sky130/openlane/rules.openrcx.sky130A.max.magic

Extraction Rules for OpenRCX

DIAGMODEL ON

LayerCount 6
DensityRate 1  0

DensityModel 0

Metal 1 RESOVER
WIDTH Table 1 entries:  0.17

Metal 1 RESOVER 0
DIST count 55 width 0.17
0 0 0 0.10101
0 0.29 0 0.10101
0 0.46 0 0.10101
0 0.665 0 0.10101
0 0.75 0 0.10101
0 0.92 0 0.10101
0 1.125 0 0.10101
0 1.21 0 0.10101
0 1.38 0 0.10101
0 1.84 0 0.10101
0.29 0.29 0 0.10101
0.29 0.46 0 0.10101
0.29 0.665 0 0.10101
0.29 0.75 0 0.10101
0.29 0.92 0 0.10101
0.29 1.125 0 0.10101
0.29 1.21 0 0.10101
0.29 1.38 0 0.10101
0.29 1.84 0 0.10101
0.46 0.46 0 0.10101
0.46 0.665 0 0.10101
0.46 0.75 0 0.10101
0.46 0.92 0 0.10101
0.46 1.125 0 0.10101
0.46 1.21 0 0.10101
0.46 1.38 0 0.10101
0.46 1.84 0 0.10101
0.665 0.665 0 0.10101
0.665 0.75 0 0.10101
0.665 0.92 0 0.10101
0.665 1.125 0 0.10101
0.665 1.21 0 0.10101
0.665 1.38 0 0.10101
0.665 1.84 0 0.10101
0.75 0.75 0 0.10101
0.75 0.92 0 0.10101
0.75 1.125 0 0.10101
0.75 1.21 0 0.10101
0.75 1.38 0 0.10101
0.75 1.84 0 0.10101
0.92 0.92 0 0.10101
0.92 1.125 0 0.10101
0.92 1.21 0 0.10101
0.92 1.38 0 0.10101
0.92 1.84 0 0.10101
1.125 1.125 0 0.10101
1.125 1.21 0 0.10101
1.125 1.38 0 0.10101
1.125 1.84 0 0.10101
1.21 1.21 0 0.10101
1.21 1.38 0 0.10101
1.21 1.84 0 0.10101
1.38 1.38 0 0.10101
1.38 1.84 0 0.10101
1.84 0 1.84 0.10101
END DIST

Metal 1 OVER
WIDTH Table 1 entries:  0.17

Metal 1 OVER 0
DIST count 12 width 0.17
0.17 0.000673797 6.15131e-06 0.0505051
0.34 0.000336898 7.55924e-06 0.0505051
0.425 0.000269519 8.26236e-06 0.0505051
0.51 0.000224599 8.96471e-06 0.0505051
0.595 0.000192513 9.6661e-06 0.0505051
0.68 0.000168449 1.03664e-05 0.0505051
0.765 0.000149733 1.10655e-05 0.0505051
0.85 0.000134759 1.17632e-05 0.0505051
1.02 0.000112299 1.31538e-05 0.0505051
1.36 8.42246e-05 1.59116e-05 0.0505051
1.7 6.73797e-05 1.863e-05 0.0505051
2.04 0 7.74493e-05 0.0505051
END DIST

Metal 1 UNDER
WIDTH Table 1 entries:  0.17

Metal 1 UNDER 2
DIST count 12 width 0.17
0.17 0.000673797 2.01961e-05 0.0505051
0.34 0.000336898 2.23926e-05 0.0505051
0.425 0.000269519 2.35406e-05 0.0505051
0.51 0.000224599 2.47216e-05 0.0505051
0.595 0.000192513 2.59349e-05 0.0505051
0.68 0.000168449 2.71796e-05 0.0505051
0.765 0.000149733 2.84551e-05 0.0505051
0.85 0.000134759 2.97608e-05 0.0505051
1.02 0.000112299 3.24605e-05 0.0505051
1.36 8.42246e-05 3.81908e-05 0.0505051
1.7 6.73797e-05 4.43183e-05 0.0505051
2.04 0 0.000106936 0.0505051
END DIST

Metal 1 UNDER 3
DIST count 12 width 0.17
0.17 0.000673797 1.23644e-05 0.0505051
0.34 0.000336898 1.42354e-05 0.0505051
0.425 0.000269519 1.52e-05 0.0505051
0.51 0.000224599 1.61835e-05 0.0505051
0.595 0.000192513 1.71855e-05 0.0505051
0.68 0.000168449 1.82058e-05 0.0505051
0.765 0.000149733 1.92436e-05 0.0505051
0.85 0.000134759 2.02987e-05 0.0505051
1.02 0.000112299 2.24582e-05 0.0505051
1.36 8.42246e-05 2.69623e-05 0.0505051
1.7 6.73797e-05 3.16836e-05 0.0505051
2.04 0 9.27345e-05 0.0505051
END DIST

Metal 1 UNDER 4
DIST count 12 width 0.17
0.17 0.000673797 1.07209e-05 0.0505051
0.34 0.000336898 1.24654e-05 0.0505051
0.425 0.000269519 1.33564e-05 0.0505051
0.51 0.000224599 1.42598e-05 0.0505051
0.595 0.000192513 1.51755e-05 0.0505051
0.68 0.000168449 1.61023e-05 0.0505051
0.765 0.000149733 1.70408e-05 0.0505051
0.85 0.000134759 1.79898e-05 0.0505051
1.02 0.000112299 1.99194e-05 0.0505051
1.36 8.42246e-05 2.38922e-05 0.0505051
1.7 6.73797e-05 2.79935e-05 0.0505051
2.04 0 8.83444e-05 0.0505051
END DIST

Metal 1 UNDER 5
DIST count 12 width 0.17
0.17 0.000673797 9.46165e-06 0.0505051
0.34 0.000336898 1.10949e-05 0.0505051
0.425 0.000269519 1.19243e-05 0.0505051
0.51 0.000224599 1.27616e-05 0.0505051
0.595 0.000192513 1.36066e-05 0.0505051
0.68 0.000168449 1.44589e-05 0.0505051
0.765 0.000149733 1.53184e-05 0.0505051
0.85 0.000134759 1.61848e-05 0.0505051
1.02 0.000112299 1.7937e-05 0.0505051
1.36 8.42246e-05 2.15095e-05 0.0505051
1.7 6.73797e-05 2.51555e-05 0.0505051
2.04 0 8.50023e-05 0.0505051
END DIST

Metal 1 UNDER 6
DIST count 12 width 0.17
0.17 0.000673797 9.30086e-06 0.0505051
0.34 0.000336898 1.09952e-05 0.0505051
0.425 0.000269519 1.18511e-05 0.0505051
0.51 0.000224599 1.27123e-05 0.0505051
0.595 0.000192513 1.35786e-05 0.0505051
0.68 0.000168449 1.44497e-05 0.0505051
0.765 0.000149733 1.53254e-05 0.0505051
0.85 0.000134759 1.62052e-05 0.0505051
1.02 0.000112299 1.79762e-05 0.0505051
1.36 8.42246e-05 2.15542e-05 0.0505051
1.7 6.73797e-05 2.51625e-05 0.0505051
2.04 0 8.49289e-05 0.0505051
END DIST

Metal 1 DIAGUNDER
WIDTH Table 1 entries:  0.17

Metal 1 DIAGUNDER 2
DIST count 13 width 0.17
0 0 1.68879e-05 0.0505051
0.17 0 6.18818e-06 0.0505051
0.34 0 6.17742e-06 0.0505051
0.425 0 6.16999e-06 0.0505051
0.51 0 6.16126e-06 0.0505051
0.595 0 6.1511e-06 0.0505051
0.68 0 6.13963e-06 0.0505051
0.765 0 6.1268e-06 0.0505051
0.85 0 6.11266e-06 0.0505051
1.02 0 6.08021e-06 0.0505051
1.36 0 5.99941e-06 0.0505051
1.7 0 5.8975e-06 0.0505051
2.04 0 5.77481e-06 0.0505051
END DIST

Metal 1 DIAGUNDER 3
DIST count 13 width 0.17
0 0 5.85015e-06 0.0505051
0.17 0 4.22876e-06 0.0505051
0.34 0 4.22139e-06 0.0505051
0.425 0 4.21634e-06 0.0505051
0.51 0 4.21034e-06 0.0505051
0.595 0 4.20339e-06 0.0505051
0.68 0 4.19554e-06 0.0505051
0.765 0 4.18675e-06 0.0505051
0.85 0 4.17706e-06 0.0505051
1.02 0 4.1549e-06 0.0505051
1.36 0 4.09964e-06 0.0505051
1.7 0 4.03001e-06 0.0505051
2.04 0 3.94611e-06 0.0505051
END DIST

Metal 1 DIAGUNDER 4
DIST count 13 width 0.17
0 0 4.30974e-06 0.0505051
0.17 0 4.69834e-06 0.0505051
0.34 0 4.68948e-06 0.0505051
0.425 0 4.68354e-06 0.0505051
0.51 0 4.67653e-06 0.0505051
0.595 0 4.66851e-06 0.0505051
0.68 0 4.65942e-06 0.0505051
0.765 0 4.64938e-06 0.0505051
0.85 0 4.63821e-06 0.0505051
1.02 0 4.61295e-06 0.0505051
1.36 0 4.55021e-06 0.0505051
1.7 0 4.47148e-06 0.0505051
2.04 0 4.37701e-06 0.0505051
END DIST

Metal 1 DIAGUNDER 5
DIST count 13 width 0.17
0 0 2.50006e-06 0.0505051
0.17 0 3.682e-06 0.0505051
0.34 0 3.6751e-06 0.0505051
0.425 0 3.67047e-06 0.0505051
0.51 0 3.665e-06 0.0505051
0.595 0 3.65876e-06 0.0505051
0.68 0 3.65169e-06 0.0505051
0.765 0 3.64385e-06 0.0505051
0.85 0 3.63518e-06 0.0505051
1.02 0 3.61539e-06 0.0505051
1.36 0 3.56637e-06 0.0505051
1.7 0 3.50481e-06 0.0505051
2.04 0 3.4309e-06 0.0505051
END DIST

Metal 1 DIAGUNDER 6
DIST count 0 width 0.17
END DIST

Metal 2 RESOVER
WIDTH Table 1 entries:  0.14

Metal 2 RESOVER 0
DIST count 55 width 0.14
0 0 0 0.00104618
0 0.2 0 0.00104618
0 0.34 0 0.00104618
0 0.47 0 0.00104618
0 0.54 0 0.00104618
0 0.68 0 0.00104618
0 0.81 0 0.00104618
0 0.88 0 0.00104618
0 1.02 0 0.00104618
0 1.36 0 0.00104618
0.2 0.2 0 0.00104618
0.2 0.34 0 0.00104618
0.2 0.47 0 0.00104618
0.2 0.54 0 0.00104618
0.2 0.68 0 0.00104618
0.2 0.81 0 0.00104618
0.2 0.88 0 0.00104618
0.2 1.02 0 0.00104618
0.2 1.36 0 0.00104618
0.34 0.34 0 0.00104618
0.34 0.47 0 0.00104618
0.34 0.54 0 0.00104618
0.34 0.68 0 0.00104618
0.34 0.81 0 0.00104618
0.34 0.88 0 0.00104618
0.34 1.02 0 0.00104618
0.34 1.36 0 0.00104618
0.47 0.47 0 0.00104618
0.47 0.54 0 0.00104618
0.47 0.68 0 0.00104618
0.47 0.81 0 0.00104618
0.47 0.88 0 0.00104618
0.47 1.02 0 0.00104618
0.47 1.36 0 0.00104618
0.54 0.54 0 0.00104618
0.54 0.68 0 0.00104618
0.54 0.81 0 0.00104618
0.54 0.88 0 0.00104618
0.54 1.02 0 0.00104618
0.54 1.36 0 0.00104618
0.68 0.68 0 0.00104618
0.68 0.81 0 0.00104618
0.68 0.88 0 0.00104618
0.68 1.02 0 0.00104618
0.68 1.36 0 0.00104618
0.81 0.81 0 0.00104618
0.81 0.88 0 0.00104618
0.81 1.02 0 0.00104618
0.81 1.36 0 0.00104618
0.88 0.88 0 0.00104618
0.88 1.02 0 0.00104618
0.88 1.36 0 0.00104618
1.02 1.02 0 0.00104618
1.02 1.36 0 0.00104618
1.36 0 1.36 0.00104618
END DIST

Metal 2 RESOVER 1
DIST count 0 width 0.14
END DIST

Metal 2 OVER
WIDTH Table 1 entries:  0.14

Metal 2 OVER 0
DIST count 12 width 0.14
0.14 0.00107504 4.24913e-06 0.000523088
0.28 0.000537518 5.4724e-06 0.000523088
0.35 0.000430014 6.08351e-06 0.000523088
0.42 0.000358345 6.69419e-06 0.000523088
0.49 0.000307153 7.30433e-06 0.000523088
0.56 0.000268759 7.91382e-06 0.000523088
0.63 0.000238898 8.52255e-06 0.000523088
0.7 0.000215007 9.13048e-06 0.000523088
0.84 0.000179173 1.03435e-05 0.000523088
1.12 0.00013438 1.27558e-05 0.000523088
1.4 0.000107504 1.51448e-05 0.000523088
1.68 0 0.000107091 0.000523088
END DIST

Metal 2 OVER 1
DIST count 12 width 0.14
0.14 0.00107504 1.3383e-05 0.000523088
0.28 0.000537518 1.53476e-05 0.000523088
0.35 0.000430014 1.63797e-05 0.000523088
0.42 0.000358345 1.74442e-05 0.000523088
0.49 0.000307153 1.8541e-05 0.000523088
0.56 0.000268759 1.96698e-05 0.000523088
0.63 0.000238898 2.08299e-05 0.000523088
0.7 0.000215007 2.20211e-05 0.000523088
0.84 0.000179173 2.44953e-05 0.000523088
1.12 0.00013438 2.97956e-05 0.000523088
1.4 0.000107504 3.55367e-05 0.000523088
1.68 0 0.000131269 0.000523088
END DIST

Metal 2 UNDER
WIDTH Table 1 entries:  0.14

Metal 2 UNDER 3
DIST count 12 width 0.14
0.14 0.00107504 1.77431e-05 0.000523088
0.28 0.000537518 1.97262e-05 0.000523088
0.35 0.000430014 2.07742e-05 0.000523088
0.42 0.000358345 2.18565e-05 0.000523088
0.49 0.000307153 2.29729e-05 0.000523088
0.56 0.000268759 2.41234e-05 0.000523088
0.63 0.000238898 2.53072e-05 0.000523088
0.7 0.000215007 2.65237e-05 0.000523088
0.84 0.000179173 2.9054e-05 0.000523088
1.12 0.00013438 3.44887e-05 0.000523088
1.4 0.000107504 4.0392e-05 0.000523088
1.68 0 0.000136312 0.000523088
END DIST

Metal 2 UNDER 4
DIST count 12 width 0.14
0.14 0.00107504 9.34228e-06 0.000523088
0.28 0.000537518 1.09589e-05 0.000523088
0.35 0.000430014 1.17912e-05 0.000523088
0.42 0.000358345 1.26391e-05 0.000523088
0.49 0.000307153 1.35023e-05 0.000523088
0.56 0.000268759 1.43807e-05 0.000523088
0.63 0.000238898 1.5274e-05 0.000523088
0.7 0.000215007 1.61819e-05 0.000523088
0.84 0.000179173 1.80407e-05 0.000523088
1.12 0.00013438 2.19213e-05 0.000523088
1.4 0.000107504 2.60026e-05 0.000523088
1.68 0 0.000119849 0.000523088
END DIST

Metal 2 UNDER 5
DIST count 12 width 0.14
0.14 0.00107504 7.30281e-06 0.000523088
0.28 0.000537518 8.76627e-06 0.000523088
0.35 0.000430014 9.51237e-06 0.000523088
0.42 0.000358345 1.0268e-05 0.000523088
0.49 0.000307153 1.10327e-05 0.000523088
0.56 0.000268759 1.18062e-05 0.000523088
0.63 0.000238898 1.25886e-05 0.000523088
0.7 0.000215007 1.33797e-05 0.000523088
0.84 0.000179173 1.49868e-05 0.000523088
1.12 0.00013438 1.82953e-05 0.000523088
1.4 0.000107504 2.17175e-05 0.000523088
1.68 0 0.000114824 0.000523088
END DIST

Metal 2 UNDER 6
DIST count 12 width 0.14
0.14 0.00107504 7.04928e-06 0.000523088
0.28 0.000537518 8.61172e-06 0.000523088
0.35 0.000430014 9.40321e-06 0.000523088
0.42 0.000358345 1.02016e-05 0.000523088
0.49 0.000307153 1.10063e-05 0.000523088
0.56 0.000268759 1.18174e-05 0.000523088
0.63 0.000238898 1.26345e-05 0.000523088
0.7 0.000215007 1.34573e-05 0.000523088
0.84 0.000179173 1.51199e-05 0.000523088
1.12 0.00013438 1.85053e-05 0.000523088
1.4 0.000107504 2.19584e-05 0.000523088
1.68 0 0.00011505 0.000523088
END DIST

Metal 2 DIAGUNDER
WIDTH Table 1 entries:  0.14

Metal 2 DIAGUNDER 3
DIST count 13 width 0.14
0 0 3.16589e-05 0.000523088
0.14 0 3.18147e-05 0.000523088
0.28 0 3.11173e-05 0.000523088
0.35 0 3.07144e-05 0.000523088
0.42 0 3.03891e-05 0.000523088
0.49 0 3.00628e-05 0.000523088
0.56 0 2.97355e-05 0.000523088
0.63 0 2.94074e-05 0.000523088
0.7 0 2.89963e-05 0.000523088
0.84 0 1.90923e-05 0.000523088
1.12 0 9.39221e-06 0.000523088
1.4 0 9.36248e-06 0.000523088
1.68 0 6.85159e-06 0.000523088
END DIST

Metal 2 DIAGUNDER 4
DIST count 13 width 0.14
0 0 1.8164e-05 0.000523088
0.14 0 2.87282e-05 0.000523088
0.28 0 2.79508e-05 0.000523088
0.35 0 2.75876e-05 0.000523088
0.42 0 2.72918e-05 0.000523088
0.49 0 2.6996e-05 0.000523088
0.56 0 1.73286e-05 0.000523088
0.63 0 7.74279e-06 0.000523088
0.7 0 7.63333e-06 0.000523088
0.84 0 7.59791e-06 0.000523088
1.12 0 7.58672e-06 0.000523088
1.4 0 7.54307e-06 0.000523088
1.68 0 5.64668e-06 0.000523088
END DIST

Metal 2 DIAGUNDER 5
DIST count 13 width 0.14
0 0 1.4256e-05 0.000523088
0.14 0 2.59426e-05 0.000523088
0.28 0 2.53251e-05 0.000523088
0.35 0 2.50209e-05 0.000523088
0.42 0 2.47639e-05 0.000523088
0.49 0 2.45076e-05 0.000523088
0.56 0 1.48808e-05 0.000523088
0.63 0 5.33629e-06 0.000523088
0.7 0 5.25916e-06 0.000523088
0.84 0 5.23362e-06 0.000523088
1.12 0 5.2267e-06 0.000523088
1.4 0 5.1974e-06 0.000523088
1.68 0 3.88911e-06 0.000523088
END DIST

Metal 2 DIAGUNDER 6
DIST count 13 width 0.14
0 0 8.24495e-06 0.000523088
0.14 0 9.91941e-06 0.000523088
0.28 0 9.7544e-06 0.000523088
0.35 0 9.73615e-06 0.000523088
0.42 0 9.71616e-06 0.000523088
0.49 0 9.69444e-06 0.000523088
0.56 0 9.67121e-06 0.000523088
0.63 0 9.64668e-06 0.000523088
0.7 0 9.62071e-06 0.000523088
0.84 0 9.56457e-06 0.000523088
1.12 0 9.436e-06 0.000523088
1.4 0 9.28564e-06 0.000523088
1.68 0 8.76017e-06 0.000523088
END DIST

Metal 2 OVERUNDER
WIDTH Table 1 entries:  0.14

Metal 2 OVER 1 UNDER 3
DIST count 12 width 0.14
0.14 0.00107523 2.71048e-05 0.000523088
0.28 0.000537526 2.98675e-05 0.000523088
0.35 0.000430014 3.13387e-05 0.000523088
0.42 0.000358345 3.28748e-05 0.000523088
0.49 0.000307177 3.44713e-05 0.000523088
0.56 0.00026883 3.61269e-05 0.000523088
0.63 0.000239 3.78529e-05 0.000523088
0.7 0.000215063 3.96666e-05 0.000523088
0.84 0.000179236 4.34557e-05 0.000523088
1.12 0.000134419 5.17854e-05 0.000523088
1.4 0.000107504 6.10522e-05 0.000523088
1.68 0 0.000160758 0.000523088
END DIST

Metal 2 OVER 1 UNDER 4
DIST count 12 width 0.14
0.14 0.00107526 1.90345e-05 0.000523088
0.28 0.000537637 2.1422e-05 0.000523088
0.35 0.000430125 2.26778e-05 0.000523088
0.42 0.000358456 2.39795e-05 0.000523088
0.49 0.000307287 2.53224e-05 0.000523088
0.56 0.000268941 2.67062e-05 0.000523088
0.63 0.000239111 2.81416e-05 0.000523088
0.7 0.000215173 2.96466e-05 0.000523088
0.84 0.000179347 3.27641e-05 0.000523088
1.12 0.00013453 3.954e-05 0.000523088
1.4 0.000107614 4.6985e-05 0.000523088
1.68 0 0.000144728 0.000523088
END DIST

Metal 2 OVER 1 UNDER 5
DIST count 12 width 0.14
0.14 0.00107526 1.6911e-05 0.000523088
0.28 0.000537629 1.91453e-05 0.000523088
0.35 0.000430125 2.0179e-05 0.000523088
0.42 0.000358456 2.12883e-05 0.000523088
0.49 0.000307264 2.25397e-05 0.000523088
0.56 0.00026887 2.38325e-05 0.000523088
0.63 0.000239008 2.51662e-05 0.000523088
0.7 0.000215118 2.65406e-05 0.000523088
0.84 0.000179284 2.94089e-05 0.000523088
1.12 0.00013449 3.56055e-05 0.000523088
1.4 0.000107614 4.23797e-05 0.000523088
1.68 0 0.000139382 0.000523088
END DIST

Metal 2 OVER 1 UNDER 6
DIST count 12 width 0.14
0.14 0.00107515 1.64249e-05 0.000523088
0.28 0.000537518 1.87147e-05 0.000523088
0.35 0.000430014 1.96994e-05 0.000523088
0.42 0.000358345 2.09515e-05 0.000523088
0.49 0.000307153 2.22429e-05 0.000523088
0.56 0.000268759 2.35733e-05 0.000523088
0.63 0.000238898 2.49418e-05 0.000523088
0.7 0.000215007 2.63479e-05 0.000523088
0.84 0.000179173 2.92717e-05 0.000523088
1.12 0.00013438 3.55452e-05 0.000523088
1.4 0.000107504 4.23503e-05 0.000523088
1.68 0 0.000139227 0.000523088
END DIST

Metal 3 RESOVER
WIDTH Table 1 entries:  0.14

Metal 3 RESOVER 0
DIST count 55 width 0.14
0 0 0 0.00104618
0 0.32 0 0.00104618
0 0.46 0 0.00104618
0 0.71 0 0.00104618
0 0.78 0 0.00104618
0 0.92 0 0.00104618
0 1.17 0 0.00104618
0 1.24 0 0.00104618
0 1.38 0 0.00104618
0 1.84 0 0.00104618
0.32 0.32 0 0.00104618
0.32 0.46 0 0.00104618
0.32 0.71 0 0.00104618
0.32 0.78 0 0.00104618
0.32 0.92 0 0.00104618
0.32 1.17 0 0.00104618
0.32 1.24 0 0.00104618
0.32 1.38 0 0.00104618
0.32 1.84 0 0.00104618
0.46 0.46 0 0.00104618
0.46 0.71 0 0.00104618
0.46 0.78 0 0.00104618
0.46 0.92 0 0.00104618
0.46 1.17 0 0.00104618
0.46 1.24 0 0.00104618
0.46 1.38 0 0.00104618
0.46 1.84 0 0.00104618
0.71 0.71 0 0.00104618
0.71 0.78 0 0.00104618
0.71 0.92 0 0.00104618
0.71 1.17 0 0.00104618
0.71 1.24 0 0.00104618
0.71 1.38 0 0.00104618
0.71 1.84 0 0.00104618
0.78 0.78 0 0.00104618
0.78 0.92 0 0.00104618
0.78 1.17 0 0.00104618
0.78 1.24 0 0.00104618
0.78 1.38 0 0.00104618
0.78 1.84 0 0.00104618
0.92 0.92 0 0.00104618
0.92 1.17 0 0.00104618
0.92 1.24 0 0.00104618
0.92 1.38 0 0.00104618
0.92 1.84 0 0.00104618
1.17 1.17 0 0.00104618
1.17 1.24 0 0.00104618
1.17 1.38 0 0.00104618
1.17 1.84 0 0.00104618
1.24 1.24 0 0.00104618
1.24 1.38 0 0.00104618
1.24 1.84 0 0.00104618
1.38 1.38 0 0.00104618
1.38 1.84 0 0.00104618
1.84 0 1.84 0.00104618
END DIST

Metal 3 RESOVER 1
DIST count 0 width 0.14
END DIST

Metal 3 RESOVER 2
DIST count 0 width 0.14
END DIST

Metal 3 OVER
WIDTH Table 1 entries:  0.14

Metal 3 OVER 0
DIST count 12 width 0.14
0.14 0.0011443 3.2627e-06 0.000523088
0.28 0.00057215 4.39812e-06 0.000523088
0.35 0.00045772 4.96537e-06 0.000523088
0.42 0.000381433 5.53222e-06 0.000523088
0.49 0.000326942 6.09852e-06 0.000523088
0.56 0.000286075 6.66425e-06 0.000523088
0.63 0.000254289 7.22933e-06 0.000523088
0.7 0.00022886 7.79361e-06 0.000523088
0.84 0.000190717 8.91955e-06 0.000523088
1.12 0.000143038 1.11586e-05 0.000523088
1.4 0.00011443 1.33762e-05 0.000523088
1.68 0 0.000110925 0.000523088
END DIST

Metal 3 OVER 1
DIST count 12 width 0.14
0.14 0.0011443 6.60815e-06 0.000523088
0.28 0.00057215 8.34978e-06 0.000523088
0.35 0.00045772 9.25379e-06 0.000523088
0.42 0.000381433 1.01798e-05 0.000523088
0.49 0.000326942 1.11271e-05 0.000523088
0.56 0.000286075 1.20959e-05 0.000523088
0.63 0.000254289 1.30852e-05 0.000523088
0.7 0.00022886 1.40952e-05 0.000523088
0.84 0.000190717 1.61757e-05 0.000523088
1.12 0.000143038 2.05669e-05 0.000523088
1.4 0.00011443 2.5244e-05 0.000523088
1.68 0 0.000125536 0.000523088
END DIST

Metal 3 OVER 2
DIST count 12 width 0.14
0.14 0.0011443 1.53806e-05 0.000523088
0.28 0.00057215 1.76197e-05 0.000523088
0.35 0.00045772 1.88018e-05 0.000523088
0.42 0.000381433 2.00251e-05 0.000523088
0.49 0.000326942 2.12881e-05 0.000523088
0.56 0.000286075 2.25917e-05 0.000523088
0.63 0.000254289 2.39341e-05 0.000523088
0.7 0.00022886 2.53156e-05 0.000523088
0.84 0.000190717 2.81926e-05 0.000523088
1.12 0.000143038 3.43868e-05 0.000523088
1.4 0.00011443 4.11295e-05 0.000523088
1.68 0 0.000143732 0.000523088
END DIST

Metal 3 UNDER
WIDTH Table 1 entries:  0.14

Metal 3 UNDER 4
DIST count 12 width 0.14
0.14 0.0011443 1.30705e-05 0.000523088
0.28 0.00057215 1.49967e-05 0.000523088
0.35 0.00045772 1.6e-05 0.000523088
0.42 0.000381433 1.70301e-05 0.000523088
0.49 0.000326942 1.8086e-05 0.000523088
0.56 0.000286075 1.9168e-05 0.000523088
0.63 0.000254289 2.02752e-05 0.000523088
0.7 0.00022886 2.14073e-05 0.000523088
0.84 0.000190717 2.37449e-05 0.000523088
1.12 0.000143038 2.86997e-05 0.000523088
1.4 0.00011443 3.40015e-05 0.000523088
1.68 0 0.000134974 0.000523088
END DIST

Metal 3 UNDER 5
DIST count 12 width 0.14
0.14 0.0011443 6.98817e-06 0.000523088
0.28 0.00057215 8.50967e-06 0.000523088
0.35 0.00045772 9.28983e-06 0.000523088
0.42 0.000381433 1.00827e-05 0.000523088
0.49 0.000326942 1.08881e-05 0.000523088
0.56 0.000286075 1.17057e-05 0.000523088
0.63 0.000254289 1.25355e-05 0.000523088
0.7 0.00022886 1.33769e-05 0.000523088
0.84 0.000190717 1.50944e-05 0.000523088
1.12 0.000143038 1.86591e-05 0.000523088
1.4 0.00011443 2.23822e-05 0.000523088
1.68 0 0.000121602 0.000523088
END DIST

Metal 3 UNDER 6
DIST count 12 width 0.14
0.14 0.0011443 6.43528e-06 0.000523088
0.28 0.00057215 8.0474e-06 0.000523088
0.35 0.00045772 8.86659e-06 0.000523088
0.42 0.000381433 9.69441e-06 0.000523088
0.49 0.000326942 1.05304e-05 0.000523088
0.56 0.000286075 1.13744e-05 0.000523088
0.63 0.000254289 1.22259e-05 0.000523088
0.7 0.00022886 1.3085e-05 0.000523088
0.84 0.000190717 1.48245e-05 0.000523088
1.12 0.000143038 1.83814e-05 0.000523088
1.4 0.00011443 2.20273e-05 0.000523088
1.68 0 0.000121101 0.000523088
END DIST

Metal 3 DIAGUNDER
WIDTH Table 1 entries:  0.14

Metal 3 DIAGUNDER 4
DIST count 13 width 0.14
0 0 1.49248e-05 0.000523088
0.14 0 8.88593e-06 0.000523088
0.28 0 8.87352e-06 0.000523088
0.35 0 8.86537e-06 0.000523088
0.42 0 8.85592e-06 0.000523088
0.49 0 8.84509e-06 0.000523088
0.56 0 8.83297e-06 0.000523088
0.63 0 8.81948e-06 0.000523088
0.7 0 8.80469e-06 0.000523088
0.84 0 8.77121e-06 0.000523088
1.12 0 8.6886e-06 0.000523088
1.4 0 8.58521e-06 0.000523088
1.68 0 8.46133e-06 0.000523088
END DIST

Metal 3 DIAGUNDER 5
DIST count 13 width 0.14
0 0 4.21068e-06 0.000523088
0.14 0 4.92727e-06 0.000523088
0.28 0 4.92056e-06 0.000523088
0.35 0 4.91609e-06 0.000523088
0.42 0 4.91089e-06 0.000523088
0.49 0 4.90498e-06 0.000523088
0.56 0 4.89827e-06 0.000523088
0.63 0 4.89091e-06 0.000523088
0.7 0 4.88276e-06 0.000523088
0.84 0 4.86429e-06 0.000523088
1.12 0 4.81869e-06 0.000523088
1.4 0 4.76162e-06 0.000523088
1.68 0 4.69315e-06 0.000523088
END DIST

Metal 3 DIAGUNDER 6
DIST count 13 width 0.14
0 0 1.01282e-05 0.000523088
0.14 0 1.16861e-05 0.000523088
0.28 0 1.16429e-05 0.000523088
0.35 0 1.16187e-05 0.000523088
0.42 0 1.15928e-05 0.000523088
0.49 0 1.15651e-05 0.000523088
0.56 0 1.15357e-05 0.000523088
0.63 0 1.15045e-05 0.000523088
0.7 0 1.14717e-05 0.000523088
0.84 0 1.14009e-05 0.000523088
1.12 0 1.1239e-05 0.000523088
1.4 0 1.10501e-05 0.000523088
1.68 0 1.08349e-05 0.000523088
END DIST

Metal 3 OVERUNDER
WIDTH Table 1 entries:  0.14

Metal 3 OVER 1 UNDER 4
DIST count 12 width 0.14
0.14 0.0011443 1.64159e-05 0.000523088
0.28 0.00057215 1.89483e-05 0.000523088
0.35 0.00045772 2.02884e-05 0.000523088
0.42 0.000381433 2.16777e-05 0.000523088
0.49 0.000326942 2.31145e-05 0.000523088
0.56 0.000286075 2.45996e-05 0.000523088
0.63 0.000254289 2.61311e-05 0.000523088
0.7 0.00022886 2.77088e-05 0.000523088
0.84 0.000190717 3.1001e-05 0.000523088
1.12 0.000143038 3.8108e-05 0.000523088
1.4 0.00011443 4.58693e-05 0.000523088
1.68 0 0.000149584 0.000523088
END DIST

Metal 3 OVER 1 UNDER 5
DIST count 12 width 0.14
0.14 0.0011443 1.03336e-05 0.000523088
0.28 0.00057215 1.24613e-05 0.000523088
0.35 0.00045772 1.35782e-05 0.000523088
0.42 0.000381433 1.47303e-05 0.000523088
0.49 0.000326942 1.59166e-05 0.000523088
0.56 0.000286075 1.71373e-05 0.000523088
0.63 0.000254289 1.83914e-05 0.000523088
0.7 0.00022886 1.96785e-05 0.000523088
0.84 0.000190717 2.23505e-05 0.000523088
1.12 0.000143038 2.80674e-05 0.000523088
1.4 0.00011443 3.425e-05 0.000523088
1.68 0 0.000136213 0.000523088
END DIST

Metal 3 OVER 1 UNDER 6
DIST count 12 width 0.14
0.14 0.0011443 9.78074e-06 0.000523088
0.28 0.00057215 1.19991e-05 0.000523088
0.35 0.00045772 1.3155e-05 0.000523088
0.42 0.000381433 1.4342e-05 0.000523088
0.49 0.000326942 1.55589e-05 0.000523088
0.56 0.000286075 1.6806e-05 0.000523088
0.63 0.000254289 1.80819e-05 0.000523088
0.7 0.00022886 1.93866e-05 0.000523088
0.84 0.000190717 2.20806e-05 0.000523088
1.12 0.000143038 2.77897e-05 0.000523088
1.4 0.00011443 3.38951e-05 0.000523088
1.68 0 0.000135712 0.000523088
END DIST

Metal 3 OVER 2 UNDER 4
DIST count 12 width 0.14
0.14 0.0011443 2.51883e-05 0.000523088
0.28 0.00057215 2.82183e-05 0.000523088
0.35 0.00045772 2.98365e-05 0.000523088
0.42 0.000381433 3.1523e-05 0.000523088
0.49 0.000326942 3.32756e-05 0.000523088
0.56 0.000286075 3.50955e-05 0.000523088
0.63 0.000254289 3.69799e-05 0.000523088
0.7 0.00022886 3.89293e-05 0.000523088
0.84 0.000190717 4.3018e-05 0.000523088
1.12 0.000143038 5.19279e-05 0.000523088
1.4 0.00011443 6.17548e-05 0.000523088
1.68 0 0.00016778 0.000523088
END DIST

Metal 3 OVER 2 UNDER 5
DIST count 12 width 0.14
0.14 0.0011443 1.9106e-05 0.000523088
0.28 0.00057215 2.17313e-05 0.000523088
0.35 0.00045772 2.31263e-05 0.000523088
0.42 0.000381433 2.45756e-05 0.000523088
0.49 0.000326942 2.60777e-05 0.000523088
0.56 0.000286075 2.76332e-05 0.000523088
0.63 0.000254289 2.92402e-05 0.000523088
0.7 0.00022886 3.0899e-05 0.000523088
0.84 0.000190717 3.43675e-05 0.000523088
1.12 0.000143038 4.18873e-05 0.000523088
1.4 0.00011443 5.01355e-05 0.000523088
1.68 0 0.000154409 0.000523088
END DIST

Metal 3 OVER 2 UNDER 6
DIST count 12 width 0.14
0.14 0.0011443 1.85531e-05 0.000523088
0.28 0.00057215 2.1269e-05 0.000523088
0.35 0.00045772 2.27031e-05 0.000523088
0.42 0.000381433 2.41873e-05 0.000523088
0.49 0.000326942 2.572e-05 0.000523088
0.56 0.000286075 2.73018e-05 0.000523088
0.63 0.000254289 2.89307e-05 0.000523088
0.7 0.00022886 3.0607e-05 0.000523088
0.84 0.000190717 3.40975e-05 0.000523088
1.12 0.000143038 4.16096e-05 0.000523088
1.4 0.00011443 4.97806e-05 0.000523088
1.68 0 0.000153908 0.000523088
END DIST

Metal 4 RESOVER
WIDTH Table 1 entries:  0.3

Metal 4 RESOVER 0
DIST count 55 width 0.3
0 0 0 0.000188552
0 0.38 0 0.000188552
0 0.68 0 0.000188552
0 0.91 0 0.000188552
0 1.06 0 0.000188552
0 1.36 0 0.000188552
0 1.59 0 0.000188552
0 1.74 0 0.000188552
0 2.04 0 0.000188552
0 2.72 0 0.000188552
0.38 0.38 0 0.000188552
0.38 0.68 0 0.000188552
0.38 0.91 0 0.000188552
0.38 1.06 0 0.000188552
0.38 1.36 0 0.000188552
0.38 1.59 0 0.000188552
0.38 1.74 0 0.000188552
0.38 2.04 0 0.000188552
0.38 2.72 0 0.000188552
0.68 0.68 0 0.000188552
0.68 0.91 0 0.000188552
0.68 1.06 0 0.000188552
0.68 1.36 0 0.000188552
0.68 1.59 0 0.000188552
0.68 1.74 0 0.000188552
0.68 2.04 0 0.000188552
0.68 2.72 0 0.000188552
0.91 0.91 0 0.000188552
0.91 1.06 0 0.000188552
0.91 1.36 0 0.000188552
0.91 1.59 0 0.000188552
0.91 1.74 0 0.000188552
0.91 2.04 0 0.000188552
0.91 2.72 0 0.000188552
1.06 1.06 0 0.000188552
1.06 1.36 0 0.000188552
1.06 1.59 0 0.000188552
1.06 1.74 0 0.000188552
1.06 2.04 0 0.000188552
1.06 2.72 0 0.000188552
1.36 1.36 0 0.000188552
1.36 1.59 0 0.000188552
1.36 1.74 0 0.000188552
1.36 2.04 0 0.000188552
1.36 2.72 0 0.000188552
1.59 1.59 0 0.000188552
1.59 1.74 0 0.000188552
1.59 2.04 0 0.000188552
1.59 2.72 0 0.000188552
1.74 1.74 0 0.000188552
1.74 2.04 0 0.000188552
1.74 2.72 0 0.000188552
2.04 2.04 0 0.000188552
2.04 2.72 0 0.000188552
2.72 0 2.72 0.000188552
END DIST

Metal 4 RESOVER 1
DIST count 0 width 0.3
END DIST

Metal 4 RESOVER 2
DIST count 0 width 0.3
END DIST

Metal 4 RESOVER 3
DIST count 0 width 0.3
END DIST

Metal 4 OVER
WIDTH Table 1 entries:  0.3

Metal 4 OVER 0
DIST count 12 width 0.3
0.3 0.00060575 5.45333e-06 9.42761e-05
0.6 0.000339288 7.95151e-06 9.42761e-05
0.75 0.000280037 9.19589e-06 9.42761e-05
0.9 0.000238815 1.0436e-05 9.42761e-05
1.05 0.00020837 1.16709e-05 9.42761e-05
1.2 0.000184914 1.28999e-05 9.42761e-05
1.35 0.000166264 1.41221e-05 9.42761e-05
1.5 0.000151067 1.53366e-05 9.42761e-05
1.8 0.000127774 1.77392e-05 9.42761e-05
2.4 9.7732e-05 2.24165e-05 9.42761e-05
3 7.91616e-05 2.68805e-05 9.42761e-05
3.6 0 9.76165e-05 9.42761e-05
END DIST

Metal 4 OVER 1
DIST count 12 width 0.3
0.3 0.00060575 1.06298e-05 9.42761e-05
0.6 0.000339288 1.50995e-05 9.42761e-05
0.75 0.000280037 1.74665e-05 9.42761e-05
0.9 0.000238815 1.99155e-05 9.42761e-05
1.05 0.00020837 2.2442e-05 9.42761e-05
1.2 0.000184914 2.50418e-05 9.42761e-05
1.35 0.000166264 2.77118e-05 9.42761e-05
1.5 0.000151067 3.04451e-05 9.42761e-05
1.8 0.000127774 3.60861e-05 9.42761e-05
2.4 9.7732e-05 4.7906e-05 9.42761e-05
3 7.91616e-05 6.01396e-05 9.42761e-05
3.6 0 0.000138934 9.42761e-05
END DIST

Metal 4 OVER 2
DIST count 12 width 0.3
0.3 0.00060575 1.429e-05 9.42761e-05
0.6 0.000339288 1.919e-05 9.42761e-05
0.75 0.000280037 2.1801e-05 9.42761e-05
0.9 0.000238815 2.4516e-05 9.42761e-05
1.05 0.00020837 2.73274e-05 9.42761e-05
1.2 0.000184914 3.02325e-05 9.42761e-05
1.35 0.000166264 3.32238e-05 9.42761e-05
1.5 0.000151067 3.62949e-05 9.42761e-05
1.8 0.000127774 4.26593e-05 9.42761e-05
2.4 9.7732e-05 5.6089e-05 9.42761e-05
3 7.91616e-05 7.00844e-05 9.42761e-05
3.6 0 0.000150715 9.42761e-05
END DIST

Metal 4 OVER 3
DIST count 12 width 0.3
0.3 0.00060575 2.48046e-05 9.42761e-05
0.6 0.000339288 3.05917e-05 9.42761e-05
0.75 0.000280037 3.37117e-05 9.42761e-05
0.9 0.000238815 3.69724e-05 9.42761e-05
1.05 0.00020837 4.03681e-05 9.42761e-05
1.2 0.000184914 4.38924e-05 9.42761e-05
1.35 0.000166264 4.75395e-05 9.42761e-05
1.5 0.000151067 5.13009e-05 9.42761e-05
1.8 0.000127774 5.91333e-05 9.42761e-05
2.4 9.7732e-05 7.58044e-05 9.42761e-05
3 7.91616e-05 9.33314e-05 9.42761e-05
3.6 0 0.000177628 9.42761e-05
END DIST

Metal 4 UNDER
WIDTH Table 1 entries:  0.3

Metal 4 UNDER 5
DIST count 12 width 0.3
0.3 0.00060575 2.83591e-05 9.42761e-05
0.6 0.000339288 3.34941e-05 9.42761e-05
0.75 0.000280037 3.62297e-05 9.42761e-05
0.9 0.000238815 3.90696e-05 9.42761e-05
1.05 0.00020837 4.20098e-05 9.42761e-05
1.2 0.000184914 4.50448e-05 9.42761e-05
1.35 0.000166264 4.81677e-05 9.42761e-05
1.5 0.000151067 5.13727e-05 9.42761e-05
1.8 0.000127774 5.8006e-05 9.42761e-05
2.4 9.7732e-05 7.1972e-05 9.42761e-05
3 7.91616e-05 8.64836e-05 9.42761e-05
3.6 0 0.000167588 9.42761e-05
END DIST

Metal 4 UNDER 6
DIST count 12 width 0.3
0.3 0.00060575 1.60811e-05 9.42761e-05
0.6 0.000339288 2.08214e-05 9.42761e-05
0.75 0.000280037 2.32764e-05 9.42761e-05
0.9 0.000238815 2.57825e-05 9.42761e-05
1.05 0.00020837 2.83354e-05 9.42761e-05
1.2 0.000184914 3.09307e-05 9.42761e-05
1.35 0.000166264 3.35636e-05 9.42761e-05
1.5 0.000151067 3.62298e-05 9.42761e-05
1.8 0.000127774 4.16414e-05 9.42761e-05
2.4 9.7732e-05 5.26441e-05 9.42761e-05
3 7.91616e-05 6.36109e-05 9.42761e-05
3.6 0 0.000140743 9.42761e-05
END DIST

Metal 4 DIAGUNDER
WIDTH Table 1 entries:  0.3

Metal 4 DIAGUNDER 5
DIST count 13 width 0.3
0 0 2.54636e-05 9.42761e-05
0.3 0 1.37588e-05 9.42761e-05
0.6 0 1.36833e-05 9.42761e-05
0.75 0 1.36314e-05 9.42761e-05
0.9 0 1.35703e-05 9.42761e-05
1.05 0 1.34998e-05 9.42761e-05
1.2 0 1.342e-05 9.42761e-05
1.35 0 1.33311e-05 9.42761e-05
1.5 0 1.3233e-05 9.42761e-05
1.8 0 1.30097e-05 9.42761e-05
2.4 0 1.24569e-05 9.42761e-05
3 0 1.17676e-05 9.42761e-05
3.6 0 1.09494e-05 9.42761e-05
END DIST

Metal 4 DIAGUNDER 6
DIST count 13 width 0.3
0 0 1.96614e-05 9.42761e-05
0.3 0 2.28449e-05 9.42761e-05
0.6 0 2.26187e-05 9.42761e-05
0.75 0 2.24823e-05 9.42761e-05
0.9 0 2.23305e-05 9.42761e-05
1.05 0 2.21633e-05 9.42761e-05
1.2 0 2.1981e-05 9.42761e-05
1.35 0 2.17836e-05 9.42761e-05
1.5 0 2.15713e-05 9.42761e-05
1.8 0 2.11025e-05 9.42761e-05
2.4 0 1.99928e-05 9.42761e-05
3 0 1.8664e-05 9.42761e-05
3.6 0 1.71307e-05 9.42761e-05
END DIST

Metal 4 OVERUNDER
WIDTH Table 1 entries:  0.3

Metal 4 OVER 1 UNDER 5
DIST count 12 width 0.3
0.3 0.00060575 3.35355e-05 9.42761e-05
0.6 0.000339288 4.06421e-05 9.42761e-05
0.75 0.000280037 4.45003e-05 9.42761e-05
0.9 0.000238815 4.85492e-05 9.42761e-05
1.05 0.00020837 5.27808e-05 9.42761e-05
1.2 0.000184914 5.71867e-05 9.42761e-05
1.35 0.000166264 6.17573e-05 9.42761e-05
1.5 0.000151067 6.64812e-05 9.42761e-05
1.8 0.000127774 7.63529e-05 9.42761e-05
2.4 9.7732e-05 9.74615e-05 9.42761e-05
3 7.91616e-05 0.000119743 9.42761e-05
3.6 0 0.000208905 9.42761e-05
END DIST

Metal 4 OVER 1 UNDER 6
DIST count 12 width 0.3
0.3 0.00060575 2.12575e-05 9.42761e-05
0.6 0.000339288 2.79694e-05 9.42761e-05
0.75 0.000280037 3.15469e-05 9.42761e-05
0.9 0.000238815 3.5262e-05 9.42761e-05
1.05 0.00020837 3.91064e-05 9.42761e-05
1.2 0.000184914 4.30726e-05 9.42761e-05
1.35 0.000166264 4.71533e-05 9.42761e-05
1.5 0.000151067 5.13383e-05 9.42761e-05
1.8 0.000127774 5.99883e-05 9.42761e-05
2.4 9.7732e-05 7.81336e-05 9.42761e-05
3 7.91616e-05 9.687e-05 9.42761e-05
3.6 0 0.00018206 9.42761e-05
END DIST

Metal 4 OVER 2 UNDER 5
DIST count 12 width 0.3
0.3 0.00060575 3.71957e-05 9.42761e-05
0.6 0.000339288 4.47326e-05 9.42761e-05
0.75 0.000280037 4.88349e-05 9.42761e-05
0.9 0.000238815 5.31496e-05 9.42761e-05
1.05 0.00020837 5.76663e-05 9.42761e-05
1.2 0.000184914 6.23774e-05 9.42761e-05
1.35 0.000166264 6.72694e-05 9.42761e-05
1.5 0.000151067 7.23311e-05 9.42761e-05
1.8 0.000127774 8.29261e-05 9.42761e-05
2.4 9.7732e-05 0.000105645 9.42761e-05
3 7.91616e-05 0.000129688 9.42761e-05
3.6 0 0.000220687 9.42761e-05
END DIST

Metal 4 OVER 2 UNDER 6
DIST count 12 width 0.3
0.3 0.00060575 2.49177e-05 9.42761e-05
0.6 0.000339288 3.20599e-05 9.42761e-05
0.75 0.000280037 3.58815e-05 9.42761e-05
0.9 0.000238815 3.98625e-05 9.42761e-05
1.05 0.00020837 4.39919e-05 9.42761e-05
1.2 0.000184914 4.82633e-05 9.42761e-05
1.35 0.000166264 5.26653e-05 9.42761e-05
1.5 0.000151067 5.71881e-05 9.42761e-05
1.8 0.000127774 6.65615e-05 9.42761e-05
2.4 9.7732e-05 8.63166e-05 9.42761e-05
3 7.91616e-05 0.000106815 9.42761e-05
3.6 0 0.000193842 9.42761e-05
END DIST

Metal 4 OVER 3 UNDER 5
DIST count 12 width 0.3
0.3 0.00060575 4.77103e-05 9.42761e-05
0.6 0.000339288 5.61343e-05 9.42761e-05
0.75 0.000280037 6.07456e-05 9.42761e-05
0.9 0.000238815 6.5606e-05 9.42761e-05
1.05 0.00020837 7.0707e-05 9.42761e-05
1.2 0.000184914 7.60372e-05 9.42761e-05
1.35 0.000166264 8.15851e-05 9.42761e-05
1.5 0.000151067 8.73371e-05 9.42761e-05
1.8 0.000127774 9.94001e-05 9.42761e-05
2.4 9.7732e-05 0.00012536 9.42761e-05
3 7.91616e-05 0.000152935 9.42761e-05
3.6 0 0.0002476 9.42761e-05
END DIST

Metal 4 OVER 3 UNDER 6
DIST count 12 width 0.3
0.3 0.00060575 3.54323e-05 9.42761e-05
0.6 0.000339288 4.34616e-05 9.42761e-05
0.75 0.000280037 4.77922e-05 9.42761e-05
0.9 0.000238815 5.23189e-05 9.42761e-05
1.05 0.00020837 5.70326e-05 9.42761e-05
1.2 0.000184914 6.19231e-05 9.42761e-05
1.35 0.000166264 6.6981e-05 9.42761e-05
1.5 0.000151067 7.21941e-05 9.42761e-05
1.8 0.000127774 8.30356e-05 9.42761e-05
2.4 9.7732e-05 0.000106032 9.42761e-05
3 7.91616e-05 0.000130062 9.42761e-05
3.6 0 0.000220755 9.42761e-05
END DIST

Metal 5 RESOVER
WIDTH Table 1 entries:  0.3

Metal 5 RESOVER 0
DIST count 55 width 0.3
0 0 0 0.000188552
0 0.62 0 0.000188552
0 0.92 0 0.000188552
0 1.39 0 0.000188552
0 1.54 0 0.000188552
0 1.84 0 0.000188552
0 2.31 0 0.000188552
0 2.46 0 0.000188552
0 2.76 0 0.000188552
0 3.68 0 0.000188552
0.62 0.62 0 0.000188552
0.62 0.92 0 0.000188552
0.62 1.39 0 0.000188552
0.62 1.54 0 0.000188552
0.62 1.84 0 0.000188552
0.62 2.31 0 0.000188552
0.62 2.46 0 0.000188552
0.62 2.76 0 0.000188552
0.62 3.68 0 0.000188552
0.92 0.92 0 0.000188552
0.92 1.39 0 0.000188552
0.92 1.54 0 0.000188552
0.92 1.84 0 0.000188552
0.92 2.31 0 0.000188552
0.92 2.46 0 0.000188552
0.92 2.76 0 0.000188552
0.92 3.68 0 0.000188552
1.39 1.39 0 0.000188552
1.39 1.54 0 0.000188552
1.39 1.84 0 0.000188552
1.39 2.31 0 0.000188552
1.39 2.46 0 0.000188552
1.39 2.76 0 0.000188552
1.39 3.68 0 0.000188552
1.54 1.54 0 0.000188552
1.54 1.84 0 0.000188552
1.54 2.31 0 0.000188552
1.54 2.46 0 0.000188552
1.54 2.76 0 0.000188552
1.54 3.68 0 0.000188552
1.84 1.84 0 0.000188552
1.84 2.31 0 0.000188552
1.84 2.46 0 0.000188552
1.84 2.76 0 0.000188552
1.84 3.68 0 0.000188552
2.31 2.31 0 0.000188552
2.31 2.46 0 0.000188552
2.31 2.76 0 0.000188552
2.31 3.68 0 0.000188552
2.46 2.46 0 0.000188552
2.46 2.76 0 0.000188552
2.46 3.68 0 0.000188552
2.76 2.76 0 0.000188552
2.76 3.68 0 0.000188552
3.68 0 3.68 0.000188552
END DIST

Metal 5 RESOVER 1
DIST count 0 width 0.3
END DIST

Metal 5 RESOVER 2
DIST count 0 width 0.3
END DIST

Metal 5 RESOVER 3
DIST count 0 width 0.3
END DIST

Metal 5 RESOVER 4
DIST count 0 width 0.3
END DIST

Metal 5 OVER
WIDTH Table 1 entries:  0.3

Metal 5 OVER 0
DIST count 12 width 0.3
0.3 0.00083771 4.29125e-06 9.42761e-05
0.6 0.000418855 6.52685e-06 9.42761e-05
0.75 0.000335084 7.64042e-06 9.42761e-05
0.9 0.000279237 8.75017e-06 9.42761e-05
1.05 0.000239346 9.85534e-06 9.42761e-05
1.2 0.000209428 1.09551e-05 9.42761e-05
1.35 0.000186158 1.20488e-05 9.42761e-05
1.5 0.000167542 1.31357e-05 9.42761e-05
1.8 0.000139618 1.52858e-05 9.42761e-05
2.4 0.000104714 1.94714e-05 9.42761e-05
3 8.3771e-05 2.34662e-05 9.42761e-05
3.6 0 9.70355e-05 9.42761e-05
END DIST

Metal 5 OVER 1
DIST count 12 width 0.3
0.3 0.00083771 8.04593e-06 9.42761e-05
0.6 0.000418855 1.22111e-05 9.42761e-05
0.75 0.000335084 1.43952e-05 9.42761e-05
0.9 0.000279237 1.66407e-05 9.42761e-05
1.05 0.000239346 1.8944e-05 9.42761e-05
1.2 0.000209428 2.13031e-05 9.42761e-05
1.35 0.000186158 2.37106e-05 9.42761e-05
1.5 0.000167542 2.61642e-05 9.42761e-05
1.8 0.000139618 3.11916e-05 9.42761e-05
2.4 0.000104714 4.15865e-05 9.42761e-05
3 8.3771e-05 5.21722e-05 9.42761e-05
3.6 0 0.000132424 9.42761e-05
END DIST

Metal 5 OVER 2
DIST count 12 width 0.3
0.3 0.00083771 9.34687e-06 9.42761e-05
0.6 0.000418855 1.36826e-05 9.42761e-05
0.75 0.000335084 1.59613e-05 9.42761e-05
0.9 0.000279237 1.83086e-05 9.42761e-05
1.05 0.000239346 2.07217e-05 9.42761e-05
1.2 0.000209428 2.31943e-05 9.42761e-05
1.35 0.000186158 2.57222e-05 9.42761e-05
1.5 0.000167542 2.8301e-05 9.42761e-05
1.8 0.000139618 3.35945e-05 9.42761e-05
2.4 0.000104714 4.4573e-05 9.42761e-05
3 8.3771e-05 5.57834e-05 9.42761e-05
3.6 0 0.00013668 9.42761e-05
END DIST

Metal 5 OVER 3
DIST count 12 width 0.3
0.3 0.00083771 1.09631e-05 9.42761e-05
0.6 0.000418855 1.55315e-05 9.42761e-05
0.75 0.000335084 1.79402e-05 9.42761e-05
0.9 0.000279237 2.04264e-05 9.42761e-05
1.05 0.000239346 2.29848e-05 9.42761e-05
1.2 0.000209428 2.56098e-05 9.42761e-05
1.35 0.000186158 2.82985e-05 9.42761e-05
1.5 0.000167542 3.10436e-05 9.42761e-05
1.8 0.000139618 3.6687e-05 9.42761e-05
2.4 0.000104714 4.84199e-05 9.42761e-05
3 8.3771e-05 6.04359e-05 9.42761e-05
3.6 0 0.000142147 9.42761e-05
END DIST

Metal 5 OVER 4
DIST count 12 width 0.3
0.3 0.00083771 2.50977e-05 9.42761e-05
0.6 0.000418855 3.17752e-05 9.42761e-05
0.75 0.000335084 3.53384e-05 9.42761e-05
0.9 0.000279237 3.90425e-05 9.42761e-05
1.05 0.000239346 4.28795e-05 9.42761e-05
1.2 0.000209428 4.68402e-05 9.42761e-05
1.35 0.000186158 5.09173e-05 9.42761e-05
1.5 0.000167542 5.51005e-05 9.42761e-05
1.8 0.000139618 6.37491e-05 9.42761e-05
2.4 0.000104714 8.19042e-05 9.42761e-05
3 8.3771e-05 0.000100649 9.42761e-05
3.6 0 0.000189104 9.42761e-05
END DIST

Metal 5 UNDER
WIDTH Table 1 entries:  0.3

Metal 5 UNDER 6
DIST count 12 width 0.3
0.3 0.00083771 2.80166e-05 9.42761e-05
0.6 0.000418855 3.46594e-05 9.42761e-05
0.75 0.000335084 3.81183e-05 9.42761e-05
0.9 0.000279237 4.16593e-05 9.42761e-05
1.05 0.000239346 4.5275e-05 9.42761e-05
1.2 0.000209428 4.89578e-05 9.42761e-05
1.35 0.000186158 5.26998e-05 9.42761e-05
1.5 0.000167542 5.64929e-05 9.42761e-05
1.8 0.000139618 6.42003e-05 9.42761e-05
2.4 0.000104714 7.98625e-05 9.42761e-05
3 8.3771e-05 9.5397e-05 9.42761e-05
3.6 0 0.000180065 9.42761e-05
END DIST

Metal 5 DIAGUNDER
WIDTH Table 1 entries:  0.3

Metal 5 DIAGUNDER 6
DIST count 13 width 0.3
0 0 4.55189e-05 9.42761e-05
0.3 0 4.02875e-05 9.42761e-05
0.6 0 3.98838e-05 9.42761e-05
0.75 0 3.96411e-05 9.42761e-05
0.9 0 3.9371e-05 9.42761e-05
1.05 0 3.90741e-05 9.42761e-05
1.2 0 3.87502e-05 9.42761e-05
1.35 0 3.83997e-05 9.42761e-05
1.5 0 3.80229e-05 9.42761e-05
1.8 0 3.71916e-05 9.42761e-05
2.4 0 3.52259e-05 9.42761e-05
3 0 3.28741e-05 9.42761e-05
3.6 0 3.01622e-05 9.42761e-05
END DIST

Metal 5 OVERUNDER
WIDTH Table 1 entries:  0.3

Metal 5 OVER 1 UNDER 6
DIST count 12 width 0.3
0.3 0.00083771 3.17713e-05 9.42761e-05
0.6 0.000418855 4.03437e-05 9.42761e-05
0.75 0.000335084 4.48731e-05 9.42761e-05
0.9 0.000279237 4.95498e-05 9.42761e-05
1.05 0.000239346 5.43637e-05 9.42761e-05
1.2 0.000209428 5.93057e-05 9.42761e-05
1.35 0.000186158 6.43616e-05 9.42761e-05
1.5 0.000167542 6.95214e-05 9.42761e-05
1.8 0.000139618 8.0106e-05 9.42761e-05
2.4 0.000104714 0.000101978 9.42761e-05
3 8.3771e-05 0.000124103 9.42761e-05
3.6 0 0.000215454 9.42761e-05
END DIST

Metal 5 OVER 2 UNDER 6
DIST count 12 width 0.3
0.3 0.00083771 3.30723e-05 9.42761e-05
0.6 0.000418855 4.18152e-05 9.42761e-05
0.75 0.000335084 4.64392e-05 9.42761e-05
0.9 0.000279237 5.12177e-05 9.42761e-05
1.05 0.000239346 5.61414e-05 9.42761e-05
1.2 0.000209428 6.11969e-05 9.42761e-05
1.35 0.000186158 6.63731e-05 9.42761e-05
1.5 0.000167542 7.16582e-05 9.42761e-05
1.8 0.000139618 8.25089e-05 9.42761e-05
2.4 0.000104714 0.000104964 9.42761e-05
3 8.3771e-05 0.000127714 9.42761e-05
3.6 0 0.000219709 9.42761e-05
END DIST

Metal 5 OVER 3 UNDER 6
DIST count 12 width 0.3
0.3 0.00083771 3.46885e-05 9.42761e-05
0.6 0.000418855 4.36641e-05 9.42761e-05
0.75 0.000335084 4.8418e-05 9.42761e-05
0.9 0.000279237 5.33356e-05 9.42761e-05
1.05 0.000239346 5.84045e-05 9.42761e-05
1.2 0.000209428 6.36125e-05 9.42761e-05
1.35 0.000186158 6.89495e-05 9.42761e-05
1.5 0.000167542 7.44008e-05 9.42761e-05
1.8 0.000139618 8.56015e-05 9.42761e-05
2.4 0.000104714 0.000108811 9.42761e-05
3 8.3771e-05 0.000132367 9.42761e-05
3.6 0 0.000225177 9.42761e-05
END DIST

Metal 5 OVER 4 UNDER 6
DIST count 12 width 0.3
0.3 0.00083771 4.88231e-05 9.42761e-05
0.6 0.000418855 5.99078e-05 9.42761e-05
0.75 0.000335084 6.58163e-05 9.42761e-05
0.9 0.000279237 7.19517e-05 9.42761e-05
1.05 0.000239346 7.82992e-05 9.42761e-05
1.2 0.000209428 8.48429e-05 9.42761e-05
1.35 0.000186158 9.15683e-05 9.42761e-05
1.5 0.000167542 9.84578e-05 9.42761e-05
1.8 0.000139618 0.000112664 9.42761e-05
2.4 0.000104714 0.000142295 9.42761e-05
3 8.3771e-05 0.00017258 9.42761e-05
3.6 0 0.000272133 9.42761e-05
END DIST

Metal 6 RESOVER
WIDTH Table 1 entries:  1.6

Metal 6 RESOVER 0
DIST count 55 width 1.6
0 0 0 2.27273e-05
0 1.8 0 2.27273e-05
0 3.4 0 2.27273e-05
0 4.4 0 2.27273e-05
0 5.2 0 2.27273e-05
0 6.8 0 2.27273e-05
0 7.8 0 2.27273e-05
0 8.6 0 2.27273e-05
0 10.2 0 2.27273e-05
0 13.6 0 2.27273e-05
1.8 1.8 0 2.27273e-05
1.8 3.4 0 2.27273e-05
1.8 4.4 0 2.27273e-05
1.8 5.2 0 2.27273e-05
1.8 6.8 0 2.27273e-05
1.8 7.8 0 2.27273e-05
1.8 8.6 0 2.27273e-05
1.8 10.2 0 2.27273e-05
1.8 13.6 0 2.27273e-05
3.4 3.4 0 2.27273e-05
3.4 4.4 0 2.27273e-05
3.4 5.2 0 2.27273e-05
3.4 6.8 0 2.27273e-05
3.4 7.8 0 2.27273e-05
3.4 8.6 0 2.27273e-05
3.4 10.2 0 2.27273e-05
3.4 13.6 0 2.27273e-05
4.4 4.4 0 2.27273e-05
4.4 5.2 0 2.27273e-05
4.4 6.8 0 2.27273e-05
4.4 7.8 0 2.27273e-05
4.4 8.6 0 2.27273e-05
4.4 10.2 0 2.27273e-05
4.4 13.6 0 2.27273e-05
5.2 5.2 0 2.27273e-05
5.2 6.8 0 2.27273e-05
5.2 7.8 0 2.27273e-05
5.2 8.6 0 2.27273e-05
5.2 10.2 0 2.27273e-05
5.2 13.6 0 2.27273e-05
6.8 6.8 0 2.27273e-05
6.8 7.8 0 2.27273e-05
6.8 8.6 0 2.27273e-05
6.8 10.2 0 2.27273e-05
6.8 13.6 0 2.27273e-05
7.8 7.8 0 2.27273e-05
7.8 8.6 0 2.27273e-05
7.8 10.2 0 2.27273e-05
7.8 13.6 0 2.27273e-05
8.6 8.6 0 2.27273e-05
8.6 10.2 0 2.27273e-05
8.6 13.6 0 2.27273e-05
10.2 10.2 0 2.27273e-05
10.2 13.6 0 2.27273e-05
13.6 0 13.6 2.27273e-05
END DIST

Metal 6 RESOVER 1
DIST count 0 width 1.6
END DIST

Metal 6 RESOVER 2
DIST count 0 width 1.6
END DIST

Metal 6 RESOVER 3
DIST count 0 width 1.6
END DIST

Metal 6 RESOVER 4
DIST count 0 width 1.6
END DIST

Metal 6 RESOVER 5
DIST count 0 width 1.6
END DIST

Metal 6 OVER
WIDTH Table 1 entries:  1.6

Metal 6 OVER 0
DIST count 12 width 1.6
1.6 0.000269949 1.92298e-05 1.13636e-05
3.2 0.000134975 3.07662e-05 1.13636e-05
4 0.00010798 3.58867e-05 1.13636e-05
4.8 8.99832e-05 4.04394e-05 1.13636e-05
5.6 7.71284e-05 4.43359e-05 1.13636e-05
6.4 6.74874e-05 4.74997e-05 1.13636e-05
7.2 5.99888e-05 4.987e-05 1.13636e-05
8 0 5.14003e-05 1.13636e-05
9.6 0 5.20881e-05 1.13636e-05
12.8 0 5.20881e-05 1.13636e-05
16 0 5.20881e-05 1.13636e-05
19.2 0 5.20881e-05 1.13636e-05
END DIST

Metal 6 OVER 1
DIST count 12 width 1.6
1.6 0.000269949 4.58865e-05 1.13636e-05
3.2 0.000134975 7.43371e-05 1.13636e-05
4 0.00010798 8.69636e-05 1.13636e-05
4.8 8.99832e-05 9.81911e-05 1.13636e-05
5.6 7.71284e-05 0.0001078 1.13636e-05
6.4 6.74874e-05 0.000115602 1.13636e-05
7.2 5.99888e-05 0.000121448 1.13636e-05
8 0 0.000125222 1.13636e-05
9.6 0 0.000126918 1.13636e-05
12.8 0 0.000126918 1.13636e-05
16 0 0.000126918 1.13636e-05
19.2 0 0.000126918 1.13636e-05
END DIST

Metal 6 OVER 2
DIST count 12 width 1.6
1.6 0.000269949 5.09353e-05 1.13636e-05
3.2 0.000134975 8.05075e-05 1.13636e-05
4 0.00010798 9.36343e-05 1.13636e-05
4.8 8.99832e-05 0.000105305 1.13636e-05
5.6 7.71284e-05 0.00011529 1.13636e-05
6.4 6.74874e-05 0.000123404 1.13636e-05
7.2 5.99888e-05 0.000129479 1.13636e-05
8 0 0.000133402 1.13636e-05
9.6 0 0.000135164 1.13636e-05
12.8 0 0.000135164 1.13636e-05
16 0 0.000135164 1.13636e-05
19.2 0 0.000135164 1.13636e-05
END DIST

Metal 6 OVER 3
DIST count 12 width 1.6
1.6 0.000269949 5.59222e-05 1.13636e-05
3.2 0.000134975 8.66891e-05 1.13636e-05
4 0.00010798 0.000100347 1.13636e-05
4.8 8.99832e-05 0.000112486 1.13636e-05
5.6 7.71284e-05 0.000122879 1.13636e-05
6.4 6.74874e-05 0.000131318 1.13636e-05
7.2 5.99888e-05 0.000137639 1.13636e-05
8 0 0.000141717 1.13636e-05
9.6 0 0.000143554 1.13636e-05
12.8 0 0.000143554 1.13636e-05
16 0 0.000143554 1.13636e-05
19.2 0 0.000143554 1.13636e-05
END DIST

Metal 6 OVER 4
DIST count 12 width 1.6
1.6 0.000269949 7.59028e-05 1.13636e-05
3.2 0.000134975 0.000111827 1.13636e-05
4 0.00010798 0.000127771 1.13636e-05
4.8 8.99832e-05 0.000141948 1.13636e-05
5.6 7.71284e-05 0.00015408 1.13636e-05
6.4 6.74874e-05 0.000163933 1.13636e-05
7.2 5.99888e-05 0.000171314 1.13636e-05
8 0 0.000176079 1.13636e-05
9.6 0 0.000178221 1.13636e-05
12.8 0 0.000178221 1.13636e-05
16 0 0.000178221 1.13636e-05
19.2 0 0.000178221 1.13636e-05
END DIST

Metal 6 OVER 5
DIST count 12 width 1.6
1.6 0.000269949 0.000150339 1.13636e-05
3.2 0.000134975 0.000205558 1.13636e-05
4 0.00010798 0.000230068 1.13636e-05
4.8 8.99832e-05 0.00025186 1.13636e-05
5.6 7.71284e-05 0.00027051 1.13636e-05
6.4 6.74874e-05 0.000285654 1.13636e-05
7.2 5.99888e-05 0.000297001 1.13636e-05
8 0 0.000304325 1.13636e-05
9.6 0 0.000307616 1.13636e-05
12.8 0 0.000307616 1.13636e-05
16 0 0.000307616 1.13636e-05
19.2 0 0.000307616 1.13636e-05
END DIST

Metal 6 UNDER
WIDTH Table 0 entries: 

Metal 6 DIAGUNDER
WIDTH Table 0 entries: 
END DensityModel 0