| * |
| * Techgen(tm) Tech file Generator. |
| * FullVersion : 19.1.3-s062 |
| * BuildNumber : 062 |
| * IRBuildNumber : 062 |
| * VersionDate : Tue Jul 23 02:42:20 PDT 2019 |
| * Bitness : 64-bit |
| * |
| * |
| process s130 |
| * |
| *| temp_reference 30 |
| *| auto_reorder_off true |
| * |
| deposition |
| *step # material p/n name thick diel. side bot angle |
| step 1 substrate FOX 0.4293 3.9 |
| step 1 substrate N_SOURCE_DRAIN 0.3093 3.9 |
| step 2 metal ply 0.16 s,w:0.21,0.15,0,-0.0485:0.21,1.5,0,-0.0485:2.1,0.15,0,-0.0485:2.1,1.5,0,-0.0485 0,0 |
| step 3 dielectric n IOX 0 3.9 sidewall(0.006) 0 auto_angle |
| step 4 dielectric n SPNIT 0.1065 7.5 sidewall(0.0431) 0 auto_angle |
| step 5 dielectric p PSG 0.4812 3.9 |
| step 6 metal li 0.08 s,w:0.17,0.17,-0.0115,-0.0015:0.17,1.7,-0.0115,-0.0015:1.7,0.17,-0.0115,-0.0015:1.7,1.7,-0.0115,-0.0015 0.003,-0.003 |
| step 7 dielectric n LINT 0.0675 7.3 sidewall(0.054846) 0.0675 auto_angle |
| step 8 dielectric p NILD2 0.405 3.9 |
| step 9 metal m1 0.33 s,w:0.14,0.14,-0.0103,-0.032:0.14,1.4,-0.0103,-0.032:1.4,0.14,-0.0103,-0.032:1.4,1.4,-0.0103,-0.032 0,0 |
| step 10 dielectric n NILD3_C 0 3.3 sidewall(0.04) 0 auto_angle |
| step 11 dielectric p NILD3 0.43 4.5 |
| step 12 metal m2 0.33 s,w:0.14,0.14,-0.0103,-0.032:0.14,1.4,-0.0103,-0.032:1.4,0.14,-0.0103,-0.032:1.4,1.4,-0.0103,-0.032 0,0 |
| step 13 dielectric n NILD4_C 0 3.3 sidewall(0.04) 0 auto_angle |
| step 14 dielectric p NILD4 0.581 3.9 |
| step 15 metal m3 0.765 s,w:0.3,0.3,0.016,-0.045:0.3,3,0.016,-0.045:3,0.3,0.016,-0.045:3,3,0.016,-0.045 0,0 |
| step 16 dielectric p NILD5 0.547 3.9 |
| step 17 metal m4 0.765 s,w:0.3,0.3,0.016,-0.045:0.3,3,0.016,-0.045:3,0.3,0.016,-0.045:3,3,0.016,-0.045 0,0 |
| step 18 dielectric p NILD6 0.662 4 |
| step 19 metal m5 1.134 s,w:1.6,0.8,-0.05,-0.13:1.6,8,-0.05,-0.13:16,0.8,-0.05,-0.13:16,8,-0.05,-0.13 0.0238,-0.0238 |
| step 20 dielectric n TOPOX 0.1031 3.9 sidewall(0.080129) 0 auto_angle |
| step 21 dielectric n TOPNIT 0.6482 7.5 sidewall(0.337403) 0.302 auto_angle |
| step 22 dielectric p PI1 5.75 2.94 |
| step 23 metal rdl 3 s,w:5,10,0,-0.5:5,100,0,-0.5:50,10,0,-0.5:50,100,0,-0.5 0,0 |
| step 24 dielectric p PI2 6 2.8 |
| step 25 dielectric p MOLD 40 3.6 |
| step 26 dielectric p air 40 1 |
| enddeposition |
| |
| metal_variations auto_comb |
| layer ply w 0.15 |
| layer ply s 0.21 |
| layer li w 0.17 |
| layer li s 0.17 |
| layer m1 w 0.14 |
| layer m1 s 0.14 |
| layer m2 w 0.14 |
| layer m2 s 0.14 |
| layer m3 w 0.3 |
| layer m3 s 0.3 |
| layer m4 w 0.3 |
| layer m4 s 0.3 |
| layer m5 w 0.8 |
| layer m5 s 1.6 |
| layer rdl w 10 |
| layer rdl s 5 |
| endmetal_variations |
| |
| endprocess |
| |
