sky130/openlane/rules.openrcx.sky130B.nom.magic

Extraction Rules for OpenRCX

DIAGMODEL ON

LayerCount 6
DensityRate 1  0

DensityModel 0

Metal 1 RESOVER
WIDTH Table 1 entries:  0.17

Metal 1 RESOVER 0
DIST count 55 width 0.17
0 0 0 0.0760547
0 0.29 0 0.0760547
0 0.46 0 0.0760547
0 0.665 0 0.0760547
0 0.75 0 0.0760547
0 0.92 0 0.0760547
0 1.125 0 0.0760547
0 1.21 0 0.0760547
0 1.38 0 0.0760547
0 1.84 0 0.0760547
0.29 0.29 0 0.0760547
0.29 0.46 0 0.0760547
0.29 0.665 0 0.0760547
0.29 0.75 0 0.0760547
0.29 0.92 0 0.0760547
0.29 1.125 0 0.0760547
0.29 1.21 0 0.0760547
0.29 1.38 0 0.0760547
0.29 1.84 0 0.0760547
0.46 0.46 0 0.0760547
0.46 0.665 0 0.0760547
0.46 0.75 0 0.0760547
0.46 0.92 0 0.0760547
0.46 1.125 0 0.0760547
0.46 1.21 0 0.0760547
0.46 1.38 0 0.0760547
0.46 1.84 0 0.0760547
0.665 0.665 0 0.0760547
0.665 0.75 0 0.0760547
0.665 0.92 0 0.0760547
0.665 1.125 0 0.0760547
0.665 1.21 0 0.0760547
0.665 1.38 0 0.0760547
0.665 1.84 0 0.0760547
0.75 0.75 0 0.0760547
0.75 0.92 0 0.0760547
0.75 1.125 0 0.0760547
0.75 1.21 0 0.0760547
0.75 1.38 0 0.0760547
0.75 1.84 0 0.0760547
0.92 0.92 0 0.0760547
0.92 1.125 0 0.0760547
0.92 1.21 0 0.0760547
0.92 1.38 0 0.0760547
0.92 1.84 0 0.0760547
1.125 1.125 0 0.0760547
1.125 1.21 0 0.0760547
1.125 1.38 0 0.0760547
1.125 1.84 0 0.0760547
1.21 1.21 0 0.0760547
1.21 1.38 0 0.0760547
1.21 1.84 0 0.0760547
1.38 1.38 0 0.0760547
1.38 1.84 0 0.0760547
1.84 0 1.84 0.0760547
END DIST

Metal 1 OVER
WIDTH Table 1 entries:  0.17

Metal 1 OVER 0
DIST count 12 width 0.17
0.17 0.000332739 4.95921e-06 0.0380273
0.34 0.00016637 6.32986e-06 0.0380273
0.425 0.000133096 7.01414e-06 0.0380273
0.51 0.000110913 7.69748e-06 0.0380273
0.595 9.50683e-05 8.37965e-06 0.0380273
0.68 8.31848e-05 9.06049e-06 0.0380273
0.765 7.3942e-05 9.73981e-06 0.0380273
0.85 6.65478e-05 1.04174e-05 0.0380273
1.02 5.54566e-05 1.17667e-05 0.0380273
1.36 4.15924e-05 1.44365e-05 0.0380273
1.7 3.32739e-05 1.70579e-05 0.0380273
2.04 0 4.73476e-05 0.0380273
END DIST

Metal 1 UNDER
WIDTH Table 1 entries:  0.17

Metal 1 UNDER 2
DIST count 12 width 0.17
0.17 0.000332739 1.68773e-05 0.0380273
0.34 0.00016637 1.86708e-05 0.0380273
0.425 0.000133096 1.95939e-05 0.0380273
0.51 0.000110913 2.05334e-05 0.0380273
0.595 9.50683e-05 2.1489e-05 0.0380273
0.68 8.31848e-05 2.24606e-05 0.0380273
0.765 7.3942e-05 2.34474e-05 0.0380273
0.85 6.65478e-05 2.4449e-05 0.0380273
1.02 5.54566e-05 2.64941e-05 0.0380273
1.36 4.15924e-05 3.07355e-05 0.0380273
1.7 3.32739e-05 3.51447e-05 0.0380273
2.04 0 6.74067e-05 0.0380273
END DIST

Metal 1 UNDER 3
DIST count 12 width 0.17
0.17 0.000332739 8.64697e-06 0.0380273
0.34 0.00016637 1.02208e-05 0.0380273
0.425 0.000133096 1.10197e-05 0.0380273
0.51 0.000110913 1.1826e-05 0.0380273
0.595 9.50683e-05 1.26395e-05 0.0380273
0.68 8.31848e-05 1.34602e-05 0.0380273
0.765 7.3942e-05 1.42872e-05 0.0380273
0.85 6.65478e-05 1.51205e-05 0.0380273
1.02 5.54566e-05 1.6804e-05 0.0380273
1.36 4.15924e-05 2.02288e-05 0.0380273
1.7 3.32739e-05 2.37092e-05 0.0380273
2.04 0 5.49462e-05 0.0380273
END DIST

Metal 1 UNDER 4
DIST count 12 width 0.17
0.17 0.000332739 7.77917e-06 0.0380273
0.34 0.00016637 9.31887e-06 0.0380273
0.425 0.000133096 1.00976e-05 0.0380273
0.51 0.000110913 1.08818e-05 0.0380273
0.595 9.50683e-05 1.16713e-05 0.0380273
0.68 8.31848e-05 1.24655e-05 0.0380273
0.765 7.3942e-05 1.32643e-05 0.0380273
0.85 6.65478e-05 1.40675e-05 0.0380273
1.02 5.54566e-05 1.5685e-05 0.0380273
1.36 4.15924e-05 1.8956e-05 0.0380273
1.7 3.32739e-05 2.22563e-05 0.0380273
2.04 0 5.32899e-05 0.0380273
END DIST

Metal 1 UNDER 5
DIST count 12 width 0.17
0.17 0.000332739 7.01245e-06 0.0380273
0.34 0.00016637 8.50431e-06 0.0380273
0.425 0.000133096 9.25603e-06 0.0380273
0.51 0.000110913 1.00115e-05 0.0380273
0.595 9.50683e-05 1.07704e-05 0.0380273
0.68 8.31848e-05 1.15324e-05 0.0380273
0.765 7.3942e-05 1.22973e-05 0.0380273
0.85 6.65478e-05 1.30646e-05 0.0380273
1.02 5.54566e-05 1.46058e-05 0.0380273
1.36 4.15924e-05 1.77059e-05 0.0380273
1.7 3.32739e-05 2.08128e-05 0.0380273
2.04 0 5.16349e-05 0.0380273
END DIST

Metal 1 UNDER 6
DIST count 12 width 0.17
0.17 0.000332739 6.8686e-06 0.0380273
0.34 0.00016637 8.39498e-06 0.0380273
0.425 0.000133096 9.16215e-06 0.0380273
0.51 0.000110913 9.9314e-06 0.0380273
0.595 9.50683e-05 1.07028e-05 0.0380273
0.68 8.31848e-05 1.14758e-05 0.0380273
0.765 7.3942e-05 1.22501e-05 0.0380273
0.85 6.65478e-05 1.30256e-05 0.0380273
1.02 5.54566e-05 1.45786e-05 0.0380273
1.36 4.15924e-05 1.76838e-05 0.0380273
1.7 3.32739e-05 2.07724e-05 0.0380273
2.04 0 5.15521e-05 0.0380273
END DIST

Metal 1 DIAGUNDER
WIDTH Table 1 entries:  0.17

Metal 1 DIAGUNDER 2
DIST count 13 width 0.17
0 0 1.65035e-05 0.0380273
0.17 0 2.96595e-06 0.0380273
0.34 0 2.95942e-06 0.0380273
0.425 0 2.9549e-06 0.0380273
0.51 0 2.94961e-06 0.0380273
0.595 0 2.94343e-06 0.0380273
0.68 0 2.93648e-06 0.0380273
0.765 0 2.92876e-06 0.0380273
0.85 0 2.92014e-06 0.0380273
1.02 0 2.90048e-06 0.0380273
1.36 0 2.85157e-06 0.0380273
1.7 0 2.78996e-06 0.0380273
2.04 0 2.71592e-06 0.0380273
END DIST

Metal 1 DIAGUNDER 3
DIST count 13 width 0.17
0 0 4.2839e-06 0.0380273
0.17 0 1.6574e-06 0.0380273
0.34 0 1.65371e-06 0.0380273
0.425 0 1.65122e-06 0.0380273
0.51 0 1.64825e-06 0.0380273
0.595 0 1.6448e-06 0.0380273
0.68 0 1.64094e-06 0.0380273
0.765 0 1.6366e-06 0.0380273
0.85 0 1.63179e-06 0.0380273
1.02 0 1.6208e-06 0.0380273
1.36 0 1.59346e-06 0.0380273
1.7 0 1.559e-06 0.0380273
2.04 0 1.51759e-06 0.0380273
END DIST

Metal 1 DIAGUNDER 4
DIST count 13 width 0.17
0 0 3.3874e-06 0.0380273
0.17 0 2.11182e-06 0.0380273
0.34 0 2.10677e-06 0.0380273
0.425 0 2.10339e-06 0.0380273
0.51 0 2.09941e-06 0.0380273
0.595 0 2.09483e-06 0.0380273
0.68 0 2.08966e-06 0.0380273
0.765 0 2.08396e-06 0.0380273
0.85 0 2.07766e-06 0.0380273
1.02 0 2.06328e-06 0.0380273
1.36 0 2.02769e-06 0.0380273
1.7 0 1.98301e-06 0.0380273
2.04 0 1.92953e-06 0.0380273
END DIST

Metal 1 DIAGUNDER 5
DIST count 13 width 0.17
0 0 2.06162e-06 0.0380273
0.17 0 1.76494e-06 0.0380273
0.34 0 1.76078e-06 0.0380273
0.425 0 1.75799e-06 0.0380273
0.51 0 1.75466e-06 0.0380273
0.595 0 1.75086e-06 0.0380273
0.68 0 1.74658e-06 0.0380273
0.765 0 1.74183e-06 0.0380273
0.85 0 1.73654e-06 0.0380273
1.02 0 1.7246e-06 0.0380273
1.36 0 1.69489e-06 0.0380273
1.7 0 1.65764e-06 0.0380273
2.04 0 1.61307e-06 0.0380273
END DIST

Metal 1 DIAGUNDER 6
DIST count 0 width 0.17
END DIST

Metal 2 RESOVER
WIDTH Table 1 entries:  0.14

Metal 2 RESOVER 0
DIST count 55 width 0.14
0 0 0 0.000901876
0 0.2 0 0.000901876
0 0.34 0 0.000901876
0 0.47 0 0.000901876
0 0.54 0 0.000901876
0 0.68 0 0.000901876
0 0.81 0 0.000901876
0 0.88 0 0.000901876
0 1.02 0 0.000901876
0 1.36 0 0.000901876
0.2 0.2 0 0.000901876
0.2 0.34 0 0.000901876
0.2 0.47 0 0.000901876
0.2 0.54 0 0.000901876
0.2 0.68 0 0.000901876
0.2 0.81 0 0.000901876
0.2 0.88 0 0.000901876
0.2 1.02 0 0.000901876
0.2 1.36 0 0.000901876
0.34 0.34 0 0.000901876
0.34 0.47 0 0.000901876
0.34 0.54 0 0.000901876
0.34 0.68 0 0.000901876
0.34 0.81 0 0.000901876
0.34 0.88 0 0.000901876
0.34 1.02 0 0.000901876
0.34 1.36 0 0.000901876
0.47 0.47 0 0.000901876
0.47 0.54 0 0.000901876
0.47 0.68 0 0.000901876
0.47 0.81 0 0.000901876
0.47 0.88 0 0.000901876
0.47 1.02 0 0.000901876
0.47 1.36 0 0.000901876
0.54 0.54 0 0.000901876
0.54 0.68 0 0.000901876
0.54 0.81 0 0.000901876
0.54 0.88 0 0.000901876
0.54 1.02 0 0.000901876
0.54 1.36 0 0.000901876
0.68 0.68 0 0.000901876
0.68 0.81 0 0.000901876
0.68 0.88 0 0.000901876
0.68 1.02 0 0.000901876
0.68 1.36 0 0.000901876
0.81 0.81 0 0.000901876
0.81 0.88 0 0.000901876
0.81 1.02 0 0.000901876
0.81 1.36 0 0.000901876
0.88 0.88 0 0.000901876
0.88 1.02 0 0.000901876
0.88 1.36 0 0.000901876
1.02 1.02 0 0.000901876
1.02 1.36 0 0.000901876
1.36 0 1.36 0.000901876
END DIST

Metal 2 RESOVER 1
DIST count 0 width 0.14
END DIST

Metal 2 OVER
WIDTH Table 1 entries:  0.14

Metal 2 OVER 0
DIST count 12 width 0.14
0.14 0.000532468 3.35913e-06 0.000450938
0.28 0.000266234 4.48478e-06 0.000450938
0.35 0.000212987 5.04701e-06 0.000450938
0.42 0.000177489 5.60869e-06 0.000450938
0.49 0.000152134 6.16977e-06 0.000450938
0.56 0.000133117 6.73009e-06 0.000450938
0.63 0.000118326 7.28957e-06 0.000450938
0.7 0.000106494 7.84809e-06 0.000450938
0.84 8.87446e-05 8.96183e-06 0.000450938
1.12 6.65584e-05 1.11732e-05 0.000450938
1.4 5.32468e-05 1.33576e-05 0.000450938
1.68 0 5.98807e-05 0.000450938
END DIST

Metal 2 OVER 1
DIST count 12 width 0.14
0.14 0.000532468 1.16392e-05 0.000450938
0.28 0.000266234 1.30842e-05 0.000450938
0.35 0.000212987 1.38274e-05 0.000450938
0.42 0.000177489 1.45846e-05 0.000450938
0.49 0.000152134 1.53547e-05 0.000450938
0.56 0.000133117 1.61382e-05 0.000450938
0.63 0.000118326 1.69345e-05 0.000450938
0.7 0.000106494 1.7743e-05 0.000450938
0.84 8.87446e-05 1.93964e-05 0.000450938
1.12 6.65584e-05 2.28399e-05 0.000450938
1.4 5.32468e-05 2.64473e-05 0.000450938
1.68 0 7.45666e-05 0.000450938
END DIST

Metal 2 UNDER
WIDTH Table 1 entries:  0.14

Metal 2 UNDER 3
DIST count 12 width 0.14
0.14 0.000532468 8.77702e-06 0.000450938
0.28 0.000266234 1.00859e-05 0.000450938
0.35 0.000212987 1.07523e-05 0.000450938
0.42 0.000177489 1.14264e-05 0.000450938
0.49 0.000152134 1.2108e-05 0.000450938
0.56 0.000133117 1.2797e-05 0.000450938
0.63 0.000118326 1.34933e-05 0.000450938
0.7 0.000106494 1.41964e-05 0.000450938
0.84 8.87446e-05 1.56225e-05 0.000450938
1.12 6.65584e-05 1.85482e-05 0.000450938
1.4 5.32468e-05 2.15591e-05 0.000450938
1.68 0 6.90102e-05 0.000450938
END DIST

Metal 2 UNDER 4
DIST count 12 width 0.14
0.14 0.000532468 6.38366e-06 0.000450938
0.28 0.000266234 7.68975e-06 0.000450938
0.35 0.000212987 8.35321e-06 0.000450938
0.42 0.000177489 9.02356e-06 0.000450938
0.49 0.000152134 9.70022e-06 0.000450938
0.56 0.000133117 1.03835e-05 0.000450938
0.63 0.000118326 1.1073e-05 0.000450938
0.7 0.000106494 1.17683e-05 0.000450938
0.84 8.87446e-05 1.31759e-05 0.000450938
1.12 6.65584e-05 1.60538e-05 0.000450938
1.4 5.32468e-05 1.90018e-05 0.000450938
1.68 0 6.63765e-05 0.000450938
END DIST

Metal 2 UNDER 5
DIST count 12 width 0.14
0.14 0.000532468 5.26418e-06 0.000450938
0.28 0.000266234 6.51587e-06 0.000450938
0.35 0.000212987 7.14845e-06 0.000450938
0.42 0.000177489 7.78597e-06 0.000450938
0.49 0.000152134 8.42821e-06 0.000450938
0.56 0.000133117 9.07395e-06 0.000450938
0.63 0.000118326 9.72413e-06 0.000450938
0.7 0.000106494 1.03781e-05 0.000450938
0.84 8.87446e-05 1.16969e-05 0.000450938
1.12 6.65584e-05 1.43736e-05 0.000450938
1.4 5.32468e-05 1.70912e-05 0.000450938
1.68 0 6.42086e-05 0.000450938
END DIST

Metal 2 UNDER 6
DIST count 12 width 0.14
0.14 0.000532468 5.07969e-06 0.000450938
0.28 0.000266234 6.38824e-06 0.000450938
0.35 0.000212987 7.04773e-06 0.000450938
0.42 0.000177489 7.71021e-06 0.000450938
0.49 0.000152134 8.37583e-06 0.000450938
0.56 0.000133117 9.04423e-06 0.000450938
0.63 0.000118326 9.71533e-06 0.000450938
0.7 0.000106494 1.03889e-05 0.000450938
0.84 8.87446e-05 1.17423e-05 0.000450938
1.12 6.65584e-05 1.44701e-05 0.000450938
1.4 5.32468e-05 1.72145e-05 0.000450938
1.68 0 6.43346e-05 0.000450938
END DIST

Metal 2 DIAGUNDER
WIDTH Table 1 entries:  0.14

Metal 2 DIAGUNDER 3
DIST count 13 width 0.14
0 0 1.44988e-05 0.000450938
0.14 0 1.22377e-05 0.000450938
0.28 0 1.19736e-05 0.000450938
0.35 0 1.18181e-05 0.000450938
0.42 0 1.17023e-05 0.000450938
0.49 0 1.16113e-05 0.000450938
0.56 0 1.15214e-05 0.000450938
0.63 0 1.14323e-05 0.000450938
0.7 0 1.13024e-05 0.000450938
0.84 0 6.50599e-06 0.000450938
1.12 0 1.7829e-06 0.000450938
1.4 0 1.76118e-06 0.000450938
1.68 0 1.43968e-06 0.000450938
END DIST

Metal 2 DIAGUNDER 4
DIST count 13 width 0.14
0 0 9.78377e-06 0.000450938
0.14 0 1.2819e-05 0.000450938
0.28 0 1.24505e-05 0.000450938
0.35 0 1.23615e-05 0.000450938
0.42 0 1.22751e-05 0.000450938
0.49 0 1.21892e-05 0.000450938
0.56 0 7.46219e-06 0.000450938
0.63 0 2.77576e-06 0.000450938
0.7 0 2.77107e-06 0.000450938
0.84 0 2.75967e-06 0.000450938
1.12 0 2.73131e-06 0.000450938
1.4 0 2.69582e-06 0.000450938
1.68 0 2.27872e-06 0.000450938
END DIST

Metal 2 DIAGUNDER 5
DIST count 13 width 0.14
0 0 7.57763e-06 0.000450938
0.14 0 1.21799e-05 0.000450938
0.28 0 1.186e-05 0.000450938
0.35 0 1.17714e-05 0.000450938
0.42 0 1.16854e-05 0.000450938
0.49 0 1.16e-05 0.000450938
0.56 0 6.87366e-06 0.000450938
0.63 0 2.1881e-06 0.000450938
0.7 0 2.18449e-06 0.000450938
0.84 0 2.17554e-06 0.000450938
1.12 0 2.15332e-06 0.000450938
1.4 0 2.12547e-06 0.000450938
1.68 0 1.79531e-06 0.000450938
END DIST

Metal 2 DIAGUNDER 6
DIST count 13 width 0.14
0 0 4.41623e-06 0.000450938
0.14 0 4.56284e-06 0.000450938
0.28 0 4.54214e-06 0.000450938
0.35 0 4.53052e-06 0.000450938
0.42 0 4.51804e-06 0.000450938
0.49 0 4.50469e-06 0.000450938
0.56 0 4.49048e-06 0.000450938
0.63 0 4.4754e-06 0.000450938
0.7 0 4.45952e-06 0.000450938
0.84 0 4.42518e-06 0.000450938
1.12 0 4.34654e-06 0.000450938
1.4 0 4.25476e-06 0.000450938
1.68 0 4.15014e-06 0.000450938
END DIST

Metal 2 OVERUNDER
WIDTH Table 1 entries:  0.14

Metal 2 OVER 1 UNDER 3
DIST count 12 width 0.14
0.14 0.000532536 1.70993e-05 0.000450938
0.28 0.000266238 1.87339e-05 0.000450938
0.35 0.000212987 1.95818e-05 0.000450938
0.42 0.000177489 2.04514e-05 0.000450938
0.49 0.000152146 2.13407e-05 0.000450938
0.56 0.000133152 2.22498e-05 0.000450938
0.63 0.000118377 2.31807e-05 0.000450938
0.7 0.000106521 2.41369e-05 0.000450938
0.84 8.87759e-05 2.61023e-05 0.000450938
1.12 6.6578e-05 3.02615e-05 0.000450938
1.4 5.32468e-05 3.46979e-05 0.000450938
1.68 0 8.37453e-05 0.000450938
END DIST

Metal 2 OVER 1 UNDER 4
DIST count 12 width 0.14
0.14 0.000532577 1.47458e-05 0.000450938
0.28 0.000266293 1.63775e-05 0.000450938
0.35 0.000213042 1.72225e-05 0.000450938
0.42 0.000177544 1.80883e-05 0.000450938
0.49 0.000152201 1.89726e-05 0.000450938
0.56 0.000133207 1.9876e-05 0.000450938
0.63 0.000118432 2.08004e-05 0.000450938
0.7 0.000106576 2.17486e-05 0.000450938
0.84 8.88307e-05 2.36953e-05 0.000450938
1.12 6.66328e-05 2.7807e-05 0.000450938
1.4 5.33016e-05 3.21804e-05 0.000450938
1.68 0 8.12062e-05 0.000450938
END DIST

Metal 2 OVER 1 UNDER 5
DIST count 12 width 0.14
0.14 0.000532577 1.36331e-05 0.000450938
0.28 0.000266289 1.52111e-05 0.000450938
0.35 0.000213042 1.59994e-05 0.000450938
0.42 0.000177544 1.68106e-05 0.000450938
0.49 0.000152189 1.76619e-05 0.000450938
0.56 0.000133172 1.85308e-05 0.000450938
0.63 0.000118381 1.94178e-05 0.000450938
0.7 0.000106548 2.03217e-05 0.000450938
0.84 8.87994e-05 2.21803e-05 0.000450938
1.12 6.66133e-05 2.60891e-05 0.000450938
1.4 5.33016e-05 3.02297e-05 0.000450938
1.68 0 7.89982e-05 0.000450938
END DIST

Metal 2 OVER 1 UNDER 6
DIST count 12 width 0.14
0.14 0.000532522 1.34045e-05 0.000450938
0.28 0.000266234 1.50326e-05 0.000450938
0.35 0.000212987 1.58281e-05 0.000450938
0.42 0.000177489 1.66861e-05 0.000450938
0.49 0.000152134 1.75608e-05 0.000450938
0.56 0.000133117 1.84523e-05 0.000450938
0.63 0.000118326 1.93602e-05 0.000450938
0.7 0.000106494 2.02838e-05 0.000450938
0.84 8.87446e-05 2.21769e-05 0.000450938
1.12 6.65584e-05 2.61368e-05 0.000450938
1.4 5.32468e-05 3.03042e-05 0.000450938
1.68 0 7.90205e-05 0.000450938
END DIST

Metal 3 RESOVER
WIDTH Table 1 entries:  0.14

Metal 3 RESOVER 0
DIST count 55 width 0.14
0 0 0 0.000901876
0 0.32 0 0.000901876
0 0.46 0 0.000901876
0 0.71 0 0.000901876
0 0.78 0 0.000901876
0 0.92 0 0.000901876
0 1.17 0 0.000901876
0 1.24 0 0.000901876
0 1.38 0 0.000901876
0 1.84 0 0.000901876
0.32 0.32 0 0.000901876
0.32 0.46 0 0.000901876
0.32 0.71 0 0.000901876
0.32 0.78 0 0.000901876
0.32 0.92 0 0.000901876
0.32 1.17 0 0.000901876
0.32 1.24 0 0.000901876
0.32 1.38 0 0.000901876
0.32 1.84 0 0.000901876
0.46 0.46 0 0.000901876
0.46 0.71 0 0.000901876
0.46 0.78 0 0.000901876
0.46 0.92 0 0.000901876
0.46 1.17 0 0.000901876
0.46 1.24 0 0.000901876
0.46 1.38 0 0.000901876
0.46 1.84 0 0.000901876
0.71 0.71 0 0.000901876
0.71 0.78 0 0.000901876
0.71 0.92 0 0.000901876
0.71 1.17 0 0.000901876
0.71 1.24 0 0.000901876
0.71 1.38 0 0.000901876
0.71 1.84 0 0.000901876
0.78 0.78 0 0.000901876
0.78 0.92 0 0.000901876
0.78 1.17 0 0.000901876
0.78 1.24 0 0.000901876
0.78 1.38 0 0.000901876
0.78 1.84 0 0.000901876
0.92 0.92 0 0.000901876
0.92 1.17 0 0.000901876
0.92 1.24 0 0.000901876
0.92 1.38 0 0.000901876
0.92 1.84 0 0.000901876
1.17 1.17 0 0.000901876
1.17 1.24 0 0.000901876
1.17 1.38 0 0.000901876
1.17 1.84 0 0.000901876
1.24 1.24 0 0.000901876
1.24 1.38 0 0.000901876
1.24 1.84 0 0.000901876
1.38 1.38 0 0.000901876
1.38 1.84 0 0.000901876
1.84 0 1.84 0.000901876
END DIST

Metal 3 RESOVER 1
DIST count 0 width 0.14
END DIST

Metal 3 RESOVER 2
DIST count 0 width 0.14
END DIST

Metal 3 OVER
WIDTH Table 1 entries:  0.14

Metal 3 OVER 0
DIST count 12 width 0.14
0.14 0.000564214 2.28813e-06 0.000450938
0.28 0.000282107 3.20152e-06 0.000450938
0.35 0.000225685 3.65772e-06 0.000450938
0.42 0.000188071 4.11353e-06 0.000450938
0.49 0.000161203 4.56879e-06 0.000450938
0.56 0.000141053 5.02345e-06 0.000450938
0.63 0.000125381 5.47742e-06 0.000450938
0.7 0.000112843 5.93063e-06 0.000450938
0.84 9.40356e-05 6.83438e-06 0.000450938
1.12 7.05267e-05 8.62879e-06 0.000450938
1.4 5.64214e-05 1.04013e-05 0.000450938
1.68 0 5.91642e-05 0.000450938
END DIST

Metal 3 OVER 1
DIST count 12 width 0.14
0.14 0.000564214 4.3614e-06 0.000450938
0.28 0.000282107 5.45884e-06 0.000450938
0.35 0.000225685 6.0176e-06 0.000450938
0.42 0.000188071 6.5825e-06 0.000450938
0.49 0.000161203 7.15332e-06 0.000450938
0.56 0.000141053 7.73001e-06 0.000450938
0.63 0.000125381 8.31277e-06 0.000450938
0.7 0.000112843 8.9e-06 0.000450938
0.84 9.40356e-05 1.00926e-05 0.000450938
1.12 7.05267e-05 1.25344e-05 0.000450938
1.4 5.64214e-05 1.50418e-05 0.000450938
1.68 0 6.46196e-05 0.000450938
END DIST

Metal 3 OVER 2
DIST count 12 width 0.14
0.14 0.000564214 6.96133e-06 0.000450938
0.28 0.000282107 8.02269e-06 0.000450938
0.35 0.000225685 8.56144e-06 0.000450938
0.42 0.000188071 9.10483e-06 0.000450938
0.49 0.000161203 9.65328e-06 0.000450938
0.56 0.000141053 1.02063e-05 0.000450938
0.63 0.000125381 1.07645e-05 0.000450938
0.7 0.000112843 1.13266e-05 0.000450938
0.84 9.40356e-05 1.24635e-05 0.000450938
1.12 7.05267e-05 1.47824e-05 0.000450938
1.4 5.64214e-05 1.71514e-05 0.000450938
1.68 0 6.65762e-05 0.000450938
END DIST

Metal 3 UNDER
WIDTH Table 1 entries:  0.14

Metal 3 UNDER 4
DIST count 12 width 0.14
0.14 0.000564214 1.03711e-05 0.000450938
0.28 0.000282107 1.17402e-05 0.000450938
0.35 0.000225685 1.24478e-05 0.000450938
0.42 0.000188071 1.317e-05 0.000450938
0.49 0.000161203 1.39067e-05 0.000450938
0.56 0.000141053 1.46577e-05 0.000450938
0.63 0.000125381 1.54229e-05 0.000450938
0.7 0.000112843 1.62013e-05 0.000450938
0.84 9.40356e-05 1.77981e-05 0.000450938
1.12 7.05267e-05 2.11403e-05 0.000450938
1.4 5.64214e-05 2.46593e-05 0.000450938
1.68 0 7.53471e-05 0.000450938
END DIST

Metal 3 UNDER 5
DIST count 12 width 0.14
0.14 0.000564214 4.98979e-06 0.000450938
0.28 0.000282107 6.13232e-06 0.000450938
0.35 0.000225685 6.71501e-06 0.000450938
0.42 0.000188071 7.3048e-06 0.000450938
0.49 0.000161203 7.90126e-06 0.000450938
0.56 0.000141053 8.50491e-06 0.000450938
0.63 0.000125381 9.11544e-06 0.000450938
0.7 0.000112843 9.73193e-06 0.000450938
0.84 9.40356e-05 1.0984e-05 0.000450938
1.12 7.05267e-05 1.35563e-05 0.000450938
1.4 5.64214e-05 1.62068e-05 0.000450938
1.68 0 6.5937e-05 0.000450938
END DIST

Metal 3 UNDER 6
DIST count 12 width 0.14
0.14 0.000564214 4.42291e-06 0.000450938
0.28 0.000282107 5.61501e-06 0.000450938
0.35 0.000225685 6.21818e-06 0.000450938
0.42 0.000188071 6.82601e-06 0.000450938
0.49 0.000161203 7.43799e-06 0.000450938
0.56 0.000141053 8.05433e-06 0.000450938
0.63 0.000125381 8.67439e-06 0.000450938
0.7 0.000112843 9.2983e-06 0.000450938
0.84 9.40356e-05 1.05563e-05 0.000450938
1.12 7.05267e-05 1.31072e-05 0.000450938
1.4 5.64214e-05 1.56923e-05 0.000450938
1.68 0 6.53145e-05 0.000450938
END DIST

Metal 3 DIAGUNDER
WIDTH Table 1 entries:  0.14

Metal 3 DIAGUNDER 4
DIST count 13 width 0.14
0 0 1.35982e-05 0.000450938
0.14 0 4.5767e-06 0.000450938
0.28 0 4.56869e-06 0.000450938
0.35 0 4.56335e-06 0.000450938
0.42 0 4.55714e-06 0.000450938
0.49 0 4.55007e-06 0.000450938
0.56 0 4.54221e-06 0.000450938
0.63 0 4.53341e-06 0.000450938
0.7 0 4.52381e-06 0.000450938
0.84 0 4.50202e-06 0.000450938
1.12 0 4.4482e-06 0.000450938
1.4 0 4.38095e-06 0.000450938
1.68 0 4.3005e-06 0.000450938
END DIST

Metal 3 DIAGUNDER 5
DIST count 13 width 0.14
0 0 3.58348e-06 0.000450938
0.14 0 2.61299e-06 0.000450938
0.28 0 2.60844e-06 0.000450938
0.35 0 2.60541e-06 0.000450938
0.42 0 2.60195e-06 0.000450938
0.49 0 2.59798e-06 0.000450938
0.56 0 2.59351e-06 0.000450938
0.63 0 2.58853e-06 0.000450938
0.7 0 2.58304e-06 0.000450938
0.84 0 2.57071e-06 0.000450938
1.12 0 2.54012e-06 0.000450938
1.4 0 2.50188e-06 0.000450938
1.68 0 2.45613e-06 0.000450938
END DIST

Metal 3 DIAGUNDER 6
DIST count 13 width 0.14
0 0 6.08499e-06 0.000450938
0.14 0 6.13903e-06 0.000450938
0.28 0 6.11032e-06 0.000450938
0.35 0 6.09416e-06 0.000450938
0.42 0 6.07691e-06 0.000450938
0.49 0 6.05851e-06 0.000450938
0.56 0 6.03896e-06 0.000450938
0.63 0 6.01825e-06 0.000450938
0.7 0 5.99639e-06 0.000450938
0.84 0 5.94935e-06 0.000450938
1.12 0 5.84178e-06 0.000450938
1.4 0 5.71652e-06 0.000450938
1.68 0 5.57403e-06 0.000450938
END DIST

Metal 3 OVERUNDER
WIDTH Table 1 entries:  0.14

Metal 3 OVER 1 UNDER 4
DIST count 12 width 0.14
0.14 0.000564214 1.24444e-05 0.000450938
0.28 0.000282107 1.39975e-05 0.000450938
0.35 0.000225685 1.48076e-05 0.000450938
0.42 0.000188071 1.5639e-05 0.000450938
0.49 0.000161203 1.64913e-05 0.000450938
0.56 0.000141053 1.73643e-05 0.000450938
0.63 0.000125381 1.82582e-05 0.000450938
0.7 0.000112843 1.91707e-05 0.000450938
0.84 9.40356e-05 2.10563e-05 0.000450938
1.12 7.05267e-05 2.5046e-05 0.000450938
1.4 5.64214e-05 2.92998e-05 0.000450938
1.68 0 8.08025e-05 0.000450938
END DIST

Metal 3 OVER 1 UNDER 5
DIST count 12 width 0.14
0.14 0.000564214 7.06306e-06 0.000450938
0.28 0.000282107 8.38965e-06 0.000450938
0.35 0.000225685 9.07489e-06 0.000450938
0.42 0.000188071 9.77377e-06 0.000450938
0.49 0.000161203 1.04858e-05 0.000450938
0.56 0.000141053 1.12115e-05 0.000450938
0.63 0.000125381 1.19508e-05 0.000450938
0.7 0.000112843 1.27013e-05 0.000450938
0.84 9.40356e-05 1.42423e-05 0.000450938
1.12 7.05267e-05 1.74619e-05 0.000450938
1.4 5.64214e-05 2.08474e-05 0.000450938
1.68 0 7.13924e-05 0.000450938
END DIST

Metal 3 OVER 1 UNDER 6
DIST count 12 width 0.14
0.14 0.000564214 6.49618e-06 0.000450938
0.28 0.000282107 7.87233e-06 0.000450938
0.35 0.000225685 8.57807e-06 0.000450938
0.42 0.000188071 9.29499e-06 0.000450938
0.49 0.000161203 1.00225e-05 0.000450938
0.56 0.000141053 1.07609e-05 0.000450938
0.63 0.000125381 1.15097e-05 0.000450938
0.7 0.000112843 1.22677e-05 0.000450938
0.84 9.40356e-05 1.38146e-05 0.000450938
1.12 7.05267e-05 1.70128e-05 0.000450938
1.4 5.64214e-05 2.03329e-05 0.000450938
1.68 0 7.07699e-05 0.000450938
END DIST

Metal 3 OVER 2 UNDER 4
DIST count 12 width 0.14
0.14 0.000564214 1.50443e-05 0.000450938
0.28 0.000282107 1.65614e-05 0.000450938
0.35 0.000225685 1.73515e-05 0.000450938
0.42 0.000188071 1.81613e-05 0.000450938
0.49 0.000161203 1.89912e-05 0.000450938
0.56 0.000141053 1.98406e-05 0.000450938
0.63 0.000125381 2.07099e-05 0.000450938
0.7 0.000112843 2.15973e-05 0.000450938
0.84 9.40356e-05 2.34272e-05 0.000450938
1.12 7.05267e-05 2.72939e-05 0.000450938
1.4 5.64214e-05 3.14095e-05 0.000450938
1.68 0 8.27591e-05 0.000450938
END DIST

Metal 3 OVER 2 UNDER 5
DIST count 12 width 0.14
0.14 0.000564214 9.66299e-06 0.000450938
0.28 0.000282107 1.09535e-05 0.000450938
0.35 0.000225685 1.16187e-05 0.000450938
0.42 0.000188071 1.22961e-05 0.000450938
0.49 0.000161203 1.29858e-05 0.000450938
0.56 0.000141053 1.36878e-05 0.000450938
0.63 0.000125381 1.44025e-05 0.000450938
0.7 0.000112843 1.51278e-05 0.000450938
0.84 9.40356e-05 1.66132e-05 0.000450938
1.12 7.05267e-05 1.97098e-05 0.000450938
1.4 5.64214e-05 2.2957e-05 0.000450938
1.68 0 7.3349e-05 0.000450938
END DIST

Metal 3 OVER 2 UNDER 6
DIST count 12 width 0.14
0.14 0.000564214 9.0961e-06 0.000450938
0.28 0.000282107 1.04362e-05 0.000450938
0.35 0.000225685 1.11219e-05 0.000450938
0.42 0.000188071 1.18173e-05 0.000450938
0.49 0.000161203 1.25225e-05 0.000450938
0.56 0.000141053 1.32372e-05 0.000450938
0.63 0.000125381 1.39614e-05 0.000450938
0.7 0.000112843 1.46942e-05 0.000450938
0.84 9.40356e-05 1.61855e-05 0.000450938
1.12 7.05267e-05 1.92608e-05 0.000450938
1.4 5.64214e-05 2.24425e-05 0.000450938
1.68 0 7.27265e-05 0.000450938
END DIST

Metal 4 RESOVER
WIDTH Table 1 entries:  0.3

Metal 4 RESOVER 0
DIST count 55 width 0.3
0 0 0 0.000158249
0 0.38 0 0.000158249
0 0.68 0 0.000158249
0 0.91 0 0.000158249
0 1.06 0 0.000158249
0 1.36 0 0.000158249
0 1.59 0 0.000158249
0 1.74 0 0.000158249
0 2.04 0 0.000158249
0 2.72 0 0.000158249
0.38 0.38 0 0.000158249
0.38 0.68 0 0.000158249
0.38 0.91 0 0.000158249
0.38 1.06 0 0.000158249
0.38 1.36 0 0.000158249
0.38 1.59 0 0.000158249
0.38 1.74 0 0.000158249
0.38 2.04 0 0.000158249
0.38 2.72 0 0.000158249
0.68 0.68 0 0.000158249
0.68 0.91 0 0.000158249
0.68 1.06 0 0.000158249
0.68 1.36 0 0.000158249
0.68 1.59 0 0.000158249
0.68 1.74 0 0.000158249
0.68 2.04 0 0.000158249
0.68 2.72 0 0.000158249
0.91 0.91 0 0.000158249
0.91 1.06 0 0.000158249
0.91 1.36 0 0.000158249
0.91 1.59 0 0.000158249
0.91 1.74 0 0.000158249
0.91 2.04 0 0.000158249
0.91 2.72 0 0.000158249
1.06 1.06 0 0.000158249
1.06 1.36 0 0.000158249
1.06 1.59 0 0.000158249
1.06 1.74 0 0.000158249
1.06 2.04 0 0.000158249
1.06 2.72 0 0.000158249
1.36 1.36 0 0.000158249
1.36 1.59 0 0.000158249
1.36 1.74 0 0.000158249
1.36 2.04 0 0.000158249
1.36 2.72 0 0.000158249
1.59 1.59 0 0.000158249
1.59 1.74 0 0.000158249
1.59 2.04 0 0.000158249
1.59 2.72 0 0.000158249
1.74 1.74 0 0.000158249
1.74 2.04 0 0.000158249
1.74 2.72 0 0.000158249
2.04 2.04 0 0.000158249
2.04 2.72 0 0.000158249
2.72 0 2.72 0.000158249
END DIST

Metal 4 RESOVER 1
DIST count 0 width 0.3
END DIST

Metal 4 RESOVER 2
DIST count 0 width 0.3
END DIST

Metal 4 RESOVER 3
DIST count 0 width 0.3
END DIST

Metal 4 OVER
WIDTH Table 1 entries:  0.3

Metal 4 OVER 0
DIST count 12 width 0.3
0.3 0.000378451 4.27456e-06 7.91246e-05
0.6 0.000189226 6.47158e-06 7.91246e-05
0.75 0.00015138 7.56485e-06 7.91246e-05
0.9 0.00012615 8.65333e-06 7.91246e-05
1.05 0.000108129 9.73611e-06 7.91246e-05
1.2 9.46128e-05 1.08122e-05 7.91246e-05
1.35 8.41003e-05 1.18808e-05 7.91246e-05
1.5 7.56902e-05 1.29408e-05 7.91246e-05
1.8 6.30752e-05 1.50317e-05 7.91246e-05
2.4 4.73064e-05 1.90714e-05 7.91246e-05
3 3.78451e-05 2.28753e-05 7.91246e-05
3.6 0 5.79283e-05 7.91246e-05
END DIST

Metal 4 OVER 1
DIST count 12 width 0.3
0.3 0.000378451 7.4315e-06 7.91246e-05
0.6 0.000189226 1.03219e-05 7.91246e-05
0.75 0.00015138 1.18081e-05 7.91246e-05
0.9 0.00012615 1.33183e-05 7.91246e-05
1.05 0.000108129 1.485e-05 7.91246e-05
1.2 9.46128e-05 1.64006e-05 7.91246e-05
1.35 8.41003e-05 1.79691e-05 7.91246e-05
1.5 7.56902e-05 1.95515e-05 7.91246e-05
1.8 6.30752e-05 2.27462e-05 7.91246e-05
2.4 4.73064e-05 2.9182e-05 7.91246e-05
3 3.78451e-05 3.55196e-05 7.91246e-05
3.6 0 7.31045e-05 7.91246e-05
END DIST

Metal 4 OVER 2
DIST count 12 width 0.3
0.3 0.000378451 9.32508e-06 7.91246e-05
0.6 0.000189226 1.22972e-05 7.91246e-05
0.75 0.00015138 1.38301e-05 7.91246e-05
0.9 0.00012615 1.53909e-05 7.91246e-05
1.05 0.000108129 1.69785e-05 7.91246e-05
1.2 9.46128e-05 1.85882e-05 7.91246e-05
1.35 8.41003e-05 2.02172e-05 7.91246e-05
1.5 7.56902e-05 2.1864e-05 7.91246e-05
1.8 6.30752e-05 2.51964e-05 7.91246e-05
2.4 4.73064e-05 3.19351e-05 7.91246e-05
3 3.78451e-05 3.85958e-05 7.91246e-05
3.6 0 7.65075e-05 7.91246e-05
END DIST

Metal 4 OVER 3
DIST count 12 width 0.3
0.3 0.000378451 2.03434e-05 7.91246e-05
0.6 0.000189226 2.41788e-05 7.91246e-05
0.75 0.00015138 2.62023e-05 7.91246e-05
0.9 0.00012615 2.82918e-05 7.91246e-05
1.05 0.000108129 3.04402e-05 7.91246e-05
1.2 9.46128e-05 3.26451e-05 7.91246e-05
1.35 8.41003e-05 3.48991e-05 7.91246e-05
1.5 7.56902e-05 3.72014e-05 7.91246e-05
1.8 6.30752e-05 4.19193e-05 7.91246e-05
2.4 4.73064e-05 5.16674e-05 7.91246e-05
3 3.78451e-05 6.15164e-05 7.91246e-05
3.6 0 0.000102617 7.91246e-05
END DIST

Metal 4 UNDER
WIDTH Table 1 entries:  0.3

Metal 4 UNDER 5
DIST count 12 width 0.3
0.3 0.000378451 2.21403e-05 7.91246e-05
0.6 0.000189226 2.57655e-05 7.91246e-05
0.75 0.00015138 2.7663e-05 7.91246e-05
0.9 0.00012615 2.96119e-05 7.91246e-05
1.05 0.000108129 3.16086e-05 7.91246e-05
1.2 9.46128e-05 3.36484e-05 7.91246e-05
1.35 8.41003e-05 3.5728e-05 7.91246e-05
1.5 7.56902e-05 3.78419e-05 7.91246e-05
1.8 6.30752e-05 4.21556e-05 7.91246e-05
2.4 4.73064e-05 5.09916e-05 7.91246e-05
3 3.78451e-05 5.98353e-05 7.91246e-05
3.6 0 9.98925e-05 7.91246e-05
END DIST

Metal 4 UNDER 6
DIST count 12 width 0.3
0.3 0.000378451 1.1384e-05 7.91246e-05
0.6 0.000189226 1.48552e-05 7.91246e-05
0.75 0.00015138 1.66323e-05 7.91246e-05
0.9 0.00012615 1.84328e-05 7.91246e-05
1.05 0.000108129 2.0253e-05 7.91246e-05
1.2 9.46128e-05 2.20897e-05 7.91246e-05
1.35 8.41003e-05 2.39393e-05 7.91246e-05
1.5 7.56902e-05 2.57979e-05 7.91246e-05
1.8 6.30752e-05 2.95279e-05 7.91246e-05
2.4 4.73064e-05 3.69335e-05 7.91246e-05
3 3.78451e-05 4.40642e-05 7.91246e-05
3.6 0 8.22215e-05 7.91246e-05
END DIST

Metal 4 DIAGUNDER
WIDTH Table 1 entries:  0.3

Metal 4 DIAGUNDER 5
DIST count 13 width 0.3
0 0 2.54636e-05 7.91246e-05
0.3 0 6.70579e-06 7.91246e-05
0.6 0 6.65919e-06 7.91246e-05
0.75 0 6.62721e-06 7.91246e-05
0.9 0 6.5895e-06 7.91246e-05
1.05 0 6.54603e-06 7.91246e-05
1.2 0 6.49694e-06 7.91246e-05
1.35 0 6.44215e-06 7.91246e-05
1.5 0 6.38182e-06 7.91246e-05
1.8 0 6.24458e-06 7.91246e-05
2.4 0 5.90569e-06 7.91246e-05
3 0 5.48492e-06 7.91246e-05
3.6 0 4.98811e-06 7.91246e-05
END DIST

Metal 4 DIAGUNDER 6
DIST count 13 width 0.3
0 0 1.30489e-05 7.91246e-05
0.3 0 1.18028e-05 7.91246e-05
0.6 0 1.16545e-05 7.91246e-05
0.75 0 1.15652e-05 7.91246e-05
0.9 0 1.14659e-05 7.91246e-05
1.05 0 1.13566e-05 7.91246e-05
1.2 0 1.12375e-05 7.91246e-05
1.35 0 1.11086e-05 7.91246e-05
1.5 0 1.09701e-05 7.91246e-05
1.8 0 1.06646e-05 7.91246e-05
2.4 0 9.94397e-06 7.91246e-05
3 0 9.08542e-06 7.91246e-05
3.6 0 8.10094e-06 7.91246e-05
END DIST

Metal 4 OVERUNDER
WIDTH Table 1 entries:  0.3

Metal 4 OVER 1 UNDER 5
DIST count 12 width 0.3
0.3 0.000378451 2.52972e-05 7.91246e-05
0.6 0.000189226 2.96157e-05 7.91246e-05
0.75 0.00015138 3.19062e-05 7.91246e-05
0.9 0.00012615 3.42769e-05 7.91246e-05
1.05 0.000108129 3.67225e-05 7.91246e-05
1.2 9.46128e-05 3.92367e-05 7.91246e-05
1.35 8.41003e-05 4.18163e-05 7.91246e-05
1.5 7.56902e-05 4.44526e-05 7.91246e-05
1.8 6.30752e-05 4.98701e-05 7.91246e-05
2.4 4.73064e-05 6.11023e-05 7.91246e-05
3 3.78451e-05 7.24796e-05 7.91246e-05
3.6 0 0.000115069 7.91246e-05
END DIST

Metal 4 OVER 1 UNDER 6
DIST count 12 width 0.3
0.3 0.000378451 1.4541e-05 7.91246e-05
0.6 0.000189226 1.87054e-05 7.91246e-05
0.75 0.00015138 2.08755e-05 7.91246e-05
0.9 0.00012615 2.30978e-05 7.91246e-05
1.05 0.000108129 2.53668e-05 7.91246e-05
1.2 9.46128e-05 2.7678e-05 7.91246e-05
1.35 8.41003e-05 3.00275e-05 7.91246e-05
1.5 7.56902e-05 3.24086e-05 7.91246e-05
1.8 6.30752e-05 3.72425e-05 7.91246e-05
2.4 4.73064e-05 4.70442e-05 7.91246e-05
3 3.78451e-05 5.67086e-05 7.91246e-05
3.6 0 9.73977e-05 7.91246e-05
END DIST

Metal 4 OVER 2 UNDER 5
DIST count 12 width 0.3
0.3 0.000378451 2.71908e-05 7.91246e-05
0.6 0.000189226 3.1591e-05 7.91246e-05
0.75 0.00015138 3.39282e-05 7.91246e-05
0.9 0.00012615 3.63494e-05 7.91246e-05
1.05 0.000108129 3.8851e-05 7.91246e-05
1.2 9.46128e-05 4.14243e-05 7.91246e-05
1.35 8.41003e-05 4.40645e-05 7.91246e-05
1.5 7.56902e-05 4.67651e-05 7.91246e-05
1.8 6.30752e-05 5.23204e-05 7.91246e-05
2.4 4.73064e-05 6.38553e-05 7.91246e-05
3 3.78451e-05 7.55559e-05 7.91246e-05
3.6 0 0.000118472 7.91246e-05
END DIST

Metal 4 OVER 2 UNDER 6
DIST count 12 width 0.3
0.3 0.000378451 1.64345e-05 7.91246e-05
0.6 0.000189226 2.06807e-05 7.91246e-05
0.75 0.00015138 2.28975e-05 7.91246e-05
0.9 0.00012615 2.51703e-05 7.91246e-05
1.05 0.000108129 2.74953e-05 7.91246e-05
1.2 9.46128e-05 2.98656e-05 7.91246e-05
1.35 8.41003e-05 3.22757e-05 7.91246e-05
1.5 7.56902e-05 3.47211e-05 7.91246e-05
1.8 6.30752e-05 3.96927e-05 7.91246e-05
2.4 4.73064e-05 4.97972e-05 7.91246e-05
3 3.78451e-05 5.97848e-05 7.91246e-05
3.6 0 0.000100801 7.91246e-05
END DIST

Metal 4 OVER 3 UNDER 5
DIST count 12 width 0.3
0.3 0.000378451 3.82091e-05 7.91246e-05
0.6 0.000189226 4.34727e-05 7.91246e-05
0.75 0.00015138 4.63004e-05 7.91246e-05
0.9 0.00012615 4.92503e-05 7.91246e-05
1.05 0.000108129 5.23127e-05 7.91246e-05
1.2 9.46128e-05 5.54812e-05 7.91246e-05
1.35 8.41003e-05 5.87464e-05 7.91246e-05
1.5 7.56902e-05 6.21025e-05 7.91246e-05
1.8 6.30752e-05 6.90433e-05 7.91246e-05
2.4 4.73064e-05 8.35876e-05 7.91246e-05
3 3.78451e-05 9.84765e-05 7.91246e-05
3.6 0 0.000144581 7.91246e-05
END DIST

Metal 4 OVER 3 UNDER 6
DIST count 12 width 0.3
0.3 0.000378451 2.74528e-05 7.91246e-05
0.6 0.000189226 3.25624e-05 7.91246e-05
0.75 0.00015138 3.52698e-05 7.91246e-05
0.9 0.00012615 3.80713e-05 7.91246e-05
1.05 0.000108129 4.09571e-05 7.91246e-05
1.2 9.46128e-05 4.39225e-05 7.91246e-05
1.35 8.41003e-05 4.69576e-05 7.91246e-05
1.5 7.56902e-05 5.00585e-05 7.91246e-05
1.8 6.30752e-05 5.64156e-05 7.91246e-05
2.4 4.73064e-05 6.95295e-05 7.91246e-05
3 3.78451e-05 8.27054e-05 7.91246e-05
3.6 0 0.00012691 7.91246e-05
END DIST

Metal 5 RESOVER
WIDTH Table 1 entries:  0.3

Metal 5 RESOVER 0
DIST count 55 width 0.3
0 0 0 0.000158249
0 0.62 0 0.000158249
0 0.92 0 0.000158249
0 1.39 0 0.000158249
0 1.54 0 0.000158249
0 1.84 0 0.000158249
0 2.31 0 0.000158249
0 2.46 0 0.000158249
0 2.76 0 0.000158249
0 3.68 0 0.000158249
0.62 0.62 0 0.000158249
0.62 0.92 0 0.000158249
0.62 1.39 0 0.000158249
0.62 1.54 0 0.000158249
0.62 1.84 0 0.000158249
0.62 2.31 0 0.000158249
0.62 2.46 0 0.000158249
0.62 2.76 0 0.000158249
0.62 3.68 0 0.000158249
0.92 0.92 0 0.000158249
0.92 1.39 0 0.000158249
0.92 1.54 0 0.000158249
0.92 1.84 0 0.000158249
0.92 2.31 0 0.000158249
0.92 2.46 0 0.000158249
0.92 2.76 0 0.000158249
0.92 3.68 0 0.000158249
1.39 1.39 0 0.000158249
1.39 1.54 0 0.000158249
1.39 1.84 0 0.000158249
1.39 2.31 0 0.000158249
1.39 2.46 0 0.000158249
1.39 2.76 0 0.000158249
1.39 3.68 0 0.000158249
1.54 1.54 0 0.000158249
1.54 1.84 0 0.000158249
1.54 2.31 0 0.000158249
1.54 2.46 0 0.000158249
1.54 2.76 0 0.000158249
1.54 3.68 0 0.000158249
1.84 1.84 0 0.000158249
1.84 2.31 0 0.000158249
1.84 2.46 0 0.000158249
1.84 2.76 0 0.000158249
1.84 3.68 0 0.000158249
2.31 2.31 0 0.000158249
2.31 2.46 0 0.000158249
2.31 2.76 0 0.000158249
2.31 3.68 0 0.000158249
2.46 2.46 0 0.000158249
2.46 2.76 0 0.000158249
2.46 3.68 0 0.000158249
2.76 2.76 0 0.000158249
2.76 3.68 0 0.000158249
3.68 0 3.68 0.000158249
END DIST

Metal 5 RESOVER 1
DIST count 0 width 0.3
END DIST

Metal 5 RESOVER 2
DIST count 0 width 0.3
END DIST

Metal 5 RESOVER 3
DIST count 0 width 0.3
END DIST

Metal 5 RESOVER 4
DIST count 0 width 0.3
END DIST

Metal 5 OVER
WIDTH Table 1 entries:  0.3

Metal 5 OVER 0
DIST count 12 width 0.3
0.3 0.000397306 3.56524e-06 7.91246e-05
0.6 0.000198653 5.59037e-06 7.91246e-05
0.75 0.000158923 6.59811e-06 7.91246e-05
0.9 0.000132436 7.60145e-06 7.91246e-05
1.05 0.000113516 8.59951e-06 7.91246e-05
1.2 9.93266e-05 9.59147e-06 7.91246e-05
1.35 8.82902e-05 1.05764e-05 7.91246e-05
1.5 7.94613e-05 1.15535e-05 7.91246e-05
1.8 6.62177e-05 1.34808e-05 7.91246e-05
2.4 4.96633e-05 1.72044e-05 7.91246e-05
3 3.97306e-05 2.07108e-05 7.91246e-05
3.6 0 5.70601e-05 7.91246e-05
END DIST

Metal 5 OVER 1
DIST count 12 width 0.3
0.3 0.000397306 5.73864e-06 7.91246e-05
0.6 0.000198653 8.48239e-06 7.91246e-05
0.75 0.000158923 9.88699e-06 7.91246e-05
0.9 0.000132436 1.13105e-05 7.91246e-05
1.05 0.000113516 1.27492e-05 7.91246e-05
1.2 9.93266e-05 1.4202e-05 7.91246e-05
1.35 8.82902e-05 1.56665e-05 7.91246e-05
1.5 7.94613e-05 1.71403e-05 7.91246e-05
1.8 6.62177e-05 2.01033e-05 7.91246e-05
2.4 4.96633e-05 2.60188e-05 7.91246e-05
3 3.97306e-05 3.17779e-05 7.91246e-05
3.6 0 7.03145e-05 7.91246e-05
END DIST

Metal 5 OVER 2
DIST count 12 width 0.3
0.3 0.000397306 6.49096e-06 7.91246e-05
0.6 0.000198653 9.29224e-06 7.91246e-05
0.75 0.000158923 1.07287e-05 7.91246e-05
0.9 0.000132436 1.21845e-05 7.91246e-05
1.05 0.000113516 1.36603e-05 7.91246e-05
1.2 9.93266e-05 1.51501e-05 7.91246e-05
1.35 8.82902e-05 1.66546e-05 7.91246e-05
1.5 7.94613e-05 1.81689e-05 7.91246e-05
1.8 6.62177e-05 2.1218e-05 7.91246e-05
2.4 4.96633e-05 2.73184e-05 7.91246e-05
3 3.97306e-05 3.32718e-05 7.91246e-05
3.6 0 7.20014e-05 7.91246e-05
END DIST

Metal 5 OVER 3
DIST count 12 width 0.3
0.3 0.000397306 8.28042e-06 7.91246e-05
0.6 0.000198653 1.14076e-05 7.91246e-05
0.75 0.000158923 1.30242e-05 7.91246e-05
0.9 0.000132436 1.46714e-05 7.91246e-05
1.05 0.000113516 1.63488e-05 7.91246e-05
1.2 9.93266e-05 1.80482e-05 7.91246e-05
1.35 8.82902e-05 1.97703e-05 7.91246e-05
1.5 7.94613e-05 2.15115e-05 7.91246e-05
1.8 6.62177e-05 2.50318e-05 7.91246e-05
2.4 4.96633e-05 3.21345e-05 7.91246e-05
3 3.97306e-05 3.91179e-05 7.91246e-05
3.6 0 7.88488e-05 7.91246e-05
END DIST

Metal 5 OVER 4
DIST count 12 width 0.3
0.3 0.000397306 1.99874e-05 7.91246e-05
0.6 0.000198653 2.40958e-05 7.91246e-05
0.75 0.000158923 2.62476e-05 7.91246e-05
0.9 0.000132436 2.84576e-05 7.91246e-05
1.05 0.000113516 3.07202e-05 7.91246e-05
1.2 9.93266e-05 3.30321e-05 7.91246e-05
1.35 8.82902e-05 3.53858e-05 7.91246e-05
1.5 7.94613e-05 3.77765e-05 7.91246e-05
1.8 6.62177e-05 4.26464e-05 7.91246e-05
2.4 4.96633e-05 5.25687e-05 7.91246e-05
3 3.97306e-05 6.24057e-05 7.91246e-05
3.6 0 0.000104867 7.91246e-05
END DIST

Metal 5 UNDER
WIDTH Table 1 entries:  0.3

Metal 5 UNDER 6
DIST count 12 width 0.3
0.3 0.000397306 2.06424e-05 7.91246e-05
0.6 0.000198653 2.49833e-05 7.91246e-05
0.75 0.000158923 2.72147e-05 7.91246e-05
0.9 0.000132436 2.948e-05 7.91246e-05
1.05 0.000113516 3.17738e-05 7.91246e-05
1.2 9.93266e-05 3.40907e-05 7.91246e-05
1.35 8.82902e-05 3.64255e-05 7.91246e-05
1.5 7.94613e-05 3.87726e-05 7.91246e-05
1.8 6.62177e-05 4.34807e-05 7.91246e-05
2.4 4.96633e-05 5.27952e-05 7.91246e-05
3 3.97306e-05 6.16738e-05 7.91246e-05
3.6 0 0.00010288 7.91246e-05
END DIST

Metal 5 DIAGUNDER
WIDTH Table 1 entries:  0.3

Metal 5 DIAGUNDER 6
DIST count 13 width 0.3
0 0 3.26879e-05 7.91246e-05
0.3 0 1.941e-05 7.91246e-05
0.6 0 1.91634e-05 7.91246e-05
0.75 0 1.90151e-05 7.91246e-05
0.9 0 1.88503e-05 7.91246e-05
1.05 0 1.86692e-05 7.91246e-05
1.2 0 1.84719e-05 7.91246e-05
1.35 0 1.82586e-05 7.91246e-05
1.5 0 1.80294e-05 7.91246e-05
1.8 0 1.75243e-05 7.91246e-05
2.4 0 1.63338e-05 7.91246e-05
3 0 1.49169e-05 7.91246e-05
3.6 0 1.32931e-05 7.91246e-05
END DIST

Metal 5 OVERUNDER
WIDTH Table 1 entries:  0.3

Metal 5 OVER 1 UNDER 6
DIST count 12 width 0.3
0.3 0.000397306 2.28158e-05 7.91246e-05
0.6 0.000198653 2.78753e-05 7.91246e-05
0.75 0.000158923 3.05036e-05 7.91246e-05
0.9 0.000132436 3.31891e-05 7.91246e-05
1.05 0.000113516 3.59234e-05 7.91246e-05
1.2 9.93266e-05 3.87012e-05 7.91246e-05
1.35 8.82902e-05 4.15156e-05 7.91246e-05
1.5 7.94613e-05 4.43593e-05 7.91246e-05
1.8 6.62177e-05 5.01032e-05 7.91246e-05
2.4 4.96633e-05 6.16096e-05 7.91246e-05
3 3.97306e-05 7.27409e-05 7.91246e-05
3.6 0 0.000116134 7.91246e-05
END DIST

Metal 5 OVER 2 UNDER 6
DIST count 12 width 0.3
0.3 0.000397306 2.35682e-05 7.91246e-05
0.6 0.000198653 2.86851e-05 7.91246e-05
0.75 0.000158923 3.13452e-05 7.91246e-05
0.9 0.000132436 3.4063e-05 7.91246e-05
1.05 0.000113516 3.68345e-05 7.91246e-05
1.2 9.93266e-05 3.96494e-05 7.91246e-05
1.35 8.82902e-05 4.25037e-05 7.91246e-05
1.5 7.94613e-05 4.5388e-05 7.91246e-05
1.8 6.62177e-05 5.12179e-05 7.91246e-05
2.4 4.96633e-05 6.29092e-05 7.91246e-05
3 3.97306e-05 7.42349e-05 7.91246e-05
3.6 0 0.000117821 7.91246e-05
END DIST

Metal 5 OVER 3 UNDER 6
DIST count 12 width 0.3
0.3 0.000397306 2.53576e-05 7.91246e-05
0.6 0.000198653 3.08005e-05 7.91246e-05
0.75 0.000158923 3.36408e-05 7.91246e-05
0.9 0.000132436 3.655e-05 7.91246e-05
1.05 0.000113516 3.95231e-05 7.91246e-05
1.2 9.93266e-05 4.25475e-05 7.91246e-05
1.35 8.82902e-05 4.56194e-05 7.91246e-05
1.5 7.94613e-05 4.87306e-05 7.91246e-05
1.8 6.62177e-05 5.50317e-05 7.91246e-05
2.4 4.96633e-05 6.77253e-05 7.91246e-05
3 3.97306e-05 8.00809e-05 7.91246e-05
3.6 0 0.000124668 7.91246e-05
END DIST

Metal 5 OVER 4 UNDER 6
DIST count 12 width 0.3
0.3 0.000397306 3.70646e-05 7.91246e-05
0.6 0.000198653 4.34887e-05 7.91246e-05
0.75 0.000158923 4.68642e-05 7.91246e-05
0.9 0.000132436 5.03362e-05 7.91246e-05
1.05 0.000113516 5.38945e-05 7.91246e-05
1.2 9.93266e-05 5.75314e-05 7.91246e-05
1.35 8.82902e-05 6.1235e-05 7.91246e-05
1.5 7.94613e-05 6.49956e-05 7.91246e-05
1.8 6.62177e-05 7.26463e-05 7.91246e-05
2.4 4.96633e-05 8.81595e-05 7.91246e-05
3 3.97306e-05 0.000103369 7.91246e-05
3.6 0 0.000150686 7.91246e-05
END DIST

Metal 6 RESOVER
WIDTH Table 1 entries:  1.6

Metal 6 RESOVER 0
DIST count 55 width 1.6
0 0 0 1.83081e-05
0 1.8 0 1.83081e-05
0 3.4 0 1.83081e-05
0 4.4 0 1.83081e-05
0 5.2 0 1.83081e-05
0 6.8 0 1.83081e-05
0 7.8 0 1.83081e-05
0 8.6 0 1.83081e-05
0 10.2 0 1.83081e-05
0 13.6 0 1.83081e-05
1.8 1.8 0 1.83081e-05
1.8 3.4 0 1.83081e-05
1.8 4.4 0 1.83081e-05
1.8 5.2 0 1.83081e-05
1.8 6.8 0 1.83081e-05
1.8 7.8 0 1.83081e-05
1.8 8.6 0 1.83081e-05
1.8 10.2 0 1.83081e-05
1.8 13.6 0 1.83081e-05
3.4 3.4 0 1.83081e-05
3.4 4.4 0 1.83081e-05
3.4 5.2 0 1.83081e-05
3.4 6.8 0 1.83081e-05
3.4 7.8 0 1.83081e-05
3.4 8.6 0 1.83081e-05
3.4 10.2 0 1.83081e-05
3.4 13.6 0 1.83081e-05
4.4 4.4 0 1.83081e-05
4.4 5.2 0 1.83081e-05
4.4 6.8 0 1.83081e-05
4.4 7.8 0 1.83081e-05
4.4 8.6 0 1.83081e-05
4.4 10.2 0 1.83081e-05
4.4 13.6 0 1.83081e-05
5.2 5.2 0 1.83081e-05
5.2 6.8 0 1.83081e-05
5.2 7.8 0 1.83081e-05
5.2 8.6 0 1.83081e-05
5.2 10.2 0 1.83081e-05
5.2 13.6 0 1.83081e-05
6.8 6.8 0 1.83081e-05
6.8 7.8 0 1.83081e-05
6.8 8.6 0 1.83081e-05
6.8 10.2 0 1.83081e-05
6.8 13.6 0 1.83081e-05
7.8 7.8 0 1.83081e-05
7.8 8.6 0 1.83081e-05
7.8 10.2 0 1.83081e-05
7.8 13.6 0 1.83081e-05
8.6 8.6 0 1.83081e-05
8.6 10.2 0 1.83081e-05
8.6 13.6 0 1.83081e-05
10.2 10.2 0 1.83081e-05
10.2 13.6 0 1.83081e-05
13.6 0 13.6 1.83081e-05
END DIST

Metal 6 RESOVER 1
DIST count 0 width 1.6
END DIST

Metal 6 RESOVER 2
DIST count 0 width 1.6
END DIST

Metal 6 RESOVER 3
DIST count 0 width 1.6
END DIST

Metal 6 RESOVER 4
DIST count 0 width 1.6
END DIST

Metal 6 RESOVER 5
DIST count 0 width 1.6
END DIST

Metal 6 OVER
WIDTH Table 1 entries:  1.6

Metal 6 OVER 0
DIST count 12 width 1.6
1.6 0.000120076 1.67099e-05 9.15404e-06
3.2 6.00379e-05 2.70817e-05 9.15404e-06
4 4.80303e-05 3.15209e-05 9.15404e-06
4.8 4.00253e-05 3.53122e-05 9.15404e-06
5.6 3.43073e-05 3.83621e-05 9.15404e-06
6.4 3.00189e-05 4.05956e-05 9.15404e-06
7.2 2.66835e-05 4.19574e-05 9.15404e-06
8 0 4.24145e-05 9.15404e-06
9.6 0 4.24145e-05 9.15404e-06
12.8 0 4.24145e-05 9.15404e-06
16 0 4.24145e-05 9.15404e-06
19.2 0 4.24145e-05 9.15404e-06
END DIST

Metal 6 OVER 1
DIST count 12 width 1.6
1.6 0.000120076 2.90405e-05 9.15404e-06
3.2 6.00379e-05 4.50811e-05 9.15404e-06
4 4.80303e-05 5.19464e-05 9.15404e-06
4.8 4.00253e-05 5.781e-05 9.15404e-06
5.6 3.43073e-05 6.25272e-05 9.15404e-06
6.4 3.00189e-05 6.59828e-05 9.15404e-06
7.2 2.66835e-05 6.80877e-05 9.15404e-06
8 0 6.87947e-05 9.15404e-06
9.6 0 6.87947e-05 9.15404e-06
12.8 0 6.87947e-05 9.15404e-06
16 0 6.87947e-05 9.15404e-06
19.2 0 6.87947e-05 9.15404e-06
END DIST

Metal 6 OVER 2
DIST count 12 width 1.6
1.6 0.000120076 3.17554e-05 9.15404e-06
3.2 6.00379e-05 4.81927e-05 9.15404e-06
4 4.80303e-05 5.52296e-05 9.15404e-06
4.8 4.00253e-05 6.12389e-05 9.15404e-06
5.6 3.43073e-05 6.60728e-05 9.15404e-06
6.4 3.00189e-05 6.96143e-05 9.15404e-06
7.2 2.66835e-05 7.17713e-05 9.15404e-06
8 0 7.24975e-05 9.15404e-06
9.6 0 7.24975e-05 9.15404e-06
12.8 0 7.24975e-05 9.15404e-06
16 0 7.24975e-05 9.15404e-06
19.2 0 7.24975e-05 9.15404e-06
END DIST

Metal 6 OVER 3
DIST count 12 width 1.6
1.6 0.000120076 3.70722e-05 9.15404e-06
3.2 6.00379e-05 5.5101e-05 9.15404e-06
4 4.80303e-05 6.28198e-05 9.15404e-06
4.8 4.00253e-05 6.94101e-05 9.15404e-06
5.6 3.43073e-05 7.47098e-05 9.15404e-06
6.4 3.00189e-05 7.85909e-05 9.15404e-06
7.2 2.66835e-05 8.09605e-05 9.15404e-06
8 0 8.17554e-05 9.15404e-06
9.6 0 8.17554e-05 9.15404e-06
12.8 0 8.17554e-05 9.15404e-06
16 0 8.17554e-05 9.15404e-06
19.2 0 8.17554e-05 9.15404e-06
END DIST

Metal 6 OVER 4
DIST count 12 width 1.6
1.6 0.000120076 5.03484e-05 9.15404e-06
3.2 6.00379e-05 7.07834e-05 9.15404e-06
4 4.80303e-05 7.95299e-05 9.15404e-06
4.8 4.00253e-05 8.69996e-05 9.15404e-06
5.6 3.43073e-05 9.30094e-05 9.15404e-06
6.4 3.00189e-05 9.7409e-05 9.15404e-06
7.2 2.66835e-05 0.000100093 9.15404e-06
8 0 0.000100993 9.15404e-06
9.6 0 0.000100993 9.15404e-06
12.8 0 0.000100993 9.15404e-06
16 0 0.000100993 9.15404e-06
19.2 0 0.000100993 9.15404e-06
END DIST

Metal 6 OVER 5
DIST count 12 width 1.6
1.6 0.000120076 0.000104895 9.15404e-06
3.2 6.00379e-05 0.000133403 9.15404e-06
4 4.80303e-05 0.000145606 9.15404e-06
4.8 4.00253e-05 0.000156027 9.15404e-06
5.6 3.43073e-05 0.00016441 9.15404e-06
6.4 3.00189e-05 0.000170549 9.15404e-06
7.2 2.66835e-05 0.000174294 9.15404e-06
8 0 0.000175549 9.15404e-06
9.6 0 0.000175549 9.15404e-06
12.8 0 0.000175549 9.15404e-06
16 0 0.000175549 9.15404e-06
19.2 0 0.000175549 9.15404e-06
END DIST

Metal 6 UNDER
WIDTH Table 0 entries: 

Metal 6 DIAGUNDER
WIDTH Table 0 entries: 
END DensityModel 0