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foss-eda-tools / third_party / opencircuitdesign.com / open_pdks / 19560172a76a2c0ec04879f4ebed1f342801d5b5 / . / gf180mcu / openlane / rules.openrcx.gf180mcuC.min.magic
blob: 731a39d39f3b74314d9933d1c5e4cbfcd2cab39e [file] [log] [blame]
Extraction Rules for OpenRCX
DIAGMODEL ON
LayerCount 5
DensityRate 1 0
DensityModel 0
Metal 1 RESOVER
WIDTH Table 1 entries: 0.23
Metal 1 RESOVER 0
DIST count 55 width 0.23
0 0 0 0.000333773
0 0.33 0 0.000333773
0 0.56 0 0.000333773
0 0.775 0 0.000333773
0 0.89 0 0.000333773
0 1.12 0 0.000333773
0 1.335 0 0.000333773
0 1.45 0 0.000333773
0 1.68 0 0.000333773
0 2.24 0 0.000333773
0.33 0.33 0 0.000333773
0.33 0.56 0 0.000333773
0.33 0.775 0 0.000333773
0.33 0.89 0 0.000333773
0.33 1.12 0 0.000333773
0.33 1.335 0 0.000333773
0.33 1.45 0 0.000333773
0.33 1.68 0 0.000333773
0.33 2.24 0 0.000333773
0.56 0.56 0 0.000333773
0.56 0.775 0 0.000333773
0.56 0.89 0 0.000333773
0.56 1.12 0 0.000333773
0.56 1.335 0 0.000333773
0.56 1.45 0 0.000333773
0.56 1.68 0 0.000333773
0.56 2.24 0 0.000333773
0.775 0.775 0 0.000333773
0.775 0.89 0 0.000333773
0.775 1.12 0 0.000333773
0.775 1.335 0 0.000333773
0.775 1.45 0 0.000333773
0.775 1.68 0 0.000333773
0.775 2.24 0 0.000333773
0.89 0.89 0 0.000333773
0.89 1.12 0 0.000333773
0.89 1.335 0 0.000333773
0.89 1.45 0 0.000333773
0.89 1.68 0 0.000333773
0.89 2.24 0 0.000333773
1.12 1.12 0 0.000333773
1.12 1.335 0 0.000333773
1.12 1.45 0 0.000333773
1.12 1.68 0 0.000333773
1.12 2.24 0 0.000333773
1.335 1.335 0 0.000333773
1.335 1.45 0 0.000333773
1.335 1.68 0 0.000333773
1.335 2.24 0 0.000333773
1.45 1.45 0 0.000333773
1.45 1.68 0 0.000333773
1.45 2.24 0 0.000333773
1.68 1.68 0 0.000333773
1.68 2.24 0 0.000333773
2.24 0 2.24 0.000333773
END DIST
Metal 1 OVER
WIDTH Table 1 entries: 0.23
Metal 1 OVER 0
DIST count 12 width 0.23
0.23 0.000233904 4.48184e-06 0.000166886
0.46 0.000116952 5.65e-06 0.000166886
0.575 9.35617e-05 6.23243e-06 0.000166886
0.69 7.79681e-05 6.81337e-06 0.000166886
0.805 6.68298e-05 7.39256e-06 0.000166886
0.92 5.84761e-05 7.96963e-06 0.000166886
1.035 5.19787e-05 8.54433e-06 0.000166886
1.15 4.67809e-05 9.11638e-06 0.000166886
1.38 3.8984e-05 1.02513e-05 0.000166886
1.84 2.9238e-05 1.24764e-05 0.000166886
2.3 2.33904e-05 1.46267e-05 0.000166886
2.76 0 3.61768e-05 0.000166886
END DIST
Metal 1 UNDER
WIDTH Table 1 entries: 0.23
Metal 1 UNDER 2
DIST count 12 width 0.23
0.23 0.000233904 1.18049e-05 0.000166886
0.46 0.000116952 1.2973e-05 0.000166886
0.575 9.35617e-05 1.35554e-05 0.000166886
0.69 7.79681e-05 1.41364e-05 0.000166886
0.805 6.68298e-05 1.47156e-05 0.000166886
0.92 5.84761e-05 1.52926e-05 0.000166886
1.035 5.19787e-05 1.58673e-05 0.000166886
1.15 4.67809e-05 1.64394e-05 0.000166886
1.38 3.8984e-05 1.75743e-05 0.000166886
1.84 2.9238e-05 1.97994e-05 0.000166886
2.3 2.33904e-05 2.19497e-05 0.000166886
2.76 0 4.34998e-05 0.000166886
END DIST
Metal 1 UNDER 3
DIST count 12 width 0.23
0.23 0.000233904 7.49106e-06 0.000166886
0.46 0.000116952 8.65922e-06 0.000166886
0.575 9.35617e-05 9.24166e-06 0.000166886
0.69 7.79681e-05 9.8226e-06 0.000166886
0.805 6.68298e-05 1.04018e-05 0.000166886
0.92 5.84761e-05 1.09789e-05 0.000166886
1.035 5.19787e-05 1.15536e-05 0.000166886
1.15 4.67809e-05 1.21256e-05 0.000166886
1.38 3.8984e-05 1.32605e-05 0.000166886
1.84 2.9238e-05 1.54856e-05 0.000166886
2.3 2.33904e-05 1.76359e-05 0.000166886
2.76 0 3.9186e-05 0.000166886
END DIST
Metal 1 UNDER 4
DIST count 12 width 0.23
0.23 0.000233904 6.39572e-06 0.000166886
0.46 0.000116952 7.56388e-06 0.000166886
0.575 9.35617e-05 8.14631e-06 0.000166886
0.69 7.79681e-05 8.72725e-06 0.000166886
0.805 6.68298e-05 9.30643e-06 0.000166886
0.92 5.84761e-05 9.88351e-06 0.000166886
1.035 5.19787e-05 1.04582e-05 0.000166886
1.15 4.67809e-05 1.10303e-05 0.000166886
1.38 3.8984e-05 1.21652e-05 0.000166886
1.84 2.9238e-05 1.43902e-05 0.000166886
2.3 2.33904e-05 1.65405e-05 0.000166886
2.76 0 3.80906e-05 0.000166886
END DIST
Metal 1 UNDER 5
DIST count 12 width 0.23
0.23 0.000233904 5.91346e-06 0.000166886
0.46 0.000116952 7.08162e-06 0.000166886
0.575 9.35617e-05 7.66405e-06 0.000166886
0.69 7.79681e-05 8.24499e-06 0.000166886
0.805 6.68298e-05 8.82418e-06 0.000166886
0.92 5.84761e-05 9.40125e-06 0.000166886
1.035 5.19787e-05 9.97595e-06 0.000166886
1.15 4.67809e-05 1.0548e-05 0.000166886
1.38 3.8984e-05 1.16829e-05 0.000166886
1.84 2.9238e-05 1.3908e-05 0.000166886
2.3 2.33904e-05 1.60583e-05 0.000166886
2.76 0 3.76084e-05 0.000166886
END DIST
Metal 1 DIAGUNDER
WIDTH Table 1 entries: 0.23
Metal 1 DIAGUNDER 2
DIST count 13 width 0.23
0 0 1.14438e-05 0.000166886
0.23 0 1.76197e-06 0.000166886
0.46 0 1.75481e-06 0.000166886
0.575 0 1.74985e-06 0.000166886
0.69 0 1.74401e-06 0.000166886
0.805 0 1.73729e-06 0.000166886
0.92 0 1.72969e-06 0.000166886
1.035 0 1.72121e-06 0.000166886
1.15 0 1.71186e-06 0.000166886
1.38 0 1.69047e-06 0.000166886
1.84 0 1.63751e-06 0.000166886
2.3 0 1.57119e-06 0.000166886
2.76 0 1.49205e-06 0.000166886
END DIST
Metal 1 DIAGUNDER 3
DIST count 13 width 0.23
0 0 4.24572e-06 0.000166886
0.23 0 9.77646e-07 0.000166886
0.46 0 9.7365e-07 0.000166886
0.575 0 9.70927e-07 0.000166886
0.69 0 9.67677e-07 0.000166886
0.805 0 9.63944e-07 0.000166886
0.92 0 9.59728e-07 0.000166886
1.035 0 9.55029e-07 0.000166886
1.15 0 9.49846e-07 0.000166886
1.38 0 9.37989e-07 0.000166886
1.84 0 9.08608e-07 0.000166886
2.3 0 8.71805e-07 0.000166886
2.76 0 8.27888e-07 0.000166886
END DIST
Metal 1 DIAGUNDER 4
DIST count 13 width 0.23
0 0 2.60641e-06 0.000166886
0.23 0 6.73737e-07 0.000166886
0.46 0 6.71014e-07 0.000166886
0.575 0 6.69126e-07 0.000166886
0.69 0 6.66886e-07 0.000166886
0.805 0 6.64295e-07 0.000166886
0.92 0 6.61397e-07 0.000166886
1.035 0 6.58147e-07 0.000166886
1.15 0 6.54589e-07 0.000166886
1.38 0 6.46421e-07 0.000166886
1.84 0 6.26175e-07 0.000166886
2.3 0 6.00791e-07 0.000166886
2.76 0 5.70531e-07 0.000166886
END DIST
Metal 1 DIAGUNDER 5
DIST count 13 width 0.23
0 0 1.75288e-06 0.000166886
0.23 0 6.36451e-07 0.000166886
0.46 0 6.33816e-07 0.000166886
0.575 0 6.3206e-07 0.000166886
0.69 0 6.29952e-07 0.000166886
0.805 0 6.27536e-07 0.000166886
0.92 0 6.24769e-07 0.000166886
1.035 0 6.21695e-07 0.000166886
1.15 0 6.18314e-07 0.000166886
1.38 0 6.10628e-07 0.000166886
1.84 0 5.9148e-07 0.000166886
2.3 0 5.67501e-07 0.000166886
2.76 0 5.38911e-07 0.000166886
END DIST
Metal 2 RESOVER
WIDTH Table 1 entries: 0.28
Metal 2 RESOVER 0
DIST count 55 width 0.28
0 0 0 0.00027417
0 0.28 0 0.00027417
0 0.56 0 0.00027417
0 0.7 0 0.00027417
0 0.84 0 0.00027417
0 1.12 0 0.00027417
0 1.26 0 0.00027417
0 1.4 0 0.00027417
0 1.68 0 0.00027417
0 2.24 0 0.00027417
0.28 0.28 0 0.00027417
0.28 0.56 0 0.00027417
0.28 0.7 0 0.00027417
0.28 0.84 0 0.00027417
0.28 1.12 0 0.00027417
0.28 1.26 0 0.00027417
0.28 1.4 0 0.00027417
0.28 1.68 0 0.00027417
0.28 2.24 0 0.00027417
0.56 0.56 0 0.00027417
0.56 0.7 0 0.00027417
0.56 0.84 0 0.00027417
0.56 1.12 0 0.00027417
0.56 1.26 0 0.00027417
0.56 1.4 0 0.00027417
0.56 1.68 0 0.00027417
0.56 2.24 0 0.00027417
0.7 0.7 0 0.00027417
0.7 0.84 0 0.00027417
0.7 1.12 0 0.00027417
0.7 1.26 0 0.00027417
0.7 1.4 0 0.00027417
0.7 1.68 0 0.00027417
0.7 2.24 0 0.00027417
0.84 0.84 0 0.00027417
0.84 1.12 0 0.00027417
0.84 1.26 0 0.00027417
0.84 1.4 0 0.00027417
0.84 1.68 0 0.00027417
0.84 2.24 0 0.00027417
1.12 1.12 0 0.00027417
1.12 1.26 0 0.00027417
1.12 1.4 0 0.00027417
1.12 1.68 0 0.00027417
1.12 2.24 0 0.00027417
1.26 1.26 0 0.00027417
1.26 1.4 0 0.00027417
1.26 1.68 0 0.00027417
1.26 2.24 0 0.00027417
1.4 1.4 0 0.00027417
1.4 1.68 0 0.00027417
1.4 2.24 0 0.00027417
1.68 1.68 0 0.00027417
1.68 2.24 0 0.00027417
2.24 0 2.24 0.00027417
END DIST
Metal 2 RESOVER 1
DIST count 0 width 0.28
END DIST
Metal 2 OVER
WIDTH Table 1 entries: 0.28
Metal 2 OVER 0
DIST count 12 width 0.28
0.28 0.000209401 3.15391e-06 0.000137085
0.56 0.000104701 4.16849e-06 0.000137085
0.7 8.37605e-05 4.67367e-06 0.000137085
0.84 6.98004e-05 5.17693e-06 0.000137085
0.98 5.98289e-05 5.67789e-06 0.000137085
1.12 5.23503e-05 6.17617e-06 0.000137085
1.26 4.65336e-05 6.67141e-06 0.000137085
1.4 4.18802e-05 7.1632e-06 0.000137085
1.68 3.49002e-05 8.13505e-06 0.000137085
2.24 2.61751e-05 1.00214e-05 0.000137085
2.8 2.09401e-05 1.18126e-05 0.000137085
3.36 0 3.09369e-05 0.000137085
END DIST
Metal 2 OVER 1
DIST count 12 width 0.28
0.28 0.000209401 9.81724e-06 0.000137085
0.56 0.000104701 1.16326e-05 0.000137085
0.7 8.37605e-05 1.2598e-05 0.000137085
0.84 6.98004e-05 1.35962e-05 0.000137085
0.98 5.98289e-05 1.46273e-05 0.000137085
1.12 5.23503e-05 1.56891e-05 0.000137085
1.26 4.65336e-05 1.67797e-05 0.000137085
1.4 4.18802e-05 1.7897e-05 0.000137085
1.68 3.49002e-05 2.02017e-05 0.000137085
2.24 2.61751e-05 2.50269e-05 0.000137085
2.8 2.09401e-05 2.99953e-05 0.000137085
3.36 0 5.23877e-05 0.000137085
END DIST
Metal 2 UNDER
WIDTH Table 1 entries: 0.28
Metal 2 UNDER 3
DIST count 12 width 0.28
0.28 0.000209401 1.20705e-05 0.000137085
0.56 0.000104701 1.30851e-05 0.000137085
0.7 8.37605e-05 1.35903e-05 0.000137085
0.84 6.98004e-05 1.40935e-05 0.000137085
0.98 5.98289e-05 1.45945e-05 0.000137085
1.12 5.23503e-05 1.50928e-05 0.000137085
1.26 4.65336e-05 1.5588e-05 0.000137085
1.4 4.18802e-05 1.60798e-05 0.000137085
1.68 3.49002e-05 1.70516e-05 0.000137085
2.24 2.61751e-05 1.8938e-05 0.000137085
2.8 2.09401e-05 2.07292e-05 0.000137085
3.36 0 3.98535e-05 0.000137085
END DIST
Metal 2 UNDER 4
DIST count 12 width 0.28
0.28 0.000209401 6.80009e-06 0.000137085
0.56 0.000104701 7.81466e-06 0.000137085
0.7 8.37605e-05 8.31984e-06 0.000137085
0.84 6.98004e-05 8.82311e-06 0.000137085
0.98 5.98289e-05 9.32406e-06 0.000137085
1.12 5.23503e-05 9.82235e-06 0.000137085
1.26 4.65336e-05 1.03176e-05 0.000137085
1.4 4.18802e-05 1.08094e-05 0.000137085
1.68 3.49002e-05 1.17812e-05 0.000137085
2.24 2.61751e-05 1.36676e-05 0.000137085
2.8 2.09401e-05 1.54588e-05 0.000137085
3.36 0 3.45831e-05 0.000137085
END DIST
Metal 2 UNDER 5
DIST count 12 width 0.28
0.28 0.000209401 5.47422e-06 0.000137085
0.56 0.000104701 6.4888e-06 0.000137085
0.7 8.37605e-05 6.99398e-06 0.000137085
0.84 6.98004e-05 7.49724e-06 0.000137085
0.98 5.98289e-05 7.9982e-06 0.000137085
1.12 5.23503e-05 8.49648e-06 0.000137085
1.26 4.65336e-05 8.99172e-06 0.000137085
1.4 4.18802e-05 9.48351e-06 0.000137085
1.68 3.49002e-05 1.04554e-05 0.000137085
2.24 2.61751e-05 1.23418e-05 0.000137085
2.8 2.09401e-05 1.41329e-05 0.000137085
3.36 0 3.32572e-05 0.000137085
END DIST
Metal 2 DIAGUNDER
WIDTH Table 1 entries: 0.28
Metal 2 DIAGUNDER 3
DIST count 13 width 0.28
0 0 1.39316e-05 0.000137085
0.28 0 2.11508e-06 0.000137085
0.56 0 2.10227e-06 0.000137085
0.7 0 2.09347e-06 0.000137085
0.84 0 2.08312e-06 0.000137085
0.98 0 2.07118e-06 0.000137085
1.12 0 2.05765e-06 0.000137085
1.26 0 2.0426e-06 0.000137085
1.4 0 2.02597e-06 0.000137085
1.68 0 1.9882e-06 0.000137085
2.24 0 1.89473e-06 0.000137085
2.8 0 1.77835e-06 0.000137085
3.36 0 1.64055e-06 0.000137085
END DIST
Metal 2 DIAGUNDER 4
DIST count 13 width 0.28
0 0 5.16869e-06 0.000137085
0.28 0 1.15108e-06 0.000137085
0.56 0 1.14412e-06 0.000137085
0.7 0 1.13932e-06 0.000137085
0.84 0 1.13369e-06 0.000137085
0.98 0 1.1272e-06 0.000137085
1.12 0 1.11984e-06 0.000137085
1.26 0 1.11165e-06 0.000137085
1.4 0 1.1026e-06 0.000137085
1.68 0 1.08203e-06 0.000137085
2.24 0 1.03117e-06 0.000137085
2.8 0 9.67857e-07 0.000137085
3.36 0 8.92821e-07 0.000137085
END DIST
Metal 2 DIAGUNDER 5
DIST count 13 width 0.28
0 0 2.88258e-06 0.000137085
0.28 0 9.74495e-07 0.000137085
0.56 0 9.68579e-07 0.000137085
0.7 0 9.64538e-07 0.000137085
0.84 0 9.59776e-07 0.000137085
0.98 0 9.54257e-07 0.000137085
1.12 0 9.48052e-07 0.000137085
1.26 0 9.41089e-07 0.000137085
1.4 0 9.33442e-07 0.000137085
1.68 0 9.16053e-07 0.000137085
2.24 0 8.7298e-07 0.000137085
2.8 0 8.19372e-07 0.000137085
3.36 0 7.55844e-07 0.000137085
END DIST
Metal 2 OVERUNDER
WIDTH Table 1 entries: 0.28
Metal 2 OVER 1 UNDER 3
DIST count 12 width 0.28
0.28 0.000209401 1.87338e-05 0.000137085
0.56 0.000104701 2.05492e-05 0.000137085
0.7 8.37605e-05 2.15146e-05 0.000137085
0.84 6.98004e-05 2.25128e-05 0.000137085
0.98 5.98289e-05 2.35439e-05 0.000137085
1.12 5.23503e-05 2.46057e-05 0.000137085
1.26 4.65336e-05 2.56963e-05 0.000137085
1.4 4.18802e-05 2.68136e-05 0.000137085
1.68 3.49002e-05 2.91183e-05 0.000137085
2.24 2.61751e-05 3.39435e-05 0.000137085
2.8 2.09401e-05 3.89119e-05 0.000137085
3.36 0 6.13043e-05 0.000137085
END DIST
Metal 2 OVER 1 UNDER 4
DIST count 12 width 0.28
0.28 0.000209401 1.34634e-05 0.000137085
0.56 0.000104701 1.52787e-05 0.000137085
0.7 8.37605e-05 1.62442e-05 0.000137085
0.84 6.98004e-05 1.72424e-05 0.000137085
0.98 5.98289e-05 1.82734e-05 0.000137085
1.12 5.23503e-05 1.93353e-05 0.000137085
1.26 4.65336e-05 2.04259e-05 0.000137085
1.4 4.18802e-05 2.15432e-05 0.000137085
1.68 3.49002e-05 2.38479e-05 0.000137085
2.24 2.61751e-05 2.86731e-05 0.000137085
2.8 2.09401e-05 3.36415e-05 0.000137085
3.36 0 5.60339e-05 0.000137085
END DIST
Metal 2 OVER 1 UNDER 5
DIST count 12 width 0.28
0.28 0.000209401 1.21376e-05 0.000137085
0.56 0.000104701 1.39529e-05 0.000137085
0.7 8.37605e-05 1.49183e-05 0.000137085
0.84 6.98004e-05 1.59165e-05 0.000137085
0.98 5.98289e-05 1.69476e-05 0.000137085
1.12 5.23503e-05 1.80095e-05 0.000137085
1.26 4.65336e-05 1.91e-05 0.000137085
1.4 4.18802e-05 2.02173e-05 0.000137085
1.68 3.49002e-05 2.2522e-05 0.000137085
2.24 2.61751e-05 2.73472e-05 0.000137085
2.8 2.09401e-05 3.23156e-05 0.000137085
3.36 0 5.4708e-05 0.000137085
END DIST
Metal 3 RESOVER
WIDTH Table 1 entries: 0.28
Metal 3 RESOVER 0
DIST count 55 width 0.28
0 0 0 0.00027417
0 0.28 0 0.00027417
0 0.56 0 0.00027417
0 0.7 0 0.00027417
0 0.84 0 0.00027417
0 1.12 0 0.00027417
0 1.26 0 0.00027417
0 1.4 0 0.00027417
0 1.68 0 0.00027417
0 2.24 0 0.00027417
0.28 0.28 0 0.00027417
0.28 0.56 0 0.00027417
0.28 0.7 0 0.00027417
0.28 0.84 0 0.00027417
0.28 1.12 0 0.00027417
0.28 1.26 0 0.00027417
0.28 1.4 0 0.00027417
0.28 1.68 0 0.00027417
0.28 2.24 0 0.00027417
0.56 0.56 0 0.00027417
0.56 0.7 0 0.00027417
0.56 0.84 0 0.00027417
0.56 1.12 0 0.00027417
0.56 1.26 0 0.00027417
0.56 1.4 0 0.00027417
0.56 1.68 0 0.00027417
0.56 2.24 0 0.00027417
0.7 0.7 0 0.00027417
0.7 0.84 0 0.00027417
0.7 1.12 0 0.00027417
0.7 1.26 0 0.00027417
0.7 1.4 0 0.00027417
0.7 1.68 0 0.00027417
0.7 2.24 0 0.00027417
0.84 0.84 0 0.00027417
0.84 1.12 0 0.00027417
0.84 1.26 0 0.00027417
0.84 1.4 0 0.00027417
0.84 1.68 0 0.00027417
0.84 2.24 0 0.00027417
1.12 1.12 0 0.00027417
1.12 1.26 0 0.00027417
1.12 1.4 0 0.00027417
1.12 1.68 0 0.00027417
1.12 2.24 0 0.00027417
1.26 1.26 0 0.00027417
1.26 1.4 0 0.00027417
1.26 1.68 0 0.00027417
1.26 2.24 0 0.00027417
1.4 1.4 0 0.00027417
1.4 1.68 0 0.00027417
1.4 2.24 0 0.00027417
1.68 1.68 0 0.00027417
1.68 2.24 0 0.00027417
2.24 0 2.24 0.00027417
END DIST
Metal 3 RESOVER 1
DIST count 0 width 0.28
END DIST
Metal 3 RESOVER 2
DIST count 0 width 0.28
END DIST
Metal 3 OVER
WIDTH Table 1 entries: 0.28
Metal 3 OVER 0
DIST count 12 width 0.28
0.28 0.000207857 2.22249e-06 0.000137085
0.56 0.000103929 2.98126e-06 0.000137085
0.7 8.31429e-05 3.35907e-06 0.000137085
0.84 6.92857e-05 3.73544e-06 0.000137085
0.98 5.93877e-05 4.1101e-06 0.000137085
1.12 5.19643e-05 4.48276e-06 0.000137085
1.26 4.61905e-05 4.85312e-06 0.000137085
1.4 4.15714e-05 5.22092e-06 0.000137085
1.68 3.46429e-05 5.94775e-06 0.000137085
2.24 2.59822e-05 7.35853e-06 0.000137085
2.8 2.07857e-05 8.69807e-06 0.000137085
3.36 0 2.72716e-05 0.000137085
END DIST
Metal 3 OVER 1
DIST count 12 width 0.28
0.28 0.000207857 4.48117e-06 0.000137085
0.56 0.000103929 5.63667e-06 0.000137085
0.7 8.31429e-05 6.24114e-06 0.000137085
0.84 6.92857e-05 6.86198e-06 0.000137085
0.98 5.93877e-05 7.49924e-06 0.000137085
1.12 5.19643e-05 8.15085e-06 0.000137085
1.26 4.61905e-05 8.81696e-06 0.000137085
1.4 4.15714e-05 9.49324e-06 0.000137085
1.68 3.46429e-05 1.08815e-05 0.000137085
2.24 2.59822e-05 1.37451e-05 0.000137085
2.8 2.07857e-05 1.66589e-05 0.000137085
3.36 0 3.68498e-05 0.000137085
END DIST
Metal 3 OVER 2
DIST count 12 width 0.28
0.28 0.000207857 9.27626e-06 0.000137085
0.56 0.000103929 1.09041e-05 0.000137085
0.7 8.31429e-05 1.17762e-05 0.000137085
0.84 6.92857e-05 1.2687e-05 0.000137085
0.98 5.93877e-05 1.36315e-05 0.000137085
1.12 5.19643e-05 1.46094e-05 0.000137085
1.26 4.61905e-05 1.56193e-05 0.000137085
1.4 4.15714e-05 1.66576e-05 0.000137085
1.68 3.46429e-05 1.8813e-05 0.000137085
2.24 2.59822e-05 2.33635e-05 0.000137085
2.8 2.07857e-05 2.80911e-05 0.000137085
3.36 0 5.01403e-05 0.000137085
END DIST
Metal 3 UNDER
WIDTH Table 1 entries: 0.28
Metal 3 UNDER 4
DIST count 12 width 0.28
0.28 0.000207857 1.11078e-05 0.000137085
0.56 0.000103929 1.18666e-05 0.000137085
0.7 8.31429e-05 1.22444e-05 0.000137085
0.84 6.92857e-05 1.26208e-05 0.000137085
0.98 5.93877e-05 1.29955e-05 0.000137085
1.12 5.19643e-05 1.33681e-05 0.000137085
1.26 4.61905e-05 1.37385e-05 0.000137085
1.4 4.15714e-05 1.41063e-05 0.000137085
1.68 3.46429e-05 1.48331e-05 0.000137085
2.24 2.59822e-05 1.62439e-05 0.000137085
2.8 2.07857e-05 1.75834e-05 0.000137085
3.36 0 3.6157e-05 0.000137085
END DIST
Metal 3 UNDER 5
DIST count 12 width 0.28
0.28 0.000207857 5.62556e-06 0.000137085
0.56 0.000103929 6.38433e-06 0.000137085
0.7 8.31429e-05 6.76214e-06 0.000137085
0.84 6.92857e-05 7.13851e-06 0.000137085
0.98 5.93877e-05 7.51317e-06 0.000137085
1.12 5.19643e-05 7.88582e-06 0.000137085
1.26 4.61905e-05 8.25619e-06 0.000137085
1.4 4.15714e-05 8.62399e-06 0.000137085
1.68 3.46429e-05 9.35081e-06 0.000137085
2.24 2.59822e-05 1.07616e-05 0.000137085
2.8 2.07857e-05 1.21011e-05 0.000137085
3.36 0 3.06747e-05 0.000137085
END DIST
Metal 3 DIAGUNDER
WIDTH Table 1 entries: 0.28
Metal 3 DIAGUNDER 4
DIST count 13 width 0.28
0 0 1.39316e-05 0.000137085
0.28 0 2.08157e-06 0.000137085
0.56 0 2.06898e-06 0.000137085
0.7 0 2.06032e-06 0.000137085
0.84 0 2.05014e-06 0.000137085
0.98 0 2.03838e-06 0.000137085
1.12 0 2.02507e-06 0.000137085
1.26 0 2.01025e-06 0.000137085
1.4 0 1.9939e-06 0.000137085
1.68 0 1.95671e-06 0.000137085
2.24 0 1.86472e-06 0.000137085
2.8 0 1.75022e-06 0.000137085
3.36 0 1.61457e-06 0.000137085
END DIST
Metal 3 DIAGUNDER 5
DIST count 13 width 0.28
0 0 4.44012e-06 0.000137085
0.28 0 1.3189e-06 0.000137085
0.56 0 1.31093e-06 0.000137085
0.7 0 1.30545e-06 0.000137085
0.84 0 1.29899e-06 0.000137085
0.98 0 1.29156e-06 0.000137085
1.12 0 1.28312e-06 0.000137085
1.26 0 1.27374e-06 0.000137085
1.4 0 1.26338e-06 0.000137085
1.68 0 1.23983e-06 0.000137085
2.24 0 1.18153e-06 0.000137085
2.8 0 1.10898e-06 0.000137085
3.36 0 1.02302e-06 0.000137085
END DIST
Metal 3 OVERUNDER
WIDTH Table 1 entries: 0.28
Metal 3 OVER 1 UNDER 4
DIST count 12 width 0.28
0.28 0.000207857 1.33665e-05 0.000137085
0.56 0.000103929 1.4522e-05 0.000137085
0.7 8.31429e-05 1.51265e-05 0.000137085
0.84 6.92857e-05 1.57473e-05 0.000137085
0.98 5.93877e-05 1.63846e-05 0.000137085
1.12 5.19643e-05 1.70362e-05 0.000137085
1.26 4.61905e-05 1.77023e-05 0.000137085
1.4 4.15714e-05 1.83786e-05 0.000137085
1.68 3.46429e-05 1.97668e-05 0.000137085
2.24 2.59822e-05 2.26304e-05 0.000137085
2.8 2.07857e-05 2.55443e-05 0.000137085
3.36 0 4.57351e-05 0.000137085
END DIST
Metal 3 OVER 1 UNDER 5
DIST count 12 width 0.28
0.28 0.000207857 7.88424e-06 0.000137085
0.56 0.000103929 9.03974e-06 0.000137085
0.7 8.31429e-05 9.64421e-06 0.000137085
0.84 6.92857e-05 1.0265e-05 0.000137085
0.98 5.93877e-05 1.09023e-05 0.000137085
1.12 5.19643e-05 1.15539e-05 0.000137085
1.26 4.61905e-05 1.222e-05 0.000137085
1.4 4.15714e-05 1.28963e-05 0.000137085
1.68 3.46429e-05 2.2194e-05 0.000137085
2.24 2.59822e-05 1.71482e-05 0.000137085
2.8 2.07857e-05 2.0062e-05 0.000137085
3.36 0 4.02529e-05 0.000137085
END DIST
Metal 3 OVER 2 UNDER 4
DIST count 12 width 0.28
0.28 0.000207857 1.81616e-05 0.000137085
0.56 0.000103929 1.97894e-05 0.000137085
0.7 8.31429e-05 2.06615e-05 0.000137085
0.84 6.92857e-05 2.15724e-05 0.000137085
0.98 5.93877e-05 2.25168e-05 0.000137085
1.12 5.19643e-05 2.34948e-05 0.000137085
1.26 4.61905e-05 2.45047e-05 0.000137085
1.4 4.15714e-05 2.5543e-05 0.000137085
1.68 3.46429e-05 2.76983e-05 0.000137085
2.24 2.59822e-05 3.22488e-05 0.000137085
2.8 2.07857e-05 3.69765e-05 0.000137085
3.36 0 5.90256e-05 0.000137085
END DIST
Metal 3 OVER 2 UNDER 5
DIST count 12 width 0.28
0.28 0.000207857 1.26793e-05 0.000137085
0.56 0.000103929 1.43071e-05 0.000137085
0.7 8.31429e-05 1.51792e-05 0.000137085
0.84 6.92857e-05 1.60901e-05 0.000137085
0.98 5.93877e-05 1.70345e-05 0.000137085
1.12 5.19643e-05 1.80125e-05 0.000137085
1.26 4.61905e-05 1.90224e-05 0.000137085
1.4 4.15714e-05 2.00607e-05 0.000137085
1.68 3.46429e-05 3.39165e-05 0.000137085
2.24 2.59822e-05 2.67665e-05 0.000137085
2.8 2.07857e-05 3.14942e-05 0.000137085
3.36 0 5.35433e-05 0.000137085
END DIST
Metal 4 RESOVER
WIDTH Table 1 entries: 0.28
Metal 4 RESOVER 0
DIST count 55 width 0.28
0 0 0 0.00027417
0 0.28 0 0.00027417
0 0.56 0 0.00027417
0 0.7 0 0.00027417
0 0.84 0 0.00027417
0 1.12 0 0.00027417
0 1.26 0 0.00027417
0 1.4 0 0.00027417
0 1.68 0 0.00027417
0 2.24 0 0.00027417
0.28 0.28 0 0.00027417
0.28 0.56 0 0.00027417
0.28 0.7 0 0.00027417
0.28 0.84 0 0.00027417
0.28 1.12 0 0.00027417
0.28 1.26 0 0.00027417
0.28 1.4 0 0.00027417
0.28 1.68 0 0.00027417
0.28 2.24 0 0.00027417
0.56 0.56 0 0.00027417
0.56 0.7 0 0.00027417
0.56 0.84 0 0.00027417
0.56 1.12 0 0.00027417
0.56 1.26 0 0.00027417
0.56 1.4 0 0.00027417
0.56 1.68 0 0.00027417
0.56 2.24 0 0.00027417
0.7 0.7 0 0.00027417
0.7 0.84 0 0.00027417
0.7 1.12 0 0.00027417
0.7 1.26 0 0.00027417
0.7 1.4 0 0.00027417
0.7 1.68 0 0.00027417
0.7 2.24 0 0.00027417
0.84 0.84 0 0.00027417
0.84 1.12 0 0.00027417
0.84 1.26 0 0.00027417
0.84 1.4 0 0.00027417
0.84 1.68 0 0.00027417
0.84 2.24 0 0.00027417
1.12 1.12 0 0.00027417
1.12 1.26 0 0.00027417
1.12 1.4 0 0.00027417
1.12 1.68 0 0.00027417
1.12 2.24 0 0.00027417
1.26 1.26 0 0.00027417
1.26 1.4 0 0.00027417
1.26 1.68 0 0.00027417
1.26 2.24 0 0.00027417
1.4 1.4 0 0.00027417
1.4 1.68 0 0.00027417
1.4 2.24 0 0.00027417
1.68 1.68 0 0.00027417
1.68 2.24 0 0.00027417
2.24 0 2.24 0.00027417
END DIST
Metal 4 RESOVER 1
DIST count 0 width 0.28
END DIST
Metal 4 RESOVER 2
DIST count 0 width 0.28
END DIST
Metal 4 RESOVER 3
DIST count 0 width 0.28
END DIST
Metal 4 OVER
WIDTH Table 1 entries: 0.28
Metal 4 OVER 0
DIST count 12 width 0.28
0.28 0.000213773 1.71387e-06 0.000137085
0.56 0.000106887 2.31546e-06 0.000137085
0.7 8.55094e-05 2.61501e-06 0.000137085
0.84 7.12578e-05 2.91342e-06 0.000137085
0.98 6.10781e-05 3.21046e-06 0.000137085
1.12 5.34434e-05 3.50592e-06 0.000137085
1.26 4.75052e-05 3.79957e-06 0.000137085
1.4 4.27547e-05 4.09118e-06 0.000137085
1.68 3.56289e-05 4.66744e-06 0.000137085
2.24 2.67217e-05 5.78598e-06 0.000137085
2.8 2.13773e-05 6.84803e-06 0.000137085
3.36 0 2.56552e-05 0.000137085
END DIST
Metal 4 OVER 1
DIST count 12 width 0.28
0.28 0.000213773 3.01474e-06 0.000137085
0.56 0.000106887 3.87192e-06 0.000137085
0.7 8.55094e-05 4.31501e-06 0.000137085
0.84 7.12578e-05 4.77211e-06 0.000137085
0.98 6.10781e-05 5.23674e-06 0.000137085
1.12 5.34434e-05 5.71115e-06 0.000137085
1.26 4.75052e-05 6.19329e-06 0.000137085
1.4 4.27547e-05 6.68321e-06 0.000137085
1.68 3.56289e-05 7.68256e-06 0.000137085
2.24 2.67217e-05 9.73117e-06 0.000137085
2.8 2.13773e-05 1.18016e-05 0.000137085
3.36 0 3.16446e-05 0.000137085
END DIST
Metal 4 OVER 2
DIST count 12 width 0.28
0.28 0.000213773 4.16468e-06 0.000137085
0.56 0.000106887 5.19122e-06 0.000137085
0.7 8.55094e-05 5.73328e-06 0.000137085
0.84 7.12578e-05 6.29457e-06 0.000137085
0.98 6.10781e-05 6.86973e-06 0.000137085
1.12 5.34434e-05 7.46245e-06 0.000137085
1.26 4.75052e-05 8.06919e-06 0.000137085
1.4 4.27547e-05 8.6901e-06 0.000137085
1.68 3.56289e-05 9.96589e-06 0.000137085
2.24 2.67217e-05 1.2622e-05 0.000137085
2.8 2.13773e-05 1.53443e-05 0.000137085
3.36 0 3.58544e-05 0.000137085
END DIST
Metal 4 OVER 3
DIST count 12 width 0.28
0.28 0.000213773 8.9491e-06 0.000137085
0.56 0.000106887 1.0441e-05 0.000137085
0.7 8.55094e-05 1.12482e-05 0.000137085
0.84 7.12578e-05 1.20945e-05 0.000137085
0.98 6.10781e-05 1.29763e-05 0.000137085
1.12 5.34434e-05 1.38937e-05 0.000137085
1.26 4.75052e-05 1.48431e-05 0.000137085
1.4 4.27547e-05 1.5823e-05 0.000137085
1.68 3.56289e-05 1.78636e-05 0.000137085
2.24 2.67217e-05 2.22044e-05 0.000137085
2.8 2.13773e-05 2.67431e-05 0.000137085
3.36 0 4.91165e-05 0.000137085
END DIST
Metal 4 UNDER
WIDTH Table 1 entries: 0.28
Metal 4 UNDER 5
DIST count 12 width 0.28
0.28 0.000213773 8.38497e-06 0.000137085
0.56 0.000106887 8.98656e-06 0.000137085
0.7 8.55094e-05 9.28611e-06 0.000137085
0.84 7.12578e-05 9.58452e-06 0.000137085
0.98 6.10781e-05 9.88157e-06 0.000137085
1.12 5.34434e-05 1.0177e-05 0.000137085
1.26 4.75052e-05 1.04707e-05 0.000137085
1.4 4.27547e-05 1.07623e-05 0.000137085
1.68 3.56289e-05 1.13385e-05 0.000137085
2.24 2.67217e-05 1.24571e-05 0.000137085
2.8 2.13773e-05 1.35191e-05 0.000137085
3.36 0 3.23263e-05 0.000137085
END DIST
Metal 4 DIAGUNDER
WIDTH Table 1 entries: 0.28
Metal 4 DIAGUNDER 5
DIST count 13 width 0.28
0 0 9.65945e-06 0.000137085
0.28 0 2.09076e-06 0.000137085
0.56 0 2.0781e-06 0.000137085
0.7 0 2.06941e-06 0.000137085
0.84 0 2.05916e-06 0.000137085
0.98 0 2.04737e-06 0.000137085
1.12 0 2.03402e-06 0.000137085
1.26 0 2.01912e-06 0.000137085
1.4 0 2.00271e-06 0.000137085
1.68 0 1.96537e-06 0.000137085
2.24 0 1.87298e-06 0.000137085
2.8 0 1.75794e-06 0.000137085
3.36 0 1.62168e-06 0.000137085
END DIST
Metal 4 OVERUNDER
WIDTH Table 1 entries: 0.28
Metal 4 OVER 1 UNDER 5
DIST count 12 width 0.28
0.28 0.000213773 9.68584e-06 0.000137085
0.56 0.000106887 1.0543e-05 0.000137085
0.7 8.55094e-05 1.09861e-05 0.000137085
0.84 7.12578e-05 1.14432e-05 0.000137085
0.98 6.10781e-05 1.19078e-05 0.000137085
1.12 5.34434e-05 1.23823e-05 0.000137085
1.26 4.75052e-05 1.28644e-05 0.000137085
1.4 4.27547e-05 1.33543e-05 0.000137085
1.68 3.56289e-05 1.43537e-05 0.000137085
2.24 2.67217e-05 1.64023e-05 0.000137085
2.8 2.13773e-05 1.84727e-05 0.000137085
3.36 0 3.83157e-05 0.000137085
END DIST
Metal 4 OVER 2 UNDER 5
DIST count 12 width 0.28
0.28 0.000213773 1.08358e-05 0.000137085
0.56 0.000106887 1.18623e-05 0.000137085
0.7 8.55094e-05 1.24044e-05 0.000137085
0.84 7.12578e-05 1.29657e-05 0.000137085
0.98 6.10781e-05 1.35408e-05 0.000137085
1.12 5.34434e-05 1.41335e-05 0.000137085
1.26 4.75052e-05 1.47403e-05 0.000137085
1.4 4.27547e-05 1.53612e-05 0.000137085
1.68 3.56289e-05 1.6637e-05 0.000137085
2.24 2.67217e-05 1.92931e-05 0.000137085
2.8 2.13773e-05 2.20154e-05 0.000137085
3.36 0 4.25255e-05 0.000137085
END DIST
Metal 4 OVER 3 UNDER 5
DIST count 12 width 0.28
0.28 0.000213773 1.56202e-05 0.000137085
0.56 0.000106887 1.71121e-05 0.000137085
0.7 8.55094e-05 1.79193e-05 0.000137085
0.84 7.12578e-05 1.87656e-05 0.000137085
0.98 6.10781e-05 1.96474e-05 0.000137085
1.12 5.34434e-05 2.05648e-05 0.000137085
1.26 4.75052e-05 2.15142e-05 0.000137085
1.4 4.27547e-05 2.24941e-05 0.000137085
1.68 3.56289e-05 2.45347e-05 0.000137085
2.24 2.67217e-05 2.88755e-05 0.000137085
2.8 2.13773e-05 3.34142e-05 0.000137085
3.36 0 5.57876e-05 0.000137085
END DIST
Metal 5 RESOVER
WIDTH Table 1 entries: 0.44
Metal 5 RESOVER 0
DIST count 55 width 0.44
0 0 0 0.000114784
0 0.46 0 0.000114784
0 0.9 0 0.000114784
0 1.14 0 0.000114784
0 1.36 0 0.000114784
0 1.8 0 0.000114784
0 2.04 0 0.000114784
0 2.26 0 0.000114784
0 2.7 0 0.000114784
0 3.6 0 0.000114784
0.46 0.46 0 0.000114784
0.46 0.9 0 0.000114784
0.46 1.14 0 0.000114784
0.46 1.36 0 0.000114784
0.46 1.8 0 0.000114784
0.46 2.04 0 0.000114784
0.46 2.26 0 0.000114784
0.46 2.7 0 0.000114784
0.46 3.6 0 0.000114784
0.9 0.9 0 0.000114784
0.9 1.14 0 0.000114784
0.9 1.36 0 0.000114784
0.9 1.8 0 0.000114784
0.9 2.04 0 0.000114784
0.9 2.26 0 0.000114784
0.9 2.7 0 0.000114784
0.9 3.6 0 0.000114784
1.14 1.14 0 0.000114784
1.14 1.36 0 0.000114784
1.14 1.8 0 0.000114784
1.14 2.04 0 0.000114784
1.14 2.26 0 0.000114784
1.14 2.7 0 0.000114784
1.14 3.6 0 0.000114784
1.36 1.36 0 0.000114784
1.36 1.8 0 0.000114784
1.36 2.04 0 0.000114784
1.36 2.26 0 0.000114784
1.36 2.7 0 0.000114784
1.36 3.6 0 0.000114784
1.8 1.8 0 0.000114784
1.8 2.04 0 0.000114784
1.8 2.26 0 0.000114784
1.8 2.7 0 0.000114784
1.8 3.6 0 0.000114784
2.04 2.04 0 0.000114784
2.04 2.26 0 0.000114784
2.04 2.7 0 0.000114784
2.04 3.6 0 0.000114784
2.26 2.26 0 0.000114784
2.26 2.7 0 0.000114784
2.26 3.6 0 0.000114784
2.7 2.7 0 0.000114784
2.7 3.6 0 0.000114784
3.6 0 3.6 0.000114784
END DIST
Metal 5 RESOVER 1
DIST count 0 width 0.44
END DIST
Metal 5 RESOVER 2
DIST count 0 width 0.44
END DIST
Metal 5 RESOVER 3
DIST count 0 width 0.44
END DIST
Metal 5 RESOVER 4
DIST count 0 width 0.44
END DIST
Metal 5 OVER
WIDTH Table 1 entries: 0.44
Metal 5 OVER 0
DIST count 12 width 0.44
0.46 0.000224721 2.31575e-06 5.73921e-05
0.92 0.00011236 3.30917e-06 5.73921e-05
1.15 8.98884e-05 3.8003e-06 5.73921e-05
1.38 7.49073e-05 4.28634e-06 5.73921e-05
1.61 6.42062e-05 4.76632e-06 5.73921e-05
1.84 5.61804e-05 5.23927e-06 5.73921e-05
2.07 4.9938e-05 5.70421e-06 5.73921e-05
2.3 4.49442e-05 6.16019e-06 5.73921e-05
2.76 3.74535e-05 7.0416e-06 5.73921e-05
3.68 2.80901e-05 8.65748e-06 5.73921e-05
4.6 2.24721e-05 1.00343e-05 5.73921e-05
5.52 0 2.98541e-05 5.73921e-05
END DIST
Metal 5 OVER 1
DIST count 12 width 0.44
0.46 0.000224721 3.86189e-06 5.73921e-05
0.92 0.00011236 5.41156e-06 5.73921e-05
1.15 8.98884e-05 6.21593e-06 5.73921e-05
1.38 7.49073e-05 7.03349e-06 5.73921e-05
1.61 6.42062e-05 7.86279e-06 5.73921e-05
1.84 5.61804e-05 8.69806e-06 5.73921e-05
2.07 4.9938e-05 9.53587e-06 5.73921e-05
2.3 4.49442e-05 1.0375e-05 5.73921e-05
2.76 3.74535e-05 1.20309e-05 5.73921e-05
3.68 2.80901e-05 1.51532e-05 5.73921e-05
4.6 2.24721e-05 1.78165e-05 5.73921e-05
5.52 0 3.8554e-05 5.73921e-05
END DIST
Metal 5 OVER 2
DIST count 12 width 0.44
0.46 0.000224721 4.64627e-06 5.73921e-05
0.92 0.00011236 6.43827e-06 5.73921e-05
1.15 8.98884e-05 7.37616e-06 5.73921e-05
1.38 7.49073e-05 8.33444e-06 5.73921e-05
1.61 6.42062e-05 9.31201e-06 5.73921e-05
1.84 5.61804e-05 1.03008e-05 5.73921e-05
2.07 4.9938e-05 1.12981e-05 5.73921e-05
2.3 4.49442e-05 1.2296e-05 5.73921e-05
2.76 3.74535e-05 1.42762e-05 5.73921e-05
3.68 2.80901e-05 1.8023e-05 5.73921e-05
4.6 2.24721e-05 2.12139e-05 5.73921e-05
5.52 0 4.23233e-05 5.73921e-05
END DIST
Metal 5 OVER 3
DIST count 12 width 0.44
0.46 0.000224721 6.21296e-06 5.73921e-05
0.92 0.00011236 8.41331e-06 5.73921e-05
1.15 8.98884e-05 9.57965e-06 5.73921e-05
1.38 7.49073e-05 1.07843e-05 5.73921e-05
1.61 6.42062e-05 1.20156e-05 5.73921e-05
1.84 5.61804e-05 1.32706e-05 5.73921e-05
2.07 4.9938e-05 1.45395e-05 5.73921e-05
2.3 4.49442e-05 1.58162e-05 5.73921e-05
2.76 3.74535e-05 1.83613e-05 5.73921e-05
3.68 2.80901e-05 2.32035e-05 5.73921e-05
4.6 2.24721e-05 2.73263e-05 5.73921e-05
5.52 0 4.90976e-05 5.73921e-05
END DIST
Metal 5 OVER 4
DIST count 12 width 0.44
0.46 0.000224721 1.10763e-05 5.73921e-05
0.92 0.00011236 1.41959e-05 5.73921e-05
1.15 8.98884e-05 1.58767e-05 5.73921e-05
1.38 7.49073e-05 1.76246e-05 5.73921e-05
1.61 6.42062e-05 1.94297e-05 5.73921e-05
1.84 5.61804e-05 2.12783e-05 5.73921e-05
2.07 4.9938e-05 2.31607e-05 5.73921e-05
2.3 4.49442e-05 2.50615e-05 5.73921e-05
2.76 3.74535e-05 2.88712e-05 5.73921e-05
3.68 2.80901e-05 3.6167e-05 5.73921e-05
4.6 2.24721e-05 4.23782e-05 5.73921e-05
5.52 0 6.56336e-05 5.73921e-05
END DIST
Metal 5 UNDER
WIDTH Table 0 entries:
Metal 5 DIAGUNDER
WIDTH Table 0 entries:
END DensityModel 0