gf180mcu/openlane/rules.openrcx.gf180mcuC.nom

Extraction Rules for OpenRCX

DIAGMODEL ON

LayerCount 5
DensityRate 1  0

DensityModel 0

Metal 1 RESOVER
WIDTH Table 1 entries:  0.23

Metal 1 RESOVER 0
DIST count 55 width 0.23
0 0 0 0.000395696
0 0.33 0 0.000395696
0 0.56 0 0.000395696
0 0.775 0 0.000395696
0 0.89 0 0.000395696
0 1.12 0 0.000395696
0 1.335 0 0.000395696
0 1.45 0 0.000395696
0 1.68 0 0.000395696
0 2.24 0 0.000395696
0.33 0.33 0 0.000395696
0.33 0.56 0 0.000395696
0.33 0.775 0 0.000395696
0.33 0.89 0 0.000395696
0.33 1.12 0 0.000395696
0.33 1.335 0 0.000395696
0.33 1.45 0 0.000395696
0.33 1.68 0 0.000395696
0.33 2.24 0 0.000395696
0.56 0.56 0 0.000395696
0.56 0.775 0 0.000395696
0.56 0.89 0 0.000395696
0.56 1.12 0 0.000395696
0.56 1.335 0 0.000395696
0.56 1.45 0 0.000395696
0.56 1.68 0 0.000395696
0.56 2.24 0 0.000395696
0.775 0.775 0 0.000395696
0.775 0.89 0 0.000395696
0.775 1.12 0 0.000395696
0.775 1.335 0 0.000395696
0.775 1.45 0 0.000395696
0.775 1.68 0 0.000395696
0.775 2.24 0 0.000395696
0.89 0.89 0 0.000395696
0.89 1.12 0 0.000395696
0.89 1.335 0 0.000395696
0.89 1.45 0 0.000395696
0.89 1.68 0 0.000395696
0.89 2.24 0 0.000395696
1.12 1.12 0 0.000395696
1.12 1.335 0 0.000395696
1.12 1.45 0 0.000395696
1.12 1.68 0 0.000395696
1.12 2.24 0 0.000395696
1.335 1.335 0 0.000395696
1.335 1.45 0 0.000395696
1.335 1.68 0 0.000395696
1.335 2.24 0 0.000395696
1.45 1.45 0 0.000395696
1.45 1.68 0 0.000395696
1.45 2.24 0 0.000395696
1.68 1.68 0 0.000395696
1.68 2.24 0 0.000395696
2.24 0 2.24 0.000395696
END DIST

Metal 1 OVER
WIDTH Table 1 entries:  0.23

Metal 1 OVER 0
DIST count 12 width 0.23
0.23 0.000137993 9.12719e-07 0.000197848
0.46 8.04515e-05 6.96411e-06 0.000197848
0.575 6.66266e-05 9.7544e-06 0.000197848
0.69 5.80543e-05 1.17061e-05 0.000197848
0.805 5.03182e-05 1.40844e-05 0.000197848
0.92 4.54551e-05 1.5733e-05 0.000197848
1.035 4.04924e-05 1.78721e-05 0.000197848
1.15 3.66212e-05 1.96258e-05 0.000197848
1.38 2.86672e-05 2.46148e-05 0.000197848
1.84 2.18516e-05 2.89718e-05 0.000197848
2.3 1.68771e-05 3.21663e-05 0.000197848
2.76 0 4.76946e-05 0.000197848
END DIST

Metal 1 UNDER
WIDTH Table 1 entries:  0.23

Metal 1 UNDER 2
DIST count 12 width 0.23
0.23 0.000122147 1.65296e-05 0.000197848
0.46 6.36676e-05 2.90045e-05 0.000197848
0.575 4.82951e-05 3.50771e-05 0.000197848
0.69 3.97732e-05 3.85415e-05 0.000197848
0.805 3.1986e-05 4.31664e-05 0.000197848
0.92 2.72516e-05 4.64861e-05 0.000197848
1.035 2.25084e-05 5.02287e-05 0.000197848
1.15 1.89153e-05 5.30712e-05 0.000197848
1.38 1.38844e-05 5.70519e-05 0.000197848
1.84 8.98958e-06 6.20494e-05 0.000197848
2.3 5.45555e-06 6.56573e-05 0.000197848
2.76 0 7.11695e-05 0.000197848
END DIST

Metal 1 UNDER 3
DIST count 12 width 0.23
0.23 0.000132049 6.87151e-06 0.000197848
0.46 7.38661e-05 1.46127e-05 0.000197848
0.575 5.97106e-05 1.85655e-05 0.000197848
0.69 5.09362e-05 2.1151e-05 0.000197848
0.805 4.09856e-05 2.64032e-05 0.000197848
0.92 3.61643e-05 2.8406e-05 0.000197848
1.035 3.11204e-05 3.12827e-05 0.000197848
1.15 2.72702e-05 3.3508e-05 0.000197848
1.38 2.18675e-05 3.66357e-05 0.000197848
1.84 1.51404e-05 4.23201e-05 0.000197848
2.3 1.02677e-05 4.64351e-05 0.000197848
2.76 0 5.61299e-05 0.000197848
END DIST

Metal 1 UNDER 4
DIST count 12 width 0.23
0.23 0.00013471 4.36773e-06 0.000197848
0.46 7.67599e-05 1.13439e-05 0.000197848
0.575 6.27267e-05 1.48262e-05 0.000197848
0.69 5.43752e-05 1.80733e-05 0.000197848
0.805 4.65648e-05 2.05911e-05 0.000197848
0.92 4.13924e-05 2.3087e-05 0.000197848
1.035 3.42674e-05 2.70474e-05 0.000197848
1.15 3.04703e-05 2.92508e-05 0.000197848
1.38 2.4772e-05 3.21062e-05 0.000197848
1.84 1.77402e-05 3.6887e-05 0.000197848
2.3 1.26656e-05 4.07898e-05 0.000197848
2.76 0 5.25677e-05 0.000197848
END DIST

Metal 1 UNDER 5
DIST count 12 width 0.23
0.23 0.000135949 3.20915e-06 0.000197848
0.46 7.81364e-05 9.77973e-06 0.000197848
0.575 6.4178e-05 1.31156e-05 0.000197848
0.69 5.62238e-05 1.64222e-05 0.000197848
0.805 4.84813e-05 1.88259e-05 0.000197848
0.92 4.36249e-05 2.16066e-05 0.000197848
1.035 3.84223e-05 2.31555e-05 0.000197848
1.15 3.40781e-05 2.46209e-05 0.000197848
1.38 2.63099e-05 2.97155e-05 0.000197848
1.84 1.91938e-05 3.4218e-05 0.000197848
2.3 1.41051e-05 3.79175e-05 0.000197848
2.76 0 5.09678e-05 0.000197848
END DIST

Metal 1 DIAGUNDER
WIDTH Table 1 entries:  0.23

Metal 1 DIAGUNDER 2
DIST count 13 width 0.23
0 0 2.5509e-05 0.000197848
0.23 0 2.02827e-05 0.000197848
0.46 0 1.81608e-05 0.000197848
0.575 0 1.71755e-05 0.000197848
0.69 0 1.63397e-05 0.000197848
0.805 0 1.55304e-05 0.000197848
0.92 0 1.46478e-05 0.000197848
1.035 0 1.36987e-05 0.000197848
1.15 0 1.28542e-05 0.000197848
1.38 0 1.14666e-05 0.000197848
1.84 0 9.28674e-06 0.000197848
2.3 0 7.53087e-06 0.000197848
2.76 0 6.2823e-06 0.000197848
END DIST

Metal 1 DIAGUNDER 3
DIST count 13 width 0.23
0 0 1.2098e-05 0.000197848
0.23 0 9.63285e-06 0.000197848
0.46 0 9.52071e-06 0.000197848
0.575 0 9.39965e-06 0.000197848
0.69 0 9.28834e-06 0.000197848
0.805 0 9.14925e-06 0.000197848
0.92 0 8.94805e-06 0.000197848
1.035 0 8.66252e-06 0.000197848
1.15 0 8.40154e-06 0.000197848
1.38 0 7.9724e-06 0.000197848
1.84 0 7.16686e-06 0.000197848
2.3 0 6.26693e-06 0.000197848
2.76 0 5.58751e-06 0.000197848
END DIST

Metal 1 DIAGUNDER 4
DIST count 13 width 0.23
0 0 8.11691e-06 0.000197848
0.23 0 6.21315e-06 0.000197848
0.46 0 6.29012e-06 0.000197848
0.575 0 6.27207e-06 0.000197848
0.69 0 6.24987e-06 0.000197848
0.805 0 6.21537e-06 0.000197848
0.92 0 6.15725e-06 0.000197848
1.035 0 6.05874e-06 0.000197848
1.15 0 5.96746e-06 0.000197848
1.38 0 5.81726e-06 0.000197848
1.84 0 5.49532e-06 0.000197848
2.3 0 5.0518e-06 0.000197848
2.76 0 4.7052e-06 0.000197848
END DIST

Metal 1 DIAGUNDER 5
DIST count 13 width 0.23
0 0 6.372e-06 0.000197848
0.23 0 4.93274e-06 0.000197848
0.46 0 4.99697e-06 0.000197848
0.575 0 4.9964e-06 0.000197848
0.69 0 4.99816e-06 0.000197848
0.805 0 4.99596e-06 0.000197848
0.92 0 4.96651e-06 0.000197848
1.035 0 4.94082e-06 0.000197848
1.15 0 4.91818e-06 0.000197848
1.38 0 4.88008e-06 0.000197848
1.84 0 4.68412e-06 0.000197848
2.3 0 4.46917e-06 0.000197848
2.76 0 4.31408e-06 0.000197848
END DIST

Metal 2 RESOVER
WIDTH Table 1 entries:  0.28

Metal 2 RESOVER 0
DIST count 55 width 0.28
0 0 0 0.000325036
0 0.28 0 0.000325036
0 0.56 0 0.000325036
0 0.7 0 0.000325036
0 0.84 0 0.000325036
0 1.12 0 0.000325036
0 1.26 0 0.000325036
0 1.4 0 0.000325036
0 1.68 0 0.000325036
0 2.24 0 0.000325036
0.28 0.28 0 0.000325036
0.28 0.56 0 0.000325036
0.28 0.7 0 0.000325036
0.28 0.84 0 0.000325036
0.28 1.12 0 0.000325036
0.28 1.26 0 0.000325036
0.28 1.4 0 0.000325036
0.28 1.68 0 0.000325036
0.28 2.24 0 0.000325036
0.56 0.56 0 0.000325036
0.56 0.7 0 0.000325036
0.56 0.84 0 0.000325036
0.56 1.12 0 0.000325036
0.56 1.26 0 0.000325036
0.56 1.4 0 0.000325036
0.56 1.68 0 0.000325036
0.56 2.24 0 0.000325036
0.7 0.7 0 0.000325036
0.7 0.84 0 0.000325036
0.7 1.12 0 0.000325036
0.7 1.26 0 0.000325036
0.7 1.4 0 0.000325036
0.7 1.68 0 0.000325036
0.7 2.24 0 0.000325036
0.84 0.84 0 0.000325036
0.84 1.12 0 0.000325036
0.84 1.26 0 0.000325036
0.84 1.4 0 0.000325036
0.84 1.68 0 0.000325036
0.84 2.24 0 0.000325036
1.12 1.12 0 0.000325036
1.12 1.26 0 0.000325036
1.12 1.4 0 0.000325036
1.12 1.68 0 0.000325036
1.12 2.24 0 0.000325036
1.26 1.26 0 0.000325036
1.26 1.4 0 0.000325036
1.26 1.68 0 0.000325036
1.26 2.24 0 0.000325036
1.4 1.4 0 0.000325036
1.4 1.68 0 0.000325036
1.4 2.24 0 0.000325036
1.68 1.68 0 0.000325036
1.68 2.24 0 0.000325036
2.24 0 2.24 0.000325036
END DIST

Metal 2 RESOVER 1
DIST count 0 width 0.28
END DIST

Metal 2 OVER
WIDTH Table 1 entries:  0.28

Metal 2 OVER 0
DIST count 12 width 0.28
0.28 0.000126843 3.6075e-08 0.000162518
0.56 7.72184e-05 1.28271e-06 0.000162518
0.7 6.49442e-05 3.79969e-06 0.000162518
0.84 5.75795e-05 5.30991e-06 0.000162518
0.98 5.05697e-05 7.40919e-06 0.000162518
1.12 4.63636e-05 8.66876e-06 0.000162518
1.26 4.17535e-05 1.05475e-05 0.000162518
1.4 3.83677e-05 1.18847e-05 0.000162518
1.68 3.02855e-05 1.7099e-05 0.000162518
2.24 2.37319e-05 2.08604e-05 0.000162518
2.8 1.89759e-05 2.35944e-05 0.000162518
3.36 0 4.10384e-05 0.000162518
END DIST

Metal 2 OVER 1
DIST count 12 width 0.28
0.28 0.00011153 1.26015e-05 0.000162518
0.56 6.16177e-05 2.38883e-05 0.000162518
0.7 4.94236e-05 2.93241e-05 0.000162518
0.84 4.2107e-05 3.33161e-05 0.000162518
0.98 3.30551e-05 3.99429e-05 0.000162518
1.12 2.90931e-05 4.20716e-05 0.000162518
1.26 2.50728e-05 4.62213e-05 0.000162518
1.4 2.20801e-05 4.87383e-05 0.000162518
1.68 1.78068e-05 5.02521e-05 0.000162518
2.24 1.30391e-05 5.6097e-05 0.000162518
2.8 9.58717e-06 5.96683e-05 0.000162518
3.36 0 6.93442e-05 0.000162518
END DIST

Metal 2 UNDER
WIDTH Table 1 entries:  0.28

Metal 2 UNDER 3
DIST count 12 width 0.28
0.28 0.000107674 1.59068e-05 0.000162518
0.56 5.71859e-05 2.78276e-05 0.000162518
0.7 4.46927e-05 3.36296e-05 0.000162518
0.84 3.71966e-05 3.78412e-05 0.000162518
0.98 2.89055e-05 4.37897e-05 0.000162518
1.12 2.48298e-05 4.62122e-05 0.000162518
1.26 2.0694e-05 5.05767e-05 0.000162518
1.4 1.76144e-05 5.32565e-05 0.000162518
1.68 1.3232e-05 5.47338e-05 0.000162518
2.24 8.75403e-06 6.05745e-05 0.000162518
2.8 5.5535e-06 6.39114e-05 0.000162518
3.36 0 6.95684e-05 0.000162518
END DIST

Metal 2 UNDER 4
DIST count 12 width 0.28
0.28 0.000118876 4.23369e-06 0.000162518
0.56 6.84596e-05 1.17827e-05 0.000162518
0.7 5.57914e-05 1.5599e-05 0.000162518
0.84 4.81905e-05 1.77795e-05 0.000162518
0.98 4.0863e-05 2.10392e-05 0.000162518
1.12 3.64665e-05 2.31188e-05 0.000162518
1.26 2.9751e-05 2.77852e-05 0.000162518
1.4 2.63284e-05 2.97658e-05 0.000162518
1.68 2.14322e-05 3.28267e-05 0.000162518
2.24 1.50253e-05 3.83223e-05 0.000162518
2.8 1.04322e-05 4.22644e-05 0.000162518
3.36 0 5.21968e-05 0.000162518
END DIST

Metal 2 UNDER 5
DIST count 12 width 0.28
0.28 0.000122654 6.28516e-07 0.000162518
0.56 7.25402e-05 7.05302e-06 0.000162518
0.7 6.00133e-05 1.02753e-05 0.000162518
0.84 5.27828e-05 1.29241e-05 0.000162518
0.98 4.60325e-05 1.58423e-05 0.000162518
1.12 4.1182e-05 1.748e-05 0.000162518
1.26 3.64755e-05 1.92131e-05 0.000162518
1.4 3.27521e-05 2.09529e-05 0.000162518
1.68 2.53081e-05 2.56829e-05 0.000162518
2.24 1.85172e-05 3.0776e-05 0.000162518
2.8 1.36223e-05 3.44321e-05 0.000162518
3.36 0 4.71032e-05 0.000162518
END DIST

Metal 2 DIAGUNDER
WIDTH Table 1 entries:  0.28

Metal 2 DIAGUNDER 3
DIST count 13 width 0.28
0 0 2.82459e-05 0.000162518
0.28 0 2.17451e-05 0.000162518
0.56 0 1.89224e-05 0.000162518
0.7 0 1.78243e-05 0.000162518
0.84 0 1.69257e-05 0.000162518
0.98 0 1.5994e-05 0.000162518
1.12 0 1.48746e-05 0.000162518
1.26 0 1.39231e-05 0.000162518
1.4 0 1.31044e-05 0.000162518
1.68 0 1.17678e-05 0.000162518
2.24 0 9.54625e-06 0.000162518
2.8 0 7.86553e-06 0.000162518
3.36 0 6.72266e-06 0.000162518
END DIST

Metal 2 DIAGUNDER 4
DIST count 13 width 0.28
0 0 1.42403e-05 0.000162518
0.28 0 1.11077e-05 0.000162518
0.56 0 1.08171e-05 0.000162518
0.7 0 1.06591e-05 0.000162518
0.84 0 1.05298e-05 0.000162518
0.98 0 1.03135e-05 0.000162518
1.12 0 9.93241e-06 0.000162518
1.26 0 9.60851e-06 0.000162518
1.4 0 9.32982e-06 0.000162518
1.68 0 8.8748e-06 0.000162518
2.24 0 7.82937e-06 0.000162518
2.8 0 6.84412e-06 0.000162518
3.36 0 6.17415e-06 0.000162518
END DIST

Metal 2 DIAGUNDER 5
DIST count 13 width 0.28
0 0 1.04579e-05 0.000162518
0.28 0 7.89452e-06 0.000162518
0.56 0 7.95337e-06 0.000162518
0.7 0 7.91537e-06 0.000162518
0.84 0 7.88056e-06 0.000162518
0.98 0 7.81506e-06 0.000162518
1.12 0 7.7208e-06 0.000162518
1.26 0 7.63959e-06 0.000162518
1.4 0 7.56885e-06 0.000162518
1.68 0 7.37435e-06 0.000162518
2.24 0 6.84071e-06 0.000162518
2.8 0 6.37419e-06 0.000162518
3.36 0 5.98826e-06 0.000162518
END DIST

Metal 2 OVERUNDER
WIDTH Table 1 entries:  0.28

Metal 2 OVER 1 UNDER 3
DIST count 12 width 0.28
0.28 9.46309e-05 2.87794e-05 0.000162518
0.56 4.43557e-05 4.56637e-05 0.000162518
0.7 3.21817e-05 5.37102e-05 0.000162518
0.84 2.48773e-05 5.9999e-05 0.000162518
0.98 1.84943e-05 6.59313e-05 0.000162518
1.12 1.46644e-05 6.88383e-05 0.000162518
1.26 1.13168e-05 7.43228e-05 0.000162518
1.4 8.80617e-06 7.7295e-05 0.000162518
1.68 5.2912e-06 7.70128e-05 0.000162518
2.24 3.23563e-06 8.15679e-05 0.000162518
2.8 1.74713e-06 8.33884e-05 0.000162518
3.36 0 8.53877e-05 0.000162518
END DIST

Metal 2 OVER 1 UNDER 4
DIST count 12 width 0.28
0.28 0.000105877 1.70528e-05 0.000162518
0.56 5.36991e-05 3.1754e-05 0.000162518
0.7 4.13719e-05 3.80364e-05 0.000162518
0.84 3.39754e-05 4.24105e-05 0.000162518
0.98 2.71414e-05 4.73807e-05 0.000162518
1.12 2.3041e-05 5.01262e-05 0.000162518
1.26 1.89339e-05 5.47105e-05 0.000162518
1.4 1.58731e-05 5.76147e-05 0.000162518
1.68 1.15315e-05 5.98495e-05 0.000162518
2.24 7.44023e-06 6.54757e-05 0.000162518
2.8 4.523e-06 6.88298e-05 0.000162518
3.36 0 7.36839e-05 0.000162518
END DIST

Metal 2 OVER 1 UNDER 5
DIST count 12 width 0.28
0.28 0.000108922 1.43752e-05 0.000162518
0.56 5.85923e-05 2.65129e-05 0.000162518
0.7 4.6183e-05 3.24649e-05 0.000162518
0.84 3.9559e-05 3.76868e-05 0.000162518
0.98 3.19118e-05 4.41163e-05 0.000162518
1.12 2.72234e-05 4.67012e-05 0.000162518
1.26 2.30279e-05 5.02352e-05 0.000162518
1.4 1.94637e-05 5.28448e-05 0.000162518
1.68 1.45637e-05 5.45515e-05 0.000162518
2.24 9.88054e-06 6.05971e-05 0.000162518
2.8 6.52245e-06 6.42976e-05 0.000162518
3.36 0 7.10502e-05 0.000162518
END DIST

Metal 3 RESOVER
WIDTH Table 1 entries:  0.28

Metal 3 RESOVER 0
DIST count 55 width 0.28
0 0 0 0.000325036
0 0.28 0 0.000325036
0 0.56 0 0.000325036
0 0.7 0 0.000325036
0 0.84 0 0.000325036
0 1.12 0 0.000325036
0 1.26 0 0.000325036
0 1.4 0 0.000325036
0 1.68 0 0.000325036
0 2.24 0 0.000325036
0.28 0.28 0 0.000325036
0.28 0.56 0 0.000325036
0.28 0.7 0 0.000325036
0.28 0.84 0 0.000325036
0.28 1.12 0 0.000325036
0.28 1.26 0 0.000325036
0.28 1.4 0 0.000325036
0.28 1.68 0 0.000325036
0.28 2.24 0 0.000325036
0.56 0.56 0 0.000325036
0.56 0.7 0 0.000325036
0.56 0.84 0 0.000325036
0.56 1.12 0 0.000325036
0.56 1.26 0 0.000325036
0.56 1.4 0 0.000325036
0.56 1.68 0 0.000325036
0.56 2.24 0 0.000325036
0.7 0.7 0 0.000325036
0.7 0.84 0 0.000325036
0.7 1.12 0 0.000325036
0.7 1.26 0 0.000325036
0.7 1.4 0 0.000325036
0.7 1.68 0 0.000325036
0.7 2.24 0 0.000325036
0.84 0.84 0 0.000325036
0.84 1.12 0 0.000325036
0.84 1.26 0 0.000325036
0.84 1.4 0 0.000325036
0.84 1.68 0 0.000325036
0.84 2.24 0 0.000325036
1.12 1.12 0 0.000325036
1.12 1.26 0 0.000325036
1.12 1.4 0 0.000325036
1.12 1.68 0 0.000325036
1.12 2.24 0 0.000325036
1.26 1.26 0 0.000325036
1.26 1.4 0 0.000325036
1.26 1.68 0 0.000325036
1.26 2.24 0 0.000325036
1.4 1.4 0 0.000325036
1.4 1.68 0 0.000325036
1.4 2.24 0 0.000325036
1.68 1.68 0 0.000325036
1.68 2.24 0 0.000325036
2.24 0 2.24 0.000325036
END DIST

Metal 3 RESOVER 1
DIST count 0 width 0.28
END DIST

Metal 3 RESOVER 2
DIST count 0 width 0.28
END DIST

Metal 3 OVER
WIDTH Table 1 entries:  0.28

Metal 3 OVER 0
DIST count 12 width 0.28
0.28 0.000130176 3.6075e-08 0.000162518
0.56 8.07083e-05 3.6075e-08 0.000162518
0.7 6.85117e-05 3.6075e-08 0.000162518
0.84 6.1194e-05 9.43267e-07 0.000162518
0.98 5.42439e-05 2.82663e-06 0.000162518
1.12 5.00741e-05 3.95666e-06 0.000162518
1.26 4.55044e-05 5.62839e-06 0.000162518
1.4 4.21542e-05 6.80508e-06 0.000162518
1.68 3.34176e-05 1.24988e-05 0.000162518
2.24 2.68635e-05 1.57878e-05 0.000162518
2.8 2.20918e-05 1.81952e-05 0.000162518
3.36 0 3.84959e-05 0.000162518
END DIST

Metal 3 OVER 1
DIST count 12 width 0.28
0.28 0.000124503 3.6075e-08 0.000162518
0.56 7.46471e-05 5.54879e-06 0.000162518
0.7 6.2271e-05 8.98458e-06 0.000162518
0.84 5.48454e-05 1.10188e-05 0.000162518
0.98 4.77714e-05 1.3888e-05 0.000162518
1.12 4.35272e-05 1.564e-05 0.000162518
1.26 3.56509e-05 2.14122e-05 0.000162518
1.4 3.23792e-05 2.31266e-05 0.000162518
1.68 2.7681e-05 2.56891e-05 0.000162518
2.24 2.13084e-05 3.0737e-05 0.000162518
2.8 1.66886e-05 3.43982e-05 0.000162518
3.36 0 5.03605e-05 0.000162518
END DIST

Metal 3 OVER 2
DIST count 12 width 0.28
0.28 0.00011182 1.22448e-05 0.000162518
0.56 6.18791e-05 2.35217e-05 0.000162518
0.7 4.96722e-05 2.89602e-05 0.000162518
0.84 4.23483e-05 3.30075e-05 0.000162518
0.98 3.31855e-05 3.97398e-05 0.000162518
1.12 2.92215e-05 4.18316e-05 0.000162518
1.26 2.51987e-05 4.60394e-05 0.000162518
1.4 2.2205e-05 4.85596e-05 0.000162518
1.68 1.79266e-05 4.99348e-05 0.000162518
2.24 1.31519e-05 5.582e-05 0.000162518
2.8 9.69315e-06 5.93865e-05 0.000162518
3.36 0 6.91599e-05 0.000162518
END DIST

Metal 3 UNDER
WIDTH Table 1 entries:  0.28

Metal 3 UNDER 4
DIST count 12 width 0.28
0.28 0.000109488 1.42705e-05 0.000162518
0.56 5.91534e-05 2.58069e-05 0.000162518
0.7 4.6732e-05 3.14102e-05 0.000162518
0.84 3.92793e-05 3.55347e-05 0.000162518
0.98 3.06125e-05 4.17709e-05 0.000162518
1.12 2.65676e-05 4.40579e-05 0.000162518
1.26 2.24393e-05 4.8366e-05 0.000162518
1.4 1.93676e-05 5.0976e-05 0.000162518
1.68 1.49818e-05 5.23264e-05 0.000162518
2.24 1.02405e-05 5.83495e-05 0.000162518
2.8 6.83831e-06 6.18485e-05 0.000162518
3.36 0 6.87601e-05 0.000162518
END DIST

Metal 3 UNDER 5
DIST count 12 width 0.28
0.28 0.000122451 8.09851e-07 0.000162518
0.56 7.22444e-05 7.61637e-06 0.000162518
0.7 5.96769e-05 1.10376e-05 0.000162518
0.84 5.27431e-05 1.40417e-05 0.000162518
0.98 4.62712e-05 1.75283e-05 0.000162518
1.12 4.12942e-05 1.94594e-05 0.000162518
1.26 3.6393e-05 2.10749e-05 0.000162518
1.4 3.23415e-05 2.22931e-05 0.000162518
1.68 2.48446e-05 2.73429e-05 0.000162518
2.24 1.81216e-05 3.26744e-05 0.000162518
2.8 1.32773e-05 3.65126e-05 0.000162518
3.36 0 4.90271e-05 0.000162518
END DIST

Metal 3 DIAGUNDER
WIDTH Table 1 entries:  0.28

Metal 3 DIAGUNDER 4
DIST count 13 width 0.28
0 0 2.98835e-05 0.000162518
0.28 0 2.28155e-05 0.000162518
0.56 0 2.01203e-05 0.000162518
0.7 0 1.90215e-05 0.000162518
0.84 0 1.81223e-05 0.000162518
0.98 0 1.71917e-05 0.000162518
1.12 0 1.60762e-05 0.000162518
1.26 0 1.5128e-05 0.000162518
1.4 0 1.43121e-05 0.000162518
1.68 0 1.29801e-05 0.000162518
2.24 0 1.07448e-05 0.000162518
2.8 0 9.0393e-06 0.000162518
3.36 0 7.87956e-06 0.000162518
END DIST

Metal 3 DIAGUNDER 5
DIST count 13 width 0.28
0 0 1.58572e-05 0.000162518
0.28 0 1.23634e-05 0.000162518
0.56 0 1.22025e-05 0.000162518
0.7 0 1.20647e-05 0.000162518
0.84 0 1.1942e-05 0.000162518
0.98 0 1.17522e-05 0.000162518
1.12 0 1.14995e-05 0.000162518
1.26 0 1.12818e-05 0.000162518
1.4 0 1.10921e-05 0.000162518
1.68 0 1.06485e-05 0.000162518
2.24 0 9.58938e-06 0.000162518
2.8 0 8.70171e-06 0.000162518
3.36 0 8.00709e-06 0.000162518
END DIST

Metal 3 OVERUNDER
WIDTH Table 1 entries:  0.28

Metal 3 OVER 1 UNDER 4
DIST count 12 width 0.28
0.28 0.000106063 1.67842e-05 0.000162518
0.56 5.37718e-05 3.15906e-05 0.000162518
0.7 4.14256e-05 3.78529e-05 0.000162518
0.84 3.40177e-05 4.23455e-05 0.000162518
0.98 2.71846e-05 4.73409e-05 0.000162518
1.12 2.30847e-05 5.00695e-05 0.000162518
1.26 1.89692e-05 5.47897e-05 0.000162518
1.4 1.59033e-05 5.77335e-05 0.000162518
1.68 1.15573e-05 5.95633e-05 0.000162518
2.24 7.45202e-06 6.53791e-05 0.000162518
2.8 4.52572e-06 6.87125e-05 0.000162518
3.36 0 7.35466e-05 0.000162518
END DIST

Metal 3 OVER 1 UNDER 5
DIST count 12 width 0.28
0.28 0.000118256 4.26579e-06 0.000162518
0.56 6.77002e-05 1.29115e-05 0.000162518
0.7 5.61538e-05 1.81227e-05 0.000162518
0.84 4.91712e-05 2.23837e-05 0.000162518
0.98 3.96988e-05 2.79003e-05 0.000162518
1.12 3.47811e-05 3.00919e-05 0.000162518
1.26 3.01591e-05 3.21652e-05 0.000162518
1.4 2.60523e-05 3.39762e-05 0.000162518
1.68 2.05249e-05 3.67664e-05 0.000162518
2.24 1.42287e-05 4.28986e-05 0.000162518
2.8 9.72311e-06 4.72858e-05 0.000162518
3.36 0 5.69189e-05 0.000162518
END DIST

Metal 3 OVER 2 UNDER 4
DIST count 12 width 0.28
0.28 9.4653e-05 2.86713e-05 0.000162518
0.56 4.43658e-05 4.55783e-05 0.000162518
0.7 3.21899e-05 5.36236e-05 0.000162518
0.84 2.48845e-05 5.99986e-05 0.000162518
0.98 1.84996e-05 6.59107e-05 0.000162518
1.12 1.46688e-05 6.87446e-05 0.000162518
1.26 1.13202e-05 7.43371e-05 0.000162518
1.4 8.80873e-06 7.73224e-05 0.000162518
1.68 5.29271e-06 7.68743e-05 0.000162518
2.24 3.23657e-06 8.14978e-05 0.000162518
2.8 1.74763e-06 8.33161e-05 0.000162518
3.36 0 8.53132e-05 0.000162518
END DIST

Metal 3 OVER 2 UNDER 5
DIST count 12 width 0.28
0.28 0.000107064 1.5917e-05 0.000162518
0.56 5.64553e-05 2.87911e-05 0.000162518
0.7 4.24152e-05 3.66792e-05 0.000162518
0.84 3.5755e-05 4.20021e-05 0.000162518
0.98 2.97023e-05 4.67878e-05 0.000162518
1.12 2.4944e-05 4.95869e-05 0.000162518
1.26 2.07426e-05 5.33091e-05 0.000162518
1.4 1.72886e-05 5.6127e-05 0.000162518
1.68 1.24791e-05 5.80196e-05 0.000162518
2.24 8.1588e-06 6.38771e-05 0.000162518
2.8 5.07756e-06 6.73731e-05 0.000162518
3.36 0 7.2765e-05 0.000162518
END DIST

Metal 4 RESOVER
WIDTH Table 1 entries:  0.28

Metal 4 RESOVER 0
DIST count 55 width 0.28
0 0 0 0.000325036
0 0.28 0 0.000325036
0 0.56 0 0.000325036
0 0.7 0 0.000325036
0 0.84 0 0.000325036
0 1.12 0 0.000325036
0 1.26 0 0.000325036
0 1.4 0 0.000325036
0 1.68 0 0.000325036
0 2.24 0 0.000325036
0.28 0.28 0 0.000325036
0.28 0.56 0 0.000325036
0.28 0.7 0 0.000325036
0.28 0.84 0 0.000325036
0.28 1.12 0 0.000325036
0.28 1.26 0 0.000325036
0.28 1.4 0 0.000325036
0.28 1.68 0 0.000325036
0.28 2.24 0 0.000325036
0.56 0.56 0 0.000325036
0.56 0.7 0 0.000325036
0.56 0.84 0 0.000325036
0.56 1.12 0 0.000325036
0.56 1.26 0 0.000325036
0.56 1.4 0 0.000325036
0.56 1.68 0 0.000325036
0.56 2.24 0 0.000325036
0.7 0.7 0 0.000325036
0.7 0.84 0 0.000325036
0.7 1.12 0 0.000325036
0.7 1.26 0 0.000325036
0.7 1.4 0 0.000325036
0.7 1.68 0 0.000325036
0.7 2.24 0 0.000325036
0.84 0.84 0 0.000325036
0.84 1.12 0 0.000325036
0.84 1.26 0 0.000325036
0.84 1.4 0 0.000325036
0.84 1.68 0 0.000325036
0.84 2.24 0 0.000325036
1.12 1.12 0 0.000325036
1.12 1.26 0 0.000325036
1.12 1.4 0 0.000325036
1.12 1.68 0 0.000325036
1.12 2.24 0 0.000325036
1.26 1.26 0 0.000325036
1.26 1.4 0 0.000325036
1.26 1.68 0 0.000325036
1.26 2.24 0 0.000325036
1.4 1.4 0 0.000325036
1.4 1.68 0 0.000325036
1.4 2.24 0 0.000325036
1.68 1.68 0 0.000325036
1.68 2.24 0 0.000325036
2.24 0 2.24 0.000325036
END DIST

Metal 4 RESOVER 1
DIST count 0 width 0.28
END DIST

Metal 4 RESOVER 2
DIST count 0 width 0.28
END DIST

Metal 4 RESOVER 3
DIST count 0 width 0.28
END DIST

Metal 4 OVER
WIDTH Table 1 entries:  0.28

Metal 4 OVER 0
DIST count 12 width 0.28
0.28 0.000131385 3.6075e-08 0.000162518
0.56 8.21e-05 3.6075e-08 0.000162518
0.7 7.00014e-05 3.6075e-08 0.000162518
0.84 6.2742e-05 3.6075e-08 0.000162518
0.98 5.58744e-05 6.95592e-07 0.000162518
1.12 5.17539e-05 1.7306e-06 0.000162518
1.26 4.72594e-05 3.24211e-06 0.000162518
1.4 4.3963e-05 4.30082e-06 0.000162518
1.68 3.5114e-05 1.00176e-05 0.000162518
2.24 2.85862e-05 1.30165e-05 0.000162518
2.8 2.38253e-05 1.52224e-05 0.000162518
3.36 0 3.71125e-05 0.000162518
END DIST

Metal 4 OVER 1
DIST count 12 width 0.28
0.28 0.000128433 3.6075e-08 0.000162518
0.56 7.89277e-05 3.12982e-07 0.000162518
0.7 6.72477e-05 3.83664e-06 0.000162518
0.84 6.01323e-05 5.98573e-06 0.000162518
0.98 5.33477e-05 7.45838e-06 0.000162518
1.12 4.86799e-05 8.57886e-06 0.000162518
1.26 4.42e-05 9.83452e-06 0.000162518
1.4 4.05784e-05 1.16674e-05 0.000162518
1.68 3.19674e-05 1.79485e-05 0.000162518
2.24 2.53569e-05 2.23396e-05 0.000162518
2.8 2.0549e-05 2.55405e-05 0.000162518
3.36 0 4.4872e-05 0.000162518
END DIST

Metal 4 OVER 2
DIST count 12 width 0.28
0.28 0.000124223 3.6075e-08 0.000162518
0.56 7.44354e-05 5.64086e-06 0.000162518
0.7 6.20933e-05 9.02345e-06 0.000162518
0.84 5.46882e-05 1.10542e-05 0.000162518
0.98 4.76408e-05 1.38781e-05 0.000162518
1.12 4.34127e-05 1.55705e-05 0.000162518
1.26 3.56681e-05 2.12235e-05 0.000162518
1.4 3.24071e-05 2.29143e-05 0.000162518
1.68 2.77263e-05 2.53955e-05 0.000162518
2.24 2.13107e-05 3.04522e-05 0.000162518
2.8 1.66565e-05 3.41224e-05 0.000162518
3.36 0 5.00337e-05 0.000162518
END DIST

Metal 4 OVER 3
DIST count 12 width 0.28
0.28 0.000111698 1.22829e-05 0.000162518
0.56 6.18088e-05 2.34543e-05 0.000162518
0.7 4.96276e-05 2.88446e-05 0.000162518
0.84 4.23185e-05 3.2878e-05 0.000162518
0.98 3.32436e-05 3.95027e-05 0.000162518
1.12 2.92895e-05 4.15996e-05 0.000162518
1.26 2.5276e-05 4.57947e-05 0.000162518
1.4 2.22883e-05 4.83013e-05 0.000162518
1.68 1.80196e-05 4.95561e-05 0.000162518
2.24 1.31998e-05 5.55474e-05 0.000162518
2.8 9.70541e-06 5.91378e-05 0.000162518
3.36 0 6.89161e-05 0.000162518
END DIST

Metal 4 UNDER
WIDTH Table 1 entries:  0.28

Metal 4 UNDER 5
DIST count 12 width 0.28
0.28 0.000114836 8.53332e-06 0.000162518
0.56 6.45314e-05 1.77882e-05 0.000162518
0.7 5.20364e-05 2.24238e-05 0.000162518
0.84 4.45391e-05 2.49927e-05 0.000162518
0.98 3.74312e-05 2.87799e-05 0.000162518
1.12 3.31665e-05 3.13285e-05 0.000162518
1.26 2.68168e-05 3.6126e-05 0.000162518
1.4 2.3572e-05 3.83708e-05 0.000162518
1.68 1.89415e-05 4.19427e-05 0.000162518
2.24 1.33886e-05 4.72758e-05 0.000162518
2.8 9.38508e-06 5.11201e-05 0.000162518
3.36 0 6.03849e-05 0.000162518
END DIST

Metal 4 DIAGUNDER
WIDTH Table 1 entries:  0.28

Metal 4 DIAGUNDER 5
DIST count 13 width 0.28
0 0 2.69259e-05 0.000162518
0.28 0 2.08703e-05 0.000162518
0.56 0 1.95909e-05 0.000162518
0.7 0 1.88319e-05 0.000162518
0.84 0 1.81849e-05 0.000162518
0.98 0 1.74993e-05 0.000162518
1.12 0 1.67312e-05 0.000162518
1.26 0 1.60679e-05 0.000162518
1.4 0 1.54889e-05 0.000162518
1.68 0 1.43809e-05 0.000162518
2.24 0 1.23073e-05 0.000162518
2.8 0 1.07169e-05 0.000162518
3.36 0 9.53616e-06 0.000162518
END DIST

Metal 4 OVERUNDER
WIDTH Table 1 entries:  0.28

Metal 4 OVER 1 UNDER 5
DIST count 12 width 0.28
0.28 0.000113312 9.33551e-06 0.000162518
0.56 6.28159e-05 1.95344e-05 0.000162518
0.7 5.12634e-05 2.54175e-05 0.000162518
0.84 4.42918e-05 2.99451e-05 0.000162518
0.98 3.54374e-05 3.53991e-05 0.000162518
1.12 3.06244e-05 3.81678e-05 0.000162518
1.26 2.62006e-05 4.03997e-05 0.000162518
1.4 2.23797e-05 4.2467e-05 0.000162518
1.68 1.71645e-05 4.58799e-05 0.000162518
2.24 1.17388e-05 5.15593e-05 0.000162518
2.8 7.84694e-06 5.56351e-05 0.000162518
3.36 0 6.3609e-05 0.000162518
END DIST

Metal 4 OVER 2 UNDER 5
DIST count 12 width 0.28
0.28 0.000110456 1.18846e-05 0.000162518
0.56 5.96964e-05 2.30297e-05 0.000162518
0.7 4.53714e-05 3.03184e-05 0.000162518
0.84 3.7898e-05 3.33351e-05 0.000162518
0.98 3.08619e-05 3.77664e-05 0.000162518
1.12 2.66402e-05 4.06643e-05 0.000162518
1.26 2.22355e-05 4.41006e-05 0.000162518
1.4 1.89556e-05 4.6832e-05 0.000162518
1.68 1.43019e-05 5.10232e-05 0.000162518
2.24 9.37963e-06 5.64431e-05 0.000162518
2.8 5.86472e-06 6.03332e-05 0.000162518
3.36 0 6.64567e-05 0.000162518
END DIST

Metal 4 OVER 3 UNDER 5
DIST count 12 width 0.28
0.28 0.000100156 2.26585e-05 0.000162518
0.56 4.85555e-05 3.88331e-05 0.000162518
0.7 3.61766e-05 4.61761e-05 0.000162518
0.84 2.87492e-05 5.11685e-05 0.000162518
0.98 2.20327e-05 5.67922e-05 0.000162518
1.12 1.80029e-05 5.99898e-05 0.000162518
1.26 1.42264e-05 6.46161e-05 0.000162518
1.4 1.14035e-05 6.76406e-05 0.000162518
1.68 7.43752e-06 6.98618e-05 0.000162518
2.24 4.60147e-06 7.43124e-05 0.000162518
2.8 2.56934e-06 7.67789e-05 0.000162518
3.36 0 7.9701e-05 0.000162518
END DIST

Metal 5 RESOVER
WIDTH Table 1 entries:  0.44

Metal 5 RESOVER 0
DIST count 55 width 0.44
0 0 0 9.32048e-05
0 0.46 0 9.32048e-05
0 0.9 0 9.32048e-05
0 1.14 0 9.32048e-05
0 1.36 0 9.32048e-05
0 1.8 0 9.32048e-05
0 2.04 0 9.32048e-05
0 2.26 0 9.32048e-05
0 2.7 0 9.32048e-05
0 3.6 0 9.32048e-05
0.46 0.46 0 9.32048e-05
0.46 0.9 0 9.32048e-05
0.46 1.14 0 9.32048e-05
0.46 1.36 0 9.32048e-05
0.46 1.8 0 9.32048e-05
0.46 2.04 0 9.32048e-05
0.46 2.26 0 9.32048e-05
0.46 2.7 0 9.32048e-05
0.46 3.6 0 9.32048e-05
0.9 0.9 0 9.32048e-05
0.9 1.14 0 9.32048e-05
0.9 1.36 0 9.32048e-05
0.9 1.8 0 9.32048e-05
0.9 2.04 0 9.32048e-05
0.9 2.26 0 9.32048e-05
0.9 2.7 0 9.32048e-05
0.9 3.6 0 9.32048e-05
1.14 1.14 0 9.32048e-05
1.14 1.36 0 9.32048e-05
1.14 1.8 0 9.32048e-05
1.14 2.04 0 9.32048e-05
1.14 2.26 0 9.32048e-05
1.14 2.7 0 9.32048e-05
1.14 3.6 0 9.32048e-05
1.36 1.36 0 9.32048e-05
1.36 1.8 0 9.32048e-05
1.36 2.04 0 9.32048e-05
1.36 2.26 0 9.32048e-05
1.36 2.7 0 9.32048e-05
1.36 3.6 0 9.32048e-05
1.8 1.8 0 9.32048e-05
1.8 2.04 0 9.32048e-05
1.8 2.26 0 9.32048e-05
1.8 2.7 0 9.32048e-05
1.8 3.6 0 9.32048e-05
2.04 2.04 0 9.32048e-05
2.04 2.26 0 9.32048e-05
2.04 2.7 0 9.32048e-05
2.04 3.6 0 9.32048e-05
2.26 2.26 0 9.32048e-05
2.26 2.7 0 9.32048e-05
2.26 3.6 0 9.32048e-05
2.7 2.7 0 9.32048e-05
2.7 3.6 0 9.32048e-05
3.6 0 3.6 9.32048e-05
END DIST

Metal 5 RESOVER 1
DIST count 0 width 0.44
END DIST

Metal 5 RESOVER 2
DIST count 0 width 0.44
END DIST

Metal 5 RESOVER 3
DIST count 0 width 0.44
END DIST

Metal 5 RESOVER 4
DIST count 0 width 0.44
END DIST

Metal 5 OVER
WIDTH Table 1 entries:  0.44

Metal 5 OVER 0
DIST count 12 width 0.44
0.46 0.000139013 3.44353e-08 4.66024e-05
0.92 8.5355e-05 3.44353e-08 4.66024e-05
1.15 7.21168e-05 3.44353e-08 4.66024e-05
1.38 6.41739e-05 3.44353e-08 4.66024e-05
1.61 5.67174e-05 1.01704e-06 4.66024e-05
1.84 5.22433e-05 2.11751e-06 4.66024e-05
2.07 4.72546e-05 3.72805e-06 4.66024e-05
2.3 4.36038e-05 4.84523e-06 4.66024e-05
2.76 3.47768e-05 1.01249e-05 4.66024e-05
3.68 2.46499e-05 1.61992e-05 4.66024e-05
4.6 0 3.20245e-05 4.66024e-05
5.52 0 3.20244e-05 4.66024e-05
END DIST

Metal 5 OVER 1
DIST count 12 width 0.44
0.46 0.000136757 3.44353e-08 4.66024e-05
0.92 8.29496e-05 3.44353e-08 4.66024e-05
1.15 6.97154e-05 1.98902e-06 4.66024e-05
1.38 6.15829e-05 3.8244e-06 4.66024e-05
1.61 5.41072e-05 6.03866e-06 4.66024e-05
1.84 4.94741e-05 7.64388e-06 4.66024e-05
2.07 4.45893e-05 9.50117e-06 4.66024e-05
2.3 4.08751e-05 1.10416e-05 4.66024e-05
2.76 3.23959e-05 1.64772e-05 4.66024e-05
3.68 2.26646e-05 2.34449e-05 4.66024e-05
4.6 0 4.38194e-05 4.66024e-05
5.52 0 4.38196e-05 4.66024e-05
END DIST

Metal 5 OVER 2
DIST count 12 width 0.44
0.46 0.000134272 3.44353e-08 4.66024e-05
0.92 8.03166e-05 2.3607e-06 4.66024e-05
1.15 6.70091e-05 5.41531e-06 4.66024e-05
1.38 5.90245e-05 7.24737e-06 4.66024e-05
1.61 5.13795e-05 9.85806e-06 4.66024e-05
1.84 4.67926e-05 1.16253e-05 4.66024e-05
2.07 4.17225e-05 1.38365e-05 4.66024e-05
2.3 3.80054e-05 1.55606e-05 4.66024e-05
2.76 2.99485e-05 2.0827e-05 4.66024e-05
3.68 2.06206e-05 2.79947e-05 4.66024e-05
4.6 0 4.77332e-05 4.66024e-05
5.52 0 4.77322e-05 4.66024e-05
END DIST

Metal 5 OVER 3
DIST count 12 width 0.44
0.46 0.000129794 7.64964e-07 4.66024e-05
0.92 7.56794e-05 7.86811e-06 4.66024e-05
1.15 6.23215e-05 1.15531e-05 4.66024e-05
1.38 5.43067e-05 1.37634e-05 4.66024e-05
1.61 4.66589e-05 1.69049e-05 4.66024e-05
1.84 4.20702e-05 1.90431e-05 4.66024e-05
2.07 3.70494e-05 2.1647e-05 4.66024e-05
2.3 3.33595e-05 2.3713e-05 4.66024e-05
2.76 2.58951e-05 2.89026e-05 4.66024e-05
3.68 1.7403e-05 3.63063e-05 4.66024e-05
4.6 0 5.43086e-05 4.66024e-05
5.52 0 5.43106e-05 4.66024e-05
END DIST

Metal 5 OVER 4
DIST count 12 width 0.44
0.46 0.000119799 1.23434e-05 4.66024e-05
0.92 6.58707e-05 2.31529e-05 4.66024e-05
1.15 5.27624e-05 2.85598e-05 4.66024e-05
1.38 4.48975e-05 3.18038e-05 4.66024e-05
1.61 3.75852e-05 3.61346e-05 4.66024e-05
1.84 3.31978e-05 3.91612e-05 4.66024e-05
2.07 2.66693e-05 4.41447e-05 4.66024e-05
2.3 2.339e-05 4.65912e-05 4.66024e-05
2.76 1.86927e-05 5.01106e-05 4.66024e-05
3.68 1.20064e-05 5.69968e-05 4.66024e-05
4.6 0 7.12186e-05 4.66024e-05
5.52 0 7.12136e-05 4.66024e-05
END DIST

Metal 5 UNDER
WIDTH Table 0 entries: 

Metal 5 DIAGUNDER
WIDTH Table 0 entries: 
END DensityModel 0