| ;;; autoedr.il |
| ;;; autoedr.il |
| (TECHinclude (BOOTprependTechPath "../pcios/s8/s8x/info/edr.il")) |
| |
| |
| (TECHsetRules |
| '( |
| ("rspwr" 3330.0) |
| ("pwres" 3330.0) |
| ("pwres_min" 2850.0) |
| ("pwres_max" 3820.0) |
| ("vppcap1_lishield" 100.0) ;;fF |
| ("vppcap2_lishield" 50.0) ;;fF |
| ("vppcap3_lishield" 12.0) ;;fF |
| ("vppcap4_lishield" 1.0) ;;fF |
| ("vppcap2_met5" 141.2) ;;fF xcmvpp11p5x11p7_polym5shield |
| ("vppcap1_met5" 137.4) ;;fF xcmvpp11p5x11p7_m5shield |
| ("vppcap3_met5" 116.8) ;;fF xcmvpp11p5x11p7_lim5shield |
| ("vppcap4_met5" 42.5) ;;fF xcmvpp8p6x7p9_m3_lim5shield |
| ("vppcap5_met5" 97.3) ;;fF xcmvpp11p5x11p7_m3_lim5shield |
| ("vppcap6_met5" 10.8) ;;fF xcmvpp4p4x4p6_m3_lim5shield |
| ("vppcap5_met4" 118.5) ;;fF xcmvpp11p5x11p7_m4shield |
| ("vppcap6_met4" 121.9) ;;fF xcmvpp11p5x11p7_polym4shield |
| ("vppcap7_met4" 33.8) ;;fF xcmvpp6p8x6p1_polym4shield |
| ("vppcap8_met4" 26.6) ;;fF xcmvpp6p8x6p1_lim4shield |
| ("vppcap_nhvnative" 340.9) ;;fF xcmvppx4_2xnhvnative10x4 |
| ("vppcap11_met4" 141.2) ;;fF xcmvpp11p5x11p7_polym50p4shield |
| ("vppcap_vpp3" 35.00) ;;fF xcmvpp3 |
| ("vppcap_vpp4" 9.48) ;;fF xcmvpp4 |
| ("vppcap_vpp5" 4.37) ;;fF xcmvpp5 |
| ("vppcap4_m1m2" 7.81) ;;fF xcmvpp4p4x4p6_m1m2 |
| ("vppcap11_m1m2" 74.6) ;;fF xcmvpp11p5x11p7_m1m2 |
| ("vppcap11_m1m4" 110.19) ;;fF xcmvpp11p5x11p7_m1m4 |
| ("vppcap_hd5_13" 12.13) ;;fF xcmvpp_hd5_atlas_fingercap_I5 |
| ("vppcap_hd5_14" 12.65) ;;fF xcmvpp_hd5_atlas_fingercap2_I5 |
| ("vppcap_hd5_15" 23.35) ;;fF xcmvpp_hd5_atlas_fingercap_l10 |
| ("vppcap_hd5_16" 45.83) ;;fF xcmvpp_hd5_atlas_fingercap_l20 |
| ("vppcap_hd5_17" 91.27) ;;fF xcmvpp_hd5_atlas_fingercap_l40 |
| ("vppcap_hd5_18" 110.41) ;;fF xcmvpp_hd5_atlas_wafflecap1 |
| ("vppcap_hd5_19" 27.78) ;;fF xcmvpp_hd5_atlas_wafflecap2 |
| ("vppcap_hd5_8" 1470) ;;fF xcmvpp_hd5_4x2 |
| ) |
| ) |
| |
| |
| |
| ;;; Define thickness for all the masks |
| ;;; Format should be maskName_thickness |
| (TECHsetRules |
| '(("FOM_thickness" 0.315) |
| ("P1M_thickness" 0.180) |
| ("LI1M_thickness" 0.10) |
| ("MM1_thickness" 0.36) |
| ("MM2_thickness" 0.36) |
| ("MM3_thickness" 0.845) |
| ("MM4_thickness" 0.845) |
| ("MM5_thickness" 1.26) |
| ("RDL_thickness" 3.00) |
| ) |
| ) |
| |
| (TECHsetRules |
| '( |
| ("rsn" 120.0 "sheetRes" "diff") |
| ("rsn_min" 108.0) |
| ("rsn_max" 132.0) |
| ("rsp" 197.0 "sheetRes" "diff") |
| ("rsp_min" 166.0) |
| ("rsp_max" 228.0) |
| ("rsnhv" 114.0) |
| ("rsnhv_min" 102.0) |
| ("rsnhv_max" 126.0) |
| ("rsphv" 191.0) |
| ("rsphv_min" 160.0) |
| ("rsphv_max" 222.0) |
| ("rsp1" 48.2 "sheetRes" "poly") |
| ("rsp1_min" 42.2) |
| ("rsp1_max" 55.8) |
| ("rsnw" 1700.0 "sheetRes" "nwell") |
| ("rsnw_min" 1240.0) |
| ("rsnw_max" 2160.0) |
| ("rsl1" 12.2 "sheetRes" "li1") |
| ("rsl1_min" 9.5) |
| ("rsl1_max" 14.8) |
| ("rsm1" 0.125 "sheetRes" "met1") |
| ("rsm1_min" 0.105) |
| ("rsm1_max" 0.145) |
| ("rsm2" 0.125 "sheetRes" "met2") |
| ("rsm2_min" 0.105) |
| ("rsm2_max" 0.145) |
| ("rsm3" 0.047 "sheetRes" "met3") |
| ("rsm3_min" 0.038) |
| ("rsm3_max" 0.056) |
| ("rsm4" 0.047 "sheetRes" "met4") |
| ("rsm4_min" 0.038) |
| ("rsm4_max" 0.056) |
| ("rsm5" 0.0285 "sheetRes" "met5") |
| ("rsm5_min" 0.0212) |
| ("rsm5_max" 0.0358) |
| ("rsrdl" 0.005 "sheetRes" "rdl") |
| ("rsrdl_min" 0.004) |
| ("rsrdl_max" 0.0067) |
| ("rcl1n" 182.0) |
| ("rcl1n_min" 70.0) |
| ("rcl1n_max" 345.0) |
| ("rcl1p" 600.0) |
| ("rcl1p_min" 330.0) |
| ("rcl1p_max" 870.0) |
| ("rcl1gp" 145.28) |
| ("rcl1gp_min" 25.28) |
| ("rcl1gp_max" 243.28) |
| ("rcm1l1" 9.3 "contRes" "mcon") |
| ("rcm1l1_min" 1.6 "contResMin" "mcon") |
| ("rcm1l1_max" 22.6 "contResMax" "mcon") |
| ("rcvia" 4.5 "contRes" "via") |
| ("rcvia_min" 2.0 "contResMin" "via") |
| ("rcvia_max" 15.0 "contResMax" "via") |
| ("rcvia2" 3.41 "contRes" "via2") |
| ("rcvia2_min" 0.5 "contResMin" "via2") |
| ("rcvia2_max" 8.0 "contResMax" "via2") |
| ("rcvia3" 3.41 "contRes" "via3") |
| ("rcvia3_min" 0.5 "contResMin" "via3") |
| ("rcvia3_max" 8.0 "contResMax" "via3") |
| ("rcvia4" 0.38 "contRes" "via4") |
| ("rcvia4_min" 0.012 "contResMin" "via4") |
| ("rcvia4_max" 0.891 "contResMax" "via4") |
| ;("rcrdlcon" 0.0058 "contRes" "rdlcon") |
| ;("rcrdlcon_min" 0.0046 "contResMin" "rdlcon") |
| ;("rcrdlcon_max" 0.0077 "contResMax" "rdlcon") |
| ("rdn_dw" -0.017) |
| ("rdp_dw" -0.004) |
| ("rp1_dw" 0.056 "deltaW" "poly") |
| ("rl1_dw" -0.017 "deltaW" "li1") |
| ("rm1_dw" 0.039 "deltaW" "met1") |
| ("rm2_dw" 0.039 "deltaW" "met2") |
| ("rm3_dw" 0.025 "deltaW" "met3") |
| ("rm4_dw" 0.025 "deltaW" "met4") |
| ("rm5_dw" 0.09 "deltaW" "met5") |
| ("rrdl_dw" -0.0 "deltaW" "rdl") |
| ("rp1_err" 0.02 "maxDeltaWerror" "poly") |
| ("rl1_err" 0.02 "maxDeltaWerror" "li1") |
| ("rm1_err" 0.02 "maxDeltaWerror" "met1") |
| ("rm2_err" 0.02 "maxDeltaWerror" "met2") |
| ("rm3_err" 0.02 "maxDeltaWerror" "met3") |
| ("rm4_err" 0.02 "maxDeltaWerror" "met4") |
| ("rm5_err" 0.02 "maxDeltaWerror" "met5") |
| ("rrdl_err" 0.02 "maxDeltaWerror" "rdl") |
| ("ldelta" 0.056) |
| ("wdelta_n" -0.017) |
| ("wdelta_p" -0.004) |
| ("cgox_n_csw" 0.248) |
| ("cgox_n_ca" 2.171) |
| ("cgox_p_csw" 0.082) |
| ("cgox_p_ca" 3.295) |
| ("cgox_nh_csw" 0.322) |
| ("cgox_nh_ca" 1.271) |
| ("cgox_ph_csw" 0.217) |
| ("cgox_ph_ca" 1.265) |
| ("poly_psub_ca" 0.106 "areaCap" "poly") |
| ("poly_psub_cs" 0.0761 "parallelCap" "poly" "diff") |
| ("poly_psub_cp" 0.0103 "edgeCapacitance" "poly") |
| ("poly_nsub_ca" 0.106) |
| ("poly_nsub_cs" 0.0761) |
| ("poly_nsub_cp" 0.0103) |
| ("li1_psub_ca" 0.0369 "areaCap" "li1") |
| ("li1_psub_cs" 0.0798 "parallelCap" "li1" "diff") |
| ("li1_psub_cp" 0.00326 "edgeCapacitance" "li1") |
| ("li1_nsub_ca" 0.0369) |
| ("li1_nsub_cs" 0.0798) |
| ("li1_nsub_cp" 0.00326) |
| ("li1_pplus_ca" 0.0553) |
| ("li1_pplus_cs" 0.0774) |
| ("li1_pplus_cp" 0.00483) |
| ("li1_poly_ca" 0.0941) |
| ("li1_poly_cs" 0.0732) |
| ("li1_poly_cp" 0.00806) |
| ("met1_psub_ca" 0.0258 "areaCap" "met1") |
| ("met1_psub_cs" 0.105 "parallelCap" "met1" "diff") |
| ("met1_psub_cp" 0.00179 "edgeCapacitance" "met1") |
| ("met1_nsub_ca" 0.0258) |
| ("met1_nsub_cs" 0.105) |
| ("met1_nsub_cp" 0.00179) |
| ("met1_nplus_ca" 0.0336) |
| ("met1_nplus_cs" 0.104) |
| ("met1_nplus_cp" 0.00232) |
| ("met1_pplus_ca" 0.0336) |
| ("met1_pplus_cs" 0.104) |
| ("met1_pplus_cp" 0.00232) |
| ("met1_poly_ca" 0.0448) |
| ("met1_poly_cs" 0.103) |
| ("met1_poly_cp" 0.00309) |
| ("met1_li1_ca" 0.114) |
| ("met1_li1_cs" 0.0957) |
| ("met1_li1_cp" 0.00743) |
| ("met2_psub_ca" 0.0175 "areaCap" "met2") |
| ("met2_psub_cs" 0.106 "parallelCap" "met2" "diff") |
| ("met2_psub_cp" 0.00122 "edgeCapacitance" "met2") |
| ("met2_nsub_ca" 0.0175) |
| ("met2_nsub_cs" 0.106) |
| ("met2_nsub_cp" 0.00122) |
| ("met2_nplus_ca" 0.0208) |
| ("met2_nplus_cs" 0.105) |
| ("met2_nplus_cp" 0.00145) |
| ("met2_pplus_ca" 0.0208) |
| ("met2_pplus_cs" 0.105) |
| ("met2_pplus_cp" 0.00145) |
| ("met2_poly_ca" 0.0247) |
| ("met2_poly_cs" 0.105) |
| ("met2_poly_cp" 0.00172) |
| ("met2_li1_ca" 0.037) |
| ("met2_li1_cs" 0.103) |
| ("met2_li1_cp" 0.00254) |
| ("met2_met1_ca" 0.128) |
| ("met2_met1_cs" 0.0946) |
| ("met2_met1_cp" 0.00824) |
| ("met3_psub_ca" 0.0126 "areaCap" "met3") |
| ("met3_psub_cs" 0.107 "parallelCap" "met3" "diff") |
| ("met3_psub_cp" 0.00186 "edgeCapacitance" "met3") |
| ("met3_nsub_ca" 0.0126) |
| ("met3_nsub_cs" 0.107) |
| ("met3_nsub_cp" 0.00186) |
| ("met3_nplus_ca" 0.0142) |
| ("met3_nplus_cs" 0.106) |
| ("met3_nplus_cp" 0.00209) |
| ("met3_pplus_ca" 0.0142) |
| ("met3_pplus_cs" 0.106) |
| ("met3_pplus_cp" 0.00209) |
| ("met3_poly_ca" 0.0158) |
| ("met3_poly_cs" 0.106) |
| ("met3_poly_cp" 0.00234) |
| ("met3_li1_ca" 0.0202) |
| ("met3_li1_cs" 0.105) |
| ("met3_li1_cp" 0.00295) |
| ("met3_met1_ca" 0.0329) |
| ("met3_met1_cs" 0.102) |
| ("met3_met1_cp" 0.00472) |
| ("met3_met2_ca" 0.0822) |
| ("met3_met2_cs" 0.0935) |
| ("met3_met2_cp" 0.0111) |
| ("met4_psub_ca" 0.00867 "areaCap" "met4") |
| ("met4_psub_cs" 0.108 "parallelCap" "met4" "diff") |
| ("met4_psub_cp" 0.00129 "edgeCapacitance" "met4") |
| ("met4_nsub_ca" 0.00867) |
| ("met4_nsub_cs" 0.108) |
| ("met4_nsub_cp" 0.00129) |
| ("met4_nplus_ca" 0.00941) |
| ("met4_nplus_cs" 0.108) |
| ("met4_nplus_cp" 0.00139) |
| ("met4_pplus_ca" 0.00941) |
| ("met4_pplus_cs" 0.108) |
| ("met4_pplus_cp" 0.00139) |
| ("met4_poly_ca" 0.0101) |
| ("met4_poly_cs" 0.107) |
| ("met4_poly_cp" 0.0015) |
| ("met4_li1_ca" 0.0117) |
| ("met4_li1_cs" 0.107) |
| ("met4_li1_cp" 0.00173) |
| ("met4_met1_ca" 0.0151) |
| ("met4_met1_cs" 0.106) |
| ("met4_met1_cp" 0.00222) |
| ("met4_met2_ca" 0.0209) |
| ("met4_met2_cs" 0.105) |
| ("met4_met2_cp" 0.00304) |
| ("met4_met3_ca" 0.0885) |
| ("met4_met3_cs" 0.0931) |
| ("met4_met3_cp" 0.0118) |
| ("met5_psub_ca" 0.00648 "areaCap" "met5") |
| ("met5_psub_cs" 0.0647 "parallelCap" "met5" "diff") |
| ("met5_psub_cp" 0.00496 "edgeCapacitance" "met5") |
| ("met5_nsub_ca" 0.00648) |
| ("met5_nsub_cs" 0.0647) |
| ("met5_nsub_cp" 0.00496) |
| ("met5_nplus_ca" 0.00688) |
| ("met5_nplus_cs" 0.0642) |
| ("met5_nplus_cp" 0.00525) |
| ("met5_pplus_ca" 0.00688) |
| ("met5_pplus_cs" 0.0642) |
| ("met5_pplus_cp" 0.00525) |
| ("met5_poly_ca" 0.00725) |
| ("met5_poly_cs" 0.0638) |
| ("met5_poly_cp" 0.00553) |
| ("met5_li1_ca" 0.00804) |
| ("met5_li1_cs" 0.063) |
| ("met5_li1_cp" 0.00608) |
| ("met5_met1_ca" 0.0095) |
| ("met5_met1_cs" 0.0617) |
| ("met5_met1_cp" 0.0071) |
| ("met5_met2_ca" 0.0115) |
| ("met5_met2_cs" 0.06) |
| ("met5_met2_cp" 0.00847) |
| ("met5_met3_ca" 0.0199) |
| ("met5_met3_cs" 0.0546) |
| ("met5_met3_cp" 0.0138) |
| ("met5_met4_ca" 0.0684) |
| ("met5_met4_cs" 0.043) |
| ("met5_met4_cp" 0.0344) |
| ("rdl_psub_ca" 0.00266 "areaCap" "rdl") |
| ("rdl_psub_cs" 0.0545 "parallelCap" "rdl" "diff") |
| ("rdl_psub_cp" 0.0062 "edgeCapacitance" "rdl") |
| ("rdl_nsub_ca" 0.00266) |
| ("rdl_nsub_cs" 0.0545) |
| ("rdl_nsub_cp" 0.0062) |
| ("rdl_nplus_ca" 0.00273) |
| ("rdl_nplus_cs" 0.0543) |
| ("rdl_nplus_cp" 0.00635) |
| ("rdl_pplus_ca" 0.00273) |
| ("rdl_pplus_cs" 0.0543) |
| ("rdl_pplus_cp" 0.00635) |
| ("rdl_poly_ca" 0.00279) |
| ("rdl_poly_cs" 0.054) |
| ("rdl_poly_cp" 0.00648) |
| ("rdl_li1_ca" 0.00289) |
| ("rdl_li1_cs" 0.0537) |
| ("rdl_li1_cp" 0.0067) |
| ("rdl_met1_ca" 0.00306) |
| ("rdl_met1_cs" 0.0531) |
| ("rdl_met1_cp" 0.00705) |
| ("rdl_met2_ca" 0.00324) |
| ("rdl_met2_cs" 0.0526) |
| ("rdl_met2_cp" 0.00743) |
| ("rdl_met3_ca" 0.00368) |
| ("rdl_met3_cs" 0.0513) |
| ("rdl_met3_cp" 0.00829) |
| ("rdl_met4_ca" 0.00425) |
| ("rdl_met4_cs" 0.05) |
| ("rdl_met4_cp" 0.00936) |
| ("rdl_met5_ca" 0.00425) |
| ("rdl_met5_cs" 0.05) |
| ("rdl_met5_cp" 0.0117) |
| ("tc1rsn" 0.001422) |
| ("tc2rsn" 6.569e-07) |
| ("tc1rsp" 0.001259) |
| ("tc2rsp" 2.204e-06) |
| ("tc1rsn_h" 0.001405) |
| ("tc2rsn_h" 4.233e-07) |
| ("tc1rsp_h" 0.001369) |
| ("tc2rsp_h" 1.476e-06) |
| ("tc1rsnw" 0.001483) |
| ("tc2rsnw" 7.824e-06) |
| ("tc1rsgpw" 0.00081) |
| ("tc2rsgpw" 7.84e-07) |
| ("tc1rsgpu" 0.0008916) |
| ("tc2rsgpu" 8.443e-07) |
| ("tc1rl1" 0.0006045) |
| ("tc2rl1" -3.693e-07) |
| ("tc1rm1" 0.003179) |
| ("tc2rm1" 3.094e-07) |
| ("tc1rm2" 0.003161) |
| ("tc2rm2" -7.272e-07) |
| ("tc1rm3" 0.003424) |
| ("tc2rm3" -7.739e-07) |
| ("tc1rm4" 0.003424) |
| ("tc2rm4" -7.739e-07) |
| ("tc1rm5" 0.0035) |
| ("tc2rm5" -7.5e-07) |
| ("tc1rcn" 0.0002254) |
| ("tc2rcn" -1.038e-06) |
| ("tc1rcp" 0.000525) |
| ("tc2rcp" 3.544e-06) |
| ("tc1rcgp" 0.001249) |
| ("tc2rcgp" -6.647e-06) |
| ("tc1rcl1" 0.001067) |
| ("tc2rcl1" -5.324e-06) |
| ("tc1rvia" 0.001081) |
| ("tc2rvia" -1.903e-07) |
| ("tc1rvia2" 0.002366) |
| ("tc2rvia2" -1.025e-05) |
| ("tc1rvia3" 0.002366) |
| ("tc2rvia3" -1.025e-05) |
| ("tc1rvia4" 0.00177) |
| ("tc2rvia4" -1.6e-07) |
| ("tc1rrdlcon" 3.930e-3) |
| ("tc2rrdlcon" 0.0) |
| ("tref_mrdn" 30.0) |
| ("tref_mrdp" 30.0) |
| ("tref_mrdn_hv" 30.0) |
| ("tref_mrdp_hv" 30.0) |
| ("tref_mrp1" 30.0) |
| ("tref_mrnw" 30.0) |
| ("tref_mrl1" 30.0) |
| ("tref_mrm1" 30.0) |
| ("tref_mrm2" 30.0) |
| ("tref_mrm3" 30.0) |
| ("tref_mrm4" 30.0) |
| ("tref_mrm5" 30.0) |
| ("tref_mrcn" 30.0) |
| ("tref_mrcp" 30.0) |
| ("tref_mrcp1" 30.0) |
| ("tref_mrcl1" 30.0) |
| ("tref_mrcvia" 30.0) |
| ("tref_mrcvia2" 30.0) |
| ("tref_mrcvia3" 30.0) |
| ("tref_mrcvia4" 30.0) |
| ("tref_mrcrdlcon" 25.0) |
| |
| ("r0hrpoly_16_2" 32.54) |
| ("r0hrpoly_1_1" 324.2) |
| ("r0hrpoly_2_1" 213.5) |
| ("r0hrpoly_4_1" 117.0) |
| ("r0hrpoly_8_2" 62.46) |
| ("r0hrpoly_16_2_min" 11.11) |
| ("r0hrpoly_1_1_min" 69.37) |
| ("r0hrpoly_2_1_min" 72.82) |
| ("r0hrpoly_4_1_min" 40.0) |
| ("r0hrpoly_8_2_min" 21.29) |
| ("r0hrpoly_16_2_max" 53.98) |
| ("r0hrpoly_1_1_max" 579.0) |
| ("r0hrpoly_2_1_max" 354.1) |
| ("r0hrpoly_4_1_max" 194.0) |
| ("r0hrpoly_8_2_max" 103.6) |
| ("wxr1hrpoly_1_1" 338.205) |
| ("wxr1hrpoly_2_1" 323.265) |
| ("wxr1hrpoly_4_1" 315.84) |
| ("wxr1hrpoly_8_2" 316.635) |
| ("wxr1hrpoly_16_2" 316.9836) |
| ("wxr1uhrpoly_1_1" 5714.28) |
| ("wxr1uhrpoly_2_1" 2898.55) |
| ("wxr1uhrpoly_4_1" 1418.44) |
| ("wxr1uhrpoly_8_2" 701.75) |
| ("wxr1uhrpoly_16_2" 349.04) |
| |
| |
| |
| |
| ;; electromigration parameters (max values) |
| ;;reliability spec table 8.33d Javg_max mA/um2 |
| ;("el1" "currentDensity" "li1") ; no restriction |
| ("em1" 2.8 "currentDensity" "met1") |
| ("em2" 2.8 "currentDensity" "met2") |
| ("em3" 6.8 "currentDensity" "met3") |
| ("em4" 6.8 "currentDensity" "met4") |
| ("em5" 10.17 "currentDensity" "met5") |
| ;;reliability spec table 8.26d Iavg_max mA/um |
| ;("el1c" "currentDensity" "licon1") ; no restriction |
| ("em1c" 13.5 "currentDensity" "mcon") |
| ("em2c" 13.5 "currentDensity" "via" ) |
| ("em3c" 13.5 "currentDensity" "via2") |
| ("em4c" 13.5 "currentDensity" "via3") |
| ("em5c" 9.0 "currentDensity" "via4") |
| )); end setRules |
| |
| (TECHsetRules |
| '(("camimc" 2.00) |
| ("cpmimc" 0.19) |
| )) |
