sky130/openlane/rules.openrcx.sky130A.min.spef_extractor

Extraction Rules for OpenRCX

DIAGMODEL ON

LayerCount 6
DensityRate 1  0

DensityModel 0

Metal 1 RESOVER
WIDTH Table 1 entries:  0.17

Metal 1 RESOVER 0
DIST count 55 width 0.17
0 0 0 0.0541176
0 0.29 0 0.0541176
0 0.46 0 0.0541176
0 0.665 0 0.0541176
0 0.75 0 0.0541176
0 0.92 0 0.0541176
0 1.125 0 0.0541176
0 1.21 0 0.0541176
0 1.38 0 0.0541176
0 1.84 0 0.0541176
0.29 0.29 0 0.0541176
0.29 0.46 0 0.0541176
0.29 0.665 0 0.0541176
0.29 0.75 0 0.0541176
0.29 0.92 0 0.0541176
0.29 1.125 0 0.0541176
0.29 1.21 0 0.0541176
0.29 1.38 0 0.0541176
0.29 1.84 0 0.0541176
0.46 0.46 0 0.0541176
0.46 0.665 0 0.0541176
0.46 0.75 0 0.0541176
0.46 0.92 0 0.0541176
0.46 1.125 0 0.0541176
0.46 1.21 0 0.0541176
0.46 1.38 0 0.0541176
0.46 1.84 0 0.0541176
0.665 0.665 0 0.0541176
0.665 0.75 0 0.0541176
0.665 0.92 0 0.0541176
0.665 1.125 0 0.0541176
0.665 1.21 0 0.0541176
0.665 1.38 0 0.0541176
0.665 1.84 0 0.0541176
0.75 0.75 0 0.0541176
0.75 0.92 0 0.0541176
0.75 1.125 0 0.0541176
0.75 1.21 0 0.0541176
0.75 1.38 0 0.0541176
0.75 1.84 0 0.0541176
0.92 0.92 0 0.0541176
0.92 1.125 0 0.0541176
0.92 1.21 0 0.0541176
0.92 1.38 0 0.0541176
0.92 1.84 0 0.0541176
1.125 1.125 0 0.0541176
1.125 1.21 0 0.0541176
1.125 1.38 0 0.0541176
1.125 1.84 0 0.0541176
1.21 1.21 0 0.0541176
1.21 1.38 0 0.0541176
1.21 1.84 0 0.0541176
1.38 1.38 0 0.0541176
1.38 1.84 0 0.0541176
1.84 0 1.84 0.0541176
END DIST

Metal 1 OVER
WIDTH Table 1 entries:  0.17

Metal 1 OVER 0
DIST count 12 width 0.17
0.17 0 4.42519e-05 0.0270588
0.34 0 4.42519e-05 0.0270588
0.425 0 4.42519e-05 0.0270588
0.51 0 4.42519e-05 0.0270588
0.595 0 4.42519e-05 0.0270588
0.68 0 4.42519e-05 0.0270588
0.765 0 4.42519e-05 0.0270588
0.85 0 4.42519e-05 0.0270588
1.02 0 4.42519e-05 0.0270588
1.36 0 4.42519e-05 0.0270588
1.7 0 4.42519e-05 0.0270588
2.04 0 4.42519e-05 0.0270588
END DIST

Metal 1 UNDER
WIDTH Table 1 entries:  0.17

Metal 1 UNDER 2
DIST count 12 width 0.17
0.17 0 4.42519e-05 0.0270588
0.34 0 4.42519e-05 0.0270588
0.425 0 4.42519e-05 0.0270588
0.51 0 4.42519e-05 0.0270588
0.595 0 4.42519e-05 0.0270588
0.68 0 4.42519e-05 0.0270588
0.765 0 4.42519e-05 0.0270588
0.85 0 4.42519e-05 0.0270588
1.02 0 4.42519e-05 0.0270588
1.36 0 4.42519e-05 0.0270588
1.7 0 4.42519e-05 0.0270588
2.04 0 4.42519e-05 0.0270588
END DIST

Metal 1 UNDER 3
DIST count 12 width 0.17
0.17 0 4.42519e-05 0.0270588
0.34 0 4.42519e-05 0.0270588
0.425 0 4.42519e-05 0.0270588
0.51 0 4.42519e-05 0.0270588
0.595 0 4.42519e-05 0.0270588
0.68 0 4.42519e-05 0.0270588
0.765 0 4.42519e-05 0.0270588
0.85 0 4.42519e-05 0.0270588
1.02 0 4.42519e-05 0.0270588
1.36 0 4.42519e-05 0.0270588
1.7 0 4.42519e-05 0.0270588
2.04 0 4.42519e-05 0.0270588
END DIST

Metal 1 UNDER 4
DIST count 12 width 0.17
0.17 0 4.42519e-05 0.0270588
0.34 0 4.42519e-05 0.0270588
0.425 0 4.42519e-05 0.0270588
0.51 0 4.42519e-05 0.0270588
0.595 0 4.42519e-05 0.0270588
0.68 0 4.42519e-05 0.0270588
0.765 0 4.42519e-05 0.0270588
0.85 0 4.42519e-05 0.0270588
1.02 0 4.42519e-05 0.0270588
1.36 0 4.42519e-05 0.0270588
1.7 0 4.42519e-05 0.0270588
2.04 0 4.42519e-05 0.0270588
END DIST

Metal 1 UNDER 5
DIST count 12 width 0.17
0.17 0 4.42519e-05 0.0270588
0.34 0 4.42519e-05 0.0270588
0.425 0 4.42519e-05 0.0270588
0.51 0 4.42519e-05 0.0270588
0.595 0 4.42519e-05 0.0270588
0.68 0 4.42519e-05 0.0270588
0.765 0 4.42519e-05 0.0270588
0.85 0 4.42519e-05 0.0270588
1.02 0 4.42519e-05 0.0270588
1.36 0 4.42519e-05 0.0270588
1.7 0 4.42519e-05 0.0270588
2.04 0 4.42519e-05 0.0270588
END DIST

Metal 1 UNDER 6
DIST count 12 width 0.17
0.17 0 4.42519e-05 0.0270588
0.34 0 4.42519e-05 0.0270588
0.425 0 4.42519e-05 0.0270588
0.51 0 4.42519e-05 0.0270588
0.595 0 4.42519e-05 0.0270588
0.68 0 4.42519e-05 0.0270588
0.765 0 4.42519e-05 0.0270588
0.85 0 4.42519e-05 0.0270588
1.02 0 4.42519e-05 0.0270588
1.36 0 4.42519e-05 0.0270588
1.7 0 4.42519e-05 0.0270588
2.04 0 4.42519e-05 0.0270588
END DIST

Metal 1 DIAGUNDER
WIDTH Table 1 entries:  0.17

Metal 1 DIAGUNDER 2
DIST count 13 width 0.17
0 0 0 0.0270588
0.17 0 0 0.0270588
0.34 0 0 0.0270588
0.425 0 0 0.0270588
0.51 0 0 0.0270588
0.595 0 0 0.0270588
0.68 0 0 0.0270588
0.765 0 0 0.0270588
0.85 0 0 0.0270588
1.02 0 0 0.0270588
1.36 0 0 0.0270588
1.7 0 0 0.0270588
2.04 0 0 0.0270588
END DIST

Metal 1 DIAGUNDER 3
DIST count 13 width 0.17
0 0 0 0.0270588
0.17 0 0 0.0270588
0.34 0 0 0.0270588
0.425 0 0 0.0270588
0.51 0 0 0.0270588
0.595 0 0 0.0270588
0.68 0 0 0.0270588
0.765 0 0 0.0270588
0.85 0 0 0.0270588
1.02 0 0 0.0270588
1.36 0 0 0.0270588
1.7 0 0 0.0270588
2.04 0 0 0.0270588
END DIST

Metal 1 DIAGUNDER 4
DIST count 13 width 0.17
0 0 0 0.0270588
0.17 0 0 0.0270588
0.34 0 0 0.0270588
0.425 0 0 0.0270588
0.51 0 0 0.0270588
0.595 0 0 0.0270588
0.68 0 0 0.0270588
0.765 0 0 0.0270588
0.85 0 0 0.0270588
1.02 0 0 0.0270588
1.36 0 0 0.0270588
1.7 0 0 0.0270588
2.04 0 0 0.0270588
END DIST

Metal 1 DIAGUNDER 5
DIST count 13 width 0.17
0 0 0 0.0270588
0.17 0 0 0.0270588
0.34 0 0 0.0270588
0.425 0 0 0.0270588
0.51 0 0 0.0270588
0.595 0 0 0.0270588
0.68 0 0 0.0270588
0.765 0 0 0.0270588
0.85 0 0 0.0270588
1.02 0 0 0.0270588
1.36 0 0 0.0270588
1.7 0 0 0.0270588
2.04 0 0 0.0270588
END DIST

Metal 1 DIAGUNDER 6
DIST count 0 width 0.17
END DIST

Metal 2 RESOVER
WIDTH Table 1 entries:  0.14

Metal 2 RESOVER 0
DIST count 55 width 0.14
0 0 0 0.00075
0 0.2 0 0.00075
0 0.34 0 0.00075
0 0.47 0 0.00075
0 0.54 0 0.00075
0 0.68 0 0.00075
0 0.81 0 0.00075
0 0.88 0 0.00075
0 1.02 0 0.00075
0 1.36 0 0.00075
0.2 0.2 0 0.00075
0.2 0.34 0 0.00075
0.2 0.47 0 0.00075
0.2 0.54 0 0.00075
0.2 0.68 0 0.00075
0.2 0.81 0 0.00075
0.2 0.88 0 0.00075
0.2 1.02 0 0.00075
0.2 1.36 0 0.00075
0.34 0.34 0 0.00075
0.34 0.47 0 0.00075
0.34 0.54 0 0.00075
0.34 0.68 0 0.00075
0.34 0.81 0 0.00075
0.34 0.88 0 0.00075
0.34 1.02 0 0.00075
0.34 1.36 0 0.00075
0.47 0.47 0 0.00075
0.47 0.54 0 0.00075
0.47 0.68 0 0.00075
0.47 0.81 0 0.00075
0.47 0.88 0 0.00075
0.47 1.02 0 0.00075
0.47 1.36 0 0.00075
0.54 0.54 0 0.00075
0.54 0.68 0 0.00075
0.54 0.81 0 0.00075
0.54 0.88 0 0.00075
0.54 1.02 0 0.00075
0.54 1.36 0 0.00075
0.68 0.68 0 0.00075
0.68 0.81 0 0.00075
0.68 0.88 0 0.00075
0.68 1.02 0 0.00075
0.68 1.36 0 0.00075
0.81 0.81 0 0.00075
0.81 0.88 0 0.00075
0.81 1.02 0 0.00075
0.81 1.36 0 0.00075
0.88 0.88 0 0.00075
0.88 1.02 0 0.00075
0.88 1.36 0 0.00075
1.02 1.02 0 0.00075
1.02 1.36 0 0.00075
1.36 0 1.36 0.00075
END DIST

Metal 2 RESOVER 1
DIST count 0 width 0.14
END DIST

Metal 2 OVER
WIDTH Table 1 entries:  0.14

Metal 2 OVER 0
DIST count 12 width 0.14
0.14 0 4.27813e-05 0.000375
0.28 0 4.27813e-05 0.000375
0.35 0 4.27813e-05 0.000375
0.42 0 4.27813e-05 0.000375
0.49 0 4.27813e-05 0.000375
0.56 0 4.27813e-05 0.000375
0.63 0 4.27813e-05 0.000375
0.7 0 4.27813e-05 0.000375
0.84 0 4.27813e-05 0.000375
1.12 0 4.27813e-05 0.000375
1.4 0 4.27813e-05 0.000375
1.68 0 4.27813e-05 0.000375
END DIST

Metal 2 OVER 1
DIST count 12 width 0.14
0.14 0 4.27813e-05 0.000375
0.28 0 4.27813e-05 0.000375
0.35 0 4.27813e-05 0.000375
0.42 0 4.27813e-05 0.000375
0.49 0 4.27813e-05 0.000375
0.56 0 4.27813e-05 0.000375
0.63 0 4.27813e-05 0.000375
0.7 0 4.27813e-05 0.000375
0.84 0 4.27813e-05 0.000375
1.12 0 4.27813e-05 0.000375
1.4 0 4.27813e-05 0.000375
1.68 0 4.27813e-05 0.000375
END DIST

Metal 2 UNDER
WIDTH Table 1 entries:  0.14

Metal 2 UNDER 3
DIST count 12 width 0.14
0.14 0 4.27813e-05 0.000375
0.28 0 4.27813e-05 0.000375
0.35 0 4.27813e-05 0.000375
0.42 0 4.27813e-05 0.000375
0.49 0 4.27813e-05 0.000375
0.56 0 4.27813e-05 0.000375
0.63 0 4.27813e-05 0.000375
0.7 0 4.27813e-05 0.000375
0.84 0 4.27813e-05 0.000375
1.12 0 4.27813e-05 0.000375
1.4 0 4.27813e-05 0.000375
1.68 0 4.27813e-05 0.000375
END DIST

Metal 2 UNDER 4
DIST count 12 width 0.14
0.14 0 4.27813e-05 0.000375
0.28 0 4.27813e-05 0.000375
0.35 0 4.27813e-05 0.000375
0.42 0 4.27813e-05 0.000375
0.49 0 4.27813e-05 0.000375
0.56 0 4.27813e-05 0.000375
0.63 0 4.27813e-05 0.000375
0.7 0 4.27813e-05 0.000375
0.84 0 4.27813e-05 0.000375
1.12 0 4.27813e-05 0.000375
1.4 0 4.27813e-05 0.000375
1.68 0 4.27813e-05 0.000375
END DIST

Metal 2 UNDER 5
DIST count 12 width 0.14
0.14 0 4.27813e-05 0.000375
0.28 0 4.27813e-05 0.000375
0.35 0 4.27813e-05 0.000375
0.42 0 4.27813e-05 0.000375
0.49 0 4.27813e-05 0.000375
0.56 0 4.27813e-05 0.000375
0.63 0 4.27813e-05 0.000375
0.7 0 4.27813e-05 0.000375
0.84 0 4.27813e-05 0.000375
1.12 0 4.27813e-05 0.000375
1.4 0 4.27813e-05 0.000375
1.68 0 4.27813e-05 0.000375
END DIST

Metal 2 UNDER 6
DIST count 12 width 0.14
0.14 0 4.27813e-05 0.000375
0.28 0 4.27813e-05 0.000375
0.35 0 4.27813e-05 0.000375
0.42 0 4.27813e-05 0.000375
0.49 0 4.27813e-05 0.000375
0.56 0 4.27813e-05 0.000375
0.63 0 4.27813e-05 0.000375
0.7 0 4.27813e-05 0.000375
0.84 0 4.27813e-05 0.000375
1.12 0 4.27813e-05 0.000375
1.4 0 4.27813e-05 0.000375
1.68 0 4.27813e-05 0.000375
END DIST

Metal 2 DIAGUNDER
WIDTH Table 1 entries:  0.14

Metal 2 DIAGUNDER 3
DIST count 13 width 0.14
0 0 0 0.000375
0.14 0 0 0.000375
0.28 0 0 0.000375
0.35 0 0 0.000375
0.42 0 0 0.000375
0.49 0 0 0.000375
0.56 0 0 0.000375
0.63 0 0 0.000375
0.7 0 0 0.000375
0.84 0 0 0.000375
1.12 0 0 0.000375
1.4 0 0 0.000375
1.68 0 0 0.000375
END DIST

Metal 2 DIAGUNDER 4
DIST count 13 width 0.14
0 0 0 0.000375
0.14 0 0 0.000375
0.28 0 0 0.000375
0.35 0 0 0.000375
0.42 0 0 0.000375
0.49 0 0 0.000375
0.56 0 0 0.000375
0.63 0 0 0.000375
0.7 0 0 0.000375
0.84 0 0 0.000375
1.12 0 0 0.000375
1.4 0 0 0.000375
1.68 0 0 0.000375
END DIST

Metal 2 DIAGUNDER 5
DIST count 13 width 0.14
0 0 0 0.000375
0.14 0 0 0.000375
0.28 0 0 0.000375
0.35 0 0 0.000375
0.42 0 0 0.000375
0.49 0 0 0.000375
0.56 0 0 0.000375
0.63 0 0 0.000375
0.7 0 0 0.000375
0.84 0 0 0.000375
1.12 0 0 0.000375
1.4 0 0 0.000375
1.68 0 0 0.000375
END DIST

Metal 2 DIAGUNDER 6
DIST count 13 width 0.14
0 0 0 0.000375
0.14 0 0 0.000375
0.28 0 0 0.000375
0.35 0 0 0.000375
0.42 0 0 0.000375
0.49 0 0 0.000375
0.56 0 0 0.000375
0.63 0 0 0.000375
0.7 0 0 0.000375
0.84 0 0 0.000375
1.12 0 0 0.000375
1.4 0 0 0.000375
1.68 0 0 0.000375
END DIST

Metal 2 OVERUNDER
WIDTH Table 1 entries:  0.14

Metal 2 OVER 1 UNDER 3
DIST count 12 width 0.14
0.14 0 4.27813e-05 0.000375
0.28 0 4.27813e-05 0.000375
0.35 0 4.27813e-05 0.000375
0.42 0 4.27813e-05 0.000375
0.49 0 4.27813e-05 0.000375
0.56 0 4.27813e-05 0.000375
0.63 0 4.27813e-05 0.000375
0.7 0 4.27813e-05 0.000375
0.84 0 4.27813e-05 0.000375
1.12 0 4.27813e-05 0.000375
1.4 0 4.27813e-05 0.000375
1.68 0 4.27813e-05 0.000375
END DIST

Metal 2 OVER 1 UNDER 4
DIST count 12 width 0.14
0.14 0 4.27813e-05 0.000375
0.28 0 4.27813e-05 0.000375
0.35 0 4.27813e-05 0.000375
0.42 0 4.27813e-05 0.000375
0.49 0 4.27813e-05 0.000375
0.56 0 4.27813e-05 0.000375
0.63 0 4.27813e-05 0.000375
0.7 0 4.27813e-05 0.000375
0.84 0 4.27813e-05 0.000375
1.12 0 4.27813e-05 0.000375
1.4 0 4.27813e-05 0.000375
1.68 0 4.27813e-05 0.000375
END DIST

Metal 2 OVER 1 UNDER 5
DIST count 12 width 0.14
0.14 0 4.27813e-05 0.000375
0.28 0 4.27813e-05 0.000375
0.35 0 4.27813e-05 0.000375
0.42 0 4.27813e-05 0.000375
0.49 0 4.27813e-05 0.000375
0.56 0 4.27813e-05 0.000375
0.63 0 4.27813e-05 0.000375
0.7 0 4.27813e-05 0.000375
0.84 0 4.27813e-05 0.000375
1.12 0 4.27813e-05 0.000375
1.4 0 4.27813e-05 0.000375
1.68 0 4.27813e-05 0.000375
END DIST

Metal 2 OVER 1 UNDER 6
DIST count 12 width 0.14
0.14 0 4.27813e-05 0.000375
0.28 0 4.27813e-05 0.000375
0.35 0 4.27813e-05 0.000375
0.42 0 4.27813e-05 0.000375
0.49 0 4.27813e-05 0.000375
0.56 0 4.27813e-05 0.000375
0.63 0 4.27813e-05 0.000375
0.7 0 4.27813e-05 0.000375
0.84 0 4.27813e-05 0.000375
1.12 0 4.27813e-05 0.000375
1.4 0 4.27813e-05 0.000375
1.68 0 4.27813e-05 0.000375
END DIST

Metal 3 RESOVER
WIDTH Table 1 entries:  0.14

Metal 3 RESOVER 0
DIST count 55 width 0.14
0 0 0 0.00075
0 0.32 0 0.00075
0 0.46 0 0.00075
0 0.71 0 0.00075
0 0.78 0 0.00075
0 0.92 0 0.00075
0 1.17 0 0.00075
0 1.24 0 0.00075
0 1.38 0 0.00075
0 1.84 0 0.00075
0.32 0.32 0 0.00075
0.32 0.46 0 0.00075
0.32 0.71 0 0.00075
0.32 0.78 0 0.00075
0.32 0.92 0 0.00075
0.32 1.17 0 0.00075
0.32 1.24 0 0.00075
0.32 1.38 0 0.00075
0.32 1.84 0 0.00075
0.46 0.46 0 0.00075
0.46 0.71 0 0.00075
0.46 0.78 0 0.00075
0.46 0.92 0 0.00075
0.46 1.17 0 0.00075
0.46 1.24 0 0.00075
0.46 1.38 0 0.00075
0.46 1.84 0 0.00075
0.71 0.71 0 0.00075
0.71 0.78 0 0.00075
0.71 0.92 0 0.00075
0.71 1.17 0 0.00075
0.71 1.24 0 0.00075
0.71 1.38 0 0.00075
0.71 1.84 0 0.00075
0.78 0.78 0 0.00075
0.78 0.92 0 0.00075
0.78 1.17 0 0.00075
0.78 1.24 0 0.00075
0.78 1.38 0 0.00075
0.78 1.84 0 0.00075
0.92 0.92 0 0.00075
0.92 1.17 0 0.00075
0.92 1.24 0 0.00075
0.92 1.38 0 0.00075
0.92 1.84 0 0.00075
1.17 1.17 0 0.00075
1.17 1.24 0 0.00075
1.17 1.38 0 0.00075
1.17 1.84 0 0.00075
1.24 1.24 0 0.00075
1.24 1.38 0 0.00075
1.24 1.84 0 0.00075
1.38 1.38 0 0.00075
1.38 1.84 0 0.00075
1.84 0 1.84 0.00075
END DIST

Metal 3 RESOVER 1
DIST count 0 width 0.14
END DIST

Metal 3 RESOVER 2
DIST count 0 width 0.14
END DIST

Metal 3 OVER
WIDTH Table 1 entries:  0.14

Metal 3 OVER 0
DIST count 12 width 0.14
0.14 0 3.93264e-05 0.000375
0.28 0 3.93264e-05 0.000375
0.35 0 3.93264e-05 0.000375
0.42 0 3.93264e-05 0.000375
0.49 0 3.93264e-05 0.000375
0.56 0 3.93264e-05 0.000375
0.63 0 3.93264e-05 0.000375
0.7 0 3.93264e-05 0.000375
0.84 0 3.93264e-05 0.000375
1.12 0 3.93264e-05 0.000375
1.4 0 3.93264e-05 0.000375
1.68 0 3.93264e-05 0.000375
END DIST

Metal 3 OVER 1
DIST count 12 width 0.14
0.14 0 3.93264e-05 0.000375
0.28 0 3.93264e-05 0.000375
0.35 0 3.93264e-05 0.000375
0.42 0 3.93264e-05 0.000375
0.49 0 3.93264e-05 0.000375
0.56 0 3.93264e-05 0.000375
0.63 0 3.93264e-05 0.000375
0.7 0 3.93264e-05 0.000375
0.84 0 3.93264e-05 0.000375
1.12 0 3.93264e-05 0.000375
1.4 0 3.93264e-05 0.000375
1.68 0 3.93264e-05 0.000375
END DIST

Metal 3 OVER 2
DIST count 12 width 0.14
0.14 0 3.93264e-05 0.000375
0.28 0 3.93264e-05 0.000375
0.35 0 3.93264e-05 0.000375
0.42 0 3.93264e-05 0.000375
0.49 0 3.93264e-05 0.000375
0.56 0 3.93264e-05 0.000375
0.63 0 3.93264e-05 0.000375
0.7 0 3.93264e-05 0.000375
0.84 0 3.93264e-05 0.000375
1.12 0 3.93264e-05 0.000375
1.4 0 3.93264e-05 0.000375
1.68 0 3.93264e-05 0.000375
END DIST

Metal 3 UNDER
WIDTH Table 1 entries:  0.14

Metal 3 UNDER 4
DIST count 12 width 0.14
0.14 0 3.93264e-05 0.000375
0.28 0 3.93264e-05 0.000375
0.35 0 3.93264e-05 0.000375
0.42 0 3.93264e-05 0.000375
0.49 0 3.93264e-05 0.000375
0.56 0 3.93264e-05 0.000375
0.63 0 3.93264e-05 0.000375
0.7 0 3.93264e-05 0.000375
0.84 0 3.93264e-05 0.000375
1.12 0 3.93264e-05 0.000375
1.4 0 3.93264e-05 0.000375
1.68 0 3.93264e-05 0.000375
END DIST

Metal 3 UNDER 5
DIST count 12 width 0.14
0.14 0 3.93264e-05 0.000375
0.28 0 3.93264e-05 0.000375
0.35 0 3.93264e-05 0.000375
0.42 0 3.93264e-05 0.000375
0.49 0 3.93264e-05 0.000375
0.56 0 3.93264e-05 0.000375
0.63 0 3.93264e-05 0.000375
0.7 0 3.93264e-05 0.000375
0.84 0 3.93264e-05 0.000375
1.12 0 3.93264e-05 0.000375
1.4 0 3.93264e-05 0.000375
1.68 0 3.93264e-05 0.000375
END DIST

Metal 3 UNDER 6
DIST count 12 width 0.14
0.14 0 3.93264e-05 0.000375
0.28 0 3.93264e-05 0.000375
0.35 0 3.93264e-05 0.000375
0.42 0 3.93264e-05 0.000375
0.49 0 3.93264e-05 0.000375
0.56 0 3.93264e-05 0.000375
0.63 0 3.93264e-05 0.000375
0.7 0 3.93264e-05 0.000375
0.84 0 3.93264e-05 0.000375
1.12 0 3.93264e-05 0.000375
1.4 0 3.93264e-05 0.000375
1.68 0 3.93264e-05 0.000375
END DIST

Metal 3 DIAGUNDER
WIDTH Table 1 entries:  0.14

Metal 3 DIAGUNDER 4
DIST count 13 width 0.14
0 0 0 0.000375
0.14 0 0 0.000375
0.28 0 0 0.000375
0.35 0 0 0.000375
0.42 0 0 0.000375
0.49 0 0 0.000375
0.56 0 0 0.000375
0.63 0 0 0.000375
0.7 0 0 0.000375
0.84 0 0 0.000375
1.12 0 0 0.000375
1.4 0 0 0.000375
1.68 0 0 0.000375
END DIST

Metal 3 DIAGUNDER 5
DIST count 13 width 0.14
0 0 0 0.000375
0.14 0 0 0.000375
0.28 0 0 0.000375
0.35 0 0 0.000375
0.42 0 0 0.000375
0.49 0 0 0.000375
0.56 0 0 0.000375
0.63 0 0 0.000375
0.7 0 0 0.000375
0.84 0 0 0.000375
1.12 0 0 0.000375
1.4 0 0 0.000375
1.68 0 0 0.000375
END DIST

Metal 3 DIAGUNDER 6
DIST count 13 width 0.14
0 0 0 0.000375
0.14 0 0 0.000375
0.28 0 0 0.000375
0.35 0 0 0.000375
0.42 0 0 0.000375
0.49 0 0 0.000375
0.56 0 0 0.000375
0.63 0 0 0.000375
0.7 0 0 0.000375
0.84 0 0 0.000375
1.12 0 0 0.000375
1.4 0 0 0.000375
1.68 0 0 0.000375
END DIST

Metal 3 OVERUNDER
WIDTH Table 1 entries:  0.14

Metal 3 OVER 1 UNDER 4
DIST count 12 width 0.14
0.14 0 3.93264e-05 0.000375
0.28 0 3.93264e-05 0.000375
0.35 0 3.93264e-05 0.000375
0.42 0 3.93264e-05 0.000375
0.49 0 3.93264e-05 0.000375
0.56 0 3.93264e-05 0.000375
0.63 0 3.93264e-05 0.000375
0.7 0 3.93264e-05 0.000375
0.84 0 3.93264e-05 0.000375
1.12 0 3.93264e-05 0.000375
1.4 0 3.93264e-05 0.000375
1.68 0 3.93264e-05 0.000375
END DIST

Metal 3 OVER 1 UNDER 5
DIST count 12 width 0.14
0.14 0 3.93264e-05 0.000375
0.28 0 3.93264e-05 0.000375
0.35 0 3.93264e-05 0.000375
0.42 0 3.93264e-05 0.000375
0.49 0 3.93264e-05 0.000375
0.56 0 3.93264e-05 0.000375
0.63 0 3.93264e-05 0.000375
0.7 0 3.93264e-05 0.000375
0.84 0 3.93264e-05 0.000375
1.12 0 3.93264e-05 0.000375
1.4 0 3.93264e-05 0.000375
1.68 0 3.93264e-05 0.000375
END DIST

Metal 3 OVER 1 UNDER 6
DIST count 12 width 0.14
0.14 0 3.93264e-05 0.000375
0.28 0 3.93264e-05 0.000375
0.35 0 3.93264e-05 0.000375
0.42 0 3.93264e-05 0.000375
0.49 0 3.93264e-05 0.000375
0.56 0 3.93264e-05 0.000375
0.63 0 3.93264e-05 0.000375
0.7 0 3.93264e-05 0.000375
0.84 0 3.93264e-05 0.000375
1.12 0 3.93264e-05 0.000375
1.4 0 3.93264e-05 0.000375
1.68 0 3.93264e-05 0.000375
END DIST

Metal 3 OVER 2 UNDER 4
DIST count 12 width 0.14
0.14 0 3.93264e-05 0.000375
0.28 0 3.93264e-05 0.000375
0.35 0 3.93264e-05 0.000375
0.42 0 3.93264e-05 0.000375
0.49 0 3.93264e-05 0.000375
0.56 0 3.93264e-05 0.000375
0.63 0 3.93264e-05 0.000375
0.7 0 3.93264e-05 0.000375
0.84 0 3.93264e-05 0.000375
1.12 0 3.93264e-05 0.000375
1.4 0 3.93264e-05 0.000375
1.68 0 3.93264e-05 0.000375
END DIST

Metal 3 OVER 2 UNDER 5
DIST count 12 width 0.14
0.14 0 3.93264e-05 0.000375
0.28 0 3.93264e-05 0.000375
0.35 0 3.93264e-05 0.000375
0.42 0 3.93264e-05 0.000375
0.49 0 3.93264e-05 0.000375
0.56 0 3.93264e-05 0.000375
0.63 0 3.93264e-05 0.000375
0.7 0 3.93264e-05 0.000375
0.84 0 3.93264e-05 0.000375
1.12 0 3.93264e-05 0.000375
1.4 0 3.93264e-05 0.000375
1.68 0 3.93264e-05 0.000375
END DIST

Metal 3 OVER 2 UNDER 6
DIST count 12 width 0.14
0.14 0 3.93264e-05 0.000375
0.28 0 3.93264e-05 0.000375
0.35 0 3.93264e-05 0.000375
0.42 0 3.93264e-05 0.000375
0.49 0 3.93264e-05 0.000375
0.56 0 3.93264e-05 0.000375
0.63 0 3.93264e-05 0.000375
0.7 0 3.93264e-05 0.000375
0.84 0 3.93264e-05 0.000375
1.12 0 3.93264e-05 0.000375
1.4 0 3.93264e-05 0.000375
1.68 0 3.93264e-05 0.000375
END DIST

Metal 4 RESOVER
WIDTH Table 1 entries:  0.3

Metal 4 RESOVER 0
DIST count 55 width 0.3
0 0 0 0.000126667
0 0.38 0 0.000126667
0 0.68 0 0.000126667
0 0.91 0 0.000126667
0 1.06 0 0.000126667
0 1.36 0 0.000126667
0 1.59 0 0.000126667
0 1.74 0 0.000126667
0 2.04 0 0.000126667
0 2.72 0 0.000126667
0.38 0.38 0 0.000126667
0.38 0.68 0 0.000126667
0.38 0.91 0 0.000126667
0.38 1.06 0 0.000126667
0.38 1.36 0 0.000126667
0.38 1.59 0 0.000126667
0.38 1.74 0 0.000126667
0.38 2.04 0 0.000126667
0.38 2.72 0 0.000126667
0.68 0.68 0 0.000126667
0.68 0.91 0 0.000126667
0.68 1.06 0 0.000126667
0.68 1.36 0 0.000126667
0.68 1.59 0 0.000126667
0.68 1.74 0 0.000126667
0.68 2.04 0 0.000126667
0.68 2.72 0 0.000126667
0.91 0.91 0 0.000126667
0.91 1.06 0 0.000126667
0.91 1.36 0 0.000126667
0.91 1.59 0 0.000126667
0.91 1.74 0 0.000126667
0.91 2.04 0 0.000126667
0.91 2.72 0 0.000126667
1.06 1.06 0 0.000126667
1.06 1.36 0 0.000126667
1.06 1.59 0 0.000126667
1.06 1.74 0 0.000126667
1.06 2.04 0 0.000126667
1.06 2.72 0 0.000126667
1.36 1.36 0 0.000126667
1.36 1.59 0 0.000126667
1.36 1.74 0 0.000126667
1.36 2.04 0 0.000126667
1.36 2.72 0 0.000126667
1.59 1.59 0 0.000126667
1.59 1.74 0 0.000126667
1.59 2.04 0 0.000126667
1.59 2.72 0 0.000126667
1.74 1.74 0 0.000126667
1.74 2.04 0 0.000126667
1.74 2.72 0 0.000126667
2.04 2.04 0 0.000126667
2.04 2.72 0 0.000126667
2.72 0 2.72 0.000126667
END DIST

Metal 4 RESOVER 1
DIST count 0 width 0.3
END DIST

Metal 4 RESOVER 2
DIST count 0 width 0.3
END DIST

Metal 4 RESOVER 3
DIST count 0 width 0.3
END DIST

Metal 4 OVER
WIDTH Table 1 entries:  0.3

Metal 4 OVER 0
DIST count 12 width 0.3
0.3 0 4.3259e-05 6.33333e-05
0.6 0 4.3259e-05 6.33333e-05
0.75 0 4.3259e-05 6.33333e-05
0.9 0 4.3259e-05 6.33333e-05
1.05 0 4.3259e-05 6.33333e-05
1.2 0 4.3259e-05 6.33333e-05
1.35 0 4.3259e-05 6.33333e-05
1.5 0 4.3259e-05 6.33333e-05
1.8 0 4.3259e-05 6.33333e-05
2.4 0 4.3259e-05 6.33333e-05
3 0 4.3259e-05 6.33333e-05
3.6 0 4.3259e-05 6.33333e-05
END DIST

Metal 4 OVER 1
DIST count 12 width 0.3
0.3 0 4.3259e-05 6.33333e-05
0.6 0 4.3259e-05 6.33333e-05
0.75 0 4.3259e-05 6.33333e-05
0.9 0 4.3259e-05 6.33333e-05
1.05 0 4.3259e-05 6.33333e-05
1.2 0 4.3259e-05 6.33333e-05
1.35 0 4.3259e-05 6.33333e-05
1.5 0 4.3259e-05 6.33333e-05
1.8 0 4.3259e-05 6.33333e-05
2.4 0 4.3259e-05 6.33333e-05
3 0 4.3259e-05 6.33333e-05
3.6 0 4.3259e-05 6.33333e-05
END DIST

Metal 4 OVER 2
DIST count 12 width 0.3
0.3 0 4.3259e-05 6.33333e-05
0.6 0 4.3259e-05 6.33333e-05
0.75 0 4.3259e-05 6.33333e-05
0.9 0 4.3259e-05 6.33333e-05
1.05 0 4.3259e-05 6.33333e-05
1.2 0 4.3259e-05 6.33333e-05
1.35 0 4.3259e-05 6.33333e-05
1.5 0 4.3259e-05 6.33333e-05
1.8 0 4.3259e-05 6.33333e-05
2.4 0 4.3259e-05 6.33333e-05
3 0 4.3259e-05 6.33333e-05
3.6 0 4.3259e-05 6.33333e-05
END DIST

Metal 4 OVER 3
DIST count 12 width 0.3
0.3 0 4.3259e-05 6.33333e-05
0.6 0 4.3259e-05 6.33333e-05
0.75 0 4.3259e-05 6.33333e-05
0.9 0 4.3259e-05 6.33333e-05
1.05 0 4.3259e-05 6.33333e-05
1.2 0 4.3259e-05 6.33333e-05
1.35 0 4.3259e-05 6.33333e-05
1.5 0 4.3259e-05 6.33333e-05
1.8 0 4.3259e-05 6.33333e-05
2.4 0 4.3259e-05 6.33333e-05
3 0 4.3259e-05 6.33333e-05
3.6 0 4.3259e-05 6.33333e-05
END DIST

Metal 4 UNDER
WIDTH Table 1 entries:  0.3

Metal 4 UNDER 5
DIST count 12 width 0.3
0.3 0 4.3259e-05 6.33333e-05
0.6 0 4.3259e-05 6.33333e-05
0.75 0 4.3259e-05 6.33333e-05
0.9 0 4.3259e-05 6.33333e-05
1.05 0 4.3259e-05 6.33333e-05
1.2 0 4.3259e-05 6.33333e-05
1.35 0 4.3259e-05 6.33333e-05
1.5 0 4.3259e-05 6.33333e-05
1.8 0 4.3259e-05 6.33333e-05
2.4 0 4.3259e-05 6.33333e-05
3 0 4.3259e-05 6.33333e-05
3.6 0 4.3259e-05 6.33333e-05
END DIST

Metal 4 UNDER 6
DIST count 12 width 0.3
0.3 0 4.3259e-05 6.33333e-05
0.6 0 4.3259e-05 6.33333e-05
0.75 0 4.3259e-05 6.33333e-05
0.9 0 4.3259e-05 6.33333e-05
1.05 0 4.3259e-05 6.33333e-05
1.2 0 4.3259e-05 6.33333e-05
1.35 0 4.3259e-05 6.33333e-05
1.5 0 4.3259e-05 6.33333e-05
1.8 0 4.3259e-05 6.33333e-05
2.4 0 4.3259e-05 6.33333e-05
3 0 4.3259e-05 6.33333e-05
3.6 0 4.3259e-05 6.33333e-05
END DIST

Metal 4 DIAGUNDER
WIDTH Table 1 entries:  0.3

Metal 4 DIAGUNDER 5
DIST count 13 width 0.3
0 0 0 6.33333e-05
0.3 0 0 6.33333e-05
0.6 0 0 6.33333e-05
0.75 0 0 6.33333e-05
0.9 0 0 6.33333e-05
1.05 0 0 6.33333e-05
1.2 0 0 6.33333e-05
1.35 0 0 6.33333e-05
1.5 0 0 6.33333e-05
1.8 0 0 6.33333e-05
2.4 0 0 6.33333e-05
3 0 0 6.33333e-05
3.6 0 0 6.33333e-05
END DIST

Metal 4 DIAGUNDER 6
DIST count 13 width 0.3
0 0 0 6.33333e-05
0.3 0 0 6.33333e-05
0.6 0 0 6.33333e-05
0.75 0 0 6.33333e-05
0.9 0 0 6.33333e-05
1.05 0 0 6.33333e-05
1.2 0 0 6.33333e-05
1.35 0 0 6.33333e-05
1.5 0 0 6.33333e-05
1.8 0 0 6.33333e-05
2.4 0 0 6.33333e-05
3 0 0 6.33333e-05
3.6 0 0 6.33333e-05
END DIST

Metal 4 OVERUNDER
WIDTH Table 1 entries:  0.3

Metal 4 OVER 1 UNDER 5
DIST count 12 width 0.3
0.3 0 4.3259e-05 6.33333e-05
0.6 0 4.3259e-05 6.33333e-05
0.75 0 4.3259e-05 6.33333e-05
0.9 0 4.3259e-05 6.33333e-05
1.05 0 4.3259e-05 6.33333e-05
1.2 0 4.3259e-05 6.33333e-05
1.35 0 4.3259e-05 6.33333e-05
1.5 0 4.3259e-05 6.33333e-05
1.8 0 4.3259e-05 6.33333e-05
2.4 0 4.3259e-05 6.33333e-05
3 0 4.3259e-05 6.33333e-05
3.6 0 4.3259e-05 6.33333e-05
END DIST

Metal 4 OVER 1 UNDER 6
DIST count 12 width 0.3
0.3 0 4.3259e-05 6.33333e-05
0.6 0 4.3259e-05 6.33333e-05
0.75 0 4.3259e-05 6.33333e-05
0.9 0 4.3259e-05 6.33333e-05
1.05 0 4.3259e-05 6.33333e-05
1.2 0 4.3259e-05 6.33333e-05
1.35 0 4.3259e-05 6.33333e-05
1.5 0 4.3259e-05 6.33333e-05
1.8 0 4.3259e-05 6.33333e-05
2.4 0 4.3259e-05 6.33333e-05
3 0 4.3259e-05 6.33333e-05
3.6 0 4.3259e-05 6.33333e-05
END DIST

Metal 4 OVER 2 UNDER 5
DIST count 12 width 0.3
0.3 0 4.3259e-05 6.33333e-05
0.6 0 4.3259e-05 6.33333e-05
0.75 0 4.3259e-05 6.33333e-05
0.9 0 4.3259e-05 6.33333e-05
1.05 0 4.3259e-05 6.33333e-05
1.2 0 4.3259e-05 6.33333e-05
1.35 0 4.3259e-05 6.33333e-05
1.5 0 4.3259e-05 6.33333e-05
1.8 0 4.3259e-05 6.33333e-05
2.4 0 4.3259e-05 6.33333e-05
3 0 4.3259e-05 6.33333e-05
3.6 0 4.3259e-05 6.33333e-05
END DIST

Metal 4 OVER 2 UNDER 6
DIST count 12 width 0.3
0.3 0 4.3259e-05 6.33333e-05
0.6 0 4.3259e-05 6.33333e-05
0.75 0 4.3259e-05 6.33333e-05
0.9 0 4.3259e-05 6.33333e-05
1.05 0 4.3259e-05 6.33333e-05
1.2 0 4.3259e-05 6.33333e-05
1.35 0 4.3259e-05 6.33333e-05
1.5 0 4.3259e-05 6.33333e-05
1.8 0 4.3259e-05 6.33333e-05
2.4 0 4.3259e-05 6.33333e-05
3 0 4.3259e-05 6.33333e-05
3.6 0 4.3259e-05 6.33333e-05
END DIST

Metal 4 OVER 3 UNDER 5
DIST count 12 width 0.3
0.3 0 4.3259e-05 6.33333e-05
0.6 0 4.3259e-05 6.33333e-05
0.75 0 4.3259e-05 6.33333e-05
0.9 0 4.3259e-05 6.33333e-05
1.05 0 4.3259e-05 6.33333e-05
1.2 0 4.3259e-05 6.33333e-05
1.35 0 4.3259e-05 6.33333e-05
1.5 0 4.3259e-05 6.33333e-05
1.8 0 4.3259e-05 6.33333e-05
2.4 0 4.3259e-05 6.33333e-05
3 0 4.3259e-05 6.33333e-05
3.6 0 4.3259e-05 6.33333e-05
END DIST

Metal 4 OVER 3 UNDER 6
DIST count 12 width 0.3
0.3 0 4.3259e-05 6.33333e-05
0.6 0 4.3259e-05 6.33333e-05
0.75 0 4.3259e-05 6.33333e-05
0.9 0 4.3259e-05 6.33333e-05
1.05 0 4.3259e-05 6.33333e-05
1.2 0 4.3259e-05 6.33333e-05
1.35 0 4.3259e-05 6.33333e-05
1.5 0 4.3259e-05 6.33333e-05
1.8 0 4.3259e-05 6.33333e-05
2.4 0 4.3259e-05 6.33333e-05
3 0 4.3259e-05 6.33333e-05
3.6 0 4.3259e-05 6.33333e-05
END DIST

Metal 5 RESOVER
WIDTH Table 1 entries:  0.3

Metal 5 RESOVER 0
DIST count 55 width 0.3
0 0 0 0.000126667
0 0.62 0 0.000126667
0 0.92 0 0.000126667
0 1.39 0 0.000126667
0 1.54 0 0.000126667
0 1.84 0 0.000126667
0 2.31 0 0.000126667
0 2.46 0 0.000126667
0 2.76 0 0.000126667
0 3.68 0 0.000126667
0.62 0.62 0 0.000126667
0.62 0.92 0 0.000126667
0.62 1.39 0 0.000126667
0.62 1.54 0 0.000126667
0.62 1.84 0 0.000126667
0.62 2.31 0 0.000126667
0.62 2.46 0 0.000126667
0.62 2.76 0 0.000126667
0.62 3.68 0 0.000126667
0.92 0.92 0 0.000126667
0.92 1.39 0 0.000126667
0.92 1.54 0 0.000126667
0.92 1.84 0 0.000126667
0.92 2.31 0 0.000126667
0.92 2.46 0 0.000126667
0.92 2.76 0 0.000126667
0.92 3.68 0 0.000126667
1.39 1.39 0 0.000126667
1.39 1.54 0 0.000126667
1.39 1.84 0 0.000126667
1.39 2.31 0 0.000126667
1.39 2.46 0 0.000126667
1.39 2.76 0 0.000126667
1.39 3.68 0 0.000126667
1.54 1.54 0 0.000126667
1.54 1.84 0 0.000126667
1.54 2.31 0 0.000126667
1.54 2.46 0 0.000126667
1.54 2.76 0 0.000126667
1.54 3.68 0 0.000126667
1.84 1.84 0 0.000126667
1.84 2.31 0 0.000126667
1.84 2.46 0 0.000126667
1.84 2.76 0 0.000126667
1.84 3.68 0 0.000126667
2.31 2.31 0 0.000126667
2.31 2.46 0 0.000126667
2.31 2.76 0 0.000126667
2.31 3.68 0 0.000126667
2.46 2.46 0 0.000126667
2.46 2.76 0 0.000126667
2.46 3.68 0 0.000126667
2.76 2.76 0 0.000126667
2.76 3.68 0 0.000126667
3.68 0 3.68 0.000126667
END DIST

Metal 5 RESOVER 1
DIST count 0 width 0.3
END DIST

Metal 5 RESOVER 2
DIST count 0 width 0.3
END DIST

Metal 5 RESOVER 3
DIST count 0 width 0.3
END DIST

Metal 5 RESOVER 4
DIST count 0 width 0.3
END DIST

Metal 5 OVER
WIDTH Table 1 entries:  0.3

Metal 5 OVER 0
DIST count 12 width 0.3
0.3 0 3.83088e-05 6.33333e-05
0.6 0 3.83088e-05 6.33333e-05
0.75 0 3.83088e-05 6.33333e-05
0.9 0 3.83088e-05 6.33333e-05
1.05 0 3.83088e-05 6.33333e-05
1.2 0 3.83088e-05 6.33333e-05
1.35 0 3.83088e-05 6.33333e-05
1.5 0 3.83088e-05 6.33333e-05
1.8 0 3.83088e-05 6.33333e-05
2.4 0 3.83088e-05 6.33333e-05
3 0 3.83088e-05 6.33333e-05
3.6 0 3.83088e-05 6.33333e-05
END DIST

Metal 5 OVER 1
DIST count 12 width 0.3
0.3 0 3.83088e-05 6.33333e-05
0.6 0 3.83088e-05 6.33333e-05
0.75 0 3.83088e-05 6.33333e-05
0.9 0 3.83088e-05 6.33333e-05
1.05 0 3.83088e-05 6.33333e-05
1.2 0 3.83088e-05 6.33333e-05
1.35 0 3.83088e-05 6.33333e-05
1.5 0 3.83088e-05 6.33333e-05
1.8 0 3.83088e-05 6.33333e-05
2.4 0 3.83088e-05 6.33333e-05
3 0 3.83088e-05 6.33333e-05
3.6 0 3.83088e-05 6.33333e-05
END DIST

Metal 5 OVER 2
DIST count 12 width 0.3
0.3 0 3.83088e-05 6.33333e-05
0.6 0 3.83088e-05 6.33333e-05
0.75 0 3.83088e-05 6.33333e-05
0.9 0 3.83088e-05 6.33333e-05
1.05 0 3.83088e-05 6.33333e-05
1.2 0 3.83088e-05 6.33333e-05
1.35 0 3.83088e-05 6.33333e-05
1.5 0 3.83088e-05 6.33333e-05
1.8 0 3.83088e-05 6.33333e-05
2.4 0 3.83088e-05 6.33333e-05
3 0 3.83088e-05 6.33333e-05
3.6 0 3.83088e-05 6.33333e-05
END DIST

Metal 5 OVER 3
DIST count 12 width 0.3
0.3 0 3.83088e-05 6.33333e-05
0.6 0 3.83088e-05 6.33333e-05
0.75 0 3.83088e-05 6.33333e-05
0.9 0 3.83088e-05 6.33333e-05
1.05 0 3.83088e-05 6.33333e-05
1.2 0 3.83088e-05 6.33333e-05
1.35 0 3.83088e-05 6.33333e-05
1.5 0 3.83088e-05 6.33333e-05
1.8 0 3.83088e-05 6.33333e-05
2.4 0 3.83088e-05 6.33333e-05
3 0 3.83088e-05 6.33333e-05
3.6 0 3.83088e-05 6.33333e-05
END DIST

Metal 5 OVER 4
DIST count 12 width 0.3
0.3 0 3.83088e-05 6.33333e-05
0.6 0 3.83088e-05 6.33333e-05
0.75 0 3.83088e-05 6.33333e-05
0.9 0 3.83088e-05 6.33333e-05
1.05 0 3.83088e-05 6.33333e-05
1.2 0 3.83088e-05 6.33333e-05
1.35 0 3.83088e-05 6.33333e-05
1.5 0 3.83088e-05 6.33333e-05
1.8 0 3.83088e-05 6.33333e-05
2.4 0 3.83088e-05 6.33333e-05
3 0 3.83088e-05 6.33333e-05
3.6 0 3.83088e-05 6.33333e-05
END DIST

Metal 5 UNDER
WIDTH Table 1 entries:  0.3

Metal 5 UNDER 6
DIST count 12 width 0.3
0.3 0 3.83088e-05 6.33333e-05
0.6 0 3.83088e-05 6.33333e-05
0.75 0 3.83088e-05 6.33333e-05
0.9 0 3.83088e-05 6.33333e-05
1.05 0 3.83088e-05 6.33333e-05
1.2 0 3.83088e-05 6.33333e-05
1.35 0 3.83088e-05 6.33333e-05
1.5 0 3.83088e-05 6.33333e-05
1.8 0 3.83088e-05 6.33333e-05
2.4 0 3.83088e-05 6.33333e-05
3 0 3.83088e-05 6.33333e-05
3.6 0 3.83088e-05 6.33333e-05
END DIST

Metal 5 DIAGUNDER
WIDTH Table 1 entries:  0.3

Metal 5 DIAGUNDER 6
DIST count 13 width 0.3
0 0 0 6.33333e-05
0.3 0 0 6.33333e-05
0.6 0 0 6.33333e-05
0.75 0 0 6.33333e-05
0.9 0 0 6.33333e-05
1.05 0 0 6.33333e-05
1.2 0 0 6.33333e-05
1.35 0 0 6.33333e-05
1.5 0 0 6.33333e-05
1.8 0 0 6.33333e-05
2.4 0 0 6.33333e-05
3 0 0 6.33333e-05
3.6 0 0 6.33333e-05
END DIST

Metal 5 OVERUNDER
WIDTH Table 1 entries:  0.3

Metal 5 OVER 1 UNDER 6
DIST count 12 width 0.3
0.3 0 3.83088e-05 6.33333e-05
0.6 0 3.83088e-05 6.33333e-05
0.75 0 3.83088e-05 6.33333e-05
0.9 0 3.83088e-05 6.33333e-05
1.05 0 3.83088e-05 6.33333e-05
1.2 0 3.83088e-05 6.33333e-05
1.35 0 3.83088e-05 6.33333e-05
1.5 0 3.83088e-05 6.33333e-05
1.8 0 3.83088e-05 6.33333e-05
2.4 0 3.83088e-05 6.33333e-05
3 0 3.83088e-05 6.33333e-05
3.6 0 3.83088e-05 6.33333e-05
END DIST

Metal 5 OVER 2 UNDER 6
DIST count 12 width 0.3
0.3 0 3.83088e-05 6.33333e-05
0.6 0 3.83088e-05 6.33333e-05
0.75 0 3.83088e-05 6.33333e-05
0.9 0 3.83088e-05 6.33333e-05
1.05 0 3.83088e-05 6.33333e-05
1.2 0 3.83088e-05 6.33333e-05
1.35 0 3.83088e-05 6.33333e-05
1.5 0 3.83088e-05 6.33333e-05
1.8 0 3.83088e-05 6.33333e-05
2.4 0 3.83088e-05 6.33333e-05
3 0 3.83088e-05 6.33333e-05
3.6 0 3.83088e-05 6.33333e-05
END DIST

Metal 5 OVER 3 UNDER 6
DIST count 12 width 0.3
0.3 0 3.83088e-05 6.33333e-05
0.6 0 3.83088e-05 6.33333e-05
0.75 0 3.83088e-05 6.33333e-05
0.9 0 3.83088e-05 6.33333e-05
1.05 0 3.83088e-05 6.33333e-05
1.2 0 3.83088e-05 6.33333e-05
1.35 0 3.83088e-05 6.33333e-05
1.5 0 3.83088e-05 6.33333e-05
1.8 0 3.83088e-05 6.33333e-05
2.4 0 3.83088e-05 6.33333e-05
3 0 3.83088e-05 6.33333e-05
3.6 0 3.83088e-05 6.33333e-05
END DIST

Metal 5 OVER 4 UNDER 6
DIST count 12 width 0.3
0.3 0 3.83088e-05 6.33333e-05
0.6 0 3.83088e-05 6.33333e-05
0.75 0 3.83088e-05 6.33333e-05
0.9 0 3.83088e-05 6.33333e-05
1.05 0 3.83088e-05 6.33333e-05
1.2 0 3.83088e-05 6.33333e-05
1.35 0 3.83088e-05 6.33333e-05
1.5 0 3.83088e-05 6.33333e-05
1.8 0 3.83088e-05 6.33333e-05
2.4 0 3.83088e-05 6.33333e-05
3 0 3.83088e-05 6.33333e-05
3.6 0 3.83088e-05 6.33333e-05
END DIST

Metal 6 RESOVER
WIDTH Table 1 entries:  1.6

Metal 6 RESOVER 0
DIST count 55 width 1.6
0 0 0 1.325e-05
0 1.8 0 1.325e-05
0 3.4 0 1.325e-05
0 4.4 0 1.325e-05
0 5.2 0 1.325e-05
0 6.8 0 1.325e-05
0 7.8 0 1.325e-05
0 8.6 0 1.325e-05
0 10.2 0 1.325e-05
0 13.6 0 1.325e-05
1.8 1.8 0 1.325e-05
1.8 3.4 0 1.325e-05
1.8 4.4 0 1.325e-05
1.8 5.2 0 1.325e-05
1.8 6.8 0 1.325e-05
1.8 7.8 0 1.325e-05
1.8 8.6 0 1.325e-05
1.8 10.2 0 1.325e-05
1.8 13.6 0 1.325e-05
3.4 3.4 0 1.325e-05
3.4 4.4 0 1.325e-05
3.4 5.2 0 1.325e-05
3.4 6.8 0 1.325e-05
3.4 7.8 0 1.325e-05
3.4 8.6 0 1.325e-05
3.4 10.2 0 1.325e-05
3.4 13.6 0 1.325e-05
4.4 4.4 0 1.325e-05
4.4 5.2 0 1.325e-05
4.4 6.8 0 1.325e-05
4.4 7.8 0 1.325e-05
4.4 8.6 0 1.325e-05
4.4 10.2 0 1.325e-05
4.4 13.6 0 1.325e-05
5.2 5.2 0 1.325e-05
5.2 6.8 0 1.325e-05
5.2 7.8 0 1.325e-05
5.2 8.6 0 1.325e-05
5.2 10.2 0 1.325e-05
5.2 13.6 0 1.325e-05
6.8 6.8 0 1.325e-05
6.8 7.8 0 1.325e-05
6.8 8.6 0 1.325e-05
6.8 10.2 0 1.325e-05
6.8 13.6 0 1.325e-05
7.8 7.8 0 1.325e-05
7.8 8.6 0 1.325e-05
7.8 10.2 0 1.325e-05
7.8 13.6 0 1.325e-05
8.6 8.6 0 1.325e-05
8.6 10.2 0 1.325e-05
8.6 13.6 0 1.325e-05
10.2 10.2 0 1.325e-05
10.2 13.6 0 1.325e-05
13.6 0 13.6 1.325e-05
END DIST

Metal 6 RESOVER 1
DIST count 0 width 1.6
END DIST

Metal 6 RESOVER 2
DIST count 0 width 1.6
END DIST

Metal 6 RESOVER 3
DIST count 0 width 1.6
END DIST

Metal 6 RESOVER 4
DIST count 0 width 1.6
END DIST

Metal 6 RESOVER 5
DIST count 0 width 1.6
END DIST

Metal 6 OVER
WIDTH Table 1 entries:  1.6

Metal 6 OVER 0
DIST count 12 width 1.6
1.6 0 4.42999e-05 6.625e-06
3.2 0 4.42999e-05 6.625e-06
4 0 4.42999e-05 6.625e-06
4.8 0 4.42999e-05 6.625e-06
5.6 0 4.42999e-05 6.625e-06
6.4 0 4.42999e-05 6.625e-06
7.2 0 4.42999e-05 6.625e-06
8 0 4.42999e-05 6.625e-06
9.6 0 4.42999e-05 6.625e-06
12.8 0 4.42999e-05 6.625e-06
16 0 4.42999e-05 6.625e-06
19.2 0 4.42999e-05 6.625e-06
END DIST

Metal 6 OVER 1
DIST count 12 width 1.6
1.6 0 4.42999e-05 6.625e-06
3.2 0 4.42999e-05 6.625e-06
4 0 4.42999e-05 6.625e-06
4.8 0 4.42999e-05 6.625e-06
5.6 0 4.42999e-05 6.625e-06
6.4 0 4.42999e-05 6.625e-06
7.2 0 4.42999e-05 6.625e-06
8 0 4.42999e-05 6.625e-06
9.6 0 4.42999e-05 6.625e-06
12.8 0 4.42999e-05 6.625e-06
16 0 4.42999e-05 6.625e-06
19.2 0 4.42999e-05 6.625e-06
END DIST

Metal 6 OVER 2
DIST count 12 width 1.6
1.6 0 4.42999e-05 6.625e-06
3.2 0 4.42999e-05 6.625e-06
4 0 4.42999e-05 6.625e-06
4.8 0 4.42999e-05 6.625e-06
5.6 0 4.42999e-05 6.625e-06
6.4 0 4.42999e-05 6.625e-06
7.2 0 4.42999e-05 6.625e-06
8 0 4.42999e-05 6.625e-06
9.6 0 4.42999e-05 6.625e-06
12.8 0 4.42999e-05 6.625e-06
16 0 4.42999e-05 6.625e-06
19.2 0 4.42999e-05 6.625e-06
END DIST

Metal 6 OVER 3
DIST count 12 width 1.6
1.6 0 4.42999e-05 6.625e-06
3.2 0 4.42999e-05 6.625e-06
4 0 4.42999e-05 6.625e-06
4.8 0 4.42999e-05 6.625e-06
5.6 0 4.42999e-05 6.625e-06
6.4 0 4.42999e-05 6.625e-06
7.2 0 4.42999e-05 6.625e-06
8 0 4.42999e-05 6.625e-06
9.6 0 4.42999e-05 6.625e-06
12.8 0 4.42999e-05 6.625e-06
16 0 4.42999e-05 6.625e-06
19.2 0 4.42999e-05 6.625e-06
END DIST

Metal 6 OVER 4
DIST count 12 width 1.6
1.6 0 4.42999e-05 6.625e-06
3.2 0 4.42999e-05 6.625e-06
4 0 4.42999e-05 6.625e-06
4.8 0 4.42999e-05 6.625e-06
5.6 0 4.42999e-05 6.625e-06
6.4 0 4.42999e-05 6.625e-06
7.2 0 4.42999e-05 6.625e-06
8 0 4.42999e-05 6.625e-06
9.6 0 4.42999e-05 6.625e-06
12.8 0 4.42999e-05 6.625e-06
16 0 4.42999e-05 6.625e-06
19.2 0 4.42999e-05 6.625e-06
END DIST

Metal 6 OVER 5
DIST count 12 width 1.6
1.6 0 4.42999e-05 6.625e-06
3.2 0 4.42999e-05 6.625e-06
4 0 4.42999e-05 6.625e-06
4.8 0 4.42999e-05 6.625e-06
5.6 0 4.42999e-05 6.625e-06
6.4 0 4.42999e-05 6.625e-06
7.2 0 4.42999e-05 6.625e-06
8 0 4.42999e-05 6.625e-06
9.6 0 4.42999e-05 6.625e-06
12.8 0 4.42999e-05 6.625e-06
16 0 4.42999e-05 6.625e-06
19.2 0 4.42999e-05 6.625e-06
END DIST

Metal 6 UNDER
WIDTH Table 0 entries: 

Metal 6 DIAGUNDER
WIDTH Table 0 entries: 
END DensityModel 0