| * |
| * Techgen(tm) Tech file Generator. |
| * FullVersion : 19.1.3-s062 |
| * BuildNumber : 062 |
| * IRBuildNumber : 062 |
| * VersionDate : Tue Jul 23 02:42:20 PDT 2019 |
| * Bitness : 64-bit |
| * |
| * |
| process s130 |
| * |
| *| temp_reference 30 |
| *| auto_reorder_off true |
| * |
| deposition |
| *step # material p/n name thick diel. side bot angle |
| step 1 substrate FOX 0.254 3.9 |
| step 1 substrate N_SOURCE_DRAIN 0.134 3.9 |
| step 2 metal ply 0.194 s,w:0.21,0.15,0,-0.04235:0.21,1.5,0,-0.04235:2.1,0.15,0,-0.04235:2.1,1.5,0,-0.04235 0,0 |
| step 3 dielectric n IOX 0 3.9 sidewall(0.006) 0 auto_angle |
| step 4 dielectric n SPNIT 0.1456 7.5 sidewall(0.0467) 0 auto_angle |
| step 5 dielectric p PSG 0.1714 3.9 |
| step 6 metal li 0.1105 s,w:0.17,0.17,0.008,0.0015:0.17,1.7,0.008,0.0015:1.7,0.17,0.008,0.0015:1.7,1.7,0.008,0.0015 0.0041,-0.0041 |
| step 7 dielectric n LINT 0.0803 7.3 sidewall(0.065121) 0.0803 auto_angle |
| step 8 dielectric p NILD2 0.1706 3.9 |
| step 9 metal m1 0.3811 s,w:0.14,0.14,0.0072,-0.02825:0.14,1.4,0.0072,-0.02825:1.4,0.14,0.0072,-0.02825:1.4,1.4,0.0072,-0.02825 0,0 |
| step 10 dielectric p NILD3 0.1582 4.3 |
| step 11 metal m2 0.3811 s,w:0.14,0.14,0.0072,-0.02825:0.14,1.4,0.0072,-0.02825:1.4,0.14,0.0072,-0.02825:1.4,1.4,0.0072,-0.02825 0,0 |
| step 12 dielectric p NILD4 0.3074 4.2 |
| step 13 metal m3 0.901 s,w:0.3,0.3,0.0212,-0.03525:0.3,3,0.0212,-0.03525:3,0.3,0.0212,-0.03525:3,3,0.0212,-0.03525 0,0 |
| step 14 dielectric p NILD5 0.2433 3.9 |
| step 15 metal m4 0.901 s,w:0.3,0.3,0.0112,-0.03525:0.3,3,0.0112,-0.03525:3,0.3,0.0112,-0.03525:3,3,0.0112,-0.03525 0,0 |
| step 16 dielectric p NILD6 0.3584 4.1 |
| step 17 metal m5 1.3482 s,w:1.6,0.8,0,-0.1045:1.6,8,0,-0.1045:16,0.8,0,-0.1045:16,8,0,-0.1045 0.0283,-0.0283 |
| step 18 dielectric n TOPOX 0.0808 3.9 sidewall(0.062845) 0 auto_angle |
| step 19 dielectric n TOPNIT 0.4643 7.5 sidewall(0.481076) 0.4307 auto_angle |
| step 20 dielectric p PI1 3.6267 3.5 |
| step 21 metal rdl 4.7 s,w:5,10,0,-0.35:5,100,0,-0.35:50,10,0,-0.35:50,100,0,-0.35 0,0 |
| step 22 dielectric p PI2 1.75 2.95 |
| step 23 dielectric p MOLD 40 3.6 |
| step 24 dielectric p air 40 1 |
| enddeposition |
| |
| metal_variations auto_comb |
| layer ply w 0.15 |
| layer ply s 0.21 |
| layer li w 0.17 |
| layer li s 0.17 |
| layer m1 w 0.14 |
| layer m1 s 0.14 |
| layer m2 w 0.14 |
| layer m2 s 0.14 |
| layer m3 w 0.3 |
| layer m3 s 0.3 |
| layer m4 w 0.3 |
| layer m4 s 0.3 |
| layer m5 w 0.8 |
| layer m5 s 1.6 |
| layer rdl w 10 |
| layer rdl s 5 |
| endmetal_variations |
| |
| endprocess |
| |
