0.000523088
1.4 0.00011443 2.337e-05 0.000523088
1.68 0 0.00012334 0.000523088
END DIST

Metal 3 OVER 2
DIST count 12 width 0.14
0.14 0.0011443 8.65942e-06 0.000523088
0.28 0.00057215 1.03517e-05 0.000523088
0.35 0.00045772 1.12297e-05 0.000523088
0.42 0.000381433 1.21285e-05 0.000523088
0.49 0.000326942 1.30479e-05 0.000523088
0.56 0.000286075 1.39872e-05 0.000523088
0.63 0.000254289 1.49461e-05 0.000523088
0.7 0.00022886 1.59246e-05 0.000523088
0.84 0.000190717 1.79374e-05 0.000523088
1.12 0.000143038 2.21747e-05 0.000523088
1.4 0.00011443 2.66674e-05 0.000523088
1.68 0 0.00012674 0.000523088
END DIST

Metal 3 UNDER
WIDTH Table 1 entries:  0.14

Metal 3 UNDER 4
DIST count 12 width 0.14
0.14 0.0011443 1.34463e-05 0.000523088
0.28 0.00057215 1.55551e-05 0.000523088
0.35 0.00045772 1.66598e-05 0.000523088
0.42 0.000381433 1.77973e-05 0.000523088
0.49 0.000326942 1.89671e-05 0.000523088
0.56 0.000286075 2.01687e-05 0.000523088
0.63 0.000254289 2.1401e-05 0.000523088
0.7 0.00022886 2.26643e-05 0.000523088
0.84 0.000190717 2.52794e-05 0.000523088
1.12 0.000143038 3.08461e-05 0.000523088
1.4 0.00011443 3.68212e-05 0.000523088
1.68 0 0.00013851 0.000523088
END DIST

Metal 3 UNDER 5
DIST count 12 width 0.14
0.14 0.0011443 7.09657e-06 0.000523088
0.28 0.00057215 8.69585e-06 0.000523088
0.35 0.00045772 9.51973e-06 0.000523088
0.42 0.000381433 1.03593e-05 0.000523088
0.49 0.000326942 1.12145e-05 0.000523088
0.56 0.000286075 1.20847e-05 0.000523088
0.63 0.000254289 1.29696e-05 0.000523088
0.7 0.00022886 1.3869e-05 0.000523088
0.84 0.000190717 1.57096e-05 0.000523088
1.12 0.000143038 1.95466e-05 0.000523088
1.4 0.00011443 2.35689e-05 0.000523088
1.68 0 0.000123107 0.000523088
END DIST

Metal 3 UNDER 6
DIST count 12 width 0.14
0.14 0.0011443 6.54448e-06 0.000523088
0.28 0.00057215 8.25256e-06 0.000523088
0.35 0.00045772 9.1224e-06 0.000523088
0.42 0.000381433 1.00023e-05 0.000523088
0.49 0.000326942 1.08919e-05 0.000523088
0.56 0.000286075 1.17909e-05 0.000523088
0.63 0.000254289 1.26989e-05 0.000523088
0.7 0.00022886 1.36155e-05 0.000523088
0.84 0.000190717 1.54731e-05 0.000523088
1.12 0.000143038 1.92747e-05 0.000523088
1.4 0.00011443 2.31695e-05 0.000523088
1.68 0 0.000122488 0.000523088
END DIST

Metal 3 DIAGUNDER
WIDTH Table 1 entries:  0.14

Metal 3 DIAGUNDER 4
DIST count 13 width 0.14
0 0 1.52667e-05 0.000523088
0.14 0 9.99372e-06 0.000523088
0.28 0 9.97612e-06 0.000523088
0.35 0 9.9645e-06 0.000523088
0.42 0 9.95101e-06 0.000523088
0.49 0 9.93564e-06 0.000523088
0.56 0 9.91833e-06 0.000523088
0.63 0 9.89921e-06 0.000523088
0.7 0 9.87821e-06 0.000523088
0.84 0 9.83059e-06 0.000523088
1.12 0 9.71306e-06 0.000523088
1.4 0 9.56623e-06 0.000523088
1.68 0 9.39055e-06 0.000523088
END DIST

Metal 3 DIAGUNDER 5
DIST count 13 width 0.14
0 0 4.37756e-06 0.000523088
0.14 0 5.5417e-06 0.000523088
0.28 0 5.53203e-06 0.000523088
0.35 0 5.52569e-06 0.000523088
0.42 0 5.51833e-06 0.000523088
0.49 0 5.50988e-06 0.000523088
0.56 0 5.50036e-06 0.000523088
0.63 0 5.48983e-06 0.000523088
0.7 0 5.47828e-06 0.000523088
0.84 0 5.45202e-06 0.000523088
1.12 0 5.38716e-06 0.000523088
1.4 0 5.30613e-06 0.000523088
1.68 0 5.20895e-06 0.000523088
END DIST

Metal 3 DIAGUNDER 6
DIST count 13 width 0.14
0 0 1.11661e-05 0.000523088
0.14 0 1.30997e-05 0.000523088
0.28 0 1.30384e-05 0.000523088
0.35 0 1.3004e-05 0.000523088
0.42 0 1.29671e-05 0.000523088
0.49 0 1.29278e-05 0.000523088
0.56 0 1.28861e-05 0.000523088
0.63 0 1.28419e-05 0.000523088
0.7 0 1.27953e-05 0.000523088
0.84 0 1.26949e-05 0.000523088
1.12 0 1.24653e-05 0.000523088
1.4 0 1.21981e-05 0.000523088
1.68 0 1.1894e-05 0.000523088
END DIST

Metal 3 OVERUNDER
WIDTH Table 1 entries:  0.14

Metal 3 OVER 1 UNDER 4
DIST count 12 width 0.14
0.14 0.0011443 1.61273e-05 0.000523088
0.28 0.00057215 1.87984e-05 0.000523088
0.35 0.00045772 2.02152e-05 0.000523088
0.42 0.000381433 2.16848e-05 0.000523088
0.49 0.000326942 2.32069e-05 0.000523088
0.56 0.000286075 2.4781e-05 0.000523088
0.63 0.000254289 2.64052e-05 0.000523088
0.7 0.00022886 2.80796e-05 0.000523088
0.84 0.000190717 3.15736e-05 0.000523088
1.12 0.000143038 3.91149e-05 0.000523088
1.4 0.00011443 4.73327e-05 0.000523088
1.68 0 0.000151506 0.000523088
END DIST

Metal 3 OVER 1 UNDER 5
DIST count 12 width 0.14
0.14 0.0011443 9.7776e-06 0.000523088
0.28 0.00057215 1.19391e-05 0.000523088
0.35 0.00045772 1.30751e-05 0.000523088
0.42 0.000381433 1.42469e-05 0.000523088
0.49 0.000326942 1.54543e-05 0.000523088
0.56 0.000286075 1.6697e-05 0.000523088
0.63 0.000254289 1.79738e-05 0.000523088
0.7 0.00022886 1.92843e-05 0.000523088
0.84 0.000190717 2.20038e-05 0.000523088
1.12 0.000143038 2.78155e-05 0.000523088
1.4 0.00011443 3.40805e-05 0.000523088
1.68 0 0.000136102 0.000523088
END DIST

Metal 3 OVER 1 UNDER 6
DIST count 12 width 0.14
0.14 0.0011443 9.22551e-06 0.000523088
0.28 0.00057215 1.14959e-05 0.000523088
0.35 0.00045772 1.26778e-05 0.000523088
0.42 0.000381433 1.38898e-05 0.000523088
0.49 0.000326942 1.51316e-05 0.000523088
0.56 0.000286075 1.64032e-05 0.000523088
0.63 0.000254289 1.77031e-05 0.000523088
0.7 0.00022886 1.90308e-05 0.000523088
0.84 0.000190717 2.17672e-05 0.000523088
1.12 0.000143038 2.75435e-05 0.000523088
1.4 0.00011443 3.36811e-05 0.000523088
1.68 0 0.000135484 0.000523088
END DIST

Metal 3 OVER 2 UNDER 4
DIST count 12 width 0.14
0.14 0.0011443 1.91373e-05 0.000523088
0.28 0.00057215 2.1825e-05 0.000523088
0.35 0.00045772 2.32515e-05 0.000523088
0.42 0.000381433 2.47322e-05 0.000523088
0.49 0.000326942 2.62665e-05 0.000523088
0.56 0.000286075 2.7853e-05 0.000523088
0.63 0.000254289 2.94909e-05 0.000523088
0.7 0.00022886 3.11802e-05 0.000523088
0.84 0.000190717 3.47065e-05 0.000523088
1.12 0.000143038 4.23229e-05 0.000523088
1.4 0.00011443 5.06301e-05 0.000523088
1.68 0 0.000154905 0.000523088
END DIST

Metal 3 OVER 2 UNDER 5
DIST count 12 width 0.14
0.14 0.0011443 1.27876e-05 0.000523088
0.28 0.00057215 1.49657e-05 0.000523088
0.35 0.00045772 1.61115e-05 0.000523088
0.42 0.000381433 1.72942e-05 0.000523088
0.49 0.000326942 1.85139e-05 0.000523088
0.56 0.000286075 1.9769e-05 0.000523088
0.63 0.000254289 2.10595e-05 0.000523088
0.7 0.00022886 2.23849e-05 0.000523088
0.84 0.000190717 2.51367e-05 0.000523088
1.12 0.000143038 3.10235e-05 0.000523088
1.4 0.00011443 3.73779e-05 0.000523088
1.68 0 0.000139502 0.000523088
END DIST

Metal 3 OVER 2 UNDER 6
DIST count 12 width 0.14
0.14 0.0011443 1.22355e-05 0.000523088
0.28 0.00057215 1.45224e-05 0.000523088
0.35 0.00045772 1.57141e-05 0.000523088
0.42 0.000381433 1.69372e-05 0.000523088
0.49 0.000326942 1.81912e-05 0.000523088
0.56 0.000286075 1.94753e-05 0.000523088
0.63 0.000254289 2.07887e-05 0.000523088
0.7 0.00022886 2.21314e-05 0.000523088
0.84 0.000190717 2.49001e-05 0.000523088
1.12 0.000143038 3.07516e-05 0.000523088
1.4 0.00011443 3.69785e-05 0.000523088
1.68 0 0.000138884 0.000523088
END DIST

Metal 4 RESOVER
WIDTH Table 1 entries:  0.3

Metal 4 RESOVER 0
DIST count 55 width 0.3
0 0 0 0.000188552
0 0.38 0 0.000188552
0 0.68 0 0.000188552
0 0.91 0 0.000188552
0 1.06 0 0.000188552
0 1.36 0 0.000188552
0 1.59 0 0.000188552
0 1.74 0 0.000188552
0 2.04 0 0.000188552
0 2.72 0 0.000188552
0.38 0.38 0 0.000188552
0.38 0.68 0 0.000188552
0.38 0.91 0 0.000188552
0.38 1.06 0 0.000188552
0.38 1.36 0 0.000188552
0.38 1.59 0 0.000188552
0.38 1.74 0 0.000188552
0.38 2.04 0 0.000188552
0.38 2.72 0 0.000188552
0.68 0.68 0 0.000188552
0.68 0.91 0 0.000188552
0.68 1.06 0 0.000188552
0.68 1.36 0 0.000188552
0.68 1.59 0 0.000188552
0.68 1.74 0 0.000188552
0.68 2.04 0 0.000188552
0.68 2.72 0 0.000188552
0.91 0.91 0 0.000188552
0.91 1.06 0 0.000188552
0.91 1.36 0 0.000188552
0.91 1.59 0 0.000188552
0.91 1.74 0 0.000188552
0.91 2.04 0 0.000188552
0.91 2.72 0 0.000188552
1.06 1.06 0 0.000188552
1.06 1.36 0 0.000188552
1.06 1.59 0 0.000188552
1.06 1.74 0 0.000188552
1.06 2.04 0 0.000188552
1.06 2.72 0 0.000188552
1.36 1.36 0 0.000188552
1.36 1.59 0 0.000188552
1.36 1.74 0 0.000188552
1.36 2.04 0 0.000188552
1.36 2.72 0 0.000188552
1.59 1.59 0 0.000188552
1.59 1.74 0 0.000188552
1.59 2.04 0 0.000188552
1.59 2.72 0 0.000188552
1.74 1.74 0 0.000188552
1.74 2.04 0 0.000188552
1.74 2.72 0 0.000188552
2.04 2.04 0 0.000188552
2.04 2.72 0 0.000188552
2.72 0 2.72 0.000188552
END DIST

Metal 4 RESOVER 1
DIST count 0 width 0.3
END DIST

Metal 4 RESOVER 2
DIST count 0 width 0.3
END DIST

Metal 4 RESOVER 3
DIST count 0 width 0.3
END DIST

Metal 4 OVER
WIDTH Table 1 entries:  0.3

Metal 4 OVER 0
DIST count 12 width 0.3
0.3 0.000786532 5.21458e-06 9.42761e-05
0.6 0.000393266 7.75417e-06 9.42761e-05
0.75 0.000314613 9.0179e-06 9.42761e-05
0.9 0.000262177 1.02761e-05 9.42761e-05
1.05 0.000224723 1.15277e-05 9.42761e-05
1.2 0.000196633 1.27716e-05 9.42761e-05
1.35 0.000174785 1.40068e-05 9.42761e-05
1.5 0.000157306 1.52321e-05 9.42761e-05
1.8 0.000131089 1.7649e-05 9.42761e-05
2.4 9.83165e-05 2.23185e-05 9.42761e-05
3 7.86532e-05 2.67155e-05 9.42761e-05
3.6 0 9.63234e-05 9.42761e-05
END DIST

Metal 4 OVER 1
DIST count 12 width 0.3
0.3 0.000786532 1.00984e-05 9.42761e-05
0.6 0.000393266 1.47105e-05 9.42761e-05
0.75 0.000314613 1.7149e-05 9.42761e-05
0.9 0.000262177 1.96688e-05 9.42761e-05
1.05 0.000224723 2.22646e-05 9.42761e-05
1.2 0.000196633 2.49307e-05 9.42761e-05
1.35 0.000174785 2.76599e-05 9.42761e-05
1.5 0.000157306 3.0448e-05 9.42761e-05
1.8 0.000131089 3.61698e-05 9.42761e-05
2.4 9.83165e-05 4.80095e-05 9.42761e-05
3 7.86532e-05 5.99878e-05 9.42761e-05
3.6 0 0.000137172 9.42761e-05
END DIST

Metal 4 OVER 2
DIST count 12 width 0.3
0.3 0.000786532 1.25821e-05 9.42761e-05
0.6 0.000393266 1.73729e-05 9.42761e-05
0.75 0.000314613 1.99126e-05 9.42761e-05
0.9 0.000262177 2.25449e-05 9.42761e-05
1.05 0.000224723 2.526e-05 9.42761e-05
1.2 0.000196633 2.8053e-05 9.42761e-05
1.35 0.000174785 3.09176e-05 9.42761e-05
1.5 0.000157306 3.3847e-05 9.42761e-05
1.8 0.000131089 3.98715e-05 9.42761e-05
2.4 9.83165e-05 5.23781e-05 9.42761e-05
3 7.86532e-05 6.50762e-05 9.42761e-05
3.6 0 0.000142986 9.42761e-05
END DIST

Metal 4 OVER 3
DIST count 12 width 0.3
0.3 0.000786532 2.61022e-05 9.42761e-05
0.6 0.000393266 3.28303e-05 9.42761e-05
0.75 0.000314613 3.64697e-05 9.42761e-05
0.9 0.000262177 4.02827e-05 9.42761e-05
1.05 0.000224723 4.4257e-05 9.42761e-05
1.2 0.000196633 4.83842e-05 9.42761e-05
1.35 0.000174785 5.26516e-05 9.42761e-05
1.5 0.000157306 5.70466e-05 9.42761e-05
1.8 0.000131089 6.61788e-05 9.42761e-05
2.4 9.83165e-05 8.54313e-05 9.42761e-05
3 7.86532e-05 0.000105271 9.42761e-05
3.6 0 0.000190329 9.42761e-05
END DIST

Metal 4 UNDER
WIDTH Table 1 entries:  0.3

Metal 4 UNDER 5
DIST count 12 width 0.3
0.3 0.000786532 2.97859e-05 9.42761e-05
0.6 0.000393266 3.56201e-05 9.42761e-05
0.75 0.000314613 3.87381e-05 9.42761e-05
0.9 0.000262177 4.19809e-05 9.42761e-05
1.05 0.000224723 4.53401e-05 9.42761e-05
1.2 0.000196633 4.88067e-05 9.42761e-05
1.35 0.000174785 5.23731e-05 9.42761e-05
1.5 0.000157306 5.60292e-05 9.42761e-05
1.8 0.000131089 6.35729e-05 9.42761e-05
2.4 9.83165e-05 7.93043e-05 9.42761e-05
3 7.86532e-05 9.53242e-05 9.42761e-05
3.6 0 0.000176474 9.42761e-05
END DIST

Metal 4 UNDER 6
DIST count 12 width 0.3
0.3 0.000786532 1.70791e-05 9.42761e-05
0.6 0.000393266 2.23808e-05 9.42761e-05
0.75 0.000314613 2.51269e-05 9.42761e-05
0.9 0.000262177 2.79284e-05 9.42761e-05
1.05 0.000224723 3.07788e-05 9.42761e-05
1.2 0.000196633 3.36714e-05 9.42761e-05
1.35 0.000174785 3.65994e-05 9.42761e-05
1.5 0.000157306 3.95561e-05 9.42761e-05
1.8 0.000131089 4.55264e-05 9.42761e-05
2.4 9.83165e-05 5.74922e-05 9.42761e-05
3 7.86532e-05 6.9101e-05 9.42761e-05
3.6 0 0.000145438 9.42761e-05
END DIST

Metal 4 DIAGUNDER
WIDTH Table 1 entries:  0.3

Metal 4 DIAGUNDER 5
DIST count 13 width 0.3
0 0 2.54636e-05 9.42761e-05
0.3 0 1.54655e-05 9.42761e-05
0.6 0 1.5358e-05 9.42761e-05
0.75 0 1.52843e-05 9.42761e-05
0.9 0 1.51973e-05 9.42761e-05
1.05 0 1.50971e-05 9.42761e-05
1.2 0 1.49838e-05 9.42761e-05
1.35 0 1.48575e-05 9.42761e-05
1.5 0 1.47184e-05 9.42761e-05
1.8 0 1.44019e-05 9.42761e-05
2.4 0 1.36202e-05 9.42761e-05
3 0 1.26498e-05 9.42761e-05
3.6 0 1.1504e-05 9.42761e-05
END DIST

Metal 4 DIAGUNDER 6
DIST count 13 width 0.3
0 0 2.13403e-05 9.42761e-05
0.3 0 2.55857e-05 9.42761e-05
0.6 0 2.52644e-05 9.42761e-05
0.75 0 2.50708e-05 9.42761e-05
0.9 0 2.48555e-05 9.42761e-05
1.05 0 2.46186e-05 9.42761e-05
1.2 0 2.43604e-05 9.42761e-05
1.35 0 2.4081e-05 9.42761e-05
1.5 0 2.37807e-05 9.42761e-05
1.8 0 2.31186e-05 9.42761e-05
2.4 0 2.15563e-05 9.42761e-05
3 0 1.96952e-05 9.42761e-05
3.6 0 1.75611e-05 9.42761e-05
END DIST

Metal 4 OVERUNDER
WIDTH Table 1 entries:  0.3

Metal 4 OVER 1 UNDER 5
DIST count 12 width 0.3
0.3 0.000786532 3.46697e-05 9.42761e-05
0.6 0.000393266 4.25765e-05 9.42761e-05
0.75 0.000314613 4.68691e-05 9.42761e-05
0.9 0.000262177 5.13736e-05 9.42761e-05
1.05 0.000224723 5.6077e-05 9.42761e-05
1.2 0.000196633 6.09657e-05 9.42761e-05
1.35 0.000174785 6.60263e-05 9.42761e-05
1.5 0.000157306 7.12451e-05 9.42761e-05
1.8 0.000131089 8.20937e-05 9.42761e-05
2.4 9.83165e-05 0.000104995 9.42761e-05
3 7.86532e-05 0.000128597 9.42761e-05
3.6 0 0.000217322 9.42761e-05
END DIST

Metal 4 OVER 1 UNDER 6
DIST count 12 width 0.3
0.3 0.000786532 2.19629e-05 9.42761e-05
0.6 0.000393266 2.93372e-05 9.42761e-05
0.75 0.000314613 3.3258e-05 9.42761e-05
0.9 0.000262177 3.73211e-05 9.42761e-05
1.05 0.000224723 4.15157e-05 9.42761e-05
1.2 0.000196633 4.58304e-05 9.42761e-05
1.35 0.000174785 5.02526e-05 9.42761e-05
1.5 0.000157306 5.47719e-05 9.42761e-05
1.8 0.000131089 6.40472e-05 9.42761e-05
2.4 9.83165e-05 8.31832e-05 9.42761e-05
3 7.86532e-05 0.000102373 9.42761e-05
3.6 0 0.000186286 9.42761e-05
END DIST

Metal 4 OVER 2 UNDER 5
DIST count 12 width 0.3
0.3 0.000786532 3.71535e-05 9.42761e-05
0.6 0.000393266 4.52389e-05 9.42761e-05
0.75 0.000314613 4.96327e-05 9.42761e-05
0.9 0.000262177 5.42497e-05 9.42761e-05
1.05 0.000224723 5.90724e-05 9.42761e-05
1.2 0.000196633 6.40881e-05 9.42761e-05
1.35 0.000174785 6.92839e-05 9.42761e-05
1.5 0.000157306 7.46441e-05 9.42761e-05
1.8 0.000131089 8.57954e-05 9.42761e-05
2.4 9.83165e-05 0.000109364 9.42761e-05
3 7.86532e-05 0.000133685 9.42761e-05
3.6 0 0.000223137 9.42761e-05
END DIST

Metal 4 OVER 2 UNDER 6
DIST count 12 width 0.3
0.3 0.000786532 2.44466e-05 9.42761e-05
0.6 0.000393266 3.19996e-05 9.42761e-05
0.75 0.000314613 3.60216e-05 9.42761e-05
0.9 0.000262177 4.01972e-05 9.42761e-05
1.05 0.000224723 4.45111e-05 9.42761e-05
1.2 0.000196633 4.89528e-05 9.42761e-05
1.35 0.000174785 5.35103e-05 9.42761e-05
1.5 0.000157306 5.81709e-05 9.42761e-05
1.8 0.000131089 6.77489e-05 9.42761e-05
2.4 9.83165e-05 8.75518e-05 9.42761e-05
3 7.86532e-05 0.000107462 9.42761e-05
3.6 0 0.000192101 9.42761e-05
END DIST

Metal 4 OVER 3 UNDER 5
DIST count 12 width 0.3
0.3 0.000786532 5.06735e-05 9.42761e-05
0.6 0.000393266 6.06962e-05 9.42761e-05
0.75 0.000314613 6.61899e-05 9.42761e-05
0.9 0.000262177 7.19875e-05 9.42761e-05
1.05 0.000224723 7.80694e-05 9.42761e-05
1.2 0.000196633 8.44193e-05 9.42761e-05
1.35 0.000174785 9.10179e-05 9.42761e-05
1.5 0.000157306 9.78438e-05 9.42761e-05
1.8 0.000131089 0.000112103 9.42761e-05
2.4 9.83165e-05 0.000142417 9.42761e-05
3 7.86532e-05 0.000173879 9.42761e-05
3.6 0 0.00027048 9.42761e-05
END DIST

Metal 4 OVER 3 UNDER 6
DIST count 12 width 0.3
0.3 0.000786532 3.79667e-05 9.42761e-05
0.6 0.000393266 4.7457e-05 9.42761e-05
0.75 0.000314613 5.25787e-05 9.42761e-05
0.9 0.000262177 5.7935e-05 9.42761e-05
1.05 0.000224723 6.35081e-05 9.42761e-05
1.2 0.000196633 6.9284e-05 9.42761e-05
1.35 0.000174785 7.52442e-05 9.42761e-05
1.5 0.000157306 8.13706e-05 9.42761e-05
1.8 0.000131089 9.40562e-05 9.42761e-05
2.4 9.83165e-05 0.000120605 9.42761e-05
3 7.86532e-05 0.000147656 9.42761e-05
3.6 0 0.000239444 9.42761e-05
END DIST

Metal 5 RESOVER
WIDTH Table 1 entries:  0.3

Metal 5 RESOVER 0
DIST count 55 width 0.3
0 0 0 0.000188552
0 0.62 0 0.000188552
0 0.92 0 0.000188552
0 1.39 0 0.000188552
0 1.54 0 0.000188552
0 1.84 0 0.000188552
0 2.31 0 0.000188552
0 2.46 0 0.000188552
0 2.76 0 0.000188552
0 3.68 0 0.000188552
0.62 0.62 0 0.000188552
0.62 0.92 0 0.000188552
0.62 1.39 0 0.000188552
0.62 1.54 0 0.000188552
0.62 1.84 0 0.000188552
0.62 2.31 0 0.000188552
0.62 2.46 0 0.000188552
0.62 2.76 0 0.000188552
0.62 3.68 0 0.000188552
0.92 0.92 0 0.000188552
0.92 1.39 0 0.000188552
0.92 1.54 0 0.000188552
0.92 1.84 0 0.000188552
0.92 2.31 0 0.000188552
0.92 2.46 0 0.000188552
0.92 2.76 0 0.000188552
0.92 3.68 0 0.000188552
1.39 1.39 0 0.000188552
1.39 1.54 0 0.000188552
1.39 1.84 0 0.000188552
1.39 2.31 0 0.000188552
1.39 2.46 0 0.000188552
1.39 2.76 0 0.000188552
1.39 3.68 0 0.000188552
1.54 1.54 0 0.000188552
1.54 1.84 0 0.000188552
1.54 2.31 0 0.000188552
1.54 2.46 0 0.000188552
1.54 2.76 0 0.000188552
1.54 3.68 0 0.000188552
1.84 1.84 0 0.000188552
1.84 2.31 0 0.000188552
1.84 2.46 0 0.000188552
1.84 2.76 0 0.000188552
1.84 3.68 0 0.000188552
2.31 2.31 0 0.000188552
2.31 2.46 0 0.000188552
2.31 2.76 0 0.000188552
2.31 3.68 0 0.000188552
2.46 2.46 0 0.000188552
2.46 2.76 0 0.000188552
2.46 3.68 0 0.000188552
2.76 2.76 0 0.000188552
2.76 3.68 0 0.000188552
3.68 0 3.68 0.000188552
END DIST

Metal 5 RESOVER 1
DIST count 0 width 0.3
END DIST

Metal 5 RESOVER 2
DIST count 0 width 0.3
END DIST

Metal 5 RESOVER 3
DIST count 0 width 0.3
END DIST

Metal 5 RESOVER 4
DIST count 0 width 0.3
END DIST

Metal 5 OVER
WIDTH Table 1 entries:  0.3

Metal 5 OVER 0
DIST count 12 width 0.3
0.3 0.00083771 4.2581e-06 9.42761e-05
0.6 0.000418855 6.59854e-06 9.42761e-05
0.75 0.000335084 7.76316e-06 9.42761e-05
0.9 0.000279237 8.92271e-06 9.42761e-05
1.05 0.000239346 1.00762e-05 9.42761e-05
1.2 0.000209428 1.12226e-05 9.42761e-05
1.35 0.000186158 1.23609e-05 9.42761e-05
1.5 0.000167542 1.34901e-05 9.42761e-05
1.8 0.000139618 1.57174e-05 9.42761e-05
2.4 0.000104714 2.00209e-05 9.42761e-05
3 8.3771e-05 2.40731e-05 9.42761e-05
3.6 0 9.76274e-05 9.42761e-05
END DIST

Metal 5 OVER 1
DIST count 12 width 0.3
0.3 0.00083771 8.16094e-06 9.42761e-05
0.6 0.000418855 1.26689e-05 9.42761e-05
0.75 0.000335084 1.50288e-05 9.42761e-05
0.9 0.000279237 1.74536e-05 9.42761e-05
1.05 0.000239346 1.99366e-05 9.42761e-05
1.2 0.000209428 2.24723e-05 9.42761e-05
1.35 0.000186158 2.50551e-05 9.42761e-05
1.5 0.000167542 2.76808e-05 9.42761e-05
1.8 0.000139618 3.30286e-05 9.42761e-05
2.4 0.000104714 4.39399e-05 9.42761e-05
3 8.3771e-05 5.4781e-05 9.42761e-05
3.6 0 0.000134929 9.42761e-05
END DIST

Metal 5 OVER 2
DIST count 12 width 0.3
0.3 0.00083771 9.28128e-06 9.42761e-05
0.6 0.000418855 1.38989e-05 9.42761e-05
0.75 0.000335084 1.63199e-05 9.42761e-05
0.9 0.000279237 1.88114e-05 9.42761e-05
1.05 0.000239346 2.1365e-05 9.42761e-05
1.2 0.000209428 2.39764e-05 9.42761e-05
1.35 0.000186158 2.66377e-05 9.42761e-05
1.5 0.000167542 2.93441e-05 9.42761e-05
1.8 0.000139618 3.48664e-05 9.42761e-05
2.4 0.000104714 4.61517e-05 9.42761e-05
3 8.3771e-05 5.7387e-05 9.42761e-05
3.6 0 0.000137931 9.42761e-05
END DIST

Metal 5 OVER 3
DIST count 12 width 0.3
0.3 0.00083771 1.18648e-05 9.42761e-05
0.6 0.000418855 1.71622e-05 9.42761e-05
0.75 0.000335084 1.99605e-05 9.42761e-05
0.9 0.000279237 2.28493e-05 9.42761e-05
1.05 0.000239346 2.58216e-05 9.42761e-05
1.2 0.000209428 2.88687e-05 9.42761e-05
1.35 0.000186158 3.19866e-05 9.42761e-05
1.5 0.000167542 3.51635e-05 9.42761e-05
1.8 0.000139618 4.16691e-05 9.42761e-05
2.4 0.000104714 5.50392e-05 9.42761e-05
3 8.3771e-05 6.84218e-05 9.42761e-05
3.6 0 0.000151051 9.42761e-05
END DIST

Metal 5 OVER 4
DIST count 12 width 0.3
0.3 0.00083771 2.68194e-05 9.42761e-05
0.6 0.000418855 3.47319e-05 9.42761e-05
0.75 0.000335084 3.89553e-05 9.42761e-05
0.9 0.000279237 4.3341e-05 9.42761e-05
1.05 0.000239346 4.78774e-05 9.42761e-05
1.2 0.000209428 5.25524e-05 9.42761e-05
1.35 0.000186158 5.73514e-05 9.42761e-05
1.5 0.000167542 6.22614e-05 9.42761e-05
1.8 0.000139618 7.23566e-05 9.42761e-05
2.4 0.000104714 9.32375e-05 9.42761e-05
3 8.3771e-05 0.000114217 9.42761e-05
3.6 0 0.000204116 9.42761e-05
END DIST

Metal 5 UNDER
WIDTH Table 1 entries:  0.3

Metal 5 UNDER 6
DIST count 12 width 0.3
0.3 0.00083771 3.01676e-05 9.42761e-05
0.6 0.000418855 3.7891e-05 9.42761e-05
0.75 0.000335084 4.18999e-05 9.42761e-05
0.9 0.000279237 4.59925e-05 9.42761e-05
1.05 0.000239346 5.01578e-05 9.42761e-05
1.2 0.000209428 5.43841e-05 9.42761e-05
1.35 0.000186158 5.86599e-05 9.42761e-05
1.5 0.000167542 6.29733e-05 9.42761e-05
1.8 0.000139618 7.16646e-05 9.42761e-05
2.4 0.000104714 8.89635e-05 9.42761e-05
3 8.3771e-05 0.000105503 9.42761e-05
3.6 0 0.000190346 9.42761e-05
END DIST

Metal 5 DIAGUNDER
WIDTH Table 1 entries:  0.3

Metal 5 DIAGUNDER 6
DIST count 13 width 0.3
0 0 4.85566e-05 9.42761e-05
0.3 0 4.51165e-05 9.42761e-05
0.6 0 4.45434e-05 9.42761e-05
0.75 0 4.4199e-05 9.42761e-05
0.9 0 4.38158e-05 9.42761e-05
1.05 0 4.3395e-05 9.42761e-05
1.2 0 4.2936e-05 9.42761e-05
1.35 0 4.24404e-05 9.42761e-05
1.5 0 4.19077e-05 9.42761e-05
1.8 0 4.07337e-05 9.42761e-05
2.4 0 3.79663e-05 9.42761e-05
3 0 3.46727e-05 9.42761e-05
3.6 0 3.08986e-05 9.42761e-05
END DIST

Metal 5 OVERUNDER
WIDTH Table 1 entries:  0.3

Metal 5 OVER 1 UNDER 6
DIST count 12 width 0.3
0.3 0.00083771 3.40704e-05 9.42761e-05
0.6 0.000418855 4.39613e-05 9.42761e-05
0.75 0.000335084 4.91655e-05 9.42761e-05
0.9 0.000279237 5.45234e-05 9.42761e-05
1.05 0.000239346 6.00182e-05 9.42761e-05
1.2 0.000209428 6.56339e-05 9.42761e-05
1.35 0.000186158 7.13541e-05 9.42761e-05
1.5 0.000167542 7.7164e-05 9.42761e-05
1.8 0.000139618 8.89757e-05 9.42761e-05
2.4 0.000104714 0.000112882 9.42761e-05
3 8.3771e-05 0.000136211 9.42761e-05
3.6 0 0.000227647 9.42761e-05
END DIST

Metal 5 OVER 2 UNDER 6
DIST count 12 width 0.3
0.3 0.00083771 3.51908e-05 9.42761e-05
0.6 0.000418855 4.51913e-05 9.42761e-05
0.75 0.000335084 5.04567e-05 9.42761e-05
0.9 0.000279237 5.58813e-05 9.42761e-05
1.05 0.000239346 6.14465e-05 9.42761e-05
1.2 0.000209428 6.7138e-05 9.42761e-05
1.35 0.000186158 7.29368e-05 9.42761e-05
1.5 0.000167542 7.88273e-05 9.42761e-05
1.8 0.000139618 9.08135e-05 9.42761e-05
2.4 0.000104714 0.000115094 9.42761e-05
3 8.3771e-05 0.000138817 9.42761e-05
3.6 0 0.000230649 9.42761e-05
END DIST

Metal 5 OVER 3 UNDER 6
DIST count 12 width 0.3
0.3 0.00083771 3.77743e-05 9.42761e-05
0.6 0.000418855 4.84546e-05 9.42761e-05
0.75 0.000335084 5.40973e-05 9.42761e-05
0.9 0.000279237 5.99191e-05 9.42761e-05
1.05 0.000239346 6.59031e-05 9.42761e-05
1.2 0.000209428 7.20303e-05 9.42761e-05
1.35 0.000186158 7.82857e-05 9.42761e-05
1.5 0.000167542 8.46467e-05 9.42761e-05
1.8 0.000139618 9.76162e-05 9.42761e-05
2.4 0.000104714 0.000123982 9.42761e-05
3 8.3771e-05 0.000149852 9.42761e-05
3.6 0 0.00024377 9.42761e-05
END DIST

Metal 5 OVER 4 UNDER 6
DIST count 12 width 0.3
0.3 0.00083771 5.27289e-05 9.42761e-05
0.6 0.000418855 6.60243e-05 9.42761e-05
0.75 0.000335084 7.3092e-05 9.42761e-05
0.9 0.000279237 8.04109e-05 9.42761e-05
1.05 0.000239346 8.79589e-05 9.42761e-05
1.2 0.000209428 9.5714e-05 9.42761e-05
1.35 0.000186158 0.00010365 9.42761e-05
1.5 0.000167542 0.000111745 9.42761e-05
1.8 0.000139618 0.000128304 9.42761e-05
2.4 0.000104714 0.00016218 9.42761e-05
3 8.3771e-05 0.000195647 9.42761e-05
3.6 0 0.000296834 9.42761e-05
END DIST

Metal 6 RESOVER
WIDTH Table 1 entries:  1.6

Metal 6 RESOVER 0
DIST count 55 width 1.6
0 0 0 2.27273e-05
0 1.8 0 2.27273e-05
0 3.4 0 2.27273e-05
0 4.4 0 2.27273e-05
0 5.2 0 2.27273e-05
0 6.8 0 2.27273e-05
0 7.8 0 2.27273e-05
0 8.6 0 2.27273e-05
0 10.2 0 2.27273e-05
0 13.6 0 2.27273e-05
1.8 1.8 0 2.27273e-05
1.8 3.4 0 2.27273e-05
1.8 4.4 0 2.27273e-05
1.8 5.2 0 2.27273e-05
1.8 6.8 0 2.27273e-05
1.8 7.8 0 2.27273e-05
1.8 8.6 0 2.27273e-05
1.8 10.2 0 2.27273e-05
1.8 13.6 0 2.27273e-05
3.4 3.4 0 2.27273e-05
3.4 4.4 0 2.27273e-05
3.4 5.2 0 2.27273e-05
3.4 6.8 0 2.27273e-05
3.4 7.8 0 2.27273e-05
3.4 8.6 0 2.27273e-05
3.4 10.2 0 2.27273e-05
3.4 13.6 0 2.27273e-05
4.4 4.4 0 2.27273e-05
4.4 5.2 0 2.27273e-05
4.4 6.8 0 2.27273e-05
4.4 7.8 0 2.27273e-05
4.4 8.6 0 2.27273e-05
4.4 10.2 0 2.27273e-05
4.4 13.6 0 2.27273e-05
5.2 5.2 0 2.27273e-05
5.2 6.8 0 2.27273e-05
5.2 7.8 0 2.27273e-05
5.2 8.6 0 2.27273e-05
5.2 10.2 0 2.27273e-05
5.2 13.6 0 2.27273e-05
6.8 6.8 0 2.27273e-05
6.8 7.8 0 2.27273e-05
6.8 8.6 0 2.27273e-05
6.8 10.2 0 2.27273e-05
6.8 13.6 0 2.27273e-05
7.8 7.8 0 2.27273e-05
7.8 8.6 0 2.27273e-05
7.8 10.2 0 2.27273e-05
7.8 13.6 0 2.27273e-05
8.6 8.6 0 2.27273e-05
8.6 10.2 0 2.27273e-05
8.6 13.6 0 2.27273e-05
10.2 10.2 0 2.27273e-05
10.2 13.6 0 2.27273e-05
13.6 0 13.6 2.27273e-05
END DIST

Metal 6 RESOVER 1
DIST count 0 width 1.6
END DIST

Metal 6 RESOVER 2
DIST count 0 width 1.6
END DIST

Metal 6 RESOVER 3
DIST count 0 width 1.6
END DIST

Metal 6 RESOVER 4
DIST count 0 width 1.6
END DIST

Metal 6 RESOVER 5
DIST count 0 width 1.6
END DIST

Metal 6 OVER
WIDTH Table 1 entries:  1.6

Metal 6 OVER 0
DIST count 12 width 1.6
1.6 0.000269949 1.96701e-05 1.13636e-05
3.2 0.000134975 3.1661e-05 1.13636e-05
4 0.00010798 3.67936e-05 1.13636e-05
4.8 8.99832e-05 4.11765e-05 1.13636e-05
5.6 7.71284e-05 4.47027e-05 1.13636e-05
6.4 6.74874e-05 4.72847e-05 1.13636e-05
7.2 5.99888e-05 4.88595e-05 1.13636e-05
8 0 4.93876e-05 1.13636e-05
9.6 0 4.93876e-05 1.13636e-05
12.8 0 4.93876e-05 1.13636e-05
16 0 4.93876e-05 1.13636e-05
19.2 0 4.93876e-05 1.13636e-05
END DIST

Metal 6 OVER 1
DIST count 12 width 1.6
1.6 0.000269949 4.71619e-05 1.13636e-05
3.2 0.000134975 7.64374e-05 1.13636e-05
4 0.00010798 8.89684e-05 1.13636e-05
4.8 8.99832e-05 9.96682e-05 1.13636e-05
5.6 7.71284e-05 0.000108278 1.13636e-05
6.4 6.74874e-05 0.000114581 1.13636e-05
7.2 5.99888e-05 0.000118424 1.13636e-05
8 0 0.000119714 1.13636e-05
9.6 0 0.000119714 1.13636e-05
12.8 0 0.000119714 1.13636e-05
16 0 0.000119714 1.13636e-05
19.2 0 0.000119714 1.13636e-05
END DIST

Metal 6 OVER 2
DIST count 12 width 1.6
1.6 0.000269949 5.18381e-05 1.13636e-05
3.2 0.000134975 8.19698e-05 1.13636e-05
4 0.00010798 9.4868e-05 1.13636e-05
4.8 8.99832e-05 0.000105883 1.13636e-05
5.6 7.71284e-05 0.000114745 1.13636e-05
6.4 6.74874e-05 0.000121233 1.13636e-05
7.2 5.99888e-05 0.000125189 1.13636e-05
8 0 0.000126517 1.13636e-05
9.6 0 0.000126517 1.13636e-05
12.8 0 0.000126517 1.13636e-05
16 0 0.000126517 1.13636e-05
19.2 0 0.000126517 1.13636e-05
END DIST

Metal 6 OVER 3
DIST count 12 width 1.6
1.6 0.000269949 6.06535e-05 1.13636e-05
3.2 0.000134975 9.40551e-05 1.13636e-05
4 0.00010798 0.000108354 1.13636e-05
4.8 8.99832e-05 0.00012056 1.13636e-05
5.6 7.71284e-05 0.000130385 1.13636e-05
6.4 6.74874e-05 0.000137577 1.13636e-05
7.2 5.99888e-05 0.000141962 1.13636e-05
8 0 0.000143435 1.13636e-05
9.6 0 0.000143435 1.13636e-05
12.8 0 0.000143435 1.13636e-05
16 0 0.000143435 1.13636e-05
19.2 0 0.000143435 1.13636e-05
END DIST

Metal 6 OVER 4
DIST count 12 width 1.6
1.6 0.000269949 8.22813e-05 1.13636e-05
3.2 0.000134975 0.000121336 1.13636e-05
4 0.00010798 0.00013805 1.13636e-05
4.8 8.99832e-05 0.000152326 1.13636e-05
5.6 7.71284e-05 0.000163811 1.13636e-05
6.4 6.74874e-05 0.00017222 1.13636e-05
7.2 5.99888e-05 0.000177349 1.13636e-05
8 0 0.000179069 1.13636e-05
9.6 0 0.000179069 1.13636e-05
12.8 0 0.000179069 1.13636e-05
16 0 0.000179069 1.13636e-05
19.2 0 0.000179069 1.13636e-05
END DIST

Metal 6 OVER 5
DIST count 12 width 1.6
1.6 0.000269949 0.000161032 1.13636e-05
3.2 0.000134975 0.00022124 1.13636e-05
4 0.00010798 0.00024701 1.13636e-05
4.8 8.99832e-05 0.000269018 1.13636e-05
5.6 7.71284e-05 0.000286724 1.13636e-05
6.4 6.74874e-05 0.000299688 1.13636e-05
7.2 5.99888e-05 0.000307595 1.13636e-05
8 0 0.000310248 1.13636e-05
9.6 0 0.000310248 1.13636e-05
12.8 0 0.000310248 1.13636e-05
16 0 0.000310248 1.13636e-05
19.2 0 0.000310248 1.13636e-05
END DIST

Metal 6 UNDER
WIDTH Table 0 entries: 

Metal 6 DIAGUNDER
WIDTH Table 0 entries: 
END DensityModel 0