| * |
| * Techgen(tm) Tech file Generator. |
| * FullVersion : 19.1.3-s062 |
| * BuildNumber : 062 |
| * IRBuildNumber : 062 |
| * VersionDate : Tue Jul 23 02:42:20 PDT 2019 |
| * Bitness : 64-bit |
| * |
| * |
| process s130 |
| * |
| *| temp_reference 30 |
| *| auto_reorder_off true |
| * |
| deposition |
| *step # material p/n name thick diel. side bot angle |
| step 1 substrate FOX 0.2231 3.9 |
| step 1 substrate N_SOURCE_DRAIN 0.1031 3.9 |
| step 2 metal ply 0.2 s,w:0.21,0.15,0,-0.0075:0.21,1.5,0,-0.0075:2.1,0.15,0,-0.0075:2.1,1.5,0,-0.0075 0,0 |
| step 3 dielectric n IOX 0 3.9 sidewall(0.006) 0 auto_angle |
| step 4 dielectric n SPNIT 0.1525 7.5 sidewall(0.0431) 0 auto_angle |
| step 5 dielectric p PSG 0.1161 3.9 |
| step 6 metal li 0.115 s,w:0.17,0.17,0.0115,0.0185:0.17,1.7,0.0115,0.0185:1.7,0.17,0.0115,0.0185:1.7,1.7,0.0115,0.0185 0.0043,-0.0043 |
| step 7 dielectric n LINT 0.0825 7.3 sidewall(0.066813) 0.0825 auto_angle |
| step 8 dielectric p NILD2 0.1245 3.9 |
| step 9 metal m1 0.39 s,w:0.14,0.14,0.0103,-0.007:0.14,1.4,0.0103,-0.007:1.4,0.14,0.0103,-0.007:1.4,1.4,0.0103,-0.007 0.0027,-0.0027 |
| step 10 dielectric p NILD3 0.11 4.3 |
| step 11 metal m2 0.39 s,w:0.14,0.14,0.0103,-0.007:0.14,1.4,0.0103,-0.007:1.4,0.14,0.0103,-0.007:1.4,1.4,0.0103,-0.007 0.0027,-0.0027 |
| step 12 dielectric p NILD4 0.2592 4.2 |
| step 13 metal m3 0.925 s,w:0.3,0.3,0.014,0.02:0.3,3,0.014,0.02:3,0.3,0.014,0.02:3,3,0.014,0.02 0,0 |
| step 14 dielectric p NILD5 0.18 4.1 |
| step 15 metal m4 0.925 s,w:0.3,0.3,0.014,0.02:0.3,3,0.014,0.02:3,0.3,0.014,0.02:3,3,0.014,0.02 0,0 |
| step 16 dielectric p NILD6 0.296 4.1 |
| step 17 metal m5 1.386 s,w:1.6,0.8,0,0.04:1.6,8,0,0.04:16,0.8,0,0.04:16,8,0,0.04 0.0291,-0.0291 |
| step 18 dielectric n TOPOX 0.0769 3.9 sidewall(0.059747) 0 auto_angle |
| step 19 dielectric n TOPNIT 0.4318 7.5 sidewall(0.506454) 0.4534 auto_angle |
| step 20 dielectric p PI1 3.2453 3.5 |
| step 21 metal rdl 5 s,w:5,10,0,0.5:5,100,0,0.5:50,10,0,0.5:50,100,0,0.5 0,0 |
| step 22 dielectric p PI2 1 2.95 |
| step 23 dielectric p MOLD 40 3.6 |
| step 24 dielectric p air 40 1 |
| enddeposition |
| |
| metal_variations auto_comb |
| layer ply w 0.15 |
| layer ply s 0.21 |
| layer li w 0.17 |
| layer li s 0.17 |
| layer m1 w 0.14 |
| layer m1 s 0.14 |
| layer m2 w 0.14 |
| layer m2 s 0.14 |
| layer m3 w 0.3 |
| layer m3 s 0.3 |
| layer m4 w 0.3 |
| layer m4 s 0.3 |
| layer m5 w 0.8 |
| layer m5 s 1.6 |
| layer rdl w 10 |
| layer rdl s 5 |
| endmetal_variations |
| |
| endprocess |
| |
