sky130/openlane/rules.openrcx.sky130A.max.magic

Extraction Rules for OpenRCX

DIAGMODEL ON

LayerCount 6
DensityRate 1  0

DensityModel 0

Metal 1 RESOVER
WIDTH Table 1 entries:  0.17

Metal 1 RESOVER 0
DIST count 55 width 0.17
0 0 0 0.10101
0 0.29 0 0.10101
0 0.46 0 0.10101
0 0.665 0 0.10101
0 0.75 0 0.10101
0 0.92 0 0.10101
0 1.125 0 0.10101
0 1.21 0 0.10101
0 1.38 0 0.10101
0 1.84 0 0.10101
0.29 0.29 0 0.10101
0.29 0.46 0 0.10101
0.29 0.665 0 0.10101
0.29 0.75 0 0.10101
0.29 0.92 0 0.10101
0.29 1.125 0 0.10101
0.29 1.21 0 0.10101
0.29 1.38 0 0.10101
0.29 1.84 0 0.10101
0.46 0.46 0 0.10101
0.46 0.665 0 0.10101
0.46 0.75 0 0.10101
0.46 0.92 0 0.10101
0.46 1.125 0 0.10101
0.46 1.21 0 0.10101
0.46 1.38 0 0.10101
0.46 1.84 0 0.10101
0.665 0.665 0 0.10101
0.665 0.75 0 0.10101
0.665 0.92 0 0.10101
0.665 1.125 0 0.10101
0.665 1.21 0 0.10101
0.665 1.38 0 0.10101
0.665 1.84 0 0.10101
0.75 0.75 0 0.10101
0.75 0.92 0 0.10101
0.75 1.125 0 0.10101
0.75 1.21 0 0.10101
0.75 1.38 0 0.10101
0.75 1.84 0 0.10101
0.92 0.92 0 0.10101
0.92 1.125 0 0.10101
0.92 1.21 0 0.10101
0.92 1.38 0 0.10101
0.92 1.84 0 0.10101
1.125 1.125 0 0.10101
1.125 1.21 0 0.10101
1.125 1.38 0 0.10101
1.125 1.84 0 0.10101
1.21 1.21 0 0.10101
1.21 1.38 0 0.10101
1.21 1.84 0 0.10101
1.38 1.38 0 0.10101
1.38 1.84 0 0.10101
1.84 0 1.84 0.10101
END DIST

Metal 1 OVER
WIDTH Table 1 entries:  0.17

Metal 1 OVER 0
DIST count 12 width 0.17
0.17 0.000490583 4.46982e-05 0.0505051
0.34 0.000275263 4.46982e-05 0.0505051
0.425 0.000228745 4.46982e-05 0.0505051
0.51 0.000196486 4.46982e-05 0.0505051
0.595 0.000172634 4.46982e-05 0.0505051
0.68 0.000154195 4.46982e-05 0.0505051
0.765 0.000139466 4.46982e-05 0.0505051
0.85 0.000127402 4.46982e-05 0.0505051
1.02 0.000108765 4.46982e-05 0.0505051
1.36 8.43779e-05 4.46982e-05 0.0505051
1.7 3.86334e-05 4.46982e-05 0.0505051
2.04 0 4.46982e-05 0.0505051
END DIST

Metal 1 UNDER
WIDTH Table 1 entries:  0.17

Metal 1 UNDER 2
DIST count 12 width 0.17
0.17 0.000490583 0.000162627 0.0505051
0.34 0.000275263 0.000162627 0.0505051
0.425 0.000228745 0.000162627 0.0505051
0.51 0.000196486 0.000162627 0.0505051
0.595 0.000172634 0.000162627 0.0505051
0.68 0.000154195 0.000162627 0.0505051
0.765 0.000139466 0.000162627 0.0505051
0.85 0.000127402 0.000162627 0.0505051
1.02 0.000108765 0.000162627 0.0505051
1.36 8.43779e-05 0.000162627 0.0505051
1.7 3.86334e-05 0.000162627 0.0505051
2.04 0 0.000162627 0.0505051
END DIST

Metal 1 UNDER 3
DIST count 12 width 0.17
0.17 0.000490583 0.000126665 0.0505051
0.34 0.000275263 0.000126665 0.0505051
0.425 0.000228745 0.000126665 0.0505051
0.51 0.000196486 0.000126665 0.0505051
0.595 0.000172634 0.000126665 0.0505051
0.68 0.000154195 0.000126665 0.0505051
0.765 0.000139466 0.000126665 0.0505051
0.85 0.000127402 0.000126665 0.0505051
1.02 0.000108765 0.000126665 0.0505051
1.36 8.43779e-05 0.000126665 0.0505051
1.7 3.86334e-05 0.000126665 0.0505051
2.04 0 0.000126665 0.0505051
END DIST

Metal 1 UNDER 4
DIST count 12 width 0.17
0.17 0.000490583 8.86819e-05 0.0505051
0.34 0.000275263 8.86819e-05 0.0505051
0.425 0.000228745 8.86819e-05 0.0505051
0.51 0.000196486 8.86819e-05 0.0505051
0.595 0.000172634 8.86819e-05 0.0505051
0.68 0.000154195 8.86819e-05 0.0505051
0.765 0.000139466 8.86819e-05 0.0505051
0.85 0.000127402 8.86819e-05 0.0505051
1.02 0.000108765 8.86819e-05 0.0505051
1.36 8.43779e-05 8.86819e-05 0.0505051
1.7 3.86334e-05 8.86819e-05 0.0505051
2.04 0 8.86819e-05 0.0505051
END DIST

Metal 1 UNDER 5
DIST count 12 width 0.17
0.17 0.000490583 7.88561e-05 0.0505051
0.34 0.000275263 7.88561e-05 0.0505051
0.425 0.000228745 7.88561e-05 0.0505051
0.51 0.000196486 7.88561e-05 0.0505051
0.595 0.000172634 7.88561e-05 0.0505051
0.68 0.000154195 7.88561e-05 0.0505051
0.765 0.000139466 7.88561e-05 0.0505051
0.85 0.000127402 7.88561e-05 0.0505051
1.02 0.000108765 7.88561e-05 0.0505051
1.36 8.43779e-05 7.88561e-05 0.0505051
1.7 3.86334e-05 7.88561e-05 0.0505051
2.04 0 7.88561e-05 0.0505051
END DIST

Metal 1 UNDER 6
DIST count 12 width 0.17
0.17 0.000490583 5.79102e-05 0.0505051
0.34 0.000275263 5.79102e-05 0.0505051
0.425 0.000228745 5.79102e-05 0.0505051
0.51 0.000196486 5.79102e-05 0.0505051
0.595 0.000172634 5.79102e-05 0.0505051
0.68 0.000154195 5.79102e-05 0.0505051
0.765 0.000139466 5.79102e-05 0.0505051
0.85 0.000127402 5.79102e-05 0.0505051
1.02 0.000108765 5.79102e-05 0.0505051
1.36 8.43779e-05 5.79102e-05 0.0505051
1.7 3.86334e-05 5.79102e-05 0.0505051
2.04 0 5.79102e-05 0.0505051
END DIST

Metal 1 DIAGUNDER
WIDTH Table 1 entries:  0.17

Metal 1 DIAGUNDER 2
DIST count 13 width 0.17
0 0 7.62507e-05 0.0505051
0.17 0 0 0.0505051
0.34 0 0 0.0505051
0.425 0 0 0.0505051
0.51 0 0 0.0505051
0.595 0 0 0.0505051
0.68 0 0 0.0505051
0.765 0 0 0.0505051
0.85 0 0 0.0505051
1.02 0 0 0.0505051
1.36 0 0 0.0505051
1.7 0 0 0.0505051
2.04 0 0 0.0505051
END DIST

Metal 1 DIAGUNDER 3
DIST count 13 width 0.17
0 0 5.2059e-05 0.0505051
0.17 0 0 0.0505051
0.34 0 0 0.0505051
0.425 0 0 0.0505051
0.51 0 0 0.0505051
0.595 0 0 0.0505051
0.68 0 0 0.0505051
0.765 0 0 0.0505051
0.85 0 0 0.0505051
1.02 0 0 0.0505051
1.36 0 0 0.0505051
1.7 0 0 0.0505051
2.04 0 0 0.0505051
END DIST

Metal 1 DIAGUNDER 4
DIST count 13 width 0.17
0 0 1.88023e-05 0.0505051
0.17 0 0 0.0505051
0.34 0 0 0.0505051
0.425 0 0 0.0505051
0.51 0 0 0.0505051
0.595 0 0 0.0505051
0.68 0 0 0.0505051
0.765 0 0 0.0505051
0.85 0 0 0.0505051
1.02 0 0 0.0505051
1.36 0 0 0.0505051
1.7 0 0 0.0505051
2.04 0 0 0.0505051
END DIST

Metal 1 DIAGUNDER 5
DIST count 13 width 0.17
0 0 1.22463e-05 0.0505051
0.17 0 0 0.0505051
0.34 0 0 0.0505051
0.425 0 0 0.0505051
0.51 0 0 0.0505051
0.595 0 0 0.0505051
0.68 0 0 0.0505051
0.765 0 0 0.0505051
0.85 0 0 0.0505051
1.02 0 0 0.0505051
1.36 0 0 0.0505051
1.7 0 0 0.0505051
2.04 0 0 0.0505051
END DIST

Metal 1 DIAGUNDER 6
DIST count 0 width 0.17
END DIST

Metal 2 RESOVER
WIDTH Table 1 entries:  0.14

Metal 2 RESOVER 0
DIST count 55 width 0.14
0 0 0 0.00104618
0 0.2 0 0.00104618
0 0.34 0 0.00104618
0 0.47 0 0.00104618
0 0.54 0 0.00104618
0 0.68 0 0.00104618
0 0.81 0 0.00104618
0 0.88 0 0.00104618
0 1.02 0 0.00104618
0 1.36 0 0.00104618
0.2 0.2 0 0.00104618
0.2 0.34 0 0.00104618
0.2 0.47 0 0.00104618
0.2 0.54 0 0.00104618
0.2 0.68 0 0.00104618
0.2 0.81 0 0.00104618
0.2 0.88 0 0.00104618
0.2 1.02 0 0.00104618
0.2 1.36 0 0.00104618
0.34 0.34 0 0.00104618
0.34 0.47 0 0.00104618
0.34 0.54 0 0.00104618
0.34 0.68 0 0.00104618
0.34 0.81 0 0.00104618
0.34 0.88 0 0.00104618
0.34 1.02 0 0.00104618
0.34 1.36 0 0.00104618
0.47 0.47 0 0.00104618
0.47 0.54 0 0.00104618
0.47 0.68 0 0.00104618
0.47 0.81 0 0.00104618
0.47 0.88 0 0.00104618
0.47 1.02 0 0.00104618
0.47 1.36 0 0.00104618
0.54 0.54 0 0.00104618
0.54 0.68 0 0.00104618
0.54 0.81 0 0.00104618
0.54 0.88 0 0.00104618
0.54 1.02 0 0.00104618
0.54 1.36 0 0.00104618
0.68 0.68 0 0.00104618
0.68 0.81 0 0.00104618
0.68 0.88 0 0.00104618
0.68 1.02 0 0.00104618
0.68 1.36 0 0.00104618
0.81 0.81 0 0.00104618
0.81 0.88 0 0.00104618
0.81 1.02 0 0.00104618
0.81 1.36 0 0.00104618
0.88 0.88 0 0.00104618
0.88 1.02 0 0.00104618
0.88 1.36 0 0.00104618
1.02 1.02 0 0.00104618
1.02 1.36 0 0.00104618
1.36 0 1.36 0.00104618
END DIST

Metal 2 RESOVER 1
DIST count 0 width 0.14
END DIST

Metal 2 OVER
WIDTH Table 1 entries:  0.14

Metal 2 OVER 0
DIST count 12 width 0.14
0.14 0.000833899 4.32125e-05 0.000523088
0.28 0.00046858 4.32125e-05 0.000523088
0.35 0.000389231 4.32125e-05 0.000523088
0.42 0.000334125 4.32125e-05 0.000523088
0.49 0.000293354 4.32125e-05 0.000523088
0.56 0.000261826 4.32125e-05 0.000523088
0.63 0.000236646 4.32125e-05 0.000523088
0.7 0.000216027 4.32125e-05 0.000523088
0.84 0.000184196 4.32125e-05 0.000523088
1.12 0.000142607 4.32125e-05 0.000523088
1.4 0.000116505 4.32125e-05 0.000523088
1.68 0 9.70123e-05 0.000523088
END DIST

Metal 2 OVER 1
DIST count 12 width 0.14
0.14 0.000833899 0.000119325 0.000523088
0.28 0.00046858 0.000119325 0.000523088
0.35 0.000389231 0.000119325 0.000523088
0.42 0.000334125 0.000119325 0.000523088
0.49 0.000293354 0.000119325 0.000523088
0.56 0.000261826 0.000119325 0.000523088
0.63 0.000236646 0.000119325 0.000523088
0.7 0.000216027 0.000119325 0.000523088
0.84 0.000184196 0.000119325 0.000523088
1.12 0.000142607 0.000119325 0.000523088
1.4 0.000116505 0.000119325 0.000523088
1.68 0 0.000173125 0.000523088
END DIST

Metal 2 UNDER
WIDTH Table 1 entries:  0.14

Metal 2 UNDER 3
DIST count 12 width 0.14
0.14 0.000833899 0.000170055 0.000523088
0.28 0.00046858 0.000170055 0.000523088
0.35 0.000389231 0.000170055 0.000523088
0.42 0.000334125 0.000170055 0.000523088
0.49 0.000293354 0.000170055 0.000523088
0.56 0.000261826 0.000170055 0.000523088
0.63 0.000236646 0.000170055 0.000523088
0.7 0.000216027 0.000170055 0.000523088
0.84 0.000184196 0.000170055 0.000523088
1.12 0.000142607 0.000170055 0.000523088
1.4 0.000116505 0.000170055 0.000523088
1.68 0 0.000223855 0.000523088
END DIST

Metal 2 UNDER 4
DIST count 12 width 0.14
0.14 0.000833899 9.76525e-05 0.000523088
0.28 0.00046858 9.76525e-05 0.000523088
0.35 0.000389231 9.76525e-05 0.000523088
0.42 0.000334125 9.76525e-05 0.000523088
0.49 0.000293354 9.76525e-05 0.000523088
0.56 0.000261826 9.76525e-05 0.000523088
0.63 0.000236646 9.76525e-05 0.000523088
0.7 0.000216027 9.76525e-05 0.000523088
0.84 0.000184196 9.76525e-05 0.000523088
1.12 0.000142607 9.76525e-05 0.000523088
1.4 0.000116505 9.76525e-05 0.000523088
1.68 0 0.000151452 0.000523088
END DIST

Metal 2 UNDER 5
DIST count 12 width 0.14
0.14 0.000833899 8.03842e-05 0.000523088
0.28 0.00046858 8.03842e-05 0.000523088
0.35 0.000389231 8.03842e-05 0.000523088
0.42 0.000334125 8.03842e-05 0.000523088
0.49 0.000293354 8.03842e-05 0.000523088
0.56 0.000261826 8.03842e-05 0.000523088
0.63 0.000236646 8.03842e-05 0.000523088
0.7 0.000216027 8.03842e-05 0.000523088
0.84 0.000184196 8.03842e-05 0.000523088
1.12 0.000142607 8.03842e-05 0.000523088
1.4 0.000116505 8.03842e-05 0.000523088
1.68 0 0.000134184 0.000523088
END DIST

Metal 2 UNDER 6
DIST count 12 width 0.14
0.14 0.000833899 6.08553e-05 0.000523088
0.28 0.00046858 6.08553e-05 0.000523088
0.35 0.000389231 6.08553e-05 0.000523088
0.42 0.000334125 6.08553e-05 0.000523088
0.49 0.000293354 6.08553e-05 0.000523088
0.56 0.000261826 6.08553e-05 0.000523088
0.63 0.000236646 6.08553e-05 0.000523088
0.7 0.000216027 6.08553e-05 0.000523088
0.84 0.000184196 6.08553e-05 0.000523088
1.12 0.000142607 6.08553e-05 0.000523088
1.4 0.000116505 6.08553e-05 0.000523088
1.68 0 0.000114655 0.000523088
END DIST

Metal 2 DIAGUNDER
WIDTH Table 1 entries:  0.14

Metal 2 DIAGUNDER 3
DIST count 13 width 0.14
0 0 1.89297e-05 0.000523088
0.14 0 0 0.000523088
0.28 0 0 0.000523088
0.35 0 0 0.000523088
0.42 0 0 0.000523088
0.49 0 0 0.000523088
0.56 0 0 0.000523088
0.63 0 0 0.000523088
0.7 0 0 0.000523088
0.84 0 0 0.000523088
1.12 0 0 0.000523088
1.4 0 0 0.000523088
1.68 0 0 0.000523088
END DIST

Metal 2 DIAGUNDER 4
DIST count 13 width 0.14
0 0 3.18339e-05 0.000523088
0.14 0 0 0.000523088
0.28 0 0 0.000523088
0.35 0 0 0.000523088
0.42 0 0 0.000523088
0.49 0 0 0.000523088
0.56 0 0 0.000523088
0.63 0 0 0.000523088
0.7 0 0 0.000523088
0.84 0 0 0.000523088
1.12 0 0 0.000523088
1.4 0 0 0.000523088
1.68 0 0 0.000523088
END DIST

Metal 2 DIAGUNDER 5
DIST count 13 width 0.14
0 0 1.87113e-05 0.000523088
0.14 0 0 0.000523088
0.28 0 0 0.000523088
0.35 0 0 0.000523088
0.42 0 0 0.000523088
0.49 0 0 0.000523088
0.56 0 0 0.000523088
0.63 0 0 0.000523088
0.7 0 0 0.000523088
0.84 0 0 0.000523088
1.12 0 0 0.000523088
1.4 0 0 0.000523088
1.68 0 0 0.000523088
END DIST

Metal 2 DIAGUNDER 6
DIST count 13 width 0.14
0 0 1.3482e-05 0.000523088
0.14 0 0 0.000523088
0.28 0 0 0.000523088
0.35 0 0 0.000523088
0.42 0 0 0.000523088
0.49 0 0 0.000523088
0.56 0 0 0.000523088
0.63 0 0 0.000523088
0.7 0 0 0.000523088
0.84 0 0 0.000523088
1.12 0 0 0.000523088
1.4 0 0 0.000523088
1.68 0 0 0.000523088
END DIST

Metal 2 OVERUNDER
WIDTH Table 1 entries:  0.14

Metal 2 OVER 1 UNDER 3
DIST count 12 width 0.14
0.14 0.000833899 0.000246168 0.000523088
0.28 0.00046858 0.000246168 0.000523088
0.35 0.000389231 0.000246168 0.000523088
0.42 0.000334125 0.000246168 0.000523088
0.49 0.000293354 0.000246168 0.000523088
0.56 0.000261826 0.000246168 0.000523088
0.63 0.000236646 0.000246168 0.000523088
0.7 0.000216027 0.000246168 0.000523088
0.84 0.000184196 0.000246168 0.000523088
1.12 0.000142607 0.000246168 0.000523088
1.4 0.000116505 0.000246168 0.000523088
1.68 0 0.000299968 0.000523088
END DIST

Metal 2 OVER 1 UNDER 4
DIST count 12 width 0.14
0.14 0.000833899 0.000173765 0.000523088
0.28 0.00046858 0.000173765 0.000523088
0.35 0.000389231 0.000173765 0.000523088
0.42 0.000334125 0.000173765 0.000523088
0.49 0.000293354 0.000173765 0.000523088
0.56 0.000261826 0.000173765 0.000523088
0.63 0.000236646 0.000173765 0.000523088
0.7 0.000216027 0.000173765 0.000523088
0.84 0.000184196 0.000173765 0.000523088
1.12 0.000142607 0.000173765 0.000523088
1.4 0.000116505 0.000173765 0.000523088
1.68 0 0.000227565 0.000523088
END DIST

Metal 2 OVER 1 UNDER 5
DIST count 12 width 0.14
0.14 0.000833899 0.000156497 0.000523088
0.28 0.00046858 0.000156497 0.000523088
0.35 0.000389231 0.000156497 0.000523088
0.42 0.000334125 0.000156497 0.000523088
0.49 0.000293354 0.000156497 0.000523088
0.56 0.000261826 0.000156497 0.000523088
0.63 0.000236646 0.000156497 0.000523088
0.7 0.000216027 0.000156497 0.000523088
0.84 0.000184196 0.000156497 0.000523088
1.12 0.000142607 0.000156497 0.000523088
1.4 0.000116505 0.000156497 0.000523088
1.68 0 0.000210297 0.000523088
END DIST

Metal 2 OVER 1 UNDER 6
DIST count 12 width 0.14
0.14 0.000833899 0.000136968 0.000523088
0.28 0.00046858 0.000136968 0.000523088
0.35 0.000389231 0.000136968 0.000523088
0.42 0.000334125 0.000136968 0.000523088
0.49 0.000293354 0.000136968 0.000523088
0.56 0.000261826 0.000136968 0.000523088
0.63 0.000236646 0.000136968 0.000523088
0.7 0.000216027 0.000136968 0.000523088
0.84 0.000184196 0.000136968 0.000523088
1.12 0.000142607 0.000136968 0.000523088
1.4 0.000116505 0.000136968 0.000523088
1.68 0 0.000190768 0.000523088
END DIST

Metal 3 RESOVER
WIDTH Table 1 entries:  0.14

Metal 3 RESOVER 0
DIST count 55 width 0.14
0 0 0 0.00104618
0 0.32 0 0.00104618
0 0.46 0 0.00104618
0 0.71 0 0.00104618
0 0.78 0 0.00104618
0 0.92 0 0.00104618
0 1.17 0 0.00104618
0 1.24 0 0.00104618
0 1.38 0 0.00104618
0 1.84 0 0.00104618
0.32 0.32 0 0.00104618
0.32 0.46 0 0.00104618
0.32 0.71 0 0.00104618
0.32 0.78 0 0.00104618
0.32 0.92 0 0.00104618
0.32 1.17 0 0.00104618
0.32 1.24 0 0.00104618
0.32 1.38 0 0.00104618
0.32 1.84 0 0.00104618
0.46 0.46 0 0.00104618
0.46 0.71 0 0.00104618
0.46 0.78 0 0.00104618
0.46 0.92 0 0.00104618
0.46 1.17 0 0.00104618
0.46 1.24 0 0.00104618
0.46 1.38 0 0.00104618
0.46 1.84 0 0.00104618
0.71 0.71 0 0.00104618
0.71 0.78 0 0.00104618
0.71 0.92 0 0.00104618
0.71 1.17 0 0.00104618
0.71 1.24 0 0.00104618
0.71 1.38 0 0.00104618
0.71 1.84 0 0.00104618
0.78 0.78 0 0.00104618
0.78 0.92 0 0.00104618
0.78 1.17 0 0.00104618
0.78 1.24 0 0.00104618
0.78 1.38 0 0.00104618
0.78 1.84 0 0.00104618
0.92 0.92 0 0.00104618
0.92 1.17 0 0.00104618
0.92 1.24 0 0.00104618
0.92 1.38 0 0.00104618
0.92 1.84 0 0.00104618
1.17 1.17 0 0.00104618
1.17 1.24 0 0.00104618
1.17 1.38 0 0.00104618
1.17 1.84 0 0.00104618
1.24 1.24 0 0.00104618
1.24 1.38 0 0.00104618
1.24 1.84 0 0.00104618
1.38 1.38 0 0.00104618
1.38 1.84 0 0.00104618
1.84 0 1.84 0.00104618
END DIST

Metal 3 RESOVER 1
DIST count 0 width 0.14
END DIST

Metal 3 RESOVER 2
DIST count 0 width 0.14
END DIST

Metal 3 OVER
WIDTH Table 1 entries:  0.14

Metal 3 OVER 0
DIST count 12 width 0.14
0.14 0.000884156 3.97208e-05 0.000523088
0.28 0.000494068 3.97208e-05 0.000523088
0.35 0.000410659 3.97208e-05 0.000523088
0.42 0.000353011 3.97208e-05 0.000523088
0.49 0.00031047 3.97208e-05 0.000523088
0.56 0.000277616 3.97208e-05 0.000523088
0.63 0.000251384 3.97208e-05 0.000523088
0.7 0.000229897 3.97208e-05 0.000523088
0.84 0.000196683 3.97208e-05 0.000523088
1.12 0.000153132 3.97208e-05 0.000523088
1.4 0.000125647 3.97208e-05 0.000523088
1.68 0 9.9461e-05 0.000523088
END DIST

Metal 3 OVER 1
DIST count 12 width 0.14
0.14 0.000884156 8.80415e-05 0.000523088
0.28 0.000494068 8.80415e-05 0.000523088
0.35 0.000410659 8.80415e-05 0.000523088
0.42 0.000353011 8.80415e-05 0.000523088
0.49 0.00031047 8.80415e-05 0.000523088
0.56 0.000277616 8.80415e-05 0.000523088
0.63 0.000251384 8.80415e-05 0.000523088
0.7 0.000229897 8.80415e-05 0.000523088
0.84 0.000196683 8.80415e-05 0.000523088
1.12 0.000153132 8.80415e-05 0.000523088
1.4 0.000125647 8.80415e-05 0.000523088
1.68 0 0.000147782 0.000523088
END DIST

Metal 3 OVER 2
DIST count 12 width 0.14
0.14 0.000884156 0.00014592 0.000523088
0.28 0.000494068 0.00014592 0.000523088
0.35 0.000410659 0.00014592 0.000523088
0.42 0.000353011 0.00014592 0.000523088
0.49 0.00031047 0.00014592 0.000523088
0.56 0.000277616 0.00014592 0.000523088
0.63 0.000251384 0.00014592 0.000523088
0.7 0.000229897 0.00014592 0.000523088
0.84 0.000196683 0.00014592 0.000523088
1.12 0.000153132 0.00014592 0.000523088
1.4 0.000125647 0.00014592 0.000523088
1.68 0 0.000205661 0.000523088
END DIST

Metal 3 UNDER
WIDTH Table 1 entries:  0.14

Metal 3 UNDER 4
DIST count 12 width 0.14
0.14 0.000884156 0.000124012 0.000523088
0.28 0.000494068 0.000124012 0.000523088
0.35 0.000410659 0.000124012 0.000523088
0.42 0.000353011 0.000124012 0.000523088
0.49 0.00031047 0.000124012 0.000523088
0.56 0.000277616 0.000124012 0.000523088
0.63 0.000251384 0.000124012 0.000523088
0.7 0.000229897 0.000124012 0.000523088
0.84 0.000196683 0.000124012 0.000523088
1.12 0.000153132 0.000124012 0.000523088
1.4 0.000125647 0.000124012 0.000523088
1.68 0 0.000183753 0.000523088
END DIST

Metal 3 UNDER 5
DIST count 12 width 0.14
0.14 0.000884156 8.58206e-05 0.000523088
0.28 0.000494068 8.58206e-05 0.000523088
0.35 0.000410659 8.58206e-05 0.000523088
0.42 0.000353011 8.58206e-05 0.000523088
0.49 0.00031047 8.58206e-05 0.000523088
0.56 0.000277616 8.58206e-05 0.000523088
0.63 0.000251384 8.58206e-05 0.000523088
0.7 0.000229897 8.58206e-05 0.000523088
0.84 0.000196683 8.58206e-05 0.000523088
1.12 0.000153132 8.58206e-05 0.000523088
1.4 0.000125647 8.58206e-05 0.000523088
1.68 0 0.000145561 0.000523088
END DIST

Metal 3 UNDER 6
DIST count 12 width 0.14
0.14 0.000884156 6.19584e-05 0.000523088
0.28 0.000494068 6.19584e-05 0.000523088
0.35 0.000410659 6.19584e-05 0.000523088
0.42 0.000353011 6.19584e-05 0.000523088
0.49 0.00031047 6.19584e-05 0.000523088
0.56 0.000277616 6.19584e-05 0.000523088
0.63 0.000251384 6.19584e-05 0.000523088
0.7 0.000229897 6.19584e-05 0.000523088
0.84 0.000196683 6.19584e-05 0.000523088
1.12 0.000153132 6.19584e-05 0.000523088
1.4 0.000125647 6.19584e-05 0.000523088
1.68 0 0.000121699 0.000523088
END DIST

Metal 3 DIAGUNDER
WIDTH Table 1 entries:  0.14

Metal 3 DIAGUNDER 4
DIST count 13 width 0.14
0 0 5.70672e-05 0.000523088
0.14 0 0 0.000523088
0.28 0 0 0.000523088
0.35 0 0 0.000523088
0.42 0 0 0.000523088
0.49 0 0 0.000523088
0.56 0 0 0.000523088
0.63 0 0 0.000523088
0.7 0 0 0.000523088
0.84 0 0 0.000523088
1.12 0 0 0.000523088
1.4 0 0 0.000523088
1.68 0 0 0.000523088
END DIST

Metal 3 DIAGUNDER 5
DIST count 13 width 0.14
0 0 2.54305e-05 0.000523088
0.14 0 0 0.000523088
0.28 0 0 0.000523088
0.35 0 0 0.000523088
0.42 0 0 0.000523088
0.49 0 0 0.000523088
0.56 0 0 0.000523088
0.63 0 0 0.000523088
0.7 0 0 0.000523088
0.84 0 0 0.000523088
1.12 0 0 0.000523088
1.4 0 0 0.000523088
1.68 0 0 0.000523088
END DIST

Metal 3 DIAGUNDER 6
DIST count 13 width 0.14
0 0 1.74521e-05 0.000523088
0.14 0 0 0.000523088
0.28 0 0 0.000523088
0.35 0 0 0.000523088
0.42 0 0 0.000523088
0.49 0 0 0.000523088
0.56 0 0 0.000523088
0.63 0 0 0.000523088
0.7 0 0 0.000523088
0.84 0 0 0.000523088
1.12 0 0 0.000523088
1.4 0 0 0.000523088
1.68 0 0 0.000523088
END DIST

Metal 3 OVERUNDER
WIDTH Table 1 entries:  0.14

Metal 3 OVER 1 UNDER 4
DIST count 12 width 0.14
0.14 0.000884156 0.000172333 0.000523088
0.28 0.000494068 0.000172333 0.000523088
0.35 0.000410659 0.000172333 0.000523088
0.42 0.000353011 0.000172333 0.000523088
0.49 0.00031047 0.000172333 0.000523088
0.56 0.000277616 0.000172333 0.000523088
0.63 0.000251384 0.000172333 0.000523088
0.7 0.000229897 0.000172333 0.000523088
0.84 0.000196683 0.000172333 0.000523088
1.12 0.000153132 0.000172333 0.000523088
1.4 0.000125647 0.000172333 0.000523088
1.68 0 0.000232073 0.000523088
END DIST

Metal 3 OVER 1 UNDER 5
DIST count 12 width 0.14
0.14 0.000884156 0.000134141 0.000523088
0.28 0.000494068 0.000134141 0.000523088
0.35 0.000410659 0.000134141 0.000523088
0.42 0.000353011 0.000134141 0.000523088
0.49 0.00031047 0.000134141 0.000523088
0.56 0.000277616 0.000134141 0.000523088
0.63 0.000251384 0.000134141 0.000523088
0.7 0.000229897 0.000134141 0.000523088
0.84 0.000196683 0.000134141 0.000523088
1.12 0.000153132 0.000134141 0.000523088
1.4 0.000125647 0.000134141 0.000523088
1.68 0 0.000193882 0.000523088
END DIST

Metal 3 OVER 1 UNDER 6
DIST count 12 width 0.14
0.14 0.000884156 0.000110279 0.000523088
0.28 0.000494068 0.000110279 0.000523088
0.35 0.000410659 0.000110279 0.000523088
0.42 0.000353011 0.000110279 0.000523088
0.49 0.00031047 0.000110279 0.000523088
0.56 0.000277616 0.000110279 0.000523088
0.63 0.000251384 0.000110279 0.000523088
0.7 0.000229897 0.000110279 0.000523088
0.84 0.000196683 0.000110279 0.000523088
1.12 0.000153132 0.000110279 0.000523088
1.4 0.000125647 0.000110279 0.000523088
1.68 0 0.000170019 0.000523088
END DIST

Metal 3 OVER 2 UNDER 4
DIST count 12 width 0.14
0.14 0.000884156 0.000230212 0.000523088
0.28 0.000494068 0.000230212 0.000523088
0.35 0.000410659 0.000230212 0.000523088
0.42 0.000353011 0.000230212 0.000523088
0.49 0.00031047 0.000230212 0.000523088
0.56 0.000277616 0.000230212 0.000523088
0.63 0.000251384 0.000230212 0.000523088
0.7 0.000229897 0.000230212 0.000523088
0.84 0.000196683 0.000230212 0.000523088
1.12 0.000153132 0.000230212 0.000523088
1.4 0.000125647 0.000230212 0.000523088
1.68 0 0.000289952 0.000523088
END DIST

Metal 3 OVER 2 UNDER 5
DIST count 12 width 0.14
0.14 0.000884156 0.00019202 0.000523088
0.28 0.000494068 0.00019202 0.000523088
0.35 0.000410659 0.00019202 0.000523088
0.42 0.000353011 0.00019202 0.000523088
0.49 0.00031047 0.00019202 0.000523088
0.56 0.000277616 0.00019202 0.000523088
0.63 0.000251384 0.00019202 0.000523088
0.7 0.000229897 0.00019202 0.000523088
0.84 0.000196683 0.00019202 0.000523088
1.12 0.000153132 0.00019202 0.000523088
1.4 0.000125647 0.00019202 0.000523088
1.68 0 0.000251761 0.000523088
END DIST

Metal 3 OVER 2 UNDER 6
DIST count 12 width 0.14
0.14 0.000884156 0.000168158 0.000523088
0.28 0.000494068 0.000168158 0.000523088
0.35 0.000410659 0.000168158 0.000523088
0.42 0.000353011 0.000168158 0.000523088
0.49 0.00031047 0.000168158 0.000523088
0.56 0.000277616 0.000168158 0.000523088
0.63 0.000251384 0.000168158 0.000523088
0.7 0.000229897 0.000168158 0.000523088
0.84 0.000196683 0.000168158 0.000523088
1.12 0.000153132 0.000168158 0.000523088
1.4 0.000125647 0.000168158 0.000523088
1.68 0 0.000227898 0.000523088
END DIST

Metal 4 RESOVER
WIDTH Table 1 entries:  0.3

Metal 4 RESOVER 0
DIST count 55 width 0.3
0 0 0 0.000188552
0 0.38 0 0.000188552
0 0.68 0 0.000188552
0 0.91 0 0.000188552
0 1.06 0 0.000188552
0 1.36 0 0.000188552
0 1.59 0 0.000188552
0 1.74 0 0.000188552
0 2.04 0 0.000188552
0 2.72 0 0.000188552
0.38 0.38 0 0.000188552
0.38 0.68 0 0.000188552
0.38 0.91 0 0.000188552
0.38 1.06 0 0.000188552
0.38 1.36 0 0.000188552
0.38 1.59 0 0.000188552
0.38 1.74 0 0.000188552
0.38 2.04 0 0.000188552
0.38 2.72 0 0.000188552
0.68 0.68 0 0.000188552
0.68 0.91 0 0.000188552
0.68 1.06 0 0.000188552
0.68 1.36 0 0.000188552
0.68 1.59 0 0.000188552
0.68 1.74 0 0.000188552
0.68 2.04 0 0.000188552
0.68 2.72 0 0.000188552
0.91 0.91 0 0.000188552
0.91 1.06 0 0.000188552
0.91 1.36 0 0.000188552
0.91 1.59 0 0.000188552
0.91 1.74 0 0.000188552
0.91 2.04 0 0.000188552
0.91 2.72 0 0.000188552
1.06 1.06 0 0.000188552
1.06 1.36 0 0.000188552
1.06 1.59 0 0.000188552
1.06 1.74 0 0.000188552
1.06 2.04 0 0.000188552
1.06 2.72 0 0.000188552
1.36 1.36 0 0.000188552
1.36 1.59 0 0.000188552
1.36 1.74 0 0.000188552
1.36 2.04 0 0.000188552
1.36 2.72 0 0.000188552
1.59 1.59 0 0.000188552
1.59 1.74 0 0.000188552
1.59 2.04 0 0.000188552
1.59 2.72 0 0.000188552
1.74 1.74 0 0.000188552
1.74 2.04 0 0.000188552
1.74 2.72 0 0.000188552
2.04 2.04 0 0.000188552
2.04 2.72 0 0.000188552
2.72 0 2.72 0.000188552
END DIST

Metal 4 RESOVER 1
DIST count 0 width 0.3
END DIST

Metal 4 RESOVER 2
DIST count 0 width 0.3
END DIST

Metal 4 RESOVER 3
DIST count 0 width 0.3
END DIST

Metal 4 OVER
WIDTH Table 1 entries:  0.3

Metal 4 OVER 0
DIST count 12 width 0.3
0.3 0.000555432 4.36923e-05 9.42761e-05
0.6 0.000312295 4.36923e-05 9.42761e-05
0.75 0.000259315 4.36923e-05 9.42761e-05
0.9 0.000222495 4.36923e-05 9.42761e-05
1.05 0.000195244 4.36923e-05 9.42761e-05
1.2 0.000174172 4.36923e-05 9.42761e-05
1.35 9.45003e-05 4.36923e-05 9.42761e-05
1.5 8.50505e-05 4.36923e-05 9.42761e-05
1.8 7.08754e-05 4.36923e-05 9.42761e-05
2.4 0 4.36923e-05 9.42761e-05
3 0 4.36923e-05 9.42761e-05
3.6 0 4.36923e-05 9.42761e-05
END DIST

Metal 4 OVER 1
DIST count 12 width 0.3
0.3 0.000555432 9.95361e-05 9.42761e-05
0.6 0.000312295 9.95361e-05 9.42761e-05
0.75 0.000259315 9.95361e-05 9.42761e-05
0.9 0.000222495 9.95361e-05 9.42761e-05
1.05 0.000195244 9.95361e-05 9.42761e-05
1.2 0.000174172 9.95361e-05 9.42761e-05
1.35 9.45003e-05 9.95361e-05 9.42761e-05
1.5 8.50505e-05 9.95361e-05 9.42761e-05
1.8 7.08754e-05 9.95361e-05 9.42761e-05
2.4 0 9.95361e-05 9.42761e-05
3 0 9.95361e-05 9.42761e-05
3.6 0 9.95361e-05 9.42761e-05
END DIST

Metal 4 OVER 2
DIST count 12 width 0.3
0.3 0.000555432 0.00014094 9.42761e-05
0.6 0.000312295 0.00014094 9.42761e-05
0.75 0.000259315 0.00014094 9.42761e-05
0.9 0.000222495 0.00014094 9.42761e-05
1.05 0.000195244 0.00014094 9.42761e-05
1.2 0.000174172 0.00014094 9.42761e-05
1.35 9.45003e-05 0.00014094 9.42761e-05
1.5 8.50505e-05 0.00014094 9.42761e-05
1.8 7.08754e-05 0.00014094 9.42761e-05
2.4 0 0.00014094 9.42761e-05
3 0 0.00014094 9.42761e-05
3.6 0 0.00014094 9.42761e-05
END DIST

Metal 4 OVER 3
DIST count 12 width 0.3
0.3 0.000555432 0.000202656 9.42761e-05
0.6 0.000312295 0.000202656 9.42761e-05
0.75 0.000259315 0.000202656 9.42761e-05
0.9 0.000222495 0.000202656 9.42761e-05
1.05 0.000195244 0.000202656 9.42761e-05
1.2 0.000174172 0.000202656 9.42761e-05
1.35 9.45003e-05 0.000202656 9.42761e-05
1.5 8.50505e-05 0.000202656 9.42761e-05
1.8 7.08754e-05 0.000202656 9.42761e-05
2.4 0 0.000202656 9.42761e-05
3 0 0.000202656 9.42761e-05
3.6 0 0.000202656 9.42761e-05
END DIST

Metal 4 UNDER
WIDTH Table 1 entries:  0.3

Metal 4 UNDER 5
DIST count 12 width 0.3
0.3 0.000555432 0.000171589 9.42761e-05
0.6 0.000312295 0.000171589 9.42761e-05
0.75 0.000259315 0.000171589 9.42761e-05
0.9 0.000222495 0.000171589 9.42761e-05
1.05 0.000195244 0.000171589 9.42761e-05
1.2 0.000174172 0.000171589 9.42761e-05
1.35 9.45003e-05 0.000171589 9.42761e-05
1.5 8.50505e-05 0.000171589 9.42761e-05
1.8 7.08754e-05 0.000171589 9.42761e-05
2.4 0 0.000171589 9.42761e-05
3 0 0.000171589 9.42761e-05
3.6 0 0.000171589 9.42761e-05
END DIST

Metal 4 UNDER 6
DIST count 12 width 0.3
0.3 0.000555432 8.61246e-05 9.42761e-05
0.6 0.000312295 8.61246e-05 9.42761e-05
0.75 0.000259315 8.61246e-05 9.42761e-05
0.9 0.000222495 8.61246e-05 9.42761e-05
1.05 0.000195244 8.61246e-05 9.42761e-05
1.2 0.000174172 8.61246e-05 9.42761e-05
1.35 9.45003e-05 8.61246e-05 9.42761e-05
1.5 8.50505e-05 8.61246e-05 9.42761e-05
1.8 7.08754e-05 8.61246e-05 9.42761e-05
2.4 0 8.61246e-05 9.42761e-05
3 0 8.61246e-05 9.42761e-05
3.6 0 8.61246e-05 9.42761e-05
END DIST

Metal 4 DIAGUNDER
WIDTH Table 1 entries:  0.3

Metal 4 DIAGUNDER 5
DIST count 13 width 0.3
0 0 2.54636e-05 9.42761e-05
0.3 0 0 9.42761e-05
0.6 0 0 9.42761e-05
0.75 0 0 9.42761e-05
0.9 0 0 9.42761e-05
1.05 0 0 9.42761e-05
1.2 0 0 9.42761e-05
1.35 0 0 9.42761e-05
1.5 0 0 9.42761e-05
1.8 0 0 9.42761e-05
2.4 0 0 9.42761e-05
3 0 0 9.42761e-05
3.6 0 0 9.42761e-05
END DIST

Metal 4 DIAGUNDER 6
DIST count 13 width 0.3
0 0 3.40697e-05 9.42761e-05
0.3 0 0 9.42761e-05
0.6 0 0 9.42761e-05
0.75 0 0 9.42761e-05
0.9 0 0 9.42761e-05
1.05 0 0 9.42761e-05
1.2 0 0 9.42761e-05
1.35 0 0 9.42761e-05
1.5 0 0 9.42761e-05
1.8 0 0 9.42761e-05
2.4 0 0 9.42761e-05
3 0 0 9.42761e-05
3.6 0 0 9.42761e-05
END DIST

Metal 4 OVERUNDER
WIDTH Table 1 entries:  0.3

Metal 4 OVER 1 UNDER 5
DIST count 12 width 0.3
0.3 0.000555432 0.000227433 9.42761e-05
0.6 0.000312295 0.000227433 9.42761e-05
0.75 0.000259315 0.000227433 9.42761e-05
0.9 0.000222495 0.000227433 9.42761e-05
1.05 0.000195244 0.000227433 9.42761e-05
1.2 0.000174172 0.000227433 9.42761e-05
1.35 9.45003e-05 0.000227433 9.42761e-05
1.5 8.50505e-05 0.000227433 9.42761e-05
1.8 7.08754e-05 0.000227433 9.42761e-05
2.4 0 0.000227433 9.42761e-05
3 0 0.000227433 9.42761e-05
3.6 0 0.000227433 9.42761e-05
END DIST

Metal 4 OVER 1 UNDER 6
DIST count 12 width 0.3
0.3 0.000555432 0.000141968 9.42761e-05
0.6 0.000312295 0.000141968 9.42761e-05
0.75 0.000259315 0.000141968 9.42761e-05
0.9 0.000222495 0.000141968 9.42761e-05
1.05 0.000195244 0.000141968 9.42761e-05
1.2 0.000174172 0.000141968 9.42761e-05
1.35 9.45003e-05 0.000141968 9.42761e-05
1.5 8.50505e-05 0.000141968 9.42761e-05
1.8 7.08754e-05 0.000141968 9.42761e-05
2.4 0 0.000141968 9.42761e-05
3 0 0.000141968 9.42761e-05
3.6 0 0.000141968 9.42761e-05
END DIST

Metal 4 OVER 2 UNDER 5
DIST count 12 width 0.3
0.3 0.000555432 0.000268837 9.42761e-05
0.6 0.000312295 0.000268837 9.42761e-05
0.75 0.000259315 0.000268837 9.42761e-05
0.9 0.000222495 0.000268837 9.42761e-05
1.05 0.000195244 0.000268837 9.42761e-05
1.2 0.000174172 0.000268837 9.42761e-05
1.35 9.45003e-05 0.000268837 9.42761e-05
1.5 8.50505e-05 0.000268837 9.42761e-05
1.8 7.08754e-05 0.000268837 9.42761e-05
2.4 0 0.000268837 9.42761e-05
3 0 0.000268837 9.42761e-05
3.6 0 0.000268837 9.42761e-05
END DIST

Metal 4 OVER 2 UNDER 6
DIST count 12 width 0.3
0.3 0.000555432 0.000183372 9.42761e-05
0.6 0.000312295 0.000183372 9.42761e-05
0.75 0.000259315 0.000183372 9.42761e-05
0.9 0.000222495 0.000183372 9.42761e-05
1.05 0.000195244 0.000183372 9.42761e-05
1.2 0.000174172 0.000183372 9.42761e-05
1.35 9.45003e-05 0.000183372 9.42761e-05
1.5 8.50505e-05 0.000183372 9.42761e-05
1.8 7.08754e-05 0.000183372 9.42761e-05
2.4 0 0.000183372 9.42761e-05
3 0 0.000183372 9.42761e-05
3.6 0 0.000183372 9.42761e-05
END DIST

Metal 4 OVER 3 UNDER 5
DIST count 12 width 0.3
0.3 0.000555432 0.000330553 9.42761e-05
0.6 0.000312295 0.000330553 9.42761e-05
0.75 0.000259315 0.000330553 9.42761e-05
0.9 0.000222495 0.000330553 9.42761e-05
1.05 0.000195244 0.000330553 9.42761e-05
1.2 0.000174172 0.000330553 9.42761e-05
1.35 9.45003e-05 0.000330553 9.42761e-05
1.5 8.50505e-05 0.000330553 9.42761e-05
1.8 7.08754e-05 0.000330553 9.42761e-05
2.4 0 0.000330553 9.42761e-05
3 0 0.000330553 9.42761e-05
3.6 0 0.000330553 9.42761e-05
END DIST

Metal 4 OVER 3 UNDER 6
DIST count 12 width 0.3
0.3 0.000555432 0.000245088 9.42761e-05
0.6 0.000312295 0.000245088 9.42761e-05
0.75 0.000259315 0.000245088 9.42761e-05
0.9 0.000222495 0.000245088 9.42761e-05
1.05 0.000195244 0.000245088 9.42761e-05
1.2 0.000174172 0.000245088 9.42761e-05
1.35 9.45003e-05 0.000245088 9.42761e-05
1.5 8.50505e-05 0.000245088 9.42761e-05
1.8 7.08754e-05 0.000245088 9.42761e-05
2.4 0 0.000245088 9.42761e-05
3 0 0.000245088 9.42761e-05
3.6 0 0.000245088 9.42761e-05
END DIST

Metal 5 RESOVER
WIDTH Table 1 entries:  0.3

Metal 5 RESOVER 0
DIST count 55 width 0.3
0 0 0 0.000188552
0 0.62 0 0.000188552
0 0.92 0 0.000188552
0 1.39 0 0.000188552
0 1.54 0 0.000188552
0 1.84 0 0.000188552
0 2.31 0 0.000188552
0 2.46 0 0.000188552
0 2.76 0 0.000188552
0 3.68 0 0.000188552
0.62 0.62 0 0.000188552
0.62 0.92 0 0.000188552
0.62 1.39 0 0.000188552
0.62 1.54 0 0.000188552
0.62 1.84 0 0.000188552
0.62 2.31 0 0.000188552
0.62 2.46 0 0.000188552
0.62 2.76 0 0.000188552
0.62 3.68 0 0.000188552
0.92 0.92 0 0.000188552
0.92 1.39 0 0.000188552
0.92 1.54 0 0.000188552
0.92 1.84 0 0.000188552
0.92 2.31 0 0.000188552
0.92 2.46 0 0.000188552
0.92 2.76 0 0.000188552
0.92 3.68 0 0.000188552
1.39 1.39 0 0.000188552
1.39 1.54 0 0.000188552
1.39 1.84 0 0.000188552
1.39 2.31 0 0.000188552
1.39 2.46 0 0.000188552
1.39 2.76 0 0.000188552
1.39 3.68 0 0.000188552
1.54 1.54 0 0.000188552
1.54 1.84 0 0.000188552
1.54 2.31 0 0.000188552
1.54 2.46 0 0.000188552
1.54 2.76 0 0.000188552
1.54 3.68 0 0.000188552
1.84 1.84 0 0.000188552
1.84 2.31 0 0.000188552
1.84 2.46 0 0.000188552
1.84 2.76 0 0.000188552
1.84 3.68 0 0.000188552
2.31 2.31 0 0.000188552
2.31 2.46 0 0.000188552
2.31 2.76 0 0.000188552
2.31 3.68 0 0.000188552
2.46 2.46 0 0.000188552
2.46 2.76 0 0.000188552
2.46 3.68 0 0.000188552
2.76 2.76 0 0.000188552
2.76 3.68 0 0.000188552
3.68 0 3.68 0.000188552
END DIST

Metal 5 RESOVER 1
DIST count 0 width 0.3
END DIST

Metal 5 RESOVER 2
DIST count 0 width 0.3
END DIST

Metal 5 RESOVER 3
DIST count 0 width 0.3
END DIST

Metal 5 RESOVER 4
DIST count 0 width 0.3
END DIST

Metal 5 OVER
WIDTH Table 1 entries:  0.3

Metal 5 OVER 0
DIST count 12 width 0.3
0.3 0.000564893 3.86968e-05 9.42761e-05
0.6 0.000316187 3.86968e-05 9.42761e-05
0.75 0.000262809 3.86968e-05 9.42761e-05
0.9 0.00022587 3.86968e-05 9.42761e-05
1.05 0.000198589 3.86968e-05 9.42761e-05
1.2 0.00011335 3.86968e-05 9.42761e-05
1.35 0.000100756 3.86968e-05 9.42761e-05
1.5 9.06801e-05 3.86968e-05 9.42761e-05
1.8 7.5567e-05 3.86968e-05 9.42761e-05
2.4 0 3.86968e-05 9.42761e-05
3 0 3.86968e-05 9.42761e-05
3.6 0 3.86968e-05 9.42761e-05
END DIST

Metal 5 OVER 1
DIST count 12 width 0.3
0.3 0.000564893 7.93802e-05 9.42761e-05
0.6 0.000316187 7.93802e-05 9.42761e-05
0.75 0.000262809 7.93802e-05 9.42761e-05
0.9 0.00022587 7.93802e-05 9.42761e-05
1.05 0.000198589 7.93802e-05 9.42761e-05
1.2 0.00011335 7.93802e-05 9.42761e-05
1.35 0.000100756 7.93802e-05 9.42761e-05
1.5 9.06801e-05 7.93802e-05 9.42761e-05
1.8 7.5567e-05 7.93802e-05 9.42761e-05
2.4 0 7.93802e-05 9.42761e-05
3 0 7.93802e-05 9.42761e-05
3.6 0 7.93802e-05 9.42761e-05
END DIST

Metal 5 OVER 2
DIST count 12 width 0.3
0.3 0.000564893 0.000100818 9.42761e-05
0.6 0.000316187 0.000100818 9.42761e-05
0.75 0.000262809 0.000100818 9.42761e-05
0.9 0.00022587 0.000100818 9.42761e-05
1.05 0.000198589 0.000100818 9.42761e-05
1.2 0.00011335 0.000100818 9.42761e-05
1.35 0.000100756 0.000100818 9.42761e-05
1.5 9.06801e-05 0.000100818 9.42761e-05
1.8 7.5567e-05 0.000100818 9.42761e-05
2.4 0 0.000100818 9.42761e-05
3 0 0.000100818 9.42761e-05
3.6 0 0.000100818 9.42761e-05
END DIST

Metal 5 OVER 3
DIST count 12 width 0.3
0.3 0.000564893 0.000118338 9.42761e-05
0.6 0.000316187 0.000118338 9.42761e-05
0.75 0.000262809 0.000118338 9.42761e-05
0.9 0.00022587 0.000118338 9.42761e-05
1.05 0.000198589 0.000118338 9.42761e-05
1.2 0.00011335 0.000118338 9.42761e-05
1.35 0.000100756 0.000118338 9.42761e-05
1.5 9.06801e-05 0.000118338 9.42761e-05
1.8 7.5567e-05 0.000118338 9.42761e-05
2.4 0 0.000118338 9.42761e-05
3 0 0.000118338 9.42761e-05
3.6 0 0.000118338 9.42761e-05
END DIST

Metal 5 OVER 4
DIST count 12 width 0.3
0.3 0.000564893 0.000146569 9.42761e-05
0.6 0.000316187 0.000146569 9.42761e-05
0.75 0.000262809 0.000146569 9.42761e-05
0.9 0.00022587 0.000146569 9.42761e-05
1.05 0.000198589 0.000146569 9.42761e-05
1.2 0.00011335 0.000146569 9.42761e-05
1.35 0.000100756 0.000146569 9.42761e-05
1.5 9.06801e-05 0.000146569 9.42761e-05
1.8 7.5567e-05 0.000146569 9.42761e-05
2.4 0 0.000146569 9.42761e-05
3 0 0.000146569 9.42761e-05
3.6 0 0.000146569 9.42761e-05
END DIST

Metal 5 UNDER
WIDTH Table 1 entries:  0.3

Metal 5 UNDER 6
DIST count 12 width 0.3
0.3 0.000564893 0.000113182 9.42761e-05
0.6 0.000316187 0.000113182 9.42761e-05
0.75 0.000262809 0.000113182 9.42761e-05
0.9 0.00022587 0.000113182 9.42761e-05
1.05 0.000198589 0.000113182 9.42761e-05
1.2 0.00011335 0.000113182 9.42761e-05
1.35 0.000100756 0.000113182 9.42761e-05
1.5 9.06801e-05 0.000113182 9.42761e-05
1.8 7.5567e-05 0.000113182 9.42761e-05
2.4 0 0.000113182 9.42761e-05
3 0 0.000113182 9.42761e-05
3.6 0 0.000113182 9.42761e-05
END DIST

Metal 5 DIAGUNDER
WIDTH Table 1 entries:  0.3

Metal 5 DIAGUNDER 6
DIST count 13 width 0.3
0 0 6.81606e-05 9.42761e-05
0.3 0 0 9.42761e-05
0.6 0 0 9.42761e-05
0.75 0 0 9.42761e-05
0.9 0 0 9.42761e-05
1.05 0 0 9.42761e-05
1.2 0 0 9.42761e-05
1.35 0 0 9.42761e-05
1.5 0 0 9.42761e-05
1.8 0 0 9.42761e-05
2.4 0 0 9.42761e-05
3 0 0 9.42761e-05
3.6 0 0 9.42761e-05
END DIST

Metal 5 OVERUNDER
WIDTH Table 1 entries:  0.3

Metal 5 OVER 1 UNDER 6
DIST count 12 width 0.3
0.3 0.000564893 0.000153865 9.42761e-05
0.6 0.000316187 0.000153865 9.42761e-05
0.75 0.000262809 0.000153865 9.42761e-05
0.9 0.00022587 0.000153865 9.42761e-05
1.05 0.000198589 0.000153865 9.42761e-05
1.2 0.00011335 0.000153865 9.42761e-05
1.35 0.000100756 0.000153865 9.42761e-05
1.5 9.06801e-05 0.000153865 9.42761e-05
1.8 7.5567e-05 0.000153865 9.42761e-05
2.4 0 0.000153865 9.42761e-05
3 0 0.000153865 9.42761e-05
3.6 0 0.000153865 9.42761e-05
END DIST

Metal 5 OVER 2 UNDER 6
DIST count 12 width 0.3
0.3 0.000564893 0.000175303 9.42761e-05
0.6 0.000316187 0.000175303 9.42761e-05
0.75 0.000262809 0.000175303 9.42761e-05
0.9 0.00022587 0.000175303 9.42761e-05
1.05 0.000198589 0.000175303 9.42761e-05
1.2 0.00011335 0.000175303 9.42761e-05
1.35 0.000100756 0.000175303 9.42761e-05
1.5 9.06801e-05 0.000175303 9.42761e-05
1.8 7.5567e-05 0.000175303 9.42761e-05
2.4 0 0.000175303 9.42761e-05
3 0 0.000175303 9.42761e-05
3.6 0 0.000175303 9.42761e-05
END DIST

Metal 5 OVER 3 UNDER 6
DIST count 12 width 0.3
0.3 0.000564893 0.000192823 9.42761e-05
0.6 0.000316187 0.000192823 9.42761e-05
0.75 0.000262809 0.000192823 9.42761e-05
0.9 0.00022587 0.000192823 9.42761e-05
1.05 0.000198589 0.000192823 9.42761e-05
1.2 0.00011335 0.000192823 9.42761e-05
1.35 0.000100756 0.000192823 9.42761e-05
1.5 9.06801e-05 0.000192823 9.42761e-05
1.8 7.5567e-05 0.000192823 9.42761e-05
2.4 0 0.000192823 9.42761e-05
3 0 0.000192823 9.42761e-05
3.6 0 0.000192823 9.42761e-05
END DIST

Metal 5 OVER 4 UNDER 6
DIST count 12 width 0.3
0.3 0.000564893 0.000221054 9.42761e-05
0.6 0.000316187 0.000221054 9.42761e-05
0.75 0.000262809 0.000221054 9.42761e-05
0.9 0.00022587 0.000221054 9.42761e-05
1.05 0.000198589 0.000221054 9.42761e-05
1.2 0.00011335 0.000221054 9.42761e-05
1.35 0.000100756 0.000221054 9.42761e-05
1.5 9.06801e-05 0.000221054 9.42761e-05
1.8 7.5567e-05 0.000221054 9.42761e-05
2.4 0 0.000221054 9.42761e-05
3 0 0.000221054 9.42761e-05
3.6 0 0.000221054 9.42761e-05
END DIST

Metal 6 RESOVER
WIDTH Table 1 entries:  1.6

Metal 6 RESOVER 0
DIST count 55 width 1.6
0 0 0 2.27273e-05
0 1.8 0 2.27273e-05
0 3.4 0 2.27273e-05
0 4.4 0 2.27273e-05
0 5.2 0 2.27273e-05
0 6.8 0 2.27273e-05
0 7.8 0 2.27273e-05
0 8.6 0 2.27273e-05
0 10.2 0 2.27273e-05
0 13.6 0 2.27273e-05
1.8 1.8 0 2.27273e-05
1.8 3.4 0 2.27273e-05
1.8 4.4 0 2.27273e-05
1.8 5.2 0 2.27273e-05
1.8 6.8 0 2.27273e-05
1.8 7.8 0 2.27273e-05
1.8 8.6 0 2.27273e-05
1.8 10.2 0 2.27273e-05
1.8 13.6 0 2.27273e-05
3.4 3.4 0 2.27273e-05
3.4 4.4 0 2.27273e-05
3.4 5.2 0 2.27273e-05
3.4 6.8 0 2.27273e-05
3.4 7.8 0 2.27273e-05
3.4 8.6 0 2.27273e-05
3.4 10.2 0 2.27273e-05
3.4 13.6 0 2.27273e-05
4.4 4.4 0 2.27273e-05
4.4 5.2 0 2.27273e-05
4.4 6.8 0 2.27273e-05
4.4 7.8 0 2.27273e-05
4.4 8.6 0 2.27273e-05
4.4 10.2 0 2.27273e-05
4.4 13.6 0 2.27273e-05
5.2 5.2 0 2.27273e-05
5.2 6.8 0 2.27273e-05
5.2 7.8 0 2.27273e-05
5.2 8.6 0 2.27273e-05
5.2 10.2 0 2.27273e-05
5.2 13.6 0 2.27273e-05
6.8 6.8 0 2.27273e-05
6.8 7.8 0 2.27273e-05
6.8 8.6 0 2.27273e-05
6.8 10.2 0 2.27273e-05
6.8 13.6 0 2.27273e-05
7.8 7.8 0 2.27273e-05
7.8 8.6 0 2.27273e-05
7.8 10.2 0 2.27273e-05
7.8 13.6 0 2.27273e-05
8.6 8.6 0 2.27273e-05
8.6 10.2 0 2.27273e-05
8.6 13.6 0 2.27273e-05
10.2 10.2 0 2.27273e-05
10.2 13.6 0 2.27273e-05
13.6 0 13.6 2.27273e-05
END DIST

Metal 6 RESOVER 1
DIST count 0 width 1.6
END DIST

Metal 6 RESOVER 2
DIST count 0 width 1.6
END DIST

Metal 6 RESOVER 3
DIST count 0 width 1.6
END DIST

Metal 6 RESOVER 4
DIST count 0 width 1.6
END DIST

Metal 6 RESOVER 5
DIST count 0 width 1.6
END DIST

Metal 6 OVER
WIDTH Table 1 entries:  1.6

Metal 6 OVER 0
DIST count 12 width 1.6
1.6 0.000160429 4.47418e-05 1.13636e-05
3.2 0 4.47418e-05 1.13636e-05
4 0 4.47418e-05 1.13636e-05
4.8 0 4.47418e-05 1.13636e-05
5.6 0 4.47418e-05 1.13636e-05
6.4 0 4.47418e-05 1.13636e-05
7.2 0 4.47418e-05 1.13636e-05
8 0 4.47418e-05 1.13636e-05
9.6 0 4.47418e-05 1.13636e-05
12.8 0 4.47418e-05 1.13636e-05
16 0 4.47418e-05 1.13636e-05
19.2 0 4.47418e-05 1.13636e-05
END DIST

Metal 6 OVER 1
DIST count 12 width 1.6
1.6 0.000160429 0.000143262 1.13636e-05
3.2 0 0.000143262 1.13636e-05
4 0 0.000143262 1.13636e-05
4.8 0 0.000143262 1.13636e-05
5.6 0 0.000143262 1.13636e-05
6.4 0 0.000143262 1.13636e-05
7.2 0 0.000143262 1.13636e-05
8 0 0.000143262 1.13636e-05
9.6 0 0.000143262 1.13636e-05
12.8 0 0.000143262 1.13636e-05
16 0 0.000143262 1.13636e-05
19.2 0 0.000143262 1.13636e-05
END DIST

Metal 6 OVER 2
DIST count 12 width 1.6
1.6 0.000160429 0.000212886 1.13636e-05
3.2 0 0.000212886 1.13636e-05
4 0 0.000212886 1.13636e-05
4.8 0 0.000212886 1.13636e-05
5.6 0 0.000212886 1.13636e-05
6.4 0 0.000212886 1.13636e-05
7.2 0 0.000212886 1.13636e-05
8 0 0.000212886 1.13636e-05
9.6 0 0.000212886 1.13636e-05
12.8 0 0.000212886 1.13636e-05
16 0 0.000212886 1.13636e-05
19.2 0 0.000212886 1.13636e-05
END DIST

Metal 6 OVER 3
DIST count 12 width 1.6
1.6 0.000160429 0.000259209 1.13636e-05
3.2 0 0.000259209 1.13636e-05
4 0 0.000259209 1.13636e-05
4.8 0 0.000259209 1.13636e-05
5.6 0 0.000259209 1.13636e-05
6.4 0 0.000259209 1.13636e-05
7.2 0 0.000259209 1.13636e-05
8 0 0.000259209 1.13636e-05
9.6 0 0.000259209 1.13636e-05
12.8 0 0.000259209 1.13636e-05
16 0 0.000259209 1.13636e-05
19.2 0 0.000259209 1.13636e-05
END DIST

Metal 6 OVER 4
DIST count 12 width 1.6
1.6 0.000160429 0.000243363 1.13636e-05
3.2 0 0.000243363 1.13636e-05
4 0 0.000243363 1.13636e-05
4.8 0 0.000243363 1.13636e-05
5.6 0 0.000243363 1.13636e-05
6.4 0 0.000243363 1.13636e-05
7.2 0 0.000243363 1.13636e-05
8 0 0.000243363 1.13636e-05
9.6 0 0.000243363 1.13636e-05
12.8 0 0.000243363 1.13636e-05
16 0 0.000243363 1.13636e-05
19.2 0 0.000243363 1.13636e-05
END DIST

Metal 6 OVER 5
DIST count 12 width 1.6
1.6 0.000160429 0.000415012 1.13636e-05
3.2 0 0.000415012 1.13636e-05
4 0 0.000415012 1.13636e-05
4.8 0 0.000415012 1.13636e-05
5.6 0 0.000415012 1.13636e-05
6.4 0 0.000415012 1.13636e-05
7.2 0 0.000415012 1.13636e-05
8 0 0.000415012 1.13636e-05
9.6 0 0.000415012 1.13636e-05
12.8 0 0.000415012 1.13636e-05
16 0 0.000415012 1.13636e-05
19.2 0 0.000415012 1.13636e-05
END DIST

Metal 6 UNDER
WIDTH Table 0 entries: 

Metal 6 DIAGUNDER
WIDTH Table 0 entries: 
END DensityModel 0