gf180mcu/openlane/rules.openrcx.gf180mcuD.min.magic

Extraction Rules for OpenRCX

DIAGMODEL ON

LayerCount 5
DensityRate 1  0

DensityModel 0

Metal 1 RESOVER
WIDTH Table 1 entries:  0.23

Metal 1 RESOVER 0
DIST count 55 width 0.23
0 0 0 0.000333773
0 0.33 0 0.000333773
0 0.56 0 0.000333773
0 0.775 0 0.000333773
0 0.89 0 0.000333773
0 1.12 0 0.000333773
0 1.335 0 0.000333773
0 1.45 0 0.000333773
0 1.68 0 0.000333773
0 2.24 0 0.000333773
0.33 0.33 0 0.000333773
0.33 0.56 0 0.000333773
0.33 0.775 0 0.000333773
0.33 0.89 0 0.000333773
0.33 1.12 0 0.000333773
0.33 1.335 0 0.000333773
0.33 1.45 0 0.000333773
0.33 1.68 0 0.000333773
0.33 2.24 0 0.000333773
0.56 0.56 0 0.000333773
0.56 0.775 0 0.000333773
0.56 0.89 0 0.000333773
0.56 1.12 0 0.000333773
0.56 1.335 0 0.000333773
0.56 1.45 0 0.000333773
0.56 1.68 0 0.000333773
0.56 2.24 0 0.000333773
0.775 0.775 0 0.000333773
0.775 0.89 0 0.000333773
0.775 1.12 0 0.000333773
0.775 1.335 0 0.000333773
0.775 1.45 0 0.000333773
0.775 1.68 0 0.000333773
0.775 2.24 0 0.000333773
0.89 0.89 0 0.000333773
0.89 1.12 0 0.000333773
0.89 1.335 0 0.000333773
0.89 1.45 0 0.000333773
0.89 1.68 0 0.000333773
0.89 2.24 0 0.000333773
1.12 1.12 0 0.000333773
1.12 1.335 0 0.000333773
1.12 1.45 0 0.000333773
1.12 1.68 0 0.000333773
1.12 2.24 0 0.000333773
1.335 1.335 0 0.000333773
1.335 1.45 0 0.000333773
1.335 1.68 0 0.000333773
1.335 2.24 0 0.000333773
1.45 1.45 0 0.000333773
1.45 1.68 0 0.000333773
1.45 2.24 0 0.000333773
1.68 1.68 0 0.000333773
1.68 2.24 0 0.000333773
2.24 0 2.24 0.000333773
END DIST

Metal 1 OVER
WIDTH Table 1 entries:  0.23

Metal 1 OVER 0
DIST count 12 width 0.23
0.23 0.000388257 6.3803e-06 0.000166886
0.46 0.000170465 9.24144e-06 0.000166886
0.575 0.00013311 1.06184e-05 0.000166886
0.69 0.000109192 1.19501e-05 0.000166886
0.805 9.25604e-05 1.32314e-05 0.000166886
0.92 8.03251e-05 1.44583e-05 0.000166886
1.035 7.0947e-05 1.56286e-05 0.000166886
1.15 6.35298e-05 1.67411e-05 0.000166886
1.38 5.25435e-05 1.87932e-05 0.000166886
1.84 3.90407e-05 2.22479e-05 0.000166886
2.3 3.1059e-05 2.49651e-05 0.000166886
2.76 0 5.28959e-05 0.000166886
END DIST

Metal 1 UNDER
WIDTH Table 1 entries:  0.23

Metal 1 UNDER 2
DIST count 12 width 0.23
0.23 0.000388244 2.29703e-05 0.000166886
0.46 0.000170452 2.96957e-05 0.000166886
0.575 0.00013311 3.27526e-05 0.000166886
0.69 0.000109192 3.56365e-05 0.000166886
0.805 9.25604e-05 3.83145e-05 0.000166886
0.92 8.03251e-05 4.07918e-05 0.000166886
1.035 7.0947e-05 4.30805e-05 0.000166886
1.15 6.35298e-05 4.51904e-05 0.000166886
1.38 5.25435e-05 4.89337e-05 0.000166886
1.84 3.90407e-05 5.48603e-05 0.000166886
2.3 3.1059e-05 5.92597e-05 0.000166886
2.76 0 8.83921e-05 0.000166886
END DIST

Metal 1 UNDER 3
DIST count 12 width 0.23
0.23 0.000388238 1.13218e-05 0.000166886
0.46 0.000170446 1.50936e-05 0.000166886
0.575 0.00013311 1.69187e-05 0.000166886
0.69 0.000109192 1.86912e-05 0.000166886
0.805 9.25604e-05 2.04061e-05 0.000166886
0.92 8.03251e-05 2.20559e-05 0.000166886
1.035 7.0947e-05 2.36382e-05 0.000166886
1.15 6.35298e-05 2.515e-05 0.000166886
1.38 5.25435e-05 2.79682e-05 0.000166886
1.84 3.90407e-05 3.28034e-05 0.000166886
2.3 3.1059e-05 3.6704e-05 0.000166886
2.76 0 6.56377e-05 0.000166886
END DIST

Metal 1 UNDER 4
DIST count 12 width 0.23
0.23 0.000388238 9.12484e-06 0.000166886
0.46 0.000170446 1.23926e-05 0.000166886
0.575 0.00013311 1.39737e-05 0.000166886
0.69 0.000109192 1.55096e-05 0.000166886
0.805 9.25604e-05 1.69914e-05 0.000166886
0.92 8.03251e-05 1.84189e-05 0.000166886
1.035 7.0947e-05 1.97862e-05 0.000166886
1.15 6.35298e-05 2.10938e-05 0.000166886
1.38 5.25435e-05 2.35307e-05 0.000166886
1.84 3.90407e-05 2.77173e-05 0.000166886
2.3 3.1059e-05 3.11156e-05 0.000166886
2.76 0 5.96791e-05 0.000166886
END DIST

Metal 1 UNDER 5
DIST count 12 width 0.23
0.23 0.000388238 8.18891e-06 0.000166886
0.46 0.000170446 1.12437e-05 0.000166886
0.575 0.00013311 1.2722e-05 0.000166886
0.69 0.000109192 1.41551e-05 0.000166886
0.805 9.25604e-05 1.55366e-05 0.000166886
0.92 8.03251e-05 1.68639e-05 0.000166886
1.035 7.0947e-05 1.81344e-05 0.000166886
1.15 6.35298e-05 1.9346e-05 0.000166886
1.38 5.25435e-05 2.15941e-05 0.000166886
1.84 3.90407e-05 2.54343e-05 0.000166886
2.3 3.1059e-05 2.85224e-05 0.000166886
2.76 0 5.68097e-05 0.000166886
END DIST

Metal 1 DIAGUNDER
WIDTH Table 1 entries:  0.23

Metal 1 DIAGUNDER 2
DIST count 13 width 0.23
0 0 1.53444e-05 0.000166886
0.23 0 1.65065e-05 0.000166886
0.46 0 1.47762e-05 0.000166886
0.575 0 1.38098e-05 0.000166886
0.69 0 1.29346e-05 0.000166886
0.805 0 1.21207e-05 0.000166886
0.92 0 1.13797e-05 0.000166886
1.035 0 1.07142e-05 0.000166886
1.15 0 1.00978e-05 0.000166886
1.38 0 9.06267e-06 0.000166886
1.84 0 7.67115e-06 0.000166886
2.3 0 6.7834e-06 0.000166886
2.76 0 5.29596e-06 0.000166886
END DIST

Metal 1 DIAGUNDER 3
DIST count 13 width 0.23
0 0 8.9874e-06 0.000166886
0.23 0 8.91041e-06 0.000166886
0.46 0 8.73263e-06 0.000166886
0.575 0 8.62661e-06 0.000166886
0.69 0 8.51458e-06 0.000166886
0.805 0 8.39741e-06 0.000166886
0.92 0 8.27628e-06 0.000166886
1.035 0 8.152e-06 0.000166886
1.15 0 8.00198e-06 0.000166886
1.38 0 7.70277e-06 0.000166886
1.84 0 7.20479e-06 0.000166886
2.3 0 6.75679e-06 0.000166886
2.76 0 5.41348e-06 0.000166886
END DIST

Metal 1 DIAGUNDER 4
DIST count 13 width 0.23
0 0 7.25191e-06 0.000166886
0.23 0 7.5152e-06 0.000166886
0.46 0 7.3964e-06 0.000166886
0.575 0 7.33246e-06 0.000166886
0.69 0 7.26768e-06 0.000166886
0.805 0 7.20224e-06 0.000166886
0.92 0 7.13619e-06 0.000166886
1.035 0 7.06961e-06 0.000166886
1.15 0 6.97892e-06 0.000166886
1.38 0 6.80026e-06 0.000166886
1.84 0 6.53377e-06 0.000166886
2.3 0 6.29209e-06 0.000166886
2.76 0 5.06803e-06 0.000166886
END DIST

Metal 1 DIAGUNDER 5
DIST count 13 width 0.23
0 0 6.44616e-06 0.000166886
0.23 0 7.07953e-06 0.000166886
0.46 0 6.93913e-06 0.000166886
0.575 0 6.88485e-06 0.000166886
0.69 0 6.83087e-06 0.000166886
0.805 0 6.77721e-06 0.000166886
0.92 0 6.72372e-06 0.000166886
1.035 0 6.67053e-06 0.000166886
1.15 0 6.59513e-06 0.000166886
1.38 0 6.44844e-06 0.000166886
1.84 0 6.24572e-06 0.000166886
2.3 0 6.04739e-06 0.000166886
2.76 0 3.29789e-06 0.000166886
END DIST

Metal 2 RESOVER
WIDTH Table 1 entries:  0.28

Metal 2 RESOVER 0
DIST count 55 width 0.28
0 0 0 0.00027417
0 0.28 0 0.00027417
0 0.56 0 0.00027417
0 0.7 0 0.00027417
0 0.84 0 0.00027417
0 1.12 0 0.00027417
0 1.26 0 0.00027417
0 1.4 0 0.00027417
0 1.68 0 0.00027417
0 2.24 0 0.00027417
0.28 0.28 0 0.00027417
0.28 0.56 0 0.00027417
0.28 0.7 0 0.00027417
0.28 0.84 0 0.00027417
0.28 1.12 0 0.00027417
0.28 1.26 0 0.00027417
0.28 1.4 0 0.00027417
0.28 1.68 0 0.00027417
0.28 2.24 0 0.00027417
0.56 0.56 0 0.00027417
0.56 0.7 0 0.00027417
0.56 0.84 0 0.00027417
0.56 1.12 0 0.00027417
0.56 1.26 0 0.00027417
0.56 1.4 0 0.00027417
0.56 1.68 0 0.00027417
0.56 2.24 0 0.00027417
0.7 0.7 0 0.00027417
0.7 0.84 0 0.00027417
0.7 1.12 0 0.00027417
0.7 1.26 0 0.00027417
0.7 1.4 0 0.00027417
0.7 1.68 0 0.00027417
0.7 2.24 0 0.00027417
0.84 0.84 0 0.00027417
0.84 1.12 0 0.00027417
0.84 1.26 0 0.00027417
0.84 1.4 0 0.00027417
0.84 1.68 0 0.00027417
0.84 2.24 0 0.00027417
1.12 1.12 0 0.00027417
1.12 1.26 0 0.00027417
1.12 1.4 0 0.00027417
1.12 1.68 0 0.00027417
1.12 2.24 0 0.00027417
1.26 1.26 0 0.00027417
1.26 1.4 0 0.00027417
1.26 1.68 0 0.00027417
1.26 2.24 0 0.00027417
1.4 1.4 0 0.00027417
1.4 1.68 0 0.00027417
1.4 2.24 0 0.00027417
1.68 1.68 0 0.00027417
1.68 2.24 0 0.00027417
2.24 0 2.24 0.00027417
END DIST

Metal 2 RESOVER 1
DIST count 0 width 0.28
END DIST

Metal 2 OVER
WIDTH Table 1 entries:  0.28

Metal 2 OVER 0
DIST count 12 width 0.28
0.28 0.000159793 3.8985e-06 0.000137085
0.56 0.000107767 5.49731e-06 0.000137085
0.7 9.26789e-05 6.28396e-06 0.000137085
0.84 8.12973e-05 7.05942e-06 0.000137085
0.98 7.24055e-05 7.82179e-06 0.000137085
1.12 6.52667e-05 8.56948e-06 0.000137085
1.26 5.94095e-05 9.30106e-06 0.000137085
1.4 5.4517e-05 1.00153e-05 0.000137085
1.68 4.68075e-05 1.13882e-05 0.000137085
2.24 3.64877e-05 1.38962e-05 0.000137085
2.8 2.98964e-05 1.60824e-05 0.000137085
3.36 0 4.32905e-05 0.000137085
END DIST

Metal 2 OVER 1
DIST count 12 width 0.28
0.28 0.000159791 2.22841e-05 0.000137085
0.56 0.000107766 2.99699e-05 0.000137085
0.7 9.26789e-05 3.32827e-05 0.000137085
0.84 8.12973e-05 3.62371e-05 0.000137085
0.98 7.24055e-05 3.88607e-05 0.000137085
1.12 6.52667e-05 4.11898e-05 0.000137085
1.26 5.94095e-05 4.32611e-05 0.000137085
1.4 5.4517e-05 4.51068e-05 0.000137085
1.68 4.68075e-05 4.82532e-05 0.000137085
2.24 3.64877e-05 5.29676e-05 0.000137085
2.8 2.98964e-05 5.63396e-05 0.000137085
3.36 0 8.4199e-05 0.000137085
END DIST

Metal 2 UNDER
WIDTH Table 1 entries:  0.28

Metal 2 UNDER 3
DIST count 12 width 0.28
0.28 0.000159793 2.47704e-05 0.000137085
0.56 0.000107767 3.14828e-05 0.000137085
0.7 9.26789e-05 3.44358e-05 0.000137085
0.84 8.12973e-05 3.7116e-05 0.000137085
0.98 7.24055e-05 3.95433e-05 0.000137085
1.12 6.52667e-05 4.1743e-05 0.000137085
1.26 5.94095e-05 4.3739e-05 0.000137085
1.4 5.4517e-05 4.55589e-05 0.000137085
1.68 4.68075e-05 4.87554e-05 0.000137085
2.24 3.64877e-05 5.38319e-05 0.000137085
2.8 2.98964e-05 5.77083e-05 0.000137085
3.36 0 8.60975e-05 0.000137085
END DIST

Metal 2 UNDER 4
DIST count 12 width 0.28
0.28 0.000159791 1.02016e-05 0.000137085
0.56 0.000107766 1.31514e-05 0.000137085
0.7 9.26789e-05 1.45982e-05 0.000137085
0.84 8.12973e-05 1.60158e-05 0.000137085
0.98 7.24055e-05 1.74023e-05 0.000137085
1.12 6.52667e-05 1.8756e-05 0.000137085
1.26 5.94095e-05 2.00702e-05 0.000137085
1.4 5.4517e-05 2.13455e-05 0.000137085
1.68 4.68075e-05 2.37735e-05 0.000137085
2.24 3.64877e-05 2.81159e-05 0.000137085
2.8 2.98964e-05 3.18065e-05 0.000137085
3.36 0 6.02442e-05 0.000137085
END DIST

Metal 2 UNDER 5
DIST count 12 width 0.28
0.28 0.000159791 7.17754e-06 0.000137085
0.56 0.000107766 9.30705e-06 0.000137085
0.7 9.26789e-05 1.03599e-05 0.000137085
0.84 8.12973e-05 1.13993e-05 0.000137085
0.98 7.24055e-05 1.24244e-05 0.000137085
1.12 6.52667e-05 1.34305e-05 0.000137085
1.26 5.94095e-05 1.44182e-05 0.000137085
1.4 5.4517e-05 1.53851e-05 0.000137085
1.68 4.68075e-05 1.72512e-05 0.000137085
2.24 3.64877e-05 2.0693e-05 0.000137085
2.8 2.98964e-05 2.3737e-05 0.000137085
3.36 0 5.17223e-05 0.000137085
END DIST

Metal 2 DIAGUNDER
WIDTH Table 1 entries:  0.28

Metal 2 DIAGUNDER 3
DIST count 13 width 0.28
0 0 1.78793e-05 0.000137085
0.28 0 1.95445e-05 0.000137085
0.56 0 1.69767e-05 0.000137085
0.7 0 1.57183e-05 0.000137085
0.84 0 1.45718e-05 0.000137085
0.98 0 1.35561e-05 0.000137085
1.12 0 1.26702e-05 0.000137085
1.26 0 1.19036e-05 0.000137085
1.4 0 1.12069e-05 0.000137085
1.68 0 1.00753e-05 0.000137085
2.24 0 8.64066e-06 0.000137085
2.8 0 7.74632e-06 0.000137085
3.36 0 6.14957e-06 0.000137085
END DIST

Metal 2 DIAGUNDER 4
DIST count 13 width 0.28
0 0 1.10253e-05 0.000137085
0.28 0 1.12264e-05 0.000137085
0.56 0 1.09562e-05 0.000137085
0.7 0 1.07858e-05 0.000137085
0.84 0 1.06065e-05 0.000137085
0.98 0 1.04206e-05 0.000137085
1.12 0 1.02303e-05 0.000137085
1.26 0 1.00375e-05 0.000137085
1.4 0 9.80942e-06 0.000137085
1.68 0 9.3636e-06 0.000137085
2.24 0 8.6526e-06 0.000137085
2.8 0 8.05007e-06 0.000137085
3.36 0 6.46104e-06 0.000137085
END DIST

Metal 2 DIAGUNDER 5
DIST count 13 width 0.28
0 0 9.00696e-06 0.000137085
0.28 0 9.73506e-06 0.000137085
0.56 0 9.53452e-06 0.000137085
0.7 0 9.4399e-06 0.000137085
0.84 0 9.34398e-06 0.000137085
0.98 0 9.24686e-06 0.000137085
1.12 0 9.14881e-06 0.000137085
1.26 0 9.04993e-06 0.000137085
1.4 0 8.91735e-06 0.000137085
1.68 0 8.65671e-06 0.000137085
2.24 0 8.26382e-06 0.000137085
2.8 0 7.88048e-06 0.000137085
3.36 0 4.37305e-06 0.000137085
END DIST

Metal 2 OVERUNDER
WIDTH Table 1 entries:  0.28

Metal 2 OVER 1 UNDER 3
DIST count 12 width 0.28
0.28 0.000159792 4.3156e-05 0.000137085
0.56 0.000107766 5.59554e-05 0.000137085
0.7 9.26789e-05 6.14345e-05 0.000137085
0.84 8.12973e-05 6.62937e-05 0.000137085
0.98 7.24055e-05 7.05821e-05 0.000137085
1.12 6.52667e-05 7.43633e-05 0.000137085
1.26 5.94095e-05 7.7699e-05 0.000137085
1.4 5.4517e-05 8.06504e-05 0.000137085
1.68 4.68075e-05 8.56204e-05 0.000137085
2.24 3.64877e-05 9.29033e-05 0.000137085
2.8 2.98964e-05 9.79655e-05 0.000137085
3.36 0 0.000127008 0.000137085
END DIST

Metal 2 OVER 1 UNDER 4
DIST count 12 width 0.28
0.28 0.000159791 2.85872e-05 0.000137085
0.56 0.000107766 3.76239e-05 0.000137085
0.7 9.26789e-05 4.15969e-05 0.000137085
0.84 8.12973e-05 4.51935e-05 0.000137085
0.98 7.24055e-05 4.84411e-05 0.000137085
1.12 6.52667e-05 5.13763e-05 0.000137085
1.26 5.94095e-05 5.40303e-05 0.000137085
1.4 5.4517e-05 5.64369e-05 0.000137085
1.68 4.68075e-05 6.06385e-05 0.000137085
2.24 3.64877e-05 6.71873e-05 0.000137085
2.8 2.98964e-05 7.20637e-05 0.000137085
3.36 0 0.000101154 0.000137085
END DIST

Metal 2 OVER 1 UNDER 5
DIST count 12 width 0.28
0.28 0.000159791 2.55631e-05 0.000137085
0.56 0.000107766 3.37796e-05 0.000137085
0.7 9.26789e-05 3.73586e-05 0.000137085
0.84 8.12973e-05 4.0577e-05 0.000137085
0.98 7.24055e-05 4.34633e-05 0.000137085
1.12 6.52667e-05 4.60508e-05 0.000137085
1.26 5.94095e-05 4.83782e-05 0.000137085
1.4 5.4517e-05 5.04766e-05 0.000137085
1.68 4.68075e-05 5.41162e-05 0.000137085
2.24 3.64877e-05 5.97644e-05 0.000137085
2.8 2.98964e-05 6.39942e-05 0.000137085
3.36 0 9.26345e-05 0.000137085
END DIST

Metal 3 RESOVER
WIDTH Table 1 entries:  0.28

Metal 3 RESOVER 0
DIST count 55 width 0.28
0 0 0 0.00027417
0 0.28 0 0.00027417
0 0.56 0 0.00027417
0 0.7 0 0.00027417
0 0.84 0 0.00027417
0 1.12 0 0.00027417
0 1.26 0 0.00027417
0 1.4 0 0.00027417
0 1.68 0 0.00027417
0 2.24 0 0.00027417
0.28 0.28 0 0.00027417
0.28 0.56 0 0.00027417
0.28 0.7 0 0.00027417
0.28 0.84 0 0.00027417
0.28 1.12 0 0.00027417
0.28 1.26 0 0.00027417
0.28 1.4 0 0.00027417
0.28 1.68 0 0.00027417
0.28 2.24 0 0.00027417
0.56 0.56 0 0.00027417
0.56 0.7 0 0.00027417
0.56 0.84 0 0.00027417
0.56 1.12 0 0.00027417
0.56 1.26 0 0.00027417
0.56 1.4 0 0.00027417
0.56 1.68 0 0.00027417
0.56 2.24 0 0.00027417
0.7 0.7 0 0.00027417
0.7 0.84 0 0.00027417
0.7 1.12 0 0.00027417
0.7 1.26 0 0.00027417
0.7 1.4 0 0.00027417
0.7 1.68 0 0.00027417
0.7 2.24 0 0.00027417
0.84 0.84 0 0.00027417
0.84 1.12 0 0.00027417
0.84 1.26 0 0.00027417
0.84 1.4 0 0.00027417
0.84 1.68 0 0.00027417
0.84 2.24 0 0.00027417
1.12 1.12 0 0.00027417
1.12 1.26 0 0.00027417
1.12 1.4 0 0.00027417
1.12 1.68 0 0.00027417
1.12 2.24 0 0.00027417
1.26 1.26 0 0.00027417
1.26 1.4 0 0.00027417
1.26 1.68 0 0.00027417
1.26 2.24 0 0.00027417
1.4 1.4 0 0.00027417
1.4 1.68 0 0.00027417
1.4 2.24 0 0.00027417
1.68 1.68 0 0.00027417
1.68 2.24 0 0.00027417
2.24 0 2.24 0.00027417
END DIST

Metal 3 RESOVER 1
DIST count 0 width 0.28
END DIST

Metal 3 RESOVER 2
DIST count 0 width 0.28
END DIST

Metal 3 OVER
WIDTH Table 1 entries:  0.28

Metal 3 OVER 0
DIST count 12 width 0.28
0.28 0.000166558 2.59426e-06 0.000137085
0.56 0.00012955 3.56706e-06 0.000137085
0.7 0.000116576 4.04912e-06 0.000137085
0.84 0.000105978 4.52848e-06 0.000137085
0.98 9.71465e-05 5.004e-06 0.000137085
1.12 8.96739e-05 5.47514e-06 0.000137085
1.26 8.32684e-05 5.94134e-06 0.000137085
1.4 7.77172e-05 6.40215e-06 0.000137085
1.68 6.8574e-05 7.30566e-06 0.000137085
2.24 5.55123e-05 9.0303e-06 0.000137085
2.8 4.66303e-05 1.06314e-05 0.000137085
3.36 0 5.23016e-05 0.000137085
END DIST

Metal 3 OVER 1
DIST count 12 width 0.28
0.28 0.000166537 7.45534e-06 0.000137085
0.56 0.000129529 1.01513e-05 0.000137085
0.7 0.000116576 1.14668e-05 0.000137085
0.84 0.000105978 1.27566e-05 0.000137085
0.98 9.71465e-05 1.40116e-05 0.000137085
1.12 8.96739e-05 1.52336e-05 0.000137085
1.26 8.32684e-05 1.64182e-05 0.000137085
1.4 7.77172e-05 1.7565e-05 0.000137085
1.68 6.8574e-05 1.97356e-05 0.000137085
2.24 5.55123e-05 2.35929e-05 0.000137085
2.8 4.66303e-05 2.68471e-05 0.000137085
3.36 0 6.97843e-05 0.000137085
END DIST

Metal 3 OVER 2
DIST count 12 width 0.28
0.28 0.000166537 2.23553e-05 0.000137085
0.56 0.000129529 2.97374e-05 0.000137085
0.7 0.000116576 3.29026e-05 0.000137085
0.84 0.000105978 3.57126e-05 0.000137085
0.98 9.71465e-05 3.8196e-05 0.000137085
1.12 8.96739e-05 4.03905e-05 0.000137085
1.26 8.32684e-05 4.23299e-05 0.000137085
1.4 7.77172e-05 4.4052e-05 0.000137085
1.68 6.8574e-05 4.69641e-05 0.000137085
2.24 5.55123e-05 5.12914e-05 0.000137085
2.8 4.66303e-05 5.4372e-05 0.000137085
3.36 0 9.69015e-05 0.000137085
END DIST

Metal 3 UNDER
WIDTH Table 1 entries:  0.28

Metal 3 UNDER 4
DIST count 12 width 0.28
0.28 0.00016654 2.40525e-05 0.000137085
0.56 0.000129532 3.05795e-05 0.000137085
0.7 0.000116576 3.34124e-05 0.000137085
0.84 0.000105978 3.59733e-05 0.000137085
0.98 9.71465e-05 3.82652e-05 0.000137085
1.12 8.96739e-05 4.03201e-05 0.000137085
1.26 8.32684e-05 4.21679e-05 0.000137085
1.4 7.77172e-05 4.38354e-05 0.000137085
1.68 6.8574e-05 4.67303e-05 0.000137085
2.24 5.55123e-05 5.1258e-05 0.000137085
2.8 4.66303e-05 5.47043e-05 0.000137085
3.36 0 9.76699e-05 0.000137085
END DIST

Metal 3 UNDER 5
DIST count 12 width 0.28
0.28 0.000166537 8.29744e-06 0.000137085
0.56 0.000129529 1.04573e-05 0.000137085
0.7 0.000116576 1.15236e-05 0.000137085
0.84 0.000105978 1.25756e-05 0.000137085
0.98 9.71465e-05 1.36114e-05 0.000137085
1.12 8.96739e-05 1.46294e-05 0.000137085
1.26 8.32684e-05 1.56279e-05 0.000137085
1.4 7.77172e-05 1.66043e-05 0.000137085
1.68 6.8574e-05 1.84908e-05 0.000137085
2.24 5.55123e-05 2.19745e-05 0.000137085
2.8 4.66303e-05 2.50686e-05 0.000137085
3.36 0 6.79914e-05 0.000137085
END DIST

Metal 3 DIAGUNDER
WIDTH Table 1 entries:  0.28

Metal 3 DIAGUNDER 4
DIST count 13 width 0.28
0 0 2.03903e-05 0.000137085
0.28 0 2.53328e-05 0.000137085
0.56 0 2.25899e-05 0.000137085
0.7 0 2.11585e-05 0.000137085
0.84 0 1.99197e-05 0.000137085
0.98 0 1.88176e-05 0.000137085
1.12 0 1.78512e-05 0.000137085
1.26 0 1.70095e-05 0.000137085
1.4 0 1.62198e-05 0.000137085
1.68 0 1.49181e-05 0.000137085
2.24 0 1.32685e-05 0.000137085
2.8 0 1.21943e-05 0.000137085
3.36 0 9.80173e-06 0.000137085
END DIST

Metal 3 DIAGUNDER 5
DIST count 13 width 0.28
0 0 1.4996e-05 0.000137085
0.28 0 1.67943e-05 0.000137085
0.56 0 1.6422e-05 0.000137085
0.7 0 1.62145e-05 0.000137085
0.84 0 1.59996e-05 0.000137085
0.98 0 1.57787e-05 0.000137085
1.12 0 1.55534e-05 0.000137085
1.26 0 1.53252e-05 0.000137085
1.4 0 1.50406e-05 0.000137085
1.68 0 1.44816e-05 0.000137085
2.24 0 1.36083e-05 0.000137085
2.8 0 1.28087e-05 0.000137085
3.36 0 6.93276e-06 0.000137085
END DIST

Metal 3 OVERUNDER
WIDTH Table 1 entries:  0.28

Metal 3 OVER 1 UNDER 4
DIST count 12 width 0.28
0.28 0.000166608 2.88675e-05 0.000137085
0.56 0.000129556 3.71778e-05 0.000137085
0.7 0.000116576 4.08766e-05 0.000137085
0.84 0.000105978 4.42479e-05 0.000137085
0.98 9.71465e-05 4.73193e-05 0.000137085
1.12 8.96739e-05 5.01251e-05 0.000137085
1.26 8.32684e-05 5.26913e-05 0.000137085
1.4 7.77172e-05 5.50448e-05 0.000137085
1.68 6.8574e-05 5.92067e-05 0.000137085
2.24 5.55123e-05 6.58671e-05 0.000137085
2.8 4.66303e-05 7.09665e-05 0.000137085
3.36 0 0.000115195 0.000137085
END DIST

Metal 3 OVER 1 UNDER 5
DIST count 12 width 0.28
0.28 0.000166674 1.31301e-05 0.000137085
0.56 0.000129578 1.70799e-05 0.000137085
0.7 0.000116576 1.90143e-05 0.000137085
0.84 0.000105978 2.08766e-05 0.000137085
0.98 9.71465e-05 2.26919e-05 0.000137085
1.12 8.96739e-05 2.44608e-05 0.000137085
1.26 8.32684e-05 2.61777e-05 0.000137085
1.4 7.77172e-05 2.78401e-05 0.000137085
1.68 6.8574e-05 3.09937e-05 0.000137085
2.24 5.55123e-05 3.66101e-05 0.000137085
2.8 4.66303e-05 4.13572e-05 0.000137085
3.36 0 8.55474e-05 0.000137085
END DIST

Metal 3 OVER 2 UNDER 4
DIST count 12 width 0.28
0.28 0.000166674 4.37554e-05 0.000137085
0.56 0.000129578 5.67906e-05 0.000137085
0.7 0.000116576 6.23598e-05 0.000137085
0.84 0.000105978 6.72513e-05 0.000137085
0.98 9.71465e-05 7.15511e-05 0.000137085
1.12 8.96739e-05 7.53292e-05 0.000137085
1.26 8.32684e-05 7.86504e-05 0.000137085
1.4 7.77172e-05 8.15792e-05 0.000137085
1.68 6.8574e-05 8.64826e-05 0.000137085
2.24 5.55123e-05 9.3613e-05 0.000137085
2.8 4.66303e-05 9.85387e-05 0.000137085
3.36 0 0.000142362 0.000137085
END DIST

Metal 3 OVER 2 UNDER 5
DIST count 12 width 0.28
0.28 0.000166626 2.80499e-05 0.000137085
0.56 0.000129574 3.66537e-05 0.000137085
0.7 0.000116576 4.04013e-05 0.000137085
0.84 0.000105978 4.37839e-05 0.000137085
0.98 9.71465e-05 4.68277e-05 0.000137085
1.12 8.96739e-05 4.95689e-05 0.000137085
1.26 8.32684e-05 5.20407e-05 0.000137085
1.4 7.77172e-05 5.42784e-05 0.000137085
1.68 6.8574e-05 5.81735e-05 0.000137085
2.24 5.55123e-05 6.42599e-05 0.000137085
2.8 4.66303e-05 6.88334e-05 0.000137085
3.36 0 0.000112618 0.000137085
END DIST

Metal 4 RESOVER
WIDTH Table 1 entries:  0.28

Metal 4 RESOVER 0
DIST count 55 width 0.28
0 0 0 0.00027417
0 0.28 0 0.00027417
0 0.56 0 0.00027417
0 0.7 0 0.00027417
0 0.84 0 0.00027417
0 1.12 0 0.00027417
0 1.26 0 0.00027417
0 1.4 0 0.00027417
0 1.68 0 0.00027417
0 2.24 0 0.00027417
0.28 0.28 0 0.00027417
0.28 0.56 0 0.00027417
0.28 0.7 0 0.00027417
0.28 0.84 0 0.00027417
0.28 1.12 0 0.00027417
0.28 1.26 0 0.00027417
0.28 1.4 0 0.00027417
0.28 1.68 0 0.00027417
0.28 2.24 0 0.00027417
0.56 0.56 0 0.00027417
0.56 0.7 0 0.00027417
0.56 0.84 0 0.00027417
0.56 1.12 0 0.00027417
0.56 1.26 0 0.00027417
0.56 1.4 0 0.00027417
0.56 1.68 0 0.00027417
0.56 2.24 0 0.00027417
0.7 0.7 0 0.00027417
0.7 0.84 0 0.00027417
0.7 1.12 0 0.00027417
0.7 1.26 0 0.00027417
0.7 1.4 0 0.00027417
0.7 1.68 0 0.00027417
0.7 2.24 0 0.00027417
0.84 0.84 0 0.00027417
0.84 1.12 0 0.00027417
0.84 1.26 0 0.00027417
0.84 1.4 0 0.00027417
0.84 1.68 0 0.00027417
0.84 2.24 0 0.00027417
1.12 1.12 0 0.00027417
1.12 1.26 0 0.00027417
1.12 1.4 0 0.00027417
1.12 1.68 0 0.00027417
1.12 2.24 0 0.00027417
1.26 1.26 0 0.00027417
1.26 1.4 0 0.00027417
1.26 1.68 0 0.00027417
1.26 2.24 0 0.00027417
1.4 1.4 0 0.00027417
1.4 1.68 0 0.00027417
1.4 2.24 0 0.00027417
1.68 1.68 0 0.00027417
1.68 2.24 0 0.00027417
2.24 0 2.24 0.00027417
END DIST

Metal 4 RESOVER 1
DIST count 0 width 0.28
END DIST

Metal 4 RESOVER 2
DIST count 0 width 0.28
END DIST

Metal 4 RESOVER 3
DIST count 0 width 0.28
END DIST

Metal 4 OVER
WIDTH Table 1 entries:  0.28

Metal 4 OVER 0
DIST count 12 width 0.28
0.28 0.000164339 1.96537e-06 0.000137085
0.56 0.000127816 2.65395e-06 0.000137085
0.7 0.000115035 2.99677e-06 0.000137085
0.84 0.000104577 3.33826e-06 0.000137085
0.98 9.58622e-05 3.67816e-06 0.000137085
1.12 8.84885e-05 4.01623e-06 0.000137085
1.26 8.21674e-05 4.35225e-06 0.000137085
1.4 7.66898e-05 4.68597e-06 0.000137085
1.68 6.76675e-05 5.34567e-06 0.000137085
2.24 5.47784e-05 6.6287e-06 0.000137085
2.8 4.60139e-05 7.85464e-06 0.000137085
3.36 0 4.86874e-05 0.000137085
END DIST

Metal 4 OVER 1
DIST count 12 width 0.28
0.28 0.000164335 4.45572e-06 0.000137085
0.56 0.000127816 6.01468e-06 0.000137085
0.7 0.000115035 6.78681e-06 0.000137085
0.84 0.000104577 7.55395e-06 0.000137085
0.98 9.58622e-05 8.31151e-06 0.000137085
1.12 8.84885e-05 9.06153e-06 0.000137085
1.26 8.21674e-05 9.80182e-06 0.000137085
1.4 7.66898e-05 1.05321e-05 0.000137085
1.68 6.76675e-05 1.19583e-05 0.000137085
2.24 5.47784e-05 1.46543e-05 0.000137085
2.8 4.60139e-05 1.71245e-05 0.000137085
3.36 0 5.90358e-05 0.000137085
END DIST

Metal 4 OVER 2
DIST count 12 width 0.28
0.28 0.000164335 7.43737e-06 0.000137085
0.56 0.000127816 1.00253e-05 0.000137085
0.7 0.000115035 1.1288e-05 0.000137085
0.84 0.000104577 1.25247e-05 0.000137085
0.98 9.58622e-05 1.373e-05 0.000137085
1.12 8.84885e-05 1.49001e-05 0.000137085
1.26 8.21674e-05 1.6035e-05 0.000137085
1.4 7.66898e-05 1.71326e-05 0.000137085
1.68 6.76675e-05 1.92084e-05 0.000137085
2.24 5.47784e-05 2.28929e-05 0.000137085
2.8 4.60139e-05 2.59986e-05 0.000137085
3.36 0 6.82792e-05 0.000137085
END DIST

Metal 4 OVER 3
DIST count 12 width 0.28
0.28 0.000164335 2.25657e-05 0.000137085
0.56 0.000127816 2.98022e-05 0.000137085
0.7 0.000115035 3.28939e-05 0.000137085
0.84 0.000104577 3.56331e-05 0.000137085
0.98 9.58622e-05 3.8047e-05 0.000137085
1.12 8.84885e-05 4.01731e-05 0.000137085
1.26 8.21674e-05 4.20456e-05 0.000137085
1.4 7.66898e-05 4.37042e-05 0.000137085
1.68 6.76675e-05 4.64925e-05 0.000137085
2.24 5.47784e-05 5.05955e-05 0.000137085
2.8 4.60139e-05 5.34866e-05 0.000137085
3.36 0 9.53306e-05 0.000137085
END DIST

Metal 4 UNDER
WIDTH Table 1 entries:  0.28

Metal 4 UNDER 5
DIST count 12 width 0.28
0.28 0.000164339 1.68288e-05 0.000137085
0.56 0.000127816 2.12022e-05 0.000137085
0.7 0.000115035 2.32315e-05 0.000137085
0.84 0.000104577 2.51375e-05 0.000137085
0.98 9.58622e-05 2.6919e-05 0.000137085
1.12 8.84885e-05 2.85777e-05 0.000137085
1.26 8.21674e-05 3.01171e-05 0.000137085
1.4 7.66898e-05 3.15457e-05 0.000137085
1.68 6.76675e-05 3.41065e-05 0.000137085
2.24 5.47784e-05 3.82714e-05 0.000137085
2.8 4.60139e-05 4.15271e-05 0.000137085
3.36 0 8.38365e-05 0.000137085
END DIST

Metal 4 DIAGUNDER
WIDTH Table 1 entries:  0.28

Metal 4 DIAGUNDER 5
DIST count 13 width 0.28
0 0 1.84796e-05 0.000137085
0.28 0 2.38062e-05 0.000137085
0.56 0 2.21826e-05 0.000137085
0.7 0 2.12914e-05 0.000137085
0.84 0 2.04065e-05 0.000137085
0.98 0 1.95524e-05 0.000137085
1.12 0 1.87449e-05 0.000137085
1.26 0 1.79925e-05 0.000137085
1.4 0 1.72442e-05 0.000137085
1.68 0 1.59273e-05 0.000137085
2.24 0 1.40824e-05 0.000137085
2.8 0 1.27838e-05 0.000137085
3.36 0 6.82237e-06 0.000137085
END DIST

Metal 4 OVERUNDER
WIDTH Table 1 entries:  0.28

Metal 4 OVER 1 UNDER 5
DIST count 12 width 0.28
0.28 0.000164339 1.93477e-05 0.000137085
0.56 0.000127816 2.45659e-05 0.000137085
0.7 0.000115035 2.70215e-05 0.000137085
0.84 0.000104577 2.93532e-05 0.000137085
0.98 9.58622e-05 3.15523e-05 0.000137085
1.12 8.84885e-05 3.3623e-05 0.000137085
1.26 8.21674e-05 3.55666e-05 0.000137085
1.4 7.66898e-05 3.73918e-05 0.000137085
1.68 6.76675e-05 4.07191e-05 0.000137085
2.24 5.47784e-05 4.6297e-05 0.000137085
2.8 4.60139e-05 5.0797e-05 0.000137085
3.36 0 9.4189e-05 0.000137085
END DIST

Metal 4 OVER 2 UNDER 5
DIST count 12 width 0.28
0.28 0.000164335 2.23008e-05 0.000137085
0.56 0.000127816 2.85735e-05 0.000137085
0.7 0.000115035 3.15227e-05 0.000137085
0.84 0.000104577 3.4324e-05 0.000137085
0.98 9.58622e-05 3.69708e-05 0.000137085
1.12 8.84885e-05 3.94617e-05 0.000137085
1.26 8.21674e-05 4.17998e-05 0.000137085
1.4 7.66898e-05 4.39923e-05 0.000137085
1.68 6.76675e-05 4.79693e-05 0.000137085
2.24 5.47784e-05 5.45356e-05 0.000137085
2.8 4.60139e-05 5.96711e-05 0.000137085
3.36 0 0.000103432 0.000137085
END DIST

Metal 4 OVER 3 UNDER 5
DIST count 12 width 0.28
0.28 0.000164335 3.74291e-05 0.000137085
0.56 0.000127816 4.83504e-05 0.000137085
0.7 0.000115035 5.31286e-05 0.000137085
0.84 0.000104577 5.74324e-05 0.000137085
0.98 9.58622e-05 6.12878e-05 0.000137085
1.12 8.84885e-05 6.47346e-05 0.000137085
1.26 8.21674e-05 6.78104e-05 0.000137085
1.4 7.66898e-05 7.05639e-05 0.000137085
1.68 6.76675e-05 7.52534e-05 0.000137085
2.24 5.47784e-05 8.22382e-05 0.000137085
2.8 4.60139e-05 8.71591e-05 0.000137085
3.36 0 0.000130485 0.000137085
END DIST

Metal 5 RESOVER
WIDTH Table 1 entries:  0.44

Metal 5 RESOVER 0
DIST count 55 width 0.44
0 0 0 0.000114784
0 0.46 0 0.000114784
0 0.9 0 0.000114784
0 1.14 0 0.000114784
0 1.36 0 0.000114784
0 1.8 0 0.000114784
0 2.04 0 0.000114784
0 2.26 0 0.000114784
0 2.7 0 0.000114784
0 3.6 0 0.000114784
0.46 0.46 0 0.000114784
0.46 0.9 0 0.000114784
0.46 1.14 0 0.000114784
0.46 1.36 0 0.000114784
0.46 1.8 0 0.000114784
0.46 2.04 0 0.000114784
0.46 2.26 0 0.000114784
0.46 2.7 0 0.000114784
0.46 3.6 0 0.000114784
0.9 0.9 0 0.000114784
0.9 1.14 0 0.000114784
0.9 1.36 0 0.000114784
0.9 1.8 0 0.000114784
0.9 2.04 0 0.000114784
0.9 2.26 0 0.000114784
0.9 2.7 0 0.000114784
0.9 3.6 0 0.000114784
1.14 1.14 0 0.000114784
1.14 1.36 0 0.000114784
1.14 1.8 0 0.000114784
1.14 2.04 0 0.000114784
1.14 2.26 0 0.000114784
1.14 2.7 0 0.000114784
1.14 3.6 0 0.000114784
1.36 1.36 0 0.000114784
1.36 1.8 0 0.000114784
1.36 2.04 0 0.000114784
1.36 2.26 0 0.000114784
1.36 2.7 0 0.000114784
1.36 3.6 0 0.000114784
1.8 1.8 0 0.000114784
1.8 2.04 0 0.000114784
1.8 2.26 0 0.000114784
1.8 2.7 0 0.000114784
1.8 3.6 0 0.000114784
2.04 2.04 0 0.000114784
2.04 2.26 0 0.000114784
2.04 2.7 0 0.000114784
2.04 3.6 0 0.000114784
2.26 2.26 0 0.000114784
2.26 2.7 0 0.000114784
2.26 3.6 0 0.000114784
2.7 2.7 0 0.000114784
2.7 3.6 0 0.000114784
3.6 0 3.6 0.000114784
END DIST

Metal 5 RESOVER 1
DIST count 0 width 0.44
END DIST

Metal 5 RESOVER 2
DIST count 0 width 0.44
END DIST

Metal 5 RESOVER 3
DIST count 0 width 0.44
END DIST

Metal 5 RESOVER 4
DIST count 0 width 0.44
END DIST

Metal 5 OVER
WIDTH Table 1 entries:  0.44

Metal 5 OVER 0
DIST count 12 width 0.44
0.46 0.00040607 2.45565e-06 5.73921e-05
0.92 0.000203035 3.4032e-06 5.73921e-05
1.15 0.000162428 3.87373e-06 5.73921e-05
1.38 0.000135356 4.34138e-06 5.73921e-05
1.61 0.00011602 4.80565e-06 5.73921e-05
1.84 0.000101517 5.26602e-06 5.73921e-05
2.07 9.02378e-05 5.72203e-06 5.73921e-05
2.3 8.1214e-05 6.17321e-06 5.73921e-05
2.76 6.76781e-05 7.05948e-06 5.73921e-05
3.68 5.07585e-05 8.75804e-06 5.73921e-05
4.6 4.06568e-05 1.03233e-05 5.73921e-05
5.52 0 4.5678e-05 5.73921e-05
END DIST

Metal 5 OVER 1
DIST count 12 width 0.44
0.46 0.000406069 4.91646e-06 5.73921e-05
0.92 0.000203067 6.79368e-06 5.73921e-05
1.15 0.000162428 7.75178e-06 5.73921e-05
1.38 0.000135356 8.67903e-06 5.73921e-05
1.61 0.00011602 9.59572e-06 5.73921e-05
1.84 0.000101517 1.05016e-05 5.73921e-05
2.07 9.02378e-05 1.139e-05 5.73921e-05
2.3 8.1214e-05 1.22649e-05 5.73921e-05
2.76 6.76781e-05 1.39648e-05 5.73921e-05
3.68 5.07585e-05 1.71427e-05 5.73921e-05
4.6 4.06069e-05 2.00069e-05 5.73921e-05
5.52 0 5.64104e-05 5.73921e-05
END DIST

Metal 5 OVER 2
DIST count 12 width 0.44
0.46 0.000406069 6.64161e-06 5.73921e-05
0.92 0.000203035 9.17086e-06 5.73921e-05
1.15 0.000162428 1.04088e-05 5.73921e-05
1.38 0.0001354 1.16059e-05 5.73921e-05
1.61 0.00011602 1.28187e-05 5.73921e-05
1.84 0.000101517 1.39813e-05 5.73921e-05
2.07 9.02378e-05 1.51147e-05 5.73921e-05
2.3 8.1214e-05 1.62152e-05 5.73921e-05
2.76 6.76781e-05 1.83162e-05 5.73921e-05
3.68 5.07585e-05 2.20981e-05 5.73921e-05
4.6 4.06069e-05 2.53454e-05 5.73921e-05
5.52 0 6.19539e-05 5.73921e-05
END DIST

Metal 5 OVER 3
DIST count 12 width 0.44
0.46 0.000406069 1.05415e-05 5.73921e-05
0.92 0.000203035 1.45296e-05 5.73921e-05
1.15 0.000162428 1.64294e-05 5.73921e-05
1.38 0.000135356 1.82541e-05 5.73921e-05
1.61 0.00011602 1.9996e-05 5.73921e-05
1.84 0.000101517 2.16497e-05 5.73921e-05
2.07 9.02378e-05 2.32149e-05 5.73921e-05
2.3 8.1214e-05 2.46931e-05 5.73921e-05
2.76 6.76781e-05 2.73968e-05 5.73921e-05
3.68 5.07585e-05 3.19036e-05 5.73921e-05
4.6 4.06069e-05 3.54476e-05 5.73921e-05
5.52 0 7.21173e-05 5.73921e-05
END DIST

Metal 5 OVER 4
DIST count 12 width 0.44
0.46 0.000406069 2.52526e-05 5.73921e-05
0.92 0.000203035 3.39249e-05 5.73921e-05
1.15 0.000162428 3.75084e-05 5.73921e-05
1.38 0.000135356 4.06192e-05 5.73921e-05
1.61 0.00011602 4.3311e-05 5.73921e-05
1.84 0.000101517 4.56464e-05 5.73921e-05
2.07 9.02378e-05 4.76793e-05 5.73921e-05
2.3 8.1214e-05 4.94633e-05 5.73921e-05
2.76 6.76781e-05 5.2435e-05 5.73921e-05
3.68 5.07585e-05 5.67709e-05 5.73921e-05
4.6 4.06069e-05 5.98203e-05 5.73921e-05
5.52 0 9.59557e-05 5.73921e-05
END DIST

Metal 5 UNDER
WIDTH Table 0 entries: 

Metal 5 DIAGUNDER
WIDTH Table 0 entries: 
END DensityModel 0