sky130/openlane/rules.openrcx.sky130B.min.magic

Extraction Rules for OpenRCX

DIAGMODEL ON

LayerCount 6
DensityRate 1  0

DensityModel 0

Metal 1 RESOVER
WIDTH Table 1 entries:  0.17

Metal 1 RESOVER 0
DIST count 55 width 0.17
0 0 0 0.0623886
0 0.29 0 0.0623886
0 0.46 0 0.0623886
0 0.665 0 0.0623886
0 0.75 0 0.0623886
0 0.92 0 0.0623886
0 1.125 0 0.0623886
0 1.21 0 0.0623886
0 1.38 0 0.0623886
0 1.84 0 0.0623886
0.29 0.29 0 0.0623886
0.29 0.46 0 0.0623886
0.29 0.665 0 0.0623886
0.29 0.75 0 0.0623886
0.29 0.92 0 0.0623886
0.29 1.125 0 0.0623886
0.29 1.21 0 0.0623886
0.29 1.38 0 0.0623886
0.29 1.84 0 0.0623886
0.46 0.46 0 0.0623886
0.46 0.665 0 0.0623886
0.46 0.75 0 0.0623886
0.46 0.92 0 0.0623886
0.46 1.125 0 0.0623886
0.46 1.21 0 0.0623886
0.46 1.38 0 0.0623886
0.46 1.84 0 0.0623886
0.665 0.665 0 0.0623886
0.665 0.75 0 0.0623886
0.665 0.92 0 0.0623886
0.665 1.125 0 0.0623886
0.665 1.21 0 0.0623886
0.665 1.38 0 0.0623886
0.665 1.84 0 0.0623886
0.75 0.75 0 0.0623886
0.75 0.92 0 0.0623886
0.75 1.125 0 0.0623886
0.75 1.21 0 0.0623886
0.75 1.38 0 0.0623886
0.75 1.84 0 0.0623886
0.92 0.92 0 0.0623886
0.92 1.125 0 0.0623886
0.92 1.21 0 0.0623886
0.92 1.38 0 0.0623886
0.92 1.84 0 0.0623886
1.125 1.125 0 0.0623886
1.125 1.21 0 0.0623886
1.125 1.38 0 0.0623886
1.125 1.84 0 0.0623886
1.21 1.21 0 0.0623886
1.21 1.38 0 0.0623886
1.21 1.84 0 0.0623886
1.38 1.38 0 0.0623886
1.38 1.84 0 0.0623886
1.84 0 1.84 0.0623886
END DIST

Metal 1 OVER
WIDTH Table 1 entries:  0.17

Metal 1 OVER 0
DIST count 12 width 0.17
0.17 0.00065003 4.07944e-06 0.0311943
0.34 0.000325015 5.28137e-06 0.0311943
0.425 0.000260012 5.88143e-06 0.0311943
0.51 0.000216676 6.48063e-06 0.0311943
0.595 0.000185723 7.07885e-06 0.0311943
0.68 0.000162507 7.67588e-06 0.0311943
0.765 0.000144452 8.27157e-06 0.0311943
0.85 0.000130006 8.86578e-06 0.0311943
1.02 0.000108338 1.0049e-05 0.0311943
1.36 8.12537e-05 1.23901e-05 0.0311943
1.7 6.5003e-05 1.46889e-05 0.0311943
2.04 0 7.11041e-05 0.0311943
END DIST

Metal 1 UNDER
WIDTH Table 1 entries:  0.17

Metal 1 UNDER 2
DIST count 12 width 0.17
0.17 0.00065003 1.77539e-05 0.0311943
0.34 0.000325015 1.97302e-05 0.0311943
0.425 0.000260012 2.07671e-05 0.0311943
0.51 0.000216676 2.18359e-05 0.0311943
0.595 0.000185723 2.29348e-05 0.0311943
0.68 0.000162507 2.40642e-05 0.0311943
0.765 0.000144452 2.52231e-05 0.0311943
0.85 0.000130006 2.64106e-05 0.0311943
1.02 0.000108338 2.88678e-05 0.0311943
1.36 8.12537e-05 3.40862e-05 0.0311943
1.7 6.5003e-05 3.9659e-05 0.0311943
2.04 0 9.96858e-05 0.0311943
END DIST

Metal 1 UNDER 3
DIST count 12 width 0.17
0.17 0.00065003 8.8085e-06 0.0311943
0.34 0.000325015 1.03881e-05 0.0311943
0.425 0.000260012 1.1201e-05 0.0311943
0.51 0.000216676 1.20286e-05 0.0311943
0.595 0.000185723 1.28712e-05 0.0311943
0.68 0.000162507 1.37276e-05 0.0311943
0.765 0.000144452 1.45977e-05 0.0311943
0.85 0.000130006 1.54809e-05 0.0311943
1.02 0.000108338 1.72847e-05 0.0311943
1.36 8.12537e-05 2.10279e-05 0.0311943
1.7 6.5003e-05 2.4922e-05 0.0311943
2.04 0 8.30968e-05 0.0311943
END DIST

Metal 1 UNDER 4
DIST count 12 width 0.17
0.17 0.00065003 8.0609e-06 0.0311943
0.34 0.000325015 9.58316e-06 0.0311943
0.425 0.000260012 1.03619e-05 0.0311943
0.51 0.000216676 1.11523e-05 0.0311943
0.595 0.000185723 1.19534e-05 0.0311943
0.68 0.000162507 1.27654e-05 0.0311943
0.765 0.000144452 1.35875e-05 0.0311943
0.85 0.000130006 1.44191e-05 0.0311943
1.02 0.000108338 1.61103e-05 0.0311943
1.36 8.12537e-05 1.95901e-05 0.0311943
1.7 6.5003e-05 2.31741e-05 0.0311943
2.04 0 8.09985e-05 0.0311943
END DIST

Metal 1 UNDER 5
DIST count 12 width 0.17
0.17 0.00065003 7.15668e-06 0.0311943
0.34 0.000325015 8.58785e-06 0.0311943
0.425 0.000260012 9.31595e-06 0.0311943
0.51 0.000216676 1.00518e-05 0.0311943
0.595 0.000185723 1.07954e-05 0.0311943
0.68 0.000162507 1.1546e-05 0.0311943
0.765 0.000144452 1.23036e-05 0.0311943
0.85 0.000130006 1.30679e-05 0.0311943
1.02 0.000108338 1.46145e-05 0.0311943
1.36 8.12537e-05 1.77704e-05 0.0311943
1.7 6.5003e-05 2.09889e-05 0.0311943
2.04 0 7.84121e-05 0.0311943
END DIST

Metal 1 UNDER 6
DIST count 12 width 0.17
0.17 0.00065003 7.09798e-06 0.0311943
0.34 0.000325015 8.5967e-06 0.0311943
0.425 0.000260012 9.35452e-06 0.0311943
0.51 0.000216676 1.01178e-05 0.0311943
0.595 0.000185723 1.08858e-05 0.0311943
0.68 0.000162507 1.16583e-05 0.0311943
0.765 0.000144452 1.24351e-05 0.0311943
0.85 0.000130006 1.32155e-05 0.0311943
1.02 0.000108338 1.47865e-05 0.0311943
1.36 8.12537e-05 1.79575e-05 0.0311943
1.7 6.5003e-05 2.11459e-05 0.0311943
2.04 0 7.84949e-05 0.0311943
END DIST

Metal 1 DIAGUNDER
WIDTH Table 1 entries:  0.17

Metal 1 DIAGUNDER 2
DIST count 13 width 0.17
0 0 1.67978e-05 0.0311943
0.17 0 5.43125e-06 0.0311943
0.34 0 5.41931e-06 0.0311943
0.425 0 5.41111e-06 0.0311943
0.51 0 5.40137e-06 0.0311943
0.595 0 5.39014e-06 0.0311943
0.68 0 5.37736e-06 0.0311943
0.765 0 5.3631e-06 0.0311943
0.85 0 5.34742e-06 0.0311943
1.02 0 5.31147e-06 0.0311943
1.36 0 5.22187e-06 0.0311943
1.7 0 5.10903e-06 0.0311943
2.04 0 4.97344e-06 0.0311943
END DIST

Metal 1 DIAGUNDER 3
DIST count 13 width 0.17
0 0 4.46488e-06 0.0311943
0.17 0 3.07807e-06 0.0311943
0.34 0 3.07124e-06 0.0311943
0.425 0 3.06661e-06 0.0311943
0.51 0 3.06108e-06 0.0311943
0.595 0 3.05466e-06 0.0311943
0.68 0 3.04747e-06 0.0311943
0.765 0 3.03939e-06 0.0311943
0.85 0 3.03048e-06 0.0311943
1.02 0 3.0101e-06 0.0311943
1.36 0 2.9593e-06 0.0311943
1.7 0 2.89531e-06 0.0311943
2.04 0 2.81842e-06 0.0311943
END DIST

Metal 1 DIAGUNDER 4
DIST count 13 width 0.17
0 0 3.68467e-06 0.0311943
0.17 0 3.99923e-06 0.0311943
0.34 0 3.98966e-06 0.0311943
0.425 0 3.98324e-06 0.0311943
0.51 0 3.9757e-06 0.0311943
0.595 0 3.96702e-06 0.0311943
0.68 0 3.95728e-06 0.0311943
0.765 0 3.94641e-06 0.0311943
0.85 0 3.93446e-06 0.0311943
1.02 0 3.90725e-06 0.0311943
1.36 0 3.83981e-06 0.0311943
1.7 0 3.75532e-06 0.0311943
2.04 0 3.65401e-06 0.0311943
END DIST

Metal 1 DIAGUNDER 5
DIST count 13 width 0.17
0 0 2.27427e-06 0.0311943
0.17 0 3.34242e-06 0.0311943
0.34 0 3.33452e-06 0.0311943
0.425 0 3.32917e-06 0.0311943
0.51 0 3.32294e-06 0.0311943
0.595 0 3.31575e-06 0.0311943
0.68 0 3.30761e-06 0.0311943
0.765 0 3.29857e-06 0.0311943
0.85 0 3.28859e-06 0.0311943
1.02 0 3.26595e-06 0.0311943
1.36 0 3.20974e-06 0.0311943
1.7 0 3.13922e-06 0.0311943
2.04 0 3.05472e-06 0.0311943
END DIST

Metal 1 DIAGUNDER 6
DIST count 0 width 0.17
END DIST

Metal 2 RESOVER
WIDTH Table 1 entries:  0.14

Metal 2 RESOVER 0
DIST count 55 width 0.14
0 0 0 0.000757576
0 0.2 0 0.000757576
0 0.34 0 0.000757576
0 0.47 0 0.000757576
0 0.54 0 0.000757576
0 0.68 0 0.000757576
0 0.81 0 0.000757576
0 0.88 0 0.000757576
0 1.02 0 0.000757576
0 1.36 0 0.000757576
0.2 0.2 0 0.000757576
0.2 0.34 0 0.000757576
0.2 0.47 0 0.000757576
0.2 0.54 0 0.000757576
0.2 0.68 0 0.000757576
0.2 0.81 0 0.000757576
0.2 0.88 0 0.000757576
0.2 1.02 0 0.000757576
0.2 1.36 0 0.000757576
0.34 0.34 0 0.000757576
0.34 0.47 0 0.000757576
0.34 0.54 0 0.000757576
0.34 0.68 0 0.000757576
0.34 0.81 0 0.000757576
0.34 0.88 0 0.000757576
0.34 1.02 0 0.000757576
0.34 1.36 0 0.000757576
0.47 0.47 0 0.000757576
0.47 0.54 0 0.000757576
0.47 0.68 0 0.000757576
0.47 0.81 0 0.000757576
0.47 0.88 0 0.000757576
0.47 1.02 0 0.000757576
0.47 1.36 0 0.000757576
0.54 0.54 0 0.000757576
0.54 0.68 0 0.000757576
0.54 0.81 0 0.000757576
0.54 0.88 0 0.000757576
0.54 1.02 0 0.000757576
0.54 1.36 0 0.000757576
0.68 0.68 0 0.000757576
0.68 0.81 0 0.000757576
0.68 0.88 0 0.000757576
0.68 1.02 0 0.000757576
0.68 1.36 0 0.000757576
0.81 0.81 0 0.000757576
0.81 0.88 0 0.000757576
0.81 1.02 0 0.000757576
0.81 1.36 0 0.000757576
0.88 0.88 0 0.000757576
0.88 1.02 0 0.000757576
0.88 1.36 0 0.000757576
1.02 1.02 0 0.000757576
1.02 1.36 0 0.000757576
1.36 0 1.36 0.000757576
END DIST

Metal 2 RESOVER 1
DIST count 0 width 0.14
END DIST

Metal 2 OVER
WIDTH Table 1 entries:  0.14

Metal 2 OVER 0
DIST count 12 width 0.14
0.14 0.00104618 2.73131e-06 0.000378788
0.28 0.000523088 3.68604e-06 0.000378788
0.35 0.00041847 4.16291e-06 0.000378788
0.42 0.000348726 4.63932e-06 0.000378788
0.49 0.000298908 5.11519e-06 0.000378788
0.56 0.000261544 5.59044e-06 0.000378788
0.63 0.000232483 6.06497e-06 0.000378788
0.7 0.000209235 6.53867e-06 0.000378788
0.84 0.000174362 7.48333e-06 0.000378788
1.12 0.000130772 9.35895e-06 0.000378788
1.4 0.000104618 1.12117e-05 0.000378788
1.68 0 0.000100217 0.000378788
END DIST

Metal 2 OVER 1
DIST count 12 width 0.14
0.14 0.00104618 1.22628e-05 0.000378788
0.28 0.000523088 1.39649e-05 0.000378788
0.35 0.00041847 1.48657e-05 0.000378788
0.42 0.000348726 1.57989e-05 0.000378788
0.49 0.000298908 1.67641e-05 0.000378788
0.56 0.000261544 1.77613e-05 0.000378788
0.63 0.000232483 1.87895e-05 0.000378788
0.7 0.000209235 1.98484e-05 0.000378788
0.84 0.000174362 2.20562e-05 0.000378788
1.12 0.000130772 2.68149e-05 0.000378788
1.4 0.000104618 3.19967e-05 0.000378788
1.68 0 0.000124737 0.000378788
END DIST

Metal 2 UNDER
WIDTH Table 1 entries:  0.14

Metal 2 UNDER 3
DIST count 12 width 0.14
0.14 0.00104618 8.86811e-06 0.000378788
0.28 0.000523088 1.01528e-05 0.000378788
0.35 0.00041847 1.08175e-05 0.000378788
0.42 0.000348726 1.14968e-05 0.000378788
0.49 0.000298908 1.21902e-05 0.000378788
0.56 0.000261544 1.28973e-05 0.000378788
0.63 0.000232483 1.36183e-05 0.000378788
0.7 0.000209235 1.43532e-05 0.000378788
0.84 0.000174362 1.58608e-05 0.000378788
1.12 0.000130772 1.90247e-05 0.000378788
1.4 0.000104618 2.23676e-05 0.000378788
1.68 0 0.000113047 0.000378788
END DIST

Metal 2 UNDER 4
DIST count 12 width 0.14
0.14 0.00104618 6.77633e-06 0.000378788
0.28 0.000523088 8.0719e-06 0.000378788
0.35 0.00041847 8.74033e-06 0.000378788
0.42 0.000348726 9.42208e-06 0.000378788
0.49 0.000298908 1.01165e-05 0.000378788
0.56 0.000261544 1.08241e-05 0.000378788
0.63 0.000232483 1.15442e-05 0.000378788
0.7 0.000209235 1.22766e-05 0.000378788
0.84 0.000174362 1.3777e-05 0.000378788
1.12 0.000130772 1.69121e-05 0.000378788
1.4 0.000104618 2.02085e-05 0.000378788
1.68 0 0.000110825 0.000378788
END DIST

Metal 2 UNDER 5
DIST count 12 width 0.14
0.14 0.00104618 5.51551e-06 0.000378788
0.28 0.000523088 6.70942e-06 0.000378788
0.35 0.00041847 7.32056e-06 0.000378788
0.42 0.000348726 7.94098e-06 0.000378788
0.49 0.000298908 8.57031e-06 0.000378788
0.56 0.000261544 9.20841e-06 0.000378788
0.63 0.000232483 9.8553e-06 0.000378788
0.7 0.000209235 1.05104e-05 0.000378788
0.84 0.000174362 1.18449e-05 0.000378788
1.12 0.000130772 1.4604e-05 0.000378788
1.4 0.000104618 1.74692e-05 0.000378788
1.68 0 0.000107604 0.000378788
END DIST

Metal 2 UNDER 6
DIST count 12 width 0.14
0.14 0.00104618 5.40505e-06 0.000378788
0.28 0.000523088 6.70927e-06 0.000378788
0.35 0.00041847 7.37157e-06 0.000378788
0.42 0.000348726 8.04084e-06 0.000378788
0.49 0.000298908 8.71627e-06 0.000378788
0.56 0.000261544 9.39809e-06 0.000378788
0.63 0.000232483 1.00857e-05 0.000378788
0.7 0.000209235 1.07789e-05 0.000378788
0.84 0.000174362 1.21817e-05 0.000378788
1.12 0.000130772 1.50434e-05 0.000378788
1.4 0.000104618 1.79659e-05 0.000378788
1.68 0 0.000108112 0.000378788
END DIST

Metal 2 DIAGUNDER
WIDTH Table 1 entries:  0.14

Metal 2 DIAGUNDER 3
DIST count 13 width 0.14
0 0 1.97126e-05 0.000378788
0.14 0 2.37193e-05 0.000378788
0.28 0 2.32194e-05 0.000378788
0.35 0 2.29238e-05 0.000378788
0.42 0 2.27001e-05 0.000378788
0.49 0 2.25211e-05 0.000378788
0.56 0 2.23444e-05 0.000378788
0.63 0 2.21699e-05 0.000378788
0.7 0 2.19149e-05 0.000378788
0.84 0 1.2492e-05 0.000378788
1.12 0 3.21479e-06 0.000378788
1.4 0 3.17561e-06 0.000378788
1.68 0 2.59596e-06 0.000378788
END DIST

Metal 2 DIAGUNDER 4
DIST count 13 width 0.14
0 0 1.54683e-05 0.000378788
0.14 0 2.49619e-05 0.000378788
0.28 0 2.42556e-05 0.000378788
0.35 0 2.4081e-05 0.000378788
0.42 0 2.39113e-05 0.000378788
0.49 0 2.37427e-05 0.000378788
0.56 0 1.44553e-05 0.000378788
0.63 0 5.24776e-06 0.000378788
0.7 0 5.23882e-06 0.000378788
0.84 0 5.21739e-06 0.000378788
1.12 0 5.16378e-06 0.000378788
1.4 0 5.09668e-06 0.000378788
1.68 0 4.30808e-06 0.000378788
END DIST

Metal 2 DIAGUNDER 5
DIST count 13 width 0.14
0 0 1.30232e-05 0.000378788
0.14 0 2.37754e-05 0.000378788
0.28 0 2.31592e-05 0.000378788
0.35 0 2.29854e-05 0.000378788
0.42 0 2.28162e-05 0.000378788
0.49 0 2.26486e-05 0.000378788
0.56 0 1.33626e-05 0.000378788
0.63 0 4.15678e-06 0.000378788
0.7 0 4.14978e-06 0.000378788
0.84 0 4.13283e-06 0.000378788
1.12 0 4.09062e-06 0.000378788
1.4 0 4.03766e-06 0.000378788
1.68 0 3.41053e-06 0.000378788
END DIST

Metal 2 DIAGUNDER 6
DIST count 13 width 0.14
0 0 7.30671e-06 0.000378788
0.14 0 8.71544e-06 0.000378788
0.28 0 8.6759e-06 0.000378788
0.35 0 8.65368e-06 0.000378788
0.42 0 8.6298e-06 0.000378788
0.49 0 8.60433e-06 0.000378788
0.56 0 8.5772e-06 0.000378788
0.63 0 8.54841e-06 0.000378788
0.7 0 8.51811e-06 0.000378788
0.84 0 8.45253e-06 0.000378788
1.12 0 8.30231e-06 0.000378788
1.4 0 8.12706e-06 0.000378788
1.68 0 7.9272e-06 0.000378788
END DIST

Metal 2 OVERUNDER
WIDTH Table 1 entries:  0.14

Metal 2 OVER 1 UNDER 3
DIST count 12 width 0.14
0.14 0.00104631 1.84885e-05 0.000378788
0.28 0.000523096 2.05278e-05 0.000378788
0.35 0.00041847 2.16169e-05 0.000378788
0.42 0.000348726 2.2753e-05 0.000378788
0.49 0.000298931 2.39342e-05 0.000378788
0.56 0.000261613 2.51597e-05 0.000378788
0.63 0.000232583 2.64322e-05 0.000378788
0.7 0.000209289 2.77556e-05 0.000378788
0.84 0.000174424 3.05258e-05 0.000378788
1.12 0.00013081 3.65745e-05 0.000378788
1.4 0.000104618 4.32494e-05 0.000378788
1.68 0 0.000137664 0.000378788
END DIST

Metal 2 OVER 1 UNDER 4
DIST count 12 width 0.14
0.14 0.00104639 1.64801e-05 0.000378788
0.28 0.000523203 1.85298e-05 0.000378788
0.35 0.000418578 1.96227e-05 0.000378788
0.42 0.000348834 2.07613e-05 0.000378788
0.49 0.000299038 2.19434e-05 0.000378788
0.56 0.000261721 2.31698e-05 0.000378788
0.63 0.000232691 2.44414e-05 0.000378788
0.7 0.000209397 2.57623e-05 0.000378788
0.84 0.000174531 2.85253e-05 0.000378788
1.12 0.000130918 3.4545e-05 0.000378788
1.4 0.000104725 4.11733e-05 0.000378788
1.68 0 0.000135632 0.000378788
END DIST

Metal 2 OVER 1 UNDER 5
DIST count 12 width 0.14
0.14 0.00104639 1.52341e-05 0.000378788
0.28 0.000523196 1.7183e-05 0.000378788
0.35 0.000418578 1.81666e-05 0.000378788
0.42 0.000348834 1.92023e-05 0.000378788
0.49 0.000299015 2.0321e-05 0.000378788
0.56 0.000261652 2.14809e-05 0.000378788
0.63 0.000232591 2.26815e-05 0.000378788
0.7 0.000209343 2.39218e-05 0.000378788
0.84 0.00017447 2.65194e-05 0.000378788
1.12 0.00013088 3.21616e-05 0.000378788
1.4 0.000104725 3.83559e-05 0.000378788
1.68 0 0.000132333 0.000378788
END DIST

Metal 2 OVER 1 UNDER 6
DIST count 12 width 0.14
0.14 0.00104628 1.50307e-05 0.000378788
0.28 0.000523088 1.70767e-05 0.000378788
0.35 0.00041847 1.80743e-05 0.000378788
0.42 0.000348726 1.92004e-05 0.000378788
0.49 0.000298908 2.03652e-05 0.000378788
0.56 0.000261544 2.15689e-05 0.000378788
0.63 0.000232483 2.28102e-05 0.000378788
0.7 0.000209235 2.40886e-05 0.000378788
0.84 0.000174362 2.67545e-05 0.000378788
1.12 0.000130772 3.24993e-05 0.000378788
1.4 0.000104618 3.8751e-05 0.000378788
1.68 0 0.000132632 0.000378788
END DIST

Metal 3 RESOVER
WIDTH Table 1 entries:  0.14

Metal 3 RESOVER 0
DIST count 55 width 0.14
0 0 0 0.000757576
0 0.32 0 0.000757576
0 0.46 0 0.000757576
0 0.71 0 0.000757576
0 0.78 0 0.000757576
0 0.92 0 0.000757576
0 1.17 0 0.000757576
0 1.24 0 0.000757576
0 1.38 0 0.000757576
0 1.84 0 0.000757576
0.32 0.32 0 0.000757576
0.32 0.46 0 0.000757576
0.32 0.71 0 0.000757576
0.32 0.78 0 0.000757576
0.32 0.92 0 0.000757576
0.32 1.17 0 0.000757576
0.32 1.24 0 0.000757576
0.32 1.38 0 0.000757576
0.32 1.84 0 0.000757576
0.46 0.46 0 0.000757576
0.46 0.71 0 0.000757576
0.46 0.78 0 0.000757576
0.46 0.92 0 0.000757576
0.46 1.17 0 0.000757576
0.46 1.24 0 0.000757576
0.46 1.38 0 0.000757576
0.46 1.84 0 0.000757576
0.71 0.71 0 0.000757576
0.71 0.78 0 0.000757576
0.71 0.92 0 0.000757576
0.71 1.17 0 0.000757576
0.71 1.24 0 0.000757576
0.71 1.38 0 0.000757576
0.71 1.84 0 0.000757576
0.78 0.78 0 0.000757576
0.78 0.92 0 0.000757576
0.78 1.17 0 0.000757576
0.78 1.24 0 0.000757576
0.78 1.38 0 0.000757576
0.78 1.84 0 0.000757576
0.92 0.92 0 0.000757576
0.92 1.17 0 0.000757576
0.92 1.24 0 0.000757576
0.92 1.38 0 0.000757576
0.92 1.84 0 0.000757576
1.17 1.17 0 0.000757576
1.17 1.24 0 0.000757576
1.17 1.38 0 0.000757576
1.17 1.84 0 0.000757576
1.24 1.24 0 0.000757576
1.24 1.38 0 0.000757576
1.24 1.84 0 0.000757576
1.38 1.38 0 0.000757576
1.38 1.84 0 0.000757576
1.84 0 1.84 0.000757576
END DIST

Metal 3 RESOVER 1
DIST count 0 width 0.14
END DIST

Metal 3 RESOVER 2
DIST count 0 width 0.14
END DIST

Metal 3 OVER
WIDTH Table 1 entries:  0.14

Metal 3 OVER 0
DIST count 12 width 0.14
0.14 0.00110678 1.94177e-06 0.000378788
0.28 0.000553391 2.71587e-06 0.000378788
0.35 0.000442713 3.10253e-06 0.000378788
0.42 0.000368928 3.48882e-06 0.000378788
0.49 0.000316224 3.87464e-06 0.000378788
0.56 0.000276696 4.25999e-06 0.000378788
0.63 0.000245951 4.64473e-06 0.000378788
0.7 0.000221356 5.02882e-06 0.000378788
0.84 0.000184463 5.79473e-06 0.000378788
1.12 0.000138348 7.31551e-06 0.000378788
1.4 0.000110678 8.81771e-06 0.000378788
1.68 0 0.000102529 0.000378788
END DIST

Metal 3 OVER 1
DIST count 12 width 0.14
0.14 0.00110678 4.71962e-06 0.000378788
0.28 0.000553391 5.99715e-06 0.000378788
0.35 0.000442713 6.66313e-06 0.000378788
0.42 0.000368928 7.34693e-06 0.000378788
0.49 0.000316224 8.04848e-06 0.000378788
0.56 0.000276696 8.76721e-06 0.000378788
0.63 0.000245951 9.50285e-06 0.000378788
0.7 0.000221356 1.02551e-05 0.000378788
0.84 0.000184463 1.18078e-05 0.000378788
1.12 0.000138348 1.5096e-05 0.000378788
1.4 0.000110678 1.86062e-05 0.000378788
1.68 0 0.000114541 0.000378788
END DIST

Metal 3 OVER 2
DIST count 12 width 0.14
0.14 0.00110678 7.37612e-06 0.000378788
0.28 0.000553391 8.56656e-06 0.000378788
0.35 0.000442713 9.18474e-06 0.000378788
0.42 0.000368928 9.81818e-06 0.000378788
0.49 0.000316224 1.04659e-05 0.000378788
0.56 0.000276696 1.11286e-05 0.000378788
0.63 0.000245951 1.18052e-05 0.000378788
0.7 0.000221356 1.24957e-05 0.000378788
0.84 0.000184463 1.39174e-05 0.000378788
1.12 0.000138348 1.69132e-05 0.000378788
1.4 0.000110678 2.00936e-05 0.000378788
1.68 0 0.000115666 0.000378788
END DIST

Metal 3 UNDER
WIDTH Table 1 entries:  0.14

Metal 3 UNDER 4
DIST count 12 width 0.14
0.14 0.00110678 1.17973e-05 0.000378788
0.28 0.000553391 1.34263e-05 0.000378788
0.35 0.000442713 1.42841e-05 0.000378788
0.42 0.000368928 1.51705e-05 0.000378788
0.49 0.000316224 1.60842e-05 0.000378788
0.56 0.000276696 1.70256e-05 0.000378788
0.63 0.000245951 1.7994e-05 0.000378788
0.7 0.000221356 1.89888e-05 0.000378788
0.84 0.000184463 2.10548e-05 0.000378788
1.12 0.000138348 2.54788e-05 0.000378788
1.4 0.000110678 3.02578e-05 0.000378788
1.68 0 0.00012758 0.000378788
END DIST

Metal 3 UNDER 5
DIST count 12 width 0.14
0.14 0.00110678 5.79827e-06 0.000378788
0.28 0.000553391 7.00938e-06 0.000378788
0.35 0.000442713 7.63658e-06 0.000378788
0.42 0.000368928 8.27828e-06 0.000378788
0.49 0.000316224 8.93402e-06 0.000378788
0.56 0.000276696 9.6035e-06 0.000378788
0.63 0.000245951 1.02864e-05 0.000378788
0.7 0.000221356 1.09826e-05 0.000378788
0.84 0.000184463 1.24128e-05 0.000378788
1.12 0.000138348 1.54173e-05 0.000378788
1.4 0.000110678 1.85937e-05 0.000378788
1.68 0 0.00011415 0.000378788
END DIST

Metal 3 UNDER 6
DIST count 12 width 0.14
0.14 0.00110678 5.24069e-06 0.000378788
0.28 0.000553391 6.5487e-06 0.000378788
0.35 0.000442713 7.21696e-06 0.000378788
0.42 0.000368928 7.89437e-06 0.000378788
0.49 0.000316224 8.5807e-06 0.000378788
0.56 0.000276696 9.27558e-06 0.000378788
0.63 0.000245951 9.97872e-06 0.000378788
0.7 0.000221356 1.06898e-05 0.000378788
0.84 0.000184463 1.21343e-05 0.000378788
1.12 0.000138348 1.51044e-05 0.000378788
1.4 0.000110678 1.81636e-05 0.000378788
1.68 0 0.000113521 0.000378788
END DIST

Metal 3 DIAGUNDER
WIDTH Table 1 entries:  0.14

Metal 3 DIAGUNDER 4
DIST count 13 width 0.14
0 0 1.4833e-05 0.000378788
0.14 0 8.58564e-06 0.000378788
0.28 0 8.57049e-06 0.000378788
0.35 0 8.56053e-06 0.000378788
0.42 0 8.54892e-06 0.000378788
0.49 0 8.53571e-06 0.000378788
0.56 0 8.52085e-06 0.000378788
0.63 0 8.5044e-06 0.000378788
0.7 0 8.48636e-06 0.000378788
0.84 0 8.44545e-06 0.000378788
1.12 0 8.34452e-06 0.000378788
1.4 0 8.2184e-06 0.000378788
1.68 0 8.06739e-06 0.000378788
END DIST

Metal 3 DIAGUNDER 5
DIST count 13 width 0.14
0 0 4.22626e-06 0.000378788
0.14 0 4.98369e-06 0.000378788
0.28 0 4.97511e-06 0.000378788
0.35 0 4.96934e-06 0.000378788
0.42 0 4.9627e-06 0.000378788
0.49 0 4.95505e-06 0.000378788
0.56 0 4.94654e-06 0.000378788
0.63 0 4.93709e-06 0.000378788
0.7 0 4.9267e-06 0.000378788
0.84 0 4.9031e-06 0.000378788
1.12 0 4.84481e-06 0.000378788
1.4 0 4.77186e-06 0.000378788
1.68 0 4.68449e-06 0.000378788
END DIST

Metal 3 DIAGUNDER 6
DIST count 13 width 0.14
0 0 1.01892e-05 0.000378788
0.14 0 1.17615e-05 0.000378788
0.28 0 1.17064e-05 0.000378788
0.35 0 1.16755e-05 0.000378788
0.42 0 1.16424e-05 0.000378788
0.49 0 1.16071e-05 0.000378788
0.56 0 1.15697e-05 0.000378788
0.63 0 1.153e-05 0.000378788
0.7 0 1.14882e-05 0.000378788
0.84 0 1.13981e-05 0.000378788
1.12 0 1.11919e-05 0.000378788
1.4 0 1.09519e-05 0.000378788
1.68 0 1.06789e-05 0.000378788
END DIST

Metal 3 OVERUNDER
WIDTH Table 1 entries:  0.14

Metal 3 OVER 1 UNDER 4
DIST count 12 width 0.14
0.14 0.00110678 1.45752e-05 0.000378788
0.28 0.000553391 1.67076e-05 0.000378788
0.35 0.000442713 1.78447e-05 0.000378788
0.42 0.000368928 1.90286e-05 0.000378788
0.49 0.000316224 2.02581e-05 0.000378788
0.56 0.000276696 2.15329e-05 0.000378788
0.63 0.000245951 2.28521e-05 0.000378788
0.7 0.000221356 2.4215e-05 0.000378788
0.84 0.000184463 2.70679e-05 0.000378788
1.12 0.000138348 3.32593e-05 0.000378788
1.4 0.000110678 4.00463e-05 0.000378788
1.68 0 0.000139592 0.000378788
END DIST

Metal 3 OVER 1 UNDER 5
DIST count 12 width 0.14
0.14 0.00110678 8.57612e-06 0.000378788
0.28 0.000553391 1.02907e-05 0.000378788
0.35 0.000442713 1.11972e-05 0.000378788
0.42 0.000368928 1.21364e-05 0.000378788
0.49 0.000316224 1.31079e-05 0.000378788
0.56 0.000276696 1.41107e-05 0.000378788
0.63 0.000245951 1.51445e-05 0.000378788
0.7 0.000221356 1.62088e-05 0.000378788
0.84 0.000184463 1.84258e-05 0.000378788
1.12 0.000138348 2.31978e-05 0.000378788
1.4 0.000110678 2.83821e-05 0.000378788
1.68 0 0.000126162 0.000378788
END DIST

Metal 3 OVER 1 UNDER 6
DIST count 12 width 0.14
0.14 0.00110678 8.01854e-06 0.000378788
0.28 0.000553391 9.82998e-06 0.000378788
0.35 0.000442713 1.07776e-05 0.000378788
0.42 0.000368928 1.17525e-05 0.000378788
0.49 0.000316224 1.27545e-05 0.000378788
0.56 0.000276696 1.37828e-05 0.000378788
0.63 0.000245951 1.48368e-05 0.000378788
0.7 0.000221356 1.5916e-05 0.000378788
0.84 0.000184463 1.81474e-05 0.000378788
1.12 0.000138348 2.28849e-05 0.000378788
1.4 0.000110678 2.79521e-05 0.000378788
1.68 0 0.000125533 0.000378788
END DIST

Metal 3 OVER 2 UNDER 4
DIST count 12 width 0.14
0.14 0.00110678 1.72317e-05 0.000378788
0.28 0.000553391 1.9277e-05 0.000378788
0.35 0.000442713 2.03663e-05 0.000378788
0.42 0.000368928 2.14999e-05 0.000378788
0.49 0.000316224 2.26755e-05 0.000378788
0.56 0.000276696 2.38942e-05 0.000378788
0.63 0.000245951 2.51544e-05 0.000378788
0.7 0.000221356 2.64557e-05 0.000378788
0.84 0.000184463 2.91775e-05 0.000378788
1.12 0.000138348 3.50765e-05 0.000378788
1.4 0.000110678 4.15337e-05 0.000378788
1.68 0 0.000140717 0.000378788
END DIST

Metal 3 OVER 2 UNDER 5
DIST count 12 width 0.14
0.14 0.00110678 1.12326e-05 0.000378788
0.28 0.000553391 1.28601e-05 0.000378788
0.35 0.000442713 1.37188e-05 0.000378788
0.42 0.000368928 1.46076e-05 0.000378788
0.49 0.000316224 1.55253e-05 0.000378788
0.56 0.000276696 1.64721e-05 0.000378788
0.63 0.000245951 1.74468e-05 0.000378788
0.7 0.000221356 1.84495e-05 0.000378788
0.84 0.000184463 2.05355e-05 0.000378788
1.12 0.000138348 2.5015e-05 0.000378788
1.4 0.000110678 2.98696e-05 0.000378788
1.68 0 0.000127287 0.000378788
END DIST

Metal 3 OVER 2 UNDER 6
DIST count 12 width 0.14
0.14 0.00110678 1.0675e-05 0.000378788
0.28 0.000553391 1.23994e-05 0.000378788
0.35 0.000442713 1.32992e-05 0.000378788
0.42 0.000368928 1.42237e-05 0.000378788
0.49 0.000316224 1.5172e-05 0.000378788
0.56 0.000276696 1.61442e-05 0.000378788
0.63 0.000245951 1.71391e-05 0.000378788
0.7 0.000221356 1.81567e-05 0.000378788
0.84 0.000184463 2.0257e-05 0.000378788
1.12 0.000138348 2.47021e-05 0.000378788
1.4 0.000110678 2.94395e-05 0.000378788
1.68 0 0.000126658 0.000378788
END DIST

Metal 4 RESOVER
WIDTH Table 1 entries:  0.3

Metal 4 RESOVER 0
DIST count 55 width 0.3
0 0 0 0.000127946
0 0.38 0 0.000127946
0 0.68 0 0.000127946
0 0.91 0 0.000127946
0 1.06 0 0.000127946
0 1.36 0 0.000127946
0 1.59 0 0.000127946
0 1.74 0 0.000127946
0 2.04 0 0.000127946
0 2.72 0 0.000127946
0.38 0.38 0 0.000127946
0.38 0.68 0 0.000127946
0.38 0.91 0 0.000127946
0.38 1.06 0 0.000127946
0.38 1.36 0 0.000127946
0.38 1.59 0 0.000127946
0.38 1.74 0 0.000127946
0.38 2.04 0 0.000127946
0.38 2.72 0 0.000127946
0.68 0.68 0 0.000127946
0.68 0.91 0 0.000127946
0.68 1.06 0 0.000127946
0.68 1.36 0 0.000127946
0.68 1.59 0 0.000127946
0.68 1.74 0 0.000127946
0.68 2.04 0 0.000127946
0.68 2.72 0 0.000127946
0.91 0.91 0 0.000127946
0.91 1.06 0 0.000127946
0.91 1.36 0 0.000127946
0.91 1.59 0 0.000127946
0.91 1.74 0 0.000127946
0.91 2.04 0 0.000127946
0.91 2.72 0 0.000127946
1.06 1.06 0 0.000127946
1.06 1.36 0 0.000127946
1.06 1.59 0 0.000127946
1.06 1.74 0 0.000127946
1.06 2.04 0 0.000127946
1.06 2.72 0 0.000127946
1.36 1.36 0 0.000127946
1.36 1.59 0 0.000127946
1.36 1.74 0 0.000127946
1.36 2.04 0 0.000127946
1.36 2.72 0 0.000127946
1.59 1.59 0 0.000127946
1.59 1.74 0 0.000127946
1.59 2.04 0 0.000127946
1.59 2.72 0 0.000127946
1.74 1.74 0 0.000127946
1.74 2.04 0 0.000127946
1.74 2.72 0 0.000127946
2.04 2.04 0 0.000127946
2.04 2.72 0 0.000127946
2.72 0 2.72 0.000127946
END DIST

Metal 4 RESOVER 1
DIST count 0 width 0.3
END DIST

Metal 4 RESOVER 2
DIST count 0 width 0.3
END DIST

Metal 4 RESOVER 3
DIST count 0 width 0.3
END DIST

Metal 4 OVER
WIDTH Table 1 entries:  0.3

Metal 4 OVER 0
DIST count 12 width 0.3
0.3 0.00072862 3.75902e-06 6.39731e-05
0.6 0.00036431 5.69113e-06 6.39731e-05
0.75 0.000291448 6.65256e-06 6.39731e-05
0.9 0.000242873 7.6098e-06 6.39731e-05
1.05 0.000208177 8.562e-06 6.39731e-05
1.2 0.000182155 9.50837e-06 6.39731e-05
1.35 0.000161915 1.04481e-05 6.39731e-05
1.5 0.000145724 1.13803e-05 6.39731e-05
1.8 0.000121436 1.3219e-05 6.39731e-05
2.4 9.10774e-05 1.67716e-05 6.39731e-05
3 7.2862e-05 2.01168e-05 6.39731e-05
3.6 0 8.39267e-05 6.39731e-05
END DIST

Metal 4 OVER 1
DIST count 12 width 0.3
0.3 0.00072862 8.70712e-06 6.39731e-05
0.6 0.00036431 1.25586e-05 6.39731e-05
0.75 0.000291448 1.46072e-05 6.39731e-05
0.9 0.000242873 1.67329e-05 6.39731e-05
1.05 0.000208177 1.89303e-05 6.39731e-05
1.2 0.000182155 2.11928e-05 6.39731e-05
1.35 0.000161915 2.35162e-05 6.39731e-05
1.5 0.000145724 2.5895e-05 6.39731e-05
1.8 0.000121436 3.07937e-05 6.39731e-05
2.4 9.10774e-05 4.09843e-05 6.39731e-05
3 7.2862e-05 5.13504e-05 6.39731e-05
3.6 0 0.000122173 6.39731e-05
END DIST

Metal 4 OVER 2
DIST count 12 width 0.3
0.3 0.00072862 1.10419e-05 6.39731e-05
0.6 0.00036431 1.50371e-05 6.39731e-05
0.75 0.000291448 1.71702e-05 6.39731e-05
0.9 0.000242873 1.93863e-05 6.39731e-05
1.05 0.000208177 2.16806e-05 6.39731e-05
1.2 0.000182155 2.40473e-05 6.39731e-05
1.35 0.000161915 2.64818e-05 6.39731e-05
1.5 0.000145724 2.89756e-05 6.39731e-05
1.8 0.000121436 3.41221e-05 6.39731e-05
2.4 9.10774e-05 4.48613e-05 6.39731e-05
3 7.2862e-05 5.5817e-05 6.39731e-05
3.6 0 0.00012724 6.39731e-05
END DIST

Metal 4 OVER 3
DIST count 12 width 0.3
0.3 0.00072862 2.3816e-05 6.39731e-05
0.6 0.00036431 2.94124e-05 6.39731e-05
0.75 0.000291448 3.24546e-05 6.39731e-05
0.9 0.000242873 3.56462e-05 6.39731e-05
1.05 0.000208177 3.89825e-05 6.39731e-05
1.2 0.000182155 4.24504e-05 6.39731e-05
1.35 0.000161915 4.60435e-05 6.39731e-05
1.5 0.000145724 4.97516e-05 6.39731e-05
1.8 0.000121436 5.74658e-05 6.39731e-05
2.4 9.10774e-05 7.3782e-05 6.39731e-05
3 7.2862e-05 9.06414e-05 6.39731e-05
3.6 0 0.000167973 6.39731e-05
END DIST

Metal 4 UNDER
WIDTH Table 1 entries:  0.3

Metal 4 UNDER 5
DIST count 12 width 0.3
0.3 0.00072862 2.59501e-05 6.39731e-05
0.6 0.00036431 3.05142e-05 6.39731e-05
0.75 0.000291448 3.29573e-05 6.39731e-05
0.9 0.000242873 3.55002e-05 6.39731e-05
1.05 0.000208177 3.8136e-05 6.39731e-05
1.2 0.000182155 4.08585e-05 6.39731e-05
1.35 0.000161915 4.36603e-05 6.39731e-05
1.5 0.000145724 4.6535e-05 6.39731e-05
1.8 0.000121436 5.24699e-05 6.39731e-05
2.4 9.10774e-05 6.48605e-05 6.39731e-05
3 7.2862e-05 7.7492e-05 6.39731e-05
3.6 0 0.000150524 6.39731e-05
END DIST

Metal 4 UNDER 6
DIST count 12 width 0.3
0.3 0.00072862 1.4534e-05 6.39731e-05
0.6 0.00036431 1.88872e-05 6.39731e-05
0.75 0.000291448 2.11481e-05 6.39731e-05
0.9 0.000242873 2.34581e-05 6.39731e-05
1.05 0.000208177 2.58118e-05 6.39731e-05
1.2 0.000182155 2.82032e-05 6.39731e-05
1.35 0.000161915 3.06268e-05 6.39731e-05
1.5 0.000145724 3.30765e-05 6.39731e-05
1.8 0.000121436 3.80301e-05 6.39731e-05
2.4 9.10774e-05 4.79783e-05 6.39731e-05
3 7.2862e-05 5.7645e-05 6.39731e-05
3.6 0 0.000127353 6.39731e-05
END DIST

Metal 4 DIAGUNDER
WIDTH Table 1 entries:  0.3

Metal 4 DIAGUNDER 5
DIST count 13 width 0.3
0 0 2.54636e-05 6.39731e-05
0.3 0 1.23562e-05 6.39731e-05
0.6 0 1.22703e-05 6.39731e-05
0.75 0 1.22114e-05 6.39731e-05
0.9 0 1.21419e-05 6.39731e-05
1.05 0 1.20618e-05 6.39731e-05
1.2 0 1.19713e-05 6.39731e-05
1.35 0 1.18704e-05 6.39731e-05
1.5 0 1.17592e-05 6.39731e-05
1.8 0 1.15064e-05 6.39731e-05
2.4 0 1.08819e-05 6.39731e-05
3 0 1.01066e-05 6.39731e-05
3.6 0 9.19114e-06 6.39731e-05
END DIST

Metal 4 DIAGUNDER 6
DIST count 13 width 0.3
0 0 1.94402e-05 6.39731e-05
0.3 0 2.24273e-05 6.39731e-05
0.6 0 2.21457e-05 6.39731e-05
0.75 0 2.1976e-05 6.39731e-05
0.9 0 2.17873e-05 6.39731e-05
1.05 0 2.15796e-05 6.39731e-05
1.2 0 2.13533e-05 6.39731e-05
1.35 0 2.11084e-05 6.39731e-05
1.5 0 2.08452e-05 6.39731e-05
1.8 0 2.02648e-05 6.39731e-05
2.4 0 1.88954e-05 6.39731e-05
3 0 1.7264e-05 6.39731e-05
3.6 0 1.53933e-05 6.39731e-05
END DIST

Metal 4 OVERUNDER
WIDTH Table 1 entries:  0.3

Metal 4 OVER 1 UNDER 5
DIST count 12 width 0.3
0.3 0.00072862 3.08982e-05 6.39731e-05
0.6 0.00036431 3.73817e-05 6.39731e-05
0.75 0.000291448 4.09119e-05 6.39731e-05
0.9 0.000242873 4.46232e-05 6.39731e-05
1.05 0.000208177 4.85043e-05 6.39731e-05
1.2 0.000182155 5.25429e-05 6.39731e-05
1.35 0.000161915 5.67285e-05 6.39731e-05
1.5 0.000145724 6.10497e-05 6.39731e-05
1.8 0.000121436 7.00445e-05 6.39731e-05
2.4 9.10774e-05 8.90732e-05 6.39731e-05
3 7.2862e-05 0.000108726 6.39731e-05
3.6 0 0.00018877 6.39731e-05
END DIST

Metal 4 OVER 1 UNDER 6
DIST count 12 width 0.3
0.3 0.00072862 1.94821e-05 6.39731e-05
0.6 0.00036431 2.57547e-05 6.39731e-05
0.75 0.000291448 2.91027e-05 6.39731e-05
0.9 0.000242873 3.25812e-05 6.39731e-05
1.05 0.000208177 3.61801e-05 6.39731e-05
1.2 0.000182155 3.98876e-05 6.39731e-05
1.35 0.000161915 4.3695e-05 6.39731e-05
1.5 0.000145724 4.75913e-05 6.39731e-05
1.8 0.000121436 5.56048e-05 6.39731e-05
2.4 9.10774e-05 7.21911e-05 6.39731e-05
3 7.2862e-05 8.88786e-05 6.39731e-05
3.6 0 0.000165599 6.39731e-05
END DIST

Metal 4 OVER 2 UNDER 5
DIST count 12 width 0.3
0.3 0.00072862 3.3233e-05 6.39731e-05
0.6 0.00036431 3.98601e-05 6.39731e-05
0.75 0.000291448 4.3475e-05 6.39731e-05
0.9 0.000242873 4.72766e-05 6.39731e-05
1.05 0.000208177 5.12546e-05 6.39731e-05
1.2 0.000182155 5.53974e-05 6.39731e-05
1.35 0.000161915 5.9694e-05 6.39731e-05
1.5 0.000145724 6.41304e-05 6.39731e-05
1.8 0.000121436 7.3373e-05 6.39731e-05
2.4 9.10774e-05 9.29503e-05 6.39731e-05
3 7.2862e-05 0.000113192 6.39731e-05
3.6 0 0.000193837 6.39731e-05
END DIST

Metal 4 OVER 2 UNDER 6
DIST count 12 width 0.3
0.3 0.00072862 2.18168e-05 6.39731e-05
0.6 0.00036431 2.82331e-05 6.39731e-05
0.75 0.000291448 3.16658e-05 6.39731e-05
0.9 0.000242873 3.52346e-05 6.39731e-05
1.05 0.000208177 3.89304e-05 6.39731e-05
1.2 0.000182155 4.27421e-05 6.39731e-05
1.35 0.000161915 4.66605e-05 6.39731e-05
1.5 0.000145724 5.06719e-05 6.39731e-05
1.8 0.000121436 5.89332e-05 6.39731e-05
2.4 9.10774e-05 7.60681e-05 6.39731e-05
3 7.2862e-05 9.33453e-05 6.39731e-05
3.6 0 0.000170667 6.39731e-05
END DIST

Metal 4 OVER 3 UNDER 5
DIST count 12 width 0.3
0.3 0.00072862 4.60071e-05 6.39731e-05
0.6 0.00036431 5.42355e-05 6.39731e-05
0.75 0.000291448 5.87593e-05 6.39731e-05
0.9 0.000242873 6.35365e-05 6.39731e-05
1.05 0.000208177 6.85565e-05 6.39731e-05
1.2 0.000182155 7.38005e-05 6.39731e-05
1.35 0.000161915 7.92558e-05 6.39731e-05
1.5 0.000145724 8.49063e-05 6.39731e-05
1.8 0.000121436 9.67167e-05 6.39731e-05
2.4 9.10774e-05 0.000121871 6.39731e-05
3 7.2862e-05 0.000148017 6.39731e-05
3.6 0 0.00023457 6.39731e-05
END DIST

Metal 4 OVER 3 UNDER 6
DIST count 12 width 0.3
0.3 0.00072862 3.4591e-05 6.39731e-05
0.6 0.00036431 4.26085e-05 6.39731e-05
0.75 0.000291448 4.69501e-05 6.39731e-05
0.9 0.000242873 5.14945e-05 6.39731e-05
1.05 0.000208177 5.62323e-05 6.39731e-05
1.2 0.000182155 6.11452e-05 6.39731e-05
1.35 0.000161915 6.62223e-05 6.39731e-05
1.5 0.000145724 7.14479e-05 6.39731e-05
1.8 0.000121436 8.22769e-05 6.39731e-05
2.4 9.10774e-05 0.000104989 6.39731e-05
3 7.2862e-05 0.00012817 6.39731e-05
3.6 0 0.0002114 6.39731e-05
END DIST

Metal 5 RESOVER
WIDTH Table 1 entries:  0.3

Metal 5 RESOVER 0
DIST count 55 width 0.3
0 0 0 0.000127946
0 0.62 0 0.000127946
0 0.92 0 0.000127946
0 1.39 0 0.000127946
0 1.54 0 0.000127946
0 1.84 0 0.000127946
0 2.31 0 0.000127946
0 2.46 0 0.000127946
0 2.76 0 0.000127946
0 3.68 0 0.000127946
0.62 0.62 0 0.000127946
0.62 0.92 0 0.000127946
0.62 1.39 0 0.000127946
0.62 1.54 0 0.000127946
0.62 1.84 0 0.000127946
0.62 2.31 0 0.000127946
0.62 2.46 0 0.000127946
0.62 2.76 0 0.000127946
0.62 3.68 0 0.000127946
0.92 0.92 0 0.000127946
0.92 1.39 0 0.000127946
0.92 1.54 0 0.000127946
0.92 1.84 0 0.000127946
0.92 2.31 0 0.000127946
0.92 2.46 0 0.000127946
0.92 2.76 0 0.000127946
0.92 3.68 0 0.000127946
1.39 1.39 0 0.000127946
1.39 1.54 0 0.000127946
1.39 1.84 0 0.000127946
1.39 2.31 0 0.000127946
1.39 2.46 0 0.000127946
1.39 2.76 0 0.000127946
1.39 3.68 0 0.000127946
1.54 1.54 0 0.000127946
1.54 1.84 0 0.000127946
1.54 2.31 0 0.000127946
1.54 2.46 0 0.000127946
1.54 2.76 0 0.000127946
1.54 3.68 0 0.000127946
1.84 1.84 0 0.000127946
1.84 2.31 0 0.000127946
1.84 2.46 0 0.000127946
1.84 2.76 0 0.000127946
1.84 3.68 0 0.000127946
2.31 2.31 0 0.000127946
2.31 2.46 0 0.000127946
2.31 2.76 0 0.000127946
2.31 3.68 0 0.000127946
2.46 2.46 0 0.000127946
2.46 2.76 0 0.000127946
2.46 3.68 0 0.000127946
2.76 2.76 0 0.000127946
2.76 3.68 0 0.000127946
3.68 0 3.68 0.000127946
END DIST

Metal 5 RESOVER 1
DIST count 0 width 0.3
END DIST

Metal 5 RESOVER 2
DIST count 0 width 0.3
END DIST

Metal 5 RESOVER 3
DIST count 0 width 0.3
END DIST

Metal 5 RESOVER 4
DIST count 0 width 0.3
END DIST

Metal 5 OVER
WIDTH Table 1 entries:  0.3

Metal 5 OVER 0
DIST count 12 width 0.3
0.3 0.000758923 3.14823e-06 6.39731e-05
0.6 0.000379461 4.9369e-06 6.39731e-05
0.75 0.000303569 5.82697e-06 6.39731e-05
0.9 0.000252974 6.71315e-06 6.39731e-05
1.05 0.000216835 7.59466e-06 6.39731e-05
1.2 0.000189731 8.47079e-06 6.39731e-05
1.35 0.000168649 9.34072e-06 6.39731e-05
1.5 0.000151785 1.02037e-05 6.39731e-05
1.8 0.000126487 1.1906e-05 6.39731e-05
2.4 9.48653e-05 1.51948e-05 6.39731e-05
3 7.58923e-05 1.82918e-05 6.39731e-05
3.6 0 8.43973e-05 6.39731e-05
END DIST

Metal 5 OVER 1
DIST count 12 width 0.3
0.3 0.000758923 7.01779e-06 6.39731e-05
0.6 0.000379461 1.08201e-05 6.39731e-05
0.75 0.000303569 1.2821e-05 6.39731e-05
0.9 0.000252974 1.48825e-05 6.39731e-05
1.05 0.000216835 1.6998e-05 6.39731e-05
1.2 0.000189731 1.91651e-05 6.39731e-05
1.35 0.000168649 2.13772e-05 6.39731e-05
1.5 0.000151785 2.36302e-05 6.39731e-05
1.8 0.000126487 2.8231e-05 6.39731e-05
2.4 9.48653e-05 3.76569e-05 6.39731e-05
3 7.58923e-05 4.70595e-05 6.39731e-05
3.6 0 0.000119292 6.39731e-05
END DIST

Metal 5 OVER 2
DIST count 12 width 0.3
0.3 0.000758923 8.08207e-06 6.39731e-05
0.6 0.000379461 1.19976e-05 6.39731e-05
0.75 0.000303569 1.40624e-05 6.39731e-05
0.9 0.000252974 1.61917e-05 6.39731e-05
1.05 0.000216835 1.83798e-05 6.39731e-05
1.2 0.000189731 2.06241e-05 6.39731e-05
1.35 0.000168649 2.29167e-05 6.39731e-05
1.5 0.000151785 2.52534e-05 6.39731e-05
1.8 0.000126487 3.00319e-05 6.39731e-05
2.4 9.48653e-05 3.98395e-05 6.39731e-05
3 7.58923e-05 4.96453e-05 6.39731e-05
3.6 0 0.000122277 6.39731e-05
END DIST

Metal 5 OVER 3
DIST count 12 width 0.3
0.3 0.000758923 1.05454e-05 6.39731e-05
0.6 0.000379461 1.5094e-05 6.39731e-05
0.75 0.000303569 1.75087e-05 6.39731e-05
0.9 0.000252974 2.00074e-05 6.39731e-05
1.05 0.000216835 2.25871e-05 6.39731e-05
1.2 0.000189731 2.52374e-05 6.39731e-05
1.35 0.000168649 2.79533e-05 6.39731e-05
1.5 0.000151785 3.07296e-05 6.39731e-05
1.8 0.000126487 3.64234e-05 6.39731e-05
2.4 9.48653e-05 4.81757e-05 6.39731e-05
3 7.58923e-05 5.99795e-05 6.39731e-05
3.6 0 0.000134555 6.39731e-05
END DIST

Metal 5 OVER 4
DIST count 12 width 0.3
0.3 0.000758923 2.38367e-05 6.39731e-05
0.6 0.000379461 3.01041e-05 6.39731e-05
0.75 0.000303569 3.34525e-05 6.39731e-05
0.9 0.000252974 3.69321e-05 6.39731e-05
1.05 0.000216835 4.05325e-05 6.39731e-05
1.2 0.000189731 4.42445e-05 6.39731e-05
1.35 0.000168649 4.80564e-05 6.39731e-05
1.5 0.000151785 5.1958e-05 6.39731e-05
1.8 0.000126487 5.99842e-05 6.39731e-05
2.4 9.48653e-05 7.65965e-05 6.39731e-05
3 7.58923e-05 9.32996e-05 6.39731e-05
3.6 0 0.000172541 6.39731e-05
END DIST

Metal 5 UNDER
WIDTH Table 1 entries:  0.3

Metal 5 UNDER 6
DIST count 12 width 0.3
0.3 0.000758923 2.5883e-05 6.39731e-05
0.6 0.000379461 3.19524e-05 6.39731e-05
0.75 0.000303569 3.51043e-05 6.39731e-05
0.9 0.000252974 3.8323e-05 6.39731e-05
1.05 0.000216835 4.15997e-05 6.39731e-05
1.2 0.000189731 4.49251e-05 6.39731e-05
1.35 0.000168649 4.82901e-05 6.39731e-05
1.5 0.000151785 5.16853e-05 6.39731e-05
1.8 0.000126487 5.85279e-05 6.39731e-05
2.4 9.48653e-05 7.21513e-05 6.39731e-05
3 7.58923e-05 8.51784e-05 6.39731e-05
3.6 0 0.000160261 6.39731e-05
END DIST

Metal 5 DIAGUNDER
WIDTH Table 1 entries:  0.3

Metal 5 DIAGUNDER 6
DIST count 13 width 0.3
0 0 4.28539e-05 6.39731e-05
0.3 0 3.58778e-05 6.39731e-05
0.6 0 3.54219e-05 6.39731e-05
0.75 0 3.51478e-05 6.39731e-05
0.9 0 3.48434e-05 6.39731e-05
1.05 0 3.45084e-05 6.39731e-05
1.2 0 3.41438e-05 6.39731e-05
1.35 0 3.37495e-05 6.39731e-05
1.5 0 3.33259e-05 6.39731e-05
1.8 0 3.23923e-05 6.39731e-05
2.4 0 3.01918e-05 6.39731e-05
3 0 2.75726e-05 6.39731e-05
3.6 0 2.45712e-05 6.39731e-05
END DIST

Metal 5 OVERUNDER
WIDTH Table 1 entries:  0.3

Metal 5 OVER 1 UNDER 6
DIST count 12 width 0.3
0.3 0.000758923 2.97526e-05 6.39731e-05
0.6 0.000379461 3.78356e-05 6.39731e-05
0.75 0.000303569 4.20984e-05 6.39731e-05
0.9 0.000252974 4.64924e-05 6.39731e-05
1.05 0.000216835 5.1003e-05 6.39731e-05
1.2 0.000189731 5.56195e-05 6.39731e-05
1.35 0.000168649 6.03265e-05 6.39731e-05
1.5 0.000151785 6.51117e-05 6.39731e-05
1.8 0.000126487 7.48529e-05 6.39731e-05
2.4 9.48653e-05 9.46134e-05 6.39731e-05
3 7.58923e-05 0.000113946 6.39731e-05
3.6 0 0.000195156 6.39731e-05
END DIST

Metal 5 OVER 2 UNDER 6
DIST count 12 width 0.3
0.3 0.000758923 3.08169e-05 6.39731e-05
0.6 0.000379461 3.90131e-05 6.39731e-05
0.75 0.000303569 4.33398e-05 6.39731e-05
0.9 0.000252974 4.78015e-05 6.39731e-05
1.05 0.000216835 5.23848e-05 6.39731e-05
1.2 0.000189731 5.70784e-05 6.39731e-05
1.35 0.000168649 6.1866e-05 6.39731e-05
1.5 0.000151785 6.6735e-05 6.39731e-05
1.8 0.000126487 7.66538e-05 6.39731e-05
2.4 9.48653e-05 9.6796e-05 6.39731e-05
3 7.58923e-05 0.000116532 6.39731e-05
3.6 0 0.000198141 6.39731e-05
END DIST

Metal 5 OVER 3 UNDER 6
DIST count 12 width 0.3
0.3 0.000758923 3.32802e-05 6.39731e-05
0.6 0.000379461 4.21094e-05 6.39731e-05
0.75 0.000303569 4.6786e-05 6.39731e-05
0.9 0.000252974 5.16173e-05 6.39731e-05
1.05 0.000216835 5.65922e-05 6.39731e-05
1.2 0.000189731 6.16917e-05 6.39731e-05
1.35 0.000168649 6.69027e-05 6.39731e-05
1.5 0.000151785 7.22112e-05 6.39731e-05
1.8 0.000126487 8.30453e-05 6.39731e-05
2.4 9.48653e-05 0.000105132 6.39731e-05
3 7.58923e-05 0.000126866 6.39731e-05
3.6 0 0.000210419 6.39731e-05
END DIST

Metal 5 OVER 4 UNDER 6
DIST count 12 width 0.3
0.3 0.000758923 4.65715e-05 6.39731e-05
0.6 0.000379461 5.71196e-05 6.39731e-05
0.75 0.000303569 6.27299e-05 6.39731e-05
0.9 0.000252974 6.85419e-05 6.39731e-05
1.05 0.000216835 7.45375e-05 6.39731e-05
1.2 0.000189731 8.06988e-05 6.39731e-05
1.35 0.000168649 8.70057e-05 6.39731e-05
1.5 0.000151785 9.34395e-05 6.39731e-05
1.8 0.000126487 0.000106606 6.39731e-05
2.4 9.48653e-05 0.000133553 6.39731e-05
3 7.58923e-05 0.000160186 6.39731e-05
3.6 0 0.000248405 6.39731e-05
END DIST

Metal 6 RESOVER
WIDTH Table 1 entries:  1.6

Metal 6 RESOVER 0
DIST count 55 width 1.6
0 0 0 1.32576e-05
0 1.8 0 1.32576e-05
0 3.4 0 1.32576e-05
0 4.4 0 1.32576e-05
0 5.2 0 1.32576e-05
0 6.8 0 1.32576e-05
0 7.8 0 1.32576e-05
0 8.6 0 1.32576e-05
0 10.2 0 1.32576e-05
0 13.6 0 1.32576e-05
1.8 1.8 0 1.32576e-05
1.8 3.4 0 1.32576e-05
1.8 4.4 0 1.32576e-05
1.8 5.2 0 1.32576e-05
1.8 6.8 0 1.32576e-05
1.8 7.8 0 1.32576e-05
1.8 8.6 0 1.32576e-05
1.8 10.2 0 1.32576e-05
1.8 13.6 0 1.32576e-05
3.4 3.4 0 1.32576e-05
3.4 4.4 0 1.32576e-05
3.4 5.2 0 1.32576e-05
3.4 6.8 0 1.32576e-05
3.4 7.8 0 1.32576e-05
3.4 8.6 0 1.32576e-05
3.4 10.2 0 1.32576e-05
3.4 13.6 0 1.32576e-05
4.4 4.4 0 1.32576e-05
4.4 5.2 0 1.32576e-05
4.4 6.8 0 1.32576e-05
4.4 7.8 0 1.32576e-05
4.4 8.6 0 1.32576e-05
4.4 10.2 0 1.32576e-05
4.4 13.6 0 1.32576e-05
5.2 5.2 0 1.32576e-05
5.2 6.8 0 1.32576e-05
5.2 7.8 0 1.32576e-05
5.2 8.6 0 1.32576e-05
5.2 10.2 0 1.32576e-05
5.2 13.6 0 1.32576e-05
6.8 6.8 0 1.32576e-05
6.8 7.8 0 1.32576e-05
6.8 8.6 0 1.32576e-05
6.8 10.2 0 1.32576e-05
6.8 13.6 0 1.32576e-05
7.8 7.8 0 1.32576e-05
7.8 8.6 0 1.32576e-05
7.8 10.2 0 1.32576e-05
7.8 13.6 0 1.32576e-05
8.6 8.6 0 1.32576e-05
8.6 10.2 0 1.32576e-05
8.6 13.6 0 1.32576e-05
10.2 10.2 0 1.32576e-05
10.2 13.6 0 1.32576e-05
13.6 0 13.6 1.32576e-05
END DIST

Metal 6 RESOVER 1
DIST count 0 width 1.6
END DIST

Metal 6 RESOVER 2
DIST count 0 width 1.6
END DIST

Metal 6 RESOVER 3
DIST count 0 width 1.6
END DIST

Metal 6 RESOVER 4
DIST count 0 width 1.6
END DIST

Metal 6 RESOVER 5
DIST count 0 width 1.6
END DIST

Metal 6 OVER
WIDTH Table 1 entries:  1.6

Metal 6 OVER 0
DIST count 12 width 1.6
1.6 0.00022298 1.4902e-05 6.62879e-06
3.2 0.00011149 2.41529e-05 6.62879e-06
4 8.91919e-05 2.81124e-05 6.62879e-06
4.8 7.43266e-05 3.1494e-05 6.62879e-06
5.6 6.37085e-05 3.42143e-05 6.62879e-06
6.4 5.57449e-05 3.62064e-05 6.62879e-06
7.2 4.9551e-05 3.74211e-05 6.62879e-06
8 0 3.78289e-05 6.62879e-06
9.6 0 3.78289e-05 6.62879e-06
12.8 0 3.78289e-05 6.62879e-06
16 0 3.78289e-05 6.62879e-06
19.2 0 3.78289e-05 6.62879e-06
END DIST

Metal 6 OVER 1
DIST count 12 width 1.6
1.6 0.00022298 4.12866e-05 6.62879e-06
3.2 0.00011149 6.65974e-05 6.62879e-06
4 8.91919e-05 7.74278e-05 6.62879e-06
4.8 7.43266e-05 8.66814e-05 6.62879e-06
5.6 6.37085e-05 9.41242e-05 6.62879e-06
6.4 5.57449e-05 9.95737e-05 6.62879e-06
7.2 4.9551e-05 0.000102898 6.62879e-06
8 0 0.000104012 6.62879e-06
9.6 0 0.000104012 6.62879e-06
12.8 0 0.000104012 6.62879e-06
16 0 0.000104012 6.62879e-06
19.2 0 0.000104012 6.62879e-06
END DIST

Metal 6 OVER 2
DIST count 12 width 1.6
1.6 0.00022298 4.56244e-05 6.62879e-06
3.2 0.00011149 7.17482e-05 6.62879e-06
4 8.91919e-05 8.29307e-05 6.62879e-06
4.8 7.43266e-05 9.24814e-05 6.62879e-06
5.6 6.37085e-05 0.000100161 6.62879e-06
6.4 5.57449e-05 0.000105787 6.62879e-06
7.2 4.9551e-05 0.000109217 6.62879e-06
8 0 0.00011037 6.62879e-06
9.6 0 0.00011037 6.62879e-06
12.8 0 0.00011037 6.62879e-06
16 0 0.00011037 6.62879e-06
19.2 0 0.00011037 6.62879e-06
END DIST

Metal 6 OVER 3
DIST count 12 width 1.6
1.6 0.00022298 5.40042e-05 6.62879e-06
3.2 0.00011149 8.32356e-05 6.62879e-06
4 8.91919e-05 9.57497e-05 6.62879e-06
4.8 7.43266e-05 0.000106434 6.62879e-06
5.6 6.37085e-05 0.00011503 6.62879e-06
6.4 5.57449e-05 0.000121324 6.62879e-06
7.2 4.9551e-05 0.000125162 6.62879e-06
8 0 0.000126452 6.62879e-06
9.6 0 0.000126452 6.62879e-06
12.8 0 0.000126452 6.62879e-06
16 0 0.000126452 6.62879e-06
19.2 0 0.000126452 6.62879e-06
END DIST

Metal 6 OVER 4
DIST count 12 width 1.6
1.6 0.00022298 7.29044e-05 6.62879e-06
3.2 0.00011149 0.000106508 6.62879e-06
4 8.91919e-05 0.000120892 6.62879e-06
4.8 7.43266e-05 0.000133175 6.62879e-06
5.6 6.37085e-05 0.000143055 6.62879e-06
6.4 5.57449e-05 0.000150292 6.62879e-06
7.2 4.9551e-05 0.000154704 6.62879e-06
8 0 0.000156184 6.62879e-06
9.6 0 0.000156184 6.62879e-06
12.8 0 0.000156184 6.62879e-06
16 0 0.000156184 6.62879e-06
19.2 0 0.000156184 6.62879e-06
END DIST

Metal 6 OVER 5
DIST count 12 width 1.6
1.6 0.00022298 0.000138989 6.62879e-06
3.2 0.00011149 0.000186724 6.62879e-06
4 8.91919e-05 0.000207155 6.62879e-06
4.8 7.43266e-05 0.000224603 6.62879e-06
5.6 6.37085e-05 0.00023864 6.62879e-06
6.4 5.57449e-05 0.000248919 6.62879e-06
7.2 4.9551e-05 0.000255188 6.62879e-06
8 0 0.000257291 6.62879e-06
9.6 0 0.000257291 6.62879e-06
12.8 0 0.000257291 6.62879e-06
16 0 0.000257291 6.62879e-06
19.2 0 0.000257291 6.62879e-06
END DIST

Metal 6 UNDER
WIDTH Table 0 entries: 

Metal 6 DIAGUNDER
WIDTH Table 0 entries: 
END DensityModel 0