blob: 1fe28c9c1e0c61a0408f93cb8c558dc557355f4c [file] [log] [blame]
*** P+ Poly Preres Corner Parameters ***
.param
+rpoly_hp_var_mult = 5
+rpoly_hp_var = 0.125
+rpoly_hp2K_var_mult = 0.15
+camimc= 1.778e-15 $Units: F/um^2
+cpmimc = 0.03e-15 $Units: F/um
+cvpp_cor = 0.862
+cvpp3_cor = 0.7
+cvpp4_cor = 0.7
+cvpp5_cor = 0.7
+cm3m2_vpp = 0.446 $ This is with S8D/S8T variation
+c0m5m4_vpp = 0.804
+c1m5m4_vpp = 0.766
+c0m5m4_vpp0p4shield = 0.6046
+c1m5m4_vpp0p4shield = 0.766
+c0m4m3_vpp = 0.804
+c1m4m3_vpp = 0.766
+c0m5m3_vpp = 0.803
+c1m5m3_vpp = 0.774
+cpl2s_vpp = 0.760
+cpl2s_vpp0p4shield = 0.7511
+cli2s_vpp = 0.794
+xcmvpp8p6x7p9_m3_lishield_cor = 0.810
+xcmvpp4p4x4p6_m3_lishield_cor = 0.775
+xcmvpp11p5x11p7_m3_lishield_cor = 0.855
+xcmvpp8p6x7p9_cor = 0.827
+xcmvpp4p4x4p6_cor = 0.796
+xcmvpp11p5x11p7_cor = 0.868
+xcmvpp1p8x1p8_cor = 0.786
+xcmvpp8p6x7p9_lishield_cor = 0.827
+xcmvpp4p4x4p6_lishield_cor = 0.796
+xcmvpp11p5x11p7_lishield_cor = 0.868
+xcmvpp8p6x7p9_m3shield_cor = 0.846
+xcmvpp4p4x4p6_m3shield_cor = 0.816
+xcmvpp11p5x11p7_m3shield_cor = 0.885
+xcmvpp1p8x1p8_m3shield_cor = 0.863
+xcmvpp11p5x11p7_m5shield_cor = 0.856
+xcmvpp11p5x11p7_polym5shield_cor = 0.856
+xcmvpp11p5x11p7_lim5shield_cor = 0.856
+xcmvpp8p6x7p9_m3_lim5shield_cor = 0.792
+xcmvpp6p8x6p1_cor = 0.8
+xcmvpp11p5x11p7_m4shield_cor = 0.8
+xcmvpp_atlas_cor = 0.8
+xcmvpp_hd5_cor = 0.8
* To use S8Q/S8P variation for M3-to-M2 cap, add the following line (remove *) in your simulation deck to overwrite parameter:
*.param cm3m2_vpp = 0.723